id	sid	tid	token	lemma	pos
aiti-272	1	1	advances	advance	NOUN
aiti-272	1	2	in	in	ADP
aiti-272	1	3	technology	technology	NOUN
aiti-272	1	4	innovation	innovation	NOUN
aiti-272	1	5	,	,	PUNCT
aiti-272	1	6	vol	vol	NOUN
aiti-272	1	7	.	.	PROPN
aiti-272	2	1	2	2	NUM
aiti-272	2	2	,	,	PUNCT
aiti-272	2	3	no	no	INTJ
aiti-272	2	4	.	.	NOUN
aiti-272	2	5	2	2	NUM
aiti-272	2	6	,	,	PUNCT
aiti-272	2	7	2017	2017	NUM
aiti-272	2	8	,	,	PUNCT
aiti-272	2	9	pp	pp	ADJ
aiti-272	2	10	.	.	PUNCT
aiti-272	3	1	29	29	NUM
aiti-272	3	2	33	33	NUM
aiti-272	3	3	29	29	NUM
aiti-272	3	4	investigation	investigation	NOUN
aiti-272	3	5	of	of	ADP
aiti-272	3	6	a	a	DET
aiti-272	3	7	ball	ball	NOUN
aiti-272	3	8	screw	screw	NOUN
aiti-272	3	9	feed	feed	NOUN
aiti-272	3	10	drive	drive	NOUN
aiti-272	3	11	system	system	NOUN
aiti-272	3	12	based	base	VERB
aiti-272	3	13	on	on	ADP
aiti-272	3	14	dynamic	dynamic	ADJ
aiti-272	3	15	modeling	modeling	NOUN
aiti-272	3	16	for	for	ADP
aiti-272	3	17	motion	motion	NOUN
aiti-272	3	18	control	control	NOUN
aiti-272	3	19	yi	yi	PROPN
aiti-272	3	20	-	-	PUNCT
aiti-272	3	21	cheng	cheng	PROPN
aiti-272	3	22	huang	huang	PROPN
aiti-272	3	23	*	*	PROPN
aiti-272	3	24	,	,	PUNCT
aiti-272	3	25	xiang	xiang	PROPN
aiti-272	3	26	-	-	PROPN
aiti-272	3	27	yuan	yuan	PROPN
aiti-272	3	28	chen	chen	PROPN
aiti-272	3	29	department	department	PROPN
aiti-272	3	30	of	of	ADP
aiti-272	3	31	mechatronics	mechatronic	NOUN
aiti-272	3	32	engineering	engineering	PROPN
aiti-272	3	33	,	,	PUNCT
aiti-272	3	34	national	national	PROPN
aiti-272	3	35	changhua	changhua	PROPN
aiti-272	3	36	university	university	PROPN
aiti-272	3	37	of	of	ADP
aiti-272	3	38	education	education	PROPN
aiti-272	3	39	,	,	PUNCT
aiti-272	3	40	changhua	changhua	PROPN
aiti-272	3	41	,	,	PUNCT
aiti-272	3	42	taiwan	taiwan	PROPN
aiti-272	3	43	.	.	PUNCT
aiti-272	4	1	received	receive	VERB
aiti-272	4	2	01	01	NUM
aiti-272	4	3	february	february	PROPN
aiti-272	4	4	2016	2016	NUM
aiti-272	4	5	;	;	PUNCT
aiti-272	4	6	received	receive	VERB
aiti-272	4	7	in	in	ADP
aiti-272	4	8	revised	revise	VERB
aiti-272	4	9	form	form	NOUN
aiti-272	4	10	28	28	NUM
aiti-272	4	11	april	april	PROPN
aiti-272	4	12	2016	2016	NUM
aiti-272	4	13	;	;	PUNCT
aiti-272	4	14	accepted	accept	VERB
aiti-272	4	15	02	02	NUM
aiti-272	4	16	may	may	PROPN
aiti-272	4	17	2016	2016	NUM
aiti-272	4	18	abstract	abstract	ADJ
aiti-272	4	19	this	this	DET
aiti-272	4	20	paper	paper	NOUN
aiti-272	4	21	examines	examine	VERB
aiti-272	4	22	the	the	DET
aiti-272	4	23	frequency	frequency	NOUN
aiti-272	4	24	response	response	NOUN
aiti-272	4	25	relationship	relationship	NOUN
aiti-272	4	26	between	between	ADP
aiti-272	4	27	the	the	DET
aiti-272	4	28	ball	ball	NOUN
aiti-272	4	29	screw	screw	VERB
aiti-272	4	30	nut	nut	NOUN
aiti-272	4	31	preload	preload	NOUN
aiti-272	4	32	,	,	PUNCT
aiti-272	4	33	ball	ball	NOUN
aiti-272	4	34	screw	screw	VERB
aiti-272	4	35	torsional	torsional	ADJ
aiti-272	4	36	stiffness	stiffness	ADJ
aiti-272	4	37	variations	variation	NOUN
aiti-272	4	38	and	and	CCONJ
aiti-272	4	39	table	table	NOUN
aiti-272	4	40	mass	mass	ADJ
aiti-272	4	41	effect	effect	NOUN
aiti-272	4	42	for	for	ADP
aiti-272	4	43	a	a	DET
aiti-272	4	44	single	single	ADJ
aiti-272	4	45	-	-	PUNCT
aiti-272	4	46	axis	axis	NOUN
aiti-272	4	47	feed	feed	NOUN
aiti-272	4	48	drive	drive	NOUN
aiti-272	4	49	system	system	NOUN
aiti-272	4	50	.	.	PUNCT
aiti-272	5	1	identificat	identificat	NOUN
aiti-272	5	2	ion	ion	NOUN
aiti-272	5	3	for	for	ADP
aiti-272	5	4	the	the	DET
aiti-272	5	5	frequency	frequency	NOUN
aiti-272	5	6	response	response	NOUN
aiti-272	5	7	of	of	ADP
aiti-272	5	8	an	an	DET
aiti-272	5	9	industrial	industrial	ADJ
aiti-272	5	10	ball	ball	NOUN
aiti-272	5	11	screw	screw	ADJ
aiti-272	5	12	drive	drive	NOUN
aiti-272	5	13	system	system	NOUN
aiti-272	5	14	is	be	AUX
aiti-272	5	15	very	very	ADV
aiti-272	5	16	important	important	ADJ
aiti-272	5	17	for	for	ADP
aiti-272	5	18	the	the	DET
aiti-272	5	19	precision	precision	NOUN
aiti-272	5	20	motion	motion	NOUN
aiti-272	5	21	when	when	SCONJ
aiti-272	5	22	the	the	DET
aiti-272	5	23	vibration	vibration	NOUN
aiti-272	5	24	modes	mode	NOUN
aiti-272	5	25	of	of	ADP
aiti-272	5	26	the	the	DET
aiti-272	5	27	system	system	NOUN
aiti-272	5	28	are	be	AUX
aiti-272	5	29	critical	critical	ADJ
aiti-272	5	30	for	for	ADP
aiti-272	5	31	controller	controller	NOUN
aiti-272	5	32	design	design	NOUN
aiti-272	5	33	.	.	PUNCT
aiti-272	6	1	in	in	ADP
aiti-272	6	2	this	this	DET
aiti-272	6	3	study	study	NOUN
aiti-272	6	4	,	,	PUNCT
aiti-272	6	5	there	there	PRON
aiti-272	6	6	is	be	VERB
aiti-272	6	7	translation	translation	NOUN
aiti-272	6	8	and	and	CCONJ
aiti-272	6	9	rotation	rotation	NOUN
aiti-272	6	10	modes	mode	NOUN
aiti-272	6	11	of	of	ADP
aiti-272	6	12	a	a	DET
aiti-272	6	13	ball	ball	NOUN
aiti-272	6	14	screw	screw	NOUN
aiti-272	6	15	feed	feed	NOUN
aiti-272	6	16	drive	drive	NOUN
aiti-272	6	17	system	system	NOUN
aiti-272	6	18	when	when	SCONJ
aiti-272	6	19	positioning	positioning	NOUN
aiti-272	6	20	table	table	NOUN
aiti-272	6	21	is	be	AUX
aiti-272	6	22	actuated	actuate	VERB
aiti-272	6	23	by	by	ADP
aiti-272	6	24	a	a	DET
aiti-272	6	25	servo	servo	NOUN
aiti-272	6	26	motor	motor	NOUN
aiti-272	6	27	.	.	PUNCT
aiti-272	7	1	a	a	DET
aiti-272	7	2	lumped	lump	VERB
aiti-272	7	3	dynamic	dynamic	ADJ
aiti-272	7	4	model	model	NOUN
aiti-272	7	5	to	to	PART
aiti-272	7	6	study	study	VERB
aiti-272	7	7	the	the	DET
aiti-272	7	8	ball	ball	NOUN
aiti-272	7	9	nut	nut	NOUN
aiti-272	7	10	preload	preload	NOUN
aiti-272	7	11	variation	variation	NOUN
aiti-272	7	12	and	and	CCONJ
aiti-272	7	13	torsional	torsional	ADJ
aiti-272	7	14	stiffness	stiffness	NOUN
aiti-272	7	15	of	of	ADP
aiti-272	7	16	the	the	DET
aiti-272	7	17	ball	ball	NOUN
aiti-272	7	18	screw	screw	ADJ
aiti-272	7	19	drive	drive	NOUN
aiti-272	7	20	system	system	NOUN
aiti-272	7	21	is	be	AUX
aiti-272	7	22	derived	derive	VERB
aiti-272	7	23	first	first	ADV
aiti-272	7	24	.	.	PUNCT
aiti-272	8	1	the	the	DET
aiti-272	8	2	mathematical	mathematical	ADJ
aiti-272	8	3	modeling	modeling	NOUN
aiti-272	8	4	and	and	CCONJ
aiti-272	8	5	numerical	numerical	ADJ
aiti-272	8	6	simulat	simulat	NOUN
aiti-272	8	7	ion	ion	NOUN
aiti-272	8	8	provide	provide	VERB
aiti-272	8	9	the	the	DET
aiti-272	8	10	informat	informat	ADJ
aiti-272	8	11	ion	ion	NOUN
aiti-272	8	12	of	of	ADP
aiti-272	8	13	peak	peak	NOUN
aiti-272	8	14	frequency	frequency	NOUN
aiti-272	8	15	response	response	NOUN
aiti-272	8	16	as	as	ADP
aiti-272	8	17	the	the	DET
aiti-272	8	18	different	different	ADJ
aiti-272	8	19	levels	level	NOUN
aiti-272	8	20	of	of	ADP
aiti-272	8	21	ball	ball	NOUN
aiti-272	8	22	nut	nut	NOUN
aiti-272	8	23	preload	preload	NOUN
aiti-272	8	24	,	,	PUNCT
aiti-272	8	25	ball	ball	NOUN
aiti-272	8	26	screw	screw	VERB
aiti-272	8	27	torsional	torsional	ADJ
aiti-272	8	28	stiffness	stiffness	NOUN
aiti-272	8	29	and	and	CCONJ
aiti-272	8	30	table	table	NOUN
aiti-272	8	31	mass	mass	PROPN
aiti-272	8	32	.	.	PUNCT
aiti-272	9	1	the	the	DET
aiti-272	9	2	trend	trend	NOUN
aiti-272	9	3	of	of	ADP
aiti-272	9	4	increasing	increase	VERB
aiti-272	9	5	preload	preload	NOUN
aiti-272	9	6	will	will	AUX
aiti-272	9	7	indicate	indicate	VERB
aiti-272	9	8	the	the	DET
aiti-272	9	9	abrupt	abrupt	ADJ
aiti-272	9	10	peak	peak	NOUN
aiti-272	9	11	change	change	NOUN
aiti-272	9	12	in	in	ADP
aiti-272	9	13	frequency	frequency	NOUN
aiti-272	9	14	response	response	NOUN
aiti-272	9	15	spectrum	spectrum	NOUN
aiti-272	9	16	analysis	analysis	NOUN
aiti-272	9	17	in	in	ADP
aiti-272	9	18	some	some	DET
aiti-272	9	19	mode	mode	NOUN
aiti-272	9	20	shapes	shape	NOUN
aiti-272	9	21	.	.	PUNCT
aiti-272	10	1	this	this	DET
aiti-272	10	2	study	study	NOUN
aiti-272	10	3	provides	provide	VERB
aiti-272	10	4	an	an	DET
aiti-272	10	5	approach	approach	NOUN
aiti-272	10	6	to	to	PART
aiti-272	10	7	investigate	investigate	VERB
aiti-272	10	8	the	the	DET
aiti-272	10	9	dynamic	dynamic	ADJ
aiti-272	10	10	frequency	frequency	NOUN
aiti-272	10	11	response	response	NOUN
aiti-272	10	12	of	of	ADP
aiti-272	10	13	a	a	DET
aiti-272	10	14	ball	ball	NOUN
aiti-272	10	15	screw	screw	ADJ
aiti-272	10	16	drive	drive	NOUN
aiti-272	10	17	system	system	NOUN
aiti-272	10	18	,	,	PUNCT
aiti-272	10	19	which	which	PRON
aiti-272	10	20	provides	provide	VERB
aiti-272	10	21	significant	significant	ADJ
aiti-272	10	22	information	information	NOUN
aiti-272	10	23	fo	fo	ADP
aiti-272	10	24	r	r	NOUN
aiti-272	10	25	better	well	ADJ
aiti-272	10	26	control	control	NOUN
aiti-272	10	27	performance	performance	NOUN
aiti-272	10	28	when	when	SCONJ
aiti-272	10	29	precise	precise	ADJ
aiti-272	10	30	motion	motion	NOUN
aiti-272	10	31	control	control	NOUN
aiti-272	10	32	is	be	AUX
aiti-272	10	33	concerned	concern	VERB
aiti-272	10	34	.	.	PUNCT
aiti-272	11	1	keywords	keyword	NOUN
aiti-272	11	2	:	:	PUNCT
aiti-272	11	3	ball	ball	NOUN
aiti-272	11	4	nut	nut	NOUN
aiti-272	11	5	preload	preload	NOUN
aiti-272	11	6	,	,	PUNCT
aiti-272	11	7	ball	ball	NOUN
aiti-272	11	8	screw	screw	NOUN
aiti-272	11	9	drive	drive	NOUN
aiti-272	11	10	system	system	NOUN
aiti-272	11	11	,	,	PUNCT
aiti-272	11	12	dynamic	dynamic	ADJ
aiti-272	11	13	modeling	modeling	NOUN
aiti-272	11	14	1	1	NUM
aiti-272	11	15	.	.	PUNCT
aiti-272	12	1	introduction	introduction	NOUN
aiti-272	12	2	precision	precision	NOUN
aiti-272	12	3	computer	computer	PROPN
aiti-272	12	4	numerical	numerical	PROPN
aiti-272	12	5	control	control	PROPN
aiti-272	12	6	(	(	PUNCT
aiti-272	12	7	cnc	cnc	PROPN
aiti-272	12	8	)	)	PUNCT
aiti-272	12	9	machines	machine	NOUN
aiti-272	12	10	are	be	AUX
aiti-272	12	11	widely	widely	ADV
aiti-272	12	12	used	use	VERB
aiti-272	12	13	in	in	ADP
aiti-272	12	14	modern	modern	ADJ
aiti-272	12	15	industry	industry	NOUN
aiti-272	12	16	for	for	ADP
aiti-272	12	17	mass	mass	ADJ
aiti-272	12	18	production	production	NOUN
aiti-272	12	19	.	.	PUNCT
aiti-272	13	1	the	the	DET
aiti-272	13	2	ball	ball	NOUN
aiti-272	13	3	screws	screw	NOUN
aiti-272	13	4	are	be	AUX
aiti-272	13	5	widely	widely	ADV
aiti-272	13	6	applied	apply	VERB
aiti-272	13	7	in	in	ADP
aiti-272	13	8	the	the	DET
aiti-272	13	9	linear	linear	ADJ
aiti-272	13	10	actuators	actuator	NOUN
aiti-272	13	11	of	of	ADP
aiti-272	13	12	machinery	machinery	NOUN
aiti-272	13	13	and	and	CCONJ
aiti-272	13	14	equipment	equipment	NOUN
aiti-272	13	15	because	because	SCONJ
aiti-272	13	16	of	of	ADP
aiti-272	13	17	the	the	DET
aiti-272	13	18	high	high	ADJ
aiti-272	13	19	efficiency	efficiency	NOUN
aiti-272	13	20	,	,	PUNCT
aiti-272	13	21	less	less	ADJ
aiti-272	13	22	backlash	backlash	NOUN
aiti-272	13	23	,	,	PUNCT
aiti-272	13	24	easy	easy	ADJ
aiti-272	13	25	lubrication	lubrication	NOUN
aiti-272	13	26	,	,	PUNCT
aiti-272	13	27	and	and	CCONJ
aiti-272	13	28	easy	easy	ADJ
aiti-272	13	29	maintenance	maintenance	NOUN
aiti-272	13	30	.	.	PUNCT
aiti-272	14	1	since	since	SCONJ
aiti-272	14	2	ball	ball	NOUN
aiti-272	14	3	screw	screw	AUX
aiti-272	14	4	play	play	VERB
aiti-272	14	5	a	a	DET
aiti-272	14	6	significant	significant	ADJ
aiti-272	14	7	role	role	NOUN
aiti-272	14	8	in	in	ADP
aiti-272	14	9	converting	convert	VERB
aiti-272	14	10	rotary	rotary	ADJ
aiti-272	14	11	motion	motion	NOUN
aiti-272	14	12	into	into	ADP
aiti-272	14	13	linear	linear	ADJ
aiti-272	14	14	mot	mot	NOUN
aiti-272	14	15	ion	ion	NOUN
aiti-272	14	16	preloading	preloading	NOUN
aiti-272	14	17	is	be	AUX
aiti-272	14	18	effective	effective	ADJ
aiti-272	14	19	to	to	PART
aiti-272	14	20	eliminate	eliminate	VERB
aiti-272	14	21	backlash	backlash	NOUN
aiti-272	14	22	and	and	CCONJ
aiti-272	14	23	increase	increase	VERB
aiti-272	14	24	the	the	DET
aiti-272	14	25	stiffness	stiffness	NOUN
aiti-272	14	26	of	of	ADP
aiti-272	14	27	ball	ball	NOUN
aiti-272	14	28	screw	screw	VERB
aiti-272	14	29	for	for	ADP
aiti-272	14	30	precision	precision	NOUN
aiti-272	14	31	motion	motion	NOUN
aiti-272	14	32	concerns	concern	NOUN
aiti-272	14	33	.	.	PUNCT
aiti-272	15	1	the	the	DET
aiti-272	15	2	dynamic	dynamic	ADJ
aiti-272	15	3	frequency	frequency	NOUN
aiti-272	15	4	responses	response	NOUN
aiti-272	15	5	of	of	ADP
aiti-272	15	6	the	the	DET
aiti-272	15	7	feed	feed	NOUN
aiti-272	15	8	drive	drive	NOUN
aiti-272	15	9	system	system	NOUN
aiti-272	15	10	depends	depend	VERB
aiti-272	15	11	on	on	ADP
aiti-272	15	12	the	the	DET
aiti-272	15	13	stiffness	stiffness	ADJ
aiti-272	15	14	combinations	combination	NOUN
aiti-272	15	15	of	of	ADP
aiti-272	15	16	the	the	DET
aiti-272	15	17	ball	ball	NOUN
aiti-272	15	18	screw	screw	NOUN
aiti-272	15	19	,	,	PUNCT
aiti-272	15	20	ball	ball	NOUN
aiti-272	15	21	nut	nut	NOUN
aiti-272	15	22	,	,	PUNCT
aiti-272	15	23	fixed	fix	VERB
aiti-272	15	24	support	support	NOUN
aiti-272	15	25	bearings	bearing	NOUN
aiti-272	15	26	,	,	PUNCT
aiti-272	15	27	the	the	DET
aiti-272	15	28	flexible	flexible	ADJ
aiti-272	15	29	coupler	coupler	NOUN
aiti-272	15	30	and	and	CCONJ
aiti-272	15	31	the	the	DET
aiti-272	15	32	stiffness	stiffness	NOUN
aiti-272	15	33	between	between	ADP
aiti-272	15	34	the	the	DET
aiti-272	15	35	ball	ball	NOUN
aiti-272	15	36	screw	screw	NOUN
aiti-272	15	37	and	and	CCONJ
aiti-272	15	38	the	the	DET
aiti-272	15	39	working	working	NOUN
aiti-272	15	40	table	table	NOUN
aiti-272	15	41	.	.	PUNCT
aiti-272	16	1	such	such	ADJ
aiti-272	16	2	frequency	frequency	NOUN
aiti-272	16	3	response	response	NOUN
aiti-272	16	4	results	result	NOUN
aiti-272	16	5	from	from	ADP
aiti-272	16	6	the	the	DET
aiti-272	16	7	axial	axial	ADJ
aiti-272	16	8	mode	mode	NOUN
aiti-272	16	9	shapes	shape	NOUN
aiti-272	16	10	and	and	CCONJ
aiti-272	16	11	torsional	torsional	ADJ
aiti-272	16	12	mode	mode	NOUN
aiti-272	16	13	shape	shape	NOUN
aiti-272	16	14	of	of	ADP
aiti-272	16	15	the	the	DET
aiti-272	16	16	ball	ball	NOUN
aiti-272	16	17	screw	screw	NOUN
aiti-272	16	18	drive	drive	NOUN
aiti-272	16	19	system	system	NOUN
aiti-272	16	20	when	when	SCONJ
aiti-272	16	21	it	it	PRON
aiti-272	16	22	is	be	AUX
aiti-272	16	23	actuated	actuate	VERB
aiti-272	16	24	by	by	ADP
aiti-272	16	25	servo	servo	NOUN
aiti-272	16	26	motor	motor	NOUN
aiti-272	16	27	.	.	PUNCT
aiti-272	17	1	each	each	DET
aiti-272	17	2	mode	mode	NOUN
aiti-272	17	3	shape	shape	NOUN
aiti-272	17	4	affects	affect	VERB
aiti-272	17	5	and	and	CCONJ
aiti-272	17	6	determines	determine	VERB
aiti-272	17	7	the	the	DET
aiti-272	17	8	motion	motion	NOUN
aiti-272	17	9	control	control	NOUN
aiti-272	17	10	frequency	frequency	NOUN
aiti-272	17	11	response	response	NOUN
aiti-272	17	12	bandwidth	bandwidth	NOUN
aiti-272	17	13	when	when	SCONJ
aiti-272	17	14	the	the	DET
aiti-272	17	15	control	control	NOUN
aiti-272	17	16	speed	speed	NOUN
aiti-272	17	17	is	be	AUX
aiti-272	17	18	limited	limit	VERB
aiti-272	17	19	and	and	CCONJ
aiti-272	17	20	becomes	become	VERB
aiti-272	17	21	a	a	DET
aiti-272	17	22	critical	critical	ADJ
aiti-272	17	23	issue	issue	NOUN
aiti-272	17	24	.	.	PUNCT
aiti-272	18	1	the	the	DET
aiti-272	18	2	working	work	VERB
aiti-272	18	3	table	table	NOUN
aiti-272	18	4	mass	mass	NOUN
aiti-272	18	5	and	and	CCONJ
aiti-272	18	6	the	the	DET
aiti-272	18	7	bolt	bolt	NOUN
aiti-272	18	8	stiffness	stiffness	NOUN
aiti-272	18	9	between	between	ADP
aiti-272	18	10	the	the	DET
aiti-272	18	11	machine	machine	NOUN
aiti-272	18	12	bed	bed	NOUN
aiti-272	18	13	base	base	NOUN
aiti-272	18	14	and	and	CCONJ
aiti-272	18	15	attached	attach	VERB
aiti-272	18	16	ground	ground	NOUN
aiti-272	18	17	floor	floor	NOUN
aiti-272	18	18	also	also	ADV
aiti-272	18	19	plays	play	VERB
aiti-272	18	20	an	an	DET
aiti-272	18	21	important	important	ADJ
aiti-272	18	22	role	role	NOUN
aiti-272	18	23	for	for	ADP
aiti-272	18	24	the	the	DET
aiti-272	18	25	frequency	frequency	NOUN
aiti-272	18	26	response	response	NOUN
aiti-272	18	27	when	when	SCONJ
aiti-272	18	28	the	the	DET
aiti-272	18	29	vibration	vibration	NOUN
aiti-272	18	30	mode	mode	NOUN
aiti-272	18	31	of	of	ADP
aiti-272	18	32	the	the	DET
aiti-272	18	33	cnc	cnc	PROPN
aiti-272	18	34	machine	machine	NOUN
aiti-272	18	35	is	be	AUX
aiti-272	18	36	concerned	concern	VERB
aiti-272	18	37	with	with	ADP
aiti-272	18	38	precision	precision	NOUN
aiti-272	18	39	accuracy	accuracy	NOUN
aiti-272	18	40	.	.	PUNCT
aiti-272	19	1	as	as	ADP
aiti-272	19	2	in	in	ADP
aiti-272	19	3	intelligent	intelligent	ADJ
aiti-272	19	4	control	control	NOUN
aiti-272	19	5	field	field	NOUN
aiti-272	19	6	,	,	PUNCT
aiti-272	19	7	the	the	DET
aiti-272	19	8	control	control	NOUN
aiti-272	19	9	signals	signal	VERB
aiti-272	19	10	that	that	PRON
aiti-272	19	11	fed	feed	VERB
aiti-272	19	12	into	into	ADP
aiti-272	19	13	the	the	DET
aiti-272	19	14	controlled	control	VERB
aiti-272	19	15	plant	plant	NOUN
aiti-272	19	16	are	be	AUX
aiti-272	19	17	based	base	VERB
aiti-272	19	18	on	on	ADP
aiti-272	19	19	the	the	DET
aiti-272	19	20	feedback	feedback	NOUN
aiti-272	19	21	control	control	NOUN
aiti-272	19	22	error	error	NOUN
aiti-272	19	23	that	that	PRON
aiti-272	19	24	should	should	AUX
aiti-272	19	25	be	be	AUX
aiti-272	19	26	learnable	learnable	ADJ
aiti-272	19	27	.	.	PUNCT
aiti-272	20	1	therefore	therefore	ADV
aiti-272	20	2	,	,	PUNCT
aiti-272	20	3	some	some	DET
aiti-272	20	4	control	control	NOUN
aiti-272	20	5	efforts	effort	NOUN
aiti-272	20	6	[	[	X
aiti-272	20	7	1	1	NUM
aiti-272	20	8	-	-	SYM
aiti-272	20	9	2	2	NUM
aiti-272	20	10	]	]	PUNCT
aiti-272	20	11	are	be	AUX
aiti-272	20	12	focused	focus	VERB
aiti-272	20	13	the	the	DET
aiti-272	20	14	design	design	NOUN
aiti-272	20	15	of	of	ADP
aiti-272	20	16	the	the	DET
aiti-272	20	17	bandwidth	bandwidth	NOUN
aiti-272	20	18	of	of	ADP
aiti-272	20	19	the	the	DET
aiti-272	20	20	filter	filter	NOUN
aiti-272	20	21	that	that	PRON
aiti-272	20	22	can	can	AUX
aiti-272	20	23	filter	filter	VERB
aiti-272	20	24	out	out	ADP
aiti-272	20	25	the	the	DET
aiti-272	20	26	un	un	ADJ
aiti-272	20	27	-	-	ADJ
aiti-272	20	28	learnable	learnable	ADJ
aiti-272	20	29	errors	error	NOUN
aiti-272	20	30	contents	content	NOUN
aiti-272	20	31	and	and	CCONJ
aiti-272	20	32	can	can	AUX
aiti-272	20	33	be	be	AUX
aiti-272	20	34	get	get	VERB
aiti-272	20	35	back	back	ADV
aiti-272	20	36	to	to	ADP
aiti-272	20	37	control	control	NOUN
aiti-272	20	38	system	system	NOUN
aiti-272	20	39	for	for	ADP
aiti-272	20	40	bettering	better	VERB
aiti-272	20	41	control	control	NOUN
aiti-272	20	42	h	h	PROPN
aiti-272	20	43	istory	istory	PROPN
aiti-272	20	44	.	.	PUNCT
aiti-272	21	1	since	since	SCONJ
aiti-272	21	2	the	the	DET
aiti-272	21	3	bandwidth	bandwidth	NOUN
aiti-272	21	4	of	of	ADP
aiti-272	21	5	controlled	control	VERB
aiti-272	21	6	system	system	NOUN
aiti-272	21	7	determines	determine	VERB
aiti-272	21	8	the	the	DET
aiti-272	21	9	motion	motion	NOUN
aiti-272	21	10	speed	speed	NOUN
aiti-272	21	11	response	response	NOUN
aiti-272	21	12	and	and	CCONJ
aiti-272	21	13	its	its	PRON
aiti-272	21	14	performance	performance	NOUN
aiti-272	21	15	.	.	PUNCT
aiti-272	22	1	the	the	DET
aiti-272	22	2	lumped	lump	VERB
aiti-272	22	3	dynamic	dynamic	ADJ
aiti-272	22	4	model	model	NOUN
aiti-272	22	5	derivation	derivation	NOUN
aiti-272	22	6	is	be	AUX
aiti-272	22	7	significant	significant	ADJ
aiti-272	22	8	in	in	ADP
aiti-272	22	9	determin	determin	NOUN
aiti-272	22	10	ing	e	VERB
aiti-272	22	11	the	the	DET
aiti-272	22	12	bandwidth	bandwidth	NOUN
aiti-272	22	13	for	for	ADP
aiti-272	22	14	motion	motion	NOUN
aiti-272	22	15	control	control	NOUN
aiti-272	22	16	law	law	NOUN
aiti-272	22	17	that	that	PRON
aiti-272	22	18	can	can	AUX
aiti-272	22	19	be	be	AUX
aiti-272	22	20	used	use	VERB
aiti-272	22	21	for	for	ADP
aiti-272	22	22	controller	controller	NOUN
aiti-272	22	23	design	design	NOUN
aiti-272	22	24	.	.	PUNCT
aiti-272	23	1	since	since	SCONJ
aiti-272	23	2	such	such	ADJ
aiti-272	23	3	frequency	frequency	NOUN
aiti-272	23	4	contents	content	NOUN
aiti-272	23	5	of	of	ADP
aiti-272	23	6	compensated	compensate	VERB
aiti-272	23	7	error	error	NOUN
aiti-272	23	8	are	be	AUX
aiti-272	23	9	suggested	suggest	VERB
aiti-272	23	10	to	to	PART
aiti-272	23	11	be	be	AUX
aiti-272	23	12	within	within	ADP
aiti-272	23	13	the	the	DET
aiti-272	23	14	bandwidth	bandwidth	NOUN
aiti-272	23	15	when	when	SCONJ
aiti-272	23	16	control	control	NOUN
aiti-272	23	17	signals	signal	NOUN
aiti-272	23	18	are	be	AUX
aiti-272	23	19	actuating	actuate	VERB
aiti-272	23	20	.	.	PUNCT
aiti-272	24	1	th	th	X
aiti-272	24	2	is	be	AUX
aiti-272	24	3	paper	paper	NOUN
aiti-272	24	4	will	will	AUX
aiti-272	24	5	derive	derive	VERB
aiti-272	24	6	the	the	DET
aiti-272	24	7	dynamic	dynamic	ADJ
aiti-272	24	8	model	model	NOUN
aiti-272	24	9	of	of	ADP
aiti-272	24	10	the	the	DET
aiti-272	24	11	ball	ball	NOUN
aiti-272	24	12	screw	screw	VERB
aiti-272	24	13	feed	feed	NOUN
aiti-272	24	14	drive	drive	NOUN
aiti-272	24	15	system	system	NOUN
aiti-272	24	16	first	first	ADV
aiti-272	24	17	and	and	CCONJ
aiti-272	24	18	examine	examine	VERB
aiti-272	24	19	the	the	DET
aiti-272	24	20	relationship	relationship	NOUN
aiti-272	24	21	between	between	ADP
aiti-272	24	22	the	the	DET
aiti-272	24	23	ball	ball	NOUN
aiti-272	24	24	screw	screw	ADJ
aiti-272	24	25	preload	preload	NOUN
aiti-272	24	26	variation	variation	NOUN
aiti-272	24	27	,	,	PUNCT
aiti-272	24	28	ball	ball	NOUN
aiti-272	24	29	screw	screw	VERB
aiti-272	24	30	torsional	torsional	ADJ
aiti-272	24	31	stiffness	stiffness	NOUN
aiti-272	24	32	and	and	CCONJ
aiti-272	24	33	effect	effect	NOUN
aiti-272	24	34	of	of	ADP
aiti-272	24	35	table	table	NOUN
aiti-272	24	36	mass	mass	NOUN
aiti-272	24	37	.	.	PUNCT
aiti-272	25	1	*	*	PUNCT
aiti-272	25	2	corresponding	correspond	VERB
aiti-272	25	3	author	author	NOUN
aiti-272	25	4	,	,	PUNCT
aiti-272	25	5	email	email	NOUN
aiti-272	25	6	:	:	PUNCT
aiti-272	25	7	ychuang@cc.ncue.edu.tw	ychuang@cc.ncue.edu.tw	PROPN
aiti-272	25	8	advances	advance	VERB
aiti-272	25	9	in	in	ADP
aiti-272	25	10	technology	technology	NOUN
aiti-272	25	11	innovation	innovation	NOUN
aiti-272	25	12	,	,	PUNCT
aiti-272	25	13	vol	vol	NOUN
aiti-272	25	14	.	.	PROPN
aiti-272	26	1	2	2	NUM
aiti-272	26	2	,	,	PUNCT
aiti-272	26	3	no	no	INTJ
aiti-272	26	4	.	.	NOUN
aiti-272	26	5	2	2	NUM
aiti-272	26	6	,	,	PUNCT
aiti-272	26	7	2017	2017	NUM
aiti-272	26	8	,	,	PUNCT
aiti-272	26	9	pp	pp	ADJ
aiti-272	26	10	.	.	PUNCT
aiti-272	27	1	29	29	NUM
aiti-272	27	2	33	33	NUM
aiti-272	27	3	30	30	NUM
aiti-272	27	4	copyright	copyright	NOUN
aiti-272	27	5	©	©	PROPN
aiti-272	27	6	taeti	taeti	PROPN
aiti-272	27	7	simulation	simulation	NOUN
aiti-272	27	8	results	result	NOUN
aiti-272	27	9	will	will	AUX
aiti-272	27	10	unveil	unveil	VERB
aiti-272	27	11	the	the	DET
aiti-272	27	12	frequency	frequency	NOUN
aiti-272	27	13	response	response	NOUN
aiti-272	27	14	of	of	ADP
aiti-272	27	15	the	the	DET
aiti-272	27	16	translational	translational	ADJ
aiti-272	27	17	and	and	CCONJ
aiti-272	27	18	torsional	torsional	ADJ
aiti-272	27	19	peak	peak	NOUN
aiti-272	27	20	modes	mode	NOUN
aiti-272	27	21	.	.	PUNCT
aiti-272	28	1	numerical	numerical	PROPN
aiti-272	28	2	simulat	simulat	PROPN
aiti-272	28	3	ion	ion	NOUN
aiti-272	28	4	shows	show	VERB
aiti-272	28	5	stable	stable	ADJ
aiti-272	28	6	convergence	convergence	NOUN
aiti-272	28	7	by	by	ADP
aiti-272	28	8	using	use	VERB
aiti-272	28	9	hybrid	hybrid	ADJ
aiti-272	28	10	particle	particle	NOUN
aiti-272	28	11	swarm	swarm	NOUN
aiti-272	28	12	optimization	optimization	NOUN
aiti-272	28	13	of	of	ADP
aiti-272	28	14	iterative	iterative	NOUN
aiti-272	28	15	learning	learning	NOUN
aiti-272	28	16	control	control	NOUN
aiti-272	29	1	[	[	X
aiti-272	29	2	2	2	X
aiti-272	29	3	]	]	PUNCT
aiti-272	29	4	on	on	ADP
aiti-272	29	5	this	this	DET
aiti-272	29	6	developed	develop	VERB
aiti-272	29	7	ball	ball	NOUN
aiti-272	29	8	screw	screw	ADJ
aiti-272	29	9	drive	drive	NOUN
aiti-272	29	10	system	system	NOUN
aiti-272	29	11	.	.	PUNCT
aiti-272	30	1	2	2	X
aiti-272	30	2	.	.	X
aiti-272	30	3	mathematical	mathematical	ADJ
aiti-272	30	4	model	model	NOUN
aiti-272	30	5	and	and	CCONJ
aiti-272	30	6	numerical	numerical	PROPN
aiti-272	30	7	simulation	simulation	PROPN
aiti-272	30	8	2.1	2.1	NUM
aiti-272	30	9	.	.	PUNCT
aiti-272	30	10	dynamic	dynamic	ADJ
aiti-272	30	11	model	model	NOUN
aiti-272	30	12	of	of	ADP
aiti-272	30	13	the	the	DET
aiti-272	30	14	ball	ball	NOUN
aiti-272	30	15	screw	screw	NOUN
aiti-272	30	16	drive	drive	NOUN
aiti-272	30	17	system	system	NOUN
aiti-272	30	18	to	to	PART
aiti-272	30	19	model	model	VERB
aiti-272	30	20	the	the	DET
aiti-272	30	21	feed	feed	NOUN
aiti-272	30	22	drive	drive	NOUN
aiti-272	30	23	system	system	NOUN
aiti-272	30	24	,	,	PUNCT
aiti-272	30	25	th	th	X
aiti-272	30	26	is	be	AUX
aiti-272	30	27	paper	paper	NOUN
aiti-272	30	28	set	set	VERB
aiti-272	30	29	differnt	differnt	ADJ
aiti-272	30	30	stiffness	stiffness	NOUN
aiti-272	30	31	of	of	ADP
aiti-272	30	32	the	the	DET
aiti-272	30	33	ball	ball	NOUN
aiti-272	30	34	nut	nut	NOUN
aiti-272	30	35	stiffness	stiffness	NOUN
aiti-272	30	36	for	for	ADP
aiti-272	30	37	different	different	ADJ
aiti-272	30	38	preload	preload	NOUN
aiti-272	30	39	between	between	ADP
aiti-272	30	40	the	the	DET
aiti-272	30	41	ball	ball	NOUN
aiti-272	30	42	screw	screw	NOUN
aiti-272	30	43	shaft	shaft	NOUN
aiti-272	30	44	and	and	CCONJ
aiti-272	30	45	the	the	DET
aiti-272	30	46	ball	ball	NOUN
aiti-272	30	47	nut	nut	NOUN
aiti-272	30	48	.	.	PUNCT
aiti-272	31	1	the	the	DET
aiti-272	31	2	presetting	presette	VERB
aiti-272	31	3	preload	preload	NOUN
aiti-272	31	4	value	value	NOUN
aiti-272	31	5	can	can	AUX
aiti-272	31	6	be	be	AUX
aiti-272	31	7	deployed	deploy	VERB
aiti-272	31	8	by	by	ADP
aiti-272	31	9	inserting	insert	VERB
aiti-272	31	10	different	different	ADJ
aiti-272	31	11	ball	ball	NOUN
aiti-272	31	12	size	size	NOUN
aiti-272	31	13	for	for	ADP
aiti-272	31	14	single	single	ADJ
aiti-272	31	15	ball	ball	NOUN
aiti-272	31	16	nut	nut	NOUN
aiti-272	31	17	design	design	NOUN
aiti-272	31	18	or	or	CCONJ
aiti-272	31	19	using	use	VERB
aiti-272	31	20	disk	disk	NOUN
aiti-272	31	21	spring	spring	NOUN
aiti-272	31	22	that	that	PRON
aiti-272	31	23	applied	apply	VERB
aiti-272	31	24	to	to	ADP
aiti-272	31	25	the	the	DET
aiti-272	31	26	ball	ball	NOUN
aiti-272	31	27	screw	screw	VERB
aiti-272	31	28	when	when	SCONJ
aiti-272	31	29	double	double	ADJ
aiti-272	31	30	ball	ball	NOUN
aiti-272	31	31	nut	nut	NOUN
aiti-272	31	32	is	be	AUX
aiti-272	31	33	the	the	DET
aiti-272	31	34	preference	preference	NOUN
aiti-272	31	35	.	.	PUNCT
aiti-272	32	1	fig	fig	NOUN
aiti-272	32	2	.	.	PUNCT
aiti-272	33	1	1	1	NUM
aiti-272	33	2	shows	show	VERB
aiti-272	33	3	the	the	DET
aiti-272	33	4	picture	picture	NOUN
aiti-272	33	5	of	of	ADP
aiti-272	33	6	the	the	DET
aiti-272	33	7	in	in	ADP
aiti-272	33	8	-	-	PUNCT
aiti-272	33	9	lab	lab	NOUN
aiti-272	33	10	single	single	ADJ
aiti-272	33	11	-	-	PUNCT
aiti-272	33	12	axis	axis	NOUN
aiti-272	33	13	feed	feed	NOUN
aiti-272	33	14	drive	drive	NOUN
aiti-272	33	15	p	p	NOUN
aiti-272	33	16	latform	latform	NOUN
aiti-272	33	17	.	.	PUNCT
aiti-272	34	1	to	to	PART
aiti-272	34	2	analyze	analyze	VERB
aiti-272	34	3	the	the	DET
aiti-272	34	4	dynamic	dynamic	ADJ
aiti-272	34	5	characteristic	characteristic	NOUN
aiti-272	34	6	of	of	ADP
aiti-272	34	7	the	the	DET
aiti-272	34	8	ball	ball	NOUN
aiti-272	34	9	screw	screw	NOUN
aiti-272	34	10	system	system	NOUN
aiti-272	34	11	under	under	ADP
aiti-272	34	12	different	different	ADJ
aiti-272	34	13	preload	preload	NOUN
aiti-272	34	14	and	and	CCONJ
aiti-272	34	15	varying	vary	VERB
aiti-272	34	16	table	table	NOUN
aiti-272	34	17	mass	mass	PROPN
aiti-272	34	18	,	,	PUNCT
aiti-272	34	19	the	the	DET
aiti-272	34	20	feed	feed	NOUN
aiti-272	34	21	drive	drive	NOUN
aiti-272	34	22	system	system	NOUN
aiti-272	34	23	is	be	AUX
aiti-272	34	24	modeled	model	VERB
aiti-272	34	25	by	by	ADP
aiti-272	34	26	a	a	DET
aiti-272	34	27	lumped	lump	VERB
aiti-272	34	28	parameter	parameter	NOUN
aiti-272	34	29	system	system	NOUN
aiti-272	34	30	shown	show	VERB
aiti-272	34	31	in	in	ADP
aiti-272	34	32	fig	fig	NOUN
aiti-272	34	33	.	.	PUNCT
aiti-272	35	1	2	2	X
aiti-272	35	2	.	.	X
aiti-272	35	3	fig	fig	NOUN
aiti-272	35	4	.	.	PUNCT
aiti-272	36	1	2	2	NUM
aiti-272	36	2	is	be	AUX
aiti-272	36	3	the	the	DET
aiti-272	36	4	schematic	schematic	ADJ
aiti-272	36	5	illustration	illustration	NOUN
aiti-272	36	6	for	for	ADP
aiti-272	36	7	the	the	DET
aiti-272	36	8	single	single	ADJ
aiti-272	36	9	-	-	PUNCT
aiti-272	36	10	axis	axis	NOUN
aiti-272	36	11	ball	ball	NOUN
aiti-272	36	12	screw	screw	VERB
aiti-272	36	13	feed	feed	NOUN
aiti-272	36	14	drive	drive	NOUN
aiti-272	36	15	system	system	NOUN
aiti-272	36	16	.	.	PUNCT
aiti-272	37	1	in	in	ADP
aiti-272	37	2	general	general	ADJ
aiti-272	37	3	,	,	PUNCT
aiti-272	37	4	mechanical	mechanical	ADJ
aiti-272	37	5	systems	system	NOUN
aiti-272	37	6	have	have	VERB
aiti-272	37	7	three	three	NUM
aiti-272	37	8	passive	passive	ADJ
aiti-272	37	9	linear	linear	ADJ
aiti-272	37	10	components	component	NOUN
aiti-272	37	11	.	.	PUNCT
aiti-272	38	1	the	the	DET
aiti-272	38	2	spring	spring	NOUN
aiti-272	38	3	and	and	CCONJ
aiti-272	38	4	the	the	DET
aiti-272	38	5	mass	mass	NOUN
aiti-272	38	6	are	be	AUX
aiti-272	38	7	energy	energy	NOUN
aiti-272	38	8	-	-	PUNCT
aiti-272	38	9	storage	storage	NOUN
aiti-272	38	10	elements	element	NOUN
aiti-272	38	11	,	,	PUNCT
aiti-272	38	12	while	while	SCONJ
aiti-272	38	13	the	the	DET
aiti-272	38	14	viscous	viscous	ADJ
aiti-272	38	15	damper	damper	NOUN
aiti-272	38	16	is	be	AUX
aiti-272	38	17	the	the	DET
aiti-272	38	18	dissipated	dissipate	VERB
aiti-272	38	19	energy	energy	NOUN
aiti-272	38	20	.	.	PUNCT
aiti-272	39	1	both	both	PRON
aiti-272	39	2	of	of	ADP
aiti-272	39	3	the	the	DET
aiti-272	39	4	rotational	rotational	ADJ
aiti-272	39	5	and	and	CCONJ
aiti-272	39	6	translation	translation	NOUN
aiti-272	39	7	mechanical	mechanical	ADJ
aiti-272	39	8	system	system	NOUN
aiti-272	39	9	modeled	model	VERB
aiti-272	39	10	below	below	ADV
aiti-272	39	11	are	be	AUX
aiti-272	39	12	actuated	actuate	VERB
aiti-272	39	13	by	by	ADP
aiti-272	39	14	the	the	DET
aiti-272	39	15	servo	servo	NOUN
aiti-272	39	16	motor	motor	NOUN
aiti-272	39	17	torque	torque	NOUN
aiti-272	39	18	,	,	PUNCT
aiti-272	39	19	indicated	indicate	VERB
aiti-272	39	20	as	as	ADP
aiti-272	39	21	t.	t.	PROPN
aiti-272	39	22	as	as	ADP
aiti-272	39	23	the	the	DET
aiti-272	39	24	same	same	ADJ
aiti-272	39	25	derivation	derivation	NOUN
aiti-272	39	26	in	in	ADP
aiti-272	39	27	[	[	X
aiti-272	39	28	3	3	NUM
aiti-272	39	29	]	]	PUNCT
aiti-272	39	30	,	,	PUNCT
aiti-272	39	31	the	the	DET
aiti-272	39	32	overall	overall	ADJ
aiti-272	39	33	stiffness	stiffness	NOUN
aiti-272	39	34	of	of	ADP
aiti-272	39	35	a	a	DET
aiti-272	39	36	ball	ball	NOUN
aiti-272	39	37	screw	screw	NOUN
aiti-272	39	38	feed	feed	NOUN
aiti-272	39	39	drive	drive	NOUN
aiti-272	39	40	system	system	NOUN
aiti-272	39	41	can	can	AUX
aiti-272	39	42	be	be	AUX
aiti-272	39	43	determined	determine	VERB
aiti-272	39	44	by	by	ADP
aiti-272	39	45	the	the	DET
aiti-272	39	46	stiffness	stiffness	NOUN
aiti-272	39	47	of	of	ADP
aiti-272	39	48	the	the	DET
aiti-272	39	49	ball	ball	NOUN
aiti-272	39	50	screw	screw	VERB
aiti-272	39	51	itself	itself	PRON
aiti-272	39	52	,	,	PUNCT
aiti-272	39	53	which	which	PRON
aiti-272	39	54	is	be	AUX
aiti-272	39	55	comprised	comprise	VERB
aiti-272	39	56	of	of	ADP
aiti-272	39	57	the	the	DET
aiti-272	39	58	ball	ball	NOUN
aiti-272	39	59	screw	screw	NOUN
aiti-272	39	60	shaft	shaft	NOUN
aiti-272	39	61	,	,	PUNCT
aiti-272	39	62	the	the	DET
aiti-272	39	63	ball	ball	NOUN
aiti-272	39	64	nut	nut	NOUN
aiti-272	39	65	,	,	PUNCT
aiti-272	39	66	supporting	support	VERB
aiti-272	39	67	bearings	bearing	NOUN
aiti-272	39	68	of	of	ADP
aiti-272	39	69	the	the	DET
aiti-272	39	70	ball	ball	NOUN
aiti-272	39	71	screw	screw	NOUN
aiti-272	39	72	,	,	PUNCT
aiti-272	39	73	and	and	CCONJ
aiti-272	39	74	the	the	DET
aiti-272	39	75	stiffness	stiffness	NOUN
aiti-272	39	76	between	between	ADP
aiti-272	39	77	the	the	DET
aiti-272	39	78	ball	ball	NOUN
aiti-272	39	79	screw	screw	NOUN
aiti-272	39	80	and	and	CCONJ
aiti-272	39	81	the	the	DET
aiti-272	39	82	working	working	NOUN
aiti-272	39	83	table	table	NOUN
aiti-272	39	84	.	.	PUNCT
aiti-272	39	85	)	)	PUNCT
aiti-272	40	1	(	(	PUNCT
aiti-272	40	2	t	t	PROPN
aiti-272	40	3	bm	bm	PROPN
aiti-272	40	4	gkmmqmmj	gkmmqmmj	PROPN
aiti-272	40	5			PROPN
aiti-272	40	6			PROPN
aiti-272	40	7			NOUN
aiti-272	40	8			PROPN
aiti-272	40	9			X
aiti-272	40	10	(	(	PUNCT
aiti-272	40	11	1	1	NUM
aiti-272	40	12	)	)	PUNCT
aiti-272	40	13	𝐽𝑏	𝐽𝑏	PROPN
aiti-272	40	14	×	×	NOUN
aiti-272	40	15	�	�	NOUN
aiti-272	40	16	̈	̈	X
aiti-272	40	17	�	�	NOUN
aiti-272	40	18	𝑚	𝑚	NOUN
aiti-272	40	19	+	+	NOUN
aiti-272	40	20	𝑄𝑚	𝑄𝑚	PROPN
aiti-272	40	21	×	×	PROPN
aiti-272	40	22	�	�	PROPN
aiti-272	40	23	̇	̇	NOUN
aiti-272	40	24	�	�	PROPN
aiti-272	40	25	𝑏	𝑏	NOUN
aiti-272	40	26	+	+	PROPN
aiti-272	40	27	𝑅	𝑅	PROPN
aiti-272	40	28	×	×	NOUN
aiti-272	41	1	[	[	X
aiti-272	41	2	𝐾𝑛	𝐾𝑛	PROPN
aiti-272	41	3	×	×	NOUN
aiti-272	41	4	(	(	PUNCT
aiti-272	41	5	𝑅	𝑅	PROPN
aiti-272	41	6	×	×	NOUN
aiti-272	41	7	𝜃𝑏	𝜃𝑏	NOUN
aiti-272	41	8	+	+	CCONJ
aiti-272	41	9	𝑋𝑏	𝑋𝑏	PROPN
aiti-272	41	10	−	−	NOUN
aiti-272	41	11	𝑋𝑡	𝑋𝑡	PROPN
aiti-272	41	12	)	)	PUNCT
aiti-272	41	13	]	]	PUNCT
aiti-272	42	1	=	=	PUNCT
aiti-272	42	2	𝐾𝑔	𝐾𝑔	PROPN
aiti-272	42	3	×	×	NOUN
aiti-272	42	4	(	(	PUNCT
aiti-272	42	5	𝜃𝑚	𝜃𝑚	ADV
aiti-272	42	6	−	−	PROPN
aiti-272	42	7	𝜃𝑏	𝜃𝑏	NOUN
aiti-272	42	8	)	)	PUNCT
aiti-272	42	9	(	(	PUNCT
aiti-272	42	10	2	2	X
aiti-272	42	11	)	)	PUNCT
aiti-272	42	12	𝑀𝑏	𝑀𝑏	PROPN
aiti-272	42	13	×	×	PROPN
aiti-272	42	14	�	�	NOUN
aiti-272	42	15	̈	̈	NOUN
aiti-272	42	16	�	�	NOUN
aiti-272	42	17	𝑏	𝑏	NOUN
aiti-272	42	18	+	+	NOUN
aiti-272	42	19	𝐵𝑏	𝐵𝑏	PROPN
aiti-272	42	20	×	×	NOUN
aiti-272	42	21	(	(	PUNCT
aiti-272	42	22	�	�	PROPN
aiti-272	42	23	̇	̇	PROPN
aiti-272	42	24	�	�	PROPN
aiti-272	42	25	𝑏	𝑏	NOUN
aiti-272	42	26	−	−	PROPN
aiti-272	42	27	0	0	NUM
aiti-272	42	28	)	)	PUNCT
aiti-272	42	29	+	+	CCONJ
aiti-272	43	1	𝐾𝑒	𝐾𝑒	PROPN
aiti-272	43	2	×	×	NOUN
aiti-272	43	3	(	(	PUNCT
aiti-272	43	4	𝑋𝑏	𝑋𝑏	PROPN
aiti-272	43	5	−	−	PROPN
aiti-272	43	6	0	0	NUM
aiti-272	43	7	)	)	PUNCT
aiti-272	44	1	+	+	CCONJ
aiti-272	45	1	𝐾𝑛	𝐾𝑛	PROPN
aiti-272	45	2	×	×	NOUN
aiti-272	45	3	(	(	PUNCT
aiti-272	45	4	𝑅	𝑅	PROPN
aiti-272	45	5	×	×	NOUN
aiti-272	45	6	𝜃𝑏	𝜃𝑏	NOUN
aiti-272	45	7	+	+	CCONJ
aiti-272	45	8	𝑋𝑏	𝑋𝑏	PROPN
aiti-272	45	9	−	−	NOUN
aiti-272	45	10	𝑋𝑡	𝑋𝑡	NOUN
aiti-272	45	11	)	)	PUNCT
aiti-272	45	12	=	=	SYM
aiti-272	45	13	0	0	PUNCT
aiti-272	45	14	(	(	PUNCT
aiti-272	45	15	3	3	NUM
aiti-272	45	16	)	)	PUNCT
aiti-272	45	17	tx	tx	PROPN
aiti-272	45	18	b	b	PROPN
aiti-272	45	19	x	x	SYM
aiti-272	45	20	b	b	PROPN
aiti-272	45	21	rnk	rnk	X
aiti-272	45	22	txtbtxtm	txtbtxtm	NOUN
aiti-272	45	23	)	)	PUNCT
aiti-272	45	24	(	(	PUNCT
aiti-272	45	25	)	)	PUNCT
aiti-272	45	26	0	0	NUM
aiti-272	45	27	(	(	PUNCT
aiti-272	45	28			PRON
aiti-272	45	29			PROPN
aiti-272	45	30			X
aiti-272	45	31			X
aiti-272	45	32	(	(	PUNCT
aiti-272	45	33	4	4	X
aiti-272	45	34	)	)	PUNCT
aiti-272	45	35	rearranging	rearrange	VERB
aiti-272	45	36	eqs	eqs	X
aiti-272	45	37	(	(	PUNCT
aiti-272	45	38	1)-(4	1)-(4	NUM
aiti-272	45	39	)	)	PUNCT
aiti-272	45	40	,	,	PUNCT
aiti-272	45	41	we	we	PRON
aiti-272	45	42	have	have	VERB
aiti-272	45	43	[	[	PUNCT
aiti-272	45	44	𝑀𝑡	𝑀𝑡	PROPN
aiti-272	45	45	0	0	NUM
aiti-272	45	46	0	0	NUM
aiti-272	45	47	0	0	NUM
aiti-272	45	48	0	0	NUM
aiti-272	46	1	𝑀𝑏	𝑀𝑏	PRON
aiti-272	46	2	0	0	NUM
aiti-272	46	3	0	0	NUM
aiti-272	46	4	0	0	NUM
aiti-272	46	5	0	0	NUM
aiti-272	47	1	𝐽𝑏	𝐽𝑏	ADJ
aiti-272	47	2	0	0	NUM
aiti-272	47	3	0	0	NUM
aiti-272	47	4	0	0	NUM
aiti-272	47	5	0	0	X
aiti-272	48	1	𝐽𝑚	𝐽𝑚	PROPN
aiti-272	48	2	]	]	PUNCT
aiti-272	48	3	×	×	PROPN
aiti-272	48	4	[	[	PUNCT
aiti-272	48	5	�	�	PROPN
aiti-272	48	6	̈	̈	SYM
aiti-272	48	7	�	�	PROPN
aiti-272	48	8	𝑡	𝑡	PROPN
aiti-272	48	9	�	�	PROPN
aiti-272	48	10	̈	̈	SYM
aiti-272	48	11	�	�	PROPN
aiti-272	48	12	𝑏	𝑏	DET
aiti-272	48	13	�	�	PROPN
aiti-272	48	14	̈	̈	SYM
aiti-272	48	15	�	�	PROPN
aiti-272	48	16	𝑏	𝑏	PRON
aiti-272	48	17	�	�	PROPN
aiti-272	48	18	̈	̈	X
aiti-272	48	19	�	�	NOUN
aiti-272	48	20	𝑚	𝑚	NOUN
aiti-272	48	21	]	]	X
aiti-272	48	22	+	+	CCONJ
aiti-272	48	23	[	[	PUNCT
aiti-272	48	24	𝐵𝑡	𝐵𝑡	NOUN
aiti-272	48	25	0	0	NUM
aiti-272	48	26	0	0	NUM
aiti-272	48	27	0	0	NUM
aiti-272	48	28	0	0	NUM
aiti-272	48	29	𝐵𝑏	𝐵𝑏	NOUN
aiti-272	48	30	0	0	NUM
aiti-272	48	31	0	0	NUM
aiti-272	48	32	0	0	NUM
aiti-272	48	33	0	0	NUM
aiti-272	49	1	𝑄𝑏	𝑄𝑏	NOUN
aiti-272	49	2	0	0	NUM
aiti-272	49	3	0	0	NUM
aiti-272	49	4	0	0	NUM
aiti-272	49	5	0	0	NUM
aiti-272	50	1	𝑄𝑚	𝑄𝑚	PROPN
aiti-272	50	2	]	]	PUNCT
aiti-272	50	3	×	×	PROPN
aiti-272	50	4	[	[	PUNCT
aiti-272	50	5	�	�	PROPN
aiti-272	50	6	̇	̇	PROPN
aiti-272	50	7	�	�	PROPN
aiti-272	50	8	𝑡	𝑡	PROPN
aiti-272	50	9	�	�	PROPN
aiti-272	50	10	̇	̇	PROPN
aiti-272	50	11	�	�	PROPN
aiti-272	50	12	𝑏	𝑏	PRON
aiti-272	50	13	�	�	PROPN
aiti-272	50	14	̇	̇	PROPN
aiti-272	50	15	�	�	PROPN
aiti-272	50	16	𝑏	𝑏	PRON
aiti-272	50	17	�	�	PROPN
aiti-272	50	18	̇	̇	PROPN
aiti-272	50	19	�	�	PROPN
aiti-272	50	20	𝑚	𝑚	NOUN
aiti-272	50	21	]	]	X
aiti-272	50	22	+	+	CCONJ
aiti-272	50	23	[	[	PUNCT
aiti-272	50	24	𝐾𝑛	𝐾𝑛	NOUN
aiti-272	50	25	−𝐾𝑛	−𝐾𝑛	NOUN
aiti-272	50	26	−𝐾𝑛𝑅	−𝐾𝑛𝑅	NOUN
aiti-272	50	27	0	0	NUM
aiti-272	50	28	−𝐾𝑛	−𝐾𝑛	NOUN
aiti-272	51	1	𝐾𝑒	𝐾𝑒	PROPN
aiti-272	51	2	+	+	CCONJ
aiti-272	51	3	𝐾𝑛	𝐾𝑛	PROPN
aiti-272	51	4	𝐾𝑛𝑅	𝐾𝑛𝑅	PROPN
aiti-272	51	5	0	0	NUM
aiti-272	51	6	−𝐾𝑛𝑅	−𝐾𝑛𝑅	NOUN
aiti-272	51	7	𝐾𝑛𝑅	𝐾𝑛𝑅	PROPN
aiti-272	51	8	𝐾𝑔	𝐾𝑔	PROPN
aiti-272	51	9	+	+	PROPN
aiti-272	51	10	𝐾𝑛𝑅2	𝐾𝑛𝑅2	X
aiti-272	51	11	−𝐾𝑔	−𝐾𝑔	X
aiti-272	51	12	0	0	NUM
aiti-272	51	13	0	0	PUNCT
aiti-272	51	14	−𝐾𝑔	−𝐾𝑔	ADP
aiti-272	51	15	𝐾𝑔	𝐾𝑔	PROPN
aiti-272	51	16	]	]	PUNCT
aiti-272	51	17	×	×	NOUN
aiti-272	52	1	[	[	PUNCT
aiti-272	52	2	𝑋𝑡	𝑋𝑡	PROPN
aiti-272	52	3	𝑋𝑏	𝑋𝑏	PROPN
aiti-272	52	4	𝜃𝑏	𝜃𝑏	INTJ
aiti-272	52	5	𝜃𝑚	𝜃𝑚	ADV
aiti-272	52	6	]	]	PUNCT
aiti-272	52	7	=	=	PUNCT
aiti-272	53	1	[	[	PUNCT
aiti-272	53	2	0	0	NUM
aiti-272	53	3	0	0	NUM
aiti-272	53	4	0	0	NUM
aiti-272	53	5	𝑇	𝑇	PROPN
aiti-272	53	6	]	]	PUNCT
aiti-272	53	7	(	(	PUNCT
aiti-272	53	8	5	5	NUM
aiti-272	53	9	)	)	PUNCT
aiti-272	53	10	where	where	SCONJ
aiti-272	53	11	the	the	DET
aiti-272	53	12	stiffness	stiffness	ADJ
aiti-272	53	13	matrix	matrix	NOUN
aiti-272	53	14	is	be	AUX
aiti-272	53	15	different	different	ADJ
aiti-272	53	16	from	from	ADP
aiti-272	53	17	[	[	X
aiti-272	53	18	3	3	NUM
aiti-272	53	19	]	]	PUNCT
aiti-272	53	20	.	.	PUNCT
aiti-272	54	1	fig	fig	NOUN
aiti-272	54	2	.	.	PUNCT
aiti-272	55	1	1	1	NUM
aiti-272	55	2	the	the	DET
aiti-272	55	3	in	in	ADP
aiti-272	55	4	-	-	PUNCT
aiti-272	55	5	house	house	NOUN
aiti-272	55	6	single	single	ADJ
aiti-272	55	7	axis	axis	NOUN
aiti-272	55	8	platform	platform	NOUN
aiti-272	55	9	fig	fig	NOUN
aiti-272	55	10	.	.	PUNCT
aiti-272	56	1	2	2	NUM
aiti-272	56	2	illustration	illustration	NOUN
aiti-272	56	3	for	for	ADP
aiti-272	56	4	the	the	DET
aiti-272	56	5	schematic	schematic	ADJ
aiti-272	56	6	d	d	X
aiti-272	56	7	iagram	iagram	NOUN
aiti-272	56	8	of	of	ADP
aiti-272	56	9	the	the	DET
aiti-272	56	10	single	single	ADJ
aiti-272	56	11	-	-	PUNCT
aiti-272	56	12	axis	axis	NOUN
aiti-272	56	13	lumped	lump	VERB
aiti-272	56	14	parameters	parameter	NOUN
aiti-272	56	15	ball	ball	NOUN
aiti-272	56	16	screw	screw	ADJ
aiti-272	56	17	drive	drive	NOUN
aiti-272	56	18	system	system	NOUN
aiti-272	56	19	advances	advance	NOUN
aiti-272	56	20	in	in	ADP
aiti-272	56	21	technology	technology	NOUN
aiti-272	56	22	innovation	innovation	NOUN
aiti-272	56	23	,	,	PUNCT
aiti-272	56	24	vol	vol	NOUN
aiti-272	56	25	.	.	PROPN
aiti-272	56	26	2	2	NUM
aiti-272	56	27	,	,	PUNCT
aiti-272	56	28	no	no	INTJ
aiti-272	56	29	.	.	NOUN
aiti-272	56	30	2	2	NUM
aiti-272	56	31	,	,	PUNCT
aiti-272	56	32	2017	2017	NUM
aiti-272	56	33	,	,	PUNCT
aiti-272	56	34	pp	pp	ADJ
aiti-272	56	35	.	.	PUNCT
aiti-272	57	1	29	29	NUM
aiti-272	57	2	33	33	NUM
aiti-272	57	3	31	31	NUM
aiti-272	57	4	copyright	copyright	NOUN
aiti-272	57	5	©	©	PROPN
aiti-272	57	6	taeti	taeti	PROPN
aiti-272	57	7	2.2	2.2	NUM
aiti-272	57	8	.	.	PUNCT
aiti-272	58	1	numerical	numerical	PROPN
aiti-272	58	2	simulation	simulation	PROPN
aiti-272	58	3	table	table	NOUN
aiti-272	58	4	1	1	NUM
aiti-272	58	5	list	list	NOUN
aiti-272	58	6	the	the	DET
aiti-272	58	7	simulated	simulate	VERB
aiti-272	58	8	parameters	parameter	NOUN
aiti-272	58	9	and	and	CCONJ
aiti-272	58	10	associated	associated	ADJ
aiti-272	58	11	values	value	NOUN
aiti-272	58	12	used	use	VERB
aiti-272	58	13	in	in	ADP
aiti-272	58	14	eqs	eqs	X
aiti-272	58	15	(	(	PUNCT
aiti-272	58	16	1)-(4	1)-(4	NUM
aiti-272	58	17	)	)	PUNCT
aiti-272	58	18	.	.	PUNCT
aiti-272	59	1	the	the	DET
aiti-272	59	2	dynamic	dynamic	ADJ
aiti-272	59	3	equation	equation	NOUN
aiti-272	59	4	of	of	ADP
aiti-272	59	5	the	the	DET
aiti-272	59	6	single	single	ADJ
aiti-272	59	7	-	-	PUNCT
aiti-272	59	8	axis	axis	NOUN
aiti-272	59	9	feed	feed	NOUN
aiti-272	59	10	drive	drive	NOUN
aiti-272	59	11	system	system	NOUN
aiti-272	59	12	model	model	NOUN
aiti-272	59	13	with	with	ADP
aiti-272	59	14	varied	varied	ADJ
aiti-272	59	15	p	p	NOUN
aiti-272	59	16	reload	reload	NOUN
aiti-272	59	17	and	and	CCONJ
aiti-272	59	18	table	table	NOUN
aiti-272	59	19	mass	mass	NOUN
aiti-272	59	20	can	can	AUX
aiti-272	59	21	be	be	AUX
aiti-272	59	22	expressed	express	VERB
aiti-272	59	23	in	in	ADP
aiti-272	59	24	a	a	DET
aiti-272	59	25	compact	compact	ADJ
aiti-272	59	26	form	form	NOUN
aiti-272	59	27	:	:	PUNCT
aiti-272	60	1	[	[	X
aiti-272	60	2	𝑀]{	𝑀]{	ADJ
aiti-272	60	3	�	�	NOUN
aiti-272	60	4	̈	̈	X
aiti-272	60	5	�	�	NOUN
aiti-272	60	6	}	}	PUNCT
aiti-272	60	7	+	+	CCONJ
aiti-272	61	1	[	[	X
aiti-272	61	2	𝐶]{	𝐶]{	NOUN
aiti-272	61	3	�	�	NOUN
aiti-272	61	4	̇	̇	NOUN
aiti-272	61	5	�	�	PROPN
aiti-272	61	6	}	}	PUNCT
aiti-272	61	7	+	+	CCONJ
aiti-272	62	1	[	[	X
aiti-272	62	2	𝐾]{𝑢	𝐾]{𝑢	ADJ
aiti-272	62	3	}	}	PUNCT
aiti-272	62	4	=	=	SYM
aiti-272	62	5	𝑓	𝑓	X
aiti-272	62	6	(	(	PUNCT
aiti-272	62	7	6	6	NUM
aiti-272	62	8	)	)	PUNCT
aiti-272	62	9	where	where	SCONJ
aiti-272	62	10	[	[	X
aiti-272	62	11	m	m	X
aiti-272	62	12	]	]	X
aiti-272	62	13	,	,	PUNCT
aiti-272	62	14	[	[	X
aiti-272	62	15	c	c	X
aiti-272	62	16	]	]	X
aiti-272	62	17	,	,	PUNCT
aiti-272	62	18	and	and	CCONJ
aiti-272	62	19	[	[	X
aiti-272	62	20	k	k	X
aiti-272	62	21	]	]	X
aiti-272	62	22	are	be	AUX
aiti-272	62	23	the	the	DET
aiti-272	62	24	4x4	4x4	NUM
aiti-272	62	25	square	square	ADJ
aiti-272	62	26	matrices	matrix	NOUN
aiti-272	62	27	,	,	PUNCT
aiti-272	62	28	referred	refer	VERB
aiti-272	62	29	as	as	ADP
aiti-272	62	30	the	the	DET
aiti-272	62	31	mass	mass	NOUN
aiti-272	62	32	(	(	PUNCT
aiti-272	62	33	or	or	CCONJ
aiti-272	62	34	the	the	DET
aiti-272	62	35	moment	moment	NOUN
aiti-272	62	36	of	of	ADP
aiti-272	62	37	inertia	inertia	NOUN
aiti-272	62	38	)	)	PUNCT
aiti-272	62	39	,	,	PUNCT
aiti-272	62	40	the	the	DET
aiti-272	62	41	viscous	viscous	ADJ
aiti-272	62	42	damping	damping	NOUN
aiti-272	62	43	,	,	PUNCT
aiti-272	62	44	and	and	CCONJ
aiti-272	62	45	the	the	DET
aiti-272	62	46	stiffness	stiffness	ADJ
aiti-272	62	47	matrices	matrix	NOUN
aiti-272	62	48	,	,	PUNCT
aiti-272	62	49	respectively	respectively	ADV
aiti-272	62	50	.	.	PUNCT
aiti-272	63	1	{	{	PUNCT
aiti-272	63	2	u	u	NOUN
aiti-272	63	3	}	}	PUNCT
aiti-272	63	4	represents	represent	VERB
aiti-272	63	5	a	a	DET
aiti-272	63	6	four	four	NUM
aiti-272	63	7	degree	degree	NOUN
aiti-272	63	8	of	of	ADP
aiti-272	63	9	freedom	freedom	NOUN
aiti-272	63	10	model	model	NOUN
aiti-272	63	11	.	.	PUNCT
aiti-272	64	1	it	it	PRON
aiti-272	64	2	consists	consist	VERB
aiti-272	64	3	with	with	ADP
aiti-272	64	4	the	the	DET
aiti-272	64	5	xt	xt	PROPN
aiti-272	64	6	,	,	PUNCT
aiti-272	64	7	xb	xb	PROPN
aiti-272	64	8	,	,	PUNCT
aiti-272	64	9	θb	θb	NOUN
aiti-272	64	10	,	,	PUNCT
aiti-272	64	11	and	and	CCONJ
aiti-272	64	12	θm	θm	PROPN
aiti-272	64	13	for	for	ADP
aiti-272	64	14	the	the	DET
aiti-272	64	15	displacement	displacement	NOUN
aiti-272	64	16	of	of	ADP
aiti-272	64	17	the	the	DET
aiti-272	64	18	working	working	NOUN
aiti-272	64	19	table	table	NOUN
aiti-272	64	20	,	,	PUNCT
aiti-272	64	21	axial	axial	ADJ
aiti-272	64	22	displacement	displacement	NOUN
aiti-272	64	23	of	of	ADP
aiti-272	64	24	the	the	DET
aiti-272	64	25	ball	ball	NOUN
aiti-272	64	26	screw	screw	NOUN
aiti-272	64	27	,	,	PUNCT
aiti-272	64	28	rotation	rotation	NOUN
aiti-272	64	29	angle	angle	NOUN
aiti-272	64	30	of	of	ADP
aiti-272	64	31	the	the	DET
aiti-272	64	32	ball	ball	NOUN
aiti-272	64	33	screw	screw	NOUN
aiti-272	64	34	,	,	PUNCT
aiti-272	64	35	and	and	CCONJ
aiti-272	64	36	the	the	DET
aiti-272	64	37	rotation	rotation	NOUN
aiti-272	64	38	angle	angle	NOUN
aiti-272	64	39	of	of	ADP
aiti-272	64	40	the	the	DET
aiti-272	64	41	motor	motor	NOUN
aiti-272	64	42	,	,	PUNCT
aiti-272	64	43	respectively	respectively	ADV
aiti-272	64	44	.	.	PUNCT
aiti-272	65	1	table	table	NOUN
aiti-272	65	2	1	1	NUM
aiti-272	65	3	important	important	ADJ
aiti-272	65	4	parameters	parameter	NOUN
aiti-272	65	5	of	of	ADP
aiti-272	65	6	ball	ball	NOUN
aiti-272	65	7	screw	screw	NOUN
aiti-272	65	8	drive	drive	NOUN
aiti-272	65	9	system	system	NOUN
aiti-272	65	10	parameters	parameter	NOUN
aiti-272	65	11	value	value	VERB
aiti-272	65	12	working	working	NOUN
aiti-272	65	13	table	table	NOUN
aiti-272	65	14	mass	mass	PROPN
aiti-272	65	15	(	(	PUNCT
aiti-272	65	16	mt	mt	PROPN
aiti-272	65	17	)	)	PUNCT
aiti-272	65	18	47.09	47.09	NUM
aiti-272	65	19	kg	kg	NOUN
aiti-272	65	20	ball	ball	NOUN
aiti-272	65	21	screw	screw	VERB
aiti-272	65	22	mass	mass	PROPN
aiti-272	65	23	(	(	PUNCT
aiti-272	65	24	mb	mb	NOUN
aiti-272	65	25	)	)	PUNCT
aiti-272	65	26	9	9	NUM
aiti-272	65	27	kg	kg	NOUN
aiti-272	65	28	inertia	inertia	NOUN
aiti-272	65	29	moment	moment	NOUN
aiti-272	65	30	of	of	ADP
aiti-272	65	31	the	the	DET
aiti-272	65	32	motor	motor	NOUN
aiti-272	65	33	(	(	PUNCT
aiti-272	65	34	jm	jm	PROPN
aiti-272	65	35	)	)	PUNCT
aiti-272	65	36	4.45×	4.45×	NUM
aiti-272	65	37	10−4kgm2	10−4kgm2	NUM
aiti-272	65	38	inertia	inertia	NOUN
aiti-272	65	39	moment	moment	NOUN
aiti-272	65	40	of	of	ADP
aiti-272	65	41	the	the	DET
aiti-272	65	42	ball	ball	NOUN
aiti-272	65	43	screw	screw	NOUN
aiti-272	65	44	(	(	PUNCT
aiti-272	65	45	jb	jb	PROPN
aiti-272	65	46	)	)	PUNCT
aiti-272	65	47	1.3×	1.3×	NUM
aiti-272	65	48	10−3kgm2	10−3kgm2	NUM
aiti-272	65	49	equivalent	equivalent	ADJ
aiti-272	65	50	axial	axial	ADJ
aiti-272	65	51	stiffness	stiffness	NOUN
aiti-272	65	52	of	of	ADP
aiti-272	65	53	ball	ball	NOUN
aiti-272	65	54	screw	screw	NOUN
aiti-272	65	55	shaft	shaft	NOUN
aiti-272	65	56	(	(	PUNCT
aiti-272	65	57	ke	ke	NOUN
aiti-272	65	58	)	)	PUNCT
aiti-272	65	59	1.8663×	1.8663×	NUM
aiti-272	65	60	107n	107n	NUM
aiti-272	65	61	/	/	SYM
aiti-272	65	62	m	m	PROPN
aiti-272	65	63	stiffness	stiffness	NOUN
aiti-272	65	64	of	of	ADP
aiti-272	65	65	the	the	DET
aiti-272	65	66	ball	ball	NOUN
aiti-272	65	67	nut	nut	NOUN
aiti-272	65	68	(	(	PUNCT
aiti-272	65	69	kn	kn	PROPN
aiti-272	65	70	)	)	PUNCT
aiti-272	65	71	2.3345×	2.3345×	NUM
aiti-272	65	72	108n	108n	PROPN
aiti-272	65	73	/	/	SYM
aiti-272	65	74	m	m	NOUN
aiti-272	65	75	torsional	torsional	ADJ
aiti-272	65	76	stiffness	stiffness	NOUN
aiti-272	65	77	of	of	ADP
aiti-272	65	78	the	the	DET
aiti-272	65	79	ball	ball	NOUN
aiti-272	65	80	screw	screw	NOUN
aiti-272	65	81	(	(	PUNCT
aiti-272	65	82	kg	kg	PROPN
aiti-272	65	83	)	)	PUNCT
aiti-272	65	84	3.49×	3.49×	NUM
aiti-272	65	85	108n	108n	PROPN
aiti-272	65	86	/	/	SYM
aiti-272	65	87	m	m	PROPN
aiti-272	65	88	viscous	viscous	ADJ
aiti-272	65	89	damping	damp	VERB
aiti-272	65	90	coefficient	coefficient	NOUN
aiti-272	65	91	of	of	ADP
aiti-272	65	92	the	the	DET
aiti-272	65	93	guide	guide	NOUN
aiti-272	65	94	way	way	NOUN
aiti-272	65	95	of	of	ADP
aiti-272	65	96	the	the	DET
aiti-272	65	97	working	working	NOUN
aiti-272	65	98	table	table	NOUN
aiti-272	65	99	(	(	PUNCT
aiti-272	65	100	bt	bt	NOUN
aiti-272	65	101	)	)	PUNCT
aiti-272	65	102	10n	10n	NOUN
aiti-272	65	103	s	s	PART
aiti-272	65	104	/	/	SYM
aiti-272	65	105	m	m	VERB
aiti-272	65	106	viscous	viscous	ADJ
aiti-272	65	107	damping	damp	VERB
aiti-272	65	108	coefficient	coefficient	NOUN
aiti-272	65	109	of	of	ADP
aiti-272	65	110	the	the	DET
aiti-272	65	111	supporting	support	VERB
aiti-272	65	112	bearing	bearing	NOUN
aiti-272	65	113	of	of	ADP
aiti-272	65	114	the	the	DET
aiti-272	65	115	ball	ball	NOUN
aiti-272	65	116	screw	screw	NOUN
aiti-272	65	117	(	(	PUNCT
aiti-272	65	118	bb	bb	NOUN
aiti-272	65	119	)	)	PUNCT
aiti-272	65	120	10n	10n	NOUN
aiti-272	65	121	s	s	PART
aiti-272	65	122	/	/	SYM
aiti-272	65	123	m	m	NOUN
aiti-272	65	124	rotational	rotational	ADJ
aiti-272	65	125	viscous	viscous	ADJ
aiti-272	65	126	damping	damp	VERB
aiti-272	65	127	coefficient	coefficient	NOUN
aiti-272	65	128	of	of	ADP
aiti-272	65	129	the	the	DET
aiti-272	65	130	motor	motor	NOUN
aiti-272	65	131	(	(	PUNCT
aiti-272	65	132	qm	qm	PROPN
aiti-272	65	133	)	)	PUNCT
aiti-272	65	134	0n	0n	NOUN
aiti-272	65	135	ms	ms	ADJ
aiti-272	65	136	rotational	rotational	ADJ
aiti-272	65	137	viscous	viscous	ADJ
aiti-272	65	138	damping	damp	VERB
aiti-272	65	139	coefficient	coefficient	NOUN
aiti-272	65	140	of	of	ADP
aiti-272	65	141	the	the	DET
aiti-272	65	142	support	support	NOUN
aiti-272	65	143	bearing	bearing	NOUN
aiti-272	65	144	of	of	ADP
aiti-272	65	145	ball	ball	NOUN
aiti-272	65	146	screw	screw	NOUN
aiti-272	65	147	(	(	PUNCT
aiti-272	65	148	qb	qb	PROPN
aiti-272	65	149	)	)	PUNCT
aiti-272	65	150	0n	0n	NOUN
aiti-272	65	151	ms	ms	PROPN
aiti-272	65	152	angle	angle	PROPN
aiti-272	65	153	conversion	conversion	PROPN
aiti-272	65	154	axial	axial	ADJ
aiti-272	65	155	displacement	displacement	NOUN
aiti-272	65	156	of	of	ADP
aiti-272	65	157	the	the	DET
aiti-272	65	158	constant	constant	ADJ
aiti-272	65	159	(	(	PUNCT
aiti-272	65	160	r	r	NOUN
aiti-272	65	161	)	)	PUNCT
aiti-272	65	162	0.0025	0.0025	NUM
aiti-272	65	163	motor	motor	NOUN
aiti-272	65	164	torque	torque	NOUN
aiti-272	65	165	(	(	PUNCT
aiti-272	65	166	t	t	PROPN
aiti-272	65	167	)	)	PUNCT
aiti-272	65	168	1.8×	1.8×	NUM
aiti-272	65	169	10−3nm/𝑠2	10−3nm/𝑠2	NUM
aiti-272	65	170	displacement	displacement	NOUN
aiti-272	65	171	of	of	ADP
aiti-272	65	172	the	the	DET
aiti-272	65	173	working	working	NOUN
aiti-272	65	174	table	table	NOUN
aiti-272	65	175	(	(	PUNCT
aiti-272	65	176	xt	xt	NOUN
aiti-272	65	177	)	)	PUNCT
aiti-272	65	178	state	state	NOUN
aiti-272	65	179	variable	variable	NOUN
aiti-272	65	180	(	(	PUNCT
aiti-272	65	181	m	m	NOUN
aiti-272	65	182	)	)	PUNCT
aiti-272	65	183	axial	axial	ADJ
aiti-272	65	184	displacement	displacement	NOUN
aiti-272	65	185	of	of	ADP
aiti-272	65	186	the	the	DET
aiti-272	65	187	ball	ball	NOUN
aiti-272	65	188	screw	screw	NOUN
aiti-272	65	189	(	(	PUNCT
aiti-272	65	190	xb	xb	PROPN
aiti-272	65	191	)	)	PUNCT
aiti-272	65	192	state	state	NOUN
aiti-272	65	193	variable	variable	NOUN
aiti-272	65	194	(	(	PUNCT
aiti-272	65	195	m	m	NOUN
aiti-272	65	196	)	)	PUNCT
aiti-272	65	197	rotation	rotation	NOUN
aiti-272	65	198	angle	angle	NOUN
aiti-272	65	199	of	of	ADP
aiti-272	65	200	the	the	DET
aiti-272	65	201	motor	motor	NOUN
aiti-272	65	202	(	(	PUNCT
aiti-272	65	203	θm	θm	PROPN
aiti-272	65	204	)	)	PUNCT
aiti-272	65	205	state	state	NOUN
aiti-272	65	206	variable	variable	NOUN
aiti-272	65	207	(	(	PUNCT
aiti-272	65	208	rad	rad	NOUN
aiti-272	65	209	)	)	PUNCT
aiti-272	65	210	rotation	rotation	NOUN
aiti-272	65	211	angle	angle	NOUN
aiti-272	65	212	of	of	ADP
aiti-272	65	213	the	the	DET
aiti-272	65	214	ball	ball	NOUN
aiti-272	65	215	screw	screw	NOUN
aiti-272	65	216	(	(	PUNCT
aiti-272	65	217	θb	θb	NOUN
aiti-272	65	218	)	)	PUNCT
aiti-272	65	219	state	state	NOUN
aiti-272	65	220	variable	variable	NOUN
aiti-272	65	221	(	(	PUNCT
aiti-272	65	222	rad	rad	PROPN
aiti-272	65	223	)	)	PUNCT
aiti-272	65	224	the	the	DET
aiti-272	65	225	homogeneous	homogeneous	ADJ
aiti-272	65	226	solution	solution	NOUN
aiti-272	65	227	of	of	ADP
aiti-272	65	228	eqs	eqs	X
aiti-272	65	229	(	(	PUNCT
aiti-272	65	230	5	5	NUM
aiti-272	65	231	)	)	PUNCT
aiti-272	65	232	represents	represent	VERB
aiti-272	65	233	the	the	DET
aiti-272	65	234	transient	transient	ADJ
aiti-272	65	235	response	response	NOUN
aiti-272	65	236	of	of	ADP
aiti-272	65	237	the	the	DET
aiti-272	65	238	lumped	lump	VERB
aiti-272	65	239	system	system	NOUN
aiti-272	65	240	whereas	whereas	SCONJ
aiti-272	65	241	the	the	DET
aiti-272	65	242	forcing	force	VERB
aiti-272	65	243	function	function	NOUN
aiti-272	65	244	of	of	ADP
aiti-272	65	245	applied	apply	VERB
aiti-272	65	246	motor	motor	NOUN
aiti-272	65	247	torque	torque	NOUN
aiti-272	65	248	renders	render	VERB
aiti-272	65	249	the	the	DET
aiti-272	65	250	table	table	NOUN
aiti-272	65	251	positioning	positioning	NOUN
aiti-272	65	252	.	.	PUNCT
aiti-272	66	1	homogeneous	homogeneous	ADJ
aiti-272	66	2	solution	solution	NOUN
aiti-272	66	3	of	of	ADP
aiti-272	66	4	the	the	DET
aiti-272	66	5	equation	equation	NOUN
aiti-272	66	6	(	(	PUNCT
aiti-272	66	7	2.1.5	2.1.5	NUM
aiti-272	66	8	)	)	PUNCT
aiti-272	66	9	results	result	NOUN
aiti-272	66	10	in	in	ADP
aiti-272	66	11	four	four	NUM
aiti-272	66	12	eigenvectors	eigenvector	NOUN
aiti-272	66	13	v1	v1	NOUN
aiti-272	66	14	,	,	PUNCT
aiti-272	66	15	v2	v2	PROPN
aiti-272	66	16	,	,	PUNCT
aiti-272	66	17	v3	v3	PROPN
aiti-272	66	18	,	,	PUNCT
aiti-272	66	19	and	and	CCONJ
aiti-272	66	20	v4	v4	NOUN
aiti-272	66	21	associated	associate	VERB
aiti-272	66	22	with	with	ADP
aiti-272	66	23	each	each	DET
aiti-272	66	24	eigenvalue	eigenvalue	PROPN
aiti-272	66	25	(	(	PUNCT
aiti-272	66	26	λ	λ	NOUN
aiti-272	66	27	=	=	SYM
aiti-272	66	28	ω2	ω2	ADJ
aiti-272	66	29	)	)	PUNCT
aiti-272	66	30	of	of	ADP
aiti-272	66	31	3.2124	3.2124	NUM
aiti-272	66	32	×	×	NOUN
aiti-272	66	33	104	104	NUM
aiti-272	66	34	,	,	PUNCT
aiti-272	66	35	3.3322	3.3322	NUM
aiti-272	66	36	×	×	NOUN
aiti-272	66	37	106	106	NUM
aiti-272	66	38	,	,	PUNCT
aiti-272	66	39	1.0699	1.0699	NUM
aiti-272	66	40	×	×	NOUN
aiti-272	66	41	1011	1011	NUM
aiti-272	66	42	,	,	PUNCT
aiti-272	66	43	3.421	3.421	NUM
aiti-272	66	44	×	×	NOUN
aiti-272	66	45	107(rad2	107(rad2	NUM
aiti-272	66	46	/	/	SYM
aiti-272	66	47	s2	s2	PROPN
aiti-272	66	48	)	)	PUNCT
aiti-272	66	49	.	.	PUNCT
aiti-272	67	1	v1=	v1=	NOUN
aiti-272	67	2	{	{	PUNCT
aiti-272	67	3	−0.7299	−0.7299	NOUN
aiti-272	67	4	−0.6836	−0.6836	X
aiti-272	67	5	0	0	NUM
aiti-272	67	6	0	0	NUM
aiti-272	67	7	}	}	PUNCT
aiti-272	67	8	v2=	v2=	NOUN
aiti-272	67	9	{	{	PUNCT
aiti-272	67	10	0.1762	0.1762	NUM
aiti-272	67	11	−0.9844	−0.9844	NOUN
aiti-272	67	12	0	0	NUM
aiti-272	67	13	0	0	NUM
aiti-272	67	14	}	}	PUNCT
aiti-272	67	15	v3	v3	PROPN
aiti-272	67	16	=	=	PROPN
aiti-272	67	17	{	{	PUNCT
aiti-272	67	18	0	0	NUM
aiti-272	67	19	0	0	NUM
aiti-272	67	20	0.9482	0.9482	NUM
aiti-272	67	21	−0.3176	−0.3176	PROPN
aiti-272	67	22	}	}	PUNCT
aiti-272	67	23	v4=	v4=	PROPN
aiti-272	67	24	{	{	PUNCT
aiti-272	67	25	0	0	NUM
aiti-272	67	26	0	0	NUM
aiti-272	67	27	0.7067	0.7067	NUM
aiti-272	67	28	0.7076	0.7076	NUM
aiti-272	67	29	}	}	PUNCT
aiti-272	67	30	(	(	PUNCT
aiti-272	67	31	7	7	X
aiti-272	67	32	)	)	PUNCT
aiti-272	67	33	the	the	DET
aiti-272	67	34	four	four	NUM
aiti-272	67	35	eigenvectors	eigenvector	NOUN
aiti-272	67	36	corresponding	correspond	VERB
aiti-272	67	37	to	to	ADP
aiti-272	67	38	the	the	DET
aiti-272	67	39	eigen	eigen	PROPN
aiti-272	67	40	frequencies	frequency	NOUN
aiti-272	67	41	of	of	ADP
aiti-272	67	42	28.52	28.52	NUM
aiti-272	67	43	hz	hz	NOUN
aiti-272	67	44	,	,	PUNCT
aiti-272	67	45	290.52	290.52	NUM
aiti-272	67	46	hz	hz	NOUN
aiti-272	67	47	,	,	PUNCT
aiti-272	67	48	52059	52059	NUM
aiti-272	67	49	hz	hz	AUX
aiti-272	67	50	,	,	PUNCT
aiti-272	67	51	930.9	930.9	NUM
aiti-272	67	52	hz	hz	VERB
aiti-272	67	53	w	w	PROPN
aiti-272	67	54	is	be	AUX
aiti-272	67	55	calculated	calculate	VERB
aiti-272	67	56	by	by	ADP
aiti-272	67	57	2	2	NUM
aiti-272	67	58	%	%	NOUN
aiti-272	67	59	of	of	ADP
aiti-272	67	60	the	the	DET
aiti-272	67	61	rated	rate	VERB
aiti-272	67	62	dynamic	dynamic	ADJ
aiti-272	67	63	load	load	NOUN
aiti-272	67	64	.	.	PUNCT
aiti-272	68	1	these	these	DET
aiti-272	68	2	eigenvectors	eigenvector	NOUN
aiti-272	68	3	represent	represent	VERB
aiti-272	68	4	the	the	DET
aiti-272	68	5	mode	mode	NOUN
aiti-272	68	6	shapes	shape	NOUN
aiti-272	68	7	of	of	ADP
aiti-272	68	8	the	the	DET
aiti-272	68	9	ball	ball	NOUN
aiti-272	68	10	screw	screw	VERB
aiti-272	68	11	feed	feed	NOUN
aiti-272	68	12	drive	drive	NOUN
aiti-272	68	13	system	system	NOUN
aiti-272	68	14	.	.	PUNCT
aiti-272	69	1	the	the	DET
aiti-272	69	2	first	first	ADJ
aiti-272	69	3	three	three	NUM
aiti-272	69	4	significant	significant	ADJ
aiti-272	69	5	eigen	eigen	NOUN
aiti-272	69	6	frequencies	frequency	NOUN
aiti-272	69	7	are	be	AUX
aiti-272	69	8	related	relate	VERB
aiti-272	69	9	to	to	ADP
aiti-272	69	10	the	the	DET
aiti-272	69	11	three	three	NUM
aiti-272	69	12	resonant	resonant	ADJ
aiti-272	69	13	frequencies	frequency	NOUN
aiti-272	69	14	.	.	PUNCT
aiti-272	70	1	the	the	DET
aiti-272	70	2	first	first	ADJ
aiti-272	70	3	and	and	CCONJ
aiti-272	70	4	second	second	ADJ
aiti-272	70	5	modes	mode	NOUN
aiti-272	70	6	are	be	AUX
aiti-272	70	7	from	from	ADP
aiti-272	70	8	the	the	DET
aiti-272	70	9	axial	axial	ADJ
aiti-272	70	10	vibration	vibration	NOUN
aiti-272	70	11	.	.	PUNCT
aiti-272	71	1	the	the	DET
aiti-272	71	2	third	third	ADJ
aiti-272	71	3	mode	mode	NOUN
aiti-272	71	4	is	be	AUX
aiti-272	71	5	from	from	ADP
aiti-272	71	6	the	the	DET
aiti-272	71	7	torsional	torsional	ADJ
aiti-272	71	8	vibration	vibration	NOUN
aiti-272	71	9	.	.	PUNCT
aiti-272	72	1	in	in	ADP
aiti-272	72	2	eqs	eqs	X
aiti-272	72	3	(	(	PUNCT
aiti-272	72	4	7	7	NUM
aiti-272	72	5	)	)	PUNCT
aiti-272	72	6	,	,	PUNCT
aiti-272	72	7	the	the	DET
aiti-272	72	8	first	first	ADJ
aiti-272	72	9	mode	mode	NOUN
aiti-272	72	10	of	of	ADP
aiti-272	72	11	the	the	DET
aiti-272	72	12	working	working	NOUN
aiti-272	72	13	table	table	NOUN
aiti-272	72	14	and	and	CCONJ
aiti-272	72	15	the	the	DET
aiti-272	72	16	ball	ball	NOUN
aiti-272	72	17	screw	screw	NOUN
aiti-272	72	18	is	be	AUX
aiti-272	72	19	moving	move	VERB
aiti-272	72	20	in	in	ADP
aiti-272	72	21	phase	phase	NOUN
aiti-272	72	22	while	while	SCONJ
aiti-272	72	23	the	the	DET
aiti-272	72	24	second	second	ADJ
aiti-272	72	25	mode	mode	NOUN
aiti-272	72	26	is	be	AUX
aiti-272	72	27	moving	move	VERB
aiti-272	72	28	out	out	ADP
aiti-272	72	29	of	of	ADP
aiti-272	72	30	phase	phase	NOUN
aiti-272	72	31	.	.	PUNCT
aiti-272	73	1	fig	fig	NOUN
aiti-272	73	2	.	.	PUNCT
aiti-272	74	1	3	3	NUM
aiti-272	74	2	shows	show	VERB
aiti-272	74	3	the	the	DET
aiti-272	74	4	bode	bode	ADJ
aiti-272	74	5	plot	plot	NOUN
aiti-272	74	6	of	of	ADP
aiti-272	74	7	the	the	DET
aiti-272	74	8	dynamic	dynamic	ADJ
aiti-272	74	9	system	system	NOUN
aiti-272	74	10	based	base	VERB
aiti-272	74	11	on	on	ADP
aiti-272	74	12	different	different	ADJ
aiti-272	74	13	kn	kn	PROPN
aiti-272	74	14	values	value	NOUN
aiti-272	74	15	.	.	PUNCT
aiti-272	75	1	the	the	DET
aiti-272	75	2	preload	preload	NOUN
aiti-272	75	3	variation	variation	NOUN
aiti-272	75	4	is	be	AUX
aiti-272	75	5	simulated	simulate	VERB
aiti-272	75	6	from	from	ADP
aiti-272	75	7	2	2	NUM
aiti-272	75	8	%	%	NOUN
aiti-272	75	9	,	,	PUNCT
aiti-272	75	10	4	4	NUM
aiti-272	75	11	%	%	NOUN
aiti-272	75	12	,	,	PUNCT
aiti-272	75	13	6	6	NUM
aiti-272	75	14	%	%	NOUN
aiti-272	75	15	,	,	PUNCT
aiti-272	75	16	8	8	NUM
aiti-272	75	17	%	%	NOUN
aiti-272	75	18	to	to	PART
aiti-272	75	19	10	10	NUM
aiti-272	75	20	%	%	NOUN
aiti-272	75	21	of	of	ADP
aiti-272	75	22	the	the	DET
aiti-272	75	23	rated	rate	VERB
aiti-272	75	24	dynamic	dynamic	ADJ
aiti-272	75	25	loading	loading	NOUN
aiti-272	75	26	of	of	ADP
aiti-272	75	27	the	the	DET
aiti-272	75	28	ball	ball	NOUN
aiti-272	75	29	screw	screw	NOUN
aiti-272	75	30	.	.	PUNCT
aiti-272	76	1	fig	fig	NOUN
aiti-272	76	2	.	.	PUNCT
aiti-272	77	1	3	3	NUM
aiti-272	77	2	bode	bode	ADJ
aiti-272	77	3	plot	plot	NOUN
aiti-272	77	4	of	of	ADP
aiti-272	77	5	the	the	DET
aiti-272	77	6	ball	ball	NOUN
aiti-272	77	7	screw	screw	NOUN
aiti-272	77	8	drive	drive	NOUN
aiti-272	77	9	system	system	NOUN
aiti-272	77	10	based	base	VERB
aiti-272	77	11	on	on	ADP
aiti-272	77	12	the	the	DET
aiti-272	77	13	preload	preload	NOUN
aiti-272	77	14	value	value	NOUN
aiti-272	77	15	of	of	ADP
aiti-272	77	16	2%(blue	2%(blue	NUM
aiti-272	77	17	)	)	PUNCT
aiti-272	77	18	,	,	PUNCT
aiti-272	77	19	4%(green	4%(green	NUM
aiti-272	77	20	)	)	PUNCT
aiti-272	77	21	,	,	PUNCT
aiti-272	77	22	6%(red	6%(red	NUM
aiti-272	77	23	)	)	PUNCT
aiti-272	77	24	,	,	PUNCT
aiti-272	77	25	8%(cyan	8%(cyan	NUM
aiti-272	77	26	)	)	PUNCT
aiti-272	77	27	and	and	CCONJ
aiti-272	77	28	10%(purple	10%(purple	NUM
aiti-272	77	29	)	)	PUNCT
aiti-272	77	30	of	of	ADP
aiti-272	77	31	the	the	DET
aiti-272	77	32	rated	rate	VERB
aiti-272	77	33	dynamic	dynamic	ADJ
aiti-272	77	34	loading	loading	NOUN
aiti-272	77	35	advances	advance	NOUN
aiti-272	77	36	in	in	ADP
aiti-272	77	37	technology	technology	NOUN
aiti-272	77	38	innovation	innovation	NOUN
aiti-272	77	39	,	,	PUNCT
aiti-272	77	40	vol	vol	NOUN
aiti-272	77	41	.	.	PROPN
aiti-272	77	42	2	2	NUM
aiti-272	77	43	,	,	PUNCT
aiti-272	77	44	no	no	INTJ
aiti-272	77	45	.	.	NOUN
aiti-272	77	46	2	2	NUM
aiti-272	77	47	,	,	PUNCT
aiti-272	77	48	2017	2017	NUM
aiti-272	77	49	,	,	PUNCT
aiti-272	77	50	pp	pp	ADJ
aiti-272	77	51	.	.	PUNCT
aiti-272	78	1	29	29	NUM
aiti-272	78	2	33	33	NUM
aiti-272	78	3	32	32	NUM
aiti-272	78	4	copyright	copyright	NOUN
aiti-272	78	5	©	©	ADP
aiti-272	78	6	taeti	taeti	PROPN
aiti-272	78	7	enlargement	enlargement	NOUN
aiti-272	78	8	of	of	ADP
aiti-272	78	9	the	the	DET
aiti-272	78	10	first	first	ADJ
aiti-272	78	11	,	,	PUNCT
aiti-272	78	12	second	second	ADJ
aiti-272	78	13	and	and	CCONJ
aiti-272	78	14	third	third	ADJ
aiti-272	78	15	modes	mode	NOUN
aiti-272	78	16	of	of	ADP
aiti-272	78	17	the	the	DET
aiti-272	78	18	bode	bode	ADJ
aiti-272	78	19	plot	plot	NOUN
aiti-272	78	20	,	,	PUNCT
aiti-272	78	21	the	the	DET
aiti-272	78	22	three	three	NUM
aiti-272	78	23	frequencies	frequency	NOUN
aiti-272	78	24	are	be	AUX
aiti-272	78	25	ranging	range	VERB
aiti-272	78	26	from	from	ADP
aiti-272	78	27	30.5	30.5	NUM
aiti-272	78	28	hz	hz	NOUN
aiti-272	78	29	to	to	ADP
aiti-272	78	30	30.8	30.8	NUM
aiti-272	78	31	hz	hz	NOUN
aiti-272	78	32	,	,	PUNCT
aiti-272	78	33	294	294	NUM
aiti-272	78	34	hz	hz	VERB
aiti-272	78	35	to	to	ADP
aiti-272	78	36	380	380	NUM
aiti-272	78	37	hz	hz	NOUN
aiti-272	78	38	and	and	CCONJ
aiti-272	78	39	52000	52000	NUM
aiti-272	78	40	hz	hz	VERB
aiti-272	78	41	to	to	ADP
aiti-272	78	42	55000	55000	NUM
aiti-272	78	43	hz	hz	VERB
aiti-272	78	44	respectively	respectively	ADV
aiti-272	78	45	.	.	PUNCT
aiti-272	79	1	it	it	PRON
aiti-272	79	2	is	be	AUX
aiti-272	79	3	obvious	obvious	ADJ
aiti-272	79	4	that	that	SCONJ
aiti-272	79	5	the	the	DET
aiti-272	79	6	second	second	ADJ
aiti-272	79	7	translational	translational	ADJ
aiti-272	79	8	mode	mode	NOUN
aiti-272	79	9	will	will	AUX
aiti-272	79	10	be	be	AUX
aiti-272	79	11	affected	affect	VERB
aiti-272	79	12	more	more	ADJ
aiti-272	79	13	than	than	ADP
aiti-272	79	14	the	the	DET
aiti-272	79	15	first	first	ADJ
aiti-272	79	16	mode	mode	NOUN
aiti-272	79	17	when	when	SCONJ
aiti-272	79	18	the	the	DET
aiti-272	79	19	ball	ball	NOUN
aiti-272	79	20	nut	nut	NOUN
aiti-272	79	21	preload	preload	NOUN
aiti-272	79	22	is	be	AUX
aiti-272	79	23	vary	vary	ADJ
aiti-272	79	24	ing	ing	ADJ
aiti-272	79	25	.	.	PUNCT
aiti-272	80	1	the	the	DET
aiti-272	80	2	solution	solution	NOUN
aiti-272	80	3	of	of	ADP
aiti-272	80	4	the	the	DET
aiti-272	80	5	fourth	fourth	ADJ
aiti-272	80	6	mode	mode	NOUN
aiti-272	80	7	is	be	AUX
aiti-272	80	8	about	about	ADV
aiti-272	80	9	930	930	NUM
aiti-272	80	10	hz	hz	VERB
aiti-272	80	11	,	,	PUNCT
aiti-272	80	12	the	the	DET
aiti-272	80	13	contribution	contribution	NOUN
aiti-272	80	14	of	of	ADP
aiti-272	80	15	this	this	DET
aiti-272	80	16	mode	mode	NOUN
aiti-272	80	17	is	be	AUX
aiti-272	80	18	not	not	PART
aiti-272	80	19	significant	significant	ADJ
aiti-272	80	20	even	even	ADV
aiti-272	80	21	though	though	SCONJ
aiti-272	80	22	the	the	DET
aiti-272	80	23	preload	preload	NOUN
aiti-272	80	24	is	be	AUX
aiti-272	80	25	varied	varied	ADJ
aiti-272	80	26	.	.	PUNCT
aiti-272	81	1	fig	fig	NOUN
aiti-272	81	2	.	.	PUNCT
aiti-272	82	1	4	4	NUM
aiti-272	82	2	the	the	DET
aiti-272	82	3	enlargement	enlargement	NOUN
aiti-272	82	4	of	of	ADP
aiti-272	82	5	the	the	DET
aiti-272	82	6	first	first	ADJ
aiti-272	82	7	mode	mode	NOUN
aiti-272	82	8	of	of	ADP
aiti-272	82	9	the	the	DET
aiti-272	82	10	bode	bode	ADJ
aiti-272	82	11	plot	plot	NOUN
aiti-272	82	12	in	in	ADP
aiti-272	82	13	fig	fig	NOUN
aiti-272	82	14	.	.	PUNCT
aiti-272	83	1	3	3	NUM
aiti-272	83	2	based	base	VERB
aiti-272	83	3	on	on	ADP
aiti-272	83	4	different	different	ADJ
aiti-272	83	5	ball	ball	NOUN
aiti-272	83	6	nut	nut	NOUN
aiti-272	83	7	stiffness	stiffness	ADJ
aiti-272	83	8	fig	fig	NOUN
aiti-272	83	9	.	.	PUNCT
aiti-272	84	1	5	5	NUM
aiti-272	85	1	the	the	DET
aiti-272	85	2	enlargement	enlargement	NOUN
aiti-272	85	3	o	o	NOUN
aiti-272	85	4	f	f	NOUN
aiti-272	85	5	the	the	DET
aiti-272	85	6	second	second	ADJ
aiti-272	85	7	mode	mode	NOUN
aiti-272	85	8	of	of	ADP
aiti-272	85	9	the	the	DET
aiti-272	85	10	bode	bode	ADJ
aiti-272	85	11	plot	plot	NOUN
aiti-272	85	12	in	in	ADP
aiti-272	85	13	fig	fig	NOUN
aiti-272	85	14	.	.	PUNCT
aiti-272	86	1	3	3	NUM
aiti-272	87	1	based	base	VERB
aiti-272	87	2	on	on	ADP
aiti-272	87	3	different	different	ADJ
aiti-272	87	4	ball	ball	NOUN
aiti-272	87	5	but	but	CCONJ
aiti-272	87	6	stiffness	stiffness	ADJ
aiti-272	87	7	fig	fig	NOUN
aiti-272	87	8	.	.	PUNCT
aiti-272	88	1	6	6	NUM
aiti-272	88	2	the	the	DET
aiti-272	88	3	en	en	X
aiti-272	88	4	largement	largement	NOUN
aiti-272	88	5	of	of	ADP
aiti-272	88	6	the	the	DET
aiti-272	88	7	third	third	ADJ
aiti-272	88	8	mode	mode	NOUN
aiti-272	88	9	of	of	ADP
aiti-272	88	10	bode	bode	ADJ
aiti-272	88	11	plot	plot	NOUN
aiti-272	88	12	in	in	ADP
aiti-272	88	13	fig	fig	NOUN
aiti-272	88	14	.	.	PUNCT
aiti-272	89	1	3	3	NUM
aiti-272	89	2	based	base	VERB
aiti-272	89	3	on	on	ADP
aiti-272	89	4	different	different	ADJ
aiti-272	89	5	ball	ball	NOUN
aiti-272	89	6	nut	nut	NOUN
aiti-272	89	7	stiffness	stiffness	NOUN
aiti-272	89	8	as	as	SCONJ
aiti-272	89	9	stated	state	VERB
aiti-272	90	1	,	,	PUNCT
aiti-272	90	2	the	the	DET
aiti-272	90	3	third	third	ADJ
aiti-272	90	4	eigenvector	eigenvector	NOUN
aiti-272	90	5	indicates	indicate	VERB
aiti-272	90	6	the	the	DET
aiti-272	90	7	torsional	torsional	ADJ
aiti-272	90	8	vibration	vibration	NOUN
aiti-272	90	9	.	.	PUNCT
aiti-272	91	1	since	since	SCONJ
aiti-272	91	2	the	the	DET
aiti-272	91	3	servo	servo	NOUN
aiti-272	91	4	motor	motor	NOUN
aiti-272	91	5	drives	drive	VERB
aiti-272	91	6	the	the	DET
aiti-272	91	7	ball	ball	NOUN
aiti-272	91	8	screw	screw	VERB
aiti-272	91	9	through	through	ADP
aiti-272	91	10	a	a	DET
aiti-272	91	11	coupler	coupler	NOUN
aiti-272	91	12	providing	provide	VERB
aiti-272	91	13	damping	damp	VERB
aiti-272	91	14	and	and	CCONJ
aiti-272	91	15	stiffness	stiffness	NOUN
aiti-272	91	16	.	.	PUNCT
aiti-272	92	1	the	the	DET
aiti-272	92	2	torsional	torsional	ADJ
aiti-272	92	3	stiffness	stiffness	NOUN
aiti-272	92	4	of	of	ADP
aiti-272	92	5	the	the	DET
aiti-272	92	6	ball	ball	NOUN
aiti-272	92	7	screw	screw	NOUN
aiti-272	92	8	is	be	AUX
aiti-272	92	9	investigated	investigate	VERB
aiti-272	92	10	by	by	ADP
aiti-272	92	11	calculating	calculate	VERB
aiti-272	92	12	kg	kg	X
aiti-272	92	13	by	by	ADP
aiti-272	92	14	πdr	πdr	PROPN
aiti-272	92	15	4g/32l	4g/32l	PROPN
aiti-272	92	16	.	.	PUNCT
aiti-272	93	1	fig	fig	NOUN
aiti-272	93	2	.	.	PUNCT
aiti-272	94	1	7	7	NUM
aiti-272	94	2	shows	show	VERB
aiti-272	94	3	the	the	DET
aiti-272	94	4	variations	variation	NOUN
aiti-272	94	5	of	of	ADP
aiti-272	94	6	kg	kg	NOUN
aiti-272	94	7	in	in	ADP
aiti-272	94	8	the	the	DET
aiti-272	94	9	range	range	NOUN
aiti-272	94	10	of	of	ADP
aiti-272	94	11	±	±	NUM
aiti-272	94	12	10	10	NUM
aiti-272	94	13	%	%	NOUN
aiti-272	94	14	.	.	PUNCT
aiti-272	95	1	as	as	SCONJ
aiti-272	95	2	shown	show	VERB
aiti-272	95	3	,	,	PUNCT
aiti-272	95	4	the	the	DET
aiti-272	95	5	third	third	ADJ
aiti-272	95	6	mode	mode	NOUN
aiti-272	95	7	demonstrates	demonstrate	VERB
aiti-272	95	8	large	large	ADJ
aiti-272	95	9	frequency	frequency	NOUN
aiti-272	95	10	shift	shift	NOUN
aiti-272	95	11	with	with	ADP
aiti-272	95	12	increasing	increase	VERB
aiti-272	95	13	the	the	DET
aiti-272	95	14	torsional	torsional	ADJ
aiti-272	95	15	stiffness	stiffness	NOUN
aiti-272	95	16	of	of	ADP
aiti-272	95	17	the	the	DET
aiti-272	95	18	ball	ball	NOUN
aiti-272	95	19	screw	screw	NOUN
aiti-272	95	20	.	.	PUNCT
aiti-272	96	1	fig	fig	NOUN
aiti-272	96	2	.	.	PUNCT
aiti-272	96	3	8	8	NUM
aiti-272	96	4	indicates	indicate	VERB
aiti-272	96	5	the	the	DET
aiti-272	96	6	frequency	frequency	NOUN
aiti-272	96	7	shift	shift	NOUN
aiti-272	96	8	is	be	AUX
aiti-272	96	9	range	range	NOUN
aiti-272	96	10	from	from	ADP
aiti-272	96	11	50700	50700	NUM
aiti-272	96	12	hz	hz	VERB
aiti-272	96	13	to	to	ADP
aiti-272	96	14	58000	58000	NUM
aiti-272	96	15	hz	hz	NOUN
aiti-272	96	16	,	,	PUNCT
aiti-272	96	17	while	while	SCONJ
aiti-272	96	18	the	the	DET
aiti-272	96	19	first	first	ADJ
aiti-272	96	20	and	and	CCONJ
aiti-272	96	21	second	second	ADJ
aiti-272	96	22	modes	mode	NOUN
aiti-272	96	23	are	be	AUX
aiti-272	96	24	not	not	PART
aiti-272	96	25	changed	change	VERB
aiti-272	96	26	noticeably	noticeably	ADV
aiti-272	96	27	.	.	PUNCT
aiti-272	97	1	fig	fig	NOUN
aiti-272	97	2	.	.	PUNCT
aiti-272	98	1	7	7	NUM
aiti-272	98	2	bode	bode	ADJ
aiti-272	98	3	plot	plot	NOUN
aiti-272	98	4	of	of	ADP
aiti-272	98	5	the	the	DET
aiti-272	98	6	ball	ball	NOUN
aiti-272	98	7	screw	screw	VERB
aiti-272	98	8	torsional	torsional	ADJ
aiti-272	98	9	stiffness	stiffness	NOUN
aiti-272	98	10	100	100	NUM
aiti-272	98	11	%	%	NOUN
aiti-272	98	12	(	(	PUNCT
aiti-272	98	13	blue	blue	NOUN
aiti-272	98	14	)	)	PUNCT
aiti-272	98	15	,	,	PUNCT
aiti-272	98	16	105%(green	105%(green	NUM
aiti-272	98	17	)	)	PUNCT
aiti-272	98	18	,	,	PUNCT
aiti-272	98	19	110%(red	110%(red	NUM
aiti-272	98	20	)	)	PUNCT
aiti-272	98	21	,	,	PUNCT
aiti-272	98	22	95%(cyan	95%(cyan	NUM
aiti-272	98	23	)	)	PUNCT
aiti-272	98	24	,	,	PUNCT
aiti-272	98	25	90	90	NUM
aiti-272	98	26	%	%	NOUN
aiti-272	98	27	(	(	PUNCT
aiti-272	98	28	purple	purple	ADJ
aiti-272	98	29	)	)	PUNCT
aiti-272	98	30	fig	fig	NOUN
aiti-272	98	31	.	.	PUNCT
aiti-272	99	1	8	8	NUM
aiti-272	100	1	the	the	DET
aiti-272	100	2	enlargement	enlargement	NOUN
aiti-272	100	3	of	of	ADP
aiti-272	100	4	the	the	DET
aiti-272	100	5	torsional	torsional	ADJ
aiti-272	100	6	mode	mode	NOUN
aiti-272	100	7	of	of	ADP
aiti-272	100	8	the	the	DET
aiti-272	100	9	bode	bode	ADJ
aiti-272	100	10	plot	plot	NOUN
aiti-272	100	11	in	in	ADP
aiti-272	100	12	fig	fig	NOUN
aiti-272	100	13	.	.	PUNCT
aiti-272	101	1	7	7	NUM
aiti-272	101	2	based	base	VERB
aiti-272	101	3	on	on	ADP
aiti-272	101	4	different	different	ADJ
aiti-272	101	5	ball	ball	NOUN
aiti-272	101	6	screw	screw	VERB
aiti-272	101	7	torsional	torsional	ADJ
aiti-272	101	8	stiffness	stiffness	ADJ
aiti-272	101	9	figs	fig	NOUN
aiti-272	101	10	.	.	PUNCT
aiti-272	102	1	9	9	NUM
aiti-272	102	2	-	-	SYM
aiti-272	102	3	11	11	NUM
aiti-272	102	4	detail	detail	NOUN
aiti-272	102	5	the	the	DET
aiti-272	102	6	effect	effect	NOUN
aiti-272	102	7	of	of	ADP
aiti-272	102	8	the	the	DET
aiti-272	102	9	table	table	NOUN
aiti-272	102	10	mass	mass	PROPN
aiti-272	102	11	.	.	PUNCT
aiti-272	103	1	the	the	DET
aiti-272	103	2	characteristic	characteristic	ADJ
aiti-272	103	3	frequency	frequency	NOUN
aiti-272	103	4	shifts	shift	NOUN
aiti-272	103	5	from	from	ADP
aiti-272	103	6	the	the	DET
aiti-272	103	7	24hz	24hz	ADJ
aiti-272	103	8	to	to	ADP
aiti-272	103	9	30.5hz	30.5hz	NUM
aiti-272	103	10	when	when	SCONJ
aiti-272	103	11	the	the	DET
aiti-272	103	12	table	table	NOUN
aiti-272	103	13	mass	mass	NOUN
aiti-272	103	14	increases	increase	VERB
aiti-272	103	15	from	from	ADP
aiti-272	103	16	47.09	47.09	NUM
aiti-272	103	17	kg	kg	NOUN
aiti-272	103	18	to	to	ADP
aiti-272	103	19	94.18	94.18	NUM
aiti-272	103	20	kg	kg	NOUN
aiti-272	103	21	.	.	PUNCT
aiti-272	104	1	as	as	SCONJ
aiti-272	104	2	predicted	predict	VERB
aiti-272	104	3	,	,	PUNCT
aiti-272	104	4	the	the	DET
aiti-272	104	5	table	table	NOUN
aiti-272	104	6	mass	mass	NOUN
aiti-272	104	7	preserves	preserve	VERB
aiti-272	104	8	the	the	DET
aiti-272	104	9	effect	effect	NOUN
aiti-272	104	10	on	on	ADP
aiti-272	104	11	the	the	DET
aiti-272	104	12	first	first	ADJ
aiti-272	104	13	bandwidth	bandwidth	NOUN
aiti-272	104	14	in	in	ADP
aiti-272	104	15	the	the	DET
aiti-272	104	16	translational	translational	ADJ
aiti-272	104	17	mode	mode	NOUN
aiti-272	104	18	and	and	CCONJ
aiti-272	104	19	some	some	DET
aiti-272	104	20	effect	effect	NOUN
aiti-272	104	21	on	on	ADP
aiti-272	104	22	the	the	DET
aiti-272	104	23	second	second	ADJ
aiti-272	104	24	mode	mode	NOUN
aiti-272	104	25	.	.	PUNCT
aiti-272	105	1	increasing	increase	VERB
aiti-272	105	2	table	table	NOUN
aiti-272	105	3	mass	mass	NOUN
aiti-272	105	4	does	do	AUX
aiti-272	105	5	not	not	PART
aiti-272	105	6	affect	affect	VERB
aiti-272	105	7	the	the	DET
aiti-272	105	8	bandwidth	bandwidth	NOUN
aiti-272	105	9	of	of	ADP
aiti-272	105	10	the	the	DET
aiti-272	105	11	third	third	ADJ
aiti-272	105	12	torsional	torsional	ADJ
aiti-272	105	13	mode	mode	NOUN
aiti-272	105	14	.	.	PUNCT
aiti-272	106	1	fig	fig	NOUN
aiti-272	106	2	.	.	PUNCT
aiti-272	107	1	12	12	NUM
aiti-272	107	2	shows	show	VERB
aiti-272	107	3	the	the	DET
aiti-272	107	4	numerical	numerical	PROPN
aiti-272	107	5	simulation	simulation	PROPN
aiti-272	107	6	plot	plot	NOUN
aiti-272	107	7	of	of	ADP
aiti-272	107	8	the	the	DET
aiti-272	107	9	convergence	convergence	NOUN
aiti-272	107	10	error	error	NOUN
aiti-272	107	11	when	when	SCONJ
aiti-272	107	12	the	the	DET
aiti-272	107	13	ball	ball	NOUN
aiti-272	107	14	screw	screw	ADJ
aiti-272	107	15	drive	drive	NOUN
aiti-272	107	16	system	system	NOUN
aiti-272	107	17	is	be	AUX
aiti-272	107	18	controlled	control	VERB
aiti-272	107	19	by	by	ADP
aiti-272	107	20	hybrid	hybrid	ADJ
aiti-272	107	21	particle	particle	NOUN
aiti-272	107	22	swarm	swarm	NOUN
aiti-272	107	23	optimization	optimization	NOUN
aiti-272	107	24	for	for	ADP
aiti-272	107	25	the	the	DET
aiti-272	107	26	dynamic	dynamic	ADJ
aiti-272	107	27	bandwidth	bandwidth	NOUN
aiti-272	107	28	tuning	tuning	NOUN
aiti-272	107	29	of	of	ADP
aiti-272	107	30	an	an	DET
aiti-272	107	31	iterative	iterative	NOUN
aiti-272	107	32	learning	learning	NOUN
aiti-272	107	33	control	control	NOUN
aiti-272	107	34	.	.	PUNCT
aiti-272	108	1	advances	advance	NOUN
aiti-272	108	2	in	in	ADP
aiti-272	108	3	technology	technology	NOUN
aiti-272	108	4	innovation	innovation	NOUN
aiti-272	108	5	,	,	PUNCT
aiti-272	108	6	vol	vol	NOUN
aiti-272	108	7	.	.	PROPN
aiti-272	109	1	2	2	NUM
aiti-272	109	2	,	,	PUNCT
aiti-272	109	3	no	no	INTJ
aiti-272	109	4	.	.	NOUN
aiti-272	109	5	2	2	NUM
aiti-272	109	6	,	,	PUNCT
aiti-272	109	7	2017	2017	NUM
aiti-272	109	8	,	,	PUNCT
aiti-272	109	9	pp	pp	ADJ
aiti-272	109	10	.	.	PUNCT
aiti-272	110	1	29	29	NUM
aiti-272	110	2	33	33	NUM
aiti-272	110	3	33	33	NUM
aiti-272	110	4	copyright	copyright	NOUN
aiti-272	110	5	©	©	PROPN
aiti-272	110	6	taeti	taeti	PROPN
aiti-272	110	7	fig	fig	NOUN
aiti-272	110	8	.	.	PUNCT
aiti-272	111	1	9	9	NUM
aiti-272	111	2	bode	bode	ADJ
aiti-272	111	3	plot	plot	NOUN
aiti-272	111	4	of	of	ADP
aiti-272	111	5	the	the	DET
aiti-272	111	6	working	working	NOUN
aiti-272	111	7	table	table	NOUN
aiti-272	111	8	mass	mass	PROPN
aiti-272	111	9	47.09kg(blue	47.09kg(blue	NOUN
aiti-272	111	10	)	)	PUNCT
aiti-272	111	11	,	,	PUNCT
aiti-272	111	12	70.63kg(green	70.63kg(green	NUM
aiti-272	111	13	)	)	PUNCT
aiti-272	111	14	,	,	PUNCT
aiti-272	111	15	94.18kg(red	94.18kg(red	NUM
aiti-272	111	16	)	)	PUNCT
aiti-272	111	17	fig	fig	NOUN
aiti-272	111	18	.	.	PUNCT
aiti-272	112	1	10	10	NUM
aiti-272	112	2	the	the	DET
aiti-272	112	3	en	en	X
aiti-272	112	4	largement	largement	NOUN
aiti-272	112	5	of	of	ADP
aiti-272	112	6	the	the	DET
aiti-272	112	7	first	first	ADJ
aiti-272	112	8	mode	mode	NOUN
aiti-272	112	9	of	of	ADP
aiti-272	112	10	the	the	DET
aiti-272	112	11	bode	bode	ADJ
aiti-272	112	12	plot	plot	NOUN
aiti-272	112	13	in	in	ADP
aiti-272	112	14	fig	fig	NOUN
aiti-272	112	15	.	.	PUNCT
aiti-272	113	1	9	9	NUM
aiti-272	113	2	based	base	VERB
aiti-272	113	3	on	on	ADP
aiti-272	113	4	different	different	ADJ
aiti-272	113	5	working	working	NOUN
aiti-272	113	6	table	table	NOUN
aiti-272	113	7	mass	mass	PROPN
aiti-272	113	8	fig	fig	NOUN
aiti-272	113	9	.	.	PUNCT
aiti-272	113	10	11	11	NUM
aiti-272	113	11	the	the	DET
aiti-272	113	12	enlargement	enlargement	NOUN
aiti-272	113	13	of	of	ADP
aiti-272	113	14	the	the	DET
aiti-272	113	15	second	second	ADJ
aiti-272	113	16	mode	mode	NOUN
aiti-272	113	17	of	of	ADP
aiti-272	113	18	the	the	DET
aiti-272	113	19	bode	bode	ADJ
aiti-272	113	20	plot	plot	NOUN
aiti-272	113	21	in	in	ADP
aiti-272	113	22	fig	fig	NOUN
aiti-272	113	23	.	.	PUNCT
aiti-272	114	1	9	9	NUM
aiti-272	114	2	based	base	VERB
aiti-272	114	3	on	on	ADP
aiti-272	114	4	different	different	ADJ
aiti-272	114	5	working	working	NOUN
aiti-272	114	6	table	table	NOUN
aiti-272	114	7	mass	mass	PROPN
aiti-272	114	8	fig	fig	NOUN
aiti-272	114	9	.	.	PUNCT
aiti-272	115	1	12	12	NUM
aiti-272	115	2	plot	plot	NOUN
aiti-272	115	3	of	of	ADP
aiti-272	115	4	a	a	DET
aiti-272	115	5	convergence	convergence	NOUN
aiti-272	115	6	error	error	NOUN
aiti-272	115	7	of	of	ADP
aiti-272	115	8	the	the	DET
aiti-272	115	9	numerical	numerical	PROPN
aiti-272	115	10	s	s	PROPN
aiti-272	115	11	imulat	imulat	ADJ
aiti-272	115	12	ion	ion	NOUN
aiti-272	115	13	by	by	ADP
aiti-272	115	14	using	use	VERB
aiti-272	115	15	hpso	hpso	NOUN
aiti-272	115	16	-	-	PUNCT
aiti-272	115	17	ilc	ilc	NOUN
aiti-272	115	18	[	[	X
aiti-272	115	19	2	2	NUM
aiti-272	115	20	]	]	PUNCT
aiti-272	115	21	for	for	ADP
aiti-272	115	22	ball	ball	NOUN
aiti-272	115	23	screw	screw	NOUN
aiti-272	115	24	drive	drive	NOUN
aiti-272	115	25	system	system	NOUN
aiti-272	115	26	3	3	NUM
aiti-272	115	27	.	.	PUNCT
aiti-272	115	28	conclusions	conclusion	NOUN
aiti-272	115	29	a	a	DET
aiti-272	115	30	lumped	lump	VERB
aiti-272	115	31	dynamic	dynamic	ADJ
aiti-272	115	32	model	model	NOUN
aiti-272	115	33	fo	fo	ADP
aiti-272	115	34	r	r	NOUN
aiti-272	115	35	describing	describe	VERB
aiti-272	115	36	different	different	ADJ
aiti-272	115	37	ball	ball	NOUN
aiti-272	115	38	nut	nut	NOUN
aiti-272	115	39	preload	preload	NOUN
aiti-272	115	40	level	level	NOUN
aiti-272	115	41	,	,	PUNCT
aiti-272	115	42	ball	ball	NOUN
aiti-272	115	43	screw	screw	VERB
aiti-272	115	44	torsional	torsional	ADJ
aiti-272	115	45	stiffnesss	stiffnesss	NOUN
aiti-272	115	46	and	and	CCONJ
aiti-272	115	47	the	the	DET
aiti-272	115	48	table	table	NOUN
aiti-272	115	49	mass	mass	NOUN
aiti-272	115	50	effects	effect	NOUN
aiti-272	115	51	of	of	ADP
aiti-272	115	52	the	the	DET
aiti-272	115	53	ball	ball	NOUN
aiti-272	115	54	screw	screw	NOUN
aiti-272	115	55	feed	feed	NOUN
aiti-272	115	56	drive	drive	NOUN
aiti-272	115	57	system	system	NOUN
aiti-272	115	58	is	be	AUX
aiti-272	115	59	derived	derive	VERB
aiti-272	115	60	and	and	CCONJ
aiti-272	115	61	numerically	numerically	ADV
aiti-272	115	62	simulated	simulate	VERB
aiti-272	115	63	.	.	PUNCT
aiti-272	116	1	based	base	VERB
aiti-272	116	2	on	on	ADP
aiti-272	116	3	the	the	DET
aiti-272	116	4	different	different	ADJ
aiti-272	116	5	percent	percent	NOUN
aiti-272	116	6	of	of	ADP
aiti-272	116	7	the	the	DET
aiti-272	116	8	preload	preload	NOUN
aiti-272	116	9	and	and	CCONJ
aiti-272	116	10	table	table	NOUN
aiti-272	116	11	mass	mass	PROPN
aiti-272	116	12	,	,	PUNCT
aiti-272	116	13	the	the	DET
aiti-272	116	14	frequency	frequency	NOUN
aiti-272	116	15	spectrum	spectrum	NOUN
aiti-272	116	16	analysis	analysis	NOUN
aiti-272	116	17	of	of	ADP
aiti-272	116	18	the	the	DET
aiti-272	116	19	numerical	numerical	PROPN
aiti-272	116	20	simulation	simulation	NOUN
aiti-272	116	21	provides	provide	VERB
aiti-272	116	22	the	the	DET
aiti-272	116	23	limits	limit	NOUN
aiti-272	116	24	and	and	CCONJ
aiti-272	116	25	constraints	constraint	NOUN
aiti-272	116	26	of	of	ADP
aiti-272	116	27	bandwidth	bandwidth	ADJ
aiti-272	116	28	tuning	tune	VERB
aiti-272	116	29	for	for	ADP
aiti-272	116	30	motion	motion	NOUN
aiti-272	116	31	control	control	NOUN
aiti-272	116	32	applications	application	NOUN
aiti-272	116	33	.	.	PUNCT
aiti-272	117	1	the	the	DET
aiti-272	117	2	preload	preload	NOUN
aiti-272	117	3	variation	variation	NOUN
aiti-272	117	4	can	can	AUX
aiti-272	117	5	be	be	AUX
aiti-272	117	6	diagnosed	diagnose	VERB
aiti-272	117	7	by	by	ADP
aiti-272	117	8	the	the	DET
aiti-272	117	9	peak	peak	NOUN
aiti-272	117	10	frequency	frequency	NOUN
aiti-272	117	11	change	change	NOUN
aiti-272	117	12	and	and	CCONJ
aiti-272	117	13	the	the	DET
aiti-272	117	14	magnitude	magnitude	NOUN
aiti-272	117	15	of	of	ADP
aiti-272	117	16	the	the	DET
aiti-272	117	17	peak	peak	NOUN
aiti-272	117	18	frequency	frequency	NOUN
aiti-272	117	19	in	in	ADP
aiti-272	117	20	a	a	DET
aiti-272	117	21	specific	specific	ADJ
aiti-272	117	22	frequency	frequency	NOUN
aiti-272	117	23	range	range	NOUN
aiti-272	117	24	when	when	SCONJ
aiti-272	117	25	the	the	DET
aiti-272	117	26	axial	axial	ADJ
aiti-272	117	27	mode	mode	NOUN
aiti-272	117	28	or	or	CCONJ
aiti-272	117	29	the	the	DET
aiti-272	117	30	torsional	torsional	ADJ
aiti-272	117	31	mode	mode	NOUN
aiti-272	117	32	is	be	AUX
aiti-272	117	33	excited	excited	ADJ
aiti-272	117	34	.	.	PUNCT
aiti-272	118	1	the	the	DET
aiti-272	118	2	derivation	derivation	NOUN
aiti-272	118	3	and	and	CCONJ
aiti-272	118	4	numerical	numerical	PROPN
aiti-272	118	5	simulation	simulation	PROPN
aiti-272	118	6	results	result	NOUN
aiti-272	118	7	of	of	ADP
aiti-272	118	8	the	the	DET
aiti-272	118	9	lumped	lump	VERB
aiti-272	118	10	dynamic	dynamic	ADJ
aiti-272	118	11	model	model	NOUN
aiti-272	118	12	provides	provide	VERB
aiti-272	118	13	significant	significant	ADJ
aiti-272	118	14	informat	informat	ADJ
aiti-272	118	15	ion	ion	NOUN
aiti-272	118	16	in	in	ADP
aiti-272	118	17	determining	determine	VERB
aiti-272	118	18	the	the	DET
aiti-272	118	19	zero	zero	NUM
aiti-272	118	20	phase	phase	NOUN
aiti-272	118	21	bandwidth	bandwidth	NOUN
aiti-272	118	22	tuning	tuning	NOUN
aiti-272	118	23	.	.	PUNCT
aiti-272	119	1	application	application	NOUN
aiti-272	119	2	of	of	ADP
aiti-272	119	3	a	a	DET
aiti-272	119	4	hybrid	hybrid	ADJ
aiti-272	119	5	particle	particle	NOUN
aiti-272	119	6	swarm	swarm	NOUN
aiti-272	119	7	optimization	optimization	NOUN
aiti-272	119	8	iterat	iterat	NOUN
aiti-272	119	9	i	i	PRON
aiti-272	119	10	ve	ve	AUX
aiti-272	119	11	learning	learn	VERB
aiti-272	119	12	control	control	NOUN
aiti-272	119	13	law	law	NOUN
aiti-272	119	14	deploys	deploy	VERB
aiti-272	119	15	successfully	successfully	ADV
aiti-272	119	16	when	when	SCONJ
aiti-272	119	17	the	the	DET
aiti-272	119	18	frequency	frequency	NOUN
aiti-272	119	19	contents	content	NOUN
aiti-272	119	20	of	of	ADP
aiti-272	119	21	the	the	DET
aiti-272	119	22	compensated	compensate	VERB
aiti-272	119	23	error	error	NOUN
aiti-272	119	24	was	be	AUX
aiti-272	119	25	constrained	constrain	VERB
aiti-272	119	26	in	in	ADP
aiti-272	119	27	every	every	DET
aiti-272	119	28	control	control	NOUN
aiti-272	119	29	actuation	actuation	NOUN
aiti-272	119	30	.	.	PUNCT
aiti-272	120	1	acknowledgement	acknowledgement	NOUN
aiti-272	120	2	this	this	DET
aiti-272	120	3	work	work	NOUN
aiti-272	120	4	was	be	AUX
aiti-272	120	5	supported	support	VERB
aiti-272	120	6	by	by	ADP
aiti-272	120	7	most	most	ADJ
aiti-272	120	8	grant	grant	VERB
aiti-272	120	9	104	104	NUM
aiti-272	120	10	-	-	PUNCT
aiti-272	120	11	2221	2221	NUM
aiti-272	120	12	-	-	PUNCT
aiti-272	120	13	e-018	e-018	NOUN
aiti-272	120	14	-	-	PUNCT
aiti-272	120	15	015	015	NUM
aiti-272	120	16	for	for	ADP
aiti-272	120	17	which	which	PRON
aiti-272	120	18	the	the	DET
aiti-272	120	19	authors	author	NOUN
aiti-272	120	20	are	be	AUX
aiti-272	120	21	very	very	ADV
aiti-272	120	22	much	much	ADV
aiti-272	120	23	grateful	grateful	ADJ
aiti-272	120	24	.	.	PUNCT
aiti-272	121	1	references	reference	NOUN
aiti-272	121	2	[	[	X
aiti-272	121	3	1	1	NUM
aiti-272	121	4	]	]	PUNCT
aiti-272	121	5	m.	m.	PROPN
aiti-272	121	6	s.	s.	PROPN
aiti-272	121	7	tsai	tsai	PROPN
aiti-272	121	8	,	,	PUNCT
aiti-272	121	9	c.	c.	PROPN
aiti-272	121	10	l.	l.	PROPN
aiti-272	121	11	yen	yen	PROPN
aiti-272	121	12	,	,	PUNCT
aiti-272	121	13	and	and	CCONJ
aiti-272	121	14	h.	h.	PROPN
aiti-272	121	15	t.	t.	PROPN
aiti-272	121	16	yau	yau	PROPN
aiti-272	121	17	,	,	PUNCT
aiti-272	121	18	“	"	PUNCT
aiti-272	121	19	integration	integration	NOUN
aiti-272	121	20	of	of	ADP
aiti-272	121	21	an	an	DET
aiti-272	121	22	empirical	empirical	ADJ
aiti-272	121	23	mode	mode	NOUN
aiti-272	121	24	decomposition	decomposition	NOUN
aiti-272	121	25	algorithm	algorithm	NOUN
aiti-272	121	26	with	with	ADP
aiti-272	121	27	iterative	iterative	NOUN
aiti-272	121	28	learn	learn	VERB
aiti-272	121	29	ing	ing	ADJ
aiti-272	121	30	control	control	NOUN
aiti-272	121	31	for	for	ADP
aiti-272	121	32	h	h	DET
aiti-272	121	33	igh	igh	PROPN
aiti-272	121	34	-	-	PUNCT
aiti-272	121	35	precision	precision	NOUN
aiti-272	121	36	machining	machining	NOUN
aiti-272	121	37	,	,	PUNCT
aiti-272	121	38	”	"	PUNCT
aiti-272	121	39	ieee	ieee	PROPN
aiti-272	121	40	/	/	SYM
aiti-272	121	41	asme	asme	PROPN
aiti-272	121	42	transaction	transaction	NOUN
aiti-272	121	43	on	on	ADP
aiti-272	121	44	mechatronic	mechatronic	ADJ
aiti-272	121	45	,	,	PUNCT
aiti-272	121	46	vol	vol	NOUN
aiti-272	121	47	.	.	PROPN
aiti-272	121	48	18	18	NUM
aiti-272	121	49	,	,	PUNCT
aiti-272	121	50	no	no	INTJ
aiti-272	121	51	.	.	NOUN
aiti-272	121	52	3	3	NUM
aiti-272	121	53	,	,	PUNCT
aiti-272	121	54	pp	pp	ADJ
aiti-272	121	55	.	.	PUNCT
aiti-272	121	56	878	878	NUM
aiti-272	121	57	-	-	SYM
aiti-272	121	58	886	886	NUM
aiti-272	121	59	,	,	PUNCT
aiti-272	121	60	2013	2013	NUM
aiti-272	121	61	.	.	PUNCT
aiti-272	122	1	[	[	X
aiti-272	122	2	2	2	X
aiti-272	122	3	]	]	X
aiti-272	122	4	y.	y.	PROPN
aiti-272	122	5	c.	c.	PROPN
aiti-272	122	6	huang	huang	PROPN
aiti-272	122	7	,	,	PUNCT
aiti-272	122	8	y.	y.	PROPN
aiti-272	122	9	w.	w.	PROPN
aiti-272	122	10	su	su	PROPN
aiti-272	122	11	,	,	PUNCT
aiti-272	122	12	and	and	CCONJ
aiti-272	122	13	p.	p.	PROPN
aiti-272	122	14	c.	c.	PROPN
aiti-272	122	15	chuo	chuo	PROPN
aiti-272	122	16	,	,	PUNCT
aiti-272	122	17	“	"	PUNCT
aiti-272	122	18	iterative	iterative	NOUN
aiti-272	122	19	learn	learn	VERB
aiti-272	122	20	ing	ing	ADJ
aiti-272	122	21	control	control	NOUN
aiti-272	122	22	bandwidth	bandwidth	NOUN
aiti-272	122	23	tuning	tune	VERB
aiti-272	122	24	using	use	VERB
aiti-272	122	25	the	the	DET
aiti-272	122	26	part	part	NOUN
aiti-272	122	27	icle	icle	NOUN
aiti-272	122	28	s	s	PART
aiti-272	122	29	warm	warm	ADJ
aiti-272	122	30	opt	opt	NOUN
aiti-272	122	31	imizat	imizat	NOUN
aiti-272	122	32	ion	ion	NOUN
aiti-272	122	33	techn	techn	NOUN
aiti-272	122	34	ique	ique	NOUN
aiti-272	122	35	fo	fo	ADP
aiti-272	122	36	r	r	NOUN
aiti-272	122	37	h	h	NOUN
aiti-272	122	38	igh	igh	PROPN
aiti-272	122	39	p	p	PROPN
aiti-272	122	40	recis	recis	NOUN
aiti-272	122	41	ion	ion	NOUN
aiti-272	122	42	mot	mot	NOUN
aiti-272	122	43	ion	ion	NOUN
aiti-272	122	44	,	,	PUNCT
aiti-272	122	45	”	"	PUNCT
aiti-272	122	46	microsystem	microsystem	NOUN
aiti-272	122	47	technologies	technology	NOUN
aiti-272	122	48	.	.	PUNCT
aiti-272	123	1	doi	doi	NOUN
aiti-272	123	2	:	:	PUNCT
aiti-272	123	3	10.1007/	10.1007/	NUM
aiti-272	123	4	s00542	s00542	PROPN
aiti-272	123	5	-	-	PUNCT
aiti-272	123	6	015	015	NUM
aiti-272	123	7	-	-	PUNCT
aiti-272	123	8	2649	2649	NUM
aiti-272	123	9	-	-	SYM
aiti-272	123	10	6	6	NUM
aiti-272	123	11	,	,	PUNCT
aiti-272	123	12	2015	2015	NUM
aiti-272	123	13	.	.	PUNCT
aiti-272	124	1	[	[	X
aiti-272	124	2	3	3	X
aiti-272	124	3	]	]	X
aiti-272	124	4	g.	g.	PROPN
aiti-272	124	5	h.	h.	PROPN
aiti-272	124	6	feng	feng	PROPN
aiti-272	124	7	and	and	CCONJ
aiti-272	124	8	y.	y.	PROPN
aiti-272	124	9	l.	l.	PROPN
aiti-272	124	10	pan	pan	PROPN
aiti-272	124	11	,	,	PUNCT
aiti-272	124	12	“	"	PUNCT
aiti-272	124	13	investigation	investigation	NOUN
aiti-272	124	14	of	of	ADP
aiti-272	124	15	ball	ball	NOUN
aiti-272	124	16	screw	screw	NOUN
aiti-272	124	17	preload	preload	NOUN
aiti-272	124	18	variation	variation	NOUN
aiti-272	124	19	based	base	VERB
aiti-272	124	20	on	on	ADP
aiti-272	124	21	dynamic	dynamic	ADJ
aiti-272	124	22	modeling	modeling	NOUN
aiti-272	124	23	of	of	ADP
aiti-272	124	24	a	a	DET
aiti-272	124	25	preload	preload	NOUN
aiti-272	124	26	adjustable	adjustable	ADJ
aiti-272	124	27	feed	feed	NOUN
aiti-272	124	28	-	-	PUNCT
aiti-272	124	29	drive	drive	NOUN
aiti-272	124	30	system	system	NOUN
aiti-272	124	31	and	and	CCONJ
aiti-272	124	32	spectrum	spectrum	VERB
aiti-272	124	33	analysis	analysis	NOUN
aiti-272	124	34	of	of	ADP
aiti-272	124	35	ball	ball	NOUN
aiti-272	124	36	-	-	PUNCT
aiti-272	124	37	nuts	nuts	NOUN
aiti-272	124	38	sensed	sense	VERB
aiti-272	124	39	v	v	NUM
aiti-272	124	40	ib	ib	NOUN
aiti-272	124	41	rat	rat	NOUN
aiti-272	124	42	ion	ion	NOUN
aiti-272	124	43	s	s	NOUN
aiti-272	124	44	ignals	ignal	NOUN
aiti-272	124	45	,	,	PUNCT
aiti-272	124	46	”	"	PUNCT
aiti-272	124	47	international	international	ADJ
aiti-272	124	48	journal	journal	NOUN
aiti-272	124	49	of	of	ADP
aiti-272	124	50	machine	machine	NOUN
aiti-272	124	51	tools	tool	NOUN
aiti-272	124	52	&	&	CCONJ
aiti-272	124	53	manufacture	manufacture	NOUN
aiti-272	124	54	,	,	PUNCT
aiti-272	124	55	vol	vol	NOUN
aiti-272	124	56	.	.	PROPN
aiti-272	124	57	52	52	NUM
aiti-272	124	58	,	,	PUNCT
aiti-272	124	59	no	no	INTJ
aiti-272	124	60	.	.	NOUN
aiti-272	124	61	1	1	NUM
aiti-272	124	62	,	,	PUNCT
aiti-272	124	63	pp	pp	ADJ
aiti-272	124	64	.	.	PUNCT
aiti-272	124	65	85	85	NUM
aiti-272	124	66	-	-	SYM
aiti-272	124	67	96	96	NUM
aiti-272	124	68	,	,	PUNCT
aiti-272	124	69	2012	2012	NUM
aiti-272	124	70	.	.	PUNCT