id	sid	eid	entity	type
can-1069	1	1	2020	DATE
can-1069	1	2	3	CARDINAL
can-1069	1	3	2 doi:10.24294	MONEY
can-1069	2	1	81	CARDINAL
can-1069	2	2	nikolay plusnin institute of automation	ORG
can-1069	2	3	russian academy of sciences	ORG
can-1069	2	4	vladivostok	GPE
can-1069	2	5	russia	GPE
can-1069	6	1	24	CARDINAL
can-1069	6	2	june 2020	DATE
can-1069	6	3	18 july 2020	DATE
can-1069	6	4	23	CARDINAL
can-1069	6	5	july 2020	DATE
can-1069	6	6	3 august 2020	DATE
can-1069	6	7	2020	DATE
can-1069	7	1	10.24294	CARDINAL
can-1069	7	2	llc	ORG
can-1069	8	1	4.0	CARDINAL
can-1069	11	1	―nanogard‖	ORG
can-1069	11	2	―nanotech‖	ORG
can-1069	11	3	1	CARDINAL
can-1069	12	1	2 to 50	CARDINAL
can-1069	13	1	4-30	CARDINAL
can-1069	16	1	today	DATE
can-1069	17	1	1	CARDINAL
can-1069	18	1	2	CARDINAL
can-1069	19	1	3	CARDINAL
can-1069	20	1	4	CARDINAL
can-1069	20	2	two	CARDINAL
can-1069	20	3	82	CARDINAL
can-1069	21	1	5	CARDINAL
can-1069	21	2	two	CARDINAL
can-1069	22	1	6	CARDINAL
can-1069	22	2	two	CARDINAL
can-1069	24	1	snp	ORG
can-1069	26	1	more than 1	CARDINAL
can-1069	31	1	2	CARDINAL
can-1069	32	1	3	CARDINAL
can-1069	37	1	first	ORDINAL
can-1069	39	1	nanomedicine	PERSON
can-1069	40	1	4	CARDINAL
can-1069	48	1	83 2	CARDINAL
can-1069	50	1	1	CARDINAL
can-1069	51	1	2	CARDINAL
can-1069	52	1	3	CARDINAL
can-1069	54	1	5	CARDINAL
can-1069	56	1	6	CARDINAL
can-1069	58	1	6,7	CARDINAL
can-1069	59	1	8	CARDINAL
can-1069	60	1	7,9,10	CARDINAL
can-1069	61	1	first	ORDINAL
can-1069	62	1	first	ORDINAL
can-1069	62	2	11,12	CARDINAL
can-1069	62	3	two	CARDINAL
can-1069	63	1	13,14	CARDINAL
can-1069	64	1	first	ORDINAL
can-1069	64	2	second	ORDINAL
can-1069	64	3	two	CARDINAL
can-1069	69	1	ν	NORP
can-1069	71	1	one	CARDINAL
can-1069	75	1	84	CARDINAL
can-1069	76	1	ν	NORP
can-1069	78	1	ν	NORP
can-1069	79	1	ν	NORP
can-1069	82	1	ν	NORP
can-1069	83	1	3	CARDINAL
can-1069	83	2	al snp	PERSON
can-1069	83	3	aes	ORG
can-1069	83	4	leed	ORG
can-1069	83	5	afm	PERSON
can-1069	85	1	ν	NORP
can-1069	87	1	1	CARDINAL
can-1069	87	2	2	CARDINAL
can-1069	87	3	fe	GPE
can-1069	87	4	111	CARDINAL
can-1069	88	1	1a	CARDINAL
can-1069	88	2	1b	CARDINAL
can-1069	89	1	1c	CARDINAL
can-1069	89	2	fe	ORG
can-1069	89	3	1b	CARDINAL
can-1069	90	1	1	CARDINAL
can-1069	91	1	eels fe on si	ORG
can-1069	92	1	1	CARDINAL
can-1069	92	2	2	CARDINAL
can-1069	92	3	3	CARDINAL
can-1069	95	1	eb	ORG
can-1069	96	1	1a	CARDINAL
can-1069	96	2	1b	CARDINAL
can-1069	98	1	2	CARDINAL
can-1069	101	1	85	CARDINAL
can-1069	101	2	1b	CARDINAL
can-1069	101	3	1c	CARDINAL
can-1069	103	1	1b	CARDINAL
can-1069	104	1	2	CARDINAL
can-1069	105	1	111	CARDINAL
can-1069	106	1	aes	ORG
can-1069	106	2	afm	PERSON
can-1069	107	1	1c	CARDINAL
can-1069	107	2	aes	ORG
can-1069	108	1	14	CARDINAL
can-1069	109	1	afm	PERSON
can-1069	109	2	1	CARDINAL
can-1069	110	1	16	CARDINAL
can-1069	111	1	cr wl	PERSON
can-1069	115	1	4	CARDINAL
can-1069	118	1	16	CARDINAL
can-1069	122	1	snp	ORG
can-1069	122	2	nanospintronics	ORG
can-1069	123	1	snp	ORG
can-1069	124	1	86 5	DATE
can-1069	128	1	1	CARDINAL
can-1069	128	2	hill aj	PERSON
can-1069	130	1	cambridge	GPE
can-1069	130	2	woodhead	PERSON
can-1069	130	3	2006	DATE
can-1069	131	1	368	CARDINAL
can-1069	132	1	2	CARDINAL
can-1069	132	2	voorhoeve rjh.	PERSON
can-1069	135	1	new york	GPE
can-1069	135	2	london	GPE
can-1069	135	3	1976	DATE
can-1069	136	1	241–342	CARDINAL
can-1069	137	1	sexton ba	PERSON
can-1069	138	1	smart rstc	PERSON
can-1069	140	1	new york	GPE
can-1069	140	2	berlin	GPE
can-1069	140	3	springer verlag	PERSON
can-1069	140	4	1992	DATE
can-1069	141	1	480	CARDINAL
can-1069	142	1	4	CARDINAL
can-1069	142	2	oura k	PERSON
can-1069	143	1	berlin	GPE
can-1069	143	2	springer verlag	PERSON
can-1069	143	3	2003	DATE
can-1069	144	1	440	CARDINAL
can-1069	145	1	5	CARDINAL
can-1069	147	1	london	GPE
can-1069	147	2	2012	DATE
can-1069	148	1	744	CARDINAL
can-1069	148	2	6	CARDINAL
can-1069	148	3	krylov sv.	PERSON
can-1069	149	1	2007	DATE
can-1069	149	2	33	CARDINAL
can-1069	149	3	486–489	CARDINAL
can-1069	150	1	7	CARDINAL
can-1069	152	1	2	CARDINAL
can-1069	153	1	new york	GPE
can-1069	153	2	nova science publishers inc	ORG
can-1069	153	3	2015	DATE
can-1069	154	1	87–102	CARDINAL
can-1069	155	1	8	CARDINAL
can-1069	157	1	2012	DATE
can-1069	157	2	38	CARDINAL
can-1069	157	3	324–327	CARDINAL
can-1069	158	1	9	CARDINAL
can-1069	158	2	aes	ORG
can-1069	159	1	electron spectroscopy &	ORG
can-1069	159	2	2004	DATE
can-1069	159	3	137	CARDINAL
can-1069	159	4	161–164	CARDINAL
can-1069	160	1	10	CARDINAL
can-1069	161	1	aes	ORG
can-1069	161	2	two	CARDINAL
can-1069	162	1	2017	CARDINAL
can-1069	162	2	3	CARDINAL
can-1069	162	3	131–141	CARDINAL
can-1069	162	4	11	CARDINAL
can-1069	164	1	russian academy of	ORG
can-1069	164	2	2016	DATE
can-1069	164	3	4(188	CARDINAL
can-1069	164	4	27–35	CARDINAL
can-1069	166	1	12	CARDINAL
can-1069	166	2	galkin ng	PERSON
can-1069	168	1	1995	DATE
can-1069	168	2	2	CARDINAL
can-1069	168	3	439	CARDINAL
can-1069	168	4	449	CARDINAL
can-1069	168	5	13	CARDINAL
can-1069	169	1	il’iashchenko	GPE
can-1069	169	2	kitan	PERSON
can-1069	171	1	journal of physics conference	ORG
can-1069	171	2	2008	DATE
can-1069	171	3	100	CARDINAL
can-1069	171	4	052094	DATE
can-1069	172	1	14	CARDINAL
can-1069	172	2	kitan	PERSON
can-1069	174	1	2009	DATE
can-1069	174	2	3(5	CARDINAL
can-1069	174	3	734–746	CARDINAL
can-1069	175	1	15	CARDINAL
can-1069	176	1	aes	ORG
can-1069	177	1	2016	CARDINAL
can-1069	177	2	6	CARDINAL
can-1069	177	3	195–210	CARDINAL
can-1069	178	1	16	CARDINAL
can-1069	180	1	2017	CARDINAL
can-1069	180	2	3(2	CARDINAL
can-1069	180	3	57–65	CARDINAL