id	sid	eid	entity	type
can-567	1	1	2020	DATE
can-567	1	2	3	CARDINAL
can-567	1	3	2 doi:10.24294	MONEY
can-567	1	4	49	CARDINAL
can-567	1	5	sergey v. bulyarskiy	PERSON
can-567	1	6	1	CARDINAL
can-567	1	7	alexander a. dudin 1	PERSON
can-567	1	8	alexander v. lakalin 1	PERSON
can-567	1	9	andrey p. orlov	PERSON
can-567	1	10	1	CARDINAL
can-567	1	11	alexander a. pavlov 1	PERSON
can-567	1	12	roman m. ryazanov 2	PERSON
can-567	1	13	artemiy a.	ORG
can-567	1	14	2 1	CARDINAL
can-567	1	15	the russian academy of sciences	ORG
can-567	1	16	32a	CARDINAL
can-567	1	17	moscow	GPE
can-567	1	18	119991	DATE
can-567	1	19	russia	GPE
can-567	2	1	2	CARDINAL
can-567	2	2	1	CARDINAL
can-567	2	3	zelenograd	GPE
can-567	2	4	moscow	GPE
can-567	2	5	124498	DATE
can-567	2	6	russia	GPE
can-567	3	1	4	CARDINAL
can-567	3	2	10	CARDINAL
can-567	10	1	the beginning of thermionic	DATE
can-567	14	1	11	CARDINAL
can-567	14	2	october 2020	DATE
can-567	14	3	november 2020	DATE
can-567	14	4	9	CARDINAL
can-567	14	5	november 2020	DATE
can-567	14	6	21	CARDINAL
can-567	14	7	november 2020	DATE
can-567	15	1	2020	DATE
can-567	15	2	sergey v. bulyarskiy et al	PERSON
can-567	15	3	10.24294	CARDINAL
can-567	15	4	llc	ORG
can-567	16	1	4.0	CARDINAL
can-567	16	2	http://creativecommons.org/licenses/by/4.0/ 1	DATE
can-567	17	1	1	CARDINAL
can-567	20	1	1	CARDINAL
can-567	21	1	0.8 to 1.5	CARDINAL
can-567	21	2	tens	CARDINAL
can-567	21	3	50	CARDINAL
can-567	22	1	1995	DATE
can-567	22	2	2	CARDINAL
can-567	23	1	5,6	CARDINAL
can-567	23	2	7,8	CARDINAL
can-567	24	1	11,12	CARDINAL
can-567	24	2	13,14	CARDINAL
can-567	25	1	15	CARDINAL
can-567	27	1	16,17	CARDINAL
can-567	29	1	bocharov & eletskii	ORG
can-567	29	2	murphy	PERSON
can-567	30	1	15,18	CARDINAL
can-567	31	1	rupesin ghe et al.	PERSON
can-567	31	2	bocharov & eletskii	ORG
can-567	31	3	murphy	PERSON
can-567	31	4	mayer & lambin	ORG
can-567	32	1	15-19	CARDINAL
can-567	33	1	20	CARDINAL
can-567	33	2	1	CARDINAL
can-567	33	3	2	CARDINAL
can-567	37	1	 	PERSON
can-567	37	2	2/392	CARDINAL
can-567	37	3	2	CARDINAL
can-567	39	1	2	CARDINAL
can-567	46	1	first	ORDINAL
can-567	47	1	joule-lenz	PERSON
can-567	49	1	16	CARDINAL
can-567	49	2	murphy et al	PERSON
can-567	50	1	17	CARDINAL
can-567	54	1	cnt	PERSON
can-567	55	1	cnt	PERSON
can-567	56	1	1	CARDINAL
can-567	57	1	nordheim	PERSON
can-567	57	2	two	CARDINAL
can-567	57	3	firstly	ORDINAL
can-567	57	4	secondly	ORDINAL
can-567	57	5	33.11107.01	CARDINAL
can-567	57	6	69.11	CARDINAL
can-567	57	7	yy 	ORG
can-567	58	1		GPE
can-567	58	2		GPE
can-567	61	1		ORG
can-567	65	1	2	CARDINAL
can-567	65	2	100	CARDINAL
can-567	65	3	oxford	NORP
can-567	65	4	two	CARDINAL
can-567	65	5	10	CARDINAL
can-567	65	6	2	CARDINAL
can-567	66	1	0.7 μm	QUANTITY
can-567	68	1	3:1	CARDINAL
can-567	70	1	600°	QUANTITY
can-567	71	1	2-3 μm	QUANTITY
can-567	71	2	1	CARDINAL
can-567	72	1	1	CARDINAL
can-567	73	1	two	CARDINAL
can-567	73	2	650i	CARDINAL
can-567	74	1	0.7	CARDINAL
can-567	74	2	more than	CARDINAL
can-567	75	1	510	CARDINAL
can-567	76	1	4	CARDINAL
can-567	76	2	150	CARDINAL
can-567	77	1	two	CARDINAL
can-567	77	2	2634b	DATE
can-567	78	1	up to	CARDINAL
can-567	78	2	three	CARDINAL
can-567	80	1	2	CARDINAL
can-567	82	1	2	CARDINAL
can-567	83	1	two	CARDINAL
can-567	83	2	rfe	GPE
can-567	84	1	one	CARDINAL
can-567	85	1	two	CARDINAL
can-567	86	1	one	CARDINAL
can-567	86	2	second	ORDINAL
can-567	87	1	1	CARDINAL
can-567	88	1	2	CARDINAL
can-567	89	1	52	CARDINAL
can-567	89	2	2	CARDINAL
can-567	89	3	1	CARDINAL
can-567	89	4	2	CARDINAL
can-567	89	5	2	CARDINAL
can-567	90	1	2	CARDINAL
can-567	92	1	3	CARDINAL
can-567	92	2	second	ORDINAL
can-567	95	1	two	CARDINAL
can-567	95	2	rfe	GPE
can-567	96	1	3	CARDINAL
can-567	98	1	1	CARDINAL
can-567	99	1	2	CARDINAL
can-567	100	1	3	CARDINAL
can-567	101	1	uc	ORG
can-567	112	1	several thousand degrees	QUANTITY
can-567	116	1	3	CARDINAL
can-567	116	2	3.1	CARDINAL
can-567	119	1	two	CARDINAL
can-567	119	2	first	ORDINAL
can-567	119	3	secondly	ORDINAL
can-567	122	1	half	CARDINAL
can-567	124	1	3	CARDINAL
can-567	125	1	53	CARDINAL
can-567	125	2	banerjee & butterfield	ORG
can-567	125	3	brebbia et al	PERSON
can-567	126	1	22	CARDINAL
can-567	126	2	23	CARDINAL
can-567	129	1	linear algebraic	FAC
can-567	131	1	3	CARDINAL
can-567	131	2	1	CARDINAL
can-567	131	3	2	CARDINAL
can-567	132	1	3	CARDINAL
can-567	132	2	3	CARDINAL
can-567	132	3	two	CARDINAL
can-567	132	4	rfe	GPE
can-567	134	1	20000–30000	CARDINAL
can-567	135	1	4	CARDINAL
can-567	136	1	4	CARDINAL
can-567	137	1	4	CARDINAL
can-567	144	1	2 2	CARDINAL
can-567	144	2	2 01	DATE
can-567	144	3	eucm cm cv	PERSON
can-567	145	1	150	CARDINAL
can-567	145	2	6 m	QUANTITY
can-567	145	3	54	CARDINAL
can-567	147	1	euler	PERSON
can-567	147	2	24	CARDINAL
can-567	148	1	eqs	CARDINAL
can-567	149	1	1	CARDINAL
can-567	149	2	2	CARDINAL
can-567	152	1	1	CARDINAL
can-567	153	1		ORG
can-567	154	1		GPE
can-567	157	1		GPE
can-567	158	1		GPE
can-567	159	1		ORG
can-567	160	1		PRODUCT
can-567	165	1	3	CARDINAL
can-567	165	2	28 exp	QUANTITY
can-567	165	3	8 2/3	CARDINAL
can-567	165	4		ORG
can-567	165	5	3	CARDINAL
can-567	165	6	3.2	CARDINAL
can-567	167	1	two	CARDINAL
can-567	169	1	21,25	CARDINAL
can-567	169	2	2	CARDINAL
can-567	169	3	24	CARDINAL
can-567	169	4	4	CARDINAL
can-567	169	5		GPE
can-567	172	1	4	CARDINAL
can-567	172	2	t(x	PERSON
can-567	172	3	r(t)/l	PERSON
can-567	172	4	η	PERSON
can-567	172	5	0.9	CARDINAL
can-567	173	1	428	CARDINAL
can-567	173	2	kmw	ORG
can-567	173	3	stefan-boltz mann	PERSON
can-567	174	1	4	CARDINAL
can-567	174	2	0	CARDINAL
can-567	174	3	ldt tt	PERSON
can-567	174	4	5	CARDINAL
can-567	174	5	vincent et al	PERSON
can-567	175	1	21	CARDINAL
can-567	176	1	4	CARDINAL
can-567	177	1	vincent et	PERSON
can-567	178	1	21	CARDINAL
can-567	179	1	25	CARDINAL
can-567	180	1	3	CARDINAL
can-567	180	2	4 +	CARDINAL
can-567	180	3	25	CARDINAL
can-567	181	1	4	CARDINAL
can-567	183	1	26	CARDINAL
can-567	183	2	4	CARDINAL
can-567	184	1	27	CARDINAL
can-567	185	1	27	CARDINAL
can-567	185	2	6	CARDINAL
can-567	186	1	0.103 ev	MONEY
can-567	186	2	28	CARDINAL
can-567	189	1	2	CARDINAL
can-567	190	1	t kk 	PERSON
can-567	191	1	6	CARDINAL
can-567	192	1	29	CARDINAL
can-567	195	1	3/2)kbt	CARDINAL
can-567	195	2	30	CARDINAL
can-567	196	1	i/e.	ORG
can-567	198	1	5	CARDINAL
can-567	198	2	first	ORDINAL
can-567	199	1	29,30	CARDINAL
can-567	199	2	second	ORDINAL
can-567	199	3	30	CARDINAL
can-567	201	1	30,31	CARDINAL
can-567	201	2	1	CARDINAL
can-567	201	3	2/3	CARDINAL
can-567	201	4	7	CARDINAL
can-567	201	5	0	PERSON
can-567	203	1	4	CARDINAL
can-567	203	2	6	CARDINAL
can-567	203	3	7	CARDINAL
can-567	205	1		ORG
can-567	205	2		GPE
can-567	205	3		GPE
can-567	205	4		GPE
can-567	206	1		NORP
can-567	206	2		NORP
can-567	206	3	 s	PERSON
can-567	208	1	k dx ldt tt s tt ittr dx	PERSON
can-567	208	2	k b	ORG
can-567	212	1	-6	DATE
can-567	213	1	31	CARDINAL
can-567	213	2	r=20	ORG
can-567	215	1	k0	ORG
can-567	215	2	200-1000 k	QUANTITY
can-567	215	3	55÷830	CARDINAL
can-567	216	1	25	CARDINAL
can-567	216	2	3000	CARDINAL
can-567	217	1	25	CARDINAL
can-567	218	1	5	CARDINAL
can-567	218	2	1	CARDINAL
can-567	218	3	2	CARDINAL
can-567	219	1	5	CARDINAL
can-567	219	2	1	CARDINAL
can-567	219	3	1	CARDINAL
can-567	219	4	2	CARDINAL
can-567	221	1	6	CARDINAL
can-567	223	1	2	CARDINAL
can-567	225	1	6	CARDINAL
can-567	225	2	tl	ORG
can-567	227	1	kdx ldt	PERSON
can-567	227	2	3	CARDINAL
can-567	227	3	4	CARDINAL
can-567	229	1	0.5	CARDINAL
can-567	230	1	300	CARDINAL
can-567	230	2	4	CARDINAL
can-567	230	3	tl	ORG
can-567	230	4	7	CARDINAL
can-567	230	5	7	CARDINAL
can-567	231	1	1	CARDINAL
can-567	231	2	0.5 μm	QUANTITY
can-567	231	3	2	CARDINAL
can-567	231	4	1.0 μm	QUANTITY
can-567	231	5	3	CARDINAL
can-567	231	6	1.5 μm	QUANTITY
can-567	231	7	4	CARDINAL
can-567	231	8	5	CARDINAL
can-567	231	9	3.0 μm	QUANTITY
can-567	231	10	6	CARDINAL
can-567	231	11	4.0 μm	CARDINAL
can-567	233	1	4	CARDINAL
can-567	233	2	21	CARDINAL
can-567	233	3	2 2	CARDINAL
can-567	233	4	9	CARDINAL
can-567	233	5	7	CARDINAL
can-567	236	1	6	CARDINAL
can-567	238	1	1	CARDINAL
can-567	239	1	4	CARDINAL
can-567	239	2	2	CARDINAL
can-567	240	1	3	CARDINAL
can-567	240	2	3	CARDINAL
can-567	240	3	2	CARDINAL
can-567	242	1	2	CARDINAL
can-567	243	1	3	CARDINAL
can-567	251	1	0	CARDINAL
can-567	251	2	57	CARDINAL
can-567	251	3	ite	ORG
can-567	251	4	i/2	PERSON
can-567	254	1	9	CARDINAL
can-567	256	1	9	CARDINAL
can-567	258	1	10	CARDINAL
can-567	259	1	10	CARDINAL
can-567	260	1	5.510 2	CARDINAL
can-567	260	2	2	CARDINAL
can-567	260	3	2.36 μm	CARDINAL
can-567	261	1		PERSON
can-567	261	2		NORP
can-567	261	3	4	CARDINAL
can-567	261	4	4	CARDINAL
can-567	261	5	11	CARDINAL
can-567	261	6	kb	ORG
can-567	261	7	boltzmann constant	PERSON
can-567	261	8	0	NORP
can-567	262	1	10	CARDINAL
can-567	262	2	11	CARDINAL
can-567	263	1	11	CARDINAL
can-567	263	2		PERSON
can-567	263	3		NORP
can-567	263	4		DATE
can-567	263	5	2	CARDINAL
can-567	263	6	ltk ltasi b cnt  (12	PERSON
can-567	264	1	9	CARDINAL
can-567	265	1	12	CARDINAL
can-567	266	1		PERSON
can-567	266	2		NORP
can-567	266	3		CARDINAL
can-567	266	4		ORG
can-567	266	5	2 2 22	DATE
can-567	266	6	ks li tk	PERSON
can-567	267	1	ks li	PERSON
can-567	268	1		PERSON
can-567	268	2	13	CARDINAL
can-567	268	3	13	CARDINAL
can-567	268	4	8	CARDINAL
can-567	269	1	8	CARDINAL
can-567	271	1	1	CARDINAL
can-567	271	2	2	CARDINAL
can-567	271	3	2	CARDINAL
can-567	271	4	3	CARDINAL
can-567	271	5	3	CARDINAL
can-567	271	6	4	CARDINAL
can-567	271	7	4	CARDINAL
can-567	271	8	5	CARDINAL
can-567	271	9	5	CARDINAL
can-567	271	10	6	CARDINAL
can-567	271	11	6	CARDINAL
can-567	271	12	7	CARDINAL
can-567	277	1	5	CARDINAL
can-567	281	1	be22	PRODUCT
can-567	281	2	mmn 3.0*	PERSON
can-567	281	3	2	CARDINAL
can-567	281	4	58	DATE
can-567	282	1	1000°с	QUANTITY
can-567	287	1	the ministry of education	ORG
can-567	287	2	russia	GPE
can-567	288	1	16.9007.2017	CARDINAL
can-567	289	1	1	CARDINAL
can-567	289	2	bulyarskiy sv.	PERSON
can-567	289	3	russian	NORP
can-567	291	1	ulyanovsk	GPE
can-567	292	1	strezhen	PERSON
can-567	292	2	2011	DATE
can-567	294	1	2	CARDINAL
can-567	294	2	gulyaev yv	PERSON
can-567	294	3	kosakovskaja zj	ORG
can-567	295	1	1995	DATE
can-567	295	2	233(1	CARDINAL
can-567	295	3	63–68	CARDINAL
can-567	296	1	3	CARDINAL
can-567	296	2	de heer wa	PERSON
can-567	297	1	1995	DATE
can-567	297	2	270	CARDINAL
can-567	297	3	1179–1180	CARDINAL
can-567	298	1	4	CARDINAL
can-567	298	2	hafner jh	PERSON
can-567	300	1	1995	DATE
can-567	300	2	269	CARDINAL
can-567	300	3	1550–1553	CARDINAL
can-567	301	1	5	CARDINAL
can-567	302	1	wang	PERSON
can-567	302	2	yan m	PERSON
can-567	302	3	chang r. flat	PERSON
can-567	303	1	2001	DATE
can-567	303	2	78	CARDINAL
can-567	303	3	1294–1296	CARDINAL
can-567	304	1	6	CARDINAL
can-567	306	1	2006	DATE
can-567	306	2	997–1003	DATE
can-567	307	1	reyes-mena	PERSON
can-567	307	2	jensen ch	PERSON
can-567	309	1	2005	DATE
can-567	309	2	48	CARDINAL
can-567	309	3	204–209	CARDINAL
can-567	310	1	8	CARDINAL
can-567	310	2	matsumoto t	PERSON
can-567	310	3	mimura h.	ORG
can-567	311	1	2003	DATE
can-567	311	2	82	CARDINAL
can-567	311	3	1637	CARDINAL
can-567	311	4	1639	DATE
can-567	313	1	saito y	PERSON
can-567	313	2	uemura s	PERSON
can-567	313	3	hamaguchi k. cathode ray	PERSON
can-567	314	1	japanese	NORP
can-567	314	2	1998	DATE
can-567	314	3	37(3b	CARDINAL
can-567	315	1	10	CARDINAL
can-567	315	2	croci m	PERSON
can-567	317	1	2004	DATE
can-567	317	2	35	CARDINAL
can-567	317	3	329	CARDINAL
can-567	317	4	336	CARDINAL
can-567	317	5	11	CARDINAL
can-567	318	1	yasutomo y	PERSON
can-567	318	2	ohue w	PERSON
can-567	319	1	2012	DATE
can-567	320	1	12	CARDINAL
can-567	320	2	sabaut l	ORG
can-567	320	3	mazellier jp	PERSON
can-567	321	1	2016	CARDINAL
can-567	321	2	02g101	CARDINAL
can-567	322	1	13. yuan x	MONEY
can-567	322	2	zhu w	PERSON
can-567	322	3	zhang y	PERSON
can-567	324	1	6	CARDINAL
can-567	324	2	2016	DATE
can-567	325	1	32936	CARDINAL
can-567	326	1	14	CARDINAL
can-567	327	1	carlo a	PERSON
can-567	327	2	1 thz	QUANTITY
can-567	328	1	2011	DATE
can-567	328	2	4	CARDINAL
can-567	328	3	1102	CARDINAL
can-567	328	4	1110	DATE
can-567	329	1	15	CARDINAL
can-567	330	1	rupesinghe nl	PERSON
can-567	330	2	chhowalla m	PERSON
can-567	330	3	teo kbk	PERSON
can-567	331	1	2003	DATE
can-567	331	2	21(1	CARDINAL
can-567	331	3	1071–1076	DATE
can-567	332	1	16	CARDINAL
can-567	335	1	uspekhi	PERSON
can-567	335	2	fizicheskih	GPE
can-567	335	3	2010	DATE
can-567	335	4	180(9	DATE
can-567	335	5	897	CARDINAL
can-567	336	1	17	CARDINAL
can-567	337	1	bocharov gs	PERSON
can-567	338	1	2013	DATE
can-567	338	2	3	CARDINAL
can-567	338	3	393–442	CARDINAL
can-567	338	4	18	CARDINAL
can-567	339	1	murphy el	PERSON
can-567	340	1	1956	DATE
can-567	340	2	102	CARDINAL
can-567	340	3	1464–1473.	CARDINAL
can-567	342	1	mayer	PERSON
can-567	343	1	2002	DATE
can-567	343	2	40	CARDINAL
can-567	343	3	429–436	CARDINAL
can-567	343	4	20	CARDINAL
can-567	344	1	sun j	PERSON
can-567	344	2	hou s	PERSON
can-567	345	1	2002	DATE
can-567	345	2	75(4	DATE
can-567	345	3	479–483	CARDINAL
can-567	346	1	21	CARDINAL
can-567	347	1	vincent p	PERSON
can-567	347	2	purcell st	PERSON
can-567	348	1	2002	DATE
can-567	348	2	66(7	CARDINAL
can-567	348	3	429–436	CARDINAL
can-567	349	1	22	CARDINAL
can-567	350	1	banerjee pk	GPE
can-567	350	2	butterfield r.	PERSON
can-567	351	1	london	GPE
can-567	351	2	mcgraw hill book company	ORG
can-567	351	3	1981	DATE
can-567	352	1	p.452	DATE
can-567	353	1	23	CARDINAL
can-567	354	1	brebbia ca	PERSON
can-567	354	2	telles jcf	PERSON
can-567	354	3	wrobel lc	PERSON
can-567	356	1	berlin	GPE
can-567	356	2	heidelberg	GPE
can-567	356	3	new york	GPE
can-567	356	4	tokyo	GPE
can-567	356	5	1984	DATE
can-567	358	1	24	CARDINAL
can-567	358	2	shoup te	PERSON
can-567	359	1	englewood	ORG
can-567	359	2	1984	DATE
can-567	361	1	25	CARDINAL
can-567	361	2	bocharov gs	PERSON
can-567	362	1	2007	DATE
can-567	362	2	52(4	CARDINAL
can-567	362	3	498–503	CARDINAL
can-567	363	1	26	CARDINAL
can-567	363	2	bocharov gs	PERSON
can-567	364	1	2011	DATE
can-567	364	2	56(4	CARDINAL
can-567	364	3	540–545	DATE
can-567	365	1	59 27	DATE
can-567	366	1	ziman jm	PERSON
can-567	368	1	oxford	NORP
can-567	368	2	the clarendon press	FAC
can-567	368	3	1960	DATE
can-567	370	1	28	CARDINAL
can-567	371	1	hone j	PERSON
can-567	371	2	llaguno mc	PERSON
can-567	371	3	biercuk mj	PERSON
can-567	372	1	2002	DATE
can-567	372	2	74	CARDINAL
can-567	372	3	339–343	CARDINAL
can-567	373	1	29	CARDINAL
can-567	373	2	paulini j	PERSON
can-567	373	3	klein	PERSON
can-567	373	4	simon g.	PERSON
can-567	375	1	physics1993	PERSON
can-567	375	2	uk	GPE
can-567	376	1	26	CARDINAL
can-567	376	2	1310	CARDINAL
can-567	376	3	1315	DATE
can-567	376	4	30	CARDINAL
can-567	377	1	wei w	PERSON
can-567	377	2	liu y	PERSON
can-567	377	3	wei y	PERSON
can-567	378	1	2007	DATE
can-567	378	2	7	CARDINAL
can-567	378	3	64–68	CARDINAL
can-567	380	1	huang n	PERSON
can-567	380	2	chen j	PERSON
can-567	380	3	chen j	PERSON
can-567	381	1	2004	DATE
can-567	381	2	93	CARDINAL
can-567	381	3	075501	DATE