id	sid	eid	entity	type
aiti-369	2	1	2	CARDINAL
aiti-369	2	2	4	CARDINAL
aiti-369	2	3	2017	DATE
aiti-369	4	1	130 132 130	CARDINAL
aiti-369	4	2	poonam yadav	PERSON
aiti-369	4	3	dong bok lee * school	PERSON
aiti-369	4	4	sungkyunkwan university	ORG
aiti-369	4	5	16419	DATE
aiti-369	4	6	south korea	GPE
aiti-369	5	1	09	CARDINAL
aiti-369	5	2	october 2016	DATE
aiti-369	5	3	november 2016	DATE
aiti-369	5	4	30	CARDINAL
aiti-369	5	5	november 2016	DATE
aiti-369	5	6	10	CARDINAL
aiti-369	6	1	10tmc	CARDINAL
aiti-369	6	2	700	CARDINAL
aiti-369	6	3	800	CARDINAL
aiti-369	6	4	30	CARDINAL
aiti-369	6	5	50	DATE
aiti-369	7	1	10tmc	CARDINAL
aiti-369	10	1	1	CARDINAL
aiti-369	11	1	1-3	CARDINAL
aiti-369	12	1	4	CARDINAL
aiti-369	14	1	10	CARDINAL
aiti-369	14	2	700	CARDINAL
aiti-369	14	3	30-70	PERCENT
aiti-369	16	1	2	CARDINAL
aiti-369	16	2	9	CARDINAL
aiti-369	18	1	99%	PERCENT
aiti-369	18	2	1500 mm	QUANTITY
aiti-369	18	3	150 mm	QUANTITY
aiti-369	18	4	0.5 mm	QUANTITY
aiti-369	18	5	99%	PERCENT
aiti-369	18	6	2	CARDINAL
aiti-369	19	1	1.33	CARDINAL
aiti-369	19	2	10	CARDINAL
aiti-369	19	3	4.9	CARDINAL
aiti-369	19	4	10	CARDINAL
aiti-369	20	1	1.88 mass%	QUANTITY
aiti-369	20	2	10	CARDINAL
aiti-369	21	1	9	CARDINAL
aiti-369	22	1	10tmc	CARDINAL
aiti-369	22	2	10x10x2 mm 3	QUANTITY
aiti-369	23	1	700	CARDINAL
aiti-369	23	2	800	CARDINAL
aiti-369	23	3	30	CARDINAL
aiti-369	23	4	50	DATE
aiti-369	23	5	70	DATE
aiti-369	24	1	40	CARDINAL
aiti-369	24	2	100 ma	QUANTITY
aiti-369	26	1	100 n	QUANTITY
aiti-369	26	2	5	CARDINAL
aiti-369	26	3	sec	ORG
aiti-369	26	4	more than 5	CARDINAL
aiti-369	27	1	3	CARDINAL
aiti-369	28	1	1	CARDINAL
aiti-369	28	2	70 h. fig	DATE
aiti-369	29	1	1	CARDINAL
aiti-369	29	2	70	CARDINAL
aiti-369	29	3	10	CARDINAL
aiti-369	30	1	2	CARDINAL
aiti-369	30	2	900 °	QUANTITY
aiti-369	30	3	30	CARDINAL
aiti-369	30	4	50	CARDINAL
aiti-369	30	5	70	CARDINAL
aiti-369	30	6	10	CARDINAL
aiti-369	30	7	30	CARDINAL
aiti-369	30	8	50	CARDINAL
aiti-369	30	9	70	CARDINAL
aiti-369	30	10	2	CARDINAL
aiti-369	30	11	4	CARDINAL
aiti-369	30	12	2017	DATE
aiti-369	31	1	130 132	CARDINAL
aiti-369	31	2	100µm	CARDINAL
aiti-369	31	3	100µm	CARDINAL
aiti-369	31	4	20µm	CARDINAL
aiti-369	31	5	20µm	CARDINAL
aiti-369	31	6	20µm	CARDINAL
aiti-369	31	7	50	CARDINAL
aiti-369	31	8	30	CARDINAL
aiti-369	31	9	10tmc	DATE
aiti-369	34	1	2	CARDINAL
aiti-369	34	2	10tmc	CARDINAL
aiti-369	35	1	10tmc	CARDINAL
aiti-369	35	2	900 °	QUANTITY
aiti-369	35	3	70	CARDINAL
aiti-369	37	1	3	CARDINAL
aiti-369	37	2	10tmc	CARDINAL
aiti-369	39	1	fig	ORG
aiti-369	40	1	3	CARDINAL
aiti-369	40	2	ma-trix	PERSON
aiti-369	40	3	10	CARDINAL
aiti-369	40	4	70	CARDINAL
aiti-369	40	5	700 °	QUANTITY
aiti-369	40	6	800 °	QUANTITY
aiti-369	40	7	900 °	QUANTITY
aiti-369	40	8	4	CARDINAL
aiti-369	40	9	900 °	QUANTITY
aiti-369	40	10	30	CARDINAL
aiti-369	40	11	50	CARDINAL
aiti-369	40	12	70	CARDINAL
aiti-369	40	13	10	CARDINAL
aiti-369	40	14	30	CARDINAL
aiti-369	40	15	50	CARDINAL
aiti-369	40	16	70	DATE
aiti-369	41	1	4	CARDINAL
aiti-369	41	2	10tmc	CARDINAL
aiti-369	41	3	30	CARDINAL
aiti-369	41	4	50	DATE
aiti-369	41	5	70	CARDINAL
aiti-369	43	1	tio2	GPE
aiti-369	44	1	340 μm	QUANTITY
aiti-369	45	1	4(a	TIME
aiti-369	45	2	350 μm	QUANTITY
aiti-369	46	1	400 μm	QUANTITY
aiti-369	47	1	125 μm	MONEY
aiti-369	48	1	170 μm	MONEY
aiti-369	49	1	190 μm	MONEY
aiti-369	49	2	4(f	CARDINAL
aiti-369	50	1	10	CARDINAL
aiti-369	54	1	fig	ORG
aiti-369	55	1	5	CARDINAL
aiti-369	55	2	10tmc	CARDINAL
aiti-369	55	3	700 °	QUANTITY
aiti-369	55	4	70	CARDINAL
aiti-369	55	5	7 μm-thicks	QUANTITY
aiti-369	56	1	5(a	CARDINAL
aiti-369	58	1	4	CARDINAL
aiti-369	59	1	fig	ORG
aiti-369	60	1	5	CARDINAL
aiti-369	60	2	10	CARDINAL
aiti-369	60	3	700 °	QUANTITY
aiti-369	60	4	70	CARDINAL
aiti-369	60	5	10tmc	CARDINAL
aiti-369	61	1	6	CARDINAL
aiti-369	65	1	6	CARDINAL
aiti-369	65	2	10	CARDINAL
aiti-369	65	3	2	CARDINAL
aiti-369	65	4	4	CARDINAL
aiti-369	65	5	2017	DATE
aiti-369	66	1	130	CARDINAL
aiti-369	73	1	4.	CARDINAL
aiti-369	73	2	10tmc	CARDINAL
aiti-369	73	3	700	CARDINAL
aiti-369	73	4	800	CARDINAL
aiti-369	73	5	70	CARDINAL
aiti-369	75	1	70	CARDINAL
aiti-369	76	1	30	CARDINAL
aiti-369	76	2	70	CARDINAL
aiti-369	77	1	national research foundation	ORG
aiti-369	77	2	korea	GPE
aiti-369	77	3	2016k2a9a1a01952060	CARDINAL
aiti-369	78	1	1	CARDINAL
aiti-369	78	2	m. yamada	PERSON
aiti-369	78	3	japan	GPE
aiti-369	78	4	213	CARDINAL
aiti-369	79	1	8-15, 1996	DATE
aiti-369	80	1	2	CARDINAL
aiti-369	80	2	m. peters	PERSON
aiti-369	80	3	j. hemptenmacher	PERSON
aiti-369	80	4	j. kumpfert	PERSON
aiti-369	80	5	germany	GPE
aiti-369	80	6	wiley-vch	ORG
aiti-369	81	1	1-36, 2003	DATE
aiti-369	82	1	3	CARDINAL
aiti-369	82	2	s. r. seagle	PERSON
aiti-369	82	3	the usa titanium industry	ORG
aiti-369	82	4	1995	DATE
aiti-369	82	5	213	CARDINAL
aiti-369	83	1	1-7, 1996	DATE
aiti-369	84	1	4	CARDINAL
aiti-369	84	2	s. abkowitz	PERSON
aiti-369	84	3	p. f. weihrauch	PERSON
aiti-369	84	4	s. m. abkowitz	PERSON
aiti-369	84	5	h. l. heussi	PERSON
aiti-369	85	1	47	DATE
aiti-369	86	1	40-41	CARDINAL
aiti-369	87	1	5	CARDINAL
aiti-369	87	2	32	DATE
aiti-369	88	1	1-16, 1997	CARDINAL
aiti-369	89	1	6	CARDINAL
aiti-369	89	2	f. h.	PERSON
aiti-369	89	3	1995	DATE
aiti-369	90	1	7	CARDINAL
aiti-369	90	2	t. yamamoto	PERSON
aiti-369	90	3	a. otsuki	PERSON
aiti-369	90	4	k. ishihara	PERSON
aiti-369	90	5	239	CARDINAL
aiti-369	90	6	239-240	CARDINAL
aiti-369	91	1	8	CARDINAL
aiti-369	91	2	d. b. lee	PERSON
aiti-369	91	3	y. c. lee	PERSON
aiti-369	91	4	d. j. kim	PERSON
aiti-369	92	1	56	DATE
aiti-369	93	1	177-189	CARDINAL
aiti-369	94	1	9	CARDINAL
aiti-369	94	2	b. j. choi	PERSON
aiti-369	94	3	y. j. kim	PERSON
aiti-369	95	1	52	DATE
aiti-369	96	1	1926-1930	DATE
aiti-369	96	2	2011	DATE
aiti-369	97	1	http://link.springer.com/journal/11085 http://link.springer.com/journal/11085	PRODUCT