id	sid	eid	entity	type
bibechana-4828	1	1	microsoft	ORG
bibechana-4828	1	2	shobha kanta lamichhane-	PERSON
bibechana-4828	1	3	8 (2012	DATE
bibechana-4828	1	4	59	CARDINAL
bibechana-4828	2	1	issn 2091-0762	PERSON
bibechana-4828	2	2	kanta lamichhane department of physics	ORG
bibechana-4828	2	3	pokhara	GPE
bibechana-4828	2	4	nepal e	PERSON
bibechana-4828	2	5	sklamichhane@hotmail.com	ORG
bibechana-4828	2	6	31	CARDINAL
bibechana-4828	2	7	may, 2011	DATE
bibechana-4828	2	8	25 july, 2011	DATE
bibechana-4828	2	9	koh	PERSON
bibechana-4828	4	1	111	CARDINAL
bibechana-4828	5	1	111	CARDINAL
bibechana-4828	8	1	koh	PERSON
bibechana-4828	9	1	crystal plane 1	LOC
bibechana-4828	10	1	1–3	CARDINAL
bibechana-4828	10	2	koh	PERSON
bibechana-4828	10	3	tmh (tetryl methylammonium hydroxide	ORG
bibechana-4828	12	1	4	CARDINAL
bibechana-4828	12	2	5	CARDINAL
bibechana-4828	13	1	seidel et al	PERSON
bibechana-4828	14	1	6	CARDINAL
bibechana-4828	19	1	111	CARDINAL
bibechana-4828	19	2	koh	PERSON
bibechana-4828	20	1	110	CARDINAL
bibechana-4828	20	2	100	CARDINAL
bibechana-4828	20	3	111	CARDINAL
bibechana-4828	22	1	one	CARDINAL
bibechana-4828	23	1	shobha kanta lamichhane	PERSON
bibechana-4828	23	2	8 (2012	DATE
bibechana-4828	23	3	59	CARDINAL
bibechana-4828	27	1	two	CARDINAL
bibechana-4828	33	1	111	CARDINAL
bibechana-4828	33	2	100	CARDINAL
bibechana-4828	33	3	koh	PERSON
bibechana-4828	38	1	koh	PERSON
bibechana-4828	39	1	8	CARDINAL
bibechana-4828	40	1	111	CARDINAL
bibechana-4828	40	2	koh	PERSON
bibechana-4828	41	1	koh	PERSON
bibechana-4828	41	2	10	CARDINAL
bibechana-4828	42	1	koh wet	PERSON
bibechana-4828	42	2	11	CARDINAL
bibechana-4828	43	1	koh wet	PERSON
bibechana-4828	44	1	100	CARDINAL
bibechana-4828	44	2	koh	PERSON
bibechana-4828	44	3	111	CARDINAL
bibechana-4828	44	4	54.74°	QUANTITY
bibechana-4828	44	5	100	CARDINAL
bibechana-4828	45	1	koh	PERSON
bibechana-4828	45	2	mesa	ORG
bibechana-4828	47	1	runyan	PERSON
bibechana-4828	47	2	111	CARDINAL
bibechana-4828	47	3	111	CARDINAL
bibechana-4828	48	1	glembocki et al	PERSON
bibechana-4828	48	2	koh	PERSON
bibechana-4828	49	1	seidel et al.	PERSON
bibechana-4828	49	2	1990	DATE
bibechana-4828	50	1	100	CARDINAL
bibechana-4828	50	2	111	CARDINAL
bibechana-4828	50	3	100	CARDINAL
bibechana-4828	50	4	111	CARDINAL
bibechana-4828	50	5	two	CARDINAL
bibechana-4828	50	6	12	CARDINAL
bibechana-4828	54	1	koh	PERSON
bibechana-4828	55	1	100	CARDINAL
bibechana-4828	55	2	koh	PERSON
bibechana-4828	55	3	111	CARDINAL
bibechana-4828	55	4	54.74°	QUANTITY
bibechana-4828	55	5	100	CARDINAL
bibechana-4828	56	1	koh	PERSON
bibechana-4828	56	2	mesa	ORG
bibechana-4828	58	1	runyan	PERSON
bibechana-4828	58	2	111	CARDINAL
bibechana-4828	58	3	shobha kanta lamichhane	PERSON
bibechana-4828	58	4	8 (2012	DATE
bibechana-4828	58	5	59	CARDINAL
bibechana-4828	58	6	111	CARDINAL
bibechana-4828	59	1	10	CARDINAL
bibechana-4828	61	1	100	CARDINAL
bibechana-4828	61	2	111	CARDINAL
bibechana-4828	61	3	100	CARDINAL
bibechana-4828	61	4	111	CARDINAL
bibechana-4828	61	5	two	CARDINAL
bibechana-4828	63	1	2	CARDINAL
bibechana-4828	65	1	soi	ORG
bibechana-4828	65	2	100	CARDINAL
bibechana-4828	66	1	sio2	ORG
bibechana-4828	66	2	2	CARDINAL
bibechana-4828	66	3	450 mm	QUANTITY
bibechana-4828	67	1	4	CARDINAL
bibechana-4828	67	2	12–15 v cm	QUANTITY
bibechana-4828	68	1	koh	PERSON
bibechana-4828	69	1	first	ORDINAL
bibechana-4828	69	2	rca	ORG
bibechana-4828	70	1	450	CARDINAL
bibechana-4828	70	2	koh	ORG
bibechana-4828	71	1	koh	PERSON
bibechana-4828	72	1	soi	ORG
bibechana-4828	72	2	10	CARDINAL
bibechana-4828	73	1	ocg 825	ORG
bibechana-4828	74	1	al	ORG
bibechana-4828	74	2	2003	DATE
bibechana-4828	74	3	4	CARDINAL
bibechana-4828	74	4	koh	PERSON
bibechana-4828	75	1	soi	ORG
bibechana-4828	75	2	koh	PERSON
bibechana-4828	78	1	3	CARDINAL
bibechana-4828	78	2	koh etch	PERSON
bibechana-4828	80	1	koh	PERSON
bibechana-4828	80	2	70°	QUANTITY
bibechana-4828	80	3	90°	QUANTITY
bibechana-4828	80	4	30%	PERCENT
bibechana-4828	81	1	800c	PRODUCT
bibechana-4828	82	1	koh	PERSON
bibechana-4828	83	1	koh	PERSON
bibechana-4828	83	2	2	CARDINAL
bibechana-4828	83	3	2	CARDINAL
bibechana-4828	83	4	koh	PERSON
bibechana-4828	84	1	approximately 20%	PERCENT
bibechana-4828	84	2	koh	ORG
bibechana-4828	84	3	90°	QUANTITY
bibechana-4828	85	1	70°	QUANTITY
bibechana-4828	85	2	koh	PERSON
bibechana-4828	87	1	2	CARDINAL
bibechana-4828	87	2	koh	PERSON
bibechana-4828	89	1	2	CARDINAL
bibechana-4828	92	1	shobha kanta lamichhane	PERSON
bibechana-4828	92	2	8 (2012	DATE
bibechana-4828	92	3	59	CARDINAL
bibechana-4828	94	1	13	CARDINAL
bibechana-4828	96	1	koh	PERSON
bibechana-4828	97	1	erl	ORG
bibechana-4828	97	2	erv	ORG
bibechana-4828	98	1	zero	CARDINAL
bibechana-4828	102	1	111	CARDINAL
bibechana-4828	102	2	33 %	PERCENT
bibechana-4828	102	3	koh	PERSON
bibechana-4828	102	4	111	CARDINAL
bibechana-4828	102	5	100	CARDINAL
bibechana-4828	103	1	3.1	CARDINAL
bibechana-4828	105	1	rca	ORG
bibechana-4828	105	2	two	CARDINAL
bibechana-4828	105	3	clean1	PRODUCT
bibechana-4828	105	4	2	CARDINAL
bibechana-4828	106	1	5:1:1	CARDINAL
bibechana-4828	108	1	6:1:1	CARDINAL
bibechana-4828	109	1	13	CARDINAL
bibechana-4828	110	1	rca	ORG
bibechana-4828	111	1	rca	ORG
bibechana-4828	113	1	afm	PERSON
bibechana-4828	114	1	3	CARDINAL
bibechana-4828	116	1	rca	ORG
bibechana-4828	117	1	shobha kanta lamichhane	PERSON
bibechana-4828	117	2	8 (2012	DATE
bibechana-4828	117	3	59	CARDINAL
bibechana-4828	117	4	70 75 80 85	PERCENT
bibechana-4828	117	5	0.3 0.4 e	QUANTITY
bibechana-4828	117	6	20	CARDINAL
bibechana-4828	117	7	100	CARDINAL
bibechana-4828	117	8	0.0027 0.0030 0.0033 -24 -22 -20 -18 -16	QUANTITY
bibechana-4828	119	1	1	CARDINAL
bibechana-4828	119	2	100	CARDINAL
bibechana-4828	120	1	110	CARDINAL
bibechana-4828	120	2	111	CARDINAL
bibechana-4828	120	3	0.4 0.5 0.6 0.7	QUANTITY
bibechana-4828	122	1	ic ro n	PERSON
bibechana-4828	122	2	koh	PERSON
bibechana-4828	122	3	wt %	PERCENT
bibechana-4828	122	4	100	CARDINAL
bibechana-4828	123	1	2	CARDINAL
bibechana-4828	123	2	111	CARDINAL
bibechana-4828	123	3	111	CARDINAL
bibechana-4828	123	4	110	CARDINAL
bibechana-4828	123	5	100	CARDINAL
bibechana-4828	123	6	111	CARDINAL
bibechana-4828	123	7	110	CARDINAL
bibechana-4828	123	8	100	CARDINAL
bibechana-4828	123	9	koh	PERSON
bibechana-4828	123	10	3.2	CARDINAL
bibechana-4828	123	11	two	CARDINAL
bibechana-4828	124	1	one	CARDINAL
bibechana-4828	130	1	1 (	CARDINAL
bibechana-4828	130	2	tk e ii	PERSON
bibechana-4828	130	3	0	CARDINAL
bibechana-4828	130	4	2	CARDINAL
bibechana-4828	130	5	kanta lamichhane	PERSON
bibechana-4828	130	6	8 (2012	DATE
bibechana-4828	130	7	59	CARDINAL
bibechana-4828	130	8	p.64	GPE
bibechana-4828	130	9	kb	ORG
bibechana-4828	136	1	14	CARDINAL
bibechana-4828	140	1	two	CARDINAL
bibechana-4828	140	2	one	CARDINAL
bibechana-4828	140	3	one	CARDINAL
bibechana-4828	149	1	three	CARDINAL
bibechana-4828	149	2	15	CARDINAL
bibechana-4828	154	1	ea	CARDINAL
bibechana-4828	155	1	3.3	CARDINAL
bibechana-4828	158	1	afm	PERSON
bibechana-4828	158	2	one	CARDINAL
bibechana-4828	159	1	111	CARDINAL
bibechana-4828	161	1	shobha kanta lamichhane	PERSON
bibechana-4828	161	2	8 (2012	DATE
bibechana-4828	161	3	59	CARDINAL
bibechana-4828	161	4	bmhss	PERSON
bibechana-4828	161	5	111	CARDINAL
bibechana-4828	161	6	afm	PERSON
bibechana-4828	162	1	seidel et al	PERSON
bibechana-4828	163	1	6	CARDINAL
bibechana-4828	163	2	three	CARDINAL
bibechana-4828	163	3	100	CARDINAL
bibechana-4828	163	4	110	CARDINAL
bibechana-4828	163	5	111	CARDINAL
bibechana-4828	164	1	koh	PERSON
bibechana-4828	165	1	110)/(100	CARDINAL
bibechana-4828	165	2	10–60%	PERCENT
bibechana-4828	165	3	1.55	CARDINAL
bibechana-4828	166	1	100	CARDINAL
bibechana-4828	166	2	110	CARDINAL
bibechana-4828	167	1	16	CARDINAL
bibechana-4828	168	1	110)/(100	CARDINAL
bibechana-4828	168	2	1.5	CARDINAL
bibechana-4828	169	1	approximately 0.6	CARDINAL
bibechana-4828	169	2	100	CARDINAL
bibechana-4828	169	3	110	CARDINAL
bibechana-4828	170	1	4	CARDINAL
bibechana-4828	172	1	koh	PERSON
bibechana-4828	173	1	100	CARDINAL
bibechana-4828	174	1	koh	PERSON
bibechana-4828	175	1	koh	PERSON
bibechana-4828	176	1	koh	PERSON
bibechana-4828	180	1	111	CARDINAL
bibechana-4828	180	2	110	CARDINAL
bibechana-4828	181	1	111	CARDINAL
bibechana-4828	182	1	1	CARDINAL
bibechana-4828	182	2	k. e. petersen	PERSON
bibechana-4828	183	1	70	CARDINAL
bibechana-4828	183	2	1982	DATE
bibechana-4828	183	3	420	CARDINAL
bibechana-4828	184	1	2	CARDINAL
bibechana-4828	184	2	d. l. kendall	PERSON
bibechana-4828	184	3	annual	DATE
bibechana-4828	185	1	sci.	PERSON
bibechana-4828	186	1	9	CARDINAL
bibechana-4828	186	2	1979	DATE
bibechana-4828	186	3	373	CARDINAL
bibechana-4828	187	1	3	CARDINAL
bibechana-4828	187	2	m. nagase	PERSON
bibechana-4828	187	3	k. kurihara	PERSON
bibechana-4828	187	4	k. iwadate	PERSON
bibechana-4828	187	5	microelectron	PERSON
bibechana-4828	188	1	eng	PERSON
bibechana-4828	188	2	27 (1995)	DATE
bibechana-4828	188	3	7	DATE
bibechana-4828	188	4	shobha kanta lamichhane	PERSON
bibechana-4828	188	5	8 (2012	DATE
bibechana-4828	188	6	59	CARDINAL
bibechana-4828	188	7	bmhss	PERSON
bibechana-4828	188	8	p.66	DATE
bibechana-4828	188	9	4	CARDINAL
bibechana-4828	188	10	o. j. glembocki	PERSON
bibechana-4828	188	11	g r de guel	PERSON
bibechana-4828	188	12	j. electrochem	PERSON
bibechana-4828	190	1	138	CARDINAL
bibechana-4828	190	2	1991	DATE
bibechana-4828	190	3	1055	DATE
bibechana-4828	191	1	5	CARDINAL
bibechana-4828	191	2	e. d. palik	PERSON
bibechana-4828	191	3	j glembocki	PERSON
bibechana-4828	191	4	j. electrochem	PERSON
bibechana-4828	193	1	132	CARDINAL
bibechana-4828	193	2	1985	DATE
bibechana-4828	193	3	871	CARDINAL
bibechana-4828	194	1	6	CARDINAL
bibechana-4828	194	2	h. seidel	PERSON
bibechana-4828	194	3	l. csepregi	PERSON
bibechana-4828	194	4	j. electrochem	PERSON
bibechana-4828	195	1	137	CARDINAL
bibechana-4828	195	2	1990	DATE
bibechana-4828	195	3	3612	DATE
bibechana-4828	196	1	7	CARDINAL
bibechana-4828	196	2	e. vazonyi	PERSON
bibechana-4828	196	3	t. szkufcik	GPE
bibechana-4828	196	4	13	CARDINAL
bibechana-4828	196	5	2003	DATE
bibechana-4828	196	6	165	CARDINAL
bibechana-4828	197	1	8	CARDINAL
bibechana-4828	197	2	y. g. svinolupov	PERSON
bibechana-4828	197	3	t. i izaak	PERSON
bibechana-4828	197	4	v. v. bychkov	PERSON
bibechana-4828	197	5	350	CARDINAL
bibechana-4828	198	1	9	CARDINAL
bibechana-4828	198	2	c. l. zhang	PERSON
bibechana-4828	198	3	233	CARDINAL
bibechana-4828	198	4	2003	DATE
bibechana-4828	198	5	615	CARDINAL
bibechana-4828	199	1	10	CARDINAL
bibechana-4828	199	2	e. sutter	PERSON
bibechana-4828	199	3	m. g. lagally	PERSON
bibechana-4828	199	4	30	CARDINAL
bibechana-4828	200	1	11	CARDINAL
bibechana-4828	200	2	r. omeitchenko	PERSON
bibechana-4828	200	3	r. k. kalla	PERSON
bibechana-4828	200	4	a. nakano	PERSON
bibechana-4828	200	5	82	CARDINAL
bibechana-4828	200	6	2003	DATE
bibechana-4828	200	7	118	CARDINAL
bibechana-4828	201	1	12	CARDINAL
bibechana-4828	201	2	x. yan	PERSON
bibechana-4828	201	3	t. xu	PERSON
bibechana-4828	201	4	g. chen	PERSON
bibechana-4828	201	5	s. yang	PERSON
bibechana-4828	202	1	37	CARDINAL
bibechana-4828	202	2	2004	DATE
bibechana-4828	202	3	907	CARDINAL
bibechana-4828	203	1	13	CARDINAL
bibechana-4828	203	2	a. g. r. evans	PERSON
bibechana-4828	203	3	32	CARDINAL
bibechana-4828	203	4	1	CARDINAL
bibechana-4828	204	1	14	CARDINAL
bibechana-4828	204	2	french	NORP
bibechana-4828	205	1	a.g.r evans	ORG
bibechana-4828	205	2	journal of physics e:	ORG
bibechana-4828	205	3	19	CARDINAL
bibechana-4828	205	4	1055	CARDINAL
bibechana-4828	206	1	15	CARDINAL
bibechana-4828	206	2	j. duck lee	PERSON
bibechana-4828	206	3	b. chang	PERSON
bibechana-4828	206	4	b. gook	PERSON
bibechana-4828	206	5	20 (1999	DATE
bibechana-4828	206	6	215	CARDINAL
bibechana-4828	207	1	16	CARDINAL
bibechana-4828	207	2	k. e. bean	PERSON
bibechana-4828	207	3	w. r. runyan	PERSON
bibechana-4828	207	4	new york 1990	GPE