id	sid	tid	token	lemma	pos
can-1682	1	1	microsoft	microsoft	PROPN
can-1682	1	2	word	word	NOUN
can-1682	1	3	1682	1682	NUM
can-1682	1	4	-	-	SYM
can-1682	1	5	5575	5575	NUM
can-1682	1	6	-	-	PUNCT
can-1682	1	7	1	1	NUM
can-1682	1	8	-	-	PUNCT
can-1682	1	9	le	le	NOUN
can-1682	1	10	characterization	characterization	NOUN
can-1682	1	11	and	and	CCONJ
can-1682	1	12	application	application	NOUN
can-1682	1	13	of	of	ADP
can-1682	1	14	nanomaterials	nanomaterial	NOUN
can-1682	1	15	(	(	PUNCT
can-1682	1	16	2022	2022	NUM
can-1682	1	17	)	)	PUNCT
can-1682	1	18	volume	volume	NOUN
can-1682	1	19	5	5	NUM
can-1682	1	20	issue	issue	NOUN
can-1682	1	21	1	1	NUM
can-1682	1	22	doi:10.24294	doi:10.24294	NOUN
can-1682	1	23	/	/	SYM
can-1682	1	24	can.v5i1.1682	can.v5i1.1682	PROPN
can-1682	1	25	79	79	NUM
can-1682	1	26	reviews	review	NOUN
can-1682	1	27	article	article	NOUN
can-1682	1	28	synthesis	synthesis	NOUN
can-1682	1	29	of	of	ADP
can-1682	1	30	carbon	carbon	NOUN
can-1682	1	31	nanostructures	nanostructure	NOUN
can-1682	1	32	using	use	VERB
can-1682	1	33	the	the	DET
can-1682	1	34	chemical	chemical	ADJ
can-1682	1	35	vapor	vapor	NOUN
can-1682	1	36	deposition	deposition	NOUN
can-1682	1	37	technique	technique	NOUN
can-1682	1	38	:	:	PUNCT
can-1682	1	39	an	an	DET
can-1682	1	40	overview	overview	NOUN
can-1682	1	41	ali	ali	PROPN
can-1682	1	42	roberto	roberto	PROPN
can-1682	1	43	ruiz	ruiz	PROPN
can-1682	1	44	hernández	hernández	PROPN
can-1682	1	45	,	,	PUNCT
can-1682	1	46	adrián	adrián	PROPN
can-1682	1	47	gutiérrez	gutiérrez	PROPN
can-1682	1	48	cruz	cruz	PROPN
can-1682	1	49	,	,	PUNCT
can-1682	1	50	daniela	daniela	PROPN
can-1682	1	51	luna	luna	PROPN
can-1682	1	52	,	,	PUNCT
can-1682	1	53	josé	josé	PROPN
can-1682	1	54	fernando	fernando	PROPN
can-1682	1	55	vega	vega	PROPN
can-1682	1	56	,	,	PUNCT
can-1682	1	57	gerardo	gerardo	PROPN
can-1682	1	58	patiño	patiño	NOUN
can-1682	1	59	guillén	guillén	NOUN
can-1682	1	60	,	,	PUNCT
can-1682	1	61	alan	alan	PROPN
can-1682	1	62	arceta	arceta	PROPN
can-1682	1	63	lozano	lozano	PROPN
can-1682	1	64	,	,	PUNCT
can-1682	1	65	jessica	jessica	PROPN
can-1682	1	66	campos	campos	PROPN
can-1682	1	67	-	-	PUNCT
can-1682	1	68	delgado	delgado	PROPN
can-1682	1	69	*	*	PUNCT
can-1682	1	70	departamento	departamento	PROPN
can-1682	1	71	de	de	PROPN
can-1682	1	72	ciencias	ciencias	PROPN
can-1682	1	73	químico	químico	PROPN
can-1682	1	74	biológicas	biológicas	PROPN
can-1682	1	75	,	,	PUNCT
can-1682	1	76	universidad	universidad	PROPN
can-1682	1	77	de	de	PROPN
can-1682	1	78	las	las	PROPN
can-1682	1	79	américas	américas	PROPN
can-1682	1	80	puebla	puebla	PROPN
can-1682	1	81	,	,	PUNCT
can-1682	1	82	puebla	puebla	PROPN
can-1682	1	83	78210	78210	NUM
can-1682	1	84	,	,	PUNCT
can-1682	1	85	mexico	mexico	PROPN
can-1682	1	86	.	.	PUNCT
can-1682	2	1	e	e	X
can-1682	2	2	-	-	NOUN
can-1682	2	3	mail	mail	NOUN
can-1682	2	4	:	:	PUNCT
can-1682	2	5	jessica.campos@udlap.mx	jessica.campos@udlap.mx	PROPN
can-1682	2	6	abstract	abstract	VERB
can-1682	2	7	the	the	DET
can-1682	2	8	boom	boom	NOUN
can-1682	2	9	in	in	ADP
can-1682	2	10	nanotechnology	nanotechnology	NOUN
can-1682	2	11	over	over	ADP
can-1682	2	12	the	the	DET
can-1682	2	13	last	last	ADJ
can-1682	2	14	three	three	NUM
can-1682	2	15	decades	decade	NOUN
can-1682	2	16	is	be	AUX
can-1682	2	17	undeniable	undeniable	ADJ
can-1682	2	18	.	.	PUNCT
can-1682	3	1	responsible	responsible	ADJ
can-1682	3	2	for	for	ADP
can-1682	3	3	this	this	DET
can-1682	3	4	interest	interest	NOUN
can-1682	3	5	in	in	ADP
can-1682	3	6	nanomaterials	nanomaterial	NOUN
can-1682	3	7	are	be	AUX
can-1682	3	8	mainly	mainly	ADV
can-1682	3	9	the	the	DET
can-1682	3	10	nanostructured	nanostructure	VERB
can-1682	3	11	forms	form	NOUN
can-1682	3	12	of	of	ADP
can-1682	3	13	carbon	carbon	NOUN
can-1682	3	14	,	,	PUNCT
can-1682	3	15	since	since	SCONJ
can-1682	3	16	historically	historically	ADV
can-1682	3	17	they	they	PRON
can-1682	3	18	were	be	AUX
can-1682	3	19	the	the	DET
can-1682	3	20	ones	one	NOUN
can-1682	3	21	that	that	PRON
can-1682	3	22	inaugurated	inaugurate	VERB
can-1682	3	23	the	the	DET
can-1682	3	24	study	study	NOUN
can-1682	3	25	of	of	ADP
can-1682	3	26	nanomaterials	nanomaterial	NOUN
can-1682	3	27	with	with	ADP
can-1682	3	28	the	the	DET
can-1682	3	29	discovery	discovery	NOUN
can-1682	3	30	of	of	ADP
can-1682	3	31	fullerenes	fullerene	NOUN
can-1682	3	32	in	in	ADP
can-1682	3	33	1985	1985	NUM
can-1682	3	34	and	and	CCONJ
can-1682	3	35	carbon	carbon	NOUN
can-1682	3	36	nanotubes	nanotube	NOUN
can-1682	3	37	in	in	ADP
can-1682	3	38	1991	1991	NUM
can-1682	3	39	.	.	PUNCT
can-1682	4	1	although	although	SCONJ
can-1682	4	2	a	a	DET
can-1682	4	3	variety	variety	NOUN
can-1682	4	4	of	of	ADP
can-1682	4	5	techniques	technique	NOUN
can-1682	4	6	exist	exist	VERB
can-1682	4	7	to	to	PART
can-1682	4	8	produce	produce	VERB
can-1682	4	9	these	these	DET
can-1682	4	10	materials	material	NOUN
can-1682	4	11	,	,	PUNCT
can-1682	4	12	chemical	chemical	NOUN
can-1682	4	13	vapor	vapor	NOUN
can-1682	4	14	deposition	deposition	NOUN
can-1682	4	15	(	(	PUNCT
can-1682	4	16	cvd	cvd	NOUN
can-1682	4	17	)	)	PUNCT
can-1682	4	18	is	be	AUX
can-1682	4	19	particularly	particularly	ADV
can-1682	4	20	valuable	valuable	ADJ
can-1682	4	21	as	as	SCONJ
can-1682	4	22	it	it	PRON
can-1682	4	23	allows	allow	VERB
can-1682	4	24	the	the	DET
can-1682	4	25	production	production	NOUN
can-1682	4	26	of	of	ADP
can-1682	4	27	a	a	DET
can-1682	4	28	wide	wide	ADJ
can-1682	4	29	variety	variety	NOUN
can-1682	4	30	of	of	ADP
can-1682	4	31	carbon	carbon	NOUN
can-1682	4	32	nanostructures	nanostructure	NOUN
can-1682	4	33	,	,	PUNCT
can-1682	4	34	is	be	AUX
can-1682	4	35	versatile	versatile	ADJ
can-1682	4	36	,	,	PUNCT
can-1682	4	37	scalable	scalable	ADJ
can-1682	4	38	,	,	PUNCT
can-1682	4	39	easy	easy	ADJ
can-1682	4	40	to	to	PART
can-1682	4	41	implement	implement	VERB
can-1682	4	42	and	and	CCONJ
can-1682	4	43	relatively	relatively	ADV
can-1682	4	44	low	low	ADJ
can-1682	4	45	cost	cost	NOUN
can-1682	4	46	.	.	PUNCT
can-1682	5	1	this	this	DET
can-1682	5	2	review	review	NOUN
can-1682	5	3	article	article	NOUN
can-1682	5	4	highlights	highlight	VERB
can-1682	5	5	the	the	DET
can-1682	5	6	importance	importance	NOUN
can-1682	5	7	of	of	ADP
can-1682	5	8	cvd	cvd	PROPN
can-1682	5	9	and	and	CCONJ
can-1682	5	10	details	detail	VERB
can-1682	5	11	its	its	PRON
can-1682	5	12	principles	principle	NOUN
can-1682	5	13	,	,	PUNCT
can-1682	5	14	operating	operating	NOUN
can-1682	5	15	conditions	condition	NOUN
can-1682	5	16	and	and	CCONJ
can-1682	5	17	parameters	parameter	NOUN
can-1682	5	18	,	,	PUNCT
can-1682	5	19	as	as	ADV
can-1682	5	20	well	well	ADV
can-1682	5	21	as	as	ADP
can-1682	5	22	its	its	PRON
can-1682	5	23	main	main	ADJ
can-1682	5	24	variants	variant	NOUN
can-1682	5	25	.	.	PUNCT
can-1682	6	1	a	a	DET
can-1682	6	2	description	description	NOUN
can-1682	6	3	of	of	ADP
can-1682	6	4	the	the	DET
can-1682	6	5	technique	technique	NOUN
can-1682	6	6	used	use	VERB
can-1682	6	7	to	to	PART
can-1682	6	8	produce	produce	VERB
can-1682	6	9	fullerenes	fullerene	NOUN
can-1682	6	10	,	,	PUNCT
can-1682	6	11	nano	nano	NOUN
can-1682	6	12	-	-	PUNCT
can-1682	6	13	ceramics	ceramic	NOUN
can-1682	6	14	,	,	PUNCT
can-1682	6	15	carbon	carbon	NOUN
can-1682	6	16	nanotubes	nanotube	NOUN
can-1682	6	17	,	,	PUNCT
can-1682	6	18	nanospheres	nanosphere	NOUN
can-1682	6	19	,	,	PUNCT
can-1682	6	20	graphene	graphene	VERB
can-1682	6	21	and	and	CCONJ
can-1682	6	22	others	other	NOUN
can-1682	6	23	is	be	AUX
can-1682	6	24	made	make	VERB
can-1682	6	25	,	,	PUNCT
can-1682	6	26	emphasizing	emphasize	VERB
can-1682	6	27	the	the	DET
can-1682	6	28	specific	specific	ADJ
can-1682	6	29	parameters	parameter	NOUN
can-1682	6	30	for	for	ADP
can-1682	6	31	each	each	DET
can-1682	6	32	synthesis	synthesis	NOUN
can-1682	6	33	.	.	PUNCT
can-1682	7	1	keywords	keyword	NOUN
can-1682	7	2	:	:	PUNCT
can-1682	7	3	chemical	chemical	NOUN
can-1682	7	4	vapor	vapor	NOUN
can-1682	7	5	deposition	deposition	NOUN
can-1682	7	6	,	,	PUNCT
can-1682	7	7	carbon	carbon	NOUN
can-1682	7	8	nanostructures	nanostructure	NOUN
can-1682	7	9	,	,	PUNCT
can-1682	7	10	synthesis	synthesis	NOUN
can-1682	7	11	article	article	NOUN
can-1682	7	12	info	info	NOUN
can-1682	7	13	received	receive	VERB
can-1682	7	14	:	:	PUNCT
can-1682	7	15	2	2	NUM
can-1682	7	16	march	march	NOUN
can-1682	7	17	2022	2022	NUM
can-1682	7	18	accepted	accept	VERB
can-1682	7	19	:	:	PUNCT
can-1682	7	20	4	4	NUM
can-1682	7	21	april	april	PROPN
can-1682	7	22	2022	2022	NUM
can-1682	7	23	available	available	ADJ
can-1682	7	24	online	online	ADV
can-1682	7	25	:	:	PUNCT
can-1682	8	1	12	12	NUM
can-1682	8	2	april	april	PROPN
can-1682	8	3	2022	2022	NUM
can-1682	8	4	copyright	copyright	NOUN
can-1682	8	5	copyright	copyright	NOUN
can-1682	8	6	©	©	PROPN
can-1682	8	7	2022	2022	NUM
can-1682	8	8	ali	ali	PROPN
can-1682	8	9	roberto	roberto	PROPN
can-1682	8	10	ruiz	ruiz	PROPN
can-1682	8	11	hernández	hernández	PROPN
can-1682	8	12	,	,	PUNCT
can-1682	8	13	et	et	PROPN
can-1682	8	14	al	al	PROPN
can-1682	8	15	.	.	PROPN
can-1682	8	16	enpress	enpress	PROPN
can-1682	8	17	publisher	publisher	PROPN
can-1682	8	18	llc	llc	PROPN
can-1682	8	19	.	.	PUNCT
can-1682	9	1	this	this	DET
can-1682	9	2	work	work	NOUN
can-1682	9	3	is	be	AUX
can-1682	9	4	licensed	license	VERB
can-1682	9	5	under	under	ADP
can-1682	9	6	the	the	DET
can-1682	9	7	creative	creative	ADJ
can-1682	9	8	commons	common	NOUN
can-1682	9	9	attribution	attribution	NOUN
can-1682	9	10	-	-	PUNCT
can-1682	9	11	noncommercial	noncommercial	ADJ
can-1682	9	12	4.0	4.0	NUM
can-1682	9	13	international	international	ADJ
can-1682	9	14	license	license	NOUN
can-1682	9	15	(	(	PUNCT
can-1682	9	16	cc	cc	NOUN
can-1682	9	17	by	by	ADP
can-1682	9	18	-	-	PUNCT
can-1682	9	19	nc	nc	PROPN
can-1682	9	20	4.0	4.0	NUM
can-1682	9	21	)	)	PUNCT
can-1682	9	22	.	.	PUNCT
can-1682	10	1	https://creativecommons.org/licenses/by-nc/	https://creativecommons.org/licenses/by-nc/	PROPN
can-1682	10	2	4.0/	4.0/	NUM
can-1682	10	3	1	1	NUM
can-1682	10	4	.	.	PUNCT
can-1682	11	1	introduction	introduction	NOUN
can-1682	11	2	the	the	DET
can-1682	11	3	discovery	discovery	NOUN
can-1682	11	4	of	of	ADP
can-1682	11	5	c60	c60	NOUN
can-1682	11	6	(	(	PUNCT
can-1682	11	7	buckminsterfullerene	buckminsterfullerene	NOUN
can-1682	11	8	)	)	PUNCT
can-1682	11	9	in	in	ADP
can-1682	11	10	1985[1	1985[1	NUM
can-1682	11	11	]	]	PUNCT
can-1682	11	12	,	,	PUNCT
can-1682	11	13	triggered	trigger	VERB
can-1682	11	14	a	a	DET
can-1682	11	15	wave	wave	NOUN
can-1682	11	16	of	of	ADP
can-1682	11	17	research	research	NOUN
can-1682	11	18	on	on	ADP
can-1682	11	19	allotropic	allotropic	NOUN
can-1682	11	20	nano	nano	NOUN
can-1682	11	21	-	-	PUNCT
can-1682	11	22	sized	sized	ADJ
can-1682	11	23	forms	form	NOUN
can-1682	11	24	of	of	ADP
can-1682	11	25	carbon	carbon	NOUN
can-1682	11	26	.	.	PUNCT
can-1682	12	1	this	this	DET
can-1682	12	2	event	event	NOUN
can-1682	12	3	triggered	trigger	VERB
can-1682	12	4	the	the	DET
can-1682	12	5	discovery	discovery	NOUN
can-1682	12	6	of	of	ADP
can-1682	12	7	other	other	ADJ
can-1682	12	8	nanostructured	nanostructure	VERB
can-1682	12	9	forms	form	NOUN
can-1682	12	10	of	of	ADP
can-1682	12	11	carbon	carbon	NOUN
can-1682	12	12	such	such	ADJ
can-1682	12	13	as	as	ADP
can-1682	12	14	:	:	PUNCT
can-1682	12	15	singleand	singleand	NOUN
can-1682	12	16	multi	multi	ADJ
can-1682	12	17	-	-	ADJ
can-1682	12	18	walled	walled	ADJ
can-1682	12	19	nanotubes[2,3	nanotubes[2,3	PROPN
can-1682	12	20	]	]	PUNCT
can-1682	12	21	,	,	PUNCT
can-1682	12	22	nano	nano	NOUN
can-1682	12	23	-	-	PUNCT
can-1682	12	24	onions[4	onions[4	NUM
can-1682	12	25	]	]	PUNCT
can-1682	12	26	,	,	PUNCT
can-1682	12	27	nanolistones[5	nanolistones[5	PROPN
can-1682	12	28	]	]	PUNCT
can-1682	12	29	,	,	PUNCT
can-1682	12	30	nano	nano	NOUN
can-1682	12	31	-	-	PUNCT
can-1682	12	32	horns	horn	NOUN
can-1682	12	33	,	,	PUNCT
can-1682	12	34	nano	nano	NOUN
can-1682	12	35	-	-	PUNCT
can-1682	12	36	diamond	diamond	NOUN
can-1682	12	37	,	,	PUNCT
can-1682	12	38	carbon	carbon	NOUN
can-1682	12	39	dots[6	dots[6	PROPN
can-1682	12	40	]	]	PUNCT
can-1682	12	41	,	,	PUNCT
can-1682	12	42	nanospheres[7	nanospheres[7	NOUN
can-1682	12	43	]	]	PUNCT
can-1682	12	44	)	)	PUNCT
can-1682	12	45	and	and	CCONJ
can-1682	12	46	recently	recently	ADV
can-1682	12	47	graphene[8	graphene[8	PROPN
can-1682	12	48	]	]	PUNCT
can-1682	12	49	.	.	PUNCT
can-1682	13	1	various	various	ADJ
can-1682	13	2	nanofabrication	nanofabrication	NOUN
can-1682	13	3	methods	method	NOUN
can-1682	13	4	are	be	AUX
can-1682	13	5	involved	involve	VERB
can-1682	13	6	in	in	ADP
can-1682	13	7	the	the	DET
can-1682	13	8	synthesis	synthesis	NOUN
can-1682	13	9	of	of	ADP
can-1682	13	10	these	these	DET
can-1682	13	11	nanostructures	nanostructure	NOUN
can-1682	13	12	such	such	ADJ
can-1682	13	13	as	as	ADP
can-1682	13	14	:	:	PUNCT
can-1682	13	15	laser	laser	NOUN
can-1682	13	16	ablation	ablation	NOUN
can-1682	13	17	,	,	PUNCT
can-1682	13	18	arc	arc	NOUN
can-1682	13	19	discharge	discharge	NOUN
can-1682	13	20	,	,	PUNCT
can-1682	13	21	chemical	chemical	NOUN
can-1682	13	22	vapor	vapor	NOUN
can-1682	13	23	deposition	deposition	NOUN
can-1682	13	24	and	and	CCONJ
can-1682	13	25	more	more	ADV
can-1682	13	26	recently	recently	ADV
can-1682	13	27	hydrothermal	hydrothermal	ADJ
can-1682	13	28	or	or	CCONJ
can-1682	13	29	wet	wet	ADJ
can-1682	13	30	chemical	chemical	NOUN
can-1682	13	31	methods	method	NOUN
can-1682	13	32	such	such	ADJ
can-1682	13	33	as	as	ADP
can-1682	13	34	sol	sol	NOUN
can-1682	13	35	-	-	NOUN
can-1682	13	36	gel	gel	NOUN
can-1682	13	37	.	.	PUNCT
can-1682	14	1	of	of	ADP
can-1682	14	2	particular	particular	ADJ
can-1682	14	3	importance	importance	NOUN
can-1682	14	4	is	be	AUX
can-1682	14	5	the	the	DET
can-1682	14	6	chemical	chemical	ADJ
can-1682	14	7	vapor	vapor	NOUN
can-1682	14	8	deposition	deposition	NOUN
can-1682	14	9	(	(	PUNCT
can-1682	14	10	cvd	cvd	NOUN
can-1682	14	11	)	)	PUNCT
can-1682	14	12	method	method	NOUN
can-1682	14	13	due	due	ADP
can-1682	14	14	to	to	ADP
can-1682	14	15	its	its	PRON
can-1682	14	16	versatility	versatility	NOUN
can-1682	14	17	,	,	PUNCT
can-1682	14	18	ease	ease	NOUN
can-1682	14	19	of	of	ADP
can-1682	14	20	implementation	implementation	NOUN
can-1682	14	21	,	,	PUNCT
can-1682	14	22	low	low	ADJ
can-1682	14	23	cost	cost	NOUN
can-1682	14	24	,	,	PUNCT
can-1682	14	25	scalability	scalability	NOUN
can-1682	14	26	,	,	PUNCT
can-1682	14	27	among	among	ADP
can-1682	14	28	other	other	ADJ
can-1682	14	29	advantages	advantage	NOUN
can-1682	14	30	.	.	PUNCT
can-1682	15	1	figure	figure	NOUN
can-1682	15	2	1	1	NUM
can-1682	15	3	illustrates	illustrate	VERB
can-1682	15	4	models	model	NOUN
can-1682	15	5	of	of	ADP
can-1682	15	6	carbon	carbon	NOUN
can-1682	15	7	nanostructures	nanostructure	NOUN
can-1682	15	8	that	that	PRON
can-1682	15	9	can	can	AUX
can-1682	15	10	be	be	AUX
can-1682	15	11	produced	produce	VERB
can-1682	15	12	by	by	ADP
can-1682	15	13	the	the	DET
can-1682	15	14	cvd	cvd	PROPN
can-1682	15	15	technique	technique	NOUN
can-1682	15	16	,	,	PUNCT
can-1682	15	17	most	most	ADJ
can-1682	15	18	of	of	ADP
can-1682	15	19	these	these	DET
can-1682	15	20	materials	material	NOUN
can-1682	15	21	are	be	AUX
can-1682	15	22	made	make	VERB
can-1682	15	23	of	of	ADP
can-1682	15	24	carbon	carbon	NOUN
can-1682	15	25	atoms	atom	NOUN
can-1682	15	26	with	with	ADP
can-1682	15	27	sp2	sp2	NOUN
can-1682	15	28	hybridization	hybridization	NOUN
can-1682	15	29	.	.	PUNCT
can-1682	16	1	fullerenes	fullerene	NOUN
can-1682	16	2	are	be	AUX
can-1682	16	3	a	a	DET
can-1682	16	4	family	family	NOUN
can-1682	16	5	of	of	ADP
can-1682	16	6	spherical	spherical	ADJ
can-1682	16	7	molecules	molecule	NOUN
can-1682	16	8	that	that	PRON
can-1682	16	9	can	can	AUX
can-1682	16	10	contain	contain	VERB
can-1682	16	11	60	60	NUM
can-1682	16	12	atoms	atom	NOUN
can-1682	16	13	or	or	CCONJ
can-1682	16	14	more	more	ADJ
can-1682	16	15	(	(	PUNCT
can-1682	16	16	even	even	ADV
can-1682	16	17	numbers	number	NOUN
can-1682	16	18	)	)	PUNCT
can-1682	16	19	,	,	PUNCT
can-1682	16	20	achieving	achieve	VERB
can-1682	16	21	giant	giant	ADJ
can-1682	16	22	fullerene	fullerene	NOUN
can-1682	16	23	structures	structure	NOUN
can-1682	16	24	of	of	ADP
can-1682	16	25	up	up	ADP
can-1682	16	26	to	to	PART
can-1682	16	27	hundreds	hundred	NOUN
can-1682	16	28	of	of	ADP
can-1682	16	29	atoms	atom	NOUN
can-1682	16	30	.	.	PUNCT
can-1682	17	1	structurally	structurally	ADV
can-1682	17	2	,	,	PUNCT
can-1682	17	3	the	the	DET
can-1682	17	4	fullerene	fullerene	NOUN
can-1682	17	5	or	or	CCONJ
can-1682	17	6	c60	c60	NOUN
can-1682	17	7	is	be	AUX
can-1682	17	8	a	a	DET
can-1682	17	9	spherical	spherical	ADJ
can-1682	17	10	cage	cage	NOUN
can-1682	17	11	(	(	PUNCT
can-1682	17	12	similar	similar	ADJ
can-1682	17	13	to	to	ADP
can-1682	17	14	a	a	DET
can-1682	17	15	soccer	soccer	NOUN
can-1682	17	16	ball	ball	NOUN
can-1682	17	17	)	)	PUNCT
can-1682	17	18	made	make	VERB
can-1682	17	19	up	up	ADP
can-1682	17	20	of	of	ADP
can-1682	17	21	exactly	exactly	ADV
can-1682	17	22	60	60	NUM
can-1682	17	23	carbon	carbon	NOUN
can-1682	17	24	atoms	atom	NOUN
can-1682	17	25	,	,	PUNCT
can-1682	17	26	in	in	ADP
can-1682	17	27	this	this	DET
can-1682	17	28	structure	structure	NOUN
can-1682	17	29	are	be	AUX
can-1682	17	30	the	the	DET
can-1682	17	31	carbons	carbon	NOUN
can-1682	17	32	with	with	ADP
can-1682	17	33	sp2	sp2	NOUN
can-1682	17	34	hybridization	hybridization	NOUN
can-1682	17	35	,	,	PUNCT
can-1682	17	36	each	each	PRON
can-1682	17	37	attached	attach	VERB
can-1682	17	38	to	to	ADP
can-1682	17	39	3	3	NUM
can-1682	17	40	neighboring	neighboring	NOUN
can-1682	17	41	atoms	atom	NOUN
can-1682	17	42	,	,	PUNCT
can-1682	17	43	the	the	DET
can-1682	17	44	introduction	introduction	NOUN
can-1682	17	45	of	of	ADP
can-1682	17	46	pentagons	pentagon	NOUN
can-1682	17	47	is	be	AUX
can-1682	17	48	essential	essential	ADJ
can-1682	17	49	to	to	PART
can-1682	17	50	form	form	VERB
can-1682	17	51	the	the	DET
can-1682	17	52	curvature	curvature	NOUN
can-1682	17	53	needed	need	VERB
can-1682	17	54	to	to	ADP
can-1682	17	55	close[1	close[1	NOUN
can-1682	17	56	]	]	PUNCT
can-1682	17	57	.	.	PUNCT
can-1682	18	1	related	relate	VERB
can-1682	18	2	to	to	ADP
can-1682	18	3	fullerenes	fullerene	NOUN
can-1682	18	4	are	be	AUX
can-1682	18	5	nano	nano	NOUN
can-1682	18	6	-	-	PUNCT
can-1682	18	7	onions	onion	NOUN
can-1682	18	8	,	,	PUNCT
can-1682	18	9	which	which	PRON
can-1682	18	10	consist	consist	VERB
can-1682	18	11	of	of	ADP
can-1682	18	12	concentric	concentric	ADJ
can-1682	18	13	fullerenes	fullerene	NOUN
can-1682	18	14	inside	inside	ADP
can-1682	18	15	each	each	DET
can-1682	18	16	other	other	ADJ
can-1682	18	17	,	,	PUNCT
can-1682	18	18	generating	generate	VERB
can-1682	18	19	an	an	DET
can-1682	18	20	onion	onion	NOUN
can-1682	18	21	-	-	PUNCT
can-1682	18	22	like	like	ADJ
can-1682	18	23	structure	structure	NOUN
can-1682	18	24	.	.	PUNCT
can-1682	19	1	graphene	graphene	NOUN
can-1682	19	2	is	be	AUX
can-1682	19	3	a	a	DET
can-1682	19	4	sheet	sheet	NOUN
can-1682	19	5	of	of	ADP
can-1682	19	6	carbon	carbon	NOUN
can-1682	19	7	atoms	atom	NOUN
can-1682	19	8	with	with	ADP
can-1682	19	9	sp2	sp2	NOUN
can-1682	19	10	80	80	NUM
can-1682	19	11	hybridization	hybridization	NOUN
can-1682	19	12	configured	configure	VERB
can-1682	19	13	in	in	ADP
can-1682	19	14	a	a	DET
can-1682	19	15	hexagonal	hexagonal	ADJ
can-1682	19	16	arrangement	arrangement	NOUN
can-1682	19	17	,	,	PUNCT
can-1682	19	18	it	it	PRON
can-1682	19	19	is	be	AUX
can-1682	19	20	a	a	DET
can-1682	19	21	two	two	NUM
can-1682	19	22	-	-	PUNCT
can-1682	19	23	dimensional	dimensional	ADJ
can-1682	19	24	nanomaterial	nanomaterial	NOUN
can-1682	19	25	,	,	PUNCT
can-1682	19	26	graphite	graphite	NOUN
can-1682	19	27	is	be	AUX
can-1682	19	28	formed	form	VERB
can-1682	19	29	by	by	ADP
can-1682	19	30	stacking	stack	VERB
can-1682	19	31	graphene	graphene	NOUN
can-1682	19	32	sheets	sheet	NOUN
can-1682	19	33	one	one	NUM
can-1682	19	34	on	on	ADP
can-1682	19	35	top	top	NOUN
can-1682	19	36	of	of	ADP
can-1682	19	37	the	the	DET
can-1682	19	38	other	other	ADJ
can-1682	19	39	.	.	PUNCT
can-1682	20	1	starting	start	VERB
can-1682	20	2	from	from	ADP
can-1682	20	3	a	a	DET
can-1682	20	4	graphene	graphene	NOUN
can-1682	20	5	sheet	sheet	NOUN
can-1682	20	6	,	,	PUNCT
can-1682	20	7	by	by	ADP
can-1682	20	8	rolling	roll	VERB
can-1682	20	9	it	it	PRON
can-1682	20	10	up	up	ADP
can-1682	20	11	,	,	PUNCT
can-1682	20	12	carbon	carbon	NOUN
can-1682	20	13	nanotubes	nanotube	NOUN
can-1682	20	14	can	can	AUX
can-1682	20	15	be	be	AUX
can-1682	20	16	obtained[2,3	obtained[2,3	NOUN
can-1682	20	17	]	]	PUNCT
can-1682	20	18	.	.	PUNCT
can-1682	21	1	these	these	DET
can-1682	21	2	nanostructures	nanostructure	NOUN
can-1682	21	3	motivated	motivate	VERB
can-1682	21	4	further	further	ADJ
can-1682	21	5	research	research	NOUN
can-1682	21	6	in	in	ADP
can-1682	21	7	the	the	DET
can-1682	21	8	1990s	1990	NOUN
can-1682	21	9	and	and	CCONJ
can-1682	21	10	the	the	DET
can-1682	21	11	first	first	ADJ
can-1682	21	12	decade	decade	NOUN
can-1682	21	13	of	of	ADP
can-1682	21	14	the	the	DET
can-1682	21	15	2000s	2000s	NUM
can-1682	21	16	,	,	PUNCT
can-1682	21	17	their	their	PRON
can-1682	21	18	amazing	amazing	ADJ
can-1682	21	19	mechanical	mechanical	ADJ
can-1682	21	20	and	and	CCONJ
can-1682	21	21	electrical	electrical	ADJ
can-1682	21	22	properties	property	NOUN
can-1682	21	23	have	have	AUX
can-1682	21	24	led	lead	VERB
can-1682	21	25	to	to	ADP
can-1682	21	26	technological	technological	ADJ
can-1682	21	27	applications	application	NOUN
can-1682	21	28	in	in	ADP
can-1682	21	29	the	the	DET
can-1682	21	30	market	market	NOUN
can-1682	21	31	and	and	CCONJ
can-1682	21	32	in	in	ADP
can-1682	21	33	development	development	NOUN
can-1682	21	34	.	.	PUNCT
can-1682	22	1	undoubtedly	undoubtedly	ADV
can-1682	22	2	,	,	PUNCT
can-1682	22	3	the	the	DET
can-1682	22	4	nanostructure	nanostructure	NOUN
can-1682	22	5	that	that	PRON
can-1682	22	6	receives	receive	VERB
can-1682	22	7	more	more	ADJ
can-1682	22	8	attention	attention	NOUN
can-1682	22	9	is	be	AUX
can-1682	22	10	graphene	graphene	ADJ
can-1682	22	11	,	,	PUNCT
can-1682	22	12	for	for	ADP
can-1682	22	13	its	its	PRON
can-1682	22	14	isolation	isolation	NOUN
can-1682	22	15	was	be	AUX
can-1682	22	16	awarded	award	VERB
can-1682	22	17	the	the	DET
can-1682	22	18	nobel	nobel	PROPN
can-1682	22	19	prize	prize	PROPN
can-1682	22	20	in	in	ADP
can-1682	22	21	physics	physics	PROPN
can-1682	22	22	to	to	ADP
can-1682	22	23	novoselov	novoselov	NOUN
can-1682	22	24	and	and	CCONJ
can-1682	22	25	geim	geim	NOUN
can-1682	22	26	in	in	ADP
can-1682	22	27	2010[9	2010[9	NUM
can-1682	22	28	]	]	X
can-1682	22	29	;	;	PUNCT
can-1682	22	30	increasing	increase	VERB
can-1682	22	31	the	the	DET
can-1682	22	32	number	number	NOUN
can-1682	22	33	of	of	ADP
can-1682	22	34	research	research	NOUN
can-1682	22	35	and	and	CCONJ
can-1682	22	36	technological	technological	ADJ
can-1682	22	37	innovation	innovation	NOUN
can-1682	22	38	projects	project	NOUN
can-1682	22	39	in	in	ADP
can-1682	22	40	order	order	NOUN
can-1682	22	41	to	to	PART
can-1682	22	42	enhance	enhance	VERB
can-1682	22	43	the	the	DET
can-1682	22	44	amazing	amazing	ADJ
can-1682	22	45	properties	property	NOUN
can-1682	22	46	of	of	ADP
can-1682	22	47	this	this	DET
can-1682	22	48	material	material	NOUN
can-1682	22	49	.	.	PUNCT
can-1682	23	1	the	the	DET
can-1682	23	2	aforementioned	aforementioned	ADJ
can-1682	23	3	nanostructures	nanostructure	NOUN
can-1682	23	4	,	,	PUNCT
can-1682	23	5	and	and	CCONJ
can-1682	23	6	others	other	NOUN
can-1682	23	7	,	,	PUNCT
can-1682	23	8	are	be	AUX
can-1682	23	9	produced	produce	VERB
can-1682	23	10	by	by	ADP
can-1682	23	11	the	the	DET
can-1682	23	12	cvd	cvd	PROPN
can-1682	23	13	method	method	NOUN
can-1682	23	14	.	.	PUNCT
can-1682	24	1	this	this	DET
can-1682	24	2	review	review	NOUN
can-1682	24	3	article	article	NOUN
can-1682	24	4	aims	aim	VERB
can-1682	24	5	to	to	PART
can-1682	24	6	introduce	introduce	VERB
can-1682	24	7	the	the	DET
can-1682	24	8	reader	reader	NOUN
can-1682	24	9	to	to	ADP
can-1682	24	10	the	the	DET
can-1682	24	11	principles	principle	NOUN
can-1682	24	12	,	,	PUNCT
can-1682	24	13	parameters	parameter	NOUN
can-1682	24	14	and	and	CCONJ
can-1682	24	15	variants	variant	NOUN
can-1682	24	16	of	of	ADP
can-1682	24	17	cvd	cvd	PROPN
can-1682	24	18	for	for	ADP
can-1682	24	19	the	the	DET
can-1682	24	20	synthesis	synthesis	NOUN
can-1682	24	21	of	of	ADP
can-1682	24	22	carbon	carbon	NOUN
can-1682	24	23	nanostructures	nanostructure	NOUN
can-1682	24	24	,	,	PUNCT
can-1682	24	25	in	in	ADP
can-1682	24	26	addition	addition	NOUN
can-1682	24	27	to	to	ADP
can-1682	24	28	listing	list	VERB
can-1682	24	29	the	the	DET
can-1682	24	30	most	most	ADV
can-1682	24	31	common	common	ADJ
can-1682	24	32	carbon	carbon	NOUN
can-1682	24	33	nanomaterials	nanomaterial	NOUN
can-1682	24	34	that	that	PRON
can-1682	24	35	are	be	AUX
can-1682	24	36	produced	produce	VERB
can-1682	24	37	by	by	ADP
can-1682	24	38	this	this	DET
can-1682	24	39	technique	technique	NOUN
can-1682	24	40	and	and	CCONJ
can-1682	24	41	their	their	PRON
can-1682	24	42	synthesis	synthesis	NOUN
can-1682	24	43	conditions	condition	NOUN
can-1682	24	44	.	.	PUNCT
can-1682	25	1	2	2	X
can-1682	25	2	.	.	X
can-1682	25	3	cvd	cvd	PROPN
can-1682	25	4	technique	technique	NOUN
can-1682	25	5	2.1	2.1	NUM
can-1682	25	6	generalities	generality	NOUN
can-1682	25	7	the	the	DET
can-1682	25	8	chemical	chemical	ADJ
can-1682	25	9	vapor	vapor	NOUN
can-1682	25	10	deposition	deposition	NOUN
can-1682	25	11	technique	technique	NOUN
can-1682	25	12	consists	consist	VERB
can-1682	25	13	of	of	ADP
can-1682	25	14	promoting	promote	VERB
can-1682	25	15	chemical	chemical	ADJ
can-1682	25	16	reactions	reaction	NOUN
can-1682	25	17	in	in	ADP
can-1682	25	18	the	the	DET
can-1682	25	19	gaseous	gaseous	ADJ
can-1682	25	20	state	state	NOUN
can-1682	25	21	from	from	ADP
can-1682	25	22	precursors	precursor	NOUN
can-1682	25	23	,	,	PUNCT
can-1682	25	24	which	which	PRON
can-1682	25	25	trigger	trigger	VERB
can-1682	25	26	the	the	DET
can-1682	25	27	formation	formation	NOUN
can-1682	25	28	of	of	ADP
can-1682	25	29	nanomaterials	nanomaterial	NOUN
can-1682	25	30	of	of	ADP
can-1682	25	31	interest	interest	NOUN
can-1682	25	32	.	.	PUNCT
can-1682	26	1	these	these	DET
can-1682	26	2	chemical	chemical	ADJ
can-1682	26	3	reactions	reaction	NOUN
can-1682	26	4	generally	generally	ADV
can-1682	26	5	take	take	VERB
can-1682	26	6	place	place	NOUN
can-1682	26	7	inside	inside	ADP
can-1682	26	8	a	a	DET
can-1682	26	9	reaction	reaction	NOUN
can-1682	26	10	chamber	chamber	NOUN
can-1682	26	11	and	and	CCONJ
can-1682	26	12	are	be	AUX
can-1682	26	13	activated	activate	VERB
can-1682	26	14	by	by	ADP
can-1682	26	15	high	high	ADJ
can-1682	26	16	temperatures	temperature	NOUN
can-1682	26	17	.	.	PUNCT
can-1682	27	1	the	the	DET
can-1682	27	2	reaction	reaction	NOUN
can-1682	27	3	precursors	precursor	NOUN
can-1682	27	4	can	can	AUX
can-1682	27	5	be	be	AUX
can-1682	27	6	in	in	ADP
can-1682	27	7	liquid	liquid	NOUN
can-1682	27	8	,	,	PUNCT
can-1682	27	9	solid	solid	ADJ
can-1682	27	10	or	or	CCONJ
can-1682	27	11	gaseous	gaseous	ADJ
can-1682	27	12	state	state	NOUN
can-1682	27	13	and	and	CCONJ
can-1682	27	14	are	be	AUX
can-1682	27	15	brought	bring	VERB
can-1682	27	16	into	into	ADP
can-1682	27	17	the	the	DET
can-1682	27	18	reaction	reaction	NOUN
can-1682	27	19	chamber	chamber	NOUN
can-1682	27	20	where	where	SCONJ
can-1682	27	21	their	their	PRON
can-1682	27	22	decomposition	decomposition	NOUN
can-1682	27	23	is	be	AUX
can-1682	27	24	promoted	promote	VERB
can-1682	27	25	by	by	ADP
can-1682	27	26	the	the	DET
can-1682	27	27	high	high	ADJ
can-1682	27	28	temperatures	temperature	NOUN
can-1682	27	29	involved	involve	VERB
can-1682	27	30	in	in	ADP
can-1682	27	31	the	the	DET
can-1682	27	32	process	process	NOUN
can-1682	27	33	,	,	PUNCT
can-1682	27	34	generally	generally	ADV
can-1682	27	35	temperatures	temperature	NOUN
can-1682	27	36	for	for	ADP
can-1682	27	37	the	the	DET
can-1682	27	38	synthesis	synthesis	NOUN
can-1682	27	39	of	of	ADP
can-1682	27	40	carbon	carbon	NOUN
can-1682	27	41	nanomaterials	nanomaterial	NOUN
can-1682	27	42	range	range	NOUN
can-1682	27	43	between	between	ADP
can-1682	27	44	800	800	NUM
can-1682	27	45	℃	℃	PROPN
can-1682	27	46	and	and	CCONJ
can-1682	27	47	1,000	1,000	NUM
can-1682	27	48	℃	℃	PROPN
can-1682	27	49	.	.	PUNCT
can-1682	28	1	the	the	DET
can-1682	28	2	reaction	reaction	NOUN
can-1682	28	3	chamber	chamber	PROPN
can-1682	28	4	must	must	AUX
can-1682	28	5	have	have	VERB
can-1682	28	6	an	an	DET
can-1682	28	7	evacuation	evacuation	NOUN
can-1682	28	8	route	route	NOUN
can-1682	28	9	for	for	ADP
can-1682	28	10	the	the	DET
can-1682	28	11	gases	gas	NOUN
can-1682	28	12	that	that	PRON
can-1682	28	13	did	do	AUX
can-1682	28	14	not	not	PART
can-1682	28	15	participate	participate	VERB
can-1682	28	16	in	in	ADP
can-1682	28	17	the	the	DET
can-1682	28	18	reaction	reaction	NOUN
can-1682	28	19	or	or	CCONJ
can-1682	28	20	the	the	DET
can-1682	28	21	vapors	vapor	NOUN
can-1682	28	22	containing	contain	VERB
can-1682	28	23	the	the	DET
can-1682	28	24	products	product	NOUN
can-1682	28	25	that	that	PRON
can-1682	28	26	have	have	AUX
can-1682	28	27	not	not	PART
can-1682	28	28	been	be	AUX
can-1682	28	29	deposited	deposit	VERB
can-1682	28	30	.	.	PUNCT
can-1682	29	1	normally	normally	ADV
can-1682	29	2	at	at	ADP
can-1682	29	3	the	the	DET
can-1682	29	4	exit	exit	NOUN
can-1682	29	5	of	of	ADP
can-1682	29	6	the	the	DET
can-1682	29	7	reaction	reaction	NOUN
can-1682	29	8	chamber	chamber	PROPN
can-1682	29	9	a	a	DET
can-1682	29	10	gas	gas	NOUN
can-1682	29	11	washing	washing	NOUN
can-1682	29	12	or	or	CCONJ
can-1682	29	13	evacuation	evacuation	NOUN
can-1682	29	14	system	system	NOUN
can-1682	29	15	is	be	AUX
can-1682	29	16	located	locate	VERB
can-1682	29	17	by	by	ADP
can-1682	29	18	means	mean	NOUN
can-1682	29	19	of	of	ADP
can-1682	29	20	mechanical	mechanical	ADJ
can-1682	29	21	systems	system	NOUN
can-1682	29	22	(	(	PUNCT
can-1682	29	23	vacuum	vacuum	NOUN
can-1682	29	24	pumps)[10,11	pumps)[10,11	NOUN
can-1682	29	25	]	]	PUNCT
can-1682	29	26	.	.	PUNCT
can-1682	30	1	a	a	DET
can-1682	30	2	cvd	cvd	PROPN
can-1682	30	3	setup	setup	NOUN
can-1682	30	4	can	can	AUX
can-1682	30	5	be	be	AUX
can-1682	30	6	presented	present	VERB
can-1682	30	7	in	in	ADP
can-1682	30	8	horizontal	horizontal	ADJ
can-1682	30	9	or	or	CCONJ
can-1682	30	10	vertical	vertical	ADJ
can-1682	30	11	configuration	configuration	NOUN
can-1682	30	12	,	,	PUNCT
can-1682	30	13	the	the	DET
can-1682	30	14	most	most	ADV
can-1682	30	15	common	common	ADJ
can-1682	30	16	configuration	configuration	NOUN
can-1682	30	17	being	be	AUX
can-1682	30	18	horizontal	horizontal	ADJ
can-1682	30	19	at	at	ADP
can-1682	30	20	the	the	DET
can-1682	30	21	research	research	NOUN
can-1682	30	22	laboratory	laboratory	NOUN
can-1682	30	23	level	level	NOUN
can-1682	30	24	,	,	PUNCT
can-1682	30	25	however	however	ADV
can-1682	30	26	,	,	PUNCT
can-1682	30	27	on	on	ADP
can-1682	30	28	the	the	DET
can-1682	30	29	industrial	industrial	ADJ
can-1682	30	30	scale	scale	NOUN
can-1682	30	31	there	there	PRON
can-1682	30	32	are	be	VERB
can-1682	30	33	equipment	equipment	NOUN
can-1682	30	34	in	in	ADP
can-1682	30	35	vertical	vertical	ADJ
can-1682	30	36	format	format	NOUN
can-1682	30	37	.	.	PUNCT
can-1682	31	1	for	for	ADP
can-1682	31	2	the	the	DET
can-1682	31	3	reaction	reaction	NOUN
can-1682	31	4	chamber	chamber	PROPN
can-1682	31	5	a	a	DET
can-1682	31	6	material	material	NOUN
can-1682	31	7	is	be	AUX
can-1682	31	8	required	require	VERB
can-1682	31	9	that	that	SCONJ
can-1682	31	10	resists	resist	VERB
can-1682	31	11	exposure	exposure	NOUN
can-1682	31	12	to	to	ADP
can-1682	31	13	high	high	ADJ
can-1682	31	14	temperatures	temperature	NOUN
can-1682	31	15	,	,	PUNCT
can-1682	31	16	which	which	PRON
can-1682	31	17	at	at	ADP
can-1682	31	18	the	the	DET
can-1682	31	19	same	same	ADJ
can-1682	31	20	time	time	NOUN
can-1682	31	21	is	be	AUX
can-1682	31	22	inert	inert	ADJ
can-1682	31	23	and	and	CCONJ
can-1682	31	24	does	do	AUX
can-1682	31	25	not	not	PART
can-1682	31	26	participate	participate	VERB
can-1682	31	27	in	in	ADP
can-1682	31	28	the	the	DET
can-1682	31	29	reactions	reaction	NOUN
can-1682	31	30	of	of	ADP
can-1682	31	31	the	the	DET
can-1682	31	32	process	process	NOUN
can-1682	31	33	;	;	PUNCT
can-1682	31	34	the	the	DET
can-1682	31	35	most	most	ADV
can-1682	31	36	common	common	ADJ
can-1682	31	37	is	be	AUX
can-1682	31	38	to	to	PART
can-1682	31	39	use	use	VERB
can-1682	31	40	quartz	quartz	NOUN
can-1682	31	41	or	or	CCONJ
can-1682	31	42	alumina	alumina	NOUN
can-1682	31	43	.	.	PUNCT
can-1682	32	1	figure	figure	NOUN
can-1682	32	2	1	1	NUM
can-1682	32	3	.	.	PUNCT
can-1682	32	4	models	model	NOUN
can-1682	32	5	of	of	ADP
can-1682	32	6	the	the	DET
can-1682	32	7	most	most	ADV
can-1682	32	8	representative	representative	ADJ
can-1682	32	9	carbon	carbon	NOUN
can-1682	32	10	nanostructures[12–16	nanostructures[12–16	NOUN
can-1682	32	11	]	]	PUNCT
can-1682	32	12	.	.	PUNCT
can-1682	33	1	although	although	SCONJ
can-1682	33	2	there	there	PRON
can-1682	33	3	are	be	VERB
can-1682	33	4	various	various	ADJ
can-1682	33	5	configurations	configuration	NOUN
can-1682	33	6	,	,	PUNCT
can-1682	33	7	the	the	DET
can-1682	33	8	most	most	ADV
can-1682	33	9	used	used	ADJ
can-1682	33	10	is	be	AUX
can-1682	33	11	to	to	PART
can-1682	33	12	place	place	VERB
can-1682	33	13	a	a	DET
can-1682	33	14	quartz	quartz	NOUN
can-1682	33	15	tube	tube	NOUN
can-1682	33	16	inside	inside	ADP
can-1682	33	17	an	an	DET
can-1682	33	18	electric	electric	ADJ
can-1682	33	19	tubular	tubular	ADJ
can-1682	33	20	furnace	furnace	NOUN
can-1682	33	21	,	,	PUNCT
can-1682	33	22	as	as	SCONJ
can-1682	33	23	exemplified	exemplify	VERB
can-1682	33	24	in	in	ADP
can-1682	33	25	figure	figure	NOUN
can-1682	33	26	2	2	NUM
can-1682	33	27	.	.	PUNCT
can-1682	34	1	the	the	DET
can-1682	34	2	region	region	NOUN
can-1682	34	3	of	of	ADP
can-1682	34	4	the	the	DET
can-1682	34	5	quartz	quartz	NOUN
can-1682	34	6	tube	tube	NOUN
can-1682	34	7	inside	inside	ADP
can-1682	34	8	the	the	DET
can-1682	34	9	furnace	furnace	NOUN
can-1682	34	10	is	be	AUX
can-1682	34	11	considered	consider	VERB
can-1682	34	12	the	the	DET
can-1682	34	13	reaction	reaction	NOUN
can-1682	34	14	chamber	chamber	PROPN
can-1682	34	15	,	,	PUNCT
can-1682	34	16	and	and	CCONJ
can-1682	34	17	at	at	ADP
can-1682	34	18	the	the	DET
can-1682	34	19	ends	end	NOUN
can-1682	34	20	of	of	ADP
can-1682	34	21	the	the	DET
can-1682	34	22	tube	tube	NOUN
can-1682	34	23	,	,	PUNCT
can-1682	34	24	at	at	ADP
can-1682	34	25	the	the	DET
can-1682	34	26	inlet	inlet	NOUN
can-1682	34	27	and	and	CCONJ
can-1682	34	28	outlet	outlet	NOUN
can-1682	34	29	,	,	PUNCT
can-1682	34	30	borosilicate	borosilicate	ADJ
can-1682	34	31	glass	glass	NOUN
can-1682	34	32	gaskets	gasket	NOUN
can-1682	34	33	are	be	AUX
can-1682	34	34	placed	place	VERB
can-1682	34	35	to	to	PART
can-1682	34	36	allow	allow	VERB
can-1682	34	37	the	the	DET
can-1682	34	38	coupling	coupling	NOUN
can-1682	34	39	of	of	ADP
can-1682	34	40	the	the	DET
can-1682	34	41	pipes	pipe	NOUN
can-1682	34	42	for	for	ADP
can-1682	34	43	the	the	DET
can-1682	34	44	delivery	delivery	NOUN
can-1682	34	45	of	of	ADP
can-1682	34	46	the	the	DET
can-1682	34	47	precursors	precursor	NOUN
can-1682	34	48	through	through	ADP
can-1682	34	49	the	the	DET
can-1682	34	50	flow	flow	NOUN
can-1682	34	51	of	of	ADP
can-1682	34	52	a	a	DET
can-1682	34	53	carrier	carrier	NOUN
can-1682	34	54	gas[17	gas[17	PROPN
can-1682	34	55	]	]	PUNCT
can-1682	34	56	.	.	PUNCT
can-1682	35	1	the	the	DET
can-1682	35	2	obvious	obvious	ADJ
can-1682	35	3	choice	choice	NOUN
can-1682	35	4	of	of	ADP
can-1682	35	5	carrier	carrier	NOUN
can-1682	35	6	gas	gas	NOUN
can-1682	35	7	is	be	AUX
can-1682	35	8	argon	argon	NOUN
can-1682	35	9	gas	gas	NOUN
can-1682	35	10	,	,	PUNCT
can-1682	35	11	as	as	SCONJ
can-1682	35	12	it	it	PRON
can-1682	35	13	is	be	AUX
can-1682	35	14	inert	inert	ADJ
can-1682	35	15	and	and	CCONJ
can-1682	35	16	easily	easily	ADV
can-1682	35	17	accessible	accessible	ADJ
can-1682	35	18	,	,	PUNCT
can-1682	35	19	although	although	SCONJ
can-1682	35	20	some	some	DET
can-1682	35	21	groups	group	NOUN
can-1682	35	22	choose	choose	VERB
can-1682	35	23	nitrogen	nitrogen	NOUN
can-1682	35	24	(	(	PUNCT
can-1682	35	25	n2	n2	NOUN
can-1682	35	26	)	)	PUNCT
can-1682	35	27	as	as	ADP
can-1682	35	28	the	the	DET
can-1682	35	29	gas	gas	NOUN
can-1682	35	30	in	in	ADP
can-1682	35	31	the	the	DET
can-1682	35	32	system	system	NOUN
can-1682	35	33	;	;	PUNCT
can-1682	35	34	hydrogen	hydrogen	NOUN
can-1682	35	35	(	(	PUNCT
can-1682	35	36	h2	h2	PROPN
can-1682	35	37	)	)	PUNCT
can-1682	35	38	,	,	PUNCT
can-1682	35	39	which	which	PRON
can-1682	35	40	is	be	AUX
can-1682	35	41	important	important	ADJ
can-1682	35	42	in	in	ADP
can-1682	35	43	the	the	DET
can-1682	35	44	decomposition	decomposition	NOUN
can-1682	35	45	of	of	ADP
can-1682	35	46	precursors	precursor	NOUN
can-1682	35	47	,	,	PUNCT
can-1682	35	48	is	be	AUX
can-1682	35	49	also	also	ADV
can-1682	35	50	used	use	VERB
can-1682	35	51	in	in	ADP
can-1682	35	52	some	some	DET
can-1682	35	53	processes	process	NOUN
can-1682	35	54	.	.	PUNCT
can-1682	36	1	substrates	substrate	NOUN
can-1682	36	2	with	with	ADP
can-1682	36	3	specific	specific	ADJ
can-1682	36	4	properties	property	NOUN
can-1682	36	5	can	can	AUX
can-1682	36	6	be	be	AUX
can-1682	36	7	introduced	introduce	VERB
can-1682	36	8	into	into	ADP
can-1682	36	9	the	the	DET
can-1682	36	10	reaction	reaction	NOUN
can-1682	36	11	chamber	chamber	NOUN
can-1682	36	12	and	and	CCONJ
can-1682	36	13	promote	promote	VERB
can-1682	36	14	the	the	DET
can-1682	36	15	deposition	deposition	NOUN
can-1682	36	16	of	of	ADP
can-1682	36	17	the	the	DET
can-1682	36	18	nanomaterials	nanomaterial	NOUN
can-1682	36	19	on	on	ADP
can-1682	36	20	its	its	PRON
can-1682	36	21	81	81	NUM
can-1682	36	22	surface	surface	NOUN
can-1682	36	23	,	,	PUNCT
can-1682	36	24	although	although	SCONJ
can-1682	36	25	generally	generally	ADV
can-1682	36	26	,	,	PUNCT
can-1682	36	27	the	the	DET
can-1682	36	28	quartz	quartz	NOUN
can-1682	36	29	tube	tube	NOUN
can-1682	36	30	walls	wall	NOUN
can-1682	36	31	themselves	themselves	PRON
can-1682	36	32	serve	serve	VERB
can-1682	36	33	as	as	ADP
can-1682	36	34	substrates	substrate	NOUN
can-1682	36	35	for	for	ADP
can-1682	36	36	the	the	DET
can-1682	36	37	deposition	deposition	NOUN
can-1682	36	38	of	of	ADP
can-1682	36	39	the	the	DET
can-1682	36	40	reaction	reaction	NOUN
can-1682	36	41	products	product	NOUN
can-1682	36	42	,	,	PUNCT
can-1682	36	43	except	except	SCONJ
can-1682	36	44	in	in	ADP
can-1682	36	45	cases	case	NOUN
can-1682	36	46	where	where	SCONJ
can-1682	36	47	the	the	DET
can-1682	36	48	synthesis	synthesis	NOUN
can-1682	36	49	requires	require	VERB
can-1682	36	50	a	a	DET
can-1682	36	51	catalyst	catalyst	NOUN
can-1682	36	52	and	and	CCONJ
can-1682	36	53	this	this	PRON
can-1682	36	54	is	be	AUX
can-1682	36	55	not	not	PART
can-1682	36	56	present	present	ADJ
can-1682	36	57	among	among	ADP
can-1682	36	58	the	the	DET
can-1682	36	59	precursors	precursor	NOUN
can-1682	36	60	,	,	PUNCT
can-1682	36	61	as	as	SCONJ
can-1682	36	62	will	will	AUX
can-1682	36	63	be	be	AUX
can-1682	36	64	detailed	detail	VERB
can-1682	36	65	later[18	later[18	NOUN
can-1682	36	66	]	]	PUNCT
can-1682	36	67	.	.	PUNCT
can-1682	37	1	the	the	DET
can-1682	37	2	most	most	ADV
can-1682	37	3	common	common	ADJ
can-1682	37	4	precursors	precursor	NOUN
can-1682	37	5	for	for	ADP
can-1682	37	6	the	the	DET
can-1682	37	7	synthesis	synthesis	NOUN
can-1682	37	8	of	of	ADP
can-1682	37	9	carbon	carbon	NOUN
can-1682	37	10	nanostructures	nanostructure	NOUN
can-1682	37	11	are	be	AUX
can-1682	37	12	hydrocarbons	hydrocarbon	NOUN
can-1682	37	13	,	,	PUNCT
can-1682	37	14	although	although	SCONJ
can-1682	37	15	it	it	PRON
can-1682	37	16	has	have	AUX
can-1682	37	17	been	be	AUX
can-1682	37	18	shown	show	VERB
can-1682	37	19	that	that	SCONJ
can-1682	37	20	thermal	thermal	ADJ
can-1682	37	21	decomposition	decomposition	NOUN
can-1682	37	22	of	of	ADP
can-1682	37	23	any	any	DET
can-1682	37	24	carbon	carbon	NOUN
can-1682	37	25	source	source	NOUN
can-1682	37	26	can	can	AUX
can-1682	37	27	be	be	AUX
can-1682	37	28	successful	successful	ADJ
can-1682	37	29	in	in	ADP
can-1682	37	30	the	the	DET
can-1682	37	31	production	production	NOUN
can-1682	37	32	of	of	ADP
can-1682	37	33	carbon	carbon	NOUN
can-1682	37	34	nanostructures	nanostructure	NOUN
can-1682	37	35	.	.	PUNCT
can-1682	38	1	specifically	specifically	ADV
can-1682	38	2	for	for	ADP
can-1682	38	3	graphene	graphene	NOUN
can-1682	38	4	,	,	PUNCT
can-1682	38	5	its	its	PRON
can-1682	38	6	synthesis	synthesis	NOUN
can-1682	38	7	using	use	VERB
can-1682	38	8	cvd	cvd	PROPN
can-1682	38	9	from	from	ADP
can-1682	38	10	insects	insect	NOUN
can-1682	38	11	or	or	CCONJ
can-1682	38	12	cookies	cookie	NOUN
can-1682	38	13	has	have	AUX
can-1682	38	14	been	be	AUX
can-1682	38	15	demonstrated[19	demonstrated[19	NOUN
can-1682	38	16	]	]	PUNCT
can-1682	38	17	.	.	PUNCT
can-1682	39	1	figure	figure	NOUN
can-1682	39	2	2	2	NUM
can-1682	39	3	.	.	PUNCT
can-1682	39	4	detailed	detailed	ADJ
can-1682	39	5	diagrams	diagram	NOUN
can-1682	39	6	of	of	ADP
can-1682	39	7	the	the	DET
can-1682	39	8	different	different	ADJ
can-1682	39	9	cvd	cvd	PROPN
can-1682	39	10	variants	variant	NOUN
can-1682	39	11	.	.	PUNCT
can-1682	40	1	apcvd	apcvd	NOUN
can-1682	40	2	:	:	PUNCT
can-1682	40	3	atmospheric	atmospheric	ADJ
can-1682	40	4	pressure	pressure	NOUN
can-1682	40	5	cvd	cvd	PROPN
can-1682	40	6	,	,	PUNCT
can-1682	40	7	aacvd	aacvd	NOUN
can-1682	40	8	:	:	PUNCT
can-1682	40	9	aerosol	aerosol	NOUN
can-1682	40	10	assisted	assist	VERB
can-1682	40	11	cvd[21	cvd[21	ADV
can-1682	40	12	]	]	PUNCT
can-1682	40	13	,	,	PUNCT
can-1682	40	14	lpcvd	lpcvd	NOUN
can-1682	40	15	:	:	PUNCT
can-1682	40	16	low	low	ADJ
can-1682	40	17	pressure	pressure	NOUN
can-1682	40	18	cvd[22	cvd[22	NOUN
can-1682	40	19	]	]	PUNCT
can-1682	40	20	and	and	CCONJ
can-1682	40	21	pecvd	pecvd	NOUN
can-1682	40	22	:	:	PUNCT
can-1682	40	23	plasma	plasma	NOUN
can-1682	40	24	enhanced	enhance	VERB
can-1682	40	25	cvd[23,24	cvd[23,24	ADV
can-1682	40	26	]	]	PUNCT
can-1682	40	27	.	.	PUNCT
can-1682	41	1	the	the	DET
can-1682	41	2	synthesis	synthesis	NOUN
can-1682	41	3	of	of	ADP
can-1682	41	4	some	some	DET
can-1682	41	5	carbon	carbon	NOUN
can-1682	41	6	nanostructures	nanostructure	NOUN
can-1682	41	7	,	,	PUNCT
can-1682	41	8	such	such	ADJ
can-1682	41	9	as	as	ADP
can-1682	41	10	nanotubes	nanotube	NOUN
can-1682	41	11	,	,	PUNCT
can-1682	41	12	requires	require	VERB
can-1682	41	13	the	the	DET
can-1682	41	14	presence	presence	NOUN
can-1682	41	15	of	of	ADP
can-1682	41	16	catalysts	catalyst	NOUN
can-1682	41	17	.	.	PUNCT
can-1682	42	1	the	the	DET
can-1682	42	2	catalysts	catalyst	NOUN
can-1682	42	3	normally	normally	ADV
can-1682	42	4	used	use	VERB
can-1682	42	5	are	be	AUX
can-1682	42	6	metals	metal	NOUN
can-1682	42	7	such	such	ADJ
can-1682	42	8	as	as	ADP
can-1682	42	9	iron	iron	NOUN
can-1682	42	10	,	,	PUNCT
can-1682	42	11	cobalt	cobalt	NOUN
can-1682	42	12	or	or	CCONJ
can-1682	42	13	nickel	nickel	NOUN
can-1682	42	14	.	.	PUNCT
can-1682	43	1	a	a	DET
can-1682	43	2	successful	successful	ADJ
can-1682	43	3	way	way	NOUN
can-1682	43	4	to	to	PART
can-1682	43	5	provide	provide	VERB
can-1682	43	6	such	such	ADJ
can-1682	43	7	elements	element	NOUN
can-1682	43	8	to	to	ADP
can-1682	43	9	the	the	DET
can-1682	43	10	system	system	NOUN
can-1682	43	11	is	be	AUX
can-1682	43	12	by	by	ADP
can-1682	43	13	organometallic	organometallic	ADJ
can-1682	43	14	molecules	molecule	NOUN
can-1682	43	15	(	(	PUNCT
can-1682	43	16	ferrocene	ferrocene	NOUN
can-1682	43	17	,	,	PUNCT
can-1682	43	18	cobaltocene	cobaltocene	NOUN
can-1682	43	19	,	,	PUNCT
can-1682	43	20	nickelocene	nickelocene	NOUN
can-1682	43	21	)	)	PUNCT
can-1682	43	22	that	that	PRON
can-1682	43	23	are	be	AUX
can-1682	43	24	mixed	mix	VERB
can-1682	43	25	with	with	ADP
can-1682	43	26	the	the	DET
can-1682	43	27	carbon	carbon	NOUN
can-1682	43	28	precursor	precursor	NOUN
can-1682	43	29	.	.	PUNCT
can-1682	44	1	there	there	PRON
can-1682	44	2	are	be	VERB
can-1682	44	3	two	two	NUM
can-1682	44	4	ways	way	NOUN
can-1682	44	5	of	of	ADP
can-1682	44	6	providing	provide	VERB
can-1682	44	7	the	the	DET
can-1682	44	8	catalysts	catalyst	NOUN
can-1682	44	9	to	to	ADP
can-1682	44	10	the	the	DET
can-1682	44	11	system	system	NOUN
can-1682	44	12	,	,	PUNCT
can-1682	44	13	the	the	DET
can-1682	44	14	first	first	ADJ
can-1682	44	15	is	be	AUX
can-1682	44	16	called	call	VERB
can-1682	44	17	“	"	PUNCT
can-1682	44	18	floating	float	VERB
can-1682	44	19	catalyst	catalyst	NOUN
can-1682	44	20	”	"	PUNCT
can-1682	44	21	and	and	CCONJ
can-1682	44	22	the	the	DET
can-1682	44	23	second	second	ADJ
can-1682	44	24	“	"	PUNCT
can-1682	44	25	seeded	seeded	ADJ
can-1682	44	26	catalyst	catalyst	NOUN
can-1682	44	27	”	"	PUNCT
can-1682	44	28	(	(	PUNCT
can-1682	44	29	floating	float	VERB
can-1682	44	30	catalyst	catalyst	NOUN
can-1682	44	31	and	and	CCONJ
can-1682	44	32	seeded	seeded	ADJ
can-1682	44	33	catalyst	catalyst	NOUN
can-1682	44	34	,	,	PUNCT
can-1682	44	35	respectively	respectively	ADV
can-1682	44	36	)	)	PUNCT
can-1682	44	37	,	,	PUNCT
can-1682	44	38	illustrated	illustrate	VERB
can-1682	44	39	in	in	ADP
can-1682	44	40	figure	figure	NOUN
can-1682	44	41	3	3	NUM
can-1682	44	42	.	.	PUNCT
can-1682	45	1	the	the	DET
can-1682	45	2	floating	float	VERB
can-1682	45	3	catalyst	catalyst	NOUN
can-1682	45	4	process	process	NOUN
can-1682	45	5	is	be	AUX
can-1682	45	6	characterized	characterize	VERB
can-1682	45	7	by	by	ADP
can-1682	45	8	the	the	DET
can-1682	45	9	use	use	NOUN
can-1682	45	10	of	of	ADP
can-1682	45	11	gaseous	gaseous	ADJ
can-1682	45	12	or	or	CCONJ
can-1682	45	13	solution	solution	NOUN
can-1682	45	14	catalysts	catalyst	NOUN
can-1682	45	15	mixed	mix	VERB
can-1682	45	16	with	with	ADP
can-1682	45	17	the	the	DET
can-1682	45	18	carbon	carbon	NOUN
can-1682	45	19	precursor	precursor	NOUN
can-1682	45	20	,	,	PUNCT
can-1682	45	21	which	which	PRON
can-1682	45	22	“	"	PUNCT
can-1682	45	23	float	float	NOUN
can-1682	45	24	”	"	PUNCT
can-1682	45	25	into	into	ADP
can-1682	45	26	the	the	DET
can-1682	45	27	reaction	reaction	NOUN
can-1682	45	28	chamber	chamber	NOUN
can-1682	45	29	.	.	PUNCT
can-1682	46	1	these	these	DET
can-1682	46	2	catalysts	catalyst	NOUN
can-1682	46	3	are	be	AUX
can-1682	46	4	used	use	VERB
can-1682	46	5	to	to	PART
can-1682	46	6	favor	favor	VERB
can-1682	46	7	the	the	DET
can-1682	46	8	decomposition	decomposition	NOUN
can-1682	46	9	reactions	reaction	NOUN
can-1682	46	10	of	of	ADP
can-1682	46	11	the	the	DET
can-1682	46	12	precursor	precursor	NOUN
can-1682	46	13	,	,	PUNCT
can-1682	46	14	lowering	lower	VERB
can-1682	46	15	the	the	DET
can-1682	46	16	temperature	temperature	NOUN
can-1682	46	17	required	require	VERB
can-1682	46	18	for	for	ADP
can-1682	46	19	the	the	DET
can-1682	46	20	process	process	NOUN
can-1682	46	21	.	.	PUNCT
can-1682	47	1	in	in	ADP
can-1682	47	2	this	this	DET
can-1682	47	3	technique	technique	NOUN
can-1682	47	4	in	in	ADP
can-1682	47	5	particular	particular	ADJ
can-1682	47	6	,	,	PUNCT
can-1682	47	7	as	as	SCONJ
can-1682	47	8	the	the	DET
can-1682	47	9	catalyst	catalyst	NOUN
can-1682	47	10	is	be	AUX
can-1682	47	11	floating	float	VERB
can-1682	47	12	,	,	PUNCT
can-1682	47	13	it	it	PRON
can-1682	47	14	interacts	interact	VERB
can-1682	47	15	favorably	favorably	ADV
can-1682	47	16	with	with	ADP
can-1682	47	17	the	the	DET
can-1682	47	18	precursor	precursor	NOUN
can-1682	47	19	gas	gas	NOUN
can-1682	47	20	,	,	PUNCT
can-1682	47	21	favoring	favor	VERB
can-1682	47	22	easier	easy	ADJ
can-1682	47	23	and	and	CCONJ
can-1682	47	24	faster	fast	ADJ
can-1682	47	25	decomposition[25	decomposition[25	NOUN
can-1682	47	26	]	]	PUNCT
can-1682	47	27	.	.	PUNCT
can-1682	48	1	in	in	ADP
can-1682	48	2	the	the	DET
can-1682	48	3	seeded	seeded	ADJ
can-1682	48	4	catalyst	catalyst	NOUN
can-1682	48	5	mode	mode	NOUN
can-1682	48	6	,	,	PUNCT
can-1682	48	7	solid	solid	ADJ
can-1682	48	8	catalysts	catalyst	NOUN
can-1682	48	9	“	"	PUNCT
can-1682	48	10	seeded	seed	VERB
can-1682	48	11	”	"	PUNCT
can-1682	48	12	or	or	CCONJ
can-1682	48	13	attached	attach	VERB
can-1682	48	14	to	to	ADP
can-1682	48	15	the	the	DET
can-1682	48	16	substrate	substrate	NOUN
can-1682	48	17	where	where	SCONJ
can-1682	48	18	the	the	DET
can-1682	48	19	nanomaterials	nanomaterial	NOUN
can-1682	48	20	will	will	AUX
can-1682	48	21	be	be	AUX
can-1682	48	22	deposited	deposit	VERB
can-1682	48	23	,	,	PUNCT
can-1682	48	24	serve	serve	VERB
can-1682	48	25	as	as	ADP
can-1682	48	26	nucleation	nucleation	NOUN
can-1682	48	27	points	point	NOUN
can-1682	48	28	and	and	CCONJ
can-1682	48	29	the	the	DET
can-1682	48	30	substrate	substrate	NOUN
can-1682	48	31	is	be	AUX
can-1682	48	32	placed	place	VERB
can-1682	48	33	inside	inside	ADP
can-1682	48	34	the	the	DET
can-1682	48	35	reaction	reaction	NOUN
can-1682	48	36	chamber	chamber	PROPN
can-1682	48	37	.	.	PUNCT
can-1682	49	1	as	as	SCONJ
can-1682	49	2	the	the	DET
can-1682	49	3	precursor	precursor	NOUN
can-1682	49	4	decomposes	decompose	VERB
can-1682	49	5	into	into	ADP
can-1682	49	6	individual	individual	ADJ
can-1682	49	7	particles	particle	NOUN
can-1682	49	8	or	or	CCONJ
can-1682	49	9	atoms	atom	NOUN
can-1682	49	10	,	,	PUNCT
can-1682	49	11	they	they	PRON
can-1682	49	12	will	will	AUX
can-1682	49	13	be	be	AUX
can-1682	49	14	placed	place	VERB
can-1682	49	15	around	around	ADV
can-1682	49	16	or	or	CCONJ
can-1682	49	17	on	on	ADP
can-1682	49	18	the	the	DET
can-1682	49	19	catalysts	catalyst	NOUN
can-1682	49	20	to	to	PART
can-1682	49	21	form	form	VERB
can-1682	49	22	the	the	DET
can-1682	49	23	final	final	ADJ
can-1682	49	24	carbon	carbon	NOUN
can-1682	49	25	nanostructure	nanostructure	NOUN
can-1682	49	26	.	.	PUNCT
can-1682	50	1	this	this	DET
can-1682	50	2	procedure	procedure	NOUN
can-1682	50	3	is	be	AUX
can-1682	50	4	widely	widely	ADV
can-1682	50	5	used	use	VERB
can-1682	50	6	in	in	ADP
can-1682	50	7	the	the	DET
can-1682	50	8	synthesis	synthesis	NOUN
can-1682	50	9	of	of	ADP
can-1682	50	10	carbon	carbon	NOUN
can-1682	50	11	nanotubes	nanotube	NOUN
can-1682	50	12	since	since	SCONJ
can-1682	50	13	from	from	ADP
can-1682	50	14	this	this	DET
can-1682	50	15	“	"	PUNCT
can-1682	50	16	seed	seed	NOUN
can-1682	50	17	”	"	PUNCT
can-1682	50	18	the	the	DET
can-1682	50	19	tubes	tube	NOUN
can-1682	50	20	can	can	AUX
can-1682	50	21	be	be	AUX
can-1682	50	22	elongated	elongate	VERB
can-1682	50	23	vertically[26	vertically[26	NOUN
can-1682	50	24	]	]	X
can-1682	50	25	;	;	PUNCT
can-1682	50	26	it	it	PRON
can-1682	50	27	also	also	ADV
can-1682	50	28	allows	allow	VERB
can-1682	50	29	the	the	DET
can-1682	50	30	growth	growth	NOUN
can-1682	50	31	of	of	ADP
can-1682	50	32	nanotubes	nanotube	NOUN
can-1682	50	33	on	on	ADP
can-1682	50	34	the	the	DET
can-1682	50	35	substrates	substrate	NOUN
can-1682	50	36	,	,	PUNCT
can-1682	50	37	obeying	obey	VERB
can-1682	50	38	specific	specific	ADJ
can-1682	50	39	patterns	pattern	NOUN
can-1682	50	40	,	,	PUNCT
can-1682	50	41	since	since	SCONJ
can-1682	50	42	in	in	ADP
can-1682	50	43	areas	area	NOUN
can-1682	50	44	without	without	ADP
can-1682	50	45	a	a	DET
can-1682	50	46	seeded	seeded	ADJ
can-1682	50	47	catalyst	catalyst	NOUN
can-1682	50	48	growth	growth	NOUN
can-1682	50	49	is	be	AUX
can-1682	50	50	not	not	PART
can-1682	50	51	favored	favor	VERB
can-1682	50	52	.	.	PUNCT
can-1682	51	1	2.2	2.2	NUM
can-1682	51	2	variants	variant	NOUN
can-1682	51	3	there	there	PRON
can-1682	51	4	are	be	VERB
can-1682	51	5	variants	variant	NOUN
can-1682	51	6	in	in	ADP
can-1682	51	7	the	the	DET
can-1682	51	8	cvd	cvd	PROPN
can-1682	51	9	process	process	NOUN
can-1682	51	10	,	,	PUNCT
can-1682	51	11	some	some	PRON
can-1682	51	12	of	of	ADP
can-1682	51	13	them	they	PRON
can-1682	51	14	are	be	AUX
can-1682	51	15	:	:	PUNCT
can-1682	51	16	atmospheric	atmospheric	ADJ
can-1682	51	17	pressure	pressure	NOUN
can-1682	51	18	chemical	chemical	NOUN
can-1682	51	19	vapor	vapor	NOUN
can-1682	51	20	deposition	deposition	NOUN
can-1682	51	21	(	(	PUNCT
can-1682	51	22	apcvd	apcvd	NOUN
can-1682	51	23	)	)	PUNCT
can-1682	51	24	,	,	PUNCT
can-1682	51	25	low	low	ADJ
can-1682	51	26	pressure	pressure	NOUN
can-1682	51	27	chemical	chemical	NOUN
can-1682	51	28	vapor	vapor	NOUN
can-1682	51	29	deposition	deposition	NOUN
can-1682	51	30	(	(	PUNCT
can-1682	51	31	lpcvd	lpcvd	NOUN
can-1682	51	32	)	)	PUNCT
can-1682	51	33	,	,	PUNCT
can-1682	51	34	aerosol	aerosol	NOUN
can-1682	51	35	assisted	assist	VERB
can-1682	51	36	chemical	chemical	PROPN
can-1682	51	37	va	va	PROPN
can-1682	51	38	82	82	NUM
can-1682	51	39	por	por	NOUN
can-1682	51	40	deposition	deposition	NOUN
can-1682	51	41	(	(	PUNCT
can-1682	51	42	aacvd	aacvd	NOUN
can-1682	51	43	)	)	PUNCT
can-1682	51	44	,	,	PUNCT
can-1682	51	45	plasma	plasma	NOUN
can-1682	51	46	activated	activate	VERB
can-1682	51	47	chemical	chemical	NOUN
can-1682	51	48	vapor	vapor	NOUN
can-1682	51	49	deposition	deposition	NOUN
can-1682	51	50	(	(	PUNCT
can-1682	51	51	pecvd	pecvd	NOUN
can-1682	51	52	)	)	PUNCT
can-1682	51	53	and	and	CCONJ
can-1682	51	54	microwave	microwave	NOUN
can-1682	51	55	assisted	assist	VERB
can-1682	51	56	chemical	chemical	NOUN
can-1682	51	57	vapor	vapor	NOUN
can-1682	51	58	deposition	deposition	NOUN
can-1682	51	59	and	and	CCONJ
can-1682	51	60	plasma	plasma	NOUN
can-1682	51	61	activation	activation	NOUN
can-1682	51	62	(	(	PUNCT
can-1682	51	63	mw	mw	NOUN
can-1682	51	64	-	-	NOUN
can-1682	51	65	pecvd	pecvd	NOUN
can-1682	51	66	)	)	PUNCT
can-1682	51	67	,	,	PUNCT
can-1682	51	68	described	describe	VERB
can-1682	51	69	in	in	ADP
can-1682	51	70	the	the	DET
can-1682	51	71	following	follow	VERB
can-1682	51	72	lines	line	NOUN
can-1682	51	73	and	and	CCONJ
can-1682	51	74	illustrated	illustrate	VERB
can-1682	51	75	in	in	ADP
can-1682	51	76	figure	figure	NOUN
can-1682	51	77	2	2	NUM
can-1682	51	78	.	.	NOUN
can-1682	51	79	2.3	2.3	NUM
can-1682	51	80	ambient	ambient	ADJ
can-1682	51	81	pressure	pressure	NOUN
can-1682	51	82	chemical	chemical	NOUN
can-1682	51	83	vapor	vapor	NOUN
can-1682	51	84	deposition	deposition	NOUN
can-1682	51	85	(	(	PUNCT
can-1682	51	86	apcvd	apcvd	NOUN
can-1682	51	87	)	)	PUNCT
can-1682	51	88	this	this	PRON
can-1682	51	89	is	be	AUX
can-1682	51	90	the	the	DET
can-1682	51	91	most	most	ADV
can-1682	51	92	common	common	ADJ
can-1682	51	93	form	form	NOUN
can-1682	51	94	,	,	PUNCT
can-1682	51	95	described	describe	VERB
can-1682	51	96	above	above	ADV
can-1682	51	97	,	,	PUNCT
can-1682	51	98	and	and	CCONJ
can-1682	51	99	is	be	AUX
can-1682	51	100	operated	operate	VERB
can-1682	51	101	at	at	ADP
can-1682	51	102	a	a	DET
can-1682	51	103	pressure	pressure	NOUN
can-1682	51	104	of	of	ADP
can-1682	51	105	1	1	NUM
can-1682	51	106	atm	atm	NOUN
can-1682	51	107	(	(	PUNCT
can-1682	51	108	ambient	ambient	ADJ
can-1682	51	109	pressure	pressure	NOUN
can-1682	51	110	)	)	PUNCT
can-1682	51	111	.	.	PUNCT
can-1682	52	1	a	a	DET
can-1682	52	2	vacuum	vacuum	NOUN
can-1682	52	3	pump	pump	NOUN
can-1682	52	4	is	be	AUX
can-1682	52	5	not	not	PART
can-1682	52	6	used	use	VERB
can-1682	52	7	to	to	PART
can-1682	52	8	regulate	regulate	VERB
can-1682	52	9	the	the	DET
can-1682	52	10	pressure	pressure	NOUN
can-1682	52	11	.	.	PUNCT
can-1682	53	1	the	the	DET
can-1682	53	2	precursor	precursor	NOUN
can-1682	53	3	is	be	AUX
can-1682	53	4	usually	usually	ADV
can-1682	53	5	a	a	DET
can-1682	53	6	liquid	liquid	NOUN
can-1682	53	7	or	or	CCONJ
can-1682	53	8	a	a	DET
can-1682	53	9	dissolved	dissolve	VERB
can-1682	53	10	solid	solid	ADJ
can-1682	53	11	,	,	PUNCT
can-1682	53	12	so	so	CCONJ
can-1682	53	13	it	it	PRON
can-1682	53	14	is	be	AUX
can-1682	53	15	heated	heat	VERB
can-1682	53	16	to	to	ADP
can-1682	53	17	sufficiently	sufficiently	ADV
can-1682	53	18	high	high	ADJ
can-1682	53	19	temperatures	temperature	NOUN
can-1682	53	20	so	so	SCONJ
can-1682	53	21	that	that	SCONJ
can-1682	53	22	it	it	PRON
can-1682	53	23	begins	begin	VERB
can-1682	53	24	to	to	PART
can-1682	53	25	evaporate	evaporate	VERB
can-1682	53	26	and	and	CCONJ
can-1682	53	27	a	a	DET
can-1682	53	28	vapor	vapor	NOUN
can-1682	53	29	cloud	cloud	NOUN
can-1682	53	30	is	be	AUX
can-1682	53	31	generated	generate	VERB
can-1682	53	32	.	.	PUNCT
can-1682	54	1	the	the	DET
can-1682	54	2	carrier	carrier	NOUN
can-1682	54	3	gas	gas	NOUN
can-1682	54	4	is	be	AUX
can-1682	54	5	responsible	responsible	ADJ
can-1682	54	6	for	for	ADP
can-1682	54	7	pushing	push	VERB
can-1682	54	8	the	the	DET
can-1682	54	9	precursor	precursor	NOUN
can-1682	54	10	vapor	vapor	NOUN
can-1682	54	11	into	into	ADP
can-1682	54	12	the	the	DET
can-1682	54	13	tube	tube	NOUN
can-1682	54	14	and	and	CCONJ
can-1682	54	15	through	through	ADP
can-1682	54	16	the	the	DET
can-1682	54	17	furnace	furnace	NOUN
can-1682	54	18	(	(	PUNCT
can-1682	54	19	reaction	reaction	NOUN
can-1682	54	20	chamber	chamber	PROPN
can-1682	54	21	)	)	PUNCT
can-1682	54	22	to	to	ADP
can-1682	54	23	the	the	DET
can-1682	54	24	outlet[27	outlet[27	PROPN
can-1682	54	25	]	]	PUNCT
can-1682	54	26	.	.	PUNCT
can-1682	55	1	2.4	2.4	NUM
can-1682	55	2	low	low	ADJ
can-1682	55	3	pressure	pressure	NOUN
can-1682	55	4	chemical	chemical	NOUN
can-1682	55	5	vapor	vapor	NOUN
can-1682	55	6	deposition	deposition	NOUN
can-1682	55	7	(	(	PUNCT
can-1682	55	8	lpcvd	lpcvd	NOUN
can-1682	55	9	)	)	PUNCT
can-1682	55	10	it	it	PRON
can-1682	55	11	consists	consist	VERB
can-1682	55	12	of	of	ADP
can-1682	55	13	a	a	DET
can-1682	55	14	cvd	cvd	NOUN
can-1682	55	15	process	process	NOUN
can-1682	55	16	using	use	VERB
can-1682	55	17	a	a	DET
can-1682	55	18	vacuum	vacuum	NOUN
can-1682	55	19	pump	pump	NOUN
can-1682	55	20	connected	connect	VERB
can-1682	55	21	to	to	ADP
can-1682	55	22	the	the	DET
can-1682	55	23	tube	tube	NOUN
can-1682	55	24	outlet	outlet	NOUN
can-1682	55	25	that	that	PRON
can-1682	55	26	regulates	regulate	VERB
can-1682	55	27	the	the	DET
can-1682	55	28	internal	internal	ADJ
can-1682	55	29	pressure	pressure	NOUN
can-1682	55	30	of	of	ADP
can-1682	55	31	the	the	DET
can-1682	55	32	equipment	equipment	NOUN
can-1682	55	33	to	to	ADP
can-1682	55	34	pressures	pressure	NOUN
can-1682	55	35	close	close	ADJ
can-1682	55	36	to	to	ADP
can-1682	55	37	vacuum	vacuum	NOUN
can-1682	55	38	(	(	PUNCT
can-1682	55	39	approximately	approximately	ADV
can-1682	55	40	10−1	10−1	NUM
can-1682	55	41	to	to	ADP
can-1682	55	42	10−2	10−2	NUM
can-1682	55	43	torr	torr	NOUN
can-1682	55	44	)	)	PUNCT
can-1682	55	45	.	.	PUNCT
can-1682	56	1	for	for	ADP
can-1682	56	2	this	this	DET
can-1682	56	3	process	process	NOUN
can-1682	56	4	,	,	PUNCT
can-1682	56	5	a	a	DET
can-1682	56	6	fully	fully	ADV
can-1682	56	7	gaseous	gaseous	ADJ
can-1682	56	8	precursor	precursor	NOUN
can-1682	56	9	is	be	AUX
can-1682	56	10	used	use	VERB
can-1682	56	11	,	,	PUNCT
can-1682	56	12	which	which	PRON
can-1682	56	13	travels	travel	VERB
can-1682	56	14	through	through	ADP
can-1682	56	15	the	the	DET
can-1682	56	16	tube	tube	NOUN
can-1682	56	17	to	to	ADP
can-1682	56	18	the	the	DET
can-1682	56	19	outlet	outlet	NOUN
can-1682	56	20	along	along	ADP
can-1682	56	21	with	with	ADP
can-1682	56	22	the	the	DET
can-1682	56	23	carrier	carrier	NOUN
can-1682	56	24	gas	gas	NOUN
can-1682	56	25	.	.	PUNCT
can-1682	57	1	due	due	ADP
can-1682	57	2	to	to	ADP
can-1682	57	3	the	the	DET
can-1682	57	4	low	low	ADJ
can-1682	57	5	pressures	pressure	NOUN
can-1682	57	6	,	,	PUNCT
can-1682	57	7	the	the	DET
can-1682	57	8	decomposed	decompose	VERB
can-1682	57	9	atoms	atom	NOUN
can-1682	57	10	are	be	AUX
can-1682	57	11	better	well	ADV
can-1682	57	12	dispersed	disperse	VERB
can-1682	57	13	in	in	ADP
can-1682	57	14	the	the	DET
can-1682	57	15	substrate[27	substrate[27	NOUN
can-1682	57	16	]	]	PUNCT
can-1682	57	17	.	.	PUNCT
can-1682	58	1	figure	figure	VERB
can-1682	58	2	3	3	NUM
can-1682	58	3	.	.	PUNCT
can-1682	58	4	schematic	schematic	ADJ
can-1682	58	5	representation	representation	NOUN
can-1682	58	6	of	of	ADP
can-1682	58	7	the	the	DET
can-1682	58	8	types	type	NOUN
can-1682	58	9	of	of	ADP
can-1682	58	10	catalysts	catalyst	NOUN
can-1682	58	11	used	use	VERB
can-1682	58	12	in	in	ADP
can-1682	58	13	a	a	DET
can-1682	58	14	cvd	cvd	NOUN
can-1682	58	15	process	process	NOUN
can-1682	58	16	for	for	ADP
can-1682	58	17	the	the	DET
can-1682	58	18	synthesis	synthesis	NOUN
can-1682	58	19	of	of	ADP
can-1682	58	20	carbon	carbon	NOUN
can-1682	58	21	nanotubes	nanotube	NOUN
can-1682	58	22	.	.	PUNCT
can-1682	59	1	on	on	ADP
can-1682	59	2	the	the	DET
can-1682	59	3	left	left	ADJ
can-1682	59	4	,	,	PUNCT
can-1682	59	5	floating	float	VERB
can-1682	59	6	catalyst	catalyst	NOUN
can-1682	59	7	,	,	PUNCT
can-1682	59	8	which	which	PRON
can-1682	59	9	is	be	AUX
can-1682	59	10	introduced	introduce	VERB
can-1682	59	11	into	into	ADP
can-1682	59	12	the	the	DET
can-1682	59	13	reaction	reaction	NOUN
can-1682	59	14	chamber	chamber	NOUN
can-1682	59	15	along	along	ADP
can-1682	59	16	with	with	ADP
can-1682	59	17	the	the	DET
can-1682	59	18	precursor	precursor	NOUN
can-1682	59	19	;	;	PUNCT
can-1682	59	20	on	on	ADP
can-1682	59	21	the	the	DET
can-1682	59	22	right	right	NOUN
can-1682	59	23	,	,	PUNCT
can-1682	59	24	seeded	seeded	ADJ
can-1682	59	25	catalyst	catalyst	NOUN
can-1682	59	26	,	,	PUNCT
can-1682	59	27	which	which	PRON
can-1682	59	28	is	be	AUX
can-1682	59	29	deposited	deposit	VERB
can-1682	59	30	on	on	ADP
can-1682	59	31	a	a	DET
can-1682	59	32	substrate	substrate	NOUN
can-1682	59	33	inside	inside	ADP
can-1682	59	34	the	the	DET
can-1682	59	35	reaction	reaction	NOUN
can-1682	59	36	chamber	chamber	NOUN
can-1682	59	37	and	and	CCONJ
can-1682	59	38	is	be	AUX
can-1682	59	39	activated	activate	VERB
can-1682	59	40	when	when	SCONJ
can-1682	59	41	the	the	DET
can-1682	59	42	precursor	precursor	NOUN
can-1682	59	43	is	be	AUX
can-1682	59	44	introduced	introduce	VERB
can-1682	59	45	.	.	PUNCT
can-1682	60	1	personal	personal	ADJ
can-1682	60	2	elaboration	elaboration	NOUN
can-1682	60	3	.	.	PUNCT
can-1682	61	1	2.5	2.5	NUM
can-1682	61	2	aerosol	aerosol	NOUN
can-1682	61	3	-	-	PUNCT
can-1682	61	4	assisted	assist	VERB
can-1682	61	5	chemical	chemical	NOUN
can-1682	61	6	vapor	vapor	NOUN
can-1682	61	7	deposition	deposition	NOUN
can-1682	61	8	(	(	PUNCT
can-1682	61	9	aacvd	aacvd	NOUN
can-1682	61	10	)	)	PUNCT
can-1682	61	11	in	in	ADP
can-1682	61	12	this	this	DET
can-1682	61	13	method	method	NOUN
can-1682	61	14	,	,	PUNCT
can-1682	61	15	a	a	DET
can-1682	61	16	liquid	liquid	ADJ
can-1682	61	17	precursor	precursor	NOUN
can-1682	61	18	is	be	AUX
can-1682	61	19	used	use	VERB
can-1682	61	20	for	for	ADP
can-1682	61	21	the	the	DET
can-1682	61	22	synthesis	synthesis	NOUN
can-1682	61	23	,	,	PUNCT
can-1682	61	24	which	which	PRON
can-1682	61	25	is	be	AUX
can-1682	61	26	transported	transport	VERB
can-1682	61	27	to	to	ADP
can-1682	61	28	the	the	DET
can-1682	61	29	reaction	reaction	NOUN
can-1682	61	30	chamber	chamber	NOUN
can-1682	61	31	in	in	ADP
can-1682	61	32	the	the	DET
can-1682	61	33	form	form	NOUN
can-1682	61	34	of	of	ADP
can-1682	61	35	an	an	DET
can-1682	61	36	aerosol	aerosol	NOUN
can-1682	61	37	.	.	PUNCT
can-1682	62	1	usually	usually	ADV
can-1682	62	2	an	an	DET
can-1682	62	3	ultrasonic	ultrasonic	ADJ
can-1682	62	4	bath	bath	NOUN
can-1682	62	5	is	be	AUX
can-1682	62	6	used	use	VERB
can-1682	62	7	,	,	PUNCT
can-1682	62	8	which	which	PRON
can-1682	62	9	generates	generate	VERB
can-1682	62	10	ultrasound	ultrasound	NOUN
can-1682	62	11	that	that	PRON
can-1682	62	12	propagates	propagate	VERB
can-1682	62	13	throughout	throughout	ADP
can-1682	62	14	the	the	DET
can-1682	62	15	precursor	precursor	NOUN
can-1682	62	16	to	to	PART
can-1682	62	17	agitate	agitate	VERB
can-1682	62	18	its	its	PRON
can-1682	62	19	particles	particle	NOUN
can-1682	62	20	until	until	SCONJ
can-1682	62	21	aerosol	aerosol	NOUN
can-1682	62	22	droplets	droplet	NOUN
can-1682	62	23	appear	appear	VERB
can-1682	62	24	.	.	PUNCT
can-1682	63	1	the	the	DET
can-1682	63	2	carrier	carrier	NOUN
can-1682	63	3	gas	gas	NOUN
can-1682	63	4	transports	transport	VERB
can-1682	63	5	the	the	DET
can-1682	63	6	aerosol	aerosol	NOUN
can-1682	63	7	through	through	ADP
can-1682	63	8	the	the	DET
can-1682	63	9	system	system	NOUN
can-1682	63	10	to	to	PART
can-1682	63	11	react	react	VERB
can-1682	63	12	and	and	CCONJ
can-1682	63	13	deposit	deposit	VERB
can-1682	63	14	on	on	ADP
can-1682	63	15	the	the	DET
can-1682	63	16	substrate[28	substrate[28	NOUN
can-1682	63	17	]	]	X
can-1682	63	18	.	.	PUNCT
can-1682	64	1	2.6	2.6	NUM
can-1682	64	2	plasma	plasma	NOUN
can-1682	64	3	activated	activate	VERB
can-1682	64	4	chemical	chemical	NOUN
can-1682	64	5	vapor	vapor	NOUN
can-1682	64	6	deposition	deposition	NOUN
can-1682	64	7	(	(	PUNCT
can-1682	64	8	pecvd	pecvd	NOUN
can-1682	64	9	)	)	PUNCT
can-1682	64	10	this	this	DET
can-1682	64	11	method	method	NOUN
can-1682	64	12	is	be	AUX
can-1682	64	13	classified	classify	VERB
can-1682	64	14	as	as	ADP
can-1682	64	15	a	a	DET
can-1682	64	16	variant	variant	NOUN
can-1682	64	17	of	of	ADP
can-1682	64	18	lpcvd	lpcvd	NOUN
can-1682	64	19	,	,	PUNCT
can-1682	64	20	very	very	ADV
can-1682	64	21	low	low	ADJ
can-1682	64	22	pressures	pressure	NOUN
can-1682	64	23	are	be	AUX
can-1682	64	24	used	use	VERB
can-1682	64	25	for	for	ADP
can-1682	64	26	the	the	DET
can-1682	64	27	decomposition	decomposition	NOUN
can-1682	64	28	of	of	ADP
can-1682	64	29	the	the	DET
can-1682	64	30	precursor	precursor	NOUN
can-1682	64	31	,	,	PUNCT
can-1682	64	32	however	however	ADV
can-1682	64	33	,	,	PUNCT
can-1682	64	34	in	in	ADP
can-1682	64	35	this	this	DET
can-1682	64	36	method	method	NOUN
can-1682	64	37	much	much	ADV
can-1682	64	38	lower	low	ADJ
can-1682	64	39	temperatures	temperature	NOUN
can-1682	64	40	are	be	AUX
can-1682	64	41	used	use	VERB
can-1682	64	42	due	due	ADP
can-1682	64	43	to	to	ADP
can-1682	64	44	the	the	DET
can-1682	64	45	use	use	NOUN
can-1682	64	46	of	of	ADP
can-1682	64	47	a	a	DET
can-1682	64	48	plasma	plasma	NOUN
can-1682	64	49	,	,	PUNCT
can-1682	64	50	which	which	PRON
can-1682	64	51	“	"	PUNCT
can-1682	64	52	activates	activate	VERB
can-1682	64	53	”	"	PUNCT
can-1682	64	54	the	the	DET
can-1682	64	55	precursor	precursor	NOUN
can-1682	64	56	,	,	PUNCT
can-1682	64	57	facilitating	facilitate	VERB
can-1682	64	58	its	its	PRON
can-1682	64	59	decomposition	decomposition	NOUN
can-1682	64	60	.	.	PUNCT
can-1682	65	1	the	the	DET
can-1682	65	2	plasma	plasma	NOUN
can-1682	65	3	is	be	AUX
can-1682	65	4	a	a	DET
can-1682	65	5	gaseous	gaseous	ADJ
can-1682	65	6	state	state	NOUN
can-1682	65	7	where	where	SCONJ
can-1682	65	8	reactive	reactive	ADJ
can-1682	65	9	radicals	radical	NOUN
can-1682	65	10	coexist	coexist	VERB
can-1682	65	11	in	in	ADP
can-1682	65	12	the	the	DET
can-1682	65	13	form	form	NOUN
can-1682	65	14	of	of	ADP
can-1682	65	15	electrons	electron	NOUN
can-1682	65	16	,	,	PUNCT
can-1682	65	17	ions	ion	NOUN
can-1682	65	18	,	,	PUNCT
can-1682	65	19	neutral	neutral	ADJ
can-1682	65	20	atoms	atom	NOUN
can-1682	65	21	and	and	CCONJ
can-1682	65	22	other	other	ADJ
can-1682	65	23	highly	highly	ADV
can-1682	65	24	energetic	energetic	ADJ
can-1682	65	25	particles	particle	NOUN
can-1682	65	26	.	.	PUNCT
can-1682	66	1	this	this	DET
can-1682	66	2	plasma	plasma	NOUN
can-1682	66	3	is	be	AUX
can-1682	66	4	produced	produce	VERB
can-1682	66	5	through	through	ADP
can-1682	66	6	the	the	DET
can-1682	66	7	acceleration	acceleration	NOUN
can-1682	66	8	of	of	ADP
can-1682	66	9	electrons	electron	NOUN
can-1682	66	10	in	in	ADP
can-1682	66	11	an	an	DET
can-1682	66	12	electric	electric	ADJ
can-1682	66	13	field	field	NOUN
can-1682	66	14	,	,	PUNCT
can-1682	66	15	generated	generate	VERB
can-1682	66	16	by	by	ADP
can-1682	66	17	means	mean	NOUN
can-1682	66	18	of	of	ADP
can-1682	66	19	two	two	NUM
can-1682	66	20	electrodes	electrode	NOUN
can-1682	66	21	connected	connect	VERB
can-1682	66	22	to	to	ADP
can-1682	66	23	a	a	DET
can-1682	66	24	voltage	voltage	NOUN
can-1682	66	25	source[29	source[29	NOUN
can-1682	66	26	]	]	PUNCT
can-1682	66	27	.	.	PUNCT
can-1682	67	1	in	in	ADP
can-1682	67	2	this	this	DET
can-1682	67	3	method	method	NOUN
can-1682	67	4	,	,	PUNCT
can-1682	67	5	gaseous	gaseous	ADJ
can-1682	67	6	precursors	precursor	NOUN
can-1682	67	7	are	be	AUX
can-1682	67	8	used	use	VERB
can-1682	67	9	,	,	PUNCT
can-1682	67	10	which	which	PRON
can-1682	67	11	with	with	ADP
can-1682	67	12	the	the	DET
can-1682	67	13	help	help	NOUN
can-1682	67	14	of	of	ADP
can-1682	67	15	a	a	DET
can-1682	67	16	carrier	carrier	NOUN
can-1682	67	17	gas	gas	NOUN
can-1682	67	18	pass	pass	NOUN
can-1682	67	19	through	through	ADP
can-1682	67	20	the	the	DET
can-1682	67	21	plasma	plasma	NOUN
can-1682	67	22	zone	zone	NOUN
can-1682	67	23	,	,	PUNCT
can-1682	67	24	where	where	SCONJ
can-1682	67	25	the	the	DET
can-1682	67	26	decomposition	decomposition	NOUN
can-1682	67	27	and	and	CCONJ
can-1682	67	28	deposition	deposition	NOUN
can-1682	67	29	reaction	reaction	NOUN
can-1682	67	30	takes	take	VERB
can-1682	67	31	place	place	NOUN
can-1682	67	32	on	on	ADP
can-1682	67	33	the	the	DET
can-1682	67	34	substrate	substrate	NOUN
can-1682	67	35	.	.	PUNCT
can-1682	68	1	2.7	2.7	NUM
can-1682	68	2	microwave	microwave	NOUN
can-1682	68	3	assisted	assist	VERB
can-1682	68	4	chemical	chemical	NOUN
can-1682	68	5	vapor	vapor	NOUN
can-1682	68	6	deposition	deposition	NOUN
can-1682	68	7	and	and	CCONJ
can-1682	68	8	plasma	plasma	NOUN
can-1682	68	9	activation	activation	NOUN
can-1682	68	10	(	(	PUNCT
can-1682	68	11	mw	mw	NOUN
can-1682	68	12	-	-	NOUN
can-1682	68	13	pecvd	pecvd	NOUN
can-1682	68	14	)	)	PUNCT
can-1682	68	15	this	this	DET
can-1682	68	16	methodology	methodology	NOUN
can-1682	68	17	is	be	AUX
can-1682	68	18	a	a	DET
can-1682	68	19	sub	sub	NOUN
can-1682	68	20	-	-	ADJ
can-1682	68	21	variant	variant	NOUN
can-1682	68	22	of	of	ADP
can-1682	68	23	pecvd	pecvd	NOUN
can-1682	68	24	,	,	PUNCT
can-1682	68	25	83	83	NUM
can-1682	68	26	a	a	DET
can-1682	68	27	plasma	plasma	NOUN
can-1682	68	28	is	be	AUX
can-1682	68	29	also	also	ADV
can-1682	68	30	produced	produce	VERB
can-1682	68	31	for	for	ADP
can-1682	68	32	the	the	DET
can-1682	68	33	decomposition	decomposition	NOUN
can-1682	68	34	of	of	ADP
can-1682	68	35	the	the	DET
can-1682	68	36	precursor	precursor	NOUN
can-1682	68	37	,	,	PUNCT
can-1682	68	38	but	but	CCONJ
can-1682	68	39	this	this	PRON
can-1682	68	40	is	be	AUX
can-1682	68	41	produced	produce	VERB
can-1682	68	42	by	by	ADP
can-1682	68	43	microwave	microwave	NOUN
can-1682	68	44	action	action	NOUN
can-1682	68	45	,	,	PUNCT
can-1682	68	46	which	which	PRON
can-1682	68	47	is	be	AUX
can-1682	68	48	a	a	DET
can-1682	68	49	low	low	ADJ
can-1682	68	50	energy	energy	NOUN
can-1682	68	51	electromagnetic	electromagnetic	ADJ
can-1682	68	52	radiation	radiation	NOUN
can-1682	68	53	.	.	PUNCT
can-1682	69	1	a	a	DET
can-1682	69	2	source	source	NOUN
can-1682	69	3	of	of	ADP
can-1682	69	4	approximately	approximately	ADV
can-1682	69	5	2.45	2.45	NUM
can-1682	69	6	ghz	ghz	NOUN
can-1682	69	7	is	be	AUX
can-1682	69	8	introduced	introduce	VERB
can-1682	69	9	through	through	ADP
can-1682	69	10	a	a	DET
can-1682	69	11	dielectric	dielectric	ADJ
can-1682	69	12	window	window	NOUN
can-1682	69	13	,	,	PUNCT
can-1682	69	14	which	which	PRON
can-1682	69	15	will	will	AUX
can-1682	69	16	excite	excite	VERB
can-1682	69	17	the	the	DET
can-1682	69	18	gases	gas	NOUN
can-1682	69	19	producing	produce	VERB
can-1682	69	20	the	the	DET
can-1682	69	21	characteristic	characteristic	ADJ
can-1682	69	22	luminescent	luminescent	NOUN
can-1682	69	23	plasma	plasma	NOUN
can-1682	69	24	that	that	PRON
can-1682	69	25	will	will	AUX
can-1682	69	26	carry	carry	VERB
can-1682	69	27	out	out	ADP
can-1682	69	28	the	the	DET
can-1682	69	29	decomposition	decomposition	NOUN
can-1682	69	30	reaction	reaction	NOUN
can-1682	69	31	.	.	PUNCT
can-1682	70	1	it	it	PRON
can-1682	70	2	is	be	AUX
can-1682	70	3	characterized	characterize	VERB
can-1682	70	4	by	by	ADP
can-1682	70	5	being	be	AUX
can-1682	70	6	able	able	ADJ
can-1682	70	7	to	to	PART
can-1682	70	8	operate	operate	VERB
can-1682	70	9	at	at	ADP
can-1682	70	10	higher	high	ADJ
can-1682	70	11	pressures	pressure	NOUN
can-1682	70	12	than	than	ADP
can-1682	70	13	pecvd[30	pecvd[30	NOUN
can-1682	70	14	]	]	X
can-1682	70	15	.	.	PUNCT
can-1682	71	1	3	3	X
can-1682	71	2	.	.	X
can-1682	71	3	carbon	carbon	NOUN
can-1682	71	4	nanostructures	nanostructure	NOUN
can-1682	71	5	produced	produce	VERB
can-1682	71	6	by	by	ADP
can-1682	71	7	cvd	cvd	PROPN
can-1682	71	8	3.1	3.1	NUM
can-1682	71	9	fullerenes	fullerene	NOUN
can-1682	71	10	as	as	SCONJ
can-1682	71	11	mentioned	mention	VERB
can-1682	71	12	,	,	PUNCT
can-1682	71	13	in	in	ADP
can-1682	71	14	1985	1985	NUM
can-1682	71	15	,	,	PUNCT
can-1682	71	16	the	the	DET
can-1682	71	17	synthesis	synthesis	NOUN
can-1682	71	18	of	of	ADP
can-1682	71	19	c60	c60	NOUN
can-1682	71	20	fullerene	fullerene	NOUN
can-1682	71	21	was	be	AUX
can-1682	71	22	reported	report	VERB
can-1682	71	23	for	for	ADP
can-1682	71	24	the	the	DET
can-1682	71	25	first	first	ADJ
can-1682	71	26	time	time	NOUN
can-1682	71	27	by	by	ADP
can-1682	71	28	the	the	DET
can-1682	71	29	laser	laser	NOUN
can-1682	71	30	ablation	ablation	NOUN
can-1682	71	31	method	method	NOUN
can-1682	71	32	,	,	PUNCT
can-1682	71	33	a	a	DET
can-1682	71	34	technique	technique	NOUN
can-1682	71	35	used	use	VERB
can-1682	71	36	to	to	ADP
can-1682	71	37	date	date	NOUN
can-1682	71	38	to	to	PART
can-1682	71	39	obtain	obtain	VERB
can-1682	71	40	the	the	DET
can-1682	71	41	nanomaterial	nanomaterial	NOUN
can-1682	71	42	,	,	PUNCT
can-1682	71	43	where	where	SCONJ
can-1682	71	44	the	the	DET
can-1682	71	45	vaporization	vaporization	NOUN
can-1682	71	46	of	of	ADP
can-1682	71	47	graphite	graphite	NOUN
can-1682	71	48	is	be	AUX
can-1682	71	49	carried	carry	VERB
can-1682	71	50	out	out	ADP
can-1682	71	51	by	by	ADP
can-1682	71	52	laser	laser	NOUN
can-1682	71	53	irradiation[1	irradiation[1	PROPN
can-1682	71	54	]	]	PUNCT
can-1682	71	55	.	.	PUNCT
can-1682	72	1	since	since	SCONJ
can-1682	72	2	then	then	ADV
can-1682	72	3	,	,	PUNCT
can-1682	72	4	other	other	ADJ
can-1682	72	5	methods	method	NOUN
can-1682	72	6	such	such	ADJ
can-1682	72	7	as	as	ADP
can-1682	72	8	chemical	chemical	ADJ
can-1682	72	9	vapor	vapor	NOUN
can-1682	72	10	deposition	deposition	NOUN
can-1682	72	11	,	,	PUNCT
can-1682	72	12	pyrolytic	pyrolytic	ADJ
can-1682	72	13	routes[31	routes[31	NOUN
can-1682	72	14	]	]	X
can-1682	72	15	,	,	PUNCT
can-1682	72	16	arc	arc	NOUN
can-1682	72	17	discharge	discharge	NOUN
can-1682	72	18	,	,	PUNCT
can-1682	72	19	and	and	CCONJ
can-1682	72	20	combustion	combustion	NOUN
can-1682	72	21	processes	process	NOUN
can-1682	72	22	have	have	AUX
can-1682	72	23	been	be	AUX
can-1682	72	24	employed	employ	VERB
can-1682	72	25	in	in	ADP
can-1682	72	26	search	search	NOUN
can-1682	72	27	of	of	ADP
can-1682	72	28	better	well	ADJ
can-1682	72	29	yields	yield	NOUN
can-1682	72	30	.	.	PUNCT
can-1682	73	1	combustion	combustion	NOUN
can-1682	73	2	processes	process	NOUN
can-1682	73	3	are	be	AUX
can-1682	73	4	emerging	emerge	VERB
can-1682	73	5	as	as	ADP
can-1682	73	6	the	the	DET
can-1682	73	7	most	most	ADV
can-1682	73	8	favorable	favorable	ADJ
can-1682	73	9	for	for	ADP
can-1682	73	10	the	the	DET
can-1682	73	11	industrial	industrial	ADJ
can-1682	73	12	production	production	NOUN
can-1682	73	13	of	of	ADP
can-1682	73	14	fullerenes	fullerene	NOUN
can-1682	73	15	due	due	ADP
can-1682	73	16	to	to	ADP
can-1682	73	17	the	the	DET
can-1682	73	18	high	high	ADJ
can-1682	73	19	efficiencies	efficiency	NOUN
can-1682	73	20	reported[32	reported[32	NOUN
can-1682	73	21	]	]	PUNCT
can-1682	73	22	.	.	PUNCT
can-1682	74	1	regarding	regard	VERB
can-1682	74	2	chemical	chemical	ADJ
can-1682	74	3	vapor	vapor	NOUN
can-1682	74	4	deposition	deposition	NOUN
can-1682	74	5	for	for	ADP
can-1682	74	6	the	the	DET
can-1682	74	7	synthesis	synthesis	NOUN
can-1682	74	8	of	of	ADP
can-1682	74	9	c60	c60	NOUN
can-1682	74	10	and	and	CCONJ
can-1682	74	11	c70	c70	PROPN
can-1682	74	12	,	,	PUNCT
can-1682	74	13	it	it	PRON
can-1682	74	14	should	should	AUX
can-1682	74	15	be	be	AUX
can-1682	74	16	noted	note	VERB
can-1682	74	17	that	that	SCONJ
can-1682	74	18	the	the	DET
can-1682	74	19	technique	technique	NOUN
can-1682	74	20	has	have	AUX
can-1682	74	21	been	be	AUX
can-1682	74	22	less	less	ADV
can-1682	74	23	prominent	prominent	ADJ
can-1682	74	24	due	due	ADP
can-1682	74	25	to	to	ADP
can-1682	74	26	the	the	DET
can-1682	74	27	low	low	ADJ
can-1682	74	28	yields	yield	NOUN
can-1682	74	29	obtained	obtain	VERB
can-1682	74	30	;	;	PUNCT
can-1682	74	31	however	however	ADV
can-1682	74	32	,	,	PUNCT
can-1682	74	33	the	the	DET
can-1682	74	34	formation	formation	NOUN
can-1682	74	35	of	of	ADP
can-1682	74	36	these	these	DET
can-1682	74	37	fullerenes	fullerene	NOUN
can-1682	74	38	as	as	ADP
can-1682	74	39	by	by	ADP
can-1682	74	40	-	-	PUNCT
can-1682	74	41	products	product	NOUN
can-1682	74	42	of	of	ADP
can-1682	74	43	diamond	diamond	NOUN
can-1682	74	44	synthesis	synthesis	NOUN
can-1682	74	45	by	by	ADP
can-1682	74	46	the	the	DET
can-1682	74	47	hot	hot	ADJ
can-1682	74	48	filament	filament	NOUN
can-1682	74	49	chemical	chemical	NOUN
can-1682	74	50	vapor	vapor	NOUN
can-1682	74	51	deposition	deposition	NOUN
can-1682	74	52	method	method	NOUN
can-1682	74	53	and	and	CCONJ
can-1682	74	54	microwave	microwave	NOUN
can-1682	74	55	-	-	PUNCT
can-1682	74	56	assisted	assist	VERB
can-1682	74	57	chemical	chemical	NOUN
can-1682	74	58	vapor	vapor	NOUN
can-1682	74	59	deposition	deposition	NOUN
can-1682	74	60	has	have	AUX
can-1682	74	61	been	be	AUX
can-1682	74	62	reported[33	reported[33	VERB
can-1682	74	63	]	]	PUNCT
can-1682	74	64	.	.	PUNCT
can-1682	75	1	the	the	DET
can-1682	75	2	microwave	microwave	NOUN
can-1682	75	3	-	-	PUNCT
can-1682	75	4	assisted	assist	VERB
can-1682	75	5	chemical	chemical	NOUN
can-1682	75	6	vapor	vapor	NOUN
can-1682	75	7	deposition	deposition	NOUN
can-1682	75	8	used	use	VERB
can-1682	75	9	for	for	ADP
can-1682	75	10	the	the	DET
can-1682	75	11	synthesis	synthesis	NOUN
can-1682	75	12	of	of	ADP
can-1682	75	13	diamond	diamond	NOUN
can-1682	75	14	and	and	CCONJ
can-1682	75	15	fullerenes	fullerene	NOUN
can-1682	75	16	consists	consist	VERB
can-1682	75	17	of	of	ADP
can-1682	75	18	a	a	DET
can-1682	75	19	quartz	quartz	NOUN
can-1682	75	20	tube	tube	NOUN
can-1682	75	21	as	as	ADP
can-1682	75	22	a	a	DET
can-1682	75	23	reaction	reaction	NOUN
can-1682	75	24	chamber	chamber	NOUN
can-1682	75	25	,	,	PUNCT
can-1682	75	26	inside	inside	ADP
can-1682	75	27	which	which	PRON
can-1682	75	28	an	an	DET
can-1682	75	29	excitation	excitation	NOUN
can-1682	75	30	source	source	NOUN
can-1682	75	31	from	from	ADP
can-1682	75	32	a	a	DET
can-1682	75	33	generator	generator	NOUN
can-1682	75	34	(	(	PUNCT
can-1682	75	35	100	100	NUM
can-1682	75	36	w	w	PROPN
can-1682	75	37	,	,	PUNCT
can-1682	75	38	2.45	2.45	NUM
can-1682	75	39	ghz	ghz	NOUN
can-1682	75	40	)	)	PUNCT
can-1682	75	41	is	be	AUX
can-1682	75	42	incident[34	incident[34	NOUN
can-1682	75	43	]	]	X
can-1682	75	44	,	,	PUNCT
can-1682	75	45	responsible	responsible	ADJ
can-1682	75	46	for	for	ADP
can-1682	75	47	the	the	DET
can-1682	75	48	generation	generation	NOUN
can-1682	75	49	of	of	ADP
can-1682	75	50	the	the	DET
can-1682	75	51	plasma	plasma	NOUN
can-1682	75	52	precursor	precursor	NOUN
can-1682	75	53	of	of	ADP
can-1682	75	54	the	the	DET
can-1682	75	55	nanostructure	nanostructure	NOUN
can-1682	75	56	.	.	PUNCT
can-1682	76	1	the	the	DET
can-1682	76	2	gases	gas	NOUN
can-1682	76	3	used	use	VERB
can-1682	76	4	in	in	ADP
can-1682	76	5	this	this	DET
can-1682	76	6	method	method	NOUN
can-1682	76	7	are	be	AUX
can-1682	76	8	argon	argon	NOUN
can-1682	76	9	,	,	PUNCT
can-1682	76	10	hydrogen	hydrogen	NOUN
can-1682	76	11	and	and	CCONJ
can-1682	76	12	acetylene	acetylene	NOUN
can-1682	76	13	,	,	PUNCT
can-1682	76	14	the	the	DET
can-1682	76	15	latter	latter	ADJ
can-1682	76	16	being	be	AUX
can-1682	76	17	the	the	DET
can-1682	76	18	carbon	carbon	NOUN
can-1682	76	19	source	source	NOUN
can-1682	76	20	.	.	PUNCT
can-1682	77	1	the	the	DET
can-1682	77	2	process	process	NOUN
can-1682	77	3	is	be	AUX
can-1682	77	4	subjected	subject	VERB
can-1682	77	5	to	to	ADP
can-1682	77	6	pressures	pressure	NOUN
can-1682	77	7	between	between	ADP
can-1682	77	8	1	1	NUM
can-1682	77	9	and	and	CCONJ
can-1682	77	10	10	10	NUM
can-1682	77	11	torr	torr	NOUN
can-1682	77	12	,	,	PUNCT
can-1682	77	13	but	but	CCONJ
can-1682	77	14	experiments	experiment	NOUN
can-1682	77	15	with	with	ADP
can-1682	77	16	pressures	pressure	NOUN
can-1682	77	17	above	above	ADP
can-1682	77	18	25	25	NUM
can-1682	77	19	torr	torr	NOUN
can-1682	77	20	and	and	CCONJ
can-1682	77	21	below	below	ADP
can-1682	77	22	10	10	NUM
can-1682	77	23	torr	torr	NOUN
can-1682	77	24	are	be	AUX
can-1682	77	25	also	also	ADV
can-1682	77	26	reported[34	reported[34	ADJ
can-1682	77	27	]	]	PUNCT
can-1682	77	28	.	.	PUNCT
can-1682	78	1	with	with	ADP
can-1682	78	2	regard	regard	NOUN
can-1682	78	3	to	to	ADP
can-1682	78	4	hot	hot	ADJ
can-1682	78	5	filament	filament	NOUN
can-1682	78	6	chemical	chemical	NOUN
can-1682	78	7	vapor	vapor	NOUN
can-1682	78	8	deposition[34	deposition[34	PROPN
can-1682	78	9	]	]	PUNCT
can-1682	78	10	,	,	PUNCT
can-1682	78	11	it	it	PRON
can-1682	78	12	consists	consist	VERB
can-1682	78	13	of	of	ADP
can-1682	78	14	a	a	DET
can-1682	78	15	stainless	stainless	ADJ
can-1682	78	16	steel	steel	NOUN
can-1682	78	17	chamber	chamber	NOUN
can-1682	78	18	,	,	PUNCT
can-1682	78	19	inside	inside	ADP
can-1682	78	20	which	which	PRON
can-1682	78	21	is	be	AUX
can-1682	78	22	a	a	DET
can-1682	78	23	tungsten	tungsten	ADJ
can-1682	78	24	filament	filament	NOUN
can-1682	78	25	,	,	PUNCT
can-1682	78	26	hanging	hang	VERB
can-1682	78	27	vertically	vertically	ADV
can-1682	78	28	,	,	PUNCT
can-1682	78	29	with	with	ADP
can-1682	78	30	one	one	NUM
can-1682	78	31	of	of	ADP
can-1682	78	32	its	its	PRON
can-1682	78	33	terminals	terminal	NOUN
can-1682	78	34	fixed	fix	VERB
can-1682	78	35	and	and	CCONJ
can-1682	78	36	the	the	DET
can-1682	78	37	other	other	ADJ
can-1682	78	38	connected	connect	VERB
can-1682	78	39	to	to	ADP
can-1682	78	40	a	a	DET
can-1682	78	41	braided	braid	VERB
can-1682	78	42	copper	copper	NOUN
can-1682	78	43	wire	wire	NOUN
can-1682	78	44	to	to	PART
can-1682	78	45	avoid	avoid	VERB
can-1682	78	46	tension	tension	NOUN
can-1682	78	47	on	on	ADP
can-1682	78	48	the	the	DET
can-1682	78	49	filament	filament	NOUN
can-1682	78	50	.	.	PUNCT
can-1682	79	1	generally	generally	ADV
can-1682	79	2	,	,	PUNCT
can-1682	79	3	the	the	DET
can-1682	79	4	filament	filament	NOUN
can-1682	79	5	has	have	VERB
can-1682	79	6	a	a	DET
can-1682	79	7	diameter	diameter	NOUN
can-1682	79	8	of	of	ADP
can-1682	79	9	0.75	0.75	NUM
can-1682	79	10	mm	mm	NOUN
can-1682	79	11	and	and	CCONJ
can-1682	79	12	a	a	DET
can-1682	79	13	length	length	NOUN
can-1682	79	14	of	of	ADP
can-1682	79	15	8	8	NUM
can-1682	79	16	cm	cm	NOUN
can-1682	79	17	.	.	PUNCT
can-1682	80	1	the	the	DET
can-1682	80	2	gases	gas	NOUN
can-1682	80	3	used	use	VERB
can-1682	80	4	for	for	ADP
can-1682	80	5	the	the	DET
can-1682	80	6	synthesis	synthesis	NOUN
can-1682	80	7	are	be	AUX
can-1682	80	8	methane	methane	NOUN
can-1682	80	9	as	as	ADP
can-1682	80	10	a	a	DET
can-1682	80	11	carbon	carbon	NOUN
can-1682	80	12	source	source	NOUN
can-1682	80	13	(	(	PUNCT
can-1682	80	14	0.4	0.4	NUM
can-1682	80	15	sccm	sccm	NOUN
can-1682	80	16	)	)	PUNCT
can-1682	80	17	and	and	CCONJ
can-1682	80	18	hydrogen	hydrogen	NOUN
can-1682	80	19	(	(	PUNCT
can-1682	80	20	99.6	99.6	NUM
can-1682	80	21	sccm	sccm	NOUN
can-1682	80	22	)	)	PUNCT
can-1682	80	23	.	.	PUNCT
can-1682	81	1	likewise	likewise	ADV
can-1682	81	2	,	,	PUNCT
can-1682	81	3	a	a	DET
can-1682	81	4	stainless	stainless	ADJ
can-1682	81	5	-	-	PUNCT
can-1682	81	6	steel	steel	NOUN
can-1682	81	7	substrate	substrate	NOUN
can-1682	81	8	support	support	NOUN
can-1682	81	9	is	be	AUX
can-1682	81	10	used	use	VERB
can-1682	81	11	for	for	ADP
can-1682	81	12	the	the	DET
can-1682	81	13	deposition	deposition	NOUN
can-1682	81	14	of	of	ADP
can-1682	81	15	the	the	DET
can-1682	81	16	diamond	diamond	NOUN
can-1682	81	17	film	film	NOUN
can-1682	81	18	and	and	CCONJ
can-1682	81	19	,	,	PUNCT
can-1682	81	20	consequently	consequently	ADV
can-1682	81	21	,	,	PUNCT
can-1682	81	22	for	for	ADP
can-1682	81	23	obtaining	obtain	VERB
can-1682	81	24	c60	c60	NOUN
can-1682	81	25	and	and	CCONJ
can-1682	81	26	c70	c70	NOUN
can-1682	81	27	fullerenes	fullerene	NOUN
can-1682	81	28	.	.	PUNCT
can-1682	82	1	generally	generally	ADV
can-1682	82	2	,	,	PUNCT
can-1682	82	3	the	the	DET
can-1682	82	4	filament	filament	NOUN
can-1682	82	5	currents	current	NOUN
can-1682	82	6	are	be	AUX
can-1682	82	7	between	between	ADP
can-1682	82	8	50	50	NUM
can-1682	82	9	and	and	CCONJ
can-1682	82	10	60	60	NUM
can-1682	82	11	a	a	PRON
can-1682	82	12	,	,	PUNCT
can-1682	82	13	and	and	CCONJ
can-1682	82	14	filament	filament	NOUN
can-1682	82	15	temperatures	temperature	NOUN
can-1682	82	16	are	be	AUX
can-1682	82	17	2,000	2,000	NUM
can-1682	82	18	to	to	ADP
can-1682	82	19	2,200	2,200	NUM
can-1682	82	20	℃	℃	PROPN
can-1682	82	21	.	.	PUNCT
can-1682	82	22	typical	typical	ADJ
can-1682	82	23	substrate	substrate	NOUN
can-1682	82	24	temperatures	temperature	NOUN
can-1682	82	25	are	be	AUX
can-1682	82	26	between	between	ADP
can-1682	82	27	950	950	NUM
can-1682	82	28	and	and	CCONJ
can-1682	82	29	1,000	1,000	NUM
can-1682	82	30	℃	℃	PROPN
can-1682	82	31	.	.	PROPN
can-1682	82	32	3.2	3.2	NUM
can-1682	82	33	nano	nano	NOUN
can-1682	82	34	-	-	PUNCT
can-1682	82	35	onions	onion	NOUN
can-1682	82	36	other	other	ADJ
can-1682	82	37	nanostructures	nanostructure	NOUN
can-1682	82	38	belonging	belong	VERB
can-1682	82	39	to	to	ADP
can-1682	82	40	the	the	DET
can-1682	82	41	family	family	NOUN
can-1682	82	42	of	of	ADP
can-1682	82	43	fullerenes	fullerene	NOUN
can-1682	82	44	are	be	AUX
can-1682	82	45	known	know	VERB
can-1682	82	46	as	as	ADP
can-1682	82	47	nano	nano	NOUN
can-1682	82	48	-	-	PUNCT
can-1682	82	49	onions	onion	NOUN
can-1682	82	50	.	.	PUNCT
can-1682	83	1	nano	nano	NOUN
can-1682	83	2	-	-	PUNCT
can-1682	83	3	onions	onion	NOUN
can-1682	83	4	were	be	AUX
can-1682	83	5	discovered	discover	VERB
can-1682	83	6	in	in	ADP
can-1682	83	7	1992	1992	NUM
can-1682	83	8	and	and	CCONJ
can-1682	83	9	are	be	AUX
can-1682	83	10	multiple	multiple	ADJ
can-1682	83	11	layers	layer	NOUN
can-1682	83	12	of	of	ADP
can-1682	83	13	carbon	carbon	NOUN
can-1682	83	14	that	that	PRON
can-1682	83	15	form	form	NOUN
can-1682	83	16	encapsulated	encapsulate	VERB
can-1682	83	17	structures[35	structures[35	NOUN
can-1682	83	18	]	]	PUNCT
can-1682	83	19	.	.	PUNCT
can-1682	84	1	their	their	PRON
can-1682	84	2	first	first	ADJ
can-1682	84	3	synthesis	synthesis	NOUN
can-1682	84	4	method	method	NOUN
can-1682	84	5	was	be	AUX
can-1682	84	6	by	by	ADP
can-1682	84	7	irradiation	irradiation	NOUN
can-1682	84	8	of	of	ADP
can-1682	84	9	an	an	DET
can-1682	84	10	electron	electron	NOUN
can-1682	84	11	beam	beam	NOUN
can-1682	84	12	to	to	ADP
can-1682	84	13	a	a	DET
can-1682	84	14	carbon	carbon	NOUN
can-1682	84	15	nanotube	nanotube	NOUN
can-1682	84	16	sample	sample	NOUN
can-1682	84	17	,	,	PUNCT
can-1682	84	18	however	however	ADV
can-1682	84	19	,	,	PUNCT
can-1682	84	20	other	other	ADJ
can-1682	84	21	methods	method	NOUN
can-1682	84	22	such	such	ADJ
can-1682	84	23	as	as	ADP
can-1682	84	24	nanodiamond	nanodiamond	NOUN
can-1682	84	25	heat	heat	NOUN
can-1682	84	26	treatment	treatment	NOUN
can-1682	84	27	,	,	PUNCT
can-1682	84	28	arc	arc	NOUN
can-1682	84	29	discharge	discharge	NOUN
can-1682	84	30	,	,	PUNCT
can-1682	84	31	chemical	chemical	NOUN
can-1682	84	32	vapor	vapor	NOUN
can-1682	84	33	deposition	deposition	NOUN
can-1682	84	34	or	or	CCONJ
can-1682	84	35	implantation	implantation	NOUN
can-1682	84	36	of	of	ADP
can-1682	84	37	carbon	carbon	NOUN
can-1682	84	38	ions	ion	NOUN
can-1682	84	39	into	into	ADP
can-1682	84	40	metal	metal	NOUN
can-1682	84	41	particles[33	particles[33	NOUN
can-1682	84	42	]	]	PUNCT
can-1682	84	43	.	.	PUNCT
can-1682	85	1	with	with	ADP
can-1682	85	2	respect	respect	NOUN
can-1682	85	3	to	to	ADP
can-1682	85	4	chemical	chemical	ADJ
can-1682	85	5	vapor	vapor	NOUN
can-1682	85	6	deposition	deposition	NOUN
can-1682	85	7	,	,	PUNCT
can-1682	85	8	some	some	DET
can-1682	85	9	synthesis	synthesis	NOUN
can-1682	85	10	routes	route	NOUN
can-1682	85	11	are	be	AUX
can-1682	85	12	based	base	VERB
can-1682	85	13	on	on	ADP
can-1682	85	14	the	the	DET
can-1682	85	15	use	use	NOUN
can-1682	85	16	of	of	ADP
can-1682	85	17	catalysts	catalyst	NOUN
can-1682	85	18	or	or	CCONJ
can-1682	85	19	plasma	plasma	NOUN
can-1682	85	20	handling	handling	NOUN
can-1682	85	21	as	as	ADP
can-1682	85	22	an	an	DET
can-1682	85	23	upgrading	upgrading	NOUN
can-1682	85	24	method	method	NOUN
can-1682	85	25	.	.	PUNCT
can-1682	86	1	the	the	DET
can-1682	86	2	catalysts	catalyst	NOUN
can-1682	86	3	employed	employ	VERB
can-1682	86	4	are	be	AUX
can-1682	86	5	generally	generally	ADV
can-1682	86	6	iron	iron	NOUN
can-1682	86	7	-	-	PUNCT
can-1682	86	8	containing	contain	VERB
can-1682	86	9	alloys	alloy	NOUN
can-1682	86	10	or	or	CCONJ
can-1682	86	11	compounds	compound	NOUN
can-1682	86	12	and	and	CCONJ
can-1682	86	13	the	the	DET
can-1682	86	14	resulting	result	VERB
can-1682	86	15	nanostructures	nanostructure	NOUN
can-1682	86	16	possess	possess	VERB
can-1682	86	17	a	a	DET
can-1682	86	18	core	core	NOUN
can-1682	86	19	of	of	ADP
can-1682	86	20	this	this	DET
can-1682	86	21	catalyst[36	catalyst[36	NOUN
can-1682	86	22	]	]	PUNCT
can-1682	86	23	.	.	PUNCT
can-1682	87	1	an	an	DET
can-1682	87	2	example	example	NOUN
can-1682	87	3	is	be	AUX
can-1682	87	4	using	use	VERB
can-1682	87	5	methane	methane	NOUN
can-1682	87	6	as	as	ADP
can-1682	87	7	a	a	DET
can-1682	87	8	carbon	carbon	NOUN
can-1682	87	9	source	source	NOUN
can-1682	87	10	and	and	CCONJ
can-1682	87	11	stainless	stainless	ADJ
can-1682	87	12	steel	steel	NOUN
can-1682	87	13	as	as	ADP
can-1682	87	14	a	a	DET
can-1682	87	15	substrate	substrate	NOUN
can-1682	87	16	at	at	ADP
can-1682	87	17	800	800	NUM
can-1682	87	18	℃	℃	PROPN
can-1682	87	19	[	[	X
can-1682	87	20	37	37	NUM
can-1682	87	21	]	]	PUNCT
can-1682	87	22	or	or	CCONJ
can-1682	87	23	the	the	DET
can-1682	87	24	use	use	NOUN
can-1682	87	25	of	of	ADP
can-1682	87	26	a	a	DET
can-1682	87	27	nickel	nickel	NOUN
can-1682	87	28	-	-	PUNCT
can-1682	87	29	iron	iron	NOUN
can-1682	87	30	alloy	alloy	NOUN
can-1682	87	31	as	as	ADP
can-1682	87	32	a	a	DET
can-1682	87	33	catalyst	catalyst	NOUN
can-1682	87	34	at	at	ADP
can-1682	87	35	850	850	NUM
can-1682	87	36	℃	℃	PROPN
can-1682	87	37	[	[	PROPN
can-1682	87	38	38	38	NUM
can-1682	87	39	]	]	PUNCT
can-1682	87	40	.	.	PUNCT
can-1682	88	1	plasma	plasma	PROPN
can-1682	88	2	assisted	assist	VERB
can-1682	88	3	chemical	chemical	ADJ
can-1682	88	4	vapor	vapor	NOUN
can-1682	88	5	deposition	deposition	NOUN
can-1682	88	6	is	be	AUX
can-1682	88	7	a	a	DET
can-1682	88	8	process	process	NOUN
can-1682	88	9	generally	generally	ADV
can-1682	88	10	carried	carry	VERB
can-1682	88	11	out	out	ADP
can-1682	88	12	at	at	ADP
can-1682	88	13	pressures	pressure	NOUN
can-1682	88	14	ranging	range	VERB
can-1682	88	15	from	from	ADP
can-1682	88	16	millitorr	millitorr	NOUN
can-1682	88	17	to	to	ADP
can-1682	88	18	a	a	DET
can-1682	88	19	few	few	ADJ
can-1682	88	20	torr	torr	NOUN
can-1682	88	21	.	.	PUNCT
can-1682	89	1	inside	inside	ADP
can-1682	89	2	the	the	DET
can-1682	89	3	chamber	chamber	NOUN
can-1682	89	4	there	there	PRON
can-1682	89	5	are	be	VERB
can-1682	89	6	two	two	NUM
can-1682	89	7	electrodes	electrode	NOUN
can-1682	89	8	subjected	subject	VERB
can-1682	89	9	to	to	ADP
can-1682	89	10	a	a	DET
can-1682	89	11	small	small	ADJ
can-1682	89	12	discharge	discharge	NOUN
can-1682	89	13	,	,	PUNCT
can-1682	89	14	which	which	PRON
can-1682	89	15	generates	generate	VERB
can-1682	89	16	a	a	DET
can-1682	89	17	plasma	plasma	NOUN
can-1682	89	18	from	from	ADP
can-1682	89	19	the	the	DET
can-1682	89	20	gases	gas	NOUN
can-1682	89	21	between	between	ADP
can-1682	89	22	them	they	PRON
can-1682	89	23	,	,	PUNCT
can-1682	89	24	the	the	DET
can-1682	89	25	plasma	plasma	NOUN
can-1682	89	26	is	be	AUX
can-1682	89	27	generally	generally	ADV
can-1682	89	28	produced	produce	VERB
can-1682	89	29	by	by	ADP
can-1682	89	30	radiofrequency	radiofrequency	NOUN
can-1682	89	31	or	or	CCONJ
can-1682	89	32	direct	direct	ADJ
can-1682	89	33	current	current	NOUN
can-1682	89	34	.	.	PUNCT
can-1682	90	1	when	when	SCONJ
can-1682	90	2	this	this	DET
can-1682	90	3	process	process	NOUN
can-1682	90	4	is	be	AUX
can-1682	90	5	carried	carry	VERB
can-1682	90	6	out	out	ADP
can-1682	90	7	by	by	ADP
can-1682	90	8	radiofrequency	radiofrequency	NOUN
can-1682	90	9	,	,	PUNCT
can-1682	90	10	the	the	DET
can-1682	90	11	gases	gas	NOUN
can-1682	90	12	most	most	ADV
can-1682	90	13	frequently	frequently	ADV
can-1682	90	14	handled	handle	VERB
can-1682	90	15	are	be	AUX
can-1682	90	16	methane	methane	NOUN
can-1682	90	17	,	,	PUNCT
can-1682	90	18	as	as	ADP
can-1682	90	19	a	a	DET
can-1682	90	20	84	84	NUM
can-1682	90	21	carbon	carbon	NOUN
can-1682	90	22	source	source	NOUN
can-1682	90	23	,	,	PUNCT
can-1682	90	24	and	and	CCONJ
can-1682	90	25	hydrogen	hydrogen	NOUN
can-1682	90	26	.	.	PUNCT
can-1682	91	1	this	this	DET
can-1682	91	2	synthesis	synthesis	NOUN
can-1682	91	3	method	method	NOUN
can-1682	91	4	is	be	AUX
can-1682	91	5	very	very	ADV
can-1682	91	6	favorable	favorable	ADJ
can-1682	91	7	due	due	ADJ
can-1682	91	8	to	to	ADP
can-1682	91	9	the	the	DET
can-1682	91	10	formation	formation	NOUN
can-1682	91	11	of	of	ADP
can-1682	91	12	pentagonal	pentagonal	ADJ
can-1682	91	13	carbon	carbon	NOUN
can-1682	91	14	rings	ring	NOUN
can-1682	91	15	,	,	PUNCT
can-1682	91	16	which	which	PRON
can-1682	91	17	are	be	AUX
can-1682	91	18	indispensable	indispensable	ADJ
can-1682	91	19	for	for	ADP
can-1682	91	20	the	the	DET
can-1682	91	21	formation	formation	NOUN
can-1682	91	22	of	of	ADP
can-1682	91	23	the	the	DET
can-1682	91	24	concentric	concentric	ADJ
can-1682	91	25	spheres[39	spheres[39	NOUN
can-1682	91	26	]	]	PUNCT
can-1682	91	27	.	.	PUNCT
can-1682	92	1	unlike	unlike	ADP
can-1682	92	2	other	other	ADJ
can-1682	92	3	methods	method	NOUN
can-1682	92	4	,	,	PUNCT
can-1682	92	5	nanoonions	nanoonion	NOUN
can-1682	92	6	produced	produce	VERB
can-1682	92	7	by	by	ADP
can-1682	92	8	radiofrequency	radiofrequency	NOUN
can-1682	92	9	plasma	plasma	NOUN
can-1682	92	10	-	-	PUNCT
can-1682	92	11	assisted	assist	VERB
can-1682	92	12	chemical	chemical	NOUN
can-1682	92	13	vapor	vapor	NOUN
can-1682	92	14	deposition	deposition	NOUN
can-1682	92	15	do	do	AUX
can-1682	92	16	not	not	PART
can-1682	92	17	generate	generate	VERB
can-1682	92	18	other	other	ADJ
can-1682	92	19	types	type	NOUN
can-1682	92	20	of	of	ADP
can-1682	92	21	products	product	NOUN
can-1682	92	22	,	,	PUNCT
can-1682	92	23	such	such	ADJ
can-1682	92	24	as	as	ADP
can-1682	92	25	carbon	carbon	NOUN
can-1682	92	26	nanotubes[39	nanotubes[39	NOUN
can-1682	92	27	]	]	PUNCT
can-1682	92	28	.	.	PUNCT
can-1682	93	1	structures	structure	NOUN
can-1682	93	2	up	up	ADP
can-1682	93	3	to	to	PART
can-1682	93	4	50	50	NUM
can-1682	93	5	nm	nm	NOUN
can-1682	93	6	in	in	ADP
can-1682	93	7	diameter	diameter	NOUN
can-1682	93	8	with	with	ADP
can-1682	93	9	wave	wave	NOUN
can-1682	93	10	-	-	PUNCT
can-1682	93	11	like	like	ADJ
can-1682	93	12	behavior	behavior	NOUN
can-1682	93	13	in	in	ADP
can-1682	93	14	the	the	DET
can-1682	93	15	layers	layer	NOUN
can-1682	93	16	due	due	ADP
can-1682	93	17	to	to	ADP
can-1682	93	18	the	the	DET
can-1682	93	19	formation	formation	NOUN
can-1682	93	20	of	of	ADP
can-1682	93	21	pentagonal	pentagonal	ADJ
can-1682	93	22	,	,	PUNCT
can-1682	93	23	hexagonal	hexagonal	ADJ
can-1682	93	24	and	and	CCONJ
can-1682	93	25	heptagonal	heptagonal	ADJ
can-1682	93	26	carbon	carbon	NOUN
can-1682	93	27	rings	ring	NOUN
can-1682	93	28	have	have	AUX
can-1682	93	29	been	be	AUX
can-1682	93	30	reported[39	reported[39	NOUN
can-1682	93	31	]	]	PUNCT
can-1682	93	32	.	.	PUNCT
can-1682	94	1	in	in	ADP
can-1682	94	2	addition	addition	NOUN
can-1682	94	3	to	to	ADP
can-1682	94	4	not	not	PART
can-1682	94	5	obtaining	obtain	VERB
can-1682	94	6	carbon	carbon	NOUN
can-1682	94	7	nanotubes	nanotube	NOUN
can-1682	94	8	by	by	ADP
can-1682	94	9	this	this	DET
can-1682	94	10	synthesis	synthesis	NOUN
can-1682	94	11	,	,	PUNCT
can-1682	94	12	the	the	DET
can-1682	94	13	nano	nano	NOUN
can-1682	94	14	-	-	PUNCT
can-1682	94	15	beads	bead	NOUN
can-1682	94	16	present	present	VERB
can-1682	94	17	a	a	DET
can-1682	94	18	unique	unique	ADJ
can-1682	94	19	behavior	behavior	NOUN
can-1682	94	20	because	because	SCONJ
can-1682	94	21	during	during	ADP
can-1682	94	22	the	the	DET
can-1682	94	23	growth	growth	NOUN
can-1682	94	24	mechanism	mechanism	NOUN
can-1682	94	25	they	they	PRON
can-1682	94	26	do	do	AUX
can-1682	94	27	not	not	PART
can-1682	94	28	encapsulate	encapsulate	VERB
can-1682	94	29	the	the	DET
can-1682	94	30	catalyst	catalyst	NOUN
can-1682	94	31	used	use	VERB
can-1682	94	32	as	as	SCONJ
can-1682	94	33	had	have	AUX
can-1682	94	34	been	be	AUX
can-1682	94	35	reported	report	VERB
can-1682	94	36	in	in	ADP
can-1682	94	37	other	other	ADJ
can-1682	94	38	synthesis	synthesis	NOUN
can-1682	94	39	methods[39	methods[39	NOUN
can-1682	94	40	]	]	PUNCT
can-1682	94	41	and	and	CCONJ
can-1682	94	42	the	the	DET
can-1682	94	43	result	result	NOUN
can-1682	94	44	is	be	AUX
can-1682	94	45	a	a	DET
can-1682	94	46	product	product	NOUN
can-1682	94	47	with	with	ADP
can-1682	94	48	fewer	few	ADJ
can-1682	94	49	impurities	impurity	NOUN
can-1682	94	50	.	.	PUNCT
can-1682	95	1	3.3	3.3	NUM
can-1682	95	2	nanotubes	nanotube	VERB
can-1682	95	3	the	the	DET
can-1682	95	4	field	field	NOUN
can-1682	95	5	of	of	ADP
can-1682	95	6	research	research	NOUN
can-1682	95	7	on	on	ADP
can-1682	95	8	carbon	carbon	NOUN
can-1682	95	9	nanotubes	nanotube	NOUN
can-1682	95	10	began	begin	VERB
can-1682	95	11	in	in	ADP
can-1682	95	12	1991	1991	NUM
can-1682	95	13	,	,	PUNCT
can-1682	95	14	when	when	SCONJ
can-1682	95	15	they	they	PRON
can-1682	95	16	were	be	AUX
can-1682	95	17	experimentally	experimentally	ADV
can-1682	95	18	observed	observe	VERB
can-1682	95	19	by	by	ADP
can-1682	95	20	transmission	transmission	NOUN
can-1682	95	21	electron	electron	NOUN
can-1682	95	22	microscopy	microscopy	NOUN
can-1682	95	23	(	(	PUNCT
can-1682	95	24	tem	tem	PROPN
can-1682	95	25	)	)	PUNCT
can-1682	95	26	,	,	PUNCT
can-1682	95	27	and	and	CCONJ
can-1682	95	28	the	the	DET
can-1682	95	29	conditions	condition	NOUN
can-1682	95	30	for	for	ADP
can-1682	95	31	the	the	DET
can-1682	95	32	synthesis	synthesis	NOUN
can-1682	95	33	of	of	ADP
can-1682	95	34	large	large	ADJ
can-1682	95	35	quantities	quantity	NOUN
can-1682	95	36	of	of	ADP
can-1682	95	37	nanotubes	nanotube	NOUN
can-1682	95	38	were	be	AUX
can-1682	95	39	subsequently	subsequently	ADV
can-1682	95	40	reported	report	VERB
can-1682	95	41	,	,	PUNCT
can-1682	95	42	early	early	ADJ
can-1682	95	43	work	work	NOUN
can-1682	95	44	was	be	AUX
can-1682	95	45	carried	carry	VERB
can-1682	95	46	out	out	ADP
can-1682	95	47	on	on	ADP
can-1682	95	48	multi	multi	ADJ
can-1682	95	49	-	-	ADJ
can-1682	95	50	wall	wall	ADJ
can-1682	95	51	carbon	carbon	NOUN
can-1682	95	52	nanotubes	nanotube	NOUN
can-1682	95	53	(	(	PUNCT
can-1682	95	54	mwcnts	mwcnt	NOUN
can-1682	95	55	)	)	PUNCT
can-1682	95	56	,	,	PUNCT
can-1682	95	57	which	which	PRON
can-1682	95	58	later	later	ADV
can-1682	95	59	led	lead	VERB
can-1682	95	60	to	to	ADP
can-1682	95	61	the	the	DET
can-1682	95	62	discovery	discovery	NOUN
can-1682	95	63	of	of	ADP
can-1682	95	64	smaller	small	ADJ
can-1682	95	65	diameter	diameter	NOUN
can-1682	95	66	single	single	ADJ
can-1682	95	67	-	-	PUNCT
can-1682	95	68	wall	wall	NOUN
can-1682	95	69	carbon	carbon	NOUN
can-1682	95	70	nanotubes	nanotube	NOUN
can-1682	95	71	(	(	PUNCT
can-1682	95	72	swcnts	swcnt	NOUN
can-1682	95	73	)	)	PUNCT
can-1682	95	74	in	in	ADP
can-1682	95	75	1993[40	1993[40	NUM
can-1682	95	76	]	]	PUNCT
can-1682	95	77	.	.	PUNCT
can-1682	96	1	the	the	DET
can-1682	96	2	synthesis	synthesis	NOUN
can-1682	96	3	of	of	ADP
can-1682	96	4	nanotubes	nanotube	NOUN
can-1682	96	5	can	can	AUX
can-1682	96	6	be	be	AUX
can-1682	96	7	carried	carry	VERB
can-1682	96	8	out	out	ADP
can-1682	96	9	by	by	ADP
can-1682	96	10	different	different	ADJ
can-1682	96	11	methods	method	NOUN
can-1682	96	12	that	that	PRON
can-1682	96	13	have	have	AUX
can-1682	96	14	been	be	AUX
can-1682	96	15	reported	report	VERB
can-1682	96	16	in	in	ADP
can-1682	96	17	recent	recent	ADJ
can-1682	96	18	years	year	NOUN
can-1682	96	19	,	,	PUNCT
can-1682	96	20	however	however	ADV
can-1682	96	21	,	,	PUNCT
can-1682	96	22	the	the	DET
can-1682	96	23	most	most	ADV
can-1682	96	24	important	important	ADJ
can-1682	96	25	is	be	AUX
can-1682	96	26	chemical	chemical	ADJ
can-1682	96	27	vapor	vapor	NOUN
can-1682	96	28	deposition	deposition	NOUN
can-1682	96	29	(	(	PUNCT
can-1682	96	30	cvd	cvd	PROPN
can-1682	96	31	)	)	PUNCT
can-1682	96	32	,	,	PUNCT
can-1682	96	33	with	with	ADP
can-1682	96	34	which	which	PRON
can-1682	96	35	mwcnts	mwcnt	NOUN
can-1682	96	36	can	can	AUX
can-1682	96	37	be	be	AUX
can-1682	96	38	obtained	obtain	VERB
can-1682	96	39	,	,	PUNCT
can-1682	96	40	with	with	ADP
can-1682	96	41	the	the	DET
can-1682	96	42	presence	presence	NOUN
can-1682	96	43	of	of	ADP
can-1682	96	44	a	a	DET
can-1682	96	45	floating	float	VERB
can-1682	96	46	catalyst	catalyst	NOUN
can-1682	96	47	,	,	PUNCT
can-1682	96	48	by	by	ADP
can-1682	96	49	carrying	carry	VERB
can-1682	96	50	out	out	ADP
can-1682	96	51	a	a	DET
can-1682	96	52	pyrolytic	pyrolytic	ADJ
can-1682	96	53	decomposition	decomposition	NOUN
can-1682	96	54	of	of	ADP
can-1682	96	55	a	a	DET
can-1682	96	56	feed	feed	NOUN
can-1682	96	57	solution	solution	NOUN
can-1682	96	58	(	(	PUNCT
can-1682	96	59	benzene	benzene	NOUN
can-1682	96	60	-	-	PUNCT
can-1682	96	61	ferrocene	ferrocene	NOUN
can-1682	96	62	,	,	PUNCT
can-1682	96	63	for	for	ADP
can-1682	96	64	example	example	NOUN
can-1682	96	65	)	)	PUNCT
can-1682	96	66	in	in	ADP
can-1682	96	67	a	a	DET
can-1682	96	68	furnace	furnace	NOUN
can-1682	96	69	,	,	PUNCT
can-1682	96	70	by	by	ADP
can-1682	96	71	flowing	flow	VERB
can-1682	96	72	argon	argon	NOUN
can-1682	96	73	through	through	ADP
can-1682	96	74	a	a	DET
can-1682	96	75	reaction	reaction	NOUN
can-1682	96	76	chamber	chamber	NOUN
can-1682	96	77	,	,	PUNCT
can-1682	96	78	with	with	ADP
can-1682	96	79	temperatures	temperature	NOUN
can-1682	96	80	of	of	ADP
can-1682	96	81	about	about	ADV
can-1682	96	82	750	750	NUM
can-1682	96	83	℃	℃	PROPN
can-1682	96	84	in	in	ADP
can-1682	96	85	the	the	DET
can-1682	96	86	growth	growth	NOUN
can-1682	96	87	zone	zone	NOUN
can-1682	96	88	and	and	CCONJ
can-1682	96	89	120	120	NUM
can-1682	96	90	℃	℃	PROPN
can-1682	96	91	at	at	ADP
can-1682	96	92	the	the	DET
can-1682	96	93	feedstock	feedstock	NOUN
can-1682	96	94	injection	injection	NOUN
can-1682	96	95	point[41	point[41	NOUN
can-1682	96	96	]	]	PUNCT
can-1682	96	97	.	.	PUNCT
can-1682	97	1	the	the	DET
can-1682	97	2	latter	latter	ADJ
can-1682	97	3	is	be	AUX
can-1682	97	4	placed	place	VERB
can-1682	97	5	in	in	ADP
can-1682	97	6	an	an	DET
can-1682	97	7	alumina	alumina	NOUN
can-1682	97	8	crucible	crucible	NOUN
can-1682	97	9	and	and	CCONJ
can-1682	97	10	vaporized	vaporize	VERB
can-1682	97	11	so	so	SCONJ
can-1682	97	12	that	that	SCONJ
can-1682	97	13	the	the	DET
can-1682	97	14	argon	argon	NOUN
can-1682	97	15	flow	flow	NOUN
can-1682	97	16	transports	transport	VERB
can-1682	97	17	the	the	DET
can-1682	97	18	vapor	vapor	NOUN
can-1682	97	19	to	to	ADP
can-1682	97	20	the	the	DET
can-1682	97	21	growth	growth	NOUN
can-1682	97	22	zone	zone	NOUN
can-1682	97	23	and	and	CCONJ
can-1682	97	24	the	the	DET
can-1682	97	25	carbon	carbon	NOUN
can-1682	97	26	nanotubes	nanotube	NOUN
can-1682	97	27	are	be	AUX
can-1682	97	28	deposited	deposit	VERB
can-1682	97	29	on	on	ADP
can-1682	97	30	the	the	DET
can-1682	97	31	substrate	substrate	NOUN
can-1682	97	32	.	.	PUNCT
can-1682	98	1	the	the	DET
can-1682	98	2	aacvd	aacvd	NOUN
can-1682	98	3	variant	variant	NOUN
can-1682	98	4	has	have	AUX
can-1682	98	5	also	also	ADV
can-1682	98	6	been	be	AUX
can-1682	98	7	used	use	VERB
can-1682	98	8	for	for	ADP
can-1682	98	9	the	the	DET
can-1682	98	10	synthesis	synthesis	NOUN
can-1682	98	11	of	of	ADP
can-1682	98	12	carbon	carbon	NOUN
can-1682	98	13	nanotubes	nanotube	NOUN
can-1682	98	14	.	.	PUNCT
can-1682	99	1	the	the	DET
can-1682	99	2	same	same	ADJ
can-1682	99	3	technique	technique	NOUN
can-1682	99	4	can	can	AUX
can-1682	99	5	be	be	AUX
can-1682	99	6	carried	carry	VERB
can-1682	99	7	out	out	ADP
can-1682	99	8	at	at	ADP
can-1682	99	9	atmospheric	atmospheric	ADJ
can-1682	99	10	pressure	pressure	NOUN
can-1682	99	11	using	use	VERB
can-1682	99	12	metal	metal	NOUN
can-1682	99	13	nanoparticles	nanoparticle	NOUN
can-1682	99	14	(	(	PUNCT
can-1682	99	15	nps	nps	PROPN
can-1682	99	16	)	)	PUNCT
can-1682	99	17	on	on	ADP
can-1682	99	18	a	a	DET
can-1682	99	19	substrate	substrate	NOUN
can-1682	99	20	as	as	ADP
can-1682	99	21	a	a	DET
can-1682	99	22	seeded	seeded	ADJ
can-1682	99	23	catalyst	catalyst	NOUN
can-1682	99	24	,	,	PUNCT
can-1682	99	25	obtaining	obtain	VERB
can-1682	99	26	swcnt	swcnt	ADV
can-1682	99	27	.	.	PUNCT
can-1682	100	1	by	by	ADP
can-1682	100	2	heating	heat	VERB
can-1682	100	3	the	the	DET
can-1682	100	4	catalyst	catalyst	NOUN
can-1682	100	5	to	to	ADP
can-1682	100	6	elevated	elevate	VERB
can-1682	100	7	temperatures	temperature	NOUN
can-1682	100	8	,	,	PUNCT
can-1682	100	9	the	the	DET
can-1682	100	10	nps	nps	PROPN
can-1682	100	11	become	become	VERB
can-1682	100	12	liquid	liquid	ADJ
can-1682	100	13	or	or	CCONJ
can-1682	100	14	semi	semi	ADJ
can-1682	100	15	-	-	ADJ
can-1682	100	16	liquid	liquid	ADJ
can-1682	100	17	and	and	CCONJ
can-1682	100	18	hydrocarbon	hydrocarbon	NOUN
can-1682	100	19	decomposition	decomposition	NOUN
can-1682	100	20	occurs	occur	VERB
can-1682	100	21	on	on	ADP
can-1682	100	22	the	the	DET
can-1682	100	23	surface	surface	NOUN
can-1682	100	24	of	of	ADP
can-1682	100	25	these	these	DET
can-1682	100	26	metal	metal	NOUN
can-1682	100	27	droplets	droplet	NOUN
can-1682	100	28	,	,	PUNCT
can-1682	100	29	producing	produce	VERB
can-1682	100	30	carbon	carbon	NOUN
can-1682	100	31	.	.	PUNCT
can-1682	101	1	carbon	carbon	NOUN
can-1682	101	2	precipitates	precipitate	NOUN
can-1682	101	3	on	on	ADP
can-1682	101	4	the	the	DET
can-1682	101	5	outer	outer	ADJ
can-1682	101	6	layer	layer	NOUN
can-1682	101	7	of	of	ADP
can-1682	101	8	the	the	DET
can-1682	101	9	catalysts	catalyst	NOUN
can-1682	101	10	upon	upon	SCONJ
can-1682	101	11	reaching	reach	VERB
can-1682	101	12	its	its	PRON
can-1682	101	13	required	require	VERB
can-1682	101	14	saturation	saturation	NOUN
can-1682	101	15	level	level	NOUN
can-1682	101	16	,	,	PUNCT
can-1682	101	17	starting	start	VERB
can-1682	101	18	to	to	PART
can-1682	101	19	precipitate	precipitate	VERB
can-1682	101	20	on	on	ADP
can-1682	101	21	its	its	PRON
can-1682	101	22	outer	outer	ADJ
can-1682	101	23	layer	layer	NOUN
can-1682	101	24	,	,	PUNCT
can-1682	101	25	forming	form	VERB
can-1682	101	26	tubular	tubular	ADJ
can-1682	101	27	carbon	carbon	NOUN
can-1682	101	28	solids	solid	NOUN
can-1682	101	29	with	with	ADP
can-1682	101	30	sp2	sp2	NOUN
can-1682	101	31	structure	structure	NOUN
can-1682	101	32	,	,	PUNCT
can-1682	101	33	resulting	result	VERB
can-1682	101	34	in	in	ADP
can-1682	101	35	the	the	DET
can-1682	101	36	growth	growth	NOUN
can-1682	101	37	of	of	ADP
can-1682	101	38	carbon	carbon	NOUN
can-1682	101	39	nanotubes[42	nanotubes[42	NOUN
can-1682	101	40	]	]	PUNCT
can-1682	101	41	.	.	PUNCT
can-1682	102	1	3.4	3.4	NUM
can-1682	102	2	graphene	graphene	NOUN
can-1682	102	3	graphene	graphene	NOUN
can-1682	102	4	is	be	AUX
can-1682	102	5	a	a	DET
can-1682	102	6	two	two	NUM
can-1682	102	7	-	-	PUNCT
can-1682	102	8	dimensional	dimensional	ADJ
can-1682	102	9	(	(	PUNCT
can-1682	102	10	2d	2d	NOUN
can-1682	102	11	)	)	PUNCT
can-1682	102	12	material	material	NOUN
can-1682	102	13	composed	compose	VERB
can-1682	102	14	of	of	ADP
can-1682	102	15	a	a	DET
can-1682	102	16	layer	layer	NOUN
can-1682	102	17	of	of	ADP
can-1682	102	18	carbon	carbon	NOUN
can-1682	102	19	atoms	atom	NOUN
can-1682	102	20	densely	densely	ADV
can-1682	102	21	packed	pack	VERB
can-1682	102	22	in	in	ADP
can-1682	102	23	a	a	DET
can-1682	102	24	hexagonal	hexagonal	ADJ
can-1682	102	25	arrangement	arrangement	NOUN
can-1682	102	26	of	of	ADP
can-1682	102	27	sp2	sp2	NOUN
can-1682	102	28	carbons	carbon	NOUN
can-1682	102	29	bonded	bond	VERB
can-1682	102	30	in	in	ADP
can-1682	102	31	a	a	DET
can-1682	102	32	benzene	benzene	NOUN
can-1682	102	33	ring	ring	NOUN
can-1682	102	34	structure[43,44	structure[43,44	NOUN
can-1682	102	35	]	]	PUNCT
can-1682	102	36	.	.	PUNCT
can-1682	103	1	the	the	DET
can-1682	103	2	term	term	NOUN
can-1682	103	3	“	"	PUNCT
can-1682	103	4	graphene	graphene	NOUN
can-1682	103	5	”	"	PUNCT
can-1682	103	6	,	,	PUNCT
can-1682	103	7	first	first	ADV
can-1682	103	8	used	use	VERB
can-1682	103	9	in	in	ADP
can-1682	103	10	1987	1987	NUM
can-1682	103	11	by	by	ADP
can-1682	103	12	sylvie	sylvie	PROPN
can-1682	103	13	mouras	moura	NOUN
can-1682	103	14	,	,	PUNCT
can-1682	103	15	refers	refer	VERB
can-1682	103	16	to	to	ADP
can-1682	103	17	a	a	DET
can-1682	103	18	single	single	ADJ
can-1682	103	19	atom	atom	NOUN
can-1682	103	20	-	-	PUNCT
can-1682	103	21	thick	thick	ADJ
can-1682	103	22	layer	layer	NOUN
can-1682	103	23	of	of	ADP
can-1682	103	24	carbon[45	carbon[45	PROPN
can-1682	103	25	]	]	PUNCT
can-1682	103	26	)	)	PUNCT
can-1682	103	27	.	.	PUNCT
can-1682	104	1	graphene	graphene	NOUN
can-1682	104	2	films	film	NOUN
can-1682	104	3	were	be	AUX
can-1682	104	4	first	first	ADV
can-1682	104	5	isolated	isolate	VERB
can-1682	104	6	by	by	ADP
can-1682	104	7	the	the	DET
can-1682	104	8	method	method	NOUN
can-1682	104	9	of	of	ADP
can-1682	104	10	mechanical	mechanical	ADJ
can-1682	104	11	exfoliation	exfoliation	NOUN
can-1682	104	12	of	of	ADP
can-1682	104	13	a	a	DET
can-1682	104	14	piece	piece	NOUN
can-1682	104	15	of	of	ADP
can-1682	104	16	highly	highly	ADV
can-1682	104	17	oriented	orient	VERB
can-1682	104	18	pyrolytic	pyrolytic	ADJ
can-1682	104	19	graphite[8	graphite[8	NOUN
can-1682	104	20	]	]	PUNCT
can-1682	104	21	.	.	PUNCT
can-1682	105	1	in	in	ADP
can-1682	105	2	this	this	DET
can-1682	105	3	method	method	NOUN
can-1682	105	4	,	,	PUNCT
can-1682	105	5	graphene	graphene	NOUN
can-1682	105	6	sheets	sheet	NOUN
can-1682	105	7	stacked	stack	VERB
can-1682	105	8	on	on	ADP
can-1682	105	9	graphite	graphite	NOUN
can-1682	105	10	,	,	PUNCT
can-1682	105	11	weakly	weakly	ADV
can-1682	105	12	bound	bind	VERB
can-1682	105	13	by	by	ADP
can-1682	105	14	van	van	PROPN
can-1682	105	15	der	der	NOUN
can-1682	105	16	waals	waal	NOUN
can-1682	105	17	forces	force	NOUN
can-1682	105	18	,	,	PUNCT
can-1682	105	19	are	be	AUX
can-1682	105	20	separated	separate	VERB
can-1682	105	21	using	use	VERB
can-1682	105	22	adhesive	adhesive	ADJ
can-1682	105	23	tape	tape	NOUN
can-1682	105	24	,	,	PUNCT
can-1682	105	25	obtaining	obtain	VERB
can-1682	105	26	small	small	ADJ
can-1682	105	27	films	film	NOUN
can-1682	105	28	of	of	ADP
can-1682	105	29	varying	vary	VERB
can-1682	105	30	thickness[43	thickness[43	NOUN
can-1682	105	31	]	]	X
can-1682	105	32	.	.	PUNCT
can-1682	106	1	unfortunately	unfortunately	ADV
can-1682	106	2	,	,	PUNCT
can-1682	106	3	apart	apart	ADV
can-1682	106	4	from	from	ADP
can-1682	106	5	variations	variation	NOUN
can-1682	106	6	in	in	ADP
can-1682	106	7	thickness	thickness	NOUN
can-1682	106	8	,	,	PUNCT
can-1682	106	9	they	they	PRON
can-1682	106	10	have	have	VERB
can-1682	106	11	irregular	irregular	ADJ
can-1682	106	12	shapes	shape	NOUN
can-1682	106	13	and	and	CCONJ
can-1682	106	14	there	there	PRON
can-1682	106	15	is	be	VERB
can-1682	106	16	no	no	DET
can-1682	106	17	control	control	NOUN
can-1682	106	18	in	in	ADP
can-1682	106	19	their	their	PRON
can-1682	106	20	orientation[10	orientation[10	NOUN
can-1682	106	21	]	]	PUNCT
can-1682	106	22	.	.	PUNCT
can-1682	107	1	because	because	SCONJ
can-1682	107	2	of	of	ADP
can-1682	107	3	this	this	PRON
can-1682	107	4	,	,	PUNCT
can-1682	107	5	the	the	DET
can-1682	107	6	most	most	ADV
can-1682	107	7	commonly	commonly	ADV
can-1682	107	8	used	use	VERB
can-1682	107	9	synthesis	synthesis	NOUN
can-1682	107	10	method	method	NOUN
can-1682	107	11	today	today	NOUN
can-1682	107	12	is	be	AUX
can-1682	107	13	chemical	chemical	ADJ
can-1682	107	14	vapor	vapor	NOUN
can-1682	107	15	deposition	deposition	NOUN
can-1682	107	16	,	,	PUNCT
can-1682	107	17	which	which	PRON
can-1682	107	18	consists	consist	VERB
can-1682	107	19	of	of	ADP
can-1682	107	20	the	the	DET
can-1682	107	21	decomposition	decomposition	NOUN
can-1682	107	22	of	of	ADP
can-1682	107	23	a	a	DET
can-1682	107	24	frequently	frequently	ADV
can-1682	107	25	gaseous	gaseous	ADJ
can-1682	107	26	hydrocarbon	hydrocarbon	NOUN
can-1682	107	27	(	(	PUNCT
can-1682	107	28	solid	solid	ADJ
can-1682	107	29	and	and	CCONJ
can-1682	107	30	liquid	liquid	ADJ
can-1682	107	31	precursors	precursor	NOUN
can-1682	107	32	are	be	AUX
can-1682	107	33	also	also	ADV
can-1682	107	34	possible	possible	ADJ
can-1682	107	35	)	)	PUNCT
can-1682	107	36	,	,	PUNCT
can-1682	107	37	usually	usually	ADV
can-1682	107	38	by	by	ADP
can-1682	107	39	means	mean	NOUN
can-1682	107	40	of	of	ADP
can-1682	107	41	high	high	ADJ
can-1682	107	42	temperatures	temperature	NOUN
can-1682	107	43	(	(	PUNCT
can-1682	107	44	~1,000	~1,000	X
can-1682	107	45	℃	℃	PROPN
can-1682	107	46	)	)	PUNCT
can-1682	107	47	,	,	PUNCT
can-1682	107	48	and	and	CCONJ
can-1682	107	49	its	its	PRON
can-1682	107	50	deposition	deposition	NOUN
can-1682	107	51	on	on	ADP
can-1682	107	52	a	a	DET
can-1682	107	53	copper	copper	NOUN
can-1682	107	54	surface[10	surface[10	ADV
can-1682	107	55	]	]	PUNCT
can-1682	107	56	.	.	PUNCT
can-1682	108	1	carbon	carbon	NOUN
can-1682	108	2	atoms	atom	NOUN
can-1682	108	3	are	be	AUX
can-1682	108	4	provided	provide	VERB
can-1682	108	5	by	by	ADP
can-1682	108	6	the	the	DET
can-1682	108	7	precursor	precursor	NOUN
can-1682	108	8	hydrocarbon	hydrocarbon	NOUN
can-1682	108	9	,	,	PUNCT
can-1682	108	10	deposited	deposit	VERB
can-1682	108	11	on	on	ADP
can-1682	108	12	the	the	DET
can-1682	108	13	nucleation	nucleation	NOUN
can-1682	108	14	sites	site	NOUN
can-1682	108	15	of	of	ADP
can-1682	108	16	the	the	DET
can-1682	108	17	metal	metal	NOUN
can-1682	108	18	substrate	substrate	NOUN
can-1682	108	19	and	and	CCONJ
can-1682	108	20	dispersed	disperse	VERB
can-1682	108	21	on	on	ADP
can-1682	108	22	its	its	PRON
can-1682	108	23	surface	surface	NOUN
can-1682	108	24	aided	aid	VERB
can-1682	108	25	by	by	ADP
can-1682	108	26	low	low	ADJ
can-1682	108	27	pressures	pressure	NOUN
can-1682	108	28	(	(	PUNCT
can-1682	108	29	~10−3–10−4	~10−3–10−4	X
can-1682	108	30	atm	atm	X
can-1682	108	31	)	)	PUNCT
can-1682	108	32	forming	form	VERB
can-1682	108	33	graphene	graphene	ADJ
can-1682	108	34	layers	layer	NOUN
can-1682	108	35	.	.	PUNCT
can-1682	109	1	this	this	DET
can-1682	109	2	technique	technique	NOUN
can-1682	109	3	allows	allow	VERB
can-1682	109	4	producing	produce	VERB
can-1682	109	5	continuous	continuous	ADJ
can-1682	109	6	graphene	graphene	NOUN
can-1682	109	7	films	film	NOUN
can-1682	109	8	of	of	ADP
can-1682	109	9	high	high	ADJ
can-1682	109	10	purity	purity	NOUN
can-1682	109	11	over	over	ADP
can-1682	109	12	large	large	ADJ
can-1682	109	13	areas[8	areas[8	PROPN
can-1682	109	14	]	]	X
can-1682	109	15	.	.	PUNCT
can-1682	110	1	in	in	ADP
can-1682	110	2	recent	recent	ADJ
can-1682	110	3	years	year	NOUN
can-1682	110	4	this	this	DET
can-1682	110	5	material	material	NOUN
can-1682	110	6	has	have	AUX
can-1682	110	7	been	be	AUX
can-1682	110	8	extensively	extensively	ADV
can-1682	110	9	studied	study	VERB
can-1682	110	10	,	,	PUNCT
can-1682	110	11	due	due	ADP
can-1682	110	12	to	to	ADP
can-1682	110	13	the	the	DET
can-1682	110	14	belief	belief	NOUN
can-1682	110	15	that	that	SCONJ
can-1682	110	16	graphene	graphene	NOUN
can-1682	110	17	could	could	AUX
can-1682	110	18	replace	replace	VERB
can-1682	110	19	many	many	ADJ
can-1682	110	20	of	of	ADP
can-1682	110	21	the	the	DET
can-1682	110	22	existing	exist	VERB
can-1682	110	23	materials	material	NOUN
can-1682	110	24	on	on	ADP
can-1682	110	25	the	the	DET
can-1682	110	26	market	market	NOUN
can-1682	110	27	,	,	PUNCT
can-1682	110	28	since	since	SCONJ
can-1682	110	29	it	it	PRON
can-1682	110	30	possesses	possess	VERB
can-1682	110	31	unique	unique	ADJ
can-1682	110	32	properties	property	NOUN
can-1682	110	33	such	such	ADJ
can-1682	110	34	as	as	ADP
can-1682	110	35	:	:	PUNCT
can-1682	110	36	high	high	ADJ
can-1682	110	37	mechanical	mechanical	ADJ
can-1682	110	38	strength	strength	NOUN
can-1682	110	39	and	and	CCONJ
can-1682	110	40	elasticity	elasticity	NOUN
can-1682	110	41	,	,	PUNCT
can-1682	110	42	high	high	ADJ
can-1682	110	43	elec	elec	NOUN
can-1682	110	44	85	85	NUM
can-1682	110	45	trical	trical	ADJ
can-1682	110	46	and	and	CCONJ
can-1682	110	47	thermal	thermal	ADJ
can-1682	110	48	conductivity	conductivity	NOUN
can-1682	110	49	,	,	PUNCT
can-1682	110	50	transparency	transparency	NOUN
can-1682	110	51	and	and	CCONJ
can-1682	110	52	impermeability	impermeability	NOUN
can-1682	110	53	.	.	PUNCT
can-1682	111	1	for	for	ADP
can-1682	111	2	the	the	DET
can-1682	111	3	reader	reader	NOUN
can-1682	111	4	who	who	PRON
can-1682	111	5	wishes	wish	VERB
can-1682	111	6	to	to	PART
can-1682	111	7	delve	delve	VERB
can-1682	111	8	into	into	ADP
can-1682	111	9	the	the	DET
can-1682	111	10	study	study	NOUN
can-1682	111	11	of	of	ADP
can-1682	111	12	graphene	graphene	NOUN
can-1682	111	13	,	,	PUNCT
can-1682	111	14	it	it	PRON
can-1682	111	15	is	be	AUX
can-1682	111	16	recommended	recommend	VERB
can-1682	111	17	to	to	PART
can-1682	111	18	consult	consult	VERB
can-1682	111	19	the	the	DET
can-1682	111	20	review	review	NOUN
can-1682	111	21	by	by	ADP
can-1682	111	22	soldano	soldano	NOUN
can-1682	111	23	and	and	CCONJ
can-1682	111	24	collaborators	collaborator	NOUN
can-1682	111	25	on	on	ADP
can-1682	111	26	its	its	PRON
can-1682	111	27	production	production	NOUN
can-1682	111	28	and	and	CCONJ
can-1682	111	29	properties[46	properties[46	NOUN
can-1682	111	30	]	]	PUNCT
can-1682	111	31	.	.	PUNCT
can-1682	112	1	3.5	3.5	NUM
can-1682	112	2	nanospheres	nanosphere	NOUN
can-1682	112	3	for	for	ADP
can-1682	112	4	the	the	DET
can-1682	112	5	synthesis	synthesis	NOUN
can-1682	112	6	of	of	ADP
can-1682	112	7	carbon	carbon	NOUN
can-1682	112	8	nanospheres	nanosphere	NOUN
can-1682	112	9	by	by	ADP
can-1682	112	10	the	the	DET
can-1682	112	11	ambient	ambient	ADJ
can-1682	112	12	pressure	pressure	NOUN
can-1682	112	13	chemical	chemical	NOUN
can-1682	112	14	vapor	vapor	NOUN
can-1682	112	15	deposition	deposition	NOUN
can-1682	112	16	(	(	PUNCT
can-1682	112	17	apcvd	apcvd	NOUN
can-1682	112	18	)	)	PUNCT
can-1682	112	19	method	method	NOUN
can-1682	112	20	,	,	PUNCT
can-1682	112	21	solid	solid	ADJ
can-1682	112	22	,	,	PUNCT
can-1682	112	23	liquid	liquid	ADJ
can-1682	112	24	and	and	CCONJ
can-1682	112	25	gaseous	gaseous	ADJ
can-1682	112	26	carbon	carbon	NOUN
can-1682	112	27	precursors	precursor	NOUN
can-1682	112	28	are	be	AUX
can-1682	112	29	used	use	VERB
can-1682	112	30	.	.	PUNCT
can-1682	113	1	for	for	ADP
can-1682	113	2	liquid	liquid	ADJ
can-1682	113	3	precursors	precursor	NOUN
can-1682	113	4	,	,	PUNCT
can-1682	113	5	various	various	ADJ
can-1682	113	6	delivery	delivery	NOUN
can-1682	113	7	systems	system	NOUN
can-1682	113	8	are	be	AUX
can-1682	113	9	applied	apply	VERB
can-1682	113	10	such	such	ADJ
can-1682	113	11	as	as	ADP
can-1682	113	12	the	the	DET
can-1682	113	13	use	use	NOUN
can-1682	113	14	of	of	ADP
can-1682	113	15	bubblers[47	bubblers[47	NOUN
can-1682	113	16	]	]	PUNCT
can-1682	113	17	,	,	PUNCT
can-1682	113	18	injection	injection	NOUN
can-1682	113	19	pumps	pump	NOUN
can-1682	113	20	or	or	CCONJ
can-1682	113	21	syringes	syrinx	NOUN
can-1682	113	22	(	(	PUNCT
can-1682	113	23	direct	direct	ADJ
can-1682	113	24	liquid	liquid	ADJ
can-1682	113	25	injection)[47	injection)[47	NOUN
can-1682	113	26	]	]	PUNCT
can-1682	113	27	,	,	PUNCT
can-1682	113	28	capillary	capillary	ADJ
can-1682	113	29	tubes	tube	NOUN
can-1682	113	30	,	,	PUNCT
can-1682	113	31	as	as	ADV
can-1682	113	32	well	well	ADV
can-1682	113	33	as	as	ADP
can-1682	113	34	aerosol	aerosol	NOUN
can-1682	113	35	assisted	assist	VERB
can-1682	113	36	pyrolysis	pyrolysis	NOUN
can-1682	113	37	mechanisms	mechanism	NOUN
can-1682	113	38	[	[	X
can-1682	113	39	48	48	NUM
can-1682	113	40	]	]	PUNCT
can-1682	113	41	from	from	ADP
can-1682	113	42	the	the	DET
can-1682	113	43	precursor	precursor	NOUN
can-1682	113	44	solution	solution	NOUN
can-1682	113	45	(	(	PUNCT
can-1682	113	46	toluene	toluene	NOUN
can-1682	113	47	,	,	PUNCT
can-1682	113	48	naphthalene	naphthalene	NOUN
can-1682	113	49	,	,	PUNCT
can-1682	113	50	etc	etc	X
can-1682	113	51	.	.	X
can-1682	113	52	)	)	PUNCT
can-1682	113	53	.	.	PUNCT
can-1682	114	1	for	for	ADP
can-1682	114	2	gaseous	gaseous	ADJ
can-1682	114	3	precursors	precursor	NOUN
can-1682	114	4	different	different	ADJ
can-1682	114	5	types	type	NOUN
can-1682	114	6	of	of	ADP
can-1682	114	7	gas	gas	NOUN
can-1682	114	8	injectors	injector	NOUN
can-1682	114	9	are	be	AUX
can-1682	114	10	generally	generally	ADV
can-1682	114	11	used[49	used[49	NOUN
can-1682	114	12	]	]	PUNCT
can-1682	114	13	to	to	PART
can-1682	114	14	regulate	regulate	VERB
can-1682	114	15	the	the	DET
can-1682	114	16	amount	amount	NOUN
can-1682	114	17	of	of	ADP
can-1682	114	18	precursor	precursor	NOUN
can-1682	114	19	that	that	PRON
can-1682	114	20	will	will	AUX
can-1682	114	21	enter	enter	VERB
can-1682	114	22	the	the	DET
can-1682	114	23	system	system	NOUN
can-1682	114	24	.	.	PUNCT
can-1682	115	1	finally	finally	ADV
can-1682	115	2	,	,	PUNCT
can-1682	115	3	for	for	ADP
can-1682	115	4	solid	solid	ADJ
can-1682	115	5	precursors	precursor	NOUN
can-1682	115	6	,	,	PUNCT
can-1682	115	7	sublimation	sublimation	NOUN
can-1682	115	8	methods[50	methods[50	NOUN
can-1682	115	9	]	]	PUNCT
can-1682	115	10	or	or	CCONJ
can-1682	115	11	bubblers[51	bubblers[51	NUM
can-1682	115	12	]	]	PUNCT
can-1682	115	13	are	be	AUX
can-1682	115	14	applied	apply	VERB
can-1682	115	15	.	.	PUNCT
can-1682	116	1	these	these	DET
can-1682	116	2	systems	system	NOUN
can-1682	116	3	transport	transport	VERB
can-1682	116	4	the	the	DET
can-1682	116	5	precursors	precursor	NOUN
can-1682	116	6	to	to	ADP
can-1682	116	7	a	a	DET
can-1682	116	8	previously	previously	ADV
can-1682	116	9	heated	heat	VERB
can-1682	116	10	oven	oven	NOUN
can-1682	116	11	where	where	SCONJ
can-1682	116	12	the	the	DET
can-1682	116	13	temperature	temperature	NOUN
can-1682	116	14	range	range	NOUN
can-1682	116	15	varies	vary	VERB
can-1682	116	16	between	between	ADP
can-1682	116	17	800	800	NUM
can-1682	116	18	℃	℃	PROPN
can-1682	116	19	and	and	CCONJ
can-1682	116	20	1,100	1,100	NUM
can-1682	116	21	℃	℃	PROPN
can-1682	116	22	[	[	X
can-1682	116	23	52	52	NUM
can-1682	116	24	]	]	PUNCT
can-1682	116	25	,	,	PUNCT
can-1682	116	26	the	the	DET
can-1682	116	27	synthesis	synthesis	NOUN
can-1682	116	28	time	time	NOUN
can-1682	116	29	is	be	AUX
can-1682	116	30	variable	variable	ADJ
can-1682	116	31	,	,	PUNCT
can-1682	116	32	at	at	ADP
can-1682	116	33	the	the	DET
can-1682	116	34	end	end	NOUN
can-1682	116	35	of	of	ADP
can-1682	116	36	the	the	DET
can-1682	116	37	reaction	reaction	NOUN
can-1682	116	38	the	the	DET
can-1682	116	39	oven	oven	NOUN
can-1682	116	40	is	be	AUX
can-1682	116	41	programmed	program	VERB
can-1682	116	42	to	to	PART
can-1682	116	43	return	return	VERB
can-1682	116	44	to	to	ADP
can-1682	116	45	room	room	NOUN
can-1682	116	46	temperature	temperature	NOUN
can-1682	116	47	.	.	PUNCT
can-1682	117	1	subsequently	subsequently	ADV
can-1682	117	2	,	,	PUNCT
can-1682	117	3	the	the	DET
can-1682	117	4	product	product	NOUN
can-1682	117	5	is	be	AUX
can-1682	117	6	recovered	recover	VERB
can-1682	117	7	for	for	ADP
can-1682	117	8	analysis	analysis	NOUN
can-1682	117	9	.	.	PUNCT
can-1682	118	1	it	it	PRON
can-1682	118	2	should	should	AUX
can-1682	118	3	be	be	AUX
can-1682	118	4	noted	note	VERB
can-1682	118	5	that	that	SCONJ
can-1682	118	6	the	the	DET
can-1682	118	7	temperature	temperature	NOUN
can-1682	118	8	of	of	ADP
can-1682	118	9	the	the	DET
can-1682	118	10	synthesis	synthesis	NOUN
can-1682	118	11	plays	play	VERB
can-1682	118	12	an	an	DET
can-1682	118	13	important	important	ADJ
can-1682	118	14	role	role	NOUN
can-1682	118	15	in	in	ADP
can-1682	118	16	the	the	DET
can-1682	118	17	particle	particle	NOUN
can-1682	118	18	size	size	NOUN
can-1682	118	19	obtained	obtain	VERB
can-1682	118	20	,	,	PUNCT
can-1682	118	21	the	the	PRON
can-1682	118	22	higher	high	ADJ
can-1682	118	23	the	the	DET
can-1682	118	24	temperature	temperature	NOUN
can-1682	118	25	the	the	PRON
can-1682	118	26	smaller	small	ADJ
can-1682	118	27	the	the	DET
can-1682	118	28	diameter[52	diameter[52	NOUN
can-1682	118	29	]	]	PUNCT
can-1682	118	30	,	,	PUNCT
can-1682	118	31	and	and	CCONJ
can-1682	118	32	depending	depend	VERB
can-1682	118	33	on	on	ADP
can-1682	118	34	the	the	DET
can-1682	118	35	size	size	NOUN
can-1682	118	36	,	,	PUNCT
can-1682	118	37	these	these	DET
can-1682	118	38	structures	structure	NOUN
can-1682	118	39	can	can	AUX
can-1682	118	40	have	have	VERB
can-1682	118	41	a	a	DET
can-1682	118	42	larger	large	ADJ
can-1682	118	43	or	or	CCONJ
can-1682	118	44	smaller	small	ADJ
can-1682	118	45	surface	surface	NOUN
can-1682	118	46	area	area	NOUN
can-1682	118	47	.	.	PUNCT
can-1682	119	1	due	due	ADP
can-1682	119	2	to	to	ADP
can-1682	119	3	this	this	DET
can-1682	119	4	property	property	NOUN
can-1682	119	5	,	,	PUNCT
can-1682	119	6	it	it	PRON
can-1682	119	7	is	be	AUX
can-1682	119	8	also	also	ADV
can-1682	119	9	believed	believe	VERB
can-1682	119	10	that	that	SCONJ
can-1682	119	11	they	they	PRON
can-1682	119	12	can	can	AUX
can-1682	119	13	be	be	AUX
can-1682	119	14	used	use	VERB
can-1682	119	15	as	as	ADP
can-1682	119	16	adsorbents[53	adsorbents[53	NOUN
can-1682	119	17	]	]	X
can-1682	119	18	,	,	PUNCT
can-1682	119	19	or	or	CCONJ
can-1682	119	20	additives	additive	NOUN
can-1682	119	21	for	for	ADP
can-1682	119	22	different	different	ADJ
can-1682	119	23	nanocomposites[54	nanocomposites[54	NOUN
can-1682	119	24	]	]	PUNCT
can-1682	119	25	with	with	ADP
can-1682	119	26	a	a	DET
can-1682	119	27	wide	wide	ADJ
can-1682	119	28	range	range	NOUN
can-1682	119	29	of	of	ADP
can-1682	119	30	applications	application	NOUN
can-1682	119	31	.	.	PUNCT
can-1682	120	1	as	as	SCONJ
can-1682	120	2	the	the	DET
can-1682	120	3	nanostructure	nanostructure	NOUN
can-1682	120	4	is	be	AUX
can-1682	120	5	carbon	carbon	NOUN
can-1682	120	6	in	in	ADP
can-1682	120	7	nature	nature	NOUN
can-1682	120	8	,	,	PUNCT
can-1682	120	9	it	it	PRON
can-1682	120	10	is	be	AUX
can-1682	120	11	likely	likely	ADJ
can-1682	120	12	to	to	PART
can-1682	120	13	avoid	avoid	VERB
can-1682	120	14	damage	damage	NOUN
can-1682	120	15	to	to	ADP
can-1682	120	16	the	the	DET
can-1682	120	17	environment	environment	NOUN
can-1682	120	18	and	and	CCONJ
can-1682	120	19	the	the	DET
can-1682	120	20	human	human	ADJ
can-1682	120	21	body	body	NOUN
can-1682	120	22	;	;	PUNCT
can-1682	120	23	moreover	moreover	ADV
can-1682	120	24	,	,	PUNCT
can-1682	120	25	due	due	ADP
can-1682	120	26	to	to	ADP
can-1682	120	27	its	its	PRON
can-1682	120	28	low	low	ADJ
can-1682	120	29	toxicity	toxicity	NOUN
can-1682	120	30	,	,	PUNCT
can-1682	120	31	it	it	PRON
can-1682	120	32	is	be	AUX
can-1682	120	33	considered	consider	VERB
can-1682	120	34	for	for	ADP
can-1682	120	35	use	use	NOUN
can-1682	120	36	in	in	ADP
can-1682	120	37	the	the	DET
can-1682	120	38	biomedical	biomedical	ADJ
can-1682	120	39	area[55,56	area[55,56	NOUN
can-1682	120	40	]	]	PUNCT
can-1682	120	41	.	.	PUNCT
can-1682	121	1	3.6	3.6	NUM
can-1682	121	2	nanolistones	nanolistone	NOUN
can-1682	121	3	another	another	DET
can-1682	121	4	carbon	carbon	NOUN
can-1682	121	5	nanostructure	nanostructure	NOUN
can-1682	121	6	that	that	PRON
can-1682	121	7	has	have	AUX
can-1682	121	8	been	be	AUX
can-1682	121	9	produced	produce	VERB
can-1682	121	10	by	by	ADP
can-1682	121	11	cvd	cvd	PROPN
can-1682	121	12	is	be	AUX
can-1682	121	13	the	the	DET
can-1682	121	14	graphitic	graphitic	ADJ
can-1682	121	15	nanoliston	nanoliston	NOUN
can-1682	121	16	.	.	PUNCT
can-1682	122	1	nanolistons	nanoliston	NOUN
can-1682	122	2	are	be	AUX
can-1682	122	3	one	one	NUM
can-1682	122	4	-	-	PUNCT
can-1682	122	5	dimensional	dimensional	ADJ
can-1682	122	6	structures	structure	NOUN
can-1682	122	7	with	with	ADP
can-1682	122	8	lengths	length	NOUN
can-1682	122	9	in	in	ADP
can-1682	122	10	the	the	DET
can-1682	122	11	millimeter	millimeter	NOUN
can-1682	122	12	range	range	NOUN
can-1682	122	13	,	,	PUNCT
can-1682	122	14	widths	width	NOUN
can-1682	122	15	of	of	ADP
can-1682	122	16	100200	100200	NUM
can-1682	122	17	nm	nm	NOUN
can-1682	122	18	and	and	CCONJ
can-1682	122	19	thicknesses	thickness	NOUN
can-1682	122	20	of	of	ADP
can-1682	122	21	~20	~20	PUNCT
can-1682	122	22	nm[5	nm[5	NOUN
can-1682	122	23	]	]	PUNCT
can-1682	122	24	.	.	PUNCT
can-1682	123	1	the	the	DET
can-1682	123	2	synthesis	synthesis	NOUN
can-1682	123	3	is	be	AUX
can-1682	123	4	carried	carry	VERB
can-1682	123	5	out	out	ADP
can-1682	123	6	in	in	ADP
can-1682	123	7	an	an	DET
can-1682	123	8	aacvd	aacvd	NOUN
can-1682	123	9	system	system	NOUN
can-1682	123	10	,	,	PUNCT
can-1682	123	11	pyrolyzing	pyrolyze	VERB
can-1682	123	12	at	at	ADP
can-1682	123	13	950	950	NUM
can-1682	123	14	℃	℃	PROPN
can-1682	123	15	a	a	DET
can-1682	123	16	precursor	precursor	NOUN
can-1682	123	17	solution	solution	NOUN
can-1682	123	18	containing	contain	VERB
can-1682	123	19	ethanol	ethanol	NOUN
can-1682	123	20	(	(	PUNCT
can-1682	123	21	ch3ch2	ch3ch2	NOUN
can-1682	123	22	oh	oh	INTJ
can-1682	123	23	)	)	PUNCT
can-1682	123	24	,	,	PUNCT
can-1682	123	25	ferrocene	ferrocene	NOUN
can-1682	123	26	(	(	PUNCT
can-1682	123	27	fecp2	fecp2	NOUN
can-1682	123	28	)	)	PUNCT
can-1682	123	29	and	and	CCONJ
can-1682	123	30	a	a	DET
can-1682	123	31	small	small	ADJ
can-1682	123	32	concentration	concentration	NOUN
can-1682	123	33	of	of	ADP
can-1682	123	34	thiophene	thiophene	NOUN
can-1682	123	35	(	(	PUNCT
can-1682	123	36	c4h4s	c4h4s	NUM
can-1682	123	37	)	)	PUNCT
can-1682	123	38	.	.	PUNCT
can-1682	124	1	these	these	DET
can-1682	124	2	nanolayers	nanolayer	NOUN
can-1682	124	3	are	be	AUX
can-1682	124	4	made	make	VERB
can-1682	124	5	up	up	ADP
can-1682	124	6	of	of	ADP
can-1682	124	7	graphene	graphene	NOUN
can-1682	124	8	layers	layer	NOUN
can-1682	124	9	stacked	stack	VERB
can-1682	124	10	along	along	ADP
can-1682	124	11	the	the	DET
can-1682	124	12	ribbon	ribbon	NOUN
can-1682	124	13	axis	axis	NOUN
can-1682	124	14	.	.	PUNCT
can-1682	125	1	the	the	DET
can-1682	125	2	structure	structure	NOUN
can-1682	125	3	has	have	AUX
can-1682	125	4	been	be	AUX
can-1682	125	5	confirmed	confirm	VERB
can-1682	125	6	by	by	ADP
can-1682	125	7	x	x	NOUN
can-1682	125	8	-	-	NOUN
can-1682	125	9	ray	ray	NOUN
can-1682	125	10	diffraction	diffraction	NOUN
can-1682	125	11	and	and	CCONJ
can-1682	125	12	tem	tem	PROPN
can-1682	125	13	.	.	PUNCT
can-1682	126	1	the	the	DET
can-1682	126	2	morphology	morphology	NOUN
can-1682	126	3	of	of	ADP
can-1682	126	4	the	the	DET
can-1682	126	5	nanolayers	nanolayer	NOUN
can-1682	126	6	guarantees	guarantee	VERB
can-1682	126	7	a	a	DET
can-1682	126	8	large	large	ADJ
can-1682	126	9	surface	surface	NOUN
can-1682	126	10	area	area	NOUN
can-1682	126	11	and	and	CCONJ
can-1682	126	12	the	the	DET
can-1682	126	13	edges	edge	NOUN
can-1682	126	14	of	of	ADP
can-1682	126	15	the	the	DET
can-1682	126	16	graphene	graphene	NOUN
can-1682	126	17	sheets	sheet	NOUN
can-1682	126	18	represent	represent	VERB
can-1682	126	19	potential	potential	ADJ
can-1682	126	20	sites	site	NOUN
can-1682	126	21	for	for	ADP
can-1682	126	22	binding	bind	VERB
can-1682	126	23	molecules	molecule	NOUN
can-1682	126	24	that	that	PRON
can-1682	126	25	will	will	AUX
can-1682	126	26	allow	allow	VERB
can-1682	126	27	them	they	PRON
can-1682	126	28	to	to	PART
can-1682	126	29	have	have	VERB
can-1682	126	30	varied	varied	ADJ
can-1682	126	31	applications	application	NOUN
can-1682	126	32	.	.	PUNCT
can-1682	127	1	it	it	PRON
can-1682	127	2	has	have	AUX
can-1682	127	3	been	be	AUX
can-1682	127	4	studied	study	VERB
can-1682	127	5	that	that	SCONJ
can-1682	127	6	when	when	SCONJ
can-1682	127	7	subjected	subject	VERB
can-1682	127	8	to	to	ADP
can-1682	127	9	high	high	ADJ
can-1682	127	10	temperatures	temperature	NOUN
can-1682	127	11	,	,	PUNCT
can-1682	127	12	the	the	DET
can-1682	127	13	contiguous	contiguous	ADJ
can-1682	127	14	layers	layer	NOUN
can-1682	127	15	of	of	ADP
can-1682	127	16	graphene	graphene	NOUN
can-1682	127	17	in	in	ADP
can-1682	127	18	the	the	DET
can-1682	127	19	nanolayers	nanolayer	NOUN
can-1682	127	20	tend	tend	VERB
can-1682	127	21	to	to	PART
can-1682	127	22	join	join	VERB
can-1682	127	23	together	together	ADV
can-1682	127	24	,	,	PUNCT
can-1682	127	25	forming	form	VERB
can-1682	127	26	bonds	bond	NOUN
can-1682	127	27	,	,	PUNCT
can-1682	127	28	to	to	PART
can-1682	127	29	reduce	reduce	VERB
can-1682	127	30	the	the	DET
can-1682	127	31	action	action	NOUN
can-1682	127	32	of	of	ADP
can-1682	127	33	the	the	DET
can-1682	127	34	highly	highly	ADV
can-1682	127	35	reactive	reactive	ADJ
can-1682	127	36	edges[5	edges[5	PROPN
can-1682	127	37	]	]	PUNCT
can-1682	127	38	.	.	PUNCT
can-1682	128	1	3.7	3.7	NUM
can-1682	128	2	other	other	ADJ
can-1682	128	3	nanostructures	nanostructure	NOUN
can-1682	128	4	on	on	ADP
can-1682	128	5	the	the	DET
can-1682	128	6	other	other	ADJ
can-1682	128	7	hand	hand	NOUN
can-1682	128	8	,	,	PUNCT
can-1682	128	9	the	the	DET
can-1682	128	10	cvd	cvd	PROPN
can-1682	128	11	technique	technique	NOUN
can-1682	128	12	is	be	AUX
can-1682	128	13	not	not	PART
can-1682	128	14	limited	limit	VERB
can-1682	128	15	to	to	ADP
can-1682	128	16	the	the	DET
can-1682	128	17	individual	individual	ADJ
can-1682	128	18	synthesis	synthesis	NOUN
can-1682	128	19	of	of	ADP
can-1682	128	20	nanomaterials	nanomaterial	NOUN
can-1682	128	21	,	,	PUNCT
can-1682	128	22	but	but	CCONJ
can-1682	128	23	can	can	AUX
can-1682	128	24	also	also	ADV
can-1682	128	25	be	be	AUX
can-1682	128	26	used	use	VERB
can-1682	128	27	as	as	ADP
can-1682	128	28	a	a	DET
can-1682	128	29	means	means	NOUN
can-1682	128	30	to	to	PART
can-1682	128	31	obtain	obtain	VERB
can-1682	128	32	complex	complex	ADJ
can-1682	128	33	structures	structure	NOUN
can-1682	128	34	.	.	PUNCT
can-1682	129	1	using	use	VERB
can-1682	129	2	a	a	DET
can-1682	129	3	two	two	NUM
can-1682	129	4	-	-	PUNCT
can-1682	129	5	step	step	NOUN
can-1682	129	6	procedure	procedure	NOUN
can-1682	129	7	,	,	PUNCT
can-1682	129	8	a	a	DET
can-1682	129	9	hybrid	hybrid	ADJ
can-1682	129	10	carbon	carbon	NOUN
can-1682	129	11	nanostructure	nanostructure	NOUN
can-1682	129	12	consisting	consist	VERB
can-1682	129	13	of	of	ADP
can-1682	129	14	double	double	ADJ
can-1682	129	15	-	-	PUNCT
can-1682	129	16	walled	wall	VERB
can-1682	129	17	carbon	carbon	NOUN
can-1682	129	18	nanotubes	nanotube	NOUN
can-1682	129	19	(	(	PUNCT
can-1682	129	20	dwcnts	dwcnt	NOUN
can-1682	129	21	)	)	PUNCT
can-1682	129	22	with	with	ADP
can-1682	129	23	graphene	graphene	NOUN
can-1682	129	24	nanosheets	nanosheet	NOUN
can-1682	129	25	has	have	AUX
can-1682	129	26	been	be	AUX
can-1682	129	27	synthesized	synthesize	VERB
can-1682	129	28	by	by	ADP
can-1682	129	29	this	this	DET
can-1682	129	30	technique	technique	NOUN
can-1682	129	31	.	.	PUNCT
can-1682	130	1	the	the	DET
can-1682	130	2	first	first	ADJ
can-1682	130	3	step	step	NOUN
can-1682	130	4	consists	consist	VERB
can-1682	130	5	of	of	ADP
can-1682	130	6	the	the	DET
can-1682	130	7	synthesis	synthesis	NOUN
can-1682	130	8	of	of	ADP
can-1682	130	9	the	the	DET
can-1682	130	10	dwcnts	dwcnt	NOUN
can-1682	130	11	by	by	ADP
can-1682	130	12	cvd	cvd	PROPN
can-1682	130	13	with	with	ADP
can-1682	130	14	a	a	DET
can-1682	130	15	floating	float	VERB
can-1682	130	16	catalyst	catalyst	NOUN
can-1682	130	17	.	.	PUNCT
can-1682	131	1	the	the	DET
can-1682	131	2	process	process	NOUN
can-1682	131	3	starts	start	VERB
can-1682	131	4	with	with	ADP
can-1682	131	5	the	the	DET
can-1682	131	6	flow	flow	NOUN
can-1682	131	7	of	of	ADP
can-1682	131	8	argon	argon	NOUN
can-1682	131	9	into	into	ADP
can-1682	131	10	the	the	DET
can-1682	131	11	system	system	NOUN
can-1682	131	12	(	(	PUNCT
can-1682	131	13	500	500	NUM
can-1682	131	14	sccm	sccm	NOUN
can-1682	131	15	)	)	PUNCT
can-1682	131	16	until	until	ADP
can-1682	131	17	reaching	reach	VERB
can-1682	131	18	1,300	1,300	NUM
can-1682	131	19	℃	℃	PROPN
can-1682	131	20	,	,	PUNCT
can-1682	131	21	at	at	ADP
can-1682	131	22	which	which	DET
can-1682	131	23	time	time	NOUN
can-1682	131	24	the	the	DET
can-1682	131	25	flow	flow	NOUN
can-1682	131	26	of	of	ADP
can-1682	131	27	h2	h2	NOUN
can-1682	131	28	as	as	ADP
can-1682	131	29	carrier	carrier	NOUN
can-1682	131	30	gas	gas	NOUN
can-1682	131	31	(	(	PUNCT
can-1682	131	32	1,000	1,000	NUM
can-1682	131	33	sccm	sccm	NOUN
can-1682	131	34	)	)	PUNCT
can-1682	131	35	is	be	AUX
can-1682	131	36	started	start	VERB
can-1682	131	37	and	and	CCONJ
can-1682	131	38	a	a	DET
can-1682	131	39	solution	solution	NOUN
can-1682	131	40	of	of	ADP
can-1682	131	41	ferrocene	ferrocene	NOUN
can-1682	131	42	and	and	CCONJ
can-1682	131	43	thiophene	thiophene	NOUN
can-1682	131	44	dissolved	dissolve	VERB
can-1682	131	45	in	in	ADP
can-1682	131	46	ethanol	ethanol	NOUN
can-1682	131	47	(	(	PUNCT
can-1682	131	48	0.04	0.04	NUM
can-1682	131	49	ml	ml	NOUN
can-1682	131	50	/	/	SYM
can-1682	131	51	min	min	NOUN
can-1682	131	52	for	for	ADP
can-1682	131	53	20	20	NUM
can-1682	131	54	min	min	NOUN
can-1682	131	55	)	)	PUNCT
can-1682	131	56	is	be	AUX
can-1682	131	57	pumped	pump	VERB
can-1682	131	58	at	at	ADP
can-1682	131	59	ambient	ambient	ADJ
can-1682	131	60	pressure	pressure	NOUN
can-1682	131	61	.	.	PUNCT
can-1682	132	1	after	after	ADP
can-1682	132	2	being	be	AUX
can-1682	132	3	purified	purify	VERB
can-1682	132	4	,	,	PUNCT
can-1682	132	5	the	the	DET
can-1682	132	6	obtained	obtain	VERB
can-1682	132	7	dwcnts	dwcnt	NOUN
can-1682	132	8	are	be	AUX
can-1682	132	9	introduced	introduce	VERB
can-1682	132	10	into	into	ADP
can-1682	132	11	the	the	DET
can-1682	132	12	reaction	reaction	NOUN
can-1682	132	13	zone	zone	NOUN
can-1682	132	14	to	to	PART
can-1682	132	15	produce	produce	VERB
can-1682	132	16	the	the	DET
can-1682	132	17	graphene	graphene	NOUN
can-1682	132	18	nanosheets	nanosheet	NOUN
can-1682	132	19	by	by	ADP
can-1682	132	20	cvd	cvd	PROPN
can-1682	132	21	.	.	PUNCT
can-1682	133	1	a	a	DET
can-1682	133	2	flow	flow	NOUN
can-1682	133	3	of	of	ADP
can-1682	133	4	argon	argon	NOUN
can-1682	133	5	(	(	PUNCT
can-1682	133	6	500	500	NUM
can-1682	133	7	sccm	sccm	NOUN
can-1682	133	8	)	)	PUNCT
can-1682	133	9	is	be	AUX
can-1682	133	10	initiated	initiate	VERB
can-1682	133	11	until	until	ADP
can-1682	133	12	reaching	reach	VERB
can-1682	133	13	1,300	1,300	NUM
can-1682	133	14	℃	℃	PROPN
can-1682	133	15	and	and	CCONJ
can-1682	133	16	effecting	effect	VERB
can-1682	133	17	the	the	DET
can-1682	133	18	injection	injection	NOUN
can-1682	133	19	of	of	ADP
can-1682	133	20	ethanol	ethanol	NOUN
can-1682	133	21	(	(	PUNCT
can-1682	133	22	0.04	0.04	NUM
can-1682	133	23	ml	ml	NOUN
can-1682	133	24	/	/	SYM
can-1682	133	25	min	min	NOUN
can-1682	133	26	)	)	PUNCT
can-1682	133	27	as	as	ADP
can-1682	133	28	carbon	carbon	NOUN
can-1682	133	29	source	source	NOUN
can-1682	133	30	,	,	PUNCT
can-1682	133	31	employing	employ	VERB
can-1682	133	32	h2	h2	NOUN
can-1682	133	33	as	as	ADP
can-1682	133	34	carrier	carrier	NOUN
can-1682	133	35	gas	gas	NOUN
can-1682	133	36	(	(	PUNCT
can-1682	133	37	1,000	1,000	NUM
can-1682	133	38	sccm	sccm	NOUN
can-1682	133	39	)	)	PUNCT
can-1682	133	40	.	.	PUNCT
can-1682	134	1	the	the	DET
can-1682	134	2	result	result	NOUN
can-1682	134	3	of	of	ADP
can-1682	134	4	the	the	DET
can-1682	134	5	process	process	NOUN
can-1682	134	6	is	be	AUX
can-1682	134	7	the	the	DET
can-1682	134	8	growth	growth	NOUN
can-1682	134	9	of	of	ADP
can-1682	134	10	structures	structure	NOUN
can-1682	134	11	with	with	ADP
can-1682	134	12	sharp	sharp	ADJ
can-1682	134	13	edges	edge	NOUN
can-1682	134	14	,	,	PUNCT
can-1682	134	15	resembling	resemble	VERB
can-1682	134	16	petals	petal	NOUN
can-1682	134	17	,	,	PUNCT
can-1682	134	18	along	along	ADP
can-1682	134	19	the	the	DET
can-1682	134	20	walls	wall	NOUN
can-1682	134	21	of	of	ADP
can-1682	134	22	dwcnts	dwcnt	NOUN
can-1682	134	23	but	but	CCONJ
can-1682	134	24	maintaining	maintain	VERB
can-1682	134	25	the	the	DET
can-1682	134	26	one	one	NUM
can-1682	134	27	-	-	PUNCT
can-1682	134	28	dimensional	dimensional	ADJ
can-1682	134	29	nanotube	nanotube	ADJ
can-1682	134	30	structure[58	structure[58	NOUN
can-1682	134	31	]	]	PUNCT
can-1682	134	32	.	.	PUNCT
can-1682	135	1	another	another	DET
can-1682	135	2	type	type	NOUN
can-1682	135	3	of	of	ADP
can-1682	135	4	nanostructures	nanostructure	NOUN
can-1682	135	5	that	that	PRON
can-1682	135	6	are	be	AUX
can-1682	135	7	synthesized	synthesize	VERB
can-1682	135	8	by	by	ADP
can-1682	135	9	the	the	DET
can-1682	135	10	chemical	chemical	NOUN
can-1682	135	11	deposition	deposition	NOUN
can-1682	135	12	method	method	NOUN
can-1682	135	13	are	be	AUX
can-1682	135	14	nanowalls	nanowall	NOUN
can-1682	135	15	(	(	PUNCT
can-1682	135	16	nw	nw	NOUN
can-1682	135	17	’s	’s	NOUN
can-1682	135	18	)	)	PUNCT
can-1682	135	19	,	,	PUNCT
can-1682	135	20	where	where	SCONJ
can-1682	135	21	the	the	DET
can-1682	135	22	plasma	plasma	NOUN
can-1682	135	23	-	-	PUNCT
can-1682	135	24	assisted	assist	VERB
can-1682	135	25	method	method	NOUN
can-1682	135	26	(	(	PUNCT
can-1682	135	27	pecvd	pecvd	NOUN
can-1682	135	28	)	)	PUNCT
can-1682	135	29	is	be	AUX
can-1682	135	30	used	use	VERB
can-1682	135	31	.	.	PUNCT
can-1682	136	1	these	these	PRON
can-1682	136	2	are	be	AUX
can-1682	136	3	anchored	anchor	VERB
can-1682	136	4	to	to	ADP
can-1682	136	5	the	the	DET
can-1682	136	6	surface	surface	NOUN
can-1682	136	7	of	of	ADP
can-1682	136	8	a	a	DET
can-1682	136	9	substrate	substrate	NOUN
can-1682	136	10	as	as	ADP
can-1682	136	11	elemental	elemental	ADJ
can-1682	136	12	silicon	silicon	NOUN
can-1682	136	13	wafers	wafer	NOUN
can-1682	136	14	,	,	PUNCT
can-1682	136	15	without	without	ADP
can-1682	136	16	the	the	DET
can-1682	136	17	need	need	NOUN
can-1682	136	18	for	for	ADP
can-1682	136	19	metal	metal	NOUN
can-1682	136	20	catalysts	catalyst	NOUN
can-1682	136	21	,	,	PUNCT
can-1682	136	22	the	the	DET
can-1682	136	23	structures	structure	NOUN
can-1682	136	24	86	86	NUM
can-1682	136	25	are	be	AUX
can-1682	136	26	grown	grow	VERB
can-1682	136	27	by	by	ADP
can-1682	136	28	using	use	VERB
can-1682	136	29	a	a	DET
can-1682	136	30	copper	copper	NOUN
can-1682	136	31	or	or	CCONJ
can-1682	136	32	tantalum	tantalum	NOUN
can-1682	136	33	cube	cube	NOUN
can-1682	136	34	located	locate	VERB
can-1682	136	35	in	in	ADP
can-1682	136	36	the	the	DET
can-1682	136	37	center	center	NOUN
can-1682	136	38	of	of	ADP
can-1682	136	39	the	the	DET
can-1682	136	40	substrate	substrate	NOUN
can-1682	136	41	holder	holder	NOUN
can-1682	136	42	and	and	CCONJ
can-1682	136	43	a	a	DET
can-1682	136	44	power	power	NOUN
can-1682	136	45	of	of	ADP
can-1682	136	46	500	500	NUM
can-1682	136	47	w	w	NOUN
can-1682	136	48	is	be	AUX
can-1682	136	49	applied	apply	VERB
can-1682	136	50	to	to	ADP
can-1682	136	51	the	the	DET
can-1682	136	52	system	system	NOUN
can-1682	136	53	,	,	PUNCT
can-1682	136	54	two	two	NUM
can-1682	136	55	plasma	plasma	NOUN
can-1682	136	56	treatments	treatment	NOUN
can-1682	136	57	are	be	AUX
can-1682	136	58	made	make	VERB
can-1682	136	59	:	:	PUNCT
can-1682	136	60	one	one	NUM
can-1682	136	61	of	of	ADP
can-1682	136	62	hydrogen	hydrogen	NOUN
can-1682	136	63	and	and	CCONJ
can-1682	136	64	the	the	DET
can-1682	136	65	other	other	ADJ
can-1682	136	66	of	of	ADP
can-1682	136	67	a	a	DET
can-1682	136	68	combination	combination	NOUN
can-1682	136	69	of	of	ADP
can-1682	136	70	ammonia	ammonia	NOUN
can-1682	136	71	-	-	PUNCT
can-1682	136	72	acetylene	acetylene	NOUN
can-1682	136	73	.	.	PUNCT
can-1682	137	1	the	the	DET
can-1682	137	2	degree	degree	NOUN
can-1682	137	3	of	of	ADP
can-1682	137	4	graphitization	graphitization	NOUN
can-1682	137	5	and	and	CCONJ
can-1682	137	6	growth	growth	NOUN
can-1682	137	7	rate	rate	NOUN
can-1682	137	8	depend	depend	VERB
can-1682	137	9	mainly	mainly	ADV
can-1682	137	10	on	on	ADP
can-1682	137	11	the	the	DET
can-1682	137	12	amount	amount	NOUN
can-1682	137	13	of	of	ADP
can-1682	137	14	ammonia	ammonia	NOUN
can-1682	137	15	used	use	VERB
can-1682	137	16	and	and	CCONJ
can-1682	137	17	the	the	DET
can-1682	137	18	wall	wall	NOUN
can-1682	137	19	thickness	thickness	NOUN
can-1682	137	20	depends	depend	VERB
can-1682	137	21	on	on	ADP
can-1682	137	22	the	the	DET
can-1682	137	23	anchorage	anchorage	NOUN
can-1682	137	24	to	to	ADP
can-1682	137	25	the	the	DET
can-1682	137	26	substrate[59	substrate[59	PROPN
can-1682	137	27	]	]	X
can-1682	137	28	.	.	PUNCT
can-1682	138	1	the	the	DET
can-1682	138	2	utility	utility	NOUN
can-1682	138	3	of	of	ADP
can-1682	138	4	this	this	DET
can-1682	138	5	nanostructure	nanostructure	NOUN
can-1682	138	6	would	would	AUX
can-1682	138	7	be	be	AUX
can-1682	138	8	in	in	ADP
can-1682	138	9	electrochemical	electrochemical	ADJ
can-1682	138	10	applications	application	NOUN
can-1682	138	11	such	such	ADJ
can-1682	138	12	as	as	ADP
can-1682	138	13	batteries	battery	NOUN
can-1682	138	14	and	and	CCONJ
can-1682	138	15	fuel	fuel	NOUN
can-1682	138	16	cells	cell	NOUN
can-1682	138	17	,	,	PUNCT
can-1682	138	18	research	research	NOUN
can-1682	138	19	has	have	AUX
can-1682	138	20	also	also	ADV
can-1682	138	21	been	be	AUX
can-1682	138	22	conducted	conduct	VERB
can-1682	138	23	for	for	ADP
can-1682	138	24	its	its	PRON
can-1682	138	25	use	use	NOUN
can-1682	138	26	as	as	ADP
can-1682	138	27	a	a	DET
can-1682	138	28	backlighting	backlighte	VERB
can-1682	138	29	material	material	NOUN
can-1682	138	30	for	for	ADP
can-1682	138	31	liquid	liquid	ADJ
can-1682	138	32	crystal	crystal	NOUN
can-1682	138	33	displays[60	displays[60	NOUN
can-1682	138	34	]	]	PUNCT
can-1682	138	35	.	.	PUNCT
can-1682	139	1	finally	finally	ADV
can-1682	139	2	,	,	PUNCT
can-1682	139	3	another	another	DET
can-1682	139	4	nanostructure	nanostructure	NOUN
can-1682	139	5	obtained	obtain	VERB
can-1682	139	6	by	by	ADP
can-1682	139	7	cvd	cvd	PROPN
can-1682	139	8	is	be	AUX
can-1682	139	9	graphene	graphene	ADJ
can-1682	139	10	quantum	quantum	NOUN
can-1682	139	11	dots	dot	NOUN
can-1682	139	12	(	(	PUNCT
can-1682	139	13	graphene	graphene	VERB
can-1682	139	14	quantum	quantum	ADJ
can-1682	139	15	dots	dot	NOUN
can-1682	139	16	,	,	PUNCT
can-1682	139	17	gqd	gqd	NOUN
can-1682	139	18	’s	’s	PART
can-1682	139	19	)	)	PUNCT
can-1682	139	20	.	.	PUNCT
can-1682	140	1	these	these	DET
can-1682	140	2	structures	structure	NOUN
can-1682	140	3	are	be	AUX
can-1682	140	4	obtained	obtain	VERB
can-1682	140	5	when	when	SCONJ
can-1682	140	6	the	the	DET
can-1682	140	7	growth	growth	NOUN
can-1682	140	8	rate	rate	NOUN
can-1682	140	9	of	of	ADP
can-1682	140	10	graphene	graphene	NOUN
can-1682	140	11	in	in	ADP
can-1682	140	12	the	the	DET
can-1682	140	13	initial	initial	ADJ
can-1682	140	14	stage	stage	NOUN
can-1682	140	15	is	be	AUX
can-1682	140	16	suppressed	suppress	VERB
can-1682	140	17	well	well	ADV
can-1682	140	18	below	below	ADP
can-1682	140	19	the	the	DET
can-1682	140	20	nucleation	nucleation	NOUN
can-1682	140	21	rate[61	rate[61	NOUN
can-1682	140	22	]	]	PUNCT
can-1682	140	23	.	.	PUNCT
can-1682	141	1	these	these	DET
can-1682	141	2	conditions	condition	NOUN
can-1682	141	3	are	be	AUX
can-1682	141	4	obtained	obtain	VERB
can-1682	141	5	with	with	ADP
can-1682	141	6	a	a	DET
can-1682	141	7	low	low	ADJ
can-1682	141	8	precursor	precursor	NOUN
can-1682	141	9	flow	flow	NOUN
can-1682	141	10	rate	rate	NOUN
can-1682	141	11	(	(	PUNCT
can-1682	141	12	2	2	NUM
can-1682	141	13	ml	ml	NOUN
can-1682	141	14	/	/	SYM
can-1682	141	15	min	min	NOUN
can-1682	141	16	)	)	PUNCT
can-1682	141	17	and	and	CCONJ
can-1682	141	18	at	at	ADP
can-1682	141	19	a	a	DET
can-1682	141	20	relatively	relatively	ADV
can-1682	141	21	low	low	ADJ
can-1682	141	22	temperature	temperature	NOUN
can-1682	141	23	(	(	PUNCT
can-1682	141	24	1,000	1,000	NUM
can-1682	141	25	℃	℃	PROPN
can-1682	141	26	)	)	PUNCT
can-1682	141	27	,	,	PUNCT
can-1682	141	28	the	the	DET
can-1682	141	29	product	product	NOUN
can-1682	141	30	is	be	AUX
can-1682	141	31	deposited	deposit	VERB
can-1682	141	32	on	on	ADP
can-1682	141	33	copper	copper	NOUN
can-1682	141	34	substrates[61	substrates[61	PROPN
can-1682	141	35	]	]	PUNCT
can-1682	141	36	.	.	PUNCT
can-1682	142	1	these	these	DET
can-1682	142	2	structures	structure	NOUN
can-1682	142	3	possess	possess	VERB
can-1682	142	4	a	a	DET
can-1682	142	5	large	large	ADJ
can-1682	142	6	number	number	NOUN
can-1682	142	7	of	of	ADP
can-1682	142	8	vents	vent	NOUN
can-1682	142	9	such	such	ADJ
can-1682	142	10	as	as	ADP
can-1682	142	11	biocompatability	biocompatability	NOUN
can-1682	142	12	,	,	PUNCT
can-1682	142	13	low	low	ADJ
can-1682	142	14	toxicity	toxicity	NOUN
can-1682	142	15	,	,	PUNCT
can-1682	142	16	good	good	ADJ
can-1682	142	17	solubility	solubility	NOUN
can-1682	142	18	and	and	CCONJ
can-1682	142	19	large	large	ADJ
can-1682	142	20	surface	surface	NOUN
can-1682	142	21	area[62	area[62	NOUN
can-1682	142	22	]	]	PUNCT
can-1682	142	23	,	,	PUNCT
can-1682	142	24	so	so	SCONJ
can-1682	142	25	they	they	PRON
can-1682	142	26	can	can	AUX
can-1682	142	27	have	have	VERB
can-1682	142	28	a	a	DET
can-1682	142	29	wide	wide	ADJ
can-1682	142	30	range	range	NOUN
can-1682	142	31	of	of	ADP
can-1682	142	32	applications	application	NOUN
can-1682	142	33	.	.	PUNCT
can-1682	143	1	4	4	X
can-1682	143	2	.	.	X
can-1682	143	3	conclusions	conclusion	NOUN
can-1682	143	4	the	the	DET
can-1682	143	5	chemical	chemical	ADJ
can-1682	143	6	vapor	vapor	NOUN
can-1682	143	7	deposition	deposition	NOUN
can-1682	143	8	technique	technique	NOUN
can-1682	143	9	is	be	AUX
can-1682	143	10	a	a	DET
can-1682	143	11	widely	widely	ADV
can-1682	143	12	used	use	VERB
can-1682	143	13	bottom	bottom	ADJ
can-1682	143	14	-	-	PUNCT
can-1682	143	15	up	up	ADP
can-1682	143	16	nanofabrication	nanofabrication	NOUN
can-1682	143	17	method	method	NOUN
can-1682	143	18	for	for	ADP
can-1682	143	19	the	the	DET
can-1682	143	20	synthesis	synthesis	NOUN
can-1682	143	21	of	of	ADP
can-1682	143	22	nanomaterials	nanomaterial	NOUN
can-1682	143	23	.	.	PUNCT
can-1682	144	1	its	its	PRON
can-1682	144	2	versatility	versatility	NOUN
can-1682	144	3	and	and	CCONJ
can-1682	144	4	easy	easy	ADJ
can-1682	144	5	implementation	implementation	NOUN
can-1682	144	6	make	make	VERB
can-1682	144	7	it	it	PRON
can-1682	144	8	a	a	DET
can-1682	144	9	highly	highly	ADV
can-1682	144	10	popular	popular	ADJ
can-1682	144	11	technique	technique	NOUN
can-1682	144	12	for	for	ADP
can-1682	144	13	the	the	DET
can-1682	144	14	production	production	NOUN
can-1682	144	15	of	of	ADP
can-1682	144	16	carbon	carbon	NOUN
can-1682	144	17	nanostructures	nanostructure	NOUN
can-1682	144	18	.	.	PUNCT
can-1682	145	1	the	the	DET
can-1682	145	2	adjustment	adjustment	NOUN
can-1682	145	3	of	of	ADP
can-1682	145	4	parameters	parameter	NOUN
can-1682	145	5	such	such	ADJ
can-1682	145	6	as	as	ADP
can-1682	145	7	temperature	temperature	NOUN
can-1682	145	8	,	,	PUNCT
can-1682	145	9	flow	flow	NOUN
can-1682	145	10	,	,	PUNCT
can-1682	145	11	nature	nature	NOUN
can-1682	145	12	of	of	ADP
can-1682	145	13	precursors	precursor	NOUN
can-1682	145	14	,	,	PUNCT
can-1682	145	15	pressure	pressure	NOUN
can-1682	145	16	and	and	CCONJ
can-1682	145	17	synthesis	synthesis	NOUN
can-1682	145	18	time	time	NOUN
can-1682	145	19	allows	allow	VERB
can-1682	145	20	the	the	DET
can-1682	145	21	synthesis	synthesis	NOUN
can-1682	145	22	of	of	ADP
can-1682	145	23	zero	zero	NUM
can-1682	145	24	-	-	PUNCT
can-1682	145	25	dimensional	dimensional	ADJ
can-1682	145	26	nanostructures	nanostructure	NOUN
can-1682	145	27	(	(	PUNCT
can-1682	145	28	fullerenes	fullerene	NOUN
can-1682	145	29	,	,	PUNCT
can-1682	145	30	nano	nano	NOUN
can-1682	145	31	-	-	PUNCT
can-1682	145	32	onions	onion	NOUN
can-1682	145	33	,	,	PUNCT
can-1682	145	34	nanospheres	nanosphere	NOUN
can-1682	145	35	)	)	PUNCT
can-1682	145	36	,	,	PUNCT
can-1682	145	37	one	one	NUM
can-1682	145	38	-	-	PUNCT
can-1682	145	39	dimensional	dimensional	ADJ
can-1682	145	40	(	(	PUNCT
can-1682	145	41	nanotubes	nanotube	NOUN
can-1682	145	42	,	,	PUNCT
can-1682	145	43	nanoribbons	nanoribbon	NOUN
can-1682	145	44	)	)	PUNCT
can-1682	145	45	,	,	PUNCT
can-1682	145	46	two	two	NUM
can-1682	145	47	-	-	PUNCT
can-1682	145	48	dimensional	dimensional	ADJ
can-1682	145	49	(	(	PUNCT
can-1682	145	50	graphene	graphene	NOUN
can-1682	145	51	)	)	PUNCT
can-1682	145	52	and	and	CCONJ
can-1682	145	53	three	three	NUM
can-1682	145	54	-	-	PUNCT
can-1682	145	55	dimensional	dimensional	ADJ
can-1682	145	56	.	.	PUNCT
can-1682	146	1	dimensional	dimensional	ADJ
can-1682	146	2	(	(	PUNCT
can-1682	146	3	hybrid	hybrid	ADJ
can-1682	146	4	nanomaterials	nanomaterial	NOUN
can-1682	146	5	)	)	PUNCT
can-1682	146	6	.	.	PUNCT
can-1682	147	1	this	this	DET
can-1682	147	2	review	review	NOUN
can-1682	147	3	aims	aim	VERB
can-1682	147	4	to	to	PART
can-1682	147	5	make	make	VERB
can-1682	147	6	known	know	VERB
can-1682	147	7	the	the	DET
can-1682	147	8	usefulness	usefulness	NOUN
can-1682	147	9	of	of	ADP
can-1682	147	10	the	the	DET
can-1682	147	11	cvd	cvd	PROPN
can-1682	147	12	technique	technique	NOUN
can-1682	147	13	and	and	CCONJ
can-1682	147	14	to	to	PART
can-1682	147	15	introduce	introduce	VERB
can-1682	147	16	some	some	DET
can-1682	147	17	nanostructured	nanostructure	VERB
can-1682	147	18	allotropes	allotrope	NOUN
can-1682	147	19	of	of	ADP
can-1682	147	20	carbon	carbon	NOUN
can-1682	147	21	.	.	PUNCT
can-1682	148	1	acknowledgments	acknowledgment	NOUN
can-1682	148	2	ali	ali	PROPN
can-1682	148	3	roberto	roberto	PROPN
can-1682	148	4	ruiz	ruiz	PROPN
can-1682	148	5	hernández	hernández	PROPN
can-1682	148	6	and	and	CCONJ
can-1682	148	7	adrián	adrián	PROPN
can-1682	148	8	gutiérrez	gutiérrez	PROPN
can-1682	148	9	cruz	cruz	PROPN
can-1682	148	10	for	for	ADP
can-1682	148	11	their	their	PRON
can-1682	148	12	contribution	contribution	NOUN
can-1682	148	13	in	in	ADP
can-1682	148	14	equal	equal	ADJ
can-1682	148	15	measure	measure	NOUN
can-1682	148	16	to	to	ADP
can-1682	148	17	this	this	DET
can-1682	148	18	work	work	NOUN
can-1682	148	19	.	.	PUNCT
can-1682	149	1	jessica	jessica	PROPN
can-1682	149	2	campos	campos	PROPN
can-1682	149	3	delgado	delgado	PROPN
can-1682	149	4	thanks	thanks	PROPN
can-1682	149	5	omar	omar	PROPN
can-1682	149	6	fernando	fernando	PROPN
can-1682	149	7	ortiz	ortiz	PROPN
can-1682	149	8	aguilera	aguilera	PROPN
can-1682	149	9	for	for	ADP
can-1682	149	10	the	the	DET
can-1682	149	11	logistical	logistical	ADJ
can-1682	149	12	support	support	NOUN
can-1682	149	13	.	.	PUNCT
can-1682	150	1	conflict	conflict	NOUN
can-1682	150	2	of	of	ADP
can-1682	150	3	interest	interest	NOUN
can-1682	150	4	the	the	DET
can-1682	150	5	authors	author	NOUN
can-1682	150	6	declared	declare	VERB
can-1682	150	7	no	no	DET
can-1682	150	8	conflict	conflict	NOUN
can-1682	150	9	of	of	ADP
can-1682	150	10	interest	interest	NOUN
can-1682	150	11	.	.	PUNCT
can-1682	151	1	references	reference	NOUN
can-1682	151	2	1	1	NUM
can-1682	151	3	.	.	PUNCT
can-1682	151	4	kroto	kroto	PROPN
can-1682	151	5	hw	hw	PROPN
can-1682	151	6	,	,	PUNCT
can-1682	151	7	heath	heath	PROPN
can-1682	151	8	jr	jr	PROPN
can-1682	151	9	,	,	PUNCT
can-1682	151	10	o’brien	o’brien	PROPN
can-1682	151	11	sc	sc	PROPN
can-1682	151	12	,	,	PUNCT
can-1682	151	13	et	et	PROPN
can-1682	151	14	al	al	PROPN
can-1682	151	15	.	.	PROPN
can-1682	152	1	c60	c60	NOUN
can-1682	152	2	:	:	PUNCT
can-1682	152	3	buckmisterfullerene	buckmisterfullerene	ADJ
can-1682	152	4	.	.	PUNCT
can-1682	152	5	nature	nature	NOUN
can-1682	152	6	1985	1985	NUM
can-1682	152	7	;	;	PUNCT
can-1682	152	8	318(6042	318(6042	NUM
can-1682	152	9	):	):	PUNCT
can-1682	152	10	162163	162163	NUM
can-1682	152	11	.	.	PUNCT
can-1682	153	1	doi	doi	NOUN
can-1682	153	2	:	:	PUNCT
can-1682	153	3	10.1038/318162a0	10.1038/318162a0	PROPN
can-1682	153	4	.	.	PROPN
can-1682	153	5	2	2	X
can-1682	153	6	.	.	PUNCT
can-1682	154	1	iijima	iijima	PROPN
can-1682	154	2	s.	s.	PROPN
can-1682	154	3	helical	helical	ADJ
can-1682	154	4	microtubules	microtubule	NOUN
can-1682	154	5	of	of	ADP
can-1682	154	6	graphitic	graphitic	ADJ
can-1682	154	7	carbon	carbon	NOUN
can-1682	154	8	.	.	PUNCT
can-1682	155	1	nature	nature	NOUN
can-1682	155	2	1991	1991	NUM
can-1682	155	3	;	;	PUNCT
can-1682	155	4	354(6348	354(6348	NUM
can-1682	155	5	):	):	PUNCT
can-1682	155	6	5658	5658	NUM
can-1682	155	7	.	.	PUNCT
can-1682	156	1	doi	doi	NOUN
can-1682	156	2	:	:	PUNCT
can-1682	156	3	10.1038/354056a0	10.1038/354056a0	X
can-1682	156	4	.	.	PROPN
can-1682	157	1	3	3	X
can-1682	157	2	.	.	PUNCT
can-1682	158	1	iijima	iijima	PROPN
can-1682	158	2	s	s	PROPN
can-1682	158	3	,	,	PUNCT
can-1682	158	4	ichihashi	ichihashi	PROPN
can-1682	158	5	t.	t.	PROPN
can-1682	158	6	single	single	ADJ
can-1682	158	7	-	-	PUNCT
can-1682	158	8	shell	shell	NOUN
can-1682	158	9	carbon	carbon	NOUN
can-1682	158	10	nanotubes	nanotube	NOUN
can-1682	158	11	of	of	ADP
can-1682	158	12	1	1	NUM
can-1682	158	13	-	-	PUNCT
can-1682	158	14	nm	nm	NOUN
can-1682	158	15	diameter	diameter	NOUN
can-1682	158	16	.	.	PUNCT
can-1682	159	1	nature	nature	NOUN
can-1682	159	2	1993	1993	NUM
can-1682	159	3	;	;	PUNCT
can-1682	159	4	363(6430	363(6430	NUM
can-1682	159	5	):	):	PUNCT
can-1682	159	6	603605	603605	NOUN
can-1682	159	7	.	.	PUNCT
can-1682	160	1	doi	doi	NOUN
can-1682	160	2	:	:	PUNCT
can-1682	160	3	10.1038/363603a0	10.1038/363603a0	ADJ
can-1682	160	4	.	.	PUNCT
can-1682	160	5	4	4	NUM
can-1682	160	6	.	.	X
can-1682	160	7	ugarte	ugarte	PROPN
can-1682	160	8	d.	d.	PROPN
can-1682	160	9	curling	curl	VERB
can-1682	160	10	and	and	CCONJ
can-1682	160	11	closure	closure	NOUN
can-1682	160	12	of	of	ADP
can-1682	160	13	graphitic	graphitic	ADJ
can-1682	160	14	networks	network	NOUN
can-1682	160	15	under	under	ADP
can-1682	160	16	electron	electron	NOUN
can-1682	160	17	-	-	PUNCT
can-1682	160	18	beam	beam	NOUN
can-1682	160	19	irradiation	irradiation	NOUN
can-1682	160	20	.	.	PUNCT
can-1682	161	1	nature	nature	NOUN
can-1682	161	2	1992	1992	NUM
can-1682	161	3	;	;	PUNCT
can-1682	161	4	359(6397	359(6397	NUM
can-1682	161	5	):	):	PUNCT
can-1682	161	6	707709	707709	NUM
can-1682	161	7	.	.	PUNCT
can-1682	162	1	doi	doi	NOUN
can-1682	162	2	:	:	PUNCT
can-1682	162	3	10.1038/359707a0	10.1038/359707a0	ADJ
can-1682	162	4	.	.	NOUN
can-1682	162	5	5	5	NUM
can-1682	162	6	.	.	X
can-1682	162	7	campos	campos	PROPN
can-1682	162	8	-	-	PUNCT
can-1682	162	9	delgado	delgado	PROPN
can-1682	162	10	j	j	PROPN
can-1682	162	11	,	,	PUNCT
can-1682	162	12	romo	romo	PROPN
can-1682	162	13	-	-	PUNCT
can-1682	162	14	herrera	herrera	PROPN
can-1682	162	15	j	j	PROPN
can-1682	162	16	,	,	PUNCT
can-1682	162	17	jia	jia	PROPN
can-1682	162	18	x	x	PROPN
can-1682	162	19	,	,	PUNCT
can-1682	162	20	et	et	PROPN
can-1682	162	21	al	al	PROPN
can-1682	162	22	.	.	PUNCT
can-1682	163	1	bulk	bulk	ADJ
can-1682	163	2	production	production	NOUN
can-1682	163	3	of	of	ADP
can-1682	163	4	a	a	DET
can-1682	163	5	new	new	ADJ
can-1682	163	6	form	form	NOUN
can-1682	163	7	of	of	ADP
can-1682	163	8	sp2	sp2	NOUN
can-1682	163	9	carbon	carbon	NOUN
can-1682	163	10	:	:	PUNCT
can-1682	163	11	crystalline	crystalline	ADJ
can-1682	163	12	graphene	graphene	NOUN
can-1682	163	13	nanoribbons	nanoribbon	NOUN
can-1682	163	14	.	.	PUNCT
can-1682	164	1	nanoletters	nanoletter	NOUN
can-1682	164	2	2008	2008	NUM
can-1682	164	3	;	;	PUNCT
can-1682	164	4	8(9	8(9	NUM
can-1682	164	5	):	):	PUNCT
can-1682	164	6	27732778	27732778	PROPN
can-1682	164	7	.	.	PUNCT
can-1682	165	1	doi	doi	NOUN
can-1682	165	2	:	:	PUNCT
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can-1682	165	5	nl801316d	nl801316d	NUM
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can-1682	165	7	6	6	NUM
can-1682	165	8	.	.	PUNCT
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can-1682	166	2	v	v	PROPN
can-1682	166	3	,	,	PUNCT
can-1682	166	4	perman	perman	PROPN
can-1682	166	5	ja	ja	PROPN
can-1682	166	6	,	,	PUNCT
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can-1682	166	8	j	j	PROPN
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can-1682	166	11	al	al	PROPN
can-1682	166	12	.	.	PROPN
can-1682	166	13	broad	broad	PROPN
can-1682	166	14	family	family	NOUN
can-1682	166	15	of	of	ADP
can-1682	166	16	carbon	carbon	NOUN
can-1682	166	17	nanoallotropes	nanoallotrope	NOUN
can-1682	166	18	:	:	PUNCT
can-1682	166	19	classification	classification	NOUN
can-1682	166	20	,	,	PUNCT
can-1682	166	21	chemistry	chemistry	NOUN
can-1682	166	22	,	,	PUNCT
can-1682	166	23	and	and	CCONJ
can-1682	166	24	applications	application	NOUN
can-1682	166	25	of	of	ADP
can-1682	166	26	fullerenes	fullerene	NOUN
can-1682	166	27	,	,	PUNCT
can-1682	166	28	carbon	carbon	NOUN
can-1682	166	29	dots	dot	NOUN
can-1682	166	30	,	,	PUNCT
can-1682	166	31	nanotubes	nanotube	NOUN
can-1682	166	32	,	,	PUNCT
can-1682	166	33	graphene	graphene	NOUN
can-1682	166	34	,	,	PUNCT
can-1682	166	35	nanodiamonds	nanodiamond	NOUN
can-1682	166	36	,	,	PUNCT
can-1682	166	37	and	and	CCONJ
can-1682	166	38	combined	combined	ADJ
can-1682	166	39	superstructures	superstructure	NOUN
can-1682	166	40	.	.	PUNCT
can-1682	167	1	chemical	chemical	ADJ
can-1682	167	2	reviews	review	NOUN
can-1682	167	3	2015	2015	NUM
can-1682	167	4	;	;	PUNCT
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can-1682	167	6	):	):	PUNCT
can-1682	167	7	47444822	47444822	NOUN
can-1682	167	8	.	.	PUNCT
can-1682	168	1	doi	doi	NOUN
can-1682	168	2	:	:	PUNCT
can-1682	168	3	10.1021	10.1021	NUM
can-1682	168	4	/	/	SYM
can-1682	168	5	cr500304f	cr500304f	NOUN
can-1682	168	6	.	.	PUNCT
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can-1682	169	2	.	.	X
can-1682	169	3	serp	serp	PROPN
can-1682	169	4	p	p	NOUN
can-1682	169	5	,	,	PUNCT
can-1682	169	6	feurer	feurer	NOUN
can-1682	169	7	r	r	NOUN
can-1682	169	8	,	,	PUNCT
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can-1682	169	10	p	p	X
can-1682	169	11	,	,	PUNCT
can-1682	169	12	et	et	PROPN
can-1682	169	13	al	al	PROPN
can-1682	169	14	.	.	PUNCT
can-1682	170	1	a	a	DET
can-1682	170	2	chemical	chemical	ADJ
can-1682	170	3	vapor	vapor	NOUN
can-1682	170	4	deposition	deposition	NOUN
can-1682	170	5	process	process	NOUN
can-1682	170	6	for	for	ADP
can-1682	170	7	the	the	DET
can-1682	170	8	production	production	NOUN
can-1682	170	9	of	of	ADP
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can-1682	170	11	nanospheres	nanosphere	NOUN
can-1682	170	12	.	.	PUNCT
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can-1682	171	2	2001	2001	NUM
can-1682	171	3	;	;	PUNCT
can-1682	171	4	39(4	39(4	NUM
can-1682	171	5	):	):	PUNCT
can-1682	171	6	615628	615628	NUM
can-1682	171	7	.	.	PUNCT
can-1682	172	1	doi	doi	NOUN
can-1682	172	2	:	:	PUNCT
can-1682	172	3	10.1016	10.1016	NUM
can-1682	172	4	/	/	SYM
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can-1682	172	6	-	-	PUNCT
can-1682	172	7	6223(00)00324	6223(00)00324	NUM
can-1682	172	8	-	-	PUNCT
can-1682	172	9	9	9	NUM
can-1682	172	10	.	.	NOUN
can-1682	172	11	8	8	NUM
can-1682	172	12	.	.	X
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can-1682	173	3	,	,	PUNCT
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can-1682	173	9	,	,	PUNCT
can-1682	173	10	et	et	PROPN
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can-1682	173	14	field	field	NOUN
can-1682	173	15	effect	effect	NOUN
can-1682	173	16	in	in	ADP
can-1682	173	17	atomically	atomically	ADV
can-1682	173	18	thin	thin	ADJ
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can-1682	173	21	.	.	PUNCT
can-1682	174	1	science	science	NOUN
can-1682	174	2	2004	2004	NUM
can-1682	174	3	;	;	PUNCT
can-1682	174	4	306(5696	306(5696	NUM
can-1682	174	5	):	):	PUNCT
can-1682	174	6	666669	666669	NOUN
can-1682	174	7	.	.	PUNCT
can-1682	175	1	doi	doi	NOUN
can-1682	175	2	:	:	PUNCT
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can-1682	175	4	/	/	SYM
can-1682	175	5	science.1102896	science.1102896	PROPN
can-1682	175	6	.	.	PROPN
can-1682	175	7	9	9	NUM
can-1682	175	8	.	.	X
can-1682	176	1	the	the	DET
can-1682	176	2	nobel	nobel	PROPN
can-1682	176	3	prize	prize	PROPN
can-1682	176	4	.	.	PUNCT
can-1682	177	1	the	the	DET
can-1682	177	2	nobel	nobel	PROPN
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can-1682	177	4	in	in	ADP
can-1682	177	5	physics	physics	PROPN
can-1682	177	6	2010	2010	NUM
can-1682	177	7	.	.	PUNCT
can-1682	178	1	2010	2010	NUM
can-1682	178	2	.	.	PUNCT
can-1682	179	1	available	available	ADJ
can-1682	179	2	from	from	ADP
can-1682	179	3	:	:	PUNCT
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can-1682	179	5	mmary/	mmary/	NUM
can-1682	179	6	10	10	NUM
can-1682	179	7	.	.	PUNCT
can-1682	180	1	avouris	avouris	PROPN
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can-1682	180	3	,	,	PUNCT
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can-1682	180	10	applications	application	NOUN
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can-1682	181	4	;	;	PUNCT
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can-1682	181	6	):	):	PUNCT
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can-1682	181	10	.	.	PUNCT
can-1682	182	1	doi	doi	NOUN
can-1682	182	2	:	:	PUNCT
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can-1682	182	4	/	/	SYM
can-1682	182	5	s1369	s1369	PROPN
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can-1682	182	8	-	-	PUNCT
can-1682	182	9	5	5	NUM
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can-1682	182	12	.	.	PUNCT
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can-1682	183	6	,	,	PUNCT
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can-1682	184	1	h	h	NOUN
can-1682	184	2	,	,	PUNCT
can-1682	184	3	et	et	PROPN
can-1682	184	4	al	al	PROPN
can-1682	184	5	.	.	PROPN
can-1682	185	1	in	in	ADP
can-1682	185	2	situ	situ	ADJ
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can-1682	185	5	cvd	cvd	PROPN
can-1682	185	6	graphene	graphene	VERB
can-1682	185	7	directly	directly	ADV
can-1682	185	8	on	on	ADP
can-1682	185	9	dielectric	dielectric	ADJ
can-1682	185	10	surface	surface	NOUN
can-1682	185	11	toward	toward	ADP
can-1682	185	12	application	application	NOUN
can-1682	185	13	.	.	PUNCT
can-1682	186	1	acs	acs	PROPN
can-1682	186	2	applied	apply	VERB
can-1682	186	3	electronic	electronic	ADJ
can-1682	186	4	materials	material	NOUN
can-1682	186	5	2020	2020	NUM
can-1682	186	6	;	;	PUNCT
can-1682	186	7	2(1	2(1	NUM
can-1682	186	8	):	):	PUNCT
can-1682	186	9	238–246	238–246	NUM
can-1682	186	10	.	.	PUNCT
can-1682	187	1	doi	doi	NOUN
can-1682	187	2	:	:	PUNCT
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can-1682	187	4	/	/	SYM
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can-1682	187	8	.	.	PUNCT
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can-1682	188	2	n.	n.	PROPN
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can-1682	188	5	.	.	PUNCT
can-1682	189	1	2019	2019	NUM
can-1682	189	2	.	.	PUNCT
can-1682	190	1	available	available	ADJ
can-1682	190	2	from	from	ADP
can-1682	190	3	:	:	PUNCT
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can-1682	190	6	.	.	PUNCT
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can-1682	191	2	.	.	PUNCT
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can-1682	191	9	nano	nano	NOUN
can-1682	191	10	-	-	PUNCT
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can-1682	191	21	.	.	PUNCT
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can-1682	192	3	of	of	ADP
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can-1682	192	8	;	;	PUNCT
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can-1682	192	10	):	):	PUNCT
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can-1682	192	13	2431	2431	NUM
can-1682	192	14	.	.	PUNCT
can-1682	193	1	doi	doi	NOUN
can-1682	193	2	:	:	PUNCT
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can-1682	194	2	.	.	PUNCT
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can-1682	195	2	.	.	PUNCT
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can-1682	196	3	:	:	PUNCT
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can-1682	196	6	.	.	PUNCT
can-1682	197	1	html	html	NOUN
can-1682	197	2	.	.	PUNCT
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can-1682	198	2	.	.	PUNCT
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can-1682	199	1	[	[	X
can-1682	199	2	internet	internet	NOUN
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can-1682	201	1	2020	2020	NUM
can-1682	201	2	.	.	PUNCT
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can-1682	202	2	from	from	ADP
can-1682	202	3	:	:	PUNCT
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can-1682	202	5	16	16	NUM
can-1682	202	6	.	.	PUNCT
can-1682	203	1	vesta	vesta	PROPN
can-1682	203	2	.	.	PUNCT
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can-1682	205	1	[	[	X
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can-1682	206	2	.	.	PUNCT
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can-1682	206	7	.	.	PUNCT
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can-1682	206	9	.	.	PUNCT
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can-1682	210	8	.	.	PUNCT
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can-1682	211	3	.	.	PUNCT
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can-1682	212	3	:	:	PUNCT
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can-1682	213	13	deposition	deposition	NOUN
can-1682	213	14	of	of	ADP
can-1682	213	15	copper	copper	NOUN
can-1682	213	16	with	with	ADP
can-1682	213	17	(	(	PUNCT
can-1682	213	18	hexafluoroacetylacetonate)cu	hexafluoroacetylacetonate)cu	PROPN
can-1682	213	19	(	(	PUNCT
can-1682	213	20	i)(3,3	i)(3,3	NOUN
can-1682	213	21	-	-	PUNCT
can-1682	213	22	dimethyl	dimethyl	NOUN
can-1682	213	23	1	1	NUM
can-1682	213	24	butene	butene	NOUN
can-1682	213	25	)	)	PUNCT
can-1682	213	26	.	.	PUNCT
can-1682	214	1	journal	journal	NOUN
can-1682	214	2	of	of	ADP
can-1682	214	3	the	the	DET
can-1682	214	4	electrochemical	electrochemical	ADJ
can-1682	214	5	society	society	NOUN
can-1682	214	6	2001	2001	NUM
can-1682	214	7	;	;	PUNCT
can-1682	214	8	148(7	148(7	NUM
can-1682	214	9	):	):	PUNCT
can-1682	214	10	c473	c473	PROPN
can-1682	214	11	–	–	PUNCT
can-1682	214	12	c478	c478	PROPN
can-1682	214	13	.	.	PUNCT
can-1682	214	14	doi	doi	PROPN
can-1682	214	15	:	:	PUNCT
can-1682	214	16	10.1149/1.1375168	10.1149/1.1375168	NUM
can-1682	214	17	.	.	PUNCT
can-1682	214	18	19	19	NUM
can-1682	214	19	.	.	X
can-1682	215	1	ruan	ruan	PROPN
can-1682	215	2	g	g	PROPN
can-1682	215	3	,	,	PUNCT
can-1682	215	4	sun	sun	PROPN
can-1682	215	5	z	z	PROPN
can-1682	215	6	,	,	PUNCT
can-1682	215	7	peng	peng	PROPN
can-1682	215	8	z	z	PROPN
can-1682	215	9	,	,	PUNCT
can-1682	215	10	et	et	PROPN
can-1682	215	11	al	al	PROPN
can-1682	215	12	.	.	PUNCT
can-1682	215	13	growth	growth	NOUN
can-1682	215	14	of	of	ADP
can-1682	215	15	graphene	graphene	NOUN
can-1682	215	16	from	from	ADP
can-1682	215	17	food	food	NOUN
can-1682	215	18	,	,	PUNCT
can-1682	215	19	insects	insect	NOUN
can-1682	215	20	and	and	CCONJ
can-1682	215	21	waste	waste	NOUN
can-1682	215	22	.	.	PUNCT
can-1682	216	1	acs	acs	PROPN
can-1682	216	2	nano	nano	PROPN
can-1682	216	3	2011	2011	NUM
can-1682	216	4	;	;	PUNCT
can-1682	216	5	5(9	5(9	NUM
can-1682	216	6	):	):	PUNCT
can-1682	216	7	7601–7607	7601–7607	NUM
can-1682	216	8	.	.	PUNCT
can-1682	217	1	doi	doi	NOUN
can-1682	217	2	:	:	PUNCT
can-1682	217	3	10.1021	10.1021	NUM
can-1682	217	4	/	/	SYM
can-1682	217	5	nn202625c	nn202625c	PROPN
can-1682	217	6	.	.	NOUN
can-1682	217	7	20	20	NUM
can-1682	217	8	.	.	PUNCT
can-1682	218	1	al	al	PROPN
can-1682	218	2	-	-	PUNCT
can-1682	218	3	sarraf	sarraf	VERB
can-1682	218	4	a	a	PRON
can-1682	218	5	,	,	PUNCT
can-1682	218	6	khodair	khodair	PROPN
can-1682	218	7	z	z	PROPN
can-1682	218	8	,	,	PUNCT
can-1682	218	9	manssor	manssor	PROPN
can-1682	218	10	m	m	PROPN
can-1682	218	11	,	,	PUNCT
can-1682	218	12	et	et	PROPN
can-1682	218	13	al	al	PROPN
can-1682	218	14	.	.	PUNCT
can-1682	218	15	preparation	preparation	NOUN
can-1682	218	16	and	and	CCONJ
can-1682	218	17	characterization	characterization	NOUN
can-1682	218	18	of	of	ADP
can-1682	218	19	zno	zno	NOUN
can-1682	218	20	nanotripods	nanotripod	NOUN
can-1682	218	21	and	and	CCONJ
can-1682	218	22	nanoflowers	nanoflower	NOUN
can-1682	218	23	by	by	ADP
can-1682	218	24	atmospheric	atmospheric	ADJ
can-1682	218	25	pressure	pressure	NOUN
can-1682	218	26	chemical	chemical	NOUN
can-1682	218	27	vapor	vapor	NOUN
can-1682	218	28	deposition	deposition	NOUN
can-1682	218	29	(	(	PUNCT
can-1682	218	30	apcvd	apcvd	NOUN
can-1682	218	31	)	)	PUNCT
can-1682	218	32	technique	technique	NOUN
can-1682	218	33	.	.	PUNCT
can-1682	219	1	aip	aip	PROPN
can-1682	219	2	conference	conference	NOUN
can-1682	219	3	proceedings	proceeding	NOUN
can-1682	219	4	2018	2018	NUM
can-1682	219	5	;	;	PUNCT
can-1682	219	6	1968(1	1968(1	NUM
can-1682	219	7	):	):	PUNCT
can-1682	219	8	030005	030005	NUM
can-1682	219	9	.	.	PUNCT
can-1682	220	1	doi	doi	NOUN
can-1682	220	2	:	:	PUNCT
can-1682	220	3	10.1063/1.5039192	10.1063/1.5039192	NUM
can-1682	220	4	.	.	PUNCT
can-1682	221	1	21	21	NUM
can-1682	221	2	.	.	PUNCT
can-1682	222	1	noor	noor	PROPN
can-1682	222	2	n	n	CCONJ
can-1682	222	3	,	,	PUNCT
can-1682	222	4	chew	chew	VERB
can-1682	222	5	c	c	NOUN
can-1682	222	6	,	,	PUNCT
can-1682	222	7	bhachu	bhachu	PROPN
can-1682	222	8	c	c	AUX
can-1682	222	9	,	,	PUNCT
can-1682	222	10	et	et	PROPN
can-1682	222	11	al	al	PROPN
can-1682	222	12	.	.	PUNCT
can-1682	222	13	influencing	influence	VERB
can-1682	222	14	fto	fto	PROPN
can-1682	222	15	thin	thin	ADJ
can-1682	222	16	film	film	NOUN
can-1682	222	17	growth	growth	NOUN
can-1682	222	18	with	with	ADP
can-1682	222	19	thin	thin	ADJ
can-1682	222	20	seeding	seed	VERB
can-1682	222	21	layers	layer	NOUN
can-1682	222	22	:	:	PUNCT
can-1682	222	23	a	a	DET
can-1682	222	24	route	route	NOUN
can-1682	222	25	to	to	ADP
can-1682	222	26	microstructural	microstructural	ADJ
can-1682	222	27	modification	modification	NOUN
can-1682	222	28	.	.	PUNCT
can-1682	223	1	journal	journal	NOUN
can-1682	223	2	of	of	ADP
can-1682	223	3	materials	material	NOUN
can-1682	223	4	chemistry	chemistry	NOUN
can-1682	223	5	c	c	NOUN
can-1682	223	6	2015	2015	NUM
can-1682	223	7	;	;	PUNCT
can-1682	223	8	3(36	3(36	NUM
can-1682	223	9	):	):	PUNCT
can-1682	223	10	9359–9368	9359–9368	NUM
can-1682	223	11	.	.	PUNCT
can-1682	223	12	doi	doi	NOUN
can-1682	223	13	:	:	PUNCT
can-1682	223	14	10.1039	10.1039	NUM
can-1682	223	15	/	/	SYM
can-1682	223	16	c5tc02144h	c5tc02144h	PROPN
can-1682	223	17	.	.	PROPN
can-1682	224	1	22	22	NUM
can-1682	224	2	.	.	PUNCT
can-1682	224	3	alarcón	alarcón	PROPN
can-1682	224	4	-	-	PUNCT
can-1682	224	5	salazar	salazar	PROPN
can-1682	224	6	j	j	PROPN
can-1682	224	7	,	,	PUNCT
can-1682	224	8	lópez	lópez	NOUN
can-1682	224	9	-	-	PUNCT
can-1682	224	10	estopier	estopi	ADJ
can-1682	224	11	r	r	NOUN
can-1682	224	12	,	,	PUNCT
can-1682	224	13	quiroga	quiroga	NOUN
can-1682	224	14	-	-	PUNCT
can-1682	224	15	gonzález	gonzález	PROPN
can-1682	224	16	e	e	NOUN
can-1682	224	17	,	,	PUNCT
can-1682	224	18	et	et	PROPN
can-1682	224	19	al	al	PROPN
can-1682	224	20	.	.	PROPN
can-1682	224	21	silicon	silicon	PROPN
can-1682	224	22	-	-	PUNCT
can-1682	224	23	rich	rich	ADJ
can-1682	224	24	oxide	oxide	NOUN
can-1682	224	25	obtained	obtain	VERB
can-1682	224	26	by	by	ADP
can-1682	224	27	low	low	ADJ
can-1682	224	28	-	-	PUNCT
can-1682	224	29	pressure	pressure	NOUN
can-1682	224	30	chemical	chemical	NOUN
can-1682	224	31	vapor	vapor	NOUN
can-1682	224	32	deposition	deposition	NOUN
can-1682	224	33	to	to	PART
can-1682	224	34	develop	develop	VERB
can-1682	224	35	silicon	silicon	NOUN
can-1682	224	36	light	light	NOUN
can-1682	224	37	sources	source	NOUN
can-1682	224	38	.	.	PUNCT
can-1682	225	1	in	in	ADP
can-1682	225	2	:	:	PUNCT
can-1682	225	3	neralla	neralla	PROPN
can-1682	225	4	s	s	PART
can-1682	225	5	(	(	PUNCT
can-1682	225	6	editor	editor	NOUN
can-1682	225	7	)	)	PUNCT
can-1682	225	8	.	.	PUNCT
can-1682	226	1	chemical	chemical	ADJ
can-1682	226	2	vapor	vapor	NOUN
can-1682	226	3	deposition	deposition	NOUN
can-1682	226	4	—	—	PUNCT
can-1682	226	5	recent	recent	ADJ
can-1682	226	6	advances	advance	NOUN
can-1682	226	7	and	and	CCONJ
can-1682	226	8	applications	application	NOUN
can-1682	226	9	in	in	ADP
can-1682	226	10	optical	optical	ADJ
can-1682	226	11	,	,	PUNCT
can-1682	226	12	solar	solar	ADJ
can-1682	226	13	cells	cell	NOUN
can-1682	226	14	and	and	CCONJ
can-1682	226	15	solid	solid	ADJ
can-1682	226	16	-	-	PUNCT
can-1682	226	17	state	state	NOUN
can-1682	226	18	devices	device	NOUN
can-1682	226	19	.	.	PUNCT
can-1682	227	1	intechopen	intechopen	ADJ
can-1682	227	2	;	;	PUNCT
can-1682	227	3	2016	2016	NUM
can-1682	227	4	.	.	PUNCT
can-1682	228	1	p.	p.	NOUN
can-1682	228	2	159–181	159–181	NUM
can-1682	228	3	.	.	PUNCT
can-1682	229	1	doi	doi	NOUN
can-1682	229	2	:	:	PUNCT
can-1682	229	3	10.5772/63012	10.5772/63012	NUM
can-1682	229	4	.	.	NOUN
can-1682	230	1	23	23	NUM
can-1682	230	2	.	.	X
can-1682	230	3	nozaki	nozaki	PROPN
can-1682	230	4	t	t	PROPN
can-1682	230	5	,	,	PUNCT
can-1682	230	6	ohnishi	ohnishi	PROPN
can-1682	230	7	k	k	NOUN
can-1682	230	8	,	,	PUNCT
can-1682	230	9	okazaki	okazaki	PROPN
can-1682	230	10	k	k	PROPN
can-1682	230	11	,	,	PUNCT
can-1682	230	12	et	et	PROPN
can-1682	230	13	al	al	PROPN
can-1682	230	14	.	.	PROPN
can-1682	230	15	fabrication	fabrication	NOUN
can-1682	230	16	of	of	ADP
can-1682	230	17	vertically	vertically	ADV
can-1682	230	18	aligned	align	VERB
can-1682	230	19	single	single	ADJ
can-1682	230	20	-	-	PUNCT
can-1682	230	21	walled	wall	VERB
can-1682	230	22	carbon	carbon	NOUN
can-1682	230	23	nanotubes	nanotube	NOUN
can-1682	230	24	in	in	ADP
can-1682	230	25	atmospheric	atmospheric	ADJ
can-1682	230	26	pressure	pressure	NOUN
can-1682	230	27	non	non	ADJ
can-1682	230	28	-	-	ADJ
can-1682	230	29	thermal	thermal	ADJ
can-1682	230	30	plasma	plasma	NOUN
can-1682	230	31	cvd	cvd	PROPN
can-1682	230	32	.	.	PUNCT
can-1682	231	1	carbon	carbon	NOUN
can-1682	231	2	2007	2007	NUM
can-1682	231	3	;	;	PUNCT
can-1682	231	4	45(2	45(2	NUM
can-1682	231	5	):	):	PUNCT
can-1682	232	1	364–374	364–374	NUM
can-1682	232	2	.	.	PUNCT
can-1682	232	3	doi	doi	NOUN
can-1682	232	4	:	:	PUNCT
can-1682	232	5	10.1016	10.1016	NUM
can-1682	232	6	/	/	SYM
can-1682	232	7	j.carbon.2006.09.009	j.carbon.2006.09.009	PROPN
can-1682	232	8	.	.	PROPN
can-1682	232	9	24	24	NUM
can-1682	232	10	.	.	PUNCT
can-1682	233	1	barankin	barankin	PROPN
can-1682	233	2	md	md	PROPN
can-1682	233	3	,	,	PUNCT
can-1682	233	4	gonzalez	gonzalez	PROPN
can-1682	233	5	e	e	PROPN
can-1682	233	6	,	,	PUNCT
can-1682	233	7	ladwig	ladwig	PROPN
can-1682	233	8	am	am	PROPN
can-1682	233	9	,	,	PUNCT
can-1682	233	10	et	et	PROPN
can-1682	233	11	al	al	PROPN
can-1682	233	12	.	.	PUNCT
can-1682	234	1	plasma	plasma	NOUN
can-1682	234	2	-	-	PUNCT
can-1682	234	3	enhanced	enhance	VERB
can-1682	234	4	chemical	chemical	NOUN
can-1682	234	5	vapor	vapor	NOUN
can-1682	234	6	deposition	deposition	NOUN
can-1682	234	7	of	of	ADP
can-1682	234	8	zinc	zinc	NOUN
can-1682	234	9	oxide	oxide	NOUN
can-1682	234	10	at	at	ADP
can-1682	234	11	atmospheric	atmospheric	ADJ
can-1682	234	12	pressure	pressure	NOUN
can-1682	234	13	and	and	CCONJ
can-1682	234	14	low	low	ADJ
can-1682	234	15	temperature	temperature	NOUN
can-1682	234	16	.	.	PUNCT
can-1682	235	1	solar	solar	ADJ
can-1682	235	2	energy	energy	NOUN
can-1682	235	3	materials	material	NOUN
can-1682	235	4	and	and	CCONJ
can-1682	235	5	solar	solar	ADJ
can-1682	235	6	cells	cell	NOUN
can-1682	235	7	2007	2007	NUM
can-1682	235	8	;	;	PUNCT
can-1682	235	9	91(10	91(10	NUM
can-1682	235	10	):	):	PUNCT
can-1682	235	11	924–930	924–930	NUM
can-1682	235	12	.	.	PUNCT
can-1682	236	1	doi	doi	NOUN
can-1682	236	2	:	:	PUNCT
can-1682	236	3	10.1016	10.1016	NUM
can-1682	236	4	/	/	SYM
can-1682	236	5	j.solmat.2007.02.009	j.solmat.2007.02.009	PROPN
can-1682	236	6	.	.	PUNCT
can-1682	237	1	25	25	NUM
can-1682	237	2	.	.	PUNCT
can-1682	238	1	hussain	hussain	PROPN
can-1682	238	2	a	a	PROPN
can-1682	238	3	,	,	PUNCT
can-1682	238	4	liao	liao	PROPN
can-1682	238	5	y	y	PROPN
can-1682	238	6	,	,	PUNCT
can-1682	238	7	zhang	zhang	PROPN
can-1682	238	8	q	q	PROPN
can-1682	238	9	,	,	PUNCT
can-1682	238	10	et	et	PROPN
can-1682	238	11	al	al	PROPN
can-1682	238	12	.	.	PUNCT
can-1682	239	1	floating	float	VERB
can-1682	239	2	catalyst	catalyst	NOUN
can-1682	239	3	cvd	cvd	PROPN
can-1682	239	4	synthesis	synthesis	NOUN
can-1682	239	5	of	of	ADP
can-1682	239	6	single	single	ADJ
can-1682	239	7	walled	walled	ADJ
can-1682	239	8	carbon	carbon	NOUN
can-1682	239	9	nanotubes	nanotube	NOUN
can-1682	239	10	from	from	ADP
can-1682	239	11	ethylene	ethylene	NOUN
can-1682	239	12	for	for	ADP
can-1682	239	13	high	high	ADJ
can-1682	239	14	performance	performance	NOUN
can-1682	239	15	transparent	transparent	ADJ
can-1682	239	16	electrodes	electrode	NOUN
can-1682	239	17	.	.	PUNCT
can-1682	240	1	nanoscale	nanoscale	NOUN
can-1682	240	2	2018	2018	NUM
can-1682	240	3	;	;	PUNCT
can-1682	240	4	10(20	10(20	NUM
can-1682	240	5	):	):	PUNCT
can-1682	240	6	9752–9759	9752–9759	NUM
can-1682	240	7	.	.	PUNCT
can-1682	241	1	doi	doi	NOUN
can-1682	241	2	:	:	PUNCT
can-1682	241	3	10.1039	10.1039	NUM
can-1682	241	4	/	/	SYM
can-1682	241	5	c8nr00716k	c8nr00716k	PROPN
can-1682	241	6	.	.	PUNCT
can-1682	242	1	26	26	NUM
can-1682	242	2	.	.	PUNCT
can-1682	243	1	kumar	kumar	PROPN
can-1682	243	2	m	m	PROPN
can-1682	243	3	,	,	PUNCT
can-1682	243	4	ando	ando	PROPN
can-1682	243	5	y.	y.	PROPN
can-1682	243	6	carbon	carbon	NOUN
can-1682	243	7	nanotube	nanotube	NOUN
can-1682	243	8	synthesis	synthesis	NOUN
can-1682	243	9	and	and	CCONJ
can-1682	243	10	growth	growth	NOUN
can-1682	243	11	mechanism	mechanism	NOUN
can-1682	243	12	.	.	PUNCT
can-1682	244	1	nanotechnology	nanotechnology	NOUN
can-1682	244	2	perceptions	perception	NOUN
can-1682	244	3	2011	2011	NUM
can-1682	244	4	;	;	PUNCT
can-1682	244	5	6(1	6(1	NUM
can-1682	244	6	):	):	PUNCT
can-1682	244	7	147–170	147–170	NUM
can-1682	244	8	.	.	PUNCT
can-1682	245	1	doi	doi	NOUN
can-1682	245	2	:	:	PUNCT
can-1682	245	3	10.4024	10.4024	NUM
can-1682	245	4	/	/	SYM
can-1682	245	5	n02ku10a.ntp.06.01	n02ku10a.ntp.06.01	NUM
can-1682	245	6	.	.	PUNCT
can-1682	246	1	27	27	NUM
can-1682	246	2	.	.	PUNCT
can-1682	247	1	pottathara	pottathara	PROPN
can-1682	247	2	yb	yb	PROPN
can-1682	247	3	,	,	PUNCT
can-1682	247	4	grohens	grohens	PROPN
can-1682	247	5	y	y	PROPN
can-1682	247	6	,	,	PUNCT
can-1682	247	7	kokol	kokol	PROPN
can-1682	247	8	v	v	PROPN
can-1682	247	9	,	,	PUNCT
can-1682	247	10	et	et	PROPN
can-1682	247	11	al	al	PROPN
can-1682	247	12	.	.	PUNCT
can-1682	247	13	synthesis	synthesis	NOUN
can-1682	247	14	and	and	CCONJ
can-1682	247	15	processing	processing	NOUN
can-1682	247	16	of	of	ADP
can-1682	247	17	emerging	emerge	VERB
can-1682	247	18	two	two	NUM
can-1682	247	19	-	-	PUNCT
can-1682	247	20	dimensional	dimensional	ADJ
can-1682	247	21	nanomaterials	nanomaterial	NOUN
can-1682	247	22	.	.	PUNCT
can-1682	248	1	in	in	ADP
can-1682	248	2	:	:	PUNCT
can-1682	248	3	pottathara	pottathara	PROPN
can-1682	248	4	y	y	PROPN
can-1682	248	5	,	,	PUNCT
can-1682	248	6	thomas	thomas	PROPN
can-1682	248	7	s	s	PROPN
can-1682	248	8	,	,	PUNCT
can-1682	248	9	kalarikkal	kalarikkal	PROPN
can-1682	248	10	n	n	CCONJ
can-1682	248	11	,	,	PUNCT
can-1682	248	12	et	et	PROPN
can-1682	248	13	al	al	PROPN
can-1682	248	14	.	.	PUNCT
can-1682	249	1	(	(	PUNCT
can-1682	249	2	editors	editor	NOUN
can-1682	249	3	)	)	PUNCT
can-1682	249	4	.	.	PUNCT
can-1682	250	1	nanomaterials	nanomaterial	NOUN
can-1682	250	2	synthesis	synthesis	NOUN
can-1682	250	3	.	.	PUNCT
can-1682	251	1	new	new	PROPN
can-1682	251	2	york	york	PROPN
can-1682	251	3	:	:	PUNCT
can-1682	251	4	elsevier	elsevier	NOUN
can-1682	251	5	;	;	PUNCT
can-1682	251	6	2019	2019	NUM
can-1682	251	7	.	.	PUNCT
can-1682	252	1	p.	p.	NOUN
can-1682	252	2	1–25	1–25	PROPN
can-1682	252	3	.	.	PUNCT
can-1682	253	1	doi	doi	NOUN
can-1682	253	2	:	:	PUNCT
can-1682	253	3	10.1016	10.1016	NUM
can-1682	253	4	/	/	SYM
can-1682	253	5	b978	b978	NUM
can-1682	253	6	-	-	PUNCT
can-1682	253	7	0	0	NUM
can-1682	253	8	-	-	PUNCT
can-1682	253	9	12	12	NUM
can-1682	253	10	-	-	PUNCT
can-1682	253	11	815751	815751	NUM
can-1682	253	12	-	-	PUNCT
can-1682	253	13	0.00001	0.00001	NUM
can-1682	253	14	-	-	PUNCT
can-1682	253	15	8	8	NUM
can-1682	253	16	.	.	PUNCT
can-1682	254	1	28	28	NUM
can-1682	254	2	.	.	PUNCT
can-1682	255	1	benelmekki	benelmekki	PROPN
can-1682	255	2	m	m	PROPN
can-1682	255	3	,	,	PUNCT
can-1682	255	4	erbe	erbe	PROPN
can-1682	255	5	a.	a.	NOUN
can-1682	255	6	nanostructured	nanostructure	VERB
can-1682	255	7	thin	thin	ADJ
can-1682	255	8	films	film	NOUN
can-1682	255	9	—	—	PUNCT
can-1682	255	10	background	background	NOUN
can-1682	255	11	,	,	PUNCT
can-1682	255	12	preparation	preparation	NOUN
can-1682	255	13	and	and	CCONJ
can-1682	255	14	relation	relation	NOUN
can-1682	255	15	to	to	ADP
can-1682	255	16	the	the	DET
can-1682	255	17	technological	technological	ADJ
can-1682	255	18	revolution	revolution	NOUN
can-1682	255	19	of	of	ADP
can-1682	255	20	the	the	DET
can-1682	255	21	21st	21st	ADJ
can-1682	255	22	century	century	NOUN
can-1682	255	23	.	.	PUNCT
can-1682	256	1	in	in	ADP
can-1682	256	2	:	:	PUNCT
can-1682	256	3	benelmekki	benelmekki	PROPN
can-1682	256	4	m	m	PROPN
can-1682	256	5	,	,	PUNCT
can-1682	256	6	erbe	erbe	VERB
can-1682	256	7	a	a	DET
can-1682	256	8	(	(	PUNCT
can-1682	256	9	editors	editor	NOUN
can-1682	256	10	)	)	PUNCT
can-1682	256	11	.	.	PUNCT
can-1682	257	1	frontiers	frontier	NOUN
can-1682	257	2	of	of	ADP
can-1682	257	3	nanoscience	nanoscience	PROPN
can-1682	257	4	.	.	PUNCT
can-1682	258	1	new	new	PROPN
can-1682	258	2	york	york	PROPN
can-1682	258	3	:	:	PUNCT
can-1682	258	4	elsevier	elsevier	NOUN
can-1682	258	5	;	;	PUNCT
can-1682	258	6	2019	2019	NUM
can-1682	258	7	.	.	PUNCT
can-1682	259	1	p.	p.	NOUN
can-1682	259	2	1–34	1–34	PROPN
can-1682	259	3	.	.	PUNCT
can-1682	260	1	doi	doi	NOUN
can-1682	260	2	:	:	PUNCT
can-1682	260	3	10.1016	10.1016	NUM
can-1682	260	4	/	/	SYM
can-1682	260	5	b978	b978	NUM
can-1682	260	6	-	-	PUNCT
can-1682	260	7	0	0	NUM
can-1682	260	8	-	-	PUNCT
can-1682	260	9	08	08	NUM
can-1682	260	10	-	-	PUNCT
can-1682	260	11	102572	102572	NUM
can-1682	260	12	-	-	PUNCT
can-1682	260	13	7.00001	7.00001	NUM
can-1682	260	14	-	-	PUNCT
can-1682	260	15	5	5	NUM
can-1682	260	16	.	.	NOUN
can-1682	260	17	29	29	NUM
can-1682	260	18	.	.	PUNCT
can-1682	261	1	mattox	mattox	PROPN
can-1682	261	2	dm	dm	PROPN
can-1682	261	3	.	.	PUNCT
can-1682	262	1	plasmas	plasma	NOUN
can-1682	262	2	and	and	CCONJ
can-1682	262	3	plasma	plasma	NOUN
can-1682	262	4	enhanced	enhance	VERB
can-1682	262	5	cvd	cvd	PROPN
can-1682	262	6	.	.	PUNCT
can-1682	263	1	in	in	ADP
can-1682	263	2	:	:	PUNCT
can-1682	263	3	mattox	mattox	PROPN
can-1682	263	4	dm	dm	PROPN
can-1682	263	5	(	(	PUNCT
can-1682	263	6	editors	editor	NOUN
can-1682	263	7	)	)	PUNCT
can-1682	263	8	.	.	PUNCT
can-1682	264	1	the	the	DET
can-1682	264	2	foundations	foundation	NOUN
can-1682	264	3	of	of	ADP
can-1682	264	4	vacuum	vacuum	NOUN
can-1682	264	5	coating	coating	NOUN
can-1682	264	6	technology	technology	NOUN
can-1682	264	7	.	.	PUNCT
can-1682	265	1	new	new	PROPN
can-1682	265	2	york	york	PROPN
can-1682	265	3	:	:	PUNCT
can-1682	265	4	elsevier	elsevier	NOUN
can-1682	265	5	;	;	PUNCT
can-1682	265	6	2018	2018	NUM
can-1682	265	7	.	.	PUNCT
can-1682	266	1	p.	p.	NOUN
can-1682	266	2	61–86	61–86	NUM
can-1682	266	3	.	.	PUNCT
can-1682	267	1	doi	doi	NOUN
can-1682	267	2	:	:	PUNCT
can-1682	267	3	10.1016	10.1016	NUM
can-1682	267	4	/	/	SYM
can-1682	267	5	b978	b978	NUM
can-1682	267	6	-	-	PUNCT
can-1682	267	7	0	0	NUM
can-1682	267	8	-	-	PUNCT
can-1682	267	9	12	12	NUM
can-1682	267	10	-	-	PUNCT
can-1682	267	11	813084	813084	NUM
can-1682	267	12	-	-	PUNCT
can-1682	267	13	1.00003	1.00003	NUM
can-1682	267	14	-	-	PUNCT
can-1682	267	15	0	0	NUM
can-1682	267	16	.	.	NOUN
can-1682	267	17	30	30	NUM
can-1682	267	18	.	.	PUNCT
can-1682	268	1	sengupta	sengupta	NOUN
can-1682	268	2	j.	j.	PROPN
can-1682	268	3	carbon	carbon	PROPN
can-1682	268	4	nanotube	nanotube	NOUN
can-1682	268	5	fabrication	fabrication	NOUN
can-1682	268	6	at	at	ADP
can-1682	268	7	industrial	industrial	ADJ
can-1682	268	8	scale	scale	NOUN
can-1682	268	9	.	.	PUNCT
can-1682	269	1	in	in	ADP
can-1682	269	2	:	:	PUNCT
can-1682	269	3	hussain	hussain	PROPN
can-1682	269	4	cm	cm	PROPN
can-1682	269	5	(	(	PUNCT
can-1682	269	6	editor	editor	NOUN
can-1682	269	7	)	)	PUNCT
can-1682	269	8	.	.	PUNCT
can-1682	270	1	handbook	handbook	NOUN
can-1682	270	2	of	of	ADP
can-1682	270	3	nanomaterials	nanomaterial	NOUN
can-1682	270	4	for	for	ADP
can-1682	270	5	industrial	industrial	ADJ
can-1682	270	6	applications	application	NOUN
can-1682	270	7	.	.	PUNCT
can-1682	271	1	new	new	PROPN
can-1682	271	2	york	york	PROPN
can-1682	271	3	:	:	PUNCT
can-1682	271	4	elsevier	elsevier	NOUN
can-1682	271	5	;	;	PUNCT
can-1682	271	6	2018	2018	NUM
can-1682	271	7	.	.	PUNCT
can-1682	272	1	p.	p.	NOUN
can-1682	272	2	172–194	172–194	NUM
can-1682	272	3	.	.	PUNCT
can-1682	273	1	doi	doi	NOUN
can-1682	273	2	:	:	PUNCT
can-1682	273	3	10.1016	10.1016	NUM
can-1682	273	4	/	/	SYM
can-1682	273	5	b978	b978	NUM
can-1682	273	6	-	-	PUNCT
can-1682	273	7	0	0	NUM
can-1682	273	8	-	-	PUNCT
can-1682	273	9	12	12	NUM
can-1682	273	10	-	-	PUNCT
can-1682	273	11	813351	813351	NUM
can-1682	273	12	-	-	PUNCT
can-1682	273	13	4.00010	4.00010	NUM
can-1682	273	14	-	-	SYM
can-1682	273	15	9	9	NUM
can-1682	273	16	.	.	NUM
can-1682	273	17	31	31	NUM
can-1682	273	18	.	.	PUNCT
can-1682	274	1	scott	scott	PROPN
can-1682	274	2	lt	lt	PROPN
can-1682	274	3	,	,	PUNCT
can-1682	274	4	boorum	boorum	PROPN
can-1682	274	5	mh	mh	PROPN
can-1682	274	6	,	,	PUNCT
can-1682	274	7	mcmahon	mcmahon	PROPN
can-1682	274	8	bj	bj	VERB
can-1682	274	9	,	,	PUNCT
can-1682	274	10	et	et	PROPN
can-1682	274	11	al	al	PROPN
can-1682	274	12	.	.	PUNCT
can-1682	275	1	a	a	DET
can-1682	275	2	rational	rational	ADJ
can-1682	275	3	chemical	chemical	ADJ
can-1682	275	4	synthesis	synthesis	NOUN
can-1682	275	5	of	of	ADP
can-1682	275	6	c60	c60	NOUN
can-1682	275	7	.	.	PUNCT
can-1682	276	1	science	science	PROPN
can-1682	276	2	2002	2002	NUM
can-1682	276	3	;	;	PUNCT
can-1682	276	4	295(5559	295(5559	NUM
can-1682	276	5	):	):	PUNCT
can-1682	276	6	1500–1503	1500–1503	NUM
can-1682	276	7	.	.	PUNCT
can-1682	277	1	doi	doi	NOUN
can-1682	277	2	:	:	PUNCT
can-1682	277	3	10.1126	10.1126	NUM
can-1682	277	4	/	/	SYM
can-1682	277	5	science.1068427	science.1068427	PROPN
can-1682	277	6	.	.	PROPN
can-1682	277	7	32	32	NUM
can-1682	277	8	.	.	PUNCT
can-1682	278	1	takehara	takehara	PROPN
can-1682	278	2	h	h	PROPN
can-1682	278	3	,	,	PUNCT
can-1682	278	4	fujiwara	fujiwara	PROPN
can-1682	278	5	m	m	PROPN
can-1682	278	6	,	,	PUNCT
can-1682	278	7	arikawa	arikawa	PROPN
can-1682	278	8	m	m	PROPN
can-1682	278	9	,	,	PUNCT
can-1682	278	10	et	et	PROPN
can-1682	278	11	al	al	PROPN
can-1682	278	12	.	.	PUNCT
can-1682	279	1	experimental	experimental	ADJ
can-1682	279	2	study	study	NOUN
can-1682	279	3	of	of	ADP
can-1682	279	4	industrial	industrial	ADJ
can-1682	279	5	scale	scale	NOUN
can-1682	279	6	fullerene	fullerene	NOUN
can-1682	279	7	production	production	NOUN
can-1682	279	8	by	by	ADP
can-1682	279	9	combustion	combustion	NOUN
can-1682	279	10	synthesis	synthesis	NOUN
can-1682	279	11	.	.	PUNCT
can-1682	280	1	carbon	carbon	NOUN
can-1682	280	2	2005	2005	NUM
can-1682	280	3	;	;	PUNCT
can-1682	280	4	43(2	43(2	NUM
can-1682	280	5	):	):	PUNCT
can-1682	280	6	311–319	311–319	PROPN
can-1682	280	7	.	.	PUNCT
can-1682	281	1	doi	doi	NOUN
can-1682	281	2	:	:	PUNCT
can-1682	281	3	10.1016	10.1016	NUM
can-1682	281	4	/	/	SYM
can-1682	281	5	j.carbon.2004.09.017	j.carbon.2004.09.017	X
can-1682	281	6	.	.	PUNCT
can-1682	282	1	33	33	NUM
can-1682	282	2	.	.	PUNCT
can-1682	283	1	liu	liu	PROPN
can-1682	283	2	y	y	PROPN
can-1682	283	3	,	,	PUNCT
can-1682	283	4	vander	vander	PROPN
can-1682	283	5	wal	wal	PROPN
can-1682	283	6	rl	rl	PROPN
can-1682	283	7	,	,	PUNCT
can-1682	283	8	khabashesku	khabashesku	PROPN
can-1682	283	9	vn	vn	PROPN
can-1682	283	10	.	.	PUNCT
can-1682	283	11	functionalization	functionalization	NOUN
can-1682	283	12	of	of	ADP
can-1682	283	13	carbon	carbon	NOUN
can-1682	283	14	nano	nano	NOUN
can-1682	283	15	-	-	NOUN
can-1682	283	16	onions	onion	NOUN
can-1682	283	17	by	by	ADP
can-1682	283	18	direct	direct	ADJ
can-1682	283	19	fluorination	fluorination	NOUN
can-1682	283	20	.	.	PUNCT
can-1682	284	1	chemistry	chemistry	NOUN
can-1682	284	2	of	of	ADP
can-1682	284	3	materials	material	NOUN
can-1682	284	4	2007	2007	NUM
can-1682	284	5	;	;	PUNCT
can-1682	284	6	19(4	19(4	NUM
can-1682	284	7	):	):	PUNCT
can-1682	284	8	778–786	778–786	NUM
can-1682	284	9	.	.	PUNCT
can-1682	285	1	doi	doi	NOUN
can-1682	285	2	:	:	PUNCT
can-1682	285	3	10.1021	10.1021	NUM
can-1682	285	4	/	/	SYM
can-1682	285	5	cm062177j	cm062177j	NOUN
can-1682	285	6	.	.	PUNCT
can-1682	286	1	34	34	NUM
can-1682	286	2	.	.	PUNCT
can-1682	286	3	kleckley	kleckley	PROPN
can-1682	286	4	s	s	PROPN
can-1682	286	5	,	,	PUNCT
can-1682	286	6	wang	wang	PROPN
can-1682	286	7	h	h	PROPN
can-1682	286	8	,	,	PUNCT
can-1682	286	9	oladeji	oladeji	NOUN
can-1682	287	1	i	i	PRON
can-1682	287	2	,	,	PUNCT
can-1682	287	3	et	et	PROPN
can-1682	287	4	al	al	PROPN
can-1682	287	5	.	.	PUNCT
can-1682	287	6	fullerenes	fullerene	NOUN
can-1682	287	7	and	and	CCONJ
can-1682	287	8	polymers	polymer	NOUN
can-1682	287	9	produced	produce	VERB
can-1682	287	10	by	by	ADP
can-1682	287	11	the	the	DET
can-1682	287	12	chemical	chemical	NOUN
can-1682	287	13	vapor	vapor	NOUN
can-1682	287	14	deposition	deposition	NOUN
can-1682	287	15	method	method	NOUN
can-1682	287	16	.	.	PUNCT
can-1682	288	1	acs	acs	PROPN
can-1682	288	2	symposium	symposium	PROPN
can-1682	288	3	series	series	PROPN
can-1682	288	4	1998	1998	NUM
can-1682	288	5	;	;	PUNCT
can-1682	288	6	681(1	681(1	NUM
can-1682	288	7	):	):	PUNCT
can-1682	288	8	51–60	51–60	NOUN
can-1682	288	9	.	.	PUNCT
can-1682	289	1	doi	doi	NOUN
can-1682	289	2	:	:	PUNCT
can-1682	289	3	10.1021	10.1021	NUM
can-1682	289	4	/	/	SYM
can-1682	289	5	bk-1998	bk-1998	NOUN
can-1682	289	6	-	-	PUNCT
can-1682	289	7	0681.ch006	0681.ch006	NOUN
can-1682	289	8	.	.	PUNCT
can-1682	290	1	35	35	NUM
can-1682	290	2	.	.	PUNCT
can-1682	291	1	gao	gao	PROPN
can-1682	291	2	y	y	PROPN
can-1682	291	3	,	,	PUNCT
can-1682	291	4	zhou	zhou	PROPN
can-1682	291	5	y	y	PROPN
can-1682	291	6	,	,	PUNCT
can-1682	291	7	qian	qian	PROPN
can-1682	291	8	m	m	PROPN
can-1682	291	9	,	,	PUNCT
can-1682	291	10	et	et	PROPN
can-1682	291	11	al	al	PROPN
can-1682	291	12	.	.	PUNCT
can-1682	292	1	chemical	chemical	NOUN
can-1682	292	2	activations	activation	NOUN
can-1682	292	3	of	of	ADP
can-1682	292	4	carbon	carbon	NOUN
can-1682	292	5	nano	nano	NOUN
can-1682	292	6	-	-	PUNCT
can-1682	292	7	onions	onion	NOUN
can-1682	292	8	for	for	ADP
can-1682	292	9	high	high	ADJ
can-1682	292	10	-	-	PUNCT
can-1682	292	11	rate	rate	NOUN
can-1682	292	12	supercapacitor	supercapacitor	NOUN
can-1682	292	13	electrodes	electrode	NOUN
can-1682	292	14	.	.	PUNCT
can-1682	293	1	carbon	carbon	NOUN
can-1682	293	2	2012	2012	NUM
can-1682	293	3	;	;	PUNCT
can-1682	293	4	51(1	51(1	NUM
can-1682	293	5	):	):	PUNCT
can-1682	293	6	52–58	52–58	NUM
can-1682	293	7	.	.	PUNCT
can-1682	294	1	doi	doi	NOUN
can-1682	294	2	:	:	PUNCT
can-1682	294	3	10.1016	10.1016	NUM
can-1682	294	4	/	/	SYM
can-1682	294	5	j.carbon.2012.08.009	j.carbon.2012.08.009	PROPN
can-1682	294	6	.	.	PROPN
can-1682	295	1	36	36	NUM
can-1682	295	2	.	.	PUNCT
can-1682	296	1	santiago	santiago	PROPN
can-1682	296	2	d	d	X
can-1682	296	3	,	,	PUNCT
can-1682	296	4	rodríguez	rodríguez	NOUN
can-1682	296	5	gg	gg	PROPN
can-1682	296	6	,	,	PUNCT
can-1682	296	7	palkar	palkar	PROPN
can-1682	296	8	a	a	X
can-1682	296	9	,	,	PUNCT
can-1682	296	10	et	et	PROPN
can-1682	296	11	al	al	PROPN
can-1682	296	12	.	.	PUNCT
can-1682	297	1	platinum	platinum	NOUN
can-1682	297	2	electrodeposition	electrodeposition	NOUN
can-1682	297	3	on	on	ADP
can-1682	297	4	unsupported	unsupported	ADJ
can-1682	297	5	carbon	carbon	NOUN
can-1682	297	6	nano	nano	NOUN
can-1682	297	7	-	-	PUNCT
can-1682	297	8	onions	onion	NOUN
can-1682	297	9	.	.	PUNCT
can-1682	298	1	langmuir	langmuir	PROPN
can-1682	298	2	2012	2012	NUM
can-1682	298	3	;	;	PUNCT
can-1682	298	4	28(49	28(49	NUM
can-1682	298	5	):	):	PUNCT
can-1682	298	6	17202–17210	17202–17210	NUM
can-1682	298	7	.	.	PUNCT
can-1682	299	1	doi	doi	NOUN
can-1682	299	2	:	:	PUNCT
can-1682	299	3	10.1021	10.1021	NUM
can-1682	299	4	/	/	SYM
can-1682	299	5	la3031396	la3031396	PROPN
can-1682	299	6	.	.	PUNCT
can-1682	300	1	37	37	NUM
can-1682	300	2	.	.	PUNCT
can-1682	301	1	zhang	zhang	PROPN
can-1682	301	2	w	w	PROPN
can-1682	301	3	,	,	PUNCT
can-1682	301	4	fu	fu	PROPN
can-1682	301	5	j	j	PROPN
can-1682	301	6	,	,	PUNCT
can-1682	301	7	chang	chang	PROPN
can-1682	301	8	j	j	PROPN
can-1682	301	9	,	,	PUNCT
can-1682	301	10	et	et	PROPN
can-1682	301	11	al	al	PROPN
can-1682	301	12	.	.	PROPN
can-1682	301	13	fabrication	fabrication	NOUN
can-1682	301	14	and	and	CCONJ
can-1682	301	15	purification	purification	NOUN
can-1682	301	16	of	of	ADP
can-1682	301	17	carbon	carbon	NOUN
can-1682	301	18	nano	nano	NOUN
can-1682	301	19	onions	onion	NOUN
can-1682	301	20	.	.	PUNCT
can-1682	302	1	carbon	carbon	NOUN
can-1682	302	2	2015	2015	NUM
can-1682	302	3	;	;	PUNCT
can-1682	302	4	82(1	82(1	NUM
can-1682	302	5	):	):	PUNCT
can-1682	303	1	610	610	NUM
can-1682	303	2	.	.	PUNCT
can-1682	303	3	doi	doi	NOUN
can-1682	303	4	:	:	PUNCT
can-1682	303	5	10.1016	10.1016	NUM
can-1682	303	6	/	/	SYM
can-1682	303	7	j.carbon.2014.10.056	j.carbon.2014.10.056	PROPN
can-1682	303	8	.	.	PROPN
can-1682	304	1	38	38	NUM
can-1682	304	2	.	.	PUNCT
can-1682	305	1	zhang	zhang	PROPN
can-1682	305	2	c	c	PROPN
can-1682	305	3	,	,	PUNCT
can-1682	305	4	li	li	PROPN
can-1682	305	5	j	j	PROPN
can-1682	305	6	,	,	PUNCT
can-1682	305	7	shi	shi	PROPN
can-1682	305	8	c	c	PROPN
can-1682	305	9	,	,	PUNCT
can-1682	305	10	et	et	PROPN
can-1682	305	11	al	al	PROPN
can-1682	305	12	.	.	PUNCT
can-1682	306	1	the	the	DET
can-1682	306	2	efficient	efficient	ADJ
can-1682	306	3	synthesis	synthesis	NOUN
can-1682	306	4	of	of	ADP
can-1682	306	5	carbon	carbon	NOUN
can-1682	306	6	nano	nano	NOUN
can-1682	306	7	-	-	PUNCT
can-1682	306	8	onions	onion	NOUN
can-1682	306	9	using	use	VERB
can-1682	306	10	chemical	chemical	ADJ
can-1682	306	11	vapor	vapor	NOUN
can-1682	306	12	deposition	deposition	NOUN
can-1682	306	13	on	on	ADP
can-1682	306	14	an	an	DET
can-1682	306	15	unsupported	unsupported	ADJ
can-1682	306	16	ni	ni	ADJ
can-1682	306	17	-	-	PUNCT
can-1682	306	18	fe	fe	NOUN
can-1682	306	19	alloy	alloy	NOUN
can-1682	306	20	catalyst	catalyst	NOUN
can-1682	306	21	.	.	PUNCT
can-1682	307	1	carbon	carbon	NOUN
can-1682	307	2	2011	2011	NUM
can-1682	307	3	;	;	PUNCT
can-1682	307	4	49(4	49(4	NOUN
can-1682	307	5	):	):	PUNCT
can-1682	307	6	1151–1158	1151–1158	NUM
can-1682	307	7	.	.	PUNCT
can-1682	308	1	doi	doi	NOUN
can-1682	308	2	:	:	PUNCT
can-1682	308	3	10.1016	10.1016	NUM
can-1682	308	4	/	/	SYM
can-1682	308	5	j.carbon.2010.11.030	j.carbon.2010.11.030	PROPN
can-1682	308	6	.	.	PROPN
can-1682	308	7	39	39	NUM
can-1682	308	8	.	.	PUNCT
can-1682	309	1	chen	chen	PROPN
can-1682	309	2	x	x	PROPN
can-1682	309	3	,	,	PUNCT
can-1682	309	4	deng	deng	PROPN
can-1682	309	5	f	f	PROPN
can-1682	309	6	,	,	PUNCT
can-1682	309	7	wang	wang	PROPN
can-1682	309	8	j	j	PROPN
can-1682	309	9	,	,	PUNCT
can-1682	309	10	et	et	PROPN
can-1682	309	11	al	al	PROPN
can-1682	309	12	.	.	PUNCT
can-1682	310	1	new	new	ADJ
can-1682	310	2	method	method	NOUN
can-1682	310	3	of	of	ADP
can-1682	310	4	88	88	NUM
can-1682	310	5	carbon	carbon	NOUN
can-1682	310	6	onion	onion	NOUN
can-1682	310	7	growth	growth	NOUN
can-1682	310	8	by	by	ADP
can-1682	310	9	radio	radio	NOUN
can-1682	310	10	-	-	PUNCT
can-1682	310	11	frequency	frequency	NOUN
can-1682	310	12	plasma	plasma	NOUN
can-1682	310	13	-	-	PUNCT
can-1682	310	14	enhanced	enhance	VERB
can-1682	310	15	chemical	chemical	NOUN
can-1682	310	16	vapor	vapor	NOUN
can-1682	310	17	deposition	deposition	NOUN
can-1682	310	18	.	.	PUNCT
can-1682	311	1	chemical	chemical	ADJ
can-1682	311	2	physics	physics	PROPN
can-1682	311	3	letters	letter	NOUN
can-1682	311	4	2001	2001	NUM
can-1682	311	5	;	;	PUNCT
can-1682	311	6	336(3–4	336(3–4	NUM
can-1682	311	7	):	):	PUNCT
can-1682	311	8	201–204	201–204	NUM
can-1682	311	9	.	.	PUNCT
can-1682	312	1	doi	doi	NOUN
can-1682	312	2	:	:	PUNCT
can-1682	312	3	10.1016	10.1016	NUM
can-1682	312	4	/	/	SYM
can-1682	312	5	s0009	s0009	NOUN
can-1682	312	6	-	-	PUNCT
can-1682	312	7	2614(01)00085	2614(01)00085	NUM
can-1682	312	8	-	-	SYM
can-1682	312	9	9	9	NUM
can-1682	312	10	.	.	NUM
can-1682	312	11	40	40	NUM
can-1682	312	12	.	.	PUNCT
can-1682	312	13	dresselhaus	dresselhaus	PROPN
can-1682	312	14	ms	ms	PROPN
can-1682	312	15	,	,	PUNCT
can-1682	312	16	dresselhaus	dresselhaus	NOUN
can-1682	312	17	g	g	PROPN
can-1682	312	18	,	,	PUNCT
can-1682	312	19	eklund	eklund	PROPN
can-1682	312	20	pc	pc	PROPN
can-1682	312	21	,	,	PUNCT
can-1682	312	22	et	et	PROPN
can-1682	312	23	al	al	PROPN
can-1682	312	24	.	.	PUNCT
can-1682	312	25	carbon	carbon	NOUN
can-1682	312	26	nanotubes	nanotube	NOUN
can-1682	312	27	.	.	PUNCT
can-1682	313	1	in	in	ADP
can-1682	313	2	:	:	PUNCT
can-1682	313	3	andreoni	andreoni	PROPN
can-1682	313	4	w	w	PROPN
can-1682	313	5	(	(	PUNCT
can-1682	313	6	editor	editor	NOUN
can-1682	313	7	)	)	PUNCT
can-1682	313	8	.	.	PUNCT
can-1682	314	1	the	the	DET
can-1682	314	2	physics	physics	NOUN
can-1682	314	3	of	of	ADP
can-1682	314	4	fullerene	fullerene	NOUN
can-1682	314	5	-	-	PUNCT
can-1682	314	6	based	base	VERB
can-1682	314	7	and	and	CCONJ
can-1682	314	8	fullerene	fullerene	NOUN
can-1682	314	9	-	-	PUNCT
can-1682	314	10	related	relate	VERB
can-1682	314	11	materials	material	NOUN
can-1682	314	12	.	.	PUNCT
can-1682	315	1	dordrecht	dordrecht	NOUN
can-1682	315	2	:	:	PUNCT
can-1682	315	3	springer	springer	NOUN
can-1682	315	4	;	;	PUNCT
can-1682	315	5	2000	2000	NUM
can-1682	315	6	.	.	PUNCT
can-1682	316	1	p.	p.	NOUN
can-1682	316	2	331–379	331–379	NUM
can-1682	316	3	.	.	PUNCT
can-1682	317	1	doi	doi	NOUN
can-1682	317	2	:	:	PUNCT
can-1682	317	3	10.1007/978	10.1007/978	NUM
can-1682	317	4	-	-	SYM
can-1682	317	5	94	94	NUM
can-1682	317	6	-	-	PUNCT
can-1682	317	7	011	011	NUM
can-1682	317	8	-	-	PUNCT
can-1682	317	9	4038	4038	NUM
can-1682	317	10	-	-	PUNCT
can-1682	317	11	6_9	6_9	NUM
can-1682	317	12	.	.	PUNCT
can-1682	318	1	41	41	NUM
can-1682	318	2	.	.	PUNCT
can-1682	319	1	mckee	mckee	PROPN
can-1682	319	2	gs	gs	PROPN
can-1682	319	3	,	,	PUNCT
can-1682	319	4	deck	deck	PROPN
can-1682	319	5	cp	cp	PROPN
can-1682	319	6	,	,	PUNCT
can-1682	319	7	vecchio	vecchio	PROPN
can-1682	319	8	ks	ks	PROPN
can-1682	319	9	.	.	PUNCT
can-1682	319	10	dimensional	dimensional	ADJ
can-1682	319	11	control	control	NOUN
can-1682	319	12	of	of	ADP
can-1682	319	13	multi	multi	ADJ
can-1682	319	14	-	-	ADJ
can-1682	319	15	walled	walled	ADJ
can-1682	319	16	carbon	carbon	NOUN
can-1682	319	17	nanotubes	nanotube	NOUN
can-1682	319	18	in	in	ADP
can-1682	319	19	floating	float	VERB
can-1682	319	20	-	-	PUNCT
can-1682	319	21	catalyst	catalyst	NOUN
can-1682	319	22	cvd	cvd	PROPN
can-1682	319	23	synthesis	synthesis	NOUN
can-1682	319	24	.	.	PUNCT
can-1682	320	1	carbon	carbon	NOUN
can-1682	320	2	2009	2009	NUM
can-1682	320	3	;	;	PUNCT
can-1682	320	4	47(8	47(8	NOUN
can-1682	320	5	):	):	PUNCT
can-1682	320	6	2085–2094	2085–2094	NUM
can-1682	320	7	.	.	PUNCT
can-1682	321	1	doi	doi	NOUN
can-1682	321	2	:	:	PUNCT
can-1682	321	3	10.1016	10.1016	NUM
can-1682	321	4	/	/	SYM
can-1682	321	5	j.carbon.2009.03.060	j.carbon.2009.03.060	PROPN
can-1682	321	6	.	.	PUNCT
can-1682	322	1	42	42	NUM
can-1682	322	2	.	.	PUNCT
can-1682	323	1	yuan	yuan	PROPN
can-1682	323	2	d.	d.	PROPN
can-1682	323	3	property	property	PROPN
can-1682	323	4	control	control	NOUN
can-1682	323	5	of	of	ADP
can-1682	323	6	single	single	ADJ
can-1682	323	7	walled	walled	ADJ
can-1682	323	8	carbon	carbon	NOUN
can-1682	323	9	nanotubes	nanotube	NOUN
can-1682	323	10	and	and	CCONJ
can-1682	323	11	their	their	PRON
can-1682	323	12	devices	device	NOUN
can-1682	323	13	[	[	X
can-1682	323	14	phd	phd	NOUN
can-1682	323	15	thesis	thesis	NOUN
can-1682	323	16	]	]	X
can-1682	323	17	.	.	PUNCT
can-1682	324	1	durham	durham	PROPN
can-1682	324	2	(	(	PUNCT
can-1682	324	3	nc	nc	PROPN
can-1682	324	4	):	):	PUNCT
can-1682	324	5	duke	duke	PROPN
can-1682	324	6	university	university	PROPN
can-1682	324	7	;	;	PUNCT
can-1682	324	8	2008	2008	NUM
can-1682	324	9	.	.	PUNCT
can-1682	325	1	43	43	NUM
can-1682	325	2	.	.	PUNCT
can-1682	326	1	jacobberger	jacobberger	PROPN
can-1682	326	2	rm	rm	PROPN
can-1682	326	3	,	,	PUNCT
can-1682	326	4	machhi	machhi	PROPN
can-1682	326	5	r	r	NOUN
can-1682	326	6	,	,	PUNCT
can-1682	326	7	wroblewski	wroblewski	PROPN
can-1682	326	8	j	j	PROPN
can-1682	326	9	,	,	PUNCT
can-1682	326	10	et	et	PROPN
can-1682	326	11	al	al	PROPN
can-1682	326	12	.	.	PROPN
can-1682	326	13	simple	simple	ADJ
can-1682	326	14	graphene	graphene	ADJ
can-1682	326	15	synthesis	synthesis	NOUN
can-1682	326	16	via	via	ADP
can-1682	326	17	chemical	chemical	ADJ
can-1682	326	18	vapor	vapor	NOUN
can-1682	326	19	deposition	deposition	NOUN
can-1682	326	20	.	.	PUNCT
can-1682	327	1	journal	journal	NOUN
can-1682	327	2	of	of	ADP
can-1682	327	3	chemical	chemical	ADJ
can-1682	327	4	education	education	NOUN
can-1682	327	5	2015	2015	NUM
can-1682	327	6	;	;	PUNCT
can-1682	327	7	92(11	92(11	NUM
can-1682	327	8	):	):	PUNCT
can-1682	327	9	1903–1907	1903–1907	NUM
can-1682	327	10	.	.	PUNCT
can-1682	328	1	doi	doi	NOUN
can-1682	328	2	:	:	PUNCT
can-1682	328	3	10.1021	10.1021	NUM
can-1682	328	4	/	/	SYM
can-1682	328	5	acs.jchemed.5b00126	acs.jchemed.5b00126	NOUN
can-1682	328	6	.	.	PUNCT
can-1682	329	1	44	44	NUM
can-1682	329	2	.	.	PUNCT
can-1682	330	1	novoselov	novoselov	PROPN
can-1682	330	2	ks	ks	PROPN
can-1682	330	3	,	,	PUNCT
can-1682	330	4	fal’ko	fal’ko	NOUN
can-1682	330	5	vi	vi	PROPN
can-1682	330	6	,	,	PUNCT
can-1682	330	7	colombo	colombo	NOUN
can-1682	330	8	l	l	NOUN
can-1682	330	9	,	,	PUNCT
can-1682	330	10	et	et	PROPN
can-1682	330	11	al	al	PROPN
can-1682	330	12	.	.	PUNCT
can-1682	331	1	a	a	DET
can-1682	331	2	roadmap	roadmap	NOUN
can-1682	331	3	for	for	ADP
can-1682	331	4	graphene	graphene	NOUN
can-1682	331	5	.	.	PUNCT
can-1682	332	1	nature	nature	NOUN
can-1682	332	2	2012	2012	NUM
can-1682	332	3	;	;	PUNCT
can-1682	332	4	490(7419	490(7419	NUM
can-1682	332	5	):	):	PUNCT
can-1682	332	6	192–200	192–200	NUM
can-1682	332	7	.	.	PUNCT
can-1682	333	1	doi	doi	NOUN
can-1682	333	2	:	:	PUNCT
can-1682	333	3	10.1038	10.1038	NUM
can-1682	333	4	/	/	SYM
can-1682	333	5	nature11458	nature11458	PROPN
can-1682	333	6	.	.	PUNCT
can-1682	334	1	45	45	NUM
can-1682	334	2	.	.	PUNCT
can-1682	335	1	mouras	mouras	PROPN
can-1682	335	2	s	s	PROPN
can-1682	335	3	,	,	PUNCT
can-1682	335	4	hamwi	hamwi	NOUN
can-1682	335	5	a	a	NOUN
can-1682	335	6	,	,	PUNCT
can-1682	335	7	djurado	djurado	ADJ
can-1682	335	8	d	d	NOUN
can-1682	335	9	,	,	PUNCT
can-1682	335	10	et	et	PROPN
can-1682	335	11	al	al	PROPN
can-1682	335	12	.	.	PUNCT
can-1682	336	1	new	new	ADJ
can-1682	336	2	synthesis	synthesis	NOUN
can-1682	336	3	of	of	ADP
can-1682	336	4	first	first	ADJ
can-1682	336	5	stage	stage	NOUN
can-1682	336	6	graphite	graphite	NOUN
can-1682	336	7	intercalation	intercalation	NOUN
can-1682	336	8	compounds	compound	NOUN
can-1682	336	9	with	with	ADP
can-1682	336	10	fluorides	fluoride	NOUN
can-1682	336	11	.	.	PUNCT
can-1682	337	1	journal	journal	NOUN
can-1682	337	2	of	of	ADP
can-1682	337	3	fluorine	fluorine	NOUN
can-1682	337	4	chemistry	chemistry	NOUN
can-1682	337	5	1987	1987	NUM
can-1682	337	6	;	;	PUNCT
can-1682	338	1	35(1	35(1	NUM
can-1682	338	2	):	):	PUNCT
can-1682	338	3	151	151	NUM
can-1682	338	4	.	.	PUNCT
can-1682	339	1	doi	doi	NOUN
can-1682	339	2	:	:	PUNCT
can-1682	339	3	10.1016/0022	10.1016/0022	NUM
can-1682	339	4	-	-	SYM
can-1682	339	5	1139(87)95120	1139(87)95120	NUM
can-1682	339	6	-	-	SYM
can-1682	339	7	7	7	NUM
can-1682	339	8	.	.	NOUN
can-1682	339	9	46	46	NUM
can-1682	339	10	.	.	PUNCT
can-1682	340	1	soldano	soldano	PROPN
can-1682	340	2	c	c	PROPN
can-1682	340	3	,	,	PUNCT
can-1682	340	4	mahmood	mahmood	PROPN
can-1682	340	5	a	a	PRON
can-1682	340	6	,	,	PUNCT
can-1682	340	7	dujardin	dujardin	PROPN
can-1682	340	8	e.	e.	PROPN
can-1682	340	9	production	production	PROPN
can-1682	340	10	,	,	PUNCT
can-1682	340	11	properties	property	NOUN
can-1682	340	12	and	and	CCONJ
can-1682	340	13	potential	potential	NOUN
can-1682	340	14	of	of	ADP
can-1682	340	15	graphene	graphene	NOUN
can-1682	340	16	.	.	PUNCT
can-1682	341	1	carbon	carbon	NOUN
can-1682	341	2	2010	2010	NUM
can-1682	341	3	;	;	PUNCT
can-1682	341	4	48(8	48(8	NUM
can-1682	341	5	):	):	PUNCT
can-1682	341	6	2127–2150	2127–2150	NUM
can-1682	341	7	.	.	PUNCT
can-1682	342	1	doi	doi	NOUN
can-1682	342	2	:	:	PUNCT
can-1682	342	3	10.1016	10.1016	NUM
can-1682	342	4	/	/	SYM
can-1682	342	5	j.carbon.2010.01.058	j.carbon.2010.01.058	PROPN
can-1682	342	6	.	.	PUNCT
can-1682	343	1	47	47	NUM
can-1682	343	2	.	.	PUNCT
can-1682	344	1	o’brien	o’brien	PROPN
can-1682	344	2	p	p	NOUN
can-1682	344	3	,	,	PUNCT
can-1682	344	4	pickett	pickett	PROPN
can-1682	344	5	nl	nl	PROPN
can-1682	344	6	,	,	PUNCT
can-1682	344	7	otway	otway	PROPN
can-1682	344	8	dj	dj	PROPN
can-1682	344	9	.	.	PUNCT
can-1682	345	1	developments	development	NOUN
can-1682	345	2	in	in	ADP
can-1682	345	3	cvd	cvd	PROPN
can-1682	345	4	delivery	delivery	NOUN
can-1682	345	5	systems	system	NOUN
can-1682	345	6	:	:	PUNCT
can-1682	345	7	a	a	DET
can-1682	345	8	chemist	chemist	NOUN
can-1682	345	9	’s	’s	PART
can-1682	345	10	perspective	perspective	NOUN
can-1682	345	11	on	on	ADP
can-1682	345	12	the	the	DET
can-1682	345	13	chemical	chemical	ADJ
can-1682	345	14	and	and	CCONJ
can-1682	345	15	physical	physical	ADJ
can-1682	345	16	interactions	interaction	NOUN
can-1682	345	17	between	between	ADP
can-1682	345	18	precursors	precursor	NOUN
can-1682	345	19	.	.	PUNCT
can-1682	346	1	chemical	chemical	ADJ
can-1682	346	2	vapor	vapor	NOUN
can-1682	346	3	deposition	deposition	NOUN
can-1682	346	4	2002	2002	NUM
can-1682	346	5	;	;	PUNCT
can-1682	346	6	8(6	8(6	NUM
can-1682	346	7	):	):	PUNCT
can-1682	346	8	237–249	237–249	NUM
can-1682	346	9	.	.	PUNCT
can-1682	347	1	doi	doi	NOUN
can-1682	347	2	:	:	PUNCT
can-1682	347	3	10.1002/1521	10.1002/1521	NUM
can-1682	347	4	-	-	SYM
can-1682	347	5	3862(20021203)8:6<237::aid	3862(20021203)8:6<237::aid	NUM
can-1682	347	6	-	-	PUNCT
can-1682	347	7	cvd	cvd	NOUN
can-1682	347	8	e237>3.0.co;2	e237>3.0.co;2	NOUN
can-1682	347	9	-	-	PROPN
can-1682	347	10	o.	o.	ADJ
can-1682	347	11	48	48	NUM
can-1682	347	12	.	.	PUNCT
can-1682	348	1	ionescu	ionescu	PROPN
can-1682	348	2	mi	mi	PROPN
can-1682	348	3	,	,	PUNCT
can-1682	348	4	zhang	zhang	PROPN
can-1682	348	5	y	y	PROPN
can-1682	348	6	,	,	PUNCT
can-1682	348	7	li	li	PROPN
can-1682	348	8	r	r	PROPN
can-1682	348	9	,	,	PUNCT
can-1682	348	10	et	et	PROPN
can-1682	348	11	al	al	PROPN
can-1682	348	12	.	.	PUNCT
can-1682	348	13	hydrogen	hydrogen	NOUN
can-1682	348	14	-	-	PUNCT
can-1682	348	15	free	free	ADJ
can-1682	348	16	spray	spray	NOUN
can-1682	348	17	pyrolysis	pyrolysis	NOUN
can-1682	348	18	chemical	chemical	NOUN
can-1682	348	19	vapor	vapor	NOUN
can-1682	348	20	deposition	deposition	NOUN
can-1682	348	21	method	method	NOUN
can-1682	348	22	for	for	ADP
can-1682	348	23	the	the	DET
can-1682	348	24	carbon	carbon	NOUN
can-1682	348	25	nanotube	nanotube	NOUN
can-1682	348	26	growth	growth	NOUN
can-1682	348	27	:	:	PUNCT
can-1682	348	28	parametric	parametric	ADJ
can-1682	348	29	studies	study	NOUN
can-1682	348	30	.	.	PUNCT
can-1682	349	1	applied	apply	VERB
can-1682	349	2	surface	surface	NOUN
can-1682	349	3	science	science	NOUN
can-1682	349	4	2011	2011	NUM
can-1682	349	5	;	;	PUNCT
can-1682	349	6	257(15	257(15	NUM
can-1682	349	7	):	):	PUNCT
can-1682	349	8	6843–6849	6843–6849	NUM
can-1682	349	9	.	.	PUNCT
can-1682	350	1	doi	doi	NOUN
can-1682	350	2	:	:	PUNCT
can-1682	350	3	10.1016	10.1016	NUM
can-1682	350	4	/	/	SYM
can-1682	350	5	j.apsusc.2011.03.011	j.apsusc.2011.03.011	PROPN
can-1682	350	6	.	.	PUNCT
can-1682	351	1	49	49	NUM
can-1682	351	2	.	.	PUNCT
can-1682	352	1	hawkins	hawkins	PROPN
can-1682	352	2	mr	mr	PROPN
can-1682	352	3	,	,	PUNCT
can-1682	352	4	robinson	robinson	PROPN
can-1682	352	5	m	m	PROPN
can-1682	352	6	(	(	PUNCT
can-1682	352	7	inventors	inventor	NOUN
can-1682	352	8	)	)	PUNCT
can-1682	352	9	.	.	PUNCT
can-1682	353	1	epsilon	epsilon	PROPN
can-1682	353	2	technology	technology	PROPN
can-1682	353	3	,	,	PUNCT
can-1682	353	4	inc	inc	PROPN
can-1682	353	5	.	.	PROPN
can-1682	353	6	(	(	PUNCT
can-1682	353	7	assignee	assignee	NOUN
can-1682	353	8	)	)	PUNCT
can-1682	353	9	.	.	PUNCT
can-1682	354	1	gas	gas	NOUN
can-1682	354	2	injectors	injector	NOUN
can-1682	354	3	for	for	ADP
can-1682	354	4	reaction	reaction	NOUN
can-1682	354	5	chambers	chamber	NOUN
can-1682	354	6	in	in	ADP
can-1682	354	7	cvd	cvd	PROPN
can-1682	354	8	systems	system	NOUN
can-1682	354	9	.	.	PUNCT
can-1682	355	1	us	us	PROPN
can-1682	355	2	patent	patent	NOUN
can-1682	355	3	.	.	PUNCT
can-1682	356	1	5,221,556	5,221,556	NUM
can-1682	356	2	.	.	PUNCT
can-1682	356	3	1993	1993	NUM
can-1682	356	4	jun	jun	PROPN
can-1682	356	5	22	22	NUM
can-1682	356	6	.	.	X
can-1682	357	1	50	50	NUM
can-1682	357	2	.	.	PUNCT
can-1682	358	1	vahlas	vahlas	PROPN
can-1682	358	2	c	c	PROPN
can-1682	358	3	,	,	PUNCT
can-1682	358	4	caussat	caussat	VERB
can-1682	358	5	b	b	NUM
can-1682	358	6	,	,	PUNCT
can-1682	358	7	senocq	senocq	VERB
can-1682	358	8	f	f	NOUN
can-1682	358	9	,	,	PUNCT
can-1682	358	10	et	et	PROPN
can-1682	358	11	al	al	PROPN
can-1682	358	12	.	.	PUNCT
can-1682	359	1	a	a	DET
can-1682	359	2	delivery	delivery	NOUN
can-1682	359	3	system	system	NOUN
can-1682	359	4	for	for	ADP
can-1682	359	5	precursor	precursor	NOUN
can-1682	359	6	vapors	vapor	NOUN
can-1682	359	7	based	base	VERB
can-1682	359	8	on	on	ADP
can-1682	359	9	sublimation	sublimation	NOUN
can-1682	359	10	in	in	ADP
can-1682	359	11	a	a	DET
can-1682	359	12	fluidized	fluidize	VERB
can-1682	359	13	bed	bed	NOUN
can-1682	359	14	.	.	PUNCT
can-1682	360	1	chemical	chemical	ADJ
can-1682	360	2	vapor	vapor	NOUN
can-1682	360	3	deposition	deposition	NOUN
can-1682	360	4	2007	2007	NUM
can-1682	360	5	;	;	PUNCT
can-1682	360	6	13(2–3	13(2–3	NOUN
can-1682	360	7	):	):	PUNCT
can-1682	360	8	123–129	123–129	NUM
can-1682	360	9	.	.	PUNCT
can-1682	361	1	doi	doi	NOUN
can-1682	361	2	:	:	PUNCT
can-1682	361	3	10.1002/1521	10.1002/1521	NUM
can-1682	361	4	-	-	SYM
can-1682	361	5	3862(20021203)8:6<237::aid	3862(20021203)8:6<237::aid	NUM
can-1682	361	6	-	-	PUNCT
can-1682	361	7	cvd	cvd	NOUN
can-1682	361	8	e237>3.0.co;2	e237>3.0.co;2	NOUN
can-1682	361	9	-	-	PROPN
can-1682	361	10	o.	o.	ADJ
can-1682	361	11	51	51	NUM
can-1682	361	12	.	.	PUNCT
can-1682	362	1	maury	maury	PROPN
can-1682	362	2	f	f	PROPN
can-1682	362	3	,	,	PUNCT
can-1682	362	4	duminica	duminica	PROPN
can-1682	362	5	fd	fd	PROPN
can-1682	362	6	,	,	PUNCT
can-1682	362	7	senocq	senocq	VERB
can-1682	362	8	f.	f.	PROPN
can-1682	362	9	optimization	optimization	NOUN
can-1682	362	10	of	of	ADP
can-1682	362	11	the	the	DET
can-1682	362	12	vaporization	vaporization	NOUN
can-1682	362	13	of	of	ADP
can-1682	362	14	liquid	liquid	ADJ
can-1682	362	15	and	and	CCONJ
can-1682	362	16	solid	solid	ADJ
can-1682	362	17	cvd	cvd	PROPN
can-1682	362	18	precursors	precursor	NOUN
can-1682	362	19	:	:	PUNCT
can-1682	362	20	experimental	experimental	ADJ
can-1682	362	21	and	and	CCONJ
can-1682	362	22	modeling	modeling	NOUN
can-1682	362	23	approaches	approach	NOUN
can-1682	362	24	.	.	PUNCT
can-1682	363	1	chemical	chemical	ADJ
can-1682	363	2	vapor	vapor	NOUN
can-1682	363	3	deposition	deposition	NOUN
can-1682	363	4	2007	2007	NUM
can-1682	363	5	;	;	PUNCT
can-1682	363	6	13(11	13(11	NUM
can-1682	363	7	):	):	PUNCT
can-1682	363	8	638–643	638–643	NUM
can-1682	363	9	.	.	PUNCT
can-1682	364	1	doi	doi	NOUN
can-1682	364	2	:	:	PUNCT
can-1682	364	3	10.1002	10.1002	NUM
can-1682	364	4	/	/	SYM
can-1682	364	5	cvde.200706600	cvde.200706600	PROPN
can-1682	364	6	.	.	NOUN
can-1682	364	7	52	52	NUM
can-1682	364	8	.	.	PUNCT
can-1682	364	9	díaz	díaz	NOUN
can-1682	364	10	-	-	PUNCT
can-1682	364	11	chacóna	chacóna	PROPN
can-1682	364	12	lc	lc	PROPN
can-1682	364	13	,	,	PUNCT
can-1682	364	14	arévalo	arévalo	PROPN
can-1682	364	15	-	-	PUNCT
can-1682	364	16	festerb	festerb	PROPN
can-1682	364	17	je	je	PROPN
can-1682	364	18	,	,	PUNCT
can-1682	364	19	plaza	plaza	PROPN
can-1682	364	20	-	-	PUNCT
can-1682	364	21	pirelab	pirelab	NOUN
can-1682	364	22	ev	ev	PROPN
can-1682	364	23	,	,	PUNCT
can-1682	364	24	et	et	PROPN
can-1682	364	25	al	al	PROPN
can-1682	364	26	.	.	PUNCT
can-1682	364	27	characterization	characterization	NOUN
can-1682	364	28	by	by	ADP
can-1682	364	29	scanning	scan	VERB
can-1682	364	30	electron	electron	NOUN
can-1682	364	31	microscopy	microscopy	NOUN
can-1682	364	32	of	of	ADP
can-1682	364	33	carbon	carbon	NOUN
can-1682	364	34	micro	micro	PROPN
can-1682	364	35	and	and	CCONJ
can-1682	364	36	nanospheres	nanosphere	NOUN
can-1682	364	37	obtained	obtain	VERB
can-1682	364	38	from	from	ADP
can-1682	364	39	naphthalene	naphthalene	NOUN
can-1682	364	40	using	use	VERB
can-1682	364	41	the	the	DET
can-1682	364	42	chemical	chemical	ADJ
can-1682	364	43	vapor	vapor	NOUN
can-1682	364	44	deposition	deposition	NOUN
can-1682	364	45	technique	technique	NOUN
can-1682	364	46	(	(	PUNCT
can-1682	364	47	in	in	ADP
can-1682	364	48	spanish	spanish	NOUN
can-1682	364	49	)	)	PUNCT
can-1682	364	50	.	.	PUNCT
can-1682	365	1	acta	acta	PROPN
can-1682	365	2	microscópica	microscópica	PROPN
can-1682	365	3	2011	2011	NUM
can-1682	365	4	;	;	PUNCT
can-1682	366	1	20(1	20(1	NUM
can-1682	366	2	):	):	PUNCT
can-1682	366	3	54–59	54–59	NUM
can-1682	366	4	.	.	PUNCT
can-1682	366	5	available	available	ADJ
can-1682	366	6	from	from	ADP
can-1682	366	7	:	:	PUNCT
can-1682	366	8	https://www.acta-microscopica.org/acta/article/view	https://www.acta-microscopica.org/acta/article/view	PROPN
can-1682	366	9	/419/364	/419/364	PUNCT
can-1682	366	10	.	.	PUNCT
can-1682	367	1	53	53	NUM
can-1682	367	2	.	.	PUNCT
can-1682	368	1	li	li	PROPN
can-1682	368	2	m	m	PROPN
can-1682	368	3	,	,	PUNCT
can-1682	368	4	wang	wang	PROPN
can-1682	368	5	c	c	AUX
can-1682	368	6	,	,	PUNCT
can-1682	368	7	o’connell	o’connell	PROPN
can-1682	368	8	mj	mj	PROPN
can-1682	368	9	,	,	PUNCT
can-1682	368	10	et	et	PROPN
can-1682	368	11	al	al	PROPN
can-1682	368	12	.	.	PUNCT
can-1682	369	1	carbon	carbon	PROPN
can-1682	369	2	nanosphere	nanosphere	ADV
can-1682	369	3	adsorbents	adsorbent	NOUN
can-1682	369	4	for	for	ADP
can-1682	369	5	removal	removal	NOUN
can-1682	369	6	of	of	ADP
can-1682	369	7	arsenate	arsenate	NOUN
can-1682	369	8	and	and	CCONJ
can-1682	369	9	selenate	selenate	NOUN
can-1682	369	10	from	from	ADP
can-1682	369	11	water	water	NOUN
can-1682	369	12	.	.	PUNCT
can-1682	370	1	environmental	environmental	ADJ
can-1682	370	2	science	science	NOUN
can-1682	370	3	:	:	PUNCT
can-1682	370	4	nano	nano	NOUN
can-1682	370	5	2015	2015	NUM
can-1682	370	6	;	;	PUNCT
can-1682	370	7	2(3	2(3	NUM
can-1682	370	8	):	):	PUNCT
can-1682	370	9	245–250	245–250	NUM
can-1682	370	10	.	.	PUNCT
can-1682	371	1	doi	doi	NOUN
can-1682	371	2	:	:	PUNCT
can-1682	371	3	10.1039	10.1039	NUM
can-1682	371	4	/	/	SYM
can-1682	371	5	c4en00204k	c4en00204k	PROPN
can-1682	371	6	.	.	PUNCT
can-1682	372	1	54	54	NUM
can-1682	372	2	.	.	PUNCT
can-1682	373	1	nieto	nieto	PROPN
can-1682	373	2	-	-	PUNCT
can-1682	373	3	márquez	márquez	PROPN
can-1682	373	4	a	a	X
can-1682	373	5	,	,	PUNCT
can-1682	373	6	romero	romero	PROPN
can-1682	373	7	r	r	PROPN
can-1682	373	8	,	,	PUNCT
can-1682	373	9	romero	romero	PROPN
can-1682	373	10	a	a	PROPN
can-1682	373	11	,	,	PUNCT
can-1682	373	12	et	et	PROPN
can-1682	373	13	al	al	PROPN
can-1682	373	14	.	.	PROPN
can-1682	373	15	carbon	carbon	NOUN
can-1682	373	16	nanospheres	nanosphere	NOUN
can-1682	373	17	:	:	PUNCT
can-1682	373	18	synthesis	synthesis	NOUN
can-1682	373	19	,	,	PUNCT
can-1682	373	20	physicochemical	physicochemical	ADJ
can-1682	373	21	properties	property	NOUN
can-1682	373	22	and	and	CCONJ
can-1682	373	23	applications	application	NOUN
can-1682	373	24	.	.	PUNCT
can-1682	374	1	journal	journal	NOUN
can-1682	374	2	of	of	ADP
can-1682	374	3	materials	material	NOUN
can-1682	374	4	chemistry	chemistry	NOUN
can-1682	374	5	2011	2011	NUM
can-1682	374	6	;	;	PUNCT
can-1682	374	7	21(6	21(6	NUM
can-1682	374	8	):	):	PUNCT
can-1682	374	9	1664–1672	1664–1672	NUM
can-1682	374	10	.	.	PUNCT
can-1682	375	1	doi	doi	NOUN
can-1682	375	2	:	:	PUNCT
can-1682	375	3	10.1039	10.1039	NUM
can-1682	375	4	/	/	SYM
can-1682	375	5	c0jm01350a	c0jm01350a	PROPN
can-1682	375	6	.	.	PROPN
can-1682	375	7	55	55	NUM
can-1682	375	8	.	.	PUNCT
can-1682	376	1	ruan	ruan	PROPN
can-1682	376	2	s	s	PROPN
can-1682	376	3	,	,	PUNCT
can-1682	376	4	zhu	zhu	PROPN
can-1682	376	5	b	b	PROPN
can-1682	376	6	,	,	PUNCT
can-1682	376	7	zhang	zhang	PROPN
can-1682	376	8	h	h	PROPN
can-1682	376	9	,	,	PUNCT
can-1682	376	10	et	et	PROPN
can-1682	376	11	al	al	PROPN
can-1682	376	12	.	.	PUNCT
can-1682	377	1	a	a	DET
can-1682	377	2	simple	simple	ADJ
can-1682	377	3	one	one	NUM
can-1682	377	4	-	-	PUNCT
can-1682	377	5	step	step	NOUN
can-1682	377	6	method	method	NOUN
can-1682	377	7	for	for	ADP
can-1682	377	8	preparation	preparation	NOUN
can-1682	377	9	of	of	ADP
can-1682	377	10	fluorescent	fluorescent	ADJ
can-1682	377	11	carbon	carbon	NOUN
can-1682	377	12	nanospheres	nanosphere	NOUN
can-1682	377	13	and	and	CCONJ
can-1682	377	14	the	the	DET
can-1682	377	15	potential	potential	ADJ
can-1682	377	16	application	application	NOUN
can-1682	377	17	in	in	ADP
can-1682	377	18	cell	cell	NOUN
can-1682	377	19	organelles	organelle	NOUN
can-1682	377	20	imaging	imaging	NOUN
can-1682	377	21	.	.	PUNCT
can-1682	378	1	journal	journal	PROPN
can-1682	378	2	of	of	ADP
can-1682	378	3	colloid	colloid	NOUN
can-1682	378	4	and	and	CCONJ
can-1682	378	5	interface	interface	NOUN
can-1682	378	6	science	science	NOUN
can-1682	378	7	2014	2014	NUM
can-1682	378	8	;	;	PUNCT
can-1682	378	9	422(1	422(1	NUM
can-1682	378	10	):	):	PUNCT
can-1682	378	11	25–29	25–29	NOUN
can-1682	378	12	.	.	PUNCT
can-1682	379	1	doi	doi	NOUN
can-1682	379	2	:	:	PUNCT
can-1682	379	3	10.1016	10.1016	NUM
can-1682	379	4	/	/	SYM
can-1682	379	5	j.jcis.2014.02.006	j.jcis.2014.02.006	PROPN
can-1682	379	6	.	.	PUNCT
can-1682	380	1	56	56	NUM
can-1682	380	2	.	.	PUNCT
can-1682	381	1	wang	wang	PROPN
can-1682	381	2	j	j	PROPN
can-1682	381	3	,	,	PUNCT
can-1682	381	4	hu	hu	PROPN
can-1682	382	1	z	z	PROPN
can-1682	382	2	,	,	PUNCT
can-1682	382	3	xu	xu	PROPN
can-1682	382	4	j	j	PROPN
can-1682	382	5	,	,	PUNCT
can-1682	382	6	et	et	PROPN
can-1682	382	7	al	al	PROPN
can-1682	382	8	.	.	PUNCT
can-1682	383	1	therapeutic	therapeutic	ADJ
can-1682	383	2	applications	application	NOUN
can-1682	383	3	of	of	ADP
can-1682	383	4	low	low	ADJ
can-1682	383	5	-	-	PUNCT
can-1682	383	6	toxicity	toxicity	NOUN
can-1682	383	7	spherical	spherical	ADJ
can-1682	383	8	nanocarbon	nanocarbon	NOUN
can-1682	383	9	materials	material	NOUN
can-1682	383	10	.	.	PUNCT
can-1682	384	1	npg	npg	PROPN
can-1682	384	2	asia	asia	PROPN
can-1682	384	3	materials	material	NOUN
can-1682	384	4	2014	2014	NUM
can-1682	384	5	;	;	PUNCT
can-1682	384	6	6(2	6(2	NUM
can-1682	384	7	):	):	PUNCT
can-1682	384	8	1–11	1–11	PROPN
can-1682	384	9	.	.	PUNCT
can-1682	385	1	doi	doi	NOUN
can-1682	385	2	:	:	PUNCT
can-1682	385	3	10.1038	10.1038	NUM
can-1682	385	4	/	/	SYM
can-1682	385	5	am.2013.79	am.2013.79	NOUN
can-1682	385	6	.	.	PUNCT
can-1682	386	1	57	57	NUM
can-1682	386	2	.	.	X
can-1682	387	1	campos	campos	PROPN
can-1682	387	2	-	-	PUNCT
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can-1682	387	5	,	,	PUNCT
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can-1682	387	7	h	h	PROPN
can-1682	387	8	,	,	PUNCT
can-1682	387	9	kim	kim	PROPN
can-1682	387	10	ya	ya	PROPN
can-1682	387	11	,	,	PUNCT
can-1682	387	12	et	et	PROPN
can-1682	387	13	al	al	PROPN
can-1682	387	14	.	.	PROPN
can-1682	388	1	resonant	resonant	PROPN
can-1682	388	2	raman	raman	NOUN
can-1682	388	3	study	study	NOUN
can-1682	388	4	on	on	ADP
can-1682	388	5	bulk	bulk	ADJ
can-1682	388	6	and	and	CCONJ
can-1682	388	7	isolated	isolated	ADJ
can-1682	388	8	graphitic	graphitic	ADJ
can-1682	388	9	nanoribbons	nanoribbon	NOUN
can-1682	388	10	.	.	PUNCT
can-1682	389	1	small	small	ADJ
can-1682	389	2	2009	2009	NUM
can-1682	389	3	;	;	PUNCT
can-1682	389	4	5(23	5(23	NUM
can-1682	389	5	):	):	PUNCT
can-1682	389	6	2698–2702	2698–2702	NUM
can-1682	390	1	.	.	PUNCT
can-1682	390	2	doi	doi	NOUN
can-1682	390	3	:	:	PUNCT
can-1682	390	4	10.1002	10.1002	NUM
can-1682	390	5	/	/	SYM
can-1682	390	6	smll.200901059	smll.200901059	PROPN
can-1682	390	7	.	.	NOUN
can-1682	390	8	58	58	NUM
can-1682	390	9	.	.	PUNCT
can-1682	391	1	muangrat	muangrat	PROPN
can-1682	391	2	w	w	PROPN
can-1682	391	3	,	,	PUNCT
can-1682	391	4	wongwiriyapan	wongwiriyapan	ADP
can-1682	391	5	w	w	PROPN
can-1682	391	6	,	,	PUNCT
can-1682	391	7	morimoto	morimoto	PROPN
can-1682	391	8	s	s	PROPN
can-1682	391	9	,	,	PUNCT
can-1682	391	10	et	et	PROPN
can-1682	391	11	al	al	PROPN
can-1682	391	12	.	.	PROPN
can-1682	391	13	graphene	graphene	PROPN
can-1682	391	14	nanosheet	nanosheet	NOUN
can-1682	391	15	-	-	PUNCT
can-1682	391	16	grafted	graft	VERB
can-1682	391	17	double	double	ADJ
can-1682	391	18	-	-	PUNCT
can-1682	391	19	walled	wall	VERB
can-1682	391	20	carbon	carbon	NOUN
can-1682	391	21	nanotube	nanotube	NOUN
can-1682	391	22	hybrid	hybrid	ADJ
can-1682	391	23	nanostructures	nanostructure	NOUN
can-1682	391	24	by	by	ADP
can-1682	391	25	two	two	NUM
can-1682	391	26	-	-	PUNCT
can-1682	391	27	step	step	NOUN
can-1682	391	28	chemical	chemical	NOUN
can-1682	391	29	vapor	vapor	NOUN
can-1682	391	30	deposition	deposition	NOUN
can-1682	391	31	and	and	CCONJ
can-1682	391	32	their	their	PRON
can-1682	391	33	application	application	NOUN
can-1682	391	34	for	for	ADP
can-1682	391	35	ethanol	ethanol	NOUN
can-1682	391	36	detection	detection	NOUN
can-1682	391	37	.	.	PUNCT
can-1682	392	1	scientific	scientific	ADJ
can-1682	392	2	reports	report	NOUN
can-1682	392	3	2019	2019	NUM
can-1682	392	4	;	;	PUNCT
can-1682	392	5	9(1	9(1	NUM
can-1682	392	6	):	):	PUNCT
can-1682	392	7	1–9	1–9	NOUN
can-1682	392	8	.	.	PUNCT
can-1682	392	9	doi	doi	NOUN
can-1682	392	10	:	:	PUNCT
can-1682	392	11	10.1038	10.1038	NUM
can-1682	392	12	/	/	SYM
can-1682	392	13	s41598	s41598	NOUN
can-1682	392	14	-	-	PUNCT
can-1682	392	15	019	019	NUM
can-1682	392	16	-	-	PUNCT
can-1682	392	17	44315	44315	NUM
can-1682	392	18	-	-	PUNCT
can-1682	392	19	y.	y.	NOUN
can-1682	392	20	59	59	NUM
can-1682	392	21	.	.	PUNCT
can-1682	393	1	chuang	chuang	PROPN
can-1682	393	2	at	at	ADP
can-1682	393	3	,	,	PUNCT
can-1682	393	4	boskovic	boskovic	PROPN
can-1682	393	5	bo	bo	PROPN
can-1682	393	6	,	,	PUNCT
can-1682	393	7	robertson	robertson	PROPN
can-1682	393	8	j.	j.	PROPN
can-1682	393	9	freestanding	freestande	VERB
can-1682	393	10	carbon	carbon	NOUN
can-1682	393	11	nanowalls	nanowall	NOUN
can-1682	393	12	by	by	ADP
can-1682	393	13	microwave	microwave	NOUN
can-1682	393	14	plasma	plasma	NOUN
can-1682	393	15	-	-	PUNCT
can-1682	393	16	enhanced	enhance	VERB
can-1682	393	17	chemical	chemical	NOUN
can-1682	393	18	vapor	vapor	NOUN
can-1682	393	19	deposition	deposition	NOUN
can-1682	393	20	.	.	PUNCT
can-1682	394	1	diamond	diamond	NOUN
can-1682	394	2	and	and	CCONJ
can-1682	394	3	related	related	ADJ
can-1682	394	4	materials	material	NOUN
can-1682	394	5	2006	2006	NUM
can-1682	394	6	;	;	PUNCT
can-1682	394	7	15(4–8	15(4–8	NUM
can-1682	394	8	):	):	PUNCT
can-1682	394	9	1103–1106	1103–1106	NOUN
can-1682	394	10	.	.	PUNCT
can-1682	395	1	doi	doi	NOUN
can-1682	395	2	:	:	PUNCT
can-1682	395	3	10.1016	10.1016	NUM
can-1682	395	4	/	/	SYM
can-1682	395	5	j.diamond.2005.11.004	j.diamond.2005.11.004	PROPN
can-1682	395	6	.	.	PUNCT
can-1682	396	1	60	60	NUM
can-1682	396	2	.	.	PUNCT
can-1682	397	1	hiraki	hiraki	PROPN
can-1682	397	2	h	h	PROPN
can-1682	397	3	,	,	PUNCT
can-1682	397	4	jiang	jiang	PROPN
can-1682	397	5	n	n	PROPN
can-1682	397	6	,	,	PUNCT
can-1682	397	7	wang	wang	PROPN
can-1682	397	8	h	h	PROPN
can-1682	397	9	,	,	PUNCT
can-1682	397	10	et	et	PROPN
can-1682	397	11	al	al	PROPN
can-1682	397	12	.	.	PROPN
can-1682	397	13	electron	electron	PROPN
can-1682	397	14	emission	emission	NOUN
can-1682	397	15	from	from	ADP
can-1682	397	16	nano	nano	NOUN
can-1682	397	17	-	-	PUNCT
can-1682	397	18	structured	structure	VERB
can-1682	397	19	carbon	carbon	NOUN
can-1682	397	20	composite	composite	ADJ
can-1682	397	21	materials	material	NOUN
can-1682	397	22	—	—	PUNCT
can-1682	397	23	an	an	DET
can-1682	397	24	important	important	ADJ
can-1682	397	25	role	role	NOUN
can-1682	397	26	of	of	ADP
can-1682	397	27	the	the	DET
can-1682	397	28	interface	interface	NOUN
can-1682	397	29	for	for	ADP
can-1682	397	30	enhancing	enhance	VERB
can-1682	397	31	the	the	DET
can-1682	397	32	emission	emission	NOUN
can-1682	397	33	.	.	PUNCT
can-1682	398	1	journal	journal	PROPN
can-1682	398	2	de	de	X
can-1682	398	3	physique	physique	PROPN
can-1682	398	4	iv	iv	NUM
can-1682	398	5	(	(	PUNCT
can-1682	398	6	proceedings	proceeding	NOUN
can-1682	398	7	)	)	PUNCT
can-1682	398	8	2006	2006	NUM
can-1682	398	9	;	;	PUNCT
can-1682	398	10	132(1	132(1	NUM
can-1682	398	11	):	):	PUNCT
can-1682	398	12	111–115	111–115	NUM
can-1682	398	13	.	.	PUNCT
can-1682	399	1	doi	doi	NOUN
can-1682	399	2	:	:	PUNCT
can-1682	399	3	10.1051	10.1051	NUM
can-1682	399	4	/	/	SYM
can-1682	399	5	jp4:2006132022	jp4:2006132022	PROPN
can-1682	399	6	.	.	PUNCT
can-1682	400	1	61	61	NUM
can-1682	400	2	.	.	PUNCT
can-1682	401	1	fan	fan	PROPN
can-1682	401	2	l	l	PROPN
can-1682	401	3	,	,	PUNCT
can-1682	401	4	zhu	zhu	PROPN
can-1682	401	5	m	m	PROPN
can-1682	401	6	,	,	PUNCT
can-1682	401	7	lee	lee	PROPN
can-1682	401	8	x	x	PROPN
can-1682	401	9	,	,	PUNCT
can-1682	401	10	et	et	PROPN
can-1682	401	11	al	al	PROPN
can-1682	401	12	.	.	PUNCT
can-1682	402	1	direct	direct	ADJ
can-1682	402	2	synthesis	synthesis	NOUN
can-1682	402	3	of	of	ADP
can-1682	402	4	graphene	graphene	ADJ
can-1682	402	5	quantum	quantum	NOUN
can-1682	402	6	dots	dot	NOUN
can-1682	402	7	by	by	ADP
can-1682	402	8	chemical	chemical	ADJ
can-1682	402	9	vapor	vapor	NOUN
can-1682	402	10	deposition	deposition	NOUN
can-1682	402	11	.	.	PUNCT
can-1682	403	1	particle	particle	NOUN
can-1682	403	2	and	and	CCONJ
can-1682	403	3	particle	particle	NOUN
can-1682	403	4	systems	system	NOUN
can-1682	403	5	characterization	characterization	NOUN
can-1682	403	6	2013	2013	NUM
can-1682	403	7	;	;	PUNCT
can-1682	403	8	30(9	30(9	NUM
can-1682	403	9	):	):	PUNCT
can-1682	403	10	764–769	764–769	NUM
can-1682	403	11	.	.	PUNCT
can-1682	404	1	doi	doi	NOUN
can-1682	404	2	:	:	PUNCT
can-1682	404	3	10.1002	10.1002	NUM
can-1682	404	4	/	/	SYM
can-1682	404	5	ppsc.201300125	ppsc.201300125	PROPN
can-1682	404	6	.	.	PROPN
can-1682	404	7	62	62	NUM
can-1682	404	8	.	.	PUNCT
can-1682	405	1	zhang	zhang	PROPN
can-1682	405	2	zp	zp	PROPN
can-1682	405	3	,	,	PUNCT
can-1682	405	4	zhang	zhang	PROPN
can-1682	405	5	j	j	PROPN
can-1682	405	6	,	,	PUNCT
can-1682	405	7	chen	chen	PROPN
can-1682	405	8	n	n	CCONJ
can-1682	405	9	,	,	PUNCT
can-1682	405	10	et	et	PROPN
can-1682	405	11	al	al	PROPN
can-1682	405	12	.	.	PROPN
can-1682	405	13	tailored	tailor	VERB
can-1682	405	14	graphene	graphene	NOUN
can-1682	405	15	systems	system	NOUN
can-1682	405	16	for	for	ADP
can-1682	405	17	unconventional	unconventional	ADJ
can-1682	405	18	applications	application	NOUN
can-1682	405	19	in	in	ADP
can-1682	405	20	energy	energy	NOUN
can-1682	405	21	conversion	conversion	NOUN
can-1682	405	22	and	and	CCONJ
can-1682	405	23	storage	storage	NOUN
can-1682	405	24	devices	device	NOUN
can-1682	405	25	.	.	PUNCT
can-1682	406	1	energy	energy	NOUN
can-1682	406	2	and	and	CCONJ
can-1682	406	3	environmental	environmental	ADJ
can-1682	406	4	science	science	NOUN
can-1682	406	5	2012	2012	NUM
can-1682	406	6	;	;	PUNCT
can-1682	406	7	8(1	8(1	NOUN
can-1682	406	8	):	):	PUNCT
can-1682	406	9	31–54	31–54	NUM
can-1682	406	10	.	.	PUNCT
can-1682	407	1	doi	doi	NOUN
can-1682	407	2	:	:	PUNCT
can-1682	407	3	10.1039	10.1039	NUM
can-1682	407	4	/	/	SYM
can-1682	407	5	c4ee02594f	c4ee02594f	PROPN
can-1682	407	6	.	.	PUNCT