id	sid	eid	entity	type
brj-23233	2	1	2024	CARDINAL
brj-23233	3	1	3095-3105	CARDINAL
brj-23233	4	1	3095	CARDINAL
brj-23233	4	2	hye jung youn	PERSON
brj-23233	4	3	hak lae lee b	PERSON
brj-23233	5	1	six	CARDINAL
brj-23233	10	1	10.15376	CARDINAL
brj-23233	10	2	moorim p&p co.	ORG
brj-23233	10	3	3	CARDINAL
brj-23233	10	4	ubonggangyang-ro	PERSON
brj-23233	10	5	45011	DATE
brj-23233	10	6	korea	GPE
brj-23233	11	1	seoul national university	ORG
brj-23233	11	2	1	CARDINAL
brj-23233	11	3	seoul	GPE
brj-23233	11	4	08826	DATE
brj-23233	11	5	korea	GPE
brj-23233	11	6	1993	DATE
brj-23233	11	7	lee 2008	PERSON
brj-23233	11	8	kasajová	PERSON
brj-23233	11	9	2013	DATE
brj-23233	14	1	saini et al	PERSON
brj-23233	14	2	2016	DATE
brj-23233	14	3	lee et al	PERSON
brj-23233	14	4	2021	CARDINAL
brj-23233	17	1	1992	DATE
brj-23233	17	2	rajala et al	PERSON
brj-23233	17	3	2004	DATE
brj-23233	18	1	1989	DATE
brj-23233	18	2	2019	DATE
brj-23233	22	1	2024	CARDINAL
brj-23233	23	1	3095	CARDINAL
brj-23233	23	2	3096	CARDINAL
brj-23233	25	1	fujiwara et al	PERSON
brj-23233	25	2	1991	DATE
brj-23233	26	1	first	ORDINAL
brj-23233	27	1	2011	DATE
brj-23233	28	1	2017	DATE
brj-23233	29	1	2011	DATE
brj-23233	29	2	resch et al	PERSON
brj-23233	29	3	2010	DATE
brj-23233	29	4	kim et al	PERSON
brj-23233	29	5	2016	DATE
brj-23233	30	1	lee	PERSON
brj-23233	30	2	2022	CARDINAL
brj-23233	33	1	2022	CARDINAL
brj-23233	36	1	lindberg	ORG
brj-23233	36	2	2005	DATE
brj-23233	36	3	bhattacharya et al	PERSON
brj-23233	36	4	2015	DATE
brj-23233	39	1	2005	DATE
brj-23233	41	1	johansson	PERSON
brj-23233	41	2	1994	DATE
brj-23233	41	3	2	CARDINAL
brj-23233	41	4	4 to 8 mm	QUANTITY
brj-23233	45	1	ulsan	ORG
brj-23233	45	2	korea	GPE
brj-23233	45	3	78 g/m2	QUANTITY
brj-23233	46	1	75%	PERCENT
brj-23233	46	2	15%	PERCENT
brj-23233	46	3	10%	PERCENT
brj-23233	48	1	2024	CARDINAL
brj-23233	49	1	3095	CARDINAL
brj-23233	49	2	3097	CARDINAL
brj-23233	50	1	mottle	DATE
brj-23233	50	2	two	CARDINAL
brj-23233	50	3	60	CARDINAL
brj-23233	50	4	95	CARDINAL
brj-23233	50	5	omya korea	GPE
brj-23233	50	6	2	CARDINAL
brj-23233	50	7	savannah	GPE
brj-23233	50	8	ga, usa	ORG
brj-23233	51	1	95	CARDINAL
brj-23233	51	2	no.1	ORG
brj-23233	51	3	savannah	GPE
brj-23233	51	4	ga, usa	ORG
brj-23233	51	5	4:6	CARDINAL
brj-23233	52	1	four	CARDINAL
brj-23233	52	2	5100	CARDINAL
brj-23233	52	3	norcross	GPE
brj-23233	52	4	ga, usa	ORG
brj-23233	52	5	1.15	CARDINAL
brj-23233	52	6	0.43	CARDINAL
brj-23233	52	7	0.45	CARDINAL
brj-23233	52	8	0.29 μm	CARDINAL
brj-23233	53	1	samyang genex	ORG
brj-23233	53	2	incheon	GPE
brj-23233	53	3	korea	GPE
brj-23233	53	4	lg chemical co.	ORG
brj-23233	53	5	yeochun	GPE
brj-23233	53	6	korea	GPE
brj-23233	54	1	104	CARDINAL
brj-23233	54	2	san nopco korea ltd.	GPE
brj-23233	54	3	korea	GPE
brj-23233	54	4	neowet 101h	PERSON
brj-23233	54	5	jeong	PERSON
brj-23233	54	6	chemical co., ltd.	ORG
brj-23233	54	7	busan	GPE
brj-23233	54	8	korea	GPE
brj-23233	55	1	2022	CARDINAL
brj-23233	55	2	youn	ORG
brj-23233	55	3	lee 2022	PERSON
brj-23233	56	1	two	CARDINAL
brj-23233	57	1	2	CARDINAL
brj-23233	59	1	63%	PERCENT
brj-23233	60	1	six	CARDINAL
brj-23233	60	2	1	CARDINAL
brj-23233	61	1	95	CARDINAL
brj-23233	61	2	60:40	TIME
brj-23233	62	1	64%	PERCENT
brj-23233	62	2	1	CARDINAL
brj-23233	63	1	2	CARDINAL
brj-23233	64	1	64%	PERCENT
brj-23233	64	2	kaltec scientific, usa	ORG
brj-23233	65	1	0.2 μm	QUANTITY
brj-23233	65	2	taiwan	GPE
brj-23233	66	1	25°	QUANTITY
brj-23233	66	2	1.5	CARDINAL
brj-23233	66	3	120	CARDINAL
brj-23233	66	4	1	CARDINAL
brj-23233	66	5	95	CARDINAL
brj-23233	66	6	100	CARDINAL
brj-23233	66	7	60	CARDINAL
brj-23233	66	8	8 8 8 8 8 8 4	TIME
brj-23233	66	9	8 8	DATE
brj-23233	66	10	2	CARDINAL
brj-23233	67	1	63.0 881	CARDINAL
brj-23233	67	2	8.8 94.0 p2 62.9	QUANTITY
brj-23233	67	3	8.5 194.5	QUANTITY
brj-23233	67	4	62.9 1,328	CARDINAL
brj-23233	67	5	62.9 2,240	CARDINAL
brj-23233	67	6	8.9 73.6	CARDINAL
brj-23233	67	7	62.4	CARDINAL
brj-23233	67	8	67.1	CARDINAL
brj-23233	67	9	62.6 3,459	CARDINAL
brj-23233	67	10	63.8 2,609	CARDINAL
brj-23233	67	11	9.3 97.0	CARDINAL
brj-23233	68	1	2024	CARDINAL
brj-23233	69	1	3095	CARDINAL
brj-23233	70	1	3098	CARDINAL
brj-23233	70	2	maiyoh coater	PERSON
brj-23233	70	3	pm-9040	ORG
brj-23233	70	4	smt	GPE
brj-23233	70	5	japan	GPE
brj-23233	70	6	two	CARDINAL
brj-23233	71	1	1	CARDINAL
brj-23233	72	1	fig	ORG
brj-23233	73	1	1	CARDINAL
brj-23233	73	2	first	ORDINAL
brj-23233	73	3	approximately 100	CARDINAL
brj-23233	75	1	60 g/m2	QUANTITY
brj-23233	76	1	150 m	QUANTITY
brj-23233	76	2	0.15	CARDINAL
brj-23233	76	3	0.06	CARDINAL
brj-23233	76	4	150 °	QUANTITY
brj-23233	77	1	more than 24 hours	TIME
brj-23233	77	2	50%	PERCENT
brj-23233	77	3	25 °	QUANTITY
brj-23233	78	1	0.9 kn/mm	QUANTITY
brj-23233	78	2	45 °	QUANTITY
brj-23233	80	1	korea	GPE
brj-23233	80	2	prüfbau	GPE
brj-23233	80	3	münchen	GPE
brj-23233	80	4	germany	GPE
brj-23233	81	1	0.7 ml	QUANTITY
brj-23233	81	2	30	CARDINAL
brj-23233	82	1	20 kgf	QUANTITY
brj-23233	82	2	96	CARDINAL
brj-23233	84	1	astra 2400s	ORG
brj-23233	84	2	1200	CARDINAL
brj-23233	84	3	rgb	PRODUCT
brj-23233	86	1	1.0	CARDINAL
brj-23233	86	2	rgb	ORG
brj-23233	87	1	1 × 1 inch	QUANTITY
brj-23233	87	2	rgb	ORG
brj-23233	88	1	8	CARDINAL
brj-23233	90	1	md, usa	GPE
brj-23233	92	1	2024	CARDINAL
brj-23233	93	1	3095	CARDINAL
brj-23233	93	2	3099	CARDINAL
brj-23233	94	1	1	CARDINAL
brj-23233	96	1	2–4))/4	CARDINAL
brj-23233	96	2	1	CARDINAL
brj-23233	96	3	4	CARDINAL
brj-23233	96	4	0.25 mm	QUANTITY
brj-23233	96	5	0.5 mm	QUANTITY
brj-23233	96	6	0.5 mm	QUANTITY
brj-23233	96	7	1.0 mm	QUANTITY
brj-23233	96	8	1.0 mm	QUANTITY
brj-23233	96	9	2 mm	QUANTITY
brj-23233	96	10	2 mm	QUANTITY
brj-23233	96	11	4 mm	QUANTITY
brj-23233	97	1	0.25 mm	QUANTITY
brj-23233	98	1	4 mm	QUANTITY
brj-23233	99	1	pps	ORG
brj-23233	99	2	messmer büchel	PERSON
brj-23233	99	3	gelderland veenendaal	ORG
brj-23233	99	4	netherlands	GPE
brj-23233	99	5	555	CARDINAL
brj-23233	99	6	10 kgf	QUANTITY
brj-23233	99	7	3d	CARDINAL
brj-23233	99	8	nanoscan	NORP
brj-23233	99	9	nanosystem & technology	ORG
brj-23233	99	10	korea	GPE
brj-23233	101	1	3	CARDINAL
brj-23233	102	1	95	CARDINAL
brj-23233	102	2	no.2	ORG
brj-23233	102	3	60	CARDINAL
brj-23233	103	1	0.25 mm	QUANTITY
brj-23233	103	2	4 mm	QUANTITY
brj-23233	104	1	2	CARDINAL
brj-23233	104	2	2	CARDINAL
brj-23233	104	3	3	CARDINAL
brj-23233	105	1	lee 2022	PERSON
brj-23233	107	1	2022	CARDINAL
brj-23233	109	1	between 0.01	CARDINAL
brj-23233	109	2	1.0 μm	MONEY
brj-23233	109	3	1997	DATE
brj-23233	109	4	johnson et al	PERSON
brj-23233	109	5	1999	DATE
brj-23233	112	1	2024	CARDINAL
brj-23233	113	1	3095	CARDINAL
brj-23233	113	2	3100	CARDINAL
brj-23233	113	3	2	CARDINAL
brj-23233	113	4	3	CARDINAL
brj-23233	115	1	fujiwara et al	PERSON
brj-23233	116	1	1989	DATE
brj-23233	118	1	3	CARDINAL
brj-23233	118	2	0.25	CARDINAL
brj-23233	118	3	0.5 mm	QUANTITY
brj-23233	118	4	0.25	CARDINAL
brj-23233	118	5	0.5 mm	QUANTITY
brj-23233	118	6	4 mm	QUANTITY
brj-23233	118	7	0.240 0.158	MONEY
brj-23233	118	8	14.99	MONEY
brj-23233	118	9	0.129 0.098	MONEY
brj-23233	118	10	16.51	CARDINAL
brj-23233	118	11	0.238	CARDINAL
brj-23233	118	12	0.168	MONEY
brj-23233	118	13	0.234	CARDINAL
brj-23233	118	14	15.92	MONEY
brj-23233	118	15	0.261	CARDINAL
brj-23233	118	16	0.261	CARDINAL
brj-23233	119	1	2	CARDINAL
brj-23233	120	1	3	CARDINAL
brj-23233	120	2	90 m/min	QUANTITY
brj-23233	120	3	0.45	CARDINAL
brj-23233	120	4	0.30	CARDINAL
brj-23233	120	5	second	ORDINAL
brj-23233	120	6	2	CARDINAL
brj-23233	121	1	2022	CARDINAL
brj-23233	124	1	2024	CARDINAL
brj-23233	125	1	3095	CARDINAL
brj-23233	125	2	3101	PRODUCT
brj-23233	127	1	4	CARDINAL
brj-23233	130	1	2011	DATE
brj-23233	131	1	fig	PERSON
brj-23233	132	1	4	CARDINAL
brj-23233	133	1	6.0	CARDINAL
brj-23233	133	2	around 18	CARDINAL
brj-23233	134	1	4	CARDINAL
brj-23233	135	1	0.25	CARDINAL
brj-23233	135	2	0.5 mm	QUANTITY
brj-23233	135	3	0.25	CARDINAL
brj-23233	135	4	0.5 mm	QUANTITY
brj-23233	135	5	4 mm	QUANTITY
brj-23233	135	6	1 0.287	CARDINAL
brj-23233	136	1	2	CARDINAL
brj-23233	136	2	0.109 17.8	CARDINAL
brj-23233	136	3	3	CARDINAL
brj-23233	136	4	15.2	MONEY
brj-23233	136	5	4	CARDINAL
brj-23233	136	6	14.9	CARDINAL
brj-23233	136	7	1	CARDINAL
brj-23233	136	8	4.6 g/m2	QUANTITY
brj-23233	136	9	2	CARDINAL
brj-23233	136	10	11.2 g/m2	QUANTITY
brj-23233	136	11	3	CARDINAL
brj-23233	136	12	9.3 g/m2	QUANTITY
brj-23233	136	13	4.2 g/m2	QUANTITY
brj-23233	136	14	4	CARDINAL
brj-23233	136	15	9.3 g/m2	QUANTITY
brj-23233	136	16	9.5 g/m2	QUANTITY
brj-23233	137	1	2024	CARDINAL
brj-23233	138	1	3095	CARDINAL
brj-23233	139	1	9.3 g/m2	QUANTITY
brj-23233	140	1	6.0	CARDINAL
brj-23233	141	1	4	CARDINAL
brj-23233	142	1	5	CARDINAL
brj-23233	143	1	6.0 g/m2	QUANTITY
brj-23233	145	1	6	CARDINAL
brj-23233	147	1	5	CARDINAL
brj-23233	148	1	6	CARDINAL
brj-23233	148	2	parker print-surf	ORG
brj-23233	148	3	pps	ORG
brj-23233	149	1	2024	CARDINAL
brj-23233	150	1	3095-3105	CARDINAL
brj-23233	151	1	7	CARDINAL
brj-23233	151	2	3d	CARDINAL
brj-23233	156	1	7	CARDINAL
brj-23233	156	2	3d	CARDINAL
brj-23233	161	1	2024	CARDINAL
brj-23233	162	1	3095	CARDINAL
brj-23233	163	1	3104 1	DATE
brj-23233	167	1	2	CARDINAL
brj-23233	169	1	3	CARDINAL
brj-23233	172	1	hassanizadeh	GPE
brj-23233	172	2	s. m.	PERSON
brj-23233	172	3	celia	PERSON
brj-23233	172	4	m. a.	PERSON
brj-23233	172	5	2019	DATE
brj-23233	173	1	127	CARDINAL
brj-23233	173	2	143	CARDINAL
brj-23233	174	1	10.1007	CARDINAL
brj-23233	174	2	bandhyopadhyay	GPE
brj-23233	174	3	s.	PERSON
brj-23233	174	4	2015	CARDINAL
brj-23233	175	1	nord	PERSON
brj-23233	177	1	j. 30(3	PERSON
brj-23233	177	2	497	CARDINAL
brj-23233	178	1	10.3183	CARDINAL
brj-23233	178	2	npprj-2015-30	DATE
brj-23233	178	3	510	CARDINAL
brj-23233	178	4	donigian	NORP
brj-23233	178	5	d. w.	PERSON
brj-23233	178	6	ishley	GPE
brj-23233	178	7	j. n.	PERSON
brj-23233	178	8	k. j. (	PERSON
brj-23233	178	9	1997	DATE
brj-23233	179	1	j. 80(5	PERSON
brj-23233	179	2	163	CARDINAL
brj-23233	179	3	zang	PERSON
brj-23233	179	4	y-h.	ORG
brj-23233	179	5	2011	DATE
brj-23233	181	1	eng	GPE
brj-23233	183	1	9781-9786	DATE
brj-23233	184	1	10.1021	CARDINAL
brj-23233	184	2	f.	PERSON
brj-23233	184	3	boisvert	PERSON
brj-23233	184	4	j. p.	PERSON
brj-23233	184	5	2005	DATE
brj-23233	185	1	1992	DATE
brj-23233	186	1	nord	PERSON
brj-23233	188	1	j. 211992	PERSON
brj-23233	188	2	55	CARDINAL
brj-23233	188	3	10.3183/npprj-1992-07-02p055-076	PERCENT
brj-23233	188	4	a.	GPE
brj-23233	188	5	preston	GPE
brj-23233	188	6	j.	PERSON
brj-23233	188	7	r.s.	PERSON
brj-23233	188	8	2017	CARDINAL
brj-23233	189	1	up to 100%	PERCENT
brj-23233	189	2	82-89	DATE
brj-23233	190	1	fujiwara, h.	PERSON
brj-23233	190	2	1991	DATE
brj-23233	191	1	2	CARDINAL
brj-23233	191	2	atlanta	GPE
brj-23233	191	3	ga, usa	ORG
brj-23233	192	1	179-188	CARDINAL
brj-23233	193	1	p. a. c. (	PERSON
brj-23233	193	2	1989	DATE
brj-23233	194	1	technol	PERSON
brj-23233	196	1	30	CARDINAL
brj-23233	196	2	34	CARDINAL
brj-23233	197	1	w.	PERSON
brj-23233	197	2	youn	GPE
brj-23233	197	3	h. j.	PERSON
brj-23233	197	4	lee	PERSON
brj-23233	197	5	h. l.	PERSON
brj-23233	197	6	2022	CARDINAL
brj-23233	198	1	3332	CARDINAL
brj-23233	199	1	10.15376	CARDINAL
brj-23233	199	2	3344	CARDINAL
brj-23233	201	1	1994	DATE
brj-23233	203	1	sci technol	PERSON
brj-23233	204	1	22	CARDINAL
brj-23233	204	2	403	CARDINAL
brj-23233	206	1	2024	CARDINAL
brj-23233	207	1	3095-3105	CARDINAL
brj-23233	208	1	johnson	PERSON
brj-23233	208	2	r.w.	GPE
brj-23233	208	3	abrams, l.	PERSON
brj-23233	208	4	maynard	GPE
brj-23233	208	5	r.b.	GPE
brj-23233	208	6	amick	ORG
brj-23233	208	7	t. j. (	PERSON
brj-23233	208	8	1999	DATE
brj-23233	209	1	1	CARDINAL
brj-23233	209	2	j. 82(1	PERSON
brj-23233	209	3	239	CARDINAL
brj-23233	210	1	kasajová	PERSON
brj-23233	210	2	k.	PERSON
brj-23233	210	3	j. (	PERSON
brj-23233	210	4	2013	DATE
brj-23233	211	1	nord	PERSON
brj-23233	213	1	j. 28(3	PERSON
brj-23233	213	2	443	CARDINAL
brj-23233	214	1	10.3183	CARDINAL
brj-23233	214	2	s. k.	PERSON
brj-23233	214	3	j. m.	PERSON
brj-23233	214	4	lee	PERSON
brj-23233	214	5	y. k.	PERSON
brj-23233	214	6	2016	DATE
brj-23233	215	1	j. korea	PERSON
brj-23233	216	1	48(1	CARDINAL
brj-23233	216	2	27	CARDINAL
brj-23233	217	1	10.7584	CARDINAL
brj-23233	217	2	ktappi.2016.48.1.027 lee	PERSON
brj-23233	217	3	h. l.	PERSON
brj-23233	217	4	youn	GPE
brj-23233	217	5	h. j.	PERSON
brj-23233	217	6	m.	PERSON
brj-23233	217	7	chen	PERSON
brj-23233	217	8	j.	PERSON
brj-23233	217	9	2021	CARDINAL
brj-23233	218	1	16(3	CARDINAL
brj-23233	218	2	6426-6447	DATE
brj-23233	219	1	10.15376	CARDINAL
brj-23233	219	2	biores.16.3	NORP
brj-23233	220	1	lee	PERSON
brj-23233	220	2	h. l.	PERSON
brj-23233	220	3	2008	DATE
brj-23233	221	1	j. korea	PERSON
brj-23233	222	1	40)5	CARDINAL
brj-23233	222	2	60-69	DATE
brj-23233	223	1	lindberg	PERSON
brj-23233	223	2	s.	PERSON
brj-23233	223	3	c. m.	PERSON
brj-23233	223	4	2005	DATE
brj-23233	224	1	j. vis	PERSON
brj-23233	224	2	commun	PERSON
brj-23233	225	1	r. 16	PERSON
brj-23233	225	2	271	CARDINAL
brj-23233	226	1	10.1016/j.jvcir.2004.11.002 nutbeem	QUANTITY
brj-23233	226	2	hallam	PERSON
brj-23233	226	3	2011	DATE
brj-23233	227	1	covington	GPE
brj-23233	227	2	ky, usa	ORG
brj-23233	227	3	17981815	DATE
brj-23233	228	1	rajala	PERSON
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brj-23233	228	4	m. (	PERSON
brj-23233	228	5	2004	DATE
brj-23233	229	1	2527-2536	CARDINAL
brj-23233	230	1	10.1016	CARDINAL
brj-23233	230	2	resch	ORG
brj-23233	230	3	bauer	PERSON
brj-23233	230	4	w.	PERSON
brj-23233	230	5	2010	DATE
brj-23233	231	1	j. 9(1	PERSON
brj-23233	231	2	27	CARDINAL
brj-23233	232	1	saini	PERSON
brj-23233	232	2	a.	GPE
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brj-23233	232	4	jain, a.	ORG
brj-23233	232	5	2016	DATE
brj-23233	235	1	j. eng	PERSON
brj-23233	238	1	3(5	CARDINAL
brj-23233	238	2	1825-1832	DATE
brj-23233	239	1	yamazaki	PERSON
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brj-23233	239	3	t., hattori	ORG
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brj-23233	239	6	1993	DATE
brj-23233	240	1	j. 76(5	ORG
brj-23233	240	2	79	CARDINAL
brj-23233	241	1	youn	ORG
brj-23233	241	2	h. j.	PERSON
brj-23233	241	3	lee	PERSON
brj-23233	241	4	h. l.	PERSON
brj-23233	241	5	2022	CARDINAL
brj-23233	242	1	j. coat	PERSON
brj-23233	243	1	technol	PERSON
brj-23233	246	1	931-938	PRODUCT
brj-23233	247	1	10.1007	CARDINAL
brj-23233	247	2	021-00569-8	CARDINAL
brj-23233	247	3	555	CARDINAL
brj-23233	248	1	2022	CARDINAL
brj-23233	248	2	atlanta	GPE
brj-23233	248	3	ga	ORG
brj-23233	248	4	december 26	DATE
brj-23233	248	5	2023	CARDINAL
brj-23233	248	6	march 15, 2024	DATE
brj-23233	248	7	march 21, 2024	DATE
brj-23233	248	8	march 22,	DATE
brj-23233	248	9	2024	DATE
brj-23233	248	10	march 28, 2024	DATE
brj-23233	249	1	10.15376	CARDINAL