id	sid	tid	token	lemma	pos
ajtas-2447	1	1	american	american	PROPN
ajtas-2447	1	2	journal	journal	PROPN
ajtas-2447	1	3	of	of	ADP
ajtas-2447	1	4	technology	technology	NOUN
ajtas-2447	1	5	and	and	CCONJ
ajtas-2447	1	6	applied	apply	VERB
ajtas-2447	1	7	sciences	sciences	PROPN
ajtas-2447	1	8	issn	issn	X
ajtas-2447	1	9	(	(	PUNCT
ajtas-2447	1	10	e	e	NOUN
ajtas-2447	1	11	):	):	PUNCT
ajtas-2447	1	12	2832	2832	NUM
ajtas-2447	1	13	-	-	SYM
ajtas-2447	1	14	1766	1766	NUM
ajtas-2447	1	15	volume	volume	NOUN
ajtas-2447	1	16	30	30	NUM
ajtas-2447	1	17	,	,	PUNCT
ajtas-2447	1	18	november	november	PROPN
ajtas-2447	1	19	2024	2024	NUM
ajtas-2447	1	20	p	p	NOUN
ajtas-2447	1	21	a	a	DET
ajtas-2447	1	22	g	g	NOUN
ajtas-2447	1	23	e	e	NOUN
ajtas-2447	1	24	|	|	ADV
ajtas-2447	1	25	6	6	NUM
ajtas-2447	1	26	www.americanjournal.org	www.americanjournal.org	NOUN
ajtas-2447	1	27	composition	composition	NOUN
ajtas-2447	1	28	and	and	CCONJ
ajtas-2447	1	29	structure	structure	NOUN
ajtas-2447	1	30	of	of	ADP
ajtas-2447	1	31	the	the	DET
ajtas-2447	1	32	interfacial	interfacial	ADJ
ajtas-2447	1	33	interface	interface	NOUN
ajtas-2447	1	34	si	si	NOUN
ajtas-2447	1	35	/	/	SYM
ajtas-2447	1	36	al(111	al(111	NUM
ajtas-2447	1	37	)	)	PUNCT
ajtas-2447	1	38	and	and	CCONJ
ajtas-2447	1	39	si	si	PROPN
ajtas-2447	1	40	/	/	SYM
ajtas-2447	1	41	cu(111	cu(111	NOUN
ajtas-2447	1	42	)	)	PUNCT
ajtas-2447	1	43	ёркулов	ёркулов	PROPN
ajtas-2447	1	44	руслан	руслан	NOUN
ajtas-2447	1	45	махаммади	махаммади	PROPN
ajtas-2447	1	46	угли	угли	PROPN
ajtas-2447	1	47	университет	университет	NOUN
ajtas-2447	1	48	экономики	экономики	VERB
ajtas-2447	1	49	и	и	NOUN
ajtas-2447	1	50	педагогики	педагогики	NOUN
ajtas-2447	1	51	,	,	PUNCT
ajtas-2447	1	52	+99890.8878855	+99890.8878855	PROPN
ajtas-2447	1	53	,	,	PUNCT
ajtas-2447	1	54	ruyo1990@mail.ru	ruyo1990@mail.ru	VERB
ajtas-2447	1	55	a	a	DET
ajtas-2447	1	56	b	b	PROPN
ajtas-2447	1	57	s	s	ADP
ajtas-2447	1	58	t	t	PROPN
ajtas-2447	1	59	r	r	NOUN
ajtas-2447	1	60	a	a	DET
ajtas-2447	1	61	c	c	NOUN
ajtas-2447	1	62	t	t	NOUN
ajtas-2447	2	1	k	k	X
ajtas-2447	2	2	e	e	PROPN
ajtas-2447	2	3	y	y	PROPN
ajtas-2447	2	4	w	w	NOUN
ajtas-2447	2	5	o	o	NOUN
ajtas-2447	2	6	r	r	NOUN
ajtas-2447	2	7	d	d	X
ajtas-2447	2	8	s	s	NOUN
ajtas-2447	2	9	in	in	ADP
ajtas-2447	2	10	this	this	DET
ajtas-2447	2	11	paper	paper	NOUN
ajtas-2447	2	12	the	the	DET
ajtas-2447	2	13	results	result	NOUN
ajtas-2447	2	14	of	of	ADP
ajtas-2447	2	15	experimental	experimental	ADJ
ajtas-2447	2	16	studies	study	NOUN
ajtas-2447	2	17	of	of	ADP
ajtas-2447	2	18	the	the	DET
ajtas-2447	2	19	regularity	regularity	NOUN
ajtas-2447	2	20	of	of	ADP
ajtas-2447	2	21	the	the	DET
ajtas-2447	2	22	formation	formation	NOUN
ajtas-2447	2	23	of	of	ADP
ajtas-2447	2	24	the	the	DET
ajtas-2447	2	25	interfacial	interfacial	ADJ
ajtas-2447	2	26	boundary	boundary	NOUN
ajtas-2447	2	27	during	during	ADP
ajtas-2447	2	28	the	the	DET
ajtas-2447	2	29	deposition	deposition	NOUN
ajtas-2447	2	30	of	of	ADP
ajtas-2447	2	31	si	si	PROPN
ajtas-2447	2	32	and	and	CCONJ
ajtas-2447	2	33	ge	ge	PROPN
ajtas-2447	2	34	on	on	ADP
ajtas-2447	2	35	the	the	DET
ajtas-2447	2	36	surface	surface	NOUN
ajtas-2447	2	37	of	of	ADP
ajtas-2447	2	38	single	single	ADJ
ajtas-2447	2	39	crystals	crystal	NOUN
ajtas-2447	2	40	al(111	al(111	NOUN
ajtas-2447	2	41	)	)	PUNCT
ajtas-2447	2	42	and	and	CCONJ
ajtas-2447	2	43	cu(111	cu(111	NOUN
ajtas-2447	2	44	)	)	PUNCT
ajtas-2447	2	45	are	be	AUX
ajtas-2447	2	46	presented	present	VERB
ajtas-2447	2	47	.	.	PUNCT
ajtas-2447	3	1	optimal	optimal	ADJ
ajtas-2447	3	2	modes	mode	NOUN
ajtas-2447	3	3	of	of	ADP
ajtas-2447	3	4	sputtering	sputter	VERB
ajtas-2447	3	5	and	and	CCONJ
ajtas-2447	3	6	annealing	anneal	VERB
ajtas-2447	3	7	for	for	ADP
ajtas-2447	3	8	obtaining	obtain	VERB
ajtas-2447	3	9	semiconductor	semiconductor	NOUN
ajtas-2447	3	10	-	-	PUNCT
ajtas-2447	3	11	metal	metal	NOUN
ajtas-2447	3	12	systems	system	NOUN
ajtas-2447	3	13	have	have	AUX
ajtas-2447	3	14	been	be	AUX
ajtas-2447	3	15	established	establish	VERB
ajtas-2447	3	16	.	.	PUNCT
ajtas-2447	4	1	the	the	DET
ajtas-2447	4	2	effect	effect	NOUN
ajtas-2447	4	3	of	of	ADP
ajtas-2447	4	4	barium	barium	NOUN
ajtas-2447	4	5	ion	ion	NOUN
ajtas-2447	4	6	implantation	implantation	NOUN
ajtas-2447	4	7	on	on	ADP
ajtas-2447	4	8	the	the	DET
ajtas-2447	4	9	composition	composition	NOUN
ajtas-2447	4	10	,	,	PUNCT
ajtas-2447	4	11	morphology	morphology	NOUN
ajtas-2447	4	12	,	,	PUNCT
ajtas-2447	4	13	electronic	electronic	ADJ
ajtas-2447	4	14	and	and	CCONJ
ajtas-2447	4	15	crystal	crystal	NOUN
ajtas-2447	4	16	structure	structure	NOUN
ajtas-2447	4	17	of	of	ADP
ajtas-2447	4	18	the	the	DET
ajtas-2447	4	19	si(ge)/cu(al	si(ge)/cu(al	NOUN
ajtas-2447	4	20	)	)	PUNCT
ajtas-2447	4	21	system	system	NOUN
ajtas-2447	4	22	has	have	AUX
ajtas-2447	4	23	been	be	AUX
ajtas-2447	4	24	determined	determine	VERB
ajtas-2447	4	25	.	.	PUNCT
ajtas-2447	5	1	the	the	DET
ajtas-2447	5	2	optimal	optimal	ADJ
ajtas-2447	5	3	temperature	temperature	NOUN
ajtas-2447	5	4	for	for	ADP
ajtas-2447	5	5	the	the	DET
ajtas-2447	5	6	creation	creation	NOUN
ajtas-2447	5	7	of	of	ADP
ajtas-2447	5	8	nanoheterostructure	nanoheterostructure	NOUN
ajtas-2447	5	9	has	have	AUX
ajtas-2447	5	10	been	be	AUX
ajtas-2447	5	11	shown	show	VERB
ajtas-2447	5	12	si	si	ADJ
ajtas-2447	5	13	-	-	PUNCT
ajtas-2447	5	14	cusi	cusi	NOUN
ajtas-2447	5	15	-	-	PUNCT
ajtas-2447	5	16	cu	cu	PROPN
ajtas-2447	5	17	.	.	PUNCT
ajtas-2447	6	1	based	base	VERB
ajtas-2447	6	2	on	on	ADP
ajtas-2447	6	3	the	the	DET
ajtas-2447	6	4	data	datum	NOUN
ajtas-2447	6	5	of	of	ADP
ajtas-2447	6	6	the	the	DET
ajtas-2447	6	7	ips	ip	NOUN
ajtas-2447	6	8	and	and	CCONJ
ajtas-2447	6	9	cpe	cpe	PROPN
ajtas-2447	6	10	,	,	PUNCT
ajtas-2447	6	11	it	it	PRON
ajtas-2447	6	12	was	be	AUX
ajtas-2447	6	13	established	establish	VERB
ajtas-2447	6	14	for	for	ADP
ajtas-2447	6	15	the	the	DET
ajtas-2447	6	16	first	first	ADJ
ajtas-2447	6	17	time	time	NOUN
ajtas-2447	6	18	that	that	SCONJ
ajtas-2447	6	19	during	during	ADP
ajtas-2447	6	20	the	the	DET
ajtas-2447	6	21	deposition	deposition	NOUN
ajtas-2447	6	22	of	of	ADP
ajtas-2447	6	23	si	si	NOUN
ajtas-2447	6	24	on	on	ADP
ajtas-2447	6	25	the	the	DET
ajtas-2447	6	26	surface	surface	NOUN
ajtas-2447	6	27	of	of	ADP
ajtas-2447	6	28	al	al	PROPN
ajtas-2447	6	29	and	and	CCONJ
ajtas-2447	6	30	subsequent	subsequent	ADJ
ajtas-2447	6	31	annealing	annealing	NOUN
ajtas-2447	6	32	,	,	PUNCT
ajtas-2447	6	33	a	a	DET
ajtas-2447	6	34	bond	bond	NOUN
ajtas-2447	6	35	between	between	ADP
ajtas-2447	6	36	the	the	DET
ajtas-2447	6	37	si	si	PROPN
ajtas-2447	6	38	and	and	CCONJ
ajtas-2447	6	39	al	al	PROPN
ajtas-2447	6	40	atoms	atom	NOUN
ajtas-2447	6	41	is	be	AUX
ajtas-2447	6	42	not	not	PART
ajtas-2447	6	43	formed	form	VERB
ajtas-2447	6	44	.	.	PUNCT
ajtas-2447	7	1	heterostructure	heterostructure	NOUN
ajtas-2447	7	2	,	,	PUNCT
ajtas-2447	7	3	nanofilms	nanofilm	NOUN
ajtas-2447	7	4	,	,	PUNCT
ajtas-2447	7	5	nanophases	nanophase	NOUN
ajtas-2447	7	6	,	,	PUNCT
ajtas-2447	7	7	single	single	ADJ
ajtas-2447	7	8	crystal	crystal	NOUN
ajtas-2447	7	9	,	,	PUNCT
ajtas-2447	7	10	energy	energy	NOUN
ajtas-2447	7	11	loss	loss	NOUN
ajtas-2447	7	12	by	by	ADP
ajtas-2447	7	13	electrons	electron	NOUN
ajtas-2447	7	14	,	,	PUNCT
ajtas-2447	7	15	intensity	intensity	NOUN
ajtas-2447	7	16	,	,	PUNCT
ajtas-2447	7	17	plasma	plasma	NOUN
ajtas-2447	7	18	oscillations	oscillation	NOUN
ajtas-2447	7	19	,	,	PUNCT
ajtas-2447	7	20	photoelectrons	photoelectron	NOUN
ajtas-2447	7	21	.	.	PUNCT
ajtas-2447	8	1	introduction	introduction	NOUN
ajtas-2447	8	2	the	the	DET
ajtas-2447	8	3	use	use	NOUN
ajtas-2447	8	4	of	of	ADP
ajtas-2447	8	5	nanoscale	nanoscale	NOUN
ajtas-2447	8	6	materials	material	NOUN
ajtas-2447	8	7	in	in	ADP
ajtas-2447	8	8	the	the	DET
ajtas-2447	8	9	creation	creation	NOUN
ajtas-2447	8	10	of	of	ADP
ajtas-2447	8	11	various	various	ADJ
ajtas-2447	8	12	heterostructures	heterostructure	NOUN
ajtas-2447	8	13	for	for	ADP
ajtas-2447	8	14	modern	modern	ADJ
ajtas-2447	8	15	electronics	electronic	NOUN
ajtas-2447	8	16	devices	device	NOUN
ajtas-2447	8	17	requires	require	VERB
ajtas-2447	8	18	obtaining	obtain	VERB
ajtas-2447	8	19	the	the	DET
ajtas-2447	8	20	most	most	ADV
ajtas-2447	8	21	complete	complete	ADJ
ajtas-2447	8	22	information	information	NOUN
ajtas-2447	8	23	about	about	ADP
ajtas-2447	8	24	the	the	DET
ajtas-2447	8	25	concentration	concentration	NOUN
ajtas-2447	8	26	of	of	ADP
ajtas-2447	8	27	impurity	impurity	NOUN
ajtas-2447	8	28	atoms	atom	NOUN
ajtas-2447	8	29	on	on	ADP
ajtas-2447	8	30	the	the	DET
ajtas-2447	8	31	surface	surface	NOUN
ajtas-2447	8	32	and	and	CCONJ
ajtas-2447	8	33	their	their	PRON
ajtas-2447	8	34	distribution	distribution	NOUN
ajtas-2447	8	35	along	along	ADP
ajtas-2447	8	36	the	the	DET
ajtas-2447	8	37	depth	depth	NOUN
ajtas-2447	8	38	.	.	PUNCT
ajtas-2447	9	1	therefore	therefore	ADV
ajtas-2447	9	2	,	,	PUNCT
ajtas-2447	9	3	nanofilms	nanofilm	NOUN
ajtas-2447	9	4	and	and	CCONJ
ajtas-2447	9	5	nanocrystals	nanocrystal	NOUN
ajtas-2447	9	6	of	of	ADP
ajtas-2447	9	7	metal	metal	NOUN
ajtas-2447	9	8	silicides	silicide	NOUN
ajtas-2447	9	9	and	and	CCONJ
ajtas-2447	9	10	other	other	ADJ
ajtas-2447	9	11	semiconductor	semiconductor	NOUN
ajtas-2447	9	12	compounds	compound	NOUN
ajtas-2447	9	13	obtained	obtain	VERB
ajtas-2447	9	14	by	by	ADP
ajtas-2447	9	15	various	various	ADJ
ajtas-2447	9	16	methods	method	NOUN
ajtas-2447	9	17	under	under	ADP
ajtas-2447	9	18	ultrahigh	ultrahigh	ADJ
ajtas-2447	9	19	vacuum	vacuum	NOUN
ajtas-2447	9	20	conditions	condition	NOUN
ajtas-2447	9	21	on	on	ADP
ajtas-2447	9	22	the	the	DET
ajtas-2447	9	23	si	si	PROPN
ajtas-2447	9	24	surface	surface	NOUN
ajtas-2447	9	25	,	,	PUNCT
ajtas-2447	9	26	as	as	ADV
ajtas-2447	9	27	well	well	ADV
ajtas-2447	9	28	as	as	ADP
ajtas-2447	9	29	multilayer	multilayer	ADJ
ajtas-2447	9	30	si	si	PROPN
ajtas-2447	9	31	–	–	PUNCT
ajtas-2447	9	32	me	i	PRON
ajtas-2447	9	33	–	–	PUNCT
ajtas-2447	9	34	si	si	X
ajtas-2447	9	35	–	–	PUNCT
ajtas-2447	9	36	me	i	PRON
ajtas-2447	9	37	systems	system	NOUN
ajtas-2447	9	38	,	,	PUNCT
ajtas-2447	9	39	on	on	ADP
ajtas-2447	9	40	the	the	DET
ajtas-2447	9	41	basis	basis	NOUN
ajtas-2447	9	42	of	of	ADP
ajtas-2447	9	43	which	which	PRON
ajtas-2447	9	44	modern	modern	ADJ
ajtas-2447	9	45	microand	microand	PROPN
ajtas-2447	9	46	nanoelectronic	nanoelectronic	PROPN
ajtas-2447	9	47	devices	device	NOUN
ajtas-2447	9	48	are	be	AUX
ajtas-2447	9	49	being	be	AUX
ajtas-2447	9	50	developed	develop	VERB
ajtas-2447	9	51	,	,	PUNCT
ajtas-2447	9	52	are	be	AUX
ajtas-2447	9	53	being	be	AUX
ajtas-2447	9	54	extensively	extensively	ADV
ajtas-2447	9	55	studied	study	VERB
ajtas-2447	9	56	[	[	PUNCT
ajtas-2447	9	57	1	1	NUM
ajtas-2447	9	58	-	-	SYM
ajtas-2447	9	59	5	5	NUM
ajtas-2447	9	60	]	]	PUNCT
ajtas-2447	9	61	.	.	PUNCT
ajtas-2447	10	1	in	in	ADP
ajtas-2447	10	2	particular	particular	ADJ
ajtas-2447	10	3	,	,	PUNCT
ajtas-2447	10	4	nanophases	nanophase	NOUN
ajtas-2447	10	5	and	and	CCONJ
ajtas-2447	10	6	nanolayers	nanolayer	NOUN
ajtas-2447	10	7	of	of	ADP
ajtas-2447	10	8	metal	metal	NOUN
ajtas-2447	10	9	silicides	silicide	NOUN
ajtas-2447	10	10	and	and	CCONJ
ajtas-2447	10	11	germanides	germanide	NOUN
ajtas-2447	10	12	have	have	VERB
ajtas-2447	10	13	prospects	prospect	NOUN
ajtas-2447	10	14	in	in	ADP
ajtas-2447	10	15	the	the	DET
ajtas-2447	10	16	creation	creation	NOUN
ajtas-2447	10	17	of	of	ADP
ajtas-2447	10	18	microwave	microwave	NOUN
ajtas-2447	10	19	transistors	transistor	NOUN
ajtas-2447	10	20	and	and	CCONJ
ajtas-2447	10	21	integrated	integrated	ADJ
ajtas-2447	10	22	circuits	circuit	NOUN
ajtas-2447	10	23	,	,	PUNCT
ajtas-2447	10	24	and	and	CCONJ
ajtas-2447	10	25	gexsi1−x	gexsi1−x	PROPN
ajtas-2447	10	26	/	/	SYM
ajtas-2447	10	27	si	si	PROPN
ajtas-2447	10	28	heterostructures	heterostructure	NOUN
ajtas-2447	10	29	have	have	VERB
ajtas-2447	10	30	prospects	prospect	NOUN
ajtas-2447	10	31	in	in	ADP
ajtas-2447	10	32	the	the	DET
ajtas-2447	10	33	creation	creation	NOUN
ajtas-2447	10	34	of	of	ADP
ajtas-2447	10	35	leds	led	NOUN
ajtas-2447	10	36	,	,	PUNCT
ajtas-2447	10	37	photodetectors	photodetector	NOUN
ajtas-2447	10	38	,	,	PUNCT
ajtas-2447	10	39	laser	laser	NOUN
ajtas-2447	10	40	sources	source	NOUN
ajtas-2447	10	41	,	,	PUNCT
ajtas-2447	10	42	optical	optical	ADJ
ajtas-2447	10	43	and	and	CCONJ
ajtas-2447	10	44	electronic	electronic	ADJ
ajtas-2447	10	45	devices	device	NOUN
ajtas-2447	11	1	[	[	X
ajtas-2447	11	2	6–13	6–13	NOUN
ajtas-2447	11	3	]	]	PUNCT
ajtas-2447	11	4	.	.	PUNCT
ajtas-2447	12	1	this	this	DET
ajtas-2447	12	2	paper	paper	NOUN
ajtas-2447	12	3	presents	present	VERB
ajtas-2447	12	4	the	the	DET
ajtas-2447	12	5	results	result	NOUN
ajtas-2447	12	6	of	of	ADP
ajtas-2447	12	7	experimental	experimental	ADJ
ajtas-2447	12	8	studies	study	NOUN
ajtas-2447	12	9	of	of	ADP
ajtas-2447	12	10	the	the	DET
ajtas-2447	12	11	regularities	regularity	NOUN
ajtas-2447	12	12	of	of	ADP
ajtas-2447	12	13	the	the	DET
ajtas-2447	12	14	formation	formation	NOUN
ajtas-2447	12	15	of	of	ADP
ajtas-2447	12	16	the	the	DET
ajtas-2447	12	17	interfacial	interfacial	ADJ
ajtas-2447	12	18	boundary	boundary	NOUN
ajtas-2447	12	19	during	during	ADP
ajtas-2447	12	20	the	the	DET
ajtas-2447	12	21	deposition	deposition	NOUN
ajtas-2447	12	22	of	of	ADP
ajtas-2447	12	23	si	si	PROPN
ajtas-2447	12	24	and	and	CCONJ
ajtas-2447	12	25	ge	ge	PROPN
ajtas-2447	12	26	on	on	ADP
ajtas-2447	12	27	the	the	DET
ajtas-2447	12	28	surface	surface	NOUN
ajtas-2447	12	29	of	of	ADP
ajtas-2447	12	30	single	single	ADJ
ajtas-2447	12	31	crystals	crystal	NOUN
ajtas-2447	12	32	al(111	al(111	NOUN
ajtas-2447	12	33	)	)	PUNCT
ajtas-2447	12	34	and	and	CCONJ
ajtas-2447	12	35	cu(111	cu(111	NOUN
ajtas-2447	12	36	)	)	PUNCT
ajtas-2447	12	37	,	,	PUNCT
ajtas-2447	12	38	the	the	DET
ajtas-2447	12	39	establishment	establishment	NOUN
ajtas-2447	12	40	of	of	ADP
ajtas-2447	12	41	optimal	optimal	ADJ
ajtas-2447	12	42	modes	mode	NOUN
ajtas-2447	12	43	of	of	ADP
ajtas-2447	12	44	sputtering	sputter	VERB
ajtas-2447	12	45	and	and	CCONJ
ajtas-2447	12	46	annealing	annealing	NOUN
ajtas-2447	12	47	for	for	ADP
ajtas-2447	12	48	the	the	DET
ajtas-2447	12	49	production	production	NOUN
ajtas-2447	12	50	of	of	ADP
ajtas-2447	12	51	semiconductor	semiconductor	NOUN
ajtas-2447	12	52	-	-	PUNCT
ajtas-2447	12	53	metal	metal	NOUN
ajtas-2447	12	54	systems	system	NOUN
ajtas-2447	12	55	,	,	PUNCT
ajtas-2447	12	56	the	the	DET
ajtas-2447	12	57	effect	effect	NOUN
ajtas-2447	12	58	of	of	ADP
ajtas-2447	12	59	ion	ion	NOUN
ajtas-2447	12	60	implantation	implantation	NOUN
ajtas-2447	12	61	and	and	CCONJ
ajtas-2447	12	62	adsorption	adsorption	NOUN
ajtas-2447	12	63	of	of	ADP
ajtas-2447	12	64	barium	barium	NOUN
ajtas-2447	12	65	atoms	atom	NOUN
ajtas-2447	12	66	on	on	ADP
ajtas-2447	12	67	the	the	DET
ajtas-2447	12	68	american	american	ADJ
ajtas-2447	12	69	journal	journal	PROPN
ajtas-2447	12	70	of	of	ADP
ajtas-2447	12	71	technology	technology	NOUN
ajtas-2447	12	72	and	and	CCONJ
ajtas-2447	12	73	applied	apply	VERB
ajtas-2447	12	74	sciences	science	NOUN
ajtas-2447	12	75	30	30	NUM
ajtas-2447	12	76	,	,	PUNCT
ajtas-2447	12	77	november	november	PROPN
ajtas-2447	12	78	2024	2024	NUM
ajtas-2447	12	79	p	p	NOUN
ajtas-2447	12	80	a	a	DET
ajtas-2447	12	81	g	g	NOUN
ajtas-2447	12	82	e	e	NOUN
ajtas-2447	12	83	|	|	ADV
ajtas-2447	12	84	7	7	NUM
ajtas-2447	12	85	www.americanjournal.org	www.americanjournal.org	NOUN
ajtas-2447	12	86	composition	composition	NOUN
ajtas-2447	12	87	,	,	PUNCT
ajtas-2447	12	88	morphology	morphology	NOUN
ajtas-2447	12	89	,	,	PUNCT
ajtas-2447	12	90	electronic	electronic	ADJ
ajtas-2447	12	91	and	and	CCONJ
ajtas-2447	12	92	crystal	crystal	NOUN
ajtas-2447	12	93	structure	structure	NOUN
ajtas-2447	12	94	of	of	ADP
ajtas-2447	12	95	the	the	DET
ajtas-2447	12	96	si(ge)/cu(al	si(ge)/cu(al	NOUN
ajtas-2447	12	97	)	)	PUNCT
ajtas-2447	12	98	system	system	NOUN
ajtas-2447	12	99	.	.	PUNCT
ajtas-2447	13	1	prior	prior	ADV
ajtas-2447	13	2	to	to	ADP
ajtas-2447	13	3	the	the	DET
ajtas-2447	13	4	start	start	NOUN
ajtas-2447	13	5	of	of	ADP
ajtas-2447	13	6	this	this	DET
ajtas-2447	13	7	work	work	NOUN
ajtas-2447	13	8	,	,	PUNCT
ajtas-2447	13	9	such	such	ADJ
ajtas-2447	13	10	studies	study	NOUN
ajtas-2447	13	11	had	have	AUX
ajtas-2447	13	12	not	not	PART
ajtas-2447	13	13	been	be	AUX
ajtas-2447	13	14	conducted	conduct	VERB
ajtas-2447	13	15	.	.	PUNCT
ajtas-2447	14	1	ultra	ultra	ADJ
ajtas-2447	14	2	-	-	ADJ
ajtas-2447	14	3	pure	pure	ADJ
ajtas-2447	14	4	single	single	ADJ
ajtas-2447	14	5	-	-	PUNCT
ajtas-2447	14	6	crystal	crystal	NOUN
ajtas-2447	14	7	samples	sample	NOUN
ajtas-2447	14	8	al(111	al(111	NOUN
ajtas-2447	14	9	)	)	PUNCT
ajtas-2447	14	10	and	and	CCONJ
ajtas-2447	14	11	cu(111	cu(111	NOUN
ajtas-2447	14	12	)	)	PUNCT
ajtas-2447	14	13	were	be	AUX
ajtas-2447	14	14	chosen	choose	VERB
ajtas-2447	14	15	as	as	ADP
ajtas-2447	14	16	substrates	substrate	NOUN
ajtas-2447	14	17	.	.	PUNCT
ajtas-2447	15	1	before	before	ADP
ajtas-2447	15	2	spraying	spray	VERB
ajtas-2447	15	3	si	si	NOUN
ajtas-2447	15	4	,	,	PUNCT
ajtas-2447	15	5	these	these	DET
ajtas-2447	15	6	samples	sample	NOUN
ajtas-2447	15	7	were	be	AUX
ajtas-2447	15	8	degassed	degas	VERB
ajtas-2447	15	9	at	at	ADP
ajtas-2447	15	10	t=850	t=850	DET
ajtas-2447	15	11	k	k	PROPN
ajtas-2447	15	12	and	and	CCONJ
ajtas-2447	15	13	900	900	NUM
ajtas-2447	15	14	k	k	NOUN
ajtas-2447	15	15	,	,	PUNCT
ajtas-2447	15	16	respectively	respectively	ADV
ajtas-2447	15	17	,	,	PUNCT
ajtas-2447	15	18	at	at	ADP
ajtas-2447	15	19	a	a	DET
ajtas-2447	15	20	vacuum	vacuum	NOUN
ajtas-2447	15	21	of	of	ADP
ajtas-2447	15	22	10	10	NUM
ajtas-2447	15	23	-	-	SYM
ajtas-2447	15	24	7	7	NUM
ajtas-2447	15	25	pa	pa	NOUN
ajtas-2447	15	26	for	for	ADP
ajtas-2447	15	27	3	3	NUM
ajtas-2447	15	28	-	-	SYM
ajtas-2447	15	29	4	4	NUM
ajtas-2447	15	30	hours	hour	NOUN
ajtas-2447	15	31	.	.	PUNCT
ajtas-2447	16	1	further	further	ADJ
ajtas-2447	16	2	cleaning	cleaning	NOUN
ajtas-2447	16	3	was	be	AUX
ajtas-2447	16	4	carried	carry	VERB
ajtas-2447	16	5	out	out	ADP
ajtas-2447	16	6	by	by	ADP
ajtas-2447	16	7	etching	etch	VERB
ajtas-2447	16	8	the	the	DET
ajtas-2447	16	9	surface	surface	NOUN
ajtas-2447	16	10	ar+	ar+	NOUN
ajtas-2447	16	11	with	with	ADP
ajtas-2447	16	12	an	an	DET
ajtas-2447	16	13	energy	energy	NOUN
ajtas-2447	16	14	of	of	ADP
ajtas-2447	16	15	1	1	NUM
ajtas-2447	16	16	kev	kev	NOUN
ajtas-2447	16	17	in	in	ADP
ajtas-2447	16	18	combination	combination	NOUN
ajtas-2447	16	19	with	with	ADP
ajtas-2447	16	20	short	short	ADJ
ajtas-2447	16	21	-	-	PUNCT
ajtas-2447	16	22	term	term	NOUN
ajtas-2447	16	23	annealing	annealing	NOUN
ajtas-2447	16	24	to	to	ADP
ajtas-2447	16	25	950	950	NUM
ajtas-2447	16	26	(	(	PUNCT
ajtas-2447	16	27	al	al	PROPN
ajtas-2447	16	28	)	)	PUNCT
ajtas-2447	16	29	and	and	CCONJ
ajtas-2447	16	30	1000	1000	NUM
ajtas-2447	16	31	k	k	X
ajtas-2447	16	32	(	(	PUNCT
ajtas-2447	16	33	cu	cu	PROPN
ajtas-2447	16	34	)	)	PUNCT
ajtas-2447	16	35	.	.	PUNCT
ajtas-2447	17	1	at	at	ADP
ajtas-2447	17	2	the	the	DET
ajtas-2447	17	3	same	same	ADJ
ajtas-2447	17	4	time	time	NOUN
ajtas-2447	17	5	,	,	PUNCT
ajtas-2447	17	6	the	the	DET
ajtas-2447	17	7	surface	surface	NOUN
ajtas-2447	17	8	oxygen	oxygen	NOUN
ajtas-2447	17	9	concentration	concentration	NOUN
ajtas-2447	17	10	was	be	AUX
ajtas-2447	17	11	≥1	≥1	NUM
ajtas-2447	17	12	at.%	at.%	NOUN
ajtas-2447	17	13	,	,	PUNCT
ajtas-2447	17	14	and	and	CCONJ
ajtas-2447	17	15	carbon	carbon	NOUN
ajtas-2447	17	16	0.5	0.5	NUM
ajtas-2447	17	17	at.%	at.%	NOUN
ajtas-2447	17	18	.	.	PUNCT
ajtas-2447	18	1	spraying	spray	VERB
ajtas-2447	18	2	of	of	ADP
ajtas-2447	18	3	si	si	NOUN
ajtas-2447	18	4	with	with	ADP
ajtas-2447	18	5	a	a	DET
ajtas-2447	18	6	thickness	thickness	NOUN
ajtas-2447	18	7	of	of	ADP
ajtas-2447	18	8	1	1	NUM
ajtas-2447	18	9	to	to	PART
ajtas-2447	18	10	20	20	NUM
ajtas-2447	18	11	monolayers	monolayer	NOUN
ajtas-2447	18	12	was	be	AUX
ajtas-2447	18	13	carried	carry	VERB
ajtas-2447	18	14	out	out	ADP
ajtas-2447	18	15	at	at	ADP
ajtas-2447	18	16	a	a	DET
ajtas-2447	18	17	vacuum	vacuum	NOUN
ajtas-2447	18	18	of	of	ADP
ajtas-2447	18	19	-10	-10	PROPN
ajtas-2447	18	20	-	-	PUNCT
ajtas-2447	18	21	6	6	NUM
ajtas-2447	18	22	pa	pa	PROPN
ajtas-2447	18	23	.	.	PROPN
ajtas-2447	18	24	changes	change	NOUN
ajtas-2447	18	25	in	in	ADP
ajtas-2447	18	26	the	the	DET
ajtas-2447	18	27	composition	composition	NOUN
ajtas-2447	18	28	and	and	CCONJ
ajtas-2447	18	29	electronic	electronic	ADJ
ajtas-2447	18	30	structure	structure	NOUN
ajtas-2447	18	31	of	of	ADP
ajtas-2447	18	32	the	the	DET
ajtas-2447	18	33	surface	surface	NOUN
ajtas-2447	18	34	of	of	ADP
ajtas-2447	18	35	al(111	al(111	NOUN
ajtas-2447	18	36	)	)	PUNCT
ajtas-2447	18	37	and	and	CCONJ
ajtas-2447	18	38	cu(111	cu(111	NOUN
ajtas-2447	18	39	)	)	PUNCT
ajtas-2447	18	40	during	during	SCONJ
ajtas-2447	18	41	the	the	DET
ajtas-2447	18	42	deposition	deposition	NOUN
ajtas-2447	18	43	of	of	ADP
ajtas-2447	18	44	si	si	NOUN
ajtas-2447	18	45	were	be	AUX
ajtas-2447	18	46	studied	study	VERB
ajtas-2447	18	47	by	by	ADP
ajtas-2447	18	48	augerelectron	augerelectron	NOUN
ajtas-2447	18	49	spectroscopy	spectroscopy	NOUN
ajtas-2447	18	50	,	,	PUNCT
ajtas-2447	18	51	spectroscopy	spectroscopy	NOUN
ajtas-2447	18	52	of	of	ADP
ajtas-2447	18	53	characteristic	characteristic	ADJ
ajtas-2447	18	54	energy	energy	NOUN
ajtas-2447	18	55	losses	loss	NOUN
ajtas-2447	18	56	by	by	ADP
ajtas-2447	18	57	electrons	electron	NOUN
ajtas-2447	18	58	,	,	PUNCT
ajtas-2447	18	59	and	and	CCONJ
ajtas-2447	18	60	ultraviolet	ultraviolet	ADJ
ajtas-2447	18	61	photoelectron	photoelectron	NOUN
ajtas-2447	18	62	spectroscopy	spectroscopy	NOUN
ajtas-2447	18	63	at	at	ADP
ajtas-2447	18	64	a	a	DET
ajtas-2447	18	65	vacuum	vacuum	NOUN
ajtas-2447	18	66	of	of	ADP
ajtas-2447	18	67	10	10	NUM
ajtas-2447	18	68	-	-	SYM
ajtas-2447	18	69	7	7	NUM
ajtas-2447	18	70	pa	pa	PROPN
ajtas-2447	18	71	.	.	PROPN
ajtas-2447	18	72	figure	figure	PROPN
ajtas-2447	18	73	1	1	NUM
ajtas-2447	18	74	shows	show	VERB
ajtas-2447	18	75	the	the	DET
ajtas-2447	18	76	auger	auger	NOUN
ajtas-2447	18	77	spectra	spectra	PROPN
ajtas-2447	18	78	obtained	obtain	VERB
ajtas-2447	18	79	by	by	ADP
ajtas-2447	18	80	sputtering	sputter	VERB
ajtas-2447	18	81	si	si	NOUN
ajtas-2447	18	82	on	on	ADP
ajtas-2447	18	83	the	the	DET
ajtas-2447	18	84	surface	surface	NOUN
ajtas-2447	18	85	of	of	ADP
ajtas-2447	18	86	al(111	al(111	NOUN
ajtas-2447	18	87	)	)	PUNCT
ajtas-2447	18	88	(	(	PUNCT
ajtas-2447	18	89	fig	fig	NOUN
ajtas-2447	18	90	.	.	PUNCT
ajtas-2447	19	1	1	1	NUM
ajtas-2447	19	2	,	,	PUNCT
ajtas-2447	19	3	a	a	PRON
ajtas-2447	19	4	)	)	PUNCT
ajtas-2447	19	5	and	and	CCONJ
ajtas-2447	19	6	cu(111	cu(111	NOUN
ajtas-2447	19	7	)	)	PUNCT
ajtas-2447	19	8	(	(	PUNCT
ajtas-2447	19	9	1	1	NUM
ajtas-2447	19	10	,	,	PUNCT
ajtas-2447	19	11	b	b	NOUN
ajtas-2447	19	12	)	)	PUNCT
ajtas-2447	19	13	.	.	PUNCT
ajtas-2447	20	1	the	the	DET
ajtas-2447	20	2	thickness	thickness	NOUN
ajtas-2447	20	3	of	of	ADP
ajtas-2447	20	4	the	the	DET
ajtas-2447	20	5	θ	θ	PROPN
ajtas-2447	20	6	films	film	NOUN
ajtas-2447	20	7	in	in	ADP
ajtas-2447	20	8	the	the	DET
ajtas-2447	20	9	monolayers	monolayer	NOUN
ajtas-2447	20	10	is	be	AUX
ajtas-2447	20	11	shown	show	VERB
ajtas-2447	20	12	in	in	ADP
ajtas-2447	20	13	the	the	DET
ajtas-2447	20	14	curves	curve	NOUN
ajtas-2447	20	15	.	.	PUNCT
ajtas-2447	21	1	it	it	PRON
ajtas-2447	21	2	can	can	AUX
ajtas-2447	21	3	be	be	AUX
ajtas-2447	21	4	seen	see	VERB
ajtas-2447	21	5	that	that	SCONJ
ajtas-2447	21	6	in	in	ADP
ajtas-2447	21	7	the	the	DET
ajtas-2447	21	8	case	case	NOUN
ajtas-2447	21	9	of	of	ADP
ajtas-2447	21	10	the	the	DET
ajtas-2447	21	11	si	si	NOUN
ajtas-2447	21	12	/	/	SYM
ajtas-2447	21	13	al(111	al(111	ADJ
ajtas-2447	21	14	)	)	PUNCT
ajtas-2447	21	15	system	system	NOUN
ajtas-2447	21	16	,	,	PUNCT
ajtas-2447	21	17	the	the	DET
ajtas-2447	21	18	adsorption	adsorption	NOUN
ajtas-2447	21	19	of	of	ADP
ajtas-2447	21	20	si	si	X
ajtas-2447	21	21	starting	start	VERB
ajtas-2447	21	22	with	with	ADP
ajtas-2447	21	23	θsi=2	θsi=2	NOUN
ajtas-2447	21	24	monolayers	monolayer	NOUN
ajtas-2447	21	25	is	be	AUX
ajtas-2447	21	26	accompanied	accompany	VERB
ajtas-2447	21	27	by	by	ADP
ajtas-2447	21	28	the	the	DET
ajtas-2447	21	29	appearance	appearance	NOUN
ajtas-2447	21	30	and	and	CCONJ
ajtas-2447	21	31	increase	increase	NOUN
ajtas-2447	21	32	in	in	ADP
ajtas-2447	21	33	the	the	DET
ajtas-2447	21	34	intensity	intensity	NOUN
ajtas-2447	21	35	of	of	ADP
ajtas-2447	21	36	the	the	DET
ajtas-2447	21	37	silicon	silicon	NOUN
ajtas-2447	21	38	peak	peak	NOUN
ajtas-2447	21	39	l23vv	l23vv	PROPN
ajtas-2447	21	40	(	(	PUNCT
ajtas-2447	21	41	e=92	e=92	PROPN
ajtas-2447	21	42	ev	ev	X
ajtas-2447	21	43	)	)	PUNCT
ajtas-2447	21	44	and	and	CCONJ
ajtas-2447	21	45	the	the	DET
ajtas-2447	21	46	weakening	weakening	NOUN
ajtas-2447	21	47	of	of	ADP
ajtas-2447	21	48	the	the	DET
ajtas-2447	21	49	intensity	intensity	NOUN
ajtas-2447	21	50	of	of	ADP
ajtas-2447	21	51	the	the	DET
ajtas-2447	21	52	egger	egger	NOUN
ajtas-2447	21	53	peak	peak	NOUN
ajtas-2447	21	54	l23vv	l23vv	PROPN
ajtas-2447	21	55	al	al	PROPN
ajtas-2447	21	56	(	(	PUNCT
ajtas-2447	21	57	e=68	e=68	PROPN
ajtas-2447	21	58	ev	ev	PROPN
ajtas-2447	21	59	)	)	PUNCT
ajtas-2447	21	60	.	.	PUNCT
ajtas-2447	22	1	with	with	ADP
ajtas-2447	22	2	the	the	DET
ajtas-2447	22	3	increase	increase	NOUN
ajtas-2447	22	4	in	in	ADP
ajtas-2447	22	5	the	the	DET
ajtas-2447	22	6	thickness	thickness	NOUN
ajtas-2447	22	7	of	of	ADP
ajtas-2447	22	8	the	the	DET
ajtas-2447	22	9	si	si	PROPN
ajtas-2447	22	10	film	film	NOUN
ajtas-2447	22	11	,	,	PUNCT
ajtas-2447	22	12	the	the	DET
ajtas-2447	22	13	position	position	NOUN
ajtas-2447	22	14	and	and	CCONJ
ajtas-2447	22	15	shape	shape	NOUN
ajtas-2447	22	16	of	of	ADP
ajtas-2447	22	17	the	the	DET
ajtas-2447	22	18	sir	sir	NOUN
ajtas-2447	22	19	peaks	peak	NOUN
ajtas-2447	22	20	si	si	PROPN
ajtas-2447	22	21	and	and	CCONJ
ajtas-2447	22	22	al	al	PROPN
ajtas-2447	22	23	practically	practically	ADV
ajtas-2447	22	24	does	do	AUX
ajtas-2447	22	25	not	not	PART
ajtas-2447	22	26	change	change	VERB
ajtas-2447	22	27	,	,	PUNCT
ajtas-2447	22	28	only	only	ADV
ajtas-2447	22	29	their	their	PRON
ajtas-2447	22	30	intensities	intensity	NOUN
ajtas-2447	22	31	change	change	VERB
ajtas-2447	22	32	.	.	PUNCT
ajtas-2447	23	1	starting	start	VERB
ajtas-2447	23	2	from	from	ADP
ajtas-2447	23	3	the	the	DET
ajtas-2447	23	4	thickness	thickness	NOUN
ajtas-2447	23	5	of	of	ADP
ajtas-2447	23	6	θsi	θsi	NOUN
ajtas-2447	23	7	=	=	SYM
ajtas-2447	23	8	3	3	NUM
ajtas-2447	23	9	-	-	SYM
ajtas-2447	23	10	4	4	NUM
ajtas-2447	23	11	of	of	ADP
ajtas-2447	23	12	the	the	DET
ajtas-2447	23	13	monolayer	monolayer	NOUN
ajtas-2447	23	14	,	,	PUNCT
ajtas-2447	23	15	there	there	PRON
ajtas-2447	23	16	is	be	VERB
ajtas-2447	23	17	a	a	DET
ajtas-2447	23	18	sharp	sharp	ADJ
ajtas-2447	23	19	decrease	decrease	NOUN
ajtas-2447	23	20	in	in	ADP
ajtas-2447	23	21	the	the	DET
ajtas-2447	23	22	intensity	intensity	NOUN
ajtas-2447	23	23	of	of	ADP
ajtas-2447	23	24	the	the	DET
ajtas-2447	23	25	al	al	PROPN
ajtas-2447	23	26	peak	peak	PROPN
ajtas-2447	23	27	,	,	PUNCT
ajtas-2447	23	28	which	which	PRON
ajtas-2447	23	29	is	be	AUX
ajtas-2447	23	30	explained	explain	VERB
ajtas-2447	23	31	by	by	ADP
ajtas-2447	23	32	the	the	DET
ajtas-2447	23	33	formation	formation	NOUN
ajtas-2447	23	34	of	of	ADP
ajtas-2447	23	35	a	a	DET
ajtas-2447	23	36	continuous	continuous	ADJ
ajtas-2447	23	37	film	film	NOUN
ajtas-2447	23	38	of	of	ADP
ajtas-2447	23	39	si	si	X
ajtas-2447	23	40	.	.	PROPN
ajtas-2447	23	41	complete	complete	ADJ
ajtas-2447	23	42	disappearance	disappearance	NOUN
ajtas-2447	23	43	of	of	ADP
ajtas-2447	23	44	the	the	DET
ajtas-2447	23	45	auger	auger	NOUN
ajtas-2447	23	46	peak	peak	PROPN
ajtas-2447	23	47	al	al	PROPN
ajtas-2447	23	48	is	be	AUX
ajtas-2447	23	49	observed	observe	VERB
ajtas-2447	23	50	at	at	ADP
ajtas-2447	23	51	θsi	θsi	NOUN
ajtas-2447	23	52	≥	≥	NUM
ajtas-2447	23	53	10	10	NUM
ajtas-2447	23	54	monolayers	monolayer	NOUN
ajtas-2447	23	55	.	.	PUNCT
ajtas-2447	24	1	the	the	DET
ajtas-2447	24	2	si	si	PROPN
ajtas-2447	24	3	concentration	concentration	NOUN
ajtas-2447	24	4	in	in	ADP
ajtas-2447	24	5	this	this	DET
ajtas-2447	24	6	film	film	NOUN
ajtas-2447	24	7	is	be	AUX
ajtas-2447	24	8	~35	~35	ADJ
ajtas-2447	24	9	-	-	SYM
ajtas-2447	24	10	40	40	NUM
ajtas-2447	24	11	at.%	at.%	NOUN
ajtas-2447	24	12	.	.	PUNCT
ajtas-2447	25	1	analysis	analysis	NOUN
ajtas-2447	25	2	of	of	ADP
ajtas-2447	25	3	the	the	DET
ajtas-2447	25	4	eco	eco	NOUN
ajtas-2447	25	5	results	result	NOUN
ajtas-2447	25	6	shows	show	VERB
ajtas-2447	25	7	that	that	SCONJ
ajtas-2447	25	8	up	up	ADP
ajtas-2447	25	9	to	to	PART
ajtas-2447	25	10	θsi	θsi	VERB
ajtas-2447	25	11	=	=	NOUN
ajtas-2447	25	12	8	8	NUM
ajtas-2447	25	13	-	-	SYM
ajtas-2447	25	14	10	10	NUM
ajtas-2447	25	15	monolayers	monolayer	NOUN
ajtas-2447	25	16	there	there	PRON
ajtas-2447	25	17	is	be	VERB
ajtas-2447	25	18	an	an	DET
ajtas-2447	25	19	intensive	intensive	ADJ
ajtas-2447	25	20	interdiffusion	interdiffusion	NOUN
ajtas-2447	25	21	of	of	ADP
ajtas-2447	25	22	si	si	NOUN
ajtas-2447	25	23	atoms	atom	NOUN
ajtas-2447	25	24	into	into	ADP
ajtas-2447	25	25	al	al	PROPN
ajtas-2447	25	26	and	and	CCONJ
ajtas-2447	25	27	al	al	PROPN
ajtas-2447	25	28	into	into	ADP
ajtas-2447	25	29	si	si	PROPN
ajtas-2447	25	30	.	.	PROPN
ajtas-2447	26	1	at	at	ADP
ajtas-2447	26	2	the	the	DET
ajtas-2447	26	3	same	same	ADJ
ajtas-2447	26	4	time	time	NOUN
ajtas-2447	26	5	,	,	PUNCT
ajtas-2447	26	6	a	a	DET
ajtas-2447	26	7	chemical	chemical	NOUN
ajtas-2447	26	8	bond	bond	NOUN
ajtas-2447	26	9	between	between	ADP
ajtas-2447	26	10	the	the	DET
ajtas-2447	26	11	atoms	atom	NOUN
ajtas-2447	26	12	of	of	ADP
ajtas-2447	26	13	al	al	PROPN
ajtas-2447	26	14	and	and	CCONJ
ajtas-2447	26	15	si	si	PROPN
ajtas-2447	26	16	is	be	AUX
ajtas-2447	26	17	not	not	PART
ajtas-2447	26	18	formed	form	VERB
ajtas-2447	26	19	,	,	PUNCT
ajtas-2447	26	20	but	but	CCONJ
ajtas-2447	26	21	a	a	DET
ajtas-2447	26	22	mechanical	mechanical	ADJ
ajtas-2447	26	23	mixture	mixture	NOUN
ajtas-2447	26	24	of	of	ADP
ajtas-2447	26	25	the	the	DET
ajtas-2447	26	26	[	[	X
ajtas-2447	26	27	al+si	al+si	X
ajtas-2447	26	28	]	]	X
ajtas-2447	26	29	type	type	NOUN
ajtas-2447	26	30	with	with	ADP
ajtas-2447	26	31	a	a	DET
ajtas-2447	26	32	thickness	thickness	NOUN
ajtas-2447	26	33	of	of	ADP
ajtas-2447	26	34	14	14	NUM
ajtas-2447	26	35	-	-	SYM
ajtas-2447	26	36	16	16	NUM
ajtas-2447	26	37	monolayers	monolayer	NOUN
ajtas-2447	26	38	(	(	PUNCT
ajtas-2447	26	39	35	35	NUM
ajtas-2447	26	40	-	-	SYM
ajtas-2447	26	41	40	40	NUM
ajtas-2447	26	42	å	å	NOUN
ajtas-2447	26	43	)	)	PUNCT
ajtas-2447	26	44	is	be	AUX
ajtas-2447	26	45	formed	form	VERB
ajtas-2447	26	46	.	.	PUNCT
ajtas-2447	27	1	at	at	ADP
ajtas-2447	27	2	θ	θ	PROPN
ajtas-2447	27	3	≥	≥	NUM
ajtas-2447	27	4	12	12	NUM
ajtas-2447	27	5	-	-	SYM
ajtas-2447	27	6	15	15	NUM
ajtas-2447	27	7	monolayers	monolayer	NOUN
ajtas-2447	27	8	,	,	PUNCT
ajtas-2447	27	9	the	the	DET
ajtas-2447	27	10	intensity	intensity	NOUN
ajtas-2447	27	11	of	of	ADP
ajtas-2447	27	12	the	the	DET
ajtas-2447	27	13	sil23vv	sil23vv	PROPN
ajtas-2447	27	14	peak	peak	NOUN
ajtas-2447	27	15	practically	practically	ADV
ajtas-2447	27	16	does	do	AUX
ajtas-2447	27	17	not	not	PART
ajtas-2447	27	18	change	change	VERB
ajtas-2447	27	19	.	.	PUNCT
ajtas-2447	28	1	a	a	DET
ajtas-2447	28	2	different	different	ADJ
ajtas-2447	28	3	picture	picture	NOUN
ajtas-2447	28	4	was	be	AUX
ajtas-2447	28	5	observed	observe	VERB
ajtas-2447	28	6	in	in	ADP
ajtas-2447	28	7	the	the	DET
ajtas-2447	28	8	auger	auger	NOUN
ajtas-2447	28	9	spectra	spectra	NOUN
ajtas-2447	28	10	of	of	ADP
ajtas-2447	28	11	the	the	DET
ajtas-2447	28	12	si	si	PROPN
ajtas-2447	28	13	/	/	SYM
ajtas-2447	28	14	cu(111	cu(111	ADJ
ajtas-2447	28	15	)	)	PUNCT
ajtas-2447	28	16	system	system	NOUN
ajtas-2447	28	17	(	(	PUNCT
ajtas-2447	28	18	1	1	NUM
ajtas-2447	28	19	,	,	PUNCT
ajtas-2447	28	20	b	b	NOUN
ajtas-2447	28	21	)	)	PUNCT
ajtas-2447	28	22	.	.	PUNCT
ajtas-2447	29	1	at	at	ADP
ajtas-2447	29	2	θsi	θsi	NOUN
ajtas-2447	29	3	=	=	SYM
ajtas-2447	29	4	2	2	NUM
ajtas-2447	29	5	monolayers	monolayer	NOUN
ajtas-2447	29	6	,	,	PUNCT
ajtas-2447	29	7	the	the	DET
ajtas-2447	29	8	peak	peak	NOUN
ajtas-2447	29	9	l23vv	l23vv	ADP
ajtas-2447	29	10	si	si	PROPN
ajtas-2447	29	11	appears	appear	VERB
ajtas-2447	29	12	in	in	ADP
ajtas-2447	29	13	the	the	DET
ajtas-2447	29	14	auger	auger	NOUN
ajtas-2447	29	15	spectrum	spectrum	NOUN
ajtas-2447	29	16	,	,	PUNCT
ajtas-2447	29	17	the	the	DET
ajtas-2447	29	18	intensity	intensity	NOUN
ajtas-2447	29	19	of	of	ADP
ajtas-2447	29	20	the	the	DET
ajtas-2447	29	21	peak	peak	NOUN
ajtas-2447	29	22	cu	cu	PROPN
ajtas-2447	29	23	mvv	mvv	PROPN
ajtas-2447	29	24	(	(	PUNCT
ajtas-2447	29	25	e=61	e=61	NOUN
ajtas-2447	29	26	ev	ev	PROPN
ajtas-2447	29	27	)	)	PUNCT
ajtas-2447	29	28	decreases	decrease	NOUN
ajtas-2447	29	29	and	and	CCONJ
ajtas-2447	29	30	its	its	PRON
ajtas-2447	29	31	width	width	ADJ
ajtas-2447	29	32	increases	increase	VERB
ajtas-2447	29	33	slightly	slightly	ADV
ajtas-2447	29	34	.	.	PUNCT
ajtas-2447	30	1	starting	start	VERB
ajtas-2447	30	2	from	from	ADP
ajtas-2447	30	3	θ≈3	θ≈3	ADJ
ajtas-2447	30	4	-	-	SYM
ajtas-2447	30	5	4	4	NUM
ajtas-2447	30	6	monolayers	monolayer	NOUN
ajtas-2447	30	7	,	,	PUNCT
ajtas-2447	30	8	the	the	DET
ajtas-2447	30	9	peak	peak	NOUN
ajtas-2447	30	10	si	si	X
ajtas-2447	30	11	with	with	ADP
ajtas-2447	30	12	e=92	e=92	PRON
ajtas-2447	30	13	ev	ev	PROPN
ajtas-2447	30	14	splits	split	VERB
ajtas-2447	30	15	into	into	ADP
ajtas-2447	30	16	two	two	NUM
ajtas-2447	30	17	peaks	peak	NOUN
ajtas-2447	30	18	:	:	PUNCT
ajtas-2447	30	19	90	90	NUM
ajtas-2447	30	20	and	and	CCONJ
ajtas-2447	30	21	94	94	NUM
ajtas-2447	30	22	ev	ev	NOUN
ajtas-2447	31	1	[	[	X
ajtas-2447	31	2	14	14	NUM
ajtas-2447	31	3	]	]	PUNCT
ajtas-2447	31	4	,	,	PUNCT
ajtas-2447	31	5	and	and	CCONJ
ajtas-2447	31	6	instead	instead	ADV
ajtas-2447	31	7	of	of	ADP
ajtas-2447	31	8	the	the	DET
ajtas-2447	31	9	peak	peak	NOUN
ajtas-2447	31	10	cu	cu	PROPN
ajtas-2447	31	11	with	with	ADP
ajtas-2447	31	12	e=61	e=61	PROPN
ajtas-2447	31	13	ev	ev	PROPN
ajtas-2447	31	14	,	,	PUNCT
ajtas-2447	31	15	peaks	peak	NOUN
ajtas-2447	31	16	with	with	ADP
ajtas-2447	31	17	energies	energy	NOUN
ajtas-2447	31	18	of	of	ADP
ajtas-2447	31	19	59	59	NUM
ajtas-2447	31	20	and	and	CCONJ
ajtas-2447	31	21	63	63	NUM
ajtas-2447	31	22	ev	ev	X
ajtas-2447	31	23	appear	appear	PROPN
ajtas-2447	31	24	.	.	PUNCT
ajtas-2447	32	1	the	the	DET
ajtas-2447	32	2	results	result	NOUN
ajtas-2447	32	3	show	show	VERB
ajtas-2447	32	4	that	that	SCONJ
ajtas-2447	32	5	in	in	ADP
ajtas-2447	32	6	this	this	DET
ajtas-2447	32	7	case	case	NOUN
ajtas-2447	32	8	the	the	DET
ajtas-2447	32	9	chemical	chemical	NOUN
ajtas-2447	32	10	compound	compound	NOUN
ajtas-2447	32	11	cu+si	cu+si	PROPN
ajtas-2447	32	12	is	be	AUX
ajtas-2447	32	13	formed	form	VERB
ajtas-2447	32	14	[	[	X
ajtas-2447	32	15	15	15	NUM
ajtas-2447	32	16	]	]	PUNCT
ajtas-2447	32	17	.	.	PUNCT
ajtas-2447	33	1	analysis	analysis	NOUN
ajtas-2447	33	2	of	of	ADP
ajtas-2447	33	3	changes	change	NOUN
ajtas-2447	33	4	in	in	ADP
ajtas-2447	33	5	the	the	DET
ajtas-2447	33	6	intensities	intensity	NOUN
ajtas-2447	33	7	of	of	ADP
ajtas-2447	33	8	high	high	ADJ
ajtas-2447	33	9	-	-	PUNCT
ajtas-2447	33	10	energy	energy	NOUN
ajtas-2447	33	11	peaks	peak	NOUN
ajtas-2447	33	12	cu	cu	PROPN
ajtas-2447	33	13	(	(	PUNCT
ajtas-2447	33	14	elmm=922	elmm=922	PROPN
ajtas-2447	33	15	ev	ev	VERB
ajtas-2447	33	16	)	)	PUNCT
ajtas-2447	33	17	and	and	CCONJ
ajtas-2447	33	18	si	si	PROPN
ajtas-2447	33	19	(	(	PUNCT
ajtas-2447	33	20	elmm=1620	elmm=1620	PROPN
ajtas-2447	33	21	ev	ev	NOUN
ajtas-2447	33	22	)	)	PUNCT
ajtas-2447	33	23	and	and	CCONJ
ajtas-2447	33	24	calculations	calculation	NOUN
ajtas-2447	33	25	carried	carry	VERB
ajtas-2447	33	26	out	out	ADP
ajtas-2447	33	27	using	use	VERB
ajtas-2447	33	28	the	the	DET
ajtas-2447	33	29	formula	formula	NOUN
ajtas-2447	33	30	cx	cx	NOUN
ajtas-2447	34	1	=	=	NOUN
ajtas-2447	34	2	αcstable	αcstable	ADJ
ajtas-2447	34	3	showed	show	VERB
ajtas-2447	34	4	that	that	SCONJ
ajtas-2447	34	5	at	at	ADP
ajtas-2447	34	6	θ≈12	θ≈12	VERB
ajtas-2447	34	7	monolayers	monolayer	NOUN
ajtas-2447	34	8	,	,	PUNCT
ajtas-2447	34	9	an	an	DET
ajtas-2447	34	10	amorphous	amorphous	ADJ
ajtas-2447	34	11	film	film	NOUN
ajtas-2447	34	12	(	(	PUNCT
ajtas-2447	34	13	fig	fig	NOUN
ajtas-2447	34	14	.	.	PUNCT
ajtas-2447	35	1	1.b	1.b	NUM
ajtas-2447	35	2	)	)	PUNCT
ajtas-2447	35	3	of	of	ADP
ajtas-2447	35	4	copper	copper	NOUN
ajtas-2447	35	5	silicide	silicide	NOUN
ajtas-2447	35	6	is	be	AUX
ajtas-2447	35	7	formed	form	VERB
ajtas-2447	35	8	with	with	ADP
ajtas-2447	35	9	a	a	DET
ajtas-2447	35	10	thickness	thickness	NOUN
ajtas-2447	35	11	of	of	ADP
ajtas-2447	35	12	θ≈24	θ≈24	ADJ
ajtas-2447	35	13	-	-	SYM
ajtas-2447	35	14	26	26	NUM
ajtas-2447	35	15	monolayers	monolayer	NOUN
ajtas-2447	35	16	(	(	PUNCT
ajtas-2447	35	17	60	60	NUM
ajtas-2447	35	18	-	-	SYM
ajtas-2447	35	19	65	65	NUM
ajtas-2447	35	20	å	å	NOUN
ajtas-2447	35	21	)	)	PUNCT
ajtas-2447	35	22	with	with	ADP
ajtas-2447	35	23	an	an	DET
ajtas-2447	35	24	approximate	approximate	ADJ
ajtas-2447	35	25	composition	composition	NOUN
ajtas-2447	35	26	of	of	ADP
ajtas-2447	35	27	cusi	cusi	NOUN
ajtas-2447	35	28	.	.	PUNCT
ajtas-2447	36	1	at	at	ADP
ajtas-2447	36	2	a	a	DET
ajtas-2447	36	3	thickness	thickness	NOUN
ajtas-2447	36	4	of	of	ADP
ajtas-2447	36	5	θsi	θsi	NOUN
ajtas-2447	36	6	≥	≥	NUM
ajtas-2447	36	7	12	12	NUM
ajtas-2447	36	8	-	-	SYM
ajtas-2447	36	9	15	15	NUM
ajtas-2447	36	10	monolayers	monolayer	NOUN
ajtas-2447	36	11	,	,	PUNCT
ajtas-2447	36	12	a	a	DET
ajtas-2447	36	13	film	film	NOUN
ajtas-2447	36	14	of	of	ADP
ajtas-2447	36	15	"	"	PUNCT
ajtas-2447	36	16	pure	pure	ADJ
ajtas-2447	36	17	"	"	PUNCT
ajtas-2447	36	18	silicon	silicon	NOUN
ajtas-2447	36	19	is	be	AUX
ajtas-2447	36	20	formed	form	VERB
ajtas-2447	36	21	.	.	PUNCT
ajtas-2447	37	1	heating	heating	NOUN
ajtas-2447	37	2	of	of	ADP
ajtas-2447	37	3	the	the	DET
ajtas-2447	37	4	si	si	PROPN
ajtas-2447	37	5	/	/	SYM
ajtas-2447	37	6	cu(111	cu(111	ADJ
ajtas-2447	37	7	)	)	PUNCT
ajtas-2447	37	8	system	system	NOUN
ajtas-2447	37	9	with	with	ADP
ajtas-2447	37	10	θsi	θsi	NOUN
ajtas-2447	37	11	≈	≈	PROPN
ajtas-2447	37	12	12	12	NUM
ajtas-2447	37	13	monolayers	monolayer	NOUN
ajtas-2447	37	14	at	at	ADP
ajtas-2447	37	15	t=	t=	NOUN
ajtas-2447	37	16	810	810	NUM
ajtas-2447	37	17	k	k	NOUN
ajtas-2447	37	18	for	for	ADP
ajtas-2447	37	19	30	30	NUM
ajtas-2447	37	20	-	-	SYM
ajtas-2447	37	21	40	40	NUM
ajtas-2447	37	22	minutes	minute	NOUN
ajtas-2447	37	23	led	lead	VERB
ajtas-2447	37	24	to	to	ADP
ajtas-2447	37	25	formation	formation	NOUN
ajtas-2447	37	26	of	of	ADP
ajtas-2447	37	27	a	a	DET
ajtas-2447	37	28	polycrystalline	polycrystalline	ADJ
ajtas-2447	37	29	film	film	NOUN
ajtas-2447	37	30	(	(	PUNCT
ajtas-2447	37	31	fig	fig	NOUN
ajtas-2447	37	32	.	.	PUNCT
ajtas-2447	38	1	1.b	1.b	NUM
ajtas-2447	38	2	)	)	PUNCT
ajtas-2447	38	3	cusi	cusi	NOUN
ajtas-2447	38	4	with	with	ADP
ajtas-2447	38	5	a	a	DET
ajtas-2447	38	6	good	good	ADJ
ajtas-2447	38	7	stoichiometric	stoichiometric	NOUN
ajtas-2447	38	8	composition	composition	NOUN
ajtas-2447	38	9	,	,	PUNCT
ajtas-2447	38	10	and	and	CCONJ
ajtas-2447	38	11	at	at	ADP
ajtas-2447	38	12	t	t	PROPN
ajtas-2447	38	13	≈	≈	PROPN
ajtas-2447	38	14	900	900	NUM
ajtas-2447	38	15	k	k	NOUN
ajtas-2447	38	16	,	,	PUNCT
ajtas-2447	38	17	an	an	DET
ajtas-2447	38	18	insular	insular	ADJ
ajtas-2447	38	19	single	single	ADJ
ajtas-2447	38	20	-	-	PUNCT
ajtas-2447	38	21	crystal	crystal	NOUN
ajtas-2447	38	22	film	film	NOUN
ajtas-2447	38	23	was	be	AUX
ajtas-2447	38	24	formed	form	VERB
ajtas-2447	38	25	.	.	PUNCT
ajtas-2447	39	1	in	in	ADP
ajtas-2447	39	2	the	the	DET
ajtas-2447	39	3	case	case	NOUN
ajtas-2447	39	4	of	of	ADP
ajtas-2447	39	5	θsi	θsi	NOUN
ajtas-2447	39	6	≥	≥	NUM
ajtas-2447	39	7	15	15	NUM
ajtas-2447	39	8	-	-	SYM
ajtas-2447	39	9	20	20	NUM
ajtas-2447	39	10	monolayers	monolayer	NOUN
ajtas-2447	39	11	,	,	PUNCT
ajtas-2447	39	12	heating	heat	VERB
ajtas-2447	39	13	at	at	ADP
ajtas-2447	39	14	t-750	t-750	NOUN
ajtas-2447	39	15	k	k	PROPN
ajtas-2447	39	16	leads	lead	VERB
ajtas-2447	39	17	to	to	ADP
ajtas-2447	39	18	an	an	DET
ajtas-2447	39	19	increase	increase	NOUN
ajtas-2447	39	20	in	in	ADP
ajtas-2447	39	21	the	the	DET
ajtas-2447	39	22	thickness	thickness	NOUN
ajtas-2447	39	23	of	of	ADP
ajtas-2447	39	24	the	the	DET
ajtas-2447	39	25	cusi	cusi	NOUN
ajtas-2447	39	26	film	film	NOUN
ajtas-2447	39	27	by	by	ADP
ajtas-2447	39	28	2	2	NUM
ajtas-2447	39	29	-	-	SYM
ajtas-2447	39	30	3	3	NUM
ajtas-2447	39	31	monolayers	monolayer	NOUN
ajtas-2447	39	32	,	,	PUNCT
ajtas-2447	39	33	and	and	CCONJ
ajtas-2447	39	34	the	the	DET
ajtas-2447	39	35	surface	surface	NOUN
ajtas-2447	39	36	si	si	NOUN
ajtas-2447	39	37	film	film	NOUN
ajtas-2447	39	38	had	have	VERB
ajtas-2447	39	39	a	a	DET
ajtas-2447	39	40	structure	structure	NOUN
ajtas-2447	39	41	close	close	ADV
ajtas-2447	39	42	to	to	ADP
ajtas-2447	39	43	monocrystalline	monocrystalline	VERB
ajtas-2447	39	44	.	.	PUNCT
ajtas-2447	40	1	at	at	ADP
ajtas-2447	40	2	an	an	DET
ajtas-2447	40	3	increase	increase	NOUN
ajtas-2447	40	4	in	in	ADP
ajtas-2447	40	5	temperature	temperature	NOUN
ajtas-2447	40	6	to	to	ADP
ajtas-2447	40	7	900	900	NUM
ajtas-2447	40	8	k	k	NOUN
ajtas-2447	40	9	,	,	PUNCT
ajtas-2447	40	10	the	the	DET
ajtas-2447	40	11	morphology	morphology	NOUN
ajtas-2447	40	12	of	of	ADP
ajtas-2447	40	13	the	the	DET
ajtas-2447	40	14	surface	surface	NOUN
ajtas-2447	40	15	of	of	ADP
ajtas-2447	40	16	the	the	DET
ajtas-2447	40	17	si	si	NOUN
ajtas-2447	40	18	film	film	NOUN
ajtas-2447	40	19	changes	change	NOUN
ajtas-2447	40	20	,	,	PUNCT
ajtas-2447	40	21	due	due	ADP
ajtas-2447	40	22	to	to	ADP
ajtas-2447	40	23	the	the	DET
ajtas-2447	40	24	formation	formation	NOUN
ajtas-2447	40	25	of	of	ADP
ajtas-2447	40	26	islands	island	NOUN
ajtas-2447	40	27	in	in	ADP
ajtas-2447	40	28	the	the	DET
ajtas-2447	40	29	cusi	cusi	NOUN
ajtas-2447	40	30	film	film	NOUN
ajtas-2447	40	31	.	.	PUNCT
ajtas-2447	41	1	thus	thus	ADV
ajtas-2447	41	2	,	,	PUNCT
ajtas-2447	41	3	the	the	DET
ajtas-2447	41	4	optimal	optimal	ADJ
ajtas-2447	41	5	temperature	temperature	NOUN
ajtas-2447	41	6	for	for	ADP
ajtas-2447	41	7	creating	create	VERB
ajtas-2447	41	8	a	a	DET
ajtas-2447	41	9	si	si	ADJ
ajtas-2447	41	10	-	-	PUNCT
ajtas-2447	41	11	cusi	cusi	NOUN
ajtas-2447	41	12	-	-	PUNCT
ajtas-2447	41	13	cu	cu	NOUN
ajtas-2447	41	14	nanoheterostructure	nanoheterostructure	NOUN
ajtas-2447	41	15	is	be	AUX
ajtas-2447	41	16	750	750	NUM
ajtas-2447	41	17	-	-	SYM
ajtas-2447	41	18	800	800	NUM
ajtas-2447	41	19	k.	k.	NOUN
ajtas-2447	41	20	in	in	ADP
ajtas-2447	41	21	the	the	DET
ajtas-2447	41	22	case	case	NOUN
ajtas-2447	41	23	of	of	ADP
ajtas-2447	41	24	si	si	PROPN
ajtas-2447	41	25	films	film	NOUN
ajtas-2447	41	26	with	with	ADP
ajtas-2447	41	27	θsi	θsi	PROPN
ajtas-2447	41	28	≥	≥	NUM
ajtas-2447	41	29	25	25	NUM
ajtas-2447	41	30	-	-	SYM
ajtas-2447	41	31	30	30	NUM
ajtas-2447	41	32	monolayers	monolayer	NOUN
ajtas-2447	41	33	at	at	ADP
ajtas-2447	41	34	a	a	DET
ajtas-2447	41	35	temperature	temperature	NOUN
ajtas-2447	41	36	american	american	ADJ
ajtas-2447	41	37	journal	journal	NOUN
ajtas-2447	41	38	of	of	ADP
ajtas-2447	41	39	technology	technology	NOUN
ajtas-2447	41	40	and	and	CCONJ
ajtas-2447	41	41	applied	apply	VERB
ajtas-2447	41	42	sciences	science	NOUN
ajtas-2447	41	43	30	30	NUM
ajtas-2447	41	44	,	,	PUNCT
ajtas-2447	41	45	november	november	PROPN
ajtas-2447	41	46	2024	2024	NUM
ajtas-2447	41	47	p	p	NOUN
ajtas-2447	41	48	a	a	DET
ajtas-2447	41	49	g	g	NOUN
ajtas-2447	41	50	e	e	NOUN
ajtas-2447	41	51	|	|	ADV
ajtas-2447	41	52	8	8	NUM
ajtas-2447	41	53	www.americanjournal.org	www.americanjournal.org	NOUN
ajtas-2447	41	54	of	of	ADP
ajtas-2447	41	55	900	900	NUM
ajtas-2447	41	56	k	k	NOUN
ajtas-2447	41	57	,	,	PUNCT
ajtas-2447	41	58	a	a	DET
ajtas-2447	41	59	single	single	ADJ
ajtas-2447	41	60	-	-	PUNCT
ajtas-2447	41	61	crystal	crystal	NOUN
ajtas-2447	41	62	film	film	NOUN
ajtas-2447	41	63	si(111	si(111	NOUN
ajtas-2447	41	64	)	)	PUNCT
ajtas-2447	41	65	was	be	AUX
ajtas-2447	41	66	formed	form	VERB
ajtas-2447	41	67	,	,	PUNCT
ajtas-2447	41	68	the	the	DET
ajtas-2447	41	69	composition	composition	NOUN
ajtas-2447	41	70	,	,	PUNCT
ajtas-2447	41	71	structure	structure	NOUN
ajtas-2447	41	72	and	and	CCONJ
ajtas-2447	41	73	properties	property	NOUN
ajtas-2447	41	74	of	of	ADP
ajtas-2447	41	75	which	which	PRON
ajtas-2447	41	76	do	do	AUX
ajtas-2447	41	77	not	not	PART
ajtas-2447	41	78	differ	differ	VERB
ajtas-2447	41	79	for	for	ADP
ajtas-2447	41	80	massive	massive	ADJ
ajtas-2447	41	81	films	film	NOUN
ajtas-2447	41	82	(	(	PUNCT
ajtas-2447	41	83	fig	fig	NOUN
ajtas-2447	41	84	.	.	PUNCT
ajtas-2447	42	1	1.b	1.b	NUM
ajtas-2447	42	2	)	)	PUNCT
ajtas-2447	42	3	.	.	PUNCT
ajtas-2447	43	1	the	the	DET
ajtas-2447	43	2	spectra	spectra	NOUN
ajtas-2447	43	3	of	of	ADP
ajtas-2447	43	4	cpee	cpee	NOUN
ajtas-2447	43	5	al	al	PROPN
ajtas-2447	43	6	and	and	CCONJ
ajtas-2447	43	7	cu	cu	PROPN
ajtas-2447	43	8	with	with	ADP
ajtas-2447	43	9	a	a	DET
ajtas-2447	43	10	si	si	NOUN
ajtas-2447	43	11	film	film	NOUN
ajtas-2447	43	12	with	with	ADP
ajtas-2447	43	13	a	a	DET
ajtas-2447	43	14	thickness	thickness	NOUN
ajtas-2447	43	15	of	of	ADP
ajtas-2447	43	16	θsi	θsi	NOUN
ajtas-2447	43	17	≈8	≈8	PROPN
ajtas-2447	43	18	and	and	CCONJ
ajtas-2447	43	19	θsi	θsi	VERB
ajtas-2447	43	20	≈20	≈20	NOUN
ajtas-2447	43	21	monolayers	monolayer	NOUN
ajtas-2447	43	22	are	be	AUX
ajtas-2447	43	23	shown	show	VERB
ajtas-2447	43	24	in	in	ADP
ajtas-2447	43	25	figs	fig	NOUN
ajtas-2447	43	26	.	.	PUNCT
ajtas-2447	44	1	1a	1a	PROPN
ajtas-2447	44	2	and	and	CCONJ
ajtas-2447	44	3	1b	1b	NUM
ajtas-2447	44	4	,	,	PUNCT
ajtas-2447	44	5	respectively	respectively	ADV
ajtas-2447	44	6	.	.	PUNCT
ajtas-2447	45	1	rice	rice	NOUN
ajtas-2447	45	2	.	.	PUNCT
ajtas-2447	46	1	1	1	X
ajtas-2447	46	2	.	.	X
ajtas-2447	46	3	auger	auger	NOUN
ajtas-2447	46	4	spectra	spectra	PROPN
ajtas-2447	46	5	si	si	PROPN
ajtas-2447	46	6	sprayed	spray	VERB
ajtas-2447	46	7	on	on	ADP
ajtas-2447	46	8	the	the	DET
ajtas-2447	46	9	surface	surface	NOUN
ajtas-2447	46	10	al(111	al(111	PUNCT
ajtas-2447	46	11	)	)	PUNCT
ajtas-2447	46	12	(	(	PUNCT
ajtas-2447	46	13	fig	fig	NOUN
ajtas-2447	46	14	.	.	PUNCT
ajtas-2447	47	1	1	1	NUM
ajtas-2447	47	2	,	,	PUNCT
ajtas-2447	47	3	a	a	PRON
ajtas-2447	47	4	)	)	PUNCT
ajtas-2447	47	5	and	and	CCONJ
ajtas-2447	47	6	cu(111	cu(111	NOUN
ajtas-2447	47	7	)	)	PUNCT
ajtas-2447	47	8	(	(	PUNCT
ajtas-2447	47	9	fig	fig	NOUN
ajtas-2447	47	10	.	.	PUNCT
ajtas-2447	48	1	1	1	NUM
ajtas-2447	48	2	,	,	PUNCT
ajtas-2447	48	3	b	b	NOUN
ajtas-2447	48	4	)	)	PUNCT
ajtas-2447	48	5	.	.	PUNCT
ajtas-2447	49	1	figures	figure	NOUN
ajtas-2447	49	2	for	for	ADP
ajtas-2447	49	3	the	the	DET
ajtas-2447	49	4	thickness	thickness	NOUN
ajtas-2447	49	5	curves	curve	NOUN
ajtas-2447	49	6	of	of	ADP
ajtas-2447	49	7	si	si	NOUN
ajtas-2447	49	8	films	film	NOUN
ajtas-2447	49	9	in	in	ADP
ajtas-2447	49	10	monolayers	monolayer	NOUN
ajtas-2447	49	11	.	.	PUNCT
ajtas-2447	50	1	similar	similar	ADJ
ajtas-2447	50	2	patterns	pattern	NOUN
ajtas-2447	50	3	were	be	AUX
ajtas-2447	50	4	observed	observe	VERB
ajtas-2447	50	5	when	when	SCONJ
ajtas-2447	50	6	sputtering	sputter	VERB
ajtas-2447	50	7	ge	ge	PROPN
ajtas-2447	50	8	on	on	ADP
ajtas-2447	50	9	the	the	DET
ajtas-2447	50	10	surface	surface	NOUN
ajtas-2447	50	11	of	of	ADP
ajtas-2447	50	12	al(111	al(111	NOUN
ajtas-2447	50	13	)	)	PUNCT
ajtas-2447	50	14	and	and	CCONJ
ajtas-2447	50	15	cu(111	cu(111	NOUN
ajtas-2447	50	16	)	)	PUNCT
ajtas-2447	50	17	.	.	PUNCT
ajtas-2447	51	1	therefore	therefore	ADV
ajtas-2447	51	2	,	,	PUNCT
ajtas-2447	51	3	the	the	DET
ajtas-2447	51	4	results	result	NOUN
ajtas-2447	51	5	of	of	ADP
ajtas-2447	51	6	the	the	DET
ajtas-2447	51	7	study	study	NOUN
ajtas-2447	51	8	for	for	ADP
ajtas-2447	51	9	ge	ge	PROPN
ajtas-2447	51	10	films	film	NOUN
ajtas-2447	51	11	are	be	AUX
ajtas-2447	51	12	not	not	PART
ajtas-2447	51	13	given	give	VERB
ajtas-2447	51	14	.	.	PUNCT
ajtas-2447	52	1	it	it	PRON
ajtas-2447	52	2	should	should	AUX
ajtas-2447	52	3	be	be	AUX
ajtas-2447	52	4	noted	note	VERB
ajtas-2447	52	5	that	that	SCONJ
ajtas-2447	52	6	at	at	ADP
ajtas-2447	52	7	θ	θ	PROPN
ajtas-2447	52	8	≥20	≥20	NOUN
ajtas-2447	52	9	-	-	PUNCT
ajtas-2447	52	10	25	25	NUM
ajtas-2447	52	11	monolayers	monolayer	NOUN
ajtas-2447	52	12	,	,	PUNCT
ajtas-2447	52	13	heating	heat	VERB
ajtas-2447	52	14	at	at	ADP
ajtas-2447	52	15	a	a	DET
ajtas-2447	52	16	temperature	temperature	NOUN
ajtas-2447	52	17	of	of	ADP
ajtas-2447	52	18	950	950	NUM
ajtas-2447	52	19	k	k	NOUN
ajtas-2447	52	20	leads	lead	VERB
ajtas-2447	52	21	to	to	ADP
ajtas-2447	52	22	the	the	DET
ajtas-2447	52	23	formation	formation	NOUN
ajtas-2447	52	24	of	of	ADP
ajtas-2447	52	25	a	a	DET
ajtas-2447	52	26	film	film	NOUN
ajtas-2447	52	27	of	of	ADP
ajtas-2447	52	28	si(111	si(111	NOUN
ajtas-2447	52	29	)	)	PUNCT
ajtas-2447	52	30	and	and	CCONJ
ajtas-2447	52	31	ge(111	ge(111	NOUN
ajtas-2447	52	32	)	)	PUNCT
ajtas-2447	52	33	with	with	ADP
ajtas-2447	52	34	a	a	DET
ajtas-2447	52	35	good	good	ADJ
ajtas-2447	52	36	stoichiometric	stoichiometric	ADJ
ajtas-2447	52	37	composition	composition	NOUN
ajtas-2447	52	38	.	.	PUNCT
ajtas-2447	53	1	references	reference	NOUN
ajtas-2447	53	2	1	1	NUM
ajtas-2447	53	3	.	.	PUNCT
ajtas-2447	54	1	landry	landry	PROPN
ajtas-2447	54	2	o.	o.	PROPN
ajtas-2447	54	3	,	,	PUNCT
ajtas-2447	54	4	bougerol	bougerol	PROPN
ajtas-2447	54	5	c.	c.	PROPN
ajtas-2447	54	6	,	,	PUNCT
ajtas-2447	54	7	renevier	renevier	PROPN
ajtas-2447	54	8	h.	h.	PROPN
ajtas-2447	54	9	,	,	PUNCT
ajtas-2447	54	10	daudin	daudin	PROPN
ajtas-2447	54	11	b.	b.	PROPN
ajtas-2447	54	12	//	//	PROPN
ajtas-2447	54	13	nanotechnology	nanotechnology	PROPN
ajtas-2447	54	14	.	.	PUNCT
ajtas-2447	54	15	–	–	PUNCT
ajtas-2447	54	16	2009	2009	NUM
ajtas-2447	54	17	.	.	PUNCT
ajtas-2447	54	18	–	–	PUNCT
ajtas-2447	54	19	т	т	X
ajtas-2447	54	20	.	.	PROPN
ajtas-2447	54	21	20	20	NUM
ajtas-2447	54	22	.	.	X
ajtas-2447	54	23	–	–	PUNCT
ajtas-2447	54	24	№	№	NOUN
ajtas-2447	54	25	.	.	PUNCT
ajtas-2447	54	26	41	41	NUM
ajtas-2447	54	27	.	.	PUNCT
ajtas-2447	54	28	–	–	PUNCT
ajtas-2447	54	29	с	с	PROPN
ajtas-2447	54	30	.	.	PROPN
ajtas-2447	54	31	415602	415602	NUM
ajtas-2447	54	32	.	.	PUNCT
ajtas-2447	55	1	2	2	X
ajtas-2447	55	2	.	.	X
ajtas-2447	55	3	wang	wang	PROPN
ajtas-2447	55	4	d.	d.	PROPN
ajtas-2447	55	5	,	,	PUNCT
ajtas-2447	55	6	zou	zou	PROPN
ajtas-2447	55	7	z.	z.	PROPN
ajtas-2447	55	8	q.	q.	PROPN
ajtas-2447	55	9	formation	formation	NOUN
ajtas-2447	55	10	of	of	ADP
ajtas-2447	55	11	manganese	manganese	ADJ
ajtas-2447	55	12	silicide	silicide	NOUN
ajtas-2447	55	13	nanowires	nanowire	NOUN
ajtas-2447	55	14	on	on	ADP
ajtas-2447	55	15	si	si	X
ajtas-2447	55	16	(	(	PUNCT
ajtas-2447	55	17	111	111	NUM
ajtas-2447	55	18	)	)	PUNCT
ajtas-2447	55	19	surfaces	surface	NOUN
ajtas-2447	55	20	by	by	ADP
ajtas-2447	55	21	the	the	DET
ajtas-2447	55	22	reactive	reactive	ADJ
ajtas-2447	55	23	epitaxy	epitaxy	PROPN
ajtas-2447	55	24	method	method	NOUN
ajtas-2447	55	25	//nanotechnology	//nanotechnology	PUNCT
ajtas-2447	55	26	.	.	PUNCT
ajtas-2447	55	27	–	–	PUNCT
ajtas-2447	55	28	2009	2009	NUM
ajtas-2447	55	29	.	.	PUNCT
ajtas-2447	56	1	–	–	PUNCT
ajtas-2447	56	2	т	т	X
ajtas-2447	56	3	.	.	PROPN
ajtas-2447	56	4	20	20	NUM
ajtas-2447	56	5	.	.	X
ajtas-2447	56	6	–	–	PUNCT
ajtas-2447	56	7	№	№	NOUN
ajtas-2447	56	8	.	.	PUNCT
ajtas-2447	57	1	27	27	NUM
ajtas-2447	57	2	.	.	PUNCT
ajtas-2447	57	3	–	–	PUNCT
ajtas-2447	57	4	с	с	PROPN
ajtas-2447	57	5	.	.	PUNCT
ajtas-2447	57	6	275607	275607	NUM
ajtas-2447	57	7	3	3	NUM
ajtas-2447	57	8	.	.	PUNCT
ajtas-2447	57	9	domashevskaya	domashevskaya	PROPN
ajtas-2447	57	10	e.p	e.p	PROPN
ajtas-2447	57	11	.	.	PROPN
ajtas-2447	57	12	,	,	PUNCT
ajtas-2447	57	13	terekhov	terekhov	PROPN
ajtas-2447	57	14	v.a	v.a	PROPN
ajtas-2447	57	15	.	.	PROPN
ajtas-2447	57	16	,	,	PUNCT
ajtas-2447	57	17	turishchev	turishchev	PROPN
ajtas-2447	58	1	s.yu	s.yu	PROPN
ajtas-2447	58	2	.	.	PROPN
ajtas-2447	58	3	,	,	PUNCT
ajtas-2447	58	4	koyuda	koyuda	PROPN
ajtas-2447	58	5	d.a	d.a	PROPN
ajtas-2447	58	6	.	.	PROPN
ajtas-2447	58	7	,	,	PUNCT
ajtas-2447	58	8	rumyantseva	rumyantseva	PROPN
ajtas-2447	58	9	n.a	n.a	PROPN
ajtas-2447	58	10	.	.	PROPN
ajtas-2447	58	11	,	,	PUNCT
ajtas-2447	58	12	pershin	pershin	PROPN
ajtas-2447	58	13	yu.p	yu.p	PROPN
ajtas-2447	58	14	.	.	PUNCT
ajtas-2447	58	15	,	,	PUNCT
ajtas-2447	58	16	kodratenko	kodratenko	PROPN
ajtas-2447	58	17	v.v	v.v	PROPN
ajtas-2447	58	18	.	.	PROPN
ajtas-2447	58	19	,	,	PUNCT
ajtas-2447	58	20	appathurai	appathurai	PROPN
ajtas-2447	58	21	n.	n.	PROPN
ajtas-2447	58	22	//	//	PROPN
ajtas-2447	58	23	ftt	ftt	PROPN
ajtas-2447	58	24	.	.	PROPN
ajtas-2447	58	25	–	–	PUNCT
ajtas-2447	58	26	2013	2013	NUM
ajtas-2447	58	27	.	.	PUNCT
ajtas-2447	59	1	t.	t.	PROPN
ajtas-2447	59	2	55	55	NUM
ajtas-2447	59	3	.	.	PUNCT
ajtas-2447	60	1	no	no	INTJ
ajtas-2447	60	2	.	.	NOUN
ajtas-2447	61	1	3	3	X
ajtas-2447	61	2	.	.	PUNCT
ajtas-2447	62	1	p.	p.	NOUN
ajtas-2447	62	2	577	577	NUM
ajtas-2447	62	3	–	–	PUNCT
ajtas-2447	62	4	584	584	NUM
ajtas-2447	62	5	.	.	NOUN
ajtas-2447	62	6	4	4	NUM
ajtas-2447	62	7	.	.	NOUN
ajtas-2447	62	8	alekseev	alekseev	PROPN
ajtas-2447	62	9	a.a	a.a	PROPN
ajtas-2447	62	10	.	.	PROPN
ajtas-2447	62	11	,	,	PUNCT
ajtas-2447	62	12	olyanich	olyanich	NOUN
ajtas-2447	62	13	d.a	d.a	PROPN
ajtas-2447	62	14	.	.	PROPN
ajtas-2447	62	15	,	,	PUNCT
ajtas-2447	62	16	utas	utas	PROPN
ajtas-2447	62	17	t.v	t.v	PROPN
ajtas-2447	62	18	.	.	PROPN
ajtas-2447	62	19	,	,	PUNCT
ajtas-2447	62	20	kotlyar	kotlyar	PROPN
ajtas-2447	63	1	v.g	v.g	PROPN
ajtas-2447	63	2	.	.	PROPN
ajtas-2447	63	3	,	,	PUNCT
ajtas-2447	63	4	zotov	zotov	PROPN
ajtas-2447	63	5	a.v	a.v	PROPN
ajtas-2447	63	6	.	.	PROPN
ajtas-2447	63	7	,	,	PUNCT
ajtas-2447	63	8	saranin	saranin	PROPN
ajtas-2447	63	9	a.a	a.a	PROPN
ajtas-2447	63	10	.	.	PROPN
ajtas-2447	63	11	//	//	PROPN
ajtas-2447	63	12	zhtf	zhtf	PROPN
ajtas-2447	63	13	.	.	PUNCT
ajtas-2447	64	1	2015	2015	NUM
ajtas-2447	64	2	.	.	PUNCT
ajtas-2447	65	1	t.85	t.85	ADP
ajtas-2447	65	2	.	.	PUNCT
ajtas-2447	65	3	no.10	no.10	PROPN
ajtas-2447	65	4	.	.	PUNCT
ajtas-2447	66	1	p.94	p.94	NOUN
ajtas-2447	66	2	-	-	PUNCT
ajtas-2447	66	3	100	100	NUM
ajtas-2447	66	4	.	.	PUNCT
ajtas-2447	67	1	5	5	X
ajtas-2447	67	2	.	.	X
ajtas-2447	67	3	в.м	в.м	PROPN
ajtas-2447	67	4	.	.	PROPN
ajtas-2447	67	5	ротштейн	ротштейн	NOUN
ajtas-2447	67	6	,	,	PUNCT
ajtas-2447	68	1	р.х	р.х	PROPN
ajtas-2447	68	2	.	.	PROPN
ajtas-2447	68	3	ашуров	ашуров	PROPN
ajtas-2447	68	4	,	,	PUNCT
ajtas-2447	68	5	т.к	т.к	PROPN
ajtas-2447	68	6	.	.	PROPN
ajtas-2447	68	7	турдалиев	турдалиев	PROPN
ajtas-2447	68	8	,	,	PUNCT
ajtas-2447	68	9	и.х	и.х	PROPN
ajtas-2447	68	10	.	.	PROPN
ajtas-2447	68	11	ашуров	ашуров	PROPN
ajtas-2447	68	12	//	//	SYM
ajtas-2447	68	13	uzbek	uzbek	PROPN
ajtas-2447	68	14	journal	journal	PROPN
ajtas-2447	68	15	of	of	ADP
ajtas-2447	68	16	physics	physics	PROPN
ajtas-2447	68	17	.	.	PUNCT
ajtas-2447	69	1	–	–	PUNCT
ajtas-2447	69	2	2017	2017	NUM
ajtas-2447	69	3	.	.	PUNCT
ajtas-2447	70	1	№	№	ADP
ajtas-2447	70	2	4	4	NUM
ajtas-2447	70	3	.	.	PUNCT
ajtas-2447	71	1	с.12	с.12	NOUN
ajtas-2447	71	2	.	.	PROPN
ajtas-2447	71	3	6	6	NUM
ajtas-2447	71	4	.	.	PUNCT
ajtas-2447	71	5	bolkhovityanov	bolkhovityanov	PROPN
ajtas-2447	71	6	y.	y.	PROPN
ajtas-2447	71	7	b.	b.	PROPN
ajtas-2447	71	8	,	,	PUNCT
ajtas-2447	71	9	deryabin	deryabin	PROPN
ajtas-2447	71	10	a.	a.	PROPN
ajtas-2447	71	11	s.	s.	PROPN
ajtas-2447	71	12	,	,	PUNCT
ajtas-2447	71	13	gutakovskii	gutakovskii	PROPN
ajtas-2447	71	14	a.	a.	PROPN
ajtas-2447	71	15	k.	k.	PROPN
ajtas-2447	71	16	,	,	PUNCT
ajtas-2447	71	17	sokolov	sokolov	PROPN
ajtas-2447	71	18	l.	l.	PROPN
ajtas-2447	71	19	v.	v.	ADP
ajtas-2447	71	20	unzipping	unzipping	NOUN
ajtas-2447	71	21	and	and	CCONJ
ajtas-2447	71	22	movement	movement	NOUN
ajtas-2447	71	23	of	of	ADP
ajtas-2447	71	24	lomer	lomer	ADJ
ajtas-2447	71	25	-	-	PUNCT
ajtas-2447	71	26	type	type	NOUN
ajtas-2447	71	27	edge	edge	NOUN
ajtas-2447	71	28	dislocations	dislocation	NOUN
ajtas-2447	71	29	in	in	ADP
ajtas-2447	71	30	ge	ge	PROPN
ajtas-2447	71	31	/	/	SYM
ajtas-2447	71	32	gesi	gesi	NOUN
ajtas-2447	71	33	/	/	SYM
ajtas-2447	71	34	si	si	X
ajtas-2447	71	35	(	(	PUNCT
ajtas-2447	71	36	0	0	NUM
ajtas-2447	71	37	0	0	NUM
ajtas-2447	71	38	1	1	NUM
ajtas-2447	71	39	)	)	PUNCT
ajtas-2447	71	40	heterostructures	heterostructure	NOUN
ajtas-2447	71	41	//journal	//journal	PUNCT
ajtas-2447	71	42	of	of	ADP
ajtas-2447	71	43	crystal	crystal	NOUN
ajtas-2447	71	44	growth	growth	NOUN
ajtas-2447	71	45	.	.	PUNCT
ajtas-2447	72	1	–	–	PUNCT
ajtas-2447	72	2	2018	2018	NUM
ajtas-2447	72	3	.	.	PUNCT
ajtas-2447	73	1	–	–	PUNCT
ajtas-2447	73	2	т	т	X
ajtas-2447	73	3	.	.	NOUN
ajtas-2447	73	4	483	483	NUM
ajtas-2447	73	5	.	.	PUNCT
ajtas-2447	73	6	–	–	PUNCT
ajtas-2447	74	1	с	с	PROPN
ajtas-2447	74	2	.	.	PUNCT
ajtas-2447	74	3	265	265	NUM
ajtas-2447	74	4	-	-	SYM
ajtas-2447	74	5	268	268	NUM
ajtas-2447	74	6	.	.	PUNCT
ajtas-2447	75	1	7	7	X
ajtas-2447	75	2	.	.	PUNCT
ajtas-2447	75	3	saito	saito	PROPN
ajtas-2447	75	4	s.	s.	PROPN
ajtas-2447	75	5	,	,	PUNCT
ajtas-2447	75	6	al	al	PROPN
ajtas-2447	75	7	-	-	PUNCT
ajtas-2447	75	8	attili	attili	ADJ
ajtas-2447	75	9	a.	a.	NOUN
ajtas-2447	75	10	z.	z.	PROPN
ajtas-2447	75	11	,	,	PUNCT
ajtas-2447	75	12	oda	oda	PROPN
ajtas-2447	75	13	k.	k.	PROPN
ajtas-2447	75	14	,	,	PUNCT
ajtas-2447	75	15	ishikawa	ishikawa	PROPN
ajtas-2447	75	16	y.	y.	PROPN
ajtas-2447	75	17	towards	towards	ADP
ajtas-2447	75	18	monolithic	monolithic	ADJ
ajtas-2447	75	19	integration	integration	NOUN
ajtas-2447	75	20	of	of	ADP
ajtas-2447	75	21	germanium	germanium	NOUN
ajtas-2447	75	22	light	light	NOUN
ajtas-2447	75	23	sources	source	NOUN
ajtas-2447	75	24	on	on	ADP
ajtas-2447	75	25	silicon	silicon	NOUN
ajtas-2447	75	26	chips	chip	NOUN
ajtas-2447	75	27	//semiconductor	//semiconductor	PUNCT
ajtas-2447	75	28	science	science	NOUN
ajtas-2447	75	29	and	and	CCONJ
ajtas-2447	75	30	technology	technology	NOUN
ajtas-2447	75	31	.	.	PUNCT
ajtas-2447	76	1	–	–	PUNCT
ajtas-2447	76	2	2016	2016	NUM
ajtas-2447	76	3	.	.	PUNCT
ajtas-2447	77	1	–	–	PUNCT
ajtas-2447	77	2	т	т	X
ajtas-2447	77	3	.	.	PROPN
ajtas-2447	77	4	31	31	NUM
ajtas-2447	77	5	.	.	PUNCT
ajtas-2447	77	6	–	–	PUNCT
ajtas-2447	77	7	№	№	NOUN
ajtas-2447	77	8	.	.	PUNCT
ajtas-2447	78	1	4	4	NUM
ajtas-2447	78	2	.	.	X
ajtas-2447	78	3	–	–	PUNCT
ajtas-2447	78	4	с	с	PROPN
ajtas-2447	78	5	.	.	PROPN
ajtas-2447	78	6	043002	043002	NUM
ajtas-2447	78	7	.	.	PUNCT
ajtas-2447	79	1	8	8	X
ajtas-2447	79	2	.	.	PUNCT
ajtas-2447	80	1	liu	liu	PROPN
ajtas-2447	80	2	j.	j.	PROPN
ajtas-2447	80	3	,	,	PUNCT
ajtas-2447	80	4	kimerling	kimerle	VERB
ajtas-2447	80	5	l.	l.	PROPN
ajtas-2447	80	6	c.	c.	PROPN
ajtas-2447	80	7	,	,	PUNCT
ajtas-2447	80	8	michel	michel	PROPN
ajtas-2447	80	9	j.	j.	PROPN
ajtas-2447	80	10	monolithic	monolithic	PROPN
ajtas-2447	80	11	ge	ge	PROPN
ajtas-2447	80	12	-	-	PUNCT
ajtas-2447	80	13	on	on	ADP
ajtas-2447	80	14	-	-	PUNCT
ajtas-2447	80	15	si	si	NOUN
ajtas-2447	80	16	lasers	laser	NOUN
ajtas-2447	80	17	for	for	ADP
ajtas-2447	80	18	large	large	ADJ
ajtas-2447	80	19	-	-	PUNCT
ajtas-2447	80	20	scale	scale	NOUN
ajtas-2447	80	21	electronic	electronic	ADJ
ajtas-2447	80	22	–	–	PUNCT
ajtas-2447	80	23	photonic	photonic	ADJ
ajtas-2447	80	24	integration	integration	NOUN
ajtas-2447	80	25	//semiconductor	//semiconductor	NOUN
ajtas-2447	80	26	science	science	NOUN
ajtas-2447	80	27	and	and	CCONJ
ajtas-2447	80	28	technology	technology	NOUN
ajtas-2447	80	29	.	.	PUNCT
ajtas-2447	80	30	–	–	PUNCT
ajtas-2447	80	31	2012	2012	NUM
ajtas-2447	80	32	.	.	PUNCT
ajtas-2447	81	1	–	–	PUNCT
ajtas-2447	81	2	т	т	X
ajtas-2447	81	3	.	.	PROPN
ajtas-2447	81	4	27	27	NUM
ajtas-2447	81	5	.	.	PUNCT
ajtas-2447	82	1	–	–	PUNCT
ajtas-2447	82	2	№	№	NOUN
ajtas-2447	82	3	.	.	PUNCT
ajtas-2447	83	1	9	9	NUM
ajtas-2447	83	2	.	.	X
ajtas-2447	83	3	–	–	PUNCT
ajtas-2447	83	4	с	с	PROPN
ajtas-2447	83	5	.	.	PROPN
ajtas-2447	83	6	094006	094006	NUM
ajtas-2447	83	7	.	.	PUNCT
ajtas-2447	84	1	9	9	X
ajtas-2447	84	2	.	.	X
ajtas-2447	84	3	umirzakov	umirzakov	PROPN
ajtas-2447	84	4	b.e	b.e	PROPN
ajtas-2447	84	5	.	.	PROPN
ajtas-2447	84	6	dissertation	dissertation	NOUN
ajtas-2447	84	7	on	on	ADP
ajtas-2447	84	8	the	the	DET
ajtas-2447	84	9	academic	academic	ADJ
ajtas-2447	84	10	step	step	NOUN
ajtas-2447	84	11	.	.	PUNCT
ajtas-2447	85	1	doctor	doctor	NOUN
ajtas-2447	85	2	of	of	ADP
ajtas-2447	85	3	physical	physical	ADJ
ajtas-2447	85	4	and	and	CCONJ
ajtas-2447	85	5	mathematical	mathematical	ADJ
ajtas-2447	85	6	sciences	sciences	PROPN
ajtas-2447	85	7	electron	electron	NOUN
ajtas-2447	85	8	spectroscopic	spectroscopic	NOUN
ajtas-2447	85	9	studies	study	NOUN
ajtas-2447	85	10	and	and	CCONJ
ajtas-2447	85	11	analysis	analysis	NOUN
ajtas-2447	85	12	of	of	ADP
ajtas-2447	85	13	the	the	DET
ajtas-2447	85	14	state	state	NOUN
ajtas-2447	85	15	of	of	ADP
ajtas-2447	85	16	the	the	DET
ajtas-2447	85	17	surface	surface	NOUN
ajtas-2447	85	18	of	of	ADP
ajtas-2447	85	19	multicomponent	multicomponent	NOUN
ajtas-2447	85	20	systems	system	NOUN
ajtas-2447	85	21	created	create	VERB
ajtas-2447	85	22	by	by	ADP
ajtas-2447	85	23	ion	ion	NOUN
ajtas-2447	85	24	implantation	implantation	NOUN
ajtas-2447	85	25	.	.	PUNCT
ajtas-2447	86	1	1993	1993	NUM
ajtas-2447	86	2	.	.	PUNCT
ajtas-2447	87	1	p.	p.	NOUN
ajtas-2447	87	2	293	293	NUM
ajtas-2447	87	3	.	.	PUNCT
ajtas-2447	88	1	10	10	NUM
ajtas-2447	88	2	.	.	X
ajtas-2447	89	1	isakhanov	isakhanov	PROPN
ajtas-2447	89	2	z.a	z.a	PROPN
ajtas-2447	89	3	.	.	PROPN
ajtas-2447	89	4	,	,	PUNCT
ajtas-2447	90	1	yorkulov	yorkulov	PROPN
ajtas-2447	90	2	r.m	r.m	PROPN
ajtas-2447	90	3	.	.	PROPN
ajtas-2447	90	4	,	,	PUNCT
ajtas-2447	90	5	tulyaganova	tulyaganova	PROPN
ajtas-2447	90	6	sh.a	sh.a	VERB
ajtas-2447	90	7	.	.	PUNCT
ajtas-2447	91	1	study	study	NOUN
ajtas-2447	91	2	of	of	ADP
ajtas-2447	91	3	the	the	DET
ajtas-2447	91	4	properties	property	NOUN
ajtas-2447	91	5	of	of	ADP
ajtas-2447	91	6	nanoscale	nanoscale	NOUN
ajtas-2447	91	7	structures	structure	NOUN
ajtas-2447	91	8	created	create	VERB
ajtas-2447	91	9	on	on	ADP
ajtas-2447	91	10	the	the	DET
ajtas-2447	91	11	surface	surface	NOUN
ajtas-2447	91	12	of	of	ADP
ajtas-2447	91	13	the	the	DET
ajtas-2447	91	14	free	free	ADJ
ajtas-2447	91	15	si	si	PROPN
ajtas-2447	91	16	/	/	SYM
ajtas-2447	91	17	cu	cu	NOUN
ajtas-2447	91	18	film	film	NOUN
ajtas-2447	91	19	system	system	NOUN
ajtas-2447	91	20	//	//	SYM
ajtas-2447	91	21	laser	laser	PROPN
ajtas-2447	91	22	,	,	PUNCT
ajtas-2447	91	23	plasma	plasma	NOUN
ajtas-2447	91	24	research	research	NOUN
ajtas-2447	91	25	and	and	CCONJ
ajtas-2447	91	26	technologies	technology	NOUN
ajtas-2447	91	27	-	-	PUNCT
ajtas-2447	91	28	laplaz-2020	laplaz-2020	ADJ
ajtas-2447	91	29	.	.	PUNCT
ajtas-2447	91	30	–	–	PUNCT
ajtas-2447	91	31	2020	2020	NUM
ajtas-2447	91	32	.	.	PUNCT
ajtas-2447	92	1	–	–	PUNCT
ajtas-2447	92	2	p.	p.	NOUN
ajtas-2447	92	3	204	204	NUM
ajtas-2447	92	4	-	-	SYM
ajtas-2447	92	5	205	205	NUM
ajtas-2447	92	6	.	.	PUNCT