id	sid	tid	token	lemma	pos
alkej-146	1	1	ياسر	ياسر	VERB
alkej-146	1	2	خضير	خضير	NOUN
alkej-146	1	3	1	1	NUM
alkej-146	1	4	al	al	PROPN
alkej-146	1	5	-	-	PUNCT
alkej-146	1	6	khwarizmi	khwarizmi	PROPN
alkej-146	1	7	engineering	engineering	PROPN
alkej-146	1	8	journal	journal	PROPN
alkej-146	1	9	al	al	PROPN
alkej-146	1	10	-	-	PUNCT
alkej-146	1	11	khwarizmi	khwarizmi	PROPN
alkej-146	1	12	engineering	engineering	NOUN
alkej-146	1	13	journal	journal	PROPN
alkej-146	1	14	,	,	PUNCT
alkej-146	1	15	vol	vol	NOUN
alkej-146	1	16	.	.	PROPN
alkej-146	1	17	8	8	NUM
alkej-146	1	18	,	,	PUNCT
alkej-146	1	19	no.4	no.4	PROPN
alkej-146	1	20	,	,	PUNCT
alkej-146	1	21	pp	pp	ADP
alkej-146	1	22	40	40	NUM
alkej-146	1	23	-52(2012	-52(2012	NOUN
alkej-146	1	24	)	)	PUNCT
alkej-146	1	25	genetic	genetic	ADJ
alkej-146	1	26	algorithm	algorithm	NOUN
alkej-146	1	27	based	base	VERB
alkej-146	1	28	pid	pid	NOUN
alkej-146	1	29	controller	controller	NOUN
alkej-146	1	30	design	design	NOUN
alkej-146	1	31	for	for	ADP
alkej-146	1	32	a	a	DET
alkej-146	1	33	precise	precise	ADJ
alkej-146	1	34	tracking	tracking	NOUN
alkej-146	1	35	of	of	ADP
alkej-146	1	36	two	two	NUM
alkej-146	1	37	-	-	PUNCT
alkej-146	1	38	axis	axis	NOUN
alkej-146	1	39	piezoelectric	piezoelectric	NOUN
alkej-146	1	40	micropositioning	micropositione	VERB
alkej-146	1	41	stage	stage	NOUN
alkej-146	1	42	yasir	yasir	PROPN
alkej-146	1	43	khudhair	khudhair	PROPN
alkej-146	1	44	abbas	abbas	PROPN
alkej-146	1	45	department	department	PROPN
alkej-146	1	46	of	of	ADP
alkej-146	1	47	control	control	PROPN
alkej-146	1	48	and	and	CCONJ
alkej-146	1	49	systems	system	NOUN
alkej-146	1	50	engineering	engineering	NOUN
alkej-146	1	51	/	/	SYM
alkej-146	1	52	university	university	PROPN
alkej-146	1	53	of	of	ADP
alkej-146	1	54	technology	technology	NOUN
alkej-146	1	55	email	email	NOUN
alkej-146	1	56	:	:	PUNCT
alkej-146	1	57	yasirkh84@yahoo.com	yasirkh84@yahoo.com	X
alkej-146	1	58	(	(	PUNCT
alkej-146	1	59	received	receive	VERB
alkej-146	1	60	16	16	NUM
alkej-146	1	61	august	august	PROPN
alkej-146	1	62	2011	2011	NUM
alkej-146	1	63	;	;	PUNCT
alkej-146	1	64	accepted	accept	VERB
alkej-146	1	65	13	13	NUM
alkej-146	1	66	may	may	PROPN
alkej-146	1	67	2012	2012	NUM
alkej-146	1	68	)	)	PUNCT
alkej-146	1	69	abstract	abstract	ADV
alkej-146	1	70	in	in	ADP
alkej-146	1	71	this	this	DET
alkej-146	1	72	paper	paper	NOUN
alkej-146	1	73	,	,	PUNCT
alkej-146	1	74	an	an	DET
alkej-146	1	75	intelligent	intelligent	ADJ
alkej-146	1	76	tracking	tracking	NOUN
alkej-146	1	77	control	control	NOUN
alkej-146	1	78	system	system	NOUN
alkej-146	1	79	of	of	ADP
alkej-146	1	80	both	both	DET
alkej-146	1	81	singleand	singleand	ADV
alkej-146	1	82	double	double	ADJ
alkej-146	1	83	-	-	PUNCT
alkej-146	1	84	axis	axis	NOUN
alkej-146	1	85	piezoelectric	piezoelectric	NOUN
alkej-146	1	86	micropositioner	micropositioner	ADJ
alkej-146	1	87	stage	stage	NOUN
alkej-146	1	88	is	be	AUX
alkej-146	1	89	designed	design	VERB
alkej-146	1	90	using	use	VERB
alkej-146	1	91	genetic	genetic	ADJ
alkej-146	1	92	algorithms	algorithm	NOUN
alkej-146	1	93	(	(	PUNCT
alkej-146	1	94	gas	gas	NOUN
alkej-146	1	95	)	)	PUNCT
alkej-146	1	96	method	method	NOUN
alkej-146	1	97	for	for	ADP
alkej-146	1	98	the	the	DET
alkej-146	1	99	optimal	optimal	ADJ
alkej-146	1	100	proportional	proportional	ADJ
alkej-146	1	101	-	-	PUNCT
alkej-146	1	102	integral	integral	ADJ
alkej-146	1	103	-	-	PUNCT
alkej-146	1	104	derivative	derivative	ADJ
alkej-146	1	105	(	(	PUNCT
alkej-146	1	106	pid	pid	NOUN
alkej-146	1	107	)	)	PUNCT
alkej-146	1	108	controller	controller	NOUN
alkej-146	1	109	tuning	tune	VERB
alkej-146	1	110	parameters	parameter	NOUN
alkej-146	1	111	.	.	PUNCT
alkej-146	2	1	the	the	DET
alkej-146	2	2	(	(	PUNCT
alkej-146	2	3	ga)-based	ga)-base	VERB
alkej-146	2	4	pid	pid	NOUN
alkej-146	2	5	control	control	NOUN
alkej-146	2	6	design	design	NOUN
alkej-146	2	7	approach	approach	NOUN
alkej-146	2	8	is	be	AUX
alkej-146	2	9	a	a	DET
alkej-146	2	10	methodology	methodology	NOUN
alkej-146	2	11	to	to	PART
alkej-146	2	12	tune	tune	VERB
alkej-146	2	13	a	a	DET
alkej-146	2	14	(	(	PUNCT
alkej-146	2	15	pid	pid	NOUN
alkej-146	2	16	)	)	PUNCT
alkej-146	2	17	controller	controller	NOUN
alkej-146	2	18	in	in	ADP
alkej-146	2	19	an	an	DET
alkej-146	2	20	optimal	optimal	ADJ
alkej-146	2	21	control	control	NOUN
alkej-146	2	22	sense	sense	NOUN
alkej-146	2	23	with	with	ADP
alkej-146	2	24	respect	respect	NOUN
alkej-146	2	25	to	to	PART
alkej-146	2	26	specified	specify	VERB
alkej-146	2	27	objective	objective	ADJ
alkej-146	2	28	function	function	NOUN
alkej-146	2	29	.	.	PUNCT
alkej-146	3	1	by	by	ADP
alkej-146	3	2	using	use	VERB
alkej-146	3	3	the	the	DET
alkej-146	3	4	(	(	PUNCT
alkej-146	3	5	ga)-based	ga)-base	VERB
alkej-146	3	6	pid	pid	NOUN
alkej-146	3	7	control	control	NOUN
alkej-146	3	8	approach	approach	NOUN
alkej-146	3	9	,	,	PUNCT
alkej-146	3	10	the	the	DET
alkej-146	3	11	high	high	ADJ
alkej-146	3	12	-	-	PUNCT
alkej-146	3	13	performance	performance	NOUN
alkej-146	3	14	trajectory	trajectory	NOUN
alkej-146	3	15	tracking	tracking	NOUN
alkej-146	3	16	responses	response	NOUN
alkej-146	3	17	of	of	ADP
alkej-146	3	18	the	the	DET
alkej-146	3	19	piezoelectric	piezoelectric	NOUN
alkej-146	3	20	micropositioner	micropositioner	ADJ
alkej-146	3	21	stage	stage	NOUN
alkej-146	3	22	can	can	AUX
alkej-146	3	23	be	be	AUX
alkej-146	3	24	obtained	obtain	VERB
alkej-146	3	25	.	.	PUNCT
alkej-146	4	1	the	the	DET
alkej-146	4	2	(	(	PUNCT
alkej-146	4	3	ga	ga	PROPN
alkej-146	4	4	)	)	PUNCT
alkej-146	4	5	code	code	NOUN
alkej-146	4	6	was	be	AUX
alkej-146	4	7	built	build	VERB
alkej-146	4	8	and	and	CCONJ
alkej-146	4	9	the	the	DET
alkej-146	4	10	simulation	simulation	NOUN
alkej-146	4	11	results	result	NOUN
alkej-146	4	12	were	be	AUX
alkej-146	4	13	obtained	obtain	VERB
alkej-146	4	14	using	use	VERB
alkej-146	4	15	matlab	matlab	PROPN
alkej-146	4	16	environment	environment	NOUN
alkej-146	4	17	.	.	PUNCT
alkej-146	5	1	the	the	DET
alkej-146	5	2	piezoelectric	piezoelectric	NOUN
alkej-146	5	3	micropositioner	micropositioner	PROPN
alkej-146	5	4	simulation	simulation	NOUN
alkej-146	5	5	model	model	NOUN
alkej-146	5	6	with	with	ADP
alkej-146	5	7	the	the	DET
alkej-146	5	8	(	(	PUNCT
alkej-146	5	9	ga)-based	ga)-base	VERB
alkej-146	5	10	pid	pid	NOUN
alkej-146	5	11	control	control	NOUN
alkej-146	5	12	is	be	AUX
alkej-146	5	13	illustrated	illustrate	VERB
alkej-146	5	14	to	to	PART
alkej-146	5	15	show	show	VERB
alkej-146	5	16	the	the	DET
alkej-146	5	17	validity	validity	NOUN
alkej-146	5	18	of	of	ADP
alkej-146	5	19	the	the	DET
alkej-146	5	20	proposed	propose	VERB
alkej-146	5	21	control	control	NOUN
alkej-146	5	22	method	method	NOUN
alkej-146	5	23	for	for	ADP
alkej-146	5	24	practical	practical	ADJ
alkej-146	5	25	applications	application	NOUN
alkej-146	5	26	,	,	PUNCT
alkej-146	5	27	such	such	ADJ
alkej-146	5	28	as	as	ADP
alkej-146	5	29	scanning	scan	VERB
alkej-146	5	30	microscopy	microscopy	NOUN
alkej-146	5	31	.	.	PUNCT
alkej-146	6	1	keywords	keyword	NOUN
alkej-146	6	2	:	:	PUNCT
alkej-146	6	3	piezoelectric	piezoelectric	NOUN
alkej-146	6	4	,	,	PUNCT
alkej-146	6	5	micropositioner	micropositioner	ADV
alkej-146	6	6	,	,	PUNCT
alkej-146	6	7	genetic	genetic	ADJ
alkej-146	6	8	algorithms	algorithm	NOUN
alkej-146	6	9	,	,	PUNCT
alkej-146	6	10	pid	pid	NOUN
alkej-146	6	11	.	.	PROPN
alkej-146	6	12	1	1	NUM
alkej-146	6	13	.	.	X
alkej-146	6	14	introduction	introduction	NOUN
alkej-146	6	15	in	in	ADP
alkej-146	6	16	recent	recent	ADJ
alkej-146	6	17	years	year	NOUN
alkej-146	6	18	,	,	PUNCT
alkej-146	6	19	piezo	piezo	NOUN
alkej-146	6	20	-	-	NOUN
alkej-146	6	21	actuators	actuator	NOUN
alkej-146	6	22	have	have	AUX
alkej-146	6	23	been	be	AUX
alkej-146	6	24	widely	widely	ADV
alkej-146	6	25	used	use	VERB
alkej-146	6	26	in	in	ADP
alkej-146	6	27	high	high	ADJ
alkej-146	6	28	-	-	PUNCT
alkej-146	6	29	precision	precision	NOUN
alkej-146	6	30	positioning	positioning	NOUN
alkej-146	6	31	applications	application	NOUN
alkej-146	6	32	due	due	ADP
alkej-146	6	33	to	to	ADP
alkej-146	6	34	their	their	PRON
alkej-146	6	35	special	special	ADJ
alkej-146	6	36	properties	property	NOUN
alkej-146	6	37	of	of	ADP
alkej-146	6	38	:	:	PUNCT
alkej-146	6	39	(	(	PUNCT
alkej-146	6	40	i	i	NOUN
alkej-146	6	41	)	)	PUNCT
alkej-146	6	42	nanometer	nanometer	NOUN
alkej-146	6	43	and	and	CCONJ
alkej-146	6	44	micrometer	micrometer	NOUN
alkej-146	6	45	scale	scale	NOUN
alkej-146	6	46	resolution	resolution	NOUN
alkej-146	6	47	;	;	PUNCT
alkej-146	6	48	(	(	PUNCT
alkej-146	6	49	ii	ii	NOUN
alkej-146	6	50	)	)	PUNCT
alkej-146	6	51	a	a	DET
alkej-146	6	52	high	high	ADJ
alkej-146	6	53	stiffness	stiffness	NOUN
alkej-146	6	54	;	;	PUNCT
alkej-146	6	55	and	and	CCONJ
alkej-146	6	56	(	(	PUNCT
alkej-146	6	57	iii	iii	X
alkej-146	6	58	)	)	PUNCT
alkej-146	6	59	a	a	DET
alkej-146	6	60	fast	fast	ADJ
alkej-146	6	61	response	response	NOUN
alkej-146	6	62	.	.	PUNCT
alkej-146	7	1	however	however	ADV
alkej-146	7	2	,	,	PUNCT
alkej-146	7	3	since	since	SCONJ
alkej-146	7	4	almost	almost	ADV
alkej-146	7	5	all	all	DET
alkej-146	7	6	the	the	DET
alkej-146	7	7	materials	material	NOUN
alkej-146	7	8	in	in	ADP
alkej-146	7	9	the	the	DET
alkej-146	7	10	piezoactuators	piezoactuator	NOUN
alkej-146	7	11	are	be	AUX
alkej-146	7	12	ferroelectric	ferroelectric	ADJ
alkej-146	7	13	,	,	PUNCT
alkej-146	7	14	their	their	PRON
alkej-146	7	15	responses	response	NOUN
alkej-146	7	16	to	to	ADP
alkej-146	7	17	applied	apply	VERB
alkej-146	7	18	electric	electric	ADJ
alkej-146	7	19	fields	field	NOUN
alkej-146	7	20	exhibits	exhibit	VERB
alkej-146	7	21	fundamental	fundamental	ADJ
alkej-146	7	22	hysteresis	hysteresis	NOUN
alkej-146	7	23	behavior	behavior	NOUN
alkej-146	7	24	.	.	PUNCT
alkej-146	8	1	this	this	PRON
alkej-146	8	2	always	always	ADV
alkej-146	8	3	leads	lead	VERB
alkej-146	8	4	to	to	ADP
alkej-146	8	5	the	the	DET
alkej-146	8	6	severe	severe	ADJ
alkej-146	8	7	inaccuracies	inaccuracy	NOUN
alkej-146	8	8	and	and	CCONJ
alkej-146	8	9	instabilities	instability	NOUN
alkej-146	8	10	when	when	SCONJ
alkej-146	8	11	the	the	DET
alkej-146	8	12	piezo	piezo	PROPN
alkej-146	8	13	-	-	ADJ
alkej-146	8	14	actuator	actuator	NOUN
alkej-146	8	15	is	be	AUX
alkej-146	8	16	operated	operate	VERB
alkej-146	8	17	in	in	ADP
alkej-146	8	18	an	an	DET
alkej-146	8	19	open	open	ADJ
alkej-146	8	20	-	-	PUNCT
alkej-146	8	21	loop	loop	NOUN
alkej-146	8	22	fashion	fashion	NOUN
alkej-146	8	23	[	[	X
alkej-146	8	24	1	1	NUM
alkej-146	8	25	]	]	PUNCT
alkej-146	8	26	.	.	PUNCT
alkej-146	9	1	moreover	moreover	ADV
alkej-146	9	2	,	,	PUNCT
alkej-146	9	3	the	the	DET
alkej-146	9	4	hysteresis	hysteresis	NOUN
alkej-146	9	5	characteristics	characteristic	NOUN
alkej-146	9	6	of	of	ADP
alkej-146	9	7	piezo	piezo	NOUN
alkej-146	9	8	-	-	NOUN
alkej-146	9	9	actuators	actuator	NOUN
alkej-146	9	10	are	be	AUX
alkej-146	9	11	usually	usually	ADV
alkej-146	9	12	unknown	unknown	ADJ
alkej-146	9	13	and	and	CCONJ
alkej-146	9	14	it	it	PRON
alkej-146	9	15	is	be	AUX
alkej-146	9	16	difficult	difficult	ADJ
alkej-146	9	17	to	to	PART
alkej-146	9	18	establish	establish	VERB
alkej-146	9	19	a	a	DET
alkej-146	9	20	dynamic	dynamic	ADJ
alkej-146	9	21	model	model	NOUN
alkej-146	9	22	for	for	ADP
alkej-146	9	23	systems	system	NOUN
alkej-146	9	24	with	with	ADP
alkej-146	9	25	a	a	DET
alkej-146	9	26	hysteresis	hysteresis	NOUN
alkej-146	9	27	effect	effect	NOUN
alkej-146	9	28	.	.	PUNCT
alkej-146	10	1	these	these	PRON
alkej-146	10	2	cause	cause	VERB
alkej-146	10	3	increased	increase	VERB
alkej-146	10	4	difficulties	difficulty	NOUN
alkej-146	10	5	in	in	ADP
alkej-146	10	6	using	use	VERB
alkej-146	10	7	piezo	piezo	ADJ
alkej-146	10	8	-	-	ADJ
alkej-146	10	9	actuated	actuate	VERB
alkej-146	10	10	motion	motion	NOUN
alkej-146	10	11	systems	system	NOUN
alkej-146	10	12	in	in	ADP
alkej-146	10	13	positioning	position	VERB
alkej-146	10	14	control	control	NOUN
alkej-146	10	15	situations	situation	NOUN
alkej-146	10	16	with	with	ADP
alkej-146	10	17	high	high	ADJ
alkej-146	10	18	performance	performance	NOUN
alkej-146	10	19	requirements	requirement	NOUN
alkej-146	10	20	[	[	X
alkej-146	10	21	2	2	NUM
alkej-146	10	22	,	,	PUNCT
alkej-146	10	23	3	3	NUM
alkej-146	10	24	]	]	PUNCT
alkej-146	10	25	.	.	PUNCT
alkej-146	11	1	many	many	ADJ
alkej-146	11	2	researchers	researcher	NOUN
alkej-146	11	3	deal	deal	VERB
alkej-146	11	4	with	with	ADP
alkej-146	11	5	the	the	DET
alkej-146	11	6	problem	problem	NOUN
alkej-146	11	7	of	of	ADP
alkej-146	11	8	precise	precise	ADJ
alkej-146	11	9	tracking	tracking	NOUN
alkej-146	11	10	control	control	NOUN
alkej-146	11	11	of	of	ADP
alkej-146	11	12	a	a	DET
alkej-146	11	13	piezoelectric	piezoelectric	ADJ
alkej-146	11	14	actuators	actuator	NOUN
alkej-146	11	15	and	and	CCONJ
alkej-146	11	16	micropositioner	micropositioner	ADJ
alkej-146	11	17	stages	stage	NOUN
alkej-146	11	18	.	.	PUNCT
alkej-146	12	1	in	in	ADP
alkej-146	12	2	2004	2004	NUM
alkej-146	12	3	,	,	PUNCT
alkej-146	12	4	shieh	shieh	VERB
alkej-146	12	5	et	et	PROPN
alkej-146	12	6	al	al	PROPN
alkej-146	12	7	,	,	PUNCT
alkej-146	12	8	[	[	X
alkej-146	12	9	1	1	X
alkej-146	12	10	]	]	PUNCT
alkej-146	12	11	proposed	propose	VERB
alkej-146	12	12	an	an	DET
alkej-146	12	13	adaptive	adaptive	ADJ
alkej-146	12	14	backstepping	backstepping	NOUN
alkej-146	12	15	displacement	displacement	NOUN
alkej-146	12	16	tracking	tracking	NOUN
alkej-146	12	17	control	control	NOUN
alkej-146	12	18	for	for	ADP
alkej-146	12	19	piezoelectric	piezoelectric	NOUN
alkej-146	12	20	actuating	actuate	VERB
alkej-146	12	21	mechanism	mechanism	NOUN
alkej-146	12	22	.	.	PUNCT
alkej-146	13	1	the	the	DET
alkej-146	13	2	trajectory	trajectory	NOUN
alkej-146	13	3	tracking	tracking	NOUN
alkej-146	13	4	of	of	ADP
alkej-146	13	5	a	a	DET
alkej-146	13	6	large	large	ADJ
alkej-146	13	7	-	-	PUNCT
alkej-146	13	8	displacement	displacement	ADJ
alkej-146	13	9	piezoelectric	piezoelectric	NOUN
alkej-146	13	10	actuator	actuator	NOUN
alkej-146	13	11	(	(	PUNCT
alkej-146	13	12	ldpa	ldpa	PROPN
alkej-146	13	13	)	)	PUNCT
alkej-146	13	14	using	use	VERB
alkej-146	13	15	a	a	DET
alkej-146	13	16	nonlinear	nonlinear	ADJ
alkej-146	13	17	observer	observer	NOUN
alkej-146	13	18	-	-	PUNCT
alkej-146	13	19	based	base	VERB
alkej-146	13	20	variable	variable	ADJ
alkej-146	13	21	structure	structure	NOUN
alkej-146	13	22	control	control	NOUN
alkej-146	13	23	(	(	PUNCT
alkej-146	13	24	vsc	vsc	PROPN
alkej-146	13	25	)	)	PUNCT
alkej-146	13	26	was	be	AUX
alkej-146	13	27	developed	develop	VERB
alkej-146	13	28	by	by	ADP
alkej-146	13	29	hwang	hwang	PROPN
alkej-146	13	30	;	;	PUNCT
alkej-146	13	31	et.al	et.al	PROPN
alkej-146	13	32	.	.	PUNCT
alkej-146	14	1	in	in	ADP
alkej-146	14	2	2005	2005	NUM
alkej-146	14	3	[	[	X
alkej-146	14	4	4	4	NUM
alkej-146	14	5	]	]	PUNCT
alkej-146	14	6	.	.	PUNCT
alkej-146	15	1	the	the	DET
alkej-146	15	2	intelligent	intelligent	ADJ
alkej-146	15	3	control	control	NOUN
alkej-146	15	4	systems	system	NOUN
alkej-146	15	5	are	be	AUX
alkej-146	15	6	employed	employ	VERB
alkej-146	15	7	also	also	ADV
alkej-146	15	8	to	to	PART
alkej-146	15	9	implement	implement	VERB
alkej-146	15	10	a	a	DET
alkej-146	15	11	precise	precise	ADJ
alkej-146	15	12	tracking	tracking	NOUN
alkej-146	15	13	for	for	ADP
alkej-146	15	14	the	the	DET
alkej-146	15	15	micropositioner	micropositioner	ADJ
alkej-146	15	16	stage	stage	NOUN
alkej-146	15	17	.	.	PUNCT
alkej-146	16	1	in	in	ADP
alkej-146	16	2	2006	2006	NUM
alkej-146	16	3	,	,	PUNCT
alkej-146	16	4	lin	lin	PROPN
alkej-146	16	5	et	et	PROPN
alkej-146	16	6	al	al	PROPN
alkej-146	16	7	.	.	PUNCT
alkej-146	17	1	[	[	X
alkej-146	17	2	5	5	NUM
alkej-146	17	3	]	]	PUNCT
alkej-146	17	4	who	who	PRON
alkej-146	17	5	proposed	propose	VERB
alkej-146	17	6	an	an	DET
alkej-146	17	7	adaptive	adaptive	ADJ
alkej-146	17	8	wavelet	wavelet	NOUN
alkej-146	17	9	neural	neural	ADJ
alkej-146	17	10	network	network	NOUN
alkej-146	17	11	(	(	PUNCT
alkej-146	17	12	awnn	awnn	NOUN
alkej-146	17	13	)	)	PUNCT
alkej-146	17	14	control	control	NOUN
alkej-146	17	15	with	with	ADP
alkej-146	17	16	hysteresis	hysteresis	NOUN
alkej-146	17	17	estimation	estimation	NOUN
alkej-146	17	18	to	to	PART
alkej-146	17	19	control	control	VERB
alkej-146	17	20	performance	performance	NOUN
alkej-146	17	21	of	of	ADP
alkej-146	17	22	a	a	DET
alkej-146	17	23	piezo	piezo	ADJ
alkej-146	17	24	-	-	ADJ
alkej-146	17	25	positioning	positioning	NOUN
alkej-146	17	26	mechanism	mechanism	NOUN
alkej-146	17	27	.	.	PUNCT
alkej-146	18	1	in	in	ADP
alkej-146	18	2	the	the	DET
alkej-146	18	3	field	field	NOUN
alkej-146	18	4	of	of	ADP
alkej-146	18	5	optimal	optimal	ADJ
alkej-146	18	6	control	control	NOUN
alkej-146	18	7	,	,	PUNCT
alkej-146	18	8	shieh	shieh	ADJ
alkej-146	18	9	in	in	ADP
alkej-146	18	10	2008	2008	NUM
alkej-146	18	11	[	[	X
alkej-146	18	12	6	6	X
alkej-146	18	13	]	]	PUNCT
alkej-146	18	14	utilize	utilize	VERB
alkej-146	18	15	the	the	DET
alkej-146	18	16	optimal	optimal	ADJ
alkej-146	18	17	lqr	lqr	NOUN
alkej-146	18	18	control	control	NOUN
alkej-146	18	19	approach	approach	NOUN
alkej-146	18	20	to	to	PART
alkej-146	18	21	tune	tune	VERB
alkej-146	18	22	a	a	DET
alkej-146	18	23	pid	pid	NOUN
alkej-146	18	24	controller	controller	NOUN
alkej-146	18	25	to	to	PART
alkej-146	18	26	control	control	VERB
alkej-146	18	27	a	a	DET
alkej-146	18	28	micropositioner	micropositioner	ADV
alkej-146	18	29	stages	stage	NOUN
alkej-146	18	30	position	position	NOUN
alkej-146	18	31	in	in	ADP
alkej-146	18	32	an	an	DET
alkej-146	18	33	effective	effective	ADJ
alkej-146	18	34	way	way	NOUN
alkej-146	18	35	.	.	PUNCT
alkej-146	19	1	this	this	DET
alkej-146	19	2	paper	paper	NOUN
alkej-146	19	3	endeavors	endeavor	NOUN
alkej-146	19	4	to	to	PART
alkej-146	19	5	design	design	VERB
alkej-146	19	6	a	a	DET
alkej-146	19	7	control	control	NOUN
alkej-146	19	8	system	system	NOUN
alkej-146	19	9	using	use	VERB
alkej-146	19	10	genetic	genetic	ADJ
alkej-146	19	11	algorithm	algorithm	NOUN
alkej-146	19	12	to	to	PART
alkej-146	19	13	accurately	accurately	ADV
alkej-146	19	14	control	control	VERB
alkej-146	19	15	a	a	DET
alkej-146	19	16	piezoelectric	piezoelectric	NOUN
alkej-146	19	17	micropositioner	micropositioner	ADV
alkej-146	19	18	.	.	PUNCT
alkej-146	20	1	genetic	genetic	ADJ
alkej-146	20	2	algorithm	algorithm	NOUN
alkej-146	20	3	or	or	CCONJ
alkej-146	20	4	in	in	ADP
alkej-146	20	5	short	short	PROPN
alkej-146	20	6	ga	ga	PROPN
alkej-146	20	7	is	be	AUX
alkej-146	20	8	a	a	DET
alkej-146	20	9	stochastic	stochastic	ADJ
alkej-146	20	10	algorithm	algorithm	NOUN
alkej-146	20	11	based	base	VERB
alkej-146	20	12	on	on	ADP
alkej-146	20	13	principles	principle	NOUN
alkej-146	20	14	of	of	ADP
alkej-146	20	15	natural	natural	ADJ
alkej-146	20	16	selection	selection	NOUN
alkej-146	20	17	and	and	CCONJ
alkej-146	20	18	genetics	genetic	NOUN
alkej-146	20	19	,	,	PUNCT
alkej-146	20	20	in	in	ADP
alkej-146	20	21	other	other	ADJ
alkej-146	20	22	words	word	NOUN
alkej-146	20	23	,	,	PUNCT
alkej-146	20	24	it	it	PRON
alkej-146	20	25	is	be	AUX
alkej-146	20	26	a	a	DET
alkej-146	20	27	stochastic	stochastic	ADJ
alkej-146	20	28	global	global	ADJ
alkej-146	20	29	search	search	NOUN
alkej-146	20	30	method	method	NOUN
alkej-146	20	31	that	that	PRON
alkej-146	20	32	mimics	mimic	VERB
alkej-146	20	33	the	the	DET
alkej-146	20	34	process	process	NOUN
alkej-146	20	35	of	of	ADP
alkej-146	20	36	natural	natural	ADJ
alkej-146	20	37	evolution	evolution	NOUN
alkej-146	20	38	.	.	PUNCT
alkej-146	21	1	using	use	VERB
alkej-146	21	2	genetic	genetic	ADJ
alkej-146	21	3	algorithms	algorithm	NOUN
alkej-146	21	4	to	to	PART
alkej-146	21	5	perform	perform	VERB
alkej-146	21	6	the	the	DET
alkej-146	21	7	tuning	tuning	NOUN
alkej-146	21	8	of	of	ADP
alkej-146	21	9	the	the	DET
alkej-146	21	10	controller	controller	NOUN
alkej-146	21	11	will	will	AUX
alkej-146	21	12	result	result	VERB
alkej-146	21	13	in	in	ADP
alkej-146	21	14	the	the	DET
alkej-146	21	15	mailto:yasirkh84@yahoo.com	mailto:yasirkh84@yahoo.com	PROPN
alkej-146	21	16	yasir	yasir	PROPN
alkej-146	21	17	khudhair	khudhair	PROPN
alkej-146	21	18	abbas	abbas	PROPN
alkej-146	21	19	al	al	PROPN
alkej-146	21	20	-	-	PUNCT
alkej-146	21	21	khwarizmi	khwarizmi	PROPN
alkej-146	21	22	engineering	engineering	NOUN
alkej-146	21	23	journal	journal	PROPN
alkej-146	21	24	,	,	PUNCT
alkej-146	21	25	vol	vol	NOUN
alkej-146	21	26	.	.	PROPN
alkej-146	21	27	8	8	NUM
alkej-146	21	28	,	,	PUNCT
alkej-146	21	29	no.4	no.4	PROPN
alkej-146	21	30	,	,	PUNCT
alkej-146	21	31	pp40	pp40	PROPN
alkej-146	21	32	-52	-52	PROPN
alkej-146	21	33	(	(	PUNCT
alkej-146	21	34	2012	2012	NUM
alkej-146	21	35	)	)	PUNCT
alkej-146	21	36	41	41	NUM
alkej-146	21	37	optimum	optimum	ADJ
alkej-146	21	38	controller	controller	NOUN
alkej-146	21	39	being	be	AUX
alkej-146	21	40	evaluated	evaluate	VERB
alkej-146	21	41	for	for	ADP
alkej-146	21	42	the	the	DET
alkej-146	21	43	system	system	NOUN
alkej-146	21	44	every	every	DET
alkej-146	21	45	time	time	NOUN
alkej-146	21	46	[	[	X
alkej-146	21	47	7	7	NUM
alkej-146	21	48	]	]	PUNCT
alkej-146	21	49	.	.	PUNCT
alkej-146	22	1	genetic	genetic	ADJ
alkej-146	22	2	algorithms	algorithm	NOUN
alkej-146	22	3	(	(	PUNCT
alkej-146	22	4	gas	gas	NOUN
alkej-146	22	5	)	)	PUNCT
alkej-146	22	6	were	be	AUX
alkej-146	22	7	invented	invent	VERB
alkej-146	22	8	by	by	ADP
alkej-146	22	9	john	john	PROPN
alkej-146	22	10	holland	holland	PROPN
alkej-146	22	11	in	in	ADP
alkej-146	22	12	the	the	DET
alkej-146	22	13	1960s	1960	NOUN
alkej-146	22	14	and	and	CCONJ
alkej-146	22	15	were	be	AUX
alkej-146	22	16	developed	develop	VERB
alkej-146	22	17	by	by	ADP
alkej-146	22	18	holland	holland	PROPN
alkej-146	22	19	and	and	CCONJ
alkej-146	22	20	his	his	PRON
alkej-146	22	21	students	student	NOUN
alkej-146	22	22	and	and	CCONJ
alkej-146	22	23	colleagues	colleague	NOUN
alkej-146	22	24	at	at	ADP
alkej-146	22	25	the	the	DET
alkej-146	22	26	university	university	PROPN
alkej-146	22	27	of	of	ADP
alkej-146	22	28	michigan	michigan	PROPN
alkej-146	22	29	in	in	ADP
alkej-146	22	30	the	the	DET
alkej-146	22	31	1960s	1960	NOUN
alkej-146	22	32	and	and	CCONJ
alkej-146	22	33	the	the	DET
alkej-146	22	34	1970s	1970	NOUN
alkej-146	22	35	.	.	PUNCT
alkej-146	23	1	in	in	ADP
alkej-146	23	2	contrast	contrast	NOUN
alkej-146	23	3	with	with	ADP
alkej-146	23	4	evolution	evolution	NOUN
alkej-146	23	5	strategies	strategy	NOUN
alkej-146	23	6	and	and	CCONJ
alkej-146	23	7	evolutionary	evolutionary	ADJ
alkej-146	23	8	programming	programming	NOUN
alkej-146	23	9	,	,	PUNCT
alkej-146	23	10	holland	holland	PROPN
alkej-146	23	11	's	's	PART
alkej-146	23	12	original	original	ADJ
alkej-146	23	13	goal	goal	NOUN
alkej-146	23	14	was	be	AUX
alkej-146	23	15	not	not	PART
alkej-146	23	16	to	to	PART
alkej-146	23	17	design	design	VERB
alkej-146	23	18	algorithms	algorithm	NOUN
alkej-146	23	19	to	to	PART
alkej-146	23	20	solve	solve	VERB
alkej-146	23	21	specific	specific	ADJ
alkej-146	23	22	problems	problem	NOUN
alkej-146	23	23	,	,	PUNCT
alkej-146	23	24	but	but	CCONJ
alkej-146	23	25	rather	rather	ADV
alkej-146	23	26	to	to	PART
alkej-146	23	27	formally	formally	ADV
alkej-146	23	28	study	study	VERB
alkej-146	23	29	the	the	DET
alkej-146	23	30	phenomenon	phenomenon	NOUN
alkej-146	23	31	of	of	ADP
alkej-146	23	32	adaptation	adaptation	NOUN
alkej-146	23	33	as	as	SCONJ
alkej-146	23	34	it	it	PRON
alkej-146	23	35	occurs	occur	VERB
alkej-146	23	36	in	in	ADP
alkej-146	23	37	nature	nature	NOUN
alkej-146	23	38	and	and	CCONJ
alkej-146	23	39	to	to	PART
alkej-146	23	40	develop	develop	VERB
alkej-146	23	41	ways	way	NOUN
alkej-146	23	42	in	in	ADP
alkej-146	23	43	which	which	PRON
alkej-146	23	44	the	the	DET
alkej-146	23	45	mechanisms	mechanism	NOUN
alkej-146	23	46	of	of	ADP
alkej-146	23	47	natural	natural	ADJ
alkej-146	23	48	adaptation	adaptation	NOUN
alkej-146	23	49	might	might	AUX
alkej-146	23	50	be	be	AUX
alkej-146	23	51	imported	import	VERB
alkej-146	23	52	into	into	ADP
alkej-146	23	53	computer	computer	NOUN
alkej-146	23	54	systems	system	NOUN
alkej-146	23	55	.	.	PUNCT
alkej-146	24	1	holland	holland	PROPN
alkej-146	24	2	's	's	PART
alkej-146	24	3	1975	1975	NUM
alkej-146	24	4	book	book	NOUN
alkej-146	24	5	adaptation	adaptation	NOUN
alkej-146	24	6	in	in	ADP
alkej-146	24	7	natural	natural	ADJ
alkej-146	24	8	and	and	CCONJ
alkej-146	24	9	artificial	artificial	ADJ
alkej-146	24	10	systems	system	NOUN
alkej-146	24	11	presented	present	VERB
alkej-146	24	12	the	the	DET
alkej-146	24	13	genetic	genetic	ADJ
alkej-146	24	14	algorithm	algorithm	NOUN
alkej-146	24	15	as	as	ADP
alkej-146	24	16	an	an	DET
alkej-146	24	17	abstraction	abstraction	NOUN
alkej-146	24	18	of	of	ADP
alkej-146	24	19	biological	biological	ADJ
alkej-146	24	20	evolution	evolution	NOUN
alkej-146	24	21	and	and	CCONJ
alkej-146	24	22	gave	give	VERB
alkej-146	24	23	a	a	DET
alkej-146	24	24	theoretical	theoretical	ADJ
alkej-146	24	25	framework	framework	NOUN
alkej-146	24	26	for	for	ADP
alkej-146	24	27	adaptation	adaptation	NOUN
alkej-146	24	28	under	under	ADP
alkej-146	24	29	the	the	DET
alkej-146	24	30	ga	ga	PROPN
alkej-146	24	31	.	.	PUNCT
alkej-146	25	1	holland	holland	PROPN
alkej-146	25	2	's	's	PART
alkej-146	25	3	ga	ga	PROPN
alkej-146	25	4	is	be	AUX
alkej-146	25	5	a	a	DET
alkej-146	25	6	method	method	NOUN
alkej-146	25	7	for	for	ADP
alkej-146	25	8	moving	move	VERB
alkej-146	25	9	from	from	ADP
alkej-146	25	10	one	one	NUM
alkej-146	25	11	population	population	NOUN
alkej-146	25	12	of	of	ADP
alkej-146	25	13	"	"	PUNCT
alkej-146	25	14	chromosomes	chromosome	NOUN
alkej-146	25	15	"	"	PUNCT
alkej-146	25	16	(	(	PUNCT
alkej-146	25	17	e.g.	e.g.	ADV
alkej-146	25	18	,	,	PUNCT
alkej-146	25	19	strings	string	NOUN
alkej-146	25	20	of	of	ADP
alkej-146	25	21	ones	one	NOUN
alkej-146	25	22	and	and	CCONJ
alkej-146	25	23	zeros	zero	NOUN
alkej-146	25	24	,	,	PUNCT
alkej-146	25	25	or	or	CCONJ
alkej-146	25	26	"	"	PUNCT
alkej-146	25	27	bits	bit	NOUN
alkej-146	25	28	"	"	PUNCT
alkej-146	25	29	)	)	PUNCT
alkej-146	25	30	to	to	ADP
alkej-146	25	31	a	a	DET
alkej-146	25	32	new	new	ADJ
alkej-146	25	33	population	population	NOUN
alkej-146	25	34	by	by	ADP
alkej-146	25	35	using	use	VERB
alkej-146	25	36	a	a	DET
alkej-146	25	37	kind	kind	NOUN
alkej-146	25	38	of	of	ADP
alkej-146	25	39	"	"	PUNCT
alkej-146	25	40	natural	natural	ADJ
alkej-146	25	41	selection	selection	NOUN
alkej-146	25	42	"	"	PUNCT
alkej-146	25	43	together	together	ADV
alkej-146	25	44	with	with	ADP
alkej-146	25	45	the	the	DET
alkej-146	25	46	genetics−inspired	genetics−inspire	VERB
alkej-146	25	47	operators	operator	NOUN
alkej-146	25	48	of	of	ADP
alkej-146	25	49	crossover	crossover	NOUN
alkej-146	25	50	,	,	PUNCT
alkej-146	25	51	mutation	mutation	NOUN
alkej-146	25	52	,	,	PUNCT
alkej-146	25	53	and	and	CCONJ
alkej-146	25	54	inversion	inversion	NOUN
alkej-146	25	55	.	.	PUNCT
alkej-146	26	1	each	each	DET
alkej-146	26	2	chromosome	chromosome	NOUN
alkej-146	26	3	consists	consist	VERB
alkej-146	26	4	of	of	ADP
alkej-146	26	5	"	"	PUNCT
alkej-146	26	6	genes	gene	NOUN
alkej-146	26	7	"	"	PUNCT
alkej-146	26	8	(	(	PUNCT
alkej-146	26	9	e.g.	e.g.	ADV
alkej-146	26	10	,	,	PUNCT
alkej-146	26	11	bits	bit	NOUN
alkej-146	26	12	)	)	PUNCT
alkej-146	26	13	;	;	PUNCT
alkej-146	26	14	each	each	DET
alkej-146	26	15	gene	gene	NOUN
alkej-146	26	16	is	be	AUX
alkej-146	26	17	an	an	DET
alkej-146	26	18	instance	instance	NOUN
alkej-146	26	19	of	of	ADP
alkej-146	26	20	a	a	DET
alkej-146	26	21	particular	particular	ADJ
alkej-146	26	22	"	"	PUNCT
alkej-146	26	23	allele	allele	NOUN
alkej-146	26	24	"	"	PUNCT
alkej-146	26	25	(	(	PUNCT
alkej-146	26	26	e.g.	e.g.	ADV
alkej-146	26	27	,	,	PUNCT
alkej-146	26	28	0	0	NUM
alkej-146	26	29	or	or	CCONJ
alkej-146	26	30	1	1	NUM
alkej-146	26	31	)	)	PUNCT
alkej-146	27	1	[	[	X
alkej-146	27	2	8	8	NUM
alkej-146	27	3	]	]	PUNCT
alkej-146	27	4	.	.	PUNCT
alkej-146	28	1	it	it	PRON
alkej-146	28	2	is	be	AUX
alkej-146	28	3	worth	worth	ADJ
alkej-146	28	4	mentioning	mention	VERB
alkej-146	28	5	,	,	PUNCT
alkej-146	28	6	that	that	SCONJ
alkej-146	28	7	the	the	DET
alkej-146	28	8	(	(	PUNCT
alkej-146	28	9	gas	gas	NOUN
alkej-146	28	10	)	)	PUNCT
alkej-146	28	11	start	start	VERB
alkej-146	28	12	with	with	ADP
alkej-146	28	13	no	no	DET
alkej-146	28	14	knowledge	knowledge	NOUN
alkej-146	28	15	of	of	ADP
alkej-146	28	16	the	the	DET
alkej-146	28	17	correct	correct	ADJ
alkej-146	28	18	solution	solution	NOUN
alkej-146	28	19	and	and	CCONJ
alkej-146	28	20	depends	depend	VERB
alkej-146	28	21	entirely	entirely	ADV
alkej-146	28	22	on	on	ADP
alkej-146	28	23	responses	response	NOUN
alkej-146	28	24	from	from	ADP
alkej-146	28	25	their	their	PRON
alkej-146	28	26	environment	environment	NOUN
alkej-146	28	27	and	and	CCONJ
alkej-146	28	28	evolution	evolution	NOUN
alkej-146	28	29	operators	operator	NOUN
alkej-146	28	30	such	such	ADJ
alkej-146	28	31	as	as	ADP
alkej-146	28	32	reproduction	reproduction	NOUN
alkej-146	28	33	,	,	PUNCT
alkej-146	28	34	crossover	crossover	NOUN
alkej-146	28	35	,	,	PUNCT
alkej-146	28	36	and	and	CCONJ
alkej-146	28	37	mutation	mutation	NOUN
alkej-146	28	38	to	to	PART
alkej-146	28	39	arrive	arrive	VERB
alkej-146	28	40	to	to	ADP
alkej-146	28	41	the	the	DET
alkej-146	28	42	best	good	ADJ
alkej-146	28	43	solution	solution	NOUN
alkej-146	28	44	.	.	PUNCT
alkej-146	29	1	by	by	ADP
alkej-146	29	2	starting	start	VERB
alkej-146	29	3	at	at	ADP
alkej-146	29	4	several	several	ADJ
alkej-146	29	5	independent	independent	ADJ
alkej-146	29	6	points	point	NOUN
alkej-146	29	7	and	and	CCONJ
alkej-146	29	8	searching	search	VERB
alkej-146	29	9	in	in	ADP
alkej-146	29	10	parallel	parallel	NOUN
alkej-146	29	11	,	,	PUNCT
alkej-146	29	12	the	the	DET
alkej-146	29	13	algorithm	algorithm	NOUN
alkej-146	29	14	avoids	avoid	VERB
alkej-146	29	15	local	local	ADJ
alkej-146	29	16	minima	minima	NOUN
alkej-146	29	17	and	and	CCONJ
alkej-146	29	18	converging	converge	VERB
alkej-146	29	19	to	to	ADP
alkej-146	29	20	suboptimal	suboptimal	ADJ
alkej-146	29	21	solutions	solution	NOUN
alkej-146	29	22	[	[	X
alkej-146	29	23	9	9	NUM
alkej-146	29	24	]	]	PUNCT
alkej-146	29	25	.	.	PUNCT
alkej-146	30	1	the	the	DET
alkej-146	30	2	paper	paper	NOUN
alkej-146	30	3	is	be	AUX
alkej-146	30	4	outlined	outline	VERB
alkej-146	30	5	in	in	ADP
alkej-146	30	6	the	the	DET
alkej-146	30	7	following	following	ADJ
alkej-146	30	8	way	way	NOUN
alkej-146	30	9	:	:	PUNCT
alkej-146	30	10	sec	sec	PROPN
alkej-146	30	11	.	.	PROPN
alkej-146	30	12	2	2	NUM
alkej-146	30	13	explains	explain	VERB
alkej-146	30	14	the	the	DET
alkej-146	30	15	physical	physical	ADJ
alkej-146	30	16	background	background	NOUN
alkej-146	30	17	of	of	ADP
alkej-146	30	18	the	the	DET
alkej-146	30	19	piezoelectric	piezoelectric	NOUN
alkej-146	30	20	actuators	actuator	NOUN
alkej-146	30	21	in	in	ADP
alkej-146	30	22	general	general	ADJ
alkej-146	30	23	.	.	PUNCT
alkej-146	31	1	sec	sec	PROPN
alkej-146	31	2	.	.	PROPN
alkej-146	31	3	3	3	NUM
alkej-146	31	4	gives	give	VERB
alkej-146	31	5	the	the	DET
alkej-146	31	6	necessary	necessary	ADJ
alkej-146	31	7	description	description	NOUN
alkej-146	31	8	of	of	ADP
alkej-146	31	9	the	the	DET
alkej-146	31	10	piezoelectric	piezoelectric	NOUN
alkej-146	31	11	micropositioner	micropositioner	ADJ
alkej-146	31	12	device	device	NOUN
alkej-146	31	13	.	.	PUNCT
alkej-146	32	1	sec	sec	PROPN
alkej-146	32	2	.	.	PROPN
alkej-146	32	3	4	4	NUM
alkej-146	32	4	gives	give	VERB
alkej-146	32	5	the	the	DET
alkej-146	32	6	modeling	modeling	NOUN
alkej-146	32	7	of	of	ADP
alkej-146	32	8	the	the	DET
alkej-146	32	9	piezoelectric	piezoelectric	NOUN
alkej-146	32	10	micropositioner	micropositioner	ADV
alkej-146	32	11	.	.	PUNCT
alkej-146	33	1	the	the	DET
alkej-146	33	2	genetic	genetic	ADJ
alkej-146	33	3	algorithm	algorithm	NOUN
alkej-146	33	4	is	be	AUX
alkej-146	33	5	explained	explain	VERB
alkej-146	33	6	in	in	ADP
alkej-146	33	7	sec	sec	PROPN
alkej-146	33	8	.	.	PROPN
alkej-146	33	9	5	5	NUM
alkej-146	33	10	while	while	SCONJ
alkej-146	33	11	the	the	DET
alkej-146	33	12	tuning	tuning	NOUN
alkej-146	33	13	of	of	ADP
alkej-146	33	14	pid	pid	NOUN
alkej-146	33	15	using	use	VERB
alkej-146	33	16	genetic	genetic	ADJ
alkej-146	33	17	algorithm	algorithm	NOUN
alkej-146	33	18	is	be	AUX
alkej-146	33	19	illustrated	illustrate	VERB
alkej-146	33	20	in	in	ADP
alkej-146	33	21	sec	sec	PROPN
alkej-146	33	22	.	.	PROPN
alkej-146	34	1	6	6	NUM
alkej-146	34	2	.	.	PUNCT
alkej-146	35	1	the	the	DET
alkej-146	35	2	simulation	simulation	NOUN
alkej-146	35	3	results	result	VERB
alkej-146	35	4	and	and	CCONJ
alkej-146	35	5	the	the	DET
alkej-146	35	6	analysis	analysis	NOUN
alkej-146	35	7	of	of	ADP
alkej-146	35	8	the	the	DET
alkej-146	35	9	results	result	NOUN
alkej-146	35	10	are	be	AUX
alkej-146	35	11	given	give	VERB
alkej-146	35	12	in	in	ADP
alkej-146	35	13	sec	sec	PROPN
alkej-146	35	14	.	.	PROPN
alkej-146	36	1	7	7	X
alkej-146	36	2	.	.	X
alkej-146	36	3	finally	finally	ADV
alkej-146	36	4	the	the	DET
alkej-146	36	5	conclusion	conclusion	NOUN
alkej-146	36	6	is	be	AUX
alkej-146	36	7	presented	present	VERB
alkej-146	36	8	in	in	ADP
alkej-146	36	9	sec	sec	PROPN
alkej-146	36	10	.	.	PROPN
alkej-146	37	1	8	8	NUM
alkej-146	37	2	.	.	X
alkej-146	38	1	2	2	NUM
alkej-146	38	2	.	.	X
alkej-146	38	3	physical	physical	ADJ
alkej-146	38	4	background	background	NOUN
alkej-146	38	5	of	of	ADP
alkej-146	38	6	piezoelectric	piezoelectric	NOUN
alkej-146	38	7	actuators	actuator	NOUN
alkej-146	38	8	the	the	DET
alkej-146	38	9	piezoelectric	piezoelectric	ADJ
alkej-146	38	10	actuator	actuator	NOUN
alkej-146	38	11	(	(	PUNCT
alkej-146	38	12	pea	pea	NOUN
alkej-146	38	13	)	)	PUNCT
alkej-146	38	14	is	be	AUX
alkej-146	38	15	a	a	DET
alkej-146	38	16	wellknown	wellknown	NOUN
alkej-146	38	17	commercially	commercially	ADV
alkej-146	38	18	available	available	ADJ
alkej-146	38	19	device	device	NOUN
alkej-146	38	20	for	for	ADP
alkej-146	38	21	managing	manage	VERB
alkej-146	38	22	extremely	extremely	ADV
alkej-146	38	23	small	small	ADJ
alkej-146	38	24	displacements	displacement	NOUN
alkej-146	38	25	in	in	ADP
alkej-146	38	26	the	the	DET
alkej-146	38	27	range	range	NOUN
alkej-146	38	28	of	of	ADP
alkej-146	38	29	10	10	NUM
alkej-146	38	30	pm	pm	NOUN
alkej-146	38	31	(	(	PUNCT
alkej-146	38	32	pm=10	pm=10	NOUN
alkej-146	38	33	m	m	PROPN
alkej-146	38	34	)	)	PUNCT
alkej-146	38	35	to	to	ADP
alkej-146	38	36	100	100	NUM
alkej-146	38	37	.	.	PUNCT
alkej-146	39	1	the	the	DET
alkej-146	39	2	ratio	ratio	NOUN
alkej-146	39	3	of	of	ADP
alkej-146	39	4	the	the	DET
alkej-146	39	5	input	input	NOUN
alkej-146	39	6	voltage	voltage	NOUN
alkej-146	39	7	and	and	CCONJ
alkej-146	39	8	the	the	DET
alkej-146	39	9	output	output	NOUN
alkej-146	39	10	elongation	elongation	NOUN
alkej-146	39	11	is	be	AUX
alkej-146	39	12	very	very	ADV
alkej-146	39	13	satisfactory	satisfactory	ADJ
alkej-146	39	14	for	for	ADP
alkej-146	39	15	this	this	DET
alkej-146	39	16	purpose	purpose	NOUN
alkej-146	39	17	.	.	PUNCT
alkej-146	40	1	a	a	DET
alkej-146	40	2	disadvantage	disadvantage	NOUN
alkej-146	40	3	,	,	PUNCT
alkej-146	40	4	however	however	ADV
alkej-146	40	5	,	,	PUNCT
alkej-146	40	6	is	be	AUX
alkej-146	40	7	its	its	PRON
alkej-146	40	8	highly	highly	ADV
alkej-146	40	9	nonlinear	nonlinear	ADJ
alkej-146	40	10	input	input	NOUN
alkej-146	40	11	/	/	SYM
alkej-146	40	12	output	output	NOUN
alkej-146	40	13	behavior	behavior	NOUN
alkej-146	40	14	.	.	PUNCT
alkej-146	41	1	more	more	ADV
alkej-146	41	2	specifically	specifically	ADV
alkej-146	41	3	,	,	PUNCT
alkej-146	41	4	a	a	DET
alkej-146	41	5	pea	pea	NOUN
alkej-146	41	6	shows	show	VERB
alkej-146	41	7	hysteresis	hysteresis	NOUN
alkej-146	41	8	behavior	behavior	NOUN
alkej-146	41	9	.	.	PUNCT
alkej-146	42	1	in	in	ADP
alkej-146	42	2	simple	simple	ADJ
alkej-146	42	3	terms	term	NOUN
alkej-146	42	4	,	,	PUNCT
alkej-146	42	5	this	this	PRON
alkej-146	42	6	means	mean	VERB
alkej-146	42	7	that	that	SCONJ
alkej-146	42	8	for	for	ADP
alkej-146	42	9	a	a	DET
alkej-146	42	10	certain	certain	ADJ
alkej-146	42	11	input	input	NOUN
alkej-146	42	12	,	,	PUNCT
alkej-146	42	13	there	there	PRON
alkej-146	42	14	is	be	VERB
alkej-146	42	15	no	no	DET
alkej-146	42	16	unique	unique	ADJ
alkej-146	42	17	output	output	NOUN
alkej-146	42	18	.	.	PUNCT
alkej-146	43	1	instead	instead	ADV
alkej-146	43	2	,	,	PUNCT
alkej-146	43	3	the	the	DET
alkej-146	43	4	output	output	NOUN
alkej-146	43	5	depends	depend	VERB
alkej-146	43	6	on	on	ADP
alkej-146	43	7	the	the	DET
alkej-146	43	8	input	input	NOUN
alkej-146	43	9	history	history	NOUN
alkej-146	43	10	.	.	PUNCT
alkej-146	44	1	for	for	ADP
alkej-146	44	2	high	high	ADJ
alkej-146	44	3	-	-	PUNCT
alkej-146	44	4	accuracy	accuracy	NOUN
alkej-146	44	5	positioning	positioning	NOUN
alkej-146	44	6	and	and	CCONJ
alkej-146	44	7	tracking	tracking	NOUN
alkej-146	44	8	systems	system	NOUN
alkej-146	44	9	,	,	PUNCT
alkej-146	44	10	the	the	DET
alkej-146	44	11	piezo	piezo	PROPN
alkej-146	44	12	-	-	ADJ
alkej-146	44	13	actuated	actuate	VERB
alkej-146	44	14	positioning	positioning	NOUN
alkej-146	44	15	mechanism	mechanism	NOUN
alkej-146	44	16	should	should	AUX
alkej-146	44	17	be	be	AUX
alkej-146	44	18	equipped	equip	VERB
alkej-146	44	19	with	with	ADP
alkej-146	44	20	a	a	DET
alkej-146	44	21	controller	controller	NOUN
alkej-146	44	22	.	.	PUNCT
alkej-146	45	1	modern	modern	ADJ
alkej-146	45	2	controller	controller	NOUN
alkej-146	45	3	design	design	NOUN
alkej-146	45	4	is	be	AUX
alkej-146	45	5	based	base	VERB
alkej-146	45	6	on	on	ADP
alkej-146	45	7	a	a	DET
alkej-146	45	8	model	model	NOUN
alkej-146	45	9	of	of	ADP
alkej-146	45	10	the	the	DET
alkej-146	45	11	system	system	NOUN
alkej-146	45	12	to	to	PART
alkej-146	45	13	be	be	AUX
alkej-146	45	14	controlled	control	VERB
alkej-146	45	15	.	.	PUNCT
alkej-146	46	1	for	for	ADP
alkej-146	46	2	piezo	piezo	ADJ
alkej-146	46	3	-	-	ADJ
alkej-146	46	4	actuated	actuate	VERB
alkej-146	46	5	positioning	positioning	NOUN
alkej-146	46	6	mechanisms	mechanism	NOUN
alkej-146	46	7	,	,	PUNCT
alkej-146	46	8	the	the	DET
alkej-146	46	9	dynamical	dynamical	ADJ
alkej-146	46	10	aspects	aspect	NOUN
alkej-146	46	11	of	of	ADP
alkej-146	46	12	the	the	DET
alkej-146	46	13	pea	pea	NOUN
alkej-146	46	14	play	play	VERB
alkej-146	46	15	a	a	DET
alkej-146	46	16	dominant	dominant	ADJ
alkej-146	46	17	role	role	NOUN
alkej-146	46	18	[	[	X
alkej-146	46	19	10	10	NUM
alkej-146	46	20	]	]	PUNCT
alkej-146	46	21	.	.	PUNCT
alkej-146	47	1	dielectric	dielectric	ADJ
alkej-146	47	2	materials	material	NOUN
alkej-146	47	3	are	be	AUX
alkej-146	47	4	insulators	insulator	NOUN
alkej-146	47	5	,	,	PUNCT
alkej-146	47	6	thus	thus	ADV
alkej-146	47	7	,	,	PUNCT
alkej-146	47	8	there	there	PRON
alkej-146	47	9	is	be	VERB
alkej-146	47	10	an	an	DET
alkej-146	47	11	electrical	electrical	ADJ
alkej-146	47	12	relation	relation	NOUN
alkej-146	47	13	between	between	ADP
alkej-146	47	14	electrical	electrical	ADJ
alkej-146	47	15	voltage	voltage	NOUN
alkej-146	47	16	and	and	CCONJ
alkej-146	47	17	electrical	electrical	ADJ
alkej-146	47	18	charge	charge	NOUN
alkej-146	47	19	.	.	PUNCT
alkej-146	48	1	piezoelectric	piezoelectric	NOUN
alkej-146	48	2	is	be	AUX
alkej-146	48	3	a	a	DET
alkej-146	48	4	special	special	ADJ
alkej-146	48	5	type	type	NOUN
alkej-146	48	6	of	of	ADP
alkej-146	48	7	dielectric	dielectric	NOUN
alkej-146	48	8	in	in	ADP
alkej-146	48	9	the	the	DET
alkej-146	48	10	sense	sense	NOUN
alkej-146	48	11	that	that	SCONJ
alkej-146	48	12	,	,	PUNCT
alkej-146	48	13	in	in	ADP
alkej-146	48	14	piezoelectric	piezoelectric	ADJ
alkej-146	48	15	materials	material	NOUN
alkej-146	48	16	,	,	PUNCT
alkej-146	48	17	an	an	DET
alkej-146	48	18	externally	externally	ADV
alkej-146	48	19	applied	apply	VERB
alkej-146	48	20	force	force	NOUN
alkej-146	48	21	induces	induce	VERB
alkej-146	48	22	an	an	DET
alkej-146	48	23	electrical	electrical	ADJ
alkej-146	48	24	charge	charge	NOUN
alkej-146	48	25	.	.	PUNCT
alkej-146	49	1	conversely	conversely	ADV
alkej-146	49	2	,	,	PUNCT
alkej-146	49	3	an	an	DET
alkej-146	49	4	applied	apply	VERB
alkej-146	49	5	electrical	electrical	ADJ
alkej-146	49	6	charge	charge	NOUN
alkej-146	49	7	induces	induce	VERB
alkej-146	49	8	a	a	DET
alkej-146	49	9	force	force	NOUN
alkej-146	49	10	[	[	X
alkej-146	49	11	10	10	NUM
alkej-146	49	12	]	]	PUNCT
alkej-146	49	13	.	.	PUNCT
alkej-146	50	1	the	the	DET
alkej-146	50	2	former	former	ADJ
alkej-146	50	3	effect	effect	NOUN
alkej-146	50	4	is	be	AUX
alkej-146	50	5	known	know	VERB
alkej-146	50	6	as	as	ADP
alkej-146	50	7	the	the	DET
alkej-146	50	8	piezoelectric	piezoelectric	ADJ
alkej-146	50	9	effect	effect	NOUN
alkej-146	50	10	and	and	CCONJ
alkej-146	50	11	was	be	AUX
alkej-146	50	12	discovered	discover	VERB
alkej-146	50	13	in	in	ADP
alkej-146	50	14	1880	1880	NUM
alkej-146	50	15	by	by	ADP
alkej-146	50	16	the	the	DET
alkej-146	50	17	curie	curie	PROPN
alkej-146	50	18	brothers	brother	NOUN
alkej-146	50	19	.	.	PUNCT
alkej-146	51	1	the	the	DET
alkej-146	51	2	latter	latter	ADJ
alkej-146	51	3	effect	effect	NOUN
alkej-146	51	4	is	be	AUX
alkej-146	51	5	the	the	DET
alkej-146	51	6	inverse	inverse	ADJ
alkej-146	51	7	piezoelectric	piezoelectric	NOUN
alkej-146	51	8	effect	effect	NOUN
alkej-146	51	9	.	.	PUNCT
alkej-146	52	1	both	both	DET
alkej-146	52	2	pressure	pressure	NOUN
alkej-146	52	3	electricity	electricity	NOUN
alkej-146	52	4	and	and	CCONJ
alkej-146	52	5	piezoelectricity	piezoelectricity	NOUN
alkej-146	52	6	were	be	AUX
alkej-146	52	7	used	use	VERB
alkej-146	52	8	to	to	PART
alkej-146	52	9	describe	describe	VERB
alkej-146	52	10	the	the	DET
alkej-146	52	11	same	same	ADJ
alkej-146	52	12	phenomenon	phenomenon	NOUN
alkej-146	52	13	.	.	PUNCT
alkej-146	53	1	besides	besides	SCONJ
alkej-146	53	2	the	the	DET
alkej-146	53	3	piezoelectric	piezoelectric	NOUN
alkej-146	53	4	and	and	CCONJ
alkej-146	53	5	inverse	inverse	ADJ
alkej-146	53	6	piezoelectric	piezoelectric	NOUN
alkej-146	53	7	effect	effect	NOUN
alkej-146	53	8	,	,	PUNCT
alkej-146	53	9	there	there	PRON
alkej-146	53	10	are	be	VERB
alkej-146	53	11	already	already	ADV
alkej-146	53	12	mentioned	mention	VERB
alkej-146	53	13	electrical	electrical	ADJ
alkej-146	53	14	relation	relation	NOUN
alkej-146	53	15	between	between	ADP
alkej-146	53	16	voltage	voltage	NOUN
alkej-146	53	17	and	and	CCONJ
alkej-146	53	18	charge	charge	NOUN
alkej-146	53	19	,	,	PUNCT
alkej-146	53	20	and	and	CCONJ
alkej-146	53	21	a	a	DET
alkej-146	53	22	mechanical	mechanical	ADJ
alkej-146	53	23	relation	relation	NOUN
alkej-146	53	24	between	between	ADP
alkej-146	53	25	force	force	NOUN
alkej-146	53	26	and	and	CCONJ
alkej-146	53	27	elongation	elongation	NOUN
alkej-146	53	28	[	[	X
alkej-146	53	29	11	11	NUM
alkej-146	53	30	]	]	PUNCT
alkej-146	53	31	.	.	PUNCT
alkej-146	53	32	.	.	PUNCT
alkej-146	54	1	⎯⎯	⎯⎯	PRON
alkej-146	55	1	⎯⎯	⎯⎯	NOUN
alkej-146	55	2	.	.	PUNCT
alkej-146	56	1	⎯⎯	⎯⎯	DET
alkej-146	56	2	fig	fig	NOUN
alkej-146	56	3	.	.	PUNCT
alkej-146	57	1	1	1	NUM
alkej-146	57	2	.	.	X
alkej-146	57	3	schematic	schematic	ADJ
alkej-146	57	4	representation	representation	NOUN
alkej-146	57	5	of	of	ADP
alkej-146	57	6	the	the	DET
alkej-146	57	7	different	different	ADJ
alkej-146	57	8	relations	relation	NOUN
alkej-146	57	9	in	in	ADP
alkej-146	57	10	a	a	DET
alkej-146	57	11	pea	pea	NOUN
alkej-146	57	12	.	.	PUNCT
alkej-146	58	1	in	in	ADP
alkej-146	58	2	fig	fig	NOUN
alkej-146	58	3	.	.	PUNCT
alkej-146	59	1	(	(	PUNCT
alkej-146	59	2	1	1	NUM
alkej-146	59	3	)	)	PUNCT
alkej-146	59	4	,	,	PUNCT
alkej-146	59	5	a	a	DET
alkej-146	59	6	schematic	schematic	ADJ
alkej-146	59	7	representation	representation	NOUN
alkej-146	59	8	of	of	ADP
alkej-146	59	9	the	the	DET
alkej-146	59	10	different	different	ADJ
alkej-146	59	11	relations	relation	NOUN
alkej-146	59	12	is	be	AUX
alkej-146	59	13	given	give	VERB
alkej-146	59	14	.	.	PUNCT
alkej-146	60	1	the	the	DET
alkej-146	60	2	piezo	piezo	PROPN
alkej-146	60	3	effect	effect	NOUN
alkej-146	60	4	is	be	AUX
alkej-146	60	5	the	the	DET
alkej-146	60	6	connection	connection	NOUN
alkej-146	60	7	between	between	ADP
alkej-146	60	8	the	the	DET
alkej-146	60	9	electrical	electrical	ADJ
alkej-146	60	10	and	and	CCONJ
alkej-146	60	11	mechanical	mechanical	ADJ
alkej-146	60	12	domains	domain	NOUN
alkej-146	60	13	.	.	PUNCT
alkej-146	61	1	due	due	ADP
alkej-146	61	2	to	to	ADP
alkej-146	61	3	this	this	DET
alkej-146	61	4	effect	effect	NOUN
alkej-146	61	5	,	,	PUNCT
alkej-146	61	6	piezoelectric	piezoelectric	NOUN
alkej-146	61	7	are	be	AUX
alkej-146	61	8	potentially	potentially	ADV
alkej-146	61	9	useful	useful	ADJ
alkej-146	61	10	as	as	ADP
alkej-146	61	11	electromechanical	electromechanical	ADJ
alkej-146	61	12	actuators	actuator	NOUN
alkej-146	61	13	.	.	PUNCT
alkej-146	62	1	in	in	ADP
alkej-146	62	2	naturally	naturally	ADV
alkej-146	62	3	occurring	occur	VERB
alkej-146	62	4	piezoelectric	piezoelectric	ADJ
alkej-146	62	5	materials	material	NOUN
alkej-146	62	6	,	,	PUNCT
alkej-146	62	7	such	such	ADJ
alkej-146	62	8	as	as	ADP
alkej-146	62	9	quartz	quartz	NOUN
alkej-146	62	10	,	,	PUNCT
alkej-146	62	11	the	the	DET
alkej-146	62	12	(	(	PUNCT
alkej-146	62	13	inverse	inverse	NOUN
alkej-146	62	14	)	)	PUNCT
alkej-146	62	15	piezoelectric	piezoelectric	ADJ
alkej-146	62	16	effect	effect	NOUN
alkej-146	62	17	is	be	AUX
alkej-146	62	18	too	too	ADV
alkej-146	62	19	small	small	ADJ
alkej-146	62	20	to	to	PART
alkej-146	62	21	be	be	AUX
alkej-146	62	22	of	of	ADP
alkej-146	62	23	practical	practical	ADJ
alkej-146	62	24	use	use	NOUN
alkej-146	62	25	.	.	PUNCT
alkej-146	63	1	fabricated	fabricate	VERB
alkej-146	63	2	piezoelectric	piezoelectric	ADJ
alkej-146	63	3	polycrystalline	polycrystalline	NOUN
alkej-146	63	4	ceramics	ceramic	NOUN
alkej-146	63	5	are	be	AUX
alkej-146	63	6	much	much	ADV
alkej-146	63	7	more	more	ADV
alkej-146	63	8	suitable	suitable	ADJ
alkej-146	63	9	for	for	ADP
alkej-146	63	10	actuator	actuator	NOUN
alkej-146	63	11	purposes	purpose	NOUN
alkej-146	63	12	because	because	SCONJ
alkej-146	63	13	the	the	DET
alkej-146	63	14	proper	proper	ADJ
alkej-146	63	15	mixture	mixture	NOUN
alkej-146	63	16	of	of	ADP
alkej-146	63	17	ingredients	ingredient	NOUN
alkej-146	63	18	can	can	AUX
alkej-146	63	19	influence	influence	VERB
alkej-146	63	20	the	the	DET
alkej-146	63	21	useful	useful	ADJ
alkej-146	63	22	properties	property	NOUN
alkej-146	63	23	,	,	PUNCT
alkej-146	63	24	such	such	ADJ
alkej-146	63	25	as	as	ADP
alkej-146	63	26	maximum	maximum	ADJ
alkej-146	63	27	elongation	elongation	NOUN
alkej-146	63	28	.	.	PUNCT
alkej-146	64	1	a	a	DET
alkej-146	64	2	disadvantage	disadvantage	NOUN
alkej-146	64	3	of	of	ADP
alkej-146	64	4	fabricated	fabricate	VERB
alkej-146	64	5	piezoelectric	piezoelectric	NOUN
alkej-146	64	6	ceramics	ceramic	NOUN
alkej-146	64	7	is	be	AUX
alkej-146	64	8	that	that	SCONJ
alkej-146	64	9	a	a	DET
alkej-146	64	10	hysteresis	hysteresis	NOUN
alkej-146	64	11	effect	effect	NOUN
alkej-146	64	12	is	be	AUX
alkej-146	64	13	encountered	encounter	VERB
alkej-146	64	14	between	between	ADP
alkej-146	64	15	electrical	electrical	ADJ
alkej-146	64	16	voltage	voltage	NOUN
alkej-146	64	17	and	and	CCONJ
alkej-146	64	18	electrical	electrical	ADJ
alkej-146	64	19	charge	charge	NOUN
alkej-146	64	20	[	[	X
alkej-146	64	21	11	11	NUM
alkej-146	64	22	]	]	PUNCT
alkej-146	64	23	.	.	PUNCT
alkej-146	65	1	historical	historical	ADJ
alkej-146	65	2	perspectives	perspective	NOUN
alkej-146	65	3	of	of	ADP
alkej-146	65	4	the	the	DET
alkej-146	65	5	piezoelectric	piezoelectric	ADJ
alkej-146	65	6	effect	effect	NOUN
alkej-146	65	7	as	as	ADV
alkej-146	65	8	well	well	ADV
alkej-146	65	9	as	as	ADP
alkej-146	65	10	recent	recent	ADJ
alkej-146	65	11	advances	advance	NOUN
alkej-146	65	12	in	in	ADP
alkej-146	65	13	ceramic	ceramic	ADJ
alkej-146	65	14	and	and	CCONJ
alkej-146	65	15	thin	thin	ADJ
alkej-146	65	16	film	film	NOUN
alkej-146	65	17	actuators	actuator	NOUN
alkej-146	65	18	are	be	AUX
alkej-146	65	19	provided	provide	VERB
alkej-146	65	20	in	in	ADP
alkej-146	65	21	[	[	X
alkej-146	65	22	12	12	NUM
alkej-146	65	23	,	,	PUNCT
alkej-146	65	24	13	13	NUM
alkej-146	65	25	]	]	PUNCT
alkej-146	65	26	,	,	PUNCT
alkej-146	65	27	and	and	CCONJ
alkej-146	65	28	[	[	X
alkej-146	65	29	14	14	NUM
alkej-146	65	30	]	]	PUNCT
alkej-146	65	31	.	.	PUNCT
alkej-146	66	1	yasir	yasir	PROPN
alkej-146	66	2	khudhair	khudhair	PROPN
alkej-146	66	3	abbas	abbas	PROPN
alkej-146	66	4	al	al	PROPN
alkej-146	66	5	-	-	PUNCT
alkej-146	66	6	khwarizmi	khwarizmi	PROPN
alkej-146	66	7	engineering	engineering	NOUN
alkej-146	66	8	journal	journal	PROPN
alkej-146	66	9	,	,	PUNCT
alkej-146	66	10	vol	vol	NOUN
alkej-146	66	11	.	.	PROPN
alkej-146	66	12	8	8	NUM
alkej-146	66	13	,	,	PUNCT
alkej-146	66	14	no.4	no.4	PROPN
alkej-146	66	15	,	,	PUNCT
alkej-146	66	16	pp40	pp40	PROPN
alkej-146	66	17	-52	-52	PROPN
alkej-146	66	18	(	(	PUNCT
alkej-146	66	19	2012	2012	NUM
alkej-146	66	20	)	)	PUNCT
alkej-146	66	21	42	42	NUM
alkej-146	66	22	3	3	NUM
alkej-146	66	23	.	.	PUNCT
alkej-146	66	24	description	description	NOUN
alkej-146	66	25	of	of	ADP
alkej-146	66	26	the	the	DET
alkej-146	66	27	piezoelectric	piezoelectric	NOUN
alkej-146	66	28	micropositioner	micropositioner	ADV
alkej-146	66	29	the	the	DET
alkej-146	66	30	double	double	ADJ
alkej-146	66	31	-	-	PUNCT
alkej-146	66	32	axis	axis	NOUN
alkej-146	66	33	micropositioner	micropositioner	ADV
alkej-146	66	34	driven	drive	VERB
alkej-146	66	35	by	by	ADP
alkej-146	66	36	stacked	stack	VERB
alkej-146	66	37	piezo	piezo	NOUN
alkej-146	66	38	-	-	NOUN
alkej-146	66	39	actuators	actuator	NOUN
alkej-146	66	40	used	use	VERB
alkej-146	66	41	in	in	ADP
alkej-146	66	42	this	this	DET
alkej-146	66	43	study	study	NOUN
alkej-146	66	44	is	be	AUX
alkej-146	66	45	a	a	DET
alkej-146	66	46	micropositioner	micropositioner	NOUN
alkej-146	66	47	with	with	ADP
alkej-146	66	48	displacement	displacement	ADJ
alkej-146	66	49	range	range	NOUN
alkej-146	66	50	of	of	ADP
alkej-146	66	51	(	(	PUNCT
alkej-146	66	52	0	0	NUM
alkej-146	66	53	–	–	SYM
alkej-146	66	54	80	80	NUM
alkej-146	66	55	)	)	PUNCT
alkej-146	66	56	in	in	ADP
alkej-146	66	57	the	the	DET
alkej-146	66	58	x	x	NOUN
alkej-146	66	59	and	and	CCONJ
alkej-146	66	60	y	y	PROPN
alkej-146	66	61	directions	direction	NOUN
alkej-146	66	62	.	.	PUNCT
alkej-146	67	1	the	the	DET
alkej-146	67	2	outline	outline	NOUN
alkej-146	67	3	sketch	sketch	NOUN
alkej-146	67	4	of	of	ADP
alkej-146	67	5	this	this	DET
alkej-146	67	6	stage	stage	NOUN
alkej-146	67	7	is	be	AUX
alkej-146	67	8	shown	show	VERB
alkej-146	67	9	in	in	ADP
alkej-146	67	10	fig	fig	NOUN
alkej-146	67	11	.	.	PUNCT
alkej-146	68	1	(	(	PUNCT
alkej-146	68	2	2	2	NUM
alkej-146	68	3	-	-	PUNCT
alkej-146	68	4	a	a	NOUN
alkej-146	68	5	)	)	PUNCT
alkej-146	68	6	,	,	PUNCT
alkej-146	68	7	and	and	CCONJ
alkej-146	68	8	it	it	PRON
alkej-146	68	9	contains	contain	VERB
alkej-146	68	10	the	the	DET
alkej-146	68	11	following	follow	VERB
alkej-146	68	12	elements	element	NOUN
alkej-146	68	13	:	:	PUNCT
alkej-146	68	14	stacked	stack	VERB
alkej-146	68	15	piezoactuator	piezoactuator	NOUN
alkej-146	68	16	,	,	PUNCT
alkej-146	68	17	heavy	heavy	ADJ
alkej-146	68	18	base	base	NOUN
alkej-146	68	19	,	,	PUNCT
alkej-146	68	20	flexure	flexure	NOUN
alkej-146	68	21	mount	mount	NOUN
alkej-146	68	22	,	,	PUNCT
alkej-146	68	23	lever	lever	NOUN
alkej-146	68	24	arm	arm	NOUN
alkej-146	68	25	,	,	PUNCT
alkej-146	68	26	movable	movable	ADJ
alkej-146	68	27	top	top	ADJ
alkej-146	68	28	plate	plate	NOUN
alkej-146	68	29	,	,	PUNCT
alkej-146	68	30	and	and	CCONJ
alkej-146	68	31	strain	strain	ADJ
alkej-146	68	32	-	-	PUNCT
alkej-146	68	33	gauge	gauge	NOUN
alkej-146	68	34	transducers	transducer	NOUN
alkej-146	68	35	.	.	PUNCT
alkej-146	69	1	its	its	PRON
alkej-146	69	2	single	single	ADJ
alkej-146	69	3	-	-	PUNCT
alkej-146	69	4	axis	axis	NOUN
alkej-146	69	5	motion	motion	NOUN
alkej-146	69	6	working	work	VERB
alkej-146	69	7	principle	principle	NOUN
alkej-146	69	8	can	can	AUX
alkej-146	69	9	be	be	AUX
alkej-146	69	10	shown	show	VERB
alkej-146	69	11	in	in	ADP
alkej-146	69	12	fig	fig	NOUN
alkej-146	69	13	.	.	PUNCT
alkej-146	70	1	(	(	PUNCT
alkej-146	70	2	2	2	NUM
alkej-146	70	3	-	-	SYM
alkej-146	70	4	b	b	NOUN
alkej-146	70	5	)	)	PUNCT
alkej-146	70	6	.	.	PUNCT
alkej-146	71	1	the	the	DET
alkej-146	71	2	main	main	ADJ
alkej-146	71	3	body	body	NOUN
alkej-146	71	4	of	of	ADP
alkej-146	71	5	the	the	DET
alkej-146	71	6	stage	stage	NOUN
alkej-146	71	7	is	be	AUX
alkej-146	71	8	fixed	fix	VERB
alkej-146	71	9	to	to	ADP
alkej-146	71	10	a	a	DET
alkej-146	71	11	heavy	heavy	ADJ
alkej-146	71	12	base	base	NOUN
alkej-146	71	13	and	and	CCONJ
alkej-146	71	14	the	the	DET
alkej-146	71	15	movable	movable	ADJ
alkej-146	71	16	plate	plate	NOUN
alkej-146	71	17	on	on	ADP
alkej-146	71	18	the	the	DET
alkej-146	71	19	top	top	NOUN
alkej-146	71	20	of	of	ADP
alkej-146	71	21	the	the	DET
alkej-146	71	22	stage	stage	NOUN
alkej-146	71	23	is	be	AUX
alkej-146	71	24	a	a	DET
alkej-146	71	25	platform	platform	NOUN
alkej-146	71	26	for	for	ADP
alkej-146	71	27	the	the	DET
alkej-146	71	28	components	component	NOUN
alkej-146	71	29	mounted	mount	VERB
alkej-146	71	30	to	to	PART
alkej-146	71	31	be	be	AUX
alkej-146	71	32	scanned	scan	VERB
alkej-146	71	33	.	.	PUNCT
alkej-146	72	1	the	the	DET
alkej-146	72	2	movement	movement	NOUN
alkej-146	72	3	of	of	ADP
alkej-146	72	4	the	the	DET
alkej-146	72	5	top	top	ADJ
alkej-146	72	6	plate	plate	NOUN
alkej-146	72	7	is	be	AUX
alkej-146	72	8	due	due	ADJ
alkej-146	72	9	to	to	ADP
alkej-146	72	10	an	an	DET
alkej-146	72	11	internal	internal	ADJ
alkej-146	72	12	lever	lever	NOUN
alkej-146	72	13	-	-	PUNCT
alkej-146	72	14	transmission	transmission	NOUN
alkej-146	72	15	of	of	ADP
alkej-146	72	16	extension	extension	NOUN
alkej-146	72	17	of	of	ADP
alkej-146	72	18	the	the	DET
alkej-146	72	19	built	build	VERB
alkej-146	72	20	-	-	PUNCT
alkej-146	72	21	in	in	ADP
alkej-146	72	22	stacked	stack	VERB
alkej-146	72	23	piezo	piezo	NOUN
alkej-146	72	24	-	-	NOUN
alkej-146	72	25	actuators	actuator	NOUN
alkej-146	72	26	with	with	ADP
alkej-146	72	27	solid	solid	ADJ
alkej-146	72	28	state	state	NOUN
alkej-146	72	29	flexure	flexure	NOUN
alkej-146	72	30	hinges	hinge	NOUN
alkej-146	72	31	.	.	PUNCT
alkej-146	73	1	when	when	SCONJ
alkej-146	73	2	an	an	DET
alkej-146	73	3	input	input	NOUN
alkej-146	73	4	voltage	voltage	NOUN
alkej-146	73	5	is	be	AUX
alkej-146	73	6	applied	apply	VERB
alkej-146	73	7	to	to	ADP
alkej-146	73	8	the	the	DET
alkej-146	73	9	stage	stage	NOUN
alkej-146	73	10	,	,	PUNCT
alkej-146	73	11	the	the	DET
alkej-146	73	12	extension	extension	NOUN
alkej-146	73	13	of	of	ADP
alkej-146	73	14	the	the	DET
alkej-146	73	15	stacked	stack	VERB
alkej-146	73	16	piezo	piezo	NOUN
alkej-146	73	17	-	-	NOUN
alkej-146	73	18	actuators	actuator	NOUN
alkej-146	73	19	occurs	occur	VERB
alkej-146	73	20	and	and	CCONJ
alkej-146	73	21	then	then	ADV
alkej-146	73	22	this	this	DET
alkej-146	73	23	extension	extension	NOUN
alkej-146	73	24	causes	cause	VERB
alkej-146	73	25	the	the	DET
alkej-146	73	26	bending	bending	NOUN
alkej-146	73	27	of	of	ADP
alkej-146	73	28	the	the	DET
alkej-146	73	29	flexure	flexure	NOUN
alkej-146	73	30	mounts	mount	NOUN
alkej-146	73	31	.	.	PUNCT
alkej-146	74	1	this	this	DET
alkej-146	74	2	bending	bending	NOUN
alkej-146	74	3	gives	give	VERB
alkej-146	74	4	rise	rise	NOUN
alkej-146	74	5	to	to	ADP
alkej-146	74	6	a	a	DET
alkej-146	74	7	deviation	deviation	NOUN
alkej-146	74	8	of	of	ADP
alkej-146	74	9	the	the	DET
alkej-146	74	10	top	top	ADJ
alkej-146	74	11	plate	plate	NOUN
alkej-146	74	12	[	[	X
alkej-146	74	13	15	15	NUM
alkej-146	74	14	]	]	PUNCT
alkej-146	74	15	.	.	PUNCT
alkej-146	75	1	-a	-a	PUNCT
alkej-146	75	2	-b	-b	PUNCT
alkej-146	75	3	fig	fig	NOUN
alkej-146	75	4	.	.	PUNCT
alkej-146	76	1	2	2	X
alkej-146	76	2	.	.	X
alkej-146	76	3	aoutline	aoutline	PROPN
alkej-146	76	4	sketch	sketch	NOUN
alkej-146	76	5	.	.	PUNCT
alkej-146	77	1	bworking	bworke	VERB
alkej-146	77	2	principle	principle	NOUN
alkej-146	77	3	of	of	ADP
alkej-146	77	4	the	the	DET
alkej-146	77	5	piezo	piezo	ADJ
alkej-146	77	6	-	-	ADJ
alkej-146	77	7	positioning	positioning	NOUN
alkej-146	77	8	stage	stage	NOUN
alkej-146	77	9	.	.	PUNCT
alkej-146	78	1	a	a	DET
alkej-146	78	2	block	block	NOUN
alkej-146	78	3	diagram	diagram	NOUN
alkej-146	78	4	for	for	ADP
alkej-146	78	5	a	a	DET
alkej-146	78	6	control	control	NOUN
alkej-146	78	7	system	system	NOUN
alkej-146	78	8	setup	setup	NOUN
alkej-146	78	9	of	of	ADP
alkej-146	78	10	the	the	DET
alkej-146	78	11	piezoelectric	piezoelectric	NOUN
alkej-146	78	12	micropositioner	micropositioner	ADV
alkej-146	78	13	is	be	AUX
alkej-146	78	14	shown	show	VERB
alkej-146	78	15	in	in	ADP
alkej-146	78	16	fig	fig	NOUN
alkej-146	78	17	.	.	PUNCT
alkej-146	79	1	(	(	PUNCT
alkej-146	79	2	3	3	NUM
alkej-146	79	3	)	)	PUNCT
alkej-146	79	4	,	,	PUNCT
alkej-146	79	5	which	which	PRON
alkej-146	79	6	contains	contain	VERB
alkej-146	79	7	has	have	VERB
alkej-146	79	8	a	a	DET
alkej-146	79	9	voltage	voltage	NOUN
alkej-146	79	10	amplifier	amplifier	NOUN
alkej-146	79	11	,	,	PUNCT
alkej-146	79	12	signal	signal	NOUN
alkej-146	79	13	conditioner	conditioner	NOUN
alkej-146	79	14	,	,	PUNCT
alkej-146	79	15	and	and	CCONJ
alkej-146	79	16	computer	computer	NOUN
alkej-146	79	17	with	with	ADP
alkej-146	79	18	data	datum	NOUN
alkej-146	79	19	acquisition	acquisition	NOUN
alkej-146	79	20	interface	interface	NOUN
alkej-146	79	21	.	.	PUNCT
alkej-146	80	1	fig	fig	NOUN
alkej-146	80	2	.	.	PUNCT
alkej-146	81	1	3	3	X
alkej-146	81	2	.	.	X
alkej-146	81	3	a	a	DET
alkej-146	81	4	block	block	NOUN
alkej-146	81	5	diagram	diagram	NOUN
alkej-146	81	6	for	for	ADP
alkej-146	81	7	a	a	DET
alkej-146	81	8	control	control	NOUN
alkej-146	81	9	system	system	NOUN
alkej-146	81	10	setup	setup	NOUN
alkej-146	81	11	of	of	ADP
alkej-146	81	12	the	the	DET
alkej-146	81	13	piezoelectric	piezoelectric	NOUN
alkej-146	81	14	micropositioner	micropositioner	ADV
alkej-146	81	15	.	.	PUNCT
alkej-146	82	1	in	in	ADP
alkej-146	82	2	fig	fig	NOUN
alkej-146	82	3	.	.	PUNCT
alkej-146	83	1	(	(	PUNCT
alkej-146	83	2	3	3	NUM
alkej-146	83	3	)	)	PUNCT
alkej-146	83	4	,	,	PUNCT
alkej-146	83	5	the	the	DET
alkej-146	83	6	equipped	equip	VERB
alkej-146	83	7	devices	device	NOUN
alkej-146	83	8	are	be	AUX
alkej-146	83	9	briefly	briefly	ADV
alkej-146	83	10	described	describe	VERB
alkej-146	83	11	as	as	SCONJ
alkej-146	83	12	follows	follow	VERB
alkej-146	83	13	[	[	X
alkej-146	83	14	6	6	NUM
alkej-146	83	15	]	]	PUNCT
alkej-146	83	16	:	:	PUNCT
alkej-146	83	17	i.	i.	NOUN
alkej-146	83	18	voltage	voltage	NOUN
alkej-146	83	19	amplifier	amplifier	NOUN
alkej-146	83	20	was	be	AUX
alkej-146	83	21	developed	develop	VERB
alkej-146	83	22	by	by	ADP
alkej-146	83	23	high	high	ADJ
alkej-146	83	24	voltage	voltage	NOUN
alkej-146	83	25	–	–	PUNCT
alkej-146	83	26	type	type	NOUN
alkej-146	83	27	op	op	NOUN
alkej-146	83	28	-	-	PUNCT
alkej-146	83	29	amplifier	amplifier	NOUN
alkej-146	83	30	with	with	ADP
alkej-146	83	31	model	model	NOUN
alkej-146	83	32	pa240	pa240	NOUN
alkej-146	83	33	,	,	PUNCT
alkej-146	83	34	manufactured	manufacture	VERB
alkej-146	83	35	by	by	ADP
alkej-146	83	36	apex	apex	PROPN
alkej-146	83	37	microtechnology	microtechnology	PROPN
alkej-146	83	38	,	,	PUNCT
alkej-146	83	39	usa	usa	PROPN
alkej-146	83	40	,	,	PUNCT
alkej-146	83	41	which	which	PRON
alkej-146	83	42	has	have	VERB
alkej-146	83	43	the	the	DET
alkej-146	83	44	specification	specification	NOUN
alkej-146	83	45	of	of	ADP
alkej-146	83	46	maximum	maximum	ADJ
alkej-146	83	47	peak	peak	NOUN
alkej-146	83	48	-	-	PUNCT
alkej-146	83	49	peak	peak	NOUN
alkej-146	83	50	voltage	voltage	NOUN
alkej-146	83	51	350v	350v	PROPN
alkej-146	83	52	,	,	PUNCT
alkej-146	83	53	maximum	maximum	ADJ
alkej-146	83	54	output	output	NOUN
alkej-146	83	55	current	current	NOUN
alkej-146	83	56	of	of	ADP
alkej-146	83	57	250	250	NUM
alkej-146	83	58	ma	ma	PROPN
alkej-146	83	59	,	,	PUNCT
alkej-146	83	60	and	and	CCONJ
alkej-146	83	61	bandwidth	bandwidth	NOUN
alkej-146	83	62	of	of	ADP
alkej-146	83	63	3mhz	3mhz	NUM
alkej-146	83	64	.	.	PUNCT
alkej-146	84	1	moreover	moreover	ADV
alkej-146	84	2	,	,	PUNCT
alkej-146	84	3	the	the	DET
alkej-146	84	4	linear	linear	ADJ
alkej-146	84	5	amplification	amplification	NOUN
alkej-146	84	6	gain	gain	NOUN
alkej-146	84	7	of	of	ADP
alkej-146	84	8	5	5	NUM
alkej-146	84	9	is	be	AUX
alkej-146	84	10	set	set	VERB
alkej-146	84	11	.	.	PUNCT
alkej-146	85	1	the	the	DET
alkej-146	85	2	amplifier	amplifier	ADJ
alkej-146	85	3	implementation	implementation	NOUN
alkej-146	85	4	for	for	ADP
alkej-146	85	5	driving	drive	VERB
alkej-146	85	6	the	the	DET
alkej-146	85	7	piezoelectric	piezoelectric	ADJ
alkej-146	85	8	micropostioner	micropostioner	NOUN
alkej-146	85	9	is	be	AUX
alkej-146	85	10	shown	show	VERB
alkej-146	85	11	in	in	ADP
alkej-146	85	12	fig	fig	NOUN
alkej-146	85	13	.	.	PUNCT
alkej-146	86	1	(	(	PUNCT
alkej-146	86	2	4	4	NUM
alkej-146	86	3	)	)	PUNCT
alkej-146	86	4	,	,	PUNCT
alkej-146	86	5	in	in	ADP
alkej-146	86	6	which	which	PRON
alkej-146	86	7	a	a	DET
alkej-146	86	8	phase	phase	NOUN
alkej-146	86	9	lead	lead	NOUN
alkej-146	86	10	-	-	PUNCT
alkej-146	86	11	lag	lag	NOUN
alkej-146	86	12	compensator	compensator	NOUN
alkej-146	86	13	is	be	AUX
alkej-146	86	14	cascaded	cascade	VERB
alkej-146	86	15	to	to	PART
alkej-146	86	16	obtain	obtain	VERB
alkej-146	86	17	an	an	DET
alkej-146	86	18	improved	improved	ADJ
alkej-146	86	19	stability	stability	NOUN
alkej-146	86	20	in	in	ADP
alkej-146	86	21	the	the	DET
alkej-146	86	22	sense	sense	NOUN
alkej-146	86	23	of	of	ADP
alkej-146	86	24	bode	bode	ADJ
alkej-146	86	25	diagram	diagram	PROPN
alkej-146	86	26	.	.	PUNCT
alkej-146	87	1	ii	ii	PROPN
alkej-146	87	2	.	.	PUNCT
alkej-146	87	3	signal	signal	PROPN
alkej-146	87	4	conditioner	conditioner	NOUN
alkej-146	87	5	for	for	ADP
alkej-146	87	6	strain	strain	ADJ
alkej-146	87	7	gauge	gauge	NOUN
alkej-146	87	8	transducer	transducer	NOUN
alkej-146	87	9	was	be	AUX
alkej-146	87	10	set	set	VERB
alkej-146	87	11	up	up	ADP
alkej-146	87	12	by	by	ADP
alkej-146	87	13	chip	chip	NOUN
alkej-146	87	14	with	with	ADP
alkej-146	87	15	model	model	NOUN
alkej-146	87	16	1b32	1b32	NUM
alkej-146	87	17	,	,	PUNCT
alkej-146	87	18	produced	produce	VERB
alkej-146	87	19	by	by	ADP
alkej-146	87	20	(	(	PUNCT
alkej-146	87	21	analog	analog	NOUN
alkej-146	87	22	devices	device	NOUN
alkej-146	87	23	,	,	PUNCT
alkej-146	87	24	inc	inc	PROPN
alkej-146	87	25	.	.	PROPN
alkej-146	87	26	)	)	PUNCT
alkej-146	87	27	.	.	PUNCT
alkej-146	88	1	the	the	DET
alkej-146	88	2	output	output	NOUN
alkej-146	88	3	voltage	voltage	NOUN
alkej-146	88	4	range	range	NOUN
alkej-146	88	5	was	be	AUX
alkej-146	88	6	set	set	VERB
alkej-146	88	7	to	to	ADP
alkej-146	88	8	(	(	PUNCT
alkej-146	88	9	0	0	NUM
alkej-146	88	10	-10	-10	NUM
alkej-146	88	11	)	)	PUNCT
alkej-146	88	12	v	v	NOUN
alkej-146	88	13	for	for	ADP
alkej-146	88	14	the	the	DET
alkej-146	88	15	ranged	range	VERB
alkej-146	88	16	displacement	displacement	NOUN
alkej-146	88	17	of	of	ADP
alkej-146	88	18	(	(	PUNCT
alkej-146	88	19	0−80μm	0−80μm	NUM
alkej-146	88	20	)	)	PUNCT
alkej-146	88	21	.	.	PUNCT
alkej-146	89	1	iii	iii	X
alkej-146	89	2	.	.	PUNCT
alkej-146	90	1	a	a	DET
alkej-146	90	2	computer	computer	NOUN
alkej-146	90	3	for	for	ADP
alkej-146	90	4	control	control	NOUN
alkej-146	90	5	algorithm	algorithm	NOUN
alkej-146	90	6	implementation	implementation	NOUN
alkej-146	90	7	and	and	CCONJ
alkej-146	90	8	a	a	DET
alkej-146	90	9	data	data	NOUN
alkej-146	90	10	acquisition	acquisition	NOUN
alkej-146	90	11	board	board	NOUN
alkej-146	90	12	with	with	ADP
alkej-146	90	13	analog	analog	NOUN
alkej-146	90	14	to	to	ADP
alkej-146	90	15	digital	digital	PROPN
alkej-146	90	16	(	(	PUNCT
alkej-146	90	17	a	a	NOUN
alkej-146	90	18	/	/	SYM
alkej-146	90	19	d	d	NOUN
alkej-146	90	20	)	)	PUNCT
alkej-146	90	21	and	and	CCONJ
alkej-146	90	22	digital	digital	ADJ
alkej-146	90	23	to	to	PART
alkej-146	90	24	analog	analog	VERB
alkej-146	90	25	(	(	PUNCT
alkej-146	90	26	d	d	NOUN
alkej-146	90	27	/	/	SYM
alkej-146	90	28	a	a	PRON
alkej-146	90	29	)	)	PUNCT
alkej-146	90	30	conversion	conversion	NOUN
alkej-146	90	31	were	be	AUX
alkej-146	90	32	applied	apply	VERB
alkej-146	90	33	.	.	PUNCT
alkej-146	91	1	yasir	yasir	PROPN
alkej-146	91	2	khudhair	khudhair	PROPN
alkej-146	91	3	abbas	abbas	PROPN
alkej-146	91	4	al	al	PROPN
alkej-146	91	5	-	-	PUNCT
alkej-146	91	6	khwarizmi	khwarizmi	PROPN
alkej-146	91	7	engineering	engineering	NOUN
alkej-146	91	8	journal	journal	PROPN
alkej-146	91	9	,	,	PUNCT
alkej-146	91	10	vol	vol	NOUN
alkej-146	91	11	.	.	PROPN
alkej-146	91	12	8	8	NUM
alkej-146	91	13	,	,	PUNCT
alkej-146	91	14	no.4	no.4	PROPN
alkej-146	91	15	,	,	PUNCT
alkej-146	91	16	pp40	pp40	PROPN
alkej-146	91	17	-52	-52	PROPN
alkej-146	91	18	(	(	PUNCT
alkej-146	91	19	2012	2012	NUM
alkej-146	91	20	)	)	PUNCT
alkej-146	91	21	43	43	NUM
alkej-146	91	22	fig	fig	NOUN
alkej-146	91	23	.	.	PUNCT
alkej-146	92	1	4	4	X
alkej-146	92	2	.	.	X
alkej-146	92	3	diagram	diagram	NOUN
alkej-146	92	4	of	of	ADP
alkej-146	92	5	the	the	DET
alkej-146	92	6	drive	drive	ADJ
alkej-146	92	7	amplifier	amplifier	NOUN
alkej-146	92	8	circuit	circuit	NOUN
alkej-146	92	9	for	for	ADP
alkej-146	92	10	the	the	DET
alkej-146	92	11	piezoelectric	piezoelectric	NOUN
alkej-146	92	12	micropositioner	micropositioner	ADV
alkej-146	92	13	.	.	PUNCT
alkej-146	93	1	to	to	PART
alkej-146	93	2	show	show	VERB
alkej-146	93	3	the	the	DET
alkej-146	93	4	usability	usability	NOUN
alkej-146	93	5	of	of	ADP
alkej-146	93	6	the	the	DET
alkej-146	93	7	driving	drive	VERB
alkej-146	93	8	amplifier	amplifier	NOUN
alkej-146	93	9	and	and	CCONJ
alkej-146	93	10	strain	strain	ADJ
alkej-146	93	11	gauge	gauge	NOUN
alkej-146	93	12	signal	signal	NOUN
alkej-146	93	13	conditioner	conditioner	NOUN
alkej-146	93	14	,	,	PUNCT
alkej-146	93	15	a	a	DET
alkej-146	93	16	triangular	triangular	NOUN
alkej-146	93	17	displacement	displacement	NOUN
alkej-146	93	18	-	-	PUNCT
alkej-146	93	19	trajectory	trajectory	NOUN
alkej-146	93	20	response	response	NOUN
alkej-146	93	21	from	from	ADP
alkej-146	93	22	the	the	DET
alkej-146	93	23	piezoelectric	piezoelectric	NOUN
alkej-146	93	24	micropostioner	micropostioner	NOUN
alkej-146	93	25	without	without	ADP
alkej-146	93	26	control	control	NOUN
alkej-146	93	27	approach	approach	NOUN
alkej-146	93	28	implementation	implementation	NOUN
alkej-146	93	29	is	be	AUX
alkej-146	93	30	shown	show	VERB
alkej-146	93	31	in	in	ADP
alkej-146	93	32	fig	fig	NOUN
alkej-146	93	33	.	.	PUNCT
alkej-146	94	1	(	(	PUNCT
alkej-146	94	2	5	5	X
alkej-146	94	3	)	)	PUNCT
alkej-146	95	1	[	[	X
alkej-146	95	2	6	6	NUM
alkej-146	95	3	]	]	PUNCT
alkej-146	95	4	.	.	PUNCT
alkej-146	96	1	it	it	PRON
alkej-146	96	2	appears	appear	VERB
alkej-146	96	3	from	from	ADP
alkej-146	96	4	fig	fig	NOUN
alkej-146	96	5	.	.	PUNCT
alkej-146	97	1	(	(	PUNCT
alkej-146	97	2	5	5	NUM
alkej-146	97	3	)	)	PUNCT
alkej-146	97	4	that	that	SCONJ
alkej-146	97	5	the	the	DET
alkej-146	97	6	established	establish	VERB
alkej-146	97	7	control	control	NOUN
alkej-146	97	8	system	system	NOUN
alkej-146	97	9	in	in	ADP
alkej-146	97	10	this	this	DET
alkej-146	97	11	study	study	NOUN
alkej-146	97	12	consists	consist	VERB
alkej-146	97	13	of	of	ADP
alkej-146	97	14	the	the	DET
alkej-146	97	15	piezoelectric	piezoelectric	NOUN
alkej-146	97	16	micropositioner	micropositioner	ADV
alkej-146	97	17	,	,	PUNCT
alkej-146	97	18	driving	drive	VERB
alkej-146	97	19	amplifier	amplifier	NOUN
alkej-146	97	20	,	,	PUNCT
alkej-146	97	21	strain	strain	NOUN
alkej-146	97	22	-	-	PUNCT
alkej-146	97	23	gauge	gauge	NOUN
alkej-146	97	24	signal	signal	NOUN
alkej-146	97	25	conditioner	conditioner	NOUN
alkej-146	97	26	is	be	AUX
alkej-146	97	27	applicable	applicable	ADJ
alkej-146	97	28	for	for	ADP
alkej-146	97	29	controller	controller	NOUN
alkej-146	97	30	development	development	NOUN
alkej-146	97	31	.	.	PUNCT
alkej-146	98	1	fig	fig	NOUN
alkej-146	98	2	.	.	PUNCT
alkej-146	99	1	5	5	X
alkej-146	99	2	.	.	X
alkej-146	99	3	output	output	NOUN
alkej-146	99	4	displacement	displacement	ADJ
alkej-146	99	5	response	response	NOUN
alkej-146	99	6	from	from	ADP
alkej-146	99	7	the	the	DET
alkej-146	99	8	open	open	ADJ
alkej-146	99	9	-	-	PUNCT
alkej-146	99	10	loop	loop	NOUN
alkej-146	99	11	piezoelectric	piezoelectric	NOUN
alkej-146	99	12	micropositioner	micropositioner	ADV
alkej-146	99	13	.	.	PUNCT
alkej-146	100	1	4	4	X
alkej-146	100	2	.	.	X
alkej-146	100	3	modeling	modeling	NOUN
alkej-146	100	4	of	of	ADP
alkej-146	100	5	piezoelectric	piezoelectric	ADJ
alkej-146	100	6	micropositioner	micropositioner	ADJ
alkej-146	100	7	system	system	NOUN
alkej-146	100	8	for	for	ADP
alkej-146	100	9	suitability	suitability	NOUN
alkej-146	100	10	of	of	ADP
alkej-146	100	11	controller	controller	NOUN
alkej-146	100	12	development	development	NOUN
alkej-146	100	13	,	,	PUNCT
alkej-146	100	14	a	a	DET
alkej-146	100	15	dynamic	dynamic	ADJ
alkej-146	100	16	model	model	NOUN
alkej-146	100	17	of	of	ADP
alkej-146	100	18	the	the	DET
alkej-146	100	19	piezoelectric	piezoelectric	NOUN
alkej-146	100	20	micropositioner	micropositioner	ADV
alkej-146	100	21	which	which	PRON
alkej-146	100	22	is	be	AUX
alkej-146	100	23	a	a	DET
alkej-146	100	24	second	second	ADJ
alkej-146	100	25	order	order	NOUN
alkej-146	100	26	linear	linear	NOUN
alkej-146	100	27	transfer	transfer	NOUN
alkej-146	100	28	function	function	NOUN
alkej-146	100	29	model	model	NOUN
alkej-146	100	30	is	be	AUX
alkej-146	100	31	considered	consider	VERB
alkej-146	100	32	in	in	ADP
alkej-146	100	33	this	this	DET
alkej-146	100	34	study	study	NOUN
alkej-146	100	35	.	.	PUNCT
alkej-146	101	1	originally	originally	ADV
alkej-146	101	2	this	this	DET
alkej-146	101	3	model	model	NOUN
alkej-146	101	4	is	be	AUX
alkej-146	101	5	identified	identify	VERB
alkej-146	101	6	by	by	ADP
alkej-146	101	7	using	use	VERB
alkej-146	101	8	a	a	DET
alkej-146	101	9	dynamic	dynamic	ADJ
alkej-146	101	10	signal	signal	NOUN
alkej-146	101	11	analyzer	analyzer	NOUN
alkej-146	101	12	that	that	PRON
alkej-146	101	13	is	be	AUX
alkej-146	101	14	used	use	VERB
alkej-146	101	15	to	to	PART
alkej-146	101	16	capture	capture	VERB
alkej-146	101	17	the	the	DET
alkej-146	101	18	magnitude	magnitude	NOUN
alkej-146	101	19	response	response	NOUN
alkej-146	101	20	in	in	ADP
alkej-146	101	21	frequency	frequency	NOUN
alkej-146	101	22	domain	domain	NOUN
alkej-146	101	23	.	.	PUNCT
alkej-146	102	1	then	then	ADV
alkej-146	102	2	,	,	PUNCT
alkej-146	102	3	a	a	DET
alkej-146	102	4	curve	curve	NOUN
alkej-146	102	5	fitting	fitting	ADJ
alkej-146	102	6	tool	tool	NOUN
alkej-146	102	7	in	in	ADP
alkej-146	102	8	matlab	matlab	PROPN
alkej-146	102	9	computer	computer	NOUN
alkej-146	102	10	software	software	NOUN
alkej-146	102	11	is	be	AUX
alkej-146	102	12	adopted	adopt	VERB
alkej-146	102	13	to	to	PART
alkej-146	102	14	find	find	VERB
alkej-146	102	15	out	out	ADP
alkej-146	102	16	an	an	DET
alkej-146	102	17	approximated	approximated	ADJ
alkej-146	102	18	second	second	ADJ
alkej-146	102	19	-	-	PUNCT
alkej-146	102	20	order	order	NOUN
alkej-146	102	21	linear	linear	NOUN
alkej-146	102	22	transfer	transfer	NOUN
alkej-146	102	23	function	function	NOUN
alkej-146	102	24	whose	whose	DET
alkej-146	102	25	magnitude	magnitude	NOUN
alkej-146	102	26	response	response	NOUN
alkej-146	102	27	in	in	ADP
alkej-146	102	28	frequency	frequency	NOUN
alkej-146	102	29	domain	domain	NOUN
alkej-146	102	30	is	be	AUX
alkej-146	102	31	very	very	ADV
alkej-146	102	32	close	close	ADJ
alkej-146	102	33	to	to	ADP
alkej-146	102	34	the	the	DET
alkej-146	102	35	actual	actual	ADJ
alkej-146	102	36	one	one	NOUN
alkej-146	102	37	captured	capture	VERB
alkej-146	102	38	by	by	ADP
alkej-146	102	39	the	the	DET
alkej-146	102	40	dynamic	dynamic	ADJ
alkej-146	102	41	signal	signal	NOUN
alkej-146	102	42	analyzer	analyzer	NOUN
alkej-146	102	43	.	.	PUNCT
alkej-146	103	1	the	the	DET
alkej-146	103	2	second	second	ADJ
alkej-146	103	3	-	-	PUNCT
alkej-146	103	4	order	order	NOUN
alkej-146	103	5	linear	linear	NOUN
alkej-146	103	6	transfer	transfer	NOUN
alkej-146	103	7	function	function	NOUN
alkej-146	103	8	determined	determine	VERB
alkej-146	103	9	by	by	ADP
alkej-146	103	10	the	the	DET
alkej-146	103	11	curve	curve	NOUN
alkej-146	103	12	fitting	fitting	ADJ
alkej-146	103	13	method	method	NOUN
alkej-146	103	14	is	be	AUX
alkej-146	103	15	given	give	VERB
alkej-146	103	16	as	as	SCONJ
alkej-146	103	17	follows	follow	VERB
alkej-146	103	18	[	[	X
alkej-146	103	19	6	6	NUM
alkej-146	103	20	]	]	NUM
alkej-146	103	21	:	:	PUNCT
alkej-146	103	22	(	(	PUNCT
alkej-146	103	23	)	)	PUNCT
alkej-146	103	24	(	(	PUNCT
alkej-146	103	25	)	)	PUNCT
alkej-146	103	26	=	=	PUNCT
alkej-146	103	27	.	.	PUNCT
alkej-146	103	28	.	.	PUNCT
alkej-146	103	29	.	.	PUNCT
alkej-146	104	1	…	…	PUNCT
alkej-146	104	2	(	(	PUNCT
alkej-146	104	3	1	1	NUM
alkej-146	104	4	)	)	PUNCT
alkej-146	104	5	where	where	SCONJ
alkej-146	104	6	:	:	PUNCT
alkej-146	104	7	(	(	PUNCT
alkej-146	104	8	):	):	PUNCT
alkej-146	104	9	denotes	denote	NOUN
alkej-146	104	10	the	the	DET
alkej-146	104	11	output	output	NOUN
alkej-146	104	12	displacement	displacement	NOUN
alkej-146	104	13	.	.	PUNCT
alkej-146	105	1	(	(	PUNCT
alkej-146	105	2	):	):	PUNCT
alkej-146	105	3	denotes	denote	NOUN
alkej-146	105	4	the	the	DET
alkej-146	105	5	input	input	NOUN
alkej-146	105	6	voltage	voltage	NOUN
alkej-146	105	7	.	.	PUNCT
alkej-146	106	1	to	to	PART
alkej-146	106	2	confirm	confirm	VERB
alkej-146	106	3	the	the	DET
alkej-146	106	4	accuracy	accuracy	NOUN
alkej-146	106	5	of	of	ADP
alkej-146	106	6	the	the	DET
alkej-146	106	7	identified	identify	VERB
alkej-146	106	8	mathematic	mathematic	ADJ
alkej-146	106	9	model	model	NOUN
alkej-146	106	10	(	(	PUNCT
alkej-146	106	11	eq	eq	NOUN
alkej-146	106	12	.	.	PUNCT
alkej-146	107	1	(	(	PUNCT
alkej-146	107	2	1	1	NUM
alkej-146	107	3	)	)	PUNCT
alkej-146	107	4	)	)	PUNCT
alkej-146	107	5	,	,	PUNCT
alkej-146	107	6	the	the	DET
alkej-146	107	7	magnitude	magnitude	NOUN
alkej-146	107	8	responses	response	NOUN
alkej-146	107	9	in	in	ADP
alkej-146	107	10	frequency	frequency	NOUN
alkej-146	107	11	domain	domain	NOUN
alkej-146	107	12	of	of	ADP
alkej-146	107	13	the	the	DET
alkej-146	107	14	actual	actual	ADJ
alkej-146	107	15	system	system	NOUN
alkej-146	107	16	and	and	CCONJ
alkej-146	107	17	the	the	DET
alkej-146	107	18	mathematic	mathematic	ADJ
alkej-146	107	19	model	model	NOUN
alkej-146	107	20	are	be	AUX
alkej-146	107	21	shown	show	VERB
alkej-146	107	22	in	in	ADP
alkej-146	107	23	fig	fig	NOUN
alkej-146	107	24	.	.	PUNCT
alkej-146	108	1	(	(	PUNCT
alkej-146	108	2	6	6	NUM
alkej-146	108	3	)	)	PUNCT
alkej-146	108	4	.	.	PUNCT
alkej-146	109	1	from	from	ADP
alkej-146	109	2	fig	fig	NOUN
alkej-146	109	3	(	(	PUNCT
alkej-146	109	4	6	6	NUM
alkej-146	109	5	)	)	PUNCT
alkej-146	109	6	,	,	PUNCT
alkej-146	109	7	it	it	PRON
alkej-146	109	8	appears	appear	VERB
alkej-146	109	9	that	that	SCONJ
alkej-146	109	10	the	the	DET
alkej-146	109	11	identified	identify	VERB
alkej-146	109	12	mathematic	mathematic	ADJ
alkej-146	109	13	model	model	NOUN
alkej-146	109	14	approaches	approach	VERB
alkej-146	109	15	the	the	DET
alkej-146	109	16	actual	actual	ADJ
alkej-146	109	17	one	one	NOUN
alkej-146	109	18	.	.	PUNCT
alkej-146	110	1	in	in	ADP
alkej-146	110	2	other	other	ADJ
alkej-146	110	3	words	word	NOUN
alkej-146	110	4	,	,	PUNCT
alkej-146	110	5	the	the	DET
alkej-146	110	6	identified	identify	VERB
alkej-146	110	7	model	model	NOUN
alkej-146	110	8	can	can	AUX
alkej-146	110	9	be	be	AUX
alkej-146	110	10	adopted	adopt	VERB
alkej-146	110	11	for	for	ADP
alkej-146	110	12	controller	controller	NOUN
alkej-146	110	13	development	development	NOUN
alkej-146	110	14	in	in	ADP
alkej-146	110	15	a	a	DET
alkej-146	110	16	ranged	range	VERB
alkej-146	110	17	frequency	frequency	NOUN
alkej-146	110	18	domain	domain	NOUN
alkej-146	110	19	[	[	X
alkej-146	110	20	6	6	NUM
alkej-146	110	21	]	]	PUNCT
alkej-146	110	22	.	.	PUNCT
alkej-146	111	1	fig	fig	NOUN
alkej-146	111	2	.	.	PUNCT
alkej-146	112	1	6	6	NUM
alkej-146	112	2	.	.	PUNCT
alkej-146	112	3	magnitude	magnitude	NOUN
alkej-146	112	4	response	response	NOUN
alkej-146	112	5	in	in	ADP
alkej-146	112	6	frequency	frequency	NOUN
alkej-146	112	7	domain	domain	NOUN
alkej-146	112	8	from	from	ADP
alkej-146	112	9	the	the	DET
alkej-146	112	10	piezoelectric	piezoelectric	NOUN
alkej-146	112	11	micropositioner	micropositioner	ADV
alkej-146	112	12	and	and	CCONJ
alkej-146	112	13	the	the	DET
alkej-146	112	14	identified	identify	VERB
alkej-146	112	15	model	model	NOUN
alkej-146	112	16	.	.	PUNCT
alkej-146	113	1	furthermore	furthermore	ADV
alkej-146	113	2	,	,	PUNCT
alkej-146	113	3	a	a	DET
alkej-146	113	4	displacement	displacement	ADJ
alkej-146	113	5	time	time	NOUN
alkej-146	113	6	-	-	PUNCT
alkej-146	113	7	response	response	NOUN
alkej-146	113	8	of	of	ADP
alkej-146	113	9	both	both	CCONJ
alkej-146	113	10	the	the	DET
alkej-146	113	11	practical	practical	ADJ
alkej-146	113	12	system	system	NOUN
alkej-146	113	13	and	and	CCONJ
alkej-146	113	14	identified	identify	VERB
alkej-146	113	15	model	model	NOUN
alkej-146	113	16	to	to	ADP
alkej-146	113	17	a	a	DET
alkej-146	113	18	triangular	triangular	NOUN
alkej-146	113	19	trajectory	trajectory	NOUN
alkej-146	113	20	is	be	AUX
alkej-146	113	21	shown	show	VERB
alkej-146	113	22	in	in	ADP
alkej-146	113	23	fig	fig	NOUN
alkej-146	113	24	.	.	PUNCT
alkej-146	114	1	(	(	PUNCT
alkej-146	114	2	7	7	X
alkej-146	114	3	)	)	PUNCT
alkej-146	114	4	to	to	PART
alkej-146	114	5	validate	validate	VERB
alkej-146	114	6	the	the	DET
alkej-146	114	7	mathematic	mathematic	ADJ
alkej-146	114	8	model	model	NOUN
alkej-146	114	9	of	of	ADP
alkej-146	114	10	(	(	PUNCT
alkej-146	114	11	eq	eq	NOUN
alkej-146	114	12	.	.	PUNCT
alkej-146	115	1	(	(	PUNCT
alkej-146	115	2	1	1	NUM
alkej-146	115	3	)	)	PUNCT
alkej-146	115	4	)	)	PUNCT
alkej-146	115	5	.	.	PUNCT
alkej-146	116	1	yasir	yasir	PROPN
alkej-146	116	2	khudhair	khudhair	PROPN
alkej-146	116	3	abbas	abbas	PROPN
alkej-146	116	4	al	al	PROPN
alkej-146	116	5	-	-	PUNCT
alkej-146	116	6	khwarizmi	khwarizmi	PROPN
alkej-146	116	7	engineering	engineering	NOUN
alkej-146	116	8	journal	journal	PROPN
alkej-146	116	9	,	,	PUNCT
alkej-146	116	10	vol	vol	NOUN
alkej-146	116	11	.	.	PROPN
alkej-146	116	12	8	8	NUM
alkej-146	116	13	,	,	PUNCT
alkej-146	116	14	no.4	no.4	PROPN
alkej-146	116	15	,	,	PUNCT
alkej-146	116	16	pp40	pp40	PROPN
alkej-146	116	17	-52	-52	PROPN
alkej-146	116	18	(	(	PUNCT
alkej-146	116	19	2012	2012	NUM
alkej-146	116	20	)	)	PUNCT
alkej-146	116	21	44	44	NUM
alkej-146	116	22	fig	fig	NOUN
alkej-146	116	23	.	.	PUNCT
alkej-146	117	1	7	7	X
alkej-146	117	2	.	.	X
alkej-146	117	3	a	a	DET
alkej-146	117	4	displacement	displacement	ADJ
alkej-146	117	5	time	time	NOUN
alkej-146	117	6	-	-	PUNCT
alkej-146	117	7	response	response	NOUN
alkej-146	117	8	of	of	ADP
alkej-146	117	9	both	both	CCONJ
alkej-146	117	10	the	the	DET
alkej-146	117	11	practical	practical	ADJ
alkej-146	117	12	system	system	NOUN
alkej-146	117	13	and	and	CCONJ
alkej-146	117	14	identified	identify	VERB
alkej-146	117	15	model	model	NOUN
alkej-146	117	16	to	to	ADP
alkej-146	117	17	a	a	DET
alkej-146	117	18	triangular	triangular	NOUN
alkej-146	117	19	trajectory	trajectory	NOUN
alkej-146	118	1	[	[	X
alkej-146	118	2	6	6	NUM
alkej-146	118	3	]	]	PUNCT
alkej-146	118	4	.	.	PUNCT
alkej-146	119	1	according	accord	VERB
alkej-146	119	2	to	to	ADP
alkej-146	119	3	(	(	PUNCT
alkej-146	119	4	eq	eq	NOUN
alkej-146	119	5	.	.	PUNCT
alkej-146	119	6	(	(	PUNCT
alkej-146	119	7	1	1	NUM
alkej-146	119	8	)	)	PUNCT
alkej-146	119	9	)	)	PUNCT
alkej-146	119	10	,	,	PUNCT
alkej-146	119	11	the	the	DET
alkej-146	119	12	following	follow	VERB
alkej-146	119	13	states	state	NOUN
alkej-146	119	14	are	be	AUX
alkej-146	119	15	defined	define	VERB
alkej-146	119	16	:	:	PUNCT
alkej-146	119	17	=	=	SYM
alkej-146	119	18	,	,	PUNCT
alkej-146	119	19	=	=	SYM
alkej-146	119	20	̇	̇	NOUN
alkej-146	119	21	…	…	PUNCT
alkej-146	119	22	(	(	PUNCT
alkej-146	119	23	2	2	NUM
alkej-146	119	24	)	)	PUNCT
alkej-146	119	25	where	where	SCONJ
alkej-146	119	26	:	:	PUNCT
alkej-146	119	27	:	:	PUNCT
alkej-146	119	28	denotes	denote	VERB
alkej-146	119	29	the	the	DET
alkej-146	119	30	displacement	displacement	NOUN
alkej-146	119	31	.	.	PUNCT
alkej-146	120	1	:	:	PUNCT
alkej-146	120	2	denotes	denote	VERB
alkej-146	120	3	its	its	PRON
alkej-146	120	4	velocity	velocity	NOUN
alkej-146	120	5	.	.	PUNCT
alkej-146	121	1	with	with	ADP
alkej-146	121	2	the	the	DET
alkej-146	121	3	assumption	assumption	NOUN
alkej-146	121	4	of	of	ADP
alkej-146	121	5	eq	eq	PROPN
alkej-146	121	6	.	.	PUNCT
alkej-146	122	1	(	(	PUNCT
alkej-146	122	2	2	2	NUM
alkej-146	122	3	)	)	PUNCT
alkej-146	122	4	,	,	PUNCT
alkej-146	123	1	the	the	DET
alkej-146	123	2	linear	linear	ADJ
alkej-146	123	3	state	state	NOUN
alkej-146	123	4	equation	equation	NOUN
alkej-146	123	5	corresponding	correspond	VERB
alkej-146	123	6	to	to	ADP
alkej-146	123	7	(	(	PUNCT
alkej-146	123	8	eq	eq	NOUN
alkej-146	123	9	.	.	PUNCT
alkej-146	124	1	(	(	PUNCT
alkej-146	124	2	1	1	NUM
alkej-146	124	3	)	)	PUNCT
alkej-146	124	4	)	)	PUNCT
alkej-146	124	5	can	can	AUX
alkej-146	124	6	be	be	AUX
alkej-146	124	7	expressed	express	VERB
alkej-146	124	8	by	by	ADP
alkej-146	124	9	:	:	PUNCT
alkej-146	124	10	̇	̇	VERB
alkej-146	124	11	=	=	SYM
alkej-146	125	1	+	+	NUM
alkej-146	126	1	=	=	SYM
alkej-146	126	2	…	…	PUNCT
alkej-146	126	3	(	(	PUNCT
alkej-146	126	4	3	3	NUM
alkej-146	126	5	)	)	PUNCT
alkej-146	126	6	where	where	SCONJ
alkej-146	126	7	:	:	PUNCT
alkej-146	126	8	=	=	SYM
alkej-146	126	9	0	0	SYM
alkej-146	126	10	1−	1−	NUM
alkej-146	126	11	−	−	PROPN
alkej-146	126	12	=	=	SYM
alkej-146	126	13	0	0	NUM
alkej-146	126	14	1−30695.04	1−30695.04	NUM
alkej-146	126	15	−350.48	−350.48	NOUN
alkej-146	126	16	,	,	PUNCT
alkej-146	126	17	=	=	PUNCT
alkej-146	126	18	=	=	NOUN
alkej-146	126	19	030695.04	030695.04	NUM
alkej-146	126	20	.	.	PUNCT
alkej-146	127	1	and	and	CCONJ
alkej-146	127	2	,	,	PUNCT
alkej-146	127	3	=	=	PUNCT
alkej-146	128	1	[	[	X
alkej-146	128	2	1	1	NUM
alkej-146	128	3	0	0	NUM
alkej-146	128	4	]	]	PUNCT
alkej-146	128	5	before	before	SCONJ
alkej-146	128	6	we	we	PRON
alkej-146	128	7	designing	design	VERB
alkej-146	128	8	a	a	PRON
alkej-146	128	9	ga	ga	NOUN
alkej-146	128	10	based	base	VERB
alkej-146	128	11	pid	pid	NOUN
alkej-146	128	12	controller	controller	NOUN
alkej-146	128	13	for	for	ADP
alkej-146	128	14	the	the	DET
alkej-146	128	15	piezoelectric	piezoelectric	ADJ
alkej-146	128	16	micropositionor	micropositionor	NOUN
alkej-146	128	17	stage	stage	NOUN
alkej-146	128	18	system	system	NOUN
alkej-146	128	19	(	(	PUNCT
alkej-146	128	20	eq	eq	NOUN
alkej-146	128	21	.	.	PUNCT
alkej-146	128	22	(	(	PUNCT
alkej-146	128	23	1	1	NUM
alkej-146	128	24	)	)	PUNCT
alkej-146	128	25	)	)	PUNCT
alkej-146	128	26	,	,	PUNCT
alkej-146	128	27	the	the	DET
alkej-146	128	28	system	system	NOUN
alkej-146	128	29	should	should	AUX
alkej-146	128	30	be	be	AUX
alkej-146	128	31	tested	test	VERB
alkej-146	128	32	for	for	ADP
alkej-146	128	33	controllability	controllability	NOUN
alkej-146	128	34	properties	property	NOUN
alkej-146	128	35	.	.	PUNCT
alkej-146	129	1	in	in	ADP
alkej-146	129	2	order	order	NOUN
alkej-146	129	3	to	to	PART
alkej-146	129	4	test	test	VERB
alkej-146	129	5	system	system	NOUN
alkej-146	129	6	controllability	controllability	NOUN
alkej-146	129	7	,	,	PUNCT
alkej-146	129	8	the	the	DET
alkej-146	129	9	controllability	controllability	NOUN
alkej-146	129	10	matrix	matrix	NOUN
alkej-146	129	11	is	be	AUX
alkej-146	129	12	first	first	ADV
alkej-146	129	13	calculated	calculate	VERB
alkej-146	129	14	as	as	SCONJ
alkej-146	129	15	follows	follow	VERB
alkej-146	129	16	:	:	PUNCT
alkej-146	129	17	s	s	VERB
alkej-146	129	18	=	=	PUNCT
alkej-146	130	1	[	[	X
alkej-146	130	2	b	b	X
alkej-146	130	3	ab	ab	X
alkej-146	130	4	]	]	X
alkej-146	130	5	…	…	PUNCT
alkej-146	130	6	(	(	PUNCT
alkej-146	130	7	4	4	NUM
alkej-146	130	8	)	)	PUNCT
alkej-146	131	1	where	where	SCONJ
alkej-146	131	2	:	:	PUNCT
alkej-146	131	3	:	:	PUNCT
alkej-146	131	4	controllability	controllability	NOUN
alkej-146	131	5	matrix	matrix	NOUN
alkej-146	131	6	.	.	PUNCT
alkej-146	132	1	a	a	PRON
alkej-146	132	2	,	,	PUNCT
alkej-146	132	3	and	and	CCONJ
alkej-146	132	4	b	b	X
alkej-146	132	5	are	be	AUX
alkej-146	132	6	the	the	DET
alkej-146	132	7	piezoelectric	piezoelectric	NOUN
alkej-146	132	8	micropositioner	micropositioner	ADV
alkej-146	132	9	stage	stage	NOUN
alkej-146	132	10	system	system	NOUN
alkej-146	132	11	state	state	NOUN
alkej-146	132	12	space	space	NOUN
alkej-146	132	13	matrices	matrix	NOUN
alkej-146	132	14	.	.	PUNCT
alkej-146	133	1	substituting	substitute	VERB
alkej-146	133	2	the	the	DET
alkej-146	133	3	above	above	ADJ
alkej-146	133	4	state	state	NOUN
alkej-146	133	5	space	space	NOUN
alkej-146	133	6	matrices	matrix	NOUN
alkej-146	133	7	into	into	ADP
alkej-146	133	8	eq.(4	eq.(4	ADJ
alkej-146	133	9	)	)	PUNCT
alkej-146	133	10	above	above	ADP
alkej-146	133	11	yield	yield	NOUN
alkej-146	133	12	:	:	PUNCT
alkej-146	133	13	s	s	X
alkej-146	133	14	=	=	SYM
alkej-146	133	15	0	0	NUM
alkej-146	133	16	30695−30695.04	30695−30695.04	NUM
alkej-146	133	17	−1.0758	−1.0758	NOUN
alkej-146	133	18	×	×	NOUN
alkej-146	133	19	10	10	NUM
alkej-146	133	20	…	…	PUNCT
alkej-146	133	21	(	(	PUNCT
alkej-146	133	22	5	5	NUM
alkej-146	133	23	)	)	PUNCT
alkej-146	134	1	the	the	DET
alkej-146	134	2	rank	rank	NOUN
alkej-146	134	3	of	of	ADP
alkej-146	134	4	the	the	DET
alkej-146	134	5	above	above	ADJ
alkej-146	134	6	controllability	controllability	NOUN
alkej-146	134	7	matrix	matrix	NOUN
alkej-146	134	8	is	be	AUX
alkej-146	134	9	found	find	VERB
alkej-146	134	10	to	to	PART
alkej-146	134	11	be	be	AUX
alkej-146	134	12	2	2	NUM
alkej-146	134	13	,	,	PUNCT
alkej-146	134	14	which	which	PRON
alkej-146	134	15	means	mean	VERB
alkej-146	134	16	that	that	SCONJ
alkej-146	134	17	the	the	DET
alkej-146	134	18	system	system	NOUN
alkej-146	134	19	is	be	AUX
alkej-146	134	20	fully	fully	ADV
alkej-146	134	21	controllable	controllable	ADJ
alkej-146	134	22	.	.	PUNCT
alkej-146	135	1	5	5	X
alkej-146	135	2	.	.	X
alkej-146	135	3	genetic	genetic	ADJ
alkej-146	135	4	algorithm	algorithm	NOUN
alkej-146	135	5	genetic	genetic	ADJ
alkej-146	135	6	algorithm	algorithm	NOUN
alkej-146	135	7	is	be	AUX
alkej-146	135	8	a	a	DET
alkej-146	135	9	powerful	powerful	ADJ
alkej-146	135	10	search	search	NOUN
alkej-146	135	11	algorithm	algorithm	NOUN
alkej-146	135	12	that	that	PRON
alkej-146	135	13	performs	perform	VERB
alkej-146	135	14	an	an	DET
alkej-146	135	15	exploration	exploration	NOUN
alkej-146	135	16	of	of	ADP
alkej-146	135	17	the	the	DET
alkej-146	135	18	search	search	NOUN
alkej-146	135	19	space	space	NOUN
alkej-146	135	20	that	that	PRON
alkej-146	135	21	evolves	evolve	VERB
alkej-146	135	22	in	in	ADP
alkej-146	135	23	analogy	analogy	NOUN
alkej-146	135	24	to	to	ADP
alkej-146	135	25	the	the	DET
alkej-146	135	26	evolution	evolution	NOUN
alkej-146	135	27	in	in	ADP
alkej-146	135	28	nature	nature	NOUN
alkej-146	135	29	[	[	X
alkej-146	135	30	16	16	NUM
alkej-146	135	31	]	]	PUNCT
alkej-146	135	32	.	.	PUNCT
alkej-146	136	1	(	(	PUNCT
alkej-146	136	2	gas	gas	NOUN
alkej-146	136	3	)	)	PUNCT
alkej-146	136	4	use	use	VERB
alkej-146	136	5	probabilistic	probabilistic	ADJ
alkej-146	136	6	transition	transition	NOUN
alkej-146	136	7	rules	rule	NOUN
alkej-146	136	8	instead	instead	ADV
alkej-146	136	9	of	of	ADP
alkej-146	136	10	deterministic	deterministic	ADJ
alkej-146	136	11	rules	rule	NOUN
alkej-146	136	12	,	,	PUNCT
alkej-146	136	13	and	and	CCONJ
alkej-146	136	14	handle	handle	VERB
alkej-146	136	15	a	a	DET
alkej-146	136	16	population	population	NOUN
alkej-146	136	17	of	of	ADP
alkej-146	136	18	potential	potential	ADJ
alkej-146	136	19	solutions	solution	NOUN
alkej-146	136	20	known	know	VERB
alkej-146	136	21	as	as	ADP
alkej-146	136	22	individuals	individual	NOUN
alkej-146	136	23	or	or	CCONJ
alkej-146	136	24	chromosomes	chromosome	NOUN
alkej-146	136	25	that	that	PRON
alkej-146	136	26	evolve	evolve	VERB
alkej-146	136	27	iteratively	iteratively	ADV
alkej-146	136	28	.	.	PUNCT
alkej-146	137	1	each	each	DET
alkej-146	137	2	iteration	iteration	NOUN
alkej-146	137	3	of	of	ADP
alkej-146	137	4	the	the	DET
alkej-146	137	5	algorithm	algorithm	NOUN
alkej-146	137	6	is	be	AUX
alkej-146	137	7	termed	term	VERB
alkej-146	137	8	as	as	ADP
alkej-146	137	9	a	a	DET
alkej-146	137	10	generation	generation	NOUN
alkej-146	137	11	.	.	PUNCT
alkej-146	138	1	the	the	DET
alkej-146	138	2	evolution	evolution	NOUN
alkej-146	138	3	of	of	ADP
alkej-146	138	4	solutions	solution	NOUN
alkej-146	138	5	is	be	AUX
alkej-146	138	6	simulated	simulate	VERB
alkej-146	138	7	through	through	ADP
alkej-146	138	8	a	a	DET
alkej-146	138	9	fitness	fitness	NOUN
alkej-146	138	10	function	function	NOUN
alkej-146	138	11	and	and	CCONJ
alkej-146	138	12	genetic	genetic	ADJ
alkej-146	138	13	operators	operator	NOUN
alkej-146	138	14	such	such	ADJ
alkej-146	138	15	as	as	ADP
alkej-146	138	16	reproduction	reproduction	NOUN
alkej-146	138	17	,	,	PUNCT
alkej-146	138	18	crossover	crossover	NOUN
alkej-146	138	19	and	and	CCONJ
alkej-146	138	20	mutation	mutation	NOUN
alkej-146	138	21	.	.	PUNCT
alkej-146	139	1	the	the	DET
alkej-146	139	2	fittest	fit	ADJ
alkej-146	139	3	individual	individual	NOUN
alkej-146	139	4	will	will	AUX
alkej-146	139	5	survive	survive	VERB
alkej-146	139	6	generation	generation	NOUN
alkej-146	139	7	after	after	ADP
alkej-146	139	8	generation	generation	NOUN
alkej-146	139	9	,	,	PUNCT
alkej-146	139	10	and	and	CCONJ
alkej-146	139	11	will	will	AUX
alkej-146	139	12	also	also	ADV
alkej-146	139	13	reprodue	reprodue	VERB
alkej-146	139	14	and	and	CCONJ
alkej-146	139	15	generate	generate	VERB
alkej-146	139	16	offsprings	offspring	NOUN
alkej-146	139	17	that	that	PRON
alkej-146	139	18	might	might	AUX
alkej-146	139	19	be	be	AUX
alkej-146	139	20	stronger	strong	ADJ
alkej-146	139	21	.	.	PUNCT
alkej-146	140	1	at	at	ADP
alkej-146	140	2	the	the	DET
alkej-146	140	3	same	same	ADJ
alkej-146	140	4	time	time	NOUN
alkej-146	140	5	,	,	PUNCT
alkej-146	140	6	the	the	DET
alkej-146	140	7	weakest	weak	ADJ
alkej-146	140	8	individuals	individual	NOUN
alkej-146	140	9	disappear	disappear	VERB
alkej-146	140	10	from	from	ADP
alkej-146	140	11	each	each	DET
alkej-146	140	12	generation	generation	NOUN
alkej-146	140	13	[	[	X
alkej-146	140	14	17	17	NUM
alkej-146	140	15	]	]	PUNCT
alkej-146	140	16	.	.	PUNCT
alkej-146	141	1	a	a	DET
alkej-146	141	2	genetic	genetic	ADJ
alkej-146	141	3	algorithm	algorithm	NOUN
alkej-146	141	4	(	(	PUNCT
alkej-146	141	5	fig	fig	NOUN
alkej-146	141	6	.	.	PUNCT
alkej-146	142	1	(	(	PUNCT
alkej-146	142	2	8)	8)	NUM
alkej-146	142	3	)	)	PUNCT
alkej-146	142	4	is	be	AUX
alkej-146	142	5	typically	typically	ADV
alkej-146	142	6	initialized	initialize	VERB
alkej-146	142	7	with	with	ADP
alkej-146	142	8	a	a	DET
alkej-146	142	9	random	random	ADJ
alkej-146	142	10	population	population	NOUN
alkej-146	142	11	.	.	PUNCT
alkej-146	143	1	this	this	DET
alkej-146	143	2	population	population	NOUN
alkej-146	143	3	(	(	PUNCT
alkej-146	143	4	mating	mating	NOUN
alkej-146	143	5	pool	pool	NOUN
alkej-146	143	6	)	)	PUNCT
alkej-146	143	7	is	be	AUX
alkej-146	143	8	usually	usually	ADV
alkej-146	143	9	represented	represent	VERB
alkej-146	143	10	by	by	ADP
alkej-146	143	11	a	a	DET
alkej-146	143	12	real	real	ADV
alkej-146	143	13	-	-	PUNCT
alkej-146	143	14	valued	value	VERB
alkej-146	143	15	number	number	NOUN
alkej-146	143	16	or	or	CCONJ
alkej-146	143	17	a	a	DET
alkej-146	143	18	binary	binary	ADJ
alkej-146	143	19	string	string	NOUN
alkej-146	143	20	called	call	VERB
alkej-146	143	21	a	a	DET
alkej-146	143	22	chromosome	chromosome	NOUN
alkej-146	143	23	.	.	PUNCT
alkej-146	144	1	how	how	SCONJ
alkej-146	144	2	well	well	ADV
alkej-146	144	3	an	an	DET
alkej-146	144	4	individual	individual	NOUN
alkej-146	144	5	performs	perform	VERB
alkej-146	144	6	a	a	DET
alkej-146	144	7	task	task	NOUN
alkej-146	144	8	is	be	AUX
alkej-146	144	9	measured	measure	VERB
alkej-146	144	10	and	and	CCONJ
alkej-146	144	11	assessed	assess	VERB
alkej-146	144	12	by	by	ADP
alkej-146	144	13	the	the	DET
alkej-146	144	14	objective	objective	ADJ
alkej-146	144	15	function	function	NOUN
alkej-146	144	16	,	,	PUNCT
alkej-146	144	17	which	which	PRON
alkej-146	144	18	assigns	assign	VERB
alkej-146	144	19	each	each	DET
alkej-146	144	20	individual	individual	NOUN
alkej-146	144	21	a	a	DET
alkej-146	144	22	corresponding	correspond	VERB
alkej-146	144	23	number	number	NOUN
alkej-146	144	24	called	call	VERB
alkej-146	144	25	its	its	PRON
alkej-146	144	26	fitness	fitness	NOUN
alkej-146	144	27	.	.	PUNCT
alkej-146	145	1	the	the	DET
alkej-146	145	2	fitness	fitness	NOUN
alkej-146	145	3	of	of	ADP
alkej-146	145	4	each	each	DET
alkej-146	145	5	chromosome	chromosome	NOUN
alkej-146	145	6	is	be	AUX
alkej-146	145	7	assessed	assess	VERB
alkej-146	145	8	and	and	CCONJ
alkej-146	145	9	a	a	DET
alkej-146	145	10	survival	survival	NOUN
alkej-146	145	11	of	of	ADP
alkej-146	145	12	the	the	DET
alkej-146	145	13	fittest	fit	ADJ
alkej-146	145	14	strategy	strategy	NOUN
alkej-146	145	15	is	be	AUX
alkej-146	145	16	applied	apply	VERB
alkej-146	145	17	[	[	PUNCT
alkej-146	145	18	18	18	NUM
alkej-146	145	19	]	]	PUNCT
alkej-146	145	20	.	.	PUNCT
alkej-146	146	1	there	there	PRON
alkej-146	146	2	are	be	VERB
alkej-146	146	3	three	three	NUM
alkej-146	146	4	main	main	ADJ
alkej-146	146	5	operators	operator	NOUN
alkej-146	146	6	for	for	ADP
alkej-146	146	7	a	a	DET
alkej-146	146	8	genetic	genetic	ADJ
alkej-146	146	9	algorithm	algorithm	NOUN
alkej-146	146	10	–	–	PUNCT
alkej-146	146	11	reproduction	reproduction	NOUN
alkej-146	146	12	,	,	PUNCT
alkej-146	146	13	crossover	crossover	NOUN
alkej-146	146	14	and	and	CCONJ
alkej-146	146	15	mutation	mutation	NOUN
alkej-146	146	16	.	.	PUNCT
alkej-146	147	1	yasir	yasir	PROPN
alkej-146	147	2	khudhair	khudhair	PROPN
alkej-146	147	3	abbas	abbas	PROPN
alkej-146	147	4	al	al	PROPN
alkej-146	147	5	-	-	PUNCT
alkej-146	147	6	khwarizmi	khwarizmi	PROPN
alkej-146	147	7	engineering	engineering	NOUN
alkej-146	147	8	journal	journal	PROPN
alkej-146	147	9	,	,	PUNCT
alkej-146	147	10	vol	vol	NOUN
alkej-146	147	11	.	.	PROPN
alkej-146	147	12	8	8	NUM
alkej-146	147	13	,	,	PUNCT
alkej-146	147	14	no.4	no.4	PROPN
alkej-146	147	15	,	,	PUNCT
alkej-146	147	16	pp40	pp40	PROPN
alkej-146	147	17	-52	-52	PROPN
alkej-146	147	18	(	(	PUNCT
alkej-146	147	19	2012	2012	NUM
alkej-146	147	20	)	)	PUNCT
alkej-146	147	21	45	45	NUM
alkej-146	147	22	fig	fig	NOUN
alkej-146	147	23	.	.	PUNCT
alkej-146	148	1	8	8	X
alkej-146	148	2	.	.	X
alkej-146	149	1	flowchart	flowchart	PROPN
alkej-146	149	2	of	of	ADP
alkej-146	149	3	ga	ga	PROPN
alkej-146	149	4	programming	programming	NOUN
alkej-146	149	5	.	.	PUNCT
alkej-146	150	1	5.1	5.1	NUM
alkej-146	150	2	.	.	PUNCT
alkej-146	150	3	reproduction	reproduction	NOUN
alkej-146	150	4	during	during	ADP
alkej-146	150	5	the	the	DET
alkej-146	150	6	reproduction	reproduction	NOUN
alkej-146	150	7	phase	phase	NOUN
alkej-146	150	8	the	the	DET
alkej-146	150	9	fitness	fitness	NOUN
alkej-146	150	10	value	value	NOUN
alkej-146	150	11	of	of	ADP
alkej-146	150	12	each	each	DET
alkej-146	150	13	chromosome	chromosome	NOUN
alkej-146	150	14	is	be	AUX
alkej-146	150	15	assessed	assess	VERB
alkej-146	150	16	.	.	PUNCT
alkej-146	151	1	this	this	DET
alkej-146	151	2	value	value	NOUN
alkej-146	151	3	is	be	AUX
alkej-146	151	4	used	use	VERB
alkej-146	151	5	in	in	ADP
alkej-146	151	6	the	the	DET
alkej-146	151	7	selection	selection	NOUN
alkej-146	151	8	process	process	NOUN
alkej-146	151	9	to	to	PART
alkej-146	151	10	provide	provide	VERB
alkej-146	151	11	bias	bias	NOUN
alkej-146	151	12	towards	towards	ADP
alkej-146	151	13	fitter	fit	ADJ
alkej-146	151	14	individuals	individual	NOUN
alkej-146	151	15	.	.	PUNCT
alkej-146	152	1	just	just	ADV
alkej-146	152	2	like	like	INTJ
alkej-146	152	3	in	in	ADP
alkej-146	152	4	natural	natural	ADJ
alkej-146	152	5	evolution	evolution	NOUN
alkej-146	152	6	,	,	PUNCT
alkej-146	152	7	a	a	DET
alkej-146	152	8	fit	fit	ADJ
alkej-146	152	9	chromosome	chromosome	NOUN
alkej-146	152	10	has	have	VERB
alkej-146	152	11	a	a	DET
alkej-146	152	12	higher	high	ADJ
alkej-146	152	13	probability	probability	NOUN
alkej-146	152	14	of	of	ADP
alkej-146	152	15	being	be	AUX
alkej-146	152	16	selected	select	VERB
alkej-146	152	17	for	for	ADP
alkej-146	152	18	reproduction	reproduction	NOUN
alkej-146	152	19	[	[	X
alkej-146	152	20	9	9	NUM
alkej-146	152	21	]	]	PUNCT
alkej-146	152	22	.	.	PUNCT
alkej-146	153	1	an	an	DET
alkej-146	153	2	example	example	NOUN
alkej-146	153	3	of	of	ADP
alkej-146	153	4	a	a	DET
alkej-146	153	5	common	common	ADJ
alkej-146	153	6	selection	selection	NOUN
alkej-146	153	7	technique	technique	NOUN
alkej-146	153	8	is	be	AUX
alkej-146	153	9	the	the	DET
alkej-146	153	10	‘	'	PUNCT
alkej-146	153	11	roulette	roulette	NOUN
alkej-146	153	12	wheel	wheel	NOUN
alkej-146	153	13	’	'	PUNCT
alkej-146	153	14	selection	selection	NOUN
alkej-146	153	15	method;see	method;see	PROPN
alkej-146	153	16	fig	fig	NOUN
alkej-146	153	17	.	.	PUNCT
alkej-146	154	1	(	(	PUNCT
alkej-146	154	2	9	9	NUM
alkej-146	154	3	)	)	PUNCT
alkej-146	154	4	.	.	PUNCT
alkej-146	155	1	each	each	DET
alkej-146	155	2	individual	individual	NOUN
alkej-146	155	3	in	in	ADP
alkej-146	155	4	the	the	DET
alkej-146	155	5	population	population	NOUN
alkej-146	155	6	is	be	AUX
alkej-146	155	7	allocated	allocate	VERB
alkej-146	155	8	a	a	DET
alkej-146	155	9	section	section	NOUN
alkej-146	155	10	of	of	ADP
alkej-146	155	11	a	a	DET
alkej-146	155	12	roulette	roulette	NOUN
alkej-146	155	13	wheel	wheel	NOUN
alkej-146	155	14	;	;	PUNCT
alkej-146	155	15	the	the	DET
alkej-146	155	16	size	size	NOUN
alkej-146	155	17	of	of	ADP
alkej-146	155	18	the	the	DET
alkej-146	155	19	section	section	NOUN
alkej-146	155	20	is	be	AUX
alkej-146	155	21	proportional	proportional	ADJ
alkej-146	155	22	to	to	ADP
alkej-146	155	23	the	the	DET
alkej-146	155	24	fitness	fitness	NOUN
alkej-146	155	25	of	of	ADP
alkej-146	155	26	the	the	DET
alkej-146	155	27	individual	individual	NOUN
alkej-146	155	28	.	.	PUNCT
alkej-146	156	1	a	a	DET
alkej-146	156	2	pointer	pointer	NOUN
alkej-146	156	3	is	be	AUX
alkej-146	156	4	spun	spin	VERB
alkej-146	156	5	and	and	CCONJ
alkej-146	156	6	the	the	DET
alkej-146	156	7	individual	individual	NOUN
alkej-146	156	8	to	to	PART
alkej-146	156	9	whom	whom	PRON
alkej-146	156	10	it	it	PRON
alkej-146	156	11	points	point	VERB
alkej-146	156	12	is	be	AUX
alkej-146	156	13	selected	select	VERB
alkej-146	156	14	.	.	PUNCT
alkej-146	157	1	this	this	PRON
alkej-146	157	2	continues	continue	VERB
alkej-146	157	3	until	until	SCONJ
alkej-146	157	4	the	the	DET
alkej-146	157	5	selection	selection	NOUN
alkej-146	157	6	criterion	criterion	NOUN
alkej-146	157	7	has	have	AUX
alkej-146	157	8	been	be	AUX
alkej-146	157	9	is	be	AUX
alkej-146	157	10	met	meet	VERB
alkej-146	157	11	[	[	PUNCT
alkej-146	157	12	19	19	NUM
alkej-146	157	13	]	]	PUNCT
alkej-146	157	14	.	.	PUNCT
alkej-146	158	1	fig	fig	NOUN
alkej-146	158	2	.	.	PUNCT
alkej-146	159	1	9	9	X
alkej-146	159	2	.	.	X
alkej-146	159	3	depiction	depiction	NOUN
alkej-146	159	4	of	of	ADP
alkej-146	159	5	roulette	roulette	NOUN
alkej-146	159	6	wheel	wheel	NOUN
alkej-146	159	7	selection	selection	NOUN
alkej-146	159	8	.	.	PUNCT
alkej-146	160	1	5.2	5.2	NUM
alkej-146	160	2	.	.	PUNCT
alkej-146	161	1	crossover	crossover	VERB
alkej-146	161	2	once	once	ADV
alkej-146	161	3	the	the	DET
alkej-146	161	4	selection	selection	NOUN
alkej-146	161	5	process	process	NOUN
alkej-146	161	6	is	be	AUX
alkej-146	161	7	complete	complete	ADJ
alkej-146	161	8	,	,	PUNCT
alkej-146	161	9	the	the	DET
alkej-146	161	10	crossover	crossover	NOUN
alkej-146	161	11	algorithm	algorithm	NOUN
alkej-146	161	12	is	be	AUX
alkej-146	161	13	initiated	initiate	VERB
alkej-146	161	14	.	.	PUNCT
alkej-146	162	1	the	the	DET
alkej-146	162	2	crossover	crossover	NOUN
alkej-146	162	3	operations	operation	NOUN
alkej-146	162	4	swap	swap	VERB
alkej-146	162	5	certain	certain	ADJ
alkej-146	162	6	parts	part	NOUN
alkej-146	162	7	of	of	ADP
alkej-146	162	8	the	the	DET
alkej-146	162	9	two	two	NUM
alkej-146	162	10	selected	select	VERB
alkej-146	162	11	strings	string	NOUN
alkej-146	162	12	in	in	ADP
alkej-146	162	13	a	a	DET
alkej-146	162	14	bid	bid	NOUN
alkej-146	162	15	to	to	PART
alkej-146	162	16	capture	capture	VERB
alkej-146	162	17	the	the	DET
alkej-146	162	18	good	good	ADJ
alkej-146	162	19	parts	part	NOUN
alkej-146	162	20	of	of	ADP
alkej-146	162	21	old	old	ADJ
alkej-146	162	22	chromosomes	chromosome	NOUN
alkej-146	162	23	and	and	CCONJ
alkej-146	162	24	create	create	VERB
alkej-146	162	25	better	well	ADJ
alkej-146	162	26	new	new	ADJ
alkej-146	162	27	ones	one	NOUN
alkej-146	162	28	.	.	PUNCT
alkej-146	163	1	genetic	genetic	ADJ
alkej-146	163	2	operators	operator	NOUN
alkej-146	163	3	manipulate	manipulate	VERB
alkej-146	163	4	the	the	DET
alkej-146	163	5	characters	character	NOUN
alkej-146	163	6	of	of	ADP
alkej-146	163	7	a	a	DET
alkej-146	163	8	chromosome	chromosome	NOUN
alkej-146	163	9	directly	directly	ADV
alkej-146	163	10	,	,	PUNCT
alkej-146	163	11	using	use	VERB
alkej-146	163	12	the	the	DET
alkej-146	163	13	assumption	assumption	NOUN
alkej-146	163	14	that	that	SCONJ
alkej-146	163	15	certain	certain	ADJ
alkej-146	163	16	individual	individual	NOUN
alkej-146	163	17	’s	’s	PART
alkej-146	163	18	gene	gene	NOUN
alkej-146	163	19	codes	code	NOUN
alkej-146	163	20	,	,	PUNCT
alkej-146	163	21	on	on	ADP
alkej-146	163	22	average	average	ADJ
alkej-146	163	23	,	,	PUNCT
alkej-146	163	24	produce	produce	VERB
alkej-146	163	25	fitter	fit	ADJ
alkej-146	163	26	individuals	individual	NOUN
alkej-146	163	27	.	.	PUNCT
alkej-146	164	1	the	the	DET
alkej-146	164	2	crossover	crossover	NOUN
alkej-146	164	3	probability	probability	NOUN
alkej-146	164	4	indicates	indicate	VERB
alkej-146	164	5	how	how	SCONJ
alkej-146	164	6	often	often	ADV
alkej-146	164	7	crossover	crossover	VERB
alkej-146	164	8	is	be	AUX
alkej-146	164	9	performed	perform	VERB
alkej-146	164	10	.	.	PUNCT
alkej-146	165	1	a	a	DET
alkej-146	165	2	probability	probability	NOUN
alkej-146	165	3	of	of	ADP
alkej-146	165	4	0	0	NUM
alkej-146	165	5	%	%	NOUN
alkej-146	165	6	means	mean	VERB
alkej-146	165	7	that	that	SCONJ
alkej-146	165	8	the	the	DET
alkej-146	165	9	‘	'	PUNCT
alkej-146	165	10	offspring	offspring	NOUN
alkej-146	165	11	’	'	PUNCT
alkej-146	165	12	will	will	AUX
alkej-146	165	13	be	be	AUX
alkej-146	165	14	exact	exact	ADJ
alkej-146	165	15	replicas	replica	NOUN
alkej-146	165	16	of	of	ADP
alkej-146	165	17	their	their	PRON
alkej-146	165	18	‘	'	PUNCT
alkej-146	165	19	parents	parent	NOUN
alkej-146	165	20	’	'	PUNCT
alkej-146	165	21	and	and	CCONJ
alkej-146	165	22	a	a	DET
alkej-146	165	23	probability	probability	NOUN
alkej-146	165	24	of	of	ADP
alkej-146	165	25	100	100	NUM
alkej-146	165	26	%	%	NOUN
alkej-146	165	27	means	mean	VERB
alkej-146	165	28	that	that	SCONJ
alkej-146	165	29	each	each	DET
alkej-146	165	30	generation	generation	NOUN
alkej-146	165	31	will	will	AUX
alkej-146	165	32	be	be	AUX
alkej-146	165	33	composed	compose	VERB
alkej-146	165	34	of	of	ADP
alkej-146	165	35	entirely	entirely	ADV
alkej-146	165	36	new	new	ADJ
alkej-146	165	37	offspring	offspring	NOUN
alkej-146	165	38	.	.	PUNCT
alkej-146	166	1	the	the	DET
alkej-146	166	2	simplest	simple	ADJ
alkej-146	166	3	crossover	crossover	NOUN
alkej-146	166	4	technique	technique	NOUN
alkej-146	166	5	is	be	AUX
alkej-146	166	6	the	the	DET
alkej-146	166	7	single	single	ADJ
alkej-146	166	8	point	point	NOUN
alkej-146	166	9	crossover	crossover	ADP
alkej-146	166	10	[	[	X
alkej-146	166	11	9,18	9,18	NUM
alkej-146	166	12	]	]	PUNCT
alkej-146	166	13	.	.	PUNCT
alkej-146	167	1	5.3	5.3	NUM
alkej-146	167	2	.	.	PUNCT
alkej-146	167	3	mutation	mutation	NOUN
alkej-146	167	4	using	use	VERB
alkej-146	167	5	selection	selection	NOUN
alkej-146	167	6	and	and	CCONJ
alkej-146	167	7	crossover	crossover	NOUN
alkej-146	167	8	on	on	ADP
alkej-146	167	9	their	their	PRON
alkej-146	167	10	own	own	ADJ
alkej-146	167	11	will	will	AUX
alkej-146	167	12	generate	generate	VERB
alkej-146	167	13	a	a	DET
alkej-146	167	14	large	large	ADJ
alkej-146	167	15	amount	amount	NOUN
alkej-146	167	16	of	of	ADP
alkej-146	167	17	different	different	ADJ
alkej-146	167	18	strings	string	NOUN
alkej-146	167	19	.	.	PUNCT
alkej-146	168	1	however	however	ADV
alkej-146	168	2	there	there	PRON
alkej-146	168	3	are	be	VERB
alkej-146	168	4	two	two	NUM
alkej-146	168	5	main	main	ADJ
alkej-146	168	6	problems	problem	NOUN
alkej-146	168	7	with	with	ADP
alkej-146	168	8	this	this	PRON
alkej-146	168	9	:	:	PUNCT
alkej-146	168	10	1	1	X
alkej-146	168	11	.	.	X
alkej-146	169	1	depending	depend	VERB
alkej-146	169	2	on	on	ADP
alkej-146	169	3	the	the	DET
alkej-146	169	4	initial	initial	ADJ
alkej-146	169	5	population	population	NOUN
alkej-146	169	6	chosen	choose	VERB
alkej-146	169	7	,	,	PUNCT
alkej-146	169	8	there	there	PRON
alkej-146	169	9	may	may	AUX
alkej-146	169	10	not	not	PART
alkej-146	169	11	be	be	AUX
alkej-146	169	12	enough	enough	ADJ
alkej-146	169	13	diversity	diversity	NOUN
alkej-146	169	14	in	in	ADP
alkej-146	169	15	the	the	DET
alkej-146	169	16	initial	initial	ADJ
alkej-146	169	17	strings	string	NOUN
alkej-146	169	18	to	to	PART
alkej-146	169	19	ensure	ensure	VERB
alkej-146	169	20	the	the	DET
alkej-146	169	21	ga	ga	PROPN
alkej-146	169	22	searches	search	VERB
alkej-146	169	23	the	the	DET
alkej-146	169	24	entire	entire	ADJ
alkej-146	169	25	problem	problem	NOUN
alkej-146	169	26	space	space	NOUN
alkej-146	169	27	.	.	PUNCT
alkej-146	170	1	2	2	X
alkej-146	170	2	.	.	X
alkej-146	170	3	the	the	DET
alkej-146	170	4	ga	ga	PROPN
alkej-146	170	5	may	may	AUX
alkej-146	170	6	converge	converge	VERB
alkej-146	170	7	on	on	ADP
alkej-146	170	8	sub	sub	ADJ
alkej-146	170	9	-	-	ADJ
alkej-146	170	10	optimum	optimum	ADJ
alkej-146	170	11	strings	string	NOUN
alkej-146	170	12	due	due	ADP
alkej-146	170	13	to	to	ADP
alkej-146	170	14	a	a	DET
alkej-146	170	15	bad	bad	ADJ
alkej-146	170	16	choice	choice	NOUN
alkej-146	170	17	of	of	ADP
alkej-146	170	18	initial	initial	ADJ
alkej-146	170	19	population	population	NOUN
alkej-146	170	20	.	.	PUNCT
alkej-146	171	1	these	these	DET
alkej-146	171	2	problems	problem	NOUN
alkej-146	171	3	may	may	AUX
alkej-146	171	4	be	be	AUX
alkej-146	171	5	overcome	overcome	VERB
alkej-146	171	6	by	by	ADP
alkej-146	171	7	the	the	DET
alkej-146	171	8	introduction	introduction	NOUN
alkej-146	171	9	of	of	ADP
alkej-146	171	10	a	a	DET
alkej-146	171	11	mutation	mutation	NOUN
alkej-146	171	12	operator	operator	NOUN
alkej-146	171	13	into	into	ADP
alkej-146	171	14	the	the	DET
alkej-146	171	15	ga	ga	PROPN
alkej-146	171	16	.	.	PROPN
alkej-146	171	17	mutation	mutation	NOUN
alkej-146	171	18	is	be	AUX
alkej-146	171	19	the	the	DET
alkej-146	171	20	occasional	occasional	ADJ
alkej-146	171	21	random	random	ADJ
alkej-146	171	22	alteration	alteration	NOUN
alkej-146	171	23	of	of	ADP
alkej-146	171	24	a	a	DET
alkej-146	171	25	value	value	NOUN
alkej-146	171	26	of	of	ADP
alkej-146	171	27	a	a	DET
alkej-146	171	28	string	string	NOUN
alkej-146	171	29	position	position	NOUN
alkej-146	171	30	.	.	PUNCT
alkej-146	172	1	it	it	PRON
alkej-146	172	2	is	be	AUX
alkej-146	172	3	considered	consider	VERB
alkej-146	172	4	a	a	DET
alkej-146	172	5	background	background	NOUN
alkej-146	172	6	operator	operator	NOUN
alkej-146	172	7	in	in	ADP
alkej-146	172	8	the	the	DET
alkej-146	172	9	genetic	genetic	ADJ
alkej-146	172	10	algorithm	algorithm	NOUN
alkej-146	172	11	.	.	PUNCT
alkej-146	173	1	the	the	DET
alkej-146	173	2	probability	probability	NOUN
alkej-146	173	3	of	of	ADP
alkej-146	173	4	mutation	mutation	NOUN
alkej-146	173	5	is	be	AUX
alkej-146	173	6	normally	normally	ADV
alkej-146	173	7	low	low	ADJ
alkej-146	173	8	because	because	SCONJ
alkej-146	173	9	a	a	DET
alkej-146	173	10	high	high	ADJ
alkej-146	173	11	mutation	mutation	NOUN
alkej-146	173	12	rate	rate	NOUN
alkej-146	173	13	would	would	AUX
alkej-146	173	14	destroy	destroy	VERB
alkej-146	173	15	fit	fit	ADJ
alkej-146	173	16	strings	string	NOUN
alkej-146	173	17	and	and	CCONJ
alkej-146	173	18	degenerate	degenerate	VERB
alkej-146	173	19	the	the	DET
alkej-146	173	20	genetic	genetic	ADJ
alkej-146	173	21	algorithm	algorithm	NOUN
alkej-146	173	22	into	into	ADP
alkej-146	173	23	a	a	DET
alkej-146	173	24	random	random	ADJ
alkej-146	173	25	search	search	NOUN
alkej-146	173	26	.	.	PUNCT
alkej-146	174	1	mutation	mutation	NOUN
alkej-146	174	2	probability	probability	NOUN
alkej-146	174	3	values	value	NOUN
alkej-146	174	4	of	of	ADP
alkej-146	174	5	around	around	ADP
alkej-146	174	6	0.1	0.1	NUM
alkej-146	174	7	%	%	NOUN
alkej-146	174	8	or	or	CCONJ
alkej-146	174	9	0.01	0.01	NUM
alkej-146	174	10	%	%	NOUN
alkej-146	174	11	are	be	AUX
alkej-146	174	12	common	common	ADJ
alkej-146	174	13	.	.	PUNCT
alkej-146	175	1	these	these	DET
alkej-146	175	2	values	value	NOUN
alkej-146	175	3	represent	represent	VERB
alkej-146	175	4	the	the	DET
alkej-146	175	5	probability	probability	NOUN
alkej-146	175	6	that	that	SCONJ
alkej-146	175	7	a	a	DET
alkej-146	175	8	certain	certain	ADJ
alkej-146	175	9	string	string	NOUN
alkej-146	175	10	will	will	AUX
alkej-146	175	11	be	be	AUX
alkej-146	175	12	selected	select	VERB
alkej-146	175	13	for	for	ADP
alkej-146	175	14	mutation	mutation	NOUN
alkej-146	175	15	i.e.	i.e.	X
alkej-146	175	16	for	for	ADP
alkej-146	175	17	a	a	DET
alkej-146	175	18	probability	probability	NOUN
alkej-146	175	19	of	of	ADP
alkej-146	175	20	0.1	0.1	NUM
alkej-146	175	21	%	%	NOUN
alkej-146	175	22	.	.	PUNCT
alkej-146	176	1	one	one	NUM
alkej-146	176	2	string	string	NOUN
alkej-146	176	3	in	in	ADP
alkej-146	176	4	one	one	NUM
alkej-146	176	5	thousand	thousand	NUM
alkej-146	176	6	will	will	AUX
alkej-146	176	7	be	be	AUX
alkej-146	176	8	selected	select	VERB
alkej-146	176	9	for	for	ADP
alkej-146	176	10	mutation	mutation	NOUN
alkej-146	176	11	[	[	X
alkej-146	176	12	9	9	NUM
alkej-146	176	13	,	,	PUNCT
alkej-146	176	14	18	18	NUM
alkej-146	176	15	]	]	PUNCT
alkej-146	176	16	.	.	PUNCT
alkej-146	177	1	6	6	X
alkej-146	177	2	.	.	X
alkej-146	177	3	ga	ga	NOUN
alkej-146	177	4	based	base	VERB
alkej-146	177	5	tuning	tuning	NOUN
alkej-146	177	6	of	of	ADP
alkej-146	177	7	the	the	DET
alkej-146	177	8	controller	controller	NOUN
alkej-146	177	9	the	the	DET
alkej-146	177	10	optimal	optimal	ADJ
alkej-146	177	11	value	value	NOUN
alkej-146	177	12	of	of	ADP
alkej-146	177	13	the	the	DET
alkej-146	177	14	pid	pid	NOUN
alkej-146	177	15	controller	controller	NOUN
alkej-146	177	16	parameters	parameter	NOUN
alkej-146	177	17	,	,	PUNCT
alkej-146	177	18	,	,	PUNCT
alkej-146	177	19	are	be	AUX
alkej-146	177	20	to	to	PART
alkej-146	177	21	be	be	AUX
alkej-146	177	22	found	find	VERB
alkej-146	177	23	using	use	VERB
alkej-146	177	24	ga	ga	PROPN
alkej-146	177	25	.	.	PUNCT
alkej-146	178	1	all	all	DET
alkej-146	178	2	possible	possible	ADJ
alkej-146	178	3	sets	set	NOUN
alkej-146	178	4	of	of	ADP
alkej-146	178	5	controller	controller	NOUN
alkej-146	178	6	parameter	parameter	NOUN
alkej-146	178	7	values	value	NOUN
alkej-146	178	8	are	be	AUX
alkej-146	178	9	particles	particle	NOUN
alkej-146	178	10	whose	whose	DET
alkej-146	178	11	values	value	NOUN
alkej-146	178	12	are	be	AUX
alkej-146	178	13	adjusted	adjust	VERB
alkej-146	178	14	to	to	PART
alkej-146	178	15	minimize	minimize	VERB
alkej-146	178	16	the	the	DET
alkej-146	178	17	objective	objective	ADJ
alkej-146	178	18	function	function	NOUN
alkej-146	178	19	,	,	PUNCT
alkej-146	178	20	which	which	PRON
alkej-146	178	21	in	in	ADP
alkej-146	178	22	this	this	DET
alkej-146	178	23	case	case	NOUN
alkej-146	178	24	is	be	AUX
alkej-146	178	25	the	the	DET
alkej-146	178	26	error	error	NOUN
alkej-146	178	27	criterion	criterion	NOUN
alkej-146	178	28	,	,	PUNCT
alkej-146	178	29	and	and	CCONJ
alkej-146	178	30	it	it	PRON
alkej-146	178	31	is	be	AUX
alkej-146	178	32	discussed	discuss	VERB
alkej-146	178	33	in	in	ADP
alkej-146	178	34	detail	detail	NOUN
alkej-146	178	35	.	.	PUNCT
alkej-146	179	1	for	for	ADP
alkej-146	179	2	the	the	DET
alkej-146	179	3	pid	pid	NOUN
alkej-146	179	4	controller	controller	NOUN
alkej-146	179	5	design	design	NOUN
alkej-146	179	6	,	,	PUNCT
alkej-146	179	7	the	the	DET
alkej-146	179	8	initialize	initialize	NOUN
alkej-146	179	9	population	population	NOUN
alkej-146	179	10	measure	measure	NOUN
alkej-146	179	11	fitness	fitness	NOUN
alkej-146	179	12	selection	selection	NOUN
alkej-146	179	13	mutation	mutation	NOUN
alkej-146	179	14	crossover	crossover	ADP
alkej-146	179	15	optimum	optimum	ADJ
alkej-146	179	16	solutions	solution	NOUN
alkej-146	179	17	not	not	PART
alkej-146	179	18	optimum	optimum	ADJ
alkej-146	179	19	solutions	solution	NOUN
alkej-146	179	20	yasir	yasir	PROPN
alkej-146	179	21	khudhair	khudhair	PROPN
alkej-146	179	22	abbas	abbas	PROPN
alkej-146	179	23	al	al	PROPN
alkej-146	179	24	-	-	PUNCT
alkej-146	179	25	khwarizmi	khwarizmi	PROPN
alkej-146	179	26	engineering	engineering	NOUN
alkej-146	179	27	journal	journal	PROPN
alkej-146	179	28	,	,	PUNCT
alkej-146	179	29	vol	vol	NOUN
alkej-146	179	30	.	.	PROPN
alkej-146	179	31	8	8	NUM
alkej-146	179	32	,	,	PUNCT
alkej-146	179	33	no.4	no.4	PROPN
alkej-146	179	34	,	,	PUNCT
alkej-146	179	35	pp40	pp40	PROPN
alkej-146	179	36	-52	-52	PROPN
alkej-146	179	37	(	(	PUNCT
alkej-146	179	38	2012	2012	NUM
alkej-146	179	39	)	)	PUNCT
alkej-146	179	40	46	46	NUM
alkej-146	179	41	controller	controller	NOUN
alkej-146	179	42	settings	setting	NOUN
alkej-146	179	43	estimated	estimate	VERB
alkej-146	179	44	results	result	NOUN
alkej-146	179	45	in	in	ADP
alkej-146	179	46	a	a	DET
alkej-146	179	47	stable	stable	ADJ
alkej-146	179	48	closed	closed	ADJ
alkej-146	179	49	loop	loop	NOUN
alkej-146	179	50	system	system	NOUN
alkej-146	179	51	are	be	AUX
alkej-146	179	52	ensured	ensure	VERB
alkej-146	179	53	.	.	PUNCT
alkej-146	180	1	6.1	6.1	NUM
alkej-146	180	2	.	.	PUNCT
alkej-146	180	3	objective	objective	ADJ
alkej-146	180	4	function	function	NOUN
alkej-146	180	5	for	for	ADP
alkej-146	180	6	the	the	DET
alkej-146	180	7	ga	ga	PROPN
alkej-146	180	8	the	the	DET
alkej-146	180	9	objective	objective	ADJ
alkej-146	180	10	functions	function	NOUN
alkej-146	180	11	considered	consider	VERB
alkej-146	180	12	are	be	AUX
alkej-146	180	13	based	base	VERB
alkej-146	180	14	on	on	ADP
alkej-146	180	15	the	the	DET
alkej-146	180	16	error	error	NOUN
alkej-146	180	17	criterion	criterion	NOUN
alkej-146	180	18	.	.	PUNCT
alkej-146	181	1	a	a	DET
alkej-146	181	2	number	number	NOUN
alkej-146	181	3	of	of	ADP
alkej-146	181	4	such	such	ADJ
alkej-146	181	5	criteria	criterion	NOUN
alkej-146	181	6	are	be	AUX
alkej-146	181	7	available	available	ADJ
alkej-146	181	8	.	.	PUNCT
alkej-146	182	1	in	in	ADP
alkej-146	182	2	this	this	DET
alkej-146	182	3	paper	paper	NOUN
alkej-146	182	4	controller	controller	NOUN
alkej-146	182	5	’s	’s	PART
alkej-146	182	6	performance	performance	NOUN
alkej-146	182	7	is	be	AUX
alkej-146	182	8	evaluated	evaluate	VERB
alkej-146	182	9	in	in	ADP
alkej-146	182	10	terms	term	NOUN
alkej-146	182	11	of	of	ADP
alkej-146	182	12	integral	integral	ADJ
alkej-146	182	13	time	time	NOUN
alkej-146	182	14	absolute	absolute	ADJ
alkej-146	182	15	error	error	NOUN
alkej-146	182	16	criteria	criterion	NOUN
alkej-146	182	17	(	(	PUNCT
alkej-146	182	18	itae	itae	PROPN
alkej-146	182	19	)	)	PUNCT
alkej-146	182	20	.	.	PUNCT
alkej-146	183	1	the	the	DET
alkej-146	183	2	error	error	NOUN
alkej-146	183	3	criterion	criterion	NOUN
alkej-146	183	4	is	be	AUX
alkej-146	183	5	given	give	VERB
alkej-146	183	6	as	as	ADP
alkej-146	183	7	a	a	DET
alkej-146	183	8	measure	measure	NOUN
alkej-146	183	9	of	of	ADP
alkej-146	183	10	performance	performance	NOUN
alkej-146	183	11	index	index	NOUN
alkej-146	183	12	given	give	VERB
alkej-146	183	13	by	by	ADP
alkej-146	183	14	the	the	DET
alkej-146	183	15	equation	equation	NOUN
alkej-146	183	16	for	for	ADP
alkej-146	183	17	the	the	DET
alkej-146	183	18	integral	integral	ADJ
alkej-146	183	19	of	of	ADP
alkej-146	183	20	time	time	NOUN
alkej-146	183	21	multiplied	multiply	VERB
alkej-146	183	22	by	by	ADP
alkej-146	183	23	absolute	absolute	ADJ
alkej-146	183	24	error	error	NOUN
alkej-146	183	25	(	(	PUNCT
alkej-146	183	26	itae	itae	PROPN
alkej-146	183	27	)	)	PUNCT
alkej-146	184	1	[	[	X
alkej-146	184	2	18	18	NUM
alkej-146	184	3	]	]	X
alkej-146	184	4	:	:	PUNCT
alkej-146	184	5	=	=	SYM
alkej-146	184	6	∫	∫	PROPN
alkej-146	184	7	|	|	INTJ
alkej-146	184	8	(	(	PUNCT
alkej-146	184	9	)	)	PUNCT
alkej-146	184	10	|	|	CCONJ
alkej-146	184	11	…	…	PUNCT
alkej-146	184	12	(	(	PUNCT
alkej-146	184	13	6	6	NUM
alkej-146	184	14	)	)	PUNCT
alkej-146	184	15	where	where	SCONJ
alkej-146	184	16	:	:	PUNCT
alkej-146	184	17	t	t	NOUN
alkej-146	184	18	:	:	PUNCT
alkej-146	184	19	final	final	ADJ
alkej-146	184	20	time	time	NOUN
alkej-146	184	21	of	of	ADP
alkej-146	184	22	simulation	simulation	NOUN
alkej-146	184	23	.	.	PUNCT
alkej-146	185	1	7	7	X
alkej-146	185	2	.	.	X
alkej-146	185	3	implementation	implementation	NOUN
alkej-146	185	4	of	of	ADP
alkej-146	185	5	ga	ga	PROPN
alkej-146	185	6	based	base	VERB
alkej-146	185	7	pid	pid	NOUN
alkej-146	185	8	controller	controller	NOUN
alkej-146	185	9	to	to	PART
alkej-146	185	10	ensure	ensure	VERB
alkej-146	185	11	optimal	optimal	ADJ
alkej-146	185	12	control	control	NOUN
alkej-146	185	13	performance	performance	NOUN
alkej-146	185	14	at	at	ADP
alkej-146	185	15	nominal	nominal	ADJ
alkej-146	185	16	operating	operating	NOUN
alkej-146	185	17	conditions	condition	NOUN
alkej-146	185	18	,	,	PUNCT
alkej-146	185	19	ga	ga	PROPN
alkej-146	185	20	can	can	AUX
alkej-146	185	21	be	be	AUX
alkej-146	185	22	applied	apply	VERB
alkej-146	185	23	to	to	ADP
alkej-146	185	24	the	the	DET
alkej-146	185	25	tuning	tuning	NOUN
alkej-146	185	26	of	of	ADP
alkej-146	185	27	pid	pid	NOUN
alkej-146	185	28	controller	controller	NOUN
alkej-146	185	29	gains	gain	NOUN
alkej-146	185	30	(	(	PUNCT
alkej-146	185	31	where	where	SCONJ
alkej-146	185	32	this	this	DET
alkej-146	185	33	ga	ga	PROPN
alkej-146	185	34	is	be	AUX
alkej-146	185	35	programmed	program	VERB
alkej-146	185	36	using	use	VERB
alkej-146	185	37	m	m	NOUN
alkej-146	185	38	-	-	NOUN
alkej-146	185	39	file	file	NOUN
alkej-146	185	40	[	[	X
alkej-146	185	41	matlab	matlab	PROPN
alkej-146	185	42	file	file	NOUN
alkej-146	185	43	]	]	PUNCT
alkej-146	185	44	code	code	NOUN
alkej-146	185	45	)	)	PUNCT
alkej-146	185	46	.	.	PUNCT
alkej-146	186	1	the	the	DET
alkej-146	186	2	block	block	NOUN
alkej-146	186	3	diagram	diagram	NOUN
alkej-146	186	4	(	(	PUNCT
alkej-146	186	5	fig	fig	NOUN
alkej-146	186	6	.	.	PUNCT
alkej-146	187	1	(	(	PUNCT
alkej-146	187	2	10	10	NUM
alkej-146	187	3	)	)	PUNCT
alkej-146	187	4	)	)	PUNCT
alkej-146	187	5	for	for	SCONJ
alkej-146	187	6	the	the	DET
alkej-146	187	7	entire	entire	ADJ
alkej-146	187	8	system	system	NOUN
alkej-146	187	9	is	be	AUX
alkej-146	187	10	given	give	VERB
alkej-146	187	11	below	below	ADP
alkej-146	187	12	and	and	CCONJ
alkej-146	187	13	also	also	ADV
alkej-146	187	14	the	the	DET
alkej-146	187	15	genetic	genetic	ADJ
alkej-146	187	16	algorithm	algorithm	NOUN
alkej-146	187	17	parameters	parameter	NOUN
alkej-146	187	18	chosen	choose	VERB
alkej-146	187	19	for	for	ADP
alkej-146	187	20	the	the	DET
alkej-146	187	21	tuning	tuning	NOUN
alkej-146	187	22	purpose	purpose	NOUN
alkej-146	187	23	are	be	AUX
alkej-146	187	24	shown	show	VERB
alkej-146	187	25	in	in	ADP
alkej-146	187	26	table	table	NOUN
alkej-146	187	27	(	(	PUNCT
alkej-146	187	28	1	1	NUM
alkej-146	187	29	)	)	PUNCT
alkej-146	187	30	.	.	PUNCT
alkej-146	188	1	table	table	NOUN
alkej-146	188	2	1	1	NUM
alkej-146	188	3	,	,	PUNCT
alkej-146	188	4	parameters	parameter	NOUN
alkej-146	188	5	of	of	ADP
alkej-146	188	6	ga	ga	PROPN
alkej-146	188	7	.	.	PROPN
alkej-146	188	8	ga	ga	PROPN
alkej-146	188	9	property	property	NOUN
alkej-146	188	10	value	value	NOUN
alkej-146	188	11	/	/	SYM
alkej-146	188	12	method	method	NOUN
alkej-146	188	13	population	population	NOUN
alkej-146	188	14	size	size	NOUN
alkej-146	188	15	10	10	NUM
alkej-146	188	16	maximum	maximum	ADJ
alkej-146	188	17	number	number	NOUN
alkej-146	188	18	of	of	ADP
alkej-146	188	19	generations	generation	NOUN
alkej-146	188	20	10	10	NUM
alkej-146	188	21	the	the	DET
alkej-146	188	22	range	range	NOUN
alkej-146	188	23	of	of	ADP
alkej-146	188	24	tuning	tune	VERB
alkej-146	188	25	parameters	parameter	NOUN
alkej-146	188	26	4	4	NUM
alkej-146	188	27	-	-	SYM
alkej-146	188	28	4.5	4.5	NUM
alkej-146	188	29	221230	221230	NUM
alkej-146	188	30	0.0080.0085	0.0080.0085	PRON
alkej-146	188	31	performance	performance	NOUN
alkej-146	188	32	index	index	NOUN
alkej-146	188	33	/	/	SYM
alkej-146	188	34	fitness	fitness	NOUN
alkej-146	188	35	function	function	PROPN
alkej-146	188	36	itae	itae	PROPN
alkej-146	188	37	selection	selection	NOUN
alkej-146	188	38	method	method	NOUN
alkej-146	188	39	roulette	roulette	NOUN
alkej-146	188	40	wheel	wheel	NOUN
alkej-146	188	41	crossover	crossover	ADP
alkej-146	188	42	method	method	NOUN
alkej-146	188	43	arithmetic	arithmetic	ADJ
alkej-146	188	44	crossover	crossover	NOUN
alkej-146	188	45	crossover	crossover	ADP
alkej-146	188	46	probability	probability	NOUN
alkej-146	188	47	0.8	0.8	NUM
alkej-146	188	48	mutation	mutation	NOUN
alkej-146	188	49	method	method	NOUN
alkej-146	188	50	uniform	uniform	ADJ
alkej-146	188	51	mutation	mutation	NOUN
alkej-146	188	52	probability	probability	NOUN
alkej-146	188	53	0.05	0.05	NUM
alkej-146	188	54	termination	termination	NOUN
alkej-146	188	55	condition	condition	NOUN
alkej-146	188	56	for	for	ADP
alkej-146	188	57	ga	ga	PROPN
alkej-146	188	58	maximum	maximum	ADJ
alkej-146	188	59	number	number	NOUN
alkej-146	188	60	of	of	ADP
alkej-146	188	61	generation	generation	NOUN
alkej-146	188	62	is	be	AUX
alkej-146	188	63	achieved	achieve	VERB
alkej-146	188	64	or	or	CCONJ
alkej-146	188	65	the	the	DET
alkej-146	188	66	value	value	NOUN
alkej-146	188	67	of	of	ADP
alkej-146	188	68	fitness	fitness	NOUN
alkej-146	188	69	is	be	AUX
alkej-146	188	70	fixed	fix	VERB
alkej-146	188	71	for	for	ADP
alkej-146	188	72	next	next	ADJ
alkej-146	188	73	generations	generation	NOUN
alkej-146	188	74	7.1	7.1	NUM
alkej-146	188	75	.	.	PUNCT
alkej-146	189	1	simulation	simulation	NOUN
alkej-146	189	2	and	and	CCONJ
alkej-146	189	3	analysis	analysis	NOUN
alkej-146	189	4	of	of	ADP
alkej-146	189	5	results	result	NOUN
alkej-146	189	6	after	after	ADP
alkej-146	189	7	giving	give	VERB
alkej-146	189	8	the	the	DET
alkej-146	189	9	above	above	ADJ
alkej-146	189	10	parameters	parameter	NOUN
alkej-146	189	11	to	to	ADP
alkej-146	189	12	ga	ga	PROPN
alkej-146	189	13	,	,	PUNCT
alkej-146	189	14	the	the	DET
alkej-146	189	15	pid	pid	NOUN
alkej-146	189	16	controllers	controller	NOUN
alkej-146	189	17	can	can	AUX
alkej-146	189	18	be	be	AUX
alkej-146	189	19	easily	easily	ADV
alkej-146	189	20	tuned	tune	VERB
alkej-146	189	21	,	,	PUNCT
alkej-146	189	22	the	the	DET
alkej-146	189	23	proper	proper	ADJ
alkej-146	189	24	optimized	optimize	VERB
alkej-146	189	25	gain	gain	NOUN
alkej-146	189	26	values	value	NOUN
alkej-146	189	27	of	of	ADP
alkej-146	189	28	controller	controller	NOUN
alkej-146	189	29	are	be	AUX
alkej-146	189	30	obtained	obtain	VERB
alkej-146	189	31	with	with	ADP
alkej-146	189	32	the	the	DET
alkej-146	189	33	implementation	implementation	NOUN
alkej-146	189	34	of	of	ADP
alkej-146	189	35	ga	ga	PROPN
alkej-146	189	36	based	base	VERB
alkej-146	189	37	pid	pid	NOUN
alkej-146	189	38	controller	controller	NOUN
alkej-146	189	39	given	give	VERB
alkej-146	189	40	in	in	ADP
alkej-146	189	41	table	table	NOUN
alkej-146	189	42	(	(	PUNCT
alkej-146	189	43	2	2	NUM
alkej-146	189	44	)	)	PUNCT
alkej-146	189	45	.	.	PUNCT
alkej-146	190	1	table	table	NOUN
alkej-146	190	2	2	2	NUM
alkej-146	190	3	,	,	PUNCT
alkej-146	190	4	ga	ga	PROPN
alkej-146	190	5	based	base	VERB
alkej-146	190	6	pid	pid	NOUN
alkej-146	190	7	controller	controller	NOUN
alkej-146	190	8	gain	gain	VERB
alkej-146	190	9	values	value	NOUN
alkej-146	190	10	.	.	PUNCT
alkej-146	191	1	gain	gain	VERB
alkej-146	191	2	parameters	parameter	NOUN
alkej-146	191	3	values	value	NOUN
alkej-146	191	4	4.04877	4.04877	NUM
alkej-146	191	5	222.27698	222.27698	NUM
alkej-146	191	6	0.0084	0.0084	NUM
alkej-146	191	7	to	to	PART
alkej-146	191	8	show	show	VERB
alkej-146	191	9	the	the	DET
alkej-146	191	10	performance	performance	NOUN
alkej-146	191	11	of	of	ADP
alkej-146	191	12	the	the	DET
alkej-146	191	13	control	control	NOUN
alkej-146	191	14	system	system	NOUN
alkej-146	191	15	,	,	PUNCT
alkej-146	191	16	simulation	simulation	NOUN
alkej-146	191	17	time	time	NOUN
alkej-146	191	18	responses	response	NOUN
alkej-146	191	19	from	from	ADP
alkej-146	191	20	the	the	DET
alkej-146	191	21	piezoelectric	piezoelectric	NOUN
alkej-146	191	22	micropositioner	micropositioner	ADV
alkej-146	191	23	with	with	ADP
alkej-146	191	24	the	the	DET
alkej-146	191	25	proposed	propose	VERB
alkej-146	191	26	genetic	genetic	ADJ
alkej-146	191	27	pid	pid	NOUN
alkej-146	191	28	controller	controller	NOUN
alkej-146	191	29	are	be	AUX
alkej-146	191	30	carried	carry	VERB
alkej-146	191	31	out	out	ADP
alkej-146	191	32	with	with	ADP
alkej-146	191	33	matlab	matlab	PROPN
alkej-146	191	34	-	-	PUNCT
alkej-146	191	35	simulink	simulink	PROPN
alkej-146	191	36	(	(	PUNCT
alkej-146	191	37	r2009a	r2009a	NOUN
alkej-146	191	38	)	)	PUNCT
alkej-146	191	39	package	package	NOUN
alkej-146	191	40	.	.	PUNCT
alkej-146	192	1	7.1.1	7.1.1	X
alkej-146	192	2	.	.	PUNCT
alkej-146	192	3	single	single	ADJ
alkej-146	192	4	-	-	PUNCT
alkej-146	192	5	axis	axis	NOUN
alkej-146	192	6	simulation	simulation	NOUN
alkej-146	192	7	results	result	VERB
alkej-146	192	8	the	the	DET
alkej-146	192	9	single	single	ADJ
alkej-146	192	10	-	-	PUNCT
alkej-146	192	11	axis	axis	NOUN
alkej-146	192	12	(	(	PUNCT
alkej-146	192	13	either	either	CCONJ
alkej-146	192	14	x	x	SYM
alkej-146	192	15	or	or	CCONJ
alkej-146	192	16	y	y	PROPN
alkej-146	192	17	direction	direction	NOUN
alkej-146	192	18	)	)	PUNCT
alkej-146	192	19	piezoelectric	piezoelectric	NOUN
alkej-146	192	20	micropositioner	micropositioner	ADJ
alkej-146	192	21	stage	stage	NOUN
alkej-146	192	22	is	be	AUX
alkej-146	192	23	simulated	simulate	VERB
alkej-146	192	24	using	use	VERB
alkej-146	192	25	the	the	DET
alkej-146	192	26	gain	gain	NOUN
alkej-146	192	27	parameter	parameter	NOUN
alkej-146	192	28	values	value	NOUN
alkej-146	192	29	taken	take	VERB
alkej-146	192	30	from	from	ADP
alkej-146	192	31	table	table	NOUN
alkej-146	192	32	(	(	PUNCT
alkej-146	192	33	2	2	NUM
alkej-146	192	34	)	)	PUNCT
alkej-146	192	35	with	with	ADP
alkej-146	192	36	the	the	DET
alkej-146	192	37	following	follow	VERB
alkej-146	192	38	desired	desire	VERB
alkej-146	192	39	test	test	NOUN
alkej-146	192	40	signals	signal	NOUN
alkej-146	192	41	:	:	PUNCT
alkej-146	192	42	test	test	NOUN
alkej-146	192	43	signal1	signal1	ADJ
alkej-146	192	44	:	:	PUNCT
alkej-146	192	45	step	step	NOUN
alkej-146	192	46	function	function	NOUN
alkej-146	192	47	with	with	ADP
alkej-146	192	48	magnitude=1	magnitude=1	PROPN
alkej-146	192	49	μm	μm	NUM
alkej-146	192	50	test	test	NOUN
alkej-146	192	51	signal2	signal2	NOUN
alkej-146	192	52	:	:	PUNCT
alkej-146	192	53	sinusoidal	sinusoidal	NOUN
alkej-146	192	54	function	function	NOUN
alkej-146	192	55	=	=	PUNCT
alkej-146	192	56	asin(10	asin(10	NOUN
alkej-146	192	57	t	t	PROPN
alkej-146	192	58	)	)	PUNCT
alkej-146	192	59	,	,	PUNCT
alkej-146	192	60	where	where	SCONJ
alkej-146	192	61	the	the	DET
alkej-146	192	62	amplitude	amplitude	NOUN
alkej-146	192	63	a	a	PRON
alkej-146	192	64	is	be	AUX
alkej-146	192	65	1	1	NUM
alkej-146	192	66	μm	μm	NUM
alkej-146	192	67	.	.	PUNCT
alkej-146	193	1	test	test	NOUN
alkej-146	193	2	signal3	signal3	PROPN
alkej-146	193	3	:	:	PUNCT
alkej-146	193	4	square	square	ADJ
alkej-146	193	5	function	function	NOUN
alkej-146	193	6	with	with	ADP
alkej-146	193	7	amplitude	amplitude	NOUN
alkej-146	193	8	equal	equal	ADJ
alkej-146	193	9	to	to	ADP
alkej-146	193	10	1	1	NUM
alkej-146	193	11	μm	μm	NUM
alkej-146	193	12	and	and	CCONJ
alkej-146	193	13	frequency	frequency	NOUN
alkej-146	193	14	equal	equal	ADJ
alkej-146	193	15	to	to	ADP
alkej-146	193	16	10	10	NUM
alkej-146	193	17	⁄	⁄	PROPN
alkej-146	193	18	.	.	PUNCT
alkej-146	194	1	the	the	DET
alkej-146	194	2	simulation	simulation	NOUN
alkej-146	194	3	results	result	NOUN
alkej-146	194	4	of	of	ADP
alkej-146	194	5	the	the	DET
alkej-146	194	6	single	single	ADJ
alkej-146	194	7	-	-	PUNCT
alkej-146	194	8	axis	axis	NOUN
alkej-146	194	9	piezoelectric	piezoelectric	NOUN
alkej-146	194	10	micropositioner	micropositioner	ADJ
alkej-146	194	11	stage	stage	NOUN
alkej-146	194	12	are	be	AUX
alkej-146	194	13	shown	show	VERB
alkej-146	194	14	in	in	ADP
alkej-146	194	15	fig	fig	NOUN
alkej-146	194	16	.	.	PUNCT
alkej-146	195	1	(	(	PUNCT
alkej-146	195	2	11	11	NUM
alkej-146	195	3	-	-	PUNCT
alkej-146	195	4	a	a	NOUN
alkej-146	195	5	)	)	PUNCT
alkej-146	195	6	for	for	ADP
alkej-146	195	7	the	the	DET
alkej-146	195	8	test	test	NOUN
alkej-146	195	9	signal1	signal1	PROPN
alkej-146	195	10	,	,	PUNCT
alkej-146	195	11	while	while	SCONJ
alkej-146	195	12	the	the	DET
alkej-146	195	13	control	control	NOUN
alkej-146	195	14	action	action	NOUN
alkej-146	195	15	is	be	AUX
alkej-146	195	16	shown	show	VERB
alkej-146	195	17	in	in	ADP
alkej-146	195	18	fig	fig	NOUN
alkej-146	195	19	.	.	PUNCT
alkej-146	196	1	(	(	PUNCT
alkej-146	196	2	11	11	NUM
alkej-146	196	3	-	-	PUNCT
alkej-146	196	4	b	b	NOUN
alkej-146	196	5	)	)	PUNCT
alkej-146	196	6	.	.	PUNCT
alkej-146	197	1	it	it	PRON
alkej-146	197	2	can	can	AUX
alkej-146	197	3	be	be	AUX
alkej-146	197	4	noticed	notice	VERB
alkej-146	197	5	that	that	SCONJ
alkej-146	197	6	the	the	DET
alkej-146	197	7	system	system	NOUN
alkej-146	197	8	succeed	succeed	VERB
alkej-146	197	9	to	to	PART
alkej-146	197	10	reach	reach	VERB
alkej-146	197	11	to	to	ADP
alkej-146	197	12	its	its	PRON
alkej-146	197	13	desired	desire	VERB
alkej-146	197	14	position	position	NOUN
alkej-146	197	15	in	in	ADP
alkej-146	197	16	less	less	ADJ
alkej-146	197	17	than	than	ADP
alkej-146	197	18	(	(	PUNCT
alkej-146	197	19	0.015	0.015	NUM
alkej-146	197	20	sec	sec	PROPN
alkej-146	197	21	)	)	PUNCT
alkej-146	197	22	with	with	ADP
alkej-146	197	23	a	a	DET
alkej-146	197	24	smooth	smooth	ADJ
alkej-146	197	25	behavior	behavior	NOUN
alkej-146	197	26	.	.	PUNCT
alkej-146	198	1	for	for	ADP
alkej-146	198	2	further	further	ADJ
alkej-146	198	3	confirmation	confirmation	NOUN
alkej-146	198	4	,	,	PUNCT
alkej-146	198	5	the	the	DET
alkej-146	198	6	validity	validity	NOUN
alkej-146	198	7	of	of	ADP
alkej-146	198	8	the	the	DET
alkej-146	198	9	control	control	NOUN
alkej-146	198	10	system	system	NOUN
alkej-146	198	11	in	in	ADP
alkej-146	198	12	many	many	ADJ
alkej-146	198	13	practical	practical	ADJ
alkej-146	198	14	applications	application	NOUN
alkej-146	198	15	,	,	PUNCT
alkej-146	198	16	the	the	DET
alkej-146	198	17	time	time	NOUN
alkej-146	198	18	responses	response	VERB
alkej-146	198	19	to	to	ADP
alkej-146	198	20	commanded	commanded	ADJ
alkej-146	198	21	sinusoidal	sinusoidal	NOUN
alkej-146	198	22	and	and	CCONJ
alkej-146	198	23	square	square	ADJ
alkej-146	198	24	trajectories	trajectory	NOUN
alkej-146	198	25	(	(	PUNCT
alkej-146	198	26	test	test	NOUN
alkej-146	198	27	signal	signal	NOUN
alkej-146	198	28	2	2	NUM
alkej-146	198	29	&	&	CCONJ
alkej-146	198	30	3	3	NUM
alkej-146	198	31	)	)	PUNCT
alkej-146	198	32	with	with	ADP
alkej-146	198	33	amplitude	amplitude	NOUN
alkej-146	198	34	1	1	NUM
alkej-146	198	35	μm	μm	NOUN
alkej-146	198	36	are	be	AUX
alkej-146	198	37	obtained	obtain	VERB
alkej-146	198	38	.	.	PUNCT
alkej-146	199	1	for	for	ADP
alkej-146	199	2	the	the	DET
alkej-146	199	3	test	test	NOUN
alkej-146	199	4	signal2	signal2	PROPN
alkej-146	199	5	,	,	PUNCT
alkej-146	199	6	the	the	DET
alkej-146	199	7	simulation	simulation	NOUN
alkej-146	199	8	results	result	NOUN
alkej-146	199	9	of	of	ADP
alkej-146	199	10	the	the	DET
alkej-146	199	11	single	single	ADJ
alkej-146	199	12	-	-	PUNCT
alkej-146	199	13	axis	axis	NOUN
alkej-146	199	14	piezoelectric	piezoelectric	NOUN
alkej-146	199	15	micropositioner	micropositioner	ADJ
alkej-146	199	16	stage	stage	NOUN
alkej-146	199	17	are	be	AUX
alkej-146	199	18	shown	show	VERB
alkej-146	199	19	in	in	ADP
alkej-146	199	20	fig	fig	NOUN
alkej-146	199	21	.	.	PUNCT
alkej-146	200	1	(	(	PUNCT
alkej-146	200	2	12	12	NUM
alkej-146	200	3	-	-	PUNCT
alkej-146	200	4	a	a	NOUN
alkej-146	200	5	)	)	PUNCT
alkej-146	200	6	.	.	PUNCT
alkej-146	201	1	it	it	PRON
alkej-146	201	2	is	be	AUX
alkej-146	201	3	very	very	ADV
alkej-146	201	4	clear	clear	ADJ
alkej-146	201	5	that	that	SCONJ
alkej-146	201	6	the	the	DET
alkej-146	201	7	proposed	propose	VERB
alkej-146	201	8	genetic	genetic	ADJ
alkej-146	201	9	pid	pid	NOUN
alkej-146	201	10	controller	controller	NOUN
alkej-146	201	11	is	be	AUX
alkej-146	201	12	able	able	ADJ
alkej-146	201	13	to	to	PART
alkej-146	201	14	track	track	VERB
alkej-146	201	15	the	the	DET
alkej-146	201	16	desired	desire	VERB
alkej-146	201	17	sinusoidal	sinusoidal	NOUN
alkej-146	201	18	reference	reference	NOUN
alkej-146	201	19	efficiently	efficiently	ADV
alkej-146	201	20	.	.	PUNCT
alkej-146	202	1	the	the	DET
alkej-146	202	2	control	control	NOUN
alkej-146	202	3	action	action	NOUN
alkej-146	202	4	is	be	AUX
alkej-146	202	5	shown	show	VERB
alkej-146	202	6	in	in	ADP
alkej-146	202	7	fig	fig	NOUN
alkej-146	202	8	.	.	PUNCT
alkej-146	203	1	(	(	PUNCT
alkej-146	203	2	12.b	12.b	NUM
alkej-146	203	3	)	)	PUNCT
alkej-146	203	4	.	.	PUNCT
alkej-146	204	1	for	for	ADP
alkej-146	204	2	the	the	DET
alkej-146	204	3	test	test	NOUN
alkej-146	204	4	signal	signal	NOUN
alkej-146	204	5	3	3	NUM
alkej-146	204	6	it	it	PRON
alkej-146	204	7	is	be	AUX
alkej-146	204	8	noticed	notice	VERB
alkej-146	204	9	in	in	ADP
alkej-146	204	10	fig	fig	NOUN
alkej-146	204	11	.	.	PUNCT
alkej-146	205	1	(	(	PUNCT
alkej-146	205	2	13	13	NUM
alkej-146	205	3	-	-	PUNCT
alkej-146	205	4	a	a	NOUN
alkej-146	205	5	)	)	PUNCT
alkej-146	205	6	that	that	SCONJ
alkej-146	205	7	the	the	DET
alkej-146	205	8	pid	pid	NOUN
alkej-146	205	9	based	base	VERB
alkej-146	205	10	ga	ga	PROPN
alkej-146	205	11	controller	controller	NOUN
alkej-146	205	12	is	be	AUX
alkej-146	205	13	also	also	ADV
alkej-146	205	14	able	able	ADJ
alkej-146	205	15	to	to	PART
alkej-146	205	16	track	track	VERB
alkej-146	205	17	the	the	DET
alkej-146	205	18	reference	reference	NOUN
alkej-146	205	19	signal	signal	NOUN
alkej-146	205	20	also	also	ADV
alkej-146	205	21	with	with	ADP
alkej-146	205	22	efficient	efficient	ADJ
alkej-146	205	23	manner	manner	NOUN
alkej-146	205	24	.	.	PUNCT
alkej-146	206	1	the	the	DET
alkej-146	206	2	control	control	NOUN
alkej-146	206	3	action	action	NOUN
alkej-146	206	4	for	for	ADP
alkej-146	206	5	yasir	yasir	PROPN
alkej-146	206	6	khudhair	khudhair	PROPN
alkej-146	206	7	abbas	abbas	PROPN
alkej-146	206	8	al	al	PROPN
alkej-146	206	9	-	-	PUNCT
alkej-146	206	10	khwarizmi	khwarizmi	PROPN
alkej-146	206	11	engineering	engineering	NOUN
alkej-146	206	12	journal	journal	PROPN
alkej-146	206	13	,	,	PUNCT
alkej-146	206	14	vol	vol	NOUN
alkej-146	206	15	.	.	PROPN
alkej-146	206	16	8	8	NUM
alkej-146	206	17	,	,	PUNCT
alkej-146	206	18	no.4	no.4	PROPN
alkej-146	206	19	,	,	PUNCT
alkej-146	206	20	pp40	pp40	PROPN
alkej-146	206	21	-52	-52	PROPN
alkej-146	206	22	(	(	PUNCT
alkej-146	206	23	2012	2012	NUM
alkej-146	206	24	)	)	PUNCT
alkej-146	206	25	47	47	NUM
alkej-146	206	26	the	the	DET
alkej-146	206	27	pid	pid	NOUN
alkej-146	206	28	based	base	VERB
alkej-146	206	29	ga	ga	PROPN
alkej-146	206	30	controller	controller	NOUN
alkej-146	206	31	under	under	ADP
alkej-146	206	32	test	test	NOUN
alkej-146	206	33	signal	signal	NOUN
alkej-146	206	34	3	3	NUM
alkej-146	206	35	can	can	AUX
alkej-146	206	36	be	be	AUX
alkej-146	206	37	seen	see	VERB
alkej-146	206	38	in	in	ADP
alkej-146	206	39	fig	fig	NOUN
alkej-146	206	40	.	.	PUNCT
alkej-146	207	1	(	(	PUNCT
alkej-146	207	2	13	13	NUM
alkej-146	207	3	-	-	PUNCT
alkej-146	207	4	b	b	NOUN
alkej-146	207	5	)	)	PUNCT
alkej-146	207	6	.	.	PUNCT
alkej-146	208	1	7.1.2	7.1.2	X
alkej-146	208	2	.	.	X
alkej-146	208	3	double	double	ADJ
alkej-146	208	4	-	-	PUNCT
alkej-146	208	5	axis	axis	NOUN
alkej-146	208	6	simulation	simulation	NOUN
alkej-146	208	7	results	result	VERB
alkej-146	208	8	in	in	ADP
alkej-146	208	9	order	order	NOUN
alkej-146	208	10	to	to	PART
alkej-146	208	11	obtain	obtain	VERB
alkej-146	208	12	a	a	DET
alkej-146	208	13	circle	circle	NOUN
alkej-146	208	14	-	-	PUNCT
alkej-146	208	15	shaped	shape	VERB
alkej-146	208	16	trajectory	trajectory	NOUN
alkej-146	208	17	for	for	ADP
alkej-146	208	18	the	the	DET
alkej-146	208	19	double	double	ADJ
alkej-146	208	20	-	-	PUNCT
alkej-146	208	21	axis	axis	NOUN
alkej-146	208	22	piezoelectric	piezoelectric	NOUN
alkej-146	208	23	micropositioner	micropositioner	ADJ
alkej-146	208	24	stage	stage	NOUN
alkej-146	208	25	,	,	PUNCT
alkej-146	208	26	the	the	DET
alkej-146	208	27	following	follow	VERB
alkej-146	208	28	desired	desire	VERB
alkej-146	208	29	references	reference	NOUN
alkej-146	208	30	for	for	ADP
alkej-146	208	31	both	both	DET
alkej-146	208	32	x	x	SYM
alkej-146	208	33	and	and	CCONJ
alkej-146	208	34	y	y	NOUN
alkej-146	208	35	-	-	PUNCT
alkej-146	208	36	axis	axis	NOUN
alkej-146	208	37	are	be	AUX
alkej-146	208	38	chosen	choose	VERB
alkej-146	208	39	to	to	PART
alkej-146	208	40	be	be	AUX
alkej-146	208	41	:	:	PUNCT
alkej-146	208	42	x−	x−	PROPN
alkej-146	208	43	axis	axis	PROPN
alkej-146	208	44	ref	ref	NOUN
alkej-146	208	45	=	=	PUNCT
alkej-146	208	46	a	a	DET
alkej-146	208	47	sin(10	sin(10	PROPN
alkej-146	208	48	t	t	PROPN
alkej-146	208	49	)	)	PUNCT
alkej-146	208	50	,	,	PUNCT
alkej-146	208	51	y−	y−	PROPN
alkej-146	208	52	axis	axis	NOUN
alkej-146	208	53	ref	ref	NOUN
alkej-146	208	54	=	=	PUNCT
alkej-146	208	55	a	a	DET
alkej-146	208	56	sin	sin	NOUN
alkej-146	208	57	10	10	NUM
alkej-146	208	58	t	t	NOUN
alkej-146	209	1	+	+	CCONJ
alkej-146	209	2	π	π	X
alkej-146	209	3	…	…	PUNCT
alkej-146	209	4	(	(	PUNCT
alkej-146	209	5	7	7	NUM
alkej-146	209	6	)	)	PUNCT
alkej-146	209	7	where	where	SCONJ
alkej-146	209	8	a	a	DET
alkej-146	209	9	=	=	SYM
alkej-146	209	10	1	1	NUM
alkej-146	209	11	μm	μm	NOUN
alkej-146	209	12	the	the	DET
alkej-146	209	13	time	time	NOUN
alkej-146	209	14	response	response	NOUN
alkej-146	209	15	of	of	ADP
alkej-146	209	16	the	the	DET
alkej-146	209	17	commanded	command	VERB
alkej-146	209	18	xand	xand	PROPN
alkej-146	209	19	y	y	ADJ
alkej-146	209	20	-	-	PUNCT
alkej-146	209	21	axis	axis	NOUN
alkej-146	209	22	stages	stage	NOUN
alkej-146	209	23	are	be	AUX
alkej-146	209	24	shown	show	VERB
alkej-146	209	25	in	in	ADP
alkej-146	209	26	fig	fig	NOUN
alkej-146	209	27	.	.	PUNCT
alkej-146	210	1	(	(	PUNCT
alkej-146	210	2	14	14	NUM
alkej-146	210	3	-	-	PUNCT
alkej-146	210	4	a	a	NOUN
alkej-146	210	5	)	)	PUNCT
alkej-146	210	6	and	and	CCONJ
alkej-146	210	7	fig	fig	NOUN
alkej-146	210	8	.	.	PUNCT
alkej-146	211	1	(	(	PUNCT
alkej-146	211	2	14	14	NUM
alkej-146	211	3	-	-	SYM
alkej-146	211	4	b	b	NOUN
alkej-146	211	5	)	)	PUNCT
alkej-146	211	6	,	,	PUNCT
alkej-146	211	7	while	while	SCONJ
alkej-146	211	8	the	the	DET
alkej-146	211	9	control	control	NOUN
alkej-146	211	10	actions	action	NOUN
alkej-146	211	11	of	of	ADP
alkej-146	211	12	both	both	DET
alkej-146	211	13	xand	xand	CCONJ
alkej-146	211	14	y	y	ADJ
alkej-146	211	15	-	-	PUNCT
alkej-146	211	16	axis	axis	NOUN
alkej-146	211	17	stages	stage	NOUN
alkej-146	211	18	are	be	AUX
alkej-146	211	19	illustrated	illustrate	VERB
alkej-146	211	20	in	in	ADP
alkej-146	211	21	fig	fig	NOUN
alkej-146	211	22	.	.	PUNCT
alkej-146	212	1	(	(	PUNCT
alkej-146	212	2	14	14	NUM
alkej-146	212	3	-	-	SYM
alkej-146	212	4	c	c	NOUN
alkej-146	212	5	)	)	PUNCT
alkej-146	212	6	.	.	PUNCT
alkej-146	213	1	the	the	DET
alkej-146	213	2	efficient	efficient	ADJ
alkej-146	213	3	tracking	tracking	NOUN
alkej-146	213	4	of	of	ADP
alkej-146	213	5	both	both	DET
alkej-146	213	6	stages	stage	NOUN
alkej-146	213	7	to	to	ADP
alkej-146	213	8	the	the	DET
alkej-146	213	9	desired	desire	VERB
alkej-146	213	10	references	reference	NOUN
alkej-146	213	11	is	be	AUX
alkej-146	213	12	an	an	DET
alkej-146	213	13	evident	evident	NOUN
alkej-146	213	14	to	to	ADP
alkej-146	213	15	the	the	DET
alkej-146	213	16	potential	potential	NOUN
alkej-146	213	17	of	of	ADP
alkej-146	213	18	the	the	DET
alkej-146	213	19	designed	design	VERB
alkej-146	213	20	optimal	optimal	ADJ
alkej-146	213	21	pid	pid	NOUN
alkej-146	213	22	based	base	VERB
alkej-146	213	23	ga	ga	PROPN
alkej-146	213	24	controller	controller	NOUN
alkej-146	213	25	.	.	PUNCT
alkej-146	214	1	the	the	DET
alkej-146	214	2	circular	circular	ADV
alkej-146	214	3	-	-	PUNCT
alkej-146	214	4	shaped	shape	VERB
alkej-146	214	5	trajectory	trajectory	NOUN
alkej-146	214	6	is	be	AUX
alkej-146	214	7	shown	show	VERB
alkej-146	214	8	in	in	ADP
alkej-146	214	9	fig	fig	NOUN
alkej-146	214	10	.	.	PUNCT
alkej-146	215	1	(	(	PUNCT
alkej-146	215	2	15	15	NUM
alkej-146	215	3	)	)	PUNCT
alkej-146	215	4	,	,	PUNCT
alkej-146	215	5	where	where	SCONJ
alkej-146	215	6	the	the	DET
alkej-146	215	7	piezoelectric	piezoelectric	NOUN
alkej-146	215	8	micropositioner	micropositioner	ADV
alkej-146	215	9	is	be	AUX
alkej-146	215	10	able	able	ADJ
alkej-146	215	11	to	to	PART
alkej-146	215	12	track	track	VERB
alkej-146	215	13	a	a	DET
alkej-146	215	14	circle	circle	NOUN
alkej-146	215	15	trajectory	trajectory	NOUN
alkej-146	215	16	with	with	ADP
alkej-146	215	17	1	1	NUM
alkej-146	215	18	μm	μm	NUM
alkej-146	215	19	radius	radius	NOUN
alkej-146	215	20	.	.	PUNCT
alkej-146	216	1	fig	fig	NOUN
alkej-146	216	2	.	.	PUNCT
alkej-146	217	1	10	10	NUM
alkej-146	217	2	.	.	PUNCT
alkej-146	218	1	block	block	NOUN
alkej-146	218	2	diagram	diagram	NOUN
alkej-146	218	3	of	of	ADP
alkej-146	218	4	the	the	DET
alkej-146	218	5	entire	entire	ADJ
alkej-146	218	6	piezoelectric	piezoelectric	NOUN
alkej-146	218	7	micropositioner	micropositioner	ADJ
alkej-146	218	8	system	system	NOUN
alkej-146	218	9	.	.	PUNCT
alkej-146	219	1	fig	fig	NOUN
alkej-146	219	2	.	.	PUNCT
alkej-146	220	1	11	11	NUM
alkej-146	220	2	.	.	PUNCT
alkej-146	221	1	simulation	simulation	NOUN
alkej-146	221	2	results	result	VERB
alkej-146	221	3	with	with	ADP
alkej-146	221	4	test	test	NOUN
alkej-146	221	5	signal	signal	NOUN
alkej-146	221	6	1	1	NUM
alkej-146	221	7	of	of	ADP
alkej-146	221	8	single	single	ADJ
alkej-146	221	9	-	-	PUNCT
alkej-146	221	10	axis	axis	NOUN
alkej-146	221	11	piezoelectric	piezoelectric	NOUN
alkej-146	221	12	micropositioner	micropositioner	ADJ
alkej-146	221	13	stage	stage	NOUN
alkej-146	221	14	position	position	NOUN
alkej-146	221	15	.	.	PUNCT
alkej-146	222	1	atimeresponse	atimeresponse	ADJ
alkej-146	222	2	.	.	PUNCT
alkej-146	223	1	bcontrol	bcontrol	PROPN
alkej-146	223	2	action	action	NOUN
alkej-146	223	3	.	.	PUNCT
alkej-146	224	1	(	(	PUNCT
alkej-146	224	2	)	)	PUNCT
alkej-146	224	3	ga	ga	PROPN
alkej-146	224	4	based	base	VERB
alkej-146	224	5	pid	pid	NOUN
alkej-146	224	6	controller	controller	NOUN
alkej-146	224	7	(	(	PUNCT
alkej-146	224	8	)	)	PUNCT
alkej-146	224	9	piezoelectric	piezoelectric	ADJ
alkej-146	224	10	micropositioner	micropositioner	ADJ
alkej-146	224	11	system	system	NOUN
alkej-146	224	12	reference	reference	NOUN
alkej-146	224	13	position	position	NOUN
alkej-146	224	14	output	output	NOUN
alkej-146	224	15	position	position	NOUN
alkej-146	224	16	yasir	yasir	PROPN
alkej-146	224	17	khudhair	khudhair	PROPN
alkej-146	224	18	abbas	abbas	PROPN
alkej-146	224	19	al	al	PROPN
alkej-146	224	20	-	-	PUNCT
alkej-146	224	21	khwarizmi	khwarizmi	PROPN
alkej-146	224	22	engineering	engineering	NOUN
alkej-146	224	23	journal	journal	PROPN
alkej-146	224	24	,	,	PUNCT
alkej-146	224	25	vol	vol	NOUN
alkej-146	224	26	.	.	PROPN
alkej-146	224	27	8	8	NUM
alkej-146	224	28	,	,	PUNCT
alkej-146	224	29	no.4	no.4	PROPN
alkej-146	224	30	,	,	PUNCT
alkej-146	224	31	pp40	pp40	PROPN
alkej-146	224	32	-52	-52	PROPN
alkej-146	224	33	(	(	PUNCT
alkej-146	224	34	2012	2012	NUM
alkej-146	224	35	)	)	PUNCT
alkej-146	224	36	48	48	NUM
alkej-146	224	37	fig	fig	NOUN
alkej-146	224	38	.	.	PUNCT
alkej-146	225	1	12	12	NUM
alkej-146	225	2	.	.	PUNCT
alkej-146	226	1	simulation	simulation	NOUN
alkej-146	226	2	results	result	VERB
alkej-146	226	3	with	with	ADP
alkej-146	226	4	test	test	NOUN
alkej-146	226	5	signal	signal	NOUN
alkej-146	226	6	2	2	NUM
alkej-146	226	7	of	of	ADP
alkej-146	226	8	single	single	ADJ
alkej-146	226	9	-	-	PUNCT
alkej-146	226	10	axis	axis	NOUN
alkej-146	226	11	piezoelectric	piezoelectric	NOUN
alkej-146	226	12	micropositioner	micropositioner	ADJ
alkej-146	226	13	stage	stage	NOUN
alkej-146	226	14	position	position	NOUN
alkej-146	226	15	.	.	PUNCT
alkej-146	227	1	atime	atime	ADJ
alkej-146	227	2	response	response	NOUN
alkej-146	227	3	.	.	PUNCT
alkej-146	228	1	bcontrol	bcontrol	PROPN
alkej-146	228	2	action	action	NOUN
alkej-146	228	3	.	.	PUNCT
alkej-146	229	1	fig	fig	NOUN
alkej-146	229	2	.	.	PUNCT
alkej-146	230	1	13	13	NUM
alkej-146	230	2	.	.	PUNCT
alkej-146	231	1	simulation	simulation	NOUN
alkej-146	231	2	results	result	VERB
alkej-146	231	3	with	with	ADP
alkej-146	231	4	test	test	NOUN
alkej-146	231	5	signal	signal	NOUN
alkej-146	231	6	3	3	NUM
alkej-146	231	7	of	of	ADP
alkej-146	231	8	single	single	ADJ
alkej-146	231	9	-	-	PUNCT
alkej-146	231	10	axis	axis	NOUN
alkej-146	231	11	piezoelectric	piezoelectric	NOUN
alkej-146	231	12	micropositioner	micropositioner	ADJ
alkej-146	231	13	stage	stage	NOUN
alkej-146	231	14	position	position	NOUN
alkej-146	231	15	.	.	PUNCT
alkej-146	232	1	atime	atime	ADJ
alkej-146	232	2	response	response	NOUN
alkej-146	232	3	.	.	PUNCT
alkej-146	233	1	bcontrol	bcontrol	PROPN
alkej-146	233	2	action	action	NOUN
alkej-146	233	3	.	.	PUNCT
alkej-146	234	1	yasir	yasir	PROPN
alkej-146	234	2	khudhair	khudhair	PROPN
alkej-146	234	3	abbas	abbas	PROPN
alkej-146	234	4	al	al	PROPN
alkej-146	234	5	-	-	PUNCT
alkej-146	234	6	khwarizmi	khwarizmi	PROPN
alkej-146	234	7	engineering	engineering	NOUN
alkej-146	234	8	journal	journal	PROPN
alkej-146	234	9	,	,	PUNCT
alkej-146	234	10	vol	vol	NOUN
alkej-146	234	11	.	.	PROPN
alkej-146	234	12	8	8	NUM
alkej-146	234	13	,	,	PUNCT
alkej-146	234	14	no.4	no.4	PROPN
alkej-146	234	15	,	,	PUNCT
alkej-146	234	16	pp40	pp40	PROPN
alkej-146	234	17	-52	-52	PROPN
alkej-146	234	18	(	(	PUNCT
alkej-146	234	19	2012	2012	NUM
alkej-146	234	20	)	)	PUNCT
alkej-146	234	21	49	49	NUM
alkej-146	234	22	fig	fig	NOUN
alkej-146	234	23	.	.	PUNCT
alkej-146	235	1	14	14	NUM
alkej-146	235	2	.	.	PUNCT
alkej-146	236	1	simulation	simulation	NOUN
alkej-146	236	2	results	result	VERB
alkej-146	236	3	with	with	ADP
alkej-146	236	4	sinusoidal	sinusoidal	ADJ
alkej-146	236	5	ref	ref	NOUN
alkej-146	236	6	.	.	PUNCT
alkej-146	237	1	inputs	input	NOUN
alkej-146	237	2	of	of	ADP
alkej-146	237	3	double	double	ADJ
alkej-146	237	4	-	-	PUNCT
alkej-146	237	5	axis	axis	NOUN
alkej-146	237	6	piezoelectric	piezoelectric	NOUN
alkej-146	237	7	micropositioner	micropositioner	ADJ
alkej-146	237	8	stage	stage	NOUN
alkej-146	237	9	position	position	NOUN
alkej-146	237	10	.	.	PUNCT
alkej-146	238	1	atime	atime	ADJ
alkej-146	238	2	response	response	NOUN
alkej-146	238	3	of	of	ADP
alkej-146	238	4	x	x	NOUN
alkej-146	238	5	-	-	NOUN
alkej-146	238	6	axis	axis	ADJ
alkej-146	238	7	.	.	PUNCT
alkej-146	239	1	btime	btime	ADJ
alkej-146	239	2	response	response	NOUN
alkej-146	239	3	of	of	ADP
alkej-146	239	4	y	y	NOUN
alkej-146	239	5	-	-	PUNCT
alkej-146	239	6	axis	axis	NOUN
alkej-146	239	7	.	.	PUNCT
alkej-146	240	1	cdouble	cdouble	ADJ
alkej-146	240	2	-	-	PUNCT
alkej-146	240	3	axis	axis	NOUN
alkej-146	240	4	control	control	NOUN
alkej-146	240	5	action	action	NOUN
alkej-146	240	6	.	.	PUNCT
alkej-146	241	1	fig	fig	NOUN
alkej-146	241	2	.	.	PUNCT
alkej-146	242	1	15.simulation	15.simulation	NUM
alkej-146	242	2	results	result	NOUN
alkej-146	242	3	of	of	ADP
alkej-146	242	4	piezoelectric	piezoelectric	NOUN
alkej-146	242	5	micropositioner	micropositioner	ADV
alkej-146	242	6	stage	stage	NOUN
alkej-146	242	7	circle	circle	NOUN
alkej-146	242	8	trajectory	trajectory	NOUN
alkej-146	242	9	.	.	PUNCT
alkej-146	243	1	yasir	yasir	PROPN
alkej-146	243	2	khudhair	khudhair	PROPN
alkej-146	243	3	abbas	abbas	PROPN
alkej-146	243	4	al	al	PROPN
alkej-146	243	5	-	-	PUNCT
alkej-146	243	6	khwarizmi	khwarizmi	PROPN
alkej-146	243	7	engineering	engineering	NOUN
alkej-146	243	8	journal	journal	PROPN
alkej-146	243	9	,	,	PUNCT
alkej-146	243	10	vol	vol	NOUN
alkej-146	243	11	.	.	PROPN
alkej-146	243	12	8	8	NUM
alkej-146	243	13	,	,	PUNCT
alkej-146	243	14	no.4	no.4	PROPN
alkej-146	243	15	,	,	PUNCT
alkej-146	243	16	pp40	pp40	PROPN
alkej-146	243	17	-52	-52	PROPN
alkej-146	243	18	(	(	PUNCT
alkej-146	243	19	2012	2012	NUM
alkej-146	243	20	)	)	PUNCT
alkej-146	243	21	50	50	NUM
alkej-146	243	22	8	8	NUM
alkej-146	243	23	.	.	PUNCT
alkej-146	244	1	conclusions	conclusion	NOUN
alkej-146	244	2	this	this	DET
alkej-146	244	3	paper	paper	NOUN
alkej-146	244	4	is	be	AUX
alkej-146	244	5	dedicated	dedicate	VERB
alkej-146	244	6	to	to	PART
alkej-146	244	7	design	design	VERB
alkej-146	244	8	a	a	DET
alkej-146	244	9	control	control	NOUN
alkej-146	244	10	system	system	NOUN
alkej-146	244	11	of	of	ADP
alkej-146	244	12	a	a	DET
alkej-146	244	13	piezoelectric	piezoelectric	NOUN
alkej-146	244	14	micropositioner	micropositioner	ADV
alkej-146	244	15	,	,	PUNCT
alkej-146	244	16	where	where	SCONJ
alkej-146	244	17	the	the	DET
alkej-146	244	18	control	control	NOUN
alkej-146	244	19	system	system	NOUN
alkej-146	244	20	was	be	AUX
alkej-146	244	21	developed	develop	VERB
alkej-146	244	22	with	with	ADP
alkej-146	244	23	the	the	DET
alkej-146	244	24	ga	ga	PROPN
alkej-146	244	25	pid	pid	NOUN
alkej-146	244	26	controller	controller	NOUN
alkej-146	244	27	.	.	PUNCT
alkej-146	245	1	the	the	DET
alkej-146	245	2	ga	ga	PROPN
alkej-146	245	3	is	be	AUX
alkej-146	245	4	used	use	VERB
alkej-146	245	5	to	to	PART
alkej-146	245	6	optimally	optimally	ADV
alkej-146	245	7	select	select	VERB
alkej-146	245	8	the	the	DET
alkej-146	245	9	best	good	ADJ
alkej-146	245	10	pid	pid	NOUN
alkej-146	245	11	parameters	parameter	NOUN
alkej-146	245	12	as	as	SCONJ
alkej-146	245	13	shown	show	VERB
alkej-146	245	14	in	in	ADP
alkej-146	245	15	table	table	NOUN
alkej-146	245	16	(	(	PUNCT
alkej-146	245	17	2	2	NUM
alkej-146	245	18	)	)	PUNCT
alkej-146	245	19	,	,	PUNCT
alkej-146	245	20	consequently	consequently	ADV
alkej-146	245	21	the	the	DET
alkej-146	245	22	system	system	NOUN
alkej-146	245	23	response	response	NOUN
alkej-146	245	24	is	be	AUX
alkej-146	245	25	enhanced	enhance	VERB
alkej-146	245	26	,	,	PUNCT
alkej-146	245	27	which	which	PRON
alkej-146	245	28	verify	verify	VERB
alkej-146	245	29	the	the	DET
alkej-146	245	30	efficiency	efficiency	NOUN
alkej-146	245	31	of	of	ADP
alkej-146	245	32	ga	ga	PROPN
alkej-146	245	33	as	as	ADP
alkej-146	245	34	suitable	suitable	ADJ
alkej-146	245	35	optimization	optimization	NOUN
alkej-146	245	36	method	method	NOUN
alkej-146	245	37	.	.	PUNCT
alkej-146	246	1	to	to	PART
alkej-146	246	2	design	design	VERB
alkej-146	246	3	the	the	DET
alkej-146	246	4	ga	ga	PROPN
alkej-146	246	5	pid	pid	PROPN
alkej-146	246	6	,	,	PUNCT
alkej-146	246	7	an	an	DET
alkej-146	246	8	approximated	approximate	VERB
alkej-146	246	9	linear	linear	ADJ
alkej-146	246	10	second	second	ADJ
alkej-146	246	11	-	-	PUNCT
alkej-146	246	12	order	order	NOUN
alkej-146	246	13	transfer	transfer	NOUN
alkej-146	246	14	function	function	NOUN
alkej-146	246	15	is	be	AUX
alkej-146	246	16	used	use	VERB
alkej-146	246	17	.	.	PUNCT
alkej-146	247	1	to	to	PART
alkej-146	247	2	confirm	confirm	VERB
alkej-146	247	3	the	the	DET
alkej-146	247	4	validity	validity	NOUN
alkej-146	247	5	of	of	ADP
alkej-146	247	6	the	the	DET
alkej-146	247	7	proposed	propose	VERB
alkej-146	247	8	control	control	NOUN
alkej-146	247	9	approach	approach	NOUN
alkej-146	247	10	,	,	PUNCT
alkej-146	247	11	a	a	DET
alkej-146	247	12	simulation	simulation	NOUN
alkej-146	247	13	program	program	NOUN
alkej-146	247	14	created	create	VERB
alkej-146	247	15	by	by	ADP
alkej-146	247	16	using	use	VERB
alkej-146	247	17	matlab	matlab	PROPN
alkej-146	247	18	package	package	NOUN
alkej-146	247	19	for	for	ADP
alkej-146	247	20	piezoelectric	piezoelectric	NOUN
alkej-146	247	21	micropositioner	micropositioner	ADV
alkej-146	247	22	with	with	ADP
alkej-146	247	23	ga	ga	PROPN
alkej-146	247	24	pid	pid	PROPN
alkej-146	247	25	was	be	AUX
alkej-146	247	26	carried	carry	VERB
alkej-146	247	27	out	out	ADP
alkej-146	247	28	.	.	PUNCT
alkej-146	248	1	finally	finally	ADV
alkej-146	248	2	,	,	PUNCT
alkej-146	248	3	the	the	DET
alkej-146	248	4	simulation	simulation	NOUN
alkej-146	248	5	results	result	VERB
alkej-146	248	6	illustrated	illustrate	VERB
alkej-146	248	7	the	the	DET
alkej-146	248	8	validity	validity	NOUN
alkej-146	248	9	of	of	ADP
alkej-146	248	10	the	the	DET
alkej-146	248	11	proposed	propose	VERB
alkej-146	248	12	control	control	NOUN
alkej-146	248	13	system	system	NOUN
alkej-146	248	14	for	for	ADP
alkej-146	248	15	practical	practical	ADJ
alkej-146	248	16	applications	application	NOUN
alkej-146	248	17	in	in	ADP
alkej-146	248	18	singleaxis	singleaxis	NOUN
alkej-146	248	19	trajectory	trajectory	NOUN
alkej-146	248	20	tracking	tracking	NOUN
alkej-146	248	21	and	and	CCONJ
alkej-146	248	22	double	double	ADJ
alkej-146	248	23	-	-	PUNCT
alkej-146	248	24	axis	axis	NOUN
alkej-146	248	25	scanning	scanning	NOUN
alkej-146	248	26	.	.	PUNCT
alkej-146	249	1	this	this	PRON
alkej-146	249	2	shows	show	VERB
alkej-146	249	3	that	that	SCONJ
alkej-146	249	4	the	the	DET
alkej-146	249	5	proposed	propose	VERB
alkej-146	249	6	control	control	NOUN
alkej-146	249	7	approach	approach	NOUN
alkej-146	249	8	is	be	AUX
alkej-146	249	9	perfectly	perfectly	ADV
alkej-146	249	10	applicable	applicable	ADJ
alkej-146	249	11	to	to	ADP
alkej-146	249	12	scanning	scan	VERB
alkej-146	249	13	application	application	NOUN
alkej-146	249	14	.	.	PUNCT
alkej-146	250	1	notations	notation	NOUN
alkej-146	250	2	(	(	PUNCT
alkej-146	250	3	):	):	PUNCT
alkej-146	250	4	output	output	NOUN
alkej-146	250	5	displacement	displacement	NOUN
alkej-146	250	6	.	.	PUNCT
alkej-146	251	1	(	(	PUNCT
alkej-146	251	2	):	):	PUNCT
alkej-146	251	3	input	input	NOUN
alkej-146	251	4	voltage	voltage	NOUN
alkej-146	251	5	.	.	PUNCT
alkej-146	252	1	:	:	PUNCT
alkej-146	252	2	displacement	displacement	ADJ
alkej-146	252	3	state	state	NOUN
alkej-146	252	4	variable	variable	NOUN
alkej-146	252	5	.	.	PUNCT
alkej-146	253	1	:	:	PUNCT
alkej-146	253	2	velocity	velocity	NOUN
alkej-146	253	3	state	state	NOUN
alkej-146	253	4	variable	variable	NOUN
alkej-146	253	5	.	.	PUNCT
alkej-146	254	1	,	,	PUNCT
alkej-146	254	2	,	,	PUNCT
alkej-146	254	3	piezoelectric	piezoelectric	ADJ
alkej-146	254	4	state	state	NOUN
alkej-146	254	5	space	space	NOUN
alkej-146	254	6	coefficient	coefficient	NOUN
alkej-146	254	7	matrices	matrix	NOUN
alkej-146	254	8	s	s	PART
alkej-146	254	9	:	:	PUNCT
alkej-146	254	10	controllability	controllability	NOUN
alkej-146	254	11	matrix	matrix	NOUN
alkej-146	254	12	.	.	PUNCT
alkej-146	255	1	:	:	PUNCT
alkej-146	255	2	absolute	absolute	ADJ
alkej-146	255	3	error	error	NOUN
alkej-146	255	4	criteria	criterion	NOUN
alkej-146	255	5	.	.	PUNCT
alkej-146	256	1	(	(	PUNCT
alkej-146	256	2	):	):	PUNCT
alkej-146	256	3	error	error	NOUN
alkej-146	256	4	function	function	NOUN
alkej-146	256	5	.	.	PUNCT
alkej-146	257	1	t	t	NOUN
alkej-146	257	2	:	:	PUNCT
alkej-146	257	3	final	final	ADJ
alkej-146	257	4	time	time	NOUN
alkej-146	257	5	of	of	ADP
alkej-146	257	6	simulation	simulation	NOUN
alkej-146	257	7	.	.	PUNCT
alkej-146	258	1	proportional	proportional	ADJ
alkej-146	258	2	gain	gain	NOUN
alkej-146	258	3	.	.	PUNCT
alkej-146	259	1	integral	integral	ADJ
alkej-146	259	2	gain	gain	NOUN
alkej-146	259	3	.	.	PUNCT
alkej-146	260	1	derivative	derivative	ADJ
alkej-146	260	2	gain	gain	NOUN
alkej-146	260	3	.	.	PUNCT
alkej-146	261	1	9	9	X
alkej-146	261	2	.	.	NUM
alkej-146	261	3	references	reference	NOUN
alkej-146	261	4	[	[	X
alkej-146	261	5	1	1	NUM
alkej-146	261	6	]	]	PUNCT
alkej-146	261	7	h.-j	h.-j	PROPN
alkej-146	261	8	.	.	PUNCT
alkej-146	261	9	shieh	shieh	PROPN
alkej-146	261	10	,	,	PUNCT
alkej-146	261	11	f.-j	f.-j	PROPN
alkej-146	261	12	.	.	PUNCT
alkej-146	262	1	lin	lin	PROPN
alkej-146	262	2	,	,	PUNCT
alkej-146	262	3	p.-k	p.-k	PROPN
alkej-146	262	4	.	.	PUNCT
alkej-146	263	1	huang	huang	PROPN
alkej-146	263	2	and	and	CCONJ
alkej-146	263	3	l.-t	l.-t	PROPN
alkej-146	263	4	.	.	PUNCT
alkej-146	264	1	teng	teng	PROPN
alkej-146	264	2	,	,	PUNCT
alkej-146	264	3	“	"	PUNCT
alkej-146	264	4	adaptive	adaptive	ADJ
alkej-146	264	5	tracking	tracking	NOUN
alkej-146	264	6	control	control	NOUN
alkej-146	264	7	solely	solely	ADV
alkej-146	264	8	using	use	VERB
alkej-146	264	9	displacement	displacement	ADJ
alkej-146	264	10	feedback	feedback	NOUN
alkej-146	264	11	for	for	ADP
alkej-146	264	12	a	a	DET
alkej-146	264	13	piezopositioning	piezopositioning	NOUN
alkej-146	264	14	mechanism	mechanism	NOUN
alkej-146	264	15	”	"	PUNCT
alkej-146	264	16	,	,	PUNCT
alkej-146	264	17	iee	iee	PROPN
alkej-146	264	18	proceedings	proceeding	NOUN
alkej-146	264	19	control	control	VERB
alkej-146	264	20	theory	theory	NOUN
alkej-146	264	21	and	and	CCONJ
alkej-146	264	22	applications	application	NOUN
alkej-146	264	23	,	,	PUNCT
alkej-146	264	24	vol	vol	NOUN
alkej-146	264	25	.	.	PROPN
alkej-146	264	26	151	151	NUM
alkej-146	264	27	,	,	PUNCT
alkej-146	264	28	no	no	INTJ
alkej-146	264	29	.	.	NOUN
alkej-146	264	30	5	5	NUM
alkej-146	264	31	,	,	PUNCT
alkej-146	264	32	september	september	PROPN
alkej-146	264	33	,	,	PUNCT
alkej-146	264	34	2004	2004	NUM
alkej-146	264	35	,	,	PUNCT
alkej-146	264	36	pp	pp	ADV
alkej-146	264	37	.	.	PUNCT
alkej-146	265	1	653–660	653–660	NUM
alkej-146	265	2	.	.	PUNCT
alkej-146	266	1	[	[	X
alkej-146	266	2	2	2	X
alkej-146	266	3	]	]	X
alkej-146	266	4	g.	g.	PROPN
alkej-146	266	5	s.	s.	PROPN
alkej-146	266	6	choi	choi	PROPN
alkej-146	266	7	,	,	PUNCT
alkej-146	266	8	h.	h.	PROPN
alkej-146	266	9	s.	s.	PROPN
alkej-146	266	10	kim	kim	PROPN
alkej-146	266	11	,	,	PUNCT
alkej-146	266	12	and	and	CCONJ
alkej-146	266	13	g.	g.	PROPN
alkej-146	266	14	h.	h.	PROPN
alkej-146	266	15	choi	choi	PROPN
alkej-146	266	16	,	,	PUNCT
alkej-146	266	17	“	"	PUNCT
alkej-146	266	18	a	a	DET
alkej-146	266	19	study	study	NOUN
alkej-146	266	20	on	on	ADP
alkej-146	266	21	position	position	NOUN
alkej-146	266	22	control	control	NOUN
alkej-146	266	23	of	of	ADP
alkej-146	266	24	piezoelectric	piezoelectric	ADJ
alkej-146	266	25	actuators	actuator	NOUN
alkej-146	266	26	”	"	PUNCT
alkej-146	266	27	,	,	PUNCT
alkej-146	266	28	proceedings	proceeding	NOUN
alkej-146	266	29	of	of	ADP
alkej-146	266	30	the	the	DET
alkej-146	266	31	ieee	ieee	NOUN
alkej-146	266	32	international	international	ADJ
alkej-146	266	33	symposium	symposium	NOUN
alkej-146	266	34	on	on	ADP
alkej-146	266	35	industrial	industrial	ADJ
alkej-146	266	36	electronics	electronic	NOUN
alkej-146	266	37	(	(	PUNCT
alkej-146	266	38	1997	1997	NUM
alkej-146	266	39	.	.	PUNCT
alkej-146	267	1	isie	isie	PROPN
alkej-146	267	2	'	'	NUM
alkej-146	267	3	97	97	NUM
alkej-146	267	4	)	)	PUNCT
alkej-146	267	5	,	,	PUNCT
alkej-146	267	6	vol	vol	NOUN
alkej-146	267	7	.	.	PROPN
alkej-146	267	8	3	3	NUM
alkej-146	267	9	,	,	PUNCT
alkej-146	267	10	1997	1997	NUM
alkej-146	267	11	,	,	PUNCT
alkej-146	267	12	pp	pp	ADP
alkej-146	267	13	.	.	PUNCT
alkej-146	268	1	851–855	851–855	NUM
alkej-146	268	2	.	.	PUNCT
alkej-146	269	1	[	[	X
alkej-146	269	2	3	3	X
alkej-146	269	3	]	]	X
alkej-146	269	4	p.	p.	NOUN
alkej-146	269	5	ge	ge	PROPN
alkej-146	269	6	,	,	PUNCT
alkej-146	269	7	and	and	CCONJ
alkej-146	269	8	m.	m.	NOUN
alkej-146	269	9	jouaneh	jouaneh	PROPN
alkej-146	269	10	,	,	PUNCT
alkej-146	269	11	“	"	PUNCT
alkej-146	269	12	tracking	track	VERB
alkej-146	269	13	control	control	NOUN
alkej-146	269	14	of	of	ADP
alkej-146	269	15	a	a	DET
alkej-146	269	16	piezoceramic	piezoceramic	ADJ
alkej-146	269	17	actuator	actuator	NOUN
alkej-146	269	18	”	"	PUNCT
alkej-146	269	19	,	,	PUNCT
alkej-146	269	20	ieee	ieee	NOUN
alkej-146	269	21	transactions	transaction	NOUN
alkej-146	269	22	on	on	ADP
alkej-146	269	23	control	control	NOUN
alkej-146	269	24	systems	system	NOUN
alkej-146	269	25	technology	technology	NOUN
alkej-146	269	26	,	,	PUNCT
alkej-146	269	27	vol	vol	NOUN
alkej-146	269	28	.	.	PROPN
alkej-146	269	29	4	4	NUM
alkej-146	269	30	,	,	PUNCT
alkej-146	269	31	no.3	no.3	VERB
alkej-146	269	32	,	,	PUNCT
alkej-146	269	33	1996	1996	NUM
alkej-146	269	34	,	,	PUNCT
alkej-146	269	35	pp	pp	ADV
alkej-146	269	36	.	.	PUNCT
alkej-146	270	1	209–216	209–216	NUM
alkej-146	270	2	.	.	PUNCT
alkej-146	271	1	[	[	X
alkej-146	271	2	4	4	NUM
alkej-146	271	3	]	]	SYM
alkej-146	271	4	c	c	X
alkej-146	271	5	-	-	PUNCT
alkej-146	271	6	l	l	NOUN
alkej-146	271	7	hwang	hwang	PROPN
alkej-146	271	8	,	,	PUNCT
alkej-146	271	9	y	y	PROPN
alkej-146	271	10	-	-	PROPN
alkej-146	271	11	m	m	VERB
alkej-146	271	12	chen	chen	PROPN
alkej-146	271	13	,	,	PUNCT
alkej-146	271	14	and	and	CCONJ
alkej-146	271	15	c	c	PROPN
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alkej-146	271	17	,	,	PUNCT
alkej-146	271	18	“	"	PUNCT
alkej-146	271	19	trajectory	trajectory	NOUN
alkej-146	271	20	tracking	tracking	NOUN
alkej-146	271	21	of	of	ADP
alkej-146	271	22	large	large	ADJ
alkej-146	271	23	-	-	PUNCT
alkej-146	271	24	displacement	displacement	ADJ
alkej-146	271	25	piezoelectric	piezoelectric	NOUN
alkej-146	271	26	actuators	actuator	NOUN
alkej-146	271	27	using	use	VERB
alkej-146	271	28	a	a	DET
alkej-146	271	29	nonlinear	nonlinear	ADJ
alkej-146	271	30	observer	observer	NOUN
alkej-146	271	31	-	-	PUNCT
alkej-146	271	32	based	base	VERB
alkej-146	271	33	variable	variable	ADJ
alkej-146	271	34	structure	structure	NOUN
alkej-146	271	35	control	control	NOUN
alkej-146	271	36	”	"	PUNCT
alkej-146	271	37	,	,	PUNCT
alkej-146	271	38	ieee	ieee	NOUN
alkej-146	271	39	transactions	transaction	NOUN
alkej-146	271	40	on	on	ADP
alkej-146	271	41	control	control	NOUN
alkej-146	271	42	systems	system	NOUN
alkej-146	271	43	technology	technology	NOUN
alkej-146	271	44	,	,	PUNCT
alkej-146	271	45	vol	vol	NOUN
alkej-146	271	46	.	.	PROPN
alkej-146	271	47	13	13	NUM
alkej-146	271	48	,	,	PUNCT
alkej-146	271	49	no	no	INTJ
alkej-146	271	50	.	.	NOUN
alkej-146	271	51	1	1	NUM
alkej-146	271	52	,	,	PUNCT
alkej-146	271	53	january	january	PROPN
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alkej-146	271	55	,	,	PUNCT
alkej-146	271	56	pp	pp	ADP
alkej-146	271	57	.	.	PUNCT
alkej-146	272	1	56	56	NUM
alkej-146	272	2	-	-	SYM
alkej-146	272	3	66	66	NUM
alkej-146	272	4	.	.	PUNCT
alkej-146	273	1	[	[	X
alkej-146	273	2	5	5	NUM
alkej-146	273	3	]	]	SYM
alkej-146	273	4	f	f	PROPN
alkej-146	273	5	-	-	PUNCT
alkej-146	273	6	j	j	PROPN
alkej-146	273	7	lin	lin	PROPN
alkej-146	273	8	,	,	PUNCT
alkej-146	273	9	h	h	PROPN
alkej-146	273	10	-	-	PUNCT
alkej-146	273	11	j	j	NOUN
alkej-146	273	12	shieh	shieh	NOUN
alkej-146	273	13	,	,	PUNCT
alkej-146	273	14	and	and	CCONJ
alkej-146	273	15	po	po	NOUN
alkej-146	273	16	-	-	PUNCT
alkej-146	273	17	kai	kai	PROPN
alkej-146	273	18	huang	huang	PROPN
alkej-146	273	19	,	,	PUNCT
alkej-146	273	20	“	"	PUNCT
alkej-146	273	21	adaptive	adaptive	ADJ
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alkej-146	273	23	neural	neural	ADJ
alkej-146	273	24	network	network	NOUN
alkej-146	273	25	control	control	NOUN
alkej-146	273	26	with	with	ADP
alkej-146	273	27	hysteresis	hysteresis	NOUN
alkej-146	273	28	estimation	estimation	NOUN
alkej-146	273	29	for	for	ADP
alkej-146	273	30	piezopositioning	piezopositioning	NOUN
alkej-146	273	31	mechanism	mechanism	NOUN
alkej-146	273	32	”	"	PUNCT
alkej-146	273	33	,	,	PUNCT
alkej-146	273	34	ieee	ieee	NOUN
alkej-146	273	35	transactions	transaction	NOUN
alkej-146	273	36	on	on	ADP
alkej-146	273	37	neural	neural	ADJ
alkej-146	273	38	networks	network	NOUN
alkej-146	273	39	,	,	PUNCT
alkej-146	273	40	vol	vol	NOUN
alkej-146	273	41	.	.	PROPN
alkej-146	273	42	17	17	NUM
alkej-146	273	43	,	,	PUNCT
alkej-146	273	44	no	no	INTJ
alkej-146	273	45	.	.	NOUN
alkej-146	273	46	2	2	NUM
alkej-146	273	47	,	,	PUNCT
alkej-146	273	48	march	march	PROPN
alkej-146	273	49	2006	2006	NUM
alkej-146	273	50	,	,	PUNCT
alkej-146	273	51	pp.432	pp.432	NOUN
alkej-146	273	52	-	-	PUNCT
alkej-146	273	53	444	444	NUM
alkej-146	273	54	.	.	PUNCT
alkej-146	274	1	[	[	X
alkej-146	274	2	6	6	NUM
alkej-146	274	3	]	]	PUNCT
alkej-146	274	4	h.-j	h.-j	PROPN
alkej-146	274	5	.	.	PUNCT
alkej-146	274	6	shieh	shieh	PROPN
alkej-146	274	7	,	,	PUNCT
alkej-146	274	8	y.-j	y.-j	PROPN
alkej-146	274	9	.	.	PUNCT
alkej-146	275	1	chiu	chiu	PROPN
alkej-146	275	2	;	;	PUNCT
alkej-146	275	3	and	and	CCONJ
alkej-146	275	4	y.-t	y.-t	NOUN
alkej-146	275	5	.	.	PUNCT
alkej-146	276	1	chen	chen	PROPN
alkej-146	276	2	,	,	PUNCT
alkej-146	276	3	“	"	PUNCT
alkej-146	276	4	optimal	optimal	ADJ
alkej-146	276	5	pid	pid	NOUN
alkej-146	276	6	control	control	NOUN
alkej-146	276	7	system	system	NOUN
alkej-146	276	8	of	of	ADP
alkej-146	276	9	a	a	DET
alkej-146	276	10	piezoelectric	piezoelectric	NOUN
alkej-146	276	11	micropositioner	micropositioner	ADV
alkej-146	276	12	”	"	PUNCT
alkej-146	276	13	,	,	PUNCT
alkej-146	276	14	2008	2008	NUM
alkej-146	276	15	ieee	ieee	NOUN
alkej-146	276	16	/	/	SYM
alkej-146	276	17	sice	sice	X
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alkej-146	276	19	symposium	symposium	NOUN
alkej-146	276	20	on	on	ADP
alkej-146	276	21	system	system	NOUN
alkej-146	276	22	integration	integration	NOUN
alkej-146	276	23	,	,	PUNCT
alkej-146	276	24	vol.1	vol.1	PROPN
alkej-146	276	25	,	,	PUNCT
alkej-146	276	26	december	december	PROPN
alkej-146	276	27	2008	2008	NUM
alkej-146	276	28	,	,	PUNCT
alkej-146	276	29	pp	pp	ADJ
alkej-146	276	30	.	.	PUNCT
alkej-146	277	1	1	1	NUM
alkej-146	277	2	-	-	SYM
alkej-146	277	3	5	5	NUM
alkej-146	277	4	.	.	PUNCT
alkej-146	278	1	[	[	X
alkej-146	278	2	7	7	X
alkej-146	278	3	]	]	X
alkej-146	278	4	n.	n.	PROPN
alkej-146	278	5	thomas	thomas	PROPN
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alkej-146	278	9	,	,	PUNCT
alkej-146	278	10	“	"	PUNCT
alkej-146	278	11	position	position	NOUN
alkej-146	278	12	control	control	NOUN
alkej-146	278	13	of	of	ADP
alkej-146	278	14	dc	dc	PROPN
alkej-146	278	15	motor	motor	NOUN
alkej-146	278	16	using	use	VERB
alkej-146	278	17	genetic	genetic	ADJ
alkej-146	278	18	algorithm	algorithm	NOUN
alkej-146	278	19	based	base	VERB
alkej-146	278	20	pid	pid	NOUN
alkej-146	278	21	controller	controller	NOUN
alkej-146	278	22	”	"	PUNCT
alkej-146	278	23	,	,	PUNCT
alkej-146	278	24	proceedings	proceeding	NOUN
alkej-146	278	25	of	of	ADP
alkej-146	278	26	the	the	DET
alkej-146	278	27	world	world	NOUN
alkej-146	278	28	congress	congress	PROPN
alkej-146	278	29	on	on	ADP
alkej-146	278	30	engineering	engineering	NOUN
alkej-146	278	31	,	,	PUNCT
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alkej-146	278	33	.	.	PROPN
alkej-146	278	34	2	2	NUM
alkej-146	278	35	,	,	PUNCT
alkej-146	278	36	july	july	PROPN
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alkej-146	278	38	.	.	PUNCT
alkej-146	279	1	[	[	X
alkej-146	279	2	8	8	NUM
alkej-146	279	3	]	]	X
alkej-146	279	4	m.	m.	NOUN
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alkej-146	279	6	,	,	PUNCT
alkej-146	279	7	“	"	PUNCT
alkej-146	279	8	an	an	DET
alkej-146	279	9	introduction	introduction	NOUN
alkej-146	279	10	to	to	ADP
alkej-146	279	11	genetic	genetic	ADJ
alkej-146	279	12	algorithms	algorithm	NOUN
alkej-146	279	13	”	"	PUNCT
alkej-146	279	14	,	,	PUNCT
alkej-146	279	15	5th	5th	ADJ
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alkej-146	279	17	,	,	PUNCT
alkej-146	279	18	a	a	DET
alkej-146	279	19	bradford	bradford	NOUN
alkej-146	279	20	book	book	NOUN
alkej-146	279	21	the	the	DET
alkej-146	279	22	mit	mit	PROPN
alkej-146	279	23	press	press	NOUN
alkej-146	279	24	,	,	PUNCT
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alkej-146	279	26	kingdom	kingdom	PROPN
alkej-146	279	27	(	(	PUNCT
alkej-146	279	28	uk	uk	PROPN
alkej-146	279	29	)	)	PUNCT
alkej-146	279	30	,	,	PUNCT
alkej-146	279	31	1999	1999	NUM
alkej-146	279	32	.	.	PUNCT
alkej-146	280	1	[	[	X
alkej-146	280	2	9	9	NUM
alkej-146	280	3	]	]	SYM
alkej-146	280	4	i.	i.	NOUN
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alkej-146	280	6	,	,	PUNCT
alkej-146	280	7	“	"	PUNCT
alkej-146	280	8	on	on	ADP
alkej-146	280	9	-	-	PUNCT
alkej-146	280	10	line	line	NOUN
alkej-146	280	11	pid	pid	NOUN
alkej-146	280	12	controller	controller	NOUN
alkej-146	280	13	tuning	tune	VERB
alkej-146	280	14	using	use	VERB
alkej-146	280	15	genetic	genetic	ADJ
alkej-146	280	16	algorithms	algorithm	NOUN
alkej-146	280	17	"	"	PUNCT
alkej-146	280	18	,	,	PUNCT
alkej-146	280	19	m.sc	m.sc	PROPN
alkej-146	280	20	.	.	PUNCT
alkej-146	280	21	thesis	thesis	NOUN
alkej-146	280	22	in	in	ADP
alkej-146	280	23	electronic	electronic	ADJ
alkej-146	280	24	systems	system	NOUN
alkej-146	280	25	,	,	PUNCT
alkej-146	280	26	faculty	faculty	NOUN
alkej-146	280	27	of	of	ADP
alkej-146	280	28	engineering	engineering	NOUN
alkej-146	280	29	&	&	CCONJ
alkej-146	280	30	computing	computing	PROPN
alkej-146	280	31	,	,	PUNCT
alkej-146	280	32	dublin	dublin	PROPN
alkej-146	280	33	city	city	PROPN
alkej-146	280	34	university	university	PROPN
alkej-146	280	35	.	.	PUNCT
alkej-146	281	1	[	[	X
alkej-146	281	2	10	10	NUM
alkej-146	281	3	]	]	X
alkej-146	281	4	h.	h.	PROPN
alkej-146	281	5	j.	j.	PROPN
alkej-146	281	6	m.	m.	PROPN
alkej-146	281	7	t.	t.	PROPN
alkej-146	281	8	a.	a.	PROPN
alkej-146	281	9	adriaens	adriaens	PROPN
alkej-146	281	10	,	,	PUNCT
alkej-146	281	11	w.	w.	PROPN
alkej-146	281	12	l.	l.	PROPN
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alkej-146	281	21	modeling	model	VERB
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alkej-146	281	23	actuators	actuator	NOUN
alkej-146	281	24	”	"	PUNCT
alkej-146	281	25	,	,	PUNCT
alkej-146	281	26	ieee	ieee	PROPN
alkej-146	281	27	/	/	SYM
alkej-146	281	28	asme	asme	PROPN
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alkej-146	281	30	on	on	ADP
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alkej-146	281	32	,	,	PUNCT
alkej-146	281	33	vol	vol	NOUN
alkej-146	281	34	.	.	PROPN
alkej-146	281	35	5	5	NUM
alkej-146	281	36	,	,	PUNCT
alkej-146	281	37	no	no	INTJ
alkej-146	281	38	.	.	NOUN
alkej-146	281	39	4	4	NUM
alkej-146	281	40	,	,	PUNCT
alkej-146	281	41	december	december	PROPN
alkej-146	281	42	,	,	PUNCT
alkej-146	281	43	2000	2000	NUM
alkej-146	281	44	,	,	PUNCT
alkej-146	281	45	pp	pp	ADJ
alkej-146	281	46	.	.	PUNCT
alkej-146	282	1	331	331	NUM
alkej-146	282	2	-	-	SYM
alkej-146	282	3	341	341	NUM
alkej-146	282	4	.	.	PUNCT
alkej-146	283	1	[	[	X
alkej-146	283	2	11	11	NUM
alkej-146	283	3	]	]	X
alkej-146	283	4	s.o	s.o	PROPN
alkej-146	283	5	.	.	PROPN
alkej-146	283	6	r.	r.	PROPN
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alkej-146	283	8	,	,	PUNCT
alkej-146	283	9	and	and	CCONJ
alkej-146	283	10	a.	a.	PROPN
alkej-146	283	11	j.	j.	PROPN
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alkej-146	283	15	piezoelectric	piezoelectric	NOUN
alkej-146	283	16	transducers	transducer	NOUN
alkej-146	283	17	for	for	ADP
alkej-146	283	18	vibration	vibration	NOUN
alkej-146	283	19	control	control	NOUN
alkej-146	283	20	and	and	CCONJ
alkej-146	283	21	damping	damp	VERB
alkej-146	283	22	”	"	PUNCT
alkej-146	283	23	,	,	PUNCT
alkej-146	283	24	1st	1st	PROPN
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alkej-146	283	26	,	,	PUNCT
alkej-146	283	27	advances	advance	NOUN
alkej-146	283	28	in	in	ADP
alkej-146	283	29	industrial	industrial	ADJ
alkej-146	283	30	control	control	PROPN
alkej-146	283	31	springerverlag	springerverlag	PROPN
alkej-146	283	32	london	london	PROPN
alkej-146	283	33	,	,	PUNCT
alkej-146	283	34	united	united	ADJ
alkej-146	283	35	kingdom	kingdom	PROPN
alkej-146	283	36	(	(	PUNCT
alkej-146	283	37	uk	uk	PROPN
alkej-146	283	38	)	)	PUNCT
alkej-146	283	39	,	,	PUNCT
alkej-146	283	40	2006	2006	NUM
alkej-146	283	41	.	.	PUNCT
alkej-146	284	1	[	[	X
alkej-146	284	2	12	12	NUM
alkej-146	284	3	]	]	PUNCT
alkej-146	284	4	a.	a.	NOUN
alkej-146	284	5	ballato	ballato	PROPN
alkej-146	284	6	,	,	PUNCT
alkej-146	284	7	“	"	PUNCT
alkej-146	284	8	piezoelectricity	piezoelectricity	NOUN
alkej-146	284	9	:	:	PUNCT
alkej-146	284	10	old	old	ADJ
alkej-146	284	11	effect	effect	NOUN
alkej-146	284	12	,	,	PUNCT
alkej-146	284	13	new	new	ADJ
alkej-146	284	14	thrusts	thrust	NOUN
alkej-146	284	15	”	"	PUNCT
alkej-146	284	16	,	,	PUNCT
alkej-146	284	17	ieee	ieee	NOUN
alkej-146	284	18	transactions	transaction	NOUN
alkej-146	284	19	on	on	ADP
alkej-146	284	20	ultrasonics	ultrasonic	NOUN
alkej-146	284	21	,	,	PUNCT
alkej-146	284	22	ferroelectrics	ferroelectric	NOUN
alkej-146	284	23	,	,	PUNCT
alkej-146	284	24	and	and	CCONJ
alkej-146	284	25	frequency	frequency	NOUN
alkej-146	284	26	control	control	NOUN
alkej-146	284	27	.	.	PUNCT
alkej-146	285	1	vol	vol	NOUN
alkej-146	285	2	.	.	PROPN
alkej-146	286	1	12	12	NUM
alkej-146	286	2	.	.	PUNCT
alkej-146	287	1	no	no	INTJ
alkej-146	287	2	.	.	NOUN
alkej-146	288	1	5	5	NUM
alkej-146	288	2	.	.	PUNCT
alkej-146	288	3	september	september	PROPN
alkej-146	288	4	,	,	PUNCT
alkej-146	288	5	1995	1995	NUM
alkej-146	288	6	,	,	PUNCT
alkej-146	288	7	pp	pp	ADJ
alkej-146	288	8	.	.	PUNCT
alkej-146	289	1	916	916	NUM
alkej-146	289	2	-	-	SYM
alkej-146	289	3	926	926	NUM
alkej-146	289	4	.	.	PUNCT
alkej-146	290	1	[	[	X
alkej-146	290	2	13	13	NUM
alkej-146	290	3	]	]	PUNCT
alkej-146	290	4	a.	a.	NOUN
alkej-146	290	5	ballato	ballato	PROPN
alkej-146	290	6	,	,	PUNCT
alkej-146	290	7	“	"	PUNCT
alkej-146	290	8	piezoelectricity	piezoelectricity	NOUN
alkej-146	290	9	:	:	PUNCT
alkej-146	290	10	history	history	NOUN
alkej-146	290	11	and	and	CCONJ
alkej-146	290	12	new	new	ADJ
alkej-146	290	13	thrusts	thrust	NOUN
alkej-146	290	14	”	"	PUNCT
alkej-146	290	15	,	,	PUNCT
alkej-146	290	16	proceedings	proceeding	NOUN
alkej-146	290	17	of	of	ADP
alkej-146	290	18	1996	1996	NUM
alkej-146	290	19	ieee	ieee	NOUN
alkej-146	290	20	ultrasonics	ultrasonic	NOUN
alkej-146	290	21	symposium	symposium	NOUN
alkej-146	290	22	,	,	PUNCT
alkej-146	290	23	vol	vol	NOUN
alkej-146	290	24	.	.	PROPN
alkej-146	290	25	1	1	NUM
alkej-146	290	26	,	,	PUNCT
alkej-146	290	27	1996	1996	NUM
alkej-146	290	28	,	,	PUNCT
alkej-146	290	29	pp	pp	ADV
alkej-146	290	30	.	.	PUNCT
alkej-146	291	1	575	575	NUM
alkej-146	291	2	-	-	SYM
alkej-146	291	3	583	583	NUM
alkej-146	291	4	.	.	PUNCT
alkej-146	292	1	yasir	yasir	PROPN
alkej-146	292	2	khudhair	khudhair	PROPN
alkej-146	292	3	abbas	abbas	PROPN
alkej-146	292	4	al	al	PROPN
alkej-146	292	5	-	-	PUNCT
alkej-146	292	6	khwarizmi	khwarizmi	PROPN
alkej-146	292	7	engineering	engineering	NOUN
alkej-146	292	8	journal	journal	PROPN
alkej-146	292	9	,	,	PUNCT
alkej-146	292	10	vol	vol	NOUN
alkej-146	292	11	.	.	PROPN
alkej-146	292	12	8	8	NUM
alkej-146	292	13	,	,	PUNCT
alkej-146	292	14	no.4	no.4	PROPN
alkej-146	292	15	,	,	PUNCT
alkej-146	292	16	pp40	pp40	PROPN
alkej-146	292	17	-52	-52	PROPN
alkej-146	292	18	(	(	PUNCT
alkej-146	292	19	2012	2012	NUM
alkej-146	292	20	)	)	PUNCT
alkej-146	292	21	51	51	NUM
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alkej-146	293	2	14	14	NUM
alkej-146	293	3	]	]	X
alkej-146	293	4	e.	e.	PROPN
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alkej-146	293	6	,	,	PUNCT
alkej-146	293	7	“	"	PUNCT
alkej-146	293	8	history	history	NOUN
alkej-146	293	9	and	and	CCONJ
alkej-146	293	10	recent	recent	ADJ
alkej-146	293	11	progress	progress	NOUN
alkej-146	293	12	in	in	ADP
alkej-146	293	13	piezoelectric	piezoelectric	ADJ
alkej-146	293	14	polymers	polymer	NOUN
alkej-146	293	15	”	"	PUNCT
alkej-146	293	16	,	,	PUNCT
alkej-146	293	17	ieee	ieee	NOUN
alkej-146	293	18	transactions	transaction	NOUN
alkej-146	293	19	on	on	ADP
alkej-146	293	20	ultrasonics	ultrasonic	NOUN
alkej-146	293	21	,	,	PUNCT
alkej-146	293	22	ferroelectrics	ferroelectric	NOUN
alkej-146	293	23	,	,	PUNCT
alkej-146	293	24	and	and	CCONJ
alkej-146	293	25	frequency	frequency	NOUN
alkej-146	293	26	control	control	NOUN
alkej-146	293	27	,	,	PUNCT
alkej-146	293	28	vol	vol	NOUN
alkej-146	293	29	.	.	PROPN
alkej-146	294	1	47	47	NUM
alkej-146	294	2	,	,	PUNCT
alkej-146	294	3	no	no	INTJ
alkej-146	294	4	.	.	NOUN
alkej-146	294	5	6	6	NUM
alkej-146	294	6	,	,	PUNCT
alkej-146	294	7	november	november	PROPN
alkej-146	294	8	,	,	PUNCT
alkej-146	294	9	2000	2000	NUM
alkej-146	294	10	,	,	PUNCT
alkej-146	294	11	pp	pp	ADJ
alkej-146	294	12	.	.	PUNCT
alkej-146	295	1	1277	1277	NUM
alkej-146	295	2	-	-	SYM
alkej-146	295	3	1290	1290	NUM
alkej-146	295	4	.	.	PUNCT
alkej-146	296	1	[	[	X
alkej-146	296	2	15	15	NUM
alkej-146	296	3	]	]	X
alkej-146	296	4	h.-j	h.-j	PROPN
alkej-146	296	5	.	.	PUNCT
alkej-146	297	1	shieh	shieh	PROPN
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alkej-146	297	3	and	and	CCONJ
alkej-146	297	4	c.-h	c.-h	NOUN
alkej-146	297	5	.	.	PUNCT
alkej-146	298	1	hsu	hsu	PROPN
alkej-146	298	2	,	,	PUNCT
alkej-146	298	3	“	"	PUNCT
alkej-146	298	4	an	an	DET
alkej-146	298	5	integratorbackstepping	integratorbackstepping	NOUN
alkej-146	298	6	-	-	PUNCT
alkej-146	298	7	based	base	VERB
alkej-146	298	8	dynamic	dynamic	ADJ
alkej-146	298	9	surface	surface	NOUN
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alkej-146	298	11	method	method	NOUN
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alkej-146	298	13	a	a	DET
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alkej-146	298	15	-	-	PUNCT
alkej-146	298	16	axis	axis	NOUN
alkej-146	298	17	piezoelectric	piezoelectric	NOUN
alkej-146	298	18	micropositioning	micropositione	VERB
alkej-146	298	19	stage	stage	NOUN
alkej-146	298	20	”	"	PUNCT
alkej-146	298	21	,	,	PUNCT
alkej-146	298	22	ieee	ieee	NOUN
alkej-146	298	23	transactions	transaction	NOUN
alkej-146	298	24	on	on	ADP
alkej-146	298	25	control	control	NOUN
alkej-146	298	26	systems	system	NOUN
alkej-146	298	27	technology	technology	NOUN
alkej-146	298	28	,	,	PUNCT
alkej-146	298	29	vol	vol	NOUN
alkej-146	298	30	.	.	PROPN
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alkej-146	298	32	,	,	PUNCT
alkej-146	298	33	no	no	INTJ
alkej-146	298	34	.	.	NOUN
alkej-146	298	35	5	5	NUM
alkej-146	298	36	,	,	PUNCT
alkej-146	298	37	september	september	PROPN
alkej-146	298	38	,	,	PUNCT
alkej-146	298	39	2007	2007	NUM
alkej-146	298	40	,	,	PUNCT
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alkej-146	298	42	.	.	PUNCT
alkej-146	299	1	916	916	NUM
alkej-146	299	2	926	926	NUM
alkej-146	299	3	.	.	PUNCT
alkej-146	300	1	[	[	X
alkej-146	300	2	16	16	NUM
alkej-146	300	3	]	]	PUNCT
alkej-146	300	4	m.	m.	NOUN
alkej-146	300	5	salami	salami	NOUN
alkej-146	300	6	,	,	PUNCT
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alkej-146	300	9	,	,	PUNCT
alkej-146	300	10	“	"	PUNCT
alkej-146	300	11	an	an	DET
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alkej-146	300	20	”	"	PUNCT
alkej-146	300	21	,	,	PUNCT
alkej-146	300	22	first	first	ADJ
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alkej-146	300	24	conference	conference	NOUN
alkej-146	300	25	on	on	ADP
alkej-146	300	26	genetic	genetic	ADJ
alkej-146	300	27	algorithms	algorithm	NOUN
alkej-146	300	28	in	in	ADP
alkej-146	300	29	engineering	engineering	NOUN
alkej-146	300	30	systems	system	NOUN
alkej-146	300	31	:	:	PUNCT
alkej-146	300	32	innovations	innovation	NOUN
alkej-146	300	33	and	and	CCONJ
alkej-146	300	34	applications	application	NOUN
alkej-146	300	35	,	,	PUNCT
alkej-146	300	36	no	no	INTJ
alkej-146	300	37	.	.	NOUN
alkej-146	300	38	414	414	NUM
alkej-146	300	39	,	,	PUNCT
alkej-146	300	40	1995	1995	NUM
alkej-146	300	41	,	,	PUNCT
alkej-146	300	42	pp	pp	ADJ
alkej-146	300	43	.	.	PUNCT
alkej-146	300	44	88	88	NUM
alkej-146	300	45	-	-	SYM
alkej-146	300	46	93	93	NUM
alkej-146	300	47	.	.	PUNCT
alkej-146	301	1	[	[	X
alkej-146	301	2	17	17	NUM
alkej-146	301	3	]	]	X
alkej-146	301	4	k.f	k.f	PROPN
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alkej-146	301	13	s.	s.	PROPN
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alkej-146	301	23	”	"	PUNCT
alkej-146	301	24	,	,	PUNCT
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alkej-146	301	27	on	on	ADP
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alkej-146	301	30	,	,	PUNCT
alkej-146	301	31	vol	vol	NOUN
alkej-146	301	32	.	.	PROPN
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alkej-146	302	2	,	,	PUNCT
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alkej-146	302	6	,	,	PUNCT
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alkej-146	302	8	,	,	PUNCT
alkej-146	303	1	pp	pp	ADV
alkej-146	303	2	.	.	PUNCT
alkej-146	304	1	519	519	NUM
alkej-146	304	2	534	534	NUM
alkej-146	304	3	.	.	PUNCT
alkej-146	305	1	[	[	X
alkej-146	305	2	18	18	NUM
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alkej-146	305	4	s.m	s.m	PROPN
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alkej-146	305	10	jain	jain	PROPN
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alkej-146	305	32	a	a	DET
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alkej-146	305	34	bioreactor	bioreactor	NOUN
alkej-146	305	35	"	"	PUNCT
alkej-146	305	36	,	,	PUNCT
alkej-146	305	37	journal	journal	NOUN
alkej-146	305	38	of	of	ADP
alkej-146	305	39	indian	indian	ADJ
alkej-146	305	40	chemical	chemical	NOUN
alkej-146	305	41	engineer	engineer	NOUN
alkej-146	305	42	,	,	PUNCT
alkej-146	305	43	vol	vol	NOUN
alkej-146	305	44	.	.	PROPN
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alkej-146	305	46	,	,	PUNCT
alkej-146	305	47	no	no	INTJ
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alkej-146	305	49	3	3	NUM
alkej-146	305	50	,	,	PUNCT
alkej-146	305	51	july	july	PROPN
alkej-146	305	52	-	-	PUNCT
alkej-146	305	53	september	september	PROPN
alkej-146	305	54	2008	2008	NUM
alkej-146	305	55	,	,	PUNCT
alkej-146	305	56	pp	pp	ADJ
alkej-146	305	57	.	.	PUNCT
alkej-146	305	58	214226	214226	NUM
alkej-146	305	59	.	.	PUNCT
alkej-146	306	1	[	[	X
alkej-146	306	2	19	19	NUM
alkej-146	306	3	]	]	PUNCT
alkej-146	306	4	a.	a.	NOUN
alkej-146	306	5	chipperfield	chipperfield	PROPN
alkej-146	306	6	,	,	PUNCT
alkej-146	306	7	p.	p.	PROPN
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alkej-146	306	9	,	,	PUNCT
alkej-146	306	10	h.	h.	PROPN
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alkej-146	306	16	,	,	PUNCT
alkej-146	306	17	“	"	PUNCT
alkej-146	306	18	genetic	genetic	ADJ
alkej-146	306	19	algorithm	algorithm	NOUN
alkej-146	306	20	toolbox	toolbox	NOUN
alkej-146	306	21	for	for	ADP
alkej-146	306	22	use	use	NOUN
alkej-146	306	23	with	with	ADP
alkej-146	306	24	matlab	matlab	PROPN
alkej-146	306	25	,	,	PUNCT
alkej-146	306	26	user	user	NOUN
alkej-146	306	27	guide	guide	NOUN
alkej-146	306	28	”	"	PUNCT
alkej-146	306	29	,	,	PUNCT
alkej-146	306	30	version	version	NOUN
alkej-146	306	31	1.2	1.2	NUM
alkej-146	306	32	,	,	PUNCT
alkej-146	306	33	university	university	NOUN
alkej-146	306	34	of	of	ADP
alkej-146	306	35	sheffield	sheffield	PROPN
alkej-146	306	36	,	,	PUNCT
alkej-146	306	37	uk	uk	PROPN
alkej-146	306	38	,	,	PUNCT
alkej-146	306	39	1994	1994	NUM
alkej-146	306	40	.	.	PUNCT
alkej-146	306	41	)	)	PUNCT
alkej-146	306	42	2012	2012	NUM
alkej-146	306	43	(	(	PUNCT
alkej-146	306	44	4052	4052	NUM
alkej-146	306	45	،	،	PROPN
alkej-146	306	46	صفحة	صفحة	PROPN
alkej-146	306	47	4	4	NUM
alkej-146	306	48	،	،	X
alkej-146	306	49	العدد8مجلة	العدد8مجلة	PROPN
alkej-146	306	50	الخوارزمي	الخوارزمي	PROPN
alkej-146	306	51	الھندسیة	الھندسیة	PROPN
alkej-146	306	52	المجلد	المجلد	PROPN
alkej-146	306	53	یاسر	یاسر	NOUN
alkej-146	306	54	خضیر	خضیر	NOUN
alkej-146	306	55	عباس	عباس	VERB
alkej-146	306	56	52	52	NUM
alkej-146	306	57	تفاضلي	تفاضلي	NOUN
alkej-146	306	58	باإلعتماد	باإلعتماد	VERB
alkej-146	306	59	على	على	PROPN
alkej-146	306	60	الخوارزمیات	الخوارزمیات	PROPN
alkej-146	306	61	الجینیة	الجینیة	PROPN
alkej-146	306	62	لغرض	لغرض	NOUN
alkej-146	306	63	تتبع	تتبع	VERB
alkej-146	306	64	دقیق	دقیق	PROPN
alkej-146	306	65	-تكاملي	-تكاملي	NOUN
alkej-146	306	66	-	-	PUNCT
alkej-146	306	67	تصمیم	تصمیم	NOUN
alkej-146	306	68	مسیطر	مسیطر	PROPN
alkej-146	306	69	تناسبي	تناسبي	VERB
alkej-146	306	70	لنظام	لنظام	PROPN
alkej-146	306	71	تموضع	تموضع	PROPN
alkej-146	306	72	كھروإجھادي	كھروإجھادي	PROPN
alkej-146	306	73	ذو	ذو	PROPN
alkej-146	306	74	محورین	محورین	PROPN
alkej-146	306	75	یاسر	یاسر	NOUN
alkej-146	306	76	خضیر	خضیر	NOUN
alkej-146	306	77	عباس	عباس	VERB
alkej-146	306	78	الجامعة	الجامعة	NOUN
alkej-146	306	79	التكنولوجیة/	التكنولوجیة/	NUM
alkej-146	306	80	قسم	قسم	PROPN
alkej-146	306	81	ھندسة	ھندسة	ADJ
alkej-146	306	82	السیطرة	السیطرة	PROPN
alkej-146	307	1	والنظم	والنظم	PRON
alkej-146	307	2	yasirkh84@yahoo.com	yasirkh84@yahoo.com	X
alkej-146	307	3	:	:	PUNCT
alkej-146	307	4	البرید	البرید	NOUN
alkej-146	307	5	اإللكتروني	اإللكتروني	PROPN
alkej-146	307	6	الخالصة	الخالصة	PROPN
alkej-146	307	7	طریقة	طریقة	PROPN
alkej-146	307	8	بإستخدام	بإستخدام	PROPN
alkej-146	307	9	محورین	محورین	NOUN
alkej-146	307	10	وذات	وذات	ADJ
alkej-146	307	11	واحد	واحد	PROPN
alkej-146	308	1	محور	محور	PROPN
alkej-146	308	2	ذات	ذات	NOUN
alkej-146	308	3	لمرحلة	لمرحلة	PROPN
alkej-146	308	4	تموضع	تموضع	PROPN
alkej-146	308	5	كھروإجھادي	كھروإجھادي	PROPN
alkej-146	308	6	نظام	نظام	VERB
alkej-146	308	7	على	على	PROPN
alkej-146	308	8	السیطرة	السیطرة	PROPN
alkej-146	308	9	لغرض	لغرض	PRON
alkej-146	308	10	للتتبع	للتتبع	PROPN
alkej-146	308	11	ذكي	ذكي	PROPN
alkej-146	308	12	نظام	نظام	ADJ
alkej-146	308	13	تصمیم	تصمیم	VERB
alkej-146	308	14	تم	تم	PROPN
alkej-146	308	15	،	،	PROPN
alkej-146	308	16	البحث	البحث	PROPN
alkej-146	308	17	ھذا	ھذا	VERB
alkej-146	308	18	في	في	DET
alkej-146	308	19	على	على	PROPN
alkej-146	308	20	باإلعتماد	باإلعتماد	VERB
alkej-146	308	21	التفاضلي	التفاضلي	NOUN
alkej-146	308	22	-التكاملي	-التكاملي	PROPN
alkej-146	308	23	-التناسبي	-التناسبي	PROPN
alkej-146	308	24	المسیطر	المسیطر	NOUN
alkej-146	308	25	تصمیم	تصمیم	NOUN
alkej-146	308	26	طریقة	طریقة	NOUN
alkej-146	308	27	إن	إن	X
alkej-146	308	28	.	.	PUNCT
alkej-146	309	1	تفاضلي	تفاضلي	PROPN
alkej-146	309	2	-تكاملي	-تكاملي	PROPN
alkej-146	309	3	تناسبي	تناسبي	PROPN
alkej-146	309	4	مسیطر	مسیطر	PROPN
alkej-146	309	5	معامالت	معامالت	ADJ
alkej-146	309	6	تنغیم	تنغیم	NOUN
alkej-146	309	7	لغرض	لغرض	PROPN
alkej-146	309	8	الجینیة	الجینیة	PROPN
alkej-146	309	9	الخوارزمیات	الخوارزمیات	VERB
alkej-146	309	10	یمكن	یمكن	PROPN
alkej-146	309	11	المسیطرات	المسیطرات	PROPN
alkej-146	309	12	من	من	PRON
alkej-146	309	13	النوع	النوع	PROPN
alkej-146	309	14	ھذا	ھذا	VERB
alkej-146	309	15	بإستعمال	بإستعمال	ADJ
alkej-146	309	16	.	.	PUNCT
alkej-146	310	1	محددة	محددة	NOUN
alkej-146	310	2	ھدف	ھدف	VERB
alkej-146	310	3	دالة	دالة	NOUN
alkej-146	310	4	على	على	NOUN
alkej-146	310	5	باإلعتماد	باإلعتماد	VERB
alkej-146	310	6	المثلى	المثلى	NOUN
alkej-146	310	7	السیطرة	السیطرة	PROPN
alkej-146	310	8	سیاق	سیاق	PROPN
alkej-146	310	9	ضمن	ضمن	PROPN
alkej-146	310	10	المسیطر	المسیطر	PROPN
alkej-146	310	11	لتنغیم	لتنغیم	PROPN
alkej-146	310	12	طریقة	طریقة	PROPN
alkej-146	311	1	ھي	ھي	PROPN
alkej-146	311	2	الجینیة	الجینیة	PROPN
alkej-146	311	3	الخوارزمیة	الخوارزمیة	NOUN
alkej-146	311	4	تم	تم	VERB
alkej-146	311	5	التي	التي	PROPN
alkej-146	311	6	المحاكاة	المحاكاة	PROPN
alkej-146	311	7	ونتائج	ونتائج	PROPN
alkej-146	311	8	الجینیة	الجینیة	PROPN
alkej-146	311	9	الخوارزمیات	الخوارزمیات	VERB
alkej-146	311	10	شفرة	شفرة	PROPN
alkej-146	311	11	بناء	بناء	PROPN
alkej-146	311	12	إن	إن	PROPN
alkej-146	311	13	.	.	PROPN
alkej-146	311	14	الكھروإجھادي	الكھروإجھادي	NOUN
alkej-146	311	15	التموضع	التموضع	VERB
alkej-146	311	16	لنظام	لنظام	PROPN
alkej-146	312	1	عالیة	عالیة	PROPN
alkej-146	312	2	إداء	إداء	PROPN
alkej-146	312	3	بمواصفات	بمواصفات	AUX
alkej-146	312	4	التتبع	التتبع	VERB
alkej-146	312	5	لمسار	لمسار	ADJ
alkej-146	312	6	إستجابات	إستجابات	NOUN
alkej-146	312	7	على	على	PROPN
alkej-146	312	8	الحصول	الحصول	PROPN
alkej-146	313	1	تم	تم	PUNCT
alkej-146	313	2	الجینیة	الجینیة	PROPN
alkej-146	313	3	قد	قد	INTJ
alkej-146	313	4	الخوارزمیة	الخوارزمیة	PROPN
alkej-146	313	5	على	على	PROPN
alkej-146	313	6	المعتمد	المعتمد	PROPN
alkej-146	313	7	التفاضلي	التفاضلي	NOUN
alkej-146	313	8	-التكاملي	-التكاملي	PROPN
alkej-146	313	9	-التناسبي	-التناسبي	PROPN
alkej-146	313	10	المسیطر	المسیطر	NOUN
alkej-146	313	11	مع	مع	X
alkej-146	313	12	المحاكاة	المحاكاة	PROPN
alkej-146	313	13	نموذج	نموذج	PROPN
alkej-146	313	14	وكذلك	وكذلك	PROPN
alkej-146	313	15	matlabبیئة	matlabبیئة	PROPN
alkej-146	313	16	الحصول	الحصول	PROPN
alkej-146	313	17	علیھا	علیھا	NOUN
alkej-146	313	18	تم	تم	VERB
alkej-146	313	19	من	من	PROPN
alkej-146	313	20	خالل	خالل	PROPN
alkej-146	313	21	.المسح	.المسح	PROPN
alkej-146	313	22	المجھري	المجھري	PROPN
alkej-146	313	23	مثل	مثل	PROPN
alkej-146	313	24	العملیة	العملیة	PROPN
alkej-146	313	25	للتطبیقات	للتطبیقات	PROPN
alkej-146	313	26	المقترحة	المقترحة	PROPN
alkej-146	313	27	السیطرة	السیطرة	PROPN
alkej-146	313	28	طریقة	طریقة	PROPN
alkej-146	313	29	صالحیة	صالحیة	NOUN
alkej-146	313	30	إظھار	إظھار	PROPN
alkej-146	314	1	لغرض	لغرض	NOUN
alkej-146	314	2	توضیحھ	توضیحھ	VERB
alkej-146	314	3	mailto:yasirkh84@yahoo.com	mailto:yasirkh84@yahoo.com	X