id	sid	eid	entity	type
aiti-6047	1	1	microsoft	ORG
aiti-6047	1	2	3-aiti#6047	QUANTITY
aiti-6047	1	3	90-105.docx	CARDINAL
aiti-6047	1	4	6	CARDINAL
aiti-6047	1	5	2	CARDINAL
aiti-6047	1	6	2021	DATE
aiti-6047	2	1	90-105	CARDINAL
aiti-6047	2	2	aparna venkataraman* department of electronics & instrumentation	ORG
aiti-6047	2	3	b. s. abdur rahman crescent institute of science & technology	PERSON
aiti-6047	2	4	chennai	GPE
aiti-6047	2	5	india	GPE
aiti-6047	2	6	11	CARDINAL
aiti-6047	2	7	july 2020	DATE
aiti-6047	2	8	31 october 2020	DATE
aiti-6047	2	9	20	CARDINAL
aiti-6047	2	10	january 2021	DATE
aiti-6047	2	11	https://doi.org/10.46604/aiti.2021.6047	ORG
aiti-6047	4	1	ni myrio-1900	PERSON
aiti-6047	7	1	1	CARDINAL
aiti-6047	11	1	1-5	CARDINAL
aiti-6047	15	1	1	CARDINAL
aiti-6047	15	2	6	CARDINAL
aiti-6047	20	1	6	CARDINAL
aiti-6047	20	2	2	CARDINAL
aiti-6047	20	3	2021	DATE
aiti-6047	21	1	90	CARDINAL
aiti-6047	22	1	8-11	CARDINAL
aiti-6047	23	1	one	CARDINAL
aiti-6047	23	2	12	CARDINAL
aiti-6047	31	1	13	CARDINAL
aiti-6047	34	1	13	CARDINAL
aiti-6047	37	1	17	CARDINAL
aiti-6047	38	1	20	CARDINAL
aiti-6047	39	1	21	CARDINAL
aiti-6047	41	1	section 2	LAW
aiti-6047	42	1	section 3	LAW
aiti-6047	43	1	section 4	DATE
aiti-6047	44	1	5	CARDINAL
aiti-6047	44	2	6	CARDINAL
aiti-6047	45	1	section 7	LAW
aiti-6047	45	2	section 8	LAW
aiti-6047	45	3	section 9. 2	DATE
aiti-6047	45	4	cra	ORG
aiti-6047	45	5	inverting decoupler	PERSON
aiti-6047	46	1	22	CARDINAL
aiti-6047	47	1	aparna et al	PERSON
aiti-6047	48	1	25	CARDINAL
aiti-6047	49	1	6	CARDINAL
aiti-6047	49	2	2	CARDINAL
aiti-6047	49	3	2021	DATE
aiti-6047	50	1	90-105 92	QUANTITY
aiti-6047	52	1	1	CARDINAL
aiti-6047	54	1	zhou et al	PERSON
aiti-6047	55	1	26	CARDINAL
aiti-6047	56	1	cheng et al	PERSON
aiti-6047	57	1	27	CARDINAL
aiti-6047	58	1	28	CARDINAL
aiti-6047	59	1	29	CARDINAL
aiti-6047	60	1	30	CARDINAL
aiti-6047	61	1	natarajan	PERSON
aiti-6047	62	1	31	CARDINAL
aiti-6047	62	2	three	CARDINAL
aiti-6047	63	1	3	CARDINAL
aiti-6047	66	1	1200	CARDINAL
aiti-6047	69	1	0-5	CARDINAL
aiti-6047	69	2	fed	ORG
aiti-6047	69	3	12	CARDINAL
aiti-6047	71	1	1	CARDINAL
aiti-6047	72	1	0	CARDINAL
aiti-6047	72	2	12	CARDINAL
aiti-6047	73	1	3	CARDINAL
aiti-6047	75	1	fig	ORG
aiti-6047	76	1	1	CARDINAL
aiti-6047	78	1	6	CARDINAL
aiti-6047	78	2	2	CARDINAL
aiti-6047	78	3	2021	DATE
aiti-6047	79	1	90	CARDINAL
aiti-6047	80	1	four	CARDINAL
aiti-6047	82	1	four	CARDINAL
aiti-6047	83	1	2	CARDINAL
aiti-6047	84	1	first	ORDINAL
aiti-6047	84	2	two	CARDINAL
aiti-6047	84	3	32	CARDINAL
aiti-6047	84	4	1	CARDINAL
aiti-6047	88	1	2	CARDINAL
aiti-6047	88	2	1	CARDINAL
aiti-6047	88	3	1	CARDINAL
aiti-6047	88	4	2	CARDINAL
aiti-6047	88	5	3 10.9–13.6 0.98 12.75	QUANTITY
aiti-6047	88	6	1	CARDINAL
aiti-6047	88	7	2.75	CARDINAL
aiti-6047	88	8	4 13.7–24.4	CARDINAL
aiti-6047	88	9	1 5.25	CARDINAL
aiti-6047	89	1	5.1	CARDINAL
aiti-6047	90	1	cohen & coon	ORG
aiti-6047	90	2	1	CARDINAL
aiti-6047	90	3	3	CARDINAL
aiti-6047	90	4	32	CARDINAL
aiti-6047	90	5	kc	PERSON
aiti-6047	90	6	ki	PERSON
aiti-6047	91	1	cohen	PERSON
aiti-6047	92	1	2	CARDINAL
aiti-6047	93	1	1 4 1 3 4	TIME
aiti-6047	93	2	k k t τ	FAC
aiti-6047	93	3		PERSON
aiti-6047	93	4	  	PRODUCT
aiti-6047	94	1	1	CARDINAL
aiti-6047	94	2	6	CARDINAL
aiti-6047	94	3	2	CARDINAL
aiti-6047	94	4	2021	DATE
aiti-6047	95	1	90	CARDINAL
aiti-6047	95	2	60	CARDINAL
aiti-6047	95	3	13 8	DATE
aiti-6047	99	1	 	PERSON
aiti-6047	100	1		LAW
aiti-6047	100	2	=	ORG
aiti-6047	100	3	  	ORG
aiti-6047	100	4	2	CARDINAL
aiti-6047	100	5	4 2	CARDINAL
aiti-6047	100	6	60	CARDINAL
aiti-6047	100	7	11	CARDINAL
aiti-6047	101	1	 	PERSON
aiti-6047	103	1	  	PRODUCT
aiti-6047	103	2	3	CARDINAL
aiti-6047	103	3	kc	PERSON
aiti-6047	103	4	ki	PERSON
aiti-6047	104	1	2	CARDINAL
aiti-6047	104	2	cohen-coon	PERSON
aiti-6047	104	3	kc ki	PERSON
aiti-6047	104	4	1 1.079	CARDINAL
aiti-6047	104	5	6.370	MONEY
aiti-6047	104	6	0.002	CARDINAL
aiti-6047	104	7	4.167 0.004	CARDINAL
aiti-6047	106	1	5.2	CARDINAL
aiti-6047	108	1	five	CARDINAL
aiti-6047	108	2	33	CARDINAL
aiti-6047	108	3	1	CARDINAL
aiti-6047	108	4	2	CARDINAL
aiti-6047	108	5	3	CARDINAL
aiti-6047	108	6	4	CARDINAL
aiti-6047	108	7	5	CARDINAL
aiti-6047	108	8	mamdani	PERSON
aiti-6047	110	1	0 to 100%	PERCENT
aiti-6047	111	1	0 to 25	DATE
aiti-6047	112	1	five	CARDINAL
aiti-6047	112	2	nb	ORG
aiti-6047	113	1	fig	ORG
aiti-6047	114	1	3	CARDINAL
aiti-6047	115	1	4	CARDINAL
aiti-6047	115	2	1	CARDINAL
aiti-6047	116	1	6	CARDINAL
aiti-6047	116	2	2	CARDINAL
aiti-6047	116	3	2021	DATE
aiti-6047	117	1	90	CARDINAL
aiti-6047	118	1	3	CARDINAL
aiti-6047	118	2	fig	ORG
aiti-6047	119	1	4	CARDINAL
aiti-6047	119	2	1	CARDINAL
aiti-6047	120	1	mape	ORG
aiti-6047	121	1	5x5	CARDINAL
aiti-6047	121	2	3	CARDINAL
aiti-6047	123	1	3	CARDINAL
aiti-6047	123	2	flc	PRODUCT
aiti-6047	123	3	1	CARDINAL
aiti-6047	123	4	ps nb	PERSON
aiti-6047	124	1	ps ns	ORG
aiti-6047	125	1	nb nb	ORG
aiti-6047	126	1	nb	ORG
aiti-6047	127	1	fig	ORG
aiti-6047	128	1	5	CARDINAL
aiti-6047	128	2	6	CARDINAL
aiti-6047	131	1	1	CARDINAL
aiti-6047	131	2	2 cm	QUANTITY
aiti-6047	131	3	2	CARDINAL
aiti-6047	131	4	8 cm	QUANTITY
aiti-6047	131	5	3	CARDINAL
aiti-6047	131	6	12 cm	QUANTITY
aiti-6047	131	7	4	CARDINAL
aiti-6047	131	8	18 cm	QUANTITY
aiti-6047	132	1	6.1	CARDINAL
aiti-6047	134	1	fig	ORG
aiti-6047	135	1	6	CARDINAL
aiti-6047	135	2	6	CARDINAL
aiti-6047	135	3	2	CARDINAL
aiti-6047	135	4	2021	DATE
aiti-6047	136	1	90	CARDINAL
aiti-6047	136	2	four	CARDINAL
aiti-6047	137	1	7	CARDINAL
aiti-6047	137	2	flc	ORG
aiti-6047	137	3	3	CARDINAL
aiti-6047	137	4	4	CARDINAL
aiti-6047	139	1	flc	ORG
aiti-6047	141	1	6	CARDINAL
aiti-6047	141	2	3	CARDINAL
aiti-6047	141	3	4	CARDINAL
aiti-6047	143	1	3	CARDINAL
aiti-6047	143	2	4	CARDINAL
aiti-6047	143	3	1	CARDINAL
aiti-6047	143	4	0.508	CARDINAL
aiti-6047	143	5	8.105 0.444	CARDINAL
aiti-6047	143	6	4.089 7.632	MONEY
aiti-6047	143	7	2	CARDINAL
aiti-6047	143	8	0.340	CARDINAL
aiti-6047	143	9	3.895	CARDINAL
aiti-6047	143	10	0.075 3	CARDINAL
aiti-6047	143	11	1.258	CARDINAL
aiti-6047	143	12	0.133	CARDINAL
aiti-6047	143	13	3.875	CARDINAL
aiti-6047	143	14	0.010 4	CARDINAL
aiti-6047	143	15	1.509	CARDINAL
aiti-6047	143	16	1.975 6.942	CARDINAL
aiti-6047	143	17	6.2	CARDINAL
aiti-6047	144	1	+10%	PERCENT
aiti-6047	144	2	20	CARDINAL
aiti-6047	144	3	60	CARDINAL
aiti-6047	144	4	100	CARDINAL
aiti-6047	144	5	120	CARDINAL
aiti-6047	146	1	8	CARDINAL
aiti-6047	148	1	8	CARDINAL
aiti-6047	150	1	6	CARDINAL
aiti-6047	150	2	2	CARDINAL
aiti-6047	150	3	2021	DATE
aiti-6047	151	1	90	CARDINAL
aiti-6047	151	2	8	CARDINAL
aiti-6047	152	1	3	CARDINAL
aiti-6047	152	2	4	CARDINAL
aiti-6047	153	1	9	CARDINAL
aiti-6047	153	2	3	CARDINAL
aiti-6047	153	3	'1'	DATE
aiti-6047	153	4	20	CARDINAL
aiti-6047	155	1	9	CARDINAL
aiti-6047	155	2	3	CARDINAL
aiti-6047	158	1	9	CARDINAL
aiti-6047	158	2	5	CARDINAL
aiti-6047	159	1	flc	PRODUCT
aiti-6047	160	1	5	CARDINAL
aiti-6047	160	2	1	CARDINAL
aiti-6047	160	3	0.508	CARDINAL
aiti-6047	160	4	7.125 0.444	CARDINAL
aiti-6047	160	5	4.089 1.431	MONEY
aiti-6047	160	6	2	CARDINAL
aiti-6047	160	7	0.994 6.179	CARDINAL
aiti-6047	160	8	3.895	CARDINAL
aiti-6047	160	9	0.075 3	CARDINAL
aiti-6047	160	10	1.258	CARDINAL
aiti-6047	160	11	5.985 0.133	CARDINAL
aiti-6047	160	12	3.875	CARDINAL
aiti-6047	160	13	0.009 4	CARDINAL
aiti-6047	160	14	1.509	CARDINAL
aiti-6047	160	15	1.975 1.717	CARDINAL
aiti-6047	161	1	o	DATE
aiti-6047	162	1	fig	ORG
aiti-6047	163	1	10	CARDINAL
aiti-6047	164	1	fig	ORG
aiti-6047	165	1	11	CARDINAL
aiti-6047	167	1	6	CARDINAL
aiti-6047	167	2	2	CARDINAL
aiti-6047	167	3	2021	DATE
aiti-6047	168	1	90	CARDINAL
aiti-6047	168	2	0-5	CARDINAL
aiti-6047	168	3	fed	ORG
aiti-6047	168	4	12-bit	QUANTITY
aiti-6047	169	1	ni myrio	PERSON
aiti-6047	169	2	fed	ORG
aiti-6047	170	1	12	CARDINAL
aiti-6047	170	2	13	DATE
aiti-6047	172	1	fig	ORG
aiti-6047	173	1	10	CARDINAL
aiti-6047	174	1	11	CARDINAL
aiti-6047	176	1	12	CARDINAL
aiti-6047	177	1	0	CARDINAL
aiti-6047	177	2	12	CARDINAL
aiti-6047	180	1	6	CARDINAL
aiti-6047	180	2	2	CARDINAL
aiti-6047	180	3	2021	DATE
aiti-6047	181	1	90	CARDINAL
aiti-6047	182	1	13	CARDINAL
aiti-6047	185	1	7.1	CARDINAL
aiti-6047	187	1	150	CARDINAL
aiti-6047	188	1	flc	ORG
aiti-6047	189	1	14	CARDINAL
aiti-6047	189	2	four	CARDINAL
aiti-6047	189	3	fig	ORG
aiti-6047	190	1	15	CARDINAL
aiti-6047	190	2	3	CARDINAL
aiti-6047	191	1	14	CARDINAL
aiti-6047	192	1	3	CARDINAL
aiti-6047	192	2	4	CARDINAL
aiti-6047	193	1	15	CARDINAL
aiti-6047	193	2	3	CARDINAL
aiti-6047	194	1	6	CARDINAL
aiti-6047	194	2	2	CARDINAL
aiti-6047	194	3	2021	DATE
aiti-6047	195	1	90	CARDINAL
aiti-6047	196	1	6	CARDINAL
aiti-6047	198	1	flc	PRODUCT
aiti-6047	198	2	6	CARDINAL
aiti-6047	202	1	1	CARDINAL
aiti-6047	202	2	4.145	CARDINAL
aiti-6047	202	3	1.648 1.769	CARDINAL
aiti-6047	202	4	22.011	MONEY
aiti-6047	202	5	2	CARDINAL
aiti-6047	203	1	6.470	CARDINAL
aiti-6047	203	2	1.010 1.572	CARDINAL
aiti-6047	203	3	27.322	CARDINAL
aiti-6047	203	4	1.627 3	CARDINAL
aiti-6047	203	5	9.196	CARDINAL
aiti-6047	203	6	43.198	CARDINAL
aiti-6047	203	7	1.817 4	CARDINAL
aiti-6047	203	8	12.649	CARDINAL
aiti-6047	203	9	0.600	CARDINAL
aiti-6047	203	10	91.976	MONEY
aiti-6047	203	11	7.2	CARDINAL
aiti-6047	204	1	setpoint tracking &	ORG
aiti-6047	204	2	20	CARDINAL
aiti-6047	206	1	fig	ORG
aiti-6047	207	1	16	CARDINAL
aiti-6047	208	1	3	CARDINAL
aiti-6047	208	2	4	CARDINAL
aiti-6047	209	1	17	CARDINAL
aiti-6047	209	2	3	CARDINAL
aiti-6047	209	3	6	CARDINAL
aiti-6047	209	4	2	CARDINAL
aiti-6047	209	5	2021	DATE
aiti-6047	210	1	90	CARDINAL
aiti-6047	211	1	16	CARDINAL
aiti-6047	211	2	four	CARDINAL
aiti-6047	212	1	fig	ORG
aiti-6047	213	1	17	CARDINAL
aiti-6047	213	2	3	CARDINAL
aiti-6047	213	3	4	DATE
aiti-6047	214	1	16	CARDINAL
aiti-6047	214	2	17	CARDINAL
aiti-6047	216	1	17	CARDINAL
aiti-6047	216	2	7	CARDINAL
aiti-6047	219	1	7	CARDINAL
aiti-6047	223	1	1	CARDINAL
aiti-6047	223	2	4.145	CARDINAL
aiti-6047	223	3	1.648 1.769	CARDINAL
aiti-6047	223	4	18.963	CARDINAL
aiti-6047	223	5	19.030	CARDINAL
aiti-6047	223	6	1.997 2	CARDINAL
aiti-6047	224	1	6.470	CARDINAL
aiti-6047	224	2	1.010 1.572	CARDINAL
aiti-6047	224	3	27.322	CARDINAL
aiti-6047	224	4	1.627 3	CARDINAL
aiti-6047	224	5	9.196	CARDINAL
aiti-6047	224	6	29.970	MONEY
aiti-6047	224	7	1.478	MONEY
aiti-6047	224	8	43.198	CARDINAL
aiti-6047	224	9	1.817 4	CARDINAL
aiti-6047	224	10	12.649	CARDINAL
aiti-6047	224	11	0.022 0.598	CARDINAL
aiti-6047	226	1	18 to 21	DATE
aiti-6047	227	1	3	CARDINAL
aiti-6047	228	1	18	CARDINAL
aiti-6047	229	1	3	CARDINAL
aiti-6047	230	1	19	CARDINAL
aiti-6047	231	1	3	CARDINAL
aiti-6047	231	2	4	CARDINAL
aiti-6047	232	1	18	CARDINAL
aiti-6047	232	2	3	CARDINAL
aiti-6047	235	1	20	CARDINAL
aiti-6047	235	2	3 & 4	DATE
aiti-6047	237	1	21	CARDINAL
aiti-6047	237	2	3 & 4	DATE
aiti-6047	239	1	6	CARDINAL
aiti-6047	239	2	2	CARDINAL
aiti-6047	239	3	2021	DATE
aiti-6047	240	1	90	CARDINAL
aiti-6047	240	2	3	CARDINAL
aiti-6047	240	3	4	CARDINAL
aiti-6047	241	1	19	CARDINAL
aiti-6047	241	2	3	CARDINAL
aiti-6047	243	1	21	CARDINAL
aiti-6047	243	2	8	CARDINAL
aiti-6047	245	1	3	CARDINAL
aiti-6047	245	2	4	CARDINAL
aiti-6047	246	1	20	CARDINAL
aiti-6047	247	1	3	CARDINAL
aiti-6047	247	2	3	CARDINAL
aiti-6047	247	3	4	CARDINAL
aiti-6047	248	1	21	CARDINAL
aiti-6047	249	1	3	CARDINAL
aiti-6047	251	1	one	CARDINAL
aiti-6047	253	1	6	CARDINAL
aiti-6047	253	2	2	CARDINAL
aiti-6047	253	3	2021	DATE
aiti-6047	254	1	90	CARDINAL
aiti-6047	256	1	8	CARDINAL
aiti-6047	256	2	9	CARDINAL
aiti-6047	263	1	flc	PRODUCT
aiti-6047	263	2	flc	ORG
aiti-6047	266	1	b. s. abdur rahman crescent institute of science and technology	PERSON
aiti-6047	267	1	adc	PERSON
aiti-6047	268	1	6	CARDINAL
aiti-6047	268	2	2	CARDINAL
aiti-6047	268	3	2021	DATE
aiti-6047	269	1	90	CARDINAL
aiti-6047	269	2	smc	ORG
aiti-6047	270	1	1	CARDINAL
aiti-6047	270	2	k. j. åström	PERSON
aiti-6047	270	3	dover	GPE
aiti-6047	271	1	berlin	GPE
aiti-6047	272	1	heidelberg	GPE
aiti-6047	272	2	1991	DATE
aiti-6047	273	1	2	CARDINAL
aiti-6047	273	2	i. murakami	PERSON
aiti-6047	273	3	t. sakanushi	GPE
aiti-6047	273	4	k. yamada	PERSON
aiti-6047	274	1	5	CARDINAL
aiti-6047	274	2	three	CARDINAL
aiti-6047	274	3	new york	GPE
aiti-6047	274	4	ny	GPE
aiti-6047	274	5	10016-5990	CARDINAL
aiti-6047	274	6	asme	ORG
aiti-6047	274	7	2009	DATE
aiti-6047	275	1	3	CARDINAL
aiti-6047	275	2	k. j. åström	PERSON
aiti-6047	275	3	r. m. murray	PERSON
aiti-6047	275	4	princeton university press	ORG
aiti-6047	275	5	2008	DATE
aiti-6047	276	1	4	CARDINAL
aiti-6047	276	2	g. chong	PERSON
aiti-6047	276	3	l. yun	PERSON
aiti-6047	276	4	13	CARDINAL
aiti-6047	276	5	4	CARDINAL
aiti-6047	277	1	559-576	CARDINAL
aiti-6047	277	2	july 2005	DATE
aiti-6047	278	1	5	CARDINAL
aiti-6047	278	2	k. j. åström	PERSON
aiti-6047	278	3	9	CARDINAL
aiti-6047	278	4	11	CARDINAL
aiti-6047	278	5	1163-1175	CARDINAL
aiti-6047	278	6	november 2001	DATE
aiti-6047	279	1	6	CARDINAL
aiti-6047	279	2	g. stein	PERSON
aiti-6047	279	3	connecticut	GPE
aiti-6047	279	4	yale university	ORG
aiti-6047	279	5	1980	DATE
aiti-6047	280	1	7	CARDINAL
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