id	sid	eid	entity	type
aiti-4380	2	1	5	CARDINAL
aiti-4380	2	2	2, 2020	DATE
aiti-4380	3	1	84-97	CARDINAL
aiti-4380	3	2	tsdt chih-chiang	PERSON
aiti-4380	3	3	hong * department	ORG
aiti-4380	3	4	taichung	GPE
aiti-4380	3	5	taiwan	GPE
aiti-4380	3	6	04	CARDINAL
aiti-4380	3	7	june 2019	DATE
aiti-4380	3	8	20 july 2019	DATE
aiti-4380	3	9	17	CARDINAL
aiti-4380	4	1	third	ORDINAL
aiti-4380	7	1	three	CARDINAL
aiti-4380	10	1	third	ORDINAL
aiti-4380	10	2	fgm	ORG
aiti-4380	10	3	1	CARDINAL
aiti-4380	12	1	2019	DATE
aiti-4380	13	1	1	CARDINAL
aiti-4380	13	2	first	ORDINAL
aiti-4380	15	1	2019	DATE
aiti-4380	15	2	zippo et al	PERSON
aiti-4380	16	1	2	CARDINAL
aiti-4380	17	1	2018	DATE
aiti-4380	17	2	3	CARDINAL
aiti-4380	18	1	third	ORDINAL
aiti-4380	19	1	2018	DATE
aiti-4380	19	2	ansari	PERSON
aiti-4380	19	3	4	CARDINAL
aiti-4380	20	1	2017	DATE
aiti-4380	20	2	5	CARDINAL
aiti-4380	22	1	5	CARDINAL
aiti-4380	22	2	2, 2020	DATE
aiti-4380	23	1	84-97 85	PERCENT
aiti-4380	24	1	2017	DATE
aiti-4380	24	2	wang	PERSON
aiti-4380	24	3	wu	PERSON
aiti-4380	25	1	6	CARDINAL
aiti-4380	26	1	2014	DATE
aiti-4380	26	2	fazzolari	ORG
aiti-4380	26	3	carrera	PERSON
aiti-4380	26	4	ritz	ORG
aiti-4380	27	1	2016	DATE
aiti-4380	28	1	8	CARDINAL
aiti-4380	30	1	2016	DATE
aiti-4380	30	2	bui et al	ORG
aiti-4380	31	1	9	CARDINAL
aiti-4380	32	1	five	CARDINAL
aiti-4380	32	2	un	ORG
aiti-4380	33	1	2017	DATE
aiti-4380	34	1	10	CARDINAL
aiti-4380	35	1	five	CARDINAL
aiti-4380	35	2	un	ORG
aiti-4380	36	1	2018	DATE
aiti-4380	37	1	11	CARDINAL
aiti-4380	38	1	four	CARDINAL
aiti-4380	38	2	un	ORG
aiti-4380	39	1	fig	ORG
aiti-4380	40	1	1 two	CARDINAL
aiti-4380	41	1	2012	DATE
aiti-4380	41	2	zhang et al	PERSON
aiti-4380	42	1	12	CARDINAL
aiti-4380	43	1	von-karman	PERSON
aiti-4380	44	1	2016	DATE
aiti-4380	44	2	dai	ORG
aiti-4380	45	1	13	CARDINAL
aiti-4380	45	2	years 2000-2015	DATE
aiti-4380	47	1	2008	DATE
aiti-4380	47	2	ansari	PERSON
aiti-4380	47	3	14	CARDINAL
aiti-4380	50	1	2017	DATE
aiti-4380	50	2	hong	GPE
aiti-4380	50	3	15	CARDINAL
aiti-4380	51	1	2017	DATE
aiti-4380	51	2	hong	GPE
aiti-4380	51	3	16	CARDINAL
aiti-4380	52	1	four	CARDINAL
aiti-4380	53	1	three	CARDINAL
aiti-4380	53	2	1c	CARDINAL
aiti-4380	55	1	w	GPE
aiti-4380	55	2	1 fgm	QUANTITY
aiti-4380	55	3	2	CARDINAL
aiti-4380	55	4	2h	CARDINAL
aiti-4380	55	5	5	CARDINAL
aiti-4380	55	6	2, 2020	DATE
aiti-4380	56	1	84-97 86	PERCENT
aiti-4380	60	1	2	CARDINAL
aiti-4380	60	2	two	CARDINAL
aiti-4380	60	3	1h	CARDINAL
aiti-4380	60	4	1	CARDINAL
aiti-4380	60	5	2h	CARDINAL
aiti-4380	60	6	2	CARDINAL
aiti-4380	61	1	1	CARDINAL
aiti-4380	62	1	17	CARDINAL
aiti-4380	63	1	18	CARDINAL
aiti-4380	63	2	1 2	CARDINAL
aiti-4380	63	3	1	CARDINAL
aiti-4380	63	4	0 1 1 2	QUANTITY
aiti-4380	63	5	p	WORK_OF_ART
aiti-4380	63	6	3p	CARDINAL
aiti-4380	64	1	1c	CARDINAL
aiti-4380	64	2	19	CARDINAL
aiti-4380	64	3	3	CARDINAL
aiti-4380	65	1	u x	PERSON
aiti-4380	68	1	t   	ORG
aiti-4380	69	1	 	PERSON
aiti-4380	70	1		PERSON
aiti-4380	70	2	2	CARDINAL
aiti-4380	70	3	0u	CARDINAL
aiti-4380	70	4	w	ORG
aiti-4380	70	5		PRODUCT
aiti-4380	71	1	2	CARDINAL
aiti-4380	71	2	3	CARDINAL
aiti-4380	72	1	1 0c	CARDINAL
aiti-4380	73	1	1c	CARDINAL
aiti-4380	73	2	19	CARDINAL
aiti-4380	74	1	x	EVENT
aiti-4380	74	2	xz	PERSON
aiti-4380	74	3	20-21	CARDINAL
aiti-4380	74	4	11	CARDINAL
aiti-4380	74	5	16	CARDINAL
aiti-4380	74	6	44 45	DATE
aiti-4380	74	7	45 55	CARDINAL
aiti-4380	75	1	k k	PERSON
aiti-4380	79	1		NORP
aiti-4380	79	2		ORG
aiti-4380	79	3		GPE
aiti-4380	79	4		ORG
aiti-4380	79	5		GPE
aiti-4380	79	6		ORG
aiti-4380	79	7		GPE
aiti-4380	79	8		NORP
aiti-4380	84	1		ORG
aiti-4380	84	2	 	PERSON
aiti-4380	88	1		ORG
aiti-4380	88	2	3	CARDINAL
aiti-4380	88	3	x	ORG
aiti-4380	88	4		ORG
aiti-4380	90	1	5	CARDINAL
aiti-4380	90	2	2, 2020	DATE
aiti-4380	91	1	84-97	PERCENT
aiti-4380	91	2	22	CARDINAL
aiti-4380	91	3	2	CARDINAL
aiti-4380	91	4	1 +	DATE
aiti-4380	91	5	1	CARDINAL
aiti-4380	91	6	1	CARDINAL
aiti-4380	107	1	 	PERSON
aiti-4380	107	2	2 2	CARDINAL
aiti-4380	107	3	42	CARDINAL
aiti-4380	107	4	1 +	DATE
aiti-4380	107	5	1 1 +	CARDINAL
aiti-4380	109	1	j u	PERSON
aiti-4380	110	1	j v k	WORK_OF_ART
aiti-4380	112	1	rt   	ORG
aiti-4380	113	1	 	PERSON
aiti-4380	113	2	 	PERSON
aiti-4380	114	1		PERSON
aiti-4380	114	2		PERSON
aiti-4380	114	3	4	CARDINAL
aiti-4380	118	1	1 1 2 2	QUANTITY
aiti-4380	122	1	    	ORG
aiti-4380	142	1	2	CARDINAL
aiti-4380	142	2	1	CARDINAL
aiti-4380	142	3	0,1	CARDINAL
aiti-4380	142	4	2,	CARDINAL
aiti-4380	150	1	 	PERSON
aiti-4380	151	1	5	CARDINAL
aiti-4380	156	1	2	CARDINAL
aiti-4380	157	1	2c	CARDINAL
aiti-4380	158	1	2	CARDINAL
aiti-4380	158	2	x	PRODUCT
aiti-4380	158	3	2	CARDINAL
aiti-4380	158	4	w	CARDINAL
aiti-4380	159	1	the von karman	PERSON
aiti-4380	159	2	0 0/	CARDINAL
aiti-4380	160	1	0 0/	CARDINAL
aiti-4380	162	1	6	CARDINAL
aiti-4380	162	2	3	CARDINAL
aiti-4380	162	3	6	CARDINAL
aiti-4380	162	4	4	CARDINAL
aiti-4380	162	5	1 5	DATE
aiti-4380	163	1		ORG
aiti-4380	163	2	2 1 / 2 w	QUANTITY
aiti-4380	163	3	1	CARDINAL
aiti-4380	163	4	w / 	ORG
aiti-4380	163	5		ORG
aiti-4380	163	6	2 1 / 2 1	QUANTITY
aiti-4380	163	7	the 1 5	DATE
aiti-4380	164	1	7)-(8	CARDINAL
aiti-4380	164	2	5	CARDINAL
aiti-4380	164	3	2, 2020	DATE
aiti-4380	165	1	84-97	PERCENT
aiti-4380	165	2	1	CARDINAL
aiti-4380	165	3	30	CARDINAL
aiti-4380	165	4	zz x	PERSON
aiti-4380	165	5	2 x x x	QUANTITY
aiti-4380	165	6	2 x 1	QUANTITY
aiti-4380	165	7	1 1	CARDINAL
aiti-4380	165	8	2	CARDINAL
aiti-4380	165	9	2	CARDINAL
aiti-4380	165	10	0 1	CARDINAL
aiti-4380	166	1		PERSON
aiti-4380	166	2		GPE
aiti-4380	166	3	 	PERSON
aiti-4380	166	4		GPE
aiti-4380	166	5	     	ORG
aiti-4380	166	6		GPE
aiti-4380	166	7	  	PERSON
aiti-4380	167	1		GPE
aiti-4380	168	1		GPE
aiti-4380	169	1		GPE
aiti-4380	170	1		GPE
aiti-4380	170	2		GPE
aiti-4380	170	3	0	CARDINAL
aiti-4380	170	4	1	CARDINAL
aiti-4380	170	5	1	CARDINAL
aiti-4380	170	6	1	CARDINAL
aiti-4380	170	7	1	CARDINAL
aiti-4380	170	8	1	CARDINAL
aiti-4380	172	1	 	PERSON
aiti-4380	172	2	   	ORG
aiti-4380	172	3	 	PERSON
aiti-4380	172	4		GPE
aiti-4380	172	5	 	PERSON
aiti-4380	173	1	  	PERSON
aiti-4380	173	2		NORP
aiti-4380	174	1		GPE
aiti-4380	174	2		GPE
aiti-4380	174	3		GPE
aiti-4380	175	1		GPE
aiti-4380	175	2		PERSON
aiti-4380	175	3		GPE
aiti-4380	175	4		ORG
aiti-4380	175	5	6	CARDINAL
aiti-4380	175	6	1 1 +	CARDINAL
aiti-4380	185	1		PERSON
aiti-4380	185	2		PERSON
aiti-4380	185	3	7	CARDINAL
aiti-4380	188	1	32	CARDINAL
aiti-4380	188	2	22	CARDINAL
aiti-4380	188	3	26	CARDINAL
aiti-4380	188	4	16	CARDINAL
aiti-4380	188	5	26	CARDINAL
aiti-4380	188	6	66 2	CARDINAL
aiti-4380	188	7	1	CARDINAL
aiti-4380	188	8	1	CARDINAL
aiti-4380	188	9	1	CARDINAL
aiti-4380	188	10	s s s s s s s s s s s s h xx	ORG
aiti-4380	221	1	2	CARDINAL
aiti-4380	221	2	5	CARDINAL
aiti-4380	221	3	2 2	CARDINAL
aiti-4380	221	4	1	CARDINAL
aiti-4380	221	5	1,2,6	CARDINAL
aiti-4380	221	6	1	CARDINAL
aiti-4380	221	7	4,5	CARDINAL
aiti-4380	240	1	8)	CARDINAL
aiti-4380	240	2	1	CARDINAL
aiti-4380	240	3	2	CARDINAL
aiti-4380	242	1	k	PERSON
aiti-4380	244	1	k	PERSON
aiti-4380	244	2	23	CARDINAL
aiti-4380	245	1	the s si j	ORG
aiti-4380	246	1	2014	DATE
aiti-4380	246	2	hong	GPE
aiti-4380	247	1	23	CARDINAL
aiti-4380	247	2	2010	DATE
aiti-4380	247	3	sepiani et al	PERSON
aiti-4380	248	1	24	CARDINAL
aiti-4380	249	1	5	CARDINAL
aiti-4380	249	2	2, 2020	DATE
aiti-4380	250	1	84-97 89	PERCENT
aiti-4380	250	2	55	CARDINAL
aiti-4380	250	3	16	CARDINAL
aiti-4380	250	4	1	CARDINAL
aiti-4380	251	1	1	CARDINAL
aiti-4380	252	1	2(1	CARDINAL
aiti-4380	253	1	2(1	CARDINAL
aiti-4380	253	2	1	CARDINAL
aiti-4380	253	3	0 fgm fgm fgm fgm fgm fgm fgm fgm fgm	ORG
aiti-4380	254	1		PERSON
aiti-4380	254	2		PERSON
aiti-4380	256	1	9	CARDINAL
aiti-4380	256	2	1 2=	CARDINAL
aiti-4380	256	3		ORG
aiti-4380	256	4	2 1 1	CARDINAL
aiti-4380	257	1	1e	CARDINAL
aiti-4380	257	2	2e	CARDINAL
aiti-4380	257	3	1	CARDINAL
aiti-4380	257	4	2	CARDINAL
aiti-4380	257	5	1	CARDINAL
aiti-4380	257	6	2	CARDINAL
aiti-4380	260	1	s s s s s s s s s s s si j	ORG
aiti-4380	283	1	11a	CARDINAL
aiti-4380	283	2	11e	DATE
aiti-4380	283	3	11f	DATE
aiti-4380	283	4	11h	DATE
aiti-4380	283	5	44h	CARDINAL
aiti-4380	283	6	1 2	CARDINAL
aiti-4380	283	7	2	CARDINAL
aiti-4380	283	8	4	CARDINAL
aiti-4380	283	9	2	CARDINAL
aiti-4380	283	10	5	CARDINAL
aiti-4380	283	11	2	CARDINAL
aiti-4380	283	12	1 1	CARDINAL
aiti-4380	283	13	2	CARDINAL
aiti-4380	283	14	1 3	CARDINAL
aiti-4380	283	15	4 2	CARDINAL
aiti-4380	283	16	3	CARDINAL
aiti-4380	283	17	2	CARDINAL
aiti-4380	283	18	2	CARDINAL
aiti-4380	283	19	1	CARDINAL
aiti-4380	283	20	5	CARDINAL
aiti-4380	283	21	2	CARDINAL
aiti-4380	283	22	16	CARDINAL
aiti-4380	283	23	1	CARDINAL
aiti-4380	283	24	80 1	DATE
aiti-4380	283	25	2	CARDINAL
aiti-4380	283	26	1 3	CARDINAL
aiti-4380	283	27	7 1	DATE
aiti-4380	283	28	2	CARDINAL
aiti-4380	283	29		GPE
aiti-4380	284	1		PERSON
aiti-4380	284	2	1	CARDINAL
aiti-4380	284	3	6	CARDINAL
aiti-4380	284	4	4 16	CARDINAL
aiti-4380	284	5	3	CARDINAL
aiti-4380	284	6	3 1	CARDINAL
aiti-4380	284	7	16	CARDINAL
aiti-4380	284	8	2	CARDINAL
aiti-4380	284	9	64	DATE
aiti-4380	284	10	1	CARDINAL
aiti-4380	284	11	448	CARDINAL
aiti-4380	284	12	1	CARDINAL
aiti-4380	284	13	6 2	CARDINAL
aiti-4380	284	14	5	CARDINAL
aiti-4380	284	15	4 3 64	DATE
aiti-4380	284	16	2	CARDINAL
aiti-4380	284	17	32	CARDINAL
aiti-4380	284	18	1	CARDINAL
aiti-4380	284	19	2(1	CARDINAL
aiti-4380	284	20	2	CARDINAL
aiti-4380	284	21	k h e e h r r r r r r  	ORG
aiti-4380	284	22		PERSON
aiti-4380	284	23	10	CARDINAL
aiti-4380	284	24	3	CARDINAL
aiti-4380	284	25	four	CARDINAL
aiti-4380	284	26	1	CARDINAL
aiti-4380	284	27	2	CARDINAL
aiti-4380	284	28	0	CARDINAL
aiti-4380	285	1	four	CARDINAL
aiti-4380	285	2	31 1 0i	CARDINAL
aiti-4380	285	3	j	ORG
aiti-4380	286	1	0ij	ORDINAL
aiti-4380	286	2	16	CARDINAL
aiti-4380	286	3	0a	CARDINAL
aiti-4380	286	4	16 26	CARDINAL
aiti-4380	286	5	0d	CARDINAL
aiti-4380	286	6	d	NORP
aiti-4380	286	7	45	CARDINAL
aiti-4380	286	8	f	PERSON
aiti-4380	288	1	mnb	PERSON
aiti-4380	288	2	mnc	ORG
aiti-4380	288	3	mnd	ORG
aiti-4380	288	4	mne	ORG
aiti-4380	290	1	mn mn mn mn mn	ORG
aiti-4380	290	2	mn	ORG
aiti-4380	291	1	mn	GPE
aiti-4380	291	2	mn	GPE
aiti-4380	292	1	mn	GPE
aiti-4380	292	2	mn	GPE
aiti-4380	295	1	11	CARDINAL
aiti-4380	295	2	5	CARDINAL
aiti-4380	295	3	2, 2020	DATE
aiti-4380	296	1	84-97 90	PERCENT
aiti-4380	296	2	half	CARDINAL
aiti-4380	297	1	11	CARDINAL
aiti-4380	297	2	2 5	CARDINAL
aiti-4380	297	3	0f	CARDINAL
aiti-4380	298	1	f	PERSON
aiti-4380	300	1	13	CARDINAL
aiti-4380	300	2	14 15 23	TIME
aiti-4380	300	3	25	CARDINAL
aiti-4380	300	4	0fh fh fh fh fh	ORG
aiti-4380	303	1	3 61	CARDINAL
aiti-4380	303	2	j	ORG
aiti-4380	303	3		PERSON
aiti-4380	304	1	11 12	CARDINAL
aiti-4380	304	2	35	CARDINAL
aiti-4380	304	3	45	CARDINAL
aiti-4380	304	4	0	CARDINAL
aiti-4380	304	5	0	CARDINAL
aiti-4380	304	6	mn mnmn mnmn	ORG
aiti-4380	304	7	mn mn mn mn mn fh fh	ORG
aiti-4380	305	1	afh fh bfh fh fh	ORG
aiti-4380	311	1	 	PERSON
aiti-4380	311	2		ORG
aiti-4380	311	3	12	CARDINAL
aiti-4380	311	4	2	CARDINAL
aiti-4380	311	5	66	CARDINAL
aiti-4380	311	6	66	CARDINAL
aiti-4380	311	7	66	CARDINAL
aiti-4380	311	8	22	CARDINAL
aiti-4380	311	9	55	CARDINAL
aiti-4380	311	10	66	CARDINAL
aiti-4380	311	11	2	CARDINAL
aiti-4380	311	12	2	CARDINAL
aiti-4380	311	13	3	CARDINAL
aiti-4380	311	14	2	CARDINAL
aiti-4380	311	15	mn mni fh	ORG
aiti-4380	314	1	2 2 1	DATE
aiti-4380	314	2	1 44/	DATE
aiti-4380	314	3	3	CARDINAL
aiti-4380	314	4	2	CARDINAL
aiti-4380	315	1	13	CARDINAL
aiti-4380	315	2	2	CARDINAL
aiti-4380	315	3	66	CARDINAL
aiti-4380	315	4	66	CARDINAL
aiti-4380	315	5	1 22 1 22	TIME
aiti-4380	315	6	1	CARDINAL
aiti-4380	315	7	66	CARDINAL
aiti-4380	315	8	1	CARDINAL
aiti-4380	315	9	66	CARDINAL
aiti-4380	315	10	1 44	DATE
aiti-4380	315	11	2	CARDINAL
aiti-4380	315	12	6 -9	QUANTITY
aiti-4380	315	13	2	CARDINAL
aiti-4380	315	14	6 -9	QUANTITY
aiti-4380	321	1	l fh	PERSON
aiti-4380	329	1	2 3	DATE
aiti-4380	329	2	11 1 11 1 11	TIME
aiti-4380	329	3	66	CARDINAL
aiti-4380	329	4	1	CARDINAL
aiti-4380	329	5	66	CARDINAL
aiti-4380	329	6	66	CARDINAL
aiti-4380	329	7	12	CARDINAL
aiti-4380	329	8	66	CARDINAL
aiti-4380	329	9	66	CARDINAL
aiti-4380	329	10	66	CARDINAL
aiti-4380	329	11	66	CARDINAL
aiti-4380	329	12	66	CARDINAL
aiti-4380	329	13	22	CARDINAL
aiti-4380	329	14	1 22	CARDINAL
aiti-4380	330	1	6 9	DATE
aiti-4380	333	1	6	CARDINAL
aiti-4380	344	1		PERSON
aiti-4380	344	2	2 1	DATE
aiti-4380	344	3	1 449c	QUANTITY
aiti-4380	345	1	f	DATE
aiti-4380	345	2	14	CARDINAL
aiti-4380	345	3	12	CARDINAL
aiti-4380	345	4	five degree	QUANTITY
aiti-4380	346	1	5	CARDINAL
aiti-4380	346	2	2	CARDINAL
aiti-4380	346	3	3	CARDINAL
aiti-4380	346	4	4	CARDINAL
aiti-4380	346	5	5	CARDINAL
aiti-4380	346	6	6	CARDINAL
aiti-4380	346	7	0mn mn	GPE
aiti-4380	347	1	mn mna	PERSON
aiti-4380	347	2	15	CARDINAL
aiti-4380	347	3	11	CARDINAL
aiti-4380	347	4	11	CARDINAL
aiti-4380	347	5	11	CARDINAL
aiti-4380	347	6	12 12	CARDINAL
aiti-4380	347	7	1	CARDINAL
aiti-4380	347	8	2	CARDINAL
aiti-4380	347	9	3	CARDINAL
aiti-4380	349	1	4	CARDINAL
aiti-4380	349	2	5	CARDINAL
aiti-4380	350	1	6	CARDINAL
aiti-4380	351	1	fh fh sc	ORG
aiti-4380	353	1	fh fh sa	ORG
aiti-4380	354	1	16	CARDINAL
aiti-4380	354	2	5	CARDINAL
aiti-4380	354	3	2, 2020	DATE
aiti-4380	355	1	84-97 91	PERCENT
aiti-4380	355	2	2 2	CARDINAL
aiti-4380	355	3	33	CARDINAL
aiti-4380	355	4	2	CARDINAL
aiti-4380	355	5	33 55 44	DATE
aiti-4380	355	6	55 33	DATE
aiti-4380	355	7	35	CARDINAL
aiti-4380	355	8	2	CARDINAL
aiti-4380	355	9	45 45	DATE
aiti-4380	355	10	55	CARDINAL
aiti-4380	355	11	45	CARDINAL
aiti-4380	356	1	k i sc fh	ORG
aiti-4380	361	1	i fh fh sa fh fh fh fh fh fh fh fh fh fh fh fh fh fh fh fh fh fh	ORG
aiti-4380	362	1	17	CARDINAL
aiti-4380	362	2	4	CARDINAL
aiti-4380	363	1	1	CARDINAL
aiti-4380	363	2	1c	CARDINAL
aiti-4380	363	3	1/ mm2	QUANTITY
aiti-4380	365	1	mm	PERSON
aiti-4380	365	2	1	CARDINAL
aiti-4380	365	3	100	CARDINAL
aiti-4380	365	4	300	CARDINAL
aiti-4380	365	5	600	CARDINAL
aiti-4380	365	6	1000	CARDINAL
aiti-4380	365	7	5 0.5	CARDINAL
aiti-4380	365	8	3.178485	CARDINAL
aiti-4380	365	9	3.873990	MONEY
aiti-4380	365	10	4.111627 12.617598	MONEY
aiti-4380	366	1	3.318237	CARDINAL
aiti-4380	367	1	3.477849 7.132526	MONEY
aiti-4380	367	2	3.756482	CARDINAL
aiti-4380	367	3	4.394140	CARDINAL
aiti-4380	367	4	8.563466 8 0.5	MONEY
aiti-4380	368	1	2.730914	MONEY
aiti-4380	369	1	2.336488	CARDINAL
aiti-4380	369	2	2.448283	CARDINAL
aiti-4380	369	3	0.925925	ORG
aiti-4380	369	4	2.643672	CARDINAL
aiti-4380	369	5	1.926014	CARDINAL
aiti-4380	369	6	2.217255	DATE
aiti-4380	369	7	2.010152	CARDINAL
aiti-4380	369	8	2.163467	MONEY
aiti-4380	369	9	2.429062	ORG
aiti-4380	370	1	2.106326	CARDINAL
aiti-4380	370	2	2.672919	MONEY
aiti-4380	370	3	0.925925	ORG
aiti-4380	370	4	2.274471	ORG
aiti-4380	370	5	5.024359	MONEY
aiti-4380	370	6	5.980343	ORG
aiti-4380	370	7	6.078461	MONEY
aiti-4380	371	1	1	CARDINAL
aiti-4380	371	2	2	CARDINAL
aiti-4380	373	1	k	PERSON
aiti-4380	374	1	1 2h	CARDINAL
aiti-4380	374	2	mm	PERSON
aiti-4380	374	3	k	PERSON
aiti-4380	374	4	0.1	CARDINAL
aiti-4380	375	1	k	PERSON
aiti-4380	375	2	0	CARDINAL
aiti-4380	375	3	1c	CARDINAL
aiti-4380	376	1	firstly	ORDINAL
aiti-4380	376	2	11 2 114	CARDINAL
aiti-4380	377	1	1c	CARDINAL
aiti-4380	377	2	0.925925/mm 2	MONEY
aiti-4380	377	3	1c	CARDINAL
aiti-4380	379	1	5	CARDINAL
aiti-4380	379	2	8	DATE
aiti-4380	379	3	1	CARDINAL
aiti-4380	379	4	11	CARDINAL
aiti-4380	379	5	first	ORDINAL
aiti-4380	379	6	1	CARDINAL
aiti-4380	380	1	mm	PERSON
aiti-4380	380	2	1	CARDINAL
aiti-4380	380	3	100k	CARDINAL
aiti-4380	380	4	300k	PRODUCT
aiti-4380	380	5	600k	ORG
aiti-4380	380	6	1000k	CARDINAL
aiti-4380	380	7	k	PERSON
aiti-4380	380	8	1c	CARDINAL
aiti-4380	381	1	5	CARDINAL
aiti-4380	381	2	2, 2020	DATE
aiti-4380	382	1	84-97 92	QUANTITY
aiti-4380	382	2	2	CARDINAL
aiti-4380	382	3	11	CARDINAL
aiti-4380	383	1		GPE
aiti-4380	384	1	1c	CARDINAL
aiti-4380	384	2	0.925925/mm 2	MONEY
aiti-4380	384	3	1c	CARDINAL
aiti-4380	385	1	5	CARDINAL
aiti-4380	385	2	8	DATE
aiti-4380	385	3	2	CARDINAL
aiti-4380	385	4	1	DATE
aiti-4380	385	5	1	CARDINAL
aiti-4380	386	1	mm	PERSON
aiti-4380	386	2	ω	ORG
aiti-4380	386	3	1	CARDINAL
aiti-4380	386	4	100k	CARDINAL
aiti-4380	386	5	300k	PRODUCT
aiti-4380	386	6	600k	ORG
aiti-4380	386	7	1000k	CARDINAL
aiti-4380	386	8	k	PERSON
aiti-4380	386	9	1c	CARDINAL
aiti-4380	386	10	32.380783	CARDINAL
aiti-4380	391	1	cnc	ORG
aiti-4380	392	1	2	CARDINAL
aiti-4380	392	2	1c	CARDINAL
aiti-4380	392	3	1/ mm2	QUANTITY
aiti-4380	393	1	mm	PERSON
aiti-4380	393	2	1	CARDINAL
aiti-4380	393	3	100	CARDINAL
aiti-4380	393	4	300	CARDINAL
aiti-4380	393	5	600	CARDINAL
aiti-4380	393	6	1000	CARDINAL
aiti-4380	393	7	5 0.5	CARDINAL
aiti-4380	393	8	5.781036 15.582337	MONEY
aiti-4380	393	9	6.693336 18.978658	MONEY
aiti-4380	393	10	7.123131	ORG
aiti-4380	394	1	5.782522	MONEY
aiti-4380	394	2	6.103089	CARDINAL
aiti-4380	394	3	6.694982	CARDINAL
aiti-4380	394	4	7.133930	CARDINAL
aiti-4380	395	1	6.104272 12.608768	MONEY
aiti-4380	395	2	14.134532	CARDINAL
aiti-4380	395	3	7.126575	ORG
aiti-4380	395	4	0.925925	ORG
aiti-4380	396	1	7.135397 12.687871	MONEY
aiti-4380	396	2	13.466383	CARDINAL
aiti-4380	396	3	1c	CARDINAL
aiti-4380	396	4	1/ mm2	QUANTITY
aiti-4380	397	1	mm	PERSON
aiti-4380	397	2	1	CARDINAL
aiti-4380	397	3	100	CARDINAL
aiti-4380	397	4	300	CARDINAL
aiti-4380	397	5	600	CARDINAL
aiti-4380	397	6	1000	CARDINAL
aiti-4380	397	7	8 0.5	CARDINAL
aiti-4380	397	8	7.549395 21.860160	MONEY
aiti-4380	397	9	8.042832	MONEY
aiti-4380	397	10	8.017926 29.852609	MONEY
aiti-4380	397	11	6.514685	MONEY
aiti-4380	397	12	6.877464	CARDINAL
aiti-4380	397	13	7.549288	MONEY
aiti-4380	397	14	2	CARDINAL
aiti-4380	397	15	6.514442 16.329633 6.877144	MONEY
aiti-4380	397	16	0.925925	ORG
aiti-4380	398	1	6.513346 12.583626	MONEY
aiti-4380	398	2	7.546949	CARDINAL
aiti-4380	398	3	8.017431 16.703767	MONEY
aiti-4380	398	4	10 0.5	CARDINAL
aiti-4380	399	1	7.006078 19.926910	MONEY
aiti-4380	399	2	8.119573	MONEY
aiti-4380	400	1	8.119391	MONEY
aiti-4380	400	2	8.650032 24.450416	MONEY
aiti-4380	400	3	7.005695 16.320789	MONEY
aiti-4380	400	4	7.396207	MONEY
aiti-4380	400	5	8.117177	MONEY
aiti-4380	400	6	8.649613	MONEY
aiti-4380	400	7	8.623854 24.302459	CARDINAL
aiti-4380	400	8	0.925925	ORG
aiti-4380	401	1	7.004657 14.567711	MONEY
aiti-4380	401	2	8.117177	MONEY
aiti-4380	401	3	8.623262 19.117235	CARDINAL
aiti-4380	401	4	3)-(4	CARDINAL
aiti-4380	403	1	10	CARDINAL
aiti-4380	403	2	300	CARDINAL
aiti-4380	403	3	k	PERSON
aiti-4380	403	4	1c	CARDINAL
aiti-4380	404	1	3	CARDINAL
aiti-4380	405	1	8.426538	CARDINAL
aiti-4380	405	2	2mm	QUANTITY
aiti-4380	405	3	0.5	CARDINAL
aiti-4380	405	4	8.0	CARDINAL
aiti-4380	405	5	n= 13	LAW
aiti-4380	405	6	cst	ORG
aiti-4380	405	7	sepiani et al	PERSON
aiti-4380	406	1	2010	DATE
aiti-4380	406	2	24	CARDINAL
aiti-4380	408	1	10	CARDINAL
aiti-4380	408	2	k	PERSON
aiti-4380	408	3	1c	CARDINAL
aiti-4380	408	4	4	CARDINAL
aiti-4380	410	1	2.459972	CARDINAL
aiti-4380	410	2	1c	CARDINAL
aiti-4380	410	3	0.925925/mm 2	MONEY
aiti-4380	411	1	mm	PERSON
aiti-4380	411	2	0.5	CARDINAL
aiti-4380	412	1	1.71137	CARDINAL
aiti-4380	412	2	three	CARDINAL
aiti-4380	412	3	1	CARDINAL
aiti-4380	413	1	10	CARDINAL
aiti-4380	413	2	0.5	CARDINAL
aiti-4380	413	3	chen et al	PERSON
aiti-4380	414	1	2017	CARDINAL
aiti-4380	414	2	25	CARDINAL
aiti-4380	415	1	5	CARDINAL
aiti-4380	415	2	2, 2020	DATE
aiti-4380	416	1	84-97 93	CARDINAL
aiti-4380	416	2	3	CARDINAL
aiti-4380	416	3	1c	CARDINAL
aiti-4380	417	1	1/	CARDINAL
aiti-4380	417	2	0l	CARDINAL
aiti-4380	417	3	300	CARDINAL
aiti-4380	417	4	k	PERSON
aiti-4380	417	5	3 4sus304	CARDINAL
aiti-4380	417	6	2010	DATE
aiti-4380	417	7	13	CARDINAL
aiti-4380	417	8	1nr  2nr	DATE
aiti-4380	418	1	0.925925 1.2	MONEY
aiti-4380	418	2	2.429062	ORG
aiti-4380	418	3	18903.19	CARDINAL
aiti-4380	418	4	45414.97 47060.53	CARDINAL
aiti-4380	418	5	4	CARDINAL
aiti-4380	418	6	1c	CARDINAL
aiti-4380	419	1	1l	CARDINAL
aiti-4380	420	1	700	CARDINAL
aiti-4380	420	2	k chen et al	PERSON
aiti-4380	420	3	2017	DATE
aiti-4380	420	4	1	CARDINAL
aiti-4380	422	1	1nr  2nr	DATE
aiti-4380	423	1	2.550420	CARDINAL
aiti-4380	423	2	1.71137	ORG
aiti-4380	423	3	19897.76	CARDINAL
aiti-4380	423	4	46307.33	CARDINAL
aiti-4380	423	5	49917.17	CARDINAL
aiti-4380	423	6	5	CARDINAL
aiti-4380	423	7	11	CARDINAL
aiti-4380	423	8	1.2	CARDINAL
aiti-4380	423	9	1c	CARDINAL
aiti-4380	423	10	1/ mm2	QUANTITY
aiti-4380	423	11	11	CARDINAL
aiti-4380	423	12	1	CARDINAL
aiti-4380	423	13	100	CARDINAL
aiti-4380	423	14	300	CARDINAL
aiti-4380	423	15	600	CARDINAL
aiti-4380	423	16	1000	CARDINAL
aiti-4380	423	17	5 0.5	CARDINAL
aiti-4380	424	1	0.925925	ORG
aiti-4380	424	2	0.003052 8 0.5	MONEY
aiti-4380	427	1	0.925925	ORG
aiti-4380	429	1	0.000490 0.001275	MONEY
aiti-4380	429	2	0.000490 0.001143	MONEY
aiti-4380	430	1	0.000490	CARDINAL
aiti-4380	430	2	0.001083	MONEY
aiti-4380	430	3	secondly	ORDINAL
aiti-4380	430	4	1/s	MONEY
aiti-4380	430	5	si3n4 fgm	PERSON
aiti-4380	431	1	first	ORDINAL
aiti-4380	431	2	11	CARDINAL
aiti-4380	431	3	mm	PERSON
aiti-4380	431	4	k	PERSON
aiti-4380	431	5	1c	CARDINAL
aiti-4380	431	6	0.925925/mm 2	MONEY
aiti-4380	431	7	1c	CARDINAL
aiti-4380	431	8	5	CARDINAL
aiti-4380	431	9	8	DATE
aiti-4380	431	10	1	CARDINAL
aiti-4380	431	11	100k	CARDINAL
aiti-4380	431	12	300k	PRODUCT
aiti-4380	431	13	600k	ORG
aiti-4380	431	14	1000k	CARDINAL
aiti-4380	431	15	5	CARDINAL
aiti-4380	432	1	n=1,2,	PERSON
aiti-4380	432	2	0.5	CARDINAL
aiti-4380	432	3	300	CARDINAL
aiti-4380	433	1	mm	PERSON
aiti-4380	433	2	k	PERSON
aiti-4380	433	3	1c	CARDINAL
aiti-4380	433	4	0.925925/mm 2	MONEY
aiti-4380	433	5	1c	CARDINAL
aiti-4380	434	1	5	CARDINAL
aiti-4380	434	2	10	CARDINAL
aiti-4380	434	3	6	CARDINAL
aiti-4380	435	1	5	CARDINAL
aiti-4380	435	2	2, 2020	DATE
aiti-4380	436	1	84-97 94	CARDINAL
aiti-4380	436	2	6	CARDINAL
aiti-4380	436	3	k	PERSON
aiti-4380	436	4	1c	CARDINAL
aiti-4380	436	5	0.5nr	ORG
aiti-4380	436	6	300	CARDINAL
aiti-4380	436	7	1c	CARDINAL
aiti-4380	436	8	1/ mm 2	QUANTITY
aiti-4380	437	1	1n	CARDINAL
aiti-4380	437	2	3n 4n 5n	DATE
aiti-4380	438	1	8n	DATE
aiti-4380	439	1	0.000627	MONEY
aiti-4380	439	2	1/ mm 2	QUANTITY
aiti-4380	440	1	2n	CARDINAL
aiti-4380	440	2	3n 4n 5n	DATE
aiti-4380	441	1	8n	DATE
aiti-4380	442	1	0.002606	ORG
aiti-4380	442	2	0.000794	MONEY
aiti-4380	442	3	1/ mm 2	QUANTITY
aiti-4380	443	1	3n	CARDINAL
aiti-4380	443	2	3n 4n 5n	DATE
aiti-4380	444	1	8n	DATE
aiti-4380	446	1	1/ mm 2	QUANTITY
aiti-4380	446	2	3n 4n 5n	DATE
aiti-4380	447	1	8n	DATE
aiti-4380	448	1	0.000204	ORG
aiti-4380	448	2	1/ mm 2	QUANTITY
aiti-4380	449	1	5n	CARDINAL
aiti-4380	450	1	8n	DATE
aiti-4380	453	1	1/ mm 2	QUANTITY
aiti-4380	454	1	6n	CARDINAL
aiti-4380	454	2	3n 4n 5n	DATE
aiti-4380	455	1	8n	DATE
aiti-4380	456	1	0.000275	ORG
aiti-4380	456	2	0.000880 0.000267 0.000878	MONEY
aiti-4380	456	3	1/ mm 2	QUANTITY
aiti-4380	457	1	7n 1n 2n	DATE
aiti-4380	458	1	8n	DATE
aiti-4380	458	2	10	CARDINAL
aiti-4380	458	3	0.000227	ORG
aiti-4380	459	1	0.000227	ORG
aiti-4380	459	2	1/ mm 2	QUANTITY
aiti-4380	460	1	8n 1n 2n	QUANTITY
aiti-4380	461	1	8n	DATE
aiti-4380	461	2	1/ mm 2	QUANTITY
aiti-4380	462	1	9n	CARDINAL
aiti-4380	463	1	8n	DATE
aiti-4380	466	1	0.000176	PRODUCT
aiti-4380	466	2	5	CARDINAL
aiti-4380	466	3	2, 2020	DATE
aiti-4380	467	1	84-97	PERCENT
aiti-4380	468	1	2 1n	CARDINAL
aiti-4380	468	2	5l	CARDINAL
aiti-4380	469	1	3 1n	CARDINAL
aiti-4380	469	2	1/	CARDINAL
aiti-4380	469	3	0l h fig	GPE
aiti-4380	470	1	4 1n	CARDINAL
aiti-4380	470	2	5l	CARDINAL
aiti-4380	471	1	5 1n	CARDINAL
aiti-4380	471	2	1/	CARDINAL
aiti-4380	471	3	0l	CARDINAL
aiti-4380	471	4	1/s	MONEY
aiti-4380	471	5	0	CARDINAL
aiti-4380	471	6	1 to 9	CARDINAL
aiti-4380	471	7	si3n4 fgm	PERSON
aiti-4380	473	1	2)-(3	CARDINAL
aiti-4380	473	2	1n	CARDINAL
aiti-4380	474	1	5	CARDINAL
aiti-4380	474	2	10	DATE
aiti-4380	474	3	k	PERSON
aiti-4380	474	4	1c	CARDINAL
aiti-4380	474	5	0.925925/mm 2	MONEY
aiti-4380	474	6	300	CARDINAL
aiti-4380	475	1	1n	CARDINAL
aiti-4380	475	2	1 to 9	CARDINAL
aiti-4380	476	1	5	CARDINAL
aiti-4380	476	2	0.5	CARDINAL
aiti-4380	476	3	1	CARDINAL
aiti-4380	476	4	10	CARDINAL
aiti-4380	477	1	11	CARDINAL
aiti-4380	477	2	0.00191	CARDINAL
aiti-4380	477	3	1/s	MONEY
aiti-4380	478	1	5	CARDINAL
aiti-4380	479	1	1n	CARDINAL
aiti-4380	479	2	1 to 9	CARDINAL
aiti-4380	480	1	10	CARDINAL
aiti-4380	480	2	0.5	CARDINAL
aiti-4380	480	3	1	CARDINAL
aiti-4380	482	1	4-5	CARDINAL
aiti-4380	482	2	1n	CARDINAL
aiti-4380	483	1	5	CARDINAL
aiti-4380	483	2	10	DATE
aiti-4380	483	3	k	PERSON
aiti-4380	483	4	1c	CARDINAL
aiti-4380	483	5	0.925925/mm 2	MONEY
aiti-4380	483	6	0.5	CARDINAL
aiti-4380	484	1	1n	CARDINAL
aiti-4380	484	2	1 to 9	CARDINAL
aiti-4380	485	1	5	CARDINAL
aiti-4380	485	2	300	CARDINAL
aiti-4380	485	3	600k	PRODUCT
aiti-4380	485	4	1000k	CARDINAL
aiti-4380	485	5	1n	CARDINAL
aiti-4380	485	6	300	CARDINAL
aiti-4380	485	7	600k	PRODUCT
aiti-4380	485	8	1000	CARDINAL
aiti-4380	486	1	11	CARDINAL
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aiti-4380	486	3	1/s	MONEY
aiti-4380	487	1	5	CARDINAL
aiti-4380	487	2	600	CARDINAL
aiti-4380	488	1	1n	CARDINAL
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aiti-4380	488	3	5	CARDINAL
aiti-4380	489	1	1n	CARDINAL
aiti-4380	489	2	1 to 9	CARDINAL
aiti-4380	490	1	10	CARDINAL
aiti-4380	490	2	300	CARDINAL
aiti-4380	490	3	600k	PRODUCT
aiti-4380	490	4	1000k	CARDINAL
aiti-4380	490	5	1n	CARDINAL
aiti-4380	490	6	300	CARDINAL
aiti-4380	490	7	600k	PRODUCT
aiti-4380	490	8	1000	CARDINAL
aiti-4380	491	1	11	CARDINAL
aiti-4380	491	2	0.00059	CARDINAL
aiti-4380	491	3	1/s	MONEY
aiti-4380	492	1	10	CARDINAL
aiti-4380	492	2	600	CARDINAL
aiti-4380	493	1	1n	CARDINAL
aiti-4380	493	2	1000	CARDINAL
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aiti-4380	494	1	1n	CARDINAL
aiti-4380	494	2	5	CARDINAL
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aiti-4380	498	1	84-97 96	PERCENT
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aiti-4380	500	2	1c	CARDINAL
aiti-4380	501	1	1n	CARDINAL
aiti-4380	501	2	1 to 9	CARDINAL
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aiti-4380	502	3	0.5	CARDINAL
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aiti-4380	502	5	10	CARDINAL
aiti-4380	503	1	1n	CARDINAL
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aiti-4380	505	1	1n	CARDINAL
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aiti-4380	507	1	10	CARDINAL
aiti-4380	509	1	1	CARDINAL
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aiti-4380	511	1	2	CARDINAL
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aiti-4380	512	2	2019	DATE
aiti-4380	513	1	3	CARDINAL
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aiti-4380	515	1	374-388	CARDINAL
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aiti-4380	516	1	4	CARDINAL
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aiti-4380	516	4	133	CARDINAL
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aiti-4380	517	1	5	CARDINAL
aiti-4380	517	2	s. mohammadi	PERSON
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aiti-4380	521	5	333	CARDINAL
aiti-4380	521	6	1485-1508	CARDINAL
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aiti-4380	522	1	8	CARDINAL
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aiti-4380	522	6	3d	CARDINAL
aiti-4380	522	7	154	CARDINAL
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aiti-4380	530	2	2017	DATE
aiti-4380	531	1	11	CARDINAL
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aiti-4380	533	1	514-534	CARDINAL
aiti-4380	533	2	2018	DATE
aiti-4380	534	1	12	CARDINAL
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aiti-4380	534	6	1075-1086	DATE
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aiti-4380	535	1	13	CARDINAL
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aiti-4380	535	6	152	CARDINAL
aiti-4380	535	7	199-225	CARDINAL
aiti-4380	535	8	2016	DATE
aiti-4380	536	1	14	CARDINAL
aiti-4380	536	2	r. ansari	PERSON
aiti-4380	536	3	m. darvizeh	PERSON
aiti-4380	536	4	85	DATE
aiti-4380	536	5	284-292	CARDINAL
aiti-4380	537	1	15	CARDINAL
aiti-4380	537	2	c. c. hong	PERSON
aiti-4380	537	3	4	CARDINAL
aiti-4380	538	1	1-15	CARDINAL
aiti-4380	538	2	2017	DATE
aiti-4380	539	1	16	CARDINAL
aiti-4380	539	2	c. c. hong	PERSON
aiti-4380	539	3	7	CARDINAL
aiti-4380	540	1	188-200	CARDINAL
aiti-4380	540	2	2017	DATE
aiti-4380	541	1	17	CARDINAL
aiti-4380	541	2	c. c. hong	PERSON
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aiti-4380	541	4	40	DATE
aiti-4380	541	5	114-122	CARDINAL
aiti-4380	541	6	2013	DATE
aiti-4380	542	1	5	CARDINAL
aiti-4380	542	2	2, 2020	DATE
aiti-4380	543	1	84-97 97	PERCENT
aiti-4380	543	2	18	CARDINAL
aiti-4380	543	3	c. c. hong	PERSON
aiti-4380	543	4	134	CARDINAL
aiti-4380	543	5	021019	DATE
aiti-4380	544	1	1-11	CARDINAL
aiti-4380	545	1	19	CARDINAL
aiti-4380	545	2	s. j. lee	PERSON
aiti-4380	545	3	j. n. reddy	PERSON
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aiti-4380	545	5	40	DATE
aiti-4380	546	1	463-483	CARDINAL
aiti-4380	547	1	20	CARDINAL
aiti-4380	547	2	s. j. lee	PERSON
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aiti-4380	547	5	40	DATE
aiti-4380	548	1	971	CARDINAL
aiti-4380	549	1	21	CARDINAL
aiti-4380	549	2	j. m. whitney	PERSON
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aiti-4380	549	6	1987	DATE
aiti-4380	550	1	22	CARDINAL
aiti-4380	550	2	j. n. reddy	PERSON
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aiti-4380	551	1	23	CARDINAL
aiti-4380	551	2	c. c. hong	PERSON
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aiti-4380	552	1	20-29	CARDINAL
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aiti-4380	553	1	24	CARDINAL
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aiti-4380	553	6	two	CARDINAL
aiti-4380	553	7	31	DATE
aiti-4380	553	8	1063-1069	CARDINAL
aiti-4380	553	9	2010	DATE
aiti-4380	554	1	25	CARDINAL
aiti-4380	554	2	h. chen	PERSON
aiti-4380	554	3	a. wang	PERSON
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aiti-4380	555	1	50-60	CARDINAL
aiti-4380	555	2	2017	DATE
aiti-4380	557	1	taeti	GPE
aiti-4380	557	2	taiwan	GPE
aiti-4380	558	1	https://creativecommons.org/licenses/by-nc/4.0/	ORG