id	sid	tid	token	lemma	pos
ajtas-2517	1	1	american	american	PROPN
ajtas-2517	1	2	journal	journal	PROPN
ajtas-2517	1	3	of	of	ADP
ajtas-2517	1	4	technology	technology	NOUN
ajtas-2517	1	5	and	and	CCONJ
ajtas-2517	1	6	applied	apply	VERB
ajtas-2517	1	7	sciences	sciences	PROPN
ajtas-2517	1	8	issn	issn	X
ajtas-2517	1	9	(	(	PUNCT
ajtas-2517	1	10	e	e	NOUN
ajtas-2517	1	11	):	):	PUNCT
ajtas-2517	1	12	2832	2832	NUM
ajtas-2517	1	13	-	-	SYM
ajtas-2517	1	14	1766	1766	NUM
ajtas-2517	1	15	volume	volume	NOUN
ajtas-2517	1	16	31	31	NUM
ajtas-2517	1	17	,	,	PUNCT
ajtas-2517	1	18	december	december	PROPN
ajtas-2517	1	19	2024	2024	NUM
ajtas-2517	1	20	p	p	NOUN
ajtas-2517	1	21	a	a	PRON
ajtas-2517	1	22	g	g	NOUN
ajtas-2517	1	23	e	e	NOUN
ajtas-2517	2	1	|	|	ADV
ajtas-2517	2	2	16	16	NUM
ajtas-2517	2	3	www.americanjournal.org	www.americanjournal.org	NOUN
ajtas-2517	2	4	physical	physical	ADJ
ajtas-2517	2	5	deposition	deposition	NOUN
ajtas-2517	2	6	of	of	ADP
ajtas-2517	2	7	coatings	coating	NOUN
ajtas-2517	2	8	in	in	ADP
ajtas-2517	2	9	vacuum	vacuum	PROPN
ajtas-2517	2	10	urinov	urinov	PROPN
ajtas-2517	2	11	n.f	n.f	PROPN
ajtas-2517	2	12	.	.	PROPN
ajtas-2517	2	13	saidova	saidova	PROPN
ajtas-2517	2	14	m.	m.	PROPN
ajtas-2517	3	1	kh	kh	PROPN
ajtas-2517	3	2	.	.	PROPN
ajtas-2517	3	3	associate	associate	PROPN
ajtas-2517	3	4	professors	professor	NOUN
ajtas-2517	3	5	of	of	ADP
ajtas-2517	3	6	the	the	DET
ajtas-2517	3	7	department	department	NOUN
ajtas-2517	3	8	of	of	ADP
ajtas-2517	3	9	tm	tm	PROPN
ajtas-2517	3	10	and	and	CCONJ
ajtas-2517	3	11	mt	mt	PROPN
ajtas-2517	3	12	sobirov	sobirov	PROPN
ajtas-2517	3	13	m.	m.	PROPN
ajtas-2517	3	14	b.	b.	PROPN
ajtas-2517	3	15	master	master	PROPN
ajtas-2517	3	16	of	of	ADP
ajtas-2517	3	17	group	group	PROPN
ajtas-2517	3	18	m7	m7	PROPN
ajtas-2517	3	19	-	-	PUNCT
ajtas-2517	3	20	23	23	NUM
ajtas-2517	3	21	michadk	michadk	NOUN
ajtas-2517	3	22	bukhara	bukhara	PROPN
ajtas-2517	3	23	engineering	engineering	PROPN
ajtas-2517	3	24	and	and	CCONJ
ajtas-2517	3	25	technological	technological	ADJ
ajtas-2517	3	26	institute	institute	NOUN
ajtas-2517	3	27	a	a	DET
ajtas-2517	3	28	b	b	PROPN
ajtas-2517	3	29	s	s	ADP
ajtas-2517	3	30	t	t	PROPN
ajtas-2517	3	31	r	r	NOUN
ajtas-2517	3	32	a	a	DET
ajtas-2517	3	33	c	c	NOUN
ajtas-2517	3	34	t	t	NOUN
ajtas-2517	4	1	k	k	X
ajtas-2517	4	2	e	e	PROPN
ajtas-2517	4	3	y	y	PROPN
ajtas-2517	4	4	w	w	NOUN
ajtas-2517	4	5	o	o	NOUN
ajtas-2517	4	6	r	r	NOUN
ajtas-2517	4	7	d	d	X
ajtas-2517	4	8	s	s	AUX
ajtas-2517	4	9	the	the	DET
ajtas-2517	4	10	article	article	NOUN
ajtas-2517	4	11	presents	present	VERB
ajtas-2517	4	12	the	the	DET
ajtas-2517	4	13	process	process	NOUN
ajtas-2517	4	14	of	of	ADP
ajtas-2517	4	15	fphysical	fphysical	ADJ
ajtas-2517	4	16	deposition	deposition	NOUN
ajtas-2517	4	17	of	of	ADP
ajtas-2517	4	18	coatings	coating	NOUN
ajtas-2517	4	19	in	in	ADP
ajtas-2517	4	20	a	a	DET
ajtas-2517	4	21	vacuum	vacuum	NOUN
ajtas-2517	4	22	,	,	PUNCT
ajtas-2517	4	23	which	which	PRON
ajtas-2517	4	24	consists	consist	VERB
ajtas-2517	4	25	of	of	ADP
ajtas-2517	4	26	spraying	spray	VERB
ajtas-2517	4	27	a	a	DET
ajtas-2517	4	28	substance	substance	NOUN
ajtas-2517	4	29	in	in	ADP
ajtas-2517	4	30	a	a	DET
ajtas-2517	4	31	special	special	ADJ
ajtas-2517	4	32	vacuum	vacuum	NOUN
ajtas-2517	4	33	chamber	chamber	NOUN
ajtas-2517	4	34	.	.	PUNCT
ajtas-2517	5	1	as	as	ADV
ajtas-2517	5	2	well	well	ADV
ajtas-2517	5	3	as	as	ADP
ajtas-2517	5	4	the	the	DET
ajtas-2517	5	5	main	main	ADJ
ajtas-2517	5	6	operations	operation	NOUN
ajtas-2517	5	7	of	of	ADP
ajtas-2517	5	8	a	a	DET
ajtas-2517	5	9	typical	typical	ADJ
ajtas-2517	5	10	technological	technological	ADJ
ajtas-2517	5	11	process	process	NOUN
ajtas-2517	5	12	for	for	ADP
ajtas-2517	5	13	applying	apply	VERB
ajtas-2517	5	14	coatings	coating	NOUN
ajtas-2517	5	15	using	use	VERB
ajtas-2517	5	16	the	the	DET
ajtas-2517	5	17	pvd	pvd	PROPN
ajtas-2517	5	18	method	method	NOUN
ajtas-2517	5	19	.	.	PUNCT
ajtas-2517	6	1	physical	physical	ADJ
ajtas-2517	6	2	deposition	deposition	NOUN
ajtas-2517	6	3	,	,	PUNCT
ajtas-2517	6	4	coating	coating	NOUN
ajtas-2517	6	5	,	,	PUNCT
ajtas-2517	6	6	vacuum	vacuum	NOUN
ajtas-2517	6	7	,	,	PUNCT
ajtas-2517	6	8	ionization	ionization	NOUN
ajtas-2517	6	9	,	,	PUNCT
ajtas-2517	6	10	magnetron	magnetron	NOUN
ajtas-2517	6	11	sputtering	sputtering	NOUN
ajtas-2517	6	12	,	,	PUNCT
ajtas-2517	6	13	ion	ion	NOUN
ajtas-2517	6	14	beam	beam	NOUN
ajtas-2517	6	15	,	,	PUNCT
ajtas-2517	6	16	electron	electron	NOUN
ajtas-2517	6	17	beam	beam	NOUN
ajtas-2517	6	18	.	.	PUNCT
ajtas-2517	7	1	introduction	introduction	NOUN
ajtas-2517	7	2	physical	physical	ADJ
ajtas-2517	7	3	deposition	deposition	NOUN
ajtas-2517	7	4	of	of	ADP
ajtas-2517	7	5	coatings	coating	NOUN
ajtas-2517	7	6	in	in	ADP
ajtas-2517	7	7	a	a	DET
ajtas-2517	7	8	vacuum	vacuum	NOUN
ajtas-2517	7	9	involves	involve	VERB
ajtas-2517	7	10	spraying	spray	VERB
ajtas-2517	7	11	a	a	DET
ajtas-2517	7	12	substance	substance	NOUN
ajtas-2517	7	13	in	in	ADP
ajtas-2517	7	14	a	a	DET
ajtas-2517	7	15	special	special	ADJ
ajtas-2517	7	16	vacuum	vacuum	NOUN
ajtas-2517	7	17	chamber	chamber	NOUN
ajtas-2517	7	18	.	.	PUNCT
ajtas-2517	8	1	the	the	DET
ajtas-2517	8	2	sprayed	spray	VERB
ajtas-2517	8	3	particles	particle	NOUN
ajtas-2517	8	4	are	be	AUX
ajtas-2517	8	5	then	then	ADV
ajtas-2517	8	6	ionized	ionize	VERB
ajtas-2517	8	7	,	,	PUNCT
ajtas-2517	8	8	atare	atare	VERB
ajtas-2517	8	9	hunkering	hunker	VERB
ajtas-2517	8	10	down	down	ADP
ajtas-2517	8	11	v	v	ADP
ajtas-2517	8	12	ehlectical	ehlectical	ADJ
ajtas-2517	8	13	pole	pole	NOUN
ajtas-2517	8	14	v	v	ADP
ajtas-2517	8	15	n	n	ADV
ajtas-2517	8	16	acoating	acoate	VERB
ajtas-2517	8	17	of	of	ADP
ajtas-2517	8	18	the	the	DET
ajtas-2517	8	19	product	product	NOUN
ajtas-2517	8	20	.	.	PUNCT
ajtas-2517	9	1	then	then	ADV
ajtas-2517	9	2	the	the	DET
ajtas-2517	9	3	substance	substance	NOUN
ajtas-2517	9	4	condenses	condense	VERB
ajtas-2517	9	5	on	on	ADP
ajtas-2517	9	6	the	the	DET
ajtas-2517	9	7	surface	surface	NOUN
ajtas-2517	9	8	in	in	ADP
ajtas-2517	9	9	the	the	DET
ajtas-2517	9	10	presence	presence	NOUN
ajtas-2517	9	11	of	of	ADP
ajtas-2517	9	12	a	a	DET
ajtas-2517	9	13	reaction	reaction	NOUN
ajtas-2517	9	14	gas	gas	NOUN
ajtas-2517	9	15	.	.	PUNCT
ajtas-2517	10	1	the	the	DET
ajtas-2517	10	2	transformation	transformation	NOUN
ajtas-2517	10	3	of	of	ADP
ajtas-2517	10	4	the	the	DET
ajtas-2517	10	5	solid	solid	NOUN
ajtas-2517	10	6	into	into	ADP
ajtas-2517	10	7	a	a	DET
ajtas-2517	10	8	metal	metal	NOUN
ajtas-2517	10	9	vapor	vapor	NOUN
ajtas-2517	10	10	can	can	AUX
ajtas-2517	10	11	be	be	AUX
ajtas-2517	10	12	carried	carry	VERB
ajtas-2517	10	13	out	out	ADP
ajtas-2517	10	14	by	by	ADP
ajtas-2517	10	15	a	a	DET
ajtas-2517	10	16	cathode	cathode	NOUN
ajtas-2517	10	17	spot	spot	NOUN
ajtas-2517	10	18	of	of	ADP
ajtas-2517	10	19	a	a	DET
ajtas-2517	10	20	vacuum	vacuum	NOUN
ajtas-2517	10	21	arc	arc	NOUN
ajtas-2517	10	22	,	,	PUNCT
ajtas-2517	10	23	by	by	ADP
ajtas-2517	10	24	vacuum	vacuum	NOUN
ajtas-2517	10	25	-	-	PUNCT
ajtas-2517	10	26	arc	arc	NOUN
ajtas-2517	10	27	evaporation	evaporation	NOUN
ajtas-2517	10	28	(	(	PUNCT
ajtas-2517	10	29	fig	fig	NOUN
ajtas-2517	10	30	.	.	PUNCT
ajtas-2517	11	1	1	1	NUM
ajtas-2517	11	2	,	,	PUNCT
ajtas-2517	11	3	a	a	PRON
ajtas-2517	11	4	)	)	PUNCT
ajtas-2517	11	5	;	;	PUNCT
ajtas-2517	11	6	by	by	ADP
ajtas-2517	11	7	an	an	DET
ajtas-2517	11	8	ion	ion	NOUN
ajtas-2517	11	9	beam	beam	NOUN
ajtas-2517	11	10	,	,	PUNCT
ajtas-2517	11	11	by	by	ADP
ajtas-2517	11	12	magnetron	magnetron	NOUN
ajtas-2517	11	13	sputtering	sputtering	NOUN
ajtas-2517	11	14	(	(	PUNCT
ajtas-2517	11	15	fig	fig	NOUN
ajtas-2517	11	16	.	.	PUNCT
ajtas-2517	12	1	1	1	NUM
ajtas-2517	12	2	,	,	PUNCT
ajtas-2517	12	3	b	b	NOUN
ajtas-2517	12	4	)	)	PUNCT
ajtas-2517	12	5	;	;	PUNCT
ajtas-2517	12	6	by	by	ADP
ajtas-2517	12	7	an	an	DET
ajtas-2517	12	8	electron	electron	NOUN
ajtas-2517	12	9	beam	beam	NOUN
ajtas-2517	12	10	,	,	PUNCT
ajtas-2517	12	11	by	by	ADP
ajtas-2517	12	12	electron	electron	NOUN
ajtas-2517	12	13	-	-	PUNCT
ajtas-2517	12	14	beam	beam	NOUN
ajtas-2517	12	15	evaporation	evaporation	NOUN
ajtas-2517	12	16	(	(	PUNCT
ajtas-2517	12	17	fig	fig	NOUN
ajtas-2517	12	18	.	.	PUNCT
ajtas-2517	13	1	1	1	NUM
ajtas-2517	13	2	,	,	PUNCT
ajtas-2517	13	3	c	c	NOUN
ajtas-2517	13	4	)	)	PUNCT
ajtas-2517	13	5	in	in	ADP
ajtas-2517	13	6	the	the	DET
ajtas-2517	13	7	temperature	temperature	NOUN
ajtas-2517	13	8	range	range	NOUN
ajtas-2517	13	9	of	of	ADP
ajtas-2517	13	10	500	500	NUM
ajtas-2517	13	11	-	-	SYM
ajtas-2517	13	12	600	600	NUM
ajtas-2517	13	13	with	with	ADP
ajtas-2517	13	14	.	.	PUNCT
ajtas-2517	14	1	most	most	ADV
ajtas-2517	14	2	often	often	ADV
ajtas-2517	14	3	,	,	PUNCT
ajtas-2517	14	4	refractory	refractory	NOUN
ajtas-2517	14	5	metals	metal	NOUN
ajtas-2517	14	6	(	(	PUNCT
ajtas-2517	14	7	ti	ti	NOUN
ajtas-2517	14	8	,	,	PUNCT
ajtas-2517	14	9	cr	cr	PROPN
ajtas-2517	14	10	,	,	PUNCT
ajtas-2517	14	11	mo	mo	PROPN
ajtas-2517	14	12	,	,	PUNCT
ajtas-2517	14	13	zr	zr	PROPN
ajtas-2517	14	14	,	,	PUNCT
ajtas-2517	14	15	al	al	PROPN
ajtas-2517	14	16	,	,	PUNCT
ajtas-2517	14	17	etc	etc	X
ajtas-2517	14	18	.	.	X
ajtas-2517	14	19	)	)	PUNCT
ajtas-2517	14	20	are	be	AUX
ajtas-2517	14	21	applied	apply	VERB
ajtas-2517	14	22	to	to	ADP
ajtas-2517	14	23	the	the	DET
ajtas-2517	14	24	substrate	substrate	NOUN
ajtas-2517	14	25	,	,	PUNCT
ajtas-2517	14	26	and	and	CCONJ
ajtas-2517	14	27	nitrogen	nitrogen	NOUN
ajtas-2517	14	28	,	,	PUNCT
ajtas-2517	14	29	methane	methane	NOUN
ajtas-2517	14	30	,	,	PUNCT
ajtas-2517	14	31	and	and	CCONJ
ajtas-2517	14	32	oxygen	oxygen	NOUN
ajtas-2517	14	33	are	be	AUX
ajtas-2517	14	34	used	use	VERB
ajtas-2517	14	35	as	as	ADP
ajtas-2517	14	36	reaction	reaction	NOUN
ajtas-2517	14	37	gases	gas	NOUN
ajtas-2517	14	38	,	,	PUNCT
ajtas-2517	14	39	and	and	CCONJ
ajtas-2517	14	40	coatings	coating	NOUN
ajtas-2517	14	41	are	be	AUX
ajtas-2517	14	42	obtained	obtain	VERB
ajtas-2517	14	43	in	in	ADP
ajtas-2517	14	44	the	the	DET
ajtas-2517	14	45	form	form	NOUN
ajtas-2517	14	46	of	of	ADP
ajtas-2517	14	47	nitrides	nitride	NOUN
ajtas-2517	14	48	,	,	PUNCT
ajtas-2517	14	49	carbides	carbide	NOUN
ajtas-2517	14	50	,	,	PUNCT
ajtas-2517	14	51	carbonitrides	carbonitride	NOUN
ajtas-2517	14	52	,	,	PUNCT
ajtas-2517	14	53	or	or	CCONJ
ajtas-2517	14	54	oxycarbides	oxycarbide	NOUN
ajtas-2517	14	55	of	of	ADP
ajtas-2517	14	56	refractory	refractory	NOUN
ajtas-2517	14	57	metals	metal	NOUN
ajtas-2517	14	58	(	(	PUNCT
ajtas-2517	14	59	table	table	NOUN
ajtas-2517	14	60	1	1	NUM
ajtas-2517	14	61	)	)	PUNCT
ajtas-2517	14	62	.	.	PUNCT
ajtas-2517	15	1	[	[	X
ajtas-2517	15	2	1,2	1,2	NUM
ajtas-2517	15	3	]	]	PUNCT
ajtas-2517	15	4	.	.	PUNCT
ajtas-2517	16	1	figure	figure	NOUN
ajtas-2517	16	2	1	1	NUM
ajtas-2517	16	3	–	–	PUNCT
ajtas-2517	16	4	basic	basic	ADJ
ajtas-2517	16	5	diagrams	diagram	NOUN
ajtas-2517	16	6	of	of	ADP
ajtas-2517	16	7	coating	coat	VERB
ajtas-2517	16	8	application	application	NOUN
ajtas-2517	16	9	on	on	ADP
ajtas-2517	16	10	cutting	cut	VERB
ajtas-2517	16	11	tools	tool	NOUN
ajtas-2517	16	12	using	use	VERB
ajtas-2517	16	13	pvd	pvd	PROPN
ajtas-2517	16	14	methods	method	NOUN
ajtas-2517	16	15	american	american	PROPN
ajtas-2517	16	16	journal	journal	PROPN
ajtas-2517	16	17	of	of	ADP
ajtas-2517	16	18	technology	technology	NOUN
ajtas-2517	16	19	and	and	CCONJ
ajtas-2517	16	20	applied	apply	VERB
ajtas-2517	16	21	sciences	science	NOUN
ajtas-2517	16	22	31	31	NUM
ajtas-2517	16	23	,	,	PUNCT
ajtas-2517	16	24	december2024	december2024	PROPN
ajtas-2517	16	25	p	p	NOUN
ajtas-2517	16	26	a	a	PRON
ajtas-2517	16	27	g	g	NOUN
ajtas-2517	16	28	e	e	NOUN
ajtas-2517	16	29	|	|	ADV
ajtas-2517	16	30	17	17	NUM
ajtas-2517	16	31	www.americanjournal.org	www.americanjournal.org	NOUN
ajtas-2517	16	32	a	a	DET
ajtas-2517	16	33	–	–	PUNCT
ajtas-2517	16	34	magnetron	magnetron	NOUN
ajtas-2517	16	35	sputtering	sputtering	NOUN
ajtas-2517	16	36	;	;	PUNCT
ajtas-2517	16	37	b	b	X
ajtas-2517	16	38	–	–	PUNCT
ajtas-2517	16	39	vacuum	vacuum	NOUN
ajtas-2517	16	40	arc	arc	NOUN
ajtas-2517	16	41	evaporation	evaporation	NOUN
ajtas-2517	16	42	;	;	PUNCT
ajtas-2517	17	1	c	c	X
ajtas-2517	17	2	–	–	PUNCT
ajtas-2517	17	3	electron	electron	NOUN
ajtas-2517	17	4	beam	beam	NOUN
ajtas-2517	17	5	evaporation	evaporation	NOUN
ajtas-2517	17	6	;	;	PUNCT
ajtas-2517	17	7	1	1	NUM
ajtas-2517	17	8	–	–	PUNCT
ajtas-2517	17	9	bias	bias	NOUN
ajtas-2517	17	10	voltage	voltage	NOUN
ajtas-2517	17	11	supply	supply	NOUN
ajtas-2517	17	12	;	;	PUNCT
ajtas-2517	17	13	2	2	NUM
ajtas-2517	17	14	–	–	PUNCT
ajtas-2517	17	15	tool	tool	NOUN
ajtas-2517	17	16	holder	holder	NOUN
ajtas-2517	17	17	;	;	PUNCT
ajtas-2517	17	18	3	3	NUM
ajtas-2517	17	19	–	–	PUNCT
ajtas-2517	17	20	tool	tool	NOUN
ajtas-2517	17	21	;	;	PUNCT
ajtas-2517	17	22	4	4	NUM
ajtas-2517	17	23	–	–	PUNCT
ajtas-2517	17	24	vacuum	vacuum	NOUN
ajtas-2517	17	25	chamber	chamber	NOUN
ajtas-2517	17	26	;	;	PUNCT
ajtas-2517	17	27	5	5	NUM
ajtas-2517	17	28	–	–	PUNCT
ajtas-2517	17	29	deposited	deposit	VERB
ajtas-2517	17	30	material	material	NOUN
ajtas-2517	17	31	;	;	PUNCT
ajtas-2517	17	32	6	6	NUM
ajtas-2517	17	33	–	–	PUNCT
ajtas-2517	17	34	magnetic	magnetic	ADJ
ajtas-2517	17	35	system	system	NOUN
ajtas-2517	17	36	for	for	ADP
ajtas-2517	17	37	magnetron	magnetron	NOUN
ajtas-2517	17	38	sputtering	sputtering	NOUN
ajtas-2517	17	39	;	;	PUNCT
ajtas-2517	17	40	7	7	NUM
ajtas-2517	17	41	–	–	PUNCT
ajtas-2517	17	42	vacuum	vacuum	NOUN
ajtas-2517	17	43	pump	pump	NOUN
ajtas-2517	17	44	;	;	PUNCT
ajtas-2517	17	45	8	8	NUM
ajtas-2517	17	46	–	–	PUNCT
ajtas-2517	17	47	discharge	discharge	VERB
ajtas-2517	17	48	voltage	voltage	NOUN
ajtas-2517	17	49	supply	supply	NOUN
ajtas-2517	17	50	;	;	PUNCT
ajtas-2517	17	51	9	9	NUM
ajtas-2517	17	52	–	–	PUNCT
ajtas-2517	17	53	ion	ion	NOUN
ajtas-2517	17	54	beam	beam	NOUN
ajtas-2517	17	55	;	;	PUNCT
ajtas-2517	17	56	10	10	NUM
ajtas-2517	17	57	–	–	PUNCT
ajtas-2517	17	58	sputtered	sputter	VERB
ajtas-2517	17	59	material	material	NOUN
ajtas-2517	17	60	;	;	PUNCT
ajtas-2517	17	61	11	11	NUM
ajtas-2517	17	62	–	–	PUNCT
ajtas-2517	17	63	reaction	reaction	NOUN
ajtas-2517	17	64	gas	gas	NOUN
ajtas-2517	17	65	;	;	PUNCT
ajtas-2517	17	66	12	12	NUM
ajtas-2517	17	67	–	–	PUNCT
ajtas-2517	17	68	inert	inert	ADJ
ajtas-2517	17	69	gas	gas	NOUN
ajtas-2517	17	70	;	;	PUNCT
ajtas-2517	17	71	13	13	NUM
ajtas-2517	17	72	–	–	PUNCT
ajtas-2517	17	73	cathode	cathode	NOUN
ajtas-2517	17	74	spot	spot	NOUN
ajtas-2517	17	75	;	;	PUNCT
ajtas-2517	17	76	14	14	NUM
ajtas-2517	17	77	–	–	PUNCT
ajtas-2517	17	78	evaporated	evaporate	VERB
ajtas-2517	17	79	material	material	NOUN
ajtas-2517	17	80	;	;	PUNCT
ajtas-2517	17	81	15	15	NUM
ajtas-2517	17	82	–	–	PUNCT
ajtas-2517	17	83	accelerating	accelerate	VERB
ajtas-2517	17	84	voltage	voltage	NOUN
ajtas-2517	17	85	supply	supply	NOUN
ajtas-2517	17	86	;	;	PUNCT
ajtas-2517	17	87	16	16	NUM
ajtas-2517	17	88	–	–	PUNCT
ajtas-2517	17	89	hot	hot	ADJ
ajtas-2517	17	90	cathode	cathode	NOUN
ajtas-2517	17	91	;	;	PUNCT
ajtas-2517	17	92	17	17	NUM
ajtas-2517	17	93	–	–	PUNCT
ajtas-2517	17	94	crucible	crucible	NOUN
ajtas-2517	17	95	;	;	PUNCT
ajtas-2517	17	96	18	18	NUM
ajtas-2517	17	97	–	–	PUNCT
ajtas-2517	17	98	electron	electron	NOUN
ajtas-2517	17	99	beam	beam	NOUN
ajtas-2517	17	100	table	table	NOUN
ajtas-2517	17	101	.1	.1	NUM
ajtas-2517	17	102	–	–	PUNCT
ajtas-2517	17	103	characteristics	characteristic	NOUN
ajtas-2517	17	104	of	of	ADP
ajtas-2517	17	105	coatings	coating	NOUN
ajtas-2517	17	106	obtained	obtain	VERB
ajtas-2517	17	107	by	by	ADP
ajtas-2517	17	108	the	the	DET
ajtas-2517	17	109	pvd	pvd	PROPN
ajtas-2517	17	110	method	method	NOUN
ajtas-2517	17	111	coating	coat	VERB
ajtas-2517	17	112	color	color	NOUN
ajtas-2517	17	113	hv	hv	PROPN
ajtas-2517	17	114	*	*	PROPN
ajtas-2517	17	115	coefficient	coefficient	NOUN
ajtas-2517	17	116	of	of	ADP
ajtas-2517	17	117	friction	friction	NOUN
ajtas-2517	17	118	on	on	ADP
ajtas-2517	17	119	steel	steel	NOUN
ajtas-2517	17	120	45	45	NUM
ajtas-2517	17	121	temperature	temperature	NOUN
ajtas-2517	17	122	of	of	ADP
ajtas-2517	17	123	oxidation	oxidation	NOUN
ajtas-2517	17	124	onset	onset	NOUN
ajtas-2517	17	125	in	in	ADP
ajtas-2517	17	126	air	air	NOUN
ajtas-2517	17	127	,	,	PUNCT
ajtas-2517	17	128	ºс	ºс	PROPN
ajtas-2517	17	129	tin	tin	NOUN
ajtas-2517	17	130	golden	golden	ADJ
ajtas-2517	17	131	23	23	NUM
ajtas-2517	17	132	…	…	SYM
ajtas-2517	17	133	25	25	NUM
ajtas-2517	17	134	0.55	0.55	NUM
ajtas-2517	17	135	550	550	NUM
ajtas-2517	17	136	...	...	SYM
ajtas-2517	17	137	600	600	NUM
ajtas-2517	17	138	ticn	ticn	NOUN
ajtas-2517	17	139	gray	gray	ADJ
ajtas-2517	17	140	-	-	PUNCT
ajtas-2517	17	141	blue	blue	ADJ
ajtas-2517	17	142	35	35	NUM
ajtas-2517	17	143	…	…	SYM
ajtas-2517	17	144	37	37	NUM
ajtas-2517	17	145	0.2	0.2	NUM
ajtas-2517	17	146	400	400	NUM
ajtas-2517	17	147	(	(	PUNCT
ajtas-2517	17	148	ti	ti	NOUN
ajtas-2517	17	149	,	,	PUNCT
ajtas-2517	17	150	al)n	al)n	PROPN
ajtas-2517	17	151	purple	purple	ADJ
ajtas-2517	17	152	-	-	PUNCT
ajtas-2517	17	153	black	black	ADJ
ajtas-2517	17	154	31	31	NUM
ajtas-2517	17	155	…	…	SYM
ajtas-2517	17	156	35	35	NUM
ajtas-2517	17	157	0.6	0.6	NUM
ajtas-2517	17	158	800	800	NUM
ajtas-2517	17	159	...	...	SYM
ajtas-2517	17	160	850	850	NUM
ajtas-2517	17	161	(	(	PUNCT
ajtas-2517	17	162	ti	ti	NOUN
ajtas-2517	17	163	,	,	PUNCT
ajtas-2517	17	164	al)cn	al)cn	PROPN
ajtas-2517	17	165	violet	violet	ADJ
ajtas-2517	17	166	-	-	PUNCT
ajtas-2517	17	167	red	red	ADJ
ajtas-2517	17	168	35	35	NUM
ajtas-2517	17	169	…	…	SYM
ajtas-2517	17	170	37	37	NUM
ajtas-2517	17	171	0.25	0.25	NUM
ajtas-2517	17	172	500	500	NUM
ajtas-2517	17	173	crn	crn	NOUN
ajtas-2517	17	174	silver	silver	NOUN
ajtas-2517	17	175	metallic	metallic	NOUN
ajtas-2517	17	176	12	12	NUM
ajtas-2517	17	177	…	…	SYM
ajtas-2517	17	178	14	14	NUM
ajtas-2517	17	179	0.3	0.3	NUM
ajtas-2517	17	180	650	650	NUM
ajtas-2517	17	181	zrn	zrn	NOUN
ajtas-2517	17	182	golden	golden	ADJ
ajtas-2517	17	183	white	white	ADJ
ajtas-2517	17	184	26	26	NUM
ajtas-2517	17	185	…	…	SYM
ajtas-2517	17	186	28	28	NUM
ajtas-2517	17	187	0.5	0.5	NUM
ajtas-2517	17	188	550	550	NUM
ajtas-2517	17	189	(	(	PUNCT
ajtas-2517	17	190	ti	ti	NOUN
ajtas-2517	17	191	,	,	PUNCT
ajtas-2517	17	192	cr)n	cr)n	ADV
ajtas-2517	17	193	golden	golden	ADJ
ajtas-2517	17	194	grey	grey	NOUN
ajtas-2517	17	195	18	18	NUM
ajtas-2517	17	196	…	…	SYM
ajtas-2517	17	197	20	20	NUM
ajtas-2517	17	198	0.5	0.5	NUM
ajtas-2517	17	199	700	700	NUM
ajtas-2517	17	200	(	(	PUNCT
ajtas-2517	17	201	ti	ti	NOUN
ajtas-2517	17	202	,	,	PUNCT
ajtas-2517	17	203	al	al	PROPN
ajtas-2517	17	204	,	,	PUNCT
ajtas-2517	17	205	cr)n	cr)n	PROPN
ajtas-2517	17	206	bronze	bronze	NOUN
ajtas-2517	17	207	28	28	NUM
ajtas-2517	17	208	…	…	SYM
ajtas-2517	17	209	30	30	NUM
ajtas-2517	17	210	0.4	0.4	NUM
ajtas-2517	17	211	850	850	NUM
ajtas-2517	17	212	...	...	SYM
ajtas-2517	17	213	900	900	NUM
ajtas-2517	17	214	in	in	ADP
ajtas-2517	17	215	the	the	DET
ajtas-2517	17	216	table	table	NOUN
ajtas-2517	17	217	shows	show	VERB
ajtas-2517	17	218	the	the	DET
ajtas-2517	17	219	data	datum	NOUN
ajtas-2517	17	220	recommended	recommend	VERB
ajtas-2517	17	221	for	for	ADP
ajtas-2517	17	222	the	the	DET
ajtas-2517	17	223	coating	coating	NOUN
ajtas-2517	17	224	of	of	ADP
ajtas-2517	17	225	cutting	cut	VERB
ajtas-2517	17	226	tools	tool	NOUN
ajtas-2517	17	227	,	,	PUNCT
ajtas-2517	17	228	since	since	SCONJ
ajtas-2517	17	229	hardness	hardness	NOUN
ajtas-2517	17	230	depends	depend	VERB
ajtas-2517	17	231	on	on	ADP
ajtas-2517	17	232	many	many	ADJ
ajtas-2517	17	233	factors	factor	NOUN
ajtas-2517	17	234	(	(	PUNCT
ajtas-2517	17	235	chemical	chemical	NOUN
ajtas-2517	17	236	composition	composition	NOUN
ajtas-2517	17	237	of	of	ADP
ajtas-2517	17	238	the	the	DET
ajtas-2517	17	239	coating	coating	NOUN
ajtas-2517	17	240	,	,	PUNCT
ajtas-2517	17	241	deposition	deposition	NOUN
ajtas-2517	17	242	modes	mode	NOUN
ajtas-2517	17	243	,	,	PUNCT
ajtas-2517	17	244	etc	etc	X
ajtas-2517	17	245	.	.	X
ajtas-2517	17	246	)	)	PUNCT
ajtas-2517	17	247	and	and	CCONJ
ajtas-2517	17	248	can	can	AUX
ajtas-2517	17	249	have	have	VERB
ajtas-2517	17	250	different	different	ADJ
ajtas-2517	17	251	values	value	NOUN
ajtas-2517	17	252	.	.	PUNCT
ajtas-2517	18	1	to	to	PART
ajtas-2517	18	2	achieve	achieve	VERB
ajtas-2517	18	3	cvd	cvd	PROPN
ajtas-2517	18	4	coatings	coating	NOUN
ajtas-2517	18	5	,	,	PUNCT
ajtas-2517	18	6	precise	precise	ADJ
ajtas-2517	18	7	control	control	NOUN
ajtas-2517	18	8	of	of	ADP
ajtas-2517	18	9	chemical	chemical	ADJ
ajtas-2517	18	10	reaction	reaction	NOUN
ajtas-2517	18	11	products	product	NOUN
ajtas-2517	18	12	and	and	CCONJ
ajtas-2517	18	13	processes	process	NOUN
ajtas-2517	18	14	,	,	PUNCT
ajtas-2517	18	15	the	the	DET
ajtas-2517	18	16	use	use	NOUN
ajtas-2517	18	17	of	of	ADP
ajtas-2517	18	18	highpurity	highpurity	NOUN
ajtas-2517	18	19	expensive	expensive	ADJ
ajtas-2517	18	20	chemical	chemical	NOUN
ajtas-2517	18	21	materials	material	NOUN
ajtas-2517	18	22	,	,	PUNCT
ajtas-2517	18	23	etc	etc	X
ajtas-2517	18	24	.	.	X
ajtas-2517	18	25	will	will	AUX
ajtas-2517	18	26	be	be	AUX
ajtas-2517	18	27	required	require	VERB
ajtas-2517	18	28	.	.	PUNCT
ajtas-2517	19	1	pvd	pvd	PROPN
ajtas-2517	19	2	coatings	coating	NOUN
ajtas-2517	19	3	are	be	AUX
ajtas-2517	19	4	applied	apply	VERB
ajtas-2517	19	5	using	use	VERB
ajtas-2517	19	6	arc	arc	NOUN
ajtas-2517	19	7	or	or	CCONJ
ajtas-2517	19	8	glow	glow	ADJ
ajtas-2517	19	9	welding	welding	NOUN
ajtas-2517	19	10	.	.	PUNCT
ajtas-2517	20	1	rasrow	rasrow	NOUN
ajtas-2517	20	2	.	.	PUNCT
ajtas-2517	21	1	such	such	ADJ
ajtas-2517	21	2	vid	vid	NOUN
ajtas-2517	21	3	coverytia	coverytia	NOUN
ajtas-2517	21	4	obespechivaet	obespechivaet	NOUN
ajtas-2517	21	5	bogreater	bogreater	NOUN
ajtas-2517	21	6	productivity	productivity	NOUN
ajtas-2517	21	7	and	and	CCONJ
ajtas-2517	21	8	not	not	PART
ajtas-2517	21	9	so	so	ADV
ajtas-2517	21	10	sensitive	sensitive	ADJ
ajtas-2517	21	11	to	to	ADP
ajtas-2517	21	12	unknownhsignificant	unknownhsignificant	ADJ
ajtas-2517	21	13	deviations	deviation	NOUN
ajtas-2517	21	14	of	of	ADP
ajtas-2517	21	15	technological	technological	ADJ
ajtas-2517	21	16	parameters	parameter	NOUN
ajtas-2517	21	17	.	.	PUNCT
ajtas-2517	22	1	therefore	therefore	ADV
ajtas-2517	22	2	,	,	PUNCT
ajtas-2517	22	3	the	the	DET
ajtas-2517	22	4	pvd	pvd	PROPN
ajtas-2517	22	5	method	method	NOUN
ajtas-2517	22	6	is	be	AUX
ajtas-2517	22	7	finding	find	VERB
ajtas-2517	22	8	increasing	increase	VERB
ajtas-2517	22	9	application	application	NOUN
ajtas-2517	22	10	.	.	PUNCT
ajtas-2517	23	1	the	the	DET
ajtas-2517	23	2	main	main	ADJ
ajtas-2517	23	3	operations	operation	NOUN
ajtas-2517	23	4	of	of	ADP
ajtas-2517	23	5	the	the	DET
ajtas-2517	23	6	standard	standard	ADJ
ajtas-2517	23	7	technological	technological	ADJ
ajtas-2517	23	8	process	process	NOUN
ajtas-2517	23	9	(	(	PUNCT
ajtas-2517	23	10	stp	stp	PROPN
ajtas-2517	23	11	)	)	PUNCT
ajtas-2517	23	12	for	for	ADP
ajtas-2517	23	13	applying	apply	VERB
ajtas-2517	23	14	coatings	coating	NOUN
ajtas-2517	23	15	using	use	VERB
ajtas-2517	23	16	the	the	DET
ajtas-2517	23	17	pvd	pvd	PROPN
ajtas-2517	23	18	method	method	NOUN
ajtas-2517	23	19	are	be	AUX
ajtas-2517	23	20	as	as	ADP
ajtas-2517	23	21	follows:[3	follows:[3	NOUN
ajtas-2517	23	22	]	]	PUNCT
ajtas-2517	23	23	:	:	PUNCT
ajtas-2517	23	24	1	1	X
ajtas-2517	23	25	.	.	X
ajtas-2517	23	26	placing	place	VERB
ajtas-2517	23	27	plates	plate	NOUN
ajtas-2517	23	28	in	in	ADP
ajtas-2517	23	29	the	the	DET
ajtas-2517	23	30	chamber	chamber	NOUN
ajtas-2517	23	31	,	,	PUNCT
ajtas-2517	23	32	heating	heating	NOUN
ajtas-2517	23	33	and	and	CCONJ
ajtas-2517	23	34	pumping	pump	VERB
ajtas-2517	23	35	out	out	ADP
ajtas-2517	23	36	the	the	DET
ajtas-2517	23	37	vacuum	vacuum	PROPN
ajtas-2517	23	38	chamber	chamber	NOUN
ajtas-2517	23	39	.	.	PUNCT
ajtas-2517	24	1	2	2	X
ajtas-2517	24	2	.	.	X
ajtas-2517	24	3	preparation	preparation	NOUN
ajtas-2517	24	4	of	of	ADP
ajtas-2517	24	5	plate	plate	NOUN
ajtas-2517	24	6	surfaces	surface	NOUN
ajtas-2517	24	7	by	by	ADP
ajtas-2517	24	8	ion	ion	NOUN
ajtas-2517	24	9	etching	etch	VERB
ajtas-2517	24	10	in	in	ADP
ajtas-2517	24	11	a	a	DET
ajtas-2517	24	12	gas	gas	NOUN
ajtas-2517	24	13	discharge	discharge	NOUN
ajtas-2517	24	14	.	.	PUNCT
ajtas-2517	25	1	3	3	X
ajtas-2517	25	2	.	.	X
ajtas-2517	25	3	cleaning	clean	VERB
ajtas-2517	25	4	the	the	DET
ajtas-2517	25	5	surfaces	surface	NOUN
ajtas-2517	25	6	of	of	ADP
ajtas-2517	25	7	the	the	DET
ajtas-2517	25	8	plates	plate	NOUN
ajtas-2517	25	9	by	by	ADP
ajtas-2517	25	10	bombardment	bombardment	NOUN
ajtas-2517	25	11	with	with	ADP
ajtas-2517	25	12	metal	metal	NOUN
ajtas-2517	25	13	ions	ion	NOUN
ajtas-2517	25	14	and	and	CCONJ
ajtas-2517	25	15	heating	heating	NOUN
ajtas-2517	25	16	to	to	ADP
ajtas-2517	25	17	operating	operating	NOUN
ajtas-2517	25	18	temperatures	temperature	NOUN
ajtas-2517	25	19	.	.	PUNCT
ajtas-2517	26	1	4	4	X
ajtas-2517	26	2	.	.	X
ajtas-2517	26	3	covering	cover	VERB
ajtas-2517	26	4	of	of	ADP
ajtas-2517	26	5	loaded	load	VERB
ajtas-2517	26	6	products	product	NOUN
ajtas-2517	26	7	.	.	PUNCT
ajtas-2517	27	1	5	5	X
ajtas-2517	27	2	.	.	X
ajtas-2517	27	3	cooling	cool	VERB
ajtas-2517	27	4	and	and	CCONJ
ajtas-2517	27	5	removing	remove	VERB
ajtas-2517	27	6	the	the	DET
ajtas-2517	27	7	plates	plate	NOUN
ajtas-2517	27	8	from	from	ADP
ajtas-2517	27	9	the	the	DET
ajtas-2517	27	10	chamber	chamber	NOUN
ajtas-2517	27	11	.	.	PUNCT
ajtas-2517	28	1	6	6	NUM
ajtas-2517	28	2	.	.	PUNCT
ajtas-2517	28	3	quality	quality	NOUN
ajtas-2517	28	4	control	control	NOUN
ajtas-2517	28	5	of	of	ADP
ajtas-2517	28	6	the	the	DET
ajtas-2517	28	7	applied	apply	VERB
ajtas-2517	28	8	coating	coating	NOUN
ajtas-2517	28	9	.	.	PUNCT
ajtas-2517	29	1	conclusion	conclusion	NOUN
ajtas-2517	29	2	thus	thus	ADV
ajtas-2517	29	3	,	,	PUNCT
ajtas-2517	29	4	applying	apply	VERB
ajtas-2517	29	5	wear	wear	NOUN
ajtas-2517	29	6	-	-	PUNCT
ajtas-2517	29	7	resistant	resistant	ADJ
ajtas-2517	29	8	coatings	coating	NOUN
ajtas-2517	29	9	to	to	ADP
ajtas-2517	29	10	a	a	DET
ajtas-2517	29	11	cutting	cut	VERB
ajtas-2517	29	12	tool	tool	NOUN
ajtas-2517	29	13	is	be	AUX
ajtas-2517	29	14	a	a	DET
ajtas-2517	29	15	complex	complex	ADJ
ajtas-2517	29	16	task	task	NOUN
ajtas-2517	29	17	,	,	PUNCT
ajtas-2517	29	18	an	an	DET
ajtas-2517	29	19	integral	integral	ADJ
ajtas-2517	29	20	part	part	NOUN
ajtas-2517	29	21	of	of	ADP
ajtas-2517	29	22	which	which	PRON
ajtas-2517	29	23	is	be	AUX
ajtas-2517	29	24	a	a	DET
ajtas-2517	29	25	high	high	ADJ
ajtas-2517	29	26	wear	wear	NOUN
ajtas-2517	29	27	resistance	resistance	NOUN
ajtas-2517	29	28	index	index	NOUN
ajtas-2517	29	29	.	.	PUNCT
ajtas-2517	30	1	this	this	PRON
ajtas-2517	30	2	means	mean	VERB
ajtas-2517	30	3	that	that	SCONJ
ajtas-2517	30	4	the	the	DET
ajtas-2517	30	5	applied	apply	VERB
ajtas-2517	30	6	coating	coating	NOUN
ajtas-2517	30	7	must	must	AUX
ajtas-2517	30	8	have	have	VERB
ajtas-2517	30	9	a	a	DET
ajtas-2517	30	10	high	high	ADJ
ajtas-2517	30	11	"	"	PUNCT
ajtas-2517	30	12	adhesion	adhesion	NOUN
ajtas-2517	30	13	"	"	PUNCT
ajtas-2517	30	14	strength	strength	NOUN
ajtas-2517	30	15	to	to	ADP
ajtas-2517	30	16	the	the	DET
ajtas-2517	30	17	tool	tool	NOUN
ajtas-2517	30	18	substrate	substrate	NOUN
ajtas-2517	30	19	;	;	PUNCT
ajtas-2517	30	20	be	be	AUX
ajtas-2517	30	21	able	able	ADJ
ajtas-2517	30	22	to	to	PART
ajtas-2517	30	23	withstand	withstand	VERB
ajtas-2517	30	24	thermal	thermal	ADJ
ajtas-2517	30	25	loads	load	NOUN
ajtas-2517	30	26	;	;	PUNCT
ajtas-2517	30	27	have	have	AUX
ajtas-2517	30	28	increased	increase	VERB
ajtas-2517	30	29	mechanical	mechanical	ADJ
ajtas-2517	30	30	properties	property	NOUN
ajtas-2517	30	31	.	.	PUNCT
ajtas-2517	31	1	in	in	ADP
ajtas-2517	31	2	order	order	NOUN
ajtas-2517	31	3	for	for	SCONJ
ajtas-2517	31	4	the	the	DET
ajtas-2517	31	5	coating	coating	NOUN
ajtas-2517	31	6	to	to	PART
ajtas-2517	31	7	have	have	VERB
ajtas-2517	31	8	good	good	ADJ
ajtas-2517	31	9	adhesion	adhesion	NOUN
ajtas-2517	31	10	to	to	ADP
ajtas-2517	31	11	the	the	DET
ajtas-2517	31	12	applied	apply	VERB
ajtas-2517	31	13	material	material	NOUN
ajtas-2517	31	14	,	,	PUNCT
ajtas-2517	31	15	it	it	PRON
ajtas-2517	31	16	is	be	AUX
ajtas-2517	31	17	necessary	necessary	ADJ
ajtas-2517	31	18	to	to	PART
ajtas-2517	31	19	take	take	VERB
ajtas-2517	31	20	into	into	ADP
ajtas-2517	31	21	account	account	NOUN
ajtas-2517	31	22	the	the	DET
ajtas-2517	31	23	type	type	NOUN
ajtas-2517	31	24	of	of	ADP
ajtas-2517	31	25	chemical	chemical	NOUN
ajtas-2517	31	26	bond	bond	NOUN
ajtas-2517	31	27	,	,	PUNCT
ajtas-2517	31	28	and	and	CCONJ
ajtas-2517	31	29	it	it	PRON
ajtas-2517	31	30	is	be	AUX
ajtas-2517	31	31	also	also	ADV
ajtas-2517	31	32	worth	worth	ADJ
ajtas-2517	31	33	choosing	choose	VERB
ajtas-2517	31	34	a	a	DET
ajtas-2517	31	35	coating	coating	NOUN
ajtas-2517	31	36	based	base	VERB
ajtas-2517	31	37	on	on	ADP
ajtas-2517	31	38	the	the	DET
ajtas-2517	31	39	area	area	NOUN
ajtas-2517	31	40	of	of	ADP
ajtas-2517	31	41	application	application	NOUN
ajtas-2517	31	42	and	and	CCONJ
ajtas-2517	31	43	the	the	DET
ajtas-2517	31	44	type	type	NOUN
ajtas-2517	31	45	of	of	ADP
ajtas-2517	31	46	material	material	NOUN
ajtas-2517	31	47	being	be	AUX
ajtas-2517	31	48	processed	process	VERB
ajtas-2517	31	49	.	.	PUNCT
ajtas-2517	32	1	american	american	PROPN
ajtas-2517	32	2	journal	journal	PROPN
ajtas-2517	32	3	of	of	ADP
ajtas-2517	32	4	technology	technology	NOUN
ajtas-2517	32	5	and	and	CCONJ
ajtas-2517	32	6	applied	apply	VERB
ajtas-2517	32	7	sciences	science	NOUN
ajtas-2517	32	8	31	31	NUM
ajtas-2517	32	9	,	,	PUNCT
ajtas-2517	32	10	december2024	december2024	PROPN
ajtas-2517	32	11	p	p	NOUN
ajtas-2517	32	12	a	a	PRON
ajtas-2517	32	13	g	g	NOUN
ajtas-2517	32	14	e	e	NOUN
ajtas-2517	32	15	|	|	ADV
ajtas-2517	32	16	18	18	NUM
ajtas-2517	32	17	www.americanjournal.org	www.americanjournal.org	PROPN
ajtas-2517	32	18	references	reference	NOUN
ajtas-2517	32	19	1	1	NUM
ajtas-2517	32	20	.	.	PUNCT
ajtas-2517	32	21	diamond	diamond	NOUN
ajtas-2517	32	22	-	-	PUNCT
ajtas-2517	32	23	like	like	ADJ
ajtas-2517	32	24	coverytie	coverytie	NOUN
ajtas-2517	33	1	[	[	X
ajtas-2517	33	2	electronny	electronny	X
ajtas-2517	33	3	resat	resat	NOUN
ajtas-2517	33	4	[	[	X
ajtas-2517	33	5	rs	rs	X
ajtas-2517	33	6	]	]	PUNCT
ajtas-2517	33	7	.	.	PUNCT
ajtas-2517	34	1	modeaccess	modeaccess	NOUN
ajtas-2517	34	2	:	:	PUNCT
ajtas-2517	35	1	https://kartaslov.ru	https://kartaslov.ru	X
ajtas-2517	35	2	,	,	PUNCT
ajtas-2517	35	3	free	free	ADJ
ajtas-2517	35	4	.	.	PUNCT
ajtas-2517	36	1	2	2	X
ajtas-2517	36	2	.	.	X
ajtas-2517	36	3	iznowith	iznowith	NOUN
ajtas-2517	36	4	resistant	resistant	ADJ
ajtas-2517	36	5	coatings	coating	NOUN
ajtas-2517	36	6	of	of	ADP
ajtas-2517	36	7	cutting	cut	VERB
ajtas-2517	36	8	tools	tool	NOUN
ajtas-2517	36	9	[	[	X
ajtas-2517	36	10	electronic	electronic	ADJ
ajtas-2517	36	11	resource	resource	NOUN
ajtas-2517	36	12	]	]	PUNCT
ajtas-2517	36	13	.	.	PUNCT
ajtas-2517	37	1	access	access	NOUN
ajtas-2517	37	2	mode	mode	NOUN
ajtas-2517	37	3	:	:	PUNCT
ajtas-2517	37	4	https://www.iprom.ru/news/vidy_pokrytiy_i_tverdykh_splavov_dlya_rezhushcheg	https://www.iprom.ru/news/vidy_pokrytiy_i_tverdykh_splavov_dlya_rezhushcheg	PROPN
ajtas-2517	37	5	o_instrumenta/	o_instrumenta/	NOUN
ajtas-2517	37	6	,	,	PUNCT
ajtas-2517	37	7	free	free	ADJ
ajtas-2517	37	8	.	.	PUNCT
ajtas-2517	38	1	3	3	X
ajtas-2517	38	2	.	.	X
ajtas-2517	38	3	grisgoryev	grisgoryev	PROPN
ajtas-2517	38	4	s.	s.	PROPN
ajtas-2517	38	5	n.	n.	PROPN
ajtas-2517	38	6	methods	method	NOUN
ajtas-2517	38	7	povbreathing	povbreathe	VERB
ajtas-2517	38	8	st	st	PROPN
ajtas-2517	38	9	ocapacities	ocapacitie	NOUN
ajtas-2517	38	10	rechewing	rechewe	VERB
ajtas-2517	38	11	tool	tool	NOUN
ajtas-2517	38	12	.	.	PUNCT
ajtas-2517	39	1	–	–	PUNCT
ajtas-2517	39	2	m.	m.	NOUN
ajtas-2517	39	3	:	:	PUNCT
ajtas-2517	39	4	mechanical	mechanical	ADJ
ajtas-2517	39	5	engineering	engineering	NOUN
ajtas-2517	39	6	,	,	PUNCT
ajtas-2517	39	7	2011	2011	NUM
ajtas-2517	39	8	.	.	PUNCT
ajtas-2517	39	9	–	–	PUNCT
ajtas-2517	39	10	368	368	NUM
ajtas-2517	39	11	p.	p.	NOUN