id	author	title	date	pages	extension	mime	words	sentence	flesch	summary	cache	txt
cet-2662	Li, Xin; Miao, Hui; Zhu, Hongping	Deposition and Characterization of Diamond-like Carbon Films by Electron Cyclotron Resonance Microwave Plasma Enhanced Unbalanced Magnetron Sputtering	2018	6	.pdf	application/pdf	3395	155	55	Phys. Rev., 5, 3482-3487, DOI: 10.1016/0925-9635(94)05204-2 Habibi, S.M. Mousavi K., 2017, Raman spectroscopy of thin DLC film deposited by plasma electrolysis process, Surface & Coatings Technology, 309, 945–950, DOI: 10.1016/j.surfcoat.2016.10.056 Johnston G.P., Tiwari P., Rej D.J., 1994, Preparation of diamond like carbon films by high-intensity pulsed-ion- beam deposition, Journal of Applied Physics, 76, 5949-5945. Figure 7: Surface morphology of DLC films under different bias 4.4 Formation mechanism of DLC film For the mechanism of DLC film formation using PVD, Robertson J. (Robertson, 2002) proposed the subplantation model.	cache/cet-2662.pdf	txt/cet-2662.txt