id	sid	eid	entity	type
ajtas-2447	1	1	american journal of technology	ORG
ajtas-2447	1	2	sciences issn	PERSON
ajtas-2447	1	3	2832-1766	CARDINAL
ajtas-2447	1	4	30	CARDINAL
ajtas-2447	1	5	november 2024	DATE
ajtas-2447	1	6	6	CARDINAL
ajtas-2447	1	7	si/cu(111	ORG
ajtas-2447	1	8	ёркулов руслан махаммади угли	ORG
ajtas-2447	1	9	и педагогики	PERSON
ajtas-2447	2	1	ge	ORG
ajtas-2447	5	1	si-cusi-cu	ORG
ajtas-2447	6	1	ips	ORG
ajtas-2447	6	2	cpe	ORG
ajtas-2447	6	3	first	ORDINAL
ajtas-2447	9	1	nanoelectronic devices	ORG
ajtas-2447	9	2	1-5	CARDINAL
ajtas-2447	11	1	6–13	CARDINAL
ajtas-2447	12	1	ge	ORG
ajtas-2447	12	2	the american journal of technology	ORG
ajtas-2447	12	3	30	CARDINAL
ajtas-2447	12	4	november 2024	DATE
ajtas-2447	12	5	7	CARDINAL
ajtas-2447	15	1	10	CARDINAL
ajtas-2447	15	2	3-4 hours	TIME
ajtas-2447	16	1	1	CARDINAL
ajtas-2447	16	2	950	CARDINAL
ajtas-2447	16	3	1000 k	QUANTITY
ajtas-2447	17	1	≥1 at.%	ORG
ajtas-2447	17	2	0.5	CARDINAL
ajtas-2447	17	3	at.%	ORG
ajtas-2447	18	1	1 to 20	CARDINAL
ajtas-2447	18	2	-10-6	PRODUCT
ajtas-2447	18	3	augerelectron spectroscopy	ORG
ajtas-2447	18	4	10	CARDINAL
ajtas-2447	18	5	1	CARDINAL
ajtas-2447	19	1	1	CARDINAL
ajtas-2447	19	2	1	CARDINAL
ajtas-2447	21	1	e=68 ev	PERSON
ajtas-2447	22	1	al	PERSON
ajtas-2447	23	1	3-4	CARDINAL
ajtas-2447	23	2	al	ORG
ajtas-2447	23	3	al	PERSON
ajtas-2447	23	4	θsi	GPE
ajtas-2447	23	5	10	CARDINAL
ajtas-2447	24	1	at.%	ORG
ajtas-2447	25	1	8	CARDINAL
ajtas-2447	26	1	14	CARDINAL
ajtas-2447	26	2	35-40	CARDINAL
ajtas-2447	27	1	12	CARDINAL
ajtas-2447	28	1	1	CARDINAL
ajtas-2447	29	1	2	CARDINAL
ajtas-2447	30	1	θ≈3-4	ORG
ajtas-2447	30	2	two	CARDINAL
ajtas-2447	30	3	90	CARDINAL
ajtas-2447	31	1	14	CARDINAL
ajtas-2447	31	2	59	CARDINAL
ajtas-2447	31	3	63	CARDINAL
ajtas-2447	32	1	15	CARDINAL
ajtas-2447	35	1	1.b	CARDINAL
ajtas-2447	35	2	26	CARDINAL
ajtas-2447	35	3	60-65	DATE
ajtas-2447	36	1	θsi	GPE
ajtas-2447	36	2	12-15	CARDINAL
ajtas-2447	37	1	≈ 12	CARDINAL
ajtas-2447	37	2	810 k	QUANTITY
ajtas-2447	37	3	30-40 minutes	TIME
ajtas-2447	38	1	1.b	CARDINAL
ajtas-2447	39	1	θsi	GPE
ajtas-2447	39	2	15-20	CARDINAL
ajtas-2447	39	3	2	CARDINAL
ajtas-2447	41	1	750	CARDINAL
ajtas-2447	41	2	25	CARDINAL
ajtas-2447	41	3	american journal of technology	ORG
ajtas-2447	41	4	30	CARDINAL
ajtas-2447	41	5	november 2024	DATE
ajtas-2447	41	6	8	CARDINAL
ajtas-2447	42	1	1.b	CARDINAL
ajtas-2447	43	1	al	PERSON
ajtas-2447	43	2	θsi	NORP
ajtas-2447	43	3	θsi ≈20	GPE
ajtas-2447	44	1	1a	CARDINAL
ajtas-2447	44	2	1b	CARDINAL
ajtas-2447	46	1	1	CARDINAL
ajtas-2447	47	1	1	CARDINAL
ajtas-2447	48	1	1	CARDINAL
ajtas-2447	50	1	ge	ORG
ajtas-2447	51	1	ge	ORG
ajtas-2447	52	1	θ ≥20-25	ORG
ajtas-2447	52	2	950 k	QUANTITY
ajtas-2447	53	1	1	CARDINAL
ajtas-2447	54	1	landry o.	PERSON
ajtas-2447	54	2	bougerol c.	PERSON
ajtas-2447	54	3	b. //	ORG
ajtas-2447	54	4	2009	DATE
ajtas-2447	54	5	20	CARDINAL
ajtas-2447	54	6	41	CARDINAL
ajtas-2447	54	7	415602	DATE
ajtas-2447	55	1	2	CARDINAL
ajtas-2447	55	2	wang d.	PERSON
ajtas-2447	55	3	zou z. q.	PERSON
ajtas-2447	55	4	111	CARDINAL
ajtas-2447	55	5	2009	DATE
ajtas-2447	56	1	20	CARDINAL
ajtas-2447	57	1	27	CARDINAL
ajtas-2447	57	2	275607 3	DATE
ajtas-2447	57	3	domashevskaya e.p.	PERSON
ajtas-2447	57	4	v.a.	GPE
ajtas-2447	58	1	koyuda d.a.	PERSON
ajtas-2447	58	2	n.a.	GPE
ajtas-2447	58	3	pershin yu.p	ORG
ajtas-2447	58	4	kodratenko v.v.	PERSON
ajtas-2447	58	5	appathurai n. //	PERSON
ajtas-2447	58	6	2013	DATE
ajtas-2447	59	1	55	CARDINAL
ajtas-2447	61	1	3	CARDINAL
ajtas-2447	62	1	577	CARDINAL
ajtas-2447	62	2	584	CARDINAL
ajtas-2447	62	3	4	CARDINAL
ajtas-2447	62	4	alekseev a.a.	PERSON
ajtas-2447	62	5	olyanich d.a.	PERSON
ajtas-2447	62	6	utas	ORG
ajtas-2447	62	7	t.v.	GPE
ajtas-2447	63	1	v.g.	GPE
ajtas-2447	63	2	zotov a.v.	ORG
ajtas-2447	64	1	2015	DATE
ajtas-2447	65	1	no.10	TIME
ajtas-2447	66	1	100	CARDINAL
ajtas-2447	67	1	5	CARDINAL
ajtas-2447	67	2	в.м.	PERSON
ajtas-2447	67	3	ротштейн	GPE
ajtas-2447	68	1	р.х.	GPE
ajtas-2447	68	2	турдалиев	ORG
ajtas-2447	68	3	и.х.	GPE
ajtas-2447	68	4	ашуров // uzbek journal of physics	ORG
ajtas-2447	69	1	2017	DATE
ajtas-2447	70	1	№4	ORG
ajtas-2447	71	1	с.12	PERSON
ajtas-2447	71	2	bolkhovityanov y. b.	PERSON
ajtas-2447	71	3	deryabin a. s.	PERSON
ajtas-2447	71	4	a. k.	PERSON
ajtas-2447	71	5	sokolov l. v. unzipping	PERSON
ajtas-2447	71	6	ge	ORG
ajtas-2447	71	7	0	CARDINAL
ajtas-2447	72	1	2018	DATE
ajtas-2447	73	1	483	CARDINAL
ajtas-2447	74	1	265	CARDINAL
ajtas-2447	75	1	7	CARDINAL
ajtas-2447	75	2	saito s.	PERSON
ajtas-2447	75	3	al-attili	PERSON
ajtas-2447	75	4	a. z.	PERSON
ajtas-2447	75	5	oda k.	PERSON
ajtas-2447	75	6	ishikawa y.	PERSON
ajtas-2447	76	1	2016	DATE
ajtas-2447	78	1	4	CARDINAL
ajtas-2447	78	2	043002	DATE
ajtas-2447	80	1	liu j.	PERSON
ajtas-2447	80	2	l. c.	PERSON
ajtas-2447	80	3	michel j. monolithic	PERSON
ajtas-2447	80	4	ge	ORG
ajtas-2447	80	5	2012	DATE
ajtas-2447	81	1	27	CARDINAL
ajtas-2447	83	1	9	CARDINAL
ajtas-2447	83	2	094006.	DATE
ajtas-2447	84	1	umirzakov b.e	PERSON
ajtas-2447	86	1	1993	DATE
ajtas-2447	87	1	293	CARDINAL
ajtas-2447	88	1	10	CARDINAL
ajtas-2447	89	1	isakhanov z.a.	PERSON
ajtas-2447	90	1	yorkulov r.m.	PERSON
ajtas-2447	90	2	tulyaganova	PERSON
ajtas-2447	91	1	laplaz-2020	DATE
ajtas-2447	91	2	2020	DATE
ajtas-2447	92	1	204	CARDINAL