id	sid	eid	entity	type
can-1680	1	1	2022	CARDINAL
can-1680	1	2	5	CARDINAL
can-1680	1	3	1 doi:10.24294	QUANTITY
can-1680	1	4	59	CARDINAL
can-1680	1	5	adriana lira	PERSON
can-1680	2	1	alicia oliver2 1	PERSON
can-1680	2	2	universidad nacional autónoma de méxico	ORG
can-1680	2	3	mexico	GPE
can-1680	3	1	2	CARDINAL
can-1680	3	2	universidad nacional autónoma de méxico	ORG
can-1680	3	3	mexico	GPE
can-1680	3	4	the past three decades	DATE
can-1680	9	1	7	CARDINAL
can-1680	9	2	26	CARDINAL
can-1680	9	3	february 2022	DATE
can-1680	9	4	9	CARDINAL
can-1680	9	5	2022	CARDINAL
can-1680	9	6	adriana lira oliver	PERSON
can-1680	9	7	llc	ORG
can-1680	10	1	4.0	CARDINAL
can-1680	11	1	4.0/ 1	CARDINAL
can-1680	12	1	the past decade	DATE
can-1680	14	1	two	CARDINAL
can-1680	14	2	1	CARDINAL
can-1680	14	3	2	CARDINAL
can-1680	16	1	the end of the second world war	DATE
can-1680	18	1	the 1980s	DATE
can-1680	19	1	daily	DATE
can-1680	24	1	60	CARDINAL
can-1680	24	2	two	CARDINAL
can-1680	25	1	first	ORDINAL
can-1680	26	1	2	CARDINAL
can-1680	27	1	1	CARDINAL
can-1680	27	2	10−9 meters	QUANTITY
can-1680	27	3	1000	CARDINAL
can-1680	27	4	1 micron	QUANTITY
can-1680	28	1	between 5 and 50 microns	CARDINAL
can-1680	28	2	tens of thousands	CARDINAL
can-1680	30	1	a few years ago	DATE
can-1680	37	1	3	CARDINAL
can-1680	38	1	the california institute of technology	ORG
can-1680	38	2	2000[3	CARDINAL
can-1680	44	1	100	CARDINAL
can-1680	45	1	optics[5	ORG
can-1680	47	1	100	CARDINAL
can-1680	48	1	4.	CARDINAL
can-1680	52	1	between 380	CARDINAL
can-1680	54	1	100	CARDINAL
can-1680	55	1	5	CARDINAL
can-1680	56	1	100	CARDINAL
can-1680	57	1	61	CARDINAL
can-1680	60	1	about 10	CARDINAL
can-1680	60	2	380	CARDINAL
can-1680	65	1	between 4 nm and 20	CARDINAL
can-1680	65	2	520	CARDINAL
can-1680	67	1	about 90	CARDINAL
can-1680	69	1	1	CARDINAL
can-1680	71	1	1	CARDINAL
can-1680	72	1	josé i. garcía	PERSON
can-1680	72	2	laureiro	GPE
can-1680	73	1	the university of zaragoza	ORG
can-1680	73	2	spain	GPE
can-1680	74	1	6	CARDINAL
can-1680	77	1	as early as 1875	DATE
can-1680	77	2	michael faraday	PERSON
can-1680	78	1	first	ORDINAL
can-1680	79	1	one	CARDINAL
can-1680	80	1	one	CARDINAL
can-1680	82	1	2	CARDINAL
can-1680	82	2	two	CARDINAL
can-1680	83	1	the unama institute of physics	ORG
can-1680	84	1	the 19th century	DATE
can-1680	88	1	the 20th century	DATE
can-1680	90	1	3	CARDINAL
can-1680	93	1	2	CARDINAL
can-1680	93	2	10	CARDINAL
can-1680	97	1	62	CARDINAL
can-1680	97	2	3	CARDINAL
can-1680	103	1	egypt	GPE
can-1680	104	1	egypt	GPE
can-1680	105	1	phoenicians	NORP
can-1680	106	1	germany	GPE
can-1680	107	1	4	CARDINAL
can-1680	108	1	rome cup	EVENT
can-1680	108	2	british museum	ORG
can-1680	111	1	john	PERSON
can-1680	111	2	mary ranran	PERSON
can-1680	113	1	rome	GPE
can-1680	114	1	the 4th century	DATE
can-1680	115	1	4(a	CARDINAL
can-1680	115	2	4(b	CARDINAL
can-1680	116	1	1990	DATE
can-1680	118	1	50	CARDINAL
can-1680	121	1	france	GPE
can-1680	121	2	the 12th century	DATE
can-1680	122	1	first	ORDINAL
can-1680	122	2	france	GPE
can-1680	126	1	today	DATE
can-1680	127	1	central paris	LOC
can-1680	128	1	the early 13th century	DATE
can-1680	128	2	5	CARDINAL
can-1680	129	1	5	CARDINAL
can-1680	129	2	holy church	ORG
can-1680	129	3	paris	GPE
can-1680	130	1	b. didier	PERSON
can-1680	131	1	63	CARDINAL
can-1680	134	1	today	DATE
can-1680	134	2	6	CARDINAL
can-1680	135	1	6	CARDINAL
can-1680	137	1	jan van der crabben	ORG
can-1680	138	1	7	CARDINAL
can-1680	138	2	nanodisk	ORG
can-1680	138	3	nanodisk	ORG
can-1680	138	4	one	CARDINAL
can-1680	138	5	one	CARDINAL
can-1680	140	1	8	CARDINAL
can-1680	143	1	64	CARDINAL
can-1680	144	1	2014	DATE
can-1680	144	2	singapore	GPE
can-1680	146	1	four	CARDINAL
can-1680	147	1	nanodisk	FAC
can-1680	149	1	20	CARDINAL
can-1680	150	1	800	CARDINAL
can-1680	154	1	7(b	CARDINAL
can-1680	154	2	40 to 330	CARDINAL
can-1680	154	3	10	CARDINAL
can-1680	154	4	400	CARDINAL
can-1680	155	1	di	ORG
can-1680	155	2	two	CARDINAL
can-1680	155	3	one	CARDINAL
can-1680	155	4	two	CARDINAL
can-1680	156	1	80 to 220	CARDINAL
can-1680	156	2	10	CARDINAL
can-1680	157	1	400	CARDINAL
can-1680	157	2	800	CARDINAL
can-1680	158	1	80 to 220	CARDINAL
can-1680	158	2	+ 50 to 400	DATE
can-1680	158	3	10 and 20	CARDINAL
can-1680	158	4	four	CARDINAL
can-1680	158	5	800	CARDINAL
can-1680	159	1	8	CARDINAL
can-1680	160	1	monet	PERSON
can-1680	162	1	65	CARDINAL
can-1680	163	1	monet	PERSON
can-1680	164	1	8(a	CARDINAL
can-1680	165	1	8(b	CARDINAL
can-1680	166	1	nanodisk	ORG
can-1680	167	1	micron	CARDINAL
can-1680	168	1	8(e	CARDINAL
can-1680	171	1	9	CARDINAL
can-1680	175	1	1	CARDINAL
can-1680	175	2	heydari e	PERSON
can-1680	175	3	thompson d. engineering	PERSON
can-1680	176	1	spie 2016;	ORG
can-1680	176	2	9721	DATE
can-1680	176	3	972105	DATE
can-1680	177	1	2	CARDINAL
can-1680	177	2	kim hs	PERSON
can-1680	177	3	lee bh	PERSON
can-1680	178	1	nanophotonics 2016	ORG
can-1680	178	2	10	CARDINAL
can-1680	178	3	026012	CARDINAL
can-1680	179	1	3	CARDINAL
can-1680	179	2	atwater	PERSON
can-1680	181	1	american	NORP
can-1680	181	2	2007	DATE
can-1680	181	3	296	CARDINAL
can-1680	181	4	56–63	CARDINAL
can-1680	181	5	4	CARDINAL
can-1680	181	6	kelly kl	PERSON
can-1680	181	7	ronaldo e	PERSON
can-1680	181	8	zhao	PERSON
can-1680	183	1	2003	DATE
can-1680	183	2	107	CARDINAL
can-1680	183	3	668–677	CARDINAL
can-1680	184	1	5	CARDINAL
can-1680	184	2	reyes	ORG
can-1680	184	3	ja, cheang-wong jc	FAC
can-1680	185	1	third	ORDINAL
can-1680	186	1	2008	DATE
can-1680	186	2	104	CARDINAL
can-1680	186	3	014306	CARDINAL
can-1680	187	1	6	CARDINAL
can-1680	187	2	gramotnev dk	PERSON
can-1680	187	3	bozhevolnyi si.	PERSON
can-1680	188	1	2010	DATE
can-1680	188	2	4	CARDINAL
can-1680	188	3	83	CARDINAL
can-1680	188	4	91	CARDINAL
can-1680	188	5	7	CARDINAL
can-1680	188	6	barsan mm	PERSON
can-1680	188	7	bret cma	PERSON
can-1680	190	1	2016	CARDINAL
can-1680	190	2	79	CARDINAL
can-1680	190	3	286–296	CARDINAL
can-1680	191	1	8	CARDINAL
can-1680	192	1	langhammer c	ORG
can-1680	193	1	2006	DATE
can-1680	193	2	6	CARDINAL
can-1680	193	3	833–838	CARDINAL
can-1680	195	1	oliver	PERSON
can-1680	195	2	chenag-wong jc	ORG
can-1680	196	1	2002	DATE
can-1680	196	2	191	CARDINAL
can-1680	196	3	333–336	CARDINAL
can-1680	197	1	10	CARDINAL
can-1680	197	2	bornacelli j	PERSON
can-1680	197	3	silva pereyra	PERSON
can-1680	199	1	2016	CARDINAL
can-1680	199	2	179	CARDINAL
can-1680	200	1	11	CARDINAL
can-1680	201	1	tan s	PERSON
can-1680	201	2	zhang l, zhu	PERSON
can-1680	202	1	2014	DATE
can-1680	202	2	14	CARDINAL
can-1680	202	3	4023–4029	CARDINAL
can-1680	203	1	http://apps.webofknowledge.com.pbidi.unam.mx:8080/full_record.do?product=wos&search_mode=generalsearch&qid=1&sid=3aubswdqqdbgzcsiuck&page=2&doc=15	GPE