id	sid	eid	entity	type
can-529	1	1	2018	DATE
can-529	1	2	1 doi:10.24294	MONEY
can-529	1	3	1	CARDINAL
can-529	1	4	sergey v. bulyarskiy1	PERSON
can-529	1	5	ivan e. abanin2	PERSON
can-529	1	6	alexander v. lakalin1	PERSON
can-529	1	7	1	CARDINAL
can-529	1	8	the russian academy of sciences	ORG
can-529	1	9	moscow	GPE
can-529	1	10	russia	GPE
can-529	1	11	2	CARDINAL
can-529	1	12	moscow	GPE
can-529	1	13	russia	GPE
can-529	3	1	ni-63	PRODUCT
can-529	7	1	secondary	ORDINAL
can-529	8	1	1	CARDINAL
can-529	10	1	ni-63	CARDINAL
can-529	11	1	3105 to 2107	CARDINAL
can-529	13	1	more than 30 years	DATE
can-529	13	2	ni-63	PRODUCT
can-529	14	1	about 1%	PERCENT
can-529	15	1	contact[4-6	PERSON
can-529	16	1	ni-63	PRODUCT
can-529	16	2	half	CARDINAL
can-529	16	3	100 years	DATE
can-529	17	1	17.6	CARDINAL
can-529	19	1	1%	PERCENT
can-529	21	1	half	CARDINAL
can-529	25	1	firstly	ORDINAL
can-529	26	1	secondly	ORDINAL
can-529	28	1	2018	DATE
can-529	28	2	sergey v. bulyarskiy et al	PERSON
can-529	28	3	10.24294	CARDINAL
can-529	28	4	4.0	CARDINAL
can-529	29	1	2 2	DATE
can-529	30	1	two	CARDINAL
can-529	31	1	first	ORDINAL
can-529	31	2	one	CARDINAL
can-529	32	1	second	ORDINAL
can-529	32	2	20%	PERCENT
can-529	32	3	ni-63	PRODUCT
can-529	37	1	1	CARDINAL
can-529	38	1	half	CARDINAL
can-529	38	2	5.0	CARDINAL
can-529	38	3	t , years	DATE
can-529	38	4	kev density	PERSON
can-529	38	5	1 ci	QUANTITY
can-529	38	6	mci	ORG
can-529	38	7	tit2	LOC
can-529	39	1	12.5	CARDINAL
can-529	39	2	6 1.2-2.2	QUANTITY
can-529	39	3	100	CARDINAL
can-529	39	4	1	CARDINAL
can-529	40	1	0.6 cm2	QUANTITY
can-529	41	1	100	CARDINAL
can-529	41	2	111	CARDINAL
can-529	42	1	1000	CARDINAL
can-529	43	1	more than 5102	CARDINAL
can-529	43	2	less than 1102	CARDINAL
can-529	46	1	two	CARDINAL
can-529	49	1	700 to 1000°	QUANTITY
can-529	50	1	295 k	QUANTITY
can-529	50	2	40	CARDINAL
can-529	50	3	0.1-0.2 na	QUANTITY
can-529	52	1	3	CARDINAL
can-529	55	1	1	CARDINAL
can-529	56	1	2	CARDINAL
can-529	56	2	3	CARDINAL
can-529	56	3	1	CARDINAL
can-529	56	4	mci	ORG
can-529	56	5	1	CARDINAL
can-529	56	6	ni-63	CARDINAL
can-529	56	7	2	CARDINAL
can-529	57	1	mci	ORG
can-529	57	2	nw ics	ORG
can-529	57	3	na uxx	ORG
can-529	57	4	1.2 43	CARDINAL
can-529	57	5	0.65	CARDINAL
can-529	57	6	535	CARDINAL
can-529	57	7	1070 57	DATE
can-529	57	8	4.3	CARDINAL
can-529	57	9	1170	CARDINAL
can-529	57	10	4.94	CARDINAL
can-529	57	11	2350 64	DATE
can-529	57	12	5.1 0.22	CARDINAL
can-529	57	13	5.8 0.21	CARDINAL
can-529	57	14	2	CARDINAL
can-529	59	1	η	ORG
can-529	60	1	1	CARDINAL
can-529	60	2	1 ci	QUANTITY
can-529	61	1	2	CARDINAL
can-529	62	1	9	CARDINAL
can-529	62	2	2	CARDINAL
can-529	64	1	2	CARDINAL
can-529	64	2	2	CARDINAL
can-529	66	1	4	CARDINAL
can-529	66	2	2	CARDINAL
can-529	66	3	ni-63	CARDINAL
can-529	66	4	1	CARDINAL
can-529	66	5	2	CARDINAL
can-529	67	1	2	CARDINAL
can-529	68	1	2	CARDINAL
can-529	69	1	9	CARDINAL
can-529	69	2	xxsc	PERSON
can-529	69	3	ui uif maxmax	PERSON
can-529	69	4	0.62	CARDINAL
can-529	69	5	0.66	CARDINAL
can-529	71	1	120	CARDINAL
can-529	71	2	ni-63	PRODUCT
can-529	71	3	67	CARDINAL
can-529	72	1	5.8 nw	QUANTITY
can-529	72	2	2	CARDINAL
can-529	74	1	1.5	CARDINAL
can-529	75	1	ni-63	PRODUCT
can-529	76	1	ni-63	CARDINAL
can-529	77	1	ni-63	PRODUCT
can-529	77	2	3	CARDINAL
can-529	78	1	ni-63	PRODUCT
can-529	79	1	ni-63	PRODUCT
can-529	80	1	eav	ORG
can-529	80	2	17.6	CARDINAL
can-529	80	3	5 kev	QUANTITY
can-529	83	1	2	CARDINAL
can-529	83	2	ni-63	ORG
can-529	84	1	4	CARDINAL
can-529	84	2	4.1	CARDINAL
can-529	84	3	four	CARDINAL
can-529	84	4	1,9	CARDINAL
can-529	84	5	5	CARDINAL
can-529	84	6	 	PERSON
can-529	84	7	5	CARDINAL
can-529	84	8	s	ORG
can-529	85	1	4.2	CARDINAL
can-529	85	2	first	ORDINAL
can-529	86	1	5	CARDINAL
can-529	93	1	tnn  exp0	PERSON
can-529	93	2	6	CARDINAL
can-529	93	3	n0	GPE
can-529	94	1	half	CARDINAL
can-529	94	2	5.0т	CARDINAL
can-529	94	3	half	CARDINAL
can-529	98	1	5.00	CARDINAL
can-529	98	2	tndtdnа 	ORG
can-529	98	3	7	CARDINAL
can-529	100	1	1 cm3	QUANTITY
can-529	102	1		ORDINAL
can-529	102	2		CARDINAL
can-529	103	1	tens	CARDINAL
can-529	106	1	10	CARDINAL
can-529	106	2	32 23.504.1221.660.0	TIME
can-529	106	3	9	CARDINAL
can-529	106	4	11	CARDINAL
can-529	106	5	10	CARDINAL
can-529	106	6	10	CARDINAL
can-529	111	1	6	CARDINAL
can-529	112	1	12	CARDINAL
can-529	114	1	1	CARDINAL
can-529	114	2	max	PERSON
can-529	114	3		GPE
can-529	114	4	11	CARDINAL
can-529	114	5	3	CARDINAL
can-529	114	6	ni-63	PRODUCT
can-529	115	1	3	CARDINAL
can-529	115	2	ni-63	PRODUCT
can-529	116	1	11	CARDINAL
can-529	118	1	12	CARDINAL
can-529	118	2	half	CARDINAL
can-529	118	3	two	CARDINAL
can-529	120	1	max 0	PERSON
can-529	120	2	e ccs deerzheww .	ORG
can-529	121	1	13	CARDINAL
can-529	121	2		ORG
can-529	122	1	max	PERSON
can-529	123	1	14	CARDINAL
can-529	126	1	9	CARDINAL
can-529	126	2		ORG
can-529	127	1	/	ORG
can-529	127	2	15	CARDINAL
can-529	128	1	4	CARDINAL
can-529	128	2	ni-63	ORG
can-529	128	3	c-14	NORP
can-529	129	1	4	CARDINAL
can-529	133	1	15	CARDINAL
can-529	134	1	3	CARDINAL
can-529	134	2	7	CARDINAL
can-529	134	3	4	CARDINAL
can-529	134	4	isotopes ni-63	PRODUCT
can-529	135	1	ni-63	PRODUCT
can-529	135	2	0.35 1.5	QUANTITY
can-529	135	3	18 24	DATE
can-529	135	4	0.61 2.7	CARDINAL
can-529	135	5	70 75	DATE
can-529	135	6	3	CARDINAL
can-529	136	1	ni-63	PRODUCT
can-529	136	2	1.5	CARDINAL
can-529	139	1	13	CARDINAL
can-529	139	2	16	CARDINAL
can-529	140	1	30	CARDINAL
can-529	140	2	kev	PERSON
can-529	142	1	ni-63	ORG
can-529	142	2	17.6 kev	QUANTITY
can-529	143	1	16	CARDINAL
can-529	144	1	5	CARDINAL
can-529	144	2	0.22	CARDINAL
can-529	144	3	17.6 kev	QUANTITY
can-529	144	4	0.2	LANGUAGE
can-529	145	1	10%	PERCENT
can-529	145	2	0.2	CARDINAL
can-529	146	1	1сr	ORDINAL
can-529	146	2	0.8	CARDINAL
can-529	149	1	15	CARDINAL
can-529	151	1	5	CARDINAL
can-529	151	2	36253	CARDINAL
can-529	151	3	8	CARDINAL
can-529	151	4	5	CARDINAL
can-529	153	1	17	CARDINAL
can-529	153	2	0 to 90°	QUANTITY
can-529	154	1	0.31	CARDINAL
can-529	155	1	69%	PERCENT
can-529	156	1	4.4	CARDINAL
can-529	157	1	two	CARDINAL
can-529	162	1	elasticlу	PERSON
can-529	165	1	16,17	CARDINAL
can-529	165	2	zel inel	PERSON
can-529	166	1	70%	PERCENT
can-529	167	1	1	CARDINAL
can-529	169	1	2	CARDINAL
can-529	169	2	quanta	GPE
can-529	170	1	3	CARDINAL
can-529	171	1	2	CARDINAL
can-529	171	2	150 kev	QUANTITY
can-529	173	1	3	CARDINAL
can-529	175	1	1	CARDINAL
can-529	176	1	2	CARDINAL
can-529	177	1	9	CARDINAL
can-529	180	1	18	CARDINAL
can-529	180	2	up to	CARDINAL
can-529	180	3	70%	PERCENT
can-529	180	4	30%	PERCENT
can-529	181	1	4	CARDINAL
can-529	182	1	19	CARDINAL
can-529	183	1	0.2%	PERCENT
can-529	184	1	20-22	CARDINAL
can-529	184	2	less than 10%	PERCENT
can-529	185	1	leamy h.j	PERSON
can-529	186	1	23	CARDINAL
can-529	186	2	8%	PERCENT
can-529	187	1	60-80%	PERCENT
can-529	188	1	4.5	CARDINAL
can-529	190	1	9	CARDINAL
can-529	190	2	1	CARDINAL
can-529	191	1	2	CARDINAL
can-529	193	1	3	CARDINAL
can-529	194	1	4	CARDINAL
can-529	195	1	p(x	PERSON
can-529	196	1	9	CARDINAL
can-529	197	1		DATE
can-529	197	2	nnn  	PERSON
can-529	197	3	18	CARDINAL
can-529	197	4	0)(1	CARDINAL
can-529	197	5		NORP
can-529	197	6	xgnp dx	PERSON
can-529	202	1	10	CARDINAL
can-529	204	1		GPE
can-529	204	2		GPE
can-529	205	1		NORP
can-529	205	2	max 0	PERSON
can-529	206	1	19	CARDINAL
can-529	206	2	kevevee gi 00362.062.3714.0596.2	PERSON
can-529	207	1	10	CARDINAL
can-529	209	1	19	CARDINAL
can-529	210	1		PERSON
can-529	211	1	1 1	CARDINAL
can-529	211	2	20	CARDINAL
can-529	211	3	g1	ORG
can-529	212	1	19	CARDINAL
can-529	213	1	6	CARDINAL
can-529	215	1	19	CARDINAL
can-529	215	2	three	CARDINAL
can-529	216	1	20	CARDINAL
can-529	218	1	18	CARDINAL
can-529	220	1	2	CARDINAL
can-529	220	2	2	CARDINAL
can-529	220	3	0)exp	DATE
can-529	220	4	0 1 1 22	QUANTITY
can-529	220	5	2	CARDINAL
can-529	222	1	j dx dp	PERSON
can-529	223	1	ed j dx	PERSON
can-529	223	2	pn xka	ORG
can-529	224	1	21	CARDINAL
can-529	224	2	2	CARDINAL
can-529	224	3	kb	ORG
can-529	224	4	e tkd 	ORG
can-529	224	5	w	ORG
can-529	226	1	21	CARDINAL
can-529	226	2	11	CARDINAL
can-529	226	3		ORG
can-529	226	4		NORP
can-529	226	5		NORP
can-529	226	6	  	PERSON
can-529	226	7		NORP
can-529	226	8		NORP
can-529	227	1		PERSON
can-529	227	2		NORP
can-529	227	3		NORP
can-529	227	4		NORP
can-529	237	1	2 1 1	TIME
can-529	237	2	2	CARDINAL
can-529	237	3	22	CARDINAL
can-529	238	1	1	CARDINAL
can-529	238	2	1 1 22	CARDINAL
can-529	238	3	2 1 1 22	TIME
can-529	240	1	lg       	ORG
can-529	241	1	1	CARDINAL
can-529	241	2	1	CARDINAL
can-529	241	3	2 1 1 22	TIME
can-529	245	1	23	CARDINAL
can-529	246	1	22	CARDINAL
can-529	246	2	23	CARDINAL
can-529	246	3		GPE
can-529	246	4		GPE
can-529	246	5		GPE
can-529	247	1		GPE
can-529	248	1		GPE
can-529	249	1		GPE
can-529	250	1		GPE
can-529	251	1		GPE
can-529	253	1		GPE
can-529	254	1		GPE
can-529	255	1		GPE
can-529	256	1		GPE
can-529	257	1		GPE
can-529	258	1		GPE
can-529	259	1		GPE
can-529	259	2		GPE
can-529	260	1		ORG
can-529	260	2		ORG
can-529	260	3		NORP
can-529	260	4		NORP
can-529	260	5		ORG
can-529	260	6		NORP
can-529	260	7		NORP
can-529	260	8		GPE
can-529	260	9		GPE
can-529	261	1		GPE
can-529	261	2		GPE
can-529	262	1		GPE
can-529	264	1		GPE
can-529	265	1		GPE
can-529	266	1		GPE
can-529	267	1		GPE
can-529	267	2		GPE
can-529	268	1		NORP
can-529	268	2		GPE
can-529	269	1		GPE
can-529	270	1		GPE
can-529	271	1		DATE
can-529	272	1		GPE
can-529	272	2		GPE
can-529	273	1		ORG
can-529	273	2		ORG
can-529	273	3		NORP
can-529	273	4		NORP
can-529	273	5		NORP
can-529	273	6		GPE
can-529	274	1		GPE
can-529	275	1		GPE
can-529	276	1		DATE
can-529	277	1		GPE
can-529	277	2		GPE
can-529	278	1		ORG
can-529	278	2		ORG
can-529	278	3		NORP
can-529	278	4		ORG
can-529	278	5	2	CARDINAL
can-529	282	1	l wch l wsh	PERSON
can-529	282	2	l wch l	PERSON
can-529	282	3	24	CARDINAL
can-529	285	1	5	CARDINAL
can-529	286	1	4	CARDINAL
can-529	287	1	about 0.4	CARDINAL
can-529	288	1	80%	PERCENT
can-529	288	2	half	CARDINAL
can-529	290	1	0.7	CARDINAL
can-529	291	1	0.6-0.8	CARDINAL
can-529	292	1	0.66	CARDINAL
can-529	293	1	0.12-0.16	MONEY
can-529	294	1	0.01	CARDINAL
can-529	295	1	two	CARDINAL
can-529	295	2	1	CARDINAL
can-529	295	3	2	CARDINAL
can-529	295	4	shockley	ORG
can-529	296	1	12	CARDINAL
can-529	296	2	one	CARDINAL
can-529	297	1	g midl e en	PERSON
can-529	297	2	ni-63	PRODUCT
can-529	300	1	1	CARDINAL
can-529	301	1	bower ke	PERSON
can-529	301	2	barbanel ya	PERSON
can-529	301	3	shreter yg	PERSON
can-529	301	4	radioisotope microbatteries	LOC
can-529	302	1	crc press	ORG
can-529	302	2	boca raton	GPE
can-529	302	3	london	GPE
can-529	302	4	new york	GPE
can-529	302	5	washington	GPE
can-529	302	6	2002	DATE
can-529	302	7	472	CARDINAL
can-529	302	8	2	CARDINAL
can-529	302	9	reznev aa	PERSON
can-529	303	1	perspektivy sozdaniya miniatyurnogo	PERSON
can-529	303	2	kachestve aktivnogo elementa	ORG
can-529	303	3	ni-63	PRODUCT
can-529	304	1	nanomikrosist	PERSON
can-529	305	1	tekh	PERSON
can-529	306	1	2009	DATE
can-529	306	2	3	CARDINAL
can-529	306	3	104	ORG
can-529	306	4	14	CARDINAL
can-529	307	1	3	CARDINAL
can-529	307	2	chandrashekhar mvs	PERSON
can-529	307	3	thomas chi	PERSON
can-529	307	4	li	PERSON
can-529	307	5	4h	CARDINAL
can-529	307	6	betavoltaic	PERSON
can-529	310	1	lett.	PERSON
can-529	311	1	2006	DATE
can-529	311	2	88	CARDINAL
can-529	311	3	033506-3	DATE
can-529	311	4	4	CARDINAL
can-529	311	5	krishnamoorthy v	PERSON
can-529	311	6	romero e	PERSON
can-529	312	1	42nd	ORDINAL
can-529	312	2	philadelphia	GPE
can-529	312	3	pa	GPE
can-529	312	4	june 12–15, 2006	DATE
can-529	312	5	601	CARDINAL
can-529	313	1	5	CARDINAL
can-529	313	2	andreev	PERSON
can-529	313	3	kavetsky ag	ORG
can-529	313	4	khvostikov	PERSON
can-529	313	5	alxga1-xas	PERSON
can-529	314	1	28th	ORDINAL
can-529	314	2	anchorage	GPE
can-529	314	3	2000	DATE
can-529	314	4	1253-1256	DATE
can-529	315	1	6	CARDINAL
can-529	315	2	rybicki gc.	GPE
can-529	315	3	silicon carbide radioisotope	LOC
can-529	316	1	nasa	ORG
can-529	316	2	2001	DATE
can-529	316	3	199	CARDINAL
can-529	317	1	7	CARDINAL
can-529	317	2	guo	PERSON
can-529	317	3	lal a. nanopower betavoltaic microbatteries	PERSON
can-529	318	1	12th	ORDINAL
can-529	318	2	boston	GPE
can-529	318	3	2003	DATE
can-529	318	4	36	CARDINAL
can-529	318	5	8	CARDINAL
can-529	319	1	sun w	PERSON
can-529	319	2	kherani np	PERSON
can-529	320	1	three	CARDINAL
can-529	322	1	2005	DATE
can-529	322	2	17	CARDINAL
can-529	322	3	1230-1233	CARDINAL
can-529	323	1	sze sm	PERSON
can-529	324	1	john wiley	PERSON
can-529	324	2	new york	GPE
can-529	324	3	chichester	GPE
can-529	324	4	toronto	GPE
can-529	324	5	singapore	GPE
can-529	324	6	1981	DATE
can-529	324	7	868	CARDINAL
can-529	324	8	10	CARDINAL
can-529	325	1	everhart te	PERSON
can-529	325	2	hoff p.h	PERSON
can-529	326	1	j. appl	PERSON
can-529	328	1	1971	DATE
can-529	328	2	42	CARDINAL
can-529	328	3	5837-5846	DATE
can-529	329	1	11	CARDINAL
can-529	330	1	phua	ORG
can-529	332	1	semicond	PERSON
can-529	333	1	sci	ORG
can-529	333	2	technol	PERSON
can-529	333	3	2001	DATE
can-529	333	4	16	CARDINAL
can-529	333	5	691	CARDINAL
can-529	334	1	12	CARDINAL
can-529	335	1	kolobashkin vm	PERSON
can-529	335	2	aleksankin	PERSON
can-529	337	1	moscow	GPE
can-529	337	2	1978	DATE
can-529	337	3	472	CARDINAL
can-529	337	4	13	CARDINAL
can-529	338	1	arnal h	ORG
can-529	338	2	arrivant sur la cible sous une incindence	ORG
can-529	341	1	acad	PERSON
can-529	342	1	sci	ORG
can-529	342	2	1969	DATE
can-529	342	3	386	CARDINAL
can-529	342	4	1526-1536	CARDINAL
can-529	343	1	14	CARDINAL
can-529	346	1	1980	DATE
can-529	346	2	3	CARDINAL
can-529	346	3	35	CARDINAL
can-529	347	1	15	CARDINAL
can-529	349	1	national bureau of standards	ORG
can-529	350	1	washington	GPE
can-529	350	2	d.c	GPE
can-529	350	3	20234.	DATE
can-529	351	1	1974	DATE
can-529	352	1	16	CARDINAL
can-529	353	1	reimer l. transmission electron microscopy	PERSON
can-529	353	2	berlin	GPE
can-529	353	3	1989	DATE
can-529	353	4	547	CARDINAL
can-529	353	5	17	CARDINAL
can-529	354	1	egerton	PERSON
can-529	355	1	plenum press	ORG
can-529	355	2	new york	GPE
can-529	355	3	1996	DATE
can-529	355	4	485	CARDINAL
can-529	355	5	18	CARDINAL
can-529	356	1	tung cj	PERSON
can-529	356	2	ritchie rh	PERSON
can-529	356	3	ashley jc et al	PERSON
can-529	358	1	royal hoad	PERSON
can-529	358	2	springfield	GPE
can-529	358	3	virginia	GPE
can-529	358	4	1976	DATE
can-529	358	5	118	CARDINAL
can-529	358	6	19	CARDINAL
can-529	358	7	pucherov nn	PERSON
can-529	358	8	romanovsky sv	PERSON
can-529	358	9	chesnokova nd et al	PERSON
can-529	358	10	chastic s	ORG
can-529	358	11	1-100	CARDINAL
can-529	359	1	kiev	PERSON
can-529	360	1	1975	DATE
can-529	361	1	345	CARDINAL
can-529	361	2	1-100	CARDINAL
can-529	361	3	20	CARDINAL
can-529	362	1	egerton	PERSON
can-529	362	2	appendix b. plenum press	PERSON
can-529	362	3	new york	GPE
can-529	362	4	1986	DATE
can-529	362	5	410	CARDINAL
can-529	362	6	21	CARDINAL
can-529	363	1	bartlett pl	PERSON
can-529	366	1	2002	DATE
can-529	366	2	66	CARDINAL
can-529	366	3	012707-10	DATE
can-529	368	1	gryzinski m. classical	PERSON
can-529	369	1	i.	PERSON
can-529	371	1	rev	PERSON
can-529	371	2	1965	DATE
can-529	371	3	138	CARDINAL
can-529	371	4	a336-a358	ORG
can-529	372	1	23	CARDINAL
can-529	373	1	leamy hj	PERSON
can-529	373	2	j. appl	ORG
can-529	374	1	1982	DATE
can-529	374	2	53	CARDINAL