id	sid	tid	token	lemma	pos
aiti-207	1	1	advances	advance	NOUN
aiti-207	1	2	in	in	ADP
aiti-207	1	3	technology	technology	NOUN
aiti-207	1	4	innovation	innovation	NOUN
aiti-207	1	5	,	,	PUNCT
aiti-207	1	6	vol	vol	NOUN
aiti-207	1	7	.	.	PROPN
aiti-207	2	1	2	2	NUM
aiti-207	2	2	,	,	PUNCT
aiti-207	2	3	no	no	INTJ
aiti-207	2	4	.	.	NOUN
aiti-207	2	5	1	1	NUM
aiti-207	2	6	,	,	PUNCT
aiti-207	2	7	2017	2017	NUM
aiti-207	2	8	,	,	PUNCT
aiti-207	2	9	pp	pp	ADJ
aiti-207	2	10	.	.	PUNCT
aiti-207	3	1	25	25	NUM
aiti-207	3	2	28	28	NUM
aiti-207	3	3	25	25	NUM
aiti-207	3	4	ewma	ewma	NOUN
aiti-207	3	5	controller	controller	NOUN
aiti-207	3	6	with	with	ADP
aiti-207	3	7	concurrent	concurrent	ADJ
aiti-207	3	8	adjustment	adjustment	NOUN
aiti-207	3	9	for	for	ADP
aiti-207	3	10	a	a	DET
aiti-207	3	11	high	high	ADV
aiti-207	3	12	-	-	PUNCT
aiti-207	3	13	mixed	mix	VERB
aiti-207	3	14	production	production	NOUN
aiti-207	3	15	process	process	NOUN
aiti-207	3	16	shui	shui	NOUN
aiti-207	3	17	-	-	PUNCT
aiti-207	3	18	pin	pin	PROPN
aiti-207	3	19	lee	lee	PROPN
aiti-207	3	20	department	department	PROPN
aiti-207	3	21	of	of	ADP
aiti-207	3	22	industrial	industrial	ADJ
aiti-207	3	23	management	management	NOUN
aiti-207	3	24	,	,	PUNCT
aiti-207	3	25	chien	chien	PROPN
aiti-207	3	26	hsin	hsin	PROPN
aiti-207	3	27	university	university	PROPN
aiti-207	3	28	of	of	ADP
aiti-207	3	29	science	science	NOUN
aiti-207	3	30	and	and	CCONJ
aiti-207	3	31	technology	technology	NOUN
aiti-207	3	32	,	,	PUNCT
aiti-207	3	33	taoyuan	taoyuan	PROPN
aiti-207	3	34	,	,	PUNCT
aiti-207	3	35	taiwan	taiwan	PROPN
aiti-207	3	36	.	.	PUNCT
aiti-207	3	37	received	receive	VERB
aiti-207	3	38	22	22	NUM
aiti-207	3	39	february	february	NOUN
aiti-207	3	40	2016	2016	NUM
aiti-207	3	41	;	;	PUNCT
aiti-207	3	42	received	receive	VERB
aiti-207	3	43	in	in	ADP
aiti-207	3	44	revised	revise	VERB
aiti-207	3	45	form	form	NOUN
aiti-207	3	46	15	15	NUM
aiti-207	3	47	april	april	PROPN
aiti-207	3	48	2016	2016	NUM
aiti-207	3	49	;	;	PUNCT
aiti-207	3	50	accepted	accept	VERB
aiti-207	3	51	17	17	NUM
aiti-207	3	52	april	april	PROPN
aiti-207	3	53	2016	2016	NUM
aiti-207	3	54	abstract	abstract	ADV
aiti-207	3	55	the	the	DET
aiti-207	3	56	exponentially	exponentially	ADV
aiti-207	3	57	weighted	weight	VERB
aiti-207	3	58	moving	move	VERB
aiti-207	3	59	average	average	ADJ
aiti-207	3	60	(	(	PUNCT
aiti-207	3	61	ewma	ewma	NOUN
aiti-207	3	62	)	)	PUNCT
aiti-207	3	63	feedback	feedback	NOUN
aiti-207	3	64	controller	controller	NOUN
aiti-207	3	65	is	be	AUX
aiti-207	3	66	a	a	DET
aiti-207	3	67	very	very	ADV
aiti-207	3	68	popular	popular	ADJ
aiti-207	3	69	run	run	NOUN
aiti-207	3	70	-	-	PUNCT
aiti-207	3	71	to	to	AUX
aiti-207	3	72	-	-	PUNCT
aiti-207	3	73	run	run	VERB
aiti-207	3	74	(	(	PUNCT
aiti-207	3	75	rtr	rtr	NOUN
aiti-207	3	76	)	)	PUNCT
aiti-207	3	77	process	process	NOUN
aiti-207	3	78	control	control	NOUN
aiti-207	3	79	scheme	scheme	NOUN
aiti-207	3	80	in	in	ADP
aiti-207	3	81	the	the	DET
aiti-207	3	82	semiconductor	semiconductor	NOUN
aiti-207	3	83	industry	industry	NOUN
aiti-207	3	84	.	.	PUNCT
aiti-207	4	1	traditionally	traditionally	ADV
aiti-207	4	2	,	,	PUNCT
aiti-207	4	3	the	the	DET
aiti-207	4	4	manufacturing	manufacturing	NOUN
aiti-207	4	5	environment	environment	NOUN
aiti-207	4	6	was	be	AUX
aiti-207	4	7	simplified	simplify	VERB
aiti-207	4	8	as	as	ADP
aiti-207	4	9	a	a	DET
aiti-207	4	10	single	single	ADJ
aiti-207	4	11	product	product	NOUN
aiti-207	4	12	and	and	CCONJ
aiti-207	4	13	single	single	ADJ
aiti-207	4	14	tool	tool	NOUN
aiti-207	4	15	process	process	NOUN
aiti-207	4	16	.	.	PUNCT
aiti-207	5	1	in	in	ADP
aiti-207	5	2	the	the	DET
aiti-207	5	3	feedback	feedback	NOUN
aiti-207	5	4	control	control	NOUN
aiti-207	5	5	,	,	PUNCT
aiti-207	5	6	the	the	DET
aiti-207	5	7	adjustment	adjustment	NOUN
aiti-207	5	8	of	of	ADP
aiti-207	5	9	the	the	DET
aiti-207	5	10	recipe	recipe	NOUN
aiti-207	5	11	for	for	ADP
aiti-207	5	12	the	the	DET
aiti-207	5	13	next	next	ADJ
aiti-207	5	14	run	run	NOUN
aiti-207	5	15	is	be	AUX
aiti-207	5	16	related	relate	VERB
aiti-207	5	17	to	to	ADP
aiti-207	5	18	the	the	DET
aiti-207	5	19	deviation	deviation	NOUN
aiti-207	5	20	of	of	ADP
aiti-207	5	21	the	the	DET
aiti-207	5	22	current	current	ADJ
aiti-207	5	23	output	output	NOUN
aiti-207	5	24	against	against	ADP
aiti-207	5	25	the	the	DET
aiti-207	5	26	desired	desire	VERB
aiti-207	5	27	target	target	NOUN
aiti-207	5	28	.	.	PUNCT
aiti-207	6	1	however	however	ADV
aiti-207	6	2	,	,	PUNCT
aiti-207	6	3	in	in	ADP
aiti-207	6	4	a	a	DET
aiti-207	6	5	commercial	commercial	ADJ
aiti-207	6	6	foundry	foundry	NOUN
aiti-207	6	7	,	,	PUNCT
aiti-207	6	8	every	every	DET
aiti-207	6	9	tool	tool	NOUN
aiti-207	6	10	always	always	ADV
aiti-207	6	11	works	work	VERB
aiti-207	6	12	for	for	ADP
aiti-207	6	13	many	many	ADJ
aiti-207	6	14	products	product	NOUN
aiti-207	6	15	.	.	PUNCT
aiti-207	7	1	it	it	PRON
aiti-207	7	2	is	be	AUX
aiti-207	7	3	called	call	VERB
aiti-207	7	4	a	a	DET
aiti-207	7	5	multiple	multiple	ADJ
aiti-207	7	6	products	product	NOUN
aiti-207	7	7	and	and	CCONJ
aiti-207	7	8	single	single	ADJ
aiti-207	7	9	tool	tool	NOUN
aiti-207	7	10	(	(	PUNCT
aiti-207	7	11	mpst	mpst	ADJ
aiti-207	7	12	)	)	PUNCT
aiti-207	7	13	process	process	NOUN
aiti-207	7	14	.	.	PUNCT
aiti-207	8	1	the	the	DET
aiti-207	8	2	challenge	challenge	NOUN
aiti-207	8	3	of	of	ADP
aiti-207	8	4	this	this	DET
aiti-207	8	5	process	process	NOUN
aiti-207	8	6	is	be	AUX
aiti-207	8	7	how	how	SCONJ
aiti-207	8	8	to	to	PART
aiti-207	8	9	adjust	adjust	VERB
aiti-207	8	10	the	the	DET
aiti-207	8	11	recipes	recipe	NOUN
aiti-207	8	12	among	among	ADP
aiti-207	8	13	different	different	ADJ
aiti-207	8	14	products	product	NOUN
aiti-207	8	15	in	in	ADP
aiti-207	8	16	a	a	DET
aiti-207	8	17	production	production	NOUN
aiti-207	8	18	row	row	NOUN
aiti-207	8	19	.	.	PUNCT
aiti-207	9	1	in	in	ADP
aiti-207	9	2	this	this	DET
aiti-207	9	3	study	study	NOUN
aiti-207	9	4	,	,	PUNCT
aiti-207	9	5	a	a	DET
aiti-207	9	6	modified	modify	VERB
aiti-207	9	7	threaded	thread	VERB
aiti-207	9	8	ewma	ewma	NOUN
aiti-207	9	9	feedback	feedback	NOUN
aiti-207	9	10	controller	controller	NOUN
aiti-207	9	11	,	,	PUNCT
aiti-207	9	12	the	the	DET
aiti-207	9	13	ewma	ewma	NOUN
aiti-207	9	14	with	with	ADP
aiti-207	9	15	concurrent	concurrent	ADJ
aiti-207	9	16	adjustment	adjustment	NOUN
aiti-207	9	17	,	,	PUNCT
aiti-207	9	18	is	be	AUX
aiti-207	9	19	proposed	propose	VERB
aiti-207	9	20	to	to	PART
aiti-207	9	21	deal	deal	VERB
aiti-207	9	22	with	with	ADP
aiti-207	9	23	the	the	DET
aiti-207	9	24	issue	issue	NOUN
aiti-207	9	25	of	of	ADP
aiti-207	9	26	multiple	multiple	ADJ
aiti-207	9	27	products	product	NOUN
aiti-207	9	28	in	in	ADP
aiti-207	9	29	a	a	DET
aiti-207	9	30	tool	tool	NOUN
aiti-207	9	31	.	.	PUNCT
aiti-207	10	1	when	when	SCONJ
aiti-207	10	2	the	the	DET
aiti-207	10	3	process	process	NOUN
aiti-207	10	4	disturbances	disturbance	NOUN
aiti-207	10	5	follow	follow	VERB
aiti-207	10	6	an	an	DET
aiti-207	10	7	ima(1,1	ima(1,1	NUM
aiti-207	10	8	)	)	PUNCT
aiti-207	10	9	time	time	NOUN
aiti-207	10	10	series	series	PROPN
aiti-207	10	11	model	model	PROPN
aiti-207	10	12	,	,	PUNCT
aiti-207	10	13	the	the	DET
aiti-207	10	14	stability	stability	NOUN
aiti-207	10	15	of	of	ADP
aiti-207	10	16	the	the	DET
aiti-207	10	17	proposed	propose	VERB
aiti-207	10	18	method	method	NOUN
aiti-207	10	19	will	will	AUX
aiti-207	10	20	be	be	AUX
aiti-207	10	21	proven	prove	VERB
aiti-207	10	22	.	.	PUNCT
aiti-207	11	1	the	the	DET
aiti-207	11	2	optimum	optimum	ADJ
aiti-207	11	3	discount	discount	NOUN
aiti-207	11	4	factors	factor	NOUN
aiti-207	11	5	of	of	ADP
aiti-207	11	6	the	the	DET
aiti-207	11	7	proposed	propose	VERB
aiti-207	11	8	ewma	ewma	NOUN
aiti-207	11	9	controller	controller	NOUN
aiti-207	11	10	will	will	AUX
aiti-207	11	11	be	be	AUX
aiti-207	11	12	investigated	investigate	VERB
aiti-207	11	13	by	by	ADP
aiti-207	11	14	several	several	ADJ
aiti-207	11	15	simulations	simulation	NOUN
aiti-207	11	16	in	in	ADP
aiti-207	11	17	terms	term	NOUN
aiti-207	11	18	of	of	ADP
aiti-207	11	19	the	the	DET
aiti-207	11	20	number	number	NOUN
aiti-207	11	21	of	of	ADP
aiti-207	11	22	multiple	multiple	ADJ
aiti-207	11	23	products	product	NOUN
aiti-207	11	24	,	,	PUNCT
aiti-207	11	25	their	their	PRON
aiti-207	11	26	distribution	distribution	NOUN
aiti-207	11	27	and	and	CCONJ
aiti-207	11	28	the	the	DET
aiti-207	11	29	scheduling	scheduling	NOUN
aiti-207	11	30	of	of	ADP
aiti-207	11	31	the	the	DET
aiti-207	11	32	process	process	NOUN
aiti-207	11	33	.	.	PUNCT
aiti-207	12	1	moreover	moreover	ADV
aiti-207	12	2	,	,	PUNCT
aiti-207	12	3	according	accord	VERB
aiti-207	12	4	to	to	ADP
aiti-207	12	5	results	result	NOUN
aiti-207	12	6	of	of	ADP
aiti-207	12	7	the	the	DET
aiti-207	12	8	performance	performance	NOUN
aiti-207	12	9	comparisons	comparison	NOUN
aiti-207	12	10	with	with	ADP
aiti-207	12	11	threaded	threaded	ADJ
aiti-207	12	12	ewma	ewma	NOUN
aiti-207	12	13	,	,	PUNCT
aiti-207	12	14	the	the	DET
aiti-207	12	15	proposed	propose	VERB
aiti-207	12	16	controller	controller	NOUN
aiti-207	12	17	is	be	AUX
aiti-207	12	18	advantage	advantage	NOUN
aiti-207	12	19	in	in	ADP
aiti-207	12	20	the	the	DET
aiti-207	12	21	large	large	ADJ
aiti-207	12	22	number	number	NOUN
aiti-207	12	23	of	of	ADP
aiti-207	12	24	multiple	multiple	ADJ
aiti-207	12	25	products	product	NOUN
aiti-207	12	26	and	and	CCONJ
aiti-207	12	27	in	in	ADP
aiti-207	12	28	low	low	ADJ
aiti-207	12	29	-	-	PUNCT
aiti-207	12	30	frequency	frequency	NOUN
aiti-207	12	31	products	product	NOUN
aiti-207	12	32	.	.	PUNCT
aiti-207	13	1	keywords	keyword	NOUN
aiti-207	13	2	:	:	PUNCT
aiti-207	13	3	ewma	ewma	NOUN
aiti-207	13	4	,	,	PUNCT
aiti-207	13	5	run	run	NOUN
aiti-207	13	6	-	-	PUNCT
aiti-207	13	7	to	to	AUX
aiti-207	13	8	-	-	PUNCT
aiti-207	13	9	run	run	VERB
aiti-207	13	10	,	,	PUNCT
aiti-207	13	11	feedback	feedback	NOUN
aiti-207	13	12	controller	controller	NOUN
aiti-207	13	13	,	,	PUNCT
aiti-207	13	14	high	high	ADJ
aiti-207	13	15	-	-	PUNCT
aiti-207	13	16	mixed	mixed	ADJ
aiti-207	13	17	production	production	NOUN
aiti-207	13	18	process	process	NOUN
aiti-207	13	19	,	,	PUNCT
aiti-207	13	20	concurrent	concurrent	ADJ
aiti-207	13	21	adjustment	adjustment	NOUN
aiti-207	13	22	1	1	NUM
aiti-207	13	23	.	.	PUNCT
aiti-207	14	1	introduction	introduction	NOUN
aiti-207	14	2	run	run	NOUN
aiti-207	14	3	-	-	PUNCT
aiti-207	14	4	to	to	AUX
aiti-207	14	5	-	-	PUNCT
aiti-207	14	6	run	run	VERB
aiti-207	14	7	(	(	PUNCT
aiti-207	14	8	r2r	r2r	NOUN
aiti-207	14	9	)	)	PUNCT
aiti-207	14	10	process	process	NOUN
aiti-207	14	11	controller	controller	NOUN
aiti-207	14	12	has	have	AUX
aiti-207	14	13	been	be	AUX
aiti-207	14	14	a	a	DET
aiti-207	14	15	conversional	conversional	ADJ
aiti-207	14	16	quality	quality	NOUN
aiti-207	14	17	control	control	NOUN
aiti-207	14	18	technique	technique	NOUN
aiti-207	14	19	in	in	ADP
aiti-207	14	20	semiconductor	semiconductor	NOUN
aiti-207	14	21	manufacturing	manufacturing	NOUN
aiti-207	14	22	process	process	NOUN
aiti-207	14	23	.	.	PUNCT
aiti-207	15	1	it	it	PRON
aiti-207	15	2	was	be	AUX
aiti-207	15	3	purposed	purpose	VERB
aiti-207	15	4	by	by	ADP
aiti-207	15	5	integrating	integrate	VERB
aiti-207	15	6	statistical	statistical	ADJ
aiti-207	15	7	process	process	NOUN
aiti-207	15	8	control	control	NOUN
aiti-207	15	9	(	(	PUNCT
aiti-207	15	10	spc	spc	PROPN
aiti-207	15	11	)	)	PUNCT
aiti-207	15	12	and	and	CCONJ
aiti-207	15	13	engineering	engineering	NOUN
aiti-207	15	14	process	process	NOUN
aiti-207	15	15	control	control	NOUN
aiti-207	15	16	(	(	PUNCT
aiti-207	15	17	epc	epc	PROPN
aiti-207	15	18	)	)	PUNCT
aiti-207	15	19	for	for	ADP
aiti-207	15	20	overcoming	overcome	VERB
aiti-207	15	21	the	the	DET
aiti-207	15	22	shift	shift	NOUN
aiti-207	15	23	or	or	CCONJ
aiti-207	15	24	gradually	gradually	ADV
aiti-207	15	25	drift	drift	VERB
aiti-207	15	26	in	in	ADP
aiti-207	15	27	the	the	DET
aiti-207	15	28	complex	complex	ADJ
aiti-207	15	29	manufacturing	manufacturing	NOUN
aiti-207	15	30	process	process	NOUN
aiti-207	15	31	[	[	X
aiti-207	15	32	1	1	NUM
aiti-207	15	33	-	-	SYM
aiti-207	15	34	2	2	NUM
aiti-207	15	35	]	]	PUNCT
aiti-207	15	36	.	.	PUNCT
aiti-207	16	1	in	in	ADP
aiti-207	16	2	most	most	ADJ
aiti-207	16	3	semiconductor	semiconductor	NOUN
aiti-207	16	4	manufacturing	manufacturing	NOUN
aiti-207	16	5	process	process	NOUN
aiti-207	16	6	,	,	PUNCT
aiti-207	16	7	the	the	DET
aiti-207	16	8	run	run	NOUN
aiti-207	16	9	-	-	PUNCT
aiti-207	16	10	to	to	ADP
aiti-207	16	11	-	-	PUNCT
aiti-207	16	12	run	run	VERB
aiti-207	16	13	process	process	NOUN
aiti-207	16	14	controller	controller	NOUN
aiti-207	16	15	for	for	ADP
aiti-207	16	16	adjusting	adjust	VERB
aiti-207	16	17	the	the	DET
aiti-207	16	18	input	input	NOUN
aiti-207	16	19	recipe	recipe	NOUN
aiti-207	16	20	is	be	AUX
aiti-207	16	21	based	base	VERB
aiti-207	16	22	on	on	ADP
aiti-207	16	23	a	a	DET
aiti-207	16	24	known	know	VERB
aiti-207	16	25	prediction	prediction	NOUN
aiti-207	16	26	model	model	NOUN
aiti-207	16	27	.	.	PUNCT
aiti-207	17	1	assume	assume	VERB
aiti-207	17	2	that	that	SCONJ
aiti-207	17	3	the	the	DET
aiti-207	17	4	i	i	PROPN
aiti-207	17	5	/	/	SYM
aiti-207	17	6	o	o	PROPN
aiti-207	17	7	relationship	relationship	NOUN
aiti-207	17	8	of	of	ADP
aiti-207	17	9	the	the	DET
aiti-207	17	10	siso	siso	NOUN
aiti-207	17	11	process	process	NOUN
aiti-207	17	12	is	be	AUX
aiti-207	17	13	linear	linear	ADJ
aiti-207	17	14	,	,	PUNCT
aiti-207	17	15	the	the	DET
aiti-207	17	16	process	process	NOUN
aiti-207	17	17	outputs	output	NOUN
aiti-207	17	18	(	(	PUNCT
aiti-207	17	19	𝑦𝑡	𝑦𝑡	PROPN
aiti-207	17	20	)	)	PUNCT
aiti-207	17	21	can	can	AUX
aiti-207	17	22	be	be	AUX
aiti-207	17	23	expressed	express	VERB
aiti-207	17	24	as	as	SCONJ
aiti-207	17	25	follows	follow	VERB
aiti-207	17	26	:	:	PUNCT
aiti-207	17	27	0	0	NUM
aiti-207	17	28	0	0	NUM
aiti-207	18	1	1	1	NUM
aiti-207	18	2	t	t	NOUN
aiti-207	18	3	t	t	NOUN
aiti-207	18	4	ty	ty	NOUN
aiti-207	18	5	x	x	PROPN
aiti-207	18	6			PROPN
aiti-207	18	7			PROPN
aiti-207	18	8			PUNCT
aiti-207	18	9			X
aiti-207	18	10	(	(	PUNCT
aiti-207	18	11	1	1	X
aiti-207	18	12	)	)	PUNCT
aiti-207	18	13	where	where	SCONJ
aiti-207	18	14	𝑥𝑡−1	𝑥𝑡−1	VERB
aiti-207	18	15	denotes	denote	NOUN
aiti-207	18	16	the	the	DET
aiti-207	18	17	process	process	NOUN
aiti-207	18	18	input	input	NOUN
aiti-207	18	19	at	at	ADP
aiti-207	18	20	run	run	NOUN
aiti-207	18	21	t	t	PROPN
aiti-207	18	22	that	that	PRON
aiti-207	18	23	has	have	AUX
aiti-207	18	24	been	be	AUX
aiti-207	18	25	adjusted	adjust	VERB
aiti-207	18	26	after	after	SCONJ
aiti-207	18	27	its	its	PRON
aiti-207	18	28	previous	previous	ADJ
aiti-207	18	29	output	output	NOUN
aiti-207	18	30	𝑦𝑡−1	𝑦𝑡−1	PROPN
aiti-207	18	31	obtained	obtain	VERB
aiti-207	18	32	,	,	PUNCT
aiti-207	18	33	𝛼0	𝛼0	PROPN
aiti-207	18	34	and	and	CCONJ
aiti-207	18	35	𝛽0	𝛽0	PROPN
aiti-207	18	36	are	be	AUX
aiti-207	18	37	the	the	DET
aiti-207	18	38	intercept	intercept	NOUN
aiti-207	18	39	and	and	CCONJ
aiti-207	18	40	slope	slope	NOUN
aiti-207	18	41	parameters	parameter	NOUN
aiti-207	18	42	,	,	PUNCT
aiti-207	18	43	respectively	respectively	ADV
aiti-207	18	44	,	,	PUNCT
aiti-207	18	45	and	and	CCONJ
aiti-207	18	46	𝜖𝑡	𝜖𝑡	NOUN
aiti-207	18	47	denotes	denote	NOUN
aiti-207	18	48	the	the	DET
aiti-207	18	49	process	process	NOUN
aiti-207	18	50	disturbances	disturbance	NOUN
aiti-207	18	51	.	.	PUNCT
aiti-207	19	1	the	the	DET
aiti-207	19	2	next	next	ADJ
aiti-207	19	3	process	process	NOUN
aiti-207	19	4	input	input	NOUN
aiti-207	19	5	at	at	ADP
aiti-207	19	6	run	run	NOUN
aiti-207	19	7	𝑡	𝑡	PROPN
aiti-207	19	8	+	+	NOUN
aiti-207	19	9	1	1	NUM
aiti-207	19	10	will	will	AUX
aiti-207	19	11	be	be	AUX
aiti-207	19	12	adjusted	adjust	VERB
aiti-207	19	13	by	by	ADP
aiti-207	19	14	:	:	PUNCT
aiti-207	19	15	t	t	PROPN
aiti-207	19	16	t	t	PROPN
aiti-207	19	17	a	a	DET
aiti-207	19	18	x	x	X
aiti-207	19	19	b	b	PROPN
aiti-207	19	20			PROPN
aiti-207	19	21			NOUN
aiti-207	19	22			PRON
aiti-207	19	23	(	(	PUNCT
aiti-207	19	24	2	2	NUM
aiti-207	19	25	)	)	PUNCT
aiti-207	19	26	where	where	SCONJ
aiti-207	19	27	τ	τ	PROPN
aiti-207	19	28	is	be	AUX
aiti-207	19	29	the	the	DET
aiti-207	19	30	process	process	NOUN
aiti-207	19	31	target	target	NOUN
aiti-207	19	32	,	,	PUNCT
aiti-207	19	33	𝑏	𝑏	PROPN
aiti-207	19	34	is	be	AUX
aiti-207	19	35	the	the	DET
aiti-207	19	36	estimate	estimate	NOUN
aiti-207	19	37	of	of	ADP
aiti-207	19	38	the	the	DET
aiti-207	19	39	slope	slope	NOUN
aiti-207	19	40	𝛽	𝛽	PROPN
aiti-207	19	41	and	and	CCONJ
aiti-207	19	42	𝑎𝑡	𝑎𝑡	NOUN
aiti-207	19	43	is	be	AUX
aiti-207	19	44	the	the	DET
aiti-207	19	45	new	new	ADJ
aiti-207	19	46	estimate	estimate	NOUN
aiti-207	19	47	of	of	ADP
aiti-207	19	48	𝛼0	𝛼0	PROPN
aiti-207	19	49	by	by	ADP
aiti-207	19	50	using	use	VERB
aiti-207	19	51	the	the	DET
aiti-207	19	52	following	follow	VERB
aiti-207	19	53	ewma	ewma	NOUN
aiti-207	19	54	formula	formula	NOUN
aiti-207	19	55	:	:	PUNCT
aiti-207	20	1			NOUN
aiti-207	20	2			SYM
aiti-207	20	3			NOUN
aiti-207	20	4	1	1	VERB
aiti-207	20	5	11	11	NUM
aiti-207	20	6	t	t	NOUN
aiti-207	20	7	t	t	NOUN
aiti-207	20	8	t	t	NOUN
aiti-207	20	9	ta	ta	PROPN
aiti-207	20	10	y	y	PROPN
aiti-207	20	11	bx	bx	PROPN
aiti-207	20	12	a	a	ADV
aiti-207	20	13			VERB
aiti-207	20	14			ADJ
aiti-207	20	15			PROPN
aiti-207	20	16			VERB
aiti-207	20	17			NOUN
aiti-207	20	18	(	(	PUNCT
aiti-207	20	19	3	3	NUM
aiti-207	20	20	)	)	PUNCT
aiti-207	20	21	typically	typically	ADV
aiti-207	20	22	,	,	PUNCT
aiti-207	20	23	the	the	DET
aiti-207	20	24	researches	research	NOUN
aiti-207	20	25	related	relate	VERB
aiti-207	20	26	to	to	ADP
aiti-207	20	27	the	the	DET
aiti-207	20	28	topic	topic	NOUN
aiti-207	20	29	of	of	ADP
aiti-207	20	30	how	how	SCONJ
aiti-207	20	31	to	to	PART
aiti-207	20	32	enhance	enhance	VERB
aiti-207	20	33	the	the	DET
aiti-207	20	34	performances	performance	NOUN
aiti-207	20	35	of	of	ADP
aiti-207	20	36	r2r	r2r	NOUN
aiti-207	20	37	controller	controller	NOUN
aiti-207	20	38	are	be	AUX
aiti-207	20	39	very	very	ADV
aiti-207	20	40	restricted	restrict	VERB
aiti-207	20	41	in	in	ADP
aiti-207	20	42	a	a	DET
aiti-207	20	43	single	single	ADJ
aiti-207	20	44	product	product	NOUN
aiti-207	20	45	and	and	CCONJ
aiti-207	20	46	single	single	ADJ
aiti-207	20	47	tool	tool	NOUN
aiti-207	20	48	(	(	PUNCT
aiti-207	20	49	spst	spst	PROPN
aiti-207	20	50	)	)	PUNCT
aiti-207	20	51	production	production	NOUN
aiti-207	20	52	environment	environment	NOUN
aiti-207	20	53	.	.	PUNCT
aiti-207	21	1	however	however	ADV
aiti-207	21	2	,	,	PUNCT
aiti-207	21	3	in	in	ADP
aiti-207	21	4	many	many	ADJ
aiti-207	21	5	real	real	ADJ
aiti-207	21	6	commercial	commercial	ADJ
aiti-207	21	7	production	production	NOUN
aiti-207	21	8	processes	process	NOUN
aiti-207	21	9	,	,	PUNCT
aiti-207	21	10	a	a	DET
aiti-207	21	11	tool	tool	NOUN
aiti-207	21	12	will	will	AUX
aiti-207	21	13	produce	produce	VERB
aiti-207	21	14	several	several	ADJ
aiti-207	21	15	different	different	ADJ
aiti-207	21	16	products	product	NOUN
aiti-207	21	17	.	.	PUNCT
aiti-207	22	1	the	the	DET
aiti-207	22	2	same	same	ADJ
aiti-207	22	3	type	type	NOUN
aiti-207	22	4	of	of	ADP
aiti-207	22	5	products	product	NOUN
aiti-207	22	6	might	might	AUX
aiti-207	22	7	not	not	PART
aiti-207	22	8	be	be	AUX
aiti-207	22	9	produced	produce	VERB
aiti-207	22	10	in	in	ADP
aiti-207	22	11	-	-	PUNCT
aiti-207	22	12	a	a	DET
aiti-207	22	13	-	-	PUNCT
aiti-207	22	14	row	row	NOUN
aiti-207	22	15	.	.	PUNCT
aiti-207	23	1	the	the	DET
aiti-207	23	2	kind	kind	NOUN
aiti-207	23	3	of	of	ADP
aiti-207	23	4	manufacturing	manufacturing	NOUN
aiti-207	23	5	*	*	PUNCT
aiti-207	23	6	corresponding	correspond	VERB
aiti-207	23	7	author	author	NOUN
aiti-207	23	8	,	,	PUNCT
aiti-207	23	9	email	email	NOUN
aiti-207	23	10	:	:	PUNCT
aiti-207	23	11	shuipin@uch.edu.tw	shuipin@uch.edu.tw	NOUN
aiti-207	23	12	advances	advance	NOUN
aiti-207	23	13	in	in	ADP
aiti-207	23	14	technology	technology	NOUN
aiti-207	23	15	innovation	innovation	NOUN
aiti-207	23	16	,	,	PUNCT
aiti-207	23	17	vol	vol	NOUN
aiti-207	23	18	.	.	PROPN
aiti-207	24	1	2	2	NUM
aiti-207	24	2	,	,	PUNCT
aiti-207	24	3	no	no	INTJ
aiti-207	24	4	.	.	NOUN
aiti-207	24	5	1	1	NUM
aiti-207	24	6	,	,	PUNCT
aiti-207	24	7	2017	2017	NUM
aiti-207	24	8	,	,	PUNCT
aiti-207	24	9	pp	pp	ADJ
aiti-207	24	10	.	.	PUNCT
aiti-207	25	1	25	25	NUM
aiti-207	25	2	28	28	NUM
aiti-207	25	3	26	26	NUM
aiti-207	25	4	copyright	copyright	NOUN
aiti-207	25	5	©	©	PROPN
aiti-207	25	6	taeti	taeti	PROPN
aiti-207	25	7	mode	mode	NOUN
aiti-207	25	8	is	be	AUX
aiti-207	25	9	often	often	ADV
aiti-207	25	10	called	call	VERB
aiti-207	25	11	a	a	DET
aiti-207	25	12	multiple	multiple	ADJ
aiti-207	25	13	-	-	PUNCT
aiti-207	25	14	productmultiple	productmultiple	ADJ
aiti-207	25	15	-	-	PUNCT
aiti-207	25	16	tool	tool	NOUN
aiti-207	25	17	(	(	PUNCT
aiti-207	25	18	mpmt	mpmt	PROPN
aiti-207	25	19	)	)	PUNCT
aiti-207	25	20	or	or	CCONJ
aiti-207	25	21	a	a	DET
aiti-207	25	22	high	high	ADV
aiti-207	25	23	-	-	PUNCT
aiti-207	25	24	mixed	mixed	ADJ
aiti-207	25	25	production	production	NOUN
aiti-207	25	26	process	process	NOUN
aiti-207	25	27	.	.	PUNCT
aiti-207	26	1	the	the	DET
aiti-207	26	2	foundries	foundry	NOUN
aiti-207	26	3	in	in	ADP
aiti-207	26	4	taiwan	taiwan	PROPN
aiti-207	26	5	are	be	AUX
aiti-207	26	6	the	the	DET
aiti-207	26	7	typical	typical	ADJ
aiti-207	26	8	examples	example	NOUN
aiti-207	26	9	of	of	ADP
aiti-207	26	10	the	the	DET
aiti-207	26	11	high	high	ADV
aiti-207	26	12	-	-	PUNCT
aiti-207	26	13	mixed	mixed	ADJ
aiti-207	26	14	manufacturing	manufacturing	NOUN
aiti-207	26	15	mode	mode	NOUN
aiti-207	26	16	.	.	PUNCT
aiti-207	27	1	the	the	DET
aiti-207	27	2	manufacturing	manufacturing	NOUN
aiti-207	27	3	environment	environment	NOUN
aiti-207	27	4	consists	consist	VERB
aiti-207	27	5	of	of	ADP
aiti-207	27	6	multiple	multiple	ADJ
aiti-207	27	7	products	product	NOUN
aiti-207	27	8	passing	pass	VERB
aiti-207	27	9	through	through	ADP
aiti-207	27	10	a	a	DET
aiti-207	27	11	sequence	sequence	NOUN
aiti-207	27	12	of	of	ADP
aiti-207	27	13	batch	batch	NOUN
aiti-207	27	14	processing	processing	NOUN
aiti-207	27	15	steps	step	NOUN
aiti-207	27	16	being	be	AUX
aiti-207	27	17	that	that	PRON
aiti-207	27	18	are	be	AUX
aiti-207	27	19	out	out	ADV
aiti-207	27	20	by	by	ADP
aiti-207	27	21	multiple	multiple	ADJ
aiti-207	27	22	parallel	parallel	ADJ
aiti-207	27	23	tools	tool	NOUN
aiti-207	27	24	.	.	PUNCT
aiti-207	28	1	recently	recently	ADV
aiti-207	28	2	,	,	PUNCT
aiti-207	28	3	r2r	r2r	NOUN
aiti-207	28	4	control	control	NOUN
aiti-207	28	5	implementation	implementation	NOUN
aiti-207	28	6	in	in	ADP
aiti-207	28	7	a	a	DET
aiti-207	28	8	mpmt	mpmt	NOUN
aiti-207	28	9	environment	environment	NOUN
aiti-207	28	10	has	have	AUX
aiti-207	28	11	been	be	AUX
aiti-207	28	12	discussed	discuss	VERB
aiti-207	28	13	by	by	ADP
aiti-207	28	14	many	many	ADJ
aiti-207	28	15	authors	author	NOUN
aiti-207	28	16	[	[	X
aiti-207	28	17	3	3	NUM
aiti-207	28	18	-	-	SYM
aiti-207	28	19	5	5	NUM
aiti-207	28	20	]	]	PUNCT
aiti-207	28	21	.	.	PUNCT
aiti-207	29	1	most	most	ADJ
aiti-207	29	2	of	of	ADP
aiti-207	29	3	these	these	DET
aiti-207	29	4	works	work	NOUN
aiti-207	29	5	have	have	AUX
aiti-207	29	6	attempted	attempt	VERB
aiti-207	29	7	to	to	PART
aiti-207	29	8	identify	identify	VERB
aiti-207	29	9	parameters	parameter	NOUN
aiti-207	29	10	that	that	PRON
aiti-207	29	11	can	can	AUX
aiti-207	29	12	characterize	characterize	VERB
aiti-207	29	13	the	the	DET
aiti-207	29	14	product	product	NOUN
aiti-207	29	15	and	and	CCONJ
aiti-207	29	16	tool	tool	NOUN
aiti-207	29	17	states	state	NOUN
aiti-207	29	18	.	.	PUNCT
aiti-207	30	1	however	however	ADV
aiti-207	30	2	,	,	PUNCT
aiti-207	30	3	information	information	NOUN
aiti-207	30	4	is	be	AUX
aiti-207	30	5	never	never	ADV
aiti-207	30	6	shared	share	VERB
aiti-207	30	7	between	between	ADP
aiti-207	30	8	products	product	NOUN
aiti-207	30	9	or	or	CCONJ
aiti-207	30	10	tools	tool	NOUN
aiti-207	30	11	in	in	ADP
aiti-207	30	12	such	such	DET
aiti-207	30	13	an	an	DET
aiti-207	30	14	approach	approach	NOUN
aiti-207	30	15	.	.	PUNCT
aiti-207	31	1	thus	thus	ADV
aiti-207	31	2	,	,	PUNCT
aiti-207	31	3	epc	epc	PROPN
aiti-207	31	4	or	or	CCONJ
aiti-207	31	5	spc	spc	PROPN
aiti-207	31	6	are	be	AUX
aiti-207	31	7	ineffective	ineffective	ADJ
aiti-207	31	8	for	for	ADP
aiti-207	31	9	low	low	ADJ
aiti-207	31	10	frequency	frequency	NOUN
aiti-207	31	11	products	product	NOUN
aiti-207	31	12	.	.	PUNCT
aiti-207	32	1	lee	lee	PROPN
aiti-207	32	2	et	et	PROPN
aiti-207	32	3	al	al	PROPN
aiti-207	32	4	.	.	PUNCT
aiti-207	33	1	[	[	X
aiti-207	33	2	6	6	NUM
aiti-207	33	3	]	]	PUNCT
aiti-207	33	4	proposed	propose	VERB
aiti-207	33	5	a	a	DET
aiti-207	33	6	cumulative	cumulative	ADJ
aiti-207	33	7	sum	sum	NOUN
aiti-207	33	8	-	-	PUNCT
aiti-207	33	9	type	type	NOUN
aiti-207	33	10	statistical	statistical	ADJ
aiti-207	33	11	process	process	NOUN
aiti-207	33	12	control	control	NOUN
aiti-207	33	13	for	for	ADP
aiti-207	33	14	a	a	DET
aiti-207	33	15	mpmt	mpmt	NOUN
aiti-207	33	16	process	process	NOUN
aiti-207	33	17	to	to	PART
aiti-207	33	18	detect	detect	VERB
aiti-207	33	19	substantial	substantial	ADJ
aiti-207	33	20	changes	change	NOUN
aiti-207	33	21	in	in	ADP
aiti-207	33	22	tool	tool	NOUN
aiti-207	33	23	and	and	CCONJ
aiti-207	33	24	product	product	NOUN
aiti-207	33	25	effects	effect	NOUN
aiti-207	33	26	.	.	PUNCT
aiti-207	34	1	the	the	DET
aiti-207	34	2	estimate	estimate	NOUN
aiti-207	34	3	of	of	ADP
aiti-207	34	4	gain	gain	NOUN
aiti-207	34	5	parameter	parameter	NOUN
aiti-207	34	6	will	will	AUX
aiti-207	34	7	be	be	AUX
aiti-207	34	8	updated	update	VERB
aiti-207	34	9	after	after	ADP
aiti-207	34	10	signals	signal	NOUN
aiti-207	34	11	.	.	PUNCT
aiti-207	35	1	the	the	DET
aiti-207	35	2	recipes	recipe	NOUN
aiti-207	35	3	of	of	ADP
aiti-207	35	4	inactive	inactive	ADJ
aiti-207	35	5	products	product	NOUN
aiti-207	35	6	will	will	AUX
aiti-207	35	7	be	be	AUX
aiti-207	35	8	adjusted	adjust	VERB
aiti-207	35	9	if	if	SCONJ
aiti-207	35	10	spc	spc	PROPN
aiti-207	35	11	emits	emit	VERB
aiti-207	35	12	a	a	DET
aiti-207	35	13	signal	signal	NOUN
aiti-207	35	14	.	.	PUNCT
aiti-207	36	1	for	for	ADP
aiti-207	36	2	statistical	statistical	ADJ
aiti-207	36	3	significance	significance	NOUN
aiti-207	36	4	,	,	PUNCT
aiti-207	36	5	the	the	DET
aiti-207	36	6	signal	signal	NOUN
aiti-207	36	7	is	be	AUX
aiti-207	36	8	related	relate	VERB
aiti-207	36	9	to	to	ADP
aiti-207	36	10	the	the	DET
aiti-207	36	11	number	number	NOUN
aiti-207	36	12	of	of	ADP
aiti-207	36	13	different	different	ADJ
aiti-207	36	14	products	product	NOUN
aiti-207	36	15	.	.	PUNCT
aiti-207	37	1	in	in	ADP
aiti-207	37	2	this	this	DET
aiti-207	37	3	short	short	ADJ
aiti-207	37	4	paper	paper	NOUN
aiti-207	37	5	,	,	PUNCT
aiti-207	37	6	the	the	DET
aiti-207	37	7	ewma	ewma	NOUN
aiti-207	37	8	with	with	ADP
aiti-207	37	9	concurrent	concurrent	ADJ
aiti-207	37	10	adjustment	adjustment	NOUN
aiti-207	37	11	algorithm	algorithm	NOUN
aiti-207	37	12	for	for	ADP
aiti-207	37	13	a	a	DET
aiti-207	37	14	multiple	multiple	ADJ
aiti-207	37	15	products	product	NOUN
aiti-207	37	16	and	and	CCONJ
aiti-207	37	17	single	single	ADJ
aiti-207	37	18	tool	tool	NOUN
aiti-207	37	19	(	(	PUNCT
aiti-207	37	20	mpst	mpst	ADJ
aiti-207	37	21	)	)	PUNCT
aiti-207	37	22	process	process	NOUN
aiti-207	37	23	is	be	AUX
aiti-207	37	24	proposed	propose	VERB
aiti-207	37	25	for	for	ADP
aiti-207	37	26	inactive	inactive	ADJ
aiti-207	37	27	products	product	NOUN
aiti-207	37	28	.	.	PUNCT
aiti-207	38	1	such	such	ADJ
aiti-207	38	2	that	that	SCONJ
aiti-207	38	3	,	,	PUNCT
aiti-207	38	4	when	when	SCONJ
aiti-207	38	5	those	those	DET
aiti-207	38	6	products	product	NOUN
aiti-207	38	7	become	become	VERB
aiti-207	38	8	active	active	ADJ
aiti-207	38	9	,	,	PUNCT
aiti-207	38	10	their	their	PRON
aiti-207	38	11	corresponding	correspond	VERB
aiti-207	38	12	recipes	recipe	NOUN
aiti-207	38	13	can	can	AUX
aiti-207	38	14	reflect	reflect	VERB
aiti-207	38	15	the	the	DET
aiti-207	38	16	effect	effect	NOUN
aiti-207	38	17	of	of	ADP
aiti-207	38	18	the	the	DET
aiti-207	38	19	tool	tool	NOUN
aiti-207	38	20	change	change	NOUN
aiti-207	38	21	.	.	PUNCT
aiti-207	39	1	the	the	DET
aiti-207	39	2	organization	organization	NOUN
aiti-207	39	3	of	of	ADP
aiti-207	39	4	the	the	DET
aiti-207	39	5	paper	paper	NOUN
aiti-207	39	6	is	be	AUX
aiti-207	39	7	as	as	SCONJ
aiti-207	39	8	follows	follow	VERB
aiti-207	39	9	.	.	PUNCT
aiti-207	40	1	the	the	DET
aiti-207	40	2	proposed	propose	VERB
aiti-207	40	3	ewma	ewma	NOUN
aiti-207	40	4	with	with	ADP
aiti-207	40	5	concurrent	concurrent	ADJ
aiti-207	40	6	adjustment	adjustment	NOUN
aiti-207	40	7	algorithm	algorithm	NOUN
aiti-207	40	8	is	be	AUX
aiti-207	40	9	introduced	introduce	VERB
aiti-207	40	10	in	in	ADP
aiti-207	40	11	section	section	NOUN
aiti-207	40	12	2	2	NUM
aiti-207	40	13	.	.	PUNCT
aiti-207	41	1	in	in	ADP
aiti-207	41	2	section	section	NOUN
aiti-207	41	3	3	3	NUM
aiti-207	41	4	,	,	PUNCT
aiti-207	41	5	the	the	DET
aiti-207	41	6	stability	stability	NOUN
aiti-207	41	7	condition	condition	NOUN
aiti-207	41	8	of	of	ADP
aiti-207	41	9	the	the	DET
aiti-207	41	10	proposed	propose	VERB
aiti-207	41	11	method	method	NOUN
aiti-207	41	12	and	and	CCONJ
aiti-207	41	13	the	the	DET
aiti-207	41	14	evaluation	evaluation	NOUN
aiti-207	41	15	of	of	ADP
aiti-207	41	16	its	its	PRON
aiti-207	41	17	performance	performance	NOUN
aiti-207	41	18	will	will	AUX
aiti-207	41	19	be	be	AUX
aiti-207	41	20	shown	show	VERB
aiti-207	41	21	.	.	PUNCT
aiti-207	42	1	conclusions	conclusion	NOUN
aiti-207	42	2	were	be	AUX
aiti-207	42	3	then	then	ADV
aiti-207	42	4	drawn	draw	VERB
aiti-207	42	5	in	in	ADP
aiti-207	42	6	section	section	NOUN
aiti-207	42	7	4	4	NUM
aiti-207	42	8	.	.	NOUN
aiti-207	42	9	2	2	NUM
aiti-207	42	10	.	.	NOUN
aiti-207	42	11	ewma	ewma	NOUN
aiti-207	42	12	controller	controller	NOUN
aiti-207	42	13	with	with	ADP
aiti-207	42	14	concurrent	concurrent	ADJ
aiti-207	42	15	adjustment	adjustment	NOUN
aiti-207	42	16	if	if	SCONJ
aiti-207	42	17	we	we	PRON
aiti-207	42	18	assume	assume	VERB
aiti-207	42	19	the	the	DET
aiti-207	42	20	initial	initial	ADJ
aiti-207	42	21	estimates	estimate	NOUN
aiti-207	42	22	of	of	ADP
aiti-207	42	23	parameters	parameter	NOUN
aiti-207	42	24	α	α	PROPN
aiti-207	42	25	and	and	CCONJ
aiti-207	42	26	β	β	X
aiti-207	42	27	of	of	ADP
aiti-207	42	28	(	(	PUNCT
aiti-207	42	29	1	1	X
aiti-207	42	30	)	)	PUNCT
aiti-207	42	31	are	be	AUX
aiti-207	42	32	correct	correct	ADJ
aiti-207	42	33	,	,	PUNCT
aiti-207	42	34	the	the	DET
aiti-207	42	35	input	input	NOUN
aiti-207	42	36	recipe	recipe	NOUN
aiti-207	42	37	will	will	AUX
aiti-207	42	38	be	be	AUX
aiti-207	42	39	set	set	VERB
aiti-207	42	40	�	�	PROPN
aiti-207	42	41	̃	̃	PROPN
aiti-207	42	42	�	�	PROPN
aiti-207	42	43	=	=	SYM
aiti-207	42	44	𝜏−𝛼	𝜏−𝛼	NOUN
aiti-207	42	45	𝛽0	𝛽0	NOUN
aiti-207	42	46	for	for	ADP
aiti-207	42	47	all	all	DET
aiti-207	42	48	runs	run	NOUN
aiti-207	42	49	to	to	PART
aiti-207	42	50	make	make	VERB
aiti-207	42	51	the	the	DET
aiti-207	42	52	expected	expect	VERB
aiti-207	42	53	output	output	NOUN
aiti-207	42	54	meet	meet	VERB
aiti-207	42	55	the	the	DET
aiti-207	42	56	process	process	NOUN
aiti-207	42	57	target	target	NOUN
aiti-207	42	58	.	.	PUNCT
aiti-207	43	1	without	without	ADP
aiti-207	43	2	loss	loss	NOUN
aiti-207	43	3	generality	generality	NOUN
aiti-207	43	4	,	,	PUNCT
aiti-207	43	5	we	we	PRON
aiti-207	43	6	can	can	AUX
aiti-207	43	7	simplify	simplify	VERB
aiti-207	43	8	(	(	PUNCT
aiti-207	43	9	1	1	NUM
aiti-207	43	10	)	)	PUNCT
aiti-207	43	11	by	by	ADP
aiti-207	43	12	the	the	DET
aiti-207	43	13	following	follow	VERB
aiti-207	43	14	expression	expression	NOUN
aiti-207	43	15	:	:	PUNCT
aiti-207	43	16	0	0	NUM
aiti-207	43	17	1	1	NUM
aiti-207	43	18	t	t	NOUN
aiti-207	43	19	t	t	NOUN
aiti-207	43	20	ty	ty	INTJ
aiti-207	43	21	x	x	PROPN
aiti-207	43	22			PROPN
aiti-207	43	23			X
aiti-207	43	24	(	(	PUNCT
aiti-207	43	25	4	4	X
aiti-207	43	26	)	)	PUNCT
aiti-207	43	27	assume	assume	VERB
aiti-207	43	28	that	that	SCONJ
aiti-207	43	29	there	there	PRON
aiti-207	43	30	are	be	VERB
aiti-207	43	31	j	j	PROPN
aiti-207	43	32	products	product	NOUN
aiti-207	43	33	will	will	AUX
aiti-207	43	34	be	be	AUX
aiti-207	43	35	produced	produce	VERB
aiti-207	43	36	in	in	ADP
aiti-207	43	37	a	a	DET
aiti-207	43	38	tool	tool	NOUN
aiti-207	43	39	.	.	PUNCT
aiti-207	44	1	let	let	VERB
aiti-207	44	2	𝑥𝑗,𝑡−1and	𝑥𝑗,𝑡−1and	INTJ
aiti-207	44	3	𝑦𝑗,𝑡denote	𝑦𝑗,𝑡denote	VERB
aiti-207	44	4	the	the	DET
aiti-207	44	5	process	process	NOUN
aiti-207	44	6	input	input	NOUN
aiti-207	44	7	and	and	CCONJ
aiti-207	44	8	output	output	NOUN
aiti-207	44	9	at	at	ADP
aiti-207	44	10	run	run	NOUN
aiti-207	44	11	𝑡.	𝑡.	NOUN
aiti-207	44	12	since	since	SCONJ
aiti-207	44	13	a	a	DET
aiti-207	44	14	tool	tool	NOUN
aiti-207	44	15	just	just	ADV
aiti-207	44	16	can	can	AUX
aiti-207	44	17	produce	produce	VERB
aiti-207	44	18	one	one	NUM
aiti-207	44	19	product	product	NOUN
aiti-207	44	20	at	at	ADP
aiti-207	44	21	each	each	DET
aiti-207	44	22	run	run	NOUN
aiti-207	44	23	,	,	PUNCT
aiti-207	44	24	the	the	DET
aiti-207	44	25	product	product	NOUN
aiti-207	44	26	index	index	NOUN
aiti-207	44	27	𝑗	𝑗	NOUN
aiti-207	44	28	is	be	AUX
aiti-207	44	29	a	a	DET
aiti-207	44	30	function	function	NOUN
aiti-207	44	31	of	of	ADP
aiti-207	44	32	𝑡.	𝑡.	NOUN
aiti-207	44	33	the	the	DET
aiti-207	44	34	product	product	NOUN
aiti-207	44	35	𝑗	𝑗	INTJ
aiti-207	44	36	is	be	AUX
aiti-207	44	37	active	active	ADJ
aiti-207	44	38	at	at	ADP
aiti-207	44	39	run	run	NOUN
aiti-207	44	40	𝑡	𝑡	PROPN
aiti-207	44	41	,	,	PUNCT
aiti-207	44	42	but	but	CCONJ
aiti-207	44	43	other	other	ADJ
aiti-207	44	44	𝐽	𝐽	PROPN
aiti-207	44	45	−	−	NOUN
aiti-207	44	46	1	1	NUM
aiti-207	44	47	products	product	NOUN
aiti-207	44	48	are	be	AUX
aiti-207	44	49	inactive	inactive	ADJ
aiti-207	44	50	.	.	PUNCT
aiti-207	45	1	in	in	ADP
aiti-207	45	2	this	this	DET
aiti-207	45	3	paper	paper	NOUN
aiti-207	45	4	,	,	PUNCT
aiti-207	45	5	the	the	DET
aiti-207	45	6	i	i	PROPN
aiti-207	45	7	/	/	SYM
aiti-207	45	8	o	o	PROPN
aiti-207	45	9	relationship	relationship	NOUN
aiti-207	45	10	of	of	ADP
aiti-207	45	11	the	the	DET
aiti-207	45	12	mpst	mpst	ADJ
aiti-207	45	13	environment	environment	NOUN
aiti-207	45	14	is	be	AUX
aiti-207	45	15	,	,	PUNCT
aiti-207	45	16	,	,	PUNCT
aiti-207	45	17	1	1	X
aiti-207	45	18	,	,	PUNCT
aiti-207	46	1	j	j	PROPN
aiti-207	46	2	t	t	PROPN
aiti-207	46	3	j	j	PROPN
aiti-207	47	1	j	j	PROPN
aiti-207	47	2	t	t	PROPN
aiti-207	47	3	j	j	PROPN
aiti-207	48	1	ty	ty	INTJ
aiti-207	48	2	x	x	PROPN
aiti-207	48	3			PROPN
aiti-207	48	4			X
aiti-207	48	5	(	(	PUNCT
aiti-207	48	6	5	5	NUM
aiti-207	48	7	)	)	PUNCT
aiti-207	48	8	where	where	SCONJ
aiti-207	48	9	𝛽𝑗	𝛽𝑗	NOUN
aiti-207	48	10	denotes	denote	VERB
aiti-207	48	11	the	the	DET
aiti-207	48	12	slope	slope	NOUN
aiti-207	48	13	parameter	parameter	NOUN
aiti-207	48	14	with	with	ADP
aiti-207	48	15	respect	respect	NOUN
aiti-207	48	16	to	to	ADP
aiti-207	48	17	product	product	NOUN
aiti-207	48	18	𝑗	𝑗	NOUN
aiti-207	48	19	and	and	CCONJ
aiti-207	48	20	𝜖𝑗,𝑡	𝜖𝑗,𝑡	PUNCT
aiti-207	48	21	denotes	denote	VERB
aiti-207	48	22	the	the	DET
aiti-207	48	23	process	process	NOUN
aiti-207	48	24	disturbance	disturbance	NOUN
aiti-207	48	25	.	.	PUNCT
aiti-207	49	1	denote	denote	VERB
aiti-207	49	2	𝛽𝑗	𝛽𝑗	NOUN
aiti-207	49	3	=	=	PUNCT
aiti-207	49	4	𝛽0𝑓𝐽	𝛽0𝑓𝐽	PROPN
aiti-207	49	5	,	,	PUNCT
aiti-207	49	6	where	where	SCONJ
aiti-207	49	7	𝛽0	𝛽0	PROPN
aiti-207	49	8	denotes	denote	VERB
aiti-207	49	9	the	the	DET
aiti-207	49	10	nominal	nominal	ADJ
aiti-207	49	11	tool	tool	NOUN
aiti-207	49	12	effect	effect	NOUN
aiti-207	49	13	parameter	parameter	NOUN
aiti-207	49	14	and	and	CCONJ
aiti-207	49	15	𝑓𝑗	𝑓𝑗	ADJ
aiti-207	49	16	denotes	denote	NOUN
aiti-207	49	17	the	the	DET
aiti-207	49	18	nominal	nominal	ADJ
aiti-207	49	19	product	product	NOUN
aiti-207	49	20	effect	effect	NOUN
aiti-207	49	21	for	for	ADP
aiti-207	49	22	product	product	NOUN
aiti-207	49	23	𝑗	𝑗	INTJ
aiti-207	49	24	about	about	ADP
aiti-207	49	25	the	the	DET
aiti-207	49	26	reference	reference	NOUN
aiti-207	49	27	product	product	NOUN
aiti-207	49	28	.	.	PUNCT
aiti-207	50	1	moreover	moreover	ADV
aiti-207	50	2	,	,	PUNCT
aiti-207	50	3	we	we	PRON
aiti-207	50	4	take	take	VERB
aiti-207	50	5	the	the	DET
aiti-207	50	6	contrast	contrast	NOUN
aiti-207	50	7	𝑓1	𝑓1	PROPN
aiti-207	50	8	=	=	SYM
aiti-207	50	9	1	1	NUM
aiti-207	50	10	for	for	ADP
aiti-207	50	11	identifiability	identifiability	NOUN
aiti-207	50	12	.	.	PUNCT
aiti-207	51	1	denote	denote	VERB
aiti-207	51	2	𝑏𝑗,0	𝑏𝑗,0	PROPN
aiti-207	51	3	as	as	ADP
aiti-207	51	4	the	the	DET
aiti-207	51	5	initial	initial	ADJ
aiti-207	51	6	estimate	estimate	NOUN
aiti-207	51	7	of	of	ADP
aiti-207	51	8	𝛽𝑗	𝛽𝑗	PRON
aiti-207	51	9	,	,	PUNCT
aiti-207	51	10	𝑗	𝑗	NOUN
aiti-207	51	11	=	=	SYM
aiti-207	51	12	1	1	NUM
aiti-207	51	13	,	,	PUNCT
aiti-207	51	14	⋯	⋯	PROPN
aiti-207	51	15	,	,	PUNCT
aiti-207	51	16	j	j	PROPN
aiti-207	51	17	then	then	ADV
aiti-207	51	18	𝑏1,0	𝑏1,0	PROPN
aiti-207	51	19	is	be	AUX
aiti-207	51	20	also	also	ADV
aiti-207	51	21	the	the	DET
aiti-207	51	22	estimate	estimate	NOUN
aiti-207	51	23	of	of	ADP
aiti-207	51	24	𝛽0	𝛽0	NOUN
aiti-207	51	25	and	and	CCONJ
aiti-207	51	26	the	the	DET
aiti-207	51	27	estimates	estimate	NOUN
aiti-207	51	28	of	of	ADP
aiti-207	51	29	the	the	DET
aiti-207	51	30	nominal	nominal	ADJ
aiti-207	51	31	product	product	NOUN
aiti-207	51	32	effects	effect	NOUN
aiti-207	51	33	are	be	AUX
aiti-207	51	34	𝑓𝑗	𝑓𝑗	ADJ
aiti-207	51	35	=	=	PUNCT
aiti-207	51	36	𝑏𝑗,0	𝑏𝑗,0	PROPN
aiti-207	51	37	𝑏1,0	𝑏1,0	PROPN
aiti-207	51	38	.	.	PUNCT
aiti-207	52	1	hence	hence	ADV
aiti-207	52	2	,	,	PUNCT
aiti-207	52	3	the	the	DET
aiti-207	52	4	initial	initial	ADJ
aiti-207	52	5	prediction	prediction	NOUN
aiti-207	52	6	model	model	NOUN
aiti-207	52	7	can	can	AUX
aiti-207	52	8	be	be	AUX
aiti-207	52	9	expressed	express	VERB
aiti-207	52	10	as	as	SCONJ
aiti-207	52	11	follows	follow	VERB
aiti-207	52	12	:	:	PUNCT
aiti-207	52	13			PROPN
aiti-207	52	14			PROPN
aiti-207	52	15	,	,	PUNCT
aiti-207	52	16	,	,	PUNCT
aiti-207	52	17	1	1	NUM
aiti-207	52	18	0	0	NUM
aiti-207	52	19	,	,	PUNCT
aiti-207	52	20	1	1	NUM
aiti-207	52	21	ˆ|j	ˆ|j	NOUN
aiti-207	53	1	t	t	PROPN
aiti-207	53	2	j	j	PROPN
aiti-207	53	3	t	t	PROPN
aiti-207	53	4	j	j	PROPN
aiti-207	53	5	j	j	PROPN
aiti-207	53	6	te	te	PROPN
aiti-207	53	7	y	y	PROPN
aiti-207	53	8	x	x	SYM
aiti-207	53	9	b	b	PROPN
aiti-207	53	10	f	f	PROPN
aiti-207	53	11	x	x	PROPN
aiti-207	53	12			PROPN
aiti-207	53	13	(	(	PUNCT
aiti-207	53	14	6	6	NUM
aiti-207	53	15	)	)	PUNCT
aiti-207	53	16	for	for	ADP
aiti-207	53	17	the	the	DET
aiti-207	53	18	current	current	ADJ
aiti-207	53	19	active	active	ADJ
aiti-207	53	20	product	product	NOUN
aiti-207	53	21	𝑗	𝑗	PROPN
aiti-207	53	22	,	,	PUNCT
aiti-207	53	23	its	its	PRON
aiti-207	53	24	recipe	recipe	NOUN
aiti-207	53	25	can	can	AUX
aiti-207	53	26	be	be	AUX
aiti-207	53	27	adjusted	adjust	VERB
aiti-207	53	28	by	by	ADP
aiti-207	53	29	,	,	PUNCT
aiti-207	53	30	,	,	PUNCT
aiti-207	53	31	0	0	NUM
aiti-207	53	32	,	,	PUNCT
aiti-207	53	33	ˆ	ˆ	PROPN
aiti-207	53	34	t	t	PROPN
aiti-207	54	1	j	j	PROPN
aiti-207	54	2	t	t	PROPN
aiti-207	54	3	j	j	PROPN
aiti-207	54	4	t	t	PROPN
aiti-207	54	5	j	j	PROPN
aiti-207	55	1	a	a	DET
aiti-207	55	2	x	x	X
aiti-207	55	3	b	b	X
aiti-207	55	4	f	f	PROPN
aiti-207	55	5			PROPN
aiti-207	55	6			PROPN
aiti-207	55	7			PROPN
aiti-207	55	8	(	(	PUNCT
aiti-207	55	9	7	7	NUM
aiti-207	55	10	)	)	PUNCT
aiti-207	55	11	where	where	SCONJ
aiti-207	55	12	𝑎𝑗,𝑡	𝑎𝑗,𝑡	PUNCT
aiti-207	55	13	=	=	SYM
aiti-207	55	14	𝑎𝑗,𝑡−1	𝑎𝑗,𝑡−1	VERB
aiti-207	55	15	+	+	NUM
aiti-207	55	16	𝜔	𝜔	X
aiti-207	55	17	(	(	PUNCT
aiti-207	55	18	𝑦𝑗,𝑡	𝑦𝑗,𝑡	PUNCT
aiti-207	55	19	−	−	PRON
aiti-207	55	20	𝜏𝑡	𝜏𝑡	PROPN
aiti-207	55	21	)	)	PUNCT
aiti-207	55	22	is	be	AUX
aiti-207	55	23	the	the	DET
aiti-207	55	24	formal	formal	ADJ
aiti-207	55	25	ewma	ewma	NOUN
aiti-207	55	26	formula	formula	NOUN
aiti-207	55	27	,	,	PUNCT
aiti-207	55	28	but	but	CCONJ
aiti-207	55	29	for	for	ADP
aiti-207	55	30	the	the	DET
aiti-207	55	31	inactive	inactive	ADJ
aiti-207	55	32	products	product	NOUN
aiti-207	55	33	𝑗′	𝑗′	NOUN
aiti-207	55	34	≠	≠	PROPN
aiti-207	55	35	𝑗.	𝑗.	NOUN
aiti-207	55	36	we	we	PRON
aiti-207	55	37	propose	propose	VERB
aiti-207	55	38	the	the	DET
aiti-207	55	39	concurrent	concurrent	ADJ
aiti-207	55	40	adjustment	adjustment	NOUN
aiti-207	55	41	'	'	PUNCT
aiti-207	55	42	,	,	PUNCT
aiti-207	55	43	'	'	PUNCT
aiti-207	55	44	,	,	PUNCT
aiti-207	55	45	1j	1j	NUM
aiti-207	55	46	t	t	PROPN
aiti-207	55	47	j	j	PROPN
aiti-207	55	48	t	t	PROPN
aiti-207	55	49	ta	ta	PROPN
aiti-207	55	50	a	a	DET
aiti-207	55	51	c	c	PROPN
aiti-207	55	52			X
aiti-207	55	53	(	(	PUNCT
aiti-207	55	54	8)	8)	NUM
aiti-207	55	55	where𝑐𝑡	where𝑐𝑡	NOUN
aiti-207	55	56	=	=	SYM
aiti-207	55	57	𝜔	𝜔	X
aiti-207	55	58	(	(	PUNCT
aiti-207	55	59	𝑦𝑗,𝑡	𝑦𝑗,𝑡	PUNCT
aiti-207	55	60	−	−	PRON
aiti-207	55	61	𝜏𝑡	𝜏𝑡	PROPN
aiti-207	55	62	)	)	PUNCT
aiti-207	55	63	and𝜗denotes	and𝜗denote	VERB
aiti-207	55	64	the	the	DET
aiti-207	55	65	concurrent	concurrent	ADJ
aiti-207	55	66	factor	factor	NOUN
aiti-207	55	67	.	.	PUNCT
aiti-207	56	1	3	3	X
aiti-207	56	2	.	.	NOUN
aiti-207	56	3	results	result	NOUN
aiti-207	56	4	and	and	CCONJ
aiti-207	56	5	discussion	discussion	VERB
aiti-207	56	6	the	the	DET
aiti-207	56	7	offset	offset	NOUN
aiti-207	56	8	of	of	ADP
aiti-207	56	9	the	the	DET
aiti-207	56	10	process	process	NOUN
aiti-207	56	11	output	output	NOUN
aiti-207	56	12	can	can	AUX
aiti-207	56	13	be	be	AUX
aiti-207	56	14	expressed	express	VERB
aiti-207	56	15	by	by	ADP
aiti-207	56	16			NOUN
aiti-207	56	17			PROPN
aiti-207	56	18			NOUN
aiti-207	56	19			PUNCT
aiti-207	56	20			NOUN
aiti-207	56	21			PUNCT
aiti-207	56	22	1	1	NUM
aiti-207	56	23	1	1	NUM
aiti-207	56	24	0,2	0,2	NUM
aiti-207	56	25	,	,	PUNCT
aiti-207	56	26	,	,	PUNCT
aiti-207	56	27	1	1	NUM
aiti-207	56	28	,	,	PUNCT
aiti-207	56	29	2	2	NUM
aiti-207	56	30	0	0	NUM
aiti-207	56	31	,	,	PUNCT
aiti-207	56	32	0	0	NUM
aiti-207	56	33	,	,	PUNCT
aiti-207	56	34	,	,	PUNCT
aiti-207	56	35	,	,	PUNCT
aiti-207	56	36	0	0	NUM
aiti-207	56	37	,	,	PUNCT
aiti-207	56	38	,	,	PUNCT
aiti-207	56	39	1	1	NUM
aiti-207	56	40	1	1	NUM
aiti-207	56	41	1	1	NUM
aiti-207	56	42	j	j	PROPN
aiti-207	56	43	j	j	PROPN
aiti-207	56	44	l	l	PROPN
aiti-207	56	45	l	l	X
aiti-207	57	1	j	j	PROPN
aiti-207	57	2	l	l	X
aiti-207	57	3	j	j	PROPN
aiti-207	58	1	l	l	X
aiti-207	58	2	j	j	PROPN
aiti-207	59	1	l	l	X
aiti-207	59	2	j	j	PROPN
aiti-207	60	1	j	j	PROPN
aiti-207	60	2	t	t	PROPN
aiti-207	60	3	j	j	PROPN
aiti-207	60	4	j	j	PROPN
aiti-207	60	5	lj	lj	PROPN
aiti-207	60	6	t	t	PROPN
aiti-207	60	7	h	h	NOUN
aiti-207	60	8	h	h	PROPN
aiti-207	61	1	j	j	PROPN
aiti-207	61	2	j	j	PROPN
aiti-207	61	3	h	h	PROPN
aiti-207	62	1	j	j	PROPN
aiti-207	62	2	l	l	PROPN
aiti-207	62	3	j	j	PROPN
aiti-207	63	1	t	t	PROPN
aiti-207	63	2	j	j	PROPN
aiti-207	63	3	h	h	PROPN
aiti-207	64	1	j	j	PROPN
aiti-207	64	2	t	t	PROPN
aiti-207	64	3	h	h	NOUN
aiti-207	65	1	y	y	PROPN
aiti-207	65	2	y	y	PROPN
aiti-207	65	3	c	c	PROPN
aiti-207	65	4	b	b	PROPN
aiti-207	65	5	c	c	PROPN
aiti-207	65	6	b	b	PROPN
aiti-207	65	7	b	b	PROPN
aiti-207	65	8	b	b	PROPN
aiti-207	65	9			ADV
aiti-207	65	10			NOUN
aiti-207	65	11			NOUN
aiti-207	65	12			NOUN
aiti-207	65	13			NOUN
aiti-207	65	14			ADV
aiti-207	65	15			NOUN
aiti-207	65	16			PROPN
aiti-207	65	17			NOUN
aiti-207	65	18			PUNCT
aiti-207	65	19			PROPN
aiti-207	65	20			PROPN
aiti-207	65	21			PROPN
aiti-207	65	22			PROPN
aiti-207	65	23			PROPN
aiti-207	65	24			PROPN
aiti-207	65	25			PROPN
aiti-207	65	26			PROPN
aiti-207	65	27			VERB
aiti-207	65	28			PROPN
aiti-207	65	29			PRON
aiti-207	65	30			ADJ
aiti-207	65	31			X
aiti-207	65	32	(	(	PUNCT
aiti-207	65	33	9	9	NUM
aiti-207	65	34	)	)	PUNCT
aiti-207	65	35	where	where	SCONJ
aiti-207	65	36	𝑙	𝑙	PROPN
aiti-207	65	37	denotes	denote	VERB
aiti-207	65	38	the	the	DET
aiti-207	65	39	series	series	NOUN
aiti-207	65	40	index	index	NOUN
aiti-207	65	41	of	of	ADP
aiti-207	65	42	product	product	NOUN
aiti-207	65	43	𝑗	𝑗	PROPN
aiti-207	65	44	,	,	PUNCT
aiti-207	65	45	advances	advance	NOUN
aiti-207	65	46	in	in	ADP
aiti-207	65	47	technology	technology	NOUN
aiti-207	65	48	innovation	innovation	NOUN
aiti-207	65	49	,	,	PUNCT
aiti-207	65	50	vol	vol	NOUN
aiti-207	65	51	.	.	PROPN
aiti-207	65	52	2	2	NUM
aiti-207	65	53	,	,	PUNCT
aiti-207	65	54	no	no	INTJ
aiti-207	65	55	.	.	NOUN
aiti-207	65	56	1	1	NUM
aiti-207	65	57	,	,	PUNCT
aiti-207	65	58	2017	2017	NUM
aiti-207	65	59	,	,	PUNCT
aiti-207	65	60	pp	pp	ADJ
aiti-207	65	61	.	.	PUNCT
aiti-207	66	1	25	25	NUM
aiti-207	66	2	28	28	NUM
aiti-207	66	3	27	27	NUM
aiti-207	66	4	copyright	copyright	NOUN
aiti-207	66	5	©	©	ADP
aiti-207	66	6	taeti	taeti	NOUN
aiti-207	66	7	∅𝑗	∅𝑗	VERB
aiti-207	66	8	=	=	PUNCT
aiti-207	66	9	(	(	PUNCT
aiti-207	66	10	1	1	NUM
aiti-207	66	11	−	−	PRON
aiti-207	66	12	𝜔𝛽0,𝑗	𝜔𝛽0,𝑗	PROPN
aiti-207	66	13	𝑏0,𝑗	𝑏0,𝑗	PROPN
aiti-207	66	14	)	)	PUNCT
aiti-207	66	15	denote	denote	VERB
aiti-207	66	16	the	the	DET
aiti-207	66	17	stable	stable	ADJ
aiti-207	66	18	factors	factor	NOUN
aiti-207	66	19	,	,	PUNCT
aiti-207	66	20	𝐶𝑗,𝑙	𝐶𝑗,𝑙	PROPN
aiti-207	66	21	=	=	PRON
aiti-207	66	22	∑	∑	PUNCT
aiti-207	66	23	𝑐𝑖	𝑐𝑖	PROPN
aiti-207	66	24	𝑡−1	𝑡−1	PROPN
aiti-207	66	25	𝑖=𝑡−ℎ𝑙	𝑖=𝑡−ℎ𝑙	PROPN
aiti-207	67	1	𝑗	𝑗	INTJ
aiti-207	67	2	denotes	denote	VERB
aiti-207	67	3	the	the	DET
aiti-207	67	4	cumulative	cumulative	ADJ
aiti-207	67	5	deviation	deviation	NOUN
aiti-207	67	6	from	from	ADP
aiti-207	67	7	target	target	NOUN
aiti-207	67	8	and	and	CCONJ
aiti-207	67	9	𝐵	𝐵	NOUN
aiti-207	67	10	denotes	denote	VERB
aiti-207	67	11	the	the	DET
aiti-207	67	12	backward	backward	ADJ
aiti-207	67	13	operator	operator	NOUN
aiti-207	67	14	.	.	PUNCT
aiti-207	68	1	when	when	SCONJ
aiti-207	68	2	the	the	DET
aiti-207	68	3	process	process	NOUN
aiti-207	68	4	disturbances	disturbance	NOUN
aiti-207	68	5	is	be	AUX
aiti-207	68	6	an	an	DET
aiti-207	68	7	i	i	NOUN
aiti-207	68	8	m	m	PROPN
aiti-207	68	9	a	a	PRON
aiti-207	68	10	(	(	PUNCT
aiti-207	68	11	1	1	NUM
aiti-207	68	12	,	,	PUNCT
aiti-207	68	13	1	1	NUM
aiti-207	68	14	)	)	PUNCT
aiti-207	68	15	,	,	PUNCT
aiti-207	68	16	or	or	CCONJ
aiti-207	68	17	a	a	DET
aiti-207	68	18	arma	arma	NOUN
aiti-207	68	19	(	(	PUNCT
aiti-207	68	20	p	p	X
aiti-207	68	21	,	,	PUNCT
aiti-207	68	22	q	q	NOUN
aiti-207	68	23	)	)	PUNCT
aiti-207	68	24	,	,	PUNCT
aiti-207	68	25	the	the	DET
aiti-207	68	26	variance	variance	NOUN
aiti-207	68	27	of	of	ADP
aiti-207	68	28	the	the	DET
aiti-207	68	29	process	process	NOUN
aiti-207	68	30	output	output	NOUN
aiti-207	68	31	is	be	AUX
aiti-207	68	32	bounded	bound	VERB
aiti-207	68	33	if	if	SCONJ
aiti-207	68	34	|∅𝑗|	|∅𝑗|	NOUN
aiti-207	68	35	is	be	AUX
aiti-207	68	36	smaller	small	ADJ
aiti-207	68	37	than	than	ADP
aiti-207	68	38	1	1	NUM
aiti-207	68	39	for	for	ADP
aiti-207	68	40	all	all	DET
aiti-207	68	41	𝑗.	𝑗.	NOUN
aiti-207	68	42	according	accord	VERB
aiti-207	68	43	to	to	ADP
aiti-207	68	44	several	several	ADJ
aiti-207	68	45	simulations	simulation	NOUN
aiti-207	68	46	in	in	ADP
aiti-207	68	47	different	different	ADJ
aiti-207	68	48	conditions	condition	NOUN
aiti-207	68	49	of	of	ADP
aiti-207	68	50	the	the	DET
aiti-207	68	51	production	production	NOUN
aiti-207	68	52	environment	environment	NOUN
aiti-207	68	53	,	,	PUNCT
aiti-207	68	54	𝜔	𝜔	AUX
aiti-207	68	55	=	=	SYM
aiti-207	68	56	0.2	0.2	NUM
aiti-207	68	57	and	and	CCONJ
aiti-207	68	58	𝜗	𝜗	NOUN
aiti-207	68	59	=	=	SYM
aiti-207	68	60	1.0	1.0	NUM
aiti-207	68	61	are	be	AUX
aiti-207	68	62	suggested	suggest	VERB
aiti-207	68	63	.	.	PUNCT
aiti-207	69	1	the	the	DET
aiti-207	69	2	performance	performance	NOUN
aiti-207	69	3	of	of	ADP
aiti-207	69	4	the	the	DET
aiti-207	69	5	proposed	propose	VERB
aiti-207	69	6	method	method	NOUN
aiti-207	69	7	was	be	AUX
aiti-207	69	8	evaluated	evaluate	VERB
aiti-207	69	9	based	base	VERB
aiti-207	69	10	on	on	ADP
aiti-207	69	11	the	the	DET
aiti-207	69	12	criteria	criterion	NOUN
aiti-207	69	13	of	of	ADP
aiti-207	69	14	the	the	DET
aiti-207	69	15	relative	relative	ADJ
aiti-207	69	16	efficiency	efficiency	NOUN
aiti-207	69	17	,	,	PUNCT
aiti-207	69	18	the	the	DET
aiti-207	69	19	ratio	ratio	NOUN
aiti-207	69	20	of	of	ADP
aiti-207	69	21	mean	mean	ADJ
aiti-207	69	22	square	square	ADJ
aiti-207	69	23	errors	error	NOUN
aiti-207	69	24	of	of	ADP
aiti-207	69	25	the	the	DET
aiti-207	69	26	proposed	propose	VERB
aiti-207	69	27	method	method	NOUN
aiti-207	69	28	to	to	ADP
aiti-207	69	29	that	that	PRON
aiti-207	69	30	of	of	ADP
aiti-207	69	31	the	the	DET
aiti-207	69	32	threaded	thread	VERB
aiti-207	69	33	ewma	ewma	NOUN
aiti-207	69	34	controller	controller	NOUN
aiti-207	69	35	under	under	ADP
aiti-207	69	36	the	the	DET
aiti-207	69	37	same	same	ADJ
aiti-207	69	38	conditions	condition	NOUN
aiti-207	69	39	.	.	PUNCT
aiti-207	70	1	fig	fig	NOUN
aiti-207	70	2	.	.	PUNCT
aiti-207	71	1	1	1	NUM
aiti-207	71	2	shows	show	VERB
aiti-207	71	3	the	the	DET
aiti-207	71	4	results	result	NOUN
aiti-207	71	5	of	of	ADP
aiti-207	71	6	the	the	DET
aiti-207	71	7	relative	relative	ADJ
aiti-207	71	8	efficiency	efficiency	NOUN
aiti-207	71	9	comparisons	comparison	NOUN
aiti-207	71	10	no	no	ADV
aiti-207	71	11	matter	matter	ADV
aiti-207	71	12	what	what	DET
aiti-207	71	13	product	product	NOUN
aiti-207	71	14	scheduling	scheduling	NOUN
aiti-207	71	15	(	(	PUNCT
aiti-207	71	16	random	random	ADJ
aiti-207	71	17	or	or	CCONJ
aiti-207	71	18	concentration	concentration	NOUN
aiti-207	71	19	)	)	PUNCT
aiti-207	71	20	is	be	AUX
aiti-207	71	21	,	,	PUNCT
aiti-207	71	22	what	what	PRON
aiti-207	71	23	the	the	DET
aiti-207	71	24	number	number	NOUN
aiti-207	71	25	of	of	ADP
aiti-207	71	26	product	product	NOUN
aiti-207	71	27	types	type	NOUN
aiti-207	71	28	(	(	PUNCT
aiti-207	71	29	2	2	NUM
aiti-207	71	30	or	or	CCONJ
aiti-207	71	31	4	4	NUM
aiti-207	71	32	)	)	PUNCT
aiti-207	71	33	is	be	AUX
aiti-207	71	34	and	and	CCONJ
aiti-207	71	35	what	what	PRON
aiti-207	71	36	the	the	DET
aiti-207	71	37	magnitude	magnitude	NOUN
aiti-207	71	38	of	of	ADP
aiti-207	71	39	slope	slope	NOUN
aiti-207	71	40	shift	shift	NOUN
aiti-207	71	41	is	be	AUX
aiti-207	71	42	,	,	PUNCT
aiti-207	71	43	fig	fig	NOUN
aiti-207	71	44	.	.	PUNCT
aiti-207	71	45	1	1	NUM
aiti-207	71	46	explicitly	explicitly	ADV
aiti-207	71	47	shows	show	VERB
aiti-207	71	48	the	the	DET
aiti-207	71	49	proposed	propose	VERB
aiti-207	71	50	method	method	NOUN
aiti-207	71	51	is	be	AUX
aiti-207	71	52	better	well	ADJ
aiti-207	71	53	than	than	ADP
aiti-207	71	54	the	the	DET
aiti-207	71	55	threaded	thread	VERB
aiti-207	71	56	ewma	ewma	NOUN
aiti-207	71	57	controller	controller	PROPN
aiti-207	71	58	.	.	PUNCT
aiti-207	72	1	fig	fig	NOUN
aiti-207	72	2	.	.	PUNCT
aiti-207	73	1	1	1	NUM
aiti-207	74	1	the	the	DET
aiti-207	74	2	relative	relative	ADJ
aiti-207	74	3	efficiency	efficiency	NOUN
aiti-207	74	4	of	of	ADP
aiti-207	74	5	the	the	DET
aiti-207	74	6	ewma	ewma	NOUN
aiti-207	74	7	controller	controller	NOUN
aiti-207	74	8	with	with	ADP
aiti-207	74	9	concurrent	concurrent	ADJ
aiti-207	74	10	adjustment	adjustment	NOUN
aiti-207	74	11	with	with	ADP
aiti-207	74	12	respect	respect	NOUN
aiti-207	74	13	to	to	ADP
aiti-207	74	14	the	the	DET
aiti-207	74	15	threaded	thread	VERB
aiti-207	74	16	ewma	ewma	NOUN
aiti-207	74	17	controller	controller	NOUN
aiti-207	74	18	4	4	NUM
aiti-207	74	19	.	.	PUNCT
aiti-207	74	20	conclusions	conclusion	NOUN
aiti-207	74	21	in	in	ADP
aiti-207	74	22	this	this	DET
aiti-207	74	23	paper	paper	NOUN
aiti-207	74	24	,	,	PUNCT
aiti-207	74	25	the	the	DET
aiti-207	74	26	ewma	ewma	NOUN
aiti-207	74	27	with	with	ADP
aiti-207	74	28	concurrent	concurrent	ADJ
aiti-207	74	29	adjustment	adjustment	NOUN
aiti-207	74	30	algorithm	algorithm	NOUN
aiti-207	74	31	control	control	NOUN
aiti-207	74	32	was	be	AUX
aiti-207	74	33	proposed	propose	VERB
aiti-207	74	34	for	for	ADP
aiti-207	74	35	a	a	DET
aiti-207	74	36	multiple	multiple	ADJ
aiti-207	74	37	products	product	NOUN
aiti-207	74	38	process	process	NOUN
aiti-207	74	39	.	.	PUNCT
aiti-207	75	1	the	the	DET
aiti-207	75	2	exact	exact	ADJ
aiti-207	75	3	expression	expression	NOUN
aiti-207	75	4	of	of	ADP
aiti-207	75	5	the	the	DET
aiti-207	75	6	process	process	NOUN
aiti-207	75	7	output	output	NOUN
aiti-207	75	8	of	of	ADP
aiti-207	75	9	the	the	DET
aiti-207	75	10	proposed	propose	VERB
aiti-207	75	11	control	control	NOUN
aiti-207	75	12	algorithm	algorithm	NOUN
aiti-207	75	13	is	be	AUX
aiti-207	75	14	derived	derive	VERB
aiti-207	75	15	.	.	PUNCT
aiti-207	76	1	hence	hence	ADV
aiti-207	76	2	,	,	PUNCT
aiti-207	76	3	its	its	PRON
aiti-207	76	4	stability	stability	NOUN
aiti-207	76	5	conditions	condition	NOUN
aiti-207	76	6	can	can	AUX
aiti-207	76	7	be	be	AUX
aiti-207	76	8	obtained	obtain	VERB
aiti-207	76	9	.	.	PUNCT
aiti-207	77	1	based	base	VERB
aiti-207	77	2	on	on	ADP
aiti-207	77	3	several	several	ADJ
aiti-207	77	4	numerical	numerical	ADJ
aiti-207	77	5	simulations,𝜔	simulations,𝜔	PROPN
aiti-207	77	6	=	=	PROPN
aiti-207	77	7	0.2	0.2	NUM
aiti-207	77	8	and	and	CCONJ
aiti-207	77	9	𝜗	𝜗	NOUN
aiti-207	77	10	=	=	SYM
aiti-207	77	11	1.0	1.0	NUM
aiti-207	77	12	are	be	AUX
aiti-207	77	13	suggested	suggest	VERB
aiti-207	77	14	for	for	ADP
aiti-207	77	15	the	the	DET
aiti-207	77	16	discount	discount	NOUN
aiti-207	77	17	factor	factor	NOUN
aiti-207	77	18	of	of	ADP
aiti-207	77	19	ewma	ewma	NOUN
aiti-207	77	20	controller	controller	NOUN
aiti-207	77	21	and	and	CCONJ
aiti-207	77	22	concurrent	concurrent	ADJ
aiti-207	77	23	factor	factor	NOUN
aiti-207	77	24	when	when	SCONJ
aiti-207	77	25	the	the	DET
aiti-207	77	26	process	process	NOUN
aiti-207	77	27	disturbances	disturbance	NOUN
aiti-207	77	28	are	be	AUX
aiti-207	77	29	a	a	DET
aiti-207	77	30	white	white	ADJ
aiti-207	77	31	noise	noise	NOUN
aiti-207	77	32	series	series	PROPN
aiti-207	77	33	.	.	PUNCT
aiti-207	78	1	compare	compare	VERB
aiti-207	78	2	to	to	ADP
aiti-207	78	3	the	the	DET
aiti-207	78	4	threaded	thread	VERB
aiti-207	78	5	ewma	ewma	NOUN
aiti-207	78	6	controller	controller	NOUN
aiti-207	78	7	in	in	ADP
aiti-207	78	8	different	different	ADJ
aiti-207	78	9	production	production	NOUN
aiti-207	78	10	scheduling	scheduling	NOUN
aiti-207	78	11	,	,	PUNCT
aiti-207	78	12	the	the	DET
aiti-207	78	13	advantage	advantage	NOUN
aiti-207	78	14	of	of	ADP
aiti-207	78	15	the	the	DET
aiti-207	78	16	ewma	ewma	NOUN
aiti-207	78	17	with	with	ADP
aiti-207	78	18	concurrent	concurrent	ADJ
aiti-207	78	19	adjustment	adjustment	NOUN
aiti-207	78	20	is	be	AUX
aiti-207	78	21	increasing	increase	VERB
aiti-207	78	22	in	in	ADP
aiti-207	78	23	terms	term	NOUN
aiti-207	78	24	of	of	ADP
aiti-207	78	25	the	the	DET
aiti-207	78	26	magnitude	magnitude	NOUN
aiti-207	78	27	of	of	ADP
aiti-207	78	28	the	the	DET
aiti-207	78	29	slope	slope	NOUN
aiti-207	78	30	shift	shift	NOUN
aiti-207	78	31	.	.	PUNCT
aiti-207	79	1	moreover	moreover	ADV
aiti-207	79	2	,	,	PUNCT
aiti-207	79	3	the	the	PRON
aiti-207	79	4	larger	large	ADJ
aiti-207	79	5	the	the	DET
aiti-207	79	6	number	number	NOUN
aiti-207	79	7	of	of	ADP
aiti-207	79	8	product	product	NOUN
aiti-207	79	9	types	type	NOUN
aiti-207	79	10	,	,	PUNCT
aiti-207	79	11	the	the	PRON
aiti-207	79	12	bigger	big	ADJ
aiti-207	79	13	the	the	DET
aiti-207	79	14	advantage	advantage	NOUN
aiti-207	79	15	.	.	PUNCT
aiti-207	80	1	acknowledgement	acknowledgement	NOUN
aiti-207	80	2	the	the	DET
aiti-207	80	3	support	support	NOUN
aiti-207	80	4	of	of	ADP
aiti-207	80	5	the	the	DET
aiti-207	80	6	minister	minister	NOUN
aiti-207	80	7	of	of	ADP
aiti-207	80	8	science	science	NOUN
aiti-207	80	9	and	and	CCONJ
aiti-207	80	10	technology	technology	NOUN
aiti-207	80	11	(	(	PUNCT
aiti-207	80	12	taiwan	taiwan	PROPN
aiti-207	80	13	)	)	PUNCT
aiti-207	80	14	,	,	PUNCT
aiti-207	80	15	under	under	AUX
aiti-207	80	16	grant	grant	VERB
aiti-207	80	17	most	most	ADJ
aiti-207	80	18	104	104	NUM
aiti-207	80	19	-	-	PUNCT
aiti-207	80	20	2221	2221	NUM
aiti-207	80	21	-	-	PUNCT
aiti-207	80	22	e-231	e-231	NOUN
aiti-207	80	23	-	-	PUNCT
aiti-207	80	24	005	005	NUM
aiti-207	80	25	is	be	AUX
aiti-207	80	26	gratefully	gratefully	ADV
aiti-207	80	27	acknowledged	acknowledge	VERB
aiti-207	80	28	.	.	PUNCT
aiti-207	81	1	references	reference	NOUN
aiti-207	81	2	[	[	X
aiti-207	81	3	1	1	NUM
aiti-207	81	4	]	]	PUNCT
aiti-207	81	5	a.	a.	NOUN
aiti-207	81	6	ingolfsson	ingolfsson	NOUN
aiti-207	81	7	a	a	PRON
aiti-207	81	8	and	and	CCONJ
aiti-207	81	9	e.	e.	PROPN
aiti-207	81	10	sachs	sachs	PROPN
aiti-207	81	11	,	,	PUNCT
aiti-207	81	12	“	"	PUNCT
aiti-207	81	13	stability	stability	NOUN
aiti-207	81	14	and	and	CCONJ
aiti-207	81	15	sensitivity	sensitivity	NOUN
aiti-207	81	16	of	of	ADP
aiti-207	81	17	an	an	DET
aiti-207	81	18	ewma	ewma	NOUN
aiti-207	81	19	controller	controller	NOUN
aiti-207	81	20	,	,	PUNCT
aiti-207	81	21	”	"	PUNCT
aiti-207	81	22	journal	journal	NOUN
aiti-207	81	23	of	of	ADP
aiti-207	81	24	quality	quality	NOUN
aiti-207	81	25	technology	technology	NOUN
aiti-207	81	26	,	,	PUNCT
aiti-207	81	27	vol	vol	NOUN
aiti-207	81	28	.	.	PROPN
aiti-207	81	29	25	25	NUM
aiti-207	81	30	,	,	PUNCT
aiti-207	81	31	pp	pp	ADJ
aiti-207	81	32	.	.	PUNCT
aiti-207	82	1	271	271	NUM
aiti-207	82	2	-	-	SYM
aiti-207	82	3	287	287	NUM
aiti-207	82	4	,	,	PUNCT
aiti-207	82	5	1993	1993	NUM
aiti-207	82	6	.	.	PUNCT
aiti-207	83	1	[	[	X
aiti-207	83	2	2	2	X
aiti-207	83	3	]	]	PUNCT
aiti-207	83	4	e.	e.	PROPN
aiti-207	83	5	sachs	sachs	PROPN
aiti-207	83	6	,	,	PUNCT
aiti-207	83	7	a.	a.	PROPN
aiti-207	83	8	hu	hu	PROPN
aiti-207	83	9	,	,	PUNCT
aiti-207	83	10	and	and	CCONJ
aiti-207	83	11	e.	e.	PROPN
aiti-207	83	12	ingolfsson	ingolfsson	PROPN
aiti-207	83	13	,	,	PUNCT
aiti-207	83	14	“	"	PUNCT
aiti-207	83	15	run	run	VERB
aiti-207	83	16	by	by	ADP
aiti-207	83	17	run	run	NOUN
aiti-207	83	18	process	process	NOUN
aiti-207	83	19	control	control	NOUN
aiti-207	83	20	:	:	PUNCT
aiti-207	83	21	combining	combine	VERB
aiti-207	83	22	spc	spc	PROPN
aiti-207	83	23	and	and	CCONJ
aiti-207	83	24	feedback	feedback	NOUN
aiti-207	83	25	control	control	NOUN
aiti-207	83	26	,	,	PUNCT
aiti-207	83	27	”	"	PUNCT
aiti-207	83	28	ieee	ieee	NOUN
aiti-207	83	29	transactions	transaction	NOUN
aiti-207	83	30	semiconductor	semiconductor	NOUN
aiti-207	83	31	manufacturing	manufacturing	NOUN
aiti-207	83	32	,	,	PUNCT
aiti-207	83	33	vol	vol	NOUN
aiti-207	83	34	.	.	PROPN
aiti-207	83	35	8	8	NUM
aiti-207	83	36	,	,	PUNCT
aiti-207	83	37	pp	pp	ADJ
aiti-207	83	38	.	.	PUNCT
aiti-207	84	1	26	26	NUM
aiti-207	84	2	-	-	SYM
aiti-207	84	3	43	43	NUM
aiti-207	84	4	,	,	PUNCT
aiti-207	84	5	1995	1995	NUM
aiti-207	84	6	.	.	PUNCT
aiti-207	85	1	[	[	X
aiti-207	85	2	3	3	NUM
aiti-207	85	3	]	]	X
aiti-207	85	4	a.	a.	NOUN
aiti-207	85	5	v.	v.	NOUN
aiti-207	85	6	prabhu	prabhu	PROPN
aiti-207	85	7	and	and	CCONJ
aiti-207	85	8	t.	t.	PROPN
aiti-207	85	9	f.	f.	PROPN
aiti-207	85	10	edgar	edgar	PROPN
aiti-207	85	11	,	,	PUNCT
aiti-207	85	12	“	"	PUNCT
aiti-207	85	13	a	a	DET
aiti-207	85	14	new	new	ADJ
aiti-207	85	15	state	state	NOUN
aiti-207	85	16	estimation	estimation	NOUN
aiti-207	85	17	method	method	NOUN
aiti-207	85	18	for	for	ADP
aiti-207	85	19	high	high	ADJ
aiti-207	85	20	-	-	PUNCT
aiti-207	85	21	mix	mix	NOUN
aiti-207	85	22	semiconductor	semiconductor	NOUN
aiti-207	85	23	manufacturing	manufacturing	NOUN
aiti-207	85	24	processes	process	NOUN
aiti-207	85	25	,	,	PUNCT
aiti-207	85	26	”	"	PUNCT
aiti-207	85	27	journal	journal	NOUN
aiti-207	85	28	of	of	ADP
aiti-207	85	29	process	process	NOUN
aiti-207	85	30	control	control	NOUN
aiti-207	85	31	,	,	PUNCT
aiti-207	85	32	vol	vol	NOUN
aiti-207	85	33	.	.	PROPN
aiti-207	85	34	19	19	NUM
aiti-207	85	35	,	,	PUNCT
aiti-207	85	36	pp	pp	ADJ
aiti-207	85	37	.	.	PUNCT
aiti-207	86	1	1149	1149	NUM
aiti-207	86	2	-	-	SYM
aiti-207	86	3	1161	1161	NUM
aiti-207	86	4	,	,	PUNCT
aiti-207	86	5	2009	2009	NUM
aiti-207	86	6	.	.	PUNCT
aiti-207	87	1	[	[	X
aiti-207	87	2	4	4	X
aiti-207	87	3	]	]	PUNCT
aiti-207	87	4	m.	m.	PROPN
aiti-207	87	5	d.	d.	PROPN
aiti-207	87	6	ma	ma	PROPN
aiti-207	87	7	,	,	PUNCT
aiti-207	87	8	c.	c.	PROPN
aiti-207	87	9	c.	c.	PROPN
aiti-207	87	10	chang	chang	PROPN
aiti-207	87	11	,	,	PUNCT
aiti-207	87	12	d.	d.	PROPN
aiti-207	87	13	s.	s.	PROPN
aiti-207	87	14	h.	h.	PROPN
aiti-207	87	15	wong	wong	PROPN
aiti-207	87	16	,	,	PUNCT
aiti-207	87	17	and	and	CCONJ
aiti-207	87	18	s.	s.	PROPN
aiti-207	87	19	s.	s.	PROPN
aiti-207	87	20	jang	jang	PROPN
aiti-207	87	21	,	,	PUNCT
aiti-207	87	22	“	"	PUNCT
aiti-207	87	23	threaded	thread	VERB
aiti-207	87	24	ewma	ewma	NOUN
aiti-207	87	25	controller	controller	NOUN
aiti-207	87	26	tuning	tuning	NOUN
aiti-207	87	27	and	and	CCONJ
aiti-207	87	28	performance	performance	NOUN
aiti-207	87	29	evaluation	evaluation	NOUN
aiti-207	87	30	in	in	ADP
aiti-207	87	31	a	a	DET
aiti-207	87	32	high	high	ADJ
aiti-207	87	33	-	-	PUNCT
aiti-207	87	34	mixed	mix	VERB
aiti-207	87	35	system	system	NOUN
aiti-207	87	36	,	,	PUNCT
aiti-207	87	37	”	"	PUNCT
aiti-207	87	38	ieee	ieee	NOUN
aiti-207	87	39	transactions	transaction	NOUN
aiti-207	87	40	semiconductor	semiconductor	NOUN
aiti-207	87	41	manufacturing	manufacturing	NOUN
aiti-207	87	42	,	,	PUNCT
aiti-207	87	43	vol	vol	NOUN
aiti-207	87	44	.	.	PROPN
aiti-207	87	45	22	22	NUM
aiti-207	87	46	,	,	PUNCT
aiti-207	87	47	pp	pp	ADJ
aiti-207	87	48	.	.	PUNCT
aiti-207	88	1	1	1	NUM
aiti-207	88	2	-	-	SYM
aiti-207	88	3	5	5	NUM
aiti-207	88	4	,	,	PUNCT
aiti-207	88	5	2009	2009	NUM
aiti-207	88	6	.	.	PUNCT
aiti-207	89	1	[	[	X
aiti-207	89	2	5	5	NUM
aiti-207	89	3	]	]	PUNCT
aiti-207	89	4	a.	a.	NOUN
aiti-207	89	5	j.	j.	PROPN
aiti-207	89	6	pasadyn	pasadyn	PROPN
aiti-207	89	7	and	and	CCONJ
aiti-207	89	8	t.	t.	PROPN
aiti-207	89	9	f.	f.	PROPN
aiti-207	89	10	edga	edga	PROPN
aiti-207	89	11	,	,	PUNCT
aiti-207	89	12	“	"	PUNCT
aiti-207	89	13	observability	observability	NOUN
aiti-207	89	14	and	and	CCONJ
aiti-207	89	15	state	state	NOUN
aiti-207	89	16	estimation	estimation	NOUN
aiti-207	89	17	for	for	ADP
aiti-207	89	18	multiple	multiple	ADJ
aiti-207	89	19	product	product	NOUN
aiti-207	89	20	control	control	NOUN
aiti-207	89	21	in	in	ADP
aiti-207	89	22	semiconductor	semiconductor	NOUN
aiti-207	89	23	manufacturing	manufacturing	NOUN
aiti-207	89	24	,	,	PUNCT
aiti-207	89	25	”	"	PUNCT
aiti-207	89	26	ieee	ieee	NOUN
aiti-207	89	27	transactions	transaction	NOUN
aiti-207	89	28	semiconductor	semiconductor	NOUN
aiti-207	89	29	manufacturing	manufacturing	NOUN
aiti-207	89	30	,	,	PUNCT
aiti-207	89	31	vol	vol	NOUN
aiti-207	89	32	.	.	PROPN
aiti-207	89	33	18	18	NUM
aiti-207	89	34	,	,	PUNCT
aiti-207	89	35	pp	pp	ADJ
aiti-207	89	36	.	.	PUNCT
aiti-207	90	1	592	592	NUM
aiti-207	90	2	-	-	SYM
aiti-207	90	3	604	604	NUM
aiti-207	90	4	,	,	PUNCT
aiti-207	90	5	2005	2005	NUM
aiti-207	90	6	.	.	PUNCT
aiti-207	91	1	[	[	X
aiti-207	91	2	6	6	NUM
aiti-207	91	3	]	]	PUNCT
aiti-207	91	4	s.	s.	PROPN
aiti-207	91	5	p.	p.	PROPN
aiti-207	91	6	lee	lee	PROPN
aiti-207	91	7	,	,	PUNCT
aiti-207	91	8	d.	d.	PROPN
aiti-207	91	9	s.	s.	PROPN
aiti-207	91	10	h.	h.	PROPN
aiti-207	91	11	wong	wong	PROPN
aiti-207	91	12	,	,	PUNCT
aiti-207	91	13	c.	c.	PROPN
aiti-207	91	14	i.	i.	PROPN
aiti-207	91	15	sun	sun	PROPN
aiti-207	91	16	,	,	PUNCT
aiti-207	91	17	w.	w.	PROPN
aiti-207	91	18	h.	h.	PROPN
aiti-207	91	19	chen	chen	PROPN
aiti-207	91	20	,	,	PUNCT
aiti-207	91	21	and	and	CCONJ
aiti-207	91	22	s.	s.	PROPN
aiti-207	91	23	s.	s.	PROPN
aiti-207	91	24	jang	jang	PROPN
aiti-207	91	25	,	,	PUNCT
aiti-207	91	26	“	"	PUNCT
aiti-207	91	27	integrated	integrated	ADJ
aiti-207	91	28	statistical	statistical	ADJ
aiti-207	91	29	process	process	NOUN
aiti-207	91	30	control	control	NOUN
aiti-207	91	31	and	and	CCONJ
aiti-207	91	32	engineering	engineering	NOUN
aiti-207	91	33	process	process	NOUN
aiti-207	91	34	advances	advance	NOUN
aiti-207	91	35	in	in	ADP
aiti-207	91	36	technology	technology	NOUN
aiti-207	91	37	innovation	innovation	NOUN
aiti-207	91	38	,	,	PUNCT
aiti-207	91	39	vol	vol	NOUN
aiti-207	91	40	.	.	PROPN
aiti-207	91	41	2	2	NUM
aiti-207	91	42	,	,	PUNCT
aiti-207	91	43	no	no	INTJ
aiti-207	91	44	.	.	NOUN
aiti-207	91	45	1	1	NUM
aiti-207	91	46	,	,	PUNCT
aiti-207	91	47	2017	2017	NUM
aiti-207	91	48	,	,	PUNCT
aiti-207	91	49	pp	pp	ADJ
aiti-207	91	50	.	.	PUNCT
aiti-207	92	1	25	25	NUM
aiti-207	92	2	28	28	NUM
aiti-207	92	3	28	28	NUM
aiti-207	92	4	copyright	copyright	NOUN
aiti-207	92	5	©	©	PROPN
aiti-207	92	6	taeti	taeti	PROPN
aiti-207	92	7	control	control	VERB
aiti-207	92	8	for	for	ADP
aiti-207	92	9	a	a	DET
aiti-207	92	10	manufacturing	manufacturing	NOUN
aiti-207	92	11	process	process	NOUN
aiti-207	92	12	with	with	ADP
aiti-207	92	13	multiple	multiple	ADJ
aiti-207	92	14	tools	tool	NOUN
aiti-207	92	15	and	and	CCONJ
aiti-207	92	16	multiple	multiple	ADJ
aiti-207	92	17	products	product	NOUN
aiti-207	92	18	,	,	PUNCT
aiti-207	92	19	”	"	PUNCT
aiti-207	92	20	journal	journal	NOUN
aiti-207	92	21	of	of	ADP
aiti-207	92	22	industrial	industrial	ADJ
aiti-207	92	23	and	and	CCONJ
aiti-207	92	24	production	production	NOUN
aiti-207	92	25	engineering	engineering	NOUN
aiti-207	92	26	,	,	PUNCT
aiti-207	92	27	vol	vol	NOUN
aiti-207	92	28	.	.	PROPN
aiti-207	93	1	32	32	NUM
aiti-207	93	2	,	,	PUNCT
aiti-207	93	3	no	no	INTJ
aiti-207	93	4	.	.	NOUN
aiti-207	93	5	3	3	NUM
aiti-207	93	6	,	,	PUNCT
aiti-207	93	7	pp	pp	ADJ
aiti-207	93	8	.	.	PUNCT
aiti-207	94	1	174	174	NUM
aiti-207	94	2	-	-	SYM
aiti-207	94	3	185	185	NUM
aiti-207	94	4	,	,	PUNCT
aiti-207	94	5	2015	2015	NUM
aiti-207	94	6	.	.	PUNCT