id	sid	eid	entity	type
aiti-4278	2	1	5	CARDINAL
aiti-4278	2	2	2, 2020	DATE
aiti-4278	3	1	76	CARDINAL
aiti-4278	3	2	chao-ching ho	PERSON
aiti-4278	4	1	eugene su	PERSON
aiti-4278	4	2	po-chieh li	PERSON
aiti-4278	4	3	matthew j. bolger	PERSON
aiti-4278	4	4	huan-ning	PERSON
aiti-4278	4	5	pan graduate institute of manufacturing technology	ORG
aiti-4278	4	6	national taipei university of technology	ORG
aiti-4278	4	7	taipei	GPE
aiti-4278	4	8	taiwan	GPE
aiti-4278	4	9	17	CARDINAL
aiti-4278	4	10	08 august 2019	DATE
aiti-4278	4	11	18	CARDINAL
aiti-4278	4	12	october 2019	DATE
aiti-4278	5	1	5 mm	QUANTITY
aiti-4278	6	1	five	CARDINAL
aiti-4278	6	2	10-100 μm	QUANTITY
aiti-4278	7	1	cnn	ORG
aiti-4278	8	1	100% and 97%	PERCENT
aiti-4278	9	1	cnn	ORG
aiti-4278	9	2	1	CARDINAL
aiti-4278	11	1	one	CARDINAL
aiti-4278	11	2	iec	ORG
aiti-4278	14	1	taiwanese	NORP
aiti-4278	15	1	taiwanese	NORP
aiti-4278	16	1	three	CARDINAL
aiti-4278	19	1	1980	DATE
aiti-4278	19	2	a. cornforth	PERSON
aiti-4278	19	3	c. james	PERSON
aiti-4278	19	4	1	CARDINAL
aiti-4278	21	1	2	CARDINAL
aiti-4278	23	1	5	CARDINAL
aiti-4278	23	2	2, 2020	DATE
aiti-4278	24	1	76	CARDINAL
aiti-4278	24	2	3	CARDINAL
aiti-4278	25	1	4	CARDINAL
aiti-4278	25	2	7	CARDINAL
aiti-4278	25	3	8	CARDINAL
aiti-4278	26	1	9	CARDINAL
aiti-4278	27	1	10	CARDINAL
aiti-4278	29	1	11	CARDINAL
aiti-4278	31	1	1	CARDINAL
aiti-4278	33	1	12	CARDINAL
aiti-4278	36	1	1	CARDINAL
aiti-4278	36	2	2 two	CARDINAL
aiti-4278	36	3	2	CARDINAL
aiti-4278	36	4	two	CARDINAL
aiti-4278	37	1	2	CARDINAL
aiti-4278	37	2	three	CARDINAL
aiti-4278	37	3	two	CARDINAL
aiti-4278	38	1	2.1	CARDINAL
aiti-4278	38	2	50 mm	QUANTITY
aiti-4278	38	3	cctv	ORG
aiti-4278	39	1	16	CARDINAL
aiti-4278	39	2	12	CARDINAL
aiti-4278	39	3	6.4 μm	QUANTITY
aiti-4278	40	1	5	CARDINAL
aiti-4278	40	2	2, 2020	DATE
aiti-4278	41	1	76	CARDINAL
aiti-4278	45	1	3	CARDINAL
aiti-4278	46	1	60 μm	QUANTITY
aiti-4278	48	1	fig	ORG
aiti-4278	49	1	3	CARDINAL
aiti-4278	49	2	2.2	CARDINAL
aiti-4278	49	3	second	ORDINAL
aiti-4278	49	4	ca1600-20μm	DATE
aiti-4278	49	5	four	CARDINAL
aiti-4278	49	6	four	CARDINAL
aiti-4278	50	1	four	CARDINAL
aiti-4278	50	2	fig.	DATE
aiti-4278	51	1	4	CARDINAL
aiti-4278	52	1	5(a	CARDINAL
aiti-4278	52	2	first	ORDINAL
aiti-4278	59	1	6	CARDINAL
aiti-4278	60	1	fig	ORG
aiti-4278	61	1	4	CARDINAL
aiti-4278	61	2	5	CARDINAL
aiti-4278	61	3	2, 2020	DATE
aiti-4278	62	1	76-83 79	PERCENT
aiti-4278	63	1	four	CARDINAL
aiti-4278	64	1	fig	ORG
aiti-4278	65	1	5	CARDINAL
aiti-4278	65	2	6	CARDINAL
aiti-4278	69	1	fig	ORG
aiti-4278	70	1	7	CARDINAL
aiti-4278	71	1	3	CARDINAL
aiti-4278	72	1	17	CARDINAL
aiti-4278	74	1	50	CARDINAL
aiti-4278	74	2	19-20	CARDINAL
aiti-4278	75	1	5	CARDINAL
aiti-4278	75	2	2, 2020	DATE
aiti-4278	76	1	76	CARDINAL
aiti-4278	78	1	3.1	CARDINAL
aiti-4278	79	1	8	CARDINAL
aiti-4278	80	1	1	CARDINAL
aiti-4278	80	2	50	CARDINAL
aiti-4278	80	3	224	CARDINAL
aiti-4278	80	4	7	CARDINAL
aiti-4278	80	5	64	DATE
aiti-4278	80	6	2	CARDINAL
aiti-4278	80	7	56	CARDINAL
aiti-4278	80	8	64 3	CARDINAL
aiti-4278	80	9	max	PERSON
aiti-4278	80	10	2	CARDINAL
aiti-4278	80	11	28	CARDINAL
aiti-4278	80	12	64 3 3	DATE
aiti-4278	80	13	256	CARDINAL
aiti-4278	80	14		DATE
aiti-4278	80	15	 × 3	LAW
aiti-4278	80	16	2	CARDINAL
aiti-4278	80	17	14	CARDINAL
aiti-4278	80	18	3	CARDINAL
aiti-4278	80	19	3,128	CARDINAL
aiti-4278	80	20	512	CARDINAL
aiti-4278	80	21		DATE
aiti-4278	80	22	 × 4	LAW
aiti-4278	80	23	2	CARDINAL
aiti-4278	80	24	7	CARDINAL
aiti-4278	80	25	256	CARDINAL
aiti-4278	80	26	256 1	CARDINAL
aiti-4278	80	27		DATE
aiti-4278	80	28	 × 6	LAW
aiti-4278	80	29	2	CARDINAL
aiti-4278	80	30	7	CARDINAL
aiti-4278	80	31	512	CARDINAL
aiti-4278	80	32	512	CARDINAL
aiti-4278	80	33	2048	CARDINAL
aiti-4278	80	34		DATE
aiti-4278	80	35	 × 3	LAW
aiti-4278	80	36	1	CARDINAL
aiti-4278	80	37	conv6	ORG
aiti-4278	81	1	1	CARDINAL
aiti-4278	81	2	1000	CARDINAL
aiti-4278	81	3	1	CARDINAL
aiti-4278	81	4	2 rmpnet-50	PRODUCT
aiti-4278	81	5	50	CARDINAL
aiti-4278	81	6	112×112× 3	DATE
aiti-4278	81	7	conv1 56 × 56	LAW
aiti-4278	81	8	7	CARDINAL
aiti-4278	81	9	64	DATE
aiti-4278	81	10	2	CARDINAL
aiti-4278	81	11	56	CARDINAL
aiti-4278	81	12	64 3	CARDINAL
aiti-4278	81	13	max	PERSON
aiti-4278	81	14	2	CARDINAL
aiti-4278	81	15	28	CARDINAL
aiti-4278	81	16	64 3 3	DATE
aiti-4278	81	17	256	CARDINAL
aiti-4278	81	18		DATE
aiti-4278	81	19	 × 3	LAW
aiti-4278	81	20	2	CARDINAL
aiti-4278	81	21	14	CARDINAL
aiti-4278	81	22	3	CARDINAL
aiti-4278	81	23	3,128	CARDINAL
aiti-4278	81	24	512	CARDINAL
aiti-4278	81	25		DATE
aiti-4278	81	26	 × 4	LAW
aiti-4278	81	27	2	CARDINAL
aiti-4278	81	28	7	CARDINAL
aiti-4278	81	29	256	CARDINAL
aiti-4278	81	30	256 1	CARDINAL
aiti-4278	81	31		DATE
aiti-4278	81	32	 × 6	LAW
aiti-4278	81	33	2	CARDINAL
aiti-4278	81	34	7	CARDINAL
aiti-4278	81	35	512	CARDINAL
aiti-4278	81	36	512	CARDINAL
aiti-4278	81	37	2048	CARDINAL
aiti-4278	83	1		DATE
aiti-4278	83	2	 × 3	LAW
aiti-4278	83	3	1	CARDINAL
aiti-4278	83	4	conv6 1	ORG
aiti-4278	83	5	6	DATE
aiti-4278	83	6	1	CARDINAL
aiti-4278	85	1	50	CARDINAL
aiti-4278	88	1	8	CARDINAL
aiti-4278	89	1	112	CARDINAL
aiti-4278	89	2	max	PERSON
aiti-4278	90	1	5	CARDINAL
aiti-4278	90	2	2, 2020	DATE
aiti-4278	91	1	76	CARDINAL
aiti-4278	92	1	9	CARDINAL
aiti-4278	92	2	3.2	CARDINAL
aiti-4278	95	1	9	CARDINAL
aiti-4278	98	1	two	CARDINAL
aiti-4278	99	1	first	ORDINAL
aiti-4278	99	2	50	CARDINAL
aiti-4278	100	1	five	CARDINAL
aiti-4278	101	1	64	CARDINAL
aiti-4278	101	2	0.001	CARDINAL
aiti-4278	101	3	0.0004	CARDINAL
aiti-4278	102	1	second	ORDINAL
aiti-4278	102	2	50	CARDINAL
aiti-4278	102	3	64	CARDINAL
aiti-4278	102	4	0.0001	CARDINAL
aiti-4278	102	5	0.0004	CARDINAL
aiti-4278	105	1	0	CARDINAL
aiti-4278	107	1		PERSON
aiti-4278	107	2	1	CARDINAL
aiti-4278	107	3	mse	ORG
aiti-4278	108	1	mse	ORG
aiti-4278	108	2	2 1 1	CARDINAL
aiti-4278	112	1	2	CARDINAL
aiti-4278	113	1	3.3	CARDINAL
aiti-4278	115	1	several 112	CARDINAL
aiti-4278	115	2	64	DATE
aiti-4278	118	1	5	CARDINAL
aiti-4278	118	2	2, 2020	DATE
aiti-4278	119	1	76	CARDINAL
aiti-4278	121	1	10	CARDINAL
aiti-4278	122	1	97% and 80%	PERCENT
aiti-4278	125	1	100% and 97%	PERCENT
aiti-4278	128	1	fig	ORG
aiti-4278	129	1	10	CARDINAL
aiti-4278	129	2	4	CARDINAL
aiti-4278	131	1	100%	PERCENT
aiti-4278	133	1	100% and 97%	PERCENT
aiti-4278	134	1	two	CARDINAL
aiti-4278	136	1	two	CARDINAL
aiti-4278	141	1	1	CARDINAL
aiti-4278	141	2	a. cornforth	PERSON
aiti-4278	141	3	c. james	PERSON
aiti-4278	141	4	ndt international	ORG
aiti-4278	141	5	13	CARDINAL
aiti-4278	141	6	1	CARDINAL
aiti-4278	142	1	15-17	CARDINAL
aiti-4278	142	2	february 1980	DATE
aiti-4278	143	1	5	CARDINAL
aiti-4278	143	2	2, 2020	DATE
aiti-4278	144	1	76-83 83	DATE
aiti-4278	145	1	2	CARDINAL
aiti-4278	145	2	c. c. kuo	PERSON
aiti-4278	145	3	optik-international journal	ORG
aiti-4278	145	4	125	CARDINAL
aiti-4278	145	5	1	CARDINAL
aiti-4278	146	1	196	CARDINAL
aiti-4278	146	2	january 2014	DATE
aiti-4278	147	1	3	CARDINAL
aiti-4278	147	2	c. c. kuo	PERSON
aiti-4278	147	3	y. r. chen	PERSON
aiti-4278	147	4	124	CARDINAL
aiti-4278	147	5	13	CARDINAL
aiti-4278	147	6	1485	CARDINAL
aiti-4278	147	7	july 2013	DATE
aiti-4278	148	1	4	CARDINAL
aiti-4278	148	2	r. ciobanu	PERSON
aiti-4278	148	3	d. rizescu	GPE
aiti-4278	148	4	c. rizescu ciprian	PERSON
aiti-4278	148	5	7	CARDINAL
aiti-4278	148	6	5	CARDINAL
aiti-4278	149	1	286	CARDINAL
aiti-4278	149	2	october 2017	DATE
aiti-4278	150	1	5	CARDINAL
aiti-4278	150	2	j. a.	PERSON
aiti-4278	150	3	r. bostelman	PERSON
aiti-4278	150	4	j. falco	PERSON
aiti-4278	150	5	51	DATE
aiti-4278	150	6	1	CARDINAL
aiti-4278	151	1	1-32	CARDINAL
aiti-4278	151	2	april 2018	DATE
aiti-4278	152	1	6	CARDINAL
aiti-4278	152	2	x. yang	PERSON
aiti-4278	152	3	y. t. lou	PERSON
aiti-4278	152	4	m. y. gao	PERSON
aiti-4278	152	5	g. j. ma	PERSON
aiti-4278	153	1	77	DATE
aiti-4278	153	2	18	CARDINAL
aiti-4278	154	1	23227-23244	DATE
aiti-4278	154	2	september 2018	DATE
aiti-4278	155	1	7	CARDINAL
aiti-4278	155	2	c. c. ho	PERSON
aiti-4278	155	3	t. r. tsai	PERSON
aiti-4278	155	4	9	CARDINAL
aiti-4278	155	5	1	CARDINAL
aiti-4278	156	1	45	CARDINAL
aiti-4278	156	2	april 2012	DATE
aiti-4278	157	1	8	CARDINAL
aiti-4278	157	2	c. c. ho	PERSON
aiti-4278	157	3	j. c. li	PERSON
aiti-4278	157	4	t. h. kuo	PERSON
aiti-4278	157	5	5, 347921	DATE
aiti-4278	157	6	january 2013	DATE
aiti-4278	158	1	9	CARDINAL
aiti-4278	158	2	c. c. ho	PERSON
aiti-4278	158	3	m. chen	PERSON
aiti-4278	158	4	t. y. chi	PERSON
aiti-4278	158	5	649	CARDINAL
aiti-4278	159	1	9-13	DATE
aiti-4278	159	2	march 2015	DATE
aiti-4278	160	1	10	CARDINAL
aiti-4278	160	2	c. c. ho	PERSON
aiti-4278	160	3	m. chen	PERSON
aiti-4278	160	4	c. li	PERSON
aiti-4278	161	1	51	DATE
aiti-4278	162	1	1-11	CARDINAL
aiti-4278	162	2	july 2018	DATE
aiti-4278	163	1	11	CARDINAL
aiti-4278	163	2	c. c. ho	PERSON
aiti-4278	163	3	j. j. liu	PERSON
aiti-4278	164	1	tenth	ORDINAL
aiti-4278	164	2	2018	DATE
aiti-4278	164	3	spie press	ORG
aiti-4278	164	4	march 2019	DATE
aiti-4278	164	5	1105303	DATE
aiti-4278	165	1	12	CARDINAL
aiti-4278	165	2	j. cha	PERSON
aiti-4278	165	3	w. choi	PERSON
aiti-4278	165	4	o. büyüköztürk	PERSON
aiti-4278	166	1	33	DATE
aiti-4278	166	2	9	CARDINAL
aiti-4278	167	1	731-747	QUANTITY
aiti-4278	168	1	13	CARDINAL
aiti-4278	168	2	r. ren	PERSON
aiti-4278	168	3	k.c.	GPE
aiti-4278	168	4	48	DATE
aiti-4278	168	5	3	CARDINAL
aiti-4278	169	1	929-940	CARDINAL
aiti-4278	169	2	march 2018	DATE
aiti-4278	169	3	14	CARDINAL
aiti-4278	169	4	j. cha	PERSON
aiti-4278	169	5	w. choi	PERSON
aiti-4278	169	6	o. büyüköztürk	PERSON
aiti-4278	170	1	32	DATE
aiti-4278	170	2	5	CARDINAL
aiti-4278	171	1	361-378	CARDINAL
aiti-4278	171	2	march 2017	DATE
aiti-4278	172	1	15	CARDINAL
aiti-4278	172	2	g. s. babu	PERSON
aiti-4278	172	3	p. l. zhao	PERSON
aiti-4278	172	4	x. l. li	PERSON
aiti-4278	173	1	march 2017	DATE
aiti-4278	174	1	214	CARDINAL
aiti-4278	175	1	16	CARDINAL
aiti-4278	175	2	r. ren	PERSON
aiti-4278	175	3	t. hung	PERSON
aiti-4278	175	4	k.c.	GPE
aiti-4278	175	5	48	DATE
aiti-4278	175	6	3	CARDINAL
aiti-4278	176	1	929-940	CARDINAL
aiti-4278	176	2	march 2018	DATE
aiti-4278	177	1	17	CARDINAL
aiti-4278	177	2	18	CARDINAL
aiti-4278	177	3	1, january 2018	DATE
aiti-4278	178	1	18	CARDINAL
aiti-4278	178	2	c. yang	PERSON
aiti-4278	178	3	h. li	PERSON
aiti-4278	178	4	y. t. yu	PERSON
aiti-4278	178	5	x. c. luo	PERSON
aiti-4278	178	6	t. huang	PERSON
aiti-4278	178	7	x. yang	PERSON
aiti-4278	179	1	33	DATE
aiti-4278	179	2	12	CARDINAL
aiti-4278	180	1	1090-1109	DATE
aiti-4278	180	2	december 2018	DATE
aiti-4278	181	1	19	CARDINAL
aiti-4278	181	2	t. wang	PERSON
aiti-4278	181	3	y. chen	PERSON
aiti-4278	181	4	m. qiao	PERSON
aiti-4278	181	5	h. snoussi	PERSON
aiti-4278	182	1	94	DATE
aiti-4278	182	2	9	CARDINAL
aiti-4278	183	1	3465-3471	CARDINAL
aiti-4278	183	2	february 2018	DATE
aiti-4278	184	1	20	CARDINAL
aiti-4278	184	2	r. f. wei	PERSON
aiti-4278	184	3	y. b. bi	PERSON
aiti-4278	184	4	12	CARDINAL
aiti-4278	184	5	10	CARDINAL
aiti-4278	186	1	taeti	GPE
aiti-4278	186	2	taiwan	GPE
aiti-4278	187	1	https://creativecommons.org/licenses/by-nc/4.0/	ORG