id	sid	tid	token	lemma	pos
can-1069	1	1	characterization	characterization	NOUN
can-1069	1	2	and	and	CCONJ
can-1069	1	3	application	application	NOUN
can-1069	1	4	of	of	ADP
can-1069	1	5	nanomaterials	nanomaterial	NOUN
can-1069	1	6	(	(	PUNCT
can-1069	1	7	2020	2020	NUM
can-1069	1	8	)	)	PUNCT
can-1069	1	9	volume	volume	NOUN
can-1069	1	10	3	3	NUM
can-1069	1	11	issue	issue	NOUN
can-1069	1	12	2	2	NUM
can-1069	1	13	doi:10.24294	doi:10.24294	NOUN
can-1069	1	14	/	/	SYM
can-1069	2	1	can.v3i2.1069	can.v3i2.1069	PROPN
can-1069	2	2	81	81	NUM
can-1069	2	3	original	original	ADJ
can-1069	2	4	research	research	NOUN
can-1069	2	5	article	article	NOUN
can-1069	2	6	subnanophase	subnanophase	NOUN
can-1069	2	7	coatings	coating	NOUN
can-1069	2	8	as	as	ADP
can-1069	2	9	new	new	ADJ
can-1069	2	10	type	type	NOUN
can-1069	2	11	low	low	ADJ
can-1069	2	12	-	-	PUNCT
can-1069	2	13	dimensional	dimensional	ADJ
can-1069	2	14	nanomaterials	nanomaterial	NOUN
can-1069	2	15	:	:	PUNCT
can-1069	2	16	ultra	ultra	ADJ
can-1069	2	17	-	-	ADJ
can-1069	2	18	high	high	ADJ
can-1069	2	19	-	-	PUNCT
can-1069	2	20	vacuum	vacuum	NOUN
can-1069	2	21	synthesis	synthesis	NOUN
can-1069	2	22	,	,	PUNCT
can-1069	2	23	properties	property	NOUN
can-1069	2	24	and	and	CCONJ
can-1069	2	25	application	application	NOUN
can-1069	2	26	nikolay	nikolay	PROPN
can-1069	2	27	plusnin	plusnin	PROPN
can-1069	2	28	institute	institute	PROPN
can-1069	2	29	of	of	ADP
can-1069	2	30	automation	automation	NOUN
can-1069	2	31	and	and	CCONJ
can-1069	2	32	control	control	NOUN
can-1069	2	33	processes	process	NOUN
can-1069	2	34	,	,	PUNCT
can-1069	2	35	far	far	ADV
can-1069	2	36	east	east	NOUN
can-1069	2	37	branch	branch	NOUN
can-1069	2	38	,	,	PUNCT
can-1069	2	39	russian	russian	ADJ
can-1069	2	40	academy	academy	PROPN
can-1069	2	41	of	of	ADP
can-1069	2	42	sciences	sciences	PROPN
can-1069	2	43	,	,	PUNCT
can-1069	2	44	vladivostok	vladivostok	NOUN
can-1069	2	45	,	,	PUNCT
can-1069	2	46	russia	russia	PROPN
can-1069	2	47	;	;	PUNCT
can-1069	2	48	e	e	X
can-1069	2	49	-	-	NOUN
can-1069	2	50	mail	mail	NOUN
can-1069	2	51	:	:	PUNCT
can-1069	2	52	plusnin@dvo.ru	plusnin@dvo.ru	VERB
can-1069	2	53	abstract	abstract	ADV
can-1069	2	54	in	in	ADP
can-1069	2	55	this	this	DET
can-1069	2	56	paper	paper	NOUN
can-1069	2	57	,	,	PUNCT
can-1069	2	58	a	a	DET
can-1069	2	59	classification	classification	NOUN
can-1069	2	60	of	of	ADP
can-1069	2	61	low	low	ADJ
can-1069	2	62	-	-	PUNCT
can-1069	2	63	dimensional	dimensional	ADJ
can-1069	2	64	nanomaterials	nanomaterial	NOUN
can-1069	2	65	is	be	AUX
can-1069	2	66	given	give	VERB
can-1069	2	67	,	,	PUNCT
can-1069	2	68	and	and	CCONJ
can-1069	2	69	new	new	ADJ
can-1069	2	70	type	type	NOUN
can-1069	2	71	of	of	ADP
can-1069	2	72	these	these	DET
can-1069	2	73	nanomaterials	nanomaterial	NOUN
can-1069	2	74	—	—	PUNCT
can-1069	2	75	subnanophase	subnanophase	ADJ
can-1069	2	76	coatings	coating	NOUN
can-1069	2	77	are	be	AUX
can-1069	2	78	proposed	propose	VERB
can-1069	2	79	.	.	PUNCT
can-1069	3	1	experimental	experimental	ADJ
can-1069	3	2	results	result	NOUN
can-1069	3	3	on	on	ADP
can-1069	3	4	the	the	DET
can-1069	3	5	formation	formation	NOUN
can-1069	3	6	of	of	ADP
can-1069	3	7	a	a	DET
can-1069	3	8	wetting	wet	VERB
can-1069	3	9	layer	layer	NOUN
can-1069	3	10	of	of	ADP
can-1069	3	11	a	a	DET
can-1069	3	12	transition	transition	NOUN
can-1069	3	13	metal	metal	NOUN
can-1069	3	14	on	on	ADP
can-1069	3	15	a	a	DET
can-1069	3	16	silicon	silicon	NOUN
can-1069	3	17	substrate	substrate	NOUN
can-1069	3	18	by	by	ADP
can-1069	3	19	physical	physical	ADJ
can-1069	3	20	deposition	deposition	NOUN
can-1069	3	21	in	in	ADP
can-1069	3	22	vacuum	vacuum	NOUN
can-1069	3	23	and	and	CCONJ
can-1069	3	24	results	result	NOUN
can-1069	3	25	of	of	ADP
can-1069	3	26	this	this	DET
can-1069	3	27	layer	layer	NOUN
can-1069	3	28	identification	identification	NOUN
can-1069	3	29	by	by	ADP
can-1069	3	30	the	the	DET
can-1069	3	31	eels	eel	NOUN
can-1069	3	32	method	method	NOUN
can-1069	3	33	are	be	AUX
can-1069	3	34	given	give	VERB
can-1069	3	35	.	.	PUNCT
can-1069	4	1	based	base	VERB
can-1069	4	2	on	on	ADP
can-1069	4	3	these	these	DET
can-1069	4	4	results	result	NOUN
can-1069	4	5	,	,	PUNCT
can-1069	4	6	a	a	DET
can-1069	4	7	new	new	ADJ
can-1069	4	8	approach	approach	NOUN
can-1069	4	9	to	to	ADP
can-1069	4	10	the	the	DET
can-1069	4	11	formation	formation	NOUN
can-1069	4	12	of	of	ADP
can-1069	4	13	subnanophase	subnanophase	ADJ
can-1069	4	14	coatings	coating	NOUN
can-1069	4	15	has	have	AUX
can-1069	4	16	been	be	AUX
can-1069	4	17	proposed	propose	VERB
can-1069	4	18	by	by	ADP
can-1069	4	19	creation	creation	NOUN
can-1069	4	20	of	of	ADP
can-1069	4	21	an	an	DET
can-1069	4	22	interface	interface	NOUN
can-1069	4	23	stresses	stress	NOUN
can-1069	4	24	structuring	structure	VERB
can-1069	4	25	wl	wl	PROPN
can-1069	4	26	.	.	PUNCT
can-1069	5	1	the	the	DET
can-1069	5	2	possible	possible	ADJ
can-1069	5	3	properties	property	NOUN
can-1069	5	4	and	and	CCONJ
can-1069	5	5	application	application	NOUN
can-1069	5	6	prospects	prospect	NOUN
can-1069	5	7	of	of	ADP
can-1069	5	8	subnanophase	subnanophase	ADJ
can-1069	5	9	coatings	coating	NOUN
can-1069	5	10	are	be	AUX
can-1069	5	11	considered	consider	VERB
can-1069	5	12	.	.	PUNCT
can-1069	6	1	keywords	keyword	NOUN
can-1069	6	2	:	:	PUNCT
can-1069	6	3	low	low	ADJ
can-1069	6	4	-	-	PUNCT
can-1069	6	5	dimensional	dimensional	ADJ
can-1069	6	6	nanomaterials	nanomaterial	NOUN
can-1069	6	7	;	;	PUNCT
can-1069	6	8	subnanophase	subnanophase	ADJ
can-1069	6	9	coatings	coating	NOUN
can-1069	6	10	;	;	PUNCT
can-1069	6	11	wetting	wet	VERB
can-1069	6	12	layer	layer	NOUN
can-1069	6	13	;	;	PUNCT
can-1069	6	14	ultrahigh	ultrahigh	NOUN
can-1069	6	15	-	-	PUNCT
can-1069	6	16	vacuum	vacuum	NOUN
can-1069	6	17	;	;	PUNCT
can-1069	6	18	formation	formation	NOUN
can-1069	6	19	;	;	PUNCT
can-1069	6	20	properties	property	NOUN
can-1069	6	21	;	;	PUNCT
can-1069	6	22	application	application	NOUN
can-1069	6	23	article	article	NOUN
can-1069	6	24	info	info	NOUN
can-1069	6	25	article	article	NOUN
can-1069	6	26	history	history	NOUN
can-1069	6	27	:	:	PUNCT
can-1069	6	28	received	receive	VERB
can-1069	6	29	24	24	NUM
can-1069	6	30	june	june	PROPN
can-1069	6	31	2020	2020	NUM
can-1069	6	32	received	receive	VERB
can-1069	6	33	in	in	ADP
can-1069	6	34	revised	revise	VERB
can-1069	6	35	form	form	NOUN
can-1069	6	36	18	18	NUM
can-1069	6	37	july	july	PROPN
can-1069	6	38	2020	2020	NUM
can-1069	6	39	accepted	accept	VERB
can-1069	6	40	23	23	NUM
can-1069	6	41	july	july	PROPN
can-1069	6	42	2020	2020	NUM
can-1069	6	43	available	available	ADJ
can-1069	6	44	online	online	ADJ
can-1069	6	45	3	3	NUM
can-1069	6	46	august	august	PROPN
can-1069	6	47	2020	2020	NUM
can-1069	6	48	copyright	copyright	NOUN
can-1069	6	49	copyright	copyright	NOUN
can-1069	6	50	©	©	PROPN
can-1069	6	51	2020	2020	NUM
can-1069	6	52	nikolay	nikolay	PROPN
can-1069	6	53	plusnin	plusnin	NOUN
can-1069	6	54	.	.	PUNCT
can-1069	7	1	doi	doi	NOUN
can-1069	7	2	:	:	PUNCT
can-1069	7	3	10.24294	10.24294	NUM
can-1069	7	4	/	/	SYM
can-1069	7	5	can.v3i2.1069	can.v3i2.1069	PROPN
can-1069	7	6	enpress	enpress	NOUN
can-1069	7	7	publisher	publisher	PROPN
can-1069	7	8	llc	llc	PROPN
can-1069	7	9	.	.	PUNCT
can-1069	8	1	this	this	DET
can-1069	8	2	work	work	NOUN
can-1069	8	3	is	be	AUX
can-1069	8	4	licensed	license	VERB
can-1069	8	5	under	under	ADP
can-1069	8	6	the	the	DET
can-1069	8	7	creative	creative	ADJ
can-1069	8	8	commons	common	NOUN
can-1069	8	9	attribution	attribution	NOUN
can-1069	8	10	-	-	PUNCT
can-1069	8	11	noncommercial	noncommercial	ADJ
can-1069	8	12	4.0	4.0	NUM
can-1069	8	13	international	international	ADJ
can-1069	8	14	license	license	NOUN
can-1069	8	15	(	(	PUNCT
can-1069	8	16	cc	cc	NOUN
can-1069	8	17	by	by	ADP
can-1069	8	18	-	-	PUNCT
can-1069	8	19	nc	nc	PROPN
can-1069	8	20	4.0	4.0	NUM
can-1069	8	21	)	)	PUNCT
can-1069	8	22	.	.	PUNCT
can-1069	9	1	http://creativecommons.org/licenses/by/4.0/	http://creativecommons.org/licenses/by/4.0/	PROPN
can-1069	9	2	1	1	NUM
can-1069	9	3	.	.	PUNCT
can-1069	9	4	introduction	introduction	NOUN
can-1069	9	5	in	in	ADP
can-1069	9	6	the	the	DET
can-1069	9	7	world	world	NOUN
can-1069	9	8	there	there	PRON
can-1069	9	9	are	be	VERB
can-1069	9	10	many	many	ADJ
can-1069	9	11	major	major	ADJ
can-1069	9	12	scientific	scientific	ADJ
can-1069	9	13	,	,	PUNCT
can-1069	9	14	educational	educational	ADJ
can-1069	9	15	and	and	CCONJ
can-1069	9	16	technological	technological	ADJ
can-1069	9	17	centers	center	NOUN
can-1069	9	18	that	that	PRON
can-1069	9	19	are	be	AUX
can-1069	9	20	engaged	engage	VERB
can-1069	9	21	in	in	ADP
can-1069	9	22	researches	research	NOUN
can-1069	9	23	and	and	CCONJ
can-1069	9	24	various	various	ADJ
can-1069	9	25	applications	application	NOUN
can-1069	9	26	of	of	ADP
can-1069	9	27	nanotechnology	nanotechnology	NOUN
can-1069	9	28	and	and	CCONJ
can-1069	9	29	nanomaterials	nanomaterial	NOUN
can-1069	9	30	.	.	PUNCT
can-1069	10	1	in	in	ADP
can-1069	10	2	particular	particular	ADJ
can-1069	10	3	,	,	PUNCT
can-1069	10	4	there	there	PRON
can-1069	10	5	are	be	VERB
can-1069	10	6	a	a	DET
can-1069	10	7	number	number	NOUN
can-1069	10	8	of	of	ADP
can-1069	10	9	manufacturers	manufacturer	NOUN
can-1069	10	10	of	of	ADP
can-1069	10	11	nanophase	nanophase	ADJ
can-1069	10	12	materials	material	NOUN
can-1069	10	13	.	.	PUNCT
can-1069	11	1	the	the	DET
can-1069	11	2	most	most	ADV
can-1069	11	3	famous	famous	ADJ
can-1069	11	4	among	among	ADP
can-1069	11	5	them	they	PRON
can-1069	11	6	is	be	AUX
can-1069	11	7	the	the	DET
can-1069	11	8	company	company	NOUN
can-1069	11	9	―nanophase	―nanophase	PROPN
can-1069	11	10	technologies‖	technologies‖	PROPN
can-1069	11	11	,	,	PUNCT
can-1069	11	12	which	which	PRON
can-1069	11	13	produces	produce	VERB
can-1069	11	14	nanodispersed	nanodispersed	ADJ
can-1069	11	15	powders	powder	NOUN
can-1069	11	16	―nanogard‖	―nanogard‖	PROPN
can-1069	11	17	and	and	CCONJ
can-1069	11	18	―nanotech‖	―nanotech‖	PROPN
can-1069	11	19	based	base	VERB
can-1069	11	20	on	on	ADP
can-1069	11	21	zinc	zinc	NOUN
can-1069	11	22	and	and	CCONJ
can-1069	11	23	aluminum	aluminum	NOUN
can-1069	11	24	oxides	oxide	NOUN
can-1069	11	25	,	,	PUNCT
can-1069	11	26	respectively	respectively	ADV
can-1069	11	27	[	[	X
can-1069	11	28	1	1	NUM
can-1069	11	29	]	]	PUNCT
can-1069	11	30	.	.	PUNCT
can-1069	12	1	usually	usually	ADV
can-1069	12	2	,	,	PUNCT
can-1069	12	3	nanophase	nanophase	VERB
can-1069	12	4	materials	material	NOUN
can-1069	12	5	are	be	AUX
can-1069	12	6	obtained	obtain	VERB
can-1069	12	7	by	by	ADP
can-1069	12	8	compacting	compact	VERB
can-1069	12	9	bulk	bulk	ADJ
can-1069	12	10	materials	material	NOUN
can-1069	12	11	from	from	ADP
can-1069	12	12	nanodispersed	nanodisperse	VERB
can-1069	12	13	particles	particle	NOUN
can-1069	12	14	with	with	ADP
can-1069	12	15	a	a	DET
can-1069	12	16	diameter	diameter	NOUN
can-1069	12	17	of	of	ADP
can-1069	12	18	2	2	NUM
can-1069	12	19	to	to	PART
can-1069	12	20	50	50	NUM
can-1069	12	21	nm	nm	NOUN
can-1069	12	22	.	.	PUNCT
can-1069	13	1	as	as	ADP
can-1069	13	2	a	a	DET
can-1069	13	3	result	result	NOUN
can-1069	13	4	,	,	PUNCT
can-1069	13	5	after	after	ADP
can-1069	13	6	compacting	compact	VERB
can-1069	13	7	,	,	PUNCT
can-1069	13	8	they	they	PRON
can-1069	13	9	consist	consist	VERB
can-1069	13	10	of	of	ADP
can-1069	13	11	grains	grain	NOUN
can-1069	13	12	4	4	NUM
can-1069	13	13	-	-	SYM
can-1069	13	14	30	30	NUM
can-1069	13	15	nm	nm	NOUN
can-1069	13	16	in	in	ADP
can-1069	13	17	size	size	NOUN
can-1069	13	18	.	.	PUNCT
can-1069	14	1	in	in	ADP
can-1069	14	2	their	their	PRON
can-1069	14	3	atomic	atomic	ADJ
can-1069	14	4	structure	structure	NOUN
can-1069	14	5	,	,	PUNCT
can-1069	14	6	nanophase	nanophase	VERB
can-1069	14	7	materials	material	NOUN
can-1069	14	8	are	be	AUX
can-1069	14	9	neither	neither	CCONJ
can-1069	14	10	amorphous	amorphous	ADJ
can-1069	14	11	,	,	PUNCT
can-1069	14	12	nor	nor	CCONJ
can-1069	14	13	crystalline	crystalline	NOUN
can-1069	14	14	,	,	PUNCT
can-1069	14	15	nor	nor	CCONJ
can-1069	14	16	even	even	ADV
can-1069	14	17	quasicrystalline	quasicrystalline	NOUN
can-1069	14	18	.	.	PUNCT
can-1069	15	1	it	it	PRON
can-1069	15	2	is	be	AUX
can-1069	15	3	believed	believe	VERB
can-1069	15	4	that	that	SCONJ
can-1069	15	5	they	they	PRON
can-1069	15	6	are	be	AUX
can-1069	15	7	in	in	ADP
can-1069	15	8	a	a	DET
can-1069	15	9	low	low	ADV
can-1069	15	10	-	-	PUNCT
can-1069	15	11	dimensional	dimensional	ADJ
can-1069	15	12	-	-	PUNCT
can-1069	15	13	nanophase	nanophase	NOUN
can-1069	15	14	state	state	NOUN
can-1069	15	15	.	.	PUNCT
can-1069	16	1	this	this	DET
can-1069	16	2	production	production	NOUN
can-1069	16	3	technology	technology	NOUN
can-1069	16	4	of	of	ADP
can-1069	16	5	nano	nano	NOUN
can-1069	16	6	phase	phase	NOUN
can-1069	16	7	materials	material	NOUN
can-1069	16	8	is	be	AUX
can-1069	16	9	still	still	ADV
can-1069	16	10	relevant	relevant	ADJ
can-1069	16	11	today	today	NOUN
can-1069	16	12	.	.	PUNCT
can-1069	17	1	considering	consider	VERB
can-1069	17	2	the	the	DET
can-1069	17	3	main	main	ADJ
can-1069	17	4	role	role	NOUN
can-1069	17	5	of	of	ADP
can-1069	17	6	effects	effect	NOUN
can-1069	17	7	underlying	underlie	VERB
can-1069	17	8	their	their	PRON
can-1069	17	9	basis	basis	NOUN
can-1069	17	10	,	,	PUNCT
can-1069	17	11	low	low	ADJ
can-1069	17	12	-	-	PUNCT
can-1069	17	13	dimensional	dimensional	ADJ
can-1069	17	14	nanomaterials	nanomaterial	NOUN
can-1069	17	15	can	can	AUX
can-1069	17	16	be	be	AUX
can-1069	17	17	classified	classify	VERB
can-1069	17	18	as	as	SCONJ
can-1069	17	19	follows	follow	VERB
can-1069	17	20	:	:	PUNCT
can-1069	17	21	1	1	NUM
can-1069	17	22	)	)	PUNCT
can-1069	17	23	low	low	ADJ
can-1069	17	24	-	-	PUNCT
can-1069	17	25	dimensional	dimensional	ADJ
can-1069	17	26	heterocrystalline	heterocrystalline	NOUN
can-1069	17	27	ones	one	NOUN
can-1069	17	28	with	with	ADP
can-1069	17	29	the	the	DET
can-1069	17	30	effect	effect	NOUN
can-1069	17	31	of	of	ADP
can-1069	17	32	intercrystalline	intercrystalline	NOUN
can-1069	17	33	proximity	proximity	NOUN
can-1069	17	34	.	.	PUNCT
can-1069	18	1	2	2	X
can-1069	18	2	)	)	PUNCT
can-1069	18	3	low	low	ADJ
can-1069	18	4	-	-	PUNCT
can-1069	18	5	dimensional	dimensional	ADJ
can-1069	18	6	heterophase	heterophase	NOUN
can-1069	18	7	amorphous	amorphous	ADJ
can-1069	18	8	ones	one	NOUN
can-1069	18	9	with	with	ADP
can-1069	18	10	the	the	DET
can-1069	18	11	effect	effect	NOUN
can-1069	18	12	of	of	ADP
can-1069	18	13	interphase	interphase	ADJ
can-1069	18	14	proximity	proximity	NOUN
can-1069	18	15	.	.	PUNCT
can-1069	19	1	3	3	X
can-1069	19	2	)	)	PUNCT
can-1069	19	3	low	low	ADJ
can-1069	19	4	-	-	PUNCT
can-1069	19	5	dimensional	dimensional	ADJ
can-1069	19	6	ones	one	NOUN
can-1069	19	7	with	with	ADP
can-1069	19	8	the	the	DET
can-1069	19	9	quantum	quantum	ADJ
can-1069	19	10	effect	effect	NOUN
can-1069	19	11	in	in	ADP
can-1069	19	12	their	their	PRON
can-1069	19	13	constituent	constituent	NOUN
can-1069	19	14	particles	particle	NOUN
can-1069	19	15	.	.	PUNCT
can-1069	20	1	4	4	NUM
can-1069	20	2	)	)	PUNCT
can-1069	20	3	two	two	NUM
can-1069	20	4	-	-	PUNCT
can-1069	20	5	dimensional	dimensional	ADJ
can-1069	20	6	ones	one	NOUN
can-1069	20	7	with	with	ADP
can-1069	20	8	the	the	DET
can-1069	20	9	effect	effect	NOUN
can-1069	20	10	of	of	ADP
can-1069	20	11	interaction	interaction	NOUN
can-1069	20	12	with	with	ADP
can-1069	20	13	the	the	DET
can-1069	20	14	http://creativecommons.org/licenses/by/4.0/	http://creativecommons.org/licenses/by/4.0/	PROPN
can-1069	20	15	82	82	NUM
can-1069	20	16	substrate	substrate	NOUN
can-1069	20	17	.	.	PUNCT
can-1069	21	1	5	5	NUM
can-1069	21	2	)	)	PUNCT
can-1069	21	3	two	two	NUM
can-1069	21	4	-	-	PUNCT
can-1069	21	5	dimensional	dimensional	ADJ
can-1069	21	6	ones	one	NOUN
can-1069	21	7	with	with	ADP
can-1069	21	8	the	the	DET
can-1069	21	9	effect	effect	NOUN
can-1069	21	10	of	of	ADP
can-1069	21	11	interaction	interaction	NOUN
can-1069	21	12	with	with	ADP
can-1069	21	13	the	the	DET
can-1069	21	14	vacuum	vacuum	NOUN
can-1069	21	15	.	.	PUNCT
can-1069	22	1	6	6	NUM
can-1069	22	2	)	)	PUNCT
can-1069	22	3	two	two	NUM
can-1069	22	4	-	-	PUNCT
can-1069	22	5	dimensional	dimensional	ADJ
can-1069	22	6	ones	one	NOUN
can-1069	22	7	with	with	ADP
can-1069	22	8	a	a	DET
can-1069	22	9	transboundary	transboundary	ADJ
can-1069	22	10	quantum	quantum	NOUN
can-1069	22	11	size	size	NOUN
can-1069	22	12	effect	effect	NOUN
can-1069	22	13	.	.	PUNCT
can-1069	23	1	besides	besides	SCONJ
can-1069	23	2	,	,	PUNCT
can-1069	23	3	various	various	ADJ
can-1069	23	4	types	type	NOUN
can-1069	23	5	of	of	ADP
can-1069	23	6	low	low	ADJ
can-1069	23	7	-	-	PUNCT
can-1069	23	8	dimensional	dimensional	ADJ
can-1069	23	9	nanomaterials	nanomaterial	NOUN
can-1069	23	10	are	be	AUX
can-1069	23	11	possible	possible	ADJ
can-1069	23	12	,	,	PUNCT
can-1069	23	13	including	include	VERB
can-1069	23	14	thin	thin	ADJ
can-1069	23	15	-	-	PUNCT
can-1069	23	16	film	film	NOUN
can-1069	23	17	,	,	PUNCT
can-1069	23	18	dispersed	disperse	VERB
can-1069	23	19	and	and	CCONJ
can-1069	23	20	composite	composite	ADJ
can-1069	23	21	nanomaterials	nanomaterial	NOUN
can-1069	23	22	,	,	PUNCT
can-1069	23	23	which	which	PRON
can-1069	23	24	are	be	AUX
can-1069	23	25	combination	combination	NOUN
can-1069	23	26	of	of	ADP
can-1069	23	27	these	these	DET
can-1069	23	28	types	type	NOUN
can-1069	23	29	of	of	ADP
can-1069	23	30	nanomaterials	nanomaterial	NOUN
can-1069	23	31	.	.	PUNCT
can-1069	24	1	here	here	ADV
can-1069	24	2	,	,	PUNCT
can-1069	24	3	we	we	PRON
can-1069	24	4	will	will	AUX
can-1069	24	5	focus	focus	VERB
can-1069	24	6	on	on	ADP
can-1069	24	7	subnanophase	subnanophase	ADJ
can-1069	24	8	coatings	coating	NOUN
can-1069	24	9	(	(	PUNCT
can-1069	24	10	snp	snp	NOUN
can-1069	24	11	)	)	PUNCT
can-1069	24	12	consisted	consist	VERB
can-1069	24	13	of	of	ADP
can-1069	24	14	low	low	ADJ
can-1069	24	15	-	-	PUNCT
can-1069	24	16	dimensional	dimensional	ADJ
can-1069	24	17	clusters	cluster	NOUN
can-1069	24	18	with	with	ADP
can-1069	24	19	a	a	DET
can-1069	24	20	decisive	decisive	ADJ
can-1069	24	21	influence	influence	NOUN
can-1069	24	22	on	on	ADP
can-1069	24	23	these	these	DET
can-1069	24	24	coatings	coating	NOUN
can-1069	24	25	of	of	ADP
can-1069	24	26	interaction	interaction	NOUN
can-1069	24	27	effects	effect	NOUN
can-1069	24	28	with	with	ADP
can-1069	24	29	the	the	DET
can-1069	24	30	substrate	substrate	NOUN
can-1069	24	31	and	and	CCONJ
can-1069	24	32	vacuum	vacuum	NOUN
can-1069	24	33	.	.	PUNCT
can-1069	25	1	due	due	ADP
can-1069	25	2	to	to	ADP
can-1069	25	3	the	the	DET
can-1069	25	4	influence	influence	NOUN
can-1069	25	5	of	of	ADP
can-1069	25	6	the	the	DET
can-1069	25	7	strained	strained	ADJ
can-1069	25	8	interface	interface	NOUN
can-1069	25	9	on	on	ADP
can-1069	25	10	their	their	PRON
can-1069	25	11	structure	structure	NOUN
can-1069	25	12	and	and	CCONJ
can-1069	25	13	properties	property	NOUN
can-1069	25	14	,	,	PUNCT
can-1069	25	15	these	these	DET
can-1069	25	16	coatings	coating	NOUN
can-1069	25	17	can	can	AUX
can-1069	25	18	have	have	VERB
can-1069	25	19	a	a	DET
can-1069	25	20	set	set	NOUN
can-1069	25	21	of	of	ADP
can-1069	25	22	unique	unique	ADJ
can-1069	25	23	properties	property	NOUN
can-1069	25	24	that	that	PRON
can-1069	25	25	are	be	AUX
can-1069	25	26	absent	absent	ADJ
can-1069	25	27	in	in	ADP
can-1069	25	28	bulk	bulk	ADJ
can-1069	25	29	coatings	coating	NOUN
can-1069	25	30	,	,	PUNCT
can-1069	25	31	as	as	ADV
can-1069	25	32	well	well	ADV
can-1069	25	33	as	as	ADP
can-1069	25	34	in	in	ADP
can-1069	25	35	massive	massive	ADJ
can-1069	25	36	nanophase	nanophase	NOUN
can-1069	25	37	materials	material	NOUN
can-1069	25	38	.	.	PUNCT
can-1069	26	1	it	it	PRON
can-1069	26	2	is	be	AUX
can-1069	26	3	assumed	assume	VERB
can-1069	26	4	that	that	SCONJ
can-1069	26	5	snp	snp	ADJ
can-1069	26	6	coatings	coating	NOUN
can-1069	26	7	will	will	AUX
can-1069	26	8	be	be	AUX
can-1069	26	9	used	use	VERB
can-1069	26	10	in	in	ADP
can-1069	26	11	areas	area	NOUN
can-1069	26	12	of	of	ADP
can-1069	26	13	the	the	DET
can-1069	26	14	nano	nano	NOUN
can-1069	26	15	industry	industry	NOUN
can-1069	26	16	where	where	SCONJ
can-1069	26	17	the	the	DET
can-1069	26	18	use	use	NOUN
can-1069	26	19	of	of	ADP
can-1069	26	20	massive	massive	ADJ
can-1069	26	21	(	(	PUNCT
can-1069	26	22	with	with	ADP
can-1069	26	23	a	a	DET
can-1069	26	24	thickness	thickness	NOUN
can-1069	26	25	of	of	ADP
can-1069	26	26	more	more	ADJ
can-1069	26	27	than	than	ADP
can-1069	26	28	1	1	NUM
can-1069	26	29	nanometer	nanometer	NOUN
can-1069	26	30	)	)	PUNCT
can-1069	26	31	and	and	CCONJ
can-1069	26	32	high	high	ADJ
can-1069	26	33	-	-	PUNCT
can-1069	26	34	stable	stable	ADJ
can-1069	26	35	coatings	coating	NOUN
can-1069	26	36	is	be	AUX
can-1069	26	37	not	not	PART
can-1069	26	38	required	require	VERB
can-1069	26	39	.	.	PUNCT
can-1069	27	1	namely	namely	ADV
can-1069	27	2	,	,	PUNCT
can-1069	27	3	when	when	SCONJ
can-1069	27	4	the	the	DET
can-1069	27	5	coating	coating	NOUN
can-1069	27	6	can	can	AUX
can-1069	27	7	be	be	AUX
can-1069	27	8	non	non	ADJ
can-1069	27	9	-	-	ADJ
can-1069	27	10	equilibrium	equilibrium	NOUN
can-1069	27	11	and	and	CCONJ
can-1069	27	12	metastable	metastable	ADJ
can-1069	27	13	and	and	CCONJ
can-1069	27	14	have	have	VERB
can-1069	27	15	a	a	DET
can-1069	27	16	nanometer	nanometer	NOUN
can-1069	27	17	thickness	thickness	NOUN
can-1069	27	18	.	.	PUNCT
can-1069	28	1	the	the	DET
can-1069	28	2	problem	problem	NOUN
can-1069	28	3	of	of	ADP
can-1069	28	4	creating	create	VERB
can-1069	28	5	snp	snp	ADJ
can-1069	28	6	coatings	coating	NOUN
can-1069	28	7	is	be	AUX
can-1069	28	8	associated	associate	VERB
can-1069	28	9	with	with	ADP
can-1069	28	10	the	the	DET
can-1069	28	11	methods	method	NOUN
can-1069	28	12	of	of	ADP
can-1069	28	13	their	their	PRON
can-1069	28	14	synthesis	synthesis	NOUN
can-1069	28	15	,	,	PUNCT
can-1069	28	16	as	as	ADV
can-1069	28	17	well	well	ADV
can-1069	28	18	as	as	ADP
can-1069	28	19	with	with	ADP
can-1069	28	20	the	the	DET
can-1069	28	21	methods	method	NOUN
can-1069	28	22	of	of	ADP
can-1069	28	23	structural	structural	ADJ
can-1069	28	24	-	-	PUNCT
can-1069	28	25	phase	phase	NOUN
can-1069	28	26	diagnosis	diagnosis	NOUN
can-1069	28	27	of	of	ADP
can-1069	28	28	their	their	PRON
can-1069	28	29	state	state	NOUN
can-1069	28	30	and	and	CCONJ
can-1069	28	31	diagnosis	diagnosis	NOUN
can-1069	28	32	of	of	ADP
can-1069	28	33	their	their	PRON
can-1069	28	34	properties	property	NOUN
can-1069	28	35	,	,	PUNCT
can-1069	28	36	both	both	CCONJ
can-1069	28	37	in	in	ADP
can-1069	28	38	the	the	DET
can-1069	28	39	process	process	NOUN
can-1069	28	40	of	of	ADP
can-1069	28	41	obtaining	obtain	VERB
can-1069	28	42	these	these	DET
can-1069	28	43	coatings	coating	NOUN
can-1069	28	44	and	and	CCONJ
can-1069	28	45	at	at	ADP
can-1069	28	46	its	its	PRON
can-1069	28	47	completion	completion	NOUN
can-1069	28	48	.	.	PUNCT
can-1069	29	1	the	the	DET
can-1069	29	2	combination	combination	NOUN
can-1069	29	3	of	of	ADP
can-1069	29	4	the	the	DET
can-1069	29	5	synthesis	synthesis	NOUN
can-1069	29	6	and	and	CCONJ
can-1069	29	7	growth	growth	NOUN
can-1069	29	8	control	control	NOUN
can-1069	29	9	of	of	ADP
can-1069	29	10	snp	snp	ADJ
can-1069	29	11	coatings	coating	NOUN
can-1069	29	12	in	in	ADP
can-1069	29	13	an	an	DET
can-1069	29	14	ultrahigh	ultrahigh	ADJ
can-1069	29	15	vacuum	vacuum	NOUN
can-1069	29	16	environment	environment	NOUN
can-1069	29	17	allows	allow	VERB
can-1069	29	18	reducing	reduce	VERB
can-1069	29	19	the	the	DET
can-1069	29	20	number	number	NOUN
can-1069	29	21	of	of	ADP
can-1069	29	22	control	control	NOUN
can-1069	29	23	cycles	cycle	NOUN
can-1069	29	24	and	and	CCONJ
can-1069	29	25	,	,	PUNCT
can-1069	29	26	thus	thus	ADV
can-1069	29	27	,	,	PUNCT
can-1069	29	28	more	more	ADV
can-1069	29	29	effectively	effectively	ADV
can-1069	29	30	finding	find	VERB
can-1069	29	31	nanomaterials	nanomaterial	NOUN
can-1069	29	32	with	with	ADP
can-1069	29	33	the	the	DET
can-1069	29	34	required	require	VERB
can-1069	29	35	properties	property	NOUN
can-1069	29	36	.	.	PUNCT
can-1069	30	1	ultra	ultra	ADJ
can-1069	30	2	-	-	ADJ
can-1069	30	3	high	high	ADJ
can-1069	30	4	vacuum	vacuum	NOUN
can-1069	30	5	(	(	PUNCT
can-1069	30	6	uhv	uhv	PROPN
can-1069	30	7	)	)	PUNCT
can-1069	30	8	is	be	AUX
can-1069	30	9	the	the	DET
can-1069	30	10	most	most	ADV
can-1069	30	11	convenient	convenient	ADJ
can-1069	30	12	and	and	CCONJ
can-1069	30	13	cleanest	clean	ADJ
can-1069	30	14	medium	medium	NOUN
can-1069	30	15	for	for	ADP
can-1069	30	16	controlling	control	VERB
can-1069	30	17	the	the	DET
can-1069	30	18	atomic	atomic	ADJ
can-1069	30	19	and	and	CCONJ
can-1069	30	20	electronic	electronic	ADJ
can-1069	30	21	structure	structure	NOUN
can-1069	30	22	and	and	CCONJ
can-1069	30	23	various	various	ADJ
can-1069	30	24	properties	property	NOUN
can-1069	30	25	of	of	ADP
can-1069	30	26	coatings	coating	NOUN
can-1069	30	27	.	.	PUNCT
can-1069	31	1	uhv	uhv	PROPN
can-1069	31	2	allows	allow	VERB
can-1069	31	3	you	you	PRON
can-1069	31	4	to	to	PART
can-1069	31	5	synthesize	synthesize	VERB
can-1069	31	6	coatings	coating	NOUN
can-1069	31	7	from	from	ADP
can-1069	31	8	atomic	atomic	ADJ
can-1069	31	9	or	or	CCONJ
can-1069	31	10	molecular	molecular	ADJ
can-1069	31	11	beams	beam	NOUN
can-1069	31	12	[	[	X
can-1069	31	13	2	2	NUM
can-1069	31	14	]	]	PUNCT
can-1069	31	15	and	and	CCONJ
can-1069	31	16	use	use	VERB
can-1069	31	17	electron	electron	NOUN
can-1069	31	18	,	,	PUNCT
can-1069	31	19	ion	ion	NOUN
can-1069	31	20	,	,	PUNCT
can-1069	31	21	and	and	CCONJ
can-1069	31	22	photon	photon	NOUN
can-1069	31	23	beams	beam	NOUN
can-1069	31	24	to	to	PART
can-1069	31	25	diagnose	diagnose	VERB
can-1069	31	26	coatings	coating	NOUN
can-1069	32	1	[	[	X
can-1069	32	2	3	3	NUM
can-1069	32	3	]	]	PUNCT
can-1069	32	4	.	.	PUNCT
can-1069	33	1	in	in	ADP
can-1069	33	2	addition	addition	NOUN
can-1069	33	3	,	,	PUNCT
can-1069	33	4	uhv	uhv	NOUN
can-1069	33	5	-	-	PUNCT
can-1069	33	6	vacuum	vacuum	NOUN
can-1069	33	7	provides	provide	VERB
can-1069	33	8	the	the	DET
can-1069	33	9	ability	ability	NOUN
can-1069	33	10	to	to	PART
can-1069	33	11	control	control	VERB
can-1069	33	12	the	the	DET
can-1069	33	13	surface	surface	NOUN
can-1069	33	14	state	state	NOUN
can-1069	33	15	of	of	ADP
can-1069	33	16	the	the	DET
can-1069	33	17	coatings	coating	NOUN
can-1069	33	18	during	during	ADP
can-1069	33	19	their	their	PRON
can-1069	33	20	synthesis	synthesis	NOUN
can-1069	33	21	and	and	CCONJ
can-1069	33	22	allows	allow	VERB
can-1069	33	23	cyclically	cyclically	ADV
can-1069	33	24	controlling	control	VERB
can-1069	33	25	the	the	DET
can-1069	33	26	formation	formation	NOUN
can-1069	33	27	of	of	ADP
can-1069	33	28	ultrathin	ultrathin	ADJ
can-1069	33	29	layers	layer	NOUN
can-1069	33	30	and	and	CCONJ
can-1069	33	31	their	their	PRON
can-1069	33	32	interfaces	interface	NOUN
can-1069	33	33	,	,	PUNCT
can-1069	33	34	creating	create	VERB
can-1069	33	35	the	the	DET
can-1069	33	36	necessary	necessary	ADJ
can-1069	33	37	composition	composition	NOUN
can-1069	33	38	and	and	CCONJ
can-1069	33	39	structure	structure	NOUN
can-1069	33	40	in	in	ADP
can-1069	33	41	them	they	PRON
can-1069	33	42	.	.	PUNCT
can-1069	34	1	in	in	ADP
can-1069	34	2	addition	addition	NOUN
can-1069	34	3	,	,	PUNCT
can-1069	34	4	uhv	uhv	PROPN
can-1069	34	5	technology	technology	NOUN
can-1069	34	6	(	(	PUNCT
can-1069	34	7	uhvt	uhvt	PROPN
can-1069	34	8	)	)	PUNCT
can-1069	34	9	similar	similar	ADJ
can-1069	34	10	to	to	ADP
can-1069	34	11	nanotechnology	nanotechnology	NOUN
can-1069	34	12	(	(	PUNCT
can-1069	34	13	nt	not	PART
can-1069	34	14	)	)	PUNCT
can-1069	34	15	is	be	AUX
can-1069	34	16	high	high	ADJ
can-1069	34	17	-	-	PUNCT
can-1069	34	18	tech	tech	NOUN
can-1069	34	19	technology	technology	NOUN
can-1069	34	20	and	and	CCONJ
can-1069	34	21	use	use	VERB
can-1069	34	22	controlled	control	VERB
can-1069	34	23	manipulations	manipulation	NOUN
can-1069	34	24	with	with	ADP
can-1069	34	25	individual	individual	ADJ
can-1069	34	26	atoms	atom	NOUN
can-1069	34	27	and	and	CCONJ
can-1069	34	28	molecules	molecule	NOUN
can-1069	34	29	.	.	PUNCT
can-1069	35	1	in	in	ADP
can-1069	35	2	a	a	DET
can-1069	35	3	vacuum	vacuum	NOUN
can-1069	35	4	,	,	PUNCT
can-1069	35	5	particle	particle	NOUN
can-1069	35	6	beams	beam	NOUN
can-1069	35	7	and	and	CCONJ
can-1069	35	8	fields	field	NOUN
can-1069	35	9	can	can	AUX
can-1069	35	10	interact	interact	VERB
can-1069	35	11	on	on	ADP
can-1069	35	12	a	a	DET
can-1069	35	13	solid	solid	ADJ
can-1069	35	14	surface	surface	NOUN
can-1069	35	15	without	without	ADP
can-1069	35	16	interference	interference	NOUN
can-1069	35	17	.	.	PUNCT
can-1069	36	1	this	this	DET
can-1069	36	2	property	property	NOUN
can-1069	36	3	gives	gives	AUX
can-1069	36	4	uhvt	uhvt	VERB
can-1069	36	5	a	a	DET
can-1069	36	6	unique	unique	ADJ
can-1069	36	7	advantage	advantage	NOUN
can-1069	36	8	over	over	ADP
can-1069	36	9	nt	not	PART
can-1069	36	10	in	in	ADP
can-1069	36	11	other	other	ADJ
can-1069	36	12	environments	environment	NOUN
can-1069	36	13	.	.	PUNCT
can-1069	37	1	first	first	ADV
can-1069	37	2	of	of	ADP
can-1069	37	3	all	all	PRON
can-1069	37	4	,	,	PUNCT
can-1069	37	5	it	it	PRON
can-1069	37	6	is	be	AUX
can-1069	37	7	the	the	DET
can-1069	37	8	controllability	controllability	NOUN
can-1069	37	9	of	of	ADP
can-1069	37	10	the	the	DET
can-1069	37	11	synthesis	synthesis	NOUN
can-1069	37	12	of	of	ADP
can-1069	37	13	coatings	coating	NOUN
can-1069	37	14	.	.	PUNCT
can-1069	38	1	another	another	DET
can-1069	38	2	important	important	ADJ
can-1069	38	3	advantage	advantage	NOUN
can-1069	38	4	of	of	ADP
can-1069	38	5	uhvt	uhvt	NOUN
can-1069	38	6	is	be	AUX
can-1069	38	7	the	the	DET
can-1069	38	8	pure	pure	ADJ
can-1069	38	9	conditions	condition	NOUN
can-1069	38	10	for	for	ADP
can-1069	38	11	the	the	DET
can-1069	38	12	synthesis	synthesis	NOUN
can-1069	38	13	and	and	CCONJ
can-1069	38	14	control	control	NOUN
can-1069	38	15	of	of	ADP
can-1069	38	16	coatings	coating	NOUN
can-1069	38	17	.	.	PUNCT
can-1069	39	1	as	as	ADP
can-1069	39	2	for	for	ADP
can-1069	39	3	the	the	DET
can-1069	39	4	lower	low	ADJ
can-1069	39	5	level	level	NOUN
can-1069	39	6	of	of	ADP
can-1069	39	7	practical	practical	ADJ
can-1069	39	8	application	application	NOUN
can-1069	39	9	of	of	ADP
can-1069	39	10	uhvt	uhvt	NOUN
can-1069	39	11	due	due	ADP
can-1069	39	12	to	to	ADP
can-1069	39	13	the	the	DET
can-1069	39	14	high	high	ADJ
can-1069	39	15	cost	cost	NOUN
can-1069	39	16	,	,	PUNCT
can-1069	39	17	this	this	PRON
can-1069	39	18	is	be	AUX
can-1069	39	19	offset	offset	VERB
can-1069	39	20	either	either	CCONJ
can-1069	39	21	by	by	ADP
can-1069	39	22	the	the	DET
can-1069	39	23	high	high	ADJ
can-1069	39	24	cost	cost	NOUN
can-1069	39	25	of	of	ADP
can-1069	39	26	the	the	DET
can-1069	39	27	product	product	NOUN
can-1069	39	28	(	(	PUNCT
can-1069	39	29	for	for	ADP
can-1069	39	30	example	example	NOUN
can-1069	39	31	,	,	PUNCT
can-1069	39	32	in	in	ADP
can-1069	39	33	nanomedicine	nanomedicine	NOUN
can-1069	39	34	)	)	PUNCT
can-1069	39	35	or	or	CCONJ
can-1069	39	36	by	by	ADP
can-1069	39	37	the	the	DET
can-1069	39	38	ability	ability	NOUN
can-1069	39	39	to	to	PART
can-1069	39	40	produce	produce	VERB
can-1069	39	41	a	a	DET
can-1069	39	42	product	product	NOUN
can-1069	39	43	in	in	ADP
can-1069	39	44	the	the	DET
can-1069	39	45	form	form	NOUN
can-1069	39	46	of	of	ADP
can-1069	39	47	a	a	DET
can-1069	39	48	coating	coating	NOUN
can-1069	39	49	on	on	ADP
can-1069	39	50	large	large	ADJ
can-1069	39	51	substrates	substrate	NOUN
can-1069	39	52	(	(	PUNCT
can-1069	39	53	for	for	ADP
can-1069	39	54	example	example	NOUN
can-1069	39	55	,	,	PUNCT
can-1069	39	56	in	in	ADP
can-1069	39	57	the	the	DET
can-1069	39	58	field	field	NOUN
can-1069	39	59	of	of	ADP
can-1069	39	60	solar	solar	ADJ
can-1069	39	61	energy	energy	NOUN
can-1069	39	62	,	,	PUNCT
can-1069	39	63	microelectronics	microelectronic	NOUN
can-1069	39	64	and	and	CCONJ
can-1069	39	65	nanoelectronics	nanoelectronic	NOUN
can-1069	39	66	)	)	PUNCT
can-1069	39	67	.	.	PUNCT
can-1069	40	1	currently	currently	ADV
can-1069	40	2	,	,	PUNCT
can-1069	40	3	methods	method	NOUN
can-1069	40	4	and	and	CCONJ
can-1069	40	5	devices	device	NOUN
can-1069	40	6	for	for	ADP
can-1069	40	7	the	the	DET
can-1069	40	8	synthesis	synthesis	NOUN
can-1069	40	9	and	and	CCONJ
can-1069	40	10	control	control	NOUN
can-1069	40	11	of	of	ADP
can-1069	40	12	coatings	coating	NOUN
can-1069	40	13	in	in	ADP
can-1069	40	14	vacuum	vacuum	NOUN
can-1069	40	15	have	have	AUX
can-1069	40	16	evolved	evolve	VERB
can-1069	40	17	significantly	significantly	ADV
can-1069	40	18	and	and	CCONJ
can-1069	40	19	reached	reach	VERB
can-1069	40	20	a	a	DET
can-1069	40	21	high	high	ADJ
can-1069	40	22	level	level	NOUN
can-1069	40	23	of	of	ADP
can-1069	40	24	perfection	perfection	NOUN
can-1069	40	25	[	[	X
can-1069	40	26	4	4	NUM
can-1069	40	27	]	]	PUNCT
can-1069	40	28	.	.	PUNCT
can-1069	41	1	this	this	PRON
can-1069	41	2	allows	allow	VERB
can-1069	41	3	,	,	PUNCT
can-1069	41	4	in	in	ADP
can-1069	41	5	the	the	DET
can-1069	41	6	main	main	ADJ
can-1069	41	7	,	,	PUNCT
can-1069	41	8	focusing	focus	VERB
can-1069	41	9	not	not	PART
can-1069	41	10	on	on	ADP
can-1069	41	11	creating	create	VERB
can-1069	41	12	these	these	DET
can-1069	41	13	methods	method	NOUN
can-1069	41	14	,	,	PUNCT
can-1069	41	15	but	but	CCONJ
can-1069	41	16	on	on	ADP
can-1069	41	17	their	their	PRON
can-1069	41	18	use	use	NOUN
can-1069	41	19	.	.	PUNCT
can-1069	42	1	however	however	ADV
can-1069	42	2	,	,	PUNCT
can-1069	42	3	the	the	DET
can-1069	42	4	specificity	specificity	NOUN
can-1069	42	5	of	of	ADP
can-1069	42	6	snp	snp	ADJ
can-1069	42	7	coatings	coating	NOUN
can-1069	42	8	,	,	PUNCT
can-1069	42	9	their	their	PRON
can-1069	42	10	non	non	NOUN
can-1069	42	11	-	-	NOUN
can-1069	42	12	equilibri	equilibri	NOUN
can-1069	42	13	um	um	INTJ
can-1069	42	14	,	,	PUNCT
can-1069	42	15	subnanostructural	subnanostructural	ADJ
can-1069	42	16	state	state	NOUN
can-1069	42	17	,	,	PUNCT
can-1069	42	18	requires	require	VERB
can-1069	42	19	more	more	ADV
can-1069	42	20	precise	precise	ADJ
can-1069	42	21	regulation	regulation	NOUN
can-1069	42	22	and	and	CCONJ
can-1069	42	23	a	a	DET
can-1069	42	24	wider	wide	ADJ
can-1069	42	25	range	range	NOUN
can-1069	42	26	of	of	ADP
can-1069	42	27	growth	growth	NOUN
can-1069	42	28	parameters	parameter	NOUN
can-1069	42	29	.	.	PUNCT
can-1069	43	1	for	for	ADP
can-1069	43	2	this	this	PRON
can-1069	43	3	,	,	PUNCT
can-1069	43	4	it	it	PRON
can-1069	43	5	is	be	AUX
can-1069	43	6	necessary	necessary	ADJ
can-1069	43	7	to	to	PART
can-1069	43	8	develop	develop	VERB
can-1069	43	9	methods	method	NOUN
can-1069	43	10	for	for	ADP
can-1069	43	11	producing	produce	VERB
can-1069	43	12	directed	direct	VERB
can-1069	43	13	atomic	atomic	ADJ
can-1069	43	14	beams	beam	NOUN
can-1069	43	15	,	,	PUNCT
can-1069	43	16	which	which	PRON
can-1069	43	17	will	will	AUX
can-1069	43	18	have	have	VERB
can-1069	43	19	a	a	DET
can-1069	43	20	higher	high	ADJ
can-1069	43	21	density	density	NOUN
can-1069	43	22	and	and	CCONJ
can-1069	43	23	simultaneously	simultaneously	ADV
can-1069	43	24	lower	low	ADJ
can-1069	43	25	temperature	temperature	NOUN
can-1069	43	26	or	or	CCONJ
can-1069	43	27	kinetic	kinetic	ADJ
can-1069	43	28	energy	energy	NOUN
can-1069	43	29	.	.	PUNCT
can-1069	44	1	in	in	ADP
can-1069	44	2	addition	addition	NOUN
can-1069	44	3	,	,	PUNCT
can-1069	44	4	the	the	DET
can-1069	44	5	structure	structure	NOUN
can-1069	44	6	-	-	PUNCT
can-1069	44	7	phase	phase	NOUN
can-1069	44	8	specificity	specificity	NOUN
can-1069	44	9	of	of	ADP
can-1069	44	10	snp	snp	ADJ
can-1069	44	11	coatings	coating	NOUN
can-1069	44	12	,	,	PUNCT
can-1069	44	13	which	which	PRON
can-1069	44	14	differs	differ	VERB
can-1069	44	15	in	in	ADP
can-1069	44	16	their	their	PRON
can-1069	44	17	atomic	atomic	ADJ
can-1069	44	18	density	density	NOUN
can-1069	44	19	and	and	CCONJ
can-1069	44	20	interatomic	interatomic	ADJ
can-1069	44	21	bonding	bonding	NOUN
can-1069	44	22	configuration	configuration	NOUN
can-1069	44	23	from	from	ADP
can-1069	44	24	bulk	bulk	ADJ
can-1069	44	25	phases	phase	NOUN
can-1069	44	26	,	,	PUNCT
can-1069	44	27	requires	require	VERB
can-1069	44	28	the	the	DET
can-1069	44	29	further	further	ADJ
can-1069	44	30	development	development	NOUN
can-1069	44	31	of	of	ADP
can-1069	44	32	more	more	ADV
can-1069	44	33	adequate	adequate	ADJ
can-1069	44	34	methods	method	NOUN
can-1069	44	35	of	of	ADP
can-1069	44	36	structural	structural	ADJ
can-1069	44	37	-	-	PUNCT
can-1069	44	38	phase	phase	NOUN
can-1069	44	39	analysis	analysis	NOUN
can-1069	44	40	directly	directly	ADV
can-1069	44	41	during	during	ADP
can-1069	44	42	synthesis	synthesis	NOUN
can-1069	44	43	.	.	PUNCT
can-1069	45	1	therefore	therefore	ADV
can-1069	45	2	,	,	PUNCT
can-1069	45	3	it	it	PRON
can-1069	45	4	is	be	AUX
can-1069	45	5	necessary	necessary	ADJ
can-1069	45	6	to	to	PART
can-1069	45	7	increase	increase	VERB
can-1069	45	8	the	the	DET
can-1069	45	9	sensitivity	sensitivity	NOUN
can-1069	45	10	of	of	ADP
can-1069	45	11	these	these	DET
can-1069	45	12	methods	method	NOUN
can-1069	45	13	or	or	CCONJ
can-1069	45	14	adapt	adapt	VERB
can-1069	45	15	them	they	PRON
can-1069	45	16	to	to	ADP
can-1069	45	17	the	the	DET
can-1069	45	18	subnanometric	subnanometric	ADJ
can-1069	45	19	sample	sample	NOUN
can-1069	45	20	thickness	thickness	NOUN
can-1069	45	21	and	and	CCONJ
can-1069	45	22	to	to	PART
can-1069	45	23	work	work	VERB
can-1069	45	24	in	in	ADP
can-1069	45	25	real	real	ADJ
can-1069	45	26	time	time	NOUN
can-1069	45	27	.	.	PUNCT
can-1069	46	1	the	the	DET
can-1069	46	2	solution	solution	NOUN
can-1069	46	3	of	of	ADP
can-1069	46	4	these	these	DET
can-1069	46	5	problems	problem	NOUN
can-1069	46	6	will	will	AUX
can-1069	46	7	allow	allow	VERB
can-1069	46	8	creating	create	VERB
can-1069	46	9	new	new	ADJ
can-1069	46	10	types	type	NOUN
can-1069	46	11	of	of	ADP
can-1069	46	12	nanomaterials	nanomaterial	NOUN
can-1069	46	13	in	in	ADP
can-1069	46	14	a	a	DET
can-1069	46	15	subnanophase	subnanophase	NOUN
can-1069	46	16	state	state	NOUN
can-1069	46	17	.	.	PUNCT
can-1069	47	1	the	the	DET
can-1069	47	2	purpose	purpose	NOUN
can-1069	47	3	of	of	ADP
can-1069	47	4	this	this	DET
can-1069	47	5	work	work	NOUN
can-1069	47	6	is	be	AUX
can-1069	47	7	to	to	PART
can-1069	47	8	develop	develop	VERB
can-1069	47	9	an	an	DET
can-1069	47	10	approach	approach	NOUN
can-1069	47	11	to	to	ADP
can-1069	47	12	the	the	DET
can-1069	47	13	self	self	NOUN
can-1069	47	14	-	-	PUNCT
can-1069	47	15	organizing	organize	VERB
can-1069	47	16	synthesis	synthesis	NOUN
can-1069	47	17	of	of	ADP
can-1069	47	18	subnano	subnano	VERB
can-1069	47	19	phase	phase	NOUN
can-1069	47	20	coatings	coating	NOUN
can-1069	47	21	using	use	VERB
can-1069	47	22	physical	physical	ADJ
can-1069	47	23	deposition	deposition	NOUN
can-1069	47	24	of	of	ADP
can-1069	47	25	vapor	vapor	NOUN
can-1069	47	26	phase	phase	NOUN
can-1069	47	27	in	in	ADP
can-1069	47	28	ultrahigh	ultrahigh	ADJ
can-1069	47	29	vacuum	vacuum	NOUN
can-1069	47	30	.	.	PUNCT
can-1069	48	1	83	83	NUM
can-1069	48	2	2	2	NUM
can-1069	48	3	.	.	PUNCT
can-1069	48	4	creating	create	VERB
can-1069	48	5	subnanophase	subnanophase	ADJ
can-1069	48	6	coatings	coating	NOUN
can-1069	48	7	in	in	ADP
can-1069	48	8	vacuum	vacuum	NOUN
can-1069	48	9	for	for	ADP
can-1069	48	10	the	the	DET
can-1069	48	11	synthesis	synthesis	NOUN
can-1069	48	12	of	of	ADP
can-1069	48	13	snp	snp	ADJ
can-1069	48	14	coatings	coating	NOUN
can-1069	48	15	in	in	ADP
can-1069	48	16	vacuum	vacuum	NOUN
can-1069	48	17	,	,	PUNCT
can-1069	48	18	both	both	DET
can-1069	48	19	new	new	ADJ
can-1069	48	20	methods	method	NOUN
can-1069	48	21	of	of	ADP
can-1069	48	22	obtaining	obtain	VERB
can-1069	48	23	atomic	atomic	ADJ
can-1069	48	24	vapor	vapor	NOUN
can-1069	48	25	beams	beam	NOUN
can-1069	48	26	with	with	ADP
can-1069	48	27	low	low	ADJ
can-1069	48	28	thermal	thermal	ADJ
can-1069	48	29	energy	energy	NOUN
can-1069	48	30	of	of	ADP
can-1069	48	31	vapor	vapor	NOUN
can-1069	48	32	are	be	AUX
can-1069	48	33	needed	need	VERB
can-1069	48	34	.	.	PUNCT
can-1069	49	1	also	also	ADV
can-1069	49	2	methods	method	NOUN
can-1069	49	3	of	of	ADP
can-1069	49	4	electron	electron	NOUN
can-1069	49	5	spectroscopy	spectroscopy	NOUN
can-1069	49	6	,	,	PUNCT
can-1069	49	7	microscopy	microscopy	NOUN
can-1069	49	8	and	and	CCONJ
can-1069	49	9	probe	probe	NOUN
can-1069	49	10	measurements	measurement	NOUN
can-1069	49	11	adapted	adapt	VERB
can-1069	49	12	to	to	ADP
can-1069	49	13	snp	snp	ADJ
can-1069	49	14	coatings	coating	NOUN
can-1069	49	15	are	be	AUX
can-1069	49	16	needed	need	VERB
can-1069	49	17	.	.	PUNCT
can-1069	50	1	in	in	ADP
can-1069	50	2	addition	addition	NOUN
can-1069	50	3	,	,	PUNCT
can-1069	50	4	it	it	PRON
can-1069	50	5	is	be	AUX
can-1069	50	6	necessary	necessary	ADJ
can-1069	50	7	to	to	PART
can-1069	50	8	solve	solve	VERB
can-1069	50	9	the	the	DET
can-1069	50	10	following	follow	VERB
can-1069	50	11	list	list	NOUN
can-1069	50	12	of	of	ADP
can-1069	50	13	main	main	ADJ
can-1069	50	14	tasks	task	NOUN
can-1069	50	15	for	for	ADP
can-1069	50	16	obtaining	obtain	VERB
can-1069	50	17	snp	snp	ADJ
can-1069	50	18	coatings	coating	NOUN
can-1069	50	19	:	:	PUNCT
can-1069	50	20	(	(	PUNCT
can-1069	50	21	1	1	X
can-1069	50	22	)	)	PUNCT
can-1069	50	23	to	to	PART
can-1069	50	24	develop	develop	VERB
can-1069	50	25	design	design	NOUN
can-1069	50	26	principles	principle	NOUN
can-1069	50	27	for	for	ADP
can-1069	50	28	their	their	PRON
can-1069	50	29	electronic	electronic	ADJ
can-1069	50	30	and	and	CCONJ
can-1069	50	31	atomic	atomic	ADJ
can-1069	50	32	structure	structure	NOUN
can-1069	50	33	.	.	PUNCT
can-1069	51	1	(	(	PUNCT
can-1069	51	2	2	2	X
can-1069	51	3	)	)	PUNCT
can-1069	51	4	to	to	PART
can-1069	51	5	develop	develop	VERB
can-1069	51	6	the	the	DET
can-1069	51	7	principles	principle	NOUN
can-1069	51	8	of	of	ADP
can-1069	51	9	management	management	NOUN
can-1069	51	10	of	of	ADP
can-1069	51	11	their	their	PRON
can-1069	51	12	growth	growth	NOUN
can-1069	51	13	and	and	CCONJ
can-1069	51	14	self	self	NOUN
can-1069	51	15	-	-	PUNCT
can-1069	51	16	organization	organization	NOUN
can-1069	51	17	by	by	ADP
can-1069	51	18	regulating	regulate	VERB
can-1069	51	19	the	the	DET
can-1069	51	20	density	density	NOUN
can-1069	51	21	and	and	CCONJ
can-1069	51	22	temperature	temperature	NOUN
can-1069	51	23	of	of	ADP
can-1069	51	24	the	the	DET
can-1069	51	25	atomic	atomic	ADJ
can-1069	51	26	vapor	vapor	NOUN
can-1069	51	27	stream	stream	NOUN
can-1069	51	28	,	,	PUNCT
can-1069	51	29	as	as	ADV
can-1069	51	30	well	well	ADV
can-1069	51	31	as	as	ADP
can-1069	51	32	the	the	DET
can-1069	51	33	temperature	temperature	NOUN
can-1069	51	34	of	of	ADP
can-1069	51	35	the	the	DET
can-1069	51	36	substrate	substrate	NOUN
can-1069	51	37	.	.	PUNCT
can-1069	52	1	(	(	PUNCT
can-1069	52	2	3	3	X
can-1069	52	3	)	)	PUNCT
can-1069	52	4	to	to	PART
can-1069	52	5	develop	develop	VERB
can-1069	52	6	principles	principle	NOUN
can-1069	52	7	of	of	ADP
can-1069	52	8	subnanoscale	subnanoscale	ADJ
can-1069	52	9	diagnostics	diagnostic	NOUN
can-1069	52	10	in	in	ADP
can-1069	52	11	real	real	ADJ
can-1069	52	12	time	time	NOUN
can-1069	52	13	of	of	ADP
can-1069	52	14	their	their	PRON
can-1069	52	15	structural	structural	ADJ
can-1069	52	16	-	-	PUNCT
can-1069	52	17	physical	physical	ADJ
can-1069	52	18	and	and	CCONJ
can-1069	52	19	other	other	ADJ
can-1069	52	20	properties	property	NOUN
can-1069	52	21	.	.	PUNCT
can-1069	53	1	for	for	ADP
can-1069	53	2	this	this	PRON
can-1069	53	3	,	,	PUNCT
can-1069	53	4	it	it	PRON
can-1069	53	5	is	be	AUX
can-1069	53	6	necessary	necessary	ADJ
can-1069	53	7	to	to	PART
can-1069	53	8	conduct	conduct	VERB
can-1069	53	9	both	both	DET
can-1069	53	10	theoretical	theoretical	ADJ
can-1069	53	11	studies	study	NOUN
can-1069	53	12	(	(	PUNCT
can-1069	53	13	including	include	VERB
can-1069	53	14	computer	computer	NOUN
can-1069	53	15	simulation	simulation	NOUN
can-1069	53	16	)	)	PUNCT
can-1069	53	17	and	and	CCONJ
can-1069	53	18	experimental	experimental	ADJ
can-1069	53	19	studies	study	NOUN
can-1069	53	20	.	.	PUNCT
can-1069	54	1	deposition	deposition	NOUN
can-1069	54	2	from	from	ADP
can-1069	54	3	the	the	DET
can-1069	54	4	vapor	vapor	NOUN
can-1069	54	5	phase	phase	NOUN
can-1069	54	6	in	in	ADP
can-1069	54	7	vacuum	vacuum	NOUN
can-1069	54	8	at	at	ADP
can-1069	54	9	a	a	DET
can-1069	54	10	low	low	ADJ
can-1069	54	11	substrate	substrate	NOUN
can-1069	54	12	temperature	temperature	NOUN
can-1069	54	13	usually	usually	ADV
can-1069	54	14	provides	provide	VERB
can-1069	54	15	a	a	DET
can-1069	54	16	non	non	ADJ
can-1069	54	17	-	-	NOUN
can-1069	54	18	equilibrium	equilibrium	NOUN
can-1069	54	19	and	and	CCONJ
can-1069	54	20	,	,	PUNCT
can-1069	54	21	in	in	ADP
can-1069	54	22	particular	particular	ADJ
can-1069	54	23	,	,	PUNCT
can-1069	54	24	nanophase	nanophase	VERB
can-1069	54	25	state	state	NOUN
can-1069	54	26	of	of	ADP
can-1069	54	27	the	the	DET
can-1069	54	28	coating	coating	NOUN
can-1069	54	29	[	[	X
can-1069	54	30	5	5	NUM
can-1069	54	31	]	]	PUNCT
can-1069	54	32	.	.	PUNCT
can-1069	55	1	however	however	ADV
can-1069	55	2	,	,	PUNCT
can-1069	55	3	to	to	PART
can-1069	55	4	obtain	obtain	VERB
can-1069	55	5	a	a	DET
can-1069	55	6	thinner	thin	ADJ
can-1069	55	7	coating	coating	NOUN
can-1069	55	8	in	in	ADP
can-1069	55	9	a	a	DET
can-1069	55	10	sub	sub	ADJ
can-1069	55	11	-	-	ADJ
can-1069	55	12	nanophase	nanophase	ADJ
can-1069	55	13	state	state	NOUN
can-1069	55	14	,	,	PUNCT
can-1069	55	15	this	this	PRON
can-1069	55	16	is	be	AUX
can-1069	55	17	not	not	PART
can-1069	55	18	enough	enough	ADJ
can-1069	55	19	.	.	PUNCT
can-1069	56	1	high	high	ADJ
can-1069	56	2	kinetic	kinetic	ADJ
can-1069	56	3	energy	energy	NOUN
can-1069	56	4	of	of	ADP
can-1069	56	5	vapor	vapor	NOUN
can-1069	56	6	and	and	CCONJ
can-1069	56	7	latent	latent	NOUN
can-1069	56	8	heat	heat	NOUN
can-1069	56	9	of	of	ADP
can-1069	56	10	phase	phase	NOUN
can-1069	56	11	transitions	transition	NOUN
can-1069	56	12	in	in	ADP
can-1069	56	13	coating	coating	NOUN
can-1069	56	14	lead	lead	NOUN
can-1069	56	15	to	to	ADP
can-1069	56	16	mixing	mix	VERB
can-1069	56	17	at	at	ADP
can-1069	56	18	the	the	DET
can-1069	56	19	interface	interface	NOUN
can-1069	56	20	and	and	CCONJ
can-1069	56	21	the	the	DET
can-1069	56	22	formation	formation	NOUN
can-1069	56	23	of	of	ADP
can-1069	56	24	alloys	alloy	NOUN
can-1069	56	25	or	or	CCONJ
can-1069	56	26	compounds	compound	NOUN
can-1069	56	27	and	and	CCONJ
can-1069	56	28	additionally	additionally	ADV
can-1069	56	29	cause	cause	VERB
can-1069	56	30	cluster	cluster	NOUN
can-1069	56	31	fusion	fusion	NOUN
can-1069	56	32	into	into	ADP
can-1069	56	33	larger	large	ADJ
can-1069	56	34	islands	island	NOUN
can-1069	56	35	and	and	CCONJ
can-1069	56	36	,	,	PUNCT
can-1069	56	37	thus	thus	ADV
can-1069	56	38	,	,	PUNCT
can-1069	56	39	coarsening	coarsening	NOUN
can-1069	56	40	of	of	ADP
can-1069	56	41	the	the	DET
can-1069	56	42	grains	grain	NOUN
can-1069	56	43	and	and	CCONJ
can-1069	56	44	transition	transition	NOUN
can-1069	56	45	to	to	ADP
can-1069	56	46	the	the	DET
can-1069	56	47	bulk	bulk	ADJ
can-1069	56	48	phase	phase	NOUN
can-1069	56	49	[	[	X
can-1069	56	50	6	6	NUM
can-1069	56	51	]	]	PUNCT
can-1069	56	52	.	.	PUNCT
can-1069	57	1	the	the	DET
can-1069	57	2	obvious	obvious	ADJ
can-1069	57	3	way	way	NOUN
can-1069	57	4	to	to	PART
can-1069	57	5	solve	solve	VERB
can-1069	57	6	this	this	DET
can-1069	57	7	problem	problem	NOUN
can-1069	57	8	is	be	AUX
can-1069	57	9	to	to	PART
can-1069	57	10	evaporate	evaporate	VERB
can-1069	57	11	the	the	DET
can-1069	57	12	material	material	NOUN
can-1069	57	13	at	at	ADP
can-1069	57	14	a	a	DET
can-1069	57	15	source	source	NOUN
can-1069	57	16	with	with	ADP
can-1069	57	17	a	a	DET
can-1069	57	18	low	low	ADJ
can-1069	57	19	vapor	vapor	NOUN
can-1069	57	20	temperature	temperature	NOUN
can-1069	58	1	[	[	X
can-1069	58	2	6,7	6,7	NUM
can-1069	58	3	]	]	PUNCT
can-1069	58	4	,	,	PUNCT
can-1069	58	5	as	as	ADV
can-1069	58	6	well	well	ADV
can-1069	58	7	as	as	ADP
can-1069	58	8	decreasing	decrease	VERB
can-1069	58	9	the	the	DET
can-1069	58	10	diffusion	diffusion	NOUN
can-1069	58	11	and	and	CCONJ
can-1069	58	12	chemical	chemical	NOUN
can-1069	58	13	interaction	interaction	NOUN
can-1069	58	14	of	of	ADP
can-1069	58	15	the	the	DET
can-1069	58	16	coating	coating	NOUN
can-1069	58	17	with	with	ADP
can-1069	58	18	the	the	DET
can-1069	58	19	substrate	substrate	NOUN
can-1069	58	20	using	use	VERB
can-1069	58	21	a	a	DET
can-1069	58	22	subor	subor	ADJ
can-1069	58	23	single	single	ADJ
can-1069	58	24	-	-	PUNCT
can-1069	58	25	molecular	molecular	ADJ
can-1069	58	26	intermediate	intermediate	ADJ
can-1069	58	27	layer	layer	NOUN
can-1069	59	1	[	[	X
can-1069	59	2	8	8	NUM
can-1069	59	3	]	]	PUNCT
can-1069	59	4	.	.	PUNCT
can-1069	60	1	also	also	ADV
can-1069	60	2	,	,	PUNCT
can-1069	60	3	it	it	PRON
can-1069	60	4	is	be	AUX
can-1069	60	5	necessary	necessary	ADJ
can-1069	60	6	to	to	PART
can-1069	60	7	modify	modify	VERB
can-1069	60	8	the	the	DET
can-1069	60	9	methods	method	NOUN
can-1069	60	10	for	for	ADP
can-1069	60	11	monitoring	monitor	VERB
can-1069	60	12	the	the	DET
can-1069	60	13	structural	structural	ADJ
can-1069	60	14	state	state	NOUN
can-1069	60	15	of	of	ADP
can-1069	60	16	the	the	DET
can-1069	60	17	coating	coating	NOUN
can-1069	60	18	and	and	CCONJ
can-1069	60	19	the	the	DET
can-1069	60	20	interface	interface	NOUN
can-1069	60	21	layer	layer	NOUN
can-1069	60	22	thickness	thickness	NOUN
can-1069	60	23	during	during	ADP
can-1069	60	24	the	the	DET
can-1069	60	25	growth	growth	NOUN
can-1069	60	26	of	of	ADP
can-1069	60	27	coatings	coating	NOUN
can-1069	60	28	[	[	X
can-1069	60	29	7,9,10	7,9,10	NOUN
can-1069	60	30	]	]	PUNCT
can-1069	60	31	.	.	PUNCT
can-1069	61	1	the	the	DET
can-1069	61	2	possibility	possibility	NOUN
can-1069	61	3	of	of	ADP
can-1069	61	4	realizing	realize	VERB
can-1069	61	5	the	the	DET
can-1069	61	6	self	self	NOUN
can-1069	61	7	-	-	PUNCT
can-1069	61	8	organizati	organizati	NOUN
can-1069	61	9	on	on	ADP
can-1069	61	10	of	of	ADP
can-1069	61	11	snp	snp	ADJ
can-1069	61	12	coatings	coating	NOUN
can-1069	61	13	from	from	ADP
can-1069	61	14	the	the	DET
can-1069	61	15	vapor	vapor	NOUN
can-1069	61	16	phase	phase	NOUN
can-1069	61	17	or	or	CCONJ
can-1069	61	18	atomic	atomic	ADJ
can-1069	61	19	beam	beam	NOUN
can-1069	61	20	was	be	AUX
can-1069	61	21	first	first	ADV
can-1069	61	22	shown	show	VERB
can-1069	61	23	by	by	ADP
can-1069	61	24	the	the	DET
can-1069	61	25	example	example	NOUN
can-1069	61	26	of	of	ADP
can-1069	61	27	metal	metal	NOUN
can-1069	61	28	growth	growth	NOUN
can-1069	61	29	on	on	ADP
can-1069	61	30	the	the	DET
can-1069	61	31	surface	surface	NOUN
can-1069	61	32	of	of	ADP
can-1069	61	33	a	a	DET
can-1069	61	34	single	single	ADJ
can-1069	61	35	-	-	PUNCT
can-1069	61	36	crystal	crystal	NOUN
can-1069	61	37	silicon	silicon	NOUN
can-1069	61	38	substrate	substrate	NOUN
can-1069	61	39	.	.	PUNCT
can-1069	62	1	such	such	DET
can-1069	62	2	a	a	DET
can-1069	62	3	coating	coating	NOUN
can-1069	62	4	was	be	AUX
can-1069	62	5	first	first	ADV
can-1069	62	6	called	call	VERB
can-1069	62	7	by	by	ADP
can-1069	62	8	a	a	DET
can-1069	62	9	surface	surface	NOUN
can-1069	62	10	multilayer	multilayer	ADJ
can-1069	62	11	phase	phase	NOUN
can-1069	62	12	[	[	X
can-1069	62	13	11,12	11,12	NOUN
can-1069	62	14	]	]	PUNCT
can-1069	62	15	,	,	PUNCT
can-1069	62	16	and	and	CCONJ
can-1069	62	17	then	then	ADV
can-1069	62	18	,	,	PUNCT
can-1069	62	19	a	a	DET
can-1069	62	20	two	two	NUM
can-1069	62	21	-	-	PUNCT
can-1069	62	22	dimensi	dimensi	NOUN
can-1069	62	23	onal	onal	NOUN
can-1069	62	24	nanophase	nanophase	NOUN
can-1069	63	1	[	[	X
can-1069	63	2	13,14	13,14	NUM
can-1069	63	3	]	]	PUNCT
can-1069	63	4	.	.	PUNCT
can-1069	64	1	the	the	DET
can-1069	64	2	first	first	ADJ
can-1069	64	3	of	of	ADP
can-1069	64	4	these	these	DET
can-1069	64	5	names	name	NOUN
can-1069	64	6	reflected	reflect	VERB
can-1069	64	7	the	the	DET
can-1069	64	8	view	view	NOUN
can-1069	64	9	on	on	ADP
can-1069	64	10	the	the	DET
can-1069	64	11	stabilizing	stabilize	VERB
can-1069	64	12	role	role	NOUN
can-1069	64	13	of	of	ADP
can-1069	64	14	the	the	DET
can-1069	64	15	substrate	substrate	NOUN
can-1069	64	16	,	,	PUNCT
can-1069	64	17	and	and	CCONJ
can-1069	64	18	the	the	DET
can-1069	64	19	second	second	ADJ
can-1069	64	20	on	on	ADP
can-1069	64	21	the	the	DET
can-1069	64	22	two	two	NUM
can-1069	64	23	-	-	PUNCT
can-1069	64	24	dimensional	dimensional	ADJ
can-1069	64	25	nature	nature	NOUN
can-1069	64	26	of	of	ADP
can-1069	64	27	the	the	DET
can-1069	64	28	snp	snp	NOUN
can-1069	64	29	coating	coating	NOUN
can-1069	64	30	.	.	PUNCT
can-1069	65	1	subsequently	subsequently	ADV
can-1069	65	2	,	,	PUNCT
can-1069	65	3	the	the	DET
can-1069	65	4	snp	snp	ADJ
can-1069	65	5	coating	coating	NOUN
can-1069	65	6	got	get	VERB
can-1069	65	7	the	the	DET
can-1069	65	8	short	short	ADJ
can-1069	65	9	name	name	NOUN
can-1069	65	10	―ν	―ν	NOUN
can-1069	65	11	-	-	PUNCT
can-1069	65	12	phase‖.	phase‖.	NOUN
can-1069	65	13	in	in	ADP
can-1069	65	14	this	this	DET
can-1069	65	15	name	name	NOUN
can-1069	65	16	,	,	PUNCT
can-1069	65	17	the	the	DET
can-1069	65	18	uncertainty	uncertainty	NOUN
can-1069	65	19	and	and	CCONJ
can-1069	65	20	low	low	ADJ
can-1069	65	21	dimension	dimension	NOUN
can-1069	65	22	structure	structure	NOUN
can-1069	65	23	of	of	ADP
can-1069	65	24	the	the	DET
can-1069	65	25	snp	snp	ADJ
can-1069	65	26	coating	coating	NOUN
can-1069	65	27	and	and	CCONJ
can-1069	65	28	,	,	PUNCT
can-1069	65	29	accordingly	accordingly	ADV
can-1069	65	30	,	,	PUNCT
can-1069	65	31	the	the	DET
can-1069	65	32	difficulty	difficulty	NOUN
can-1069	65	33	of	of	ADP
can-1069	65	34	its	its	PRON
can-1069	65	35	identification	identification	NOUN
can-1069	65	36	from	from	ADP
can-1069	65	37	experimental	experimental	ADJ
can-1069	65	38	data	datum	NOUN
can-1069	65	39	were	be	AUX
can-1069	65	40	reflected	reflect	VERB
can-1069	65	41	.	.	PUNCT
can-1069	66	1	indeed	indeed	ADV
can-1069	66	2	,	,	PUNCT
can-1069	66	3	the	the	DET
can-1069	66	4	existing	exist	VERB
can-1069	66	5	variety	variety	NOUN
can-1069	66	6	of	of	ADP
can-1069	66	7	experimental	experimental	ADJ
can-1069	66	8	research	research	NOUN
can-1069	66	9	methods	method	NOUN
can-1069	66	10	(	(	PUNCT
can-1069	66	11	x	x	NOUN
can-1069	66	12	-	-	NOUN
can-1069	66	13	ray	ray	NOUN
can-1069	66	14	,	,	PUNCT
can-1069	66	15	electron	electron	NOUN
can-1069	66	16	,	,	PUNCT
can-1069	66	17	ion	ion	NOUN
can-1069	66	18	,	,	PUNCT
can-1069	66	19	probe	probe	NOUN
can-1069	66	20	microscopy	microscopy	NOUN
can-1069	66	21	and	and	CCONJ
can-1069	66	22	spectroscopy	spectroscopy	NOUN
can-1069	66	23	)	)	PUNCT
can-1069	66	24	is	be	AUX
can-1069	66	25	well	well	ADV
can-1069	66	26	developed	develop	VERB
can-1069	66	27	for	for	ADP
can-1069	66	28	the	the	DET
can-1069	66	29	study	study	NOUN
can-1069	66	30	of	of	ADP
can-1069	66	31	single	single	ADJ
can-1069	66	32	-	-	PUNCT
can-1069	66	33	crystal	crystal	NOUN
can-1069	66	34	,	,	PUNCT
can-1069	66	35	amorphous	amorphous	ADJ
can-1069	66	36	and	and	CCONJ
can-1069	66	37	even	even	ADV
can-1069	66	38	quasicrystalline	quasicrystalline	VERB
can-1069	66	39	homogeneous	homogeneous	ADJ
can-1069	66	40	structural	structural	ADJ
can-1069	66	41	state	state	NOUN
can-1069	66	42	.	.	PUNCT
can-1069	67	1	but	but	CCONJ
can-1069	67	2	,	,	PUNCT
can-1069	67	3	in	in	ADP
can-1069	67	4	the	the	DET
can-1069	67	5	case	case	NOUN
can-1069	67	6	of	of	ADP
can-1069	67	7	low	low	ADV
can-1069	67	8	-	-	PUNCT
can-1069	67	9	dimensional	dimensional	ADJ
can-1069	67	10	,	,	PUNCT
can-1069	67	11	disordered	disordered	ADJ
can-1069	67	12	and	and	CCONJ
can-1069	67	13	,	,	PUNCT
can-1069	67	14	in	in	ADP
can-1069	67	15	general	general	ADJ
can-1069	67	16	,	,	PUNCT
can-1069	67	17	non	non	ADJ
can-1069	67	18	-	-	ADJ
can-1069	67	19	uniform	uniform	ADJ
can-1069	67	20	coating	coating	NOUN
can-1069	67	21	,	,	PUNCT
can-1069	67	22	most	most	ADJ
can-1069	67	23	of	of	ADP
can-1069	67	24	these	these	DET
can-1069	67	25	methods	method	NOUN
can-1069	67	26	do	do	AUX
can-1069	67	27	not	not	PART
can-1069	67	28	allow	allow	VERB
can-1069	67	29	identifying	identify	VERB
can-1069	67	30	this	this	DET
can-1069	67	31	coating	coating	NOUN
can-1069	67	32	and	and	CCONJ
can-1069	67	33	separating	separate	VERB
can-1069	67	34	them	they	PRON
can-1069	67	35	from	from	ADP
can-1069	67	36	bulk	bulk	ADJ
can-1069	67	37	homogeneous	homogeneous	ADJ
can-1069	67	38	phases	phase	NOUN
can-1069	67	39	.	.	PUNCT
can-1069	68	1	as	as	ADP
can-1069	68	2	a	a	DET
can-1069	68	3	result	result	NOUN
can-1069	68	4	,	,	PUNCT
can-1069	68	5	the	the	DET
can-1069	68	6	snp	snp	ADJ
can-1069	68	7	coating	coating	NOUN
can-1069	68	8	is	be	AUX
can-1069	68	9	often	often	ADV
can-1069	68	10	interpreted	interpret	VERB
can-1069	68	11	as	as	ADP
can-1069	68	12	a	a	DET
can-1069	68	13	mixture	mixture	NOUN
can-1069	68	14	of	of	ADP
can-1069	68	15	some	some	DET
can-1069	68	16	bulk	bulk	ADJ
can-1069	68	17	phases	phase	NOUN
can-1069	68	18	.	.	PUNCT
can-1069	69	1	nevertheless	nevertheless	ADV
can-1069	69	2	,	,	PUNCT
can-1069	69	3	the	the	DET
can-1069	69	4	method	method	NOUN
can-1069	69	5	of	of	ADP
can-1069	69	6	electron	electron	NOUN
can-1069	69	7	spectroscopy	spectroscopy	NOUN
can-1069	69	8	of	of	ADP
can-1069	69	9	characteristic	characteristic	ADJ
can-1069	69	10	electron	electron	NOUN
can-1069	69	11	energy	energy	NOUN
can-1069	69	12	loss	loss	NOUN
can-1069	69	13	(	(	PUNCT
can-1069	69	14	eels	eel	NOUN
can-1069	69	15	)	)	PUNCT
can-1069	69	16	allowed	allow	VERB
can-1069	69	17	us	we	PRON
can-1069	69	18	to	to	PART
can-1069	69	19	identify	identify	VERB
can-1069	69	20	the	the	DET
can-1069	69	21	integral	integral	ADJ
can-1069	69	22	structure	structure	NOUN
can-1069	69	23	of	of	ADP
can-1069	69	24	the	the	DET
can-1069	69	25	ν	ν	NOUN
can-1069	69	26	-	-	NOUN
can-1069	69	27	phase	phase	NOUN
can-1069	69	28	,	,	PUNCT
can-1069	69	29	namely	namely	ADV
can-1069	69	30	the	the	DET
can-1069	69	31	structure	structure	NOUN
can-1069	69	32	of	of	ADP
can-1069	69	33	its	its	PRON
can-1069	69	34	electron	electron	NOUN
can-1069	69	35	density	density	NOUN
can-1069	69	36	and	and	CCONJ
can-1069	69	37	,	,	PUNCT
can-1069	69	38	indirectly	indirectly	ADV
can-1069	69	39	,	,	PUNCT
can-1069	69	40	of	of	ADP
can-1069	69	41	its	its	PRON
can-1069	69	42	atomic	atomic	ADJ
can-1069	69	43	density	density	NOUN
can-1069	69	44	.	.	PUNCT
can-1069	70	1	indeed	indeed	ADV
can-1069	70	2	,	,	PUNCT
can-1069	70	3	the	the	DET
can-1069	70	4	energy	energy	NOUN
can-1069	70	5	position	position	NOUN
can-1069	70	6	of	of	ADP
can-1069	70	7	the	the	DET
can-1069	70	8	loss	loss	NOUN
can-1069	70	9	peak	peak	NOUN
can-1069	70	10	in	in	ADP
can-1069	70	11	the	the	DET
can-1069	70	12	eels	eel	NOUN
can-1069	70	13	spectrum	spectrum	VERB
can-1069	70	14	connected	connect	VERB
can-1069	70	15	with	with	ADP
can-1069	70	16	the	the	DET
can-1069	70	17	excitation	excitation	NOUN
can-1069	70	18	of	of	ADP
can-1069	70	19	a	a	DET
can-1069	70	20	volume	volume	NOUN
can-1069	70	21	plasmon	plasmon	NOUN
can-1069	70	22	gives	give	VERB
can-1069	70	23	information	information	NOUN
can-1069	70	24	about	about	ADP
can-1069	70	25	the	the	DET
can-1069	70	26	oscillation	oscillation	NOUN
can-1069	70	27	frequency	frequency	NOUN
can-1069	70	28	of	of	ADP
can-1069	70	29	the	the	DET
can-1069	70	30	plasma	plasma	NOUN
can-1069	70	31	of	of	ADP
can-1069	70	32	valence	valence	NOUN
can-1069	70	33	electrons	electron	NOUN
can-1069	70	34	in	in	ADP
can-1069	70	35	the	the	DET
can-1069	70	36	local	local	ADJ
can-1069	70	37	region	region	NOUN
can-1069	70	38	in	in	ADP
can-1069	70	39	which	which	PRON
can-1069	70	40	the	the	DET
can-1069	70	41	electron	electron	NOUN
can-1069	70	42	loses	lose	VERB
can-1069	70	43	its	its	PRON
can-1069	70	44	energy	energy	NOUN
can-1069	70	45	.	.	PUNCT
can-1069	71	1	and	and	CCONJ
can-1069	71	2	the	the	DET
can-1069	71	3	oscillation	oscillation	NOUN
can-1069	71	4	frequency	frequency	NOUN
can-1069	71	5	,	,	PUNCT
can-1069	71	6	in	in	ADP
can-1069	71	7	turn	turn	NOUN
can-1069	71	8	,	,	PUNCT
can-1069	71	9	gives	give	VERB
can-1069	71	10	information	information	NOUN
can-1069	71	11	about	about	ADP
can-1069	71	12	the	the	DET
can-1069	71	13	density	density	NOUN
can-1069	71	14	of	of	ADP
can-1069	71	15	valence	valence	NOUN
can-1069	71	16	electrons	electron	NOUN
can-1069	71	17	and	and	CCONJ
can-1069	71	18	,	,	PUNCT
can-1069	71	19	indirectly	indirectly	ADV
can-1069	71	20	,	,	PUNCT
can-1069	71	21	about	about	ADP
can-1069	71	22	the	the	DET
can-1069	71	23	density	density	NOUN
can-1069	71	24	of	of	ADP
can-1069	71	25	atoms	atom	NOUN
can-1069	71	26	that	that	PRON
can-1069	71	27	donate	donate	VERB
can-1069	71	28	their	their	PRON
can-1069	71	29	electrons	electron	NOUN
can-1069	71	30	to	to	ADP
can-1069	71	31	a	a	DET
can-1069	71	32	valence	valence	NOUN
can-1069	71	33	bond	bond	NOUN
can-1069	71	34	of	of	ADP
can-1069	71	35	one	one	NUM
can-1069	71	36	or	or	CCONJ
can-1069	71	37	another	another	DET
can-1069	71	38	type	type	NOUN
can-1069	71	39	.	.	PUNCT
can-1069	72	1	for	for	ADP
can-1069	72	2	a	a	DET
can-1069	72	3	solid	solid	ADJ
can-1069	72	4	,	,	PUNCT
can-1069	72	5	an	an	DET
can-1069	72	6	approximation	approximation	NOUN
can-1069	72	7	of	of	ADP
can-1069	72	8	solid	solid	ADJ
can-1069	72	9	balls	ball	NOUN
can-1069	72	10	is	be	AUX
can-1069	72	11	usually	usually	ADV
can-1069	72	12	used	use	VERB
can-1069	72	13	.	.	PUNCT
can-1069	73	1	in	in	ADP
can-1069	73	2	this	this	DET
can-1069	73	3	model	model	NOUN
can-1069	73	4	,	,	PUNCT
can-1069	73	5	atoms	atom	NOUN
can-1069	73	6	are	be	AUX
can-1069	73	7	very	very	ADV
can-1069	73	8	tightly	tightly	ADV
can-1069	73	9	packed	pack	VERB
can-1069	73	10	like	like	ADP
can-1069	73	11	solid	solid	ADJ
can-1069	73	12	balls	ball	NOUN
can-1069	73	13	.	.	PUNCT
can-1069	74	1	with	with	ADP
can-1069	74	2	this	this	PRON
can-1069	74	3	,	,	PUNCT
can-1069	74	4	the	the	DET
can-1069	74	5	densest	dense	ADJ
can-1069	74	6	packing	packing	NOUN
can-1069	74	7	is	be	AUX
can-1069	74	8	realized	realize	VERB
can-1069	74	9	in	in	ADP
can-1069	74	10	an	an	DET
can-1069	74	11	ordered	order	VERB
can-1069	74	12	lattice	lattice	NOUN
can-1069	74	13	—	—	PUNCT
can-1069	74	14	in	in	ADP
can-1069	74	15	a	a	DET
can-1069	74	16	crystal	crystal	NOUN
can-1069	74	17	.	.	PUNCT
can-1069	75	1	but	but	CCONJ
can-1069	75	2	,	,	PUNCT
can-1069	75	3	in	in	ADP
can-1069	75	4	the	the	DET
can-1069	75	5	crystal	crystal	NOUN
can-1069	75	6	,	,	PUNCT
can-1069	75	7	one	one	PRON
can-1069	75	8	can	can	AUX
can-1069	75	9	break	break	VERB
can-1069	75	10	the	the	DET
can-1069	75	11	dense	dense	ADJ
can-1069	75	12	structure	structure	NOUN
can-1069	75	13	of	of	ADP
can-1069	75	14	the	the	DET
can-1069	75	15	packing	packing	NOUN
can-1069	75	16	by	by	ADP
can-1069	75	17	means	mean	NOUN
can-1069	75	18	of	of	ADP
can-1069	75	19	subjecting	subject	VERB
can-1069	75	20	this	this	DET
can-1069	75	21	body	body	NOUN
can-1069	75	22	to	to	ADP
can-1069	75	23	84	84	NUM
can-1069	75	24	stretching	stretching	NOUN
can-1069	75	25	,	,	PUNCT
can-1069	75	26	inserting	insert	VERB
can-1069	75	27	vacancies	vacancy	NOUN
can-1069	75	28	and	and	CCONJ
can-1069	75	29	rotating	rotate	VERB
can-1069	75	30	interatomic	interatomic	ADJ
can-1069	75	31	bonds	bond	NOUN
can-1069	75	32	,	,	PUNCT
can-1069	75	33	forming	form	VERB
can-1069	75	34	clusters	cluster	NOUN
can-1069	75	35	and	and	CCONJ
can-1069	75	36	intercluster	intercluster	NOUN
can-1069	75	37	(	(	PUNCT
can-1069	75	38	intergranular	intergranular	NOUN
can-1069	75	39	)	)	PUNCT
can-1069	75	40	defective	defective	ADJ
can-1069	75	41	interfaces	interface	NOUN
can-1069	75	42	,	,	PUNCT
can-1069	75	43	as	as	ADV
can-1069	75	44	well	well	ADV
can-1069	75	45	as	as	ADP
can-1069	75	46	rotating	rotate	VERB
can-1069	75	47	the	the	DET
can-1069	75	48	clusters	cluster	NOUN
can-1069	75	49	themselves	themselves	PRON
can-1069	75	50	relative	relative	ADJ
can-1069	75	51	to	to	ADP
can-1069	75	52	each	each	DET
can-1069	75	53	other	other	ADJ
can-1069	75	54	.	.	PUNCT
can-1069	76	1	something	something	PRON
can-1069	76	2	similar	similar	ADJ
can-1069	76	3	seems	seem	VERB
can-1069	76	4	to	to	PART
can-1069	76	5	be	be	AUX
can-1069	76	6	realized	realize	VERB
can-1069	76	7	in	in	ADP
can-1069	76	8	the	the	DET
can-1069	76	9	ν	ν	NOUN
can-1069	76	10	-	-	NOUN
can-1069	76	11	phase	phase	NOUN
can-1069	76	12	under	under	ADP
can-1069	76	13	the	the	DET
can-1069	76	14	action	action	NOUN
can-1069	76	15	of	of	ADP
can-1069	76	16	tensile	tensile	NOUN
can-1069	76	17	stresses	stress	NOUN
can-1069	76	18	caused	cause	VERB
can-1069	76	19	by	by	ADP
can-1069	76	20	the	the	DET
can-1069	76	21	substrate	substrate	NOUN
can-1069	76	22	and	and	CCONJ
can-1069	76	23	under	under	ADP
can-1069	76	24	the	the	DET
can-1069	76	25	action	action	NOUN
can-1069	76	26	of	of	ADP
can-1069	76	27	its	its	PRON
can-1069	76	28	conjugation	conjugation	NOUN
can-1069	76	29	with	with	ADP
can-1069	76	30	this	this	DET
can-1069	76	31	phase	phase	NOUN
can-1069	76	32	.	.	PUNCT
can-1069	77	1	it	it	PRON
can-1069	77	2	leads	lead	VERB
can-1069	77	3	to	to	ADP
can-1069	77	4	the	the	DET
can-1069	77	5	fact	fact	NOUN
can-1069	77	6	that	that	SCONJ
can-1069	77	7	the	the	DET
can-1069	77	8	atoms	atom	NOUN
can-1069	77	9	in	in	ADP
can-1069	77	10	the	the	DET
can-1069	77	11	phase	phase	NOUN
can-1069	77	12	at	at	ADP
can-1069	77	13	the	the	DET
can-1069	77	14	interface	interface	NOUN
can-1069	77	15	are	be	AUX
can-1069	77	16	not	not	PART
can-1069	77	17	closely	closely	ADV
can-1069	77	18	connected	connect	VERB
can-1069	77	19	to	to	ADP
can-1069	77	20	each	each	DET
can-1069	77	21	other	other	ADJ
can-1069	77	22	and	and	CCONJ
can-1069	77	23	their	their	PRON
can-1069	77	24	packaging	packaging	NOUN
can-1069	77	25	is	be	AUX
can-1069	77	26	not	not	PART
can-1069	77	27	compact	compact	ADJ
can-1069	77	28	.	.	PUNCT
can-1069	78	1	due	due	ADP
can-1069	78	2	to	to	ADP
can-1069	78	3	this	this	PRON
can-1069	78	4	,	,	PUNCT
can-1069	78	5	in	in	ADP
can-1069	78	6	the	the	DET
can-1069	78	7	eels	eel	NOUN
can-1069	78	8	spectrum	spectrum	VERB
can-1069	78	9	of	of	ADP
can-1069	78	10	the	the	DET
can-1069	78	11	ν	ν	NOUN
can-1069	78	12	-	-	NOUN
can-1069	78	13	phase	phase	NOUN
can-1069	78	14	,	,	PUNCT
can-1069	78	15	shifted	shift	VERB
can-1069	78	16	bulk	bulk	ADJ
can-1069	78	17	plasma	plasma	NOUN
can-1069	78	18	loss	loss	NOUN
can-1069	78	19	(	(	PUNCT
can-1069	78	20	bpl	bpl	NOUN
can-1069	78	21	)	)	PUNCT
can-1069	78	22	peak	peak	NOUN
can-1069	78	23	is	be	AUX
can-1069	78	24	formed	form	VERB
can-1069	78	25	.	.	PUNCT
can-1069	79	1	but	but	CCONJ
can-1069	79	2	if	if	SCONJ
can-1069	79	3	the	the	DET
can-1069	79	4	ν	ν	NOUN
can-1069	79	5	-	-	NOUN
can-1069	79	6	phase	phase	NOUN
can-1069	79	7	has	have	VERB
can-1069	79	8	an	an	DET
can-1069	79	9	inhomogeneous	inhomogeneous	ADJ
can-1069	79	10	structure	structure	NOUN
can-1069	79	11	,	,	PUNCT
can-1069	79	12	there	there	PRON
can-1069	79	13	will	will	AUX
can-1069	79	14	form	form	VERB
can-1069	79	15	a	a	DET
can-1069	79	16	whole	whole	ADJ
can-1069	79	17	group	group	NOUN
can-1069	79	18	of	of	ADP
can-1069	79	19	peaks	peak	NOUN
can-1069	79	20	.	.	PUNCT
can-1069	80	1	each	each	DET
can-1069	80	2	peak	peak	NOUN
can-1069	80	3	in	in	ADP
can-1069	80	4	this	this	DET
can-1069	80	5	group	group	NOUN
can-1069	80	6	corresponds	correspond	VERB
can-1069	80	7	to	to	ADP
can-1069	80	8	a	a	DET
can-1069	80	9	local	local	ADJ
can-1069	80	10	collective	collective	ADJ
can-1069	80	11	interaction	interaction	NOUN
can-1069	80	12	with	with	ADP
can-1069	80	13	electrons	electron	NOUN
can-1069	80	14	of	of	ADP
can-1069	80	15	the	the	DET
can-1069	80	16	same	same	ADJ
can-1069	80	17	type	type	NOUN
can-1069	80	18	of	of	ADP
can-1069	80	19	configuration	configuration	NOUN
can-1069	80	20	of	of	ADP
can-1069	80	21	interatomic	interatomic	ADJ
can-1069	80	22	bonds	bond	NOUN
can-1069	80	23	and	and	CCONJ
can-1069	80	24	with	with	ADP
can-1069	80	25	the	the	DET
can-1069	80	26	same	same	ADJ
can-1069	80	27	electron	electron	NOUN
can-1069	80	28	density	density	NOUN
can-1069	80	29	.	.	PUNCT
can-1069	81	1	the	the	DET
can-1069	81	2	adaptation	adaptation	NOUN
can-1069	81	3	of	of	ADP
can-1069	81	4	the	the	DET
can-1069	81	5	atomic	atomic	ADJ
can-1069	81	6	and	and	CCONJ
can-1069	81	7	electron	electron	NOUN
can-1069	81	8	density	density	NOUN
can-1069	81	9	in	in	ADP
can-1069	81	10	the	the	DET
can-1069	81	11	phase	phase	NOUN
can-1069	81	12	to	to	ADP
can-1069	81	13	the	the	DET
can-1069	81	14	density	density	NOUN
can-1069	81	15	of	of	ADP
can-1069	81	16	the	the	DET
can-1069	81	17	substrate	substrate	NOUN
can-1069	81	18	,	,	PUNCT
can-1069	81	19	as	as	ADV
can-1069	81	20	well	well	ADV
can-1069	81	21	as	as	ADP
can-1069	81	22	the	the	DET
can-1069	81	23	non	non	ADJ
can-1069	81	24	-	-	ADJ
can-1069	81	25	uniform	uniform	ADJ
can-1069	81	26	nature	nature	NOUN
can-1069	81	27	of	of	ADP
can-1069	81	28	this	this	DET
can-1069	81	29	density	density	NOUN
can-1069	81	30	,	,	PUNCT
can-1069	81	31	cause	cause	VERB
can-1069	81	32	the	the	DET
can-1069	81	33	bpl	bpl	NOUN
can-1069	81	34	peak	peak	NOUN
can-1069	81	35	to	to	PART
can-1069	81	36	shift	shift	VERB
can-1069	81	37	,	,	PUNCT
can-1069	81	38	expand	expand	VERB
can-1069	81	39	,	,	PUNCT
can-1069	81	40	and	and	CCONJ
can-1069	81	41	decrease	decrease	VERB
can-1069	81	42	in	in	ADP
can-1069	81	43	intensity	intensity	NOUN
can-1069	81	44	.	.	PUNCT
can-1069	82	1	thus	thus	ADV
can-1069	82	2	,	,	PUNCT
can-1069	82	3	it	it	PRON
can-1069	82	4	is	be	AUX
can-1069	82	5	possible	possible	ADJ
can-1069	82	6	to	to	PART
can-1069	82	7	distinguish	distinguish	VERB
can-1069	82	8	the	the	DET
can-1069	82	9	ν	ν	NOUN
can-1069	82	10	-	-	NOUN
can-1069	82	11	phase	phase	NOUN
can-1069	82	12	from	from	ADP
can-1069	82	13	the	the	DET
can-1069	82	14	bulk	bulk	NOUN
can-1069	82	15	coating	coating	NOUN
can-1069	82	16	and	and	CCONJ
can-1069	82	17	determine	determine	VERB
can-1069	82	18	the	the	DET
can-1069	82	19	range	range	NOUN
can-1069	82	20	of	of	ADP
can-1069	82	21	thickness	thickness	NOUN
can-1069	82	22	on	on	ADP
can-1069	82	23	which	which	PRON
can-1069	82	24	the	the	DET
can-1069	82	25	ν	ν	NOUN
can-1069	82	26	-	-	NOUN
can-1069	82	27	phase	phase	NOUN
can-1069	82	28	is	be	AUX
can-1069	82	29	formed	form	VERB
can-1069	82	30	by	by	ADP
can-1069	82	31	use	use	VERB
can-1069	82	32	the	the	DET
can-1069	82	33	shift	shift	NOUN
can-1069	82	34	,	,	PUNCT
can-1069	82	35	the	the	DET
can-1069	82	36	degree	degree	NOUN
can-1069	82	37	of	of	ADP
can-1069	82	38	expansion	expansion	NOUN
can-1069	82	39	of	of	ADP
can-1069	82	40	the	the	DET
can-1069	82	41	bpl	bpl	NOUN
can-1069	82	42	peak	peak	NOUN
can-1069	82	43	,	,	PUNCT
can-1069	82	44	and	and	CCONJ
can-1069	82	45	a	a	DET
can-1069	82	46	decrease	decrease	NOUN
can-1069	82	47	in	in	ADP
can-1069	82	48	its	its	PRON
can-1069	82	49	intensity	intensity	NOUN
can-1069	82	50	.	.	PUNCT
can-1069	83	1	3	3	X
can-1069	83	2	.	.	X
can-1069	83	3	experimental	experimental	ADJ
can-1069	83	4	observation	observation	NOUN
can-1069	83	5	of	of	ADP
can-1069	83	6	met	meet	VERB
can-1069	83	7	al	al	PROPN
can-1069	83	8	snp	snp	PROPN
can-1069	83	9	on	on	ADP
can-1069	83	10	silicon	silicon	PROPN
can-1069	83	11	a	a	DET
can-1069	83	12	series	series	NOUN
can-1069	83	13	of	of	ADP
can-1069	83	14	experiments	experiment	NOUN
can-1069	83	15	was	be	AUX
can-1069	83	16	carried	carry	VERB
can-1069	83	17	out	out	ADP
can-1069	83	18	to	to	PART
can-1069	83	19	study	study	VERB
can-1069	83	20	the	the	DET
can-1069	83	21	initial	initial	ADJ
can-1069	83	22	stage	stage	NOUN
can-1069	83	23	of	of	ADP
can-1069	83	24	growth	growth	NOUN
can-1069	83	25	of	of	ADP
can-1069	83	26	transition	transition	NOUN
can-1069	83	27	metals	metal	NOUN
can-1069	83	28	on	on	ADP
can-1069	83	29	silicon	silicon	NOUN
can-1069	83	30	using	use	VERB
can-1069	83	31	the	the	DET
can-1069	83	32	methods	method	NOUN
can-1069	83	33	of	of	ADP
can-1069	83	34	aes	aes	PROPN
can-1069	83	35	,	,	PUNCT
can-1069	83	36	leed	leed	PROPN
can-1069	83	37	,	,	PUNCT
can-1069	83	38	eels	eel	NOUN
can-1069	83	39	,	,	PUNCT
can-1069	83	40	afm	afm	PROPN
can-1069	83	41	,	,	PUNCT
can-1069	83	42	as	as	ADV
can-1069	83	43	well	well	ADV
can-1069	83	44	as	as	ADP
can-1069	83	45	measurements	measurement	NOUN
can-1069	83	46	of	of	ADP
can-1069	83	47	conductivity	conductivity	NOUN
can-1069	83	48	,	,	PUNCT
can-1069	83	49	optical	optical	ADJ
can-1069	83	50	reflection	reflection	NOUN
can-1069	83	51	and	and	CCONJ
can-1069	83	52	magnetization	magnetization	NOUN
can-1069	83	53	.	.	PUNCT
can-1069	84	1	namely	namely	ADV
can-1069	84	2	eels	eel	NOUN
can-1069	84	3	data	datum	NOUN
can-1069	84	4	showed	show	VERB
can-1069	84	5	the	the	DET
can-1069	84	6	formation	formation	NOUN
can-1069	84	7	of	of	ADP
can-1069	84	8	an	an	DET
can-1069	84	9	snp	snp	ADJ
can-1069	84	10	coating	coating	NOUN
can-1069	84	11	.	.	PUNCT
can-1069	85	1	based	base	VERB
can-1069	85	2	on	on	ADP
can-1069	85	3	eels	eel	NOUN
can-1069	85	4	data	datum	NOUN
can-1069	85	5	,	,	PUNCT
can-1069	85	6	we	we	PRON
can-1069	85	7	previously	previously	ADV
can-1069	85	8	called	call	VERB
can-1069	85	9	these	these	DET
can-1069	85	10	coatings	coating	NOUN
can-1069	85	11	by	by	ADP
can-1069	85	12	the	the	DET
can-1069	85	13	ν	ν	NOUN
can-1069	85	14	-	-	NOUN
can-1069	85	15	phase	phase	NOUN
can-1069	85	16	,	,	PUNCT
can-1069	85	17	and	and	CCONJ
can-1069	85	18	then	then	ADV
can-1069	85	19	we	we	PRON
can-1069	85	20	called	call	VERB
can-1069	85	21	them	they	PRON
can-1069	85	22	by	by	ADP
can-1069	85	23	the	the	DET
can-1069	85	24	wetting	wetting	NOUN
can-1069	85	25	layer	layer	NOUN
can-1069	85	26	(	(	PUNCT
can-1069	85	27	wl	wl	PROPN
can-1069	85	28	)	)	PUNCT
can-1069	85	29	.	.	PUNCT
can-1069	86	1	the	the	DET
can-1069	86	2	latter	latter	ADJ
can-1069	86	3	name	name	NOUN
can-1069	86	4	reflects	reflect	VERB
can-1069	86	5	the	the	DET
can-1069	86	6	adaptation	adaptation	NOUN
can-1069	86	7	of	of	ADP
can-1069	86	8	the	the	DET
can-1069	86	9	atomic	atomic	ADJ
can-1069	86	10	density	density	NOUN
can-1069	86	11	of	of	ADP
can-1069	86	12	the	the	DET
can-1069	86	13	snp	snp	ADJ
can-1069	86	14	coating	coating	NOUN
can-1069	86	15	to	to	ADP
can-1069	86	16	the	the	DET
can-1069	86	17	atomic	atomic	ADJ
can-1069	86	18	density	density	NOUN
can-1069	86	19	of	of	ADP
can-1069	86	20	the	the	DET
can-1069	86	21	substrate	substrate	NOUN
can-1069	86	22	.	.	PUNCT
can-1069	87	1	figure	figure	NOUN
can-1069	87	2	1	1	NUM
can-1069	87	3	and	and	CCONJ
can-1069	87	4	2	2	NUM
can-1069	87	5	present	present	NOUN
can-1069	87	6	the	the	DET
can-1069	87	7	eels	eel	NOUN
can-1069	87	8	spectra	spectra	ADJ
can-1069	87	9	families	family	NOUN
can-1069	87	10	,	,	PUNCT
can-1069	87	11	showing	show	VERB
can-1069	87	12	changes	change	NOUN
can-1069	87	13	of	of	ADP
can-1069	87	14	electron	electron	NOUN
can-1069	87	15	density	density	NOUN
can-1069	87	16	in	in	ADP
can-1069	87	17	fe	fe	NOUN
can-1069	87	18	and	and	CCONJ
can-1069	87	19	cr	cr	ADP
can-1069	87	20	layers	layer	NOUN
can-1069	87	21	and	and	CCONJ
can-1069	87	22	at	at	ADP
can-1069	87	23	the	the	DET
can-1069	87	24	metal	metal	NOUN
can-1069	87	25	-	-	PUNCT
can-1069	87	26	substrate	substrate	NOUN
can-1069	87	27	interface	interface	NOUN
can-1069	87	28	,	,	PUNCT
can-1069	87	29	during	during	ADP
can-1069	87	30	growth	growth	NOUN
can-1069	87	31	of	of	ADP
can-1069	87	32	fe	fe	NOUN
can-1069	87	33	and	and	CCONJ
can-1069	87	34	cr	cr	NOUN
can-1069	87	35	on	on	ADP
can-1069	87	36	si	si	X
can-1069	87	37	(	(	PUNCT
can-1069	87	38	001	001	NUM
can-1069	87	39	)	)	PUNCT
can-1069	87	40	and	and	CCONJ
can-1069	87	41	si	si	INTJ
can-1069	87	42	(	(	PUNCT
can-1069	87	43	111	111	NUM
can-1069	87	44	)	)	PUNCT
can-1069	87	45	,	,	PUNCT
can-1069	87	46	respectively	respectively	ADV
can-1069	87	47	.	.	PUNCT
can-1069	88	1	in	in	ADP
can-1069	88	2	figure	figure	NOUN
can-1069	88	3	1a	1a	NOUN
can-1069	88	4	and	and	CCONJ
can-1069	88	5	1b	1b	NUM
can-1069	88	6	,	,	PUNCT
can-1069	88	7	electron	electron	NOUN
can-1069	88	8	density	density	NOUN
can-1069	88	9	changes	change	NOUN
can-1069	88	10	are	be	AUX
can-1069	88	11	shown	show	VERB
can-1069	88	12	in	in	ADP
can-1069	88	13	the	the	DET
can-1069	88	14	case	case	NOUN
can-1069	88	15	of	of	ADP
can-1069	88	16	mixing	mix	VERB
can-1069	88	17	fe	fe	NOUN
can-1069	88	18	with	with	ADP
can-1069	88	19	the	the	DET
can-1069	88	20	si	si	NOUN
can-1069	88	21	substrate	substrate	NOUN
can-1069	88	22	and	and	CCONJ
can-1069	88	23	in	in	ADP
can-1069	88	24	the	the	DET
can-1069	88	25	case	case	NOUN
can-1069	88	26	of	of	ADP
can-1069	88	27	the	the	DET
can-1069	88	28	growth	growth	NOUN
can-1069	88	29	of	of	ADP
can-1069	88	30	pure	pure	ADJ
can-1069	88	31	fe	fe	NOUN
can-1069	88	32	at	at	ADP
can-1069	88	33	elevated	elevated	ADJ
can-1069	88	34	and	and	CCONJ
can-1069	88	35	lowered	lower	VERB
can-1069	88	36	temperatures	temperature	NOUN
can-1069	88	37	of	of	ADP
can-1069	88	38	metal	metal	NOUN
can-1069	88	39	’s	’s	PART
can-1069	88	40	vapor	vapor	NOUN
can-1069	88	41	,	,	PUNCT
can-1069	88	42	respectively	respectively	ADV
can-1069	88	43	.	.	PUNCT
can-1069	89	1	figure	figure	NOUN
can-1069	89	2	1c	1c	NOUN
can-1069	89	3	shows	show	VERB
can-1069	89	4	the	the	DET
can-1069	89	5	eels	eel	NOUN
can-1069	89	6	spectra	spectra	NOUN
can-1069	89	7	of	of	ADP
can-1069	89	8	the	the	DET
can-1069	89	9	fe	fe	PROPN
can-1069	89	10	–	–	PUNCT
can-1069	89	11	si	si	PROPN
can-1069	89	12	phases	phase	NOUN
can-1069	89	13	obtained	obtain	VERB
can-1069	89	14	after	after	ADP
can-1069	89	15	annealing	anneal	VERB
can-1069	89	16	the	the	DET
can-1069	89	17	samples	sample	NOUN
can-1069	89	18	of	of	ADP
can-1069	89	19	figure	figure	NOUN
can-1069	89	20	1b	1b	NUM
can-1069	89	21	.	.	PUNCT
can-1069	90	1	figure	figure	VERB
can-1069	90	2	1	1	NUM
can-1069	90	3	.	.	PUNCT
can-1069	91	1	eels	eel	NOUN
can-1069	91	2	fe	fe	X
can-1069	91	3	on	on	ADP
can-1069	91	4	si	si	X
can-1069	91	5	(	(	PUNCT
can-1069	91	6	001	001	NUM
can-1069	91	7	)	)	PUNCT
can-1069	91	8	in	in	ADP
can-1069	91	9	the	the	DET
can-1069	91	10	case	case	NOUN
can-1069	91	11	of	of	ADP
can-1069	91	12	fe	fe	NOUN
can-1069	91	13	growth	growth	NOUN
can-1069	91	14	at	at	ADP
can-1069	91	15	elevated	elevated	ADJ
can-1069	91	16	(	(	PUNCT
can-1069	91	17	a	a	NOUN
can-1069	91	18	)	)	PUNCT
can-1069	91	19	and	and	CCONJ
can-1069	91	20	lowered	lower	VERB
can-1069	91	21	(	(	PUNCT
can-1069	91	22	b	b	NOUN
can-1069	91	23	)	)	PUNCT
can-1069	91	24	vapor	vapor	NOUN
can-1069	91	25	temperature	temperature	NOUN
can-1069	91	26	,	,	PUNCT
can-1069	91	27	respectively	respectively	ADV
can-1069	91	28	;	;	PUNCT
can-1069	91	29	(	(	PUNCT
can-1069	91	30	c	c	X
can-1069	91	31	)	)	PUNCT
can-1069	91	32	eels	eel	NOUN
can-1069	91	33	of	of	ADP
can-1069	91	34	fe	fe	X
can-1069	91	35	–	–	PUNCT
can-1069	91	36	si	si	NOUN
can-1069	91	37	phases	phase	NOUN
can-1069	91	38	on	on	ADP
can-1069	91	39	si	si	X
can-1069	91	40	(	(	PUNCT
can-1069	91	41	001	001	NUM
can-1069	91	42	)	)	PUNCT
can-1069	91	43	after	after	ADP
can-1069	91	44	moderate	moderate	ADJ
can-1069	91	45	annealing	annealing	NOUN
can-1069	91	46	of	of	ADP
can-1069	91	47	the	the	DET
can-1069	91	48	fe	fe	NOUN
can-1069	91	49	coating	coat	VERB
can-1069	91	50	in	in	ADP
can-1069	91	51	figure	figure	NOUN
can-1069	91	52	(	(	PUNCT
can-1069	91	53	b)[15	b)[15	INTJ
can-1069	91	54	]	]	X
can-1069	91	55	.	.	PUNCT
can-1069	92	1	in	in	ADP
can-1069	92	2	each	each	DET
can-1069	92	3	case	case	NOUN
can-1069	92	4	,	,	PUNCT
can-1069	92	5	we	we	PRON
can-1069	92	6	see	see	VERB
can-1069	92	7	transitions	transition	NOUN
can-1069	92	8	of	of	ADP
can-1069	92	9	:	:	PUNCT
can-1069	92	10	1	1	X
can-1069	92	11	)	)	PUNCT
can-1069	92	12	a	a	DET
can-1069	92	13	pure	pure	ADJ
can-1069	92	14	silicon	silicon	NOUN
can-1069	92	15	surface	surface	NOUN
can-1069	92	16	(	(	PUNCT
can-1069	92	17	si	si	NOUN
can-1069	92	18	)	)	PUNCT
can-1069	92	19	into	into	ADP
can-1069	92	20	the	the	DET
can-1069	92	21	surface	surface	NOUN
can-1069	92	22	phase	phase	NOUN
can-1069	92	23	(	(	PUNCT
can-1069	92	24	sp	sp	NOUN
can-1069	92	25	)	)	PUNCT
can-1069	92	26	;	;	PUNCT
can-1069	92	27	2	2	X
can-1069	92	28	)	)	PUNCT
can-1069	92	29	sp	sp	NOUN
can-1069	92	30	into	into	ADP
can-1069	92	31	the	the	DET
can-1069	92	32	wetting	wet	VERB
can-1069	92	33	layer	layer	NOUN
can-1069	92	34	(	(	PUNCT
can-1069	92	35	wl	wl	PROPN
can-1069	92	36	)	)	PUNCT
can-1069	92	37	;	;	PUNCT
can-1069	92	38	and	and	CCONJ
can-1069	92	39	3	3	X
can-1069	92	40	)	)	PUNCT
can-1069	92	41	wl	wl	NOUN
can-1069	92	42	of	of	ADP
can-1069	92	43	maximum	maximum	ADJ
can-1069	92	44	thickness	thickness	NOUN
can-1069	92	45	into	into	ADP
can-1069	92	46	the	the	DET
can-1069	92	47	bulk	bulk	ADJ
can-1069	92	48	phase	phase	NOUN
can-1069	92	49	(	(	PUNCT
can-1069	92	50	bp	bp	PROPN
can-1069	92	51	)	)	PUNCT
can-1069	92	52	of	of	ADP
can-1069	92	53	the	the	DET
can-1069	92	54	metal	metal	NOUN
can-1069	92	55	or	or	CCONJ
can-1069	92	56	metal	metal	NOUN
can-1069	92	57	-	-	PUNCT
can-1069	92	58	silicon	silicon	NOUN
can-1069	92	59	compound	compound	NOUN
can-1069	92	60	(	(	PUNCT
can-1069	92	61	silicide	silicide	NOUN
can-1069	92	62	)	)	PUNCT
can-1069	92	63	.	.	PUNCT
can-1069	93	1	these	these	DET
can-1069	93	2	transitions	transition	NOUN
can-1069	93	3	show	show	VERB
can-1069	93	4	a	a	DET
can-1069	93	5	change	change	NOUN
can-1069	93	6	in	in	ADP
can-1069	93	7	the	the	DET
can-1069	93	8	position	position	NOUN
can-1069	93	9	of	of	ADP
can-1069	93	10	the	the	DET
can-1069	93	11	peaks	peak	NOUN
can-1069	93	12	of	of	ADP
can-1069	93	13	the	the	DET
can-1069	93	14	surface	surface	NOUN
can-1069	93	15	(	(	PUNCT
can-1069	93	16	e1	e1	PROPN
can-1069	93	17	)	)	PUNCT
can-1069	93	18	and	and	CCONJ
can-1069	93	19	bulk	bulk	NOUN
can-1069	93	20	(	(	PUNCT
can-1069	93	21	e2	e2	NOUN
can-1069	93	22	)	)	PUNCT
can-1069	93	23	losses	loss	NOUN
can-1069	93	24	.	.	PUNCT
can-1069	94	1	the	the	DET
can-1069	94	2	transition	transition	NOUN
can-1069	94	3	into	into	ADP
can-1069	94	4	sp	sp	ADP
can-1069	94	5	ends	end	NOUN
can-1069	94	6	when	when	SCONJ
can-1069	94	7	the	the	DET
can-1069	94	8	surface	surface	NOUN
can-1069	94	9	loss	loss	NOUN
can-1069	94	10	shift	shift	NOUN
can-1069	94	11	ceases	cease	VERB
can-1069	94	12	.	.	PUNCT
can-1069	95	1	and	and	CCONJ
can-1069	95	2	the	the	DET
can-1069	95	3	transition	transition	NOUN
can-1069	95	4	into	into	ADP
can-1069	95	5	wl	wl	PROPN
can-1069	95	6	is	be	AUX
can-1069	95	7	completed	complete	VERB
can-1069	95	8	when	when	SCONJ
can-1069	95	9	the	the	DET
can-1069	95	10	energy	energy	NOUN
can-1069	95	11	position	position	NOUN
can-1069	95	12	of	of	ADP
can-1069	95	13	the	the	DET
can-1069	95	14	peak	peak	NOUN
can-1069	95	15	of	of	ADP
can-1069	95	16	bulk	bulk	ADJ
can-1069	95	17	losses	loss	NOUN
can-1069	95	18	stabilizes	stabilize	VERB
can-1069	95	19	without	without	ADP
can-1069	95	20	reaching	reach	VERB
can-1069	95	21	the	the	DET
can-1069	95	22	position	position	NOUN
can-1069	95	23	of	of	ADP
can-1069	95	24	the	the	DET
can-1069	95	25	peak	peak	NOUN
can-1069	95	26	of	of	ADP
can-1069	95	27	bulk	bulk	ADJ
can-1069	95	28	losses	loss	NOUN
can-1069	95	29	in	in	ADP
can-1069	95	30	bp	bp	PROPN
can-1069	95	31	(	(	PUNCT
can-1069	95	32	eb	eb	PROPN
can-1069	95	33	)	)	PUNCT
can-1069	95	34	.	.	PUNCT
can-1069	96	1	figure	figure	VERB
can-1069	96	2	1a	1a	NOUN
can-1069	96	3	and	and	CCONJ
can-1069	96	4	1b	1b	NUM
can-1069	96	5	also	also	ADV
can-1069	96	6	show	show	VERB
can-1069	96	7	a	a	DET
can-1069	96	8	non	non	ADJ
can-1069	96	9	-	-	ADJ
can-1069	96	10	monotonic	monotonic	ADJ
can-1069	96	11	increase	increase	NOUN
can-1069	96	12	in	in	ADP
can-1069	96	13	the	the	DET
can-1069	96	14	energy	energy	NOUN
can-1069	96	15	of	of	ADP
can-1069	96	16	the	the	DET
can-1069	96	17	peak	peak	NOUN
can-1069	96	18	of	of	ADP
can-1069	96	19	bulk	bulk	ADJ
can-1069	96	20	plasmon	plasmon	NOUN
can-1069	96	21	losses	loss	NOUN
can-1069	96	22	,	,	PUNCT
can-1069	96	23	corresponding	correspond	VERB
can-1069	96	24	to	to	ADP
can-1069	96	25	transitions	transition	NOUN
can-1069	96	26	from	from	ADP
can-1069	96	27	sp	sp	ADP
can-1069	96	28	to	to	ADP
can-1069	96	29	wl	wl	PROPN
can-1069	96	30	and	and	CCONJ
can-1069	96	31	from	from	ADP
can-1069	96	32	wl	wl	PROPN
can-1069	96	33	to	to	ADP
can-1069	96	34	bp	bp	PROPN
can-1069	96	35	.	.	PUNCT
can-1069	97	1	the	the	DET
can-1069	97	2	formation	formation	NOUN
can-1069	97	3	of	of	ADP
can-1069	97	4	wl	wl	PROPN
can-1069	97	5	in	in	ADP
can-1069	97	6	non	non	ADJ
can-1069	97	7	-	-	ADJ
can-1069	97	8	equilibrium	equilibrium	ADJ
can-1069	97	9	conditions	condition	NOUN
can-1069	97	10	is	be	AUX
can-1069	97	11	a	a	DET
can-1069	97	12	general	general	ADJ
can-1069	97	13	phenomenon	phenomenon	NOUN
can-1069	97	14	of	of	ADP
can-1069	97	15	the	the	DET
can-1069	97	16	formation	formation	NOUN
can-1069	97	17	of	of	ADP
can-1069	97	18	the	the	DET
can-1069	97	19	metal	metal	NOUN
can-1069	97	20	/	/	SYM
can-1069	97	21	silicon	silicon	NOUN
can-1069	97	22	interface	interface	NOUN
can-1069	97	23	.	.	PUNCT
can-1069	98	1	with	with	ADP
can-1069	98	2	this	this	PRON
can-1069	98	3	,	,	PUNCT
can-1069	98	4	in	in	ADP
can-1069	98	5	the	the	DET
can-1069	98	6	case	case	NOUN
can-1069	98	7	of	of	ADP
can-1069	98	8	solid	solid	ADJ
can-1069	98	9	-	-	PUNCT
can-1069	98	10	phase	phase	NOUN
can-1069	98	11	epitaxy	epitaxy	NOUN
can-1069	98	12	,	,	PUNCT
can-1069	98	13	even	even	ADV
can-1069	98	14	ordering	order	VERB
can-1069	98	15	wl	wl	NOUN
can-1069	98	16	occurs	occur	NOUN
can-1069	98	17	,	,	PUNCT
can-1069	98	18	as	as	SCONJ
can-1069	98	19	is	be	AUX
can-1069	98	20	shown	show	VERB
can-1069	98	21	in	in	ADP
can-1069	98	22	figure	figure	NOUN
can-1069	98	23	2	2	NUM
can-1069	98	24	.	.	PUNCT
can-1069	99	1	and	and	CCONJ
can-1069	99	2	that	that	SCONJ
can-1069	99	3	evokes	evoke	VERB
can-1069	99	4	compacting	compact	VERB
can-1069	99	5	wl	wl	X
can-1069	99	6	.	.	PUNCT
can-1069	100	1	therefore	therefore	ADV
can-1069	100	2	atomic	atomic	ADJ
can-1069	100	3	density	density	NOUN
can-1069	100	4	of	of	ADP
can-1069	100	5	wl	wl	PROPN
can-1069	100	6	becomes	become	VERB
can-1069	100	7	closer	close	ADJ
can-1069	100	8	to	to	ADP
can-1069	100	9	the	the	DET
can-1069	100	10	density	density	NOUN
can-1069	100	11	of	of	ADP
can-1069	100	12	bulk	bulk	ADJ
can-1069	100	13	silicide	silicide	NOUN
can-1069	100	14	.	.	PUNCT
can-1069	101	1	85	85	NUM
can-1069	101	2	however	however	ADV
can-1069	101	3	,	,	PUNCT
can-1069	101	4	as	as	SCONJ
can-1069	101	5	can	can	AUX
can-1069	101	6	be	be	AUX
can-1069	101	7	seen	see	VERB
can-1069	101	8	from	from	ADP
can-1069	101	9	figure	figure	NOUN
can-1069	101	10	1b	1b	NUM
can-1069	101	11	and	and	CCONJ
can-1069	101	12	figure	figure	VERB
can-1069	101	13	1c	1c	NOUN
can-1069	101	14	,	,	PUNCT
can-1069	101	15	the	the	DET
can-1069	101	16	amplitude	amplitude	NOUN
can-1069	101	17	of	of	ADP
can-1069	101	18	the	the	DET
can-1069	101	19	peak	peak	NOUN
can-1069	101	20	of	of	ADP
can-1069	101	21	volume	volume	NOUN
can-1069	101	22	plasmon	plasmon	NOUN
can-1069	101	23	losses	loss	NOUN
can-1069	101	24	at	at	ADP
can-1069	101	25	the	the	DET
can-1069	101	26	stage	stage	NOUN
can-1069	101	27	of	of	ADP
can-1069	101	28	wl	wl	NOUN
can-1069	101	29	formation	formation	NOUN
can-1069	101	30	is	be	AUX
can-1069	101	31	much	much	ADV
can-1069	101	32	smaller	small	ADJ
can-1069	101	33	,	,	PUNCT
can-1069	101	34	and	and	CCONJ
can-1069	101	35	the	the	DET
can-1069	101	36	peak	peak	NOUN
can-1069	101	37	width	width	NOUN
can-1069	101	38	is	be	AUX
can-1069	101	39	greater	great	ADJ
can-1069	101	40	than	than	ADP
can-1069	101	41	in	in	ADP
can-1069	101	42	bp	bp	PROPN
can-1069	101	43	.	.	PUNCT
can-1069	102	1	this	this	PRON
can-1069	102	2	can	can	AUX
can-1069	102	3	be	be	AUX
can-1069	102	4	explained	explain	VERB
can-1069	102	5	only	only	ADV
can-1069	102	6	by	by	ADP
can-1069	102	7	the	the	DET
can-1069	102	8	formation	formation	NOUN
can-1069	102	9	of	of	ADP
can-1069	102	10	snp	snp	ADJ
can-1069	102	11	coverage	coverage	NOUN
can-1069	102	12	.	.	PUNCT
can-1069	103	1	moreover	moreover	ADV
can-1069	103	2	,	,	PUNCT
can-1069	103	3	in	in	ADP
can-1069	103	4	the	the	DET
can-1069	103	5	case	case	NOUN
can-1069	103	6	of	of	ADP
can-1069	103	7	snp	snp	ADJ
can-1069	103	8	coverage	coverage	NOUN
can-1069	103	9	of	of	ADP
can-1069	103	10	pure	pure	ADJ
can-1069	103	11	fe	fe	NOUN
can-1069	103	12	on	on	ADP
can-1069	103	13	si	si	X
can-1069	103	14	(	(	PUNCT
can-1069	103	15	001	001	NUM
can-1069	103	16	)	)	PUNCT
can-1069	103	17	(	(	PUNCT
can-1069	103	18	figure	figure	NOUN
can-1069	103	19	1b	1b	NUM
can-1069	103	20	)	)	PUNCT
can-1069	103	21	,	,	PUNCT
can-1069	103	22	these	these	DET
can-1069	103	23	differences	difference	NOUN
can-1069	103	24	are	be	AUX
can-1069	103	25	more	more	ADV
can-1069	103	26	pronounced	pronounce	VERB
can-1069	103	27	,	,	PUNCT
can-1069	103	28	since	since	SCONJ
can-1069	103	29	this	this	DET
can-1069	103	30	coating	coating	NOUN
can-1069	103	31	is	be	AUX
can-1069	103	32	in	in	ADP
can-1069	103	33	a	a	DET
can-1069	103	34	more	more	ADJ
can-1069	103	35	non	non	ADJ
can-1069	103	36	-	-	ADJ
can-1069	103	37	equilibrium	equilibrium	ADJ
can-1069	103	38	state	state	NOUN
can-1069	103	39	and	and	CCONJ
can-1069	103	40	has	have	VERB
can-1069	103	41	a	a	DET
can-1069	103	42	more	more	ADV
can-1069	103	43	pronounced	pronounced	ADJ
can-1069	103	44	gradient	gradient	NOUN
can-1069	103	45	of	of	ADP
can-1069	103	46	the	the	DET
can-1069	103	47	atomic	atomic	ADJ
can-1069	103	48	density	density	NOUN
can-1069	103	49	.	.	PUNCT
can-1069	104	1	figure	figure	NOUN
can-1069	104	2	2	2	NUM
can-1069	104	3	.	.	NOUN
can-1069	105	1	eels	eel	NOUN
can-1069	105	2	and	and	CCONJ
can-1069	105	3	leed	leed	PROPN
can-1069	105	4	of	of	ADP
can-1069	105	5	cr	cr	PROPN
can-1069	105	6	-	-	PUNCT
can-1069	105	7	si	si	NOUN
can-1069	105	8	phases	phase	NOUN
can-1069	105	9	on	on	ADP
can-1069	105	10	si	si	X
can-1069	105	11	(	(	PUNCT
can-1069	105	12	111	111	NUM
can-1069	105	13	)	)	PUNCT
can-1069	105	14	obtained	obtain	VERB
can-1069	105	15	by	by	ADP
can-1069	105	16	the	the	DET
can-1069	105	17	deposition	deposition	NOUN
can-1069	105	18	of	of	ADP
can-1069	105	19	cr	cr	NOUN
can-1069	105	20	with	with	ADP
can-1069	105	21	an	an	DET
can-1069	105	22	elevated	elevated	ADJ
can-1069	105	23	vapor	vapor	NOUN
can-1069	105	24	temperature	temperature	NOUN
can-1069	105	25	and	and	CCONJ
can-1069	105	26	annealing[15	annealing[15	NOUN
can-1069	105	27	]	]	PUNCT
can-1069	105	28	.	.	PUNCT
can-1069	106	1	indirect	indirect	ADJ
can-1069	106	2	evidence	evidence	NOUN
can-1069	106	3	of	of	ADP
can-1069	106	4	the	the	DET
can-1069	106	5	formation	formation	NOUN
can-1069	106	6	of	of	ADP
can-1069	106	7	the	the	DET
can-1069	106	8	fe	fe	PROPN
can-1069	106	9	snp	snp	PROPN
can-1069	106	10	on	on	ADP
can-1069	106	11	si	si	X
can-1069	106	12	(	(	PUNCT
can-1069	106	13	001	001	NUM
can-1069	106	14	)	)	PUNCT
can-1069	106	15	at	at	ADP
can-1069	106	16	the	the	DET
can-1069	106	17	wl	wl	PROPN
can-1069	106	18	formation	formation	NOUN
can-1069	106	19	stage	stage	NOUN
can-1069	106	20	was	be	AUX
can-1069	106	21	obtained	obtain	VERB
can-1069	106	22	on	on	ADP
can-1069	106	23	the	the	DET
can-1069	106	24	basis	basis	NOUN
can-1069	106	25	of	of	ADP
can-1069	106	26	aes	aes	PROPN
can-1069	106	27	and	and	CCONJ
can-1069	106	28	afm	afm	PROPN
can-1069	106	29	data	data	PROPN
can-1069	106	30	.	.	PUNCT
can-1069	107	1	at	at	ADP
can-1069	107	2	this	this	DET
can-1069	107	3	stage	stage	NOUN
can-1069	107	4	,	,	PUNCT
can-1069	107	5	for	for	ADP
can-1069	107	6	samples	sample	NOUN
can-1069	107	7	in	in	ADP
can-1069	107	8	figure	figure	NOUN
can-1069	107	9	1c	1c	NOUN
can-1069	107	10	,	,	PUNCT
can-1069	107	11	the	the	DET
can-1069	107	12	stability	stability	NOUN
can-1069	107	13	of	of	ADP
can-1069	107	14	the	the	DET
can-1069	107	15	coating	coating	NOUN
can-1069	107	16	in	in	ADP
can-1069	107	17	composition	composition	NOUN
can-1069	107	18	decreased	decrease	VERB
can-1069	107	19	according	accord	VERB
can-1069	107	20	to	to	ADP
can-1069	107	21	aes	aes	PROPN
can-1069	107	22	,	,	PUNCT
can-1069	107	23	and	and	CCONJ
can-1069	107	24	the	the	DET
can-1069	107	25	height	height	NOUN
can-1069	107	26	of	of	ADP
can-1069	107	27	the	the	DET
can-1069	107	28	surface	surface	NOUN
can-1069	107	29	relief	relief	NOUN
can-1069	107	30	was	be	AUX
can-1069	107	31	significantly	significantly	ADV
can-1069	107	32	less	less	ADJ
can-1069	107	33	than	than	ADP
can-1069	107	34	at	at	ADP
can-1069	107	35	the	the	DET
can-1069	107	36	stage	stage	NOUN
can-1069	107	37	of	of	ADP
can-1069	107	38	bp	bp	PROPN
can-1069	107	39	formation	formation	NOUN
can-1069	108	1	[	[	X
can-1069	108	2	14	14	NUM
can-1069	108	3	]	]	PUNCT
can-1069	108	4	.	.	PUNCT
can-1069	109	1	at	at	ADP
can-1069	109	2	the	the	DET
can-1069	109	3	same	same	ADJ
can-1069	109	4	time	time	NOUN
can-1069	109	5	,	,	PUNCT
can-1069	109	6	on	on	ADP
can-1069	109	7	the	the	DET
can-1069	109	8	afm	afm	PROPN
can-1069	109	9	images	image	NOUN
can-1069	109	10	,	,	PUNCT
can-1069	109	11	the	the	DET
can-1069	109	12	wl	wl	PROPN
can-1069	109	13	relief	relief	NOUN
can-1069	109	14	was	be	AUX
can-1069	109	15	not	not	PART
can-1069	109	16	seen	see	VERB
can-1069	109	17	due	due	ADP
can-1069	109	18	to	to	ADP
can-1069	109	19	the	the	DET
can-1069	109	20	diameter	diameter	NOUN
can-1069	109	21	of	of	ADP
can-1069	109	22	the	the	DET
can-1069	109	23	afm	afm	PROPN
can-1069	109	24	needle	needle	NOUN
can-1069	109	25	near	near	ADP
can-1069	109	26	1	1	NUM
can-1069	109	27	nm	nm	NOUN
can-1069	109	28	.	.	PUNCT
can-1069	109	29	invisible	invisible	ADJ
can-1069	109	30	relief	relief	NOUN
can-1069	109	31	at	at	ADP
can-1069	109	32	this	this	DET
can-1069	109	33	thickness	thickness	NOUN
can-1069	109	34	can	can	AUX
can-1069	109	35	be	be	AUX
can-1069	109	36	explained	explain	VERB
can-1069	109	37	only	only	ADV
can-1069	109	38	by	by	ADP
can-1069	109	39	a	a	DET
can-1069	109	40	subnanophase	subnanophase	ADJ
can-1069	109	41	structure	structure	NOUN
can-1069	109	42	of	of	ADP
can-1069	109	43	the	the	DET
can-1069	109	44	coating	coating	NOUN
can-1069	109	45	.	.	PUNCT
can-1069	110	1	additional	additional	ADJ
can-1069	110	2	confirmation	confirmation	NOUN
can-1069	110	3	of	of	ADP
can-1069	110	4	such	such	ADJ
can-1069	110	5	structure	structure	NOUN
can-1069	110	6	of	of	ADP
can-1069	110	7	the	the	DET
can-1069	110	8	metal	metal	NOUN
can-1069	110	9	wls	wl	NOUN
can-1069	110	10	is	be	AUX
can-1069	110	11	also	also	ADV
can-1069	110	12	provided	provide	VERB
can-1069	110	13	by	by	ADP
can-1069	110	14	data	datum	NOUN
can-1069	110	15	of	of	ADP
can-1069	110	16	on	on	ADP
can-1069	110	17	their	their	PRON
can-1069	110	18	electrical	electrical	ADJ
can-1069	110	19	,	,	PUNCT
can-1069	110	20	optical	optical	ADJ
can-1069	110	21	and	and	CCONJ
can-1069	110	22	magnetic	magnetic	ADJ
can-1069	110	23	properties	property	NOUN
can-1069	110	24	[	[	X
can-1069	110	25	16	16	NUM
can-1069	110	26	]	]	PUNCT
can-1069	110	27	.	.	PUNCT
can-1069	111	1	these	these	DET
can-1069	111	2	data	datum	NOUN
can-1069	111	3	show	show	VERB
can-1069	111	4	a	a	DET
can-1069	111	5	resistive	resistive	ADJ
can-1069	111	6	type	type	NOUN
can-1069	111	7	of	of	ADP
can-1069	111	8	conductivity	conductivity	NOUN
can-1069	111	9	(	(	PUNCT
can-1069	111	10	independence	independence	NOUN
can-1069	111	11	of	of	ADP
can-1069	111	12	resistance	resistance	NOUN
can-1069	111	13	on	on	ADP
can-1069	111	14	the	the	DET
can-1069	111	15	temperature	temperature	NOUN
can-1069	111	16	)	)	PUNCT
can-1069	111	17	of	of	ADP
can-1069	111	18	cr	cr	PROPN
can-1069	111	19	wl	wl	PROPN
can-1069	111	20	,	,	PUNCT
can-1069	111	21	a	a	DET
can-1069	111	22	high	high	ADJ
can-1069	111	23	uv	uv	NOUN
can-1069	111	24	absorption	absorption	NOUN
can-1069	111	25	(	(	PUNCT
can-1069	111	26	low	low	ADJ
can-1069	111	27	uv	uv	NOUN
can-1069	111	28	reflection	reflection	NOUN
can-1069	111	29	)	)	PUNCT
can-1069	111	30	in	in	ADP
can-1069	111	31	wl	wl	PROPN
can-1069	111	32	of	of	ADP
can-1069	111	33	fe	fe	PROPN
can-1069	111	34	on	on	ADP
can-1069	111	35	si	si	X
can-1069	111	36	(	(	PUNCT
can-1069	111	37	001	001	NUM
can-1069	111	38	)	)	PUNCT
can-1069	111	39	.	.	PUNCT
can-1069	112	1	moreover	moreover	ADV
can-1069	112	2	,	,	PUNCT
can-1069	112	3	the	the	DET
can-1069	112	4	dependence	dependence	NOUN
can-1069	112	5	of	of	ADP
can-1069	112	6	polarized	polarize	VERB
can-1069	112	7	light	light	ADJ
can-1069	112	8	reflection	reflection	NOUN
can-1069	112	9	on	on	ADP
can-1069	112	10	the	the	DET
can-1069	112	11	magnitude	magnitude	NOUN
can-1069	112	12	of	of	ADP
can-1069	112	13	the	the	DET
can-1069	112	14	magnetic	magnetic	ADJ
can-1069	112	15	field	field	NOUN
can-1069	112	16	perpendicular	perpendicular	NOUN
can-1069	112	17	to	to	ADP
can-1069	112	18	fe	fe	X
can-1069	112	19	wl	wl	PROPN
can-1069	112	20	corresponds	correspond	VERB
can-1069	112	21	to	to	ADP
can-1069	112	22	the	the	DET
can-1069	112	23	superparamagnetism	superparamagnetism	NOUN
can-1069	112	24	of	of	ADP
can-1069	112	25	this	this	PRON
can-1069	112	26	wl	wl	NOUN
can-1069	112	27	.	.	PUNCT
can-1069	113	1	and	and	CCONJ
can-1069	113	2	as	as	SCONJ
can-1069	113	3	it	it	PRON
can-1069	113	4	is	be	AUX
can-1069	113	5	known	know	VERB
can-1069	113	6	,	,	PUNCT
can-1069	114	1	resistive	resistive	ADJ
can-1069	114	2	type	type	NOUN
can-1069	114	3	of	of	ADP
can-1069	114	4	conductivity	conductivity	NOUN
can-1069	114	5	,	,	PUNCT
can-1069	114	6	high	high	ADJ
can-1069	114	7	uv	uv	NOUN
can-1069	114	8	absorption	absorption	NOUN
can-1069	114	9	and	and	CCONJ
can-1069	114	10	superparamagnetism	superparamagnetism	NOUN
can-1069	114	11	are	be	AUX
can-1069	114	12	most	most	ADV
can-1069	114	13	pronounced	pronounce	VERB
can-1069	114	14	in	in	ADP
can-1069	114	15	coatings	coating	NOUN
can-1069	114	16	and	and	CCONJ
can-1069	114	17	films	film	NOUN
can-1069	114	18	of	of	ADP
can-1069	114	19	metals	metal	NOUN
can-1069	114	20	with	with	ADP
can-1069	114	21	a	a	DET
can-1069	114	22	nanophase	nanophase	NOUN
can-1069	114	23	or	or	CCONJ
can-1069	114	24	finely	finely	ADV
can-1069	114	25	dispersed	disperse	VERB
can-1069	114	26	structure	structure	NOUN
can-1069	114	27	.	.	PUNCT
can-1069	115	1	4	4	X
can-1069	115	2	.	.	X
can-1069	115	3	properties	property	NOUN
can-1069	115	4	and	and	CCONJ
can-1069	115	5	application	application	NOUN
can-1069	115	6	of	of	ADP
can-1069	115	7	snp	snp	ADJ
can-1069	115	8	coatings	coating	NOUN
can-1069	115	9	cluster	cluster	NOUN
can-1069	115	10	or	or	CCONJ
can-1069	115	11	subnanoscale	subnanoscale	ADJ
can-1069	115	12	structure	structure	NOUN
can-1069	115	13	,	,	PUNCT
can-1069	115	14	uneven	uneven	ADJ
can-1069	115	15	along	along	ADP
can-1069	115	16	the	the	DET
can-1069	115	17	plane	plane	NOUN
can-1069	115	18	and	and	CCONJ
can-1069	115	19	subnanoscale	subnanoscale	ADJ
can-1069	115	20	gradient	gradient	NOUN
can-1069	115	21	of	of	ADP
can-1069	115	22	structural	structural	ADJ
can-1069	115	23	properties	property	NOUN
can-1069	115	24	in	in	ADP
can-1069	115	25	the	the	DET
can-1069	115	26	transverse	transverse	NOUN
can-1069	115	27	direction	direction	NOUN
can-1069	115	28	,	,	PUNCT
can-1069	115	29	determine	determine	VERB
can-1069	115	30	the	the	DET
can-1069	115	31	specific	specific	ADJ
can-1069	115	32	properties	property	NOUN
can-1069	115	33	of	of	ADP
can-1069	115	34	coatings	coating	NOUN
can-1069	115	35	.	.	PUNCT
can-1069	116	1	examples	example	NOUN
can-1069	116	2	of	of	ADP
can-1069	116	3	specific	specific	ADJ
can-1069	116	4	properties	property	NOUN
can-1069	116	5	of	of	ADP
can-1069	116	6	snp	snp	ADJ
can-1069	116	7	coatings	coating	NOUN
can-1069	116	8	can	can	AUX
can-1069	116	9	also	also	ADV
can-1069	116	10	be	be	AUX
can-1069	116	11	increased	increase	VERB
can-1069	116	12	wetting	wetting	NOUN
can-1069	116	13	ability	ability	NOUN
can-1069	116	14	,	,	PUNCT
can-1069	116	15	increased	increase	VERB
can-1069	116	16	surface	surface	NOUN
can-1069	116	17	area	area	NOUN
can-1069	116	18	,	,	PUNCT
can-1069	116	19	increased	increase	VERB
can-1069	116	20	surface	surface	NOUN
can-1069	116	21	curvature	curvature	NOUN
can-1069	116	22	and	and	CCONJ
can-1069	116	23	latent	latent	ADJ
can-1069	116	24	energy	energy	NOUN
can-1069	116	25	of	of	ADP
can-1069	116	26	stresses	stress	NOUN
can-1069	116	27	.	.	PUNCT
can-1069	117	1	due	due	ADP
can-1069	117	2	to	to	ADP
can-1069	117	3	the	the	DET
can-1069	117	4	reduced	reduce	VERB
can-1069	117	5	atomic	atomic	ADJ
can-1069	117	6	density	density	NOUN
can-1069	117	7	,	,	PUNCT
can-1069	117	8	the	the	DET
can-1069	117	9	presence	presence	NOUN
can-1069	117	10	of	of	ADP
can-1069	117	11	clusters	cluster	NOUN
can-1069	117	12	,	,	PUNCT
can-1069	117	13	near	near	ADP
can-1069	117	14	amorphous	amorphous	ADJ
can-1069	117	15	type	type	NOUN
can-1069	117	16	structure	structure	NOUN
can-1069	117	17	,	,	PUNCT
can-1069	117	18	a	a	DET
can-1069	117	19	large	large	ADJ
can-1069	117	20	number	number	NOUN
can-1069	117	21	of	of	ADP
can-1069	117	22	vacancies	vacancy	NOUN
can-1069	117	23	,	,	PUNCT
can-1069	117	24	they	they	PRON
can-1069	117	25	will	will	AUX
can-1069	117	26	also	also	ADV
can-1069	117	27	have	have	VERB
can-1069	117	28	their	their	PRON
can-1069	117	29	modified	modify	VERB
can-1069	117	30	electronic	electronic	ADJ
can-1069	117	31	structure	structure	NOUN
can-1069	117	32	and	and	CCONJ
can-1069	117	33	modified	modify	VERB
can-1069	117	34	optical	optical	ADJ
can-1069	117	35	,	,	PUNCT
can-1069	117	36	magnetic	magnetic	ADJ
can-1069	117	37	and	and	CCONJ
can-1069	117	38	electrical	electrical	ADJ
can-1069	117	39	properties	property	NOUN
can-1069	117	40	.	.	PUNCT
can-1069	118	1	and	and	CCONJ
can-1069	118	2	,	,	PUNCT
can-1069	118	3	as	as	ADP
can-1069	118	4	a	a	DET
can-1069	118	5	result	result	NOUN
can-1069	118	6	,	,	PUNCT
can-1069	118	7	there	there	PRON
can-1069	118	8	will	will	AUX
can-1069	118	9	be	be	AUX
can-1069	118	10	coatings	coating	NOUN
can-1069	118	11	with	with	ADP
can-1069	118	12	high	high	ADJ
can-1069	118	13	uv	uv	NOUN
can-1069	118	14	absorption	absorption	NOUN
can-1069	118	15	,	,	PUNCT
can-1069	118	16	magnetic	magnetic	ADJ
can-1069	118	17	-	-	PUNCT
can-1069	118	18	soft	soft	ADJ
can-1069	118	19	coatings	coating	NOUN
can-1069	118	20	and	and	CCONJ
can-1069	118	21	coatings	coating	NOUN
can-1069	118	22	with	with	ADP
can-1069	118	23	resistive	resistive	ADJ
can-1069	118	24	conductivity	conductivity	NOUN
can-1069	118	25	type	type	NOUN
can-1069	118	26	[	[	X
can-1069	118	27	16	16	NUM
can-1069	118	28	]	]	PUNCT
can-1069	118	29	.	.	PUNCT
can-1069	119	1	in	in	ADP
can-1069	119	2	addition	addition	NOUN
can-1069	119	3	,	,	PUNCT
can-1069	119	4	in	in	ADP
can-1069	119	5	snp	snp	ADJ
can-1069	119	6	coatings	coating	NOUN
can-1069	119	7	,	,	PUNCT
can-1069	119	8	by	by	ADP
can-1069	119	9	analogy	analogy	NOUN
can-1069	119	10	with	with	ADP
can-1069	119	11	multilayer	multilayer	ADJ
can-1069	119	12	coatings	coating	NOUN
can-1069	119	13	,	,	PUNCT
can-1069	119	14	a	a	DET
can-1069	119	15	chemi	chemi	NOUN
can-1069	119	16	cal	cal	VERB
can-1069	119	17	potential	potential	ADJ
can-1069	119	18	gradient	gradient	NOUN
can-1069	119	19	is	be	AUX
can-1069	119	20	possible	possible	ADJ
can-1069	119	21	and	and	CCONJ
can-1069	119	22	,	,	PUNCT
can-1069	119	23	as	as	ADP
can-1069	119	24	a	a	DET
can-1069	119	25	consequence	consequence	NOUN
can-1069	119	26	,	,	PUNCT
can-1069	119	27	the	the	DET
can-1069	119	28	presence	presence	NOUN
can-1069	119	29	of	of	ADP
can-1069	119	30	an	an	DET
can-1069	119	31	embedded	embed	VERB
can-1069	119	32	electric	electric	ADJ
can-1069	119	33	field	field	NOUN
can-1069	119	34	.	.	PUNCT
can-1069	120	1	due	due	ADP
can-1069	120	2	to	to	ADP
can-1069	120	3	the	the	DET
can-1069	120	4	low	low	ADJ
can-1069	120	5	thickness	thickness	NOUN
can-1069	120	6	of	of	ADP
can-1069	120	7	snp	snp	ADJ
can-1069	120	8	coatings	coating	NOUN
can-1069	120	9	and	and	CCONJ
can-1069	120	10	due	due	ADP
can-1069	120	11	to	to	ADP
can-1069	120	12	the	the	DET
can-1069	120	13	vacuum	vacuum	NOUN
can-1069	120	14	environment	environment	NOUN
can-1069	120	15	during	during	ADP
can-1069	120	16	physical	physical	ADJ
can-1069	120	17	vapor	vapor	NOUN
can-1069	120	18	deposition	deposition	NOUN
can-1069	120	19	,	,	PUNCT
can-1069	120	20	the	the	DET
can-1069	120	21	scope	scope	NOUN
can-1069	120	22	of	of	ADP
can-1069	120	23	applications	application	NOUN
can-1069	120	24	of	of	ADP
can-1069	120	25	snp	snp	ADJ
can-1069	120	26	coatings	coating	NOUN
can-1069	120	27	will	will	AUX
can-1069	120	28	be	be	AUX
can-1069	120	29	limited	limit	VERB
can-1069	120	30	to	to	ADP
can-1069	120	31	the	the	DET
can-1069	120	32	element	element	NOUN
can-1069	120	33	base	base	NOUN
can-1069	120	34	of	of	ADP
can-1069	120	35	electronics	electronic	NOUN
can-1069	120	36	,	,	PUNCT
can-1069	120	37	optoelectronics	optoelectronic	NOUN
can-1069	120	38	,	,	PUNCT
can-1069	120	39	and	and	CCONJ
can-1069	120	40	telecommunications	telecommunication	NOUN
can-1069	120	41	.	.	PUNCT
can-1069	121	1	in	in	ADP
can-1069	121	2	addition	addition	NOUN
can-1069	121	3	,	,	PUNCT
can-1069	121	4	they	they	PRON
can-1069	121	5	can	can	AUX
can-1069	121	6	be	be	AUX
can-1069	121	7	used	use	VERB
can-1069	121	8	for	for	ADP
can-1069	121	9	various	various	ADJ
can-1069	121	10	specialized	specialized	ADJ
can-1069	121	11	applications	application	NOUN
can-1069	121	12	where	where	SCONJ
can-1069	121	13	there	there	PRON
can-1069	121	14	is	be	VERB
can-1069	121	15	no	no	DET
can-1069	121	16	mechanical	mechanical	ADJ
can-1069	121	17	damage	damage	NOUN
can-1069	121	18	and	and	CCONJ
can-1069	121	19	the	the	DET
can-1069	121	20	influence	influence	NOUN
can-1069	121	21	of	of	ADP
can-1069	121	22	the	the	DET
can-1069	121	23	corrosive	corrosive	ADJ
can-1069	121	24	environment	environment	NOUN
can-1069	121	25	and	and	CCONJ
can-1069	121	26	the	the	DET
can-1069	121	27	atmosphere	atmosphere	NOUN
can-1069	121	28	(	(	PUNCT
can-1069	121	29	for	for	ADP
can-1069	121	30	example	example	NOUN
can-1069	121	31	,	,	PUNCT
can-1069	121	32	in	in	ADP
can-1069	121	33	biosensors	biosensor	NOUN
can-1069	121	34	)	)	PUNCT
can-1069	121	35	.	.	PUNCT
can-1069	122	1	it	it	PRON
can-1069	122	2	is	be	AUX
can-1069	122	3	assumed	assume	VERB
can-1069	122	4	that	that	SCONJ
can-1069	122	5	the	the	DET
can-1069	122	6	main	main	ADJ
can-1069	122	7	application	application	NOUN
can-1069	122	8	of	of	ADP
can-1069	122	9	snp	snp	ADJ
can-1069	122	10	coatings	coating	NOUN
can-1069	122	11	will	will	AUX
can-1069	122	12	focus	focus	VERB
can-1069	122	13	in	in	ADP
can-1069	122	14	the	the	DET
can-1069	122	15	range	range	NOUN
can-1069	122	16	of	of	ADP
can-1069	122	17	nanoelectronics	nanoelectronic	NOUN
can-1069	122	18	,	,	PUNCT
can-1069	122	19	nanospintronics	nanospintronic	NOUN
can-1069	122	20	,	,	PUNCT
can-1069	122	21	nanooptics	nanooptic	NOUN
can-1069	122	22	,	,	PUNCT
can-1069	122	23	nanoplasmonics	nanoplasmonic	NOUN
can-1069	122	24	,	,	PUNCT
can-1069	122	25	and	and	CCONJ
can-1069	122	26	analytical	analytical	ADJ
can-1069	122	27	instrumentation	instrumentation	NOUN
can-1069	122	28	for	for	ADP
can-1069	122	29	ecology	ecology	NOUN
can-1069	122	30	,	,	PUNCT
can-1069	122	31	biology	biology	NOUN
can-1069	122	32	and	and	CCONJ
can-1069	122	33	medicine	medicine	NOUN
can-1069	122	34	.	.	PUNCT
can-1069	123	1	another	another	DET
can-1069	123	2	application	application	NOUN
can-1069	123	3	of	of	ADP
can-1069	123	4	snp	snp	PROPN
can-1069	123	5	is	be	AUX
can-1069	123	6	the	the	DET
can-1069	123	7	use	use	NOUN
can-1069	123	8	of	of	ADP
can-1069	123	9	a	a	DET
can-1069	123	10	tension	tension	NOUN
can-1069	123	11	energy	energy	NOUN
can-1069	123	12	hidden	hide	VERB
can-1069	123	13	in	in	ADP
can-1069	123	14	them	they	PRON
can-1069	123	15	for	for	ADP
can-1069	123	16	solid	solid	ADJ
can-1069	123	17	-	-	PUNCT
can-1069	123	18	phase	phase	NOUN
can-1069	123	19	reactions	reaction	NOUN
can-1069	123	20	,	,	PUNCT
can-1069	123	21	crystallization	crystallization	NOUN
can-1069	123	22	and	and	CCONJ
can-1069	123	23	other	other	ADJ
can-1069	123	24	processes	process	NOUN
can-1069	123	25	of	of	ADP
can-1069	123	26	formation	formation	NOUN
can-1069	123	27	of	of	ADP
can-1069	123	28	ultra	ultra	ADJ
can-1069	123	29	-	-	ADJ
can-1069	123	30	thin	thin	ADJ
can-1069	123	31	coatings	coating	NOUN
can-1069	123	32	.	.	PUNCT
can-1069	124	1	86	86	NUM
can-1069	124	2	5	5	NUM
can-1069	124	3	.	.	PUNCT
can-1069	124	4	conclusion	conclusion	NOUN
can-1069	124	5	the	the	DET
can-1069	124	6	subnanophase	subnanophase	ADJ
can-1069	124	7	coatings	coating	NOUN
can-1069	124	8	as	as	ADP
can-1069	124	9	a	a	DET
can-1069	124	10	class	class	NOUN
can-1069	124	11	of	of	ADP
can-1069	124	12	new	new	ADJ
can-1069	124	13	materials	material	NOUN
can-1069	124	14	have	have	AUX
can-1069	124	15	been	be	AUX
can-1069	124	16	proposed	propose	VERB
can-1069	124	17	based	base	VERB
can-1069	124	18	on	on	ADP
can-1069	124	19	the	the	DET
can-1069	124	20	classification	classification	NOUN
can-1069	124	21	of	of	ADP
can-1069	124	22	low	low	ADJ
can-1069	124	23	-	-	PUNCT
can-1069	124	24	dimensional	dimensional	ADJ
can-1069	124	25	nanomaterials	nanomaterial	NOUN
can-1069	124	26	.	.	PUNCT
can-1069	125	1	synthesize	synthesize	VERB
can-1069	125	2	these	these	DET
can-1069	125	3	coatings	coating	NOUN
can-1069	125	4	using	use	VERB
can-1069	125	5	physical	physical	ADJ
can-1069	125	6	deposition	deposition	NOUN
can-1069	125	7	from	from	ADP
can-1069	125	8	low	low	ADJ
can-1069	125	9	-	-	PUNCT
can-1069	125	10	temperature	temperature	NOUN
can-1069	125	11	vapor	vapor	NOUN
can-1069	125	12	with	with	ADP
can-1069	125	13	control	control	VERB
can-1069	125	14	them	they	PRON
can-1069	125	15	in	in	ADP
can-1069	125	16	ultrahigh	ultrahigh	ADJ
can-1069	125	17	vacuum	vacuum	NOUN
can-1069	125	18	,	,	PUNCT
can-1069	125	19	and	and	CCONJ
can-1069	125	20	use	use	VERB
can-1069	125	21	the	the	DET
can-1069	125	22	eels	eel	NOUN
can-1069	125	23	method	method	VERB
can-1069	125	24	to	to	PART
can-1069	125	25	identify	identify	VERB
can-1069	125	26	their	their	PRON
can-1069	125	27	subnanophase	subnanophase	ADJ
can-1069	125	28	structure	structure	NOUN
can-1069	125	29	have	have	AUX
can-1069	125	30	been	be	AUX
can-1069	125	31	proposed	propose	VERB
can-1069	125	32	.	.	PUNCT
can-1069	126	1	the	the	DET
can-1069	126	2	experimental	experimental	ADJ
can-1069	126	3	observations	observation	NOUN
can-1069	126	4	of	of	ADP
can-1069	126	5	subnanophase	subnanophase	ADJ
can-1069	126	6	coatings	coating	NOUN
can-1069	126	7	in	in	ADP
can-1069	126	8	the	the	DET
can-1069	126	9	form	form	NOUN
can-1069	126	10	of	of	ADP
can-1069	126	11	a	a	DET
can-1069	126	12	metal	metal	NOUN
can-1069	126	13	wetting	wetting	NOUN
can-1069	126	14	layer	layer	NOUN
can-1069	126	15	on	on	ADP
can-1069	126	16	silicon	silicon	NOUN
can-1069	126	17	substrate	substrate	NOUN
can-1069	126	18	and	and	CCONJ
can-1069	126	19	also	also	ADV
can-1069	126	20	the	the	DET
can-1069	126	21	indirect	indirect	ADJ
can-1069	126	22	evidences	evidence	NOUN
can-1069	126	23	of	of	ADP
can-1069	126	24	their	their	PRON
can-1069	126	25	subnanophase	subnanophase	ADJ
can-1069	126	26	structure	structure	NOUN
can-1069	126	27	on	on	ADP
can-1069	126	28	data	datum	NOUN
can-1069	126	29	of	of	ADP
can-1069	126	30	afm	afm	PROPN
can-1069	126	31	,	,	PUNCT
can-1069	126	32	optical	optical	ADJ
can-1069	126	33	,	,	PUNCT
can-1069	126	34	electrical	electrical	ADJ
can-1069	126	35	and	and	CCONJ
can-1069	126	36	magnetic	magnetic	ADJ
can-1069	126	37	measurements	measurement	NOUN
can-1069	126	38	have	have	AUX
can-1069	126	39	be	be	AUX
can-1069	126	40	en	en	ADV
can-1069	126	41	presented	present	VERB
can-1069	126	42	.	.	PUNCT
can-1069	127	1	the	the	DET
can-1069	127	2	properties	property	NOUN
can-1069	127	3	and	and	CCONJ
can-1069	127	4	possible	possible	ADJ
can-1069	127	5	applications	application	NOUN
can-1069	127	6	of	of	ADP
can-1069	127	7	subnanophase	subnanophase	ADJ
can-1069	127	8	coatings	coating	NOUN
can-1069	127	9	are	be	AUX
can-1069	127	10	considered	consider	VERB
can-1069	127	11	.	.	PUNCT
can-1069	128	1	references	reference	NOUN
can-1069	128	2	1	1	NUM
can-1069	128	3	.	.	PUNCT
can-1069	128	4	hannink	hannink	PROPN
can-1069	128	5	rhj	rhj	PROPN
can-1069	128	6	,	,	PUNCT
can-1069	128	7	hill	hill	PROPN
can-1069	128	8	aj	aj	PROPN
can-1069	128	9	(	(	PUNCT
can-1069	128	10	editors	editor	NOUN
can-1069	128	11	)	)	PUNCT
can-1069	128	12	.	.	PUNCT
can-1069	129	1	nanostructure	nanostructure	PROPN
can-1069	129	2	control	control	NOUN
can-1069	129	3	of	of	ADP
can-1069	129	4	materials	material	NOUN
can-1069	129	5	.	.	PUNCT
can-1069	130	1	cambridge	cambridge	PROPN
can-1069	130	2	:	:	PUNCT
can-1069	130	3	woodhead	woodhead	PROPN
can-1069	130	4	publishing	publishing	NOUN
can-1069	130	5	limited	limit	VERB
can-1069	130	6	,	,	PUNCT
can-1069	130	7	2006	2006	NUM
can-1069	130	8	.	.	PUNCT
can-1069	131	1	p.	p.	NOUN
can-1069	131	2	368	368	NUM
can-1069	131	3	.	.	PUNCT
can-1069	132	1	2	2	X
can-1069	132	2	.	.	X
can-1069	132	3	voorhoeve	voorhoeve	PROPN
can-1069	132	4	rjh	rjh	PROPN
can-1069	132	5	.	.	PUNCT
can-1069	133	1	molecular	molecular	ADJ
can-1069	133	2	beam	beam	NOUN
can-1069	133	3	deposition	deposition	NOUN
can-1069	133	4	of	of	ADP
can-1069	133	5	solids	solid	NOUN
can-1069	133	6	on	on	ADP
can-1069	133	7	surfaces	surface	NOUN
can-1069	133	8	:	:	PUNCT
can-1069	133	9	ultrathin	ultrathin	ADJ
can-1069	133	10	films	film	NOUN
can-1069	133	11	.	.	PUNCT
can-1069	134	1	in	in	ADP
can-1069	134	2	:	:	PUNCT
can-1069	134	3	treatise	treatise	NOUN
can-1069	134	4	on	on	ADP
can-1069	134	5	solid	solid	ADJ
can-1069	134	6	state	state	NOUN
can-1069	134	7	chemistry	chemistry	NOUN
can-1069	134	8	.	.	PUNCT
can-1069	135	1	new	new	PROPN
can-1069	135	2	york	york	PROPN
can-1069	135	3	,	,	PUNCT
can-1069	135	4	london	london	PROPN
can-1069	135	5	:	:	PUNCT
can-1069	135	6	plenum	plenum	PROPN
can-1069	135	7	press	press	NOUN
can-1069	135	8	;	;	PUNCT
can-1069	135	9	1976	1976	NUM
can-1069	135	10	.	.	PUNCT
can-1069	136	1	p.	p.	NOUN
can-1069	136	2	241–342	241–342	NUM
can-1069	136	3	.	.	PUNCT
can-1069	137	1	3	3	X
can-1069	137	2	.	.	NUM
can-1069	137	3	o’connor	o’connor	ADV
can-1069	137	4	dj	dj	PROPN
can-1069	137	5	,	,	PUNCT
can-1069	137	6	sexton	sexton	PROPN
can-1069	137	7	ba	ba	PROPN
can-1069	137	8	.	.	PUNCT
can-1069	138	1	smart	smart	PROPN
can-1069	138	2	rstc	rstc	PROPN
can-1069	138	3	(	(	PUNCT
can-1069	138	4	editors	editor	NOUN
can-1069	138	5	)	)	PUNCT
can-1069	138	6	.	.	PUNCT
can-1069	139	1	surface	surface	NOUN
can-1069	139	2	analysis	analysis	NOUN
can-1069	139	3	methods	method	NOUN
can-1069	139	4	in	in	ADP
can-1069	139	5	material	material	NOUN
can-1069	139	6	science	science	NOUN
can-1069	139	7	.	.	PUNCT
can-1069	140	1	new	new	PROPN
can-1069	140	2	york	york	PROPN
can-1069	140	3	,	,	PUNCT
can-1069	140	4	berlin	berlin	PROPN
can-1069	140	5	:	:	PUNCT
can-1069	140	6	springer	springer	NOUN
can-1069	140	7	verlag	verlag	NOUN
can-1069	140	8	;	;	PUNCT
can-1069	140	9	1992	1992	NUM
can-1069	140	10	.	.	PUNCT
can-1069	141	1	p.	p.	NOUN
can-1069	141	2	480	480	NUM
can-1069	141	3	.	.	PUNCT
can-1069	142	1	4	4	NUM
can-1069	142	2	.	.	X
can-1069	142	3	oura	oura	PROPN
can-1069	142	4	k	k	PROPN
can-1069	142	5	,	,	PUNCT
can-1069	142	6	lifshits	lifshit	VERB
can-1069	142	7	vg	vg	NOUN
can-1069	142	8	,	,	PUNCT
can-1069	142	9	saranin	saranin	ADJ
can-1069	142	10	aa	aa	NOUN
can-1069	142	11	,	,	PUNCT
can-1069	142	12	et	et	PROPN
can-1069	142	13	al	al	PROPN
can-1069	142	14	.	.	PROPN
can-1069	142	15	surface	surface	PROPN
can-1069	142	16	science	science	NOUN
can-1069	142	17	:	:	PUNCT
can-1069	142	18	an	an	DET
can-1069	142	19	introduction	introduction	NOUN
can-1069	142	20	.	.	PUNCT
can-1069	143	1	berlin	berlin	PROPN
can-1069	143	2	:	:	PUNCT
can-1069	143	3	springer	springer	NOUN
can-1069	143	4	verlag	verlag	PROPN
can-1069	143	5	;	;	PUNCT
can-1069	143	6	2003	2003	NUM
can-1069	143	7	.	.	PUNCT
can-1069	144	1	p.	p.	NOUN
can-1069	144	2	440	440	NUM
can-1069	144	3	.	.	PUNCT
can-1069	145	1	5	5	X
can-1069	145	2	.	.	X
can-1069	145	3	henini	henini	PROPN
can-1069	145	4	m	m	PROPN
can-1069	145	5	(	(	PUNCT
can-1069	145	6	editor	editor	NOUN
can-1069	145	7	)	)	PUNCT
can-1069	145	8	.	.	PUNCT
can-1069	146	1	molecular	molecular	ADJ
can-1069	146	2	beam	beam	NOUN
can-1069	146	3	epitaxy	epitaxy	PROPN
can-1069	146	4	:	:	PUNCT
can-1069	146	5	from	from	ADP
can-1069	146	6	research	research	NOUN
can-1069	146	7	to	to	ADP
can-1069	146	8	mass	mass	ADJ
can-1069	146	9	production	production	NOUN
can-1069	146	10	.	.	PUNCT
can-1069	147	1	london	london	PROPN
can-1069	147	2	:	:	PUNCT
can-1069	147	3	elsevier	elsevier	NOUN
can-1069	147	4	;	;	PUNCT
can-1069	147	5	2012	2012	NUM
can-1069	147	6	.	.	PUNCT
can-1069	148	1	p.	p.	NOUN
can-1069	148	2	744	744	NUM
can-1069	148	3	.	.	NOUN
can-1069	148	4	6	6	NUM
can-1069	148	5	.	.	X
can-1069	148	6	plusnin	plusnin	PROPN
can-1069	148	7	ni	ni	PROPN
can-1069	148	8	,	,	PUNCT
can-1069	148	9	il’yashchenko	il’yashchenko	PROPN
can-1069	148	10	vm	vm	PROPN
can-1069	148	11	,	,	PUNCT
can-1069	148	12	krylov	krylov	PROPN
can-1069	148	13	sv	sv	PROPN
can-1069	148	14	.	.	PROPN
can-1069	148	15	effect	effect	NOUN
can-1069	148	16	of	of	ADP
can-1069	148	17	incident	incident	NOUN
can-1069	148	18	atomic	atomic	ADJ
can-1069	148	19	beam	beam	NOUN
can-1069	148	20	power	power	NOUN
can-1069	148	21	on	on	ADP
can-1069	148	22	the	the	DET
can-1069	148	23	formation	formation	NOUN
can-1069	148	24	of	of	ADP
can-1069	148	25	a	a	DET
can-1069	148	26	fe	fe	ADJ
can-1069	148	27	/	/	SYM
can-1069	148	28	si(111)7×7	si(111)7×7	NOUN
can-1069	148	29	interface	interface	NOUN
can-1069	148	30	.	.	PUNCT
can-1069	149	1	technical	technical	ADJ
can-1069	149	2	physics	physics	NOUN
can-1069	149	3	letters	letter	NOUN
can-1069	149	4	2007	2007	NUM
can-1069	149	5	;	;	PUNCT
can-1069	149	6	33	33	NUM
can-1069	149	7	:	:	PUNCT
can-1069	149	8	486–489	486–489	NUM
can-1069	149	9	.	.	PUNCT
can-1069	150	1	7	7	X
can-1069	150	2	.	.	X
can-1069	150	3	plusnin	plusnin	PROPN
can-1069	150	4	ni	ni	PROPN
can-1069	150	5	.	.	PROPN
can-1069	150	6	atomic	atomic	ADJ
can-1069	150	7	-	-	PUNCT
can-1069	150	8	scale	scale	NOUN
can-1069	150	9	control	control	NOUN
can-1069	150	10	of	of	ADP
can-1069	150	11	molecular	molecular	ADJ
can-1069	150	12	-	-	PUNCT
can-1069	150	13	beam	beam	NOUN
can-1069	150	14	growth	growth	NOUN
can-1069	150	15	of	of	ADP
can-1069	150	16	nanolayers	nanolayer	NOUN
can-1069	150	17	.	.	PUNCT
can-1069	151	1	in	in	ADP
can-1069	151	2	:	:	PUNCT
can-1069	151	3	comprehensive	comprehensive	ADJ
can-1069	151	4	guide	guide	NOUN
can-1069	151	5	for	for	ADP
can-1069	151	6	nanocoatings	nanocoating	NOUN
can-1069	151	7	technology	technology	NOUN
can-1069	151	8	.	.	PUNCT
can-1069	152	1	volume	volume	NOUN
can-1069	152	2	2	2	NUM
can-1069	152	3	:	:	PUNCT
can-1069	152	4	characterization	characterization	NOUN
can-1069	152	5	and	and	CCONJ
can-1069	152	6	reliability	reliability	NOUN
can-1069	152	7	.	.	PUNCT
can-1069	153	1	new	new	PROPN
can-1069	153	2	york	york	PROPN
can-1069	153	3	:	:	PUNCT
can-1069	153	4	nova	nova	PROPN
can-1069	153	5	science	science	PROPN
can-1069	153	6	publishers	publishers	PROPN
can-1069	153	7	inc	inc	PROPN
can-1069	153	8	;	;	PUNCT
can-1069	153	9	2015	2015	NUM
can-1069	153	10	.	.	PUNCT
can-1069	154	1	p.	p.	NOUN
can-1069	154	2	87–102	87–102	NUM
can-1069	154	3	.	.	PROPN
can-1069	155	1	8	8	NUM
can-1069	155	2	.	.	X
can-1069	155	3	plusnin	plusnin	PROPN
can-1069	155	4	ni	ni	PROPN
can-1069	155	5	,	,	PUNCT
can-1069	155	6	tarima	tarima	PROPN
can-1069	155	7	na	na	NOUN
can-1069	155	8	,	,	PUNCT
can-1069	155	9	il’yashchenko	il’yashchenko	PROPN
can-1069	155	10	vm	vm	PROPN
can-1069	155	11	,	,	PUNCT
can-1069	155	12	et	et	PROPN
can-1069	155	13	al	al	PROPN
can-1069	155	14	.	.	PUNCT
can-1069	156	1	the	the	DET
can-1069	156	2	effect	effect	NOUN
can-1069	156	3	of	of	ADP
can-1069	156	4	underlayer	underlayer	NOUN
can-1069	156	5	-	-	PUNCT
can-1069	156	6	modified	modify	VERB
can-1069	156	7	atomic	atomic	ADJ
can-1069	156	8	monolayer	monolayer	NOUN
can-1069	156	9	on	on	ADP
can-1069	156	10	the	the	DET
can-1069	156	11	mechanism	mechanism	NOUN
can-1069	156	12	of	of	ADP
can-1069	156	13	subsequent	subsequent	ADJ
can-1069	156	14	film	film	NOUN
can-1069	156	15	growth	growth	NOUN
can-1069	156	16	.	.	PUNCT
can-1069	157	1	technical	technical	ADJ
can-1069	157	2	physics	physics	PROPN
can-1069	157	3	letters	letter	NOUN
can-1069	157	4	2012	2012	NUM
can-1069	157	5	;	;	PUNCT
can-1069	157	6	38	38	NUM
can-1069	157	7	:	:	PUNCT
can-1069	157	8	324–327	324–327	NUM
can-1069	157	9	.	.	NOUN
can-1069	158	1	9	9	X
can-1069	158	2	.	.	X
can-1069	158	3	plusnin	plusnin	PROPN
can-1069	158	4	ni	ni	PROPN
can-1069	158	5	.	.	PROPN
can-1069	158	6	application	application	NOUN
can-1069	158	7	of	of	ADP
can-1069	158	8	aes	aes	PROPN
can-1069	158	9	and	and	CCONJ
can-1069	158	10	eels	eel	NOUN
can-1069	158	11	for	for	ADP
can-1069	158	12	surface	surface	NOUN
can-1069	158	13	/	/	SYM
can-1069	158	14	interface	interface	NOUN
can-1069	158	15	characterization	characterization	NOUN
can-1069	158	16	.	.	PUNCT
can-1069	159	1	journal	journal	PROPN
can-1069	159	2	of	of	ADP
can-1069	159	3	electron	electron	NOUN
can-1069	159	4	spectroscopy	spectroscopy	NOUN
can-1069	159	5	&	&	CCONJ
can-1069	159	6	related	relate	VERB
can-1069	159	7	phenomena	phenomenon	NOUN
can-1069	159	8	2004	2004	NUM
can-1069	159	9	;	;	PUNCT
can-1069	159	10	137	137	NUM
can-1069	159	11	:	:	PUNCT
can-1069	159	12	161–164	161–164	NUM
can-1069	159	13	.	.	PUNCT
can-1069	160	1	10	10	NUM
can-1069	160	2	.	.	PUNCT
can-1069	160	3	plusnin	plusnin	PROPN
can-1069	160	4	ni	ni	PROPN
can-1069	160	5	.	.	PUNCT
can-1069	161	1	the	the	DET
can-1069	161	2	use	use	NOUN
can-1069	161	3	of	of	ADP
can-1069	161	4	aes	aes	NOUN
can-1069	161	5	and	and	CCONJ
can-1069	161	6	eels	eel	NOUN
can-1069	161	7	for	for	ADP
can-1069	161	8	complex	complex	ADJ
can-1069	161	9	analysis	analysis	NOUN
can-1069	161	10	of	of	ADP
can-1069	161	11	two	two	NUM
can-1069	161	12	-	-	PUNCT
can-1069	161	13	dimensional	dimensional	ADJ
can-1069	161	14	coatings	coating	NOUN
can-1069	161	15	and	and	CCONJ
can-1069	161	16	their	their	PRON
can-1069	161	17	growth	growth	NOUN
can-1069	161	18	process	process	NOUN
can-1069	161	19	.	.	PUNCT
can-1069	162	1	modern	modern	ADJ
can-1069	162	2	electronic	electronic	ADJ
can-1069	162	3	materials	material	NOUN
can-1069	162	4	2017	2017	NUM
can-1069	162	5	;	;	PUNCT
can-1069	162	6	3	3	NUM
can-1069	162	7	:	:	SYM
can-1069	162	8	131–141	131–141	NUM
can-1069	162	9	.	.	NOUN
can-1069	162	10	11	11	NUM
can-1069	162	11	.	.	X
can-1069	163	1	plusnin	plusnin	PROPN
can-1069	163	2	ni	ni	PROPN
can-1069	163	3	.	.	PROPN
can-1069	163	4	from	from	ADP
can-1069	163	5	physics	physics	NOUN
can-1069	163	6	of	of	ADP
can-1069	163	7	the	the	DET
can-1069	163	8	interface	interface	NOUN
can-1069	163	9	formation	formation	NOUN
can-1069	163	10	to	to	ADP
can-1069	163	11	low	low	ADJ
can-1069	163	12	-	-	PUNCT
can-1069	163	13	dimensional	dimensional	ADJ
can-1069	163	14	nanocoatings	nanocoating	NOUN
can-1069	163	15	and	and	CCONJ
can-1069	163	16	nanomaterals	nanomateral	NOUN
can-1069	163	17	based	base	VERB
can-1069	163	18	on	on	ADP
can-1069	163	19	them	they	PRON
can-1069	163	20	.	.	PUNCT
can-1069	164	1	vestnik	vestnik	PROPN
can-1069	164	2	of	of	ADP
can-1069	164	3	far	far	PROPN
can-1069	164	4	east	east	NOUN
can-1069	164	5	branch	branch	NOUN
can-1069	164	6	of	of	ADP
can-1069	164	7	russian	russian	PROPN
can-1069	164	8	academy	academy	PROPN
can-1069	164	9	of	of	ADP
can-1069	164	10	science	science	PROPN
can-1069	164	11	2016	2016	NUM
can-1069	164	12	;	;	PUNCT
can-1069	164	13	4(188	4(188	NUM
can-1069	164	14	):	):	PUNCT
can-1069	164	15	27–35	27–35	NUM
can-1069	164	16	.	.	PUNCT
can-1069	165	1	available	available	ADJ
can-1069	165	2	from	from	ADP
can-1069	165	3	:	:	PUNCT
can-1069	165	4	https://cyberleninka.ru/article/n/ot	https://cyberleninka.ru/article/n/ot	PROPN
can-1069	165	5	fizki	fizki	NOUN
can-1069	165	6	-	-	PUNCT
can-1069	165	7	formirovaniya	formirovaniya	NOUN
can-1069	165	8	-	-	PUNCT
can-1069	165	9	granitsy	granitsy	NOUN
can-1069	165	10	-	-	PUNCT
can-1069	165	11	razdela	razdela	NOUN
can-1069	165	12	-	-	PUNCT
can-1069	165	13	k	k	NOUN
can-1069	165	14	-	-	PUNCT
can-1069	165	15	nizkorazmer	nizkorazmer	ADJ
can-1069	165	16	nym	nym	NOUN
can-1069	165	17	-	-	PUNCT
can-1069	165	18	nanopokrytiyam	nanopokrytiyam	NOUN
can-1069	165	19	-	-	PUNCT
can-1069	165	20	i	i	NOUN
can-1069	165	21	-	-	PUNCT
can-1069	165	22	materialam	materialam	VERB
can-1069	165	23	-	-	PUNCT
can-1069	165	24	na	na	NOUN
can-1069	165	25	-	-	PUNCT
can-1069	165	26	ih	ih	NOUN
can-1069	165	27	-	-	PUNCT
can-1069	165	28	osnove	osnove	NOUN
can-1069	165	29	.	.	PUNCT
can-1069	166	1	12	12	NUM
can-1069	166	2	.	.	PUNCT
can-1069	166	3	plusnin	plusnin	PROPN
can-1069	166	4	ni	ni	PROPN
can-1069	166	5	,	,	PUNCT
can-1069	166	6	galkin	galkin	PROPN
can-1069	166	7	ng	ng	PROPN
can-1069	166	8	,	,	PUNCT
can-1069	166	9	lifshits	lifshit	VERB
can-1069	166	10	vg	vg	NOUN
can-1069	166	11	,	,	PUNCT
can-1069	166	12	et	et	PROPN
can-1069	166	13	al	al	PROPN
can-1069	166	14	.	.	PUNCT
can-1069	167	1	formation	formation	NOUN
can-1069	167	2	of	of	ADP
can-1069	167	3	interfaces	interface	NOUN
can-1069	167	4	and	and	CCONJ
can-1069	167	5	templates	template	NOUN
can-1069	167	6	in	in	ADP
can-1069	167	7	the	the	DET
can-1069	167	8	si(111)-cr	si(111)-cr	NOUN
can-1069	167	9	system	system	NOUN
can-1069	167	10	.	.	PUNCT
can-1069	168	1	surface	surface	NOUN
can-1069	168	2	review	review	NOUN
can-1069	168	3	and	and	CCONJ
can-1069	168	4	letters	letter	NOUN
can-1069	168	5	1995	1995	NUM
can-1069	168	6	;	;	PUNCT
can-1069	168	7	2	2	NUM
can-1069	168	8	:	:	SYM
can-1069	168	9	439	439	NUM
can-1069	168	10	–	–	PUNCT
can-1069	168	11	449	449	NUM
can-1069	168	12	.	.	NOUN
can-1069	168	13	13	13	NUM
can-1069	168	14	.	.	X
can-1069	169	1	plusnin	plusnin	PROPN
can-1069	169	2	ni	ni	PROPN
can-1069	169	3	,	,	PUNCT
can-1069	169	4	il’iashchenko	il’iashchenko	PROPN
can-1069	169	5	vm	vm	PROPN
can-1069	169	6	,	,	PUNCT
can-1069	169	7	kitan	kitan	PROPN
can-1069	169	8	’	'	PUNCT
can-1069	169	9	sa	sa	PROPN
can-1069	169	10	,	,	PUNCT
can-1069	170	1	et	et	PROPN
can-1069	170	2	al	al	PROPN
can-1069	170	3	.	.	PUNCT
can-1069	170	4	metal	metal	PROPN
can-1069	170	5	thin	thin	ADJ
can-1069	170	6	-	-	PUNCT
can-1069	170	7	film	film	NOUN
can-1069	170	8	nanophases	nanophase	NOUN
can-1069	170	9	and	and	CCONJ
can-1069	170	10	their	their	PRON
can-1069	170	11	interface	interface	NOUN
can-1069	170	12	with	with	ADP
can-1069	170	13	silicon	silicon	NOUN
can-1069	170	14	.	.	PUNCT
can-1069	171	1	journal	journal	PROPN
can-1069	171	2	of	of	ADP
can-1069	171	3	physics	physics	PROPN
can-1069	171	4	conference	conference	PROPN
can-1069	171	5	2008	2008	NUM
can-1069	171	6	;	;	PUNCT
can-1069	171	7	100	100	NUM
can-1069	171	8	:	:	SYM
can-1069	171	9	052094	052094	NUM
can-1069	171	10	.	.	PUNCT
can-1069	172	1	14	14	NUM
can-1069	172	2	.	.	X
can-1069	172	3	plusnin	plusnin	PROPN
can-1069	172	4	ni	ni	PROPN
can-1069	172	5	,	,	PUNCT
can-1069	172	6	il’yashchenko	il’yashchenko	PROPN
can-1069	172	7	vm	vm	PROPN
can-1069	172	8	,	,	PUNCT
can-1069	172	9	kitan	kitan	PROPN
can-1069	172	10	’	'	PUNCT
can-1069	172	11	sa	sa	PROPN
can-1069	172	12	,	,	PUNCT
can-1069	172	13	et	et	PROPN
can-1069	172	14	al	al	PROPN
can-1069	172	15	.	.	PUNCT
can-1069	172	16	formation	formation	NOUN
can-1069	172	17	,	,	PUNCT
can-1069	172	18	electronic	electronic	ADJ
can-1069	172	19	structure	structure	NOUN
can-1069	172	20	,	,	PUNCT
can-1069	172	21	and	and	CCONJ
can-1069	172	22	stability	stability	NOUN
can-1069	172	23	of	of	ADP
can-1069	172	24	film	film	NOUN
can-1069	172	25	nanophases	nanophase	NOUN
can-1069	172	26	of	of	ADP
can-1069	172	27	transition	transition	NOUN
can-1069	172	28	metals	metal	NOUN
can-1069	172	29	on	on	ADP
can-1069	172	30	silicon	silicon	NOUN
can-1069	172	31	.	.	PUNCT
can-1069	173	1	journal	journal	PROPN
can-1069	173	2	of	of	ADP
can-1069	173	3	surface	surface	NOUN
can-1069	173	4	investigation	investigation	NOUN
can-1069	173	5	.	.	PUNCT
can-1069	174	1	x	x	X
can-1069	174	2	-	-	PUNCT
can-1069	174	3	ray	ray	NOUN
can-1069	174	4	,	,	PUNCT
can-1069	174	5	synchrotron	synchrotron	NOUN
can-1069	174	6	and	and	CCONJ
can-1069	174	7	neutron	neutron	NOUN
can-1069	174	8	techniques	technique	NOUN
can-1069	174	9	2009	2009	NUM
can-1069	174	10	;	;	PUNCT
can-1069	174	11	3(5	3(5	NUM
can-1069	174	12	):	):	PUNCT
can-1069	174	13	734–746	734–746	NUM
can-1069	174	14	.	.	PUNCT
can-1069	175	1	15	15	NUM
can-1069	175	2	.	.	X
can-1069	175	3	plusnin	plusnin	PROPN
can-1069	175	4	ni	ni	PROPN
can-1069	175	5	.	.	PROPN
can-1069	175	6	atomic	atomic	ADJ
can-1069	175	7	-	-	PUNCT
can-1069	175	8	scale	scale	NOUN
can-1069	176	1	aes	aes	NOUN
can-1069	176	2	-	-	NOUN
can-1069	176	3	eels	eel	NOUN
can-1069	176	4	analysis	analysis	NOUN
can-1069	176	5	of	of	ADP
can-1069	176	6	structure	structure	NOUN
can-1069	176	7	-	-	PUNCT
can-1069	176	8	phase	phase	NOUN
can-1069	176	9	state	state	NOUN
can-1069	176	10	and	and	CCONJ
can-1069	176	11	growth	growth	NOUN
can-1069	176	12	mechanism	mechanism	NOUN
can-1069	176	13	of	of	ADP
can-1069	176	14	layered	layered	ADJ
can-1069	176	15	nanostructures	nanostructure	NOUN
can-1069	176	16	.	.	PUNCT
can-1069	177	1	advances	advance	NOUN
can-1069	177	2	in	in	ADP
can-1069	177	3	materials	material	NOUN
can-1069	177	4	physics	physics	NOUN
can-1069	177	5	and	and	CCONJ
can-1069	177	6	chemistry	chemistry	NOUN
can-1069	177	7	2016	2016	NUM
can-1069	177	8	;	;	PUNCT
can-1069	177	9	6	6	NUM
can-1069	177	10	:	:	SYM
can-1069	177	11	195–210	195–210	NUM
can-1069	177	12	.	.	PUNCT
can-1069	178	1	16	16	NUM
can-1069	178	2	.	.	PUNCT
can-1069	179	1	plusnin	plusnin	PROPN
can-1069	179	2	ni	ni	PROPN
can-1069	179	3	.	.	PROPN
can-1069	179	4	metallic	metallic	ADJ
can-1069	179	5	nanofilms	nanofilm	NOUN
can-1069	179	6	on	on	ADP
can-1069	179	7	single	single	ADJ
can-1069	179	8	crystal	crystal	NOUN
can-1069	179	9	silicon	silicon	NOUN
can-1069	179	10	:	:	PUNCT
can-1069	179	11	growth	growth	NOUN
can-1069	179	12	,	,	PUNCT
can-1069	179	13	properties	property	NOUN
can-1069	179	14	and	and	CCONJ
can-1069	179	15	applications	application	NOUN
can-1069	179	16	.	.	PUNCT
can-1069	180	1	modern	modern	ADJ
can-1069	180	2	electronic	electronic	ADJ
can-1069	180	3	materials	material	NOUN
can-1069	180	4	2017	2017	NUM
can-1069	180	5	;	;	PUNCT
can-1069	180	6	3(2	3(2	NUM
can-1069	180	7	):	):	PUNCT
can-1069	180	8	57–65	57–65	NUM
can-1069	180	9	.	.	PUNCT