id	sid	tid	token	lemma	pos
can-11021	1	1	characterization	characterization	NOUN
can-11021	1	2	and	and	CCONJ
can-11021	1	3	application	application	NOUN
can-11021	1	4	of	of	ADP
can-11021	1	5	nanomaterials	nanomaterial	NOUN
can-11021	1	6	2025	2025	NUM
can-11021	1	7	,	,	PUNCT
can-11021	1	8	8(2	8(2	NUM
can-11021	1	9	)	)	PUNCT
can-11021	1	10	,	,	PUNCT
can-11021	1	11	11021	11021	NUM
can-11021	1	12	.	.	PUNCT
can-11021	2	1	https://doi.org/10.24294/can11021	https://doi.org/10.24294/can11021	NOUN
can-11021	2	2	1	1	NUM
can-11021	2	3	article	article	NOUN
can-11021	2	4	tracking	track	VERB
can-11021	2	5	the	the	DET
can-11021	2	6	thermostimulated	thermostimulated	ADJ
can-11021	2	7	transformations	transformation	NOUN
can-11021	2	8	of	of	ADP
can-11021	2	9	silicon	silicon	NOUN
can-11021	2	10	suboxide	suboxide	ADJ
can-11021	2	11	film	film	NOUN
can-11021	2	12	through	through	ADP
can-11021	2	13	absorption	absorption	NOUN
can-11021	2	14	edge	edge	NOUN
can-11021	2	15	characterization	characterization	NOUN
can-11021	2	16	mykola	mykola	PROPN
can-11021	2	17	sopinskyy	sopinskyy	PROPN
can-11021	2	18	*	*	PUNCT
can-11021	2	19	,	,	PUNCT
can-11021	2	20	ivan	ivan	PROPN
can-11021	2	21	indutnyi	indutnyi	PROPN
can-11021	2	22	,	,	PUNCT
can-11021	2	23	katerina	katerina	PROPN
can-11021	2	24	michailovska	michailovska	PROPN
can-11021	2	25	,	,	PUNCT
can-11021	2	26	volodymyr	volodymyr	NOUN
can-11021	2	27	yukhymchuk	yukhymchuk	PROPN
can-11021	2	28	v.	v.	PROPN
can-11021	2	29	lashkaryov	lashkaryov	PROPN
can-11021	2	30	institute	institute	PROPN
can-11021	2	31	of	of	ADP
can-11021	2	32	semiconductor	semiconductor	PROPN
can-11021	2	33	physics	physics	PROPN
can-11021	2	34	,	,	PUNCT
can-11021	2	35	national	national	PROPN
can-11021	2	36	academy	academy	PROPN
can-11021	2	37	of	of	ADP
can-11021	2	38	sciences	sciences	PROPN
can-11021	2	39	of	of	ADP
can-11021	2	40	ukraine	ukraine	NOUN
can-11021	2	41	,	,	PUNCT
can-11021	2	42	kyiv	kyiv	PROPN
can-11021	2	43	03028	03028	NUM
can-11021	2	44	,	,	PUNCT
can-11021	2	45	ukraine	ukraine	NOUN
can-11021	2	46	*	*	PUNCT
can-11021	2	47	corresponding	correspond	VERB
can-11021	2	48	author	author	NOUN
can-11021	2	49	:	:	PUNCT
can-11021	2	50	mykola	mykola	PROPN
can-11021	2	51	sopinskyy	sopinskyy	PROPN
can-11021	2	52	,	,	PUNCT
can-11021	2	53	sopinskyy@ua.fm	sopinskyy@ua.fm	ADV
can-11021	2	54	,	,	PUNCT
can-11021	2	55	sopinsky@isp.kiev.ua	sopinsky@isp.kiev.ua	PROPN
can-11021	2	56	abstract	abstract	PROPN
can-11021	2	57	:	:	PUNCT
can-11021	2	58	in	in	ADP
can-11021	2	59	this	this	DET
can-11021	2	60	work	work	NOUN
can-11021	2	61	,	,	PUNCT
can-11021	2	62	the	the	DET
can-11021	2	63	structural	structural	ADJ
can-11021	2	64	transformations	transformation	NOUN
can-11021	2	65	of	of	ADP
can-11021	2	66	a	a	DET
can-11021	2	67	suboxide	suboxide	ADJ
can-11021	2	68	vacuum	vacuum	NOUN
can-11021	2	69	-	-	PUNCT
can-11021	2	70	deposited	deposit	VERB
can-11021	2	71	film	film	NOUN
can-11021	2	72	of	of	ADP
can-11021	2	73	sio1.3	sio1.3	PROPN
can-11021	2	74	composition	composition	NOUN
can-11021	2	75	annealed	anneal	VERB
can-11021	2	76	in	in	ADP
can-11021	2	77	an	an	DET
can-11021	2	78	inert	inert	ADJ
can-11021	2	79	atmosphere	atmosphere	NOUN
can-11021	2	80	in	in	ADP
can-11021	2	81	a	a	DET
can-11021	2	82	wide	wide	ADJ
can-11021	2	83	temperature	temperature	NOUN
can-11021	2	84	range	range	NOUN
can-11021	2	85	of	of	ADP
can-11021	2	86	100	100	NUM
can-11021	2	87	°	°	NOUN
can-11021	2	88	c	c	NOUN
can-11021	2	89	–	–	PUNCT
can-11021	2	90	1100	1100	NUM
can-11021	2	91	°	°	SYM
can-11021	2	92	c	c	NOUN
can-11021	2	93	were	be	AUX
can-11021	2	94	characterized	characterize	VERB
can-11021	2	95	by	by	ADP
can-11021	2	96	the	the	DET
can-11021	2	97	reflection	reflection	NOUN
can-11021	2	98	-	-	PUNCT
can-11021	2	99	transmission	transmission	NOUN
can-11021	2	100	spectroscopy	spectroscopy	NOUN
can-11021	2	101	technique	technique	NOUN
can-11021	2	102	.	.	PUNCT
can-11021	3	1	the	the	DET
can-11021	3	2	experimental	experimental	ADJ
can-11021	3	3	spectroscopic	spectroscopic	ADJ
can-11021	3	4	data	datum	NOUN
can-11021	3	5	were	be	AUX
can-11021	3	6	used	use	VERB
can-11021	3	7	to	to	PART
can-11021	3	8	obtain	obtain	VERB
can-11021	3	9	the	the	DET
can-11021	3	10	spectra	spectra	NOUN
can-11021	3	11	of	of	ADP
can-11021	3	12	the	the	DET
can-11021	3	13	absorption	absorption	NOUN
can-11021	3	14	coefficient	coefficient	NOUN
can-11021	3	15	α(hν	α(hν	NOUN
can-11021	3	16	)	)	PUNCT
can-11021	3	17	in	in	ADP
can-11021	3	18	the	the	DET
can-11021	3	19	absorption	absorption	NOUN
can-11021	3	20	edge	edge	NOUN
can-11021	3	21	region	region	NOUN
can-11021	3	22	of	of	ADP
can-11021	3	23	the	the	DET
can-11021	3	24	film	film	NOUN
can-11021	3	25	.	.	PUNCT
can-11021	4	1	based	base	VERB
can-11021	4	2	on	on	ADP
can-11021	4	3	their	their	PRON
can-11021	4	4	processing	processing	NOUN
can-11021	4	5	,	,	PUNCT
can-11021	4	6	the	the	DET
can-11021	4	7	dependences	dependence	NOUN
can-11021	4	8	of	of	ADP
can-11021	4	9	urbach	urbach	ADJ
can-11021	4	10	energy	energy	NOUN
can-11021	4	11	eu	eu	PROPN
can-11021	4	12	and	and	CCONJ
can-11021	4	13	optical	optical	ADJ
can-11021	4	14	(	(	PUNCT
can-11021	4	15	tauc	tauc	NOUN
can-11021	4	16	)	)	PUNCT
can-11021	4	17	bandgap	bandgap	NOUN
can-11021	4	18	eo	eo	INTJ
can-11021	4	19	on	on	ADP
can-11021	4	20	the	the	DET
can-11021	4	21	annealing	anneal	VERB
can-11021	4	22	temperature	temperature	NOUN
can-11021	4	23	were	be	AUX
can-11021	4	24	obtained	obtain	VERB
can-11021	4	25	.	.	PUNCT
can-11021	5	1	an	an	DET
can-11021	5	2	assessment	assessment	NOUN
can-11021	5	3	of	of	ADP
can-11021	5	4	the	the	DET
can-11021	5	5	electronic	electronic	ADJ
can-11021	5	6	band	band	NOUN
can-11021	5	7	gap	gap	NOUN
can-11021	5	8	(	(	PUNCT
can-11021	5	9	mobility	mobility	NOUN
can-11021	5	10	gap	gap	NOUN
can-11021	5	11	)	)	PUNCT
can-11021	5	12	eg	eg	NOUN
can-11021	5	13	was	be	AUX
can-11021	5	14	also	also	ADV
can-11021	5	15	carried	carry	VERB
can-11021	5	16	out	out	ADP
can-11021	5	17	.	.	PUNCT
can-11021	6	1	analysis	analysis	NOUN
can-11021	6	2	of	of	ADP
can-11021	6	3	these	these	DET
can-11021	6	4	dependences	dependence	NOUN
can-11021	6	5	allowed	allow	VERB
can-11021	6	6	us	we	PRON
can-11021	6	7	to	to	PART
can-11021	6	8	trace	trace	VERB
can-11021	6	9	dynamics	dynamic	NOUN
can-11021	6	10	of	of	ADP
can-11021	6	11	thermally	thermally	ADV
can-11021	6	12	stimulated	stimulate	VERB
can-11021	6	13	disproportionation	disproportionation	NOUN
can-11021	6	14	of	of	ADP
can-11021	6	15	the	the	DET
can-11021	6	16	suboxide	suboxide	ADJ
can-11021	6	17	film	film	NOUN
can-11021	6	18	and	and	CCONJ
can-11021	6	19	the	the	DET
can-11021	6	20	features	feature	NOUN
can-11021	6	21	of	of	ADP
can-11021	6	22	the	the	DET
can-11021	6	23	formation	formation	NOUN
can-11021	6	24	of	of	ADP
can-11021	6	25	nanocomposites	nanocomposite	NOUN
can-11021	6	26	consisting	consist	VERB
can-11021	6	27	of	of	ADP
can-11021	6	28	amorphous	amorphous	ADJ
can-11021	6	29	and/or	and/or	CCONJ
can-11021	6	30	crystalline	crystalline	ADJ
can-11021	6	31	silicon	silicon	NOUN
can-11021	6	32	nanoparticles	nanoparticle	NOUN
can-11021	6	33	in	in	ADP
can-11021	6	34	an	an	DET
can-11021	6	35	oxide	oxide	NOUN
can-11021	6	36	matrix	matrix	NOUN
can-11021	6	37	.	.	PUNCT
can-11021	7	1	keywords	keyword	NOUN
can-11021	7	2	:	:	PUNCT
can-11021	7	3	non	non	ADJ
can-11021	7	4	-	-	ADJ
can-11021	7	5	stoichiometric	stoichiometric	ADJ
can-11021	7	6	silicon	silicon	NOUN
can-11021	7	7	oxide	oxide	NOUN
can-11021	7	8	;	;	PUNCT
can-11021	7	9	siox	siox	NOUN
can-11021	7	10	;	;	PUNCT
can-11021	7	11	nanocomposite	nanocomposite	NOUN
can-11021	7	12	;	;	PUNCT
can-11021	7	13	silicon	silicon	NOUN
can-11021	7	14	nanoparticles	nanoparticle	NOUN
can-11021	7	15	;	;	PUNCT
can-11021	7	16	absorption	absorption	NOUN
can-11021	7	17	edge	edge	NOUN
can-11021	7	18	;	;	PUNCT
can-11021	7	19	optical	optical	ADJ
can-11021	7	20	band	band	NOUN
can-11021	7	21	gap	gap	NOUN
can-11021	7	22	;	;	PUNCT
can-11021	7	23	electronic	electronic	ADJ
can-11021	7	24	band	band	NOUN
can-11021	7	25	gap	gap	NOUN
can-11021	7	26	;	;	PUNCT
can-11021	7	27	mobility	mobility	NOUN
can-11021	7	28	gap	gap	NOUN
can-11021	7	29	;	;	PUNCT
can-11021	7	30	urbach	urbach	NOUN
can-11021	7	31	energy	energy	NOUN
can-11021	7	32	1	1	NUM
can-11021	7	33	.	.	PUNCT
can-11021	8	1	introduction	introduction	NOUN
can-11021	8	2	silicon	silicon	PROPN
can-11021	8	3	suboxide	suboxide	PROPN
can-11021	8	4	(	(	PUNCT
can-11021	8	5	siox	siox	PROPN
can-11021	8	6	,	,	PUNCT
can-11021	8	7	x	x	X
can-11021	8	8	<	<	X
can-11021	8	9	2	2	NUM
can-11021	8	10	)	)	PUNCT
can-11021	8	11	films	film	NOUN
can-11021	8	12	have	have	AUX
can-11021	8	13	been	be	AUX
can-11021	8	14	the	the	DET
can-11021	8	15	subject	subject	NOUN
can-11021	8	16	of	of	ADP
can-11021	8	17	intensive	intensive	ADJ
can-11021	8	18	research	research	NOUN
can-11021	8	19	for	for	ADP
can-11021	8	20	several	several	ADJ
can-11021	8	21	decades	decade	NOUN
can-11021	8	22	.	.	PUNCT
can-11021	9	1	at	at	ADP
can-11021	9	2	an	an	DET
can-11021	9	3	early	early	ADJ
can-11021	9	4	stage	stage	NOUN
can-11021	9	5	,	,	PUNCT
can-11021	9	6	these	these	DET
can-11021	9	7	studies	study	NOUN
can-11021	9	8	were	be	AUX
can-11021	9	9	mainly	mainly	ADV
can-11021	9	10	driven	drive	VERB
can-11021	9	11	by	by	ADP
can-11021	9	12	the	the	DET
can-11021	9	13	widespread	widespread	ADJ
can-11021	9	14	use	use	NOUN
can-11021	9	15	of	of	ADP
can-11021	9	16	such	such	ADJ
can-11021	9	17	films	film	NOUN
can-11021	9	18	as	as	ADP
can-11021	9	19	passive	passive	ADJ
can-11021	9	20	,	,	PUNCT
can-11021	9	21	insulating	insulating	NOUN
can-11021	9	22	,	,	PUNCT
can-11021	9	23	and	and	CCONJ
can-11021	9	24	anti	anti	ADJ
can-11021	9	25	-	-	ADJ
can-11021	9	26	reflective	reflective	ADJ
can-11021	9	27	coatings	coating	NOUN
can-11021	9	28	[	[	X
can-11021	9	29	1,2	1,2	NUM
can-11021	9	30	]	]	PUNCT
can-11021	9	31	.	.	PUNCT
can-11021	10	1	in	in	ADP
can-11021	10	2	recent	recent	ADJ
can-11021	10	3	years	year	NOUN
can-11021	10	4	,	,	PUNCT
can-11021	10	5	non	non	ADJ
can-11021	10	6	-	-	ADJ
can-11021	10	7	stoichiometric	stoichiometric	ADJ
can-11021	10	8	silicon	silicon	NOUN
can-11021	10	9	oxides	oxide	NOUN
can-11021	10	10	,	,	PUNCT
can-11021	10	11	both	both	CCONJ
can-11021	10	12	amorphous	amorphous	ADJ
can-11021	10	13	and	and	CCONJ
can-11021	10	14	crystalline	crystalline	NOUN
can-11021	10	15	,	,	PUNCT
can-11021	10	16	have	have	AUX
can-11021	10	17	attracted	attract	VERB
can-11021	10	18	increasing	increase	VERB
can-11021	10	19	attention	attention	NOUN
can-11021	10	20	for	for	ADP
can-11021	10	21	both	both	CCONJ
can-11021	10	22	scientific	scientific	ADJ
can-11021	10	23	and	and	CCONJ
can-11021	10	24	technological	technological	ADJ
can-11021	10	25	reasons	reason	NOUN
can-11021	10	26	[	[	X
can-11021	10	27	3–5	3–5	X
can-11021	10	28	]	]	PUNCT
can-11021	10	29	.	.	PUNCT
can-11021	11	1	one	one	NUM
can-11021	11	2	of	of	ADP
can-11021	11	3	these	these	DET
can-11021	11	4	reasons	reason	NOUN
can-11021	11	5	is	be	AUX
can-11021	11	6	that	that	PRON
can-11021	11	7	high	high	ADJ
can-11021	11	8	-	-	PUNCT
can-11021	11	9	temperature	temperature	NOUN
can-11021	11	10	phase	phase	NOUN
can-11021	11	11	separation	separation	NOUN
can-11021	11	12	of	of	ADP
can-11021	11	13	non	non	ADJ
can-11021	11	14	-	-	ADJ
can-11021	11	15	stoichiometric	stoichiometric	ADJ
can-11021	11	16	siox	siox	NOUN
can-11021	11	17	films	film	NOUN
can-11021	11	18	is	be	AUX
can-11021	11	19	a	a	DET
can-11021	11	20	key	key	ADJ
can-11021	11	21	method	method	NOUN
can-11021	11	22	for	for	ADP
can-11021	11	23	the	the	DET
can-11021	11	24	formation	formation	NOUN
can-11021	11	25	of	of	ADP
can-11021	11	26	composite	composite	ADJ
can-11021	11	27	structures	structure	NOUN
can-11021	11	28	consisting	consist	VERB
can-11021	11	29	of	of	ADP
can-11021	11	30	nanoscale	nanoscale	NOUN
can-11021	11	31	silicon	silicon	NOUN
can-11021	11	32	inclusions	inclusion	NOUN
can-11021	11	33	(	(	PUNCT
can-11021	11	34	amorphous	amorphous	ADJ
can-11021	11	35	or	or	CCONJ
can-11021	11	36	crystalline	crystalline	NOUN
can-11021	11	37	)	)	PUNCT
can-11021	11	38	embedded	embed	VERB
can-11021	11	39	in	in	ADP
can-11021	11	40	a	a	DET
can-11021	11	41	silicon	silicon	NOUN
can-11021	11	42	oxide	oxide	NOUN
can-11021	11	43	matrix	matrix	NOUN
can-11021	11	44	[	[	X
can-11021	11	45	4–9	4–9	X
can-11021	11	46	]	]	X
can-11021	11	47	.	.	PUNCT
can-11021	12	1	the	the	DET
can-11021	12	2	interest	interest	NOUN
can-11021	12	3	in	in	ADP
can-11021	12	4	structures	structure	NOUN
can-11021	12	5	with	with	ADP
can-11021	12	6	nanoparticles	nanoparticle	NOUN
can-11021	12	7	is	be	AUX
can-11021	12	8	due	due	ADJ
can-11021	12	9	to	to	ADP
can-11021	12	10	the	the	DET
can-11021	12	11	unique	unique	ADJ
can-11021	12	12	properties	property	NOUN
can-11021	12	13	of	of	ADP
can-11021	12	14	these	these	DET
can-11021	12	15	structures	structure	NOUN
can-11021	12	16	,	,	PUNCT
can-11021	12	17	which	which	PRON
can-11021	12	18	can	can	AUX
can-11021	12	19	be	be	AUX
can-11021	12	20	radically	radically	ADV
can-11021	12	21	different	different	ADJ
can-11021	12	22	from	from	ADP
can-11021	12	23	the	the	DET
can-11021	12	24	properties	property	NOUN
can-11021	12	25	of	of	ADP
can-11021	12	26	massive	massive	ADJ
can-11021	12	27	homogeneous	homogeneous	ADJ
can-11021	12	28	materials	material	NOUN
can-11021	12	29	.	.	PUNCT
can-11021	13	1	and	and	CCONJ
can-11021	13	2	silicon	silicon	NOUN
can-11021	13	3	nanostructures	nanostructure	NOUN
can-11021	13	4	are	be	AUX
can-11021	13	5	one	one	NUM
can-11021	13	6	of	of	ADP
can-11021	13	7	the	the	DET
can-11021	13	8	three	three	NUM
can-11021	13	9	most	most	ADV
can-11021	13	10	convenient	convenient	ADJ
can-11021	13	11	building	building	NOUN
can-11021	13	12	blocks	block	NOUN
can-11021	13	13	of	of	ADP
can-11021	13	14	nanotechnology	nanotechnology	NOUN
can-11021	13	15	,	,	PUNCT
can-11021	13	16	along	along	ADP
can-11021	13	17	with	with	ADP
can-11021	13	18	gold	gold	NOUN
can-11021	13	19	and	and	CCONJ
can-11021	13	20	carbon	carbon	NOUN
can-11021	13	21	nanostructures	nanostructure	NOUN
can-11021	13	22	[	[	X
can-11021	13	23	10	10	NUM
can-11021	13	24	]	]	PUNCT
can-11021	13	25	.	.	PUNCT
can-11021	14	1	silicon	silicon	NOUN
can-11021	14	2	oxide	oxide	NOUN
can-11021	14	3	—	—	PUNCT
can-11021	14	4	nanosilicon	nanosilicon	ADJ
can-11021	14	5	composites	composite	NOUN
can-11021	14	6	are	be	AUX
can-11021	14	7	of	of	ADP
can-11021	14	8	particular	particular	ADJ
can-11021	14	9	interest	interest	NOUN
can-11021	14	10	[	[	X
can-11021	14	11	11–16	11–16	NUM
can-11021	14	12	]	]	X
can-11021	14	13	because	because	SCONJ
can-11021	14	14	of	of	ADP
can-11021	14	15	their	their	PRON
can-11021	14	16	promising	promising	ADJ
can-11021	14	17	use	use	NOUN
can-11021	14	18	in	in	ADP
can-11021	14	19	modern	modern	ADJ
can-11021	14	20	photonic	photonic	NOUN
can-11021	14	21	,	,	PUNCT
can-11021	14	22	optoelectronic	optoelectronic	ADJ
can-11021	14	23	,	,	PUNCT
can-11021	14	24	and	and	CCONJ
can-11021	14	25	photovoltaic	photovoltaic	NOUN
can-11021	14	26	devices	device	NOUN
can-11021	14	27	;	;	PUNCT
can-11021	14	28	flash	flash	NOUN
can-11021	14	29	memory	memory	NOUN
can-11021	14	30	devices	device	NOUN
can-11021	14	31	;	;	PUNCT
can-11021	14	32	as	as	SCONJ
can-11021	14	33	field	field	NOUN
can-11021	14	34	emission	emission	NOUN
can-11021	14	35	cathodes	cathode	NOUN
can-11021	14	36	;	;	PUNCT
can-11021	14	37	etc	etc	X
can-11021	14	38	.	.	X
can-11021	14	39	that	that	PRON
can-11021	14	40	are	be	AUX
can-11021	14	41	compatible	compatible	ADJ
can-11021	14	42	with	with	ADP
can-11021	14	43	the	the	DET
can-11021	14	44	mainstream	mainstream	NOUN
can-11021	14	45	microelectronics	microelectronic	NOUN
can-11021	14	46	technology	technology	NOUN
can-11021	14	47	.	.	PUNCT
can-11021	15	1	furthermore	furthermore	ADV
can-11021	15	2	,	,	PUNCT
can-11021	15	3	non	non	ADJ
can-11021	15	4	-	-	ADJ
can-11021	15	5	stoichiometric	stoichiometric	ADJ
can-11021	15	6	siox	siox	NOUN
can-11021	15	7	films	film	NOUN
can-11021	15	8	show	show	VERB
can-11021	15	9	great	great	ADJ
can-11021	15	10	potential	potential	NOUN
can-11021	15	11	for	for	ADP
can-11021	15	12	applications	application	NOUN
can-11021	15	13	in	in	ADP
can-11021	15	14	nonvolatile	nonvolatile	ADJ
can-11021	15	15	resistive	resistive	ADJ
can-11021	15	16	random	random	ADJ
can-11021	15	17	access	access	NOUN
can-11021	15	18	memory	memory	NOUN
can-11021	15	19	(	(	PUNCT
can-11021	15	20	rram	rram	PROPN
can-11021	15	21	,	,	PUNCT
can-11021	15	22	reram	reram	PROPN
can-11021	15	23	)	)	PUNCT
can-11021	16	1	[	[	X
can-11021	16	2	17,18	17,18	NUM
can-11021	16	3	]	]	PUNCT
can-11021	16	4	.	.	PUNCT
can-11021	17	1	these	these	DET
can-11021	17	2	advanced	advanced	ADJ
can-11021	17	3	devices	device	NOUN
can-11021	17	4	operate	operate	VERB
can-11021	17	5	by	by	ADP
can-11021	17	6	switching	switch	VERB
can-11021	17	7	between	between	ADP
can-11021	17	8	high	high	ADJ
can-11021	17	9	and	and	CCONJ
can-11021	17	10	low	low	ADJ
can-11021	17	11	resistance	resistance	NOUN
can-11021	17	12	states	state	NOUN
can-11021	17	13	when	when	SCONJ
can-11021	17	14	a	a	DET
can-11021	17	15	voltage	voltage	NOUN
can-11021	17	16	is	be	AUX
can-11021	17	17	applied	apply	VERB
can-11021	17	18	to	to	ADP
can-11021	17	19	a	a	DET
can-11021	17	20	metal	metal	NOUN
can-11021	17	21	-	-	PUNCT
can-11021	17	22	insulator	insulator	NOUN
can-11021	17	23	-	-	PUNCT
can-11021	17	24	metal	metal	NOUN
can-11021	17	25	(	(	PUNCT
can-11021	17	26	m	m	NOUN
can-11021	17	27	-	-	ADJ
can-11021	17	28	i	i	PROPN
can-11021	17	29	-	-	PUNCT
can-11021	17	30	m	m	NOUN
can-11021	17	31	)	)	PUNCT
can-11021	17	32	memory	memory	NOUN
can-11021	17	33	cell	cell	NOUN
can-11021	17	34	.	.	PUNCT
can-11021	18	1	the	the	DET
can-11021	18	2	development	development	NOUN
can-11021	18	3	of	of	ADP
can-11021	18	4	rram	rram	NOUN
can-11021	18	5	devices	device	NOUN
can-11021	18	6	based	base	VERB
can-11021	18	7	on	on	ADP
can-11021	18	8	siox	siox	NOUN
can-11021	18	9	films	film	NOUN
can-11021	18	10	could	could	AUX
can-11021	18	11	potentially	potentially	ADV
can-11021	18	12	lead	lead	VERB
can-11021	18	13	to	to	ADP
can-11021	18	14	the	the	DET
can-11021	18	15	low	low	ADJ
can-11021	18	16	-	-	PUNCT
can-11021	18	17	cost	cost	NOUN
can-11021	18	18	integration	integration	NOUN
can-11021	18	19	of	of	ADP
can-11021	18	20	such	such	ADJ
can-11021	18	21	cells	cell	NOUN
can-11021	18	22	into	into	ADP
can-11021	18	23	chips	chip	NOUN
can-11021	18	24	fabricated	fabricate	VERB
can-11021	18	25	using	use	VERB
can-11021	18	26	silicon	silicon	NOUN
can-11021	18	27	-	-	PUNCT
can-11021	18	28	based	base	VERB
can-11021	18	29	complementary	complementary	ADJ
can-11021	18	30	citation	citation	NOUN
can-11021	18	31	sopinskyy	sopinskyy	PROPN
can-11021	18	32	m	m	PROPN
can-11021	18	33	,	,	PUNCT
can-11021	18	34	indutnyi	indutnyi	PROPN
can-11021	18	35	i	i	PROPN
can-11021	18	36	,	,	PUNCT
can-11021	18	37	michailovska	michailovska	PROPN
can-11021	18	38	k	k	PROPN
can-11021	18	39	,	,	PUNCT
can-11021	18	40	yukhymchuk	yukhymchuk	NOUN
can-11021	18	41	v.	v.	ADP
can-11021	18	42	tracking	track	VERB
can-11021	18	43	the	the	DET
can-11021	18	44	thermostimulated	thermostimulated	ADJ
can-11021	18	45	transformations	transformation	NOUN
can-11021	18	46	of	of	ADP
can-11021	18	47	silicon	silicon	NOUN
can-11021	18	48	suboxide	suboxide	ADJ
can-11021	18	49	film	film	NOUN
can-11021	18	50	through	through	ADP
can-11021	18	51	absorption	absorption	NOUN
can-11021	18	52	edge	edge	NOUN
can-11021	18	53	characterization	characterization	NOUN
can-11021	18	54	.	.	PUNCT
can-11021	19	1	characterization	characterization	NOUN
can-11021	19	2	and	and	CCONJ
can-11021	19	3	application	application	NOUN
can-11021	19	4	of	of	ADP
can-11021	19	5	nanomaterials	nanomaterial	NOUN
can-11021	19	6	.	.	PUNCT
can-11021	20	1	2025	2025	NUM
can-11021	20	2	;	;	PUNCT
can-11021	20	3	8(2	8(2	NUM
can-11021	20	4	):	):	PUNCT
can-11021	20	5	11021	11021	NUM
can-11021	20	6	.	.	PUNCT
can-11021	21	1	https://doi.org/10.24294/can11021	https://doi.org/10.24294/can11021	NOUN
can-11021	21	2	article	article	NOUN
can-11021	21	3	info	info	NOUN
can-11021	21	4	received	receive	VERB
can-11021	21	5	:	:	PUNCT
can-11021	21	6	23	23	NUM
can-11021	21	7	december	december	PROPN
can-11021	21	8	2024	2024	NUM
can-11021	21	9	accepted	accept	VERB
can-11021	21	10	:	:	PUNCT
can-11021	21	11	18	18	NUM
can-11021	21	12	march	march	NOUN
can-11021	21	13	2025	2025	NUM
can-11021	21	14	available	available	ADJ
can-11021	21	15	online	online	ADV
can-11021	21	16	:	:	PUNCT
can-11021	21	17	6	6	NUM
can-11021	21	18	may	may	AUX
can-11021	21	19	2025	2025	NUM
can-11021	21	20	copyright	copyright	NOUN
can-11021	21	21	copyright	copyright	NOUN
can-11021	21	22	©	©	PROPN
can-11021	21	23	2025	2025	NUM
can-11021	21	24	by	by	ADP
can-11021	21	25	author(s	author(s	NOUN
can-11021	21	26	)	)	PUNCT
can-11021	21	27	.	.	PUNCT
can-11021	22	1	characterization	characterization	NOUN
can-11021	22	2	and	and	CCONJ
can-11021	22	3	application	application	NOUN
can-11021	22	4	of	of	ADP
can-11021	22	5	nanomaterials	nanomaterial	NOUN
can-11021	22	6	is	be	AUX
can-11021	22	7	published	publish	VERB
can-11021	22	8	by	by	ADP
can-11021	22	9	enpress	enpress	NOUN
can-11021	22	10	publisher	publisher	NOUN
can-11021	22	11	,	,	PUNCT
can-11021	22	12	llc	llc	PROPN
can-11021	22	13	.	.	PUNCT
can-11021	23	1	this	this	DET
can-11021	23	2	work	work	NOUN
can-11021	23	3	is	be	AUX
can-11021	23	4	licensed	license	VERB
can-11021	23	5	under	under	ADP
can-11021	23	6	the	the	DET
can-11021	23	7	creative	creative	ADJ
can-11021	23	8	commons	common	NOUN
can-11021	23	9	attribution	attribution	NOUN
can-11021	23	10	(	(	PUNCT
can-11021	23	11	cc	cc	NOUN
can-11021	23	12	by	by	ADP
can-11021	23	13	)	)	PUNCT
can-11021	23	14	license	license	NOUN
can-11021	23	15	.	.	PUNCT
can-11021	24	1	https://creativecommons.org/licenses/	https://creativecommons.org/licenses/	INTJ
can-11021	24	2	by/4.0/	by/4.0/	NOUN
can-11021	24	3	characterization	characterization	NOUN
can-11021	24	4	and	and	CCONJ
can-11021	24	5	application	application	NOUN
can-11021	24	6	of	of	ADP
can-11021	24	7	nanomaterials	nanomaterial	NOUN
can-11021	24	8	2025	2025	NUM
can-11021	24	9	,	,	PUNCT
can-11021	24	10	8(2	8(2	NUM
can-11021	24	11	)	)	PUNCT
can-11021	24	12	,	,	PUNCT
can-11021	24	13	11021	11021	NUM
can-11021	24	14	.	.	PUNCT
can-11021	25	1	2	2	NUM
can-11021	25	2	metal	metal	NOUN
can-11021	25	3	-	-	PUNCT
can-11021	25	4	oxide	oxide	NOUN
can-11021	25	5	-	-	PUNCT
can-11021	25	6	semiconductor	semiconductor	NOUN
can-11021	25	7	(	(	PUNCT
can-11021	25	8	cmos	cmos	NOUN
can-11021	25	9	)	)	PUNCT
can-11021	25	10	technology	technology	NOUN
can-11021	25	11	.	.	PUNCT
can-11021	26	1	the	the	DET
can-11021	26	2	possibility	possibility	NOUN
can-11021	26	3	of	of	ADP
can-11021	26	4	using	use	VERB
can-11021	26	5	rram	rram	NOUN
can-11021	26	6	devices	device	NOUN
can-11021	26	7	based	base	VERB
can-11021	26	8	on	on	ADP
can-11021	26	9	siox	siox	NOUN
can-11021	26	10	films	film	NOUN
can-11021	26	11	as	as	SCONJ
can-11021	26	12	electronic	electronic	ADJ
can-11021	26	13	synapses	synapsis	NOUN
can-11021	26	14	in	in	ADP
can-11021	26	15	neuromorphic	neuromorphic	ADJ
can-11021	26	16	computing	computing	NOUN
can-11021	26	17	has	have	AUX
can-11021	26	18	also	also	ADV
can-11021	26	19	been	be	AUX
can-11021	26	20	demonstrated	demonstrate	VERB
can-11021	26	21	[	[	X
can-11021	26	22	19	19	NUM
can-11021	26	23	]	]	PUNCT
can-11021	26	24	.	.	PUNCT
can-11021	27	1	large	large	ADJ
can-11021	27	2	variations	variation	NOUN
can-11021	27	3	in	in	ADP
can-11021	27	4	the	the	DET
can-11021	27	5	structural	structural	ADJ
can-11021	27	6	topology	topology	NOUN
can-11021	27	7	of	of	ADP
can-11021	27	8	siox	siox	NOUN
can-11021	27	9	films	film	NOUN
can-11021	27	10	with	with	ADP
can-11021	27	11	low	low	ADJ
can-11021	27	12	-	-	PUNCT
can-11021	27	13	energy	energy	NOUN
can-11021	27	14	topological	topological	ADJ
can-11021	27	15	defects	defect	NOUN
can-11021	27	16	provide	provide	VERB
can-11021	27	17	the	the	DET
can-11021	27	18	structural	structural	ADJ
can-11021	27	19	complexity	complexity	NOUN
can-11021	27	20	necessary	necessary	ADJ
can-11021	27	21	for	for	ADP
can-11021	27	22	the	the	DET
can-11021	27	23	implementation	implementation	NOUN
can-11021	27	24	of	of	ADP
can-11021	27	25	a	a	DET
can-11021	27	26	new	new	ADJ
can-11021	27	27	,	,	PUNCT
can-11021	27	28	relatively	relatively	ADV
can-11021	27	29	simple	simple	ADJ
can-11021	27	30	,	,	PUNCT
can-11021	27	31	and	and	CCONJ
can-11021	27	32	reliable	reliable	ADJ
can-11021	27	33	method	method	NOUN
can-11021	27	34	for	for	ADP
can-11021	27	35	information	information	NOUN
can-11021	27	36	encryption	encryption	NOUN
can-11021	27	37	,	,	PUNCT
can-11021	27	38	storage	storage	NOUN
can-11021	27	39	,	,	PUNCT
can-11021	27	40	and	and	CCONJ
can-11021	27	41	user	user	NOUN
can-11021	27	42	identification	identification	NOUN
can-11021	27	43	.	.	PUNCT
can-11021	28	1	this	this	DET
can-11021	28	2	method	method	NOUN
can-11021	28	3	uses	use	VERB
can-11021	28	4	a	a	DET
can-11021	28	5	physical	physical	ADJ
can-11021	28	6	key	key	NOUN
can-11021	28	7	known	know	VERB
can-11021	28	8	as	as	ADP
can-11021	28	9	the	the	DET
can-11021	28	10	‘	'	PUNCT
can-11021	28	11	physical	physical	ADJ
can-11021	28	12	unclonable	unclonable	ADJ
can-11021	28	13	function	function	NOUN
can-11021	28	14	’	'	PUNCT
can-11021	29	1	[	[	X
can-11021	29	2	20	20	NUM
can-11021	29	3	]	]	PUNCT
can-11021	29	4	.	.	PUNCT
can-11021	30	1	the	the	DET
can-11021	30	2	results	result	NOUN
can-11021	30	3	of	of	ADP
can-11021	30	4	theoretical	theoretical	ADJ
can-11021	30	5	calculations	calculation	NOUN
can-11021	30	6	performed	perform	VERB
can-11021	30	7	in	in	ADP
can-11021	30	8	[	[	X
can-11021	30	9	20	20	NUM
can-11021	30	10	]	]	PUNCT
can-11021	30	11	indicate	indicate	VERB
can-11021	30	12	that	that	SCONJ
can-11021	30	13	siox	siox	NOUN
can-11021	30	14	films	film	NOUN
can-11021	30	15	with	with	ADP
can-11021	30	16	a	a	DET
can-11021	30	17	stoichiometry	stoichiometry	NOUN
can-11021	30	18	index	index	NOUN
can-11021	30	19	of	of	ADP
can-11021	30	20	x	x	X
can-11021	31	1	~	~	PUNCT
can-11021	31	2	1.3–1.5	1.3–1.5	NUM
can-11021	31	3	are	be	AUX
can-11021	31	4	the	the	DET
can-11021	31	5	most	most	ADV
can-11021	31	6	promising	promising	ADJ
can-11021	31	7	in	in	ADP
can-11021	31	8	this	this	DET
can-11021	31	9	regard	regard	NOUN
can-11021	31	10	.	.	PUNCT
can-11021	32	1	a	a	DET
can-11021	32	2	review	review	NOUN
can-11021	32	3	of	of	ADP
can-11021	32	4	the	the	DET
can-11021	32	5	above	above	ADJ
can-11021	32	6	works	work	NOUN
can-11021	32	7	allows	allow	VERB
can-11021	32	8	us	we	PRON
can-11021	32	9	to	to	PART
can-11021	32	10	conclude	conclude	VERB
can-11021	32	11	that	that	SCONJ
can-11021	32	12	understanding	understand	VERB
can-11021	32	13	the	the	DET
can-11021	32	14	structure	structure	NOUN
can-11021	32	15	and	and	CCONJ
can-11021	32	16	properties	property	NOUN
can-11021	32	17	of	of	ADP
can-11021	32	18	silicon	silicon	PROPN
can-11021	32	19	suboxide	suboxide	PROPN
can-11021	32	20	is	be	AUX
can-11021	32	21	,	,	PUNCT
can-11021	32	22	on	on	ADP
can-11021	32	23	the	the	DET
can-11021	32	24	one	one	NUM
can-11021	32	25	hand	hand	NOUN
can-11021	32	26	,	,	PUNCT
can-11021	32	27	a	a	DET
can-11021	32	28	scientific	scientific	ADJ
can-11021	32	29	problem	problem	NOUN
can-11021	32	30	of	of	ADP
can-11021	32	31	some	some	DET
can-11021	32	32	complexity	complexity	NOUN
can-11021	32	33	and	and	CCONJ
can-11021	32	34	,	,	PUNCT
can-11021	32	35	on	on	ADP
can-11021	32	36	the	the	DET
can-11021	32	37	other	other	ADJ
can-11021	32	38	hand	hand	NOUN
can-11021	32	39	,	,	PUNCT
can-11021	32	40	of	of	ADP
can-11021	32	41	great	great	ADJ
can-11021	32	42	practical	practical	ADJ
can-11021	32	43	importance	importance	NOUN
can-11021	32	44	.	.	PUNCT
can-11021	33	1	in	in	ADP
can-11021	33	2	this	this	DET
can-11021	33	3	work	work	NOUN
can-11021	33	4	,	,	PUNCT
can-11021	33	5	the	the	DET
can-11021	33	6	near	near	ADJ
can-11021	33	7	-	-	PUNCT
can-11021	33	8	edge	edge	NOUN
can-11021	33	9	absorption	absorption	NOUN
can-11021	33	10	spectra	spectra	NOUN
can-11021	33	11	of	of	ADP
can-11021	33	12	vacuum	vacuum	NOUN
can-11021	33	13	-	-	PUNCT
can-11021	33	14	deposited	deposit	VERB
can-11021	33	15	films	film	NOUN
can-11021	33	16	of	of	ADP
can-11021	33	17	sio1.3	sio1.3	ADJ
can-11021	33	18	composition	composition	NOUN
can-11021	33	19	,	,	PUNCT
can-11021	33	20	both	both	CCONJ
can-11021	33	21	as	as	ADV
can-11021	33	22	-	-	PUNCT
can-11021	33	23	deposited	deposit	VERB
can-11021	33	24	and	and	CCONJ
can-11021	33	25	annealed	anneal	VERB
can-11021	33	26	at	at	ADP
can-11021	33	27	temperatures	temperature	NOUN
can-11021	33	28	from	from	ADP
can-11021	33	29	100	100	NUM
can-11021	33	30	c	c	VERB
can-11021	33	31	to	to	ADP
can-11021	33	32	1100	1100	NUM
can-11021	33	33	c	c	NUM
can-11021	33	34	,	,	PUNCT
can-11021	33	35	are	be	AUX
can-11021	33	36	studied	study	VERB
can-11021	33	37	in	in	ADP
can-11021	33	38	more	more	ADJ
can-11021	33	39	detail	detail	NOUN
can-11021	33	40	using	use	VERB
can-11021	33	41	the	the	DET
can-11021	33	42	reflection	reflection	NOUN
can-11021	33	43	-	-	PUNCT
can-11021	33	44	transmission	transmission	NOUN
can-11021	33	45	technique	technique	NOUN
can-11021	33	46	and	and	CCONJ
can-11021	33	47	analytical	analytical	ADJ
can-11021	33	48	processing	processing	NOUN
can-11021	33	49	of	of	ADP
can-11021	33	50	the	the	DET
can-11021	33	51	experimental	experimental	ADJ
can-11021	33	52	results	result	NOUN
can-11021	33	53	.	.	PUNCT
can-11021	34	1	we	we	PRON
can-11021	34	2	chose	choose	VERB
can-11021	34	3	the	the	DET
can-11021	34	4	specific	specific	ADJ
can-11021	34	5	temperature	temperature	NOUN
can-11021	34	6	range	range	NOUN
can-11021	34	7	for	for	ADP
can-11021	34	8	annealing	anneal	VERB
can-11021	34	9	the	the	DET
can-11021	34	10	samples	sample	NOUN
can-11021	34	11	because	because	SCONJ
can-11021	34	12	structural	structural	ADJ
can-11021	34	13	transformations	transformation	NOUN
can-11021	34	14	occur	occur	VERB
can-11021	34	15	in	in	ADP
can-11021	34	16	non	non	ADJ
can-11021	34	17	-	-	ADJ
can-11021	34	18	stoichiometric	stoichiometric	ADJ
can-11021	34	19	siox	siox	NOUN
can-11021	34	20	films	film	NOUN
can-11021	34	21	at	at	ADP
can-11021	34	22	these	these	DET
can-11021	34	23	temperatures	temperature	NOUN
can-11021	34	24	.	.	PUNCT
can-11021	35	1	specifically	specifically	ADV
can-11021	35	2	,	,	PUNCT
can-11021	35	3	detailed	detailed	ADJ
can-11021	35	4	studies	study	NOUN
can-11021	35	5	using	use	VERB
can-11021	35	6	xrd	xrd	NOUN
can-11021	35	7	,	,	PUNCT
can-11021	35	8	hrtem	hrtem	PROPN
can-11021	35	9	,	,	PUNCT
can-11021	35	10	raman	raman	NOUN
can-11021	35	11	,	,	PUNCT
can-11021	35	12	ir	ir	PROPN
can-11021	35	13	,	,	PUNCT
can-11021	35	14	and	and	CCONJ
can-11021	35	15	esr	esr	PROPN
can-11021	35	16	spectral	spectral	ADJ
can-11021	35	17	techniques	technique	NOUN
can-11021	35	18	[	[	X
can-11021	35	19	21−24	21−24	X
can-11021	35	20	]	]	PUNCT
can-11021	35	21	have	have	AUX
can-11021	35	22	shown	show	VERB
can-11021	35	23	that	that	SCONJ
can-11021	35	24	during	during	ADP
can-11021	35	25	low	low	ADJ
can-11021	35	26	-	-	PUNCT
can-11021	35	27	temperature	temperature	NOUN
can-11021	35	28	annealing	annealing	NOUN
can-11021	35	29	,	,	PUNCT
can-11021	35	30	the	the	DET
can-11021	35	31	broken	broken	ADJ
can-11021	35	32	bonds	bond	NOUN
can-11021	35	33	of	of	ADP
can-11021	35	34	silicon	silicon	NOUN
can-11021	35	35	and	and	CCONJ
can-11021	35	36	oxygen	oxygen	NOUN
can-11021	35	37	are	be	AUX
can-11021	35	38	healed	heal	VERB
can-11021	35	39	,	,	PUNCT
can-11021	35	40	and	and	CCONJ
can-11021	35	41	the	the	DET
can-11021	35	42	film	film	NOUN
can-11021	35	43	becomes	becomes	AUX
can-11021	35	44	compacted	compact	VERB
can-11021	35	45	.	.	PUNCT
can-11021	36	1	when	when	SCONJ
can-11021	36	2	the	the	DET
can-11021	36	3	annealing	anneal	VERB
can-11021	36	4	temperature	temperature	NOUN
can-11021	36	5	exceeds	exceed	VERB
can-11021	36	6	500	500	NUM
can-11021	36	7	c−600	c−600	NOUN
can-11021	36	8	°	°	ADP
can-11021	36	9	c	c	PROPN
can-11021	36	10	,	,	PUNCT
can-11021	36	11	amorphous	amorphous	ADJ
can-11021	36	12	si	si	X
can-11021	36	13	nanoinclusions	nanoinclusion	NOUN
can-11021	36	14	are	be	AUX
can-11021	36	15	formed	form	VERB
can-11021	36	16	and	and	CCONJ
can-11021	36	17	then	then	ADV
can-11021	36	18	enlarged	enlarge	VERB
can-11021	36	19	,	,	PUNCT
can-11021	36	20	with	with	ADP
can-11021	36	21	subsequent	subsequent	ADJ
can-11021	36	22	crystallization	crystallization	NOUN
can-11021	36	23	occurring	occur	VERB
can-11021	36	24	at	at	ADP
can-11021	36	25	temperatures	temperature	NOUN
can-11021	36	26	above	above	ADP
can-11021	36	27	1000	1000	NUM
can-11021	36	28	°	°	SYM
can-11021	36	29	c	c	NOUN
can-11021	36	30	.	.	PUNCT
can-11021	37	1	these	these	DET
can-11021	37	2	structural	structural	ADJ
can-11021	37	3	transformations	transformation	NOUN
can-11021	37	4	in	in	ADP
can-11021	37	5	the	the	DET
can-11021	37	6	siox	siox	NOUN
can-11021	37	7	layers	layer	NOUN
can-11021	37	8	lead	lead	VERB
can-11021	37	9	to	to	ADP
can-11021	37	10	the	the	DET
can-11021	37	11	observed	observe	VERB
can-11021	37	12	changes	change	NOUN
can-11021	37	13	in	in	ADP
can-11021	37	14	their	their	PRON
can-11021	37	15	optical	optical	ADJ
can-11021	37	16	properties	property	NOUN
can-11021	37	17	,	,	PUNCT
can-11021	37	18	which	which	PRON
can-11021	37	19	are	be	AUX
can-11021	37	20	studied	study	VERB
can-11021	37	21	in	in	ADP
can-11021	37	22	detail	detail	NOUN
can-11021	37	23	in	in	ADP
can-11021	37	24	this	this	DET
can-11021	37	25	paper	paper	NOUN
can-11021	37	26	.	.	PUNCT
can-11021	38	1	2	2	X
can-11021	38	2	.	.	X
can-11021	38	3	materials	material	NOUN
can-11021	38	4	and	and	CCONJ
can-11021	38	5	methods	method	NOUN
can-11021	38	6	siox	siox	NOUN
can-11021	38	7	films	film	NOUN
can-11021	38	8	with	with	ADP
can-11021	38	9	a	a	DET
can-11021	38	10	~0.5	~0.5	NUM
can-11021	38	11	m	m	PROPN
can-11021	38	12	thickness	thickness	NOUN
can-11021	38	13	were	be	AUX
can-11021	38	14	simultaneously	simultaneously	ADV
can-11021	38	15	deposited	deposit	VERB
can-11021	38	16	at	at	ADP
can-11021	38	17	a	a	DET
can-11021	38	18	rate	rate	NOUN
can-11021	38	19	of	of	ADP
can-11021	38	20	8	8	NUM
can-11021	38	21	nm	nm	NOUN
can-11021	38	22	/	/	SYM
can-11021	38	23	s	s	NOUN
can-11021	38	24	on	on	ADP
can-11021	38	25	ten	ten	NUM
can-11021	38	26	10	10	NUM
can-11021	38	27			NOUN
can-11021	38	28	10	10	NUM
can-11021	38	29			NOUN
can-11021	38	30	1	1	NUM
can-11021	38	31	mm	mm	NOUN
can-11021	38	32	polished	polished	ADJ
can-11021	38	33	fused	fuse	VERB
can-11021	38	34	quartz	quartz	NOUN
can-11021	38	35	substrates	substrate	NOUN
can-11021	38	36	heated	heat	VERB
can-11021	38	37	to	to	PART
can-11021	38	38	td	td	VERB
can-11021	38	39	=	=	NOUN
can-11021	38	40	100	100	NUM
can-11021	38	41	c	c	VERB
can-11021	38	42	by	by	ADP
can-11021	38	43	thermal	thermal	ADJ
can-11021	38	44	evaporation	evaporation	NOUN
can-11021	38	45	of	of	ADP
can-11021	38	46	99.9	99.9	NUM
can-11021	38	47	%	%	NOUN
can-11021	38	48	pure	pure	ADJ
can-11021	38	49	silicon	silicon	NOUN
can-11021	38	50	monoxide	monoxide	NOUN
can-11021	38	51	sio	sio	PROPN
can-11021	38	52	powder	powder	NOUN
can-11021	38	53	(	(	PUNCT
can-11021	38	54	cerac	cerac	PROPN
can-11021	38	55	inc	inc	PROPN
can-11021	38	56	.	.	PROPN
can-11021	38	57	,	,	PUNCT
can-11021	38	58	milwaukee	milwaukee	PROPN
can-11021	38	59	,	,	PUNCT
can-11021	38	60	wi	wi	PROPN
can-11021	38	61	,	,	PUNCT
can-11021	38	62	usa	usa	PROPN
can-11021	38	63	)	)	PUNCT
can-11021	38	64	in	in	ADP
can-11021	38	65	vacuum	vacuum	NOUN
can-11021	38	66	at	at	ADP
can-11021	38	67	a	a	DET
can-11021	38	68	residual	residual	ADJ
can-11021	38	69	pressure	pressure	NOUN
can-11021	38	70	of	of	ADP
can-11021	38	71	(	(	PUNCT
can-11021	38	72	1–2	1–2	NUM
can-11021	38	73	)	)	PUNCT
can-11021	38	74	×	×	PROPN
can-11021	38	75	10−5	10−5	NUM
can-11021	38	76	torr	torr	NOUN
can-11021	38	77	.	.	PUNCT
can-11021	39	1	the	the	DET
can-11021	39	2	deposition	deposition	NOUN
can-11021	39	3	rate	rate	NOUN
can-11021	39	4	and	and	CCONJ
can-11021	39	5	thickness	thickness	NOUN
can-11021	39	6	of	of	ADP
can-11021	39	7	the	the	DET
can-11021	39	8	deposited	deposit	VERB
can-11021	39	9	films	film	NOUN
can-11021	39	10	were	be	AUX
can-11021	39	11	controlled	control	VERB
can-11021	39	12	using	use	VERB
can-11021	39	13	a	a	DET
can-11021	39	14	quartzcrystal	quartzcrystal	ADJ
can-11021	39	15	microbalance	microbalance	NOUN
can-11021	39	16	thickness	thickness	NOUN
can-11021	39	17	gauge	gauge	NOUN
can-11021	39	18	(	(	PUNCT
can-11021	39	19	kit-1	kit-1	X
can-11021	39	20	)	)	PUNCT
can-11021	39	21	calibrated	calibrate	VERB
can-11021	39	22	with	with	ADP
can-11021	39	23	an	an	DET
can-11021	39	24	mii-4	mii-4	NOUN
can-11021	39	25	microinterferometer	microinterferometer	NOUN
can-11021	39	26	.	.	PUNCT
can-11021	40	1	the	the	DET
can-11021	40	2	films	film	NOUN
can-11021	40	3	were	be	AUX
can-11021	40	4	annealed	anneal	VERB
can-11021	40	5	for	for	ADP
can-11021	40	6	15	15	NUM
can-11021	40	7	min	min	NOUN
can-11021	40	8	in	in	ADP
can-11021	40	9	a	a	DET
can-11021	40	10	nitrogen	nitrogen	NOUN
can-11021	40	11	atmosphere	atmosphere	NOUN
can-11021	40	12	at	at	ADP
can-11021	40	13	temperatures	temperature	NOUN
can-11021	40	14	tan	tan	VERB
can-11021	40	15	=	=	NOUN
can-11021	40	16	100	100	NUM
can-11021	41	1	°	°	NUM
can-11021	41	2	c–1100	c–1100	PROPN
can-11021	41	3	°	°	PROPN
can-11021	41	4	c	c	PROPN
can-11021	41	5	.	.	PUNCT
can-11021	42	1	the	the	DET
can-11021	42	2	thicknesses	thickness	NOUN
can-11021	42	3	of	of	ADP
can-11021	42	4	the	the	DET
can-11021	42	5	resulting	result	VERB
can-11021	42	6	films	film	NOUN
can-11021	42	7	were	be	AUX
can-11021	42	8	measured	measure	VERB
can-11021	42	9	with	with	ADP
can-11021	42	10	an	an	DET
can-11021	42	11	accuracy	accuracy	NOUN
can-11021	42	12	of	of	ADP
can-11021	42	13	5	5	PROPN
can-11021	42	14	nm	nm	NOUN
can-11021	42	15	using	use	VERB
can-11021	42	16	a	a	DET
can-11021	42	17	lef-3	lef-3	NOUN
can-11021	42	18	-	-	ADJ
can-11021	42	19	m1	m1	ADJ
can-11021	42	20	laser	laser	NOUN
can-11021	42	21	ellipsometer	ellipsometer	NOUN
can-11021	42	22	.	.	PUNCT
can-11021	43	1	the	the	DET
can-11021	43	2	details	detail	NOUN
can-11021	43	3	of	of	ADP
can-11021	43	4	the	the	DET
can-11021	43	5	used	use	VERB
can-11021	43	6	methodology	methodology	NOUN
can-11021	43	7	can	can	AUX
can-11021	43	8	be	be	AUX
can-11021	43	9	found	find	VERB
can-11021	43	10	in	in	ADP
can-11021	43	11	the	the	DET
can-11021	43	12	works	work	NOUN
can-11021	43	13	[	[	X
can-11021	43	14	6,25	6,25	X
can-11021	43	15	]	]	PUNCT
can-11021	43	16	.	.	PUNCT
can-11021	44	1	the	the	DET
can-11021	44	2	transmission	transmission	NOUN
can-11021	44	3	t	t	NOUN
can-11021	44	4	and	and	CCONJ
can-11021	44	5	reflection	reflection	NOUN
can-11021	44	6	r	r	NOUN
can-11021	44	7	spectra	spectra	NOUN
can-11021	44	8	of	of	ADP
can-11021	44	9	these	these	DET
can-11021	44	10	samples	sample	NOUN
can-11021	44	11	before	before	ADV
can-11021	44	12	and	and	CCONJ
can-11021	44	13	after	after	SCONJ
can-11021	44	14	annealing	annealing	NOUN
can-11021	44	15	were	be	AUX
can-11021	44	16	measured	measure	VERB
can-11021	44	17	in	in	ADP
can-11021	44	18	the	the	DET
can-11021	44	19	wavelength	wavelength	NOUN
can-11021	44	20	range	range	NOUN
can-11021	44	21			X
can-11021	44	22	=	=	X
can-11021	44	23	400–750	400–750	NUM
can-11021	44	24	nm	nm	PRON
can-11021	44	25	(	(	PUNCT
can-11021	44	26	photon	photon	NOUN
can-11021	44	27	energy	energy	NOUN
can-11021	44	28	hν	hν	NOUN
can-11021	44	29	=	=	SYM
can-11021	44	30	1.65–3.10	1.65–3.10	NUM
can-11021	44	31	ev	ev	NOUN
can-11021	44	32	)	)	PUNCT
can-11021	44	33	using	use	VERB
can-11021	44	34	an	an	DET
can-11021	44	35	apparatus	apparatus	NOUN
can-11021	44	36	based	base	VERB
can-11021	44	37	on	on	ADP
can-11021	44	38	the	the	DET
can-11021	44	39	mdr-23	mdr-23	NOUN
can-11021	44	40	diffraction	diffraction	NOUN
can-11021	44	41	monochromator	monochromator	NOUN
can-11021	44	42	.	.	PUNCT
can-11021	45	1	the	the	DET
can-11021	45	2	stoichiometry	stoichiometry	NOUN
can-11021	45	3	index	index	NOUN
can-11021	45	4	x	x	PROPN
can-11021	45	5	of	of	ADP
can-11021	45	6	the	the	DET
can-11021	45	7	deposited	deposit	VERB
can-11021	45	8	films	film	NOUN
can-11021	45	9	was	be	AUX
can-11021	45	10	evaluated	evaluate	VERB
can-11021	45	11	using	use	VERB
can-11021	45	12	infrared	infrared	ADJ
can-11021	45	13	spectroscopy	spectroscopy	NOUN
can-11021	45	14	performed	perform	VERB
can-11021	45	15	on	on	ADP
can-11021	45	16	films	film	NOUN
can-11021	45	17	deposited	deposit	VERB
can-11021	45	18	in	in	ADP
can-11021	45	19	the	the	DET
can-11021	45	20	same	same	ADJ
can-11021	45	21	vacuum	vacuum	NOUN
can-11021	45	22	cycle	cycle	NOUN
can-11021	45	23	on	on	ADP
can-11021	45	24	doublepolished	doublepolishe	VERB
can-11021	45	25	silicon	silicon	NOUN
can-11021	45	26	wafers	wafer	NOUN
can-11021	45	27	.	.	PUNCT
can-11021	46	1	the	the	DET
can-11021	46	2	method	method	NOUN
can-11021	46	3	for	for	ADP
can-11021	46	4	determining	determine	VERB
can-11021	46	5	x	x	SYM
can-11021	46	6	using	use	VERB
can-11021	46	7	ir	ir	PROPN
can-11021	46	8	spectral	spectral	ADJ
can-11021	46	9	measurements	measurement	NOUN
can-11021	46	10	is	be	AUX
can-11021	46	11	described	describe	VERB
can-11021	46	12	in	in	ADP
can-11021	46	13	[	[	X
can-11021	46	14	26	26	NUM
can-11021	46	15	]	]	PUNCT
can-11021	46	16	;	;	PUNCT
can-11021	46	17	for	for	ADP
can-11021	46	18	our	our	PRON
can-11021	46	19	samples	sample	NOUN
can-11021	46	20	,	,	PUNCT
can-11021	46	21	the	the	DET
can-11021	46	22	value	value	NOUN
can-11021	46	23	x	x	PUNCT
can-11021	46	24	=	=	SYM
can-11021	46	25	1.3	1.3	NUM
can-11021	46	26	was	be	AUX
can-11021	46	27	obtained	obtain	VERB
can-11021	46	28	.	.	PUNCT
can-11021	47	1	characterization	characterization	NOUN
can-11021	47	2	and	and	CCONJ
can-11021	47	3	application	application	NOUN
can-11021	47	4	of	of	ADP
can-11021	47	5	nanomaterials	nanomaterial	NOUN
can-11021	47	6	2025	2025	NUM
can-11021	47	7	,	,	PUNCT
can-11021	47	8	8(2	8(2	NUM
can-11021	47	9	)	)	PUNCT
can-11021	47	10	,	,	PUNCT
can-11021	47	11	11021	11021	NUM
can-11021	47	12	.	.	PUNCT
can-11021	48	1	3	3	NUM
can-11021	48	2	3	3	NUM
can-11021	48	3	.	.	PUNCT
can-11021	48	4	results	result	NOUN
can-11021	48	5	and	and	CCONJ
can-11021	48	6	discussion	discussion	NOUN
can-11021	48	7	figure	figure	NOUN
can-11021	48	8	1	1	NUM
can-11021	48	9	illustrates	illustrate	VERB
can-11021	48	10	the	the	DET
can-11021	48	11	spectral	spectral	ADJ
can-11021	48	12	evolution	evolution	NOUN
can-11021	48	13	of	of	ADP
can-11021	48	14	the	the	DET
can-11021	48	15	absorptance	absorptance	NOUN
can-11021	48	16	,	,	PUNCT
can-11021	48	17	a	a	DET
can-11021	48	18	=	=	X
can-11021	48	19	(	(	PUNCT
can-11021	48	20	1	1	NUM
can-11021	48	21	−	−	NOUN
can-11021	48	22	r	r	NOUN
can-11021	48	23	−	−	PROPN
can-11021	48	24	t	t	PROPN
can-11021	48	25	)	)	PUNCT
can-11021	48	26	,	,	PUNCT
can-11021	48	27	both	both	PRON
can-11021	48	28	prior	prior	ADV
can-11021	48	29	to	to	ADP
can-11021	48	30	and	and	CCONJ
can-11021	48	31	following	follow	VERB
can-11021	48	32	the	the	DET
can-11021	48	33	annealing	annealing	NOUN
can-11021	48	34	.	.	PUNCT
can-11021	49	1	there	there	PRON
can-11021	49	2	is	be	VERB
can-11021	49	3	an	an	DET
can-11021	49	4	increase	increase	NOUN
can-11021	49	5	in	in	ADP
can-11021	49	6	a	a	PRON
can-11021	49	7	from	from	ADP
can-11021	49	8	0.014−0.12	0.014−0.12	NUM
can-11021	49	9	at	at	ADP
can-11021	49	10	the	the	DET
can-11021	49	11	long	long	ADJ
can-11021	49	12	-	-	PUNCT
can-11021	49	13	wave	wave	NOUN
can-11021	49	14	edge	edge	NOUN
can-11021	49	15	of	of	ADP
can-11021	49	16	the	the	DET
can-11021	49	17	measuring	measure	VERB
can-11021	49	18	range	range	NOUN
can-11021	49	19	to	to	ADP
can-11021	49	20	0.84−0.92	0.84−0.92	PROPN
can-11021	49	21	at	at	ADP
can-11021	49	22	its	its	PRON
can-11021	49	23	short	short	ADJ
can-11021	49	24	-	-	PUNCT
can-11021	49	25	wave	wave	NOUN
can-11021	49	26	edge	edge	NOUN
can-11021	49	27	.	.	PUNCT
can-11021	50	1	the	the	DET
can-11021	50	2	difference	difference	NOUN
can-11021	50	3	between	between	ADP
can-11021	50	4	a	a	PRON
can-11021	50	5	and	and	CCONJ
can-11021	50	6	1	1	NUM
can-11021	50	7	at	at	ADP
can-11021	50	8	the	the	DET
can-11021	50	9	short	short	ADJ
can-11021	50	10	-	-	PUNCT
can-11021	50	11	wave	wave	NOUN
can-11021	50	12	edge	edge	NOUN
can-11021	50	13	of	of	ADP
can-11021	50	14	the	the	DET
can-11021	50	15	range	range	NOUN
can-11021	50	16	is	be	AUX
can-11021	50	17	almost	almost	ADV
can-11021	50	18	entirely	entirely	ADV
can-11021	50	19	due	due	ADJ
can-11021	50	20	to	to	ADP
can-11021	50	21	the	the	DET
can-11021	50	22	value	value	NOUN
can-11021	50	23	of	of	ADP
can-11021	50	24	r	r	NOUN
can-11021	50	25	,	,	PUNCT
can-11021	50	26	i.e.	i.e.	X
can-11021	50	27	,	,	PUNCT
can-11021	50	28	there	there	PRON
can-11021	50	29	is	be	VERB
can-11021	50	30	almost	almost	ADV
can-11021	50	31	no	no	DET
can-11021	50	32	transmission	transmission	NOUN
can-11021	50	33	here	here	ADV
can-11021	50	34	.	.	PUNCT
can-11021	51	1	figure	figure	NOUN
can-11021	51	2	1	1	NUM
can-11021	51	3	also	also	ADV
can-11021	51	4	shows	show	VERB
can-11021	51	5	that	that	SCONJ
can-11021	51	6	the	the	DET
can-11021	51	7	growth	growth	NOUN
can-11021	51	8	of	of	ADP
can-11021	51	9	tan	tan	PROPN
can-11021	51	10	in	in	ADP
can-11021	51	11	the	the	DET
can-11021	51	12	range	range	NOUN
can-11021	51	13	300	300	NUM
can-11021	51	14	°	°	NOUN
can-11021	51	15	c–500	c–500	NOUN
can-11021	51	16	°	°	ADP
can-11021	51	17	c	c	NOUN
can-11021	51	18	gradually	gradually	ADV
can-11021	51	19	shifts	shift	VERB
can-11021	51	20	the	the	DET
can-11021	51	21	absorption	absorption	NOUN
can-11021	51	22	edge	edge	NOUN
can-11021	51	23	to	to	ADP
can-11021	51	24	shorter	short	ADJ
can-11021	51	25	wavelengths	wavelength	NOUN
can-11021	51	26	.	.	PUNCT
can-11021	52	1	however	however	ADV
can-11021	52	2	,	,	PUNCT
can-11021	52	3	annealing	anneal	VERB
can-11021	52	4	at	at	ADP
can-11021	52	5	600	600	NUM
can-11021	52	6	°	°	NOUN
can-11021	52	7	c	c	NOUN
can-11021	52	8	changes	change	VERB
can-11021	52	9	the	the	DET
can-11021	52	10	direction	direction	NOUN
can-11021	52	11	of	of	ADP
can-11021	52	12	the	the	DET
can-11021	52	13	absorption	absorption	NOUN
can-11021	52	14	edge	edge	NOUN
can-11021	52	15	shift	shift	NOUN
can-11021	52	16	to	to	ADP
can-11021	52	17	the	the	DET
can-11021	52	18	opposite	opposite	NOUN
can-11021	52	19	.	.	PUNCT
can-11021	53	1	the	the	DET
can-11021	53	2	long	long	ADJ
can-11021	53	3	-	-	PUNCT
can-11021	53	4	wavelength	wavelength	NOUN
can-11021	53	5	shift	shift	NOUN
can-11021	53	6	in	in	ADP
can-11021	53	7	the	the	DET
can-11021	53	8	absorption	absorption	NOUN
can-11021	53	9	edge	edge	NOUN
can-11021	53	10	is	be	AUX
can-11021	53	11	augmented	augment	VERB
can-11021	53	12	by	by	ADP
can-11021	53	13	annealing	anneal	VERB
can-11021	53	14	at	at	ADP
can-11021	53	15	770	770	NUM
can-11021	53	16	°	°	NOUN
can-11021	53	17	c	c	NOUN
can-11021	53	18	and	and	CCONJ
can-11021	53	19	is	be	AUX
can-11021	53	20	further	far	ADV
can-11021	53	21	enhanced	enhance	VERB
can-11021	53	22	by	by	ADP
can-11021	53	23	annealing	anneal	VERB
can-11021	53	24	at	at	ADP
can-11021	53	25	910	910	NUM
can-11021	53	26	°	°	NOUN
can-11021	53	27	c	c	NOUN
can-11021	53	28	.	.	PUNCT
can-11021	54	1	annealing	anneal	VERB
can-11021	54	2	at	at	ADP
can-11021	54	3	1010	1010	NUM
can-11021	54	4	°	°	NOUN
can-11021	54	5	c	c	NOUN
can-11021	54	6	shifts	shift	NOUN
can-11021	54	7	the	the	DET
can-11021	54	8	absorption	absorption	NOUN
can-11021	54	9	edge	edge	NOUN
can-11021	54	10	of	of	ADP
can-11021	54	11	the	the	DET
can-11021	54	12	film	film	NOUN
can-11021	54	13	to	to	ADP
can-11021	54	14	the	the	DET
can-11021	54	15	short	short	ADJ
can-11021	54	16	-	-	PUNCT
can-11021	54	17	wavelength	wavelength	NOUN
can-11021	54	18	side	side	NOUN
can-11021	54	19	compared	compare	VERB
can-11021	54	20	to	to	ADP
can-11021	54	21	annealing	anneal	VERB
can-11021	54	22	at	at	ADP
can-11021	54	23	910	910	NUM
can-11021	54	24	°	°	NOUN
can-11021	54	25	c	c	NOUN
can-11021	54	26	.	.	PUNCT
can-11021	55	1	further	furth	ADJ
can-11021	55	2	increase	increase	VERB
can-11021	55	3	in	in	ADP
can-11021	55	4	the	the	DET
can-11021	55	5	annealing	anneal	VERB
can-11021	55	6	temperature	temperature	NOUN
can-11021	55	7	to	to	ADP
can-11021	55	8	1100	1100	NUM
can-11021	55	9	°	°	ADP
can-11021	55	10	c	c	NOUN
can-11021	55	11	results	result	NOUN
can-11021	55	12	in	in	ADP
can-11021	55	13	a	a	DET
can-11021	55	14	shift	shift	NOUN
can-11021	55	15	of	of	ADP
can-11021	55	16	the	the	DET
can-11021	55	17	absorption	absorption	NOUN
can-11021	55	18	edge	edge	NOUN
can-11021	55	19	to	to	ADP
can-11021	55	20	a	a	DET
can-11021	55	21	position	position	NOUN
can-11021	55	22	that	that	PRON
can-11021	55	23	is	be	AUX
can-11021	55	24	in	in	ADP
can-11021	55	25	close	close	ADJ
can-11021	55	26	proximity	proximity	NOUN
can-11021	55	27	to	to	ADP
can-11021	55	28	that	that	PRON
can-11021	55	29	of	of	ADP
can-11021	55	30	the	the	DET
can-11021	55	31	as	as	ADV
can-11021	55	32	-	-	PUNCT
can-11021	55	33	deposited	deposit	VERB
can-11021	55	34	film	film	NOUN
can-11021	55	35	.	.	PUNCT
can-11021	56	1	such	such	DET
can-11021	56	2	a	a	DET
can-11021	56	3	non	non	ADJ
can-11021	56	4	-	-	ADJ
can-11021	56	5	monotonic	monotonic	ADJ
can-11021	56	6	excursion	excursion	NOUN
can-11021	56	7	of	of	ADP
can-11021	56	8	the	the	DET
can-11021	56	9	absorption	absorption	NOUN
can-11021	56	10	band	band	NOUN
can-11021	56	11	edge	edge	NOUN
can-11021	56	12	indicates	indicate	VERB
can-11021	56	13	the	the	DET
can-11021	56	14	complex	complex	ADJ
can-11021	56	15	nature	nature	NOUN
can-11021	56	16	of	of	ADP
can-11021	56	17	the	the	DET
can-11021	56	18	structural	structural	ADJ
can-11021	56	19	changes	change	NOUN
can-11021	56	20	undergone	undergo	VERB
can-11021	56	21	by	by	ADP
can-11021	56	22	the	the	DET
can-11021	56	23	film	film	NOUN
can-11021	56	24	during	during	ADP
can-11021	56	25	annealing	anneal	VERB
can-11021	56	26	.	.	PUNCT
can-11021	57	1	this	this	PRON
can-11021	57	2	is	be	AUX
can-11021	57	3	also	also	ADV
can-11021	57	4	evident	evident	ADJ
can-11021	57	5	in	in	ADP
can-11021	57	6	the	the	DET
can-11021	57	7	shape	shape	NOUN
can-11021	57	8	of	of	ADP
can-11021	57	9	the	the	DET
can-11021	57	10	absorption	absorption	NOUN
can-11021	57	11	curves	curve	NOUN
can-11021	57	12	,	,	PUNCT
can-11021	57	13	which	which	PRON
can-11021	57	14	differs	differ	VERB
can-11021	57	15	significantly	significantly	ADV
can-11021	57	16	for	for	ADP
can-11021	57	17	different	different	ADJ
can-11021	57	18	annealing	anneal	VERB
can-11021	57	19	temperatures	temperature	NOUN
can-11021	57	20	.	.	PUNCT
can-11021	58	1	figure	figure	NOUN
can-11021	58	2	1	1	NUM
can-11021	58	3	.	.	PUNCT
can-11021	59	1	absorptance	absorptance	ADP
can-11021	59	2	spectra	spectra	NOUN
can-11021	59	3	of	of	ADP
can-11021	59	4	a	a	DET
can-11021	59	5	=	=	SYM
can-11021	59	6	1	1	NUM
can-11021	59	7	−	−	NOUN
can-11021	59	8	r	r	NOUN
can-11021	59	9	−	−	PROPN
can-11021	59	10	t	t	NOUN
can-11021	59	11	of	of	ADP
can-11021	59	12	the	the	DET
can-11021	59	13	as	as	ADV
can-11021	59	14	-	-	PUNCT
can-11021	59	15	deposited	deposit	VERB
can-11021	59	16	siox	siox	NOUN
can-11021	59	17	film	film	NOUN
can-11021	59	18	(	(	PUNCT
can-11021	59	19	1	1	NUM
can-11021	59	20	)	)	PUNCT
can-11021	59	21	and	and	CCONJ
can-11021	59	22	after	after	ADP
can-11021	59	23	15	15	NUM
can-11021	59	24	-	-	PUNCT
can-11021	59	25	minute	minute	NOUN
can-11021	59	26	annealing	annealing	NOUN
can-11021	59	27	at	at	ADP
can-11021	59	28	300	300	NUM
can-11021	59	29	(	(	PUNCT
can-11021	59	30	2	2	NUM
can-11021	59	31	)	)	PUNCT
can-11021	59	32	,	,	PUNCT
can-11021	59	33	500	500	NUM
can-11021	59	34	(	(	PUNCT
can-11021	59	35	3	3	NUM
can-11021	59	36	)	)	PUNCT
can-11021	59	37	,	,	PUNCT
can-11021	59	38	600	600	NUM
can-11021	59	39	(	(	PUNCT
can-11021	59	40	4	4	NUM
can-11021	59	41	)	)	PUNCT
can-11021	59	42	,	,	PUNCT
can-11021	59	43	770	770	NUM
can-11021	59	44	(	(	PUNCT
can-11021	59	45	5	5	NUM
can-11021	59	46	)	)	PUNCT
can-11021	59	47	,	,	PUNCT
can-11021	59	48	910	910	NUM
can-11021	59	49	(	(	PUNCT
can-11021	59	50	6	6	NUM
can-11021	59	51	)	)	PUNCT
can-11021	59	52	,	,	PUNCT
can-11021	59	53	1010	1010	NUM
can-11021	59	54	(	(	PUNCT
can-11021	59	55	7	7	NUM
can-11021	59	56	)	)	PUNCT
can-11021	59	57	,	,	PUNCT
can-11021	59	58	and	and	CCONJ
can-11021	60	1	1100	1100	NUM
can-11021	60	2	°	°	NUM
can-11021	60	3	c	c	X
can-11021	60	4	(	(	PUNCT
can-11021	60	5	8)	8)	NUM
can-11021	60	6	.	.	PUNCT
can-11021	61	1	the	the	DET
can-11021	61	2	absorption	absorption	NOUN
can-11021	61	3	coefficient	coefficient	NOUN
can-11021	61	4	α	α	NUM
can-11021	61	5	of	of	ADP
can-11021	61	6	the	the	DET
can-11021	61	7	films	film	NOUN
can-11021	61	8	was	be	AUX
can-11021	61	9	determined	determine	VERB
can-11021	61	10	by	by	ADP
can-11021	61	11	the	the	DET
can-11021	61	12	formula	formula	NOUN
can-11021	62	1	[	[	X
can-11021	62	2	27	27	NUM
can-11021	62	3	]	]	X
can-11021	62	4	:	:	PUNCT
can-11021	62	5	𝛼	𝛼	X
can-11021	62	6	=	=	SYM
can-11021	62	7	1	1	NUM
can-11021	62	8	𝑑	𝑑	PROPN
can-11021	62	9	ln	ln	PROPN
can-11021	62	10	𝑇s(1	𝑇s(1	NOUN
can-11021	62	11	−	−	PROPN
can-11021	62	12	𝑅	𝑅	PROPN
can-11021	62	13	)	)	PUNCT
can-11021	62	14	𝑇	𝑇	PROPN
can-11021	62	15	(	(	PUNCT
can-11021	62	16	1	1	NUM
can-11021	62	17	)	)	PUNCT
can-11021	62	18	where	where	SCONJ
can-11021	62	19	ts	ts	ADV
can-11021	62	20	is	be	AUX
can-11021	62	21	the	the	DET
can-11021	62	22	transmittance	transmittance	NOUN
can-11021	62	23	of	of	ADP
can-11021	62	24	the	the	DET
can-11021	62	25	substrate	substrate	NOUN
can-11021	62	26	without	without	ADP
can-11021	62	27	film	film	NOUN
can-11021	62	28	.	.	PUNCT
can-11021	63	1	in	in	ADP
can-11021	63	2	amorphous	amorphous	ADJ
can-11021	63	3	,	,	PUNCT
can-11021	63	4	disordered	disordered	ADJ
can-11021	63	5	,	,	PUNCT
can-11021	63	6	heterogeneous	heterogeneous	ADJ
can-11021	63	7	,	,	PUNCT
can-11021	63	8	nanostructured	nanostructure	VERB
can-11021	63	9	semiconductor	semiconductor	NOUN
can-11021	63	10	and	and	CCONJ
can-11021	63	11	dielectric	dielectric	ADJ
can-11021	63	12	materials	material	NOUN
can-11021	63	13	,	,	PUNCT
can-11021	63	14	there	there	PRON
can-11021	63	15	are	be	VERB
can-11021	63	16	usually	usually	ADV
can-11021	63	17	regions	region	NOUN
can-11021	63	18	of	of	ADP
can-11021	63	19	the	the	DET
can-11021	63	20	spectra	spectra	NOUN
can-11021	63	21	described	describe	VERB
can-11021	63	22	by	by	ADP
can-11021	63	23	the	the	DET
can-11021	63	24	urbach	urbach	ADJ
can-11021	63	25	dependence	dependence	NOUN
can-11021	63	26	[	[	X
can-11021	63	27	28	28	NUM
can-11021	63	28	]	]	SYM
can-11021	63	29	:	:	PUNCT
can-11021	63	30	𝛼(ℎ𝑣	𝛼(ℎ𝑣	NOUN
can-11021	63	31	)	)	PUNCT
can-11021	63	32	=	=	SYM
can-11021	63	33	𝐴	𝐴	PROPN
can-11021	63	34	∙	∙	PROPN
can-11021	63	35	exp⁡(ℎ𝑣/𝐸u	exp⁡(ℎ𝑣/𝐸u	PROPN
can-11021	63	36	)	)	PUNCT
can-11021	63	37	(	(	PUNCT
can-11021	63	38	2	2	X
can-11021	63	39	)	)	PUNCT
can-11021	63	40	1.8	1.8	NUM
can-11021	63	41	2.1	2.1	NUM
can-11021	63	42	2.4	2.4	NUM
can-11021	63	43	2.7	2.7	NUM
can-11021	63	44	3.0	3.0	NUM
can-11021	63	45	0.0	0.0	NUM
can-11021	63	46	0.2	0.2	NUM
can-11021	63	47	0.4	0.4	NUM
can-11021	63	48	0.6	0.6	NUM
can-11021	63	49	0.8	0.8	NUM
can-11021	63	50	photon	photon	NOUN
can-11021	63	51	energy	energy	NOUN
can-11021	63	52	h	h	PROPN
can-11021	63	53	,	,	PUNCT
can-11021	63	54	ev	ev	ADP
can-11021	63	55	a	a	PRON
can-11021	63	56	b	b	NOUN
can-11021	63	57	so	so	ADV
can-11021	63	58	r	r	NOUN
can-11021	63	59	p	p	X
can-11021	63	60	ta	ta	PROPN
can-11021	63	61	n	n	PROPN
can-11021	63	62	c	c	NOUN
can-11021	63	63	e	e	X
can-11021	63	64	a	a	X
can-11021	63	65	=	=	SYM
can-11021	63	66	1	1	NUM
can-11021	63	67	-r	-r	SYM
can-11021	63	68	-t	-t	NUM
can-11021	63	69	1	1	NUM
can-11021	63	70	2	2	NUM
can-11021	63	71	3	3	NUM
can-11021	63	72	4	4	NUM
can-11021	63	73	5	5	NUM
can-11021	63	74	6	6	NUM
can-11021	63	75	7	7	NUM
can-11021	63	76	8	8	NUM
can-11021	63	77	characterization	characterization	NOUN
can-11021	63	78	and	and	CCONJ
can-11021	63	79	application	application	NOUN
can-11021	63	80	of	of	ADP
can-11021	63	81	nanomaterials	nanomaterial	NOUN
can-11021	63	82	2025	2025	NUM
can-11021	63	83	,	,	PUNCT
can-11021	63	84	8(2	8(2	NUM
can-11021	63	85	)	)	PUNCT
can-11021	63	86	,	,	PUNCT
can-11021	63	87	11021	11021	NUM
can-11021	63	88	.	.	PUNCT
can-11021	64	1	4	4	NUM
can-11021	64	2	the	the	DET
can-11021	64	3	absorption	absorption	NOUN
can-11021	64	4	in	in	ADP
can-11021	64	5	the	the	DET
can-11021	64	6	region	region	NOUN
can-11021	64	7	described	describe	VERB
can-11021	64	8	by	by	ADP
can-11021	64	9	equation	equation	NOUN
can-11021	64	10	(	(	PUNCT
can-11021	64	11	2	2	X
can-11021	64	12	)	)	PUNCT
can-11021	64	13	is	be	AUX
can-11021	64	14	caused	cause	VERB
can-11021	64	15	by	by	ADP
can-11021	64	16	the	the	DET
can-11021	64	17	superposition	superposition	NOUN
can-11021	64	18	of	of	ADP
can-11021	64	19	transitions	transition	NOUN
can-11021	64	20	from	from	ADP
can-11021	64	21	localized	localized	ADJ
can-11021	64	22	states	state	NOUN
can-11021	64	23	in	in	ADP
can-11021	64	24	the	the	DET
can-11021	64	25	valence	valence	NOUN
can-11021	64	26	band	band	NOUN
can-11021	64	27	tail	tail	NOUN
can-11021	64	28	to	to	AUX
can-11021	64	29	nonlocalized	nonlocalize	VERB
can-11021	64	30	states	state	NOUN
can-11021	64	31	in	in	ADP
can-11021	64	32	the	the	DET
can-11021	64	33	conduction	conduction	NOUN
can-11021	64	34	band	band	NOUN
can-11021	64	35	and	and	CCONJ
can-11021	64	36	transitions	transition	NOUN
can-11021	64	37	from	from	ADP
can-11021	64	38	non	non	ADJ
can-11021	64	39	-	-	ADJ
can-11021	64	40	localized	localized	ADJ
can-11021	64	41	states	state	NOUN
can-11021	64	42	in	in	ADP
can-11021	64	43	the	the	DET
can-11021	64	44	valence	valence	NOUN
can-11021	64	45	band	band	NOUN
can-11021	64	46	to	to	ADP
can-11021	64	47	localized	localized	ADJ
can-11021	64	48	states	state	NOUN
can-11021	64	49	in	in	ADP
can-11021	64	50	the	the	DET
can-11021	64	51	conduction	conduction	NOUN
can-11021	64	52	band	band	NOUN
can-11021	64	53	tail	tail	NOUN
can-11021	64	54	.	.	PUNCT
can-11021	65	1	in	in	ADP
can-11021	65	2	equation	equation	NOUN
can-11021	65	3	(	(	PUNCT
can-11021	65	4	2	2	NUM
can-11021	65	5	)	)	PUNCT
can-11021	65	6	,	,	PUNCT
can-11021	65	7	a	a	PRON
can-11021	65	8	is	be	AUX
can-11021	65	9	a	a	DET
can-11021	65	10	numerical	numerical	ADJ
can-11021	65	11	constant	constant	NOUN
can-11021	65	12	and	and	CCONJ
can-11021	65	13	eu	eu	PROPN
can-11021	65	14	(	(	PUNCT
can-11021	65	15	urbach	urbach	NOUN
can-11021	65	16	energy	energy	NOUN
can-11021	65	17	)	)	PUNCT
can-11021	65	18	characterizes	characterize	VERB
can-11021	65	19	the	the	DET
can-11021	65	20	width	width	NOUN
can-11021	65	21	of	of	ADP
can-11021	65	22	the	the	DET
can-11021	65	23	exponential	exponential	ADJ
can-11021	65	24	absorption	absorption	NOUN
can-11021	65	25	tail	tail	NOUN
can-11021	65	26	.	.	PUNCT
can-11021	66	1	it	it	PRON
can-11021	66	2	correlates	correlate	VERB
can-11021	66	3	with	with	ADP
can-11021	66	4	the	the	DET
can-11021	66	5	widths	width	NOUN
can-11021	66	6	of	of	ADP
can-11021	66	7	the	the	DET
can-11021	66	8	tails	tail	NOUN
can-11021	66	9	of	of	ADP
can-11021	66	10	the	the	DET
can-11021	66	11	localized	localize	VERB
can-11021	66	12	valence	valence	NOUN
can-11021	66	13	band	band	NOUN
can-11021	66	14	states	state	NOUN
can-11021	66	15	γv	γv	NOUN
can-11021	66	16	and	and	CCONJ
can-11021	66	17	conduction	conduction	NOUN
can-11021	66	18	band	band	NOUN
can-11021	66	19	states	state	NOUN
can-11021	66	20	γc	γc	VERB
can-11021	66	21	and	and	CCONJ
can-11021	66	22	is	be	AUX
can-11021	66	23	mainly	mainly	ADV
can-11021	66	24	determined	determine	VERB
can-11021	66	25	by	by	ADP
can-11021	66	26	the	the	DET
can-11021	66	27	larger	large	ADJ
can-11021	66	28	of	of	ADP
can-11021	66	29	the	the	DET
can-11021	66	30	two	two	NUM
can-11021	66	31	,	,	PUNCT
can-11021	66	32	i.e.	i.e.	X
can-11021	66	33	,	,	PUNCT
can-11021	66	34	eu	eu	PROPN
can-11021	66	35	~	~	PUNCT
can-11021	66	36	max(γc	max(γc	NOUN
can-11021	66	37	,	,	PUNCT
can-11021	66	38	γv	γv	NOUN
can-11021	66	39	)	)	PUNCT
can-11021	67	1	[	[	X
can-11021	67	2	29	29	NUM
can-11021	67	3	]	]	PUNCT
can-11021	67	4	.	.	PUNCT
can-11021	68	1	figure	figure	NOUN
can-11021	68	2	2	2	NUM
can-11021	68	3	.	.	PUNCT
can-11021	68	4	spectra	spectra	NOUN
can-11021	68	5	of	of	ADP
can-11021	68	6	the	the	DET
can-11021	68	7	absorption	absorption	NOUN
can-11021	68	8	coefficient	coefficient	NOUN
can-11021	68	9	α	α	NOUN
can-11021	68	10	of	of	ADP
can-11021	68	11	the	the	DET
can-11021	68	12	as	as	ADV
can-11021	68	13	-	-	PUNCT
can-11021	68	14	deposited	deposit	VERB
can-11021	68	15	siox	siox	NOUN
can-11021	68	16	film	film	NOUN
can-11021	68	17	(	(	PUNCT
can-11021	68	18	1	1	NUM
can-11021	68	19	)	)	PUNCT
can-11021	68	20	and	and	CCONJ
can-11021	68	21	after	after	ADP
can-11021	68	22	15	15	NUM
can-11021	68	23	-	-	PUNCT
can-11021	68	24	minute	minute	NOUN
can-11021	68	25	annealing	annealing	NOUN
can-11021	68	26	at	at	ADP
can-11021	68	27	300	300	NUM
can-11021	68	28	(	(	PUNCT
can-11021	68	29	2	2	NUM
can-11021	68	30	)	)	PUNCT
can-11021	68	31	,	,	PUNCT
can-11021	68	32	500	500	NUM
can-11021	68	33	(	(	PUNCT
can-11021	68	34	3	3	NUM
can-11021	68	35	)	)	PUNCT
can-11021	68	36	,	,	PUNCT
can-11021	68	37	600	600	NUM
can-11021	68	38	(	(	PUNCT
can-11021	68	39	4	4	NUM
can-11021	68	40	)	)	PUNCT
can-11021	68	41	,	,	PUNCT
can-11021	68	42	770	770	NUM
can-11021	68	43	(	(	PUNCT
can-11021	68	44	5	5	NUM
can-11021	68	45	)	)	PUNCT
can-11021	68	46	,	,	PUNCT
can-11021	68	47	910	910	NUM
can-11021	68	48	(	(	PUNCT
can-11021	68	49	6	6	NUM
can-11021	68	50	)	)	PUNCT
can-11021	68	51	,	,	PUNCT
can-11021	68	52	1010	1010	NUM
can-11021	68	53	(	(	PUNCT
can-11021	68	54	7	7	NUM
can-11021	68	55	)	)	PUNCT
can-11021	68	56	,	,	PUNCT
can-11021	68	57	and	and	CCONJ
can-11021	68	58	1100	1100	NUM
can-11021	68	59	°	°	NUM
can-11021	68	60	c	c	X
can-11021	68	61	(	(	PUNCT
can-11021	68	62	8)	8)	NUM
can-11021	68	63	,	,	PUNCT
can-11021	68	64	plotted	plot	VERB
can-11021	68	65	in	in	ADP
can-11021	68	66	semi	semi	ADJ
can-11021	68	67	-	-	ADJ
can-11021	68	68	logarithmic	logarithmic	ADJ
can-11021	68	69	coordinates	coordinate	NOUN
can-11021	68	70	.	.	PUNCT
can-11021	69	1	figure	figure	NOUN
can-11021	69	2	2	2	NUM
can-11021	69	3	presents	present	VERB
can-11021	69	4	the	the	DET
can-11021	69	5	absorption	absorption	NOUN
can-11021	69	6	coefficient	coefficient	NOUN
can-11021	69	7	spectra	spectra	PROPN
can-11021	69	8	plotted	plot	VERB
can-11021	69	9	in	in	ADP
can-11021	69	10	semi	semi	ADJ
can-11021	69	11	-	-	ADJ
can-11021	69	12	logarithmic	logarithmic	ADJ
can-11021	69	13	coordinates	coordinate	NOUN
can-11021	69	14	.	.	PUNCT
can-11021	70	1	the	the	DET
can-11021	70	2	relative	relative	ADJ
can-11021	70	3	error	error	NOUN
can-11021	70	4	of	of	ADP
can-11021	70	5	the	the	DET
can-11021	70	6	α	α	PROPN
can-11021	70	7	values	value	NOUN
can-11021	70	8	is	be	AUX
can-11021	70	9	2	2	NUM
can-11021	70	10	%	%	NOUN
can-11021	70	11	,	,	PUNCT
can-11021	70	12	which	which	PRON
can-11021	70	13	is	be	AUX
can-11021	70	14	only	only	ADV
can-11021	70	15	slightly	slightly	ADV
can-11021	70	16	greater	great	ADJ
can-11021	70	17	than	than	ADP
can-11021	70	18	the	the	DET
can-11021	70	19	thickness	thickness	NOUN
can-11021	70	20	of	of	ADP
can-11021	70	21	the	the	DET
can-11021	70	22	lines	line	NOUN
can-11021	70	23	in	in	ADP
can-11021	70	24	the	the	DET
can-11021	70	25	figure	figure	NOUN
can-11021	70	26	.	.	PUNCT
can-11021	71	1	as	as	SCONJ
can-11021	71	2	can	can	AUX
can-11021	71	3	be	be	AUX
can-11021	71	4	seen	see	VERB
can-11021	71	5	,	,	PUNCT
can-11021	71	6	the	the	DET
can-11021	71	7	exponential	exponential	ADJ
can-11021	71	8	dependence	dependence	NOUN
can-11021	71	9	of	of	ADP
can-11021	71	10	the	the	DET
can-11021	71	11	absorption	absorption	NOUN
can-11021	71	12	coefficient	coefficient	NOUN
can-11021	71	13	on	on	ADP
can-11021	71	14	the	the	DET
can-11021	71	15	photon	photon	NOUN
can-11021	71	16	energy	energy	NOUN
can-11021	71	17	in	in	ADP
can-11021	71	18	the	the	DET
can-11021	71	19	as	as	ADV
can-11021	71	20	-	-	PUNCT
can-11021	71	21	deposited	deposit	VERB
can-11021	71	22	film	film	NOUN
can-11021	71	23	and	and	CCONJ
can-11021	71	24	in	in	ADP
can-11021	71	25	the	the	DET
can-11021	71	26	one	one	NUM
can-11021	71	27	annealed	anneal	VERB
can-11021	71	28	at	at	ADP
can-11021	71	29	300	300	NUM
can-11021	71	30	c	c	NUM
can-11021	71	31	and	and	CCONJ
can-11021	71	32	400	400	NUM
can-11021	71	33	c	c	NOUN
can-11021	71	34	is	be	AUX
can-11021	71	35	quite	quite	ADV
can-11021	71	36	well	well	ADV
can-11021	71	37	fulfilled	fulfil	VERB
can-11021	71	38	in	in	ADP
can-11021	71	39	a	a	DET
can-11021	71	40	significant	significant	ADJ
can-11021	71	41	part	part	NOUN
can-11021	71	42	of	of	ADP
can-11021	71	43	the	the	DET
can-11021	71	44	measured	measure	VERB
can-11021	71	45	spectral	spectral	ADJ
can-11021	71	46	range	range	NOUN
can-11021	71	47	,	,	PUNCT
can-11021	71	48	including	include	VERB
can-11021	71	49	its	its	PRON
can-11021	71	50	high	high	ADJ
can-11021	71	51	-	-	PUNCT
can-11021	71	52	energy	energy	NOUN
can-11021	71	53	edge	edge	NOUN
can-11021	71	54	.	.	PUNCT
can-11021	72	1	that	that	ADV
can-11021	72	2	is	is	ADV
can-11021	72	3	,	,	PUNCT
can-11021	72	4	this	this	DET
can-11021	72	5	dependence	dependence	NOUN
can-11021	72	6	is	be	AUX
can-11021	72	7	still	still	ADV
can-11021	72	8	observed	observe	VERB
can-11021	72	9	at	at	ADP
can-11021	72	10	α	α	PROPN
can-11021	72	11	values	value	NOUN
can-11021	72	12	up	up	ADP
can-11021	72	13	to	to	ADP
can-11021	72	14	8.46	8.46	NUM
can-11021	72	15	×	×	NOUN
can-11021	72	16	104	104	NUM
can-11021	72	17	cm−1	cm−1	NOUN
can-11021	72	18	for	for	ADP
can-11021	72	19	the	the	DET
can-11021	72	20	as	as	ADV
can-11021	72	21	-	-	PUNCT
can-11021	72	22	deposited	deposit	VERB
can-11021	72	23	film	film	NOUN
can-11021	72	24	,	,	PUNCT
can-11021	72	25	7.05	7.05	NUM
can-11021	72	26	×	×	NOUN
can-11021	72	27	104	104	NUM
can-11021	72	28	cm−1	cm−1	NOUN
can-11021	72	29	after	after	ADP
can-11021	72	30	annealing	anneal	VERB
can-11021	72	31	at	at	ADP
can-11021	72	32	300	300	NUM
can-11021	72	33	c	c	NUM
can-11021	72	34	.	.	PUNCT
can-11021	73	1	the	the	DET
can-11021	73	2	corresponding	correspond	VERB
can-11021	73	3	еu	еu	ADJ
can-11021	73	4	values	value	NOUN
can-11021	73	5	were	be	AUX
can-11021	73	6	0.42	0.42	NUM
can-11021	73	7	,	,	PUNCT
can-11021	73	8	0.35	0.35	NUM
can-11021	73	9	ev	ev	NOUN
can-11021	73	10	.	.	PUNCT
can-11021	74	1	after	after	ADP
can-11021	74	2	annealing	anneal	VERB
can-11021	74	3	at	at	ADP
can-11021	74	4	500	500	NUM
can-11021	74	5	c	c	NUM
can-11021	74	6	and	and	CCONJ
can-11021	74	7	600	600	NUM
can-11021	74	8	°	°	NOUN
can-11021	74	9	c	c	NOUN
can-11021	74	10	,	,	PUNCT
can-11021	74	11	the	the	DET
can-11021	74	12	urbach	urbach	NOUN
can-11021	74	13	region	region	NOUN
can-11021	74	14	extends	extend	VERB
can-11021	74	15	to	to	ADP
can-11021	74	16	2.8	2.8	NUM
can-11021	74	17	ev	ev	NOUN
can-11021	74	18	,	,	PUNCT
can-11021	74	19	with	with	ADP
can-11021	74	20	α	α	NOUN
can-11021	74	21	≤	≤	NUM
can-11021	74	22	3.3	3.3	NUM
can-11021	74	23	×	×	NOUN
can-11021	74	24	104	104	NUM
can-11021	74	25	and	and	CCONJ
can-11021	74	26	5	5	NUM
can-11021	74	27	×	×	NOUN
can-11021	74	28	104	104	NUM
can-11021	74	29	cm−1	cm−1	NOUN
can-11021	74	30	,	,	PUNCT
can-11021	74	31	respectively	respectively	ADV
can-11021	74	32	.	.	PUNCT
can-11021	75	1	eu	eu	PROPN
can-11021	75	2	continues	continue	VERB
can-11021	75	3	to	to	PART
can-11021	75	4	decrease	decrease	VERB
can-11021	75	5	,	,	PUNCT
can-11021	75	6	reaching	reach	VERB
can-11021	75	7	0.26	0.26	NUM
can-11021	75	8	and	and	CCONJ
can-11021	75	9	0.23	0.23	NUM
can-11021	75	10	ev	ev	NOUN
can-11021	75	11	,	,	PUNCT
can-11021	75	12	respectively	respectively	ADV
can-11021	75	13	.	.	PUNCT
can-11021	76	1	after	after	ADP
can-11021	76	2	annealing	anneal	VERB
can-11021	76	3	at	at	ADP
can-11021	76	4	770	770	NUM
can-11021	76	5	c	c	VERB
can-11021	76	6	the	the	DET
can-11021	76	7	corridor	corridor	NOUN
can-11021	76	8	of	of	ADP
can-11021	76	9	fulfillment	fulfillment	NOUN
can-11021	76	10	of	of	ADP
can-11021	76	11	the	the	DET
can-11021	76	12	urbach	urbach	ADJ
can-11021	76	13	dependence	dependence	NOUN
can-11021	76	14	narrows	narrow	VERB
can-11021	76	15	much	much	ADV
can-11021	76	16	more	more	ADV
can-11021	76	17	significantly	significantly	ADV
can-11021	76	18	both	both	PRON
can-11021	76	19	in	in	ADP
can-11021	76	20	terms	term	NOUN
can-11021	76	21	of	of	ADP
can-11021	76	22	photon	photon	NOUN
can-11021	76	23	energy	energy	NOUN
can-11021	76	24	(	(	PUNCT
can-11021	76	25	to	to	ADP
can-11021	76	26	2.1	2.1	NUM
can-11021	76	27	ev	ev	NOUN
can-11021	76	28	)	)	PUNCT
can-11021	76	29	and	and	CCONJ
can-11021	76	30	absorption	absorption	NOUN
can-11021	76	31	coefficient	coefficient	NOUN
can-11021	76	32	(	(	PUNCT
can-11021	76	33	α	α	NOUN
can-11021	76	34	≤	≤	NUM
can-11021	76	35	1.0	1.0	NUM
can-11021	76	36	×	×	NOUN
can-11021	76	37	104	104	NUM
can-11021	76	38	cm−1	cm−1	NOUN
can-11021	76	39	)	)	PUNCT
can-11021	76	40	,	,	PUNCT
can-11021	76	41	however	however	ADV
can-11021	76	42	,	,	PUNCT
can-11021	76	43	no	no	DET
can-11021	76	44	further	further	ADJ
can-11021	76	45	decrease	decrease	NOUN
can-11021	76	46	in	in	ADP
can-11021	76	47	еu	еu	PROPN
can-11021	76	48	is	be	AUX
can-11021	76	49	observed	observe	VERB
can-11021	76	50	(	(	PUNCT
can-11021	76	51	еu	еu	NOUN
can-11021	76	52	=	=	NOUN
can-11021	76	53	0.245	0.245	NUM
can-11021	76	54	ev	ev	PROPN
can-11021	76	55	)	)	PUNCT
can-11021	76	56	.	.	PUNCT
can-11021	77	1	the	the	DET
can-11021	77	2	value	value	NOUN
can-11021	77	3	of	of	ADP
can-11021	77	4	еu	еu	PRON
can-11021	77	5	after	after	ADP
can-11021	77	6	annealing	anneal	VERB
can-11021	77	7	at	at	ADP
can-11021	77	8	910	910	NUM
can-11021	77	9	c	c	NOUN
can-11021	77	10	is	be	AUX
can-11021	77	11	almost	almost	ADV
can-11021	77	12	the	the	DET
can-11021	77	13	same	same	ADJ
can-11021	77	14	as	as	ADP
can-11021	77	15	that	that	PRON
can-11021	77	16	after	after	ADP
can-11021	77	17	annealing	anneal	VERB
can-11021	77	18	at	at	ADP
can-11021	77	19	770	770	NUM
can-11021	77	20	c	c	NOUN
can-11021	77	21	,	,	PUNCT
can-11021	77	22	but	but	CCONJ
can-11021	77	23	the	the	DET
can-11021	77	24	straight	straight	ADJ
can-11021	77	25	-	-	PUNCT
can-11021	77	26	line	line	NOUN
can-11021	77	27	section	section	NOUN
can-11021	77	28	in	in	ADP
can-11021	77	29	semilogarithmic	semilogarithmic	ADJ
can-11021	77	30	coordinates	coordinate	NOUN
can-11021	77	31	extends	extend	VERB
can-11021	77	32	to	to	ADP
can-11021	77	33	2.4	2.4	NUM
can-11021	77	34	ev	ev	NOUN
can-11021	77	35	(	(	PUNCT
can-11021	77	36	α	α	PROPN
can-11021	77	37	≤	≤	NUM
can-11021	77	38	4.3	4.3	NUM
can-11021	77	39	×	×	NOUN
can-11021	77	40	104	104	NUM
can-11021	77	41	cm−1	cm−1	NOUN
can-11021	77	42	)	)	PUNCT
can-11021	77	43	.	.	PUNCT
can-11021	78	1	the	the	DET
can-11021	78	2	spectral	spectral	ADJ
can-11021	78	3	range	range	NOUN
can-11021	78	4	of	of	ADP
can-11021	78	5	the	the	DET
can-11021	78	6	urbach	urbach	ADJ
can-11021	78	7	dependence	dependence	NOUN
can-11021	78	8	and	and	CCONJ
can-11021	78	9	the	the	DET
can-11021	78	10	value	value	NOUN
can-11021	78	11	of	of	ADP
can-11021	78	12	the	the	DET
can-11021	78	13	urbach	urbach	ADJ
can-11021	78	14	energy	energy	NOUN
can-11021	78	15	after	after	ADP
can-11021	78	16	annealing	anneal	VERB
can-11021	78	17	at	at	ADP
can-11021	78	18	1010	1010	NUM
can-11021	78	19	c	c	NOUN
can-11021	78	20	are	be	AUX
can-11021	78	21	similar	similar	ADJ
can-11021	78	22	:	:	PUNCT
can-11021	78	23	hν	hν	NOUN
can-11021	78	24	≤	≤	NUM
can-11021	78	25	2.48	2.48	NUM
can-11021	78	26	ev	ev	NOUN
can-11021	78	27	,	,	PUNCT
can-11021	78	28	α	α	PROPN
can-11021	78	29	≤	≤	NOUN
can-11021	78	30	3.7	3.7	NUM
can-11021	78	31	×	×	NOUN
can-11021	78	32	104	104	NUM
can-11021	78	33	cm−1	cm−1	NOUN
can-11021	78	34	,	,	PUNCT
can-11021	78	35	еu	еu	PRON
can-11021	79	1	=	=	NOUN
can-11021	79	2	0.22	0.22	NUM
can-11021	79	3	ev	ev	NOUN
can-11021	79	4	.	.	PUNCT
can-11021	80	1	after	after	ADP
can-11021	80	2	annealing	anneal	VERB
can-11021	80	3	at	at	ADP
can-11021	80	4	1100	1100	NUM
can-11021	80	5	1.8	1.8	NUM
can-11021	80	6	2.1	2.1	NUM
can-11021	80	7	2.4	2.4	NUM
can-11021	80	8	2.7	2.7	NUM
can-11021	80	9	3.0	3.0	NUM
can-11021	80	10	10	10	NUM
can-11021	80	11	3	3	NUM
can-11021	80	12	10	10	NUM
can-11021	80	13	4	4	NUM
can-11021	80	14	10	10	NUM
can-11021	80	15	5	5	NUM
can-11021	80	16	photon	photon	NOUN
can-11021	80	17	energy	energy	NOUN
can-11021	80	18	h	h	PROPN
can-11021	80	19	,	,	PUNCT
can-11021	80	20	ev	ev	ADP
can-11021	80	21	a	a	DET
can-11021	80	22	b	b	NOUN
can-11021	80	23	so	so	ADV
can-11021	80	24	rp	rp	NOUN
can-11021	80	25	ti	ti	X
can-11021	80	26	o	o	NOUN
can-11021	80	27	n	n	NOUN
can-11021	80	28	c	c	NOUN
can-11021	80	29	o	o	NOUN
can-11021	80	30	ef	ef	PROPN
can-11021	80	31	fi	fi	PROPN
can-11021	80	32	c	c	PROPN
can-11021	80	33	ie	ie	X
can-11021	80	34	n	n	PROPN
can-11021	80	35	t	t	PROPN
can-11021	80	36			X
can-11021	80	37			NUM
can-11021	80	38	c	c	NOUN
can-11021	80	39	m	m	VERB
can-11021	80	40	-1	-1	NOUN
can-11021	80	41	1	1	NUM
can-11021	80	42	3	3	NUM
can-11021	80	43	4	4	NUM
can-11021	80	44	2	2	NUM
can-11021	80	45	5	5	NUM
can-11021	80	46	7	7	NUM
can-11021	80	47	6	6	NUM
can-11021	80	48	8	8	NUM
can-11021	80	49	characterization	characterization	NOUN
can-11021	80	50	and	and	CCONJ
can-11021	80	51	application	application	NOUN
can-11021	80	52	of	of	ADP
can-11021	80	53	nanomaterials	nanomaterial	NOUN
can-11021	80	54	2025	2025	NUM
can-11021	80	55	,	,	PUNCT
can-11021	80	56	8(2	8(2	NUM
can-11021	80	57	)	)	PUNCT
can-11021	80	58	,	,	PUNCT
can-11021	80	59	11021	11021	NUM
can-11021	80	60	.	.	PUNCT
can-11021	81	1	5	5	NUM
can-11021	81	2	c	c	PROPN
can-11021	81	3	,	,	PUNCT
can-11021	81	4	the	the	DET
can-11021	81	5	region	region	NOUN
can-11021	81	6	of	of	ADP
can-11021	81	7	fulfillment	fulfillment	NOUN
can-11021	81	8	of	of	ADP
can-11021	81	9	the	the	DET
can-11021	81	10	urbach	urbach	ADJ
can-11021	81	11	dependence	dependence	NOUN
can-11021	81	12	extends	extend	VERB
can-11021	81	13	to	to	ADP
can-11021	81	14	2.7	2.7	NUM
can-11021	81	15	ev	ev	NOUN
can-11021	81	16	,	,	PUNCT
can-11021	81	17	with	with	ADP
can-11021	81	18	α	α	NOUN
can-11021	81	19	≤	≤	NUM
can-11021	81	20	3.4	3.4	NUM
can-11021	81	21	×	×	NOUN
can-11021	81	22	104	104	NUM
can-11021	81	23	cm−1	cm−1	NOUN
can-11021	81	24	,	,	PUNCT
can-11021	81	25	еu	еu	NOUN
can-11021	81	26	=	=	PROPN
can-11021	81	27	0.36	0.36	NUM
can-11021	81	28	ev	ev	NOUN
can-11021	81	29	.	.	PUNCT
can-11021	82	1	thus	thus	ADV
can-11021	82	2	,	,	PUNCT
can-11021	82	3	the	the	DET
can-11021	82	4	absorption	absorption	NOUN
can-11021	82	5	behavior	behavior	NOUN
can-11021	82	6	in	in	ADP
can-11021	82	7	this	this	DET
can-11021	82	8	deposited	deposit	VERB
can-11021	82	9	film	film	NOUN
can-11021	82	10	,	,	PUNCT
can-11021	82	11	which	which	PRON
can-11021	82	12	is	be	AUX
can-11021	82	13	an	an	DET
can-11021	82	14	alloy	alloy	NOUN
can-11021	82	15	of	of	ADP
can-11021	82	16	silicon	silicon	NOUN
can-11021	82	17	with	with	ADP
can-11021	82	18	oxygen	oxygen	NOUN
can-11021	82	19	,	,	PUNCT
can-11021	82	20	differs	differ	VERB
can-11021	82	21	significantly	significantly	ADV
can-11021	82	22	from	from	ADP
can-11021	82	23	the	the	DET
can-11021	82	24	behavior	behavior	NOUN
can-11021	82	25	of	of	ADP
can-11021	82	26	amorphous	amorphous	ADJ
can-11021	82	27	homogeneous	homogeneous	ADJ
can-11021	82	28	stoichiometric	stoichiometric	ADJ
can-11021	82	29	materials	material	NOUN
can-11021	82	30	.	.	PUNCT
can-11021	83	1	first	first	ADV
can-11021	83	2	,	,	PUNCT
can-11021	83	3	in	in	ADP
can-11021	83	4	such	such	ADJ
can-11021	83	5	materials	material	NOUN
can-11021	83	6	,	,	PUNCT
can-11021	83	7	the	the	DET
can-11021	83	8	urbach	urbach	ADJ
can-11021	83	9	dependence	dependence	NOUN
can-11021	83	10	is	be	AUX
can-11021	83	11	observed	observe	VERB
can-11021	83	12	at	at	ADP
can-11021	83	13	α	α	PROPN
can-11021	83	14			PROPN
can-11021	83	15	104	104	NUM
can-11021	83	16	cm−1	cm−1	NOUN
can-11021	83	17	.	.	PUNCT
can-11021	84	1	secondly	secondly	ADV
can-11021	84	2	,	,	PUNCT
can-11021	84	3	the	the	DET
can-11021	84	4	urbach	urbach	ADJ
can-11021	84	5	energy	energy	NOUN
can-11021	84	6	values	value	NOUN
can-11021	84	7	themselves	themselves	PRON
can-11021	84	8	are	be	AUX
can-11021	84	9	much	much	ADV
can-11021	84	10	smaller	small	ADJ
can-11021	84	11	.	.	PUNCT
can-11021	85	1	for	for	ADP
can-11021	85	2	example	example	NOUN
can-11021	85	3	,	,	PUNCT
can-11021	85	4	in	in	ADP
can-11021	85	5	high	high	ADJ
can-11021	85	6	-	-	PUNCT
can-11021	85	7	quality	quality	NOUN
can-11021	85	8	amorphous	amorphous	ADJ
can-11021	85	9	silicon	silicon	NOUN
can-11021	85	10	films	film	NOUN
can-11021	85	11	еu	еu	PRON
can-11021	85	12	=	=	PROPN
can-11021	85	13	0.042	0.042	NUM
can-11021	85	14	ev	ev	NOUN
can-11021	86	1	[	[	X
can-11021	86	2	28	28	NUM
can-11021	86	3	]	]	PUNCT
can-11021	86	4	,	,	PUNCT
can-11021	86	5	and	and	CCONJ
can-11021	86	6	in	in	ADP
can-11021	86	7	pure	pure	ADJ
can-11021	86	8	silica	silica	NOUN
can-11021	86	9	glass	glass	NOUN
can-11021	86	10	еu	еu	NOUN
can-11021	86	11	=	=	PUNCT
can-11021	86	12	0.075	0.075	NUM
can-11021	86	13	ev	ev	NOUN
can-11021	87	1	[	[	X
can-11021	87	2	30	30	NUM
can-11021	87	3	]	]	PUNCT
can-11021	87	4	.	.	PUNCT
can-11021	88	1	for	for	ADP
can-11021	88	2	amorphous	amorphous	ADJ
can-11021	88	3	and	and	CCONJ
can-11021	88	4	composite	composite	ADJ
can-11021	88	5	materials	material	NOUN
can-11021	88	6	,	,	PUNCT
can-11021	88	7	whose	whose	DET
can-11021	88	8	energy	energy	NOUN
can-11021	88	9	structure	structure	NOUN
can-11021	88	10	is	be	AUX
can-11021	88	11	characterized	characterize	VERB
can-11021	88	12	by	by	ADP
can-11021	88	13	the	the	DET
can-11021	88	14	presence	presence	NOUN
can-11021	88	15	of	of	ADP
can-11021	88	16	localized	localized	ADJ
can-11021	88	17	states	state	NOUN
can-11021	88	18	in	in	ADP
can-11021	88	19	the	the	DET
can-11021	88	20	band	band	NOUN
can-11021	88	21	gap	gap	NOUN
can-11021	88	22	(	(	PUNCT
can-11021	88	23	and	and	CCONJ
can-11021	88	24	,	,	PUNCT
can-11021	88	25	accordingly	accordingly	ADV
can-11021	88	26	,	,	PUNCT
can-11021	88	27	the	the	DET
can-11021	88	28	“	"	PUNCT
can-11021	88	29	blurring	blurring	NOUN
can-11021	88	30	”	"	PUNCT
can-11021	88	31	of	of	ADP
can-11021	88	32	the	the	DET
can-11021	88	33	valence	valence	NOUN
can-11021	88	34	band	band	NOUN
can-11021	88	35	top	top	NOUN
can-11021	88	36	and	and	CCONJ
can-11021	88	37	the	the	DET
can-11021	88	38	conduction	conduction	NOUN
can-11021	88	39	band	band	NOUN
can-11021	88	40	bottom	bottom	NOUN
can-11021	88	41	)	)	PUNCT
can-11021	88	42	,	,	PUNCT
can-11021	88	43	several	several	ADJ
can-11021	88	44	methods	method	NOUN
can-11021	88	45	for	for	ADP
can-11021	88	46	determining	determine	VERB
can-11021	88	47	the	the	DET
can-11021	88	48	band	band	NOUN
can-11021	88	49	gap	gap	NOUN
can-11021	88	50	width	width	NOUN
can-11021	88	51	are	be	AUX
can-11021	88	52	used	use	VERB
can-11021	88	53	in	in	ADP
can-11021	88	54	the	the	DET
can-11021	88	55	literature	literature	NOUN
can-11021	88	56	.	.	PUNCT
can-11021	89	1	for	for	ADP
can-11021	89	2	siox	siox	NOUN
can-11021	89	3	,	,	PUNCT
can-11021	89	4	the	the	DET
can-11021	89	5	formula	formula	NOUN
can-11021	89	6	proposed	propose	VERB
can-11021	89	7	by	by	ADP
can-11021	89	8	tauc	tauc	PROPN
can-11021	89	9	et	et	PROPN
can-11021	89	10	al	al	PROPN
can-11021	89	11	.	.	PUNCT
can-11021	90	1	[	[	X
can-11021	90	2	31	31	NUM
can-11021	90	3	]	]	PUNCT
can-11021	90	4	is	be	AUX
can-11021	90	5	most	most	ADV
can-11021	90	6	widely	widely	ADV
can-11021	90	7	used	use	VERB
can-11021	90	8	:	:	PUNCT
can-11021	90	9	𝛼(𝐸	𝛼(𝐸	NUM
can-11021	90	10	)	)	PUNCT
can-11021	91	1	=	=	SYM
can-11021	91	2	𝐵	𝐵	NOUN
can-11021	91	3	∙	∙	PROPN
can-11021	91	4	(	(	PUNCT
can-11021	91	5	ℎ𝑣	ℎ𝑣	VERB
can-11021	91	6	−	−	PROPN
can-11021	91	7	𝐸𝑜	𝐸𝑜	PROPN
can-11021	91	8	)	)	PUNCT
can-11021	91	9	2/ℎ𝑣	2/ℎ𝑣	NUM
can-11021	91	10	(	(	PUNCT
can-11021	91	11	3	3	NUM
can-11021	91	12	)	)	PUNCT
can-11021	91	13	in	in	ADP
can-11021	91	14	equation	equation	NOUN
can-11021	91	15	(	(	PUNCT
can-11021	91	16	3	3	NUM
can-11021	91	17	)	)	PUNCT
can-11021	91	18	,	,	PUNCT
can-11021	91	19	b	b	PROPN
can-11021	91	20	is	be	AUX
can-11021	91	21	a	a	DET
can-11021	91	22	numerical	numerical	ADJ
can-11021	91	23	constant	constant	NOUN
can-11021	91	24	,	,	PUNCT
can-11021	91	25	and	and	CCONJ
can-11021	91	26	eo	eo	PROPN
can-11021	91	27	is	be	AUX
can-11021	91	28	the	the	DET
can-11021	91	29	tauc	tauc	ADJ
can-11021	91	30	optical	optical	ADJ
can-11021	91	31	band	band	NOUN
can-11021	91	32	gap	gap	NOUN
can-11021	91	33	.	.	PUNCT
can-11021	92	1	equation	equation	NOUN
can-11021	92	2	(	(	PUNCT
can-11021	92	3	3	3	X
can-11021	92	4	)	)	PUNCT
can-11021	92	5	describes	describe	VERB
can-11021	92	6	the	the	DET
can-11021	92	7	absorption	absorption	NOUN
can-11021	92	8	due	due	ADP
can-11021	92	9	to	to	ADP
can-11021	92	10	indirect	indirect	ADJ
can-11021	92	11	allowed	allow	VERB
can-11021	92	12	transitions	transition	NOUN
can-11021	92	13	from	from	ADP
can-11021	92	14	nonlocalized	nonlocalized	ADJ
can-11021	92	15	states	state	NOUN
can-11021	92	16	in	in	ADP
can-11021	92	17	the	the	DET
can-11021	92	18	valence	valence	NOUN
can-11021	92	19	band	band	NOUN
can-11021	92	20	to	to	ADP
can-11021	92	21	non	non	ADJ
can-11021	92	22	-	-	ADJ
can-11021	92	23	localized	localized	ADJ
can-11021	92	24	states	state	NOUN
can-11021	92	25	in	in	ADP
can-11021	92	26	the	the	DET
can-11021	92	27	conduction	conduction	NOUN
can-11021	92	28	band	band	NOUN
can-11021	92	29	.	.	PUNCT
can-11021	93	1	this	this	PRON
can-11021	93	2	postulates	postulate	VERB
can-11021	93	3	a	a	DET
can-11021	93	4	quadratic	quadratic	ADJ
can-11021	93	5	dispersion	dispersion	NOUN
can-11021	93	6	law	law	NOUN
can-11021	93	7	in	in	ADP
can-11021	93	8	both	both	DET
can-11021	93	9	bands	band	NOUN
can-11021	93	10	and	and	CCONJ
can-11021	93	11	the	the	DET
can-11021	93	12	independence	independence	NOUN
can-11021	93	13	of	of	ADP
can-11021	93	14	the	the	DET
can-11021	93	15	matrix	matrix	NOUN
can-11021	93	16	element	element	NOUN
can-11021	93	17	of	of	ADP
can-11021	93	18	optical	optical	ADJ
can-11021	93	19	transitions	transition	NOUN
can-11021	93	20	from	from	ADP
can-11021	93	21	the	the	DET
can-11021	93	22	photon	photon	NOUN
can-11021	93	23	energy	energy	NOUN
can-11021	93	24	.	.	PUNCT
can-11021	94	1	figure	figure	NOUN
can-11021	94	2	3	3	NUM
can-11021	94	3	shows	show	VERB
can-11021	94	4	the	the	DET
can-11021	94	5	absorption	absorption	NOUN
can-11021	94	6	coefficient	coefficient	NOUN
can-11021	94	7	spectra	spectra	PROPN
can-11021	94	8	plotted	plot	VERB
can-11021	94	9	in	in	ADP
can-11021	94	10	the	the	DET
can-11021	94	11	tauc	tauc	NOUN
can-11021	94	12	coordinates	coordinate	NOUN
can-11021	94	13	hν	hν	NOUN
can-11021	95	1	−	−	PROPN
can-11021	95	2	(	(	PUNCT
can-11021	95	3	αhν)1/2	αhν)1/2	NOUN
can-11021	95	4	.	.	PUNCT
can-11021	96	1	the	the	DET
can-11021	96	2	tauc	tauc	ADJ
can-11021	96	3	optical	optical	ADJ
can-11021	96	4	bandgap	bandgap	NOUN
can-11021	96	5	eo	eo	PROPN
can-11021	96	6	has	have	AUX
can-11021	96	7	been	be	AUX
can-11021	96	8	defined	define	VERB
can-11021	96	9	as	as	ADP
can-11021	96	10	the	the	DET
can-11021	96	11	intersection	intersection	NOUN
can-11021	96	12	of	of	ADP
can-11021	96	13	the	the	DET
can-11021	96	14	linear	linear	ADJ
can-11021	96	15	approximation	approximation	NOUN
can-11021	96	16	of	of	ADP
can-11021	96	17	the	the	DET
can-11021	96	18	values	value	NOUN
can-11021	96	19	of	of	ADP
can-11021	96	20	(	(	PUNCT
can-11021	96	21	αhν)1/2	αhν)1/2	PROPN
can-11021	96	22	in	in	ADP
can-11021	96	23	the	the	DET
can-11021	96	24	high	high	ADJ
can-11021	96	25	energy	energy	NOUN
can-11021	96	26	part	part	NOUN
can-11021	96	27	of	of	ADP
can-11021	96	28	the	the	DET
can-11021	96	29	spectrum	spectrum	NOUN
can-11021	96	30	with	with	ADP
can-11021	96	31	the	the	DET
can-11021	96	32	abscissa	abscissa	NOUN
can-11021	96	33	.	.	PUNCT
can-11021	96	34	comparing	compare	VERB
can-11021	96	35	figures	figure	NOUN
can-11021	96	36	2	2	NUM
can-11021	96	37	and	and	CCONJ
can-11021	96	38	3	3	NUM
can-11021	96	39	,	,	PUNCT
can-11021	96	40	it	it	PRON
can-11021	96	41	is	be	AUX
can-11021	96	42	easy	easy	ADJ
can-11021	96	43	to	to	PART
can-11021	96	44	see	see	VERB
can-11021	96	45	that	that	SCONJ
can-11021	96	46	the	the	PRON
can-11021	96	47	less	less	ADJ
can-11021	96	48	the	the	DET
can-11021	96	49	exponential	exponential	ADJ
can-11021	96	50	dependence	dependence	NOUN
can-11021	96	51	region	region	NOUN
can-11021	96	52	extends	extend	VERB
can-11021	96	53	into	into	ADP
can-11021	96	54	the	the	DET
can-11021	96	55	high	high	ADJ
can-11021	96	56	energy	energy	NOUN
can-11021	96	57	region	region	NOUN
can-11021	96	58	,	,	PUNCT
can-11021	96	59	the	the	PRON
can-11021	96	60	further	further	ADJ
can-11021	96	61	the	the	DET
can-11021	96	62	observed	observe	VERB
can-11021	96	63	tauc	tauc	NOUN
can-11021	96	64	dependence	dependence	NOUN
can-11021	96	65	region	region	NOUN
can-11021	96	66	extends	extend	VERB
can-11021	96	67	into	into	ADP
can-11021	96	68	the	the	DET
can-11021	96	69	low	low	ADJ
can-11021	96	70	energy	energy	NOUN
can-11021	96	71	region	region	NOUN
can-11021	96	72	.	.	PUNCT
can-11021	97	1	although	although	SCONJ
can-11021	97	2	the	the	DET
can-11021	97	3	urbach	urbach	ADJ
can-11021	97	4	energy	energy	NOUN
can-11021	97	5	еu	еu	PRON
can-11021	97	6	is	be	AUX
can-11021	97	7	almost	almost	ADV
can-11021	97	8	halved	halve	VERB
can-11021	97	9	by	by	ADP
can-11021	97	10	annealing	anneal	VERB
can-11021	97	11	,	,	PUNCT
can-11021	97	12	it	it	PRON
can-11021	97	13	is	be	AUX
can-11021	97	14	still	still	ADV
can-11021	97	15	at	at	ADV
can-11021	97	16	least	least	ADV
can-11021	97	17	three	three	NUM
can-11021	97	18	times	time	NOUN
can-11021	97	19	higher	high	ADJ
can-11021	97	20	than	than	ADP
can-11021	97	21	the	the	DET
can-11021	97	22	urbach	urbach	ADJ
can-11021	97	23	energy	energy	NOUN
can-11021	97	24	in	in	ADP
can-11021	97	25	perfect	perfect	ADJ
can-11021	97	26	sio2	sio2	PROPN
can-11021	97	27	.	.	PUNCT
can-11021	98	1	this	this	PRON
can-11021	98	2	indicates	indicate	VERB
can-11021	98	3	a	a	DET
can-11021	98	4	much	much	ADV
can-11021	98	5	greater	great	ADJ
can-11021	98	6	structural	structural	ADJ
can-11021	98	7	disorder	disorder	NOUN
can-11021	98	8	(	(	PUNCT
can-11021	98	9	which	which	PRON
can-11021	98	10	may	may	AUX
can-11021	98	11	also	also	ADV
can-11021	98	12	imply	imply	VERB
can-11021	98	13	nanoheterogeneity	nanoheterogeneity	NOUN
can-11021	98	14	)	)	PUNCT
can-11021	98	15	of	of	ADP
can-11021	98	16	these	these	DET
can-11021	98	17	films	film	NOUN
can-11021	98	18	both	both	CCONJ
can-11021	98	19	before	before	ADP
can-11021	98	20	and	and	CCONJ
can-11021	98	21	after	after	ADP
can-11021	98	22	annealing	anneal	VERB
can-11021	98	23	compared	compare	VERB
can-11021	98	24	to	to	ADP
can-11021	98	25	the	the	DET
can-11021	98	26	structure	structure	NOUN
can-11021	98	27	of	of	ADP
can-11021	98	28	amorphous	amorphous	ADJ
can-11021	98	29	silica	silica	NOUN
can-11021	98	30	in	in	ADP
can-11021	98	31	glassy	glassy	NOUN
can-11021	98	32	form	form	NOUN
can-11021	98	33	.	.	PUNCT
can-11021	99	1	such	such	ADJ
can-11021	99	2	large	large	ADJ
can-11021	99	3	еu	еu	ADJ
can-11021	99	4	values	value	NOUN
can-11021	99	5	and	and	CCONJ
can-11021	99	6	the	the	DET
can-11021	99	7	length	length	NOUN
can-11021	99	8	of	of	ADP
can-11021	99	9	the	the	DET
can-11021	99	10	exponential	exponential	ADJ
can-11021	99	11	region	region	NOUN
can-11021	99	12	up	up	ADP
can-11021	99	13	to	to	ADP
can-11021	99	14	α	α	PROPN
can-11021	99	15			NUM
can-11021	99	16	104	104	NUM
can-11021	99	17	cm−1	cm−1	NOUN
can-11021	99	18	indicate	indicate	VERB
can-11021	99	19	that	that	SCONJ
can-11021	99	20	the	the	DET
can-11021	99	21	urbachian	urbachian	ADJ
can-11021	99	22	edge	edge	NOUN
can-11021	99	23	and	and	CCONJ
can-11021	99	24	interband	interband	NOUN
can-11021	99	25	transitions	transition	NOUN
can-11021	99	26	of	of	ADP
can-11021	99	27	different	different	ADJ
can-11021	99	28	(	(	PUNCT
can-11021	99	29	nano)regions	nano)region	NOUN
can-11021	99	30	may	may	AUX
can-11021	99	31	overlap	overlap	VERB
can-11021	99	32	in	in	ADP
can-11021	99	33	these	these	DET
can-11021	99	34	samples	sample	NOUN
can-11021	99	35	.	.	PUNCT
can-11021	100	1	in	in	ADP
can-11021	100	2	general	general	ADJ
can-11021	100	3	,	,	PUNCT
can-11021	100	4	for	for	ADP
can-11021	100	5	a	a	DET
can-11021	100	6	heterogeneous	heterogeneous	ADJ
can-11021	100	7	medium	medium	NOUN
can-11021	100	8	,	,	PUNCT
can-11021	100	9	the	the	DET
can-11021	100	10	еu	еu	ADJ
can-11021	100	11	and	and	CCONJ
can-11021	100	12	eo	eo	PROPN
can-11021	100	13	values	value	NOUN
can-11021	100	14	should	should	AUX
can-11021	100	15	be	be	AUX
can-11021	100	16	considered	consider	VERB
can-11021	100	17	effective	effective	ADJ
can-11021	100	18	,	,	PUNCT
can-11021	100	19	since	since	SCONJ
can-11021	100	20	the	the	DET
can-11021	100	21	heterogeneous	heterogeneous	ADJ
can-11021	100	22	medium	medium	ADJ
can-11021	100	23	differs	differ	NOUN
can-11021	100	24	in	in	ADP
can-11021	100	25	its	its	PRON
can-11021	100	26	structure	structure	NOUN
can-11021	100	27	from	from	ADP
can-11021	100	28	the	the	DET
can-11021	100	29	“	"	PUNCT
can-11021	100	30	classical	classical	ADJ
can-11021	100	31	”	"	PUNCT
can-11021	100	32	amorphous	amorphous	ADJ
can-11021	100	33	medium	medium	NOUN
can-11021	100	34	.	.	PUNCT
can-11021	100	35	characterization	characterization	NOUN
can-11021	100	36	and	and	CCONJ
can-11021	100	37	application	application	NOUN
can-11021	100	38	of	of	ADP
can-11021	100	39	nanomaterials	nanomaterial	NOUN
can-11021	100	40	2025	2025	NUM
can-11021	100	41	,	,	PUNCT
can-11021	100	42	8(2	8(2	NUM
can-11021	100	43	)	)	PUNCT
can-11021	100	44	,	,	PUNCT
can-11021	100	45	11021	11021	NUM
can-11021	100	46	.	.	PUNCT
can-11021	101	1	6	6	NUM
can-11021	101	2	figure	figure	NOUN
can-11021	101	3	3	3	NUM
can-11021	101	4	.	.	PUNCT
can-11021	101	5	spectra	spectra	NOUN
can-11021	101	6	of	of	ADP
can-11021	101	7	the	the	DET
can-11021	101	8	absorption	absorption	NOUN
can-11021	101	9	coefficient	coefficient	NOUN
can-11021	101	10	α	α	NOUN
can-11021	101	11	of	of	ADP
can-11021	101	12	the	the	DET
can-11021	101	13	as	as	ADV
can-11021	101	14	-	-	PUNCT
can-11021	101	15	deposited	deposit	VERB
can-11021	101	16	siox	siox	NOUN
can-11021	101	17	film	film	NOUN
can-11021	101	18	(	(	PUNCT
can-11021	101	19	1	1	NUM
can-11021	101	20	)	)	PUNCT
can-11021	101	21	and	and	CCONJ
can-11021	101	22	after	after	ADP
can-11021	101	23	annealing	anneal	VERB
can-11021	101	24	for	for	ADP
can-11021	101	25	15	15	NUM
can-11021	101	26	min	min	NOUN
can-11021	101	27	at	at	ADP
can-11021	101	28	300	300	NUM
can-11021	101	29	(	(	PUNCT
can-11021	101	30	2	2	NUM
can-11021	101	31	)	)	PUNCT
can-11021	101	32	,	,	PUNCT
can-11021	101	33	500	500	NUM
can-11021	101	34	(	(	PUNCT
can-11021	101	35	3	3	NUM
can-11021	101	36	)	)	PUNCT
can-11021	101	37	,	,	PUNCT
can-11021	101	38	600	600	NUM
can-11021	101	39	(	(	PUNCT
can-11021	101	40	4	4	NUM
can-11021	101	41	)	)	PUNCT
can-11021	101	42	,	,	PUNCT
can-11021	101	43	770	770	NUM
can-11021	101	44	(	(	PUNCT
can-11021	101	45	5	5	NUM
can-11021	101	46	)	)	PUNCT
can-11021	101	47	,	,	PUNCT
can-11021	101	48	910	910	NUM
can-11021	101	49	(	(	PUNCT
can-11021	101	50	6	6	NUM
can-11021	101	51	)	)	PUNCT
can-11021	101	52	,	,	PUNCT
can-11021	101	53	1010	1010	NUM
can-11021	101	54	(	(	PUNCT
can-11021	101	55	7	7	NUM
can-11021	101	56	)	)	PUNCT
can-11021	101	57	,	,	PUNCT
can-11021	101	58	and	and	CCONJ
can-11021	101	59	1100	1100	NUM
can-11021	101	60	°	°	NUM
can-11021	101	61	c	c	X
can-11021	101	62	(	(	PUNCT
can-11021	101	63	8)	8)	NUM
can-11021	101	64	,	,	PUNCT
can-11021	101	65	plotted	plot	VERB
can-11021	101	66	in	in	ADP
can-11021	101	67	tauc	tauc	NOUN
can-11021	101	68	coordinates	coordinate	NOUN
can-11021	101	69	hν	hν	NOUN
can-11021	101	70	−	−	PROPN
can-11021	101	71	(	(	PUNCT
can-11021	101	72	αhν)1/2	αhν)1/2	NOUN
can-11021	101	73	.	.	PUNCT
can-11021	102	1	given	give	VERB
can-11021	102	2	the	the	DET
can-11021	102	3	uncertainty	uncertainty	NOUN
can-11021	102	4	involved	involve	VERB
can-11021	102	5	in	in	ADP
can-11021	102	6	determining	determine	VERB
can-11021	102	7	eo	eo	PROPN
can-11021	102	8	,	,	PUNCT
can-11021	102	9	tauc	tauc	INTJ
can-11021	102	10	et	et	PROPN
can-11021	102	11	al	al	PROPN
can-11021	102	12	.	.	PUNCT
can-11021	103	1	[	[	X
can-11021	103	2	31	31	NUM
can-11021	103	3	]	]	PUNCT
can-11021	103	4	considered	consider	VERB
can-11021	103	5	eo	eo	NOUN
can-11021	103	6	to	to	PART
can-11021	103	7	be	be	AUX
can-11021	103	8	an	an	DET
can-11021	103	9	empirical	empirical	ADJ
can-11021	103	10	quantity	quantity	NOUN
can-11021	103	11	.	.	PUNCT
can-11021	104	1	in	in	ADP
can-11021	104	2	view	view	NOUN
can-11021	104	3	of	of	ADP
can-11021	104	4	this	this	PRON
can-11021	104	5	,	,	PUNCT
can-11021	104	6	an	an	DET
can-11021	104	7	alternative	alternative	ADJ
can-11021	104	8	empirical	empirical	ADJ
can-11021	104	9	measure	measure	NOUN
can-11021	104	10	of	of	ADP
can-11021	104	11	the	the	DET
can-11021	104	12	optical	optical	ADJ
can-11021	104	13	band	band	NOUN
can-11021	104	14	gap	gap	NOUN
can-11021	104	15	for	for	ADP
can-11021	104	16	amorphous	amorphous	ADJ
can-11021	104	17	semiconductors	semiconductor	NOUN
can-11021	104	18	has	have	AUX
can-11021	104	19	been	be	AUX
can-11021	104	20	proposed	propose	VERB
can-11021	104	21	:	:	PUNCT
can-11021	104	22	the	the	DET
can-11021	104	23	isoabsorption	isoabsorption	NOUN
can-11021	104	24	band	band	NOUN
can-11021	104	25	gap	gap	NOUN
can-11021	104	26	eα	eα	NOUN
can-11021	104	27	.	.	PUNCT
can-11021	105	1	it	it	PRON
can-11021	105	2	corresponds	correspond	VERB
can-11021	105	3	to	to	ADP
can-11021	105	4	the	the	DET
can-11021	105	5	photon	photon	NOUN
can-11021	105	6	energy	energy	NOUN
can-11021	105	7	at	at	ADP
can-11021	105	8	which	which	PRON
can-11021	105	9	the	the	DET
can-11021	105	10	absorption	absorption	NOUN
can-11021	105	11	coefficient	coefficient	NOUN
can-11021	105	12	α	α	PRON
can-11021	105	13	is	be	AUX
can-11021	105	14	equal	equal	ADJ
can-11021	105	15	to	to	ADP
can-11021	105	16	a	a	DET
can-11021	105	17	specific	specific	ADJ
can-11021	105	18	value	value	NOUN
can-11021	105	19	[	[	X
can-11021	105	20	32,33	32,33	NUM
can-11021	105	21	]	]	PUNCT
can-11021	105	22	.	.	PUNCT
can-11021	106	1	by	by	ADP
can-11021	106	2	analyzing	analyze	VERB
can-11021	106	3	the	the	DET
can-11021	106	4	absorption	absorption	NOUN
can-11021	106	5	spectra	spectra	NOUN
can-11021	106	6	of	of	ADP
can-11021	106	7	a	a	DET
can-11021	106	8	-	-	PUNCT
can-11021	106	9	sihx	sihx	NOUN
can-11021	106	10	films	film	NOUN
can-11021	106	11	with	with	ADP
can-11021	106	12	different	different	ADJ
can-11021	106	13	degrees	degree	NOUN
can-11021	106	14	of	of	ADP
can-11021	106	15	disorder	disorder	NOUN
can-11021	106	16	achieved	achieve	VERB
can-11021	106	17	by	by	ADP
can-11021	106	18	different	different	ADJ
can-11021	106	19	degrees	degree	NOUN
can-11021	106	20	of	of	ADP
can-11021	106	21	hydrogenation	hydrogenation	NOUN
can-11021	106	22	,	,	PUNCT
can-11021	106	23	cody	cody	NOUN
can-11021	106	24	et	et	PROPN
can-11021	106	25	al	al	PROPN
can-11021	106	26	.	.	PUNCT
can-11021	107	1	[	[	X
can-11021	107	2	34	34	NUM
can-11021	107	3	]	]	PUNCT
can-11021	107	4	found	find	VERB
can-11021	107	5	a	a	DET
can-11021	107	6	linear	linear	ADJ
can-11021	107	7	anticorrelation	anticorrelation	NOUN
can-11021	107	8	between	between	ADP
can-11021	107	9	the	the	DET
can-11021	107	10	optical	optical	ADJ
can-11021	107	11	band	band	NOUN
can-11021	107	12	gap	gap	NOUN
can-11021	107	13	eo	eo	PROPN
can-11021	107	14	and	and	CCONJ
can-11021	107	15	eu	eu	PROPN
can-11021	107	16	in	in	ADP
can-11021	107	17	amorphous	amorphous	ADJ
can-11021	107	18	silicon	silicon	NOUN
can-11021	107	19	:	:	PUNCT
can-11021	108	1	𝐸o	𝐸o	PROPN
can-11021	108	2	=	=	PUNCT
can-11021	108	3	𝐸g	𝐸g	NOUN
can-11021	108	4	−	−	PROPN
can-11021	109	1	𝐶o	𝐶o	ADP
can-11021	109	2	∙	∙	PROPN
can-11021	109	3	𝐸u	𝐸u	PROPN
can-11021	109	4	(	(	PUNCT
can-11021	109	5	4	4	NUM
can-11021	109	6	)	)	PUNCT
can-11021	109	7	where	where	SCONJ
can-11021	109	8	eg	eg	NOUN
can-11021	109	9	is	be	AUX
can-11021	109	10	the	the	DET
can-11021	109	11	optical	optical	ADJ
can-11021	109	12	band	band	NOUN
can-11021	109	13	gap	gap	NOUN
can-11021	109	14	limit	limit	NOUN
can-11021	109	15	at	at	ADP
can-11021	109	16	zero	zero	NUM
can-11021	109	17	width	width	NOUN
can-11021	109	18	of	of	ADP
can-11021	109	19	the	the	DET
can-11021	109	20	tails	tail	NOUN
can-11021	109	21	of	of	ADP
can-11021	109	22	localized	localized	ADJ
can-11021	109	23	states	state	NOUN
can-11021	109	24	(	(	PUNCT
can-11021	109	25	mobility	mobility	NOUN
can-11021	109	26	gap	gap	NOUN
can-11021	109	27	)	)	PUNCT
can-11021	109	28	.	.	PUNCT
can-11021	110	1	from	from	ADP
can-11021	110	2	the	the	DET
can-11021	110	3	approximation	approximation	NOUN
can-11021	110	4	equation	equation	NOUN
can-11021	110	5	(	(	PUNCT
can-11021	110	6	4	4	NUM
can-11021	110	7	)	)	PUNCT
can-11021	110	8	,	,	PUNCT
can-11021	110	9	a	a	DET
can-11021	110	10	value	value	NOUN
can-11021	110	11	of	of	ADP
can-11021	110	12	eg	eg	NOUN
can-11021	110	13	~	~	PUNCT
can-11021	110	14	2.1	2.1	NUM
can-11021	110	15	ev	ev	NOUN
can-11021	110	16	was	be	AUX
can-11021	110	17	obtained	obtain	VERB
can-11021	110	18	with	with	ADP
can-11021	110	19	a	a	DET
can-11021	110	20	constant	constant	ADJ
can-11021	110	21	co	co	NOUN
can-11021	110	22	of	of	ADP
can-11021	110	23	6.2	6.2	NUM
can-11021	110	24	.	.	PUNCT
can-11021	111	1	thus	thus	ADV
can-11021	111	2	,	,	PUNCT
can-11021	111	3	for	for	ADP
can-11021	111	4	defect	defect	NOUN
can-11021	111	5	-	-	PUNCT
can-11021	111	6	free	free	ADJ
can-11021	111	7	amorphous	amorphous	ADJ
can-11021	111	8	silicon	silicon	NOUN
can-11021	111	9	,	,	PUNCT
can-11021	111	10	the	the	DET
can-11021	111	11	mobility	mobility	NOUN
can-11021	111	12	gap	gap	NOUN
can-11021	111	13	is	be	AUX
can-11021	111	14	about	about	ADV
can-11021	111	15	1	1	NUM
can-11021	111	16	ev	ev	NOUN
can-11021	111	17	larger	large	ADJ
can-11021	111	18	than	than	ADP
can-11021	111	19	for	for	ADP
can-11021	111	20	pure	pure	ADJ
can-11021	111	21	crystalline	crystalline	ADJ
can-11021	111	22	silicon	silicon	NOUN
can-11021	111	23	.	.	PUNCT
can-11021	112	1	grein	grein	PROPN
can-11021	112	2	and	and	CCONJ
can-11021	112	3	johnn	johnn	VERB
can-11021	112	4	[	[	X
can-11021	112	5	35	35	NUM
can-11021	112	6	]	]	PUNCT
can-11021	112	7	found	find	VERB
can-11021	112	8	that	that	SCONJ
can-11021	112	9	the	the	DET
can-11021	112	10	linear	linear	ADJ
can-11021	112	11	anticorrelation	anticorrelation	NOUN
can-11021	112	12	between	between	ADP
can-11021	112	13	eo	eo	PROPN
can-11021	112	14	and	and	CCONJ
can-11021	112	15	eu	eu	PROPN
can-11021	112	16	also	also	ADV
can-11021	112	17	occurs	occur	VERB
can-11021	112	18	for	for	ADP
can-11021	112	19	a	a	DET
can-11021	112	20	-	-	PUNCT
can-11021	112	21	as2s3	as2s3	PROPN
can-11021	112	22	and	and	CCONJ
can-11021	112	23	a	a	DET
can-11021	112	24	-	-	PUNCT
can-11021	112	25	as2se3	as2se3	NOUN
can-11021	112	26	.	.	PUNCT
can-11021	113	1	a	a	DET
can-11021	113	2	linear	linear	ADJ
can-11021	113	3	anticorrelation	anticorrelation	NOUN
can-11021	113	4	between	between	ADP
can-11021	113	5	eα	eα	PROPN
can-11021	113	6	and	and	CCONJ
can-11021	113	7	eu	eu	PROPN
can-11021	113	8	was	be	AUX
can-11021	113	9	observed	observe	VERB
can-11021	113	10	for	for	ADP
can-11021	113	11	amorphous	amorphous	ADJ
can-11021	113	12	ge	ge	PROPN
can-11021	113	13	in	in	ADP
can-11021	113	14	[	[	X
can-11021	113	15	33	33	NUM
can-11021	113	16	]	]	PUNCT
can-11021	113	17	.	.	PUNCT
can-11021	114	1	in	in	ADP
can-11021	114	2	this	this	DET
can-11021	114	3	case	case	NOUN
can-11021	114	4	,	,	PUNCT
can-11021	114	5	the	the	DET
can-11021	114	6	approximation	approximation	NOUN
can-11021	114	7	used	use	VERB
can-11021	114	8	to	to	PART
can-11021	114	9	estimate	estimate	VERB
can-11021	114	10	the	the	DET
can-11021	114	11	mobility	mobility	NOUN
can-11021	114	12	band	band	NOUN
can-11021	114	13	gap	gap	NOUN
can-11021	114	14	eg	eg	NOUN
can-11021	114	15	was	be	AUX
can-11021	114	16	:	:	PUNCT
can-11021	114	17	𝐸𝛼	𝐸𝛼	PROPN
can-11021	114	18	=	=	PUNCT
can-11021	115	1	𝐸g	𝐸g	NOUN
can-11021	115	2	−	−	NOUN
can-11021	116	1	𝐶𝛼	𝐶𝛼	NOUN
can-11021	116	2	∙	∙	PROPN
can-11021	116	3	𝐸u	𝐸u	PROPN
can-11021	116	4	(	(	PUNCT
can-11021	116	5	5	5	X
can-11021	116	6	)	)	PUNCT
can-11021	116	7	it	it	PRON
can-11021	116	8	is	be	AUX
can-11021	116	9	expected	expect	VERB
can-11021	116	10	that	that	SCONJ
can-11021	116	11	linear	linear	ADJ
can-11021	116	12	anticorrelations	anticorrelation	NOUN
can-11021	116	13	of	of	ADP
can-11021	116	14	the	the	DET
can-11021	116	15	type	type	NOUN
can-11021	116	16	equations	equation	NOUN
can-11021	116	17	(	(	PUNCT
can-11021	116	18	4	4	NUM
can-11021	116	19	)	)	PUNCT
can-11021	116	20	and	and	CCONJ
can-11021	116	21	(	(	PUNCT
can-11021	116	22	5	5	X
can-11021	116	23	)	)	PUNCT
can-11021	116	24	will	will	AUX
can-11021	116	25	be	be	AUX
can-11021	116	26	fulfilled	fulfil	VERB
can-11021	116	27	for	for	ADP
can-11021	116	28	a	a	DET
can-11021	116	29	wide	wide	ADJ
can-11021	116	30	range	range	NOUN
can-11021	116	31	of	of	ADP
can-11021	116	32	amorphous	amorphous	ADJ
can-11021	116	33	and	and	CCONJ
can-11021	116	34	disordered	disordered	ADJ
can-11021	116	35	semiconductors	semiconductor	NOUN
can-11021	116	36	.	.	PUNCT
can-11021	117	1	1.8	1.8	NUM
can-11021	117	2	2.1	2.1	NUM
can-11021	117	3	2.4	2.4	NUM
can-11021	117	4	2.7	2.7	NUM
can-11021	117	5	3.0	3.0	NUM
can-11021	117	6	0	0	NUM
can-11021	117	7	150	150	NUM
can-11021	117	8	300	300	NUM
can-11021	117	9	450	450	NUM
can-11021	117	10	600	600	NUM
can-11021	117	11	photon	photon	NOUN
can-11021	117	12	energy	energy	NOUN
can-11021	117	13	h	h	PROPN
can-11021	117	14	,	,	PUNCT
can-11021	117	15	ev	ev	X
can-11021	117	16	(	(	PUNCT
can-11021	117	17			X
can-11021	117	18	h	h	PROPN
can-11021	117	19			ADJ
can-11021	117	20	)	)	PUNCT
can-11021	117	21	1	1	NUM
can-11021	117	22	/2	/2	NUM
can-11021	117	23	,	,	PUNCT
can-11021	117	24	cm	cm	NOUN
can-11021	117	25	-1	-1	PUNCT
can-11021	117	26	/2	/2	PROPN
can-11021	117	27	.e	.e	PROPN
can-11021	118	1	v	v	ADP
can-11021	118	2	1	1	NUM
can-11021	118	3	/2	/2	NUM
can-11021	118	4	)	)	PUNCT
can-11021	118	5	1	1	NUM
can-11021	118	6	2	2	NUM
can-11021	118	7	3	3	NUM
can-11021	118	8	4	4	NUM
can-11021	118	9	5	5	NUM
can-11021	118	10	6	6	NUM
can-11021	118	11	7	7	NUM
can-11021	118	12	8	8	NUM
can-11021	118	13	characterization	characterization	NOUN
can-11021	118	14	and	and	CCONJ
can-11021	118	15	application	application	NOUN
can-11021	118	16	of	of	ADP
can-11021	118	17	nanomaterials	nanomaterial	NOUN
can-11021	118	18	2025	2025	NUM
can-11021	118	19	,	,	PUNCT
can-11021	118	20	8(2	8(2	NUM
can-11021	118	21	)	)	PUNCT
can-11021	118	22	,	,	PUNCT
can-11021	118	23	11021	11021	NUM
can-11021	118	24	.	.	PUNCT
can-11021	119	1	7	7	NUM
can-11021	119	2	figure	figure	NOUN
can-11021	119	3	4	4	NUM
can-11021	119	4	.	.	PUNCT
can-11021	119	5	dependence	dependence	NOUN
can-11021	119	6	of	of	ADP
can-11021	119	7	the	the	DET
can-11021	119	8	urbach	urbach	PROPN
can-11021	119	9	energy	energy	NOUN
can-11021	119	10	eu	eu	PROPN
can-11021	119	11	,	,	PUNCT
can-11021	119	12	tauc	tauc	ADJ
can-11021	119	13	optical	optical	ADJ
can-11021	119	14	band	band	NOUN
can-11021	119	15	gap	gap	NOUN
can-11021	119	16	eo	eo	NOUN
can-11021	119	17	,	,	PUNCT
can-11021	119	18	and	and	CCONJ
can-11021	119	19	e04	e04	NOUN
can-11021	119	20	—	—	PUNCT
can-11021	119	21	the	the	DET
can-11021	119	22	isoabsorption	isoabsorption	NOUN
can-11021	119	23	band	band	NOUN
can-11021	119	24	gap	gap	NOUN
can-11021	119	25	at	at	ADP
can-11021	119	26	α	α	NOUN
can-11021	119	27	=	=	SYM
can-11021	119	28	104	104	NUM
can-11021	119	29	cm−1	cm−1	NOUN
can-11021	119	30	—	—	PUNCT
can-11021	119	31	on	on	ADP
can-11021	119	32	the	the	DET
can-11021	119	33	annealing	anneal	VERB
can-11021	119	34	temperature	temperature	NOUN
can-11021	119	35	of	of	ADP
can-11021	119	36	the	the	DET
can-11021	119	37	sio1.3	sio1.3	ADJ
can-11021	119	38	film	film	NOUN
can-11021	119	39	in	in	ADP
can-11021	119	40	a	a	DET
can-11021	119	41	nitrogen	nitrogen	NOUN
can-11021	119	42	atmosphere	atmosphere	NOUN
can-11021	119	43	for	for	ADP
can-11021	119	44	15	15	NUM
can-11021	119	45	min	min	NOUN
can-11021	119	46	.	.	PROPN
can-11021	119	47	figure	figure	NOUN
can-11021	119	48	4	4	NUM
can-11021	119	49	shows	show	VERB
can-11021	119	50	the	the	DET
can-11021	119	51	temperature	temperature	NOUN
can-11021	119	52	dependence	dependence	NOUN
can-11021	119	53	of	of	ADP
can-11021	119	54	e04	e04	NOUN
can-11021	119	55	,	,	PUNCT
can-11021	119	56	eo	eo	PROPN
can-11021	119	57	,	,	PUNCT
can-11021	119	58	and	and	CCONJ
can-11021	119	59	eu	eu	PROPN
can-11021	119	60	for	for	ADP
can-11021	119	61	the	the	DET
can-11021	119	62	investigated	investigate	VERB
can-11021	119	63	samples	sample	NOUN
can-11021	119	64	.	.	PUNCT
can-11021	120	1	the	the	DET
can-11021	120	2	isoabsorption	isoabsorption	NOUN
can-11021	120	3	band	band	NOUN
can-11021	120	4	gap	gap	NOUN
can-11021	120	5	e04	e04	NOUN
can-11021	120	6	corresponds	correspond	NOUN
can-11021	120	7	to	to	ADP
can-11021	120	8	the	the	DET
can-11021	120	9	photon	photon	NOUN
can-11021	120	10	energy	energy	NOUN
can-11021	120	11	at	at	ADP
can-11021	120	12	which	which	PRON
can-11021	120	13	α	α	NOUN
can-11021	120	14	=	=	SYM
can-11021	120	15	104	104	NUM
can-11021	120	16	cm−1	cm−1	NOUN
can-11021	120	17	.	.	PUNCT
can-11021	121	1	the	the	DET
can-11021	121	2	error	error	NOUN
can-11021	121	3	in	in	ADP
can-11021	121	4	determining	determine	VERB
can-11021	121	5	the	the	DET
can-11021	121	6	obtained	obtain	VERB
can-11021	121	7	values	value	NOUN
can-11021	121	8	of	of	ADP
can-11021	121	9	eu	eu	PROPN
can-11021	121	10	,	,	PUNCT
can-11021	121	11	eo	eo	PROPN
can-11021	121	12	and	and	CCONJ
can-11021	121	13	e04	e04	VERB
can-11021	121	14	in	in	ADP
can-11021	121	15	our	our	PRON
can-11021	121	16	case	case	NOUN
can-11021	121	17	was	be	AUX
can-11021	121	18	±0.01	±0.01	PROPN
can-11021	121	19	ev	ev	PROPN
can-11021	121	20	.	.	PUNCT
can-11021	122	1	different	different	ADJ
can-11021	122	2	temperature	temperature	NOUN
can-11021	122	3	regions	region	NOUN
can-11021	122	4	can	can	AUX
can-11021	122	5	be	be	AUX
can-11021	122	6	distinguished	distinguish	VERB
can-11021	122	7	in	in	ADP
can-11021	122	8	these	these	DET
can-11021	122	9	dependences	dependence	NOUN
can-11021	122	10	.	.	PUNCT
can-11021	123	1	first	first	ADV
can-11021	123	2	,	,	PUNCT
can-11021	123	3	there	there	PRON
can-11021	123	4	is	be	VERB
can-11021	123	5	a	a	DET
can-11021	123	6	clear	clear	ADJ
can-11021	123	7	anti	anti	NOUN
can-11021	123	8	-	-	NOUN
can-11021	123	9	correlation	correlation	NOUN
can-11021	123	10	between	between	ADP
can-11021	123	11	the	the	DET
can-11021	123	12	value	value	NOUN
can-11021	123	13	of	of	ADP
can-11021	123	14	eu	eu	PROPN
can-11021	123	15	,	,	PUNCT
can-11021	123	16	on	on	ADP
can-11021	123	17	the	the	DET
can-11021	123	18	one	one	NUM
can-11021	123	19	hand	hand	NOUN
can-11021	123	20	,	,	PUNCT
can-11021	123	21	and	and	CCONJ
can-11021	123	22	the	the	DET
can-11021	123	23	values	value	NOUN
can-11021	123	24	of	of	ADP
can-11021	123	25	e04	e04	NOUN
can-11021	123	26	and	and	CCONJ
can-11021	123	27	eo	eo	INTJ
can-11021	123	28	,	,	PUNCT
can-11021	123	29	on	on	ADP
can-11021	123	30	the	the	DET
can-11021	123	31	other	other	ADJ
can-11021	123	32	hand	hand	NOUN
can-11021	123	33	,	,	PUNCT
can-11021	123	34	at	at	ADP
can-11021	123	35	annealing	anneal	VERB
can-11021	123	36	temperatures	temperature	NOUN
can-11021	123	37	tan	tan	VERB
can-11021	123	38	≤	≤	ADV
can-11021	123	39	500	500	NUM
can-11021	123	40	°	°	NOUN
can-11021	123	41	c	c	NOUN
can-11021	123	42	.	.	PUNCT
can-11021	124	1	by	by	ADP
can-11021	124	2	analogy	analogy	NOUN
can-11021	124	3	with	with	ADP
can-11021	124	4	the	the	DET
can-11021	124	5	results	result	NOUN
can-11021	124	6	of	of	ADP
can-11021	124	7	the	the	DET
can-11021	124	8	above	above	ADJ
can-11021	124	9	works	work	NOUN
can-11021	124	10	,	,	PUNCT
can-11021	124	11	it	it	PRON
can-11021	124	12	is	be	AUX
can-11021	124	13	logical	logical	ADJ
can-11021	124	14	to	to	PART
can-11021	124	15	assume	assume	VERB
can-11021	124	16	that	that	SCONJ
can-11021	124	17	changes	change	NOUN
can-11021	124	18	in	in	ADP
can-11021	124	19	the	the	DET
can-11021	124	20	parameters	parameter	NOUN
can-11021	124	21	e04	e04	VERB
can-11021	124	22	,	,	PUNCT
can-11021	124	23	eo	eo	PROPN
can-11021	124	24	,	,	PUNCT
can-11021	124	25	and	and	CCONJ
can-11021	124	26	eu	eu	PROPN
can-11021	124	27	in	in	ADP
can-11021	124	28	the	the	DET
can-11021	124	29	range	range	NOUN
can-11021	124	30	of	of	ADP
can-11021	124	31	annealing	anneal	VERB
can-11021	124	32	temperatures	temperature	NOUN
can-11021	124	33	up	up	ADV
can-11021	124	34	to	to	ADP
can-11021	124	35	500	500	NUM
can-11021	124	36	°	°	NOUN
can-11021	124	37	c	c	NOUN
can-11021	124	38	are	be	AUX
can-11021	124	39	due	due	ADJ
can-11021	124	40	to	to	ADP
can-11021	124	41	a	a	DET
can-11021	124	42	decrease	decrease	NOUN
can-11021	124	43	in	in	ADP
can-11021	124	44	the	the	DET
can-11021	124	45	degree	degree	NOUN
can-11021	124	46	of	of	ADP
can-11021	124	47	structural	structural	ADJ
can-11021	124	48	disorder	disorder	NOUN
can-11021	124	49	of	of	ADP
can-11021	124	50	the	the	DET
can-11021	124	51	film	film	NOUN
can-11021	124	52	with	with	ADP
can-11021	124	53	increasing	increase	VERB
can-11021	124	54	tan	tan	PROPN
can-11021	124	55	.	.	PUNCT
can-11021	125	1	the	the	DET
can-11021	125	2	linear	linear	ADJ
can-11021	125	3	approximation	approximation	NOUN
can-11021	125	4	of	of	ADP
can-11021	125	5	the	the	DET
can-11021	125	6	e04(еu	e04(еu	ADJ
can-11021	125	7	)	)	PUNCT
can-11021	125	8	dependence	dependence	NOUN
can-11021	125	9	in	in	ADP
can-11021	125	10	this	this	DET
can-11021	125	11	annealing	anneal	VERB
can-11021	125	12	temperature	temperature	NOUN
can-11021	125	13	range	range	NOUN
can-11021	125	14	gave	give	VERB
can-11021	125	15	the	the	DET
can-11021	125	16	eg	eg	NOUN
can-11021	125	17	=	=	SYM
can-11021	125	18	e04(еu	e04(еu	NUM
can-11021	125	19	=	=	SYM
can-11021	125	20	0	0	NUM
can-11021	125	21	)	)	PUNCT
can-11021	125	22	=	=	SYM
can-11021	125	23	3.00	3.00	NUM
can-11021	125	24	±	±	NUM
can-11021	125	25	0.16	0.16	NUM
can-11021	125	26	ev	ev	PROPN
can-11021	125	27	,	,	PUNCT
can-11021	125	28	and	and	CCONJ
can-11021	125	29	the	the	DET
can-11021	125	30	linear	linear	ADJ
can-11021	125	31	approximation	approximation	NOUN
can-11021	125	32	of	of	ADP
can-11021	125	33	the	the	DET
can-11021	125	34	eo(еu	eo(еu	PROPN
can-11021	125	35	)	)	PUNCT
can-11021	125	36	dependence	dependence	NOUN
can-11021	125	37	gave	give	VERB
can-11021	125	38	the	the	DET
can-11021	125	39	value	value	NOUN
can-11021	125	40	eg	eg	NOUN
can-11021	125	41	=	=	SYM
can-11021	125	42	eo(еu	eo(еu	PROPN
can-11021	125	43	=	=	PUNCT
can-11021	125	44	0	0	X
can-11021	125	45	)	)	PUNCT
can-11021	125	46	=	=	SYM
can-11021	125	47	2.63	2.63	NUM
can-11021	125	48	±	±	NUM
can-11021	125	49	0.13	0.13	NUM
can-11021	125	50	ev	ev	PROPN
can-11021	125	51	.	.	PROPN
can-11021	125	52	based	base	VERB
can-11021	125	53	on	on	ADP
can-11021	125	54	these	these	DET
can-11021	125	55	results	result	NOUN
can-11021	125	56	,	,	PUNCT
can-11021	125	57	the	the	DET
can-11021	125	58	mobility	mobility	NOUN
can-11021	125	59	gap	gap	NOUN
can-11021	125	60	eg	eg	NOUN
can-11021	125	61	of	of	ADP
can-11021	125	62	amorphous	amorphous	ADJ
can-11021	125	63	sio1.3	sio1.3	PROPN
can-11021	125	64	can	can	AUX
can-11021	125	65	be	be	AUX
can-11021	125	66	estimated	estimate	VERB
can-11021	125	67	to	to	PART
can-11021	125	68	be	be	AUX
can-11021	125	69	eg	eg	NOUN
can-11021	125	70	=	=	SYM
can-11021	125	71	2.50–3.16	2.50–3.16	NUM
can-11021	125	72	ev	ev	INTJ
can-11021	125	73	.	.	PUNCT
can-11021	126	1	in	in	ADP
can-11021	126	2	[	[	X
can-11021	126	3	36	36	NUM
can-11021	126	4	]	]	PUNCT
can-11021	126	5	,	,	PUNCT
can-11021	126	6	the	the	DET
can-11021	126	7	value	value	NOUN
can-11021	126	8	of	of	ADP
can-11021	126	9	eg	eg	NOUN
can-11021	126	10	for	for	ADP
can-11021	126	11	siox	siox	NOUN
can-11021	126	12	alloys	alloy	NOUN
can-11021	126	13	in	in	ADP
can-11021	126	14	the	the	DET
can-11021	126	15	bulk	bulk	ADJ
can-11021	126	16	glassy	glassy	NOUN
can-11021	126	17	state	state	NOUN
can-11021	126	18	was	be	AUX
can-11021	126	19	calculated	calculate	VERB
can-11021	126	20	using	use	VERB
can-11021	126	21	density	density	NOUN
can-11021	126	22	functional	functional	ADJ
can-11021	126	23	theory	theory	NOUN
can-11021	126	24	.	.	PUNCT
can-11021	127	1	these	these	DET
can-11021	127	2	calculations	calculation	NOUN
can-11021	127	3	gave	give	VERB
can-11021	127	4	a	a	DET
can-11021	127	5	value	value	NOUN
can-11021	127	6	of	of	ADP
can-11021	127	7	eg	eg	NOUN
can-11021	127	8	=	=	SYM
can-11021	127	9	2.5	2.5	NUM
can-11021	127	10	ev	ev	INTJ
can-11021	127	11	for	for	ADP
can-11021	127	12	x	x	SYM
can-11021	127	13	=	=	SYM
can-11021	127	14	1.3	1.3	NUM
can-11021	127	15	.	.	PUNCT
can-11021	128	1	although	although	SCONJ
can-11021	128	2	this	this	DET
can-11021	128	3	value	value	NOUN
can-11021	128	4	,	,	PUNCT
can-11021	128	5	as	as	SCONJ
can-11021	128	6	the	the	DET
can-11021	128	7	authors	author	NOUN
can-11021	128	8	point	point	VERB
can-11021	128	9	out	out	ADP
can-11021	128	10	,	,	PUNCT
can-11021	128	11	is	be	AUX
can-11021	128	12	an	an	DET
can-11021	128	13	underestimate	underestimate	ADJ
can-11021	128	14	due	due	ADJ
can-11021	128	15	to	to	ADP
can-11021	128	16	the	the	DET
can-11021	128	17	peculiarities	peculiarity	NOUN
can-11021	128	18	of	of	ADP
can-11021	128	19	the	the	DET
can-11021	128	20	method	method	NOUN
can-11021	128	21	,	,	PUNCT
can-11021	128	22	it	it	PRON
can-11021	128	23	correlates	correlate	VERB
can-11021	128	24	better	well	ADV
can-11021	128	25	with	with	ADP
can-11021	128	26	the	the	DET
can-11021	128	27	eg	eg	NOUN
can-11021	128	28	value	value	NOUN
can-11021	128	29	obtained	obtain	VERB
can-11021	128	30	using	use	VERB
can-11021	128	31	the	the	DET
can-11021	128	32	tauc	tauc	ADJ
can-11021	128	33	optical	optical	ADJ
can-11021	128	34	band	band	NOUN
can-11021	128	35	gap	gap	NOUN
can-11021	128	36	.	.	PUNCT
can-11021	129	1	with	with	ADP
can-11021	129	2	an	an	DET
can-11021	129	3	increase	increase	NOUN
can-11021	129	4	in	in	ADP
can-11021	129	5	tan	tan	PROPN
can-11021	129	6	from	from	ADP
can-11021	129	7	500	500	NUM
can-11021	129	8	°	°	NOUN
can-11021	129	9	c	c	NOUN
can-11021	129	10	to	to	ADP
can-11021	129	11	600	600	NUM
can-11021	129	12	°	°	NOUN
can-11021	129	13	c	c	NOUN
can-11021	129	14	and	and	CCONJ
can-11021	129	15	further	far	ADV
can-11021	129	16	to	to	ADP
can-11021	129	17	910	910	NUM
can-11021	129	18	°	°	ADP
can-11021	129	19	c	c	NOUN
can-11021	129	20	a	a	DET
can-11021	129	21	significant	significant	ADJ
can-11021	129	22	decrease	decrease	NOUN
can-11021	129	23	in	in	ADP
can-11021	129	24	the	the	DET
can-11021	129	25	values	value	NOUN
can-11021	129	26	of	of	ADP
can-11021	129	27	e04	e04	NOUN
can-11021	130	1	and	and	CCONJ
can-11021	130	2	eo	eo	PROPN
can-11021	130	3	is	be	AUX
can-11021	130	4	observed	observe	VERB
can-11021	130	5	compared	compare	VERB
can-11021	130	6	to	to	ADP
can-11021	130	7	their	their	PRON
can-11021	130	8	values	value	NOUN
can-11021	130	9	at	at	ADP
can-11021	130	10	tan	tan	PROPN
can-11021	130	11	=	=	PROPN
can-11021	130	12	500	500	NUM
can-11021	130	13	°	°	NOUN
can-11021	130	14	c	c	VERB
can-11021	130	15	.	.	PUNCT
can-11021	131	1	this	this	PRON
can-11021	131	2	takes	take	VERB
can-11021	131	3	place	place	NOUN
can-11021	131	4	against	against	ADP
can-11021	131	5	the	the	DET
can-11021	131	6	background	background	NOUN
can-11021	131	7	of	of	ADP
can-11021	131	8	a	a	DET
can-11021	131	9	slight	slight	ADJ
can-11021	131	10	decrease	decrease	NOUN
can-11021	131	11	in	in	ADP
can-11021	131	12	the	the	DET
can-11021	131	13	value	value	NOUN
can-11021	131	14	of	of	ADP
can-11021	131	15	the	the	DET
can-11021	131	16	еu	еu	PROPN
can-11021	131	17	.	.	PUNCT
can-11021	132	1	this	this	PRON
can-11021	132	2	shows	show	VERB
can-11021	132	3	that	that	SCONJ
can-11021	132	4	,	,	PUNCT
can-11021	132	5	at	at	ADP
can-11021	132	6	these	these	DET
can-11021	132	7	annealing	anneal	VERB
can-11021	132	8	temperatures	temperature	NOUN
can-11021	132	9	,	,	PUNCT
can-11021	132	10	the	the	DET
can-11021	132	11	prevailing	prevail	VERB
can-11021	132	12	processes	process	NOUN
can-11021	132	13	are	be	AUX
can-11021	132	14	fundamentally	fundamentally	ADV
can-11021	132	15	different	different	ADJ
can-11021	132	16	from	from	ADP
can-11021	132	17	the	the	DET
can-11021	132	18	processes	process	NOUN
can-11021	132	19	of	of	ADP
can-11021	132	20	structural	structural	ADJ
can-11021	132	21	ordering	ordering	NOUN
can-11021	132	22	of	of	ADP
can-11021	132	23	the	the	DET
can-11021	132	24	sio1.3	sio1.3	ADJ
can-11021	132	25	film	film	NOUN
can-11021	132	26	that	that	PRON
can-11021	132	27	take	take	VERB
can-11021	132	28	place	place	NOUN
can-11021	132	29	at	at	ADP
can-11021	132	30	tan	tan	PROPN
can-11021	132	31	≤	≤	ADV
can-11021	132	32	500	500	NUM
can-11021	132	33	°	°	NOUN
can-11021	132	34	c	c	VERB
can-11021	132	35	.	.	PUNCT
can-11021	133	1	it	it	PRON
can-11021	133	2	is	be	AUX
can-11021	133	3	known	know	VERB
can-11021	133	4	that	that	SCONJ
can-11021	133	5	,	,	PUNCT
can-11021	133	6	at	at	ADP
can-11021	133	7	high	high	ADJ
can-11021	133	8	annealing	anneal	VERB
can-11021	133	9	temperatures	temperature	NOUN
can-11021	133	10	,	,	PUNCT
can-11021	133	11	siox	siox	NOUN
can-11021	133	12	films	film	NOUN
can-11021	133	13	undergo	undergo	VERB
can-11021	133	14	disproportionation	disproportionation	NOUN
can-11021	133	15	with	with	ADP
can-11021	133	16	the	the	DET
can-11021	133	17	formation	formation	NOUN
can-11021	133	18	of	of	ADP
can-11021	133	19	amorphous	amorphous	ADJ
can-11021	134	1	[	[	X
can-11021	134	2	21,37–40	21,37–40	NOUN
can-11021	134	3	]	]	PUNCT
can-11021	134	4	,	,	PUNCT
can-11021	134	5	and	and	CCONJ
can-11021	134	6	,	,	PUNCT
can-11021	134	7	at	at	ADP
can-11021	134	8	ta	ta	PROPN
can-11021	134	9	≥	≥	NUM
can-11021	134	10	800	800	NUM
can-11021	134	11	°	°	NOUN
can-11021	134	12	c−900	c−900	NUM
can-11021	134	13	°	°	NOUN
can-11021	134	14	c	c	NOUN
can-11021	134	15	,	,	PUNCT
can-11021	134	16	amorphous	amorphous	ADJ
can-11021	134	17	,	,	PUNCT
can-11021	134	18	amorphous	amorphous	ADJ
can-11021	134	19	-	-	PUNCT
can-11021	134	20	crystalline	crystalline	NOUN
can-11021	134	21	,	,	PUNCT
can-11021	134	22	and	and	CCONJ
can-11021	134	23	crystalline	crystalline	ADJ
can-11021	134	24	silicon	silicon	NOUN
can-11021	134	25	nanoinclusions	nanoinclusion	NOUN
can-11021	135	1	[	[	X
can-11021	135	2	37–40	37–40	NUM
can-11021	135	3	]	]	X
can-11021	135	4	in	in	ADP
can-11021	135	5	the	the	DET
can-11021	135	6	matrix	matrix	NOUN
can-11021	135	7	of	of	ADP
can-11021	135	8	the	the	DET
can-11021	135	9	sioy	sioy	NOUN
can-11021	135	10	(	(	PUNCT
can-11021	135	11	y	y	NOUN
can-11021	135	12	>	>	X
can-11021	135	13	x	x	NOUN
can-11021	135	14	)	)	PUNCT
can-11021	135	15	composition	composition	NOUN
can-11021	135	16	.	.	PUNCT
can-11021	136	1	in	in	ADP
can-11021	136	2	suboxide	suboxide	ADJ
can-11021	136	3	siox	siox	PROPN
can-11021	136	4	0.20	0.20	NUM
can-11021	136	5	0.25	0.25	NUM
can-11021	136	6	0.30	0.30	NUM
can-11021	136	7	0.35	0.35	NUM
can-11021	136	8	0.40	0.40	NUM
can-11021	136	9	0	0	NUM
can-11021	137	1	300	300	NUM
can-11021	137	2	600	600	NUM
can-11021	137	3	900	900	NUM
can-11021	137	4	1200	1200	NUM
can-11021	137	5	1.8	1.8	NUM
can-11021	137	6	2.0	2.0	NUM
can-11021	137	7	2.2	2.2	NUM
can-11021	137	8	2.4	2.4	NUM
can-11021	137	9	2.6	2.6	NUM
can-11021	137	10	e	e	NOUN
can-11021	137	11	u	u	NOUN
can-11021	137	12	e	e	X
can-11021	137	13	o	o	X
can-11021	137	14	(	(	PUNCT
can-11021	137	15	e	e	NOUN
can-11021	137	16	v	v	NOUN
can-11021	137	17	)	)	PUNCT
can-11021	137	18	,	,	PUNCT
can-11021	137	19	e	e	NOUN
can-11021	137	20	0	0	NUM
can-11021	137	21	4	4	NUM
can-11021	137	22	(	(	PUNCT
can-11021	137	23	e	e	NOUN
can-11021	137	24	v	v	NOUN
can-11021	137	25	)	)	PUNCT
can-11021	137	26	annealing	anneal	VERB
can-11021	137	27	temperature	temperature	NOUN
can-11021	137	28	t	t	PROPN
can-11021	137	29	an	an	NOUN
can-11021	137	30	,	,	PUNCT
can-11021	137	31	o	o	NOUN
can-11021	137	32	c	c	NOUN
can-11021	137	33	e	e	NOUN
can-11021	137	34	04	04	NUM
can-11021	137	35	e	e	X
can-11021	137	36	o	o	X
can-11021	137	37	e	e	X
can-11021	137	38	u	u	PROPN
can-11021	137	39	,	,	PUNCT
can-11021	137	40	e	e	NOUN
can-11021	137	41	v	v	X
can-11021	137	42	characterization	characterization	NOUN
can-11021	137	43	and	and	CCONJ
can-11021	137	44	application	application	NOUN
can-11021	137	45	of	of	ADP
can-11021	137	46	nanomaterials	nanomaterial	NOUN
can-11021	137	47	2025	2025	NUM
can-11021	137	48	,	,	PUNCT
can-11021	137	49	8(2	8(2	NUM
can-11021	137	50	)	)	PUNCT
can-11021	137	51	,	,	PUNCT
can-11021	137	52	11021	11021	NUM
can-11021	137	53	.	.	PUNCT
can-11021	138	1	8	8	NUM
can-11021	138	2	films	film	NOUN
can-11021	138	3	with	with	ADP
can-11021	138	4	stoichiometry	stoichiometry	NOUN
can-11021	138	5	indices	indice	VERB
can-11021	138	6	x	x	PUNCT
can-11021	138	7	≤	≤	NUM
can-11021	138	8	1.5	1.5	NUM
can-11021	138	9	,	,	PUNCT
can-11021	138	10	the	the	DET
can-11021	138	11	optical	optical	ADJ
can-11021	138	12	band	band	NOUN
can-11021	138	13	gap	gap	NOUN
can-11021	138	14	eo	eo	PROPN
can-11021	138	15	grows	grow	VERB
can-11021	138	16	very	very	ADV
can-11021	138	17	rapidly	rapidly	ADV
can-11021	138	18	with	with	ADP
can-11021	138	19	increasing	increase	VERB
can-11021	138	20	x	x	PUNCT
can-11021	139	1	[	[	X
can-11021	139	2	3	3	NUM
can-11021	139	3	]	]	PUNCT
can-11021	139	4	.	.	PUNCT
can-11021	140	1	thus	thus	ADV
can-11021	140	2	,	,	PUNCT
can-11021	140	3	the	the	DET
can-11021	140	4	main	main	ADJ
can-11021	140	5	contribution	contribution	NOUN
can-11021	140	6	to	to	ADP
can-11021	140	7	the	the	DET
can-11021	140	8	absorption	absorption	NOUN
can-11021	140	9	of	of	ADP
can-11021	140	10	the	the	DET
can-11021	140	11	nanocomposite	nanocomposite	NOUN
can-11021	140	12	‘	'	PUNCT
can-11021	140	13	si	si	X
can-11021	140	14	nanoinclusions	nanoinclusion	NOUN
can-11021	140	15	—	—	PUNCT
can-11021	140	16	sioy	sioy	NOUN
can-11021	140	17	’	'	PUNCT
can-11021	140	18	after	after	ADP
can-11021	140	19	annealing	anneal	VERB
can-11021	140	20	at	at	ADP
can-11021	140	21	600	600	NUM
can-11021	140	22	°	°	NOUN
can-11021	140	23	c	c	NOUN
can-11021	140	24	≤	≤	NUM
can-11021	140	25	tan	tan	PROPN
can-11021	140	26	≤	≤	ADJ
can-11021	140	27	800	800	NUM
can-11021	140	28	°	°	NOUN
can-11021	140	29	c−900	c−900	NUM
can-11021	140	30	°	°	NOUN
can-11021	140	31	c	c	NOUN
can-11021	140	32	should	should	AUX
can-11021	140	33	be	be	AUX
can-11021	140	34	attributed	attribute	VERB
can-11021	140	35	to	to	ADP
can-11021	140	36	the	the	DET
can-11021	140	37	amorphous	amorphous	ADJ
can-11021	140	38	silicon	silicon	NOUN
can-11021	140	39	nanoparticles	nanoparticle	NOUN
can-11021	140	40	.	.	PUNCT
can-11021	141	1	as	as	SCONJ
can-11021	141	2	can	can	AUX
can-11021	141	3	be	be	AUX
can-11021	141	4	seen	see	VERB
can-11021	141	5	from	from	ADP
can-11021	141	6	the	the	DET
can-11021	141	7	graph	graph	NOUN
can-11021	141	8	,	,	PUNCT
can-11021	141	9	they	they	PRON
can-11021	141	10	already	already	ADV
can-11021	141	11	begin	begin	VERB
can-11021	141	12	to	to	PART
can-11021	141	13	play	play	VERB
can-11021	141	14	a	a	DET
can-11021	141	15	noticeable	noticeable	ADJ
can-11021	141	16	role	role	NOUN
can-11021	141	17	at	at	ADP
can-11021	141	18	tan	tan	PROPN
can-11021	141	19	=	=	PUNCT
can-11021	141	20	600	600	NUM
can-11021	141	21	°	°	NOUN
can-11021	141	22	c	c	NOUN
can-11021	141	23	.	.	PUNCT
can-11021	142	1	the	the	DET
can-11021	142	2	decrease	decrease	NOUN
can-11021	142	3	in	in	ADP
can-11021	142	4	the	the	DET
can-11021	142	5	values	value	NOUN
can-11021	142	6	of	of	ADP
can-11021	142	7	the	the	DET
can-11021	142	8	empirical	empirical	ADJ
can-11021	142	9	parameters	parameter	NOUN
can-11021	142	10	e04	e04	VERB
can-11021	142	11	and	and	CCONJ
can-11021	142	12	eo	eo	X
can-11021	142	13	with	with	ADP
can-11021	142	14	further	further	ADJ
can-11021	142	15	growth	growth	NOUN
can-11021	142	16	of	of	ADP
can-11021	142	17	tan	tan	PROPN
can-11021	142	18	can	can	AUX
can-11021	142	19	,	,	PUNCT
can-11021	142	20	obviously	obviously	ADV
can-11021	142	21	,	,	PUNCT
can-11021	142	22	be	be	AUX
can-11021	142	23	interpreted	interpret	VERB
can-11021	142	24	as	as	ADP
can-11021	142	25	a	a	DET
can-11021	142	26	manifestation	manifestation	NOUN
can-11021	142	27	of	of	ADP
can-11021	142	28	the	the	DET
can-11021	142	29	size	size	NOUN
can-11021	142	30	effect	effect	NOUN
can-11021	142	31	in	in	ADP
can-11021	142	32	amorphous	amorphous	ADJ
can-11021	142	33	silicon	silicon	NOUN
can-11021	142	34	nanoparticles	nanoparticle	NOUN
can-11021	142	35	.	.	PUNCT
can-11021	143	1	the	the	DET
can-11021	143	2	еu	еu	PROPN
can-11021	143	3	values	value	NOUN
can-11021	143	4	for	for	ADP
can-11021	143	5	annealing	anneal	VERB
can-11021	143	6	temperatures	temperature	NOUN
can-11021	143	7	of	of	ADP
can-11021	143	8	600	600	NUM
can-11021	143	9	°	°	NUM
can-11021	143	10	c–910	c–910	NOUN
can-11021	143	11	°	°	ADP
can-11021	143	12	c	c	NOUN
can-11021	143	13	do	do	AUX
can-11021	143	14	not	not	PART
can-11021	143	15	demonstrate	demonstrate	VERB
can-11021	143	16	any	any	DET
can-11021	143	17	pronounced	pronounced	ADJ
can-11021	143	18	trend	trend	NOUN
can-11021	143	19	depending	depend	VERB
can-11021	143	20	on	on	ADP
can-11021	143	21	the	the	DET
can-11021	143	22	sizes	size	NOUN
can-11021	143	23	of	of	ADP
can-11021	143	24	amorphous	amorphous	ADJ
can-11021	143	25	inclusions	inclusion	NOUN
can-11021	143	26	:	:	PUNCT
can-11021	143	27	the	the	DET
can-11021	143	28	еu	еu	PRON
can-11021	143	29	almost	almost	ADV
can-11021	143	30	does	do	AUX
can-11021	143	31	not	not	PART
can-11021	143	32	change	change	VERB
can-11021	143	33	,	,	PUNCT
can-11021	143	34	remaining	remain	VERB
can-11021	143	35	at	at	ADP
can-11021	143	36	the	the	DET
can-11021	143	37	level	level	NOUN
can-11021	143	38	of	of	ADP
can-11021	143	39	values	value	NOUN
can-11021	143	40	slightly	slightly	ADV
can-11021	143	41	lower	low	ADJ
can-11021	143	42	than	than	ADP
can-11021	143	43	after	after	ADP
can-11021	143	44	annealing	anneal	VERB
can-11021	143	45	at	at	ADP
can-11021	143	46	500	500	NUM
can-11021	143	47	°	°	NOUN
can-11021	143	48	c	c	NOUN
can-11021	143	49	.	.	PUNCT
can-11021	144	1	this	this	PRON
can-11021	144	2	distinguishes	distinguish	VERB
can-11021	144	3	the	the	DET
can-11021	144	4	behavior	behavior	NOUN
can-11021	144	5	of	of	ADP
can-11021	144	6	the	the	DET
can-11021	144	7	‘	'	PUNCT
can-11021	144	8	а	а	PROPN
can-11021	144	9	-	-	PUNCT
can-11021	144	10	si	si	NOUN
can-11021	144	11	nanoinclusions	nanoinclusion	NOUN
can-11021	144	12	—	—	PUNCT
can-11021	144	13	sioy	sioy	NOUN
can-11021	144	14	’	'	PUNCT
can-11021	144	15	(	(	PUNCT
can-11021	144	16	y	y	X
can-11021	144	17	>	>	X
can-11021	144	18	1.3	1.3	NUM
can-11021	144	19	)	)	PUNCT
can-11021	144	20	nanocomposites	nanocomposite	NOUN
can-11021	144	21	from	from	ADP
can-11021	144	22	the	the	DET
can-11021	144	23	behavior	behavior	NOUN
can-11021	144	24	of	of	ADP
can-11021	144	25	the	the	DET
can-11021	144	26	‘	'	PUNCT
can-11021	144	27	c	c	X
can-11021	144	28	-	-	PUNCT
can-11021	144	29	si	si	NOUN
can-11021	144	30	nanoinclusions	nanoinclusion	NOUN
can-11021	144	31	—	—	PUNCT
can-11021	144	32	sio2	sio2	NOUN
can-11021	144	33	’	'	PUNCT
can-11021	144	34	nanocomposites	nanocomposite	NOUN
can-11021	144	35	.	.	PUNCT
can-11021	145	1	the	the	DET
can-11021	145	2	latter	latter	ADJ
can-11021	145	3	are	be	AUX
can-11021	145	4	characterized	characterize	VERB
can-11021	145	5	by	by	ADP
can-11021	145	6	the	the	DET
can-11021	145	7	growth	growth	NOUN
can-11021	145	8	of	of	ADP
can-11021	145	9	the	the	DET
can-11021	145	10	еu	еu	NOUN
can-11021	145	11	with	with	ADP
can-11021	145	12	decreasing	decrease	VERB
can-11021	145	13	nanocrystallite	nanocrystallite	ADJ
can-11021	145	14	size	size	NOUN
can-11021	145	15	due	due	ADP
can-11021	145	16	to	to	ADP
can-11021	145	17	the	the	DET
can-11021	145	18	increasing	increase	VERB
can-11021	145	19	influence	influence	NOUN
can-11021	145	20	of	of	ADP
can-11021	145	21	the	the	DET
can-11021	145	22	c	c	NOUN
can-11021	145	23	-	-	PUNCT
can-11021	145	24	si	si	ADJ
can-11021	145	25	/	/	SYM
can-11021	145	26	sio2	sio2	PROPN
can-11021	145	27	interface	interface	NOUN
can-11021	145	28	[	[	X
can-11021	145	29	41	41	NUM
can-11021	145	30	]	]	PUNCT
can-11021	145	31	.	.	PUNCT
can-11021	146	1	the	the	DET
can-11021	146	2	values	value	NOUN
can-11021	146	3	of	of	ADP
can-11021	146	4	еu	еu	PROPN
can-11021	146	5	=	=	NOUN
can-11021	146	6	0.23–0.246	0.23–0.246	NUM
can-11021	146	7	ev	ev	ADP
can-11021	146	8	obtained	obtain	VERB
can-11021	146	9	by	by	ADP
can-11021	146	10	us	we	PRON
can-11021	146	11	in	in	ADP
can-11021	146	12	this	this	DET
can-11021	146	13	range	range	NOUN
can-11021	146	14	of	of	ADP
can-11021	146	15	annealing	anneal	VERB
can-11021	146	16	temperatures	temperature	NOUN
can-11021	146	17	are	be	AUX
can-11021	146	18	very	very	ADV
can-11021	146	19	close	close	ADJ
can-11021	146	20	to	to	ADP
can-11021	146	21	the	the	DET
can-11021	146	22	values	value	NOUN
can-11021	146	23	of	of	ADP
can-11021	146	24	еu	еu	PRON
can-11021	146	25	obtained	obtain	VERB
can-11021	146	26	in	in	ADP
can-11021	146	27	[	[	X
can-11021	146	28	42	42	NUM
can-11021	146	29	]	]	PUNCT
can-11021	146	30	for	for	ADP
can-11021	146	31	non	non	ADJ
can-11021	146	32	-	-	ADJ
can-11021	146	33	hydrogenated	hydrogenated	ADJ
can-11021	146	34	a	a	DET
can-11021	146	35	-	-	PUNCT
can-11021	146	36	si	si	NOUN
can-11021	146	37	films	film	NOUN
can-11021	146	38	with	with	ADP
can-11021	146	39	thicknesses	thickness	NOUN
can-11021	146	40	of	of	ADP
can-11021	146	41	769–1174	769–1174	NUM
can-11021	146	42	nm	nm	NOUN
can-11021	146	43	,	,	PUNCT
can-11021	146	44	grain	grain	NOUN
can-11021	146	45	sizes	size	NOUN
can-11021	146	46	of	of	ADP
can-11021	146	47	20–30	20–30	PROPN
can-11021	146	48	nm	nm	NOUN
can-11021	146	49	,	,	PUNCT
can-11021	146	50	and	and	CCONJ
can-11021	146	51	porosities	porosity	NOUN
can-11021	146	52	of	of	ADP
can-11021	146	53	0.14	0.14	NUM
can-11021	146	54	–	–	PUNCT
can-11021	146	55	0.24	0.24	NUM
can-11021	146	56	(	(	PUNCT
can-11021	146	57	i.e.	i.e.	X
can-11021	146	58	,	,	PUNCT
can-11021	146	59	with	with	ADP
can-11021	146	60	natural	natural	ADJ
can-11021	146	61	oxide	oxide	NOUN
can-11021	146	62	-	-	PUNCT
can-11021	146	63	coated	coat	VERB
can-11021	146	64	grains	grain	NOUN
can-11021	146	65	)	)	PUNCT
can-11021	146	66	.	.	PUNCT
can-11021	147	1	the	the	DET
can-11021	147	2	еu	еu	PROPN
can-11021	147	3	values	value	NOUN
can-11021	147	4	in	in	ADP
can-11021	147	5	these	these	DET
can-11021	147	6	films	film	NOUN
can-11021	147	7	were	be	AUX
can-11021	147	8	0.230	0.230	NUM
can-11021	147	9	–	–	PUNCT
can-11021	147	10	0.258	0.258	NUM
can-11021	147	11	ev	ev	NOUN
can-11021	147	12	,	,	PUNCT
can-11021	147	13	and	and	CCONJ
can-11021	147	14	the	the	DET
can-11021	147	15	eo	eo	PROPN
can-11021	147	16	values	value	NOUN
can-11021	147	17	were	be	AUX
can-11021	147	18	1.32–1.38	1.32–1.38	PROPN
can-11021	147	19	ev	ev	PROPN
can-11021	147	20	.	.	PROPN
can-11021	148	1	almost	almost	ADV
can-11021	148	2	identical	identical	ADJ
can-11021	148	3	еu	еu	PRON
can-11021	148	4	values	value	NOUN
can-11021	148	5	and	and	CCONJ
can-11021	148	6	higher	high	ADJ
can-11021	148	7	eo	eo	PROPN
can-11021	148	8	values	value	NOUN
can-11021	148	9	for	for	ADP
can-11021	148	10	the	the	DET
can-11021	148	11	nanocomposite	nanocomposite	PROPN
can-11021	148	12	films	film	NOUN
can-11021	148	13	‘	'	PUNCT
can-11021	148	14	а	а	X
can-11021	148	15	-	-	PUNCT
can-11021	148	16	si	si	NOUN
can-11021	148	17	nanoinclusions	nanoinclusion	NOUN
can-11021	148	18	—	—	PUNCT
can-11021	148	19	sioy	sioy	NOUN
can-11021	148	20	’	'	PUNCT
can-11021	148	21	obtained	obtain	VERB
can-11021	148	22	by	by	ADP
can-11021	148	23	annealing	anneal	VERB
can-11021	148	24	sio1.3	sio1.3	PROPN
can-11021	148	25	films	film	NOUN
can-11021	148	26	at	at	ADP
can-11021	148	27	temperatures	temperature	NOUN
can-11021	148	28	of	of	ADP
can-11021	148	29	600	600	NUM
can-11021	148	30	°	°	NOUN
can-11021	148	31	c−910	c−910	NOUN
can-11021	149	1	°	°	ADP
can-11021	149	2	c	c	NOUN
can-11021	149	3	compared	compare	VERB
can-11021	149	4	to	to	ADP
can-11021	149	5	the	the	DET
can-11021	149	6	nonhydrogenated	nonhydrogenate	VERB
can-11021	149	7	a	a	DET
can-11021	149	8	-	-	PUNCT
can-11021	149	9	si	si	NOUN
can-11021	149	10	films	film	NOUN
can-11021	149	11	can	can	AUX
can-11021	149	12	be	be	AUX
can-11021	149	13	explained	explain	VERB
can-11021	149	14	by	by	ADP
can-11021	149	15	the	the	DET
can-11021	149	16	size	size	NOUN
can-11021	149	17	effect	effect	NOUN
can-11021	149	18	.	.	PUNCT
can-11021	150	1	it	it	PRON
can-11021	150	2	causes	cause	VERB
can-11021	150	3	an	an	DET
can-11021	150	4	increase	increase	NOUN
can-11021	150	5	in	in	ADP
can-11021	150	6	the	the	DET
can-11021	150	7	band	band	NOUN
can-11021	150	8	gap	gap	NOUN
can-11021	150	9	of	of	ADP
can-11021	150	10	amorphous	amorphous	ADJ
can-11021	150	11	silicon	silicon	NOUN
can-11021	150	12	inclusions	inclusion	NOUN
can-11021	150	13	with	with	ADP
can-11021	150	14	decreasing	decrease	VERB
can-11021	150	15	size	size	NOUN
can-11021	150	16	.	.	PUNCT
can-11021	151	1	if	if	SCONJ
can-11021	151	2	we	we	PRON
can-11021	151	3	assume	assume	VERB
can-11021	151	4	that	that	SCONJ
can-11021	151	5	for	for	ADP
can-11021	151	6	the	the	DET
can-11021	151	7	non	non	ADJ
can-11021	151	8	-	-	ADJ
can-11021	151	9	hydrogenated	hydrogenated	ADJ
can-11021	151	10	partially	partially	ADV
can-11021	151	11	porous	porous	ADJ
can-11021	151	12	oxidized	oxidize	VERB
can-11021	151	13	a	a	DET
can-11021	151	14	-	-	PUNCT
can-11021	151	15	si	si	NOUN
can-11021	151	16	films	film	NOUN
can-11021	151	17	there	there	PRON
can-11021	151	18	is	be	VERB
can-11021	151	19	the	the	DET
can-11021	151	20	anticorrelation	anticorrelation	NOUN
can-11021	151	21	(	(	PUNCT
can-11021	151	22	equation	equation	NOUN
can-11021	151	23	4	4	NUM
can-11021	151	24	)	)	PUNCT
can-11021	151	25	with	with	ADP
can-11021	151	26	the	the	DET
can-11021	151	27	same	same	ADJ
can-11021	151	28	coefficient	coefficient	NOUN
can-11021	151	29	co	co	NOUN
can-11021	151	30	=	=	NOUN
can-11021	151	31	6.2	6.2	NUM
can-11021	151	32	,	,	PUNCT
can-11021	151	33	then	then	ADV
can-11021	151	34	we	we	PRON
can-11021	151	35	obtain	obtain	VERB
can-11021	151	36	a	a	DET
can-11021	151	37	mobility	mobility	NOUN
can-11021	151	38	gap	gap	NOUN
can-11021	151	39	еg	еg	NOUN
can-11021	151	40	~	~	PUNCT
can-11021	151	41	2.8	2.8	NUM
can-11021	151	42	ev	ev	NOUN
can-11021	151	43	.	.	PUNCT
can-11021	151	44	assuming	assume	VERB
can-11021	151	45	the	the	DET
can-11021	151	46	validity	validity	NOUN
can-11021	151	47	of	of	ADP
can-11021	151	48	equation	equation	NOUN
can-11021	151	49	(	(	PUNCT
can-11021	151	50	4	4	NUM
can-11021	151	51	)	)	PUNCT
can-11021	151	52	with	with	ADP
can-11021	151	53	co	co	NOUN
can-11021	151	54	=	=	NOUN
can-11021	151	55	6.2	6.2	NUM
can-11021	151	56	for	for	ADP
can-11021	151	57	the	the	DET
can-11021	151	58	sio1.3	sio1.3	PROPN
can-11021	151	59	films	film	NOUN
can-11021	151	60	annealed	anneal	VERB
can-11021	151	61	at	at	ADP
can-11021	151	62	600	600	NUM
can-11021	151	63	°	°	NOUN
can-11021	151	64	c−910	c−910	NOUN
can-11021	151	65	°	°	ADP
can-11021	151	66	c	c	NOUN
can-11021	151	67	,	,	PUNCT
can-11021	151	68	we	we	PRON
can-11021	151	69	obtain	obtain	VERB
can-11021	151	70	estimates	estimate	NOUN
can-11021	151	71	of	of	ADP
can-11021	151	72	the	the	DET
can-11021	151	73	mobility	mobility	NOUN
can-11021	151	74	gap	gap	NOUN
can-11021	151	75	еg	еg	PROPN
can-11021	152	1	≈	≈	PROPN
can-11021	152	2	3.4–3.75	3.4–3.75	PROPN
can-11021	152	3	ev	ev	VERB
can-11021	152	4	.	.	PUNCT
can-11021	153	1	if	if	SCONJ
can-11021	153	2	we	we	PRON
can-11021	153	3	assume	assume	VERB
can-11021	153	4	that	that	SCONJ
can-11021	153	5	еg	еg	NOUN
can-11021	153	6	for	for	ADP
can-11021	153	7	non	non	ADJ
can-11021	153	8	-	-	ADJ
can-11021	153	9	hydrogenated	hydrogenated	ADJ
can-11021	153	10	partially	partially	ADV
can-11021	153	11	porous	porous	ADJ
can-11021	153	12	oxidized	oxidize	VERB
can-11021	153	13	a	a	DET
can-11021	153	14	-	-	PUNCT
can-11021	153	15	si	si	NOUN
can-11021	153	16	films	film	NOUN
can-11021	153	17	is	be	AUX
can-11021	153	18	the	the	DET
can-11021	153	19	same	same	ADJ
can-11021	153	20	as	as	ADP
can-11021	153	21	for	for	ADP
can-11021	153	22	hydrogenated	hydrogenated	ADJ
can-11021	153	23	films	film	NOUN
can-11021	153	24	,	,	PUNCT
can-11021	153	25	i.e.	i.e.	X
can-11021	153	26	,	,	PUNCT
can-11021	153	27	2.1	2.1	NUM
can-11021	153	28	ev	ev	NOUN
can-11021	153	29	,	,	PUNCT
can-11021	153	30	and	and	CCONJ
can-11021	153	31	that	that	SCONJ
can-11021	153	32	for	for	ADP
can-11021	153	33	them	they	PRON
can-11021	153	34	equation	equation	NOUN
can-11021	153	35	(	(	PUNCT
can-11021	153	36	4	4	X
can-11021	153	37	)	)	PUNCT
can-11021	153	38	is	be	AUX
can-11021	153	39	fulfilled	fulfil	VERB
can-11021	153	40	,	,	PUNCT
can-11021	153	41	then	then	ADV
can-11021	153	42	the	the	DET
can-11021	153	43	coefficient	coefficient	NOUN
can-11021	153	44	of	of	ADP
can-11021	153	45	such	such	DET
can-11021	153	46	an	an	DET
can-11021	153	47	anticorrelation	anticorrelation	NOUN
can-11021	153	48	is	be	AUX
can-11021	153	49	co	co	ADJ
can-11021	153	50	=	=	NOUN
can-11021	153	51	3.0	3.0	NUM
can-11021	153	52	.	.	PUNCT
can-11021	154	1	if	if	SCONJ
can-11021	154	2	we	we	PRON
can-11021	154	3	accept	accept	VERB
can-11021	154	4	this	this	DET
can-11021	154	5	coefficient	coefficient	NOUN
can-11021	154	6	for	for	ADP
can-11021	154	7	the	the	DET
can-11021	154	8	films	film	NOUN
can-11021	154	9	obtained	obtain	VERB
can-11021	154	10	by	by	ADP
can-11021	154	11	annealing	anneal	VERB
can-11021	154	12	sio1.3	sio1.3	PROPN
can-11021	154	13	films	film	NOUN
can-11021	154	14	at	at	ADP
can-11021	154	15	600	600	NUM
can-11021	154	16	°	°	NOUN
can-11021	154	17	c−910	c−910	NOUN
can-11021	154	18	°	°	ADP
can-11021	154	19	c	c	NOUN
can-11021	154	20	,	,	PUNCT
can-11021	154	21	we	we	PRON
can-11021	154	22	obtain	obtain	VERB
can-11021	154	23	an	an	DET
can-11021	154	24	estimate	estimate	NOUN
can-11021	154	25	of	of	ADP
can-11021	154	26	the	the	DET
can-11021	154	27	mobility	mobility	NOUN
can-11021	154	28	gap	gap	NOUN
can-11021	154	29	еg	еg	PROPN
can-11021	155	1	≈	≈	PROPN
can-11021	155	2	2.61−2.98	2.61−2.98	PROPN
can-11021	155	3	ev	ev	PROPN
can-11021	155	4	.	.	PUNCT
can-11021	156	1	in	in	ADP
can-11021	156	2	[	[	X
can-11021	156	3	43	43	NUM
can-11021	156	4	]	]	PUNCT
can-11021	156	5	,	,	PUNCT
can-11021	156	6	the	the	DET
can-11021	156	7	values	value	NOUN
can-11021	156	8	of	of	ADP
can-11021	156	9	eo	eo	PROPN
can-11021	156	10	were	be	AUX
can-11021	156	11	determined	determine	VERB
can-11021	156	12	for	for	ADP
can-11021	156	13	non	non	ADJ
can-11021	156	14	-	-	ADJ
can-11021	156	15	hydrogenated	hydrogenated	ADJ
can-11021	156	16	a	a	DET
can-11021	156	17	-	-	PUNCT
can-11021	156	18	si	si	NOUN
can-11021	156	19	nanoparticles	nanoparticle	NOUN
can-11021	156	20	(	(	PUNCT
can-11021	156	21	nanodots	nanodot	NOUN
can-11021	156	22	)	)	PUNCT
can-11021	156	23	in	in	ADP
can-11021	156	24	a	a	DET
can-11021	156	25	solution	solution	NOUN
can-11021	156	26	of	of	ADP
can-11021	156	27	highly	highly	ADV
can-11021	156	28	purified	purify	VERB
can-11021	156	29	ethanol	ethanol	NOUN
can-11021	156	30	.	.	PUNCT
can-11021	157	1	unfortunately	unfortunately	ADV
can-11021	157	2	,	,	PUNCT
can-11021	157	3	the	the	DET
can-11021	157	4	authors	author	NOUN
can-11021	157	5	did	do	AUX
can-11021	157	6	not	not	PART
can-11021	157	7	determine	determine	VERB
can-11021	157	8	the	the	DET
can-11021	157	9	value	value	NOUN
can-11021	157	10	of	of	ADP
can-11021	157	11	еu	еu	PRON
can-11021	157	12	in	in	ADP
can-11021	157	13	their	their	PRON
can-11021	157	14	samples	sample	NOUN
can-11021	157	15	.	.	PUNCT
can-11021	158	1	therefore	therefore	ADV
can-11021	158	2	,	,	PUNCT
can-11021	158	3	the	the	DET
can-11021	158	4	obtained	obtain	VERB
can-11021	158	5	values	value	NOUN
can-11021	158	6	of	of	ADP
can-11021	158	7	the	the	DET
can-11021	158	8	optical	optical	ADJ
can-11021	158	9	band	band	NOUN
can-11021	158	10	gap	gap	NOUN
can-11021	158	11	eo	eo	NOUN
can-11021	158	12	,	,	PUNCT
can-11021	158	13	which	which	PRON
can-11021	158	14	increased	increase	VERB
can-11021	158	15	from	from	ADP
can-11021	158	16	2.58	2.58	NUM
can-11021	158	17	ev	ev	NOUN
can-11021	158	18	for	for	ADP
can-11021	158	19	particles	particle	NOUN
can-11021	158	20	with	with	ADP
can-11021	158	21	an	an	DET
can-11021	158	22	average	average	ADJ
can-11021	158	23	diameter	diameter	NOUN
can-11021	158	24	of	of	ADP
can-11021	158	25	5.15	5.15	NUM
can-11021	158	26	nm	nm	NOUN
can-11021	158	27	to	to	ADP
can-11021	158	28	3.22	3.22	NUM
can-11021	158	29	ev	ev	INTJ
can-11021	158	30	for	for	ADP
can-11021	158	31	particles	particle	NOUN
can-11021	158	32	with	with	ADP
can-11021	158	33	an	an	DET
can-11021	158	34	average	average	ADJ
can-11021	158	35	diameter	diameter	NOUN
can-11021	158	36	of	of	ADP
can-11021	158	37	1.15	1.15	NUM
can-11021	158	38	nm	nm	NOUN
can-11021	158	39	,	,	PUNCT
can-11021	158	40	are	be	AUX
can-11021	158	41	lower	low	ADJ
can-11021	158	42	estimates	estimate	NOUN
can-11021	158	43	of	of	ADP
can-11021	158	44	eg	eg	NOUN
can-11021	158	45	.	.	PUNCT
can-11021	159	1	as	as	SCONJ
can-11021	159	2	can	can	AUX
can-11021	159	3	be	be	AUX
can-11021	159	4	seen	see	VERB
can-11021	159	5	,	,	PUNCT
can-11021	159	6	these	these	DET
can-11021	159	7	estimates	estimate	NOUN
can-11021	159	8	of	of	ADP
can-11021	159	9	eg	eg	NOUN
can-11021	159	10	for	for	ADP
can-11021	159	11	nanoparticles	nanoparticle	NOUN
can-11021	159	12	in	in	ADP
can-11021	159	13	ethanol	ethanol	NOUN
can-11021	159	14	are	be	AUX
can-11021	159	15	still	still	ADV
can-11021	159	16	in	in	ADP
can-11021	159	17	better	well	ADJ
can-11021	159	18	agreement	agreement	NOUN
can-11021	159	19	with	with	ADP
can-11021	159	20	the	the	DET
can-11021	159	21	estimates	estimate	NOUN
can-11021	159	22	of	of	ADP
can-11021	159	23	eg	eg	NOUN
can-11021	159	24	for	for	ADP
can-11021	159	25	nanoparticles	nanoparticle	NOUN
can-11021	159	26	in	in	ADP
can-11021	159	27	our	our	PRON
can-11021	159	28	suboxide	suboxide	ADJ
can-11021	159	29	matrix	matrix	NOUN
can-11021	159	30	at	at	ADP
can-11021	159	31	a	a	DET
can-11021	159	32	value	value	NOUN
can-11021	159	33	of	of	ADP
can-11021	159	34	the	the	DET
can-11021	159	35	coefficient	coefficient	NOUN
can-11021	159	36	co	co	NOUN
can-11021	159	37	=	=	NOUN
can-11021	159	38	3.0	3.0	NUM
can-11021	159	39	in	in	ADP
can-11021	159	40	equation	equation	NOUN
can-11021	159	41	(	(	PUNCT
can-11021	159	42	4	4	NUM
can-11021	159	43	)	)	PUNCT
can-11021	159	44	,	,	PUNCT
can-11021	159	45	which	which	PRON
can-11021	159	46	is	be	AUX
can-11021	159	47	not	not	PART
can-11021	159	48	surprising	surprising	ADJ
can-11021	159	49	.	.	PUNCT
can-11021	160	1	the	the	DET
can-11021	160	2	application	application	NOUN
can-11021	160	3	of	of	ADP
can-11021	160	4	annealing	anneal	VERB
can-11021	160	5	at	at	ADP
can-11021	160	6	1010	1010	NUM
can-11021	160	7	°	°	ADP
can-11021	160	8	c	c	NOUN
can-11021	160	9	in	in	ADP
can-11021	160	10	comparison	comparison	NOUN
can-11021	160	11	to	to	ADP
can-11021	160	12	annealing	anneal	VERB
can-11021	160	13	at	at	ADP
can-11021	160	14	910	910	NUM
can-11021	160	15	°	°	NOUN
can-11021	160	16	c	c	NOUN
can-11021	160	17	has	have	AUX
can-11021	160	18	been	be	AUX
can-11021	160	19	observed	observe	VERB
can-11021	160	20	to	to	PART
can-11021	160	21	result	result	VERB
can-11021	160	22	in	in	ADP
can-11021	160	23	an	an	DET
can-11021	160	24	increase	increase	NOUN
can-11021	160	25	in	in	ADP
can-11021	160	26	e04	e04	NOUN
can-11021	160	27	and	and	CCONJ
can-11021	160	28	eo	eo	INTJ
can-11021	160	29	,	,	PUNCT
can-11021	160	30	while	while	SCONJ
can-11021	160	31	eu	eu	PROPN
can-11021	160	32	exhibited	exhibit	VERB
can-11021	160	33	a	a	DET
can-11021	160	34	decrease	decrease	NOUN
can-11021	160	35	from	from	ADP
can-11021	160	36	0.24	0.24	NUM
can-11021	160	37	to	to	ADP
can-11021	160	38	0.22	0.22	NUM
can-11021	160	39	ev	ev	NOUN
can-11021	160	40	.	.	PROPN
can-11021	161	1	in	in	ADP
can-11021	161	2	works	work	NOUN
can-11021	161	3	[	[	X
can-11021	161	4	44,45	44,45	X
can-11021	161	5	]	]	X
can-11021	161	6	the	the	DET
can-11021	161	7	nucleation	nucleation	NOUN
can-11021	161	8	of	of	ADP
can-11021	161	9	crystalline	crystalline	ADJ
can-11021	161	10	inclusions	inclusion	NOUN
can-11021	161	11	in	in	ADP
can-11021	161	12	amorphous	amorphous	ADJ
can-11021	161	13	a	a	DET
can-11021	161	14	-	-	PUNCT
can-11021	161	15	si	si	NOUN
can-11021	161	16	:	:	PUNCT
can-11021	161	17	н	н	NOUN
can-11021	161	18	films	film	NOUN
can-11021	161	19	was	be	AUX
can-11021	161	20	studied	study	VERB
can-11021	161	21	using	use	VERB
can-11021	161	22	the	the	DET
can-11021	161	23	tauc	tauc	ADJ
can-11021	161	24	-	-	PUNCT
can-11021	161	25	lorentz	lorentz	NOUN
can-11021	161	26	parametric	parametric	PROPN
can-11021	161	27	model	model	NOUN
can-11021	161	28	.	.	PUNCT
can-11021	162	1	it	it	PRON
can-11021	162	2	was	be	AUX
can-11021	162	3	characterization	characterization	NOUN
can-11021	162	4	and	and	CCONJ
can-11021	162	5	application	application	NOUN
can-11021	162	6	of	of	ADP
can-11021	162	7	nanomaterials	nanomaterial	NOUN
can-11021	162	8	2025	2025	NUM
can-11021	162	9	,	,	PUNCT
can-11021	162	10	8(2	8(2	NUM
can-11021	162	11	)	)	PUNCT
can-11021	162	12	,	,	PUNCT
can-11021	162	13	11021	11021	NUM
can-11021	162	14	.	.	PUNCT
can-11021	163	1	9	9	NUM
can-11021	163	2	determined	determine	VERB
can-11021	163	3	that	that	SCONJ
can-11021	163	4	this	this	DET
can-11021	163	5	results	result	NOUN
can-11021	163	6	in	in	ADP
can-11021	163	7	an	an	DET
can-11021	163	8	increase	increase	NOUN
can-11021	163	9	in	in	ADP
can-11021	163	10	the	the	DET
can-11021	163	11	optical	optical	ADJ
can-11021	163	12	(	(	PUNCT
can-11021	163	13	tauc	tauc	NOUN
can-11021	163	14	)	)	PUNCT
can-11021	163	15	band	band	NOUN
can-11021	163	16	gap	gap	NOUN
can-11021	163	17	eo	eo	PROPN
can-11021	163	18	and	and	CCONJ
can-11021	163	19	a	a	DET
can-11021	163	20	decrease	decrease	NOUN
can-11021	163	21	in	in	ADP
can-11021	163	22	the	the	DET
can-11021	163	23	parameter	parameter	NOUN
can-11021	163	24	γ	γ	X
can-11021	163	25	(	(	PUNCT
can-11021	163	26	half	half	ADJ
can-11021	163	27	-	-	PUNCT
can-11021	163	28	width	width	NOUN
can-11021	163	29	of	of	ADP
can-11021	163	30	the	the	DET
can-11021	163	31	lorentz	lorentz	PROPN
can-11021	163	32	oscillator	oscillator	NOUN
can-11021	163	33	function	function	NOUN
can-11021	163	34	)	)	PUNCT
can-11021	163	35	,	,	PUNCT
can-11021	163	36	which	which	PRON
can-11021	163	37	serves	serve	VERB
can-11021	163	38	as	as	ADP
can-11021	163	39	a	a	DET
can-11021	163	40	measure	measure	NOUN
can-11021	163	41	of	of	ADP
can-11021	163	42	the	the	DET
can-11021	163	43	film	film	NOUN
can-11021	163	44	disorder	disorder	NOUN
can-11021	163	45	.	.	PUNCT
can-11021	164	1	these	these	DET
can-11021	164	2	results	result	NOUN
can-11021	164	3	provide	provide	VERB
can-11021	164	4	a	a	DET
can-11021	164	5	rationale	rationale	NOUN
can-11021	164	6	for	for	ADP
can-11021	164	7	associating	associate	VERB
can-11021	164	8	the	the	DET
can-11021	164	9	observed	observed	ADJ
can-11021	164	10	increase	increase	NOUN
can-11021	164	11	in	in	ADP
can-11021	164	12	eo	eo	PROPN
can-11021	164	13	and	and	CCONJ
can-11021	164	14	decrease	decrease	NOUN
can-11021	164	15	in	in	ADP
can-11021	164	16	eu	eu	PROPN
can-11021	164	17	following	follow	VERB
can-11021	164	18	annealing	anneal	VERB
can-11021	164	19	at	at	ADP
can-11021	164	20	1010	1010	NUM
can-11021	164	21	°	°	ADP
can-11021	164	22	c	c	NOUN
can-11021	164	23	with	with	ADP
can-11021	164	24	an	an	DET
can-11021	164	25	increase	increase	NOUN
can-11021	164	26	in	in	ADP
can-11021	164	27	the	the	DET
can-11021	164	28	ordering	ordering	NOUN
can-11021	164	29	of	of	ADP
can-11021	164	30	the	the	DET
can-11021	164	31	amorphous	amorphous	ADJ
can-11021	164	32	nanoparticles	nanoparticle	NOUN
can-11021	164	33	’	'	PUNCT
can-11021	164	34	structure	structure	NOUN
can-11021	164	35	,	,	PUNCT
can-11021	164	36	including	include	VERB
can-11021	164	37	the	the	DET
can-11021	164	38	formation	formation	NOUN
can-11021	164	39	of	of	ADP
can-11021	164	40	a	a	DET
can-11021	164	41	quasi	quasi	ADJ
can-11021	164	42	-	-	ADJ
can-11021	164	43	crystalline	crystalline	ADJ
can-11021	164	44	core	core	NOUN
can-11021	164	45	.	.	PUNCT
can-11021	165	1	annealing	anneal	VERB
can-11021	165	2	at	at	ADP
can-11021	165	3	1100	1100	NUM
can-11021	165	4	°	°	NOUN
can-11021	165	5	c	c	NOUN
can-11021	165	6	maintains	maintain	VERB
can-11021	165	7	the	the	DET
can-11021	165	8	tendency	tendency	NOUN
can-11021	165	9	of	of	ADP
can-11021	165	10	increasing	increase	VERB
can-11021	165	11	e04	e04	NOUN
can-11021	165	12	,	,	PUNCT
can-11021	165	13	eo	eo	PROPN
can-11021	165	14	.	.	PUNCT
can-11021	166	1	the	the	DET
can-11021	166	2	value	value	NOUN
can-11021	166	3	of	of	ADP
can-11021	166	4	eo	eo	PROPN
can-11021	166	5	=	=	PROPN
can-11021	166	6	2.11	2.11	NUM
can-11021	166	7	ev	ev	NOUN
can-11021	166	8	is	be	AUX
can-11021	166	9	very	very	ADV
can-11021	166	10	close	close	ADJ
can-11021	166	11	to	to	ADP
can-11021	166	12	the	the	DET
can-11021	166	13	value	value	NOUN
can-11021	166	14	of	of	ADP
can-11021	166	15	eo	eo	PROPN
can-11021	166	16	=	=	PROPN
can-11021	166	17	2.1	2.1	NUM
can-11021	166	18	ev	ev	INTJ
can-11021	166	19	for	for	ADP
can-11021	166	20	the	the	DET
can-11021	166	21	sio1.3	sio1.3	PROPN
can-11021	166	22	film	film	NOUN
can-11021	166	23	obtained	obtain	VERB
can-11021	166	24	by	by	ADP
can-11021	166	25	molecular	molecular	ADJ
can-11021	166	26	beam	beam	NOUN
can-11021	166	27	deposition	deposition	NOUN
can-11021	166	28	after	after	ADP
can-11021	166	29	its	its	PRON
can-11021	166	30	annealing	annealing	NOUN
can-11021	166	31	at	at	ADP
can-11021	166	32	1100	1100	NUM
can-11021	166	33	°	°	SYM
can-11021	166	34	c	c	NOUN
can-11021	166	35	[	[	X
can-11021	166	36	46	46	NUM
can-11021	166	37	]	]	PUNCT
can-11021	166	38	.	.	PUNCT
can-11021	167	1	after	after	ADP
can-11021	167	2	such	such	ADJ
can-11021	167	3	annealing	annealing	NOUN
can-11021	167	4	,	,	PUNCT
can-11021	167	5	the	the	DET
can-11021	167	6	film	film	NOUN
can-11021	167	7	contains	contain	VERB
can-11021	167	8	both	both	PRON
can-11021	167	9	crystalline	crystalline	ADJ
can-11021	167	10	and	and	CCONJ
can-11021	167	11	amorphous	amorphous	ADJ
can-11021	167	12	nanoparticles	nanoparticle	NOUN
can-11021	167	13	,	,	PUNCT
can-11021	167	14	and	and	CCONJ
can-11021	167	15	eo	eo	PROPN
can-11021	167	16	should	should	AUX
can-11021	167	17	be	be	AUX
can-11021	167	18	considered	consider	VERB
can-11021	167	19	as	as	ADP
can-11021	167	20	the	the	DET
can-11021	167	21	effective	effective	ADJ
can-11021	167	22	(	(	PUNCT
can-11021	167	23	averaged	averaged	ADJ
can-11021	167	24	)	)	PUNCT
can-11021	167	25	optical	optical	ADJ
can-11021	167	26	band	band	NOUN
can-11021	167	27	gap	gap	NOUN
can-11021	167	28	.	.	PUNCT
can-11021	168	1	following	follow	VERB
can-11021	168	2	annealing	anneal	VERB
can-11021	168	3	at	at	ADP
can-11021	168	4	1100	1100	NUM
can-11021	168	5	°	°	SYM
can-11021	168	6	c	c	NOUN
can-11021	168	7	,	,	PUNCT
can-11021	168	8	a	a	DET
can-11021	168	9	pronounced	pronounced	ADJ
can-11021	168	10	increase	increase	NOUN
can-11021	168	11	in	in	ADP
can-11021	168	12	eu	eu	PROPN
can-11021	168	13	for	for	ADP
can-11021	168	14	our	our	PRON
can-11021	168	15	film	film	NOUN
can-11021	168	16	is	be	AUX
can-11021	168	17	observed	observe	VERB
can-11021	168	18	,	,	PUNCT
can-11021	168	19	which	which	PRON
can-11021	168	20	is	be	AUX
can-11021	168	21	indicative	indicative	ADJ
can-11021	168	22	of	of	ADP
can-11021	168	23	the	the	DET
can-11021	168	24	presence	presence	NOUN
can-11021	168	25	of	of	ADP
can-11021	168	26	silicon	silicon	NOUN
can-11021	168	27	nanoparticles	nanoparticle	NOUN
can-11021	168	28	exhibiting	exhibit	VERB
can-11021	168	29	diverse	diverse	ADJ
can-11021	168	30	structural	structural	ADJ
can-11021	168	31	and	and	CCONJ
can-11021	168	32	size	size	NOUN
can-11021	168	33	characteristics	characteristic	NOUN
can-11021	168	34	.	.	PUNCT
can-11021	169	1	in	in	ADP
can-11021	169	2	their	their	PRON
can-11021	169	3	investigation	investigation	NOUN
can-11021	169	4	of	of	ADP
can-11021	169	5	‘	'	PUNCT
can-11021	169	6	silicon	silicon	NOUN
can-11021	169	7	nanocrystallites	nanocrystallite	NOUN
can-11021	169	8	—	—	PUNCT
can-11021	169	9	sio2	sio2	PROPN
can-11021	169	10	’	'	PUNCT
can-11021	169	11	superlattices	superlattice	NOUN
can-11021	169	12	,	,	PUNCT
can-11021	169	13	the	the	DET
can-11021	169	14	authors	author	NOUN
can-11021	169	15	[	[	X
can-11021	169	16	41	41	NUM
can-11021	169	17	]	]	PUNCT
can-11021	169	18	identified	identify	VERB
can-11021	169	19	a	a	DET
can-11021	169	20	direct	direct	ADJ
can-11021	169	21	correlation	correlation	NOUN
can-11021	169	22	between	between	ADP
can-11021	169	23	the	the	DET
can-11021	169	24	concentration	concentration	NOUN
can-11021	169	25	of	of	ADP
can-11021	169	26	so	so	ADV
can-11021	169	27	-	-	PUNCT
can-11021	169	28	called	call	VERB
can-11021	169	29	pb	pb	ADP
can-11021	169	30	centers	center	NOUN
can-11021	169	31	—	—	PUNCT
can-11021	169	32	dangling	dangle	VERB
can-11021	169	33	bonds	bond	NOUN
can-11021	169	34	of	of	ADP
can-11021	169	35	silicon	silicon	NOUN
can-11021	169	36	atoms	atom	NOUN
can-11021	169	37	at	at	ADP
can-11021	169	38	the	the	DET
can-11021	169	39	si	si	PROPN
can-11021	169	40	/	/	SYM
can-11021	169	41	sio2	sio2	PROPN
can-11021	169	42	boundary	boundary	NOUN
can-11021	169	43	—	—	PUNCT
can-11021	169	44	and	and	CCONJ
can-11021	169	45	the	the	DET
can-11021	169	46	urbach	urbach	ADJ
can-11021	169	47	energy	energy	NOUN
can-11021	169	48	,	,	PUNCT
can-11021	169	49	eu	eu	PROPN
can-11021	169	50	.	.	PUNCT
can-11021	169	51	given	give	VERB
can-11021	169	52	that	that	SCONJ
can-11021	169	53	the	the	DET
can-11021	169	54	appearance	appearance	NOUN
can-11021	169	55	of	of	ADP
can-11021	169	56	pb	pb	ADP
can-11021	169	57	centers	center	NOUN
can-11021	169	58	was	be	AUX
can-11021	169	59	recorded	record	VERB
can-11021	169	60	following	follow	VERB
can-11021	169	61	annealing	anneal	VERB
can-11021	169	62	of	of	ADP
can-11021	169	63	the	the	DET
can-11021	169	64	films	film	NOUN
can-11021	169	65	with	with	ADP
can-11021	169	66	a	a	DET
can-11021	169	67	similar	similar	ADJ
can-11021	169	68	composition	composition	NOUN
can-11021	169	69	to	to	ADP
can-11021	169	70	ours	ours	PRON
can-11021	169	71	at	at	ADP
can-11021	169	72	1100	1100	NUM
can-11021	169	73	°	°	SYM
can-11021	169	74	c	c	NOUN
can-11021	169	75	[	[	X
can-11021	169	76	37	37	NUM
can-11021	169	77	]	]	PUNCT
can-11021	169	78	,	,	PUNCT
can-11021	169	79	it	it	PRON
can-11021	169	80	is	be	AUX
can-11021	169	81	reasonable	reasonable	ADJ
can-11021	169	82	to	to	PART
can-11021	169	83	conclude	conclude	VERB
can-11021	169	84	that	that	SCONJ
can-11021	169	85	the	the	DET
can-11021	169	86	formation	formation	NOUN
can-11021	169	87	of	of	ADP
can-11021	169	88	these	these	DET
can-11021	169	89	centers	center	NOUN
can-11021	169	90	also	also	ADV
can-11021	169	91	contributes	contribute	VERB
can-11021	169	92	to	to	ADP
can-11021	169	93	the	the	DET
can-11021	169	94	observed	observed	ADJ
can-11021	169	95	increase	increase	NOUN
can-11021	169	96	in	in	ADP
can-11021	169	97	еu	еu	PROPN
can-11021	169	98	.	.	PUNCT
can-11021	170	1	4	4	X
can-11021	170	2	.	.	X
can-11021	170	3	conclusion	conclusion	VERB
can-11021	170	4	non	non	ADJ
can-11021	170	5	-	-	ADJ
can-11021	170	6	stoichiometric	stoichiometric	ADJ
can-11021	170	7	siox	siox	NOUN
can-11021	170	8	(	(	PUNCT
can-11021	170	9	x	x	PROPN
can-11021	170	10	≈	≈	PROPN
can-11021	170	11	1.3	1.3	NUM
can-11021	170	12	)	)	PUNCT
can-11021	170	13	films	film	NOUN
can-11021	170	14	exhibit	exhibit	VERB
can-11021	170	15	significant	significant	ADJ
can-11021	170	16	variations	variation	NOUN
can-11021	170	17	in	in	ADP
can-11021	170	18	the	the	DET
can-11021	170	19	behavior	behavior	NOUN
can-11021	170	20	of	of	ADP
can-11021	170	21	the	the	DET
can-11021	170	22	fundamental	fundamental	ADJ
can-11021	170	23	absorption	absorption	NOUN
can-11021	170	24	edge	edge	NOUN
can-11021	170	25	as	as	ADP
can-11021	170	26	a	a	DET
can-11021	170	27	function	function	NOUN
can-11021	170	28	of	of	ADP
can-11021	170	29	the	the	DET
can-11021	170	30	annealing	anneal	VERB
can-11021	170	31	temperature	temperature	NOUN
can-11021	170	32	.	.	PUNCT
can-11021	171	1	at	at	ADP
can-11021	171	2	annealing	anneal	VERB
can-11021	171	3	temperatures	temperature	NOUN
can-11021	171	4	ta	ta	ADP
can-11021	171	5	≤	≤	NOUN
can-11021	171	6	500	500	NUM
can-11021	171	7	с	с	NOUN
can-11021	171	8	,	,	PUNCT
can-11021	171	9	a	a	DET
can-11021	171	10	short	short	ADJ
can-11021	171	11	-	-	PUNCT
can-11021	171	12	wavelength	wavelength	NOUN
can-11021	171	13	shift	shift	NOUN
can-11021	171	14	of	of	ADP
can-11021	171	15	the	the	DET
can-11021	171	16	absorption	absorption	NOUN
can-11021	171	17	edge	edge	NOUN
can-11021	171	18	occurs	occur	VERB
can-11021	171	19	,	,	PUNCT
can-11021	171	20	which	which	PRON
can-11021	171	21	is	be	AUX
can-11021	171	22	then	then	ADV
can-11021	171	23	replaced	replace	VERB
can-11021	171	24	by	by	ADP
can-11021	171	25	a	a	DET
can-11021	171	26	long	long	ADJ
can-11021	171	27	-	-	PUNCT
can-11021	171	28	wavelength	wavelength	NOUN
can-11021	171	29	shift	shift	NOUN
can-11021	171	30	in	in	ADP
can-11021	171	31	the	the	DET
can-11021	171	32	range	range	NOUN
can-11021	171	33	600	600	NUM
can-11021	171	34	с	с	NOUN
can-11021	171	35	≤	≤	NOUN
can-11021	171	36	ta	ta	ADP
can-11021	171	37	≤	≤	NUM
can-11021	171	38	900	900	NUM
can-11021	171	39	с	с	NOUN
can-11021	171	40	.	.	PUNCT
can-11021	172	1	the	the	DET
can-11021	172	2	short	short	ADJ
can-11021	172	3	-	-	PUNCT
can-11021	172	4	wavelength	wavelength	NOUN
can-11021	172	5	shift	shift	NOUN
can-11021	172	6	is	be	AUX
can-11021	172	7	accompanied	accompany	VERB
can-11021	172	8	by	by	ADP
can-11021	172	9	an	an	DET
can-11021	172	10	increase	increase	NOUN
can-11021	172	11	in	in	ADP
can-11021	172	12	the	the	DET
can-11021	172	13	optical	optical	ADJ
can-11021	172	14	band	band	NOUN
can-11021	172	15	gap	gap	NOUN
can-11021	172	16	eo	eo	PROPN
can-11021	172	17	and	and	CCONJ
can-11021	172	18	a	a	DET
can-11021	172	19	decrease	decrease	NOUN
can-11021	172	20	in	in	ADP
can-11021	172	21	the	the	DET
can-11021	172	22	urbach	urbach	PROPN
can-11021	172	23	energy	energy	NOUN
can-11021	172	24	eu	eu	PROPN
can-11021	172	25	,	,	PUNCT
can-11021	172	26	indicating	indicate	VERB
can-11021	172	27	structural	structural	ADJ
can-11021	172	28	ordering	ordering	NOUN
can-11021	172	29	of	of	ADP
can-11021	172	30	the	the	DET
can-11021	172	31	film	film	NOUN
can-11021	172	32	.	.	PUNCT
can-11021	173	1	in	in	ADP
can-11021	173	2	this	this	DET
can-11021	173	3	case	case	NOUN
can-11021	173	4	,	,	PUNCT
can-11021	173	5	defect	defect	ADJ
can-11021	173	6	annealing	annealing	NOUN
can-11021	173	7	,	,	PUNCT
can-11021	173	8	healing	healing	NOUN
can-11021	173	9	of	of	ADP
can-11021	173	10	broken	broken	ADJ
can-11021	173	11	silicon	silicon	NOUN
can-11021	173	12	and	and	CCONJ
can-11021	173	13	oxygen	oxygen	NOUN
can-11021	173	14	bonds	bond	NOUN
can-11021	173	15	,	,	PUNCT
can-11021	173	16	film	film	NOUN
can-11021	173	17	densification	densification	NOUN
can-11021	173	18	,	,	PUNCT
can-11021	173	19	and	and	CCONJ
can-11021	173	20	a	a	DET
can-11021	173	21	corresponding	corresponding	ADJ
can-11021	173	22	decrease	decrease	NOUN
can-11021	173	23	in	in	ADP
can-11021	173	24	defect	defect	ADJ
can-11021	173	25	absorption	absorption	NOUN
can-11021	173	26	take	take	VERB
can-11021	173	27	place	place	NOUN
can-11021	173	28	.	.	PUNCT
can-11021	174	1	the	the	DET
can-11021	174	2	long	long	ADJ
can-11021	174	3	-	-	PUNCT
can-11021	174	4	wavelength	wavelength	NOUN
can-11021	174	5	shift	shift	NOUN
can-11021	174	6	is	be	AUX
can-11021	174	7	due	due	ADJ
can-11021	174	8	to	to	PART
can-11021	174	9	film	film	VERB
can-11021	174	10	disproportionation	disproportionation	NOUN
can-11021	174	11	and	and	CCONJ
can-11021	174	12	the	the	DET
can-11021	174	13	formation	formation	NOUN
can-11021	174	14	of	of	ADP
can-11021	174	15	amorphous	amorphous	ADJ
can-11021	174	16	silicon	silicon	NOUN
can-11021	174	17	inclusions	inclusion	NOUN
can-11021	174	18	,	,	PUNCT
can-11021	174	19	which	which	PRON
can-11021	174	20	exhibit	exhibit	VERB
can-11021	174	21	significant	significant	ADJ
can-11021	174	22	indirect	indirect	ADJ
can-11021	174	23	interband	interband	NOUN
can-11021	174	24	absorption	absorption	NOUN
can-11021	174	25	.	.	PUNCT
can-11021	175	1	eo	eo	PROPN
can-11021	175	2	decreases	decrease	VERB
can-11021	175	3	with	with	ADP
can-11021	175	4	increasing	increase	VERB
can-11021	175	5	amorphous	amorphous	ADJ
can-11021	175	6	silicon	silicon	NOUN
can-11021	175	7	nanoparticle	nanoparticle	NOUN
can-11021	175	8	size	size	NOUN
can-11021	175	9	and	and	CCONJ
can-11021	175	10	their	their	PRON
can-11021	175	11	volume	volume	NOUN
can-11021	175	12	fraction	fraction	NOUN
can-11021	175	13	in	in	ADP
can-11021	175	14	the	the	DET
can-11021	175	15	annealed	annealed	ADJ
can-11021	175	16	film	film	NOUN
can-11021	175	17	,	,	PUNCT
can-11021	175	18	while	while	SCONJ
can-11021	175	19	eu	eu	PROPN
can-11021	175	20	remains	remain	VERB
can-11021	175	21	almost	almost	ADV
can-11021	175	22	unchanged	unchanged	ADJ
can-11021	175	23	.	.	PUNCT
can-11021	176	1	by	by	ADP
can-11021	176	2	further	far	ADV
can-11021	176	3	increasing	increase	VERB
can-11021	176	4	the	the	DET
can-11021	176	5	annealing	anneal	VERB
can-11021	176	6	temperature	temperature	NOUN
can-11021	176	7	of	of	ADP
can-11021	176	8	the	the	DET
can-11021	176	9	siox	siox	NOUN
can-11021	176	10	film	film	NOUN
can-11021	176	11	,	,	PUNCT
can-11021	176	12	the	the	DET
can-11021	176	13	absorption	absorption	NOUN
can-11021	176	14	edge	edge	NOUN
can-11021	176	15	shifts	shift	NOUN
can-11021	176	16	to	to	ADP
can-11021	176	17	shorter	short	ADJ
can-11021	176	18	wavelengths	wavelength	NOUN
can-11021	176	19	again	again	ADV
can-11021	176	20	,	,	PUNCT
can-11021	176	21	and	and	CCONJ
can-11021	176	22	both	both	DET
can-11021	176	23	eo	eo	PROPN
can-11021	176	24	and	and	CCONJ
can-11021	176	25	eu	eu	PROPN
can-11021	176	26	increase	increase	NOUN
can-11021	176	27	.	.	PUNCT
can-11021	177	1	the	the	DET
can-11021	177	2	increase	increase	NOUN
can-11021	177	3	in	in	ADP
can-11021	177	4	eo	eo	PROPN
can-11021	177	5	in	in	ADP
can-11021	177	6	this	this	DET
can-11021	177	7	case	case	NOUN
can-11021	177	8	is	be	AUX
can-11021	177	9	due	due	ADJ
can-11021	177	10	to	to	ADP
can-11021	177	11	the	the	DET
can-11021	177	12	increasing	increase	VERB
can-11021	177	13	fraction	fraction	NOUN
can-11021	177	14	of	of	ADP
can-11021	177	15	the	the	DET
can-11021	177	16	crystalline	crystalline	ADJ
can-11021	177	17	silicon	silicon	NOUN
can-11021	177	18	phase	phase	NOUN
can-11021	177	19	(	(	PUNCT
can-11021	177	20	c	c	NOUN
can-11021	177	21	-	-	PUNCT
can-11021	177	22	si	si	PROPN
can-11021	177	23	nanocrystals	nanocrystal	NOUN
can-11021	177	24	have	have	VERB
can-11021	177	25	a	a	DET
can-11021	177	26	larger	large	ADJ
can-11021	177	27	band	band	NOUN
can-11021	177	28	gap	gap	NOUN
can-11021	177	29	)	)	PUNCT
can-11021	177	30	and	and	CCONJ
can-11021	177	31	a	a	DET
can-11021	177	32	decrease	decrease	NOUN
can-11021	177	33	in	in	ADP
can-11021	177	34	the	the	DET
can-11021	177	35	fraction	fraction	NOUN
can-11021	177	36	of	of	ADP
can-11021	177	37	amorphous	amorphous	ADJ
can-11021	177	38	silicon	silicon	NOUN
can-11021	177	39	,	,	PUNCT
can-11021	177	40	while	while	SCONJ
can-11021	177	41	the	the	DET
can-11021	177	42	increase	increase	NOUN
can-11021	177	43	in	in	ADP
can-11021	177	44	eu	eu	PROPN
can-11021	177	45	is	be	AUX
can-11021	177	46	attributed	attribute	VERB
can-11021	177	47	to	to	ADP
can-11021	177	48	the	the	DET
can-11021	177	49	corresponding	corresponding	ADJ
can-11021	177	50	increase	increase	NOUN
can-11021	177	51	in	in	ADP
can-11021	177	52	the	the	DET
can-11021	177	53	area	area	NOUN
can-11021	177	54	of	of	ADP
can-11021	177	55	the	the	DET
can-11021	177	56	c	c	NOUN
can-11021	177	57	-	-	PUNCT
can-11021	177	58	si	si	ADJ
can-11021	177	59	/	/	SYM
can-11021	177	60	sio2	sio2	PROPN
can-11021	177	61	interface	interface	NOUN
can-11021	177	62	,	,	PUNCT
can-11021	177	63	where	where	SCONJ
can-11021	177	64	interface	interface	NOUN
can-11021	177	65	centers	center	NOUN
can-11021	177	66	(	(	PUNCT
can-11021	177	67	pb	pb	ADP
can-11021	177	68	centers	center	NOUN
can-11021	177	69	)	)	PUNCT
can-11021	177	70	form	form	NOUN
can-11021	177	71	.	.	PUNCT
can-11021	178	1	author	author	NOUN
can-11021	178	2	contributions	contribution	NOUN
can-11021	178	3	:	:	PUNCT
can-11021	178	4	conceptualization	conceptualization	NOUN
can-11021	178	5	,	,	PUNCT
can-11021	178	6	ms	ms	PROPN
can-11021	178	7	and	and	CCONJ
can-11021	178	8	ii	ii	PROPN
can-11021	178	9	;	;	PUNCT
can-11021	178	10	methodology	methodology	NOUN
can-11021	178	11	,	,	PUNCT
can-11021	178	12	ms	ms	PROPN
can-11021	178	13	,	,	PUNCT
can-11021	178	14	ii	ii	PROPN
can-11021	178	15	and	and	CCONJ
can-11021	178	16	vy	vy	ADP
can-11021	178	17	;	;	PUNCT
can-11021	178	18	validation	validation	NOUN
can-11021	178	19	,	,	PUNCT
can-11021	178	20	ii	ii	PROPN
can-11021	178	21	and	and	CCONJ
can-11021	178	22	km	km	PROPN
can-11021	178	23	;	;	PUNCT
can-11021	178	24	investigation	investigation	NOUN
can-11021	178	25	,	,	PUNCT
can-11021	178	26	ii	ii	PROPN
can-11021	178	27	,	,	PUNCT
can-11021	178	28	vy	vy	NOUN
can-11021	178	29	and	and	CCONJ
can-11021	178	30	ms	ms	PROPN
can-11021	178	31	;	;	PUNCT
can-11021	178	32	writing	writing	NOUN
can-11021	178	33	—	—	PUNCT
can-11021	178	34	original	original	ADJ
can-11021	178	35	draft	draft	NOUN
can-11021	178	36	preparation	preparation	NOUN
can-11021	178	37	,	,	PUNCT
can-11021	178	38	ms	ms	NOUN
can-11021	178	39	and	and	CCONJ
can-11021	178	40	km	km	PROPN
can-11021	178	41	;	;	PUNCT
can-11021	178	42	writing	writing	NOUN
can-11021	178	43	—	—	PUNCT
can-11021	178	44	review	review	NOUN
can-11021	178	45	and	and	CCONJ
can-11021	178	46	editing	editing	NOUN
can-11021	178	47	,	,	PUNCT
can-11021	178	48	ms	ms	PROPN
can-11021	178	49	,	,	PUNCT
can-11021	178	50	ii	ii	PROPN
can-11021	178	51	,	,	PUNCT
can-11021	178	52	km	km	PROPN
can-11021	178	53	and	and	CCONJ
can-11021	178	54	vy	vy	NOUN
can-11021	178	55	;	;	PUNCT
can-11021	178	56	characterization	characterization	NOUN
can-11021	178	57	and	and	CCONJ
can-11021	178	58	application	application	NOUN
can-11021	178	59	of	of	ADP
can-11021	178	60	nanomaterials	nanomaterial	NOUN
can-11021	178	61	2025	2025	NUM
can-11021	178	62	,	,	PUNCT
can-11021	178	63	8(2	8(2	NUM
can-11021	178	64	)	)	PUNCT
can-11021	178	65	,	,	PUNCT
can-11021	178	66	11021	11021	NUM
can-11021	178	67	.	.	PUNCT
can-11021	179	1	10	10	NUM
can-11021	179	2	visualization	visualization	NOUN
can-11021	179	3	,	,	PUNCT
can-11021	179	4	km	km	PROPN
can-11021	179	5	;	;	PUNCT
can-11021	179	6	supervision	supervision	NOUN
can-11021	179	7	,	,	PUNCT
can-11021	179	8	ii	ii	PROPN
can-11021	179	9	.	.	PUNCT
can-11021	180	1	all	all	DET
can-11021	180	2	authors	author	NOUN
can-11021	180	3	have	have	AUX
can-11021	180	4	read	read	VERB
can-11021	180	5	and	and	CCONJ
can-11021	180	6	agreed	agree	VERB
can-11021	180	7	to	to	ADP
can-11021	180	8	the	the	DET
can-11021	180	9	published	publish	VERB
can-11021	180	10	version	version	NOUN
can-11021	180	11	of	of	ADP
can-11021	180	12	the	the	DET
can-11021	180	13	manuscript	manuscript	NOUN
can-11021	180	14	.	.	PUNCT
can-11021	181	1	acknowledgments	acknowledgment	NOUN
can-11021	181	2	:	:	PUNCT
can-11021	181	3	the	the	DET
can-11021	181	4	authors	author	NOUN
can-11021	181	5	would	would	AUX
can-11021	181	6	like	like	VERB
can-11021	181	7	to	to	PART
can-11021	181	8	thank	thank	VERB
can-11021	181	9	jeffrey	jeffrey	PROPN
can-11021	181	10	monastyrsky	monastyrsky	PROPN
can-11021	181	11	(	(	PUNCT
can-11021	181	12	usa	usa	PROPN
can-11021	181	13	)	)	PUNCT
can-11021	181	14	for	for	ADP
can-11021	181	15	his	his	PRON
can-11021	181	16	help	help	NOUN
can-11021	181	17	with	with	ADP
can-11021	181	18	the	the	DET
can-11021	181	19	english	english	PROPN
can-11021	181	20	edition	edition	NOUN
can-11021	181	21	of	of	ADP
can-11021	181	22	this	this	DET
can-11021	181	23	article	article	NOUN
can-11021	181	24	.	.	PUNCT
can-11021	182	1	institutional	institutional	ADJ
can-11021	182	2	review	review	PROPN
can-11021	182	3	board	board	NOUN
can-11021	182	4	statement	statement	NOUN
can-11021	182	5	:	:	PUNCT
can-11021	182	6	not	not	PART
can-11021	182	7	applicable	applicable	ADJ
can-11021	182	8	.	.	PUNCT
can-11021	183	1	informed	informed	ADJ
can-11021	183	2	consent	consent	NOUN
can-11021	183	3	statement	statement	NOUN
can-11021	183	4	:	:	PUNCT
can-11021	183	5	not	not	PART
can-11021	183	6	applicable	applicable	ADJ
can-11021	183	7	.	.	PUNCT
can-11021	184	1	dedication	dedication	NOUN
can-11021	184	2	:	:	PUNCT
can-11021	184	3	this	this	DET
can-11021	184	4	article	article	NOUN
can-11021	184	5	is	be	AUX
can-11021	184	6	dedicated	dedicate	VERB
can-11021	184	7	to	to	ADP
can-11021	184	8	the	the	DET
can-11021	184	9	memory	memory	NOUN
can-11021	184	10	of	of	ADP
can-11021	184	11	our	our	PRON
can-11021	184	12	colleague	colleague	NOUN
can-11021	184	13	and	and	CCONJ
can-11021	184	14	friend	friend	NOUN
can-11021	184	15	,	,	PUNCT
can-11021	184	16	dr	dr	PROPN
can-11021	184	17	petro	petro	PROPN
can-11021	184	18	shepeliavyi	shepeliavyi	PROPN
can-11021	184	19	,	,	PUNCT
can-11021	184	20	who	who	PRON
can-11021	184	21	recently	recently	ADV
can-11021	184	22	passed	pass	VERB
can-11021	184	23	away	away	ADV
can-11021	184	24	.	.	PUNCT
can-11021	185	1	he	he	PRON
can-11021	185	2	was	be	AUX
can-11021	185	3	a	a	DET
can-11021	185	4	prolific	prolific	ADJ
can-11021	185	5	author	author	NOUN
can-11021	185	6	of	of	ADP
can-11021	185	7	many	many	ADJ
can-11021	185	8	sophisticated	sophisticated	ADJ
can-11021	185	9	technological	technological	ADJ
can-11021	185	10	developments	development	NOUN
can-11021	185	11	that	that	PRON
can-11021	185	12	significantly	significantly	ADV
can-11021	185	13	advanced	advance	VERB
can-11021	185	14	both	both	DET
can-11021	185	15	fundamental	fundamental	ADJ
can-11021	185	16	research	research	NOUN
can-11021	185	17	and	and	CCONJ
can-11021	185	18	the	the	DET
can-11021	185	19	creation	creation	NOUN
can-11021	185	20	of	of	ADP
can-11021	185	21	specific	specific	ADJ
can-11021	185	22	devices	device	NOUN
can-11021	185	23	.	.	PUNCT
can-11021	186	1	among	among	ADP
can-11021	186	2	his	his	PRON
can-11021	186	3	notable	notable	ADJ
can-11021	186	4	contributions	contribution	NOUN
can-11021	186	5	are	be	AUX
can-11021	186	6	developments	development	NOUN
can-11021	186	7	utilizing	utilize	VERB
can-11021	186	8	siox	siox	NOUN
can-11021	186	9	films	film	NOUN
can-11021	186	10	and	and	CCONJ
can-11021	186	11	structures	structure	NOUN
can-11021	186	12	based	base	VERB
can-11021	186	13	on	on	ADP
can-11021	186	14	them	they	PRON
can-11021	186	15	.	.	PUNCT
can-11021	187	1	these	these	PRON
can-11021	187	2	include	include	VERB
can-11021	187	3	the	the	DET
can-11021	187	4	development	development	NOUN
can-11021	187	5	of	of	ADP
can-11021	187	6	technologies	technology	NOUN
can-11021	187	7	for	for	ADP
can-11021	187	8	manufacturing	manufacture	VERB
can-11021	187	9	solid	solid	ADJ
can-11021	187	10	and	and	CCONJ
can-11021	187	11	porous	porous	ADJ
can-11021	187	12	light	light	ADJ
can-11021	187	13	-	-	PUNCT
can-11021	187	14	emitting	emit	VERB
can-11021	187	15	silicon	silicon	NOUN
can-11021	187	16	–	–	PUNCT
can-11021	187	17	silicon	silicon	NOUN
can-11021	187	18	oxide	oxide	NOUN
can-11021	187	19	nanocomposites	nanocomposite	NOUN
can-11021	187	20	,	,	PUNCT
can-11021	187	21	light	light	NOUN
can-11021	187	22	-	-	PUNCT
can-11021	187	23	sensitive	sensitive	ADJ
can-11021	187	24	sio	sio	PROPN
can-11021	187	25	-	-	PUNCT
can-11021	187	26	as2(s	as2(s	PROPN
can-11021	187	27	,	,	PUNCT
can-11021	187	28	se)3	se)3	PROPN
can-11021	187	29	nano	nano	NOUN
can-11021	187	30	multilayers	multilayer	NOUN
can-11021	187	31	,	,	PUNCT
can-11021	187	32	gradient	gradient	ADJ
can-11021	187	33	light	light	ADJ
can-11021	187	34	-	-	PUNCT
can-11021	187	35	absorbing	absorb	VERB
can-11021	187	36	siox	siox	NOUN
can-11021	187	37	/	/	SYM
can-11021	187	38	me	i	PRON
can-11021	187	39	coatings	coating	NOUN
can-11021	187	40	for	for	ADP
can-11021	187	41	display	display	NOUN
can-11021	187	42	panels	panel	NOUN
can-11021	187	43	,	,	PUNCT
can-11021	187	44	thin	thin	ADJ
can-11021	187	45	film	film	NOUN
can-11021	187	46	siox	siox	NOUN
can-11021	187	47	<	<	X
can-11021	187	48	ti	ti	X
can-11021	187	49	>	>	NOUN
can-11021	187	50	,	,	PUNCT
can-11021	187	51	siox	siox	PROPN
can-11021	187	52	<	<	X
can-11021	187	53	fe	fe	X
can-11021	187	54	>	>	X
can-11021	187	55	nanocomposites	nanocomposite	NOUN
can-11021	187	56	combining	combine	VERB
can-11021	187	57	functions	function	NOUN
can-11021	187	58	of	of	ADP
can-11021	187	59	ir	ir	NOUN
can-11021	187	60	-	-	NOUN
can-11021	187	61	absorption	absorption	NOUN
can-11021	187	62	and	and	CCONJ
can-11021	187	63	formation	formation	NOUN
can-11021	187	64	of	of	ADP
can-11021	187	65	an	an	DET
can-11021	187	66	electric	electric	ADJ
can-11021	187	67	signal	signal	NOUN
can-11021	187	68	for	for	ADP
can-11021	187	69	the	the	DET
can-11021	187	70	thermosensitive	thermosensitive	ADJ
can-11021	187	71	detectors	detector	NOUN
can-11021	187	72	operating	operate	VERB
can-11021	187	73	in	in	ADP
can-11021	187	74	γradiation	γradiation	NOUN
can-11021	187	75	fields	field	NOUN
can-11021	187	76	.	.	PUNCT
can-11021	188	1	conflict	conflict	NOUN
can-11021	188	2	of	of	ADP
can-11021	188	3	interest	interest	NOUN
can-11021	188	4	:	:	PUNCT
can-11021	188	5	the	the	DET
can-11021	188	6	authors	author	NOUN
can-11021	188	7	declare	declare	VERB
can-11021	188	8	no	no	DET
can-11021	188	9	conflict	conflict	NOUN
can-11021	188	10	of	of	ADP
can-11021	188	11	interest	interest	NOUN
can-11021	188	12	.	.	PUNCT
can-11021	189	1	references	reference	NOUN
can-11021	189	2	1	1	NUM
can-11021	189	3	.	.	PUNCT
can-11021	190	1	savage	savage	PROPN
can-11021	190	2	ja	ja	PROPN
can-11021	190	3	.	.	PUNCT
can-11021	190	4	infrared	infrared	ADJ
can-11021	190	5	optical	optical	ADJ
can-11021	190	6	materials	material	NOUN
can-11021	190	7	and	and	CCONJ
can-11021	190	8	their	their	PRON
can-11021	190	9	antireflection	antireflection	NOUN
can-11021	190	10	coatings	coating	NOUN
can-11021	190	11	.	.	PUNCT
can-11021	191	1	bristol	bristol	PROPN
can-11021	191	2	:	:	PUNCT
can-11021	191	3	adam	adam	PROPN
can-11021	191	4	higler	higler	PROPN
can-11021	191	5	ltd	ltd	PROPN
can-11021	191	6	;	;	PUNCT
can-11021	191	7	1985	1985	NUM
can-11021	191	8	.	.	PUNCT
can-11021	192	1	2	2	NUM
can-11021	192	2	.	.	NOUN
can-11021	192	3	wetch	wetch	PROPN
can-11021	192	4	kw	kw	PROPN
can-11021	192	5	.	.	PUNCT
can-11021	193	1	large	large	ADJ
can-11021	193	2	-	-	PUNCT
can-11021	193	3	range	range	NOUN
can-11021	193	4	refractive	refractive	ADJ
can-11021	193	5	-	-	PUNCT
can-11021	193	6	index	index	NOUN
can-11021	193	7	control	control	NOUN
can-11021	193	8	of	of	ADP
can-11021	193	9	silicon	silicon	NOUN
can-11021	193	10	monoxide	monoxide	NOUN
can-11021	193	11	antireflection	antireflection	NOUN
can-11021	193	12	coatings	coating	NOUN
can-11021	193	13	using	use	VERB
can-11021	193	14	oblique	oblique	ADJ
can-11021	193	15	incident	incident	NOUN
can-11021	193	16	thermal	thermal	ADJ
can-11021	193	17	evaporation	evaporation	NOUN
can-11021	193	18	.	.	PUNCT
can-11021	194	1	applied	apply	VERB
can-11021	194	2	optics	optic	NOUN
can-11021	194	3	.	.	PUNCT
can-11021	194	4	1991	1991	NUM
can-11021	194	5	;	;	PUNCT
can-11021	194	6	30(28	30(28	NUM
can-11021	194	7	):	):	PUNCT
can-11021	194	8	4133	4133	NUM
can-11021	194	9	.	.	PUNCT
can-11021	195	1	doi	doi	NOUN
can-11021	195	2	:	:	PUNCT
can-11021	195	3	10.1364	10.1364	NUM
can-11021	195	4	/	/	SYM
can-11021	195	5	ao.30.004133	ao.30.004133	NUM
can-11021	195	6	3	3	NUM
can-11021	195	7	.	.	X
can-11021	195	8	tomozeiu	tomozeiu	PROPN
can-11021	195	9	n.	n.	PROPN
can-11021	195	10	silicon	silicon	NOUN
can-11021	195	11	oxide	oxide	NOUN
can-11021	195	12	(	(	PUNCT
can-11021	195	13	siox	siox	NOUN
can-11021	195	14	,	,	PUNCT
can-11021	195	15	0	0	PUNCT
can-11021	195	16	<	<	X
can-11021	195	17	x	x	X
can-11021	195	18	<	<	X
can-11021	195	19	2	2	NUM
can-11021	195	20	):	):	PUNCT
can-11021	195	21	a	a	DET
can-11021	195	22	challenging	challenging	ADJ
can-11021	195	23	material	material	NOUN
can-11021	195	24	for	for	ADP
can-11021	195	25	optoelectronics	optoelectronic	NOUN
can-11021	195	26	.	.	PUNCT
can-11021	196	1	in	in	ADP
can-11021	196	2	:	:	PUNCT
can-11021	196	3	predeep	predeep	NOUN
can-11021	196	4	p	p	NOUN
can-11021	196	5	(	(	PUNCT
can-11021	196	6	editor	editor	NOUN
can-11021	196	7	)	)	PUNCT
can-11021	196	8	.	.	PUNCT
can-11021	197	1	optoelectronics	optoelectronic	NOUN
can-11021	197	2	:	:	PUNCT
can-11021	197	3	materials	material	NOUN
can-11021	197	4	and	and	CCONJ
can-11021	197	5	techniques	technique	NOUN
can-11021	197	6	.	.	PUNCT
can-11021	198	1	intechopen	intechopen	ADJ
can-11021	198	2	;	;	PUNCT
can-11021	198	3	2011	2011	NUM
can-11021	198	4	.	.	PUNCT
can-11021	199	1	pp	pp	ADV
can-11021	199	2	.	.	PUNCT
can-11021	200	1	55–98	55–98	NUM
can-11021	200	2	.	.	PUNCT
can-11021	201	1	4	4	X
can-11021	201	2	.	.	X
can-11021	201	3	melnik	melnik	PROPN
can-11021	201	4	vp	vp	PROPN
can-11021	201	5	,	,	PUNCT
can-11021	201	6	popov	popov	PROPN
can-11021	201	7	vg	vg	PROPN
can-11021	201	8	,	,	PUNCT
can-11021	201	9	romanyuk	romanyuk	PROPN
can-11021	201	10	bm	bm	PROPN
can-11021	201	11	,	,	PUNCT
can-11021	201	12	et	et	PROPN
can-11021	201	13	al	al	PROPN
can-11021	201	14	.	.	PROPN
can-11021	201	15	luminescent	luminescent	NOUN
can-11021	201	16	properties	property	NOUN
can-11021	201	17	of	of	ADP
can-11021	201	18	the	the	DET
can-11021	201	19	structures	structure	NOUN
can-11021	201	20	with	with	ADP
can-11021	201	21	embedded	embed	VERB
can-11021	201	22	silicon	silicon	NOUN
can-11021	201	23	nanoclusters	nanocluster	NOUN
can-11021	201	24	:	:	PUNCT
can-11021	201	25	influence	influence	NOUN
can-11021	201	26	of	of	ADP
can-11021	201	27	technology	technology	NOUN
can-11021	201	28	,	,	PUNCT
can-11021	201	29	doping	doping	NOUN
can-11021	201	30	and	and	CCONJ
can-11021	201	31	annealing	anneal	VERB
can-11021	201	32	(	(	PUNCT
can-11021	201	33	review	review	NOUN
can-11021	201	34	)	)	PUNCT
can-11021	201	35	.	.	PUNCT
can-11021	202	1	semiconductor	semiconductor	NOUN
can-11021	202	2	physics	physics	PROPN
can-11021	202	3	,	,	PUNCT
can-11021	202	4	quantum	quantum	ADJ
can-11021	202	5	electronics	electronic	NOUN
can-11021	202	6	&	&	CCONJ
can-11021	202	7	optoelectronics	optoelectronic	NOUN
can-11021	202	8	.	.	PUNCT
can-11021	203	1	2023	2023	NUM
can-11021	203	2	;	;	PUNCT
can-11021	203	3	26(3	26(3	NUM
can-11021	203	4	):	):	PUNCT
can-11021	203	5	278–302	278–302	NUM
can-11021	203	6	.	.	PUNCT
can-11021	203	7	doi	doi	NOUN
can-11021	203	8	:	:	PUNCT
can-11021	203	9	10.15407	10.15407	NUM
can-11021	203	10	/	/	SYM
can-11021	203	11	spqeo26.03.278	spqeo26.03.278	NOUN
can-11021	203	12	5	5	NUM
can-11021	203	13	.	.	PUNCT
can-11021	204	1	falcony	falcony	PROPN
can-11021	204	2	c	c	PROPN
can-11021	204	3	,	,	PUNCT
can-11021	204	4	estrada	estrada	PROPN
can-11021	204	5	-	-	PUNCT
can-11021	204	6	wiese	wiese	PROPN
can-11021	204	7	d	d	PROPN
can-11021	204	8	,	,	PUNCT
can-11021	204	9	de	de	PROPN
can-11021	204	10	anda	anda	PROPN
can-11021	204	11	j	j	PROPN
can-11021	204	12	,	,	PUNCT
can-11021	204	13	et	et	PROPN
can-11021	204	14	al	al	PROPN
can-11021	204	15	.	.	PUNCT
can-11021	204	16	low	low	ADJ
can-11021	204	17	temperature	temperature	NOUN
can-11021	204	18	(	(	PUNCT
can-11021	204	19	<	<	X
can-11021	204	20	700	700	NUM
can-11021	204	21	 	 	SPACE
can-11021	204	22	°	°	PROPN
can-11021	204	23	c	c	NOUN
can-11021	204	24	)	)	PUNCT
can-11021	204	25	sio2	sio2	NOUN
can-11021	204	26	and	and	CCONJ
can-11021	204	27	si	si	ADJ
can-11021	204	28	-	-	ADJ
can-11021	204	29	rich	rich	ADJ
can-11021	204	30	sio2	sio2	PROPN
can-11021	204	31	films	film	NOUN
can-11021	204	32	:	:	PUNCT
can-11021	204	33	short	short	ADJ
can-11021	204	34	review	review	NOUN
can-11021	204	35	.	.	PUNCT
can-11021	205	1	journal	journal	PROPN
can-11021	205	2	of	of	ADP
can-11021	205	3	vacuum	vacuum	PROPN
can-11021	205	4	science	science	PROPN
can-11021	205	5	&	&	CCONJ
can-11021	205	6	technology	technology	PROPN
can-11021	205	7	b.	b.	PROPN
can-11021	205	8	2023	2023	NUM
can-11021	205	9	;	;	PUNCT
can-11021	205	10	41(3	41(3	NUM
can-11021	205	11	)	)	PUNCT
can-11021	205	12	.	.	PUNCT
can-11021	206	1	doi	doi	NOUN
can-11021	206	2	:	:	PUNCT
can-11021	206	3	10.1116/6.0002531	10.1116/6.0002531	NUM
can-11021	206	4	6	6	NUM
can-11021	206	5	.	.	PUNCT
can-11021	207	1	sopinskyy	sopinskyy	PROPN
can-11021	207	2	mv	mv	PROPN
can-11021	207	3	,	,	PUNCT
can-11021	207	4	vlasenko	vlasenko	ADJ
can-11021	207	5	,	,	PUNCT
can-11021	207	6	na	na	ADP
can-11021	207	7	,	,	PUNCT
can-11021	207	8	lisovskyy	lisovskyy	NOUN
can-11021	207	9	ip	ip	PROPN
can-11021	207	10	,	,	PUNCT
can-11021	207	11	et	et	PROPN
can-11021	207	12	al	al	PROPN
can-11021	207	13	.	.	PUNCT
can-11021	207	14	formation	formation	NOUN
can-11021	207	15	of	of	ADP
can-11021	207	16	nanocomposites	nanocomposite	NOUN
can-11021	207	17	by	by	ADP
can-11021	207	18	oxidizing	oxidize	VERB
can-11021	207	19	annealing	annealing	NOUN
can-11021	207	20	of	of	ADP
can-11021	207	21	sio	sio	PROPN
can-11021	207	22	x	x	PUNCT
can-11021	207	23	and	and	CCONJ
can-11021	207	24	sio	sio	PROPN
can-11021	207	25	x	x	X
can-11021	207	26	<	<	X
can-11021	207	27	er	er	INTJ
can-11021	207	28	,	,	PUNCT
can-11021	207	29	f	f	X
can-11021	207	30	>	>	X
can-11021	207	31	films	film	NOUN
can-11021	207	32	:	:	PUNCT
can-11021	207	33	ellipsometry	ellipsometry	NOUN
can-11021	207	34	and	and	CCONJ
can-11021	207	35	ftir	ftir	VERB
can-11021	207	36	analysis	analysis	NOUN
can-11021	207	37	.	.	PUNCT
can-11021	208	1	nanoscale	nanoscale	NOUN
can-11021	208	2	research	research	NOUN
can-11021	208	3	letters	letter	NOUN
can-11021	208	4	.	.	PUNCT
can-11021	209	1	2015	2015	NUM
can-11021	209	2	;	;	PUNCT
can-11021	209	3	10(1	10(1	NUM
can-11021	209	4	)	)	PUNCT
can-11021	209	5	.	.	PUNCT
can-11021	210	1	doi	doi	NOUN
can-11021	210	2	:	:	PUNCT
can-11021	210	3	10.1186	10.1186	NUM
can-11021	210	4	/	/	SYM
can-11021	210	5	s11671	s11671	NOUN
can-11021	210	6	-	-	PUNCT
can-11021	210	7	015	015	NUM
can-11021	210	8	-	-	PUNCT
can-11021	210	9	0933	0933	NUM
can-11021	210	10	-	-	SYM
can-11021	210	11	0	0	NUM
can-11021	210	12	7	7	NUM
can-11021	210	13	.	.	PUNCT
can-11021	210	14	michailovska	michailovska	PROPN
can-11021	210	15	k	k	PROPN
can-11021	210	16	,	,	PUNCT
can-11021	210	17	indutnyi	indutnyi	PROPN
can-11021	210	18	i	i	PROPN
can-11021	210	19	,	,	PUNCT
can-11021	210	20	shepeliavyi	shepeliavyi	VERB
can-11021	210	21	p	p	X
can-11021	210	22	,	,	PUNCT
can-11021	210	23	et	et	PROPN
can-11021	210	24	al	al	PROPN
can-11021	210	25	.	.	PUNCT
can-11021	211	1	the	the	DET
can-11021	211	2	effect	effect	NOUN
can-11021	211	3	of	of	ADP
can-11021	211	4	fluorine	fluorine	NOUN
can-11021	211	5	–	–	PUNCT
can-11021	211	6	hydrogen	hydrogen	NOUN
can-11021	211	7	treatment	treatment	NOUN
can-11021	211	8	on	on	ADP
can-11021	211	9	the	the	DET
can-11021	211	10	photoluminescent	photoluminescent	NOUN
can-11021	211	11	properties	property	NOUN
can-11021	211	12	of	of	ADP
can-11021	211	13	multilayer	multilayer	NOUN
can-11021	211	14	(	(	PUNCT
can-11021	211	15	nc	nc	NOUN
can-11021	211	16	-	-	ADJ
can-11021	211	17	si	si	ADJ
can-11021	211	18	–	–	PUNCT
can-11021	211	19	siox	siox	NOUN
can-11021	211	20	–	–	PUNCT
can-11021	211	21	sioy)n	sioy)n	PROPN
can-11021	211	22	nanostructures	nanostructure	NOUN
can-11021	211	23	with	with	ADP
can-11021	211	24	porous	porous	ADJ
can-11021	211	25	barrier	barrier	NOUN
can-11021	211	26	layers	layer	NOUN
can-11021	211	27	.	.	PUNCT
can-11021	212	1	applied	apply	VERB
can-11021	212	2	nanoscience	nanoscience	NOUN
can-11021	212	3	.	.	PUNCT
can-11021	213	1	2020	2020	NUM
can-11021	213	2	;	;	PUNCT
can-11021	213	3	10(12	10(12	NUM
can-11021	213	4	):	):	PUNCT
can-11021	213	5	4695	4695	NUM
can-11021	213	6	-	-	SYM
can-11021	213	7	4701	4701	NUM
can-11021	213	8	.	.	PUNCT
can-11021	214	1	doi	doi	NOUN
can-11021	214	2	:	:	PUNCT
can-11021	214	3	10.1007	10.1007	NUM
can-11021	214	4	/	/	SYM
can-11021	214	5	s13204	s13204	NOUN
can-11021	214	6	-	-	PUNCT
can-11021	214	7	020	020	NUM
can-11021	214	8	-	-	PUNCT
can-11021	214	9	01404	01404	NUM
can-11021	214	10	-	-	PUNCT
can-11021	214	11	z	z	NOUN
can-11021	214	12	8	8	NUM
can-11021	214	13	.	.	PUNCT
can-11021	214	14	michailovska	michailovska	PROPN
can-11021	214	15	,	,	PUNCT
can-11021	214	16	kv	kv	PROPN
can-11021	214	17	,	,	PUNCT
can-11021	214	18	indutnyi	indutnyi	PROPN
can-11021	214	19	,	,	PUNCT
can-11021	214	20	iz	iz	INTJ
can-11021	214	21	,	,	PUNCT
can-11021	214	22	shepeliavyi	shepeliavyi	NOUN
can-11021	214	23	,	,	PUNCT
can-11021	214	24	pe	pe	PROPN
can-11021	214	25	,	,	PUNCT
can-11021	214	26	et	et	PROPN
can-11021	214	27	al	al	PROPN
can-11021	214	28	.	.	PUNCT
can-11021	215	1	formation	formation	NOUN
can-11021	215	2	of	of	ADP
can-11021	215	3	silicon	silicon	NOUN
can-11021	215	4	nanocomposites	nanocomposite	NOUN
can-11021	215	5	by	by	ADP
can-11021	215	6	annealing	anneal	VERB
can-11021	215	7	of	of	ADP
can-11021	215	8	(	(	PUNCT
can-11021	215	9	siox	siox	NOUN
can-11021	215	10	/	/	SYM
can-11021	215	11	sm)n	sm)n	PROPN
can-11021	215	12	multilayers	multilayer	NOUN
can-11021	215	13	:	:	PUNCT
can-11021	215	14	luminescence	luminescence	NOUN
can-11021	215	15	,	,	PUNCT
can-11021	215	16	raman	raman	NOUN
can-11021	215	17	and	and	CCONJ
can-11021	215	18	ftir	ftir	PROPN
can-11021	215	19	studies	study	NOUN
can-11021	215	20	.	.	PUNCT
can-11021	216	1	applied	apply	VERB
can-11021	216	2	nanoscience	nanoscience	NOUN
can-11021	216	3	.	.	PUNCT
can-11021	217	1	2023	2023	NUM
can-11021	217	2	;	;	PUNCT
can-11021	217	3	13(11	13(11	NUM
can-11021	217	4	):	):	PUNCT
can-11021	217	5	7187	7187	NUM
can-11021	217	6	-	-	SYM
can-11021	217	7	7194	7194	NUM
can-11021	217	8	.	.	PUNCT
can-11021	218	1	doi	doi	NOUN
can-11021	218	2	:	:	PUNCT
can-11021	218	3	10.1007	10.1007	NUM
can-11021	218	4	/	/	SYM
can-11021	218	5	s13204023	s13204023	NUM
can-11021	218	6	-	-	PUNCT
can-11021	218	7	02887	02887	NUM
can-11021	218	8	-	-	SYM
can-11021	218	9	2	2	NUM
can-11021	218	10	9	9	NUM
can-11021	218	11	.	.	PUNCT
can-11021	219	1	sarikov	sarikov	PROPN
can-11021	219	2	a.	a.	NOUN
can-11021	219	3	thermodynamic	thermodynamic	ADJ
can-11021	219	4	theory	theory	NOUN
can-11021	219	5	of	of	ADP
can-11021	219	6	phase	phase	NOUN
can-11021	219	7	separation	separation	NOUN
can-11021	219	8	in	in	ADP
can-11021	219	9	nonstoichiometric	nonstoichiometric	ADJ
can-11021	219	10	si	si	X
can-11021	219	11	oxide	oxide	NOUN
can-11021	219	12	films	film	NOUN
can-11021	219	13	induced	induce	VERB
can-11021	219	14	by	by	ADP
can-11021	219	15	high	high	ADJ
can-11021	219	16	-	-	PUNCT
can-11021	219	17	temperature	temperature	NOUN
can-11021	219	18	anneals	anneal	NOUN
can-11021	219	19	.	.	PUNCT
can-11021	220	1	nanomanufacturing	nanomanufacture	VERB
can-11021	220	2	.	.	PUNCT
can-11021	221	1	2023	2023	NUM
can-11021	221	2	;	;	PUNCT
can-11021	221	3	3(3	3(3	NUM
can-11021	221	4	):	):	PUNCT
can-11021	222	1	293–314	293–314	NUM
can-11021	222	2	.	.	PUNCT
can-11021	223	1	doi	doi	NOUN
can-11021	223	2	:	:	PUNCT
can-11021	223	3	10.3390	10.3390	NUM
can-11021	223	4	/	/	SYM
can-11021	223	5	nanomanufacturing3030019	nanomanufacturing3030019	PROPN
can-11021	223	6	10	10	NUM
can-11021	223	7	.	.	PUNCT
can-11021	224	1	nayfeh	nayfeh	PROPN
can-11021	224	2	mh	mh	PROPN
can-11021	224	3	.	.	PUNCT
can-11021	225	1	fundamentals	fundamental	NOUN
can-11021	225	2	and	and	CCONJ
can-11021	225	3	applications	application	NOUN
can-11021	225	4	of	of	ADP
can-11021	225	5	nano	nano	NOUN
can-11021	225	6	silicon	silicon	NOUN
can-11021	225	7	in	in	ADP
can-11021	225	8	plasmonics	plasmonic	NOUN
can-11021	225	9	and	and	CCONJ
can-11021	225	10	fullerines	fullerine	NOUN
can-11021	225	11	:	:	PUNCT
can-11021	225	12	current	current	ADJ
can-11021	225	13	and	and	CCONJ
can-11021	225	14	future	future	ADJ
can-11021	225	15	trends	trend	NOUN
can-11021	225	16	.	.	PUNCT
can-11021	226	1	elsevier	elsevier	PROPN
can-11021	226	2	publishing	publishing	PROPN
can-11021	226	3	,	,	PUNCT
can-11021	226	4	cambridge	cambridge	PROPN
can-11021	226	5	,	,	PUNCT
can-11021	226	6	ma	ma	PROPN
can-11021	226	7	;	;	PUNCT
can-11021	226	8	2018	2018	NUM
can-11021	226	9	.	.	PUNCT
can-11021	227	1	11	11	NUM
can-11021	227	2	.	.	X
can-11021	228	1	khriachtchev	khriachtchev	PROPN
can-11021	228	2	l.	l.	PROPN
can-11021	228	3	silicon	silicon	PROPN
can-11021	228	4	nanophotonics	nanophotonics	PROPN
can-11021	228	5	:	:	PUNCT
can-11021	228	6	basic	basic	ADJ
can-11021	228	7	principles	principle	NOUN
can-11021	228	8	,	,	PUNCT
can-11021	228	9	present	present	ADJ
can-11021	228	10	status	status	NOUN
can-11021	228	11	,	,	PUNCT
can-11021	228	12	and	and	CCONJ
can-11021	228	13	perspectives	perspective	NOUN
can-11021	228	14	.	.	PUNCT
can-11021	229	1	pan	pan	PROPN
can-11021	229	2	stanford	stanford	PROPN
can-11021	229	3	publishing	publishing	PROPN
can-11021	229	4	;	;	PUNCT
can-11021	229	5	2016	2016	NUM
can-11021	229	6	.	.	PUNCT
can-11021	230	1	12	12	NUM
can-11021	230	2	.	.	PUNCT
can-11021	231	1	yuan	yuan	PROPN
can-11021	231	2	z	z	X
can-11021	231	3	,	,	PUNCT
can-11021	231	4	anopchenko	anopchenko	PROPN
can-11021	231	5	a	a	PRON
can-11021	231	6	,	,	PUNCT
can-11021	231	7	pavesi	pavesi	PROPN
can-11021	231	8	l.	l.	PROPN
can-11021	231	9	innovative	innovative	ADJ
can-11021	231	10	quantum	quantum	NOUN
can-11021	231	11	effects	effect	NOUN
can-11021	231	12	in	in	ADP
can-11021	231	13	silicon	silicon	NOUN
can-11021	231	14	for	for	ADP
can-11021	231	15	photovoltaic	photovoltaic	NOUN
can-11021	231	16	applications	application	NOUN
can-11021	231	17	.	.	PUNCT
can-11021	232	1	in	in	ADP
can-11021	232	2	:	:	PUNCT
can-11021	232	3	pizzini	pizzini	PROPN
can-11021	232	4	s	s	X
can-11021	232	5	(	(	PUNCT
can-11021	232	6	editor	editor	NOUN
can-11021	232	7	)	)	PUNCT
can-11021	232	8	.	.	PUNCT
can-11021	233	1	advanced	advanced	ADJ
can-11021	233	2	silicon	silicon	NOUN
can-11021	233	3	materials	material	NOUN
can-11021	233	4	for	for	ADP
can-11021	233	5	photovoltaic	photovoltaic	NOUN
can-11021	233	6	applications	application	NOUN
can-11021	233	7	.	.	PUNCT
can-11021	234	1	john	john	PROPN
can-11021	234	2	wiley	wiley	PROPN
can-11021	234	3	&	&	CCONJ
can-11021	234	4	sons	son	NOUN
can-11021	234	5	;	;	PUNCT
can-11021	234	6	2012	2012	NUM
can-11021	234	7	.	.	PUNCT
can-11021	235	1	pp	pp	X
can-11021	235	2	.	.	PUNCT
can-11021	236	1	355–391	355–391	NUM
can-11021	236	2	.	.	PUNCT
can-11021	237	1	doi	doi	NOUN
can-11021	237	2	:	:	PUNCT
can-11021	237	3	10.1002/9781118312193.ch10	10.1002/9781118312193.ch10	NUM
can-11021	237	4	characterization	characterization	NOUN
can-11021	237	5	and	and	CCONJ
can-11021	237	6	application	application	NOUN
can-11021	237	7	of	of	ADP
can-11021	237	8	nanomaterials	nanomaterial	NOUN
can-11021	237	9	2025	2025	NUM
can-11021	237	10	,	,	PUNCT
can-11021	237	11	8(2	8(2	NUM
can-11021	237	12	)	)	PUNCT
can-11021	237	13	,	,	PUNCT
can-11021	237	14	11021	11021	NUM
can-11021	237	15	.	.	PUNCT
can-11021	238	1	11	11	NUM
can-11021	238	2	13	13	NUM
can-11021	238	3	.	.	PUNCT
can-11021	239	1	sopinskyy	sopinskyy	PROPN
can-11021	239	2	m	m	PROPN
can-11021	239	3	,	,	PUNCT
can-11021	239	4	khomchenko	khomchenko	PROPN
can-11021	239	5	v.	v.	ADP
can-11021	239	6	electroluminescence	electroluminescence	NOUN
can-11021	239	7	in	in	ADP
can-11021	239	8	siox	siox	NOUN
can-11021	239	9	films	film	NOUN
can-11021	239	10	and	and	CCONJ
can-11021	239	11	siox	siox	NOUN
can-11021	239	12	film	film	NOUN
can-11021	239	13	-	-	PUNCT
can-11021	239	14	based	base	VERB
can-11021	239	15	systems	system	NOUN
can-11021	239	16	.	.	PUNCT
can-11021	240	1	curr	curr	PROPN
can-11021	240	2	opin	opin	PROPN
can-11021	240	3	solid	solid	ADJ
can-11021	240	4	state	state	NOUN
can-11021	240	5	mater	mater	NOUN
can-11021	240	6	sci	sci	PROPN
can-11021	240	7	.	.	PROPN
can-11021	240	8	2003	2003	NUM
can-11021	240	9	;	;	PUNCT
can-11021	240	10	7(2	7(2	NUM
can-11021	240	11	):	):	PUNCT
can-11021	241	1	97–109	97–109	NUM
can-11021	241	2	.	.	PUNCT
can-11021	241	3	doi	doi	NOUN
can-11021	241	4	:	:	PUNCT
can-11021	241	5	10.1016	10.1016	NUM
can-11021	241	6	/	/	SYM
can-11021	241	7	s1359	s1359	NUM
can-11021	241	8	-	-	PUNCT
can-11021	241	9	0286(03)00048	0286(03)00048	NOUN
can-11021	241	10	-	-	PUNCT
can-11021	241	11	2	2	NUM
can-11021	241	12	14	14	NUM
can-11021	241	13	.	.	PUNCT
can-11021	242	1	bratus	bratus	NOUN
can-11021	242	2	’	'	PUNCT
can-11021	242	3	ol	ol	ADJ
can-11021	242	4	,	,	PUNCT
can-11021	242	5	evtukh	evtukh	NOUN
can-11021	242	6	aa	aa	NOUN
can-11021	242	7	,	,	PUNCT
can-11021	242	8	ievtukh	ievtukh	VERB
can-11021	242	9	a	a	PRON
can-11021	242	10	,	,	PUNCT
can-11021	242	11	et	et	PROPN
can-11021	242	12	al	al	PROPN
can-11021	242	13	.	.	PROPN
can-11021	242	14	nanocomposite	nanocomposite	PROPN
can-11021	242	15	sio2(si	sio2(si	PROPN
can-11021	242	16	)	)	PUNCT
can-11021	242	17	films	film	NOUN
can-11021	242	18	as	as	ADP
can-11021	242	19	a	a	DET
can-11021	242	20	medium	medium	NOUN
can-11021	242	21	for	for	ADP
can-11021	242	22	non	non	ADJ
can-11021	242	23	-	-	ADJ
can-11021	242	24	volatile	volatile	ADJ
can-11021	242	25	memory	memory	NOUN
can-11021	242	26	.	.	PUNCT
can-11021	243	1	journal	journal	PROPN
can-11021	243	2	of	of	ADP
can-11021	243	3	non	non	ADJ
can-11021	243	4	-	-	ADJ
can-11021	243	5	crystalline	crystalline	ADJ
can-11021	243	6	solids	solid	NOUN
can-11021	243	7	.	.	PUNCT
can-11021	243	8	2008	2008	NUM
can-11021	243	9	;	;	PUNCT
can-11021	243	10	354(35	354(35	NUM
can-11021	243	11	-	-	SYM
can-11021	243	12	39	39	NUM
can-11021	243	13	):	):	PUNCT
can-11021	243	14	4278	4278	NUM
can-11021	243	15	-	-	SYM
can-11021	243	16	4281	4281	NUM
can-11021	243	17	.	.	PUNCT
can-11021	244	1	doi	doi	NOUN
can-11021	244	2	:	:	PUNCT
can-11021	244	3	10.1016	10.1016	NUM
can-11021	244	4	/	/	SYM
can-11021	244	5	j.jnoncrysol.2008.06.037	j.jnoncrysol.2008.06.037	PROPN
can-11021	244	6	15	15	NUM
can-11021	244	7	.	.	PUNCT
can-11021	245	1	shieh	shieh	PROPN
can-11021	245	2	jm	jm	PROPN
can-11021	245	3	,	,	PUNCT
can-11021	245	4	lai	lai	PROPN
can-11021	245	5	yf	yf	PROPN
can-11021	245	6	,	,	PUNCT
can-11021	245	7	ni	ni	PROPN
can-11021	245	8	wx	wx	PROPN
can-11021	245	9	,	,	PUNCT
can-11021	245	10	et	et	PROPN
can-11021	245	11	al	al	PROPN
can-11021	245	12	.	.	PROPN
can-11021	245	13	enhanced	enhance	VERB
can-11021	245	14	photoresponse	photoresponse	NOUN
can-11021	245	15	of	of	ADP
can-11021	245	16	a	a	DET
can-11021	245	17	metal	metal	NOUN
can-11021	245	18	-	-	PUNCT
can-11021	245	19	oxide	oxide	NOUN
can-11021	245	20	semiconductor	semiconductor	NOUN
can-11021	245	21	photodetector	photodetector	NOUN
can-11021	245	22	with	with	ADP
can-11021	245	23	silicon	silicon	NOUN
can-11021	245	24	nanocrystals	nanocrystal	NOUN
can-11021	245	25	embedded	embed	VERB
can-11021	245	26	in	in	ADP
can-11021	245	27	the	the	DET
can-11021	245	28	oxide	oxide	NOUN
can-11021	245	29	layer	layer	NOUN
can-11021	245	30	.	.	PUNCT
can-11021	246	1	applied	apply	VERB
can-11021	246	2	physics	physics	NOUN
can-11021	246	3	letters	letter	NOUN
can-11021	246	4	.	.	PUNCT
can-11021	247	1	2007	2007	NUM
can-11021	247	2	;	;	PUNCT
can-11021	247	3	90(5	90(5	NUM
can-11021	247	4	)	)	PUNCT
can-11021	247	5	.	.	PUNCT
can-11021	248	1	doi	doi	NOUN
can-11021	248	2	:	:	PUNCT
can-11021	248	3	10.1063/1.2450653	10.1063/1.2450653	NUM
can-11021	248	4	16	16	NUM
can-11021	248	5	.	.	PUNCT
can-11021	249	1	evtukh	evtukh	PROPN
can-11021	249	2	aa	aa	PROPN
can-11021	249	3	,	,	PUNCT
can-11021	249	4	litovchenko	litovchenko	NOUN
can-11021	249	5	vg	vg	NOUN
can-11021	249	6	,	,	PUNCT
can-11021	249	7	semenenko	semenenko	NOUN
can-11021	249	8	mo	mo	PROPN
can-11021	249	9	.	.	PROPN
can-11021	249	10	electrical	electrical	ADJ
can-11021	249	11	and	and	CCONJ
can-11021	249	12	emission	emission	NOUN
can-11021	249	13	properties	property	NOUN
can-11021	249	14	of	of	ADP
can-11021	249	15	nanocomposite	nanocomposite	PROPN
can-11021	249	16	siox(si	siox(si	PROPN
can-11021	249	17	)	)	PUNCT
can-11021	249	18	and	and	CCONJ
can-11021	249	19	sio2(si	sio2(si	PROPN
can-11021	249	20	)	)	PUNCT
can-11021	249	21	films	film	NOUN
can-11021	249	22	.	.	PUNCT
can-11021	250	1	journal	journal	NOUN
can-11021	250	2	of	of	ADP
can-11021	250	3	vacuum	vacuum	PROPN
can-11021	250	4	science	science	PROPN
can-11021	250	5	&	&	CCONJ
can-11021	250	6	technology	technology	PROPN
can-11021	250	7	b	b	PROPN
can-11021	250	8	:	:	PUNCT
can-11021	250	9	microelectronics	microelectronic	NOUN
can-11021	250	10	and	and	CCONJ
can-11021	250	11	nanometer	nanometer	NOUN
can-11021	250	12	structures	structure	NOUN
can-11021	250	13	processing	processing	NOUN
can-11021	250	14	,	,	PUNCT
can-11021	250	15	measurement	measurement	NOUN
can-11021	250	16	,	,	PUNCT
can-11021	250	17	and	and	CCONJ
can-11021	250	18	phenomena	phenomenon	NOUN
can-11021	250	19	.	.	PUNCT
can-11021	251	1	2006	2006	NUM
can-11021	251	2	;	;	PUNCT
can-11021	251	3	24(2	24(2	NUM
can-11021	251	4	):	):	PUNCT
can-11021	251	5	945	945	NUM
can-11021	251	6	-	-	SYM
can-11021	251	7	949	949	NUM
can-11021	251	8	.	.	PUNCT
can-11021	252	1	doi	doi	NOUN
can-11021	252	2	:	:	PUNCT
can-11021	252	3	10.1116/1.2183787	10.1116/1.2183787	NUM
can-11021	252	4	17	17	NUM
can-11021	252	5	.	.	PUNCT
can-11021	253	1	yao	yao	PROPN
can-11021	253	2	j	j	PROPN
can-11021	253	3	,	,	PUNCT
can-11021	253	4	sun	sun	PROPN
can-11021	253	5	z	z	PROPN
can-11021	253	6	,	,	PUNCT
can-11021	253	7	zhong	zhong	PROPN
can-11021	253	8	l	l	PROPN
can-11021	253	9	,	,	PUNCT
can-11021	253	10	et	et	PROPN
can-11021	253	11	al	al	PROPN
can-11021	253	12	.	.	PROPN
can-11021	253	13	resistive	resistive	ADJ
can-11021	253	14	switches	switch	NOUN
can-11021	253	15	and	and	CCONJ
can-11021	253	16	memories	memory	NOUN
can-11021	253	17	from	from	ADP
can-11021	253	18	silicon	silicon	NOUN
can-11021	253	19	oxide	oxide	NOUN
can-11021	253	20	.	.	PUNCT
can-11021	254	1	nano	nano	NOUN
can-11021	254	2	letters	letter	NOUN
can-11021	254	3	.	.	PUNCT
can-11021	255	1	2010	2010	NUM
can-11021	255	2	;	;	PUNCT
can-11021	255	3	10(10	10(10	NUM
can-11021	255	4	):	):	PUNCT
can-11021	255	5	4105	4105	NUM
can-11021	255	6	-	-	SYM
can-11021	255	7	4110	4110	NUM
can-11021	255	8	.	.	PUNCT
can-11021	256	1	doi	doi	NOUN
can-11021	256	2	:	:	PUNCT
can-11021	256	3	10.1021	10.1021	NUM
can-11021	256	4	/	/	SYM
can-11021	256	5	nl102255r	nl102255r	PROPN
can-11021	256	6	18	18	NUM
can-11021	256	7	.	.	PUNCT
can-11021	257	1	mehonic	mehonic	ADJ
can-11021	257	2	a	a	PRON
can-11021	257	3	,	,	PUNCT
can-11021	257	4	shluger	shluger	PROPN
can-11021	257	5	al	al	PROPN
can-11021	257	6	,	,	PUNCT
can-11021	257	7	gao	gao	PROPN
can-11021	257	8	d	d	PROPN
can-11021	257	9	,	,	PUNCT
can-11021	257	10	et	et	PROPN
can-11021	257	11	al	al	PROPN
can-11021	257	12	.	.	PROPN
can-11021	257	13	silicon	silicon	PROPN
can-11021	257	14	oxide	oxide	NOUN
can-11021	257	15	(	(	PUNCT
can-11021	257	16	siox	siox	NOUN
can-11021	257	17	):	):	PUNCT
can-11021	257	18	a	a	DET
can-11021	257	19	promising	promising	ADJ
can-11021	257	20	material	material	NOUN
can-11021	257	21	for	for	ADP
can-11021	257	22	resistance	resistance	NOUN
can-11021	257	23	switching	switching	NOUN
can-11021	257	24	?	?	PUNCT
can-11021	258	1	advanced	advanced	ADJ
can-11021	258	2	materials	material	NOUN
can-11021	258	3	.	.	PUNCT
can-11021	258	4	2018	2018	NUM
can-11021	258	5	;	;	PUNCT
can-11021	258	6	30(43	30(43	NUM
can-11021	258	7	)	)	PUNCT
can-11021	258	8	.	.	PUNCT
can-11021	259	1	doi	doi	NOUN
can-11021	259	2	:	:	PUNCT
can-11021	259	3	10.1002	10.1002	NUM
can-11021	259	4	/	/	SYM
can-11021	259	5	adma.201801187	adma.201801187	PROPN
can-11021	259	6	19	19	NUM
can-11021	259	7	.	.	PUNCT
can-11021	260	1	chen	chen	PROPN
can-11021	260	2	w	w	PROPN
can-11021	260	3	,	,	PUNCT
can-11021	260	4	fang	fang	PROPN
can-11021	260	5	r	r	NOUN
can-11021	260	6	,	,	PUNCT
can-11021	260	7	balaban	balaban	NOUN
can-11021	260	8	mb	mb	NOUN
can-11021	260	9	,	,	PUNCT
can-11021	260	10	et	et	PROPN
can-11021	260	11	al	al	PROPN
can-11021	260	12	.	.	PUNCT
can-11021	261	1	a	a	DET
can-11021	261	2	cmos	cmos	ADJ
can-11021	261	3	-	-	PUNCT
can-11021	261	4	compatible	compatible	ADJ
can-11021	261	5	electronic	electronic	ADJ
can-11021	261	6	synapse	synapse	NOUN
can-11021	261	7	device	device	NOUN
can-11021	261	8	based	base	VERB
can-11021	261	9	on	on	ADP
can-11021	261	10	cu	cu	PROPN
can-11021	261	11	/	/	SYM
can-11021	261	12	sio2	sio2	PROPN
can-11021	261	13	/	/	SYM
can-11021	261	14	w	w	PROPN
can-11021	261	15	programmable	programmable	ADJ
can-11021	261	16	metallization	metallization	NOUN
can-11021	261	17	cells	cell	NOUN
can-11021	261	18	.	.	PUNCT
can-11021	262	1	nanotechnology	nanotechnology	PROPN
can-11021	262	2	.	.	PUNCT
can-11021	263	1	2016	2016	NUM
can-11021	263	2	;	;	PUNCT
can-11021	264	1	27(25	27(25	NUM
can-11021	264	2	):	):	PUNCT
can-11021	264	3	255202	255202	NUM
can-11021	264	4	.	.	PUNCT
can-11021	265	1	doi	doi	NOUN
can-11021	265	2	:	:	PUNCT
can-11021	265	3	10.1088/0957	10.1088/0957	NUM
can-11021	265	4	-	-	SYM
can-11021	265	5	4484/27/25/255202	4484/27/25/255202	PROPN
can-11021	265	6	20	20	NUM
can-11021	265	7	.	.	PUNCT
can-11021	266	1	ugwumadu	ugwumadu	PROPN
can-11021	266	2	c	c	PROPN
can-11021	266	3	,	,	PUNCT
can-11021	266	4	subedi	subedi	PROPN
can-11021	266	5	kn	kn	PROPN
can-11021	266	6	,	,	PUNCT
can-11021	266	7	thapa	thapa	PROPN
can-11021	266	8	r	r	PROPN
can-11021	266	9	,	,	PUNCT
can-11021	266	10	et	et	PROPN
can-11021	266	11	al	al	PROPN
can-11021	266	12	.	.	PROPN
can-11021	266	13	structure	structure	NOUN
can-11021	266	14	,	,	PUNCT
can-11021	266	15	vibrations	vibration	NOUN
can-11021	266	16	and	and	CCONJ
can-11021	266	17	electronic	electronic	ADJ
can-11021	266	18	transport	transport	NOUN
can-11021	266	19	in	in	ADP
can-11021	266	20	silicon	silicon	NOUN
can-11021	266	21	suboxides	suboxide	NOUN
can-11021	266	22	:	:	PUNCT
can-11021	266	23	application	application	NOUN
can-11021	266	24	to	to	ADP
can-11021	266	25	physical	physical	ADJ
can-11021	266	26	unclonable	unclonable	ADJ
can-11021	266	27	functions	function	NOUN
can-11021	266	28	.	.	PUNCT
can-11021	267	1	journal	journal	PROPN
can-11021	267	2	of	of	ADP
can-11021	267	3	non	non	ADJ
can-11021	267	4	-	-	ADJ
can-11021	267	5	crystalline	crystalline	ADJ
can-11021	267	6	solids	solid	NOUN
can-11021	267	7	:	:	PUNCT
can-11021	267	8	x.	x.	NOUN
can-11021	267	9	2023	2023	NUM
can-11021	267	10	;	;	PUNCT
can-11021	267	11	18	18	NUM
can-11021	267	12	:	:	SYM
can-11021	267	13	100179	100179	NUM
can-11021	267	14	.	.	PUNCT
can-11021	268	1	doi	doi	NOUN
can-11021	268	2	:	:	PUNCT
can-11021	268	3	10.1016	10.1016	NUM
can-11021	268	4	/	/	SYM
can-11021	268	5	j.nocx.2023.100179	j.nocx.2023.100179	PROPN
can-11021	268	6	21	21	NUM
can-11021	268	7	.	.	PUNCT
can-11021	269	1	lisovskyy	lisovskyy	PROPN
can-11021	269	2	ip	ip	ADP
can-11021	269	3	,	,	PUNCT
can-11021	269	4	indutnyy	indutnyy	VERB
can-11021	269	5	iz	iz	INTJ
can-11021	269	6	,	,	PUNCT
can-11021	269	7	gnennyy	gnennyy	VERB
can-11021	269	8	bn	bn	PROPN
can-11021	269	9	,	,	PUNCT
can-11021	269	10	et	et	PROPN
can-11021	269	11	al	al	PROPN
can-11021	269	12	.	.	PROPN
can-11021	270	1	structural	structural	ADJ
can-11021	270	2	-	-	PUNCT
can-11021	270	3	phase	phase	NOUN
can-11021	270	4	transformations	transformation	NOUN
can-11021	270	5	in	in	ADP
can-11021	270	6	siox	siox	NOUN
can-11021	270	7	films	film	NOUN
can-11021	270	8	in	in	ADP
can-11021	270	9	the	the	DET
can-11021	270	10	course	course	NOUN
can-11021	270	11	of	of	ADP
can-11021	270	12	vacuum	vacuum	NOUN
can-11021	270	13	heat	heat	NOUN
can-11021	270	14	treatment	treatment	NOUN
can-11021	270	15	.	.	PUNCT
can-11021	271	1	semiconductors	semiconductor	NOUN
can-11021	271	2	.	.	PUNCT
can-11021	272	1	2003	2003	NUM
can-11021	272	2	;	;	PUNCT
can-11021	272	3	37(1	37(1	NUM
can-11021	272	4	):	):	PUNCT
can-11021	272	5	97–102	97–102	NUM
can-11021	272	6	.	.	PUNCT
can-11021	273	1	doi	doi	NOUN
can-11021	273	2	:	:	PUNCT
can-11021	273	3	org/10.1134/1.1538546	org/10.1134/1.1538546	PROPN
can-11021	273	4	22	22	NUM
can-11021	273	5	.	.	PUNCT
can-11021	274	1	zacharias	zacharias	PROPN
can-11021	274	2	m	m	PROPN
can-11021	274	3	,	,	PUNCT
can-11021	274	4	heitmann	heitmann	PROPN
can-11021	274	5	j	j	PROPN
can-11021	274	6	,	,	PUNCT
can-11021	274	7	scholz	scholz	NOUN
can-11021	274	8	r	r	NOUN
can-11021	274	9	,	,	PUNCT
can-11021	274	10	et	et	PROPN
can-11021	274	11	al	al	PROPN
can-11021	274	12	.	.	PROPN
can-11021	274	13	size	size	NOUN
can-11021	274	14	-	-	PUNCT
can-11021	274	15	controlled	control	VERB
can-11021	274	16	highly	highly	ADV
can-11021	274	17	luminescent	luminescent	ADJ
can-11021	274	18	silicon	silicon	NOUN
can-11021	274	19	nanocrystals	nanocrystal	NOUN
can-11021	274	20	:	:	PUNCT
can-11021	274	21	a	a	DET
can-11021	274	22	sio/	sio/	PROPN
can-11021	274	23	sio2	sio2	PROPN
can-11021	274	24	superlattice	superlattice	NOUN
can-11021	274	25	approach	approach	NOUN
can-11021	274	26	.	.	PUNCT
can-11021	275	1	applied	apply	VERB
can-11021	275	2	physics	physics	NOUN
can-11021	275	3	letters	letter	NOUN
can-11021	275	4	.	.	PUNCT
can-11021	276	1	2002	2002	NUM
can-11021	276	2	;	;	PUNCT
can-11021	276	3	80(4	80(4	NUM
can-11021	276	4	):	):	PUNCT
can-11021	276	5	661	661	NUM
can-11021	276	6	-	-	SYM
can-11021	276	7	663	663	NUM
can-11021	276	8	.	.	PUNCT
can-11021	277	1	doi	doi	NOUN
can-11021	277	2	:	:	PUNCT
can-11021	277	3	10.1063/1.1433906	10.1063/1.1433906	NUM
can-11021	277	4	23	23	NUM
can-11021	277	5	.	.	PUNCT
can-11021	278	1	szekeres	szekere	VERB
can-11021	278	2	a	a	PRON
can-11021	278	3	,	,	PUNCT
can-11021	278	4	nikolova	nikolova	PROPN
can-11021	278	5	t	t	PROPN
can-11021	278	6	,	,	PUNCT
can-11021	278	7	paneva	paneva	NOUN
can-11021	278	8	a	a	PRON
can-11021	278	9	,	,	PUNCT
can-11021	278	10	et	et	PROPN
can-11021	278	11	al	al	PROPN
can-11021	278	12	.	.	PROPN
can-11021	278	13	silicon	silicon	PROPN
can-11021	278	14	clusters	cluster	NOUN
can-11021	278	15	in	in	ADP
can-11021	278	16	silicon	silicon	NOUN
can-11021	278	17	monoxide	monoxide	NOUN
can-11021	278	18	films	film	NOUN
can-11021	278	19	.	.	PUNCT
can-11021	279	1	journal	journal	NOUN
can-11021	279	2	of	of	ADP
can-11021	279	3	optoelectronics	optoelectronic	NOUN
can-11021	279	4	and	and	CCONJ
can-11021	279	5	advanced	advanced	ADJ
can-11021	279	6	materials	material	NOUN
can-11021	279	7	.	.	PUNCT
can-11021	280	1	2005	2005	NUM
can-11021	280	2	;	;	PUNCT
can-11021	281	1	7(3	7(3	NUM
can-11021	281	2	):	):	PUNCT
can-11021	281	3	1383–1387	1383–1387	NUM
can-11021	281	4	.	.	PUNCT
can-11021	282	1	24	24	NUM
can-11021	282	2	.	.	PUNCT
can-11021	282	3	garrido	garrido	PROPN
can-11021	282	4	fernandez	fernandez	PROPN
can-11021	282	5	b	b	PROPN
can-11021	282	6	,	,	PUNCT
can-11021	282	7	lopez	lopez	PROPN
can-11021	282	8	m	m	PROPN
can-11021	282	9	,	,	PUNCT
can-11021	282	10	garcıa	garcıa	ADJ
can-11021	282	11	c	c	NOUN
can-11021	282	12	,	,	PUNCT
can-11021	282	13	et	et	PROPN
can-11021	282	14	al	al	PROPN
can-11021	282	15	.	.	PUNCT
can-11021	282	16	influence	influence	NOUN
can-11021	282	17	of	of	ADP
can-11021	282	18	average	average	ADJ
can-11021	282	19	size	size	NOUN
can-11021	282	20	and	and	CCONJ
can-11021	282	21	interface	interface	NOUN
can-11021	282	22	passivation	passivation	NOUN
can-11021	282	23	on	on	ADP
can-11021	282	24	the	the	DET
can-11021	282	25	spectral	spectral	ADJ
can-11021	282	26	emission	emission	NOUN
can-11021	282	27	of	of	ADP
can-11021	282	28	si	si	X
can-11021	282	29	nanocrystals	nanocrystal	NOUN
can-11021	282	30	embedded	embed	VERB
can-11021	282	31	in	in	ADP
can-11021	282	32	sio2	sio2	PROPN
can-11021	282	33	.	.	PUNCT
can-11021	283	1	journal	journal	PROPN
can-11021	283	2	of	of	ADP
can-11021	283	3	applied	applied	ADJ
can-11021	283	4	physics	physic	NOUN
can-11021	283	5	.	.	PUNCT
can-11021	284	1	2002	2002	NUM
can-11021	284	2	;	;	PUNCT
can-11021	284	3	91(2	91(2	NUM
can-11021	284	4	):	):	PUNCT
can-11021	284	5	798	798	NUM
can-11021	284	6	-	-	SYM
can-11021	284	7	807	807	NUM
can-11021	284	8	.	.	PUNCT
can-11021	285	1	doi	doi	NOUN
can-11021	285	2	:	:	PUNCT
can-11021	285	3	10.1063/1.1423768	10.1063/1.1423768	NUM
can-11021	285	4	25	25	NUM
can-11021	285	5	.	.	PUNCT
can-11021	286	1	sopinskii	sopinskii	PROPN
can-11021	286	2	nv	nv	PROPN
can-11021	286	3	,	,	PUNCT
can-11021	286	4	khomchenko	khomchenko	PROPN
can-11021	286	5	vs	vs	ADP
can-11021	286	6	,	,	PUNCT
can-11021	286	7	litvin	litvin	PROPN
can-11021	286	8	os	os	PROPN
can-11021	286	9	,	,	PUNCT
can-11021	286	10	et	et	PROPN
can-11021	286	11	al	al	PROPN
can-11021	286	12	.	.	PUNCT
can-11021	287	1	properties	property	NOUN
can-11021	287	2	of	of	ADP
can-11021	287	3	low	low	ADJ
can-11021	287	4	-	-	PUNCT
can-11021	287	5	refractive	refractive	ADJ
can-11021	287	6	-	-	PUNCT
can-11021	287	7	index	index	NOUN
can-11021	287	8	films	film	NOUN
can-11021	287	9	obtained	obtain	VERB
can-11021	287	10	by	by	ADP
can-11021	287	11	the	the	DET
can-11021	287	12	close	close	ADV
can-11021	287	13	-	-	PUNCT
can-11021	287	14	spaced	space	VERB
can-11021	287	15	vapor	vapor	NOUN
can-11021	287	16	transport	transport	NOUN
can-11021	287	17	technique	technique	NOUN
can-11021	287	18	under	under	ADP
can-11021	287	19	the	the	DET
can-11021	287	20	sublimation	sublimation	NOUN
can-11021	287	21	of	of	ADP
can-11021	287	22	graphite	graphite	NOUN
can-11021	287	23	in	in	ADP
can-11021	287	24	a	a	DET
can-11021	287	25	quasi	quasi	ADJ
can-11021	287	26	-	-	ADJ
can-11021	287	27	closed	closed	ADJ
can-11021	287	28	volume	volume	NOUN
can-11021	287	29	.	.	PUNCT
can-11021	288	1	technical	technical	ADJ
can-11021	288	2	physics	physics	PROPN
can-11021	288	3	.	.	PUNCT
can-11021	289	1	2011	2011	NUM
can-11021	289	2	;	;	PUNCT
can-11021	289	3	56(11	56(11	NUM
can-11021	289	4	):	):	PUNCT
can-11021	289	5	1665	1665	NUM
can-11021	289	6	-	-	SYM
can-11021	289	7	1669	1669	NUM
can-11021	289	8	.	.	PUNCT
can-11021	290	1	doi	doi	NOUN
can-11021	290	2	:	:	PUNCT
can-11021	290	3	10.1134	10.1134	NUM
can-11021	290	4	/	/	SYM
can-11021	290	5	s1063784211110259	s1063784211110259	PROPN
can-11021	290	6	26	26	NUM
can-11021	290	7	.	.	PUNCT
can-11021	291	1	nakamura	nakamura	PROPN
can-11021	291	2	m	m	PROPN
can-11021	291	3	,	,	PUNCT
can-11021	291	4	mochizuki	mochizuki	PROPN
can-11021	291	5	y	y	PROPN
can-11021	291	6	,	,	PUNCT
can-11021	291	7	usami	usami	PROPN
can-11021	291	8	k	k	PROPN
can-11021	291	9	,	,	PUNCT
can-11021	291	10	et	et	PROPN
can-11021	291	11	al	al	PROPN
can-11021	291	12	.	.	PROPN
can-11021	292	1	infrared	infrared	PROPN
can-11021	292	2	absorption	absorption	NOUN
can-11021	292	3	spectra	spectra	NOUN
can-11021	292	4	and	and	CCONJ
can-11021	292	5	compositions	composition	NOUN
can-11021	292	6	of	of	ADP
can-11021	292	7	evaporated	evaporate	VERB
can-11021	292	8	silicon	silicon	NOUN
can-11021	292	9	oxides	oxide	NOUN
can-11021	292	10	(	(	PUNCT
can-11021	292	11	siox	siox	NOUN
can-11021	292	12	)	)	PUNCT
can-11021	292	13	.	.	PUNCT
can-11021	293	1	sol	sol	PROPN
can-11021	293	2	st	st	PROPN
can-11021	293	3	commun	commun	PROPN
can-11021	293	4	.	.	PUNCT
can-11021	293	5	1984	1984	NUM
can-11021	293	6	;	;	PUNCT
can-11021	293	7	50(12	50(12	NUM
can-11021	293	8	):	):	PUNCT
can-11021	293	9	1079–1081	1079–1081	NUM
can-11021	293	10	.	.	PUNCT
can-11021	294	1	doi	doi	NOUN
can-11021	294	2	:	:	PUNCT
can-11021	294	3	10.1016/0038	10.1016/0038	NUM
can-11021	294	4	-	-	SYM
can-11021	294	5	1098(84)90292	1098(84)90292	NUM
can-11021	294	6	-	-	PUNCT
can-11021	294	7	8	8	NUM
can-11021	294	8	27	27	NUM
can-11021	294	9	.	.	PUNCT
can-11021	295	1	raciti	raciti	PROPN
can-11021	295	2	r	r	NOUN
can-11021	295	3	,	,	PUNCT
can-11021	295	4	bahariqushchi	bahariqushchi	ADJ
can-11021	295	5	r	r	NOUN
can-11021	295	6	,	,	PUNCT
can-11021	295	7	summonte	summonte	PROPN
can-11021	295	8	c	c	NOUN
can-11021	295	9	,	,	PUNCT
can-11021	295	10	et	et	PROPN
can-11021	295	11	al	al	PROPN
can-11021	295	12	.	.	PROPN
can-11021	295	13	optical	optical	ADJ
can-11021	295	14	bandgap	bandgap	NOUN
can-11021	295	15	of	of	ADP
can-11021	295	16	semiconductor	semiconductor	NOUN
can-11021	295	17	nanostructures	nanostructure	NOUN
can-11021	295	18	:	:	PUNCT
can-11021	295	19	methods	method	NOUN
can-11021	295	20	for	for	ADP
can-11021	295	21	experimental	experimental	ADJ
can-11021	295	22	data	datum	NOUN
can-11021	295	23	analysis	analysis	NOUN
can-11021	295	24	.	.	PUNCT
can-11021	296	1	journal	journal	NOUN
can-11021	296	2	of	of	ADP
can-11021	296	3	applied	applied	ADJ
can-11021	296	4	physics	physic	NOUN
can-11021	296	5	.	.	PUNCT
can-11021	297	1	2017	2017	NUM
can-11021	297	2	;	;	PUNCT
can-11021	297	3	121(23	121(23	NUM
can-11021	297	4	)	)	PUNCT
can-11021	297	5	.	.	PUNCT
can-11021	298	1	doi	doi	NOUN
can-11021	298	2	:	:	PUNCT
can-11021	298	3	10.1063/1.4986436	10.1063/1.4986436	NUM
can-11021	298	4	28	28	NUM
can-11021	298	5	.	.	PUNCT
can-11021	299	1	cody	cody	NOUN
can-11021	299	2	gd	gd	PROPN
can-11021	299	3	.	.	PUNCT
can-11021	300	1	urbach	urbach	ADJ
can-11021	300	2	edge	edge	NOUN
can-11021	300	3	of	of	ADP
can-11021	300	4	crystalline	crystalline	NOUN
can-11021	300	5	and	and	CCONJ
can-11021	300	6	amorphous	amorphous	ADJ
can-11021	300	7	silicon	silicon	NOUN
can-11021	300	8	:	:	PUNCT
can-11021	300	9	a	a	DET
can-11021	300	10	personal	personal	ADJ
can-11021	300	11	review	review	NOUN
can-11021	300	12	.	.	PUNCT
can-11021	301	1	j.	j.	PROPN
can-11021	301	2	non	non	PROPN
can-11021	301	3	-	-	PROPN
can-11021	301	4	cryst	cryst	NOUN
can-11021	301	5	.	.	PUNCT
can-11021	302	1	solids	solid	NOUN
can-11021	302	2	.	.	PUNCT
can-11021	302	3	1992	1992	NUM
can-11021	302	4	;	;	PUNCT
can-11021	302	5	141	141	NUM
can-11021	302	6	:	:	PUNCT
can-11021	302	7	3–15	3–15	PROPN
can-11021	302	8	.	.	PUNCT
can-11021	303	1	doi	doi	NOUN
can-11021	303	2	:	:	PUNCT
can-11021	303	3	10.1016	10.1016	NUM
can-11021	303	4	/	/	SYM
can-11021	303	5	s0022	s0022	NOUN
can-11021	303	6	-	-	PUNCT
can-11021	303	7	3093(05)80513	3093(05)80513	NUM
can-11021	303	8	-	-	PUNCT
can-11021	303	9	7	7	NUM
can-11021	303	10	29	29	NUM
can-11021	303	11	.	.	PUNCT
can-11021	304	1	o’leary	o’leary	PROPN
can-11021	304	2	sk	sk	PROPN
can-11021	304	3	,	,	PUNCT
can-11021	304	4	johnson	johnson	PROPN
can-11021	304	5	sr	sr	PROPN
can-11021	304	6	,	,	PUNCT
can-11021	304	7	lim	lim	PROPN
can-11021	304	8	pk	pk	PROPN
can-11021	304	9	.	.	PUNCT
can-11021	305	1	the	the	DET
can-11021	305	2	relationship	relationship	NOUN
can-11021	305	3	between	between	ADP
can-11021	305	4	the	the	DET
can-11021	305	5	distribution	distribution	NOUN
can-11021	305	6	of	of	ADP
can-11021	305	7	electronic	electronic	ADJ
can-11021	305	8	states	state	NOUN
can-11021	305	9	and	and	CCONJ
can-11021	305	10	the	the	DET
can-11021	305	11	optical	optical	ADJ
can-11021	305	12	absorption	absorption	NOUN
can-11021	305	13	spectrum	spectrum	NOUN
can-11021	305	14	of	of	ADP
can-11021	305	15	an	an	DET
can-11021	305	16	amorphous	amorphous	ADJ
can-11021	305	17	semiconductor	semiconductor	NOUN
can-11021	305	18	:	:	PUNCT
can-11021	305	19	an	an	DET
can-11021	305	20	empirical	empirical	ADJ
can-11021	305	21	analysis	analysis	NOUN
can-11021	305	22	.	.	PUNCT
can-11021	306	1	journal	journal	NOUN
can-11021	306	2	of	of	ADP
can-11021	306	3	applied	applied	ADJ
can-11021	306	4	physics	physic	NOUN
can-11021	306	5	.	.	PUNCT
can-11021	307	1	1997	1997	NUM
can-11021	307	2	;	;	PUNCT
can-11021	307	3	82(7	82(7	NUM
can-11021	307	4	):	):	PUNCT
can-11021	307	5	3334	3334	NUM
can-11021	307	6	-	-	SYM
can-11021	307	7	3340	3340	NUM
can-11021	307	8	.	.	PUNCT
can-11021	308	1	doi	doi	NOUN
can-11021	308	2	:	:	PUNCT
can-11021	308	3	10.1063/1.365643	10.1063/1.365643	NUM
can-11021	308	4	30	30	NUM
can-11021	308	5	.	.	PUNCT
can-11021	309	1	saito	saito	PROPN
can-11021	309	2	k	k	PROPN
can-11021	309	3	,	,	PUNCT
can-11021	309	4	ikushima	ikushima	PROPN
can-11021	309	5	aj	aj	PROPN
can-11021	309	6	.	.	PROPN
can-11021	309	7	absorption	absorption	NOUN
can-11021	309	8	edge	edge	NOUN
can-11021	309	9	in	in	ADP
can-11021	309	10	silica	silica	NOUN
can-11021	309	11	glass	glass	NOUN
can-11021	309	12	.	.	PUNCT
can-11021	310	1	physical	physical	PROPN
can-11021	310	2	review	review	PROPN
can-11021	310	3	b.	b.	PROPN
can-11021	310	4	2000	2000	NUM
can-11021	310	5	;	;	PUNCT
can-11021	310	6	62(13	62(13	NUM
can-11021	310	7	):	):	PUNCT
can-11021	310	8	8584	8584	NUM
can-11021	310	9	-	-	SYM
can-11021	310	10	8587	8587	NUM
can-11021	310	11	.	.	PUNCT
can-11021	311	1	doi	doi	NOUN
can-11021	311	2	:	:	PUNCT
can-11021	311	3	10.1103	10.1103	NUM
can-11021	311	4	/	/	SYM
can-11021	311	5	physrevb.62.8584	physrevb.62.8584	PROPN
can-11021	311	6	31	31	NUM
can-11021	311	7	.	.	PUNCT
can-11021	312	1	tauc	tauc	PROPN
can-11021	312	2	j	j	PROPN
can-11021	312	3	,	,	PUNCT
can-11021	312	4	grigorovici	grigorovici	VERB
can-11021	312	5	r	r	NOUN
can-11021	312	6	,	,	PUNCT
can-11021	312	7	vancu	vancu	ADJ
can-11021	312	8	a.	a.	NOUN
can-11021	312	9	optical	optical	ADJ
can-11021	312	10	properties	property	NOUN
can-11021	312	11	and	and	CCONJ
can-11021	312	12	electronic	electronic	ADJ
can-11021	312	13	structure	structure	NOUN
can-11021	312	14	of	of	ADP
can-11021	312	15	amorphous	amorphous	ADJ
can-11021	312	16	germanium	germanium	NOUN
can-11021	312	17	.	.	PUNCT
can-11021	313	1	phys	phy	NOUN
can-11021	313	2	.	.	PUNCT
can-11021	314	1	status	status	PROPN
can-11021	314	2	solidi	solidi	PROPN
can-11021	314	3	b.	b.	PROPN
can-11021	314	4	1966	1966	NUM
can-11021	314	5	;	;	PUNCT
can-11021	314	6	15(2	15(2	NUM
can-11021	314	7	):	):	PUNCT
can-11021	314	8	627–637	627–637	NUM
can-11021	314	9	.	.	PUNCT
can-11021	315	1	doi	doi	NOUN
can-11021	315	2	:	:	PUNCT
can-11021	315	3	10.1002	10.1002	NUM
can-11021	315	4	/	/	SYM
can-11021	315	5	pssb.19660150224	pssb.19660150224	PROPN
can-11021	315	6	32	32	NUM
can-11021	315	7	.	.	PUNCT
can-11021	316	1	freeman	freeman	PROPN
can-11021	316	2	ec	ec	PROPN
can-11021	316	3	,	,	PUNCT
can-11021	316	4	william	william	PROPN
can-11021	316	5	p.	p.	PROPN
can-11021	316	6	optical	optical	ADJ
can-11021	316	7	constants	constant	NOUN
can-11021	316	8	of	of	ADP
can-11021	316	9	rf	rf	NOUN
can-11021	316	10	sputtered	sputter	VERB
can-11021	316	11	hydrogenated	hydrogenate	VERB
can-11021	316	12	amorphous	amorphous	ADJ
can-11021	316	13	si	si	X
can-11021	316	14	.	.	PROPN
can-11021	316	15	physical	physical	PROPN
can-11021	316	16	review	review	PROPN
can-11021	316	17	b.	b.	PROPN
can-11021	316	18	1979	1979	NUM
can-11021	316	19	;	;	PUNCT
can-11021	316	20	20(2	20(2	NUM
can-11021	316	21	):	):	PUNCT
can-11021	316	22	716728	716728	NUM
can-11021	316	23	.	.	PUNCT
can-11021	317	1	doi	doi	NOUN
can-11021	317	2	:	:	PUNCT
can-11021	317	3	10.1103	10.1103	NUM
can-11021	317	4	/	/	SYM
can-11021	317	5	physrevb.20.716	physrevb.20.716	NUM
can-11021	317	6	33	33	NUM
can-11021	317	7	.	.	PUNCT
can-11021	318	1	persans	persans	PROPN
can-11021	318	2	pd	pd	PROPN
can-11021	318	3	,	,	PUNCT
can-11021	318	4	ruppert	ruppert	PROPN
can-11021	318	5	af	af	PROPN
can-11021	318	6	,	,	PUNCT
can-11021	318	7	chan	chan	PROPN
can-11021	318	8	ss	ss	PROPN
can-11021	318	9	,	,	PUNCT
can-11021	318	10	et	et	PROPN
can-11021	318	11	al	al	PROPN
can-11021	318	12	.	.	PROPN
can-11021	318	13	relationship	relationship	NOUN
can-11021	318	14	between	between	ADP
can-11021	318	15	bond	bond	NOUN
can-11021	318	16	angle	angle	NOUN
can-11021	318	17	disorder	disorder	NOUN
can-11021	318	18	and	and	CCONJ
can-11021	318	19	the	the	DET
can-11021	318	20	optical	optical	ADJ
can-11021	318	21	edge	edge	NOUN
can-11021	318	22	of	of	ADP
can-11021	318	23	a	a	DET
can-11021	318	24	-	-	PUNCT
can-11021	318	25	ge	ge	NOUN
can-11021	318	26	:	:	PUNCT
can-11021	318	27	h.	h.	PROPN
can-11021	318	28	solid	solid	PROPN
can-11021	318	29	state	state	PROPN
can-11021	318	30	commun	commun	PROPN
can-11021	318	31	.	.	PUNCT
can-11021	318	32	1984	1984	NUM
can-11021	318	33	;	;	PUNCT
can-11021	318	34	51(4	51(4	NUM
can-11021	318	35	):	):	PUNCT
can-11021	318	36	203–207	203–207	NOUN
can-11021	318	37	.	.	PUNCT
can-11021	319	1	doi	doi	NOUN
can-11021	319	2	:	:	PUNCT
can-11021	319	3	10.1016/0038	10.1016/0038	NUM
can-11021	319	4	-	-	NOUN
can-11021	319	5	1098(84)90996	1098(84)90996	NUM
can-11021	319	6	-	-	SYM
can-11021	319	7	7	7	NUM
can-11021	319	8	34	34	NUM
can-11021	319	9	.	.	PUNCT
can-11021	320	1	cody	cody	PROPN
can-11021	320	2	gd	gd	PROPN
can-11021	320	3	,	,	PUNCT
can-11021	320	4	tiedje	tiedje	PROPN
can-11021	320	5	t	t	PROPN
can-11021	320	6	,	,	PUNCT
can-11021	320	7	abeles	abele	NOUN
can-11021	320	8	b	b	PROPN
can-11021	320	9	,	,	PUNCT
can-11021	320	10	et	et	PROPN
can-11021	320	11	al	al	PROPN
can-11021	320	12	.	.	PROPN
can-11021	320	13	disorder	disorder	NOUN
can-11021	320	14	and	and	CCONJ
can-11021	320	15	the	the	DET
can-11021	320	16	optical	optical	ADJ
can-11021	320	17	-	-	PUNCT
can-11021	320	18	absorption	absorption	NOUN
can-11021	320	19	edge	edge	NOUN
can-11021	320	20	of	of	ADP
can-11021	320	21	hydrogenated	hydrogenate	VERB
can-11021	320	22	amorphous	amorphous	ADJ
can-11021	320	23	silicon	silicon	NOUN
can-11021	320	24	.	.	PUNCT
can-11021	321	1	physical	physical	ADJ
can-11021	321	2	review	review	NOUN
can-11021	321	3	letters	letter	NOUN
can-11021	321	4	.	.	PUNCT
can-11021	322	1	1981	1981	NUM
can-11021	322	2	;	;	PUNCT
can-11021	322	3	47(20	47(20	NUM
can-11021	322	4	):	):	PUNCT
can-11021	322	5	1480	1480	NUM
can-11021	322	6	-	-	SYM
can-11021	322	7	1483	1483	NUM
can-11021	322	8	.	.	PUNCT
can-11021	323	1	doi	doi	NOUN
can-11021	323	2	:	:	PUNCT
can-11021	323	3	10.1103	10.1103	NUM
can-11021	323	4	/	/	SYM
can-11021	323	5	physrevlett.47.1480	physrevlett.47.1480	PROPN
can-11021	323	6	35	35	NUM
can-11021	323	7	.	.	PUNCT
can-11021	324	1	grein	grein	PROPN
can-11021	324	2	ch	ch	PROPN
can-11021	324	3	,	,	PUNCT
can-11021	324	4	john	john	PROPN
can-11021	324	5	s.	s.	PROPN
can-11021	324	6	temperature	temperature	PROPN
can-11021	324	7	dependence	dependence	NOUN
can-11021	324	8	of	of	ADP
can-11021	324	9	the	the	DET
can-11021	324	10	urbach	urbach	ADJ
can-11021	324	11	optical	optical	ADJ
can-11021	324	12	absorption	absorption	NOUN
can-11021	324	13	edge	edge	NOUN
can-11021	324	14	:	:	PUNCT
can-11021	324	15	a	a	DET
can-11021	324	16	theory	theory	NOUN
can-11021	324	17	of	of	ADP
can-11021	324	18	multiple	multiple	ADJ
can-11021	324	19	phonon	phonon	NOUN
can-11021	324	20	absorption	absorption	NOUN
can-11021	324	21	and	and	CCONJ
can-11021	324	22	emission	emission	NOUN
can-11021	324	23	sidebands	sideband	NOUN
can-11021	324	24	.	.	PUNCT
can-11021	325	1	physical	physical	PROPN
can-11021	325	2	review	review	PROPN
can-11021	325	3	b.	b.	PROPN
can-11021	325	4	1989	1989	NUM
can-11021	325	5	;	;	PUNCT
can-11021	325	6	39(2	39(2	NUM
can-11021	325	7	):	):	PUNCT
can-11021	325	8	1140	1140	NUM
can-11021	325	9	-	-	SYM
can-11021	325	10	1151	1151	NUM
can-11021	325	11	.	.	PUNCT
can-11021	326	1	doi	doi	NOUN
can-11021	326	2	:	:	PUNCT
can-11021	326	3	10.1103	10.1103	NUM
can-11021	326	4	/	/	SYM
can-11021	326	5	physrevb.39.1140	physrevb.39.1140	ADJ
can-11021	326	6	characterization	characterization	NOUN
can-11021	326	7	and	and	CCONJ
can-11021	326	8	application	application	NOUN
can-11021	326	9	of	of	ADP
can-11021	326	10	nanomaterials	nanomaterial	NOUN
can-11021	326	11	2025	2025	NUM
can-11021	326	12	,	,	PUNCT
can-11021	326	13	8(2	8(2	NUM
can-11021	326	14	)	)	PUNCT
can-11021	326	15	,	,	PUNCT
can-11021	326	16	11021	11021	NUM
can-11021	326	17	.	.	PUNCT
can-11021	327	1	12	12	NUM
can-11021	327	2	36	36	NUM
can-11021	327	3	.	.	PUNCT
can-11021	328	1	bondi	bondi	PROPN
can-11021	328	2	rj	rj	PROPN
can-11021	328	3	,	,	PUNCT
can-11021	328	4	lee	lee	PROPN
can-11021	328	5	s	s	PROPN
can-11021	328	6	,	,	PUNCT
can-11021	328	7	hwang	hwang	PROPN
can-11021	328	8	gs	gs	PROPN
can-11021	328	9	.	.	PUNCT
can-11021	329	1	first	first	ADJ
can-11021	329	2	-	-	PUNCT
can-11021	329	3	principles	principle	NOUN
can-11021	329	4	study	study	NOUN
can-11021	329	5	of	of	ADP
can-11021	329	6	the	the	DET
can-11021	329	7	mechanical	mechanical	ADJ
can-11021	329	8	and	and	CCONJ
can-11021	329	9	optical	optical	ADJ
can-11021	329	10	properties	property	NOUN
can-11021	329	11	of	of	ADP
can-11021	329	12	amorphous	amorphous	ADJ
can-11021	329	13	hydrogenated	hydrogenate	VERB
can-11021	329	14	silicon	silicon	NOUN
can-11021	329	15	and	and	CCONJ
can-11021	329	16	silicon	silicon	NOUN
can-11021	329	17	-	-	PUNCT
can-11021	329	18	rich	rich	ADJ
can-11021	329	19	silicon	silicon	NOUN
can-11021	329	20	oxide	oxide	NOUN
can-11021	329	21	.	.	PUNCT
can-11021	330	1	physical	physical	PROPN
can-11021	330	2	review	review	PROPN
can-11021	330	3	b.	b.	PROPN
can-11021	330	4	2010	2010	NUM
can-11021	330	5	;	;	PUNCT
can-11021	330	6	81(19	81(19	NUM
can-11021	330	7	)	)	PUNCT
can-11021	330	8	.	.	PUNCT
can-11021	331	1	doi	doi	NOUN
can-11021	331	2	:	:	PUNCT
can-11021	331	3	10.1103	10.1103	NUM
can-11021	331	4	/	/	SYM
can-11021	331	5	physrevb.81.195207	physrevb.81.195207	NOUN
can-11021	331	6	37	37	NUM
can-11021	331	7	.	.	PUNCT
can-11021	332	1	bratus	bratus	PROPN
can-11021	332	2	’	'	PUNCT
can-11021	332	3	vy	vy	PROPN
can-11021	332	4	,	,	PUNCT
can-11021	332	5	yukhimchuk	yukhimchuk	PROPN
can-11021	332	6	va	va	PROPN
can-11021	332	7	,	,	PUNCT
can-11021	332	8	berezhinsky	berezhinsky	PROPN
can-11021	332	9	li	li	PROPN
can-11021	332	10	,	,	PUNCT
can-11021	332	11	et	et	PROPN
can-11021	332	12	al	al	PROPN
can-11021	332	13	.	.	PROPN
can-11021	333	1	structural	structural	ADJ
can-11021	333	2	transformations	transformation	NOUN
can-11021	333	3	and	and	CCONJ
can-11021	333	4	silicon	silicon	NOUN
can-11021	333	5	nanocrystallite	nanocrystallite	ADJ
can-11021	333	6	formation	formation	NOUN
can-11021	333	7	in	in	ADP
can-11021	333	8	siox	siox	NOUN
can-11021	333	9	films	film	NOUN
can-11021	333	10	.	.	PUNCT
can-11021	334	1	semiconductors	semiconductor	NOUN
can-11021	334	2	.	.	PUNCT
can-11021	335	1	2001	2001	NUM
can-11021	335	2	;	;	PUNCT
can-11021	335	3	35(7	35(7	NUM
can-11021	335	4	):	):	PUNCT
can-11021	335	5	821–826	821–826	NUM
can-11021	335	6	.	.	PUNCT
can-11021	336	1	doi	doi	NOUN
can-11021	336	2	:	:	PUNCT
can-11021	336	3	10.1134/1.1385719	10.1134/1.1385719	NUM
can-11021	336	4	38	38	NUM
can-11021	336	5	.	.	PUNCT
can-11021	337	1	nikolenko	nikolenko	NOUN
can-11021	337	2	as	as	ADP
can-11021	337	3	,	,	PUNCT
can-11021	337	4	sopinskyy	sopinskyy	PROPN
can-11021	337	5	mv	mv	PROPN
can-11021	337	6	,	,	PUNCT
can-11021	337	7	strelchuk	strelchuk	ADJ
can-11021	337	8	vv	vv	NOUN
can-11021	337	9	,	,	PUNCT
can-11021	337	10	et	et	PROPN
can-11021	337	11	al	al	PROPN
can-11021	337	12	.	.	PUNCT
can-11021	337	13	raman	raman	PROPN
can-11021	337	14	study	study	NOUN
can-11021	337	15	of	of	ADP
can-11021	337	16	si	si	PROPN
can-11021	337	17	nanoparticles	nanoparticle	NOUN
can-11021	337	18	formation	formation	VERB
can-11021	337	19	in	in	ADP
can-11021	337	20	the	the	DET
can-11021	337	21	annealed	annealed	ADJ
can-11021	337	22	siox	siox	NOUN
can-11021	337	23	and	and	CCONJ
can-11021	337	24	siox	siox	NOUN
can-11021	337	25	:	:	PUNCT
can-11021	337	26	er	er	INTJ
can-11021	337	27	,	,	PUNCT
can-11021	337	28	f	f	PROPN
can-11021	337	29	films	film	NOUN
can-11021	337	30	on	on	ADP
can-11021	337	31	sapphire	sapphire	NOUN
can-11021	337	32	substrate	substrate	NOUN
can-11021	337	33	.	.	PUNCT
can-11021	338	1	j	j	PROPN
can-11021	338	2	optoelectron	optoelectron	PROPN
can-11021	338	3	adv	adv	PROPN
can-11021	338	4	mater	mater	NOUN
can-11021	338	5	.	.	PUNCT
can-11021	338	6	2012	2012	NUM
can-11021	338	7	;	;	PUNCT
can-11021	338	8	14(1–2	14(1–2	NOUN
can-11021	338	9	):	):	PUNCT
can-11021	338	10	120–124	120–124	NUM
can-11021	338	11	.	.	PUNCT
can-11021	339	1	39	39	NUM
can-11021	339	2	.	.	PUNCT
can-11021	340	1	sarikov	sarikov	NOUN
can-11021	340	2	a.	a.	NOUN
can-11021	340	3	crystallization	crystallization	NOUN
can-11021	340	4	behaviour	behaviour	NOUN
can-11021	340	5	of	of	ADP
can-11021	340	6	amorphous	amorphous	ADJ
can-11021	340	7	si	si	X
can-11021	340	8	nanoinclusions	nanoinclusion	NOUN
can-11021	340	9	embedded	embed	VERB
can-11021	340	10	in	in	ADP
can-11021	340	11	silicon	silicon	NOUN
can-11021	340	12	oxide	oxide	NOUN
can-11021	340	13	matrix	matrix	NOUN
can-11021	340	14	.	.	PUNCT
can-11021	341	1	phys	phy	NOUN
can-11021	341	2	.	.	PUNCT
can-11021	342	1	status	status	PROPN
can-11021	342	2	solidi	solidi	PROPN
can-11021	342	3	a.	a.	PROPN
can-11021	342	4	2019	2019	NUM
can-11021	342	5	;	;	PUNCT
can-11021	342	6	217(4	217(4	NUM
can-11021	342	7	):	):	PUNCT
can-11021	342	8	1900513	1900513	NUM
can-11021	342	9	.	.	PUNCT
can-11021	343	1	doi	doi	NOUN
can-11021	343	2	:	:	PUNCT
can-11021	343	3	org/10.1002	org/10.1002	PROPN
can-11021	343	4	/	/	SYM
can-11021	343	5	pssa.201900513	pssa.201900513	PROPN
can-11021	343	6	40	40	NUM
can-11021	343	7	.	.	PUNCT
can-11021	344	1	lisovskyy	lisovskyy	PROPN
can-11021	344	2	ip	ip	PROPN
can-11021	344	3	,	,	PUNCT
can-11021	344	4	voitovich	voitovich	ADJ
can-11021	344	5	mv	mv	PROPN
can-11021	344	6	,	,	PUNCT
can-11021	344	7	sarikov	sarikov	PROPN
can-11021	344	8	av	av	PROPN
can-11021	344	9	,	,	PUNCT
can-11021	344	10	et	et	PROPN
can-11021	344	11	al	al	PROPN
can-11021	344	12	.	.	PUNCT
can-11021	345	1	transformation	transformation	NOUN
can-11021	345	2	of	of	ADP
can-11021	345	3	the	the	DET
can-11021	345	4	structure	structure	NOUN
can-11021	345	5	of	of	ADP
can-11021	345	6	silicon	silicon	NOUN
can-11021	345	7	oxide	oxide	NOUN
can-11021	345	8	during	during	ADP
can-11021	345	9	the	the	DET
can-11021	345	10	formation	formation	NOUN
can-11021	345	11	of	of	ADP
can-11021	345	12	si	si	NOUN
can-11021	345	13	nanoinclusions	nanoinclusion	NOUN
can-11021	345	14	under	under	ADP
can-11021	345	15	thermal	thermal	ADJ
can-11021	345	16	annealings	annealing	NOUN
can-11021	345	17	.	.	PUNCT
can-11021	346	1	ukr	ukr	PROPN
can-11021	346	2	j	j	PROPN
can-11021	346	3	phys	phys	PROPN
can-11021	346	4	.	.	PUNCT
can-11021	347	1	2009	2009	NUM
can-11021	347	2	;	;	PUNCT
can-11021	347	3	54(4	54(4	NUM
can-11021	347	4	):	):	PUNCT
can-11021	347	5	383–390	383–390	NUM
can-11021	347	6	.	.	NOUN
can-11021	348	1	41	41	NUM
can-11021	348	2	.	.	PUNCT
can-11021	349	1	lee	lee	PROPN
can-11021	349	2	bg	bg	PROPN
can-11021	349	3	,	,	PUNCT
can-11021	349	4	hiller	hiller	PROPN
can-11021	349	5	d	d	PROPN
can-11021	349	6	,	,	PUNCT
can-11021	349	7	luo	luo	PROPN
can-11021	349	8	jw	jw	PROPN
can-11021	349	9	,	,	PUNCT
can-11021	349	10	et	et	PROPN
can-11021	349	11	al	al	PROPN
can-11021	349	12	.	.	PROPN
can-11021	350	1	strained	strained	ADJ
can-11021	350	2	interface	interface	NOUN
can-11021	350	3	defects	defect	NOUN
can-11021	350	4	in	in	ADP
can-11021	350	5	silicon	silicon	NOUN
can-11021	350	6	nanocrystals	nanocrystal	NOUN
can-11021	350	7	.	.	PUNCT
can-11021	351	1	advanced	advanced	ADJ
can-11021	351	2	functional	functional	ADJ
can-11021	351	3	materials	material	NOUN
can-11021	351	4	.	.	PUNCT
can-11021	351	5	2012	2012	NUM
can-11021	351	6	;	;	PUNCT
can-11021	351	7	22(15	22(15	NUM
can-11021	351	8	):	):	PUNCT
can-11021	351	9	3223	3223	NUM
can-11021	351	10	-	-	SYM
can-11021	351	11	3232	3232	NUM
can-11021	351	12	.	.	PUNCT
can-11021	352	1	doi	doi	NOUN
can-11021	352	2	:	:	PUNCT
can-11021	352	3	10.1002	10.1002	NUM
can-11021	352	4	/	/	SYM
can-11021	352	5	adfm.201200572	adfm.201200572	PROPN
can-11021	352	6	42	42	NUM
can-11021	352	7	.	.	PUNCT
can-11021	353	1	ballester	ballester	PROPN
can-11021	353	2	m	m	PROPN
can-11021	353	3	,	,	PUNCT
can-11021	353	4	márquez	márquez	PROPN
can-11021	353	5	ap	ap	PROPN
can-11021	353	6	,	,	PUNCT
can-11021	353	7	garcía	garcía	ADJ
can-11021	353	8	-	-	PUNCT
can-11021	353	9	vázquez	vázquez	NOUN
can-11021	353	10	c	c	NOUN
can-11021	353	11	,	,	PUNCT
can-11021	353	12	et	et	PROPN
can-11021	353	13	al	al	PROPN
can-11021	353	14	.	.	PUNCT
can-11021	353	15	energy	energy	NOUN
can-11021	353	16	-	-	PUNCT
can-11021	353	17	band	band	NOUN
can-11021	353	18	-	-	PUNCT
can-11021	353	19	structure	structure	NOUN
can-11021	353	20	calculation	calculation	NOUN
can-11021	353	21	by	by	ADP
can-11021	353	22	below	below	ADP
can-11021	353	23	-	-	PUNCT
can-11021	353	24	band	band	NOUN
can-11021	353	25	-	-	PUNCT
can-11021	353	26	gap	gap	NOUN
can-11021	353	27	spectrophotometry	spectrophotometry	NOUN
can-11021	353	28	in	in	ADP
can-11021	353	29	thin	thin	ADJ
can-11021	353	30	layers	layer	NOUN
can-11021	353	31	of	of	ADP
can-11021	353	32	non	non	ADJ
can-11021	353	33	-	-	ADJ
can-11021	353	34	crystalline	crystalline	ADJ
can-11021	353	35	semiconductors	semiconductor	NOUN
can-11021	353	36	:	:	PUNCT
can-11021	353	37	a	a	DET
can-11021	353	38	case	case	NOUN
can-11021	353	39	study	study	NOUN
can-11021	353	40	of	of	ADP
can-11021	353	41	unhydrogenated	unhydrogenated	ADJ
can-11021	353	42	a	a	PRON
can-11021	353	43	-	-	PUNCT
can-11021	353	44	si	si	NOUN
can-11021	353	45	.	.	PROPN
can-11021	353	46	journal	journal	PROPN
can-11021	353	47	of	of	ADP
can-11021	353	48	noncrystalline	noncrystalline	ADJ
can-11021	353	49	solids	solid	NOUN
can-11021	353	50	.	.	PUNCT
can-11021	353	51	2022	2022	NUM
can-11021	353	52	;	;	PUNCT
can-11021	353	53	594	594	NUM
can-11021	353	54	:	:	SYM
can-11021	353	55	121803	121803	NUM
can-11021	353	56	.	.	PUNCT
can-11021	354	1	doi	doi	NOUN
can-11021	354	2	:	:	PUNCT
can-11021	354	3	10.1016	10.1016	NUM
can-11021	354	4	/	/	SYM
can-11021	354	5	j.jnoncrysol.2022.121803	j.jnoncrysol.2022.121803	NOUN
can-11021	354	6	43	43	NUM
can-11021	354	7	.	.	PUNCT
can-11021	355	1	askari	askari	PROPN
can-11021	355	2	s	s	PROPN
can-11021	355	3	,	,	PUNCT
can-11021	355	4	svrcek	svrcek	PROPN
can-11021	355	5	v	v	PROPN
can-11021	355	6	,	,	PUNCT
can-11021	355	7	maguire	maguire	NOUN
can-11021	355	8	p	p	NOUN
can-11021	355	9	,	,	PUNCT
can-11021	355	10	et	et	PROPN
can-11021	355	11	al	al	PROPN
can-11021	355	12	.	.	PUNCT
can-11021	356	1	the	the	DET
can-11021	356	2	interplay	interplay	NOUN
can-11021	356	3	of	of	ADP
can-11021	356	4	quantum	quantum	ADJ
can-11021	356	5	confinement	confinement	NOUN
can-11021	356	6	and	and	CCONJ
can-11021	356	7	hydrogenation	hydrogenation	NOUN
can-11021	356	8	in	in	ADP
can-11021	356	9	amorphous	amorphous	ADJ
can-11021	356	10	silicon	silicon	NOUN
can-11021	356	11	quantum	quantum	NOUN
can-11021	356	12	dots	dot	NOUN
can-11021	356	13	.	.	PUNCT
can-11021	357	1	advanced	advanced	ADJ
can-11021	357	2	materials	material	NOUN
can-11021	357	3	.	.	PUNCT
can-11021	357	4	2015	2015	NUM
can-11021	357	5	;	;	PUNCT
can-11021	357	6	27(48	27(48	NUM
can-11021	357	7	):	):	PUNCT
can-11021	357	8	8011	8011	NUM
can-11021	357	9	-	-	SYM
can-11021	357	10	8016	8016	NUM
can-11021	357	11	.	.	PUNCT
can-11021	358	1	doi	doi	NOUN
can-11021	358	2	:	:	PUNCT
can-11021	358	3	10.1002	10.1002	NUM
can-11021	358	4	/	/	SYM
can-11021	358	5	adma.201503013	adma.201503013	PROPN
can-11021	358	6	44	44	NUM
can-11021	358	7	.	.	PUNCT
can-11021	359	1	collins	collins	PROPN
can-11021	359	2	rw	rw	PROPN
can-11021	359	3	,	,	PUNCT
can-11021	359	4	koh	koh	PROPN
can-11021	359	5	j	j	PROPN
can-11021	359	6	,	,	PUNCT
can-11021	359	7	ferlauto	ferlauto	VERB
can-11021	359	8	as	as	ADP
can-11021	359	9	,	,	PUNCT
can-11021	359	10	et	et	PROPN
can-11021	359	11	al	al	PROPN
can-11021	359	12	.	.	PUNCT
can-11021	360	1	real	real	ADJ
can-11021	360	2	time	time	NOUN
can-11021	360	3	analysis	analysis	NOUN
can-11021	360	4	of	of	ADP
can-11021	360	5	amorphous	amorphous	ADJ
can-11021	360	6	and	and	CCONJ
can-11021	360	7	microcrystalline	microcrystalline	NOUN
can-11021	360	8	silicon	silicon	NOUN
can-11021	360	9	film	film	NOUN
can-11021	360	10	growth	growth	NOUN
can-11021	360	11	by	by	ADP
can-11021	360	12	multichannel	multichannel	PROPN
can-11021	360	13	ellipsometry	ellipsometry	NOUN
can-11021	360	14	.	.	PUNCT
can-11021	361	1	thin	thin	ADJ
can-11021	361	2	solid	solid	ADJ
can-11021	361	3	films	film	NOUN
can-11021	361	4	.	.	PUNCT
can-11021	361	5	2000	2000	NUM
can-11021	361	6	;	;	PUNCT
can-11021	361	7	364(1–2	364(1–2	NUM
can-11021	361	8	):	):	PUNCT
can-11021	361	9	129–137	129–137	NUM
can-11021	361	10	.	.	PUNCT
can-11021	362	1	doi	doi	NOUN
can-11021	362	2	:	:	PUNCT
can-11021	362	3	10.1016	10.1016	NUM
can-11021	362	4	/	/	SYM
can-11021	362	5	s0040	s0040	PROPN
can-11021	362	6	-	-	NOUN
can-11021	362	7	6090(99)00925	6090(99)00925	NUM
can-11021	362	8	-	-	SYM
can-11021	362	9	6	6	NUM
can-11021	362	10	45	45	NUM
can-11021	362	11	.	.	PUNCT
can-11021	363	1	abdulraheem	abdulraheem	VERB
can-11021	363	2	y	y	PROPN
can-11021	363	3	,	,	PUNCT
can-11021	363	4	gordon	gordon	PROPN
can-11021	363	5	i	i	PROPN
can-11021	363	6	,	,	PUNCT
can-11021	363	7	bearda	bearda	PROPN
can-11021	363	8	t	t	PROPN
can-11021	363	9	,	,	PUNCT
can-11021	363	10	et	et	PROPN
can-11021	363	11	al	al	PROPN
can-11021	363	12	.	.	PROPN
can-11021	363	13	optical	optical	ADJ
can-11021	363	14	bandgap	bandgap	NOUN
can-11021	363	15	of	of	ADP
can-11021	363	16	ultra	ultra	ADJ
can-11021	363	17	-	-	ADJ
can-11021	363	18	thin	thin	ADJ
can-11021	363	19	amorphous	amorphous	ADJ
can-11021	363	20	silicon	silicon	NOUN
can-11021	363	21	films	film	NOUN
can-11021	363	22	deposited	deposit	VERB
can-11021	363	23	on	on	ADP
can-11021	363	24	crystalline	crystalline	ADJ
can-11021	363	25	silicon	silicon	NOUN
can-11021	363	26	by	by	ADP
can-11021	363	27	pecvd	pecvd	NOUN
can-11021	363	28	.	.	PUNCT
can-11021	364	1	aip	aip	PROPN
can-11021	364	2	advances	advance	NOUN
can-11021	364	3	.	.	PUNCT
can-11021	364	4	2014	2014	NUM
can-11021	364	5	;	;	PUNCT
can-11021	364	6	4(5	4(5	NUM
can-11021	364	7	):	):	PUNCT
can-11021	364	8	057122	057122	NUM
can-11021	364	9	.	.	PUNCT
can-11021	365	1	doi:10.1063/1.4879807	doi:10.1063/1.4879807	ADJ
can-11021	365	2	46	46	NUM
can-11021	365	3	.	.	PUNCT
can-11021	366	1	nikitin	nikitin	PROPN
can-11021	366	2	t	t	PROPN
can-11021	366	3	,	,	PUNCT
can-11021	366	4	velagapudi	velagapudi	ADJ
can-11021	366	5	r	r	NOUN
can-11021	366	6	,	,	PUNCT
can-11021	366	7	sainio	sainio	NOUN
can-11021	366	8	j	j	PROPN
can-11021	366	9	,	,	PUNCT
can-11021	366	10	et	et	PROPN
can-11021	366	11	al	al	PROPN
can-11021	366	12	.	.	PROPN
can-11021	367	1	optical	optical	ADJ
can-11021	367	2	and	and	CCONJ
can-11021	367	3	structural	structural	ADJ
can-11021	367	4	properties	property	NOUN
can-11021	367	5	of	of	ADP
can-11021	367	6	siox	siox	NOUN
can-11021	367	7	films	film	NOUN
can-11021	367	8	grown	grow	VERB
can-11021	367	9	by	by	ADP
can-11021	367	10	molecular	molecular	ADJ
can-11021	367	11	beam	beam	NOUN
can-11021	367	12	deposition	deposition	NOUN
can-11021	367	13	:	:	PUNCT
can-11021	367	14	effect	effect	NOUN
can-11021	367	15	of	of	ADP
can-11021	367	16	the	the	DET
can-11021	367	17	si	si	PROPN
can-11021	367	18	concentration	concentration	NOUN
can-11021	367	19	and	and	CCONJ
can-11021	367	20	annealing	anneal	VERB
can-11021	367	21	temperature	temperature	NOUN
can-11021	367	22	.	.	PUNCT
can-11021	368	1	journal	journal	NOUN
can-11021	368	2	of	of	ADP
can-11021	368	3	applied	applied	ADJ
can-11021	368	4	physics	physic	NOUN
can-11021	368	5	.	.	PUNCT
can-11021	368	6	2012	2012	NUM
can-11021	368	7	;	;	PUNCT
can-11021	368	8	112(9	112(9	NUM
can-11021	368	9	)	)	PUNCT
can-11021	368	10	.	.	PUNCT
can-11021	369	1	doi	doi	NOUN
can-11021	369	2	:	:	PUNCT
can-11021	369	3	10.1063/1.4764893	10.1063/1.4764893	NUM