id	sid	tid	token	lemma	pos
can-495	1	1	characterization	characterization	NOUN
can-495	1	2	and	and	CCONJ
can-495	1	3	application	application	NOUN
can-495	1	4	of	of	ADP
can-495	1	5	nanomaterials	nanomaterial	NOUN
can-495	1	6	(	(	PUNCT
can-495	1	7	2018	2018	NUM
can-495	1	8	)	)	PUNCT
can-495	1	9	volume	volume	NOUN
can-495	1	10	1	1	NUM
can-495	1	11	doi:10.24294	doi:10.24294	NOUN
can-495	1	12	/	/	SYM
can-495	1	13	can.v1i2.495	can.v1i2.495	ADJ
can-495	1	14	1	1	NUM
can-495	1	15	nanotransformations	nanotransformation	NOUN
can-495	1	16	in	in	ADP
can-495	1	17	the	the	DET
can-495	1	18	blanket	blanket	NOUN
can-495	1	19	of	of	ADP
can-495	1	20	materials	material	NOUN
can-495	1	21	at	at	ADP
can-495	1	22	the	the	DET
can-495	1	23	combined	combined	ADJ
can-495	1	24	processing	processing	NOUN
can-495	1	25	by	by	ADP
can-495	1	26	untied	untied	ADJ
can-495	1	27	granules	granule	NOUN
can-495	1	28	v.	v.	ADP
can-495	1	29	p.	p.	NOUN
can-495	1	30	smolentsev1	smolentsev1	PROPN
can-495	1	31	,	,	PUNCT
can-495	1	32	a.	a.	PROPN
can-495	2	1	v.	v.	PROPN
can-495	2	2	kuzovkin2	kuzovkin2	PROPN
can-495	2	3	1	1	NUM
can-495	2	4	voronezh	voronezh	PROPN
can-495	2	5	state	state	PROPN
can-495	2	6	technical	technical	PROPN
can-495	2	7	university	university	NOUN
can-495	2	8	,	,	PUNCT
can-495	2	9	14	14	NUM
can-495	2	10	,	,	PUNCT
can-495	2	11	moskovsky	moskovsky	NOUN
can-495	2	12	avenue	avenue	PROPN
can-495	2	13	,	,	PUNCT
can-495	2	14	voronezh	voronezh	NOUN
can-495	2	15	,	,	PUNCT
can-495	2	16	394026	394026	NUM
can-495	2	17	,	,	PUNCT
can-495	2	18	russia	russia	PROPN
can-495	2	19	e	e	NOUN
can-495	2	20	-	-	NOUN
can-495	2	21	mail	mail	NOUN
can-495	2	22	:	:	PUNCT
can-495	2	23	vsmolen@inbox.ru	vsmolen@inbox.ru	PROPN
can-495	2	24	abstract	abstract	ADJ
can-495	2	25	summary	summary	NOUN
can-495	2	26	:	:	PUNCT
can-495	3	1	nanotransformations	nanotransformation	NOUN
can-495	3	2	of	of	ADP
can-495	3	3	a	a	DET
can-495	3	4	blanket	blanket	NOUN
can-495	3	5	at	at	ADP
can-495	3	6	the	the	DET
can-495	3	7	fair	fair	ADJ
can-495	3	8	dimensional	dimensional	ADJ
can-495	3	9	combined	combined	ADJ
can-495	3	10	processing	processing	NOUN
can-495	3	11	with	with	ADP
can-495	3	12	imposing	impose	VERB
can-495	3	13	of	of	ADP
can-495	3	14	electric	electric	ADJ
can-495	3	15	field	field	NOUN
can-495	3	16	the	the	DET
can-495	3	17	tool	tool	NOUN
can-495	3	18	in	in	ADP
can-495	3	19	the	the	DET
can-495	3	20	form	form	NOUN
can-495	3	21	of	of	ADP
can-495	3	22	untied	untied	ADJ
can-495	3	23	metal	metal	NOUN
can-495	3	24	granules	granule	NOUN
can-495	3	25	are	be	AUX
can-495	3	26	considered	consider	VERB
can-495	3	27	.	.	PUNCT
can-495	4	1	an	an	DET
can-495	4	2	object	object	NOUN
can-495	4	3	of	of	ADP
can-495	4	4	researches	research	NOUN
can-495	4	5	are	be	AUX
can-495	4	6	the	the	DET
can-495	4	7	figurine	figurine	ADJ
can-495	4	8	details	detail	NOUN
can-495	4	9	applied	apply	VERB
can-495	4	10	in	in	ADP
can-495	4	11	aviation	aviation	NOUN
can-495	4	12	,	,	PUNCT
can-495	4	13	the	the	DET
can-495	4	14	missile	missile	NOUN
can-495	4	15	and	and	CCONJ
can-495	4	16	space	space	NOUN
can-495	4	17	equipment	equipment	NOUN
can-495	4	18	and	and	CCONJ
can-495	4	19	in	in	ADP
can-495	4	20	the	the	DET
can-495	4	21	oil	oil	NOUN
can-495	4	22	and	and	CCONJ
can-495	4	23	gas	gas	NOUN
can-495	4	24	industry	industry	NOUN
can-495	4	25	:	:	PUNCT
can-495	4	26	driving	drive	VERB
can-495	4	27	wheels	wheel	NOUN
can-495	4	28	and	and	CCONJ
can-495	4	29	a	a	DET
can-495	4	30	flowing	flow	VERB
can-495	4	31	part	part	NOUN
can-495	4	32	of	of	ADP
can-495	4	33	cases	case	NOUN
can-495	4	34	of	of	ADP
can-495	4	35	turbo	turbo	NOUN
can-495	4	36	-	-	PUNCT
can-495	4	37	pump	pump	NOUN
can-495	4	38	units	unit	NOUN
can-495	4	39	,	,	PUNCT
can-495	4	40	screws	screw	NOUN
can-495	4	41	,	,	PUNCT
can-495	4	42	krylchatka	krylchatka	NOUN
can-495	4	43	where	where	SCONJ
can-495	4	44	there	there	PRON
can-495	4	45	are	be	VERB
can-495	4	46	sites	site	NOUN
can-495	4	47	of	of	ADP
can-495	4	48	variable	variable	ADJ
can-495	4	49	curvature	curvature	NOUN
can-495	4	50	with	with	ADP
can-495	4	51	limited	limited	ADJ
can-495	4	52	access	access	NOUN
can-495	4	53	of	of	ADP
can-495	4	54	the	the	DET
can-495	4	55	tool	tool	NOUN
can-495	4	56	in	in	ADP
can-495	4	57	a	a	DET
can-495	4	58	processing	processing	NOUN
can-495	4	59	zone	zone	NOUN
can-495	4	60	.	.	PUNCT
can-495	5	1	it	it	PRON
can-495	5	2	is	be	AUX
can-495	5	3	shown	show	VERB
can-495	5	4	that	that	SCONJ
can-495	5	5	the	the	DET
can-495	5	6	combination	combination	NOUN
can-495	5	7	in	in	ADP
can-495	5	8	the	the	DET
can-495	5	9	combined	combine	VERB
can-495	5	10	process	process	NOUN
can-495	5	11	of	of	ADP
can-495	5	12	two	two	NUM
can-495	5	13	-	-	PUNCT
can-495	5	14	component	component	NOUN
can-495	5	15	technological	technological	ADJ
can-495	5	16	environments	environment	NOUN
can-495	5	17	of	of	ADP
can-495	5	18	current	current	ADJ
can-495	5	19	carrying	carrying	NOUN
can-495	5	20	granules	granule	NOUN
can-495	5	21	and	and	CCONJ
can-495	5	22	the	the	DET
can-495	5	23	electroconductive	electroconductive	ADJ
can-495	5	24	liquid	liquid	ADJ
can-495	5	25	environment	environment	NOUN
can-495	5	26	given	give	VERB
can-495	5	27	with	with	ADP
can-495	5	28	a	a	DET
can-495	5	29	high	high	ADJ
can-495	5	30	speed	speed	NOUN
can-495	5	31	to	to	ADP
can-495	5	32	a	a	DET
can-495	5	33	processing	processing	NOUN
can-495	5	34	zone	zone	NOUN
can-495	5	35	allows	allow	VERB
can-495	5	36	to	to	PART
can-495	5	37	receive	receive	VERB
can-495	5	38	the	the	DET
can-495	5	39	required	require	VERB
can-495	5	40	quality	quality	NOUN
can-495	5	41	of	of	ADP
can-495	5	42	a	a	DET
can-495	5	43	blanket	blanket	NOUN
can-495	5	44	;	;	PUNCT
can-495	5	45	action	action	NOUN
can-495	5	46	of	of	ADP
can-495	5	47	electric	electric	ADJ
can-495	5	48	field	field	NOUN
can-495	5	49	from	from	ADP
can-495	5	50	a	a	DET
can-495	5	51	source	source	NOUN
can-495	5	52	with	with	ADP
can-495	5	53	the	the	DET
can-495	5	54	increased	increase	VERB
can-495	5	55	tension	tension	NOUN
can-495	5	56	allows	allow	VERB
can-495	5	57	to	to	PART
can-495	5	58	create	create	VERB
can-495	5	59	at	at	ADP
can-495	5	60	fair	fair	ADJ
can-495	5	61	dimensional	dimensional	ADJ
can-495	5	62	processing	processing	NOUN
can-495	5	63	the	the	DET
can-495	5	64	required	require	VERB
can-495	5	65	peening	peening	NOUN
can-495	5	66	from	from	ADP
can-495	5	67	blows	blow	NOUN
can-495	5	68	of	of	ADP
can-495	5	69	firm	firm	ADJ
can-495	5	70	granules	granule	NOUN
can-495	5	71	.	.	PUNCT
can-495	6	1	it	it	PRON
can-495	6	2	gives	give	VERB
can-495	6	3	the	the	DET
can-495	6	4	chance	chance	NOUN
can-495	6	5	to	to	PART
can-495	6	6	raise	raise	VERB
can-495	6	7	a	a	DET
can-495	6	8	resource	resource	NOUN
can-495	6	9	and	and	CCONJ
can-495	6	10	durability	durability	NOUN
can-495	6	11	of	of	ADP
can-495	6	12	responsible	responsible	ADJ
can-495	6	13	knots	knot	NOUN
can-495	6	14	of	of	ADP
can-495	6	15	the	the	DET
can-495	6	16	aerospace	aerospace	NOUN
can-495	6	17	equipment	equipment	NOUN
can-495	6	18	and	and	CCONJ
can-495	6	19	oil	oil	NOUN
can-495	6	20	and	and	CCONJ
can-495	6	21	gas	gas	NOUN
can-495	6	22	equipment	equipment	NOUN
can-495	6	23	,	,	PUNCT
can-495	6	24	to	to	PART
can-495	6	25	expand	expand	VERB
can-495	6	26	the	the	DET
can-495	6	27	field	field	NOUN
can-495	6	28	of	of	ADP
can-495	6	29	use	use	NOUN
can-495	6	30	of	of	ADP
can-495	6	31	the	the	DET
can-495	6	32	combined	combined	ADJ
can-495	6	33	processing	processing	NOUN
can-495	6	34	with	with	ADP
can-495	6	35	untied	untied	ADJ
can-495	6	36	granules	granule	NOUN
can-495	6	37	on	on	ADP
can-495	6	38	a	a	DET
can-495	6	39	detail	detail	NOUN
can-495	6	40	with	with	ADP
can-495	6	41	the	the	DET
can-495	6	42	sites	site	NOUN
can-495	6	43	not	not	PART
can-495	6	44	available	available	ADJ
can-495	6	45	to	to	ADP
can-495	6	46	processing	process	VERB
can-495	6	47	by	by	ADP
can-495	6	48	a	a	DET
can-495	6	49	profile	profile	NOUN
can-495	6	50	electrode	electrode	NOUN
can-495	6	51	.	.	PUNCT
can-495	7	1	keywords	keyword	NOUN
can-495	7	2	:	:	PUNCT
can-495	7	3	the	the	DET
can-495	7	4	combined	combined	ADJ
can-495	7	5	processing	processing	NOUN
can-495	7	6	;	;	PUNCT
can-495	7	7	untied	untied	ADJ
can-495	7	8	granules	granule	NOUN
can-495	7	9	;	;	PUNCT
can-495	7	10	the	the	DET
can-495	7	11	two	two	NUM
can-495	7	12	-	-	PUNCT
can-495	7	13	component	component	NOUN
can-495	7	14	environment	environment	NOUN
can-495	7	15	;	;	PUNCT
can-495	7	16	the	the	DET
can-495	7	17	mechanism	mechanism	NOUN
can-495	7	18	of	of	ADP
can-495	7	19	management	management	NOUN
can-495	7	20	1	1	NUM
can-495	7	21	.	.	PUNCT
can-495	7	22	introduction	introduction	NOUN
can-495	7	23	in	in	ADP
can-495	7	24	aviation	aviation	NOUN
can-495	7	25	and	and	CCONJ
can-495	7	26	the	the	DET
can-495	7	27	missile	missile	NOUN
can-495	7	28	and	and	CCONJ
can-495	7	29	space	space	NOUN
can-495	7	30	equipment	equipment	NOUN
can-495	7	31	is	be	AUX
can-495	7	32	available	available	ADJ
can-495	7	33	details	detail	NOUN
can-495	7	34	spoluzakryty	spoluzakryty	ADJ
can-495	7	35	cavities	cavity	NOUN
can-495	7	36	which	which	PRON
can-495	7	37	are	be	AUX
can-495	7	38	difficult	difficult	ADJ
can-495	7	39	for	for	ADP
can-495	7	40	processing	process	VERB
can-495	7	41	the	the	DET
can-495	7	42	profile	profile	NOUN
can-495	7	43	tool	tool	NOUN
can-495	7	44	.	.	PUNCT
can-495	8	1	in	in	ADP
can-495	8	2	cavities	cavity	NOUN
can-495	8	3	it	it	PRON
can-495	8	4	is	be	AUX
can-495	8	5	necessary	necessary	ADJ
can-495	8	6	to	to	PART
can-495	8	7	develop	develop	VERB
can-495	8	8	the	the	DET
can-495	8	9	modes	mode	NOUN
can-495	8	10	and	and	CCONJ
can-495	8	11	ways	way	NOUN
can-495	8	12	for	for	ADP
can-495	8	13	obtaining	obtain	VERB
can-495	8	14	the	the	DET
can-495	8	15	required	require	VERB
can-495	8	16	quality	quality	NOUN
can-495	8	17	of	of	ADP
can-495	8	18	a	a	DET
can-495	8	19	blanket	blanket	NOUN
can-495	8	20	[	[	X
can-495	8	21	1	1	NUM
can-495	8	22	,	,	PUNCT
can-495	8	23	2	2	NUM
can-495	8	24	]	]	PUNCT
can-495	8	25	,	,	PUNCT
can-495	8	26	the	the	DET
can-495	8	27	providing	provide	VERB
can-495	8	28	directed	direct	VERB
can-495	8	29	nanotransformations	nanotransformation	NOUN
can-495	8	30	of	of	ADP
can-495	8	31	properties	property	NOUN
can-495	8	32	of	of	ADP
can-495	8	33	materal	materal	ADJ
can-495	8	34	of	of	ADP
can-495	8	35	details	detail	NOUN
can-495	8	36	in	in	ADP
can-495	8	37	the	the	DET
can-495	8	38	course	course	NOUN
can-495	8	39	of	of	ADP
can-495	8	40	the	the	DET
can-495	8	41	combined	combined	ADJ
can-495	8	42	processing	processing	NOUN
can-495	8	43	.	.	PUNCT
can-495	9	1	for	for	ADP
can-495	9	2	this	this	DET
can-495	9	3	purpose	purpose	NOUN
can-495	9	4	follows	follow	VERB
can-495	9	5	at	at	ADP
can-495	9	6	fair	fair	ADJ
can-495	9	7	processing	processing	NOUN
can-495	9	8	in	in	ADP
can-495	9	9	a	a	DET
can-495	9	10	blanket	blanket	NOUN
can-495	9	11	of	of	ADP
can-495	9	12	material	material	NOUN
can-495	9	13	to	to	PART
can-495	9	14	carry	carry	VERB
can-495	9	15	out	out	ADP
can-495	9	16	the	the	DET
can-495	9	17	nanotransformations	nanotransformation	NOUN
can-495	9	18	providing	provide	VERB
can-495	9	19	a	a	DET
can-495	9	20	surface	surface	NOUN
can-495	9	21	roughness	roughness	NOUN
can-495	9	22	within	within	ADP
can-495	9	23	ra=0,32	ra=0,32	PROPN
can-495	9	24	-	-	PUNCT
can-495	9	25	0,63	0,63	NOUN
can-495	9	26	of	of	ADP
can-495	9	27	a	a	DET
can-495	9	28	micrometer	micrometer	NOUN
can-495	9	29	and	and	CCONJ
can-495	9	30	squeezing	squeeze	VERB
can-495	9	31	internal	internal	ADJ
can-495	9	32	residual	residual	ADJ
can-495	9	33	tension	tension	NOUN
can-495	9	34	in	in	ADP
can-495	9	35	detail	detail	NOUN
can-495	9	36	material	material	NOUN
can-495	9	37	.	.	PUNCT
can-495	10	1	mechanism	mechanism	NOUN
can-495	10	2	of	of	ADP
can-495	10	3	formation	formation	NOUN
can-495	10	4	of	of	ADP
can-495	10	5	microroughnesses	microroughnesse	NOUN
can-495	10	6	the	the	DET
can-495	10	7	combined	combined	ADJ
can-495	10	8	processing	processing	NOUN
can-495	10	9	with	with	ADP
can-495	10	10	a	a	DET
can-495	10	11	filler	filler	NOUN
can-495	10	12	,	,	PUNCT
can-495	10	13	irrespective	irrespective	ADV
can-495	10	14	of	of	ADP
can-495	10	15	the	the	DET
can-495	10	16	used	use	VERB
can-495	10	17	scheme	scheme	NOUN
can-495	10	18	,	,	PUNCT
can-495	10	19	is	be	AUX
can-495	10	20	intended	intend	VERB
can-495	10	21	for	for	ADP
can-495	10	22	finishing	finish	VERB
can-495	10	23	operations	operation	NOUN
can-495	10	24	of	of	ADP
can-495	10	25	formation	formation	NOUN
can-495	10	26	of	of	ADP
can-495	10	27	a	a	DET
can-495	10	28	blanket	blanket	NOUN
can-495	10	29	of	of	ADP
can-495	10	30	a	a	DET
can-495	10	31	detail	detail	NOUN
can-495	10	32	,	,	PUNCT
can-495	10	33	i.e.	i.e.	X
can-495	10	34	at	at	ADP
can-495	10	35	that	that	DET
can-495	10	36	stage	stage	NOUN
can-495	10	37	of	of	ADP
can-495	10	38	technological	technological	ADJ
can-495	10	39	process	process	NOUN
can-495	10	40	when	when	SCONJ
can-495	10	41	there	there	PRON
can-495	10	42	is	be	VERB
can-495	10	43	a	a	DET
can-495	10	44	formation	formation	NOUN
can-495	10	45	of	of	ADP
can-495	10	46	characteristics	characteristic	NOUN
can-495	10	47	of	of	ADP
can-495	10	48	quality	quality	NOUN
can-495	10	49	of	of	ADP
can-495	10	50	the	the	DET
can-495	10	51	processed	process	VERB
can-495	10	52	surface	surface	NOUN
can-495	10	53	of	of	ADP
can-495	10	54	a	a	DET
can-495	10	55	detail	detail	NOUN
can-495	10	56	including	include	VERB
can-495	10	57	on	on	ADP
can-495	10	58	a	a	DET
can-495	10	59	nanolevel	nanolevel	NOUN
can-495	10	60	.	.	PUNCT
can-495	11	1	the	the	DET
can-495	11	2	firm	firm	ADJ
can-495	11	3	granules	granule	NOUN
can-495	11	4	which	which	PRON
can-495	11	5	are	be	AUX
can-495	11	6	a	a	DET
can-495	11	7	part	part	NOUN
can-495	11	8	of	of	ADP
can-495	11	9	a	a	DET
can-495	11	10	liquid	liquid	ADJ
can-495	11	11	component	component	NOUN
can-495	11	12	of	of	ADP
can-495	11	13	the	the	DET
can-495	11	14	technological	technological	ADJ
can-495	11	15	environment	environment	NOUN
can-495	11	16	are	be	AUX
can-495	11	17	the	the	DET
can-495	11	18	tool	tool	NOUN
can-495	11	19	which	which	PRON
can-495	11	20	,	,	PUNCT
can-495	11	21	having	have	VERB
can-495	11	22	considerable	considerable	ADJ
can-495	11	23	energy	energy	NOUN
can-495	11	24	,	,	PUNCT
can-495	11	25	makes	make	VERB
can-495	11	26	decrease	decrease	NOUN
can-495	11	27	in	in	ADP
can-495	11	28	microroughnesses	microroughnesse	NOUN
can-495	11	29	of	of	ADP
can-495	11	30	a	a	DET
can-495	11	31	surface	surface	NOUN
can-495	11	32	and	and	CCONJ
can-495	11	33	creation	creation	NOUN
can-495	11	34	of	of	ADP
can-495	11	35	internal	internal	ADJ
can-495	11	36	microtension	microtension	NOUN
can-495	11	37	.	.	PUNCT
can-495	12	1	these	these	DET
can-495	12	2	factors	factor	NOUN
can-495	12	3	considerably	considerably	ADV
can-495	12	4	define	define	VERB
can-495	12	5	operational	operational	ADJ
can-495	12	6	indicators	indicator	NOUN
can-495	12	7	of	of	ADP
can-495	12	8	a	a	DET
can-495	12	9	detail	detail	NOUN
can-495	12	10	.	.	PUNCT
can-495	13	1	the	the	DET
can-495	13	2	blanket	blanket	NOUN
can-495	13	3	is	be	AUX
can-495	13	4	characterized	characterize	VERB
can-495	13	5	by	by	ADP
can-495	13	6	two	two	NUM
can-495	13	7	key	key	ADJ
can-495	13	8	parameters	parameter	NOUN
can-495	13	9	:	:	PUNCT
can-495	13	10	a	a	DET
can-495	13	11	roughness	roughness	NOUN
can-495	13	12	of	of	ADP
can-495	13	13	a	a	DET
can-495	13	14	surface	surface	NOUN
can-495	13	15	and	and	CCONJ
can-495	13	16	physicomechanical	physicomechanical	ADJ
can-495	13	17	properties	property	NOUN
can-495	13	18	which	which	PRON
can-495	13	19	have	have	VERB
can-495	13	20	significant	significant	ADJ
can-495	13	21	effect	effect	NOUN
can-495	13	22	on	on	ADP
can-495	13	23	wear	wear	NOUN
can-495	13	24	resistance	resistance	NOUN
can-495	13	25	,	,	PUNCT
can-495	13	26	durability	durability	NOUN
can-495	13	27	,	,	PUNCT
can-495	13	28	resistance	resistance	NOUN
can-495	13	29	to	to	ADP
can-495	13	30	fatigue	fatigue	NOUN
can-495	13	31	and	and	CCONJ
can-495	13	32	sign	sign	NOUN
can-495	13	33	-	-	PUNCT
can-495	13	34	variable	variable	NOUN
can-495	13	35	loadings	loading	NOUN
can-495	13	36	and	and	CCONJ
can-495	13	37	other	other	ADJ
can-495	13	38	similar	similar	ADJ
can-495	13	39	factors	factor	NOUN
can-495	13	40	.	.	PUNCT
can-495	14	1	2	2	X
can-495	14	2	.	.	X
can-495	14	3	technique	technique	NOUN
can-495	14	4	of	of	ADP
can-495	14	5	researches	research	NOUN
can-495	14	6	the	the	DET
can-495	14	7	research	research	NOUN
can-495	14	8	of	of	ADP
can-495	14	9	a	a	DET
can-495	14	10	condition	condition	NOUN
can-495	14	11	of	of	ADP
can-495	14	12	a	a	DET
can-495	14	13	blanket	blanket	NOUN
can-495	14	14	was	be	AUX
can-495	14	15	made	make	VERB
can-495	14	16	by	by	ADP
can-495	14	17	a	a	DET
can-495	14	18	standard	standard	ADJ
can-495	14	19	technique	technique	NOUN
can-495	14	20	and	and	CCONJ
can-495	14	21	consisted	consist	VERB
can-495	14	22	in	in	ADP
can-495	14	23	a	a	DET
can-495	14	24	research	research	NOUN
can-495	14	25	of	of	ADP
can-495	14	26	samples	sample	NOUN
can-495	14	27	by	by	ADP
can-495	14	28	means	mean	NOUN
can-495	14	29	of	of	ADP
can-495	14	30	production	production	NOUN
can-495	14	31	of	of	ADP
can-495	14	32	cross	cross	NOUN
can-495	14	33	mikroshlif	mikroshlif	NOUN
can-495	14	34	of	of	ADP
can-495	14	35	the	the	DET
can-495	14	36	processed	process	VERB
can-495	14	37	surfaces	surface	NOUN
can-495	14	38	.	.	PUNCT
can-495	15	1	mikroshlifa	mikroshlifa	PROPN
can-495	15	2	were	be	AUX
can-495	15	3	exposed	expose	VERB
can-495	15	4	to	to	ADP
can-495	15	5	special	special	ADJ
can-495	15	6	chemical	chemical	NOUN
can-495	15	7	processing	processing	NOUN
can-495	15	8	and	and	CCONJ
can-495	15	9	etching	etch	VERB
can-495	15	10	for	for	ADP
can-495	15	11	identification	identification	NOUN
can-495	15	12	of	of	ADP
can-495	15	13	structure	structure	NOUN
can-495	15	14	of	of	ADP
can-495	15	15	material	material	NOUN
can-495	15	16	and	and	CCONJ
can-495	15	17	to	to	ADP
can-495	15	18	their	their	PRON
can-495	15	19	further	far	ADV
can-495	15	20	studying	study	VERB
can-495	15	21	on	on	ADP
can-495	15	22	optical	optical	ADJ
can-495	15	23	and	and	CCONJ
can-495	15	24	electronic	electronic	ADJ
can-495	15	25	microscopes	microscope	NOUN
can-495	15	26	.	.	PUNCT
can-495	16	1	besides	besides	SCONJ
can-495	16	2	,	,	PUNCT
can-495	16	3	on	on	ADP
can-495	16	4	samples	sample	NOUN
can-495	16	5	,	,	PUNCT
can-495	16	6	in	in	ADP
can-495	16	7	the	the	DET
can-495	16	8	location	location	NOUN
can-495	16	9	of	of	ADP
can-495	16	10	a	a	DET
can-495	16	11	near	near	ADJ
can-495	16	12	-	-	PUNCT
can-495	16	13	surface	surface	NOUN
can-495	16	14	layer	layer	NOUN
can-495	16	15	with	with	ADP
can-495	16	16	the	the	DET
can-495	16	17	changed	change	VERB
can-495	16	18	structure	structure	NOUN
can-495	16	19	and	and	CCONJ
can-495	16	20	copyright	copyright	NOUN
can-495	16	21	©	©	PROPN
can-495	16	22	2018	2018	NUM
can-495	16	23	v.	v.	ADP
can-495	16	24	p.	p.	NOUN
can-495	16	25	smolentsev	smolentsev	VERB
can-495	16	26	et	et	PROPN
can-495	16	27	al	al	PROPN
can-495	16	28	.	.	PUNCT
can-495	16	29	doi	doi	PROPN
can-495	16	30	:	:	PUNCT
can-495	16	31	10.24294	10.24294	NUM
can-495	16	32	/	/	SYM
can-495	16	33	can.v1i2.495	can.v1i2.495	ADJ
can-495	16	34	enpress	enpress	NOUN
can-495	16	35	publisher	publisher	NOUN
can-495	16	36	llc.this	llc.this	PRON
can-495	16	37	work	work	NOUN
can-495	16	38	is	be	AUX
can-495	16	39	licensed	license	VERB
can-495	16	40	under	under	ADP
can-495	16	41	the	the	DET
can-495	16	42	creative	creative	ADJ
can-495	16	43	commonsattribution	commonsattribution	NOUN
can-495	16	44	-	-	PUNCT
can-495	16	45	noncommercial	noncommercial	ADJ
can-495	16	46	4.0	4.0	NUM
can-495	16	47	international	international	ADJ
can-495	16	48	license	license	NOUN
can-495	16	49	(	(	PUNCT
can-495	16	50	cc	cc	NOUN
can-495	16	51	by	by	ADP
can-495	16	52	-	-	PUNCT
can-495	16	53	nc	nc	PROPN
can-495	16	54	4.0	4.0	NUM
can-495	16	55	)	)	PUNCT
can-495	16	56	.	.	PUNCT
can-495	17	1	http://creativecommons.org/licenses/	http://creativecommons.org/licenses/	PROPN
can-495	17	2	by/4.0/	by/4.0/	NOUN
can-495	17	3	2	2	NUM
can-495	17	4	hardness	hardness	NOUN
can-495	17	5	the	the	DET
can-495	17	6	measurement	measurement	NOUN
can-495	17	7	of	of	ADP
can-495	17	8	microhardness	microhardness	NOUN
can-495	17	9	by	by	ADP
can-495	17	10	introduction	introduction	NOUN
can-495	17	11	of	of	ADP
can-495	17	12	indentor	indentor	NOUN
can-495	17	13	on	on	ADP
can-495	17	14	slanting	slanting	NOUN
can-495	17	15	cuts	cut	NOUN
can-495	17	16	was	be	AUX
can-495	17	17	made	make	VERB
can-495	17	18	.	.	PUNCT
can-495	18	1	the	the	DET
can-495	18	2	condition	condition	NOUN
can-495	18	3	of	of	ADP
can-495	18	4	a	a	DET
can-495	18	5	blanket	blanket	NOUN
can-495	18	6	of	of	ADP
can-495	18	7	a	a	DET
can-495	18	8	detail	detail	NOUN
can-495	18	9	in	in	ADP
can-495	18	10	case	case	NOUN
can-495	18	11	of	of	ADP
can-495	18	12	influence	influence	NOUN
can-495	18	13	of	of	ADP
can-495	18	14	all	all	DET
can-495	18	15	technology	technology	NOUN
can-495	18	16	factors	factor	NOUN
can-495	18	17	was	be	AUX
can-495	18	18	originally	originally	ADV
can-495	18	19	determined	determine	VERB
can-495	18	20	(	(	PUNCT
can-495	18	21	the	the	DET
can-495	18	22	combined	combined	ADJ
can-495	18	23	processing	processing	NOUN
can-495	18	24	by	by	ADP
can-495	18	25	the	the	DET
can-495	18	26	scheme	scheme	NOUN
can-495	18	27	with	with	ADP
can-495	18	28	anode	anode	NOUN
can-495	18	29	dissolution	dissolution	NOUN
can-495	18	30	of	of	ADP
can-495	18	31	a	a	DET
can-495	18	32	surface	surface	NOUN
can-495	18	33	of	of	ADP
can-495	18	34	a	a	DET
can-495	18	35	detail	detail	NOUN
can-495	18	36	and	and	CCONJ
can-495	18	37	its	its	PRON
can-495	18	38	plastic	plastic	ADJ
can-495	18	39	deformation	deformation	NOUN
can-495	18	40	of	of	ADP
can-495	18	41	a	a	DET
can-495	18	42	firm	firm	ADJ
can-495	18	43	component	component	NOUN
can-495	18	44	of	of	ADP
can-495	18	45	a	a	DET
can-495	18	46	working	work	VERB
can-495	18	47	environment	environment	NOUN
can-495	18	48	):	):	PUNCT
can-495	18	49	anode	anode	NOUN
can-495	18	50	dissolution	dissolution	NOUN
can-495	18	51	of	of	ADP
can-495	18	52	material	material	NOUN
can-495	18	53	of	of	ADP
can-495	18	54	preparation	preparation	NOUN
can-495	18	55	and	and	CCONJ
can-495	18	56	removal	removal	NOUN
can-495	18	57	of	of	ADP
can-495	18	58	a	a	DET
can-495	18	59	hereditary	hereditary	ADJ
can-495	18	60	layer	layer	NOUN
can-495	18	61	and	and	CCONJ
can-495	18	62	simultaneous	simultaneous	ADJ
can-495	18	63	hardening	hardening	NOUN
can-495	18	64	of	of	ADP
can-495	18	65	a	a	DET
can-495	18	66	surface	surface	NOUN
can-495	18	67	of	of	ADP
can-495	18	68	a	a	DET
can-495	18	69	firm	firm	ADJ
can-495	18	70	component	component	NOUN
can-495	18	71	of	of	ADP
can-495	18	72	a	a	DET
can-495	18	73	working	working	NOUN
can-495	18	74	environment	environment	NOUN
can-495	18	75	.	.	PUNCT
can-495	19	1	the	the	DET
can-495	19	2	surface	surface	NOUN
can-495	19	3	condition	condition	NOUN
can-495	19	4	after	after	ADP
can-495	19	5	processing	processing	NOUN
can-495	19	6	can	can	AUX
can-495	19	7	be	be	AUX
can-495	19	8	estimated	estimate	VERB
can-495	19	9	by	by	ADP
can-495	19	10	several	several	ADJ
can-495	19	11	characteristics	characteristic	NOUN
can-495	19	12	:	:	PUNCT
can-495	19	13	the	the	DET
can-495	19	14	size	size	NOUN
can-495	19	15	of	of	ADP
can-495	19	16	microhardness	microhardness	ADJ
can-495	19	17	and	and	CCONJ
can-495	19	18	depth	depth	NOUN
can-495	19	19	of	of	ADP
can-495	19	20	its	its	PRON
can-495	19	21	bedding	bed	VERB
can-495	19	22	,	,	PUNCT
can-495	19	23	character	character	NOUN
can-495	19	24	of	of	ADP
can-495	19	25	residual	residual	ADJ
can-495	19	26	tension	tension	NOUN
can-495	19	27	,	,	PUNCT
can-495	19	28	a	a	DET
can-495	19	29	roughness	roughness	NOUN
can-495	19	30	of	of	ADP
can-495	19	31	a	a	DET
can-495	19	32	surface	surface	NOUN
can-495	19	33	and	and	CCONJ
can-495	19	34	structure	structure	NOUN
can-495	19	35	of	of	ADP
can-495	19	36	material	material	NOUN
can-495	19	37	in	in	ADP
can-495	19	38	a	a	DET
can-495	19	39	near	near	ADJ
can-495	19	40	-	-	PUNCT
can-495	19	41	surface	surface	NOUN
can-495	19	42	layer	layer	NOUN
can-495	19	43	,	,	PUNCT
can-495	19	44	i.e.	i.e.	X
can-495	19	45	in	in	ADP
can-495	19	46	that	that	DET
can-495	19	47	layer	layer	NOUN
can-495	19	48	which	which	PRON
can-495	19	49	perceives	perceive	VERB
can-495	19	50	the	the	DET
can-495	19	51	main	main	ADJ
can-495	19	52	electrochemical	electrochemical	ADJ
can-495	19	53	and	and	CCONJ
can-495	19	54	mechanical	mechanical	ADJ
can-495	19	55	influences	influence	NOUN
can-495	19	56	of	of	ADP
can-495	19	57	a	a	DET
can-495	19	58	two	two	NUM
can-495	19	59	-	-	PUNCT
can-495	19	60	component	component	NOUN
can-495	19	61	working	working	NOUN
can-495	19	62	environment	environment	NOUN
can-495	19	63	.	.	PUNCT
can-495	20	1	3	3	X
can-495	20	2	.	.	X
can-495	20	3	discussion	discussion	NOUN
can-495	20	4	of	of	ADP
can-495	20	5	results	result	NOUN
can-495	20	6	of	of	ADP
can-495	20	7	researches	research	NOUN
can-495	20	8	researches	research	NOUN
can-495	20	9	showed	show	VERB
can-495	20	10	that	that	SCONJ
can-495	20	11	the	the	DET
can-495	20	12	greatest	great	ADJ
can-495	20	13	influence	influence	NOUN
can-495	20	14	on	on	ADP
can-495	20	15	process	process	NOUN
can-495	20	16	of	of	ADP
can-495	20	17	formation	formation	NOUN
can-495	20	18	on	on	ADP
can-495	20	19	a	a	DET
can-495	20	20	nanolevel	nanolevel	NOUN
can-495	20	21	of	of	ADP
can-495	20	22	a	a	DET
can-495	20	23	blanket	blanket	NOUN
can-495	20	24	of	of	ADP
can-495	20	25	a	a	DET
can-495	20	26	detail	detail	NOUN
can-495	20	27	is	be	AUX
can-495	20	28	played	play	VERB
can-495	20	29	by	by	ADP
can-495	20	30	parameters	parameter	NOUN
can-495	20	31	of	of	ADP
can-495	20	32	the	the	DET
can-495	20	33	movement	movement	NOUN
can-495	20	34	of	of	ADP
can-495	20	35	a	a	DET
can-495	20	36	filler	filler	NOUN
can-495	20	37	and	and	CCONJ
can-495	20	38	its	its	PRON
can-495	20	39	physicomechanical	physicomechanical	ADJ
can-495	20	40	properties	property	NOUN
can-495	20	41	.	.	PUNCT
can-495	21	1	metalgraphic	metalgraphic	ADJ
can-495	21	2	researches	research	NOUN
can-495	21	3	revealed	reveal	VERB
can-495	21	4	at	at	ADP
can-495	21	5	the	the	DET
can-495	21	6	changed	change	VERB
can-495	21	7	layer	layer	NOUN
can-495	21	8	from	from	ADP
can-495	21	9	4	4	NUM
can-495	21	10	to	to	PART
can-495	21	11	12	12	NUM
can-495	21	12	microns	micron	NOUN
can-495	21	13	in	in	ADP
can-495	21	14	depth	depth	NOUN
can-495	21	15	with	with	ADP
can-495	21	16	the	the	DET
can-495	21	17	maximum	maximum	ADJ
can-495	21	18	peening	peening	NOUN
can-495	21	19	directly	directly	ADV
can-495	21	20	at	at	ADP
can-495	21	21	the	the	DET
can-495	21	22	upper	upper	ADJ
can-495	21	23	bound	bind	VERB
can-495	21	24	of	of	ADP
can-495	21	25	this	this	DET
can-495	21	26	layer	layer	NOUN
can-495	21	27	is	be	AUX
can-495	21	28	model	model	NOUN
can-495	21	29	.	.	PUNCT
can-495	22	1	photos	photo	NOUN
can-495	22	2	of	of	ADP
can-495	22	3	mikroshlif	mikroshlif	NOUN
can-495	22	4	of	of	ADP
can-495	22	5	the	the	DET
can-495	22	6	studied	study	VERB
can-495	22	7	samples	sample	NOUN
can-495	22	8	before	before	ADP
can-495	22	9	processing	processing	NOUN
can-495	22	10	are	be	AUX
can-495	22	11	presented	present	VERB
can-495	22	12	in	in	ADP
can-495	22	13	fig	fig	NOUN
can-495	22	14	.	.	PUNCT
can-495	23	1	1	1	X
can-495	23	2	.	.	X
can-495	23	3	various	various	ADJ
can-495	23	4	materials	material	NOUN
can-495	23	5	having	have	VERB
can-495	23	6	a	a	DET
can-495	23	7	different	different	ADJ
can-495	23	8	hereditary	hereditary	ADJ
can-495	23	9	blanket	blanket	NOUN
can-495	23	10	were	be	AUX
can-495	23	11	subjected	subject	VERB
can-495	23	12	to	to	ADP
can-495	23	13	processing	processing	NOUN
can-495	23	14	.	.	PUNCT
can-495	24	1	besides	besides	SCONJ
can-495	24	2	,	,	PUNCT
can-495	24	3	conditions	condition	NOUN
can-495	24	4	and	and	CCONJ
can-495	24	5	the	the	DET
can-495	24	6	modes	mode	NOUN
can-495	24	7	of	of	ADP
can-495	24	8	processing	processing	NOUN
can-495	24	9	varied	varied	ADJ
can-495	24	10	.	.	PUNCT
can-495	25	1	the	the	DET
can-495	25	2	sample	sample	NOUN
can-495	25	3	from	from	ADP
can-495	25	4	steel	steel	NOUN
can-495	25	5	40xh2ma	40xh2ma	PROPN
can-495	25	6	(	(	PUNCT
can-495	25	7	fig	fig	NOUN
can-495	25	8	.	.	PUNCT
can-495	26	1	1	1	NUM
can-495	26	2	,	,	PUNCT
can-495	26	3	a	a	PRON
can-495	26	4	and	and	CCONJ
can-495	26	5	b	b	NOUN
can-495	26	6	)	)	PUNCT
can-495	26	7	was	be	AUX
can-495	26	8	received	receive	VERB
can-495	26	9	by	by	ADP
can-495	26	10	draft	draft	NOUN
can-495	26	11	milling	milling	NOUN
can-495	26	12	and	and	CCONJ
can-495	26	13	will	will	AUX
can-495	26	14	subject	subject	VERB
can-495	26	15	to	to	ADP
can-495	26	16	elektrokhimikomekhanichesky	elektrokhimikomekhanichesky	ADJ
can-495	26	17	processing	processing	NOUN
can-495	26	18	(	(	PUNCT
can-495	26	19	ehmp	ehmp	NOUN
can-495	26	20	)	)	PUNCT
can-495	26	21	at	at	ADP
can-495	26	22	more	more	ADJ
can-495	26	23	"	"	PUNCT
can-495	26	24	rigid	rigid	ADJ
can-495	26	25	"	"	PUNCT
can-495	26	26	modes	mode	NOUN
can-495	26	27	:	:	PUNCT
can-495	26	28	granules	granule	NOUN
can-495	26	29	of	of	ADP
can-495	26	30	a	a	DET
can-495	26	31	filler	filler	NOUN
can-495	26	32	were	be	AUX
can-495	26	33	made	make	VERB
can-495	26	34	of	of	ADP
can-495	26	35	steel	steel	NOUN
can-495	26	36	45	45	NUM
can-495	26	37	by	by	ADP
can-495	26	38	the	the	DET
can-495	26	39	size	size	NOUN
can-495	27	1	d	d	X
can-495	27	2	=	=	SYM
can-495	27	3	5	5	NUM
can-495	27	4	mm	mm	NOUN
can-495	27	5	;	;	PUNCT
can-495	27	6	concentration	concentration	NOUN
can-495	27	7	in	in	ADP
can-495	27	8	mep	mep	PROPN
can-495	27	9	25	25	NUM
can-495	27	10	30	30	NUM
can-495	27	11	%	%	NOUN
can-495	27	12	;	;	PUNCT
can-495	27	13	electrolyte	electrolyte	ADJ
can-495	27	14	15	15	NUM
can-495	27	15	%	%	NOUN
can-495	27	16	nacl	nacl	NOUN
can-495	27	17	solution	solution	NOUN
can-495	27	18	;	;	PUNCT
can-495	27	19	the	the	DET
can-495	27	20	scheme	scheme	NOUN
can-495	27	21	of	of	ADP
can-495	27	22	giving	giving	NOUN
can-495	27	23	of	of	ADP
can-495	27	24	granules	granule	NOUN
can-495	27	25	told	tell	VERB
can-495	27	26	them	they	PRON
can-495	27	27	high	high	ADJ
can-495	27	28	kinetic	kinetic	ADJ
can-495	27	29	energy	energy	NOUN
can-495	27	30	–	–	PUNCT
can-495	27	31	about	about	ADV
can-495	27	32	10	10	NUM
can-495	27	33	m	m	NOUN
can-495	27	34	/	/	SYM
can-495	27	35	s	s	X
can-495	27	36	(	(	PUNCT
can-495	27	37	calculated	calculated	ADJ
can-495	27	38	value	value	NOUN
can-495	27	39	)	)	PUNCT
can-495	27	40	;	;	PUNCT
can-495	27	41	working	work	VERB
can-495	27	42	tension	tension	NOUN
can-495	27	43	on	on	ADP
can-495	27	44	electrodes	electrode	NOUN
can-495	27	45	75	75	NUM
can-495	27	46	v	v	NOUN
can-495	27	47	;	;	PUNCT
can-495	27	48	the	the	DET
can-495	27	49	general	general	ADJ
can-495	27	50	distance	distance	NOUN
can-495	27	51	from	from	ADP
can-495	27	52	a	a	DET
can-495	27	53	hydraulic	hydraulic	ADJ
can-495	27	54	element	element	NOUN
can-495	27	55	to	to	ADP
can-495	27	56	a	a	DET
can-495	27	57	detail	detail	NOUN
can-495	27	58	surface	surface	NOUN
can-495	27	59	50	50	NUM
can-495	27	60	mm	mm	NOUN
can-495	27	61	;	;	PUNCT
can-495	27	62	processing	processing	NOUN
can-495	27	63	time	time	NOUN
can-495	27	64	,	,	PUNCT
can-495	27	65	as	as	ADV
can-495	27	66	well	well	ADV
can-495	27	67	as	as	ADP
can-495	27	68	in	in	ADP
can-495	27	69	the	the	DET
can-495	27	70	previous	previous	ADJ
can-495	27	71	case	case	NOUN
can-495	27	72	made	make	VERB
can-495	27	73	40	40	NUM
can-495	27	74	seconds	second	NOUN
can-495	27	75	.	.	PUNCT
can-495	28	1	in	in	ADP
can-495	28	2	photos	photo	NOUN
can-495	28	3	of	of	ADP
can-495	28	4	mikroshlif	mikroshlif	NOUN
can-495	28	5	(	(	PUNCT
can-495	28	6	fig	fig	NOUN
can-495	28	7	.	.	NOUN
can-495	28	8	1	1	NUM
can-495	28	9	)	)	PUNCT
can-495	28	10	on	on	ADP
can-495	28	11	a	a	DET
can-495	28	12	nanolevel	nanolevel	NOUN
can-495	28	13	the	the	DET
can-495	28	14	uniform	uniform	NOUN
can-495	28	15	changed	change	VERB
can-495	28	16	superficial	superficial	ADJ
can-495	28	17	microlayer	microlayer	NOUN
can-495	28	18	of	of	ADP
can-495	28	19	metal	metal	NOUN
can-495	28	20	of	of	ADP
can-495	28	21	which	which	PRON
can-495	28	22	more	more	ADV
can-495	28	23	dense	dense	ADJ
can-495	28	24	arrangement	arrangement	NOUN
can-495	28	25	of	of	ADP
can-495	28	26	grains	grain	NOUN
can-495	28	27	of	of	ADP
can-495	28	28	material	material	NOUN
can-495	28	29	is	be	AUX
can-495	28	30	characteristic	characteristic	ADJ
can-495	28	31	is	be	AUX
can-495	28	32	clearly	clearly	ADV
can-495	28	33	visible	visible	ADJ
can-495	28	34	.	.	PUNCT
can-495	29	1	measurement	measurement	NOUN
can-495	29	2	of	of	ADP
can-495	29	3	microhardness	microhardness	NOUN
can-495	29	4	showed	show	VERB
can-495	29	5	its	its	PRON
can-495	29	6	increase	increase	NOUN
can-495	29	7	due	due	ADP
can-495	29	8	to	to	ADP
can-495	29	9	mechanical	mechanical	ADJ
can-495	29	10	influence	influence	NOUN
can-495	29	11	of	of	ADP
can-495	29	12	a	a	DET
can-495	29	13	filler	filler	NOUN
can-495	29	14	up	up	ADP
can-495	29	15	to	to	ADP
can-495	29	16	hrce	hrce	NOUN
can-495	29	17	value	value	NOUN
can-495	29	18	43.5	43.5	NUM
can-495	29	19	that	that	PRON
can-495	29	20	above	above	ADV
can-495	29	21	than	than	ADP
can-495	29	22	at	at	ADP
can-495	29	23	preparation	preparation	NOUN
can-495	29	24	where	where	SCONJ
can-495	29	25	this	this	DET
can-495	29	26	indicator	indicator	NOUN
can-495	29	27	makes	make	VERB
can-495	29	28	35.5	35.5	NUM
can-495	29	29	hrce	hrce	NOUN
can-495	29	30	.	.	PUNCT
can-495	30	1	change	change	NOUN
can-495	30	2	of	of	ADP
can-495	30	3	microhardness	microhardness	NOUN
can-495	30	4	of	of	ADP
can-495	30	5	a	a	DET
can-495	30	6	blanket	blanket	NOUN
can-495	30	7	of	of	ADP
can-495	30	8	a	a	DET
can-495	30	9	detail	detail	NOUN
can-495	30	10	proves	prove	VERB
can-495	30	11	formation	formation	NOUN
can-495	30	12	in	in	ADP
can-495	30	13	it	it	PRON
can-495	30	14	internal	internal	ADJ
can-495	30	15	,	,	PUNCT
can-495	30	16	and	and	CCONJ
can-495	30	17	as	as	ADP
can-495	30	18	by	by	ADP
can-495	30	19	us	we	PRON
can-495	30	20	it	it	PRON
can-495	30	21	was	be	AUX
can-495	30	22	established	establish	VERB
can-495	30	23	–	–	PUNCT
can-495	30	24	the	the	DET
can-495	30	25	squeezing	squeeze	VERB
can-495	30	26	microtension	microtension	NOUN
can-495	30	27	.	.	PUNCT
can-495	31	1	at	at	ADP
can-495	31	2	boundary	boundary	ADJ
can-495	31	3	,	,	PUNCT
can-495	31	4	greatest	great	ADJ
can-495	31	5	possible	possible	ADJ
can-495	31	6	at	at	ADP
can-495	31	7	the	the	DET
can-495	31	8	used	use	VERB
can-495	31	9	schemes	scheme	NOUN
can-495	31	10	of	of	ADP
can-495	31	11	processing	processing	NOUN
can-495	31	12	and	and	CCONJ
can-495	31	13	the	the	DET
can-495	31	14	equipment	equipment	NOUN
can-495	31	15	,	,	PUNCT
can-495	31	16	the	the	DET
can-495	31	17	processing	processing	NOUN
can-495	31	18	modes	mode	NOUN
can-495	31	19	(	(	PUNCT
can-495	31	20	the	the	DET
can-495	31	21	photo	photo	NOUN
can-495	31	22	on	on	ADP
can-495	31	23	rice	rice	NOUN
can-495	31	24	1	1	NUM
can-495	31	25	;	;	PUNCT
can-495	31	26	2	2	NUM
can-495	31	27	,	,	PUNCT
can-495	31	28	a	a	DET
can-495	31	29	,	,	PUNCT
can-495	31	30	b	b	NOUN
can-495	31	31	)	)	PUNCT
can-495	31	32	,	,	PUNCT
can-495	31	33	the	the	DET
can-495	31	34	size	size	NOUN
can-495	31	35	of	of	ADP
can-495	31	36	a	a	DET
can-495	31	37	peening	peening	NOUN
can-495	31	38	made	make	VERB
can-495	31	39	un	un	PROPN
can-495	31	40			NOUN
can-495	31	41	of	of	ADP
can-495	31	42	22,5	22,5	NUM
can-495	31	43	%	%	NOUN
can-495	31	44	at	at	ADP
can-495	31	45	the	the	DET
can-495	31	46	general	general	ADJ
can-495	31	47	depth	depth	NOUN
can-495	31	48	of	of	ADP
can-495	31	49	hn	hn	PROPN
can-495	31	50	of	of	PROPN
can-495	31	51	10	10	NUM
can-495	31	52	microns	micron	NOUN
can-495	31	53	.	.	PUNCT
can-495	32	1	the	the	DET
can-495	32	2	maximum	maximum	NOUN
can-495	32	3	of	of	ADP
can-495	32	4	a	a	DET
can-495	32	5	peening	peening	NOUN
can-495	32	6	is	be	AUX
can-495	32	7	observed	observe	VERB
can-495	32	8	at	at	ADP
can-495	32	9	its	its	PRON
can-495	32	10	upper	upper	ADJ
can-495	32	11	bound	bind	VERB
can-495	32	12	.	.	PUNCT
can-495	33	1	the	the	DET
can-495	33	2	sample	sample	NOUN
can-495	33	3	presented	present	VERB
can-495	33	4	in	in	ADP
can-495	33	5	fig	fig	NOUN
can-495	33	6	.	.	PUNCT
can-495	34	1	1	1	NUM
can-495	34	2	c	c	NOUN
can-495	34	3	and	and	CCONJ
can-495	34	4	d	d	NOUN
can-495	34	5	,	,	PUNCT
can-495	34	6	was	be	AUX
can-495	34	7	made	make	VERB
can-495	34	8	of	of	ADP
can-495	34	9	steel	steel	NOUN
can-495	34	10	38h2mya	38h2mya	ADV
can-495	34	11	,	,	PUNCT
can-495	34	12	and	and	CCONJ
can-495	34	13	fair	fair	ADJ
can-495	34	14	milling	milling	NOUN
can-495	34	15	was	be	AUX
can-495	34	16	the	the	DET
can-495	34	17	previous	previous	ADJ
can-495	34	18	operation	operation	NOUN
can-495	34	19	of	of	ADP
can-495	34	20	machining	machining	NOUN
can-495	34	21	.	.	PUNCT
can-495	35	1	at	at	ADP
can-495	35	2	its	its	PRON
can-495	35	3	processing	processing	NOUN
can-495	35	4	"	"	PUNCT
can-495	35	5	the	the	DET
can-495	35	6	soft	soft	ADJ
can-495	35	7	modes	mode	NOUN
can-495	35	8	"	"	PUNCT
can-495	35	9	were	be	AUX
can-495	35	10	used	use	VERB
can-495	35	11	:	:	PUNCT
can-495	35	12	diameter	diameter	NOUN
can-495	35	13	of	of	ADP
can-495	35	14	the	the	DET
can-495	35	15	granules	granule	NOUN
can-495	35	16	of	of	ADP
can-495	35	17	a	a	DET
can-495	35	18	filler	filler	NOUN
can-495	35	19	made	make	VERB
can-495	35	20	of	of	ADP
can-495	35	21	the	the	DET
can-495	35	22	most	most	ADV
can-495	35	23	widespread	widespread	ADJ
can-495	35	24	steel	steel	NOUN
can-495	35	25	45	45	NUM
can-495	35	26	,	,	PUNCT
can-495	35	27	equaled	equal	VERB
can-495	35	28	5	5	NUM
can-495	35	29	mm	mm	NOUN
can-495	35	30	;	;	PUNCT
can-495	35	31	their	their	PRON
can-495	35	32	concentration	concentration	NOUN
can-495	35	33	in	in	ADP
can-495	35	34	a	a	DET
can-495	35	35	total	total	ADJ
can-495	35	36	amount	amount	NOUN
can-495	35	37	of	of	ADP
can-495	35	38	a	a	DET
can-495	35	39	working	work	VERB
can-495	35	40	environment	environment	NOUN
can-495	35	41	25	25	NUM
can-495	35	42	30	30	NUM
can-495	35	43	%	%	NOUN
can-495	35	44	;	;	PUNCT
can-495	35	45	as	as	ADP
can-495	35	46	electrolyte	electrolyte	ADJ
can-495	35	47	fifteen	fifteen	NUM
can-495	35	48	percentage	percentage	NOUN
can-495	35	49	solution	solution	NOUN
can-495	35	50	of	of	ADP
can-495	35	51	chloride	chloride	NOUN
can-495	35	52	of	of	ADP
can-495	35	53	nacl	nacl	ADJ
can-495	35	54	sodium	sodium	NOUN
can-495	35	55	were	be	AUX
can-495	35	56	used	use	VERB
can-495	35	57	;	;	PUNCT
can-495	35	58	granules	granule	NOUN
can-495	35	59	moved	move	VERB
can-495	35	60	to	to	ADP
can-495	35	61	the	the	DET
can-495	35	62	processed	process	VERB
can-495	35	63	surface	surface	NOUN
can-495	35	64	with	with	ADP
can-495	35	65	the	the	DET
can-495	35	66	rated	rate	VERB
can-495	35	67	speed	speed	NOUN
can-495	35	68	of	of	ADP
can-495	35	69	5	5	NUM
can-495	35	70	m	m	NOUN
can-495	35	71	/	/	SYM
can-495	35	72	s	s	PROPN
can-495	35	73	;	;	PUNCT
can-495	35	74	working	work	VERB
can-495	35	75	tension	tension	NOUN
can-495	35	76	on	on	ADP
can-495	35	77	electrodes	electrode	NOUN
can-495	35	78	50	50	NUM
can-495	35	79	v	v	NOUN
can-495	35	80	;	;	PUNCT
can-495	35	81	size	size	NOUN
can-495	35	82	mep	mep	PROPN
can-495	35	83	50	50	NUM
can-495	35	84	mm	mm	NOUN
can-495	35	85	;	;	PUNCT
can-495	35	86	time	time	NOUN
can-495	35	87	of	of	ADP
can-495	35	88	processing	processing	NOUN
can-495	35	89	of	of	ADP
can-495	35	90	the	the	DET
can-495	35	91	area	area	NOUN
can-495	35	92	of	of	ADP
can-495	35	93	a	a	DET
can-495	35	94	detail	detail	NOUN
can-495	35	95	equal	equal	ADJ
can-495	35	96	to	to	ADP
can-495	35	97	an	an	DET
can-495	35	98	effective	effective	ADJ
can-495	35	99	spot	spot	NOUN
can-495	35	100	made	make	VERB
can-495	35	101	40	40	NUM
can-495	35	102	seconds	second	NOUN
can-495	35	103	.	.	PUNCT
can-495	36	1	mikroshlify	mikroshlify	VERB
can-495	36	2	of	of	ADP
can-495	36	3	this	this	DET
can-495	36	4	sample	sample	NOUN
can-495	36	5	reflect	reflect	VERB
can-495	36	6	existence	existence	NOUN
can-495	36	7	of	of	ADP
can-495	36	8	the	the	DET
can-495	36	9	strengthened	strengthen	VERB
can-495	36	10	layer	layer	NOUN
can-495	36	11	with	with	ADP
can-495	36	12	depth	depth	NOUN
can-495	36	13	of	of	ADP
can-495	36	14	hn	hn	PROPN
can-495	36	15	≈	≈	PROPN
can-495	36	16	4,5	4,5	NUM
can-495	36	17	microns	micron	NOUN
can-495	36	18	and	and	CCONJ
can-495	36	19	un	un	PROPN
can-495	36	20			PROPN
can-495	36	21	13,5	13,5	NUM
can-495	36	22	%	%	NOUN
can-495	36	23	.	.	PUNCT
can-495	37	1	on	on	ADP
can-495	37	2	a	a	DET
can-495	37	3	surface	surface	NOUN
can-495	37	4	of	of	ADP
can-495	37	5	a	a	DET
can-495	37	6	detail	detail	NOUN
can-495	37	7	there	there	PRON
can-495	37	8	are	be	VERB
can-495	37	9	no	no	DET
can-495	37	10	microcracks	microcrack	NOUN
can-495	37	11	and	and	CCONJ
can-495	37	12	a	a	DET
can-495	37	13	mikrorastravlivaniye	mikrorastravlivaniye	NOUN
can-495	37	14	on	on	ADP
can-495	37	15	borders	border	NOUN
can-495	37	16	of	of	ADP
can-495	37	17	grains	grain	NOUN
can-495	37	18	in	in	ADP
can-495	37	19	the	the	DET
can-495	37	20	strengthened	strengthen	VERB
can-495	37	21	layer	layer	NOUN
can-495	37	22	.	.	PUNCT
can-495	38	1	it	it	PRON
can-495	38	2	demonstrates	demonstrate	VERB
can-495	38	3	presence	presence	NOUN
can-495	38	4	of	of	ADP
can-495	38	5	the	the	DET
can-495	38	6	squeezing	squeeze	VERB
can-495	38	7	residual	residual	ADJ
can-495	38	8	tension	tension	NOUN
can-495	38	9	which	which	PRON
can-495	38	10	increases	increase	VERB
can-495	38	11	the	the	DET
can-495	38	12	fatigue	fatigue	NOUN
can-495	38	13	durability	durability	NOUN
can-495	38	14	of	of	ADP
can-495	38	15	a	a	DET
can-495	38	16	detail	detail	NOUN
can-495	38	17	.	.	PUNCT
can-495	39	1	the	the	DET
can-495	39	2	performed	perform	VERB
can-495	39	3	measurement	measurement	NOUN
can-495	39	4	of	of	ADP
can-495	39	5	microhardness	microhardness	NOUN
can-495	39	6	,	,	PUNCT
can-495	39	7	showed	show	VERB
can-495	39	8	that	that	SCONJ
can-495	39	9	unlike	unlike	ADP
can-495	39	10	not	not	PART
can-495	39	11	changed	change	VERB
can-495	39	12	state	state	NOUN
can-495	39	13	(	(	PUNCT
can-495	39	14	34.5	34.5	NUM
can-495	39	15	hrce	hrce	NOUN
can-495	39	16	)	)	PUNCT
can-495	39	17	it	it	PRON
can-495	39	18	increased	increase	VERB
can-495	39	19	due	due	ADP
can-495	39	20	to	to	ADP
can-495	39	21	processing	process	VERB
can-495	39	22	up	up	ADP
can-495	39	23	to	to	ADP
can-495	39	24	the	the	DET
can-495	39	25	size	size	NOUN
can-495	39	26	of	of	ADP
can-495	39	27	39.5	39.5	NUM
can-495	39	28	hrce	hrce	NOUN
can-495	39	29	.	.	PUNCT
can-495	40	1	a	a	DET
can-495	40	2	b	b	NOUN
can-495	40	3	3	3	NUM
can-495	40	4	c	c	NOUN
can-495	40	5	d	d	NOUN
can-495	40	6	figure	figure	NOUN
can-495	40	7	1	1	NUM
can-495	40	8	:	:	PUNCT
can-495	40	9	results	result	NOUN
can-495	40	10	of	of	ADP
can-495	40	11	a	a	DET
can-495	40	12	research	research	NOUN
can-495	40	13	of	of	ADP
can-495	40	14	a	a	DET
can-495	40	15	blanket	blanket	NOUN
can-495	40	16	of	of	ADP
can-495	40	17	the	the	DET
can-495	40	18	detail	detail	NOUN
can-495	40	19	subjected	subject	VERB
can-495	40	20	to	to	ADP
can-495	40	21	elektrokhimikomekhanichesky	elektrokhimikomekhanichesky	ADJ
can-495	40	22	processing	processing	NOUN
can-495	40	23	with	with	ADP
can-495	40	24	use	use	NOUN
can-495	40	25	of	of	ADP
can-495	40	26	a	a	DET
can-495	40	27	filler	filler	NOUN
can-495	40	28	and	and	CCONJ
can-495	40	29	imposing	imposing	NOUN
can-495	40	30	of	of	ADP
can-495	40	31	electric	electric	ADJ
can-495	40	32	field	field	NOUN
can-495	40	33	:	:	PUNCT
can-495	40	34	a	a	DET
can-495	40	35	steel	steel	NOUN
can-495	40	36	40xh2ma	40xh2ma	NOUN
can-495	40	37	before	before	ADP
can-495	40	38	processing	processing	NOUN
can-495	40	39	(	(	PUNCT
can-495	40	40	increase	increase	NOUN
can-495	40	41	by	by	ADP
can-495	40	42	200	200	NUM
can-495	40	43	times	time	NOUN
can-495	40	44	)	)	PUNCT
can-495	40	45	;	;	PUNCT
can-495	40	46	b	b	X
can-495	40	47	steel	steel	NOUN
can-495	40	48	40xh2ma	40xh2ma	PROPN
can-495	40	49	after	after	ADP
can-495	40	50	processing	processing	NOUN
can-495	40	51	(	(	PUNCT
can-495	40	52	increase	increase	NOUN
can-495	40	53	by	by	ADP
can-495	40	54	200	200	NUM
can-495	40	55	times	time	NOUN
can-495	40	56	)	)	PUNCT
can-495	40	57	;	;	PUNCT
can-495	40	58	c	c	X
can-495	40	59	,	,	PUNCT
can-495	40	60	d	d	PRON
can-495	40	61	steel	steel	NOUN
can-495	40	62	38h2mya	38h2mya	ADV
can-495	40	63	after	after	ADP
can-495	40	64	processing	processing	NOUN
can-495	40	65	(	(	PUNCT
can-495	40	66	increase	increase	NOUN
can-495	40	67	in	in	ADP
can-495	40	68	200	200	NUM
can-495	40	69	and	and	CCONJ
can-495	40	70	320	320	NUM
can-495	40	71	times	time	NOUN
can-495	40	72	)	)	PUNCT
can-495	40	73	the	the	DET
can-495	40	74	research	research	NOUN
can-495	40	75	of	of	ADP
can-495	40	76	an	an	DET
can-495	40	77	external	external	ADJ
can-495	40	78	surface	surface	NOUN
can-495	40	79	of	of	ADP
can-495	40	80	the	the	DET
can-495	40	81	samples	sample	NOUN
can-495	40	82	characterized	characterize	VERB
can-495	40	83	earlier	early	ADV
can-495	40	84	at	at	ADP
can-495	40	85	various	various	ADJ
can-495	40	86	sizes	size	NOUN
can-495	40	87	of	of	ADP
can-495	40	88	an	an	DET
can-495	40	89	interelectrode	interelectrode	ADJ
can-495	40	90	interval	interval	NOUN
can-495	40	91	(	(	PUNCT
can-495	40	92	mep	mep	PROPN
can-495	40	93	)	)	PUNCT
can-495	40	94	was	be	AUX
can-495	40	95	made	make	VERB
can-495	40	96	for	for	ADP
can-495	40	97	visual	visual	ADJ
can-495	40	98	assessment	assessment	NOUN
can-495	40	99	of	of	ADP
can-495	40	100	results	result	NOUN
can-495	40	101	of	of	ADP
can-495	40	102	the	the	DET
can-495	40	103	combined	combined	ADJ
can-495	40	104	processing	processing	NOUN
can-495	40	105	with	with	ADP
can-495	40	106	use	use	NOUN
can-495	40	107	of	of	ADP
can-495	40	108	a	a	DET
can-495	40	109	firm	firm	ADJ
can-495	40	110	conducting	conduct	VERB
can-495	40	111	filler	filler	NOUN
can-495	40	112	.	.	PUNCT
can-495	41	1	photos	photo	NOUN
can-495	41	2	of	of	ADP
can-495	41	3	an	an	DET
can-495	41	4	external	external	ADJ
can-495	41	5	surface	surface	NOUN
can-495	41	6	of	of	ADP
can-495	41	7	samples	sample	NOUN
can-495	41	8	from	from	ADP
can-495	41	9	steel	steel	NOUN
can-495	41	10	38h2myua	38h2myua	PROPN
can-495	41	11	are	be	AUX
can-495	41	12	presented	present	VERB
can-495	41	13	in	in	ADP
can-495	41	14	fig	fig	NOUN
can-495	41	15	.	.	PUNCT
can-495	42	1	2	2	X
can-495	42	2	.	.	X
can-495	42	3	the	the	DET
can-495	42	4	appearance	appearance	NOUN
can-495	42	5	of	of	ADP
can-495	42	6	a	a	DET
can-495	42	7	surface	surface	NOUN
can-495	42	8	of	of	ADP
can-495	42	9	samples	sample	NOUN
can-495	42	10	from	from	ADP
can-495	42	11	steel	steel	NOUN
can-495	42	12	40xh2ma	40xh2ma	PROPN
can-495	42	13	received	receive	VERB
can-495	42	14	at	at	ADP
can-495	42	15	change	change	NOUN
can-495	42	16	of	of	ADP
can-495	42	17	size	size	NOUN
can-495	42	18	mep	mep	PROPN
can-495	42	19	from	from	ADP
can-495	42	20	40	40	NUM
can-495	42	21	to	to	PART
can-495	42	22	70	70	NUM
can-495	42	23	mm	mm	NOUN
can-495	42	24	is	be	AUX
can-495	42	25	given	give	VERB
can-495	42	26	in	in	ADP
can-495	42	27	fig	fig	NOUN
can-495	42	28	.	.	PUNCT
can-495	43	1	3	3	NUM
can-495	43	2	,	,	PUNCT
can-495	43	3	other	other	ADJ
can-495	43	4	technological	technological	ADJ
can-495	43	5	modes	mode	NOUN
can-495	43	6	of	of	ADP
can-495	43	7	processing	processing	NOUN
can-495	43	8	when	when	SCONJ
can-495	43	9	carrying	carry	VERB
can-495	43	10	out	out	ADP
can-495	43	11	an	an	DET
can-495	43	12	experiment	experiment	NOUN
can-495	43	13	did	do	AUX
can-495	43	14	not	not	PART
can-495	43	15	change	change	VERB
can-495	43	16	.	.	PUNCT
can-495	44	1	the	the	DET
can-495	44	2	analysis	analysis	NOUN
can-495	44	3	of	of	ADP
can-495	44	4	these	these	DET
can-495	44	5	surfaces	surface	NOUN
can-495	44	6	allows	allow	VERB
can-495	44	7	to	to	PART
can-495	44	8	draw	draw	VERB
can-495	44	9	a	a	DET
can-495	44	10	conclusion	conclusion	NOUN
can-495	44	11	that	that	SCONJ
can-495	44	12	when	when	SCONJ
can-495	44	13	processing	process	VERB
can-495	44	14	with	with	ADP
can-495	44	15	a	a	DET
can-495	44	16	filler	filler	NOUN
can-495	44	17	there	there	PRON
can-495	44	18	is	be	VERB
can-495	44	19	no	no	DET
can-495	44	20	rastravlivaniye	rastravlivaniye	NOUN
can-495	44	21	on	on	ADP
can-495	44	22	borders	border	NOUN
can-495	44	23	of	of	ADP
can-495	44	24	grains	grain	NOUN
can-495	44	25	of	of	ADP
can-495	44	26	material	material	NOUN
can-495	44	27	of	of	ADP
can-495	44	28	a	a	DET
can-495	44	29	detail	detail	NOUN
can-495	44	30	.	.	PUNCT
can-495	45	1	some	some	DET
can-495	45	2	decrease	decrease	NOUN
can-495	45	3	in	in	ADP
can-495	45	4	size	size	NOUN
can-495	45	5	of	of	ADP
can-495	45	6	a	a	DET
can-495	45	7	roughness	roughness	NOUN
can-495	45	8	of	of	ADP
can-495	45	9	a	a	DET
can-495	45	10	surface	surface	NOUN
can-495	45	11	of	of	ADP
can-495	45	12	a	a	DET
can-495	45	13	detail	detail	NOUN
can-495	45	14	at	at	ADP
can-495	45	15	increase	increase	NOUN
can-495	45	16	in	in	ADP
can-495	45	17	mep	mep	PROPN
can-495	45	18	can	can	AUX
can-495	45	19	be	be	AUX
can-495	45	20	explained	explain	VERB
can-495	45	21	with	with	ADP
can-495	45	22	decrease	decrease	NOUN
can-495	45	23	in	in	ADP
can-495	45	24	amount	amount	NOUN
can-495	45	25	of	of	ADP
can-495	45	26	total	total	ADJ
can-495	45	27	energy	energy	NOUN
can-495	45	28	of	of	ADP
can-495	45	29	the	the	DET
can-495	45	30	working	work	VERB
can-495	45	31	environment	environment	NOUN
can-495	45	32	participating	participate	VERB
can-495	45	33	in	in	ADP
can-495	45	34	a	a	DET
can-495	45	35	shaping	shaping	NOUN
can-495	45	36	.	.	PUNCT
can-495	46	1	similar	similar	ADJ
can-495	46	2	experiments	experiment	NOUN
can-495	46	3	were	be	AUX
can-495	46	4	made	make	VERB
can-495	46	5	for	for	ADP
can-495	46	6	other	other	ADJ
can-495	46	7	processed	process	VERB
can-495	46	8	materials	material	NOUN
can-495	46	9	.	.	PUNCT
can-495	47	1	figure	figure	NOUN
can-495	47	2	2	2	NUM
can-495	47	3	:	:	PUNCT
can-495	48	1	shlif	shlif	PROPN
can-495	48	2	is	be	AUX
can-495	48	3	exemplary	exemplary	ADJ
can-495	48	4	from	from	ADP
can-495	48	5	steel	steel	NOUN
can-495	48	6	38h2myaafter	38h2myaafter	PRON
can-495	48	7	ehmp	ehmp	NOUN
can-495	48	8	at	at	ADP
can-495	48	9	various	various	ADJ
can-495	48	10	sizes	size	NOUN
can-495	48	11	mep	mep	PROPN
can-495	48	12	:	:	PUNCT
can-495	48	13	a	a	DET
can-495	48	14	–	–	PUNCT
can-495	48	15	size	size	NOUN
can-495	48	16	mep	mep	PROPN
can-495	48	17	is	be	AUX
can-495	48	18	35	35	NUM
can-495	48	19	–	–	SYM
can-495	48	20	40	40	NUM
can-495	48	21	mm	mm	NOUN
can-495	48	22	;	;	PUNCT
can-495	48	23	b	b	X
can-495	48	24	–	–	PUNCT
can-495	48	25	size	size	NOUN
can-495	48	26	mep	mep	PROPN
can-495	48	27	–	–	PUNCT
can-495	48	28	70	70	NUM
can-495	48	29	–	–	SYM
can-495	48	30	75	75	NUM
can-495	48	31	mm	mm	NOUN
can-495	48	32	(	(	PUNCT
can-495	48	33	increase	increase	NOUN
can-495	48	34	in	in	ADP
can-495	48	35	300	300	NUM
can-495	48	36	times	time	NOUN
can-495	48	37	)	)	PUNCT
can-495	48	38	figure	figure	NOUN
can-495	48	39	3	3	NUM
can-495	48	40	:	:	PUNCT
can-495	48	41	shlifa	shlifa	NOUN
can-495	48	42	of	of	ADP
can-495	48	43	samples	sample	NOUN
can-495	48	44	from	from	ADP
can-495	48	45	steel	steel	NOUN
can-495	48	46	40xh2ma	40xh2ma	PROPN
can-495	48	47	after	after	ADP
can-495	48	48	ehmo	ehmo	NOUN
can-495	48	49	at	at	ADP
can-495	48	50	various	various	ADJ
can-495	48	51	sizes	size	NOUN
can-495	48	52	mep	mep	PROPN
can-495	48	53	:	:	PUNCT
can-495	48	54	a	a	DET
can-495	48	55	–	–	PUNCT
can-495	48	56	size	size	NOUN
can-495	48	57	mep	mep	PROPN
can-495	48	58	is	be	AUX
can-495	48	59	40	40	NUM
can-495	48	60	42	42	NUM
can-495	48	61	mm	mm	NOUN
can-495	48	62	;	;	PUNCT
can-495	48	63	b	b	X
can-495	48	64	–	–	PUNCT
can-495	48	65	size	size	NOUN
can-495	48	66	mep	mep	PROPN
can-495	48	67	–	–	PUNCT
can-495	48	68	70	70	NUM
can-495	48	69	71	71	NUM
can-495	48	70	mm	mm	NOUN
can-495	48	71	(	(	PUNCT
can-495	48	72	increase	increase	VERB
can-495	48	73	in	in	ADP
can-495	48	74	300	300	NUM
can-495	48	75	times	time	NOUN
can-495	48	76	)	)	PUNCT
can-495	48	77	4	4	NUM
can-495	48	78	.	.	PUNCT
can-495	48	79	conclusion	conclusion	NOUN
can-495	48	80	to	to	ADP
can-495	48	81	the	the	DET
can-495	48	82	main	main	ADJ
can-495	48	83	scientific	scientific	ADJ
can-495	48	84	results	result	NOUN
can-495	48	85	,	,	PUNCT
can-495	48	86	the	the	DET
can-495	48	87	received	receive	VERB
can-495	48	88	authors	author	NOUN
can-495	48	89	,	,	PUNCT
can-495	48	90	it	it	PRON
can-495	48	91	is	be	AUX
can-495	48	92	necessary	necessary	ADJ
can-495	48	93	to	to	PART
can-495	48	94	carry	carry	VERB
can-495	48	95	:	:	PUNCT
can-495	48	96	elements	element	NOUN
can-495	48	97	of	of	ADP
can-495	48	98	the	the	DET
can-495	48	99	theory	theory	NOUN
can-495	48	100	of	of	ADP
can-495	48	101	nanotransformations	nanotransformation	NOUN
can-495	48	102	and	and	CCONJ
can-495	48	103	the	the	DET
can-495	48	104	method	method	NOUN
can-495	48	105	of	of	ADP
can-495	48	106	a	a	DET
can-495	48	107	dimensional	dimensional	ADJ
can-495	48	108	shaping	shaping	NOUN
can-495	48	109	based	base	VERB
can-495	48	110	by	by	ADP
can-495	48	111	complex	complex	ADJ
can-495	48	112	influence	influence	NOUN
can-495	48	113	on	on	ADP
can-495	48	114	a	a	DET
can-495	48	115	nanolevel	nanolevel	NOUN
can-495	48	116	of	of	ADP
can-495	48	117	the	the	DET
can-495	48	118	electric	electric	ADJ
can-495	48	119	field	field	NOUN
can-495	48	120	providing	provide	VERB
can-495	48	121	electrochemical	electrochemical	ADJ
can-495	48	122	dissolution	dissolution	NOUN
can-495	48	123	of	of	ADP
can-495	48	124	nanolayers	nanolayer	NOUN
can-495	48	125	of	of	ADP
can-495	48	126	an	an	DET
can-495	48	127	allowance	allowance	NOUN
can-495	48	128	,	,	PUNCT
can-495	48	129	and	and	CCONJ
can-495	48	130	untied	untied	ADJ
can-495	48	131	granules	granule	NOUN
can-495	48	132	of	of	ADP
can-495	48	133	the	the	DET
can-495	48	134	tool	tool	NOUN
can-495	48	135	;	;	PUNCT
can-495	48	136	а	а	PROPN
can-495	48	137	а	а	PROPN
can-495	48	138	4	4	NUM
can-495	48	139	justification	justification	NOUN
can-495	48	140	of	of	ADP
can-495	48	141	influence	influence	NOUN
can-495	48	142	of	of	ADP
can-495	48	143	the	the	DET
can-495	48	144	dimensional	dimensional	ADJ
can-495	48	145	combined	combined	ADJ
can-495	48	146	processing	processing	NOUN
can-495	48	147	with	with	ADP
can-495	48	148	a	a	DET
can-495	48	149	filler	filler	NOUN
can-495	48	150	on	on	ADP
can-495	48	151	change	change	NOUN
can-495	48	152	of	of	ADP
can-495	48	153	nanostructure	nanostructure	NOUN
can-495	48	154	of	of	ADP
can-495	48	155	a	a	DET
can-495	48	156	blanket	blanket	NOUN
can-495	48	157	of	of	ADP
can-495	48	158	a	a	DET
can-495	48	159	detail	detail	NOUN
can-495	48	160	that	that	PRON
can-495	48	161	provides	provide	VERB
can-495	48	162	high	high	ADJ
can-495	48	163	-	-	PUNCT
can-495	48	164	quality	quality	NOUN
can-495	48	165	preparation	preparation	NOUN
can-495	48	166	of	of	ADP
can-495	48	167	a	a	DET
can-495	48	168	surface	surface	NOUN
can-495	48	169	under	under	ADP
can-495	48	170	anode	anode	NOUN
can-495	48	171	removal	removal	NOUN
can-495	48	172	of	of	ADP
can-495	48	173	an	an	DET
can-495	48	174	allowance	allowance	NOUN
can-495	48	175	at	at	ADP
can-495	48	176	achievement	achievement	NOUN
can-495	48	177	of	of	ADP
can-495	48	178	the	the	DET
can-495	48	179	set	set	ADJ
can-495	48	180	characteristics	characteristic	NOUN
can-495	48	181	of	of	ADP
can-495	48	182	quality	quality	NOUN
can-495	48	183	of	of	ADP
can-495	48	184	a	a	DET
can-495	48	185	blanket	blanket	NOUN
can-495	48	186	providing	provide	VERB
can-495	48	187	increase	increase	NOUN
can-495	48	188	in	in	ADP
can-495	48	189	operational	operational	ADJ
can-495	48	190	properties	property	NOUN
can-495	48	191	of	of	ADP
can-495	48	192	products	product	NOUN
can-495	48	193	;	;	PUNCT
can-495	48	194	the	the	DET
can-495	48	195	practical	practical	ADJ
can-495	48	196	value	value	NOUN
can-495	48	197	of	of	ADP
can-495	48	198	researches	research	NOUN
can-495	48	199	consists	consist	VERB
can-495	48	200	in	in	ADP
can-495	48	201	:	:	PUNCT
can-495	48	202	1	1	X
can-495	48	203	.	.	X
can-495	48	204	creation	creation	NOUN
can-495	48	205	of	of	ADP
can-495	48	206	process	process	NOUN
can-495	48	207	of	of	ADP
can-495	48	208	the	the	DET
can-495	48	209	dimensional	dimensional	ADJ
can-495	48	210	shaping	shaping	NOUN
can-495	48	211	of	of	ADP
can-495	48	212	details	detail	NOUN
can-495	48	213	of	of	ADP
can-495	48	214	conducting	conduct	VERB
can-495	48	215	materials	material	NOUN
can-495	48	216	which	which	PRON
can-495	48	217	allowed	allow	VERB
can-495	48	218	to	to	PART
can-495	48	219	expand	expand	VERB
can-495	48	220	the	the	DET
can-495	48	221	field	field	NOUN
can-495	48	222	of	of	ADP
can-495	48	223	technological	technological	ADJ
can-495	48	224	use	use	NOUN
can-495	48	225	of	of	ADP
can-495	48	226	electrochemical	electrochemical	ADJ
can-495	48	227	processing	processing	NOUN
can-495	48	228	with	with	ADP
can-495	48	229	a	a	DET
can-495	48	230	firm	firm	ADJ
can-495	48	231	conducting	conduct	VERB
can-495	48	232	filler	filler	NOUN
can-495	48	233	on	on	ADP
can-495	48	234	a	a	DET
can-495	48	235	dimensional	dimensional	ADJ
can-495	48	236	shaping	shaping	NOUN
can-495	48	237	of	of	ADP
can-495	48	238	surfaces	surface	NOUN
can-495	48	239	of	of	ADP
can-495	48	240	various	various	ADJ
can-495	48	241	profile	profile	NOUN
can-495	48	242	,	,	PUNCT
can-495	48	243	remote	remote	ADJ
can-495	48	244	for	for	ADP
can-495	48	245	the	the	DET
can-495	48	246	tool	tool	NOUN
can-495	48	247	.	.	PUNCT
can-495	49	1	2	2	X
can-495	49	2	.	.	X
can-495	49	3	implementation	implementation	NOUN
can-495	49	4	dimensional	dimensional	ADJ
can-495	49	5	a	a	DET
can-495	49	6	shaping	shaping	NOUN
can-495	49	7	of	of	ADP
can-495	49	8	details	detail	NOUN
can-495	49	9	of	of	ADP
can-495	49	10	difficult	difficult	ADJ
can-495	49	11	geometry	geometry	NOUN
can-495	49	12	with	with	ADP
can-495	49	13	obtaining	obtain	VERB
can-495	49	14	the	the	DET
can-495	49	15	required	required	ADJ
can-495	49	16	characteristics	characteristic	NOUN
can-495	49	17	of	of	ADP
can-495	49	18	quality	quality	NOUN
can-495	49	19	of	of	ADP
can-495	49	20	a	a	DET
can-495	49	21	blanket	blanket	NOUN
can-495	49	22	that	that	PRON
can-495	49	23	gives	give	VERB
can-495	49	24	the	the	DET
can-495	49	25	chance	chance	NOUN
can-495	49	26	to	to	PART
can-495	49	27	raise	raise	VERB
can-495	49	28	operational	operational	ADJ
can-495	49	29	characteristics	characteristic	NOUN
can-495	49	30	of	of	ADP
can-495	49	31	products	product	NOUN
can-495	49	32	.	.	PUNCT
can-495	50	1	3	3	X
can-495	50	2	.	.	X
can-495	50	3	creation	creation	NOUN
can-495	50	4	of	of	ADP
can-495	50	5	technological	technological	ADJ
can-495	50	6	processes	process	NOUN
can-495	50	7	of	of	ADP
can-495	50	8	a	a	DET
can-495	50	9	dimensional	dimensional	ADJ
can-495	50	10	shaping	shaping	NOUN
can-495	50	11	of	of	ADP
can-495	50	12	the	the	DET
can-495	50	13	surfaces	surface	NOUN
can-495	50	14	,	,	PUNCT
can-495	50	15	remote	remote	ADJ
can-495	50	16	for	for	ADP
can-495	50	17	the	the	DET
can-495	50	18	integral	integral	ADJ
can-495	50	19	tool	tool	NOUN
can-495	50	20	,	,	PUNCT
can-495	50	21	which	which	PRON
can-495	50	22	allowed	allow	VERB
can-495	50	23	the	the	DET
can-495	50	24	technologist	technologist	NOUN
can-495	50	25	to	to	ADP
can-495	50	26	the	the	DET
can-495	50	27	mechanician	mechanician	NOUN
can-495	50	28	to	to	PART
can-495	50	29	expand	expand	VERB
can-495	50	30	the	the	DET
can-495	50	31	knowledge	knowledge	NOUN
can-495	50	32	base	base	NOUN
can-495	50	33	on	on	ADP
can-495	50	34	ehmo	ehmo	NOUN
can-495	50	35	with	with	ADP
can-495	50	36	a	a	DET
can-495	50	37	firm	firm	ADJ
can-495	50	38	conducting	conduct	VERB
can-495	50	39	filler	filler	NOUN
can-495	50	40	.	.	PUNCT
can-495	51	1	4	4	X
can-495	51	2	.	.	X
can-495	51	3	implementation	implementation	NOUN
can-495	51	4	of	of	ADP
can-495	51	5	the	the	DET
can-495	51	6	technology	technology	NOUN
can-495	51	7	solution	solution	NOUN
can-495	51	8	of	of	ADP
can-495	51	9	a	a	DET
can-495	51	10	problem	problem	NOUN
can-495	51	11	of	of	ADP
can-495	51	12	dimensional	dimensional	ADJ
can-495	51	13	processing	processing	NOUN
can-495	51	14	of	of	ADP
can-495	51	15	surfaces	surface	NOUN
can-495	51	16	of	of	ADP
can-495	51	17	the	the	DET
can-495	51	18	details	detail	NOUN
can-495	51	19	located	locate	VERB
can-495	51	20	under	under	ADP
can-495	51	21	a	a	DET
can-495	51	22	negative	negative	ADJ
can-495	51	23	corner	corner	NOUN
can-495	51	24	to	to	ADP
can-495	51	25	an	an	DET
can-495	51	26	axis	axis	NOUN
can-495	51	27	of	of	ADP
can-495	51	28	symmetry	symmetry	NOUN
can-495	51	29	of	of	ADP
can-495	51	30	a	a	DET
can-495	51	31	stream	stream	NOUN
can-495	51	32	of	of	ADP
can-495	51	33	a	a	DET
can-495	51	34	working	work	VERB
can-495	51	35	environment	environment	NOUN
can-495	51	36	(	(	PUNCT
can-495	51	37	the	the	DET
can-495	51	38	patent	patent	NOUN
can-495	51	39	of	of	ADP
can-495	51	40	russia[1	russia[1	NOUN
can-495	51	41	]	]	PUNCT
can-495	51	42	)	)	PUNCT
can-495	51	43	and	and	CCONJ
can-495	51	44	thin	thin	ADJ
can-495	51	45	-	-	PUNCT
can-495	51	46	walled	walled	ADJ
can-495	51	47	details	detail	NOUN
can-495	51	48	(	(	PUNCT
can-495	51	49	the	the	DET
can-495	51	50	patent	patent	NOUN
can-495	51	51	of	of	ADP
can-495	51	52	russia[2	russia[2	NOUN
can-495	51	53	]	]	PUNCT
can-495	51	54	)	)	PUNCT
can-495	51	55	.	.	PUNCT
can-495	52	1	references	reference	NOUN
can-495	52	2	1	1	NUM
can-495	52	3	.	.	PUNCT
can-495	53	1	patent	patent	NOUN
can-495	53	2	of	of	ADP
can-495	53	3	russia	russia	PROPN
can-495	53	4	no	no	PROPN
can-495	53	5	.	.	PUNCT
can-495	53	6	2166417	2166417	NUM
can-495	53	7	.	.	PUNCT
can-495	54	1	the	the	DET
can-495	54	2	device	device	NOUN
can-495	54	3	for	for	ADP
can-495	54	4	the	the	DET
can-495	54	5	combined	combine	VERB
can-495	54	6	electroprocessing	electroprocessing	NOUN
can-495	54	7	/смоленцев	/смоленцев	PUNCT
can-495	55	1	вп	вп	NOUN
can-495	55	2	,	,	PUNCT
can-495	55	3	kuzovkin	kuzovkin	PROPN
can-495	55	4	av	av	PROPN
can-495	55	5	,	,	PUNCT
can-495	55	6	boldyrev	boldyrev	PROPN
can-495	55	7	ai	ai	VERB
can-495	55	8	,	,	PUNCT
can-495	55	9	smolentsev	smolentsev	VERB
can-495	55	10	gp//byul.izobr	gp//byul.izobr	PROPN
can-495	55	11	.	.	PROPN
can-495	55	12	,	,	PUNCT
can-495	55	13	2001	2001	NUM
can-495	55	14	,	,	PUNCT
can-495	55	15	no	no	INTJ
can-495	55	16	.	.	NOUN
can-495	55	17	13	13	NUM
can-495	55	18	.	.	X
can-495	56	1	2	2	X
can-495	56	2	.	.	X
can-495	56	3	patent	patent	NOUN
can-495	56	4	of	of	ADP
can-495	56	5	russia	russia	PROPN
can-495	56	6	no	no	INTJ
can-495	56	7	.	.	PUNCT
can-495	56	8	2072281	2072281	NUM
can-495	56	9	.	.	PUNCT
can-495	57	1	a	a	DET
can-495	57	2	filler	filler	NOUN
can-495	57	3	granule	granule	NOUN
can-495	57	4	for	for	ADP
can-495	57	5	the	the	DET
can-495	57	6	combined	combine	VERB
can-495	57	7	electroprocessing	electroprocessing	NOUN
can-495	57	8	/смоленцев	/смоленцев	PUNCT
can-495	58	1	вп	вп	NOUN
can-495	58	2	,	,	PUNCT
can-495	58	3	boldyrev	boldyrev	X
can-495	58	4	ai	ai	VERB
can-495	58	5	,	,	PUNCT
can-495	58	6	kuzovkin	kuzovkin	PROPN
can-495	58	7	av//byul.izobr	av//byul.izobr	PROPN
can-495	58	8	.	.	PROPN
can-495	58	9	,	,	PUNCT
can-495	58	10	1997	1997	NUM
can-495	58	11	,	,	PUNCT
can-495	58	12	no	no	INTJ
can-495	58	13	.	.	NOUN
can-495	59	1	3	3	X
can-495	59	2	.	.	PUNCT