id	sid	tid	token	lemma	pos
cet-12872	1	1	cet	cet	PROPN
cet-12872	1	2	96	96	NUM
cet-12872	1	3	doi	doi	NOUN
cet-12872	1	4	:	:	PUNCT
cet-12872	1	5	10.3303	10.3303	NUM
cet-12872	1	6	/	/	SYM
cet-12872	1	7	cet2296025	cet2296025	ADJ
cet-12872	1	8	paper	paper	NOUN
cet-12872	1	9	received	receive	VERB
cet-12872	1	10	:	:	PUNCT
cet-12872	1	11	18	18	NUM
cet-12872	1	12	january	january	PROPN
cet-12872	1	13	2022	2022	NUM
cet-12872	1	14	;	;	PUNCT
cet-12872	1	15	revised	revise	VERB
cet-12872	1	16	:	:	PUNCT
cet-12872	1	17	10	10	NUM
cet-12872	1	18	august	august	PROPN
cet-12872	1	19	2022	2022	NUM
cet-12872	1	20	;	;	PUNCT
cet-12872	1	21	accepted	accept	VERB
cet-12872	1	22	:	:	PUNCT
cet-12872	1	23	5	5	NUM
cet-12872	1	24	october	october	NOUN
cet-12872	1	25	2022	2022	NUM
cet-12872	1	26	please	please	INTJ
cet-12872	1	27	cite	cite	VERB
cet-12872	1	28	this	this	DET
cet-12872	1	29	article	article	NOUN
cet-12872	1	30	as	as	ADP
cet-12872	1	31	:	:	PUNCT
cet-12872	1	32	zieminska	zieminska	ADJ
cet-12872	1	33	-	-	PUNCT
cet-12872	1	34	stolarska	stolarska	ADJ
cet-12872	1	35	a.	a.	NOUN
cet-12872	1	36	,	,	PUNCT
cet-12872	1	37	pietrzak	pietrzak	NOUN
cet-12872	1	38	m.	m.	NOUN
cet-12872	1	39	,	,	PUNCT
cet-12872	1	40	zbicinski	zbicinski	PROPN
cet-12872	1	41	i.	i.	PROPN
cet-12872	1	42	,	,	PUNCT
cet-12872	1	43	2022	2022	NUM
cet-12872	1	44	,	,	PUNCT
cet-12872	1	45	comparative	comparative	ADJ
cet-12872	1	46	lca	lca	PROPN
cet-12872	1	47	analysis	analysis	NOUN
cet-12872	1	48	for	for	ADP
cet-12872	1	49	replacement	replacement	NOUN
cet-12872	1	50	of	of	ADP
cet-12872	1	51	materials	material	NOUN
cet-12872	1	52	to	to	PART
cet-12872	1	53	reduce	reduce	VERB
cet-12872	1	54	environmental	environmental	ADJ
cet-12872	1	55	impact	impact	NOUN
cet-12872	1	56	,	,	PUNCT
cet-12872	1	57	chemical	chemical	NOUN
cet-12872	1	58	engineering	engineering	NOUN
cet-12872	1	59	transactions	transaction	NOUN
cet-12872	1	60	,	,	PUNCT
cet-12872	1	61	96	96	NUM
cet-12872	1	62	,	,	PUNCT
cet-12872	1	63	145	145	NUM
cet-12872	1	64	-	-	SYM
cet-12872	1	65	150	150	NUM
cet-12872	1	66	doi:10.3303	doi:10.3303	NOUN
cet-12872	1	67	/	/	SYM
cet-12872	1	68	cet2296025	cet2296025	ADJ
cet-12872	1	69	chemical	chemical	NOUN
cet-12872	1	70	engineering	engineering	NOUN
cet-12872	1	71	transactions	transaction	NOUN
cet-12872	1	72	vol	vol	NOUN
cet-12872	1	73	.	.	PROPN
cet-12872	1	74	96	96	NUM
cet-12872	1	75	,	,	PUNCT
cet-12872	1	76	2022	2022	NUM
cet-12872	1	77	a	a	DET
cet-12872	1	78	publication	publication	NOUN
cet-12872	1	79	of	of	ADP
cet-12872	1	80	the	the	DET
cet-12872	1	81	italian	italian	ADJ
cet-12872	1	82	association	association	NOUN
cet-12872	1	83	of	of	ADP
cet-12872	1	84	chemical	chemical	PROPN
cet-12872	1	85	engineering	engineering	NOUN
cet-12872	1	86	online	online	ADV
cet-12872	1	87	at	at	ADP
cet-12872	1	88	www.cetjournal.it	www.cetjournal.it	PROPN
cet-12872	1	89	guest	guest	NOUN
cet-12872	1	90	editors	editor	NOUN
cet-12872	1	91	:	:	PUNCT
cet-12872	1	92	david	david	PROPN
cet-12872	1	93	bogle	bogle	PROPN
cet-12872	1	94	,	,	PUNCT
cet-12872	1	95	flavio	flavio	PROPN
cet-12872	1	96	manenti	manenti	PROPN
cet-12872	1	97	,	,	PUNCT
cet-12872	1	98	piero	piero	PROPN
cet-12872	1	99	salatino	salatino	PROPN
cet-12872	1	100	copyright	copyright	NOUN
cet-12872	1	101	©	©	PROPN
cet-12872	1	102	2022	2022	NUM
cet-12872	1	103	,	,	PUNCT
cet-12872	1	104	aidic	aidic	ADJ
cet-12872	1	105	servizi	servizi	PROPN
cet-12872	1	106	s.r.l	s.r.l	PROPN
cet-12872	1	107	.	.	PUNCT
cet-12872	2	1	isbn	isbn	ADJ
cet-12872	2	2	978	978	NUM
cet-12872	2	3	-	-	SYM
cet-12872	2	4	88	88	NUM
cet-12872	2	5	-	-	PUNCT
cet-12872	2	6	95608	95608	NUM
cet-12872	2	7	-	-	PUNCT
cet-12872	2	8	95	95	NUM
cet-12872	2	9	-	-	SYM
cet-12872	2	10	2	2	NUM
cet-12872	2	11	;	;	PUNCT
cet-12872	2	12	issn	issn	PROPN
cet-12872	2	13	2283	2283	NUM
cet-12872	2	14	-	-	SYM
cet-12872	2	15	9216	9216	NUM
cet-12872	2	16	comparative	comparative	ADJ
cet-12872	2	17	lca	lca	PROPN
cet-12872	2	18	analysis	analysis	NOUN
cet-12872	2	19	for	for	ADP
cet-12872	2	20	replacement	replacement	NOUN
cet-12872	2	21	of	of	ADP
cet-12872	2	22	materials	material	NOUN
cet-12872	2	23	to	to	PART
cet-12872	2	24	reduce	reduce	VERB
cet-12872	2	25	environmental	environmental	ADJ
cet-12872	2	26	impact	impact	NOUN
cet-12872	2	27	alexabdra	alexabdra	VERB
cet-12872	2	28	zieminska	zieminska	ADV
cet-12872	2	29	-	-	PUNCT
cet-12872	2	30	stolarska*a	stolarska*a	VERB
cet-12872	2	31	,	,	PUNCT
cet-12872	2	32	monika	monika	PROPN
cet-12872	2	33	pietrzakb	pietrzakb	NOUN
cet-12872	2	34	,	,	PUNCT
cet-12872	2	35	ireneusz	ireneusz	PROPN
cet-12872	2	36	zbicinnkia	zbicinnkia	PROPN
cet-12872	2	37	afaculty	afaculty	PROPN
cet-12872	2	38	of	of	ADP
cet-12872	2	39	process	process	NOUN
cet-12872	2	40	and	and	CCONJ
cet-12872	2	41	envronmental	envronmental	ADJ
cet-12872	2	42	engineeering	engineeering	NOUN
cet-12872	2	43	,	,	PUNCT
cet-12872	2	44	lodz	lodz	PROPN
cet-12872	2	45	university	university	PROPN
cet-12872	2	46	of	of	ADP
cet-12872	2	47	technology	technology	NOUN
cet-12872	2	48	,	,	PUNCT
cet-12872	2	49	wolczanska	wolczanska	NOUN
cet-12872	2	50	215	215	NUM
cet-12872	2	51	,	,	PUNCT
cet-12872	2	52	90	90	NUM
cet-12872	2	53	-	-	SYM
cet-12872	2	54	924	924	NUM
cet-12872	2	55	lodz	lodz	NOUN
cet-12872	2	56	,	,	PUNCT
cet-12872	2	57	poland	poland	PROPN
cet-12872	2	58	bfaculty	bfaculty	NOUN
cet-12872	2	59	of	of	ADP
cet-12872	2	60	chemistry	chemistry	NOUN
cet-12872	2	61	,	,	PUNCT
cet-12872	2	62	lodz	lodz	PROPN
cet-12872	2	63	university	university	PROPN
cet-12872	2	64	of	of	ADP
cet-12872	2	65	technology	technology	NOUN
cet-12872	2	66	,	,	PUNCT
cet-12872	2	67	zeromskiego	zeromskiego	PROPN
cet-12872	2	68	116	116	NUM
cet-12872	2	69	,	,	PUNCT
cet-12872	2	70	90	90	NUM
cet-12872	2	71	-	-	PUNCT
cet-12872	2	72	953	953	NUM
cet-12872	2	73	lodz	lodz	NOUN
cet-12872	2	74	,	,	PUNCT
cet-12872	2	75	poland	poland	PROPN
cet-12872	2	76	aleksandra.zieminska-stolarska@p.lodz.pl	aleksandra.zieminska-stolarska@p.lodz.pl	PROPN
cet-12872	3	1	the	the	DET
cet-12872	3	2	paper	paper	NOUN
cet-12872	3	3	presents	present	VERB
cet-12872	3	4	examples	example	NOUN
cet-12872	3	5	of	of	ADP
cet-12872	3	6	lca	lca	PROPN
cet-12872	3	7	application	application	NOUN
cet-12872	3	8	to	to	PART
cet-12872	3	9	reduce	reduce	VERB
cet-12872	3	10	environmental	environmental	ADJ
cet-12872	3	11	impact	impact	NOUN
cet-12872	3	12	by	by	ADP
cet-12872	3	13	replacement	replacement	NOUN
cet-12872	3	14	of	of	ADP
cet-12872	3	15	conventional	conventional	ADJ
cet-12872	3	16	materials	material	NOUN
cet-12872	3	17	in	in	ADP
cet-12872	3	18	chemical	chemical	NOUN
cet-12872	3	19	,	,	PUNCT
cet-12872	3	20	biochemical	biochemical	ADJ
cet-12872	3	21	,	,	PUNCT
cet-12872	3	22	construction	construction	NOUN
cet-12872	3	23	and	and	CCONJ
cet-12872	3	24	electrical	electrical	ADJ
cet-12872	3	25	industry	industry	NOUN
cet-12872	3	26	.	.	PUNCT
cet-12872	4	1	examples	example	NOUN
cet-12872	4	2	of	of	ADP
cet-12872	4	3	replacement	replacement	NOUN
cet-12872	4	4	of	of	ADP
cet-12872	4	5	talc	talc	NOUN
cet-12872	4	6	-	-	PUNCT
cet-12872	4	7	reinforced	reinforce	VERB
cet-12872	4	8	polypropylene	polypropylene	NOUN
cet-12872	4	9	composite	composite	NOUN
cet-12872	4	10	by	by	ADP
cet-12872	4	11	lightweight	lightweight	ADJ
cet-12872	4	12	composite	composite	NOUN
cet-12872	4	13	,	,	PUNCT
cet-12872	4	14	using	use	VERB
cet-12872	4	15	of	of	ADP
cet-12872	4	16	natural	natural	ADJ
cet-12872	4	17	aggregates	aggregate	NOUN
cet-12872	4	18	versus	versus	ADP
cet-12872	4	19	recycled	recycled	ADJ
cet-12872	4	20	aggregates	aggregate	NOUN
cet-12872	4	21	coming	come	VERB
cet-12872	4	22	from	from	ADP
cet-12872	4	23	reinforce	reinforce	VERB
cet-12872	4	24	concrete	concrete	ADJ
cet-12872	4	25	demolition	demolition	NOUN
cet-12872	4	26	,	,	PUNCT
cet-12872	4	27	replacing	replace	VERB
cet-12872	4	28	of	of	ADP
cet-12872	4	29	carbon	carbon	NOUN
cet-12872	4	30	black	black	ADJ
cet-12872	4	31	with	with	ADP
cet-12872	4	32	graphene	graphene	NOUN
cet-12872	4	33	in	in	ADP
cet-12872	4	34	tire	tire	NOUN
cet-12872	4	35	production	production	NOUN
cet-12872	4	36	,	,	PUNCT
cet-12872	4	37	production	production	NOUN
cet-12872	4	38	of	of	ADP
cet-12872	4	39	asphalt	asphalt	NOUN
cet-12872	4	40	mixtures	mixture	NOUN
cet-12872	4	41	,	,	PUNCT
cet-12872	4	42	change	change	NOUN
cet-12872	4	43	of	of	ADP
cet-12872	4	44	metal	metal	NOUN
cet-12872	4	45	contacts	contact	NOUN
cet-12872	4	46	for	for	ADP
cet-12872	4	47	perovskite	perovskite	NOUN
cet-12872	4	48	/	/	SYM
cet-12872	4	49	silicon	silicon	NOUN
cet-12872	4	50	(	(	PUNCT
cet-12872	4	51	si	si	NOUN
cet-12872	4	52	)	)	PUNCT
cet-12872	4	53	tandem	tandem	NOUN
cet-12872	4	54	structure	structure	NOUN
cet-12872	4	55	of	of	ADP
cet-12872	4	56	solar	solar	ADJ
cet-12872	4	57	cell	cell	NOUN
cet-12872	4	58	,	,	PUNCT
cet-12872	4	59	etc	etc	X
cet-12872	4	60	.	.	X
cet-12872	4	61	are	be	AUX
cet-12872	4	62	described	describe	VERB
cet-12872	4	63	showing	showing	NOUN
cet-12872	4	64	reduction	reduction	NOUN
cet-12872	4	65	of	of	ADP
cet-12872	4	66	environmental	environmental	ADJ
cet-12872	4	67	load	load	NOUN
cet-12872	4	68	in	in	ADP
cet-12872	4	69	impact	impact	NOUN
cet-12872	4	70	categories	category	NOUN
cet-12872	4	71	or	or	CCONJ
cet-12872	4	72	carbon	carbon	NOUN
cet-12872	4	73	footprint	footprint	NOUN
cet-12872	4	74	.	.	PUNCT
cet-12872	5	1	the	the	DET
cet-12872	5	2	full	full	ADJ
cet-12872	5	3	case	case	NOUN
cet-12872	5	4	study	study	NOUN
cet-12872	5	5	of	of	ADP
cet-12872	5	6	lca	lca	PROPN
cet-12872	5	7	of	of	ADP
cet-12872	5	8	analysis	analysis	NOUN
cet-12872	5	9	to	to	PART
cet-12872	5	10	replace	replace	VERB
cet-12872	5	11	indium	indium	NOUN
cet-12872	5	12	,	,	PUNCT
cet-12872	5	13	a	a	DET
cet-12872	5	14	material	material	NOUN
cet-12872	5	15	extensively	extensively	ADV
cet-12872	5	16	used	use	VERB
cet-12872	5	17	as	as	ADP
cet-12872	5	18	transparent	transparent	ADJ
cet-12872	5	19	conductive	conductive	ADJ
cet-12872	5	20	oxide	oxide	NOUN
cet-12872	5	21	(	(	PUNCT
cet-12872	5	22	tco	tco	NOUN
cet-12872	5	23	)	)	PUNCT
cet-12872	5	24	compound	compound	NOUN
cet-12872	5	25	for	for	ADP
cet-12872	5	26	opto	opto	ADJ
cet-12872	5	27	-	-	PUNCT
cet-12872	5	28	electronic	electronic	ADJ
cet-12872	5	29	industry	industry	NOUN
cet-12872	5	30	is	be	AUX
cet-12872	5	31	presented	present	VERB
cet-12872	5	32	.	.	PUNCT
cet-12872	6	1	several	several	ADJ
cet-12872	6	2	alternative	alternative	ADJ
cet-12872	6	3	materials	material	NOUN
cet-12872	6	4	for	for	ADP
cet-12872	6	5	indium	indium	NOUN
cet-12872	6	6	-	-	PUNCT
cet-12872	6	7	tinoxide	tinoxide	NOUN
cet-12872	6	8	(	(	PUNCT
cet-12872	6	9	ito	ito	NOUN
cet-12872	6	10	)	)	PUNCT
cet-12872	6	11	replacement	replacement	NOUN
cet-12872	6	12	as	as	ADP
cet-12872	6	13	pure	pure	ADJ
cet-12872	6	14	zinc	zinc	NOUN
cet-12872	6	15	oxide	oxide	NOUN
cet-12872	6	16	(	(	PUNCT
cet-12872	6	17	zno	zno	NOUN
cet-12872	6	18	)	)	PUNCT
cet-12872	6	19	or	or	CCONJ
cet-12872	6	20	doped	dope	VERB
cet-12872	6	21	with	with	ADP
cet-12872	6	22	aluminum	aluminum	NOUN
cet-12872	6	23	(	(	PUNCT
cet-12872	6	24	al	al	PROPN
cet-12872	6	25	)	)	PUNCT
cet-12872	6	26	either	either	CCONJ
cet-12872	6	27	boron	boron	NOUN
cet-12872	6	28	(	(	PUNCT
cet-12872	6	29	b	b	NOUN
cet-12872	6	30	)	)	PUNCT
cet-12872	6	31	and	and	CCONJ
cet-12872	6	32	tin	tin	NOUN
cet-12872	6	33	oxide	oxide	NOUN
cet-12872	6	34	(	(	PUNCT
cet-12872	6	35	sno2	sno2	PROPN
cet-12872	6	36	)	)	PUNCT
cet-12872	6	37	,	,	PUNCT
cet-12872	6	38	deposited	deposit	VERB
cet-12872	6	39	by	by	ADP
cet-12872	6	40	different	different	ADJ
cet-12872	6	41	techniques	technique	NOUN
cet-12872	6	42	:	:	PUNCT
cet-12872	6	43	physical	physical	ADJ
cet-12872	6	44	vapor	vapor	NOUN
cet-12872	6	45	deposition	deposition	NOUN
cet-12872	6	46	(	(	PUNCT
cet-12872	6	47	pvd	pvd	PROPN
cet-12872	6	48	)	)	PUNCT
cet-12872	6	49	,	,	PUNCT
cet-12872	6	50	chemical	chemical	NOUN
cet-12872	6	51	vapor	vapor	NOUN
cet-12872	6	52	deposition	deposition	NOUN
cet-12872	6	53	(	(	PUNCT
cet-12872	6	54	cvd	cvd	NOUN
cet-12872	6	55	)	)	PUNCT
cet-12872	6	56	and	and	CCONJ
cet-12872	6	57	atomic	atomic	ADJ
cet-12872	6	58	layer	layer	NOUN
cet-12872	6	59	deposition	deposition	NOUN
cet-12872	6	60	(	(	PUNCT
cet-12872	6	61	ald	ald	PROPN
cet-12872	6	62	)	)	PUNCT
cet-12872	6	63	were	be	AUX
cet-12872	6	64	extensively	extensively	ADV
cet-12872	6	65	tested	test	VERB
cet-12872	6	66	.	.	PUNCT
cet-12872	7	1	recipe	recipe	NOUN
cet-12872	7	2	endpoint	endpoint	PROPN
cet-12872	7	3	h	h	PROPN
cet-12872	7	4	/	/	SYM
cet-12872	7	5	a	a	DET
cet-12872	7	6	method	method	NOUN
cet-12872	7	7	was	be	AUX
cet-12872	7	8	applied	apply	VERB
cet-12872	7	9	to	to	PART
cet-12872	7	10	end	end	VERB
cet-12872	7	11	up	up	ADP
cet-12872	7	12	life	life	NOUN
cet-12872	7	13	cycle	cycle	NOUN
cet-12872	7	14	analysis	analysis	NOUN
cet-12872	7	15	with	with	ADP
cet-12872	7	16	single	single	ADJ
cet-12872	7	17	score	score	NOUN
cet-12872	7	18	.	.	PUNCT
cet-12872	8	1	in	in	ADP
cet-12872	8	2	case	case	NOUN
cet-12872	8	3	of	of	ADP
cet-12872	8	4	all	all	DET
cet-12872	8	5	layers	layer	NOUN
cet-12872	8	6	deposited	deposit	VERB
cet-12872	8	7	by	by	ADP
cet-12872	8	8	cvd	cvd	PROPN
cet-12872	8	9	and	and	CCONJ
cet-12872	8	10	ald	ald	PROPN
cet-12872	8	11	techniques	technique	VERB
cet-12872	8	12	the	the	DET
cet-12872	8	13	main	main	ADJ
cet-12872	8	14	impact	impact	NOUN
cet-12872	8	15	is	be	AUX
cet-12872	8	16	related	relate	VERB
cet-12872	8	17	to	to	ADP
cet-12872	8	18	electricity	electricity	NOUN
cet-12872	8	19	or	or	CCONJ
cet-12872	8	20	nitrogen	nitrogen	NOUN
cet-12872	8	21	consumption	consumption	NOUN
cet-12872	8	22	and	and	CCONJ
cet-12872	8	23	the	the	DET
cet-12872	8	24	impact	impact	NOUN
cet-12872	8	25	produced	produce	VERB
cet-12872	8	26	by	by	ADP
cet-12872	8	27	the	the	DET
cet-12872	8	28	material	material	NOUN
cet-12872	8	29	is	be	AUX
cet-12872	8	30	of	of	ADP
cet-12872	8	31	minor	minor	ADJ
cet-12872	8	32	significance	significance	NOUN
cet-12872	8	33	.	.	PUNCT
cet-12872	9	1	the	the	DET
cet-12872	9	2	results	result	NOUN
cet-12872	9	3	show	show	VERB
cet-12872	9	4	that	that	SCONJ
cet-12872	9	5	replacement	replacement	NOUN
cet-12872	9	6	of	of	ADP
cet-12872	9	7	ito	ito	PROPN
cet-12872	9	8	by	by	ADP
cet-12872	9	9	zno	zno	PROPN
cet-12872	9	10	in	in	ADP
cet-12872	9	11	tco	tco	NOUN
cet-12872	9	12	layer	layer	NOUN
cet-12872	9	13	deposition	deposition	NOUN
cet-12872	9	14	process	process	NOUN
cet-12872	9	15	is	be	AUX
cet-12872	9	16	an	an	DET
cet-12872	9	17	optimal	optimal	ADJ
cet-12872	9	18	strategy	strategy	NOUN
cet-12872	9	19	to	to	PART
cet-12872	9	20	minimize	minimize	VERB
cet-12872	9	21	environmental	environmental	ADJ
cet-12872	9	22	impact	impact	NOUN
cet-12872	9	23	keeping	keep	VERB
cet-12872	9	24	required	require	VERB
cet-12872	9	25	opto	opto	ADJ
cet-12872	9	26	-	-	PUNCT
cet-12872	9	27	electrical	electrical	ADJ
cet-12872	9	28	properties	property	NOUN
cet-12872	9	29	for	for	ADP
cet-12872	9	30	the	the	DET
cet-12872	9	31	economic	economic	ADJ
cet-12872	9	32	and	and	CCONJ
cet-12872	9	33	safe	safe	ADJ
cet-12872	9	34	manufacturing	manufacturing	NOUN
cet-12872	9	35	of	of	ADP
cet-12872	9	36	optoelectronic	optoelectronic	ADJ
cet-12872	9	37	components	component	NOUN
cet-12872	9	38	.	.	PUNCT
cet-12872	10	1	environmental	environmental	ADJ
cet-12872	10	2	impact	impact	NOUN
cet-12872	10	3	of	of	ADP
cet-12872	10	4	analysed	analyse	VERB
cet-12872	10	5	tcos	tco	NOUN
cet-12872	10	6	strongly	strongly	ADV
cet-12872	10	7	depends	depend	VERB
cet-12872	10	8	on	on	ADP
cet-12872	10	9	deposition	deposition	NOUN
cet-12872	10	10	technologies	technology	NOUN
cet-12872	10	11	;	;	PUNCT
cet-12872	10	12	for	for	SCONJ
cet-12872	10	13	the	the	DET
cet-12872	10	14	layers	layer	NOUN
cet-12872	10	15	deposited	deposit	VERB
cet-12872	10	16	by	by	ADP
cet-12872	10	17	cvd	cvd	PROPN
cet-12872	10	18	and	and	CCONJ
cet-12872	10	19	ald	ald	PROPN
cet-12872	10	20	techniques	technique	VERB
cet-12872	10	21	the	the	DET
cet-12872	10	22	main	main	ADJ
cet-12872	10	23	impact	impact	NOUN
cet-12872	10	24	is	be	AUX
cet-12872	10	25	related	relate	VERB
cet-12872	10	26	to	to	ADP
cet-12872	10	27	energy	energy	NOUN
cet-12872	10	28	or	or	CCONJ
cet-12872	10	29	nitrogen	nitrogen	NOUN
cet-12872	10	30	consumption	consumption	NOUN
cet-12872	10	31	whereas	whereas	SCONJ
cet-12872	10	32	for	for	ADP
cet-12872	10	33	pvd	pvd	PROPN
cet-12872	10	34	to	to	ADP
cet-12872	10	35	energy	energy	NOUN
cet-12872	10	36	and	and	CCONJ
cet-12872	10	37	material	material	NOUN
cet-12872	10	38	of	of	ADP
cet-12872	10	39	tco	tco	PROPN
cet-12872	10	40	.	.	PROPN
cet-12872	11	1	1	1	NUM
cet-12872	11	2	.	.	X
cet-12872	11	3	introduction	introduction	NOUN
cet-12872	11	4	demand	demand	NOUN
cet-12872	11	5	for	for	ADP
cet-12872	11	6	indium	indium	NOUN
cet-12872	11	7	has	have	AUX
cet-12872	11	8	grown	grow	VERB
cet-12872	11	9	since	since	SCONJ
cet-12872	11	10	the	the	DET
cet-12872	11	11	1970s	1970	NOUN
cet-12872	11	12	with	with	ADP
cet-12872	11	13	considerable	considerable	ADJ
cet-12872	11	14	expansion	expansion	NOUN
cet-12872	11	15	and	and	CCONJ
cet-12872	11	16	diversification	diversification	NOUN
cet-12872	11	17	in	in	ADP
cet-12872	11	18	consumption	consumption	NOUN
cet-12872	11	19	since	since	SCONJ
cet-12872	11	20	1990s	1990s	NUM
cet-12872	11	21	.	.	PUNCT
cet-12872	12	1	(	(	PUNCT
cet-12872	12	2	werner	werner	PROPN
cet-12872	12	3	,	,	PUNCT
cet-12872	12	4	mudd	mudd	NOUN
cet-12872	12	5	,	,	PUNCT
cet-12872	12	6	and	and	CCONJ
cet-12872	12	7	jowitt	jowitt	PROPN
cet-12872	12	8	2015	2015	NUM
cet-12872	12	9	)	)	PUNCT
cet-12872	12	10	.	.	PUNCT
cet-12872	13	1	the	the	DET
cet-12872	13	2	fast	fast	ADJ
cet-12872	13	3	electronic	electronic	ADJ
cet-12872	13	4	development	development	NOUN
cet-12872	13	5	and	and	CCONJ
cet-12872	13	6	advent	advent	NOUN
cet-12872	13	7	of	of	ADP
cet-12872	13	8	flat	flat	ADJ
cet-12872	13	9	-	-	PUNCT
cet-12872	13	10	panel	panel	NOUN
cet-12872	13	11	display	display	NOUN
cet-12872	13	12	notably	notably	ADV
cet-12872	13	13	raised	raise	VERB
cet-12872	13	14	commercial	commercial	ADJ
cet-12872	13	15	significance	significance	NOUN
cet-12872	13	16	of	of	ADP
cet-12872	13	17	indium	indium	NOUN
cet-12872	13	18	(	(	PUNCT
cet-12872	13	19	ciacci	ciacci	NOUN
cet-12872	13	20	et	et	PROPN
cet-12872	13	21	al	al	PROPN
cet-12872	13	22	.	.	PROPN
cet-12872	13	23	,	,	PUNCT
cet-12872	13	24	2019	2019	NUM
cet-12872	13	25	;	;	PUNCT
cet-12872	13	26	frenzel	frenzel	PROPN
cet-12872	13	27	et	et	PROPN
cet-12872	13	28	al	al	PROPN
cet-12872	13	29	.	.	PROPN
cet-12872	13	30	,	,	PUNCT
cet-12872	13	31	2017	2017	NUM
cet-12872	13	32	;	;	PUNCT
cet-12872	13	33	lokanc	lokanc	PROPN
cet-12872	13	34	,	,	PUNCT
cet-12872	13	35	eggert	eggert	PROPN
cet-12872	13	36	,	,	PUNCT
cet-12872	13	37	redlinger	redlinger	NOUN
cet-12872	13	38	,	,	PUNCT
cet-12872	13	39	2015	2015	NUM
cet-12872	13	40	)	)	PUNCT
cet-12872	13	41	.	.	PUNCT
cet-12872	14	1	approximately	approximately	ADV
cet-12872	14	2	90	90	NUM
cet-12872	14	3	%	%	NOUN
cet-12872	14	4	of	of	ADP
cet-12872	14	5	the	the	DET
cet-12872	14	6	annual	annual	ADJ
cet-12872	14	7	indium	indium	NOUN
cet-12872	14	8	consumption	consumption	NOUN
cet-12872	14	9	account	account	NOUN
cet-12872	14	10	to	to	ADP
cet-12872	14	11	transparent	transparent	ADJ
cet-12872	14	12	conducting	conducting	NOUN
cet-12872	14	13	oxide	oxide	NOUN
cet-12872	14	14	films	film	NOUN
cet-12872	14	15	(	(	PUNCT
cet-12872	14	16	tcos	tcos	ADJ
cet-12872	14	17	)	)	PUNCT
cet-12872	14	18	in	in	ADP
cet-12872	14	19	the	the	DET
cet-12872	14	20	form	form	NOUN
cet-12872	14	21	of	of	ADP
cet-12872	14	22	indium	indium	NOUN
cet-12872	14	23	tin	tin	NOUN
cet-12872	14	24	oxides	oxide	NOUN
cet-12872	14	25	(	(	PUNCT
cet-12872	14	26	itos)(in)-doped	itos)(in)-dope	VERB
cet-12872	14	27	sno2	sno2	PROPN
cet-12872	14	28	(	(	PUNCT
cet-12872	14	29	o’neill	o’neill	NOUN
cet-12872	14	30	2010	2010	NUM
cet-12872	14	31	)	)	PUNCT
cet-12872	14	32	.	.	PUNCT
cet-12872	15	1	today	today	NOUN
cet-12872	15	2	,	,	PUNCT
cet-12872	15	3	itos	itos	PROPN
cet-12872	15	4	are	be	AUX
cet-12872	15	5	technologically	technologically	ADV
cet-12872	15	6	entrenched	entrench	VERB
cet-12872	15	7	in	in	ADP
cet-12872	15	8	the	the	DET
cet-12872	15	9	commercial	commercial	ADJ
cet-12872	15	10	manufacture	manufacture	NOUN
cet-12872	15	11	of	of	ADP
cet-12872	15	12	components	component	NOUN
cet-12872	15	13	like	like	ADP
cet-12872	15	14	flat	flat	ADJ
cet-12872	15	15	panels	panel	NOUN
cet-12872	15	16	displays	display	NOUN
cet-12872	15	17	,	,	PUNCT
cet-12872	15	18	liquid	liquid	ADJ
cet-12872	15	19	crystal	crystal	NOUN
cet-12872	15	20	displays	display	NOUN
cet-12872	15	21	(	(	PUNCT
cet-12872	15	22	lcds	lcds	NOUN
cet-12872	15	23	)	)	PUNCT
cet-12872	15	24	,	,	PUNCT
cet-12872	15	25	light	light	ADJ
cet-12872	15	26	emitting	emit	VERB
cet-12872	15	27	diodes	diode	NOUN
cet-12872	15	28	(	(	PUNCT
cet-12872	15	29	leds	led	NOUN
cet-12872	15	30	)	)	PUNCT
cet-12872	15	31	,	,	PUNCT
cet-12872	15	32	touch	touch	NOUN
cet-12872	15	33	screens	screen	NOUN
cet-12872	15	34	and	and	CCONJ
cet-12872	15	35	photovoltaic	photovoltaic	NOUN
cet-12872	15	36	cells	cell	NOUN
cet-12872	15	37	(	(	PUNCT
cet-12872	15	38	mohamed	mohamed	PROPN
cet-12872	15	39	et	et	PROPN
cet-12872	15	40	al	al	PROPN
cet-12872	15	41	.	.	PROPN
cet-12872	15	42	,	,	PUNCT
cet-12872	15	43	2009	2009	NUM
cet-12872	15	44	;	;	PUNCT
cet-12872	15	45	lu	lu	PROPN
cet-12872	15	46	et	et	PROPN
cet-12872	15	47	al	al	PROPN
cet-12872	15	48	.	.	PROPN
cet-12872	15	49	,	,	PUNCT
cet-12872	15	50	2015	2015	NUM
cet-12872	15	51	)	)	PUNCT
cet-12872	15	52	.	.	PUNCT
cet-12872	16	1	these	these	DET
cet-12872	16	2	cumulative	cumulative	ADJ
cet-12872	16	3	markets	market	NOUN
cet-12872	16	4	having	having	AUX
cet-12872	16	5	multiplied	multiply	VERB
cet-12872	16	6	by	by	ADP
cet-12872	16	7	a	a	DET
cet-12872	16	8	factor	factor	NOUN
cet-12872	16	9	of	of	ADP
cet-12872	16	10	4	4	NUM
cet-12872	16	11	in	in	ADP
cet-12872	16	12	5	5	NUM
cet-12872	16	13	years	year	NOUN
cet-12872	16	14	(	(	PUNCT
cet-12872	16	15	www.inrep.eu	www.inrep.eu	NOUN
cet-12872	16	16	)	)	PUNCT
cet-12872	16	17	.	.	PUNCT
cet-12872	17	1	indium	indium	NOUN
cet-12872	17	2	has	have	AUX
cet-12872	17	3	been	be	AUX
cet-12872	17	4	classified	classify	VERB
cet-12872	17	5	by	by	ADP
cet-12872	17	6	the	the	DET
cet-12872	17	7	european	european	PROPN
cet-12872	17	8	commission	commission	PROPN
cet-12872	17	9	as	as	ADP
cet-12872	17	10	one	one	NUM
cet-12872	17	11	of	of	ADP
cet-12872	17	12	the	the	DET
cet-12872	17	13	critical	critical	ADJ
cet-12872	17	14	raw	raw	ADJ
cet-12872	17	15	material	material	NOUN
cet-12872	17	16	(	(	PUNCT
cet-12872	17	17	crm	crm	PROPN
cet-12872	17	18	)	)	PUNCT
cet-12872	17	19	with	with	ADP
cet-12872	17	20	a	a	DET
cet-12872	17	21	high	high	ADJ
cet-12872	17	22	supply	supply	NOUN
cet-12872	17	23	-	-	PUNCT
cet-12872	17	24	risk	risk	NOUN
cet-12872	17	25	and	and	CCONJ
cet-12872	17	26	high	high	ADJ
cet-12872	17	27	economic	economic	ADJ
cet-12872	17	28	importance	importance	NOUN
cet-12872	17	29	to	to	PART
cet-12872	17	30	which	which	PRON
cet-12872	17	31	reliable	reliable	ADJ
cet-12872	17	32	and	and	CCONJ
cet-12872	17	33	unhindered	unhindered	ADJ
cet-12872	17	34	access	access	NOUN
cet-12872	17	35	is	be	AUX
cet-12872	17	36	a	a	DET
cet-12872	17	37	concern	concern	NOUN
cet-12872	17	38	for	for	ADP
cet-12872	17	39	european	european	ADJ
cet-12872	17	40	industry	industry	NOUN
cet-12872	17	41	and	and	CCONJ
cet-12872	17	42	value	value	NOUN
cet-12872	17	43	chains	chain	NOUN
cet-12872	17	44	(	(	PUNCT
cet-12872	17	45	european	european	ADJ
cet-12872	17	46	commission	commission	PROPN
cet-12872	17	47	2020	2020	NUM
cet-12872	17	48	,	,	PUNCT
cet-12872	17	49	bobba	bobba	PROPN
cet-12872	17	50	et	et	PROPN
cet-12872	17	51	al	al	PROPN
cet-12872	17	52	.	.	PROPN
cet-12872	17	53	,	,	PUNCT
cet-12872	17	54	2020	2020	NUM
cet-12872	17	55	)	)	PUNCT
cet-12872	17	56	.	.	PUNCT
cet-12872	18	1	high	high	ADJ
cet-12872	18	2	-	-	PUNCT
cet-12872	18	3	tech	tech	NOUN
cet-12872	18	4	products	product	NOUN
cet-12872	18	5	,	,	PUNCT
cet-12872	18	6	including	include	VERB
cet-12872	18	7	electric	electric	ADJ
cet-12872	18	8	and	and	CCONJ
cet-12872	18	9	electronic	electronic	ADJ
cet-12872	18	10	equipment	equipment	NOUN
cet-12872	18	11	,	,	PUNCT
cet-12872	18	12	green	green	ADJ
cet-12872	18	13	energy	energy	NOUN
cet-12872	18	14	technologies	technology	NOUN
cet-12872	18	15	contain	contain	VERB
cet-12872	18	16	substantial	substantial	ADJ
cet-12872	18	17	amounts	amount	NOUN
cet-12872	18	18	of	of	ADP
cet-12872	18	19	crm	crm	PROPN
cet-12872	18	20	.	.	PUNCT
cet-12872	19	1	although	although	SCONJ
cet-12872	19	2	the	the	DET
cet-12872	19	3	amount	amount	NOUN
cet-12872	19	4	of	of	ADP
cet-12872	19	5	crm	crm	NOUN
cet-12872	19	6	per	per	ADP
cet-12872	19	7	product	product	NOUN
cet-12872	19	8	is	be	AUX
cet-12872	19	9	very	very	ADV
cet-12872	19	10	low	low	ADJ
cet-12872	19	11	,	,	PUNCT
cet-12872	19	12	the	the	DET
cet-12872	19	13	large	large	ADJ
cet-12872	19	14	number	number	NOUN
cet-12872	19	15	of	of	ADP
cet-12872	19	16	products	product	NOUN
cet-12872	19	17	manufactured	manufacture	VERB
cet-12872	19	18	makes	make	VERB
cet-12872	19	19	the	the	DET
cet-12872	19	20	total	total	ADJ
cet-12872	19	21	amount	amount	NOUN
cet-12872	19	22	significant	significant	ADJ
cet-12872	19	23	.	.	PUNCT
cet-12872	20	1	there	there	PRON
cet-12872	20	2	is	be	VERB
cet-12872	20	3	therefore	therefore	ADV
cet-12872	20	4	a	a	DET
cet-12872	20	5	need	need	NOUN
cet-12872	20	6	to	to	PART
cet-12872	20	7	find	find	VERB
cet-12872	20	8	alternative	alternative	ADJ
cet-12872	20	9	solutions	solution	NOUN
cet-12872	20	10	to	to	PART
cet-12872	20	11	replace	replace	VERB
cet-12872	20	12	crm	crm	PROPN
cet-12872	20	13	in	in	ADP
cet-12872	20	14	concrete	concrete	ADJ
cet-12872	20	15	applications	application	NOUN
cet-12872	20	16	,	,	PUNCT
cet-12872	20	17	or	or	CCONJ
cet-12872	20	18	to	to	PART
cet-12872	20	19	diversify	diversify	VERB
cet-12872	20	20	the	the	DET
cet-12872	20	21	supply	supply	NOUN
cet-12872	20	22	of	of	ADP
cet-12872	20	23	raw	raw	ADJ
cet-12872	20	24	materials	material	NOUN
cet-12872	20	25	sources	source	NOUN
cet-12872	20	26	.	.	PUNCT
cet-12872	21	1	substitution	substitution	NOUN
cet-12872	21	2	of	of	ADP
cet-12872	21	3	crms	crm	NOUN
cet-12872	21	4	can	can	AUX
cet-12872	21	5	also	also	ADV
cet-12872	21	6	increase	increase	VERB
cet-12872	21	7	the	the	DET
cet-12872	21	8	recyclability	recyclability	NOUN
cet-12872	21	9	of	of	ADP
cet-12872	21	10	waste	waste	NOUN
cet-12872	21	11	products	product	NOUN
cet-12872	21	12	,	,	PUNCT
cet-12872	21	13	allowing	allow	VERB
cet-12872	21	14	for	for	ADP
cet-12872	21	15	more	more	ADV
cet-12872	21	16	efficient	efficient	ADJ
cet-12872	21	17	processes	process	NOUN
cet-12872	21	18	and	and	CCONJ
cet-12872	21	19	reduce	reduce	VERB
cet-12872	21	20	environmental	environmental	ADJ
cet-12872	21	21	impact	impact	NOUN
cet-12872	21	22	.	.	PUNCT
cet-12872	22	1	145	145	NUM
cet-12872	23	1	as	as	SCONJ
cet-12872	23	2	demand	demand	NOUN
cet-12872	23	3	of	of	ADP
cet-12872	23	4	photovoltaics	photovoltaic	NOUN
cet-12872	23	5	and	and	CCONJ
cet-12872	23	6	flat	flat	ADJ
cet-12872	23	7	-	-	PUNCT
cet-12872	23	8	panel	panel	NOUN
cet-12872	23	9	displays	display	NOUN
cet-12872	23	10	continues	continue	VERB
cet-12872	23	11	to	to	PART
cet-12872	23	12	increase	increase	VERB
cet-12872	23	13	,	,	PUNCT
cet-12872	23	14	the	the	DET
cet-12872	23	15	availability	availability	NOUN
cet-12872	23	16	of	of	ADP
cet-12872	23	17	ito	ito	PROPN
cet-12872	23	18	can	can	AUX
cet-12872	23	19	be	be	AUX
cet-12872	23	20	alarming	alarming	ADJ
cet-12872	23	21	in	in	ADP
cet-12872	23	22	the	the	DET
cet-12872	23	23	future	future	NOUN
cet-12872	23	24	.	.	PUNCT
cet-12872	24	1	furthermore	furthermore	ADV
cet-12872	24	2	,	,	PUNCT
cet-12872	24	3	economic	economic	ADJ
cet-12872	24	4	aspect	aspect	NOUN
cet-12872	24	5	is	be	AUX
cet-12872	24	6	also	also	ADV
cet-12872	24	7	driven	drive	VERB
cet-12872	24	8	force	force	NOUN
cet-12872	24	9	to	to	ADP
cet-12872	24	10	development	development	NOUN
cet-12872	24	11	indium	indium	NOUN
cet-12872	24	12	-	-	PUNCT
cet-12872	24	13	free	free	ADJ
cet-12872	24	14	materials	material	NOUN
cet-12872	24	15	for	for	ADP
cet-12872	24	16	tco	tco	NOUN
cet-12872	24	17	commercial	commercial	ADJ
cet-12872	24	18	application	application	NOUN
cet-12872	24	19	(	(	PUNCT
cet-12872	24	20	yu	yu	PROPN
cet-12872	24	21	et	et	PROPN
cet-12872	24	22	al	al	PROPN
cet-12872	24	23	.	.	PROPN
cet-12872	24	24	2016	2016	NUM
cet-12872	24	25	;	;	PUNCT
cet-12872	24	26	minami	minami	PROPN
cet-12872	24	27	,	,	PUNCT
cet-12872	24	28	2005	2005	NUM
cet-12872	24	29	)	)	PUNCT
cet-12872	24	30	.	.	PUNCT
cet-12872	25	1	alongside	alongside	ADP
cet-12872	25	2	ito	ito	PROPN
cet-12872	25	3	,	,	PUNCT
cet-12872	25	4	satisfactory	satisfactory	ADJ
cet-12872	25	5	performance	performance	NOUN
cet-12872	25	6	as	as	SCONJ
cet-12872	25	7	tco	tco	PROPN
cet-12872	25	8	was	be	AUX
cet-12872	25	9	shown	show	VERB
cet-12872	25	10	by	by	ADP
cet-12872	25	11	fluorine	fluorine	NOUN
cet-12872	25	12	(	(	PUNCT
cet-12872	25	13	f)doped	f)dope	VERB
cet-12872	25	14	sno2	sno2	PROPN
cet-12872	25	15	,	,	PUNCT
cet-12872	25	16	aluminium	aluminium	NOUN
cet-12872	25	17	(	(	PUNCT
cet-12872	25	18	al)doped	al)dope	VERB
cet-12872	25	19	zno	zno	NOUN
cet-12872	25	20	and	and	CCONJ
cet-12872	25	21	gallium	gallium	PROPN
cet-12872	25	22	(	(	PUNCT
cet-12872	25	23	ga)doped	ga)dope	VERB
cet-12872	25	24	zno	zno	PROPN
cet-12872	25	25	(	(	PUNCT
cet-12872	25	26	dalapati	dalapati	PROPN
cet-12872	25	27	et	et	PROPN
cet-12872	25	28	al	al	PROPN
cet-12872	25	29	.	.	PROPN
cet-12872	25	30	,	,	PUNCT
cet-12872	25	31	2021	2021	NUM
cet-12872	25	32	)	)	PUNCT
cet-12872	25	33	.	.	PUNCT
cet-12872	26	1	however	however	ADV
cet-12872	26	2	,	,	PUNCT
cet-12872	26	3	different	different	ADJ
cet-12872	26	4	multilayer	multilayer	NOUN
cet-12872	26	5	and	and	CCONJ
cet-12872	26	6	nano	nano	NOUN
cet-12872	26	7	-	-	PUNCT
cet-12872	26	8	based	base	VERB
cet-12872	26	9	materials	material	NOUN
cet-12872	26	10	are	be	AUX
cet-12872	26	11	also	also	ADV
cet-12872	26	12	extensively	extensively	ADV
cet-12872	26	13	considered	consider	VERB
cet-12872	26	14	to	to	PART
cet-12872	26	15	meet	meet	VERB
cet-12872	26	16	requirements	requirement	NOUN
cet-12872	26	17	of	of	ADP
cet-12872	26	18	tcos	tco	NOUN
cet-12872	26	19	(	(	PUNCT
cet-12872	26	20	gong	gong	NOUN
cet-12872	26	21	,	,	PUNCT
cet-12872	26	22	lu	lu	PROPN
cet-12872	26	23	,	,	PUNCT
cet-12872	26	24	ye	ye	PRON
cet-12872	26	25	,	,	PUNCT
cet-12872	26	26	2011	2011	NUM
cet-12872	26	27	;	;	PUNCT
cet-12872	26	28	yu	yu	PROPN
cet-12872	26	29	et	et	PROPN
cet-12872	26	30	al	al	PROPN
cet-12872	26	31	.	.	PROPN
cet-12872	26	32	,	,	PUNCT
cet-12872	26	33	2016	2016	NUM
cet-12872	26	34	;	;	PUNCT
cet-12872	26	35	kim	kim	PROPN
cet-12872	26	36	et	et	PROPN
cet-12872	26	37	al	al	PROPN
cet-12872	26	38	.	.	PROPN
cet-12872	26	39	,	,	PUNCT
cet-12872	26	40	2019	2019	NUM
cet-12872	26	41	)	)	PUNCT
cet-12872	26	42	.	.	PUNCT
cet-12872	27	1	as	as	SCONJ
cet-12872	27	2	the	the	DET
cet-12872	27	3	usefulness	usefulness	NOUN
cet-12872	27	4	of	of	ADP
cet-12872	27	5	tco	tco	PROPN
cet-12872	27	6	thin	thin	ADJ
cet-12872	27	7	films	film	NOUN
cet-12872	27	8	depends	depend	VERB
cet-12872	27	9	on	on	ADP
cet-12872	27	10	their	their	PRON
cet-12872	27	11	optical	optical	ADJ
cet-12872	27	12	and	and	CCONJ
cet-12872	27	13	electrical	electrical	ADJ
cet-12872	27	14	properties	property	NOUN
cet-12872	27	15	,	,	PUNCT
cet-12872	27	16	both	both	DET
cet-12872	27	17	parameters	parameter	NOUN
cet-12872	27	18	should	should	AUX
cet-12872	27	19	be	be	AUX
cet-12872	27	20	considered	consider	VERB
cet-12872	27	21	together	together	ADV
cet-12872	27	22	with	with	ADP
cet-12872	27	23	an	an	DET
cet-12872	27	24	environmental	environmental	ADJ
cet-12872	27	25	stability	stability	NOUN
cet-12872	27	26	,	,	PUNCT
cet-12872	27	27	abrasion	abrasion	NOUN
cet-12872	27	28	resistance	resistance	NOUN
cet-12872	27	29	,	,	PUNCT
cet-12872	27	30	electron	electron	NOUN
cet-12872	27	31	work	work	NOUN
cet-12872	27	32	function	function	NOUN
cet-12872	27	33	,	,	PUNCT
cet-12872	27	34	and	and	CCONJ
cet-12872	27	35	compatibility	compatibility	NOUN
cet-12872	27	36	with	with	ADP
cet-12872	27	37	substrate	substrate	NOUN
cet-12872	27	38	and	and	CCONJ
cet-12872	27	39	other	other	ADJ
cet-12872	27	40	components	component	NOUN
cet-12872	27	41	of	of	ADP
cet-12872	27	42	a	a	DET
cet-12872	27	43	given	give	VERB
cet-12872	27	44	device	device	NOUN
cet-12872	27	45	,	,	PUNCT
cet-12872	27	46	as	as	ADP
cet-12872	27	47	appropriate	appropriate	ADJ
cet-12872	27	48	for	for	ADP
cet-12872	27	49	the	the	DET
cet-12872	27	50	application	application	NOUN
cet-12872	27	51	.	.	PUNCT
cet-12872	28	1	the	the	DET
cet-12872	28	2	availability	availability	NOUN
cet-12872	28	3	of	of	ADP
cet-12872	28	4	the	the	DET
cet-12872	28	5	raw	raw	ADJ
cet-12872	28	6	materials	material	NOUN
cet-12872	28	7	and	and	CCONJ
cet-12872	28	8	the	the	DET
cet-12872	28	9	economics	economic	NOUN
cet-12872	28	10	of	of	ADP
cet-12872	28	11	the	the	DET
cet-12872	28	12	deposition	deposition	NOUN
cet-12872	28	13	method	method	NOUN
cet-12872	28	14	are	be	AUX
cet-12872	28	15	also	also	ADV
cet-12872	28	16	significant	significant	ADJ
cet-12872	28	17	factors	factor	NOUN
cet-12872	28	18	in	in	ADP
cet-12872	28	19	choosing	choose	VERB
cet-12872	28	20	the	the	DET
cet-12872	28	21	most	most	ADV
cet-12872	28	22	appropriate	appropriate	ADJ
cet-12872	28	23	tco	tco	NOUN
cet-12872	28	24	material	material	NOUN
cet-12872	28	25	(	(	PUNCT
cet-12872	28	26	afre	afre	PROPN
cet-12872	28	27	et	et	PROPN
cet-12872	28	28	al	al	PROPN
cet-12872	28	29	.	.	PROPN
cet-12872	28	30	,	,	PUNCT
cet-12872	28	31	2018	2018	NUM
cet-12872	28	32	)	)	PUNCT
cet-12872	28	33	.	.	PUNCT
cet-12872	29	1	atomic	atomic	ADJ
cet-12872	29	2	layer	layer	NOUN
cet-12872	29	3	deposition	deposition	NOUN
cet-12872	29	4	(	(	PUNCT
cet-12872	29	5	ald	ald	PROPN
cet-12872	29	6	)	)	PUNCT
cet-12872	29	7	,	,	PUNCT
cet-12872	29	8	chemical	chemical	NOUN
cet-12872	29	9	chemical	chemical	NOUN
cet-12872	29	10	vapour	vapour	NOUN
cet-12872	29	11	deposition	deposition	NOUN
cet-12872	29	12	(	(	PUNCT
cet-12872	29	13	cvd	cvd	PROPN
cet-12872	29	14	)	)	PUNCT
cet-12872	29	15	and	and	CCONJ
cet-12872	29	16	physical	physical	ADJ
cet-12872	29	17	vapour	vapour	NOUN
cet-12872	29	18	deposition	deposition	NOUN
cet-12872	29	19	(	(	PUNCT
cet-12872	29	20	pvd	pvd	PROPN
cet-12872	29	21	)	)	PUNCT
cet-12872	29	22	are	be	AUX
cet-12872	29	23	the	the	DET
cet-12872	29	24	most	most	ADV
cet-12872	29	25	popular	popular	ADJ
cet-12872	29	26	deposition	deposition	NOUN
cet-12872	29	27	techniques	technique	NOUN
cet-12872	29	28	in	in	ADP
cet-12872	29	29	industry	industry	NOUN
cet-12872	29	30	(	(	PUNCT
cet-12872	29	31	oviroh	oviroh	NOUN
cet-12872	29	32	et	et	PROPN
cet-12872	29	33	al	al	PROPN
cet-12872	29	34	.	.	PROPN
cet-12872	29	35	,	,	PUNCT
cet-12872	29	36	2019	2019	NUM
cet-12872	29	37	)	)	PUNCT
cet-12872	29	38	.	.	PUNCT
cet-12872	30	1	life	life	NOUN
cet-12872	30	2	cycle	cycle	NOUN
cet-12872	30	3	assessment	assessment	NOUN
cet-12872	30	4	(	(	PUNCT
cet-12872	30	5	lca	lca	PROPN
cet-12872	30	6	)	)	PUNCT
cet-12872	30	7	is	be	AUX
cet-12872	30	8	one	one	NUM
cet-12872	30	9	of	of	ADP
cet-12872	30	10	the	the	DET
cet-12872	30	11	prominent	prominent	ADJ
cet-12872	30	12	tools	tool	NOUN
cet-12872	30	13	for	for	ADP
cet-12872	30	14	estimating	estimate	VERB
cet-12872	30	15	environmental	environmental	ADJ
cet-12872	30	16	sustainability	sustainability	NOUN
cet-12872	30	17	(	(	PUNCT
cet-12872	30	18	curran	curran	NOUN
cet-12872	30	19	,	,	PUNCT
cet-12872	30	20	2013	2013	NUM
cet-12872	30	21	)	)	PUNCT
cet-12872	30	22	.	.	PUNCT
cet-12872	31	1	nowadays	nowadays	ADV
cet-12872	31	2	,	,	PUNCT
cet-12872	31	3	lca	lca	PROPN
cet-12872	31	4	analysis	analysis	NOUN
cet-12872	31	5	are	be	AUX
cet-12872	31	6	widely	widely	ADV
cet-12872	31	7	applied	apply	VERB
cet-12872	31	8	as	as	ADP
cet-12872	31	9	an	an	DET
cet-12872	31	10	input	input	NOUN
cet-12872	31	11	to	to	ADP
cet-12872	31	12	early	early	ADJ
cet-12872	31	13	stage	stage	NOUN
cet-12872	31	14	of	of	ADP
cet-12872	31	15	design	design	NOUN
cet-12872	31	16	,	,	PUNCT
cet-12872	31	17	as	as	ADV
cet-12872	31	18	well	well	ADV
cet-12872	31	19	as	as	ADP
cet-12872	31	20	for	for	ADP
cet-12872	31	21	redesign	redesign	NOUN
cet-12872	31	22	and	and	CCONJ
cet-12872	31	23	replacement	replacement	NOUN
cet-12872	31	24	of	of	ADP
cet-12872	31	25	conventional	conventional	ADJ
cet-12872	31	26	materials	material	NOUN
cet-12872	31	27	to	to	PART
cet-12872	31	28	reduce	reduce	VERB
cet-12872	31	29	environmental	environmental	ADJ
cet-12872	31	30	load	load	NOUN
cet-12872	31	31	.	.	PUNCT
cet-12872	32	1	redesign	redesign	NOUN
cet-12872	32	2	refers	refer	VERB
cet-12872	32	3	to	to	ADP
cet-12872	32	4	activities	activity	NOUN
cet-12872	32	5	that	that	PRON
cet-12872	32	6	are	be	AUX
cet-12872	32	7	aimed	aim	VERB
cet-12872	32	8	to	to	PART
cet-12872	32	9	reduce	reduce	VERB
cet-12872	32	10	environmental	environmental	ADJ
cet-12872	32	11	load	load	NOUN
cet-12872	32	12	of	of	ADP
cet-12872	32	13	particular	particular	ADJ
cet-12872	32	14	stage	stage	NOUN
cet-12872	32	15	of	of	ADP
cet-12872	32	16	product	product	NOUN
cet-12872	32	17	's	's	PART
cet-12872	32	18	life	life	NOUN
cet-12872	32	19	and	and	CCONJ
cet-12872	32	20	future	future	ADJ
cet-12872	32	21	post	post	ADJ
cet-12872	32	22	-	-	ADJ
cet-12872	32	23	use	use	ADJ
cet-12872	32	24	stage	stage	NOUN
cet-12872	32	25	(	(	PUNCT
cet-12872	32	26	suhariyanto	suhariyanto	NOUN
cet-12872	32	27	et	et	PROPN
cet-12872	32	28	al	al	PROPN
cet-12872	32	29	.	.	PROPN
cet-12872	32	30	,	,	PUNCT
cet-12872	32	31	2018	2018	NUM
cet-12872	32	32	)	)	PUNCT
cet-12872	32	33	.	.	PUNCT
cet-12872	33	1	the	the	DET
cet-12872	33	2	objective	objective	NOUN
cet-12872	33	3	of	of	ADP
cet-12872	33	4	this	this	DET
cet-12872	33	5	study	study	NOUN
cet-12872	33	6	is	be	AUX
cet-12872	33	7	to	to	PART
cet-12872	33	8	identify	identify	VERB
cet-12872	33	9	and	and	CCONJ
cet-12872	33	10	evaluate	evaluate	VERB
cet-12872	33	11	environmental	environmental	ADJ
cet-12872	33	12	impact	impact	NOUN
cet-12872	33	13	of	of	ADP
cet-12872	33	14	commercially	commercially	ADV
cet-12872	33	15	acceptable	acceptable	ADJ
cet-12872	33	16	indiumfree	indiumfree	ADJ
cet-12872	33	17	tcos	tco	NOUN
cet-12872	33	18	,	,	PUNCT
cet-12872	33	19	proposed	propose	VERB
cet-12872	33	20	in	in	ADP
cet-12872	33	21	the	the	DET
cet-12872	33	22	frame	frame	NOUN
cet-12872	33	23	of	of	ADP
cet-12872	33	24	inrep	inrep	NOUN
cet-12872	33	25	project	project	NOUN
cet-12872	33	26	(	(	PUNCT
cet-12872	33	27	www.inrep.eu	www.inrep.eu	NOUN
cet-12872	33	28	)	)	PUNCT
cet-12872	33	29	.	.	PUNCT
cet-12872	34	1	the	the	DET
cet-12872	34	2	new	new	ADJ
cet-12872	34	3	developed	develop	VERB
cet-12872	34	4	tcos	tcos	ADJ
cet-12872	34	5	materials	material	NOUN
cet-12872	34	6	are	be	AUX
cet-12872	34	7	potentially	potentially	ADV
cet-12872	34	8	dedicated	dedicate	VERB
cet-12872	34	9	to	to	ADP
cet-12872	34	10	high	high	ADJ
cet-12872	34	11	efficient	efficient	ADJ
cet-12872	34	12	pv	pv	NOUN
cet-12872	34	13	cells	cell	NOUN
cet-12872	34	14	,	,	PUNCT
cet-12872	34	15	gan	gan	PROPN
cet-12872	34	16	based	base	VERB
cet-12872	34	17	leds	led	NOUN
cet-12872	34	18	,	,	PUNCT
cet-12872	34	19	organic	organic	ADJ
cet-12872	34	20	leds	led	NOUN
cet-12872	34	21	and	and	CCONJ
cet-12872	34	22	touch	touch	NOUN
cet-12872	34	23	-	-	PUNCT
cet-12872	34	24	screen	screen	NOUN
cet-12872	34	25	monitor	monitor	NOUN
cet-12872	34	26	.	.	PUNCT
cet-12872	35	1	different	different	ADJ
cet-12872	35	2	materials	material	NOUN
cet-12872	35	3	and	and	CCONJ
cet-12872	35	4	processes	process	NOUN
cet-12872	35	5	was	be	AUX
cet-12872	35	6	evaluated	evaluate	VERB
cet-12872	35	7	by	by	ADP
cet-12872	35	8	life	life	NOUN
cet-12872	35	9	cycle	cycle	NOUN
cet-12872	35	10	assessment	assessment	NOUN
cet-12872	35	11	(	(	PUNCT
cet-12872	35	12	lca	lca	PROPN
cet-12872	35	13	)	)	PUNCT
cet-12872	35	14	methodology	methodology	NOUN
cet-12872	35	15	to	to	PART
cet-12872	35	16	provide	provide	VERB
cet-12872	35	17	information	information	NOUN
cet-12872	35	18	on	on	ADP
cet-12872	35	19	possible	possible	ADJ
cet-12872	35	20	environmental	environmental	ADJ
cet-12872	35	21	and	and	CCONJ
cet-12872	35	22	safety	safety	NOUN
cet-12872	35	23	impact	impact	NOUN
cet-12872	35	24	of	of	ADP
cet-12872	35	25	the	the	DET
cet-12872	35	26	developed	develop	VERB
cet-12872	35	27	solutions	solution	NOUN
cet-12872	35	28	.	.	PUNCT
cet-12872	36	1	table	table	NOUN
cet-12872	36	2	1	1	NUM
cet-12872	36	3	shows	show	VERB
cet-12872	36	4	the	the	DET
cet-12872	36	5	particular	particular	ADJ
cet-12872	36	6	tcos	tcos	ADJ
cet-12872	36	7	alternatives	alternative	NOUN
cet-12872	36	8	and	and	CCONJ
cet-12872	36	9	deposition	deposition	NOUN
cet-12872	36	10	techniques	technique	NOUN
cet-12872	36	11	evaluated	evaluate	VERB
cet-12872	36	12	by	by	ADP
cet-12872	36	13	lca	lca	PROPN
cet-12872	36	14	approach	approach	NOUN
cet-12872	36	15	.	.	PUNCT
cet-12872	37	1	table	table	NOUN
cet-12872	37	2	1	1	NUM
cet-12872	37	3	:	:	PUNCT
cet-12872	37	4	analyzed	analyze	VERB
cet-12872	37	5	compounds	compound	NOUN
cet-12872	37	6	and	and	CCONJ
cet-12872	37	7	deposition	deposition	NOUN
cet-12872	37	8	techniques	technique	NOUN
cet-12872	37	9	deposition	deposition	NOUN
cet-12872	37	10	technique	technique	NOUN
cet-12872	37	11	compound	compound	PROPN
cet-12872	37	12	ito	ito	PROPN
cet-12872	37	13	zno	zno	PROPN
cet-12872	37	14	sno2	sno2	PROPN
cet-12872	37	15	zno	zno	PROPN
cet-12872	37	16	:	:	PUNCT
cet-12872	37	17	al	al	PROPN
cet-12872	37	18	zno	zno	PROPN
cet-12872	37	19	:	:	PUNCT
cet-12872	37	20	b	b	PROPN
cet-12872	37	21	cvd	cvd	PROPN
cet-12872	37	22	x	x	PROPN
cet-12872	38	1	ald	ald	PROPN
cet-12872	38	2	x	x	X
cet-12872	38	3	pvd	pvd	PROPN
cet-12872	38	4	x	x	PUNCT
cet-12872	38	5	x	x	PUNCT
cet-12872	38	6	x	x	SYM
cet-12872	38	7	x	x	SYM
cet-12872	38	8	2	2	X
cet-12872	38	9	.	.	PUNCT
cet-12872	38	10	materials	material	NOUN
cet-12872	38	11	and	and	CCONJ
cet-12872	38	12	methods	method	NOUN
cet-12872	38	13	extensive	extensive	ADJ
cet-12872	38	14	literature	literature	NOUN
cet-12872	38	15	screening	screening	NOUN
cet-12872	38	16	revealed	reveal	VERB
cet-12872	38	17	that	that	SCONJ
cet-12872	38	18	the	the	DET
cet-12872	38	19	most	most	ADV
cet-12872	38	20	suitable	suitable	ADJ
cet-12872	38	21	methodology	methodology	NOUN
cet-12872	38	22	for	for	ADP
cet-12872	38	23	life	life	NOUN
cet-12872	38	24	cycle	cycle	NOUN
cet-12872	38	25	assessment	assessment	NOUN
cet-12872	38	26	of	of	ADP
cet-12872	38	27	tco	tco	PROPN
cet-12872	38	28	’s	’s	PART
cet-12872	38	29	layer	layer	NOUN
cet-12872	38	30	deposition	deposition	NOUN
cet-12872	38	31	process	process	NOUN
cet-12872	38	32	is	be	AUX
cet-12872	38	33	simapro	simapro	VERB
cet-12872	38	34	®	®	NOUN
cet-12872	38	35	(	(	PUNCT
cet-12872	38	36	ziemińska	ziemińska	NOUN
cet-12872	38	37	-	-	PUNCT
cet-12872	38	38	stolarska	stolarska	NOUN
cet-12872	38	39	,	,	PUNCT
cet-12872	38	40	barecka	barecka	NOUN
cet-12872	38	41	,	,	PUNCT
cet-12872	38	42	zbiciński	zbiciński	PROPN
cet-12872	38	43	,	,	PUNCT
cet-12872	38	44	2017	2017	NUM
cet-12872	38	45	)	)	PUNCT
cet-12872	38	46	.	.	PUNCT
cet-12872	39	1	the	the	DET
cet-12872	39	2	software	software	NOUN
cet-12872	39	3	enables	enable	VERB
cet-12872	39	4	measurement	measurement	NOUN
cet-12872	39	5	of	of	ADP
cet-12872	39	6	the	the	DET
cet-12872	39	7	environmental	environmental	ADJ
cet-12872	39	8	impacts	impact	NOUN
cet-12872	39	9	of	of	ADP
cet-12872	39	10	products	product	NOUN
cet-12872	39	11	and	and	CCONJ
cet-12872	39	12	services	service	NOUN
cet-12872	39	13	across	across	ADP
cet-12872	39	14	all	all	DET
cet-12872	39	15	life	life	NOUN
cet-12872	39	16	cycle	cycle	NOUN
cet-12872	39	17	stages	stage	NOUN
cet-12872	39	18	and	and	CCONJ
cet-12872	39	19	identification	identification	NOUN
cet-12872	39	20	of	of	ADP
cet-12872	39	21	hotspots	hotspot	NOUN
cet-12872	39	22	in	in	ADP
cet-12872	39	23	every	every	DET
cet-12872	39	24	link	link	NOUN
cet-12872	39	25	of	of	ADP
cet-12872	39	26	the	the	DET
cet-12872	39	27	supply	supply	NOUN
cet-12872	39	28	chain	chain	NOUN
cet-12872	39	29	.	.	PUNCT
cet-12872	40	1	for	for	ADP
cet-12872	40	2	the	the	DET
cet-12872	40	3	reported	report	VERB
cet-12872	40	4	analysis	analysis	NOUN
cet-12872	40	5	,	,	PUNCT
cet-12872	40	6	recipe	recipe	NOUN
cet-12872	40	7	method	method	NOUN
cet-12872	40	8	was	be	AUX
cet-12872	40	9	selected	select	VERB
cet-12872	40	10	and	and	CCONJ
cet-12872	40	11	ecoinvent	ecoinvent	NOUN
cet-12872	40	12	database	database	NOUN
cet-12872	40	13	due	due	ADP
cet-12872	40	14	to	to	ADP
cet-12872	40	15	availability	availability	NOUN
cet-12872	40	16	of	of	ADP
cet-12872	40	17	environmental	environmental	ADJ
cet-12872	40	18	impact	impact	NOUN
cet-12872	40	19	coefficients	coefficient	NOUN
cet-12872	40	20	for	for	ADP
cet-12872	40	21	majority	majority	NOUN
cet-12872	40	22	of	of	ADP
cet-12872	40	23	compounds	compound	NOUN
cet-12872	40	24	considered	consider	VERB
cet-12872	40	25	in	in	ADP
cet-12872	40	26	the	the	DET
cet-12872	40	27	analysis	analysis	NOUN
cet-12872	40	28	.	.	PUNCT
cet-12872	41	1	2.1	2.1	NUM
cet-12872	41	2	life	life	NOUN
cet-12872	41	3	cycle	cycle	NOUN
cet-12872	41	4	assessment	assessment	NOUN
cet-12872	41	5	analysis	analysis	NOUN
cet-12872	41	6	lca	lca	PROPN
cet-12872	41	7	analysis	analysis	NOUN
cet-12872	41	8	can	can	AUX
cet-12872	41	9	be	be	AUX
cet-12872	41	10	performed	perform	VERB
cet-12872	41	11	with	with	ADP
cet-12872	41	12	different	different	ADJ
cet-12872	41	13	calculation	calculation	NOUN
cet-12872	41	14	techniques	technique	NOUN
cet-12872	41	15	and	and	CCONJ
cet-12872	41	16	a	a	DET
cet-12872	41	17	broad	broad	ADJ
cet-12872	41	18	variety	variety	NOUN
cet-12872	41	19	of	of	ADP
cet-12872	41	20	approaches	approach	NOUN
cet-12872	41	21	.	.	PUNCT
cet-12872	42	1	however	however	ADV
cet-12872	42	2	there	there	PRON
cet-12872	42	3	is	be	VERB
cet-12872	42	4	no	no	DET
cet-12872	42	5	standard	standard	ADJ
cet-12872	42	6	methodology	methodology	NOUN
cet-12872	42	7	,	,	PUNCT
cet-12872	42	8	or	or	CCONJ
cet-12872	42	9	even	even	ADV
cet-12872	42	10	no	no	DET
cet-12872	42	11	legally	legally	ADV
cet-12872	42	12	accepted	accept	VERB
cet-12872	42	13	guidelines	guideline	NOUN
cet-12872	42	14	facilitating	facilitate	VERB
cet-12872	42	15	the	the	DET
cet-12872	42	16	choice	choice	NOUN
cet-12872	42	17	of	of	ADP
cet-12872	42	18	lca	lca	PROPN
cet-12872	42	19	method	method	PROPN
cet-12872	42	20	.	.	PUNCT
cet-12872	43	1	the	the	DET
cet-12872	43	2	only	only	ADJ
cet-12872	43	3	aspect	aspect	NOUN
cet-12872	43	4	which	which	PRON
cet-12872	43	5	can	can	AUX
cet-12872	43	6	be	be	AUX
cet-12872	43	7	systematically	systematically	ADV
cet-12872	43	8	verified	verify	VERB
cet-12872	43	9	is	be	AUX
cet-12872	43	10	accordance	accordance	NOUN
cet-12872	43	11	with	with	ADP
cet-12872	43	12	the	the	DET
cet-12872	43	13	iso	iso	NOUN
cet-12872	43	14	14040	14040	NUM
cet-12872	43	15	and	and	CCONJ
cet-12872	43	16	14044	14044	NUM
cet-12872	43	17	standards	standard	NOUN
cet-12872	43	18	(	(	PUNCT
cet-12872	43	19	klöpffer	klöpffer	NOUN
cet-12872	43	20	,	,	PUNCT
cet-12872	43	21	grahl	grahl	NOUN
cet-12872	43	22	,	,	PUNCT
cet-12872	43	23	2014	2014	NUM
cet-12872	43	24	)	)	PUNCT
cet-12872	43	25	.	.	PUNCT
cet-12872	44	1	the	the	DET
cet-12872	44	2	first	first	ADJ
cet-12872	44	3	steps	step	NOUN
cet-12872	44	4	for	for	ADP
cet-12872	44	5	setting	set	VERB
cet-12872	44	6	an	an	DET
cet-12872	44	7	inventory	inventory	NOUN
cet-12872	44	8	analysis	analysis	NOUN
cet-12872	44	9	are	be	AUX
cet-12872	44	10	the	the	DET
cet-12872	44	11	definition	definition	NOUN
cet-12872	44	12	of	of	ADP
cet-12872	44	13	the	the	DET
cet-12872	44	14	functional	functional	ADJ
cet-12872	44	15	unit	unit	NOUN
cet-12872	44	16	and	and	CCONJ
cet-12872	44	17	scope	scope	NOUN
cet-12872	44	18	of	of	ADP
cet-12872	44	19	the	the	DET
cet-12872	44	20	analysis	analysis	NOUN
cet-12872	44	21	.	.	PUNCT
cet-12872	45	1	since	since	SCONJ
cet-12872	45	2	the	the	DET
cet-12872	45	3	main	main	ADJ
cet-12872	45	4	goal	goal	NOUN
cet-12872	45	5	of	of	ADP
cet-12872	45	6	the	the	DET
cet-12872	45	7	inrep	inrep	NOUN
cet-12872	45	8	project	project	NOUN
cet-12872	45	9	was	be	AUX
cet-12872	45	10	to	to	PART
cet-12872	45	11	develop	develop	VERB
cet-12872	45	12	and	and	CCONJ
cet-12872	45	13	bring	bring	VERB
cet-12872	45	14	to	to	ADP
cet-12872	45	15	the	the	DET
cet-12872	45	16	market	market	NOUN
cet-12872	45	17	efficient	efficient	ADJ
cet-12872	45	18	indiumfree	indiumfree	PROPN
cet-12872	45	19	tcos	tcos	PROPN
cet-12872	45	20	,	,	PUNCT
cet-12872	45	21	the	the	DET
cet-12872	45	22	functional	functional	ADJ
cet-12872	45	23	unit	unit	NOUN
cet-12872	45	24	of	of	ADP
cet-12872	45	25	analysis	analysis	NOUN
cet-12872	45	26	is	be	AUX
cet-12872	45	27	related	relate	VERB
cet-12872	45	28	to	to	ADP
cet-12872	45	29	a	a	DET
cet-12872	45	30	piece	piece	NOUN
cet-12872	45	31	of	of	ADP
cet-12872	45	32	such	such	ADJ
cet-12872	45	33	layer	layer	NOUN
cet-12872	45	34	,	,	PUNCT
cet-12872	45	35	exactly	exactly	ADV
cet-12872	45	36	1	1	NUM
cet-12872	45	37	cm2	cm2	NOUN
cet-12872	45	38	of	of	ADP
cet-12872	45	39	a	a	DET
cet-12872	45	40	tco	tco	NOUN
cet-12872	45	41	layer	layer	NOUN
cet-12872	45	42	.	.	PUNCT
cet-12872	46	1	the	the	DET
cet-12872	46	2	functional	functional	ADJ
cet-12872	46	3	unit	unit	NOUN
cet-12872	46	4	is	be	AUX
cet-12872	46	5	a	a	DET
cet-12872	46	6	measure	measure	NOUN
cet-12872	46	7	of	of	ADP
cet-12872	46	8	a	a	DET
cet-12872	46	9	performance	performance	NOUN
cet-12872	46	10	of	of	ADP
cet-12872	46	11	a	a	DET
cet-12872	46	12	system	system	NOUN
cet-12872	46	13	.	.	PUNCT
cet-12872	47	1	the	the	DET
cet-12872	47	2	purpose	purpose	NOUN
cet-12872	47	3	of	of	ADP
cet-12872	47	4	the	the	DET
cet-12872	47	5	functional	functional	ADJ
cet-12872	47	6	unit	unit	NOUN
cet-12872	47	7	is	be	AUX
cet-12872	47	8	to	to	PART
cet-12872	47	9	provide	provide	VERB
cet-12872	47	10	reference	reference	NOUN
cet-12872	47	11	to	to	ADP
cet-12872	47	12	which	which	PRON
cet-12872	47	13	all	all	DET
cet-12872	47	14	inputs	input	NOUN
cet-12872	47	15	and	and	CCONJ
cet-12872	47	16	outputs	output	NOUN
cet-12872	47	17	are	be	AUX
cet-12872	47	18	related	relate	VERB
cet-12872	47	19	.	.	PUNCT
cet-12872	48	1	one	one	NUM
cet-12872	48	2	of	of	ADP
cet-12872	48	3	the	the	DET
cet-12872	48	4	most	most	ADV
cet-12872	48	5	important	important	ADJ
cet-12872	48	6	part	part	NOUN
cet-12872	48	7	in	in	ADP
cet-12872	48	8	goal	goal	NOUN
cet-12872	48	9	and	and	CCONJ
cet-12872	48	10	scope	scope	NOUN
cet-12872	48	11	is	be	AUX
cet-12872	48	12	definition	definition	NOUN
cet-12872	48	13	of	of	ADP
cet-12872	48	14	system	system	NOUN
cet-12872	48	15	boundaries	boundary	NOUN
cet-12872	48	16	.	.	PUNCT
cet-12872	49	1	decision	decision	NOUN
cet-12872	49	2	must	must	AUX
cet-12872	49	3	be	be	AUX
cet-12872	49	4	made	make	VERB
cet-12872	49	5	which	which	DET
cet-12872	49	6	unit	unit	NOUN
cet-12872	49	7	processes	process	NOUN
cet-12872	49	8	and	and	CCONJ
cet-12872	49	9	activities	activity	NOUN
cet-12872	49	10	will	will	AUX
cet-12872	49	11	be	be	AUX
cet-12872	49	12	included	include	VERB
cet-12872	49	13	in	in	ADP
cet-12872	49	14	the	the	DET
cet-12872	49	15	studies	study	NOUN
cet-12872	49	16	.	.	PUNCT
cet-12872	50	1	for	for	SCONJ
cet-12872	50	2	the	the	DET
cet-12872	50	3	presented	present	VERB
cet-12872	50	4	work	work	NOUN
cet-12872	50	5	“	"	PUNCT
cet-12872	50	6	gate	gate	NOUN
cet-12872	50	7	to	to	PART
cet-12872	50	8	gate	gate	VERB
cet-12872	50	9	”	"	PUNCT
cet-12872	50	10	approach	approach	NOUN
cet-12872	50	11	was	be	AUX
cet-12872	50	12	selected	select	VERB
cet-12872	50	13	and	and	CCONJ
cet-12872	50	14	inventory	inventory	NOUN
cet-12872	50	15	tables	table	NOUN
cet-12872	50	16	were	be	AUX
cet-12872	50	17	prepared	prepare	VERB
cet-12872	50	18	for	for	ADP
cet-12872	50	19	deposition	deposition	NOUN
cet-12872	50	20	technologies	technology	NOUN
cet-12872	50	21	.	.	PUNCT
cet-12872	51	1	the	the	DET
cet-12872	51	2	inventory	inventory	NOUN
cet-12872	51	3	analysis	analysis	NOUN
cet-12872	51	4	consists	consist	VERB
cet-12872	51	5	of	of	ADP
cet-12872	51	6	collection	collection	NOUN
cet-12872	51	7	of	of	ADP
cet-12872	51	8	detailed	detailed	ADJ
cet-12872	51	9	data	datum	NOUN
cet-12872	51	10	for	for	ADP
cet-12872	51	11	the	the	DET
cet-12872	51	12	different	different	ADJ
cet-12872	51	13	tco	tco	NOUN
cet-12872	51	14	materials	material	NOUN
cet-12872	51	15	and	and	CCONJ
cet-12872	51	16	deposition	deposition	NOUN
cet-12872	51	17	techniques	technique	NOUN
cet-12872	51	18	(	(	PUNCT
cet-12872	51	19	physical	physical	ADJ
cet-12872	51	20	/	/	SYM
cet-12872	51	21	chemical	chemical	NOUN
cet-12872	51	22	vapor	vapor	NOUN
cet-12872	51	23	deposition	deposition	NOUN
cet-12872	51	24	,	,	PUNCT
cet-12872	51	25	atomic	atomic	ADJ
cet-12872	51	26	layer	layer	NOUN
cet-12872	51	27	deposition	deposition	NOUN
cet-12872	51	28	)	)	PUNCT
cet-12872	51	29	.	.	PUNCT
cet-12872	52	1	146	146	NUM
cet-12872	52	2	the	the	DET
cet-12872	52	3	data	datum	NOUN
cet-12872	52	4	was	be	AUX
cet-12872	52	5	collected	collect	VERB
cet-12872	52	6	for	for	ADP
cet-12872	52	7	lab	lab	NOUN
cet-12872	52	8	-	-	PUNCT
cet-12872	52	9	scale	scale	NOUN
cet-12872	52	10	devices	device	NOUN
cet-12872	52	11	operated	operate	VERB
cet-12872	52	12	by	by	ADP
cet-12872	52	13	different	different	ADJ
cet-12872	52	14	project	project	NOUN
cet-12872	52	15	partners	partner	NOUN
cet-12872	52	16	providing	provide	VERB
cet-12872	52	17	a	a	DET
cet-12872	52	18	critique	critique	NOUN
cet-12872	52	19	from	from	ADP
cet-12872	52	20	a	a	DET
cet-12872	52	21	commercial	commercial	ADJ
cet-12872	52	22	perspective	perspective	NOUN
cet-12872	52	23	.	.	PUNCT
cet-12872	53	1	based	base	VERB
cet-12872	53	2	on	on	ADP
cet-12872	53	3	the	the	DET
cet-12872	53	4	obtained	obtain	VERB
cet-12872	53	5	data	datum	NOUN
cet-12872	53	6	,	,	PUNCT
cet-12872	53	7	additional	additional	ADJ
cet-12872	53	8	mass	mass	NOUN
cet-12872	53	9	and	and	CCONJ
cet-12872	53	10	energy	energy	NOUN
cet-12872	53	11	balances	balance	NOUN
cet-12872	53	12	were	be	AUX
cet-12872	53	13	calculated	calculate	VERB
cet-12872	53	14	and	and	CCONJ
cet-12872	53	15	subsequently	subsequently	ADV
cet-12872	53	16	all	all	DET
cet-12872	53	17	impacts	impact	NOUN
cet-12872	53	18	on	on	ADP
cet-12872	53	19	environment	environment	NOUN
cet-12872	53	20	were	be	AUX
cet-12872	53	21	quantified	quantify	VERB
cet-12872	53	22	.	.	PUNCT
cet-12872	54	1	additionally	additionally	ADV
cet-12872	54	2	,	,	PUNCT
cet-12872	54	3	impact	impact	NOUN
cet-12872	54	4	of	of	ADP
cet-12872	54	5	transport	transport	NOUN
cet-12872	54	6	of	of	ADP
cet-12872	54	7	raw	raw	ADJ
cet-12872	54	8	materials	material	NOUN
cet-12872	54	9	was	be	AUX
cet-12872	54	10	assessed	assess	VERB
cet-12872	54	11	:	:	PUNCT
cet-12872	54	12	transport	transport	NOUN
cet-12872	54	13	by	by	ADP
cet-12872	54	14	ferry	ferry	NOUN
cet-12872	54	15	from	from	ADP
cet-12872	54	16	china	china	PROPN
cet-12872	54	17	to	to	ADP
cet-12872	54	18	europe	europe	PROPN
cet-12872	54	19	(	(	PUNCT
cet-12872	54	20	marseille	marseille	PROPN
cet-12872	54	21	)	)	PUNCT
cet-12872	54	22	and	and	CCONJ
cet-12872	54	23	further	far	ADV
cet-12872	54	24	by	by	ADP
cet-12872	54	25	lorry	lorry	NOUN
cet-12872	54	26	to	to	ADP
cet-12872	54	27	the	the	DET
cet-12872	54	28	target	target	NOUN
cet-12872	54	29	production	production	NOUN
cet-12872	54	30	place	place	NOUN
cet-12872	54	31	.	.	PUNCT
cet-12872	55	1	within	within	ADP
cet-12872	55	2	the	the	DET
cet-12872	55	3	scope	scope	NOUN
cet-12872	55	4	of	of	ADP
cet-12872	55	5	inrep	inrep	NOUN
cet-12872	55	6	project	project	NOUN
cet-12872	55	7	,	,	PUNCT
cet-12872	55	8	different	different	ADJ
cet-12872	55	9	promising	promising	ADJ
cet-12872	55	10	deposition	deposition	NOUN
cet-12872	55	11	technique	technique	NOUN
cet-12872	55	12	and	and	CCONJ
cet-12872	55	13	material	material	NOUN
cet-12872	55	14	candidates	candidate	NOUN
cet-12872	55	15	for	for	ADP
cet-12872	55	16	ito	ito	PROPN
cet-12872	55	17	replacement	replacement	NOUN
cet-12872	55	18	were	be	AUX
cet-12872	55	19	analyzed	analyze	VERB
cet-12872	55	20	and	and	CCONJ
cet-12872	55	21	benchmarked	benchmarke	VERB
cet-12872	55	22	against	against	ADP
cet-12872	55	23	the	the	DET
cet-12872	55	24	state	state	NOUN
cet-12872	55	25	-	-	PUNCT
cet-12872	55	26	of	of	ADP
cet-12872	55	27	-	-	PUNCT
cet-12872	55	28	the	the	DET
cet-12872	55	29	art	art	NOUN
cet-12872	55	30	ito	ito	PROPN
cet-12872	55	31	layer	layer	NOUN
cet-12872	55	32	applied	apply	VERB
cet-12872	55	33	by	by	ADP
cet-12872	55	34	physical	physical	ADJ
cet-12872	55	35	vapor	vapor	NOUN
cet-12872	55	36	deposition	deposition	NOUN
cet-12872	55	37	(	(	PUNCT
cet-12872	55	38	pvd	pvd	NOUN
cet-12872	55	39	)	)	PUNCT
cet-12872	55	40	technique	technique	NOUN
cet-12872	55	41	of	of	ADP
cet-12872	55	42	sputtering	sputtering	NOUN
cet-12872	55	43	.	.	PUNCT
cet-12872	56	1	crucial	crucial	ADJ
cet-12872	56	2	in	in	ADP
cet-12872	56	3	lca	lca	PROPN
cet-12872	56	4	analysis	analysis	NOUN
cet-12872	56	5	is	be	AUX
cet-12872	56	6	the	the	DET
cet-12872	56	7	availability	availability	NOUN
cet-12872	56	8	of	of	ADP
cet-12872	56	9	impact	impact	NOUN
cet-12872	56	10	coefficients	coefficient	NOUN
cet-12872	56	11	in	in	ADP
cet-12872	56	12	the	the	DET
cet-12872	56	13	selected	select	VERB
cet-12872	56	14	database	database	NOUN
cet-12872	56	15	.	.	PUNCT
cet-12872	57	1	figure	figure	NOUN
cet-12872	57	2	1	1	NUM
cet-12872	57	3	:	:	PUNCT
cet-12872	57	4	process	process	NOUN
cet-12872	57	5	tree	tree	NOUN
cet-12872	57	6	for	for	ADP
cet-12872	57	7	a	a	DET
cet-12872	57	8	)	)	PUNCT
cet-12872	57	9	ito	ito	PROPN
cet-12872	57	10	and	and	CCONJ
cet-12872	57	11	b	b	X
cet-12872	57	12	)	)	PUNCT
cet-12872	57	13	zno	zno	NOUN
cet-12872	57	14	coating	coating	NOUN
cet-12872	57	15	deposited	deposit	VERB
cet-12872	57	16	by	by	ADP
cet-12872	57	17	pvd	pvd	PROPN
cet-12872	57	18	technique	technique	NOUN
cet-12872	57	19	.	.	PUNCT
cet-12872	58	1	in	in	ADP
cet-12872	58	2	case	case	NOUN
cet-12872	58	3	of	of	ADP
cet-12872	58	4	pvd	pvd	PROPN
cet-12872	58	5	processes	process	NOUN
cet-12872	58	6	and	and	CCONJ
cet-12872	58	7	related	relate	VERB
cet-12872	58	8	source	source	NOUN
cet-12872	58	9	of	of	ADP
cet-12872	58	10	ito	ito	PROPN
cet-12872	58	11	,	,	PUNCT
cet-12872	58	12	zno	zno	PROPN
cet-12872	58	13	or	or	CCONJ
cet-12872	58	14	zno	zno	NOUN
cet-12872	58	15	doped	dope	VERB
cet-12872	58	16	with	with	ADP
cet-12872	58	17	al	al	PROPN
cet-12872	58	18	such	such	ADJ
cet-12872	58	19	data	datum	NOUN
cet-12872	58	20	was	be	AUX
cet-12872	58	21	available	available	ADJ
cet-12872	58	22	,	,	PUNCT
cet-12872	58	23	what	what	PRON
cet-12872	58	24	ensured	ensure	VERB
cet-12872	58	25	exact	exact	ADJ
cet-12872	58	26	analysis	analysis	NOUN
cet-12872	58	27	without	without	ADP
cet-12872	58	28	need	need	NOUN
cet-12872	58	29	for	for	ADP
cet-12872	58	30	further	further	ADJ
cet-12872	58	31	assumptions	assumption	NOUN
cet-12872	58	32	.	.	PUNCT
cet-12872	59	1	resulting	result	VERB
cet-12872	59	2	process	process	NOUN
cet-12872	59	3	trees	tree	NOUN
cet-12872	59	4	for	for	ADP
cet-12872	59	5	ito	ito	PROPN
cet-12872	59	6	and	and	CCONJ
cet-12872	59	7	zno	zno	NOUN
cet-12872	59	8	layers	layer	NOUN
cet-12872	59	9	,	,	PUNCT
cet-12872	59	10	showing	show	VERB
cet-12872	59	11	different	different	ADJ
cet-12872	59	12	stages	stage	NOUN
cet-12872	59	13	of	of	ADP
cet-12872	59	14	the	the	DET
cet-12872	59	15	deposition	deposition	NOUN
cet-12872	59	16	process	process	NOUN
cet-12872	59	17	and	and	CCONJ
cet-12872	59	18	related	related	ADJ
cet-12872	59	19	impacts	impact	NOUN
cet-12872	59	20	are	be	AUX
cet-12872	59	21	shown	show	VERB
cet-12872	59	22	in	in	ADP
cet-12872	59	23	figure	figure	NOUN
cet-12872	59	24	1a	1a	PROPN
cet-12872	59	25	and	and	CCONJ
cet-12872	59	26	b.	b.	PROPN
cet-12872	59	27	for	for	ADP
cet-12872	59	28	the	the	DET
cet-12872	59	29	ito	ito	PROPN
cet-12872	59	30	layer	layer	NOUN
cet-12872	59	31	,	,	PUNCT
cet-12872	59	32	majority	majority	NOUN
cet-12872	59	33	of	of	ADP
cet-12872	59	34	environmental	environmental	ADJ
cet-12872	59	35	impact	impact	NOUN
cet-12872	59	36	comes	come	VERB
cet-12872	59	37	from	from	ADP
cet-12872	59	38	raw	raw	ADJ
cet-12872	59	39	materials	material	NOUN
cet-12872	59	40	usage	usage	NOUN
cet-12872	59	41	.	.	PUNCT
cet-12872	60	1	indium	indium	NOUN
cet-12872	60	2	doped	dope	VERB
cet-12872	60	3	tin	tin	NOUN
cet-12872	60	4	oxide	oxide	NOUN
cet-12872	60	5	used	use	VERB
cet-12872	60	6	for	for	ADP
cet-12872	60	7	the	the	DET
cet-12872	60	8	layer	layer	NOUN
cet-12872	60	9	accounts	account	VERB
cet-12872	60	10	for	for	ADP
cet-12872	60	11	60.9	60.9	NUM
cet-12872	60	12	%	%	NOUN
cet-12872	60	13	of	of	ADP
cet-12872	60	14	the	the	DET
cet-12872	60	15	total	total	ADJ
cet-12872	60	16	impact	impact	NOUN
cet-12872	60	17	.	.	PUNCT
cet-12872	61	1	147	147	NUM
cet-12872	61	2	therefore	therefore	ADV
cet-12872	61	3	,	,	PUNCT
cet-12872	61	4	in	in	ADP
cet-12872	61	5	order	order	NOUN
cet-12872	61	6	to	to	PART
cet-12872	61	7	reduce	reduce	VERB
cet-12872	61	8	environmental	environmental	ADJ
cet-12872	61	9	load	load	NOUN
cet-12872	61	10	ito	ito	PROPN
cet-12872	61	11	should	should	AUX
cet-12872	61	12	be	be	AUX
cet-12872	61	13	replaced	replace	VERB
cet-12872	61	14	.	.	PUNCT
cet-12872	62	1	based	base	VERB
cet-12872	62	2	on	on	ADP
cet-12872	62	3	results	result	NOUN
cet-12872	62	4	of	of	ADP
cet-12872	62	5	lca	lca	PROPN
cet-12872	62	6	analysis	analysis	NOUN
cet-12872	62	7	,	,	PUNCT
cet-12872	62	8	zno	zno	NOUN
cet-12872	62	9	seems	seem	VERB
cet-12872	62	10	to	to	PART
cet-12872	62	11	be	be	AUX
cet-12872	62	12	a	a	DET
cet-12872	62	13	promising	promising	ADJ
cet-12872	62	14	alternative	alternative	NOUN
cet-12872	62	15	for	for	ADP
cet-12872	62	16	ito	ito	NOUN
cet-12872	62	17	:	:	PUNCT
cet-12872	62	18	its	its	PRON
cet-12872	62	19	total	total	ADJ
cet-12872	62	20	environmental	environmental	ADJ
cet-12872	62	21	impact	impact	NOUN
cet-12872	62	22	is	be	AUX
cet-12872	62	23	42	42	NUM
cet-12872	62	24	%	%	NOUN
cet-12872	62	25	lower	low	ADJ
cet-12872	62	26	(	(	PUNCT
cet-12872	62	27	2.29x10	2.29x10	NUM
cet-12872	62	28	-6	-6	INTJ
cet-12872	62	29	ecopoints	ecopoint	NOUN
cet-12872	62	30	for	for	ADP
cet-12872	62	31	ito	ito	PROPN
cet-12872	62	32	vs.	vs.	CCONJ
cet-12872	62	33	1.32x10	1.32x10	NUM
cet-12872	62	34	-	-	SYM
cet-12872	62	35	6	6	NUM
cet-12872	62	36	for	for	ADP
cet-12872	62	37	zno	zno	NOUN
cet-12872	62	38	layer	layer	NOUN
cet-12872	62	39	)	)	PUNCT
cet-12872	62	40	circa	circa	VERB
cet-12872	62	41	one	one	NUM
cet-12872	62	42	half	half	NOUN
cet-12872	62	43	lower	low	ADJ
cet-12872	62	44	(	(	PUNCT
cet-12872	62	45	3.5x10	3.5x10	NUM
cet-12872	62	46	-	-	SYM
cet-12872	62	47	6	6	NUM
cet-12872	62	48	eco	eco	NOUN
cet-12872	62	49	-	-	PUNCT
cet-12872	62	50	points	point	NOUN
cet-12872	62	51	for	for	ADP
cet-12872	62	52	ito	ito	PROPN
cet-12872	62	53	vs.	vs.	ADP
cet-12872	62	54	1.55x10	1.55x10	NUM
cet-12872	62	55	-	-	SYM
cet-12872	62	56	6	6	NUM
cet-12872	62	57	for	for	ADP
cet-12872	62	58	zno	zno	NOUN
cet-12872	62	59	coating	coating	NOUN
cet-12872	62	60	)	)	PUNCT
cet-12872	62	61	.	.	PUNCT
cet-12872	63	1	the	the	DET
cet-12872	63	2	impact	impact	NOUN
cet-12872	63	3	related	relate	VERB
cet-12872	63	4	to	to	ADP
cet-12872	63	5	the	the	DET
cet-12872	63	6	material	material	NOUN
cet-12872	63	7	usage	usage	NOUN
cet-12872	63	8	is	be	AUX
cet-12872	63	9	of	of	ADP
cet-12872	63	10	minor	minor	ADJ
cet-12872	63	11	importance	importance	NOUN
cet-12872	63	12	and	and	CCONJ
cet-12872	63	13	accounts	account	NOUN
cet-12872	63	14	only	only	ADV
cet-12872	63	15	for	for	ADP
cet-12872	63	16	2.04	2.04	NUM
cet-12872	63	17	%	%	NOUN
cet-12872	63	18	of	of	ADP
cet-12872	63	19	the	the	DET
cet-12872	63	20	total	total	ADJ
cet-12872	63	21	lca	lca	PROPN
cet-12872	63	22	score	score	NOUN
cet-12872	63	23	,	,	PUNCT
cet-12872	63	24	whereas	whereas	SCONJ
cet-12872	63	25	the	the	DET
cet-12872	63	26	majority	majority	NOUN
cet-12872	63	27	of	of	ADP
cet-12872	63	28	impact	impact	NOUN
cet-12872	63	29	is	be	AUX
cet-12872	63	30	related	relate	VERB
cet-12872	63	31	to	to	ADP
cet-12872	63	32	the	the	DET
cet-12872	63	33	electricity	electricity	NOUN
cet-12872	63	34	consumption	consumption	NOUN
cet-12872	63	35	.	.	PUNCT
cet-12872	64	1	the	the	DET
cet-12872	64	2	results	result	NOUN
cet-12872	64	3	for	for	ADP
cet-12872	64	4	zno	zno	NOUN
cet-12872	64	5	layer	layer	NOUN
cet-12872	64	6	doped	dope	VERB
cet-12872	64	7	with	with	ADP
cet-12872	64	8	aluminum	aluminum	NOUN
cet-12872	64	9	are	be	AUX
cet-12872	64	10	very	very	ADV
cet-12872	64	11	similar	similar	ADJ
cet-12872	64	12	to	to	ADP
cet-12872	64	13	the	the	DET
cet-12872	64	14	score	score	NOUN
cet-12872	64	15	for	for	ADP
cet-12872	64	16	zno	zno	NOUN
cet-12872	64	17	layer	layer	NOUN
cet-12872	64	18	,	,	PUNCT
cet-12872	64	19	due	due	ADP
cet-12872	64	20	to	to	ADP
cet-12872	64	21	minor	minor	ADJ
cet-12872	64	22	amount	amount	NOUN
cet-12872	64	23	of	of	ADP
cet-12872	64	24	al	al	PROPN
cet-12872	64	25	used	use	VERB
cet-12872	64	26	.	.	PUNCT
cet-12872	65	1	from	from	ADP
cet-12872	65	2	the	the	DET
cet-12872	65	3	environmental	environmental	ADJ
cet-12872	65	4	point	point	NOUN
cet-12872	65	5	of	of	ADP
cet-12872	65	6	view	view	NOUN
cet-12872	65	7	,	,	PUNCT
cet-12872	65	8	the	the	DET
cet-12872	65	9	major	major	ADJ
cet-12872	65	10	difference	difference	NOUN
cet-12872	65	11	between	between	ADP
cet-12872	65	12	the	the	DET
cet-12872	65	13	pvd	pvd	PROPN
cet-12872	65	14	and	and	CCONJ
cet-12872	65	15	ald	ald	PROPN
cet-12872	65	16	technique	technique	NOUN
cet-12872	65	17	is	be	AUX
cet-12872	65	18	related	relate	VERB
cet-12872	65	19	to	to	ADP
cet-12872	65	20	the	the	DET
cet-12872	65	21	source	source	NOUN
cet-12872	65	22	of	of	ADP
cet-12872	65	23	zno	zno	NOUN
cet-12872	65	24	and	and	CCONJ
cet-12872	65	25	al	al	PROPN
cet-12872	65	26	doping	doping	NOUN
cet-12872	65	27	deposited	deposit	VERB
cet-12872	65	28	on	on	ADP
cet-12872	65	29	the	the	DET
cet-12872	65	30	layer	layer	NOUN
cet-12872	65	31	.	.	PUNCT
cet-12872	66	1	in	in	SCONJ
cet-12872	66	2	case	case	NOUN
cet-12872	66	3	of	of	ADP
cet-12872	66	4	ald	ald	PROPN
cet-12872	66	5	liquid	liquid	ADJ
cet-12872	66	6	precursors	precursor	NOUN
cet-12872	66	7	are	be	AUX
cet-12872	66	8	used	use	VERB
cet-12872	66	9	,	,	PUNCT
cet-12872	66	10	such	such	ADJ
cet-12872	66	11	as	as	ADP
cet-12872	66	12	for	for	ADP
cet-12872	66	13	e.g.	e.g.	ADJ
cet-12872	66	14	diethyl	diethyl	NOUN
cet-12872	66	15	zinc	zinc	NOUN
cet-12872	66	16	,	,	PUNCT
cet-12872	66	17	which	which	PRON
cet-12872	66	18	participate	participate	VERB
cet-12872	66	19	in	in	ADP
cet-12872	66	20	reactions	reaction	NOUN
cet-12872	66	21	leading	lead	VERB
cet-12872	66	22	to	to	ADP
cet-12872	66	23	zno	zno	NOUN
cet-12872	66	24	and	and	CCONJ
cet-12872	66	25	al2o3	al2o3	PROPN
cet-12872	66	26	formation	formation	NOUN
cet-12872	66	27	.	.	PUNCT
cet-12872	67	1	naturally	naturally	ADV
cet-12872	67	2	,	,	PUNCT
cet-12872	67	3	a	a	DET
cet-12872	67	4	number	number	NOUN
cet-12872	67	5	of	of	ADP
cet-12872	67	6	volatile	volatile	ADJ
cet-12872	67	7	by	by	ADP
cet-12872	67	8	-	-	PUNCT
cet-12872	67	9	products	product	NOUN
cet-12872	67	10	is	be	AUX
cet-12872	67	11	generated	generate	VERB
cet-12872	67	12	and	and	CCONJ
cet-12872	67	13	present	present	ADJ
cet-12872	67	14	in	in	ADP
cet-12872	67	15	the	the	DET
cet-12872	67	16	exhaust	exhaust	NOUN
cet-12872	67	17	gases	gas	NOUN
cet-12872	67	18	.	.	PUNCT
cet-12872	68	1	these	these	DET
cet-12872	68	2	gases	gas	NOUN
cet-12872	68	3	are	be	AUX
cet-12872	68	4	further	far	ADV
cet-12872	68	5	scrubbed	scrub	VERB
cet-12872	68	6	before	before	ADP
cet-12872	68	7	the	the	DET
cet-12872	68	8	final	final	ADJ
cet-12872	68	9	gas	gas	NOUN
cet-12872	68	10	disposal	disposal	NOUN
cet-12872	68	11	.	.	PUNCT
cet-12872	69	1	in	in	ADP
cet-12872	69	2	order	order	NOUN
cet-12872	69	3	to	to	PART
cet-12872	69	4	provide	provide	VERB
cet-12872	69	5	as	as	ADP
cet-12872	69	6	accurate	accurate	ADJ
cet-12872	69	7	analysis	analysis	NOUN
cet-12872	69	8	as	as	ADP
cet-12872	69	9	possible	possible	ADJ
cet-12872	69	10	,	,	PUNCT
cet-12872	69	11	the	the	DET
cet-12872	69	12	amount	amount	NOUN
cet-12872	69	13	of	of	ADP
cet-12872	69	14	waste	waste	NOUN
cet-12872	69	15	gases	gas	NOUN
cet-12872	69	16	purified	purify	VERB
cet-12872	69	17	in	in	ADP
cet-12872	69	18	the	the	DET
cet-12872	69	19	scrubber	scrubber	NOUN
cet-12872	69	20	was	be	AUX
cet-12872	69	21	quantified	quantify	VERB
cet-12872	69	22	and	and	CCONJ
cet-12872	69	23	subsequently	subsequently	ADV
cet-12872	69	24	the	the	DET
cet-12872	69	25	environmental	environmental	ADJ
cet-12872	69	26	impact	impact	NOUN
cet-12872	69	27	of	of	ADP
cet-12872	69	28	waste	waste	NOUN
cet-12872	69	29	generated	generate	VERB
cet-12872	69	30	from	from	ADP
cet-12872	69	31	scrubbing	scrubbing	NOUN
cet-12872	69	32	process	process	NOUN
cet-12872	69	33	was	be	AUX
cet-12872	69	34	modelled	model	VERB
cet-12872	69	35	.	.	PUNCT
cet-12872	70	1	the	the	DET
cet-12872	70	2	main	main	ADJ
cet-12872	70	3	challenge	challenge	NOUN
cet-12872	70	4	of	of	ADP
cet-12872	70	5	lca	lca	PROPN
cet-12872	70	6	analysis	analysis	NOUN
cet-12872	70	7	for	for	ADP
cet-12872	70	8	ald	ald	PROPN
cet-12872	70	9	technique	technique	NOUN
cet-12872	70	10	is	be	AUX
cet-12872	70	11	the	the	DET
cet-12872	70	12	use	use	NOUN
cet-12872	70	13	of	of	ADP
cet-12872	70	14	complex	complex	ADJ
cet-12872	70	15	precursors	precursor	NOUN
cet-12872	70	16	,	,	PUNCT
cet-12872	70	17	which	which	PRON
cet-12872	70	18	are	be	AUX
cet-12872	70	19	not	not	PART
cet-12872	70	20	available	available	ADJ
cet-12872	70	21	in	in	ADP
cet-12872	70	22	the	the	DET
cet-12872	70	23	ecoinvent	ecoinvent	NOUN
cet-12872	70	24	database	database	NOUN
cet-12872	70	25	.	.	PUNCT
cet-12872	71	1	in	in	ADP
cet-12872	71	2	such	such	ADJ
cet-12872	71	3	case	case	NOUN
cet-12872	71	4	,	,	PUNCT
cet-12872	71	5	the	the	DET
cet-12872	71	6	two	two	NUM
cet-12872	71	7	following	follow	VERB
cet-12872	71	8	lca	lca	PROPN
cet-12872	71	9	procedures	procedure	NOUN
cet-12872	71	10	can	can	AUX
cet-12872	71	11	be	be	AUX
cet-12872	71	12	applied	apply	VERB
cet-12872	71	13	:	:	PUNCT
cet-12872	71	14	the	the	DET
cet-12872	71	15	missing	miss	VERB
cet-12872	71	16	compounds	compound	NOUN
cet-12872	71	17	can	can	AUX
cet-12872	71	18	be	be	AUX
cet-12872	71	19	replaced	replace	VERB
cet-12872	71	20	by	by	ADP
cet-12872	71	21	the	the	DET
cet-12872	71	22	compounds	compound	NOUN
cet-12872	71	23	which	which	PRON
cet-12872	71	24	have	have	VERB
cet-12872	71	25	a	a	DET
cet-12872	71	26	similar	similar	ADJ
cet-12872	71	27	environmental	environmental	ADJ
cet-12872	71	28	impact	impact	NOUN
cet-12872	71	29	or	or	CCONJ
cet-12872	71	30	,	,	PUNCT
cet-12872	71	31	alternatively	alternatively	ADV
cet-12872	71	32	,	,	PUNCT
cet-12872	71	33	the	the	DET
cet-12872	71	34	missing	missing	ADJ
cet-12872	71	35	compounds	compound	NOUN
cet-12872	71	36	can	can	AUX
cet-12872	71	37	be	be	AUX
cet-12872	71	38	synthesized	synthesize	VERB
cet-12872	71	39	using	use	VERB
cet-12872	71	40	the	the	DET
cet-12872	71	41	substrates	substrate	NOUN
cet-12872	71	42	required	require	VERB
cet-12872	71	43	for	for	ADP
cet-12872	71	44	compound	compound	NOUN
cet-12872	71	45	production	production	NOUN
cet-12872	71	46	.	.	PUNCT
cet-12872	72	1	such	such	DET
cet-12872	72	2	an	an	DET
cet-12872	72	3	approach	approach	NOUN
cet-12872	72	4	gives	give	VERB
cet-12872	72	5	a	a	DET
cet-12872	72	6	simplified	simplified	ADJ
cet-12872	72	7	picture	picture	NOUN
cet-12872	72	8	of	of	ADP
cet-12872	72	9	the	the	DET
cet-12872	72	10	environmental	environmental	ADJ
cet-12872	72	11	impact	impact	NOUN
cet-12872	72	12	,	,	PUNCT
cet-12872	72	13	but	but	CCONJ
cet-12872	72	14	still	still	ADV
cet-12872	72	15	this	this	PRON
cet-12872	72	16	is	be	AUX
cet-12872	72	17	the	the	DET
cet-12872	72	18	most	most	ADV
cet-12872	72	19	accepted	accept	VERB
cet-12872	72	20	procedure	procedure	NOUN
cet-12872	72	21	to	to	PART
cet-12872	72	22	be	be	AUX
cet-12872	72	23	performed	perform	VERB
cet-12872	72	24	in	in	ADP
cet-12872	72	25	case	case	NOUN
cet-12872	72	26	of	of	ADP
cet-12872	72	27	lack	lack	NOUN
cet-12872	72	28	of	of	ADP
cet-12872	72	29	data	datum	NOUN
cet-12872	72	30	.	.	PUNCT
cet-12872	73	1	in	in	ADP
cet-12872	73	2	order	order	NOUN
cet-12872	73	3	to	to	PART
cet-12872	73	4	determine	determine	VERB
cet-12872	73	5	sensitivity	sensitivity	NOUN
cet-12872	73	6	and	and	CCONJ
cet-12872	73	7	accuracy	accuracy	NOUN
cet-12872	73	8	of	of	ADP
cet-12872	73	9	applied	apply	VERB
cet-12872	73	10	lca	lca	PROPN
cet-12872	73	11	methodology	methodology	PROPN
cet-12872	73	12	,	,	PUNCT
cet-12872	73	13	calculations	calculation	NOUN
cet-12872	73	14	for	for	ADP
cet-12872	73	15	both	both	DET
cet-12872	73	16	methods	method	NOUN
cet-12872	73	17	compound	compound	NOUN
cet-12872	73	18	replacement	replacement	NOUN
cet-12872	73	19	and	and	CCONJ
cet-12872	73	20	compound	compound	NOUN
cet-12872	73	21	synthesis	synthesis	NOUN
cet-12872	73	22	were	be	AUX
cet-12872	73	23	carried	carry	VERB
cet-12872	73	24	out	out	ADP
cet-12872	73	25	.	.	PUNCT
cet-12872	74	1	sensitivity	sensitivity	NOUN
cet-12872	74	2	analysis	analysis	NOUN
cet-12872	74	3	of	of	ADP
cet-12872	74	4	lca	lca	PROPN
cet-12872	74	5	calculations	calculation	NOUN
cet-12872	74	6	showed	show	VERB
cet-12872	74	7	that	that	SCONJ
cet-12872	74	8	for	for	ADP
cet-12872	74	9	compounds	compound	NOUN
cet-12872	74	10	replacement	replacement	NOUN
cet-12872	74	11	and	and	CCONJ
cet-12872	74	12	synthesis	synthesis	NOUN
cet-12872	74	13	,	,	PUNCT
cet-12872	74	14	similar	similar	ADJ
cet-12872	74	15	values	value	NOUN
cet-12872	74	16	of	of	ADP
cet-12872	74	17	single	single	ADJ
cet-12872	74	18	score	score	NOUN
cet-12872	74	19	were	be	AUX
cet-12872	74	20	obtained	obtain	VERB
cet-12872	74	21	which	which	PRON
cet-12872	74	22	proves	prove	VERB
cet-12872	74	23	accuracy	accuracy	NOUN
cet-12872	74	24	of	of	ADP
cet-12872	74	25	applied	apply	VERB
cet-12872	74	26	methods	method	NOUN
cet-12872	74	27	for	for	ADP
cet-12872	74	28	substitution	substitution	NOUN
cet-12872	74	29	of	of	ADP
cet-12872	74	30	missing	miss	VERB
cet-12872	74	31	data	datum	NOUN
cet-12872	74	32	.	.	PUNCT
cet-12872	75	1	the	the	DET
cet-12872	75	2	process	process	NOUN
cet-12872	75	3	tree	tree	NOUN
cet-12872	75	4	for	for	ADP
cet-12872	75	5	zno	zno	NOUN
cet-12872	75	6	:	:	PUNCT
cet-12872	75	7	al	al	PROPN
cet-12872	75	8	layer	layer	NOUN
cet-12872	75	9	,	,	PUNCT
cet-12872	75	10	ald	ald	PROPN
cet-12872	75	11	technique	technique	NOUN
cet-12872	75	12	indicate	indicate	VERB
cet-12872	75	13	that	that	SCONJ
cet-12872	75	14	the	the	DET
cet-12872	75	15	main	main	ADJ
cet-12872	75	16	contributions	contribution	NOUN
cet-12872	75	17	are	be	AUX
cet-12872	75	18	related	relate	VERB
cet-12872	75	19	to	to	ADP
cet-12872	75	20	electricity	electricity	NOUN
cet-12872	75	21	consumption	consumption	NOUN
cet-12872	75	22	and	and	CCONJ
cet-12872	75	23	nitrogen	nitrogen	NOUN
cet-12872	75	24	usage	usage	NOUN
cet-12872	75	25	.	.	PUNCT
cet-12872	76	1	impact	impact	NOUN
cet-12872	76	2	related	relate	VERB
cet-12872	76	3	to	to	ADP
cet-12872	76	4	the	the	DET
cet-12872	76	5	deposited	deposit	VERB
cet-12872	76	6	material	material	NOUN
cet-12872	76	7	is	be	AUX
cet-12872	76	8	of	of	ADP
cet-12872	76	9	minor	minor	ADJ
cet-12872	76	10	importance	importance	NOUN
cet-12872	76	11	.	.	PUNCT
cet-12872	77	1	lca	lca	PROPN
cet-12872	77	2	analysis	analysis	NOUN
cet-12872	77	3	for	for	ADP
cet-12872	77	4	cvd	cvd	PROPN
cet-12872	77	5	deposition	deposition	NOUN
cet-12872	77	6	of	of	ADP
cet-12872	77	7	zno	zno	NOUN
cet-12872	77	8	with	with	ADP
cet-12872	77	9	boron	boron	NOUN
cet-12872	77	10	doping	doping	NOUN
cet-12872	77	11	was	be	AUX
cet-12872	77	12	carried	carry	VERB
cet-12872	77	13	out	out	ADP
cet-12872	77	14	.	.	PUNCT
cet-12872	78	1	for	for	ADP
cet-12872	78	2	cvd	cvd	PROPN
cet-12872	78	3	technique	technique	NOUN
cet-12872	78	4	of	of	ADP
cet-12872	78	5	zno	zno	NOUN
cet-12872	78	6	:	:	PUNCT
cet-12872	78	7	b	b	NOUN
cet-12872	78	8	deposition	deposition	NOUN
cet-12872	78	9	,	,	PUNCT
cet-12872	78	10	all	all	DET
cet-12872	78	11	the	the	DET
cet-12872	78	12	data	datum	NOUN
cet-12872	78	13	necessary	necessary	ADJ
cet-12872	78	14	for	for	ADP
cet-12872	78	15	lca	lca	PROPN
cet-12872	78	16	calculations	calculation	NOUN
cet-12872	78	17	,	,	PUNCT
cet-12872	78	18	except	except	SCONJ
cet-12872	78	19	diethylzinc	diethylzinc	PROPN
cet-12872	78	20	(	(	PUNCT
cet-12872	78	21	dez	dez	PROPN
cet-12872	78	22	)	)	PUNCT
cet-12872	78	23	were	be	AUX
cet-12872	78	24	available	available	ADJ
cet-12872	78	25	in	in	ADP
cet-12872	78	26	the	the	DET
cet-12872	78	27	ecoinvent	ecoinvent	PROPN
cet-12872	78	28	database	database	NOUN
cet-12872	78	29	.	.	PUNCT
cet-12872	79	1	trimethylborate	trimethylborate	PROPN
cet-12872	79	2	was	be	AUX
cet-12872	79	3	selected	select	VERB
cet-12872	79	4	as	as	ADP
cet-12872	79	5	the	the	DET
cet-12872	79	6	most	most	ADV
cet-12872	79	7	adequate	adequate	ADJ
cet-12872	79	8	replacement	replacement	NOUN
cet-12872	79	9	for	for	ADP
cet-12872	79	10	actually	actually	ADV
cet-12872	79	11	used	use	VERB
cet-12872	79	12	diethylzinc	diethylzinc	NOUN
cet-12872	79	13	.	.	PUNCT
cet-12872	80	1	in	in	ADP
cet-12872	80	2	the	the	DET
cet-12872	80	3	case	case	NOUN
cet-12872	80	4	of	of	ADP
cet-12872	80	5	zno	zno	NOUN
cet-12872	80	6	-	-	PUNCT
cet-12872	80	7	based	base	VERB
cet-12872	80	8	layers	layer	NOUN
cet-12872	80	9	,	,	PUNCT
cet-12872	80	10	deposited	deposit	VERB
cet-12872	80	11	by	by	ADP
cet-12872	80	12	different	different	ADJ
cet-12872	80	13	techniques	technique	NOUN
cet-12872	80	14	,	,	PUNCT
cet-12872	80	15	electricity	electricity	NOUN
cet-12872	80	16	consumption	consumption	NOUN
cet-12872	80	17	proved	prove	VERB
cet-12872	80	18	to	to	PART
cet-12872	80	19	be	be	AUX
cet-12872	80	20	the	the	DET
cet-12872	80	21	key	key	ADJ
cet-12872	80	22	contributor	contributor	NOUN
cet-12872	80	23	to	to	ADP
cet-12872	80	24	environmental	environmental	ADJ
cet-12872	80	25	impact	impact	NOUN
cet-12872	80	26	.	.	PUNCT
cet-12872	81	1	however	however	ADV
cet-12872	81	2	,	,	PUNCT
cet-12872	81	3	the	the	DET
cet-12872	81	4	lca	lca	PROPN
cet-12872	81	5	calculations	calculation	NOUN
cet-12872	81	6	were	be	AUX
cet-12872	81	7	based	base	VERB
cet-12872	81	8	on	on	ADP
cet-12872	81	9	data	datum	NOUN
cet-12872	81	10	gathered	gather	VERB
cet-12872	81	11	from	from	ADP
cet-12872	81	12	lab	lab	NOUN
cet-12872	81	13	scale	scale	NOUN
cet-12872	81	14	devices	device	NOUN
cet-12872	81	15	,	,	PUNCT
cet-12872	81	16	which	which	PRON
cet-12872	81	17	usually	usually	ADV
cet-12872	81	18	are	be	AUX
cet-12872	81	19	less	less	ADJ
cet-12872	81	20	energy	energy	NOUN
cet-12872	81	21	efficient	efficient	ADJ
cet-12872	81	22	than	than	ADP
cet-12872	81	23	industrial	industrial	ADJ
cet-12872	81	24	scale	scale	NOUN
cet-12872	81	25	ones	one	NOUN
cet-12872	81	26	.	.	PUNCT
cet-12872	82	1	therefore	therefore	ADV
cet-12872	82	2	,	,	PUNCT
cet-12872	82	3	it	it	PRON
cet-12872	82	4	is	be	AUX
cet-12872	82	5	essential	essential	ADJ
cet-12872	82	6	to	to	PART
cet-12872	82	7	validate	validate	VERB
cet-12872	82	8	how	how	SCONJ
cet-12872	82	9	the	the	DET
cet-12872	82	10	results	result	NOUN
cet-12872	82	11	of	of	ADP
cet-12872	82	12	analysis	analysis	NOUN
cet-12872	82	13	would	would	AUX
cet-12872	82	14	change	change	VERB
cet-12872	82	15	with	with	ADP
cet-12872	82	16	energy	energy	NOUN
cet-12872	82	17	efficiency	efficiency	NOUN
cet-12872	82	18	of	of	ADP
cet-12872	82	19	the	the	DET
cet-12872	82	20	process	process	NOUN
cet-12872	82	21	.	.	PUNCT
cet-12872	83	1	lca	lca	PROPN
cet-12872	83	2	analysis	analysis	NOUN
cet-12872	83	3	was	be	AUX
cet-12872	83	4	recalculated	recalculate	VERB
cet-12872	83	5	for	for	ADP
cet-12872	83	6	each	each	DET
cet-12872	83	7	case	case	NOUN
cet-12872	83	8	,	,	PUNCT
cet-12872	83	9	assuming	assume	VERB
cet-12872	83	10	that	that	SCONJ
cet-12872	83	11	the	the	DET
cet-12872	83	12	energy	energy	NOUN
cet-12872	83	13	consumption	consumption	NOUN
cet-12872	83	14	for	for	ADP
cet-12872	83	15	the	the	DET
cet-12872	83	16	deposition	deposition	NOUN
cet-12872	83	17	process	process	NOUN
cet-12872	83	18	was	be	AUX
cet-12872	83	19	reduced	reduce	VERB
cet-12872	83	20	by	by	ADP
cet-12872	83	21	10	10	NUM
cet-12872	83	22	,	,	PUNCT
cet-12872	83	23	20	20	NUM
cet-12872	83	24	,	,	PUNCT
cet-12872	83	25	50	50	NUM
cet-12872	83	26	and	and	CCONJ
cet-12872	83	27	100	100	NUM
cet-12872	83	28	%	%	NOUN
cet-12872	83	29	.	.	PUNCT
cet-12872	84	1	with	with	ADP
cet-12872	84	2	higher	high	ADJ
cet-12872	84	3	energy	energy	NOUN
cet-12872	84	4	efficiency	efficiency	NOUN
cet-12872	84	5	,	,	PUNCT
cet-12872	84	6	zno	zno	NOUN
cet-12872	84	7	layer	layer	NOUN
cet-12872	84	8	deposited	deposit	VERB
cet-12872	84	9	by	by	ADP
cet-12872	84	10	pvd	pvd	PROPN
cet-12872	84	11	process	process	NOUN
cet-12872	84	12	has	have	VERB
cet-12872	84	13	even	even	ADV
cet-12872	84	14	lower	low	ADJ
cet-12872	84	15	environmental	environmental	ADJ
cet-12872	84	16	impact	impact	NOUN
cet-12872	84	17	that	that	PRON
cet-12872	84	18	the	the	DET
cet-12872	84	19	ito	ito	PROPN
cet-12872	84	20	layer	layer	NOUN
cet-12872	84	21	.	.	PUNCT
cet-12872	85	1	the	the	DET
cet-12872	85	2	cvd	cvd	PROPN
cet-12872	85	3	and	and	CCONJ
cet-12872	85	4	ald	ald	PROPN
cet-12872	85	5	techniques	technique	NOUN
cet-12872	85	6	are	be	AUX
cet-12872	85	7	characterized	characterize	VERB
cet-12872	85	8	by	by	ADP
cet-12872	85	9	higher	high	ADJ
cet-12872	85	10	energy	energy	NOUN
cet-12872	85	11	consumption	consumption	NOUN
cet-12872	85	12	than	than	ADP
cet-12872	85	13	the	the	DET
cet-12872	85	14	pvd	pvd	PROPN
cet-12872	85	15	process	process	NOUN
cet-12872	85	16	;	;	PUNCT
cet-12872	85	17	consequently	consequently	ADV
cet-12872	85	18	improvement	improvement	NOUN
cet-12872	85	19	of	of	ADP
cet-12872	85	20	energy	energy	NOUN
cet-12872	85	21	efficiency	efficiency	NOUN
cet-12872	85	22	for	for	ADP
cet-12872	85	23	cvd	cvd	PROPN
cet-12872	85	24	&	&	CCONJ
cet-12872	85	25	ald	ald	PROPN
cet-12872	85	26	has	have	VERB
cet-12872	85	27	a	a	DET
cet-12872	85	28	more	more	ADV
cet-12872	85	29	significant	significant	ADJ
cet-12872	85	30	impact	impact	NOUN
cet-12872	85	31	on	on	ADP
cet-12872	85	32	the	the	DET
cet-12872	85	33	lca	lca	PROPN
cet-12872	85	34	results	result	NOUN
cet-12872	85	35	.	.	PUNCT
cet-12872	86	1	table	table	NOUN
cet-12872	86	2	2	2	NUM
cet-12872	86	3	:	:	PUNCT
cet-12872	86	4	summary	summary	NOUN
cet-12872	86	5	of	of	ADP
cet-12872	86	6	lca	lca	PROPN
cet-12872	86	7	results	result	VERB
cet-12872	86	8	no	no	INTJ
cet-12872	86	9	.	.	PUNCT
cet-12872	87	1	compound	compound	NOUN
cet-12872	87	2	deposition	deposition	NOUN
cet-12872	87	3	techniques	technique	VERB
cet-12872	87	4	main	main	ADJ
cet-12872	87	5	impact	impact	NOUN
cet-12872	88	1	[	[	X
cet-12872	88	2	%	%	X
cet-12872	88	3	]	]	X
cet-12872	88	4	1	1	NUM
cet-12872	88	5	ito	ito	PROPN
cet-12872	88	6	reference	reference	NOUN
cet-12872	88	7	case	case	NOUN
cet-12872	88	8	pvd	pvd	PROPN
cet-12872	88	9	ito	ito	PROPN
cet-12872	88	10	60.9	60.9	NUM
cet-12872	88	11	2	2	NUM
cet-12872	88	12	zno	zno	NOUN
cet-12872	88	13	pvd	pvd	PROPN
cet-12872	88	14	electricity	electricity	NOUN
cet-12872	88	15	95.3	95.3	NUM
cet-12872	88	16	3	3	NUM
cet-12872	88	17	zno	zno	NOUN
cet-12872	88	18	:	:	PUNCT
cet-12872	88	19	al	al	PROPN
cet-12872	88	20	pvd	pvd	PROPN
cet-12872	88	21	electricity	electricity	NOUN
cet-12872	88	22	95	95	NUM
cet-12872	88	23	4	4	NUM
cet-12872	88	24	sno2	sno2	PROPN
cet-12872	88	25	pvd	pvd	PROPN
cet-12872	88	26	tin	tin	NOUN
cet-12872	88	27	dioxide	dioxide	NOUN
cet-12872	88	28	90.0	90.0	NUM
cet-12872	88	29	5	5	NUM
cet-12872	88	30	zno	zno	NOUN
cet-12872	88	31	:	:	PUNCT
cet-12872	88	32	b	b	PROPN
cet-12872	88	33	cvd	cvd	PROPN
cet-12872	88	34	electricity	electricity	NOUN
cet-12872	88	35	84.1	84.1	NUM
cet-12872	88	36	6	6	NUM
cet-12872	88	37	zno	zno	NOUN
cet-12872	88	38	:	:	PUNCT
cet-12872	88	39	al	al	PROPN
cet-12872	88	40	ald	ald	PROPN
cet-12872	88	41	(	(	PUNCT
cet-12872	88	42	spatial	spatial	ADJ
cet-12872	88	43	)	)	PUNCT
cet-12872	88	44	nitrogen	nitrogen	NOUN
cet-12872	88	45	99.5	99.5	NUM
cet-12872	88	46	7	7	NUM
cet-12872	88	47	zno	zno	NOUN
cet-12872	88	48	:	:	PUNCT
cet-12872	88	49	al	al	PROPN
cet-12872	88	50	ald	ald	PROPN
cet-12872	88	51	(	(	PUNCT
cet-12872	88	52	batch	batch	NOUN
cet-12872	88	53	)	)	PUNCT
cet-12872	88	54	nitrogen	nitrogen	NOUN
cet-12872	88	55	98.1	98.1	NUM
cet-12872	88	56	3	3	NUM
cet-12872	88	57	.	.	PUNCT
cet-12872	88	58	results	result	NOUN
cet-12872	88	59	results	result	NOUN
cet-12872	88	60	for	for	ADP
cet-12872	88	61	all	all	DET
cet-12872	88	62	analyzed	analyze	VERB
cet-12872	88	63	cases	case	NOUN
cet-12872	88	64	are	be	AUX
cet-12872	88	65	summarized	summarize	VERB
cet-12872	88	66	in	in	ADP
cet-12872	88	67	table	table	NOUN
cet-12872	88	68	2	2	NUM
cet-12872	88	69	.	.	PUNCT
cet-12872	89	1	for	for	ADP
cet-12872	89	2	the	the	DET
cet-12872	89	3	pvd	pvd	PROPN
cet-12872	89	4	technique	technique	NOUN
cet-12872	89	5	,	,	PUNCT
cet-12872	89	6	replacement	replacement	NOUN
cet-12872	89	7	of	of	ADP
cet-12872	89	8	ito	ito	PROPN
cet-12872	89	9	by	by	ADP
cet-12872	89	10	zno/	zno/	PROPN
cet-12872	89	11	zno	zno	PROPN
cet-12872	89	12	:	:	PUNCT
cet-12872	89	13	al	al	PROPN
cet-12872	89	14	reduces	reduce	VERB
cet-12872	89	15	environmental	environmental	ADJ
cet-12872	89	16	load	load	NOUN
cet-12872	89	17	by	by	ADP
cet-12872	89	18	half	half	NOUN
cet-12872	89	19	.	.	PUNCT
cet-12872	90	1	zno	zno	PROPN
cet-12872	90	2	/	/	SYM
cet-12872	90	3	zno	zno	PROPN
cet-12872	90	4	:	:	PUNCT
cet-12872	90	5	al	al	PROPN
cet-12872	90	6	layer	layer	NOUN
cet-12872	90	7	deposited	deposit	VERB
cet-12872	90	8	by	by	ADP
cet-12872	90	9	pvd	pvd	PROPN
cet-12872	90	10	seems	seem	VERB
cet-12872	90	11	to	to	PART
cet-12872	90	12	be	be	AUX
cet-12872	90	13	the	the	DET
cet-12872	90	14	best	good	ADJ
cet-12872	90	15	option	option	NOUN
cet-12872	90	16	for	for	ADP
cet-12872	90	17	ito	ito	PROPN
cet-12872	90	18	replacement	replacement	NOUN
cet-12872	90	19	.	.	PUNCT
cet-12872	91	1	the	the	DET
cet-12872	91	2	results	result	NOUN
cet-12872	91	3	obtained	obtain	VERB
cet-12872	91	4	for	for	ADP
cet-12872	91	5	the	the	DET
cet-12872	91	6	zno	zno	NOUN
cet-12872	91	7	:	:	PUNCT
cet-12872	91	8	al	al	PROPN
cet-12872	91	9	layer	layer	NOUN
cet-12872	91	10	deposited	deposit	VERB
cet-12872	91	11	by	by	ADP
cet-12872	91	12	cvd	cvd	PROPN
cet-12872	91	13	and	and	CCONJ
cet-12872	91	14	ald	ald	PROPN
cet-12872	91	15	techniques	technique	NOUN
cet-12872	91	16	can	can	AUX
cet-12872	91	17	not	not	PART
cet-12872	91	18	148	148	NUM
cet-12872	91	19	be	be	AUX
cet-12872	91	20	directly	directly	ADV
cet-12872	91	21	bench	bench	NOUN
cet-12872	91	22	marked	mark	VERB
cet-12872	91	23	towards	towards	ADP
cet-12872	91	24	the	the	DET
cet-12872	91	25	ito	ito	PROPN
cet-12872	91	26	layer	layer	NOUN
cet-12872	91	27	deposited	deposit	VERB
cet-12872	91	28	by	by	ADP
cet-12872	91	29	pvd	pvd	PROPN
cet-12872	91	30	,	,	PUNCT
cet-12872	91	31	since	since	SCONJ
cet-12872	91	32	differences	difference	NOUN
cet-12872	91	33	in	in	ADP
cet-12872	91	34	deposition	deposition	NOUN
cet-12872	91	35	technologies	technology	NOUN
cet-12872	91	36	result	result	VERB
cet-12872	91	37	in	in	ADP
cet-12872	91	38	significant	significant	ADJ
cet-12872	91	39	difference	difference	NOUN
cet-12872	91	40	in	in	ADP
cet-12872	91	41	the	the	DET
cet-12872	91	42	single	single	ADJ
cet-12872	91	43	score	score	NOUN
cet-12872	91	44	for	for	ADP
cet-12872	91	45	each	each	DET
cet-12872	91	46	technique	technique	NOUN
cet-12872	91	47	.	.	PUNCT
cet-12872	92	1	however	however	ADV
cet-12872	92	2	,	,	PUNCT
cet-12872	92	3	in	in	ADP
cet-12872	92	4	case	case	NOUN
cet-12872	92	5	of	of	ADP
cet-12872	92	6	all	all	DET
cet-12872	92	7	layers	layer	NOUN
cet-12872	92	8	deposited	deposit	VERB
cet-12872	92	9	by	by	ADP
cet-12872	92	10	cvd	cvd	PROPN
cet-12872	92	11	and	and	CCONJ
cet-12872	92	12	ald	ald	PROPN
cet-12872	92	13	techniques	technique	VERB
cet-12872	92	14	the	the	DET
cet-12872	92	15	main	main	ADJ
cet-12872	92	16	impact	impact	NOUN
cet-12872	92	17	is	be	AUX
cet-12872	92	18	related	relate	VERB
cet-12872	92	19	to	to	ADP
cet-12872	92	20	electricity	electricity	NOUN
cet-12872	92	21	or	or	CCONJ
cet-12872	92	22	nitrogen	nitrogen	NOUN
cet-12872	92	23	consumption	consumption	NOUN
cet-12872	92	24	and	and	CCONJ
cet-12872	92	25	the	the	DET
cet-12872	92	26	impact	impact	NOUN
cet-12872	92	27	produced	produce	VERB
cet-12872	92	28	by	by	ADP
cet-12872	92	29	the	the	DET
cet-12872	92	30	material	material	NOUN
cet-12872	92	31	is	be	AUX
cet-12872	92	32	of	of	ADP
cet-12872	92	33	minor	minor	ADJ
cet-12872	92	34	significance	significance	NOUN
cet-12872	92	35	.	.	PUNCT
cet-12872	93	1	hence	hence	ADV
cet-12872	93	2	,	,	PUNCT
cet-12872	93	3	that	that	PRON
cet-12872	93	4	proves	prove	VERB
cet-12872	93	5	that	that	SCONJ
cet-12872	93	6	zno	zno	NOUN
cet-12872	93	7	has	have	VERB
cet-12872	93	8	a	a	DET
cet-12872	93	9	low	low	ADJ
cet-12872	93	10	environmental	environmental	ADJ
cet-12872	93	11	impact	impact	NOUN
cet-12872	93	12	and	and	CCONJ
cet-12872	93	13	is	be	AUX
cet-12872	93	14	an	an	DET
cet-12872	93	15	appropriate	appropriate	ADJ
cet-12872	93	16	replacement	replacement	NOUN
cet-12872	93	17	for	for	ADP
cet-12872	93	18	ito	ito	PROPN
cet-12872	93	19	in	in	ADP
cet-12872	93	20	all	all	DET
cet-12872	93	21	cases	case	NOUN
cet-12872	93	22	.	.	PUNCT
cet-12872	94	1	4	4	X
cet-12872	94	2	.	.	X
cet-12872	94	3	conclusions	conclusion	NOUN
cet-12872	94	4	replacement	replacement	NOUN
cet-12872	94	5	of	of	ADP
cet-12872	94	6	ito	ito	PROPN
cet-12872	94	7	by	by	ADP
cet-12872	94	8	zno	zno	PROPN
cet-12872	94	9	proved	prove	VERB
cet-12872	94	10	to	to	PART
cet-12872	94	11	be	be	AUX
cet-12872	94	12	a	a	DET
cet-12872	94	13	promising	promising	ADJ
cet-12872	94	14	strategy	strategy	NOUN
cet-12872	94	15	towards	towards	ADP
cet-12872	94	16	minimization	minimization	NOUN
cet-12872	94	17	of	of	ADP
cet-12872	94	18	the	the	DET
cet-12872	94	19	environmental	environmental	ADJ
cet-12872	94	20	impact	impact	NOUN
cet-12872	94	21	of	of	ADP
cet-12872	94	22	the	the	DET
cet-12872	94	23	tco	tco	NOUN
cet-12872	94	24	layer	layer	NOUN
cet-12872	94	25	deposition	deposition	NOUN
cet-12872	94	26	process	process	NOUN
cet-12872	94	27	.	.	PUNCT
cet-12872	95	1	the	the	DET
cet-12872	95	2	impact	impact	NOUN
cet-12872	95	3	was	be	AUX
cet-12872	95	4	,	,	PUNCT
cet-12872	95	5	approximately	approximately	ADV
cet-12872	95	6	50	50	NUM
cet-12872	95	7	%	%	NOUN
cet-12872	95	8	lower	low	ADJ
cet-12872	95	9	for	for	ADP
cet-12872	95	10	zno	zno	NOUN
cet-12872	95	11	than	than	ADP
cet-12872	95	12	for	for	ADP
cet-12872	95	13	ito	ito	PROPN
cet-12872	95	14	deposited	deposit	VERB
cet-12872	95	15	by	by	ADP
cet-12872	95	16	sputtering	sputtering	NOUN
cet-12872	95	17	.	.	PUNCT
cet-12872	96	1	the	the	DET
cet-12872	96	2	zno	zno	NOUN
cet-12872	96	3	consumption	consumption	NOUN
cet-12872	96	4	is	be	AUX
cet-12872	96	5	responsible	responsible	ADJ
cet-12872	96	6	for	for	ADP
cet-12872	96	7	a	a	DET
cet-12872	96	8	minor	minor	ADJ
cet-12872	96	9	part	part	NOUN
cet-12872	96	10	of	of	ADP
cet-12872	96	11	the	the	DET
cet-12872	96	12	environmental	environmental	ADJ
cet-12872	96	13	impact	impact	NOUN
cet-12872	96	14	(	(	PUNCT
cet-12872	96	15	ca	ca	NOUN
cet-12872	96	16	.	.	NOUN
cet-12872	96	17	1	1	NUM
cet-12872	96	18	%	%	NOUN
cet-12872	96	19	)	)	PUNCT
cet-12872	96	20	.	.	PUNCT
cet-12872	97	1	however	however	ADV
cet-12872	97	2	,	,	PUNCT
cet-12872	97	3	the	the	DET
cet-12872	97	4	results	result	NOUN
cet-12872	97	5	for	for	ADP
cet-12872	97	6	sno2	sno2	NOUN
cet-12872	97	7	layer	layer	NOUN
cet-12872	97	8	are	be	AUX
cet-12872	97	9	less	less	ADV
cet-12872	97	10	promising	promising	ADJ
cet-12872	97	11	,	,	PUNCT
cet-12872	97	12	due	due	ADP
cet-12872	97	13	to	to	ADP
cet-12872	97	14	the	the	DET
cet-12872	97	15	high	high	ADJ
cet-12872	97	16	environmental	environmental	ADJ
cet-12872	97	17	impact	impact	NOUN
cet-12872	97	18	of	of	ADP
cet-12872	97	19	the	the	DET
cet-12872	97	20	sno2	sno2	PROPN
cet-12872	97	21	raw	raw	ADJ
cet-12872	97	22	material	material	NOUN
cet-12872	97	23	.	.	PUNCT
cet-12872	98	1	lca	lca	PROPN
cet-12872	98	2	analyses	analysis	NOUN
cet-12872	98	3	were	be	AUX
cet-12872	98	4	also	also	ADV
cet-12872	98	5	calculated	calculate	VERB
cet-12872	98	6	for	for	ADP
cet-12872	98	7	boron	boron	NOUN
cet-12872	98	8	doped	dope	VERB
cet-12872	98	9	zno	zno	NOUN
cet-12872	98	10	(	(	PUNCT
cet-12872	98	11	zno	zno	NOUN
cet-12872	98	12	:	:	SYM
cet-12872	98	13	b	b	NOUN
cet-12872	98	14	)	)	PUNCT
cet-12872	98	15	deposited	deposit	VERB
cet-12872	98	16	by	by	ADP
cet-12872	98	17	means	mean	NOUN
cet-12872	98	18	of	of	ADP
cet-12872	98	19	pe	pe	PROPN
cet-12872	98	20	-	-	PUNCT
cet-12872	98	21	cvd	cvd	PROPN
cet-12872	98	22	(	(	PUNCT
cet-12872	98	23	plasma	plasma	NOUN
cet-12872	98	24	enhanced	enhance	VERB
cet-12872	98	25	chemical	chemical	NOUN
cet-12872	98	26	vapour	vapour	NOUN
cet-12872	98	27	deposition	deposition	NOUN
cet-12872	98	28	)	)	PUNCT
cet-12872	98	29	.	.	PUNCT
cet-12872	99	1	in	in	ADP
cet-12872	99	2	this	this	DET
cet-12872	99	3	case	case	NOUN
cet-12872	99	4	one	one	NUM
cet-12872	99	5	of	of	ADP
cet-12872	99	6	the	the	DET
cet-12872	99	7	chemical	chemical	NOUN
cet-12872	99	8	compounds	compound	NOUN
cet-12872	99	9	needed	need	VERB
cet-12872	99	10	to	to	PART
cet-12872	99	11	make	make	VERB
cet-12872	99	12	the	the	DET
cet-12872	99	13	layer	layer	NOUN
cet-12872	99	14	,	,	PUNCT
cet-12872	99	15	diethylzinc	diethylzinc	PROPN
cet-12872	99	16	(	(	PUNCT
cet-12872	99	17	dez	dez	PROPN
cet-12872	99	18	)	)	PUNCT
cet-12872	99	19	,	,	PUNCT
cet-12872	99	20	was	be	AUX
cet-12872	99	21	not	not	PART
cet-12872	99	22	present	present	ADJ
cet-12872	99	23	in	in	ADP
cet-12872	99	24	the	the	DET
cet-12872	99	25	ecoinvent	ecoinvent	PROPN
cet-12872	99	26	database	database	PROPN
cet-12872	99	27	.	.	PUNCT
cet-12872	100	1	trimethylborate	trimethylborate	PROPN
cet-12872	100	2	was	be	AUX
cet-12872	100	3	selected	select	VERB
cet-12872	100	4	instead	instead	ADV
cet-12872	100	5	as	as	ADP
cet-12872	100	6	the	the	DET
cet-12872	100	7	most	most	ADV
cet-12872	100	8	adequate	adequate	ADJ
cet-12872	100	9	replacement	replacement	NOUN
cet-12872	100	10	.	.	PUNCT
cet-12872	101	1	analysis	analysis	NOUN
cet-12872	101	2	of	of	ADP
cet-12872	101	3	the	the	DET
cet-12872	101	4	lca	lca	PROPN
cet-12872	101	5	results	result	NOUN
cet-12872	101	6	shows	show	VERB
cet-12872	101	7	that	that	SCONJ
cet-12872	101	8	energy	energy	NOUN
cet-12872	101	9	consumption	consumption	NOUN
cet-12872	101	10	is	be	AUX
cet-12872	101	11	a	a	DET
cet-12872	101	12	decisive	decisive	ADJ
cet-12872	101	13	factor	factor	NOUN
cet-12872	101	14	affecting	affect	VERB
cet-12872	101	15	the	the	DET
cet-12872	101	16	environmental	environmental	ADJ
cet-12872	101	17	impact	impact	NOUN
cet-12872	101	18	for	for	ADP
cet-12872	101	19	cvd	cvd	PROPN
cet-12872	101	20	production	production	NOUN
cet-12872	101	21	of	of	ADP
cet-12872	101	22	zno	zno	NOUN
cet-12872	101	23	:	:	PUNCT
cet-12872	101	24	b	b	NOUN
cet-12872	101	25	:	:	PUNCT
cet-12872	101	26	84.1	84.1	NUM
cet-12872	101	27	%	%	NOUN
cet-12872	101	28	of	of	ADP
cet-12872	101	29	the	the	DET
cet-12872	101	30	total	total	ADJ
cet-12872	101	31	environmental	environmental	ADJ
cet-12872	101	32	score	score	NOUN
cet-12872	101	33	is	be	AUX
cet-12872	101	34	due	due	ADJ
cet-12872	101	35	to	to	ADP
cet-12872	101	36	electricity	electricity	NOUN
cet-12872	101	37	usage	usage	NOUN
cet-12872	101	38	versus	versus	ADP
cet-12872	101	39	only	only	ADV
cet-12872	101	40	about	about	ADV
cet-12872	101	41	9	9	NUM
cet-12872	101	42	%	%	NOUN
cet-12872	101	43	for	for	ADP
cet-12872	101	44	the	the	DET
cet-12872	101	45	material	material	NOUN
cet-12872	101	46	usage	usage	NOUN
cet-12872	101	47	.	.	PUNCT
cet-12872	102	1	in	in	ADP
cet-12872	102	2	presented	present	VERB
cet-12872	102	3	work	work	NOUN
cet-12872	102	4	electricity	electricity	NOUN
cet-12872	102	5	was	be	AUX
cet-12872	102	6	chosen	choose	VERB
cet-12872	102	7	for	for	ADP
cet-12872	102	8	the	the	DET
cet-12872	102	9	switzerland	switzerland	PROPN
cet-12872	102	10	,	,	PUNCT
cet-12872	102	11	where	where	SCONJ
cet-12872	102	12	electricity	electricity	NOUN
cet-12872	102	13	is	be	AUX
cet-12872	102	14	mainly	mainly	ADV
cet-12872	102	15	generated	generate	VERB
cet-12872	102	16	by	by	ADP
cet-12872	102	17	hydropower	hydropower	NOUN
cet-12872	102	18	(	(	PUNCT
cet-12872	102	19	59.9	59.9	NUM
cet-12872	102	20	%	%	NOUN
cet-12872	102	21	)	)	PUNCT
cet-12872	102	22	,	,	PUNCT
cet-12872	102	23	nuclear	nuclear	ADJ
cet-12872	102	24	power	power	NOUN
cet-12872	102	25	(	(	PUNCT
cet-12872	102	26	33.5	33.5	NUM
cet-12872	102	27	%	%	NOUN
cet-12872	102	28	)	)	PUNCT
cet-12872	102	29	and	and	CCONJ
cet-12872	102	30	conventional	conventional	ADJ
cet-12872	102	31	thermal	thermal	ADJ
cet-12872	102	32	power	power	NOUN
cet-12872	102	33	plants	plant	NOUN
cet-12872	102	34	(	(	PUNCT
cet-12872	102	35	2.3	2.3	NUM
cet-12872	102	36	%	%	NOUN
cet-12872	102	37	,	,	PUNCT
cet-12872	102	38	non	non	ADJ
cet-12872	102	39	-	-	ADJ
cet-12872	102	40	renewable	renewable	ADJ
cet-12872	102	41	)	)	PUNCT
cet-12872	102	42	.	.	PUNCT
cet-12872	103	1	different	different	ADJ
cet-12872	103	2	locations	location	NOUN
cet-12872	103	3	(	(	PUNCT
cet-12872	103	4	markets	market	NOUN
cet-12872	103	5	)	)	PUNCT
cet-12872	103	6	can	can	AUX
cet-12872	103	7	generate	generate	VERB
cet-12872	103	8	even	even	ADV
cet-12872	103	9	higher	high	ADJ
cet-12872	103	10	inputs	input	NOUN
cet-12872	103	11	due	due	ADP
cet-12872	103	12	to	to	ADP
cet-12872	103	13	the	the	DET
cet-12872	103	14	predominantly	predominantly	ADV
cet-12872	103	15	use	use	NOUN
cet-12872	103	16	of	of	ADP
cet-12872	103	17	energy	energy	NOUN
cet-12872	103	18	from	from	ADP
cet-12872	103	19	non	non	ADJ
cet-12872	103	20	-	-	ADJ
cet-12872	103	21	renewable	renewable	ADJ
cet-12872	103	22	sources	source	NOUN
cet-12872	103	23	.	.	PUNCT
cet-12872	104	1	the	the	DET
cet-12872	104	2	total	total	ADJ
cet-12872	104	3	score	score	NOUN
cet-12872	104	4	for	for	ADP
cet-12872	104	5	cvd	cvd	PROPN
cet-12872	104	6	process	process	NOUN
cet-12872	104	7	is	be	AUX
cet-12872	104	8	higher	high	ADJ
cet-12872	104	9	than	than	ADP
cet-12872	104	10	for	for	ADP
cet-12872	104	11	all	all	DET
cet-12872	104	12	cases	case	NOUN
cet-12872	104	13	in	in	ADP
cet-12872	104	14	pvd	pvd	PROPN
cet-12872	104	15	technique	technique	NOUN
cet-12872	104	16	.	.	PUNCT
cet-12872	105	1	lca	lca	PROPN
cet-12872	105	2	analyses	analysis	NOUN
cet-12872	105	3	of	of	ADP
cet-12872	105	4	azo	azo	NOUN
cet-12872	105	5	coatings	coating	NOUN
cet-12872	105	6	applied	apply	VERB
cet-12872	105	7	by	by	ADP
cet-12872	105	8	either	either	CCONJ
cet-12872	105	9	conventional	conventional	ADJ
cet-12872	105	10	or	or	CCONJ
cet-12872	105	11	spatial	spatial	ADJ
cet-12872	105	12	atomic	atomic	ADJ
cet-12872	105	13	layer	layer	NOUN
cet-12872	105	14	deposition	deposition	NOUN
cet-12872	105	15	revealed	reveal	VERB
cet-12872	105	16	a	a	DET
cet-12872	105	17	score	score	NOUN
cet-12872	105	18	significantly	significantly	ADV
cet-12872	105	19	higher	high	ADJ
cet-12872	105	20	than	than	ADP
cet-12872	105	21	that	that	PRON
cet-12872	105	22	of	of	ADP
cet-12872	105	23	the	the	DET
cet-12872	105	24	pvd	pvd	PROPN
cet-12872	105	25	and	and	CCONJ
cet-12872	105	26	pe	pe	PROPN
cet-12872	105	27	-	-	PUNCT
cet-12872	105	28	cvd	cvd	NOUN
cet-12872	105	29	azo	azo	NOUN
cet-12872	105	30	coatings	coating	NOUN
cet-12872	105	31	.	.	PUNCT
cet-12872	106	1	this	this	PRON
cet-12872	106	2	was	be	AUX
cet-12872	106	3	due	due	ADJ
cet-12872	106	4	to	to	ADP
cet-12872	106	5	high	high	ADJ
cet-12872	106	6	nitrogen	nitrogen	NOUN
cet-12872	106	7	and/or	and/or	CCONJ
cet-12872	106	8	electricity	electricity	NOUN
cet-12872	106	9	usage	usage	NOUN
cet-12872	106	10	.	.	PUNCT
cet-12872	107	1	this	this	DET
cet-12872	107	2	result	result	NOUN
cet-12872	107	3	is	be	AUX
cet-12872	107	4	strongly	strongly	ADV
cet-12872	107	5	influenced	influence	VERB
cet-12872	107	6	by	by	ADP
cet-12872	107	7	the	the	DET
cet-12872	107	8	operation	operation	NOUN
cet-12872	107	9	of	of	ADP
cet-12872	107	10	the	the	DET
cet-12872	107	11	scale	scale	NOUN
cet-12872	107	12	and	and	CCONJ
cet-12872	107	13	experimental	experimental	ADJ
cet-12872	107	14	nature	nature	NOUN
cet-12872	107	15	of	of	ADP
cet-12872	107	16	the	the	DET
cet-12872	107	17	equipment	equipment	NOUN
cet-12872	107	18	for	for	ADP
cet-12872	107	19	which	which	PRON
cet-12872	107	20	the	the	DET
cet-12872	107	21	data	datum	NOUN
cet-12872	107	22	has	have	AUX
cet-12872	107	23	been	be	AUX
cet-12872	107	24	collected	collect	VERB
cet-12872	107	25	,	,	PUNCT
cet-12872	107	26	exaggerating	exaggerate	VERB
cet-12872	107	27	the	the	DET
cet-12872	107	28	outcome	outcome	NOUN
cet-12872	107	29	.	.	PUNCT
cet-12872	108	1	nevertheless	nevertheless	ADV
cet-12872	108	2	,	,	PUNCT
cet-12872	108	3	crucial	crucial	ADJ
cet-12872	108	4	is	be	AUX
cet-12872	108	5	,	,	PUNCT
cet-12872	108	6	that	that	SCONJ
cet-12872	108	7	the	the	DET
cet-12872	108	8	impact	impact	NOUN
cet-12872	108	9	related	relate	VERB
cet-12872	108	10	to	to	ADP
cet-12872	108	11	the	the	DET
cet-12872	108	12	deposited	deposit	VERB
cet-12872	108	13	material	material	NOUN
cet-12872	108	14	is	be	AUX
cet-12872	108	15	minor	minor	ADJ
cet-12872	108	16	,	,	PUNCT
cet-12872	108	17	what	what	PRON
cet-12872	108	18	proves	prove	VERB
cet-12872	108	19	that	that	SCONJ
cet-12872	108	20	zno	zno	NOUN
cet-12872	108	21	coatings	coating	NOUN
cet-12872	108	22	enable	enable	VERB
cet-12872	108	23	to	to	PART
cet-12872	108	24	reduce	reduce	VERB
cet-12872	108	25	the	the	DET
cet-12872	108	26	final	final	ADJ
cet-12872	108	27	environmental	environmental	ADJ
cet-12872	108	28	load	load	NOUN
cet-12872	108	29	.	.	PUNCT
cet-12872	109	1	obtained	obtain	VERB
cet-12872	109	2	lca	lca	PROPN
cet-12872	109	3	results	result	NOUN
cet-12872	109	4	support	support	VERB
cet-12872	109	5	further	further	ADJ
cet-12872	109	6	process	process	NOUN
cet-12872	109	7	improvement	improvement	NOUN
cet-12872	109	8	and	and	CCONJ
cet-12872	109	9	help	help	VERB
cet-12872	109	10	to	to	PART
cet-12872	109	11	determine	determine	VERB
cet-12872	109	12	possibilities	possibility	NOUN
cet-12872	109	13	of	of	ADP
cet-12872	109	14	environmental	environmental	ADJ
cet-12872	109	15	impact	impact	NOUN
cet-12872	109	16	minimization	minimization	NOUN
cet-12872	109	17	.	.	PUNCT
cet-12872	110	1	acknowledgments	acknowledgment	NOUN
cet-12872	110	2	this	this	DET
cet-12872	110	3	project	project	NOUN
cet-12872	110	4	has	have	AUX
cet-12872	110	5	received	receive	VERB
cet-12872	110	6	funding	funding	NOUN
cet-12872	110	7	from	from	ADP
cet-12872	110	8	the	the	DET
cet-12872	110	9	european	european	PROPN
cet-12872	110	10	union	union	PROPN
cet-12872	110	11	’s	’s	PART
cet-12872	110	12	horizon	horizon	NOUN
cet-12872	110	13	2020	2020	NUM
cet-12872	110	14	research	research	NOUN
cet-12872	110	15	and	and	CCONJ
cet-12872	110	16	innovation	innovation	NOUN
cet-12872	110	17	programme	programme	NOUN
cet-12872	110	18	under	under	ADP
cet-12872	110	19	grant	grant	NOUN
cet-12872	110	20	agreement	agreement	NOUN
cet-12872	110	21	no	no	DET
cet-12872	110	22	641864	641864	NUM
cet-12872	110	23	.	.	PUNCT
cet-12872	111	1	references	reference	NOUN
cet-12872	111	2	afre	afre	PROPN
cet-12872	111	3	r.	r.	PROPN
cet-12872	111	4	a.	a.	PROPN
cet-12872	111	5	,	,	PUNCT
cet-12872	111	6	sharma	sharma	PROPN
cet-12872	111	7	n.	n.	PROPN
cet-12872	111	8	,	,	PUNCT
cet-12872	111	9	sharon	sharon	PROPN
cet-12872	111	10	m.	m.	PROPN
cet-12872	111	11	,	,	PUNCT
cet-12872	111	12	sharon	sharon	PROPN
cet-12872	111	13	m.	m.	PROPN
cet-12872	111	14	,	,	PUNCT
cet-12872	111	15	2018	2018	NUM
cet-12872	111	16	,	,	PUNCT
cet-12872	111	17	transparent	transparent	ADJ
cet-12872	111	18	conducting	conduct	VERB
cet-12872	111	19	oxide	oxide	NOUN
cet-12872	111	20	films	film	NOUN
cet-12872	111	21	for	for	ADP
cet-12872	111	22	various	various	ADJ
cet-12872	111	23	applications	application	NOUN
cet-12872	111	24	:	:	PUNCT
cet-12872	111	25	a	a	DET
cet-12872	111	26	review	review	NOUN
cet-12872	111	27	.	.	PUNCT
cet-12872	112	1	reviews	review	NOUN
cet-12872	112	2	on	on	ADP
cet-12872	112	3	advanced	advanced	ADJ
cet-12872	112	4	materials	material	NOUN
cet-12872	112	5	science	science	NOUN
cet-12872	112	6	,	,	PUNCT
cet-12872	112	7	53	53	NUM
cet-12872	112	8	(	(	PUNCT
cet-12872	112	9	1	1	NUM
cet-12872	112	10	):	):	PUNCT
cet-12872	112	11	79–89	79–89	PROPN
cet-12872	112	12	.	.	PUNCT
cet-12872	113	1	bobba	bobba	PROPN
cet-12872	113	2	s.	s.	PROPN
cet-12872	113	3	,	,	PUNCT
cet-12872	113	4	carrara	carrara	PROPN
cet-12872	113	5	s.	s.	PROPN
cet-12872	113	6	,	,	PUNCT
cet-12872	113	7	huisman	huisman	PROPN
cet-12872	113	8	j.	j.	PROPN
cet-12872	113	9	,	,	PUNCT
cet-12872	113	10	mathieux	mathieux	PROPN
cet-12872	113	11	f.	f.	PROPN
cet-12872	113	12	,	,	PUNCT
cet-12872	113	13	pavel	pavel	PROPN
cet-12872	113	14	c.	c.	PROPN
cet-12872	113	15	,	,	PUNCT
cet-12872	113	16	2020	2020	NUM
cet-12872	113	17	,	,	PUNCT
cet-12872	113	18	critical	critical	ADJ
cet-12872	113	19	raw	raw	ADJ
cet-12872	113	20	materials	material	NOUN
cet-12872	113	21	for	for	ADP
cet-12872	113	22	strategic	strategic	ADJ
cet-12872	113	23	technologies	technology	NOUN
cet-12872	113	24	and	and	CCONJ
cet-12872	113	25	sectors	sector	NOUN
cet-12872	113	26	in	in	ADP
cet-12872	113	27	the	the	DET
cet-12872	113	28	eu	eu	PROPN
cet-12872	113	29	a	a	DET
cet-12872	113	30	foresight	foresight	NOUN
cet-12872	113	31	study	study	NOUN
cet-12872	113	32	.	.	PUNCT
cet-12872	114	1	european	european	PROPN
cet-12872	114	2	commission	commission	PROPN
cet-12872	114	3	.	.	PUNCT
cet-12872	115	1	ciacci	ciacci	PROPN
cet-12872	115	2	l.	l.	PROPN
cet-12872	115	3	,	,	PUNCT
cet-12872	115	4	werner	werner	PROPN
cet-12872	115	5	t.t	t.t	PROPN
cet-12872	115	6	.	.	PROPN
cet-12872	115	7	,	,	PUNCT
cet-12872	115	8	vassura	vassura	PROPN
cet-12872	115	9	i.	i.	PROPN
cet-12872	115	10	,	,	PUNCT
cet-12872	115	11	passarini	passarini	PROPN
cet-12872	115	12	f.	f.	PROPN
cet-12872	115	13	,	,	PUNCT
cet-12872	115	14	2019	2019	NUM
cet-12872	115	15	,	,	PUNCT
cet-12872	115	16	backlighting	backlighte	VERB
cet-12872	115	17	the	the	DET
cet-12872	115	18	european	european	ADJ
cet-12872	115	19	indium	indium	NOUN
cet-12872	115	20	recycling	recycling	NOUN
cet-12872	115	21	potentials	potential	NOUN
cet-12872	115	22	,	,	PUNCT
cet-12872	115	23	journal	journal	NOUN
cet-12872	115	24	of	of	ADP
cet-12872	115	25	industrial	industrial	ADJ
cet-12872	115	26	ecology	ecology	NOUN
cet-12872	115	27	,	,	PUNCT
cet-12872	115	28	23	23	NUM
cet-12872	115	29	(	(	PUNCT
cet-12872	115	30	2	2	NUM
cet-12872	115	31	):	):	PUNCT
cet-12872	115	32	426–437	426–437	NUM
cet-12872	115	33	.	.	PUNCT
cet-12872	116	1	commission	commission	PROPN
cet-12872	116	2	,	,	PUNCT
cet-12872	116	3	european	european	PROPN
cet-12872	116	4	.	.	PUNCT
cet-12872	116	5	2020	2020	NUM
cet-12872	116	6	.	.	PUNCT
cet-12872	117	1	“	"	PUNCT
cet-12872	117	2	critical	critical	ADJ
cet-12872	117	3	raw	raw	ADJ
cet-12872	117	4	materials	material	NOUN
cet-12872	117	5	resilience	resilience	NOUN
cet-12872	117	6	:	:	PUNCT
cet-12872	117	7	charting	chart	VERB
cet-12872	117	8	a	a	DET
cet-12872	117	9	path	path	NOUN
cet-12872	117	10	towards	towards	ADP
cet-12872	117	11	greater	great	ADJ
cet-12872	117	12	security	security	NOUN
cet-12872	117	13	and	and	CCONJ
cet-12872	117	14	sustainability	sustainability	NOUN
cet-12872	117	15	.	.	PUNCT
cet-12872	117	16	”	"	PUNCT
cet-12872	118	1	com(2020	com(2020	VERB
cet-12872	118	2	)	)	PUNCT
cet-12872	118	3	474	474	NUM
cet-12872	118	4	final	final	ADJ
cet-12872	118	5	.	.	PUNCT
cet-12872	119	1	curran	curran	PROPN
cet-12872	119	2	m.a	m.a	PROPN
cet-12872	119	3	.	.	PROPN
cet-12872	119	4	,	,	PUNCT
cet-12872	119	5	2013	2013	NUM
cet-12872	119	6	,	,	PUNCT
cet-12872	119	7	life	life	NOUN
cet-12872	119	8	cycle	cycle	NOUN
cet-12872	119	9	assessment	assessment	NOUN
cet-12872	119	10	:	:	PUNCT
cet-12872	119	11	a	a	DET
cet-12872	119	12	review	review	NOUN
cet-12872	119	13	of	of	ADP
cet-12872	119	14	the	the	DET
cet-12872	119	15	methodology	methodology	NOUN
cet-12872	119	16	and	and	CCONJ
cet-12872	119	17	its	its	PRON
cet-12872	119	18	application	application	NOUN
cet-12872	119	19	to	to	ADP
cet-12872	119	20	sustainability	sustainability	NOUN
cet-12872	119	21	.	.	PUNCT
cet-12872	120	1	current	current	ADJ
cet-12872	120	2	opinion	opinion	NOUN
cet-12872	120	3	in	in	ADP
cet-12872	120	4	chemical	chemical	ADJ
cet-12872	120	5	engineering	engineering	NOUN
cet-12872	120	6	,	,	PUNCT
cet-12872	120	7	2:(3	2:(3	NUM
cet-12872	120	8	)	)	PUNCT
cet-12872	120	9	,	,	PUNCT
cet-12872	120	10	273–277	273–277	NUM
cet-12872	120	11	.	.	PUNCT
cet-12872	121	1	dalapati	dalapati	PROPN
cet-12872	121	2	g.	g.	PROPN
cet-12872	121	3	,	,	PUNCT
cet-12872	121	4	sharma	sharma	PROPN
cet-12872	121	5	h.	h.	PROPN
cet-12872	121	6	,	,	PUNCT
cet-12872	121	7	guchhait	guchhait	PROPN
cet-12872	121	8	a.	a.	NOUN
cet-12872	121	9	,	,	PUNCT
cet-12872	121	10	bamola	bamola	PROPN
cet-12872	121	11	p.	p.	NOUN
cet-12872	121	12	,	,	PUNCT
cet-12872	121	13	zhuk	zhuk	PROPN
cet-12872	121	14	s.	s.	PROPN
cet-12872	121	15	,	,	PUNCT
cet-12872	121	16	liu	liu	PROPN
cet-12872	121	17	q.n	q.n	PROPN
cet-12872	121	18	.	.	PROPN
cet-12872	121	19	,	,	PUNCT
cet-12872	121	20	gopalan	gopalan	PROPN
cet-12872	121	21	s.	s.	PROPN
cet-12872	121	22	,	,	PUNCT
cet-12872	121	23	et	et	PROPN
cet-12872	121	24	al	al	PROPN
cet-12872	121	25	.	.	PROPN
cet-12872	121	26	2021	2021	NUM
cet-12872	121	27	,	,	PUNCT
cet-12872	121	28	critical	critical	ADJ
cet-12872	121	29	review	review	NOUN
cet-12872	121	30	on	on	ADP
cet-12872	121	31	sno2	sno2	PROPN
cet-12872	121	32	for	for	ADP
cet-12872	121	33	transparent	transparent	ADJ
cet-12872	121	34	conductor	conductor	NOUN
cet-12872	121	35	and	and	CCONJ
cet-12872	121	36	electron	electron	NOUN
cet-12872	121	37	transport	transport	NOUN
cet-12872	121	38	layer	layer	NOUN
cet-12872	121	39	:	:	PUNCT
cet-12872	121	40	impact	impact	NOUN
cet-12872	121	41	on	on	ADP
cet-12872	121	42	dopants	dopant	NOUN
cet-12872	121	43	and	and	CCONJ
cet-12872	121	44	functionalization	functionalization	NOUN
cet-12872	121	45	of	of	ADP
cet-12872	121	46	sno2	sno2	PROPN
cet-12872	121	47	on	on	ADP
cet-12872	121	48	photovoltaic	photovoltaic	NOUN
cet-12872	121	49	and	and	CCONJ
cet-12872	121	50	energy	energy	NOUN
cet-12872	121	51	storage	storage	NOUN
cet-12872	121	52	devices	device	NOUN
cet-12872	121	53	.	.	PUNCT
cet-12872	122	1	journal	journal	NOUN
cet-12872	122	2	of	of	ADP
cet-12872	122	3	materials	material	NOUN
cet-12872	122	4	chemistry	chemistry	NOUN
cet-12872	122	5	a.	a.	NOUN
cet-12872	122	6	,	,	PUNCT
cet-12872	122	7	9	9	NUM
cet-12872	122	8	,	,	PUNCT
cet-12872	122	9	16621	16621	NUM
cet-12872	122	10	-	-	SYM
cet-12872	122	11	16684	16684	NUM
cet-12872	122	12	.	.	PUNCT
cet-12872	123	1	frenzel	frenzel	ADJ
cet-12872	123	2	m.	m.	NOUN
cet-12872	123	3	,	,	PUNCT
cet-12872	123	4	mikolajczak	mikolajczak	PROPN
cet-12872	123	5	c.	c.	PROPN
cet-12872	123	6	,	,	PUNCT
cet-12872	123	7	reuter	reuter	PROPN
cet-12872	123	8	m.a	m.a	PROPN
cet-12872	123	9	.	.	PROPN
cet-12872	123	10	,	,	PUNCT
cet-12872	123	11	gutzmer	gutzmer	PROPN
cet-12872	123	12	j.	j.	PROPN
cet-12872	123	13	,	,	PUNCT
cet-12872	123	14	2017	2017	NUM
cet-12872	123	15	,	,	PUNCT
cet-12872	123	16	quantifying	quantify	VERB
cet-12872	123	17	the	the	DET
cet-12872	123	18	relative	relative	ADJ
cet-12872	123	19	availability	availability	NOUN
cet-12872	123	20	of	of	ADP
cet-12872	123	21	high	high	ADJ
cet-12872	123	22	-	-	PUNCT
cet-12872	123	23	tech	tech	NOUN
cet-12872	123	24	by	by	ADP
cet-12872	123	25	-	-	PUNCT
cet-12872	123	26	product	product	NOUN
cet-12872	123	27	metals	metal	NOUN
cet-12872	123	28	–	–	PUNCT
cet-12872	123	29	the	the	DET
cet-12872	123	30	cases	case	NOUN
cet-12872	123	31	of	of	ADP
cet-12872	123	32	gallium	gallium	NOUN
cet-12872	123	33	,	,	PUNCT
cet-12872	123	34	germanium	germanium	NOUN
cet-12872	123	35	and	and	CCONJ
cet-12872	123	36	indium	indium	NOUN
cet-12872	123	37	.	.	PUNCT
cet-12872	124	1	resources	resource	NOUN
cet-12872	124	2	policy	policy	NOUN
cet-12872	124	3	52	52	NUM
cet-12872	124	4	(	(	PUNCT
cet-12872	124	5	april	april	PROPN
cet-12872	124	6	)	)	PUNCT
cet-12872	124	7	.	.	PUNCT
cet-12872	125	1	elsevier	elsevier	PROPN
cet-12872	125	2	ltd	ltd	PROPN
cet-12872	125	3	:	:	PUNCT
cet-12872	125	4	327–335	327–335	NUM
cet-12872	125	5	.	.	PUNCT
cet-12872	125	6	gong	gong	PROPN
cet-12872	125	7	l.	l.	PROPN
cet-12872	125	8	,	,	PUNCT
cet-12872	125	9	lu	lu	PROPN
cet-12872	125	10	j.	j.	PROPN
cet-12872	125	11	,	,	PUNCT
cet-12872	125	12	ye	ye	PROPN
cet-12872	125	13	z.	z.	PROPN
cet-12872	125	14	,	,	PUNCT
cet-12872	125	15	2011	2011	NUM
cet-12872	125	16	,	,	PUNCT
cet-12872	125	17	conductive	conductive	ADJ
cet-12872	125	18	ga	ga	PROPN
cet-12872	125	19	doped	dope	VERB
cet-12872	125	20	zno	zno	PROPN
cet-12872	125	21	/	/	SYM
cet-12872	125	22	cu	cu	PROPN
cet-12872	125	23	/	/	SYM
cet-12872	125	24	ga	ga	PROPN
cet-12872	125	25	doped	dope	VERB
cet-12872	125	26	zno	zno	PROPN
cet-12872	125	27	thin	thin	ADJ
cet-12872	125	28	films	film	NOUN
cet-12872	125	29	prepared	prepare	VERB
cet-12872	125	30	by	by	ADP
cet-12872	125	31	magnetron	magnetron	NOUN
cet-12872	125	32	sputtering	sputtering	NOUN
cet-12872	125	33	at	at	ADP
cet-12872	125	34	room	room	NOUN
cet-12872	125	35	temperature	temperature	NOUN
cet-12872	125	36	for	for	ADP
cet-12872	125	37	flexible	flexible	ADJ
cet-12872	125	38	electronics	electronic	NOUN
cet-12872	125	39	.	.	PUNCT
cet-12872	126	1	thin	thin	ADJ
cet-12872	126	2	solid	solid	ADJ
cet-12872	126	3	films	film	NOUN
cet-12872	126	4	519	519	NUM
cet-12872	126	5	(	(	PUNCT
cet-12872	126	6	11	11	NUM
cet-12872	126	7	)	)	PUNCT
cet-12872	126	8	.	.	PUNCT
cet-12872	127	1	elsevier	elsevier	PROPN
cet-12872	127	2	b.v	b.v	PROPN
cet-12872	127	3	.	.	PROPN
cet-12872	127	4	iso	iso	PROPN
cet-12872	127	5	.	.	PUNCT
cet-12872	128	1	2006	2006	NUM
cet-12872	128	2	.	.	PUNCT
cet-12872	129	1	“	"	PUNCT
cet-12872	129	2	iso	iso	PROPN
cet-12872	129	3	14044:2006	14044:2006	NUM
cet-12872	129	4	.	.	PUNCT
cet-12872	129	5	”	"	PUNCT
cet-12872	129	6	environmental	environmental	ADJ
cet-12872	129	7	management	management	NOUN
cet-12872	129	8	life	life	NOUN
cet-12872	129	9	cycle	cycle	NOUN
cet-12872	129	10	assessement	assessement	ADJ
cet-12872	129	11	requirements	requirement	NOUN
cet-12872	129	12	and	and	CCONJ
cet-12872	129	13	guidelines	guideline	NOUN
cet-12872	129	14	,	,	PUNCT
cet-12872	129	15	iso	iso	NOUN
cet-12872	129	16	14044	14044	NUM
cet-12872	129	17	,	,	PUNCT
cet-12872	129	18	international	international	ADJ
cet-12872	129	19	organization	organization	NOUN
cet-12872	129	20	for	for	ADP
cet-12872	129	21	standardization	standardization	NOUN
cet-12872	129	22	.	.	PUNCT
cet-12872	130	1	kim	kim	PROPN
cet-12872	130	2	s.	s.	PROPN
cet-12872	130	3	,	,	PUNCT
cet-12872	130	4	jeong	jeong	PROPN
cet-12872	130	5	h.	h.	PROPN
cet-12872	130	6	,	,	PUNCT
cet-12872	130	7	choi	choi	PROPN
cet-12872	130	8	s.h	s.h	PROPN
cet-12872	130	9	.	.	PROPN
cet-12872	130	10	,	,	PUNCT
cet-12872	130	11	park	park	PROPN
cet-12872	130	12	j.t	j.t	PROPN
cet-12872	130	13	.	.	PROPN
cet-12872	130	14	,	,	PUNCT
cet-12872	130	15	2019	2019	NUM
cet-12872	130	16	,	,	PUNCT
cet-12872	130	17	electrical	electrical	ADJ
cet-12872	130	18	conductivity	conductivity	NOUN
cet-12872	130	19	measurement	measurement	NOUN
cet-12872	130	20	of	of	ADP
cet-12872	130	21	transparent	transparent	ADJ
cet-12872	130	22	conductive	conductive	ADJ
cet-12872	130	23	films	film	NOUN
cet-12872	130	24	based	base	VERB
cet-12872	130	25	on	on	ADP
cet-12872	130	26	carbon	carbon	NOUN
cet-12872	130	27	nanoparticles	nanoparticle	NOUN
cet-12872	130	28	.	.	PUNCT
cet-12872	131	1	coatings	coating	NOUN
cet-12872	131	2	,	,	PUNCT
cet-12872	131	3	9	9	NUM
cet-12872	131	4	(	(	PUNCT
cet-12872	131	5	8)	8)	NUM
cet-12872	131	6	:	:	PUNCT
cet-12872	131	7	1–12	1–12	NOUN
cet-12872	131	8	.	.	PUNCT
cet-12872	132	1	klöpffer	klöpffer	PROPN
cet-12872	132	2	w.	w.	PROPN
cet-12872	132	3	,	,	PUNCT
cet-12872	132	4	grahl	grahl	PROPN
cet-12872	132	5	b.	b.	PROPN
cet-12872	132	6	,	,	PUNCT
cet-12872	132	7	2014	2014	NUM
cet-12872	132	8	,	,	PUNCT
cet-12872	132	9	life	life	NOUN
cet-12872	132	10	cycle	cycle	NOUN
cet-12872	132	11	assessment	assessment	NOUN
cet-12872	132	12	(	(	PUNCT
cet-12872	132	13	lca	lca	PROPN
cet-12872	132	14	):	):	PUNCT
cet-12872	132	15	a	a	DET
cet-12872	132	16	guide	guide	NOUN
cet-12872	132	17	to	to	PART
cet-12872	132	18	best	good	ADJ
cet-12872	132	19	practice	practice	NOUN
cet-12872	132	20	.	.	PUNCT
cet-12872	133	1	life	life	NOUN
cet-12872	133	2	cycle	cycle	NOUN
cet-12872	133	3	assessment	assessment	NOUN
cet-12872	133	4	(	(	PUNCT
cet-12872	133	5	lca	lca	PROPN
cet-12872	133	6	):	):	PUNCT
cet-12872	133	7	a	a	DET
cet-12872	133	8	guide	guide	NOUN
cet-12872	133	9	to	to	PART
cet-12872	133	10	best	good	ADJ
cet-12872	133	11	practice	practice	NOUN
cet-12872	133	12	.	.	PUNCT
cet-12872	134	1	john	john	PROPN
cet-12872	134	2	wiley	wiley	PROPN
cet-12872	134	3	&	&	CCONJ
cet-12872	134	4	sons	sons	PROPN
cet-12872	134	5	:	:	PUNCT
cet-12872	134	6	hoboken	hoboken	PROPN
cet-12872	134	7	,	,	PUNCT
cet-12872	134	8	nj	nj	PROPN
cet-12872	134	9	,	,	PUNCT
cet-12872	134	10	usa	usa	PROPN
cet-12872	134	11	,	,	PUNCT
cet-12872	134	12	2014	2014	NUM
cet-12872	134	13	.	.	PUNCT
cet-12872	135	1	149	149	NUM
cet-12872	135	2	lokanc	lokanc	NOUN
cet-12872	135	3	,	,	PUNCT
cet-12872	135	4	martin	martin	PROPN
cet-12872	135	5	,	,	PUNCT
cet-12872	135	6	roderick	roderick	PROPN
cet-12872	135	7	eggert	eggert	PROPN
cet-12872	135	8	,	,	PUNCT
cet-12872	135	9	and	and	CCONJ
cet-12872	135	10	michael	michael	PROPN
cet-12872	135	11	redlinger	redlinger	NOUN
cet-12872	135	12	.	.	PUNCT
cet-12872	135	13	2015	2015	NUM
cet-12872	135	14	,	,	PUNCT
cet-12872	135	15	the	the	DET
cet-12872	135	16	availability	availability	NOUN
cet-12872	135	17	of	of	ADP
cet-12872	135	18	indium	indium	NOUN
cet-12872	135	19	:	:	PUNCT
cet-12872	135	20	the	the	DET
cet-12872	135	21	present	present	ADJ
cet-12872	135	22	,	,	PUNCT
cet-12872	135	23	medium	medium	ADJ
cet-12872	135	24	term	term	NOUN
cet-12872	135	25	,	,	PUNCT
cet-12872	135	26	and	and	CCONJ
cet-12872	135	27	long	long	ADJ
cet-12872	135	28	term	term	NOUN
cet-12872	135	29	.	.	PUNCT
cet-12872	136	1	national	national	ADJ
cet-12872	136	2	renewable	renewable	ADJ
cet-12872	136	3	energy	energy	NOUN
cet-12872	136	4	laboratory	laboratory	NOUN
cet-12872	136	5	.	.	PUNCT
cet-12872	137	1	technical	technical	ADJ
cet-12872	137	2	report	report	NOUN
cet-12872	137	3	.	.	PUNCT
cet-12872	138	1	lu	lu	PROPN
cet-12872	138	2	y.	y.	PROPN
cet-12872	138	3	,	,	PUNCT
cet-12872	138	4	poole	poole	PROPN
cet-12872	138	5	j.e	j.e	PROPN
cet-12872	138	6	.	.	PROPN
cet-12872	138	7	,	,	PUNCT
cet-12872	138	8	aytug	aytug	PROPN
cet-12872	138	9	t.	t.	PROPN
cet-12872	138	10	,	,	PUNCT
cet-12872	138	11	meyer	meyer	PROPN
cet-12872	138	12	h.m	h.m	PROPN
cet-12872	138	13	.	.	PROPN
cet-12872	138	14	,	,	PUNCT
cet-12872	138	15	ozcan	ozcan	PROPN
cet-12872	138	16	s.	s.	PROPN
cet-12872	138	17	,	,	PUNCT
cet-12872	138	18	2015	2015	NUM
cet-12872	138	19	,	,	PUNCT
cet-12872	138	20	tunable	tunable	NOUN
cet-12872	138	21	morphologies	morphology	NOUN
cet-12872	138	22	of	of	ADP
cet-12872	138	23	indium	indium	NOUN
cet-12872	138	24	tin	tin	NOUN
cet-12872	138	25	oxide	oxide	NOUN
cet-12872	138	26	nanostructures	nanostructure	NOUN
cet-12872	138	27	using	use	VERB
cet-12872	138	28	nanocellulose	nanocellulose	ADJ
cet-12872	138	29	templates	template	NOUN
cet-12872	138	30	.	.	PUNCT
cet-12872	139	1	rsc	rsc	PROPN
cet-12872	139	2	advances	advance	NOUN
cet-12872	139	3	,	,	PUNCT
cet-12872	139	4	33	33	NUM
cet-12872	139	5	,	,	PUNCT
cet-12872	139	6	2005538	2005538	NUM
cet-12872	139	7	.	.	PUNCT
cet-12872	140	1	minami	minami	PROPN
cet-12872	140	2	t.	t.	PROPN
cet-12872	140	3	,	,	PUNCT
cet-12872	140	4	2005	2005	NUM
cet-12872	140	5	,	,	PUNCT
cet-12872	140	6	transparent	transparent	ADJ
cet-12872	140	7	conducting	conduct	VERB
cet-12872	140	8	oxide	oxide	NOUN
cet-12872	140	9	semiconductors	semiconductor	NOUN
cet-12872	140	10	for	for	ADP
cet-12872	140	11	transparent	transparent	ADJ
cet-12872	140	12	electrodes	electrode	NOUN
cet-12872	140	13	.	.	PUNCT
cet-12872	141	1	semiconductor	semiconductor	NOUN
cet-12872	141	2	science	science	NOUN
cet-12872	141	3	and	and	CCONJ
cet-12872	141	4	technology	technology	NOUN
cet-12872	141	5	,	,	PUNCT
cet-12872	141	6	20	20	NUM
cet-12872	141	7	,	,	PUNCT
cet-12872	141	8	s35	s35	PROPN
cet-12872	141	9	.	.	PROPN
cet-12872	141	10	mohamed	mohamed	PROPN
cet-12872	141	11	s.	s.	PROPN
cet-12872	141	12	h.	h.	PROPN
cet-12872	141	13	,	,	PUNCT
cet-12872	141	14	el	el	PROPN
cet-12872	141	15	-	-	PROPN
cet-12872	141	16	hossary	hossary	PROPN
cet-12872	141	17	f.m	f.m	PROPN
cet-12872	141	18	.	.	PROPN
cet-12872	141	19	,	,	PUNCT
cet-12872	141	20	gamal	gamal	PROPN
cet-12872	141	21	g.a	g.a	PROPN
cet-12872	141	22	.	.	PROPN
cet-12872	141	23	,kahlid	,kahlid	PROPN
cet-12872	141	24	m.m	m.m	PROPN
cet-12872	141	25	.	.	PROPN
cet-12872	141	26	,	,	PUNCT
cet-12872	141	27	2009	2009	NUM
cet-12872	141	28	,	,	PUNCT
cet-12872	141	29	properties	property	NOUN
cet-12872	141	30	of	of	ADP
cet-12872	141	31	indium	indium	NOUN
cet-12872	141	32	tin	tin	NOUN
cet-12872	141	33	oxide	oxide	NOUN
cet-12872	141	34	thin	thin	ADJ
cet-12872	141	35	films	film	NOUN
cet-12872	141	36	deposited	deposit	VERB
cet-12872	141	37	on	on	ADP
cet-12872	141	38	polymer	polymer	NOUN
cet-12872	141	39	substrates	substrate	NOUN
cet-12872	141	40	.	.	PUNCT
cet-12872	142	1	acta	acta	PROPN
cet-12872	142	2	physica	physica	PROPN
cet-12872	142	3	polonica	polonica	PROPN
cet-12872	142	4	a.	a.	PROPN
cet-12872	142	5	115	115	NUM
cet-12872	142	6	,	,	PUNCT
cet-12872	142	7	704	704	NUM
cet-12872	142	8	-	-	SYM
cet-12872	142	9	708	708	NUM
cet-12872	142	10	.	.	PUNCT
cet-12872	143	1	o’neill	o’neill	PROPN
cet-12872	143	2	b.	b.	PROPN
cet-12872	143	3	,	,	PUNCT
cet-12872	143	4	2010	2010	NUM
cet-12872	143	5	,	,	PUNCT
cet-12872	143	6	indium	indium	NOUN
cet-12872	143	7	market	market	NOUN
cet-12872	143	8	forces	force	NOUN
cet-12872	143	9	,	,	PUNCT
cet-12872	143	10	a	a	DET
cet-12872	143	11	commercial	commercial	ADJ
cet-12872	143	12	perspective	perspective	NOUN
cet-12872	143	13	.	.	PUNCT
cet-12872	143	14	”	"	PUNCT
cet-12872	144	1	conference	conference	NOUN
cet-12872	144	2	record	record	NOUN
cet-12872	144	3	of	of	ADP
cet-12872	144	4	the	the	DET
cet-12872	144	5	ieee	ieee	NOUN
cet-12872	144	6	photovoltaic	photovoltaic	NOUN
cet-12872	144	7	specialists	specialist	NOUN
cet-12872	144	8	conference	conference	NOUN
cet-12872	144	9	,	,	PUNCT
cet-12872	144	10	556–559	556–559	NUM
cet-12872	144	11	.	.	PUNCT
cet-12872	145	1	oviroh	oviroh	PROPN
cet-12872	145	2	p.o	p.o	PROPN
cet-12872	145	3	.	.	PROPN
cet-12872	145	4	,	,	PUNCT
cet-12872	145	5	akbarzadeh	akbarzadeh	PROPN
cet-12872	145	6	r.	r.	PROPN
cet-12872	145	7	,	,	PUNCT
cet-12872	145	8	pan	pan	PROPN
cet-12872	145	9	d.	d.	PROPN
cet-12872	145	10	,	,	PUNCT
cet-12872	145	11	coetzee	coetzee	PROPN
cet-12872	145	12	r.a.m	r.a.m	PROPN
cet-12872	145	13	.	.	PROPN
cet-12872	145	14	,	,	PUNCT
cet-12872	145	15	jen	jen	PROPN
cet-12872	145	16	t.c	t.c	PROPN
cet-12872	145	17	.	.	PROPN
cet-12872	145	18	,	,	PUNCT
cet-12872	145	19	2019	2019	NUM
cet-12872	145	20	,	,	PUNCT
cet-12872	145	21	new	new	ADJ
cet-12872	145	22	development	development	NOUN
cet-12872	145	23	of	of	ADP
cet-12872	145	24	atomic	atomic	ADJ
cet-12872	145	25	layer	layer	NOUN
cet-12872	145	26	deposition	deposition	NOUN
cet-12872	145	27	:	:	PUNCT
cet-12872	145	28	processes	process	NOUN
cet-12872	145	29	,	,	PUNCT
cet-12872	145	30	methods	method	NOUN
cet-12872	145	31	and	and	CCONJ
cet-12872	145	32	applications	application	NOUN
cet-12872	145	33	.	.	PUNCT
cet-12872	146	1	science	science	NOUN
cet-12872	146	2	and	and	CCONJ
cet-12872	146	3	technology	technology	NOUN
cet-12872	146	4	of	of	ADP
cet-12872	146	5	advanced	advanced	ADJ
cet-12872	146	6	materials	material	NOUN
cet-12872	146	7	,	,	PUNCT
cet-12872	146	8	23;20(1):465	23;20(1):465	NUM
cet-12872	146	9	-	-	SYM
cet-12872	146	10	496	496	NUM
cet-12872	146	11	suhariyanto	suhariyanto	PROPN
cet-12872	146	12	t.t	t.t	PROPN
cet-12872	146	13	.	.	PROPN
cet-12872	146	14	,	,	PUNCT
cet-12872	146	15	wahab	wahab	PROPN
cet-12872	146	16	,	,	PUNCT
cet-12872	146	17	d.a	d.a	PROPN
cet-12872	146	18	.	.	PROPN
cet-12872	146	19	,	,	PUNCT
cet-12872	146	20	rahman	rahman	PROPN
cet-12872	146	21	,	,	PUNCT
cet-12872	146	22	m.n.a	m.n.a	NOUN
cet-12872	146	23	.	.	PROPN
cet-12872	146	24	,	,	PUNCT
cet-12872	146	25	2018	2018	NUM
cet-12872	146	26	,	,	PUNCT
cet-12872	146	27	product	product	NOUN
cet-12872	146	28	design	design	NOUN
cet-12872	146	29	evaluation	evaluation	NOUN
cet-12872	146	30	using	use	VERB
cet-12872	146	31	life	life	NOUN
cet-12872	146	32	cycle	cycle	NOUN
cet-12872	146	33	assessment	assessment	NOUN
cet-12872	146	34	and	and	CCONJ
cet-12872	146	35	design	design	NOUN
cet-12872	146	36	for	for	ADP
cet-12872	146	37	assembly	assembly	NOUN
cet-12872	146	38	:	:	PUNCT
cet-12872	146	39	a	a	DET
cet-12872	146	40	case	case	NOUN
cet-12872	146	41	study	study	NOUN
cet-12872	146	42	of	of	ADP
cet-12872	146	43	a	a	DET
cet-12872	146	44	water	water	NOUN
cet-12872	146	45	leakage	leakage	NOUN
cet-12872	146	46	alarm	alarm	NOUN
cet-12872	146	47	.	.	PUNCT
cet-12872	147	1	sustainability	sustainability	NOUN
cet-12872	147	2	,	,	PUNCT
cet-12872	147	3	10	10	NUM
cet-12872	147	4	,	,	PUNCT
cet-12872	147	5	2821	2821	NUM
cet-12872	147	6	.	.	PUNCT
cet-12872	148	1	werner	werner	PROPN
cet-12872	148	2	t.	t.	PROPN
cet-12872	148	3	t.	t.	PROPN
cet-12872	148	4	,	,	PUNCT
cet-12872	148	5	mudd	mudd	PROPN
cet-12872	148	6	g.	g.	PROPN
cet-12872	148	7	m.	m.	PROPN
cet-12872	148	8	,	,	PUNCT
cet-12872	148	9	and	and	CCONJ
cet-12872	148	10	jowitt	jowitt	PROPN
cet-12872	148	11	s.	s.	PROPN
cet-12872	148	12	m.	m.	PROPN
cet-12872	148	13	,	,	PUNCT
cet-12872	148	14	2015	2015	NUM
cet-12872	148	15	,	,	PUNCT
cet-12872	148	16	indium	indium	NOUN
cet-12872	148	17	:	:	PUNCT
cet-12872	148	18	key	key	ADJ
cet-12872	148	19	issues	issue	NOUN
cet-12872	148	20	in	in	ADP
cet-12872	148	21	assessing	assess	VERB
cet-12872	148	22	mineral	mineral	NOUN
cet-12872	148	23	resources	resource	NOUN
cet-12872	148	24	and	and	CCONJ
cet-12872	148	25	long	long	ADJ
cet-12872	148	26	-	-	PUNCT
cet-12872	148	27	term	term	NOUN
cet-12872	148	28	supply	supply	NOUN
cet-12872	148	29	from	from	ADP
cet-12872	148	30	recycling	recycling	NOUN
cet-12872	148	31	.	.	PUNCT
cet-12872	149	1	transactions	transaction	NOUN
cet-12872	149	2	of	of	ADP
cet-12872	149	3	the	the	DET
cet-12872	149	4	institutions	institution	NOUN
cet-12872	149	5	of	of	ADP
cet-12872	149	6	mining	mining	NOUN
cet-12872	149	7	and	and	CCONJ
cet-12872	149	8	metallurgy	metallurgy	NOUN
cet-12872	149	9	,	,	PUNCT
cet-12872	149	10	section	section	NOUN
cet-12872	149	11	b	b	PROPN
cet-12872	149	12	:	:	PUNCT
cet-12872	149	13	applied	apply	VERB
cet-12872	149	14	earth	earth	NOUN
cet-12872	149	15	science	science	NOUN
cet-12872	149	16	,	,	PUNCT
cet-12872	149	17	124	124	NUM
cet-12872	149	18	(	(	PUNCT
cet-12872	149	19	4	4	NUM
cet-12872	149	20	):	):	PUNCT
cet-12872	149	21	213–226	213–226	NUM
cet-12872	149	22	.	.	PUNCT
cet-12872	150	1	young	young	ADJ
cet-12872	150	2	w.	w.	PROPN
cet-12872	150	3	g.	g.	PROPN
cet-12872	150	4	,	,	PUNCT
cet-12872	150	5	hartung	hartung	PROPN
cet-12872	150	6	w.	w.	PROPN
cet-12872	150	7	h.	h.	PROPN
cet-12872	150	8	,	,	PUNCT
cet-12872	150	9	crossley	crossley	PROPN
cet-12872	150	10	f.s	f.s	PROPN
cet-12872	150	11	.	.	PROPN
cet-12872	150	12	,	,	PUNCT
cet-12872	150	13	1936	1936	NUM
cet-12872	150	14	,	,	PUNCT
cet-12872	150	15	reduction	reduction	NOUN
cet-12872	150	16	of	of	ADP
cet-12872	150	17	aldehydes	aldehyde	NOUN
cet-12872	150	18	with	with	ADP
cet-12872	150	19	aluminum	aluminum	NOUN
cet-12872	150	20	isopropoxide	isopropoxide	NOUN
cet-12872	150	21	.	.	PUNCT
cet-12872	151	1	journal	journal	NOUN
cet-12872	151	2	of	of	ADP
cet-12872	151	3	the	the	DET
cet-12872	151	4	american	american	PROPN
cet-12872	151	5	chemical	chemical	PROPN
cet-12872	151	6	society	society	NOUN
cet-12872	151	7	,	,	PUNCT
cet-12872	151	8	58	58	NUM
cet-12872	151	9	,	,	PUNCT
cet-12872	151	10	100	100	NUM
cet-12872	151	11	-	-	SYM
cet-12872	151	12	102	102	NUM
cet-12872	151	13	.	.	PUNCT
cet-12872	152	1	yu	yu	PROPN
cet-12872	152	2	,	,	PUNCT
cet-12872	152	3	s.	s.	PROPN
cet-12872	152	4	,	,	PUNCT
cet-12872	152	5	li	li	PROPN
cet-12872	152	6	l.	l.	PROPN
cet-12872	152	7	,	,	PUNCT
cet-12872	152	8	lyu	lyu	NOUN
cet-12872	152	9	x.	x.	PROPN
cet-12872	152	10	,zhang	,zhang	PROPN
cet-12872	152	11	w.	w.	PROPN
cet-12872	152	12	,	,	PUNCT
cet-12872	152	13	2016	2016	NUM
cet-12872	152	14	,	,	PUNCT
cet-12872	152	15	preparation	preparation	NOUN
cet-12872	152	16	and	and	CCONJ
cet-12872	152	17	investigation	investigation	NOUN
cet-12872	152	18	of	of	ADP
cet-12872	152	19	nano	nano	NOUN
cet-12872	152	20	-	-	PUNCT
cet-12872	152	21	thick	thick	ADJ
cet-12872	152	22	fto	fto	PROPN
cet-12872	152	23	/	/	SYM
cet-12872	152	24	ag	ag	PROPN
cet-12872	152	25	/	/	SYM
cet-12872	152	26	fto	fto	PROPN
cet-12872	152	27	multilayer	multilayer	ADJ
cet-12872	152	28	transparent	transparent	ADJ
cet-12872	152	29	electrodes	electrode	NOUN
cet-12872	152	30	with	with	ADP
cet-12872	152	31	high	high	ADJ
cet-12872	152	32	figure	figure	NOUN
cet-12872	152	33	of	of	ADP
cet-12872	152	34	merit	merit	NOUN
cet-12872	152	35	.	.	PUNCT
cet-12872	153	1	scientific	scientific	ADJ
cet-12872	153	2	reports	report	NOUN
cet-12872	153	3	6	6	NUM
cet-12872	153	4	(	(	PUNCT
cet-12872	153	5	february	february	PROPN
cet-12872	153	6	)	)	PUNCT
cet-12872	153	7	.	.	PUNCT
cet-12872	154	1	nature	nature	PROPN
cet-12872	154	2	publishing	publishing	PROPN
cet-12872	154	3	group	group	NOUN
cet-12872	154	4	,	,	PUNCT
cet-12872	154	5	1–8	1–8	X
cet-12872	154	6	.	.	PUNCT
cet-12872	155	1	ziemińska	ziemińska	NOUN
cet-12872	155	2	-	-	PUNCT
cet-12872	155	3	stolarska	stolarska	PROPN
cet-12872	155	4	a.	a.	NOUN
cet-12872	155	5	,	,	PUNCT
cet-12872	155	6	barecka	barecka	PROPN
cet-12872	155	7	m.	m.	PROPN
cet-12872	155	8	,	,	PUNCT
cet-12872	155	9	zbiciński	zbiciński	PROPN
cet-12872	155	10	i.	i.	PROPN
cet-12872	155	11	,	,	PUNCT
cet-12872	155	12	2017	2017	NUM
cet-12872	155	13	,	,	PUNCT
cet-12872	155	14	effect	effect	NOUN
cet-12872	155	15	of	of	ADP
cet-12872	155	16	replacement	replacement	NOUN
cet-12872	155	17	of	of	ADP
cet-12872	155	18	tin	tin	NOUN
cet-12872	155	19	doped	dope	VERB
cet-12872	155	20	indium	indium	NOUN
cet-12872	155	21	oxide	oxide	NOUN
cet-12872	155	22	(	(	PUNCT
cet-12872	155	23	ito	ito	PROPN
cet-12872	155	24	)	)	PUNCT
cet-12872	155	25	by	by	ADP
cet-12872	155	26	zno	zno	NOUN
cet-12872	155	27	:	:	PUNCT
cet-12872	155	28	analysis	analysis	NOUN
cet-12872	155	29	of	of	ADP
cet-12872	155	30	environmental	environmental	ADJ
cet-12872	155	31	impact	impact	NOUN
cet-12872	155	32	categories.e3s	categories.e3s	ADJ
cet-12872	155	33	web	web	NOUN
cet-12872	155	34	of	of	ADP
cet-12872	155	35	conferences	conference	NOUN
cet-12872	155	36	19	19	NUM
cet-12872	155	37	,	,	PUNCT
cet-12872	155	38	1–4	1–4	PROPN
cet-12872	155	39	.	.	PUNCT
cet-12872	156	1	http://www.inrep.eu/	http://www.inrep.eu/	PROPN
cet-12872	156	2	150	150	NUM
cet-12872	156	3	62zieminskastolarska.pdf	62zieminskastolarska.pdf	NUM
cet-12872	156	4	comparative	comparative	ADJ
cet-12872	156	5	lca	lca	PROPN
cet-12872	156	6	analysis	analysis	NOUN
cet-12872	156	7	for	for	ADP
cet-12872	156	8	replacement	replacement	NOUN
cet-12872	156	9	of	of	ADP
cet-12872	156	10	materials	material	NOUN
cet-12872	156	11	to	to	PART
cet-12872	156	12	reduce	reduce	VERB
cet-12872	156	13	environmental	environmental	ADJ
cet-12872	156	14	impact	impact	NOUN