id	sid	eid	entity	type
can-495	1	1	2018	DATE
can-495	1	2	1 doi:10.24294	MONEY
can-495	1	3	1	CARDINAL
can-495	2	1	1	CARDINAL
can-495	2	2	voronezh state technical university	ORG
can-495	2	3	14	DATE
can-495	2	4	moskovsky avenue	PERSON
can-495	2	5	voronezh	GPE
can-495	2	6	394026	DATE
can-495	2	7	russia e-mail	GPE
can-495	5	1	two	CARDINAL
can-495	7	1	two	CARDINAL
can-495	7	2	1	CARDINAL
can-495	8	1	1	CARDINAL
can-495	8	2	2	CARDINAL
can-495	13	1	two	CARDINAL
can-495	14	1	2	CARDINAL
can-495	16	1	2018	DATE
can-495	16	2	10.24294	CARDINAL
can-495	16	3	4.0	CARDINAL
can-495	17	1	2	CARDINAL
can-495	19	1	two	CARDINAL
can-495	20	1	3	CARDINAL
can-495	21	1	4 to 12 microns	QUANTITY
can-495	23	1	1	CARDINAL
can-495	25	1	40xh2ma	CARDINAL
can-495	26	1	1	CARDINAL
can-495	26	2	45	CARDINAL
can-495	27	1	5 mm	QUANTITY
can-495	27	2	25 30%	PERCENT
can-495	27	3	15%	PERCENT
can-495	27	4	about 10	CARDINAL
can-495	27	5	75	CARDINAL
can-495	27	6	50 mm	QUANTITY
can-495	27	7	40 seconds	TIME
can-495	28	1	1	CARDINAL
can-495	29	1	43.5	CARDINAL
can-495	29	2	35.5	CARDINAL
can-495	31	1	1	CARDINAL
can-495	31	2	2	CARDINAL
can-495	31	3	un	ORG
can-495	31	4	22,5%	PERCENT
can-495	31	5	hn of 10 microns	PRODUCT
can-495	34	1	1	CARDINAL
can-495	34	2	38h2mya	CARDINAL
can-495	35	1	45	DATE
can-495	35	2	5 mm	QUANTITY
can-495	35	3	25 30%	PERCENT
can-495	35	4	5	CARDINAL
can-495	35	5	50	CARDINAL
can-495	35	6	50 mm	QUANTITY
can-495	35	7	40 seconds	TIME
can-495	36	1	mikroshlify	PERSON
can-495	36	2	≈ 4,5 microns	QUANTITY
can-495	36	3	un	ORG
can-495	36	4	13,5%	PERCENT
can-495	39	1	34.5	CARDINAL
can-495	39	2	39.5	CARDINAL
can-495	40	1	3	CARDINAL
can-495	40	2	1	CARDINAL
can-495	40	3	40xh2ma	CARDINAL
can-495	40	4	200	CARDINAL
can-495	40	5	40xh2ma	CARDINAL
can-495	40	6	200	CARDINAL
can-495	40	7	200	CARDINAL
can-495	40	8	320	CARDINAL
can-495	41	1	38h2myua	CARDINAL
can-495	42	1	2	CARDINAL
can-495	42	2	40xh2ma	CARDINAL
can-495	42	3	40 to 70 mm	QUANTITY
can-495	43	1	3	CARDINAL
can-495	47	1	2	CARDINAL
can-495	48	1	38h2myaafter	PRODUCT
can-495	48	2	35	CARDINAL
can-495	48	3	40 mm	QUANTITY
can-495	48	4	70	CARDINAL
can-495	48	5	75 mm	QUANTITY
can-495	48	6	300	CARDINAL
can-495	48	7	3	CARDINAL
can-495	48	8	mep	ORG
can-495	48	9	40 42 mm	QUANTITY
can-495	48	10	mep	ORG
can-495	48	11	70 71 mm	QUANTITY
can-495	48	12	300	CARDINAL
can-495	48	13	4	CARDINAL
can-495	48	14	4	CARDINAL
can-495	48	15	1.	CARDINAL
can-495	49	1	2	CARDINAL
can-495	50	1	3	CARDINAL
can-495	50	2	mechanician	NORP
can-495	51	1	4.	CARDINAL
can-495	52	1	1	CARDINAL
can-495	53	1	russia	GPE
can-495	53	2	2166417	DATE
can-495	55	1	kuzovkin av	PERSON
can-495	55	2	2001	DATE
can-495	55	3	13	CARDINAL
can-495	56	1	2	CARDINAL
can-495	56	2	russia	GPE
can-495	56	3	2072281	DATE
can-495	58	1	av//byul.izobr.	GPE
can-495	58	2	1997	DATE
can-495	59	1	3	CARDINAL