id	sid	tid	token	lemma	pos
alkej-433	1	1	4d6963726f736f667420576f7264202d20dfc7e3e120e6dac8c7d320e6e3c7e5d1	4d6963726f736f667420576f7264202d20dfc7e3e120e6dac8c7d320e6e3c7e5d1	X
alkej-433	1	2	>	>	X
alkej-433	1	3	al	al	PROPN
alkej-433	1	4	-	-	PUNCT
alkej-433	1	5	khwarizmi	khwarizmi	PROPN
alkej-433	1	6	engineering	engineering	PROPN
alkej-433	1	7	journal	journal	PROPN
alkej-433	1	8	al	al	PROPN
alkej-433	1	9	-	-	PUNCT
alkej-433	1	10	khwarizmi	khwarizmi	PROPN
alkej-433	1	11	engineering	engineering	NOUN
alkej-433	1	12	journal	journal	PROPN
alkej-433	1	13	,	,	PUNCT
alkej-433	1	14	vol	vol	NOUN
alkej-433	1	15	.	.	PROPN
alkej-433	1	16	13	13	NUM
alkej-433	1	17	,	,	PUNCT
alkej-433	1	18	no	no	INTJ
alkej-433	1	19	.	.	NOUN
alkej-433	1	20	4	4	NUM
alkej-433	1	21	,	,	PUNCT
alkej-433	1	22	p.p	p.p	PROPN
alkej-433	1	23	.	.	NOUN
alkej-433	1	24	5868	5868	NUM
alkej-433	1	25	(	(	PUNCT
alkej-433	1	26	2017	2017	NUM
alkej-433	1	27	)	)	PUNCT
alkej-433	1	28	effect	effect	NOUN
alkej-433	1	29	ti	ti	PROPN
alkej-433	1	30	/	/	SYM
alkej-433	1	31	altin	altin	ADJ
alkej-433	1	32	multilayer	multilayer	NOUN
alkej-433	1	33	coating	coating	NOUN
alkej-433	1	34	on	on	ADP
alkej-433	1	35	the	the	DET
alkej-433	1	36	crater	crater	NOUN
alkej-433	1	37	wear	wear	NOUN
alkej-433	1	38	process	process	NOUN
alkej-433	1	39	of	of	ADP
alkej-433	1	40	cutting	cut	VERB
alkej-433	1	41	tool	tool	NOUN
alkej-433	1	42	and	and	CCONJ
alkej-433	1	43	tribological	tribological	ADJ
alkej-433	1	44	properties	property	NOUN
alkej-433	1	45	kamil	kamil	PROPN
alkej-433	1	46	j.	j.	PROPN
alkej-433	1	47	kadhim	kadhim	PROPN
alkej-433	1	48	*	*	PUNCT
alkej-433	1	49	abbas	abbas	PROPN
alkej-433	1	50	allawi	allawi	PROPN
alkej-433	1	51	abbas	abbas	PROPN
alkej-433	1	52	*	*	PUNCT
alkej-433	1	53	*	*	PROPN
alkej-433	1	54	maher	maher	PROPN
alkej-433	1	55	ali	ali	PROPN
alkej-433	1	56	hussein	hussein	PROPN
alkej-433	1	57	*	*	PUNCT
alkej-433	1	58	*	*	PUNCT
alkej-433	1	59	*	*	PUNCT
alkej-433	1	60	*	*	PUNCT
alkej-433	1	61	,	,	PUNCT
alkej-433	1	62	*	*	PUNCT
alkej-433	1	63	*	*	PUNCT
alkej-433	1	64	,	,	PUNCT
alkej-433	1	65	*	*	PUNCT
alkej-433	1	66	*	*	PUNCT
alkej-433	1	67	*	*	PUNCT
alkej-433	1	68	al	al	PROPN
alkej-433	1	69	-	-	PUNCT
alkej-433	1	70	furat	furat	PROPN
alkej-433	1	71	al	al	PROPN
alkej-433	1	72	awsat	awsat	VERB
alkej-433	1	73	technical	technical	PROPN
alkej-433	1	74	university	university	PROPN
alkej-433	1	75	/	/	SYM
alkej-433	1	76	musaib	musaib	PROPN
alkej-433	1	77	technical	technical	PROPN
alkej-433	1	78	institute	institute	PROPN
alkej-433	1	79	*	*	PROPN
alkej-433	1	80	email	email	NOUN
alkej-433	1	81	:	:	PUNCT
alkej-433	1	82	kamil_jawad35@yahoo.com	kamil_jawad35@yahoo.com	PROPN
alkej-433	1	83	*	*	PUNCT
alkej-433	1	84	*	*	PUNCT
alkej-433	1	85	email	email	NOUN
alkej-433	1	86	:	:	PUNCT
alkej-433	1	87	abbas_alawi80@yahoo.com	abbas_alawi80@yahoo.com	X
alkej-433	1	88	*	*	PUNCT
alkej-433	1	89	*	*	PUNCT
alkej-433	1	90	*	*	PUNCT
alkej-433	1	91	email:maher.a.hussein@gmail.com	email:maher.a.hussein@gmail.com	X
alkej-433	1	92	(	(	PUNCT
alkej-433	1	93	received	receive	VERB
alkej-433	1	94	21	21	NUM
alkej-433	1	95	february	february	NOUN
alkej-433	1	96	2017	2017	NUM
alkej-433	1	97	;	;	PUNCT
alkej-433	1	98	accepted	accept	VERB
alkej-433	1	99	17	17	NUM
alkej-433	1	100	july	july	PROPN
alkej-433	1	101	2017	2017	NUM
alkej-433	1	102	)	)	PUNCT
alkej-433	1	103	https://doi.org/10.22153/kej.2017.07.005	https://doi.org/10.22153/kej.2017.07.005	VERB
alkej-433	1	104	abstract	abstract	ADJ
alkej-433	1	105	tool	tool	NOUN
alkej-433	1	106	wear	wear	VERB
alkej-433	1	107	is	be	AUX
alkej-433	1	108	a	a	DET
alkej-433	1	109	major	major	ADJ
alkej-433	1	110	problem	problem	NOUN
alkej-433	1	111	in	in	ADP
alkej-433	1	112	machining	machine	VERB
alkej-433	1	113	operations	operation	NOUN
alkej-433	1	114	because	because	SCONJ
alkej-433	1	115	the	the	DET
alkej-433	1	116	resulting	result	VERB
alkej-433	1	117	material	material	NOUN
alkej-433	1	118	loss	loss	NOUN
alkej-433	1	119	gradually	gradually	ADV
alkej-433	1	120	changes	change	NOUN
alkej-433	1	121	of	of	ADP
alkej-433	1	122	the	the	DET
alkej-433	1	123	machine	machine	NOUN
alkej-433	1	124	tool	tool	NOUN
alkej-433	1	125	.	.	PUNCT
alkej-433	2	1	there	there	ADV
alkej-433	2	2	many	many	ADJ
alkej-433	2	3	factors	factor	NOUN
alkej-433	2	4	may	may	AUX
alkej-433	2	5	leads	lead	VERB
alkej-433	2	6	to	to	ADP
alkej-433	2	7	material	material	NOUN
alkej-433	2	8	loss	loss	NOUN
alkej-433	2	9	like	like	ADP
alkej-433	2	10	;	;	PUNCT
alkej-433	2	11	friction	friction	NOUN
alkej-433	2	12	,	,	PUNCT
alkej-433	2	13	corrosion	corrosion	NOUN
alkej-433	2	14	,	,	PUNCT
alkej-433	2	15	and	and	CCONJ
alkej-433	2	16	also	also	ADV
alkej-433	2	17	it	it	PRON
alkej-433	2	18	’s	’s	AUX
alkej-433	2	19	happened	happen	VERB
alkej-433	2	20	by	by	ADP
alkej-433	2	21	rubbing	rub	VERB
alkej-433	2	22	during	during	ADP
alkej-433	2	23	machining	machining	NOUN
alkej-433	2	24	processes	process	NOUN
alkej-433	2	25	between	between	ADP
alkej-433	2	26	the	the	DET
alkej-433	2	27	work	work	NOUN
alkej-433	2	28	piece	piece	NOUN
alkej-433	2	29	and	and	CCONJ
alkej-433	2	30	the	the	DET
alkej-433	2	31	tool	tool	NOUN
alkej-433	2	32	.	.	PUNCT
alkej-433	3	1	dimensional	dimensional	ADJ
alkej-433	3	2	accuracy	accuracy	NOUN
alkej-433	3	3	of	of	ADP
alkej-433	3	4	the	the	DET
alkej-433	3	5	work	work	NOUN
alkej-433	3	6	piece	piece	NOUN
alkej-433	3	7	,	,	PUNCT
alkej-433	3	8	and	and	CCONJ
alkej-433	3	9	also	also	ADV
alkej-433	3	10	the	the	DET
alkej-433	3	11	surface	surface	NOUN
alkej-433	3	12	finish	finish	NOUN
alkej-433	3	13	will	will	AUX
alkej-433	3	14	be	be	AUX
alkej-433	3	15	reducing	reduce	VERB
alkej-433	3	16	by	by	ADP
alkej-433	3	17	tool	tool	NOUN
alkej-433	3	18	wear	wear	NOUN
alkej-433	3	19	.	.	PUNCT
alkej-433	4	1	it	it	PRON
alkej-433	4	2	can	can	AUX
alkej-433	4	3	also	also	ADV
alkej-433	4	4	increase	increase	VERB
alkej-433	4	5	cutting	cut	VERB
alkej-433	4	6	force	force	NOUN
alkej-433	4	7	.	.	PUNCT
alkej-433	5	1	in	in	ADP
alkej-433	5	2	this	this	DET
alkej-433	5	3	study	study	NOUN
alkej-433	5	4	,	,	PUNCT
alkej-433	5	5	we	we	PRON
alkej-433	5	6	focused	focus	VERB
alkej-433	5	7	on	on	ADP
alkej-433	5	8	the	the	DET
alkej-433	5	9	effect	effect	NOUN
alkej-433	5	10	of	of	ADP
alkej-433	5	11	the	the	DET
alkej-433	5	12	coating	coating	NOUN
alkej-433	5	13	process	process	NOUN
alkej-433	5	14	on	on	ADP
alkej-433	5	15	crater	crater	NOUN
alkej-433	5	16	wear	wear	NOUN
alkej-433	5	17	problems	problem	NOUN
alkej-433	5	18	.	.	PUNCT
alkej-433	6	1	crater	crater	ADJ
alkej-433	6	2	wear	wear	NOUN
alkej-433	6	3	is	be	AUX
alkej-433	6	4	caused	cause	VERB
alkej-433	6	5	by	by	ADP
alkej-433	6	6	the	the	DET
alkej-433	6	7	flow	flow	NOUN
alkej-433	6	8	between	between	ADP
alkej-433	6	9	the	the	DET
alkej-433	6	10	chip	chip	NOUN
alkej-433	6	11	and	and	CCONJ
alkej-433	6	12	the	the	DET
alkej-433	6	13	rake	rake	NOUN
alkej-433	6	14	face	face	NOUN
alkej-433	6	15	of	of	ADP
alkej-433	6	16	the	the	DET
alkej-433	6	17	tool	tool	NOUN
alkej-433	6	18	,	,	PUNCT
alkej-433	6	19	whereas	whereas	SCONJ
alkej-433	6	20	flank	flank	ADJ
alkej-433	6	21	wear	wear	NOUN
alkej-433	6	22	is	be	AUX
alkej-433	6	23	caused	cause	VERB
alkej-433	6	24	by	by	ADP
alkej-433	6	25	the	the	DET
alkej-433	6	26	contact	contact	NOUN
alkej-433	6	27	between	between	ADP
alkej-433	6	28	the	the	DET
alkej-433	6	29	tool	tool	NOUN
alkej-433	6	30	and	and	CCONJ
alkej-433	6	31	the	the	DET
alkej-433	6	32	work	work	NOUN
alkej-433	6	33	piece	piece	NOUN
alkej-433	6	34	.	.	PUNCT
alkej-433	7	1	in	in	ADP
alkej-433	7	2	reducing	reduce	VERB
alkej-433	7	3	crater	crater	NOUN
alkej-433	7	4	wear	wear	NOUN
alkej-433	7	5	,	,	PUNCT
alkej-433	7	6	aluminum	aluminum	NOUN
alkej-433	7	7	titanium	titanium	NOUN
alkej-433	7	8	nitride	nitride	NOUN
alkej-433	7	9	(	(	PUNCT
alkej-433	7	10	altin	altin	PROPN
alkej-433	7	11	)	)	PUNCT
alkej-433	7	12	using	use	VERB
alkej-433	7	13	al0.67	al0.67	PROPN
alkej-433	7	14	ti0.33	ti0.33	PROPN
alkej-433	7	15	in	in	ADP
alkej-433	7	16	cathodic	cathodic	ADJ
alkej-433	7	17	arc	arc	NOUN
alkej-433	7	18	plating	plating	NOUN
alkej-433	7	19	system	system	NOUN
alkej-433	7	20	is	be	AUX
alkej-433	7	21	considered	consider	VERB
alkej-433	7	22	effective	effective	ADJ
alkej-433	7	23	as	as	ADP
alkej-433	7	24	a	a	DET
alkej-433	7	25	tools	tool	NOUN
alkej-433	7	26	coating	coating	NOUN
alkej-433	7	27	material	material	NOUN
alkej-433	7	28	.	.	PUNCT
alkej-433	8	1	in	in	ADP
alkej-433	8	2	reducing	reduce	VERB
alkej-433	8	3	flank	flank	NOUN
alkej-433	8	4	wear	wear	NOUN
alkej-433	8	5	,	,	PUNCT
alkej-433	8	6	altin	altin	PROPN
alkej-433	8	7	is	be	AUX
alkej-433	8	8	also	also	ADV
alkej-433	8	9	deemed	deem	VERB
alkej-433	8	10	as	as	ADP
alkej-433	8	11	the	the	DET
alkej-433	8	12	best	good	ADJ
alkej-433	8	13	tool	tool	NOUN
alkej-433	8	14	coating	coating	NOUN
alkej-433	8	15	material	material	NOUN
alkej-433	8	16	.	.	PUNCT
alkej-433	9	1	experimentally	experimentally	ADV
alkej-433	9	2	,	,	PUNCT
alkej-433	9	3	the	the	DET
alkej-433	9	4	use	use	NOUN
alkej-433	9	5	of	of	ADP
alkej-433	9	6	ti	ti	NOUN
alkej-433	9	7	/	/	SYM
alkej-433	9	8	altin	altin	ADJ
alkej-433	9	9	-	-	PUNCT
alkej-433	9	10	coated	coat	VERB
alkej-433	9	11	tools	tool	NOUN
alkej-433	9	12	has	have	AUX
alkej-433	9	13	been	be	AUX
alkej-433	9	14	proven	prove	VERB
alkej-433	9	15	effective	effective	ADJ
alkej-433	9	16	in	in	ADP
alkej-433	9	17	reducing	reduce	VERB
alkej-433	9	18	crater	crater	NOUN
alkej-433	9	19	wear	wear	NOUN
alkej-433	9	20	.	.	PUNCT
alkej-433	10	1	in	in	ADP
alkej-433	10	2	this	this	DET
alkej-433	10	3	study	study	NOUN
alkej-433	10	4	,	,	PUNCT
alkej-433	10	5	the	the	DET
alkej-433	10	6	roughness	roughness	NOUN
alkej-433	10	7	ra	ra	PROPN
alkej-433	10	8	values	value	NOUN
alkej-433	10	9	of	of	ADP
alkej-433	10	10	the	the	DET
alkej-433	10	11	(	(	PUNCT
alkej-433	10	12	ti	ti	NOUN
alkej-433	10	13	/	/	SYM
alkej-433	10	14	altin	altin	ADJ
alkej-433	10	15	)	)	PUNCT
alkej-433	10	16	coatings	coating	NOUN
alkej-433	10	17	were	be	AUX
alkej-433	10	18	(	(	PUNCT
alkej-433	10	19	0.14	0.14	NUM
alkej-433	10	20	,	,	PUNCT
alkej-433	10	21	0.15	0.15	NUM
alkej-433	10	22	,	,	PUNCT
alkej-433	10	23	0.23	0.23	NUM
alkej-433	10	24	,	,	PUNCT
alkej-433	10	25	0.02	0.02	NUM
alkej-433	10	26	,	,	PUNCT
alkej-433	10	27	0.21	0.21	NUM
alkej-433	10	28	)	)	PUNCT
alkej-433	10	29	µm	µm	NOUN
alkej-433	10	30	at	at	ADP
alkej-433	10	31	values	value	NOUN
alkej-433	10	32	of	of	ADP
alkej-433	10	33	layers	layer	NOUN
alkej-433	10	34	thickness	thickness	NOUN
alkej-433	10	35	(	(	PUNCT
alkej-433	10	36	1.138	1.138	NUM
alkej-433	10	37	,	,	PUNCT
alkej-433	10	38	1.518	1.518	NUM
alkej-433	10	39	,	,	PUNCT
alkej-433	10	40	1.735	1.735	NUM
alkej-433	10	41	,	,	PUNCT
alkej-433	10	42	2.717	2.717	NUM
alkej-433	10	43	,	,	PUNCT
alkej-433	10	44	3.0818	3.0818	NUM
alkej-433	10	45	)	)	PUNCT
alkej-433	10	46	µm	µm	NOUN
alkej-433	10	47	,	,	PUNCT
alkej-433	10	48	respectively	respectively	ADV
alkej-433	10	49	.	.	PUNCT
alkej-433	11	1	the	the	DET
alkej-433	11	2	lowest	low	ADJ
alkej-433	11	3	cof	cof	PROPN
alkej-433	11	4	appeared	appear	VERB
alkej-433	11	5	at	at	ADP
alkej-433	11	6	thickness	thickness	NOUN
alkej-433	11	7	2.717	2.717	NUM
alkej-433	11	8	µm	µm	ADP
alkej-433	11	9	and	and	CCONJ
alkej-433	11	10	the	the	DET
alkej-433	11	11	high	high	ADJ
alkej-433	11	12	coefficient	coefficient	NOUN
alkej-433	11	13	of	of	ADP
alkej-433	11	14	friction	friction	NOUN
alkej-433	11	15	of	of	ADP
alkej-433	11	16	the	the	DET
alkej-433	11	17	ti	ti	NOUN
alkej-433	11	18	/	/	SYM
alkej-433	11	19	altin	altin	ADJ
alkej-433	11	20	coating	coating	NOUN
alkej-433	11	21	was	be	AUX
alkej-433	11	22	a	a	DET
alkej-433	11	23	result	result	NOUN
alkej-433	11	24	of	of	ADP
alkej-433	11	25	high	high	ADJ
alkej-433	11	26	roughness	roughness	NOUN
alkej-433	11	27	and	and	CCONJ
alkej-433	11	28	the	the	DET
alkej-433	11	29	large	large	ADJ
alkej-433	11	30	contact	contact	NOUN
alkej-433	11	31	surface	surface	NOUN
alkej-433	11	32	area	area	NOUN
alkej-433	11	33	of	of	ADP
alkej-433	11	34	the	the	DET
alkej-433	11	35	system	system	NOUN
alkej-433	11	36	coating	coat	VERB
alkej-433	11	37	steel	steel	NOUN
alkej-433	11	38	ball	ball	NOUN
alkej-433	11	39	.	.	PUNCT
alkej-433	12	1	the	the	DET
alkej-433	12	2	two	two	NUM
alkej-433	12	3	most	most	ADV
alkej-433	12	4	important	important	ADJ
alkej-433	12	5	parameters	parameter	NOUN
alkej-433	12	6	used	use	VERB
alkej-433	12	7	to	to	PART
alkej-433	12	8	measure	measure	VERB
alkej-433	12	9	crater	crater	NOUN
alkej-433	12	10	wear	wear	NOUN
alkej-433	12	11	are	be	AUX
alkej-433	12	12	length	length	NOUN
alkej-433	12	13	and	and	CCONJ
alkej-433	12	14	width	width	NOUN
alkej-433	12	15	of	of	ADP
alkej-433	12	16	wear	wear	NOUN
alkej-433	12	17	.	.	PUNCT
alkej-433	13	1	keywords	keyword	NOUN
alkej-433	13	2	:	:	PUNCT
alkej-433	13	3	tool	tool	NOUN
alkej-433	13	4	life	life	NOUN
alkej-433	13	5	,	,	PUNCT
alkej-433	13	6	work	work	NOUN
alkej-433	13	7	piece	piece	NOUN
alkej-433	13	8	,	,	PUNCT
alkej-433	13	9	crater	crater	NOUN
alkej-433	13	10	wear	wear	NOUN
alkej-433	13	11	,	,	PUNCT
alkej-433	13	12	altin	altin	PROPN
alkej-433	13	13	,	,	PUNCT
alkej-433	13	14	cof	cof	PROPN
alkej-433	13	15	.	.	PROPN
alkej-433	13	16	1	1	NUM
alkej-433	13	17	.	.	X
alkej-433	14	1	introduction	introduction	NOUN
alkej-433	14	2	tool	tool	NOUN
alkej-433	14	3	wear	wear	VERB
alkej-433	14	4	is	be	AUX
alkej-433	14	5	a	a	DET
alkej-433	14	6	major	major	ADJ
alkej-433	14	7	problem	problem	NOUN
alkej-433	14	8	in	in	ADP
alkej-433	14	9	machining	machine	VERB
alkej-433	14	10	operations	operation	NOUN
alkej-433	14	11	.	.	PUNCT
alkej-433	15	1	according	accord	VERB
alkej-433	15	2	to	to	ADP
alkej-433	15	3	[	[	X
alkej-433	15	4	1	1	NUM
alkej-433	15	5	]	]	PUNCT
alkej-433	15	6	,	,	PUNCT
alkej-433	15	7	tool	tool	NOUN
alkej-433	15	8	wear	wear	VERB
alkej-433	15	9	is	be	AUX
alkej-433	15	10	a	a	DET
alkej-433	15	11	gradual	gradual	ADJ
alkej-433	15	12	change	change	NOUN
alkej-433	15	13	in	in	ADP
alkej-433	15	14	the	the	DET
alkej-433	15	15	shape	shape	NOUN
alkej-433	15	16	of	of	ADP
alkej-433	15	17	the	the	DET
alkej-433	15	18	machine	machine	NOUN
alkej-433	15	19	tool	tool	NOUN
alkej-433	15	20	as	as	ADP
alkej-433	15	21	a	a	DET
alkej-433	15	22	result	result	NOUN
alkej-433	15	23	of	of	ADP
alkej-433	15	24	material	material	ADJ
alkej-433	15	25	loss	loss	NOUN
alkej-433	15	26	.	.	PUNCT
alkej-433	16	1	material	material	NOUN
alkej-433	16	2	loss	loss	NOUN
alkej-433	16	3	occurs	occur	VERB
alkej-433	16	4	because	because	SCONJ
alkej-433	16	5	of	of	ADP
alkej-433	16	6	friction	friction	NOUN
alkej-433	16	7	,	,	PUNCT
alkej-433	16	8	abrasion	abrasion	NOUN
alkej-433	16	9	,	,	PUNCT
alkej-433	16	10	and	and	CCONJ
alkej-433	16	11	the	the	DET
alkej-433	16	12	rubbing	rub	VERB
alkej-433	16	13	process	process	NOUN
alkej-433	16	14	that	that	PRON
alkej-433	16	15	take	take	VERB
alkej-433	16	16	place	place	NOUN
alkej-433	16	17	between	between	ADP
alkej-433	16	18	work	work	NOUN
alkej-433	16	19	piece	piece	NOUN
alkej-433	16	20	and	and	CCONJ
alkej-433	16	21	the	the	DET
alkej-433	16	22	tool	tool	NOUN
alkej-433	16	23	.	.	PUNCT
alkej-433	17	1	during	during	ADP
alkej-433	17	2	machining	machining	NOUN
alkej-433	17	3	.	.	PUNCT
alkej-433	18	1	tool	tool	NOUN
alkej-433	18	2	wear	wear	VERB
alkej-433	18	3	results	result	NOUN
alkej-433	18	4	from	from	ADP
alkej-433	18	5	progressive	progressive	ADJ
alkej-433	18	6	loss	loss	NOUN
alkej-433	18	7	and	and	CCONJ
alkej-433	18	8	the	the	DET
alkej-433	18	9	degradation	degradation	NOUN
alkej-433	18	10	of	of	ADP
alkej-433	18	11	the	the	DET
alkej-433	18	12	machining	machining	NOUN
alkej-433	18	13	tool	tool	NOUN
alkej-433	18	14	material	material	NOUN
alkej-433	18	15	.	.	PUNCT
alkej-433	19	1	tool	tool	NOUN
alkej-433	19	2	wear	wear	VERB
alkej-433	19	3	may	may	AUX
alkej-433	19	4	decrease	decrease	VERB
alkej-433	19	5	many	many	ADJ
alkej-433	19	6	important	important	ADJ
alkej-433	19	7	properties	property	NOUN
alkej-433	19	8	in	in	ADP
alkej-433	19	9	the	the	DET
alkej-433	19	10	work	work	NOUN
alkej-433	19	11	piece	piece	NOUN
alkej-433	19	12	like	like	ADP
alkej-433	19	13	surface	surface	NOUN
alkej-433	19	14	finish	finish	NOUN
alkej-433	19	15	,	,	PUNCT
alkej-433	19	16	dimensional	dimensional	ADJ
alkej-433	19	17	tolerance	tolerance	NOUN
alkej-433	19	18	,	,	PUNCT
alkej-433	19	19	and	and	CCONJ
alkej-433	19	20	accuracy	accuracy	NOUN
alkej-433	19	21	.	.	PUNCT
alkej-433	20	1	moreover	moreover	ADV
alkej-433	20	2	,	,	PUNCT
alkej-433	20	3	tool	tool	NOUN
alkej-433	20	4	wear	wear	NOUN
alkej-433	20	5	may	may	AUX
alkej-433	20	6	increase	increase	VERB
alkej-433	20	7	machining	machining	NOUN
alkej-433	20	8	forces	force	NOUN
alkej-433	20	9	and	and	CCONJ
alkej-433	20	10	decrease	decrease	VERB
alkej-433	20	11	the	the	DET
alkej-433	20	12	production	production	NOUN
alkej-433	20	13	efficiency	efficiency	NOUN
alkej-433	20	14	of	of	ADP
alkej-433	20	15	the	the	DET
alkej-433	20	16	work	work	NOUN
alkej-433	20	17	piece	piece	NOUN
alkej-433	21	1	[	[	X
alkej-433	21	2	1	1	NUM
alkej-433	21	3	,	,	PUNCT
alkej-433	21	4	2	2	NUM
alkej-433	21	5	]	]	PUNCT
alkej-433	21	6	.	.	PUNCT
alkej-433	22	1	tool	tool	NOUN
alkej-433	22	2	wear	wear	VERB
alkej-433	22	3	may	may	AUX
alkej-433	22	4	also	also	ADV
alkej-433	22	5	increase	increase	VERB
alkej-433	22	6	the	the	DET
alkej-433	22	7	vibrations	vibration	NOUN
alkej-433	22	8	of	of	ADP
alkej-433	22	9	the	the	DET
alkej-433	22	10	production	production	NOUN
alkej-433	22	11	machine	machine	NOUN
alkej-433	22	12	during	during	ADP
alkej-433	22	13	operation	operation	NOUN
alkej-433	22	14	as	as	ADV
alkej-433	22	15	well	well	ADV
alkej-433	22	16	as	as	ADP
alkej-433	22	17	the	the	DET
alkej-433	22	18	temperature	temperature	NOUN
alkej-433	22	19	at	at	ADP
alkej-433	22	20	the	the	DET
alkej-433	22	21	contact	contact	NOUN
alkej-433	22	22	points	point	NOUN
alkej-433	22	23	between	between	ADP
alkej-433	22	24	the	the	DET
alkej-433	22	25	tool	tool	NOUN
alkej-433	22	26	and	and	CCONJ
alkej-433	22	27	the	the	DET
alkej-433	22	28	work	work	NOUN
alkej-433	22	29	piece	piece	NOUN
alkej-433	22	30	.	.	PUNCT
alkej-433	23	1	researchers	researcher	NOUN
alkej-433	23	2	have	have	AUX
alkej-433	23	3	identified	identify	VERB
alkej-433	23	4	tool	tool	NOUN
alkej-433	23	5	wear	wear	VERB
alkej-433	23	6	as	as	ADP
alkej-433	23	7	the	the	DET
alkej-433	23	8	dominant	dominant	ADJ
alkej-433	23	9	problem	problem	NOUN
alkej-433	23	10	in	in	ADP
alkej-433	23	11	the	the	DET
alkej-433	23	12	life	life	NOUN
alkej-433	23	13	of	of	ADP
alkej-433	23	14	machine	machine	NOUN
alkej-433	23	15	tools	tool	NOUN
alkej-433	23	16	.	.	PUNCT
alkej-433	24	1	therefore	therefore	ADV
alkej-433	24	2	,	,	PUNCT
alkej-433	24	3	reducing	reduce	VERB
alkej-433	24	4	the	the	DET
alkej-433	24	5	wear	wear	NOUN
alkej-433	24	6	of	of	ADP
alkej-433	24	7	machine	machine	NOUN
alkej-433	24	8	tools	tool	NOUN
alkej-433	24	9	enhances	enhance	VERB
alkej-433	24	10	their	their	PRON
alkej-433	24	11	life	life	NOUN
alkej-433	24	12	span	span	NOUN
alkej-433	24	13	.	.	PUNCT
alkej-433	25	1	although	although	SCONJ
alkej-433	25	2	cutting	cut	VERB
alkej-433	25	3	fluids	fluid	NOUN
alkej-433	25	4	are	be	AUX
alkej-433	25	5	commonly	commonly	ADV
alkej-433	25	6	believed	believe	VERB
alkej-433	25	7	to	to	PART
alkej-433	25	8	be	be	AUX
alkej-433	25	9	capable	capable	ADJ
alkej-433	25	10	of	of	ADP
alkej-433	25	11	reducing	reduce	VERB
alkej-433	25	12	tool	tool	NOUN
alkej-433	25	13	wear	wear	NOUN
alkej-433	25	14	,	,	PUNCT
alkej-433	25	15	a	a	DET
alkej-433	25	16	research	research	NOUN
alkej-433	25	17	has	have	AUX
alkej-433	25	18	shown	show	VERB
alkej-433	25	19	that	that	SCONJ
alkej-433	25	20	these	these	DET
alkej-433	25	21	fluids	fluid	NOUN
alkej-433	25	22	do	do	AUX
alkej-433	25	23	not	not	PART
alkej-433	25	24	necessarily	necessarily	ADV
alkej-433	25	25	reduce	reduce	VERB
alkej-433	25	26	the	the	DET
alkej-433	25	27	wear	wear	NOUN
alkej-433	25	28	of	of	ADP
alkej-433	25	29	machine	machine	NOUN
alkej-433	25	30	tools	tool	NOUN
alkej-433	25	31	[	[	X
alkej-433	25	32	2	2	NUM
alkej-433	25	33	]	]	PUNCT
alkej-433	25	34	.	.	PUNCT
alkej-433	26	1	the	the	DET
alkej-433	26	2	applications	application	NOUN
alkej-433	26	3	of	of	ADP
alkej-433	26	4	tin	tin	NOUN
alkej-433	26	5	coatings	coating	NOUN
alkej-433	26	6	and	and	CCONJ
alkej-433	26	7	their	their	PRON
alkej-433	26	8	properties	property	NOUN
alkej-433	26	9	have	have	AUX
alkej-433	26	10	been	be	AUX
alkej-433	26	11	wildly	wildly	ADV
alkej-433	26	12	explored	explore	VERB
alkej-433	26	13	by	by	ADP
alkej-433	26	14	many	many	ADJ
alkej-433	26	15	researchers	researcher	NOUN
alkej-433	26	16	.	.	PUNCT
alkej-433	27	1	other	other	ADJ
alkej-433	27	2	thin	thin	ADJ
alkej-433	27	3	coatings	coating	NOUN
alkej-433	27	4	are	be	AUX
alkej-433	27	5	usually	usually	ADV
alkej-433	27	6	added	add	VERB
alkej-433	27	7	to	to	PART
alkej-433	27	8	prolong	prolong	VERB
alkej-433	27	9	the	the	DET
alkej-433	27	10	life	life	NOUN
alkej-433	27	11	span	span	NOUN
alkej-433	27	12	of	of	ADP
alkej-433	27	13	the	the	DET
alkej-433	27	14	elements	element	NOUN
alkej-433	27	15	comprising	comprise	VERB
alkej-433	27	16	industrial	industrial	ADJ
alkej-433	27	17	parts	part	NOUN
alkej-433	27	18	,	,	PUNCT
alkej-433	27	19	such	such	ADJ
alkej-433	27	20	as	as	ADP
alkej-433	27	21	al	al	PROPN
alkej-433	27	22	,	,	PUNCT
alkej-433	27	23	ti	ti	PROPN
alkej-433	27	24	and	and	CCONJ
alkej-433	27	25	cr	cr	NOUN
alkej-433	27	26	,	,	PUNCT
alkej-433	27	27	as	as	ADV
alkej-433	27	28	well	well	ADV
alkej-433	27	29	as	as	ADP
alkej-433	27	30	to	to	PART
alkej-433	27	31	increase	increase	VERB
alkej-433	27	32	oxidation	oxidation	NOUN
alkej-433	27	33	kamil	kamil	PROPN
alkej-433	27	34	j.	j.	PROPN
alkej-433	27	35	kadhim	kadhim	PROPN
alkej-433	27	36	al	al	PROPN
alkej-433	27	37	-	-	PUNCT
alkej-433	27	38	khwarizmi	khwarizmi	PROPN
alkej-433	27	39	engineering	engineering	NOUN
alkej-433	27	40	journal	journal	PROPN
alkej-433	27	41	,	,	PUNCT
alkej-433	27	42	vol	vol	NOUN
alkej-433	27	43	.	.	PROPN
alkej-433	27	44	13	13	NUM
alkej-433	27	45	,	,	PUNCT
alkej-433	27	46	no	no	INTJ
alkej-433	27	47	.	.	NOUN
alkej-433	27	48	4	4	NUM
alkej-433	27	49	,	,	PUNCT
alkej-433	27	50	p.p	p.p	PROPN
alkej-433	27	51	.	.	NOUN
alkej-433	27	52	5868	5868	NUM
alkej-433	27	53	(	(	PUNCT
alkej-433	27	54	2017	2017	NUM
alkej-433	27	55	)	)	PUNCT
alkej-433	27	56	59	59	NUM
alkej-433	27	57	resistance	resistance	NOUN
alkej-433	27	58	at	at	ADP
alkej-433	27	59	temperatures	temperature	NOUN
alkej-433	27	60	above	above	ADP
alkej-433	27	61	450	450	NUM
alkej-433	27	62	°	°	NOUN
alkej-433	27	63	c	c	NOUN
alkej-433	27	64	.	.	PUNCT
alkej-433	28	1	in	in	ADP
alkej-433	28	2	engineering	engineering	NOUN
alkej-433	28	3	applications	application	NOUN
alkej-433	28	4	tialn	tialn	NOUN
alkej-433	28	5	coatings	coating	NOUN
alkej-433	28	6	was	be	AUX
alkej-433	28	7	developed	develop	VERB
alkej-433	28	8	to	to	PART
alkej-433	28	9	be	be	AUX
alkej-433	28	10	an	an	DET
alkej-433	28	11	alternative	alternative	NOUN
alkej-433	28	12	to	to	ADP
alkej-433	28	13	tin	tin	ADJ
alkej-433	28	14	coatings	coating	NOUN
alkej-433	28	15	[	[	X
alkej-433	28	16	68	68	NUM
alkej-433	28	17	]	]	PUNCT
alkej-433	28	18	.	.	PUNCT
alkej-433	29	1	the	the	DET
alkej-433	29	2	next	next	ADJ
alkej-433	29	3	logical	logical	ADJ
alkej-433	29	4	step	step	NOUN
alkej-433	29	5	in	in	ADP
alkej-433	29	6	improving	improve	VERB
alkej-433	29	7	properties	property	NOUN
alkej-433	29	8	(	(	PUNCT
alkej-433	29	9	high	high	ADJ
alkej-433	29	10	coefficient	coefficient	NOUN
alkej-433	29	11	of	of	ADP
alkej-433	29	12	friction	friction	NOUN
alkej-433	29	13	[	[	X
alkej-433	29	14	cof	cof	X
alkej-433	29	15	]	]	PUNCT
alkej-433	29	16	and	and	CCONJ
alkej-433	29	17	refractoriness	refractoriness	NOUN
alkej-433	29	18	)	)	PUNCT
alkej-433	29	19	is	be	AUX
alkej-433	29	20	to	to	PART
alkej-433	29	21	develop	develop	VERB
alkej-433	29	22	tial	tial	ADJ
alkej-433	29	23	-based	-based	ADJ
alkej-433	29	24	coatings	coating	NOUN
alkej-433	29	25	as	as	ADP
alkej-433	29	26	thermal	thermal	ADJ
alkej-433	29	27	barriers	barrier	NOUN
alkej-433	29	28	[	[	X
alkej-433	29	29	9	9	NUM
alkej-433	29	30	]	]	PUNCT
alkej-433	29	31	.	.	PUNCT
alkej-433	30	1	in	in	ADP
alkej-433	30	2	fact	fact	NOUN
alkej-433	30	3	,	,	PUNCT
alkej-433	30	4	further	further	ADJ
alkej-433	30	5	research	research	NOUN
alkej-433	30	6	has	have	AUX
alkej-433	30	7	indicated	indicate	VERB
alkej-433	30	8	that	that	SCONJ
alkej-433	30	9	cutting	cut	VERB
alkej-433	30	10	fluids	fluid	NOUN
alkej-433	30	11	can	can	AUX
alkej-433	30	12	promote	promote	VERB
alkej-433	30	13	tool	tool	NOUN
alkej-433	30	14	wear	wear	VERB
alkej-433	30	15	[	[	X
alkej-433	30	16	3	3	NUM
alkej-433	30	17	]	]	PUNCT
alkej-433	30	18	.	.	PUNCT
alkej-433	31	1	two	two	NUM
alkej-433	31	2	common	common	ADJ
alkej-433	31	3	methods	method	NOUN
alkej-433	31	4	have	have	AUX
alkej-433	31	5	been	be	AUX
alkej-433	31	6	proven	prove	VERB
alkej-433	31	7	effective	effective	ADJ
alkej-433	31	8	in	in	ADP
alkej-433	31	9	reducing	reduce	VERB
alkej-433	31	10	tool	tool	NOUN
alkej-433	31	11	wear	wear	VERB
alkej-433	31	12	[	[	X
alkej-433	31	13	910].these	910].these	ADJ
alkej-433	31	14	methods	method	NOUN
alkej-433	31	15	are	be	AUX
alkej-433	31	16	the	the	DET
alkej-433	31	17	operation	operation	NOUN
alkej-433	31	18	of	of	ADP
alkej-433	31	19	the	the	DET
alkej-433	31	20	machine	machine	NOUN
alkej-433	31	21	under	under	ADP
alkej-433	31	22	conditions	condition	NOUN
alkej-433	31	23	that	that	PRON
alkej-433	31	24	cause	cause	VERB
alkej-433	31	25	lower	low	ADJ
alkej-433	31	26	tool	tool	NOUN
alkej-433	31	27	wear	wear	VERB
alkej-433	31	28	and	and	CCONJ
alkej-433	31	29	the	the	DET
alkej-433	31	30	tool	tool	NOUN
alkej-433	31	31	and	and	CCONJ
alkej-433	31	32	the	the	DET
alkej-433	31	33	incorporation	incorporation	NOUN
alkej-433	31	34	of	of	ADP
alkej-433	31	35	wearresistant	wearresistant	ADJ
alkej-433	31	36	materials	material	NOUN
alkej-433	31	37	into	into	ADP
alkej-433	31	38	the	the	DET
alkej-433	31	39	machine	machine	NOUN
alkej-433	31	40	tool	tool	NOUN
alkej-433	31	41	.	.	PUNCT
alkej-433	32	1	ti	ti	X
alkej-433	32	2	/	/	SYM
alkej-433	32	3	altin	altin	ADJ
alkej-433	32	4	coatings	coating	NOUN
alkej-433	32	5	using	use	VERB
alkej-433	32	6	al0.67ti0.33	al0.67ti0.33	PROPN
alkej-433	32	7	cathodes	cathode	NOUN
alkej-433	32	8	in	in	ADP
alkej-433	32	9	a	a	DET
alkej-433	32	10	cathodic	cathodic	ADJ
alkej-433	32	11	ion	ion	NOUN
alkej-433	32	12	plating	plating	NOUN
alkej-433	32	13	system	system	NOUN
alkej-433	32	14	are	be	AUX
alkej-433	32	15	report	report	NOUN
alkej-433	32	16	on	on	ADP
alkej-433	32	17	in	in	ADP
alkej-433	32	18	this	this	DET
alkej-433	32	19	paper	paper	NOUN
alkej-433	32	20	.	.	PUNCT
alkej-433	33	1	the	the	DET
alkej-433	33	2	effects	effect	NOUN
alkej-433	33	3	of	of	ADP
alkej-433	33	4	thickness	thickness	NOUN
alkej-433	33	5	layer	layer	NOUN
alkej-433	33	6	on	on	ADP
alkej-433	33	7	the	the	DET
alkej-433	33	8	mechanical	mechanical	ADJ
alkej-433	33	9	properties	property	NOUN
alkej-433	33	10	of	of	ADP
alkej-433	33	11	the	the	DET
alkej-433	33	12	coatings	coating	NOUN
alkej-433	33	13	,	,	PUNCT
alkej-433	33	14	and	and	CCONJ
alkej-433	33	15	modulation	modulation	NOUN
alkej-433	33	16	period	period	NOUN
alkej-433	33	17	are	be	AUX
alkej-433	33	18	determined	determine	VERB
alkej-433	33	19	.	.	PUNCT
alkej-433	34	1	2	2	X
alkej-433	34	2	.	.	X
alkej-433	34	3	experimental	experimental	ADJ
alkej-433	34	4	details	detail	NOUN
alkej-433	34	5	the	the	DET
alkej-433	34	6	multilayer	multilayer	NOUN
alkej-433	34	7	coating	coating	NOUN
alkej-433	34	8	of	of	ADP
alkej-433	34	9	cutting	cut	VERB
alkej-433	34	10	tools	tool	NOUN
alkej-433	34	11	using	use	VERB
alkej-433	34	12	ti	ti	NOUN
alkej-433	34	13	/	/	SYM
alkej-433	34	14	altin	altin	NOUN
alkej-433	34	15	is	be	AUX
alkej-433	34	16	important	important	ADJ
alkej-433	34	17	in	in	ADP
alkej-433	34	18	improving	improve	VERB
alkej-433	34	19	cutting	cutting	NOUN
alkej-433	34	20	tools	tool	NOUN
alkej-433	34	21	and	and	CCONJ
alkej-433	34	22	their	their	PRON
alkej-433	34	23	life	life	NOUN
alkej-433	34	24	span	span	NOUN
alkej-433	34	25	(	(	PUNCT
alkej-433	34	26	figure1	figure1	ADV
alkej-433	34	27	:	:	PUNCT
alkej-433	34	28	a	a	PRON
alkej-433	34	29	&	&	CCONJ
alkej-433	34	30	b	b	NOUN
alkej-433	34	31	)	)	PUNCT
alkej-433	34	32	.	.	PUNCT
alkej-433	35	1	arc	arc	NOUN
alkej-433	35	2	system	system	NOUN
alkej-433	35	3	technology	technology	NOUN
alkej-433	35	4	was	be	AUX
alkej-433	35	5	developed	develop	VERB
alkej-433	35	6	by	by	ADP
alkej-433	35	7	j&l	j&l	PROPN
alkej-433	35	8	technology	technology	PROPN
alkej-433	35	9	korea	korea	PROPN
alkej-433	35	10	(	(	PUNCT
alkej-433	35	11	model	model	PROPN
alkej-433	35	12	legend	legend	PROPN
alkej-433	35	13	:	:	PUNCT
alkej-433	35	14	h.i.p	h.i.p	ADJ
alkej-433	35	15	iii	iii	NOUN
alkej-433	35	16	)	)	PUNCT
alkej-433	35	17	are	be	AUX
alkej-433	35	18	conducted	conduct	VERB
alkej-433	35	19	in	in	ADP
alkej-433	35	20	this	this	DET
alkej-433	35	21	experimental	experimental	ADJ
alkej-433	35	22	study	study	NOUN
alkej-433	35	23	.	.	PUNCT
alkej-433	36	1	this	this	DET
alkej-433	36	2	system	system	NOUN
alkej-433	36	3	are	be	AUX
alkej-433	36	4	involves	involve	NOUN
alkej-433	36	5	from	from	ADP
alkej-433	36	6	four	four	NUM
alkej-433	36	7	rounds	round	NOUN
alkej-433	36	8	alti	alti	NOUN
alkej-433	36	9	0.67	0.67	NUM
alkej-433	36	10	:	:	PUNCT
alkej-433	36	11	33	33	NUM
alkej-433	36	12	%	%	NOUN
alkej-433	36	13	target	target	NOUN
alkej-433	36	14	and	and	CCONJ
alkej-433	36	15	four	four	NUM
alkej-433	36	16	ti	ti	NOUN
alkej-433	36	17	targets	target	VERB
alkej-433	36	18	diameter	diameter	NOUN
alkej-433	36	19	of	of	ADP
alkej-433	36	20	(	(	PUNCT
alkej-433	36	21	15	15	NUM
alkej-433	36	22	×150	×150	PROPN
alkej-433	36	23	)	)	PUNCT
alkej-433	36	24	mm	mm	INTJ
alkej-433	36	25	.	.	PUNCT
alkej-433	37	1	the	the	DET
alkej-433	37	2	holder	holder	NOUN
alkej-433	37	3	of	of	ADP
alkej-433	37	4	substrate	substrate	NOUN
alkej-433	37	5	jig	jig	NOUN
alkej-433	37	6	contains	contain	VERB
alkej-433	37	7	from	from	ADP
alkej-433	37	8	triple	triple	ADJ
alkej-433	37	9	rotations	rotation	NOUN
alkej-433	37	10	with	with	ADP
alkej-433	37	11	six	six	NUM
alkej-433	37	12	axes	axis	NOUN
alkej-433	37	13	,	,	PUNCT
alkej-433	37	14	as	as	SCONJ
alkej-433	37	15	shown	show	VERB
alkej-433	37	16	in	in	ADP
alkej-433	37	17	figure	figure	NOUN
alkej-433	37	18	1	1	NUM
alkej-433	37	19	.	.	PUNCT
alkej-433	38	1	the	the	DET
alkej-433	38	2	thermocouple	thermocouple	NOUN
alkej-433	38	3	is	be	AUX
alkej-433	38	4	located	locate	VERB
alkej-433	38	5	at	at	ADP
alkej-433	38	6	the	the	DET
alkej-433	38	7	back	back	NOUN
alkej-433	38	8	of	of	ADP
alkej-433	38	9	the	the	DET
alkej-433	38	10	substrate	substrate	NOUN
alkej-433	38	11	jig	jig	NOUN
alkej-433	38	12	holder	holder	NOUN
alkej-433	38	13	with	with	ADP
alkej-433	38	14	high	high	ADJ
alkej-433	38	15	,	,	PUNCT
alkej-433	38	16	mid	mid	ADJ
alkej-433	38	17	,	,	PUNCT
alkej-433	38	18	and	and	CCONJ
alkej-433	38	19	low	low	ADJ
alkej-433	38	20	levels	level	NOUN
alkej-433	38	21	from	from	ADP
alkej-433	38	22	top	top	NOUN
alkej-433	38	23	to	to	ADP
alkej-433	38	24	bottom	bottom	NOUN
alkej-433	38	25	.	.	PUNCT
alkej-433	39	1	the	the	DET
alkej-433	39	2	distance	distance	NOUN
alkej-433	39	3	between	between	ADP
alkej-433	39	4	the	the	DET
alkej-433	39	5	thermocouple	thermocouple	NOUN
alkej-433	39	6	and	and	CCONJ
alkej-433	39	7	the	the	DET
alkej-433	39	8	substrate	substrate	NOUN
alkej-433	39	9	holder	holder	NOUN
alkej-433	39	10	is	be	AUX
alkej-433	39	11	approximately	approximately	ADV
alkej-433	39	12	20	20	NUM
alkej-433	39	13	mm	mm	NOUN
alkej-433	39	14	–	–	PUNCT
alkej-433	39	15	30	30	NUM
alkej-433	39	16	mm	mm	NOUN
alkej-433	39	17	.	.	PUNCT
alkej-433	40	1	(	(	PUNCT
alkej-433	40	2	a	a	X
alkej-433	40	3	)	)	PUNCT
alkej-433	40	4	(	(	PUNCT
alkej-433	40	5	b	b	X
alkej-433	40	6	)	)	PUNCT
alkej-433	40	7	fig	fig	NOUN
alkej-433	40	8	.	.	PUNCT
alkej-433	41	1	1	1	X
alkej-433	41	2	.	.	X
alkej-433	41	3	(	(	PUNCT
alkej-433	41	4	a	a	X
alkej-433	41	5	)	)	PUNCT
alkej-433	41	6	pvd	pvd	PROPN
alkej-433	41	7	in	in	ADP
alkej-433	41	8	cathodic	cathodic	NOUN
alkej-433	41	9	arc	arc	NOUN
alkej-433	41	10	plating	plating	NOUN
alkej-433	41	11	system	system	NOUN
alkej-433	41	12	technology	technology	NOUN
alkej-433	41	13	sophisticated	sophisticate	VERB
alkej-433	41	14	by	by	ADP
alkej-433	41	15	j&l	j&l	PROPN
alkej-433	41	16	korea	korea	PROPN
alkej-433	41	17	(	(	PUNCT
alkej-433	41	18	model	model	PROPN
alkej-433	41	19	legend	legend	PROPN
alkej-433	41	20	:	:	PUNCT
alkej-433	41	21	h.i.p	h.i.p	ADJ
alkej-433	41	22	iii	iii	NOUN
alkej-433	41	23	)	)	PUNCT
alkej-433	41	24	.	.	PUNCT
alkej-433	42	1	(	(	PUNCT
alkej-433	42	2	b	b	X
alkej-433	42	3	)	)	PUNCT
alkej-433	42	4	substrate	substrate	NOUN
alkej-433	42	5	holder	holder	NOUN
alkej-433	42	6	outside	outside	ADP
alkej-433	42	7	coating	coating	NOUN
alkej-433	42	8	chamber	chamber	PROPN
alkej-433	42	9	.	.	PUNCT
alkej-433	43	1	this	this	PRON
alkej-433	43	2	is	be	AUX
alkej-433	43	3	feedback	feedback	NOUN
alkej-433	43	4	loop	loop	NOUN
alkej-433	43	5	in	in	ADP
alkej-433	43	6	the	the	DET
alkej-433	43	7	chamber	chamber	NOUN
alkej-433	43	8	regulates	regulate	VERB
alkej-433	43	9	the	the	DET
alkej-433	43	10	power	power	NOUN
alkej-433	43	11	of	of	ADP
alkej-433	43	12	the	the	DET
alkej-433	43	13	induction	induction	NOUN
alkej-433	43	14	heater	heater	NOUN
alkej-433	43	15	for	for	ADP
alkej-433	43	16	temperature	temperature	NOUN
alkej-433	43	17	control	control	NOUN
alkej-433	43	18	.	.	PUNCT
alkej-433	44	1	with	with	ADP
alkej-433	44	2	the	the	DET
alkej-433	44	3	presence	presence	NOUN
alkej-433	44	4	of	of	ADP
alkej-433	44	5	nitrogen	nitrogen	NOUN
alkej-433	44	6	gas	gas	NOUN
alkej-433	44	7	in	in	ADP
alkej-433	44	8	the	the	DET
alkej-433	44	9	coating	coating	NOUN
alkej-433	44	10	chamber	chamber	NOUN
alkej-433	44	11	;	;	PUNCT
alkej-433	44	12	altin	altin	ADJ
alkej-433	44	13	coating	coating	NOUN
alkej-433	44	14	will	will	AUX
alkej-433	44	15	deposited	deposit	VERB
alkej-433	44	16	on	on	ADP
alkej-433	44	17	the	the	DET
alkej-433	44	18	substrate	substrate	NOUN
alkej-433	44	19	,	,	PUNCT
alkej-433	44	20	and	and	CCONJ
alkej-433	44	21	by	by	ADP
alkej-433	44	22	the	the	DET
alkej-433	44	23	bombardment	bombardment	NOUN
alkej-433	44	24	of	of	ADP
alkej-433	44	25	argon	argon	NOUN
alkej-433	44	26	ion	ion	NOUN
alkej-433	44	27	;	;	PUNCT
alkej-433	44	28	the	the	DET
alkej-433	44	29	arc	arc	NOUN
alkej-433	44	30	of	of	ADP
alkej-433	44	31	the	the	DET
alkej-433	44	32	target	target	NOUN
alkej-433	44	33	material	material	NOUN
alkej-433	44	34	(	(	PUNCT
alkej-433	44	35	ti	ti	NOUN
alkej-433	44	36	and	and	CCONJ
alkej-433	44	37	alti	alti	NOUN
alkej-433	44	38	)	)	PUNCT
alkej-433	44	39	will	will	AUX
alkej-433	44	40	induced	induce	VERB
alkej-433	44	41	.	.	PUNCT
alkej-433	45	1	the	the	DET
alkej-433	45	2	substrate	substrate	NOUN
alkej-433	45	3	is	be	AUX
alkej-433	45	4	a	a	DET
alkej-433	45	5	wc	wc	PROPN
alkej-433	45	6	square	square	PROPN
alkej-433	45	7	cutting	cutting	NOUN
alkej-433	45	8	insert	insert	NOUN
alkej-433	45	9	that	that	SCONJ
alkej-433	45	10	measures	measure	NOUN
alkej-433	45	11	(	(	PUNCT
alkej-433	45	12	3.18×	3.18×	NUM
alkej-433	45	13	12.7	12.7	NUM
alkej-433	45	14	×	×	NOUN
alkej-433	45	15	12.7	12.7	NUM
alkej-433	45	16	)	)	PUNCT
alkej-433	45	17	mm	mm	PROPN
alkej-433	45	18	.	.	PUNCT
alkej-433	45	19	figure	figure	NOUN
alkej-433	45	20	2	2	NUM
alkej-433	45	21	)	)	PUNCT
alkej-433	45	22	.	.	PUNCT
alkej-433	46	1	prior	prior	ADV
alkej-433	46	2	to	to	ADP
alkej-433	46	3	coating	coating	NOUN
alkej-433	46	4	,	,	PUNCT
alkej-433	46	5	the	the	DET
alkej-433	46	6	cutting	cut	VERB
alkej-433	46	7	insert	insert	VERB
alkej-433	46	8	underwent	underwent	ADJ
alkej-433	46	9	ultrasonic	ultrasonic	ADJ
alkej-433	46	10	cleaning	cleaning	NOUN
alkej-433	46	11	with	with	ADP
alkej-433	46	12	a	a	DET
alkej-433	46	13	detergent	detergent	NOUN
alkej-433	46	14	bath	bath	NOUN
alkej-433	46	15	using	use	VERB
alkej-433	46	16	different	different	ADJ
alkej-433	46	17	detergents	detergent	NOUN
alkej-433	46	18	and	and	CCONJ
alkej-433	46	19	cleaning	cleaning	NOUN
alkej-433	46	20	durations	duration	NOUN
alkej-433	46	21	,	,	PUNCT
alkej-433	46	22	as	as	SCONJ
alkej-433	46	23	shown	show	VERB
alkej-433	46	24	in	in	ADP
alkej-433	46	25	table1	table1	PROPN
alkej-433	46	26	.	.	PUNCT
alkej-433	47	1	the	the	DET
alkej-433	47	2	rotating	rotate	VERB
alkej-433	47	3	turntable	turntable	NOUN
alkej-433	47	4	is	be	AUX
alkej-433	47	5	holding	hold	VERB
alkej-433	47	6	the	the	DET
alkej-433	47	7	cutting	cut	VERB
alkej-433	47	8	insert	insert	NOUN
alkej-433	47	9	with5	with5	PROPN
alkej-433	47	10	rpm	rpm	PROPN
alkej-433	47	11	rotation	rotation	NOUN
alkej-433	47	12	speed	speed	NOUN
alkej-433	47	13	,	,	PUNCT
alkej-433	47	14	and	and	CCONJ
alkej-433	47	15	the	the	DET
alkej-433	47	16	approximate	approximate	ADJ
alkej-433	47	17	distance	distance	NOUN
alkej-433	47	18	from	from	ADP
alkej-433	47	19	the	the	DET
alkej-433	47	20	target	target	NOUN
alkej-433	47	21	to	to	ADP
alkej-433	47	22	the	the	DET
alkej-433	47	23	substrate	substrate	NOUN
alkej-433	47	24	is	be	AUX
alkej-433	47	25	50	50	NUM
alkej-433	47	26	mm	mm	NOUN
alkej-433	47	27	.	.	PUNCT
alkej-433	48	1	the	the	DET
alkej-433	48	2	experiment	experiment	NOUN
alkej-433	48	3	of	of	ADP
alkej-433	48	4	coating	coating	NOUN
alkej-433	48	5	process	process	NOUN
alkej-433	48	6	consists	consist	VERB
alkej-433	48	7	from	from	ADP
alkej-433	48	8	six	six	NUM
alkej-433	48	9	stages	stage	NOUN
alkej-433	48	10	:	:	PUNCT
alkej-433	48	11	they	they	PRON
alkej-433	48	12	are	be	AUX
alkej-433	48	13	pumping	pump	VERB
alkej-433	48	14	,	,	PUNCT
alkej-433	48	15	main	main	ADJ
alkej-433	48	16	layer	layer	NOUN
alkej-433	48	17	coating	coating	NOUN
alkej-433	48	18	(	(	PUNCT
alkej-433	48	19	alti	alti	NOUN
alkej-433	48	20	)	)	PUNCT
alkej-433	48	21	,	,	PUNCT
alkej-433	48	22	cooling	cooling	NOUN
alkej-433	48	23	,	,	PUNCT
alkej-433	48	24	heating	heating	NOUN
alkej-433	48	25	,	,	PUNCT
alkej-433	48	26	ion	ion	NOUN
alkej-433	48	27	etching	etching	NOUN
alkej-433	48	28	,	,	PUNCT
alkej-433	48	29	and	and	CCONJ
alkej-433	48	30	buffer	buffer	NOUN
alkej-433	48	31	layering	layering	NOUN
alkej-433	48	32	(	(	PUNCT
alkej-433	48	33	ti	ti	NOUN
alkej-433	48	34	)	)	PUNCT
alkej-433	48	35	.	.	PUNCT
alkej-433	49	1	the	the	DET
alkej-433	49	2	minimum	minimum	ADJ
alkej-433	49	3	value	value	NOUN
alkej-433	49	4	of	of	ADP
alkej-433	49	5	pressure	pressure	NOUN
alkej-433	49	6	which	which	PRON
alkej-433	49	7	required	require	VERB
alkej-433	49	8	in	in	ADP
alkej-433	49	9	this	this	DET
alkej-433	49	10	process	process	NOUN
alkej-433	49	11	is	be	AUX
alkej-433	49	12	(	(	PUNCT
alkej-433	49	13	5	5	NUM
alkej-433	49	14	×	×	NOUN
alkej-433	49	15	10−5	10−5	NUM
alkej-433	49	16	)	)	PUNCT
alkej-433	49	17	mbar	mbar	NOUN
alkej-433	49	18	.	.	PUNCT
alkej-433	50	1	a	a	DET
alkej-433	50	2	process	process	NOUN
alkej-433	50	3	setting	set	VERB
alkej-433	50	4	for	for	ADP
alkej-433	50	5	the	the	DET
alkej-433	50	6	six	six	NUM
alkej-433	50	7	stages	stage	NOUN
alkej-433	50	8	was	be	AUX
alkej-433	50	9	included	include	VERB
alkej-433	50	10	.	.	PUNCT
alkej-433	51	1	table	table	NOUN
alkej-433	51	2	(	(	PUNCT
alkej-433	51	3	1	1	X
alkej-433	51	4	)	)	PUNCT
alkej-433	51	5	listed	list	VERB
alkej-433	51	6	in	in	ADP
alkej-433	51	7	detail	detail	NOUN
alkej-433	51	8	all	all	DET
alkej-433	51	9	the	the	DET
alkej-433	51	10	multilayer	multilayer	ADJ
alkej-433	51	11	coatings	coating	NOUN
alkej-433	51	12	parameters	parameter	NOUN
alkej-433	51	13	.	.	PUNCT
alkej-433	52	1	kamil	kamil	PROPN
alkej-433	52	2	j.	j.	PROPN
alkej-433	52	3	kadhim	kadhim	PROPN
alkej-433	52	4	al	al	PROPN
alkej-433	52	5	-	-	PUNCT
alkej-433	52	6	khwarizmi	khwarizmi	PROPN
alkej-433	52	7	engineering	engineering	NOUN
alkej-433	52	8	journal	journal	PROPN
alkej-433	52	9	,	,	PUNCT
alkej-433	52	10	vol	vol	NOUN
alkej-433	52	11	.	.	PROPN
alkej-433	52	12	13	13	NUM
alkej-433	52	13	,	,	PUNCT
alkej-433	52	14	no	no	INTJ
alkej-433	52	15	.	.	NOUN
alkej-433	52	16	4	4	NUM
alkej-433	52	17	,	,	PUNCT
alkej-433	52	18	p.p	p.p	PROPN
alkej-433	52	19	.	.	NOUN
alkej-433	52	20	5868	5868	NUM
alkej-433	52	21	(	(	PUNCT
alkej-433	52	22	2017	2017	NUM
alkej-433	52	23	)	)	PUNCT
alkej-433	52	24	60	60	NUM
alkej-433	52	25	table	table	NOUN
alkej-433	52	26	1	1	NUM
alkej-433	52	27	,	,	PUNCT
alkej-433	52	28	parameters	parameter	NOUN
alkej-433	52	29	for	for	ADP
alkej-433	52	30	the	the	DET
alkej-433	52	31	arc	arc	NOUN
alkej-433	52	32	ion	ion	NOUN
alkej-433	52	33	plating	plating	NOUN
alkej-433	52	34	of	of	ADP
alkej-433	52	35	altin	altin	ADJ
alkej-433	52	36	multilayer	multilayer	ADJ
alkej-433	52	37	coatings	coating	NOUN
alkej-433	52	38	.	.	PUNCT
alkej-433	53	1	step	step	NOUN
alkej-433	53	2	process	process	NOUN
alkej-433	53	3	parameters	parameter	NOUN
alkej-433	53	4	1	1	NUM
alkej-433	53	5	pumping	pump	VERB
alkej-433	53	6	rotary	rotary	NOUN
alkej-433	53	7	pump	pump	NOUN
alkej-433	53	8	,	,	PUNCT
alkej-433	53	9	root	root	NOUN
alkej-433	53	10	pump	pump	NOUN
alkej-433	53	11	and	and	CCONJ
alkej-433	53	12	turbo	turbo	NOUN
alkej-433	53	13	molecular	molecular	ADJ
alkej-433	53	14	pump	pump	VERB
alkej-433	53	15	2	2	NUM
alkej-433	53	16	heating	heating	NOUN
alkej-433	53	17	induction	induction	NOUN
alkej-433	53	18	heater	heater	NOUN
alkej-433	53	19	for	for	ADP
alkej-433	53	20	heating	heat	VERB
alkej-433	53	21	the	the	DET
alkej-433	53	22	substrate	substrate	NOUN
alkej-433	53	23	up	up	ADP
alkej-433	53	24	to	to	ADP
alkej-433	53	25	the	the	DET
alkej-433	53	26	set	set	NOUN
alkej-433	53	27	process	process	NOUN
alkej-433	53	28	temperature	temperature	NOUN
alkej-433	53	29	3	3	NUM
alkej-433	53	30	ar	ar	NOUN
alkej-433	53	31	bombardment	bombardment	NOUN
alkej-433	53	32	and	and	CCONJ
alkej-433	53	33	ion	ion	NOUN
alkej-433	53	34	cleaning	clean	VERB
alkej-433	53	35	ultimate	ultimate	ADJ
alkej-433	53	36	vacuum=5.0×10	vacuum=5.0×10	NOUN
alkej-433	53	37	-	-	SYM
alkej-433	53	38	5	5	NUM
alkej-433	53	39	mbar	mbar	NOUN
alkej-433	53	40	,	,	PUNCT
alkej-433	53	41	bias	bias	NOUN
alkej-433	53	42	voltage	voltage	NOUN
alkej-433	53	43	=	=	NOUN
alkej-433	53	44	900vwith	900vwith	NUM
alkej-433	53	45	80	80	NUM
alkej-433	53	46	%	%	NOUN
alkej-433	53	47	duty	duty	NOUN
alkej-433	53	48	cycle	cycle	NOUN
alkej-433	53	49	,	,	PUNCT
alkej-433	53	50	argon	argon	NOUN
alkej-433	53	51	gas	gas	NOUN
alkej-433	53	52	flow	flow	NOUN
alkej-433	53	53	=	=	SYM
alkej-433	53	54	100	100	NUM
alkej-433	53	55	sccm	sccm	NOUN
alkej-433	53	56	,	,	PUNCT
alkej-433	53	57	arc	arc	NOUN
alkej-433	53	58	source	source	NOUN
alkej-433	53	59	current	current	ADJ
alkej-433	53	60	=	=	SYM
alkej-433	53	61	100a	100a	NOUN
alkej-433	53	62	,	,	PUNCT
alkej-433	53	63	time=	time=	NUM
alkej-433	53	64	30	30	NUM
alkej-433	53	65	mins	min	NOUN
alkej-433	53	66	,	,	PUNCT
alkej-433	53	67	temperature	temperature	NOUN
alkej-433	53	68	=	=	NOUN
alkej-433	53	69	380	380	NUM
alkej-433	53	70	c	c	NOUN
alkej-433	53	71	°	°	ADP
alkej-433	53	72	4	4	NUM
alkej-433	53	73	buffer	buffer	NOUN
alkej-433	53	74	layer	layer	NOUN
alkej-433	53	75	bias	bias	NOUN
alkej-433	53	76	voltage	voltage	NOUN
alkej-433	53	77	=	=	SYM
alkej-433	53	78	30v	30v	NOUN
alkej-433	53	79	,	,	PUNCT
alkej-433	53	80	nitrogen	nitrogen	NOUN
alkej-433	53	81	gas	gas	NOUN
alkej-433	53	82	flow	flow	NOUN
alkej-433	53	83	=	=	SYM
alkej-433	53	84	300	300	NUM
alkej-433	53	85	sccm	sccm	NOUN
alkej-433	53	86	,	,	PUNCT
alkej-433	53	87	arc	arc	NOUN
alkej-433	53	88	source	source	NOUN
alkej-433	53	89	current=100a	current=100a	NOUN
alkej-433	53	90	,	,	PUNCT
alkej-433	53	91	time	time	NOUN
alkej-433	53	92	=	=	SYM
alkej-433	53	93	10	10	NUM
alkej-433	53	94	mins	min	NOUN
alkej-433	53	95	,	,	PUNCT
alkej-433	53	96	temperature	temperature	NOUN
alkej-433	53	97	=	=	SYM
alkej-433	53	98	380	380	NUM
alkej-433	53	99	c	c	NOUN
alkej-433	53	100	°	°	NUM
alkej-433	53	101	5	5	NUM
alkej-433	53	102	main	main	ADJ
alkej-433	53	103	layer	layer	NOUN
alkej-433	53	104	altin	altin	PROPN
alkej-433	53	105	multilayer	multilayer	ADJ
alkej-433	53	106	coating	coating	NOUN
alkej-433	53	107	deposition	deposition	NOUN
alkej-433	53	108	bias	bias	NOUN
alkej-433	53	109	voltage	voltage	NOUN
alkej-433	53	110	=	=	SYM
alkej-433	53	111	40v	40v	NOUN
alkej-433	53	112	,	,	PUNCT
alkej-433	53	113	nitrogen	nitrogen	NOUN
alkej-433	53	114	gas	gas	NOUN
alkej-433	53	115	flow	flow	NOUN
alkej-433	53	116	=	=	SYM
alkej-433	53	117	600	600	NUM
alkej-433	53	118	sccm	sccm	NOUN
alkej-433	53	119	,	,	PUNCT
alkej-433	53	120	arc	arc	NOUN
alkej-433	53	121	source	source	NOUN
alkej-433	53	122	current	current	ADJ
alkej-433	53	123	80a	80a	NOUN
alkej-433	53	124	,	,	PUNCT
alkej-433	53	125	time	time	NOUN
alkej-433	53	126	=	=	SYM
alkej-433	53	127	45	45	NUM
alkej-433	53	128	mins	min	NOUN
alkej-433	53	129	,	,	PUNCT
alkej-433	53	130	temperature	temperature	NOUN
alkej-433	53	131	=	=	SYM
alkej-433	53	132	380	380	NUM
alkej-433	53	133	c	c	NOUN
alkej-433	53	134	°	°	ADP
alkej-433	53	135	6	6	NUM
alkej-433	53	136	cooling	cool	VERB
alkej-433	53	137	down	down	ADP
alkej-433	53	138	and	and	CCONJ
alkej-433	53	139	venting	vent	VERB
alkej-433	53	140	natural	natural	ADJ
alkej-433	53	141	cooling	cooling	NOUN
alkej-433	53	142	for	for	ADP
alkej-433	53	143	30min	30min	NOUN
alkej-433	53	144	at	at	ADP
alkej-433	53	145	100	100	NUM
alkej-433	53	146	◦	◦	NOUN
alkej-433	53	147	c	c	NOUN
alkej-433	53	148	3	3	NUM
alkej-433	53	149	.	.	PUNCT
alkej-433	53	150	altin	altin	ADJ
alkej-433	53	151	coating	coating	NOUN
alkej-433	53	152	deposition	deposition	NOUN
alkej-433	53	153	the	the	DET
alkej-433	53	154	parameters	parameter	NOUN
alkej-433	53	155	setting	set	VERB
alkej-433	53	156	for	for	ADP
alkej-433	53	157	main	main	ADJ
alkej-433	53	158	altin	altin	ADJ
alkej-433	53	159	coating	coating	NOUN
alkej-433	53	160	layer	layer	NOUN
alkej-433	53	161	deposition	deposition	NOUN
alkej-433	53	162	processes	process	NOUN
alkej-433	53	163	are	be	AUX
alkej-433	53	164	shown	show	VERB
alkej-433	53	165	in	in	ADP
alkej-433	53	166	table	table	NOUN
alkej-433	53	167	2	2	NUM
alkej-433	53	168	.	.	PUNCT
alkej-433	54	1	the	the	DET
alkej-433	54	2	figure	figure	NOUN
alkej-433	54	3	2	2	NUM
alkej-433	54	4	shows	show	VERB
alkej-433	54	5	all	all	DET
alkej-433	54	6	details	detail	NOUN
alkej-433	54	7	in	in	ADP
alkej-433	54	8	of	of	ADP
alkej-433	54	9	the	the	DET
alkej-433	54	10	flow	flow	NOUN
alkej-433	54	11	for	for	ADP
alkej-433	54	12	coating	coat	VERB
alkej-433	54	13	deposition	deposition	NOUN
alkej-433	54	14	process	process	NOUN
alkej-433	54	15	and	and	CCONJ
alkej-433	54	16	more	more	ADJ
alkej-433	54	17	specification	specification	NOUN
alkej-433	54	18	and	and	CCONJ
alkej-433	54	19	function	function	VERB
alkej-433	54	20	both	both	DET
alkej-433	54	21	operation	operation	NOUN
alkej-433	54	22	elements	element	NOUN
alkej-433	54	23	.	.	PUNCT
alkej-433	55	1	table	table	NOUN
alkej-433	55	2	2	2	NUM
alkej-433	55	3	,	,	PUNCT
alkej-433	55	4	main	main	ADJ
alkej-433	55	5	layer	layer	NOUN
alkej-433	55	6	parameters	parameter	NOUN
alkej-433	55	7	40	40	NUM
alkej-433	55	8	v	v	NOUN
alkej-433	55	9	bias	bias	NOUN
alkej-433	55	10	voltage	voltage	NOUN
alkej-433	55	11	600	600	NUM
alkej-433	55	12	sccm	sccm	NOUN
alkej-433	55	13	nitrogen	nitrogen	NOUN
alkej-433	55	14	gas	gas	NOUN
alkej-433	55	15	flow	flow	NOUN
alkej-433	55	16	80a	80a	NOUN
alkej-433	55	17	arc	arc	NOUN
alkej-433	55	18	source	source	NOUN
alkej-433	55	19	current	current	ADJ
alkej-433	56	1	45,80,100,120,and	45,80,100,120,and	NUM
alkej-433	56	2	135	135	NUM
alkej-433	56	3	minutes	minute	NOUN
alkej-433	56	4	time	time	NOUN
alkej-433	56	5	380c	380c	PROPN
alkej-433	56	6	°	°	PART
alkej-433	56	7	temperature	temperature	NOUN
alkej-433	56	8	the	the	DET
alkej-433	56	9	complete	complete	ADJ
alkej-433	56	10	deposition	deposition	NOUN
alkej-433	56	11	procedure	procedure	NOUN
alkej-433	56	12	has	have	AUX
alkej-433	56	13	been	be	AUX
alkej-433	56	14	described	describe	VERB
alkej-433	56	15	earlier	early	ADV
alkej-433	56	16	.	.	PUNCT
alkej-433	57	1	a	a	DET
alkej-433	57	2	summary	summary	NOUN
alkej-433	57	3	of	of	ADP
alkej-433	57	4	the	the	DET
alkej-433	57	5	deposition	deposition	NOUN
alkej-433	57	6	parameters	parameter	NOUN
alkej-433	57	7	can	can	AUX
alkej-433	57	8	be	be	AUX
alkej-433	57	9	seen	see	VERB
alkej-433	57	10	in	in	ADP
alkej-433	57	11	table	table	NOUN
alkej-433	57	12	3	3	NUM
alkej-433	57	13	.	.	PUNCT
alkej-433	57	14	fig	fig	NOUN
alkej-433	57	15	.	.	PUNCT
alkej-433	58	1	2	2	NUM
alkej-433	58	2	.	.	X
alkej-433	58	3	schematic	schematic	ADJ
alkej-433	58	4	diagram	diagram	NOUN
alkej-433	58	5	of	of	ADP
alkej-433	58	6	the	the	DET
alkej-433	58	7	arc	arc	NOUN
alkej-433	58	8	ion	ion	NOUN
alkej-433	58	9	plating	plating	NOUN
alkej-433	58	10	system	system	NOUN
alkej-433	58	11	.	.	PUNCT
alkej-433	59	1	after	after	ADP
alkej-433	59	2	the	the	DET
alkej-433	59	3	completion	completion	NOUN
alkej-433	59	4	of	of	ADP
alkej-433	59	5	the	the	DET
alkej-433	59	6	coating	coating	NOUN
alkej-433	59	7	process	process	NOUN
alkej-433	59	8	,	,	PUNCT
alkej-433	59	9	the	the	DET
alkej-433	59	10	coated	coated	ADJ
alkej-433	59	11	tools	tool	NOUN
alkej-433	59	12	were	be	AUX
alkej-433	59	13	cooled	cool	VERB
alkej-433	59	14	in	in	ADP
alkej-433	59	15	the	the	DET
alkej-433	59	16	chamber	chamber	NOUN
alkej-433	59	17	naturally	naturally	ADV
alkej-433	59	18	for	for	ADP
alkej-433	59	19	60	60	NUM
alkej-433	59	20	minutes	minute	NOUN
alkej-433	59	21	.	.	PUNCT
alkej-433	60	1	table	table	NOUN
alkej-433	60	2	3	3	NUM
alkej-433	60	3	,	,	PUNCT
alkej-433	60	4	deposition	deposition	NOUN
alkej-433	60	5	parameters	parameter	NOUN
alkej-433	60	6	rotation	rotation	NOUN
alkej-433	60	7	speed	speed	NOUN
alkej-433	60	8	rpm	rpm	NOUN
alkej-433	60	9	altin	altin	ADJ
alkej-433	60	10	deposition	deposition	NOUN
alkej-433	60	11	time	time	NOUN
alkej-433	60	12	(	(	PUNCT
alkej-433	60	13	min	min	NOUN
alkej-433	60	14	)	)	PUNCT
alkej-433	60	15	total	total	ADJ
alkej-433	60	16	layer	layer	NOUN
alkej-433	60	17	thickness	thickness	NOUN
alkej-433	60	18	(	(	PUNCT
alkej-433	60	19	μm	μm	NUM
alkej-433	60	20	)	)	PUNCT
alkej-433	60	21	ar	ar	NOUN
alkej-433	60	22	gas	gas	NOUN
alkej-433	60	23	flow	flow	NOUN
alkej-433	60	24	rate	rate	NOUN
alkej-433	60	25	(	(	PUNCT
alkej-433	60	26	sccm	sccm	NOUN
alkej-433	60	27	)	)	PUNCT
alkej-433	60	28	bias	bias	NOUN
alkej-433	60	29	voltage	voltage	NOUN
alkej-433	60	30	(	(	PUNCT
alkej-433	60	31	−v	−v	NOUN
alkej-433	60	32	)	)	PUNCT
alkej-433	60	33	buffer	buffer	NOUN
alkej-433	60	34	layer	layer	NOUN
alkej-433	60	35	(	(	PUNCT
alkej-433	60	36	min	min	NOUN
alkej-433	60	37	)	)	PUNCT
alkej-433	60	38	n2	n2	ADJ
alkej-433	60	39	gas	gas	NOUN
alkej-433	60	40	flow	flow	NOUN
alkej-433	60	41	rate	rate	NOUN
alkej-433	60	42	(	(	PUNCT
alkej-433	60	43	sccm	sccm	NOUN
alkej-433	60	44	)	)	PUNCT
alkej-433	60	45	etching	etch	VERB
alkej-433	60	46	(	(	PUNCT
alkej-433	60	47	min	min	NOUN
alkej-433	60	48	)	)	PUNCT
alkej-433	60	49	substrate	substrate	NOUN
alkej-433	60	50	temperature	temperature	NOUN
alkej-433	60	51	(	(	PUNCT
alkej-433	60	52	c	c	NOUN
alkej-433	60	53	°	°	PRON
alkej-433	60	54	)	)	PUNCT
alkej-433	60	55	5	5	NUM
alkej-433	60	56	45	45	NUM
alkej-433	60	57	2.717	2.717	NUM
alkej-433	60	58	100	100	NUM
alkej-433	60	59	40	40	NUM
alkej-433	60	60	10	10	NUM
alkej-433	60	61	600	600	NUM
alkej-433	60	62	30	30	NUM
alkej-433	60	63	380	380	NUM
alkej-433	60	64	5	5	NUM
alkej-433	60	65	80	80	NUM
alkej-433	60	66	3.089	3.089	NUM
alkej-433	60	67	100	100	NUM
alkej-433	60	68	40	40	NUM
alkej-433	60	69	10	10	NUM
alkej-433	60	70	600	600	NUM
alkej-433	60	71	30	30	NUM
alkej-433	60	72	380	380	NUM
alkej-433	60	73	5	5	NUM
alkej-433	60	74	100	100	NUM
alkej-433	60	75	3.912	3.912	NUM
alkej-433	60	76	100	100	NUM
alkej-433	60	77	40	40	NUM
alkej-433	60	78	10	10	NUM
alkej-433	60	79	600	600	NUM
alkej-433	60	80	30	30	NUM
alkej-433	60	81	380	380	NUM
alkej-433	60	82	5	5	NUM
alkej-433	60	83	120	120	NUM
alkej-433	60	84	5.815	5.815	NUM
alkej-433	60	85	100	100	NUM
alkej-433	60	86	40	40	NUM
alkej-433	60	87	10	10	NUM
alkej-433	60	88	600	600	NUM
alkej-433	60	89	30	30	NUM
alkej-433	60	90	380	380	NUM
alkej-433	60	91	5	5	NUM
alkej-433	60	92	135	135	NUM
alkej-433	60	93	8.760	8.760	NUM
alkej-433	60	94	100	100	NUM
alkej-433	60	95	40	40	NUM
alkej-433	60	96	10	10	NUM
alkej-433	60	97	600	600	NUM
alkej-433	60	98	30	30	NUM
alkej-433	60	99	380	380	NUM
alkej-433	60	100	kamil	kamil	PROPN
alkej-433	60	101	j.	j.	PROPN
alkej-433	60	102	kadhim	kadhim	PROPN
alkej-433	60	103	al	al	PROPN
alkej-433	60	104	-	-	PUNCT
alkej-433	60	105	khwarizmi	khwarizmi	PROPN
alkej-433	60	106	engineering	engineering	NOUN
alkej-433	60	107	journal	journal	PROPN
alkej-433	60	108	,	,	PUNCT
alkej-433	60	109	vol	vol	NOUN
alkej-433	60	110	.	.	PROPN
alkej-433	60	111	13	13	NUM
alkej-433	60	112	,	,	PUNCT
alkej-433	60	113	no	no	INTJ
alkej-433	60	114	.	.	NOUN
alkej-433	60	115	4	4	NUM
alkej-433	60	116	,	,	PUNCT
alkej-433	60	117	p.p	p.p	PROPN
alkej-433	60	118	.	.	NOUN
alkej-433	60	119	5868	5868	NUM
alkej-433	60	120	(	(	PUNCT
alkej-433	60	121	2017	2017	NUM
alkej-433	60	122	)	)	PUNCT
alkej-433	60	123	61	61	NUM
alkej-433	60	124	4	4	NUM
alkej-433	60	125	.	.	PUNCT
alkej-433	61	1	pretreatment	pretreatment	NOUN
alkej-433	61	2	of	of	ADP
alkej-433	61	3	substrate	substrate	NOUN
alkej-433	61	4	the	the	DET
alkej-433	61	5	cutting	cut	VERB
alkej-433	61	6	insert	insert	NOUN
alkej-433	61	7	must	must	AUX
alkej-433	61	8	be	be	AUX
alkej-433	61	9	cleaned	clean	VERB
alkej-433	61	10	before	before	ADP
alkej-433	61	11	coating	coat	VERB
alkej-433	61	12	by	by	ADP
alkej-433	61	13	ultrasonic	ultrasonic	NOUN
alkej-433	61	14	with	with	ADP
alkej-433	61	15	a	a	DET
alkej-433	61	16	detergent	detergent	NOUN
alkej-433	61	17	bath	bath	NOUN
alkej-433	61	18	for	for	ADP
alkej-433	61	19	different	different	ADJ
alkej-433	61	20	mixed	mixed	ADJ
alkej-433	61	21	detergent	detergent	NOUN
alkej-433	61	22	and	and	CCONJ
alkej-433	61	23	time	time	NOUN
alkej-433	61	24	as	as	SCONJ
alkej-433	61	25	shown	show	VERB
alkej-433	61	26	in	in	ADP
alkej-433	61	27	table	table	NOUN
alkej-433	61	28	4	4	NUM
alkej-433	61	29	using	use	VERB
alkej-433	61	30	ultrasonic	ultrasonic	ADJ
alkej-433	61	31	system	system	NOUN
alkej-433	61	32	shown	show	VERB
alkej-433	61	33	in	in	ADP
alkej-433	61	34	figure	figure	NOUN
alkej-433	61	35	3	3	NUM
alkej-433	61	36	.	.	PUNCT
alkej-433	61	37	di	di	NOUN
alkej-433	61	38	)	)	PUNCT
alkej-433	61	39	water	water	NOUN
alkej-433	61	40	:	:	PUNCT
alkej-433	61	41	the	the	DET
alkej-433	61	42	processed	process	VERB
alkej-433	61	43	and	and	CCONJ
alkej-433	61	44	pure	pure	ADJ
alkej-433	61	45	water	water	NOUN
alkej-433	61	46	,	,	PUNCT
alkej-433	61	47	or	or	CCONJ
alkej-433	61	48	mechanically	mechanically	ADV
alkej-433	61	49	filtered	filter	VERB
alkej-433	61	50	to	to	PART
alkej-433	61	51	be	be	AUX
alkej-433	61	52	cleaned	clean	VERB
alkej-433	61	53	and	and	CCONJ
alkej-433	61	54	ready	ready	ADJ
alkej-433	61	55	for	for	ADP
alkej-433	61	56	consumption	consumption	NOUN
alkej-433	61	57	.	.	PUNCT
alkej-433	62	1	the	the	DET
alkej-433	62	2	most	most	ADV
alkej-433	62	3	common	common	ADJ
alkej-433	62	4	forms	form	NOUN
alkej-433	62	5	of	of	ADP
alkej-433	62	6	purified	purified	ADJ
alkej-433	62	7	water	water	NOUN
alkej-433	62	8	is	be	AUX
alkej-433	62	9	distilled	distil	VERB
alkej-433	62	10	water	water	NOUN
alkej-433	62	11	and	and	CCONJ
alkej-433	62	12	deionized	deionize	VERB
alkej-433	62	13	(	(	PUNCT
alkej-433	62	14	di	di	NOUN
alkej-433	62	15	)	)	PUNCT
alkej-433	62	16	.	.	PUNCT
alkej-433	63	1	fig	fig	NOUN
alkej-433	63	2	.	.	PUNCT
alkej-433	64	1	3	3	X
alkej-433	64	2	.	.	X
alkej-433	64	3	the	the	DET
alkej-433	64	4	cutting	cut	VERB
alkej-433	64	5	insert	insert	NOUN
alkej-433	64	6	was	be	AUX
alkej-433	64	7	cleaned	clean	VERB
alkej-433	64	8	by	by	ADP
alkej-433	64	9	ultrasonic	ultrasonic	NOUN
alkej-433	64	10	with	with	ADP
alkej-433	64	11	a	a	DET
alkej-433	64	12	detergent	detergent	NOUN
alkej-433	64	13	bath	bath	NOUN
alkej-433	64	14	for	for	ADP
alkej-433	64	15	different	different	ADJ
alkej-433	64	16	mixed	mixed	ADJ
alkej-433	64	17	detergent	detergent	NOUN
alkej-433	64	18	and	and	CCONJ
alkej-433	64	19	time	time	NOUN
alkej-433	64	20	.	.	PUNCT
alkej-433	65	1	5	5	X
alkej-433	65	2	.	.	X
alkej-433	65	3	study	study	NOUN
alkej-433	65	4	on	on	ADP
alkej-433	65	5	crater	crater	NOUN
alkej-433	65	6	wear	wear	NOUN
alkej-433	65	7	to	to	PART
alkej-433	65	8	understand	understand	VERB
alkej-433	65	9	this	this	DET
alkej-433	65	10	type	type	NOUN
alkej-433	65	11	of	of	ADP
alkej-433	65	12	tool	tool	NOUN
alkej-433	65	13	wear	wear	NOUN
alkej-433	65	14	,	,	PUNCT
alkej-433	65	15	reviewing	review	VERB
alkej-433	65	16	the	the	DET
alkej-433	65	17	geometry	geometry	NOUN
alkej-433	65	18	of	of	ADP
alkej-433	65	19	machine	machine	NOUN
alkej-433	65	20	tools	tool	NOUN
alkej-433	65	21	is	be	AUX
alkej-433	65	22	important	important	ADJ
alkej-433	65	23	.	.	PUNCT
alkej-433	66	1	figure	figure	NOUN
alkej-433	66	2	4	4	NUM
alkej-433	66	3	illustrates	illustrate	VERB
alkej-433	66	4	the	the	DET
alkej-433	66	5	general	general	ADJ
alkej-433	66	6	geometry	geometry	NOUN
alkej-433	66	7	of	of	ADP
alkej-433	66	8	a	a	DET
alkej-433	66	9	turning	turn	VERB
alkej-433	66	10	tool	tool	NOUN
alkej-433	66	11	.	.	PUNCT
alkej-433	67	1	table	table	NOUN
alkej-433	67	2	5	5	NUM
alkej-433	67	3	present	present	VERB
alkej-433	67	4	the	the	DET
alkej-433	67	5	geometry	geometry	NOUN
alkej-433	67	6	of	of	ADP
alkej-433	67	7	the	the	DET
alkej-433	67	8	turning	turn	VERB
alkej-433	67	9	tool	tool	NOUN
alkej-433	67	10	.	.	PUNCT
alkej-433	68	1	the	the	DET
alkej-433	68	2	tool	tool	NOUN
alkej-433	68	3	angle	angle	NOUN
alkej-433	68	4	affects	affect	VERB
alkej-433	68	5	tool	tool	NOUN
alkej-433	68	6	wear	wear	VERB
alkej-433	68	7	and	and	CCONJ
alkej-433	68	8	the	the	DET
alkej-433	68	9	life	life	NOUN
alkej-433	68	10	span	span	NOUN
alkej-433	68	11	of	of	ADP
alkej-433	68	12	the	the	DET
alkej-433	68	13	tool	tool	NOUN
alkej-433	68	14	[	[	X
alkej-433	68	15	3	3	NUM
alkej-433	68	16	]	]	PUNCT
alkej-433	68	17	.	.	PUNCT
alkej-433	69	1	crater	crater	NOUN
alkej-433	69	2	wear	wear	VERB
alkej-433	69	3	results	result	NOUN
alkej-433	69	4	from	from	ADP
alkej-433	69	5	the	the	DET
alkej-433	69	6	erosion	erosion	NOUN
alkej-433	69	7	of	of	ADP
alkej-433	69	8	the	the	DET
alkej-433	69	9	rake	rake	NOUN
alkej-433	69	10	face	face	NOUN
alkej-433	69	11	caused	cause	VERB
alkej-433	69	12	by	by	ADP
alkej-433	69	13	cutting	cut	VERB
alkej-433	69	14	chips	chip	NOUN
alkej-433	69	15	.	.	PUNCT
alkej-433	70	1	the	the	DET
alkej-433	70	2	figure	figure	NOUN
alkej-433	70	3	below	below	ADV
alkej-433	70	4	illustrates	illustrate	VERB
alkej-433	70	5	the	the	DET
alkej-433	70	6	chip	chip	NOUN
alkej-433	70	7	flow	flow	NOUN
alkej-433	70	8	in	in	ADP
alkej-433	70	9	orthogonal	orthogonal	ADJ
alkej-433	70	10	cutting	cutting	NOUN
alkej-433	70	11	.	.	PUNCT
alkej-433	71	1	fig	fig	NOUN
alkej-433	71	2	.	.	PUNCT
alkej-433	72	1	4	4	X
alkej-433	72	2	.	.	X
alkej-433	72	3	tungsten	tungsten	VERB
alkej-433	72	4	carbide	carbide	NOUN
alkej-433	72	5	cutting	cut	VERB
alkej-433	72	6	tool	tool	NOUN
alkej-433	72	7	insert	insert	NOUN
alkej-433	72	8	commercially	commercially	ADV
alkej-433	72	9	made	make	VERB
alkej-433	72	10	by	by	ADP
alkej-433	72	11	sumitomo	sumitomo	PROPN
alkej-433	72	12	.	.	PUNCT
alkej-433	72	13	table	table	NOUN
alkej-433	72	14	5	5	NUM
alkej-433	72	15	,	,	PUNCT
alkej-433	72	16	sumitomo	sumitomo	PROPN
alkej-433	72	17	spgn120208s	spgn120208s	PROPN
alkej-433	72	18	cutting	cut	VERB
alkej-433	72	19	tool	tool	NOUN
alkej-433	72	20	dimensions	dimension	NOUN
alkej-433	72	21	table	table	NOUN
alkej-433	72	22	4	4	NUM
alkej-433	72	23	,	,	PUNCT
alkej-433	72	24	cleaning	clean	VERB
alkej-433	72	25	procedure	procedure	NOUN
alkej-433	72	26	tank	tank	NOUN
alkej-433	72	27	#	#	NOUN
alkej-433	72	28	solvent	solvent	NOUN
alkej-433	72	29	time	time	NOUN
alkej-433	72	30	(	(	PUNCT
alkej-433	72	31	sec	sec	PROPN
alkej-433	72	32	)	)	PUNCT
alkej-433	72	33	temperature	temperature	NOUN
alkej-433	72	34	(	(	PUNCT
alkej-433	72	35	�	�	NOUN
alkej-433	72	36	�	�	NOUN
alkej-433	72	37	condition	condition	NOUN
alkej-433	72	38	1	1	NUM
alkej-433	72	39	ht1401(1	ht1401(1	NOUN
alkej-433	72	40	)	)	PUNCT
alkej-433	73	1	+	+	CCONJ
alkej-433	73	2	ht1170	ht1170	NOUN
alkej-433	73	3	+	+	CCONJ
alkej-433	73	4	di	di	NOUN
alkej-433	73	5	water	water	NOUN
alkej-433	73	6	300	300	NUM
alkej-433	73	7	52	52	NUM
alkej-433	73	8	rotation	rotation	NOUN
alkej-433	73	9	2	2	NUM
alkej-433	73	10	ht1401	ht1401	NOUN
alkej-433	73	11	+	+	CCONJ
alkej-433	73	12	ht1170(2	ht1170(2	NUM
alkej-433	73	13	)	)	PUNCT
alkej-433	73	14	+	+	CCONJ
alkej-433	73	15	di	di	X
alkej-433	73	16	water	water	NOUN
alkej-433	73	17	300	300	NUM
alkej-433	73	18	52	52	NUM
alkej-433	73	19	rotation	rotation	NOUN
alkej-433	73	20	3	3	NUM
alkej-433	73	21	di	di	NOUN
alkej-433	73	22	water	water	NOUN
alkej-433	73	23	spray	spray	NOUN
alkej-433	73	24	&	&	CCONJ
alkej-433	73	25	rotation	rotation	PROPN
alkej-433	73	26	4	4	NUM
alkej-433	73	27	ht1233(3	ht1233(3	PROPN
alkej-433	73	28	)	)	PUNCT
alkej-433	73	29	+	+	NUM
alkej-433	73	30	anticorr	anticorr	ADJ
alkej-433	73	31	+	+	CCONJ
alkej-433	73	32	di	di	X
alkej-433	73	33	water	water	NOUN
alkej-433	73	34	150	150	NUM
alkej-433	73	35	52	52	NUM
alkej-433	73	36	rotation	rotation	NOUN
alkej-433	73	37	5	5	NUM
alkej-433	73	38	di	di	NOUN
alkej-433	73	39	water	water	NOUN
alkej-433	73	40	ultrasonic	ultrasonic	PROPN
alkej-433	73	41	&	&	CCONJ
alkej-433	73	42	rotation	rotation	PROPN
alkej-433	73	43	6	6	NUM
alkej-433	73	44	di(4	di(4	NOUN
alkej-433	73	45	)	)	PUNCT
alkej-433	73	46	water	water	NOUN
alkej-433	73	47	(	(	PUNCT
alkej-433	73	48	rinsing	rinsing	NOUN
alkej-433	73	49	)	)	PUNCT
alkej-433	73	50	rotation	rotation	NOUN
alkej-433	73	51	sumitomo	sumitomo	PROPN
alkej-433	73	52	spgn120308s	spgn120308s	PROPN
alkej-433	73	53	dimension	dimension	NOUN
alkej-433	73	54	:	:	PUNCT
alkej-433	73	55	•	•	NUM
alkej-433	73	56	d	d	X
alkej-433	73	57	=	=	SYM
alkej-433	73	58	12.7	12.7	NUM
alkej-433	73	59	mm	mm	NOUN
alkej-433	73	60	•	•	NUM
alkej-433	73	61	s	s	NOUN
alkej-433	73	62	=	=	SYM
alkej-433	73	63	3.18	3.18	NUM
alkej-433	73	64	mm	mm	NOUN
alkej-433	73	65	•	•	NUM
alkej-433	73	66	re	re	NOUN
alkej-433	73	67	=	=	NOUN
alkej-433	73	68	0.8	0.8	NUM
alkej-433	73	69	mm	mm	PROPN
alkej-433	73	70	kamil	kamil	PROPN
alkej-433	73	71	j.	j.	PROPN
alkej-433	73	72	kadhim	kadhim	PROPN
alkej-433	73	73	al	al	PROPN
alkej-433	73	74	-	-	PUNCT
alkej-433	73	75	khwarizmi	khwarizmi	PROPN
alkej-433	73	76	engineering	engineering	NOUN
alkej-433	73	77	journal	journal	PROPN
alkej-433	73	78	,	,	PUNCT
alkej-433	73	79	vol	vol	NOUN
alkej-433	73	80	.	.	PROPN
alkej-433	73	81	13	13	NUM
alkej-433	73	82	,	,	PUNCT
alkej-433	73	83	no	no	INTJ
alkej-433	73	84	.	.	NOUN
alkej-433	73	85	4	4	NUM
alkej-433	73	86	,	,	PUNCT
alkej-433	73	87	p.p	p.p	PROPN
alkej-433	73	88	.	.	NOUN
alkej-433	73	89	5868	5868	NUM
alkej-433	73	90	(	(	PUNCT
alkej-433	73	91	2017	2017	NUM
alkej-433	73	92	)	)	PUNCT
alkej-433	73	93	62	62	NUM
alkej-433	73	94	figure	figure	NOUN
alkej-433	73	95	5a	5a	NUM
alkej-433	73	96	clearly	clearly	ADV
alkej-433	73	97	shows	show	VERB
alkej-433	73	98	that	that	SCONJ
alkej-433	73	99	the	the	DET
alkej-433	73	100	chip	chip	NOUN
alkej-433	73	101	flows	flow	VERB
alkej-433	73	102	over	over	ADP
alkej-433	73	103	the	the	DET
alkej-433	73	104	rake	rake	NOUN
alkej-433	73	105	face	face	NOUN
alkej-433	73	106	of	of	ADP
alkej-433	73	107	the	the	DET
alkej-433	73	108	cutting	cut	VERB
alkej-433	73	109	tool	tool	NOUN
alkej-433	73	110	during	during	ADP
alkej-433	73	111	machining	machine	VERB
alkej-433	73	112	.the	.the	DET
alkej-433	73	113	contact	contact	NOUN
alkej-433	73	114	between	between	ADP
alkej-433	73	115	the	the	DET
alkej-433	73	116	rakes	rake	NOUN
alkej-433	73	117	face	face	NOUN
alkej-433	73	118	and	and	CCONJ
alkej-433	73	119	the	the	DET
alkej-433	73	120	chip	chip	NOUN
alkej-433	73	121	causes	cause	VERB
alkej-433	73	122	high	high	ADJ
alkej-433	73	123	friction	friction	NOUN
alkej-433	73	124	at	at	ADP
alkej-433	73	125	the	the	DET
alkej-433	73	126	interface	interface	NOUN
alkej-433	73	127	.	.	PUNCT
alkej-433	74	1	consequently	consequently	ADV
alkej-433	74	2	,	,	PUNCT
alkej-433	74	3	continuous	continuous	ADJ
alkej-433	74	4	flow	flow	NOUN
alkej-433	74	5	can	can	AUX
alkej-433	74	6	increase	increase	VERB
alkej-433	74	7	friction	friction	NOUN
alkej-433	74	8	that	that	PRON
alkej-433	74	9	leaves	leave	VERB
alkej-433	74	10	a	a	DET
alkej-433	74	11	scratch	scratch	NOUN
alkej-433	74	12	or	or	CCONJ
alkej-433	74	13	scar	scar	NOUN
alkej-433	74	14	on	on	ADP
alkej-433	74	15	the	the	DET
alkej-433	74	16	face	face	NOUN
alkej-433	74	17	of	of	ADP
alkej-433	74	18	the	the	DET
alkej-433	74	19	tool	tool	NOUN
alkej-433	74	20	,	,	PUNCT
alkej-433	74	21	which	which	PRON
alkej-433	74	22	is	be	AUX
alkej-433	74	23	usually	usually	ADV
alkej-433	74	24	parallel	parallel	ADJ
alkej-433	74	25	to	to	ADP
alkej-433	74	26	the	the	DET
alkej-433	74	27	cutting	cut	VERB
alkej-433	74	28	edge	edge	NOUN
alkej-433	74	29	of	of	ADP
alkej-433	74	30	the	the	DET
alkej-433	74	31	tool	tool	NOUN
alkej-433	74	32	[	[	X
alkej-433	74	33	4	4	NUM
alkej-433	74	34	]	]	PUNCT
alkej-433	74	35	.	.	PUNCT
alkej-433	75	1	this	this	DET
alkej-433	75	2	scar	scar	NOUN
alkej-433	75	3	is	be	AUX
alkej-433	75	4	generally	generally	ADV
alkej-433	75	5	in	in	ADP
alkej-433	75	6	the	the	DET
alkej-433	75	7	form	form	NOUN
alkej-433	75	8	of	of	ADP
alkej-433	75	9	a	a	DET
alkej-433	75	10	crater	crater	NOUN
alkej-433	75	11	,	,	PUNCT
alkej-433	75	12	hence	hence	ADV
alkej-433	75	13	the	the	DET
alkej-433	75	14	term	term	NOUN
alkej-433	75	15	crater	crater	NOUN
alkej-433	75	16	wear	wear	NOUN
alkej-433	75	17	.	.	PUNCT
alkej-433	76	1	crater	crater	NOUN
alkej-433	76	2	wear	wear	VERB
alkej-433	76	3	increases	increase	VERB
alkej-433	76	4	the	the	DET
alkej-433	76	5	rake	rake	NOUN
alkej-433	76	6	angle	angle	NOUN
alkej-433	76	7	,	,	PUNCT
alkej-433	76	8	which	which	PRON
alkej-433	76	9	in	in	ADP
alkej-433	76	10	turn	turn	NOUN
alkej-433	76	11	reduces	reduce	VERB
alkej-433	76	12	the	the	DET
alkej-433	76	13	cutting	cut	VERB
alkej-433	76	14	force	force	NOUN
alkej-433	76	15	.	.	PUNCT
alkej-433	77	1	however	however	ADV
alkej-433	77	2	,	,	PUNCT
alkej-433	77	3	crater	crater	NOUN
alkej-433	77	4	wear	wear	VERB
alkej-433	77	5	weakens	weaken	VERB
alkej-433	77	6	the	the	DET
alkej-433	77	7	tool	tool	NOUN
alkej-433	77	8	cutting	cut	VERB
alkej-433	77	9	edge	edge	NOUN
alkej-433	77	10	and	and	CCONJ
alkej-433	77	11	thus	thus	ADV
alkej-433	77	12	reduces	reduce	VERB
alkej-433	77	13	its	its	PRON
alkej-433	77	14	strength	strength	NOUN
alkej-433	77	15	[	[	X
alkej-433	77	16	5	5	NUM
alkej-433	77	17	]	]	PUNCT
alkej-433	77	18	.	.	PUNCT
alkej-433	78	1	the	the	PRON
alkej-433	78	2	(	(	PUNCT
alkej-433	78	3	figure5a	figure5a	PROPN
alkej-433	78	4	)	)	PUNCT
alkej-433	78	5	illustrates	illustrate	VERB
alkej-433	78	6	crater	crater	NOUN
alkej-433	78	7	wear	wear	NOUN
alkej-433	78	8	on	on	ADP
alkej-433	78	9	the	the	DET
alkej-433	78	10	rake	rake	NOUN
alkej-433	78	11	face	face	NOUN
alkej-433	78	12	of	of	ADP
alkej-433	78	13	a	a	DET
alkej-433	78	14	cutting	cut	VERB
alkej-433	78	15	tool	tool	NOUN
alkej-433	78	16	.	.	PUNCT
alkej-433	79	1	figure	figure	VERB
alkej-433	79	2	5(b	5(b	NUM
alkej-433	79	3	)	)	PUNCT
alkej-433	79	4	shows	show	VERB
alkej-433	79	5	the	the	DET
alkej-433	79	6	variables	variable	NOUN
alkej-433	79	7	that	that	PRON
alkej-433	79	8	usually	usually	ADV
alkej-433	79	9	characterize	characterize	VERB
alkej-433	79	10	crater	crater	NOUN
alkej-433	79	11	wear	wear	NOUN
alkej-433	79	12	.	.	PUNCT
alkej-433	80	1	the	the	DET
alkej-433	80	2	most	most	ADV
alkej-433	80	3	important	important	ADJ
alkej-433	80	4	parameter	parameter	NOUN
alkej-433	80	5	for	for	ADP
alkej-433	80	6	wear	wear	NOUN
alkej-433	80	7	characterization	characterization	NOUN
alkej-433	80	8	is	be	AUX
alkej-433	80	9	crater	crater	ADJ
alkej-433	80	10	depth	depth	NOUN
alkej-433	80	11	(	(	PUNCT
alkej-433	80	12	�	�	NOUN
alkej-433	80	13	�	�	PROPN
alkej-433	80	14	)	)	PUNCT
alkej-433	80	15	.	.	PUNCT
alkej-433	81	1	studies	study	NOUN
alkej-433	81	2	on	on	ADP
alkej-433	81	3	crater	crater	NOUN
alkej-433	81	4	wear	wear	NOUN
alkej-433	81	5	show	show	NOUN
alkej-433	81	6	that	that	SCONJ
alkej-433	81	7	the	the	DET
alkej-433	81	8	spindle	spindle	NOUN
alkej-433	81	9	speed	speed	NOUN
alkej-433	81	10	of	of	ADP
alkej-433	81	11	the	the	DET
alkej-433	81	12	cutting	cut	VERB
alkej-433	81	13	machine	machine	NOUN
alkej-433	81	14	has	have	VERB
alkej-433	81	15	an	an	DET
alkej-433	81	16	indirect	indirect	ADJ
alkej-433	81	17	relationship	relationship	NOUN
alkej-433	81	18	with	with	ADP
alkej-433	81	19	crater	crater	NOUN
alkej-433	81	20	wear	wear	NOUN
alkej-433	81	21	[	[	X
alkej-433	81	22	4	4	NUM
alkej-433	81	23	]	]	PUNCT
alkej-433	81	24	.	.	PUNCT
alkej-433	82	1	extremely	extremely	ADV
alkej-433	82	2	low	low	ADJ
alkej-433	82	3	spindle	spindle	NOUN
alkej-433	82	4	speed	speed	NOUN
alkej-433	82	5	causes	cause	VERB
alkej-433	82	6	chip	chip	NOUN
alkej-433	82	7	buildup	buildup	NOUN
alkej-433	82	8	on	on	ADP
alkej-433	82	9	the	the	DET
alkej-433	82	10	rake	rake	NOUN
alkej-433	82	11	face	face	NOUN
alkej-433	82	12	.	.	PUNCT
alkej-433	83	1	this	this	DET
alkej-433	83	2	buildup	buildup	NOUN
alkej-433	83	3	increases	increase	VERB
alkej-433	83	4	friction	friction	NOUN
alkej-433	83	5	,	,	PUNCT
alkej-433	83	6	which	which	PRON
alkej-433	83	7	causes	cause	VERB
alkej-433	83	8	the	the	DET
alkej-433	83	9	formation	formation	NOUN
alkej-433	83	10	of	of	ADP
alkej-433	83	11	a	a	DET
alkej-433	83	12	crater	crater	NOUN
alkej-433	83	13	on	on	ADP
alkej-433	83	14	the	the	DET
alkej-433	83	15	rake	rake	NOUN
alkej-433	83	16	surface	surface	NOUN
alkej-433	83	17	.	.	PUNCT
alkej-433	84	1	the	the	DET
alkej-433	84	2	figure	figure	NOUN
alkej-433	84	3	below	below	ADV
alkej-433	84	4	illustrates	illustrate	VERB
alkej-433	84	5	the	the	DET
alkej-433	84	6	effect	effect	NOUN
alkej-433	84	7	of	of	ADP
alkej-433	84	8	cutting	cut	VERB
alkej-433	84	9	speed	speed	NOUN
alkej-433	84	10	on	on	ADP
alkej-433	84	11	crater	crater	NOUN
alkej-433	84	12	wear	wear	NOUN
alkej-433	84	13	and	and	CCONJ
alkej-433	84	14	tool	tool	NOUN
alkej-433	84	15	durability	durability	NOUN
alkej-433	84	16	.	.	PUNCT
alkej-433	85	1	figure	figure	NOUN
alkej-433	85	2	6	6	NUM
alkej-433	85	3	shows	show	VERB
alkej-433	85	4	that	that	PRON
alkej-433	85	5	increase	increase	VERB
alkej-433	85	6	in	in	ADP
alkej-433	85	7	cutting	cut	VERB
alkej-433	85	8	speed	speed	NOUN
alkej-433	85	9	reduces	reduce	VERB
alkej-433	85	10	crater	crater	NOUN
alkej-433	85	11	wear	wear	NOUN
alkej-433	85	12	,	,	PUNCT
alkej-433	85	13	thereby	thereby	ADV
alkej-433	85	14	increasing	increase	VERB
alkej-433	85	15	the	the	DET
alkej-433	85	16	tool	tool	NOUN
alkej-433	85	17	life	life	NOUN
alkej-433	85	18	.	.	PUNCT
alkej-433	86	1	(	(	PUNCT
alkej-433	86	2	a	a	X
alkej-433	86	3	)	)	PUNCT
alkej-433	86	4	(	(	PUNCT
alkej-433	86	5	b	b	X
alkej-433	86	6	)	)	PUNCT
alkej-433	86	7	fig	fig	NOUN
alkej-433	86	8	.	.	PUNCT
alkej-433	87	1	5	5	NUM
alkej-433	87	2	.	.	X
alkej-433	87	3	characteristics	characteristic	NOUN
alkej-433	87	4	of	of	ADP
alkej-433	87	5	crater	crater	NOUN
alkej-433	87	6	wear	wear	NOUN
alkej-433	87	7	.	.	PUNCT
alkej-433	88	1	the	the	DET
alkej-433	88	2	variation	variation	NOUN
alkej-433	88	3	in	in	ADP
alkej-433	88	4	crater	crater	NOUN
alkej-433	88	5	wear	wear	NOUN
alkej-433	88	6	with	with	ADP
alkej-433	88	7	time	time	NOUN
alkej-433	88	8	is	be	AUX
alkej-433	88	9	shown	show	VERB
alkej-433	88	10	in	in	ADP
alkej-433	88	11	figure	figure	NOUN
alkej-433	88	12	6	6	NUM
alkej-433	88	13	.	.	PUNCT
alkej-433	88	14	three	three	NUM
alkej-433	88	15	stages	stage	NOUN
alkej-433	88	16	of	of	ADP
alkej-433	88	17	wear	wear	NOUN
alkej-433	88	18	can	can	AUX
alkej-433	88	19	be	be	AUX
alkej-433	88	20	identified	identify	VERB
alkej-433	88	21	.	.	PUNCT
alkej-433	89	1	the	the	DET
alkej-433	89	2	wear	wear	NOUN
alkej-433	89	3	rate	rate	NOUN
alkej-433	89	4	in	in	ADP
alkej-433	89	5	first	first	ADJ
alkej-433	89	6	stage	stage	NOUN
alkej-433	89	7	is	be	AUX
alkej-433	89	8	small	small	ADJ
alkej-433	89	9	,	,	PUNCT
alkej-433	89	10	but	but	CCONJ
alkej-433	89	11	this	this	DET
alkej-433	89	12	wear	wear	NOUN
alkej-433	89	13	will	will	AUX
alkej-433	89	14	increase	increase	VERB
alkej-433	89	15	gradually	gradually	ADV
alkej-433	89	16	to	to	PART
alkej-433	89	17	become	become	VERB
alkej-433	89	18	in	in	ADP
alkej-433	89	19	average	average	ADJ
alkej-433	89	20	value	value	NOUN
alkej-433	89	21	.	.	PUNCT
alkej-433	90	1	in	in	ADP
alkej-433	90	2	third	third	ADJ
alkej-433	90	3	stage	stage	NOUN
alkej-433	90	4	,	,	PUNCT
alkej-433	90	5	the	the	DET
alkej-433	90	6	rate	rate	NOUN
alkej-433	90	7	of	of	ADP
alkej-433	90	8	wear	wear	NOUN
alkej-433	90	9	will	will	AUX
alkej-433	90	10	be	be	AUX
alkej-433	90	11	very	very	ADV
alkej-433	90	12	fast	fast	ADJ
alkej-433	90	13	and	and	CCONJ
alkej-433	90	14	decrease	decrease	VERB
alkej-433	90	15	the	the	DET
alkej-433	90	16	tool	tool	NOUN
alkej-433	90	17	life	life	NOUN
alkej-433	90	18	.	.	PUNCT
alkej-433	91	1	in	in	ADP
alkej-433	91	2	stage	stage	NOUN
alkej-433	91	3	1	1	NUM
alkej-433	91	4	,	,	PUNCT
alkej-433	91	5	tool	tool	NOUN
alkej-433	91	6	wears	wear	VERB
alkej-433	91	7	ranges	range	NOUN
alkej-433	91	8	from	from	ADP
alkej-433	91	9	0	0	NUM
alkej-433	91	10	µm	µm	ADP
alkej-433	91	11	to	to	ADP
alkej-433	91	12	1.8	1.8	NUM
alkej-433	91	13	µm	µm	ADP
alkej-433	91	14	only	only	ADV
alkej-433	91	15	within	within	ADP
alkej-433	91	16	0	0	NUM
alkej-433	91	17	to	to	PART
alkej-433	91	18	10	10	NUM
alkej-433	91	19	min	min	NOUN
alkej-433	91	20	of	of	ADP
alkej-433	91	21	machining	machining	NOUN
alkej-433	91	22	.	.	PUNCT
alkej-433	92	1	in	in	ADP
alkej-433	92	2	stages	stage	NOUN
alkej-433	92	3	2	2	NUM
alkej-433	92	4	and	and	CCONJ
alkej-433	92	5	3	3	NUM
alkej-433	92	6	,	,	PUNCT
alkej-433	92	7	we	we	PRON
alkej-433	92	8	found	find	VERB
alkej-433	92	9	that	that	SCONJ
alkej-433	92	10	;	;	PUNCT
alkej-433	92	11	when	when	SCONJ
alkej-433	92	12	the	the	DET
alkej-433	92	13	machining	machining	NOUN
alkej-433	92	14	time	time	NOUN
alkej-433	92	15	increases	increase	NOUN
alkej-433	92	16	,	,	PUNCT
alkej-433	92	17	the	the	DET
alkej-433	92	18	crater	crater	NOUN
alkej-433	92	19	wear	wear	NOUN
alkej-433	92	20	will	will	AUX
alkej-433	92	21	increase	increase	VERB
alkej-433	92	22	.	.	PUNCT
alkej-433	93	1	in	in	ADP
alkej-433	93	2	this	this	DET
alkej-433	93	3	case	case	NOUN
alkej-433	93	4	the	the	DET
alkej-433	93	5	approximating	approximate	VERB
alkej-433	93	6	time	time	NOUN
alkej-433	93	7	for	for	ADP
alkej-433	93	8	tool	tool	NOUN
alkej-433	93	9	fails	fail	VERB
alkej-433	93	10	during	during	ADP
alkej-433	93	11	machining	machining	NOUN
alkej-433	93	12	is	be	AUX
alkej-433	93	13	about	about	ADP
alkej-433	93	14	(	(	PUNCT
alkej-433	93	15	35	35	NUM
alkej-433	93	16	)	)	PUNCT
alkej-433	93	17	minutes	minute	NOUN
alkej-433	93	18	.	.	PUNCT
alkej-433	94	1	6	6	NUM
alkej-433	94	2	.	.	X
alkej-433	94	3	results	result	NOUN
alkej-433	94	4	and	and	CCONJ
alkej-433	94	5	discussion	discussion	NOUN
alkej-433	94	6	6.1	6.1	NUM
alkej-433	94	7	:	:	PUNCT
alkej-433	94	8	types	type	NOUN
alkej-433	94	9	of	of	ADP
alkej-433	94	10	tool	tool	NOUN
alkej-433	94	11	wear	wear	VERB
alkej-433	94	12	and	and	CCONJ
alkej-433	94	13	how	how	SCONJ
alkej-433	94	14	to	to	PART
alkej-433	94	15	measure	measure	VERB
alkej-433	94	16	them	they	PRON
alkej-433	94	17	friction	friction	NOUN
alkej-433	94	18	between	between	ADP
alkej-433	94	19	the	the	DET
alkej-433	94	20	tool	tool	NOUN
alkej-433	94	21	and	and	CCONJ
alkej-433	94	22	the	the	DET
alkej-433	94	23	work	work	NOUN
alkej-433	94	24	piece	piece	NOUN
alkej-433	94	25	during	during	ADP
alkej-433	94	26	cutting	cut	VERB
alkej-433	94	27	/	/	SYM
alkej-433	94	28	machining	machining	NOUN
alkej-433	94	29	generates	generate	VERB
alkej-433	94	30	high	high	ADJ
alkej-433	94	31	stresses	stress	NOUN
alkej-433	94	32	and	and	CCONJ
alkej-433	94	33	produces	produce	VERB
alkej-433	94	34	a	a	DET
alkej-433	94	35	wear	wear	NOUN
alkej-433	94	36	pattern	pattern	NOUN
alkej-433	94	37	on	on	ADP
alkej-433	94	38	the	the	DET
alkej-433	94	39	flank	flank	NOUN
alkej-433	94	40	and	and	CCONJ
alkej-433	94	41	the	the	DET
alkej-433	94	42	rake	rake	NOUN
alkej-433	94	43	faces	face	NOUN
alkej-433	94	44	of	of	ADP
alkej-433	94	45	machine	machine	NOUN
alkej-433	94	46	tools	tool	NOUN
alkej-433	94	47	[	[	X
alkej-433	94	48	6	6	NUM
alkej-433	94	49	]	]	PUNCT
alkej-433	94	50	.	.	PUNCT
alkej-433	95	1	crater	crater	NOUN
alkej-433	95	2	and	and	CCONJ
alkej-433	95	3	flank	flank	NOUN
alkej-433	95	4	wears	wear	NOUN
alkej-433	95	5	are	be	AUX
alkej-433	95	6	the	the	DET
alkej-433	95	7	most	most	ADV
alkej-433	95	8	significant	significant	ADJ
alkej-433	95	9	types	type	NOUN
alkej-433	95	10	of	of	ADP
alkej-433	95	11	wear	wear	NOUN
alkej-433	95	12	.	.	PUNCT
alkej-433	96	1	as	as	SCONJ
alkej-433	96	2	discussed	discuss	VERB
alkej-433	96	3	previously	previously	ADV
alkej-433	96	4	,	,	PUNCT
alkej-433	96	5	crater	crater	NOUN
alkej-433	96	6	wear	wear	NOUN
alkej-433	96	7	occurs	occur	VERB
alkej-433	96	8	on	on	ADP
alkej-433	96	9	the	the	DET
alkej-433	96	10	rake	rake	NOUN
alkej-433	96	11	surfaces	surface	NOUN
alkej-433	96	12	of	of	ADP
alkej-433	96	13	tools	tool	NOUN
alkej-433	96	14	(	(	PUNCT
alkej-433	96	15	figures	figure	NOUN
alkej-433	96	16	5	5	NUM
alkej-433	96	17	to	to	ADP
alkej-433	96	18	8)	8)	NUM
alkej-433	96	19	.	.	PUNCT
alkej-433	97	1	four	four	NUM
alkej-433	97	2	parameters	parameter	NOUN
alkej-433	97	3	characterize	characterize	VERB
alkej-433	97	4	or	or	CCONJ
alkej-433	97	5	measure	measure	VERB
alkej-433	97	6	crater	crater	NOUN
alkej-433	97	7	wear	wear	NOUN
alkej-433	97	8	[	[	PUNCT
alkej-433	97	9	5,7	5,7	NUM
alkej-433	97	10	]	]	PUNCT
alkej-433	97	11	,	,	PUNCT
alkej-433	97	12	as	as	SCONJ
alkej-433	97	13	shown	show	VERB
alkej-433	97	14	in	in	ADP
alkej-433	97	15	figure	figure	NOUN
alkej-433	97	16	8	8	NUM
alkej-433	97	17	.	.	PUNCT
alkej-433	98	1	these	these	DET
alkej-433	98	2	parameters	parameter	NOUN
alkej-433	98	3	include	include	VERB
alkej-433	98	4	crater	crater	ADJ
alkej-433	98	5	depth	depth	NOUN
alkej-433	98	6	,	,	PUNCT
alkej-433	98	7	width	width	ADJ
alkej-433	98	8	,	,	PUNCT
alkej-433	98	9	and	and	CCONJ
alkej-433	98	10	distance	distance	NOUN
alkej-433	98	11	from	from	ADP
alkej-433	98	12	the	the	DET
alkej-433	98	13	beginning	beginning	NOUN
alkej-433	98	14	to	to	ADP
alkej-433	98	15	the	the	DET
alkej-433	98	16	middle	middle	ADJ
alkej-433	98	17	.	.	PUNCT
alkej-433	99	1	depth	depth	NOUN
alkej-433	99	2	is	be	AUX
alkej-433	99	3	the	the	DET
alkej-433	99	4	most	most	ADV
alkej-433	99	5	widely	widely	ADV
alkej-433	99	6	used	use	VERB
alkej-433	99	7	parameter	parameter	NOUN
alkej-433	99	8	for	for	ADP
alkej-433	99	9	evaluating	evaluate	VERB
alkej-433	99	10	and	and	CCONJ
alkej-433	99	11	measuring	measure	VERB
alkej-433	99	12	crater	crater	NOUN
alkej-433	99	13	wear	wear	NOUN
alkej-433	99	14	.	.	PUNCT
alkej-433	100	1	it	it	PRON
alkej-433	100	2	is	be	AUX
alkej-433	100	3	typically	typically	ADV
alkej-433	100	4	used	use	VERB
alkej-433	100	5	to	to	PART
alkej-433	100	6	determine	determine	VERB
alkej-433	100	7	the	the	DET
alkej-433	100	8	effect	effect	NOUN
alkej-433	100	9	of	of	ADP
alkej-433	100	10	cutting	cut	VERB
alkej-433	100	11	speed	speed	NOUN
alkej-433	100	12	on	on	ADP
alkej-433	100	13	crater	crater	ADJ
alkej-433	100	14	wear	wear	NOUN
alkej-433	100	15	.	.	PUNCT
alkej-433	101	1	the	the	DET
alkej-433	101	2	figure	figure	NOUN
alkej-433	101	3	below	below	ADV
alkej-433	101	4	illustrates	illustrate	VERB
alkej-433	101	5	the	the	DET
alkej-433	101	6	effect	effect	NOUN
alkej-433	101	7	of	of	ADP
alkej-433	101	8	speed	speed	NOUN
alkej-433	101	9	on	on	ADP
alkej-433	101	10	crater	crater	ADJ
alkej-433	101	11	wear	wear	NOUN
alkej-433	101	12	.	.	PUNCT
alkej-433	102	1	figures	figure	NOUN
alkej-433	102	2	(	(	PUNCT
alkej-433	102	3	7	7	NUM
alkej-433	102	4	,	,	PUNCT
alkej-433	102	5	8)	8)	NUM
alkej-433	102	6	and	and	CCONJ
alkej-433	102	7	characterizes	characterize	VERB
alkej-433	102	8	the	the	DET
alkej-433	102	9	cutting	cutting	NOUN
alkej-433	102	10	time	time	NOUN
alkej-433	102	11	,	,	PUNCT
alkej-433	102	12	depth	depth	NOUN
alkej-433	102	13	,	,	PUNCT
alkej-433	102	14	and	and	CCONJ
alkej-433	102	15	width	width	NOUN
alkej-433	102	16	of	of	ADP
alkej-433	102	17	the	the	DET
alkej-433	102	18	crater	crater	NOUN
alkej-433	102	19	parameters	parameter	NOUN
alkej-433	102	20	.	.	PUNCT
alkej-433	103	1	kamil	kamil	PROPN
alkej-433	103	2	j.	j.	PROPN
alkej-433	103	3	kadhim	kadhim	PROPN
alkej-433	103	4	al	al	PROPN
alkej-433	103	5	-	-	PUNCT
alkej-433	103	6	khwarizmi	khwarizmi	PROPN
alkej-433	103	7	engineering	engineering	NOUN
alkej-433	103	8	journal	journal	PROPN
alkej-433	103	9	,	,	PUNCT
alkej-433	103	10	vol	vol	NOUN
alkej-433	103	11	.	.	PROPN
alkej-433	103	12	13	13	NUM
alkej-433	103	13	,	,	PUNCT
alkej-433	103	14	no	no	INTJ
alkej-433	103	15	.	.	NOUN
alkej-433	103	16	4	4	NUM
alkej-433	103	17	,	,	PUNCT
alkej-433	103	18	p.p	p.p	PROPN
alkej-433	103	19	.	.	NOUN
alkej-433	103	20	5868	5868	NUM
alkej-433	103	21	(	(	PUNCT
alkej-433	103	22	2017	2017	NUM
alkej-433	103	23	)	)	PUNCT
alkej-433	103	24	63	63	NUM
alkej-433	103	25	fig	fig	NOUN
alkej-433	103	26	.	.	PUNCT
alkej-433	104	1	6	6	NUM
alkej-433	104	2	.	.	PUNCT
alkej-433	104	3	effects	effect	NOUN
alkej-433	104	4	of	of	ADP
alkej-433	104	5	cutting	cut	VERB
alkej-433	104	6	speed	speed	NOUN
alkej-433	104	7	on	on	ADP
alkej-433	104	8	crater	crater	NOUN
alkej-433	104	9	wear	wear	NOUN
alkej-433	104	10	depth	depth	NOUN
alkej-433	104	11	.	.	PUNCT
alkej-433	105	1	[	[	X
alkej-433	105	2	14	14	NUM
alkej-433	105	3	]	]	PUNCT
alkej-433	105	4	.	.	PUNCT
alkej-433	106	1	fig	fig	NOUN
alkej-433	106	2	.	.	PUNCT
alkej-433	107	1	7	7	X
alkej-433	107	2	.	.	NOUN
alkej-433	107	3	width	width	ADJ
alkej-433	107	4	and	and	CCONJ
alkej-433	107	5	depth	depth	NOUN
alkej-433	107	6	as	as	ADP
alkej-433	107	7	measurements	measurement	NOUN
alkej-433	107	8	of	of	ADP
alkej-433	107	9	crater	crater	NOUN
alkej-433	107	10	wear	wear	NOUN
alkej-433	107	11	.	.	PUNCT
alkej-433	108	1	using	use	VERB
alkej-433	108	2	tool	tool	NOUN
alkej-433	108	3	geometry	geometry	NOUN
alkej-433	108	4	and	and	CCONJ
alkej-433	108	5	crater	crater	NOUN
alkej-433	108	6	parameters	parameter	NOUN
alkej-433	108	7	(	(	PUNCT
alkej-433	108	8	as	as	SCONJ
alkej-433	108	9	shown	show	VERB
alkej-433	108	10	in	in	ADP
alkej-433	108	11	the	the	DET
alkej-433	108	12	figure	figure	NOUN
alkej-433	108	13	8,a	8,a	NUM
alkej-433	108	14	)	)	PUNCT
alkej-433	108	15	,	,	PUNCT
alkej-433	108	16	[	[	X
alkej-433	108	17	4	4	X
alkej-433	108	18	]	]	PUNCT
alkej-433	108	19	proposed	propose	VERB
alkej-433	108	20	the	the	DET
alkej-433	108	21	following	follow	VERB
alkej-433	108	22	equations	equation	NOUN
alkej-433	108	23	(	(	PUNCT
alkej-433	108	24	equation	equation	NOUN
alkej-433	108	25	1	1	NUM
alkej-433	108	26	)	)	PUNCT
alkej-433	108	27	for	for	ADP
alkej-433	108	28	measuring	measure	VERB
alkej-433	108	29	crater	crater	NOUN
alkej-433	108	30	wear	wear	NOUN
alkej-433	108	31	in	in	ADP
alkej-433	108	32	machine	machine	NOUN
alkej-433	108	33	tools	tool	NOUN
alkej-433	108	34	mathematical	mathematical	ADJ
alkej-433	108	35	and	and	CCONJ
alkej-433	108	36	the	the	DET
alkej-433	108	37	optical	optical	ADJ
alkej-433	108	38	microscope(figure	microscope(figure	NOUN
alkej-433	108	39	8	8	NUM
alkej-433	108	40	,	,	PUNCT
alkej-433	108	41	b	b	NOUN
alkej-433	108	42	)	)	PUNCT
alkej-433	108	43	.	.	PUNCT
alkej-433	109	1	in	in	ADP
alkej-433	109	2	this	this	DET
alkej-433	109	3	paper	paper	NOUN
alkej-433	109	4	the	the	DET
alkej-433	109	5	crater	crater	NOUN
alkej-433	109	6	wear	wear	NOUN
alkej-433	109	7	was	be	AUX
alkej-433	109	8	calculated	calculate	VERB
alkej-433	109	9	using	use	VERB
alkej-433	109	10	the	the	DET
alkej-433	109	11	optical	optical	ADJ
alkej-433	109	12	microscope	microscope	NOUN
alkej-433	109	13	method	method	NOUN
alkej-433	109	14	.	.	PUNCT
alkej-433	110	1	thickness	thickness	NOUN
alkej-433	110	2	measurements	measurement	NOUN
alkej-433	110	3	were	be	AUX
alkej-433	110	4	conducted	conduct	VERB
alkej-433	110	5	on	on	ADP
alkej-433	110	6	a	a	DET
alkej-433	110	7	brittle	brittle	ADJ
alkej-433	110	8	fracture	fracture	NOUN
alkej-433	110	9	surface	surface	NOUN
alkej-433	110	10	of	of	ADP
alkej-433	110	11	a	a	DET
alkej-433	110	12	sample	sample	NOUN
alkej-433	110	13	.	.	PUNCT
alkej-433	111	1	sem	sem	NOUN
alkej-433	111	2	micrograph	micrograph	NOUN
alkej-433	111	3	of	of	ADP
alkej-433	111	4	the	the	DET
alkej-433	111	5	evaluated	evaluate	VERB
alkej-433	111	6	coatings	coating	NOUN
alkej-433	111	7	together	together	ADV
alkej-433	111	8	with	with	ADP
alkej-433	111	9	energy	energy	NOUN
alkej-433	111	10	dispersive	dispersive	ADJ
alkej-433	111	11	x	x	NOUN
alkej-433	111	12	-	-	NOUN
alkej-433	111	13	ray	ray	NOUN
alkej-433	111	14	analysis	analysis	NOUN
alkej-433	111	15	(	(	PUNCT
alkej-433	111	16	edx	edx	PROPN
alkej-433	111	17	)	)	PUNCT
alkej-433	111	18	which	which	PRON
alkej-433	111	19	was	be	AUX
alkej-433	111	20	performed	perform	VERB
alkej-433	111	21	in	in	ADP
alkej-433	111	22	nitrogen	nitrogen	NOUN
alkej-433	111	23	atmosphere	atmosphere	NOUN
alkej-433	111	24	to	to	PART
alkej-433	111	25	determine	determine	VERB
alkej-433	111	26	the	the	DET
alkej-433	111	27	elements	element	NOUN
alkej-433	111	28	contents	content	NOUN
alkej-433	111	29	in	in	ADP
alkej-433	111	30	substrate	substrate	NOUN
alkej-433	111	31	as	as	SCONJ
alkej-433	111	32	such	such	ADJ
alkej-433	111	33	shown	show	VERB
alkej-433	111	34	in	in	ADP
alkej-433	111	35	figure	figure	NOUN
alkej-433	111	36	9	9	NUM
alkej-433	111	37	.	.	PUNCT
alkej-433	111	38	�	�	PROPN
alkej-433	111	39	�	�	PROPN
alkej-433	111	40	�	�	PROPN
alkej-433	111	41	�	�	PROPN
alkej-433	111	42	�	�	PROPN
alkej-433	111	43	�	�	PROPN
alkej-433	111	44	�	�	PROPN
alkej-433	111	45	�	�	PROPN
alkej-433	111	46	�	�	PROPN
alkej-433	111	47	�	�	PROPN
alkej-433	111	48	�	�	PROPN
alkej-433	111	49	�	�	PROPN
alkej-433	111	50	�	�	PROPN
alkej-433	111	51	�	�	PROPN
alkej-433	111	52	…	…	PUNCT
alkej-433	111	53	(	(	PUNCT
alkej-433	111	54	1	1	NUM
alkej-433	111	55	)	)	PUNCT
alkej-433	111	56	where	where	SCONJ
alkej-433	111	57	�	�	PROPN
alkej-433	111	58	�	�	PROPN
alkej-433	111	59	radius	radius	PROPN
alkej-433	111	60	�	�	PROPN
alkej-433	111	61	�	�	PROPN
alkej-433	111	62	contact	contact	NOUN
alkej-433	111	63	length	length	NOUN
alkej-433	111	64	.	.	PUNCT
alkej-433	112	1	(	(	PUNCT
alkej-433	112	2	a	a	X
alkej-433	112	3	)	)	PUNCT
alkej-433	112	4	(	(	PUNCT
alkej-433	112	5	b	b	X
alkej-433	112	6	)	)	PUNCT
alkej-433	112	7	fig	fig	NOUN
alkej-433	112	8	.	.	PUNCT
alkej-433	113	1	8	8	NUM
alkej-433	113	2	.	.	PUNCT
alkej-433	114	1	(	(	PUNCT
alkej-433	114	2	a	a	X
alkej-433	114	3	):	):	PUNCT
alkej-433	114	4	estimating	estimate	VERB
alkej-433	114	5	dimensions	dimension	NOUN
alkej-433	114	6	of	of	ADP
alkej-433	114	7	crater	crater	NOUN
alkej-433	114	8	wear	wear	VERB
alkej-433	114	9	arithmetically	arithmetically	ADV
alkej-433	114	10	.	.	PUNCT
alkej-433	115	1	(	(	PUNCT
alkej-433	115	2	b	b	X
alkej-433	115	3	):	):	PUNCT
alkej-433	115	4	optical	optical	ADJ
alkej-433	115	5	microscopy	microscopy	NOUN
alkej-433	115	6	used	use	VERB
alkej-433	115	7	in	in	ADP
alkej-433	115	8	of	of	ADP
alkej-433	115	9	measured	measure	VERB
alkej-433	115	10	crater	crater	NOUN
alkej-433	115	11	wear	wear	NOUN
alkej-433	115	12	in	in	ADP
alkej-433	115	13	this	this	DET
alkej-433	115	14	paper	paper	NOUN
alkej-433	115	15	.	.	PUNCT
alkej-433	116	1	kamil	kamil	PROPN
alkej-433	116	2	j.	j.	PROPN
alkej-433	116	3	kadhim	kadhim	PROPN
alkej-433	116	4	al	al	PROPN
alkej-433	116	5	-	-	PUNCT
alkej-433	116	6	khwarizmi	khwarizmi	PROPN
alkej-433	116	7	engineering	engineering	NOUN
alkej-433	116	8	journal	journal	PROPN
alkej-433	116	9	,	,	PUNCT
alkej-433	116	10	vol	vol	NOUN
alkej-433	116	11	.	.	PROPN
alkej-433	116	12	13	13	NUM
alkej-433	116	13	,	,	PUNCT
alkej-433	116	14	no	no	INTJ
alkej-433	116	15	.	.	NOUN
alkej-433	116	16	4	4	NUM
alkej-433	116	17	,	,	PUNCT
alkej-433	116	18	p.p	p.p	PROPN
alkej-433	116	19	.	.	NOUN
alkej-433	116	20	5868	5868	NUM
alkej-433	116	21	(	(	PUNCT
alkej-433	116	22	2017	2017	NUM
alkej-433	116	23	)	)	PUNCT
alkej-433	116	24	64	64	NUM
alkej-433	116	25	(	(	PUNCT
alkej-433	116	26	a	a	NOUN
alkej-433	116	27	)	)	PUNCT
alkej-433	116	28	(	(	PUNCT
alkej-433	116	29	b	b	X
alkej-433	116	30	)	)	PUNCT
alkej-433	116	31	(	(	PUNCT
alkej-433	116	32	c	c	X
alkej-433	116	33	)	)	PUNCT
alkej-433	116	34	(	(	PUNCT
alkej-433	116	35	d	d	X
alkej-433	116	36	)	)	PUNCT
alkej-433	116	37	(	(	PUNCT
alkej-433	116	38	e	e	NOUN
alkej-433	116	39	)	)	PUNCT
alkej-433	116	40	fig	fig	NOUN
alkej-433	116	41	.	.	PUNCT
alkej-433	117	1	9	9	X
alkej-433	117	2	.	.	X
alkej-433	117	3	a	a	DET
alkej-433	117	4	,	,	PUNCT
alkej-433	117	5	b	b	NOUN
alkej-433	117	6	,	,	PUNCT
alkej-433	117	7	c	c	NOUN
alkej-433	117	8	,	,	PUNCT
alkej-433	117	9	d	d	NOUN
alkej-433	117	10	,	,	PUNCT
alkej-433	117	11	and	and	CCONJ
alkej-433	117	12	e	e	X
alkej-433	117	13	brittle	brittle	ADJ
alkej-433	117	14	fracture	fracture	NOUN
alkej-433	117	15	(	(	PUNCT
alkej-433	117	16	micrograph	micrograph	NOUN
alkej-433	117	17	)	)	PUNCT
alkej-433	117	18	and	and	CCONJ
alkej-433	117	19	sem	sem	PROPN
alkej-433	117	20	/	/	SYM
alkej-433	117	21	edx	edx	PROPN
alkej-433	117	22	spectrum	spectrum	NOUN
alkej-433	117	23	of	of	ADP
alkej-433	117	24	ti	ti	PROPN
alkej-433	117	25	/	/	SYM
alkej-433	117	26	altin	altin	PROPN
alkej-433	117	27	,	,	PUNCT
alkej-433	117	28	thickness	thickness	NOUN
alkej-433	117	29	1.183	1.183	NUM
alkej-433	117	30	to	to	ADP
alkej-433	117	31	3.081	3.081	NUM
alkej-433	117	32	µm	µm	ADP
alkej-433	117	33	kamil	kamil	PROPN
alkej-433	117	34	j.	j.	PROPN
alkej-433	117	35	kadhim	kadhim	PROPN
alkej-433	117	36	al	al	PROPN
alkej-433	117	37	-	-	PUNCT
alkej-433	117	38	khwarizmi	khwarizmi	PROPN
alkej-433	117	39	engineering	engineering	NOUN
alkej-433	117	40	journal	journal	PROPN
alkej-433	117	41	,	,	PUNCT
alkej-433	117	42	vol	vol	NOUN
alkej-433	117	43	.	.	PROPN
alkej-433	117	44	13	13	NUM
alkej-433	117	45	,	,	PUNCT
alkej-433	117	46	no	no	INTJ
alkej-433	117	47	.	.	NOUN
alkej-433	117	48	4	4	NUM
alkej-433	117	49	,	,	PUNCT
alkej-433	117	50	p.p	p.p	PROPN
alkej-433	117	51	.	.	NOUN
alkej-433	117	52	5868	5868	NUM
alkej-433	117	53	(	(	PUNCT
alkej-433	117	54	2017	2017	NUM
alkej-433	117	55	)	)	PUNCT
alkej-433	117	56	65	65	NUM
alkej-433	117	57	6.2	6.2	NUM
alkej-433	117	58	.	.	PUNCT
alkej-433	118	1	tribological	tribological	ADJ
alkej-433	118	2	properties	property	NOUN
alkej-433	118	3	figure	figure	VERB
alkej-433	118	4	10	10	NUM
alkej-433	118	5	:	:	PUNCT
alkej-433	118	6	shows	show	VERB
alkej-433	118	7	the	the	DET
alkej-433	118	8	cof	cof	PROPN
alkej-433	118	9	of	of	ADP
alkej-433	118	10	the	the	DET
alkej-433	118	11	sliding	sliding	ADJ
alkej-433	118	12	time	time	NOUN
alkej-433	118	13	for	for	ADP
alkej-433	118	14	the	the	DET
alkej-433	118	15	tin	tin	NOUN
alkej-433	118	16	/	/	SYM
alkej-433	118	17	altin	altin	ADJ
alkej-433	118	18	multilayer	multilayer	ADJ
alkej-433	118	19	coatings	coating	NOUN
alkej-433	118	20	and	and	CCONJ
alkej-433	118	21	the	the	DET
alkej-433	118	22	tungsten	tungsten	ADJ
alkej-433	118	23	carbide	carbide	NOUN
alkej-433	118	24	specimen	speciman	NOUN
alkej-433	118	25	at	at	ADP
alkej-433	118	26	room	room	NOUN
alkej-433	118	27	temperature	temperature	NOUN
alkej-433	118	28	.	.	PUNCT
alkej-433	119	1	after	after	ADP
alkej-433	119	2	0	0	NUM
alkej-433	119	3	s	s	PART
alkej-433	119	4	to	to	ADP
alkej-433	119	5	200	200	NUM
alkej-433	119	6	s	s	NOUN
alkej-433	119	7	,	,	PUNCT
alkej-433	119	8	the	the	DET
alkej-433	119	9	cof	cof	PROPN
alkej-433	119	10	of	of	ADP
alkej-433	119	11	the	the	DET
alkej-433	119	12	substrate	substrate	NOUN
alkej-433	119	13	reached	reach	VERB
alkej-433	119	14	0.63	0.63	NUM
alkej-433	119	15	.	.	PUNCT
alkej-433	120	1	given	give	VERB
alkej-433	120	2	the	the	DET
alkej-433	120	3	extreme	extreme	ADJ
alkej-433	120	4	hardness	hardness	NOUN
alkej-433	120	5	at	at	ADP
alkej-433	120	6	the	the	DET
alkej-433	120	7	thickness	thickness	NOUN
alkej-433	120	8	layers	layer	NOUN
alkej-433	120	9	of	of	ADP
alkej-433	120	10	3.0818	3.0818	NUM
alkej-433	120	11	µm	µm	NOUN
alkej-433	120	12	,	,	PUNCT
alkej-433	120	13	the	the	DET
alkej-433	120	14	wear	wear	NOUN
alkej-433	120	15	process	process	NOUN
alkej-433	120	16	was	be	AUX
alkej-433	120	17	deemed	deem	VERB
alkej-433	120	18	stable	stable	ADJ
alkej-433	120	19	.	.	PUNCT
alkej-433	121	1	however	however	ADV
alkej-433	121	2	,	,	PUNCT
alkej-433	121	3	the	the	DET
alkej-433	121	4	tin	tin	NOUN
alkej-433	121	5	/	/	SYM
alkej-433	121	6	altin	altin	ADJ
alkej-433	121	7	coatings	coating	NOUN
alkej-433	121	8	at	at	ADP
alkej-433	121	9	the	the	DET
alkej-433	121	10	thickness	thickness	NOUN
alkej-433	121	11	layers	layer	NOUN
alkej-433	121	12	of	of	ADP
alkej-433	121	13	1.735	1.735	NUM
alkej-433	121	14	µm	µm	ADP
alkej-433	121	15	notably	notably	ADV
alkej-433	121	16	exhibited	exhibit	VERB
alkej-433	121	17	low	low	ADJ
alkej-433	121	18	hardness	hardness	NOUN
alkej-433	121	19	,	,	PUNCT
alkej-433	121	20	which	which	PRON
alkej-433	121	21	indicated	indicate	VERB
alkej-433	121	22	that	that	SCONJ
alkej-433	121	23	their	their	PRON
alkej-433	121	24	wear	wear	NOUN
alkej-433	121	25	resistance	resistance	NOUN
alkej-433	121	26	was	be	AUX
alkej-433	121	27	better	well	ADJ
alkej-433	121	28	than	than	ADP
alkej-433	121	29	that	that	PRON
alkej-433	121	30	of	of	ADP
alkej-433	121	31	other	other	ADJ
alkej-433	121	32	tin	tin	NOUN
alkej-433	121	33	/	/	SYM
alkej-433	121	34	altin	altin	ADJ
alkej-433	121	35	coatings	coating	NOUN
alkej-433	121	36	.	.	PUNCT
alkej-433	122	1	fig	fig	NOUN
alkej-433	122	2	.	.	PUNCT
alkej-433	123	1	10	10	NUM
alkej-433	123	2	.	.	PUNCT
alkej-433	124	1	cof	cof	PROPN
alkej-433	124	2	of	of	ADP
alkej-433	124	3	ti	ti	PROPN
alkej-433	124	4	/	/	SYM
alkej-433	124	5	altin	altin	ADJ
alkej-433	124	6	multilayer	multilayer	ADJ
alkej-433	124	7	coating	coating	NOUN
alkej-433	124	8	of	of	ADP
alkej-433	124	9	substrate	substrate	NOUN
alkej-433	124	10	with	with	ADP
alkej-433	124	11	different	different	ADJ
alkej-433	124	12	thickness	thickness	NOUN
alkej-433	124	13	layers	layer	NOUN
alkej-433	124	14	.	.	PUNCT
alkej-433	125	1	there	there	PRON
alkej-433	125	2	are	be	VERB
alkej-433	125	3	some	some	PRON
alkej-433	125	4	of	of	ADP
alkej-433	125	5	wear	wear	NOUN
alkej-433	125	6	scar	scar	NOUN
alkej-433	125	7	will	will	AUX
alkej-433	125	8	appear	appear	VERB
alkej-433	125	9	at	at	ADP
alkej-433	125	10	a	a	DET
alkej-433	125	11	thickness	thickness	NOUN
alkej-433	125	12	layer	layer	NOUN
alkej-433	125	13	of	of	ADP
alkej-433	125	14	(	(	PUNCT
alkej-433	125	15	3.0818	3.0818	NUM
alkej-433	125	16	)	)	PUNCT
alkej-433	125	17	µm	µm	NOUN
alkej-433	125	18	on	on	ADP
alkej-433	125	19	the	the	DET
alkej-433	125	20	multilayer	multilayer	ADJ
alkej-433	125	21	coatings	coating	NOUN
alkej-433	125	22	deposited	deposit	VERB
alkej-433	125	23	surface	surface	NOUN
alkej-433	125	24	of	of	ADP
alkej-433	125	25	the	the	DET
alkej-433	125	26	ti	ti	NOUN
alkej-433	125	27	/	/	SYM
alkej-433	125	28	altin	altin	NOUN
alkej-433	125	29	.	.	PUNCT
alkej-433	126	1	normally	normally	ADV
alkej-433	126	2	a	a	DET
alkej-433	126	3	transferred	transfer	VERB
alkej-433	126	4	layer	layer	NOUN
alkej-433	126	5	will	will	AUX
alkej-433	126	6	cover	cover	VERB
alkej-433	126	7	the	the	DET
alkej-433	126	8	wear	wear	NOUN
alkej-433	126	9	scar	scar	NOUN
alkej-433	126	10	,	,	PUNCT
alkej-433	126	11	which	which	PRON
alkej-433	126	12	was	be	AUX
alkej-433	126	13	composed	compose	VERB
alkej-433	126	14	mainly	mainly	ADV
alkej-433	126	15	of	of	ADP
alkej-433	126	16	fe	fe	NOUN
alkej-433	126	17	and	and	CCONJ
alkej-433	126	18	several	several	ADJ
alkej-433	126	19	fe	fe	NOUN
alkej-433	126	20	oxides	oxide	NOUN
alkej-433	126	21	(	(	PUNCT
alkej-433	126	22	as	as	SCONJ
alkej-433	126	23	shown	show	VERB
alkej-433	126	24	in	in	ADP
alkej-433	126	25	table	table	NOUN
alkej-433	126	26	6).using	6).use	VERB
alkej-433	126	27	energy	energy	NOUN
alkej-433	126	28	dispersive	dispersive	ADJ
alkej-433	126	29	x	x	NOUN
alkej-433	126	30	-	-	NOUN
alkej-433	126	31	ray	ray	NOUN
alkej-433	126	32	analysis	analysis	NOUN
alkej-433	126	33	(	(	PUNCT
alkej-433	126	34	edx	edx	PROPN
alkej-433	126	35	)	)	PUNCT
alkej-433	126	36	which	which	PRON
alkej-433	126	37	was	be	AUX
alkej-433	126	38	performed	perform	VERB
alkej-433	126	39	in	in	ADP
alkej-433	126	40	nitrogen	nitrogen	NOUN
alkej-433	126	41	atmosphere	atmosphere	NOUN
alkej-433	126	42	to	to	PART
alkej-433	126	43	determine	determine	VERB
alkej-433	126	44	the	the	DET
alkej-433	126	45	elements	element	NOUN
alkej-433	126	46	contents	content	NOUN
alkej-433	126	47	in	in	ADP
alkej-433	126	48	substrate	substrate	NOUN
alkej-433	126	49	as	as	SCONJ
alkej-433	126	50	such	such	ADJ
alkej-433	126	51	shown	show	VERB
alkej-433	126	52	in	in	ADP
alkej-433	126	53	table	table	NOUN
alkej-433	126	54	6	6	NUM
alkej-433	126	55	.	.	PUNCT
alkej-433	126	56	table	table	NOUN
alkej-433	126	57	6	6	NUM
alkej-433	126	58	,	,	PUNCT
alkej-433	126	59	elements	element	NOUN
alkej-433	126	60	of	of	ADP
alkej-433	126	61	the	the	DET
alkej-433	126	62	wear	wear	NOUN
alkej-433	126	63	debris	debris	NOUN
alkej-433	126	64	of	of	ADP
alkej-433	126	65	ti	ti	NOUN
alkej-433	126	66	/	/	SYM
alkej-433	126	67	altin	altin	ADJ
alkej-433	126	68	multilayer	multilayer	ADJ
alkej-433	126	69	coatings	coating	NOUN
alkej-433	126	70	at	at	ADP
alkej-433	126	71	thickness	thickness	NOUN
alkej-433	126	72	layer	layer	NOUN
alkej-433	126	73	of	of	ADP
alkej-433	126	74	3.0818	3.0818	NUM
alkej-433	126	75	µm	µm	NOUN
alkej-433	126	76	.	.	PUNCT
alkej-433	126	77	element	element	PROPN
alkej-433	126	78	wt.%	wt.%	ADJ
alkej-433	126	79	at	at	ADP
alkej-433	126	80	.	.	PUNCT
alkej-433	127	1	%	%	INTJ
alkej-433	128	1	o	o	NOUN
alkej-433	128	2	23.34	23.34	NUM
alkej-433	128	3	50.91	50.91	NUM
alkej-433	128	4	ti	ti	NOUN
alkej-433	128	5	11.36	11.36	NUM
alkej-433	128	6	8.28	8.28	NUM
alkej-433	128	7	fe	fe	X
alkej-433	128	8	65.30	65.30	NUM
alkej-433	128	9	40.81	40.81	NUM
alkej-433	128	10	the	the	DET
alkej-433	128	11	hardness	hardness	NOUN
alkej-433	128	12	of	of	ADP
alkej-433	128	13	ti	ti	NOUN
alkej-433	128	14	/	/	SYM
alkej-433	128	15	altin	altin	ADJ
alkej-433	128	16	coatings	coating	NOUN
alkej-433	128	17	is	be	AUX
alkej-433	128	18	very	very	ADV
alkej-433	128	19	high	high	ADJ
alkej-433	128	20	relative	relative	ADJ
alkej-433	128	21	to	to	ADP
alkej-433	128	22	the	the	DET
alkej-433	128	23	hardness	hardness	NOUN
alkej-433	128	24	of	of	ADP
alkej-433	128	25	gcr15	gcr15	NOUN
alkej-433	128	26	debris	debris	NOUN
alkej-433	128	27	ball	ball	NOUN
alkej-433	128	28	which	which	PRON
alkej-433	128	29	generated	generate	VERB
alkej-433	128	30	during	during	ADP
alkej-433	128	31	the	the	DET
alkej-433	128	32	wear	wear	NOUN
alkej-433	128	33	process	process	NOUN
alkej-433	128	34	.	.	PUNCT
alkej-433	129	1	due	due	ADP
alkej-433	129	2	to	to	ADP
alkej-433	129	3	tribo	tribo	ADJ
alkej-433	129	4	-	-	PUNCT
alkej-433	129	5	oxidation	oxidation	NOUN
alkej-433	129	6	happened	happen	VERB
alkej-433	129	7	in	in	ADP
alkej-433	129	8	this	this	DET
alkej-433	129	9	process	process	NOUN
alkej-433	129	10	,	,	PUNCT
alkej-433	129	11	the	the	DET
alkej-433	129	12	wear	wear	NOUN
alkej-433	129	13	debris	debris	NOUN
alkej-433	129	14	was	be	AUX
alkej-433	129	15	accumulated	accumulate	VERB
alkej-433	129	16	,	,	PUNCT
alkej-433	129	17	entrapped	entrapped	ADJ
alkej-433	129	18	and	and	CCONJ
alkej-433	129	19	broke	break	VERB
alkej-433	129	20	into	into	ADP
alkej-433	129	21	minute	minute	ADJ
alkej-433	129	22	fragments	fragment	NOUN
alkej-433	129	23	[	[	X
alkej-433	129	24	11–13	11–13	NUM
alkej-433	129	25	]	]	X
alkej-433	129	26	.	.	PUNCT
alkej-433	130	1	some	some	DET
alkej-433	130	2	large	large	ADJ
alkej-433	130	3	wear	wear	NOUN
alkej-433	130	4	scar	scar	NOUN
alkej-433	130	5	will	will	AUX
alkej-433	130	6	appear	appear	VERB
alkej-433	130	7	on	on	ADP
alkej-433	130	8	the	the	DET
alkej-433	130	9	surface	surface	NOUN
alkej-433	130	10	due	due	ADP
alkej-433	130	11	to	to	ADP
alkej-433	130	12	debris	debris	NOUN
alkej-433	130	13	adhered	adhere	VERB
alkej-433	130	14	by	by	ADP
alkej-433	130	15	coating	coat	VERB
alkej-433	130	16	(	(	PUNCT
alkej-433	130	17	a	a	NOUN
alkej-433	130	18	)	)	PUNCT
alkej-433	130	19	(	(	PUNCT
alkej-433	130	20	b	b	NOUN
alkej-433	130	21	)	)	PUNCT
alkej-433	130	22	0	0	NUM
alkej-433	131	1	200	200	NUM
alkej-433	131	2	400	400	NUM
alkej-433	131	3	600	600	NUM
alkej-433	131	4	800	800	NUM
alkej-433	131	5	1,000	1,000	NUM
alkej-433	131	6	1,200	1,200	NUM
alkej-433	131	7	1,400	1,400	NUM
alkej-433	131	8	1,600	1,600	NUM
alkej-433	131	9	1800	1800	NUM
alkej-433	131	10	0	0	NUM
alkej-433	131	11	0.1	0.1	NUM
alkej-433	131	12	0.2	0.2	NUM
alkej-433	131	13	0.3	0.3	NUM
alkej-433	131	14	0.4	0.4	NUM
alkej-433	131	15	0.5	0.5	NUM
alkej-433	131	16	0.6	0.6	NUM
alkej-433	131	17	0.7	0.7	NUM
alkej-433	131	18	time	time	NOUN
alkej-433	131	19	(	(	PUNCT
alkej-433	131	20	sec	sec	PROPN
alkej-433	131	21	)	)	PUNCT
alkej-433	131	22	c	c	NOUN
alkej-433	132	1	o	o	NOUN
alkej-433	132	2	f	f	X
alkej-433	132	3	th=1.183	th=1.183	NOUN
alkej-433	132	4	µm	µm	NOUN
alkej-433	132	5	th=1.518	th=1.518	NOUN
alkej-433	132	6	µm	µm	NOUN
alkej-433	132	7	th=1.735	th=1.735	NOUN
alkej-433	132	8	µm	µm	ADP
alkej-433	132	9	th=2.717	th=2.717	NOUN
alkej-433	132	10	µm	µm	ADP
alkej-433	132	11	th=3.081	th=3.081	PROPN
alkej-433	132	12	µm	µm	ADP
alkej-433	132	13	kamil	kamil	PROPN
alkej-433	132	14	j.	j.	PROPN
alkej-433	132	15	kadhim	kadhim	PROPN
alkej-433	132	16	al	al	PROPN
alkej-433	132	17	-	-	PUNCT
alkej-433	132	18	khwarizmi	khwarizmi	PROPN
alkej-433	132	19	engineering	engineering	NOUN
alkej-433	132	20	journal	journal	PROPN
alkej-433	132	21	,	,	PUNCT
alkej-433	132	22	vol	vol	NOUN
alkej-433	132	23	.	.	PROPN
alkej-433	132	24	13	13	NUM
alkej-433	132	25	,	,	PUNCT
alkej-433	132	26	no	no	INTJ
alkej-433	132	27	.	.	NOUN
alkej-433	132	28	4	4	NUM
alkej-433	132	29	,	,	PUNCT
alkej-433	132	30	p.p	p.p	PROPN
alkej-433	132	31	.	.	NOUN
alkej-433	132	32	5868	5868	NUM
alkej-433	132	33	(	(	PUNCT
alkej-433	132	34	2017	2017	NUM
alkej-433	132	35	)	)	PUNCT
alkej-433	132	36	66	66	NUM
alkej-433	132	37	(	(	PUNCT
alkej-433	132	38	c	c	NOUN
alkej-433	132	39	)	)	PUNCT
alkej-433	132	40	fig	fig	NOUN
alkej-433	132	41	.	.	PUNCT
alkej-433	133	1	11	11	NUM
alkej-433	133	2	.	.	PUNCT
alkej-433	133	3	shown	show	VERB
alkej-433	133	4	3d	3d	NUM
alkej-433	133	5	zoom	zoom	NUM
alkej-433	133	6	20x	20x	NOUN
alkej-433	133	7	,	,	PUNCT
alkej-433	133	8	the	the	DET
alkej-433	133	9	optical	optical	ADJ
alkej-433	133	10	microscope	microscope	NOUN
alkej-433	133	11	have	have	AUX
alkej-433	133	12	been	be	AUX
alkej-433	133	13	used	use	VERB
alkej-433	133	14	to	to	PART
alkej-433	133	15	observe	observe	VERB
alkej-433	133	16	the	the	DET
alkej-433	133	17	morphology	morphology	NOUN
alkej-433	133	18	of	of	ADP
alkej-433	133	19	the	the	DET
alkej-433	133	20	wear	wear	NOUN
alkej-433	133	21	track	track	NOUN
alkej-433	133	22	and	and	CCONJ
alkej-433	133	23	wear	wear	VERB
alkej-433	133	24	debris	debris	NOUN
alkej-433	133	25	.	.	PUNCT
alkej-433	134	1	(	(	PUNCT
alkej-433	134	2	a	a	X
alkej-433	134	3	)	)	PUNCT
alkej-433	134	4	prepare	prepare	VERB
alkej-433	134	5	specimen	speciman	NOUN
alkej-433	134	6	before	before	ADP
alkej-433	134	7	dispersion	dispersion	NOUN
alkej-433	134	8	(	(	PUNCT
alkej-433	134	9	b	b	X
alkej-433	134	10	)	)	PUNCT
alkej-433	134	11	the	the	DET
alkej-433	134	12	wear	wear	NOUN
alkej-433	134	13	track	track	NOUN
alkej-433	134	14	,	,	PUNCT
alkej-433	134	15	(	(	PUNCT
alkej-433	134	16	c	c	X
alkej-433	134	17	)	)	PUNCT
alkej-433	134	18	3d	3d	NOUN
alkej-433	134	19	for	for	ADP
alkej-433	134	20	wear	wear	NOUN
alkej-433	134	21	.	.	PUNCT
alkej-433	135	1	figure	figure	NOUN
alkej-433	135	2	12	12	NUM
alkej-433	135	3	:	:	PUNCT
alkej-433	135	4	presents	present	VERB
alkej-433	135	5	the	the	DET
alkej-433	135	6	cof	cof	PROPN
alkej-433	135	7	of	of	ADP
alkej-433	135	8	the	the	DET
alkej-433	135	9	evaluated	evaluate	VERB
alkej-433	135	10	coatings	coating	NOUN
alkej-433	135	11	based	base	VERB
alkej-433	135	12	on	on	ADP
alkej-433	135	13	sliding	slide	VERB
alkej-433	135	14	distance	distance	NOUN
alkej-433	135	15	.	.	PUNCT
alkej-433	136	1	the	the	DET
alkej-433	136	2	cof	cof	PROPN
alkej-433	136	3	of	of	ADP
alkej-433	136	4	the	the	DET
alkej-433	136	5	ti	ti	PROPN
alkej-433	136	6	/	/	SYM
alkej-433	136	7	altin	altin	ADJ
alkej-433	136	8	coating	coating	NOUN
alkej-433	136	9	grew	grow	VERB
alkej-433	136	10	markedly	markedly	ADV
alkej-433	136	11	after	after	ADP
alkej-433	136	12	traveling	travel	VERB
alkej-433	136	13	7	7	NUM
alkej-433	136	14	and	and	CCONJ
alkej-433	136	15	15	15	NUM
alkej-433	136	16	m	m	NOUN
alkej-433	136	17	and	and	CCONJ
alkej-433	136	18	then	then	ADV
alkej-433	136	19	reached	reach	VERB
alkej-433	136	20	its	its	PRON
alkej-433	136	21	maximum	maximum	NOUN
alkej-433	136	22	.	.	PUNCT
alkej-433	137	1	in	in	ADP
alkej-433	137	2	the	the	DET
alkej-433	137	3	case	case	NOUN
alkej-433	137	4	of	of	ADP
alkej-433	137	5	the	the	DET
alkej-433	137	6	altin	altin	PROPN
alkej-433	137	7	coating	coating	NOUN
alkej-433	137	8	,	,	PUNCT
alkej-433	137	9	cof	cof	PROPN
alkej-433	137	10	gradually	gradually	ADV
alkej-433	137	11	rose	rise	VERB
alkej-433	137	12	to	to	ADP
alkej-433	137	13	its	its	PRON
alkej-433	137	14	maximum	maximum	NOUN
alkej-433	137	15	.	.	PUNCT
alkej-433	138	1	the	the	DET
alkej-433	138	2	cof	cof	PROPN
alkej-433	138	3	of	of	ADP
alkej-433	138	4	the	the	DET
alkej-433	138	5	altin	altin	PROPN
alkej-433	138	6	coating	coating	NOUN
alkej-433	138	7	grew	grow	VERB
alkej-433	138	8	linearly	linearly	ADV
alkej-433	138	9	after	after	ADP
alkej-433	138	10	traveling	travel	VERB
alkej-433	138	11	18	18	NUM
alkej-433	138	12	m	m	NOUN
alkej-433	138	13	and	and	CCONJ
alkej-433	138	14	then	then	ADV
alkej-433	138	15	gradually	gradually	ADV
alkej-433	138	16	reached	reach	VERB
alkej-433	138	17	its	its	PRON
alkej-433	138	18	maximum	maximum	NOUN
alkej-433	138	19	.	.	PUNCT
alkej-433	139	1	the	the	DET
alkej-433	139	2	cof	cof	PROPN
alkej-433	139	3	was	be	AUX
alkej-433	139	4	influenced	influence	VERB
alkej-433	139	5	mainly	mainly	ADV
alkej-433	139	6	by	by	ADP
alkej-433	139	7	roughness	roughness	NOUN
alkej-433	139	8	ra	ra	PROPN
alkej-433	139	9	,	,	PUNCT
alkej-433	139	10	coating	coat	VERB
alkej-433	139	11	hardness	hardness	NOUN
alkej-433	139	12	,	,	PUNCT
alkej-433	139	13	and	and	CCONJ
alkej-433	139	14	contact	contact	NOUN
alkej-433	139	15	surface	surface	NOUN
alkej-433	139	16	area	area	NOUN
alkej-433	139	17	.	.	PUNCT
alkej-433	140	1	the	the	DET
alkej-433	140	2	figures	figure	NOUN
alkej-433	140	3	above	above	ADP
alkej-433	140	4	show	show	VERB
alkej-433	140	5	the	the	DET
alkej-433	140	6	width	width	NOUN
alkej-433	140	7	of	of	ADP
alkej-433	140	8	the	the	DET
alkej-433	140	9	wear	wear	NOUN
alkej-433	140	10	track	track	NOUN
alkej-433	140	11	a	a	PRON
alkej-433	140	12	,	,	PUNCT
alkej-433	140	13	which	which	PRON
alkej-433	140	14	demonstrates	demonstrate	VERB
alkej-433	140	15	good	good	ADJ
alkej-433	140	16	agreement	agreement	NOUN
alkej-433	140	17	with	with	ADP
alkej-433	140	18	the	the	DET
alkej-433	140	19	volume	volume	NOUN
alkej-433	140	20	loss	loss	NOUN
alkej-433	140	21	of	of	ADP
alkej-433	140	22	the	the	DET
alkej-433	140	23	evaluated	evaluate	VERB
alkej-433	140	24	coatings	coating	NOUN
alkej-433	140	25	.	.	PUNCT
alkej-433	141	1	wear	wear	VERB
alkej-433	141	2	–	–	PUNCT
alkej-433	141	3	coating	coat	VERB
alkej-433	141	4	volume	volume	NOUN
alkej-433	141	5	loss	loss	NOUN
alkej-433	141	6	was	be	AUX
alkej-433	141	7	lowest	low	ADJ
alkej-433	141	8	for	for	ADP
alkej-433	141	9	the	the	DET
alkej-433	141	10	altin	altin	NOUN
alkej-433	141	11	coating	coating	NOUN
alkej-433	141	12	at	at	ADP
alkej-433	141	13	a	a	DET
alkej-433	141	14	thickness	thickness	NOUN
alkej-433	141	15	of	of	ADP
alkej-433	141	16	1.138	1.138	NUM
alkej-433	141	17	um	um	INTJ
alkej-433	141	18	.	.	PUNCT
alkej-433	142	1	meanwhile	meanwhile	ADV
alkej-433	142	2	,	,	PUNCT
alkej-433	142	3	the	the	DET
alkej-433	142	4	cof	cof	PROPN
alkej-433	142	5	values	value	NOUN
alkej-433	142	6	of	of	ADP
alkej-433	142	7	the	the	DET
alkej-433	142	8	altin	altin	PROPN
alkej-433	142	9	coating	coating	NOUN
alkej-433	142	10	were	be	AUX
alkej-433	142	11	the	the	DET
alkej-433	142	12	highest	high	ADJ
alkej-433	142	13	ones	one	NOUN
alkej-433	142	14	.	.	PUNCT
alkej-433	143	1	increasing	increase	VERB
alkej-433	143	2	in	in	ADP
alkej-433	143	3	contact	contact	NOUN
alkej-433	143	4	area	area	NOUN
alkej-433	143	5	between	between	ADP
alkej-433	143	6	the	the	DET
alkej-433	143	7	coating	coating	NOUN
alkej-433	143	8	–	–	PUNCT
alkej-433	143	9	counter	counter	NOUN
alkej-433	143	10	-	-	NOUN
alkej-433	143	11	specimen	speciman	NOUN
alkej-433	143	12	systems	system	NOUN
alkej-433	143	13	is	be	AUX
alkej-433	143	14	the	the	DET
alkej-433	143	15	main	main	ADJ
alkej-433	143	16	cause	cause	NOUN
alkej-433	143	17	of	of	ADP
alkej-433	143	18	cof	cof	PROPN
alkej-433	143	19	growth	growth	NOUN
alkej-433	143	20	.	.	PUNCT
alkej-433	144	1	the	the	DET
alkej-433	144	2	wear	wear	NOUN
alkej-433	144	3	of	of	ADP
alkej-433	144	4	the	the	DET
alkej-433	144	5	counterpart	counterpart	NOUN
alkej-433	144	6	was	be	AUX
alkej-433	144	7	not	not	PART
alkej-433	144	8	investigated	investigate	VERB
alkej-433	144	9	.	.	PUNCT
alkej-433	145	1	fig	fig	NOUN
alkej-433	145	2	.	.	PUNCT
alkej-433	146	1	12	12	NUM
alkej-433	146	2	.	.	PUNCT
alkej-433	147	1	profile	profile	NOUN
alkej-433	147	2	of	of	ADP
alkej-433	147	3	the	the	DET
alkej-433	147	4	cross	cross	NOUN
alkej-433	147	5	sections	section	NOUN
alkej-433	147	6	of	of	ADP
alkej-433	147	7	the	the	DET
alkej-433	147	8	wear	wear	NOUN
alkej-433	147	9	tracks	track	NOUN
alkej-433	147	10	of	of	ADP
alkej-433	147	11	ti	ti	NOUN
alkej-433	147	12	/	/	SYM
alkej-433	147	13	altin	altin	ADJ
alkej-433	147	14	coating	coating	NOUN
alkej-433	147	15	after	after	ADP
alkej-433	147	16	pin	pin	NOUN
alkej-433	147	17	-	-	PUNCT
alkej-433	147	18	on	on	ADP
alkej-433	147	19	-	-	PUNCT
alkej-433	147	20	disc	disc	NOUN
alkej-433	147	21	testing	testing	NOUN
alkej-433	147	22	:	:	PUNCT
alkej-433	147	23	a	a	PRON
alkej-433	147	24	,	,	PUNCT
alkej-433	147	25	width	width	ADJ
alkej-433	147	26	;	;	PUNCT
alkej-433	147	27	b	b	X
alkej-433	147	28	,	,	PUNCT
alkej-433	147	29	depth	depth	NOUN
alkej-433	147	30	;	;	PUNCT
alkej-433	147	31	and	and	CCONJ
alkej-433	147	32	r4	r4	NOUN
alkej-433	147	33	,	,	PUNCT
alkej-433	147	34	radius	radius	NOUN
alkej-433	147	35	of	of	ADP
alkej-433	147	36	sliding	slide	VERB
alkej-433	147	37	track	track	NOUN
alkej-433	147	38	.	.	PUNCT
alkej-433	148	1	kamil	kamil	PROPN
alkej-433	148	2	j.	j.	PROPN
alkej-433	148	3	kadhim	kadhim	PROPN
alkej-433	148	4	al	al	PROPN
alkej-433	148	5	-	-	PUNCT
alkej-433	148	6	khwarizmi	khwarizmi	PROPN
alkej-433	148	7	engineering	engineering	NOUN
alkej-433	148	8	journal	journal	PROPN
alkej-433	148	9	,	,	PUNCT
alkej-433	148	10	vol	vol	NOUN
alkej-433	148	11	.	.	PROPN
alkej-433	148	12	13	13	NUM
alkej-433	148	13	,	,	PUNCT
alkej-433	148	14	no	no	INTJ
alkej-433	148	15	.	.	NOUN
alkej-433	148	16	4	4	NUM
alkej-433	148	17	,	,	PUNCT
alkej-433	148	18	p.p	p.p	PROPN
alkej-433	148	19	.	.	NOUN
alkej-433	148	20	5868	5868	NUM
alkej-433	148	21	(	(	PUNCT
alkej-433	148	22	2017	2017	NUM
alkej-433	148	23	)	)	PUNCT
alkej-433	148	24	67	67	NUM
alkej-433	148	25	7	7	NUM
alkej-433	148	26	.	.	PUNCT
alkej-433	149	1	conclusion	conclusion	NOUN
alkej-433	149	2	tool	tool	NOUN
alkej-433	149	3	wear	wear	VERB
alkej-433	149	4	is	be	AUX
alkej-433	149	5	the	the	DET
alkej-433	149	6	main	main	ADJ
alkej-433	149	7	problem	problem	NOUN
alkej-433	149	8	in	in	ADP
alkej-433	149	9	machining	machine	VERB
alkej-433	149	10	operations	operation	NOUN
alkej-433	149	11	.	.	PUNCT
alkej-433	150	1	it	it	PRON
alkej-433	150	2	is	be	AUX
alkej-433	150	3	characterized	characterize	VERB
alkej-433	150	4	by	by	ADP
alkej-433	150	5	a	a	DET
alkej-433	150	6	gradual	gradual	ADJ
alkej-433	150	7	change	change	NOUN
alkej-433	150	8	in	in	ADP
alkej-433	150	9	the	the	DET
alkej-433	150	10	shape	shape	NOUN
alkej-433	150	11	of	of	ADP
alkej-433	150	12	the	the	DET
alkej-433	150	13	machine	machine	NOUN
alkej-433	150	14	tool	tool	NOUN
alkej-433	150	15	resulting	result	VERB
alkej-433	150	16	from	from	ADP
alkej-433	150	17	material	material	ADJ
alkej-433	150	18	loss	loss	NOUN
alkej-433	150	19	.	.	PUNCT
alkej-433	151	1	material	material	NOUN
alkej-433	151	2	loss	loss	NOUN
alkej-433	151	3	is	be	AUX
alkej-433	151	4	caused	cause	VERB
alkej-433	151	5	by	by	ADP
alkej-433	151	6	the	the	DET
alkej-433	151	7	friction	friction	NOUN
alkej-433	151	8	,	,	PUNCT
alkej-433	151	9	abrasion	abrasion	NOUN
alkej-433	151	10	,	,	PUNCT
alkej-433	151	11	and	and	CCONJ
alkej-433	151	12	the	the	DET
alkej-433	151	13	rubbing	rub	VERB
alkej-433	151	14	process	process	NOUN
alkej-433	151	15	that	that	PRON
alkej-433	151	16	take	take	VERB
alkej-433	151	17	place	place	NOUN
alkej-433	151	18	between	between	ADP
alkej-433	151	19	the	the	DET
alkej-433	151	20	tool	tool	NOUN
alkej-433	151	21	and	and	CCONJ
alkej-433	151	22	the	the	DET
alkej-433	151	23	work	work	NOUN
alkej-433	151	24	piece	piece	NOUN
alkej-433	151	25	during	during	ADP
alkej-433	151	26	machining	machining	NOUN
alkej-433	151	27	.	.	PUNCT
alkej-433	152	1	tool	tool	NOUN
alkej-433	152	2	wear	wear	VERB
alkej-433	152	3	results	result	NOUN
alkej-433	152	4	from	from	ADP
alkej-433	152	5	progressive	progressive	ADJ
alkej-433	152	6	loss	loss	NOUN
alkej-433	152	7	and	and	CCONJ
alkej-433	152	8	the	the	DET
alkej-433	152	9	degradation	degradation	NOUN
alkej-433	152	10	of	of	ADP
alkej-433	152	11	the	the	DET
alkej-433	152	12	material	material	NOUN
alkej-433	152	13	of	of	ADP
alkej-433	152	14	the	the	DET
alkej-433	152	15	machining	machining	NOUN
alkej-433	152	16	tool	tool	NOUN
alkej-433	152	17	.	.	PUNCT
alkej-433	153	1	it	it	PRON
alkej-433	153	2	decreases	decrease	VERB
alkej-433	153	3	the	the	DET
alkej-433	153	4	dimensional	dimensional	ADJ
alkej-433	153	5	accuracy	accuracy	NOUN
alkej-433	153	6	and	and	CCONJ
alkej-433	153	7	surface	surface	NOUN
alkej-433	153	8	finish	finish	NOUN
alkej-433	153	9	of	of	ADP
alkej-433	153	10	the	the	DET
alkej-433	153	11	work	work	NOUN
alkej-433	153	12	piece	piece	NOUN
alkej-433	153	13	and	and	CCONJ
alkej-433	153	14	increases	increase	VERB
alkej-433	153	15	cutting	cut	VERB
alkej-433	153	16	forces	force	NOUN
alkej-433	153	17	.	.	PUNCT
alkej-433	154	1	crater	crater	NOUN
alkej-433	154	2	wear	wear	NOUN
alkej-433	154	3	occurs	occur	VERB
alkej-433	154	4	because	because	SCONJ
alkej-433	154	5	of	of	ADP
alkej-433	154	6	the	the	DET
alkej-433	154	7	contact	contact	NOUN
alkej-433	154	8	between	between	ADP
alkej-433	154	9	the	the	DET
alkej-433	154	10	chip	chip	NOUN
alkej-433	154	11	flow	flow	NOUN
alkej-433	154	12	and	and	CCONJ
alkej-433	154	13	the	the	DET
alkej-433	154	14	rake	rake	NOUN
alkej-433	154	15	face	face	NOUN
alkej-433	154	16	of	of	ADP
alkej-433	154	17	the	the	DET
alkej-433	154	18	tool	tool	NOUN
alkej-433	154	19	.	.	PUNCT
alkej-433	155	1	flank	flank	PROPN
alkej-433	155	2	wear	wear	NOUN
alkej-433	155	3	occurs	occur	VERB
alkej-433	155	4	because	because	SCONJ
alkej-433	155	5	of	of	ADP
alkej-433	155	6	the	the	DET
alkej-433	155	7	contact	contact	NOUN
alkej-433	155	8	between	between	ADP
alkej-433	155	9	the	the	DET
alkej-433	155	10	tool	tool	NOUN
alkej-433	155	11	and	and	CCONJ
alkej-433	155	12	the	the	DET
alkej-433	155	13	work	work	NOUN
alkej-433	155	14	piece	piece	NOUN
alkej-433	155	15	.	.	PUNCT
alkej-433	156	1	ti	ti	ADP
alkej-433	156	2	/	/	SYM
alkej-433	156	3	altin	altin	PROPN
alkej-433	156	4	is	be	AUX
alkej-433	156	5	the	the	DET
alkej-433	156	6	best	good	ADJ
alkej-433	156	7	tool	tool	NOUN
alkej-433	156	8	coating	coating	NOUN
alkej-433	156	9	material	material	NOUN
alkej-433	156	10	for	for	ADP
alkej-433	156	11	reducing	reduce	VERB
alkej-433	156	12	crater	crater	NOUN
alkej-433	156	13	wear	wear	NOUN
alkej-433	156	14	and	and	CCONJ
alkej-433	156	15	flank	flank	NOUN
alkej-433	156	16	wear	wear	NOUN
alkej-433	156	17	.	.	PUNCT
alkej-433	157	1	the	the	DET
alkej-433	157	2	depth	depth	NOUN
alkej-433	157	3	and	and	CCONJ
alkej-433	157	4	width	width	NOUN
alkej-433	157	5	of	of	ADP
alkej-433	157	6	the	the	DET
alkej-433	157	7	wear	wear	NOUN
alkej-433	157	8	are	be	AUX
alkej-433	157	9	the	the	DET
alkej-433	157	10	most	most	ADV
alkej-433	157	11	significant	significant	ADJ
alkej-433	157	12	parameters	parameter	NOUN
alkej-433	157	13	in	in	ADP
alkej-433	157	14	measuring	measure	VERB
alkej-433	157	15	crater	crater	NOUN
alkej-433	157	16	wear	wear	NOUN
alkej-433	157	17	.	.	PUNCT
alkej-433	158	1	researchers	researcher	NOUN
alkej-433	158	2	have	have	AUX
alkej-433	158	3	developed	develop	VERB
alkej-433	158	4	several	several	ADJ
alkej-433	158	5	models	model	NOUN
alkej-433	158	6	for	for	ADP
alkej-433	158	7	the	the	DET
alkej-433	158	8	measurement	measurement	NOUN
alkej-433	158	9	of	of	ADP
alkej-433	158	10	crater	crater	NOUN
alkej-433	158	11	and	and	CCONJ
alkej-433	158	12	flank	flank	NOUN
alkej-433	158	13	wear	wear	NOUN
alkej-433	158	14	in	in	ADP
alkej-433	158	15	machine	machine	NOUN
alkej-433	158	16	tools	tool	NOUN
alkej-433	158	17	.	.	PUNCT
alkej-433	159	1	the	the	DET
alkej-433	159	2	effect	effect	NOUN
alkej-433	159	3	of	of	ADP
alkej-433	159	4	thickness	thickness	NOUN
alkej-433	159	5	layer	layer	NOUN
alkej-433	159	6	on	on	ADP
alkej-433	159	7	crater	crater	NOUN
alkej-433	159	8	wear	wear	NOUN
alkej-433	159	9	and	and	CCONJ
alkej-433	159	10	the	the	DET
alkej-433	159	11	tribological	tribological	ADJ
alkej-433	159	12	wear	wear	NOUN
alkej-433	159	13	properties	property	NOUN
alkej-433	159	14	of	of	ADP
alkej-433	159	15	ti	ti	NOUN
alkej-433	159	16	/	/	SYM
alkej-433	159	17	altin	altin	ADJ
alkej-433	159	18	multilayer	multilayer	ADJ
alkej-433	159	19	coatings	coating	NOUN
alkej-433	159	20	were	be	AUX
alkej-433	159	21	investigated	investigate	VERB
alkej-433	159	22	in	in	ADP
alkej-433	159	23	this	this	DET
alkej-433	159	24	work	work	NOUN
alkej-433	159	25	.	.	PUNCT
alkej-433	160	1	the	the	DET
alkej-433	160	2	roughness	roughness	NOUN
alkej-433	160	3	ra	ra	PROPN
alkej-433	160	4	values	value	NOUN
alkej-433	160	5	of	of	ADP
alkej-433	160	6	the	the	DET
alkej-433	160	7	ti	ti	NOUN
alkej-433	160	8	/	/	SYM
alkej-433	160	9	altin	altin	ADJ
alkej-433	160	10	coatings	coating	NOUN
alkej-433	160	11	were	be	AUX
alkej-433	160	12	0.14	0.14	NUM
alkej-433	160	13	,	,	PUNCT
alkej-433	160	14	0.15	0.15	NUM
alkej-433	160	15	,	,	PUNCT
alkej-433	160	16	0.23	0.23	NUM
alkej-433	160	17	,	,	PUNCT
alkej-433	160	18	0.02	0.02	NUM
alkej-433	160	19	,	,	PUNCT
alkej-433	160	20	and	and	CCONJ
alkej-433	160	21	0.21	0.21	NUM
alkej-433	160	22	µm	µm	NOUN
alkej-433	160	23	at	at	ADP
alkej-433	160	24	thickness	thickness	NOUN
alkej-433	160	25	layers	layer	NOUN
alkej-433	160	26	of	of	ADP
alkej-433	160	27	1.138	1.138	NUM
alkej-433	160	28	,	,	PUNCT
alkej-433	160	29	1.518	1.518	NUM
alkej-433	160	30	,	,	PUNCT
alkej-433	160	31	1.735	1.735	NUM
alkej-433	160	32	,	,	PUNCT
alkej-433	160	33	2.717	2.717	NUM
alkej-433	160	34	,	,	PUNCT
alkej-433	160	35	and	and	CCONJ
alkej-433	160	36	3.0818	3.0818	NUM
alkej-433	160	37	µm	µm	NOUN
alkej-433	160	38	,	,	PUNCT
alkej-433	160	39	respectively	respectively	ADV
alkej-433	160	40	.	.	PUNCT
alkej-433	161	1	the	the	DET
alkej-433	161	2	high	high	PROPN
alkej-433	161	3	cof	cof	PROPN
alkej-433	161	4	of	of	ADP
alkej-433	161	5	the	the	DET
alkej-433	161	6	altin	altin	PROPN
alkej-433	161	7	coating	coating	NOUN
alkej-433	161	8	was	be	AUX
alkej-433	161	9	a	a	DET
alkej-433	161	10	result	result	NOUN
alkej-433	161	11	of	of	ADP
alkej-433	161	12	high	high	ADJ
alkej-433	161	13	roughness	roughness	NOUN
alkej-433	161	14	and	and	CCONJ
alkej-433	161	15	the	the	DET
alkej-433	161	16	large	large	ADJ
alkej-433	161	17	contact	contact	NOUN
alkej-433	161	18	surface	surface	NOUN
alkej-433	161	19	area	area	NOUN
alkej-433	161	20	of	of	ADP
alkej-433	161	21	the	the	DET
alkej-433	161	22	system	system	NOUN
alkej-433	161	23	coating	coat	VERB
alkej-433	161	24	ball	ball	NOUN
alkej-433	161	25	.	.	PUNCT
alkej-433	162	1	minimum	minimum	ADJ
alkej-433	162	2	values	value	NOUN
alkej-433	162	3	of	of	ADP
alkej-433	162	4	surface	surface	NOUN
alkej-433	162	5	roughness	roughness	NOUN
alkej-433	162	6	will	will	AUX
alkej-433	162	7	reach	reach	VERB
alkej-433	162	8	0.02	0.02	NUM
alkej-433	162	9	µm	µm	NOUN
alkej-433	162	10	at	at	ADP
alkej-433	162	11	a	a	DET
alkej-433	162	12	thickness	thickness	NOUN
alkej-433	162	13	layer	layer	NOUN
alkej-433	162	14	of	of	ADP
alkej-433	162	15	2.717	2.717	NUM
alkej-433	162	16	µm	µm	NOUN
alkej-433	162	17	.	.	PROPN
alkej-433	162	18	8	8	NUM
alkej-433	162	19	.	.	PUNCT
alkej-433	163	1	references	reference	NOUN
alkej-433	163	2	[	[	X
alkej-433	163	3	1	1	X
alkej-433	163	4	]	]	X
alkej-433	163	5	p.s	p.s	PROPN
alkej-433	163	6	.	.	PROPN
alkej-433	163	7	sivasakthivel	sivasakthivel	PROPN
alkej-433	163	8	,	,	PUNCT
alkej-433	163	9	m.	m.	NOUN
alkej-433	163	10	v.	v.	ADP
alkej-433	163	11	vel	vel	PROPN
alkej-433	163	12	,	,	PUNCT
alkej-433	163	13	and	and	CCONJ
alkej-433	163	14	r.	r.	PROPN
alkej-433	163	15	sudhakaran	sudhakaran	VERB
alkej-433	163	16	,	,	PUNCT
alkej-433	163	17	“	"	PUNCT
alkej-433	163	18	prediction	prediction	NOUN
alkej-433	163	19	of	of	ADP
alkej-433	163	20	tool	tool	NOUN
alkej-433	163	21	wear	wear	VERB
alkej-433	163	22	from	from	ADP
alkej-433	163	23	machining	machine	VERB
alkej-433	163	24	parameters	parameter	NOUN
alkej-433	163	25	by	by	ADP
alkej-433	163	26	response	response	NOUN
alkej-433	163	27	surface	surface	NOUN
alkej-433	163	28	methodology	methodology	NOUN
alkej-433	163	29	in	in	ADP
alkej-433	163	30	end	end	NOUN
alkej-433	163	31	milling	milling	NOUN
alkej-433	163	32	”	"	PUNCT
alkej-433	163	33	,	,	PUNCT
alkej-433	163	34	international	international	ADJ
alkej-433	163	35	journal	journal	NOUN
alkej-433	163	36	of	of	ADP
alkej-433	163	37	science	science	NOUN
alkej-433	163	38	and	and	CCONJ
alkej-433	163	39	technology	technology	NOUN
alkej-433	163	40	,	,	PUNCT
alkej-433	163	41	vol	vol	NOUN
alkej-433	163	42	.	.	PROPN
alkej-433	164	1	2	2	NUM
alkej-433	164	2	,	,	PUNCT
alkej-433	164	3	no	no	INTJ
alkej-433	164	4	.	.	NOUN
alkej-433	164	5	6	6	NUM
alkej-433	164	6	,	,	PUNCT
alkej-433	164	7	pp	pp	ADJ
alkej-433	164	8	.	.	PUNCT
alkej-433	165	1	17801789,2010	17801789,2010	X
alkej-433	165	2	.	.	PUNCT
alkej-433	166	1	[	[	X
alkej-433	166	2	2	2	X
alkej-433	166	3	]	]	PUNCT
alkej-433	166	4	h.	h.	PROPN
alkej-433	166	5	zhao	zhao	PROPN
alkej-433	166	6	,	,	PUNCT
alkej-433	166	7	g.c	g.c	PROPN
alkej-433	166	8	.	.	PROPN
alkej-433	166	9	barber	barber	PROPN
alkej-433	166	10	,	,	PUNCT
alkej-433	166	11	and	and	CCONJ
alkej-433	166	12	q.	q.	PROPN
alkej-433	166	13	zou	zou	PROPN
alkej-433	166	14	,	,	PUNCT
alkej-433	166	15	“	"	PUNCT
alkej-433	166	16	a	a	DET
alkej-433	166	17	study	study	NOUN
alkej-433	166	18	of	of	ADP
alkej-433	166	19	flank	flank	NOUN
alkej-433	166	20	wear	wear	NOUN
alkej-433	166	21	in	in	ADP
alkej-433	166	22	orthogonal	orthogonal	ADJ
alkej-433	166	23	cutting	cutting	NOUN
alkej-433	166	24	with	with	ADP
alkej-433	166	25	internal	internal	ADJ
alkej-433	166	26	cooling	cooling	NOUN
alkej-433	166	27	”	"	PUNCT
alkej-433	166	28	,	,	PUNCT
alkej-433	166	29	wear	wear	NOUN
alkej-433	166	30	,	,	PUNCT
alkej-433	166	31	vol	vol	NOUN
alkej-433	166	32	.	.	PROPN
alkej-433	166	33	253	253	NUM
alkej-433	166	34	,	,	PUNCT
alkej-433	166	35	pp	pp	ADJ
alkej-433	166	36	.	.	PUNCT
alkej-433	167	1	957	957	NUM
alkej-433	167	2	-	-	SYM
alkej-433	167	3	962	962	NUM
alkej-433	167	4	,	,	PUNCT
alkej-433	167	5	2002	2002	NUM
alkej-433	167	6	.	.	PUNCT
alkej-433	168	1	[	[	X
alkej-433	168	2	3	3	X
alkej-433	168	3	]	]	X
alkej-433	168	4	k.h.w	k.h.w	NOUN
alkej-433	168	5	.	.	PUNCT
alkej-433	168	6	seah	seah	PROPN
alkej-433	168	7	,	,	PUNCT
alkej-433	168	8	x.	x.	PROPN
alkej-433	168	9	li	li	PROPN
alkej-433	168	10	,	,	PUNCT
alkej-433	168	11	and	and	CCONJ
alkej-433	168	12	k.s	k.s	PROPN
alkej-433	168	13	.	.	PROPN
alkej-433	168	14	lee	lee	PROPN
alkej-433	168	15	,	,	PUNCT
alkej-433	168	16	“	"	PUNCT
alkej-433	168	17	the	the	DET
alkej-433	168	18	effect	effect	NOUN
alkej-433	168	19	of	of	ADP
alkej-433	168	20	applying	apply	VERB
alkej-433	168	21	coolant	coolant	NOUN
alkej-433	168	22	on	on	ADP
alkej-433	168	23	tool	tool	NOUN
alkej-433	168	24	wear	wear	VERB
alkej-433	168	25	in	in	ADP
alkej-433	168	26	metal	metal	NOUN
alkej-433	168	27	machining	machining	NOUN
alkej-433	168	28	”	"	PUNCT
alkej-433	168	29	,	,	PUNCT
alkej-433	168	30	journal	journal	NOUN
alkej-433	168	31	of	of	ADP
alkej-433	168	32	material	material	NOUN
alkej-433	168	33	.	.	PUNCT
alkej-433	169	1	process	process	NOUN
alkej-433	169	2	.	.	PUNCT
alkej-433	170	1	technol	technol	PROPN
alkej-433	170	2	.	.	PROPN
alkej-433	170	3	,	,	PUNCT
alkej-433	170	4	vol	vol	NOUN
alkej-433	170	5	.	.	PROPN
alkej-433	171	1	48	48	NUM
alkej-433	171	2	,	,	PUNCT
alkej-433	172	1	p.	p.	NOUN
alkej-433	172	2	495	495	NUM
alkej-433	172	3	,	,	PUNCT
alkej-433	172	4	1995	1995	NUM
alkej-433	172	5	.	.	PUNCT
alkej-433	173	1	[	[	X
alkej-433	173	2	4	4	X
alkej-433	173	3	]	]	X
alkej-433	173	4	h.	h.	PROPN
alkej-433	173	5	yong	yong	PROPN
alkej-433	173	6	,	,	PUNCT
alkej-433	173	7	and	and	CCONJ
alkej-433	173	8	g.	g.	PROPN
alkej-433	173	9	dawson	dawson	PROPN
alkej-433	173	10	,	,	PUNCT
alkej-433	173	11	“	"	PUNCT
alkej-433	173	12	tool	tool	NOUN
alkej-433	173	13	crater	crater	NOUN
alkej-433	173	14	wear	wear	VERB
alkej-433	173	15	depth	depth	NOUN
alkej-433	173	16	modeling	modeling	NOUN
alkej-433	173	17	in	in	ADP
alkej-433	173	18	cbn	cbn	PROPN
alkej-433	173	19	hard	hard	ADJ
alkej-433	173	20	turning	turning	NOUN
alkej-433	173	21	”	"	PUNCT
alkej-433	173	22	wear	wear	NOUN
alkej-433	173	23	,	,	PUNCT
alkej-433	173	24	vol	vol	NOUN
alkej-433	173	25	.	.	PROPN
alkej-433	173	26	258	258	NUM
alkej-433	173	27	,	,	PUNCT
alkej-433	173	28	pp	pp	ADJ
alkej-433	173	29	.	.	PUNCT
alkej-433	174	1	1455	1455	NUM
alkej-433	174	2	-	-	SYM
alkej-433	174	3	1461	1461	NUM
alkej-433	174	4	,	,	PUNCT
alkej-433	174	5	2005	2005	NUM
alkej-433	174	6	.	.	PUNCT
alkej-433	175	1	[	[	X
alkej-433	175	2	5	5	X
alkej-433	175	3	]	]	PUNCT
alkej-433	175	4	j.	j.	PROPN
alkej-433	175	5	manigaj	manigaj	PROPN
alkej-433	175	6	,	,	PUNCT
alkej-433	175	7	s.	s.	PROPN
alkej-433	175	8	velappan	velappan	PROPN
alkej-433	175	9	,	,	PUNCT
alkej-433	175	10	s.	s.	PROPN
alkej-433	175	11	nallathambhi	nallathambhi	PROPN
alkej-433	175	12	,	,	PUNCT
alkej-433	175	13	a.v	a.v	PROPN
alkej-433	175	14	.	.	PROPN
alkej-433	175	15	subbiah	subbiah	PROPN
alkej-433	175	16	,	,	PUNCT
alkej-433	175	17	and	and	CCONJ
alkej-433	175	18	m.	m.	NOUN
alkej-433	175	19	jacob,“experimental	jacob,“experimental	PROPN
alkej-433	175	20	investigation	investigation	NOUN
alkej-433	175	21	on	on	ADP
alkej-433	175	22	effect	effect	NOUN
alkej-433	175	23	of	of	ADP
alkej-433	175	24	tool	tool	NOUN
alkej-433	175	25	crater	crater	NOUN
alkej-433	175	26	wear	wear	NOUN
alkej-433	175	27	and	and	CCONJ
alkej-433	175	28	surface	surface	NOUN
alkej-433	175	29	roughness	roughness	NOUN
alkej-433	175	30	in	in	ADP
alkej-433	175	31	tin	tin	NOUN
alkej-433	175	32	coated	coat	VERB
alkej-433	175	33	wc	wc	PROPN
alkej-433	175	34	tool	tool	PROPN
alkej-433	175	35	while	while	SCONJ
alkej-433	175	36	machining	machine	VERB
alkej-433	175	37	martensitic	martensitic	ADJ
alkej-433	175	38	stainless	stainless	ADJ
alkej-433	175	39	steel	steel	NOUN
alkej-433	175	40	”	"	PUNCT
alkej-433	175	41	,	,	PUNCT
alkej-433	175	42	high	high	ADJ
alkej-433	175	43	temperature	temperature	NOUN
alkej-433	175	44	materials	material	NOUN
alkej-433	175	45	and	and	CCONJ
alkej-433	175	46	processes	process	NOUN
alkej-433	175	47	,	,	PUNCT
alkej-433	175	48	vol	vol	NOUN
alkej-433	175	49	.	.	PROPN
alkej-433	175	50	30	30	NUM
alkej-433	175	51	,	,	PUNCT
alkej-433	175	52	no	no	INTJ
alkej-433	175	53	.	.	NOUN
alkej-433	175	54	3	3	NUM
alkej-433	175	55	,	,	PUNCT
alkej-433	175	56	pp	pp	ADJ
alkej-433	175	57	.	.	PUNCT
alkej-433	176	1	257	257	NUM
alkej-433	176	2	-	-	SYM
alkej-433	176	3	265	265	NUM
alkej-433	176	4	,	,	PUNCT
alkej-433	176	5	2010	2010	NUM
alkej-433	176	6	.	.	PUNCT
alkej-433	177	1	[	[	X
alkej-433	177	2	6	6	NUM
alkej-433	177	3	]	]	PUNCT
alkej-433	177	4	a.	a.	NOUN
alkej-433	177	5	y.	y.	PROPN
alkej-433	177	6	erry	erry	PROPN
alkej-433	177	7	,	,	PUNCT
alkej-433	177	8	r.	r.	PROPN
alkej-433	177	9	muhammad	muhammad	PROPN
alkej-433	177	10	,	,	PUNCT
alkej-433	177	11	h.	h.	PROPN
alkej-433	177	12	muataz	muataz	PROPN
alkej-433	177	13	,	,	PUNCT
alkej-433	177	14	a.	a.	PROPN
alkej-433	177	15	delvis	delvis	PROPN
alkej-433	177	16	,	,	PUNCT
alkej-433	177	17	and	and	CCONJ
alkej-433	177	18	rosehan	rosehan	ADJ
alkej-433	177	19	,	,	PUNCT
alkej-433	177	20	“	"	PUNCT
alkej-433	177	21	tool	tool	NOUN
alkej-433	177	22	wear	wear	VERB
alkej-433	177	23	surface	surface	NOUN
alkej-433	177	24	finish	finish	NOUN
alkej-433	177	25	investigation	investigation	NOUN
alkej-433	177	26	in	in	ADP
alkej-433	177	27	high	high	ADJ
alkej-433	177	28	speed	speed	NOUN
alkej-433	177	29	turning	turn	VERB
alkej-433	177	30	using	use	VERB
alkej-433	177	31	cermets	cermet	NOUN
alkej-433	177	32	insert	insert	ADJ
alkej-433	177	33	by	by	ADP
alkej-433	177	34	applying	apply	VERB
alkej-433	177	35	negative	negative	ADJ
alkej-433	177	36	rake	rake	NOUN
alkej-433	177	37	angles	angle	NOUN
alkej-433	177	38	”	"	PUNCT
alkej-433	177	39	,	,	PUNCT
alkej-433	177	40	european	european	PROPN
alkej-433	177	41	journal	journal	PROPN
alkej-433	177	42	scientific	scientific	ADJ
alkej-433	177	43	research	research	NOUN
alkej-433	177	44	,	,	PUNCT
alkej-433	177	45	vol.38,no	vol.38,no	NUM
alkej-433	177	46	.	.	X
alkej-433	178	1	2	2	NUM
alkej-433	178	2	,	,	PUNCT
alkej-433	178	3	pp	pp	ADJ
alkej-433	178	4	.	.	PUNCT
alkej-433	179	1	180	180	NUM
alkej-433	179	2	-	-	SYM
alkej-433	179	3	188	188	NUM
alkej-433	179	4	,	,	PUNCT
alkej-433	179	5	2009	2009	NUM
alkej-433	179	6	.	.	PUNCT
alkej-433	180	1	[	[	X
alkej-433	180	2	7	7	NUM
alkej-433	180	3	]	]	PUNCT
alkej-433	180	4	a.	a.	NOUN
alkej-433	180	5	otieno	otieno	PROPN
alkej-433	180	6	,	,	PUNCT
alkej-433	180	7	p.	p.	PROPN
alkej-433	180	8	chandhana	chandhana	PROPN
alkej-433	180	9	,	,	PUNCT
alkej-433	180	10	w.	w.	PROPN
alkej-433	180	11	pedapati	pedapati	PROPN
alkej-433	180	12	,	,	PUNCT
alkej-433	180	13	and	and	CCONJ
alkej-433	180	14	z.	z.	PROPN
alkej-433	180	15	haiyan	haiyan	PROPN
alkej-433	180	16	,	,	PUNCT
alkej-433	180	17	“	"	PUNCT
alkej-433	180	18	imaging	imaging	NOUN
alkej-433	180	19	and	and	CCONJ
alkej-433	180	20	wear	wear	VERB
alkej-433	180	21	analysis	analysis	NOUN
alkej-433	180	22	using	use	VERB
alkej-433	180	23	machine	machine	NOUN
alkej-433	180	24	vision	vision	NOUN
alkej-433	180	25	”	"	PUNCT
alkej-433	180	26	,	,	PUNCT
alkej-433	180	27	in	in	ADP
alkej-433	180	28	proceedings	proceeding	NOUN
alkej-433	180	29	of	of	ADP
alkej-433	180	30	the	the	DET
alkej-433	180	31	2006	2006	NUM
alkej-433	180	32	ijmeintertech	ijmeintertech	NOUN
alkej-433	180	33	conference	conference	NOUN
alkej-433	180	34	,	,	PUNCT
alkej-433	180	35	pp	pp	X
alkej-433	180	36	.	.	PUNCT
alkej-433	181	1	2350,2006	2350,2006	NUM
alkej-433	181	2	.	.	PUNCT
alkej-433	182	1	[	[	X
alkej-433	182	2	8	8	X
alkej-433	182	3	]	]	X
alkej-433	182	4	j.	j.	PROPN
alkej-433	182	5	pelleg	pelleg	PROPN
alkej-433	182	6	,	,	PUNCT
alkej-433	182	7	l.z	l.z	PROPN
alkej-433	182	8	.	.	PROPN
alkej-433	182	9	zevin	zevin	PROPN
alkej-433	182	10	,	,	PUNCT
alkej-433	182	11	s.	s.	PROPN
alkej-433	182	12	lungo	lungo	PROPN
alkej-433	182	13	,	,	PUNCT
alkej-433	182	14	n.	n.	PROPN
alkej-433	182	15	coritoru	coritoru	PROPN
alkej-433	182	16	,	,	PUNCT
alkej-433	182	17	reactive	reactive	NOUN
alkej-433	182	18	-	-	PUNCT
alkej-433	182	19	sputter	sputter	NOUN
alkej-433	182	20	-	-	PUNCT
alkej-433	182	21	deposited	deposit	VERB
alkej-433	182	22	tin	tin	NOUN
alkej-433	182	23	films	film	NOUN
alkej-433	182	24	on	on	ADP
alkej-433	182	25	glass	glass	NOUN
alkej-433	182	26	substrates	substrate	NOUN
alkej-433	182	27	,	,	PUNCT
alkej-433	182	28	thin	thin	ADJ
alkej-433	182	29	solid	solid	ADJ
alkej-433	182	30	films	film	NOUN
alkej-433	182	31	,	,	PUNCT
alkej-433	182	32	pp	pp	ADJ
alkej-433	182	33	.	.	PUNCT
alkej-433	182	34	117	117	NUM
alkej-433	182	35	-	-	SYM
alkej-433	182	36	197	197	NUM
alkej-433	182	37	,	,	PUNCT
alkej-433	182	38	1991	1991	NUM
alkej-433	182	39	.	.	PUNCT
alkej-433	183	1	[	[	X
alkej-433	183	2	9	9	NUM
alkej-433	183	3	]	]	SYM
alkej-433	183	4	milošev	milošev	ADJ
alkej-433	183	5	,	,	PUNCT
alkej-433	183	6	h.-h	h.-h	NOUN
alkej-433	183	7	.	.	PUNCT
alkej-433	184	1	strehbtow	strehbtow	ADJ
alkej-433	184	2	,	,	PUNCT
alkej-433	184	3	b.	b.	PROPN
alkej-433	184	4	navinšek	navinšek	PROPN
alkej-433	184	5	.	.	PUNCT
alkej-433	185	1	comparison	comparison	NOUN
alkej-433	185	2	of	of	ADP
alkej-433	185	3	tin	tin	NOUN
alkej-433	185	4	,	,	PUNCT
alkej-433	185	5	zrn	zrn	PROPN
alkej-433	185	6	and	and	CCONJ
alkej-433	185	7	crnhard	crnhard	ADV
alkej-433	185	8	nitride	nitride	ADJ
alkej-433	185	9	coatings	coating	NOUN
alkej-433	185	10	:	:	PUNCT
alkej-433	185	11	electrochemical	electrochemical	ADJ
alkej-433	185	12	and	and	CCONJ
alkej-433	185	13	thermal	thermal	ADJ
alkej-433	185	14	oxidation	oxidation	NOUN
alkej-433	185	15	,	,	PUNCT
alkej-433	185	16	thin	thin	ADJ
alkej-433	185	17	solid	solid	ADJ
alkej-433	185	18	films	film	NOUN
alkej-433	185	19	pp	pp	ADP
alkej-433	185	20	.	.	PUNCT
alkej-433	186	1	246	246	NUM
alkej-433	186	2	-	-	PUNCT
alkej-433	186	3	303,1997	303,1997	NUM
alkej-433	186	4	.	.	PUNCT
alkej-433	187	1	[	[	X
alkej-433	187	2	10	10	NUM
alkej-433	187	3	]	]	X
alkej-433	187	4	b.	b.	PROPN
alkej-433	187	5	major	major	PROPN
alkej-433	187	6	,	,	PUNCT
alkej-433	187	7	r.	r.	PROPN
alkej-433	187	8	major	major	PROPN
alkej-433	187	9	,	,	PUNCT
alkej-433	187	10	f.	f.	PROPN
alkej-433	187	11	bruckert	bruckert	PROPN
alkej-433	187	12	,	,	PUNCT
alkej-433	187	13	j.m	j.m	PROPN
alkej-433	187	14	.	.	PROPN
alkej-433	187	15	lackner	lackner	PROPN
alkej-433	187	16	,	,	PUNCT
alkej-433	187	17	r.	r.	PROPN
alkej-433	187	18	ebner	ebner	PROPN
alkej-433	187	19	,	,	PUNCT
alkej-433	187	20	r.	r.	PROPN
alkej-433	187	21	kustosz	kustosz	PROPN
alkej-433	187	22	,	,	PUNCT
alkej-433	187	23	p.	p.	PROPN
alkej-433	187	24	lacki	lacki	PROPN
alkej-433	187	25	.	.	PUNCT
alkej-433	188	1	new	new	ADJ
alkej-433	188	2	gradient	gradient	ADJ
alkej-433	188	3	coatings	coating	NOUN
alkej-433	188	4	on	on	ADP
alkej-433	188	5	tin	tin	NOUN
alkej-433	188	6	and	and	CCONJ
alkej-433	188	7	ti(c	ti(c	ADJ
alkej-433	188	8	,	,	PUNCT
alkej-433	188	9	n	n	CCONJ
alkej-433	188	10	)	)	PUNCT
alkej-433	188	11	basis	basis	NOUN
alkej-433	188	12	for	for	ADP
alkej-433	188	13	biomedical	biomedical	ADJ
alkej-433	188	14	application	application	NOUN
alkej-433	188	15	to	to	ADP
alkej-433	188	16	blood	blood	NOUN
alkej-433	188	17	contact	contact	NOUN
alkej-433	188	18	;	;	PUNCT
alkej-433	188	19	advances	advance	NOUN
alkej-433	188	20	in	in	ADP
alkej-433	188	21	materials	material	NOUN
alkej-433	188	22	science	science	NOUN
alkej-433	188	23	3(13	3(13	NUM
alkej-433	188	24	)	)	PUNCT
alkej-433	188	25	,	,	PUNCT
alkej-433	188	26	7	7	NUM
alkej-433	188	27	,	,	PUNCT
alkej-433	188	28	pp	pp	ADJ
alkej-433	188	29	.	.	PUNCT
alkej-433	189	1	63	63	NUM
alkej-433	189	2	-	-	SYM
alkej-433	189	3	70	70	NUM
alkej-433	189	4	,	,	PUNCT
alkej-433	189	5	2007	2007	NUM
alkej-433	189	6	.	.	PUNCT
alkej-433	190	1	[	[	X
alkej-433	190	2	11	11	NUM
alkej-433	190	3	]	]	X
alkej-433	190	4	a.i	a.i	PROPN
alkej-433	190	5	.	.	PROPN
alkej-433	190	6	kovalev	kovalev	PROPN
alkej-433	190	7	,	,	PUNCT
alkej-433	190	8	d.l	d.l	PROPN
alkej-433	190	9	.	.	PROPN
alkej-433	190	10	wainstein	wainstein	PROPN
alkej-433	190	11	,	,	PUNCT
alkej-433	190	12	a.y	a.y	PROPN
alkej-433	190	13	.	.	PROPN
alkej-433	190	14	rashkovskiy	rashkovskiy	PROPN
alkej-433	190	15	,	,	PUNCT
alkej-433	190	16	g.s	g.s	PROPN
alkej-433	190	17	.	.	PROPN
alkej-433	190	18	fox	fox	PROPN
alkej-433	190	19	-	-	PUNCT
alkej-433	190	20	abinovich	abinovich	PROPN
alkej-433	190	21	,	,	PUNCT
alkej-433	190	22	k.	k.	PROPN
alkej-433	190	23	yamamoto	yamamoto	PROPN
alkej-433	190	24	,	,	PUNCT
alkej-433	190	25	s.	s.	PROPN
alkej-433	190	26	veldhuis	veldhuis	PROPN
alkej-433	190	27	,	,	PUNCT
alkej-433	190	28	m.	m.	NOUN
alkej-433	190	29	aguirre	aguirre	PROPN
alkej-433	190	30	,	,	PUNCT
alkej-433	190	31	b.d	b.d	PROPN
alkej-433	190	32	.	.	PROPN
alkej-433	190	33	beake.impact	beake.impact	PROPN
alkej-433	190	34	of	of	ADP
alkej-433	190	35	al	al	PROPN
alkej-433	190	36	and	and	CCONJ
alkej-433	190	37	cr	cr	NOUN
alkej-433	190	38	alloying	alloy	VERB
alkej-433	190	39	in	in	ADP
alkej-433	190	40	tin	tin	NOUN
alkej-433	190	41	-	-	PUNCT
alkej-433	190	42	based	base	VERB
alkej-433	190	43	pvd	pvd	PROPN
alkej-433	190	44	coatings	coating	NOUN
alkej-433	190	45	on	on	ADP
alkej-433	190	46	cutting	cut	VERB
alkej-433	190	47	performance	performance	NOUN
alkej-433	190	48	during	during	ADP
alkej-433	190	49	machining	machining	NOUN
alkej-433	190	50	of	of	ADP
alkej-433	190	51	hard	hard	NOUN
alkej-433	190	52	to	to	PART
alkej-433	190	53	cut	cut	VERB
alkej-433	190	54	materials	material	NOUN
alkej-433	190	55	,	,	PUNCT
alkej-433	190	56	vacuum	vacuum	NOUN
alkej-433	190	57	84,pp	84,pp	NUM
alkej-433	190	58	184	184	NUM
alkej-433	190	59	–	–	PUNCT
alkej-433	190	60	187	187	NUM
alkej-433	190	61	,	,	PUNCT
alkej-433	190	62	(	(	PUNCT
alkej-433	190	63	2010	2010	NUM
alkej-433	190	64	)	)	PUNCT
alkej-433	190	65	.	.	PUNCT
alkej-433	191	1	[	[	X
alkej-433	191	2	12	12	NUM
alkej-433	191	3	]	]	PUNCT
alkej-433	191	4	b.	b.	PROPN
alkej-433	192	1	podgornik	podgornik	PROPN
alkej-433	192	2	,	,	PUNCT
alkej-433	192	3	b.	b.	PROPN
alkej-433	192	4	zajec	zajec	PROPN
alkej-433	192	5	,	,	PUNCT
alkej-433	192	6	n.	n.	PROPN
alkej-433	192	7	bay	bay	PROPN
alkej-433	192	8	,	,	PUNCT
alkej-433	192	9	j.	j.	PROPN
alkej-433	192	10	vižintin	vižintin	PROPN
alkej-433	192	11	.	.	PUNCT
alkej-433	193	1	application	application	NOUN
alkej-433	193	2	of	of	ADP
alkej-433	193	3	hard	hard	ADJ
alkej-433	193	4	coatings	coating	NOUN
alkej-433	193	5	for	for	ADP
alkej-433	193	6	blanking	blank	VERB
alkej-433	193	7	and	and	CCONJ
alkej-433	193	8	piercing	piercing	NOUN
alkej-433	193	9	tools	tool	NOUN
alkej-433	193	10	wear	wear	VERB
alkej-433	193	11	,	,	PUNCT
alkej-433	193	12	270,pp	270,pp	PROPN
alkej-433	193	13	850–856	850–856	NUM
alkej-433	193	14	,	,	PUNCT
alkej-433	193	15	(	(	PUNCT
alkej-433	193	16	2011	2011	NUM
alkej-433	193	17	)	)	PUNCT
alkej-433	193	18	.	.	PUNCT
alkej-433	193	19	)	)	PUNCT
alkej-433	194	1	2017(58	2017(58	NUM
alkej-433	194	2	-	-	SYM
alkej-433	194	3	68	68	NUM
alkej-433	194	4	،	،	ADJ
alkej-433	194	5	صفحة4د	صفحة4د	ADJ
alkej-433	194	6	،	،	NOUN
alkej-433	194	7	العد13دجلة	العد13دجلة	X
alkej-433	194	8	الخوارزمي	الخوارزمي	VERB
alkej-433	194	9	الهندسية	الهندسية	PROPN
alkej-433	194	10	المجلم	المجلم	PROPN
alkej-433	194	11	كامل	كامل	ADJ
alkej-433	194	12	جواد	جواد	NOUN
alkej-433	194	13	كاظم	كاظم	NOUN
alkej-433	194	14	68	68	NUM
alkej-433	194	15	متعدد	متعدد	NOUN
alkej-433	194	16	الطبقات	الطبقات	PROPN
alkej-433	194	17	على	على	PROPN
alkej-433	194	18	عملية	عملية	NOUN
alkej-433	194	19	تأكل	تأكل	NOUN
alkej-433	194	20	عدة	عدة	INTJ
alkej-433	194	21	القطع	القطع	VERB
alkej-433	194	22	وخصائص	وخصائص	ADV
alkej-433	194	23	االحتكاك	االحتكاك	PROPN
alkej-433	194	24	على	على	NOUN
alkej-433	194	25	سطحها	سطحها	NOUN
alkej-433	194	26	)	)	PUNCT
alkej-433	194	27	ti	ti	X
alkej-433	194	28	/	/	SYM
alkej-433	194	29	altin(تأثير	altin(تأثير	PROPN
alkej-433	194	30	طالء	طالء	ADV
alkej-433	194	31	عباس	عباس	VERB
alkej-433	194	32	عالوي	عالوي	NOUN
alkej-433	194	33	عباس	عباس	VERB
alkej-433	194	34	*	*	PUNCT
alkej-433	194	35	*	*	PROPN
alkej-433	194	36	ماهر	ماهر	PROPN
alkej-433	194	37	علي	علي	NOUN
alkej-433	194	38	حسين	حسين	INTJ
alkej-433	194	39	*	*	PUNCT
alkej-433	195	1	*	*	PUNCT
alkej-433	195	2	*	*	PUNCT
alkej-433	195	3	كامل	كامل	ADJ
alkej-433	195	4	جواد	جواد	NOUN
alkej-433	195	5	كاظم	كاظم	NOUN
alkej-433	195	6	*	*	SYM
alkej-433	195	7	جامعة	جامعة	NOUN
alkej-433	195	8	الفرات	الفرات	NOUN
alkej-433	195	9	االوسط	االوسط	PROPN
alkej-433	195	10	التقنية	التقنية	PROPN
alkej-433	195	11	المسيب	المسيب	PROPN
alkej-433	195	12	/	/	PUNCT
alkej-433	196	1	*	*	PUNCT
alkej-433	196	2	,	,	PUNCT
alkej-433	196	3	*	*	PUNCT
alkej-433	196	4	*	*	PUNCT
alkej-433	196	5	,	,	PUNCT
alkej-433	196	6	*	*	PUNCT
alkej-433	196	7	*	*	PUNCT
alkej-433	196	8	*	*	PUNCT
alkej-433	196	9	المعهد	المعهد	NOUN
alkej-433	196	10	التقني	التقني	VERB
alkej-433	196	11	kamil_jawad35@yahoo.com	kamil_jawad35@yahoo.com	PROPN
alkej-433	196	12	*	*	PROPN
alkej-433	196	13	البريد	البريد	PROPN
alkej-433	196	14	االلكتروني	االلكتروني	NOUN
alkej-433	196	15	:	:	PUNCT
alkej-433	196	16	abbas_alawi80@yahoo.com	abbas_alawi80@yahoo.com	X
alkej-433	196	17	*	*	PROPN
alkej-433	196	18	*	*	PROPN
alkej-433	196	19	البريد	البريد	PROPN
alkej-433	196	20	االلكتروني	االلكتروني	NOUN
alkej-433	196	21	:	:	PUNCT
alkej-433	196	22	aher.a.hussein@gmail.comm	aher.a.hussein@gmail.comm	NOUN
alkej-433	196	23	*	*	PUNCT
alkej-433	196	24	*	*	PUNCT
alkej-433	196	25	*	*	PUNCT
alkej-433	196	26	البريد	البريد	PROPN
alkej-433	196	27	االلكتروني	االلكتروني	NOUN
alkej-433	196	28	:	:	PUNCT
alkej-433	196	29	الخالصة	الخالصة	VERB
alkej-433	196	30	في	في	SCONJ
alkej-433	196	31	أداة	أداة	NOUN
alkej-433	196	32	القطع	القطع	NOUN
alkej-433	196	33	و	و	PRON
alkej-433	196	34	سبب	سبب	PROPN
alkej-433	196	35	هذه	هذه	PROPN
alkej-433	196	36	تغير	تغير	PUNCT
alkej-433	196	37	تدريجية	تدريجية	PROPN
alkej-433	196	38	في	في	ADP
alkej-433	196	39	عمليات	عمليات	PROPN
alkej-433	196	40	التشغيل	التشغيل	PROPN
alkej-433	196	41	الميكانيكي	الميكانيكي	PROPN
alkej-433	196	42	ألن	ألن	PROPN
alkej-433	196	43	الخسارة	الخسارة	PROPN
alkej-433	196	44	المادية	المادية	PROPN
alkej-433	196	45	الناتجة	الناتجة	PROPN
alkej-433	196	46	هو	هو	DET
alkej-433	196	47	مشكلة	مشكلة	PROPN
alkej-433	196	48	رئيسعدة	رئيسعدة	NOUN
alkej-433	196	49	القطع	القطع	NOUN
alkej-433	196	50	تآكل	تآكل	PROPN
alkej-433	196	51	يعد	يعد	NOUN
alkej-433	196	52	.	.	PUNCT
alkej-433	197	1	تأكل	تأكل	PROPN
alkej-433	198	1	عدة	عدة	PROPN
alkej-433	198	2	القطع	القطع	PROPN
alkej-433	198	3	يمكن	يمكن	PROPN
alkej-433	198	4	أن	أن	ADP
alkej-433	198	5	تقلل	تقلل	PROPN
alkej-433	198	6	أثناء	أثناء	PROPN
alkej-433	198	7	عمليات	عمليات	VERB
alkej-433	198	8	التشغيل	التشغيل	PROPN
alkej-433	198	9	الخسارة	الخسارة	PROPN
alkej-433	198	10	المادية	المادية	PROPN
alkej-433	198	11	هو	هو	PROPN
alkej-433	198	12	التآكل	التآكل	PROPN
alkej-433	198	13	واالحتكاك	واالحتكاك	PROPN
alkej-433	198	14	،	،	PROPN
alkej-433	198	15	وعملية	وعملية	PROPN
alkej-433	198	16	الفرك	الفرك	ADJ
alkej-433	198	17	التي	التي	PROPN
alkej-433	198	18	تحدث	تحدث	VERB
alkej-433	198	19	بين	بين	ADV
alkej-433	198	20	األداة	األداة	NOUN
alkej-433	198	21	وقطعة	وقطعة	NOUN
alkej-433	199	1	العمل	العمل	PROPN
alkej-433	199	2	وجودة	وجودة	PROPN
alkej-433	199	3	تشطيب	تشطيب	PROPN
alkej-433	199	4	السطوح	السطوح	PROPN
alkej-433	199	5	لقطعة	لقطعة	PROPN
alkej-433	200	1	العمل	العمل	PROPN
alkej-433	200	2	,	,	PUNCT
alkej-433	200	3	وايضا	وايضا	NOUN
alkej-433	200	4	يؤدي	يؤدي	NOUN
alkej-433	200	5	الى	الى	VERB
alkej-433	200	6	زيادة	زيادة	PROPN
alkej-433	201	1	في	في	PRON
alkej-433	201	2	قوة	قوة	PROPN
alkej-433	201	3	القطع	القطع	PROPN
alkej-433	201	4	المطلوبة	المطلوبة	NOUN
alkej-433	201	5	.	.	PUNCT
alkej-433	202	1	في	في	VERB
alkej-433	202	2	هذه	هذه	NOUN
alkej-433	202	3	الدراسة	الدراسة	PROPN
alkej-433	202	4	،	،	PROPN
alkej-433	202	5	ركزنا	ركزنا	PROPN
alkej-433	202	6	على	على	NOUN
alkej-433	202	7	تأثير	تأثير	NOUN
alkej-433	203	1	من	من	INTJ
alkej-433	203	2	دقة	دقة	NOUN
alkej-433	203	3	األبعاد	األبعاد	ADV
alkej-433	203	4	كل	كل	PROPN
alkej-433	203	5	جناح	جناح	NOUN
alkej-433	203	6	آسبب	آسبب	VERB
alkej-433	203	7	ظهور	ظهور	ADP
alkej-433	203	8	الحفرة	الحفرة	PROPN
alkej-433	203	9	هو	هو	INTJ
alkej-433	203	10	تدفق	تدفق	PROPN
alkej-433	203	11	الرايش	الرايش	PROPN
alkej-433	203	12	على	على	PROPN
alkej-433	204	1	وجه	وجه	PROPN
alkej-433	204	2	وسطح	وسطح	PROPN
alkej-433	204	3	العدة	العدة	PROPN
alkej-433	204	4	.	.	PUNCT
alkej-433	205	1	في	في	PRON
alkej-433	205	2	حين	حين	AUX
alkej-433	205	3	توعملية	توعملية	VERB
alkej-433	205	4	الطالء	الطالء	PROPN
alkej-433	205	5	على	على	PROPN
alkej-433	205	6	مشاكل	مشاكل	PROPN
alkej-433	205	7	تأكل	تأكل	PROPN
alkej-433	205	8	سطح	سطح	PROPN
alkej-433	205	9	العدة	العدة	PROPN
alkej-433	205	10	وظهور	وظهور	ADJ
alkej-433	205	11	الحفرة	الحفرة	PROPN
alkej-433	205	12	.	.	PUNCT
alkej-433	206	1	وقطعة	وقطعة	PROPN
alkej-433	206	2	العمل	العمل	PROPN
alkej-433	206	3	.	.	PUNCT
alkej-433	207	1	ولتقليل	ولتقليل	PROPN
alkej-433	208	1	من	من	PROPN
alkej-433	208	2	حفر	حفر	ADV
alkej-433	208	3	التأكل	التأكل	ADJ
alkej-433	208	4	على	على	NOUN
alkej-433	208	5	سطح	سطح	NOUN
alkej-433	208	6	العدة	العدة	NOUN
alkej-433	208	7	,	,	PUNCT
alkej-433	208	8	عملنا	عملنا	ADJ
alkej-433	208	9	على	على	NOUN
alkej-433	208	10	تحسين	تحسين	NOUN
alkej-433	208	11	سطح	سطح	ADJ
alkej-433	208	12	عدة	عدة	PROPN
alkej-433	208	13	القطع	القطع	PROPN
alkej-433	208	14	بعملية	بعملية	NOUN
alkej-433	208	15	ل	ل	PROPN
alkej-433	208	16	بين	بين	NOUN
alkej-433	208	17	االداة	االداة	NOUN
alkej-433	208	18	العدة	العدة	PROPN
alkej-433	208	19	يحدث	يحدث	VERB
alkej-433	208	20	بسبب	بسبب	VERB
alkej-433	208	21	االتصا	االتصا	PROPN
alkej-433	208	22	وللحد	وللحد	PROPN
alkej-433	208	23	من	من	PROPN
alkej-433	208	24	تأكل	تأكل	ADJ
alkej-433	208	25	جناح	جناح	NOUN
alkej-433	208	26	عدة	عدة	VERB
alkej-433	208	27	القطع	القطع	PROPN
alkej-433	208	28	،	،	PROPN
alkej-433	208	29	.في	.في	PUNCT
alkej-433	209	1	نظام	نظام	PROPN
alkej-433	209	2	قوس	قوس	VERB
alkej-433	209	3	كاثودي	كاثودي	VERB
alkej-433	209	4	للطالء	للطالء	ADJ
alkej-433	209	5	0.33ti	0.33ti	NOUN
alkej-433	210	1	0.67alباستخدام	0.67alباستخدام	NOUN
alkej-433	210	2	(	(	PUNCT
alkej-433	210	3	altin)الطالء	altin)الطالء	PROPN
alkej-433	210	4	بإضافة	بإضافة	NOUN
alkej-433	210	5	نترات	نترات	PROPN
alkej-433	210	6	األلومنيوم	األلومنيوم	NOUN
alkej-433	210	7	التيتانيوم	التيتانيوم	PROPN
alkej-433	210	8	altinباستخدام	altinباستخدام	PROPN
alkej-433	210	9	طالءالفقد	طالءالفقد	PROPN
alkej-433	210	10	اثبت	اثبت	VERB
alkej-433	210	11	ان	ان	PROPN
alkej-433	210	12	المطلية	المطلية	PROPN
alkej-433	210	13	بعد	بعد	PROPN
alkej-433	210	14	اختبار	اختبار	PROPN
alkej-433	210	15	وتشغيل	وتشغيل	VERB
alkej-433	210	16	عدة	عدة	CCONJ
alkej-433	210	17	القطعايضا	القطعايضا	PROPN
alkej-433	210	18	من	من	PROPN
alkej-433	210	19	أفضل	أفضل	PROPN
alkej-433	210	20	المواد	المواد	ADJ
alkej-433	210	21	لطالء	لطالء	NOUN
alkej-433	210	22	العدة	العدة	NOUN
alkej-433	210	23	.	.	PUNCT
alkej-433	211	1	تجريبيا	تجريبيا	ADV
alkej-433	211	2	(	(	PUNCT
alkej-433	211	3	altin)يعتبر	altin)يعتبر	INTJ
alkej-433	211	4	,	,	PUNCT
alkej-433	211	5	0.23	0.23	NUM
alkej-433	211	6	,	,	PUNCT
alkej-433	211	7	0.15	0.15	NUM
alkej-433	211	8	,	,	PUNCT
alkej-433	211	9	0.14بعد	0.14بعد	PROPN
alkej-433	211	10	عملية	عملية	NOUN
alkej-433	211	11	التشغيل	التشغيل	VERB
alkej-433	211	12	هي	هي	PROPN
alkej-433	211	13	)	)	PUNCT
alkej-433	211	14	altinقيم	altinقيم	PROPN
alkej-433	211	15	خشونة	خشونة	PROPN
alkej-433	211	16	السطح	السطح	PROPN
alkej-433	211	17	المطلي	المطلي	PROPN
alkej-433	211	18	بل	بل	PROPN
alkej-433	211	19	(	(	PUNCT
alkej-433	211	20	حيث	حيث	PROPN
alkej-433	211	21	كانت	كانت	ADP
alkej-433	211	22	نتائجكل	نتائجكل	PROPN
alkej-433	211	23	.	.	PUNCT
alkej-433	212	1	آتعتبر	آتعتبر	NOUN
alkej-433	212	2	فعالة	فعالة	PROPN
alkej-433	212	3	جدا	جدا	PROPN
alkej-433	212	4	في	في	ADP
alkej-433	212	5	الحد	الحد	PROPN
alkej-433	212	6	من	من	PRON
alkej-433	212	7	الت	الت	PROPN
alkej-433	212	8	0.02	0.02	NUM
alkej-433	212	9	,	,	PUNCT
alkej-433	212	10	0.21	0.21	NUM
alkej-433	212	11	µm	µm	ADP
alkej-433	212	12	3.0818	3.0818	NUM
alkej-433	212	13	,	,	PUNCT
alkej-433	212	14	2.717	2.717	NUM
alkej-433	212	15	,	,	PUNCT
alkej-433	212	16	1.735	1.735	NUM
alkej-433	212	17	,	,	PUNCT
alkej-433	212	18	1.518	1.518	NUM
alkej-433	212	19	,	,	PUNCT
alkej-433	212	20	1.138ميكرون	1.138ميكرون	NUM
alkej-433	212	21	بسمك	بسمك	NOUN
alkej-433	212	22	طبقات	طبقات	ADJ
alkej-433	212	23	µm	µm	X
alkej-433	212	24	.	.	PUNCT
alkej-433	213	1	هر	هر	NUM
alkej-433	213	2	عند	عند	PROPN
alkej-433	213	3	ظاقل	ظاقل	VERB
alkej-433	213	4	معامل	معامل	NOUN
alkej-433	213	5	احتكاك	احتكاك	PROPN
alkej-433	213	6	على	على	PROPN
alkej-433	213	7	التوالي	التوالي	NOUN
alkej-433	213	8	للجهاز	للجهاز	ADJ
alkej-433	213	9	خشونة	خشونة	NOUN
alkej-433	213	10	العالية	العالية	NOUN
alkej-433	213	11	ومساحة	ومساحة	PROPN
alkej-433	213	12	االتصال	االتصال	PROPN
alkej-433	213	13	الواسعة	الواسعة	X
alkej-433	213	14	بين	بين	AUX
alkej-433	213	15	الكرة	الكرة	PROPN
alkej-433	213	16	الفوالذية	الفوالذية	PROPN
alkej-433	213	17	الارتفاع	الارتفاع	PROPN
alkej-433	213	18	معامل	معامل	PROPN
alkej-433	213	19	االحتكاك	االحتكاك	PROPN
alkej-433	213	20	للطالء	للطالء	PROPN
alkej-433	213	21	كان	كان	PROPN
alkej-433	213	22	نتيجة	نتيجة	NOUN
alkej-433	213	23	علما	علما	NOUN
alkej-433	213	24	ان	ان	PRON
alkej-433	213	25	.	.	PUNCT
alkej-433	214	1	2.717µm)سمك	2.717µm)سمك	NUM
alkej-433	214	2	(	(	PUNCT
alkej-433	214	3	.كلآفر	.كلآفر	X
alkej-433	214	4	التأكل	التأكل	NOUN
alkej-433	214	5	هي	هي	PROPN
alkej-433	214	6	العمق	العمق	PROPN
alkej-433	214	7	وعرض	وعرض	ADJ
alkej-433	214	8	التاستخدمت	التاستخدمت	PROPN
alkej-433	214	9	لقياس	لقياس	PROPN
alkej-433	214	10	حومنطقة	حومنطقة	PROPN
alkej-433	214	11	الطالء	الطالء	PROPN
alkej-433	214	12	.واهم	.واهم	PROPN
alkej-433	214	13	العوامل	العوامل	PROPN
alkej-433	214	14	التي	التي	PROPN