id	sid	tid	token	lemma	pos
bibechana-26521	1	1	devendra	devendra	PROPN
bibechana-26521	1	2	sir	sir	PROPN
bibechana-26521	1	3	cover	cover	VERB
bibechana-26521	1	4	page	page	NOUN
bibechana-26521	1	5	copy.jpg	copy.jpg	X
bibechana-26521	1	6	bibechana	bibechana	NOUN
bibechana-26521	1	7	17	17	NUM
bibechana-26521	1	8	(	(	PUNCT
bibechana-26521	1	9	2020	2020	NUM
bibechana-26521	1	10	)	)	PUNCT
bibechana-26521	1	11	96	96	NUM
bibechana-26521	1	12	-	-	SYM
bibechana-26521	1	13	103	103	NUM
bibechana-26521	1	14	96	96	NUM
bibechana-26521	1	15	bibechana	bibechana	NOUN
bibechana-26521	1	16	issn	issn	VERB
bibechana-26521	1	17	2091	2091	NUM
bibechana-26521	1	18	-	-	SYM
bibechana-26521	1	19	0762	0762	NUM
bibechana-26521	1	20	(	(	PUNCT
bibechana-26521	1	21	print	print	NOUN
bibechana-26521	1	22	)	)	PUNCT
bibechana-26521	1	23	,	,	PUNCT
bibechana-26521	1	24	2382	2382	NUM
bibechana-26521	1	25	-	-	SYM
bibechana-26521	1	26	5340	5340	NUM
bibechana-26521	1	27	(	(	PUNCT
bibechana-26521	1	28	online	online	ADJ
bibechana-26521	1	29	)	)	PUNCT
bibechana-26521	1	30	journal	journal	NOUN
bibechana-26521	1	31	homepage	homepage	NOUN
bibechana-26521	1	32	:	:	PUNCT
bibechana-26521	1	33	http://nepjol.info/index.php/bibechana	http://nepjol.info/index.php/bibechana	PROPN
bibechana-26521	1	34	publisher	publisher	NOUN
bibechana-26521	1	35	:	:	PUNCT
bibechana-26521	1	36	department	department	NOUN
bibechana-26521	1	37	of	of	ADP
bibechana-26521	1	38	physics	physics	PROPN
bibechana-26521	1	39	,	,	PUNCT
bibechana-26521	1	40	mahendra	mahendra	PROPN
bibechana-26521	1	41	morang	morang	PROPN
bibechana-26521	1	42	a.m.	a.m.	PROPN
bibechana-26521	2	1	campus	campus	PROPN
bibechana-26521	2	2	,	,	PUNCT
bibechana-26521	2	3	tu	tu	PROPN
bibechana-26521	2	4	,	,	PUNCT
bibechana-26521	2	5	biratnagar	biratnagar	NOUN
bibechana-26521	2	6	,	,	PUNCT
bibechana-26521	2	7	nepal	nepal	ADJ
bibechana-26521	2	8	study	study	NOUN
bibechana-26521	2	9	of	of	ADP
bibechana-26521	2	10	damage	damage	NOUN
bibechana-26521	2	11	profiles	profile	NOUN
bibechana-26521	2	12	and	and	CCONJ
bibechana-26521	2	13	energy	energy	NOUN
bibechana-26521	2	14	calculation	calculation	NOUN
bibechana-26521	2	15	of	of	ADP
bibechana-26521	2	16	arsenic	arsenic	ADJ
bibechana-26521	2	17	ions	ion	NOUN
bibechana-26521	2	18	during	during	ADP
bibechana-26521	2	19	ion	ion	NOUN
bibechana-26521	2	20	implantation	implantation	NOUN
bibechana-26521	2	21	on	on	ADP
bibechana-26521	2	22	germanium	germanium	NOUN
bibechana-26521	2	23	k.	k.	PROPN
bibechana-26521	2	24	giri	giri	PROPN
bibechana-26521	2	25	*	*	PUNCT
bibechana-26521	2	26	,	,	PUNCT
bibechana-26521	2	27	b.	b.	PROPN
bibechana-26521	2	28	kandel	kandel	PROPN
bibechana-26521	2	29	department	department	PROPN
bibechana-26521	2	30	of	of	ADP
bibechana-26521	2	31	physics	physics	PROPN
bibechana-26521	2	32	,	,	PUNCT
bibechana-26521	2	33	tri	tri	PROPN
bibechana-26521	2	34	-	-	ADJ
bibechana-26521	2	35	chandra	chandra	PROPN
bibechana-26521	2	36	multiple	multiple	ADJ
bibechana-26521	2	37	campus	campus	NOUN
bibechana-26521	2	38	,	,	PUNCT
bibechana-26521	2	39	kathmandu	kathmandu	NOUN
bibechana-26521	2	40	*	*	PUNCT
bibechana-26521	2	41	email	email	NOUN
bibechana-26521	2	42	:	:	PUNCT
bibechana-26521	2	43	karangiri575@gmail.com	karangiri575@gmail.com	X
bibechana-26521	2	44	article	article	PROPN
bibechana-26521	2	45	information	information	NOUN
bibechana-26521	2	46	received	receive	VERB
bibechana-26521	2	47	:	:	PUNCT
bibechana-26521	2	48	july	july	PROPN
bibechana-26521	2	49	17	17	NUM
bibechana-26521	2	50	,	,	PUNCT
bibechana-26521	2	51	2019	2019	NUM
bibechana-26521	2	52	accepted	accept	VERB
bibechana-26521	2	53	:	:	PUNCT
bibechana-26521	2	54	december	december	PROPN
bibechana-26521	2	55	2	2	NUM
bibechana-26521	2	56	,	,	PUNCT
bibechana-26521	2	57	2019	2019	NUM
bibechana-26521	2	58	keywords	keyword	NOUN
bibechana-26521	2	59	:	:	PUNCT
bibechana-26521	2	60	implantation	implantation	NOUN
bibechana-26521	2	61	doping	dope	VERB
bibechana-26521	2	62	ionization	ionization	NOUN
bibechana-26521	2	63	phonons	phonon	NOUN
bibechana-26521	2	64	abstract	abstract	ADJ
bibechana-26521	2	65	computational	computational	ADJ
bibechana-26521	2	66	calculation	calculation	NOUN
bibechana-26521	2	67	of	of	ADP
bibechana-26521	2	68	energy	energy	NOUN
bibechana-26521	2	69	loss	loss	NOUN
bibechana-26521	2	70	and	and	CCONJ
bibechana-26521	2	71	damage	damage	NOUN
bibechana-26521	2	72	profiles	profile	NOUN
bibechana-26521	2	73	when	when	SCONJ
bibechana-26521	2	74	implanted	implant	VERB
bibechana-26521	2	75	by	by	ADP
bibechana-26521	2	76	arsenic	arsenic	ADJ
bibechana-26521	2	77	ions	ion	NOUN
bibechana-26521	2	78	on	on	ADP
bibechana-26521	2	79	amorphous	amorphous	ADJ
bibechana-26521	2	80	germanium	germanium	NOUN
bibechana-26521	2	81	during	during	ADP
bibechana-26521	2	82	ion	ion	NOUN
bibechana-26521	2	83	implantation	implantation	NOUN
bibechana-26521	2	84	had	have	AUX
bibechana-26521	2	85	been	be	AUX
bibechana-26521	2	86	carried	carry	VERB
bibechana-26521	2	87	out	out	ADP
bibechana-26521	2	88	.	.	PUNCT
bibechana-26521	3	1	the	the	DET
bibechana-26521	3	2	required	require	VERB
bibechana-26521	3	3	energies	energy	NOUN
bibechana-26521	3	4	for	for	ADP
bibechana-26521	3	5	doping	doping	NOUN
bibechana-26521	3	6	of	of	ADP
bibechana-26521	3	7	arsenic	arsenic	ADJ
bibechana-26521	3	8	ion	ion	NOUN
bibechana-26521	3	9	on	on	ADP
bibechana-26521	3	10	germanium	germanium	NOUN
bibechana-26521	3	11	,	,	PUNCT
bibechana-26521	3	12	in	in	ADP
bibechana-26521	3	13	order	order	NOUN
bibechana-26521	3	14	to	to	PART
bibechana-26521	3	15	obtain	obtain	VERB
bibechana-26521	3	16	maximum	maximum	ADJ
bibechana-26521	3	17	damage	damage	NOUN
bibechana-26521	3	18	at	at	ADP
bibechana-26521	3	19	600	600	NUM
bibechana-26521	3	20	å	å	NOUN
bibechana-26521	3	21	,	,	PUNCT
bibechana-26521	3	22	were	be	AUX
bibechana-26521	3	23	calculated	calculate	VERB
bibechana-26521	3	24	using	use	VERB
bibechana-26521	3	25	srim	srim	NOUN
bibechana-26521	3	26	.	.	PUNCT
bibechana-26521	4	1	these	these	DET
bibechana-26521	4	2	ions	ion	NOUN
bibechana-26521	4	3	when	when	SCONJ
bibechana-26521	4	4	implanted	implant	VERB
bibechana-26521	4	5	on	on	ADP
bibechana-26521	4	6	germanium	germanium	NOUN
bibechana-26521	4	7	causes	cause	VERB
bibechana-26521	4	8	the	the	DET
bibechana-26521	4	9	production	production	NOUN
bibechana-26521	4	10	of	of	ADP
bibechana-26521	4	11	germanium	germanium	NOUN
bibechana-26521	4	12	recoils	recoil	NOUN
bibechana-26521	4	13	,	,	PUNCT
bibechana-26521	4	14	vacancy	vacancy	NOUN
bibechana-26521	4	15	-	-	PUNCT
bibechana-26521	4	16	interstitial	interstitial	ADJ
bibechana-26521	4	17	pairs	pair	NOUN
bibechana-26521	4	18	,	,	PUNCT
bibechana-26521	4	19	and	and	CCONJ
bibechana-26521	4	20	phonons	phonon	NOUN
bibechana-26521	4	21	during	during	ADP
bibechana-26521	4	22	the	the	DET
bibechana-26521	4	23	collision	collision	NOUN
bibechana-26521	4	24	process	process	NOUN
bibechana-26521	4	25	.	.	PUNCT
bibechana-26521	5	1	for	for	ADP
bibechana-26521	5	2	140	140	NUM
bibechana-26521	5	3	kev	kev	NOUN
bibechana-26521	5	4	arsenic	arsenic	ADJ
bibechana-26521	5	5	ion	ion	NOUN
bibechana-26521	5	6	,	,	PUNCT
bibechana-26521	5	7	the	the	DET
bibechana-26521	5	8	energy	energy	NOUN
bibechana-26521	5	9	consumption	consumption	NOUN
bibechana-26521	5	10	for	for	ADP
bibechana-26521	5	11	ionization	ionization	NOUN
bibechana-26521	5	12	,	,	PUNCT
bibechana-26521	5	13	phonon	phonon	NOUN
bibechana-26521	5	14	production	production	NOUN
bibechana-26521	5	15	and	and	CCONJ
bibechana-26521	5	16	vacancies	vacancy	NOUN
bibechana-26521	5	17	creation	creation	NOUN
bibechana-26521	5	18	are	be	AUX
bibechana-26521	5	19	39.634	39.634	NUM
bibechana-26521	5	20	kev	kev	NOUN
bibechana-26521	5	21	(	(	PUNCT
bibechana-26521	5	22	28.31	28.31	NUM
bibechana-26521	5	23	%	%	NOUN
bibechana-26521	5	24	of	of	ADP
bibechana-26521	5	25	incident	incident	NOUN
bibechana-26521	5	26	energy	energy	NOUN
bibechana-26521	5	27	)	)	PUNCT
bibechana-26521	5	28	,	,	PUNCT
bibechana-26521	5	29	90.888	90.888	NUM
bibechana-26521	5	30	kev	kev	NOUN
bibechana-26521	5	31	(	(	PUNCT
bibechana-26521	5	32	64.92	64.92	NUM
bibechana-26521	5	33	%	%	NOUN
bibechana-26521	5	34	of	of	ADP
bibechana-26521	5	35	incident	incident	NOUN
bibechana-26521	5	36	energy	energy	NOUN
bibechana-26521	5	37	)	)	PUNCT
bibechana-26521	5	38	and	and	CCONJ
bibechana-26521	5	39	9.478	9.478	NUM
bibechana-26521	5	40	kev	kev	NOUN
bibechana-26521	5	41	(	(	PUNCT
bibechana-26521	5	42	6.77	6.77	NUM
bibechana-26521	5	43	%	%	NOUN
bibechana-26521	5	44	of	of	ADP
bibechana-26521	5	45	incident	incident	NOUN
bibechana-26521	5	46	energy	energy	NOUN
bibechana-26521	5	47	)	)	PUNCT
bibechana-26521	5	48	,	,	PUNCT
bibechana-26521	5	49	respectively	respectively	ADV
bibechana-26521	5	50	.	.	PUNCT
bibechana-26521	6	1	the	the	DET
bibechana-26521	6	2	amount	amount	NOUN
bibechana-26521	6	3	of	of	ADP
bibechana-26521	6	4	target	target	NOUN
bibechana-26521	6	5	displacement	displacement	NOUN
bibechana-26521	6	6	,	,	PUNCT
bibechana-26521	6	7	replacement	replacement	NOUN
bibechana-26521	6	8	collisions	collision	NOUN
bibechana-26521	6	9	and	and	CCONJ
bibechana-26521	6	10	vacancies	vacancy	NOUN
bibechana-26521	6	11	were	be	AUX
bibechana-26521	6	12	also	also	ADV
bibechana-26521	6	13	evaluated	evaluate	VERB
bibechana-26521	6	14	.	.	PUNCT
bibechana-26521	7	1	doping	doping	NOUN
bibechana-26521	7	2	of	of	ADP
bibechana-26521	7	3	arsenic	arsenic	ADJ
bibechana-26521	7	4	ions	ion	NOUN
bibechana-26521	7	5	on	on	ADP
bibechana-26521	7	6	germanium	germanium	NOUN
bibechana-26521	7	7	also	also	ADV
bibechana-26521	7	8	revealed	reveal	VERB
bibechana-26521	7	9	that	that	SCONJ
bibechana-26521	7	10	the	the	DET
bibechana-26521	7	11	energy	energy	NOUN
bibechana-26521	7	12	loss	loss	NOUN
bibechana-26521	7	13	due	due	ADP
bibechana-26521	7	14	to	to	ADP
bibechana-26521	7	15	nuclear	nuclear	ADJ
bibechana-26521	7	16	stopping	stopping	NOUN
bibechana-26521	7	17	was	be	AUX
bibechana-26521	7	18	greater	great	ADJ
bibechana-26521	7	19	than	than	ADP
bibechana-26521	7	20	electronic	electronic	ADJ
bibechana-26521	7	21	stopping	stopping	NOUN
bibechana-26521	7	22	.	.	PUNCT
bibechana-26521	8	1	significantly	significantly	ADV
bibechana-26521	8	2	,	,	PUNCT
bibechana-26521	8	3	surface	surface	NOUN
bibechana-26521	8	4	hardness	hardness	NOUN
bibechana-26521	8	5	and	and	CCONJ
bibechana-26521	8	6	electrical	electrical	ADJ
bibechana-26521	8	7	conductivity	conductivity	NOUN
bibechana-26521	8	8	on	on	ADP
bibechana-26521	8	9	germanium	germanium	NOUN
bibechana-26521	8	10	can	can	AUX
bibechana-26521	8	11	not	not	PART
bibechana-26521	8	12	be	be	AUX
bibechana-26521	8	13	improved	improve	VERB
bibechana-26521	8	14	with	with	ADP
bibechana-26521	8	15	calculated	calculate	VERB
bibechana-26521	8	16	energies	energy	NOUN
bibechana-26521	8	17	.	.	PUNCT
bibechana-26521	9	1	1	1	X
bibechana-26521	9	2	.	.	X
bibechana-26521	9	3	introduction	introduction	NOUN
bibechana-26521	9	4	ion	ion	NOUN
bibechana-26521	9	5	implantation	implantation	NOUN
bibechana-26521	9	6	ion	ion	NOUN
bibechana-26521	9	7	implantation	implantation	NOUN
bibechana-26521	9	8	is	be	AUX
bibechana-26521	9	9	the	the	DET
bibechana-26521	9	10	process	process	NOUN
bibechana-26521	9	11	in	in	ADP
bibechana-26521	9	12	which	which	PRON
bibechana-26521	9	13	an	an	DET
bibechana-26521	9	14	accelerated	accelerated	ADJ
bibechana-26521	9	15	ion	ion	NOUN
bibechana-26521	9	16	allowed	allow	VERB
bibechana-26521	9	17	to	to	PART
bibechana-26521	9	18	enter	enter	VERB
bibechana-26521	9	19	the	the	DET
bibechana-26521	9	20	surface	surface	NOUN
bibechana-26521	9	21	of	of	ADP
bibechana-26521	9	22	the	the	DET
bibechana-26521	9	23	target	target	NOUN
bibechana-26521	9	24	material	material	NOUN
bibechana-26521	9	25	.	.	PUNCT
bibechana-26521	10	1	ion	ion	NOUN
bibechana-26521	10	2	implantation	implantation	NOUN
bibechana-26521	10	3	method	method	NOUN
bibechana-26521	10	4	is	be	AUX
bibechana-26521	10	5	used	use	VERB
bibechana-26521	10	6	in	in	ADP
bibechana-26521	10	7	semiconductor	semiconductor	NOUN
bibechana-26521	10	8	device	device	NOUN
bibechana-26521	10	9	fabrication	fabrication	NOUN
bibechana-26521	10	10	and	and	CCONJ
bibechana-26521	10	11	in	in	ADP
bibechana-26521	10	12	metal	metal	NOUN
bibechana-26521	10	13	finishing	finishing	NOUN
bibechana-26521	10	14	,	,	PUNCT
bibechana-26521	10	15	as	as	ADV
bibechana-26521	10	16	well	well	ADV
bibechana-26521	10	17	as	as	ADP
bibechana-26521	10	18	various	various	ADJ
bibechana-26521	10	19	applications	application	NOUN
bibechana-26521	10	20	in	in	ADP
bibechana-26521	10	21	materials	material	NOUN
bibechana-26521	10	22	science	science	NOUN
bibechana-26521	10	23	research	research	NOUN
bibechana-26521	11	1	[	[	X
bibechana-26521	11	2	1	1	NUM
bibechana-26521	11	3	]	]	PUNCT
bibechana-26521	11	4	.	.	PUNCT
bibechana-26521	12	1	ion	ion	NOUN
bibechana-26521	12	2	implantation	implantation	NOUN
bibechana-26521	12	3	in	in	ADP
bibechana-26521	12	4	semiconductors	semiconductor	NOUN
bibechana-26521	12	5	is	be	AUX
bibechana-26521	12	6	currently	currently	ADV
bibechana-26521	12	7	receiving	receive	VERB
bibechana-26521	12	8	attention	attention	NOUN
bibechana-26521	12	9	in	in	ADP
bibechana-26521	12	10	several	several	ADJ
bibechana-26521	12	11	rather	rather	ADV
bibechana-26521	12	12	different	different	ADJ
bibechana-26521	12	13	contexts	contexts	NOUN
bibechana-26521	12	14	.	.	PUNCT
bibechana-26521	13	1	semiconductor	semiconductor	NOUN
bibechana-26521	13	2	physicists	physicist	NOUN
bibechana-26521	13	3	and	and	CCONJ
bibechana-26521	13	4	device	device	NOUN
bibechana-26521	13	5	engineers	engineer	NOUN
bibechana-26521	13	6	are	be	AUX
bibechana-26521	13	7	interested	interested	ADJ
bibechana-26521	13	8	in	in	ADP
bibechana-26521	13	9	the	the	DET
bibechana-26521	13	10	implantation	implantation	NOUN
bibechana-26521	13	11	process	process	NOUN
bibechana-26521	13	12	because	because	SCONJ
bibechana-26521	13	13	it	it	PRON
bibechana-26521	13	14	provides	provide	VERB
bibechana-26521	13	15	a	a	DET
bibechana-26521	13	16	new	new	ADJ
bibechana-26521	13	17	doping	doping	NOUN
bibechana-26521	13	18	technique	technique	NOUN
bibechana-26521	13	19	with	with	ADP
bibechana-26521	13	20	several	several	ADJ
bibechana-26521	13	21	potential	potential	ADJ
bibechana-26521	13	22	advantages	advantage	NOUN
bibechana-26521	13	23	over	over	ADP
bibechana-26521	13	24	more	more	ADJ
bibechana-26521	13	25	conventional	conventional	ADJ
bibechana-26521	13	26	doping	doping	NOUN
bibechana-26521	13	27	methods	method	NOUN
bibechana-26521	13	28	.	.	PUNCT
bibechana-26521	14	1	material	material	NOUN
bibechana-26521	14	2	scientists	scientist	NOUN
bibechana-26521	14	3	are	be	AUX
bibechana-26521	14	4	interested	interested	ADJ
bibechana-26521	14	5	in	in	ADP
bibechana-26521	14	6	the	the	DET
bibechana-26521	14	7	electrical	electrical	ADJ
bibechana-26521	14	8	properties	property	NOUN
bibechana-26521	14	9	of	of	ADP
bibechana-26521	14	10	ion	ion	NOUN
bibechana-26521	14	11	-	-	PUNCT
bibechana-26521	14	12	implanted	implant	VERB
bibechana-26521	14	13	semiconductors	semiconductor	NOUN
bibechana-26521	14	14	because	because	SCONJ
bibechana-26521	14	15	they	they	PRON
bibechana-26521	14	16	provide	provide	VERB
bibechana-26521	14	17	an	an	DET
bibechana-26521	14	18	important	important	ADJ
bibechana-26521	14	19	tool	tool	NOUN
bibechana-26521	14	20	for	for	ADP
bibechana-26521	14	21	studying	study	VERB
bibechana-26521	14	22	solubility	solubility	NOUN
bibechana-26521	14	23	problems	problem	NOUN
bibechana-26521	14	24	,	,	PUNCT
bibechana-26521	14	25	diffusion	diffusion	NOUN
bibechana-26521	14	26	processes	process	NOUN
bibechana-26521	14	27	,	,	PUNCT
bibechana-26521	14	28	and	and	CCONJ
bibechana-26521	14	29	radiation	radiation	NOUN
bibechana-26521	14	30	damage	damage	NOUN
bibechana-26521	14	31	effects	effect	NOUN
bibechana-26521	14	32	.	.	PUNCT
bibechana-26521	15	1	and	and	CCONJ
bibechana-26521	15	2	nuclear	nuclear	ADJ
bibechana-26521	15	3	physicists	physicist	NOUN
bibechana-26521	15	4	are	be	AUX
bibechana-26521	15	5	interested	interested	ADJ
bibechana-26521	15	6	in	in	ADP
bibechana-26521	15	7	the	the	DET
bibechana-26521	15	8	ion	ion	NOUN
bibechana-26521	15	9	distribution	distribution	NOUN
bibechana-26521	15	10	profile	profile	NOUN
bibechana-26521	15	11	in	in	ADP
bibechana-26521	15	12	an	an	DET
bibechana-26521	15	13	implanted	implant	VERB
bibechana-26521	15	14	semiconductor	semiconductor	NOUN
bibechana-26521	15	15	because	because	SCONJ
bibechana-26521	15	16	,	,	PUNCT
bibechana-26521	15	17	among	among	ADP
bibechana-26521	15	18	other	other	ADJ
bibechana-26521	15	19	things	thing	NOUN
bibechana-26521	15	20	,	,	PUNCT
bibechana-26521	15	21	it	it	PRON
bibechana-26521	15	22	yields	yield	VERB
bibechana-26521	15	23	important	important	ADJ
bibechana-26521	15	24	information	information	NOUN
bibechana-26521	15	25	on	on	ADP
bibechana-26521	15	26	the	the	DET
bibechana-26521	15	27	nature	nature	NOUN
bibechana-26521	15	28	of	of	ADP
bibechana-26521	15	29	the	the	DET
bibechana-26521	15	30	physical	physical	ADJ
bibechana-26521	15	31	processes	process	NOUN
bibechana-26521	15	32	that	that	PRON
bibechana-26521	15	33	occur	occur	VERB
bibechana-26521	15	34	when	when	SCONJ
bibechana-26521	15	35	an	an	DET
bibechana-26521	15	36	energetic	energetic	ADJ
bibechana-26521	15	37	particle	particle	NOUN
bibechana-26521	15	38	interacts	interact	VERB
bibechana-26521	15	39	with	with	ADP
bibechana-26521	15	40	a	a	DET
bibechana-26521	15	41	crystalline	crystalline	ADJ
bibechana-26521	15	42	or	or	CCONJ
bibechana-26521	15	43	amorphous	amorphous	ADJ
bibechana-26521	15	44	target	target	NOUN
bibechana-26521	15	45	[	[	X
bibechana-26521	15	46	2	2	NUM
bibechana-26521	15	47	]	]	PUNCT
bibechana-26521	15	48	.	.	PUNCT
bibechana-26521	16	1	this	this	DET
bibechana-26521	16	2	technology	technology	NOUN
bibechana-26521	16	3	also	also	ADV
bibechana-26521	16	4	has	have	VERB
bibechana-26521	16	5	its	its	PRON
bibechana-26521	16	6	this	this	DET
bibechana-26521	16	7	work	work	NOUN
bibechana-26521	16	8	is	be	AUX
bibechana-26521	16	9	licensed	license	VERB
bibechana-26521	16	10	under	under	ADP
bibechana-26521	16	11	the	the	DET
bibechana-26521	16	12	creative	creative	ADJ
bibechana-26521	16	13	commons	common	NOUN
bibechana-26521	16	14	cc	cc	ADP
bibechana-26521	16	15	by	by	ADP
bibechana-26521	16	16	-	-	PUNCT
bibechana-26521	16	17	nc	nc	NOUN
bibechana-26521	16	18	license	license	NOUN
bibechana-26521	16	19	.	.	PUNCT
bibechana-26521	17	1	https://creativecommons.org/licenses/by-nc/4.0/	https://creativecommons.org/licenses/by-nc/4.0/	PRON
bibechana-26521	17	2	doi	doi	NOUN
bibechana-26521	17	3	:	:	PUNCT
bibechana-26521	17	4	https://doi.org/10.3126/bibechana.v17i0.26521	https://doi.org/10.3126/bibechana.v17i0.26521	X
bibechana-26521	17	5	http://nepjol.info/index.php/bibechana	http://nepjol.info/index.php/bibechana	PROPN
bibechana-26521	17	6	mailto:karangiri575@gmail.com	mailto:karangiri575@gmail.com	PROPN
bibechana-26521	17	7	https://creativecommons.org/licenses/by-nc/4.0/	https://creativecommons.org/licenses/by-nc/4.0/	PROPN
bibechana-26521	17	8	https://doi.org/10.3126/bibechana.v17i0.26521	https://doi.org/10.3126/bibechana.v17i0.26521	X
bibechana-26521	17	9	k.	k.	PROPN
bibechana-26521	17	10	giri	giri	PROPN
bibechana-26521	17	11	,	,	PUNCT
bibechana-26521	17	12	k.	k.	PROPN
bibechana-26521	17	13	kandel	kandel	PROPN
bibechana-26521	17	14	/	/	SYM
bibechana-26521	17	15	bibechana	bibechana	PROPN
bibechana-26521	17	16	17	17	NUM
bibechana-26521	17	17	(	(	PUNCT
bibechana-26521	17	18	2020	2020	NUM
bibechana-26521	17	19	)	)	PUNCT
bibechana-26521	17	20	96	96	NUM
bibechana-26521	17	21	-	-	SYM
bibechana-26521	17	22	103	103	NUM
bibechana-26521	17	23	97	97	NUM
bibechana-26521	17	24	very	very	ADV
bibechana-26521	17	25	strong	strong	ADJ
bibechana-26521	17	26	application	application	NOUN
bibechana-26521	17	27	in	in	ADP
bibechana-26521	17	28	medical	medical	ADJ
bibechana-26521	17	29	physics	physics	NOUN
bibechana-26521	17	30	for	for	ADP
bibechana-26521	17	31	treatment	treatment	NOUN
bibechana-26521	17	32	of	of	ADP
bibechana-26521	17	33	cancer	cancer	NOUN
bibechana-26521	17	34	using	use	VERB
bibechana-26521	17	35	radiations	radiation	NOUN
bibechana-26521	17	36	e.g.	e.g.	ADV
bibechana-26521	17	37	proton	proton	NOUN
bibechana-26521	17	38	therapy	therapy	NOUN
bibechana-26521	17	39	[	[	X
bibechana-26521	17	40	3	3	NUM
bibechana-26521	17	41	]	]	PUNCT
bibechana-26521	17	42	.	.	PUNCT
bibechana-26521	18	1	most	most	ADV
bibechana-26521	18	2	importantly	importantly	ADV
bibechana-26521	18	3	,	,	PUNCT
bibechana-26521	18	4	ion	ion	NOUN
bibechana-26521	18	5	implantation	implantation	NOUN
bibechana-26521	18	6	requires	require	VERB
bibechana-26521	18	7	an	an	DET
bibechana-26521	18	8	understanding	understanding	NOUN
bibechana-26521	18	9	of	of	ADP
bibechana-26521	18	10	the	the	DET
bibechana-26521	18	11	fundamental	fundamental	ADJ
bibechana-26521	18	12	physics	physics	NOUN
bibechana-26521	18	13	and	and	CCONJ
bibechana-26521	18	14	chemistry	chemistry	NOUN
bibechana-26521	18	15	that	that	PRON
bibechana-26521	18	16	dictate	dictate	VERB
bibechana-26521	18	17	the	the	DET
bibechana-26521	18	18	interaction	interaction	NOUN
bibechana-26521	18	19	of	of	ADP
bibechana-26521	18	20	the	the	DET
bibechana-26521	18	21	ion	ion	NOUN
bibechana-26521	18	22	beam	beam	NOUN
bibechana-26521	18	23	and	and	CCONJ
bibechana-26521	18	24	the	the	DET
bibechana-26521	18	25	target	target	NOUN
bibechana-26521	18	26	.	.	PUNCT
bibechana-26521	19	1	the	the	DET
bibechana-26521	19	2	ions	ion	NOUN
bibechana-26521	19	3	alter	alter	VERB
bibechana-26521	19	4	the	the	DET
bibechana-26521	19	5	elemental	elemental	ADJ
bibechana-26521	19	6	composition	composition	NOUN
bibechana-26521	19	7	of	of	ADP
bibechana-26521	19	8	the	the	DET
bibechana-26521	19	9	target	target	NOUN
bibechana-26521	19	10	(	(	PUNCT
bibechana-26521	19	11	if	if	SCONJ
bibechana-26521	19	12	the	the	DET
bibechana-26521	19	13	ions	ion	NOUN
bibechana-26521	19	14	differ	differ	VERB
bibechana-26521	19	15	in	in	ADP
bibechana-26521	19	16	composition	composition	NOUN
bibechana-26521	19	17	from	from	ADP
bibechana-26521	19	18	the	the	DET
bibechana-26521	19	19	target	target	NOUN
bibechana-26521	19	20	)	)	PUNCT
bibechana-26521	19	21	,	,	PUNCT
bibechana-26521	19	22	stopping	stop	VERB
bibechana-26521	19	23	in	in	ADP
bibechana-26521	19	24	the	the	DET
bibechana-26521	19	25	target	target	NOUN
bibechana-26521	19	26	and	and	CCONJ
bibechana-26521	19	27	staying	stay	VERB
bibechana-26521	19	28	there	there	ADV
bibechana-26521	19	29	.	.	PUNCT
bibechana-26521	20	1	they	they	PRON
bibechana-26521	20	2	also	also	ADV
bibechana-26521	20	3	cause	cause	VERB
bibechana-26521	20	4	many	many	ADJ
bibechana-26521	20	5	chemical	chemical	ADJ
bibechana-26521	20	6	and	and	CCONJ
bibechana-26521	20	7	physical	physical	ADJ
bibechana-26521	20	8	changes	change	NOUN
bibechana-26521	20	9	in	in	ADP
bibechana-26521	20	10	the	the	DET
bibechana-26521	20	11	target	target	NOUN
bibechana-26521	20	12	by	by	ADP
bibechana-26521	20	13	transferring	transfer	VERB
bibechana-26521	20	14	their	their	PRON
bibechana-26521	20	15	energy	energy	NOUN
bibechana-26521	20	16	and	and	CCONJ
bibechana-26521	20	17	momentum	momentum	NOUN
bibechana-26521	20	18	to	to	ADP
bibechana-26521	20	19	the	the	DET
bibechana-26521	20	20	electrons	electron	NOUN
bibechana-26521	20	21	and	and	CCONJ
bibechana-26521	20	22	atomic	atomic	ADJ
bibechana-26521	20	23	nuclei	nucleus	NOUN
bibechana-26521	20	24	of	of	ADP
bibechana-26521	20	25	the	the	DET
bibechana-26521	20	26	target	target	NOUN
bibechana-26521	20	27	material	material	NOUN
bibechana-26521	20	28	[	[	X
bibechana-26521	20	29	4	4	NUM
bibechana-26521	20	30	]	]	PUNCT
bibechana-26521	20	31	.	.	PUNCT
bibechana-26521	21	1	this	this	PRON
bibechana-26521	21	2	causes	cause	VERB
bibechana-26521	21	3	a	a	DET
bibechana-26521	21	4	structural	structural	ADJ
bibechana-26521	21	5	change	change	NOUN
bibechana-26521	21	6	,	,	PUNCT
bibechana-26521	21	7	in	in	SCONJ
bibechana-26521	21	8	that	that	SCONJ
bibechana-26521	21	9	the	the	DET
bibechana-26521	21	10	amorphous	amorphous	ADJ
bibechana-26521	21	11	structure	structure	NOUN
bibechana-26521	21	12	of	of	ADP
bibechana-26521	21	13	the	the	DET
bibechana-26521	21	14	target	target	NOUN
bibechana-26521	21	15	can	can	AUX
bibechana-26521	21	16	be	be	AUX
bibechana-26521	21	17	damaged	damage	VERB
bibechana-26521	21	18	or	or	CCONJ
bibechana-26521	21	19	even	even	ADV
bibechana-26521	21	20	destroyed	destroy	VERB
bibechana-26521	21	21	by	by	ADP
bibechana-26521	21	22	the	the	DET
bibechana-26521	21	23	energetic	energetic	ADJ
bibechana-26521	21	24	collision	collision	NOUN
bibechana-26521	21	25	cascades	cascade	NOUN
bibechana-26521	21	26	.	.	PUNCT
bibechana-26521	22	1	nowadays	nowadays	ADV
bibechana-26521	22	2	this	this	PRON
bibechana-26521	22	3	has	have	AUX
bibechana-26521	22	4	been	be	AUX
bibechana-26521	22	5	easier	easy	ADJ
bibechana-26521	22	6	to	to	ADP
bibechana-26521	22	7	a	a	DET
bibechana-26521	22	8	great	great	ADJ
bibechana-26521	22	9	extent	extent	NOUN
bibechana-26521	22	10	by	by	ADP
bibechana-26521	22	11	various	various	ADJ
bibechana-26521	22	12	simulations	simulation	NOUN
bibechana-26521	22	13	and	and	CCONJ
bibechana-26521	22	14	programming	programming	NOUN
bibechana-26521	22	15	.	.	PUNCT
bibechana-26521	23	1	srim	srim	PROPN
bibechana-26521	23	2	is	be	AUX
bibechana-26521	23	3	one	one	NUM
bibechana-26521	23	4	of	of	ADP
bibechana-26521	23	5	the	the	DET
bibechana-26521	23	6	simulation	simulation	NOUN
bibechana-26521	23	7	programs	program	NOUN
bibechana-26521	23	8	based	base	VERB
bibechana-26521	23	9	on	on	ADP
bibechana-26521	23	10	monte	monte	PROPN
bibechana-26521	23	11	carlo	carlo	PROPN
bibechana-26521	23	12	mathematical	mathematical	ADJ
bibechana-26521	23	13	framework	framework	NOUN
bibechana-26521	23	14	of	of	ADP
bibechana-26521	23	15	quantum	quantum	ADJ
bibechana-26521	23	16	collision	collision	NOUN
bibechana-26521	23	17	that	that	PRON
bibechana-26521	23	18	predicts	predict	VERB
bibechana-26521	23	19	the	the	DET
bibechana-26521	23	20	various	various	ADJ
bibechana-26521	23	21	damages	damage	NOUN
bibechana-26521	23	22	during	during	ADP
bibechana-26521	23	23	ion	ion	NOUN
bibechana-26521	23	24	implantation	implantation	NOUN
bibechana-26521	23	25	experiments	experiment	NOUN
bibechana-26521	23	26	[	[	X
bibechana-26521	23	27	5	5	NUM
bibechana-26521	23	28	]	]	PUNCT
bibechana-26521	23	29	.	.	PUNCT
bibechana-26521	24	1	since	since	SCONJ
bibechana-26521	24	2	ion	ion	NOUN
bibechana-26521	24	3	implantation	implantation	NOUN
bibechana-26521	24	4	is	be	AUX
bibechana-26521	24	5	a	a	DET
bibechana-26521	24	6	low	low	ADJ
bibechana-26521	24	7	temperature	temperature	NOUN
bibechana-26521	24	8	process	process	NOUN
bibechana-26521	24	9	,	,	PUNCT
bibechana-26521	24	10	thermal	thermal	ADJ
bibechana-26521	24	11	effects	effect	NOUN
bibechana-26521	24	12	are	be	AUX
bibechana-26521	24	13	not	not	PART
bibechana-26521	24	14	considered	consider	VERB
bibechana-26521	24	15	in	in	ADP
bibechana-26521	24	16	srim	srim	NOUN
bibechana-26521	24	17	for	for	ADP
bibechana-26521	24	18	calculation	calculation	NOUN
bibechana-26521	24	19	of	of	ADP
bibechana-26521	24	20	damage	damage	NOUN
bibechana-26521	24	21	profiles	profile	NOUN
bibechana-26521	24	22	on	on	ADP
bibechana-26521	24	23	germanium	germanium	NOUN
bibechana-26521	24	24	,	,	PUNCT
bibechana-26521	24	25	so	so	SCONJ
bibechana-26521	24	26	the	the	DET
bibechana-26521	24	27	damage	damage	NOUN
bibechana-26521	24	28	which	which	PRON
bibechana-26521	24	29	is	be	AUX
bibechana-26521	24	30	calculated	calculate	VERB
bibechana-26521	24	31	is	be	AUX
bibechana-26521	24	32	that	that	SCONJ
bibechana-26521	24	33	which	which	PRON
bibechana-26521	24	34	would	would	AUX
bibechana-26521	24	35	happen	happen	VERB
bibechana-26521	24	36	for	for	ADP
bibechana-26521	24	37	an	an	DET
bibechana-26521	24	38	implantation	implantation	NOUN
bibechana-26521	24	39	at	at	ADP
bibechana-26521	24	40	0	0	PROPN
bibechana-26521	24	41	k.	k.	PROPN
bibechana-26521	24	42	also	also	ADV
bibechana-26521	24	43	,	,	PUNCT
bibechana-26521	24	44	this	this	DET
bibechana-26521	24	45	paper	paper	NOUN
bibechana-26521	24	46	does	do	AUX
bibechana-26521	24	47	n't	not	PART
bibechana-26521	24	48	take	take	VERB
bibechana-26521	24	49	account	account	NOUN
bibechana-26521	24	50	of	of	ADP
bibechana-26521	24	51	the	the	DET
bibechana-26521	24	52	dynamic	dynamic	ADJ
bibechana-26521	24	53	composition	composition	NOUN
bibechana-26521	24	54	changes	change	NOUN
bibechana-26521	24	55	in	in	ADP
bibechana-26521	24	56	the	the	DET
bibechana-26521	24	57	material	material	NOUN
bibechana-26521	24	58	and	and	CCONJ
bibechana-26521	24	59	there	there	PRON
bibechana-26521	24	60	is	be	VERB
bibechana-26521	24	61	no	no	DET
bibechana-26521	24	62	description	description	NOUN
bibechana-26521	24	63	of	of	ADP
bibechana-26521	24	64	defect	defect	NOUN
bibechana-26521	24	65	clustering	clustering	NOUN
bibechana-26521	24	66	and	and	CCONJ
bibechana-26521	24	67	irradiation	irradiation	NOUN
bibechana-26521	24	68	-	-	PUNCT
bibechana-26521	24	69	induced	induce	VERB
bibechana-26521	24	70	amorphization	amorphization	NOUN
bibechana-26521	24	71	that	that	PRON
bibechana-26521	24	72	severely	severely	ADV
bibechana-26521	24	73	limits	limit	VERB
bibechana-26521	24	74	its	its	PRON
bibechana-26521	24	75	usefulness	usefulness	NOUN
bibechana-26521	24	76	in	in	ADP
bibechana-26521	24	77	some	some	DET
bibechana-26521	24	78	cases	case	NOUN
bibechana-26521	24	79	.	.	PUNCT
bibechana-26521	25	1	germanium	germanium	NOUN
bibechana-26521	25	2	as	as	ADP
bibechana-26521	25	3	a	a	DET
bibechana-26521	25	4	substrate	substrate	NOUN
bibechana-26521	25	5	for	for	ADP
bibechana-26521	25	6	ion	ion	NOUN
bibechana-26521	25	7	implantation	implantation	NOUN
bibechana-26521	25	8	the	the	DET
bibechana-26521	25	9	development	development	NOUN
bibechana-26521	25	10	of	of	ADP
bibechana-26521	25	11	the	the	DET
bibechana-26521	25	12	germanium	germanium	NOUN
bibechana-26521	25	13	transistor	transistor	NOUN
bibechana-26521	25	14	in	in	ADP
bibechana-26521	25	15	1948	1948	NUM
bibechana-26521	25	16	opened	open	VERB
bibechana-26521	25	17	the	the	DET
bibechana-26521	25	18	door	door	NOUN
bibechana-26521	25	19	to	to	ADP
bibechana-26521	25	20	countless	countless	ADJ
bibechana-26521	25	21	applications	application	NOUN
bibechana-26521	25	22	of	of	ADP
bibechana-26521	25	23	solid	solid	ADJ
bibechana-26521	25	24	state	state	NOUN
bibechana-26521	25	25	electronics	electronic	NOUN
bibechana-26521	25	26	.	.	PUNCT
bibechana-26521	26	1	from	from	ADP
bibechana-26521	26	2	1950	1950	NUM
bibechana-26521	26	3	through	through	ADP
bibechana-26521	26	4	the	the	DET
bibechana-26521	26	5	early	early	ADJ
bibechana-26521	26	6	1970s	1970	NOUN
bibechana-26521	26	7	,	,	PUNCT
bibechana-26521	26	8	this	this	DET
bibechana-26521	26	9	area	area	NOUN
bibechana-26521	26	10	provided	provide	VERB
bibechana-26521	26	11	an	an	DET
bibechana-26521	26	12	increasing	increase	VERB
bibechana-26521	26	13	market	market	NOUN
bibechana-26521	26	14	for	for	ADP
bibechana-26521	26	15	germanium	germanium	NOUN
bibechana-26521	26	16	[	[	X
bibechana-26521	26	17	6	6	NUM
bibechana-26521	26	18	]	]	PUNCT
bibechana-26521	26	19	.	.	PUNCT
bibechana-26521	27	1	development	development	NOUN
bibechana-26521	27	2	in	in	ADP
bibechana-26521	27	3	quantum	quantum	ADJ
bibechana-26521	27	4	physics	physics	NOUN
bibechana-26521	27	5	in	in	ADP
bibechana-26521	27	6	turn	turn	NOUN
bibechana-26521	27	7	allowed	allow	VERB
bibechana-26521	27	8	the	the	DET
bibechana-26521	27	9	development	development	NOUN
bibechana-26521	27	10	of	of	ADP
bibechana-26521	27	11	the	the	DET
bibechana-26521	27	12	integrated	integrate	VERB
bibechana-26521	27	13	circuits	circuit	NOUN
bibechana-26521	27	14	in	in	ADP
bibechana-26521	27	15	1958	1958	NUM
bibechana-26521	27	16	[	[	X
bibechana-26521	27	17	7	7	X
bibechana-26521	27	18	]	]	PUNCT
bibechana-26521	27	19	and	and	CCONJ
bibechana-26521	27	20	the	the	DET
bibechana-26521	27	21	transistor	transistor	NOUN
bibechana-26521	27	22	in	in	ADP
bibechana-26521	27	23	1947	1947	NUM
bibechana-26521	27	24	[	[	X
bibechana-26521	27	25	8	8	NUM
bibechana-26521	27	26	]	]	PUNCT
bibechana-26521	27	27	.	.	PUNCT
bibechana-26521	28	1	meanwhile	meanwhile	ADV
bibechana-26521	28	2	,	,	PUNCT
bibechana-26521	28	3	the	the	DET
bibechana-26521	28	4	demand	demand	NOUN
bibechana-26521	28	5	for	for	ADP
bibechana-26521	28	6	germanium	germanium	NOUN
bibechana-26521	28	7	for	for	ADP
bibechana-26521	28	8	fiber	fiber	NOUN
bibechana-26521	28	9	optic	optic	ADJ
bibechana-26521	28	10	communication	communication	NOUN
bibechana-26521	28	11	networks	network	NOUN
bibechana-26521	28	12	,	,	PUNCT
bibechana-26521	28	13	infrared	infrared	PROPN
bibechana-26521	28	14	night	night	PROPN
bibechana-26521	28	15	vision	vision	PROPN
bibechana-26521	28	16	systems	system	NOUN
bibechana-26521	28	17	,	,	PUNCT
bibechana-26521	28	18	and	and	CCONJ
bibechana-26521	28	19	polymerization	polymerization	NOUN
bibechana-26521	28	20	catalysts	catalyst	NOUN
bibechana-26521	28	21	increased	increase	VERB
bibechana-26521	28	22	dramatically	dramatically	ADV
bibechana-26521	28	23	.	.	PUNCT
bibechana-26521	29	1	solar	solar	ADJ
bibechana-26521	29	2	panels	panel	NOUN
bibechana-26521	29	3	are	be	AUX
bibechana-26521	29	4	a	a	DET
bibechana-26521	29	5	major	major	ADJ
bibechana-26521	29	6	use	use	NOUN
bibechana-26521	29	7	of	of	ADP
bibechana-26521	29	8	germanium	germanium	NOUN
bibechana-26521	29	9	.	.	PUNCT
bibechana-26521	30	1	germanium	germanium	NOUN
bibechana-26521	30	2	is	be	AUX
bibechana-26521	30	3	the	the	DET
bibechana-26521	30	4	substrate	substrate	NOUN
bibechana-26521	30	5	of	of	ADP
bibechana-26521	30	6	the	the	DET
bibechana-26521	30	7	wafers	wafer	NOUN
bibechana-26521	30	8	for	for	ADP
bibechana-26521	30	9	highefficiency	highefficiency	NOUN
bibechana-26521	30	10	multi	multi	NOUN
bibechana-26521	30	11	junction	junction	NOUN
bibechana-26521	30	12	photovoltaic	photovoltaic	NOUN
bibechana-26521	30	13	cells	cell	NOUN
bibechana-26521	30	14	for	for	ADP
bibechana-26521	30	15	space	space	NOUN
bibechana-26521	30	16	applications	application	NOUN
bibechana-26521	30	17	.	.	PUNCT
bibechana-26521	31	1	high	high	ADJ
bibechana-26521	31	2	-	-	PUNCT
bibechana-26521	31	3	brightness	brightness	NOUN
bibechana-26521	31	4	leds	led	NOUN
bibechana-26521	31	5	,	,	PUNCT
bibechana-26521	31	6	used	use	VERB
bibechana-26521	31	7	for	for	ADP
bibechana-26521	31	8	automobile	automobile	NOUN
bibechana-26521	31	9	headlights	headlight	NOUN
bibechana-26521	31	10	and	and	CCONJ
bibechana-26521	31	11	to	to	ADP
bibechana-26521	31	12	backlight	backlight	ADJ
bibechana-26521	31	13	lcd	lcd	NOUN
bibechana-26521	31	14	screens	screen	NOUN
bibechana-26521	31	15	,	,	PUNCT
bibechana-26521	31	16	are	be	AUX
bibechana-26521	31	17	an	an	DET
bibechana-26521	31	18	important	important	ADJ
bibechana-26521	31	19	application	application	NOUN
bibechana-26521	31	20	.	.	PUNCT
bibechana-26521	32	1	because	because	SCONJ
bibechana-26521	32	2	germanium	germanium	NOUN
bibechana-26521	32	3	and	and	CCONJ
bibechana-26521	32	4	gallium	gallium	NOUN
bibechana-26521	32	5	arsenide	arsenide	NOUN
bibechana-26521	32	6	have	have	VERB
bibechana-26521	32	7	very	very	ADV
bibechana-26521	32	8	similar	similar	ADJ
bibechana-26521	32	9	lattice	lattice	NOUN
bibechana-26521	32	10	constants	constant	NOUN
bibechana-26521	32	11	,	,	PUNCT
bibechana-26521	32	12	germanium	germanium	NOUN
bibechana-26521	32	13	substrates	substrate	NOUN
bibechana-26521	32	14	can	can	AUX
bibechana-26521	32	15	be	be	AUX
bibechana-26521	32	16	used	use	VERB
bibechana-26521	32	17	to	to	PART
bibechana-26521	32	18	make	make	VERB
bibechana-26521	32	19	gallium	gallium	NOUN
bibechana-26521	32	20	arsenide	arsenide	NOUN
bibechana-26521	32	21	solar	solar	ADJ
bibechana-26521	32	22	cells	cell	NOUN
bibechana-26521	32	23	.	.	PUNCT
bibechana-26521	33	1	germaniumon	germaniumon	NOUN
bibechana-26521	33	2	-	-	PUNCT
bibechana-26521	33	3	insulator	insulator	NOUN
bibechana-26521	33	4	substrates	substrate	NOUN
bibechana-26521	33	5	are	be	AUX
bibechana-26521	33	6	seen	see	VERB
bibechana-26521	33	7	as	as	ADP
bibechana-26521	33	8	a	a	DET
bibechana-26521	33	9	potential	potential	ADJ
bibechana-26521	33	10	replacement	replacement	NOUN
bibechana-26521	33	11	for	for	ADP
bibechana-26521	33	12	silicon	silicon	NOUN
bibechana-26521	33	13	on	on	ADP
bibechana-26521	33	14	miniaturized	miniaturize	VERB
bibechana-26521	33	15	chips	chip	NOUN
bibechana-26521	33	16	[	[	X
bibechana-26521	33	17	9	9	NUM
bibechana-26521	33	18	]	]	PUNCT
bibechana-26521	33	19	.	.	PUNCT
bibechana-26521	34	1	the	the	DET
bibechana-26521	34	2	mars	mars	NOUN
bibechana-26521	34	3	exploration	exploration	NOUN
bibechana-26521	34	4	rovers	rover	NOUN
bibechana-26521	34	5	and	and	CCONJ
bibechana-26521	34	6	several	several	ADJ
bibechana-26521	34	7	satellites	satellite	NOUN
bibechana-26521	34	8	use	use	VERB
bibechana-26521	34	9	triple	triple	ADJ
bibechana-26521	34	10	junction	junction	NOUN
bibechana-26521	34	11	gallium	gallium	NOUN
bibechana-26521	34	12	arsenide	arsenide	NOUN
bibechana-26521	34	13	on	on	ADP
bibechana-26521	34	14	germanium	germanium	NOUN
bibechana-26521	34	15	cells	cell	NOUN
bibechana-26521	34	16	[	[	X
bibechana-26521	34	17	10	10	NUM
bibechana-26521	34	18	]	]	PUNCT
bibechana-26521	34	19	.	.	PUNCT
bibechana-26521	35	1	other	other	ADJ
bibechana-26521	35	2	uses	use	NOUN
bibechana-26521	35	3	in	in	ADP
bibechana-26521	35	4	electronics	electronic	NOUN
bibechana-26521	35	5	include	include	VERB
bibechana-26521	35	6	phosphors	phosphor	NOUN
bibechana-26521	35	7	in	in	ADP
bibechana-26521	35	8	fluorescent	fluorescent	ADJ
bibechana-26521	35	9	lamps	lamp	NOUN
bibechana-26521	35	10	and	and	CCONJ
bibechana-26521	35	11	solidstate	solidstate	VERB
bibechana-26521	35	12	light	light	ADJ
bibechana-26521	35	13	-	-	PUNCT
bibechana-26521	35	14	emitting	emit	VERB
bibechana-26521	35	15	diodes	diode	NOUN
bibechana-26521	35	16	(	(	PUNCT
bibechana-26521	35	17	leds	led	NOUN
bibechana-26521	35	18	)	)	PUNCT
bibechana-26521	36	1	[	[	X
bibechana-26521	36	2	11	11	NUM
bibechana-26521	36	3	]	]	PUNCT
bibechana-26521	36	4	.	.	PUNCT
bibechana-26521	37	1	germanium	germanium	NOUN
bibechana-26521	37	2	transistors	transistor	NOUN
bibechana-26521	37	3	are	be	AUX
bibechana-26521	37	4	still	still	ADV
bibechana-26521	37	5	used	use	VERB
bibechana-26521	37	6	in	in	ADP
bibechana-26521	37	7	some	some	DET
bibechana-26521	37	8	effects	effect	NOUN
bibechana-26521	37	9	pedals	pedal	NOUN
bibechana-26521	37	10	by	by	ADP
bibechana-26521	37	11	musicians	musician	NOUN
bibechana-26521	37	12	who	who	PRON
bibechana-26521	37	13	wish	wish	VERB
bibechana-26521	37	14	to	to	PART
bibechana-26521	37	15	reproduce	reproduce	VERB
bibechana-26521	37	16	the	the	DET
bibechana-26521	37	17	distinctive	distinctive	ADJ
bibechana-26521	37	18	tonal	tonal	ADJ
bibechana-26521	37	19	character	character	NOUN
bibechana-26521	37	20	of	of	ADP
bibechana-26521	37	21	the	the	DET
bibechana-26521	37	22	"	"	PUNCT
bibechana-26521	37	23	fuzz"-tone	fuzz"-tone	PROPN
bibechana-26521	37	24	from	from	ADP
bibechana-26521	37	25	the	the	DET
bibechana-26521	37	26	early	early	ADJ
bibechana-26521	37	27	rock	rock	NOUN
bibechana-26521	37	28	and	and	CCONJ
bibechana-26521	37	29	roll	roll	NOUN
bibechana-26521	37	30	era	era	NOUN
bibechana-26521	37	31	,	,	PUNCT
bibechana-26521	37	32	most	most	ADV
bibechana-26521	37	33	notably	notably	ADV
bibechana-26521	37	34	the	the	DET
bibechana-26521	37	35	dallas	dallas	PROPN
bibechana-26521	37	36	arbiter	arbiter	PROPN
bibechana-26521	37	37	fuzz	fuzz	PROPN
bibechana-26521	37	38	face	face	VERB
bibechana-26521	38	1	[	[	X
bibechana-26521	38	2	12	12	NUM
bibechana-26521	38	3	]	]	PUNCT
bibechana-26521	38	4	.	.	PUNCT
bibechana-26521	39	1	presently	presently	ADV
bibechana-26521	39	2	,	,	PUNCT
bibechana-26521	39	3	the	the	DET
bibechana-26521	39	4	major	major	ADJ
bibechana-26521	39	5	end	end	NOUN
bibechana-26521	39	6	uses	use	VERB
bibechana-26521	39	7	are	be	AUX
bibechana-26521	39	8	fibreoptic	fibreoptic	ADJ
bibechana-26521	39	9	systems	system	NOUN
bibechana-26521	39	10	,	,	PUNCT
bibechana-26521	39	11	infrared	infrared	ADJ
bibechana-26521	39	12	optics	optic	NOUN
bibechana-26521	39	13	,	,	PUNCT
bibechana-26521	39	14	solar	solar	ADJ
bibechana-26521	39	15	cell	cell	NOUN
bibechana-26521	39	16	applications	application	NOUN
bibechana-26521	39	17	,	,	PUNCT
bibechana-26521	39	18	and	and	CCONJ
bibechana-26521	39	19	light	light	ADJ
bibechana-26521	39	20	-	-	PUNCT
bibechana-26521	39	21	emitting	emit	VERB
bibechana-26521	39	22	diodes	diode	NOUN
bibechana-26521	39	23	(	(	PUNCT
bibechana-26521	39	24	leds	led	NOUN
bibechana-26521	39	25	)	)	PUNCT
bibechana-26521	39	26	.	.	PUNCT
bibechana-26521	40	1	germanium	germanium	NOUN
bibechana-26521	40	2	compounds	compound	NOUN
bibechana-26521	40	3	are	be	AUX
bibechana-26521	40	4	also	also	ADV
bibechana-26521	40	5	used	use	VERB
bibechana-26521	40	6	for	for	ADP
bibechana-26521	40	7	polymerization	polymerization	NOUN
bibechana-26521	40	8	catalysts	catalyst	NOUN
bibechana-26521	40	9	and	and	CCONJ
bibechana-26521	40	10	have	have	VERB
bibechana-26521	40	11	most	most	ADV
bibechana-26521	40	12	recently	recently	ADV
bibechana-26521	40	13	found	find	VERB
bibechana-26521	40	14	use	use	NOUN
bibechana-26521	40	15	in	in	ADP
bibechana-26521	40	16	the	the	DET
bibechana-26521	40	17	production	production	NOUN
bibechana-26521	40	18	of	of	ADP
bibechana-26521	40	19	nanowires	nanowire	NOUN
bibechana-26521	40	20	.	.	PUNCT
bibechana-26521	41	1	properties	property	NOUN
bibechana-26521	41	2	of	of	ADP
bibechana-26521	41	3	germanium	germanium	NOUN
bibechana-26521	41	4	can	can	AUX
bibechana-26521	41	5	be	be	AUX
bibechana-26521	41	6	altered	alter	VERB
bibechana-26521	41	7	in	in	ADP
bibechana-26521	41	8	useful	useful	ADJ
bibechana-26521	41	9	ways	way	NOUN
bibechana-26521	41	10	by	by	ADP
bibechana-26521	41	11	the	the	DET
bibechana-26521	41	12	deliberate	deliberate	ADJ
bibechana-26521	41	13	,	,	PUNCT
bibechana-26521	41	14	controlled	control	VERB
bibechana-26521	41	15	introduction	introduction	NOUN
bibechana-26521	41	16	of	of	ADP
bibechana-26521	41	17	impurities	impurity	NOUN
bibechana-26521	41	18	(	(	PUNCT
bibechana-26521	41	19	"	"	PUNCT
bibechana-26521	41	20	doping	dope	VERB
bibechana-26521	41	21	"	"	PUNCT
bibechana-26521	41	22	)	)	PUNCT
bibechana-26521	41	23	into	into	ADP
bibechana-26521	41	24	the	the	DET
bibechana-26521	41	25	crystal	crystal	NOUN
bibechana-26521	41	26	or	or	CCONJ
bibechana-26521	41	27	amorphous	amorphous	ADJ
bibechana-26521	41	28	structure	structure	NOUN
bibechana-26521	41	29	and	and	CCONJ
bibechana-26521	41	30	we	we	PRON
bibechana-26521	41	31	take	take	VERB
bibechana-26521	41	32	the	the	DET
bibechana-26521	41	33	amorphous	amorphous	ADJ
bibechana-26521	41	34	structure	structure	NOUN
bibechana-26521	41	35	as	as	ADP
bibechana-26521	41	36	a	a	DET
bibechana-26521	41	37	target	target	NOUN
bibechana-26521	41	38	.	.	PUNCT
bibechana-26521	42	1	where	where	SCONJ
bibechana-26521	42	2	two	two	NUM
bibechana-26521	42	3	differently	differently	ADV
bibechana-26521	42	4	-	-	PUNCT
bibechana-26521	42	5	doped	dope	VERB
bibechana-26521	42	6	regions	region	NOUN
bibechana-26521	42	7	exist	exist	VERB
bibechana-26521	42	8	in	in	ADP
bibechana-26521	42	9	the	the	DET
bibechana-26521	42	10	same	same	ADJ
bibechana-26521	42	11	layer	layer	NOUN
bibechana-26521	42	12	,	,	PUNCT
bibechana-26521	42	13	a	a	DET
bibechana-26521	42	14	p	p	NOUN
bibechana-26521	42	15	-	-	PUNCT
bibechana-26521	42	16	n	n	NOUN
bibechana-26521	42	17	junction	junction	NOUN
bibechana-26521	42	18	is	be	AUX
bibechana-26521	42	19	created	create	VERB
bibechana-26521	42	20	.	.	PUNCT
bibechana-26521	43	1	the	the	DET
bibechana-26521	43	2	behavior	behavior	NOUN
bibechana-26521	43	3	of	of	ADP
bibechana-26521	43	4	charge	charge	NOUN
bibechana-26521	43	5	carriers	carrier	NOUN
bibechana-26521	43	6	which	which	PRON
bibechana-26521	43	7	include	include	VERB
bibechana-26521	43	8	electrons	electron	NOUN
bibechana-26521	43	9	,	,	PUNCT
bibechana-26521	43	10	ions	ion	NOUN
bibechana-26521	43	11	and	and	CCONJ
bibechana-26521	43	12	holes	hole	NOUN
bibechana-26521	43	13	at	at	ADP
bibechana-26521	43	14	these	these	DET
bibechana-26521	43	15	junctions	junction	NOUN
bibechana-26521	43	16	is	be	AUX
bibechana-26521	43	17	the	the	DET
bibechana-26521	43	18	basis	basis	NOUN
bibechana-26521	43	19	of	of	ADP
bibechana-26521	43	20	diodes	diode	NOUN
bibechana-26521	43	21	,	,	PUNCT
bibechana-26521	43	22	transistors	transistor	NOUN
bibechana-26521	43	23	and	and	CCONJ
bibechana-26521	43	24	all	all	DET
bibechana-26521	43	25	modern	modern	ADJ
bibechana-26521	43	26	electronics	electronic	NOUN
bibechana-26521	43	27	[	[	X
bibechana-26521	43	28	13	13	NUM
bibechana-26521	43	29	]	]	PUNCT
bibechana-26521	43	30	.	.	PUNCT
bibechana-26521	44	1	stopping	stop	VERB
bibechana-26521	44	2	power	power	NOUN
bibechana-26521	44	3	the	the	DET
bibechana-26521	44	4	stopping	stopping	NOUN
bibechana-26521	44	5	power	power	NOUN
bibechana-26521	44	6	is	be	AUX
bibechana-26521	44	7	an	an	DET
bibechana-26521	44	8	essential	essential	ADJ
bibechana-26521	44	9	parameter	parameter	NOUN
bibechana-26521	44	10	when	when	SCONJ
bibechana-26521	44	11	ions	ion	NOUN
bibechana-26521	44	12	penetrate	penetrate	VERB
bibechana-26521	44	13	matter	matter	NOUN
bibechana-26521	44	14	.	.	PUNCT
bibechana-26521	45	1	it	it	PRON
bibechana-26521	45	2	defines	define	VERB
bibechana-26521	45	3	how	how	SCONJ
bibechana-26521	45	4	much	much	ADJ
bibechana-26521	45	5	energy	energy	NOUN
bibechana-26521	45	6	per	per	ADP
bibechana-26521	45	7	unit	unit	NOUN
bibechana-26521	45	8	path	path	NOUN
bibechana-26521	45	9	length	length	NOUN
bibechana-26521	45	10	an	an	DET
bibechana-26521	45	11	ion	ion	NOUN
bibechana-26521	45	12	loses	lose	VERB
bibechana-26521	45	13	when	when	SCONJ
bibechana-26521	45	14	penetrating	penetrate	VERB
bibechana-26521	45	15	a	a	DET
bibechana-26521	45	16	crystal	crystal	NOUN
bibechana-26521	45	17	,	,	PUNCT
bibechana-26521	45	18	thus	thus	ADV
bibechana-26521	45	19	the	the	DET
bibechana-26521	45	20	stopping	stopping	NOUN
bibechana-26521	45	21	power	power	NOUN
bibechana-26521	45	22	is	be	AUX
bibechana-26521	45	23	usually	usually	ADV
bibechana-26521	45	24	measured	measure	VERB
bibechana-26521	45	25	in	in	ADP
bibechana-26521	45	26	units	unit	NOUN
bibechana-26521	45	27	of	of	ADP
bibechana-26521	45	28	evcm	evcm	NOUN
bibechana-26521	45	29	-1	-1	PUNCT
bibechana-26521	46	1	but	but	CCONJ
bibechana-26521	46	2	here	here	ADV
bibechana-26521	46	3	we	we	PRON
bibechana-26521	46	4	will	will	AUX
bibechana-26521	46	5	measure	measure	VERB
bibechana-26521	46	6	the	the	DET
bibechana-26521	46	7	stopping	stopping	NOUN
bibechana-26521	46	8	power	power	NOUN
bibechana-26521	46	9	in	in	ADP
bibechana-26521	46	10	ev	ev	PROPN
bibechana-26521	46	11	/	/	SYM
bibechana-26521	46	12	å	å	PROPN
bibechana-26521	46	13	.	.	PUNCT
bibechana-26521	47	1	the	the	DET
bibechana-26521	47	2	stopping	stopping	NOUN
bibechana-26521	47	3	power	power	NOUN
bibechana-26521	47	4	depends	depend	VERB
bibechana-26521	47	5	primarily	primarily	ADV
bibechana-26521	47	6	on	on	ADP
bibechana-26521	47	7	the	the	DET
bibechana-26521	47	8	type	type	NOUN
bibechana-26521	47	9	of	of	ADP
bibechana-26521	47	10	material	material	NOUN
bibechana-26521	47	11	which	which	PRON
bibechana-26521	47	12	is	be	AUX
bibechana-26521	47	13	penetrated	penetrate	VERB
bibechana-26521	47	14	and	and	CCONJ
bibechana-26521	47	15	on	on	ADP
bibechana-26521	47	16	the	the	DET
bibechana-26521	47	17	ion	ion	NOUN
bibechana-26521	47	18	energy	energy	NOUN
bibechana-26521	47	19	.	.	PUNCT
bibechana-26521	48	1	when	when	SCONJ
bibechana-26521	48	2	energetic	energetic	ADJ
bibechana-26521	48	3	ions	ion	NOUN
bibechana-26521	48	4	are	be	AUX
bibechana-26521	48	5	allowed	allow	VERB
bibechana-26521	48	6	to	to	PART
bibechana-26521	48	7	penetrate	penetrate	VERB
bibechana-26521	48	8	through	through	ADP
bibechana-26521	48	9	target	target	NOUN
bibechana-26521	48	10	surface	surface	NOUN
bibechana-26521	48	11	,	,	PUNCT
bibechana-26521	48	12	a	a	DET
bibechana-26521	48	13	series	series	NOUN
bibechana-26521	48	14	of	of	ADP
bibechana-26521	48	15	screened	screen	VERB
bibechana-26521	48	16	coulomb	coulomb	NOUN
bibechana-26521	48	17	collision	collision	PROPN
bibechana-26521	48	18	occur	occur	VERB
bibechana-26521	48	19	where	where	SCONJ
bibechana-26521	48	20	the	the	DET
bibechana-26521	48	21	ion	ion	NOUN
bibechana-26521	48	22	's	's	PART
bibechana-26521	48	23	energy	energy	NOUN
bibechana-26521	48	24	gets	get	AUX
bibechana-26521	48	25	divided	divide	VERB
bibechana-26521	48	26	into	into	ADP
bibechana-26521	48	27	two	two	NUM
bibechana-26521	48	28	stopping	stop	VERB
bibechana-26521	48	29	parameters	parameter	NOUN
bibechana-26521	48	30	,	,	PUNCT
bibechana-26521	48	31	one	one	NUM
bibechana-26521	48	32	is	be	AUX
bibechana-26521	48	33	nuclear	nuclear	ADJ
bibechana-26521	48	34	stopping	stopping	NOUN
bibechana-26521	48	35	and	and	CCONJ
bibechana-26521	48	36	another	another	PRON
bibechana-26521	48	37	is	be	AUX
bibechana-26521	48	38	electronic	electronic	ADJ
bibechana-26521	48	39	stopping	stopping	NOUN
bibechana-26521	48	40	.	.	PUNCT
bibechana-26521	49	1	k.	k.	PROPN
bibechana-26521	49	2	giri	giri	PROPN
bibechana-26521	49	3	,	,	PUNCT
bibechana-26521	49	4	k.	k.	PROPN
bibechana-26521	49	5	kandel	kandel	PROPN
bibechana-26521	49	6	/	/	SYM
bibechana-26521	49	7	bibechana	bibechana	PROPN
bibechana-26521	49	8	17	17	NUM
bibechana-26521	49	9	(	(	PUNCT
bibechana-26521	49	10	2020	2020	NUM
bibechana-26521	49	11	)	)	PUNCT
bibechana-26521	49	12	96	96	NUM
bibechana-26521	49	13	-	-	SYM
bibechana-26521	49	14	103	103	NUM
bibechana-26521	49	15	98	98	NUM
bibechana-26521	49	16	mathematically	mathematically	ADV
bibechana-26521	49	17	,	,	PUNCT
bibechana-26521	49	18	the	the	DET
bibechana-26521	49	19	total	total	ADJ
bibechana-26521	49	20	stopping	stopping	NOUN
bibechana-26521	49	21	power	power	NOUN
bibechana-26521	49	22	can	can	AUX
bibechana-26521	49	23	be	be	AUX
bibechana-26521	49	24	given	give	VERB
bibechana-26521	49	25	as	as	ADP
bibechana-26521	49	26	:	:	PUNCT
bibechana-26521	49	27	s	s	PART
bibechana-26521	49	28	=	=	PUNCT
bibechana-26521	49	29	(	(	PUNCT
bibechana-26521	49	30	𝑑𝐸	𝑑𝐸	ADV
bibechana-26521	49	31	𝑑𝑥	𝑑𝑥	NOUN
bibechana-26521	49	32	)	)	PUNCT
bibechana-26521	49	33	nuclear	nuclear	NOUN
bibechana-26521	49	34	+	+	CCONJ
bibechana-26521	49	35	(	(	PUNCT
bibechana-26521	49	36	𝑑𝐸	𝑑𝐸	ADJ
bibechana-26521	49	37	𝑑𝑥	𝑑𝑥	NOUN
bibechana-26521	49	38	)	)	PUNCT
bibechana-26521	49	39	electronic	electronic	ADJ
bibechana-26521	49	40	…	…	PUNCT
bibechana-26521	49	41	…	…	SYM
bibechana-26521	49	42	……	……	NOUN
bibechana-26521	49	43	..	..	PUNCT
bibechana-26521	49	44	(	(	PUNCT
bibechana-26521	49	45	1	1	X
bibechana-26521	49	46	)	)	PUNCT
bibechana-26521	49	47	where	where	SCONJ
bibechana-26521	49	48	,	,	PUNCT
bibechana-26521	49	49	s	s	NOUN
bibechana-26521	49	50	=	=	NOUN
bibechana-26521	49	51	total	total	ADJ
bibechana-26521	49	52	stopping	stopping	NOUN
bibechana-26521	49	53	power	power	NOUN
bibechana-26521	49	54	and	and	CCONJ
bibechana-26521	49	55	defined	define	VERB
bibechana-26521	49	56	as	as	ADP
bibechana-26521	49	57	the	the	DET
bibechana-26521	49	58	energy	energy	NOUN
bibechana-26521	49	59	loss	loss	NOUN
bibechana-26521	49	60	(	(	PUNCT
bibechana-26521	49	61	e	e	NOUN
bibechana-26521	49	62	)	)	PUNCT
bibechana-26521	49	63	per	per	ADP
bibechana-26521	49	64	unit	unit	NOUN
bibechana-26521	49	65	path	path	NOUN
bibechana-26521	49	66	length	length	NOUN
bibechana-26521	49	67	(	(	PUNCT
bibechana-26521	49	68	x	x	NOUN
bibechana-26521	49	69	)	)	PUNCT
bibechana-26521	49	70	of	of	ADP
bibechana-26521	49	71	the	the	DET
bibechana-26521	49	72	ion	ion	NOUN
bibechana-26521	49	73	is	be	AUX
bibechana-26521	49	74	the	the	DET
bibechana-26521	49	75	sum	sum	NOUN
bibechana-26521	49	76	of	of	ADP
bibechana-26521	49	77	these	these	DET
bibechana-26521	49	78	two	two	NUM
bibechana-26521	49	79	factors	factor	NOUN
bibechana-26521	49	80	;	;	PUNCT
bibechana-26521	49	81	nuclear	nuclear	ADJ
bibechana-26521	49	82	stopping	stopping	NOUN
bibechana-26521	49	83	and	and	CCONJ
bibechana-26521	49	84	electronic	electronic	ADJ
bibechana-26521	49	85	stopping	stopping	NOUN
bibechana-26521	49	86	.	.	PUNCT
bibechana-26521	50	1	nuclear	nuclear	ADJ
bibechana-26521	50	2	stopping	stopping	NOUN
bibechana-26521	50	3	is	be	AUX
bibechana-26521	50	4	the	the	DET
bibechana-26521	50	5	energy	energy	NOUN
bibechana-26521	50	6	loss	loss	NOUN
bibechana-26521	50	7	by	by	ADP
bibechana-26521	50	8	ion	ion	NOUN
bibechana-26521	50	9	to	to	ADP
bibechana-26521	50	10	the	the	DET
bibechana-26521	50	11	target	target	NOUN
bibechana-26521	50	12	nuclei	nucleus	NOUN
bibechana-26521	50	13	per	per	ADP
bibechana-26521	50	14	unit	unit	NOUN
bibechana-26521	50	15	path	path	NOUN
bibechana-26521	50	16	length	length	NOUN
bibechana-26521	50	17	of	of	ADP
bibechana-26521	50	18	the	the	DET
bibechana-26521	50	19	ion	ion	NOUN
bibechana-26521	50	20	.	.	PUNCT
bibechana-26521	51	1	it	it	PRON
bibechana-26521	51	2	is	be	AUX
bibechana-26521	51	3	an	an	DET
bibechana-26521	51	4	elastic	elastic	ADJ
bibechana-26521	51	5	collision	collision	NOUN
bibechana-26521	51	6	between	between	ADP
bibechana-26521	51	7	two	two	NUM
bibechana-26521	51	8	atoms	atom	NOUN
bibechana-26521	51	9	and	and	CCONJ
bibechana-26521	51	10	can	can	AUX
bibechana-26521	51	11	be	be	AUX
bibechana-26521	51	12	described	describe	VERB
bibechana-26521	51	13	by	by	ADP
bibechana-26521	51	14	classical	classical	ADJ
bibechana-26521	51	15	kinematics	kinematic	NOUN
bibechana-26521	51	16	.	.	PUNCT
bibechana-26521	52	1	electronic	electronic	ADJ
bibechana-26521	52	2	stopping	stopping	NOUN
bibechana-26521	52	3	is	be	AUX
bibechana-26521	52	4	the	the	DET
bibechana-26521	52	5	energy	energy	NOUN
bibechana-26521	52	6	loss	loss	NOUN
bibechana-26521	52	7	by	by	ADP
bibechana-26521	52	8	ion	ion	NOUN
bibechana-26521	52	9	to	to	ADP
bibechana-26521	52	10	the	the	DET
bibechana-26521	52	11	electrons	electron	NOUN
bibechana-26521	52	12	of	of	ADP
bibechana-26521	52	13	target	target	NOUN
bibechana-26521	52	14	atoms	atom	NOUN
bibechana-26521	52	15	per	per	ADP
bibechana-26521	52	16	unit	unit	NOUN
bibechana-26521	52	17	path	path	NOUN
bibechana-26521	52	18	.	.	PUNCT
bibechana-26521	53	1	it	it	PRON
bibechana-26521	53	2	is	be	AUX
bibechana-26521	53	3	an	an	DET
bibechana-26521	53	4	inelastic	inelastic	ADJ
bibechana-26521	53	5	collision	collision	NOUN
bibechana-26521	53	6	and	and	CCONJ
bibechana-26521	53	7	the	the	DET
bibechana-26521	53	8	theoretical	theoretical	ADJ
bibechana-26521	53	9	model	model	NOUN
bibechana-26521	53	10	is	be	AUX
bibechana-26521	53	11	quite	quite	ADV
bibechana-26521	53	12	complex	complex	ADJ
bibechana-26521	53	13	.	.	PUNCT
bibechana-26521	54	1	the	the	DET
bibechana-26521	54	2	stopping	stopping	NOUN
bibechana-26521	54	3	is	be	AUX
bibechana-26521	54	4	similar	similar	ADJ
bibechana-26521	54	5	to	to	ADP
bibechana-26521	54	6	a	a	DET
bibechana-26521	54	7	viscous	viscous	ADJ
bibechana-26521	54	8	drag	drag	NOUN
bibechana-26521	54	9	force	force	NOUN
bibechana-26521	54	10	and	and	CCONJ
bibechana-26521	54	11	is	be	AUX
bibechana-26521	54	12	proportional	proportional	ADJ
bibechana-26521	54	13	to	to	ADP
bibechana-26521	54	14	the	the	DET
bibechana-26521	54	15	ion	ion	NOUN
bibechana-26521	54	16	velocity	velocity	NOUN
bibechana-26521	54	17	.	.	PUNCT
bibechana-26521	55	1	the	the	DET
bibechana-26521	55	2	energy	energy	NOUN
bibechana-26521	55	3	loss	loss	NOUN
bibechana-26521	55	4	by	by	ADP
bibechana-26521	55	5	incident	incident	NOUN
bibechana-26521	55	6	ions	ion	NOUN
bibechana-26521	55	7	is	be	AUX
bibechana-26521	55	8	dissipated	dissipate	VERB
bibechana-26521	55	9	through	through	ADP
bibechana-26521	55	10	the	the	DET
bibechana-26521	55	11	electron	electron	NOUN
bibechana-26521	55	12	cloud	cloud	NOUN
bibechana-26521	55	13	into	into	ADP
bibechana-26521	55	14	thermal	thermal	ADJ
bibechana-26521	55	15	vibrations	vibration	NOUN
bibechana-26521	55	16	of	of	ADP
bibechana-26521	55	17	the	the	DET
bibechana-26521	55	18	target	target	NOUN
bibechana-26521	55	19	.	.	PUNCT
bibechana-26521	56	1	the	the	DET
bibechana-26521	56	2	energy	energy	NOUN
bibechana-26521	56	3	loss	loss	NOUN
bibechana-26521	56	4	by	by	ADP
bibechana-26521	56	5	electronic	electronic	ADJ
bibechana-26521	56	6	energy	energy	NOUN
bibechana-26521	56	7	loses	lose	VERB
bibechana-26521	56	8	are	be	AUX
bibechana-26521	56	9	more	more	ADV
bibechana-26521	56	10	important	important	ADJ
bibechana-26521	56	11	than	than	SCONJ
bibechana-26521	56	12	nuclear	nuclear	ADJ
bibechana-26521	56	13	energy	energy	NOUN
bibechana-26521	56	14	loses	lose	VERB
bibechana-26521	56	15	for	for	ADP
bibechana-26521	56	16	improving	improve	VERB
bibechana-26521	56	17	hardness	hardness	NOUN
bibechana-26521	56	18	at	at	ADP
bibechana-26521	56	19	the	the	DET
bibechana-26521	56	20	near	near	ADJ
bibechana-26521	56	21	-	-	PUNCT
bibechana-26521	56	22	surface	surface	NOUN
bibechana-26521	56	23	region	region	NOUN
bibechana-26521	56	24	.	.	PUNCT
bibechana-26521	57	1	the	the	DET
bibechana-26521	57	2	electrical	electrical	ADJ
bibechana-26521	57	3	conductivity	conductivity	NOUN
bibechana-26521	57	4	and	and	CCONJ
bibechana-26521	57	5	hardness	hardness	NOUN
bibechana-26521	57	6	increases	increase	NOUN
bibechana-26521	57	7	with	with	ADP
bibechana-26521	57	8	the	the	DET
bibechana-26521	57	9	increase	increase	NOUN
bibechana-26521	57	10	in	in	ADP
bibechana-26521	57	11	electronic	electronic	ADJ
bibechana-26521	57	12	energy	energy	NOUN
bibechana-26521	57	13	loss	loss	NOUN
bibechana-26521	57	14	while	while	NOUN
bibechana-26521	57	15	,	,	PUNCT
bibechana-26521	57	16	conductivity	conductivity	NOUN
bibechana-26521	57	17	and	and	CCONJ
bibechana-26521	57	18	hardness	hardness	NOUN
bibechana-26521	57	19	increases	increase	NOUN
bibechana-26521	57	20	with	with	ADP
bibechana-26521	57	21	the	the	DET
bibechana-26521	57	22	decrease	decrease	NOUN
bibechana-26521	57	23	in	in	ADP
bibechana-26521	57	24	nuclear	nuclear	ADJ
bibechana-26521	57	25	energy	energy	NOUN
bibechana-26521	57	26	loss	loss	NOUN
bibechana-26521	57	27	.	.	PUNCT
bibechana-26521	58	1	this	this	DET
bibechana-26521	58	2	remarkable	remarkable	ADJ
bibechana-26521	58	3	improvement	improvement	NOUN
bibechana-26521	58	4	in	in	ADP
bibechana-26521	58	5	hardness	hardness	ADJ
bibechana-26521	58	6	and	and	CCONJ
bibechana-26521	58	7	electrical	electrical	ADJ
bibechana-26521	58	8	conductivity	conductivity	NOUN
bibechana-26521	58	9	is	be	AUX
bibechana-26521	58	10	related	relate	VERB
bibechana-26521	58	11	to	to	ADP
bibechana-26521	58	12	the	the	DET
bibechana-26521	58	13	degree	degree	NOUN
bibechana-26521	58	14	of	of	ADP
bibechana-26521	58	15	radiationinduced	radiationinduce	VERB
bibechana-26521	58	16	changes	change	NOUN
bibechana-26521	58	17	in	in	ADP
bibechana-26521	58	18	microstructure	microstructure	NOUN
bibechana-26521	58	19	and	and	CCONJ
bibechana-26521	58	20	composition	composition	NOUN
bibechana-26521	58	21	.	.	PUNCT
bibechana-26521	59	1	in	in	ADP
bibechana-26521	59	2	particular	particular	ADJ
bibechana-26521	59	3	,	,	PUNCT
bibechana-26521	59	4	determination	determination	NOUN
bibechana-26521	59	5	of	of	ADP
bibechana-26521	59	6	the	the	DET
bibechana-26521	59	7	electronic	electronic	ADJ
bibechana-26521	59	8	stopping	stopping	NOUN
bibechana-26521	59	9	power	power	NOUN
bibechana-26521	59	10	becomes	become	VERB
bibechana-26521	59	11	crucial	crucial	ADJ
bibechana-26521	59	12	for	for	ADP
bibechana-26521	59	13	studies	study	NOUN
bibechana-26521	59	14	of	of	ADP
bibechana-26521	59	15	ion	ion	NOUN
bibechana-26521	59	16	ranges	range	NOUN
bibechana-26521	59	17	and	and	CCONJ
bibechana-26521	59	18	radiation	radiation	NOUN
bibechana-26521	59	19	damage	damage	NOUN
bibechana-26521	59	20	in	in	ADP
bibechana-26521	59	21	semiconductors	semiconductor	NOUN
bibechana-26521	59	22	.	.	PUNCT
bibechana-26521	60	1	range	range	NOUN
bibechana-26521	60	2	distribution	distribution	NOUN
bibechana-26521	60	3	and	and	CCONJ
bibechana-26521	60	4	collision	collision	NOUN
bibechana-26521	60	5	events	event	NOUN
bibechana-26521	60	6	the	the	DET
bibechana-26521	60	7	range	range	NOUN
bibechana-26521	60	8	distribution	distribution	NOUN
bibechana-26521	60	9	depends	depend	VERB
bibechana-26521	60	10	primarily	primarily	ADV
bibechana-26521	60	11	on	on	ADP
bibechana-26521	60	12	the	the	DET
bibechana-26521	60	13	energy	energy	NOUN
bibechana-26521	60	14	,	,	PUNCT
bibechana-26521	60	15	mass	mass	NOUN
bibechana-26521	60	16	,	,	PUNCT
bibechana-26521	60	17	and	and	CCONJ
bibechana-26521	60	18	atomic	atomic	ADJ
bibechana-26521	60	19	number	number	NOUN
bibechana-26521	60	20	of	of	ADP
bibechana-26521	60	21	the	the	DET
bibechana-26521	60	22	incoming	incoming	ADJ
bibechana-26521	60	23	ions	ion	NOUN
bibechana-26521	60	24	,	,	PUNCT
bibechana-26521	60	25	the	the	DET
bibechana-26521	60	26	mass	mass	ADJ
bibechana-26521	60	27	and	and	CCONJ
bibechana-26521	60	28	atomic	atomic	ADJ
bibechana-26521	60	29	number	number	NOUN
bibechana-26521	60	30	of	of	ADP
bibechana-26521	60	31	target	target	NOUN
bibechana-26521	60	32	atoms	atom	NOUN
bibechana-26521	60	33	,	,	PUNCT
bibechana-26521	60	34	the	the	DET
bibechana-26521	60	35	density	density	NOUN
bibechana-26521	60	36	of	of	ADP
bibechana-26521	60	37	the	the	DET
bibechana-26521	60	38	target	target	NOUN
bibechana-26521	60	39	.	.	PUNCT
bibechana-26521	61	1	the	the	DET
bibechana-26521	61	2	total	total	ADJ
bibechana-26521	61	3	distance	distance	NOUN
bibechana-26521	61	4	that	that	SCONJ
bibechana-26521	61	5	the	the	DET
bibechana-26521	61	6	ion	ion	NOUN
bibechana-26521	61	7	travels	travel	VERB
bibechana-26521	61	8	in	in	ADP
bibechana-26521	61	9	coming	come	VERB
bibechana-26521	61	10	to	to	ADP
bibechana-26521	61	11	rest	rest	NOUN
bibechana-26521	61	12	is	be	AUX
bibechana-26521	61	13	called	call	VERB
bibechana-26521	61	14	its	its	PRON
bibechana-26521	61	15	range	range	NOUN
bibechana-26521	61	16	and	and	CCONJ
bibechana-26521	61	17	the	the	DET
bibechana-26521	61	18	projection	projection	NOUN
bibechana-26521	61	19	of	of	ADP
bibechana-26521	61	20	this	this	DET
bibechana-26521	61	21	distance	distance	NOUN
bibechana-26521	61	22	onto	onto	ADP
bibechana-26521	61	23	the	the	DET
bibechana-26521	61	24	direction	direction	NOUN
bibechana-26521	61	25	of	of	ADP
bibechana-26521	61	26	incidence	incidence	NOUN
bibechana-26521	61	27	is	be	AUX
bibechana-26521	61	28	called	call	VERB
bibechana-26521	61	29	the	the	DET
bibechana-26521	61	30	projected	project	VERB
bibechana-26521	61	31	range	range	NOUN
bibechana-26521	61	32	.	.	PUNCT
bibechana-26521	62	1	total	total	ADJ
bibechana-26521	62	2	target	target	NOUN
bibechana-26521	62	3	displacements	displacement	NOUN
bibechana-26521	62	4	are	be	AUX
bibechana-26521	62	5	the	the	DET
bibechana-26521	62	6	number	number	NOUN
bibechana-26521	62	7	of	of	ADP
bibechana-26521	62	8	atoms	atom	NOUN
bibechana-26521	62	9	knocked	knock	VERB
bibechana-26521	62	10	off	off	ADP
bibechana-26521	62	11	their	their	PRON
bibechana-26521	62	12	target	target	NOUN
bibechana-26521	62	13	lattice	lattice	NOUN
bibechana-26521	62	14	site	site	NOUN
bibechana-26521	62	15	.	.	PUNCT
bibechana-26521	63	1	a	a	DET
bibechana-26521	63	2	vacancy	vacancy	NOUN
bibechana-26521	63	3	is	be	AUX
bibechana-26521	63	4	the	the	DET
bibechana-26521	63	5	hole	hole	NOUN
bibechana-26521	63	6	left	leave	VERB
bibechana-26521	63	7	behind	behind	ADV
bibechana-26521	63	8	when	when	SCONJ
bibechana-26521	63	9	a	a	DET
bibechana-26521	63	10	recoil	recoil	NOUN
bibechana-26521	63	11	atom	atom	NOUN
bibechana-26521	63	12	moves	move	NOUN
bibechana-26521	63	13	from	from	ADP
bibechana-26521	63	14	its	its	PRON
bibechana-26521	63	15	original	original	ADJ
bibechana-26521	63	16	site	site	NOUN
bibechana-26521	63	17	.	.	PUNCT
bibechana-26521	64	1	if	if	SCONJ
bibechana-26521	64	2	a	a	DET
bibechana-26521	64	3	moving	move	VERB
bibechana-26521	64	4	atom	atom	NOUN
bibechana-26521	64	5	strikes	strike	VERB
bibechana-26521	64	6	a	a	DET
bibechana-26521	64	7	stationary	stationary	ADJ
bibechana-26521	64	8	target	target	NOUN
bibechana-26521	64	9	atom	atom	NOUN
bibechana-26521	64	10	and	and	CCONJ
bibechana-26521	64	11	transfers	transfer	NOUN
bibechana-26521	64	12	more	more	ADJ
bibechana-26521	64	13	than	than	ADP
bibechana-26521	64	14	its	its	PRON
bibechana-26521	64	15	displacement	displacement	ADJ
bibechana-26521	64	16	energy	energy	NOUN
bibechana-26521	64	17	to	to	ADP
bibechana-26521	64	18	it	it	PRON
bibechana-26521	64	19	,	,	PUNCT
bibechana-26521	64	20	and	and	CCONJ
bibechana-26521	64	21	the	the	DET
bibechana-26521	64	22	initial	initial	ADJ
bibechana-26521	64	23	atom	atom	NOUN
bibechana-26521	64	24	,	,	PUNCT
bibechana-26521	64	25	after	after	ADP
bibechana-26521	64	26	the	the	DET
bibechana-26521	64	27	collision	collision	NOUN
bibechana-26521	64	28	,	,	PUNCT
bibechana-26521	64	29	does	do	AUX
bibechana-26521	64	30	not	not	PART
bibechana-26521	64	31	have	have	VERB
bibechana-26521	64	32	enough	enough	ADJ
bibechana-26521	64	33	energy	energy	NOUN
bibechana-26521	64	34	to	to	PART
bibechana-26521	64	35	move	move	VERB
bibechana-26521	64	36	onwards	onwards	ADV
bibechana-26521	64	37	,	,	PUNCT
bibechana-26521	64	38	and	and	CCONJ
bibechana-26521	64	39	it	it	PRON
bibechana-26521	64	40	is	be	AUX
bibechana-26521	64	41	the	the	DET
bibechana-26521	64	42	same	same	ADJ
bibechana-26521	64	43	element	element	NOUN
bibechana-26521	64	44	as	as	ADP
bibechana-26521	64	45	the	the	DET
bibechana-26521	64	46	atom	atom	NOUN
bibechana-26521	64	47	it	it	PRON
bibechana-26521	64	48	struck	strike	VERB
bibechana-26521	64	49	,	,	PUNCT
bibechana-26521	64	50	then	then	ADV
bibechana-26521	64	51	it	it	PRON
bibechana-26521	64	52	just	just	ADV
bibechana-26521	64	53	replaces	replace	VERB
bibechana-26521	64	54	that	that	DET
bibechana-26521	64	55	atom	atom	NOUN
bibechana-26521	64	56	in	in	ADP
bibechana-26521	64	57	the	the	DET
bibechana-26521	64	58	target	target	NOUN
bibechana-26521	64	59	and	and	CCONJ
bibechana-26521	64	60	there	there	PRON
bibechana-26521	64	61	is	be	VERB
bibechana-26521	64	62	no	no	DET
bibechana-26521	64	63	vacancy	vacancy	NOUN
bibechana-26521	64	64	created	create	VERB
bibechana-26521	64	65	.	.	PUNCT
bibechana-26521	65	1	these	these	PRON
bibechana-26521	65	2	are	be	AUX
bibechana-26521	65	3	termed	term	VERB
bibechana-26521	65	4	as	as	ADP
bibechana-26521	65	5	replacement	replacement	NOUN
bibechana-26521	65	6	collisions	collision	NOUN
bibechana-26521	65	7	.	.	PUNCT
bibechana-26521	66	1	displacements	displacement	NOUN
bibechana-26521	66	2	=	=	PUNCT
bibechana-26521	66	3	vacancies	vacancy	NOUN
bibechana-26521	66	4	+	+	NUM
bibechana-26521	66	5	replacement	replacement	NOUN
bibechana-26521	66	6	collisions	collision	NOUN
bibechana-26521	66	7	.	.	PUNCT
bibechana-26521	67	1	……	……	NOUN
bibechana-26521	67	2	……	……	NOUN
bibechana-26521	67	3	..	..	PUNCT
bibechana-26521	67	4	(	(	PUNCT
bibechana-26521	67	5	2	2	X
bibechana-26521	67	6	)	)	PUNCT
bibechana-26521	67	7	when	when	SCONJ
bibechana-26521	67	8	a	a	DET
bibechana-26521	67	9	recoil	recoil	NOUN
bibechana-26521	67	10	atom	atom	NOUN
bibechana-26521	67	11	stops	stop	VERB
bibechana-26521	67	12	,	,	PUNCT
bibechana-26521	67	13	and	and	CCONJ
bibechana-26521	67	14	is	be	AUX
bibechana-26521	67	15	not	not	PART
bibechana-26521	67	16	a	a	DET
bibechana-26521	67	17	replacement	replacement	NOUN
bibechana-26521	67	18	atom	atom	NOUN
bibechana-26521	67	19	,	,	PUNCT
bibechana-26521	67	20	then	then	ADV
bibechana-26521	67	21	it	it	PRON
bibechana-26521	67	22	becomes	become	VERB
bibechana-26521	67	23	an	an	DET
bibechana-26521	67	24	interstitial	interstitial	NOUN
bibechana-26521	67	25	.	.	PUNCT
bibechana-26521	68	1	these	these	PRON
bibechana-26521	68	2	may	may	AUX
bibechana-26521	68	3	be	be	AUX
bibechana-26521	68	4	summed	sum	VERB
bibechana-26521	68	5	as	as	ADP
bibechana-26521	68	6	:	:	PUNCT
bibechana-26521	68	7	vacancies	vacancy	NOUN
bibechana-26521	68	8	=	=	NOUN
bibechana-26521	68	9	interstitials	interstitial	NOUN
bibechana-26521	68	10	+	+	CCONJ
bibechana-26521	68	11	atoms	atom	NOUN
bibechana-26521	68	12	which	which	PRON
bibechana-26521	68	13	leave	leave	VERB
bibechana-26521	68	14	the	the	DET
bibechana-26521	68	15	target	target	NOUN
bibechana-26521	68	16	volume	volume	NOUN
bibechana-26521	68	17	…	…	PUNCT
bibechana-26521	68	18	…	…	SYM
bibechana-26521	68	19	……	……	NOUN
bibechana-26521	68	20	.	.	PUNCT
bibechana-26521	69	1	(	(	PUNCT
bibechana-26521	69	2	3	3	X
bibechana-26521	69	3	)	)	PUNCT
bibechana-26521	69	4	if	if	SCONJ
bibechana-26521	69	5	a	a	DET
bibechana-26521	69	6	cascade	cascade	NOUN
bibechana-26521	69	7	atom	atom	NOUN
bibechana-26521	69	8	leaves	leave	VERB
bibechana-26521	69	9	the	the	DET
bibechana-26521	69	10	target	target	NOUN
bibechana-26521	69	11	volume	volume	NOUN
bibechana-26521	69	12	,	,	PUNCT
bibechana-26521	69	13	it	it	PRON
bibechana-26521	69	14	is	be	AUX
bibechana-26521	69	15	no	no	ADV
bibechana-26521	69	16	longer	long	ADV
bibechana-26521	69	17	followed	follow	VERB
bibechana-26521	69	18	.	.	PUNCT
bibechana-26521	70	1	2	2	X
bibechana-26521	70	2	.	.	X
bibechana-26521	70	3	methods	method	NOUN
bibechana-26521	70	4	the	the	DET
bibechana-26521	70	5	doping	doping	NOUN
bibechana-26521	70	6	of	of	ADP
bibechana-26521	70	7	impurities	impurity	NOUN
bibechana-26521	70	8	on	on	ADP
bibechana-26521	70	9	semiconducting	semiconducte	VERB
bibechana-26521	70	10	elements	element	NOUN
bibechana-26521	70	11	can	can	AUX
bibechana-26521	70	12	be	be	AUX
bibechana-26521	70	13	processed	process	VERB
bibechana-26521	70	14	by	by	ADP
bibechana-26521	70	15	two	two	NUM
bibechana-26521	70	16	ways	way	NOUN
bibechana-26521	70	17	:	:	PUNCT
bibechana-26521	70	18	diffusion	diffusion	NOUN
bibechana-26521	70	19	and	and	CCONJ
bibechana-26521	70	20	implantation	implantation	NOUN
bibechana-26521	71	1	[	[	X
bibechana-26521	71	2	14	14	NUM
bibechana-26521	71	3	]	]	PUNCT
bibechana-26521	71	4	.	.	PUNCT
bibechana-26521	72	1	diffusion	diffusion	NOUN
bibechana-26521	72	2	is	be	AUX
bibechana-26521	72	3	limiting	limit	VERB
bibechana-26521	72	4	process	process	NOUN
bibechana-26521	72	5	due	due	ADP
bibechana-26521	72	6	to	to	ADP
bibechana-26521	72	7	saturation	saturation	NOUN
bibechana-26521	72	8	limit	limit	NOUN
bibechana-26521	72	9	and	and	CCONJ
bibechana-26521	72	10	so	so	ADV
bibechana-26521	72	11	,	,	PUNCT
bibechana-26521	72	12	we	we	PRON
bibechana-26521	72	13	ca	can	AUX
bibechana-26521	72	14	n't	not	PART
bibechana-26521	72	15	make	make	VERB
bibechana-26521	72	16	high	high	ADJ
bibechana-26521	72	17	concentrated	concentrated	ADJ
bibechana-26521	72	18	carriers	carrier	NOUN
bibechana-26521	72	19	.	.	PUNCT
bibechana-26521	73	1	to	to	PART
bibechana-26521	73	2	overcome	overcome	VERB
bibechana-26521	73	3	the	the	DET
bibechana-26521	73	4	diffusion	diffusion	NOUN
bibechana-26521	73	5	issues	issue	NOUN
bibechana-26521	73	6	of	of	ADP
bibechana-26521	73	7	dopants	dopant	NOUN
bibechana-26521	73	8	and	and	CCONJ
bibechana-26521	73	9	activation	activation	NOUN
bibechana-26521	73	10	of	of	ADP
bibechana-26521	73	11	dopants	dopant	NOUN
bibechana-26521	73	12	in	in	ADP
bibechana-26521	73	13	materialion	materialion	NOUN
bibechana-26521	73	14	implantation	implantation	NOUN
bibechana-26521	73	15	or	or	CCONJ
bibechana-26521	73	16	ion	ion	NOUN
bibechana-26521	73	17	irradiation	irradiation	NOUN
bibechana-26521	73	18	is	be	AUX
bibechana-26521	73	19	the	the	DET
bibechana-26521	73	20	best	good	ADJ
bibechana-26521	73	21	.	.	PUNCT
bibechana-26521	74	1	in	in	ADP
bibechana-26521	74	2	general	general	ADJ
bibechana-26521	74	3	,	,	PUNCT
bibechana-26521	74	4	using	use	VERB
bibechana-26521	74	5	particle	particle	NOUN
bibechana-26521	74	6	accelerators	accelerator	NOUN
bibechana-26521	74	7	to	to	PART
bibechana-26521	74	8	shoot	shoot	VERB
bibechana-26521	74	9	energetic	energetic	ADJ
bibechana-26521	74	10	ion	ion	NOUN
bibechana-26521	74	11	on	on	ADP
bibechana-26521	74	12	a	a	DET
bibechana-26521	74	13	material	material	NOUN
bibechana-26521	74	14	is	be	AUX
bibechana-26521	74	15	the	the	DET
bibechana-26521	74	16	basic	basic	ADJ
bibechana-26521	74	17	process	process	NOUN
bibechana-26521	74	18	of	of	ADP
bibechana-26521	74	19	implantation	implantation	NOUN
bibechana-26521	74	20	and	and	CCONJ
bibechana-26521	74	21	irradiation	irradiation	NOUN
bibechana-26521	74	22	.	.	PUNCT
bibechana-26521	75	1	among	among	ADP
bibechana-26521	75	2	some	some	DET
bibechana-26521	75	3	trending	trend	VERB
bibechana-26521	75	4	techniques	technique	NOUN
bibechana-26521	75	5	we	we	PRON
bibechana-26521	75	6	employed	employ	VERB
bibechana-26521	75	7	srim	srim	NOUN
bibechana-26521	75	8	to	to	PART
bibechana-26521	75	9	study	study	VERB
bibechana-26521	75	10	the	the	DET
bibechana-26521	75	11	damage	damage	NOUN
bibechana-26521	75	12	profiles	profile	NOUN
bibechana-26521	75	13	of	of	ADP
bibechana-26521	75	14	target	target	NOUN
bibechana-26521	75	15	atom	atom	NOUN
bibechana-26521	75	16	when	when	SCONJ
bibechana-26521	75	17	doped	dope	VERB
bibechana-26521	75	18	with	with	ADP
bibechana-26521	75	19	different	different	ADJ
bibechana-26521	75	20	ions	ion	NOUN
bibechana-26521	75	21	.	.	PUNCT
bibechana-26521	76	1	because	because	SCONJ
bibechana-26521	76	2	of	of	ADP
bibechana-26521	76	3	less	less	ADJ
bibechana-26521	76	4	error	error	NOUN
bibechana-26521	76	5	in	in	ADP
bibechana-26521	76	6	srim	srim	PROPN
bibechana-26521	76	7	data	datum	NOUN
bibechana-26521	76	8	and	and	CCONJ
bibechana-26521	76	9	availability	availability	NOUN
bibechana-26521	76	10	of	of	ADP
bibechana-26521	76	11	different	different	ADJ
bibechana-26521	76	12	updated	update	VERB
bibechana-26521	76	13	version	version	NOUN
bibechana-26521	76	14	of	of	ADP
bibechana-26521	76	15	this	this	DET
bibechana-26521	76	16	program	program	NOUN
bibechana-26521	76	17	motivates	motivate	VERB
bibechana-26521	76	18	me	i	PRON
bibechana-26521	76	19	to	to	PART
bibechana-26521	76	20	use	use	VERB
bibechana-26521	76	21	srim	srim	NOUN
bibechana-26521	76	22	for	for	ADP
bibechana-26521	76	23	the	the	DET
bibechana-26521	76	24	study	study	NOUN
bibechana-26521	76	25	of	of	ADP
bibechana-26521	76	26	damages	damage	NOUN
bibechana-26521	76	27	in	in	ADP
bibechana-26521	76	28	germanium	germanium	NOUN
bibechana-26521	76	29	.	.	PUNCT
bibechana-26521	77	1	simulation	simulation	NOUN
bibechana-26521	77	2	methodology	methodology	NOUN
bibechana-26521	77	3	we	we	PRON
bibechana-26521	77	4	use	use	VERB
bibechana-26521	77	5	the	the	DET
bibechana-26521	77	6	simulation	simulation	NOUN
bibechana-26521	77	7	software	software	PROPN
bibechana-26521	77	8	srim	srim	PROPN
bibechana-26521	77	9	and	and	CCONJ
bibechana-26521	77	10	matlab	matlab	PROPN
bibechana-26521	77	11	for	for	ADP
bibechana-26521	77	12	the	the	DET
bibechana-26521	77	13	ion	ion	NOUN
bibechana-26521	77	14	implantation	implantation	NOUN
bibechana-26521	77	15	germanium	germanium	NOUN
bibechana-26521	77	16	.	.	PUNCT
bibechana-26521	78	1	the	the	DET
bibechana-26521	78	2	core	core	NOUN
bibechana-26521	78	3	of	of	ADP
bibechana-26521	78	4	srim	srim	PROPN
bibechana-26521	78	5	is	be	AUX
bibechana-26521	78	6	a	a	DET
bibechana-26521	78	7	program	program	NOUN
bibechana-26521	78	8	transport	transport	NOUN
bibechana-26521	78	9	of	of	ADP
bibechana-26521	78	10	ions	ion	NOUN
bibechana-26521	78	11	in	in	ADP
bibechana-26521	78	12	matter	matter	NOUN
bibechana-26521	78	13	(	(	PUNCT
bibechana-26521	78	14	trim	trim	VERB
bibechana-26521	78	15	)	)	PUNCT
bibechana-26521	78	16	.	.	PUNCT
bibechana-26521	79	1	when	when	SCONJ
bibechana-26521	79	2	an	an	DET
bibechana-26521	79	3	ion	ion	NOUN
bibechana-26521	79	4	penetrates	penetrate	VERB
bibechana-26521	79	5	the	the	DET
bibechana-26521	79	6	target	target	NOUN
bibechana-26521	79	7	,	,	PUNCT
bibechana-26521	79	8	it	it	PRON
bibechana-26521	79	9	undergoes	undergo	VERB
bibechana-26521	79	10	a	a	DET
bibechana-26521	79	11	series	series	NOUN
bibechana-26521	79	12	of	of	ADP
bibechana-26521	79	13	screened	screen	VERB
bibechana-26521	79	14	coulomb	coulomb	NOUN
bibechana-26521	79	15	collisions	collision	NOUN
bibechana-26521	79	16	displacing	displace	VERB
bibechana-26521	79	17	target	target	NOUN
bibechana-26521	79	18	atoms	atom	NOUN
bibechana-26521	79	19	along	along	ADP
bibechana-26521	79	20	the	the	DET
bibechana-26521	79	21	way	way	NOUN
bibechana-26521	79	22	.	.	PUNCT
bibechana-26521	80	1	basically	basically	ADV
bibechana-26521	80	2	,	,	PUNCT
bibechana-26521	80	3	srim	srim	VERB
bibechana-26521	80	4	calculates	calculate	VERB
bibechana-26521	80	5	the	the	DET
bibechana-26521	80	6	interactions	interaction	NOUN
bibechana-26521	80	7	of	of	ADP
bibechana-26521	80	8	energetic	energetic	ADJ
bibechana-26521	80	9	ions	ion	NOUN
bibechana-26521	80	10	with	with	ADP
bibechana-26521	80	11	amorphous	amorphous	ADJ
bibechana-26521	80	12	targets	target	NOUN
bibechana-26521	80	13	and	and	CCONJ
bibechana-26521	80	14	presents	present	VERB
bibechana-26521	80	15	those	those	DET
bibechana-26521	80	16	interactions	interaction	NOUN
bibechana-26521	80	17	statistically	statistically	ADV
bibechana-26521	80	18	and	and	CCONJ
bibechana-26521	80	19	graphically	graphically	ADV
bibechana-26521	80	20	which	which	PRON
bibechana-26521	80	21	make	make	VERB
bibechana-26521	80	22	the	the	DET
bibechana-26521	80	23	implantation	implantation	NOUN
bibechana-26521	80	24	process	process	NOUN
bibechana-26521	80	25	easier	easy	ADJ
bibechana-26521	80	26	to	to	PART
bibechana-26521	80	27	understand	understand	VERB
bibechana-26521	80	28	.	.	PUNCT
bibechana-26521	81	1	it	it	PRON
bibechana-26521	81	2	can	can	AUX
bibechana-26521	81	3	also	also	ADV
bibechana-26521	81	4	create	create	VERB
bibechana-26521	81	5	three	three	NUM
bibechana-26521	81	6	-	-	PUNCT
bibechana-26521	81	7	dimensional	dimensional	ADJ
bibechana-26521	81	8	plots	plot	NOUN
bibechana-26521	81	9	of	of	ADP
bibechana-26521	81	10	the	the	DET
bibechana-26521	81	11	ion	ion	NOUN
bibechana-26521	81	12	distribution	distribution	NOUN
bibechana-26521	81	13	when	when	SCONJ
bibechana-26521	81	14	penetrating	penetrate	VERB
bibechana-26521	81	15	matter	matter	NOUN
bibechana-26521	81	16	,	,	PUNCT
bibechana-26521	81	17	including	include	VERB
bibechana-26521	81	18	the	the	DET
bibechana-26521	81	19	k.	k.	PROPN
bibechana-26521	81	20	giri	giri	PROPN
bibechana-26521	81	21	,	,	PUNCT
bibechana-26521	81	22	k.	k.	PROPN
bibechana-26521	81	23	kandel	kandel	PROPN
bibechana-26521	81	24	/	/	SYM
bibechana-26521	81	25	bibechana	bibechana	PROPN
bibechana-26521	81	26	17	17	NUM
bibechana-26521	81	27	(	(	PUNCT
bibechana-26521	81	28	2020	2020	NUM
bibechana-26521	81	29	)	)	PUNCT
bibechana-26521	81	30	96	96	NUM
bibechana-26521	81	31	-	-	SYM
bibechana-26521	81	32	103	103	NUM
bibechana-26521	81	33	99	99	NUM
bibechana-26521	81	34	trace	trace	NOUN
bibechana-26521	81	35	of	of	ADP
bibechana-26521	81	36	defects	defect	NOUN
bibechana-26521	81	37	created	create	VERB
bibechana-26521	81	38	by	by	ADP
bibechana-26521	81	39	the	the	DET
bibechana-26521	81	40	ion	ion	NOUN
bibechana-26521	81	41	beam	beam	NOUN
bibechana-26521	81	42	and	and	CCONJ
bibechana-26521	81	43	its	its	PRON
bibechana-26521	81	44	socalled	socalled	ADJ
bibechana-26521	81	45	straggle	straggle	VERB
bibechana-26521	81	46	and	and	CCONJ
bibechana-26521	81	47	all	all	DET
bibechana-26521	81	48	resulting	result	VERB
bibechana-26521	81	49	cascades	cascade	NOUN
bibechana-26521	81	50	which	which	PRON
bibechana-26521	81	51	can	can	AUX
bibechana-26521	81	52	occur	occur	VERB
bibechana-26521	81	53	when	when	SCONJ
bibechana-26521	81	54	atoms	atom	NOUN
bibechana-26521	81	55	are	be	AUX
bibechana-26521	81	56	kicked	kick	VERB
bibechana-26521	81	57	out	out	ADP
bibechana-26521	81	58	of	of	ADP
bibechana-26521	81	59	their	their	PRON
bibechana-26521	81	60	lattice	lattice	NOUN
bibechana-26521	81	61	position	position	NOUN
bibechana-26521	81	62	,	,	PUNCT
bibechana-26521	81	63	becoming	become	VERB
bibechana-26521	81	64	an	an	DET
bibechana-26521	81	65	interstitial	interstitial	ADJ
bibechana-26521	81	66	atom	atom	NOUN
bibechana-26521	81	67	which	which	PRON
bibechana-26521	81	68	can	can	AUX
bibechana-26521	81	69	subsequently	subsequently	ADV
bibechana-26521	81	70	hit	hit	VERB
bibechana-26521	81	71	other	other	ADJ
bibechana-26521	81	72	lattice	lattice	NOUN
bibechana-26521	81	73	atoms	atom	NOUN
bibechana-26521	81	74	[	[	X
bibechana-26521	81	75	6	6	NUM
bibechana-26521	81	76	]	]	PUNCT
bibechana-26521	81	77	.	.	PUNCT
bibechana-26521	82	1	the	the	DET
bibechana-26521	82	2	text	text	NOUN
bibechana-26521	82	3	data	datum	NOUN
bibechana-26521	82	4	of	of	ADP
bibechana-26521	82	5	damage	damage	NOUN
bibechana-26521	82	6	profiles	profile	NOUN
bibechana-26521	82	7	in	in	ADP
bibechana-26521	82	8	exponential	exponential	ADJ
bibechana-26521	82	9	form	form	NOUN
bibechana-26521	82	10	as	as	SCONJ
bibechana-26521	82	11	calculated	calculate	VERB
bibechana-26521	82	12	by	by	ADP
bibechana-26521	82	13	trim	trim	NOUN
bibechana-26521	82	14	are	be	AUX
bibechana-26521	82	15	eventually	eventually	ADV
bibechana-26521	82	16	converted	convert	VERB
bibechana-26521	82	17	to	to	ADP
bibechana-26521	82	18	numerical	numerical	ADJ
bibechana-26521	82	19	values	value	NOUN
bibechana-26521	82	20	using	use	VERB
bibechana-26521	82	21	microsoft	microsoft	PROPN
bibechana-26521	82	22	excel	excel	PROPN
bibechana-26521	82	23	and	and	CCONJ
bibechana-26521	82	24	thus	thus	ADV
bibechana-26521	82	25	obtained	obtain	VERB
bibechana-26521	82	26	numeric	numeric	ADJ
bibechana-26521	82	27	values	value	NOUN
bibechana-26521	82	28	were	be	AUX
bibechana-26521	82	29	used	use	VERB
bibechana-26521	82	30	in	in	ADP
bibechana-26521	82	31	matlab	matlab	PROPN
bibechana-26521	82	32	to	to	PART
bibechana-26521	82	33	obtain	obtain	VERB
bibechana-26521	82	34	schematic	schematic	ADJ
bibechana-26521	82	35	graphs	graph	NOUN
bibechana-26521	82	36	of	of	ADP
bibechana-26521	82	37	related	related	ADJ
bibechana-26521	82	38	values	value	NOUN
bibechana-26521	82	39	.	.	PUNCT
bibechana-26521	83	1	3	3	X
bibechana-26521	83	2	.	.	NOUN
bibechana-26521	83	3	results	result	NOUN
bibechana-26521	83	4	and	and	CCONJ
bibechana-26521	83	5	discussion	discussion	NOUN
bibechana-26521	83	6	energy	energy	NOUN
bibechana-26521	83	7	calculations	calculation	NOUN
bibechana-26521	83	8	the	the	DET
bibechana-26521	83	9	energy	energy	NOUN
bibechana-26521	83	10	needed	need	VERB
bibechana-26521	83	11	to	to	PART
bibechana-26521	83	12	implant	implant	VERB
bibechana-26521	83	13	gallium	gallium	NOUN
bibechana-26521	83	14	and	and	CCONJ
bibechana-26521	83	15	arsenic	arsenic	ADJ
bibechana-26521	83	16	ions	ion	NOUN
bibechana-26521	83	17	independently	independently	ADV
bibechana-26521	83	18	on	on	ADP
bibechana-26521	83	19	germanium	germanium	NOUN
bibechana-26521	83	20	in	in	SCONJ
bibechana-26521	83	21	order	order	NOUN
bibechana-26521	83	22	to	to	PART
bibechana-26521	83	23	obtain	obtain	VERB
bibechana-26521	83	24	peak	peak	NOUN
bibechana-26521	83	25	dopants	dopant	NOUN
bibechana-26521	83	26	concentration	concentration	NOUN
bibechana-26521	83	27	at	at	ADP
bibechana-26521	83	28	range	range	NOUN
bibechana-26521	83	29	of	of	ADP
bibechana-26521	83	30	600	600	NUM
bibechana-26521	83	31	å	å	NOUN
bibechana-26521	83	32	were	be	AUX
bibechana-26521	83	33	tabulated	tabulate	VERB
bibechana-26521	83	34	using	use	VERB
bibechana-26521	83	35	srim	srim	NOUN
bibechana-26521	83	36	.	.	PUNCT
bibechana-26521	84	1	arsenic	arsenic	VERB
bibechana-26521	84	2	in	in	ADP
bibechana-26521	84	3	germanium	germanium	NOUN
bibechana-26521	84	4	target	target	NOUN
bibechana-26521	84	5	density	density	NOUN
bibechana-26521	84	6	=	=	PUNCT
bibechana-26521	84	7	5.350	5.350	NUM
bibechana-26521	84	8	g	g	NOUN
bibechana-26521	84	9	/	/	SYM
bibechana-26521	84	10	cm	cm	NOUN
bibechana-26521	84	11	3	3	NUM
bibechana-26521	84	12	=	=	SYM
bibechana-26521	84	13	4.4371	4.4371	NUM
bibechana-26521	84	14	×	×	NOUN
bibechana-26521	84	15	10	10	NUM
bibechana-26521	84	16	22	22	NUM
bibechana-26521	84	17	atoms	atom	NOUN
bibechana-26521	84	18	/	/	SYM
bibechana-26521	84	19	cm	cm	NOUN
bibechana-26521	84	20	3	3	NUM
bibechana-26521	84	21	table	table	NOUN
bibechana-26521	84	22	2	2	NUM
bibechana-26521	84	23	:	:	PUNCT
bibechana-26521	84	24	energy	energy	NOUN
bibechana-26521	84	25	calculation	calculation	NOUN
bibechana-26521	84	26	for	for	ADP
bibechana-26521	84	27	arsenic	arsenic	ADJ
bibechana-26521	84	28	ion	ion	NOUN
bibechana-26521	84	29	.	.	PUNCT
bibechana-26521	85	1	ion	ion	NOUN
bibechana-26521	85	2	energy	energy	NOUN
bibechana-26521	85	3	(	(	PUNCT
bibechana-26521	85	4	kev	kev	PROPN
bibechana-26521	85	5	)	)	PUNCT
bibechana-26521	85	6	de	de	PROPN
bibechana-26521	85	7	/	/	SYM
bibechana-26521	85	8	dx	dx	PROPN
bibechana-26521	85	9	electrical	electrical	PROPN
bibechana-26521	85	10	de	de	PROPN
bibechana-26521	85	11	/	/	SYM
bibechana-26521	85	12	dx	dx	PROPN
bibechana-26521	85	13	nuclear	nuclear	ADJ
bibechana-26521	85	14	projected	project	VERB
bibechana-26521	85	15	range	range	NOUN
bibechana-26521	85	16	(	(	PUNCT
bibechana-26521	85	17	å	å	NOUN
bibechana-26521	85	18	)	)	PUNCT
bibechana-26521	85	19	80.00	80.00	NUM
bibechana-26521	85	20	17.98	17.98	NUM
bibechana-26521	85	21	159.0	159.0	NUM
bibechana-26521	85	22	366	366	NUM
bibechana-26521	85	23	90.00	90.00	NUM
bibechana-26521	85	24	19.07	19.07	NUM
bibechana-26521	85	25	159.4	159.4	NUM
bibechana-26521	85	26	405	405	NUM
bibechana-26521	85	27	100.00	100.00	NUM
bibechana-26521	85	28	20.10	20.10	NUM
bibechana-26521	85	29	159.4	159.4	NUM
bibechana-26521	85	30	444	444	NUM
bibechana-26521	85	31	110.00	110.00	NUM
bibechana-26521	85	32	21.08	21.08	NUM
bibechana-26521	85	33	159.2	159.2	NUM
bibechana-26521	85	34	483	483	NUM
bibechana-26521	85	35	120.00	120.00	NUM
bibechana-26521	85	36	22.02	22.02	NUM
bibechana-26521	85	37	158.8	158.8	NUM
bibechana-26521	85	38	522	522	NUM
bibechana-26521	85	39	130.00	130.00	NUM
bibechana-26521	85	40	22.92	22.92	NUM
bibechana-26521	85	41	158.2	158.2	NUM
bibechana-26521	85	42	561	561	NUM
bibechana-26521	85	43	140.00	140.00	NUM
bibechana-26521	85	44	23.79	23.79	NUM
bibechana-26521	85	45	157.5	157.5	NUM
bibechana-26521	85	46	600	600	NUM
bibechana-26521	85	47	150.00	150.00	NUM
bibechana-26521	85	48	24.64	24.64	NUM
bibechana-26521	85	49	156.7	156.7	NUM
bibechana-26521	85	50	640	640	NUM
bibechana-26521	85	51	160.00	160.00	NUM
bibechana-26521	85	52	26.58	26.58	NUM
bibechana-26521	85	53	155.9	155.9	NUM
bibechana-26521	85	54	680	680	NUM
bibechana-26521	85	55	170.00	170.00	NUM
bibechana-26521	85	56	28.28	28.28	NUM
bibechana-26521	85	57	155.0	155.0	NUM
bibechana-26521	85	58	719	719	NUM
bibechana-26521	85	59	180.00	180.00	NUM
bibechana-26521	85	60	29.80	29.80	NUM
bibechana-26521	85	61	154.0	154.0	NUM
bibechana-26521	85	62	759	759	NUM
bibechana-26521	85	63	200.00	200.00	NUM
bibechana-26521	85	64	32.45	32.45	NUM
bibechana-26521	85	65	152.0	152.0	NUM
bibechana-26521	85	66	838	838	NUM
bibechana-26521	85	67	225.00	225.00	NUM
bibechana-26521	85	68	35.28	35.28	NUM
bibechana-26521	85	69	149.5	149.5	NUM
bibechana-26521	85	70	938	938	NUM
bibechana-26521	85	71	the	the	DET
bibechana-26521	85	72	table	table	NOUN
bibechana-26521	85	73	2	2	NUM
bibechana-26521	85	74	demonstrates	demonstrate	VERB
bibechana-26521	85	75	that	that	SCONJ
bibechana-26521	85	76	the	the	DET
bibechana-26521	85	77	exact	exact	ADJ
bibechana-26521	85	78	energy	energy	NOUN
bibechana-26521	85	79	required	require	VERB
bibechana-26521	85	80	for	for	ADP
bibechana-26521	85	81	n	n	CCONJ
bibechana-26521	85	82	-	-	PUNCT
bibechana-26521	85	83	type	type	NOUN
bibechana-26521	85	84	arsenic	arsenic	ADJ
bibechana-26521	85	85	dopants	dopant	NOUN
bibechana-26521	85	86	to	to	PART
bibechana-26521	85	87	obtain	obtain	VERB
bibechana-26521	85	88	maximum	maximum	ADJ
bibechana-26521	85	89	defects	defect	NOUN
bibechana-26521	85	90	at	at	ADP
bibechana-26521	85	91	600	600	NUM
bibechana-26521	85	92	å	å	NOUN
bibechana-26521	85	93	is	be	AUX
bibechana-26521	85	94	140	140	NUM
bibechana-26521	85	95	kev	kev	NOUN
bibechana-26521	85	96	.	.	PUNCT
bibechana-26521	86	1	therefore	therefore	ADV
bibechana-26521	86	2	,	,	PUNCT
bibechana-26521	86	3	we	we	PRON
bibechana-26521	86	4	can	can	AUX
bibechana-26521	86	5	now	now	ADV
bibechana-26521	86	6	implant	implant	VERB
bibechana-26521	86	7	10,000	10,000	NUM
bibechana-26521	86	8	arsenic	arsenic	ADJ
bibechana-26521	86	9	ions	ion	NOUN
bibechana-26521	86	10	accelerated	accelerate	VERB
bibechana-26521	86	11	by	by	ADP
bibechana-26521	86	12	applying	apply	VERB
bibechana-26521	86	13	140	140	NUM
bibechana-26521	86	14	kev	kev	NOUN
bibechana-26521	86	15	energy	energy	NOUN
bibechana-26521	86	16	in	in	ADP
bibechana-26521	86	17	germanium	germanium	NOUN
bibechana-26521	86	18	monolayer	monolayer	NOUN
bibechana-26521	86	19	target	target	NOUN
bibechana-26521	86	20	in	in	ADP
bibechana-26521	86	21	order	order	NOUN
bibechana-26521	86	22	to	to	PART
bibechana-26521	86	23	obtain	obtain	VERB
bibechana-26521	86	24	maximum	maximum	ADJ
bibechana-26521	86	25	defects	defect	NOUN
bibechana-26521	86	26	concentration	concentration	NOUN
bibechana-26521	86	27	at	at	ADP
bibechana-26521	86	28	600	600	NUM
bibechana-26521	86	29	å	å	NOUN
bibechana-26521	86	30	.	.	PUNCT
bibechana-26521	87	1	stopping	stop	VERB
bibechana-26521	87	2	power	power	NOUN
bibechana-26521	87	3	fig.1	fig.1	PROPN
bibechana-26521	87	4	demonstrates	demonstrate	VERB
bibechana-26521	87	5	the	the	DET
bibechana-26521	87	6	nature	nature	NOUN
bibechana-26521	87	7	of	of	ADP
bibechana-26521	87	8	stopping	stop	VERB
bibechana-26521	87	9	power	power	NOUN
bibechana-26521	87	10	for	for	ADP
bibechana-26521	87	11	as	as	SCONJ
bibechana-26521	87	12	ions	ion	NOUN
bibechana-26521	87	13	bombarded	bombard	VERB
bibechana-26521	87	14	on	on	ADP
bibechana-26521	87	15	germanium	germanium	NOUN
bibechana-26521	87	16	.	.	PUNCT
bibechana-26521	88	1	on	on	ADP
bibechana-26521	88	2	increasing	increase	VERB
bibechana-26521	88	3	ions	ion	NOUN
bibechana-26521	88	4	energy	energy	NOUN
bibechana-26521	88	5	nuclear	nuclear	ADJ
bibechana-26521	88	6	stopping	stopping	NOUN
bibechana-26521	88	7	goes	go	VERB
bibechana-26521	88	8	on	on	ADP
bibechana-26521	88	9	increasing	increase	VERB
bibechana-26521	88	10	upto	upto	ADJ
bibechana-26521	88	11	100	100	NUM
bibechana-26521	88	12	kev	kev	NOUN
bibechana-26521	88	13	and	and	CCONJ
bibechana-26521	88	14	starts	start	VERB
bibechana-26521	88	15	decreasing	decrease	VERB
bibechana-26521	88	16	gradually	gradually	ADV
bibechana-26521	88	17	,	,	PUNCT
bibechana-26521	88	18	while	while	SCONJ
bibechana-26521	88	19	,	,	PUNCT
bibechana-26521	88	20	electronic	electronic	ADJ
bibechana-26521	88	21	stopping	stopping	NOUN
bibechana-26521	88	22	goes	go	VERB
bibechana-26521	88	23	on	on	ADP
bibechana-26521	88	24	gradual	gradual	ADJ
bibechana-26521	88	25	increase	increase	NOUN
bibechana-26521	88	26	and	and	CCONJ
bibechana-26521	88	27	starts	start	VERB
bibechana-26521	88	28	dominating	dominate	VERB
bibechana-26521	88	29	nuclear	nuclear	ADJ
bibechana-26521	88	30	energy	energy	NOUN
bibechana-26521	88	31	loss	loss	NOUN
bibechana-26521	88	32	above	above	ADP
bibechana-26521	88	33	1000	1000	NUM
bibechana-26521	88	34	kev	kev	PROPN
bibechana-26521	88	35	i.e.1	i.e.1	PROPN
bibechana-26521	88	36	mev	mev	PROPN
bibechana-26521	88	37	.	.	PUNCT
bibechana-26521	89	1	fig	fig	PROPN
bibechana-26521	89	2	.	.	PUNCT
bibechana-26521	90	1	1	1	NUM
bibechana-26521	90	2	:	:	PUNCT
bibechana-26521	90	3	comparison	comparison	NOUN
bibechana-26521	90	4	of	of	ADP
bibechana-26521	90	5	electronic	electronic	ADJ
bibechana-26521	90	6	energy	energy	NOUN
bibechana-26521	90	7	loss	loss	NOUN
bibechana-26521	90	8	and	and	CCONJ
bibechana-26521	90	9	nuclear	nuclear	ADJ
bibechana-26521	90	10	energy	energy	NOUN
bibechana-26521	90	11	loss	loss	NOUN
bibechana-26521	90	12	.	.	PUNCT
bibechana-26521	91	1	the	the	DET
bibechana-26521	91	2	point	point	NOUN
bibechana-26521	91	3	of	of	ADP
bibechana-26521	91	4	intersection	intersection	NOUN
bibechana-26521	91	5	of	of	ADP
bibechana-26521	91	6	the	the	DET
bibechana-26521	91	7	two	two	NUM
bibechana-26521	91	8	curves	curve	NOUN
bibechana-26521	91	9	represents	represent	VERB
bibechana-26521	91	10	the	the	DET
bibechana-26521	91	11	corresponding	corresponding	ADJ
bibechana-26521	91	12	ion	ion	NOUN
bibechana-26521	91	13	energy	energy	NOUN
bibechana-26521	91	14	where	where	SCONJ
bibechana-26521	91	15	the	the	DET
bibechana-26521	91	16	electronic	electronic	ADJ
bibechana-26521	91	17	and	and	CCONJ
bibechana-26521	91	18	nuclear	nuclear	ADJ
bibechana-26521	91	19	energy	energy	NOUN
bibechana-26521	91	20	losses	loss	NOUN
bibechana-26521	91	21	are	be	AUX
bibechana-26521	91	22	equal	equal	ADJ
bibechana-26521	91	23	.	.	PUNCT
bibechana-26521	92	1	in	in	ADP
bibechana-26521	92	2	addition	addition	NOUN
bibechana-26521	92	3	,	,	PUNCT
bibechana-26521	92	4	we	we	PRON
bibechana-26521	92	5	can	can	AUX
bibechana-26521	92	6	conclude	conclude	VERB
bibechana-26521	92	7	that	that	SCONJ
bibechana-26521	92	8	there	there	PRON
bibechana-26521	92	9	is	be	VERB
bibechana-26521	92	10	no	no	DET
bibechana-26521	92	11	improvement	improvement	NOUN
bibechana-26521	92	12	in	in	ADP
bibechana-26521	92	13	surface	surface	NOUN
bibechana-26521	92	14	hardening	hardening	NOUN
bibechana-26521	92	15	and	and	CCONJ
bibechana-26521	92	16	electrical	electrical	ADJ
bibechana-26521	92	17	conductivity	conductivity	NOUN
bibechana-26521	92	18	of	of	ADP
bibechana-26521	92	19	germanium	germanium	NOUN
bibechana-26521	92	20	upto	upto	NOUN
bibechana-26521	92	21	1	1	NUM
bibechana-26521	92	22	mev	mev	NOUN
bibechana-26521	92	23	but	but	CCONJ
bibechana-26521	92	24	implanting	implant	VERB
bibechana-26521	92	25	both	both	DET
bibechana-26521	92	26	ions	ion	NOUN
bibechana-26521	92	27	above	above	ADP
bibechana-26521	92	28	1	1	NUM
bibechana-26521	92	29	mev	mev	NOUN
bibechana-26521	92	30	increases	increase	VERB
bibechana-26521	92	31	the	the	DET
bibechana-26521	92	32	surface	surface	NOUN
bibechana-26521	92	33	hardening	harden	VERB
bibechana-26521	92	34	and	and	CCONJ
bibechana-26521	92	35	electrical	electrical	ADJ
bibechana-26521	92	36	conductivity	conductivity	NOUN
bibechana-26521	92	37	because	because	SCONJ
bibechana-26521	92	38	of	of	ADP
bibechana-26521	92	39	dominance	dominance	NOUN
bibechana-26521	92	40	of	of	ADP
bibechana-26521	92	41	electronic	electronic	ADJ
bibechana-26521	92	42	stopping	stopping	NOUN
bibechana-26521	92	43	power	power	NOUN
bibechana-26521	92	44	and	and	CCONJ
bibechana-26521	92	45	decreasing	decrease	VERB
bibechana-26521	92	46	nuclear	nuclear	ADJ
bibechana-26521	92	47	stopping	stopping	NOUN
bibechana-26521	92	48	power	power	NOUN
bibechana-26521	92	49	.	.	PUNCT
bibechana-26521	93	1	for	for	ADP
bibechana-26521	93	2	130	130	NUM
bibechana-26521	93	3	kev	kev	PROPN
bibechana-26521	93	4	gallium	gallium	NOUN
bibechana-26521	93	5	ions	ion	NOUN
bibechana-26521	93	6	,	,	PUNCT
bibechana-26521	93	7	24.27	24.27	NUM
bibechana-26521	93	8	ev	ev	NOUN
bibechana-26521	93	9	/	/	SYM
bibechana-26521	93	10	å	å	PROPN
bibechana-26521	93	11	and	and	CCONJ
bibechana-26521	93	12	142.60	142.60	NUM
bibechana-26521	93	13	ev	ev	PART
bibechana-26521	93	14	/	/	SYM
bibechana-26521	93	15	å	å	PROPN
bibechana-26521	93	16	are	be	AUX
bibechana-26521	93	17	the	the	DET
bibechana-26521	93	18	value	value	NOUN
bibechana-26521	93	19	of	of	ADP
bibechana-26521	93	20	electronic	electronic	ADJ
bibechana-26521	93	21	stopping	stopping	NOUN
bibechana-26521	93	22	and	and	CCONJ
bibechana-26521	93	23	nuclear	nuclear	ADJ
bibechana-26521	93	24	stopping	stopping	NOUN
bibechana-26521	93	25	respectively	respectively	ADV
bibechana-26521	93	26	.	.	PUNCT
bibechana-26521	94	1	these	these	DET
bibechana-26521	94	2	values	value	NOUN
bibechana-26521	94	3	indicate	indicate	VERB
bibechana-26521	94	4	that	that	SCONJ
bibechana-26521	94	5	averagely	averagely	ADV
bibechana-26521	94	6	each	each	DET
bibechana-26521	94	7	gallium	gallium	NOUN
bibechana-26521	94	8	ion	ion	NOUN
bibechana-26521	94	9	lose	lose	VERB
bibechana-26521	94	10	24.27	24.27	NUM
bibechana-26521	94	11	ev	ev	PROPN
bibechana-26521	94	12	/	/	SYM
bibechana-26521	94	13	å	å	PROPN
bibechana-26521	94	14	to	to	PART
bibechana-26521	94	15	target	target	VERB
bibechana-26521	94	16	electrons	electron	NOUN
bibechana-26521	94	17	for	for	ADP
bibechana-26521	94	18	every	every	DET
bibechana-26521	94	19	unit	unit	NOUN
bibechana-26521	94	20	path	path	NOUN
bibechana-26521	94	21	of	of	ADP
bibechana-26521	94	22	ion	ion	NOUN
bibechana-26521	94	23	,	,	PUNCT
bibechana-26521	94	24	whereas	whereas	SCONJ
bibechana-26521	94	25	,	,	PUNCT
bibechana-26521	94	26	to	to	ADP
bibechana-26521	94	27	the	the	DET
bibechana-26521	94	28	target	target	NOUN
bibechana-26521	94	29	atoms	atom	NOUN
bibechana-26521	94	30	,	,	PUNCT
bibechana-26521	94	31	each	each	DET
bibechana-26521	94	32	gallium	gallium	NOUN
bibechana-26521	94	33	ion	ion	NOUN
bibechana-26521	94	34	lose	lose	VERB
bibechana-26521	94	35	142.60	142.60	NUM
bibechana-26521	94	36	ev	ev	NOUN
bibechana-26521	94	37	/	/	SYM
bibechana-26521	94	38	å	å	PROPN
bibechana-26521	94	39	for	for	ADP
bibechana-26521	94	40	every	every	DET
bibechana-26521	94	41	unit	unit	NOUN
bibechana-26521	94	42	path	path	NOUN
bibechana-26521	94	43	of	of	ADP
bibechana-26521	94	44	ion	ion	NOUN
bibechana-26521	94	45	.	.	PUNCT
bibechana-26521	95	1	since	since	SCONJ
bibechana-26521	95	2	for	for	ADP
bibechana-26521	95	3	gallium	gallium	NOUN
bibechana-26521	95	4	ion	ion	NOUN
bibechana-26521	95	5	accelerated	accelerate	VERB
bibechana-26521	95	6	at	at	ADP
bibechana-26521	95	7	130	130	NUM
bibechana-26521	95	8	kev	kev	NOUN
bibechana-26521	95	9	have	have	VERB
bibechana-26521	95	10	greater	great	ADJ
bibechana-26521	95	11	nuclear	nuclear	ADJ
bibechana-26521	95	12	stopping	stopping	NOUN
bibechana-26521	95	13	so	so	ADV
bibechana-26521	95	14	there	there	PRON
bibechana-26521	95	15	is	be	VERB
bibechana-26521	95	16	no	no	DET
bibechana-26521	95	17	improvement	improvement	NOUN
bibechana-26521	95	18	in	in	ADP
bibechana-26521	95	19	surface	surface	NOUN
bibechana-26521	95	20	hardness	hardness	NOUN
bibechana-26521	95	21	and	and	CCONJ
bibechana-26521	95	22	electrical	electrical	ADJ
bibechana-26521	95	23	conductivity	conductivity	NOUN
bibechana-26521	95	24	.	.	PUNCT
bibechana-26521	96	1	similarly	similarly	ADV
bibechana-26521	96	2	,	,	PUNCT
bibechana-26521	96	3	the	the	DET
bibechana-26521	96	4	value	value	NOUN
bibechana-26521	96	5	of	of	ADP
bibechana-26521	96	6	electronic	electronic	ADJ
bibechana-26521	96	7	stopping	stopping	NOUN
bibechana-26521	96	8	is	be	AUX
bibechana-26521	96	9	23.79	23.79	NUM
bibechana-26521	96	10	ev	ev	NOUN
bibechana-26521	96	11	/	/	SYM
bibechana-26521	96	12	å	å	PROPN
bibechana-26521	96	13	and	and	CCONJ
bibechana-26521	96	14	nuclear	nuclear	ADJ
bibechana-26521	96	15	stopping	stopping	NOUN
bibechana-26521	96	16	is	be	AUX
bibechana-26521	96	17	157.5	157.5	NUM
bibechana-26521	96	18	ev	ev	NOUN
bibechana-26521	96	19	/	/	SYM
bibechana-26521	96	20	å	å	PROPN
bibechana-26521	96	21	,	,	PUNCT
bibechana-26521	96	22	for	for	ADP
bibechana-26521	96	23	140	140	NUM
bibechana-26521	96	24	kev	kev	PROPN
bibechana-26521	96	25	k.	k.	PROPN
bibechana-26521	96	26	giri	giri	PROPN
bibechana-26521	96	27	,	,	PUNCT
bibechana-26521	96	28	k.	k.	PROPN
bibechana-26521	96	29	kandel	kandel	PROPN
bibechana-26521	96	30	/	/	SYM
bibechana-26521	96	31	bibechana	bibechana	PROPN
bibechana-26521	96	32	17	17	NUM
bibechana-26521	96	33	(	(	PUNCT
bibechana-26521	96	34	2020	2020	NUM
bibechana-26521	96	35	)	)	PUNCT
bibechana-26521	96	36	96	96	NUM
bibechana-26521	96	37	-	-	SYM
bibechana-26521	96	38	103	103	NUM
bibechana-26521	96	39	100	100	NUM
bibechana-26521	96	40	arsenic	arsenic	ADJ
bibechana-26521	96	41	ions	ion	NOUN
bibechana-26521	96	42	.	.	PUNCT
bibechana-26521	97	1	since	since	SCONJ
bibechana-26521	97	2	for	for	ADP
bibechana-26521	97	3	arsenic	arsenic	ADJ
bibechana-26521	97	4	ion	ion	NOUN
bibechana-26521	97	5	accelerated	accelerate	VERB
bibechana-26521	97	6	at	at	ADP
bibechana-26521	97	7	140	140	NUM
bibechana-26521	97	8	kev	kev	NOUN
bibechana-26521	97	9	have	have	VERB
bibechana-26521	97	10	nuclear	nuclear	ADJ
bibechana-26521	97	11	stopping	stopping	NOUN
bibechana-26521	97	12	,	,	PUNCT
bibechana-26521	97	13	as	as	SCONJ
bibechana-26521	97	14	a	a	DET
bibechana-26521	97	15	dominant	dominant	ADJ
bibechana-26521	97	16	process	process	NOUN
bibechana-26521	97	17	so	so	ADV
bibechana-26521	97	18	desired	desire	VERB
bibechana-26521	97	19	surface	surface	NOUN
bibechana-26521	97	20	hardening	hardening	NOUN
bibechana-26521	97	21	and	and	CCONJ
bibechana-26521	97	22	electrical	electrical	ADJ
bibechana-26521	97	23	conductivity	conductivity	NOUN
bibechana-26521	97	24	could	could	AUX
bibechana-26521	97	25	not	not	PART
bibechana-26521	97	26	be	be	AUX
bibechana-26521	97	27	achieved	achieve	VERB
bibechana-26521	97	28	at	at	ADP
bibechana-26521	97	29	140	140	NUM
bibechana-26521	97	30	kev	kev	NOUN
bibechana-26521	97	31	and	and	CCONJ
bibechana-26521	97	32	similar	similar	ADJ
bibechana-26521	97	33	will	will	AUX
bibechana-26521	97	34	be	be	AUX
bibechana-26521	97	35	for	for	ADP
bibechana-26521	97	36	gallium	gallium	NOUN
bibechana-26521	97	37	ions	ion	NOUN
bibechana-26521	97	38	.	.	PUNCT
bibechana-26521	98	1	the	the	DET
bibechana-26521	98	2	reason	reason	NOUN
bibechana-26521	98	3	behind	behind	ADP
bibechana-26521	98	4	dominance	dominance	NOUN
bibechana-26521	98	5	of	of	ADP
bibechana-26521	98	6	nuclear	nuclear	ADJ
bibechana-26521	98	7	stopping	stopping	NOUN
bibechana-26521	98	8	is	be	AUX
bibechana-26521	98	9	mass	mass	NOUN
bibechana-26521	98	10	of	of	ADP
bibechana-26521	98	11	ions	ion	NOUN
bibechana-26521	98	12	that	that	PRON
bibechana-26521	98	13	are	be	AUX
bibechana-26521	98	14	comparable	comparable	ADJ
bibechana-26521	98	15	with	with	ADP
bibechana-26521	98	16	germanium	germanium	NOUN
bibechana-26521	98	17	.	.	PUNCT
bibechana-26521	99	1	comparatively	comparatively	ADV
bibechana-26521	99	2	,	,	PUNCT
bibechana-26521	99	3	ions	ion	NOUN
bibechana-26521	99	4	energy	energy	NOUN
bibechana-26521	99	5	should	should	AUX
bibechana-26521	99	6	be	be	AUX
bibechana-26521	99	7	increased	increase	VERB
bibechana-26521	99	8	to	to	ADP
bibechana-26521	99	9	energy	energy	NOUN
bibechana-26521	99	10	above	above	ADP
bibechana-26521	99	11	1	1	NUM
bibechana-26521	99	12	mev	mev	NOUN
bibechana-26521	99	13	for	for	ADP
bibechana-26521	99	14	both	both	DET
bibechana-26521	99	15	ions	ion	NOUN
bibechana-26521	99	16	in	in	ADP
bibechana-26521	99	17	order	order	NOUN
bibechana-26521	99	18	to	to	PART
bibechana-26521	99	19	obtain	obtain	VERB
bibechana-26521	99	20	dominance	dominance	NOUN
bibechana-26521	99	21	of	of	ADP
bibechana-26521	99	22	electronic	electronic	ADJ
bibechana-26521	99	23	stopping	stopping	NOUN
bibechana-26521	99	24	power	power	NOUN
bibechana-26521	99	25	over	over	ADP
bibechana-26521	99	26	nuclear	nuclear	ADJ
bibechana-26521	99	27	stopping	stopping	NOUN
bibechana-26521	99	28	power	power	NOUN
bibechana-26521	99	29	that	that	PRON
bibechana-26521	99	30	eventually	eventually	ADV
bibechana-26521	99	31	improve	improve	VERB
bibechana-26521	99	32	the	the	DET
bibechana-26521	99	33	surface	surface	NOUN
bibechana-26521	99	34	hardening	hardening	NOUN
bibechana-26521	99	35	and	and	CCONJ
bibechana-26521	99	36	electrical	electrical	ADJ
bibechana-26521	99	37	conductivity	conductivity	NOUN
bibechana-26521	99	38	.	.	PUNCT
bibechana-26521	100	1	energy	energy	NOUN
bibechana-26521	100	2	loss	loss	NOUN
bibechana-26521	100	3	during	during	ADP
bibechana-26521	100	4	ionization	ionization	NOUN
bibechana-26521	100	5	the	the	DET
bibechana-26521	100	6	fig.2	fig.2	PROPN
bibechana-26521	100	7	reveals	reveal	VERB
bibechana-26521	100	8	the	the	DET
bibechana-26521	100	9	energy	energy	NOUN
bibechana-26521	100	10	imparted	impart	VERB
bibechana-26521	100	11	to	to	ADP
bibechana-26521	100	12	the	the	DET
bibechana-26521	100	13	target	target	NOUN
bibechana-26521	100	14	fig.2	fig.2	PROPN
bibechana-26521	100	15	:	:	PUNCT
bibechana-26521	100	16	energy	energy	NOUN
bibechana-26521	100	17	loss	loss	NOUN
bibechana-26521	100	18	distribution	distribution	NOUN
bibechana-26521	100	19	during	during	ADP
bibechana-26521	100	20	ionization	ionization	NOUN
bibechana-26521	100	21	.	.	PUNCT
bibechana-26521	101	1	electrons	electron	NOUN
bibechana-26521	101	2	during	during	ADP
bibechana-26521	101	3	ionization	ionization	NOUN
bibechana-26521	101	4	process	process	NOUN
bibechana-26521	101	5	.	.	PUNCT
bibechana-26521	102	1	the	the	DET
bibechana-26521	102	2	plot	plot	NOUN
bibechana-26521	102	3	shows	show	VERB
bibechana-26521	102	4	ionization	ionization	NOUN
bibechana-26521	102	5	from	from	ADP
bibechana-26521	102	6	the	the	DET
bibechana-26521	102	7	incident	incident	NOUN
bibechana-26521	102	8	ions	ion	NOUN
bibechana-26521	102	9	and	and	CCONJ
bibechana-26521	102	10	from	from	ADP
bibechana-26521	102	11	recoiling	recoil	VERB
bibechana-26521	102	12	target	target	NOUN
bibechana-26521	102	13	atoms	atom	NOUN
bibechana-26521	102	14	.	.	PUNCT
bibechana-26521	103	1	for	for	ADP
bibechana-26521	103	2	both	both	DET
bibechana-26521	103	3	collisions	collision	NOUN
bibechana-26521	103	4	,	,	PUNCT
bibechana-26521	103	5	the	the	DET
bibechana-26521	103	6	energy	energy	NOUN
bibechana-26521	103	7	loss	loss	NOUN
bibechana-26521	103	8	to	to	ADP
bibechana-26521	103	9	the	the	DET
bibechana-26521	103	10	target	target	NOUN
bibechana-26521	103	11	electrons	electron	NOUN
bibechana-26521	103	12	by	by	ADP
bibechana-26521	103	13	recoil	recoil	NOUN
bibechana-26521	103	14	atoms	atom	NOUN
bibechana-26521	103	15	is	be	AUX
bibechana-26521	103	16	greater	great	ADJ
bibechana-26521	103	17	than	than	ADP
bibechana-26521	103	18	energy	energy	NOUN
bibechana-26521	103	19	loss	loss	NOUN
bibechana-26521	103	20	by	by	ADP
bibechana-26521	103	21	ions	ion	NOUN
bibechana-26521	103	22	.	.	PUNCT
bibechana-26521	104	1	maximum	maximum	ADJ
bibechana-26521	104	2	ionization	ionization	NOUN
bibechana-26521	104	3	by	by	ADP
bibechana-26521	104	4	ions	ion	NOUN
bibechana-26521	104	5	begins	begin	VERB
bibechana-26521	104	6	from	from	ADP
bibechana-26521	104	7	the	the	DET
bibechana-26521	104	8	surface	surface	NOUN
bibechana-26521	104	9	of	of	ADP
bibechana-26521	104	10	the	the	DET
bibechana-26521	104	11	target	target	NOUN
bibechana-26521	104	12	material	material	NOUN
bibechana-26521	104	13	and	and	CCONJ
bibechana-26521	104	14	then	then	ADV
bibechana-26521	104	15	gradually	gradually	ADV
bibechana-26521	104	16	falls	fall	VERB
bibechana-26521	104	17	down	down	ADP
bibechana-26521	104	18	.	.	PUNCT
bibechana-26521	105	1	energy	energy	NOUN
bibechana-26521	105	2	loss	loss	NOUN
bibechana-26521	105	3	by	by	ADP
bibechana-26521	105	4	arsenic	arsenic	ADJ
bibechana-26521	105	5	ions	ion	NOUN
bibechana-26521	105	6	and	and	CCONJ
bibechana-26521	105	7	recoil	recoil	NOUN
bibechana-26521	105	8	atoms	atom	NOUN
bibechana-26521	105	9	during	during	ADP
bibechana-26521	105	10	ionization	ionization	NOUN
bibechana-26521	105	11	process	process	NOUN
bibechana-26521	105	12	is	be	AUX
bibechana-26521	105	13	14.126	14.126	NUM
bibechana-26521	105	14	kev	kev	PROPN
bibechana-26521	105	15	25.508	25.508	NUM
bibechana-26521	105	16	kev	kev	NOUN
bibechana-26521	105	17	respectively	respectively	ADV
bibechana-26521	105	18	.	.	PUNCT
bibechana-26521	106	1	and	and	CCONJ
bibechana-26521	106	2	the	the	DET
bibechana-26521	106	3	total	total	ADJ
bibechana-26521	106	4	energy	energy	NOUN
bibechana-26521	106	5	loss	loss	NOUN
bibechana-26521	106	6	during	during	ADP
bibechana-26521	106	7	ionization	ionization	NOUN
bibechana-26521	106	8	process	process	NOUN
bibechana-26521	106	9	during	during	ADP
bibechana-26521	106	10	arsenic	arsenic	ADJ
bibechana-26521	106	11	-	-	PUNCT
bibechana-26521	106	12	germanium	germanium	NOUN
bibechana-26521	106	13	interaction	interaction	NOUN
bibechana-26521	106	14	is	be	AUX
bibechana-26521	106	15	39.634	39.634	NUM
bibechana-26521	106	16	kev	kev	NOUN
bibechana-26521	106	17	.	.	PUNCT
bibechana-26521	107	1	energy	energy	NOUN
bibechana-26521	107	2	loss	loss	NOUN
bibechana-26521	107	3	to	to	ADP
bibechana-26521	107	4	phonons	phonon	NOUN
bibechana-26521	107	5	when	when	SCONJ
bibechana-26521	107	6	a	a	DET
bibechana-26521	107	7	germanium	germanium	NOUN
bibechana-26521	107	8	atom	atom	NOUN
bibechana-26521	107	9	is	be	AUX
bibechana-26521	107	10	knocked	knock	VERB
bibechana-26521	107	11	out	out	ADP
bibechana-26521	107	12	of	of	ADP
bibechana-26521	107	13	its	its	PRON
bibechana-26521	107	14	lattice	lattice	NOUN
bibechana-26521	107	15	site	site	NOUN
bibechana-26521	107	16	,	,	PUNCT
bibechana-26521	107	17	its	its	PRON
bibechana-26521	107	18	binding	bind	VERB
bibechana-26521	107	19	energy	energy	NOUN
bibechana-26521	107	20	,	,	PUNCT
bibechana-26521	107	21	fig	fig	NOUN
bibechana-26521	107	22	.	.	PUNCT
bibechana-26521	108	1	3	3	NUM
bibechana-26521	108	2	:	:	PUNCT
bibechana-26521	108	3	curve	curve	VERB
bibechana-26521	108	4	showing	show	VERB
bibechana-26521	108	5	distribution	distribution	NOUN
bibechana-26521	108	6	of	of	ADP
bibechana-26521	108	7	energy	energy	NOUN
bibechana-26521	108	8	loss	loss	NOUN
bibechana-26521	108	9	to	to	ADP
bibechana-26521	108	10	phonons	phonon	NOUN
bibechana-26521	108	11	.	.	PUNCT
bibechana-26521	109	1	elatt	elatt	NOUN
bibechana-26521	109	2	=	=	SYM
bibechana-26521	109	3	2	2	NUM
bibechana-26521	109	4	ev	ev	NOUN
bibechana-26521	109	5	,	,	PUNCT
bibechana-26521	109	6	is	be	AUX
bibechana-26521	109	7	deposited	deposit	VERB
bibechana-26521	109	8	into	into	ADP
bibechana-26521	109	9	phonons	phonon	NOUN
bibechana-26521	109	10	produced	produce	VERB
bibechana-26521	109	11	by	by	ADP
bibechana-26521	109	12	the	the	DET
bibechana-26521	109	13	recoils	recoil	NOUN
bibechana-26521	109	14	.	.	PUNCT
bibechana-26521	110	1	vacancies	vacancy	NOUN
bibechana-26521	110	2	/	/	SYM
bibechana-26521	110	3	ion	ion	NOUN
bibechana-26521	110	4	for	for	ADP
bibechana-26521	110	5	arsenic	arsenic	NOUN
bibechana-26521	110	6	is	be	AUX
bibechana-26521	110	7	4371.9	4371.9	NUM
bibechana-26521	110	8	,	,	PUNCT
bibechana-26521	110	9	therefore	therefore	ADV
bibechana-26521	110	10	for	for	ADP
bibechana-26521	110	11	each	each	DET
bibechana-26521	110	12	arsenic	arsenic	ADJ
bibechana-26521	110	13	ion	ion	NOUN
bibechana-26521	110	14	,	,	PUNCT
bibechana-26521	110	15	displacements	displacement	NOUN
bibechana-26521	110	16	by	by	ADP
bibechana-26521	110	17	the	the	DET
bibechana-26521	110	18	ion	ion	NOUN
bibechana-26521	110	19	or	or	CCONJ
bibechana-26521	110	20	recoil	recoil	NOUN
bibechana-26521	110	21	cascades	cascade	NOUN
bibechana-26521	110	22	cause	cause	VERB
bibechana-26521	110	23	4371.9	4371.9	NUM
bibechana-26521	110	24	×	×	NOUN
bibechana-26521	110	25	2	2	NUM
bibechana-26521	110	26	ev=	ev=	PROPN
bibechana-26521	110	27	9463.8	9463.8	NUM
bibechana-26521	110	28	ev	ev	X
bibechana-26521	110	29	of	of	ADP
bibechana-26521	110	30	phonons	phonon	NOUN
bibechana-26521	110	31	.	.	PUNCT
bibechana-26521	111	1	in	in	ADP
bibechana-26521	111	2	fig.3	fig.3	PROPN
bibechana-26521	111	3	,	,	PUNCT
bibechana-26521	111	4	we	we	PRON
bibechana-26521	111	5	can	can	AUX
bibechana-26521	111	6	barely	barely	ADV
bibechana-26521	111	7	see	see	VERB
bibechana-26521	111	8	the	the	DET
bibechana-26521	111	9	energy	energy	NOUN
bibechana-26521	111	10	loss	loss	NOUN
bibechana-26521	111	11	to	to	ADP
bibechana-26521	111	12	phonons	phonon	NOUN
bibechana-26521	111	13	from	from	ADP
bibechana-26521	111	14	the	the	DET
bibechana-26521	111	15	ions	ion	NOUN
bibechana-26521	111	16	(	(	PUNCT
bibechana-26521	111	17	red	red	ADJ
bibechana-26521	111	18	line	line	NOUN
bibechana-26521	111	19	at	at	ADP
bibechana-26521	111	20	the	the	DET
bibechana-26521	111	21	bottom	bottom	NOUN
bibechana-26521	111	22	of	of	ADP
bibechana-26521	111	23	the	the	DET
bibechana-26521	111	24	plot	plot	NOUN
bibechana-26521	111	25	)	)	PUNCT
bibechana-26521	111	26	,	,	PUNCT
bibechana-26521	111	27	and	and	CCONJ
bibechana-26521	111	28	the	the	DET
bibechana-26521	111	29	phonons	phonon	NOUN
bibechana-26521	111	30	are	be	AUX
bibechana-26521	111	31	produced	produce	VERB
bibechana-26521	111	32	almost	almost	ADV
bibechana-26521	111	33	exclusively	exclusively	ADV
bibechana-26521	111	34	by	by	ADP
bibechana-26521	111	35	the	the	DET
bibechana-26521	111	36	recoiling	recoil	VERB
bibechana-26521	111	37	target	target	NOUN
bibechana-26521	111	38	atoms	atom	NOUN
bibechana-26521	111	39	.	.	PUNCT
bibechana-26521	112	1	the	the	DET
bibechana-26521	112	2	energy	energy	NOUN
bibechana-26521	112	3	loss	loss	NOUN
bibechana-26521	112	4	for	for	ADP
bibechana-26521	112	5	phonon	phonon	NOUN
bibechana-26521	112	6	production	production	NOUN
bibechana-26521	112	7	is	be	AUX
bibechana-26521	112	8	high	high	ADJ
bibechana-26521	112	9	around	around	ADP
bibechana-26521	112	10	the	the	DET
bibechana-26521	112	11	range	range	NOUN
bibechana-26521	112	12	of	of	ADP
bibechana-26521	112	13	400	400	NUM
bibechana-26521	112	14	å	å	NOUN
bibechana-26521	112	15	and	and	CCONJ
bibechana-26521	112	16	then	then	ADV
bibechana-26521	112	17	the	the	DET
bibechana-26521	112	18	gradual	gradual	ADJ
bibechana-26521	112	19	fall	fall	NOUN
bibechana-26521	112	20	in	in	ADP
bibechana-26521	112	21	energy	energy	NOUN
bibechana-26521	112	22	loss	loss	NOUN
bibechana-26521	112	23	for	for	ADP
bibechana-26521	112	24	phonon	phonon	NOUN
bibechana-26521	112	25	production	production	NOUN
bibechana-26521	112	26	occurred	occur	VERB
bibechana-26521	112	27	as	as	SCONJ
bibechana-26521	112	28	we	we	PRON
bibechana-26521	112	29	increase	increase	VERB
bibechana-26521	112	30	the	the	DET
bibechana-26521	112	31	target	target	NOUN
bibechana-26521	112	32	depth	depth	NOUN
bibechana-26521	112	33	.	.	PUNCT
bibechana-26521	113	1	for	for	ADP
bibechana-26521	113	2	arsenic	arsenic	NOUN
bibechana-26521	113	3	,	,	PUNCT
bibechana-26521	113	4	the	the	DET
bibechana-26521	113	5	ions	ion	NOUN
bibechana-26521	113	6	generate	generate	VERB
bibechana-26521	113	7	phonon	phonon	NOUN
bibechana-26521	113	8	with	with	ADP
bibechana-26521	113	9	0.29	0.29	NUM
bibechana-26521	113	10	%	%	NOUN
bibechana-26521	113	11	of	of	ADP
bibechana-26521	113	12	their	their	PRON
bibechana-26521	113	13	incident	incident	NOUN
bibechana-26521	113	14	energy	energy	NOUN
bibechana-26521	113	15	and	and	CCONJ
bibechana-26521	113	16	the	the	DET
bibechana-26521	113	17	recoiling	recoiling	NOUN
bibechana-26521	113	18	atoms	atom	NOUN
bibechana-26521	113	19	contribute	contribute	VERB
bibechana-26521	113	20	an	an	DET
bibechana-26521	113	21	additional	additional	ADJ
bibechana-26521	113	22	64.63	64.63	NUM
bibechana-26521	113	23	%	%	NOUN
bibechana-26521	113	24	.	.	PUNCT
bibechana-26521	114	1	it	it	PRON
bibechana-26521	114	2	means	mean	VERB
bibechana-26521	114	3	that	that	SCONJ
bibechana-26521	114	4	0.406	0.406	NUM
bibechana-26521	114	5	kev	kev	ADJ
bibechana-26521	114	6	energy	energy	NOUN
bibechana-26521	114	7	is	be	AUX
bibechana-26521	114	8	lost	lose	VERB
bibechana-26521	114	9	by	by	ADP
bibechana-26521	114	10	ions	ion	NOUN
bibechana-26521	114	11	and	and	CCONJ
bibechana-26521	114	12	90.482	90.482	NUM
bibechana-26521	114	13	kev	kev	NOUN
bibechana-26521	114	14	energy	energy	NOUN
bibechana-26521	114	15	is	be	AUX
bibechana-26521	114	16	lost	lose	VERB
bibechana-26521	114	17	by	by	ADP
bibechana-26521	114	18	recoil	recoil	NOUN
bibechana-26521	114	19	ge	ge	PROPN
bibechana-26521	114	20	atoms	atom	NOUN
bibechana-26521	114	21	.	.	PUNCT
bibechana-26521	115	1	total	total	ADJ
bibechana-26521	115	2	energy	energy	NOUN
bibechana-26521	115	3	loss	loss	NOUN
bibechana-26521	115	4	to	to	ADP
bibechana-26521	115	5	phonons	phonon	NOUN
bibechana-26521	115	6	arsenic	arsenic	ADJ
bibechana-26521	115	7	-	-	PUNCT
bibechana-26521	115	8	germanium	germanium	NOUN
bibechana-26521	115	9	interaction	interaction	NOUN
bibechana-26521	115	10	is	be	AUX
bibechana-26521	115	11	90.888	90.888	NUM
bibechana-26521	115	12	kev	kev	NOUN
bibechana-26521	115	13	.	.	PUNCT
bibechana-26521	116	1	actually	actually	ADV
bibechana-26521	116	2	,	,	PUNCT
bibechana-26521	116	3	phonons	phonon	NOUN
bibechana-26521	116	4	do	do	AUX
bibechana-26521	116	5	not	not	PART
bibechana-26521	116	6	have	have	VERB
bibechana-26521	116	7	contribution	contribution	NOUN
bibechana-26521	116	8	in	in	ADP
bibechana-26521	116	9	improving	improve	VERB
bibechana-26521	116	10	electrical	electrical	ADJ
bibechana-26521	116	11	conductivity	conductivity	NOUN
bibechana-26521	116	12	but	but	CCONJ
bibechana-26521	116	13	do	do	AUX
bibechana-26521	116	14	have	have	VERB
bibechana-26521	116	15	contribution	contribution	NOUN
bibechana-26521	116	16	in	in	ADP
bibechana-26521	116	17	increasing	increase	VERB
bibechana-26521	116	18	temperature	temperature	NOUN
bibechana-26521	116	19	of	of	ADP
bibechana-26521	116	20	target	target	NOUN
bibechana-26521	116	21	material	material	NOUN
bibechana-26521	116	22	during	during	ADP
bibechana-26521	116	23	implantation	implantation	NOUN
bibechana-26521	116	24	process	process	NOUN
bibechana-26521	116	25	.	.	PUNCT
bibechana-26521	117	1	energy	energy	NOUN
bibechana-26521	117	2	to	to	PART
bibechana-26521	117	3	recoil	recoil	VERB
bibechana-26521	117	4	distribution	distribution	NOUN
bibechana-26521	117	5	of	of	ADP
bibechana-26521	117	6	energy	energy	NOUN
bibechana-26521	117	7	to	to	ADP
bibechana-26521	117	8	recoil	recoil	NOUN
bibechana-26521	117	9	gives	give	VERB
bibechana-26521	117	10	us	we	PRON
bibechana-26521	117	11	the	the	DET
bibechana-26521	117	12	information	information	NOUN
bibechana-26521	117	13	about	about	ADP
bibechana-26521	117	14	the	the	DET
bibechana-26521	117	15	amount	amount	NOUN
bibechana-26521	117	16	of	of	ADP
bibechana-26521	117	17	energy	energy	NOUN
bibechana-26521	117	18	loss	loss	NOUN
bibechana-26521	117	19	by	by	ADP
bibechana-26521	117	20	ions	ion	NOUN
bibechana-26521	117	21	to	to	ADP
bibechana-26521	117	22	the	the	DET
bibechana-26521	117	23	recoiling	recoiling	NOUN
bibechana-26521	117	24	atoms	atom	NOUN
bibechana-26521	117	25	.	.	PUNCT
bibechana-26521	118	1	overlapping	overlap	VERB
bibechana-26521	118	2	of	of	ADP
bibechana-26521	118	3	black	black	ADJ
bibechana-26521	118	4	and	and	CCONJ
bibechana-26521	118	5	yellow	yellow	ADJ
bibechana-26521	118	6	curves	curve	NOUN
bibechana-26521	118	7	demonstrates	demonstrate	VERB
bibechana-26521	118	8	that	that	SCONJ
bibechana-26521	118	9	energy	energy	NOUN
bibechana-26521	118	10	losses	loss	NOUN
bibechana-26521	118	11	by	by	ADP
bibechana-26521	118	12	ions	ion	NOUN
bibechana-26521	118	13	are	be	AUX
bibechana-26521	118	14	very	very	ADV
bibechana-26521	118	15	absorbed	absorb	VERB
bibechana-26521	118	16	by	by	ADP
bibechana-26521	118	17	target	target	NOUN
bibechana-26521	118	18	atoms	atom	NOUN
bibechana-26521	118	19	,	,	PUNCT
bibechana-26521	118	20	for	for	ADP
bibechana-26521	118	21	both	both	DET
bibechana-26521	118	22	ions	ion	NOUN
bibechana-26521	118	23	.	.	PUNCT
bibechana-26521	119	1	in	in	ADP
bibechana-26521	119	2	fig.4	fig.4	PROPN
bibechana-26521	119	3	,	,	PUNCT
bibechana-26521	119	4	we	we	PRON
bibechana-26521	119	5	find	find	VERB
bibechana-26521	119	6	that	that	SCONJ
bibechana-26521	119	7	160	160	NUM
bibechana-26521	119	8	ev	ev	NOUN
bibechana-26521	119	9	/	/	SYM
bibechana-26521	119	10	ion	ion	NOUN
bibechana-26521	119	11	was	be	AUX
bibechana-26521	119	12	absorbed	absorb	VERB
bibechana-26521	119	13	by	by	ADP
bibechana-26521	119	14	germanium	germanium	NOUN
bibechana-26521	119	15	at	at	ADP
bibechana-26521	119	16	the	the	DET
bibechana-26521	119	17	surface	surface	NOUN
bibechana-26521	119	18	of	of	ADP
bibechana-26521	119	19	the	the	DET
bibechana-26521	119	20	target	target	NOUN
bibechana-26521	119	21	k.	k.	PROPN
bibechana-26521	119	22	giri	giri	PROPN
bibechana-26521	119	23	,	,	PUNCT
bibechana-26521	119	24	k.	k.	PROPN
bibechana-26521	119	25	kandel	kandel	PROPN
bibechana-26521	119	26	/	/	SYM
bibechana-26521	119	27	bibechana	bibechana	PROPN
bibechana-26521	119	28	17	17	NUM
bibechana-26521	119	29	(	(	PUNCT
bibechana-26521	119	30	2020	2020	NUM
bibechana-26521	119	31	)	)	PUNCT
bibechana-26521	119	32	96	96	NUM
bibechana-26521	119	33	-	-	SYM
bibechana-26521	119	34	103	103	NUM
bibechana-26521	119	35	101	101	NUM
bibechana-26521	119	36	atom	atom	NOUN
bibechana-26521	119	37	followed	follow	VERB
bibechana-26521	119	38	by	by	ADP
bibechana-26521	119	39	increase	increase	NOUN
bibechana-26521	119	40	in	in	ADP
bibechana-26521	119	41	energy	energy	NOUN
bibechana-26521	119	42	loss	loss	NOUN
bibechana-26521	119	43	to	to	ADP
bibechana-26521	119	44	near	near	ADP
bibechana-26521	119	45	180	180	NUM
bibechana-26521	119	46	ev	ev	NOUN
bibechana-26521	119	47	/	/	SYM
bibechana-26521	119	48	ion	ion	NOUN
bibechana-26521	119	49	at	at	ADP
bibechana-26521	119	50	500å	500å	PROPN
bibechana-26521	119	51	.	.	PUNCT
bibechana-26521	120	1	fig	fig	NOUN
bibechana-26521	120	2	.	.	PUNCT
bibechana-26521	121	1	4	4	NUM
bibechana-26521	121	2	:	:	PUNCT
bibechana-26521	121	3	energy	energy	NOUN
bibechana-26521	121	4	to	to	ADP
bibechana-26521	121	5	recoil	recoil	NOUN
bibechana-26521	121	6	.	.	PUNCT
bibechana-26521	122	1	ion	ion	NOUN
bibechana-26521	122	2	range	range	NOUN
bibechana-26521	122	3	fig.5	fig.5	VERB
bibechana-26521	122	4	is	be	AUX
bibechana-26521	122	5	the	the	DET
bibechana-26521	122	6	curve	curve	NOUN
bibechana-26521	122	7	of	of	ADP
bibechana-26521	122	8	range	range	NOUN
bibechana-26521	122	9	distributions	distribution	NOUN
bibechana-26521	122	10	of	of	ADP
bibechana-26521	122	11	ions	ion	NOUN
bibechana-26521	122	12	building	build	VERB
bibechana-26521	122	13	up	up	ADP
bibechana-26521	122	14	in	in	ADP
bibechana-26521	122	15	germanium	germanium	NOUN
bibechana-26521	122	16	target	target	NOUN
bibechana-26521	122	17	.	.	PUNCT
bibechana-26521	123	1	the	the	DET
bibechana-26521	123	2	higher	high	ADJ
bibechana-26521	123	3	moments	moment	NOUN
bibechana-26521	123	4	of	of	ADP
bibechana-26521	123	5	the	the	DET
bibechana-26521	123	6	distribution	distribution	NOUN
bibechana-26521	123	7	(	(	PUNCT
bibechana-26521	123	8	straggle	straggle	VERB
bibechana-26521	123	9	,	,	PUNCT
bibechana-26521	123	10	skewness	skewness	NOUN
bibechana-26521	123	11	,	,	PUNCT
bibechana-26521	123	12	and	and	CCONJ
bibechana-26521	123	13	kurtosis	kurtosis	NOUN
bibechana-26521	123	14	)	)	PUNCT
bibechana-26521	123	15	are	be	AUX
bibechana-26521	123	16	also	also	ADV
bibechana-26521	123	17	given	give	VERB
bibechana-26521	123	18	in	in	ADP
bibechana-26521	123	19	the	the	DET
bibechana-26521	123	20	plot	plot	NOUN
bibechana-26521	123	21	.	.	PUNCT
bibechana-26521	124	1	both	both	DET
bibechana-26521	124	2	plots	plot	NOUN
bibechana-26521	124	3	have	have	VERB
bibechana-26521	124	4	ordinate	ordinate	VERB
bibechana-26521	124	5	unit	unit	NOUN
bibechana-26521	124	6	:	:	PUNCT
bibechana-26521	124	7	“	"	PUNCT
bibechana-26521	124	8	(	(	PUNCT
bibechana-26521	124	9	atoms	atom	NOUN
bibechana-26521	124	10	/	/	SYM
bibechana-26521	124	11	cm	cm	NOUN
bibechana-26521	124	12	3	3	NUM
bibechana-26521	124	13	)	)	PUNCT
bibechana-26521	124	14	/	/	SYM
bibechana-26521	124	15	(	(	PUNCT
bibechana-26521	124	16	atoms	atom	NOUN
bibechana-26521	124	17	/	/	SYM
bibechana-26521	124	18	cm	cm	NOUN
bibechana-26521	124	19	2	2	NUM
bibechana-26521	124	20	)	)	PUNCT
bibechana-26521	124	21	.	.	PUNCT
bibechana-26521	125	1	although	although	SCONJ
bibechana-26521	125	2	these	these	DET
bibechana-26521	125	3	units	unit	NOUN
bibechana-26521	125	4	appear	appear	VERB
bibechana-26521	125	5	strange	strange	ADJ
bibechana-26521	125	6	,	,	PUNCT
bibechana-26521	125	7	when	when	SCONJ
bibechana-26521	125	8	we	we	PRON
bibechana-26521	125	9	multiply	multiply	VERB
bibechana-26521	125	10	by	by	ADP
bibechana-26521	125	11	an	an	DET
bibechana-26521	125	12	implantation	implantation	NOUN
bibechana-26521	125	13	dose	dose	NOUN
bibechana-26521	125	14	(	(	PUNCT
bibechana-26521	125	15	ions	ion	NOUN
bibechana-26521	125	16	/	/	SYM
bibechana-26521	125	17	cm	cm	NOUN
bibechana-26521	125	18	2	2	NUM
bibechana-26521	125	19	)	)	PUNCT
bibechana-26521	125	20	,	,	PUNCT
bibechana-26521	125	21	we	we	PRON
bibechana-26521	125	22	will	will	AUX
bibechana-26521	125	23	end	end	VERB
bibechana-26521	125	24	with	with	ADP
bibechana-26521	125	25	the	the	DET
bibechana-26521	125	26	impurity	impurity	NOUN
bibechana-26521	125	27	concentration	concentration	NOUN
bibechana-26521	125	28	(	(	PUNCT
bibechana-26521	125	29	atoms	atom	NOUN
bibechana-26521	125	30	/	/	SYM
bibechana-26521	125	31	cm	cm	NOUN
bibechana-26521	125	32	3	3	NUM
bibechana-26521	125	33	)	)	PUNCT
bibechana-26521	125	34	vs.	vs.	ADP
bibechana-26521	125	35	depth	depth	NOUN
bibechana-26521	125	36	.	.	PUNCT
bibechana-26521	126	1	plot	plot	NOUN
bibechana-26521	126	2	is	be	AUX
bibechana-26521	126	3	the	the	DET
bibechana-26521	126	4	distribution	distribution	NOUN
bibechana-26521	126	5	of	of	ADP
bibechana-26521	126	6	arsenic	arsenic	ADJ
bibechana-26521	126	7	fig	fig	NOUN
bibechana-26521	126	8	.	.	PUNCT
bibechana-26521	127	1	5	5	NUM
bibechana-26521	127	2	:	:	PUNCT
bibechana-26521	127	3	ion	ion	NOUN
bibechana-26521	127	4	range	range	NOUN
bibechana-26521	127	5	distribution	distribution	NOUN
bibechana-26521	127	6	curve	curve	NOUN
bibechana-26521	127	7	.	.	PUNCT
bibechana-26521	128	1	ions	ion	NOUN
bibechana-26521	128	2	(	(	PUNCT
bibechana-26521	128	3	140	140	NUM
bibechana-26521	128	4	kev	kev	NOUN
bibechana-26521	128	5	)	)	PUNCT
bibechana-26521	128	6	over	over	ADP
bibechana-26521	128	7	germanium	germanium	NOUN
bibechana-26521	128	8	monolayer	monolayer	NOUN
bibechana-26521	128	9	surface	surface	NOUN
bibechana-26521	128	10	.	.	PUNCT
bibechana-26521	129	1	target	target	NOUN
bibechana-26521	129	2	depth	depth	NOUN
bibechana-26521	129	3	is	be	AUX
bibechana-26521	129	4	taken	take	VERB
bibechana-26521	129	5	upto	upto	ADJ
bibechana-26521	129	6	1500	1500	NUM
bibechana-26521	129	7	å	å	NOUN
bibechana-26521	129	8	in	in	ADP
bibechana-26521	129	9	order	order	NOUN
bibechana-26521	129	10	to	to	PART
bibechana-26521	129	11	catch	catch	VERB
bibechana-26521	129	12	maximum	maximum	ADJ
bibechana-26521	129	13	number	number	NOUN
bibechana-26521	129	14	of	of	ADP
bibechana-26521	129	15	ion	ion	NOUN
bibechana-26521	129	16	in	in	ADP
bibechana-26521	129	17	the	the	DET
bibechana-26521	129	18	plot	plot	NOUN
bibechana-26521	129	19	.	.	PUNCT
bibechana-26521	130	1	according	accord	VERB
bibechana-26521	130	2	to	to	ADP
bibechana-26521	130	3	table	table	NOUN
bibechana-26521	130	4	3	3	NUM
bibechana-26521	130	5	,	,	PUNCT
bibechana-26521	130	6	the	the	DET
bibechana-26521	130	7	mean	mean	NOUN
bibechana-26521	130	8	ranges	range	NOUN
bibechana-26521	130	9	of	of	ADP
bibechana-26521	130	10	implanted	implant	VERB
bibechana-26521	130	11	ions	ion	NOUN
bibechana-26521	130	12	were	be	AUX
bibechana-26521	130	13	found	find	VERB
bibechana-26521	130	14	to	to	PART
bibechana-26521	130	15	be	be	AUX
bibechana-26521	130	16	622	622	NUM
bibechana-26521	130	17	å	å	NOUN
bibechana-26521	130	18	for	for	ADP
bibechana-26521	130	19	arsenic	arsenic	ADJ
bibechana-26521	130	20	ion	ion	NOUN
bibechana-26521	130	21	.	.	PUNCT
bibechana-26521	131	1	this	this	DET
bibechana-26521	131	2	value	value	NOUN
bibechana-26521	131	3	show	show	VERB
bibechana-26521	131	4	little	little	ADJ
bibechana-26521	131	5	discrepancy	discrepancy	NOUN
bibechana-26521	131	6	with	with	ADP
bibechana-26521	131	7	the	the	DET
bibechana-26521	131	8	value	value	NOUN
bibechana-26521	131	9	given	give	VERB
bibechana-26521	131	10	by	by	ADP
bibechana-26521	131	11	srim	srim	PROPN
bibechana-26521	131	12	.	.	PUNCT
bibechana-26521	132	1	however	however	ADV
bibechana-26521	132	2	,	,	PUNCT
bibechana-26521	132	3	600	600	NUM
bibechana-26521	132	4	å	å	NOUN
bibechana-26521	132	5	was	be	AUX
bibechana-26521	132	6	the	the	DET
bibechana-26521	132	7	mean	mean	ADJ
bibechana-26521	132	8	ion	ion	NOUN
bibechana-26521	132	9	range	range	NOUN
bibechana-26521	132	10	table	table	NOUN
bibechana-26521	132	11	3	3	NUM
bibechana-26521	132	12	:	:	PUNCT
bibechana-26521	132	13	mean	mean	ADJ
bibechana-26521	132	14	range	range	NOUN
bibechana-26521	132	15	and	and	CCONJ
bibechana-26521	132	16	moments	moment	NOUN
bibechana-26521	132	17	.	.	PUNCT
bibechana-26521	133	1	arsenic	arsenic	ADJ
bibechana-26521	133	2	ion	ion	NOUN
bibechana-26521	133	3	range	range	NOUN
bibechana-26521	133	4	622	622	NUM
bibechana-26521	133	5	å	å	NOUN
bibechana-26521	133	6	straggle	straggle	VERB
bibechana-26521	133	7	294	294	NUM
bibechana-26521	133	8	å	å	PROPN
bibechana-26521	133	9	skewness	skewness	NOUN
bibechana-26521	133	10	0.63705	0.63705	NUM
bibechana-26521	133	11	kurtosis	kurtosis	NOUN
bibechana-26521	133	12	-25.5672	-25.5672	NOUN
bibechana-26521	133	13	value	value	NOUN
bibechana-26521	133	14	tabulated	tabulate	VERB
bibechana-26521	133	15	by	by	ADP
bibechana-26521	133	16	srim	srim	NOUN
bibechana-26521	133	17	and	and	CCONJ
bibechana-26521	133	18	as	as	ADP
bibechana-26521	133	19	per	per	ADP
bibechana-26521	133	20	trim	trim	NOUN
bibechana-26521	133	21	;	;	PUNCT
bibechana-26521	133	22	the	the	DET
bibechana-26521	133	23	value	value	NOUN
bibechana-26521	133	24	was	be	AUX
bibechana-26521	133	25	622	622	NUM
bibechana-26521	133	26	å	å	NOUN
bibechana-26521	133	27	,	,	PUNCT
bibechana-26521	133	28	for	for	ADP
bibechana-26521	133	29	arsenic	arsenic	ADJ
bibechana-26521	133	30	ion	ion	NOUN
bibechana-26521	133	31	.	.	PUNCT
bibechana-26521	134	1	this	this	DET
bibechana-26521	134	2	difference	difference	NOUN
bibechana-26521	134	3	in	in	ADP
bibechana-26521	134	4	mean	mean	ADJ
bibechana-26521	134	5	ion	ion	NOUN
bibechana-26521	134	6	range	range	NOUN
bibechana-26521	134	7	value	value	NOUN
bibechana-26521	134	8	was	be	AUX
bibechana-26521	134	9	found	find	VERB
bibechana-26521	134	10	as	as	ADP
bibechana-26521	134	11	error	error	NOUN
bibechana-26521	134	12	.	.	PUNCT
bibechana-26521	135	1	therefore	therefore	ADV
bibechana-26521	135	2	,	,	PUNCT
bibechana-26521	135	3	the	the	DET
bibechana-26521	135	4	percentage	percentage	NOUN
bibechana-26521	135	5	error	error	NOUN
bibechana-26521	135	6	for	for	ADP
bibechana-26521	135	7	arsenicgermanium	arsenicgermanium	ADJ
bibechana-26521	135	8	interaction	interaction	NOUN
bibechana-26521	135	9	was	be	AUX
bibechana-26521	135	10	found	find	VERB
bibechana-26521	135	11	to	to	PART
bibechana-26521	135	12	be	be	AUX
bibechana-26521	135	13	3.67	3.67	NUM
bibechana-26521	135	14	%	%	NOUN
bibechana-26521	135	15	.	.	PUNCT
bibechana-26521	136	1	these	these	DET
bibechana-26521	136	2	discrepancies	discrepancy	NOUN
bibechana-26521	136	3	were	be	AUX
bibechana-26521	136	4	responsible	responsible	ADJ
bibechana-26521	136	5	for	for	ADP
bibechana-26521	136	6	skewness	skewness	NOUN
bibechana-26521	136	7	.	.	PUNCT
bibechana-26521	137	1	also	also	ADV
bibechana-26521	137	2	,	,	PUNCT
bibechana-26521	137	3	this	this	DET
bibechana-26521	137	4	value	value	NOUN
bibechana-26521	137	5	indicates	indicate	VERB
bibechana-26521	137	6	that	that	SCONJ
bibechana-26521	137	7	the	the	DET
bibechana-26521	137	8	peak	peak	NOUN
bibechana-26521	137	9	concentrations	concentration	NOUN
bibechana-26521	137	10	of	of	ADP
bibechana-26521	137	11	defects	defect	NOUN
bibechana-26521	137	12	are	be	AUX
bibechana-26521	137	13	formed	form	VERB
bibechana-26521	137	14	at	at	ADP
bibechana-26521	137	15	range	range	NOUN
bibechana-26521	137	16	of	of	ADP
bibechana-26521	137	17	622	622	NUM
bibechana-26521	137	18	å	å	NOUN
bibechana-26521	137	19	for	for	SCONJ
bibechana-26521	137	20	140	140	NUM
bibechana-26521	137	21	kev	kev	NOUN
bibechana-26521	137	22	accelerated	accelerate	VERB
bibechana-26521	137	23	arsenic	arsenic	ADJ
bibechana-26521	137	24	ion	ion	NOUN
bibechana-26521	137	25	.	.	PUNCT
bibechana-26521	138	1	<	<	X
bibechana-26521	138	2	recoil	recoil	NOUN
bibechana-26521	138	3	distribution	distribution	NOUN
bibechana-26521	138	4	in	in	ADP
bibechana-26521	138	5	fig.6	fig.6	PROPN
bibechana-26521	138	6	,	,	PUNCT
bibechana-26521	138	7	it	it	PRON
bibechana-26521	138	8	can	can	AUX
bibechana-26521	138	9	be	be	AUX
bibechana-26521	138	10	seen	see	VERB
bibechana-26521	138	11	that	that	SCONJ
bibechana-26521	138	12	the	the	DET
bibechana-26521	138	13	concentration	concentration	NOUN
bibechana-26521	138	14	of	of	ADP
bibechana-26521	138	15	recoil	recoil	NOUN
bibechana-26521	138	16	atoms	atom	NOUN
bibechana-26521	138	17	at	at	ADP
bibechana-26521	138	18	the	the	DET
bibechana-26521	138	19	surface	surface	NOUN
bibechana-26521	138	20	of	of	ADP
bibechana-26521	138	21	the	the	DET
bibechana-26521	138	22	target	target	NOUN
bibechana-26521	138	23	is	be	AUX
bibechana-26521	138	24	fig	fig	NOUN
bibechana-26521	138	25	.	.	PUNCT
bibechana-26521	139	1	6	6	NUM
bibechana-26521	139	2	:	:	PUNCT
bibechana-26521	139	3	germanium	germanium	NOUN
bibechana-26521	139	4	recoil	recoil	NOUN
bibechana-26521	139	5	distribution	distribution	NOUN
bibechana-26521	139	6	curve	curve	NOUN
bibechana-26521	139	7	.	.	PUNCT
bibechana-26521	140	1	1.8	1.8	NUM
bibechana-26521	140	2	×	×	NOUN
bibechana-26521	140	3	10	10	NUM
bibechana-26521	140	4	8	8	NUM
bibechana-26521	140	5	atoms	atom	NOUN
bibechana-26521	140	6	/	/	SYM
bibechana-26521	140	7	cm	cm	NOUN
bibechana-26521	140	8	2	2	NUM
bibechana-26521	140	9	for	for	ADP
bibechana-26521	140	10	arsenic	arsenic	ADJ
bibechana-26521	140	11	-	-	PUNCT
bibechana-26521	140	12	germanium	germanium	NOUN
bibechana-26521	140	13	collision	collision	NOUN
bibechana-26521	140	14	,	,	PUNCT
bibechana-26521	140	15	followed	follow	VERB
bibechana-26521	140	16	by	by	ADP
bibechana-26521	140	17	increase	increase	NOUN
bibechana-26521	140	18	in	in	ADP
bibechana-26521	140	19	maximum	maximum	ADJ
bibechana-26521	140	20	concentration	concentration	NOUN
bibechana-26521	140	21	of	of	ADP
bibechana-26521	140	22	recoil	recoil	NOUN
bibechana-26521	140	23	atoms	atom	NOUN
bibechana-26521	140	24	to	to	ADP
bibechana-26521	140	25	7.2	7.2	NUM
bibechana-26521	140	26	×	×	NOUN
bibechana-26521	140	27	10	10	NUM
bibechana-26521	140	28	8	8	NUM
bibechana-26521	140	29	atoms	atom	NOUN
bibechana-26521	140	30	/	/	SYM
bibechana-26521	140	31	cm	cm	NOUN
bibechana-26521	140	32	2	2	NUM
bibechana-26521	140	33	at	at	ADP
bibechana-26521	140	34	400	400	NUM
bibechana-26521	140	35	å	å	NOUN
bibechana-26521	140	36	.	.	PUNCT
bibechana-26521	141	1	k.	k.	PROPN
bibechana-26521	141	2	giri	giri	PROPN
bibechana-26521	141	3	,	,	PUNCT
bibechana-26521	141	4	k.	k.	PROPN
bibechana-26521	141	5	kandel	kandel	PROPN
bibechana-26521	141	6	/	/	SYM
bibechana-26521	141	7	bibechana	bibechana	PROPN
bibechana-26521	141	8	17	17	NUM
bibechana-26521	141	9	(	(	PUNCT
bibechana-26521	141	10	2020	2020	NUM
bibechana-26521	141	11	)	)	PUNCT
bibechana-26521	141	12	96	96	NUM
bibechana-26521	141	13	-	-	SYM
bibechana-26521	141	14	103	103	NUM
bibechana-26521	141	15	102	102	NUM
bibechana-26521	141	16	table	table	NOUN
bibechana-26521	141	17	4	4	NUM
bibechana-26521	141	18	:	:	PUNCT
bibechana-26521	141	19	longitudinal	longitudinal	ADJ
bibechana-26521	141	20	,	,	PUNCT
bibechana-26521	141	21	radial	radial	ADJ
bibechana-26521	141	22	and	and	CCONJ
bibechana-26521	141	23	lateral	lateral	ADJ
bibechana-26521	141	24	projection	projection	NOUN
bibechana-26521	141	25	range	range	NOUN
bibechana-26521	141	26	for	for	ADP
bibechana-26521	141	27	as	as	SCONJ
bibechana-26521	141	28	ions	ion	NOUN
bibechana-26521	141	29	range	range	NOUN
bibechana-26521	141	30	(	(	PUNCT
bibechana-26521	141	31	å	å	NOUN
bibechana-26521	141	32	)	)	PUNCT
bibechana-26521	141	33	longitudinal	longitudinal	ADJ
bibechana-26521	141	34	622	622	NUM
bibechana-26521	141	35	lateral	lateral	ADJ
bibechana-26521	141	36	projection	projection	NOUN
bibechana-26521	141	37	201	201	NUM
bibechana-26521	141	38	radial	radial	NOUN
bibechana-26521	141	39	314	314	NUM
bibechana-26521	141	40	from	from	ADP
bibechana-26521	141	41	the	the	DET
bibechana-26521	141	42	table	table	NOUN
bibechana-26521	141	43	4	4	NUM
bibechana-26521	141	44	,	,	PUNCT
bibechana-26521	141	45	the	the	DET
bibechana-26521	141	46	average	average	ADJ
bibechana-26521	141	47	value	value	NOUN
bibechana-26521	141	48	of	of	ADP
bibechana-26521	141	49	lateral	lateral	ADJ
bibechana-26521	141	50	projected	project	VERB
bibechana-26521	141	51	for	for	ADP
bibechana-26521	141	52	as	as	ADP
bibechana-26521	141	53	ion	ion	NOUN
bibechana-26521	141	54	is	be	AUX
bibechana-26521	141	55	201	201	NUM
bibechana-26521	141	56	å	å	NOUN
bibechana-26521	141	57	.	.	PUNCT
bibechana-26521	142	1	the	the	DET
bibechana-26521	142	2	radial	radial	ADJ
bibechana-26521	142	3	range	range	NOUN
bibechana-26521	142	4	is	be	AUX
bibechana-26521	142	5	314	314	NUM
bibechana-26521	142	6	å	å	NOUN
bibechana-26521	142	7	which	which	PRON
bibechana-26521	142	8	is	be	AUX
bibechana-26521	142	9	the	the	DET
bibechana-26521	142	10	mean	mean	ADJ
bibechana-26521	142	11	radial	radial	ADJ
bibechana-26521	142	12	displacements	displacement	NOUN
bibechana-26521	142	13	range	range	VERB
bibechana-26521	142	14	from	from	ADP
bibechana-26521	142	15	the	the	DET
bibechana-26521	142	16	x	x	NOUN
bibechana-26521	142	17	-	-	NOUN
bibechana-26521	142	18	axis	axis	ADJ
bibechana-26521	142	19	assuming	assume	VERB
bibechana-26521	142	20	cylindrical	cylindrical	ADJ
bibechana-26521	142	21	symmetry	symmetry	NOUN
bibechana-26521	142	22	.	.	PUNCT
bibechana-26521	143	1	collision	collision	NOUN
bibechana-26521	143	2	events	event	NOUN
bibechana-26521	143	3	target	target	VERB
bibechana-26521	143	4	displacement	displacement	NOUN
bibechana-26521	143	5	the	the	DET
bibechana-26521	143	6	results	result	NOUN
bibechana-26521	143	7	for	for	ADP
bibechana-26521	143	8	the	the	DET
bibechana-26521	143	9	collision	collision	NOUN
bibechana-26521	143	10	events	event	NOUN
bibechana-26521	143	11	of	of	ADP
bibechana-26521	143	12	the	the	PRON
bibechana-26521	143	13	as	as	ADP
bibechana-26521	143	14	ions	ion	NOUN
bibechana-26521	143	15	with	with	ADP
bibechana-26521	143	16	ge	ge	PROPN
bibechana-26521	143	17	target	target	NOUN
bibechana-26521	143	18	give	give	VERB
bibechana-26521	143	19	the	the	DET
bibechana-26521	143	20	total	total	ADJ
bibechana-26521	143	21	target	target	NOUN
bibechana-26521	143	22	displacements	displacement	NOUN
bibechana-26521	143	23	as	as	SCONJ
bibechana-26521	143	24	shown	show	VERB
bibechana-26521	143	25	in	in	ADP
bibechana-26521	143	26	fig.7	fig.7	ADJ
bibechana-26521	143	27	.	.	PUNCT
bibechana-26521	144	1	the	the	DET
bibechana-26521	144	2	area	area	NOUN
bibechana-26521	144	3	under	under	ADP
bibechana-26521	144	4	the	the	DET
bibechana-26521	144	5	curve	curve	NOUN
bibechana-26521	144	6	gives	give	VERB
bibechana-26521	144	7	the	the	DET
bibechana-26521	144	8	values	value	NOUN
bibechana-26521	144	9	for	for	ADP
bibechana-26521	144	10	total	total	ADJ
bibechana-26521	144	11	displacements	displacement	NOUN
bibechana-26521	144	12	of	of	ADP
bibechana-26521	144	13	5116	5116	NUM
bibechana-26521	144	14	/	/	SYM
bibechana-26521	144	15	ion	ion	NOUN
bibechana-26521	144	16	arsenic	arsenic	NOUN
bibechana-26521	144	17	.	.	PUNCT
bibechana-26521	145	1	fig	fig	NOUN
bibechana-26521	145	2	.	.	PUNCT
bibechana-26521	146	1	7	7	NUM
bibechana-26521	146	2	:	:	PUNCT
bibechana-26521	146	3	curve	curve	VERB
bibechana-26521	146	4	showing	show	VERB
bibechana-26521	146	5	target	target	NOUN
bibechana-26521	146	6	displacement	displacement	NOUN
bibechana-26521	146	7	.	.	PUNCT
bibechana-26521	147	1	target	target	NOUN
bibechana-26521	147	2	vacancies	vacancy	NOUN
bibechana-26521	147	3	fig.8	fig.8	PROPN
bibechana-26521	147	4	shows	show	VERB
bibechana-26521	147	5	the	the	DET
bibechana-26521	147	6	vacancy	vacancy	NOUN
bibechana-26521	147	7	-	-	PUNCT
bibechana-26521	147	8	target	target	NOUN
bibechana-26521	147	9	depth	depth	NOUN
bibechana-26521	147	10	distribution	distribution	NOUN
bibechana-26521	147	11	curve	curve	NOUN
bibechana-26521	147	12	which	which	PRON
bibechana-26521	147	13	is	be	AUX
bibechana-26521	147	14	the	the	DET
bibechana-26521	147	15	result	result	NOUN
bibechana-26521	147	16	of	of	ADP
bibechana-26521	147	17	removal	removal	NOUN
bibechana-26521	147	18	of	of	ADP
bibechana-26521	147	19	ge	ge	PROPN
bibechana-26521	147	20	atoms	atom	NOUN
bibechana-26521	147	21	from	from	ADP
bibechana-26521	147	22	their	their	PRON
bibechana-26521	147	23	equilibrium	equilibrium	NOUN
bibechana-26521	147	24	positions	position	NOUN
bibechana-26521	147	25	because	because	SCONJ
bibechana-26521	147	26	of	of	ADP
bibechana-26521	147	27	the	the	DET
bibechana-26521	147	28	collision	collision	NOUN
bibechana-26521	147	29	process	process	NOUN
bibechana-26521	147	30	.	.	PUNCT
bibechana-26521	148	1	the	the	DET
bibechana-26521	148	2	general	general	ADJ
bibechana-26521	148	3	feature	feature	NOUN
bibechana-26521	148	4	of	of	ADP
bibechana-26521	148	5	the	the	DET
bibechana-26521	148	6	curves	curve	NOUN
bibechana-26521	148	7	is	be	AUX
bibechana-26521	148	8	also	also	ADV
bibechana-26521	148	9	similar	similar	ADJ
bibechana-26521	148	10	to	to	ADP
bibechana-26521	148	11	those	those	PRON
bibechana-26521	148	12	of	of	ADP
bibechana-26521	148	13	the	the	DET
bibechana-26521	148	14	recoil	recoil	NOUN
bibechana-26521	148	15	distributions	distribution	NOUN
bibechana-26521	148	16	in	in	ADP
bibechana-26521	148	17	peak	peak	NOUN
bibechana-26521	148	18	positions	position	NOUN
bibechana-26521	148	19	except	except	SCONJ
bibechana-26521	148	20	that	that	SCONJ
bibechana-26521	148	21	their	their	PRON
bibechana-26521	148	22	magnitudes	magnitude	NOUN
bibechana-26521	148	23	are	be	AUX
bibechana-26521	148	24	different	different	ADJ
bibechana-26521	148	25	.	.	PUNCT
bibechana-26521	149	1	each	each	DET
bibechana-26521	149	2	displacement	displacement	ADJ
bibechana-26521	149	3	collision	collision	NOUN
bibechana-26521	149	4	will	will	AUX
bibechana-26521	149	5	lead	lead	VERB
bibechana-26521	149	6	to	to	ADP
bibechana-26521	149	7	a	a	DET
bibechana-26521	149	8	displacement	displacement	NOUN
bibechana-26521	149	9	of	of	ADP
bibechana-26521	149	10	a	a	DET
bibechana-26521	149	11	ge	ge	PROPN
bibechana-26521	149	12	atom	atom	PROPN
bibechana-26521	149	13	,	,	PUNCT
bibechana-26521	149	14	that	that	PRON
bibechana-26521	149	15	resides	reside	VERB
bibechana-26521	149	16	at	at	ADP
bibechana-26521	149	17	the	the	DET
bibechana-26521	149	18	end	end	NOUN
bibechana-26521	149	19	as	as	ADP
bibechana-26521	149	20	an	an	DET
bibechana-26521	149	21	interstitial	interstitial	NOUN
bibechana-26521	149	22	,	,	PUNCT
bibechana-26521	149	23	and	and	CCONJ
bibechana-26521	149	24	creation	creation	NOUN
bibechana-26521	149	25	of	of	ADP
bibechana-26521	149	26	a	a	DET
bibechana-26521	149	27	vacancy	vacancy	NOUN
bibechana-26521	149	28	(	(	PUNCT
bibechana-26521	149	29	frenkel	frenkel	NOUN
bibechana-26521	149	30	pair	pair	NOUN
bibechana-26521	149	31	)	)	PUNCT
bibechana-26521	149	32	.	.	PUNCT
bibechana-26521	150	1	fig	fig	NOUN
bibechana-26521	150	2	.	.	PUNCT
bibechana-26521	151	1	8	8	NUM
bibechana-26521	151	2	:	:	PUNCT
bibechana-26521	151	3	curve	curve	NOUN
bibechana-26521	151	4	showing	show	VERB
bibechana-26521	151	5	vacancies	vacancy	NOUN
bibechana-26521	151	6	per	per	ADP
bibechana-26521	151	7	ion	ion	NOUN
bibechana-26521	151	8	.	.	PUNCT
bibechana-26521	152	1	therefore	therefore	ADV
bibechana-26521	152	2	,	,	PUNCT
bibechana-26521	152	3	it	it	PRON
bibechana-26521	152	4	is	be	AUX
bibechana-26521	152	5	expected	expect	VERB
bibechana-26521	152	6	that	that	SCONJ
bibechana-26521	152	7	the	the	DET
bibechana-26521	152	8	number	number	NOUN
bibechana-26521	152	9	of	of	ADP
bibechana-26521	152	10	vacancies	vacancy	NOUN
bibechana-26521	152	11	and	and	CCONJ
bibechana-26521	152	12	interstitials	interstitial	NOUN
bibechana-26521	152	13	produced	produce	VERB
bibechana-26521	152	14	per	per	ADP
bibechana-26521	152	15	ion	ion	NOUN
bibechana-26521	152	16	are	be	AUX
bibechana-26521	152	17	the	the	DET
bibechana-26521	152	18	same	same	ADJ
bibechana-26521	152	19	.	.	PUNCT
bibechana-26521	153	1	the	the	DET
bibechana-26521	153	2	total	total	ADJ
bibechana-26521	153	3	number	number	NOUN
bibechana-26521	153	4	of	of	ADP
bibechana-26521	153	5	vacancies	vacancy	NOUN
bibechana-26521	153	6	amounted	amount	VERB
bibechana-26521	153	7	to	to	ADP
bibechana-26521	153	8	4738	4738	NUM
bibechana-26521	153	9	/	/	SYM
bibechana-26521	153	10	ion	ion	NOUN
bibechana-26521	153	11	for	for	ADP
bibechana-26521	153	12	as	as	ADP
bibechana-26521	153	13	ions	ion	NOUN
bibechana-26521	153	14	.	.	PUNCT
bibechana-26521	154	1	replacement	replacement	NOUN
bibechana-26521	154	2	collision	collision	NOUN
bibechana-26521	154	3	the	the	DET
bibechana-26521	154	4	results	result	NOUN
bibechana-26521	154	5	indicate	indicate	VERB
bibechana-26521	154	6	that	that	SCONJ
bibechana-26521	154	7	replacement	replacement	NOUN
bibechana-26521	154	8	collisions	collision	NOUN
bibechana-26521	154	9	of	of	ADP
bibechana-26521	154	10	378	378	NUM
bibechana-26521	154	11	/	/	SYM
bibechana-26521	154	12	ion	ion	NOUN
bibechana-26521	154	13	are	be	AUX
bibechana-26521	154	14	calculated	calculate	VERB
bibechana-26521	154	15	from	from	ADP
bibechana-26521	154	16	the	the	DET
bibechana-26521	154	17	collision	collision	NOUN
bibechana-26521	154	18	of	of	ADP
bibechana-26521	154	19	as	as	ADP
bibechana-26521	154	20	ions	ion	NOUN
bibechana-26521	154	21	with	with	ADP
bibechana-26521	154	22	ge	ge	PROPN
bibechana-26521	154	23	atoms	atom	NOUN
bibechana-26521	154	24	.	.	PUNCT
bibechana-26521	155	1	the	the	DET
bibechana-26521	155	2	replacement	replacement	NOUN
bibechana-26521	155	3	collisions	collision	NOUN
bibechana-26521	155	4	amount	amount	NOUN
bibechana-26521	155	5	to	to	ADP
bibechana-26521	155	6	7.98	7.98	NUM
bibechana-26521	155	7	%	%	NOUN
bibechana-26521	155	8	for	for	ADP
bibechana-26521	155	9	as	as	ADP
bibechana-26521	155	10	ions	ion	NOUN
bibechana-26521	155	11	.	.	PUNCT
bibechana-26521	156	1	a	a	DET
bibechana-26521	156	2	summary	summary	NOUN
bibechana-26521	156	3	of	of	ADP
bibechana-26521	156	4	the	the	DET
bibechana-26521	156	5	collision	collision	NOUN
bibechana-26521	156	6	events	event	NOUN
bibechana-26521	156	7	is	be	AUX
bibechana-26521	156	8	shown	show	VERB
bibechana-26521	156	9	in	in	ADP
bibechana-26521	156	10	table	table	NOUN
bibechana-26521	156	11	6	6	NUM
bibechana-26521	156	12	.	.	PUNCT
bibechana-26521	156	13	fig	fig	NOUN
bibechana-26521	156	14	.	.	PUNCT
bibechana-26521	157	1	9	9	NUM
bibechana-26521	157	2	:	:	PUNCT
bibechana-26521	157	3	replacement	replacement	NOUN
bibechana-26521	157	4	collision	collision	NOUN
bibechana-26521	157	5	curve	curve	NOUN
bibechana-26521	157	6	.	.	PUNCT
bibechana-26521	158	1	table	table	NOUN
bibechana-26521	158	2	6	6	NUM
bibechana-26521	158	3	:	:	PUNCT
bibechana-26521	159	1	defects	defect	NOUN
bibechana-26521	159	2	produced	produce	VERB
bibechana-26521	159	3	during	during	ADP
bibechana-26521	159	4	ion	ion	NOUN
bibechana-26521	159	5	implantation	implantation	NOUN
bibechana-26521	159	6	of	of	ADP
bibechana-26521	159	7	as	as	ADP
bibechana-26521	159	8	in	in	ADP
bibechana-26521	159	9	ge	ge	PROPN
bibechana-26521	159	10	.	.	PUNCT
bibechana-26521	160	1	arsenic	arsenic	ADJ
bibechana-26521	160	2	target	target	NOUN
bibechana-26521	160	3	displacements	displacement	NOUN
bibechana-26521	160	4	/	/	SYM
bibechana-26521	160	5	ion	ion	NOUN
bibechana-26521	160	6	5116	5116	NUM
bibechana-26521	160	7	vacancies	vacancy	NOUN
bibechana-26521	160	8	/	/	SYM
bibechana-26521	160	9	ion	ion	NOUN
bibechana-26521	160	10	4738	4738	NUM
bibechana-26521	160	11	interstitials	interstitial	NOUN
bibechana-26521	160	12	/	/	SYM
bibechana-26521	160	13	ion	ion	NOUN
bibechana-26521	160	14	4738	4738	NUM
bibechana-26521	160	15	replacement	replacement	NOUN
bibechana-26521	160	16	collisions	collision	NOUN
bibechana-26521	160	17	/	/	SYM
bibechana-26521	160	18	ion	ion	NOUN
bibechana-26521	160	19	378	378	NUM
bibechana-26521	160	20	k.	k.	PROPN
bibechana-26521	160	21	giri	giri	PROPN
bibechana-26521	160	22	,	,	PUNCT
bibechana-26521	160	23	k.	k.	PROPN
bibechana-26521	160	24	kandel	kandel	PROPN
bibechana-26521	160	25	/	/	SYM
bibechana-26521	160	26	bibechana	bibechana	PROPN
bibechana-26521	160	27	17	17	NUM
bibechana-26521	160	28	(	(	PUNCT
bibechana-26521	160	29	2020	2020	NUM
bibechana-26521	160	30	)	)	PUNCT
bibechana-26521	160	31	96	96	NUM
bibechana-26521	160	32	-	-	SYM
bibechana-26521	160	33	103	103	NUM
bibechana-26521	160	34	103	103	NUM
bibechana-26521	160	35	for	for	ADP
bibechana-26521	160	36	arsenic	arsenic	ADJ
bibechana-26521	160	37	-	-	PUNCT
bibechana-26521	160	38	germanium	germanium	NOUN
bibechana-26521	160	39	collision	collision	NOUN
bibechana-26521	160	40	,	,	PUNCT
bibechana-26521	160	41	sum	sum	NOUN
bibechana-26521	160	42	of	of	ADP
bibechana-26521	160	43	vacancies	vacancy	NOUN
bibechana-26521	160	44	/	/	SYM
bibechana-26521	160	45	ion	ion	NOUN
bibechana-26521	160	46	and	and	CCONJ
bibechana-26521	160	47	replacement	replacement	NOUN
bibechana-26521	160	48	/	/	SYM
bibechana-26521	160	49	ion	ion	NOUN
bibechana-26521	160	50	is	be	AUX
bibechana-26521	160	51	equal	equal	ADJ
bibechana-26521	160	52	to	to	PART
bibechana-26521	160	53	target	target	VERB
bibechana-26521	160	54	displacement	displacement	NOUN
bibechana-26521	160	55	/	/	SYM
bibechana-26521	160	56	ion	ion	NOUN
bibechana-26521	160	57	which	which	PRON
bibechana-26521	160	58	shows	show	VERB
bibechana-26521	160	59	a	a	DET
bibechana-26521	160	60	fair	fair	ADJ
bibechana-26521	160	61	agreement	agreement	NOUN
bibechana-26521	160	62	with	with	ADP
bibechana-26521	160	63	equation	equation	NOUN
bibechana-26521	160	64	(	(	PUNCT
bibechana-26521	160	65	2	2	NUM
bibechana-26521	160	66	)	)	PUNCT
bibechana-26521	160	67	.	.	PUNCT
bibechana-26521	161	1	i.e.	i.e.	X
bibechana-26521	161	2	5116	5116	NUM
bibechana-26521	161	3	/	/	SYM
bibechana-26521	161	4	ion	ion	NOUN
bibechana-26521	161	5	=	=	SYM
bibechana-26521	161	6	4738	4738	NUM
bibechana-26521	161	7	/	/	SYM
bibechana-26521	161	8	ion	ion	NOUN
bibechana-26521	161	9	+	+	CCONJ
bibechana-26521	161	10	378	378	NUM
bibechana-26521	161	11	/	/	SYM
bibechana-26521	161	12	ion	ion	NOUN
bibechana-26521	161	13	the	the	DET
bibechana-26521	161	14	results	result	NOUN
bibechana-26521	161	15	presented	present	VERB
bibechana-26521	161	16	in	in	ADP
bibechana-26521	161	17	the	the	DET
bibechana-26521	161	18	figures	figure	NOUN
bibechana-26521	161	19	belonging	belong	VERB
bibechana-26521	161	20	to	to	ADP
bibechana-26521	161	21	energy	energy	NOUN
bibechana-26521	161	22	loss	loss	NOUN
bibechana-26521	161	23	by	by	ADP
bibechana-26521	161	24	ionization	ionization	NOUN
bibechana-26521	161	25	,	,	PUNCT
bibechana-26521	161	26	recoil	recoil	NOUN
bibechana-26521	161	27	collisions	collision	NOUN
bibechana-26521	161	28	,	,	PUNCT
bibechana-26521	161	29	displacement	displacement	ADJ
bibechana-26521	161	30	collisions	collision	NOUN
bibechana-26521	161	31	,	,	PUNCT
bibechana-26521	161	32	and	and	CCONJ
bibechana-26521	161	33	vacancies	vacancy	NOUN
bibechana-26521	161	34	are	be	AUX
bibechana-26521	161	35	similar	similar	ADJ
bibechana-26521	161	36	by	by	ADP
bibechana-26521	161	37	nature	nature	NOUN
bibechana-26521	161	38	of	of	ADP
bibechana-26521	161	39	graph	graph	NOUN
bibechana-26521	161	40	but	but	CCONJ
bibechana-26521	161	41	are	be	AUX
bibechana-26521	161	42	characterized	characterize	VERB
bibechana-26521	161	43	by	by	ADP
bibechana-26521	161	44	difference	difference	NOUN
bibechana-26521	161	45	in	in	ADP
bibechana-26521	161	46	their	their	PRON
bibechana-26521	161	47	numerical	numerical	ADJ
bibechana-26521	161	48	values	value	NOUN
bibechana-26521	161	49	.	.	PUNCT
bibechana-26521	162	1	4	4	X
bibechana-26521	162	2	.	.	X
bibechana-26521	162	3	conclusion	conclusion	NOUN
bibechana-26521	162	4	doping	doping	NOUN
bibechana-26521	162	5	of	of	ADP
bibechana-26521	162	6	arsenic	arsenic	ADJ
bibechana-26521	162	7	ions	ion	NOUN
bibechana-26521	162	8	on	on	ADP
bibechana-26521	162	9	germanium	germanium	NOUN
bibechana-26521	162	10	reveals	reveal	VERB
bibechana-26521	162	11	that	that	SCONJ
bibechana-26521	162	12	most	most	ADJ
bibechana-26521	162	13	of	of	ADP
bibechana-26521	162	14	the	the	DET
bibechana-26521	162	15	energy	energy	NOUN
bibechana-26521	162	16	loss	loss	NOUN
bibechana-26521	162	17	is	be	AUX
bibechana-26521	162	18	due	due	ADJ
bibechana-26521	162	19	to	to	ADP
bibechana-26521	162	20	ionization	ionization	NOUN
bibechana-26521	162	21	and	and	CCONJ
bibechana-26521	162	22	phonons	phonon	NOUN
bibechana-26521	162	23	production	production	NOUN
bibechana-26521	162	24	.	.	PUNCT
bibechana-26521	163	1	for	for	ADP
bibechana-26521	163	2	140	140	NUM
bibechana-26521	163	3	kev	kev	NOUN
bibechana-26521	163	4	arsenic	arsenic	ADJ
bibechana-26521	163	5	ion	ion	NOUN
bibechana-26521	163	6	,	,	PUNCT
bibechana-26521	163	7	the	the	DET
bibechana-26521	163	8	energy	energy	NOUN
bibechana-26521	163	9	loss	loss	NOUN
bibechana-26521	163	10	for	for	ADP
bibechana-26521	163	11	ionization	ionization	NOUN
bibechana-26521	163	12	,	,	PUNCT
bibechana-26521	163	13	phonon	phonon	NOUN
bibechana-26521	163	14	production	production	NOUN
bibechana-26521	163	15	and	and	CCONJ
bibechana-26521	163	16	vacancies	vacancy	NOUN
bibechana-26521	163	17	creation	creation	NOUN
bibechana-26521	163	18	are	be	AUX
bibechana-26521	163	19	39.634	39.634	NUM
bibechana-26521	163	20	kev	kev	NOUN
bibechana-26521	163	21	(	(	PUNCT
bibechana-26521	163	22	28.31	28.31	NUM
bibechana-26521	163	23	%	%	NOUN
bibechana-26521	163	24	of	of	ADP
bibechana-26521	163	25	incident	incident	NOUN
bibechana-26521	163	26	energy	energy	NOUN
bibechana-26521	163	27	)	)	PUNCT
bibechana-26521	163	28	,	,	PUNCT
bibechana-26521	163	29	90.89	90.89	NUM
bibechana-26521	163	30	kev	kev	NOUN
bibechana-26521	163	31	(	(	PUNCT
bibechana-26521	163	32	64.92	64.92	NUM
bibechana-26521	163	33	%	%	NOUN
bibechana-26521	163	34	of	of	ADP
bibechana-26521	163	35	incident	incident	NOUN
bibechana-26521	163	36	energy	energy	NOUN
bibechana-26521	163	37	)	)	PUNCT
bibechana-26521	163	38	and	and	CCONJ
bibechana-26521	163	39	9.478	9.478	NUM
bibechana-26521	163	40	kev	kev	NOUN
bibechana-26521	163	41	(	(	PUNCT
bibechana-26521	163	42	6.77	6.77	NUM
bibechana-26521	163	43	%	%	NOUN
bibechana-26521	163	44	of	of	ADP
bibechana-26521	163	45	incident	incident	NOUN
bibechana-26521	163	46	energy	energy	NOUN
bibechana-26521	163	47	)	)	PUNCT
bibechana-26521	163	48	,	,	PUNCT
bibechana-26521	163	49	respectively	respectively	ADV
bibechana-26521	163	50	.	.	PUNCT
bibechana-26521	164	1	almost	almost	ADV
bibechana-26521	164	2	three	three	NUM
bibechana-26521	164	3	fold	fold	ADJ
bibechana-26521	164	4	amount	amount	NOUN
bibechana-26521	164	5	of	of	ADP
bibechana-26521	164	6	energy	energy	NOUN
bibechana-26521	164	7	was	be	AUX
bibechana-26521	164	8	lost	lose	VERB
bibechana-26521	164	9	during	during	ADP
bibechana-26521	164	10	phonon	phonon	NOUN
bibechana-26521	164	11	production	production	NOUN
bibechana-26521	164	12	when	when	SCONJ
bibechana-26521	164	13	as	as	SCONJ
bibechana-26521	164	14	ions	ion	NOUN
bibechana-26521	164	15	are	be	AUX
bibechana-26521	164	16	implanted	implant	VERB
bibechana-26521	164	17	on	on	ADP
bibechana-26521	164	18	germanium	germanium	NOUN
bibechana-26521	164	19	.	.	PUNCT
bibechana-26521	165	1	the	the	DET
bibechana-26521	165	2	collision	collision	NOUN
bibechana-26521	165	3	events	event	NOUN
bibechana-26521	165	4	revealed	reveal	VERB
bibechana-26521	165	5	the	the	DET
bibechana-26521	165	6	formation	formation	NOUN
bibechana-26521	165	7	of	of	ADP
bibechana-26521	165	8	interstitial	interstitial	ADJ
bibechana-26521	165	9	vacancy	vacancy	NOUN
bibechana-26521	165	10	pairs	pair	NOUN
bibechana-26521	165	11	4738	4738	NUM
bibechana-26521	165	12	,	,	PUNCT
bibechana-26521	165	13	target	target	NOUN
bibechana-26521	165	14	displacements	displacement	NOUN
bibechana-26521	165	15	of	of	ADP
bibechana-26521	165	16	5116	5116	NUM
bibechana-26521	165	17	/	/	SYM
bibechana-26521	165	18	ion	ion	NOUN
bibechana-26521	165	19	and	and	CCONJ
bibechana-26521	165	20	replacement	replacement	NOUN
bibechana-26521	165	21	collisions	collision	NOUN
bibechana-26521	165	22	of	of	ADP
bibechana-26521	165	23	378	378	NUM
bibechana-26521	165	24	/	/	SYM
bibechana-26521	165	25	ion	ion	NOUN
bibechana-26521	165	26	.	.	PUNCT
bibechana-26521	166	1	another	another	DET
bibechana-26521	166	2	important	important	ADJ
bibechana-26521	166	3	finding	finding	NOUN
bibechana-26521	166	4	of	of	ADP
bibechana-26521	166	5	this	this	DET
bibechana-26521	166	6	work	work	NOUN
bibechana-26521	166	7	is	be	AUX
bibechana-26521	166	8	that	that	SCONJ
bibechana-26521	166	9	we	we	PRON
bibechana-26521	166	10	can	can	AUX
bibechana-26521	166	11	not	not	PART
bibechana-26521	166	12	improve	improve	VERB
bibechana-26521	166	13	electrical	electrical	ADJ
bibechana-26521	166	14	conductivity	conductivity	NOUN
bibechana-26521	166	15	and	and	CCONJ
bibechana-26521	166	16	hardness	hardness	NOUN
bibechana-26521	166	17	of	of	ADP
bibechana-26521	166	18	germanium	germanium	NOUN
bibechana-26521	166	19	by	by	ADP
bibechana-26521	166	20	implanting	implant	VERB
bibechana-26521	166	21	140	140	NUM
bibechana-26521	166	22	kev	kev	NOUN
bibechana-26521	166	23	arsenic	arsenic	ADJ
bibechana-26521	166	24	ions	ion	NOUN
bibechana-26521	166	25	.	.	PUNCT
bibechana-26521	167	1	to	to	PART
bibechana-26521	167	2	improve	improve	VERB
bibechana-26521	167	3	these	these	DET
bibechana-26521	167	4	properties	property	NOUN
bibechana-26521	167	5	by	by	ADP
bibechana-26521	167	6	implanting	implant	VERB
bibechana-26521	167	7	arsenic	arsenic	ADJ
bibechana-26521	167	8	ions	ion	NOUN
bibechana-26521	167	9	we	we	PRON
bibechana-26521	167	10	need	need	VERB
bibechana-26521	167	11	to	to	PART
bibechana-26521	167	12	accelerate	accelerate	VERB
bibechana-26521	167	13	these	these	DET
bibechana-26521	167	14	ions	ion	NOUN
bibechana-26521	167	15	above	above	ADP
bibechana-26521	167	16	1	1	NUM
bibechana-26521	167	17	mev	mev	NOUN
bibechana-26521	167	18	of	of	ADP
bibechana-26521	167	19	energy	energy	NOUN
bibechana-26521	167	20	.	.	PUNCT
bibechana-26521	168	1	references	reference	NOUN
bibechana-26521	168	2	[	[	X
bibechana-26521	168	3	1	1	NUM
bibechana-26521	168	4	]	]	PUNCT
bibechana-26521	168	5	a.	a.	NOUN
bibechana-26521	168	6	u.	u.	PROPN
bibechana-26521	168	7	mac	mac	PROPN
bibechana-26521	168	8	rae	rae	PROPN
bibechana-26521	168	9	,	,	PUNCT
bibechana-26521	168	10	device	device	NOUN
bibechana-26521	168	11	fabrication	fabrication	NOUN
bibechana-26521	168	12	by	by	ADP
bibechana-26521	168	13	ion	ion	NOUN
bibechana-26521	168	14	implantation	implantation	NOUN
bibechana-26521	168	15	,	,	PUNCT
bibechana-26521	168	16	radiation	radiation	NOUN
bibechana-26521	168	17	effects	effect	NOUN
bibechana-26521	168	18	.	.	PUNCT
bibechana-26521	169	1	1971	1971	NUM
bibechana-26521	169	2	jan	jan	PROPN
bibechana-26521	169	3	1	1	NUM
bibechana-26521	169	4	;	;	PUNCT
bibechana-26521	169	5	7(12):59	7(12):59	NUM
bibechana-26521	169	6	-	-	SYM
bibechana-26521	169	7	63	63	NUM
bibechana-26521	169	8	.	.	PUNCT
bibechana-26521	170	1	[	[	X
bibechana-26521	170	2	2	2	X
bibechana-26521	170	3	]	]	PUNCT
bibechana-26521	170	4	j.	j.	PROPN
bibechana-26521	170	5	f.	f.	PROPN
bibechana-26521	170	6	gibbons	gibbons	PROPN
bibechana-26521	170	7	,	,	PUNCT
bibechana-26521	170	8	ion	ion	NOUN
bibechana-26521	170	9	implantation	implantation	NOUN
bibechana-26521	170	10	in	in	ADP
bibechana-26521	170	11	semiconductors	semiconductor	NOUN
bibechana-26521	170	12	—	—	PUNCT
bibechana-26521	170	13	part	part	NOUN
bibechana-26521	170	14	i	i	PRON
bibechana-26521	170	15	:	:	PUNCT
bibechana-26521	170	16	range	range	NOUN
bibechana-26521	170	17	distribution	distribution	NOUN
bibechana-26521	170	18	theory	theory	NOUN
bibechana-26521	170	19	and	and	CCONJ
bibechana-26521	170	20	experiments	experiment	NOUN
bibechana-26521	170	21	,	,	PUNCT
bibechana-26521	170	22	proceedings	proceeding	NOUN
bibechana-26521	170	23	of	of	ADP
bibechana-26521	170	24	the	the	DET
bibechana-26521	170	25	ieee	ieee	NOUN
bibechana-26521	170	26	,	,	PUNCT
bibechana-26521	170	27	56(3	56(3	NUM
bibechana-26521	170	28	)	)	PUNCT
bibechana-26521	170	29	(	(	PUNCT
bibechana-26521	170	30	1968	1968	NUM
bibechana-26521	170	31	)	)	PUNCT
bibechana-26521	170	32	295	295	NUM
bibechana-26521	170	33	-	-	SYM
bibechana-26521	170	34	319	319	NUM
bibechana-26521	170	35	.	.	PUNCT
bibechana-26521	171	1	[	[	X
bibechana-26521	171	2	3	3	X
bibechana-26521	171	3	]	]	X
bibechana-26521	171	4	e.	e.	PROPN
bibechana-26521	171	5	a.	a.	PROPN
bibechana-26521	171	6	schroeppel	schroeppel	PROPN
bibechana-26521	171	7	,	,	PUNCT
bibechana-26521	171	8	m.	m.	PROPN
bibechana-26521	171	9	w.	w.	PROPN
bibechana-26521	171	10	kroll	kroll	PROPN
bibechana-26521	171	11	,	,	PUNCT
bibechana-26521	171	12	inventors	inventor	NOUN
bibechana-26521	171	13	;	;	PUNCT
bibechana-26521	171	14	oncostim	oncostim	ADJ
bibechana-26521	171	15	,	,	PUNCT
bibechana-26521	171	16	a	a	DET
bibechana-26521	171	17	minnesota	minnesota	PROPN
bibechana-26521	171	18	corporation	corporation	NOUN
bibechana-26521	171	19	,	,	PUNCT
bibechana-26521	171	20	assignee	assignee	NOUN
bibechana-26521	171	21	.	.	PUNCT
bibechana-26521	172	1	implantable	implantable	ADJ
bibechana-26521	172	2	device	device	NOUN
bibechana-26521	172	3	and	and	CCONJ
bibechana-26521	172	4	method	method	NOUN
bibechana-26521	172	5	for	for	ADP
bibechana-26521	172	6	the	the	DET
bibechana-26521	172	7	electrical	electrical	ADJ
bibechana-26521	172	8	treatment	treatment	NOUN
bibechana-26521	172	9	of	of	ADP
bibechana-26521	172	10	cancer	cancer	NOUN
bibechana-26521	172	11	,	,	PUNCT
bibechana-26521	172	12	united	united	PROPN
bibechana-26521	172	13	states	states	PROPN
bibechana-26521	172	14	patent	patent	PROPN
bibechana-26521	172	15	us	we	PRON
bibechana-26521	172	16	6,738	6,738	NUM
bibechana-26521	172	17	(	(	PUNCT
bibechana-26521	172	18	2004	2004	NUM
bibechana-26521	172	19	)	)	PUNCT
bibechana-26521	172	20	663	663	NUM
bibechana-26521	172	21	.	.	PUNCT
bibechana-26521	173	1	[	[	X
bibechana-26521	173	2	4	4	NUM
bibechana-26521	173	3	]	]	PUNCT
bibechana-26521	173	4	m.	m.	NOUN
bibechana-26521	173	5	nastasi	nastasi	PROPN
bibechana-26521	173	6	,	,	PUNCT
bibechana-26521	173	7	j.	j.	PROPN
bibechana-26521	173	8	mayer	mayer	PROPN
bibechana-26521	173	9	,	,	PUNCT
bibechana-26521	173	10	j.	j.	PROPN
bibechana-26521	173	11	k.	k.	PROPN
bibechana-26521	173	12	hirvonen	hirvonen	PROPN
bibechana-26521	173	13	,	,	PUNCT
bibechana-26521	173	14	ion	ion	NOUN
bibechana-26521	173	15	-	-	PUNCT
bibechana-26521	173	16	solid	solid	ADJ
bibechana-26521	173	17	interactions	interaction	NOUN
bibechana-26521	173	18	:	:	PUNCT
bibechana-26521	173	19	fundamentals	fundamental	NOUN
bibechana-26521	173	20	and	and	CCONJ
bibechana-26521	173	21	applications	application	NOUN
bibechana-26521	173	22	.	.	PUNCT
bibechana-26521	174	1	cambridge	cambridge	PROPN
bibechana-26521	174	2	university	university	PROPN
bibechana-26521	174	3	press	press	NOUN
bibechana-26521	174	4	;	;	PUNCT
bibechana-26521	174	5	1996	1996	NUM
bibechana-26521	174	6	.	.	PUNCT
bibechana-26521	175	1	[	[	X
bibechana-26521	175	2	5	5	X
bibechana-26521	175	3	]	]	PUNCT
bibechana-26521	175	4	j.	j.	PROPN
bibechana-26521	175	5	f.	f.	PROPN
bibechana-26521	175	6	ziegler	ziegler	PROPN
bibechana-26521	175	7	,	,	PUNCT
bibechana-26521	175	8	j.	j.	PROPN
bibechana-26521	175	9	biersack	biersack	PROPN
bibechana-26521	175	10	,	,	PUNCT
bibechana-26521	175	11	u.	u.	PROPN
bibechana-26521	175	12	littmark	littmark	PROPN
bibechana-26521	175	13	,	,	PUNCT
bibechana-26521	175	14	‘	'	PUNCT
bibechana-26521	175	15	‘	'	PUNCT
bibechana-26521	175	16	the	the	DET
bibechana-26521	175	17	stopping	stopping	NOUN
bibechana-26521	175	18	and	and	CCONJ
bibechana-26521	175	19	range	range	NOUN
bibechana-26521	175	20	of	of	ADP
bibechana-26521	175	21	ions	ion	NOUN
bibechana-26521	175	22	in	in	ADP
bibechana-26521	175	23	matter	matter	NOUN
bibechana-26521	175	24	’’	’'	PUNCT
bibechana-26521	175	25	,	,	PUNCT
bibechana-26521	175	26	pergamon	pergamon	PROPN
bibechana-26521	175	27	press	press	PROPN
bibechana-26521	175	28	,	,	PUNCT
bibechana-26521	175	29	1985	1985	NUM
bibechana-26521	175	30	.	.	PUNCT
bibechana-26521	176	1	[	[	X
bibechana-26521	176	2	6	6	NUM
bibechana-26521	176	3	]	]	PUNCT
bibechana-26521	176	4	"	"	PUNCT
bibechana-26521	176	5	electronics	electronic	NOUN
bibechana-26521	176	6	history	history	NOUN
bibechana-26521	176	7	4	4	NUM
bibechana-26521	176	8	–	–	PUNCT
bibechana-26521	176	9	transistors	transistor	NOUN
bibechana-26521	176	10	"	"	PUNCT
bibechana-26521	176	11	.	.	PUNCT
bibechana-26521	177	1	national	national	PROPN
bibechana-26521	177	2	academy	academy	PROPN
bibechana-26521	177	3	of	of	ADP
bibechana-26521	177	4	engineering	engineering	PROPN
bibechana-26521	177	5	,	,	PUNCT
bibechana-26521	177	6	2008	2008	NUM
bibechana-26521	177	7	,	,	PUNCT
bibechana-26521	177	8	retrieved	retrieve	VERB
bibechana-26521	177	9	200808	200808	NUM
bibechana-26521	177	10	-	-	SYM
bibechana-26521	177	11	22	22	NUM
bibechana-26521	177	12	.	.	PUNCT
bibechana-26521	178	1	[	[	X
bibechana-26521	178	2	7	7	X
bibechana-26521	178	3	]	]	PUNCT
bibechana-26521	178	4	j.	j.	PROPN
bibechana-26521	178	5	s.	s.	PROPN
bibechana-26521	178	6	kilby	kilby	PROPN
bibechana-26521	178	7	,	,	PUNCT
bibechana-26521	178	8	invention	invention	NOUN
bibechana-26521	178	9	of	of	ADP
bibechana-26521	178	10	the	the	DET
bibechana-26521	178	11	integrated	integrate	VERB
bibechana-26521	178	12	circuit	circuit	NOUN
bibechana-26521	178	13	.	.	PUNCT
bibechana-26521	179	1	ieee	ieee	NOUN
bibechana-26521	179	2	transactions	transaction	NOUN
bibechana-26521	179	3	on	on	ADP
bibechana-26521	179	4	electron	electron	NOUN
bibechana-26521	179	5	devices	device	NOUN
bibechana-26521	179	6	.	.	PUNCT
bibechana-26521	180	1	23	23	NUM
bibechana-26521	180	2	(	(	PUNCT
bibechana-26521	180	3	7	7	NUM
bibechana-26521	180	4	)	)	PUNCT
bibechana-26521	180	5	(	(	PUNCT
bibechana-26521	180	6	1976	1976	NUM
bibechana-26521	180	7	)	)	PUNCT
bibechana-26521	180	8	648	648	NUM
bibechana-26521	180	9	-	-	SYM
bibechana-26521	180	10	54	54	NUM
bibechana-26521	180	11	.	.	PUNCT
bibechana-26521	181	1	[	[	X
bibechana-26521	181	2	8	8	NUM
bibechana-26521	181	3	]	]	PUNCT
bibechana-26521	181	4	r.	r.	PROPN
bibechana-26521	181	5	g.	g.	PROPN
bibechana-26521	181	6	arns	arns	PROPN
bibechana-26521	181	7	,	,	PUNCT
bibechana-26521	181	8	the	the	DET
bibechana-26521	181	9	other	other	ADJ
bibechana-26521	181	10	transistor	transistor	NOUN
bibechana-26521	181	11	:	:	PUNCT
bibechana-26521	181	12	early	early	ADJ
bibechana-26521	181	13	history	history	NOUN
bibechana-26521	181	14	of	of	ADP
bibechana-26521	181	15	the	the	DET
bibechana-26521	181	16	metal	metal	NOUN
bibechana-26521	181	17	-	-	PUNCT
bibechana-26521	181	18	oxide	oxide	NOUN
bibechana-26521	181	19	semiconductor	semiconductor	NOUN
bibechana-26521	181	20	field	field	NOUN
bibechana-26521	181	21	-	-	PUNCT
bibechana-26521	181	22	effect	effect	NOUN
bibechana-26521	181	23	transistor	transistor	NOUN
bibechana-26521	181	24	,	,	PUNCT
bibechana-26521	181	25	engineering	engineering	NOUN
bibechana-26521	181	26	science	science	PROPN
bibechana-26521	181	27	&	&	CCONJ
bibechana-26521	181	28	education	education	PROPN
bibechana-26521	181	29	journal	journal	PROPN
bibechana-26521	181	30	7	7	NUM
bibechana-26521	181	31	(	(	PUNCT
bibechana-26521	181	32	5	5	NUM
bibechana-26521	181	33	)	)	PUNCT
bibechana-26521	181	34	(	(	PUNCT
bibechana-26521	181	35	1998	1998	NUM
bibechana-26521	181	36	)	)	PUNCT
bibechana-26521	181	37	233	233	NUM
bibechana-26521	181	38	-	-	SYM
bibechana-26521	181	39	40	40	NUM
bibechana-26521	181	40	.	.	PUNCT
bibechana-26521	182	1	[	[	X
bibechana-26521	182	2	9	9	NUM
bibechana-26521	182	3	]	]	X
bibechana-26521	182	4	u.	u.	PROPN
bibechana-26521	182	5	s.	s.	PROPN
bibechana-26521	182	6	geological	geological	ADJ
bibechana-26521	182	7	survey	survey	NOUN
bibechana-26521	182	8	,	,	PUNCT
bibechana-26521	182	9	"	"	PUNCT
bibechana-26521	182	10	germanium	germanium	NOUN
bibechana-26521	182	11	—	—	PUNCT
bibechana-26521	182	12	statistics	statistic	NOUN
bibechana-26521	182	13	and	and	CCONJ
bibechana-26521	182	14	information	information	NOUN
bibechana-26521	182	15	"	"	PUNCT
bibechana-26521	182	16	,	,	PUNCT
bibechana-26521	182	17	u.s	u.s	PROPN
bibechana-26521	182	18	.	.	PROPN
bibechana-26521	182	19	geological	geological	ADJ
bibechana-26521	182	20	survey	survey	NOUN
bibechana-26521	182	21	,	,	PUNCT
bibechana-26521	182	22	mineral	mineral	NOUN
bibechana-26521	182	23	commodity	commodity	NOUN
bibechana-26521	182	24	summaries	summary	NOUN
bibechana-26521	182	25	,	,	PUNCT
bibechana-26521	182	26	2008	2008	NUM
bibechana-26521	182	27	.	.	PUNCT
bibechana-26521	183	1	retrieved	retrieve	VERB
bibechana-26521	183	2	2008	2008	NUM
bibechana-26521	183	3	-	-	SYM
bibechana-26521	183	4	0828	0828	NUM
bibechana-26521	183	5	.	.	PUNCT
bibechana-26521	184	1	[	[	X
bibechana-26521	184	2	10	10	NUM
bibechana-26521	184	3	]	]	X
bibechana-26521	184	4	d.	d.	PROPN
bibechana-26521	184	5	crisp	crisp	PROPN
bibechana-26521	184	6	,	,	PUNCT
bibechana-26521	184	7	a.	a.	NOUN
bibechana-26521	184	8	pathare	pathare	PROPN
bibechana-26521	184	9	,	,	PUNCT
bibechana-26521	184	10	r.	r.	PROPN
bibechana-26521	184	11	c.	c.	PROPN
bibechana-26521	184	12	well,"the	well,"the	DET
bibechana-26521	184	13	performance	performance	NOUN
bibechana-26521	184	14	of	of	ADP
bibechana-26521	184	15	gallium	gallium	NOUN
bibechana-26521	184	16	arsenide	arsenide	NOUN
bibechana-26521	184	17	/	/	SYM
bibechana-26521	184	18	germanium	germanium	NOUN
bibechana-26521	184	19	solar	solar	ADJ
bibechana-26521	184	20	cells	cell	NOUN
bibechana-26521	184	21	at	at	ADP
bibechana-26521	184	22	the	the	DET
bibechana-26521	184	23	martian	martian	ADJ
bibechana-26521	184	24	surface	surface	NOUN
bibechana-26521	184	25	"	"	PUNCT
bibechana-26521	184	26	,	,	PUNCT
bibechana-26521	184	27	acta	acta	PROPN
bibechana-26521	184	28	astronautica	astronautica	PROPN
bibechana-26521	184	29	press	press	PROPN
bibechana-26521	184	30	,	,	PUNCT
bibechana-26521	184	31	2004	2004	NUM
bibechana-26521	184	32	.	.	PUNCT
bibechana-26521	185	1	[	[	X
bibechana-26521	185	2	11	11	NUM
bibechana-26521	185	3	]	]	PUNCT
bibechana-26521	186	1	p.	p.	PROPN
bibechana-26521	186	2	e.	e.	PROPN
bibechana-26521	186	3	schmidt	schmidt	PROPN
bibechana-26521	186	4	and	and	CCONJ
bibechana-26521	186	5	j.	j.	PROPN
bibechana-26521	186	6	vedde	vedde	PROPN
bibechana-26521	186	7	,	,	PUNCT
bibechana-26521	186	8	"	"	PUNCT
bibechana-26521	186	9	high	high	ADJ
bibechana-26521	186	10	resistivity	resistivity	NOUN
bibechana-26521	186	11	ntd	ntd	PROPN
bibechana-26521	186	12	production	production	NOUN
bibechana-26521	186	13	and	and	CCONJ
bibechana-26521	186	14	applications	application	NOUN
bibechana-26521	186	15	"	"	PUNCT
bibechana-26521	186	16	,	,	PUNCT
bibechana-26521	186	17	electrochemical	electrochemical	ADJ
bibechana-26521	186	18	society	society	NOUN
bibechana-26521	186	19	proceedings	proceeding	NOUN
bibechana-26521	186	20	,	,	PUNCT
bibechana-26521	186	21	1998	1998	NUM
bibechana-26521	186	22	.	.	PUNCT
bibechana-26521	187	1	[	[	X
bibechana-26521	187	2	12	12	NUM
bibechana-26521	187	3	]	]	PUNCT
bibechana-26521	187	4	szweda	szweda	NOUN
bibechana-26521	187	5	,	,	PUNCT
bibechana-26521	187	6	roy	roy	PROPN
bibechana-26521	187	7	,	,	PUNCT
bibechana-26521	187	8	"	"	PUNCT
bibechana-26521	187	9	germanium	germanium	NOUN
bibechana-26521	187	10	phoenix	phoenix	NOUN
bibechana-26521	187	11	"	"	PUNCT
bibechana-26521	187	12	,	,	PUNCT
bibechana-26521	187	13	iii	iii	X
bibechana-26521	187	14	-	-	PUNCT
bibechana-26521	187	15	vs	vs	ADP
bibechana-26521	187	16	review	review	NOUN
bibechana-26521	187	17	,	,	PUNCT
bibechana-26521	187	18	(	(	PUNCT
bibechana-26521	187	19	2005	2005	NUM
bibechana-26521	187	20	)	)	PUNCT
bibechana-26521	187	21	.	.	PUNCT
bibechana-26521	188	1	[	[	X
bibechana-26521	188	2	13	13	NUM
bibechana-26521	188	3	]	]	PUNCT
bibechana-26521	188	4	j.	j.	PROPN
bibechana-26521	188	5	harold	harold	PROPN
bibechana-26521	188	6	,	,	PUNCT
bibechana-26521	188	7	j.	j.	PROPN
bibechana-26521	188	8	r.	r.	PROPN
bibechana-26521	188	9	leibowitz	leibowitz	PROPN
bibechana-26521	188	10	,	,	PUNCT
bibechana-26521	188	11	a.	a.	NOUN
bibechana-26521	188	12	p.	p.	NOUN
bibechana-26521	188	13	ramsa	ramsa	NOUN
bibechana-26521	188	14	,	,	PUNCT
bibechana-26521	188	15	inventors	inventor	NOUN
bibechana-26521	188	16	.	.	PUNCT
bibechana-26521	189	1	formation	formation	NOUN
bibechana-26521	189	2	of	of	ADP
bibechana-26521	189	3	junctions	junction	NOUN
bibechana-26521	189	4	in	in	ADP
bibechana-26521	189	5	semiconductors	semiconductor	NOUN
bibechana-26521	189	6	,	,	PUNCT
bibechana-26521	189	7	united	united	PROPN
bibechana-26521	189	8	states	states	PROPN
bibechana-26521	189	9	patent	patent	VERB
bibechana-26521	189	10	us	we	PRON
bibechana-26521	189	11	2	2	NUM
bibechana-26521	189	12	,	,	PUNCT
bibechana-26521	189	13	803	803	NUM
bibechana-26521	189	14	(	(	PUNCT
bibechana-26521	189	15	1957	1957	NUM
bibechana-26521	189	16	)	)	PUNCT
bibechana-26521	189	17	569	569	NUM
bibechana-26521	189	18	.	.	PUNCT
bibechana-26521	190	1	[	[	X
bibechana-26521	190	2	14	14	NUM
bibechana-26521	190	3	]	]	X
bibechana-26521	190	4	m.	m.	NOUN
bibechana-26521	190	5	bruel	bruel	PROPN
bibechana-26521	190	6	,	,	PUNCT
bibechana-26521	190	7	m.	m.	NOUN
bibechana-26521	190	8	floccari	floccari	PROPN
bibechana-26521	190	9	,	,	PUNCT
bibechana-26521	190	10	inventors	inventor	NOUN
bibechana-26521	190	11	;	;	PUNCT
bibechana-26521	190	12	commissariat	commissariat	VERB
bibechana-26521	190	13	an	an	DET
bibechana-26521	190	14	l'energie	l'energie	X
bibechana-26521	190	15	atomique	atomique	X
bibechana-26521	190	16	,	,	PUNCT
bibechana-26521	190	17	assignee	assignee	NOUN
bibechana-26521	190	18	,	,	PUNCT
bibechana-26521	190	19	process	process	NOUN
bibechana-26521	190	20	for	for	ADP
bibechana-26521	190	21	doping	dope	VERB
bibechana-26521	190	22	semiconductors	semiconductor	NOUN
bibechana-26521	190	23	.	.	PUNCT
bibechana-26521	191	1	united	united	PROPN
bibechana-26521	191	2	states	states	PROPN
bibechana-26521	191	3	patent	patent	VERB
bibechana-26521	191	4	us	we	PRON
bibechana-26521	191	5	4	4	NUM
bibechana-26521	191	6	,	,	PUNCT
bibechana-26521	191	7	368	368	NUM
bibechana-26521	191	8	(	(	PUNCT
bibechana-26521	191	9	1983	1983	NUM
bibechana-26521	191	10	)	)	PUNCT
bibechana-26521	191	11	083	083	NUM
bibechana-26521	191	12	,	,	PUNCT
bibechana-26521	191	13	1983	1983	NUM
bibechana-26521	191	14	.	.	PUNCT