id	sid	eid	entity	type
aiti-420	2	1	2	CARDINAL
aiti-420	2	2	3	CARDINAL
aiti-420	2	3	2016	DATE
aiti-420	3	1	95	CARDINAL
aiti-420	3	2	98 95	CARDINAL
aiti-420	3	3	rui-wei	PERSON
aiti-420	3	4	national dong-hwa university	ORG
aiti-420	3	5	hualien	GPE
aiti-420	3	6	taiwan	GPE
aiti-420	3	7	21	CARDINAL
aiti-420	3	8	march 2016	DATE
aiti-420	3	9	28 may 2016	DATE
aiti-420	3	10	june 2016	DATE
aiti-420	3	11	nh2-nh2	ORG
aiti-420	4	1	80	CARDINAL
aiti-420	6	1	90 min	QUANTITY
aiti-420	6	2	cuin1-xgaxse2	ORG
aiti-420	7	1	90 min	TIME
aiti-420	7	2	up to 80%	PERCENT
aiti-420	7	3	350	CARDINAL
aiti-420	7	4	about 3.59	CARDINAL
aiti-420	8	1	1	CARDINAL
aiti-420	10	1	cuins2	ORG
aiti-420	10	2	cuinse2	ORG
aiti-420	10	3	cu(in,	GPE
aiti-420	10	4	1	CARDINAL
aiti-420	11	1	ii-vi	PERSON
aiti-420	12	1	2.26~2.5	CARDINAL
aiti-420	12	2	larger than 3.5	CARDINAL
aiti-420	13	1	2	CARDINAL
aiti-420	14	1	up to 19.9%	PERCENT
aiti-420	14	2	the cuin1-xgaxse2	ORG
aiti-420	14	3	3	CARDINAL
aiti-420	16	1	cuin1-xgaxse2	ORG
aiti-420	16	2	up to 18.6%	PERCENT
aiti-420	17	1	4	CARDINAL
aiti-420	19	1	zno	ORG
aiti-420	19	2	cuin1	ORG
aiti-420	19	3	absorp	GPE
aiti-420	20	1	ehp	ORG
aiti-420	23	1	30-50	CARDINAL
aiti-420	24	1	many years	DATE
aiti-420	25	1	5	CARDINAL
aiti-420	26	1	cuin1-xgaxse2	ORG
aiti-420	27	1	nh2-nh2	PERSON
aiti-420	28	1	2	CARDINAL
aiti-420	29	1	zinc su lfate	PERSON
aiti-420	31	1	2	CARDINAL
aiti-420	31	2	3	CARDINAL
aiti-420	31	3	2016	DATE
aiti-420	32	1	95	CARDINAL
aiti-420	32	2	0.1	CARDINAL
aiti-420	32	3	0.3	CARDINAL
aiti-420	32	4	1.5	CARDINAL
aiti-420	33	1	9	CARDINAL
aiti-420	33	2	80	CARDINAL
aiti-420	33	3	50	CARDINAL
aiti-420	36	1	every 30 minutes	TIME
aiti-420	36	2	30	CARDINAL
aiti-420	38	1	300	CARDINAL
aiti-420	38	2	veeco dektak 3 st	PERSON
aiti-420	40	1	xrd	ORG
aiti-420	40	2	max-2500	DATE
aiti-420	40	3	1.5406å	CARDINAL
aiti-420	40	4	2θ	CARDINAL
aiti-420	40	5	20 o to 60	DATE
aiti-420	41	1	ical p ropert ies	ORG
aiti-420	41	2	o	DATE
aiti-420	41	3	jasco v-650 spectrophotometer	PERSON
aiti-420	43	1	3	CARDINAL
aiti-420	44	1	1	CARDINAL
aiti-420	44	2	300	CARDINAL
aiti-420	44	3	1	CARDINAL
aiti-420	45	1	two	CARDINAL
aiti-420	45	2	one	CARDINAL
aiti-420	46	1	6	CARDINAL
aiti-420	47	1	göde et al	PERSON
aiti-420	47	2	60–70	CARDINAL
aiti-420	47	3	80	CARDINAL
aiti-420	48	1	7	CARDINAL
aiti-420	50	1	79	CARDINAL
aiti-420	51	1	25 o to 30	DATE
aiti-420	52	1	three	CARDINAL
aiti-420	52	2	111	CARDINAL
aiti-420	52	3	220	CARDINAL
aiti-420	52	4	311	CARDINAL
aiti-420	52	5	200	CARDINAL
aiti-420	52	6	311	CARDINAL
aiti-420	54	1	1	CARDINAL
aiti-420	54	2	90 min	TIME
aiti-420	54	3	300	CARDINAL
aiti-420	54	4	1h	CARDINAL
aiti-420	54	5	1	CARDINAL
aiti-420	55	1	close to	CARDINAL
aiti-420	55	2	1	CARDINAL
aiti-420	56	1	1	CARDINAL
aiti-420	56	2	atom %	PERCENT
aiti-420	56	3	50.4	CARDINAL
aiti-420	56	4	atom %	PERCENT
aiti-420	56	5	49.6	CARDINAL
aiti-420	56	6	50.2	CARDINAL
aiti-420	57	1	2	CARDINAL
aiti-420	57	2	300	CARDINAL
aiti-420	57	3	1	CARDINAL
aiti-420	57	4	2	CARDINAL
aiti-420	57	5	3	CARDINAL
aiti-420	57	6	2016	DATE
aiti-420	58	1	95 98 97	CARDINAL
aiti-420	58	2	taeti	DATE
aiti-420	58	3	2	CARDINAL
aiti-420	59	1	two	CARDINAL
aiti-420	59	2	first	ORDINAL
aiti-420	59	3	124	CARDINAL
aiti-420	59	4	252	CARDINAL
aiti-420	59	5	30	CARDINAL
aiti-420	60	1	second	ORDINAL
aiti-420	60	2	352	CARDINAL
aiti-420	60	3	750	CARDINAL
aiti-420	60	4	120 to 180 min	TIME
aiti-420	60	5	second	ORDINAL
aiti-420	61	1	150 min	QUANTITY
aiti-420	62	1	2	CARDINAL
aiti-420	63	1	30 min	QUANTITY
aiti-420	64	1	30	CARDINAL
aiti-420	65	1	180 min	DATE
aiti-420	65	2	up to 94	CARDINAL
aiti-420	66	1	2	CARDINAL
aiti-420	66	2	124	CARDINAL
aiti-420	66	3	160	CARDINAL
aiti-420	66	4	249	CARDINAL
aiti-420	66	5	358 750	CARDINAL
aiti-420	66	6	87 30	DATE
aiti-420	66	7	94	CARDINAL
aiti-420	67	1	3	CARDINAL
aiti-420	67	2	300 800	CARDINAL
aiti-420	68	1	70 ~ 80%	PERCENT
aiti-420	68	2	visib le wavelength	ORG
aiti-420	69	1	85%	PERCENT
aiti-420	69	2	425	CARDINAL
aiti-420	69	3	90 min	QUANTITY
aiti-420	69	4	90 to 150	CARDINAL
aiti-420	69	5	400	CARDINAL
aiti-420	69	6	500	CARDINAL
aiti-420	71	1	80%	PERCENT
aiti-420	71	2	90 min	DATE
aiti-420	72	1	8	CARDINAL
aiti-420	74	1	3	CARDINAL
aiti-420	76	1	0.1	CARDINAL
aiti-420	76	2	nh2	ORG
aiti-420	76	3	9	CARDINAL
aiti-420	77	1	1/2	CARDINAL
aiti-420	78	1	o	DATE
aiti-420	80	1	2	CARDINAL
aiti-420	81	1	3	CARDINAL
aiti-420	82	1	greater than 3.5	CARDINAL
aiti-420	82	2	30	CARDINAL
aiti-420	82	3	10	CARDINAL
aiti-420	83	1	3	CARDINAL
aiti-420	84	1	150 180	CARDINAL
aiti-420	84	2	2.57 3.53	CARDINAL
aiti-420	84	3	3.30	CARDINAL
aiti-420	84	4	2	CARDINAL
aiti-420	84	5	3	CARDINAL
aiti-420	84	6	2016	DATE
aiti-420	85	1	95	CARDINAL
aiti-420	86	1	124	CARDINAL
aiti-420	86	2	30 min to 750	TIME
aiti-420	86	3	180 min	TIME
aiti-420	87	1	70 ~ 80%	PERCENT
aiti-420	88	1	2.57	CARDINAL
aiti-420	88	2	nh2-nh2	ORG
aiti-420	88	3	1.5	CARDINAL
aiti-420	88	4	t=80	NORP
aiti-420	88	5	90 min	DATE
aiti-420	88	6	cuin1-xgaxse2	ORG
aiti-420	89	1	1	CARDINAL
aiti-420	90	1	io	ORG
aiti-420	90	2	50.3:49.7	ORDINAL
aiti-420	91	1	2	CARDINAL
aiti-420	92	1	85%	PERCENT
aiti-420	92	2	425	CARDINAL
aiti-420	92	3	about 3.59	CARDINAL
aiti-420	93	1	1	CARDINAL
aiti-420	93	2	a. wei	PERSON
aiti-420	93	3	j. liu	PERSON
aiti-420	93	4	m. zhuang	PERSON
aiti-420	93	5	y. zhao	PERSON
aiti-420	93	6	16	CARDINAL
aiti-420	94	1	1478-1484	CARDINAL
aiti-420	94	2	december 2013	DATE
aiti-420	95	1	2	CARDINAL
aiti-420	95	2	b. g. streetman	PERSON
aiti-420	95	3	s. k. banerjee	PERSON
aiti-420	95	4	6th	ORDINAL
aiti-420	95	5	pearson prentice hall	ORG
aiti-420	95	6	new jersey	GPE
aiti-420	96	1	158-208	CARDINAL
aiti-420	96	2	2006	DATE
aiti-420	97	1	3	CARDINAL
aiti-420	97	2	i. repins	PERSON
aiti-420	97	3	m. a. contreras	PERSON
aiti-420	97	4	b. egaas	PERSON
aiti-420	97	5	c. dehart	PERSON
aiti-420	97	6	j. scharf	PERSON
aiti-420	97	7	c. l. perkins	PERSON
aiti-420	97	8	r. noufi	PERSON
aiti-420	97	9	19.9%	PERCENT
aiti-420	97	10	81.2%	PERCENT
aiti-420	97	11	16	CARDINAL
aiti-420	97	12	235, 2008	DATE
aiti-420	98	1	4	CARDINAL
aiti-420	98	2	r. n. bhattacharya	PERSON
aiti-420	98	3	k. ramanathan	PERSON
aiti-420	99	1	77	DATE
aiti-420	100	1	679-683	CARDINAL
aiti-420	101	1	5	CARDINAL
aiti-420	101	2	j. liu	PERSON
aiti-420	101	3	a. wei	PERSON
aiti-420	101	4	y. zhao	PERSON
aiti-420	102	1	588	CARDINAL
aiti-420	103	1	228	CARDINAL
aiti-420	103	2	2014	DATE
aiti-420	104	1	6	CARDINAL
aiti-420	104	2	l. chow	PERSON
aiti-420	105	1	474	CARDINAL
aiti-420	106	1	77-83, 2005	DATE
aiti-420	107	1	7	CARDINAL
aiti-420	107	2	f. göde	PERSON
aiti-420	107	3	c. umus	PERSON
aiti-420	107	4	m. zor	PERSON
aiti-420	107	5	j. cryst	PERSON
aiti-420	108	1	299	CARDINAL
aiti-420	109	1	136-141	CARDINAL
aiti-420	109	2	2007	DATE
aiti-420	110	1	8	CARDINAL
aiti-420	110	2	s. w. shin	PERSON
aiti-420	110	3	s. r. kang	PERSON
aiti-420	110	4	k. v. gurav	PERSON
aiti-420	110	5	j. h. yun	PERSON
aiti-420	110	6	j. h. moon	PERSON
aiti-420	110	7	j. y. lee	PERSON
aiti-420	110	8	j. h. kim	PERSON
aiti-420	110	9	85	DATE
aiti-420	111	1	2011	DATE
aiti-420	112	1	9	CARDINAL
aiti-420	112	2	s. w.	PERSON
aiti-420	112	3	g. l. agawane	PERSON
aiti-420	112	4	m. g. gang	PERSON
aiti-420	112	5	a. v. moholkar	PERSON
aiti-420	112	6	j. h. moon	PERSON
aiti-420	112	7	j. h. kim	PERSON
aiti-420	112	8	j. y. lee	PERSON
aiti-420	113	1	526	CARDINAL
aiti-420	114	1	25-30, 2012	DATE
aiti-420	115	1	10	CARDINAL
aiti-420	115	2	r. n. bhattacharya	PERSON
aiti-420	115	3	k. ramanathan	PERSON
aiti-420	115	4	l. gedvilas	PERSON
aiti-420	115	5	b. keyes	PERSON
aiti-420	115	6	cu(in	PRODUCT
aiti-420	115	7	j. phys	PERSON
aiti-420	117	1	66	DATE
aiti-420	118	1	1862-1864	DATE
aiti-420	118	2	2005	DATE