id	sid	tid	token	lemma	pos
aiti-175	1	1	advances	advance	NOUN
aiti-175	1	2	in	in	ADP
aiti-175	1	3	technology	technology	NOUN
aiti-175	1	4	innovation	innovation	NOUN
aiti-175	1	5	,	,	PUNCT
aiti-175	1	6	vol	vol	NOUN
aiti-175	1	7	.	.	PROPN
aiti-175	2	1	1	1	NUM
aiti-175	2	2	,	,	PUNCT
aiti-175	2	3	no	no	INTJ
aiti-175	2	4	.	.	NOUN
aiti-175	2	5	2	2	NUM
aiti-175	2	6	,	,	PUNCT
aiti-175	2	7	2016	2016	NUM
aiti-175	2	8	,	,	PUNCT
aiti-175	2	9	pp	pp	ADJ
aiti-175	2	10	.	.	PUNCT
aiti-175	3	1	29	29	NUM
aiti-175	3	2	32	32	NUM
aiti-175	3	3	29	29	NUM
aiti-175	3	4	copyright	copyright	NOUN
aiti-175	3	5	©	©	PROPN
aiti-175	3	6	taeti	taeti	PROPN
aiti-175	3	7	reduction	reduction	NOUN
aiti-175	3	8	of	of	ADP
aiti-175	3	9	residual	residual	ADJ
aiti-175	3	10	stresses	stress	NOUN
aiti-175	3	11	in	in	ADP
aiti-175	3	12	sapphire	sapphire	NOUN
aiti-175	3	13	cover	cover	NOUN
aiti-175	3	14	glass	glass	NOUN
aiti-175	3	15	induced	induce	VERB
aiti-175	3	16	by	by	ADP
aiti-175	3	17	mechanical	mechanical	ADJ
aiti-175	3	18	polishing	polishing	NOUN
aiti-175	3	19	and	and	CCONJ
aiti-175	3	20	laser	laser	NOUN
aiti-175	3	21	chamfering	chamfer	VERB
aiti-175	3	22	through	through	ADP
aiti-175	3	23	etching	etch	VERB
aiti-175	3	24	shih	shih	NOUN
aiti-175	3	25	-	-	PUNCT
aiti-175	3	26	jeh	jeh	PROPN
aiti-175	3	27	wu1	wu1	NOUN
aiti-175	3	28	,	,	PUNCT
aiti-175	3	29	*	*	PROPN
aiti-175	3	30	,	,	PUNCT
aiti-175	3	31	hsiang	hsiang	PROPN
aiti-175	3	32	-	-	PUNCT
aiti-175	3	33	chen	chen	PROPN
aiti-175	3	34	hsu1,2	hsu1,2	PROPN
aiti-175	3	35	and	and	CCONJ
aiti-175	3	36	wen	wen	PROPN
aiti-175	3	37	-	-	PROPN
aiti-175	3	38	fei	fei	PROPN
aiti-175	3	39	lin3	lin3	PROPN
aiti-175	3	40	1	1	NUM
aiti-175	3	41	department	department	NOUN
aiti-175	3	42	of	of	ADP
aiti-175	3	43	mechanical	mechanical	ADJ
aiti-175	3	44	and	and	CCONJ
aiti-175	3	45	automation	automation	NOUN
aiti-175	3	46	engineering	engineering	NOUN
aiti-175	3	47	,	,	PUNCT
aiti-175	3	48	i	i	PROPN
aiti-175	3	49	-	-	PUNCT
aiti-175	3	50	shou	shou	PROPN
aiti-175	3	51	university	university	PROPN
aiti-175	3	52	,	,	PUNCT
aiti-175	3	53	kaohsiung	kaohsiung	PROPN
aiti-175	3	54	,	,	PUNCT
aiti-175	3	55	taiwan	taiwan	PROPN
aiti-175	3	56	.	.	PUNCT
aiti-175	4	1	2	2	NUM
aiti-175	4	2	department	department	NOUN
aiti-175	4	3	of	of	ADP
aiti-175	4	4	industrial	industrial	ADJ
aiti-175	4	5	management	management	NOUN
aiti-175	4	6	,	,	PUNCT
aiti-175	4	7	i	i	PROPN
aiti-175	4	8	-	-	PUNCT
aiti-175	4	9	shou	shou	PROPN
aiti-175	4	10	university	university	PROPN
aiti-175	4	11	,	,	PUNCT
aiti-175	4	12	kaohsiung	kaohsiung	PROPN
aiti-175	4	13	,	,	PUNCT
aiti-175	4	14	taiwan	taiwan	PROPN
aiti-175	4	15	.	.	PUNCT
aiti-175	5	1	3	3	NUM
aiti-175	5	2	department	department	NOUN
aiti-175	5	3	of	of	ADP
aiti-175	5	4	material	material	NOUN
aiti-175	5	5	science	science	NOUN
aiti-175	5	6	and	and	CCONJ
aiti-175	5	7	engineering	engineering	NOUN
aiti-175	5	8	,	,	PUNCT
aiti-175	5	9	i	i	PROPN
aiti-175	5	10	-	-	PUNCT
aiti-175	5	11	shou	shou	PROPN
aiti-175	5	12	university	university	PROPN
aiti-175	5	13	,	,	PUNCT
aiti-175	5	14	kaohsiung	kaohsiung	PROPN
aiti-175	5	15	,	,	PUNCT
aiti-175	5	16	taiwan	taiwan	PROPN
aiti-175	5	17	.	.	PUNCT
aiti-175	5	18	received	receive	VERB
aiti-175	5	19	02	02	NUM
aiti-175	5	20	february	february	NOUN
aiti-175	5	21	2016	2016	NUM
aiti-175	5	22	;	;	PUNCT
aiti-175	5	23	received	receive	VERB
aiti-175	5	24	in	in	ADP
aiti-175	5	25	revised	revise	VERB
aiti-175	5	26	form	form	NOUN
aiti-175	5	27	30	30	NUM
aiti-175	5	28	march	march	NOUN
aiti-175	5	29	2016	2016	NUM
aiti-175	5	30	;	;	PUNCT
aiti-175	5	31	accepted	accept	VERB
aiti-175	5	32	02	02	NUM
aiti-175	5	33	april	april	PROPN
aiti-175	5	34	2016	2016	NUM
aiti-175	5	35	abstract	abstract	ADJ
aiti-175	5	36	sapphire	sapphire	NOUN
aiti-175	5	37	is	be	AUX
aiti-175	5	38	a	a	DET
aiti-175	5	39	hard	hard	ADJ
aiti-175	5	40	and	and	CCONJ
aiti-175	5	41	anti	anti	ADJ
aiti-175	5	42	-	-	ADJ
aiti-175	5	43	scratch	scratch	ADJ
aiti-175	5	44	material	material	NOUN
aiti-175	5	45	commonly	commonly	ADV
aiti-175	5	46	used	use	VERB
aiti-175	5	47	as	as	ADP
aiti-175	5	48	cover	cover	NOUN
aiti-175	5	49	glass	glass	NOUN
aiti-175	5	50	of	of	ADP
aiti-175	5	51	mobile	mobile	ADJ
aiti-175	5	52	devices	device	NOUN
aiti-175	5	53	such	such	ADJ
aiti-175	5	54	as	as	ADP
aiti-175	5	55	watches	watch	NOUN
aiti-175	5	56	and	and	CCONJ
aiti-175	5	57	mobile	mobile	ADJ
aiti-175	5	58	phones	phone	NOUN
aiti-175	5	59	.	.	PUNCT
aiti-175	6	1	a	a	DET
aiti-175	6	2	mechanical	mechanical	ADJ
aiti-175	6	3	polishing	polishing	NOUN
aiti-175	6	4	using	use	VERB
aiti-175	6	5	diamond	diamond	NOUN
aiti-175	6	6	slurry	slurry	NOUN
aiti-175	6	7	is	be	AUX
aiti-175	6	8	usually	usually	ADV
aiti-175	6	9	necessary	necessary	ADJ
aiti-175	6	10	to	to	PART
aiti-175	6	11	create	create	VERB
aiti-175	6	12	mirror	mirror	NOUN
aiti-175	6	13	surface	surface	NOUN
aiti-175	6	14	.	.	PUNCT
aiti-175	7	1	additional	additional	ADJ
aiti-175	7	2	chamfering	chamfering	NOUN
aiti-175	7	3	at	at	ADP
aiti-175	7	4	the	the	DET
aiti-175	7	5	edge	edge	NOUN
aiti-175	7	6	is	be	AUX
aiti-175	7	7	sometimes	sometimes	ADV
aiti-175	7	8	needed	need	VERB
aiti-175	7	9	by	by	ADP
aiti-175	7	10	mechanical	mechanical	ADJ
aiti-175	7	11	grinding	grinding	NOUN
aiti-175	7	12	.	.	PUNCT
aiti-175	8	1	these	these	DET
aiti-175	8	2	processes	process	NOUN
aiti-175	8	3	induce	induce	VERB
aiti-175	8	4	residual	residual	ADJ
aiti-175	8	5	stresses	stress	NOUN
aiti-175	8	6	and	and	CCONJ
aiti-175	8	7	the	the	DET
aiti-175	8	8	mechanical	mechanical	ADJ
aiti-175	8	9	strength	strength	NOUN
aiti-175	8	10	of	of	ADP
aiti-175	8	11	the	the	DET
aiti-175	8	12	sapphire	sapphire	NOUN
aiti-175	8	13	work	work	NOUN
aiti-175	8	14	p	p	PRON
aiti-175	8	15	iece	iece	NOUN
aiti-175	8	16	is	be	AUX
aiti-175	8	17	impaired	impaired	ADJ
aiti-175	8	18	.	.	PUNCT
aiti-175	9	1	in	in	ADP
aiti-175	9	2	this	this	DET
aiti-175	9	3	study	study	NOUN
aiti-175	9	4	wet	wet	ADJ
aiti-175	9	5	etching	etch	VERB
aiti-175	9	6	by	by	ADP
aiti-175	9	7	phosphate	phosphate	ADJ
aiti-175	9	8	acid	acid	NOUN
aiti-175	9	9	process	process	NOUN
aiti-175	9	10	is	be	AUX
aiti-175	9	11	applied	apply	VERB
aiti-175	9	12	to	to	PART
aiti-175	9	13	relief	relief	VERB
aiti-175	9	14	the	the	DET
aiti-175	9	15	induced	induced	ADJ
aiti-175	9	16	stress	stress	NOUN
aiti-175	9	17	in	in	ADP
aiti-175	9	18	a	a	DET
aiti-175	9	19	1	1	NUM
aiti-175	9	20	”	"	PUNCT
aiti-175	9	21	d	d	NOUN
aiti-175	9	22	iameter	iameter	NOUN
aiti-175	9	23	sapphire	sapphire	NOUN
aiti-175	9	24	cover	cover	VERB
aiti-175	9	25	glass	glass	NOUN
aiti-175	9	26	.	.	PUNCT
aiti-175	10	1	the	the	DET
aiti-175	10	2	sapphire	sapphire	NOUN
aiti-175	10	3	is	be	AUX
aiti-175	10	4	polished	polish	VERB
aiti-175	10	5	before	before	SCONJ
aiti-175	10	6	the	the	DET
aiti-175	10	7	edge	edge	NOUN
aiti-175	10	8	is	be	AUX
aiti-175	10	9	chamfered	chamfer	VERB
aiti-175	10	10	by	by	ADP
aiti-175	10	11	a	a	DET
aiti-175	10	12	picosecond	picosecond	NOUN
aiti-175	10	13	laser	laser	NOUN
aiti-175	10	14	.	.	PUNCT
aiti-175	11	1	residual	residual	ADJ
aiti-175	11	2	stresses	stress	NOUN
aiti-175	11	3	are	be	AUX
aiti-175	11	4	measured	measure	VERB
aiti-175	11	5	by	by	ADP
aiti-175	11	6	laser	laser	NOUN
aiti-175	11	7	curvature	curvature	NOUN
aiti-175	11	8	method	method	NOUN
aiti-175	11	9	at	at	ADP
aiti-175	11	10	different	different	ADJ
aiti-175	11	11	stages	stage	NOUN
aiti-175	11	12	of	of	ADP
aiti-175	11	13	machining	machining	NOUN
aiti-175	11	14	.	.	PUNCT
aiti-175	12	1	the	the	DET
aiti-175	12	2	results	result	NOUN
aiti-175	12	3	show	show	VERB
aiti-175	12	4	that	that	SCONJ
aiti-175	12	5	the	the	DET
aiti-175	12	6	wet	wet	ADJ
aiti-175	12	7	etching	etch	VERB
aiti-175	12	8	process	process	NOUN
aiti-175	12	9	effectively	effectively	ADV
aiti-175	12	10	relief	relief	VERB
aiti-175	12	11	the	the	DET
aiti-175	12	12	stress	stress	NOUN
aiti-175	12	13	and	and	CCONJ
aiti-175	12	14	the	the	DET
aiti-175	12	15	laser	laser	NOUN
aiti-175	12	16	machining	machining	NOUN
aiti-175	12	17	does	do	AUX
aiti-175	12	18	not	not	PART
aiti-175	12	19	incur	incur	VERB
aiti-175	12	20	serious	serious	ADJ
aiti-175	12	21	residual	residual	ADJ
aiti-175	12	22	stress	stress	NOUN
aiti-175	12	23	.	.	PUNCT
aiti-175	13	1	keywords	keyword	NOUN
aiti-175	13	2	:	:	PUNCT
aiti-175	13	3	picosecond	picosecond	NOUN
aiti-175	13	4	laser	laser	NOUN
aiti-175	13	5	,	,	PUNCT
aiti-175	13	6	laser	laser	NOUN
aiti-175	13	7	curvature	curvature	NOUN
aiti-175	13	8	method	method	NOUN
aiti-175	13	9	,	,	PUNCT
aiti-175	13	10	residual	residual	ADJ
aiti-175	13	11	stress	stress	NOUN
aiti-175	13	12	,	,	PUNCT
aiti-175	13	13	stress	stress	NOUN
aiti-175	13	14	relief	relief	NOUN
aiti-175	13	15	,	,	PUNCT
aiti-175	13	16	wet	wet	ADJ
aiti-175	13	17	etching	etching	NOUN
aiti-175	13	18	,	,	PUNCT
aiti-175	13	19	sapphire	sapphire	NOUN
aiti-175	13	20	1	1	NUM
aiti-175	13	21	.	.	PUNCT
aiti-175	13	22	introduction	introduction	NOUN
aiti-175	13	23	sapphire	sapphire	NOUN
aiti-175	13	24	is	be	AUX
aiti-175	13	25	the	the	DET
aiti-175	13	26	material	material	NOUN
aiti-175	13	27	to	to	PART
aiti-175	13	28	cover	cover	VERB
aiti-175	13	29	glasses	glass	NOUN
aiti-175	13	30	that	that	PRON
aiti-175	13	31	are	be	AUX
aiti-175	13	32	scratch	scratch	NOUN
aiti-175	13	33	and	and	CCONJ
aiti-175	13	34	impact	impact	NOUN
aiti-175	13	35	-	-	PUNCT
aiti-175	13	36	resistant	resistant	ADJ
aiti-175	13	37	,	,	PUNCT
aiti-175	13	38	yet	yet	CCONJ
aiti-175	13	39	flexib	flexib	NOUN
aiti-175	13	40	le	le	X
aiti-175	13	41	despite	despite	SCONJ
aiti-175	13	42	the	the	DET
aiti-175	13	43	introduction	introduction	NOUN
aiti-175	13	44	of	of	ADP
aiti-175	13	45	tempered	temper	VERB
aiti-175	13	46	glass	glass	NOUN
aiti-175	13	47	such	such	ADJ
aiti-175	13	48	as	as	ADP
aiti-175	13	49	corning	corn	VERB
aiti-175	13	50	®	®	NOUN
aiti-175	13	51	gorilla	gorilla	NOUN
aiti-175	13	52	.	.	PUNCT
aiti-175	14	1	in	in	ADP
aiti-175	14	2	addition	addition	NOUN
aiti-175	14	3	to	to	ADP
aiti-175	14	4	the	the	DET
aiti-175	14	5	use	use	NOUN
aiti-175	14	6	for	for	ADP
aiti-175	14	7	watch	watch	NOUN
aiti-175	14	8	glasses	glass	NOUN
aiti-175	14	9	or	or	CCONJ
aiti-175	14	10	as	as	ADP
aiti-175	14	11	cover	cover	NOUN
aiti-175	14	12	or	or	CCONJ
aiti-175	14	13	filter	filter	NOUN
aiti-175	14	14	glasses	glass	NOUN
aiti-175	14	15	for	for	ADP
aiti-175	14	16	camera	camera	NOUN
aiti-175	14	17	lenses	lense	NOUN
aiti-175	14	18	,	,	PUNCT
aiti-175	14	19	now	now	ADV
aiti-175	14	20	it	it	PRON
aiti-175	14	21	is	be	AUX
aiti-175	14	22	being	be	AUX
aiti-175	14	23	tried	try	VERB
aiti-175	14	24	for	for	ADP
aiti-175	14	25	cell	cell	NOUN
aiti-175	14	26	phone	phone	NOUN
aiti-175	14	27	displays	display	NOUN
aiti-175	14	28	as	as	ADV
aiti-175	14	29	well	well	ADV
aiti-175	14	30	.	.	PUNCT
aiti-175	15	1	sapphire	sapphire	NOUN
aiti-175	15	2	glass	glass	NOUN
aiti-175	15	3	is	be	AUX
aiti-175	15	4	made	make	VERB
aiti-175	15	5	of	of	ADP
aiti-175	15	6	colorless	colorless	ADJ
aiti-175	15	7	plates	plate	NOUN
aiti-175	15	8	of	of	ADP
aiti-175	15	9	synthetic	synthetic	ADJ
aiti-175	15	10	corundum	corundum	NOUN
aiti-175	15	11	,	,	PUNCT
aiti-175	15	12	i.e	i.e	PROPN
aiti-175	15	13	.	.	PUNCT
aiti-175	16	1	minerals	mineral	NOUN
aiti-175	16	2	produced	produce	VERB
aiti-175	16	3	with	with	ADP
aiti-175	16	4	molten	molten	ADJ
aiti-175	16	5	aluminum	aluminum	NOUN
aiti-175	16	6	oxide	oxide	NOUN
aiti-175	16	7	(	(	PUNCT
aiti-175	16	8	al2o3	al2o3	NOUN
aiti-175	16	9	)	)	PUNCT
aiti-175	16	10	.	.	PUNCT
aiti-175	17	1	in	in	ADP
aiti-175	17	2	fact	fact	NOUN
aiti-175	17	3	,	,	PUNCT
aiti-175	17	4	sapphire	sapphire	NOUN
aiti-175	17	5	glass	glass	NOUN
aiti-175	17	6	does	do	AUX
aiti-175	17	7	not	not	PART
aiti-175	17	8	have	have	VERB
aiti-175	17	9	a	a	DET
aiti-175	17	10	glass	glass	NOUN
aiti-175	17	11	-	-	PUNCT
aiti-175	17	12	like	like	ADJ
aiti-175	17	13	amorphous	amorphous	ADJ
aiti-175	17	14	structure	structure	NOUN
aiti-175	17	15	,	,	PUNCT
aiti-175	17	16	but	but	CCONJ
aiti-175	17	17	rather	rather	ADV
aiti-175	17	18	a	a	DET
aiti-175	17	19	crystalline	crystalline	ADJ
aiti-175	17	20	structure	structure	NOUN
aiti-175	17	21	.	.	PUNCT
aiti-175	18	1	with	with	ADP
aiti-175	18	2	a	a	DET
aiti-175	18	3	hardness	hardness	NOUN
aiti-175	18	4	of	of	ADP
aiti-175	18	5	9	9	NUM
aiti-175	18	6	on	on	ADP
aiti-175	18	7	the	the	DET
aiti-175	18	8	mohs	mohs	PROPN
aiti-175	18	9	scale	scale	NOUN
aiti-175	18	10	,	,	PUNCT
aiti-175	18	11	sapphire	sapphire	NOUN
aiti-175	18	12	is	be	AUX
aiti-175	18	13	one	one	NUM
aiti-175	18	14	of	of	ADP
aiti-175	18	15	the	the	DET
aiti-175	18	16	hardest	hard	ADJ
aiti-175	18	17	transparent	transparent	ADJ
aiti-175	18	18	materials	material	NOUN
aiti-175	18	19	next	next	ADV
aiti-175	18	20	to	to	PART
aiti-175	18	21	diamond	diamond	VERB
aiti-175	18	22	[	[	X
aiti-175	18	23	1	1	NUM
aiti-175	18	24	,	,	PUNCT
aiti-175	18	25	2	2	NUM
aiti-175	18	26	]	]	PUNCT
aiti-175	18	27	.	.	PUNCT
aiti-175	19	1	sapphire	sapphire	NOUN
aiti-175	19	2	has	have	VERB
aiti-175	19	3	very	very	ADV
aiti-175	19	4	wide	wide	ADJ
aiti-175	19	5	optical	optical	ADJ
aiti-175	19	6	trans	trans	PROPN
aiti-175	19	7	mission	mission	NOUN
aiti-175	19	8	band	band	NOUN
aiti-175	19	9	from	from	ADP
aiti-175	19	10	uv	uv	NOUN
aiti-175	19	11	to	to	ADP
aiti-175	19	12	near	near	ADV
aiti-175	19	13	-	-	PUNCT
aiti-175	19	14	infrared	infrare	VERB
aiti-175	19	15	,	,	PUNCT
aiti-175	19	16	(	(	PUNCT
aiti-175	19	17	0.15	0.15	NUM
aiti-175	19	18	-	-	SYM
aiti-175	19	19	5.5	5.5	NUM
aiti-175	19	20	µm)[2	µm)[2	NOUN
aiti-175	19	21	]	]	PUNCT
aiti-175	19	22	.	.	PUNCT
aiti-175	20	1	with	with	ADP
aiti-175	20	2	its	its	PRON
aiti-175	20	3	particu	particu	NOUN
aiti-175	20	4	lar	lar	ADJ
aiti-175	20	5	properties	property	NOUN
aiti-175	20	6	,	,	PUNCT
aiti-175	20	7	sapphire	sapphire	NOUN
aiti-175	20	8	glass	glass	NOUN
aiti-175	20	9	offers	offer	VERB
aiti-175	20	10	advantages	advantage	NOUN
aiti-175	20	11	over	over	ADP
aiti-175	20	12	the	the	DET
aiti-175	20	13	chemically	chemically	ADV
aiti-175	20	14	hardened	harden	VERB
aiti-175	20	15	glass	glass	NOUN
aiti-175	20	16	often	often	ADV
aiti-175	20	17	used	use	VERB
aiti-175	20	18	in	in	ADP
aiti-175	20	19	the	the	DET
aiti-175	20	20	display	display	NOUN
aiti-175	20	21	industry	industry	NOUN
aiti-175	20	22	.	.	PUNCT
aiti-175	21	1	traditional	traditional	ADJ
aiti-175	21	2	methods	method	NOUN
aiti-175	21	3	for	for	ADP
aiti-175	21	4	machining	machine	VERB
aiti-175	21	5	sapphire	sapphire	NOUN
aiti-175	21	6	glass	glass	NOUN
aiti-175	21	7	are	be	AUX
aiti-175	21	8	generally	generally	ADV
aiti-175	21	9	mechanical	mechanical	ADJ
aiti-175	21	10	grinding	grinding	NOUN
aiti-175	21	11	and	and	CCONJ
aiti-175	21	12	polishing	polishing	NOUN
aiti-175	21	13	.	.	PUNCT
aiti-175	22	1	optical	optical	ADJ
aiti-175	22	2	fabrication	fabrication	NOUN
aiti-175	22	3	processes	process	NOUN
aiti-175	22	4	of	of	ADP
aiti-175	22	5	these	these	DET
aiti-175	22	6	operations	operation	NOUN
aiti-175	22	7	lead	lead	VERB
aiti-175	22	8	to	to	ADP
aiti-175	22	9	the	the	DET
aiti-175	22	10	creation	creation	NOUN
aiti-175	22	11	of	of	ADP
aiti-175	22	12	surface	surface	NOUN
aiti-175	22	13	and	and	CCONJ
aiti-175	22	14	sub	sub	ADJ
aiti-175	22	15	-	-	ADJ
aiti-175	22	16	surface	surface	ADJ
aiti-175	22	17	defect	defect	NOUN
aiti-175	22	18	and	and	CCONJ
aiti-175	22	19	residual	residual	ADJ
aiti-175	22	20	stresses	stress	NOUN
aiti-175	22	21	[	[	X
aiti-175	22	22	3	3	NUM
aiti-175	22	23	,	,	PUNCT
aiti-175	22	24	4	4	NUM
aiti-175	22	25	]	]	PUNCT
aiti-175	22	26	.	.	PUNCT
aiti-175	23	1	maybe	maybe	ADV
aiti-175	23	2	in	in	ADP
aiti-175	23	3	micro	micro	NOUN
aiti-175	23	4	-	-	NOUN
aiti-175	23	5	size	size	NOUN
aiti-175	23	6	,	,	PUNCT
aiti-175	23	7	these	these	DET
aiti-175	23	8	defects	defect	NOUN
aiti-175	23	9	degrade	degrade	VERB
aiti-175	23	10	the	the	DET
aiti-175	23	11	strength	strength	NOUN
aiti-175	23	12	and	and	CCONJ
aiti-175	23	13	the	the	DET
aiti-175	23	14	performance	performance	NOUN
aiti-175	23	15	of	of	ADP
aiti-175	23	16	functional	functional	ADJ
aiti-175	23	17	materials	material	NOUN
aiti-175	23	18	.	.	PUNCT
aiti-175	24	1	another	another	DET
aiti-175	24	2	new	new	ADJ
aiti-175	24	3	development	development	NOUN
aiti-175	24	4	of	of	ADP
aiti-175	24	5	sapphire	sapphire	NOUN
aiti-175	24	6	machining	machining	NOUN
aiti-175	24	7	is	be	AUX
aiti-175	24	8	laser	laser	NOUN
aiti-175	24	9	cutting	cutting	NOUN
aiti-175	24	10	.	.	PUNCT
aiti-175	25	1	laser	laser	NOUN
aiti-175	25	2	machining	machining	NOUN
aiti-175	25	3	is	be	AUX
aiti-175	25	4	superior	superior	ADJ
aiti-175	25	5	to	to	ADP
aiti-175	25	6	conventional	conventional	ADJ
aiti-175	25	7	mechanical	mechanical	ADJ
aiti-175	25	8	methods	method	NOUN
aiti-175	25	9	in	in	ADP
aiti-175	25	10	terms	term	NOUN
aiti-175	25	11	of	of	ADP
aiti-175	25	12	flexib	flexib	NOUN
aiti-175	25	13	ility	ility	NOUN
aiti-175	25	14	and	and	CCONJ
aiti-175	25	15	edge	edge	NOUN
aiti-175	25	16	quality	quality	NOUN
aiti-175	25	17	when	when	SCONJ
aiti-175	25	18	right	right	ADJ
aiti-175	25	19	laser	laser	NOUN
aiti-175	25	20	type	type	NOUN
aiti-175	25	21	and	and	CCONJ
aiti-175	25	22	proper	proper	ADJ
aiti-175	25	23	beam	beam	NOUN
aiti-175	25	24	processing	processing	NOUN
aiti-175	25	25	is	be	AUX
aiti-175	25	26	applied	apply	VERB
aiti-175	25	27	.	.	PUNCT
aiti-175	26	1	mechanical	mechanical	ADJ
aiti-175	26	2	saw	saw	NOUN
aiti-175	26	3	creates	create	VERB
aiti-175	26	4	micro	micro	ADJ
aiti-175	26	5	cracks	crack	NOUN
aiti-175	26	6	at	at	ADP
aiti-175	26	7	edges	edge	NOUN
aiti-175	26	8	as	as	SCONJ
aiti-175	26	9	the	the	DET
aiti-175	26	10	speed	speed	NOUN
aiti-175	26	11	is	be	AUX
aiti-175	26	12	high	high	ADJ
aiti-175	26	13	which	which	PRON
aiti-175	26	14	in	in	ADP
aiti-175	26	15	turn	turn	NOUN
aiti-175	26	16	deteriorates	deteriorate	VERB
aiti-175	26	17	the	the	DET
aiti-175	26	18	bending	bend	VERB
aiti-175	26	19	strength	strength	NOUN
aiti-175	26	20	.	.	PUNCT
aiti-175	27	1	however	however	ADV
aiti-175	27	2	,	,	PUNCT
aiti-175	27	3	laser	laser	NOUN
aiti-175	27	4	thermal	thermal	ADJ
aiti-175	27	5	effect	effect	NOUN
aiti-175	27	6	can	can	AUX
aiti-175	27	7	also	also	ADV
aiti-175	27	8	induce	induce	VERB
aiti-175	27	9	stress	stress	NOUN
aiti-175	27	10	which	which	PRON
aiti-175	27	11	is	be	AUX
aiti-175	27	12	not	not	PART
aiti-175	27	13	desirable	desirable	ADJ
aiti-175	27	14	either	either	ADV
aiti-175	27	15	.	.	PUNCT
aiti-175	28	1	a	a	DET
aiti-175	28	2	few	few	ADJ
aiti-175	28	3	methods	method	NOUN
aiti-175	28	4	can	can	AUX
aiti-175	28	5	be	be	AUX
aiti-175	28	6	applied	apply	VERB
aiti-175	28	7	to	to	PART
aiti-175	28	8	eliminate	eliminate	VERB
aiti-175	28	9	the	the	DET
aiti-175	28	10	above	above	ADJ
aiti-175	28	11	consequential	consequential	ADJ
aiti-175	28	12	effect	effect	NOUN
aiti-175	28	13	from	from	ADP
aiti-175	28	14	polishing	polish	VERB
aiti-175	28	15	process	process	NOUN
aiti-175	28	16	,	,	PUNCT
aiti-175	28	17	namely	namely	ADV
aiti-175	28	18	,	,	PUNCT
aiti-175	28	19	trad	trad	NOUN
aiti-175	28	20	it	it	PRON
aiti-175	28	21	ional	ional	VERB
aiti-175	28	22	loose	loose	ADJ
aiti-175	28	23	-	-	PUNCT
aiti-175	28	24	abrasive	abrasive	ADJ
aiti-175	28	25	polishing	polishing	NOUN
aiti-175	28	26	,	,	PUNCT
aiti-175	28	27	wet	wet	ADJ
aiti-175	28	28	etching	etching	NOUN
aiti-175	28	29	,	,	PUNCT
aiti-175	28	30	and	and	CCONJ
aiti-175	28	31	dry	dry	ADJ
aiti-175	28	32	plas	plas	PROPN
aiti-175	28	33	ma	ma	PROPN
aiti-175	28	34	etching	etch	VERB
aiti-175	28	35	[	[	X
aiti-175	28	36	5	5	NUM
aiti-175	28	37	-	-	SYM
aiti-175	28	38	7	7	NUM
aiti-175	28	39	]	]	PUNCT
aiti-175	28	40	.	.	PUNCT
aiti-175	29	1	the	the	DET
aiti-175	29	2	first	first	ADJ
aiti-175	29	3	method	method	NOUN
aiti-175	29	4	typically	typically	ADV
aiti-175	29	5	integrates	integrate	VERB
aiti-175	29	6	a	a	DET
aiti-175	29	7	polishing	polish	VERB
aiti-175	29	8	step	step	NOUN
aiti-175	29	9	into	into	ADP
aiti-175	29	10	the	the	DET
aiti-175	29	11	grinder	grinder	NOUN
aiti-175	29	12	itself	itself	PRON
aiti-175	29	13	,	,	PUNCT
aiti-175	29	14	which	which	PRON
aiti-175	29	15	offers	offer	VERB
aiti-175	29	16	the	the	DET
aiti-175	29	17	advantage	advantage	NOUN
aiti-175	29	18	of	of	ADP
aiti-175	29	19	integrating	integrate	VERB
aiti-175	29	20	the	the	DET
aiti-175	29	21	damage	damage	NOUN
aiti-175	29	22	removal	removal	NOUN
aiti-175	29	23	into	into	ADP
aiti-175	29	24	the	the	DET
aiti-175	29	25	grinder	grinder	NOUN
aiti-175	29	26	tool	tool	NOUN
aiti-175	29	27	and	and	CCONJ
aiti-175	29	28	builds	build	VERB
aiti-175	29	29	upon	upon	SCONJ
aiti-175	29	30	*	*	PUNCT
aiti-175	29	31	corresponding	correspond	VERB
aiti-175	29	32	author	author	NOUN
aiti-175	29	33	,	,	PUNCT
aiti-175	29	34	email	email	NOUN
aiti-175	29	35	:	:	PUNCT
aiti-175	29	36	wsj007@isu.edu.tw	wsj007@isu.edu.tw	PROPN
aiti-175	29	37	https://en.wikipedia.org/wiki/uv	https://en.wikipedia.org/wiki/uv	NOUN
aiti-175	29	38	https://en.wikipedia.org/wiki/near-infrared	https://en.wikipedia.org/wiki/near-infrare	VERB
aiti-175	29	39	advances	advance	NOUN
aiti-175	29	40	in	in	ADP
aiti-175	29	41	technology	technology	NOUN
aiti-175	29	42	innovation	innovation	NOUN
aiti-175	29	43	,	,	PUNCT
aiti-175	29	44	vol	vol	NOUN
aiti-175	29	45	.	.	PROPN
aiti-175	29	46	1	1	NUM
aiti-175	29	47	,	,	PUNCT
aiti-175	29	48	no	no	INTJ
aiti-175	29	49	.	.	NOUN
aiti-175	29	50	2	2	NUM
aiti-175	29	51	,	,	PUNCT
aiti-175	29	52	2016	2016	NUM
aiti-175	29	53	,	,	PUNCT
aiti-175	29	54	pp	pp	ADJ
aiti-175	29	55	.	.	PUNCT
aiti-175	30	1	29	29	NUM
aiti-175	30	2	32	32	NUM
aiti-175	30	3	30	30	NUM
aiti-175	30	4	copyright	copyright	NOUN
aiti-175	30	5	©	©	PROPN
aiti-175	30	6	taeti	taeti	PROPN
aiti-175	30	7	traditional	traditional	ADJ
aiti-175	30	8	chemical	chemical	ADJ
aiti-175	30	9	mechanical	mechanical	ADJ
aiti-175	30	10	polishing	polishing	NOUN
aiti-175	30	11	(	(	PUNCT
aiti-175	30	12	cmp	cmp	NOUN
aiti-175	30	13	)	)	PUNCT
aiti-175	30	14	technology	technology	NOUN
aiti-175	30	15	.	.	PUNCT
aiti-175	31	1	however	however	ADV
aiti-175	31	2	,	,	PUNCT
aiti-175	31	3	it	it	PRON
aiti-175	31	4	has	have	VERB
aiti-175	31	5	the	the	DET
aiti-175	31	6	disadvantage	disadvantage	NOUN
aiti-175	31	7	of	of	ADP
aiti-175	31	8	low	low	ADJ
aiti-175	31	9	removal	removal	NOUN
aiti-175	31	10	rates	rate	NOUN
aiti-175	31	11	and	and	CCONJ
aiti-175	31	12	perpetuates	perpetuate	VERB
aiti-175	31	13	the	the	DET
aiti-175	31	14	surface	surface	NOUN
aiti-175	31	15	profile	profile	NOUN
aiti-175	31	16	.	.	PUNCT
aiti-175	32	1	the	the	DET
aiti-175	32	2	second	second	ADJ
aiti-175	32	3	method	method	NOUN
aiti-175	32	4	uses	use	VERB
aiti-175	32	5	familiar	familiar	ADJ
aiti-175	32	6	wet	wet	ADJ
aiti-175	32	7	-	-	PUNCT
aiti-175	32	8	etching	etch	VERB
aiti-175	32	9	processes	process	NOUN
aiti-175	32	10	to	to	PART
aiti-175	32	11	remove	remove	VERB
aiti-175	32	12	surface	surface	NOUN
aiti-175	32	13	damage	damage	NOUN
aiti-175	32	14	.	.	PUNCT
aiti-175	33	1	wet	wet	ADJ
aiti-175	33	2	chemical	chemical	NOUN
aiti-175	33	3	etching	etch	VERB
aiti-175	33	4	is	be	AUX
aiti-175	33	5	one	one	NUM
aiti-175	33	6	of	of	ADP
aiti-175	33	7	the	the	DET
aiti-175	33	8	most	most	ADV
aiti-175	33	9	common	common	ADJ
aiti-175	33	10	thinning	thin	VERB
aiti-175	33	11	techniques	technique	NOUN
aiti-175	33	12	.	.	PUNCT
aiti-175	34	1	to	to	PART
aiti-175	34	2	etch	etch	VERB
aiti-175	34	3	one	one	NUM
aiti-175	34	4	side	side	NOUN
aiti-175	34	5	o	o	NOUN
aiti-175	34	6	f	f	NOUN
aiti-175	34	7	the	the	DET
aiti-175	34	8	work	work	NOUN
aiti-175	34	9	piece	piece	NOUN
aiti-175	34	10	,	,	PUNCT
aiti-175	34	11	the	the	DET
aiti-175	34	12	workpiece	workpiece	NOUN
aiti-175	34	13	is	be	AUX
aiti-175	34	14	immersed	immerse	VERB
aiti-175	34	15	in	in	ADP
aiti-175	34	16	etching	etch	VERB
aiti-175	34	17	solution	solution	NOUN
aiti-175	34	18	e.g.	e.g.	ADV
aiti-175	34	19	dilute	dilute	VERB
aiti-175	34	20	hydrofluoric	hydrofluoric	ADJ
aiti-175	34	21	acid	acid	NOUN
aiti-175	34	22	(	(	PUNCT
aiti-175	34	23	dhf	dhf	NOUN
aiti-175	34	24	)	)	PUNCT
aiti-175	34	25	.	.	PUNCT
aiti-175	35	1	the	the	DET
aiti-175	35	2	other	other	ADJ
aiti-175	35	3	side	side	NOUN
aiti-175	35	4	is	be	AUX
aiti-175	35	5	protected	protect	VERB
aiti-175	35	6	either	either	CCONJ
aiti-175	35	7	by	by	ADP
aiti-175	35	8	additional	additional	ADJ
aiti-175	35	9	layers	layer	NOUN
aiti-175	35	10	,	,	PUNCT
aiti-175	35	11	or	or	CCONJ
aiti-175	35	12	by	by	ADP
aiti-175	35	13	applying	apply	VERB
aiti-175	35	14	special	special	ADJ
aiti-175	35	15	chucks	chuck	NOUN
aiti-175	35	16	allowing	allow	VERB
aiti-175	35	17	the	the	DET
aiti-175	35	18	p	p	NOUN
aiti-175	35	19	rocessing	rocessing	NOUN
aiti-175	35	20	of	of	ADP
aiti-175	35	21	work	work	NOUN
aiti-175	35	22	piece	piece	NOUN
aiti-175	35	23	.	.	PUNCT
aiti-175	36	1	the	the	DET
aiti-175	36	2	th	th	PROPN
aiti-175	36	3	ird	ird	PROPN
aiti-175	36	4	method	method	NOUN
aiti-175	36	5	uses	use	VERB
aiti-175	36	6	atmospheric	atmospheric	ADJ
aiti-175	36	7	dry	dry	ADJ
aiti-175	36	8	plasma	plasma	NOUN
aiti-175	36	9	etching	etch	VERB
aiti-175	36	10	to	to	PART
aiti-175	36	11	remove	remove	VERB
aiti-175	36	12	surface	surface	NOUN
aiti-175	36	13	damage	damage	NOUN
aiti-175	36	14	.	.	PUNCT
aiti-175	37	1	this	this	DET
aiti-175	37	2	method	method	NOUN
aiti-175	37	3	has	have	VERB
aiti-175	37	4	the	the	DET
aiti-175	37	5	advantage	advantage	NOUN
aiti-175	37	6	such	such	ADJ
aiti-175	37	7	as	as	SCONJ
aiti-175	37	8	the	the	DET
aiti-175	37	9	surface	surface	NOUN
aiti-175	37	10	damage	damage	NOUN
aiti-175	37	11	is	be	AUX
aiti-175	37	12	removed	remove	VERB
aiti-175	37	13	,	,	PUNCT
aiti-175	37	14	the	the	DET
aiti-175	37	15	edges	edge	NOUN
aiti-175	37	16	are	be	AUX
aiti-175	37	17	improved	improve	VERB
aiti-175	37	18	by	by	ADP
aiti-175	37	19	rounding	round	VERB
aiti-175	37	20	the	the	DET
aiti-175	37	21	sharp	sharp	ADJ
aiti-175	37	22	edge	edge	NOUN
aiti-175	37	23	,	,	PUNCT
aiti-175	37	24	and	and	CCONJ
aiti-175	37	25	the	the	DET
aiti-175	37	26	surface	surface	NOUN
aiti-175	37	27	roughness	roughness	NOUN
aiti-175	37	28	can	can	AUX
aiti-175	37	29	be	be	AUX
aiti-175	37	30	controlled	control	VERB
aiti-175	37	31	where	where	SCONJ
aiti-175	37	32	needed	need	VERB
aiti-175	37	33	for	for	ADP
aiti-175	37	34	adhesion	adhesion	NOUN
aiti-175	37	35	[	[	X
aiti-175	37	36	7	7	NUM
aiti-175	37	37	]	]	PUNCT
aiti-175	37	38	.	.	PUNCT
aiti-175	38	1	in	in	ADP
aiti-175	38	2	this	this	DET
aiti-175	38	3	paper	paper	NOUN
aiti-175	38	4	we	we	PRON
aiti-175	38	5	demonstrate	demonstrate	VERB
aiti-175	38	6	a	a	DET
aiti-175	38	7	production	production	NOUN
aiti-175	38	8	machining	machining	NOUN
aiti-175	38	9	and	and	CCONJ
aiti-175	38	10	compare	compare	VERB
aiti-175	38	11	the	the	DET
aiti-175	38	12	residual	residual	ADJ
aiti-175	38	13	stresses	stress	NOUN
aiti-175	38	14	after	after	ADP
aiti-175	38	15	different	different	ADJ
aiti-175	38	16	reliev	reliev	ADP
aiti-175	38	17	ing	ing	ADJ
aiti-175	38	18	process	process	NOUN
aiti-175	38	19	.	.	PUNCT
aiti-175	39	1	the	the	DET
aiti-175	39	2	sapphire	sapphire	NOUN
aiti-175	39	3	is	be	AUX
aiti-175	39	4	polished	polish	VERB
aiti-175	39	5	before	before	SCONJ
aiti-175	39	6	the	the	DET
aiti-175	39	7	edge	edge	NOUN
aiti-175	39	8	is	be	AUX
aiti-175	39	9	chamfered	chamfer	VERB
aiti-175	39	10	by	by	ADP
aiti-175	39	11	a	a	DET
aiti-175	39	12	picosecond	picosecond	NOUN
aiti-175	39	13	laser	laser	NOUN
aiti-175	39	14	.	.	PUNCT
aiti-175	40	1	residual	residual	ADJ
aiti-175	40	2	stresses	stress	NOUN
aiti-175	40	3	are	be	AUX
aiti-175	40	4	measured	measure	VERB
aiti-175	40	5	by	by	ADP
aiti-175	40	6	laser	laser	NOUN
aiti-175	40	7	curvature	curvature	NOUN
aiti-175	40	8	method	method	NOUN
aiti-175	40	9	[	[	X
aiti-175	40	10	8	8	NUM
aiti-175	40	11	]	]	PUNCT
aiti-175	40	12	at	at	ADP
aiti-175	40	13	different	different	ADJ
aiti-175	40	14	stages	stage	NOUN
aiti-175	40	15	of	of	ADP
aiti-175	40	16	machining	machining	NOUN
aiti-175	40	17	.	.	PUNCT
aiti-175	41	1	the	the	DET
aiti-175	41	2	results	result	NOUN
aiti-175	41	3	show	show	VERB
aiti-175	41	4	that	that	SCONJ
aiti-175	41	5	the	the	DET
aiti-175	41	6	wet	wet	ADJ
aiti-175	41	7	etching	etch	VERB
aiti-175	41	8	process	process	NOUN
aiti-175	41	9	effectively	effectively	ADV
aiti-175	41	10	relief	relief	VERB
aiti-175	41	11	the	the	DET
aiti-175	41	12	stress	stress	NOUN
aiti-175	41	13	and	and	CCONJ
aiti-175	41	14	the	the	DET
aiti-175	41	15	laser	laser	NOUN
aiti-175	41	16	machining	machining	NOUN
aiti-175	41	17	does	do	AUX
aiti-175	41	18	not	not	PART
aiti-175	41	19	incur	incur	VERB
aiti-175	41	20	serious	serious	ADJ
aiti-175	41	21	residual	residual	ADJ
aiti-175	41	22	stress	stress	NOUN
aiti-175	41	23	.	.	PUNCT
aiti-175	42	1	2	2	X
aiti-175	42	2	.	.	X
aiti-175	42	3	method	method	VERB
aiti-175	42	4	the	the	DET
aiti-175	42	5	schematic	schematic	ADJ
aiti-175	42	6	of	of	ADP
aiti-175	42	7	the	the	DET
aiti-175	42	8	sapphire	sapphire	NOUN
aiti-175	42	9	glass	glass	NOUN
aiti-175	42	10	samples	sample	NOUN
aiti-175	42	11	under	under	ADP
aiti-175	42	12	process	process	NOUN
aiti-175	42	13	is	be	AUX
aiti-175	42	14	as	as	SCONJ
aiti-175	42	15	shown	show	VERB
aiti-175	42	16	in	in	ADP
aiti-175	42	17	fig	fig	NOUN
aiti-175	42	18	.	.	PUNCT
aiti-175	43	1	1	1	X
aiti-175	43	2	.	.	X
aiti-175	43	3	the	the	DET
aiti-175	43	4	sapphire	sapphire	NOUN
aiti-175	43	5	samples	sample	NOUN
aiti-175	43	6	are	be	AUX
aiti-175	43	7	in	in	ADP
aiti-175	43	8	1	1	NUM
aiti-175	43	9	”	"	PUNCT
aiti-175	43	10	diameter	diameter	NOUN
aiti-175	43	11	.	.	PUNCT
aiti-175	44	1	the	the	DET
aiti-175	44	2	sapphire	sapphire	NOUN
aiti-175	44	3	glass	glass	NOUN
aiti-175	44	4	samples	sample	NOUN
aiti-175	44	5	were	be	AUX
aiti-175	44	6	po	po	NOUN
aiti-175	44	7	lished	lishe	VERB
aiti-175	44	8	by	by	ADP
aiti-175	44	9	cmp	cmp	PROPN
aiti-175	44	10	before	before	SCONJ
aiti-175	44	11	the	the	DET
aiti-175	44	12	edge	edge	NOUN
aiti-175	44	13	is	be	AUX
aiti-175	44	14	chamfered	chamfer	VERB
aiti-175	44	15	by	by	ADP
aiti-175	44	16	a	a	DET
aiti-175	44	17	picosecond	picosecond	NOUN
aiti-175	44	18	laser	laser	NOUN
aiti-175	44	19	and	and	CCONJ
aiti-175	44	20	then	then	ADV
aiti-175	44	21	they	they	PRON
aiti-175	44	22	under	under	ADP
aiti-175	44	23	wet	wet	ADJ
aiti-175	44	24	etching	etch	VERB
aiti-175	44	25	different	different	ADJ
aiti-175	44	26	processes	process	NOUN
aiti-175	44	27	i.e.	i.e.	X
aiti-175	44	28	,	,	PUNCT
aiti-175	44	29	wet	wet	ADJ
aiti-175	44	30	etching	etch	VERB
aiti-175	44	31	by	by	ADP
aiti-175	44	32	dhf	dhf	NOUN
aiti-175	44	33	and	and	CCONJ
aiti-175	44	34	dry	dry	ADJ
aiti-175	44	35	plasma	plasma	NOUN
aiti-175	44	36	etching	etch	VERB
aiti-175	44	37	.	.	PUNCT
aiti-175	45	1	residual	residual	ADJ
aiti-175	45	2	stresses	stress	NOUN
aiti-175	45	3	are	be	AUX
aiti-175	45	4	measured	measure	VERB
aiti-175	45	5	by	by	ADP
aiti-175	45	6	laser	laser	NOUN
aiti-175	45	7	curvature	curvature	NOUN
aiti-175	45	8	method	method	NOUN
aiti-175	45	9	at	at	ADP
aiti-175	45	10	different	different	ADJ
aiti-175	45	11	stages	stage	NOUN
aiti-175	45	12	of	of	ADP
aiti-175	45	13	machining	machining	NOUN
aiti-175	45	14	.	.	PUNCT
aiti-175	46	1	the	the	DET
aiti-175	46	2	schematic	schematic	ADJ
aiti-175	46	3	of	of	ADP
aiti-175	46	4	the	the	DET
aiti-175	46	5	optical	optical	ADJ
aiti-175	46	6	setup	setup	NOUN
aiti-175	46	7	is	be	AUX
aiti-175	46	8	shown	show	VERB
aiti-175	46	9	in	in	ADP
aiti-175	46	10	fig	fig	NOUN
aiti-175	46	11	.	.	PUNCT
aiti-175	47	1	2	2	X
aiti-175	47	2	.	.	X
aiti-175	47	3	the	the	DET
aiti-175	47	4	line	line	NOUN
aiti-175	47	5	deflection	deflection	NOUN
aiti-175	47	6	(	(	PUNCT
aiti-175	47	7	bow	bow	NOUN
aiti-175	47	8	)	)	PUNCT
aiti-175	47	9	was	be	AUX
aiti-175	47	10	fig	fig	NOUN
aiti-175	47	11	.	.	PUNCT
aiti-175	48	1	1	1	NUM
aiti-175	48	2	schematic	schematic	ADJ
aiti-175	48	3	of	of	ADP
aiti-175	48	4	the	the	DET
aiti-175	48	5	sapphire	sapphire	NOUN
aiti-175	48	6	glass	glass	NOUN
aiti-175	48	7	samples	sample	NOUN
aiti-175	48	8	under	under	ADP
aiti-175	48	9	process	process	NOUN
aiti-175	48	10	first	first	ADV
aiti-175	48	11	measured	measure	VERB
aiti-175	48	12	across	across	ADP
aiti-175	48	13	the	the	DET
aiti-175	48	14	center	center	NOUN
aiti-175	48	15	of	of	ADP
aiti-175	48	16	the	the	DET
aiti-175	48	17	sample	sample	NOUN
aiti-175	48	18	(	(	PUNCT
aiti-175	48	19	initially	initially	ADV
aiti-175	48	20	flat	flat	ADJ
aiti-175	48	21	before	before	ADP
aiti-175	48	22	machining	machining	NOUN
aiti-175	48	23	)	)	PUNCT
aiti-175	48	24	as	as	SCONJ
aiti-175	48	25	shown	show	VERB
aiti-175	48	26	in	in	ADP
aiti-175	48	27	fig	fig	NOUN
aiti-175	48	28	.	.	PUNCT
aiti-175	49	1	3	3	X
aiti-175	49	2	.	.	X
aiti-175	50	1	the	the	DET
aiti-175	50	2	stress	stress	NOUN
aiti-175	50	3	can	can	AUX
aiti-175	50	4	be	be	AUX
aiti-175	50	5	then	then	ADV
aiti-175	50	6	estimated	estimate	VERB
aiti-175	50	7	by	by	ADP
aiti-175	50	8	the	the	DET
aiti-175	50	9	curvature	curvature	NOUN
aiti-175	50	10	.	.	PUNCT
aiti-175	51	1	a	a	DET
aiti-175	51	2	diagrammatic	diagrammatic	ADJ
aiti-175	51	3	sketch	sketch	NOUN
aiti-175	51	4	is	be	AUX
aiti-175	51	5	shown	show	VERB
aiti-175	51	6	in	in	ADP
aiti-175	51	7	fig	fig	NOUN
aiti-175	51	8	.	.	PUNCT
aiti-175	52	1	4	4	X
aiti-175	52	2	.	.	X
aiti-175	52	3	fig	fig	NOUN
aiti-175	52	4	.	.	PUNCT
aiti-175	53	1	2	2	NUM
aiti-175	53	2	optical	optical	ADJ
aiti-175	53	3	setup	setup	NOUN
aiti-175	53	4	of	of	ADP
aiti-175	53	5	the	the	DET
aiti-175	53	6	laser	laser	NOUN
aiti-175	53	7	curvature	curvature	NOUN
aiti-175	53	8	method	method	PROPN
aiti-175	53	9	fig	fig	NOUN
aiti-175	53	10	.	.	PUNCT
aiti-175	54	1	3	3	NUM
aiti-175	54	2	line	line	NOUN
aiti-175	54	3	deflection	deflection	NOUN
aiti-175	54	4	(	(	PUNCT
aiti-175	54	5	bow	bow	NOUN
aiti-175	54	6	)	)	PUNCT
aiti-175	54	7	measured	measure	VERB
aiti-175	54	8	across	across	ADP
aiti-175	54	9	the	the	DET
aiti-175	54	10	center	center	NOUN
aiti-175	54	11	of	of	ADP
aiti-175	54	12	the	the	DET
aiti-175	54	13	sample	sample	NOUN
aiti-175	54	14	3d	3d	NUM
aiti-175	54	15	stress	stress	NOUN
aiti-175	54	16	map	map	NOUN
aiti-175	54	17	fig	fig	NOUN
aiti-175	54	18	.	.	PUNCT
aiti-175	54	19	4	4	NUM
aiti-175	54	20	a	a	DET
aiti-175	54	21	diagrammatic	diagrammatic	ADJ
aiti-175	54	22	sketch	sketch	NOUN
aiti-175	54	23	of	of	ADP
aiti-175	54	24	the	the	DET
aiti-175	54	25	3d	3d	PROPN
aiti-175	54	26	stress	stress	NOUN
aiti-175	54	27	map	map	NOUN
aiti-175	54	28	by	by	ADP
aiti-175	54	29	the	the	DET
aiti-175	54	30	laser	laser	NOUN
aiti-175	54	31	curvature	curvature	NOUN
aiti-175	54	32	method	method	NOUN
aiti-175	54	33	advances	advance	NOUN
aiti-175	54	34	in	in	ADP
aiti-175	54	35	technology	technology	NOUN
aiti-175	54	36	innovation	innovation	NOUN
aiti-175	54	37	,	,	PUNCT
aiti-175	54	38	vol	vol	NOUN
aiti-175	54	39	.	.	PROPN
aiti-175	54	40	1	1	NUM
aiti-175	54	41	,	,	PUNCT
aiti-175	54	42	no	no	INTJ
aiti-175	54	43	.	.	NOUN
aiti-175	54	44	2	2	NUM
aiti-175	54	45	,	,	PUNCT
aiti-175	54	46	2016	2016	NUM
aiti-175	54	47	,	,	PUNCT
aiti-175	54	48	pp	pp	ADJ
aiti-175	54	49	.	.	PUNCT
aiti-175	55	1	29	29	NUM
aiti-175	55	2	32	32	NUM
aiti-175	55	3	31	31	NUM
aiti-175	55	4	copyright	copyright	NOUN
aiti-175	55	5	©	©	PROPN
aiti-175	55	6	taeti	taeti	PROPN
aiti-175	55	7	3	3	X
aiti-175	55	8	.	.	NOUN
aiti-175	55	9	results	result	NOUN
aiti-175	55	10	and	and	CCONJ
aiti-175	55	11	discussion	discussion	NOUN
aiti-175	55	12	the	the	DET
aiti-175	55	13	average	average	ADJ
aiti-175	55	14	surface	surface	NOUN
aiti-175	55	15	roughness	roughness	NOUN
aiti-175	55	16	by	by	ADP
aiti-175	55	17	different	different	ADJ
aiti-175	55	18	methods	method	NOUN
aiti-175	55	19	of	of	ADP
aiti-175	55	20	burnish	burnish	NOUN
aiti-175	55	21	is	be	AUX
aiti-175	55	22	shown	show	VERB
aiti-175	55	23	in	in	ADP
aiti-175	55	24	fig	fig	NOUN
aiti-175	55	25	.	.	PUNCT
aiti-175	56	1	5	5	NUM
aiti-175	56	2	.	.	X
aiti-175	56	3	from	from	ADP
aiti-175	56	4	low	low	ADJ
aiti-175	56	5	to	to	PART
aiti-175	56	6	high	high	VERB
aiti-175	56	7	the	the	DET
aiti-175	56	8	roughness	roughness	NOUN
aiti-175	56	9	can	can	AUX
aiti-175	56	10	be	be	AUX
aiti-175	56	11	listed	list	VERB
aiti-175	56	12	sequentially	sequentially	ADV
aiti-175	56	13	:	:	PUNCT
aiti-175	56	14	mechanical	mechanical	ADJ
aiti-175	56	15	polishing	polishing	NOUN
aiti-175	56	16	,	,	PUNCT
aiti-175	56	17	dry	dry	ADJ
aiti-175	56	18	etching	etching	NOUN
aiti-175	56	19	,	,	PUNCT
aiti-175	56	20	wet	wet	ADJ
aiti-175	56	21	etching	etch	VERB
aiti-175	56	22	and	and	CCONJ
aiti-175	56	23	thermal	thermal	ADJ
aiti-175	56	24	annealing	annealing	NOUN
aiti-175	56	25	.	.	PUNCT
aiti-175	57	1	however	however	ADV
aiti-175	57	2	,	,	PUNCT
aiti-175	57	3	the	the	DET
aiti-175	57	4	difference	difference	NOUN
aiti-175	57	5	within	within	ADP
aiti-175	57	6	acceptable	acceptable	ADJ
aiti-175	57	7	range	range	NOUN
aiti-175	57	8	.	.	PUNCT
aiti-175	58	1	the	the	DET
aiti-175	58	2	line	line	NOUN
aiti-175	58	3	deflections	deflection	NOUN
aiti-175	58	4	of	of	ADP
aiti-175	58	5	the	the	DET
aiti-175	58	6	mechanically	mechanically	ADV
aiti-175	58	7	polished	polished	ADJ
aiti-175	58	8	sapphire	sapphire	NOUN
aiti-175	58	9	glass	glass	NOUN
aiti-175	58	10	sample	sample	NOUN
aiti-175	58	11	(	(	PUNCT
aiti-175	58	12	1.44	1.44	NUM
aiti-175	58	13	mm	mm	PROPN
aiti-175	58	14	thickness	thickness	NOUN
aiti-175	58	15	)	)	PUNCT
aiti-175	58	16	before	before	ADP
aiti-175	58	17	and	and	CCONJ
aiti-175	58	18	after	after	ADP
aiti-175	58	19	laser	laser	NOUN
aiti-175	58	20	chamfering	chamfering	NOUN
aiti-175	58	21	are	be	AUX
aiti-175	58	22	as	as	SCONJ
aiti-175	58	23	shown	show	VERB
aiti-175	58	24	in	in	ADP
aiti-175	58	25	fig	fig	NOUN
aiti-175	58	26	.	.	PUNCT
aiti-175	59	1	6	6	NUM
aiti-175	59	2	.	.	X
aiti-175	59	3	there	there	PRON
aiti-175	59	4	is	be	VERB
aiti-175	59	5	a	a	DET
aiti-175	59	6	tensile	tensile	NOUN
aiti-175	59	7	stress	stress	NOUN
aiti-175	59	8	residing	reside	VERB
aiti-175	59	9	the	the	DET
aiti-175	59	10	measured	measured	ADJ
aiti-175	59	11	surface	surface	NOUN
aiti-175	59	12	.	.	PUNCT
aiti-175	60	1	interestingly	interestingly	ADV
aiti-175	60	2	,	,	PUNCT
aiti-175	60	3	the	the	DET
aiti-175	60	4	laser	laser	NOUN
aiti-175	60	5	machining	machining	NOUN
aiti-175	60	6	does	do	AUX
aiti-175	60	7	relief	relief	VERB
aiti-175	60	8	the	the	DET
aiti-175	60	9	residual	residual	ADJ
aiti-175	60	10	stress	stress	NOUN
aiti-175	60	11	induced	induce	VERB
aiti-175	60	12	.	.	PUNCT
aiti-175	61	1	this	this	DET
aiti-175	61	2	mat	mat	NOUN
aiti-175	61	3	be	be	AUX
aiti-175	61	4	due	due	ADJ
aiti-175	61	5	to	to	ADP
aiti-175	61	6	the	the	DET
aiti-175	61	7	instantaneous	instantaneous	ADJ
aiti-175	61	8	temperature	temperature	NOUN
aiti-175	61	9	rise	rise	NOUN
aiti-175	61	10	during	during	ADP
aiti-175	61	11	laser	laser	NOUN
aiti-175	61	12	irradiation	irradiation	NOUN
aiti-175	61	13	which	which	PRON
aiti-175	61	14	leads	lead	VERB
aiti-175	61	15	an	an	DET
aiti-175	61	16	annealing	anneal	VERB
aiti-175	61	17	effect	effect	NOUN
aiti-175	61	18	.	.	PUNCT
aiti-175	62	1	fig	fig	NOUN
aiti-175	62	2	.	.	PUNCT
aiti-175	63	1	5	5	NUM
aiti-175	63	2	average	average	ADJ
aiti-175	63	3	roughness	roughness	NOUN
aiti-175	63	4	by	by	ADP
aiti-175	63	5	different	different	ADJ
aiti-175	63	6	methods	method	NOUN
aiti-175	63	7	of	of	ADP
aiti-175	63	8	burnish	burnish	ADJ
aiti-175	63	9	fig	fig	NOUN
aiti-175	63	10	.	.	PUNCT
aiti-175	64	1	6	6	NUM
aiti-175	64	2	bow	bow	NOUN
aiti-175	64	3	of	of	ADP
aiti-175	64	4	the	the	DET
aiti-175	64	5	mechanically	mechanically	ADV
aiti-175	64	6	polished	polished	ADJ
aiti-175	64	7	sapphire	sapphire	NOUN
aiti-175	64	8	glass	glass	NOUN
aiti-175	64	9	sample	sample	NOUN
aiti-175	64	10	(	(	PUNCT
aiti-175	64	11	1.44	1.44	NUM
aiti-175	64	12	mm	mm	PROPN
aiti-175	64	13	thickness	thickness	NOUN
aiti-175	64	14	)	)	PUNCT
aiti-175	64	15	before	before	ADP
aiti-175	64	16	and	and	CCONJ
aiti-175	64	17	after	after	ADP
aiti-175	64	18	laser	laser	NOUN
aiti-175	64	19	chamfering	chamfer	VERB
aiti-175	64	20	the	the	DET
aiti-175	64	21	bow	bow	NOUN
aiti-175	64	22	of	of	ADP
aiti-175	64	23	the	the	DET
aiti-175	64	24	mechanically	mechanically	ADV
aiti-175	64	25	polished	polished	ADJ
aiti-175	64	26	and	and	CCONJ
aiti-175	64	27	laser	laser	NOUN
aiti-175	64	28	machined	machine	VERB
aiti-175	64	29	sapphire	sapphire	NOUN
aiti-175	64	30	glass	glass	NOUN
aiti-175	64	31	sample	sample	NOUN
aiti-175	64	32	(	(	PUNCT
aiti-175	64	33	0.4	0.4	NUM
aiti-175	64	34	mm	mm	NOUN
aiti-175	64	35	thickness	thickness	NOUN
aiti-175	64	36	)	)	PUNCT
aiti-175	64	37	after	after	ADP
aiti-175	64	38	dry	dry	ADJ
aiti-175	64	39	plasma	plasma	NOUN
aiti-175	64	40	etching	etch	VERB
aiti-175	64	41	is	be	AUX
aiti-175	64	42	as	as	SCONJ
aiti-175	64	43	shown	show	VERB
aiti-175	64	44	in	in	ADP
aiti-175	64	45	fig	fig	NOUN
aiti-175	64	46	.	.	PUNCT
aiti-175	65	1	7	7	X
aiti-175	65	2	.	.	X
aiti-175	65	3	the	the	DET
aiti-175	65	4	influence	influence	NOUN
aiti-175	65	5	of	of	ADP
aiti-175	65	6	residual	residual	ADJ
aiti-175	65	7	stress	stress	NOUN
aiti-175	65	8	on	on	ADP
aiti-175	65	9	surface	surface	NOUN
aiti-175	65	10	deflection	deflection	NOUN
aiti-175	65	11	is	be	AUX
aiti-175	65	12	more	more	ADV
aiti-175	65	13	prominent	prominent	ADJ
aiti-175	65	14	in	in	ADP
aiti-175	65	15	thinner	thin	ADJ
aiti-175	65	16	sapphire	sapphire	NOUN
aiti-175	65	17	glass	glass	NOUN
aiti-175	65	18	.	.	PUNCT
aiti-175	66	1	before	before	ADP
aiti-175	66	2	the	the	DET
aiti-175	66	3	etching	etch	VERB
aiti-175	66	4	the	the	DET
aiti-175	66	5	deflection	deflection	NOUN
aiti-175	66	6	is	be	AUX
aiti-175	66	7	not	not	PART
aiti-175	66	8	symmetrical	symmetrical	ADJ
aiti-175	66	9	and	and	CCONJ
aiti-175	66	10	irregular	irregular	ADJ
aiti-175	66	11	while	while	SCONJ
aiti-175	66	12	it	it	PRON
aiti-175	66	13	converts	convert	VERB
aiti-175	66	14	to	to	ADP
aiti-175	66	15	a	a	DET
aiti-175	66	16	symmetrical	symmetrical	ADJ
aiti-175	66	17	shape	shape	NOUN
aiti-175	66	18	and	and	CCONJ
aiti-175	66	19	the	the	DET
aiti-175	66	20	maximal	maximal	ADJ
aiti-175	66	21	deflect	deflect	NOUN
aiti-175	66	22	ion	ion	NOUN
aiti-175	66	23	at	at	ADP
aiti-175	66	24	the	the	DET
aiti-175	66	25	center	center	NOUN
aiti-175	66	26	increases	increase	VERB
aiti-175	66	27	slightly	slightly	ADV
aiti-175	66	28	from	from	ADP
aiti-175	66	29	0.7	0.7	NUM
aiti-175	66	30	to	to	PART
aiti-175	66	31	0.8	0.8	NUM
aiti-175	66	32	μm	μm	NOUN
aiti-175	66	33	after	after	ADP
aiti-175	66	34	300	300	NUM
aiti-175	66	35	seconds	second	NOUN
aiti-175	66	36	as	as	ADP
aiti-175	66	37	a	a	DET
aiti-175	66	38	results	result	NOUN
aiti-175	66	39	of	of	ADP
aiti-175	66	40	stress	stress	ADJ
aiti-175	66	41	relaxation	relaxation	NOUN
aiti-175	66	42	.	.	PUNCT
aiti-175	67	1	the	the	DET
aiti-175	67	2	deflection	deflection	NOUN
aiti-175	67	3	at	at	ADP
aiti-175	67	4	the	the	DET
aiti-175	67	5	center	center	NOUN
aiti-175	67	6	then	then	ADV
aiti-175	67	7	starts	start	VERB
aiti-175	67	8	to	to	PART
aiti-175	67	9	drop	drop	VERB
aiti-175	67	10	to	to	ADP
aiti-175	67	11	0.5	0.5	NUM
aiti-175	67	12	μm	μm	NOUN
aiti-175	67	13	until	until	SCONJ
aiti-175	67	14	360	360	NUM
aiti-175	67	15	seconds	second	NOUN
aiti-175	67	16	has	have	AUX
aiti-175	67	17	passed	pass	VERB
aiti-175	67	18	.	.	PUNCT
aiti-175	68	1	at	at	ADP
aiti-175	68	2	this	this	DET
aiti-175	68	3	stage	stage	NOUN
aiti-175	68	4	the	the	DET
aiti-175	68	5	stress	stress	NOUN
aiti-175	68	6	has	have	AUX
aiti-175	68	7	been	be	AUX
aiti-175	68	8	relieved	relieve	VERB
aiti-175	68	9	to	to	ADP
aiti-175	68	10	the	the	DET
aiti-175	68	11	full	full	ADJ
aiti-175	68	12	extent	extent	NOUN
aiti-175	68	13	.	.	PUNCT
aiti-175	69	1	fig	fig	NOUN
aiti-175	69	2	.	.	PUNCT
aiti-175	70	1	7	7	NUM
aiti-175	70	2	bow	bow	NOUN
aiti-175	70	3	of	of	ADP
aiti-175	70	4	the	the	DET
aiti-175	70	5	mechanically	mechanically	ADV
aiti-175	70	6	polished	polished	ADJ
aiti-175	70	7	and	and	CCONJ
aiti-175	70	8	laser	laser	NOUN
aiti-175	70	9	machined	machine	VERB
aiti-175	70	10	sapphire	sapphire	NOUN
aiti-175	70	11	glass	glass	NOUN
aiti-175	70	12	sample	sample	NOUN
aiti-175	70	13	(	(	PUNCT
aiti-175	70	14	0.4	0.4	NUM
aiti-175	70	15	mm	mm	NOUN
aiti-175	70	16	thickness	thickness	NOUN
aiti-175	70	17	)	)	PUNCT
aiti-175	70	18	after	after	ADP
aiti-175	70	19	plasma	plasma	NOUN
aiti-175	70	20	dry	dry	ADJ
aiti-175	70	21	etching	etch	VERB
aiti-175	70	22	bow	bow	NOUN
aiti-175	70	23	of	of	ADP
aiti-175	70	24	the	the	DET
aiti-175	70	25	mechanically	mechanically	ADV
aiti-175	70	26	polished	polished	ADJ
aiti-175	70	27	and	and	CCONJ
aiti-175	70	28	laser	laser	NOUN
aiti-175	70	29	machined	machine	VERB
aiti-175	70	30	sapphire	sapphire	NOUN
aiti-175	70	31	glass	glass	NOUN
aiti-175	70	32	sample	sample	NOUN
aiti-175	70	33	(	(	PUNCT
aiti-175	70	34	0.4	0.4	NUM
aiti-175	70	35	mm	mm	NOUN
aiti-175	70	36	thickness	thickness	NOUN
aiti-175	70	37	)	)	PUNCT
aiti-175	70	38	after	after	ADP
aiti-175	70	39	wet	wet	ADJ
aiti-175	70	40	etching	etch	VERB
aiti-175	70	41	by	by	ADP
aiti-175	70	42	dhf	dhf	NOUN
aiti-175	70	43	is	be	AUX
aiti-175	70	44	as	as	SCONJ
aiti-175	70	45	shown	show	VERB
aiti-175	70	46	in	in	ADP
aiti-175	70	47	fig	fig	NOUN
aiti-175	70	48	.	.	PUNCT
aiti-175	71	1	8	8	NUM
aiti-175	71	2	.	.	PUNCT
aiti-175	72	1	the	the	DET
aiti-175	72	2	deflect	deflect	NOUN
aiti-175	72	3	ion	ion	NOUN
aiti-175	72	4	is	be	AUX
aiti-175	72	5	irregular	irregular	ADJ
aiti-175	72	6	before	before	SCONJ
aiti-175	72	7	the	the	DET
aiti-175	72	8	wet	wet	ADJ
aiti-175	72	9	etching	etch	VERB
aiti-175	72	10	similar	similar	ADJ
aiti-175	72	11	to	to	ADP
aiti-175	72	12	dry	dry	ADJ
aiti-175	72	13	etching	etching	NOUN
aiti-175	72	14	.	.	PUNCT
aiti-175	73	1	after	after	SCONJ
aiti-175	73	2	the	the	DET
aiti-175	73	3	wet	wet	ADJ
aiti-175	73	4	etching	etching	NOUN
aiti-175	73	5	starts	start	VERB
aiti-175	73	6	the	the	DET
aiti-175	73	7	bow	bow	NOUN
aiti-175	73	8	turns	turn	VERB
aiti-175	73	9	to	to	ADP
aiti-175	73	10	the	the	DET
aiti-175	73	11	other	other	ADJ
aiti-175	73	12	direction	direction	NOUN
aiti-175	73	13	i.e.	i.e.	ADV
aiti-175	73	14	,	,	PUNCT
aiti-175	73	15	from	from	ADP
aiti-175	73	16	concave	concave	NOUN
aiti-175	73	17	to	to	ADP
aiti-175	73	18	convex	convex	PROPN
aiti-175	73	19	.	.	PUNCT
aiti-175	74	1	as	as	SCONJ
aiti-175	74	2	the	the	DET
aiti-175	74	3	etching	etch	VERB
aiti-175	74	4	process	process	NOUN
aiti-175	74	5	progresses	progress	VERB
aiti-175	74	6	the	the	DET
aiti-175	74	7	deflection	deflection	NOUN
aiti-175	74	8	drops	drop	VERB
aiti-175	74	9	until	until	ADP
aiti-175	74	10	after	after	ADP
aiti-175	74	11	180	180	NUM
aiti-175	74	12	seconds	second	NOUN
aiti-175	74	13	the	the	DET
aiti-175	74	14	maximal	maximal	ADJ
aiti-175	74	15	deflection	deflection	NOUN
aiti-175	74	16	remains	remain	VERB
aiti-175	74	17	the	the	DET
aiti-175	74	18	same	same	ADJ
aiti-175	74	19	at	at	ADP
aiti-175	74	20	0.57	0.57	NUM
aiti-175	74	21	μm	μm	NOUN
aiti-175	74	22	.	.	PUNCT
aiti-175	75	1	it	it	PRON
aiti-175	75	2	is	be	AUX
aiti-175	75	3	believed	believe	VERB
aiti-175	75	4	the	the	DET
aiti-175	75	5	residual	residual	ADJ
aiti-175	75	6	stress	stress	NOUN
aiti-175	75	7	is	be	AUX
aiti-175	75	8	relieved	relieve	VERB
aiti-175	75	9	to	to	ADP
aiti-175	75	10	the	the	DET
aiti-175	75	11	full	full	ADJ
aiti-175	75	12	extent	extent	NOUN
aiti-175	75	13	.	.	PUNCT
aiti-175	76	1	the	the	DET
aiti-175	76	2	reason	reason	NOUN
aiti-175	76	3	for	for	ADP
aiti-175	76	4	the	the	DET
aiti-175	76	5	change	change	NOUN
aiti-175	76	6	of	of	ADP
aiti-175	76	7	concavity	concavity	NOUN
aiti-175	76	8	is	be	AUX
aiti-175	76	9	that	that	SCONJ
aiti-175	76	10	before	before	SCONJ
aiti-175	76	11	the	the	DET
aiti-175	76	12	polishing	polishing	NOUN
aiti-175	76	13	process	process	NOUN
aiti-175	76	14	the	the	DET
aiti-175	76	15	sapphire	sapphire	NOUN
aiti-175	76	16	glass	glass	NOUN
aiti-175	76	17	is	be	AUX
aiti-175	76	18	not	not	PART
aiti-175	76	19	evenly	evenly	ADV
aiti-175	76	20	cut	cut	NOUN
aiti-175	76	21	or	or	CCONJ
aiti-175	76	22	ground	ground	NOUN
aiti-175	76	23	and	and	CCONJ
aiti-175	76	24	the	the	DET
aiti-175	76	25	work	work	NOUN
aiti-175	76	26	p	p	PROPN
aiti-175	76	27	iece	iece	NOUN
aiti-175	76	28	retains	retain	VERB
aiti-175	76	29	its	its	PRON
aiti-175	76	30	original	original	ADJ
aiti-175	76	31	shape	shape	NOUN
aiti-175	76	32	after	after	SCONJ
aiti-175	76	33	stress	stress	NOUN
aiti-175	76	34	is	be	AUX
aiti-175	76	35	relieved	relieve	VERB
aiti-175	76	36	.	.	PUNCT
aiti-175	77	1	fig	fig	NOUN
aiti-175	77	2	.	.	PUNCT
aiti-175	78	1	8	8	NUM
aiti-175	78	2	bow	bow	NOUN
aiti-175	78	3	of	of	ADP
aiti-175	78	4	the	the	DET
aiti-175	78	5	mechanically	mechanically	ADV
aiti-175	78	6	polished	polished	ADJ
aiti-175	78	7	and	and	CCONJ
aiti-175	78	8	laser	laser	NOUN
aiti-175	78	9	machined	machine	VERB
aiti-175	78	10	sapphire	sapphire	NOUN
aiti-175	78	11	glass	glass	NOUN
aiti-175	78	12	sample	sample	NOUN
aiti-175	78	13	(	(	PUNCT
aiti-175	78	14	0.4	0.4	NUM
aiti-175	78	15	mm	mm	NOUN
aiti-175	78	16	thickness	thickness	NOUN
aiti-175	78	17	)	)	PUNCT
aiti-175	78	18	after	after	ADP
aiti-175	78	19	wet	wet	ADJ
aiti-175	78	20	etching	etch	VERB
aiti-175	78	21	by	by	ADP
aiti-175	78	22	dhf	dhf	NOUN
aiti-175	78	23	advances	advance	NOUN
aiti-175	78	24	in	in	ADP
aiti-175	78	25	technology	technology	NOUN
aiti-175	78	26	innovation	innovation	NOUN
aiti-175	78	27	,	,	PUNCT
aiti-175	78	28	vol	vol	NOUN
aiti-175	78	29	.	.	PROPN
aiti-175	78	30	1	1	NUM
aiti-175	78	31	,	,	PUNCT
aiti-175	78	32	no	no	INTJ
aiti-175	78	33	.	.	NOUN
aiti-175	78	34	2	2	NUM
aiti-175	78	35	,	,	PUNCT
aiti-175	78	36	2016	2016	NUM
aiti-175	78	37	,	,	PUNCT
aiti-175	78	38	pp	pp	ADJ
aiti-175	78	39	.	.	PUNCT
aiti-175	79	1	29	29	NUM
aiti-175	79	2	32	32	NUM
aiti-175	79	3	32	32	NUM
aiti-175	79	4	copyright	copyright	NOUN
aiti-175	79	5	©	©	PROPN
aiti-175	79	6	taeti	taeti	PROPN
aiti-175	79	7	the	the	DET
aiti-175	79	8	optical	optical	PROPN
aiti-175	79	9	t	t	PROPN
aiti-175	79	10	ransmission	ransmission	NOUN
aiti-175	79	11	and	and	CCONJ
aiti-175	79	12	reflection	reflection	NOUN
aiti-175	79	13	ratio	ratio	NOUN
aiti-175	79	14	before	before	ADP
aiti-175	79	15	and	and	CCONJ
aiti-175	79	16	after	after	ADP
aiti-175	79	17	wet	wet	ADJ
aiti-175	79	18	etching	etching	NOUN
aiti-175	79	19	are	be	AUX
aiti-175	79	20	as	as	SCONJ
aiti-175	79	21	shown	show	VERB
aiti-175	79	22	in	in	ADP
aiti-175	79	23	fig	fig	NOUN
aiti-175	79	24	.	.	PUNCT
aiti-175	80	1	9	9	X
aiti-175	80	2	.	.	X
aiti-175	81	1	there	there	PRON
aiti-175	81	2	is	be	VERB
aiti-175	81	3	not	not	PART
aiti-175	81	4	much	much	ADJ
aiti-175	81	5	difference	difference	NOUN
aiti-175	81	6	in	in	ADP
aiti-175	81	7	reflection	reflection	NOUN
aiti-175	81	8	,	,	PUNCT
aiti-175	81	9	however	however	ADV
aiti-175	81	10	,	,	PUNCT
aiti-175	81	11	the	the	DET
aiti-175	81	12	transmission	transmission	NOUN
aiti-175	81	13	is	be	AUX
aiti-175	81	14	improved	improve	VERB
aiti-175	81	15	.	.	PUNCT
aiti-175	82	1	fig	fig	NOUN
aiti-175	82	2	.	.	PUNCT
aiti-175	83	1	9	9	NUM
aiti-175	83	2	the	the	DET
aiti-175	83	3	optical	optical	ADJ
aiti-175	83	4	transmission	transmission	NOUN
aiti-175	83	5	and	and	CCONJ
aiti-175	83	6	reflection	reflection	NOUN
aiti-175	83	7	ratio	ratio	NOUN
aiti-175	83	8	before	before	ADP
aiti-175	83	9	and	and	CCONJ
aiti-175	83	10	after	after	ADP
aiti-175	83	11	wet	wet	ADJ
aiti-175	83	12	etching	etch	VERB
aiti-175	83	13	4	4	NUM
aiti-175	83	14	.	.	PUNCT
aiti-175	83	15	conclusions	conclusion	NOUN
aiti-175	83	16	in	in	ADP
aiti-175	83	17	this	this	DET
aiti-175	83	18	paper	paper	NOUN
aiti-175	83	19	,	,	PUNCT
aiti-175	83	20	we	we	PRON
aiti-175	83	21	demonstrate	demonstrate	VERB
aiti-175	83	22	a	a	DET
aiti-175	83	23	production	production	NOUN
aiti-175	83	24	machining	machining	NOUN
aiti-175	83	25	and	and	CCONJ
aiti-175	83	26	compare	compare	VERB
aiti-175	83	27	the	the	DET
aiti-175	83	28	residual	residual	ADJ
aiti-175	83	29	stresses	stress	NOUN
aiti-175	83	30	after	after	ADP
aiti-175	83	31	different	different	ADJ
aiti-175	83	32	reliev	reliev	ADP
aiti-175	83	33	ing	ing	ADJ
aiti-175	83	34	process	process	NOUN
aiti-175	83	35	.	.	PUNCT
aiti-175	84	1	the	the	DET
aiti-175	84	2	laser	laser	NOUN
aiti-175	84	3	chamfering	chamfering	NOUN
aiti-175	84	4	does	do	AUX
aiti-175	84	5	not	not	PART
aiti-175	84	6	incur	incur	VERB
aiti-175	84	7	further	further	ADJ
aiti-175	84	8	stress	stress	NOUN
aiti-175	84	9	,	,	PUNCT
aiti-175	84	10	on	on	ADP
aiti-175	84	11	the	the	DET
aiti-175	84	12	contrary	contrary	NOUN
aiti-175	84	13	,	,	PUNCT
aiti-175	84	14	it	it	PRON
aiti-175	84	15	somehow	somehow	ADV
aiti-175	84	16	reduces	reduce	VERB
aiti-175	84	17	the	the	DET
aiti-175	84	18	stress	stress	NOUN
aiti-175	84	19	.	.	PUNCT
aiti-175	85	1	both	both	PRON
aiti-175	85	2	dry	dry	ADJ
aiti-175	85	3	and	and	CCONJ
aiti-175	85	4	wet	wet	ADJ
aiti-175	85	5	etchings	etching	NOUN
aiti-175	85	6	are	be	AUX
aiti-175	85	7	effective	effective	ADJ
aiti-175	85	8	in	in	ADP
aiti-175	85	9	relief	relief	NOUN
aiti-175	85	10	of	of	ADP
aiti-175	85	11	residual	residual	ADJ
aiti-175	85	12	stress	stress	NOUN
aiti-175	85	13	induced	induce	VERB
aiti-175	85	14	by	by	ADP
aiti-175	85	15	mechanical	mechanical	ADJ
aiti-175	85	16	polishing	polishing	NOUN
aiti-175	85	17	.	.	PUNCT
aiti-175	86	1	also	also	ADV
aiti-175	86	2	the	the	DET
aiti-175	86	3	etching	etch	VERB
aiti-175	86	4	process	process	NOUN
aiti-175	86	5	did	do	AUX
aiti-175	86	6	not	not	PART
aiti-175	86	7	impair	impair	VERB
aiti-175	86	8	the	the	DET
aiti-175	86	9	transparency	transparency	NOUN
aiti-175	86	10	of	of	ADP
aiti-175	86	11	the	the	DET
aiti-175	86	12	sapphire	sapphire	NOUN
aiti-175	86	13	glass	glass	NOUN
aiti-175	86	14	.	.	PUNCT
aiti-175	87	1	ball	ball	NOUN
aiti-175	87	2	-	-	PUNCT
aiti-175	87	3	on	on	ADP
aiti-175	87	4	-	-	PUNCT
aiti-175	87	5	ring	ring	NOUN
aiti-175	87	6	test	test	NOUN
aiti-175	87	7	is	be	AUX
aiti-175	87	8	proposed	propose	VERB
aiti-175	87	9	to	to	PART
aiti-175	87	10	confirm	confirm	VERB
aiti-175	87	11	the	the	DET
aiti-175	87	12	effect	effect	NOUN
aiti-175	87	13	of	of	ADP
aiti-175	87	14	residual	residual	ADJ
aiti-175	87	15	stresses	stress	NOUN
aiti-175	87	16	on	on	ADP
aiti-175	87	17	the	the	DET
aiti-175	87	18	strength	strength	NOUN
aiti-175	87	19	of	of	ADP
aiti-175	87	20	the	the	DET
aiti-175	87	21	sapphire	sapphire	NOUN
aiti-175	87	22	work	work	NOUN
aiti-175	87	23	pieces	piece	NOUN
aiti-175	87	24	before	before	ADV
aiti-175	87	25	and	and	CCONJ
aiti-175	87	26	after	after	ADP
aiti-175	87	27	wet	wet	ADJ
aiti-175	87	28	etching	etching	NOUN
aiti-175	87	29	.	.	PUNCT
aiti-175	88	1	acknowledgement	acknowledgement	NOUN
aiti-175	88	2	the	the	DET
aiti-175	88	3	authors	author	NOUN
aiti-175	88	4	would	would	AUX
aiti-175	88	5	like	like	VERB
aiti-175	88	6	to	to	PART
aiti-175	88	7	express	express	VERB
aiti-175	88	8	their	their	PRON
aiti-175	88	9	appreciation	appreciation	NOUN
aiti-175	88	10	to	to	ADP
aiti-175	88	11	ministry	ministry	PROPN
aiti-175	88	12	of	of	ADP
aiti-175	88	13	science	science	NOUN
aiti-175	88	14	and	and	CCONJ
aiti-175	88	15	technology	technology	NOUN
aiti-175	88	16	,	,	PUNCT
aiti-175	88	17	taiwan	taiwan	PROPN
aiti-175	88	18	,	,	PUNCT
aiti-175	88	19	roc	roc	PROPN
aiti-175	88	20	,	,	PUNCT
aiti-175	88	21	for	for	ADP
aiti-175	88	22	financial	financial	ADJ
aiti-175	88	23	supports	support	NOUN
aiti-175	88	24	under	under	ADP
aiti-175	88	25	project	project	NOUN
aiti-175	88	26	no	no	NOUN
aiti-175	88	27	.	.	PUNCT
aiti-175	89	1	most103	most103	NOUN
aiti-175	89	2	-	-	PUNCT
aiti-175	89	3	2221	2221	NUM
aiti-175	89	4	-	-	PUNCT
aiti-175	89	5	e-214	e-214	NUM
aiti-175	89	6	-	-	PUNCT
aiti-175	89	7	018	018	NUM
aiti-175	89	8	,	,	PUNCT
aiti-175	89	9	most104	most104	PROPN
aiti-175	89	10	-	-	PUNCT
aiti-175	89	11	2221	2221	NUM
aiti-175	89	12	-	-	PUNCT
aiti-175	89	13	e-214	e-214	PROPN
aiti-175	89	14	-	-	PUNCT
aiti-175	89	15	051	051	NUM
aiti-175	89	16	and	and	CCONJ
aiti-175	89	17	most104	most104	PROPN
aiti-175	89	18	-	-	PUNCT
aiti-175	89	19	2632	2632	NUM
aiti-175	89	20	e-214	e-214	PROPN
aiti-175	89	21	-	-	PUNCT
aiti-175	89	22	002	002	NUM
aiti-175	89	23	.	.	PUNCT
aiti-175	90	1	special	special	ADJ
aiti-175	90	2	appreciation	appreciation	NOUN
aiti-175	90	3	is	be	AUX
aiti-175	90	4	also	also	ADV
aiti-175	90	5	extended	extend	VERB
aiti-175	90	6	to	to	PART
aiti-175	90	7	e&r	e&r	VERB
aiti-175	90	8	engineering	engineering	PROPN
aiti-175	90	9	corp	corp	PROPN
aiti-175	90	10	.	.	PROPN
aiti-175	90	11	for	for	ADP
aiti-175	90	12	carrying	carry	VERB
aiti-175	90	13	out	out	ADP
aiti-175	90	14	all	all	DET
aiti-175	90	15	the	the	DET
aiti-175	90	16	experiments	experiment	NOUN
aiti-175	90	17	.	.	PUNCT
aiti-175	91	1	references	reference	NOUN
aiti-175	91	2	[	[	X
aiti-175	91	3	1	1	NUM
aiti-175	91	4	]	]	PUNCT
aiti-175	91	5	“	"	PUNCT
aiti-175	91	6	gorilla	gorilla	NOUN
aiti-175	91	7	glass	glass	NOUN
aiti-175	91	8	success	success	NOUN
aiti-175	91	9	,	,	PUNCT
aiti-175	91	10	what	what	PRON
aiti-175	91	11	is	be	AUX
aiti-175	91	12	sapphire	sapphire	ADJ
aiti-175	91	13	glass	glass	NOUN
aiti-175	91	14	?	?	PUNCT
aiti-175	91	15	”	"	PUNCT
aiti-175	92	1	http://www.corning.com/news_center/features/	http://www.corning.com/news_center/features/	PROPN
aiti-175	92	2	gorillaglasssuccess.aspx	gorillaglasssuccess.aspx	NOUN
aiti-175	92	3	,	,	PUNCT
aiti-175	92	4	corning	corning	NOUN
aiti-175	92	5	incorporated	incorporate	VERB
aiti-175	92	6	.	.	PUNCT
aiti-175	93	1	[	[	X
aiti-175	93	2	2	2	X
aiti-175	93	3	]	]	PUNCT
aiti-175	93	4	“	"	PUNCT
aiti-175	93	5	everything	everything	PRON
aiti-175	93	6	you	you	PRON
aiti-175	93	7	wanted	want	VERB
aiti-175	93	8	to	to	PART
aiti-175	93	9	know	know	VERB
aiti-175	93	10	about	about	ADP
aiti-175	93	11	sapphire	sapphire	NOUN
aiti-175	93	12	glass	glass	NOUN
aiti-175	93	13	,	,	PUNCT
aiti-175	93	14	but	but	CCONJ
aiti-175	93	15	were	be	AUX
aiti-175	93	16	afraid	afraid	ADJ
aiti-175	93	17	to	to	PART
aiti-175	93	18	ask	ask	VERB
aiti-175	93	19	,	,	PUNCT
aiti-175	93	20	”	"	PUNCT
aiti-175	93	21	http://www.cultofmac.com/267068/everyth	http://www.cultofmac.com/267068/everyth	PROPN
aiti-175	93	22	ing	ing	NOUN
aiti-175	93	23	-	-	PUNCT
aiti-175	93	24	wanted	want	VERB
aiti-175	93	25	-	-	PUNCT
aiti-175	93	26	know	know	NOUN
aiti-175	93	27	-	-	PUNCT
aiti-175	93	28	sapphire	sapphire	NOUN
aiti-175	93	29	-	-	PUNCT
aiti-175	93	30	glass	glass	NOUN
aiti-175	93	31	-	-	PUNCT
aiti-175	93	32	afraid	afraid	ADJ
aiti-175	93	33	-	-	PUNCT
aiti-175	93	34	ask	ask	NOUN
aiti-175	93	35	-qa/.	-qa/.	PROPN
aiti-175	93	36	[	[	X
aiti-175	93	37	3	3	X
aiti-175	93	38	]	]	X
aiti-175	93	39	d.	d.	PROPN
aiti-175	93	40	wang	wang	PROPN
aiti-175	93	41	,	,	PUNCT
aiti-175	93	42	j.	j.	PROPN
aiti-175	93	43	lee	lee	PROPN
aiti-175	93	44	,	,	PUNCT
aiti-175	93	45	k.	k.	PROPN
aiti-175	93	46	holland	holland	PROPN
aiti-175	93	47	,	,	PUNCT
aiti-175	93	48	t.	t.	PROPN
aiti-175	93	49	bibby	bibby	PROPN
aiti-175	93	50	,	,	PUNCT
aiti-175	93	51	s.	s.	PROPN
aiti-175	93	52	beaudoin	beaudoin	PROPN
aiti-175	93	53	,	,	PUNCT
aiti-175	93	54	and	and	CCONJ
aiti-175	93	55	t.	t.	PROPN
aiti-175	93	56	cale	cale	NOUN
aiti-175	93	57	,	,	PUNCT
aiti-175	93	58	“	"	PUNCT
aiti-175	93	59	von	von	PROPN
aiti-175	93	60	mises	mises	PROPN
aiti-175	93	61	stress	stress	VERB
aiti-175	93	62	in	in	ADP
aiti-175	93	63	chemical‐mechanical	chemical‐mechanical	ADJ
aiti-175	93	64	polishing	polishing	NOUN
aiti-175	93	65	processes	process	NOUN
aiti-175	93	66	,	,	PUNCT
aiti-175	93	67	”	"	PUNCT
aiti-175	93	68	j.	j.	PROPN
aiti-175	93	69	electrochem	electrochem	PROPN
aiti-175	93	70	.	.	PUNCT
aiti-175	94	1	soc	soc	PROPN
aiti-175	94	2	.	.	PUNCT
aiti-175	94	3	,	,	PUNCT
aiti-175	94	4	vol	vol	NOUN
aiti-175	94	5	.	.	PUNCT
aiti-175	95	1	144	144	NUM
aiti-175	95	2	,	,	PUNCT
aiti-175	95	3	no	no	INTJ
aiti-175	95	4	.	.	NOUN
aiti-175	95	5	3	3	NUM
aiti-175	95	6	,	,	PUNCT
aiti-175	95	7	pp	pp	ADJ
aiti-175	95	8	.	.	PUNCT
aiti-175	96	1	1121	1121	NUM
aiti-175	96	2	-	-	SYM
aiti-175	96	3	1127	1127	NUM
aiti-175	96	4	,	,	PUNCT
aiti-175	96	5	1997	1997	NUM
aiti-175	96	6	.	.	PUNCT
aiti-175	97	1	[	[	X
aiti-175	97	2	4	4	X
aiti-175	97	3	]	]	X
aiti-175	97	4	g.	g.	PROPN
aiti-175	97	5	kermouche	kermouche	PROPN
aiti-175	97	6	,	,	PUNCT
aiti-175	97	7	j.	j.	PROPN
aiti-175	97	8	rech	rech	PROPN
aiti-175	97	9	,	,	PUNCT
aiti-175	97	10	h.	h.	PROPN
aiti-175	97	11	hamdi	hamdi	PROPN
aiti-175	97	12	,	,	PUNCT
aiti-175	97	13	and	and	CCONJ
aiti-175	97	14	j.	j.	PROPN
aiti-175	97	15	m.	m.	PROPN
aiti-175	97	16	bergheau	bergheau	PROPN
aiti-175	97	17	,	,	PUNCT
aiti-175	97	18	“	"	PUNCT
aiti-175	97	19	on	on	ADP
aiti-175	97	20	the	the	DET
aiti-175	97	21	residual	residual	ADJ
aiti-175	97	22	stress	stress	NOUN
aiti-175	97	23	field	field	NOUN
aiti-175	97	24	induced	induce	VERB
aiti-175	97	25	by	by	ADP
aiti-175	97	26	a	a	DET
aiti-175	97	27	scratching	scratching	NOUN
aiti-175	97	28	round	round	ADJ
aiti-175	97	29	abrasive	abrasive	ADJ
aiti-175	97	30	grain	grain	NOUN
aiti-175	97	31	,	,	PUNCT
aiti-175	97	32	”	"	PUNCT
aiti-175	97	33	wear	wear	NOUN
aiti-175	97	34	,	,	PUNCT
aiti-175	97	35	vol	vol	NOUN
aiti-175	97	36	.	.	PROPN
aiti-175	97	37	269	269	NUM
aiti-175	97	38	,	,	PUNCT
aiti-175	97	39	no	no	NOUN
aiti-175	97	40	.	.	NOUN
aiti-175	97	41	1	1	NUM
aiti-175	97	42	-	-	SYM
aiti-175	97	43	2	2	NUM
aiti-175	97	44	,	,	PUNCT
aiti-175	97	45	pp	pp	ADJ
aiti-175	97	46	.	.	PUNCT
aiti-175	98	1	86	86	NUM
aiti-175	98	2	-	-	SYM
aiti-175	98	3	92	92	NUM
aiti-175	98	4	,	,	PUNCT
aiti-175	98	5	may	may	AUX
aiti-175	98	6	2010	2010	NUM
aiti-175	98	7	.	.	PUNCT
aiti-175	99	1	[	[	X
aiti-175	99	2	5	5	NUM
aiti-175	99	3	]	]	PUNCT
aiti-175	99	4	c.	c.	PROPN
aiti-175	99	5	landesberger	landesberger	PROPN
aiti-175	99	6	,	,	PUNCT
aiti-175	99	7	c.	c.	PROPN
aiti-175	99	8	paschke	paschke	PROPN
aiti-175	99	9	,	,	PUNCT
aiti-175	99	10	and	and	CCONJ
aiti-175	99	11	k.	k.	PROPN
aiti-175	99	12	bock	bock	NOUN
aiti-175	99	13	,	,	PUNCT
aiti-175	99	14	“	"	PUNCT
aiti-175	99	15	influence	influence	NOUN
aiti-175	99	16	of	of	ADP
aiti-175	99	17	wafer	wafer	NOUN
aiti-175	99	18	grinding	grind	VERB
aiti-175	99	19	and	and	CCONJ
aiti-175	99	20	etching	etch	VERB
aiti-175	99	21	techniques	technique	NOUN
aiti-175	99	22	on	on	ADP
aiti-175	99	23	the	the	DET
aiti-175	99	24	fracture	fracture	NOUN
aiti-175	99	25	strength	strength	NOUN
aiti-175	99	26	of	of	ADP
aiti-175	99	27	thin	thin	ADJ
aiti-175	99	28	silicon	silicon	NOUN
aiti-175	99	29	substrates	substrate	NOUN
aiti-175	99	30	,	,	PUNCT
aiti-175	99	31	”	"	PUNCT
aiti-175	99	32	advanced	advanced	ADJ
aiti-175	99	33	materials	material	NOUN
aiti-175	99	34	research	research	NOUN
aiti-175	99	35	,	,	PUNCT
aiti-175	99	36	vol	vol	NOUN
aiti-175	99	37	.	.	PROPN
aiti-175	99	38	325	325	NUM
aiti-175	99	39	,	,	PUNCT
aiti-175	99	40	pp	pp	ADJ
aiti-175	99	41	.	.	PUNCT
aiti-175	99	42	659	659	NUM
aiti-175	99	43	-	-	SYM
aiti-175	99	44	665	665	NUM
aiti-175	99	45	,	,	PUNCT
aiti-175	99	46	2011	2011	NUM
aiti-175	99	47	.	.	PUNCT
aiti-175	100	1	[	[	X
aiti-175	100	2	6	6	NUM
aiti-175	100	3	]	]	PUNCT
aiti-175	100	4	k.	k.	PROPN
aiti-175	100	5	gurnett	gurnett	PROPN
aiti-175	100	6	and	and	CCONJ
aiti-175	100	7	t.	t.	PROPN
aiti-175	100	8	adams	adams	PROPN
aiti-175	100	9	,	,	PUNCT
aiti-175	100	10	“	"	PUNCT
aiti-175	100	11	ult	ult	VERB
aiti-175	100	12	ra	ra	ADJ
aiti-175	100	13	-	-	ADJ
aiti-175	100	14	thin	thin	ADJ
aiti-175	100	15	semiconductor	semiconductor	NOUN
aiti-175	100	16	wafer	wafer	NOUN
aiti-175	100	17	applications	application	NOUN
aiti-175	100	18	and	and	CCONJ
aiti-175	100	19	processes	process	NOUN
aiti-175	100	20	,	,	PUNCT
aiti-175	100	21	”	"	PUNCT
aiti-175	100	22	iii	iii	NOUN
aiti-175	100	23	-	-	PUNCT
aiti-175	100	24	vs	vs	ADP
aiti-175	100	25	review	review	NOUN
aiti-175	100	26	,	,	PUNCT
aiti-175	100	27	vo	vo	PROPN
aiti-175	100	28	l.	l.	PROPN
aiti-175	100	29	19	19	NUM
aiti-175	100	30	,	,	PUNCT
aiti-175	100	31	pp	pp	ADJ
aiti-175	100	32	.	.	PUNCT
aiti-175	101	1	38	38	NUM
aiti-175	101	2	–	–	SYM
aiti-175	101	3	40	40	NUM
aiti-175	101	4	,	,	PUNCT
aiti-175	101	5	2006	2006	NUM
aiti-175	101	6	.	.	PUNCT
aiti-175	102	1	[	[	X
aiti-175	102	2	7	7	X
aiti-175	102	3	]	]	PUNCT
aiti-175	102	4	z.	z.	PROPN
aiti-175	102	5	j.	j.	PROPN
aiti-175	102	6	pei	pei	PROPN
aiti-175	102	7	,	,	PUNCT
aiti-175	102	8	g.	g.	PROPN
aiti-175	102	9	r.	r.	PROPN
aiti-175	102	10	fisher	fisher	PROPN
aiti-175	102	11	,	,	PUNCT
aiti-175	102	12	and	and	CCONJ
aiti-175	102	13	j.	j.	PROPN
aiti-175	102	14	liu	liu	PROPN
aiti-175	102	15	,	,	PUNCT
aiti-175	102	16	“	"	PUNCT
aiti-175	102	17	grinding	grind	VERB
aiti-175	102	18	of	of	ADP
aiti-175	102	19	silicon	silicon	NOUN
aiti-175	102	20	wafers	wafer	NOUN
aiti-175	102	21	:	:	PUNCT
aiti-175	102	22	a	a	DET
aiti-175	102	23	rev	rev	PROPN
aiti-175	102	24	iew	iew	PROPN
aiti-175	102	25	from	from	ADP
aiti-175	102	26	historical	historical	ADJ
aiti-175	102	27	perspectives	perspective	NOUN
aiti-175	102	28	,	,	PUNCT
aiti-175	102	29	”	"	PUNCT
aiti-175	102	30	international	international	ADJ
aiti-175	102	31	journal	journal	NOUN
aiti-175	102	32	of	of	ADP
aiti-175	102	33	machine	machine	NOUN
aiti-175	102	34	tools	tool	NOUN
aiti-175	102	35	and	and	CCONJ
aiti-175	102	36	manufacture	manufacture	NOUN
aiti-175	102	37	,	,	PUNCT
aiti-175	102	38	vol	vol	NOUN
aiti-175	102	39	.	.	PROPN
aiti-175	102	40	48	48	NUM
aiti-175	102	41	,	,	PUNCT
aiti-175	102	42	pp	pp	ADJ
aiti-175	102	43	.	.	PUNCT
aiti-175	102	44	1297	1297	NUM
aiti-175	102	45	-	-	SYM
aiti-175	102	46	1307	1307	NUM
aiti-175	102	47	,	,	PUNCT
aiti-175	102	48	2008	2008	NUM
aiti-175	102	49	.	.	PUNCT
aiti-175	103	1	[	[	X
aiti-175	103	2	8	8	X
aiti-175	103	3	]	]	PUNCT
aiti-175	103	4	j.	j.	PROPN
aiti-175	103	5	wang	wang	PROPN
aiti-175	103	6	,	,	PUNCT
aiti-175	103	7	p.	p.	PROPN
aiti-175	103	8	shrotriya	shrotriya	PROPN
aiti-175	103	9	,	,	PUNCT
aiti-175	103	10	and	and	CCONJ
aiti-175	103	11	k.	k.	PROPN
aiti-175	103	12	s.	s.	PROPN
aiti-175	103	13	kim	kim	PROPN
aiti-175	103	14	,	,	PUNCT
aiti-175	103	15	“	"	PUNCT
aiti-175	103	16	surface	surface	VERB
aiti-175	103	17	residual	residual	ADJ
aiti-175	103	18	stress	stress	NOUN
aiti-175	103	19	measurement	measurement	NOUN
aiti-175	103	20	using	use	VERB
aiti-175	103	21	curvature	curvature	NOUN
aiti-175	103	22	interferometry	interferometry	NOUN
aiti-175	103	23	,	,	PUNCT
aiti-175	103	24	”	"	PUNCT
aiti-175	103	25	experimental	experimental	ADJ
aiti-175	103	26	mechanics	mechanic	NOUN
aiti-175	103	27	,	,	PUNCT
aiti-175	103	28	vol	vol	NOUN
aiti-175	103	29	.	.	PROPN
aiti-175	103	30	46	46	NUM
aiti-175	103	31	,	,	PUNCT
aiti-175	103	32	pp	pp	ADJ
aiti-175	103	33	.	.	PUNCT
aiti-175	104	1	39	39	NUM
aiti-175	104	2	-	-	SYM
aiti-175	104	3	46	46	NUM
aiti-175	104	4	,	,	PUNCT
aiti-175	104	5	2006	2006	NUM
aiti-175	104	6	.	.	PUNCT