id	sid	eid	entity	type
cet-2662	1	1	microsoft	ORG
cet-2662	2	1	66, 2018	DATE
cet-2662	2	2	the italian association of chemical	ORG
cet-2662	2	3	zhao	PERSON
cet-2662	2	4	yougang sun	PERSON
cet-2662	2	5	zhou	PERSON
cet-2662	3	1	2018	DATE
cet-2662	3	2	aidic servizi s.r.l	ORG
cet-2662	4	1	978	CARDINAL
cet-2662	4	2	63	CARDINAL
cet-2662	4	3	issn 2283-9216	PERSON
cet-2662	4	4	xin li*	PERSON
cet-2662	4	5	hui miao	PERSON
cet-2662	4	6	hongping zhu shenyang university of technology	ORG
cet-2662	4	7	shenyang 110870	ORG
cet-2662	4	8	china	GPE
cet-2662	7	1	50	CARDINAL
cet-2662	7	2	150 mm	QUANTITY
cet-2662	9	1	1	CARDINAL
cet-2662	9	2	lin et al.	PERSON
cet-2662	9	3	2017	DATE
cet-2662	10	1	zhang et al.	PERSON
cet-2662	10	2	2016	DATE
cet-2662	10	3	habibi et al.	PERSON
cet-2662	10	4	2017	DATE
cet-2662	11	1	mahmud et al.	PERSON
cet-2662	11	2	2015	DATE
cet-2662	12	1	yamamoto et al.	PERSON
cet-2662	12	2	1993	DATE
cet-2662	17	1	2	CARDINAL
cet-2662	17	2	1	CARDINAL
cet-2662	18	1	1	CARDINAL
cet-2662	19	1	2	CARDINAL
cet-2662	19	2	1500	CARDINAL
cet-2662	19	3	w.	PERSON
cet-2662	19	4	3	CARDINAL
cet-2662	20	1	4	CARDINAL
cet-2662	21	1	two	CARDINAL
cet-2662	22	1	5	CARDINAL
cet-2662	23	1	6	CARDINAL
cet-2662	24	1	7	CARDINAL
cet-2662	25	1	80 cm	QUANTITY
cet-2662	25	2	80 cm	QUANTITY
cet-2662	29	1	2.45ghz	CARDINAL
cet-2662	29	2	two	CARDINAL
cet-2662	30	1	8.75×10−2	CARDINAL
cet-2662	30	2	10.3303	CARDINAL
cet-2662	30	3	li x.	PERSON
cet-2662	30	4	miao h.	ORG
cet-2662	30	5	zhu h.	PERSON
cet-2662	30	6	2018	DATE
cet-2662	30	7	66	CARDINAL
cet-2662	30	8	19	CARDINAL
cet-2662	30	9	19	CARDINAL
cet-2662	30	10	1	CARDINAL
cet-2662	30	11	2	CARDINAL
cet-2662	32	1	two	CARDINAL
cet-2662	32	2	2	CARDINAL
cet-2662	39	1	3	CARDINAL
cet-2662	40	1	100°	QUANTITY
cet-2662	40	2	50	CARDINAL
cet-2662	42	1	about 5	CARDINAL
cet-2662	43	1	30 min	DATE
cet-2662	46	1	1	CARDINAL
cet-2662	47	1	1	CARDINAL
cet-2662	47	2	ums	ORG
cet-2662	48	1	0.09	CARDINAL
cet-2662	48	2	0 300 150 ms-02 0.09 −300 −20	QUANTITY
cet-2662	48	3	300 150 ms-03 0.09 −300	QUANTITY
cet-2662	48	4	300 150 ms-04 0.09	QUANTITY
cet-2662	48	5	300 150 ms-05 0.09 −300	QUANTITY
cet-2662	48	6	300 200 ms-06 0.09	QUANTITY
cet-2662	48	7	300	CARDINAL
cet-2662	52	1	4.1	CARDINAL
cet-2662	53	1	20	CARDINAL
cet-2662	53	2	633	CARDINAL
cet-2662	53	3	514.5	CARDINAL
cet-2662	53	4	458	CARDINAL
cet-2662	55	1	σ	ORG
cet-2662	55	2	three	CARDINAL
cet-2662	57	1	2000	CARDINAL
cet-2662	58	1	514.5	CARDINAL
cet-2662	58	2	10mw–200mw	CARDINAL
cet-2662	58	3	2	CARDINAL
cet-2662	58	4	200cm−1-2000cm−1	CARDINAL
cet-2662	59	1	3	CARDINAL
cet-2662	59	2	ms-03	CARDINAL
cet-2662	59	3	3	CARDINAL
cet-2662	60	1	1100	CARDINAL
cet-2662	60	2	1700	CARDINAL
cet-2662	60	3	dilou et al.	PERSON
cet-2662	60	4	1984	DATE
cet-2662	61	1	two	CARDINAL
cet-2662	65	1	first	ORDINAL
cet-2662	65	2	1580	CARDINAL
cet-2662	66	1	1580	CARDINAL
cet-2662	66	2	carlo	ORG
cet-2662	66	3	2003	DATE
cet-2662	68	1	shi	PERSON
cet-2662	68	2	2001	DATE
cet-2662	70	1	4	CARDINAL
cet-2662	71	1	50	CARDINAL
cet-2662	76	1	200	CARDINAL
cet-2662	79	1	100 mm	QUANTITY
cet-2662	79	2	150 mm	QUANTITY
cet-2662	79	3	200 mm	QUANTITY
cet-2662	79	4	2.5	CARDINAL
cet-2662	79	5	2.3	CARDINAL
cet-2662	79	6	2.6	CARDINAL
cet-2662	80	1	150 mm	QUANTITY
cet-2662	83	1	50 mm	QUANTITY
cet-2662	83	2	250 mm	QUANTITY
cet-2662	84	1	50 mm	QUANTITY
cet-2662	85	1	21	CARDINAL
cet-2662	87	1	4	CARDINAL
cet-2662	87	2	4.2	CARDINAL
cet-2662	87	3	xps	ORG
cet-2662	87	4	xps	ORG
cet-2662	88	1	xps	ORG
cet-2662	89	1	xps	ORG
cet-2662	89	2	0.8	CARDINAL
cet-2662	89	3	80	CARDINAL
cet-2662	89	4	45°	QUANTITY
cet-2662	89	5	2.9×10−7 pa	GPE
cet-2662	89	6	8×8 mm	QUANTITY
cet-2662	89	7	about 4	CARDINAL
cet-2662	89	8	3.0	CARDINAL
cet-2662	89	9	25	CARDINAL
cet-2662	89	10	5	CARDINAL
cet-2662	89	11	xps	ORG
cet-2662	89	12	6	CARDINAL
cet-2662	89	13	5	CARDINAL
cet-2662	89	14	xps	ORG
cet-2662	92	1	xps	ORG
cet-2662	94	1	6	CARDINAL
cet-2662	95	1	three	CARDINAL
cet-2662	96	1	one	CARDINAL
cet-2662	96	2	about 284.7ev	CARDINAL
cet-2662	97	1	about 285.8ev	CARDINAL
cet-2662	97	2	sp3c	ORG
cet-2662	98	1	one	CARDINAL
cet-2662	98	2	288.6ev	CARDINAL
cet-2662	98	3	o	DATE
cet-2662	99	1	three	CARDINAL
cet-2662	100	1	johnston et al.	PERSON
cet-2662	100	2	1994	DATE
cet-2662	101	1	sp3c	ORG
cet-2662	101	2	32.3%	PERCENT
cet-2662	101	3	ms-03	CARDINAL
cet-2662	102	1	4.3	CARDINAL
cet-2662	102	2	1×1	CARDINAL
cet-2662	103	1	7	CARDINAL
cet-2662	105	1	20	CARDINAL
cet-2662	105	2	1.072	CARDINAL
cet-2662	106	1	100	CARDINAL
cet-2662	106	2	22	CARDINAL
cet-2662	106	3	0.662	CARDINAL
cet-2662	109	1	approximately 400	CARDINAL
cet-2662	110	1	7	CARDINAL
cet-2662	110	2	4.4	CARDINAL
cet-2662	110	3	robertson j. (robertson	PERSON
cet-2662	110	4	2002	DATE
cet-2662	111	1	8	CARDINAL
cet-2662	114	1	8	CARDINAL
cet-2662	115	1	20	CARDINAL
cet-2662	115	2	50	CARDINAL
cet-2662	115	3	20	CARDINAL
cet-2662	116	1	50	CARDINAL
cet-2662	118	1	d.r.	GPE
cet-2662	118	2	mckenzie	ORG
cet-2662	118	3	1993	DATE
cet-2662	118	4	approximately 50%	PERCENT
cet-2662	119	1	9	CARDINAL
cet-2662	120	1	berman simon	PERSON
cet-2662	121	1	robertson j	PERSON
cet-2662	121	2	robertson, 2002	ORG
cet-2662	121	3	berman simon	PERSON
cet-2662	122	1	23	CARDINAL
cet-2662	124	1	9	CARDINAL
cet-2662	124	2	berman-simon	PERSON
cet-2662	124	3	5	CARDINAL
cet-2662	126	1	xps	ORG
cet-2662	127	1	50	CARDINAL
cet-2662	127	2	150 mm	QUANTITY
cet-2662	129	1	the liaoning province education office	ORG
cet-2662	130	1	carlo f.,	PERSON
cet-2662	130	2	2003	DATE
cet-2662	130	3	14	CARDINAL
cet-2662	130	4	1154-1163	DATE
cet-2662	130	5	10.1016/0925-9635(94)05282	CARDINAL
cet-2662	130	6	dilou r.o.	PERSON
cet-2662	130	7	woollam j	PERSON
cet-2662	130	8	katkanant v.,	PERSON
cet-2662	130	9	1984	DATE
cet-2662	132	1	5	CARDINAL
cet-2662	132	2	3482-3487	DATE
cet-2662	132	3	10.1016/0925-9635(94)05204	CARDINAL
cet-2662	132	4	s.m.	GPE
cet-2662	132	5	mousavi k.	PERSON
cet-2662	132	6	2017	DATE
cet-2662	132	7	309	CARDINAL
cet-2662	132	8	945–950	CARDINAL
cet-2662	132	9	10.1016	CARDINAL
cet-2662	132	10	johnston g.p.	PERSON
cet-2662	132	11	tiwari	PERSON
cet-2662	133	1	rej d.j.	PERSON
cet-2662	133	2	1994	DATE
cet-2662	133	3	76	DATE
cet-2662	133	4	5949-5945	DATE
cet-2662	134	1	lin y.	PERSON
cet-2662	134	2	zia a.w.	PERSON
cet-2662	134	3	zhou z.	PERSON
cet-2662	134	4	shum p.w.	PERSON
cet-2662	134	5	2017	DATE
cet-2662	135	1	technol	ORG
cet-2662	135	2	320	CARDINAL
cet-2662	135	3	7	CARDINAL
cet-2662	135	4	mahmud	PERSON
cet-2662	136	1	k a.	PERSON
cet-2662	136	2	kalam m.	PERSON
cet-2662	136	3	masjuki h.	PERSON
cet-2662	136	4	2015	DATE
cet-2662	138	1	sci	ORG
cet-2662	139	1	40	CARDINAL
cet-2662	139	2	90	CARDINAL
cet-2662	140	1	d.r.	GPE
cet-2662	140	2	1993	DATE
cet-2662	140	3	journal of vacuum science & technology	ORG
cet-2662	140	4	1928-1035	DATE
cet-2662	141	1	1996	DATE
cet-2662	141	2	xps	ORG
cet-2662	141	3	290292	DATE
cet-2662	141	4	323	CARDINAL
cet-2662	142	1	robertson j.,	PERSON
cet-2662	142	2	2002	DATE
cet-2662	143	1	129-281	CARDINAL
cet-2662	144	1	shi j.r.	PERSON
cet-2662	144	2	sun z., 2001	PERSON
cet-2662	144	3	10	CARDINAL
cet-2662	144	4	76-81	DATE
cet-2662	145	1	yamamoto t.	PERSON
cet-2662	145	2	seki k.	PERSON
cet-2662	145	3	m., 1993	PERSON
cet-2662	145	4	62	CARDINAL
cet-2662	145	5	543	CARDINAL
cet-2662	146	1	zhang q.	PERSON
cet-2662	146	2	wang y.	PERSON
cet-2662	146	3	wang w.	PERSON
cet-2662	146	4	2016	DATE
cet-2662	147	1	commun	PERSON
cet-2662	148	1	63	DATE
cet-2662	148	2	22	CARDINAL
cet-2662	149	1	24	CARDINAL