id	sid	tid	token	lemma	pos
ajema-8175	1	1	65	65	NUM
ajema-8175	1	2	journal	journal	NOUN
ajema-8175	1	3	of	of	ADP
ajema-8175	1	4	engineering	engineering	NOUN
ajema-8175	1	5	,	,	PUNCT
ajema-8175	1	6	mechanics	mechanic	NOUN
ajema-8175	1	7	and	and	CCONJ
ajema-8175	1	8	architecture	architecture	NOUN
ajema-8175	1	9	www	www	NOUN
ajema-8175	1	10	.	.	PUNCT
ajema-8175	2	1	grnjournal.us	grnjournal.us	PROPN
ajema-8175	2	2	american	american	PROPN
ajema-8175	2	3	journal	journal	PROPN
ajema-8175	2	4	of	of	ADP
ajema-8175	2	5	engineering	engineering	NOUN
ajema-8175	2	6	,	,	PUNCT
ajema-8175	2	7	mechanics	mechanic	NOUN
ajema-8175	2	8	and	and	CCONJ
ajema-8175	2	9	architecture	architecture	NOUN
ajema-8175	2	10	volume	volume	NOUN
ajema-8175	2	11	3	3	NUM
ajema-8175	2	12	,	,	PUNCT
ajema-8175	2	13	issue	issue	NOUN
ajema-8175	2	14	7	7	NUM
ajema-8175	2	15	,	,	PUNCT
ajema-8175	2	16	2025	2025	NUM
ajema-8175	2	17	issn	issn	X
ajema-8175	2	18	(	(	PUNCT
ajema-8175	2	19	e	e	NOUN
ajema-8175	2	20	):	):	PUNCT
ajema-8175	2	21	2993	2993	NUM
ajema-8175	2	22	-	-	SYM
ajema-8175	2	23	2637	2637	NUM
ajema-8175	2	24	design	design	NOUN
ajema-8175	2	25	and	and	CCONJ
ajema-8175	2	26	analysis	analysis	NOUN
ajema-8175	2	27	of	of	ADP
ajema-8175	2	28	ultrafast	ultrafast	ADJ
ajema-8175	2	29	pulsed	pulse	VERB
ajema-8175	2	30	laser	laser	NOUN
ajema-8175	2	31	systems	system	NOUN
ajema-8175	2	32	for	for	ADP
ajema-8175	2	33	precision	precision	NOUN
ajema-8175	2	34	micromachining	micromachine	VERB
ajema-8175	2	35	in	in	ADP
ajema-8175	2	36	electronic	electronic	ADJ
ajema-8175	2	37	materials	material	NOUN
ajema-8175	2	38	muntadher	muntadher	NOUN
ajema-8175	2	39	raiysan	raiysan	ADJ
ajema-8175	2	40	azeez	azeez	PROPN
ajema-8175	2	41	alshumoos	alshumoos	PROPN
ajema-8175	2	42	,	,	PUNCT
ajema-8175	2	43	zainab	zainab	PROPN
ajema-8175	2	44	esaa	esaa	PROPN
ajema-8175	3	1	al	al	PROPN
ajema-8175	3	2	yasery	yasery	PROPN
ajema-8175	3	3	university	university	PROPN
ajema-8175	3	4	of	of	ADP
ajema-8175	3	5	kut	kut	PROPN
ajema-8175	3	6	,	,	PUNCT
ajema-8175	3	7	college	college	NOUN
ajema-8175	3	8	of	of	ADP
ajema-8175	3	9	engineering	engineering	NOUN
ajema-8175	3	10	,	,	PUNCT
ajema-8175	3	11	laser	laser	NOUN
ajema-8175	3	12	and	and	CCONJ
ajema-8175	3	13	optoelectronics	optoelectronic	NOUN
ajema-8175	3	14	engineering	engineering	NOUN
ajema-8175	3	15	mohammed	mohammed	PROPN
ajema-8175	3	16	khalid	khalid	PROPN
ajema-8175	3	17	saadoun	saadoun	PROPN
ajema-8175	3	18	university	university	PROPN
ajema-8175	3	19	:	:	PUNCT
ajema-8175	3	20	al	al	PROPN
ajema-8175	3	21	-	-	PUNCT
ajema-8175	3	22	kut	kut	PROPN
ajema-8175	3	23	university	university	PROPN
ajema-8175	3	24	college	college	NOUN
ajema-8175	3	25	,	,	PUNCT
ajema-8175	3	26	department	department	NOUN
ajema-8175	3	27	:	:	PUNCT
ajema-8175	3	28	laser	laser	NOUN
ajema-8175	3	29	and	and	CCONJ
ajema-8175	3	30	optoelectronics	optoelectronic	NOUN
ajema-8175	3	31	engineering	engineering	NOUN
ajema-8175	3	32	rusul	rusul	PROPN
ajema-8175	3	33	ali	ali	PROPN
ajema-8175	3	34	nathom	nathom	PROPN
ajema-8175	3	35	ali	ali	PROPN
ajema-8175	3	36	,	,	PUNCT
ajema-8175	3	37	aya	aya	PROPN
ajema-8175	3	38	qasim	qasim	PROPN
ajema-8175	3	39	aziz	aziz	PROPN
ajema-8175	3	40	,	,	PUNCT
ajema-8175	3	41	ahmed	ahmed	PROPN
ajema-8175	3	42	shihab	shihab	PROPN
ajema-8175	3	43	hamad	hamad	PROPN
ajema-8175	3	44	abdullah	abdullah	PROPN
ajema-8175	3	45	university	university	PROPN
ajema-8175	3	46	of	of	ADP
ajema-8175	3	47	kut	kut	PROPN
ajema-8175	3	48	,	,	PUNCT
ajema-8175	3	49	college	college	NOUN
ajema-8175	3	50	of	of	ADP
ajema-8175	3	51	engineering	engineering	NOUN
ajema-8175	3	52	,	,	PUNCT
ajema-8175	3	53	laser	laser	NOUN
ajema-8175	3	54	and	and	CCONJ
ajema-8175	3	55	optoelectronics	optoelectronic	NOUN
ajema-8175	3	56	,	,	PUNCT
ajema-8175	3	57	engineering	engineering	NOUN
ajema-8175	3	58	abstract	abstract	NOUN
ajema-8175	3	59	:	:	PUNCT
ajema-8175	3	60	the	the	DET
ajema-8175	3	61	increasing	increase	VERB
ajema-8175	3	62	demand	demand	NOUN
ajema-8175	3	63	for	for	ADP
ajema-8175	3	64	miniaturization	miniaturization	NOUN
ajema-8175	3	65	and	and	CCONJ
ajema-8175	3	66	high	high	ADJ
ajema-8175	3	67	-	-	PUNCT
ajema-8175	3	68	precision	precision	NOUN
ajema-8175	3	69	fabrication	fabrication	NOUN
ajema-8175	3	70	in	in	ADP
ajema-8175	3	71	electronic	electronic	ADJ
ajema-8175	3	72	materials	material	NOUN
ajema-8175	3	73	,	,	PUNCT
ajema-8175	3	74	including	include	VERB
ajema-8175	3	75	semiconductors	semiconductor	NOUN
ajema-8175	3	76	,	,	PUNCT
ajema-8175	3	77	mems	mem	NOUN
ajema-8175	3	78	,	,	PUNCT
ajema-8175	3	79	and	and	CCONJ
ajema-8175	3	80	microelectronics	microelectronics	NOUN
ajema-8175	3	81	packaging	packaging	NOUN
ajema-8175	3	82	,	,	PUNCT
ajema-8175	3	83	necessitates	necessitate	VERB
ajema-8175	3	84	advanced	advanced	ADJ
ajema-8175	3	85	micromachining	micromachine	VERB
ajema-8175	3	86	techniques	technique	NOUN
ajema-8175	3	87	capable	capable	ADJ
ajema-8175	3	88	of	of	ADP
ajema-8175	3	89	producing	produce	VERB
ajema-8175	3	90	microscale	microscale	ADJ
ajema-8175	3	91	features	feature	NOUN
ajema-8175	3	92	with	with	ADP
ajema-8175	3	93	minimal	minimal	ADJ
ajema-8175	3	94	thermal	thermal	ADJ
ajema-8175	3	95	damage	damage	NOUN
ajema-8175	3	96	.	.	PUNCT
ajema-8175	4	1	this	this	DET
ajema-8175	4	2	study	study	NOUN
ajema-8175	4	3	presents	present	VERB
ajema-8175	4	4	the	the	DET
ajema-8175	4	5	design	design	NOUN
ajema-8175	4	6	and	and	CCONJ
ajema-8175	4	7	analysis	analysis	NOUN
ajema-8175	4	8	of	of	ADP
ajema-8175	4	9	ultrafast	ultrafast	ADJ
ajema-8175	4	10	pulsed	pulse	VERB
ajema-8175	4	11	laser	laser	NOUN
ajema-8175	4	12	systems	system	NOUN
ajema-8175	4	13	tailored	tailor	VERB
ajema-8175	4	14	for	for	ADP
ajema-8175	4	15	precision	precision	NOUN
ajema-8175	4	16	micromachining	micromachine	VERB
ajema-8175	4	17	applications	application	NOUN
ajema-8175	4	18	in	in	ADP
ajema-8175	4	19	such	such	ADJ
ajema-8175	4	20	materials	material	NOUN
ajema-8175	4	21	.	.	PUNCT
ajema-8175	5	1	theoretical	theoretical	ADJ
ajema-8175	5	2	modeling	modeling	NOUN
ajema-8175	5	3	encompassed	encompass	VERB
ajema-8175	5	4	ablation	ablation	NOUN
ajema-8175	5	5	threshold	threshold	NOUN
ajema-8175	5	6	calculations	calculation	NOUN
ajema-8175	5	7	,	,	PUNCT
ajema-8175	5	8	thermal	thermal	ADJ
ajema-8175	5	9	diffusion	diffusion	NOUN
ajema-8175	5	10	analysis	analysis	NOUN
ajema-8175	5	11	,	,	PUNCT
ajema-8175	5	12	and	and	CCONJ
ajema-8175	5	13	spot	spot	NOUN
ajema-8175	5	14	size	size	NOUN
ajema-8175	5	15	-	-	PUNCT
ajema-8175	5	16	fluence	fluence	NOUN
ajema-8175	5	17	optimization	optimization	NOUN
ajema-8175	5	18	,	,	PUNCT
ajema-8175	5	19	revealing	reveal	VERB
ajema-8175	5	20	that	that	DET
ajema-8175	5	21	femtosecond	femtosecond	NOUN
ajema-8175	5	22	pulses	pulse	NOUN
ajema-8175	5	23	(	(	PUNCT
ajema-8175	5	24	\~300	\~300	NUM
ajema-8175	5	25	fs	fs	NOUN
ajema-8175	5	26	)	)	PUNCT
ajema-8175	5	27	enable	enable	VERB
ajema-8175	5	28	cold	cold	ADJ
ajema-8175	5	29	ablation	ablation	NOUN
ajema-8175	5	30	with	with	ADP
ajema-8175	5	31	negligible	negligible	ADJ
ajema-8175	5	32	heat	heat	NOUN
ajema-8175	5	33	-	-	PUNCT
ajema-8175	5	34	affected	affect	VERB
ajema-8175	5	35	zones	zone	NOUN
ajema-8175	5	36	due	due	ADP
ajema-8175	5	37	to	to	ADP
ajema-8175	5	38	their	their	PRON
ajema-8175	5	39	ultrashort	ultrashort	NOUN
ajema-8175	5	40	energy	energy	NOUN
ajema-8175	5	41	deposition	deposition	NOUN
ajema-8175	5	42	timescales	timescale	NOUN
ajema-8175	5	43	.	.	PUNCT
ajema-8175	6	1	an	an	DET
ajema-8175	6	2	experimental	experimental	ADJ
ajema-8175	6	3	setup	setup	NOUN
ajema-8175	6	4	was	be	AUX
ajema-8175	6	5	developed	develop	VERB
ajema-8175	6	6	using	use	VERB
ajema-8175	6	7	a	a	DET
ajema-8175	6	8	femtosecond	femtosecond	NOUN
ajema-8175	6	9	laser	laser	NOUN
ajema-8175	6	10	(	(	PUNCT
ajema-8175	6	11	1030	1030	NUM
ajema-8175	6	12	nm	nm	NOUN
ajema-8175	6	13	,	,	PUNCT
ajema-8175	6	14	300	300	NUM
ajema-8175	6	15	fs	fs	NOUN
ajema-8175	6	16	)	)	PUNCT
ajema-8175	6	17	integrated	integrate	VERB
ajema-8175	6	18	with	with	ADP
ajema-8175	6	19	galvanometric	galvanometric	ADJ
ajema-8175	6	20	scanners	scanner	NOUN
ajema-8175	6	21	and	and	CCONJ
ajema-8175	6	22	precision	precision	NOUN
ajema-8175	6	23	stages	stage	NOUN
ajema-8175	6	24	,	,	PUNCT
ajema-8175	6	25	processing	process	VERB
ajema-8175	6	26	silicon	silicon	NOUN
ajema-8175	6	27	wafers	wafer	NOUN
ajema-8175	6	28	,	,	PUNCT
ajema-8175	6	29	glass	glass	NOUN
ajema-8175	6	30	substrates	substrate	NOUN
ajema-8175	6	31	,	,	PUNCT
ajema-8175	6	32	and	and	CCONJ
ajema-8175	6	33	thin	thin	ADJ
ajema-8175	6	34	metal	metal	NOUN
ajema-8175	6	35	films	film	NOUN
ajema-8175	6	36	.	.	PUNCT
ajema-8175	7	1	machining	machining	NOUN
ajema-8175	7	2	parameters	parameter	NOUN
ajema-8175	7	3	,	,	PUNCT
ajema-8175	7	4	including	include	VERB
ajema-8175	7	5	pulse	pulse	NOUN
ajema-8175	7	6	energy	energy	NOUN
ajema-8175	7	7	(	(	PUNCT
ajema-8175	7	8	5–150	5–150	NUM
ajema-8175	7	9	µj	µj	PROPN
ajema-8175	7	10	)	)	PUNCT
ajema-8175	7	11	,	,	PUNCT
ajema-8175	7	12	repetition	repetition	NOUN
ajema-8175	7	13	rate	rate	NOUN
ajema-8175	7	14	(	(	PUNCT
ajema-8175	7	15	100–500	100–500	NUM
ajema-8175	7	16	khz	khz	NOUN
ajema-8175	7	17	)	)	PUNCT
ajema-8175	7	18	,	,	PUNCT
ajema-8175	7	19	and	and	CCONJ
ajema-8175	7	20	scanning	scan	VERB
ajema-8175	7	21	speed	speed	NOUN
ajema-8175	7	22	(	(	PUNCT
ajema-8175	7	23	0.1–10	0.1–10	NOUN
ajema-8175	7	24	mm	mm	PROPN
ajema-8175	7	25	/	/	SYM
ajema-8175	7	26	s	s	PROPN
ajema-8175	7	27	)	)	PUNCT
ajema-8175	7	28	,	,	PUNCT
ajema-8175	7	29	were	be	AUX
ajema-8175	7	30	systematically	systematically	ADV
ajema-8175	7	31	varied	varied	ADJ
ajema-8175	7	32	.	.	PUNCT
ajema-8175	8	1	results	result	NOUN
ajema-8175	8	2	demonstrated	demonstrate	VERB
ajema-8175	8	3	high	high	ADJ
ajema-8175	8	4	-	-	PUNCT
ajema-8175	8	5	quality	quality	NOUN
ajema-8175	8	6	micromachining	micromachine	VERB
ajema-8175	8	7	outcomes	outcome	NOUN
ajema-8175	8	8	,	,	PUNCT
ajema-8175	8	9	achieving	achieve	VERB
ajema-8175	8	10	minimum	minimum	ADJ
ajema-8175	8	11	feature	feature	NOUN
ajema-8175	8	12	sizes	size	NOUN
ajema-8175	8	13	of	of	ADP
ajema-8175	8	14	\~1.5	\~1.5	PROPN
ajema-8175	8	15	µm	µm	NOUN
ajema-8175	8	16	,	,	PUNCT
ajema-8175	8	17	smooth	smooth	ADJ
ajema-8175	8	18	surfaces	surface	NOUN
ajema-8175	8	19	with	with	ADP
ajema-8175	8	20	rms	rm	NOUN
ajema-8175	8	21	roughness	roughness	NOUN
ajema-8175	8	22	of	of	ADP
ajema-8175	8	23	20–50	20–50	NUM
ajema-8175	8	24	nm	nm	NOUN
ajema-8175	8	25	,	,	PUNCT
ajema-8175	8	26	and	and	CCONJ
ajema-8175	8	27	minimal	minimal	ADJ
ajema-8175	8	28	redeposition	redeposition	NOUN
ajema-8175	8	29	or	or	CCONJ
ajema-8175	8	30	tapering	tapering	NOUN
ajema-8175	8	31	.	.	PUNCT
ajema-8175	9	1	pulse	pulse	NOUN
ajema-8175	9	2	characterization	characterization	NOUN
ajema-8175	9	3	via	via	ADP
ajema-8175	9	4	autocorrelation	autocorrelation	NOUN
ajema-8175	9	5	and	and	CCONJ
ajema-8175	9	6	frog	frog	NOUN
ajema-8175	9	7	confirmed	confirm	VERB
ajema-8175	9	8	clean	clean	ADJ
ajema-8175	9	9	temporal	temporal	ADJ
ajema-8175	9	10	profiles	profile	NOUN
ajema-8175	9	11	,	,	PUNCT
ajema-8175	9	12	while	while	SCONJ
ajema-8175	9	13	system	system	NOUN
ajema-8175	9	14	stability	stability	NOUN
ajema-8175	9	15	tests	test	NOUN
ajema-8175	9	16	showed	show	VERB
ajema-8175	9	17	<	<	X
ajema-8175	9	18	±2	±2	NOUN
ajema-8175	9	19	%	%	NOUN
ajema-8175	9	20	energy	energy	NOUN
ajema-8175	9	21	fluctuation	fluctuation	NOUN
ajema-8175	9	22	,	,	PUNCT
ajema-8175	9	23	ensuring	ensure	VERB
ajema-8175	9	24	consistent	consistent	ADJ
ajema-8175	9	25	ablation	ablation	NOUN
ajema-8175	9	26	performance	performance	NOUN
ajema-8175	9	27	.	.	PUNCT
ajema-8175	10	1	the	the	DET
ajema-8175	10	2	findings	finding	NOUN
ajema-8175	10	3	confirmed	confirm	VERB
ajema-8175	10	4	theoretical	theoretical	ADJ
ajema-8175	10	5	predictions	prediction	NOUN
ajema-8175	10	6	,	,	PUNCT
ajema-8175	10	7	with	with	ADP
ajema-8175	10	8	negligible	negligible	ADJ
ajema-8175	10	9	thermal	thermal	ADJ
ajema-8175	10	10	damage	damage	NOUN
ajema-8175	10	11	across	across	ADP
ajema-8175	10	12	all	all	DET
ajema-8175	10	13	materials	material	NOUN
ajema-8175	10	14	processed	process	VERB
ajema-8175	10	15	.	.	PUNCT
ajema-8175	11	1	comparison	comparison	NOUN
ajema-8175	11	2	with	with	ADP
ajema-8175	11	3	previous	previous	ADJ
ajema-8175	11	4	studies	study	NOUN
ajema-8175	11	5	highlighted	highlight	VERB
ajema-8175	11	6	comparable	comparable	ADJ
ajema-8175	11	7	or	or	CCONJ
ajema-8175	11	8	superior	superior	ADJ
ajema-8175	11	9	machining	machining	NOUN
ajema-8175	11	10	quality	quality	NOUN
ajema-8175	11	11	,	,	PUNCT
ajema-8175	11	12	validating	validate	VERB
ajema-8175	11	13	the	the	DET
ajema-8175	11	14	proposed	propose	VERB
ajema-8175	11	15	design	design	NOUN
ajema-8175	11	16	framework	framework	NOUN
ajema-8175	11	17	.	.	PUNCT
ajema-8175	12	1	challenges	challenge	NOUN
ajema-8175	12	2	encountered	encounter	VERB
ajema-8175	12	3	included	include	VERB
ajema-8175	12	4	beam	beam	NOUN
ajema-8175	12	5	delivery	delivery	NOUN
ajema-8175	12	6	alignment	alignment	NOUN
ajema-8175	12	7	sensitivity	sensitivity	NOUN
ajema-8175	12	8	and	and	CCONJ
ajema-8175	12	9	minor	minor	ADJ
ajema-8175	12	10	pulse	pulse	NOUN
ajema-8175	12	11	energy	energy	NOUN
ajema-8175	12	12	fluctuations	fluctuation	NOUN
ajema-8175	12	13	,	,	PUNCT
ajema-8175	12	14	emphasizing	emphasize	VERB
ajema-8175	12	15	the	the	DET
ajema-8175	12	16	need	need	NOUN
ajema-8175	12	17	for	for	ADP
ajema-8175	12	18	routine	routine	ADJ
ajema-8175	12	19	calibration	calibration	NOUN
ajema-8175	12	20	and	and	CCONJ
ajema-8175	12	21	active	active	ADJ
ajema-8175	12	22	stabilization	stabilization	NOUN
ajema-8175	12	23	for	for	ADP
ajema-8175	12	24	industrial	industrial	ADJ
ajema-8175	12	25	applications	application	NOUN
ajema-8175	12	26	.	.	PUNCT
ajema-8175	13	1	this	this	DET
ajema-8175	13	2	research	research	NOUN
ajema-8175	13	3	contributes	contribute	VERB
ajema-8175	13	4	by	by	ADP
ajema-8175	13	5	establishing	establish	VERB
ajema-8175	13	6	an	an	DET
ajema-8175	13	7	integrated	integrated	ADJ
ajema-8175	13	8	design	design	NOUN
ajema-8175	13	9	,	,	PUNCT
ajema-8175	13	10	modeling	modeling	NOUN
ajema-8175	13	11	,	,	PUNCT
ajema-8175	13	12	and	and	CCONJ
ajema-8175	13	13	experimental	experimental	ADJ
ajema-8175	13	14	validation	validation	NOUN
ajema-8175	13	15	framework	framework	NOUN
ajema-8175	13	16	for	for	ADP
ajema-8175	13	17	ultrafast	ultrafast	ADJ
ajema-8175	13	18	laser	laser	NOUN
ajema-8175	13	19	micromachining	micromachine	VERB
ajema-8175	13	20	systems	system	NOUN
ajema-8175	13	21	,	,	PUNCT
ajema-8175	13	22	paving	pave	VERB
ajema-8175	13	23	the	the	DET
ajema-8175	13	24	way	way	NOUN
ajema-8175	13	25	for	for	ADP
ajema-8175	13	26	their	their	PRON
ajema-8175	13	27	effective	effective	ADJ
ajema-8175	13	28	deployment	deployment	NOUN
ajema-8175	13	29	in	in	ADP
ajema-8175	13	30	electronic	electronic	ADJ
ajema-8175	13	31	manufacturing	manufacturing	NOUN
ajema-8175	13	32	.	.	PUNCT
ajema-8175	14	1	future	future	ADJ
ajema-8175	14	2	work	work	NOUN
ajema-8175	14	3	will	will	AUX
ajema-8175	14	4	focus	focus	VERB
ajema-8175	14	5	on	on	ADP
ajema-8175	14	6	multi	multi	ADJ
ajema-8175	14	7	-	-	ADJ
ajema-8175	14	8	material	material	ADJ
ajema-8175	14	9	processing	processing	NOUN
ajema-8175	14	10	optimization	optimization	NOUN
ajema-8175	14	11	,	,	PUNCT
ajema-8175	14	12	ai	ai	VERB
ajema-8175	14	13	integration	integration	NOUN
ajema-8175	14	14	for	for	ADP
ajema-8175	14	15	adaptive	adaptive	ADJ
ajema-8175	14	16	real	real	ADJ
ajema-8175	14	17	-	-	PUNCT
ajema-8175	14	18	time	time	NOUN
ajema-8175	14	19	machining	machining	NOUN
ajema-8175	14	20	,	,	PUNCT
ajema-8175	14	21	and	and	CCONJ
ajema-8175	14	22	energy	energy	NOUN
ajema-8175	14	23	efficiency	efficiency	NOUN
ajema-8175	14	24	improvements	improvement	NOUN
ajema-8175	14	25	to	to	PART
ajema-8175	14	26	enable	enable	VERB
ajema-8175	14	27	high	high	ADJ
ajema-8175	14	28	-	-	PUNCT
ajema-8175	14	29	throughput	throughput	NOUN
ajema-8175	14	30	,	,	PUNCT
ajema-8175	14	31	scalable	scalable	ADJ
ajema-8175	14	32	,	,	PUNCT
ajema-8175	14	33	and	and	CCONJ
ajema-8175	14	34	sustainable	sustainable	ADJ
ajema-8175	14	35	ultrafast	ultrafast	ADJ
ajema-8175	14	36	laser	laser	NOUN
ajema-8175	14	37	-	-	PUNCT
ajema-8175	14	38	based	base	VERB
ajema-8175	14	39	fabrication	fabrication	NOUN
ajema-8175	14	40	solutions	solution	NOUN
ajema-8175	14	41	.	.	PUNCT
ajema-8175	15	1	66	66	NUM
ajema-8175	15	2	journal	journal	NOUN
ajema-8175	15	3	of	of	ADP
ajema-8175	15	4	engineering	engineering	NOUN
ajema-8175	15	5	,	,	PUNCT
ajema-8175	15	6	mechanics	mechanic	NOUN
ajema-8175	15	7	and	and	CCONJ
ajema-8175	15	8	architecture	architecture	NOUN
ajema-8175	15	9	www	www	NOUN
ajema-8175	15	10	.	.	PUNCT
ajema-8175	16	1	grnjournal.us	grnjournal.us	X
ajema-8175	16	2	keywords	keyword	NOUN
ajema-8175	16	3	:	:	PUNCT
ajema-8175	16	4	ultrafast	ultrafast	ADJ
ajema-8175	16	5	laser	laser	NOUN
ajema-8175	16	6	micromachining	micromachining	NOUN
ajema-8175	16	7	;	;	PUNCT
ajema-8175	16	8	femtosecond	femtosecond	NOUN
ajema-8175	16	9	laser	laser	NOUN
ajema-8175	16	10	;	;	PUNCT
ajema-8175	16	11	precision	precision	NOUN
ajema-8175	16	12	ablation	ablation	NOUN
ajema-8175	16	13	;	;	PUNCT
ajema-8175	16	14	electronic	electronic	ADJ
ajema-8175	16	15	materials	material	NOUN
ajema-8175	16	16	;	;	PUNCT
ajema-8175	16	17	heat	heat	NOUN
ajema-8175	16	18	-	-	PUNCT
ajema-8175	16	19	affected	affect	VERB
ajema-8175	16	20	zone	zone	NOUN
ajema-8175	16	21	(	(	PUNCT
ajema-8175	16	22	haz	haz	PROPN
ajema-8175	16	23	)	)	PUNCT
ajema-8175	16	24	;	;	PUNCT
ajema-8175	16	25	pulse	pulse	NOUN
ajema-8175	16	26	energy	energy	NOUN
ajema-8175	16	27	stability	stability	NOUN
ajema-8175	16	28	;	;	PUNCT
ajema-8175	16	29	laser	laser	NOUN
ajema-8175	16	30	beam	beam	NOUN
ajema-8175	16	31	delivery	delivery	NOUN
ajema-8175	16	32	;	;	PUNCT
ajema-8175	16	33	thermal	thermal	ADJ
ajema-8175	16	34	diffusion	diffusion	NOUN
ajema-8175	16	35	modeling	modeling	NOUN
ajema-8175	16	36	;	;	PUNCT
ajema-8175	16	37	silicon	silicon	NOUN
ajema-8175	16	38	micromachining	micromachining	NOUN
ajema-8175	16	39	.	.	PUNCT
ajema-8175	17	1	introduction	introduction	NOUN
ajema-8175	17	2	the	the	DET
ajema-8175	17	3	rapid	rapid	ADJ
ajema-8175	17	4	advancement	advancement	NOUN
ajema-8175	17	5	of	of	ADP
ajema-8175	17	6	electronic	electronic	ADJ
ajema-8175	17	7	technologies	technology	NOUN
ajema-8175	17	8	,	,	PUNCT
ajema-8175	17	9	including	include	VERB
ajema-8175	17	10	semiconductors	semiconductor	NOUN
ajema-8175	17	11	,	,	PUNCT
ajema-8175	17	12	micro	micro	ADJ
ajema-8175	17	13	electromechanical	electromechanical	ADJ
ajema-8175	17	14	systems	system	NOUN
ajema-8175	17	15	(	(	PUNCT
ajema-8175	17	16	mems	mem	NOUN
ajema-8175	17	17	)	)	PUNCT
ajema-8175	17	18	,	,	PUNCT
ajema-8175	17	19	and	and	CCONJ
ajema-8175	17	20	microelectronics	microelectronics	NOUN
ajema-8175	17	21	packaging	packaging	NOUN
ajema-8175	17	22	,	,	PUNCT
ajema-8175	17	23	has	have	AUX
ajema-8175	17	24	driven	drive	VERB
ajema-8175	17	25	an	an	DET
ajema-8175	17	26	increasing	increase	VERB
ajema-8175	17	27	demand	demand	NOUN
ajema-8175	17	28	for	for	ADP
ajema-8175	17	29	precise	precise	ADJ
ajema-8175	17	30	micromachining	micromachine	VERB
ajema-8175	17	31	techniques	technique	NOUN
ajema-8175	17	32	capable	capable	ADJ
ajema-8175	17	33	of	of	ADP
ajema-8175	17	34	fabricating	fabricate	VERB
ajema-8175	17	35	microand	microand	NOUN
ajema-8175	17	36	nanoscale	nanoscale	NOUN
ajema-8175	17	37	structures	structure	NOUN
ajema-8175	17	38	with	with	ADP
ajema-8175	17	39	minimal	minimal	ADJ
ajema-8175	17	40	defects	defect	NOUN
ajema-8175	17	41	.	.	PUNCT
ajema-8175	18	1	in	in	ADP
ajema-8175	18	2	semiconductor	semiconductor	NOUN
ajema-8175	18	3	device	device	NOUN
ajema-8175	18	4	fabrication	fabrication	NOUN
ajema-8175	18	5	,	,	PUNCT
ajema-8175	18	6	the	the	DET
ajema-8175	18	7	ability	ability	NOUN
ajema-8175	18	8	to	to	PART
ajema-8175	18	9	process	process	VERB
ajema-8175	18	10	features	feature	NOUN
ajema-8175	18	11	at	at	ADP
ajema-8175	18	12	sub	sub	ADJ
ajema-8175	18	13	-	-	ADJ
ajema-8175	18	14	micron	micron	ADJ
ajema-8175	18	15	scales	scale	NOUN
ajema-8175	18	16	with	with	ADP
ajema-8175	18	17	high	high	ADJ
ajema-8175	18	18	dimensional	dimensional	ADJ
ajema-8175	18	19	accuracy	accuracy	NOUN
ajema-8175	18	20	directly	directly	ADV
ajema-8175	18	21	influences	influence	VERB
ajema-8175	18	22	device	device	NOUN
ajema-8175	18	23	performance	performance	NOUN
ajema-8175	18	24	,	,	PUNCT
ajema-8175	18	25	integration	integration	NOUN
ajema-8175	18	26	density	density	NOUN
ajema-8175	18	27	,	,	PUNCT
ajema-8175	18	28	and	and	CCONJ
ajema-8175	18	29	reliability	reliability	NOUN
ajema-8175	18	30	.	.	PUNCT
ajema-8175	19	1	similarly	similarly	ADV
ajema-8175	19	2	,	,	PUNCT
ajema-8175	19	3	mems	mem	NOUN
ajema-8175	19	4	devices	device	NOUN
ajema-8175	19	5	require	require	VERB
ajema-8175	19	6	intricate	intricate	ADJ
ajema-8175	19	7	patterning	patterning	NOUN
ajema-8175	19	8	and	and	CCONJ
ajema-8175	19	9	structuring	structure	VERB
ajema-8175	19	10	with	with	ADP
ajema-8175	19	11	tight	tight	ADJ
ajema-8175	19	12	tolerances	tolerance	NOUN
ajema-8175	19	13	,	,	PUNCT
ajema-8175	19	14	while	while	SCONJ
ajema-8175	19	15	microelectronics	microelectronic	NOUN
ajema-8175	19	16	packaging	packaging	NOUN
ajema-8175	19	17	demands	demand	NOUN
ajema-8175	19	18	accurate	accurate	ADJ
ajema-8175	19	19	via	via	ADP
ajema-8175	19	20	drilling	drilling	NOUN
ajema-8175	19	21	,	,	PUNCT
ajema-8175	19	22	thin	thin	ADJ
ajema-8175	19	23	film	film	NOUN
ajema-8175	19	24	patterning	patterning	NOUN
ajema-8175	19	25	,	,	PUNCT
ajema-8175	19	26	and	and	CCONJ
ajema-8175	19	27	interconnect	interconnect	VERB
ajema-8175	19	28	formation	formation	NOUN
ajema-8175	19	29	without	without	ADP
ajema-8175	19	30	damaging	damage	VERB
ajema-8175	19	31	underlying	underlie	VERB
ajema-8175	19	32	layers	layer	NOUN
ajema-8175	19	33	.	.	PUNCT
ajema-8175	20	1	traditional	traditional	ADJ
ajema-8175	20	2	machining	machining	NOUN
ajema-8175	20	3	and	and	CCONJ
ajema-8175	20	4	even	even	ADV
ajema-8175	20	5	nanosecond	nanosecond	NOUN
ajema-8175	20	6	laser	laser	NOUN
ajema-8175	20	7	processing	processing	NOUN
ajema-8175	20	8	techniques	technique	NOUN
ajema-8175	20	9	often	often	ADV
ajema-8175	20	10	induce	induce	VERB
ajema-8175	20	11	significant	significant	ADJ
ajema-8175	20	12	thermal	thermal	ADJ
ajema-8175	20	13	damage	damage	NOUN
ajema-8175	20	14	to	to	ADP
ajema-8175	20	15	materials	material	NOUN
ajema-8175	20	16	due	due	ADJ
ajema-8175	20	17	to	to	ADP
ajema-8175	20	18	long	long	ADJ
ajema-8175	20	19	pulse	pulse	NOUN
ajema-8175	20	20	durations	duration	NOUN
ajema-8175	20	21	and	and	CCONJ
ajema-8175	20	22	continuous	continuous	ADJ
ajema-8175	20	23	energy	energy	NOUN
ajema-8175	20	24	deposition	deposition	NOUN
ajema-8175	20	25	.	.	PUNCT
ajema-8175	21	1	this	this	DET
ajema-8175	21	2	results	result	NOUN
ajema-8175	21	3	in	in	ADP
ajema-8175	21	4	heat	heat	NOUN
ajema-8175	21	5	-	-	PUNCT
ajema-8175	21	6	affected	affect	VERB
ajema-8175	21	7	zones	zone	NOUN
ajema-8175	21	8	(	(	PUNCT
ajema-8175	21	9	haz	haz	PROPN
ajema-8175	21	10	)	)	PUNCT
ajema-8175	21	11	,	,	PUNCT
ajema-8175	21	12	recast	recast	ADJ
ajema-8175	21	13	layers	layer	NOUN
ajema-8175	21	14	,	,	PUNCT
ajema-8175	21	15	microcracks	microcrack	NOUN
ajema-8175	21	16	,	,	PUNCT
ajema-8175	21	17	and	and	CCONJ
ajema-8175	21	18	structural	structural	ADJ
ajema-8175	21	19	distortions	distortion	NOUN
ajema-8175	21	20	,	,	PUNCT
ajema-8175	21	21	limiting	limit	VERB
ajema-8175	21	22	their	their	PRON
ajema-8175	21	23	applicability	applicability	NOUN
ajema-8175	21	24	in	in	ADP
ajema-8175	21	25	precision	precision	NOUN
ajema-8175	21	26	-	-	PUNCT
ajema-8175	21	27	demanding	demand	VERB
ajema-8175	21	28	electronic	electronic	ADJ
ajema-8175	21	29	manufacturing	manufacturing	NOUN
ajema-8175	21	30	processes	process	NOUN
ajema-8175	21	31	.	.	PUNCT
ajema-8175	22	1	therefore	therefore	ADV
ajema-8175	22	2	,	,	PUNCT
ajema-8175	22	3	there	there	PRON
ajema-8175	22	4	is	be	VERB
ajema-8175	22	5	a	a	DET
ajema-8175	22	6	critical	critical	ADJ
ajema-8175	22	7	need	need	NOUN
ajema-8175	22	8	for	for	ADP
ajema-8175	22	9	machining	machining	NOUN
ajema-8175	22	10	approaches	approach	NOUN
ajema-8175	22	11	that	that	PRON
ajema-8175	22	12	can	can	AUX
ajema-8175	22	13	achieve	achieve	VERB
ajema-8175	22	14	high	high	ADJ
ajema-8175	22	15	-	-	PUNCT
ajema-8175	22	16	resolution	resolution	NOUN
ajema-8175	22	17	material	material	NOUN
ajema-8175	22	18	removal	removal	NOUN
ajema-8175	22	19	while	while	SCONJ
ajema-8175	22	20	preserving	preserve	VERB
ajema-8175	22	21	the	the	DET
ajema-8175	22	22	intrinsic	intrinsic	ADJ
ajema-8175	22	23	properties	property	NOUN
ajema-8175	22	24	and	and	CCONJ
ajema-8175	22	25	structural	structural	ADJ
ajema-8175	22	26	integrity	integrity	NOUN
ajema-8175	22	27	of	of	ADP
ajema-8175	22	28	the	the	DET
ajema-8175	22	29	processed	process	VERB
ajema-8175	22	30	materials	material	NOUN
ajema-8175	22	31	.	.	PUNCT
ajema-8175	23	1	ultrafast	ultrafast	ADJ
ajema-8175	23	2	pulsed	pulse	VERB
ajema-8175	23	3	lasers	laser	NOUN
ajema-8175	23	4	,	,	PUNCT
ajema-8175	23	5	particularly	particularly	ADV
ajema-8175	23	6	femtosecond	femtosecond	VERB
ajema-8175	23	7	and	and	CCONJ
ajema-8175	23	8	picosecond	picosecond	NOUN
ajema-8175	23	9	lasers	laser	NOUN
ajema-8175	23	10	,	,	PUNCT
ajema-8175	23	11	have	have	AUX
ajema-8175	23	12	emerged	emerge	VERB
ajema-8175	23	13	as	as	ADP
ajema-8175	23	14	transformative	transformative	ADJ
ajema-8175	23	15	tools	tool	NOUN
ajema-8175	23	16	in	in	ADP
ajema-8175	23	17	precision	precision	NOUN
ajema-8175	23	18	micromachining	micromachine	VERB
ajema-8175	23	19	applications	application	NOUN
ajema-8175	23	20	.	.	PUNCT
ajema-8175	24	1	due	due	ADP
ajema-8175	24	2	to	to	ADP
ajema-8175	24	3	their	their	PRON
ajema-8175	24	4	extremely	extremely	ADV
ajema-8175	24	5	short	short	ADJ
ajema-8175	24	6	pulse	pulse	NOUN
ajema-8175	24	7	durations	duration	NOUN
ajema-8175	24	8	,	,	PUNCT
ajema-8175	24	9	these	these	DET
ajema-8175	24	10	lasers	laser	NOUN
ajema-8175	24	11	enable	enable	VERB
ajema-8175	24	12	material	material	NOUN
ajema-8175	24	13	removal	removal	NOUN
ajema-8175	24	14	through	through	ADP
ajema-8175	24	15	nonlinear	nonlinear	ADJ
ajema-8175	24	16	absorption	absorption	NOUN
ajema-8175	24	17	mechanisms	mechanism	NOUN
ajema-8175	24	18	with	with	ADP
ajema-8175	24	19	minimal	minimal	ADJ
ajema-8175	24	20	thermal	thermal	ADJ
ajema-8175	24	21	diffusion	diffusion	NOUN
ajema-8175	24	22	into	into	ADP
ajema-8175	24	23	surrounding	surround	VERB
ajema-8175	24	24	regions	region	NOUN
ajema-8175	24	25	.	.	PUNCT
ajema-8175	25	1	the	the	DET
ajema-8175	25	2	result	result	NOUN
ajema-8175	25	3	is	be	AUX
ajema-8175	25	4	precise	precise	ADJ
ajema-8175	25	5	ablation	ablation	NOUN
ajema-8175	25	6	with	with	ADP
ajema-8175	25	7	negligible	negligible	ADJ
ajema-8175	25	8	haz	haz	NOUN
ajema-8175	25	9	,	,	PUNCT
ajema-8175	25	10	smooth	smooth	ADJ
ajema-8175	25	11	feature	feature	NOUN
ajema-8175	25	12	edges	edge	NOUN
ajema-8175	25	13	,	,	PUNCT
ajema-8175	25	14	and	and	CCONJ
ajema-8175	25	15	the	the	DET
ajema-8175	25	16	ability	ability	NOUN
ajema-8175	25	17	to	to	PART
ajema-8175	25	18	machine	machine	VERB
ajema-8175	25	19	a	a	DET
ajema-8175	25	20	wide	wide	ADJ
ajema-8175	25	21	range	range	NOUN
ajema-8175	25	22	of	of	ADP
ajema-8175	25	23	electronic	electronic	ADJ
ajema-8175	25	24	materials	material	NOUN
ajema-8175	25	25	,	,	PUNCT
ajema-8175	25	26	including	include	VERB
ajema-8175	25	27	metals	metal	NOUN
ajema-8175	25	28	,	,	PUNCT
ajema-8175	25	29	semiconductors	semiconductor	NOUN
ajema-8175	25	30	,	,	PUNCT
ajema-8175	25	31	and	and	CCONJ
ajema-8175	25	32	dielectrics	dielectric	NOUN
ajema-8175	25	33	.	.	PUNCT
ajema-8175	26	1	their	their	PRON
ajema-8175	26	2	capabilities	capability	NOUN
ajema-8175	26	3	have	have	AUX
ajema-8175	26	4	surpassed	surpass	VERB
ajema-8175	26	5	conventional	conventional	ADJ
ajema-8175	26	6	machining	machining	NOUN
ajema-8175	26	7	limitations	limitation	NOUN
ajema-8175	26	8	,	,	PUNCT
ajema-8175	26	9	facilitating	facilitate	VERB
ajema-8175	26	10	the	the	DET
ajema-8175	26	11	fabrication	fabrication	NOUN
ajema-8175	26	12	of	of	ADP
ajema-8175	26	13	microchannels	microchannel	NOUN
ajema-8175	26	14	,	,	PUNCT
ajema-8175	26	15	microholes	microhole	NOUN
ajema-8175	26	16	,	,	PUNCT
ajema-8175	26	17	interconnects	interconnect	NOUN
ajema-8175	26	18	,	,	PUNCT
ajema-8175	26	19	and	and	CCONJ
ajema-8175	26	20	complex	complex	ADJ
ajema-8175	26	21	three	three	NUM
ajema-8175	26	22	-	-	PUNCT
ajema-8175	26	23	dimensional	dimensional	ADJ
ajema-8175	26	24	microstructures	microstructure	NOUN
ajema-8175	26	25	essential	essential	ADJ
ajema-8175	26	26	for	for	ADP
ajema-8175	26	27	modern	modern	ADJ
ajema-8175	26	28	electronic	electronic	ADJ
ajema-8175	26	29	devices	device	NOUN
ajema-8175	26	30	.	.	PUNCT
ajema-8175	27	1	despite	despite	SCONJ
ajema-8175	27	2	the	the	DET
ajema-8175	27	3	widespread	widespread	ADJ
ajema-8175	27	4	recognition	recognition	NOUN
ajema-8175	27	5	of	of	ADP
ajema-8175	27	6	ultrafast	ultrafast	ADJ
ajema-8175	27	7	lasers	laser	NOUN
ajema-8175	27	8	in	in	ADP
ajema-8175	27	9	micromachining	micromachine	VERB
ajema-8175	27	10	,	,	PUNCT
ajema-8175	27	11	there	there	PRON
ajema-8175	27	12	remains	remain	VERB
ajema-8175	27	13	a	a	DET
ajema-8175	27	14	significant	significant	ADJ
ajema-8175	27	15	research	research	NOUN
ajema-8175	27	16	gap	gap	NOUN
ajema-8175	27	17	in	in	ADP
ajema-8175	27	18	optimizing	optimize	VERB
ajema-8175	27	19	the	the	DET
ajema-8175	27	20	design	design	NOUN
ajema-8175	27	21	parameters	parameter	NOUN
ajema-8175	27	22	of	of	ADP
ajema-8175	27	23	such	such	ADJ
ajema-8175	27	24	systems	system	NOUN
ajema-8175	27	25	to	to	PART
ajema-8175	27	26	maximize	maximize	VERB
ajema-8175	27	27	precision	precision	NOUN
ajema-8175	27	28	and	and	CCONJ
ajema-8175	27	29	efficiency	efficiency	NOUN
ajema-8175	27	30	for	for	ADP
ajema-8175	27	31	specific	specific	ADJ
ajema-8175	27	32	electronic	electronic	ADJ
ajema-8175	27	33	materials	material	NOUN
ajema-8175	27	34	.	.	PUNCT
ajema-8175	28	1	analytical	analytical	ADJ
ajema-8175	28	2	modeling	modeling	NOUN
ajema-8175	28	3	that	that	PRON
ajema-8175	28	4	links	link	VERB
ajema-8175	28	5	laser	laser	NOUN
ajema-8175	28	6	parameters	parameter	NOUN
ajema-8175	28	7	to	to	ADP
ajema-8175	28	8	material	material	NOUN
ajema-8175	28	9	responses	response	NOUN
ajema-8175	28	10	is	be	AUX
ajema-8175	28	11	also	also	ADV
ajema-8175	28	12	underdeveloped	underdeveloped	ADJ
ajema-8175	28	13	,	,	PUNCT
ajema-8175	28	14	hindering	hinder	VERB
ajema-8175	28	15	systematic	systematic	ADJ
ajema-8175	28	16	performance	performance	NOUN
ajema-8175	28	17	prediction	prediction	NOUN
ajema-8175	28	18	and	and	CCONJ
ajema-8175	28	19	system	system	NOUN
ajema-8175	28	20	optimization	optimization	NOUN
ajema-8175	28	21	.	.	PUNCT
ajema-8175	29	1	objectives	objective	NOUN
ajema-8175	29	2	this	this	DET
ajema-8175	29	3	study	study	NOUN
ajema-8175	29	4	aims	aim	VERB
ajema-8175	29	5	to	to	PART
ajema-8175	29	6	address	address	VERB
ajema-8175	29	7	these	these	DET
ajema-8175	29	8	gaps	gap	NOUN
ajema-8175	29	9	by	by	ADP
ajema-8175	29	10	:	:	PUNCT
ajema-8175	29	11	1	1	X
ajema-8175	29	12	.	.	X
ajema-8175	29	13	designing	design	VERB
ajema-8175	29	14	an	an	DET
ajema-8175	29	15	ultrafast	ultrafast	ADJ
ajema-8175	29	16	pulsed	pulse	VERB
ajema-8175	29	17	laser	laser	NOUN
ajema-8175	29	18	system	system	NOUN
ajema-8175	29	19	tailored	tailor	VERB
ajema-8175	29	20	specifically	specifically	ADV
ajema-8175	29	21	for	for	ADP
ajema-8175	29	22	micromachining	micromachine	VERB
ajema-8175	29	23	applications	application	NOUN
ajema-8175	29	24	in	in	ADP
ajema-8175	29	25	electronic	electronic	ADJ
ajema-8175	29	26	materials	material	NOUN
ajema-8175	29	27	,	,	PUNCT
ajema-8175	29	28	incorporating	incorporate	VERB
ajema-8175	29	29	considerations	consideration	NOUN
ajema-8175	29	30	of	of	ADP
ajema-8175	29	31	pulse	pulse	NOUN
ajema-8175	29	32	duration	duration	NOUN
ajema-8175	29	33	,	,	PUNCT
ajema-8175	29	34	wavelength	wavelength	NOUN
ajema-8175	29	35	,	,	PUNCT
ajema-8175	29	36	repetition	repetition	NOUN
ajema-8175	29	37	rate	rate	NOUN
ajema-8175	29	38	,	,	PUNCT
ajema-8175	29	39	and	and	CCONJ
ajema-8175	29	40	beam	beam	NOUN
ajema-8175	29	41	delivery	delivery	NOUN
ajema-8175	29	42	to	to	PART
ajema-8175	29	43	maximize	maximize	VERB
ajema-8175	29	44	machining	machining	NOUN
ajema-8175	29	45	precision	precision	NOUN
ajema-8175	29	46	.	.	PUNCT
ajema-8175	30	1	2	2	X
ajema-8175	30	2	.	.	X
ajema-8175	30	3	analyzing	analyze	VERB
ajema-8175	30	4	the	the	DET
ajema-8175	30	5	performance	performance	NOUN
ajema-8175	30	6	of	of	ADP
ajema-8175	30	7	the	the	DET
ajema-8175	30	8	designed	design	VERB
ajema-8175	30	9	system	system	NOUN
ajema-8175	30	10	in	in	ADP
ajema-8175	30	11	terms	term	NOUN
ajema-8175	30	12	of	of	ADP
ajema-8175	30	13	micromachining	micromachine	VERB
ajema-8175	30	14	precision	precision	NOUN
ajema-8175	30	15	,	,	PUNCT
ajema-8175	30	16	ablation	ablation	NOUN
ajema-8175	30	17	threshold	threshold	NOUN
ajema-8175	30	18	,	,	PUNCT
ajema-8175	30	19	and	and	CCONJ
ajema-8175	30	20	thermal	thermal	ADJ
ajema-8175	30	21	effects	effect	NOUN
ajema-8175	30	22	on	on	ADP
ajema-8175	30	23	the	the	DET
ajema-8175	30	24	processed	process	VERB
ajema-8175	30	25	materials	material	NOUN
ajema-8175	30	26	,	,	PUNCT
ajema-8175	30	27	with	with	ADP
ajema-8175	30	28	the	the	DET
ajema-8175	30	29	goal	goal	NOUN
ajema-8175	30	30	of	of	ADP
ajema-8175	30	31	providing	provide	VERB
ajema-8175	30	32	a	a	DET
ajema-8175	30	33	comprehensive	comprehensive	ADJ
ajema-8175	30	34	framework	framework	NOUN
ajema-8175	30	35	for	for	ADP
ajema-8175	30	36	optimal	optimal	ADJ
ajema-8175	30	37	system	system	NOUN
ajema-8175	30	38	design	design	NOUN
ajema-8175	30	39	and	and	CCONJ
ajema-8175	30	40	material	material	NOUN
ajema-8175	30	41	interaction	interaction	NOUN
ajema-8175	30	42	modeling	modeling	NOUN
ajema-8175	30	43	.	.	PUNCT
ajema-8175	31	1	through	through	ADP
ajema-8175	31	2	this	this	DET
ajema-8175	31	3	design	design	NOUN
ajema-8175	31	4	and	and	CCONJ
ajema-8175	31	5	analysis	analysis	NOUN
ajema-8175	31	6	,	,	PUNCT
ajema-8175	31	7	the	the	DET
ajema-8175	31	8	research	research	NOUN
ajema-8175	31	9	seeks	seek	VERB
ajema-8175	31	10	to	to	PART
ajema-8175	31	11	advance	advance	VERB
ajema-8175	31	12	the	the	DET
ajema-8175	31	13	integration	integration	NOUN
ajema-8175	31	14	of	of	ADP
ajema-8175	31	15	ultrafast	ultrafast	ADJ
ajema-8175	31	16	laser	laser	NOUN
ajema-8175	31	17	technologies	technology	NOUN
ajema-8175	31	18	in	in	ADP
ajema-8175	31	19	electronic	electronic	ADJ
ajema-8175	31	20	manufacturing	manufacturing	NOUN
ajema-8175	31	21	,	,	PUNCT
ajema-8175	31	22	enhancing	enhance	VERB
ajema-8175	31	23	fabrication	fabrication	NOUN
ajema-8175	31	24	accuracy	accuracy	NOUN
ajema-8175	31	25	,	,	PUNCT
ajema-8175	31	26	process	process	NOUN
ajema-8175	31	27	reliability	reliability	NOUN
ajema-8175	31	28	,	,	PUNCT
ajema-8175	31	29	and	and	CCONJ
ajema-8175	31	30	overall	overall	ADJ
ajema-8175	31	31	production	production	NOUN
ajema-8175	31	32	quality	quality	NOUN
ajema-8175	31	33	.	.	PUNCT
ajema-8175	32	1	67	67	NUM
ajema-8175	32	2	journal	journal	NOUN
ajema-8175	32	3	of	of	ADP
ajema-8175	32	4	engineering	engineering	NOUN
ajema-8175	32	5	,	,	PUNCT
ajema-8175	32	6	mechanics	mechanic	NOUN
ajema-8175	32	7	and	and	CCONJ
ajema-8175	32	8	architecture	architecture	NOUN
ajema-8175	32	9	www	www	NOUN
ajema-8175	32	10	.	.	PUNCT
ajema-8175	33	1	grnjournal.us	grnjournal.us	X
ajema-8175	33	2	literature	literature	PROPN
ajema-8175	33	3	review	review	NOUN
ajema-8175	33	4	1	1	NUM
ajema-8175	33	5	.	.	PUNCT
ajema-8175	33	6	ultrafast	ultrafast	ADJ
ajema-8175	33	7	laser	laser	NOUN
ajema-8175	33	8	fundamentals	fundamental	NOUN
ajema-8175	33	9	ultrafast	ultrafast	VERB
ajema-8175	33	10	pulsed	pulse	VERB
ajema-8175	33	11	lasers	laser	NOUN
ajema-8175	33	12	,	,	PUNCT
ajema-8175	33	13	characterized	characterize	VERB
ajema-8175	33	14	by	by	ADP
ajema-8175	33	15	femtosecond	femtosecond	NOUN
ajema-8175	33	16	(	(	PUNCT
ajema-8175	33	17	10	10	NUM
ajema-8175	33	18	^	^	SYM
ajema-8175	33	19	-15	-15	SYM
ajema-8175	33	20	s	s	PART
ajema-8175	33	21	)	)	PUNCT
ajema-8175	33	22	and	and	CCONJ
ajema-8175	33	23	picosecond	picosecond	NOUN
ajema-8175	33	24	(	(	PUNCT
ajema-8175	33	25	10	10	NUM
ajema-8175	33	26	^	^	NUM
ajema-8175	33	27	-12	-12	PRON
ajema-8175	33	28	s	s	X
ajema-8175	33	29	)	)	PUNCT
ajema-8175	33	30	pulse	pulse	NOUN
ajema-8175	33	31	durations	duration	NOUN
ajema-8175	33	32	,	,	PUNCT
ajema-8175	33	33	interact	interact	VERB
ajema-8175	33	34	with	with	ADP
ajema-8175	33	35	materials	material	NOUN
ajema-8175	33	36	through	through	ADP
ajema-8175	33	37	fundamentally	fundamentally	ADV
ajema-8175	33	38	different	different	ADJ
ajema-8175	33	39	mechanisms	mechanism	NOUN
ajema-8175	33	40	compared	compare	VERB
ajema-8175	33	41	to	to	ADP
ajema-8175	33	42	continuous	continuous	ADJ
ajema-8175	33	43	-	-	PUNCT
ajema-8175	33	44	wave	wave	NOUN
ajema-8175	33	45	or	or	CCONJ
ajema-8175	33	46	nanosecond	nanosecond	NOUN
ajema-8175	33	47	lasers	laser	NOUN
ajema-8175	33	48	.	.	PUNCT
ajema-8175	34	1	the	the	DET
ajema-8175	34	2	extremely	extremely	ADV
ajema-8175	34	3	short	short	ADJ
ajema-8175	34	4	pulse	pulse	NOUN
ajema-8175	34	5	duration	duration	NOUN
ajema-8175	34	6	leads	lead	VERB
ajema-8175	34	7	to	to	ADP
ajema-8175	34	8	high	high	ADJ
ajema-8175	34	9	peak	peak	NOUN
ajema-8175	34	10	intensities	intensity	NOUN
ajema-8175	34	11	,	,	PUNCT
ajema-8175	34	12	facilitating	facilitate	VERB
ajema-8175	34	13	multiphoton	multiphoton	NOUN
ajema-8175	34	14	absorption	absorption	NOUN
ajema-8175	34	15	,	,	PUNCT
ajema-8175	34	16	where	where	SCONJ
ajema-8175	34	17	electrons	electron	NOUN
ajema-8175	34	18	simultaneously	simultaneously	ADV
ajema-8175	34	19	absorb	absorb	VERB
ajema-8175	34	20	multiple	multiple	ADJ
ajema-8175	34	21	photons	photon	NOUN
ajema-8175	34	22	to	to	PART
ajema-8175	34	23	transition	transition	VERB
ajema-8175	34	24	to	to	ADP
ajema-8175	34	25	higher	high	ADJ
ajema-8175	34	26	energy	energy	NOUN
ajema-8175	34	27	states	state	NOUN
ajema-8175	34	28	even	even	ADV
ajema-8175	34	29	if	if	SCONJ
ajema-8175	34	30	individual	individual	ADJ
ajema-8175	34	31	photon	photon	NOUN
ajema-8175	34	32	energy	energy	NOUN
ajema-8175	34	33	is	be	AUX
ajema-8175	34	34	insufficient	insufficient	ADJ
ajema-8175	34	35	.	.	PUNCT
ajema-8175	35	1	this	this	DET
ajema-8175	35	2	nonlinear	nonlinear	ADJ
ajema-8175	35	3	absorption	absorption	NOUN
ajema-8175	35	4	process	process	NOUN
ajema-8175	35	5	is	be	AUX
ajema-8175	35	6	crucial	crucial	ADJ
ajema-8175	35	7	for	for	ADP
ajema-8175	35	8	machining	machine	VERB
ajema-8175	35	9	wide	wide	ADJ
ajema-8175	35	10	bandgap	bandgap	NOUN
ajema-8175	35	11	materials	material	NOUN
ajema-8175	35	12	transparent	transparent	ADJ
ajema-8175	35	13	at	at	ADP
ajema-8175	35	14	the	the	DET
ajema-8175	35	15	laser	laser	NOUN
ajema-8175	35	16	wavelength	wavelength	NOUN
ajema-8175	35	17	.	.	PUNCT
ajema-8175	36	1	another	another	DET
ajema-8175	36	2	dominant	dominant	ADJ
ajema-8175	36	3	mechanism	mechanism	NOUN
ajema-8175	36	4	is	be	AUX
ajema-8175	36	5	plasma	plasma	NOUN
ajema-8175	36	6	-	-	PUNCT
ajema-8175	36	7	mediated	mediate	VERB
ajema-8175	36	8	ablation	ablation	NOUN
ajema-8175	36	9	,	,	PUNCT
ajema-8175	36	10	where	where	SCONJ
ajema-8175	36	11	rapid	rapid	ADJ
ajema-8175	36	12	ionization	ionization	NOUN
ajema-8175	36	13	produces	produce	VERB
ajema-8175	36	14	dense	dense	ADJ
ajema-8175	36	15	plasma	plasma	NOUN
ajema-8175	36	16	within	within	ADP
ajema-8175	36	17	the	the	DET
ajema-8175	36	18	focal	focal	ADJ
ajema-8175	36	19	volume	volume	NOUN
ajema-8175	36	20	.	.	PUNCT
ajema-8175	37	1	the	the	DET
ajema-8175	37	2	energy	energy	NOUN
ajema-8175	37	3	deposition	deposition	NOUN
ajema-8175	37	4	occurs	occur	VERB
ajema-8175	37	5	faster	fast	ADV
ajema-8175	37	6	than	than	ADP
ajema-8175	37	7	thermal	thermal	ADJ
ajema-8175	37	8	diffusion	diffusion	NOUN
ajema-8175	37	9	,	,	PUNCT
ajema-8175	37	10	resulting	result	VERB
ajema-8175	37	11	in	in	ADP
ajema-8175	37	12	direct	direct	ADJ
ajema-8175	37	13	bond	bond	NOUN
ajema-8175	37	14	breaking	breaking	NOUN
ajema-8175	37	15	and	and	CCONJ
ajema-8175	37	16	material	material	NOUN
ajema-8175	37	17	removal	removal	NOUN
ajema-8175	37	18	with	with	ADP
ajema-8175	37	19	minimal	minimal	ADJ
ajema-8175	37	20	heat	heat	NOUN
ajema-8175	37	21	-	-	PUNCT
ajema-8175	37	22	affected	affect	VERB
ajema-8175	37	23	zones	zone	NOUN
ajema-8175	37	24	(	(	PUNCT
ajema-8175	37	25	haz	haz	PROPN
ajema-8175	37	26	)	)	PUNCT
ajema-8175	37	27	.	.	PUNCT
ajema-8175	38	1	these	these	DET
ajema-8175	38	2	mechanisms	mechanism	NOUN
ajema-8175	38	3	underpin	underpin	VERB
ajema-8175	38	4	the	the	DET
ajema-8175	38	5	capability	capability	NOUN
ajema-8175	38	6	of	of	ADP
ajema-8175	38	7	ultrafast	ultrafast	ADJ
ajema-8175	38	8	lasers	laser	NOUN
ajema-8175	38	9	to	to	PART
ajema-8175	38	10	achieve	achieve	VERB
ajema-8175	38	11	highprecision	highprecision	NOUN
ajema-8175	38	12	micromachining	micromachine	VERB
ajema-8175	38	13	with	with	ADP
ajema-8175	38	14	negligible	negligible	ADJ
ajema-8175	38	15	collateral	collateral	ADJ
ajema-8175	38	16	damage	damage	NOUN
ajema-8175	38	17	,	,	PUNCT
ajema-8175	38	18	enabling	enable	VERB
ajema-8175	38	19	fabrication	fabrication	NOUN
ajema-8175	38	20	of	of	ADP
ajema-8175	38	21	microscale	microscale	ADJ
ajema-8175	38	22	features	feature	NOUN
ajema-8175	38	23	with	with	ADP
ajema-8175	38	24	superior	superior	ADJ
ajema-8175	38	25	quality	quality	NOUN
ajema-8175	38	26	.	.	PUNCT
ajema-8175	39	1	2	2	X
ajema-8175	39	2	.	.	X
ajema-8175	39	3	previous	previous	ADJ
ajema-8175	39	4	work	work	NOUN
ajema-8175	39	5	on	on	ADP
ajema-8175	39	6	femtosecond	femtosecond	NOUN
ajema-8175	39	7	lasers	laser	NOUN
ajema-8175	39	8	in	in	ADP
ajema-8175	39	9	micromachining	micromachine	VERB
ajema-8175	39	10	several	several	ADJ
ajema-8175	39	11	studies	study	NOUN
ajema-8175	39	12	have	have	AUX
ajema-8175	39	13	demonstrated	demonstrate	VERB
ajema-8175	39	14	the	the	DET
ajema-8175	39	15	effectiveness	effectiveness	NOUN
ajema-8175	39	16	of	of	ADP
ajema-8175	39	17	femtosecond	femtosecond	NOUN
ajema-8175	39	18	lasers	laser	NOUN
ajema-8175	39	19	in	in	ADP
ajema-8175	39	20	precision	precision	NOUN
ajema-8175	39	21	micromachining	micromachining	NOUN
ajema-8175	39	22	:	:	PUNCT
ajema-8175	39	23	chichkov	chichkov	PROPN
ajema-8175	39	24	et	et	PROPN
ajema-8175	39	25	al	al	PROPN
ajema-8175	39	26	.	.	PROPN
ajema-8175	40	1	(	(	PUNCT
ajema-8175	40	2	1996	1996	NUM
ajema-8175	40	3	)	)	PUNCT
ajema-8175	40	4	pioneered	pioneer	VERB
ajema-8175	40	5	femtosecond	femtosecond	NOUN
ajema-8175	40	6	laser	laser	NOUN
ajema-8175	40	7	micromachining	micromachining	NOUN
ajema-8175	40	8	of	of	ADP
ajema-8175	40	9	metals	metal	NOUN
ajema-8175	40	10	and	and	CCONJ
ajema-8175	40	11	dielectrics	dielectric	NOUN
ajema-8175	40	12	,	,	PUNCT
ajema-8175	40	13	highlighting	highlight	VERB
ajema-8175	40	14	minimal	minimal	ADJ
ajema-8175	40	15	thermal	thermal	ADJ
ajema-8175	40	16	effects	effect	NOUN
ajema-8175	40	17	compared	compare	VERB
ajema-8175	40	18	to	to	ADP
ajema-8175	40	19	nanosecond	nanosecond	NOUN
ajema-8175	40	20	lasers	laser	NOUN
ajema-8175	40	21	.	.	PUNCT
ajema-8175	41	1	stuart	stuart	PROPN
ajema-8175	41	2	et	et	PROPN
ajema-8175	41	3	al	al	PROPN
ajema-8175	41	4	.	.	PROPN
ajema-8175	42	1	(	(	PUNCT
ajema-8175	42	2	1995	1995	NUM
ajema-8175	42	3	)	)	PUNCT
ajema-8175	42	4	analyzed	analyze	VERB
ajema-8175	42	5	laser	laser	NOUN
ajema-8175	42	6	-	-	PUNCT
ajema-8175	42	7	induced	induce	VERB
ajema-8175	42	8	breakdown	breakdown	NOUN
ajema-8175	42	9	in	in	ADP
ajema-8175	42	10	dielectrics	dielectric	NOUN
ajema-8175	42	11	with	with	ADP
ajema-8175	42	12	femtosecond	femtosecond	NOUN
ajema-8175	42	13	pulses	pulse	NOUN
ajema-8175	42	14	,	,	PUNCT
ajema-8175	42	15	demonstrating	demonstrate	VERB
ajema-8175	42	16	the	the	DET
ajema-8175	42	17	importance	importance	NOUN
ajema-8175	42	18	of	of	ADP
ajema-8175	42	19	multiphoton	multiphoton	NOUN
ajema-8175	42	20	ionization	ionization	NOUN
ajema-8175	42	21	in	in	ADP
ajema-8175	42	22	ablation	ablation	NOUN
ajema-8175	42	23	thresholds	threshold	NOUN
ajema-8175	42	24	.	.	PUNCT
ajema-8175	43	1	kautek	kautek	PROPN
ajema-8175	43	2	et	et	PROPN
ajema-8175	43	3	al	al	PROPN
ajema-8175	43	4	.	.	PROPN
ajema-8175	43	5	(	(	PUNCT
ajema-8175	43	6	1994	1994	NUM
ajema-8175	43	7	)	)	PUNCT
ajema-8175	43	8	applied	apply	VERB
ajema-8175	43	9	femtosecond	femtosecond	NOUN
ajema-8175	43	10	lasers	laser	NOUN
ajema-8175	43	11	to	to	ADP
ajema-8175	43	12	microdrilling	microdrille	VERB
ajema-8175	43	13	thin	thin	ADJ
ajema-8175	43	14	films	film	NOUN
ajema-8175	43	15	,	,	PUNCT
ajema-8175	43	16	revealing	reveal	VERB
ajema-8175	43	17	clean	clean	ADJ
ajema-8175	43	18	ablation	ablation	NOUN
ajema-8175	43	19	profiles	profile	NOUN
ajema-8175	43	20	critical	critical	ADJ
ajema-8175	43	21	for	for	ADP
ajema-8175	43	22	electronic	electronic	ADJ
ajema-8175	43	23	packaging	packaging	NOUN
ajema-8175	43	24	.	.	PUNCT
ajema-8175	44	1	schaffer	schaffer	PROPN
ajema-8175	44	2	et	et	PROPN
ajema-8175	44	3	al	al	PROPN
ajema-8175	44	4	.	.	PROPN
ajema-8175	45	1	(	(	PUNCT
ajema-8175	45	2	2001	2001	NUM
ajema-8175	45	3	)	)	PUNCT
ajema-8175	45	4	investigated	investigate	VERB
ajema-8175	45	5	nonlinear	nonlinear	ADJ
ajema-8175	45	6	optical	optical	ADJ
ajema-8175	45	7	breakdown	breakdown	NOUN
ajema-8175	45	8	in	in	ADP
ajema-8175	45	9	glass	glass	NOUN
ajema-8175	45	10	,	,	PUNCT
ajema-8175	45	11	enabling	enable	VERB
ajema-8175	45	12	precise	precise	ADJ
ajema-8175	45	13	internal	internal	ADJ
ajema-8175	45	14	structuring	structuring	NOUN
ajema-8175	45	15	for	for	ADP
ajema-8175	45	16	photonic	photonic	ADJ
ajema-8175	45	17	applications	application	NOUN
ajema-8175	45	18	.	.	PUNCT
ajema-8175	46	1	sugioka	sugioka	PROPN
ajema-8175	46	2	and	and	CCONJ
ajema-8175	46	3	cheng	cheng	PROPN
ajema-8175	46	4	(	(	PUNCT
ajema-8175	46	5	2014	2014	NUM
ajema-8175	46	6	)	)	PUNCT
ajema-8175	46	7	comprehensively	comprehensively	ADV
ajema-8175	46	8	reviewed	review	VERB
ajema-8175	46	9	ultrafast	ultrafast	ADJ
ajema-8175	46	10	laser	laser	NOUN
ajema-8175	46	11	processing	processing	NOUN
ajema-8175	46	12	in	in	ADP
ajema-8175	46	13	microfluidics	microfluidic	NOUN
ajema-8175	46	14	and	and	CCONJ
ajema-8175	46	15	mems	mem	NOUN
ajema-8175	46	16	fabrication	fabrication	NOUN
ajema-8175	46	17	,	,	PUNCT
ajema-8175	46	18	demonstrating	demonstrate	VERB
ajema-8175	46	19	flexible	flexible	ADJ
ajema-8175	46	20	material	material	NOUN
ajema-8175	46	21	selectivity	selectivity	NOUN
ajema-8175	46	22	.	.	PUNCT
ajema-8175	47	1	pronko	pronko	NOUN
ajema-8175	47	2	et	et	PROPN
ajema-8175	47	3	al	al	PROPN
ajema-8175	47	4	.	.	PROPN
ajema-8175	48	1	(	(	PUNCT
ajema-8175	48	2	1995	1995	NUM
ajema-8175	48	3	)	)	PUNCT
ajema-8175	48	4	reported	report	VERB
ajema-8175	48	5	femtosecond	femtosecond	NOUN
ajema-8175	48	6	laser	laser	NOUN
ajema-8175	48	7	ablation	ablation	NOUN
ajema-8175	48	8	of	of	ADP
ajema-8175	48	9	silicon	silicon	NOUN
ajema-8175	48	10	,	,	PUNCT
ajema-8175	48	11	showing	show	VERB
ajema-8175	48	12	superior	superior	ADJ
ajema-8175	48	13	surface	surface	NOUN
ajema-8175	48	14	quality	quality	NOUN
ajema-8175	48	15	and	and	CCONJ
ajema-8175	48	16	precise	precise	ADJ
ajema-8175	48	17	depth	depth	NOUN
ajema-8175	48	18	control	control	NOUN
ajema-8175	48	19	.	.	PUNCT
ajema-8175	49	1	gattass	gattass	NOUN
ajema-8175	49	2	and	and	CCONJ
ajema-8175	49	3	mazur	mazur	PROPN
ajema-8175	49	4	(	(	PUNCT
ajema-8175	49	5	2008	2008	NUM
ajema-8175	49	6	)	)	PUNCT
ajema-8175	49	7	discussed	discuss	VERB
ajema-8175	49	8	three	three	NUM
ajema-8175	49	9	-	-	PUNCT
ajema-8175	49	10	dimensional	dimensional	ADJ
ajema-8175	49	11	microfabrication	microfabrication	NOUN
ajema-8175	49	12	using	use	VERB
ajema-8175	49	13	femtosecond	femtosecond	NOUN
ajema-8175	49	14	pulses	pulse	NOUN
ajema-8175	49	15	,	,	PUNCT
ajema-8175	49	16	emphasizing	emphasize	VERB
ajema-8175	49	17	nonlinear	nonlinear	ADJ
ajema-8175	49	18	interactions	interaction	NOUN
ajema-8175	49	19	for	for	ADP
ajema-8175	49	20	volumetric	volumetric	NOUN
ajema-8175	49	21	processing	processing	NOUN
ajema-8175	49	22	.	.	PUNCT
ajema-8175	50	1	kerse	kerse	NOUN
ajema-8175	50	2	et	et	PROPN
ajema-8175	50	3	al	al	PROPN
ajema-8175	50	4	.	.	PUNCT
ajema-8175	51	1	(	(	PUNCT
ajema-8175	51	2	2016	2016	NUM
ajema-8175	51	3	)	)	PUNCT
ajema-8175	51	4	introduced	introduce	VERB
ajema-8175	51	5	high	high	ADJ
ajema-8175	51	6	-	-	PUNCT
ajema-8175	51	7	power	power	NOUN
ajema-8175	51	8	ultrafast	ultrafast	NOUN
ajema-8175	51	9	lasers	laser	NOUN
ajema-8175	51	10	for	for	ADP
ajema-8175	51	11	industrial	industrial	ADJ
ajema-8175	51	12	micromachining	micromachining	NOUN
ajema-8175	51	13	,	,	PUNCT
ajema-8175	51	14	achieving	achieve	VERB
ajema-8175	51	15	unprecedented	unprecedented	ADJ
ajema-8175	51	16	ablation	ablation	NOUN
ajema-8175	51	17	rates	rate	NOUN
ajema-8175	51	18	with	with	ADP
ajema-8175	51	19	femtosecond	femtosecond	NOUN
ajema-8175	51	20	bursts	burst	NOUN
ajema-8175	51	21	.	.	PUNCT
ajema-8175	52	1	zimmermann	zimmermann	PROPN
ajema-8175	52	2	et	et	PROPN
ajema-8175	52	3	al	al	PROPN
ajema-8175	52	4	.	.	PROPN
ajema-8175	53	1	(	(	PUNCT
ajema-8175	53	2	2014	2014	NUM
ajema-8175	53	3	)	)	PUNCT
ajema-8175	53	4	studied	study	VERB
ajema-8175	53	5	femtosecond	femtosecond	NOUN
ajema-8175	53	6	laser	laser	NOUN
ajema-8175	53	7	micromachining	micromachining	NOUN
ajema-8175	53	8	of	of	ADP
ajema-8175	53	9	gaas	gaas	NOUN
ajema-8175	53	10	,	,	PUNCT
ajema-8175	53	11	reporting	report	VERB
ajema-8175	53	12	reduced	reduced	ADJ
ajema-8175	53	13	microcracking	microcracking	NOUN
ajema-8175	53	14	and	and	CCONJ
ajema-8175	53	15	improved	improved	ADJ
ajema-8175	53	16	etch	etch	NOUN
ajema-8175	53	17	selectivity	selectivity	NOUN
ajema-8175	53	18	.	.	PUNCT
ajema-8175	54	1	keller	keller	PROPN
ajema-8175	54	2	et	et	PROPN
ajema-8175	54	3	al	al	PROPN
ajema-8175	54	4	.	.	PROPN
ajema-8175	55	1	(	(	PUNCT
ajema-8175	55	2	2003	2003	NUM
ajema-8175	55	3	)	)	PUNCT
ajema-8175	55	4	optimized	optimize	VERB
ajema-8175	55	5	femtosecond	femtosecond	NOUN
ajema-8175	55	6	laser	laser	NOUN
ajema-8175	55	7	parameters	parameter	NOUN
ajema-8175	55	8	for	for	ADP
ajema-8175	55	9	polymer	polymer	NOUN
ajema-8175	55	10	micromachining	micromachining	NOUN
ajema-8175	55	11	,	,	PUNCT
ajema-8175	55	12	enabling	enable	VERB
ajema-8175	55	13	high	high	ADJ
ajema-8175	55	14	-	-	PUNCT
ajema-8175	55	15	speed	speed	NOUN
ajema-8175	55	16	structuring	structuring	NOUN
ajema-8175	55	17	with	with	ADP
ajema-8175	55	18	sub	sub	ADJ
ajema-8175	55	19	-	-	ADJ
ajema-8175	55	20	micron	micron	ADJ
ajema-8175	55	21	accuracy	accuracy	NOUN
ajema-8175	55	22	.	.	PUNCT
ajema-8175	56	1	these	these	DET
ajema-8175	56	2	studies	study	NOUN
ajema-8175	56	3	establish	establish	VERB
ajema-8175	56	4	the	the	DET
ajema-8175	56	5	foundational	foundational	ADJ
ajema-8175	56	6	capabilities	capability	NOUN
ajema-8175	56	7	of	of	ADP
ajema-8175	56	8	femtosecond	femtosecond	NOUN
ajema-8175	56	9	lasers	laser	NOUN
ajema-8175	56	10	in	in	ADP
ajema-8175	56	11	electronic	electronic	ADJ
ajema-8175	56	12	material	material	NOUN
ajema-8175	56	13	processing	processing	NOUN
ajema-8175	56	14	and	and	CCONJ
ajema-8175	56	15	highlight	highlight	VERB
ajema-8175	56	16	their	their	PRON
ajema-8175	56	17	superiority	superiority	NOUN
ajema-8175	56	18	over	over	ADP
ajema-8175	56	19	longer	long	ADJ
ajema-8175	56	20	pulse	pulse	NOUN
ajema-8175	56	21	-	-	PUNCT
ajema-8175	56	22	duration	duration	NOUN
ajema-8175	56	23	lasers	laser	NOUN
ajema-8175	56	24	.	.	PUNCT
ajema-8175	57	1	3	3	X
ajema-8175	57	2	.	.	X
ajema-8175	57	3	limitations	limitation	NOUN
ajema-8175	57	4	in	in	ADP
ajema-8175	57	5	current	current	ADJ
ajema-8175	57	6	system	system	NOUN
ajema-8175	57	7	designs	design	NOUN
ajema-8175	57	8	despite	despite	SCONJ
ajema-8175	57	9	their	their	PRON
ajema-8175	57	10	advantages	advantage	NOUN
ajema-8175	57	11	,	,	PUNCT
ajema-8175	57	12	current	current	ADJ
ajema-8175	57	13	ultrafast	ultrafast	ADJ
ajema-8175	57	14	laser	laser	NOUN
ajema-8175	57	15	micromachining	micromachine	VERB
ajema-8175	57	16	systems	system	NOUN
ajema-8175	57	17	face	face	VERB
ajema-8175	57	18	several	several	ADJ
ajema-8175	57	19	limitations	limitation	NOUN
ajema-8175	57	20	:	:	PUNCT
ajema-8175	57	21	pulse	pulse	NOUN
ajema-8175	57	22	energy	energy	NOUN
ajema-8175	57	23	stability	stability	NOUN
ajema-8175	57	24	is	be	AUX
ajema-8175	57	25	critical	critical	ADJ
ajema-8175	57	26	for	for	ADP
ajema-8175	57	27	consistent	consistent	ADJ
ajema-8175	57	28	ablation	ablation	NOUN
ajema-8175	57	29	quality	quality	NOUN
ajema-8175	57	30	.	.	PUNCT
ajema-8175	58	1	fluctuations	fluctuation	NOUN
ajema-8175	58	2	lead	lead	VERB
ajema-8175	58	3	to	to	ADP
ajema-8175	58	4	variation	variation	NOUN
ajema-8175	58	5	in	in	ADP
ajema-8175	58	6	ablation	ablation	NOUN
ajema-8175	58	7	depth	depth	NOUN
ajema-8175	58	8	and	and	CCONJ
ajema-8175	58	9	feature	feature	NOUN
ajema-8175	58	10	morphology	morphology	NOUN
ajema-8175	58	11	,	,	PUNCT
ajema-8175	58	12	degrading	degrade	VERB
ajema-8175	58	13	precision	precision	NOUN
ajema-8175	58	14	.	.	PUNCT
ajema-8175	59	1	68	68	NUM
ajema-8175	59	2	journal	journal	NOUN
ajema-8175	59	3	of	of	ADP
ajema-8175	59	4	engineering	engineering	NOUN
ajema-8175	59	5	,	,	PUNCT
ajema-8175	59	6	mechanics	mechanic	NOUN
ajema-8175	59	7	and	and	CCONJ
ajema-8175	59	8	architecture	architecture	NOUN
ajema-8175	59	9	www	www	NOUN
ajema-8175	59	10	.	.	PUNCT
ajema-8175	60	1	grnjournal.us	grnjournal.us	X
ajema-8175	60	2	beam	beam	NOUN
ajema-8175	60	3	delivery	delivery	NOUN
ajema-8175	60	4	challenges	challenge	NOUN
ajema-8175	60	5	,	,	PUNCT
ajema-8175	60	6	including	include	VERB
ajema-8175	60	7	dispersion	dispersion	NOUN
ajema-8175	60	8	management	management	NOUN
ajema-8175	60	9	and	and	CCONJ
ajema-8175	60	10	focus	focus	VERB
ajema-8175	60	11	optimization	optimization	NOUN
ajema-8175	60	12	,	,	PUNCT
ajema-8175	60	13	affect	affect	VERB
ajema-8175	60	14	energy	energy	NOUN
ajema-8175	60	15	deposition	deposition	NOUN
ajema-8175	60	16	and	and	CCONJ
ajema-8175	60	17	machining	machining	NOUN
ajema-8175	60	18	accuracy	accuracy	NOUN
ajema-8175	60	19	,	,	PUNCT
ajema-8175	60	20	especially	especially	ADV
ajema-8175	60	21	in	in	ADP
ajema-8175	60	22	complex	complex	ADJ
ajema-8175	60	23	geometries	geometry	NOUN
ajema-8175	60	24	.	.	PUNCT
ajema-8175	61	1	thermal	thermal	ADJ
ajema-8175	61	2	management	management	NOUN
ajema-8175	61	3	,	,	PUNCT
ajema-8175	61	4	although	although	SCONJ
ajema-8175	61	5	reduced	reduce	VERB
ajema-8175	61	6	compared	compare	VERB
ajema-8175	61	7	to	to	ADP
ajema-8175	61	8	longer	long	ADJ
ajema-8175	61	9	pulse	pulse	NOUN
ajema-8175	61	10	systems	system	NOUN
ajema-8175	61	11	,	,	PUNCT
ajema-8175	61	12	remains	remain	VERB
ajema-8175	61	13	relevant	relevant	ADJ
ajema-8175	61	14	at	at	ADP
ajema-8175	61	15	high	high	ADJ
ajema-8175	61	16	repetition	repetition	NOUN
ajema-8175	61	17	rates	rate	NOUN
ajema-8175	61	18	due	due	ADJ
ajema-8175	61	19	to	to	ADP
ajema-8175	61	20	cumulative	cumulative	ADJ
ajema-8175	61	21	heating	heating	NOUN
ajema-8175	61	22	,	,	PUNCT
ajema-8175	61	23	which	which	PRON
ajema-8175	61	24	can	can	AUX
ajema-8175	61	25	affect	affect	VERB
ajema-8175	61	26	the	the	DET
ajema-8175	61	27	substrate	substrate	NOUN
ajema-8175	61	28	and	and	CCONJ
ajema-8175	61	29	surrounding	surround	VERB
ajema-8175	61	30	features	feature	NOUN
ajema-8175	61	31	over	over	ADP
ajema-8175	61	32	extended	extended	ADJ
ajema-8175	61	33	processing	processing	NOUN
ajema-8175	61	34	durations	duration	NOUN
ajema-8175	61	35	.	.	PUNCT
ajema-8175	62	1	addressing	address	VERB
ajema-8175	62	2	these	these	DET
ajema-8175	62	3	limitations	limitation	NOUN
ajema-8175	62	4	requires	require	VERB
ajema-8175	62	5	integrated	integrated	ADJ
ajema-8175	62	6	system	system	NOUN
ajema-8175	62	7	designs	design	NOUN
ajema-8175	62	8	incorporating	incorporate	VERB
ajema-8175	62	9	advanced	advanced	ADJ
ajema-8175	62	10	laser	laser	NOUN
ajema-8175	62	11	stabilization	stabilization	NOUN
ajema-8175	62	12	,	,	PUNCT
ajema-8175	62	13	adaptive	adaptive	ADJ
ajema-8175	62	14	beam	beam	NOUN
ajema-8175	62	15	delivery	delivery	NOUN
ajema-8175	62	16	,	,	PUNCT
ajema-8175	62	17	and	and	CCONJ
ajema-8175	62	18	effective	effective	ADJ
ajema-8175	62	19	heat	heat	NOUN
ajema-8175	62	20	dissipation	dissipation	NOUN
ajema-8175	62	21	strategies	strategy	NOUN
ajema-8175	62	22	.	.	PUNCT
ajema-8175	63	1	4	4	X
ajema-8175	63	2	.	.	X
ajema-8175	63	3	recent	recent	ADJ
ajema-8175	63	4	trends	trend	NOUN
ajema-8175	63	5	in	in	ADP
ajema-8175	63	6	laser	laser	NOUN
ajema-8175	63	7	micromachining	micromachine	VERB
ajema-8175	63	8	for	for	ADP
ajema-8175	63	9	electronic	electronic	ADJ
ajema-8175	63	10	materials	material	NOUN
ajema-8175	63	11	recent	recent	ADJ
ajema-8175	63	12	research	research	NOUN
ajema-8175	63	13	has	have	AUX
ajema-8175	63	14	focused	focus	VERB
ajema-8175	63	15	on	on	ADP
ajema-8175	63	16	expanding	expand	VERB
ajema-8175	63	17	the	the	DET
ajema-8175	63	18	application	application	NOUN
ajema-8175	63	19	of	of	ADP
ajema-8175	63	20	ultrafast	ultrafast	ADJ
ajema-8175	63	21	lasers	laser	NOUN
ajema-8175	63	22	to	to	PART
ajema-8175	63	23	diverse	diverse	VERB
ajema-8175	63	24	electronic	electronic	ADJ
ajema-8175	63	25	materials	material	NOUN
ajema-8175	63	26	:	:	PUNCT
ajema-8175	63	27	silicon	silicon	NOUN
ajema-8175	63	28	(	(	PUNCT
ajema-8175	63	29	si	si	ADJ
ajema-8175	63	30	):	):	PUNCT
ajema-8175	63	31	femtosecond	femtosecond	NOUN
ajema-8175	63	32	lasers	laser	NOUN
ajema-8175	63	33	have	have	AUX
ajema-8175	63	34	enabled	enable	VERB
ajema-8175	63	35	precise	precise	ADJ
ajema-8175	63	36	microvia	microvia	NOUN
ajema-8175	63	37	drilling	drilling	NOUN
ajema-8175	63	38	,	,	PUNCT
ajema-8175	63	39	wafer	wafer	NOUN
ajema-8175	63	40	dicing	dicing	NOUN
ajema-8175	63	41	,	,	PUNCT
ajema-8175	63	42	and	and	CCONJ
ajema-8175	63	43	surface	surface	NOUN
ajema-8175	63	44	texturing	texture	VERB
ajema-8175	63	45	for	for	ADP
ajema-8175	63	46	photovoltaic	photovoltaic	NOUN
ajema-8175	63	47	applications	application	NOUN
ajema-8175	63	48	with	with	ADP
ajema-8175	63	49	minimal	minimal	ADJ
ajema-8175	63	50	microcracks	microcrack	NOUN
ajema-8175	63	51	and	and	CCONJ
ajema-8175	63	52	debris	debris	NOUN
ajema-8175	63	53	.	.	PUNCT
ajema-8175	64	1	gallium	gallium	NOUN
ajema-8175	64	2	arsenide	arsenide	NOUN
ajema-8175	64	3	(	(	PUNCT
ajema-8175	64	4	gaas	gaas	NOUN
ajema-8175	64	5	):	):	PUNCT
ajema-8175	64	6	advanced	advanced	ADJ
ajema-8175	64	7	studies	study	NOUN
ajema-8175	64	8	have	have	AUX
ajema-8175	64	9	demonstrated	demonstrate	VERB
ajema-8175	64	10	femtosecond	femtosecond	NOUN
ajema-8175	64	11	micromachining	micromachine	VERB
ajema-8175	64	12	for	for	ADP
ajema-8175	64	13	photonic	photonic	ADJ
ajema-8175	64	14	devices	device	NOUN
ajema-8175	64	15	,	,	PUNCT
ajema-8175	64	16	benefiting	benefit	VERB
ajema-8175	64	17	from	from	ADP
ajema-8175	64	18	reduced	reduced	ADJ
ajema-8175	64	19	thermal	thermal	ADJ
ajema-8175	64	20	damage	damage	NOUN
ajema-8175	64	21	compared	compare	VERB
ajema-8175	64	22	to	to	ADP
ajema-8175	64	23	nanosecond	nanosecond	NOUN
ajema-8175	64	24	lasers	laser	NOUN
ajema-8175	64	25	.	.	PUNCT
ajema-8175	65	1	polymers	polymer	NOUN
ajema-8175	65	2	:	:	PUNCT
ajema-8175	65	3	ultrafast	ultrafast	ADJ
ajema-8175	65	4	lasers	laser	NOUN
ajema-8175	65	5	are	be	AUX
ajema-8175	65	6	widely	widely	ADV
ajema-8175	65	7	used	use	VERB
ajema-8175	65	8	for	for	ADP
ajema-8175	65	9	flexible	flexible	ADJ
ajema-8175	65	10	electronics	electronic	NOUN
ajema-8175	65	11	,	,	PUNCT
ajema-8175	65	12	enabling	enable	VERB
ajema-8175	65	13	clean	clean	ADJ
ajema-8175	65	14	micropatterning	micropatterning	NOUN
ajema-8175	65	15	of	of	ADP
ajema-8175	65	16	substrates	substrate	NOUN
ajema-8175	65	17	such	such	ADJ
ajema-8175	65	18	as	as	ADP
ajema-8175	65	19	polyimide	polyimide	NOUN
ajema-8175	65	20	and	and	CCONJ
ajema-8175	65	21	pet	pet	VERB
ajema-8175	65	22	with	with	ADP
ajema-8175	65	23	high	high	ADJ
ajema-8175	65	24	resolution	resolution	NOUN
ajema-8175	65	25	and	and	CCONJ
ajema-8175	65	26	low	low	ADJ
ajema-8175	65	27	debris	debris	NOUN
ajema-8175	65	28	formation	formation	NOUN
ajema-8175	65	29	.	.	PUNCT
ajema-8175	66	1	emerging	emerge	VERB
ajema-8175	66	2	approaches	approach	NOUN
ajema-8175	66	3	include	include	VERB
ajema-8175	66	4	burst	burst	VERB
ajema-8175	66	5	-	-	PUNCT
ajema-8175	66	6	mode	mode	NOUN
ajema-8175	66	7	femtosecond	femtosecond	NOUN
ajema-8175	66	8	lasers	laser	NOUN
ajema-8175	66	9	for	for	ADP
ajema-8175	66	10	higher	high	ADJ
ajema-8175	66	11	material	material	NOUN
ajema-8175	66	12	removal	removal	NOUN
ajema-8175	66	13	rates	rate	NOUN
ajema-8175	66	14	,	,	PUNCT
ajema-8175	66	15	adaptive	adaptive	ADJ
ajema-8175	66	16	optics	optic	NOUN
ajema-8175	66	17	for	for	ADP
ajema-8175	66	18	dynamic	dynamic	ADJ
ajema-8175	66	19	focus	focus	NOUN
ajema-8175	66	20	control	control	NOUN
ajema-8175	66	21	,	,	PUNCT
ajema-8175	66	22	and	and	CCONJ
ajema-8175	66	23	hybrid	hybrid	ADJ
ajema-8175	66	24	systems	system	NOUN
ajema-8175	66	25	combining	combine	VERB
ajema-8175	66	26	ultrafast	ultrafast	ADJ
ajema-8175	66	27	lasers	laser	NOUN
ajema-8175	66	28	with	with	ADP
ajema-8175	66	29	precision	precision	NOUN
ajema-8175	66	30	positioning	positioning	NOUN
ajema-8175	66	31	platforms	platform	NOUN
ajema-8175	66	32	for	for	ADP
ajema-8175	66	33	enhanced	enhanced	ADJ
ajema-8175	66	34	throughput	throughput	NOUN
ajema-8175	66	35	and	and	CCONJ
ajema-8175	66	36	feature	feature	NOUN
ajema-8175	66	37	complexity	complexity	NOUN
ajema-8175	66	38	.	.	PUNCT
ajema-8175	67	1	methodology	methodology	NOUN
ajema-8175	67	2	1	1	X
ajema-8175	67	3	.	.	PUNCT
ajema-8175	67	4	system	system	NOUN
ajema-8175	67	5	design	design	VERB
ajema-8175	67	6	1.1	1.1	NUM
ajema-8175	67	7	laser	laser	NOUN
ajema-8175	67	8	source	source	NOUN
ajema-8175	67	9	selection	selection	NOUN
ajema-8175	67	10	the	the	DET
ajema-8175	67	11	design	design	NOUN
ajema-8175	67	12	of	of	ADP
ajema-8175	67	13	an	an	DET
ajema-8175	67	14	effective	effective	ADJ
ajema-8175	67	15	ultrafast	ultrafast	ADJ
ajema-8175	67	16	pulsed	pulse	VERB
ajema-8175	67	17	laser	laser	NOUN
ajema-8175	67	18	system	system	NOUN
ajema-8175	67	19	for	for	ADP
ajema-8175	67	20	precision	precision	NOUN
ajema-8175	67	21	micromachining	micromachine	VERB
ajema-8175	67	22	in	in	ADP
ajema-8175	67	23	electronic	electronic	ADJ
ajema-8175	67	24	materials	material	NOUN
ajema-8175	67	25	begins	begin	VERB
ajema-8175	67	26	with	with	ADP
ajema-8175	67	27	careful	careful	ADJ
ajema-8175	67	28	selection	selection	NOUN
ajema-8175	67	29	of	of	ADP
ajema-8175	67	30	the	the	DET
ajema-8175	67	31	laser	laser	NOUN
ajema-8175	67	32	source	source	NOUN
ajema-8175	67	33	parameters	parameter	NOUN
ajema-8175	67	34	:	:	PUNCT
ajema-8175	67	35	wavelength	wavelength	NOUN
ajema-8175	67	36	:	:	PUNCT
ajema-8175	67	37	the	the	DET
ajema-8175	67	38	choice	choice	NOUN
ajema-8175	67	39	of	of	ADP
ajema-8175	67	40	wavelength	wavelength	NOUN
ajema-8175	67	41	determines	determine	VERB
ajema-8175	67	42	material	material	NOUN
ajema-8175	67	43	absorption	absorption	NOUN
ajema-8175	67	44	efficiency	efficiency	NOUN
ajema-8175	67	45	and	and	CCONJ
ajema-8175	67	46	processing	processing	NOUN
ajema-8175	67	47	resolution	resolution	NOUN
ajema-8175	67	48	.	.	PUNCT
ajema-8175	68	1	for	for	ADP
ajema-8175	68	2	electronic	electronic	ADJ
ajema-8175	68	3	materials	material	NOUN
ajema-8175	68	4	such	such	ADJ
ajema-8175	68	5	as	as	ADP
ajema-8175	68	6	silicon	silicon	NOUN
ajema-8175	68	7	and	and	CCONJ
ajema-8175	68	8	gaas	gaas	NOUN
ajema-8175	68	9	,	,	PUNCT
ajema-8175	68	10	near	near	ADV
ajema-8175	68	11	-	-	PUNCT
ajema-8175	68	12	infrared	infrared	ADJ
ajema-8175	68	13	wavelengths	wavelength	NOUN
ajema-8175	68	14	(	(	PUNCT
ajema-8175	68	15	e.g.	e.g.	ADV
ajema-8175	68	16	,	,	PUNCT
ajema-8175	68	17	1030	1030	NUM
ajema-8175	68	18	nm	nm	ADV
ajema-8175	68	19	yb	yb	PROPN
ajema-8175	68	20	-	-	PUNCT
ajema-8175	68	21	doped	dope	VERB
ajema-8175	68	22	systems	system	NOUN
ajema-8175	68	23	or	or	CCONJ
ajema-8175	68	24	800	800	NUM
ajema-8175	68	25	nm	nm	ADJ
ajema-8175	68	26	ti\:sapphire	ti\:sapphire	PROPN
ajema-8175	68	27	lasers	laser	NOUN
ajema-8175	68	28	)	)	PUNCT
ajema-8175	68	29	are	be	AUX
ajema-8175	68	30	widely	widely	ADV
ajema-8175	68	31	used	use	VERB
ajema-8175	68	32	due	due	ADP
ajema-8175	68	33	to	to	ADP
ajema-8175	68	34	their	their	PRON
ajema-8175	68	35	balance	balance	NOUN
ajema-8175	68	36	between	between	ADP
ajema-8175	68	37	penetration	penetration	NOUN
ajema-8175	68	38	depth	depth	NOUN
ajema-8175	68	39	and	and	CCONJ
ajema-8175	68	40	nonlinear	nonlinear	ADJ
ajema-8175	68	41	absorption	absorption	NOUN
ajema-8175	68	42	efficiency	efficiency	NOUN
ajema-8175	68	43	.	.	PUNCT
ajema-8175	69	1	for	for	ADP
ajema-8175	69	2	polymer	polymer	NOUN
ajema-8175	69	3	materials	material	NOUN
ajema-8175	69	4	,	,	PUNCT
ajema-8175	69	5	ultraviolet	ultraviolet	ADJ
ajema-8175	69	6	femtosecond	femtosecond	NOUN
ajema-8175	69	7	lasers	laser	NOUN
ajema-8175	69	8	(	(	PUNCT
ajema-8175	69	9	\~343	\~343	PROPN
ajema-8175	69	10	nm	nm	PROPN
ajema-8175	69	11	via	via	ADP
ajema-8175	69	12	frequency	frequency	NOUN
ajema-8175	69	13	tripling	tripling	NOUN
ajema-8175	69	14	)	)	PUNCT
ajema-8175	69	15	provide	provide	VERB
ajema-8175	69	16	enhanced	enhanced	ADJ
ajema-8175	69	17	surface	surface	NOUN
ajema-8175	69	18	absorption	absorption	NOUN
ajema-8175	69	19	and	and	CCONJ
ajema-8175	69	20	smaller	small	ADJ
ajema-8175	69	21	feature	feature	NOUN
ajema-8175	69	22	sizes	size	NOUN
ajema-8175	69	23	.	.	PUNCT
ajema-8175	70	1	pulse	pulse	NOUN
ajema-8175	70	2	duration	duration	NOUN
ajema-8175	70	3	:	:	PUNCT
ajema-8175	70	4	femtosecond	femtosecond	NOUN
ajema-8175	70	5	lasers	laser	NOUN
ajema-8175	70	6	(	(	PUNCT
ajema-8175	70	7	typically	typically	ADV
ajema-8175	70	8	100–300	100–300	NUM
ajema-8175	70	9	fs	f	NOUN
ajema-8175	70	10	)	)	PUNCT
ajema-8175	70	11	are	be	AUX
ajema-8175	70	12	preferred	prefer	VERB
ajema-8175	70	13	for	for	ADP
ajema-8175	70	14	minimizing	minimize	VERB
ajema-8175	70	15	thermal	thermal	ADJ
ajema-8175	70	16	effects	effect	NOUN
ajema-8175	70	17	due	due	ADJ
ajema-8175	70	18	to	to	ADP
ajema-8175	70	19	their	their	PRON
ajema-8175	70	20	extremely	extremely	ADV
ajema-8175	70	21	short	short	ADJ
ajema-8175	70	22	energy	energy	NOUN
ajema-8175	70	23	deposition	deposition	NOUN
ajema-8175	70	24	timescales	timescale	NOUN
ajema-8175	70	25	,	,	PUNCT
ajema-8175	70	26	enabling	enable	VERB
ajema-8175	70	27	cold	cold	ADJ
ajema-8175	70	28	ablation	ablation	NOUN
ajema-8175	70	29	with	with	ADP
ajema-8175	70	30	minimal	minimal	ADJ
ajema-8175	70	31	heat	heat	NOUN
ajema-8175	70	32	-	-	PUNCT
ajema-8175	70	33	affected	affect	VERB
ajema-8175	70	34	zones	zone	NOUN
ajema-8175	70	35	.	.	PUNCT
ajema-8175	71	1	picosecond	picosecond	NOUN
ajema-8175	71	2	lasers	laser	NOUN
ajema-8175	71	3	may	may	AUX
ajema-8175	71	4	be	be	AUX
ajema-8175	71	5	considered	consider	VERB
ajema-8175	71	6	for	for	ADP
ajema-8175	71	7	applications	application	NOUN
ajema-8175	71	8	where	where	SCONJ
ajema-8175	71	9	slightly	slightly	ADV
ajema-8175	71	10	higher	high	ADJ
ajema-8175	71	11	thermal	thermal	ADJ
ajema-8175	71	12	coupling	coupling	NOUN
ajema-8175	71	13	is	be	AUX
ajema-8175	71	14	acceptable	acceptable	ADJ
ajema-8175	71	15	with	with	ADP
ajema-8175	71	16	increased	increase	VERB
ajema-8175	71	17	material	material	NOUN
ajema-8175	71	18	removal	removal	NOUN
ajema-8175	71	19	rates	rate	NOUN
ajema-8175	71	20	.	.	PUNCT
ajema-8175	72	1	repetition	repetition	NOUN
ajema-8175	72	2	rate	rate	NOUN
ajema-8175	72	3	:	:	PUNCT
ajema-8175	72	4	high	high	ADJ
ajema-8175	72	5	repetition	repetition	NOUN
ajema-8175	72	6	rates	rate	NOUN
ajema-8175	72	7	(	(	PUNCT
ajema-8175	72	8	ranging	range	VERB
ajema-8175	72	9	from	from	ADP
ajema-8175	72	10	100	100	NUM
ajema-8175	72	11	khz	khz	NOUN
ajema-8175	72	12	to	to	ADP
ajema-8175	72	13	several	several	ADJ
ajema-8175	72	14	mhz	mhz	NOUN
ajema-8175	72	15	)	)	PUNCT
ajema-8175	72	16	enable	enable	VERB
ajema-8175	72	17	faster	fast	ADJ
ajema-8175	72	18	processing	processing	NOUN
ajema-8175	72	19	throughput	throughput	NOUN
ajema-8175	72	20	.	.	PUNCT
ajema-8175	73	1	however	however	ADV
ajema-8175	73	2	,	,	PUNCT
ajema-8175	73	3	thermal	thermal	ADJ
ajema-8175	73	4	accumulation	accumulation	NOUN
ajema-8175	73	5	must	must	AUX
ajema-8175	73	6	be	be	AUX
ajema-8175	73	7	considered	consider	VERB
ajema-8175	73	8	to	to	PART
ajema-8175	73	9	avoid	avoid	VERB
ajema-8175	73	10	heat	heat	NOUN
ajema-8175	73	11	buildup	buildup	NOUN
ajema-8175	73	12	in	in	ADP
ajema-8175	73	13	sensitive	sensitive	ADJ
ajema-8175	73	14	electronic	electronic	ADJ
ajema-8175	73	15	materials	material	NOUN
ajema-8175	73	16	.	.	PUNCT
ajema-8175	74	1	pulse	pulse	NOUN
ajema-8175	74	2	energy	energy	NOUN
ajema-8175	74	3	:	:	PUNCT
ajema-8175	74	4	the	the	DET
ajema-8175	74	5	pulse	pulse	NOUN
ajema-8175	74	6	energy	energy	NOUN
ajema-8175	74	7	should	should	AUX
ajema-8175	74	8	exceed	exceed	VERB
ajema-8175	74	9	the	the	DET
ajema-8175	74	10	material	material	NOUN
ajema-8175	74	11	ablation	ablation	NOUN
ajema-8175	74	12	threshold	threshold	NOUN
ajema-8175	74	13	while	while	SCONJ
ajema-8175	74	14	maintaining	maintain	VERB
ajema-8175	74	15	control	control	NOUN
ajema-8175	74	16	over	over	ADP
ajema-8175	74	17	feature	feature	NOUN
ajema-8175	74	18	dimensions	dimension	NOUN
ajema-8175	74	19	.	.	PUNCT
ajema-8175	75	1	for	for	ADP
ajema-8175	75	2	micromachining	micromachine	VERB
ajema-8175	75	3	,	,	PUNCT
ajema-8175	75	4	pulse	pulse	NOUN
ajema-8175	75	5	energies	energy	NOUN
ajema-8175	75	6	in	in	ADP
ajema-8175	75	7	the	the	DET
ajema-8175	75	8	microjoule	microjoule	NOUN
ajema-8175	75	9	to	to	PART
ajema-8175	75	10	millijoule	millijoule	VERB
ajema-8175	75	11	range	range	NOUN
ajema-8175	75	12	are	be	AUX
ajema-8175	75	13	typical	typical	ADJ
ajema-8175	75	14	,	,	PUNCT
ajema-8175	75	15	with	with	ADP
ajema-8175	75	16	optimal	optimal	ADJ
ajema-8175	75	17	values	value	NOUN
ajema-8175	75	18	determined	determine	VERB
ajema-8175	75	19	based	base	VERB
ajema-8175	75	20	on	on	ADP
ajema-8175	75	21	ablation	ablation	NOUN
ajema-8175	75	22	efficiency	efficiency	NOUN
ajema-8175	75	23	,	,	PUNCT
ajema-8175	75	24	precision	precision	NOUN
ajema-8175	75	25	requirements	requirement	NOUN
ajema-8175	75	26	,	,	PUNCT
ajema-8175	75	27	and	and	CCONJ
ajema-8175	75	28	laser	laser	NOUN
ajema-8175	75	29	damage	damage	NOUN
ajema-8175	75	30	thresholds	threshold	NOUN
ajema-8175	75	31	of	of	ADP
ajema-8175	75	32	the	the	DET
ajema-8175	75	33	target	target	NOUN
ajema-8175	75	34	materials	material	NOUN
ajema-8175	75	35	.	.	PUNCT
ajema-8175	76	1	1.2	1.2	NUM
ajema-8175	76	2	beam	beam	NOUN
ajema-8175	76	3	delivery	delivery	NOUN
ajema-8175	76	4	system	system	NOUN
ajema-8175	76	5	the	the	DET
ajema-8175	76	6	beam	beam	NOUN
ajema-8175	76	7	delivery	delivery	NOUN
ajema-8175	76	8	system	system	NOUN
ajema-8175	76	9	governs	govern	VERB
ajema-8175	76	10	spatial	spatial	ADJ
ajema-8175	76	11	precision	precision	NOUN
ajema-8175	76	12	,	,	PUNCT
ajema-8175	76	13	scanning	scan	VERB
ajema-8175	76	14	flexibility	flexibility	NOUN
ajema-8175	76	15	,	,	PUNCT
ajema-8175	76	16	and	and	CCONJ
ajema-8175	76	17	overall	overall	ADJ
ajema-8175	76	18	machining	machining	NOUN
ajema-8175	76	19	quality	quality	NOUN
ajema-8175	76	20	:	:	PUNCT
ajema-8175	76	21	69	69	NUM
ajema-8175	76	22	journal	journal	NOUN
ajema-8175	76	23	of	of	ADP
ajema-8175	76	24	engineering	engineering	NOUN
ajema-8175	76	25	,	,	PUNCT
ajema-8175	76	26	mechanics	mechanic	NOUN
ajema-8175	76	27	and	and	CCONJ
ajema-8175	76	28	architecture	architecture	NOUN
ajema-8175	76	29	www	www	NOUN
ajema-8175	76	30	.	.	PUNCT
ajema-8175	77	1	grnjournal.us	grnjournal.us	X
ajema-8175	77	2	focusing	focus	VERB
ajema-8175	77	3	optics	optic	NOUN
ajema-8175	77	4	:	:	PUNCT
ajema-8175	77	5	high	high	ADJ
ajema-8175	77	6	-	-	PUNCT
ajema-8175	77	7	numerical	numerical	NOUN
ajema-8175	77	8	-	-	PUNCT
ajema-8175	77	9	aperture	aperture	NOUN
ajema-8175	77	10	(	(	PUNCT
ajema-8175	77	11	na	na	NOUN
ajema-8175	77	12	)	)	PUNCT
ajema-8175	77	13	objectives	objective	NOUN
ajema-8175	77	14	or	or	CCONJ
ajema-8175	77	15	f	f	X
ajema-8175	77	16	-	-	PUNCT
ajema-8175	77	17	theta	theta	ADJ
ajema-8175	77	18	scanning	scanning	NOUN
ajema-8175	77	19	lenses	lense	NOUN
ajema-8175	77	20	are	be	AUX
ajema-8175	77	21	utilized	utilize	VERB
ajema-8175	77	22	to	to	PART
ajema-8175	77	23	achieve	achieve	VERB
ajema-8175	77	24	tight	tight	ADJ
ajema-8175	77	25	focal	focal	ADJ
ajema-8175	77	26	spots	spot	NOUN
ajema-8175	77	27	,	,	PUNCT
ajema-8175	77	28	enhancing	enhance	VERB
ajema-8175	77	29	resolution	resolution	NOUN
ajema-8175	77	30	and	and	CCONJ
ajema-8175	77	31	ablation	ablation	NOUN
ajema-8175	77	32	efficiency	efficiency	NOUN
ajema-8175	77	33	.	.	PUNCT
ajema-8175	78	1	chromatic	chromatic	ADJ
ajema-8175	78	2	dispersion	dispersion	NOUN
ajema-8175	78	3	compensation	compensation	NOUN
ajema-8175	78	4	is	be	AUX
ajema-8175	78	5	integrated	integrate	VERB
ajema-8175	78	6	to	to	PART
ajema-8175	78	7	maintain	maintain	VERB
ajema-8175	78	8	ultrashort	ultrashort	NOUN
ajema-8175	78	9	pulse	pulse	NOUN
ajema-8175	78	10	durations	duration	NOUN
ajema-8175	78	11	at	at	ADP
ajema-8175	78	12	the	the	DET
ajema-8175	78	13	focus	focus	NOUN
ajema-8175	78	14	.	.	PUNCT
ajema-8175	79	1	galvanometric	galvanometric	ADJ
ajema-8175	79	2	scanners	scanner	NOUN
ajema-8175	79	3	:	:	PUNCT
ajema-8175	79	4	for	for	ADP
ajema-8175	79	5	high	high	ADJ
ajema-8175	79	6	-	-	PUNCT
ajema-8175	79	7	speed	speed	NOUN
ajema-8175	79	8	scanning	scanning	NOUN
ajema-8175	79	9	and	and	CCONJ
ajema-8175	79	10	patterning	pattern	VERB
ajema-8175	79	11	,	,	PUNCT
ajema-8175	79	12	galvo	galvo	NOUN
ajema-8175	79	13	mirrors	mirror	NOUN
ajema-8175	79	14	are	be	AUX
ajema-8175	79	15	employed	employ	VERB
ajema-8175	79	16	to	to	PART
ajema-8175	79	17	direct	direct	VERB
ajema-8175	79	18	the	the	DET
ajema-8175	79	19	laser	laser	NOUN
ajema-8175	79	20	beam	beam	NOUN
ajema-8175	79	21	with	with	ADP
ajema-8175	79	22	microsecond	microsecond	ADJ
ajema-8175	79	23	response	response	NOUN
ajema-8175	79	24	times	time	NOUN
ajema-8175	79	25	,	,	PUNCT
ajema-8175	79	26	suitable	suitable	ADJ
ajema-8175	79	27	for	for	ADP
ajema-8175	79	28	complex	complex	ADJ
ajema-8175	79	29	2d	2d	NUM
ajema-8175	79	30	structuring	structuring	NOUN
ajema-8175	79	31	.	.	PUNCT
ajema-8175	80	1	precision	precision	NOUN
ajema-8175	80	2	stages	stage	NOUN
ajema-8175	80	3	:	:	PUNCT
ajema-8175	80	4	for	for	ADP
ajema-8175	80	5	applications	application	NOUN
ajema-8175	80	6	requiring	require	VERB
ajema-8175	80	7	high	high	ADJ
ajema-8175	80	8	positional	positional	ADJ
ajema-8175	80	9	accuracy	accuracy	NOUN
ajema-8175	80	10	,	,	PUNCT
ajema-8175	80	11	such	such	ADJ
ajema-8175	80	12	as	as	ADP
ajema-8175	80	13	microvia	microvia	NOUN
ajema-8175	80	14	drilling	drill	VERB
ajema-8175	80	15	or	or	CCONJ
ajema-8175	80	16	wafer	wafer	VERB
ajema-8175	80	17	scribing	scribing	NOUN
ajema-8175	80	18	,	,	PUNCT
ajema-8175	80	19	motorized	motorize	VERB
ajema-8175	80	20	linear	linear	NOUN
ajema-8175	80	21	stages	stage	NOUN
ajema-8175	80	22	with	with	ADP
ajema-8175	80	23	nanometer	nanometer	NOUN
ajema-8175	80	24	resolution	resolution	NOUN
ajema-8175	80	25	are	be	AUX
ajema-8175	80	26	used	use	VERB
ajema-8175	80	27	.	.	PUNCT
ajema-8175	81	1	combining	combine	VERB
ajema-8175	81	2	galvo	galvo	NOUN
ajema-8175	81	3	scanners	scanner	NOUN
ajema-8175	81	4	with	with	ADP
ajema-8175	81	5	precision	precision	NOUN
ajema-8175	81	6	stages	stage	NOUN
ajema-8175	81	7	enables	enable	VERB
ajema-8175	81	8	both	both	PRON
ajema-8175	81	9	speed	speed	NOUN
ajema-8175	81	10	and	and	CCONJ
ajema-8175	81	11	accuracy	accuracy	NOUN
ajema-8175	81	12	over	over	ADP
ajema-8175	81	13	large	large	ADJ
ajema-8175	81	14	work	work	NOUN
ajema-8175	81	15	areas	area	NOUN
ajema-8175	81	16	.	.	PUNCT
ajema-8175	82	1	1.3	1.3	NUM
ajema-8175	82	2	control	control	NOUN
ajema-8175	82	3	systems	system	NOUN
ajema-8175	82	4	robust	robust	ADJ
ajema-8175	82	5	control	control	NOUN
ajema-8175	82	6	systems	system	NOUN
ajema-8175	82	7	ensure	ensure	VERB
ajema-8175	82	8	operational	operational	ADJ
ajema-8175	82	9	stability	stability	NOUN
ajema-8175	82	10	and	and	CCONJ
ajema-8175	82	11	process	process	NOUN
ajema-8175	82	12	reproducibility	reproducibility	NOUN
ajema-8175	82	13	:	:	PUNCT
ajema-8175	82	14	synchronization	synchronization	NOUN
ajema-8175	82	15	:	:	PUNCT
ajema-8175	82	16	precise	precise	ADJ
ajema-8175	82	17	timing	timing	NOUN
ajema-8175	82	18	control	control	NOUN
ajema-8175	82	19	between	between	ADP
ajema-8175	82	20	the	the	DET
ajema-8175	82	21	laser	laser	NOUN
ajema-8175	82	22	pulses	pulse	NOUN
ajema-8175	82	23	,	,	PUNCT
ajema-8175	82	24	scanning	scan	VERB
ajema-8175	82	25	system	system	NOUN
ajema-8175	82	26	,	,	PUNCT
ajema-8175	82	27	and	and	CCONJ
ajema-8175	82	28	sample	sample	NOUN
ajema-8175	82	29	movement	movement	NOUN
ajema-8175	82	30	is	be	AUX
ajema-8175	82	31	essential	essential	ADJ
ajema-8175	82	32	to	to	PART
ajema-8175	82	33	achieve	achieve	VERB
ajema-8175	82	34	uniform	uniform	ADJ
ajema-8175	82	35	feature	feature	NOUN
ajema-8175	82	36	spacing	space	VERB
ajema-8175	82	37	and	and	CCONJ
ajema-8175	82	38	desired	desire	VERB
ajema-8175	82	39	pattern	pattern	NOUN
ajema-8175	82	40	geometries	geometry	NOUN
ajema-8175	82	41	.	.	PUNCT
ajema-8175	83	1	software	software	NOUN
ajema-8175	83	2	control	control	NOUN
ajema-8175	83	3	:	:	PUNCT
ajema-8175	83	4	integrated	integrate	VERB
ajema-8175	83	5	software	software	NOUN
ajema-8175	83	6	platforms	platform	NOUN
ajema-8175	83	7	manage	manage	VERB
ajema-8175	83	8	laser	laser	NOUN
ajema-8175	83	9	parameters	parameter	NOUN
ajema-8175	83	10	,	,	PUNCT
ajema-8175	83	11	scanning	scan	VERB
ajema-8175	83	12	patterns	pattern	NOUN
ajema-8175	83	13	,	,	PUNCT
ajema-8175	83	14	processing	processing	NOUN
ajema-8175	83	15	speeds	speed	NOUN
ajema-8175	83	16	,	,	PUNCT
ajema-8175	83	17	and	and	CCONJ
ajema-8175	83	18	adaptive	adaptive	ADJ
ajema-8175	83	19	path	path	NOUN
ajema-8175	83	20	planning	planning	NOUN
ajema-8175	83	21	,	,	PUNCT
ajema-8175	83	22	enabling	enable	VERB
ajema-8175	83	23	automated	automate	VERB
ajema-8175	83	24	and	and	CCONJ
ajema-8175	83	25	customizable	customizable	ADJ
ajema-8175	83	26	micromachining	micromachine	VERB
ajema-8175	83	27	protocols	protocol	NOUN
ajema-8175	83	28	.	.	PUNCT
ajema-8175	84	1	real	real	ADJ
ajema-8175	84	2	-	-	PUNCT
ajema-8175	84	3	time	time	NOUN
ajema-8175	84	4	monitoring	monitoring	NOUN
ajema-8175	84	5	integration	integration	NOUN
ajema-8175	84	6	:	:	PUNCT
ajema-8175	84	7	incorporating	incorporate	VERB
ajema-8175	84	8	real	real	ADJ
ajema-8175	84	9	-	-	PUNCT
ajema-8175	84	10	time	time	NOUN
ajema-8175	84	11	monitoring	monitoring	NOUN
ajema-8175	84	12	systems	system	NOUN
ajema-8175	84	13	such	such	ADJ
ajema-8175	84	14	as	as	ADP
ajema-8175	84	15	optical	optical	ADJ
ajema-8175	84	16	coherence	coherence	NOUN
ajema-8175	84	17	tomography	tomography	NOUN
ajema-8175	84	18	(	(	PUNCT
ajema-8175	84	19	oct	oct	PROPN
ajema-8175	84	20	)	)	PUNCT
ajema-8175	84	21	,	,	PUNCT
ajema-8175	84	22	inline	inline	NOUN
ajema-8175	84	23	cameras	camera	NOUN
ajema-8175	84	24	,	,	PUNCT
ajema-8175	84	25	or	or	CCONJ
ajema-8175	84	26	scatterometry	scatterometry	NOUN
ajema-8175	84	27	sensors	sensor	NOUN
ajema-8175	84	28	provides	provide	VERB
ajema-8175	84	29	immediate	immediate	ADJ
ajema-8175	84	30	feedback	feedback	NOUN
ajema-8175	84	31	on	on	ADP
ajema-8175	84	32	ablation	ablation	NOUN
ajema-8175	84	33	depth	depth	NOUN
ajema-8175	84	34	,	,	PUNCT
ajema-8175	84	35	feature	feature	NOUN
ajema-8175	84	36	dimensions	dimension	NOUN
ajema-8175	84	37	,	,	PUNCT
ajema-8175	84	38	and	and	CCONJ
ajema-8175	84	39	process	process	NOUN
ajema-8175	84	40	quality	quality	NOUN
ajema-8175	84	41	,	,	PUNCT
ajema-8175	84	42	allowing	allow	VERB
ajema-8175	84	43	for	for	ADP
ajema-8175	84	44	closed	closed	ADJ
ajema-8175	84	45	-	-	PUNCT
ajema-8175	84	46	loop	loop	NOUN
ajema-8175	84	47	control	control	NOUN
ajema-8175	84	48	and	and	CCONJ
ajema-8175	84	49	dynamic	dynamic	ADJ
ajema-8175	84	50	adjustments	adjustment	NOUN
ajema-8175	84	51	during	during	ADP
ajema-8175	84	52	fabrication	fabrication	NOUN
ajema-8175	84	53	.	.	PUNCT
ajema-8175	85	1	theoretical	theoretical	ADJ
ajema-8175	85	2	modeling	modeling	NOUN
ajema-8175	85	3	1	1	NUM
ajema-8175	85	4	.	.	PUNCT
ajema-8175	85	5	ablation	ablation	NOUN
ajema-8175	85	6	threshold	threshold	NOUN
ajema-8175	85	7	calculations	calculation	NOUN
ajema-8175	85	8	for	for	ADP
ajema-8175	85	9	electronic	electronic	ADJ
ajema-8175	85	10	materials	material	NOUN
ajema-8175	85	11	accurate	accurate	ADJ
ajema-8175	85	12	determination	determination	NOUN
ajema-8175	85	13	of	of	ADP
ajema-8175	85	14	the	the	DET
ajema-8175	85	15	ablation	ablation	NOUN
ajema-8175	85	16	threshold	threshold	NOUN
ajema-8175	85	17	is	be	AUX
ajema-8175	85	18	fundamental	fundamental	ADJ
ajema-8175	85	19	for	for	ADP
ajema-8175	85	20	effective	effective	ADJ
ajema-8175	85	21	ultrafast	ultrafast	ADJ
ajema-8175	85	22	laser	laser	NOUN
ajema-8175	85	23	micromachining	micromachining	NOUN
ajema-8175	85	24	.	.	PUNCT
ajema-8175	86	1	the	the	DET
ajema-8175	86	2	ablation	ablation	NOUN
ajema-8175	86	3	threshold	threshold	NOUN
ajema-8175	86	4	fluence	fluence	NOUN
ajema-8175	86	5	(	(	PUNCT
ajema-8175	86	6	f	f	X
ajema-8175	86	7	<	<	X
ajema-8175	86	8	sub	sub	ADJ
ajema-8175	86	9	>	>	X
ajema-8175	86	10	th</sub	th</sub	NOUN
ajema-8175	86	11	>	>	X
ajema-8175	86	12	)	)	PUNCT
ajema-8175	86	13	is	be	AUX
ajema-8175	86	14	the	the	DET
ajema-8175	86	15	minimum	minimum	ADJ
ajema-8175	86	16	energy	energy	NOUN
ajema-8175	86	17	per	per	ADP
ajema-8175	86	18	unit	unit	NOUN
ajema-8175	86	19	area	area	NOUN
ajema-8175	86	20	required	require	VERB
ajema-8175	86	21	to	to	PART
ajema-8175	86	22	initiate	initiate	VERB
ajema-8175	86	23	material	material	NOUN
ajema-8175	86	24	removal	removal	NOUN
ajema-8175	86	25	.	.	PUNCT
ajema-8175	87	1	it	it	PRON
ajema-8175	87	2	can	can	AUX
ajema-8175	87	3	be	be	AUX
ajema-8175	87	4	calculated	calculate	VERB
ajema-8175	87	5	using	use	VERB
ajema-8175	87	6	:	:	PUNCT
ajema-8175	87	7	fth	fth	NOUN
ajema-8175	87	8	=	=	NOUN
ajema-8175	87	9	πr02eth	πr02eth	NUM
ajema-8175	87	10	where	where	SCONJ
ajema-8175	87	11	:	:	PUNCT
ajema-8175	87	12	➢	➢	PROPN
ajema-8175	87	13	ethe_{th}eth	ethe_{th}eth	PROPN
ajema-8175	87	14	is	be	AUX
ajema-8175	87	15	the	the	DET
ajema-8175	87	16	threshold	threshold	NOUN
ajema-8175	87	17	pulse	pulse	NOUN
ajema-8175	87	18	energy	energy	NOUN
ajema-8175	87	19	,	,	PUNCT
ajema-8175	88	1	➢	➢	X
ajema-8175	88	2	r0r_0r0	r0r_0r0	NOUN
ajema-8175	88	3	is	be	AUX
ajema-8175	88	4	the	the	DET
ajema-8175	88	5	beam	beam	NOUN
ajema-8175	88	6	radius	radius	NOUN
ajema-8175	88	7	at	at	ADP
ajema-8175	88	8	1	1	NUM
ajema-8175	88	9	/	/	SYM
ajema-8175	88	10	e	e	NOUN
ajema-8175	88	11	<	<	X
ajema-8175	88	12	sup>2</sup	sup>2</sup	PRON
ajema-8175	88	13	>	>	X
ajema-8175	88	14	intensity	intensity	NOUN
ajema-8175	88	15	.	.	PUNCT
ajema-8175	89	1	for	for	ADP
ajema-8175	89	2	femtosecond	femtosecond	NOUN
ajema-8175	89	3	pulses	pulse	NOUN
ajema-8175	89	4	,	,	PUNCT
ajema-8175	89	5	multiphoton	multiphoton	VERB
ajema-8175	89	6	ionization	ionization	NOUN
ajema-8175	89	7	and	and	CCONJ
ajema-8175	89	8	avalanche	avalanche	PROPN
ajema-8175	89	9	ionization	ionization	NOUN
ajema-8175	89	10	dominate	dominate	NOUN
ajema-8175	89	11	,	,	PUNCT
ajema-8175	89	12	leading	lead	VERB
ajema-8175	89	13	to	to	ADP
ajema-8175	89	14	lower	low	ADJ
ajema-8175	89	15	thresholds	threshold	NOUN
ajema-8175	89	16	compared	compare	VERB
ajema-8175	89	17	to	to	ADP
ajema-8175	89	18	longer	long	ADJ
ajema-8175	89	19	pulses	pulse	NOUN
ajema-8175	89	20	.	.	PUNCT
ajema-8175	90	1	literature	literature	NOUN
ajema-8175	90	2	-	-	PUNCT
ajema-8175	90	3	reported	report	VERB
ajema-8175	90	4	ablation	ablation	NOUN
ajema-8175	90	5	thresholds	threshold	NOUN
ajema-8175	90	6	include	include	VERB
ajema-8175	90	7	\~0.2–0.4	\~0.2–0.4	ADP
ajema-8175	90	8	j	j	PROPN
ajema-8175	90	9	/	/	SYM
ajema-8175	90	10	cm²	cm²	NOUN
ajema-8175	90	11	for	for	ADP
ajema-8175	90	12	silicon	silicon	NOUN
ajema-8175	90	13	and	and	CCONJ
ajema-8175	90	14	\~0.1–0.3	\~0.1–0.3	PROPN
ajema-8175	90	15	j	j	PROPN
ajema-8175	90	16	/	/	SYM
ajema-8175	90	17	cm²	cm²	NOUN
ajema-8175	90	18	for	for	ADP
ajema-8175	90	19	gaas	gaas	NOUN
ajema-8175	90	20	under	under	ADP
ajema-8175	90	21	near	near	ADV
ajema-8175	90	22	-	-	PUNCT
ajema-8175	90	23	infrared	infrare	VERB
ajema-8175	90	24	femtosecond	femtosecond	NOUN
ajema-8175	90	25	irradiation	irradiation	NOUN
ajema-8175	90	26	,	,	PUNCT
ajema-8175	90	27	depending	depend	VERB
ajema-8175	90	28	on	on	ADP
ajema-8175	90	29	wavelength	wavelength	NOUN
ajema-8175	90	30	,	,	PUNCT
ajema-8175	90	31	pulse	pulse	NOUN
ajema-8175	90	32	duration	duration	NOUN
ajema-8175	90	33	,	,	PUNCT
ajema-8175	90	34	and	and	CCONJ
ajema-8175	90	35	focusing	focus	VERB
ajema-8175	90	36	conditions	condition	NOUN
ajema-8175	90	37	.	.	PUNCT
ajema-8175	91	1	the	the	DET
ajema-8175	91	2	logarithmic	logarithmic	ADJ
ajema-8175	91	3	dependence	dependence	NOUN
ajema-8175	91	4	of	of	ADP
ajema-8175	91	5	ablation	ablation	NOUN
ajema-8175	91	6	diameter	diameter	NOUN
ajema-8175	91	7	(	(	PUNCT
ajema-8175	91	8	d	d	NOUN
ajema-8175	91	9	)	)	PUNCT
ajema-8175	91	10	on	on	ADP
ajema-8175	91	11	fluence	fluence	NOUN
ajema-8175	91	12	(	(	PUNCT
ajema-8175	91	13	f	f	X
ajema-8175	91	14	)	)	PUNCT
ajema-8175	91	15	is	be	AUX
ajema-8175	91	16	given	give	VERB
ajema-8175	91	17	by	by	ADP
ajema-8175	91	18	:	:	PUNCT
ajema-8175	91	19	d2=2r02ln(fthf	d2=2r02ln(fthf	NOUN
ajema-8175	91	20	this	this	DET
ajema-8175	91	21	relation	relation	NOUN
ajema-8175	91	22	enables	enable	VERB
ajema-8175	91	23	precise	precise	ADJ
ajema-8175	91	24	control	control	NOUN
ajema-8175	91	25	of	of	ADP
ajema-8175	91	26	feature	feature	NOUN
ajema-8175	91	27	sizes	size	NOUN
ajema-8175	91	28	by	by	ADP
ajema-8175	91	29	adjusting	adjust	VERB
ajema-8175	91	30	fluence	fluence	NOUN
ajema-8175	91	31	near	near	ADP
ajema-8175	91	32	the	the	DET
ajema-8175	91	33	ablation	ablation	NOUN
ajema-8175	91	34	threshold	threshold	NOUN
ajema-8175	91	35	.	.	PUNCT
ajema-8175	92	1	2	2	X
ajema-8175	92	2	.	.	X
ajema-8175	92	3	heat	heat	NOUN
ajema-8175	92	4	-	-	PUNCT
ajema-8175	92	5	affected	affect	VERB
ajema-8175	92	6	zone	zone	NOUN
ajema-8175	92	7	modeling	modeling	NOUN
ajema-8175	92	8	using	use	VERB
ajema-8175	92	9	thermal	thermal	ADJ
ajema-8175	92	10	diffusion	diffusion	NOUN
ajema-8175	92	11	equations	equation	NOUN
ajema-8175	92	12	although	although	SCONJ
ajema-8175	92	13	ultrafast	ultrafast	ADJ
ajema-8175	92	14	pulses	pulse	NOUN
ajema-8175	92	15	minimize	minimize	VERB
ajema-8175	92	16	thermal	thermal	ADJ
ajema-8175	92	17	effects	effect	NOUN
ajema-8175	92	18	,	,	PUNCT
ajema-8175	92	19	cumulative	cumulative	ADJ
ajema-8175	92	20	heating	heating	NOUN
ajema-8175	92	21	at	at	ADP
ajema-8175	92	22	high	high	ADJ
ajema-8175	92	23	repetition	repetition	NOUN
ajema-8175	92	24	rates	rate	NOUN
ajema-8175	92	25	necessitates	necessitate	VERB
ajema-8175	92	26	modeling	modeling	NOUN
ajema-8175	92	27	of	of	ADP
ajema-8175	92	28	thermal	thermal	ADJ
ajema-8175	92	29	diffusion	diffusion	NOUN
ajema-8175	92	30	to	to	PART
ajema-8175	92	31	predict	predict	VERB
ajema-8175	92	32	the	the	DET
ajema-8175	92	33	heat	heat	NOUN
ajema-8175	92	34	-	-	PUNCT
ajema-8175	92	35	affected	affect	VERB
ajema-8175	92	36	zone	zone	NOUN
ajema-8175	92	37	(	(	PUNCT
ajema-8175	92	38	haz	haz	PROPN
ajema-8175	92	39	)	)	PUNCT
ajema-8175	92	40	.	.	PUNCT
ajema-8175	93	1	the	the	DET
ajema-8175	93	2	temperature	temperature	NOUN
ajema-8175	93	3	rise	rise	NOUN
ajema-8175	93	4	(	(	PUNCT
ajema-8175	93	5	δt	δt	NOUN
ajema-8175	93	6	)	)	PUNCT
ajema-8175	93	7	from	from	ADP
ajema-8175	93	8	a	a	DET
ajema-8175	93	9	single	single	ADJ
ajema-8175	93	10	pulse	pulse	NOUN
ajema-8175	93	11	can	can	AUX
ajema-8175	93	12	be	be	AUX
ajema-8175	93	13	estimated	estimate	VERB
ajema-8175	93	14	as	as	ADP
ajema-8175	93	15	:	:	PUNCT
ajema-8175	93	16	δt=	δt=	ADJ
ajema-8175	93	17	f(1−r	f(1−r	NOUN
ajema-8175	93	18	)	)	PUNCT
ajema-8175	93	19	/ρcπατp	/ρcπατp	PUNCT
ajema-8175	94	1	where	where	SCONJ
ajema-8175	94	2	:	:	PUNCT
ajema-8175	94	3	➢	➢	VERB
ajema-8175	94	4	rrr	rrr	NOUN
ajema-8175	94	5	is	be	AUX
ajema-8175	94	6	reflectivity	reflectivity	NOUN
ajema-8175	94	7	,	,	PUNCT
ajema-8175	94	8	70	70	NUM
ajema-8175	94	9	journal	journal	NOUN
ajema-8175	94	10	of	of	ADP
ajema-8175	94	11	engineering	engineering	NOUN
ajema-8175	94	12	,	,	PUNCT
ajema-8175	94	13	mechanics	mechanic	NOUN
ajema-8175	94	14	and	and	CCONJ
ajema-8175	94	15	architecture	architecture	NOUN
ajema-8175	94	16	www	www	NOUN
ajema-8175	94	17	.	.	PUNCT
ajema-8175	95	1	grnjournal.us	grnjournal.us	X
ajema-8175	95	2	➢	➢	NOUN
ajema-8175	95	3	ρ\rhoρ	ρ\rhoρ	PROPN
ajema-8175	95	4	is	be	AUX
ajema-8175	95	5	density	density	NOUN
ajema-8175	95	6	,	,	PUNCT
ajema-8175	95	7	➢	➢	NOUN
ajema-8175	95	8	ccc	ccc	PROPN
ajema-8175	95	9	is	be	AUX
ajema-8175	95	10	specific	specific	ADJ
ajema-8175	95	11	heat	heat	NOUN
ajema-8175	95	12	capacity	capacity	NOUN
ajema-8175	95	13	,	,	PUNCT
ajema-8175	95	14	➢	➢	VERB
ajema-8175	95	15	α\alphaα	α\alphaα	NOUN
ajema-8175	95	16	is	be	AUX
ajema-8175	95	17	thermal	thermal	ADJ
ajema-8175	95	18	diffusivity	diffusivity	NOUN
ajema-8175	95	19	,	,	PUNCT
ajema-8175	95	20	➢	➢	NOUN
ajema-8175	95	21	τp\tau_pτp	τp\tau_pτp	PROPN
ajema-8175	95	22	is	be	AUX
ajema-8175	95	23	pulse	pulse	NOUN
ajema-8175	95	24	duration	duration	NOUN
ajema-8175	95	25	.	.	PUNCT
ajema-8175	96	1	for	for	ADP
ajema-8175	96	2	femtosecond	femtosecond	NOUN
ajema-8175	96	3	pulses	pulse	NOUN
ajema-8175	96	4	,	,	PUNCT
ajema-8175	96	5	since	since	SCONJ
ajema-8175	96	6	\tau_p	\tau_p	NUM
ajema-8175	96	7	is	be	AUX
ajema-8175	96	8	much	much	ADV
ajema-8175	96	9	smaller	small	ADJ
ajema-8175	96	10	than	than	ADP
ajema-8175	96	11	the	the	DET
ajema-8175	96	12	electron	electron	NOUN
ajema-8175	96	13	-	-	PUNCT
ajema-8175	96	14	phonon	phonon	NOUN
ajema-8175	96	15	relaxation	relaxation	NOUN
ajema-8175	96	16	time	time	NOUN
ajema-8175	96	17	,	,	PUNCT
ajema-8175	96	18	initial	initial	ADJ
ajema-8175	96	19	heating	heating	NOUN
ajema-8175	96	20	is	be	AUX
ajema-8175	96	21	confined	confine	VERB
ajema-8175	96	22	to	to	ADP
ajema-8175	96	23	the	the	DET
ajema-8175	96	24	electron	electron	NOUN
ajema-8175	96	25	system	system	NOUN
ajema-8175	96	26	,	,	PUNCT
ajema-8175	96	27	followed	follow	VERB
ajema-8175	96	28	by	by	ADP
ajema-8175	96	29	energy	energy	NOUN
ajema-8175	96	30	transfer	transfer	NOUN
ajema-8175	96	31	to	to	ADP
ajema-8175	96	32	the	the	DET
ajema-8175	96	33	lattice	lattice	NOUN
ajema-8175	96	34	on	on	ADP
ajema-8175	96	35	a	a	DET
ajema-8175	96	36	picosecond	picosecond	NOUN
ajema-8175	96	37	timescale	timescale	NOUN
ajema-8175	96	38	.	.	PUNCT
ajema-8175	97	1	consequently	consequently	ADV
ajema-8175	97	2	,	,	PUNCT
ajema-8175	97	3	thermal	thermal	ADJ
ajema-8175	97	4	diffusion	diffusion	NOUN
ajema-8175	97	5	lengths	length	NOUN
ajema-8175	97	6	remain	remain	VERB
ajema-8175	97	7	in	in	ADP
ajema-8175	97	8	the	the	DET
ajema-8175	97	9	nanometer	nanometer	NOUN
ajema-8175	97	10	range	range	NOUN
ajema-8175	97	11	,	,	PUNCT
ajema-8175	97	12	resulting	result	VERB
ajema-8175	97	13	in	in	ADP
ajema-8175	97	14	minimal	minimal	ADJ
ajema-8175	97	15	haz	haz	PROPN
ajema-8175	97	16	.	.	PUNCT
ajema-8175	98	1	however	however	ADV
ajema-8175	98	2	,	,	PUNCT
ajema-8175	98	3	thermal	thermal	ADJ
ajema-8175	98	4	accumulation	accumulation	NOUN
ajema-8175	98	5	can	can	AUX
ajema-8175	98	6	occur	occur	VERB
ajema-8175	98	7	if	if	SCONJ
ajema-8175	98	8	the	the	DET
ajema-8175	98	9	pulse	pulse	NOUN
ajema-8175	98	10	repetition	repetition	NOUN
ajema-8175	98	11	period	period	NOUN
ajema-8175	98	12	is	be	AUX
ajema-8175	98	13	shorter	short	ADJ
ajema-8175	98	14	than	than	ADP
ajema-8175	98	15	the	the	DET
ajema-8175	98	16	thermal	thermal	ADJ
ajema-8175	98	17	relaxation	relaxation	NOUN
ajema-8175	98	18	time	time	NOUN
ajema-8175	98	19	,	,	PUNCT
ajema-8175	98	20	leading	lead	VERB
ajema-8175	98	21	to	to	ADP
ajema-8175	98	22	gradual	gradual	ADJ
ajema-8175	98	23	substrate	substrate	NOUN
ajema-8175	98	24	heating	heating	NOUN
ajema-8175	98	25	.	.	PUNCT
ajema-8175	99	1	modeling	model	VERB
ajema-8175	99	2	this	this	DET
ajema-8175	99	3	accumulation	accumulation	NOUN
ajema-8175	99	4	is	be	AUX
ajema-8175	99	5	critical	critical	ADJ
ajema-8175	99	6	for	for	ADP
ajema-8175	99	7	defining	define	VERB
ajema-8175	99	8	optimal	optimal	ADJ
ajema-8175	99	9	repetition	repetition	NOUN
ajema-8175	99	10	rates	rate	NOUN
ajema-8175	99	11	to	to	PART
ajema-8175	99	12	avoid	avoid	VERB
ajema-8175	99	13	damage	damage	NOUN
ajema-8175	99	14	to	to	ADP
ajema-8175	99	15	surrounding	surround	VERB
ajema-8175	99	16	electronic	electronic	ADJ
ajema-8175	99	17	structures	structure	NOUN
ajema-8175	99	18	.	.	PUNCT
ajema-8175	100	1	3	3	X
ajema-8175	100	2	.	.	NOUN
ajema-8175	100	3	spot	spot	NOUN
ajema-8175	100	4	size	size	NOUN
ajema-8175	100	5	and	and	CCONJ
ajema-8175	100	6	fluence	fluence	NOUN
ajema-8175	100	7	optimization	optimization	NOUN
ajema-8175	100	8	optimizing	optimize	VERB
ajema-8175	100	9	the	the	DET
ajema-8175	100	10	spot	spot	NOUN
ajema-8175	100	11	size	size	NOUN
ajema-8175	100	12	(	(	PUNCT
ajema-8175	100	13	beam	beam	NOUN
ajema-8175	100	14	waist	waist	NOUN
ajema-8175	100	15	)	)	PUNCT
ajema-8175	100	16	and	and	CCONJ
ajema-8175	100	17	fluence	fluence	NOUN
ajema-8175	100	18	is	be	AUX
ajema-8175	100	19	essential	essential	ADJ
ajema-8175	100	20	to	to	PART
ajema-8175	100	21	balance	balance	VERB
ajema-8175	100	22	precision	precision	NOUN
ajema-8175	100	23	with	with	ADP
ajema-8175	100	24	processing	processing	NOUN
ajema-8175	100	25	speed	speed	NOUN
ajema-8175	100	26	:	:	PUNCT
ajema-8175	100	27	smaller	small	ADJ
ajema-8175	100	28	spot	spot	NOUN
ajema-8175	100	29	sizes	size	NOUN
ajema-8175	100	30	(	(	PUNCT
ajema-8175	100	31	achieved	achieve	VERB
ajema-8175	100	32	via	via	ADP
ajema-8175	100	33	higher	high	ADJ
ajema-8175	100	34	na	na	ADP
ajema-8175	100	35	optics	optic	NOUN
ajema-8175	100	36	)	)	PUNCT
ajema-8175	100	37	yield	yield	VERB
ajema-8175	100	38	higher	high	ADJ
ajema-8175	100	39	intensities	intensity	NOUN
ajema-8175	100	40	and	and	CCONJ
ajema-8175	100	41	smaller	small	ADJ
ajema-8175	100	42	feature	feature	NOUN
ajema-8175	100	43	sizes	size	NOUN
ajema-8175	100	44	,	,	PUNCT
ajema-8175	100	45	enabling	enable	VERB
ajema-8175	100	46	fine	fine	ADJ
ajema-8175	100	47	micromachining	micromachining	NOUN
ajema-8175	100	48	but	but	CCONJ
ajema-8175	100	49	with	with	ADP
ajema-8175	100	50	limited	limited	ADJ
ajema-8175	100	51	throughput	throughput	NOUN
ajema-8175	100	52	due	due	ADP
ajema-8175	100	53	to	to	ADP
ajema-8175	100	54	reduced	reduced	ADJ
ajema-8175	100	55	ablation	ablation	NOUN
ajema-8175	100	56	volumes	volume	NOUN
ajema-8175	100	57	.	.	PUNCT
ajema-8175	101	1	larger	large	ADJ
ajema-8175	101	2	spot	spot	NOUN
ajema-8175	101	3	sizes	size	NOUN
ajema-8175	101	4	increase	increase	VERB
ajema-8175	101	5	processing	processing	NOUN
ajema-8175	101	6	speed	speed	NOUN
ajema-8175	101	7	but	but	CCONJ
ajema-8175	101	8	may	may	AUX
ajema-8175	101	9	compromise	compromise	VERB
ajema-8175	101	10	resolution	resolution	NOUN
ajema-8175	101	11	due	due	ADP
ajema-8175	101	12	to	to	ADP
ajema-8175	101	13	broader	broad	ADJ
ajema-8175	101	14	energy	energy	NOUN
ajema-8175	101	15	distribution	distribution	NOUN
ajema-8175	101	16	and	and	CCONJ
ajema-8175	101	17	reduced	reduced	ADJ
ajema-8175	101	18	fluence	fluence	NOUN
ajema-8175	101	19	if	if	SCONJ
ajema-8175	101	20	pulse	pulse	NOUN
ajema-8175	101	21	energy	energy	NOUN
ajema-8175	101	22	remains	remain	VERB
ajema-8175	101	23	constant	constant	ADJ
ajema-8175	101	24	.	.	PUNCT
ajema-8175	102	1	the	the	DET
ajema-8175	102	2	optimal	optimal	ADJ
ajema-8175	102	3	fluence	fluence	NOUN
ajema-8175	102	4	typically	typically	ADV
ajema-8175	102	5	lies	lie	VERB
ajema-8175	102	6	slightly	slightly	ADV
ajema-8175	102	7	above	above	ADP
ajema-8175	102	8	the	the	DET
ajema-8175	102	9	ablation	ablation	NOUN
ajema-8175	102	10	threshold	threshold	NOUN
ajema-8175	102	11	to	to	PART
ajema-8175	102	12	ensure	ensure	VERB
ajema-8175	102	13	material	material	NOUN
ajema-8175	102	14	removal	removal	NOUN
ajema-8175	102	15	while	while	SCONJ
ajema-8175	102	16	minimizing	minimize	VERB
ajema-8175	102	17	collateral	collateral	ADJ
ajema-8175	102	18	effects	effect	NOUN
ajema-8175	102	19	.	.	PUNCT
ajema-8175	103	1	for	for	ADP
ajema-8175	103	2	industrial	industrial	ADJ
ajema-8175	103	3	applications	application	NOUN
ajema-8175	103	4	,	,	PUNCT
ajema-8175	103	5	operating	operate	VERB
ajema-8175	103	6	at	at	ADP
ajema-8175	103	7	2–3	2–3	NUM
ajema-8175	103	8	times	time	NOUN
ajema-8175	103	9	the	the	DET
ajema-8175	103	10	ablation	ablation	NOUN
ajema-8175	103	11	threshold	threshold	NOUN
ajema-8175	103	12	fluence	fluence	NOUN
ajema-8175	103	13	is	be	AUX
ajema-8175	103	14	common	common	ADJ
ajema-8175	103	15	to	to	PART
ajema-8175	103	16	maintain	maintain	VERB
ajema-8175	103	17	machining	machining	NOUN
ajema-8175	103	18	stability	stability	NOUN
ajema-8175	103	19	and	and	CCONJ
ajema-8175	103	20	maximize	maximize	VERB
ajema-8175	103	21	efficiency	efficiency	NOUN
ajema-8175	103	22	.	.	PUNCT
ajema-8175	104	1	trade	trade	NOUN
ajema-8175	104	2	-	-	PUNCT
ajema-8175	104	3	off	off	ADP
ajema-8175	104	4	analyses	analysis	NOUN
ajema-8175	104	5	integrating	integrate	VERB
ajema-8175	104	6	gaussian	gaussian	ADJ
ajema-8175	104	7	beam	beam	NOUN
ajema-8175	104	8	optics	optic	NOUN
ajema-8175	104	9	equations	equation	NOUN
ajema-8175	104	10	,	,	PUNCT
ajema-8175	104	11	ablation	ablation	NOUN
ajema-8175	104	12	thresholds	threshold	NOUN
ajema-8175	104	13	,	,	PUNCT
ajema-8175	104	14	and	and	CCONJ
ajema-8175	104	15	thermal	thermal	ADJ
ajema-8175	104	16	modeling	modeling	NOUN
ajema-8175	104	17	guide	guide	VERB
ajema-8175	104	18	the	the	DET
ajema-8175	104	19	selection	selection	NOUN
ajema-8175	104	20	of	of	ADP
ajema-8175	104	21	processing	processing	NOUN
ajema-8175	104	22	parameters	parameter	NOUN
ajema-8175	104	23	that	that	PRON
ajema-8175	104	24	deliver	deliver	VERB
ajema-8175	104	25	the	the	DET
ajema-8175	104	26	required	require	VERB
ajema-8175	104	27	precision	precision	NOUN
ajema-8175	104	28	while	while	SCONJ
ajema-8175	104	29	ensuring	ensure	VERB
ajema-8175	104	30	economic	economic	ADJ
ajema-8175	104	31	processing	processing	NOUN
ajema-8175	104	32	speeds	speed	NOUN
ajema-8175	104	33	for	for	ADP
ajema-8175	104	34	electronic	electronic	ADJ
ajema-8175	104	35	manufacturing	manufacturing	NOUN
ajema-8175	104	36	applications	application	NOUN
ajema-8175	104	37	.	.	PUNCT
ajema-8175	105	1	experimental	experimental	ADJ
ajema-8175	105	2	setup	setup	NOUN
ajema-8175	105	3	1	1	NUM
ajema-8175	105	4	.	.	PUNCT
ajema-8175	105	5	laser	laser	NOUN
ajema-8175	105	6	laboratory	laboratory	NOUN
ajema-8175	105	7	configuration	configuration	NOUN
ajema-8175	105	8	all	all	DET
ajema-8175	105	9	experiments	experiment	NOUN
ajema-8175	105	10	were	be	AUX
ajema-8175	105	11	conducted	conduct	VERB
ajema-8175	105	12	in	in	ADP
ajema-8175	105	13	a	a	DET
ajema-8175	105	14	controlled	control	VERB
ajema-8175	105	15	laser	laser	NOUN
ajema-8175	105	16	micromachining	micromachine	VERB
ajema-8175	105	17	laboratory	laboratory	NOUN
ajema-8175	105	18	equipped	equip	VERB
ajema-8175	105	19	with	with	ADP
ajema-8175	105	20	an	an	DET
ajema-8175	105	21	ultrafast	ultrafast	ADJ
ajema-8175	105	22	femtosecond	femtosecond	NOUN
ajema-8175	105	23	laser	laser	NOUN
ajema-8175	105	24	system	system	NOUN
ajema-8175	105	25	.	.	PUNCT
ajema-8175	106	1	the	the	DET
ajema-8175	106	2	setup	setup	NOUN
ajema-8175	106	3	consisted	consist	VERB
ajema-8175	106	4	of	of	ADP
ajema-8175	106	5	:	:	PUNCT
ajema-8175	106	6	laser	laser	NOUN
ajema-8175	106	7	source	source	NOUN
ajema-8175	106	8	:	:	PUNCT
ajema-8175	106	9	a	a	DET
ajema-8175	106	10	femtosecond	femtosecond	NOUN
ajema-8175	106	11	pulsed	pulse	VERB
ajema-8175	106	12	laser	laser	NOUN
ajema-8175	106	13	emitting	emit	VERB
ajema-8175	106	14	at	at	ADP
ajema-8175	106	15	a	a	DET
ajema-8175	106	16	central	central	ADJ
ajema-8175	106	17	wavelength	wavelength	NOUN
ajema-8175	106	18	of	of	ADP
ajema-8175	106	19	1030	1030	NUM
ajema-8175	106	20	nm	nm	NOUN
ajema-8175	106	21	,	,	PUNCT
ajema-8175	106	22	with	with	ADP
ajema-8175	106	23	a	a	DET
ajema-8175	106	24	pulse	pulse	NOUN
ajema-8175	106	25	duration	duration	NOUN
ajema-8175	106	26	of	of	ADP
ajema-8175	106	27	300	300	NUM
ajema-8175	106	28	fs	f	NOUN
ajema-8175	106	29	and	and	CCONJ
ajema-8175	106	30	tunable	tunable	ADJ
ajema-8175	106	31	repetition	repetition	NOUN
ajema-8175	106	32	rates	rate	NOUN
ajema-8175	106	33	ranging	range	VERB
ajema-8175	106	34	from	from	ADP
ajema-8175	106	35	100	100	NUM
ajema-8175	106	36	khz	khz	NOUN
ajema-8175	106	37	to	to	ADP
ajema-8175	106	38	1	1	NUM
ajema-8175	106	39	mhz	mhz	NOUN
ajema-8175	106	40	.	.	PUNCT
ajema-8175	107	1	the	the	DET
ajema-8175	107	2	pulse	pulse	NOUN
ajema-8175	107	3	energy	energy	NOUN
ajema-8175	107	4	was	be	AUX
ajema-8175	107	5	adjustable	adjustable	ADJ
ajema-8175	107	6	up	up	ADP
ajema-8175	107	7	to	to	PART
ajema-8175	107	8	500	500	NUM
ajema-8175	107	9	µj	µj	NOUN
ajema-8175	107	10	via	via	ADP
ajema-8175	107	11	integrated	integrated	ADJ
ajema-8175	107	12	attenuators	attenuator	NOUN
ajema-8175	107	13	.	.	PUNCT
ajema-8175	108	1	beam	beam	NOUN
ajema-8175	108	2	delivery	delivery	NOUN
ajema-8175	108	3	:	:	PUNCT
ajema-8175	108	4	the	the	DET
ajema-8175	108	5	laser	laser	NOUN
ajema-8175	108	6	beam	beam	NOUN
ajema-8175	108	7	was	be	AUX
ajema-8175	108	8	directed	direct	VERB
ajema-8175	108	9	through	through	ADP
ajema-8175	108	10	a	a	DET
ajema-8175	108	11	set	set	NOUN
ajema-8175	108	12	of	of	ADP
ajema-8175	108	13	high	high	ADJ
ajema-8175	108	14	-	-	PUNCT
ajema-8175	108	15	reflectivity	reflectivity	NOUN
ajema-8175	108	16	mirrors	mirror	NOUN
ajema-8175	108	17	into	into	ADP
ajema-8175	108	18	a	a	DET
ajema-8175	108	19	galvanometric	galvanometric	ADJ
ajema-8175	108	20	scanner	scanner	NOUN
ajema-8175	108	21	equipped	equip	VERB
ajema-8175	108	22	with	with	ADP
ajema-8175	108	23	an	an	DET
ajema-8175	108	24	f	f	NOUN
ajema-8175	108	25	-	-	PUNCT
ajema-8175	108	26	theta	theta	ADJ
ajema-8175	108	27	focusing	focus	VERB
ajema-8175	108	28	lens	lens	NOUN
ajema-8175	108	29	(	(	PUNCT
ajema-8175	108	30	focal	focal	ADJ
ajema-8175	108	31	length	length	NOUN
ajema-8175	108	32	:	:	PUNCT
ajema-8175	108	33	100	100	NUM
ajema-8175	108	34	mm	mm	NOUN
ajema-8175	108	35	)	)	PUNCT
ajema-8175	108	36	for	for	ADP
ajema-8175	108	37	highspeed	highspeed	NOUN
ajema-8175	108	38	patterning	patterning	NOUN
ajema-8175	108	39	.	.	PUNCT
ajema-8175	109	1	for	for	ADP
ajema-8175	109	2	precision	precision	NOUN
ajema-8175	109	3	drilling	drilling	NOUN
ajema-8175	109	4	and	and	CCONJ
ajema-8175	109	5	static	static	ADJ
ajema-8175	109	6	ablation	ablation	NOUN
ajema-8175	109	7	tests	test	NOUN
ajema-8175	109	8	,	,	PUNCT
ajema-8175	109	9	the	the	DET
ajema-8175	109	10	beam	beam	NOUN
ajema-8175	109	11	was	be	AUX
ajema-8175	109	12	alternatively	alternatively	ADV
ajema-8175	109	13	focused	focus	VERB
ajema-8175	109	14	using	use	VERB
ajema-8175	109	15	a	a	DET
ajema-8175	109	16	microscope	microscope	NOUN
ajema-8175	109	17	objective	objective	NOUN
ajema-8175	109	18	(	(	PUNCT
ajema-8175	109	19	20×	20×	NUM
ajema-8175	109	20	,	,	PUNCT
ajema-8175	109	21	na	na	NOUN
ajema-8175	109	22	=	=	SYM
ajema-8175	109	23	0.4	0.4	NUM
ajema-8175	109	24	)	)	PUNCT
ajema-8175	109	25	mounted	mount	VERB
ajema-8175	109	26	on	on	ADP
ajema-8175	109	27	a	a	DET
ajema-8175	109	28	motorized	motorized	ADJ
ajema-8175	109	29	z	z	NOUN
ajema-8175	109	30	-	-	PUNCT
ajema-8175	109	31	stage	stage	NOUN
ajema-8175	109	32	to	to	PART
ajema-8175	109	33	adjust	adjust	VERB
ajema-8175	109	34	focal	focal	ADJ
ajema-8175	109	35	depth	depth	NOUN
ajema-8175	109	36	.	.	PUNCT
ajema-8175	110	1	sample	sample	NOUN
ajema-8175	110	2	positioning	positioning	NOUN
ajema-8175	110	3	:	:	PUNCT
ajema-8175	110	4	samples	sample	NOUN
ajema-8175	110	5	were	be	AUX
ajema-8175	110	6	mounted	mount	VERB
ajema-8175	110	7	on	on	ADP
ajema-8175	110	8	a	a	DET
ajema-8175	110	9	computer	computer	NOUN
ajema-8175	110	10	-	-	PUNCT
ajema-8175	110	11	controlled	control	VERB
ajema-8175	110	12	xy	xy	PROPN
ajema-8175	110	13	linear	linear	ADJ
ajema-8175	110	14	stage	stage	NOUN
ajema-8175	110	15	with	with	ADP
ajema-8175	110	16	a	a	DET
ajema-8175	110	17	positioning	positioning	NOUN
ajema-8175	110	18	accuracy	accuracy	NOUN
ajema-8175	110	19	of	of	ADP
ajema-8175	110	20	±0.5	±0.5	PROPN
ajema-8175	110	21	µm	µm	NOUN
ajema-8175	110	22	,	,	PUNCT
ajema-8175	110	23	synchronized	synchronize	VERB
ajema-8175	110	24	with	with	ADP
ajema-8175	110	25	the	the	DET
ajema-8175	110	26	galvo	galvo	NOUN
ajema-8175	110	27	scanner	scanner	NOUN
ajema-8175	110	28	for	for	ADP
ajema-8175	110	29	extended	extended	ADJ
ajema-8175	110	30	machining	machining	NOUN
ajema-8175	110	31	areas	area	NOUN
ajema-8175	110	32	when	when	SCONJ
ajema-8175	110	33	needed	need	VERB
ajema-8175	110	34	.	.	PUNCT
ajema-8175	111	1	control	control	NOUN
ajema-8175	111	2	system	system	PROPN
ajema-8175	111	3	:	:	PUNCT
ajema-8175	111	4	a	a	DET
ajema-8175	111	5	dedicated	dedicated	ADJ
ajema-8175	111	6	software	software	NOUN
ajema-8175	111	7	platform	platform	NOUN
ajema-8175	111	8	integrated	integrate	VERB
ajema-8175	111	9	laser	laser	NOUN
ajema-8175	111	10	parameter	parameter	NOUN
ajema-8175	111	11	control	control	NOUN
ajema-8175	111	12	,	,	PUNCT
ajema-8175	111	13	scanning	scan	VERB
ajema-8175	111	14	path	path	NOUN
ajema-8175	111	15	programming	programming	NOUN
ajema-8175	111	16	,	,	PUNCT
ajema-8175	111	17	and	and	CCONJ
ajema-8175	111	18	synchronization	synchronization	NOUN
ajema-8175	111	19	of	of	ADP
ajema-8175	111	20	all	all	DET
ajema-8175	111	21	mechanical	mechanical	ADJ
ajema-8175	111	22	components	component	NOUN
ajema-8175	111	23	to	to	PART
ajema-8175	111	24	execute	execute	VERB
ajema-8175	111	25	predefined	predefine	VERB
ajema-8175	111	26	micromachining	micromachine	VERB
ajema-8175	111	27	patterns	pattern	NOUN
ajema-8175	111	28	.	.	PUNCT
ajema-8175	112	1	71	71	NUM
ajema-8175	112	2	journal	journal	NOUN
ajema-8175	112	3	of	of	ADP
ajema-8175	112	4	engineering	engineering	NOUN
ajema-8175	112	5	,	,	PUNCT
ajema-8175	112	6	mechanics	mechanic	NOUN
ajema-8175	112	7	and	and	CCONJ
ajema-8175	112	8	architecture	architecture	NOUN
ajema-8175	112	9	www	www	NOUN
ajema-8175	112	10	.	.	PUNCT
ajema-8175	113	1	grnjournal.us	grnjournal.us	X
ajema-8175	113	2	2	2	NUM
ajema-8175	113	3	.	.	PUNCT
ajema-8175	113	4	materials	material	NOUN
ajema-8175	113	5	three	three	NUM
ajema-8175	113	6	categories	category	NOUN
ajema-8175	113	7	of	of	ADP
ajema-8175	113	8	electronic	electronic	ADJ
ajema-8175	113	9	materials	material	NOUN
ajema-8175	113	10	were	be	AUX
ajema-8175	113	11	used	use	VERB
ajema-8175	113	12	as	as	ADP
ajema-8175	113	13	substrates	substrate	NOUN
ajema-8175	113	14	for	for	ADP
ajema-8175	113	15	micromachining	micromachine	VERB
ajema-8175	113	16	experiments	experiment	NOUN
ajema-8175	113	17	:	:	PUNCT
ajema-8175	113	18	silicon	silicon	NOUN
ajema-8175	113	19	wafers	wafer	NOUN
ajema-8175	113	20	:	:	PUNCT
ajema-8175	113	21	p	p	X
ajema-8175	113	22	-	-	PUNCT
ajema-8175	113	23	type	type	NOUN
ajema-8175	113	24	(	(	PUNCT
ajema-8175	113	25	100)-oriented	100)-oriented	NUM
ajema-8175	113	26	silicon	silicon	NOUN
ajema-8175	113	27	wafers	wafer	NOUN
ajema-8175	113	28	with	with	ADP
ajema-8175	113	29	a	a	DET
ajema-8175	113	30	thickness	thickness	NOUN
ajema-8175	113	31	of	of	ADP
ajema-8175	113	32	500	500	NUM
ajema-8175	113	33	µm	µm	NOUN
ajema-8175	113	34	,	,	PUNCT
ajema-8175	113	35	widely	widely	ADV
ajema-8175	113	36	used	use	VERB
ajema-8175	113	37	in	in	ADP
ajema-8175	113	38	microelectronics	microelectronic	NOUN
ajema-8175	113	39	and	and	CCONJ
ajema-8175	113	40	mems	mem	NOUN
ajema-8175	113	41	fabrication	fabrication	NOUN
ajema-8175	113	42	.	.	PUNCT
ajema-8175	114	1	glass	glass	NOUN
ajema-8175	114	2	substrates	substrate	NOUN
ajema-8175	114	3	:	:	PUNCT
ajema-8175	114	4	borosilicate	borosilicate	ADJ
ajema-8175	114	5	glass	glass	NOUN
ajema-8175	114	6	slides	slide	NOUN
ajema-8175	114	7	with	with	ADP
ajema-8175	114	8	a	a	DET
ajema-8175	114	9	thickness	thickness	NOUN
ajema-8175	114	10	of	of	ADP
ajema-8175	114	11	1	1	NUM
ajema-8175	114	12	mm	mm	NOUN
ajema-8175	114	13	,	,	PUNCT
ajema-8175	114	14	representing	represent	VERB
ajema-8175	114	15	dielectric	dielectric	ADJ
ajema-8175	114	16	materials	material	NOUN
ajema-8175	114	17	commonly	commonly	ADV
ajema-8175	114	18	processed	process	VERB
ajema-8175	114	19	in	in	ADP
ajema-8175	114	20	micro	micro	NOUN
ajema-8175	114	21	-	-	ADJ
ajema-8175	114	22	optics	optic	NOUN
ajema-8175	114	23	and	and	CCONJ
ajema-8175	114	24	microfluidics	microfluidic	NOUN
ajema-8175	114	25	integration	integration	NOUN
ajema-8175	114	26	.	.	PUNCT
ajema-8175	115	1	thin	thin	ADJ
ajema-8175	115	2	films	film	NOUN
ajema-8175	115	3	:	:	PUNCT
ajema-8175	115	4	metal	metal	NOUN
ajema-8175	115	5	thin	thin	ADJ
ajema-8175	115	6	films	film	NOUN
ajema-8175	115	7	(	(	PUNCT
ajema-8175	115	8	e.g.	e.g.	ADV
ajema-8175	115	9	,	,	PUNCT
ajema-8175	115	10	200	200	NUM
ajema-8175	115	11	nm	nm	NOUN
ajema-8175	115	12	cr	cr	PROPN
ajema-8175	115	13	/	/	SYM
ajema-8175	115	14	au	au	NOUN
ajema-8175	115	15	layers	layer	NOUN
ajema-8175	115	16	)	)	PUNCT
ajema-8175	115	17	deposited	deposit	VERB
ajema-8175	115	18	on	on	ADP
ajema-8175	115	19	glass	glass	NOUN
ajema-8175	115	20	substrates	substrate	NOUN
ajema-8175	115	21	via	via	ADP
ajema-8175	115	22	thermal	thermal	ADJ
ajema-8175	115	23	evaporation	evaporation	NOUN
ajema-8175	115	24	,	,	PUNCT
ajema-8175	115	25	used	use	VERB
ajema-8175	115	26	to	to	PART
ajema-8175	115	27	investigate	investigate	VERB
ajema-8175	115	28	selective	selective	ADJ
ajema-8175	115	29	thin	thin	ADJ
ajema-8175	115	30	-	-	PUNCT
ajema-8175	115	31	film	film	NOUN
ajema-8175	115	32	ablation	ablation	NOUN
ajema-8175	115	33	for	for	ADP
ajema-8175	115	34	microelectronic	microelectronic	ADJ
ajema-8175	115	35	interconnect	interconnect	NOUN
ajema-8175	115	36	applications	application	NOUN
ajema-8175	115	37	.	.	PUNCT
ajema-8175	116	1	all	all	DET
ajema-8175	116	2	samples	sample	NOUN
ajema-8175	116	3	were	be	AUX
ajema-8175	116	4	cleaned	clean	VERB
ajema-8175	116	5	ultrasonically	ultrasonically	ADV
ajema-8175	116	6	in	in	ADP
ajema-8175	116	7	acetone	acetone	NOUN
ajema-8175	116	8	,	,	PUNCT
ajema-8175	116	9	isopropanol	isopropanol	NOUN
ajema-8175	116	10	,	,	PUNCT
ajema-8175	116	11	and	and	CCONJ
ajema-8175	116	12	deionized	deionize	VERB
ajema-8175	116	13	water	water	NOUN
ajema-8175	116	14	before	before	ADP
ajema-8175	116	15	laser	laser	NOUN
ajema-8175	116	16	processing	processing	NOUN
ajema-8175	116	17	to	to	PART
ajema-8175	116	18	remove	remove	VERB
ajema-8175	116	19	surface	surface	NOUN
ajema-8175	116	20	contaminants	contaminant	NOUN
ajema-8175	116	21	.	.	PUNCT
ajema-8175	117	1	3	3	X
ajema-8175	117	2	.	.	X
ajema-8175	117	3	machining	machining	NOUN
ajema-8175	117	4	parameters	parameter	NOUN
ajema-8175	117	5	varied	varied	ADJ
ajema-8175	117	6	to	to	PART
ajema-8175	117	7	investigate	investigate	VERB
ajema-8175	117	8	the	the	DET
ajema-8175	117	9	influence	influence	NOUN
ajema-8175	117	10	of	of	ADP
ajema-8175	117	11	laser	laser	NOUN
ajema-8175	117	12	parameters	parameter	NOUN
ajema-8175	117	13	on	on	ADP
ajema-8175	117	14	micromachining	micromachine	VERB
ajema-8175	117	15	performance	performance	NOUN
ajema-8175	117	16	,	,	PUNCT
ajema-8175	117	17	the	the	DET
ajema-8175	117	18	following	follow	VERB
ajema-8175	117	19	variables	variable	NOUN
ajema-8175	117	20	were	be	AUX
ajema-8175	117	21	systematically	systematically	ADV
ajema-8175	117	22	adjusted	adjust	VERB
ajema-8175	117	23	:	:	PUNCT
ajema-8175	117	24	pulse	pulse	NOUN
ajema-8175	117	25	energy	energy	NOUN
ajema-8175	117	26	:	:	PUNCT
ajema-8175	117	27	varied	varied	ADJ
ajema-8175	117	28	from	from	ADP
ajema-8175	117	29	5	5	NUM
ajema-8175	117	30	µj	µj	NOUN
ajema-8175	117	31	to	to	ADP
ajema-8175	117	32	150	150	NUM
ajema-8175	117	33	µj	µj	NOUN
ajema-8175	117	34	to	to	PART
ajema-8175	117	35	analyze	analyze	VERB
ajema-8175	117	36	ablation	ablation	NOUN
ajema-8175	117	37	threshold	threshold	NOUN
ajema-8175	117	38	,	,	PUNCT
ajema-8175	117	39	feature	feature	NOUN
ajema-8175	117	40	size	size	NOUN
ajema-8175	117	41	dependency	dependency	NOUN
ajema-8175	117	42	,	,	PUNCT
ajema-8175	117	43	and	and	CCONJ
ajema-8175	117	44	surface	surface	NOUN
ajema-8175	117	45	morphology	morphology	NOUN
ajema-8175	117	46	evolution	evolution	NOUN
ajema-8175	117	47	.	.	PUNCT
ajema-8175	118	1	repetition	repetition	NOUN
ajema-8175	118	2	rate	rate	NOUN
ajema-8175	118	3	:	:	PUNCT
ajema-8175	118	4	adjusted	adjust	VERB
ajema-8175	118	5	between	between	ADP
ajema-8175	118	6	100	100	NUM
ajema-8175	118	7	khz	khz	NOUN
ajema-8175	118	8	and	and	CCONJ
ajema-8175	118	9	500	500	NUM
ajema-8175	118	10	khz	khz	NOUN
ajema-8175	118	11	to	to	PART
ajema-8175	118	12	study	study	VERB
ajema-8175	118	13	thermal	thermal	ADJ
ajema-8175	118	14	accumulation	accumulation	NOUN
ajema-8175	118	15	effects	effect	NOUN
ajema-8175	118	16	and	and	CCONJ
ajema-8175	118	17	its	its	PRON
ajema-8175	118	18	impact	impact	NOUN
ajema-8175	118	19	on	on	ADP
ajema-8175	118	20	ablation	ablation	NOUN
ajema-8175	118	21	efficiency	efficiency	NOUN
ajema-8175	118	22	and	and	CCONJ
ajema-8175	118	23	heat	heat	NOUN
ajema-8175	118	24	-	-	PUNCT
ajema-8175	118	25	affected	affect	VERB
ajema-8175	118	26	zones	zone	NOUN
ajema-8175	118	27	.	.	PUNCT
ajema-8175	119	1	scanning	scan	VERB
ajema-8175	119	2	speed	speed	NOUN
ajema-8175	119	3	:	:	PUNCT
ajema-8175	119	4	ranged	range	VERB
ajema-8175	119	5	from	from	ADP
ajema-8175	119	6	0.1	0.1	NUM
ajema-8175	119	7	mm	mm	NOUN
ajema-8175	119	8	/	/	SYM
ajema-8175	119	9	s	s	PROPN
ajema-8175	119	10	to	to	PART
ajema-8175	119	11	10	10	NUM
ajema-8175	119	12	mm	mm	NOUN
ajema-8175	119	13	/	/	SYM
ajema-8175	119	14	s	s	PROPN
ajema-8175	119	15	to	to	PART
ajema-8175	119	16	optimize	optimize	VERB
ajema-8175	119	17	trade	trade	NOUN
ajema-8175	119	18	-	-	PUNCT
ajema-8175	119	19	offs	off	NOUN
ajema-8175	119	20	between	between	ADP
ajema-8175	119	21	ablation	ablation	NOUN
ajema-8175	119	22	depth	depth	NOUN
ajema-8175	119	23	,	,	PUNCT
ajema-8175	119	24	feature	feature	NOUN
ajema-8175	119	25	continuity	continuity	NOUN
ajema-8175	119	26	,	,	PUNCT
ajema-8175	119	27	and	and	CCONJ
ajema-8175	119	28	processing	processing	NOUN
ajema-8175	119	29	throughput	throughput	NOUN
ajema-8175	119	30	.	.	PUNCT
ajema-8175	120	1	each	each	DET
ajema-8175	120	2	parameter	parameter	NOUN
ajema-8175	120	3	set	set	NOUN
ajema-8175	120	4	was	be	AUX
ajema-8175	120	5	repeated	repeat	VERB
ajema-8175	120	6	three	three	NUM
ajema-8175	120	7	times	time	NOUN
ajema-8175	120	8	for	for	ADP
ajema-8175	120	9	statistical	statistical	ADJ
ajema-8175	120	10	reliability	reliability	NOUN
ajema-8175	120	11	.	.	PUNCT
ajema-8175	121	1	4	4	X
ajema-8175	121	2	.	.	X
ajema-8175	121	3	measurement	measurement	NOUN
ajema-8175	121	4	techniques	technique	VERB
ajema-8175	121	5	post	post	ADJ
ajema-8175	121	6	-	-	ADJ
ajema-8175	121	7	machining	machining	ADJ
ajema-8175	121	8	characterization	characterization	NOUN
ajema-8175	121	9	was	be	AUX
ajema-8175	121	10	conducted	conduct	VERB
ajema-8175	121	11	using	use	VERB
ajema-8175	121	12	the	the	DET
ajema-8175	121	13	following	follow	VERB
ajema-8175	121	14	measurement	measurement	NOUN
ajema-8175	121	15	techniques	technique	NOUN
ajema-8175	121	16	:	:	PUNCT
ajema-8175	121	17	scanning	scan	VERB
ajema-8175	121	18	electron	electron	NOUN
ajema-8175	121	19	microscopy	microscopy	NOUN
ajema-8175	121	20	(	(	PUNCT
ajema-8175	121	21	sem	sem	NOUN
ajema-8175	121	22	):	):	PUNCT
ajema-8175	121	23	used	use	VERB
ajema-8175	121	24	to	to	PART
ajema-8175	121	25	analyze	analyze	VERB
ajema-8175	121	26	surface	surface	NOUN
ajema-8175	121	27	morphology	morphology	NOUN
ajema-8175	121	28	,	,	PUNCT
ajema-8175	121	29	feature	feature	NOUN
ajema-8175	121	30	edges	edge	NOUN
ajema-8175	121	31	,	,	PUNCT
ajema-8175	121	32	microcracks	microcrack	NOUN
ajema-8175	121	33	,	,	PUNCT
ajema-8175	121	34	and	and	CCONJ
ajema-8175	121	35	debris	debris	NOUN
ajema-8175	121	36	formation	formation	NOUN
ajema-8175	121	37	at	at	ADP
ajema-8175	121	38	high	high	ADJ
ajema-8175	121	39	resolution	resolution	NOUN
ajema-8175	121	40	,	,	PUNCT
ajema-8175	121	41	providing	provide	VERB
ajema-8175	121	42	qualitative	qualitative	ADJ
ajema-8175	121	43	and	and	CCONJ
ajema-8175	121	44	quantitative	quantitative	ADJ
ajema-8175	121	45	evaluation	evaluation	NOUN
ajema-8175	121	46	of	of	ADP
ajema-8175	121	47	micromachining	micromachine	VERB
ajema-8175	121	48	quality	quality	NOUN
ajema-8175	121	49	.	.	PUNCT
ajema-8175	122	1	profilometry	profilometry	NOUN
ajema-8175	122	2	:	:	PUNCT
ajema-8175	122	3	a	a	DET
ajema-8175	122	4	contact	contact	NOUN
ajema-8175	122	5	profilometer	profilometer	NOUN
ajema-8175	122	6	was	be	AUX
ajema-8175	122	7	employed	employ	VERB
ajema-8175	122	8	to	to	PART
ajema-8175	122	9	measure	measure	VERB
ajema-8175	122	10	ablation	ablation	NOUN
ajema-8175	122	11	depths	depth	NOUN
ajema-8175	122	12	,	,	PUNCT
ajema-8175	122	13	crater	crater	NOUN
ajema-8175	122	14	profiles	profile	NOUN
ajema-8175	122	15	,	,	PUNCT
ajema-8175	122	16	and	and	CCONJ
ajema-8175	122	17	surface	surface	NOUN
ajema-8175	122	18	roughness	roughness	NOUN
ajema-8175	122	19	with	with	ADP
ajema-8175	122	20	nanometer	nanometer	NOUN
ajema-8175	122	21	vertical	vertical	ADJ
ajema-8175	122	22	resolution	resolution	NOUN
ajema-8175	122	23	.	.	PUNCT
ajema-8175	123	1	optical	optical	ADJ
ajema-8175	123	2	microscopy	microscopy	NOUN
ajema-8175	123	3	:	:	PUNCT
ajema-8175	123	4	bright	bright	ADJ
ajema-8175	123	5	-	-	PUNCT
ajema-8175	123	6	field	field	NOUN
ajema-8175	123	7	optical	optical	ADJ
ajema-8175	123	8	microscopy	microscopy	NOUN
ajema-8175	123	9	was	be	AUX
ajema-8175	123	10	used	use	VERB
ajema-8175	123	11	for	for	ADP
ajema-8175	123	12	rapid	rapid	ADJ
ajema-8175	123	13	inspection	inspection	NOUN
ajema-8175	123	14	of	of	ADP
ajema-8175	123	15	machined	machine	VERB
ajema-8175	123	16	patterns	pattern	NOUN
ajema-8175	123	17	,	,	PUNCT
ajema-8175	123	18	feature	feature	NOUN
ajema-8175	123	19	continuity	continuity	NOUN
ajema-8175	123	20	,	,	PUNCT
ajema-8175	123	21	and	and	CCONJ
ajema-8175	123	22	dimensional	dimensional	ADJ
ajema-8175	123	23	measurements	measurement	NOUN
ajema-8175	123	24	at	at	ADP
ajema-8175	123	25	lower	low	ADJ
ajema-8175	123	26	magnification	magnification	NOUN
ajema-8175	123	27	.	.	PUNCT
ajema-8175	124	1	these	these	DET
ajema-8175	124	2	complementary	complementary	ADJ
ajema-8175	124	3	techniques	technique	NOUN
ajema-8175	124	4	ensured	ensure	VERB
ajema-8175	124	5	comprehensive	comprehensive	ADJ
ajema-8175	124	6	evaluation	evaluation	NOUN
ajema-8175	124	7	of	of	ADP
ajema-8175	124	8	micromachining	micromachine	VERB
ajema-8175	124	9	performance	performance	NOUN
ajema-8175	124	10	in	in	ADP
ajema-8175	124	11	terms	term	NOUN
ajema-8175	124	12	of	of	ADP
ajema-8175	124	13	precision	precision	NOUN
ajema-8175	124	14	,	,	PUNCT
ajema-8175	124	15	depth	depth	NOUN
ajema-8175	124	16	control	control	NOUN
ajema-8175	124	17	,	,	PUNCT
ajema-8175	124	18	and	and	CCONJ
ajema-8175	124	19	collateral	collateral	ADJ
ajema-8175	124	20	thermal	thermal	ADJ
ajema-8175	124	21	effects	effect	NOUN
ajema-8175	124	22	.	.	PUNCT
ajema-8175	125	1	results	result	NOUN
ajema-8175	125	2	1	1	NUM
ajema-8175	125	3	.	.	X
ajema-8175	125	4	system	system	NOUN
ajema-8175	125	5	performance	performance	NOUN
ajema-8175	125	6	analysis	analysis	NOUN
ajema-8175	125	7	1.1	1.1	NUM
ajema-8175	125	8	stability	stability	NOUN
ajema-8175	125	9	and	and	CCONJ
ajema-8175	125	10	pulse	pulse	NOUN
ajema-8175	125	11	characterization	characterization	NOUN
ajema-8175	125	12	the	the	DET
ajema-8175	125	13	ultrafast	ultrafast	ADJ
ajema-8175	125	14	laser	laser	NOUN
ajema-8175	125	15	system	system	NOUN
ajema-8175	125	16	demonstrated	demonstrate	VERB
ajema-8175	125	17	high	high	ADJ
ajema-8175	125	18	operational	operational	ADJ
ajema-8175	125	19	stability	stability	NOUN
ajema-8175	125	20	throughout	throughout	ADP
ajema-8175	125	21	the	the	DET
ajema-8175	125	22	experimental	experimental	ADJ
ajema-8175	125	23	period	period	NOUN
ajema-8175	125	24	:	:	PUNCT
ajema-8175	125	25	pulse	pulse	NOUN
ajema-8175	125	26	energy	energy	NOUN
ajema-8175	125	27	stability	stability	NOUN
ajema-8175	125	28	:	:	PUNCT
ajema-8175	125	29	measured	measure	VERB
ajema-8175	125	30	over	over	ADP
ajema-8175	125	31	one	one	NUM
ajema-8175	125	32	hour	hour	NOUN
ajema-8175	125	33	using	use	VERB
ajema-8175	125	34	an	an	DET
ajema-8175	125	35	energy	energy	NOUN
ajema-8175	125	36	meter	meter	NOUN
ajema-8175	125	37	,	,	PUNCT
ajema-8175	125	38	showing	show	VERB
ajema-8175	125	39	fluctuations	fluctuation	NOUN
ajema-8175	125	40	within	within	ADP
ajema-8175	125	41	±2	±2	NOUN
ajema-8175	125	42	%	%	NOUN
ajema-8175	125	43	,	,	PUNCT
ajema-8175	125	44	ensuring	ensure	VERB
ajema-8175	125	45	consistent	consistent	ADJ
ajema-8175	125	46	ablation	ablation	NOUN
ajema-8175	125	47	quality	quality	NOUN
ajema-8175	125	48	.	.	PUNCT
ajema-8175	126	1	pulse	pulse	NOUN
ajema-8175	126	2	duration	duration	NOUN
ajema-8175	126	3	verification	verification	NOUN
ajema-8175	126	4	:	:	PUNCT
ajema-8175	126	5	characterized	characterize	VERB
ajema-8175	126	6	via	via	ADP
ajema-8175	126	7	autocorrelation	autocorrelation	NOUN
ajema-8175	126	8	measurements	measurement	NOUN
ajema-8175	126	9	,	,	PUNCT
ajema-8175	126	10	confirming	confirm	VERB
ajema-8175	126	11	a	a	DET
ajema-8175	126	12	fullwidth	fullwidth	NOUN
ajema-8175	126	13	at	at	ADP
ajema-8175	126	14	half	half	ADJ
ajema-8175	126	15	-	-	PUNCT
ajema-8175	126	16	maximum	maximum	ADJ
ajema-8175	126	17	(	(	PUNCT
ajema-8175	126	18	fwhm	fwhm	NOUN
ajema-8175	126	19	)	)	PUNCT
ajema-8175	126	20	pulse	pulse	NOUN
ajema-8175	126	21	duration	duration	NOUN
ajema-8175	126	22	of	of	ADP
ajema-8175	126	23	\~310	\~310	PROPN
ajema-8175	126	24	fs	fs	PROPN
ajema-8175	126	25	,	,	PUNCT
ajema-8175	126	26	closely	closely	ADV
ajema-8175	126	27	matching	matching	NOUN
ajema-8175	126	28	manufacturer	manufacturer	NOUN
ajema-8175	126	29	specifications	specification	NOUN
ajema-8175	126	30	.	.	PUNCT
ajema-8175	127	1	for	for	ADP
ajema-8175	127	2	further	further	ADJ
ajema-8175	127	3	temporal	temporal	ADJ
ajema-8175	127	4	characterization	characterization	NOUN
ajema-8175	127	5	,	,	PUNCT
ajema-8175	127	6	frequency	frequency	NOUN
ajema-8175	127	7	-	-	PUNCT
ajema-8175	127	8	resolved	resolve	VERB
ajema-8175	127	9	optical	optical	ADJ
ajema-8175	127	10	gating	gating	NOUN
ajema-8175	127	11	(	(	PUNCT
ajema-8175	127	12	frog	frog	NOUN
ajema-8175	127	13	)	)	PUNCT
ajema-8175	127	14	72	72	NUM
ajema-8175	127	15	journal	journal	NOUN
ajema-8175	127	16	of	of	ADP
ajema-8175	127	17	engineering	engineering	NOUN
ajema-8175	127	18	,	,	PUNCT
ajema-8175	127	19	mechanics	mechanic	NOUN
ajema-8175	127	20	and	and	CCONJ
ajema-8175	127	21	architecture	architecture	NOUN
ajema-8175	127	22	www	www	NOUN
ajema-8175	127	23	.	.	PUNCT
ajema-8175	128	1	grnjournal.us	grnjournal.us	X
ajema-8175	128	2	was	be	AUX
ajema-8175	128	3	performed	perform	VERB
ajema-8175	128	4	,	,	PUNCT
ajema-8175	128	5	revealing	reveal	VERB
ajema-8175	128	6	a	a	DET
ajema-8175	128	7	clean	clean	ADJ
ajema-8175	128	8	gaussian	gaussian	ADJ
ajema-8175	128	9	temporal	temporal	ADJ
ajema-8175	128	10	profile	profile	NOUN
ajema-8175	128	11	without	without	ADP
ajema-8175	128	12	satellite	satellite	NOUN
ajema-8175	128	13	pulses	pulse	NOUN
ajema-8175	128	14	or	or	CCONJ
ajema-8175	128	15	significant	significant	ADJ
ajema-8175	128	16	chirp	chirp	NOUN
ajema-8175	128	17	.	.	PUNCT
ajema-8175	129	1	spider	spider	NOUN
ajema-8175	129	2	(	(	PUNCT
ajema-8175	129	3	spectral	spectral	ADJ
ajema-8175	129	4	phase	phase	NOUN
ajema-8175	129	5	interferometry	interferometry	NOUN
ajema-8175	129	6	for	for	ADP
ajema-8175	129	7	direct	direct	ADJ
ajema-8175	129	8	electric	electric	ADJ
ajema-8175	129	9	-	-	PUNCT
ajema-8175	129	10	field	field	NOUN
ajema-8175	129	11	reconstruction	reconstruction	NOUN
ajema-8175	129	12	)	)	PUNCT
ajema-8175	129	13	measurements	measurement	NOUN
ajema-8175	129	14	were	be	AUX
ajema-8175	129	15	not	not	PART
ajema-8175	129	16	conducted	conduct	VERB
ajema-8175	129	17	in	in	ADP
ajema-8175	129	18	this	this	DET
ajema-8175	129	19	study	study	NOUN
ajema-8175	129	20	but	but	CCONJ
ajema-8175	129	21	are	be	AUX
ajema-8175	129	22	planned	plan	VERB
ajema-8175	129	23	for	for	ADP
ajema-8175	129	24	future	future	ADJ
ajema-8175	129	25	phase	phase	NOUN
ajema-8175	129	26	characterization	characterization	NOUN
ajema-8175	129	27	refinement	refinement	NOUN
ajema-8175	129	28	.	.	PUNCT
ajema-8175	130	1	these	these	DET
ajema-8175	130	2	results	result	NOUN
ajema-8175	130	3	validate	validate	VERB
ajema-8175	130	4	the	the	DET
ajema-8175	130	5	suitability	suitability	NOUN
ajema-8175	130	6	of	of	ADP
ajema-8175	130	7	the	the	DET
ajema-8175	130	8	laser	laser	NOUN
ajema-8175	130	9	system	system	NOUN
ajema-8175	130	10	for	for	ADP
ajema-8175	130	11	precision	precision	NOUN
ajema-8175	130	12	micromachining	micromachine	VERB
ajema-8175	130	13	applications	application	NOUN
ajema-8175	130	14	.	.	PUNCT
ajema-8175	131	1	2	2	X
ajema-8175	131	2	.	.	X
ajema-8175	131	3	micromachining	micromachine	VERB
ajema-8175	131	4	outcomes	outcome	NOUN
ajema-8175	131	5	2.1	2.1	NUM
ajema-8175	131	6	cut	cut	VERB
ajema-8175	131	7	quality	quality	NOUN
ajema-8175	131	8	and	and	CCONJ
ajema-8175	131	9	feature	feature	NOUN
ajema-8175	131	10	resolution	resolution	NOUN
ajema-8175	131	11	micromachining	micromachine	VERB
ajema-8175	131	12	tests	test	NOUN
ajema-8175	131	13	on	on	ADP
ajema-8175	131	14	silicon	silicon	NOUN
ajema-8175	131	15	wafers	wafer	NOUN
ajema-8175	131	16	,	,	PUNCT
ajema-8175	131	17	glass	glass	NOUN
ajema-8175	131	18	substrates	substrate	NOUN
ajema-8175	131	19	,	,	PUNCT
ajema-8175	131	20	and	and	CCONJ
ajema-8175	131	21	thin	thin	ADJ
ajema-8175	131	22	metal	metal	NOUN
ajema-8175	131	23	films	film	NOUN
ajema-8175	131	24	yielded	yield	VERB
ajema-8175	131	25	highquality	highquality	NOUN
ajema-8175	131	26	features	feature	NOUN
ajema-8175	131	27	:	:	PUNCT
ajema-8175	131	28	silicon	silicon	NOUN
ajema-8175	131	29	:	:	PUNCT
ajema-8175	131	30	clean	clean	ADJ
ajema-8175	131	31	ablation	ablation	NOUN
ajema-8175	131	32	craters	crater	NOUN
ajema-8175	131	33	and	and	CCONJ
ajema-8175	131	34	microchannels	microchannel	NOUN
ajema-8175	131	35	with	with	ADP
ajema-8175	131	36	sharp	sharp	ADJ
ajema-8175	131	37	edges	edge	NOUN
ajema-8175	131	38	were	be	AUX
ajema-8175	131	39	produced	produce	VERB
ajema-8175	131	40	.	.	PUNCT
ajema-8175	132	1	the	the	DET
ajema-8175	132	2	minimum	minimum	ADJ
ajema-8175	132	3	achievable	achievable	ADJ
ajema-8175	132	4	feature	feature	NOUN
ajema-8175	132	5	size	size	NOUN
ajema-8175	132	6	was	be	AUX
ajema-8175	132	7	\~1.5	\~1.5	PROPN
ajema-8175	132	8	µm	µm	ADP
ajema-8175	132	9	using	use	VERB
ajema-8175	132	10	high	high	ADV
ajema-8175	132	11	na	na	ADP
ajema-8175	132	12	focusing	focus	VERB
ajema-8175	132	13	under	under	ADP
ajema-8175	132	14	pulse	pulse	NOUN
ajema-8175	132	15	energies	energy	NOUN
ajema-8175	132	16	just	just	ADV
ajema-8175	132	17	above	above	ADP
ajema-8175	132	18	the	the	DET
ajema-8175	132	19	ablation	ablation	NOUN
ajema-8175	132	20	threshold	threshold	NOUN
ajema-8175	132	21	.	.	PUNCT
ajema-8175	133	1	glass	glass	NOUN
ajema-8175	133	2	:	:	PUNCT
ajema-8175	133	3	smooth	smooth	ADJ
ajema-8175	133	4	microholes	microhole	NOUN
ajema-8175	133	5	and	and	CCONJ
ajema-8175	133	6	surface	surface	NOUN
ajema-8175	133	7	structuring	structure	VERB
ajema-8175	133	8	without	without	ADP
ajema-8175	133	9	visible	visible	ADJ
ajema-8175	133	10	microcracks	microcrack	NOUN
ajema-8175	133	11	,	,	PUNCT
ajema-8175	133	12	demonstrating	demonstrate	VERB
ajema-8175	133	13	effective	effective	ADJ
ajema-8175	133	14	nonlinear	nonlinear	ADJ
ajema-8175	133	15	absorption	absorption	NOUN
ajema-8175	133	16	and	and	CCONJ
ajema-8175	133	17	minimal	minimal	ADJ
ajema-8175	133	18	collateral	collateral	ADJ
ajema-8175	133	19	damage	damage	NOUN
ajema-8175	133	20	.	.	PUNCT
ajema-8175	134	1	thin	thin	ADJ
ajema-8175	134	2	films	film	NOUN
ajema-8175	134	3	:	:	PUNCT
ajema-8175	134	4	selective	selective	ADJ
ajema-8175	134	5	ablation	ablation	NOUN
ajema-8175	134	6	of	of	ADP
ajema-8175	134	7	metal	metal	NOUN
ajema-8175	134	8	layers	layer	NOUN
ajema-8175	134	9	with	with	ADP
ajema-8175	134	10	negligible	negligible	ADJ
ajema-8175	134	11	damage	damage	NOUN
ajema-8175	134	12	to	to	ADP
ajema-8175	134	13	the	the	DET
ajema-8175	134	14	underlying	underlie	VERB
ajema-8175	134	15	glass	glass	NOUN
ajema-8175	134	16	substrate	substrate	NOUN
ajema-8175	134	17	,	,	PUNCT
ajema-8175	134	18	essential	essential	ADJ
ajema-8175	134	19	for	for	ADP
ajema-8175	134	20	microelectronic	microelectronic	ADJ
ajema-8175	134	21	interconnect	interconnect	NOUN
ajema-8175	134	22	patterning	pattern	VERB
ajema-8175	134	23	.	.	PUNCT
ajema-8175	135	1	2.2	2.2	NUM
ajema-8175	135	2	depth	depth	NOUN
ajema-8175	135	3	and	and	CCONJ
ajema-8175	135	4	width	width	ADJ
ajema-8175	135	5	measurements	measurement	NOUN
ajema-8175	135	6	at	at	ADP
ajema-8175	135	7	different	different	ADJ
ajema-8175	135	8	parameters	parameter	NOUN
ajema-8175	135	9	profilometry	profilometry	NOUN
ajema-8175	135	10	results	result	NOUN
ajema-8175	135	11	showed	show	VERB
ajema-8175	135	12	:	:	PUNCT
ajema-8175	135	13	depth	depth	NOUN
ajema-8175	135	14	:	:	PUNCT
ajema-8175	135	15	ablation	ablation	NOUN
ajema-8175	135	16	depth	depth	NOUN
ajema-8175	135	17	increased	increase	VERB
ajema-8175	135	18	linearly	linearly	ADV
ajema-8175	135	19	with	with	ADP
ajema-8175	135	20	pulse	pulse	NOUN
ajema-8175	135	21	energy	energy	NOUN
ajema-8175	135	22	up	up	ADP
ajema-8175	135	23	to	to	PART
ajema-8175	135	24	\~50	\~50	NOUN
ajema-8175	135	25	µj	µj	PROPN
ajema-8175	135	26	,	,	PUNCT
ajema-8175	135	27	beyond	beyond	ADP
ajema-8175	135	28	which	which	DET
ajema-8175	135	29	saturation	saturation	NOUN
ajema-8175	135	30	was	be	AUX
ajema-8175	135	31	observed	observe	VERB
ajema-8175	135	32	due	due	ADJ
ajema-8175	135	33	to	to	ADP
ajema-8175	135	34	plasma	plasma	NOUN
ajema-8175	135	35	shielding	shielding	NOUN
ajema-8175	135	36	effects	effect	NOUN
ajema-8175	135	37	.	.	PUNCT
ajema-8175	136	1	for	for	ADP
ajema-8175	136	2	silicon	silicon	NOUN
ajema-8175	136	3	,	,	PUNCT
ajema-8175	136	4	maximum	maximum	ADJ
ajema-8175	136	5	depths	depth	NOUN
ajema-8175	136	6	of	of	ADP
ajema-8175	136	7	\~15	\~15	NOUN
ajema-8175	136	8	µm	µm	NUM
ajema-8175	136	9	were	be	AUX
ajema-8175	136	10	achieved	achieve	VERB
ajema-8175	136	11	at	at	ADP
ajema-8175	136	12	150	150	NUM
ajema-8175	136	13	µj	µj	NOUN
ajema-8175	136	14	pulse	pulse	NOUN
ajema-8175	136	15	energy	energy	NOUN
ajema-8175	136	16	and	and	CCONJ
ajema-8175	136	17	100	100	NUM
ajema-8175	136	18	khz	khz	NOUN
ajema-8175	136	19	repetition	repetition	NOUN
ajema-8175	136	20	rate	rate	NOUN
ajema-8175	136	21	with	with	ADP
ajema-8175	136	22	multiple	multiple	ADJ
ajema-8175	136	23	scans	scan	NOUN
ajema-8175	136	24	.	.	PUNCT
ajema-8175	137	1	width	width	NOUN
ajema-8175	137	2	:	:	PUNCT
ajema-8175	137	3	feature	feature	NOUN
ajema-8175	137	4	widths	width	NOUN
ajema-8175	137	5	ranged	range	VERB
ajema-8175	137	6	from	from	ADP
ajema-8175	137	7	\~1.5	\~1.5	PROPN
ajema-8175	137	8	µm	µm	NOUN
ajema-8175	137	9	at	at	ADP
ajema-8175	137	10	lower	low	ADJ
ajema-8175	137	11	energies	energy	NOUN
ajema-8175	137	12	to	to	ADP
ajema-8175	137	13	\~5	\~5	PROPN
ajema-8175	137	14	µm	µm	X
ajema-8175	137	15	at	at	ADP
ajema-8175	137	16	higher	high	ADJ
ajema-8175	137	17	energies	energy	NOUN
ajema-8175	137	18	,	,	PUNCT
ajema-8175	137	19	correlating	correlate	VERB
ajema-8175	137	20	with	with	ADP
ajema-8175	137	21	the	the	DET
ajema-8175	137	22	logarithmic	logarithmic	ADJ
ajema-8175	137	23	fluence	fluence	NOUN
ajema-8175	137	24	-	-	PUNCT
ajema-8175	137	25	diameter	diameter	NOUN
ajema-8175	137	26	relationship	relationship	NOUN
ajema-8175	137	27	.	.	PUNCT
ajema-8175	138	1	2.3	2.3	NUM
ajema-8175	138	2	analysis	analysis	NOUN
ajema-8175	138	3	of	of	ADP
ajema-8175	138	4	redeposition	redeposition	NOUN
ajema-8175	138	5	,	,	PUNCT
ajema-8175	138	6	tapering	tapering	NOUN
ajema-8175	138	7	,	,	PUNCT
ajema-8175	138	8	and	and	CCONJ
ajema-8175	138	9	surface	surface	NOUN
ajema-8175	138	10	roughness	roughness	NOUN
ajema-8175	138	11	redeposition	redeposition	NOUN
ajema-8175	138	12	:	:	PUNCT
ajema-8175	138	13	sem	sem	PROPN
ajema-8175	138	14	imaging	imaging	NOUN
ajema-8175	138	15	revealed	reveal	VERB
ajema-8175	138	16	minimal	minimal	ADJ
ajema-8175	138	17	debris	debris	NOUN
ajema-8175	138	18	redeposition	redeposition	NOUN
ajema-8175	138	19	around	around	ADP
ajema-8175	138	20	machined	machine	VERB
ajema-8175	138	21	features	feature	NOUN
ajema-8175	138	22	at	at	ADP
ajema-8175	138	23	optimized	optimize	VERB
ajema-8175	138	24	scanning	scanning	NOUN
ajema-8175	138	25	speeds	speed	NOUN
ajema-8175	138	26	(	(	PUNCT
ajema-8175	138	27	>	>	SYM
ajema-8175	138	28	1	1	NUM
ajema-8175	138	29	mm	mm	PROPN
ajema-8175	138	30	/	/	SYM
ajema-8175	138	31	s	s	PROPN
ajema-8175	138	32	)	)	PUNCT
ajema-8175	138	33	.	.	PUNCT
ajema-8175	139	1	at	at	ADP
ajema-8175	139	2	slower	slow	ADJ
ajema-8175	139	3	scanning	scanning	NOUN
ajema-8175	139	4	speeds	speed	NOUN
ajema-8175	139	5	,	,	PUNCT
ajema-8175	139	6	partial	partial	ADJ
ajema-8175	139	7	redeposition	redeposition	NOUN
ajema-8175	139	8	of	of	ADP
ajema-8175	139	9	ablation	ablation	NOUN
ajema-8175	139	10	by	by	ADP
ajema-8175	139	11	-	-	PUNCT
ajema-8175	139	12	products	product	NOUN
ajema-8175	139	13	was	be	AUX
ajema-8175	139	14	noted	note	VERB
ajema-8175	139	15	,	,	PUNCT
ajema-8175	139	16	which	which	PRON
ajema-8175	139	17	can	can	AUX
ajema-8175	139	18	be	be	AUX
ajema-8175	139	19	mitigated	mitigate	VERB
ajema-8175	139	20	by	by	ADP
ajema-8175	139	21	employing	employ	VERB
ajema-8175	139	22	assist	assist	NOUN
ajema-8175	139	23	gas	gas	NOUN
ajema-8175	139	24	flows	flow	NOUN
ajema-8175	139	25	in	in	ADP
ajema-8175	139	26	future	future	ADJ
ajema-8175	139	27	setups	setup	NOUN
ajema-8175	139	28	.	.	PUNCT
ajema-8175	140	1	tapering	tapering	NOUN
ajema-8175	140	2	:	:	PUNCT
ajema-8175	140	3	features	feature	NOUN
ajema-8175	140	4	exhibited	exhibit	VERB
ajema-8175	140	5	near	near	ADJ
ajema-8175	140	6	-	-	PUNCT
ajema-8175	140	7	vertical	vertical	ADJ
ajema-8175	140	8	sidewalls	sidewall	NOUN
ajema-8175	140	9	(	(	PUNCT
ajema-8175	140	10	<3	<3	NOUN
ajema-8175	140	11	°	°	PRON
ajema-8175	140	12	taper	taper	NOUN
ajema-8175	140	13	angle	angle	NOUN
ajema-8175	140	14	)	)	PUNCT
ajema-8175	140	15	due	due	ADP
ajema-8175	140	16	to	to	ADP
ajema-8175	140	17	the	the	DET
ajema-8175	140	18	high	high	ADJ
ajema-8175	140	19	peak	peak	NOUN
ajema-8175	140	20	intensities	intensity	NOUN
ajema-8175	140	21	and	and	CCONJ
ajema-8175	140	22	minimal	minimal	ADJ
ajema-8175	140	23	thermal	thermal	ADJ
ajema-8175	140	24	diffusion	diffusion	NOUN
ajema-8175	140	25	,	,	PUNCT
ajema-8175	140	26	critical	critical	ADJ
ajema-8175	140	27	for	for	ADP
ajema-8175	140	28	microvia	microvia	NOUN
ajema-8175	140	29	drilling	drilling	NOUN
ajema-8175	140	30	and	and	CCONJ
ajema-8175	140	31	interconnect	interconnect	VERB
ajema-8175	140	32	fabrication	fabrication	NOUN
ajema-8175	140	33	.	.	PUNCT
ajema-8175	141	1	surface	surface	NOUN
ajema-8175	141	2	roughness	roughness	NOUN
ajema-8175	141	3	:	:	PUNCT
ajema-8175	141	4	the	the	DET
ajema-8175	141	5	bottom	bottom	ADJ
ajema-8175	141	6	surfaces	surface	NOUN
ajema-8175	141	7	of	of	ADP
ajema-8175	141	8	ablation	ablation	NOUN
ajema-8175	141	9	craters	crater	NOUN
ajema-8175	141	10	exhibited	exhibit	VERB
ajema-8175	141	11	root	root	NOUN
ajema-8175	141	12	mean	mean	NOUN
ajema-8175	141	13	square	square	PROPN
ajema-8175	141	14	(	(	PUNCT
ajema-8175	141	15	rms	rm	NOUN
ajema-8175	141	16	)	)	PUNCT
ajema-8175	141	17	roughness	roughness	NOUN
ajema-8175	141	18	values	value	NOUN
ajema-8175	141	19	of	of	ADP
ajema-8175	141	20	\~20–50	\~20–50	NOUN
ajema-8175	141	21	nm	nm	NOUN
ajema-8175	141	22	,	,	PUNCT
ajema-8175	141	23	depending	depend	VERB
ajema-8175	141	24	on	on	ADP
ajema-8175	141	25	pulse	pulse	NOUN
ajema-8175	141	26	energy	energy	NOUN
ajema-8175	141	27	and	and	CCONJ
ajema-8175	141	28	material	material	NOUN
ajema-8175	141	29	,	,	PUNCT
ajema-8175	141	30	indicating	indicate	VERB
ajema-8175	141	31	smooth	smooth	ADJ
ajema-8175	141	32	processing	processing	NOUN
ajema-8175	141	33	suitable	suitable	ADJ
ajema-8175	141	34	for	for	ADP
ajema-8175	141	35	microelectronic	microelectronic	ADJ
ajema-8175	141	36	applications	application	NOUN
ajema-8175	141	37	.	.	PUNCT
ajema-8175	142	1	2.4	2.4	NUM
ajema-8175	142	2	thermal	thermal	ADJ
ajema-8175	142	3	effects	effect	NOUN
ajema-8175	142	4	assessment	assessment	VERB
ajema-8175	142	5	optical	optical	ADJ
ajema-8175	142	6	microscopy	microscopy	NOUN
ajema-8175	142	7	and	and	CCONJ
ajema-8175	142	8	sem	sem	NOUN
ajema-8175	142	9	analyses	analysis	NOUN
ajema-8175	142	10	revealed	reveal	VERB
ajema-8175	142	11	:	:	PUNCT
ajema-8175	142	12	negligible	negligible	ADJ
ajema-8175	142	13	heat	heat	NOUN
ajema-8175	142	14	-	-	PUNCT
ajema-8175	142	15	affected	affect	VERB
ajema-8175	142	16	zones	zone	NOUN
ajema-8175	142	17	(	(	PUNCT
ajema-8175	142	18	haz	haz	PROPN
ajema-8175	142	19	):	):	PUNCT
ajema-8175	142	20	no	no	DET
ajema-8175	142	21	evidence	evidence	NOUN
ajema-8175	142	22	of	of	ADP
ajema-8175	142	23	microcracks	microcrack	NOUN
ajema-8175	142	24	,	,	PUNCT
ajema-8175	142	25	thermal	thermal	ADJ
ajema-8175	142	26	discoloration	discoloration	NOUN
ajema-8175	142	27	,	,	PUNCT
ajema-8175	142	28	or	or	CCONJ
ajema-8175	142	29	melted	melt	VERB
ajema-8175	142	30	edges	edge	NOUN
ajema-8175	142	31	was	be	AUX
ajema-8175	142	32	observed	observe	VERB
ajema-8175	142	33	across	across	ADP
ajema-8175	142	34	all	all	DET
ajema-8175	142	35	materials	material	NOUN
ajema-8175	142	36	,	,	PUNCT
ajema-8175	142	37	confirming	confirm	VERB
ajema-8175	142	38	the	the	DET
ajema-8175	142	39	ultrafast	ultrafast	ADJ
ajema-8175	142	40	laser	laser	NOUN
ajema-8175	142	41	’s	’s	PART
ajema-8175	142	42	capability	capability	NOUN
ajema-8175	142	43	for	for	ADP
ajema-8175	142	44	cold	cold	ADJ
ajema-8175	142	45	ablation	ablation	NOUN
ajema-8175	142	46	.	.	PUNCT
ajema-8175	143	1	the	the	DET
ajema-8175	143	2	short	short	ADJ
ajema-8175	143	3	pulse	pulse	NOUN
ajema-8175	143	4	duration	duration	NOUN
ajema-8175	143	5	ensured	ensure	VERB
ajema-8175	143	6	that	that	SCONJ
ajema-8175	143	7	energy	energy	NOUN
ajema-8175	143	8	deposition	deposition	NOUN
ajema-8175	143	9	occurred	occur	VERB
ajema-8175	143	10	faster	fast	ADV
ajema-8175	143	11	than	than	ADP
ajema-8175	143	12	thermal	thermal	ADJ
ajema-8175	143	13	diffusion	diffusion	NOUN
ajema-8175	143	14	,	,	PUNCT
ajema-8175	143	15	thereby	thereby	ADV
ajema-8175	143	16	confining	confine	VERB
ajema-8175	143	17	interactions	interaction	NOUN
ajema-8175	143	18	to	to	ADP
ajema-8175	143	19	the	the	DET
ajema-8175	143	20	focal	focal	ADJ
ajema-8175	143	21	volume	volume	NOUN
ajema-8175	143	22	with	with	ADP
ajema-8175	143	23	minimal	minimal	ADJ
ajema-8175	143	24	collateral	collateral	ADJ
ajema-8175	143	25	thermal	thermal	ADJ
ajema-8175	143	26	impact	impact	NOUN
ajema-8175	143	27	.	.	PUNCT
ajema-8175	144	1	these	these	DET
ajema-8175	144	2	results	result	NOUN
ajema-8175	144	3	validate	validate	VERB
ajema-8175	144	4	the	the	DET
ajema-8175	144	5	theoretical	theoretical	ADJ
ajema-8175	144	6	advantages	advantage	NOUN
ajema-8175	144	7	of	of	ADP
ajema-8175	144	8	femtosecond	femtosecond	NOUN
ajema-8175	144	9	laser	laser	NOUN
ajema-8175	144	10	micromachining	micromachine	VERB
ajema-8175	144	11	in	in	ADP
ajema-8175	144	12	achieving	achieve	VERB
ajema-8175	144	13	high	high	ADJ
ajema-8175	144	14	-	-	PUNCT
ajema-8175	144	15	precision	precision	NOUN
ajema-8175	144	16	features	feature	NOUN
ajema-8175	144	17	with	with	ADP
ajema-8175	144	18	superior	superior	ADJ
ajema-8175	144	19	surface	surface	NOUN
ajema-8175	144	20	quality	quality	NOUN
ajema-8175	144	21	and	and	CCONJ
ajema-8175	144	22	structural	structural	ADJ
ajema-8175	144	23	integrity	integrity	NOUN
ajema-8175	144	24	across	across	ADP
ajema-8175	144	25	various	various	ADJ
ajema-8175	144	26	electronic	electronic	ADJ
ajema-8175	144	27	materials	material	NOUN
ajema-8175	144	28	.	.	PUNCT
ajema-8175	145	1	73	73	NUM
ajema-8175	145	2	journal	journal	NOUN
ajema-8175	145	3	of	of	ADP
ajema-8175	145	4	engineering	engineering	NOUN
ajema-8175	145	5	,	,	PUNCT
ajema-8175	145	6	mechanics	mechanic	NOUN
ajema-8175	145	7	and	and	CCONJ
ajema-8175	145	8	architecture	architecture	NOUN
ajema-8175	145	9	www	www	NOUN
ajema-8175	145	10	.	.	PUNCT
ajema-8175	146	1	grnjournal.us	grnjournal.us	X
ajema-8175	146	2	discussion	discussion	NOUN
ajema-8175	146	3	1	1	NUM
ajema-8175	146	4	.	.	PUNCT
ajema-8175	147	1	interpretation	interpretation	NOUN
ajema-8175	147	2	of	of	ADP
ajema-8175	147	3	results	result	NOUN
ajema-8175	147	4	relative	relative	ADJ
ajema-8175	147	5	to	to	ADP
ajema-8175	147	6	theoretical	theoretical	ADJ
ajema-8175	147	7	models	model	NOUN
ajema-8175	147	8	the	the	DET
ajema-8175	147	9	experimental	experimental	ADJ
ajema-8175	147	10	results	result	NOUN
ajema-8175	147	11	align	align	VERB
ajema-8175	147	12	well	well	ADV
ajema-8175	147	13	with	with	ADP
ajema-8175	147	14	the	the	DET
ajema-8175	147	15	theoretical	theoretical	ADJ
ajema-8175	147	16	models	model	NOUN
ajema-8175	147	17	developed	develop	VERB
ajema-8175	147	18	for	for	ADP
ajema-8175	147	19	ultrafast	ultrafast	ADJ
ajema-8175	147	20	laser	laser	NOUN
ajema-8175	147	21	micromachining	micromachining	NOUN
ajema-8175	147	22	:	:	PUNCT
ajema-8175	147	23	ablation	ablation	NOUN
ajema-8175	147	24	thresholds	threshold	VERB
ajema-8175	147	25	:	:	PUNCT
ajema-8175	147	26	the	the	DET
ajema-8175	147	27	measured	measure	VERB
ajema-8175	147	28	feature	feature	NOUN
ajema-8175	147	29	diameters	diameter	NOUN
ajema-8175	147	30	followed	follow	VERB
ajema-8175	147	31	the	the	DET
ajema-8175	147	32	predicted	predict	VERB
ajema-8175	147	33	logarithmic	logarithmic	ADJ
ajema-8175	147	34	dependence	dependence	NOUN
ajema-8175	147	35	on	on	ADP
ajema-8175	147	36	fluence	fluence	NOUN
ajema-8175	147	37	,	,	PUNCT
ajema-8175	147	38	confirming	confirm	VERB
ajema-8175	147	39	the	the	DET
ajema-8175	147	40	validity	validity	NOUN
ajema-8175	147	41	of	of	ADP
ajema-8175	147	42	ablation	ablation	NOUN
ajema-8175	147	43	threshold	threshold	NOUN
ajema-8175	147	44	calculations	calculation	NOUN
ajema-8175	147	45	for	for	ADP
ajema-8175	147	46	silicon	silicon	NOUN
ajema-8175	147	47	and	and	CCONJ
ajema-8175	147	48	glass	glass	NOUN
ajema-8175	147	49	.	.	PUNCT
ajema-8175	148	1	the	the	DET
ajema-8175	148	2	thresholds	threshold	NOUN
ajema-8175	148	3	obtained	obtain	VERB
ajema-8175	148	4	experimentally	experimentally	ADV
ajema-8175	148	5	(	(	PUNCT
ajema-8175	148	6	\~0.25–0.35	\~0.25–0.35	PROPN
ajema-8175	148	7	j	j	NOUN
ajema-8175	148	8	/	/	SYM
ajema-8175	148	9	cm²	cm²	NOUN
ajema-8175	148	10	for	for	ADP
ajema-8175	148	11	silicon	silicon	NOUN
ajema-8175	148	12	)	)	PUNCT
ajema-8175	148	13	were	be	AUX
ajema-8175	148	14	within	within	ADP
ajema-8175	148	15	reported	report	VERB
ajema-8175	148	16	literature	literature	NOUN
ajema-8175	148	17	ranges	range	NOUN
ajema-8175	148	18	,	,	PUNCT
ajema-8175	148	19	supporting	support	VERB
ajema-8175	148	20	the	the	DET
ajema-8175	148	21	accuracy	accuracy	NOUN
ajema-8175	148	22	of	of	ADP
ajema-8175	148	23	the	the	DET
ajema-8175	148	24	theoretical	theoretical	ADJ
ajema-8175	148	25	approach	approach	NOUN
ajema-8175	148	26	used	use	VERB
ajema-8175	148	27	for	for	ADP
ajema-8175	148	28	system	system	NOUN
ajema-8175	148	29	design	design	NOUN
ajema-8175	148	30	.	.	PUNCT
ajema-8175	149	1	heat	heat	NOUN
ajema-8175	149	2	-	-	PUNCT
ajema-8175	149	3	affected	affect	VERB
ajema-8175	149	4	zone	zone	NOUN
ajema-8175	149	5	modeling	modeling	NOUN
ajema-8175	149	6	:	:	PUNCT
ajema-8175	149	7	thermal	thermal	ADJ
ajema-8175	149	8	analysis	analysis	NOUN
ajema-8175	149	9	indicated	indicate	VERB
ajema-8175	149	10	negligible	negligible	ADJ
ajema-8175	149	11	heat	heat	NOUN
ajema-8175	149	12	-	-	PUNCT
ajema-8175	149	13	affected	affect	VERB
ajema-8175	149	14	zones	zone	NOUN
ajema-8175	149	15	(	(	PUNCT
ajema-8175	149	16	haz	haz	PROPN
ajema-8175	149	17	)	)	PUNCT
ajema-8175	149	18	,	,	PUNCT
ajema-8175	149	19	as	as	SCONJ
ajema-8175	149	20	predicted	predict	VERB
ajema-8175	149	21	by	by	ADP
ajema-8175	149	22	the	the	DET
ajema-8175	149	23	thermal	thermal	ADJ
ajema-8175	149	24	diffusion	diffusion	NOUN
ajema-8175	149	25	models	model	NOUN
ajema-8175	149	26	for	for	ADP
ajema-8175	149	27	femtosecond	femtosecond	NOUN
ajema-8175	149	28	pulses	pulse	NOUN
ajema-8175	149	29	.	.	PUNCT
ajema-8175	150	1	the	the	DET
ajema-8175	150	2	minimal	minimal	ADJ
ajema-8175	150	3	thermal	thermal	ADJ
ajema-8175	150	4	diffusion	diffusion	NOUN
ajema-8175	150	5	length	length	NOUN
ajema-8175	150	6	,	,	PUNCT
ajema-8175	150	7	calculated	calculate	VERB
ajema-8175	150	8	to	to	PART
ajema-8175	150	9	be	be	AUX
ajema-8175	150	10	on	on	ADP
ajema-8175	150	11	the	the	DET
ajema-8175	150	12	nanometer	nanometer	NOUN
ajema-8175	150	13	scale	scale	NOUN
ajema-8175	150	14	,	,	PUNCT
ajema-8175	150	15	was	be	AUX
ajema-8175	150	16	consistent	consistent	ADJ
ajema-8175	150	17	with	with	ADP
ajema-8175	150	18	the	the	DET
ajema-8175	150	19	absence	absence	NOUN
ajema-8175	150	20	of	of	ADP
ajema-8175	150	21	microcracks	microcrack	NOUN
ajema-8175	150	22	,	,	PUNCT
ajema-8175	150	23	recast	recast	ADJ
ajema-8175	150	24	layers	layer	NOUN
ajema-8175	150	25	,	,	PUNCT
ajema-8175	150	26	or	or	CCONJ
ajema-8175	150	27	thermal	thermal	ADJ
ajema-8175	150	28	discoloration	discoloration	NOUN
ajema-8175	150	29	in	in	ADP
ajema-8175	150	30	sem	sem	ADJ
ajema-8175	150	31	and	and	CCONJ
ajema-8175	150	32	optical	optical	ADJ
ajema-8175	150	33	microscopy	microscopy	NOUN
ajema-8175	150	34	images	image	NOUN
ajema-8175	150	35	.	.	PUNCT
ajema-8175	151	1	spot	spot	NOUN
ajema-8175	151	2	size	size	NOUN
ajema-8175	151	3	and	and	CCONJ
ajema-8175	151	4	fluence	fluence	NOUN
ajema-8175	151	5	optimization	optimization	NOUN
ajema-8175	151	6	:	:	PUNCT
ajema-8175	151	7	trade	trade	NOUN
ajema-8175	151	8	-	-	PUNCT
ajema-8175	151	9	off	off	ADP
ajema-8175	151	10	analyses	analysis	NOUN
ajema-8175	151	11	guided	guide	VERB
ajema-8175	151	12	optimal	optimal	ADJ
ajema-8175	151	13	parameter	parameter	NOUN
ajema-8175	151	14	selections	selection	NOUN
ajema-8175	151	15	,	,	PUNCT
ajema-8175	151	16	where	where	SCONJ
ajema-8175	151	17	fluences	fluence	NOUN
ajema-8175	151	18	slightly	slightly	ADV
ajema-8175	151	19	above	above	ADP
ajema-8175	151	20	the	the	DET
ajema-8175	151	21	ablation	ablation	NOUN
ajema-8175	151	22	threshold	threshold	NOUN
ajema-8175	151	23	achieved	achieve	VERB
ajema-8175	151	24	clean	clean	ADJ
ajema-8175	151	25	ablation	ablation	NOUN
ajema-8175	151	26	with	with	ADP
ajema-8175	151	27	minimal	minimal	ADJ
ajema-8175	151	28	debris	debris	NOUN
ajema-8175	151	29	and	and	CCONJ
ajema-8175	151	30	high	high	ADJ
ajema-8175	151	31	machining	machining	NOUN
ajema-8175	151	32	resolution	resolution	NOUN
ajema-8175	151	33	,	,	PUNCT
ajema-8175	151	34	corroborating	corroborate	VERB
ajema-8175	151	35	the	the	DET
ajema-8175	151	36	model	model	NOUN
ajema-8175	151	37	predictions	prediction	NOUN
ajema-8175	151	38	.	.	PUNCT
ajema-8175	152	1	2	2	X
ajema-8175	152	2	.	.	X
ajema-8175	152	3	comparison	comparison	NOUN
ajema-8175	152	4	with	with	ADP
ajema-8175	152	5	previous	previous	ADJ
ajema-8175	152	6	studies	study	NOUN
ajema-8175	152	7	the	the	DET
ajema-8175	152	8	machining	machining	NOUN
ajema-8175	152	9	quality	quality	NOUN
ajema-8175	152	10	achieved	achieve	VERB
ajema-8175	152	11	in	in	ADP
ajema-8175	152	12	this	this	DET
ajema-8175	152	13	study	study	NOUN
ajema-8175	152	14	compares	compare	VERB
ajema-8175	152	15	favorably	favorably	ADV
ajema-8175	152	16	with	with	ADP
ajema-8175	152	17	previous	previous	ADJ
ajema-8175	152	18	work	work	NOUN
ajema-8175	152	19	:	:	PUNCT
ajema-8175	152	20	feature	feature	NOUN
ajema-8175	152	21	resolution	resolution	NOUN
ajema-8175	152	22	:	:	PUNCT
ajema-8175	152	23	the	the	DET
ajema-8175	152	24	minimum	minimum	ADJ
ajema-8175	152	25	feature	feature	NOUN
ajema-8175	152	26	size	size	NOUN
ajema-8175	152	27	of	of	ADP
ajema-8175	152	28	\~1.5	\~1.5	PROPN
ajema-8175	152	29	µm	µm	X
ajema-8175	152	30	is	be	AUX
ajema-8175	152	31	consistent	consistent	ADJ
ajema-8175	152	32	with	with	ADP
ajema-8175	152	33	studies	study	NOUN
ajema-8175	152	34	such	such	ADJ
ajema-8175	152	35	as	as	ADP
ajema-8175	152	36	pronko	pronko	NOUN
ajema-8175	152	37	et	et	PROPN
ajema-8175	152	38	al	al	PROPN
ajema-8175	152	39	.	.	PROPN
ajema-8175	153	1	(	(	PUNCT
ajema-8175	153	2	1995	1995	NUM
ajema-8175	153	3	)	)	PUNCT
ajema-8175	153	4	and	and	CCONJ
ajema-8175	153	5	kautek	kautek	PROPN
ajema-8175	153	6	et	et	PROPN
ajema-8175	153	7	al	al	PROPN
ajema-8175	153	8	.	.	PROPN
ajema-8175	154	1	(	(	PUNCT
ajema-8175	154	2	1994	1994	NUM
ajema-8175	154	3	)	)	PUNCT
ajema-8175	154	4	,	,	PUNCT
ajema-8175	154	5	who	who	PRON
ajema-8175	154	6	reported	report	VERB
ajema-8175	154	7	sub-2	sub-2	NOUN
ajema-8175	154	8	µm	µm	ADP
ajema-8175	154	9	features	feature	NOUN
ajema-8175	154	10	in	in	ADP
ajema-8175	154	11	silicon	silicon	NOUN
ajema-8175	154	12	and	and	CCONJ
ajema-8175	154	13	thin	thin	ADJ
ajema-8175	154	14	films	film	NOUN
ajema-8175	154	15	using	use	VERB
ajema-8175	154	16	similar	similar	ADJ
ajema-8175	154	17	femtosecond	femtosecond	NOUN
ajema-8175	154	18	systems	system	NOUN
ajema-8175	154	19	.	.	PUNCT
ajema-8175	155	1	surface	surface	NOUN
ajema-8175	155	2	quality	quality	NOUN
ajema-8175	155	3	:	:	PUNCT
ajema-8175	155	4	rms	rm	VERB
ajema-8175	155	5	roughness	roughness	NOUN
ajema-8175	155	6	values	value	NOUN
ajema-8175	155	7	of	of	ADP
ajema-8175	155	8	20–50	20–50	NUM
ajema-8175	156	1	nm	nm	NOUN
ajema-8175	156	2	are	be	AUX
ajema-8175	156	3	comparable	comparable	ADJ
ajema-8175	156	4	or	or	CCONJ
ajema-8175	156	5	superior	superior	ADJ
ajema-8175	156	6	to	to	ADP
ajema-8175	156	7	those	those	PRON
ajema-8175	156	8	reported	report	VERB
ajema-8175	156	9	by	by	ADP
ajema-8175	156	10	keller	keller	PROPN
ajema-8175	156	11	et	et	PROPN
ajema-8175	156	12	al	al	PROPN
ajema-8175	156	13	.	.	PROPN
ajema-8175	157	1	(	(	PUNCT
ajema-8175	157	2	2003	2003	NUM
ajema-8175	157	3	)	)	PUNCT
ajema-8175	157	4	in	in	ADP
ajema-8175	157	5	polymer	polymer	NOUN
ajema-8175	157	6	micromachining	micromachining	NOUN
ajema-8175	157	7	,	,	PUNCT
ajema-8175	157	8	highlighting	highlight	VERB
ajema-8175	157	9	the	the	DET
ajema-8175	157	10	system	system	NOUN
ajema-8175	157	11	’s	’s	PART
ajema-8175	157	12	capability	capability	NOUN
ajema-8175	157	13	for	for	ADP
ajema-8175	157	14	fabricating	fabricate	VERB
ajema-8175	157	15	smooth	smooth	ADJ
ajema-8175	157	16	microstructures	microstructure	NOUN
ajema-8175	157	17	essential	essential	ADJ
ajema-8175	157	18	for	for	ADP
ajema-8175	157	19	electronic	electronic	ADJ
ajema-8175	157	20	and	and	CCONJ
ajema-8175	157	21	optical	optical	ADJ
ajema-8175	157	22	device	device	NOUN
ajema-8175	157	23	applications	application	NOUN
ajema-8175	157	24	.	.	PUNCT
ajema-8175	158	1	processing	processing	NOUN
ajema-8175	158	2	efficiency	efficiency	NOUN
ajema-8175	158	3	:	:	PUNCT
ajema-8175	158	4	the	the	DET
ajema-8175	158	5	linear	linear	ADJ
ajema-8175	158	6	increase	increase	NOUN
ajema-8175	158	7	in	in	ADP
ajema-8175	158	8	ablation	ablation	NOUN
ajema-8175	158	9	depth	depth	NOUN
ajema-8175	158	10	with	with	ADP
ajema-8175	158	11	pulse	pulse	NOUN
ajema-8175	158	12	energy	energy	NOUN
ajema-8175	158	13	up	up	ADP
ajema-8175	158	14	to	to	ADP
ajema-8175	158	15	plasma	plasma	NOUN
ajema-8175	158	16	shielding	shielding	NOUN
ajema-8175	158	17	limits	limit	NOUN
ajema-8175	158	18	is	be	AUX
ajema-8175	158	19	similar	similar	ADJ
ajema-8175	158	20	to	to	ADP
ajema-8175	158	21	trends	trend	NOUN
ajema-8175	158	22	observed	observe	VERB
ajema-8175	158	23	by	by	ADP
ajema-8175	158	24	chichkov	chichkov	PROPN
ajema-8175	158	25	et	et	PROPN
ajema-8175	158	26	al	al	PROPN
ajema-8175	158	27	.	.	PROPN
ajema-8175	158	28	(	(	PUNCT
ajema-8175	158	29	1996	1996	NUM
ajema-8175	158	30	)	)	PUNCT
ajema-8175	158	31	,	,	PUNCT
ajema-8175	158	32	validating	validate	VERB
ajema-8175	158	33	the	the	DET
ajema-8175	158	34	operational	operational	ADJ
ajema-8175	158	35	effectiveness	effectiveness	NOUN
ajema-8175	158	36	of	of	ADP
ajema-8175	158	37	the	the	DET
ajema-8175	158	38	designed	design	VERB
ajema-8175	158	39	system	system	NOUN
ajema-8175	158	40	for	for	ADP
ajema-8175	158	41	precision	precision	NOUN
ajema-8175	158	42	micromachining	micromachining	NOUN
ajema-8175	158	43	.	.	PUNCT
ajema-8175	159	1	3	3	X
ajema-8175	159	2	.	.	X
ajema-8175	159	3	challenges	challenge	NOUN
ajema-8175	159	4	encountered	encounter	VERB
ajema-8175	159	5	several	several	ADJ
ajema-8175	159	6	practical	practical	ADJ
ajema-8175	159	7	challenges	challenge	NOUN
ajema-8175	159	8	emerged	emerge	VERB
ajema-8175	159	9	during	during	ADP
ajema-8175	159	10	experimentation	experimentation	NOUN
ajema-8175	159	11	:	:	PUNCT
ajema-8175	159	12	beam	beam	PROPN
ajema-8175	159	13	delivery	delivery	NOUN
ajema-8175	159	14	alignment	alignment	NOUN
ajema-8175	159	15	:	:	PUNCT
ajema-8175	159	16	precise	precise	ADJ
ajema-8175	159	17	alignment	alignment	NOUN
ajema-8175	159	18	of	of	ADP
ajema-8175	159	19	the	the	DET
ajema-8175	159	20	focusing	focus	VERB
ajema-8175	159	21	optics	optic	NOUN
ajema-8175	159	22	with	with	ADP
ajema-8175	159	23	the	the	DET
ajema-8175	159	24	galvo	galvo	NOUN
ajema-8175	159	25	scanner	scanner	NOUN
ajema-8175	159	26	was	be	AUX
ajema-8175	159	27	critical	critical	ADJ
ajema-8175	159	28	to	to	PART
ajema-8175	159	29	maintain	maintain	VERB
ajema-8175	159	30	focus	focus	NOUN
ajema-8175	159	31	stability	stability	NOUN
ajema-8175	159	32	and	and	CCONJ
ajema-8175	159	33	machining	machining	NOUN
ajema-8175	159	34	accuracy	accuracy	NOUN
ajema-8175	159	35	across	across	ADP
ajema-8175	159	36	the	the	DET
ajema-8175	159	37	scan	scan	ADJ
ajema-8175	159	38	field	field	NOUN
ajema-8175	159	39	.	.	PUNCT
ajema-8175	160	1	minor	minor	ADJ
ajema-8175	160	2	misalignments	misalignment	NOUN
ajema-8175	160	3	led	lead	VERB
ajema-8175	160	4	to	to	ADP
ajema-8175	160	5	variations	variation	NOUN
ajema-8175	160	6	in	in	ADP
ajema-8175	160	7	feature	feature	NOUN
ajema-8175	160	8	dimensions	dimension	NOUN
ajema-8175	160	9	,	,	PUNCT
ajema-8175	160	10	emphasizing	emphasize	VERB
ajema-8175	160	11	the	the	DET
ajema-8175	160	12	need	need	NOUN
ajema-8175	160	13	for	for	ADP
ajema-8175	160	14	routine	routine	ADJ
ajema-8175	160	15	calibration	calibration	NOUN
ajema-8175	160	16	.	.	PUNCT
ajema-8175	161	1	pulse	pulse	NOUN
ajema-8175	161	2	energy	energy	NOUN
ajema-8175	161	3	fluctuation	fluctuation	NOUN
ajema-8175	161	4	:	:	PUNCT
ajema-8175	161	5	although	although	SCONJ
ajema-8175	161	6	overall	overall	ADJ
ajema-8175	161	7	energy	energy	NOUN
ajema-8175	161	8	stability	stability	NOUN
ajema-8175	161	9	was	be	AUX
ajema-8175	161	10	within	within	ADP
ajema-8175	161	11	±2	±2	NOUN
ajema-8175	161	12	%	%	NOUN
ajema-8175	161	13	,	,	PUNCT
ajema-8175	161	14	occasional	occasional	ADJ
ajema-8175	161	15	transient	transient	ADJ
ajema-8175	161	16	fluctuations	fluctuation	NOUN
ajema-8175	161	17	affected	affect	VERB
ajema-8175	161	18	ablation	ablation	NOUN
ajema-8175	161	19	uniformity	uniformity	NOUN
ajema-8175	161	20	.	.	PUNCT
ajema-8175	162	1	implementing	implement	VERB
ajema-8175	162	2	active	active	ADJ
ajema-8175	162	3	feedback	feedback	NOUN
ajema-8175	162	4	stabilization	stabilization	NOUN
ajema-8175	162	5	systems	system	NOUN
ajema-8175	162	6	would	would	AUX
ajema-8175	162	7	enhance	enhance	VERB
ajema-8175	162	8	consistency	consistency	NOUN
ajema-8175	162	9	for	for	ADP
ajema-8175	162	10	industrial	industrial	ADJ
ajema-8175	162	11	applications	application	NOUN
ajema-8175	162	12	.	.	PUNCT
ajema-8175	163	1	4	4	X
ajema-8175	163	2	.	.	X
ajema-8175	163	3	design	design	NOUN
ajema-8175	163	4	considerations	consideration	NOUN
ajema-8175	163	5	for	for	ADP
ajema-8175	163	6	industrial	industrial	ADJ
ajema-8175	163	7	scalability	scalability	NOUN
ajema-8175	163	8	for	for	ADP
ajema-8175	163	9	integration	integration	NOUN
ajema-8175	163	10	into	into	ADP
ajema-8175	163	11	industrial	industrial	ADJ
ajema-8175	163	12	micromachining	micromachining	NOUN
ajema-8175	163	13	processes	process	NOUN
ajema-8175	163	14	,	,	PUNCT
ajema-8175	163	15	several	several	ADJ
ajema-8175	163	16	design	design	NOUN
ajema-8175	163	17	considerations	consideration	NOUN
ajema-8175	163	18	are	be	AUX
ajema-8175	163	19	essential	essential	ADJ
ajema-8175	163	20	:	:	PUNCT
ajema-8175	163	21	maintenance	maintenance	NOUN
ajema-8175	163	22	requirements	requirement	NOUN
ajema-8175	163	23	:	:	PUNCT
ajema-8175	163	24	the	the	DET
ajema-8175	163	25	optical	optical	ADJ
ajema-8175	163	26	components	component	NOUN
ajema-8175	163	27	,	,	PUNCT
ajema-8175	163	28	particularly	particularly	ADV
ajema-8175	163	29	focusing	focus	VERB
ajema-8175	163	30	lenses	lense	NOUN
ajema-8175	163	31	and	and	CCONJ
ajema-8175	163	32	mirrors	mirror	NOUN
ajema-8175	163	33	,	,	PUNCT
ajema-8175	163	34	are	be	AUX
ajema-8175	163	35	susceptible	susceptible	ADJ
ajema-8175	163	36	to	to	ADP
ajema-8175	163	37	contamination	contamination	NOUN
ajema-8175	163	38	by	by	ADP
ajema-8175	163	39	ablation	ablation	NOUN
ajema-8175	163	40	debris	debris	NOUN
ajema-8175	163	41	,	,	PUNCT
ajema-8175	163	42	necessitating	necessitate	VERB
ajema-8175	163	43	regular	regular	ADJ
ajema-8175	163	44	cleaning	cleaning	NOUN
ajema-8175	163	45	schedules	schedule	NOUN
ajema-8175	163	46	.	.	PUNCT
ajema-8175	164	1	incorporating	incorporate	VERB
ajema-8175	164	2	protective	protective	ADJ
ajema-8175	164	3	windows	window	NOUN
ajema-8175	164	4	and	and	CCONJ
ajema-8175	164	5	purging	purging	NOUN
ajema-8175	164	6	systems	system	NOUN
ajema-8175	164	7	can	can	AUX
ajema-8175	164	8	reduce	reduce	VERB
ajema-8175	164	9	maintenance	maintenance	NOUN
ajema-8175	164	10	frequency	frequency	NOUN
ajema-8175	164	11	and	and	CCONJ
ajema-8175	164	12	enhance	enhance	VERB
ajema-8175	164	13	system	system	NOUN
ajema-8175	164	14	longevity	longevity	NOUN
ajema-8175	164	15	.	.	PUNCT
ajema-8175	165	1	integration	integration	NOUN
ajema-8175	165	2	into	into	ADP
ajema-8175	165	3	production	production	NOUN
ajema-8175	165	4	lines	line	NOUN
ajema-8175	165	5	:	:	PUNCT
ajema-8175	165	6	successful	successful	ADJ
ajema-8175	165	7	industrial	industrial	ADJ
ajema-8175	165	8	deployment	deployment	NOUN
ajema-8175	165	9	requires	require	VERB
ajema-8175	165	10	seamless	seamless	ADJ
ajema-8175	165	11	integration	integration	NOUN
ajema-8175	165	12	of	of	ADP
ajema-8175	165	13	the	the	DET
ajema-8175	165	14	ultrafast	ultrafast	ADJ
ajema-8175	165	15	laser	laser	NOUN
ajema-8175	165	16	system	system	NOUN
ajema-8175	165	17	with	with	ADP
ajema-8175	165	18	existing	exist	VERB
ajema-8175	165	19	manufacturing	manufacturing	NOUN
ajema-8175	165	20	workflows	workflow	NOUN
ajema-8175	165	21	.	.	PUNCT
ajema-8175	166	1	this	this	PRON
ajema-8175	166	2	includes	include	VERB
ajema-8175	166	3	:	:	PUNCT
ajema-8175	166	4	74	74	NUM
ajema-8175	166	5	journal	journal	NOUN
ajema-8175	166	6	of	of	ADP
ajema-8175	166	7	engineering	engineering	NOUN
ajema-8175	166	8	,	,	PUNCT
ajema-8175	166	9	mechanics	mechanic	NOUN
ajema-8175	166	10	and	and	CCONJ
ajema-8175	166	11	architecture	architecture	NOUN
ajema-8175	166	12	www	www	NOUN
ajema-8175	166	13	.	.	PUNCT
ajema-8175	167	1	grnjournal.us	grnjournal.us	X
ajema-8175	167	2	automated	automate	VERB
ajema-8175	167	3	sample	sample	NOUN
ajema-8175	167	4	loading	loading	NOUN
ajema-8175	167	5	and	and	CCONJ
ajema-8175	167	6	unloading	unloading	NOUN
ajema-8175	167	7	systems	system	NOUN
ajema-8175	167	8	to	to	PART
ajema-8175	167	9	minimize	minimize	VERB
ajema-8175	167	10	operator	operator	NOUN
ajema-8175	167	11	intervention	intervention	NOUN
ajema-8175	167	12	.	.	PUNCT
ajema-8175	168	1	real	real	ADJ
ajema-8175	168	2	-	-	PUNCT
ajema-8175	168	3	time	time	NOUN
ajema-8175	168	4	monitoring	monitoring	NOUN
ajema-8175	168	5	and	and	CCONJ
ajema-8175	168	6	feedback	feedback	NOUN
ajema-8175	168	7	control	control	NOUN
ajema-8175	168	8	for	for	ADP
ajema-8175	168	9	process	process	NOUN
ajema-8175	168	10	validation	validation	NOUN
ajema-8175	168	11	and	and	CCONJ
ajema-8175	168	12	adaptive	adaptive	ADJ
ajema-8175	168	13	parameter	parameter	NOUN
ajema-8175	168	14	adjustments	adjustment	NOUN
ajema-8175	168	15	.	.	PUNCT
ajema-8175	169	1	safety	safety	NOUN
ajema-8175	169	2	enclosures	enclosure	NOUN
ajema-8175	169	3	and	and	CCONJ
ajema-8175	169	4	interlocks	interlock	NOUN
ajema-8175	169	5	compliant	compliant	ADJ
ajema-8175	169	6	with	with	ADP
ajema-8175	169	7	laser	laser	NOUN
ajema-8175	169	8	safety	safety	NOUN
ajema-8175	169	9	standards	standard	NOUN
ajema-8175	169	10	to	to	PART
ajema-8175	169	11	protect	protect	VERB
ajema-8175	169	12	personnel	personnel	NOUN
ajema-8175	169	13	.	.	PUNCT
ajema-8175	170	1	moreover	moreover	ADV
ajema-8175	170	2	,	,	PUNCT
ajema-8175	170	3	scalability	scalability	NOUN
ajema-8175	170	4	would	would	AUX
ajema-8175	170	5	benefit	benefit	VERB
ajema-8175	170	6	from	from	ADP
ajema-8175	170	7	the	the	DET
ajema-8175	170	8	implementation	implementation	NOUN
ajema-8175	170	9	of	of	ADP
ajema-8175	170	10	burst	burst	ADJ
ajema-8175	170	11	-	-	PUNCT
ajema-8175	170	12	mode	mode	NOUN
ajema-8175	170	13	femtosecond	femtosecond	NOUN
ajema-8175	170	14	lasers	laser	NOUN
ajema-8175	170	15	or	or	CCONJ
ajema-8175	170	16	parallel	parallel	ADJ
ajema-8175	170	17	beam	beam	NOUN
ajema-8175	170	18	splitting	splitting	NOUN
ajema-8175	170	19	technologies	technology	NOUN
ajema-8175	170	20	to	to	PART
ajema-8175	170	21	increase	increase	VERB
ajema-8175	170	22	processing	process	VERB
ajema-8175	170	23	throughput	throughput	NOUN
ajema-8175	170	24	while	while	SCONJ
ajema-8175	170	25	maintaining	maintain	VERB
ajema-8175	170	26	precision	precision	NOUN
ajema-8175	170	27	.	.	PUNCT
ajema-8175	171	1	conclusion	conclusion	NOUN
ajema-8175	171	2	this	this	DET
ajema-8175	171	3	study	study	NOUN
ajema-8175	171	4	presented	present	VERB
ajema-8175	171	5	the	the	DET
ajema-8175	171	6	design	design	NOUN
ajema-8175	171	7	and	and	CCONJ
ajema-8175	171	8	analysis	analysis	NOUN
ajema-8175	171	9	of	of	ADP
ajema-8175	171	10	ultrafast	ultrafast	ADJ
ajema-8175	171	11	pulsed	pulse	VERB
ajema-8175	171	12	laser	laser	NOUN
ajema-8175	171	13	systems	system	NOUN
ajema-8175	171	14	for	for	ADP
ajema-8175	171	15	precision	precision	NOUN
ajema-8175	171	16	micromachining	micromachine	VERB
ajema-8175	171	17	in	in	ADP
ajema-8175	171	18	electronic	electronic	ADJ
ajema-8175	171	19	materials	material	NOUN
ajema-8175	171	20	,	,	PUNCT
ajema-8175	171	21	integrating	integrate	VERB
ajema-8175	171	22	theoretical	theoretical	ADJ
ajema-8175	171	23	modeling	modeling	NOUN
ajema-8175	171	24	,	,	PUNCT
ajema-8175	171	25	experimental	experimental	ADJ
ajema-8175	171	26	validation	validation	NOUN
ajema-8175	171	27	,	,	PUNCT
ajema-8175	171	28	and	and	CCONJ
ajema-8175	171	29	practical	practical	ADJ
ajema-8175	171	30	design	design	NOUN
ajema-8175	171	31	considerations	consideration	NOUN
ajema-8175	171	32	.	.	PUNCT
ajema-8175	172	1	key	key	ADJ
ajema-8175	172	2	findings	finding	NOUN
ajema-8175	172	3	optimal	optimal	ADJ
ajema-8175	172	4	laser	laser	NOUN
ajema-8175	172	5	parameters	parameter	NOUN
ajema-8175	172	6	:	:	PUNCT
ajema-8175	172	7	the	the	DET
ajema-8175	172	8	experiments	experiment	NOUN
ajema-8175	172	9	identified	identify	VERB
ajema-8175	172	10	that	that	PRON
ajema-8175	172	11	femtosecond	femtosecond	NOUN
ajema-8175	172	12	pulse	pulse	NOUN
ajema-8175	172	13	durations	duration	NOUN
ajema-8175	172	14	(	(	PUNCT
ajema-8175	172	15	\~300	\~300	NUM
ajema-8175	172	16	fs	fs	NOUN
ajema-8175	172	17	)	)	PUNCT
ajema-8175	172	18	,	,	PUNCT
ajema-8175	172	19	moderate	moderate	ADJ
ajema-8175	172	20	pulse	pulse	NOUN
ajema-8175	172	21	energies	energy	NOUN
ajema-8175	172	22	(	(	PUNCT
ajema-8175	172	23	20–50	20–50	NUM
ajema-8175	172	24	µj	µj	NOUN
ajema-8175	172	25	)	)	PUNCT
ajema-8175	172	26	,	,	PUNCT
ajema-8175	172	27	and	and	CCONJ
ajema-8175	172	28	near	near	ADJ
ajema-8175	172	29	-	-	PUNCT
ajema-8175	172	30	threshold	threshold	NOUN
ajema-8175	172	31	fluences	fluence	NOUN
ajema-8175	172	32	yield	yield	VERB
ajema-8175	172	33	superior	superior	ADJ
ajema-8175	172	34	machining	machining	NOUN
ajema-8175	172	35	precision	precision	NOUN
ajema-8175	172	36	for	for	ADP
ajema-8175	172	37	silicon	silicon	NOUN
ajema-8175	172	38	,	,	PUNCT
ajema-8175	172	39	glass	glass	NOUN
ajema-8175	172	40	,	,	PUNCT
ajema-8175	172	41	and	and	CCONJ
ajema-8175	172	42	thin	thin	ADJ
ajema-8175	172	43	metal	metal	NOUN
ajema-8175	172	44	films	film	NOUN
ajema-8175	172	45	.	.	PUNCT
ajema-8175	173	1	repetition	repetition	NOUN
ajema-8175	173	2	rates	rate	NOUN
ajema-8175	173	3	of	of	ADP
ajema-8175	173	4	100–500	100–500	NUM
ajema-8175	173	5	khz	khz	NOUN
ajema-8175	173	6	balanced	balance	VERB
ajema-8175	173	7	throughput	throughput	NOUN
ajema-8175	173	8	with	with	ADP
ajema-8175	173	9	minimal	minimal	ADJ
ajema-8175	173	10	thermal	thermal	ADJ
ajema-8175	173	11	accumulation	accumulation	NOUN
ajema-8175	173	12	.	.	PUNCT
ajema-8175	174	1	machining	machining	NOUN
ajema-8175	174	2	benefits	benefit	NOUN
ajema-8175	174	3	:	:	PUNCT
ajema-8175	174	4	compared	compare	VERB
ajema-8175	174	5	to	to	ADP
ajema-8175	174	6	conventional	conventional	ADJ
ajema-8175	174	7	nanosecond	nanosecond	NOUN
ajema-8175	174	8	or	or	CCONJ
ajema-8175	174	9	mechanical	mechanical	ADJ
ajema-8175	174	10	machining	machining	NOUN
ajema-8175	174	11	methods	method	NOUN
ajema-8175	174	12	,	,	PUNCT
ajema-8175	174	13	ultrafast	ultrafast	ADJ
ajema-8175	174	14	lasers	laser	NOUN
ajema-8175	174	15	demonstrated	demonstrate	VERB
ajema-8175	174	16	negligible	negligible	ADJ
ajema-8175	174	17	heat	heat	NOUN
ajema-8175	174	18	-	-	PUNCT
ajema-8175	174	19	affected	affect	VERB
ajema-8175	174	20	zones	zone	NOUN
ajema-8175	174	21	,	,	PUNCT
ajema-8175	174	22	superior	superior	ADJ
ajema-8175	174	23	surface	surface	NOUN
ajema-8175	174	24	quality	quality	NOUN
ajema-8175	174	25	(	(	PUNCT
ajema-8175	174	26	rms	rm	NOUN
ajema-8175	174	27	roughness	roughness	NOUN
ajema-8175	174	28	\~20–50	\~20–50	ADJ
ajema-8175	174	29	nm	nm	NOUN
ajema-8175	174	30	)	)	PUNCT
ajema-8175	174	31	,	,	PUNCT
ajema-8175	174	32	and	and	CCONJ
ajema-8175	174	33	minimal	minimal	ADJ
ajema-8175	174	34	redeposition	redeposition	NOUN
ajema-8175	174	35	or	or	CCONJ
ajema-8175	174	36	tapering	tapering	NOUN
ajema-8175	174	37	,	,	PUNCT
ajema-8175	174	38	enabling	enable	VERB
ajema-8175	174	39	fabrication	fabrication	NOUN
ajema-8175	174	40	of	of	ADP
ajema-8175	174	41	highresolution	highresolution	NOUN
ajema-8175	174	42	microstructures	microstructure	NOUN
ajema-8175	174	43	with	with	ADP
ajema-8175	174	44	enhanced	enhanced	ADJ
ajema-8175	174	45	structural	structural	ADJ
ajema-8175	174	46	integrity	integrity	NOUN
ajema-8175	174	47	essential	essential	ADJ
ajema-8175	174	48	for	for	ADP
ajema-8175	174	49	semiconductor	semiconductor	NOUN
ajema-8175	174	50	,	,	PUNCT
ajema-8175	174	51	mems	mem	NOUN
ajema-8175	174	52	,	,	PUNCT
ajema-8175	174	53	and	and	CCONJ
ajema-8175	174	54	microelectronic	microelectronic	ADJ
ajema-8175	174	55	packaging	packaging	NOUN
ajema-8175	174	56	applications	application	NOUN
ajema-8175	174	57	.	.	PUNCT
ajema-8175	175	1	contributions	contribution	NOUN
ajema-8175	175	2	this	this	DET
ajema-8175	175	3	work	work	NOUN
ajema-8175	175	4	contributes	contribute	VERB
ajema-8175	175	5	to	to	ADP
ajema-8175	175	6	the	the	DET
ajema-8175	175	7	field	field	NOUN
ajema-8175	175	8	of	of	ADP
ajema-8175	175	9	micromachining	micromachine	VERB
ajema-8175	175	10	by	by	ADP
ajema-8175	175	11	:	:	PUNCT
ajema-8175	175	12	developing	develop	VERB
ajema-8175	175	13	a	a	DET
ajema-8175	175	14	systematic	systematic	ADJ
ajema-8175	175	15	design	design	NOUN
ajema-8175	175	16	framework	framework	NOUN
ajema-8175	175	17	integrating	integrate	VERB
ajema-8175	175	18	laser	laser	NOUN
ajema-8175	175	19	source	source	NOUN
ajema-8175	175	20	selection	selection	NOUN
ajema-8175	175	21	,	,	PUNCT
ajema-8175	175	22	beam	beam	NOUN
ajema-8175	175	23	delivery	delivery	NOUN
ajema-8175	175	24	optimization	optimization	NOUN
ajema-8175	175	25	,	,	PUNCT
ajema-8175	175	26	and	and	CCONJ
ajema-8175	175	27	control	control	NOUN
ajema-8175	175	28	system	system	NOUN
ajema-8175	175	29	integration	integration	NOUN
ajema-8175	175	30	for	for	ADP
ajema-8175	175	31	electronic	electronic	ADJ
ajema-8175	175	32	material	material	NOUN
ajema-8175	175	33	processing	processing	NOUN
ajema-8175	175	34	.	.	PUNCT
ajema-8175	176	1	providing	provide	VERB
ajema-8175	176	2	analytical	analytical	ADJ
ajema-8175	176	3	models	model	NOUN
ajema-8175	176	4	for	for	ADP
ajema-8175	176	5	ablation	ablation	NOUN
ajema-8175	176	6	thresholds	threshold	NOUN
ajema-8175	176	7	,	,	PUNCT
ajema-8175	176	8	thermal	thermal	ADJ
ajema-8175	176	9	effects	effect	NOUN
ajema-8175	176	10	,	,	PUNCT
ajema-8175	176	11	and	and	CCONJ
ajema-8175	176	12	precision	precision	NOUN
ajema-8175	176	13	optimization	optimization	NOUN
ajema-8175	176	14	,	,	PUNCT
ajema-8175	176	15	validated	validate	VERB
ajema-8175	176	16	experimentally	experimentally	ADV
ajema-8175	176	17	to	to	PART
ajema-8175	176	18	guide	guide	VERB
ajema-8175	176	19	future	future	ADJ
ajema-8175	176	20	ultrafast	ultrafast	ADJ
ajema-8175	176	21	laser	laser	NOUN
ajema-8175	176	22	system	system	NOUN
ajema-8175	176	23	developments	development	NOUN
ajema-8175	176	24	.	.	PUNCT
ajema-8175	177	1	demonstrating	demonstrate	VERB
ajema-8175	177	2	practical	practical	ADJ
ajema-8175	177	3	system	system	NOUN
ajema-8175	177	4	performance	performance	NOUN
ajema-8175	177	5	with	with	ADP
ajema-8175	177	6	stability	stability	NOUN
ajema-8175	177	7	and	and	CCONJ
ajema-8175	177	8	machining	machine	VERB
ajema-8175	177	9	outcomes	outcome	NOUN
ajema-8175	177	10	comparable	comparable	ADJ
ajema-8175	177	11	or	or	CCONJ
ajema-8175	177	12	superior	superior	ADJ
ajema-8175	177	13	to	to	PART
ajema-8175	177	14	previously	previously	ADV
ajema-8175	177	15	reported	report	VERB
ajema-8175	177	16	studies	study	NOUN
ajema-8175	177	17	,	,	PUNCT
ajema-8175	177	18	highlighting	highlight	VERB
ajema-8175	177	19	the	the	DET
ajema-8175	177	20	system	system	NOUN
ajema-8175	177	21	’s	’s	PART
ajema-8175	177	22	industrial	industrial	ADJ
ajema-8175	177	23	viability	viability	NOUN
ajema-8175	177	24	.	.	PUNCT
ajema-8175	178	1	future	future	ADJ
ajema-8175	178	2	work	work	NOUN
ajema-8175	178	3	to	to	PART
ajema-8175	178	4	further	far	ADV
ajema-8175	178	5	advance	advance	VERB
ajema-8175	178	6	ultrafast	ultrafast	ADJ
ajema-8175	178	7	laser	laser	NOUN
ajema-8175	178	8	micromachining	micromachine	VERB
ajema-8175	178	9	technologies	technology	NOUN
ajema-8175	178	10	,	,	PUNCT
ajema-8175	178	11	future	future	ADJ
ajema-8175	178	12	research	research	NOUN
ajema-8175	178	13	will	will	AUX
ajema-8175	178	14	focus	focus	VERB
ajema-8175	178	15	on	on	ADP
ajema-8175	178	16	:	:	PUNCT
ajema-8175	178	17	1	1	X
ajema-8175	178	18	.	.	X
ajema-8175	178	19	multi	multi	ADJ
ajema-8175	178	20	-	-	ADJ
ajema-8175	178	21	material	material	ADJ
ajema-8175	178	22	processing	processing	NOUN
ajema-8175	178	23	optimization	optimization	NOUN
ajema-8175	178	24	:	:	PUNCT
ajema-8175	178	25	extending	extend	VERB
ajema-8175	178	26	experimental	experimental	ADJ
ajema-8175	178	27	and	and	CCONJ
ajema-8175	178	28	modeling	model	VERB
ajema-8175	178	29	studies	study	NOUN
ajema-8175	178	30	to	to	ADP
ajema-8175	178	31	heterogeneous	heterogeneous	ADJ
ajema-8175	178	32	electronic	electronic	ADJ
ajema-8175	178	33	systems	system	NOUN
ajema-8175	178	34	(	(	PUNCT
ajema-8175	178	35	e.g.	e.g.	ADV
ajema-8175	178	36	,	,	PUNCT
ajema-8175	178	37	si	si	ADJ
ajema-8175	178	38	-	-	ADJ
ajema-8175	178	39	gaas	gaas	ADJ
ajema-8175	178	40	stacks	stack	NOUN
ajema-8175	178	41	,	,	PUNCT
ajema-8175	178	42	flexible	flexible	ADJ
ajema-8175	178	43	polymer	polymer	NOUN
ajema-8175	178	44	circuits	circuit	NOUN
ajema-8175	178	45	)	)	PUNCT
ajema-8175	178	46	to	to	PART
ajema-8175	178	47	establish	establish	VERB
ajema-8175	178	48	material	material	NOUN
ajema-8175	178	49	-	-	PUNCT
ajema-8175	178	50	specific	specific	ADJ
ajema-8175	178	51	parameter	parameter	NOUN
ajema-8175	178	52	libraries	library	NOUN
ajema-8175	178	53	for	for	ADP
ajema-8175	178	54	rapid	rapid	ADJ
ajema-8175	178	55	process	process	NOUN
ajema-8175	178	56	adaptation	adaptation	NOUN
ajema-8175	178	57	.	.	PUNCT
ajema-8175	179	1	2	2	X
ajema-8175	179	2	.	.	X
ajema-8175	179	3	ai	ai	VERB
ajema-8175	179	4	integration	integration	NOUN
ajema-8175	179	5	for	for	ADP
ajema-8175	179	6	adaptive	adaptive	ADJ
ajema-8175	179	7	machining	machining	NOUN
ajema-8175	179	8	:	:	PUNCT
ajema-8175	179	9	developing	develop	VERB
ajema-8175	179	10	artificial	artificial	ADJ
ajema-8175	179	11	intelligence	intelligence	NOUN
ajema-8175	179	12	algorithms	algorithm	NOUN
ajema-8175	179	13	for	for	ADP
ajema-8175	179	14	realtime	realtime	NOUN
ajema-8175	179	15	monitoring	monitoring	NOUN
ajema-8175	179	16	data	datum	NOUN
ajema-8175	179	17	interpretation	interpretation	NOUN
ajema-8175	179	18	,	,	PUNCT
ajema-8175	179	19	enabling	enable	VERB
ajema-8175	179	20	dynamic	dynamic	ADJ
ajema-8175	179	21	adjustment	adjustment	NOUN
ajema-8175	179	22	of	of	ADP
ajema-8175	179	23	laser	laser	NOUN
ajema-8175	179	24	parameters	parameter	NOUN
ajema-8175	179	25	for	for	ADP
ajema-8175	179	26	optimal	optimal	ADJ
ajema-8175	179	27	machining	machining	NOUN
ajema-8175	179	28	quality	quality	NOUN
ajema-8175	179	29	under	under	ADP
ajema-8175	179	30	variable	variable	ADJ
ajema-8175	179	31	conditions	condition	NOUN
ajema-8175	179	32	.	.	PUNCT
ajema-8175	180	1	3	3	X
ajema-8175	180	2	.	.	X
ajema-8175	180	3	energy	energy	NOUN
ajema-8175	180	4	efficiency	efficiency	NOUN
ajema-8175	180	5	improvements	improvement	NOUN
ajema-8175	180	6	:	:	PUNCT
ajema-8175	180	7	designing	design	VERB
ajema-8175	180	8	high	high	ADJ
ajema-8175	180	9	-	-	PUNCT
ajema-8175	180	10	throughput	throughput	NOUN
ajema-8175	180	11	processing	processing	NOUN
ajema-8175	180	12	strategies	strategy	NOUN
ajema-8175	180	13	such	such	ADJ
ajema-8175	180	14	as	as	ADP
ajema-8175	180	15	burst	burst	ADJ
ajema-8175	180	16	-	-	PUNCT
ajema-8175	180	17	mode	mode	NOUN
ajema-8175	180	18	operation	operation	NOUN
ajema-8175	180	19	,	,	PUNCT
ajema-8175	180	20	parallel	parallel	ADJ
ajema-8175	180	21	beam	beam	NOUN
ajema-8175	180	22	splitting	splitting	NOUN
ajema-8175	180	23	,	,	PUNCT
ajema-8175	180	24	and	and	CCONJ
ajema-8175	180	25	optimized	optimize	VERB
ajema-8175	180	26	scanning	scan	VERB
ajema-8175	180	27	algorithms	algorithm	NOUN
ajema-8175	180	28	to	to	PART
ajema-8175	180	29	maximize	maximize	VERB
ajema-8175	180	30	material	material	NOUN
ajema-8175	180	31	removal	removal	NOUN
ajema-8175	180	32	rates	rate	NOUN
ajema-8175	180	33	while	while	SCONJ
ajema-8175	180	34	minimizing	minimize	VERB
ajema-8175	180	35	energy	energy	NOUN
ajema-8175	180	36	consumption	consumption	NOUN
ajema-8175	180	37	in	in	ADP
ajema-8175	180	38	industrial	industrial	ADJ
ajema-8175	180	39	manufacturing	manufacturing	NOUN
ajema-8175	180	40	environments	environment	NOUN
ajema-8175	180	41	.	.	PUNCT
ajema-8175	181	1	75	75	NUM
ajema-8175	181	2	journal	journal	NOUN
ajema-8175	181	3	of	of	ADP
ajema-8175	181	4	engineering	engineering	NOUN
ajema-8175	181	5	,	,	PUNCT
ajema-8175	181	6	mechanics	mechanic	NOUN
ajema-8175	181	7	and	and	CCONJ
ajema-8175	181	8	architecture	architecture	NOUN
ajema-8175	181	9	www	www	NOUN
ajema-8175	181	10	.	.	PUNCT
ajema-8175	182	1	grnjournal.us	grnjournal.us	X
ajema-8175	182	2	references	reference	NOUN
ajema-8175	182	3	:	:	PUNCT
ajema-8175	182	4	1	1	NUM
ajema-8175	182	5	.	.	X
ajema-8175	182	6	chichkov	chichkov	PROPN
ajema-8175	182	7	,	,	PUNCT
ajema-8175	182	8	b.	b.	PROPN
ajema-8175	182	9	n.	n.	PROPN
ajema-8175	182	10	,	,	PUNCT
ajema-8175	182	11	momma	momma	PROPN
ajema-8175	182	12	,	,	PUNCT
ajema-8175	182	13	c.	c.	PROPN
ajema-8175	182	14	,	,	PUNCT
ajema-8175	182	15	nolte	nolte	PROPN
ajema-8175	182	16	,	,	PUNCT
ajema-8175	182	17	s.	s.	PROPN
ajema-8175	182	18	,	,	PUNCT
ajema-8175	182	19	von	von	PROPN
ajema-8175	182	20	alvensleben	alvensleben	PROPN
ajema-8175	182	21	,	,	PUNCT
ajema-8175	182	22	f.	f.	PROPN
ajema-8175	182	23	,	,	PUNCT
ajema-8175	182	24	&	&	CCONJ
ajema-8175	182	25	tünnermann	tünnermann	PROPN
ajema-8175	182	26	,	,	PUNCT
ajema-8175	182	27	a.	a.	NOUN
ajema-8175	182	28	(	(	PUNCT
ajema-8175	182	29	1996	1996	NUM
ajema-8175	182	30	)	)	PUNCT
ajema-8175	182	31	.	.	PUNCT
ajema-8175	183	1	femtosecond	femtosecond	NOUN
ajema-8175	183	2	,	,	PUNCT
ajema-8175	183	3	picosecond	picosecond	NOUN
ajema-8175	183	4	and	and	CCONJ
ajema-8175	183	5	nanosecond	nanosecond	NOUN
ajema-8175	183	6	laser	laser	NOUN
ajema-8175	183	7	ablation	ablation	NOUN
ajema-8175	183	8	of	of	ADP
ajema-8175	183	9	solids	solid	NOUN
ajema-8175	183	10	.	.	PUNCT
ajema-8175	184	1	applied	apply	VERB
ajema-8175	184	2	physics	physics	PROPN
ajema-8175	184	3	a	a	NOUN
ajema-8175	184	4	,	,	PUNCT
ajema-8175	184	5	63(2	63(2	NUM
ajema-8175	184	6	)	)	PUNCT
ajema-8175	184	7	,	,	PUNCT
ajema-8175	184	8	109–115	109–115	NUM
ajema-8175	184	9	.	.	PUNCT
ajema-8175	185	1	[	[	X
ajema-8175	185	2	https://doi.org/10.1007/bf01567636](https://doi.org/10.1007/bf01567636	https://doi.org/10.1007/bf01567636](https://doi.org/10.1007/bf01567636	NOUN
ajema-8175	185	3	)	)	PUNCT
ajema-8175	185	4	2	2	NUM
ajema-8175	185	5	.	.	PUNCT
ajema-8175	185	6	stuart	stuart	PROPN
ajema-8175	185	7	,	,	PUNCT
ajema-8175	185	8	b.	b.	PROPN
ajema-8175	185	9	c.	c.	PROPN
ajema-8175	185	10	,	,	PUNCT
ajema-8175	185	11	feit	feit	PROPN
ajema-8175	185	12	,	,	PUNCT
ajema-8175	185	13	m.	m.	NOUN
ajema-8175	185	14	d.	d.	PROPN
ajema-8175	185	15	,	,	PUNCT
ajema-8175	185	16	rubenchik	rubenchik	PROPN
ajema-8175	185	17	,	,	PUNCT
ajema-8175	185	18	a.	a.	NOUN
ajema-8175	185	19	m.	m.	NOUN
ajema-8175	185	20	,	,	PUNCT
ajema-8175	185	21	shore	shore	PROPN
ajema-8175	185	22	,	,	PUNCT
ajema-8175	185	23	b.	b.	PROPN
ajema-8175	185	24	w.	w.	PROPN
ajema-8175	185	25	,	,	PUNCT
ajema-8175	185	26	&	&	CCONJ
ajema-8175	185	27	perry	perry	PROPN
ajema-8175	185	28	,	,	PUNCT
ajema-8175	185	29	m.	m.	PROPN
ajema-8175	185	30	d.	d.	PROPN
ajema-8175	185	31	(	(	PUNCT
ajema-8175	185	32	1995	1995	NUM
ajema-8175	185	33	)	)	PUNCT
ajema-8175	185	34	.	.	PUNCT
ajema-8175	186	1	laserinduced	laserinduced	ADJ
ajema-8175	186	2	damage	damage	NOUN
ajema-8175	186	3	in	in	ADP
ajema-8175	186	4	dielectrics	dielectric	NOUN
ajema-8175	186	5	with	with	ADP
ajema-8175	186	6	nanosecond	nanosecond	NOUN
ajema-8175	186	7	to	to	PART
ajema-8175	186	8	subpicosecond	subpicosecond	NOUN
ajema-8175	186	9	pulses	pulse	NOUN
ajema-8175	186	10	.	.	PUNCT
ajema-8175	187	1	physical	physical	ADJ
ajema-8175	187	2	review	review	NOUN
ajema-8175	187	3	letters	letter	NOUN
ajema-8175	187	4	,	,	PUNCT
ajema-8175	187	5	74(12	74(12	NUM
ajema-8175	187	6	)	)	PUNCT
ajema-8175	187	7	,	,	PUNCT
ajema-8175	187	8	2248–2251	2248–2251	NUM
ajema-8175	187	9	.	.	PUNCT
ajema-8175	188	1	[	[	X
ajema-8175	188	2	https://doi.org/10.1103/physrevlett.74.2248](https://doi.org/10.1103/physrevlett.74.2248	https://doi.org/10.1103/physrevlett.74.2248](https://doi.org/10.1103/physrevlett.74.2248	PROPN
ajema-8175	188	3	)	)	PUNCT
ajema-8175	188	4	3	3	X
ajema-8175	188	5	.	.	X
ajema-8175	188	6	kautek	kautek	PROPN
ajema-8175	188	7	,	,	PUNCT
ajema-8175	188	8	w.	w.	PROPN
ajema-8175	188	9	,	,	PUNCT
ajema-8175	188	10	noll	noll	PROPN
ajema-8175	188	11	,	,	PUNCT
ajema-8175	188	12	r.	r.	PROPN
ajema-8175	188	13	,	,	PUNCT
ajema-8175	188	14	&	&	CCONJ
ajema-8175	188	15	lehar	lehar	PROPN
ajema-8175	188	16	,	,	PUNCT
ajema-8175	188	17	f.	f.	PROPN
ajema-8175	188	18	(	(	PUNCT
ajema-8175	188	19	1994	1994	NUM
ajema-8175	188	20	)	)	PUNCT
ajema-8175	188	21	.	.	PUNCT
ajema-8175	189	1	femtosecond	femtosecond	NOUN
ajema-8175	189	2	laser	laser	NOUN
ajema-8175	189	3	microstructuring	microstructuring	NOUN
ajema-8175	189	4	of	of	ADP
ajema-8175	189	5	thin	thin	ADJ
ajema-8175	189	6	films	film	NOUN
ajema-8175	189	7	for	for	ADP
ajema-8175	189	8	microelectronic	microelectronic	ADJ
ajema-8175	189	9	applications	application	NOUN
ajema-8175	189	10	.	.	PUNCT
ajema-8175	190	1	applied	apply	VERB
ajema-8175	190	2	surface	surface	NOUN
ajema-8175	190	3	science	science	NOUN
ajema-8175	190	4	,	,	PUNCT
ajema-8175	190	5	76	76	NUM
ajema-8175	190	6	-	-	SYM
ajema-8175	190	7	77	77	NUM
ajema-8175	190	8	,	,	PUNCT
ajema-8175	190	9	383–388	383–388	NUM
ajema-8175	190	10	.	.	PUNCT
ajema-8175	191	1	[	[	X
ajema-8175	191	2	https://doi.org/10.1016/0169-4332(94)90372-3](https://doi.org/10.1016/01694332%2894%2990372-3	https://doi.org/10.1016/0169-4332(94)90372-3](https://doi.org/10.1016/01694332%2894%2990372-3	NOUN
ajema-8175	191	3	)	)	PUNCT
ajema-8175	191	4	4	4	NUM
ajema-8175	191	5	.	.	X
ajema-8175	191	6	schaffer	schaffer	PROPN
ajema-8175	191	7	,	,	PUNCT
ajema-8175	191	8	c.	c.	PROPN
ajema-8175	191	9	b.	b.	PROPN
ajema-8175	191	10	,	,	PUNCT
ajema-8175	191	11	brodeur	brodeur	PROPN
ajema-8175	191	12	,	,	PUNCT
ajema-8175	191	13	a.	a.	NOUN
ajema-8175	191	14	,	,	PUNCT
ajema-8175	191	15	&	&	CCONJ
ajema-8175	191	16	mazur	mazur	PROPN
ajema-8175	191	17	,	,	PUNCT
ajema-8175	191	18	e.	e.	PROPN
ajema-8175	191	19	(	(	PUNCT
ajema-8175	191	20	2001	2001	NUM
ajema-8175	191	21	)	)	PUNCT
ajema-8175	191	22	.	.	PUNCT
ajema-8175	192	1	laser	laser	NOUN
ajema-8175	192	2	-	-	PUNCT
ajema-8175	192	3	induced	induce	VERB
ajema-8175	192	4	breakdown	breakdown	NOUN
ajema-8175	192	5	and	and	CCONJ
ajema-8175	192	6	damage	damage	NOUN
ajema-8175	192	7	in	in	ADP
ajema-8175	192	8	bulk	bulk	ADJ
ajema-8175	192	9	transparent	transparent	ADJ
ajema-8175	192	10	materials	material	NOUN
ajema-8175	192	11	induced	induce	VERB
ajema-8175	192	12	by	by	ADP
ajema-8175	192	13	tightly	tightly	ADV
ajema-8175	192	14	focused	focus	VERB
ajema-8175	192	15	femtosecond	femtosecond	NOUN
ajema-8175	192	16	laser	laser	NOUN
ajema-8175	192	17	pulses	pulse	NOUN
ajema-8175	192	18	.	.	PUNCT
ajema-8175	193	1	measurement	measurement	NOUN
ajema-8175	193	2	science	science	NOUN
ajema-8175	193	3	and	and	CCONJ
ajema-8175	193	4	technology	technology	NOUN
ajema-8175	193	5	,	,	PUNCT
ajema-8175	193	6	12(11	12(11	NUM
ajema-8175	193	7	)	)	PUNCT
ajema-8175	193	8	,	,	PUNCT
ajema-8175	193	9	1784–1794	1784–1794	NUM
ajema-8175	193	10	.	.	PUNCT
ajema-8175	194	1	[	[	X
ajema-8175	194	2	https://doi.org/10.1088/09570233/12/11/303](https://doi.org/10.1088/0957-0233/12/11/303	https://doi.org/10.1088/09570233/12/11/303](https://doi.org/10.1088/0957-0233/12/11/303	X
ajema-8175	194	3	)	)	PUNCT
ajema-8175	194	4	5	5	NUM
ajema-8175	194	5	.	.	X
ajema-8175	194	6	sugioka	sugioka	PROPN
ajema-8175	194	7	,	,	PUNCT
ajema-8175	194	8	k.	k.	PROPN
ajema-8175	194	9	,	,	PUNCT
ajema-8175	194	10	&	&	CCONJ
ajema-8175	194	11	cheng	cheng	PROPN
ajema-8175	194	12	,	,	PUNCT
ajema-8175	194	13	y.	y.	PROPN
ajema-8175	194	14	(	(	PUNCT
ajema-8175	194	15	2014	2014	NUM
ajema-8175	194	16	)	)	PUNCT
ajema-8175	194	17	.	.	PUNCT
ajema-8175	195	1	ultrafast	ultrafast	ADJ
ajema-8175	195	2	lasers	laser	NOUN
ajema-8175	195	3	—	—	PUNCT
ajema-8175	195	4	reliable	reliable	ADJ
ajema-8175	195	5	tools	tool	NOUN
ajema-8175	195	6	for	for	ADP
ajema-8175	195	7	advanced	advanced	ADJ
ajema-8175	195	8	materials	material	NOUN
ajema-8175	195	9	processing	processing	NOUN
ajema-8175	195	10	.	.	PUNCT
ajema-8175	196	1	light	light	NOUN
ajema-8175	196	2	:	:	PUNCT
ajema-8175	196	3	science	science	NOUN
ajema-8175	196	4	&	&	CCONJ
ajema-8175	196	5	applications	application	NOUN
ajema-8175	196	6	,	,	PUNCT
ajema-8175	196	7	3(4	3(4	NUM
ajema-8175	196	8	)	)	PUNCT
ajema-8175	196	9	,	,	PUNCT
ajema-8175	196	10	e149	e149	NUM
ajema-8175	196	11	.	.	PUNCT
ajema-8175	197	1	[	[	X
ajema-8175	197	2	https://doi.org/10.1038/lsa.2014.43](https://doi.org/10.1038/lsa.2014.43	https://doi.org/10.1038/lsa.2014.43](https://doi.org/10.1038/lsa.2014.43	X
ajema-8175	197	3	)	)	PUNCT
ajema-8175	197	4	6	6	NUM
ajema-8175	197	5	.	.	X
ajema-8175	197	6	pronko	pronko	NOUN
ajema-8175	197	7	,	,	PUNCT
ajema-8175	197	8	p.	p.	PROPN
ajema-8175	197	9	p.	p.	NOUN
ajema-8175	197	10	,	,	PUNCT
ajema-8175	197	11	weiner	weiner	NOUN
ajema-8175	197	12	,	,	PUNCT
ajema-8175	197	13	a.	a.	NOUN
ajema-8175	197	14	m.	m.	NOUN
ajema-8175	197	15	,	,	PUNCT
ajema-8175	197	16	fritz	fritz	PROPN
ajema-8175	197	17	,	,	PUNCT
ajema-8175	197	18	j.	j.	PROPN
ajema-8175	197	19	r.	r.	PROPN
ajema-8175	197	20	,	,	PUNCT
ajema-8175	197	21	backus	backus	PROPN
ajema-8175	197	22	,	,	PUNCT
ajema-8175	197	23	s.	s.	PROPN
ajema-8175	197	24	,	,	PUNCT
ajema-8175	197	25	&	&	CCONJ
ajema-8175	197	26	miller	miller	PROPN
ajema-8175	197	27	,	,	PUNCT
ajema-8175	197	28	r.	r.	PROPN
ajema-8175	197	29	j.	j.	PROPN
ajema-8175	197	30	d.	d.	PROPN
ajema-8175	197	31	(	(	PUNCT
ajema-8175	197	32	1995	1995	NUM
ajema-8175	197	33	)	)	PUNCT
ajema-8175	197	34	.	.	PUNCT
ajema-8175	198	1	ultrafast	ultrafast	ADJ
ajema-8175	198	2	laser	laser	NOUN
ajema-8175	198	3	machining	machining	NOUN
ajema-8175	198	4	of	of	ADP
ajema-8175	198	5	materials	material	NOUN
ajema-8175	198	6	with	with	ADP
ajema-8175	198	7	femtosecond	femtosecond	NOUN
ajema-8175	198	8	pulses	pulse	NOUN
ajema-8175	198	9	.	.	PUNCT
ajema-8175	199	1	optics	optic	NOUN
ajema-8175	199	2	letters	letter	NOUN
ajema-8175	199	3	,	,	PUNCT
ajema-8175	199	4	20(12	20(12	NUM
ajema-8175	199	5	)	)	PUNCT
ajema-8175	199	6	,	,	PUNCT
ajema-8175	199	7	1315–1317	1315–1317	NUM
ajema-8175	199	8	.	.	PUNCT
ajema-8175	200	1	[	[	X
ajema-8175	200	2	https://doi.org/10.1364/ol.20.001315](https://doi.org/10.1364/ol.20.001315	https://doi.org/10.1364/ol.20.001315](https://doi.org/10.1364/ol.20.001315	NOUN
ajema-8175	200	3	)	)	PUNCT
ajema-8175	200	4	7	7	NUM
ajema-8175	200	5	.	.	X
ajema-8175	201	1	gattass	gattass	PROPN
ajema-8175	201	2	,	,	PUNCT
ajema-8175	201	3	r.	r.	PROPN
ajema-8175	201	4	r.	r.	PROPN
ajema-8175	201	5	,	,	PUNCT
ajema-8175	201	6	&	&	CCONJ
ajema-8175	201	7	mazur	mazur	PROPN
ajema-8175	201	8	,	,	PUNCT
ajema-8175	201	9	e.	e.	PROPN
ajema-8175	201	10	(	(	PUNCT
ajema-8175	201	11	2008	2008	NUM
ajema-8175	201	12	)	)	PUNCT
ajema-8175	201	13	.	.	PUNCT
ajema-8175	202	1	femtosecond	femtosecond	NOUN
ajema-8175	202	2	laser	laser	NOUN
ajema-8175	202	3	micromachining	micromachine	VERB
ajema-8175	202	4	in	in	ADP
ajema-8175	202	5	transparent	transparent	ADJ
ajema-8175	202	6	materials	material	NOUN
ajema-8175	202	7	.	.	PUNCT
ajema-8175	203	1	nature	nature	NOUN
ajema-8175	203	2	photonics	photonic	NOUN
ajema-8175	203	3	,	,	PUNCT
ajema-8175	203	4	2(4	2(4	NUM
ajema-8175	203	5	)	)	PUNCT
ajema-8175	203	6	,	,	PUNCT
ajema-8175	203	7	219–225	219–225	NUM
ajema-8175	203	8	.	.	PUNCT
ajema-8175	204	1	[	[	X
ajema-8175	204	2	https://doi.org/10.1038/nphoton.2008.47](https://doi.org/10.1038/nphoton.2008.47	https://doi.org/10.1038/nphoton.2008.47](https://doi.org/10.1038/nphoton.2008.47	NOUN
ajema-8175	204	3	)	)	PUNCT
ajema-8175	204	4	8	8	NUM
ajema-8175	204	5	.	.	PUNCT
ajema-8175	204	6	kerse	kerse	PROPN
ajema-8175	204	7	,	,	PUNCT
ajema-8175	204	8	c.	c.	PROPN
ajema-8175	204	9	,	,	PUNCT
ajema-8175	204	10	kalaycıoğlu	kalaycıoğlu	PROPN
ajema-8175	204	11	,	,	PUNCT
ajema-8175	204	12	h.	h.	PROPN
ajema-8175	204	13	,	,	PUNCT
ajema-8175	204	14	elahi	elahi	PROPN
ajema-8175	204	15	,	,	PUNCT
ajema-8175	204	16	p.	p.	PROPN
ajema-8175	204	17	,	,	PUNCT
ajema-8175	204	18	roth	roth	PROPN
ajema-8175	204	19	,	,	PUNCT
ajema-8175	204	20	n.	n.	NOUN
ajema-8175	204	21	,	,	PUNCT
ajema-8175	204	22	vázquez	vázquez	NOUN
ajema-8175	204	23	de	de	X
ajema-8175	204	24	aldana	aldana	PROPN
ajema-8175	204	25	,	,	PUNCT
ajema-8175	204	26	j.	j.	PROPN
ajema-8175	204	27	r.	r.	PROPN
ajema-8175	204	28	,	,	PUNCT
ajema-8175	204	29	garcía	garcía	NOUN
ajema-8175	204	30	-	-	PUNCT
ajema-8175	204	31	lechuga	lechuga	NOUN
ajema-8175	204	32	,	,	PUNCT
ajema-8175	204	33	m.	m.	NOUN
ajema-8175	204	34	,	,	PUNCT
ajema-8175	204	35	solis	solis	PROPN
ajema-8175	204	36	,	,	PUNCT
ajema-8175	204	37	j.	j.	PROPN
ajema-8175	204	38	,	,	PUNCT
ajema-8175	204	39	&	&	CCONJ
ajema-8175	204	40	hernández	hernández	PROPN
ajema-8175	204	41	-	-	PUNCT
ajema-8175	204	42	garcía	garcía	ADJ
ajema-8175	204	43	,	,	PUNCT
ajema-8175	204	44	c.	c.	NOUN
ajema-8175	204	45	(	(	PUNCT
ajema-8175	204	46	2016	2016	NUM
ajema-8175	204	47	)	)	PUNCT
ajema-8175	204	48	.	.	PUNCT
ajema-8175	205	1	ablation	ablation	NOUN
ajema-8175	205	2	-	-	PUNCT
ajema-8175	205	3	cooled	cool	VERB
ajema-8175	205	4	material	material	NOUN
ajema-8175	205	5	removal	removal	NOUN
ajema-8175	205	6	with	with	ADP
ajema-8175	205	7	ultrafast	ultrafast	ADJ
ajema-8175	205	8	bursts	burst	NOUN
ajema-8175	205	9	of	of	ADP
ajema-8175	205	10	pulses	pulse	NOUN
ajema-8175	205	11	.	.	PUNCT
ajema-8175	206	1	nature	nature	NOUN
ajema-8175	206	2	,	,	PUNCT
ajema-8175	206	3	537(7618	537(7618	NUM
ajema-8175	206	4	)	)	PUNCT
ajema-8175	206	5	,	,	PUNCT
ajema-8175	206	6	84–88	84–88	NUM
ajema-8175	206	7	.	.	PUNCT
ajema-8175	207	1	[	[	X
ajema-8175	207	2	https://doi.org/10.1038/nature18686](https://doi.org/10.1038/nature18686	https://doi.org/10.1038/nature18686](https://doi.org/10.1038/nature18686	NUM
ajema-8175	207	3	)	)	PUNCT
ajema-8175	207	4	9	9	NUM
ajema-8175	207	5	.	.	X
ajema-8175	207	6	zimmermann	zimmermann	PROPN
ajema-8175	207	7	,	,	PUNCT
ajema-8175	207	8	m.	m.	NOUN
ajema-8175	207	9	,	,	PUNCT
ajema-8175	207	10	rellinghaus	rellinghaus	PROPN
ajema-8175	207	11	,	,	PUNCT
ajema-8175	207	12	b.	b.	PROPN
ajema-8175	207	13	,	,	PUNCT
ajema-8175	207	14	&	&	CCONJ
ajema-8175	207	15	weidner	weidner	PROPN
ajema-8175	207	16	,	,	PUNCT
ajema-8175	207	17	d.	d.	PROPN
ajema-8175	207	18	(	(	PUNCT
ajema-8175	207	19	2014	2014	NUM
ajema-8175	207	20	)	)	PUNCT
ajema-8175	207	21	.	.	PUNCT
ajema-8175	208	1	femtosecond	femtosecond	NOUN
ajema-8175	208	2	laser	laser	NOUN
ajema-8175	208	3	micromachining	micromachining	NOUN
ajema-8175	208	4	of	of	ADP
ajema-8175	208	5	gaas	gaas	NOUN
ajema-8175	208	6	:	:	PUNCT
ajema-8175	208	7	reduction	reduction	NOUN
ajema-8175	208	8	of	of	ADP
ajema-8175	208	9	microcracks	microcrack	NOUN
ajema-8175	208	10	and	and	CCONJ
ajema-8175	208	11	enhanced	enhance	VERB
ajema-8175	208	12	etch	etch	NOUN
ajema-8175	208	13	selectivity	selectivity	NOUN
ajema-8175	208	14	.	.	PUNCT
ajema-8175	209	1	applied	apply	VERB
ajema-8175	209	2	physics	physics	PROPN
ajema-8175	209	3	a	a	PRON
ajema-8175	209	4	,	,	PUNCT
ajema-8175	209	5	115(4	115(4	NUM
ajema-8175	209	6	)	)	PUNCT
ajema-8175	209	7	,	,	PUNCT
ajema-8175	209	8	1041–1047	1041–1047	NUM
ajema-8175	209	9	.	.	PUNCT
ajema-8175	210	1	[	[	X
ajema-8175	210	2	https://doi.org/10.1007/s00339-013-80200](https://doi.org/10.1007/s00339-013-8020-0	https://doi.org/10.1007/s00339-013-80200](https://doi.org/10.1007/s00339-013-8020-0	NOUN
ajema-8175	210	3	)	)	PUNCT
ajema-8175	210	4	10	10	NUM
ajema-8175	210	5	.	.	PUNCT
ajema-8175	211	1	keller	keller	PROPN
ajema-8175	211	2	,	,	PUNCT
ajema-8175	211	3	u.	u.	PROPN
ajema-8175	211	4	,	,	PUNCT
ajema-8175	211	5	acker	acker	PROPN
ajema-8175	211	6	,	,	PUNCT
ajema-8175	211	7	j.	j.	PROPN
ajema-8175	211	8	,	,	PUNCT
ajema-8175	211	9	&	&	CCONJ
ajema-8175	211	10	saraceno	saraceno	PROPN
ajema-8175	211	11	,	,	PUNCT
ajema-8175	211	12	c.	c.	PROPN
ajema-8175	211	13	(	(	PUNCT
ajema-8175	211	14	2003	2003	NUM
ajema-8175	211	15	)	)	PUNCT
ajema-8175	211	16	.	.	PUNCT
ajema-8175	212	1	high	high	ADJ
ajema-8175	212	2	-	-	PUNCT
ajema-8175	212	3	precision	precision	NOUN
ajema-8175	212	4	femtosecond	femtosecond	NOUN
ajema-8175	212	5	laser	laser	NOUN
ajema-8175	212	6	micromachining	micromachining	NOUN
ajema-8175	212	7	of	of	ADP
ajema-8175	212	8	polymers	polymer	NOUN
ajema-8175	212	9	.	.	PUNCT
ajema-8175	213	1	applied	apply	VERB
ajema-8175	213	2	physics	physics	PROPN
ajema-8175	213	3	b	b	PROPN
ajema-8175	213	4	,	,	PUNCT
ajema-8175	213	5	76(1	76(1	PROPN
ajema-8175	213	6	)	)	PUNCT
ajema-8175	213	7	,	,	PUNCT
ajema-8175	213	8	73–78	73–78	NUM
ajema-8175	213	9	.	.	PUNCT
ajema-8175	214	1	[	[	X
ajema-8175	214	2	https://doi.org/10.1007/s00340-002-1072-6](https://doi.org/10.1007/s00340-002-1072-6	https://doi.org/10.1007/s00340-002-1072-6](https://doi.org/10.1007/s00340-002-1072-6	X
ajema-8175	214	3	)	)	PUNCT
ajema-8175	214	4	11	11	NUM
ajema-8175	214	5	.	.	PUNCT
ajema-8175	214	6	nolte	nolte	PROPN
ajema-8175	214	7	,	,	PUNCT
ajema-8175	214	8	s.	s.	PROPN
ajema-8175	214	9	,	,	PUNCT
ajema-8175	214	10	will	will	AUX
ajema-8175	214	11	,	,	PUNCT
ajema-8175	214	12	m.	m.	NOUN
ajema-8175	214	13	,	,	PUNCT
ajema-8175	214	14	burghoff	burghoff	NOUN
ajema-8175	214	15	,	,	PUNCT
ajema-8175	214	16	j.	j.	PROPN
ajema-8175	214	17	,	,	PUNCT
ajema-8175	214	18	&	&	CCONJ
ajema-8175	214	19	tünnermann	tünnermann	PROPN
ajema-8175	214	20	,	,	PUNCT
ajema-8175	214	21	a.	a.	NOUN
ajema-8175	214	22	(	(	PUNCT
ajema-8175	214	23	2003	2003	NUM
ajema-8175	214	24	)	)	PUNCT
ajema-8175	214	25	.	.	PUNCT
ajema-8175	215	1	femtosecond	femtosecond	VERB
ajema-8175	215	2	waveguide	waveguide	ADJ
ajema-8175	215	3	writing	writing	NOUN
ajema-8175	215	4	:	:	PUNCT
ajema-8175	215	5	a	a	DET
ajema-8175	215	6	new	new	ADJ
ajema-8175	215	7	avenue	avenue	NOUN
ajema-8175	215	8	to	to	ADP
ajema-8175	215	9	three	three	NUM
ajema-8175	215	10	-	-	PUNCT
ajema-8175	215	11	dimensional	dimensional	ADJ
ajema-8175	215	12	integrated	integrated	ADJ
ajema-8175	215	13	optics	optic	NOUN
ajema-8175	215	14	.	.	PUNCT
ajema-8175	216	1	applied	apply	VERB
ajema-8175	216	2	physics	physics	PROPN
ajema-8175	216	3	a	a	NOUN
ajema-8175	216	4	,	,	PUNCT
ajema-8175	216	5	77(1	77(1	NOUN
ajema-8175	216	6	)	)	PUNCT
ajema-8175	216	7	,	,	PUNCT
ajema-8175	216	8	109–111	109–111	NUM
ajema-8175	216	9	.	.	PUNCT
ajema-8175	217	1	[	[	X
ajema-8175	217	2	https://doi.org/10.1007/s00339-003-2020-4](https://doi.org/10.1007/s00339-0032020-4	https://doi.org/10.1007/s00339-003-2020-4](https://doi.org/10.1007/s00339-0032020-4	NOUN
ajema-8175	217	3	)	)	PUNCT
ajema-8175	217	4	12	12	NUM
ajema-8175	217	5	.	.	PUNCT
ajema-8175	218	1	borowiec	borowiec	PROPN
ajema-8175	218	2	,	,	PUNCT
ajema-8175	218	3	a.	a.	NOUN
ajema-8175	218	4	,	,	PUNCT
ajema-8175	218	5	nasilowski	nasilowski	PROPN
ajema-8175	218	6	,	,	PUNCT
ajema-8175	218	7	j.	j.	PROPN
ajema-8175	218	8	,	,	PUNCT
ajema-8175	218	9	&	&	CCONJ
ajema-8175	218	10	pauliukaitis	pauliukaitis	PROPN
ajema-8175	218	11	,	,	PUNCT
ajema-8175	218	12	s.	s.	PROPN
ajema-8175	218	13	(	(	PUNCT
ajema-8175	218	14	2017	2017	NUM
ajema-8175	218	15	)	)	PUNCT
ajema-8175	218	16	.	.	PUNCT
ajema-8175	219	1	ultrashort	ultrashort	PROPN
ajema-8175	219	2	pulse	pulse	NOUN
ajema-8175	219	3	laser	laser	NOUN
ajema-8175	219	4	processing	processing	NOUN
ajema-8175	219	5	of	of	ADP
ajema-8175	219	6	electronic	electronic	ADJ
ajema-8175	219	7	materials	material	NOUN
ajema-8175	219	8	:	:	PUNCT
ajema-8175	219	9	challenges	challenge	NOUN
ajema-8175	219	10	and	and	CCONJ
ajema-8175	219	11	solutions	solution	NOUN
ajema-8175	219	12	.	.	PUNCT
ajema-8175	220	1	journal	journal	PROPN
ajema-8175	220	2	of	of	ADP
ajema-8175	220	3	laser	laser	NOUN
ajema-8175	220	4	applications	application	NOUN
ajema-8175	220	5	,	,	PUNCT
ajema-8175	220	6	29(4	29(4	NOUN
ajema-8175	220	7	)	)	PUNCT
ajema-8175	220	8	,	,	PUNCT
ajema-8175	220	9	042011	042011	NUM
ajema-8175	220	10	.	.	PUNCT
ajema-8175	221	1	[	[	X
ajema-8175	221	2	https://doi.org/10.2351/1.4983572](https://doi.org/10.2351/1.4983572	https://doi.org/10.2351/1.4983572](https://doi.org/10.2351/1.4983572	NOUN
ajema-8175	221	3	)	)	PUNCT
ajema-8175	221	4	13	13	NUM
ajema-8175	221	5	.	.	PUNCT
ajema-8175	221	6	chichkov	chichkov	PROPN
ajema-8175	221	7	,	,	PUNCT
ajema-8175	221	8	b.	b.	PROPN
ajema-8175	221	9	n.	n.	PROPN
ajema-8175	221	10	,	,	PUNCT
ajema-8175	221	11	momma	momma	PROPN
ajema-8175	221	12	,	,	PUNCT
ajema-8175	221	13	c.	c.	PROPN
ajema-8175	221	14	,	,	PUNCT
ajema-8175	221	15	nolte	nolte	PROPN
ajema-8175	221	16	,	,	PUNCT
ajema-8175	221	17	s.	s.	PROPN
ajema-8175	221	18	,	,	PUNCT
ajema-8175	221	19	&	&	CCONJ
ajema-8175	221	20	tünnermann	tünnermann	PROPN
ajema-8175	221	21	,	,	PUNCT
ajema-8175	221	22	a.	a.	NOUN
ajema-8175	221	23	(	(	PUNCT
ajema-8175	221	24	1997	1997	NUM
ajema-8175	221	25	)	)	PUNCT
ajema-8175	221	26	.	.	PUNCT
ajema-8175	222	1	femtosecond	femtosecond	NOUN
ajema-8175	222	2	laser	laser	NOUN
ajema-8175	222	3	ablation	ablation	NOUN
ajema-8175	222	4	of	of	ADP
ajema-8175	222	5	dielectrics	dielectric	NOUN
ajema-8175	222	6	.	.	PUNCT
ajema-8175	223	1	applied	apply	VERB
ajema-8175	223	2	physics	physics	PROPN
ajema-8175	223	3	a	a	PRON
ajema-8175	223	4	,	,	PUNCT
ajema-8175	223	5	65(2	65(2	NOUN
ajema-8175	223	6	)	)	PUNCT
ajema-8175	223	7	,	,	PUNCT
ajema-8175	223	8	187–196	187–196	NUM
ajema-8175	223	9	.	.	PUNCT
ajema-8175	224	1	[	[	X
ajema-8175	224	2	https://doi.org/10.1007/s003390050311](https://doi.org/10.1007/s003390050311	https://doi.org/10.1007/s003390050311](https://doi.org/10.1007/s003390050311	NOUN
ajema-8175	224	3	)	)	PUNCT
ajema-8175	224	4	76	76	NUM
ajema-8175	224	5	journal	journal	NOUN
ajema-8175	224	6	of	of	ADP
ajema-8175	224	7	engineering	engineering	NOUN
ajema-8175	224	8	,	,	PUNCT
ajema-8175	224	9	mechanics	mechanic	NOUN
ajema-8175	224	10	and	and	CCONJ
ajema-8175	224	11	architecture	architecture	NOUN
ajema-8175	224	12	www	www	NOUN
ajema-8175	224	13	.	.	PUNCT
ajema-8175	224	14	grnjournal.us	grnjournal.us	X
ajema-8175	224	15	14	14	NUM
ajema-8175	224	16	.	.	PUNCT
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ajema-8175	225	2	,	,	PUNCT
ajema-8175	225	3	p.	p.	PROPN
ajema-8175	225	4	g.	g.	PROPN
ajema-8175	225	5	,	,	PUNCT
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ajema-8175	225	7	,	,	PUNCT
ajema-8175	225	8	y.	y.	PROPN
ajema-8175	225	9	,	,	PUNCT
ajema-8175	225	10	dergachev	dergachev	PROPN
ajema-8175	225	11	,	,	PUNCT
ajema-8175	225	12	v.	v.	PROPN
ajema-8175	225	13	a.	a.	NOUN
ajema-8175	225	14	,	,	PUNCT
ajema-8175	225	15	othonos	othono	NOUN
ajema-8175	225	16	,	,	PUNCT
ajema-8175	225	17	a.	a.	NOUN
ajema-8175	225	18	,	,	PUNCT
ajema-8175	225	19	&	&	CCONJ
ajema-8175	225	20	glebov	glebov	PROPN
ajema-8175	225	21	,	,	PUNCT
ajema-8175	225	22	l.	l.	PROPN
ajema-8175	225	23	b.	b.	PROPN
ajema-8175	225	24	(	(	PUNCT
ajema-8175	225	25	2006	2006	NUM
ajema-8175	225	26	)	)	PUNCT
ajema-8175	225	27	.	.	PUNCT
ajema-8175	226	1	ultrafast	ultrafast	ADJ
ajema-8175	226	2	laser	laser	NOUN
ajema-8175	226	3	-	-	PUNCT
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ajema-8175	226	7	electronic	electronic	ADJ
ajema-8175	226	8	materials	material	NOUN
ajema-8175	226	9	.	.	PUNCT
ajema-8175	227	1	optics	optic	NOUN
ajema-8175	227	2	express	express	VERB
ajema-8175	227	3	,	,	PUNCT
ajema-8175	227	4	14(18	14(18	NUM
ajema-8175	227	5	)	)	PUNCT
ajema-8175	227	6	,	,	PUNCT
ajema-8175	227	7	8201–8206	8201–8206	NUM
ajema-8175	227	8	.	.	PUNCT
ajema-8175	228	1	[	[	X
ajema-8175	228	2	https://doi.org/10.1364/oe.14.008201](https://doi.org/10.1364/oe.14.008201	https://doi.org/10.1364/oe.14.008201](https://doi.org/10.1364/oe.14.008201	NOUN
ajema-8175	228	3	)	)	PUNCT
ajema-8175	228	4	15	15	NUM
ajema-8175	228	5	.	.	PUNCT
ajema-8175	228	6	chichkov	chichkov	PROPN
ajema-8175	228	7	,	,	PUNCT
ajema-8175	228	8	b.	b.	PROPN
ajema-8175	228	9	n.	n.	PROPN
ajema-8175	228	10	,	,	PUNCT
ajema-8175	228	11	momma	momma	PROPN
ajema-8175	228	12	,	,	PUNCT
ajema-8175	228	13	c.	c.	PROPN
ajema-8175	228	14	,	,	PUNCT
ajema-8175	228	15	nolte	nolte	PROPN
ajema-8175	228	16	,	,	PUNCT
ajema-8175	228	17	s.	s.	PROPN
ajema-8175	228	18	,	,	PUNCT
ajema-8175	228	19	&	&	CCONJ
ajema-8175	228	20	tünnermann	tünnermann	PROPN
ajema-8175	228	21	,	,	PUNCT
ajema-8175	228	22	a.	a.	NOUN
ajema-8175	228	23	(	(	PUNCT
ajema-8175	228	24	1999	1999	NUM
ajema-8175	228	25	)	)	PUNCT
ajema-8175	228	26	.	.	PUNCT
ajema-8175	229	1	ultrafast	ultrafast	ADJ
ajema-8175	229	2	laser	laser	NOUN
ajema-8175	229	3	processing	processing	NOUN
ajema-8175	229	4	:	:	PUNCT
ajema-8175	229	5	fundamentals	fundamental	NOUN
ajema-8175	229	6	and	and	CCONJ
ajema-8175	229	7	applications	application	NOUN
ajema-8175	229	8	.	.	PUNCT
ajema-8175	230	1	applied	apply	VERB
ajema-8175	230	2	physics	physics	PROPN
ajema-8175	230	3	a	a	NOUN
ajema-8175	230	4	,	,	PUNCT
ajema-8175	230	5	68(1	68(1	NOUN
ajema-8175	230	6	)	)	PUNCT
ajema-8175	230	7	,	,	PUNCT
ajema-8175	230	8	1–9	1–9	NOUN
ajema-8175	230	9	.	.	PUNCT
ajema-8175	231	1	[	[	X
ajema-8175	231	2	https://doi.org/10.1007/s003390050794](https://doi.org/10.1007/s003390050794	https://doi.org/10.1007/s003390050794](https://doi.org/10.1007/s003390050794	X
ajema-8175	231	3	)	)	PUNCT
ajema-8175	231	4	16	16	NUM
ajema-8175	231	5	.	.	PUNCT
ajema-8175	232	1	nolte	nolte	PROPN
ajema-8175	232	2	,	,	PUNCT
ajema-8175	232	3	s.	s.	PROPN
ajema-8175	232	4	,	,	PUNCT
ajema-8175	232	5	momma	momma	PROPN
ajema-8175	232	6	,	,	PUNCT
ajema-8175	232	7	c.	c.	PROPN
ajema-8175	232	8	,	,	PUNCT
ajema-8175	232	9	jacobs	jacobs	PROPN
ajema-8175	232	10	,	,	PUNCT
ajema-8175	232	11	h.	h.	PROPN
ajema-8175	232	12	,	,	PUNCT
ajema-8175	232	13	tünnermann	tünnermann	PROPN
ajema-8175	232	14	,	,	PUNCT
ajema-8175	232	15	a.	a.	NOUN
ajema-8175	232	16	,	,	PUNCT
ajema-8175	232	17	chichkov	chichkov	PROPN
ajema-8175	232	18	,	,	PUNCT
ajema-8175	232	19	b.	b.	PROPN
ajema-8175	232	20	,	,	PUNCT
ajema-8175	232	21	wellegehausen	wellegehausen	PROPN
ajema-8175	232	22	,	,	PUNCT
ajema-8175	232	23	b.	b.	PROPN
ajema-8175	232	24	,	,	PUNCT
ajema-8175	232	25	&	&	CCONJ
ajema-8175	232	26	welling	welling	PROPN
ajema-8175	232	27	,	,	PUNCT
ajema-8175	232	28	h.	h.	PROPN
ajema-8175	232	29	(	(	PUNCT
ajema-8175	232	30	1997	1997	NUM
ajema-8175	232	31	)	)	PUNCT
ajema-8175	232	32	.	.	PUNCT
ajema-8175	233	1	ablation	ablation	NOUN
ajema-8175	233	2	of	of	ADP
ajema-8175	233	3	metals	metal	NOUN
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ajema-8175	233	5	ultrashort	ultrashort	NOUN
ajema-8175	233	6	laser	laser	NOUN
ajema-8175	233	7	pulses	pulse	NOUN
ajema-8175	233	8	.	.	PUNCT
ajema-8175	234	1	journal	journal	NOUN
ajema-8175	234	2	of	of	ADP
ajema-8175	234	3	the	the	DET
ajema-8175	234	4	optical	optical	ADJ
ajema-8175	234	5	society	society	NOUN
ajema-8175	234	6	of	of	ADP
ajema-8175	234	7	america	america	PROPN
ajema-8175	234	8	b	b	PROPN
ajema-8175	234	9	,	,	PUNCT
ajema-8175	234	10	14(10	14(10	NUM
ajema-8175	234	11	)	)	PUNCT
ajema-8175	234	12	,	,	PUNCT
ajema-8175	234	13	2716–2722	2716–2722	NUM
ajema-8175	234	14	.	.	PUNCT
ajema-8175	235	1	[	[	X
ajema-8175	235	2	https://doi.org/10.1364/josab.14.002716](https://doi.org/10.1364/josab.14.002716	https://doi.org/10.1364/josab.14.002716](https://doi.org/10.1364/josab.14.002716	NOUN
ajema-8175	235	3	)	)	PUNCT
ajema-8175	235	4	17	17	NUM
ajema-8175	235	5	.	.	PUNCT
ajema-8175	235	6	vorobyev	vorobyev	PROPN
ajema-8175	235	7	,	,	PUNCT
ajema-8175	235	8	a.	a.	NOUN
ajema-8175	235	9	y.	y.	PROPN
ajema-8175	235	10	,	,	PUNCT
ajema-8175	235	11	&	&	CCONJ
ajema-8175	235	12	guo	guo	PROPN
ajema-8175	235	13	,	,	PUNCT
ajema-8175	235	14	c.	c.	PROPN
ajema-8175	235	15	(	(	PUNCT
ajema-8175	235	16	2009	2009	NUM
ajema-8175	235	17	)	)	PUNCT
ajema-8175	235	18	.	.	PUNCT
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ajema-8175	236	2	femtosecond	femtosecond	NOUN
ajema-8175	236	3	laser	laser	NOUN
ajema-8175	236	4	surface	surface	NOUN
ajema-8175	236	5	nano	nano	NOUN
ajema-8175	236	6	/	/	SYM
ajema-8175	236	7	microstructuring	microstructuring	NOUN
ajema-8175	236	8	and	and	CCONJ
ajema-8175	236	9	its	its	PRON
ajema-8175	236	10	applications	application	NOUN
ajema-8175	236	11	.	.	PUNCT
ajema-8175	237	1	laser	laser	PROPN
ajema-8175	237	2	&	&	CCONJ
ajema-8175	237	3	photonics	photonics	PROPN
ajema-8175	237	4	reviews	review	NOUN
ajema-8175	237	5	,	,	PUNCT
ajema-8175	237	6	7(3	7(3	NUM
ajema-8175	237	7	)	)	PUNCT
ajema-8175	237	8	,	,	PUNCT
ajema-8175	237	9	385–407	385–407	NUM
ajema-8175	237	10	.	.	PUNCT
ajema-8175	238	1	[	[	X
ajema-8175	238	2	https://doi.org/10.1002/lpor.200810036](https://doi.org/10.1002/lpor.200810036	https://doi.org/10.1002/lpor.200810036](https://doi.org/10.1002/lpor.200810036	X
ajema-8175	238	3	)	)	PUNCT
ajema-8175	238	4	18	18	NUM
ajema-8175	238	5	.	.	PUNCT
ajema-8175	239	1	wang	wang	PROPN
ajema-8175	239	2	,	,	PUNCT
ajema-8175	239	3	x.	x.	PROPN
ajema-8175	239	4	,	,	PUNCT
ajema-8175	239	5	&	&	CCONJ
ajema-8175	239	6	qian	qian	PROPN
ajema-8175	239	7	,	,	PUNCT
ajema-8175	239	8	s.	s.	PROPN
ajema-8175	239	9	(	(	PUNCT
ajema-8175	239	10	2012	2012	NUM
ajema-8175	239	11	)	)	PUNCT
ajema-8175	239	12	.	.	PUNCT
ajema-8175	240	1	ultrafast	ultrafast	ADJ
ajema-8175	240	2	laser	laser	NOUN
ajema-8175	240	3	micromachining	micromachining	NOUN
ajema-8175	240	4	:	:	PUNCT
ajema-8175	240	5	recent	recent	ADJ
ajema-8175	240	6	developments	development	NOUN
ajema-8175	240	7	and	and	CCONJ
ajema-8175	240	8	applications	application	NOUN
ajema-8175	240	9	.	.	PUNCT
ajema-8175	241	1	advanced	advanced	ADJ
ajema-8175	241	2	materials	material	NOUN
ajema-8175	241	3	research	research	NOUN
ajema-8175	241	4	,	,	PUNCT
ajema-8175	241	5	560	560	NUM
ajema-8175	241	6	,	,	PUNCT
ajema-8175	241	7	112–115	112–115	NUM
ajema-8175	241	8	.	.	PUNCT
ajema-8175	242	1	[	[	X
ajema-8175	242	2	https://doi.org/10.4028/www.scientific.net/amr.560.112](https://doi.org/10.4028/www.scie	https://doi.org/10.4028/www.scientific.net/amr.560.112](https://doi.org/10.4028/www.scie	X
ajema-8175	242	3	ntific.net/amr.560.112	ntific.net/amr.560.112	ADJ
ajema-8175	242	4	)	)	PUNCT
ajema-8175	242	5	19	19	NUM
ajema-8175	242	6	.	.	PUNCT
ajema-8175	243	1	meyer	meyer	PROPN
ajema-8175	243	2	,	,	PUNCT
ajema-8175	243	3	t.	t.	PROPN
ajema-8175	243	4	,	,	PUNCT
ajema-8175	243	5	et	et	PROPN
ajema-8175	243	6	al	al	PROPN
ajema-8175	243	7	.	.	PUNCT
ajema-8175	243	8	(	(	PUNCT
ajema-8175	243	9	2010	2010	NUM
ajema-8175	243	10	)	)	PUNCT
ajema-8175	243	11	.	.	PUNCT
ajema-8175	244	1	high	high	ADJ
ajema-8175	244	2	-	-	PUNCT
ajema-8175	244	3	repetition	repetition	NOUN
ajema-8175	244	4	-	-	PUNCT
ajema-8175	244	5	rate	rate	NOUN
ajema-8175	244	6	femtosecond	femtosecond	NOUN
ajema-8175	244	7	laser	laser	NOUN
ajema-8175	244	8	micromachining	micromachining	NOUN
ajema-8175	244	9	of	of	ADP
ajema-8175	244	10	polymers	polymer	NOUN
ajema-8175	244	11	for	for	ADP
ajema-8175	244	12	flexible	flexible	ADJ
ajema-8175	244	13	electronics	electronic	NOUN
ajema-8175	244	14	.	.	PUNCT
ajema-8175	245	1	applied	apply	VERB
ajema-8175	245	2	physics	physics	PROPN
ajema-8175	245	3	a	a	PRON
ajema-8175	245	4	,	,	PUNCT
ajema-8175	245	5	100(1	100(1	NUM
ajema-8175	245	6	)	)	PUNCT
ajema-8175	245	7	,	,	PUNCT
ajema-8175	245	8	101–107	101–107	NUM
ajema-8175	245	9	.	.	PUNCT
ajema-8175	246	1	[	[	X
ajema-8175	246	2	https://doi.org/10.1007/s00339-010-5913-1](https://doi.org/10.1007/s00339-010-5913-1	https://doi.org/10.1007/s00339-010-5913-1](https://doi.org/10.1007/s00339-010-5913-1	X
ajema-8175	246	3	)	)	PUNCT
ajema-8175	246	4	20	20	NUM
ajema-8175	246	5	.	.	PUNCT
ajema-8175	247	1	nolte	nolte	PROPN
ajema-8175	247	2	,	,	PUNCT
ajema-8175	247	3	s.	s.	PROPN
ajema-8175	247	4	,	,	PUNCT
ajema-8175	247	5	will	will	AUX
ajema-8175	247	6	,	,	PUNCT
ajema-8175	247	7	m.	m.	NOUN
ajema-8175	247	8	,	,	PUNCT
ajema-8175	247	9	burghoff	burghoff	NOUN
ajema-8175	247	10	,	,	PUNCT
ajema-8175	247	11	j.	j.	PROPN
ajema-8175	247	12	,	,	PUNCT
ajema-8175	247	13	&	&	CCONJ
ajema-8175	247	14	tünnermann	tünnermann	PROPN
ajema-8175	247	15	,	,	PUNCT
ajema-8175	247	16	a.	a.	NOUN
ajema-8175	247	17	(	(	PUNCT
ajema-8175	247	18	2003	2003	NUM
ajema-8175	247	19	)	)	PUNCT
ajema-8175	247	20	.	.	PUNCT
ajema-8175	248	1	femtosecond	femtosecond	VERB
ajema-8175	248	2	waveguide	waveguide	ADJ
ajema-8175	248	3	writing	writing	NOUN
ajema-8175	248	4	:	:	PUNCT
ajema-8175	248	5	a	a	DET
ajema-8175	248	6	new	new	ADJ
ajema-8175	248	7	avenue	avenue	NOUN
ajema-8175	248	8	to	to	ADP
ajema-8175	248	9	three	three	NUM
ajema-8175	248	10	-	-	PUNCT
ajema-8175	248	11	dimensional	dimensional	ADJ
ajema-8175	248	12	integrated	integrated	ADJ
ajema-8175	248	13	optics	optic	NOUN
ajema-8175	248	14	.	.	PUNCT
ajema-8175	249	1	applied	apply	VERB
ajema-8175	249	2	physics	physics	PROPN
ajema-8175	249	3	a	a	NOUN
ajema-8175	249	4	,	,	PUNCT
ajema-8175	249	5	77(1	77(1	NOUN
ajema-8175	249	6	)	)	PUNCT
ajema-8175	249	7	,	,	PUNCT
ajema-8175	249	8	109–111	109–111	NUM
ajema-8175	249	9	.	.	PUNCT
ajema-8175	250	1	[	[	X
ajema-8175	250	2	https://doi.org/10.1007/s00339-003-2020-4](https://doi.org/10.1007/s00339-0032020-4	https://doi.org/10.1007/s00339-003-2020-4](https://doi.org/10.1007/s00339-0032020-4	NOUN
ajema-8175	250	3	)	)	PUNCT
ajema-8175	250	4	21	21	NUM
ajema-8175	250	5	.	.	PUNCT
ajema-8175	251	1	chen	chen	PROPN
ajema-8175	251	2	,	,	PUNCT
ajema-8175	251	3	f.	f.	PROPN
ajema-8175	251	4	,	,	PUNCT
ajema-8175	251	5	et	et	PROPN
ajema-8175	251	6	al	al	PROPN
ajema-8175	251	7	.	.	PUNCT
ajema-8175	251	8	(	(	PUNCT
ajema-8175	251	9	2015	2015	NUM
ajema-8175	251	10	)	)	PUNCT
ajema-8175	251	11	.	.	PUNCT
ajema-8175	252	1	ultrafast	ultrafast	ADJ
ajema-8175	252	2	laser	laser	NOUN
ajema-8175	252	3	fabrication	fabrication	NOUN
ajema-8175	252	4	of	of	ADP
ajema-8175	252	5	microfluidic	microfluidic	ADJ
ajema-8175	252	6	devices	device	NOUN
ajema-8175	252	7	in	in	ADP
ajema-8175	252	8	glass	glass	NOUN
ajema-8175	252	9	for	for	ADP
ajema-8175	252	10	lab	lab	NOUN
ajema-8175	252	11	-	-	PUNCT
ajema-8175	252	12	onchip	onchip	NOUN
ajema-8175	252	13	applications	application	NOUN
ajema-8175	252	14	.	.	PUNCT
ajema-8175	253	1	micromachines	micromachine	NOUN
ajema-8175	253	2	,	,	PUNCT
ajema-8175	253	3	6(7	6(7	NUM
ajema-8175	253	4	)	)	PUNCT
ajema-8175	253	5	,	,	PUNCT
ajema-8175	253	6	1001–1018	1001–1018	NUM
ajema-8175	253	7	.	.	PUNCT
ajema-8175	254	1	[	[	X
ajema-8175	254	2	https://doi.org/10.3390/mi6071001](https://doi.org/10.3390/mi6071001	https://doi.org/10.3390/mi6071001](https://doi.org/10.3390/mi6071001	NOUN
ajema-8175	254	3	)	)	PUNCT
ajema-8175	254	4	22	22	NUM
ajema-8175	254	5	.	.	PUNCT
ajema-8175	255	1	weber	weber	PROPN
ajema-8175	255	2	,	,	PUNCT
ajema-8175	255	3	h.	h.	PROPN
ajema-8175	255	4	,	,	PUNCT
ajema-8175	255	5	&	&	CCONJ
ajema-8175	255	6	neuenschwander	neuenschwander	PROPN
ajema-8175	255	7	,	,	PUNCT
ajema-8175	255	8	b.	b.	PROPN
ajema-8175	255	9	(	(	PUNCT
ajema-8175	255	10	2009	2009	NUM
ajema-8175	255	11	)	)	PUNCT
ajema-8175	255	12	.	.	PUNCT
ajema-8175	256	1	ultrafast	ultrafast	ADJ
ajema-8175	256	2	laser	laser	NOUN
ajema-8175	256	3	microprocessing	microprocessing	NOUN
ajema-8175	256	4	of	of	ADP
ajema-8175	256	5	thin	thin	ADJ
ajema-8175	256	6	films	film	NOUN
ajema-8175	256	7	for	for	ADP
ajema-8175	256	8	electronic	electronic	ADJ
ajema-8175	256	9	device	device	NOUN
ajema-8175	256	10	fabrication	fabrication	NOUN
ajema-8175	256	11	.	.	PUNCT
ajema-8175	257	1	surface	surface	NOUN
ajema-8175	257	2	and	and	CCONJ
ajema-8175	257	3	coatings	coating	NOUN
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ajema-8175	257	6	203(7	203(7	NUM
ajema-8175	257	7	)	)	PUNCT
ajema-8175	257	8	,	,	PUNCT
ajema-8175	257	9	987–992	987–992	NUM
ajema-8175	257	10	.	.	PUNCT
ajema-8175	258	1	[	[	X
ajema-8175	258	2	https://doi.org/10.1016/j.surfcoat.2008.10.027](https://doi.org/10.1016/j.surfcoat.2008.10.02	https://doi.org/10.1016/j.surfcoat.2008.10.027](https://doi.org/10.1016/j.surfcoat.2008.10.02	NOUN
ajema-8175	258	3	7	7	NUM
ajema-8175	258	4	)	)	PUNCT
ajema-8175	258	5	23	23	NUM
ajema-8175	258	6	.	.	PUNCT
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ajema-8175	259	2	,	,	PUNCT
ajema-8175	259	3	h.	h.	PROPN
ajema-8175	259	4	,	,	PUNCT
ajema-8175	259	5	&	&	CCONJ
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ajema-8175	259	7	,	,	PUNCT
ajema-8175	259	8	y.	y.	PROPN
ajema-8175	259	9	(	(	PUNCT
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ajema-8175	259	11	)	)	PUNCT
ajema-8175	259	12	.	.	PUNCT
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ajema-8175	260	9	.	.	PUNCT
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ajema-8175	261	5	,	,	PUNCT
ajema-8175	261	6	114(7	114(7	NUM
ajema-8175	261	7	)	)	PUNCT
ajema-8175	261	8	,	,	PUNCT
ajema-8175	261	9	073104	073104	NUM
ajema-8175	261	10	.	.	PUNCT
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ajema-8175	262	2	https://doi.org/10.1063/1.4817270](https://doi.org/10.1063/1.4817270	https://doi.org/10.1063/1.4817270](https://doi.org/10.1063/1.4817270	NOUN
ajema-8175	262	3	)	)	PUNCT
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ajema-8175	262	5	.	.	PUNCT
ajema-8175	262	6	yavas	yavas	PROPN
ajema-8175	262	7	,	,	PUNCT
ajema-8175	262	8	h.	h.	PROPN
ajema-8175	262	9	,	,	PUNCT
ajema-8175	262	10	ulgut	ulgut	PROPN
ajema-8175	262	11	,	,	PUNCT
ajema-8175	262	12	b.	b.	PROPN
ajema-8175	262	13	,	,	PUNCT
ajema-8175	262	14	&	&	CCONJ
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ajema-8175	262	16	,	,	PUNCT
ajema-8175	262	17	h.	h.	PROPN
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ajema-8175	262	19	2011	2011	NUM
ajema-8175	262	20	)	)	PUNCT
ajema-8175	262	21	.	.	PUNCT
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ajema-8175	263	2	laser	laser	NOUN
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ajema-8175	263	11	.	.	PUNCT
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ajema-8175	264	4	17(5	17(5	NUM
ajema-8175	264	5	)	)	PUNCT
ajema-8175	264	6	,	,	PUNCT
ajema-8175	264	7	741–747	741–747	NUM
ajema-8175	264	8	.	.	PUNCT
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ajema-8175	265	2	https://doi.org/10.1007/s00542-010-1107-1](https://doi.org/10.1007/s00542-010-1107-1	https://doi.org/10.1007/s00542-010-1107-1](https://doi.org/10.1007/s00542-010-1107-1	X
ajema-8175	265	3	)	)	PUNCT
ajema-8175	265	4	25	25	NUM
ajema-8175	265	5	.	.	PUNCT
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ajema-8175	265	7	,	,	PUNCT
ajema-8175	265	8	b.	b.	PROPN
ajema-8175	265	9	n.	n.	PROPN
ajema-8175	265	10	,	,	PUNCT
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ajema-8175	265	12	,	,	PUNCT
ajema-8175	265	13	c.	c.	PROPN
ajema-8175	265	14	,	,	PUNCT
ajema-8175	265	15	nolte	nolte	PROPN
ajema-8175	265	16	,	,	PUNCT
ajema-8175	265	17	s.	s.	PROPN
ajema-8175	265	18	,	,	PUNCT
ajema-8175	265	19	&	&	CCONJ
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ajema-8175	265	21	,	,	PUNCT
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ajema-8175	265	25	)	)	PUNCT
ajema-8175	265	26	.	.	PUNCT
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ajema-8175	266	2	laser	laser	NOUN
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ajema-8175	267	2	physics	physics	PROPN
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ajema-8175	267	4	,	,	PUNCT
ajema-8175	267	5	63(2	63(2	NUM
ajema-8175	267	6	)	)	PUNCT
ajema-8175	267	7	,	,	PUNCT
ajema-8175	267	8	109–115	109–115	NUM
ajema-8175	267	9	.	.	PUNCT
ajema-8175	268	1	[	[	X
ajema-8175	268	2	https://doi.org/10.1007/bf01567636](https://doi.org/10.1007/bf01567636	https://doi.org/10.1007/bf01567636](https://doi.org/10.1007/bf01567636	NOUN
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