id	sid	eid	entity	type
aiti-6724	2	1	6	CARDINAL
aiti-6724	2	2	2	CARDINAL
aiti-6724	2	3	2021	DATE
aiti-6724	3	1	106	CARDINAL
aiti-6724	3	2	university of rennes 1, 35042 rennes	ORG
aiti-6724	3	3	france national coordination for	ORG
aiti-6724	3	4	38016	DATE
aiti-6724	3	5	grenoble	PERSON
aiti-6724	3	6	france	GPE
aiti-6724	3	7	12	CARDINAL
aiti-6724	3	8	november 2020	DATE
aiti-6724	3	9	30 december 2020	DATE
aiti-6724	3	10	04	CARDINAL
aiti-6724	3	11	february 2021	DATE
aiti-6724	3	12	today	DATE
aiti-6724	6	1	2030	DATE
aiti-6724	8	1	french	NORP
aiti-6724	13	1	1	CARDINAL
aiti-6724	15	1	1	CARDINAL
aiti-6724	19	1	2	CARDINAL
aiti-6724	19	2	3	CARDINAL
aiti-6724	21	1	4	CARDINAL
aiti-6724	22	1	2030	DATE
aiti-6724	22	2	5	CARDINAL
aiti-6724	23	1	french	NORP
aiti-6724	24	1	6	CARDINAL
aiti-6724	30	1	6	CARDINAL
aiti-6724	30	2	2	CARDINAL
aiti-6724	30	3	2021	DATE
aiti-6724	31	1	106	CARDINAL
aiti-6724	39	1	french	NORP
aiti-6724	40	1	first	ORDINAL
aiti-6724	42	1	4	CARDINAL
aiti-6724	43	1	second	ORDINAL
aiti-6724	45	1	france	GPE
aiti-6724	47	1	2	CARDINAL
aiti-6724	47	2	first	ORDINAL
aiti-6724	49	1	france	GPE
aiti-6724	50	1	2.1	CARDINAL
aiti-6724	50	2	the next few decades	DATE
aiti-6724	50	3	6	CARDINAL
aiti-6724	52	1	french	NORP
aiti-6724	53	1	7	CARDINAL
aiti-6724	54	1	several years	DATE
aiti-6724	54	2	march 15, 2019	DATE
aiti-6724	55	1	8	CARDINAL
aiti-6724	57	1	france	GPE
aiti-6724	57	2	1,100	CARDINAL
aiti-6724	57	3	230,000	CARDINAL
aiti-6724	57	4	15 billion euros	MONEY
aiti-6724	58	1	6	CARDINAL
aiti-6724	59	1	4	CARDINAL
aiti-6724	59	2	1	CARDINAL
aiti-6724	59	3	2	CARDINAL
aiti-6724	59	4	3	CARDINAL
aiti-6724	59	5	4	CARDINAL
aiti-6724	61	1	6	CARDINAL
aiti-6724	61	2	2	CARDINAL
aiti-6724	61	3	2021	DATE
aiti-6724	62	1	106	CARDINAL
aiti-6724	62	2	2.2	CARDINAL
aiti-6724	66	1	9	CARDINAL
aiti-6724	67	1	the last sixty years	DATE
aiti-6724	68	1	10	CARDINAL
aiti-6724	70	1	about fifteen years	DATE
aiti-6724	70	2	third	ORDINAL
aiti-6724	71	1	11	CARDINAL
aiti-6724	71	2	several thousand	CARDINAL
aiti-6724	71	3	billions	CARDINAL
aiti-6724	72	1	12	CARDINAL
aiti-6724	75	1	2.3	CARDINAL
aiti-6724	76	1	french	NORP
aiti-6724	76	2	french	NORP
aiti-6724	78	1	four	CARDINAL
aiti-6724	78	2	1	CARDINAL
aiti-6724	78	3	2	CARDINAL
aiti-6724	78	4	3	CARDINAL
aiti-6724	78	5	france	GPE
aiti-6724	78	6	4	CARDINAL
aiti-6724	79	1	four	CARDINAL
aiti-6724	79	2	2019	DATE
aiti-6724	80	1	first	ORDINAL
aiti-6724	82	1	second	ORDINAL
aiti-6724	83	1	1	CARDINAL
aiti-6724	83	2	2	CARDINAL
aiti-6724	83	3	3	CARDINAL
aiti-6724	83	4	4	CARDINAL
aiti-6724	84	1	two	CARDINAL
aiti-6724	86	1	6	CARDINAL
aiti-6724	86	2	2	CARDINAL
aiti-6724	86	3	2021	DATE
aiti-6724	87	1	106	CARDINAL
aiti-6724	87	2	4.0	CARDINAL
aiti-6724	91	1	3.1	CARDINAL
aiti-6724	91	2	first	ORDINAL
aiti-6724	92	1	two	CARDINAL
aiti-6724	95	1	1	CARDINAL
aiti-6724	96	1	9	CARDINAL
aiti-6724	98	1	1	CARDINAL
aiti-6724	99	1	3.2	CARDINAL
aiti-6724	100	1	13	CARDINAL
aiti-6724	102	1	2	CARDINAL
aiti-6724	103	1	14	CARDINAL
aiti-6724	105	1	about thirty	CARDINAL
aiti-6724	107	1	2	CARDINAL
aiti-6724	107	2	6	CARDINAL
aiti-6724	107	3	2	CARDINAL
aiti-6724	107	4	2021	DATE
aiti-6724	108	1	106	CARDINAL
aiti-6724	108	2	3.3	CARDINAL
aiti-6724	110	1	15	CARDINAL
aiti-6724	111	1	one	CARDINAL
aiti-6724	111	2	up to	QUANTITY
aiti-6724	111	3	5.12 kwh	QUANTITY
aiti-6724	112	1	16	CARDINAL
aiti-6724	112	2	5	CARDINAL
aiti-6724	112	3	25 kwh	QUANTITY
aiti-6724	114	1	3	CARDINAL
aiti-6724	115	1	3	CARDINAL
aiti-6724	115	2	48%	PERCENT
aiti-6724	115	3	38%	PERCENT
aiti-6724	115	4	14%	PERCENT
aiti-6724	115	5	hertzian	NORP
aiti-6724	116	1	fig	PERSON
aiti-6724	117	1	4	CARDINAL
aiti-6724	117	2	two	CARDINAL
aiti-6724	120	1	4	CARDINAL
aiti-6724	120	2	2	CARDINAL
aiti-6724	121	1	2018	DATE
aiti-6724	121	2	2,900	CARDINAL
aiti-6724	121	3	twh	ORG
aiti-6724	121	4	320	CARDINAL
aiti-6724	121	5	annual	DATE
aiti-6724	121	6	11%	PERCENT
aiti-6724	121	7	17	CARDINAL
aiti-6724	122	1	the beginning of 2020	DATE
aiti-6724	122	2	about 3	CARDINAL
aiti-6724	123	1	4	CARDINAL
aiti-6724	123	2	covid-19	PRODUCT
aiti-6724	123	3	2020	DATE
aiti-6724	124	1	124,600	CARDINAL
aiti-6724	124	2	twh	ORG
aiti-6724	124	3	2040	CARDINAL
aiti-6724	124	4	15,000 gw	QUANTITY
aiti-6724	124	5	15,000	CARDINAL
aiti-6724	125	1	2018	DATE
aiti-6724	125	2	18	CARDINAL
aiti-6724	126	1	4.0	CARDINAL
aiti-6724	129	1	first	ORDINAL
aiti-6724	129	2	60%	PERCENT
aiti-6724	130	1	10	CARDINAL
aiti-6724	130	2	the next 20 years	DATE
aiti-6724	131	1	6	CARDINAL
aiti-6724	131	2	2	CARDINAL
aiti-6724	131	3	2021	DATE
aiti-6724	132	1	106	CARDINAL
aiti-6724	133	1	5	CARDINAL
aiti-6724	134	1	4	CARDINAL
aiti-6724	134	2	32	CARDINAL
aiti-6724	134	3	6.5	CARDINAL
aiti-6724	135	1	annual	DATE
aiti-6724	135	2	nineteen thousand terawatt-hours	DATE
aiti-6724	136	1	today	DATE
aiti-6724	137	1	fig	ORG
aiti-6724	138	1	5	CARDINAL
aiti-6724	138	2	2040	CARDINAL
aiti-6724	139	1	57,000	CARDINAL
aiti-6724	139	2	twh	ORG
aiti-6724	139	3	2040 3.4	CARDINAL
aiti-6724	140	1	10	CARDINAL
aiti-6724	142	1	french	NORP
aiti-6724	143	1	18	CARDINAL
aiti-6724	144	1	13	CARDINAL
aiti-6724	144	2	1	CARDINAL
aiti-6724	144	3	2	CARDINAL
aiti-6724	145	1	3	CARDINAL
aiti-6724	145	2	third	ORDINAL
aiti-6724	146	1	three	CARDINAL
aiti-6724	146	2	4	CARDINAL
aiti-6724	146	3	5	CARDINAL
aiti-6724	146	4	6	CARDINAL
aiti-6724	146	5	7	CARDINAL
aiti-6724	148	1	8)	CARDINAL
aiti-6724	151	1	6	CARDINAL
aiti-6724	151	2	2	CARDINAL
aiti-6724	151	3	2021	DATE
aiti-6724	152	1	106	CARDINAL
aiti-6724	154	1	19	CARDINAL
aiti-6724	156	1	20	CARDINAL
aiti-6724	159	1	french	NORP
aiti-6724	160	1	4	CARDINAL
aiti-6724	160	2	4.1	CARDINAL
aiti-6724	161	1	18	CARDINAL
aiti-6724	162	1	21	CARDINAL
aiti-6724	163	1	twelve	CARDINAL
aiti-6724	163	2	twelve	CARDINAL
aiti-6724	163	3	french	NORP
aiti-6724	164	1	22	CARDINAL
aiti-6724	165	1	twelve	CARDINAL
aiti-6724	166	1	eighty	CARDINAL
aiti-6724	166	2	7	CARDINAL
aiti-6724	168	1	two	CARDINAL
aiti-6724	168	2	acsiel alliance electronics	ORG
aiti-6724	169	1	23	CARDINAL
aiti-6724	170	1	more than 150	CARDINAL
aiti-6724	171	1	4.2	CARDINAL
aiti-6724	174	1	24	CARDINAL
aiti-6724	176	1	6	CARDINAL
aiti-6724	178	1	6	CARDINAL
aiti-6724	178	2	2	CARDINAL
aiti-6724	178	3	2021	DATE
aiti-6724	179	1	106	CARDINAL
aiti-6724	179	2	the 21st century	DATE
aiti-6724	179	3	4.0	CARDINAL
aiti-6724	180	1	eight years	DATE
aiti-6724	181	1	25	CARDINAL
aiti-6724	181	2	twelve	CARDINAL
aiti-6724	182	1	the eight years	DATE
aiti-6724	182	2	2012	DATE
aiti-6724	182	3	2019	DATE
aiti-6724	182	4	26	CARDINAL
aiti-6724	185	1	6	CARDINAL
aiti-6724	186	1	4.3	CARDINAL
aiti-6724	188	1	fig	ORG
aiti-6724	189	1	7	CARDINAL
aiti-6724	189	2	two	CARDINAL
aiti-6724	190	1	fig	ORG
aiti-6724	191	1	7	CARDINAL
aiti-6724	192	1	27-28	CARDINAL
aiti-6724	193	1	29	CARDINAL
aiti-6724	198	1	29	CARDINAL
aiti-6724	200	1	30	CARDINAL
aiti-6724	202	1	4.4	CARDINAL
aiti-6724	203	1	22	CARDINAL
aiti-6724	203	2	28	CARDINAL
aiti-6724	205	1	8	CARDINAL
aiti-6724	206	1	6	CARDINAL
aiti-6724	206	2	2	CARDINAL
aiti-6724	206	3	2021	DATE
aiti-6724	206	4	106	CARDINAL
aiti-6724	206	5	116 114	CARDINAL
aiti-6724	208	1	the french union	ORG
aiti-6724	210	1	8	CARDINAL
aiti-6724	211	1	more than 80	CARDINAL
aiti-6724	211	2	the last decade	DATE
aiti-6724	212	1	every year	DATE
aiti-6724	212	2	nearly 6,000	CARDINAL
aiti-6724	212	3	11,000	CARDINAL
aiti-6724	213	1	china	GPE
aiti-6724	214	1	32	CARDINAL
aiti-6724	215	1	5	CARDINAL
aiti-6724	215	2	more than 60 years	DATE
aiti-6724	215	3	4.0	CARDINAL
aiti-6724	217	1	2019	DATE
aiti-6724	219	1	french	NORP
aiti-6724	220	1	french	NORP
aiti-6724	221	1	l. chagoya-garzon	PERSON
aiti-6724	223	1	6	CARDINAL
aiti-6724	223	2	2	CARDINAL
aiti-6724	223	3	2021	DATE
aiti-6724	224	1	106	CARDINAL
aiti-6724	225	1	1	CARDINAL
aiti-6724	225	2	m. burgess	PERSON
aiti-6724	225	3	2018	DATE
aiti-6724	226	1	2	CARDINAL
aiti-6724	226	2	a. schütze	PERSON
aiti-6724	226	3	n. helwig	PERSON
aiti-6724	226	4	t. schneider	ORG
aiti-6724	226	5	4.0	CARDINAL
aiti-6724	226	6	4.0	CARDINAL
aiti-6724	227	1	7	CARDINAL
aiti-6724	227	2	1	CARDINAL
aiti-6724	228	1	359-371	CARDINAL
aiti-6724	228	2	may 2018	DATE
aiti-6724	229	1	3	CARDINAL
aiti-6724	229	2	r. smith	PERSON
aiti-6724	229	3	march 04, 2019	DATE
aiti-6724	230	1	4	CARDINAL
aiti-6724	230	2	l. fesquet	PERSON
aiti-6724	230	3	august 2018	DATE
aiti-6724	231	1	1-4	CARDINAL
aiti-6724	232	1	5	CARDINAL
aiti-6724	232	2	e. gelenbe	PERSON
aiti-6724	232	3	june 2015	DATE
aiti-6724	233	1	1-15	CARDINAL
aiti-6724	234	1	6	CARDINAL
aiti-6724	235	1	2019	DATE
aiti-6724	235	2	24	DATE
aiti-6724	236	1	255-266	CARDINAL
aiti-6724	236	2	june 2019	DATE
aiti-6724	237	1	8	CARDINAL
aiti-6724	237	2	https://www.economie.gouv.fr/signature-contrat-comite-strategique-filiere-industrie-electronique-plan-nano-2022	ORG
aiti-6724	238	1	9	CARDINAL
aiti-6724	238	2	l. fesquet	PERSON
aiti-6724	238	3	9	CARDINAL
aiti-6724	239	1	1-8	DATE
aiti-6724	240	1	10	CARDINAL
aiti-6724	240	2	g. e. moore	PERSON
aiti-6724	241	1	38	DATE
aiti-6724	241	2	8	CARDINAL
aiti-6724	242	1	114-117	CARDINAL
aiti-6724	242	2	april 1965	DATE
aiti-6724	243	1	11	CARDINAL
aiti-6724	243	2	k. cheval	PERSON
aiti-6724	243	3	j. coulm	PERSON
aiti-6724	243	4	s. gout	PERSON
aiti-6724	243	5	d. leonard	PERSON
aiti-6724	243	6	3d	CARDINAL
aiti-6724	243	7	1038	CARDINAL
aiti-6724	244	1	57-60	CARDINAL
aiti-6724	245	1	12	CARDINAL
aiti-6724	245	2	r. r. tummala	PERSON
aiti-6724	245	3	m. swaminathan	PERSON
aiti-6724	246	1	mcgraw-hill	ORG
aiti-6724	246	2	2008	DATE
aiti-6724	247	1	13	CARDINAL
aiti-6724	247	2	10	CARDINAL
aiti-6724	247	3	2	CARDINAL
aiti-6724	248	1	115	CARDINAL
aiti-6724	249	1	14	CARDINAL
aiti-6724	249	2	trillion	CARDINAL
aiti-6724	249	3	2015	DATE
aiti-6724	250	1	15	CARDINAL
aiti-6724	250	2	2019	DATE
aiti-6724	250	3	production.html	DATE
aiti-6724	250	4	march 2019	DATE
aiti-6724	251	1	16	CARDINAL
aiti-6724	251	2	m. greenfield	PERSON
aiti-6724	251	3	17	CARDINAL
aiti-6724	251	4	2020	DATE
aiti-6724	252	1	18	CARDINAL
aiti-6724	252	2	a. bsiesy	PERSON
aiti-6724	252	3	5	CARDINAL
aiti-6724	252	4	2	CARDINAL
aiti-6724	253	1	65-75	CARDINAL
aiti-6724	253	2	april 2020	DATE
aiti-6724	254	1	19	CARDINAL
aiti-6724	254	2	june 2017	DATE
aiti-6724	255	1	10-11	CARDINAL
aiti-6724	256	1	20	CARDINAL
aiti-6724	256	2	l. fesquet	PERSON
aiti-6724	256	3	15th	ORDINAL
aiti-6724	256	4	august 2015	DATE
aiti-6724	257	1	1-5	CARDINAL
aiti-6724	258	1	21	CARDINAL
aiti-6724	258	2	december 2020	DATE
aiti-6724	259	1	22	CARDINAL
aiti-6724	259	2	p. gentil	ORG
aiti-6724	259	3	a. bsiesy	PERSON
aiti-6724	259	4	s. retailleau	PERSON
aiti-6724	259	5	e. d. gergam	PERSON
aiti-6724	259	6	j. m. dorkel	PERSON
aiti-6724	259	7	french	NORP
aiti-6724	259	8	april 2011	DATE
aiti-6724	260	1	122-127	CARDINAL
aiti-6724	262	1	6	CARDINAL
aiti-6724	262	2	2	CARDINAL
aiti-6724	262	3	2021	DATE
aiti-6724	263	1	106	CARDINAL
aiti-6724	263	2	23	CARDINAL
aiti-6724	263	3	é lectronique	ORG
aiti-6724	263	4	france	GPE
aiti-6724	263	5	2019	DATE
aiti-6724	264	1	24	CARDINAL
aiti-6724	264	2	july 2019	DATE
aiti-6724	265	1	1-3	CARDINAL
aiti-6724	266	1	25] finmina	DATE
aiti-6724	266	2	march 2020	DATE
aiti-6724	267	1	26	CARDINAL
aiti-6724	267	2	french	NORP
aiti-6724	267	3	188	CARDINAL
aiti-6724	268	1	31-44	DATE
aiti-6724	269	1	27	CARDINAL
aiti-6724	269	2	l. fesquet	PERSON
aiti-6724	269	3	french	NORP
aiti-6724	269	4	2016 11th	DATE
aiti-6724	269	5	southampton	GPE
aiti-6724	269	6	2016	DATE
aiti-6724	270	1	1-6	CARDINAL
aiti-6724	271	1	28	CARDINAL
aiti-6724	271	2	99	CARDINAL
aiti-6724	272	1	267-275	CARDINAL
aiti-6724	272	2	may 2018	DATE
aiti-6724	273	1	29	CARDINAL
aiti-6724	273	2	french	NORP
aiti-6724	273	3	17th	ORDINAL
aiti-6724	273	4	august 2018	DATE
aiti-6724	274	1	1-4	CARDINAL
aiti-6724	275	1	30	CARDINAL
aiti-6724	275	2	ecs	ORG
aiti-6724	275	3	67	CARDINAL
aiti-6724	275	4	1	CARDINAL
aiti-6724	276	1	147-158	CARDINAL
aiti-6724	276	2	2015	DATE
aiti-6724	277	1	31	CARDINAL
aiti-6724	277	2	l. fesquet	PERSON
aiti-6724	277	3	september 2016	DATE
aiti-6724	278	1	119	CARDINAL
aiti-6724	279	1	32	CARDINAL
aiti-6724	279	2	l. wei	PERSON
aiti-6724	279	3	chinese	NORP
aiti-6724	279	4	4	CARDINAL
aiti-6724	280	1	19-21	DATE
aiti-6724	280	2	october 2016	DATE
aiti-6724	281	1	33	CARDINAL
aiti-6724	281	2	y. h. kuang	PERSON
aiti-6724	281	3	l. yuan	PERSON
aiti-6724	281	4	chinese	NORP
aiti-6724	282	1	3	CARDINAL
aiti-6724	282	2	3	CARDINAL
aiti-6724	283	1	126	CARDINAL
aiti-6724	283	2	march 2018	DATE
aiti-6724	285	1	taeti	GPE
aiti-6724	285	2	taiwan	GPE
aiti-6724	286	1	https://creativecommons.org/licenses/by-nc/4.0/	ORG