id	sid	tid	token	lemma	pos
asir-946	1	1	applied	apply	VERB
asir-946	1	2	science	science	NOUN
asir-946	1	3	and	and	CCONJ
asir-946	1	4	innovative	innovative	ADJ
asir-946	1	5	research	research	NOUN
asir-946	1	6	issn	issn	VERB
asir-946	1	7	2474	2474	NUM
asir-946	1	8	-	-	SYM
asir-946	1	9	4972	4972	NUM
asir-946	1	10	(	(	PUNCT
asir-946	1	11	print	print	NOUN
asir-946	1	12	)	)	PUNCT
asir-946	1	13	issn	issn	VERB
asir-946	1	14	2474	2474	NUM
asir-946	1	15	-	-	SYM
asir-946	1	16	4980	4980	NUM
asir-946	1	17	(	(	PUNCT
asir-946	1	18	online	online	ADJ
asir-946	1	19	)	)	PUNCT
asir-946	1	20	vol	vol	NOUN
asir-946	1	21	.	.	PROPN
asir-946	2	1	1	1	NUM
asir-946	2	2	,	,	PUNCT
asir-946	2	3	no	no	INTJ
asir-946	2	4	.	.	NOUN
asir-946	2	5	1	1	NUM
asir-946	2	6	,	,	PUNCT
asir-946	2	7	2017	2017	NUM
asir-946	2	8	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	NOUN
asir-946	2	9	69	69	NUM
asir-946	2	10	nanoscale	nanoscale	NOUN
asir-946	2	11	nucleation	nucleation	NOUN
asir-946	2	12	and	and	CCONJ
asir-946	2	13	growth	growth	NOUN
asir-946	2	14	of	of	ADP
asir-946	2	15	non	non	ADJ
asir-946	2	16	-	-	ADJ
asir-946	2	17	stoichiometric	stoichiometric	ADJ
asir-946	2	18	v	v	NOUN
asir-946	2	19	-	-	PUNCT
asir-946	2	20	shaped	shape	VERB
asir-946	2	21	inp	inp	PROPN
asir-946	2	22	defect	defect	VERB
asir-946	2	23	in	in	ADP
asir-946	2	24	heterogeneous	heterogeneous	ADJ
asir-946	2	25	ingaasp	ingaasp	NOUN
asir-946	2	26	/	/	SYM
asir-946	2	27	inp	inp	PROPN
asir-946	2	28	array	array	PROPN
asir-946	2	29	jack	jack	PROPN
asir-946	2	30	jia	jia	PROPN
asir-946	2	31	-	-	PROPN
asir-946	2	32	sheng	sheng	PROPN
asir-946	2	33	huang1,2	huang1,2	PROPN
asir-946	2	34	*	*	PROPN
asir-946	2	35	,	,	PUNCT
asir-946	2	36	chung	chung	PROPN
asir-946	2	37	shyu2	shyu2	PROPN
asir-946	2	38	,	,	PUNCT
asir-946	2	39	yu	yu	PROPN
asir-946	2	40	-	-	PUNCT
asir-946	2	41	heng	heng	PROPN
asir-946	2	42	jan1,2	jan1,2	PROPN
asir-946	2	43	,	,	PUNCT
asir-946	2	44	willy	willy	NOUN
asir-946	2	45	lin2	lin2	PROPN
asir-946	2	46	,	,	PUNCT
asir-946	2	47	yiju	yiju	PROPN
asir-946	2	48	chen2	chen2	NOUN
asir-946	2	49	,	,	PUNCT
asir-946	2	50	ehsin	ehsin	PROPN
asir-946	2	51	chen2	chen2	PROPN
asir-946	2	52	,	,	PUNCT
asir-946	2	53	shinyi	shinyi	PROPN
asir-946	2	54	shen2	shen2	PROPN
asir-946	2	55	,	,	PUNCT
asir-946	2	56	c.	c.	PROPN
asir-946	2	57	j.	j.	PROPN
asir-946	2	58	ni2	ni2	PROPN
asir-946	2	59	,	,	PUNCT
asir-946	2	60	s.	s.	PROPN
asir-946	2	61	c.	c.	PROPN
asir-946	2	62	huang2	huang2	PROPN
asir-946	2	63	,	,	PUNCT
asir-946	2	64	j.	j.	PROPN
asir-946	2	65	l.	l.	PROPN
asir-946	2	66	hsieh2	hsieh2	PROPN
asir-946	2	67	&	&	CCONJ
asir-946	2	68	emin	emin	PROPN
asir-946	2	69	chou2	chou2	PROPN
asir-946	2	70	1	1	NUM
asir-946	2	71	source	source	NOUN
asir-946	2	72	photonics	photonic	NOUN
asir-946	2	73	,	,	PUNCT
asir-946	2	74	west	west	NOUN
asir-946	2	75	hills	hill	NOUN
asir-946	2	76	,	,	PUNCT
asir-946	2	77	ca	ca	PROPN
asir-946	2	78	,	,	PUNCT
asir-946	2	79	usa	usa	PROPN
asir-946	2	80	2	2	NUM
asir-946	2	81	source	source	NOUN
asir-946	2	82	photonics	photonic	NOUN
asir-946	2	83	,	,	PUNCT
asir-946	2	84	science	science	NOUN
asir-946	2	85	-	-	PUNCT
asir-946	2	86	based	base	VERB
asir-946	2	87	industrial	industrial	ADJ
asir-946	2	88	park	park	NOUN
asir-946	2	89	,	,	PUNCT
asir-946	2	90	hsinchu	hsinchu	PROPN
asir-946	2	91	,	,	PUNCT
asir-946	2	92	taiwan	taiwan	PROPN
asir-946	2	93	,	,	PUNCT
asir-946	2	94	r.o.c	r.o.c	NOUN
asir-946	2	95	.	.	PUNCT
asir-946	3	1	*	*	PUNCT
asir-946	3	2	jack	jack	PROPN
asir-946	3	3	jia	jia	PROPN
asir-946	3	4	-	-	PROPN
asir-946	3	5	sheng	sheng	PROPN
asir-946	3	6	huang	huang	PROPN
asir-946	3	7	,	,	PUNCT
asir-946	3	8	e	e	NOUN
asir-946	3	9	-	-	NOUN
asir-946	3	10	mail	mail	NOUN
asir-946	3	11	:	:	PUNCT
asir-946	3	12	jack.huang@sourcephotonics.com	jack.huang@sourcephotonics.com	X
asir-946	3	13	received	receive	VERB
asir-946	3	14	:	:	PUNCT
asir-946	3	15	may	may	AUX
asir-946	3	16	10	10	NUM
asir-946	3	17	,	,	PUNCT
asir-946	3	18	2017	2017	NUM
asir-946	3	19	accepted	accept	VERB
asir-946	3	20	:	:	PUNCT
asir-946	3	21	may	may	AUX
asir-946	3	22	18	18	NUM
asir-946	3	23	,	,	PUNCT
asir-946	3	24	2017	2017	NUM
asir-946	3	25	online	online	ADV
asir-946	3	26	published	publish	VERB
asir-946	3	27	:	:	PUNCT
asir-946	4	1	may	may	AUX
asir-946	4	2	25	25	NUM
asir-946	4	3	,	,	PUNCT
asir-946	4	4	2017	2017	NUM
asir-946	4	5	doi:10.22158	doi:10.22158	NOUN
asir-946	4	6	/	/	SYM
asir-946	4	7	asir.v1n1p69	asir.v1n1p69	NOUN
asir-946	4	8	url	url	NOUN
asir-946	4	9	:	:	PUNCT
asir-946	4	10	http://dx.doi.org/10.22158/asir.v1n1p69	http://dx.doi.org/10.22158/asir.v1n1p69	ADJ
asir-946	4	11	abstract	abstract	ADJ
asir-946	4	12	nanotechnology	nanotechnology	NOUN
asir-946	4	13	is	be	AUX
asir-946	4	14	a	a	DET
asir-946	4	15	broad	broad	ADJ
asir-946	4	16	field	field	NOUN
asir-946	4	17	that	that	PRON
asir-946	4	18	involves	involve	VERB
asir-946	4	19	the	the	DET
asir-946	4	20	manipulation	manipulation	NOUN
asir-946	4	21	of	of	ADP
asir-946	4	22	atoms	atom	NOUN
asir-946	4	23	and	and	CCONJ
asir-946	4	24	molecules	molecule	NOUN
asir-946	4	25	.	.	PUNCT
asir-946	5	1	for	for	ADP
asir-946	5	2	nanophotonics	nanophotonic	NOUN
asir-946	5	3	,	,	PUNCT
asir-946	5	4	defect	defect	VERB
asir-946	5	5	formation	formation	NOUN
asir-946	5	6	in	in	ADP
asir-946	5	7	nanostructured	nanostructure	VERB
asir-946	5	8	compound	compound	NOUN
asir-946	5	9	semiconductor	semiconductor	NOUN
asir-946	5	10	system	system	NOUN
asir-946	5	11	is	be	AUX
asir-946	5	12	of	of	ADP
asir-946	5	13	great	great	ADJ
asir-946	5	14	technological	technological	ADJ
asir-946	5	15	interest	interest	NOUN
asir-946	5	16	.	.	PUNCT
asir-946	6	1	in	in	ADP
asir-946	6	2	this	this	DET
asir-946	6	3	paper	paper	NOUN
asir-946	6	4	,	,	PUNCT
asir-946	6	5	we	we	PRON
asir-946	6	6	study	study	VERB
asir-946	6	7	the	the	DET
asir-946	6	8	nanoscale	nanoscale	NOUN
asir-946	6	9	nucleation	nucleation	NOUN
asir-946	6	10	and	and	CCONJ
asir-946	6	11	growth	growth	NOUN
asir-946	6	12	of	of	ADP
asir-946	6	13	v	v	ADV
asir-946	6	14	-	-	PUNCT
asir-946	6	15	shaped	shape	VERB
asir-946	6	16	defect	defect	NOUN
asir-946	6	17	in	in	ADP
asir-946	6	18	the	the	DET
asir-946	6	19	heterogeneous	heterogeneous	ADJ
asir-946	6	20	ingaasp	ingaasp	NOUN
asir-946	6	21	/	/	SYM
asir-946	6	22	inp	inp	PROPN
asir-946	6	23	array	array	NOUN
asir-946	6	24	.	.	PUNCT
asir-946	7	1	we	we	PRON
asir-946	7	2	have	have	AUX
asir-946	7	3	observed	observe	VERB
asir-946	7	4	that	that	SCONJ
asir-946	7	5	the	the	DET
asir-946	7	6	nucleation	nucleation	NOUN
asir-946	7	7	originated	originate	VERB
asir-946	7	8	from	from	ADP
asir-946	7	9	the	the	DET
asir-946	7	10	phosphorus	phosphorus	NOUN
asir-946	7	11	-	-	PUNCT
asir-946	7	12	deficient	deficient	ADJ
asir-946	7	13	disordering	disordering	NOUN
asir-946	7	14	that	that	PRON
asir-946	7	15	was	be	AUX
asir-946	7	16	likely	likely	ADV
asir-946	7	17	induced	induce	VERB
asir-946	7	18	by	by	ADP
asir-946	7	19	reactive	reactive	ADJ
asir-946	7	20	ion	ion	NOUN
asir-946	7	21	etching	etching	NOUN
asir-946	7	22	.	.	PUNCT
asir-946	8	1	during	during	ADP
asir-946	8	2	the	the	DET
asir-946	8	3	nucleation	nucleation	NOUN
asir-946	8	4	,	,	PUNCT
asir-946	8	5	the	the	DET
asir-946	8	6	phosphorus	phosphorus	NOUN
asir-946	8	7	-	-	PUNCT
asir-946	8	8	deficient	deficient	ADJ
asir-946	8	9	in1+xp1	in1+xp1	ADJ
asir-946	8	10	-	-	PUNCT
asir-946	8	11	x	x	ADJ
asir-946	8	12	compound	compound	NOUN
asir-946	8	13	was	be	AUX
asir-946	8	14	developed	develop	VERB
asir-946	8	15	at	at	ADP
asir-946	8	16	the	the	DET
asir-946	8	17	trench	trench	NOUN
asir-946	8	18	.	.	PUNCT
asir-946	9	1	the	the	DET
asir-946	9	2	triangular	triangular	NOUN
asir-946	9	3	nano	nano	NOUN
asir-946	9	4	-	-	PUNCT
asir-946	9	5	precipitates	precipitate	NOUN
asir-946	9	6	of	of	ADP
asir-946	9	7	in1+xp1	in1+xp1	NOUN
asir-946	9	8	-	-	PUNCT
asir-946	9	9	x	x	PUNCT
asir-946	9	10	with	with	ADP
asir-946	9	11	sizes	size	NOUN
asir-946	9	12	of	of	ADP
asir-946	9	13	20	20	NUM
asir-946	9	14	-	-	SYM
asir-946	9	15	30	30	NUM
asir-946	9	16	nm	nm	NOUN
asir-946	9	17	were	be	AUX
asir-946	9	18	formed	form	VERB
asir-946	9	19	.	.	PUNCT
asir-946	10	1	the	the	DET
asir-946	10	2	ratio	ratio	NOUN
asir-946	10	3	of	of	ADP
asir-946	10	4	in	in	ADP
asir-946	10	5	to	to	ADP
asir-946	10	6	p	p	NOUN
asir-946	10	7	in	in	ADP
asir-946	10	8	the	the	DET
asir-946	10	9	non	non	ADJ
asir-946	10	10	-	-	ADJ
asir-946	10	11	stoichiometric	stoichiometric	ADJ
asir-946	10	12	compound	compound	NOUN
asir-946	10	13	was	be	AUX
asir-946	10	14	higher	high	ADJ
asir-946	10	15	in	in	ADP
asir-946	10	16	the	the	DET
asir-946	10	17	upper	upper	ADJ
asir-946	10	18	portion	portion	NOUN
asir-946	10	19	of	of	ADP
asir-946	10	20	the	the	DET
asir-946	10	21	v	v	NOUN
asir-946	10	22	-	-	PUNCT
asir-946	10	23	defect	defect	NOUN
asir-946	10	24	,	,	PUNCT
asir-946	10	25	likely	likely	ADJ
asir-946	10	26	due	due	ADP
asir-946	10	27	to	to	ADP
asir-946	10	28	antisite	antisite	ADJ
asir-946	10	29	defect	defect	NOUN
asir-946	10	30	mechanism	mechanism	NOUN
asir-946	10	31	.	.	PUNCT
asir-946	11	1	during	during	ADP
asir-946	11	2	the	the	DET
asir-946	11	3	defect	defect	NOUN
asir-946	11	4	growth	growth	NOUN
asir-946	11	5	process	process	NOUN
asir-946	11	6	,	,	PUNCT
asir-946	11	7	the	the	DET
asir-946	11	8	phosphorus	phosphorus	NOUN
asir-946	11	9	-	-	PUNCT
asir-946	11	10	deficient	deficient	ADJ
asir-946	11	11	nucleation	nucleation	NOUN
asir-946	11	12	site	site	NOUN
asir-946	11	13	expanded	expand	VERB
asir-946	11	14	to	to	PART
asir-946	11	15	form	form	VERB
asir-946	11	16	open	open	ADJ
asir-946	11	17	,	,	PUNCT
asir-946	11	18	inverted	inverted	ADJ
asir-946	11	19	pyramid	pyramid	NOUN
asir-946	11	20	with	with	ADP
asir-946	11	21	sidewalls	sidewall	NOUN
asir-946	11	22	following	follow	VERB
asir-946	11	23	the	the	DET
asir-946	11	24	crystallographic	crystallographic	ADJ
asir-946	11	25	planes	plane	NOUN
asir-946	11	26	.	.	PUNCT
asir-946	12	1	keywords	keyword	VERB
asir-946	12	2	nanotechnology	nanotechnology	PROPN
asir-946	12	3	,	,	PUNCT
asir-946	12	4	nanophotonics	nanophotonic	NOUN
asir-946	12	5	,	,	PUNCT
asir-946	12	6	semiconductor	semiconductor	NOUN
asir-946	12	7	,	,	PUNCT
asir-946	12	8	defects	defect	NOUN
asir-946	12	9	,	,	PUNCT
asir-946	12	10	v	v	NOUN
asir-946	12	11	-	-	PUNCT
asir-946	12	12	shaped	shape	VERB
asir-946	12	13	defects	defect	NOUN
asir-946	12	14	,	,	PUNCT
asir-946	12	15	heterogeneous	heterogeneous	ADJ
asir-946	12	16	interface	interface	NOUN
asir-946	12	17	,	,	PUNCT
asir-946	12	18	reactive	reactive	ADJ
asir-946	12	19	ion	ion	NOUN
asir-946	12	20	etching	etching	NOUN
asir-946	12	21	,	,	PUNCT
asir-946	12	22	surface	surface	NOUN
asir-946	12	23	energy	energy	NOUN
asir-946	12	24	1	1	NUM
asir-946	12	25	.	.	PUNCT
asir-946	13	1	introduction	introduction	NOUN
asir-946	13	2	nanotechnology	nanotechnology	NOUN
asir-946	13	3	involves	involve	VERB
asir-946	13	4	the	the	DET
asir-946	13	5	study	study	NOUN
asir-946	13	6	and	and	CCONJ
asir-946	13	7	application	application	NOUN
asir-946	13	8	of	of	ADP
asir-946	13	9	extremely	extremely	ADV
asir-946	13	10	small	small	ADJ
asir-946	13	11	things	thing	NOUN
asir-946	13	12	,	,	PUNCT
asir-946	13	13	typically	typically	ADV
asir-946	13	14	in	in	ADP
asir-946	13	15	the	the	DET
asir-946	13	16	range	range	NOUN
asir-946	13	17	of	of	ADP
asir-946	13	18	1	1	NUM
asir-946	13	19	to	to	PART
asir-946	13	20	100	100	NUM
asir-946	13	21	nanometers	nanometer	NOUN
asir-946	13	22	(	(	PUNCT
asir-946	13	23	drexler	drexler	NOUN
asir-946	13	24	,	,	PUNCT
asir-946	13	25	1986	1986	NUM
asir-946	13	26	;	;	PUNCT
asir-946	13	27	saini	saini	PROPN
asir-946	13	28	et	et	PROPN
asir-946	13	29	al	al	PROPN
asir-946	13	30	.	.	PROPN
asir-946	13	31	,	,	PUNCT
asir-946	13	32	2010	2010	NUM
asir-946	13	33	;	;	PUNCT
asir-946	13	34	regan	regan	PROPN
asir-946	13	35	et	et	PROPN
asir-946	13	36	al	al	PROPN
asir-946	13	37	.	.	PROPN
asir-946	13	38	,	,	PUNCT
asir-946	13	39	2005	2005	NUM
asir-946	13	40	;	;	PUNCT
asir-946	13	41	narayan	narayan	PROPN
asir-946	13	42	et	et	PROPN
asir-946	13	43	al	al	PROPN
asir-946	13	44	.	.	PROPN
asir-946	13	45	,	,	PUNCT
asir-946	13	46	2004	2004	NUM
asir-946	13	47	;	;	PUNCT
asir-946	13	48	paull	paull	PROPN
asir-946	13	49	&	&	CCONJ
asir-946	13	50	lyons	lyons	PROPN
asir-946	13	51	,	,	PUNCT
asir-946	13	52	2008	2008	NUM
asir-946	13	53	;	;	PUNCT
asir-946	13	54	dregely	dregely	ADV
asir-946	13	55	et	et	PROPN
asir-946	13	56	al	al	PROPN
asir-946	13	57	.	.	PROPN
asir-946	13	58	,	,	PUNCT
asir-946	13	59	2011	2011	NUM
asir-946	13	60	)	)	PUNCT
asir-946	13	61	.	.	PUNCT
asir-946	14	1	the	the	DET
asir-946	14	2	essential	essential	ADJ
asir-946	14	3	core	core	NOUN
asir-946	14	4	of	of	ADP
asir-946	14	5	nanotechnology	nanotechnology	NOUN
asir-946	14	6	is	be	AUX
asir-946	14	7	the	the	DET
asir-946	14	8	manipulation	manipulation	NOUN
asir-946	14	9	of	of	ADP
asir-946	14	10	atoms	atom	NOUN
asir-946	14	11	and	and	CCONJ
asir-946	14	12	molecules	molecule	NOUN
asir-946	14	13	.	.	PUNCT
asir-946	15	1	the	the	DET
asir-946	15	2	ideas	idea	NOUN
asir-946	15	3	and	and	CCONJ
asir-946	15	4	concepts	concept	NOUN
asir-946	15	5	behind	behind	ADP
asir-946	15	6	nanotechnology	nanotechnology	PROPN
asir-946	15	7	originated	originate	VERB
asir-946	15	8	from	from	ADP
asir-946	15	9	the	the	DET
asir-946	15	10	nobel	nobel	PROPN
asir-946	15	11	laureate	laureate	PROPN
asir-946	15	12	physicist	physicist	NOUN
asir-946	15	13	richard	richard	PROPN
asir-946	15	14	p.	p.	PROPN
asir-946	15	15	feynman	feynman	PROPN
asir-946	15	16	at	at	ADP
asir-946	15	17	california	california	PROPN
asir-946	15	18	institute	institute	PROPN
asir-946	15	19	of	of	ADP
asir-946	15	20	technology	technology	PROPN
asir-946	15	21	(	(	PUNCT
asir-946	15	22	feynman	feynman	PROPN
asir-946	15	23	,	,	PUNCT
asir-946	15	24	1992	1992	NUM
asir-946	15	25	)	)	PUNCT
asir-946	15	26	.	.	PUNCT
asir-946	16	1	on	on	ADP
asir-946	16	2	december	december	PROPN
asir-946	16	3	29	29	NUM
asir-946	16	4	,	,	PUNCT
asir-946	16	5	1959	1959	NUM
asir-946	16	6	,	,	PUNCT
asir-946	16	7	he	he	PRON
asir-946	16	8	delivered	deliver	VERB
asir-946	16	9	a	a	DET
asir-946	16	10	talk	talk	NOUN
asir-946	16	11	entitled	entitle	VERB
asir-946	16	12	“	"	PUNCT
asir-946	16	13	there	there	PRON
asir-946	16	14	’s	’	VERB
asir-946	16	15	plenty	plenty	NOUN
asir-946	16	16	of	of	ADP
asir-946	16	17	room	room	NOUN
asir-946	16	18	at	at	ADP
asir-946	16	19	the	the	DET
asir-946	16	20	bottom	bottom	NOUN
asir-946	16	21	”	"	PUNCT
asir-946	16	22	that	that	PRON
asir-946	16	23	famously	famously	ADV
asir-946	16	24	predicted	predict	VERB
asir-946	16	25	that	that	PRON
asir-946	16	26	nanoscale	nanoscale	NOUN
asir-946	16	27	matter	matter	NOUN
asir-946	16	28	could	could	AUX
asir-946	16	29	be	be	AUX
asir-946	16	30	squeezed	squeeze	VERB
asir-946	16	31	on	on	ADP
asir-946	16	32	the	the	DET
asir-946	16	33	head	head	NOUN
asir-946	16	34	of	of	ADP
asir-946	16	35	a	a	DET
asir-946	16	36	pin	pin	NOUN
asir-946	16	37	.	.	PUNCT
asir-946	17	1	feynman	feynman	PROPN
asir-946	17	2	discussed	discuss	VERB
asir-946	17	3	about	about	ADP
asir-946	17	4	manipulating	manipulate	VERB
asir-946	17	5	and	and	CCONJ
asir-946	17	6	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	NOUN
asir-946	17	7	applied	apply	VERB
asir-946	17	8	science	science	NOUN
asir-946	17	9	and	and	CCONJ
asir-946	17	10	innovative	innovative	ADJ
asir-946	17	11	research	research	NOUN
asir-946	17	12	vol	vol	NOUN
asir-946	17	13	.	.	PROPN
asir-946	18	1	1	1	NUM
asir-946	18	2	,	,	PUNCT
asir-946	18	3	no	no	INTJ
asir-946	18	4	.	.	NOUN
asir-946	18	5	1	1	NUM
asir-946	18	6	,	,	PUNCT
asir-946	18	7	2017	2017	NUM
asir-946	18	8	70	70	NUM
asir-946	18	9	published	publish	VERB
asir-946	18	10	by	by	ADP
asir-946	18	11	scholink	scholink	PROPN
asir-946	18	12	inc	inc	PROPN
asir-946	18	13	.	.	PROPN
asir-946	19	1	controlling	control	VERB
asir-946	19	2	things	thing	NOUN
asir-946	19	3	on	on	ADP
asir-946	19	4	a	a	DET
asir-946	19	5	small	small	ADJ
asir-946	19	6	scale	scale	NOUN
asir-946	19	7	.	.	PUNCT
asir-946	20	1	today	today	NOUN
asir-946	20	2	,	,	PUNCT
asir-946	20	3	nanophotonics	nanophotonic	NOUN
asir-946	20	4	have	have	AUX
asir-946	20	5	been	be	AUX
asir-946	20	6	increasingly	increasingly	ADV
asir-946	20	7	studied	study	VERB
asir-946	20	8	in	in	ADP
asir-946	20	9	academia	academia	NOUN
asir-946	20	10	and	and	CCONJ
asir-946	20	11	industry	industry	NOUN
asir-946	20	12	(	(	PUNCT
asir-946	20	13	bowers	bower	NOUN
asir-946	20	14	et	et	PROPN
asir-946	20	15	al	al	PROPN
asir-946	20	16	.	.	PROPN
asir-946	20	17	,	,	PUNCT
asir-946	20	18	2010	2010	NUM
asir-946	20	19	;	;	PUNCT
asir-946	20	20	duan	duan	PROPN
asir-946	20	21	et	et	PROPN
asir-946	20	22	al	al	PROPN
asir-946	20	23	.	.	PROPN
asir-946	20	24	,	,	PUNCT
asir-946	20	25	2003	2003	NUM
asir-946	20	26	;	;	PUNCT
asir-946	20	27	gilfert	gilfert	NOUN
asir-946	20	28	et	et	PROPN
asir-946	20	29	al	al	PROPN
asir-946	20	30	.	.	PROPN
asir-946	20	31	,	,	PUNCT
asir-946	20	32	2010	2010	NUM
asir-946	20	33	;	;	PUNCT
asir-946	20	34	duan	duan	PROPN
asir-946	20	35	et	et	PROPN
asir-946	20	36	al	al	PROPN
asir-946	20	37	.	.	PROPN
asir-946	20	38	,	,	PUNCT
asir-946	20	39	2001	2001	NUM
asir-946	20	40	)	)	PUNCT
asir-946	20	41	due	due	ADP
asir-946	20	42	to	to	ADP
asir-946	20	43	their	their	PRON
asir-946	20	44	wide	wide	ADJ
asir-946	20	45	ranges	range	NOUN
asir-946	20	46	of	of	ADP
asir-946	20	47	communication	communication	NOUN
asir-946	20	48	applications	application	NOUN
asir-946	20	49	.	.	PUNCT
asir-946	21	1	the	the	DET
asir-946	21	2	nanoscale	nanoscale	NOUN
asir-946	21	3	photonics	photonic	NOUN
asir-946	21	4	devices	device	NOUN
asir-946	21	5	not	not	PART
asir-946	21	6	only	only	ADV
asir-946	21	7	are	be	AUX
asir-946	21	8	small	small	ADJ
asir-946	21	9	in	in	ADP
asir-946	21	10	dimensions	dimension	NOUN
asir-946	21	11	,	,	PUNCT
asir-946	21	12	but	but	CCONJ
asir-946	21	13	also	also	ADV
asir-946	21	14	exhibit	exhibit	VERB
asir-946	21	15	novel	novel	ADJ
asir-946	21	16	properties	property	NOUN
asir-946	21	17	beyond	beyond	ADP
asir-946	21	18	imagination	imagination	NOUN
asir-946	21	19	.	.	PUNCT
asir-946	22	1	for	for	ADP
asir-946	22	2	example	example	NOUN
asir-946	22	3	,	,	PUNCT
asir-946	22	4	plasmonic	plasmonic	ADJ
asir-946	22	5	nanowire	nanowire	ADJ
asir-946	22	6	lasers	laser	NOUN
asir-946	22	7	have	have	AUX
asir-946	22	8	been	be	AUX
asir-946	22	9	demonstrated	demonstrate	VERB
asir-946	22	10	to	to	PART
asir-946	22	11	show	show	VERB
asir-946	22	12	low	low	ADJ
asir-946	22	13	threshold	threshold	NOUN
asir-946	22	14	current	current	ADJ
asir-946	22	15	,	,	PUNCT
asir-946	22	16	high	high	ADJ
asir-946	22	17	power	power	NOUN
asir-946	22	18	and	and	CCONJ
asir-946	22	19	fast	fast	ADJ
asir-946	22	20	modulation	modulation	NOUN
asir-946	22	21	(	(	PUNCT
asir-946	22	22	sidiropoulos	sidiropoulo	NOUN
asir-946	22	23	et	et	PROPN
asir-946	22	24	al	al	PROPN
asir-946	22	25	.	.	PROPN
asir-946	22	26	,	,	PUNCT
asir-946	22	27	2014	2014	NUM
asir-946	22	28	)	)	PUNCT
asir-946	22	29	.	.	PUNCT
asir-946	23	1	defect	defect	NOUN
asir-946	23	2	engineering	engineering	NOUN
asir-946	23	3	is	be	AUX
asir-946	23	4	an	an	DET
asir-946	23	5	important	important	ADJ
asir-946	23	6	subject	subject	NOUN
asir-946	23	7	for	for	ADP
asir-946	23	8	the	the	DET
asir-946	23	9	practical	practical	ADJ
asir-946	23	10	applications	application	NOUN
asir-946	23	11	of	of	ADP
asir-946	23	12	nanotechnology	nanotechnology	NOUN
asir-946	23	13	.	.	PUNCT
asir-946	24	1	defects	defect	NOUN
asir-946	24	2	in	in	ADP
asir-946	24	3	various	various	ADJ
asir-946	24	4	nanostructured	nanostructure	VERB
asir-946	24	5	systems	system	NOUN
asir-946	24	6	such	such	ADJ
asir-946	24	7	as	as	ADP
asir-946	24	8	carbon	carbon	NOUN
asir-946	24	9	nanotubes	nanotube	NOUN
asir-946	24	10	(	(	PUNCT
asir-946	24	11	fan	fan	NOUN
asir-946	24	12	et	et	PROPN
asir-946	24	13	al	al	PROPN
asir-946	24	14	.	.	PROPN
asir-946	24	15	,	,	PUNCT
asir-946	24	16	2005	2005	NUM
asir-946	24	17	;	;	PUNCT
asir-946	24	18	charlier	charlier	NOUN
asir-946	24	19	,	,	PUNCT
asir-946	24	20	2002	2002	NUM
asir-946	24	21	;	;	PUNCT
asir-946	24	22	collins	collin	NOUN
asir-946	24	23	,	,	PUNCT
asir-946	24	24	2009	2009	NUM
asir-946	24	25	)	)	PUNCT
asir-946	24	26	and	and	CCONJ
asir-946	24	27	semiconductor	semiconductor	NOUN
asir-946	24	28	nanowires	nanowire	NOUN
asir-946	24	29	(	(	PUNCT
asir-946	24	30	korgel	korgel	NOUN
asir-946	24	31	,	,	PUNCT
asir-946	24	32	2006	2006	NUM
asir-946	24	33	;	;	PUNCT
asir-946	24	34	tham	tham	PROPN
asir-946	24	35	et	et	PROPN
asir-946	24	36	al	al	PROPN
asir-946	24	37	.	.	PROPN
asir-946	24	38	,	,	PUNCT
asir-946	24	39	2006	2006	NUM
asir-946	24	40	;	;	PUNCT
asir-946	24	41	wang	wang	PROPN
asir-946	24	42	,	,	PUNCT
asir-946	24	43	2006	2006	NUM
asir-946	24	44	)	)	PUNCT
asir-946	24	45	have	have	AUX
asir-946	24	46	been	be	AUX
asir-946	24	47	studied	study	VERB
asir-946	24	48	in	in	ADP
asir-946	24	49	the	the	DET
asir-946	24	50	past	past	NOUN
asir-946	24	51	.	.	PUNCT
asir-946	25	1	for	for	ADP
asir-946	25	2	nanophotonics	nanophotonic	NOUN
asir-946	25	3	,	,	PUNCT
asir-946	25	4	defect	defect	VERB
asir-946	25	5	formation	formation	NOUN
asir-946	25	6	in	in	ADP
asir-946	25	7	light	light	ADJ
asir-946	25	8	emitting	emit	VERB
asir-946	25	9	diode	diode	NOUN
asir-946	25	10	(	(	PUNCT
asir-946	25	11	led	lead	VERB
asir-946	25	12	)	)	PUNCT
asir-946	25	13	or	or	CCONJ
asir-946	25	14	laser	laser	NOUN
asir-946	25	15	diode	diode	NOUN
asir-946	25	16	(	(	PUNCT
asir-946	25	17	ld	ld	X
asir-946	25	18	)	)	PUNCT
asir-946	25	19	would	would	AUX
asir-946	25	20	be	be	AUX
asir-946	25	21	of	of	ADP
asir-946	25	22	practical	practical	ADJ
asir-946	25	23	interest	interest	NOUN
asir-946	25	24	.	.	PUNCT
asir-946	26	1	for	for	ADP
asir-946	26	2	the	the	DET
asir-946	26	3	led	lead	VERB
asir-946	26	4	,	,	PUNCT
asir-946	26	5	it	it	PRON
asir-946	26	6	was	be	AUX
asir-946	26	7	reported	report	VERB
asir-946	26	8	that	that	SCONJ
asir-946	26	9	the	the	DET
asir-946	26	10	v	v	ADV
asir-946	26	11	-	-	PUNCT
asir-946	26	12	shaped	shape	VERB
asir-946	26	13	pits	pit	NOUN
asir-946	26	14	were	be	AUX
asir-946	26	15	formed	form	VERB
asir-946	26	16	in	in	ADP
asir-946	26	17	ingan	ingan	ADJ
asir-946	26	18	quantum	quantum	ADJ
asir-946	26	19	wells	well	NOUN
asir-946	26	20	(	(	PUNCT
asir-946	26	21	chen	chen	PROPN
asir-946	26	22	et	et	PROPN
asir-946	26	23	al	al	PROPN
asir-946	26	24	.	.	PROPN
asir-946	26	25	,	,	PUNCT
asir-946	26	26	1998	1998	NUM
asir-946	26	27	;	;	PUNCT
asir-946	26	28	wu	wu	PROPN
asir-946	26	29	et	et	PROPN
asir-946	26	30	al	al	PROPN
asir-946	26	31	.	.	PROPN
asir-946	26	32	,	,	PUNCT
asir-946	26	33	1998	1998	NUM
asir-946	26	34	)	)	PUNCT
asir-946	26	35	.	.	PUNCT
asir-946	27	1	in	in	ADP
asir-946	27	2	this	this	DET
asir-946	27	3	paper	paper	NOUN
asir-946	27	4	,	,	PUNCT
asir-946	27	5	we	we	PRON
asir-946	27	6	study	study	VERB
asir-946	27	7	the	the	DET
asir-946	27	8	v	v	ADV
asir-946	27	9	-	-	PUNCT
asir-946	27	10	shaped	shape	VERB
asir-946	27	11	defect	defect	NOUN
asir-946	27	12	formation	formation	NOUN
asir-946	27	13	mechanism	mechanism	NOUN
asir-946	27	14	at	at	ADP
asir-946	27	15	the	the	DET
asir-946	27	16	inp	inp	PROPN
asir-946	27	17	/	/	SYM
asir-946	27	18	ingaasp	ingaasp	NOUN
asir-946	27	19	system	system	NOUN
asir-946	27	20	that	that	PRON
asir-946	27	21	is	be	AUX
asir-946	27	22	suitable	suitable	ADJ
asir-946	27	23	for	for	ADP
asir-946	27	24	optical	optical	ADJ
asir-946	27	25	communication	communication	NOUN
asir-946	27	26	applications	application	NOUN
asir-946	27	27	.	.	PUNCT
asir-946	28	1	we	we	PRON
asir-946	28	2	will	will	AUX
asir-946	28	3	reveal	reveal	VERB
asir-946	28	4	the	the	DET
asir-946	28	5	nucleation	nucleation	NOUN
asir-946	28	6	process	process	NOUN
asir-946	28	7	of	of	ADP
asir-946	28	8	the	the	DET
asir-946	28	9	inp	inp	PROPN
asir-946	28	10	defect	defect	NOUN
asir-946	28	11	in	in	ADP
asir-946	28	12	the	the	DET
asir-946	28	13	heterogeneous	heterogeneous	ADJ
asir-946	28	14	arrays	array	NOUN
asir-946	28	15	.	.	PUNCT
asir-946	29	1	we	we	PRON
asir-946	29	2	will	will	AUX
asir-946	29	3	also	also	ADV
asir-946	29	4	discuss	discuss	VERB
asir-946	29	5	the	the	DET
asir-946	29	6	defect	defect	NOUN
asir-946	29	7	growth	growth	NOUN
asir-946	29	8	mechanism	mechanism	NOUN
asir-946	29	9	of	of	ADP
asir-946	29	10	phosphorus	phosphorus	NOUN
asir-946	29	11	-	-	PUNCT
asir-946	29	12	deficient	deficient	ADJ
asir-946	29	13	inp	inp	PROPN
asir-946	29	14	compound	compound	PROPN
asir-946	29	15	induced	induce	VERB
asir-946	29	16	by	by	ADP
asir-946	29	17	the	the	DET
asir-946	29	18	heterogeneous	heterogeneous	ADJ
asir-946	29	19	nucleation	nucleation	NOUN
asir-946	29	20	.	.	PUNCT
asir-946	30	1	2	2	X
asir-946	30	2	.	.	X
asir-946	30	3	method	method	NOUN
asir-946	30	4	figure	figure	NOUN
asir-946	30	5	1	1	NUM
asir-946	30	6	shows	show	VERB
asir-946	30	7	the	the	DET
asir-946	30	8	fabrication	fabrication	NOUN
asir-946	30	9	schematic	schematic	ADJ
asir-946	30	10	of	of	ADP
asir-946	30	11	the	the	DET
asir-946	30	12	nanoscale	nanoscale	ADJ
asir-946	30	13	heterogeneous	heterogeneous	ADJ
asir-946	30	14	ingaasp	ingaasp	NOUN
asir-946	30	15	/	/	SYM
asir-946	30	16	inp	inp	PROPN
asir-946	30	17	array	array	NOUN
asir-946	30	18	.	.	PUNCT
asir-946	31	1	first	first	ADV
asir-946	31	2	,	,	PUNCT
asir-946	31	3	an	an	DET
asir-946	31	4	inp	inp	PROPN
asir-946	31	5	buffer	buffer	NOUN
asir-946	31	6	,	,	PUNCT
asir-946	31	7	an	an	DET
asir-946	31	8	ingaasp	ingaasp	NOUN
asir-946	31	9	,	,	PUNCT
asir-946	31	10	and	and	CCONJ
asir-946	31	11	an	an	DET
asir-946	31	12	inp	inp	PROPN
asir-946	31	13	cap	cap	NOUN
asir-946	31	14	layers	layer	NOUN
asir-946	31	15	were	be	AUX
asir-946	31	16	grown	grow	VERB
asir-946	31	17	by	by	ADP
asir-946	31	18	metal	metal	NOUN
asir-946	31	19	organic	organic	ADJ
asir-946	31	20	chemical	chemical	NOUN
asir-946	31	21	vapor	vapor	NOUN
asir-946	31	22	deposition	deposition	NOUN
asir-946	31	23	(	(	PUNCT
asir-946	31	24	mocvd	mocvd	NOUN
asir-946	31	25	)	)	PUNCT
asir-946	31	26	on	on	ADP
asir-946	31	27	an	an	DET
asir-946	31	28	(	(	PUNCT
asir-946	31	29	001	001	NUM
asir-946	31	30	)	)	PUNCT
asir-946	31	31	inp	inp	PROPN
asir-946	31	32	substrate	substrate	NOUN
asir-946	31	33	,	,	PUNCT
asir-946	31	34	as	as	SCONJ
asir-946	31	35	shown	show	VERB
asir-946	31	36	in	in	ADP
asir-946	31	37	figure	figure	NOUN
asir-946	31	38	1	1	NUM
asir-946	31	39	(	(	PUNCT
asir-946	31	40	a	a	NOUN
asir-946	31	41	)	)	PUNCT
asir-946	31	42	.	.	PUNCT
asir-946	32	1	the	the	DET
asir-946	32	2	inp	inp	PROPN
asir-946	32	3	cap	cap	NOUN
asir-946	32	4	was	be	AUX
asir-946	32	5	grown	grow	VERB
asir-946	32	6	to	to	PART
asir-946	32	7	protect	protect	VERB
asir-946	32	8	the	the	DET
asir-946	32	9	ingaasp	ingaasp	NOUN
asir-946	32	10	layer	layer	NOUN
asir-946	32	11	.	.	PUNCT
asir-946	33	1	next	next	ADV
asir-946	33	2	,	,	PUNCT
asir-946	33	3	the	the	DET
asir-946	33	4	photoresist	photoresist	NOUN
asir-946	33	5	(	(	PUNCT
asir-946	33	6	pr	pr	NOUN
asir-946	33	7	)	)	PUNCT
asir-946	33	8	was	be	AUX
asir-946	33	9	deposited	deposit	VERB
asir-946	33	10	and	and	CCONJ
asir-946	33	11	lithography	lithography	NOUN
asir-946	33	12	-	-	PUNCT
asir-946	33	13	exposed	expose	VERB
asir-946	33	14	to	to	PART
asir-946	33	15	form	form	VERB
asir-946	33	16	the	the	DET
asir-946	33	17	soft	soft	ADJ
asir-946	33	18	mask	mask	NOUN
asir-946	33	19	on	on	ADP
asir-946	33	20	top	top	NOUN
asir-946	33	21	of	of	ADP
asir-946	33	22	the	the	DET
asir-946	33	23	ingaasp	ingaasp	NOUN
asir-946	33	24	and	and	CCONJ
asir-946	33	25	inp	inp	PROPN
asir-946	33	26	cap	cap	NOUN
asir-946	33	27	layers	layer	NOUN
asir-946	33	28	.	.	PUNCT
asir-946	34	1	after	after	ADP
asir-946	34	2	development	development	NOUN
asir-946	34	3	,	,	PUNCT
asir-946	34	4	the	the	DET
asir-946	34	5	width	width	NOUN
asir-946	34	6	of	of	ADP
asir-946	34	7	each	each	DET
asir-946	34	8	pr	pr	NOUN
asir-946	34	9	mask	mask	NOUN
asir-946	34	10	was	be	AUX
asir-946	34	11	100	100	NUM
asir-946	34	12	nm	nm	NOUN
asir-946	34	13	with	with	ADP
asir-946	34	14	a	a	DET
asir-946	34	15	spacing	spacing	NOUN
asir-946	34	16	of	of	ADP
asir-946	34	17	100	100	NUM
asir-946	34	18	nm	nm	NOUN
asir-946	34	19	between	between	ADP
asir-946	34	20	each	each	DET
asir-946	34	21	pr	pr	NOUN
asir-946	34	22	,	,	PUNCT
asir-946	34	23	as	as	SCONJ
asir-946	34	24	shown	show	VERB
asir-946	34	25	in	in	ADP
asir-946	34	26	figure	figure	NOUN
asir-946	34	27	1	1	NUM
asir-946	34	28	(	(	PUNCT
asir-946	34	29	b	b	NOUN
asir-946	34	30	)	)	PUNCT
asir-946	34	31	.	.	PUNCT
asir-946	35	1	third	third	ADJ
asir-946	35	2	,	,	PUNCT
asir-946	35	3	reactive	reactive	ADJ
asir-946	35	4	ion	ion	NOUN
asir-946	35	5	etching	etch	VERB
asir-946	35	6	(	(	PUNCT
asir-946	35	7	rie	rie	NOUN
asir-946	35	8	)	)	PUNCT
asir-946	35	9	based	base	VERB
asir-946	35	10	on	on	ADP
asir-946	35	11	bcl3	bcl3	PROPN
asir-946	35	12	and	and	CCONJ
asir-946	35	13	ar	ar	NOUN
asir-946	35	14	gases	gas	NOUN
asir-946	35	15	was	be	AUX
asir-946	35	16	used	use	VERB
asir-946	35	17	to	to	PART
asir-946	35	18	etch	etch	VERB
asir-946	35	19	the	the	DET
asir-946	35	20	ingaasp	ingaasp	NOUN
asir-946	35	21	/	/	SYM
asir-946	35	22	inp	inp	PROPN
asir-946	35	23	to	to	PART
asir-946	35	24	form	form	VERB
asir-946	35	25	ingaasp	ingaasp	NOUN
asir-946	35	26	/	/	SYM
asir-946	35	27	inp	inp	PROPN
asir-946	35	28	nano	nano	NOUN
asir-946	35	29	-	-	PUNCT
asir-946	35	30	heterogeneous	heterogeneous	ADJ
asir-946	35	31	array	array	NOUN
asir-946	35	32	,	,	PUNCT
asir-946	35	33	as	as	SCONJ
asir-946	35	34	shown	show	VERB
asir-946	35	35	in	in	ADP
asir-946	35	36	figure	figure	NOUN
asir-946	35	37	1	1	NUM
asir-946	35	38	(	(	PUNCT
asir-946	35	39	c	c	NOUN
asir-946	35	40	)	)	PUNCT
asir-946	35	41	.	.	PUNCT
asir-946	36	1	finally	finally	ADV
asir-946	36	2	,	,	PUNCT
asir-946	36	3	the	the	DET
asir-946	36	4	inp	inp	PROPN
asir-946	36	5	regrowth	regrowth	NOUN
asir-946	36	6	layer	layer	NOUN
asir-946	36	7	was	be	AUX
asir-946	36	8	overgrown	overgrown	ADJ
asir-946	36	9	to	to	PART
asir-946	36	10	cover	cover	VERB
asir-946	36	11	the	the	DET
asir-946	36	12	ingaasp	ingaasp	NOUN
asir-946	36	13	/	/	SYM
asir-946	36	14	inp	inp	PROPN
asir-946	36	15	heterogeneous	heterogeneous	ADJ
asir-946	36	16	structure	structure	NOUN
asir-946	36	17	,	,	PUNCT
asir-946	36	18	shown	show	VERB
asir-946	36	19	in	in	ADP
asir-946	36	20	figure	figure	NOUN
asir-946	36	21	1	1	NUM
asir-946	36	22	(	(	PUNCT
asir-946	36	23	d	d	NOUN
asir-946	36	24	)	)	PUNCT
asir-946	36	25	.	.	PUNCT
asir-946	37	1	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	PROPN
asir-946	37	2	applied	apply	VERB
asir-946	37	3	science	science	NOUN
asir-946	37	4	and	and	CCONJ
asir-946	37	5	innovative	innovative	ADJ
asir-946	37	6	research	research	NOUN
asir-946	37	7	vol	vol	NOUN
asir-946	37	8	.	.	PROPN
asir-946	38	1	1	1	NUM
asir-946	38	2	,	,	PUNCT
asir-946	38	3	no	no	INTJ
asir-946	38	4	.	.	NOUN
asir-946	38	5	1	1	NUM
asir-946	38	6	,	,	PUNCT
asir-946	38	7	2017	2017	NUM
asir-946	38	8	71	71	NUM
asir-946	38	9	published	publish	VERB
asir-946	38	10	by	by	ADP
asir-946	38	11	scholink	scholink	PROPN
asir-946	38	12	inc	inc	PROPN
asir-946	38	13	.	.	PROPN
asir-946	38	14	figure	figure	NOUN
asir-946	38	15	1	1	NUM
asir-946	38	16	.	.	PUNCT
asir-946	38	17	fabrication	fabrication	NOUN
asir-946	38	18	schematic	schematic	ADJ
asir-946	38	19	of	of	ADP
asir-946	38	20	nanoscale	nanoscale	ADJ
asir-946	38	21	heterogeneous	heterogeneous	ADJ
asir-946	38	22	ingaasp	ingaasp	NOUN
asir-946	38	23	/	/	SYM
asir-946	38	24	inp	inp	PROPN
asir-946	38	25	array	array	NOUN
asir-946	38	26	.	.	PUNCT
asir-946	39	1	(	(	PUNCT
asir-946	39	2	a	a	X
asir-946	39	3	)	)	PUNCT
asir-946	39	4	inp	inp	PROPN
asir-946	39	5	buffer	buffer	NOUN
asir-946	39	6	/	/	SYM
asir-946	39	7	ingaasp	ingaasp	NOUN
asir-946	39	8	/	/	SYM
asir-946	39	9	inp	inp	PROPN
asir-946	39	10	cap	cap	NOUN
asir-946	39	11	layers	layer	NOUN
asir-946	39	12	were	be	AUX
asir-946	39	13	grown	grow	VERB
asir-946	39	14	by	by	ADP
asir-946	39	15	mocvd	mocvd	NOUN
asir-946	39	16	,	,	PUNCT
asir-946	39	17	(	(	PUNCT
asir-946	39	18	b	b	X
asir-946	39	19	)	)	PUNCT
asir-946	39	20	photoresist	photoresist	NOUN
asir-946	39	21	pattern	pattern	NOUN
asir-946	39	22	was	be	AUX
asir-946	39	23	formed	form	VERB
asir-946	39	24	,	,	PUNCT
asir-946	39	25	(	(	PUNCT
asir-946	39	26	c	c	X
asir-946	39	27	)	)	PUNCT
asir-946	39	28	rie	rie	NOUN
asir-946	39	29	was	be	AUX
asir-946	39	30	used	use	VERB
asir-946	39	31	to	to	PART
asir-946	39	32	form	form	VERB
asir-946	39	33	the	the	DET
asir-946	39	34	ingaasp	ingaasp	NOUN
asir-946	39	35	/	/	SYM
asir-946	39	36	inp	inp	PROPN
asir-946	39	37	nano	nano	NOUN
asir-946	39	38	-	-	PUNCT
asir-946	39	39	heterogeneous	heterogeneous	ADJ
asir-946	39	40	array	array	NOUN
asir-946	39	41	,	,	PUNCT
asir-946	39	42	and	and	CCONJ
asir-946	39	43	(	(	PUNCT
asir-946	39	44	d	d	X
asir-946	39	45	)	)	PUNCT
asir-946	39	46	inp	inp	PROPN
asir-946	39	47	regrowth	regrowth	NOUN
asir-946	39	48	layer	layer	NOUN
asir-946	39	49	was	be	AUX
asir-946	39	50	overgrown	overgrown	ADJ
asir-946	39	51	to	to	PART
asir-946	39	52	study	study	VERB
asir-946	39	53	the	the	DET
asir-946	39	54	nanoscale	nanoscale	NOUN
asir-946	39	55	defect	defect	NOUN
asir-946	39	56	formation	formation	NOUN
asir-946	39	57	,	,	PUNCT
asir-946	39	58	cross	cross	ADJ
asir-946	39	59	-	-	ADJ
asir-946	39	60	sectional	sectional	ADJ
asir-946	39	61	samples	sample	NOUN
asir-946	39	62	were	be	AUX
asir-946	39	63	prepared	prepare	VERB
asir-946	39	64	in	in	ADP
asir-946	39	65	a	a	DET
asir-946	39	66	fei	fei	PROPN
asir-946	39	67	talos	talos	PROPN
asir-946	39	68	f200x	f200x	PROPN
asir-946	39	69	focused	focus	VERB
asir-946	39	70	ion	ion	NOUN
asir-946	39	71	beam	beam	NOUN
asir-946	39	72	(	(	PUNCT
asir-946	39	73	fib	fib	ADJ
asir-946	39	74	)	)	PUNCT
asir-946	39	75	system	system	NOUN
asir-946	39	76	using	use	VERB
asir-946	39	77	the	the	DET
asir-946	39	78	lift	lift	NOUN
asir-946	39	79	-	-	PUNCT
asir-946	39	80	out	out	ADP
asir-946	39	81	technique	technique	NOUN
asir-946	39	82	(	(	PUNCT
asir-946	39	83	giannuzzi	giannuzzi	NOUN
asir-946	39	84	et	et	NOUN
asir-946	39	85	al	al	PROPN
asir-946	39	86	.	.	PROPN
asir-946	39	87	,	,	PUNCT
asir-946	39	88	2010	2010	NUM
asir-946	39	89	)	)	PUNCT
asir-946	39	90	.	.	PUNCT
asir-946	40	1	the	the	DET
asir-946	40	2	fib	fib	NOUN
asir-946	40	3	samples	sample	NOUN
asir-946	40	4	were	be	AUX
asir-946	40	5	examined	examine	VERB
asir-946	40	6	by	by	ADP
asir-946	40	7	high	high	ADJ
asir-946	40	8	-	-	PUNCT
asir-946	40	9	resolution	resolution	NOUN
asir-946	40	10	transmission	transmission	NOUN
asir-946	40	11	electron	electron	NOUN
asir-946	40	12	microscopy	microscopy	NOUN
asir-946	40	13	(	(	PUNCT
asir-946	40	14	tem	tem	PROPN
asir-946	40	15	)	)	PUNCT
asir-946	40	16	.	.	PUNCT
asir-946	41	1	the	the	DET
asir-946	41	2	tem	tem	PROPN
asir-946	41	3	accelerated	accelerate	VERB
asir-946	41	4	at	at	ADP
asir-946	41	5	200kv	200kv	NOUN
asir-946	41	6	allowed	allow	VERB
asir-946	41	7	rapid	rapid	ADJ
asir-946	41	8	inspection	inspection	NOUN
asir-946	41	9	of	of	ADP
asir-946	41	10	small	small	ADJ
asir-946	41	11	features	feature	NOUN
asir-946	41	12	.	.	PUNCT
asir-946	42	1	the	the	DET
asir-946	42	2	image	image	NOUN
asir-946	42	3	was	be	AUX
asir-946	42	4	based	base	VERB
asir-946	42	5	on	on	ADP
asir-946	42	6	secondary	secondary	ADJ
asir-946	42	7	electron	electron	NOUN
asir-946	42	8	signal	signal	NOUN
asir-946	42	9	,	,	PUNCT
asir-946	42	10	and	and	CCONJ
asir-946	42	11	the	the	DET
asir-946	42	12	chemical	chemical	NOUN
asir-946	42	13	element	element	NOUN
asir-946	42	14	analysis	analysis	NOUN
asir-946	42	15	was	be	AUX
asir-946	42	16	done	do	VERB
asir-946	42	17	by	by	ADP
asir-946	42	18	energy	energy	NOUN
asir-946	42	19	dispersive	dispersive	ADJ
asir-946	42	20	spectroscopy	spectroscopy	NOUN
asir-946	42	21	(	(	PUNCT
asir-946	42	22	eds	ed	NOUN
asir-946	42	23	)	)	PUNCT
asir-946	42	24	(	(	PUNCT
asir-946	42	25	huang	huang	PROPN
asir-946	42	26	et	et	PROPN
asir-946	42	27	al	al	PROPN
asir-946	42	28	.	.	PROPN
asir-946	42	29	,	,	PUNCT
asir-946	42	30	2002	2002	NUM
asir-946	42	31	;	;	PUNCT
asir-946	43	1	giannuzzi	giannuzzi	NOUN
asir-946	43	2	et	et	PROPN
asir-946	43	3	al	al	PROPN
asir-946	43	4	.	.	PROPN
asir-946	43	5	,	,	PUNCT
asir-946	43	6	1997	1997	NUM
asir-946	43	7	)	)	PUNCT
asir-946	43	8	.	.	PUNCT
asir-946	44	1	3	3	X
asir-946	44	2	.	.	NOUN
asir-946	44	3	result	result	PROPN
asir-946	44	4	figure	figure	NOUN
asir-946	44	5	2	2	NUM
asir-946	44	6	shows	show	VERB
asir-946	44	7	the	the	DET
asir-946	44	8	cross	cross	ADJ
asir-946	44	9	-	-	ADJ
asir-946	44	10	sectional	sectional	ADJ
asir-946	44	11	tem	tem	PROPN
asir-946	44	12	bright	bright	ADJ
asir-946	44	13	-	-	PUNCT
asir-946	44	14	field	field	NOUN
asir-946	44	15	image	image	NOUN
asir-946	44	16	of	of	ADP
asir-946	44	17	the	the	DET
asir-946	44	18	nano	nano	NOUN
asir-946	44	19	-	-	PUNCT
asir-946	44	20	heterogeneous	heterogeneous	ADJ
asir-946	44	21	ingaasp	ingaasp	NOUN
asir-946	44	22	/	/	SYM
asir-946	44	23	inp	inp	PROPN
asir-946	44	24	array	array	NOUN
asir-946	44	25	.	.	PUNCT
asir-946	45	1	the	the	DET
asir-946	45	2	ingaasp	ingaasp	NOUN
asir-946	45	3	array	array	NOUN
asir-946	45	4	appeared	appear	VERB
asir-946	45	5	dark	dark	ADJ
asir-946	45	6	in	in	ADP
asir-946	45	7	the	the	DET
asir-946	45	8	tem	tem	NOUN
asir-946	45	9	,	,	PUNCT
asir-946	45	10	while	while	SCONJ
asir-946	45	11	the	the	DET
asir-946	45	12	inp	inp	PROPN
asir-946	45	13	buffer	buffer	NOUN
asir-946	45	14	and	and	CCONJ
asir-946	45	15	inp	inp	PROPN
asir-946	45	16	regrowth	regrowth	NOUN
asir-946	45	17	appeared	appear	VERB
asir-946	45	18	white	white	ADJ
asir-946	45	19	.	.	PUNCT
asir-946	46	1	it	it	PRON
asir-946	46	2	was	be	AUX
asir-946	46	3	noted	note	VERB
asir-946	46	4	that	that	SCONJ
asir-946	46	5	a	a	DET
asir-946	46	6	defect	defect	NOUN
asir-946	46	7	of	of	ADP
asir-946	46	8	inverted	inverted	ADJ
asir-946	46	9	pyramid	pyramid	NOUN
asir-946	46	10	-	-	PUNCT
asir-946	46	11	shape	shape	NOUN
asir-946	46	12	(	(	PUNCT
asir-946	46	13	appeared	appear	VERB
asir-946	46	14	light	light	ADJ
asir-946	46	15	dark	dark	ADJ
asir-946	46	16	in	in	ADP
asir-946	46	17	the	the	DET
asir-946	46	18	tem	tem	PROPN
asir-946	46	19	image	image	NOUN
asir-946	46	20	)	)	PUNCT
asir-946	46	21	was	be	AUX
asir-946	46	22	formed	form	VERB
asir-946	46	23	at	at	ADP
asir-946	46	24	the	the	DET
asir-946	46	25	groove	groove	NOUN
asir-946	46	26	of	of	ADP
asir-946	46	27	the	the	DET
asir-946	46	28	inp	inp	PROPN
asir-946	46	29	between	between	ADP
asir-946	46	30	the	the	DET
asir-946	46	31	heterogeneous	heterogeneous	ADJ
asir-946	46	32	ingaasp	ingaasp	NOUN
asir-946	46	33	/	/	SYM
asir-946	46	34	inp	inp	PROPN
asir-946	46	35	arrays	array	VERB
asir-946	46	36	.	.	PUNCT
asir-946	47	1	such	such	ADJ
asir-946	47	2	pyramid	pyramid	NOUN
asir-946	47	3	-	-	PUNCT
asir-946	47	4	shaped	shape	VERB
asir-946	47	5	defect	defect	NOUN
asir-946	47	6	was	be	AUX
asir-946	47	7	previously	previously	ADV
asir-946	47	8	reported	report	VERB
asir-946	47	9	in	in	ADP
asir-946	47	10	ingan	ingan	NOUN
asir-946	47	11	material	material	NOUN
asir-946	47	12	system	system	NOUN
asir-946	47	13	,	,	PUNCT
asir-946	47	14	called	call	VERB
asir-946	47	15	v	v	NOUN
asir-946	47	16	-	-	PUNCT
asir-946	47	17	pits	pit	NOUN
asir-946	47	18	(	(	PUNCT
asir-946	47	19	chen	chen	PROPN
asir-946	47	20	et	et	PROPN
asir-946	47	21	al	al	PROPN
asir-946	47	22	.	.	PROPN
asir-946	47	23	,	,	PUNCT
asir-946	47	24	1998	1998	NUM
asir-946	47	25	;	;	PUNCT
asir-946	47	26	kim	kim	PROPN
asir-946	47	27	et	et	PROPN
asir-946	47	28	al	al	PROPN
asir-946	47	29	,	,	PUNCT
asir-946	47	30	1998	1998	NUM
asir-946	47	31	)	)	PUNCT
asir-946	47	32	or	or	CCONJ
asir-946	47	33	v	v	NOUN
asir-946	47	34	-	-	PUNCT
asir-946	47	35	defects	defect	NOUN
asir-946	47	36	(	(	PUNCT
asir-946	47	37	wu	wu	PROPN
asir-946	47	38	et	et	PROPN
asir-946	47	39	al	al	PROPN
asir-946	47	40	.	.	PROPN
asir-946	47	41	,	,	PUNCT
asir-946	47	42	1998	1998	NUM
asir-946	47	43	;	;	PUNCT
asir-946	48	1	sharma	sharma	PROPN
asir-946	48	2	et	et	PROPN
asir-946	48	3	al	al	PROPN
asir-946	48	4	.	.	PROPN
asir-946	48	5	,	,	PUNCT
asir-946	48	6	2000	2000	NUM
asir-946	48	7	)	)	PUNCT
asir-946	48	8	.	.	PUNCT
asir-946	49	1	the	the	DET
asir-946	49	2	v	v	ADV
asir-946	49	3	-	-	PUNCT
asir-946	49	4	shaped	shape	VERB
asir-946	49	5	defect	defect	NOUN
asir-946	49	6	expanded	expand	VERB
asir-946	49	7	in	in	ADP
asir-946	49	8	the	the	DET
asir-946	49	9	top	top	ADJ
asir-946	49	10	inp	inp	PROPN
asir-946	49	11	regrowth	regrowth	NOUN
asir-946	49	12	layer	layer	NOUN
asir-946	49	13	.	.	PUNCT
asir-946	50	1	another	another	DET
asir-946	50	2	interesting	interesting	ADJ
asir-946	50	3	finding	finding	NOUN
asir-946	50	4	was	be	AUX
asir-946	50	5	the	the	DET
asir-946	50	6	formation	formation	NOUN
asir-946	50	7	of	of	ADP
asir-946	50	8	nano	nano	NOUN
asir-946	50	9	-	-	NOUN
asir-946	50	10	precipitates	precipitate	NOUN
asir-946	50	11	,	,	PUNCT
asir-946	50	12	in	in	ADP
asir-946	50	13	adjacent	adjacent	ADJ
asir-946	50	14	to	to	ADP
asir-946	50	15	the	the	DET
asir-946	50	16	inp	inp	PROPN
asir-946	50	17	cap	cap	NOUN
asir-946	50	18	.	.	PUNCT
asir-946	51	1	the	the	DET
asir-946	51	2	size	size	NOUN
asir-946	51	3	of	of	ADP
asir-946	51	4	nano	nano	NOUN
asir-946	51	5	-	-	PUNCT
asir-946	51	6	precipitates	precipitate	NOUN
asir-946	51	7	ranged	range	VERB
asir-946	51	8	from	from	ADP
asir-946	51	9	20	20	NUM
asir-946	51	10	nm	nm	NOUN
asir-946	51	11	to	to	ADP
asir-946	51	12	30	30	NUM
asir-946	51	13	nm	nm	NOUN
asir-946	51	14	.	.	PUNCT
asir-946	52	1	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	PROPN
asir-946	52	2	applied	apply	VERB
asir-946	52	3	science	science	NOUN
asir-946	52	4	and	and	CCONJ
asir-946	52	5	innovative	innovative	ADJ
asir-946	52	6	research	research	NOUN
asir-946	52	7	vol	vol	NOUN
asir-946	52	8	.	.	PROPN
asir-946	53	1	1	1	NUM
asir-946	53	2	,	,	PUNCT
asir-946	53	3	no	no	INTJ
asir-946	53	4	.	.	NOUN
asir-946	53	5	1	1	NUM
asir-946	53	6	,	,	PUNCT
asir-946	53	7	2017	2017	NUM
asir-946	53	8	72	72	NUM
asir-946	53	9	published	publish	VERB
asir-946	53	10	by	by	ADP
asir-946	53	11	scholink	scholink	PROPN
asir-946	53	12	inc	inc	PROPN
asir-946	53	13	.	.	PROPN
asir-946	53	14	figure	figure	NOUN
asir-946	53	15	2	2	NUM
asir-946	53	16	.	.	PUNCT
asir-946	54	1	the	the	DET
asir-946	54	2	morphology	morphology	NOUN
asir-946	54	3	of	of	ADP
asir-946	54	4	v	v	NOUN
asir-946	54	5	-	-	NOUN
asir-946	54	6	defect	defect	NOUN
asir-946	54	7	near	near	ADP
asir-946	54	8	the	the	DET
asir-946	54	9	heterogeneous	heterogeneous	ADJ
asir-946	54	10	ingaasp	ingaasp	NOUN
asir-946	54	11	/	/	SYM
asir-946	54	12	inp	inp	PROPN
asir-946	54	13	array	array	NOUN
asir-946	54	14	figure	figure	VERB
asir-946	54	15	3	3	NUM
asir-946	54	16	.	.	PUNCT
asir-946	55	1	the	the	DET
asir-946	55	2	morphology	morphology	NOUN
asir-946	55	3	of	of	ADP
asir-946	55	4	v	v	NOUN
asir-946	55	5	-	-	PUNCT
asir-946	55	6	defect	defect	NOUN
asir-946	55	7	showing	show	VERB
asir-946	55	8	the	the	DET
asir-946	55	9	defect	defect	ADJ
asir-946	55	10	growth	growth	NOUN
asir-946	55	11	in	in	ADP
asir-946	55	12	the	the	DET
asir-946	55	13	inp	inp	PROPN
asir-946	55	14	regrowth	regrowth	NOUN
asir-946	55	15	layer	layer	NOUN
asir-946	55	16	.	.	PUNCT
asir-946	56	1	the	the	DET
asir-946	56	2	tip	tip	NOUN
asir-946	56	3	of	of	ADP
asir-946	56	4	the	the	DET
asir-946	56	5	v	v	NOUN
asir-946	56	6	-	-	PUNCT
asir-946	56	7	defect	defect	NOUN
asir-946	56	8	was	be	AUX
asir-946	56	9	located	locate	VERB
asir-946	56	10	near	near	ADP
asir-946	56	11	the	the	DET
asir-946	56	12	trench	trench	NOUN
asir-946	56	13	between	between	ADP
asir-946	56	14	the	the	DET
asir-946	56	15	ingaasp	ingaasp	NOUN
asir-946	56	16	/	/	SYM
asir-946	56	17	inp	inp	PROPN
asir-946	56	18	heterogeneous	heterogeneous	ADJ
asir-946	56	19	arrays	array	NOUN
asir-946	56	20	figure	figure	VERB
asir-946	56	21	3	3	NUM
asir-946	56	22	shows	show	VERB
asir-946	56	23	the	the	DET
asir-946	56	24	cross	cross	ADJ
asir-946	56	25	-	-	ADJ
asir-946	56	26	sectional	sectional	ADJ
asir-946	56	27	tem	tem	PROPN
asir-946	56	28	image	image	NOUN
asir-946	56	29	of	of	ADP
asir-946	56	30	the	the	DET
asir-946	56	31	entire	entire	ADJ
asir-946	56	32	v	v	ADV
asir-946	56	33	-	-	PUNCT
asir-946	56	34	shaped	shape	VERB
asir-946	56	35	defect	defect	NOUN
asir-946	56	36	that	that	PRON
asir-946	56	37	originated	originate	VERB
asir-946	56	38	from	from	ADP
asir-946	56	39	the	the	DET
asir-946	56	40	groove	groove	NOUN
asir-946	56	41	region	region	NOUN
asir-946	56	42	and	and	CCONJ
asir-946	56	43	continued	continue	VERB
asir-946	56	44	to	to	PART
asir-946	56	45	propagate	propagate	VERB
asir-946	56	46	into	into	ADP
asir-946	56	47	the	the	DET
asir-946	56	48	inp	inp	PROPN
asir-946	56	49	regrowth	regrowth	NOUN
asir-946	56	50	layer	layer	NOUN
asir-946	56	51	.	.	PUNCT
asir-946	57	1	the	the	DET
asir-946	57	2	v	v	ADV
asir-946	57	3	-	-	PUNCT
asir-946	57	4	shaped	shape	VERB
asir-946	57	5	defect	defect	NOUN
asir-946	57	6	grew	grow	VERB
asir-946	57	7	in	in	ADP
asir-946	57	8	size	size	NOUN
asir-946	57	9	as	as	SCONJ
asir-946	57	10	it	it	PRON
asir-946	57	11	approached	approach	VERB
asir-946	57	12	the	the	DET
asir-946	57	13	top	top	ADJ
asir-946	57	14	surface	surface	NOUN
asir-946	57	15	.	.	PUNCT
asir-946	58	1	the	the	DET
asir-946	58	2	sidewall	sidewall	NOUN
asir-946	58	3	boundaries	boundary	NOUN
asir-946	58	4	were	be	AUX
asir-946	58	5	likely	likely	ADV
asir-946	58	6	following	follow	VERB
asir-946	58	7	the	the	DET
asir-946	58	8	crystallographic	crystallographic	ADJ
asir-946	58	9	planes	plane	NOUN
asir-946	58	10	(	(	PUNCT
asir-946	58	11	chen	chen	PROPN
asir-946	58	12	et	et	PROPN
asir-946	58	13	al	al	PROPN
asir-946	58	14	.	.	PROPN
asir-946	58	15	,	,	PUNCT
asir-946	58	16	1998	1998	NUM
asir-946	58	17	;	;	PUNCT
asir-946	58	18	wu	wu	PROPN
asir-946	58	19	et	et	PROPN
asir-946	58	20	al	al	PROPN
asir-946	58	21	.	.	PROPN
asir-946	58	22	,	,	PUNCT
asir-946	58	23	1998	1998	NUM
asir-946	58	24	)	)	PUNCT
asir-946	58	25	.	.	PUNCT
asir-946	59	1	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	PROPN
asir-946	59	2	applied	apply	VERB
asir-946	59	3	science	science	NOUN
asir-946	59	4	and	and	CCONJ
asir-946	59	5	innovative	innovative	ADJ
asir-946	59	6	research	research	NOUN
asir-946	59	7	vol	vol	NOUN
asir-946	59	8	.	.	PROPN
asir-946	60	1	1	1	NUM
asir-946	60	2	,	,	PUNCT
asir-946	60	3	no	no	INTJ
asir-946	60	4	.	.	NOUN
asir-946	60	5	1	1	NUM
asir-946	60	6	,	,	PUNCT
asir-946	60	7	2017	2017	NUM
asir-946	60	8	73	73	NUM
asir-946	60	9	published	publish	VERB
asir-946	60	10	by	by	ADP
asir-946	60	11	scholink	scholink	PROPN
asir-946	60	12	inc	inc	PROPN
asir-946	60	13	.	.	PROPN
asir-946	60	14	figure	figure	NOUN
asir-946	60	15	4	4	NUM
asir-946	60	16	.	.	PUNCT
asir-946	61	1	eds	ed	NOUN
asir-946	61	2	linescan	linescan	VERB
asir-946	61	3	at	at	ADP
asir-946	61	4	the	the	DET
asir-946	61	5	bottom	bottom	NOUN
asir-946	61	6	of	of	ADP
asir-946	61	7	v	v	NOUN
asir-946	61	8	-	-	PUNCT
asir-946	61	9	defect	defect	NOUN
asir-946	61	10	showing	show	VERB
asir-946	61	11	the	the	DET
asir-946	61	12	inp	inp	PROPN
asir-946	61	13	defect	defect	VERB
asir-946	61	14	above	above	ADP
asir-946	61	15	and	and	CCONJ
asir-946	61	16	near	near	ADP
asir-946	61	17	the	the	DET
asir-946	61	18	nano	nano	NOUN
asir-946	61	19	-	-	PUNCT
asir-946	61	20	precipitate	precipitate	NOUN
asir-946	61	21	was	be	AUX
asir-946	61	22	phosphorus	phosphorus	NOUN
asir-946	61	23	-	-	PUNCT
asir-946	61	24	deficient	deficient	ADJ
asir-946	61	25	and	and	CCONJ
asir-946	61	26	indium	indium	NOUN
asir-946	61	27	-	-	PUNCT
asir-946	61	28	rich	rich	ADJ
asir-946	61	29	(	(	PUNCT
asir-946	61	30	in1+xp1	in1+xp1	PROPN
asir-946	61	31	-	-	PUNCT
asir-946	61	32	x	x	X
asir-946	61	33	)	)	PUNCT
asir-946	61	34	in	in	ADP
asir-946	61	35	order	order	NOUN
asir-946	61	36	to	to	PART
asir-946	61	37	understand	understand	VERB
asir-946	61	38	the	the	DET
asir-946	61	39	formation	formation	NOUN
asir-946	61	40	mechanism	mechanism	NOUN
asir-946	61	41	of	of	ADP
asir-946	61	42	the	the	DET
asir-946	61	43	v	v	ADV
asir-946	61	44	-	-	PUNCT
asir-946	61	45	shaped	shape	VERB
asir-946	61	46	defect	defect	NOUN
asir-946	61	47	,	,	PUNCT
asir-946	61	48	we	we	PRON
asir-946	61	49	conducted	conduct	VERB
asir-946	61	50	eds	ed	NOUN
asir-946	61	51	linescans	linescan	NOUN
asir-946	61	52	across	across	ADP
asir-946	61	53	different	different	ADJ
asir-946	61	54	parts	part	NOUN
asir-946	61	55	of	of	ADP
asir-946	61	56	the	the	DET
asir-946	61	57	v	v	NOUN
asir-946	61	58	-	-	NOUN
asir-946	61	59	defect	defect	NOUN
asir-946	61	60	to	to	PART
asir-946	61	61	study	study	VERB
asir-946	61	62	the	the	DET
asir-946	61	63	chemical	chemical	NOUN
asir-946	61	64	composition	composition	NOUN
asir-946	61	65	and	and	CCONJ
asir-946	61	66	stoichiometry	stoichiometry	NOUN
asir-946	61	67	.	.	PUNCT
asir-946	62	1	figure	figure	VERB
asir-946	62	2	4	4	NUM
asir-946	62	3	shows	show	VERB
asir-946	62	4	the	the	DET
asir-946	62	5	eds	ed	NOUN
asir-946	62	6	linescan	linescan	ADJ
asir-946	62	7	near	near	ADP
asir-946	62	8	the	the	DET
asir-946	62	9	bottom	bottom	NOUN
asir-946	62	10	of	of	ADP
asir-946	62	11	the	the	DET
asir-946	62	12	v	v	NOUN
asir-946	62	13	-	-	NOUN
asir-946	62	14	defect	defect	NOUN
asir-946	62	15	.	.	PUNCT
asir-946	63	1	the	the	DET
asir-946	63	2	linescan	linescan	NOUN
asir-946	63	3	started	start	VERB
asir-946	63	4	from	from	ADP
asir-946	63	5	the	the	DET
asir-946	63	6	top	top	NOUN
asir-946	63	7	to	to	ADP
asir-946	63	8	the	the	DET
asir-946	63	9	bottom	bottom	NOUN
asir-946	63	10	across	across	ADP
asir-946	63	11	the	the	DET
asir-946	63	12	depth	depth	NOUN
asir-946	63	13	of	of	ADP
asir-946	63	14	150	150	NUM
asir-946	63	15	nm	nm	NOUN
asir-946	63	16	.	.	PUNCT
asir-946	64	1	the	the	DET
asir-946	64	2	top	top	ADJ
asir-946	64	3	layer	layer	NOUN
asir-946	64	4	of	of	ADP
asir-946	64	5	about	about	ADV
asir-946	64	6	38	38	NUM
asir-946	64	7	nm	nm	NOUN
asir-946	64	8	marked	mark	VERB
asir-946	64	9	the	the	DET
asir-946	64	10	region	region	NOUN
asir-946	64	11	above	above	ADP
asir-946	64	12	the	the	DET
asir-946	64	13	nano	nano	NOUN
asir-946	64	14	-	-	PUNCT
asir-946	64	15	precipitate	precipitate	NOUN
asir-946	64	16	.	.	PUNCT
asir-946	65	1	the	the	DET
asir-946	65	2	eds	ed	NOUN
asir-946	65	3	linescan	linescan	AUX
asir-946	65	4	indicated	indicate	VERB
asir-946	65	5	that	that	SCONJ
asir-946	65	6	the	the	DET
asir-946	65	7	region	region	NOUN
asir-946	65	8	above	above	ADP
asir-946	65	9	the	the	DET
asir-946	65	10	nano	nano	NOUN
asir-946	65	11	-	-	PUNCT
asir-946	65	12	precipitate	precipitate	NOUN
asir-946	65	13	was	be	AUX
asir-946	65	14	phosphorus	phosphorus	NOUN
asir-946	65	15	-	-	PUNCT
asir-946	65	16	deficient	deficient	ADJ
asir-946	65	17	and	and	CCONJ
asir-946	65	18	indium	indium	NOUN
asir-946	65	19	-	-	PUNCT
asir-946	65	20	rich	rich	ADJ
asir-946	65	21	(	(	PUNCT
asir-946	65	22	in1+xp1	in1+xp1	PROPN
asir-946	65	23	-	-	PUNCT
asir-946	65	24	x	x	NOUN
asir-946	65	25	)	)	PUNCT
asir-946	65	26	.	.	PUNCT
asir-946	66	1	the	the	DET
asir-946	66	2	phosphorus	phosphorus	NOUN
asir-946	66	3	-	-	PUNCT
asir-946	66	4	deficient	deficient	ADJ
asir-946	66	5	phase	phase	NOUN
asir-946	66	6	further	far	ADV
asir-946	66	7	extended	extend	VERB
asir-946	66	8	into	into	ADP
asir-946	66	9	the	the	DET
asir-946	66	10	nano	nano	NOUN
asir-946	66	11	-	-	PUNCT
asir-946	66	12	precipitate	precipitate	NOUN
asir-946	66	13	.	.	PUNCT
asir-946	67	1	the	the	DET
asir-946	67	2	non	non	ADJ
asir-946	67	3	-	-	ADJ
asir-946	67	4	stoichiometric	stoichiometric	ADJ
asir-946	67	5	compound	compound	NOUN
asir-946	67	6	was	be	AUX
asir-946	67	7	likely	likely	ADV
asir-946	67	8	related	relate	VERB
asir-946	67	9	to	to	ADP
asir-946	67	10	the	the	DET
asir-946	67	11	antisite	antisite	ADJ
asir-946	67	12	defect	defect	NOUN
asir-946	67	13	mechanism	mechanism	NOUN
asir-946	67	14	(	(	PUNCT
asir-946	67	15	mattila	mattila	NOUN
asir-946	67	16	&	&	CCONJ
asir-946	67	17	nieminen	nieminen	PROPN
asir-946	67	18	,	,	PUNCT
asir-946	67	19	1995	1995	NUM
asir-946	67	20	;	;	PUNCT
asir-946	67	21	seitsonen	seitsonen	PROPN
asir-946	67	22	et	et	PROPN
asir-946	67	23	al	al	PROPN
asir-946	67	24	.	.	PROPN
asir-946	67	25	,	,	PUNCT
asir-946	67	26	1994	1994	NUM
asir-946	67	27	)	)	PUNCT
asir-946	67	28	.	.	PUNCT
asir-946	68	1	another	another	DET
asir-946	68	2	intriguing	intriguing	ADJ
asir-946	68	3	observation	observation	NOUN
asir-946	68	4	was	be	AUX
asir-946	68	5	the	the	DET
asir-946	68	6	compositional	compositional	ADJ
asir-946	68	7	gradient	gradient	NOUN
asir-946	68	8	in	in	ADP
asir-946	68	9	the	the	DET
asir-946	68	10	non	non	NOUN
asir-946	68	11	-	-	NOUN
asir-946	68	12	stoichiometry	stoichiometry	NOUN
asir-946	68	13	between	between	ADP
asir-946	68	14	the	the	DET
asir-946	68	15	in	in	NOUN
asir-946	68	16	and	and	CCONJ
asir-946	68	17	p.	p.	NOUN
asir-946	68	18	as	as	SCONJ
asir-946	68	19	the	the	DET
asir-946	68	20	linescan	linescan	NOUN
asir-946	68	21	moved	move	VERB
asir-946	68	22	deeper	deeply	ADV
asir-946	68	23	from	from	ADP
asir-946	68	24	the	the	DET
asir-946	68	25	surface	surface	NOUN
asir-946	68	26	,	,	PUNCT
asir-946	68	27	the	the	DET
asir-946	68	28	ratio	ratio	NOUN
asir-946	68	29	of	of	ADP
asir-946	68	30	in	in	ADP
asir-946	68	31	to	to	ADP
asir-946	68	32	p	p	NOUN
asir-946	68	33	was	be	AUX
asir-946	68	34	decreasing	decrease	VERB
asir-946	68	35	.	.	PUNCT
asir-946	69	1	below	below	ADP
asir-946	69	2	the	the	DET
asir-946	69	3	nano	nano	NOUN
asir-946	69	4	-	-	PUNCT
asir-946	69	5	precipitate	precipitate	NOUN
asir-946	69	6	,	,	PUNCT
asir-946	69	7	the	the	DET
asir-946	69	8	ratio	ratio	NOUN
asir-946	69	9	of	of	ADP
asir-946	69	10	in	in	ADP
asir-946	69	11	to	to	ADP
asir-946	69	12	p	p	NOUN
asir-946	69	13	approached	approach	VERB
asir-946	69	14	to	to	ADP
asir-946	69	15	1	1	NUM
asir-946	69	16	,	,	PUNCT
asir-946	69	17	the	the	DET
asir-946	69	18	same	same	ADJ
asir-946	69	19	stoichiometric	stoichiometric	NOUN
asir-946	69	20	compound	compound	NOUN
asir-946	69	21	as	as	ADP
asir-946	69	22	the	the	DET
asir-946	69	23	inp	inp	PROPN
asir-946	69	24	buffer	buffer	NOUN
asir-946	69	25	and	and	CCONJ
asir-946	69	26	cap	cap	NOUN
asir-946	69	27	layers	layer	NOUN
asir-946	69	28	.	.	PUNCT
asir-946	70	1	figure	figure	NOUN
asir-946	70	2	5	5	NUM
asir-946	70	3	shows	show	VERB
asir-946	70	4	the	the	DET
asir-946	70	5	eds	ed	NOUN
asir-946	70	6	linescan	linescan	ADJ
asir-946	70	7	at	at	ADP
asir-946	70	8	the	the	DET
asir-946	70	9	upper	upper	ADJ
asir-946	70	10	portion	portion	NOUN
asir-946	70	11	of	of	ADP
asir-946	70	12	v	v	NOUN
asir-946	70	13	-	-	NOUN
asir-946	70	14	defect	defect	NOUN
asir-946	70	15	after	after	ADP
asir-946	70	16	the	the	DET
asir-946	70	17	growth	growth	NOUN
asir-946	70	18	process	process	NOUN
asir-946	70	19	.	.	PUNCT
asir-946	71	1	near	near	ADP
asir-946	71	2	the	the	DET
asir-946	71	3	top	top	NOUN
asir-946	71	4	of	of	ADP
asir-946	71	5	the	the	DET
asir-946	71	6	v	v	NOUN
asir-946	71	7	-	-	NOUN
asir-946	71	8	defect	defect	NOUN
asir-946	71	9	,	,	PUNCT
asir-946	71	10	the	the	DET
asir-946	71	11	non	non	ADJ
asir-946	71	12	-	-	ADJ
asir-946	71	13	stoichiometry	stoichiometry	NOUN
asir-946	71	14	was	be	AUX
asir-946	71	15	most	most	ADV
asir-946	71	16	pronounced	pronounce	VERB
asir-946	71	17	,	,	PUNCT
asir-946	71	18	and	and	CCONJ
asir-946	71	19	the	the	DET
asir-946	71	20	eds	ed	NOUN
asir-946	71	21	indicated	indicate	VERB
asir-946	71	22	that	that	SCONJ
asir-946	71	23	the	the	DET
asir-946	71	24	compound	compound	NOUN
asir-946	71	25	was	be	AUX
asir-946	71	26	in0.6p0.4	in0.6p0.4	X
asir-946	71	27	.	.	PUNCT
asir-946	72	1	as	as	SCONJ
asir-946	72	2	the	the	DET
asir-946	72	3	linescan	linescan	NOUN
asir-946	72	4	moved	move	VERB
asir-946	72	5	deeper	deeply	ADV
asir-946	72	6	from	from	ADP
asir-946	72	7	the	the	DET
asir-946	72	8	surface	surface	NOUN
asir-946	72	9	,	,	PUNCT
asir-946	72	10	the	the	DET
asir-946	72	11	ratio	ratio	NOUN
asir-946	72	12	of	of	ADP
asir-946	72	13	in	in	ADP
asir-946	72	14	to	to	ADP
asir-946	72	15	p	p	NOUN
asir-946	72	16	was	be	AUX
asir-946	72	17	decreasing	decrease	VERB
asir-946	72	18	.	.	PUNCT
asir-946	73	1	for	for	ADP
asir-946	73	2	example	example	NOUN
asir-946	73	3	,	,	PUNCT
asir-946	73	4	the	the	DET
asir-946	73	5	composition	composition	NOUN
asir-946	73	6	of	of	ADP
asir-946	73	7	the	the	DET
asir-946	73	8	non	non	ADJ
asir-946	73	9	-	-	ADJ
asir-946	73	10	stoichiometric	stoichiometric	ADJ
asir-946	73	11	compound	compound	NOUN
asir-946	73	12	was	be	AUX
asir-946	73	13	in0.55p0.45	in0.55p0.45	ADJ
asir-946	73	14	at	at	ADP
asir-946	73	15	the	the	DET
asir-946	73	16	the	the	DET
asir-946	73	17	linescan	linescan	ADJ
asir-946	73	18	depth	depth	NOUN
asir-946	73	19	of	of	ADP
asir-946	73	20	100	100	NUM
asir-946	73	21	nm	nm	NOUN
asir-946	73	22	.	.	PUNCT
asir-946	74	1	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	PROPN
asir-946	74	2	applied	apply	VERB
asir-946	74	3	science	science	NOUN
asir-946	74	4	and	and	CCONJ
asir-946	74	5	innovative	innovative	ADJ
asir-946	74	6	research	research	NOUN
asir-946	74	7	vol	vol	NOUN
asir-946	74	8	.	.	PROPN
asir-946	75	1	1	1	NUM
asir-946	75	2	,	,	PUNCT
asir-946	75	3	no	no	INTJ
asir-946	75	4	.	.	NOUN
asir-946	75	5	1	1	NUM
asir-946	75	6	,	,	PUNCT
asir-946	75	7	2017	2017	NUM
asir-946	75	8	74	74	NUM
asir-946	75	9	published	publish	VERB
asir-946	75	10	by	by	ADP
asir-946	75	11	scholink	scholink	PROPN
asir-946	75	12	inc	inc	PROPN
asir-946	75	13	.	.	PROPN
asir-946	75	14	figure	figure	PROPN
asir-946	75	15	5	5	NUM
asir-946	75	16	.	.	PUNCT
asir-946	76	1	eds	ed	NOUN
asir-946	76	2	linescan	linescan	VERB
asir-946	76	3	after	after	ADP
asir-946	76	4	the	the	DET
asir-946	76	5	v	v	NOUN
asir-946	76	6	-	-	PUNCT
asir-946	76	7	defect	defect	NOUN
asir-946	76	8	growth	growth	NOUN
asir-946	76	9	showing	show	VERB
asir-946	76	10	the	the	DET
asir-946	76	11	chemical	chemical	NOUN
asir-946	76	12	composition	composition	NOUN
asir-946	76	13	gradient	gradient	NOUN
asir-946	76	14	in	in	ADP
asir-946	76	15	phosphorus	phosphorus	NOUN
asir-946	76	16	and	and	CCONJ
asir-946	76	17	indium	indium	NOUN
asir-946	76	18	from	from	ADP
asir-946	76	19	the	the	DET
asir-946	76	20	surface	surface	NOUN
asir-946	76	21	to	to	ADP
asir-946	76	22	bottom	bottom	NOUN
asir-946	76	23	.	.	PUNCT
asir-946	77	1	the	the	DET
asir-946	77	2	upper	upper	ADJ
asir-946	77	3	region	region	NOUN
asir-946	77	4	of	of	ADP
asir-946	77	5	v	v	NOUN
asir-946	77	6	-	-	PUNCT
asir-946	77	7	defect	defect	NOUN
asir-946	77	8	showed	show	VERB
asir-946	77	9	more	more	ADJ
asir-946	77	10	phosphorus	phosphorus	NOUN
asir-946	77	11	-	-	PUNCT
asir-946	77	12	deficient	deficient	ADJ
asir-946	77	13	and	and	CCONJ
asir-946	77	14	indium	indium	NOUN
asir-946	77	15	-	-	PUNCT
asir-946	77	16	rich	rich	ADJ
asir-946	77	17	(	(	PUNCT
asir-946	77	18	in0.6p0.4	in0.6p0.4	NOUN
asir-946	77	19	)	)	PUNCT
asir-946	77	20	,	,	PUNCT
asir-946	77	21	while	while	SCONJ
asir-946	77	22	the	the	DET
asir-946	77	23	lower	low	ADJ
asir-946	77	24	v	v	NOUN
asir-946	77	25	-	-	PUNCT
asir-946	77	26	defect	defect	NOUN
asir-946	77	27	showed	show	VERB
asir-946	77	28	less	less	ADJ
asir-946	77	29	non	non	ADJ
asir-946	77	30	-	-	NOUN
asir-946	77	31	stoichiometry	stoichiometry	NOUN
asir-946	77	32	.	.	PUNCT
asir-946	78	1	at	at	ADP
asir-946	78	2	the	the	DET
asir-946	78	3	linescan	linescan	ADJ
asir-946	78	4	depth	depth	NOUN
asir-946	78	5	of	of	ADP
asir-946	78	6	100	100	NUM
asir-946	78	7	nm	nm	NOUN
asir-946	78	8	,	,	PUNCT
asir-946	78	9	the	the	DET
asir-946	78	10	composition	composition	NOUN
asir-946	78	11	of	of	ADP
asir-946	78	12	the	the	DET
asir-946	78	13	non	non	ADJ
asir-946	78	14	-	-	ADJ
asir-946	78	15	stoichiometric	stoichiometric	ADJ
asir-946	78	16	compound	compound	NOUN
asir-946	78	17	was	be	AUX
asir-946	78	18	in0.55p0.45	in0.55p0.45	ADJ
asir-946	78	19	figure	figure	NOUN
asir-946	78	20	6	6	NUM
asir-946	78	21	shows	show	VERB
asir-946	78	22	the	the	DET
asir-946	78	23	eds	ed	NOUN
asir-946	78	24	linescan	linescan	ADJ
asir-946	78	25	at	at	ADP
asir-946	78	26	the	the	DET
asir-946	78	27	upper	upper	ADJ
asir-946	78	28	left	left	ADJ
asir-946	78	29	portion	portion	NOUN
asir-946	78	30	of	of	ADP
asir-946	78	31	v	v	NOUN
asir-946	78	32	-	-	NOUN
asir-946	78	33	defect	defect	NOUN
asir-946	78	34	after	after	ADP
asir-946	78	35	the	the	DET
asir-946	78	36	growth	growth	NOUN
asir-946	78	37	process	process	NOUN
asir-946	78	38	.	.	PUNCT
asir-946	79	1	near	near	ADP
asir-946	79	2	the	the	DET
asir-946	79	3	top	top	NOUN
asir-946	79	4	of	of	ADP
asir-946	79	5	the	the	DET
asir-946	79	6	v	v	NOUN
asir-946	79	7	-	-	NOUN
asir-946	79	8	defect	defect	NOUN
asir-946	79	9	,	,	PUNCT
asir-946	79	10	the	the	DET
asir-946	79	11	non	non	NOUN
asir-946	79	12	-	-	NOUN
asir-946	79	13	stoichiometry	stoichiometry	NOUN
asir-946	79	14	was	be	AUX
asir-946	79	15	again	again	ADV
asir-946	79	16	most	most	ADV
asir-946	79	17	pronounced	pronounce	VERB
asir-946	79	18	,	,	PUNCT
asir-946	79	19	and	and	CCONJ
asir-946	79	20	the	the	DET
asir-946	79	21	eds	ed	NOUN
asir-946	79	22	indicated	indicate	VERB
asir-946	79	23	that	that	SCONJ
asir-946	79	24	the	the	DET
asir-946	79	25	compound	compound	NOUN
asir-946	79	26	was	be	AUX
asir-946	79	27	in0.55p0.45	in0.55p0.45	ADJ
asir-946	79	28	.	.	PUNCT
asir-946	80	1	as	as	SCONJ
asir-946	80	2	the	the	DET
asir-946	80	3	linescan	linescan	NOUN
asir-946	80	4	moved	move	VERB
asir-946	80	5	deeper	deeply	ADV
asir-946	80	6	from	from	ADP
asir-946	80	7	the	the	DET
asir-946	80	8	surface	surface	NOUN
asir-946	80	9	,	,	PUNCT
asir-946	80	10	the	the	DET
asir-946	80	11	ratio	ratio	NOUN
asir-946	80	12	of	of	ADP
asir-946	80	13	in	in	ADP
asir-946	80	14	to	to	ADP
asir-946	80	15	p	p	NOUN
asir-946	80	16	again	again	ADV
asir-946	80	17	was	be	AUX
asir-946	80	18	decreasing	decrease	VERB
asir-946	80	19	.	.	PUNCT
asir-946	81	1	the	the	DET
asir-946	81	2	eds	ed	NOUN
asir-946	81	3	linescan	linescan	AUX
asir-946	81	4	suggested	suggest	VERB
asir-946	81	5	that	that	SCONJ
asir-946	81	6	the	the	DET
asir-946	81	7	lower	low	ADJ
asir-946	81	8	left	left	ADJ
asir-946	81	9	region	region	NOUN
asir-946	81	10	of	of	ADP
asir-946	81	11	v	v	NOUN
asir-946	81	12	-	-	PUNCT
asir-946	81	13	defect	defect	NOUN
asir-946	81	14	was	be	AUX
asir-946	81	15	nearly	nearly	ADV
asir-946	81	16	a	a	DET
asir-946	81	17	stoichiometric	stoichiometric	ADJ
asir-946	81	18	compound	compound	NOUN
asir-946	81	19	of	of	ADP
asir-946	81	20	inp	inp	PROPN
asir-946	81	21	.	.	PUNCT
asir-946	82	1	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	PROPN
asir-946	82	2	applied	apply	VERB
asir-946	82	3	science	science	NOUN
asir-946	82	4	and	and	CCONJ
asir-946	82	5	innovative	innovative	ADJ
asir-946	82	6	research	research	NOUN
asir-946	82	7	vol	vol	NOUN
asir-946	82	8	.	.	PROPN
asir-946	83	1	1	1	NUM
asir-946	83	2	,	,	PUNCT
asir-946	83	3	no	no	INTJ
asir-946	83	4	.	.	NOUN
asir-946	83	5	1	1	NUM
asir-946	83	6	,	,	PUNCT
asir-946	83	7	2017	2017	NUM
asir-946	83	8	75	75	NUM
asir-946	83	9	published	publish	VERB
asir-946	83	10	by	by	ADP
asir-946	83	11	scholink	scholink	PROPN
asir-946	83	12	inc	inc	PROPN
asir-946	83	13	.	.	PROPN
asir-946	83	14	figure	figure	NOUN
asir-946	83	15	6	6	NUM
asir-946	83	16	.	.	PUNCT
asir-946	84	1	eds	ed	NOUN
asir-946	84	2	linescan	linescan	VERB
asir-946	84	3	at	at	ADP
asir-946	84	4	the	the	DET
asir-946	84	5	upper	upper	ADJ
asir-946	84	6	left	left	ADJ
asir-946	84	7	portion	portion	NOUN
asir-946	84	8	of	of	ADP
asir-946	84	9	v	v	NOUN
asir-946	84	10	-	-	NOUN
asir-946	84	11	defect	defect	NOUN
asir-946	84	12	after	after	SCONJ
asir-946	84	13	the	the	DET
asir-946	84	14	growth	growth	NOUN
asir-946	84	15	process	process	NOUN
asir-946	84	16	showing	show	VERB
asir-946	84	17	the	the	DET
asir-946	84	18	chemical	chemical	NOUN
asir-946	84	19	composition	composition	NOUN
asir-946	84	20	gradient	gradient	NOUN
asir-946	84	21	in	in	ADP
asir-946	84	22	phosphorus	phosphorus	NOUN
asir-946	84	23	and	and	CCONJ
asir-946	84	24	indium	indium	NOUN
asir-946	84	25	from	from	ADP
asir-946	84	26	the	the	DET
asir-946	84	27	surface	surface	NOUN
asir-946	84	28	to	to	ADP
asir-946	84	29	bottom	bottom	NOUN
asir-946	84	30	.	.	PUNCT
asir-946	85	1	the	the	DET
asir-946	85	2	upper	upper	ADJ
asir-946	85	3	region	region	NOUN
asir-946	85	4	of	of	ADP
asir-946	85	5	v	v	NOUN
asir-946	85	6	-	-	PUNCT
asir-946	85	7	defect	defect	NOUN
asir-946	85	8	showed	show	VERB
asir-946	85	9	more	more	ADJ
asir-946	85	10	phosphorus	phosphorus	NOUN
asir-946	85	11	-	-	PUNCT
asir-946	85	12	deficient	deficient	ADJ
asir-946	85	13	and	and	CCONJ
asir-946	85	14	indium	indium	NOUN
asir-946	85	15	-	-	PUNCT
asir-946	85	16	rich	rich	ADJ
asir-946	85	17	(	(	PUNCT
asir-946	85	18	in0.55	in0.55	PROPN
asir-946	85	19	p0.45	p0.45	PROPN
asir-946	85	20	)	)	PUNCT
asir-946	85	21	,	,	PUNCT
asir-946	85	22	while	while	SCONJ
asir-946	85	23	the	the	DET
asir-946	85	24	lower	low	ADJ
asir-946	85	25	v	v	NOUN
asir-946	85	26	-	-	PUNCT
asir-946	85	27	defect	defect	NOUN
asir-946	85	28	showed	show	VERB
asir-946	85	29	less	less	ADJ
asir-946	85	30	non	non	ADJ
asir-946	85	31	-	-	NOUN
asir-946	85	32	stoichiometry	stoichiometry	ADJ
asir-946	85	33	4	4	NUM
asir-946	85	34	.	.	PUNCT
asir-946	85	35	discussion	discussion	NOUN
asir-946	85	36	in	in	ADP
asir-946	85	37	the	the	DET
asir-946	85	38	following	following	NOUN
asir-946	85	39	,	,	PUNCT
asir-946	85	40	we	we	PRON
asir-946	85	41	attempt	attempt	VERB
asir-946	85	42	to	to	PART
asir-946	85	43	explain	explain	VERB
asir-946	85	44	the	the	DET
asir-946	85	45	formation	formation	NOUN
asir-946	85	46	mechanism	mechanism	NOUN
asir-946	85	47	of	of	ADP
asir-946	85	48	non	non	ADJ
asir-946	85	49	-	-	ADJ
asir-946	85	50	stoichiometric	stoichiometric	ADJ
asir-946	85	51	v	v	ADV
asir-946	85	52	-	-	PUNCT
asir-946	85	53	shaped	shape	VERB
asir-946	85	54	defect	defect	NOUN
asir-946	85	55	by	by	ADP
asir-946	85	56	nucleation	nucleation	NOUN
asir-946	85	57	and	and	CCONJ
asir-946	85	58	growth	growth	NOUN
asir-946	85	59	processes	process	NOUN
asir-946	85	60	.	.	PUNCT
asir-946	86	1	4.1	4.1	NUM
asir-946	86	2	defect	defect	NOUN
asir-946	86	3	nucleation	nucleation	NOUN
asir-946	86	4	the	the	DET
asir-946	86	5	tem	tem	PROPN
asir-946	86	6	image	image	NOUN
asir-946	86	7	in	in	ADP
asir-946	86	8	figure	figure	NOUN
asir-946	86	9	2	2	NUM
asir-946	86	10	suggested	suggest	VERB
asir-946	86	11	that	that	SCONJ
asir-946	86	12	the	the	DET
asir-946	86	13	defect	defect	NOUN
asir-946	86	14	nucleation	nucleation	NOUN
asir-946	86	15	initiated	initiate	VERB
asir-946	86	16	at	at	ADP
asir-946	86	17	the	the	DET
asir-946	86	18	inp	inp	PROPN
asir-946	86	19	groove	groove	NOUN
asir-946	86	20	between	between	ADP
asir-946	86	21	the	the	DET
asir-946	86	22	ingaasp	ingaasp	NOUN
asir-946	86	23	/	/	SYM
asir-946	86	24	inp	inp	PROPN
asir-946	86	25	arrays	array	VERB
asir-946	86	26	.	.	PUNCT
asir-946	87	1	during	during	ADP
asir-946	87	2	the	the	DET
asir-946	87	3	rie	rie	ADJ
asir-946	87	4	etching	etching	NOUN
asir-946	87	5	,	,	PUNCT
asir-946	87	6	the	the	DET
asir-946	87	7	chlorine	chlorine	NOUN
asir-946	87	8	-	-	PUNCT
asir-946	87	9	based	base	VERB
asir-946	87	10	etching	etching	NOUN
asir-946	87	11	of	of	ADP
asir-946	87	12	bcl3	bcl3	PROPN
asir-946	87	13	reacted	react	VERB
asir-946	87	14	with	with	ADP
asir-946	87	15	the	the	DET
asir-946	87	16	inp	inp	PROPN
asir-946	87	17	to	to	PART
asir-946	87	18	form	form	VERB
asir-946	87	19	chlorine	chlorine	NOUN
asir-946	87	20	-	-	PUNCT
asir-946	87	21	based	base	VERB
asir-946	87	22	etch	etch	NOUN
asir-946	87	23	products	product	NOUN
asir-946	87	24	such	such	ADJ
asir-946	87	25	as	as	ADP
asir-946	87	26	pclx	pclx	NOUN
asir-946	87	27	.	.	PUNCT
asir-946	88	1	those	those	DET
asir-946	88	2	chlorine	chlorine	NOUN
asir-946	88	3	-	-	PUNCT
asir-946	88	4	based	base	VERB
asir-946	88	5	etch	etch	NOUN
asir-946	88	6	products	product	NOUN
asir-946	88	7	have	have	VERB
asir-946	88	8	very	very	ADV
asir-946	88	9	high	high	ADJ
asir-946	88	10	volatility	volatility	NOUN
asir-946	88	11	that	that	PRON
asir-946	88	12	would	would	AUX
asir-946	88	13	lead	lead	VERB
asir-946	88	14	to	to	ADP
asir-946	88	15	the	the	DET
asir-946	88	16	preferential	preferential	ADJ
asir-946	88	17	loss	loss	NOUN
asir-946	88	18	of	of	ADP
asir-946	88	19	phosphorus	phosphorus	NOUN
asir-946	88	20	(	(	PUNCT
asir-946	88	21	bae	bae	NOUN
asir-946	88	22	et	et	PROPN
asir-946	88	23	al	al	PROPN
asir-946	88	24	.	.	PROPN
asir-946	88	25	,	,	PUNCT
asir-946	88	26	2007	2007	NUM
asir-946	88	27	)	)	PUNCT
asir-946	88	28	.	.	PUNCT
asir-946	89	1	as	as	ADP
asir-946	89	2	a	a	DET
asir-946	89	3	result	result	NOUN
asir-946	89	4	,	,	PUNCT
asir-946	89	5	the	the	DET
asir-946	89	6	phosphorus	phosphorus	NOUN
asir-946	89	7	-	-	PUNCT
asir-946	89	8	deficient	deficient	ADJ
asir-946	89	9	region	region	NOUN
asir-946	89	10	was	be	AUX
asir-946	89	11	likely	likely	ADJ
asir-946	89	12	to	to	PART
asir-946	89	13	form	form	VERB
asir-946	89	14	along	along	ADP
asir-946	89	15	the	the	DET
asir-946	89	16	sidewall	sidewall	NOUN
asir-946	89	17	and	and	CCONJ
asir-946	89	18	bottom	bottom	NOUN
asir-946	89	19	of	of	ADP
asir-946	89	20	the	the	DET
asir-946	89	21	groove	groove	NOUN
asir-946	89	22	after	after	ADP
asir-946	89	23	the	the	DET
asir-946	89	24	rie	rie	NOUN
asir-946	89	25	etching	etch	VERB
asir-946	89	26	,	,	PUNCT
asir-946	89	27	as	as	SCONJ
asir-946	89	28	illustrated	illustrate	VERB
asir-946	89	29	in	in	ADP
asir-946	89	30	figure	figure	NOUN
asir-946	89	31	7	7	NUM
asir-946	89	32	.	.	PUNCT
asir-946	90	1	the	the	DET
asir-946	90	2	p	p	ADJ
asir-946	90	3	-	-	PUNCT
asir-946	90	4	deficient	deficient	ADJ
asir-946	90	5	region	region	NOUN
asir-946	90	6	acted	act	VERB
asir-946	90	7	as	as	ADP
asir-946	90	8	the	the	DET
asir-946	90	9	nucleation	nucleation	NOUN
asir-946	90	10	site	site	NOUN
asir-946	90	11	that	that	PRON
asir-946	90	12	played	play	VERB
asir-946	90	13	an	an	DET
asir-946	90	14	important	important	ADJ
asir-946	90	15	role	role	NOUN
asir-946	90	16	in	in	ADP
asir-946	90	17	the	the	DET
asir-946	90	18	subsequent	subsequent	ADJ
asir-946	90	19	growth	growth	NOUN
asir-946	90	20	of	of	ADP
asir-946	90	21	the	the	DET
asir-946	90	22	v	v	ADV
asir-946	90	23	-	-	PUNCT
asir-946	90	24	shaped	shape	VERB
asir-946	90	25	defect	defect	NOUN
asir-946	90	26	.	.	PUNCT
asir-946	91	1	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	PROPN
asir-946	91	2	applied	apply	VERB
asir-946	91	3	science	science	NOUN
asir-946	91	4	and	and	CCONJ
asir-946	91	5	innovative	innovative	ADJ
asir-946	91	6	research	research	NOUN
asir-946	91	7	vol	vol	NOUN
asir-946	91	8	.	.	PROPN
asir-946	92	1	1	1	NUM
asir-946	92	2	,	,	PUNCT
asir-946	92	3	no	no	INTJ
asir-946	92	4	.	.	NOUN
asir-946	92	5	1	1	NUM
asir-946	92	6	,	,	PUNCT
asir-946	92	7	2017	2017	NUM
asir-946	92	8	76	76	NUM
asir-946	92	9	published	publish	VERB
asir-946	92	10	by	by	ADP
asir-946	92	11	scholink	scholink	PROPN
asir-946	92	12	inc	inc	PROPN
asir-946	92	13	.	.	PROPN
asir-946	92	14	figure	figure	PROPN
asir-946	92	15	7	7	NUM
asir-946	92	16	.	.	PUNCT
asir-946	93	1	schematics	schematic	NOUN
asir-946	93	2	of	of	ADP
asir-946	93	3	v	v	NOUN
asir-946	93	4	-	-	PUNCT
asir-946	93	5	defect	defect	NOUN
asir-946	93	6	nucleation	nucleation	NOUN
asir-946	93	7	process	process	NOUN
asir-946	93	8	.	.	PUNCT
asir-946	94	1	the	the	DET
asir-946	94	2	nucleation	nucleation	NOUN
asir-946	94	3	of	of	ADP
asir-946	94	4	v	v	NOUN
asir-946	94	5	-	-	PUNCT
asir-946	94	6	defect	defect	NOUN
asir-946	94	7	started	start	VERB
asir-946	94	8	at	at	ADP
asir-946	94	9	the	the	DET
asir-946	94	10	groove	groove	NOUN
asir-946	94	11	of	of	ADP
asir-946	94	12	the	the	DET
asir-946	94	13	ingaasp	ingaasp	NOUN
asir-946	94	14	/	/	SYM
asir-946	94	15	inp	inp	PROPN
asir-946	94	16	heterogeneous	heterogeneous	ADJ
asir-946	94	17	array	array	VERB
asir-946	94	18	4.2	4.2	NUM
asir-946	94	19	defect	defect	NOUN
asir-946	94	20	growth	growth	NOUN
asir-946	94	21	the	the	DET
asir-946	94	22	tem	tem	PROPN
asir-946	94	23	and	and	CCONJ
asir-946	94	24	eds	ed	NOUN
asir-946	94	25	data	datum	NOUN
asir-946	94	26	in	in	ADP
asir-946	94	27	figures	figure	NOUN
asir-946	94	28	3	3	NUM
asir-946	94	29	-	-	SYM
asir-946	94	30	6	6	NUM
asir-946	94	31	indicated	indicate	VERB
asir-946	94	32	that	that	SCONJ
asir-946	94	33	v	v	NOUN
asir-946	94	34	-	-	PUNCT
asir-946	94	35	defect	defect	NOUN
asir-946	94	36	was	be	AUX
asir-946	94	37	an	an	DET
asir-946	94	38	open	open	ADJ
asir-946	94	39	,	,	PUNCT
asir-946	94	40	inverted	inverted	ADJ
asir-946	94	41	pyramid	pyramid	NOUN
asir-946	94	42	shape	shape	NOUN
asir-946	94	43	with	with	ADP
asir-946	94	44	non	non	ADJ
asir-946	94	45	-	-	ADJ
asir-946	94	46	stoichiometric	stoichiometric	ADJ
asir-946	94	47	in	in	ADP
asir-946	94	48	and	and	CCONJ
asir-946	94	49	p	p	NOUN
asir-946	94	50	ratio	ratio	NOUN
asir-946	94	51	.	.	PUNCT
asir-946	95	1	moreover	moreover	ADV
asir-946	95	2	,	,	PUNCT
asir-946	95	3	there	there	PRON
asir-946	95	4	was	be	VERB
asir-946	95	5	concentration	concentration	NOUN
asir-946	95	6	gradient	gradient	NOUN
asir-946	95	7	in	in	ADP
asir-946	95	8	the	the	DET
asir-946	95	9	non	non	ADJ
asir-946	95	10	-	-	ADJ
asir-946	95	11	stoichiometric	stoichiometric	ADJ
asir-946	95	12	v	v	NOUN
asir-946	95	13	-	-	NOUN
asir-946	95	14	defect	defect	NOUN
asir-946	95	15	where	where	SCONJ
asir-946	95	16	the	the	DET
asir-946	95	17	ratio	ratio	NOUN
asir-946	95	18	of	of	ADP
asir-946	95	19	in	in	ADP
asir-946	95	20	to	to	ADP
asir-946	95	21	p	p	NOUN
asir-946	95	22	was	be	AUX
asir-946	95	23	decreasing	decrease	VERB
asir-946	95	24	from	from	ADP
asir-946	95	25	the	the	DET
asir-946	95	26	top	top	NOUN
asir-946	95	27	to	to	ADP
asir-946	95	28	the	the	DET
asir-946	95	29	bottom	bottom	NOUN
asir-946	95	30	and	and	CCONJ
asir-946	95	31	from	from	ADP
asir-946	95	32	the	the	DET
asir-946	95	33	center	center	NOUN
asir-946	95	34	to	to	ADP
asir-946	95	35	the	the	DET
asir-946	95	36	side	side	NOUN
asir-946	95	37	.	.	PUNCT
asir-946	96	1	figure	figure	NOUN
asir-946	96	2	8	8	NUM
asir-946	96	3	shows	show	VERB
asir-946	96	4	the	the	DET
asir-946	96	5	schematic	schematic	ADJ
asir-946	96	6	of	of	ADP
asir-946	96	7	the	the	DET
asir-946	96	8	v	v	NOUN
asir-946	96	9	-	-	PUNCT
asir-946	96	10	defect	defect	ADJ
asir-946	96	11	growth	growth	NOUN
asir-946	96	12	process	process	NOUN
asir-946	96	13	.	.	PUNCT
asir-946	97	1	after	after	ADP
asir-946	97	2	forming	form	VERB
asir-946	97	3	the	the	DET
asir-946	97	4	phosphorus	phosphorus	NOUN
asir-946	97	5	-	-	PUNCT
asir-946	97	6	deficient	deficient	ADJ
asir-946	97	7	nucleation	nucleation	NOUN
asir-946	97	8	seed	seed	NOUN
asir-946	97	9	at	at	ADP
asir-946	97	10	the	the	DET
asir-946	97	11	groove	groove	NOUN
asir-946	97	12	,	,	PUNCT
asir-946	97	13	the	the	DET
asir-946	97	14	non	non	ADJ
asir-946	97	15	-	-	ADJ
asir-946	97	16	stoichiometric	stoichiometric	ADJ
asir-946	97	17	compound	compound	NOUN
asir-946	97	18	continued	continue	VERB
asir-946	97	19	to	to	PART
asir-946	97	20	grow	grow	VERB
asir-946	97	21	with	with	ADP
asir-946	97	22	the	the	DET
asir-946	97	23	inp	inp	PROPN
asir-946	97	24	regrowth	regrowth	NOUN
asir-946	97	25	layer	layer	NOUN
asir-946	97	26	.	.	PUNCT
asir-946	98	1	we	we	PRON
asir-946	98	2	speculated	speculate	VERB
asir-946	98	3	that	that	SCONJ
asir-946	98	4	the	the	DET
asir-946	98	5	driving	drive	VERB
asir-946	98	6	force	force	NOUN
asir-946	98	7	of	of	ADP
asir-946	98	8	the	the	DET
asir-946	98	9	p	p	NOUN
asir-946	98	10	-	-	PUNCT
asir-946	98	11	deficient	deficient	ADJ
asir-946	98	12	,	,	PUNCT
asir-946	98	13	in	in	ADP
asir-946	98	14	-	-	PUNCT
asir-946	98	15	rich	rich	ADJ
asir-946	98	16	compound	compound	NOUN
asir-946	98	17	growth	growth	NOUN
asir-946	98	18	was	be	AUX
asir-946	98	19	related	relate	VERB
asir-946	98	20	to	to	ADP
asir-946	98	21	the	the	DET
asir-946	98	22	reduction	reduction	NOUN
asir-946	98	23	of	of	ADP
asir-946	98	24	surface	surface	NOUN
asir-946	98	25	energy	energy	NOUN
asir-946	98	26	(	(	PUNCT
asir-946	98	27	tu	tu	X
asir-946	98	28	et	et	PROPN
asir-946	98	29	al	al	PROPN
asir-946	98	30	.	.	PROPN
asir-946	98	31	,	,	PUNCT
asir-946	98	32	1996	1996	NUM
asir-946	98	33	)	)	PUNCT
asir-946	98	34	.	.	PUNCT
asir-946	99	1	the	the	DET
asir-946	99	2	p	p	NOUN
asir-946	99	3	-	-	PUNCT
asir-946	99	4	deficient	deficient	ADJ
asir-946	99	5	,	,	PUNCT
asir-946	99	6	in	in	ADP
asir-946	99	7	-	-	PUNCT
asir-946	99	8	rich	rich	ADJ
asir-946	99	9	(	(	PUNCT
asir-946	99	10	in1+xp1	in1+xp1	ADJ
asir-946	99	11	-	-	PUNCT
asir-946	99	12	x	x	ADJ
asir-946	99	13	)	)	PUNCT
asir-946	99	14	compound	compound	NOUN
asir-946	99	15	grew	grow	VERB
asir-946	99	16	into	into	ADP
asir-946	99	17	v	v	NOUN
asir-946	99	18	-	-	PUNCT
asir-946	99	19	shape	shape	NOUN
asir-946	99	20	to	to	PART
asir-946	99	21	reach	reach	VERB
asir-946	99	22	the	the	DET
asir-946	99	23	lowest	low	ADJ
asir-946	99	24	surface	surface	NOUN
asir-946	99	25	energy	energy	NOUN
asir-946	99	26	.	.	PUNCT
asir-946	100	1	the	the	DET
asir-946	100	2	boundary	boundary	NOUN
asir-946	100	3	of	of	ADP
asir-946	100	4	the	the	DET
asir-946	100	5	v	v	ADV
asir-946	100	6	-	-	PUNCT
asir-946	100	7	shaped	shape	VERB
asir-946	100	8	defect	defect	NOUN
asir-946	100	9	was	be	AUX
asir-946	100	10	likely	likely	ADV
asir-946	100	11	following	follow	VERB
asir-946	100	12	the	the	DET
asir-946	100	13	crystallographic	crystallographic	ADJ
asir-946	100	14	plane	plane	NOUN
asir-946	100	15	.	.	PUNCT
asir-946	101	1	we	we	PRON
asir-946	101	2	also	also	ADV
asir-946	101	3	noted	note	VERB
asir-946	101	4	that	that	SCONJ
asir-946	101	5	the	the	DET
asir-946	101	6	v	v	NOUN
asir-946	101	7	-	-	PUNCT
asir-946	101	8	defect	defect	NOUN
asir-946	101	9	formation	formation	NOUN
asir-946	101	10	only	only	ADV
asir-946	101	11	preferentially	preferentially	ADV
asir-946	101	12	occurred	occur	VERB
asir-946	101	13	at	at	ADP
asir-946	101	14	certain	certain	ADJ
asir-946	101	15	sites	site	NOUN
asir-946	101	16	.	.	PUNCT
asir-946	102	1	the	the	DET
asir-946	102	2	defect	defect	NOUN
asir-946	102	3	nuclei	nucleus	NOUN
asir-946	102	4	at	at	ADP
asir-946	102	5	those	those	DET
asir-946	102	6	sites	site	NOUN
asir-946	102	7	have	have	AUX
asir-946	102	8	likely	likely	ADV
asir-946	102	9	reached	reach	VERB
asir-946	102	10	the	the	DET
asir-946	102	11	“	"	PUNCT
asir-946	102	12	threshold	threshold	NOUN
asir-946	102	13	”	"	PUNCT
asir-946	102	14	for	for	SCONJ
asir-946	102	15	the	the	DET
asir-946	102	16	defect	defect	NOUN
asir-946	102	17	growth	growth	NOUN
asir-946	102	18	to	to	PART
asir-946	102	19	occur	occur	VERB
asir-946	102	20	.	.	PUNCT
asir-946	103	1	figure	figure	VERB
asir-946	103	2	8	8	NUM
asir-946	103	3	.	.	PUNCT
asir-946	104	1	schematics	schematic	NOUN
asir-946	104	2	of	of	ADP
asir-946	104	3	v	v	NOUN
asir-946	104	4	-	-	PUNCT
asir-946	104	5	defect	defect	NOUN
asir-946	104	6	growth	growth	NOUN
asir-946	104	7	process	process	NOUN
asir-946	104	8	.	.	PUNCT
asir-946	105	1	the	the	DET
asir-946	105	2	growth	growth	NOUN
asir-946	105	3	of	of	ADP
asir-946	105	4	v	v	NOUN
asir-946	105	5	-	-	PUNCT
asir-946	105	6	defect	defect	NOUN
asir-946	105	7	initiated	initiate	VERB
asir-946	105	8	from	from	ADP
asir-946	105	9	the	the	DET
asir-946	105	10	nucleation	nucleation	NOUN
asir-946	105	11	at	at	ADP
asir-946	105	12	the	the	DET
asir-946	105	13	groove	groove	NOUN
asir-946	105	14	and	and	CCONJ
asir-946	105	15	expanded	expand	VERB
asir-946	105	16	to	to	ADP
asir-946	105	17	the	the	DET
asir-946	105	18	surface	surface	NOUN
asir-946	105	19	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	NOUN
asir-946	105	20	applied	apply	VERB
asir-946	105	21	science	science	NOUN
asir-946	105	22	and	and	CCONJ
asir-946	105	23	innovative	innovative	ADJ
asir-946	105	24	research	research	NOUN
asir-946	105	25	vol	vol	NOUN
asir-946	105	26	.	.	PROPN
asir-946	106	1	1	1	NUM
asir-946	106	2	,	,	PUNCT
asir-946	106	3	no	no	INTJ
asir-946	106	4	.	.	NOUN
asir-946	106	5	1	1	NUM
asir-946	106	6	,	,	PUNCT
asir-946	106	7	2017	2017	NUM
asir-946	106	8	77	77	NUM
asir-946	106	9	published	publish	VERB
asir-946	106	10	by	by	ADP
asir-946	106	11	scholink	scholink	PROPN
asir-946	106	12	inc	inc	PROPN
asir-946	106	13	.	.	PUNCT
asir-946	107	1	the	the	DET
asir-946	107	2	characterization	characterization	NOUN
asir-946	107	3	of	of	ADP
asir-946	107	4	the	the	DET
asir-946	107	5	p	p	NOUN
asir-946	107	6	-	-	PUNCT
asir-946	107	7	deficient	deficient	ADJ
asir-946	107	8	,	,	PUNCT
asir-946	107	9	in	in	ADP
asir-946	107	10	-	-	PUNCT
asir-946	107	11	rich	rich	ADJ
asir-946	107	12	compound	compound	NOUN
asir-946	107	13	in	in	ADP
asir-946	107	14	this	this	DET
asir-946	107	15	study	study	NOUN
asir-946	107	16	may	may	AUX
asir-946	107	17	lead	lead	VERB
asir-946	107	18	to	to	ADP
asir-946	107	19	several	several	ADJ
asir-946	107	20	useful	useful	ADJ
asir-946	107	21	technological	technological	ADJ
asir-946	107	22	applications	application	NOUN
asir-946	107	23	.	.	PUNCT
asir-946	108	1	first	first	ADV
asir-946	108	2	,	,	PUNCT
asir-946	108	3	unfolding	unfold	VERB
asir-946	108	4	the	the	DET
asir-946	108	5	nucleation	nucleation	NOUN
asir-946	108	6	process	process	NOUN
asir-946	108	7	of	of	ADP
asir-946	108	8	the	the	DET
asir-946	108	9	v	v	ADV
asir-946	108	10	-	-	PUNCT
asir-946	108	11	shaped	shape	VERB
asir-946	108	12	compound	compound	NOUN
asir-946	108	13	may	may	AUX
asir-946	108	14	lead	lead	VERB
asir-946	108	15	to	to	ADP
asir-946	108	16	better	well	ADJ
asir-946	108	17	defect	defect	VERB
asir-946	108	18	control	control	NOUN
asir-946	108	19	.	.	PUNCT
asir-946	109	1	additionally	additionally	ADV
asir-946	109	2	,	,	PUNCT
asir-946	109	3	the	the	DET
asir-946	109	4	nucleation	nucleation	NOUN
asir-946	109	5	of	of	ADP
asir-946	109	6	the	the	DET
asir-946	109	7	v	v	ADV
asir-946	109	8	-	-	PUNCT
asir-946	109	9	shaped	shape	VERB
asir-946	109	10	defect	defect	NOUN
asir-946	109	11	and	and	CCONJ
asir-946	109	12	its	its	PRON
asir-946	109	13	interplay	interplay	NOUN
asir-946	109	14	with	with	ADP
asir-946	109	15	the	the	DET
asir-946	109	16	epitaxial	epitaxial	ADJ
asir-946	109	17	growth	growth	NOUN
asir-946	109	18	in	in	ADP
asir-946	109	19	the	the	DET
asir-946	109	20	inp	inp	PROPN
asir-946	109	21	system	system	NOUN
asir-946	109	22	are	be	AUX
asir-946	109	23	important	important	ADJ
asir-946	109	24	for	for	ADP
asir-946	109	25	the	the	DET
asir-946	109	26	engineering	engineering	NOUN
asir-946	109	27	of	of	ADP
asir-946	109	28	mocvd	mocvd	NOUN
asir-946	109	29	or	or	CCONJ
asir-946	109	30	molecular	molecular	ADJ
asir-946	109	31	beam	beam	NOUN
asir-946	109	32	epitaxial	epitaxial	NOUN
asir-946	109	33	(	(	PUNCT
asir-946	109	34	mbe	mbe	PROPN
asir-946	109	35	)	)	PUNCT
asir-946	109	36	.	.	PUNCT
asir-946	110	1	second	second	ADJ
asir-946	110	2	,	,	PUNCT
asir-946	110	3	the	the	DET
asir-946	110	4	size	size	NOUN
asir-946	110	5	,	,	PUNCT
asir-946	110	6	spacing	spacing	NOUN
asir-946	110	7	and	and	CCONJ
asir-946	110	8	stoichiometry	stoichiometry	NOUN
asir-946	110	9	of	of	ADP
asir-946	110	10	the	the	DET
asir-946	110	11	p	p	NOUN
asir-946	110	12	-	-	PUNCT
asir-946	110	13	deficient	deficient	ADJ
asir-946	110	14	,	,	PUNCT
asir-946	110	15	in	in	ADP
asir-946	110	16	-	-	PUNCT
asir-946	110	17	rich	rich	ADJ
asir-946	110	18	compound	compound	NOUN
asir-946	110	19	can	can	AUX
asir-946	110	20	be	be	AUX
asir-946	110	21	engineering	engineering	NOUN
asir-946	110	22	tailored	tailor	VERB
asir-946	110	23	.	.	PUNCT
asir-946	111	1	our	our	PRON
asir-946	111	2	study	study	NOUN
asir-946	111	3	shows	show	VERB
asir-946	111	4	that	that	SCONJ
asir-946	111	5	the	the	DET
asir-946	111	6	size	size	NOUN
asir-946	111	7	and	and	CCONJ
asir-946	111	8	spacing	spacing	NOUN
asir-946	111	9	of	of	ADP
asir-946	111	10	the	the	DET
asir-946	111	11	nanoscale	nanoscale	NOUN
asir-946	111	12	v	v	NOUN
asir-946	111	13	-	-	PUNCT
asir-946	111	14	defect	defect	NOUN
asir-946	111	15	could	could	AUX
asir-946	111	16	be	be	AUX
asir-946	111	17	defined	define	VERB
asir-946	111	18	by	by	ADP
asir-946	111	19	the	the	DET
asir-946	111	20	ingaasp	ingaasp	NOUN
asir-946	111	21	/	/	SYM
asir-946	111	22	inp	inp	PROPN
asir-946	111	23	position	position	NOUN
asir-946	111	24	-	-	PUNCT
asir-946	111	25	controlled	control	VERB
asir-946	111	26	seed	seed	NOUN
asir-946	111	27	array	array	NOUN
asir-946	111	28	.	.	PUNCT
asir-946	112	1	for	for	ADP
asir-946	112	2	example	example	NOUN
asir-946	112	3	,	,	PUNCT
asir-946	112	4	the	the	DET
asir-946	112	5	density	density	NOUN
asir-946	112	6	of	of	ADP
asir-946	112	7	the	the	DET
asir-946	112	8	p	p	ADJ
asir-946	112	9	-	-	PUNCT
asir-946	112	10	deficient	deficient	ADJ
asir-946	112	11	compound	compound	NOUN
asir-946	112	12	can	can	AUX
asir-946	112	13	be	be	AUX
asir-946	112	14	varied	vary	VERB
asir-946	112	15	by	by	ADP
asir-946	112	16	changing	change	VERB
asir-946	112	17	the	the	DET
asir-946	112	18	spacing	spacing	NOUN
asir-946	112	19	of	of	ADP
asir-946	112	20	the	the	DET
asir-946	112	21	ingaasp	ingaasp	NOUN
asir-946	112	22	/	/	SYM
asir-946	112	23	inp	inp	PROPN
asir-946	112	24	nano	nano	NOUN
asir-946	112	25	-	-	PUNCT
asir-946	112	26	array	array	NOUN
asir-946	112	27	.	.	PUNCT
asir-946	113	1	the	the	DET
asir-946	113	2	non	non	ADJ
asir-946	113	3	-	-	NOUN
asir-946	113	4	stoichiometry	stoichiometry	NOUN
asir-946	113	5	and	and	CCONJ
asir-946	113	6	optical	optical	ADJ
asir-946	113	7	property	property	NOUN
asir-946	113	8	of	of	ADP
asir-946	113	9	the	the	DET
asir-946	113	10	disordered	disordered	ADJ
asir-946	113	11	in1+xp1	in1+xp1	ADJ
asir-946	113	12	-	-	PUNCT
asir-946	113	13	x	x	ADJ
asir-946	113	14	compound	compound	NOUN
asir-946	113	15	may	may	AUX
asir-946	113	16	be	be	AUX
asir-946	113	17	adjusted	adjust	VERB
asir-946	113	18	by	by	ADP
asir-946	113	19	the	the	DET
asir-946	113	20	thickness	thickness	NOUN
asir-946	113	21	of	of	ADP
asir-946	113	22	the	the	DET
asir-946	113	23	inp	inp	PROPN
asir-946	113	24	regrowth	regrowth	NOUN
asir-946	113	25	layer	layer	NOUN
asir-946	113	26	.	.	PUNCT
asir-946	114	1	for	for	ADP
asir-946	114	2	example	example	NOUN
asir-946	114	3	,	,	PUNCT
asir-946	114	4	the	the	DET
asir-946	114	5	photoluminescence	photoluminescence	NOUN
asir-946	114	6	(	(	PUNCT
asir-946	114	7	pl	pl	NOUN
asir-946	114	8	)	)	PUNCT
asir-946	114	9	full	full	ADJ
asir-946	114	10	-	-	PUNCT
asir-946	114	11	width	width	NOUN
asir-946	114	12	at	at	ADP
asir-946	114	13	half	half	ADJ
asir-946	114	14	maximum	maximum	ADJ
asir-946	114	15	(	(	PUNCT
asir-946	114	16	fwhm	fwhm	NOUN
asir-946	114	17	)	)	PUNCT
asir-946	114	18	could	could	AUX
asir-946	114	19	be	be	AUX
asir-946	114	20	reduced	reduce	VERB
asir-946	114	21	as	as	SCONJ
asir-946	114	22	the	the	DET
asir-946	114	23	v	v	NOUN
asir-946	114	24	/	/	SYM
asir-946	114	25	iii	iii	NOUN
asir-946	114	26	ratio	ratio	NOUN
asir-946	114	27	is	be	AUX
asir-946	114	28	lowered	lower	VERB
asir-946	114	29	,	,	PUNCT
asir-946	114	30	leading	lead	VERB
asir-946	114	31	to	to	ADP
asir-946	114	32	an	an	DET
asir-946	114	33	improvement	improvement	NOUN
asir-946	114	34	in	in	ADP
asir-946	114	35	the	the	DET
asir-946	114	36	optical	optical	ADJ
asir-946	114	37	quality	quality	NOUN
asir-946	114	38	(	(	PUNCT
asir-946	114	39	yoon	yoon	PROPN
asir-946	114	40	&	&	CCONJ
asir-946	114	41	zhang	zhang	PROPN
asir-946	114	42	,	,	PUNCT
asir-946	114	43	1998	1998	NUM
asir-946	114	44	)	)	PUNCT
asir-946	114	45	.	.	PUNCT
asir-946	115	1	5	5	X
asir-946	115	2	.	.	X
asir-946	115	3	conclusion	conclusion	NOUN
asir-946	115	4	we	we	PRON
asir-946	115	5	have	have	AUX
asir-946	115	6	studied	study	VERB
asir-946	115	7	the	the	DET
asir-946	115	8	nanoscale	nanoscale	NOUN
asir-946	115	9	nucleation	nucleation	NOUN
asir-946	115	10	and	and	CCONJ
asir-946	115	11	growth	growth	NOUN
asir-946	115	12	of	of	ADP
asir-946	115	13	v	v	ADV
asir-946	115	14	-	-	PUNCT
asir-946	115	15	shaped	shape	VERB
asir-946	115	16	defect	defect	NOUN
asir-946	115	17	in	in	ADP
asir-946	115	18	the	the	DET
asir-946	115	19	heterogeneous	heterogeneous	ADJ
asir-946	115	20	ingaasp	ingaasp	NOUN
asir-946	115	21	/	/	SYM
asir-946	115	22	inp	inp	PROPN
asir-946	115	23	array	array	VERB
asir-946	115	24	with	with	ADP
asir-946	115	25	100	100	NUM
asir-946	115	26	nm	nm	ADJ
asir-946	115	27	spacing	spacing	NOUN
asir-946	115	28	.	.	PUNCT
asir-946	116	1	we	we	PRON
asir-946	116	2	showed	show	VERB
asir-946	116	3	that	that	SCONJ
asir-946	116	4	the	the	DET
asir-946	116	5	nucleation	nucleation	NOUN
asir-946	116	6	originated	originate	VERB
asir-946	116	7	from	from	ADP
asir-946	116	8	the	the	DET
asir-946	116	9	phosphorus	phosphorus	NOUN
asir-946	116	10	-	-	PUNCT
asir-946	116	11	deficient	deficient	ADJ
asir-946	116	12	disordering	disordering	NOUN
asir-946	116	13	,	,	PUNCT
asir-946	116	14	likely	likely	ADV
asir-946	116	15	induced	induce	VERB
asir-946	116	16	by	by	ADP
asir-946	116	17	reactive	reactive	ADJ
asir-946	116	18	ion	ion	NOUN
asir-946	116	19	etching	etching	NOUN
asir-946	116	20	.	.	PUNCT
asir-946	117	1	the	the	DET
asir-946	117	2	phosphorus	phosphorus	NOUN
asir-946	117	3	-	-	PUNCT
asir-946	117	4	deficient	deficient	ADJ
asir-946	117	5	,	,	PUNCT
asir-946	117	6	indium	indium	NOUN
asir-946	117	7	-	-	PUNCT
asir-946	117	8	rich	rich	ADJ
asir-946	117	9	compound	compound	NOUN
asir-946	117	10	(	(	PUNCT
asir-946	117	11	in1+xp1	in1+xp1	PROPN
asir-946	117	12	-	-	PUNCT
asir-946	117	13	x	x	NOUN
asir-946	117	14	)	)	PUNCT
asir-946	117	15	was	be	AUX
asir-946	117	16	also	also	ADV
asir-946	117	17	associated	associate	VERB
asir-946	117	18	with	with	ADP
asir-946	117	19	the	the	DET
asir-946	117	20	triangular	triangular	NOUN
asir-946	117	21	nano	nano	NOUN
asir-946	117	22	-	-	PUNCT
asir-946	117	23	precipitates	precipitate	NOUN
asir-946	117	24	with	with	ADP
asir-946	117	25	sizes	size	NOUN
asir-946	117	26	of	of	ADP
asir-946	117	27	20	20	NUM
asir-946	117	28	-	-	SYM
asir-946	117	29	30	30	NUM
asir-946	117	30	nm	nm	NOUN
asir-946	117	31	,	,	PUNCT
asir-946	117	32	located	locate	VERB
asir-946	117	33	adjacent	adjacent	ADJ
asir-946	117	34	to	to	ADP
asir-946	117	35	the	the	DET
asir-946	117	36	inp	inp	PROPN
asir-946	117	37	cap	cap	NOUN
asir-946	117	38	.	.	PUNCT
asir-946	118	1	the	the	DET
asir-946	118	2	ratio	ratio	NOUN
asir-946	118	3	of	of	ADP
asir-946	118	4	in	in	ADP
asir-946	118	5	to	to	ADP
asir-946	118	6	p	p	NOUN
asir-946	118	7	in	in	ADP
asir-946	118	8	the	the	DET
asir-946	118	9	non	non	ADJ
asir-946	118	10	-	-	ADJ
asir-946	118	11	stoichiometric	stoichiometric	ADJ
asir-946	118	12	compound	compound	NOUN
asir-946	118	13	was	be	AUX
asir-946	118	14	increasing	increase	VERB
asir-946	118	15	from	from	ADP
asir-946	118	16	the	the	DET
asir-946	118	17	bottom	bottom	NOUN
asir-946	118	18	to	to	ADP
asir-946	118	19	the	the	DET
asir-946	118	20	upper	upper	ADJ
asir-946	118	21	portion	portion	NOUN
asir-946	118	22	of	of	ADP
asir-946	118	23	the	the	DET
asir-946	118	24	v	v	NOUN
asir-946	118	25	-	-	PUNCT
asir-946	118	26	defect	defect	NOUN
asir-946	118	27	likely	likely	ADJ
asir-946	118	28	due	due	ADP
asir-946	118	29	to	to	ADP
asir-946	118	30	antisite	antisite	ADJ
asir-946	118	31	defect	defect	NOUN
asir-946	118	32	mechanism	mechanism	NOUN
asir-946	118	33	.	.	PUNCT
asir-946	119	1	during	during	ADP
asir-946	119	2	the	the	DET
asir-946	119	3	defect	defect	NOUN
asir-946	119	4	growth	growth	NOUN
asir-946	119	5	process	process	NOUN
asir-946	119	6	,	,	PUNCT
asir-946	119	7	certain	certain	ADJ
asir-946	119	8	phosphorus	phosphorus	NOUN
asir-946	119	9	-	-	PUNCT
asir-946	119	10	deficient	deficient	ADJ
asir-946	119	11	nucleation	nucleation	NOUN
asir-946	119	12	sites	site	NOUN
asir-946	119	13	expanded	expand	VERB
asir-946	119	14	to	to	PART
asir-946	119	15	form	form	VERB
asir-946	119	16	open	open	ADJ
asir-946	119	17	,	,	PUNCT
asir-946	119	18	inverted	invert	VERB
asir-946	119	19	pyramid	pyramid	NOUN
asir-946	119	20	v	v	NOUN
asir-946	119	21	-	-	NOUN
asir-946	119	22	defects	defect	NOUN
asir-946	119	23	with	with	ADP
asir-946	119	24	sidewalls	sidewall	NOUN
asir-946	119	25	following	follow	VERB
asir-946	119	26	the	the	DET
asir-946	119	27	crystallographic	crystallographic	ADJ
asir-946	119	28	planes	plane	NOUN
asir-946	119	29	.	.	PUNCT
asir-946	120	1	acknowledgment	acknowledgment	NOUN
asir-946	120	2	the	the	DET
asir-946	120	3	authors	author	NOUN
asir-946	120	4	would	would	AUX
asir-946	120	5	like	like	VERB
asir-946	120	6	to	to	PART
asir-946	120	7	thank	thank	VERB
asir-946	120	8	ma	ma	PROPN
asir-946	120	9	-	-	PUNCT
asir-946	120	10	tek	tek	PROPN
asir-946	120	11	(	(	PUNCT
asir-946	120	12	hsinchu	hsinchu	PROPN
asir-946	120	13	,	,	PUNCT
asir-946	120	14	taiwan	taiwan	PROPN
asir-946	120	15	)	)	PUNCT
asir-946	120	16	for	for	ADP
asir-946	120	17	their	their	PRON
asir-946	120	18	assistance	assistance	NOUN
asir-946	120	19	in	in	ADP
asir-946	120	20	tem	tem	PROPN
asir-946	120	21	sample	sample	NOUN
asir-946	120	22	preparation	preparation	NOUN
asir-946	120	23	.	.	PUNCT
asir-946	121	1	references	reference	NOUN
asir-946	121	2	bae	bae	PROPN
asir-946	121	3	,	,	PUNCT
asir-946	121	4	j.	j.	PROPN
asir-946	121	5	w.	w.	PROPN
asir-946	121	6	,	,	PUNCT
asir-946	121	7	jeong	jeong	PROPN
asir-946	121	8	,	,	PUNCT
asir-946	121	9	c.	c.	PROPN
asir-946	121	10	h.	h.	PROPN
asir-946	121	11	,	,	PUNCT
asir-946	121	12	lim	lim	PROPN
asir-946	121	13	,	,	PUNCT
asir-946	121	14	j.	j.	PROPN
asir-946	121	15	t.	t.	PROPN
asir-946	121	16	,	,	PUNCT
asir-946	121	17	lee	lee	PROPN
asir-946	121	18	,	,	PUNCT
asir-946	121	19	h.	h.	PROPN
asir-946	121	20	c.	c.	PROPN
asir-946	121	21	,	,	PUNCT
asir-946	121	22	yeom	yeom	PROPN
asir-946	121	23	,	,	PUNCT
asir-946	121	24	g.	g.	PROPN
asir-946	121	25	y.	y.	PROPN
asir-946	121	26	,	,	PUNCT
asir-946	121	27	&	&	CCONJ
asir-946	121	28	adesida	adesida	PROPN
asir-946	121	29	,	,	PUNCT
asir-946	121	30	i.	i.	PROPN
asir-946	121	31	(	(	PUNCT
asir-946	121	32	2007	2007	NUM
asir-946	121	33	)	)	PUNCT
asir-946	121	34	.	.	PUNCT
asir-946	122	1	anisotropic	anisotropic	NOUN
asir-946	122	2	etching	etch	VERB
asir-946	122	3	of	of	ADP
asir-946	122	4	inp	inp	PROPN
asir-946	122	5	and	and	CCONJ
asir-946	122	6	ingaas	ingaa	VERB
asir-946	122	7	by	by	ADP
asir-946	122	8	using	use	VERB
asir-946	122	9	an	an	DET
asir-946	122	10	inductively	inductively	ADV
asir-946	122	11	coupled	couple	VERB
asir-946	122	12	plasma	plasma	NOUN
asir-946	122	13	in	in	ADP
asir-946	122	14	cl2	cl2	PROPN
asir-946	122	15	/	/	SYM
asir-946	122	16	n2	n2	PROPN
asir-946	122	17	and	and	CCONJ
asir-946	122	18	cl2	cl2	PROPN
asir-946	122	19	/	/	SYM
asir-946	122	20	ar	ar	NOUN
asir-946	122	21	mixtures	mixture	NOUN
asir-946	122	22	at	at	ADP
asir-946	122	23	low	low	ADJ
asir-946	122	24	bias	bias	NOUN
asir-946	122	25	power	power	NOUN
asir-946	122	26	.	.	PUNCT
asir-946	123	1	j.	j.	PROPN
asir-946	123	2	korean	korean	PROPN
asir-946	123	3	phys	phys	PROPN
asir-946	123	4	.	.	PUNCT
asir-946	124	1	soc	soc	PROPN
asir-946	124	2	.	.	PROPN
asir-946	124	3	,	,	PUNCT
asir-946	124	4	50(4	50(4	NUM
asir-946	124	5	)	)	PUNCT
asir-946	124	6	,	,	PUNCT
asir-946	124	7	1130	1130	NUM
asir-946	124	8	-	-	SYM
asir-946	124	9	1135	1135	NUM
asir-946	124	10	.	.	PUNCT
asir-946	125	1	https://doi.org/10.3938/jkps.50.1130	https://doi.org/10.3938/jkps.50.1130	ADJ
asir-946	125	2	bowers	bower	NOUN
asir-946	125	3	,	,	PUNCT
asir-946	125	4	j.	j.	PROPN
asir-946	125	5	e.	e.	PROPN
asir-946	125	6	,	,	PUNCT
asir-946	125	7	ramaswamy	ramaswamy	ADJ
asir-946	125	8	,	,	PUNCT
asir-946	125	9	a.	a.	NOUN
asir-946	125	10	,	,	PUNCT
asir-946	125	11	dai	dai	PROPN
asir-946	125	12	,	,	PUNCT
asir-946	125	13	d.	d.	PROPN
asir-946	125	14	,	,	PUNCT
asir-946	125	15	zaoui	zaoui	PROPN
asir-946	125	16	,	,	PUNCT
asir-946	125	17	w.	w.	PROPN
asir-946	125	18	s.	s.	PROPN
asir-946	125	19	,	,	PUNCT
asir-946	125	20	kang	kang	PROPN
asir-946	125	21	,	,	PUNCT
asir-946	125	22	y.	y.	PROPN
asir-946	125	23	,	,	PUNCT
asir-946	125	24	yin	yin	PROPN
asir-946	125	25	,	,	PUNCT
asir-946	125	26	t.	t.	PROPN
asir-946	125	27	,	,	PUNCT
asir-946	125	28	&	&	CCONJ
asir-946	125	29	morse	morse	PROPN
asir-946	125	30	,	,	PUNCT
asir-946	125	31	m.	m.	NOUN
asir-946	125	32	(	(	PUNCT
asir-946	125	33	2010	2010	NUM
asir-946	125	34	)	)	PUNCT
asir-946	125	35	.	.	PUNCT
asir-946	126	1	recent	recent	ADJ
asir-946	126	2	advances	advance	NOUN
asir-946	126	3	in	in	ADP
asir-946	126	4	ge	ge	PROPN
asir-946	126	5	/	/	SYM
asir-946	126	6	si	si	X
asir-946	126	7	pin	pin	PROPN
asir-946	126	8	and	and	CCONJ
asir-946	126	9	apd	apd	PROPN
asir-946	126	10	photodetectors	photodetector	NOUN
asir-946	126	11	.	.	PUNCT
asir-946	127	1	physica	physica	PROPN
asir-946	127	2	status	status	NOUN
asir-946	127	3	solidi	solidi	PROPN
asir-946	127	4	c	c	PROPN
asir-946	127	5	,	,	PUNCT
asir-946	127	6	7(10	7(10	NUM
asir-946	127	7	)	)	PUNCT
asir-946	127	8	,	,	PUNCT
asir-946	127	9	2526	2526	NUM
asir-946	127	10	-	-	SYM
asir-946	127	11	2531	2531	NUM
asir-946	127	12	.	.	PUNCT
asir-946	128	1	https://doi.org/10.1002/pssc.200983875	https://doi.org/10.1002/pssc.200983875	ADJ
asir-946	128	2	charlier	charlier	NOUN
asir-946	128	3	,	,	PUNCT
asir-946	128	4	j.-c	j.-c	PROPN
asir-946	128	5	.	.	PUNCT
asir-946	129	1	(	(	PUNCT
asir-946	129	2	2002	2002	NUM
asir-946	129	3	)	)	PUNCT
asir-946	129	4	.	.	PUNCT
asir-946	130	1	defects	defect	NOUN
asir-946	130	2	in	in	ADP
asir-946	130	3	carbon	carbon	NOUN
asir-946	130	4	nanotubes	nanotube	NOUN
asir-946	130	5	.	.	PUNCT
asir-946	131	1	accouts	accout	NOUN
asir-946	131	2	of	of	ADP
asir-946	131	3	chemical	chemical	NOUN
asir-946	131	4	research	research	NOUN
asir-946	131	5	,	,	PUNCT
asir-946	131	6	35(12	35(12	NUM
asir-946	131	7	)	)	PUNCT
asir-946	131	8	,	,	PUNCT
asir-946	131	9	1063	1063	NUM
asir-946	131	10	-	-	SYM
asir-946	131	11	1069	1069	NUM
asir-946	131	12	.	.	PUNCT
asir-946	132	1	https://doi.org/10.1021/ar010166k	https://doi.org/10.1021/ar010166k	NOUN
asir-946	132	2	chen	chen	PROPN
asir-946	132	3	,	,	PUNCT
asir-946	132	4	y.	y.	PROPN
asir-946	132	5	,	,	PUNCT
asir-946	132	6	takeuchi	takeuchi	PROPN
asir-946	132	7	,	,	PUNCT
asir-946	132	8	t.	t.	PROPN
asir-946	132	9	,	,	PUNCT
asir-946	132	10	amano	amano	PROPN
asir-946	132	11	,	,	PUNCT
asir-946	132	12	h.	h.	PROPN
asir-946	132	13	,	,	PUNCT
asir-946	132	14	akasaki	akasaki	PROPN
asir-946	132	15	,	,	PUNCT
asir-946	132	16	i.	i.	PROPN
asir-946	132	17	,	,	PUNCT
asir-946	132	18	yamada	yamada	PROPN
asir-946	132	19	,	,	PUNCT
asir-946	132	20	n.	n.	PROPN
asir-946	132	21	,	,	PUNCT
asir-946	132	22	kaneko	kaneko	PROPN
asir-946	132	23	,	,	PUNCT
asir-946	132	24	y.	y.	PROPN
asir-946	132	25	,	,	PUNCT
asir-946	132	26	&	&	CCONJ
asir-946	132	27	wang	wang	PROPN
asir-946	132	28	,	,	PUNCT
asir-946	132	29	s.	s.	PROPN
asir-946	132	30	y.	y.	PROPN
asir-946	132	31	(	(	PUNCT
asir-946	132	32	1998	1998	NUM
asir-946	132	33	)	)	PUNCT
asir-946	132	34	.	.	PUNCT
asir-946	133	1	pit	pit	NOUN
asir-946	133	2	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	NOUN
asir-946	133	3	applied	apply	VERB
asir-946	133	4	science	science	NOUN
asir-946	133	5	and	and	CCONJ
asir-946	133	6	innovative	innovative	ADJ
asir-946	133	7	research	research	NOUN
asir-946	133	8	vol	vol	NOUN
asir-946	133	9	.	.	PROPN
asir-946	134	1	1	1	NUM
asir-946	134	2	,	,	PUNCT
asir-946	134	3	no	no	INTJ
asir-946	134	4	.	.	NOUN
asir-946	134	5	1	1	NUM
asir-946	134	6	,	,	PUNCT
asir-946	134	7	2017	2017	NUM
asir-946	134	8	78	78	NUM
asir-946	134	9	published	publish	VERB
asir-946	134	10	by	by	ADP
asir-946	134	11	scholink	scholink	PROPN
asir-946	134	12	inc	inc	PROPN
asir-946	134	13	.	.	PROPN
asir-946	134	14	formation	formation	NOUN
asir-946	134	15	in	in	ADP
asir-946	134	16	gainn	gainn	ADJ
asir-946	134	17	quantum	quantum	ADJ
asir-946	134	18	wells	well	NOUN
asir-946	134	19	.	.	PUNCT
asir-946	135	1	applied	apply	VERB
asir-946	135	2	physics	physics	NOUN
asir-946	135	3	letters	letter	NOUN
asir-946	135	4	,	,	PUNCT
asir-946	135	5	72(6	72(6	NOUN
asir-946	135	6	)	)	PUNCT
asir-946	135	7	,	,	PUNCT
asir-946	135	8	710	710	NUM
asir-946	135	9	-	-	SYM
asir-946	135	10	712	712	NUM
asir-946	135	11	.	.	PUNCT
asir-946	136	1	https://doi.org/10.1063/1.120853	https://doi.org/10.1063/1.120853	PROPN
asir-946	136	2	collins	collins	PROPN
asir-946	136	3	,	,	PUNCT
asir-946	136	4	p.	p.	NOUN
asir-946	136	5	g.	g.	PROPN
asir-946	136	6	(	(	PUNCT
asir-946	136	7	2009	2009	NUM
asir-946	136	8	)	)	PUNCT
asir-946	136	9	.	.	PUNCT
asir-946	137	1	defects	defect	NOUN
asir-946	137	2	and	and	CCONJ
asir-946	137	3	disorder	disorder	NOUN
asir-946	137	4	in	in	ADP
asir-946	137	5	carbon	carbon	NOUN
asir-946	137	6	nanotubes	nanotube	NOUN
asir-946	137	7	.	.	PUNCT
asir-946	138	1	oxford	oxford	PROPN
asir-946	138	2	handbook	handbook	PROPN
asir-946	138	3	of	of	ADP
asir-946	138	4	nanoscience	nanoscience	NOUN
asir-946	138	5	and	and	CCONJ
asir-946	138	6	technology	technology	NOUN
asir-946	138	7	:	:	PUNCT
asir-946	138	8	frontiers	frontier	NOUN
asir-946	138	9	and	and	CCONJ
asir-946	138	10	advances	advance	NOUN
asir-946	138	11	(	(	PUNCT
asir-946	138	12	a.	a.	NOUN
asir-946	138	13	v.	v.	PROPN
asir-946	138	14	narlikar	narlikar	PROPN
asir-946	138	15	,	,	PUNCT
asir-946	138	16	&	&	CCONJ
asir-946	138	17	y.	y.	PROPN
asir-946	138	18	y.	y.	PROPN
asir-946	138	19	fu	fu	PROPN
asir-946	138	20	,	,	PUNCT
asir-946	138	21	eds	ed	NOUN
asir-946	138	22	.	.	PUNCT
asir-946	138	23	)	)	PUNCT
asir-946	138	24	.	.	PUNCT
asir-946	139	1	oxford	oxford	NOUN
asir-946	139	2	:	:	PUNCT
asir-946	139	3	oxford	oxford	PROPN
asir-946	139	4	univ	univ	PROPN
asir-946	139	5	.	.	PUNCT
asir-946	140	1	press	press	NOUN
asir-946	140	2	.	.	PUNCT
asir-946	141	1	dregely	dregely	ADV
asir-946	141	2	,	,	PUNCT
asir-946	141	3	d.	d.	PROPN
asir-946	141	4	,	,	PUNCT
asir-946	141	5	taubert	taubert	PROPN
asir-946	141	6	,	,	PUNCT
asir-946	141	7	r.	r.	PROPN
asir-946	141	8	,	,	PUNCT
asir-946	141	9	dorfmüller	dorfmüller	PROPN
asir-946	141	10	,	,	PUNCT
asir-946	141	11	j.	j.	PROPN
asir-946	141	12	,	,	PUNCT
asir-946	141	13	vogelgesang	vogelgesang	PROPN
asir-946	141	14	,	,	PUNCT
asir-946	141	15	r.	r.	PROPN
asir-946	141	16	,	,	PUNCT
asir-946	141	17	kern	kern	PROPN
asir-946	141	18	,	,	PUNCT
asir-946	141	19	k.	k.	PROPN
asir-946	141	20	,	,	PUNCT
asir-946	141	21	&	&	CCONJ
asir-946	141	22	giessen	giessen	PROPN
asir-946	141	23	,	,	PUNCT
asir-946	141	24	h.	h.	PROPN
asir-946	141	25	(	(	PUNCT
asir-946	141	26	2011	2011	NUM
asir-946	141	27	)	)	PUNCT
asir-946	141	28	.	.	PUNCT
asir-946	142	1	3d	3d	PROPN
asir-946	142	2	optical	optical	ADJ
asir-946	142	3	yagi	yagi	NOUN
asir-946	142	4	-	-	PUNCT
asir-946	142	5	uda	uda	NOUN
asir-946	142	6	nanoantenna	nanoantenna	NOUN
asir-946	142	7	array	array	NOUN
asir-946	142	8	.	.	PUNCT
asir-946	143	1	nature	nature	NOUN
asir-946	143	2	communications	communication	NOUN
asir-946	143	3	,	,	PUNCT
asir-946	143	4	2(267	2(267	NUM
asir-946	143	5	)	)	PUNCT
asir-946	143	6	,	,	PUNCT
asir-946	143	7	1	1	NUM
asir-946	143	8	-	-	SYM
asir-946	143	9	7	7	NUM
asir-946	143	10	.	.	PUNCT
asir-946	143	11	https://doi.org/10.1038/ncomms1268	https://doi.org/10.1038/ncomms1268	PROPN
asir-946	143	12	drexler	drexler	PROPN
asir-946	143	13	,	,	PUNCT
asir-946	143	14	k.	k.	PROPN
asir-946	143	15	e.	e.	PROPN
asir-946	143	16	(	(	PUNCT
asir-946	143	17	1986	1986	NUM
asir-946	143	18	)	)	PUNCT
asir-946	143	19	.	.	PUNCT
asir-946	144	1	engines	engine	NOUN
asir-946	144	2	of	of	ADP
asir-946	144	3	creation	creation	NOUN
asir-946	144	4	:	:	PUNCT
asir-946	144	5	the	the	DET
asir-946	144	6	coming	come	VERB
asir-946	144	7	era	era	NOUN
asir-946	144	8	of	of	ADP
asir-946	144	9	nanotechnology	nanotechnology	PROPN
asir-946	144	10	.	.	PUNCT
asir-946	145	1	new	new	PROPN
asir-946	145	2	york	york	PROPN
asir-946	145	3	,	,	PUNCT
asir-946	145	4	ny	ny	PROPN
asir-946	145	5	:	:	PUNCT
asir-946	145	6	anchor	anchor	NOUN
asir-946	145	7	books	book	NOUN
asir-946	145	8	.	.	PUNCT
asir-946	146	1	duan	duan	PROPN
asir-946	146	2	,	,	PUNCT
asir-946	146	3	x.	x.	PROPN
asir-946	146	4	,	,	PUNCT
asir-946	146	5	huang	huang	PROPN
asir-946	146	6	,	,	PUNCT
asir-946	146	7	y.	y.	PROPN
asir-946	146	8	,	,	PUNCT
asir-946	146	9	agarwal	agarwal	PROPN
asir-946	146	10	,	,	PUNCT
asir-946	146	11	r.	r.	PROPN
asir-946	146	12	,	,	PUNCT
asir-946	146	13	&	&	CCONJ
asir-946	146	14	lieber	lieber	PROPN
asir-946	146	15	,	,	PUNCT
asir-946	146	16	c.	c.	PROPN
asir-946	146	17	m.	m.	NOUN
asir-946	146	18	(	(	PUNCT
asir-946	146	19	2003	2003	NUM
asir-946	146	20	)	)	PUNCT
asir-946	146	21	.	.	PUNCT
asir-946	147	1	single	single	ADJ
asir-946	147	2	-	-	PUNCT
asir-946	147	3	nanowire	nanowire	ADJ
asir-946	147	4	electrically	electrically	ADV
asir-946	147	5	driven	drive	VERB
asir-946	147	6	lasers	laser	NOUN
asir-946	147	7	.	.	PUNCT
asir-946	148	1	nature	nature	NOUN
asir-946	148	2	,	,	PUNCT
asir-946	148	3	421	421	NUM
asir-946	148	4	,	,	PUNCT
asir-946	148	5	241	241	NUM
asir-946	148	6	-	-	SYM
asir-946	148	7	245	245	NUM
asir-946	148	8	.	.	PUNCT
asir-946	149	1	https://doi.org/10.1038/nature01353	https://doi.org/10.1038/nature01353	PROPN
asir-946	149	2	duan	duan	PROPN
asir-946	149	3	,	,	PUNCT
asir-946	149	4	x.	x.	PROPN
asir-946	149	5	,	,	PUNCT
asir-946	149	6	huang	huang	PROPN
asir-946	149	7	,	,	PUNCT
asir-946	149	8	y.	y.	PROPN
asir-946	149	9	,	,	PUNCT
asir-946	149	10	cui	cui	PROPN
asir-946	149	11	,	,	PUNCT
asir-946	149	12	y.	y.	PROPN
asir-946	149	13	,	,	PUNCT
asir-946	149	14	wang	wang	PROPN
asir-946	149	15	,	,	PUNCT
asir-946	149	16	j.	j.	PROPN
asir-946	149	17	,	,	PUNCT
asir-946	149	18	&	&	CCONJ
asir-946	149	19	lieber	lieber	PROPN
asir-946	149	20	,	,	PUNCT
asir-946	149	21	c.	c.	PROPN
asir-946	149	22	m.	m.	NOUN
asir-946	149	23	(	(	PUNCT
asir-946	149	24	2001	2001	NUM
asir-946	149	25	)	)	PUNCT
asir-946	149	26	.	.	PUNCT
asir-946	150	1	indium	indium	NOUN
asir-946	150	2	phosphide	phosphide	NOUN
asir-946	150	3	nanowires	nanowire	NOUN
asir-946	150	4	as	as	ADP
asir-946	150	5	building	build	VERB
asir-946	150	6	blocks	block	NOUN
asir-946	150	7	for	for	ADP
asir-946	150	8	nanoscale	nanoscale	NOUN
asir-946	150	9	electronic	electronic	ADJ
asir-946	150	10	and	and	CCONJ
asir-946	150	11	optoelectronic	optoelectronic	ADJ
asir-946	150	12	devices	device	NOUN
asir-946	150	13	.	.	PUNCT
asir-946	151	1	nature	nature	NOUN
asir-946	151	2	,	,	PUNCT
asir-946	151	3	409	409	NUM
asir-946	151	4	,	,	PUNCT
asir-946	151	5	66	66	NUM
asir-946	151	6	-	-	SYM
asir-946	151	7	69	69	NUM
asir-946	151	8	.	.	PUNCT
asir-946	152	1	https://doi.org/10.1038/35051047	https://doi.org/10.1038/35051047	PROPN
asir-946	153	1	fan	fan	PROPN
asir-946	153	2	,	,	PUNCT
asir-946	153	3	y.	y.	PROPN
asir-946	153	4	,	,	PUNCT
asir-946	153	5	goldsmith	goldsmith	PROPN
asir-946	153	6	,	,	PUNCT
asir-946	153	7	b.	b.	PROPN
asir-946	153	8	r.	r.	PROPN
asir-946	153	9	,	,	PUNCT
asir-946	153	10	&	&	CCONJ
asir-946	153	11	collins	collins	PROPN
asir-946	153	12	,	,	PUNCT
asir-946	153	13	p.	p.	NOUN
asir-946	153	14	g.	g.	PROPN
asir-946	153	15	(	(	PUNCT
asir-946	153	16	2005	2005	NUM
asir-946	153	17	)	)	PUNCT
asir-946	153	18	.	.	PUNCT
asir-946	154	1	identifying	identify	VERB
asir-946	154	2	and	and	CCONJ
asir-946	154	3	counting	counting	NOUN
asir-946	154	4	point	point	NOUN
asir-946	154	5	defects	defect	NOUN
asir-946	154	6	in	in	ADP
asir-946	154	7	carbon	carbon	NOUN
asir-946	154	8	nanotubes	nanotube	NOUN
asir-946	154	9	.	.	PUNCT
asir-946	155	1	nature	nature	NOUN
asir-946	155	2	materials	material	NOUN
asir-946	155	3	,	,	PUNCT
asir-946	155	4	4(12	4(12	NUM
asir-946	155	5	)	)	PUNCT
asir-946	155	6	,	,	PUNCT
asir-946	155	7	906	906	NUM
asir-946	155	8	-	-	SYM
asir-946	155	9	911	911	NUM
asir-946	155	10	.	.	PUNCT
asir-946	156	1	https://doi.org/10.1038/nmat1516	https://doi.org/10.1038/nmat1516	PROPN
asir-946	156	2	feynman	feynman	PROPN
asir-946	156	3	,	,	PUNCT
asir-946	156	4	r.	r.	PROPN
asir-946	156	5	p.	p.	PROPN
asir-946	156	6	(	(	PUNCT
asir-946	156	7	1992	1992	NUM
asir-946	156	8	)	)	PUNCT
asir-946	156	9	.	.	PUNCT
asir-946	157	1	there	there	PRON
asir-946	157	2	is	be	VERB
asir-946	157	3	plenty	plenty	NOUN
asir-946	157	4	of	of	ADP
asir-946	157	5	room	room	NOUN
asir-946	157	6	at	at	ADP
asir-946	157	7	the	the	DET
asir-946	157	8	bottom	bottom	NOUN
asir-946	157	9	.	.	PUNCT
asir-946	158	1	journal	journal	PROPN
asir-946	158	2	microelectromechanical	microelectromechanical	ADJ
asir-946	158	3	systems	system	NOUN
asir-946	158	4	,	,	PUNCT
asir-946	158	5	1(1	1(1	NUM
asir-946	158	6	)	)	PUNCT
asir-946	158	7	,	,	PUNCT
asir-946	158	8	60	60	NUM
asir-946	158	9	-	-	SYM
asir-946	158	10	66	66	NUM
asir-946	158	11	.	.	PUNCT
asir-946	159	1	https://doi.org/10.1109/84.128057	https://doi.org/10.1109/84.128057	PROPN
asir-946	159	2	giannuzzi	giannuzzi	PROPN
asir-946	159	3	,	,	PUNCT
asir-946	159	4	l.	l.	PROPN
asir-946	159	5	a.	a.	PROPN
asir-946	159	6	,	,	PUNCT
asir-946	159	7	drown	drown	VERB
asir-946	159	8	,	,	PUNCT
asir-946	159	9	j.	j.	PROPN
asir-946	159	10	l.	l.	PROPN
asir-946	159	11	,	,	PUNCT
asir-946	159	12	brown	brown	PROPN
asir-946	159	13	,	,	PUNCT
asir-946	159	14	s.	s.	PROPN
asir-946	159	15	r.	r.	PROPN
asir-946	159	16	,	,	PUNCT
asir-946	159	17	irwin	irwin	PROPN
asir-946	159	18	,	,	PUNCT
asir-946	159	19	r.	r.	PROPN
asir-946	159	20	b.	b.	PROPN
asir-946	159	21	,	,	PUNCT
asir-946	159	22	&	&	CCONJ
asir-946	159	23	stevie	stevie	PROPN
asir-946	159	24	,	,	PUNCT
asir-946	159	25	f.	f.	PROPN
asir-946	159	26	a.	a.	PROPN
asir-946	159	27	(	(	PUNCT
asir-946	159	28	1997	1997	NUM
asir-946	159	29	)	)	PUNCT
asir-946	159	30	.	.	PUNCT
asir-946	160	1	preparation	preparation	NOUN
asir-946	160	2	of	of	ADP
asir-946	160	3	transmission	transmission	NOUN
asir-946	160	4	electron	electron	NOUN
asir-946	160	5	microscopy	microscopy	NOUN
asir-946	160	6	cross	cross	NOUN
asir-946	160	7	-	-	ADJ
asir-946	160	8	section	section	ADJ
asir-946	160	9	specimens	specimen	NOUN
asir-946	160	10	using	use	VERB
asir-946	160	11	focused	focus	VERB
asir-946	160	12	ion	ion	NOUN
asir-946	160	13	beam	beam	NOUN
asir-946	160	14	milling	milling	NOUN
asir-946	160	15	,	,	PUNCT
asir-946	160	16	materials	material	NOUN
asir-946	160	17	research	research	NOUN
asir-946	160	18	society	society	NOUN
asir-946	160	19	symposium	symposium	NOUN
asir-946	160	20	proceedings	proceeding	NOUN
asir-946	160	21	,	,	PUNCT
asir-946	160	22	480	480	NUM
asir-946	160	23	,	,	PUNCT
asir-946	160	24	19	19	NUM
asir-946	160	25	.	.	PUNCT
asir-946	160	26	giannuzzi	giannuzzi	PROPN
asir-946	160	27	,	,	PUNCT
asir-946	160	28	l.	l.	PROPN
asir-946	160	29	a.	a.	PROPN
asir-946	160	30	,	,	PUNCT
asir-946	160	31	kempshall	kempshall	PROPN
asir-946	160	32	,	,	PUNCT
asir-946	160	33	b.	b.	PROPN
asir-946	160	34	w.	w.	PROPN
asir-946	160	35	,	,	PUNCT
asir-946	160	36	schwarz	schwarz	PROPN
asir-946	160	37	,	,	PUNCT
asir-946	160	38	s.	s.	PROPN
asir-946	160	39	m.	m.	PROPN
asir-946	160	40	,	,	PUNCT
asir-946	160	41	lomness	lomness	PROPN
asir-946	160	42	,	,	PUNCT
asir-946	160	43	j.	j.	PROPN
asir-946	160	44	k.	k.	PROPN
asir-946	160	45	,	,	PUNCT
asir-946	160	46	prenitzer	prenitzer	PROPN
asir-946	160	47	,	,	PUNCT
asir-946	160	48	b.	b.	PROPN
asir-946	160	49	i.	i.	PROPN
asir-946	160	50	,	,	PUNCT
asir-946	160	51	&	&	CCONJ
asir-946	160	52	stevie	stevie	PROPN
asir-946	160	53	,	,	PUNCT
asir-946	160	54	f.	f.	PROPN
asir-946	160	55	a.	a.	PROPN
asir-946	160	56	(	(	PUNCT
asir-946	160	57	2010	2010	NUM
asir-946	160	58	)	)	PUNCT
asir-946	160	59	.	.	PUNCT
asir-946	161	1	fib	fib	VERB
asir-946	161	2	lift	lift	NOUN
asir-946	161	3	-	-	PUNCT
asir-946	161	4	out	out	ADP
asir-946	161	5	specimen	speciman	NOUN
asir-946	161	6	preparation	preparation	NOUN
asir-946	161	7	techniques	technique	NOUN
asir-946	161	8	ex	ex	NOUN
asir-946	161	9	-	-	NOUN
asir-946	161	10	situ	situ	ADJ
asir-946	161	11	and	and	CCONJ
asir-946	161	12	in	in	ADP
asir-946	161	13	-	-	PUNCT
asir-946	161	14	situ	situ	ADJ
asir-946	161	15	methods	method	NOUN
asir-946	161	16	.	.	PUNCT
asir-946	162	1	introduction	introduction	NOUN
asir-946	162	2	to	to	ADP
asir-946	162	3	focused	focus	VERB
asir-946	162	4	ion	ion	NOUN
asir-946	162	5	beams	beam	NOUN
asir-946	162	6	:	:	PUNCT
asir-946	162	7	instrumentation	instrumentation	NOUN
asir-946	162	8	,	,	PUNCT
asir-946	162	9	theory	theory	NOUN
asir-946	162	10	,	,	PUNCT
asir-946	162	11	techniques	technique	NOUN
asir-946	162	12	and	and	CCONJ
asir-946	162	13	practice	practice	NOUN
asir-946	162	14	(	(	PUNCT
asir-946	162	15	chapter	chapter	NOUN
asir-946	162	16	10	10	NUM
asir-946	162	17	,	,	PUNCT
asir-946	162	18	pp	pp	ADJ
asir-946	162	19	.	.	PUNCT
asir-946	163	1	201	201	NUM
asir-946	163	2	-	-	SYM
asir-946	163	3	228	228	NUM
asir-946	163	4	)	)	PUNCT
asir-946	163	5	.	.	PUNCT
asir-946	164	1	new	new	PROPN
asir-946	164	2	york	york	PROPN
asir-946	164	3	,	,	PUNCT
asir-946	164	4	ny	ny	PROPN
asir-946	164	5	:	:	PUNCT
asir-946	164	6	springer	springer	NOUN
asir-946	164	7	.	.	PUNCT
asir-946	165	1	gilfert	gilfert	PROPN
asir-946	165	2	,	,	PUNCT
asir-946	165	3	c.	c.	PROPN
asir-946	165	4	,	,	PUNCT
asir-946	165	5	pavelescu	pavelescu	PROPN
asir-946	165	6	,	,	PUNCT
asir-946	165	7	e.-m	e.-m	PROPN
asir-946	165	8	.	.	PROPN
asir-946	165	9	,	,	PUNCT
asir-946	165	10	&	&	CCONJ
asir-946	165	11	reithmaier	reithmaier	PROPN
asir-946	165	12	,	,	PUNCT
asir-946	165	13	j.	j.	PROPN
asir-946	165	14	p.	p.	PROPN
asir-946	165	15	(	(	PUNCT
asir-946	165	16	2010	2010	NUM
asir-946	165	17	)	)	PUNCT
asir-946	165	18	.	.	PUNCT
asir-946	166	1	influence	influence	NOUN
asir-946	166	2	of	of	ADP
asir-946	166	3	the	the	DET
asir-946	166	4	as2	as2	PROPN
asir-946	166	5	/	/	SYM
asir-946	166	6	as4	as4	PROPN
asir-946	166	7	growth	growth	NOUN
asir-946	166	8	modes	mode	NOUN
asir-946	166	9	on	on	ADP
asir-946	166	10	the	the	DET
asir-946	166	11	formation	formation	NOUN
asir-946	166	12	of	of	ADP
asir-946	166	13	quantum	quantum	ADJ
asir-946	166	14	dot	dot	NOUN
asir-946	166	15	-	-	PUNCT
asir-946	166	16	like	like	ADJ
asir-946	166	17	inas	inas	PROPN
asir-946	166	18	islands	island	NOUN
asir-946	166	19	grown	grow	VERB
asir-946	166	20	on	on	ADP
asir-946	166	21	inalgaas	inalgaas	PROPN
asir-946	166	22	/	/	SYM
asir-946	166	23	inp	inp	PROPN
asir-946	166	24	(	(	PUNCT
asir-946	166	25	100	100	NUM
asir-946	166	26	)	)	PUNCT
asir-946	166	27	.	.	PUNCT
asir-946	167	1	applied	apply	VERB
asir-946	167	2	physics	physics	NOUN
asir-946	167	3	letters	letter	NOUN
asir-946	167	4	,	,	PUNCT
asir-946	167	5	96(191903	96(191903	NUM
asir-946	167	6	)	)	PUNCT
asir-946	167	7	,	,	PUNCT
asir-946	167	8	1	1	NUM
asir-946	167	9	-	-	SYM
asir-946	167	10	3	3	NUM
asir-946	167	11	.	.	PUNCT
asir-946	167	12	https://doi.org/10.1063/1.3428956	https://doi.org/10.1063/1.3428956	PROPN
asir-946	167	13	huang	huang	PROPN
asir-946	167	14	,	,	PUNCT
asir-946	167	15	j.	j.	PROPN
asir-946	167	16	s.	s.	PROPN
asir-946	167	17	,	,	PUNCT
asir-946	167	18	vartuli	vartuli	PROPN
asir-946	167	19	,	,	PUNCT
asir-946	167	20	c.	c.	PROPN
asir-946	167	21	b.	b.	PROPN
asir-946	167	22	,	,	PUNCT
asir-946	167	23	nguyen	nguyen	NOUN
asir-946	167	24	,	,	PUNCT
asir-946	167	25	t.	t.	NOUN
asir-946	167	26	,	,	PUNCT
asir-946	167	27	bar	bar	NOUN
asir-946	167	28	-	-	PUNCT
asir-946	167	29	chaim	chaim	NOUN
asir-946	167	30	,	,	PUNCT
asir-946	167	31	n.	n.	PROPN
asir-946	167	32	,	,	PUNCT
asir-946	167	33	shearer	shearer	PROPN
asir-946	167	34	,	,	PUNCT
asir-946	167	35	j.	j.	PROPN
asir-946	167	36	,	,	PUNCT
asir-946	167	37	fisher	fisher	PROPN
asir-946	167	38	,	,	PUNCT
asir-946	167	39	c.	c.	PROPN
asir-946	167	40	,	,	PUNCT
asir-946	167	41	&	&	CCONJ
asir-946	167	42	anderson	anderson	PROPN
asir-946	167	43	,	,	PUNCT
asir-946	167	44	s.	s.	PROPN
asir-946	167	45	(	(	PUNCT
asir-946	167	46	2002	2002	NUM
asir-946	167	47	)	)	PUNCT
asir-946	167	48	.	.	PUNCT
asir-946	168	1	correlation	correlation	NOUN
asir-946	168	2	of	of	ADP
asir-946	168	3	resistance	resistance	NOUN
asir-946	168	4	and	and	CCONJ
asir-946	168	5	interfacial	interfacial	ADJ
asir-946	168	6	reaction	reaction	NOUN
asir-946	168	7	of	of	ADP
asir-946	168	8	contacts	contact	NOUN
asir-946	168	9	to	to	ADP
asir-946	168	10	n	n	CCONJ
asir-946	168	11	-	-	PUNCT
asir-946	168	12	type	type	NOUN
asir-946	168	13	inp	inp	PROPN
asir-946	168	14	.	.	PUNCT
asir-946	169	1	journal	journal	PROPN
asir-946	169	2	of	of	ADP
asir-946	169	3	materials	material	NOUN
asir-946	169	4	research	research	NOUN
asir-946	169	5	,	,	PUNCT
asir-946	169	6	17(11	17(11	NUM
asir-946	169	7	)	)	PUNCT
asir-946	169	8	,	,	PUNCT
asir-946	169	9	2929	2929	NUM
asir-946	169	10	-	-	SYM
asir-946	169	11	2934	2934	NUM
asir-946	169	12	.	.	PUNCT
asir-946	170	1	https://doi.org/10.1557/jmr.2002.0424	https://doi.org/10.1557/jmr.2002.0424	PROPN
asir-946	170	2	kim	kim	PROPN
asir-946	170	3	,	,	PUNCT
asir-946	170	4	i.	i.	PROPN
asir-946	170	5	h.	h.	PROPN
asir-946	170	6	,	,	PUNCT
asir-946	170	7	park	park	PROPN
asir-946	170	8	,	,	PUNCT
asir-946	170	9	h.	h.	PROPN
asir-946	170	10	s.	s.	PROPN
asir-946	170	11	,	,	PUNCT
asir-946	170	12	park	park	NOUN
asir-946	170	13	,	,	PUNCT
asir-946	170	14	y.	y.	PROPN
asir-946	170	15	j.	j.	PROPN
asir-946	170	16	,	,	PUNCT
asir-946	170	17	&	&	CCONJ
asir-946	170	18	kim	kim	PROPN
asir-946	170	19	,	,	PUNCT
asir-946	170	20	t.	t.	PROPN
asir-946	170	21	(	(	PUNCT
asir-946	170	22	1998	1998	NUM
asir-946	170	23	)	)	PUNCT
asir-946	170	24	.	.	PUNCT
asir-946	171	1	formation	formation	NOUN
asir-946	171	2	of	of	ADP
asir-946	171	3	v	v	ADV
asir-946	171	4	-	-	PUNCT
asir-946	171	5	shaped	shape	VERB
asir-946	171	6	pits	pit	NOUN
asir-946	171	7	in	in	ADP
asir-946	171	8	ingan	ingan	PROPN
asir-946	171	9	/	/	SYM
asir-946	171	10	gan	gan	PROPN
asir-946	171	11	multiquantum	multiquantum	PROPN
asir-946	171	12	wells	wells	PROPN
asir-946	171	13	and	and	CCONJ
asir-946	171	14	bulk	bulk	ADJ
asir-946	171	15	ingan	ingan	NOUN
asir-946	171	16	films	film	NOUN
asir-946	171	17	.	.	PUNCT
asir-946	172	1	applied	apply	VERB
asir-946	172	2	physics	physics	NOUN
asir-946	172	3	letters	letter	NOUN
asir-946	172	4	,	,	PUNCT
asir-946	172	5	73(12	73(12	NUM
asir-946	172	6	)	)	PUNCT
asir-946	172	7	,	,	PUNCT
asir-946	172	8	1634	1634	NUM
asir-946	172	9	-	-	SYM
asir-946	172	10	1636	1636	NUM
asir-946	172	11	.	.	PUNCT
asir-946	173	1	https://doi.org/10.1063/1.122229	https://doi.org/10.1063/1.122229	PROPN
asir-946	173	2	korgel	korgel	PROPN
asir-946	173	3	,	,	PUNCT
asir-946	173	4	b.	b.	PROPN
asir-946	173	5	a.	a.	PROPN
asir-946	173	6	(	(	PUNCT
asir-946	173	7	2006	2006	NUM
asir-946	173	8	)	)	PUNCT
asir-946	173	9	.	.	PUNCT
asir-946	174	1	semiconductor	semiconductor	NOUN
asir-946	174	2	nanowires	nanowire	NOUN
asir-946	174	3	:	:	PUNCT
asir-946	174	4	twins	twin	NOUN
asir-946	174	5	cause	cause	VERB
asir-946	174	6	kinks	kink	NOUN
asir-946	174	7	.	.	PUNCT
asir-946	175	1	nature	nature	NOUN
asir-946	175	2	materials	material	NOUN
asir-946	175	3	,	,	PUNCT
asir-946	175	4	5	5	NUM
asir-946	175	5	,	,	PUNCT
asir-946	175	6	521	521	NUM
asir-946	175	7	-	-	SYM
asir-946	175	8	522	522	NUM
asir-946	175	9	.	.	PUNCT
asir-946	176	1	https://doi.org/10.1038/nmat1688	https://doi.org/10.1038/nmat1688	NOUN
asir-946	176	2	www.scholink.org/ojs/index.php/asir	www.scholink.org/ojs/index.php/asir	NOUN
asir-946	176	3	applied	apply	VERB
asir-946	176	4	science	science	NOUN
asir-946	176	5	and	and	CCONJ
asir-946	176	6	innovative	innovative	ADJ
asir-946	176	7	research	research	NOUN
asir-946	176	8	vol	vol	NOUN
asir-946	176	9	.	.	PROPN
asir-946	177	1	1	1	NUM
asir-946	177	2	,	,	PUNCT
asir-946	177	3	no	no	INTJ
asir-946	177	4	.	.	NOUN
asir-946	177	5	1	1	NUM
asir-946	177	6	,	,	PUNCT
asir-946	177	7	2017	2017	NUM
asir-946	177	8	79	79	NUM
asir-946	177	9	published	publish	VERB
asir-946	177	10	by	by	ADP
asir-946	177	11	scholink	scholink	PROPN
asir-946	177	12	inc	inc	PROPN
asir-946	177	13	.	.	PROPN
asir-946	177	14	mattila	mattila	PROPN
asir-946	177	15	,	,	PUNCT
asir-946	177	16	t.	t.	PROPN
asir-946	177	17	,	,	PUNCT
asir-946	177	18	&	&	CCONJ
asir-946	177	19	nieminen	nieminen	PROPN
asir-946	177	20	,	,	PUNCT
asir-946	177	21	r.	r.	PROPN
asir-946	177	22	m.	m.	PROPN
asir-946	177	23	(	(	PUNCT
asir-946	177	24	1995	1995	NUM
asir-946	177	25	)	)	PUNCT
asir-946	177	26	.	.	PUNCT
asir-946	178	1	direct	direct	ADJ
asir-946	178	2	antisite	antisite	ADJ
asir-946	178	3	formation	formation	NOUN
asir-946	178	4	in	in	ADP
asir-946	178	5	electron	electron	NOUN
asir-946	178	6	irradiation	irradiation	NOUN
asir-946	178	7	of	of	ADP
asir-946	178	8	gaas	gaas	NOUN
asir-946	178	9	.	.	PUNCT
asir-946	179	1	physical	physical	ADJ
asir-946	179	2	review	review	NOUN
asir-946	179	3	letters	letter	NOUN
asir-946	179	4	,	,	PUNCT
asir-946	179	5	74(14	74(14	PROPN
asir-946	179	6	)	)	PUNCT
asir-946	179	7	,	,	PUNCT
asir-946	179	8	2721	2721	NUM
asir-946	179	9	-	-	SYM
asir-946	179	10	2724	2724	NUM
asir-946	179	11	.	.	PUNCT
asir-946	180	1	https://doi.org/10.1103/physrevlett.74.2721	https://doi.org/10.1103/physrevlett.74.2721	PROPN
asir-946	180	2	narayan	narayan	PROPN
asir-946	180	3	,	,	PUNCT
asir-946	180	4	r.	r.	PROPN
asir-946	180	5	j.	j.	PROPN
asir-946	180	6	,	,	PUNCT
asir-946	180	7	kumta	kumta	PROPN
asir-946	180	8	,	,	PUNCT
asir-946	180	9	p.	p.	PROPN
asir-946	180	10	n.	n.	NOUN
asir-946	180	11	,	,	PUNCT
asir-946	180	12	sfeir	sfeir	NOUN
asir-946	180	13	,	,	PUNCT
asir-946	180	14	c.	c.	PROPN
asir-946	180	15	,	,	PUNCT
asir-946	180	16	lee	lee	PROPN
asir-946	180	17	,	,	PUNCT
asir-946	180	18	d.-h	d.-h	PROPN
asir-946	180	19	.	.	PUNCT
asir-946	180	20	,	,	PUNCT
asir-946	180	21	choi	choi	PROPN
asir-946	180	22	,	,	PUNCT
asir-946	180	23	d.	d.	PROPN
asir-946	180	24	,	,	PUNCT
asir-946	180	25	&	&	CCONJ
asir-946	180	26	olton	olton	PROPN
asir-946	180	27	,	,	PUNCT
asir-946	180	28	d.	d.	PROPN
asir-946	180	29	(	(	PUNCT
asir-946	180	30	2004	2004	NUM
asir-946	180	31	)	)	PUNCT
asir-946	180	32	.	.	PUNCT
asir-946	181	1	nanostructured	nanostructure	VERB
asir-946	181	2	ceramics	ceramic	NOUN
asir-946	181	3	in	in	ADP
asir-946	181	4	medical	medical	ADJ
asir-946	181	5	devices	device	NOUN
asir-946	181	6	:	:	PUNCT
asir-946	181	7	applications	application	NOUN
asir-946	181	8	and	and	CCONJ
asir-946	181	9	prospects	prospect	NOUN
asir-946	181	10	.	.	PUNCT
asir-946	182	1	journal	journal	NOUN
asir-946	182	2	of	of	ADP
asir-946	182	3	the	the	DET
asir-946	182	4	minerals	mineral	NOUN
asir-946	182	5	,	,	PUNCT
asir-946	182	6	metals	metal	NOUN
asir-946	182	7	&	&	CCONJ
asir-946	182	8	materials	material	NOUN
asir-946	182	9	society	society	NOUN
asir-946	182	10	,	,	PUNCT
asir-946	182	11	56(10	56(10	NUM
asir-946	182	12	)	)	PUNCT
asir-946	182	13	,	,	PUNCT
asir-946	182	14	38	38	NUM
asir-946	182	15	-	-	SYM
asir-946	182	16	43	43	NUM
asir-946	182	17	.	.	PUNCT
asir-946	183	1	https://doi.org/10.1007/s11837-004-0289-x	https://doi.org/10.1007/s11837-004-0289-x	PROPN
asir-946	183	2	paull	paull	PROPN
asir-946	183	3	,	,	PUNCT
asir-946	183	4	j.	j.	PROPN
asir-946	183	5	,	,	PUNCT
asir-946	183	6	&	&	CCONJ
asir-946	183	7	lyons	lyons	PROPN
asir-946	183	8	,	,	PUNCT
asir-946	183	9	k.	k.	PROPN
asir-946	183	10	(	(	PUNCT
asir-946	183	11	2008	2008	NUM
asir-946	183	12	)	)	PUNCT
asir-946	183	13	.	.	PUNCT
asir-946	184	1	nanotechnology	nanotechnology	PROPN
asir-946	184	2	:	:	PUNCT
asir-946	184	3	the	the	DET
asir-946	184	4	next	next	ADJ
asir-946	184	5	challenge	challenge	NOUN
asir-946	184	6	for	for	ADP
asir-946	184	7	organics	organic	NOUN
asir-946	184	8	.	.	PUNCT
asir-946	185	1	journal	journal	PROPN
asir-946	185	2	organic	organic	ADJ
asir-946	185	3	systems	system	NOUN
asir-946	185	4	,	,	PUNCT
asir-946	185	5	3(1	3(1	NUM
asir-946	185	6	)	)	PUNCT
asir-946	185	7	,	,	PUNCT
asir-946	185	8	3	3	NUM
asir-946	185	9	-	-	SYM
asir-946	185	10	22	22	NUM
asir-946	185	11	.	.	PUNCT
asir-946	186	1	regan	regan	PROPN
asir-946	186	2	,	,	PUNCT
asir-946	186	3	b.	b.	PROPN
asir-946	186	4	c.	c.	PROPN
asir-946	186	5	,	,	PUNCT
asir-946	186	6	aloni	aloni	PROPN
asir-946	186	7	,	,	PUNCT
asir-946	186	8	s.	s.	PROPN
asir-946	186	9	,	,	PUNCT
asir-946	186	10	jensen	jensen	PROPN
asir-946	186	11	,	,	PUNCT
asir-946	186	12	k.	k.	PROPN
asir-946	186	13	,	,	PUNCT
asir-946	186	14	ritchie	ritchie	PROPN
asir-946	186	15	,	,	PUNCT
asir-946	186	16	r.	r.	PROPN
asir-946	186	17	o.	o.	PROPN
asir-946	186	18	,	,	PUNCT
asir-946	186	19	&	&	CCONJ
asir-946	186	20	zettl	zettl	PROPN
asir-946	186	21	,	,	PUNCT
asir-946	186	22	a.	a.	NOUN
asir-946	186	23	(	(	PUNCT
asir-946	186	24	2005	2005	NUM
asir-946	186	25	)	)	PUNCT
asir-946	186	26	.	.	PUNCT
asir-946	187	1	nanocrystal	nanocrystal	ADJ
asir-946	187	2	-	-	PUNCT
asir-946	187	3	powered	power	VERB
asir-946	187	4	nanomotor	nanomotor	NOUN
asir-946	187	5	.	.	PUNCT
asir-946	188	1	nano	nano	NOUN
asir-946	188	2	letters	letter	NOUN
asir-946	188	3	,	,	PUNCT
asir-946	188	4	5(9	5(9	NUM
asir-946	188	5	)	)	PUNCT
asir-946	188	6	,	,	PUNCT
asir-946	188	7	1730	1730	NUM
asir-946	188	8	-	-	SYM
asir-946	188	9	1733	1733	NUM
asir-946	188	10	.	.	PUNCT
asir-946	189	1	https://doi.org/10.1021/nl0510659	https://doi.org/10.1021/nl0510659	X
asir-946	189	2	saini	saini	PROPN
asir-946	189	3	,	,	PUNCT
asir-946	189	4	r.	r.	PROPN
asir-946	189	5	,	,	PUNCT
asir-946	189	6	saini	saini	PROPN
asir-946	189	7	,	,	PUNCT
asir-946	189	8	s.	s.	PROPN
asir-946	189	9	,	,	PUNCT
asir-946	189	10	&	&	CCONJ
asir-946	189	11	sharma	sharma	PROPN
asir-946	189	12	,	,	PUNCT
asir-946	189	13	s.	s.	PROPN
asir-946	189	14	(	(	PUNCT
asir-946	189	15	2010	2010	NUM
asir-946	189	16	)	)	PUNCT
asir-946	189	17	.	.	PUNCT
asir-946	190	1	nanotechnology	nanotechnology	PROPN
asir-946	190	2	:	:	PUNCT
asir-946	190	3	the	the	DET
asir-946	190	4	future	future	ADJ
asir-946	190	5	medicine	medicine	NOUN
asir-946	190	6	.	.	PUNCT
asir-946	191	1	journal	journal	NOUN
asir-946	191	2	of	of	ADP
asir-946	191	3	cutaneous	cutaneous	ADJ
asir-946	191	4	and	and	CCONJ
asir-946	191	5	aesthetic	aesthetic	ADJ
asir-946	191	6	surgery	surgery	NOUN
asir-946	191	7	,	,	PUNCT
asir-946	191	8	3(1	3(1	NUM
asir-946	191	9	)	)	PUNCT
asir-946	191	10	,	,	PUNCT
asir-946	191	11	32	32	NUM
asir-946	191	12	-	-	SYM
asir-946	191	13	33	33	NUM
asir-946	191	14	.	.	PUNCT
asir-946	192	1	https://doi.org/10.4103/0974-2077.63301	https://doi.org/10.4103/0974-2077.63301	PROPN
asir-946	192	2	seitsonen	seitsonen	NOUN
asir-946	192	3	,	,	PUNCT
asir-946	192	4	a.	a.	NOUN
asir-946	192	5	p.	p.	PROPN
asir-946	192	6	,	,	PUNCT
asir-946	192	7	virkkunen	virkkunen	PROPN
asir-946	192	8	,	,	PUNCT
asir-946	192	9	r.	r.	PROPN
asir-946	192	10	,	,	PUNCT
asir-946	192	11	puska	puska	PROPN
asir-946	192	12	,	,	PUNCT
asir-946	192	13	m.	m.	NOUN
asir-946	192	14	j.	j.	PROPN
asir-946	192	15	,	,	PUNCT
asir-946	192	16	&	&	CCONJ
asir-946	192	17	nieminen	nieminen	PROPN
asir-946	192	18	,	,	PUNCT
asir-946	192	19	r.	r.	PROPN
asir-946	192	20	m.	m.	PROPN
asir-946	192	21	(	(	PUNCT
asir-946	192	22	1994	1994	NUM
asir-946	192	23	)	)	PUNCT
asir-946	192	24	.	.	PUNCT
asir-946	193	1	indium	indium	NOUN
asir-946	193	2	and	and	CCONJ
asir-946	193	3	phosphorus	phosphorus	NOUN
asir-946	193	4	vacancies	vacancy	NOUN
asir-946	193	5	and	and	CCONJ
asir-946	193	6	antisites	antisite	NOUN
asir-946	193	7	in	in	ADP
asir-946	193	8	inp	inp	PROPN
asir-946	193	9	.	.	PUNCT
asir-946	194	1	phys	phy	NOUN
asir-946	194	2	.	.	PUNCT
asir-946	195	1	rev	rev	PROPN
asir-946	195	2	.	.	PROPN
asir-946	195	3	b.	b.	PROPN
asir-946	195	4	,	,	PUNCT
asir-946	195	5	49(8	49(8	PROPN
asir-946	195	6	)	)	PUNCT
asir-946	195	7	,	,	PUNCT
asir-946	195	8	5253	5253	NUM
asir-946	195	9	-	-	SYM
asir-946	195	10	5262	5262	NUM
asir-946	195	11	.	.	PUNCT
asir-946	196	1	https://doi.org/10.1103/physrevb.49.5253	https://doi.org/10.1103/physrevb.49.5253	PROPN
asir-946	196	2	sharma	sharma	PROPN
asir-946	196	3	,	,	PUNCT
asir-946	196	4	n.	n.	PROPN
asir-946	196	5	,	,	PUNCT
asir-946	196	6	thomas	thomas	PROPN
asir-946	196	7	,	,	PUNCT
asir-946	196	8	p.	p.	PROPN
asir-946	196	9	,	,	PUNCT
asir-946	196	10	tricker	tricker	ADV
asir-946	196	11	,	,	PUNCT
asir-946	196	12	d.	d.	PROPN
asir-946	196	13	,	,	PUNCT
asir-946	196	14	&	&	CCONJ
asir-946	196	15	humphreys	humphreys	PROPN
asir-946	196	16	,	,	PUNCT
asir-946	196	17	c.	c.	PROPN
asir-946	196	18	(	(	PUNCT
asir-946	196	19	2000	2000	NUM
asir-946	196	20	)	)	PUNCT
asir-946	196	21	,	,	PUNCT
asir-946	196	22	chemical	chemical	NOUN
asir-946	196	23	mapping	mapping	NOUN
asir-946	196	24	and	and	CCONJ
asir-946	196	25	formation	formation	NOUN
asir-946	196	26	of	of	ADP
asir-946	196	27	v	v	NOUN
asir-946	196	28	-	-	PUNCT
asir-946	196	29	defects	defect	NOUN
asir-946	196	30	in	in	ADP
asir-946	196	31	ingan	ingan	ADJ
asir-946	196	32	multiple	multiple	ADJ
asir-946	196	33	quantum	quantum	ADJ
asir-946	196	34	wells	well	NOUN
asir-946	196	35	.	.	PUNCT
asir-946	197	1	applied	apply	VERB
asir-946	197	2	physics	physics	NOUN
asir-946	197	3	letters	letter	NOUN
asir-946	197	4	,	,	PUNCT
asir-946	197	5	77(9	77(9	NUM
asir-946	197	6	)	)	PUNCT
asir-946	197	7	,	,	PUNCT
asir-946	197	8	1274	1274	NUM
asir-946	197	9	-	-	SYM
asir-946	197	10	1276	1276	NUM
asir-946	197	11	.	.	PUNCT
asir-946	198	1	https://doi.org/10.1063/1.1289904	https://doi.org/10.1063/1.1289904	VERB
asir-946	198	2	sidiropoulos	sidiropoulo	NOUN
asir-946	198	3	,	,	PUNCT
asir-946	198	4	p.	p.	PROPN
asir-946	198	5	h.	h.	PROPN
asir-946	198	6	,	,	PUNCT
asir-946	198	7	röder	röder	PROPN
asir-946	198	8	,	,	PUNCT
asir-946	198	9	r.	r.	PROPN
asir-946	198	10	,	,	PUNCT
asir-946	198	11	geburt	geburt	PROPN
asir-946	198	12	,	,	PUNCT
asir-946	198	13	s.	s.	PROPN
asir-946	198	14	,	,	PUNCT
asir-946	198	15	hess	hess	PROPN
asir-946	198	16	,	,	PUNCT
asir-946	198	17	o.	o.	PROPN
asir-946	198	18	,	,	PUNCT
asir-946	198	19	maier	maier	PROPN
asir-946	198	20	,	,	PUNCT
asir-946	198	21	s.	s.	PROPN
asir-946	198	22	a.	a.	PROPN
asir-946	198	23	,	,	PUNCT
asir-946	198	24	ronning	ronning	NOUN
asir-946	198	25	,	,	PUNCT
asir-946	198	26	c.	c.	PROPN
asir-946	198	27	,	,	PUNCT
asir-946	198	28	&	&	CCONJ
asir-946	198	29	oulton	oulton	PROPN
asir-946	198	30	,	,	PUNCT
asir-946	198	31	r.	r.	PROPN
asir-946	198	32	f.	f.	PROPN
asir-946	198	33	(	(	PUNCT
asir-946	198	34	2014	2014	NUM
asir-946	198	35	)	)	PUNCT
asir-946	198	36	.	.	PUNCT
asir-946	199	1	ultrafast	ultrafast	ADJ
asir-946	199	2	plasmonic	plasmonic	ADJ
asir-946	199	3	nanowire	nanowire	ADJ
asir-946	199	4	lasers	laser	NOUN
asir-946	199	5	near	near	ADP
asir-946	199	6	the	the	DET
asir-946	199	7	surface	surface	NOUN
asir-946	199	8	plasmon	plasmon	ADJ
asir-946	199	9	frequency	frequency	NOUN
asir-946	199	10	.	.	PUNCT
asir-946	200	1	nature	nature	PROPN
asir-946	200	2	physics	physics	PROPN
asir-946	200	3	,	,	PUNCT
asir-946	200	4	10	10	NUM
asir-946	200	5	,	,	PUNCT
asir-946	200	6	870	870	NUM
asir-946	200	7	-	-	SYM
asir-946	200	8	876	876	NUM
asir-946	200	9	.	.	PUNCT
asir-946	200	10	https://doi.org/10.1038/nphys3103	https://doi.org/10.1038/nphys3103	PROPN
asir-946	200	11	tham	tham	PROPN
asir-946	200	12	,	,	PUNCT
asir-946	200	13	d.	d.	PROPN
asir-946	200	14	,	,	PUNCT
asir-946	200	15	nam	nam	PROPN
asir-946	200	16	,	,	PUNCT
asir-946	200	17	c.	c.	PROPN
asir-946	200	18	,	,	PUNCT
asir-946	200	19	&	&	CCONJ
asir-946	200	20	fischer	fischer	PROPN
asir-946	200	21	,	,	PUNCT
asir-946	200	22	j.	j.	PROPN
asir-946	200	23	e.	e.	PROPN
asir-946	200	24	(	(	PUNCT
asir-946	200	25	2006	2006	NUM
asir-946	200	26	)	)	PUNCT
asir-946	200	27	.	.	PUNCT
asir-946	201	1	defects	defect	NOUN
asir-946	201	2	in	in	ADP
asir-946	201	3	gan	gan	PROPN
asir-946	201	4	nanowires	nanowire	NOUN
asir-946	201	5	.	.	PUNCT
asir-946	202	1	advanced	advanced	ADJ
asir-946	202	2	functional	functional	ADJ
asir-946	202	3	materials	material	NOUN
asir-946	202	4	,	,	PUNCT
asir-946	202	5	16(9	16(9	NUM
asir-946	202	6	)	)	PUNCT
asir-946	202	7	,	,	PUNCT
asir-946	202	8	1197	1197	NUM
asir-946	202	9	-	-	SYM
asir-946	202	10	1202	1202	NUM
asir-946	202	11	.	.	PUNCT
asir-946	203	1	https://doi.org/10.1002/adfm.200500807	https://doi.org/10.1002/adfm.200500807	PROPN
asir-946	203	2	tu	tu	PROPN
asir-946	203	3	,	,	PUNCT
asir-946	203	4	k.	k.	PROPN
asir-946	203	5	n.	n.	PROPN
asir-946	203	6	,	,	PUNCT
asir-946	203	7	mayer	mayer	PROPN
asir-946	203	8	,	,	PUNCT
asir-946	203	9	j.	j.	PROPN
asir-946	203	10	w.	w.	PROPN
asir-946	203	11	,	,	PUNCT
asir-946	203	12	&	&	CCONJ
asir-946	203	13	feldman	feldman	PROPN
asir-946	203	14	,	,	PUNCT
asir-946	203	15	l.	l.	PROPN
asir-946	203	16	c.	c.	PROPN
asir-946	203	17	(	(	PUNCT
asir-946	203	18	1996	1996	NUM
asir-946	203	19	)	)	PUNCT
asir-946	203	20	.	.	PUNCT
asir-946	204	1	electronic	electronic	ADJ
asir-946	204	2	thin	thin	ADJ
asir-946	204	3	film	film	NOUN
asir-946	204	4	science	science	NOUN
asir-946	204	5	for	for	ADP
asir-946	204	6	electrical	electrical	ADJ
asir-946	204	7	engineering	engineering	NOUN
asir-946	204	8	and	and	CCONJ
asir-946	204	9	materials	material	NOUN
asir-946	204	10	scientists	scientist	NOUN
asir-946	204	11	.	.	PUNCT
asir-946	205	1	macmillan	macmillan	PROPN
asir-946	205	2	,	,	PUNCT
asir-946	205	3	new	new	PROPN
asir-946	205	4	york	york	PROPN
asir-946	205	5	,	,	PUNCT
asir-946	205	6	ny	ny	PROPN
asir-946	205	7	.	.	PROPN
asir-946	205	8	wang	wang	PROPN
asir-946	205	9	,	,	PUNCT
asir-946	205	10	r.	r.	PROPN
asir-946	205	11	p.	p.	PROPN
asir-946	205	12	(	(	PUNCT
asir-946	205	13	2006	2006	NUM
asir-946	205	14	)	)	PUNCT
asir-946	205	15	.	.	PUNCT
asir-946	206	1	defects	defect	NOUN
asir-946	206	2	in	in	ADP
asir-946	206	3	silicon	silicon	NOUN
asir-946	206	4	nanowires	nanowire	NOUN
asir-946	206	5	.	.	PUNCT
asir-946	207	1	applied	applied	ADJ
asir-946	207	2	physics	physics	NOUN
asir-946	207	3	letters	letter	NOUN
asir-946	207	4	,	,	PUNCT
asir-946	207	5	88	88	NUM
asir-946	207	6	,	,	PUNCT
asir-946	207	7	142104	142104	NUM
asir-946	207	8	-	-	SYM
asir-946	207	9	142106	142106	NUM
asir-946	207	10	.	.	PUNCT
asir-946	208	1	https://doi.org/10.1063/1.2191830	https://doi.org/10.1063/1.2191830	PROPN
asir-946	208	2	wu	wu	PROPN
asir-946	208	3	,	,	PUNCT
asir-946	208	4	x.	x.	PROPN
asir-946	208	5	h.	h.	PROPN
asir-946	208	6	,	,	PUNCT
asir-946	208	7	elsass	elsass	PROPN
asir-946	208	8	,	,	PUNCT
asir-946	208	9	c.	c.	PROPN
asir-946	208	10	r.	r.	PROPN
asir-946	208	11	,	,	PUNCT
asir-946	208	12	abare	abare	PROPN
asir-946	208	13	,	,	PUNCT
asir-946	208	14	a.	a.	PROPN
asir-946	208	15	,	,	PUNCT
asir-946	208	16	mack	mack	PROPN
asir-946	208	17	,	,	PUNCT
asir-946	208	18	m.	m.	NOUN
asir-946	208	19	,	,	PUNCT
asir-946	208	20	keller	keller	PROPN
asir-946	208	21	,	,	PUNCT
asir-946	208	22	s.	s.	PROPN
asir-946	208	23	,	,	PUNCT
asir-946	208	24	petroff	petroff	NOUN
asir-946	208	25	,	,	PUNCT
asir-946	208	26	p.	p.	NOUN
asir-946	208	27	m.	m.	NOUN
asir-946	208	28	,	,	PUNCT
asir-946	208	29	&	&	CCONJ
asir-946	208	30	rosner	rosner	PROPN
asir-946	208	31	,	,	PUNCT
asir-946	208	32	s.	s.	PROPN
asir-946	208	33	j.	j.	PROPN
asir-946	208	34	(	(	PUNCT
asir-946	208	35	1998	1998	NUM
asir-946	208	36	)	)	PUNCT
asir-946	208	37	.	.	PUNCT
asir-946	209	1	structural	structural	ADJ
asir-946	209	2	origin	origin	NOUN
asir-946	209	3	of	of	ADP
asir-946	209	4	v	v	NOUN
asir-946	209	5	-	-	PUNCT
asir-946	209	6	defects	defect	NOUN
asir-946	209	7	and	and	CCONJ
asir-946	209	8	correlation	correlation	NOUN
asir-946	209	9	with	with	ADP
asir-946	209	10	localized	localize	VERB
asir-946	209	11	excitonic	excitonic	ADJ
asir-946	209	12	centers	center	NOUN
asir-946	209	13	in	in	ADP
asir-946	209	14	ingan	ingan	NOUN
asir-946	209	15	/	/	SYM
asir-946	209	16	gan	gan	PROPN
asir-946	209	17	multiple	multiple	ADJ
asir-946	209	18	quantum	quantum	ADJ
asir-946	209	19	wells	well	NOUN
asir-946	209	20	.	.	PUNCT
asir-946	210	1	applied	applied	ADJ
asir-946	210	2	physics	physic	NOUN
asir-946	210	3	.	.	PUNCT
asir-946	211	1	letters	letter	NOUN
asir-946	211	2	,	,	PUNCT
asir-946	211	3	72(6	72(6	NOUN
asir-946	211	4	)	)	PUNCT
asir-946	211	5	,	,	PUNCT
asir-946	211	6	692	692	NUM
asir-946	211	7	-	-	SYM
asir-946	211	8	694	694	NUM
asir-946	211	9	.	.	PUNCT
asir-946	212	1	https://doi.org/10.1063/1.120844	https://doi.org/10.1063/1.120844	PROPN
asir-946	212	2	yoon	yoon	PROPN
asir-946	212	3	,	,	PUNCT
asir-946	212	4	s.	s.	PROPN
asir-946	212	5	f.	f.	PROPN
asir-946	212	6	,	,	PUNCT
asir-946	212	7	&	&	CCONJ
asir-946	212	8	zhang	zhang	PROPN
asir-946	212	9	,	,	PUNCT
asir-946	212	10	h.	h.	PROPN
asir-946	212	11	q.	q.	PROPN
asir-946	212	12	(	(	PUNCT
asir-946	212	13	1998	1998	NUM
asir-946	212	14	)	)	PUNCT
asir-946	212	15	.	.	PUNCT
asir-946	213	1	characteristics	characteristic	NOUN
asir-946	213	2	of	of	ADP
asir-946	213	3	inp	inp	PROPN
asir-946	213	4	epitaxial	epitaxial	ADJ
asir-946	213	5	layers	layer	NOUN
asir-946	213	6	grown	grow	VERB
asir-946	213	7	from	from	ADP
asir-946	213	8	solid	solid	ADJ
asir-946	213	9	phosphorus	phosphorus	NOUN
asir-946	213	10	using	use	VERB
asir-946	213	11	a	a	DET
asir-946	213	12	valve	valve	NOUN
asir-946	213	13	phosphorus	phosphorus	NOUN
asir-946	213	14	cracker	cracker	NOUN
asir-946	213	15	cell	cell	NOUN
asir-946	213	16	.	.	PUNCT
asir-946	214	1	optical	optical	ADJ
asir-946	214	2	materials	material	NOUN
asir-946	214	3	,	,	PUNCT
asir-946	214	4	10(3	10(3	NUM
asir-946	214	5	)	)	PUNCT
asir-946	214	6	,	,	PUNCT
asir-946	214	7	219	219	NUM
asir-946	214	8	-	-	SYM
asir-946	214	9	224	224	NUM
asir-946	214	10	.	.	PUNCT
asir-946	215	1	https://doi.org/10.1016/s0925-3467(97)00179-1	https://doi.org/10.1016/s0925-3467(97)00179-1	PROPN