id	keyword
can-11613	plasma
can-11613	doi
can-11613	nitride
can-11613	boron
can-11613	ag gt)20
can-11613	surface
can-11613	nanosheets
can-11613	figure
can-11613	exposure
can-11613	time
can-11613	gt)10
can-11613	ag gt)15
can-11613	materials
can-11613	bnns
can-11613	size
can-11613	boron nitride
can-11613	growth