id	sid	eid	entity	type
bibechana-4897	1	1	microsoft	ORG
bibechana-4897	1	2	e. haji-ali -final.doc e. haji-ali	PERSON
bibechana-4897	1	3	8 (2012	DATE
bibechana-4897	1	4	46	CARDINAL
bibechana-4897	1	5	issn 2091-0762	PERSON
bibechana-4897	1	6	e. haji-ali	PERSON
bibechana-4897	1	7	imam hussein university	ORG
bibechana-4897	1	8	tehran	GPE
bibechana-4897	1	9	iran e-mail	GPE
bibechana-4897	2	1	15	CARDINAL
bibechana-4897	2	2	june, 2011	DATE
bibechana-4897	2	3	11 july, 2011	DATE
bibechana-4897	8	1	1	CARDINAL
bibechana-4897	15	1	many years	DATE
bibechana-4897	16	1	gaas	PERSON
bibechana-4897	17	1	1990	DATE
bibechana-4897	17	2	1	CARDINAL
bibechana-4897	18	1	the last five years	DATE
bibechana-4897	21	1	sio2	ORG
bibechana-4897	22	1	e. haji-ali	PERSON
bibechana-4897	22	2	8 (2012	DATE
bibechana-4897	22	3	46	CARDINAL
bibechana-4897	22	4	soi	ORG
bibechana-4897	27	1	3 – 20	CARDINAL
bibechana-4897	28	1	tem	ORG
bibechana-4897	28	2	2	CARDINAL
bibechana-4897	29	1	the columnlike si	ORG
bibechana-4897	30	1	3	CARDINAL
bibechana-4897	35	1	4	CARDINAL
bibechana-4897	39	1	4	CARDINAL
bibechana-4897	41	1	4	CARDINAL
bibechana-4897	42	1	2	CARDINAL
bibechana-4897	42	2	2.1	CARDINAL
bibechana-4897	42	3	1:3:5	CARDINAL
bibechana-4897	42	4	~ 3%	PERCENT
bibechana-4897	43	1	first	ORDINAL
bibechana-4897	43	2	rca1	ORG
bibechana-4897	43	3	10%	PERCENT
bibechana-4897	43	4	one minute	TIME
bibechana-4897	44	1	5 minutes	TIME
bibechana-4897	50	1	several minutes	TIME
bibechana-4897	51	1	si wafer e. haji-ali	PERSON
bibechana-4897	51	2	8 (2012	DATE
bibechana-4897	51	3	46	CARDINAL
bibechana-4897	51	4	bmhss	PERSON
bibechana-4897	51	5	two	CARDINAL
bibechana-4897	51	6	first	ORDINAL
bibechana-4897	52	1	shih et	PERSON
bibechana-4897	53	1	al	PERSON
bibechana-4897	54	1	5	CARDINAL
bibechana-4897	58	1	shi et al	PERSON
bibechana-4897	59	1	5	CARDINAL
bibechana-4897	61	1	2.2	CARDINAL
bibechana-4897	61	2	1	CARDINAL
bibechana-4897	64	1	first	ORDINAL
bibechana-4897	64	2	rca 1	ORG
bibechana-4897	64	3	rca2	ORG
bibechana-4897	64	4	10%	PERCENT
bibechana-4897	66	1	2	CARDINAL
bibechana-4897	66	2	2 cm	QUANTITY
bibechana-4897	74	1	fig	ORG
bibechana-4897	75	1	1	CARDINAL
bibechana-4897	75	2	e. haji-ali	PERSON
bibechana-4897	75	3	8 (2012	DATE
bibechana-4897	75	4	46	CARDINAL
bibechana-4897	75	5	bmhss	PERSON
bibechana-4897	77	1	6	CARDINAL
bibechana-4897	84	1	two	CARDINAL
bibechana-4897	86	1	7	CARDINAL
bibechana-4897	88	1	two	CARDINAL
bibechana-4897	89	1	7	CARDINAL
bibechana-4897	93	1	3	CARDINAL
bibechana-4897	93	2	3.1	CARDINAL
bibechana-4897	95	1	100	CARDINAL
bibechana-4897	95	2	38	CARDINAL
bibechana-4897	95	3	39%	PERCENT
bibechana-4897	96	1	1	CARDINAL
bibechana-4897	97	1	1	CARDINAL
bibechana-4897	98	1	current(ma/cm2	ORG
bibechana-4897	98	2	1 60	CARDINAL
bibechana-4897	98	3	5	CARDINAL
bibechana-4897	98	4	2	CARDINAL
bibechana-4897	98	5	10	CARDINAL
bibechana-4897	98	6	6 3.53 85	CARDINAL
bibechana-4897	98	7	7 3 100	DATE
bibechana-4897	98	8	-- e. haji-ali / bibechana 8 (2012)	PERSON
bibechana-4897	98	9	46	CARDINAL
bibechana-4897	98	10	bmhss	PERSON
bibechana-4897	99	1	about 5 minutes	TIME
bibechana-4897	100	1	a year	DATE
bibechana-4897	101	1	several hours	TIME
bibechana-4897	103	1	several hours	TIME
bibechana-4897	106	1	sio2	ORG
bibechana-4897	109	1	60	CARDINAL
bibechana-4897	109	2	6 minutes	TIME
bibechana-4897	111	1	100 ma/cm 2	QUANTITY
bibechana-4897	111	2	7	CARDINAL
bibechana-4897	111	3	1	CARDINAL
bibechana-4897	112	1	2	CARDINAL
bibechana-4897	112	2	3	CARDINAL
bibechana-4897	112	3	1	CARDINAL
bibechana-4897	113	1	5	CARDINAL
bibechana-4897	113	2	6	CARDINAL
bibechana-4897	115	1	3.2	CARDINAL
bibechana-4897	118	1	two	CARDINAL
bibechana-4897	120	1	2	CARDINAL
bibechana-4897	121	1	150w	GPE
bibechana-4897	121	2	30 cm	QUANTITY
bibechana-4897	123	1	e. haji-ali	PERSON
bibechana-4897	123	2	8 (2012	DATE
bibechana-4897	123	3	46	CARDINAL
bibechana-4897	123	4	2	CARDINAL
bibechana-4897	124	1	current(ma/cm2	ORG
bibechana-4897	124	2	1 50	CARDINAL
bibechana-4897	124	3	4	CARDINAL
bibechana-4897	124	4	2	CARDINAL
bibechana-4897	124	5	6	CARDINAL
bibechana-4897	124	6	25 8	TIME
bibechana-4897	124	7	two	CARDINAL
bibechana-4897	125	1	first	ORDINAL
bibechana-4897	128	1	2	CARDINAL
bibechana-4897	130	1	3.3	CARDINAL
bibechana-4897	130	2	three	CARDINAL
bibechana-4897	130	3	ito	PERSON
bibechana-4897	131	1	first	ORDINAL
bibechana-4897	131	2	1:5	CARDINAL
bibechana-4897	133	1	1	CARDINAL
bibechana-4897	136	1	third	ORDINAL
bibechana-4897	137	1	io	LOC
bibechana-4897	137	2	several hundred degrees celsius	QUANTITY
bibechana-4897	138	1	two	CARDINAL
bibechana-4897	141	1	a few minutes	TIME
bibechana-4897	141	2	zero	CARDINAL
bibechana-4897	142	1	4.	CARDINAL
bibechana-4897	144	1	1	CARDINAL
bibechana-4897	144	2	2	CARDINAL
bibechana-4897	144	3	3	CARDINAL
bibechana-4897	146	1	e. haji-ali	PERSON
bibechana-4897	146	2	8 (2012	DATE
bibechana-4897	146	3	46	CARDINAL
bibechana-4897	146	4	bmhss	PERSON
bibechana-4897	146	5	p.52	ORG
bibechana-4897	146	6	mahdi	NORP
bibechana-4897	147	1	1	CARDINAL
bibechana-4897	147	2	l. t. canham	PERSON
bibechana-4897	149	1	lett	PERSON
bibechana-4897	150	1	1990	DATE
bibechana-4897	150	2	1046	CARDINAL
bibechana-4897	151	1	2	CARDINAL
bibechana-4897	151	2	x. wang	PERSON
bibechana-4897	152	1	lett	PERSON
bibechana-4897	153	1	8	CARDINAL
bibechana-4897	153	2	2	CARDINAL
bibechana-4897	153	3	69	CARDINAL
bibechana-4897	153	4	1994	DATE
bibechana-4897	153	5	1597	CARDINAL
bibechana-4897	154	1	3	CARDINAL
bibechana-4897	154	2	l. t. canham	PERSON
bibechana-4897	155	1	41(march 1992	DATE
bibechana-4897	155	2	1540	DATE
bibechana-4897	156	1	4	CARDINAL
bibechana-4897	156	2	r. l. smith	PERSON
bibechana-4897	156	3	s. d. collins	PERSON
bibechana-4897	156	4	j. appl	ORG
bibechana-4897	158	1	71	CARDINAL
bibechana-4897	158	2	1992	DATE
bibechana-4897	159	1	5	CARDINAL
bibechana-4897	159	2	s. shih	PERSON
bibechana-4897	160	1	symp	PERSON
bibechana-4897	162	1	256	CARDINAL
bibechana-4897	162	2	27	CARDINAL
bibechana-4897	162	3	1992	DATE
bibechana-4897	162	4	197	CARDINAL
bibechana-4897	163	1	6	CARDINAL
bibechana-4897	163	2	t. asano	PERSON
bibechana-4897	163	3	jpn	PERSON
bibechana-4897	164	1	j. appl	PERSON
bibechana-4897	166	1	31	CARDINAL
bibechana-4897	166	2	l373	GPE
bibechana-4897	166	3	1992	DATE
bibechana-4897	166	4	865	CARDINAL
bibechana-4897	167	1	7	CARDINAL
bibechana-4897	167	2	h. unno	PERSON
bibechana-4897	167	3	k. imai	PERSON
bibechana-4897	167	4	s. muramoto	PERSON
bibechana-4897	167	5	j. electrochem	PERSON
bibechana-4897	169	1	s. s. & t 134	ORG
bibechana-4897	169	2	3	CARDINAL
bibechana-4897	169	3	645(1987	CARDINAL
bibechana-4897	169	4	645 648	CARDINAL
bibechana-4897	170	1	8	CARDINAL
bibechana-4897	170	2	j. t. lue	PERSON
bibechana-4897	171	1	1993	DATE
bibechana-4897	171	2	593	CARDINAL
bibechana-4897	172	1	9	CARDINAL
bibechana-4897	172	2	s. f. chung	PERSON
bibechana-4897	172	3	s. d. collins	PERSON
bibechana-4897	172	4	r. l. smith	PERSON
bibechana-4897	174	1	lett.	PERSON
bibechana-4897	175	1	1989	DATE
bibechana-4897	175	2	675	CARDINAL
bibechana-4897	176	1	10	CARDINAL
bibechana-4897	176	2	m. c. goncalves	PERSON
bibechana-4897	176	3	f. galembeck	PERSON
bibechana-4897	178	1	lett	PERSON
bibechana-4897	179	1	1993	DATE
bibechana-4897	179	2	1348	DATE