id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
can-1069	Pliusnin, Nikolay	Subnanophase coatings as new type low-dimensional nanomaterials: Ultra-high-vacuum synthesis, properties and application	2020	6	.pdf	application/pdf	3585	205	54	Creating subnanophase coatings in vacuum For the synthesis of SNP coatings in vacu- um, both new methods of obtaining atomic va- por beams with low thermal energy of vapor are needed. It is assumed that SNP coatings will be used in areas of the nano industry where the use of massive (with a thickness of more than 1 nanometer) and high-stable coatings is not required.	cache/can-1069.pdf	txt/can-1069.txt