id	sid	tid	token	lemma	pos
cet-15726	1	1	doi	doi	NOUN
cet-15726	1	2	:	:	PUNCT
cet-15726	1	3	10.3303	10.3303	NUM
cet-15726	1	4	/	/	SYM
cet-15726	1	5	cet25120101	cet25120101	NOUN
cet-15726	1	6	paper	paper	NOUN
cet-15726	1	7	received	receive	VERB
cet-15726	1	8	:	:	PUNCT
cet-15726	1	9	14	14	NUM
cet-15726	1	10	june	june	PROPN
cet-15726	1	11	2025	2025	NUM
cet-15726	1	12	;	;	PUNCT
cet-15726	1	13	revised	revise	VERB
cet-15726	1	14	:	:	PUNCT
cet-15726	1	15	05	05	NUM
cet-15726	1	16	july	july	PROPN
cet-15726	1	17	2025	2025	NUM
cet-15726	1	18	;	;	PUNCT
cet-15726	1	19	accepted	accept	VERB
cet-15726	1	20	:	:	PUNCT
cet-15726	1	21	26	26	NUM
cet-15726	1	22	september	september	PROPN
cet-15726	1	23	2025	2025	NUM
cet-15726	1	24	please	please	INTJ
cet-15726	1	25	cite	cite	VERB
cet-15726	1	26	this	this	DET
cet-15726	1	27	article	article	NOUN
cet-15726	1	28	as	as	ADP
cet-15726	1	29	:	:	PUNCT
cet-15726	1	30	cardoso	cardoso	PROPN
cet-15726	1	31	w.	w.	PROPN
cet-15726	1	32	,	,	PUNCT
cet-15726	1	33	massardo	massardo	PROPN
cet-15726	1	34	s.	s.	PROPN
cet-15726	1	35	,	,	PUNCT
cet-15726	1	36	zaffar	zaffar	PROPN
cet-15726	1	37	a.	a.	NOUN
cet-15726	1	38	,	,	PUNCT
cet-15726	1	39	basbus	basbus	PROPN
cet-15726	1	40	j.f	j.f	PROPN
cet-15726	1	41	.	.	PROPN
cet-15726	1	42	,	,	PUNCT
cet-15726	1	43	presto	presto	PROPN
cet-15726	1	44	s.	s.	PROPN
cet-15726	1	45	,	,	PUNCT
cet-15726	1	46	barbucci	barbucci	PROPN
cet-15726	1	47	a.	a.	PROPN
cet-15726	1	48	,	,	PUNCT
cet-15726	1	49	viviani	viviani	NOUN
cet-15726	1	50	m.	m.	NOUN
cet-15726	1	51	,	,	PUNCT
cet-15726	1	52	2025	2025	NUM
cet-15726	1	53	,	,	PUNCT
cet-15726	1	54	spin	spin	NOUN
cet-15726	1	55	coating	coating	NOUN
cet-15726	1	56	:	:	PUNCT
cet-15726	1	57	process	process	NOUN
cet-15726	1	58	,	,	PUNCT
cet-15726	1	59	applications	application	NOUN
cet-15726	1	60	,	,	PUNCT
cet-15726	1	61	challenges	challenge	NOUN
cet-15726	1	62	,	,	PUNCT
cet-15726	1	63	and	and	CCONJ
cet-15726	1	64	characterization	characterization	NOUN
cet-15726	1	65	techniques	technique	NOUN
cet-15726	1	66	,	,	PUNCT
cet-15726	1	67	chemical	chemical	ADJ
cet-15726	1	68	engineering	engineering	NOUN
cet-15726	1	69	transactions	transaction	NOUN
cet-15726	1	70	,	,	PUNCT
cet-15726	1	71	120	120	NUM
cet-15726	1	72	,	,	PUNCT
cet-15726	1	73	601	601	NUM
cet-15726	1	74	-	-	SYM
cet-15726	1	75	606	606	NUM
cet-15726	1	76	doi:10.3303	doi:10.3303	NOUN
cet-15726	1	77	/	/	SYM
cet-15726	1	78	cet25120101	cet25120101	NOUN
cet-15726	1	79	chemical	chemical	NOUN
cet-15726	1	80	engineering	engineering	NOUN
cet-15726	1	81	transactions	transaction	NOUN
cet-15726	1	82	vol	vol	NOUN
cet-15726	1	83	.	.	PUNCT
cet-15726	2	1	120	120	NUM
cet-15726	2	2	,	,	PUNCT
cet-15726	2	3	2025	2025	NUM
cet-15726	2	4	a	a	DET
cet-15726	2	5	publication	publication	NOUN
cet-15726	2	6	of	of	ADP
cet-15726	2	7	the	the	DET
cet-15726	2	8	italian	italian	ADJ
cet-15726	2	9	association	association	NOUN
cet-15726	2	10	of	of	ADP
cet-15726	2	11	chemical	chemical	PROPN
cet-15726	2	12	engineering	engineering	NOUN
cet-15726	2	13	online	online	ADV
cet-15726	2	14	at	at	ADP
cet-15726	2	15	www.cetjournal.it	www.cetjournal.it	PROPN
cet-15726	2	16	guest	guest	NOUN
cet-15726	2	17	editors	editor	NOUN
cet-15726	2	18	:	:	PUNCT
cet-15726	2	19	bing	bing	NOUN
cet-15726	2	20	shen	shen	NOUN
cet-15726	3	1	how	how	SCONJ
cet-15726	3	2	,	,	PUNCT
cet-15726	3	3	viknesh	viknesh	ADJ
cet-15726	3	4	andiappan	andiappan	NOUN
cet-15726	3	5	,	,	PUNCT
cet-15726	3	6	denny	denny	PROPN
cet-15726	3	7	k.s	k.s	PROPN
cet-15726	3	8	.	.	PROPN
cet-15726	3	9	ng	ng	PROPN
cet-15726	3	10	,	,	PUNCT
cet-15726	3	11	hon	hon	PROPN
cet-15726	3	12	loong	loong	PROPN
cet-15726	3	13	lam	lam	PROPN
cet-15726	3	14	,	,	PUNCT
cet-15726	3	15	petar	petar	PROPN
cet-15726	3	16	s.	s.	PROPN
cet-15726	3	17	varbanov	varbanov	PROPN
cet-15726	3	18	copyright	copyright	NOUN
cet-15726	3	19	©	©	PROPN
cet-15726	3	20	2025	2025	NUM
cet-15726	3	21	,	,	PUNCT
cet-15726	3	22	aidic	aidic	ADJ
cet-15726	3	23	servizi	servizi	PROPN
cet-15726	3	24	s.r.l	s.r.l	NOUN
cet-15726	3	25	.	.	PUNCT
cet-15726	4	1	isbn	isbn	PROPN
cet-15726	4	2	979	979	NUM
cet-15726	4	3	-	-	SYM
cet-15726	4	4	12	12	NUM
cet-15726	4	5	-	-	PUNCT
cet-15726	4	6	81206	81206	NUM
cet-15726	4	7	-	-	PUNCT
cet-15726	4	8	21	21	NUM
cet-15726	4	9	-	-	SYM
cet-15726	4	10	2	2	NUM
cet-15726	4	11	;	;	PUNCT
cet-15726	4	12	issn	issn	PROPN
cet-15726	4	13	2283	2283	NUM
cet-15726	4	14	-	-	SYM
cet-15726	4	15	9216	9216	NUM
cet-15726	4	16	spin	spin	NOUN
cet-15726	4	17	coating	coating	NOUN
cet-15726	4	18	:	:	PUNCT
cet-15726	4	19	process	process	NOUN
cet-15726	4	20	,	,	PUNCT
cet-15726	4	21	applications	application	NOUN
cet-15726	4	22	,	,	PUNCT
cet-15726	4	23	challenges	challenge	NOUN
cet-15726	4	24	,	,	PUNCT
cet-15726	4	25	and	and	CCONJ
cet-15726	4	26	characterization	characterization	NOUN
cet-15726	4	27	techniques	technique	NOUN
cet-15726	4	28	wandercleiton	wandercleiton	NOUN
cet-15726	4	29	cardosoab	cardosoab	PROPN
cet-15726	4	30	*	*	PROPN
cet-15726	4	31	,	,	PUNCT
cet-15726	4	32	sara	sara	PROPN
cet-15726	4	33	massardob	massardob	PROPN
cet-15726	4	34	,	,	PUNCT
cet-15726	4	35	amer	amer	PROPN
cet-15726	4	36	zaffara	zaffara	PROPN
cet-15726	4	37	,	,	PUNCT
cet-15726	4	38	juan	juan	PROPN
cet-15726	4	39	felipe	felipe	PROPN
cet-15726	4	40	basbusa	basbusa	PROPN
cet-15726	4	41	,	,	PUNCT
cet-15726	4	42	sabrina	sabrina	PROPN
cet-15726	4	43	prestob	prestob	PROPN
cet-15726	4	44	,	,	PUNCT
cet-15726	4	45	antonio	antonio	PROPN
cet-15726	4	46	barbuccia	barbuccia	PROPN
cet-15726	4	47	,	,	PUNCT
cet-15726	4	48	massimo	massimo	PROPN
cet-15726	4	49	vivianib	vivianib	VERB
cet-15726	4	50	a	a	DET
cet-15726	4	51	university	university	NOUN
cet-15726	4	52	of	of	ADP
cet-15726	4	53	genoa	genoa	PROPN
cet-15726	4	54	,	,	PUNCT
cet-15726	4	55	italy	italy	PROPN
cet-15726	4	56	b	b	PROPN
cet-15726	4	57	national	national	PROPN
cet-15726	4	58	research	research	PROPN
cet-15726	4	59	council	council	PROPN
cet-15726	4	60	of	of	ADP
cet-15726	4	61	italy	italy	PROPN
cet-15726	5	1	wandercleiton.cardoso@dicca.unige.it	wandercleiton.cardoso@dicca.unige.it	DET
cet-15726	5	2	spin	spin	NOUN
cet-15726	5	3	coating	coating	NOUN
cet-15726	5	4	is	be	AUX
cet-15726	5	5	a	a	DET
cet-15726	5	6	thin	thin	ADJ
cet-15726	5	7	film	film	NOUN
cet-15726	5	8	deposition	deposition	NOUN
cet-15726	5	9	technique	technique	NOUN
cet-15726	5	10	that	that	PRON
cet-15726	5	11	is	be	AUX
cet-15726	5	12	widely	widely	ADV
cet-15726	5	13	used	use	VERB
cet-15726	5	14	due	due	ADP
cet-15726	5	15	to	to	ADP
cet-15726	5	16	its	its	PRON
cet-15726	5	17	simplicity	simplicity	NOUN
cet-15726	5	18	,	,	PUNCT
cet-15726	5	19	low	low	ADJ
cet-15726	5	20	cost	cost	NOUN
cet-15726	5	21	,	,	PUNCT
cet-15726	5	22	and	and	CCONJ
cet-15726	5	23	efficiency	efficiency	NOUN
cet-15726	5	24	in	in	ADP
cet-15726	5	25	forming	form	VERB
cet-15726	5	26	homogeneous	homogeneous	ADJ
cet-15726	5	27	layers	layer	NOUN
cet-15726	5	28	.	.	PUNCT
cet-15726	6	1	it	it	PRON
cet-15726	6	2	is	be	AUX
cet-15726	6	3	based	base	VERB
cet-15726	6	4	on	on	ADP
cet-15726	6	5	the	the	DET
cet-15726	6	6	centrifugation	centrifugation	NOUN
cet-15726	6	7	of	of	ADP
cet-15726	6	8	liquid	liquid	ADJ
cet-15726	6	9	solutions	solution	NOUN
cet-15726	6	10	on	on	ADP
cet-15726	6	11	substrates	substrate	NOUN
cet-15726	6	12	and	and	CCONJ
cet-15726	6	13	enables	enable	VERB
cet-15726	6	14	the	the	DET
cet-15726	6	15	controlled	control	VERB
cet-15726	6	16	deposition	deposition	NOUN
cet-15726	6	17	of	of	ADP
cet-15726	6	18	polymers	polymer	NOUN
cet-15726	6	19	,	,	PUNCT
cet-15726	6	20	semiconductors	semiconductor	NOUN
cet-15726	6	21	,	,	PUNCT
cet-15726	6	22	oxides	oxide	NOUN
cet-15726	6	23	,	,	PUNCT
cet-15726	6	24	and	and	CCONJ
cet-15726	6	25	nanoparticles	nanoparticle	NOUN
cet-15726	6	26	.	.	PUNCT
cet-15726	7	1	this	this	DET
cet-15726	7	2	versatility	versatility	NOUN
cet-15726	7	3	makes	make	VERB
cet-15726	7	4	it	it	PRON
cet-15726	7	5	indispensable	indispensable	ADJ
cet-15726	7	6	for	for	ADP
cet-15726	7	7	both	both	CCONJ
cet-15726	7	8	research	research	NOUN
cet-15726	7	9	and	and	CCONJ
cet-15726	7	10	industrial	industrial	ADJ
cet-15726	7	11	applications	application	NOUN
cet-15726	7	12	,	,	PUNCT
cet-15726	7	13	particularly	particularly	ADV
cet-15726	7	14	in	in	ADP
cet-15726	7	15	the	the	DET
cet-15726	7	16	fields	field	NOUN
cet-15726	7	17	of	of	ADP
cet-15726	7	18	microelectronics	microelectronic	NOUN
cet-15726	7	19	,	,	PUNCT
cet-15726	7	20	sensors	sensor	NOUN
cet-15726	7	21	,	,	PUNCT
cet-15726	7	22	optical	optical	ADJ
cet-15726	7	23	devices	device	NOUN
cet-15726	7	24	,	,	PUNCT
cet-15726	7	25	renewable	renewable	ADJ
cet-15726	7	26	energy	energy	NOUN
cet-15726	7	27	,	,	PUNCT
cet-15726	7	28	and	and	CCONJ
cet-15726	7	29	biomedical	biomedical	ADJ
cet-15726	7	30	engineering	engineering	NOUN
cet-15726	7	31	.	.	PUNCT
cet-15726	8	1	in	in	ADP
cet-15726	8	2	microelectronics	microelectronic	NOUN
cet-15726	8	3	,	,	PUNCT
cet-15726	8	4	it	it	PRON
cet-15726	8	5	is	be	AUX
cet-15726	8	6	used	use	VERB
cet-15726	8	7	in	in	ADP
cet-15726	8	8	the	the	DET
cet-15726	8	9	production	production	NOUN
cet-15726	8	10	of	of	ADP
cet-15726	8	11	insulating	insulating	NOUN
cet-15726	8	12	and	and	CCONJ
cet-15726	8	13	conductive	conductive	ADJ
cet-15726	8	14	layers	layer	NOUN
cet-15726	8	15	for	for	ADP
cet-15726	8	16	integrated	integrated	ADJ
cet-15726	8	17	circuits	circuit	NOUN
cet-15726	8	18	and	and	CCONJ
cet-15726	8	19	oleds	oled	NOUN
cet-15726	8	20	.	.	PUNCT
cet-15726	9	1	in	in	ADP
cet-15726	9	2	sensor	sensor	NOUN
cet-15726	9	3	technology	technology	NOUN
cet-15726	9	4	and	and	CCONJ
cet-15726	9	5	optical	optical	ADJ
cet-15726	9	6	devices	device	NOUN
cet-15726	9	7	,	,	PUNCT
cet-15726	9	8	it	it	PRON
cet-15726	9	9	ensures	ensure	VERB
cet-15726	9	10	precision	precision	NOUN
cet-15726	9	11	in	in	ADP
cet-15726	9	12	the	the	DET
cet-15726	9	13	deposition	deposition	NOUN
cet-15726	9	14	of	of	ADP
cet-15726	9	15	sensitive	sensitive	ADJ
cet-15726	9	16	materials	material	NOUN
cet-15726	9	17	.	.	PUNCT
cet-15726	10	1	in	in	ADP
cet-15726	10	2	the	the	DET
cet-15726	10	3	field	field	NOUN
cet-15726	10	4	of	of	ADP
cet-15726	10	5	renewable	renewable	ADJ
cet-15726	10	6	energies	energy	NOUN
cet-15726	10	7	,	,	PUNCT
cet-15726	10	8	it	it	PRON
cet-15726	10	9	contributes	contribute	VERB
cet-15726	10	10	to	to	ADP
cet-15726	10	11	the	the	DET
cet-15726	10	12	production	production	NOUN
cet-15726	10	13	of	of	ADP
cet-15726	10	14	thin	thin	ADJ
cet-15726	10	15	-	-	PUNCT
cet-15726	10	16	film	film	NOUN
cet-15726	10	17	solar	solar	ADJ
cet-15726	10	18	cells	cell	NOUN
cet-15726	10	19	.	.	PUNCT
cet-15726	11	1	in	in	ADP
cet-15726	11	2	biomedical	biomedical	ADJ
cet-15726	11	3	engineering	engineering	NOUN
cet-15726	11	4	,	,	PUNCT
cet-15726	11	5	it	it	PRON
cet-15726	11	6	enables	enable	VERB
cet-15726	11	7	the	the	DET
cet-15726	11	8	development	development	NOUN
cet-15726	11	9	of	of	ADP
cet-15726	11	10	bioactive	bioactive	ADJ
cet-15726	11	11	coatings	coating	NOUN
cet-15726	11	12	and	and	CCONJ
cet-15726	11	13	systems	system	NOUN
cet-15726	11	14	for	for	ADP
cet-15726	11	15	the	the	DET
cet-15726	11	16	controlled	control	VERB
cet-15726	11	17	release	release	NOUN
cet-15726	11	18	of	of	ADP
cet-15726	11	19	drugs	drug	NOUN
cet-15726	11	20	.	.	PUNCT
cet-15726	12	1	spin	spin	NOUN
cet-15726	12	2	coating	coating	NOUN
cet-15726	12	3	is	be	AUX
cet-15726	12	4	crucial	crucial	ADJ
cet-15726	12	5	in	in	ADP
cet-15726	12	6	the	the	DET
cet-15726	12	7	production	production	NOUN
cet-15726	12	8	of	of	ADP
cet-15726	12	9	electrolytes	electrolyte	NOUN
cet-15726	12	10	for	for	ADP
cet-15726	12	11	fuel	fuel	NOUN
cet-15726	12	12	cells	cell	NOUN
cet-15726	12	13	,	,	PUNCT
cet-15726	12	14	which	which	PRON
cet-15726	12	15	require	require	VERB
cet-15726	12	16	highly	highly	ADV
cet-15726	12	17	conductive	conductive	ADJ
cet-15726	12	18	,	,	PUNCT
cet-15726	12	19	defect	defect	NOUN
cet-15726	12	20	-	-	PUNCT
cet-15726	12	21	free	free	ADJ
cet-15726	12	22	thin	thin	ADJ
cet-15726	12	23	films	film	NOUN
cet-15726	12	24	to	to	PART
cet-15726	12	25	optimize	optimize	VERB
cet-15726	12	26	ion	ion	NOUN
cet-15726	12	27	transport	transport	NOUN
cet-15726	12	28	and	and	CCONJ
cet-15726	12	29	energy	energy	NOUN
cet-15726	12	30	efficiency	efficiency	NOUN
cet-15726	12	31	.	.	PUNCT
cet-15726	13	1	materials	material	NOUN
cet-15726	13	2	such	such	ADJ
cet-15726	13	3	as	as	ADP
cet-15726	13	4	ysz	ysz	NOUN
cet-15726	13	5	,	,	PUNCT
cet-15726	13	6	gdc	gdc	PROPN
cet-15726	13	7	,	,	PUNCT
cet-15726	13	8	lsgm	lsgm	PROPN
cet-15726	13	9	,	,	PUNCT
cet-15726	13	10	lscf	lscf	VERB
cet-15726	13	11	and	and	CCONJ
cet-15726	13	12	sdc	sdc	NOUN
cet-15726	13	13	are	be	AUX
cet-15726	13	14	widely	widely	ADV
cet-15726	13	15	used	use	VERB
cet-15726	13	16	and	and	CCONJ
cet-15726	13	17	each	each	DET
cet-15726	13	18	offer	offer	NOUN
cet-15726	13	19	advantages	advantage	NOUN
cet-15726	13	20	in	in	ADP
cet-15726	13	21	terms	term	NOUN
cet-15726	13	22	of	of	ADP
cet-15726	13	23	ionic	ionic	ADJ
cet-15726	13	24	conductivity	conductivity	NOUN
cet-15726	13	25	,	,	PUNCT
cet-15726	13	26	chemical	chemical	NOUN
cet-15726	13	27	stability	stability	NOUN
cet-15726	13	28	,	,	PUNCT
cet-15726	13	29	and	and	CCONJ
cet-15726	13	30	thermal	thermal	ADJ
cet-15726	13	31	compatibility	compatibility	NOUN
cet-15726	13	32	.	.	PUNCT
cet-15726	14	1	the	the	DET
cet-15726	14	2	controlled	control	VERB
cet-15726	14	3	deposition	deposition	NOUN
cet-15726	14	4	of	of	ADP
cet-15726	14	5	these	these	DET
cet-15726	14	6	materials	material	NOUN
cet-15726	14	7	allows	allow	VERB
cet-15726	14	8	dense	dense	ADJ
cet-15726	14	9	and	and	CCONJ
cet-15726	14	10	uniform	uniform	ADJ
cet-15726	14	11	layers	layer	NOUN
cet-15726	14	12	to	to	PART
cet-15726	14	13	be	be	AUX
cet-15726	14	14	achieved	achieve	VERB
cet-15726	14	15	,	,	PUNCT
cet-15726	14	16	reducing	reduce	VERB
cet-15726	14	17	energy	energy	NOUN
cet-15726	14	18	losses	loss	NOUN
cet-15726	14	19	,	,	PUNCT
cet-15726	14	20	and	and	CCONJ
cet-15726	14	21	increasing	increase	VERB
cet-15726	14	22	device	device	NOUN
cet-15726	14	23	life	life	NOUN
cet-15726	14	24	.	.	PUNCT
cet-15726	15	1	continuous	continuous	ADJ
cet-15726	15	2	research	research	NOUN
cet-15726	15	3	into	into	ADP
cet-15726	15	4	optimizing	optimize	VERB
cet-15726	15	5	the	the	DET
cet-15726	15	6	materials	material	NOUN
cet-15726	15	7	and	and	CCONJ
cet-15726	15	8	parameters	parameter	NOUN
cet-15726	15	9	of	of	ADP
cet-15726	15	10	spin	spin	NOUN
cet-15726	15	11	coating	coating	NOUN
cet-15726	15	12	underlines	underline	VERB
cet-15726	15	13	its	its	PRON
cet-15726	15	14	importance	importance	NOUN
cet-15726	15	15	for	for	ADP
cet-15726	15	16	technological	technological	ADJ
cet-15726	15	17	innovation	innovation	NOUN
cet-15726	15	18	and	and	CCONJ
cet-15726	15	19	sustainable	sustainable	ADJ
cet-15726	15	20	development	development	NOUN
cet-15726	15	21	,	,	PUNCT
cet-15726	15	22	as	as	SCONJ
cet-15726	15	23	its	its	PRON
cet-15726	15	24	adaptability	adaptability	NOUN
cet-15726	15	25	and	and	CCONJ
cet-15726	15	26	precision	precision	NOUN
cet-15726	15	27	ensure	ensure	VERB
cet-15726	15	28	that	that	SCONJ
cet-15726	15	29	it	it	PRON
cet-15726	15	30	will	will	AUX
cet-15726	15	31	continue	continue	VERB
cet-15726	15	32	to	to	PART
cet-15726	15	33	play	play	VERB
cet-15726	15	34	a	a	DET
cet-15726	15	35	key	key	ADJ
cet-15726	15	36	role	role	NOUN
cet-15726	15	37	in	in	ADP
cet-15726	15	38	the	the	DET
cet-15726	15	39	development	development	NOUN
cet-15726	15	40	of	of	ADP
cet-15726	15	41	various	various	ADJ
cet-15726	15	42	fields	field	NOUN
cet-15726	15	43	of	of	ADP
cet-15726	15	44	technology	technology	NOUN
cet-15726	15	45	in	in	ADP
cet-15726	15	46	the	the	DET
cet-15726	15	47	future	future	NOUN
cet-15726	15	48	.	.	PUNCT
cet-15726	16	1	1	1	X
cet-15726	16	2	.	.	X
cet-15726	16	3	introduction	introduction	VERB
cet-15726	16	4	the	the	DET
cet-15726	16	5	technique	technique	NOUN
cet-15726	16	6	of	of	ADP
cet-15726	16	7	layer	layer	NOUN
cet-15726	16	8	deposition	deposition	NOUN
cet-15726	16	9	by	by	ADP
cet-15726	16	10	rotation	rotation	NOUN
cet-15726	16	11	,	,	PUNCT
cet-15726	16	12	known	know	VERB
cet-15726	16	13	as	as	ADP
cet-15726	16	14	spin	spin	NOUN
cet-15726	16	15	coating	coating	NOUN
cet-15726	16	16	,	,	PUNCT
cet-15726	16	17	was	be	AUX
cet-15726	16	18	developed	develop	VERB
cet-15726	16	19	in	in	ADP
cet-15726	16	20	the	the	DET
cet-15726	16	21	1920s	1920s	NUM
cet-15726	16	22	to	to	PART
cet-15726	16	23	apply	apply	VERB
cet-15726	16	24	coatings	coating	NOUN
cet-15726	16	25	to	to	ADP
cet-15726	16	26	substrates	substrate	NOUN
cet-15726	16	27	.	.	PUNCT
cet-15726	17	1	since	since	SCONJ
cet-15726	17	2	then	then	ADV
cet-15726	17	3	,	,	PUNCT
cet-15726	17	4	it	it	PRON
cet-15726	17	5	has	have	AUX
cet-15726	17	6	been	be	AUX
cet-15726	17	7	widely	widely	ADV
cet-15726	17	8	used	use	VERB
cet-15726	17	9	in	in	ADP
cet-15726	17	10	the	the	DET
cet-15726	17	11	production	production	NOUN
cet-15726	17	12	of	of	ADP
cet-15726	17	13	thin	thin	ADJ
cet-15726	17	14	films	film	NOUN
cet-15726	17	15	for	for	ADP
cet-15726	17	16	various	various	ADJ
cet-15726	17	17	industrial	industrial	ADJ
cet-15726	17	18	and	and	CCONJ
cet-15726	17	19	scientific	scientific	ADJ
cet-15726	17	20	purposes	purpose	NOUN
cet-15726	17	21	.	.	PUNCT
cet-15726	18	1	its	its	PRON
cet-15726	18	2	popularity	popularity	NOUN
cet-15726	18	3	stems	stem	VERB
cet-15726	18	4	from	from	ADP
cet-15726	18	5	its	its	PRON
cet-15726	18	6	simplicity	simplicity	NOUN
cet-15726	18	7	and	and	CCONJ
cet-15726	18	8	ability	ability	NOUN
cet-15726	18	9	to	to	PART
cet-15726	18	10	produce	produce	VERB
cet-15726	18	11	thin	thin	ADJ
cet-15726	18	12	,	,	PUNCT
cet-15726	18	13	uniform	uniform	ADJ
cet-15726	18	14	layers	layer	NOUN
cet-15726	18	15	,	,	PUNCT
cet-15726	18	16	which	which	PRON
cet-15726	18	17	has	have	AUX
cet-15726	18	18	made	make	VERB
cet-15726	18	19	it	it	PRON
cet-15726	18	20	one	one	NUM
cet-15726	18	21	of	of	ADP
cet-15726	18	22	the	the	DET
cet-15726	18	23	most	most	ADV
cet-15726	18	24	promising	promising	ADJ
cet-15726	18	25	methods	method	NOUN
cet-15726	18	26	in	in	ADP
cet-15726	18	27	materials	material	NOUN
cet-15726	18	28	engineering	engineering	NOUN
cet-15726	18	29	(	(	PUNCT
cet-15726	18	30	yada	yada	NOUN
cet-15726	18	31	,	,	PUNCT
cet-15726	18	32	1995	1995	NUM
cet-15726	18	33	;	;	PUNCT
cet-15726	18	34	tyona	tyona	NOUN
cet-15726	18	35	,	,	PUNCT
cet-15726	18	36	2013	2013	NUM
cet-15726	18	37	)	)	PUNCT
cet-15726	18	38	.	.	PUNCT
cet-15726	19	1	the	the	DET
cet-15726	19	2	method	method	NOUN
cet-15726	19	3	has	have	AUX
cet-15726	19	4	proven	prove	VERB
cet-15726	19	5	to	to	PART
cet-15726	19	6	be	be	AUX
cet-15726	19	7	particularly	particularly	ADV
cet-15726	19	8	effective	effective	ADJ
cet-15726	19	9	in	in	ADP
cet-15726	19	10	the	the	DET
cet-15726	19	11	development	development	NOUN
cet-15726	19	12	of	of	ADP
cet-15726	19	13	microelectronic	microelectronic	ADJ
cet-15726	19	14	devices	device	NOUN
cet-15726	19	15	such	such	ADJ
cet-15726	19	16	as	as	ADP
cet-15726	19	17	sensors	sensor	NOUN
cet-15726	19	18	and	and	CCONJ
cet-15726	19	19	optical	optical	ADJ
cet-15726	19	20	components	component	NOUN
cet-15726	19	21	,	,	PUNCT
cet-15726	19	22	as	as	ADV
cet-15726	19	23	well	well	ADV
cet-15726	19	24	as	as	ADP
cet-15726	19	25	in	in	ADP
cet-15726	19	26	biomedical	biomedical	ADJ
cet-15726	19	27	applications	application	NOUN
cet-15726	19	28	and	and	CCONJ
cet-15726	19	29	the	the	DET
cet-15726	19	30	production	production	NOUN
cet-15726	19	31	of	of	ADP
cet-15726	19	32	membranes	membrane	NOUN
cet-15726	19	33	for	for	ADP
cet-15726	19	34	molecular	molecular	ADJ
cet-15726	19	35	filtration	filtration	NOUN
cet-15726	19	36	.	.	PUNCT
cet-15726	20	1	the	the	DET
cet-15726	20	2	versatility	versatility	NOUN
cet-15726	20	3	of	of	ADP
cet-15726	20	4	the	the	DET
cet-15726	20	5	process	process	NOUN
cet-15726	20	6	enables	enable	VERB
cet-15726	20	7	the	the	DET
cet-15726	20	8	deposition	deposition	NOUN
cet-15726	20	9	of	of	ADP
cet-15726	20	10	a	a	DET
cet-15726	20	11	wide	wide	ADJ
cet-15726	20	12	range	range	NOUN
cet-15726	20	13	of	of	ADP
cet-15726	20	14	materials	material	NOUN
cet-15726	20	15	,	,	PUNCT
cet-15726	20	16	making	make	VERB
cet-15726	20	17	it	it	PRON
cet-15726	20	18	an	an	DET
cet-15726	20	19	indispensable	indispensable	ADJ
cet-15726	20	20	tool	tool	NOUN
cet-15726	20	21	for	for	ADP
cet-15726	20	22	the	the	DET
cet-15726	20	23	development	development	NOUN
cet-15726	20	24	of	of	ADP
cet-15726	20	25	new	new	ADJ
cet-15726	20	26	functional	functional	ADJ
cet-15726	20	27	devices	device	NOUN
cet-15726	20	28	.	.	PUNCT
cet-15726	21	1	in	in	ADP
cet-15726	21	2	this	this	DET
cet-15726	21	3	process	process	NOUN
cet-15726	21	4	,	,	PUNCT
cet-15726	21	5	a	a	DET
cet-15726	21	6	solution	solution	NOUN
cet-15726	21	7	is	be	AUX
cet-15726	21	8	applied	apply	VERB
cet-15726	21	9	to	to	ADP
cet-15726	21	10	a	a	DET
cet-15726	21	11	substrate	substrate	NOUN
cet-15726	21	12	and	and	CCONJ
cet-15726	21	13	rotated	rotate	VERB
cet-15726	21	14	at	at	ADP
cet-15726	21	15	high	high	ADJ
cet-15726	21	16	speed	speed	NOUN
cet-15726	21	17	.	.	PUNCT
cet-15726	22	1	this	this	DET
cet-15726	22	2	motion	motion	NOUN
cet-15726	22	3	ensures	ensure	VERB
cet-15726	22	4	uniform	uniform	ADJ
cet-15726	22	5	distribution	distribution	NOUN
cet-15726	22	6	of	of	ADP
cet-15726	22	7	the	the	DET
cet-15726	22	8	liquid	liquid	NOUN
cet-15726	22	9	and	and	CCONJ
cet-15726	22	10	removes	remove	VERB
cet-15726	22	11	the	the	DET
cet-15726	22	12	excess	excess	NOUN
cet-15726	22	13	by	by	ADP
cet-15726	22	14	centrifugal	centrifugal	ADJ
cet-15726	22	15	force	force	NOUN
cet-15726	22	16	,	,	PUNCT
cet-15726	22	17	creating	create	VERB
cet-15726	22	18	a	a	DET
cet-15726	22	19	homogeneous	homogeneous	ADJ
cet-15726	22	20	film	film	NOUN
cet-15726	22	21	after	after	SCONJ
cet-15726	22	22	the	the	DET
cet-15726	22	23	material	material	NOUN
cet-15726	22	24	has	have	AUX
cet-15726	22	25	dried	dry	VERB
cet-15726	22	26	or	or	CCONJ
cet-15726	22	27	solidified	solidify	VERB
cet-15726	22	28	(	(	PUNCT
cet-15726	22	29	vorotilov	vorotilov	ADJ
cet-15726	22	30	,	,	PUNCT
cet-15726	22	31	1995	1995	NUM
cet-15726	22	32	;	;	PUNCT
cet-15726	22	33	tyona	tyona	NOUN
cet-15726	22	34	,	,	PUNCT
cet-15726	22	35	2013	2013	NUM
cet-15726	22	36	;	;	PUNCT
cet-15726	22	37	mouhamad	mouhamad	NOUN
cet-15726	22	38	et	et	PROPN
cet-15726	22	39	al	al	PROPN
cet-15726	22	40	,	,	PUNCT
cet-15726	22	41	2014	2014	NUM
cet-15726	22	42	;	;	PUNCT
cet-15726	22	43	kalafatis	kalafatis	PROPN
cet-15726	22	44	et	et	PROPN
cet-15726	22	45	al	al	PROPN
cet-15726	22	46	,	,	PUNCT
cet-15726	22	47	2024	2024	NUM
cet-15726	22	48	)	)	PUNCT
cet-15726	22	49	.	.	PUNCT
cet-15726	23	1	the	the	DET
cet-15726	23	2	thickness	thickness	NOUN
cet-15726	23	3	of	of	ADP
cet-15726	23	4	the	the	DET
cet-15726	23	5	finished	finish	VERB
cet-15726	23	6	film	film	NOUN
cet-15726	23	7	depends	depend	VERB
cet-15726	23	8	on	on	ADP
cet-15726	23	9	several	several	ADJ
cet-15726	23	10	factors	factor	NOUN
cet-15726	23	11	,	,	PUNCT
cet-15726	23	12	such	such	ADJ
cet-15726	23	13	as	as	ADP
cet-15726	23	14	the	the	DET
cet-15726	23	15	speed	speed	NOUN
cet-15726	23	16	of	of	ADP
cet-15726	23	17	rotation	rotation	NOUN
cet-15726	23	18	,	,	PUNCT
cet-15726	23	19	the	the	DET
cet-15726	23	20	viscosity	viscosity	NOUN
cet-15726	23	21	of	of	ADP
cet-15726	23	22	the	the	DET
cet-15726	23	23	solution	solution	NOUN
cet-15726	23	24	and	and	CCONJ
cet-15726	23	25	the	the	DET
cet-15726	23	26	duration	duration	NOUN
cet-15726	23	27	of	of	ADP
cet-15726	23	28	centrifugation	centrifugation	NOUN
cet-15726	23	29	.	.	PUNCT
cet-15726	24	1	as	as	ADP
cet-15726	24	2	a	a	DET
cet-15726	24	3	rule	rule	NOUN
cet-15726	24	4	,	,	PUNCT
cet-15726	24	5	higher	high	ADJ
cet-15726	24	6	speeds	speed	NOUN
cet-15726	24	7	lead	lead	VERB
cet-15726	24	8	to	to	ADP
cet-15726	24	9	thinner	thin	ADJ
cet-15726	24	10	films	film	NOUN
cet-15726	24	11	.	.	PUNCT
cet-15726	25	1	ambient	ambient	ADJ
cet-15726	25	2	conditions	condition	NOUN
cet-15726	25	3	such	such	ADJ
cet-15726	25	4	as	as	ADP
cet-15726	25	5	drying	dry	VERB
cet-15726	25	6	temperature	temperature	NOUN
cet-15726	25	7	and	and	CCONJ
cet-15726	25	8	atmosphere	atmosphere	NOUN
cet-15726	25	9	also	also	ADV
cet-15726	25	10	significantly	significantly	ADV
cet-15726	25	11	affect	affect	VERB
cet-15726	25	12	the	the	DET
cet-15726	25	13	uniformity	uniformity	NOUN
cet-15726	25	14	and	and	CCONJ
cet-15726	25	15	quality	quality	NOUN
cet-15726	25	16	of	of	ADP
cet-15726	25	17	the	the	DET
cet-15726	25	18	film	film	NOUN
cet-15726	25	19	(	(	PUNCT
cet-15726	25	20	yada	yada	NOUN
cet-15726	25	21	,	,	PUNCT
cet-15726	25	22	1995	1995	NUM
cet-15726	25	23	;	;	PUNCT
cet-15726	25	24	vorotilov	vorotilov	PROPN
cet-15726	25	25	,	,	PUNCT
cet-15726	25	26	1995	1995	NUM
cet-15726	25	27	;	;	PUNCT
cet-15726	25	28	tyona	tyona	NOUN
cet-15726	25	29	,	,	PUNCT
cet-15726	25	30	2013	2013	NUM
cet-15726	25	31	;	;	PUNCT
cet-15726	25	32	chou	chou	PROPN
cet-15726	25	33	et	et	PROPN
cet-15726	25	34	al	al	PROPN
cet-15726	25	35	,	,	PUNCT
cet-15726	25	36	2021	2021	NUM
cet-15726	25	37	;	;	PUNCT
cet-15726	25	38	kalafatis	kalafatis	PROPN
cet-15726	25	39	et	et	PROPN
cet-15726	25	40	al	al	PROPN
cet-15726	25	41	,	,	PUNCT
cet-15726	25	42	2024	2024	NUM
cet-15726	25	43	)	)	PUNCT
cet-15726	25	44	.	.	PUNCT
cet-15726	26	1	this	this	DET
cet-15726	26	2	method	method	NOUN
cet-15726	26	3	can	can	AUX
cet-15726	26	4	be	be	AUX
cet-15726	26	5	used	use	VERB
cet-15726	26	6	to	to	PART
cet-15726	26	7	deposit	deposit	VERB
cet-15726	26	8	a	a	DET
cet-15726	26	9	variety	variety	NOUN
cet-15726	26	10	of	of	ADP
cet-15726	26	11	materials	material	NOUN
cet-15726	26	12	in	in	ADP
cet-15726	26	13	solution	solution	NOUN
cet-15726	26	14	,	,	PUNCT
cet-15726	26	15	suspension	suspension	NOUN
cet-15726	26	16	or	or	CCONJ
cet-15726	26	17	gel	gel	NOUN
cet-15726	26	18	form	form	NOUN
cet-15726	26	19	,	,	PUNCT
cet-15726	26	20	including	include	VERB
cet-15726	26	21	polymers	polymer	NOUN
cet-15726	26	22	,	,	PUNCT
cet-15726	26	23	semiconductors	semiconductor	NOUN
cet-15726	26	24	,	,	PUNCT
cet-15726	26	25	oxides	oxide	NOUN
cet-15726	26	26	and	and	CCONJ
cet-15726	26	27	nanoparticles	nanoparticle	NOUN
cet-15726	26	28	.	.	PUNCT
cet-15726	27	1	these	these	PRON
cet-15726	27	2	are	be	AUX
cet-15726	27	3	commonly	commonly	ADV
cet-15726	27	4	used	use	VERB
cet-15726	27	5	in	in	ADP
cet-15726	27	6	electronics	electronic	NOUN
cet-15726	27	7	,	,	PUNCT
cet-15726	27	8	sensors	sensor	NOUN
cet-15726	27	9	,	,	PUNCT
cet-15726	27	10	displays	display	NOUN
cet-15726	27	11	and	and	CCONJ
cet-15726	27	12	optical	optical	ADJ
cet-15726	27	13	devices	device	NOUN
cet-15726	27	14	.	.	PUNCT
cet-15726	28	1	in	in	ADP
cet-15726	28	2	research	research	NOUN
cet-15726	28	3	and	and	CCONJ
cet-15726	28	4	601	601	NUM
cet-15726	28	5	development	development	NOUN
cet-15726	28	6	,	,	PUNCT
cet-15726	28	7	spin	spin	NOUN
cet-15726	28	8	coating	coating	NOUN
cet-15726	28	9	plays	play	VERB
cet-15726	28	10	a	a	DET
cet-15726	28	11	crucial	crucial	ADJ
cet-15726	28	12	role	role	NOUN
cet-15726	28	13	in	in	ADP
cet-15726	28	14	the	the	DET
cet-15726	28	15	production	production	NOUN
cet-15726	28	16	of	of	ADP
cet-15726	28	17	films	film	NOUN
cet-15726	28	18	for	for	ADP
cet-15726	28	19	photovoltaics	photovoltaic	NOUN
cet-15726	28	20	,	,	PUNCT
cet-15726	28	21	biosensors	biosensor	NOUN
cet-15726	28	22	and	and	CCONJ
cet-15726	28	23	protective	protective	ADJ
cet-15726	28	24	coatings	coating	NOUN
cet-15726	28	25	(	(	PUNCT
cet-15726	28	26	vorotilov	vorotilov	INTJ
cet-15726	28	27	,	,	PUNCT
cet-15726	28	28	1995	1995	NUM
cet-15726	28	29	;	;	PUNCT
cet-15726	28	30	tyona	tyona	NOUN
cet-15726	28	31	,	,	PUNCT
cet-15726	28	32	2013	2013	NUM
cet-15726	28	33	;	;	PUNCT
cet-15726	28	34	chou	chou	PROPN
cet-15726	28	35	et	et	PROPN
cet-15726	28	36	al	al	PROPN
cet-15726	28	37	.	.	PROPN
cet-15726	28	38	,	,	PUNCT
cet-15726	28	39	2021	2021	NUM
cet-15726	28	40	;	;	PUNCT
cet-15726	28	41	kalafatis	kalafatis	PROPN
cet-15726	28	42	et	et	PROPN
cet-15726	28	43	al	al	PROPN
cet-15726	28	44	.	.	PROPN
cet-15726	28	45	,	,	PUNCT
cet-15726	28	46	2024	2024	NUM
cet-15726	28	47	)	)	PUNCT
cet-15726	28	48	.	.	PUNCT
cet-15726	29	1	spin	spin	NOUN
cet-15726	29	2	coating	coating	NOUN
cet-15726	29	3	has	have	AUX
cet-15726	29	4	also	also	ADV
cet-15726	29	5	been	be	AUX
cet-15726	29	6	explored	explore	VERB
cet-15726	29	7	for	for	ADP
cet-15726	29	8	the	the	DET
cet-15726	29	9	production	production	NOUN
cet-15726	29	10	of	of	ADP
cet-15726	29	11	electrolytes	electrolyte	NOUN
cet-15726	29	12	in	in	ADP
cet-15726	29	13	fuel	fuel	NOUN
cet-15726	29	14	cells	cell	NOUN
cet-15726	29	15	,	,	PUNCT
cet-15726	29	16	as	as	SCONJ
cet-15726	29	17	it	it	PRON
cet-15726	29	18	can	can	AUX
cet-15726	29	19	produce	produce	VERB
cet-15726	29	20	thin	thin	ADJ
cet-15726	29	21	and	and	CCONJ
cet-15726	29	22	uniform	uniform	ADJ
cet-15726	29	23	layers	layer	NOUN
cet-15726	29	24	of	of	ADP
cet-15726	29	25	ion	ion	NOUN
cet-15726	29	26	-	-	PUNCT
cet-15726	29	27	conducting	conduct	VERB
cet-15726	29	28	materials	material	NOUN
cet-15726	29	29	.	.	PUNCT
cet-15726	30	1	such	such	ADJ
cet-15726	30	2	uniformity	uniformity	NOUN
cet-15726	30	3	improves	improve	VERB
cet-15726	30	4	ion	ion	NOUN
cet-15726	30	5	transport	transport	NOUN
cet-15726	30	6	and	and	CCONJ
cet-15726	30	7	helps	help	VERB
cet-15726	30	8	to	to	PART
cet-15726	30	9	reduce	reduce	VERB
cet-15726	30	10	internal	internal	ADJ
cet-15726	30	11	resistance	resistance	NOUN
cet-15726	30	12	,	,	PUNCT
cet-15726	30	13	thereby	thereby	ADV
cet-15726	30	14	improving	improve	VERB
cet-15726	30	15	fuel	fuel	NOUN
cet-15726	30	16	cell	cell	NOUN
cet-15726	30	17	efficiency	efficiency	NOUN
cet-15726	30	18	(	(	PUNCT
cet-15726	30	19	cardoso	cardoso	PROPN
cet-15726	30	20	et	et	PROPN
cet-15726	30	21	al	al	PROPN
cet-15726	30	22	.	.	PROPN
cet-15726	30	23	,	,	PUNCT
cet-15726	30	24	2021	2021	NUM
cet-15726	30	25	;	;	PUNCT
cet-15726	30	26	kalafatis	kalafatis	PROPN
cet-15726	30	27	et	et	PROPN
cet-15726	30	28	al	al	PROPN
cet-15726	30	29	.	.	PROPN
cet-15726	30	30	,	,	PUNCT
cet-15726	30	31	2024	2024	NUM
cet-15726	30	32	)	)	PUNCT
cet-15726	30	33	.	.	PUNCT
cet-15726	31	1	the	the	DET
cet-15726	31	2	method	method	NOUN
cet-15726	31	3	has	have	AUX
cet-15726	31	4	been	be	AUX
cet-15726	31	5	used	use	VERB
cet-15726	31	6	to	to	PART
cet-15726	31	7	deposit	deposit	VERB
cet-15726	31	8	ceramic	ceramic	ADJ
cet-15726	31	9	electrolyte	electrolyte	NOUN
cet-15726	31	10	films	film	NOUN
cet-15726	31	11	based	base	VERB
cet-15726	31	12	on	on	ADP
cet-15726	31	13	materials	material	NOUN
cet-15726	31	14	such	such	ADJ
cet-15726	31	15	as	as	ADP
cet-15726	31	16	yttrium	yttrium	NOUN
cet-15726	31	17	-	-	PUNCT
cet-15726	31	18	stabilized	stabilize	VERB
cet-15726	31	19	zirconia	zirconia	NOUN
cet-15726	31	20	(	(	PUNCT
cet-15726	31	21	ysz	ysz	NOUN
cet-15726	31	22	)	)	PUNCT
cet-15726	31	23	,	,	PUNCT
cet-15726	31	24	gadolinium	gadolinium	NOUN
cet-15726	31	25	-	-	PUNCT
cet-15726	31	26	doped	dope	VERB
cet-15726	31	27	ceria	ceria	NOUN
cet-15726	31	28	(	(	PUNCT
cet-15726	31	29	gdc	gdc	PROPN
cet-15726	31	30	)	)	PUNCT
cet-15726	31	31	,	,	PUNCT
cet-15726	31	32	lanthanum	lanthanum	ADJ
cet-15726	31	33	strontium	strontium	NOUN
cet-15726	31	34	gallate	gallate	PROPN
cet-15726	31	35	magnesium	magnesium	PROPN
cet-15726	31	36	(	(	PUNCT
cet-15726	31	37	lsgm	lsgm	PROPN
cet-15726	31	38	)	)	PUNCT
cet-15726	31	39	and	and	CCONJ
cet-15726	31	40	samarium	samarium	NOUN
cet-15726	31	41	-	-	PUNCT
cet-15726	31	42	doped	dope	VERB
cet-15726	31	43	ceria	ceria	NOUN
cet-15726	31	44	(	(	PUNCT
cet-15726	31	45	sdc	sdc	PROPN
cet-15726	31	46	)	)	PUNCT
cet-15726	31	47	,	,	PUNCT
cet-15726	31	48	all	all	PRON
cet-15726	31	49	of	of	ADP
cet-15726	31	50	which	which	PRON
cet-15726	31	51	are	be	AUX
cet-15726	31	52	known	know	VERB
cet-15726	31	53	for	for	ADP
cet-15726	31	54	their	their	PRON
cet-15726	31	55	high	high	ADJ
cet-15726	31	56	ionic	ionic	ADJ
cet-15726	31	57	conductivity	conductivity	NOUN
cet-15726	31	58	and	and	CCONJ
cet-15726	31	59	important	important	ADJ
cet-15726	31	60	role	role	NOUN
cet-15726	31	61	in	in	ADP
cet-15726	31	62	solid	solid	ADJ
cet-15726	31	63	oxide	oxide	NOUN
cet-15726	31	64	fuel	fuel	NOUN
cet-15726	31	65	cells	cell	NOUN
cet-15726	31	66	(	(	PUNCT
cet-15726	31	67	sofc	sofc	NOUN
cet-15726	31	68	)	)	PUNCT
cet-15726	31	69	(	(	PUNCT
cet-15726	31	70	kalafatis	kalafatis	NOUN
cet-15726	31	71	et	et	PROPN
cet-15726	31	72	al	al	PROPN
cet-15726	31	73	.	.	PROPN
cet-15726	31	74	,	,	PUNCT
cet-15726	31	75	2024	2024	NUM
cet-15726	31	76	)	)	PUNCT
cet-15726	31	77	.	.	PUNCT
cet-15726	32	1	beta	beta	NOUN
cet-15726	32	2	-	-	PUNCT
cet-15726	32	3	alumina	alumina	NOUN
cet-15726	32	4	,	,	PUNCT
cet-15726	32	5	another	another	DET
cet-15726	32	6	extensively	extensively	ADV
cet-15726	32	7	studied	study	VERB
cet-15726	32	8	material	material	NOUN
cet-15726	32	9	,	,	PUNCT
cet-15726	32	10	is	be	AUX
cet-15726	32	11	used	use	VERB
cet-15726	32	12	in	in	ADP
cet-15726	32	13	high	high	ADJ
cet-15726	32	14	-	-	PUNCT
cet-15726	32	15	temperature	temperature	NOUN
cet-15726	32	16	fuel	fuel	NOUN
cet-15726	32	17	cells	cell	NOUN
cet-15726	32	18	due	due	ADP
cet-15726	32	19	to	to	ADP
cet-15726	32	20	its	its	PRON
cet-15726	32	21	excellent	excellent	ADJ
cet-15726	32	22	thermal	thermal	ADJ
cet-15726	32	23	and	and	CCONJ
cet-15726	32	24	ionic	ionic	ADJ
cet-15726	32	25	properties	property	NOUN
cet-15726	32	26	.	.	PUNCT
cet-15726	33	1	in	in	ADP
cet-15726	33	2	addition	addition	NOUN
cet-15726	33	3	,	,	PUNCT
cet-15726	33	4	polymer	polymer	NOUN
cet-15726	33	5	electrolytes	electrolyte	NOUN
cet-15726	33	6	such	such	ADJ
cet-15726	33	7	as	as	ADP
cet-15726	33	8	nafion	nafion	NOUN
cet-15726	33	9	have	have	AUX
cet-15726	33	10	been	be	AUX
cet-15726	33	11	investigated	investigate	VERB
cet-15726	33	12	for	for	ADP
cet-15726	33	13	low	low	ADJ
cet-15726	33	14	-	-	PUNCT
cet-15726	33	15	temperature	temperature	NOUN
cet-15726	33	16	applications	application	NOUN
cet-15726	33	17	,	,	PUNCT
cet-15726	33	18	especially	especially	ADV
cet-15726	33	19	in	in	ADP
cet-15726	33	20	proton	proton	NOUN
cet-15726	33	21	exchange	exchange	NOUN
cet-15726	33	22	membrane	membrane	NOUN
cet-15726	33	23	fuel	fuel	NOUN
cet-15726	33	24	cells	cell	NOUN
cet-15726	33	25	(	(	PUNCT
cet-15726	33	26	pemfc	pemfc	NOUN
cet-15726	33	27	)	)	PUNCT
cet-15726	33	28	(	(	PUNCT
cet-15726	33	29	vorotilov	vorotilov	INTJ
cet-15726	33	30	,	,	PUNCT
cet-15726	33	31	1995	1995	NUM
cet-15726	33	32	;	;	PUNCT
cet-15726	33	33	tyona	tyona	NOUN
cet-15726	33	34	,	,	PUNCT
cet-15726	33	35	2013	2013	NUM
cet-15726	33	36	;	;	PUNCT
cet-15726	33	37	mouhamad	mouhamad	NOUN
cet-15726	33	38	et	et	PROPN
cet-15726	33	39	al	al	PROPN
cet-15726	33	40	.	.	PROPN
cet-15726	33	41	,	,	PUNCT
cet-15726	33	42	2014	2014	NUM
cet-15726	33	43	;	;	PUNCT
cet-15726	33	44	kalafatis	kalafatis	PROPN
cet-15726	33	45	et	et	PROPN
cet-15726	33	46	al	al	PROPN
cet-15726	33	47	.	.	PROPN
cet-15726	33	48	,	,	PUNCT
cet-15726	33	49	2024	2024	NUM
cet-15726	33	50	)	)	PUNCT
cet-15726	33	51	.	.	PUNCT
cet-15726	34	1	2	2	X
cet-15726	34	2	.	.	X
cet-15726	34	3	spin	spin	NOUN
cet-15726	34	4	coating	coat	VERB
cet-15726	34	5	technology	technology	NOUN
cet-15726	34	6	the	the	DET
cet-15726	34	7	combination	combination	NOUN
cet-15726	34	8	of	of	ADP
cet-15726	34	9	these	these	DET
cet-15726	34	10	materials	material	NOUN
cet-15726	34	11	with	with	ADP
cet-15726	34	12	the	the	DET
cet-15726	34	13	spin	spin	NOUN
cet-15726	34	14	-	-	PUNCT
cet-15726	34	15	coating	coat	VERB
cet-15726	34	16	technique	technique	NOUN
cet-15726	34	17	enables	enable	VERB
cet-15726	34	18	the	the	DET
cet-15726	34	19	production	production	NOUN
cet-15726	34	20	of	of	ADP
cet-15726	34	21	ultra	ultra	ADJ
cet-15726	34	22	-	-	ADJ
cet-15726	34	23	thin	thin	ADJ
cet-15726	34	24	and	and	CCONJ
cet-15726	34	25	uniform	uniform	ADJ
cet-15726	34	26	layers	layer	NOUN
cet-15726	34	27	that	that	PRON
cet-15726	34	28	ensure	ensure	VERB
cet-15726	34	29	higher	high	ADJ
cet-15726	34	30	efficiency	efficiency	NOUN
cet-15726	34	31	and	and	CCONJ
cet-15726	34	32	durability	durability	NOUN
cet-15726	34	33	of	of	ADP
cet-15726	34	34	the	the	DET
cet-15726	34	35	energy	energy	NOUN
cet-15726	34	36	conversion	conversion	NOUN
cet-15726	34	37	devices	device	NOUN
cet-15726	34	38	.	.	PUNCT
cet-15726	35	1	precise	precise	ADJ
cet-15726	35	2	control	control	NOUN
cet-15726	35	3	of	of	ADP
cet-15726	35	4	the	the	DET
cet-15726	35	5	thickness	thickness	NOUN
cet-15726	35	6	and	and	CCONJ
cet-15726	35	7	morphology	morphology	NOUN
cet-15726	35	8	of	of	ADP
cet-15726	35	9	the	the	DET
cet-15726	35	10	resulting	result	VERB
cet-15726	35	11	layers	layer	NOUN
cet-15726	35	12	is	be	AUX
cet-15726	35	13	crucial	crucial	ADJ
cet-15726	35	14	for	for	ADP
cet-15726	35	15	optimizing	optimize	VERB
cet-15726	35	16	the	the	DET
cet-15726	35	17	performance	performance	NOUN
cet-15726	35	18	of	of	ADP
cet-15726	35	19	fuel	fuel	NOUN
cet-15726	35	20	cells	cell	NOUN
cet-15726	35	21	,	,	PUNCT
cet-15726	35	22	making	make	VERB
cet-15726	35	23	this	this	DET
cet-15726	35	24	approach	approach	NOUN
cet-15726	35	25	a	a	DET
cet-15726	35	26	promising	promising	ADJ
cet-15726	35	27	alternative	alternative	NOUN
cet-15726	35	28	to	to	PART
cet-15726	35	29	produce	produce	VERB
cet-15726	35	30	advanced	advanced	ADJ
cet-15726	35	31	electrolytes	electrolyte	NOUN
cet-15726	35	32	(	(	PUNCT
cet-15726	35	33	kalafatis	kalafatis	NOUN
cet-15726	35	34	et	et	PROPN
cet-15726	35	35	al	al	PROPN
cet-15726	35	36	.	.	PROPN
cet-15726	35	37	,	,	PUNCT
cet-15726	35	38	2024	2024	NUM
cet-15726	35	39	)	)	PUNCT
cet-15726	35	40	.	.	PUNCT
cet-15726	36	1	with	with	ADP
cet-15726	36	2	advances	advance	NOUN
cet-15726	36	3	in	in	ADP
cet-15726	36	4	nanotechnology	nanotechnology	NOUN
cet-15726	36	5	and	and	CCONJ
cet-15726	36	6	the	the	DET
cet-15726	36	7	growing	grow	VERB
cet-15726	36	8	need	need	NOUN
cet-15726	36	9	for	for	ADP
cet-15726	36	10	materials	material	NOUN
cet-15726	36	11	with	with	ADP
cet-15726	36	12	unique	unique	ADJ
cet-15726	36	13	optical	optical	ADJ
cet-15726	36	14	,	,	PUNCT
cet-15726	36	15	electronic	electronic	ADJ
cet-15726	36	16	,	,	PUNCT
cet-15726	36	17	magnetic	magnetic	ADJ
cet-15726	36	18	,	,	PUNCT
cet-15726	36	19	and	and	CCONJ
cet-15726	36	20	mechanical	mechanical	ADJ
cet-15726	36	21	properties	property	NOUN
cet-15726	36	22	,	,	PUNCT
cet-15726	36	23	research	research	NOUN
cet-15726	36	24	into	into	ADP
cet-15726	36	25	and	and	CCONJ
cet-15726	36	26	improvement	improvement	NOUN
cet-15726	36	27	of	of	ADP
cet-15726	36	28	spin	spin	NOUN
cet-15726	36	29	coating	coating	NOUN
cet-15726	36	30	has	have	AUX
cet-15726	36	31	become	become	VERB
cet-15726	36	32	inevitable	inevitable	ADJ
cet-15726	36	33	.	.	PUNCT
cet-15726	37	1	the	the	DET
cet-15726	37	2	greatest	great	ADJ
cet-15726	37	3	advantage	advantage	NOUN
cet-15726	37	4	of	of	ADP
cet-15726	37	5	this	this	DET
cet-15726	37	6	technique	technique	NOUN
cet-15726	37	7	is	be	AUX
cet-15726	37	8	its	its	PRON
cet-15726	37	9	ability	ability	NOUN
cet-15726	37	10	to	to	PART
cet-15726	37	11	produce	produce	VERB
cet-15726	37	12	thin	thin	ADJ
cet-15726	37	13	films	film	NOUN
cet-15726	37	14	efficiently	efficiently	ADV
cet-15726	37	15	,	,	PUNCT
cet-15726	37	16	cost	cost	NOUN
cet-15726	37	17	-	-	PUNCT
cet-15726	37	18	effectively	effectively	ADV
cet-15726	37	19	and	and	CCONJ
cet-15726	37	20	with	with	ADP
cet-15726	37	21	high	high	ADJ
cet-15726	37	22	reproducibility	reproducibility	NOUN
cet-15726	37	23	.	.	PUNCT
cet-15726	38	1	among	among	ADP
cet-15726	38	2	the	the	DET
cet-15726	38	3	film	film	NOUN
cet-15726	38	4	deposition	deposition	NOUN
cet-15726	38	5	techniques	technique	NOUN
cet-15726	38	6	such	such	ADJ
cet-15726	38	7	as	as	ADP
cet-15726	38	8	dip	dip	NOUN
cet-15726	38	9	coating	coating	NOUN
cet-15726	38	10	,	,	PUNCT
cet-15726	38	11	sputtering	sputtering	ADJ
cet-15726	38	12	and	and	CCONJ
cet-15726	38	13	spin	spin	NOUN
cet-15726	38	14	coating	coating	NOUN
cet-15726	38	15	,	,	PUNCT
cet-15726	38	16	the	the	DET
cet-15726	38	17	biggest	big	ADJ
cet-15726	38	18	challenge	challenge	NOUN
cet-15726	38	19	is	be	AUX
cet-15726	38	20	to	to	PART
cet-15726	38	21	find	find	VERB
cet-15726	38	22	a	a	DET
cet-15726	38	23	balance	balance	NOUN
cet-15726	38	24	between	between	ADP
cet-15726	38	25	quality	quality	NOUN
cet-15726	38	26	and	and	CCONJ
cet-15726	38	27	cost	cost	NOUN
cet-15726	38	28	.	.	PUNCT
cet-15726	39	1	sophisticated	sophisticated	ADJ
cet-15726	39	2	equipment	equipment	NOUN
cet-15726	39	3	is	be	AUX
cet-15726	39	4	often	often	ADV
cet-15726	39	5	required	require	VERB
cet-15726	39	6	to	to	PART
cet-15726	39	7	ensure	ensure	VERB
cet-15726	39	8	film	film	NOUN
cet-15726	39	9	uniformity	uniformity	NOUN
cet-15726	39	10	,	,	PUNCT
cet-15726	39	11	which	which	PRON
cet-15726	39	12	increases	increase	VERB
cet-15726	39	13	production	production	NOUN
cet-15726	39	14	costs	cost	NOUN
cet-15726	39	15	(	(	PUNCT
cet-15726	39	16	yada	yada	NOUN
cet-15726	39	17	,	,	PUNCT
cet-15726	39	18	1995	1995	NUM
cet-15726	39	19	;	;	PUNCT
cet-15726	39	20	kalafatis	kalafatis	PROPN
cet-15726	39	21	et	et	PROPN
cet-15726	39	22	al	al	PROPN
cet-15726	39	23	.	.	PROPN
cet-15726	39	24	,	,	PUNCT
cet-15726	39	25	2024	2024	NUM
cet-15726	39	26	)	)	PUNCT
cet-15726	39	27	.	.	PUNCT
cet-15726	40	1	spin	spin	NOUN
cet-15726	40	2	coating	coating	NOUN
cet-15726	40	3	,	,	PUNCT
cet-15726	40	4	on	on	ADP
cet-15726	40	5	the	the	DET
cet-15726	40	6	other	other	ADJ
cet-15726	40	7	hand	hand	NOUN
cet-15726	40	8	,	,	PUNCT
cet-15726	40	9	is	be	AUX
cet-15726	40	10	characterized	characterize	VERB
cet-15726	40	11	by	by	ADP
cet-15726	40	12	the	the	DET
cet-15726	40	13	fact	fact	NOUN
cet-15726	40	14	that	that	SCONJ
cet-15726	40	15	only	only	ADV
cet-15726	40	16	the	the	DET
cet-15726	40	17	rotation	rotation	NOUN
cet-15726	40	18	and	and	CCONJ
cet-15726	40	19	viscosity	viscosity	NOUN
cet-15726	40	20	of	of	ADP
cet-15726	40	21	the	the	DET
cet-15726	40	22	material	material	NOUN
cet-15726	40	23	need	need	VERB
cet-15726	40	24	to	to	PART
cet-15726	40	25	be	be	AUX
cet-15726	40	26	controlled	control	VERB
cet-15726	40	27	.	.	PUNCT
cet-15726	41	1	this	this	DET
cet-15726	41	2	simplifies	simplify	VERB
cet-15726	41	3	the	the	DET
cet-15726	41	4	process	process	NOUN
cet-15726	41	5	and	and	CCONJ
cet-15726	41	6	enables	enable	VERB
cet-15726	41	7	the	the	DET
cet-15726	41	8	formation	formation	NOUN
cet-15726	41	9	of	of	ADP
cet-15726	41	10	coatings	coating	NOUN
cet-15726	41	11	with	with	ADP
cet-15726	41	12	good	good	ADJ
cet-15726	41	13	physical	physical	ADJ
cet-15726	41	14	and	and	CCONJ
cet-15726	41	15	chemical	chemical	NOUN
cet-15726	41	16	properties	property	NOUN
cet-15726	41	17	.	.	PUNCT
cet-15726	42	1	the	the	DET
cet-15726	42	2	applicability	applicability	NOUN
cet-15726	42	3	of	of	ADP
cet-15726	42	4	this	this	DET
cet-15726	42	5	technique	technique	NOUN
cet-15726	42	6	extends	extend	VERB
cet-15726	42	7	to	to	ADP
cet-15726	42	8	the	the	DET
cet-15726	42	9	semiconductor	semiconductor	NOUN
cet-15726	42	10	industry	industry	NOUN
cet-15726	42	11	,	,	PUNCT
cet-15726	42	12	biomedical	biomedical	ADJ
cet-15726	42	13	engineering	engineering	NOUN
cet-15726	42	14	,	,	PUNCT
cet-15726	42	15	optical	optical	ADJ
cet-15726	42	16	coatings	coating	NOUN
cet-15726	42	17	and	and	CCONJ
cet-15726	42	18	even	even	ADV
cet-15726	42	19	the	the	DET
cet-15726	42	20	production	production	NOUN
cet-15726	42	21	of	of	ADP
cet-15726	42	22	active	active	ADJ
cet-15726	42	23	layers	layer	NOUN
cet-15726	42	24	for	for	ADP
cet-15726	42	25	chemical	chemical	NOUN
cet-15726	42	26	and	and	CCONJ
cet-15726	42	27	biological	biological	ADJ
cet-15726	42	28	sensors	sensor	NOUN
cet-15726	42	29	.	.	PUNCT
cet-15726	43	1	in	in	ADP
cet-15726	43	2	addition	addition	NOUN
cet-15726	43	3	,	,	PUNCT
cet-15726	43	4	spin	spin	NOUN
cet-15726	43	5	coating	coating	NOUN
cet-15726	43	6	has	have	AUX
cet-15726	43	7	been	be	AUX
cet-15726	43	8	explored	explore	VERB
cet-15726	43	9	in	in	ADP
cet-15726	43	10	the	the	DET
cet-15726	43	11	renewable	renewable	ADJ
cet-15726	43	12	energy	energy	NOUN
cet-15726	43	13	industry	industry	NOUN
cet-15726	43	14	to	to	PART
cet-15726	43	15	produce	produce	VERB
cet-15726	43	16	perovskite	perovskite	NOUN
cet-15726	43	17	layers	layer	NOUN
cet-15726	43	18	in	in	ADP
cet-15726	43	19	solar	solar	ADJ
cet-15726	43	20	cells	cell	NOUN
cet-15726	43	21	,	,	PUNCT
cet-15726	43	22	which	which	PRON
cet-15726	43	23	has	have	AUX
cet-15726	43	24	contributed	contribute	VERB
cet-15726	43	25	to	to	ADP
cet-15726	43	26	significant	significant	ADJ
cet-15726	43	27	advances	advance	NOUN
cet-15726	43	28	in	in	ADP
cet-15726	43	29	energy	energy	NOUN
cet-15726	43	30	efficiency	efficiency	NOUN
cet-15726	43	31	(	(	PUNCT
cet-15726	43	32	yada	yada	NOUN
cet-15726	43	33	,	,	PUNCT
cet-15726	43	34	1995	1995	NUM
cet-15726	43	35	;	;	PUNCT
cet-15726	43	36	vorotilov	vorotilov	PROPN
cet-15726	43	37	,	,	PUNCT
cet-15726	43	38	1995	1995	NUM
cet-15726	43	39	;	;	PUNCT
cet-15726	43	40	tyona	tyona	NOUN
cet-15726	43	41	,	,	PUNCT
cet-15726	43	42	2013	2013	NUM
cet-15726	43	43	;	;	PUNCT
cet-15726	43	44	mouhamad	mouhamad	NOUN
cet-15726	43	45	et	et	PROPN
cet-15726	43	46	al	al	PROPN
cet-15726	43	47	.	.	PROPN
cet-15726	43	48	,	,	PUNCT
cet-15726	43	49	2014	2014	NUM
cet-15726	43	50	;	;	PUNCT
cet-15726	43	51	kalafatis	kalafatis	PROPN
cet-15726	43	52	et	et	PROPN
cet-15726	43	53	al	al	PROPN
cet-15726	43	54	.	.	PROPN
cet-15726	43	55	,	,	PUNCT
cet-15726	43	56	2024	2024	NUM
cet-15726	43	57	)	)	PUNCT
cet-15726	43	58	.	.	PUNCT
cet-15726	44	1	the	the	DET
cet-15726	44	2	production	production	NOUN
cet-15726	44	3	of	of	ADP
cet-15726	44	4	electrolytes	electrolyte	NOUN
cet-15726	44	5	for	for	ADP
cet-15726	44	6	fuel	fuel	NOUN
cet-15726	44	7	cells	cell	NOUN
cet-15726	44	8	is	be	AUX
cet-15726	44	9	another	another	DET
cet-15726	44	10	important	important	ADJ
cet-15726	44	11	application	application	NOUN
cet-15726	44	12	of	of	ADP
cet-15726	44	13	this	this	DET
cet-15726	44	14	technique	technique	NOUN
cet-15726	44	15	,	,	PUNCT
cet-15726	44	16	which	which	PRON
cet-15726	44	17	ensures	ensure	VERB
cet-15726	44	18	the	the	DET
cet-15726	44	19	formation	formation	NOUN
cet-15726	44	20	of	of	ADP
cet-15726	44	21	thin	thin	ADJ
cet-15726	44	22	and	and	CCONJ
cet-15726	44	23	dense	dense	ADJ
cet-15726	44	24	layers	layer	NOUN
cet-15726	44	25	that	that	PRON
cet-15726	44	26	maximize	maximize	VERB
cet-15726	44	27	the	the	DET
cet-15726	44	28	efficiency	efficiency	NOUN
cet-15726	44	29	of	of	ADP
cet-15726	44	30	ion	ion	NOUN
cet-15726	44	31	transport	transport	NOUN
cet-15726	44	32	.	.	PUNCT
cet-15726	45	1	these	these	DET
cet-15726	45	2	thin	thin	ADJ
cet-15726	45	3	films	film	NOUN
cet-15726	45	4	act	act	VERB
cet-15726	45	5	as	as	ADP
cet-15726	45	6	selective	selective	ADJ
cet-15726	45	7	barriers	barrier	NOUN
cet-15726	45	8	for	for	ADP
cet-15726	45	9	the	the	DET
cet-15726	45	10	passage	passage	NOUN
cet-15726	45	11	of	of	ADP
cet-15726	45	12	ions	ion	NOUN
cet-15726	45	13	,	,	PUNCT
cet-15726	45	14	avoiding	avoid	VERB
cet-15726	45	15	short	short	ADJ
cet-15726	45	16	circuits	circuit	NOUN
cet-15726	45	17	and	and	CCONJ
cet-15726	45	18	optimizing	optimize	VERB
cet-15726	45	19	the	the	DET
cet-15726	45	20	conversion	conversion	NOUN
cet-15726	45	21	of	of	ADP
cet-15726	45	22	chemical	chemical	ADJ
cet-15726	45	23	energy	energy	NOUN
cet-15726	45	24	into	into	ADP
cet-15726	45	25	electrical	electrical	ADJ
cet-15726	45	26	energy	energy	NOUN
cet-15726	45	27	,	,	PUNCT
cet-15726	45	28	which	which	PRON
cet-15726	45	29	is	be	AUX
cet-15726	45	30	essential	essential	ADJ
cet-15726	45	31	for	for	ADP
cet-15726	45	32	the	the	DET
cet-15726	45	33	development	development	NOUN
cet-15726	45	34	of	of	ADP
cet-15726	45	35	clean	clean	ADJ
cet-15726	45	36	and	and	CCONJ
cet-15726	45	37	sustainable	sustainable	ADJ
cet-15726	45	38	energy	energy	NOUN
cet-15726	45	39	sources	source	NOUN
cet-15726	45	40	.	.	PUNCT
cet-15726	46	1	the	the	DET
cet-15726	46	2	growing	grow	VERB
cet-15726	46	3	demand	demand	NOUN
cet-15726	46	4	for	for	ADP
cet-15726	46	5	thin	thin	ADJ
cet-15726	46	6	films	film	NOUN
cet-15726	46	7	with	with	ADP
cet-15726	46	8	improved	improved	ADJ
cet-15726	46	9	properties	property	NOUN
cet-15726	46	10	has	have	AUX
cet-15726	46	11	driven	drive	VERB
cet-15726	46	12	the	the	DET
cet-15726	46	13	development	development	NOUN
cet-15726	46	14	of	of	ADP
cet-15726	46	15	new	new	ADJ
cet-15726	46	16	deposition	deposition	NOUN
cet-15726	46	17	techniques	technique	NOUN
cet-15726	46	18	,	,	PUNCT
cet-15726	46	19	among	among	ADP
cet-15726	46	20	which	which	PRON
cet-15726	46	21	spin	spin	NOUN
cet-15726	46	22	coating	coating	NOUN
cet-15726	46	23	stands	stand	VERB
cet-15726	46	24	out	out	ADP
cet-15726	46	25	as	as	ADP
cet-15726	46	26	one	one	NUM
cet-15726	46	27	of	of	ADP
cet-15726	46	28	the	the	DET
cet-15726	46	29	most	most	ADV
cet-15726	46	30	studied	study	VERB
cet-15726	46	31	and	and	CCONJ
cet-15726	46	32	applied	apply	VERB
cet-15726	46	33	options	option	NOUN
cet-15726	46	34	due	due	ADP
cet-15726	46	35	to	to	ADP
cet-15726	46	36	its	its	PRON
cet-15726	46	37	accessible	accessible	ADJ
cet-15726	46	38	and	and	CCONJ
cet-15726	46	39	efficient	efficient	ADJ
cet-15726	46	40	approach	approach	NOUN
cet-15726	46	41	,	,	PUNCT
cet-15726	46	42	as	as	SCONJ
cet-15726	46	43	its	its	PRON
cet-15726	46	44	versatility	versatility	NOUN
cet-15726	46	45	and	and	CCONJ
cet-15726	46	46	low	low	ADJ
cet-15726	46	47	cost	cost	NOUN
cet-15726	46	48	make	make	VERB
cet-15726	46	49	it	it	PRON
cet-15726	46	50	an	an	DET
cet-15726	46	51	excellent	excellent	ADJ
cet-15726	46	52	alternative	alternative	NOUN
cet-15726	46	53	for	for	ADP
cet-15726	46	54	the	the	DET
cet-15726	46	55	production	production	NOUN
cet-15726	46	56	of	of	ADP
cet-15726	46	57	functional	functional	ADJ
cet-15726	46	58	coatings	coating	NOUN
cet-15726	46	59	in	in	ADP
cet-15726	46	60	various	various	ADJ
cet-15726	46	61	fields	field	NOUN
cet-15726	46	62	that	that	PRON
cet-15726	46	63	promote	promote	VERB
cet-15726	46	64	technological	technological	ADJ
cet-15726	46	65	and	and	CCONJ
cet-15726	46	66	scientific	scientific	ADJ
cet-15726	46	67	innovation	innovation	NOUN
cet-15726	46	68	continuous	continuous	ADJ
cet-15726	46	69	research	research	NOUN
cet-15726	46	70	to	to	PART
cet-15726	46	71	improve	improve	VERB
cet-15726	46	72	deposition	deposition	NOUN
cet-15726	46	73	parameters	parameter	NOUN
cet-15726	46	74	and	and	CCONJ
cet-15726	46	75	the	the	DET
cet-15726	46	76	development	development	NOUN
cet-15726	46	77	of	of	ADP
cet-15726	46	78	new	new	ADJ
cet-15726	46	79	materials	material	NOUN
cet-15726	46	80	compatible	compatible	ADJ
cet-15726	46	81	with	with	ADP
cet-15726	46	82	this	this	DET
cet-15726	46	83	technique	technique	NOUN
cet-15726	46	84	promise	promise	VERB
cet-15726	46	85	a	a	DET
cet-15726	46	86	further	further	ADJ
cet-15726	46	87	expansion	expansion	NOUN
cet-15726	46	88	of	of	ADP
cet-15726	46	89	applications	application	NOUN
cet-15726	46	90	.	.	PUNCT
cet-15726	47	1	spin	spin	NOUN
cet-15726	47	2	coating	coating	NOUN
cet-15726	47	3	will	will	AUX
cet-15726	47	4	therefore	therefore	ADV
cet-15726	47	5	continue	continue	VERB
cet-15726	47	6	to	to	PART
cet-15726	47	7	play	play	VERB
cet-15726	47	8	a	a	DET
cet-15726	47	9	key	key	ADJ
cet-15726	47	10	role	role	NOUN
cet-15726	47	11	in	in	ADP
cet-15726	47	12	the	the	DET
cet-15726	47	13	production	production	NOUN
cet-15726	47	14	of	of	ADP
cet-15726	47	15	next	next	ADJ
cet-15726	47	16	-	-	PUNCT
cet-15726	47	17	generation	generation	NOUN
cet-15726	47	18	technological	technological	ADJ
cet-15726	47	19	devices	device	NOUN
cet-15726	47	20	,	,	PUNCT
cet-15726	47	21	including	include	VERB
cet-15726	47	22	the	the	DET
cet-15726	47	23	development	development	NOUN
cet-15726	47	24	of	of	ADP
cet-15726	47	25	advanced	advanced	ADJ
cet-15726	47	26	electrolytes	electrolyte	NOUN
cet-15726	47	27	for	for	ADP
cet-15726	47	28	fuel	fuel	NOUN
cet-15726	47	29	cells	cell	NOUN
cet-15726	47	30	,	,	PUNCT
cet-15726	47	31	and	and	CCONJ
cet-15726	47	32	make	make	VERB
cet-15726	47	33	an	an	DET
cet-15726	47	34	important	important	ADJ
cet-15726	47	35	contribution	contribution	NOUN
cet-15726	47	36	to	to	ADP
cet-15726	47	37	the	the	DET
cet-15726	47	38	sustainable	sustainable	ADJ
cet-15726	47	39	energy	energy	NOUN
cet-15726	47	40	sector	sector	NOUN
cet-15726	47	41	and	and	CCONJ
cet-15726	47	42	scientific	scientific	ADJ
cet-15726	47	43	innovation	innovation	NOUN
cet-15726	47	44	.	.	PUNCT
cet-15726	48	1	the	the	DET
cet-15726	48	2	process	process	NOUN
cet-15726	48	3	of	of	ADP
cet-15726	48	4	film	film	NOUN
cet-15726	48	5	formation	formation	NOUN
cet-15726	48	6	by	by	ADP
cet-15726	48	7	centrifugation	centrifugation	NOUN
cet-15726	48	8	is	be	AUX
cet-15726	48	9	shown	show	VERB
cet-15726	48	10	in	in	ADP
cet-15726	48	11	figure	figure	NOUN
cet-15726	48	12	1	1	NUM
cet-15726	48	13	.	.	PUNCT
cet-15726	49	1	in	in	ADP
cet-15726	49	2	the	the	DET
cet-15726	49	3	first	first	ADJ
cet-15726	49	4	phase	phase	NOUN
cet-15726	49	5	,	,	PUNCT
cet-15726	49	6	a	a	DET
cet-15726	49	7	volume	volume	NOUN
cet-15726	49	8	of	of	ADP
cet-15726	49	9	the	the	DET
cet-15726	49	10	material	material	NOUN
cet-15726	49	11	is	be	AUX
cet-15726	49	12	applied	apply	VERB
cet-15726	49	13	to	to	ADP
cet-15726	49	14	the	the	DET
cet-15726	49	15	substrate	substrate	NOUN
cet-15726	49	16	and	and	CCONJ
cet-15726	49	17	the	the	DET
cet-15726	49	18	system	system	NOUN
cet-15726	49	19	is	be	AUX
cet-15726	49	20	rotated	rotate	VERB
cet-15726	49	21	with	with	ADP
cet-15726	49	22	a	a	DET
cet-15726	49	23	certain	certain	ADJ
cet-15726	49	24	acceleration	acceleration	NOUN
cet-15726	49	25	up	up	ADP
cet-15726	49	26	to	to	ADP
cet-15726	49	27	a	a	DET
cet-15726	49	28	set	set	ADJ
cet-15726	49	29	speed	speed	NOUN
cet-15726	49	30	:	:	PUNCT
cet-15726	49	31	during	during	ADP
cet-15726	49	32	such	such	ADJ
cet-15726	49	33	rotation	rotation	NOUN
cet-15726	49	34	,	,	PUNCT
cet-15726	49	35	part	part	NOUN
cet-15726	49	36	of	of	ADP
cet-15726	49	37	the	the	DET
cet-15726	49	38	solution	solution	NOUN
cet-15726	49	39	is	be	AUX
cet-15726	49	40	expelled	expel	VERB
cet-15726	49	41	from	from	ADP
cet-15726	49	42	the	the	DET
cet-15726	49	43	substrate	substrate	NOUN
cet-15726	49	44	.	.	PUNCT
cet-15726	50	1	after	after	ADP
cet-15726	50	2	complete	complete	ADJ
cet-15726	50	3	evaporation	evaporation	NOUN
cet-15726	50	4	of	of	ADP
cet-15726	50	5	the	the	DET
cet-15726	50	6	solvent	solvent	NOUN
cet-15726	50	7	,	,	PUNCT
cet-15726	50	8	the	the	DET
cet-15726	50	9	film	film	NOUN
cet-15726	50	10	finally	finally	ADV
cet-15726	50	11	forms	form	VERB
cet-15726	50	12	on	on	ADP
cet-15726	50	13	the	the	DET
cet-15726	50	14	surface	surface	NOUN
cet-15726	50	15	of	of	ADP
cet-15726	50	16	the	the	DET
cet-15726	50	17	substrate	substrate	NOUN
cet-15726	50	18	.	.	PUNCT
cet-15726	51	1	the	the	DET
cet-15726	51	2	speed	speed	NOUN
cet-15726	51	3	of	of	ADP
cet-15726	51	4	rotation	rotation	NOUN
cet-15726	51	5	can	can	AUX
cet-15726	51	6	be	be	AUX
cet-15726	51	7	varied	varied	ADJ
cet-15726	51	8	,	,	PUNCT
cet-15726	51	9	and	and	CCONJ
cet-15726	51	10	its	its	PRON
cet-15726	51	11	ideal	ideal	ADJ
cet-15726	51	12	value	value	NOUN
cet-15726	51	13	depends	depend	VERB
cet-15726	51	14	on	on	ADP
cet-15726	51	15	several	several	ADJ
cet-15726	51	16	factors	factor	NOUN
cet-15726	51	17	,	,	PUNCT
cet-15726	51	18	such	such	ADJ
cet-15726	51	19	as	as	ADP
cet-15726	51	20	the	the	DET
cet-15726	51	21	type	type	NOUN
cet-15726	51	22	of	of	ADP
cet-15726	51	23	material	material	NOUN
cet-15726	51	24	used	use	VERB
cet-15726	51	25	,	,	PUNCT
cet-15726	51	26	the	the	DET
cet-15726	51	27	volatility	volatility	NOUN
cet-15726	51	28	of	of	ADP
cet-15726	51	29	the	the	DET
cet-15726	51	30	solvent	solvent	NOUN
cet-15726	51	31	and	and	CCONJ
cet-15726	51	32	the	the	DET
cet-15726	51	33	desired	desire	VERB
cet-15726	51	34	thickness	thickness	NOUN
cet-15726	51	35	of	of	ADP
cet-15726	51	36	the	the	DET
cet-15726	51	37	dry	dry	ADJ
cet-15726	51	38	film	film	NOUN
cet-15726	51	39	(	(	PUNCT
cet-15726	51	40	yada	yada	NOUN
cet-15726	51	41	,	,	PUNCT
cet-15726	51	42	1995	1995	NUM
cet-15726	51	43	;	;	PUNCT
cet-15726	51	44	tyona	tyona	NOUN
cet-15726	51	45	,	,	PUNCT
cet-15726	51	46	2013	2013	NUM
cet-15726	51	47	;	;	PUNCT
cet-15726	51	48	mouhamad	mouhamad	NOUN
cet-15726	51	49	et	et	PROPN
cet-15726	51	50	al	al	PROPN
cet-15726	51	51	.	.	PROPN
cet-15726	51	52	,	,	PUNCT
cet-15726	51	53	2014	2014	NUM
cet-15726	51	54	;	;	PUNCT
cet-15726	51	55	chou	chou	PROPN
cet-15726	51	56	et	et	PROPN
cet-15726	51	57	al	al	PROPN
cet-15726	51	58	.	.	PROPN
cet-15726	51	59	,	,	PUNCT
cet-15726	51	60	2021	2021	NUM
cet-15726	51	61	;	;	PUNCT
cet-15726	51	62	kalafatis	kalafatis	PROPN
cet-15726	51	63	et	et	PROPN
cet-15726	51	64	al	al	PROPN
cet-15726	51	65	.	.	PROPN
cet-15726	51	66	,	,	PUNCT
cet-15726	51	67	2024	2024	NUM
cet-15726	51	68	)	)	PUNCT
cet-15726	51	69	.	.	PUNCT
cet-15726	52	1	figure	figure	VERB
cet-15726	52	2	1	1	NUM
cet-15726	52	3	:	:	PUNCT
cet-15726	52	4	procedure	procedure	NOUN
cet-15726	52	5	for	for	ADP
cet-15726	52	6	preparing	prepare	VERB
cet-15726	52	7	thin	thin	ADJ
cet-15726	52	8	films	film	NOUN
cet-15726	52	9	using	use	VERB
cet-15726	52	10	spin	spin	NOUN
cet-15726	52	11	coating	coating	NOUN
cet-15726	52	12	.	.	PUNCT
cet-15726	53	1	602	602	NUM
cet-15726	53	2	spin	spin	NOUN
cet-15726	53	3	coating	coating	NOUN
cet-15726	53	4	is	be	AUX
cet-15726	53	5	a	a	DET
cet-15726	53	6	widely	widely	ADV
cet-15726	53	7	used	use	VERB
cet-15726	53	8	technique	technique	NOUN
cet-15726	53	9	for	for	ADP
cet-15726	53	10	producing	produce	VERB
cet-15726	53	11	very	very	ADV
cet-15726	53	12	thin	thin	ADJ
cet-15726	53	13	films	film	NOUN
cet-15726	53	14	,	,	PUNCT
cet-15726	53	15	typically	typically	ADV
cet-15726	53	16	in	in	ADP
cet-15726	53	17	the	the	DET
cet-15726	53	18	order	order	NOUN
cet-15726	53	19	of	of	ADP
cet-15726	53	20	micrometres	micrometre	NOUN
cet-15726	53	21	,	,	PUNCT
cet-15726	53	22	and	and	CCONJ
cet-15726	53	23	with	with	ADP
cet-15726	53	24	uniform	uniform	ADJ
cet-15726	53	25	opacity	opacity	NOUN
cet-15726	53	26	.	.	PUNCT
cet-15726	54	1	the	the	DET
cet-15726	54	2	desired	desire	VERB
cet-15726	54	3	film	film	NOUN
cet-15726	54	4	can	can	AUX
cet-15726	54	5	be	be	AUX
cet-15726	54	6	achieved	achieve	VERB
cet-15726	54	7	by	by	ADP
cet-15726	54	8	optimizing	optimize	VERB
cet-15726	54	9	some	some	DET
cet-15726	54	10	parameters	parameter	NOUN
cet-15726	54	11	such	such	ADJ
cet-15726	54	12	as	as	ADP
cet-15726	54	13	the	the	DET
cet-15726	54	14	concentration	concentration	NOUN
cet-15726	54	15	of	of	ADP
cet-15726	54	16	the	the	DET
cet-15726	54	17	solution	solution	NOUN
cet-15726	54	18	,	,	PUNCT
cet-15726	54	19	the	the	DET
cet-15726	54	20	proportion	proportion	NOUN
cet-15726	54	21	of	of	ADP
cet-15726	54	22	other	other	ADJ
cet-15726	54	23	additives	additive	NOUN
cet-15726	54	24	,	,	PUNCT
cet-15726	54	25	the	the	DET
cet-15726	54	26	viscosity	viscosity	NOUN
cet-15726	54	27	of	of	ADP
cet-15726	54	28	the	the	DET
cet-15726	54	29	solution	solution	NOUN
cet-15726	54	30	and	and	CCONJ
cet-15726	54	31	the	the	DET
cet-15726	54	32	rotation	rotation	NOUN
cet-15726	54	33	speed	speed	NOUN
cet-15726	54	34	.	.	PUNCT
cet-15726	55	1	this	this	PRON
cet-15726	55	2	makes	make	VERB
cet-15726	55	3	it	it	PRON
cet-15726	55	4	possible	possible	ADJ
cet-15726	55	5	to	to	PART
cet-15726	55	6	control	control	VERB
cet-15726	55	7	the	the	DET
cet-15726	55	8	dynamics	dynamic	NOUN
cet-15726	55	9	of	of	ADP
cet-15726	55	10	film	film	NOUN
cet-15726	55	11	formation	formation	NOUN
cet-15726	55	12	,	,	PUNCT
cet-15726	55	13	which	which	PRON
cet-15726	55	14	are	be	AUX
cet-15726	55	15	inextricably	inextricably	ADV
cet-15726	55	16	linked	link	VERB
cet-15726	55	17	to	to	ADP
cet-15726	55	18	the	the	DET
cet-15726	55	19	final	final	ADJ
cet-15726	55	20	structure	structure	NOUN
cet-15726	55	21	of	of	ADP
cet-15726	55	22	the	the	DET
cet-15726	55	23	film	film	NOUN
cet-15726	55	24	.	.	PUNCT
cet-15726	56	1	spin	spin	NOUN
cet-15726	56	2	coating	coat	VERB
cet-15726	56	3	technology	technology	NOUN
cet-15726	56	4	was	be	AUX
cet-15726	56	5	originally	originally	ADV
cet-15726	56	6	developed	develop	VERB
cet-15726	56	7	for	for	ADP
cet-15726	56	8	the	the	DET
cet-15726	56	9	deposition	deposition	NOUN
cet-15726	56	10	of	of	ADP
cet-15726	56	11	light	light	ADJ
cet-15726	56	12	-	-	PUNCT
cet-15726	56	13	sensitive	sensitive	ADJ
cet-15726	56	14	layers	layer	NOUN
cet-15726	56	15	in	in	ADP
cet-15726	56	16	the	the	DET
cet-15726	56	17	field	field	NOUN
cet-15726	56	18	of	of	ADP
cet-15726	56	19	microelectronics	microelectronic	NOUN
cet-15726	56	20	and	and	CCONJ
cet-15726	56	21	later	later	ADV
cet-15726	56	22	for	for	ADP
cet-15726	56	23	the	the	DET
cet-15726	56	24	deposition	deposition	NOUN
cet-15726	56	25	of	of	ADP
cet-15726	56	26	various	various	ADJ
cet-15726	56	27	materials	material	NOUN
cet-15726	56	28	such	such	ADJ
cet-15726	56	29	as	as	ADP
cet-15726	56	30	light	light	NOUN
cet-15726	56	31	-	-	PUNCT
cet-15726	56	32	emitting	emit	VERB
cet-15726	56	33	diodes	diode	NOUN
cet-15726	56	34	,	,	PUNCT
cet-15726	56	35	photovoltaic	photovoltaic	NOUN
cet-15726	56	36	cells	cell	NOUN
cet-15726	56	37	,	,	PUNCT
cet-15726	56	38	transistors	transistor	NOUN
cet-15726	56	39	,	,	PUNCT
cet-15726	56	40	screens	screen	NOUN
cet-15726	56	41	,	,	PUNCT
cet-15726	56	42	sensors	sensor	NOUN
cet-15726	56	43	and	and	CCONJ
cet-15726	56	44	biosensors	biosensor	NOUN
cet-15726	56	45	,	,	PUNCT
cet-15726	56	46	anti	anti	ADJ
cet-15726	56	47	-	-	ADJ
cet-15726	56	48	fog	fog	ADJ
cet-15726	56	49	coatings	coating	NOUN
cet-15726	56	50	,	,	PUNCT
cet-15726	56	51	antireflective	antireflective	ADJ
cet-15726	56	52	coatings	coating	NOUN
cet-15726	56	53	and	and	CCONJ
cet-15726	56	54	many	many	ADJ
cet-15726	56	55	other	other	ADJ
cet-15726	56	56	applications	application	NOUN
cet-15726	56	57	such	such	ADJ
cet-15726	56	58	as	as	ADP
cet-15726	56	59	ceramic	ceramic	ADJ
cet-15726	56	60	materials	material	NOUN
cet-15726	56	61	for	for	ADP
cet-15726	56	62	the	the	DET
cet-15726	56	63	production	production	NOUN
cet-15726	56	64	of	of	ADP
cet-15726	56	65	electrolytes	electrolyte	NOUN
cet-15726	56	66	for	for	ADP
cet-15726	56	67	fuel	fuel	NOUN
cet-15726	56	68	cells	cell	NOUN
cet-15726	56	69	,	,	PUNCT
cet-15726	56	70	since	since	SCONJ
cet-15726	56	71	the	the	DET
cet-15726	56	72	spin	spin	NOUN
cet-15726	56	73	coating	coat	VERB
cet-15726	56	74	film	film	NOUN
cet-15726	56	75	formation	formation	NOUN
cet-15726	56	76	technique	technique	NOUN
cet-15726	56	77	has	have	VERB
cet-15726	56	78	the	the	DET
cet-15726	56	79	advantage	advantage	NOUN
cet-15726	56	80	of	of	ADP
cet-15726	56	81	being	be	AUX
cet-15726	56	82	a	a	DET
cet-15726	56	83	very	very	ADV
cet-15726	56	84	simple	simple	ADJ
cet-15726	56	85	method	method	NOUN
cet-15726	56	86	that	that	PRON
cet-15726	56	87	can	can	AUX
cet-15726	56	88	be	be	AUX
cet-15726	56	89	carried	carry	VERB
cet-15726	56	90	out	out	ADP
cet-15726	56	91	with	with	ADP
cet-15726	56	92	low	low	ADJ
cet-15726	56	93	-	-	PUNCT
cet-15726	56	94	cost	cost	NOUN
cet-15726	56	95	equipment	equipment	NOUN
cet-15726	56	96	both	both	CCONJ
cet-15726	56	97	in	in	ADP
cet-15726	56	98	terms	term	NOUN
cet-15726	56	99	of	of	ADP
cet-15726	56	100	acquisition	acquisition	NOUN
cet-15726	56	101	and	and	CCONJ
cet-15726	56	102	assembly	assembly	NOUN
cet-15726	56	103	and	and	CCONJ
cet-15726	56	104	maintenance	maintenance	NOUN
cet-15726	56	105	(	(	PUNCT
cet-15726	56	106	kalafatis	kalafatis	NOUN
cet-15726	56	107	et	et	PROPN
cet-15726	56	108	al	al	PROPN
cet-15726	56	109	.	.	PROPN
cet-15726	56	110	,	,	PUNCT
cet-15726	56	111	2024).the	2024).the	ADJ
cet-15726	56	112	optimization	optimization	NOUN
cet-15726	56	113	of	of	ADP
cet-15726	56	114	the	the	DET
cet-15726	56	115	various	various	ADJ
cet-15726	56	116	factors	factor	NOUN
cet-15726	56	117	to	to	PART
cet-15726	56	118	obtain	obtain	VERB
cet-15726	56	119	high	high	ADJ
cet-15726	56	120	quality	quality	NOUN
cet-15726	56	121	films	film	NOUN
cet-15726	56	122	is	be	AUX
cet-15726	56	123	relatively	relatively	ADV
cet-15726	56	124	simple	simple	ADJ
cet-15726	56	125	and	and	CCONJ
cet-15726	56	126	the	the	DET
cet-15726	56	127	process	process	NOUN
cet-15726	56	128	of	of	ADP
cet-15726	56	129	film	film	NOUN
cet-15726	56	130	formation	formation	NOUN
cet-15726	56	131	is	be	AUX
cet-15726	56	132	fast	fast	ADJ
cet-15726	56	133	and	and	CCONJ
cet-15726	56	134	reproducible	reproducible	ADJ
cet-15726	56	135	(	(	PUNCT
cet-15726	56	136	vorotilov	vorotilov	ADJ
cet-15726	56	137	,	,	PUNCT
cet-15726	56	138	1995	1995	NUM
cet-15726	56	139	;	;	PUNCT
cet-15726	57	1	tyona	tyona	NOUN
cet-15726	57	2	,	,	PUNCT
cet-15726	57	3	2013	2013	NUM
cet-15726	57	4	;	;	PUNCT
cet-15726	57	5	mouhamad	mouhamad	NOUN
cet-15726	57	6	et	et	PROPN
cet-15726	57	7	al	al	PROPN
cet-15726	57	8	.	.	PROPN
cet-15726	57	9	,	,	PUNCT
cet-15726	57	10	2014	2014	NUM
cet-15726	57	11	;	;	PUNCT
cet-15726	57	12	kalafatis	kalafatis	PROPN
cet-15726	57	13	et	et	PROPN
cet-15726	57	14	al	al	PROPN
cet-15726	57	15	.	.	PROPN
cet-15726	57	16	,	,	PUNCT
cet-15726	57	17	2024	2024	NUM
cet-15726	57	18	)	)	PUNCT
cet-15726	57	19	.	.	PUNCT
cet-15726	58	1	as	as	SCONJ
cet-15726	58	2	it	it	PRON
cet-15726	58	3	is	be	AUX
cet-15726	58	4	a	a	DET
cet-15726	58	5	batch	batch	NOUN
cet-15726	58	6	process	process	NOUN
cet-15726	58	7	,	,	PUNCT
cet-15726	58	8	it	it	PRON
cet-15726	58	9	can	can	AUX
cet-15726	58	10	not	not	PART
cet-15726	58	11	be	be	AUX
cet-15726	58	12	adapted	adapt	VERB
cet-15726	58	13	for	for	ADP
cet-15726	58	14	a	a	DET
cet-15726	58	15	continuous	continuous	ADJ
cet-15726	58	16	deposition	deposition	NOUN
cet-15726	58	17	process	process	NOUN
cet-15726	58	18	,	,	PUNCT
cet-15726	58	19	which	which	PRON
cet-15726	58	20	limits	limit	VERB
cet-15726	58	21	its	its	PRON
cet-15726	58	22	use	use	NOUN
cet-15726	58	23	on	on	ADP
cet-15726	58	24	very	very	ADV
cet-15726	58	25	large	large	ADJ
cet-15726	58	26	deposition	deposition	NOUN
cet-15726	58	27	areas	area	NOUN
cet-15726	58	28	.	.	PUNCT
cet-15726	59	1	the	the	DET
cet-15726	59	2	use	use	NOUN
cet-15726	59	3	of	of	ADP
cet-15726	59	4	flexible	flexible	ADJ
cet-15726	59	5	or	or	CCONJ
cet-15726	59	6	very	very	ADV
cet-15726	59	7	thin	thin	ADJ
cet-15726	59	8	substrates	substrate	NOUN
cet-15726	59	9	requires	require	VERB
cet-15726	59	10	the	the	DET
cet-15726	59	11	use	use	NOUN
cet-15726	59	12	of	of	ADP
cet-15726	59	13	additional	additional	ADJ
cet-15726	59	14	supports	support	NOUN
cet-15726	59	15	to	to	PART
cet-15726	59	16	hold	hold	VERB
cet-15726	59	17	the	the	DET
cet-15726	59	18	substrate	substrate	NOUN
cet-15726	59	19	and	and	CCONJ
cet-15726	59	20	prevent	prevent	VERB
cet-15726	59	21	deformation	deformation	NOUN
cet-15726	59	22	due	due	ADP
cet-15726	59	23	to	to	ADP
cet-15726	59	24	suction	suction	NOUN
cet-15726	59	25	and	and	CCONJ
cet-15726	59	26	rotation	rotation	NOUN
cet-15726	59	27	.	.	PUNCT
cet-15726	60	1	the	the	DET
cet-15726	60	2	main	main	ADJ
cet-15726	60	3	disadvantage	disadvantage	NOUN
cet-15726	60	4	of	of	ADP
cet-15726	60	5	this	this	DET
cet-15726	60	6	technique	technique	NOUN
cet-15726	60	7	is	be	AUX
cet-15726	60	8	the	the	DET
cet-15726	60	9	large	large	ADJ
cet-15726	60	10	loss	loss	NOUN
cet-15726	60	11	of	of	ADP
cet-15726	60	12	material	material	NOUN
cet-15726	60	13	,	,	PUNCT
cet-15726	60	14	especially	especially	ADV
cet-15726	60	15	when	when	SCONJ
cet-15726	60	16	the	the	DET
cet-15726	60	17	material	material	NOUN
cet-15726	60	18	is	be	AUX
cet-15726	60	19	deposited	deposit	VERB
cet-15726	60	20	statically	statically	ADV
cet-15726	60	21	,	,	PUNCT
cet-15726	60	22	as	as	SCONJ
cet-15726	60	23	up	up	ADP
cet-15726	60	24	to	to	PART
cet-15726	60	25	90	90	NUM
cet-15726	60	26	%	%	NOUN
cet-15726	60	27	of	of	ADP
cet-15726	60	28	the	the	DET
cet-15726	60	29	material	material	NOUN
cet-15726	60	30	is	be	AUX
cet-15726	60	31	usually	usually	ADV
cet-15726	60	32	ejected	eject	VERB
cet-15726	60	33	from	from	ADP
cet-15726	60	34	the	the	DET
cet-15726	60	35	substrate	substrate	NOUN
cet-15726	60	36	and	and	CCONJ
cet-15726	60	37	,	,	PUNCT
cet-15726	60	38	in	in	ADP
cet-15726	60	39	most	most	ADJ
cet-15726	60	40	cases	case	NOUN
cet-15726	60	41	,	,	PUNCT
cet-15726	60	42	can	can	AUX
cet-15726	60	43	not	not	PART
cet-15726	60	44	be	be	AUX
cet-15726	60	45	reused	reuse	VERB
cet-15726	60	46	(	(	PUNCT
cet-15726	60	47	tyona	tyona	NOUN
cet-15726	60	48	,	,	PUNCT
cet-15726	60	49	2013	2013	NUM
cet-15726	60	50	;	;	PUNCT
cet-15726	60	51	kalafatis	kalafatis	PROPN
cet-15726	60	52	et	et	PROPN
cet-15726	60	53	al	al	PROPN
cet-15726	60	54	.	.	PROPN
cet-15726	60	55	,	,	PUNCT
cet-15726	60	56	2024	2024	NUM
cet-15726	60	57	)	)	PUNCT
cet-15726	60	58	.	.	PUNCT
cet-15726	61	1	3	3	X
cet-15726	61	2	.	.	X
cet-15726	61	3	types	type	NOUN
cet-15726	61	4	of	of	ADP
cet-15726	61	5	deposition	deposition	NOUN
cet-15726	61	6	:	:	PUNCT
cet-15726	61	7	static	static	ADJ
cet-15726	61	8	or	or	CCONJ
cet-15726	61	9	dynamic	dynamic	ADJ
cet-15726	61	10	the	the	DET
cet-15726	61	11	formation	formation	NOUN
cet-15726	61	12	of	of	ADP
cet-15726	61	13	a	a	DET
cet-15726	61	14	film	film	NOUN
cet-15726	61	15	by	by	ADP
cet-15726	61	16	centrifugation	centrifugation	NOUN
cet-15726	61	17	begins	begin	VERB
cet-15726	61	18	with	with	ADP
cet-15726	61	19	the	the	DET
cet-15726	61	20	deposition	deposition	NOUN
cet-15726	61	21	phase	phase	NOUN
cet-15726	61	22	,	,	PUNCT
cet-15726	61	23	which	which	PRON
cet-15726	61	24	can	can	AUX
cet-15726	61	25	take	take	VERB
cet-15726	61	26	place	place	NOUN
cet-15726	61	27	in	in	ADP
cet-15726	61	28	two	two	NUM
cet-15726	61	29	different	different	ADJ
cet-15726	61	30	ways	way	NOUN
cet-15726	61	31	.	.	PUNCT
cet-15726	62	1	in	in	ADP
cet-15726	62	2	static	static	ADJ
cet-15726	62	3	deposition	deposition	NOUN
cet-15726	62	4	,	,	PUNCT
cet-15726	62	5	the	the	DET
cet-15726	62	6	material	material	NOUN
cet-15726	62	7	is	be	AUX
cet-15726	62	8	deposited	deposit	VERB
cet-15726	62	9	in	in	ADP
cet-15726	62	10	the	the	DET
cet-15726	62	11	centre	centre	NOUN
cet-15726	62	12	of	of	ADP
cet-15726	62	13	the	the	DET
cet-15726	62	14	substrate	substrate	NOUN
cet-15726	62	15	while	while	SCONJ
cet-15726	62	16	it	it	PRON
cet-15726	62	17	is	be	AUX
cet-15726	62	18	stationary	stationary	ADJ
cet-15726	62	19	,	,	PUNCT
cet-15726	62	20	and	and	CCONJ
cet-15726	62	21	after	after	ADP
cet-15726	62	22	a	a	DET
cet-15726	62	23	few	few	ADJ
cet-15726	62	24	moments	moment	NOUN
cet-15726	62	25	,	,	PUNCT
cet-15726	62	26	rotation	rotation	NOUN
cet-15726	62	27	is	be	AUX
cet-15726	62	28	activated	activate	VERB
cet-15726	62	29	(	(	PUNCT
cet-15726	62	30	tyona	tyona	NOUN
cet-15726	62	31	,	,	PUNCT
cet-15726	62	32	2013	2013	NUM
cet-15726	62	33	;	;	PUNCT
cet-15726	62	34	kalafatis	kalafatis	PROPN
cet-15726	62	35	et	et	PROPN
cet-15726	62	36	al	al	PROPN
cet-15726	62	37	.	.	PROPN
cet-15726	62	38	,	,	PUNCT
cet-15726	62	39	2024	2024	NUM
cet-15726	62	40	)	)	PUNCT
cet-15726	62	41	.	.	PUNCT
cet-15726	63	1	in	in	ADP
cet-15726	63	2	dynamic	dynamic	ADJ
cet-15726	63	3	coating	coating	NOUN
cet-15726	63	4	,	,	PUNCT
cet-15726	63	5	the	the	DET
cet-15726	63	6	material	material	NOUN
cet-15726	63	7	is	be	AUX
cet-15726	63	8	applied	apply	VERB
cet-15726	63	9	while	while	SCONJ
cet-15726	63	10	the	the	DET
cet-15726	63	11	substrate	substrate	NOUN
cet-15726	63	12	rotates	rotate	VERB
cet-15726	63	13	at	at	ADP
cet-15726	63	14	a	a	DET
cet-15726	63	15	low	low	ADJ
cet-15726	63	16	speed	speed	NOUN
cet-15726	63	17	,	,	PUNCT
cet-15726	63	18	which	which	PRON
cet-15726	63	19	reduces	reduce	VERB
cet-15726	63	20	the	the	DET
cet-15726	63	21	influence	influence	NOUN
cet-15726	63	22	of	of	ADP
cet-15726	63	23	initial	initial	ADJ
cet-15726	63	24	acceleration	acceleration	NOUN
cet-15726	63	25	.	.	PUNCT
cet-15726	64	1	after	after	ADP
cet-15726	64	2	application	application	NOUN
cet-15726	64	3	,	,	PUNCT
cet-15726	64	4	the	the	DET
cet-15726	64	5	rotation	rotation	NOUN
cet-15726	64	6	speed	speed	NOUN
cet-15726	64	7	can	can	AUX
cet-15726	64	8	be	be	AUX
cet-15726	64	9	increased	increase	VERB
cet-15726	64	10	,	,	PUNCT
cet-15726	64	11	but	but	CCONJ
cet-15726	64	12	care	care	NOUN
cet-15726	64	13	must	must	AUX
cet-15726	64	14	be	be	AUX
cet-15726	64	15	taken	take	VERB
cet-15726	64	16	to	to	PART
cet-15726	64	17	prevent	prevent	VERB
cet-15726	64	18	the	the	DET
cet-15726	64	19	solution	solution	NOUN
cet-15726	64	20	from	from	ADP
cet-15726	64	21	being	be	AUX
cet-15726	64	22	thrown	throw	VERB
cet-15726	64	23	off	off	ADP
cet-15726	64	24	by	by	ADP
cet-15726	64	25	centrifugal	centrifugal	ADJ
cet-15726	64	26	force	force	NOUN
cet-15726	64	27	.	.	PUNCT
cet-15726	65	1	regardless	regardless	ADV
cet-15726	65	2	of	of	ADP
cet-15726	65	3	the	the	DET
cet-15726	65	4	technique	technique	NOUN
cet-15726	65	5	,	,	PUNCT
cet-15726	65	6	it	it	PRON
cet-15726	65	7	is	be	AUX
cet-15726	65	8	essential	essential	ADJ
cet-15726	65	9	that	that	SCONJ
cet-15726	65	10	both	both	CCONJ
cet-15726	65	11	the	the	DET
cet-15726	65	12	rotor	rotor	NOUN
cet-15726	65	13	and	and	CCONJ
cet-15726	65	14	the	the	DET
cet-15726	65	15	base	base	NOUN
cet-15726	65	16	are	be	AUX
cet-15726	65	17	completely	completely	ADV
cet-15726	65	18	flat	flat	ADJ
cet-15726	65	19	,	,	PUNCT
cet-15726	65	20	as	as	SCONJ
cet-15726	65	21	any	any	DET
cet-15726	65	22	tilt	tilt	NOUN
cet-15726	65	23	may	may	AUX
cet-15726	65	24	compromise	compromise	VERB
cet-15726	65	25	the	the	DET
cet-15726	65	26	film	film	NOUN
cet-15726	65	27	's	's	PART
cet-15726	65	28	uniformity	uniformity	NOUN
cet-15726	65	29	(	(	PUNCT
cet-15726	65	30	yada	yada	NOUN
cet-15726	65	31	,	,	PUNCT
cet-15726	65	32	1995	1995	NUM
cet-15726	65	33	;	;	PUNCT
cet-15726	65	34	kalafatis	kalafatis	PROPN
cet-15726	65	35	et	et	PROPN
cet-15726	65	36	al	al	PROPN
cet-15726	65	37	.	.	PROPN
cet-15726	65	38	,	,	PUNCT
cet-15726	65	39	2024	2024	NUM
cet-15726	65	40	)	)	PUNCT
cet-15726	65	41	.	.	PUNCT
cet-15726	66	1	the	the	DET
cet-15726	66	2	choice	choice	NOUN
cet-15726	66	3	of	of	ADP
cet-15726	66	4	substrate	substrate	NOUN
cet-15726	66	5	must	must	AUX
cet-15726	66	6	be	be	AUX
cet-15726	66	7	made	make	VERB
cet-15726	66	8	carefully	carefully	ADV
cet-15726	66	9	and	and	CCONJ
cet-15726	66	10	adapted	adapt	VERB
cet-15726	66	11	to	to	ADP
cet-15726	66	12	the	the	DET
cet-15726	66	13	desired	desire	VERB
cet-15726	66	14	application	application	NOUN
cet-15726	66	15	.	.	PUNCT
cet-15726	67	1	for	for	ADP
cet-15726	67	2	the	the	DET
cet-15726	67	3	solution	solution	NOUN
cet-15726	67	4	to	to	PART
cet-15726	67	5	spread	spread	VERB
cet-15726	67	6	well	well	ADV
cet-15726	67	7	,	,	PUNCT
cet-15726	67	8	the	the	DET
cet-15726	67	9	surface	surface	NOUN
cet-15726	67	10	energy	energy	NOUN
cet-15726	67	11	of	of	ADP
cet-15726	67	12	the	the	DET
cet-15726	67	13	substrate	substrate	NOUN
cet-15726	67	14	must	must	AUX
cet-15726	67	15	exceed	exceed	VERB
cet-15726	67	16	the	the	DET
cet-15726	67	17	surface	surface	NOUN
cet-15726	67	18	tension	tension	NOUN
cet-15726	67	19	of	of	ADP
cet-15726	67	20	the	the	DET
cet-15726	67	21	liquid	liquid	NOUN
cet-15726	67	22	.	.	PUNCT
cet-15726	68	1	in	in	ADP
cet-15726	68	2	addition	addition	NOUN
cet-15726	68	3	,	,	PUNCT
cet-15726	68	4	surfaces	surface	NOUN
cet-15726	68	5	with	with	ADP
cet-15726	68	6	rough	rough	ADJ
cet-15726	68	7	edges	edge	NOUN
cet-15726	68	8	can	can	AUX
cet-15726	68	9	impede	impede	VERB
cet-15726	68	10	the	the	DET
cet-15726	68	11	flow	flow	NOUN
cet-15726	68	12	of	of	ADP
cet-15726	68	13	the	the	DET
cet-15726	68	14	solution	solution	NOUN
cet-15726	68	15	and	and	CCONJ
cet-15726	68	16	promote	promote	VERB
cet-15726	68	17	the	the	DET
cet-15726	68	18	accumulation	accumulation	NOUN
cet-15726	68	19	of	of	ADP
cet-15726	68	20	material	material	NOUN
cet-15726	68	21	in	in	ADP
cet-15726	68	22	these	these	DET
cet-15726	68	23	areas	area	NOUN
cet-15726	68	24	(	(	PUNCT
cet-15726	68	25	yada	yada	NOUN
cet-15726	68	26	,	,	PUNCT
cet-15726	68	27	1995	1995	NUM
cet-15726	68	28	;	;	PUNCT
cet-15726	68	29	vorotilov	vorotilov	PROPN
cet-15726	68	30	,	,	PUNCT
cet-15726	68	31	1995	1995	NUM
cet-15726	68	32	;	;	PUNCT
cet-15726	68	33	tyona	tyona	NOUN
cet-15726	68	34	,	,	PUNCT
cet-15726	68	35	2013	2013	NUM
cet-15726	68	36	;	;	PUNCT
cet-15726	68	37	mouhamad	mouhamad	NOUN
cet-15726	68	38	et	et	PROPN
cet-15726	68	39	al	al	PROPN
cet-15726	68	40	.	.	PROPN
cet-15726	68	41	,	,	PUNCT
cet-15726	68	42	2014	2014	NUM
cet-15726	68	43	;	;	PUNCT
cet-15726	68	44	chou	chou	PROPN
cet-15726	68	45	et	et	PROPN
cet-15726	68	46	al	al	PROPN
cet-15726	68	47	.	.	PROPN
cet-15726	68	48	,	,	PUNCT
cet-15726	68	49	2021	2021	NUM
cet-15726	68	50	)	)	PUNCT
cet-15726	68	51	the	the	DET
cet-15726	68	52	choice	choice	NOUN
cet-15726	68	53	between	between	ADP
cet-15726	68	54	static	static	ADJ
cet-15726	68	55	or	or	CCONJ
cet-15726	68	56	dynamic	dynamic	ADJ
cet-15726	68	57	deposition	deposition	NOUN
cet-15726	68	58	depends	depend	VERB
cet-15726	68	59	on	on	ADP
cet-15726	68	60	the	the	DET
cet-15726	68	61	properties	property	NOUN
cet-15726	68	62	of	of	ADP
cet-15726	68	63	the	the	DET
cet-15726	68	64	system	system	NOUN
cet-15726	68	65	under	under	ADP
cet-15726	68	66	investigation	investigation	NOUN
cet-15726	68	67	.	.	PUNCT
cet-15726	69	1	dynamic	dynamic	ADJ
cet-15726	69	2	deposition	deposition	NOUN
cet-15726	69	3	is	be	AUX
cet-15726	69	4	generally	generally	ADV
cet-15726	69	5	preferred	prefer	VERB
cet-15726	69	6	for	for	ADP
cet-15726	69	7	films	film	NOUN
cet-15726	69	8	that	that	PRON
cet-15726	69	9	are	be	AUX
cet-15726	69	10	produced	produce	VERB
cet-15726	69	11	at	at	ADP
cet-15726	69	12	a	a	DET
cet-15726	69	13	speed	speed	NOUN
cet-15726	69	14	of	of	ADP
cet-15726	69	15	more	more	ADJ
cet-15726	69	16	than	than	ADP
cet-15726	69	17	1,000	1,000	NUM
cet-15726	69	18	rpm	rpm	NOUN
cet-15726	69	19	.	.	PUNCT
cet-15726	70	1	in	in	ADP
cet-15726	70	2	this	this	DET
cet-15726	70	3	context	context	NOUN
cet-15726	70	4	,	,	PUNCT
cet-15726	70	5	a	a	DET
cet-15726	70	6	pipette	pipette	NOUN
cet-15726	70	7	can	can	AUX
cet-15726	70	8	be	be	AUX
cet-15726	70	9	used	use	VERB
cet-15726	70	10	to	to	PART
cet-15726	70	11	apply	apply	VERB
cet-15726	70	12	the	the	DET
cet-15726	70	13	material	material	NOUN
cet-15726	70	14	quickly	quickly	ADV
cet-15726	70	15	and	and	CCONJ
cet-15726	70	16	precisely	precisely	ADV
cet-15726	70	17	.	.	PUNCT
cet-15726	71	1	the	the	DET
cet-15726	71	2	amount	amount	NOUN
cet-15726	71	3	of	of	ADP
cet-15726	71	4	solution	solution	NOUN
cet-15726	71	5	required	require	VERB
cet-15726	71	6	depends	depend	VERB
cet-15726	71	7	on	on	ADP
cet-15726	71	8	the	the	DET
cet-15726	71	9	size	size	NOUN
cet-15726	71	10	of	of	ADP
cet-15726	71	11	the	the	DET
cet-15726	71	12	substrate	substrate	NOUN
cet-15726	71	13	,	,	PUNCT
cet-15726	71	14	the	the	DET
cet-15726	71	15	concentration	concentration	NOUN
cet-15726	71	16	,	,	PUNCT
cet-15726	71	17	and	and	CCONJ
cet-15726	71	18	the	the	DET
cet-15726	71	19	viscosity	viscosity	NOUN
cet-15726	71	20	of	of	ADP
cet-15726	71	21	the	the	DET
cet-15726	71	22	material	material	NOUN
cet-15726	71	23	(	(	PUNCT
cet-15726	71	24	chou	chou	PROPN
cet-15726	71	25	et	et	PROPN
cet-15726	71	26	al	al	PROPN
cet-15726	71	27	.	.	PROPN
cet-15726	71	28	,	,	PUNCT
cet-15726	71	29	2021	2021	NUM
cet-15726	71	30	)	)	PUNCT
cet-15726	71	31	.	.	PUNCT
cet-15726	72	1	some	some	DET
cet-15726	72	2	precautions	precaution	NOUN
cet-15726	72	3	should	should	AUX
cet-15726	72	4	be	be	AUX
cet-15726	72	5	taken	take	VERB
cet-15726	72	6	during	during	ADP
cet-15726	72	7	dynamic	dynamic	ADJ
cet-15726	72	8	deposition	deposition	NOUN
cet-15726	72	9	.	.	PUNCT
cet-15726	73	1	the	the	DET
cet-15726	73	2	material	material	NOUN
cet-15726	73	3	should	should	AUX
cet-15726	73	4	preferably	preferably	ADV
cet-15726	73	5	be	be	AUX
cet-15726	73	6	applied	apply	VERB
cet-15726	73	7	in	in	ADP
cet-15726	73	8	the	the	DET
cet-15726	73	9	middle	middle	NOUN
cet-15726	73	10	of	of	ADP
cet-15726	73	11	the	the	DET
cet-15726	73	12	substrate	substrate	NOUN
cet-15726	73	13	to	to	PART
cet-15726	73	14	minimize	minimize	VERB
cet-15726	73	15	irregularities	irregularity	NOUN
cet-15726	73	16	in	in	ADP
cet-15726	73	17	the	the	DET
cet-15726	73	18	film	film	NOUN
cet-15726	73	19	.	.	PUNCT
cet-15726	74	1	in	in	ADP
cet-15726	74	2	addition	addition	NOUN
cet-15726	74	3	,	,	PUNCT
cet-15726	74	4	the	the	DET
cet-15726	74	5	application	application	NOUN
cet-15726	74	6	should	should	AUX
cet-15726	74	7	be	be	AUX
cet-15726	74	8	done	do	VERB
cet-15726	74	9	in	in	ADP
cet-15726	74	10	a	a	DET
cet-15726	74	11	single	single	ADJ
cet-15726	74	12	motion	motion	NOUN
cet-15726	74	13	,	,	PUNCT
cet-15726	74	14	quickly	quickly	ADV
cet-15726	74	15	and	and	CCONJ
cet-15726	74	16	evenly	evenly	ADV
cet-15726	74	17	,	,	PUNCT
cet-15726	74	18	to	to	PART
cet-15726	74	19	avoid	avoid	VERB
cet-15726	74	20	the	the	DET
cet-15726	74	21	formation	formation	NOUN
cet-15726	74	22	of	of	ADP
cet-15726	74	23	multiple	multiple	ADJ
cet-15726	74	24	layers	layer	NOUN
cet-15726	74	25	.	.	PUNCT
cet-15726	75	1	it	it	PRON
cet-15726	75	2	is	be	AUX
cet-15726	75	3	also	also	ADV
cet-15726	75	4	important	important	ADJ
cet-15726	75	5	that	that	SCONJ
cet-15726	75	6	the	the	DET
cet-15726	75	7	dispenser	dispenser	NOUN
cet-15726	75	8	does	do	AUX
cet-15726	75	9	not	not	PART
cet-15726	75	10	directly	directly	ADV
cet-15726	75	11	touch	touch	VERB
cet-15726	75	12	the	the	DET
cet-15726	75	13	surface	surface	NOUN
cet-15726	75	14	of	of	ADP
cet-15726	75	15	the	the	DET
cet-15726	75	16	substrate	substrate	NOUN
cet-15726	75	17	,	,	PUNCT
cet-15726	75	18	to	to	PART
cet-15726	75	19	avoid	avoid	VERB
cet-15726	75	20	irregularities	irregularity	NOUN
cet-15726	75	21	(	(	PUNCT
cet-15726	75	22	chou	chou	PROPN
cet-15726	75	23	et	et	PROPN
cet-15726	75	24	al	al	PROPN
cet-15726	75	25	.	.	PROPN
cet-15726	75	26	,	,	PUNCT
cet-15726	75	27	2021	2021	NUM
cet-15726	75	28	;	;	PUNCT
cet-15726	75	29	kalafatis	kalafatis	PROPN
cet-15726	75	30	et	et	PROPN
cet-15726	75	31	al	al	PROPN
cet-15726	75	32	.	.	PROPN
cet-15726	75	33	,	,	PUNCT
cet-15726	75	34	2024	2024	NUM
cet-15726	75	35	)	)	PUNCT
cet-15726	75	36	.	.	PUNCT
cet-15726	76	1	for	for	ADP
cet-15726	76	2	efficient	efficient	ADJ
cet-15726	76	3	dynamic	dynamic	ADJ
cet-15726	76	4	application	application	NOUN
cet-15726	76	5	,	,	PUNCT
cet-15726	76	6	the	the	DET
cet-15726	76	7	substrate	substrate	NOUN
cet-15726	76	8	rotation	rotation	NOUN
cet-15726	76	9	must	must	AUX
cet-15726	76	10	reach	reach	VERB
cet-15726	76	11	high	high	ADJ
cet-15726	76	12	values	value	NOUN
cet-15726	76	13	,	,	PUNCT
cet-15726	76	14	or	or	CCONJ
cet-15726	76	15	the	the	DET
cet-15726	76	16	amount	amount	NOUN
cet-15726	76	17	of	of	ADP
cet-15726	76	18	material	material	NOUN
cet-15726	76	19	must	must	AUX
cet-15726	76	20	be	be	AUX
cet-15726	76	21	sufficient	sufficient	ADJ
cet-15726	76	22	to	to	PART
cet-15726	76	23	ensure	ensure	VERB
cet-15726	76	24	complete	complete	ADJ
cet-15726	76	25	coverage	coverage	NOUN
cet-15726	76	26	.	.	PUNCT
cet-15726	77	1	in	in	ADP
cet-15726	77	2	some	some	DET
cet-15726	77	3	cases	case	NOUN
cet-15726	77	4	,	,	PUNCT
cet-15726	77	5	the	the	DET
cet-15726	77	6	viscosity	viscosity	NOUN
cet-15726	77	7	and	and	CCONJ
cet-15726	77	8	concentration	concentration	NOUN
cet-15726	77	9	of	of	ADP
cet-15726	77	10	the	the	DET
cet-15726	77	11	solution	solution	NOUN
cet-15726	77	12	must	must	AUX
cet-15726	77	13	be	be	AUX
cet-15726	77	14	adjusted	adjust	VERB
cet-15726	77	15	to	to	PART
cet-15726	77	16	obtain	obtain	VERB
cet-15726	77	17	a	a	DET
cet-15726	77	18	homogeneous	homogeneous	ADJ
cet-15726	77	19	film	film	NOUN
cet-15726	77	20	at	at	ADP
cet-15726	77	21	high	high	ADJ
cet-15726	77	22	speeds	speed	NOUN
cet-15726	77	23	(	(	PUNCT
cet-15726	77	24	mouhamad	mouhamad	NOUN
cet-15726	77	25	et	et	PROPN
cet-15726	77	26	al	al	PROPN
cet-15726	77	27	.	.	PROPN
cet-15726	77	28	,	,	PUNCT
cet-15726	77	29	2014	2014	NUM
cet-15726	77	30	,	,	PUNCT
cet-15726	77	31	kalafatis	kalafatis	NOUN
cet-15726	77	32	et	et	PROPN
cet-15726	77	33	al	al	PROPN
cet-15726	77	34	.	.	PROPN
cet-15726	77	35	,	,	PUNCT
cet-15726	77	36	2024	2024	NUM
cet-15726	77	37	)	)	PUNCT
cet-15726	77	38	.	.	PUNCT
cet-15726	78	1	for	for	ADP
cet-15726	78	2	static	static	ADJ
cet-15726	78	3	coating	coating	NOUN
cet-15726	78	4	,	,	PUNCT
cet-15726	78	5	to	to	PART
cet-15726	78	6	ensure	ensure	VERB
cet-15726	78	7	uniformity	uniformity	NOUN
cet-15726	78	8	,	,	PUNCT
cet-15726	78	9	it	it	PRON
cet-15726	78	10	is	be	AUX
cet-15726	78	11	recommended	recommend	VERB
cet-15726	78	12	to	to	PART
cet-15726	78	13	cover	cover	VERB
cet-15726	78	14	the	the	DET
cet-15726	78	15	entire	entire	ADJ
cet-15726	78	16	substrate	substrate	NOUN
cet-15726	78	17	with	with	ADP
cet-15726	78	18	the	the	DET
cet-15726	78	19	material	material	NOUN
cet-15726	78	20	before	before	ADP
cet-15726	78	21	rotation	rotation	NOUN
cet-15726	78	22	,	,	PUNCT
cet-15726	78	23	although	although	SCONJ
cet-15726	78	24	this	this	PRON
cet-15726	78	25	is	be	AUX
cet-15726	78	26	not	not	PART
cet-15726	78	27	an	an	DET
cet-15726	78	28	absolute	absolute	ADJ
cet-15726	78	29	requirement	requirement	NOUN
cet-15726	78	30	if	if	SCONJ
cet-15726	78	31	the	the	DET
cet-15726	78	32	solution	solution	NOUN
cet-15726	78	33	does	do	AUX
cet-15726	78	34	not	not	PART
cet-15726	78	35	spread	spread	VERB
cet-15726	78	36	naturally	naturally	ADV
cet-15726	78	37	,	,	PUNCT
cet-15726	78	38	more	more	ADJ
cet-15726	78	39	material	material	NOUN
cet-15726	78	40	can	can	AUX
cet-15726	78	41	be	be	AUX
cet-15726	78	42	added	add	VERB
cet-15726	78	43	or	or	CCONJ
cet-15726	78	44	manually	manually	ADV
cet-15726	78	45	redistributed	redistribute	VERB
cet-15726	78	46	with	with	ADP
cet-15726	78	47	a	a	DET
cet-15726	78	48	blade	blade	NOUN
cet-15726	78	49	before	before	ADP
cet-15726	78	50	continuing	continue	VERB
cet-15726	78	51	the	the	DET
cet-15726	78	52	process	process	NOUN
cet-15726	78	53	(	(	PUNCT
cet-15726	78	54	vorotilov	vorotilov	INTJ
cet-15726	78	55	,	,	PUNCT
cet-15726	78	56	1995	1995	NUM
cet-15726	78	57	;	;	PUNCT
cet-15726	79	1	chou	chou	PROPN
cet-15726	79	2	et	et	PROPN
cet-15726	79	3	al	al	PROPN
cet-15726	79	4	.	.	PROPN
cet-15726	79	5	,	,	PUNCT
cet-15726	79	6	2021	2021	NUM
cet-15726	79	7	;	;	PUNCT
cet-15726	79	8	mouhamad	mouhamad	NOUN
cet-15726	79	9	et	et	PROPN
cet-15726	79	10	al	al	PROPN
cet-15726	79	11	.	.	PROPN
cet-15726	79	12	,	,	PUNCT
cet-15726	79	13	2014	2014	NUM
cet-15726	79	14	,	,	PUNCT
cet-15726	79	15	kalafatis	kalafatis	NOUN
cet-15726	79	16	et	et	PROPN
cet-15726	79	17	al	al	PROPN
cet-15726	79	18	.	.	PROPN
cet-15726	79	19	,	,	PUNCT
cet-15726	79	20	2024	2024	NUM
cet-15726	79	21	)	)	PUNCT
cet-15726	79	22	.	.	PUNCT
cet-15726	80	1	both	both	DET
cet-15726	80	2	static	static	ADJ
cet-15726	80	3	and	and	CCONJ
cet-15726	80	4	dynamic	dynamic	ADJ
cet-15726	80	5	techniques	technique	NOUN
cet-15726	80	6	can	can	AUX
cet-15726	80	7	be	be	AUX
cet-15726	80	8	performed	perform	VERB
cet-15726	80	9	automatically	automatically	ADV
cet-15726	80	10	with	with	ADP
cet-15726	80	11	a	a	DET
cet-15726	80	12	programmable	programmable	ADJ
cet-15726	80	13	dispenser	dispenser	NOUN
cet-15726	80	14	.	.	PUNCT
cet-15726	81	1	automation	automation	NOUN
cet-15726	81	2	is	be	AUX
cet-15726	81	3	particularly	particularly	ADV
cet-15726	81	4	useful	useful	ADJ
cet-15726	81	5	when	when	SCONJ
cet-15726	81	6	the	the	DET
cet-15726	81	7	coating	coating	NOUN
cet-15726	81	8	needs	need	VERB
cet-15726	81	9	to	to	PART
cet-15726	81	10	be	be	AUX
cet-15726	81	11	applied	apply	VERB
cet-15726	81	12	at	at	ADP
cet-15726	81	13	a	a	DET
cet-15726	81	14	specific	specific	ADJ
cet-15726	81	15	time	time	NOUN
cet-15726	81	16	or	or	CCONJ
cet-15726	81	17	at	at	ADP
cet-15726	81	18	a	a	DET
cet-15726	81	19	specific	specific	ADJ
cet-15726	81	20	application	application	NOUN
cet-15726	81	21	rate	rate	NOUN
cet-15726	81	22	,	,	PUNCT
cet-15726	81	23	as	as	SCONJ
cet-15726	81	24	it	it	PRON
cet-15726	81	25	ensures	ensure	VERB
cet-15726	81	26	greater	great	ADJ
cet-15726	81	27	accuracy	accuracy	NOUN
cet-15726	81	28	and	and	CCONJ
cet-15726	81	29	reproducibility	reproducibility	NOUN
cet-15726	81	30	compared	compare	VERB
cet-15726	81	31	to	to	ADP
cet-15726	81	32	manual	manual	ADJ
cet-15726	81	33	application	application	NOUN
cet-15726	81	34	.	.	PUNCT
cet-15726	82	1	during	during	ADP
cet-15726	82	2	the	the	DET
cet-15726	82	3	acceleration	acceleration	NOUN
cet-15726	82	4	phase	phase	NOUN
cet-15726	82	5	,	,	PUNCT
cet-15726	82	6	the	the	DET
cet-15726	82	7	substrate	substrate	NOUN
cet-15726	82	8	becomes	becomes	AUX
cet-15726	82	9	fully	fully	ADV
cet-15726	82	10	covered	cover	VERB
cet-15726	82	11	with	with	ADP
cet-15726	82	12	the	the	DET
cet-15726	82	13	applied	apply	VERB
cet-15726	82	14	material	material	NOUN
cet-15726	82	15	,	,	PUNCT
cet-15726	82	16	while	while	SCONJ
cet-15726	82	17	the	the	DET
cet-15726	82	18	spinning	spinning	NOUN
cet-15726	82	19	motion	motion	NOUN
cet-15726	82	20	drives	drive	VERB
cet-15726	82	21	excess	excess	ADJ
cet-15726	82	22	liquid	liquid	NOUN
cet-15726	82	23	toward	toward	ADP
cet-15726	82	24	the	the	DET
cet-15726	82	25	edges	edge	NOUN
cet-15726	82	26	.	.	PUNCT
cet-15726	83	1	this	this	PRON
cet-15726	83	2	promotes	promote	VERB
cet-15726	83	3	uniform	uniform	ADJ
cet-15726	83	4	film	film	NOUN
cet-15726	83	5	formation	formation	NOUN
cet-15726	83	6	.	.	PUNCT
cet-15726	84	1	an	an	DET
cet-15726	84	2	ideal	ideal	ADJ
cet-15726	84	3	balance	balance	NOUN
cet-15726	84	4	between	between	ADP
cet-15726	84	5	rotation	rotation	NOUN
cet-15726	84	6	speed	speed	NOUN
cet-15726	84	7	and	and	CCONJ
cet-15726	84	8	material	material	NOUN
cet-15726	84	9	concentration	concentration	NOUN
cet-15726	84	10	ensures	ensure	VERB
cet-15726	84	11	that	that	SCONJ
cet-15726	84	12	viscosity	viscosity	NOUN
cet-15726	84	13	does	do	AUX
cet-15726	84	14	not	not	PART
cet-15726	84	15	hinder	hinder	VERB
cet-15726	84	16	proper	proper	ADJ
cet-15726	84	17	flow	flow	NOUN
cet-15726	84	18	over	over	ADP
cet-15726	84	19	the	the	DET
cet-15726	84	20	substrate	substrate	NOUN
cet-15726	84	21	.	.	PUNCT
cet-15726	85	1	however	however	ADV
cet-15726	85	2	,	,	PUNCT
cet-15726	85	3	this	this	DET
cet-15726	85	4	balance	balance	NOUN
cet-15726	85	5	can	can	AUX
cet-15726	85	6	not	not	PART
cet-15726	85	7	be	be	AUX
cet-15726	85	8	defined	define	VERB
cet-15726	85	9	by	by	ADP
cet-15726	85	10	a	a	DET
cet-15726	85	11	fixed	fix	VERB
cet-15726	85	12	rule	rule	NOUN
cet-15726	85	13	,	,	PUNCT
cet-15726	85	14	as	as	SCONJ
cet-15726	85	15	film	film	NOUN
cet-15726	85	16	formation	formation	NOUN
cet-15726	85	17	depends	depend	VERB
cet-15726	85	18	on	on	ADP
cet-15726	85	19	multiple	multiple	ADJ
cet-15726	85	20	factors	factor	NOUN
cet-15726	85	21	,	,	PUNCT
cet-15726	85	22	including	include	VERB
cet-15726	85	23	material	material	NOUN
cet-15726	85	24	–	–	PUNCT
cet-15726	85	25	substrate	substrate	NOUN
cet-15726	85	26	interaction	interaction	NOUN
cet-15726	85	27	,	,	PUNCT
cet-15726	85	28	solvent	solvent	ADJ
cet-15726	85	29	volatility	volatility	NOUN
cet-15726	85	30	,	,	PUNCT
cet-15726	85	31	acceleration	acceleration	NOUN
cet-15726	85	32	,	,	PUNCT
cet-15726	85	33	rotation	rotation	NOUN
cet-15726	85	34	,	,	PUNCT
cet-15726	85	35	airflow	airflow	NOUN
cet-15726	85	36	,	,	PUNCT
cet-15726	85	37	and	and	CCONJ
cet-15726	85	38	ambient	ambient	ADJ
cet-15726	85	39	conditions	condition	NOUN
cet-15726	85	40	like	like	ADP
cet-15726	85	41	humidity	humidity	NOUN
cet-15726	85	42	.	.	PUNCT
cet-15726	86	1	thus	thus	ADV
cet-15726	86	2	,	,	PUNCT
cet-15726	86	3	experimental	experimental	ADJ
cet-15726	86	4	adjustments	adjustment	NOUN
cet-15726	86	5	are	be	AUX
cet-15726	86	6	usually	usually	ADV
cet-15726	86	7	required	require	VERB
cet-15726	86	8	to	to	PART
cet-15726	86	9	determine	determine	VERB
cet-15726	86	10	optimal	optimal	ADJ
cet-15726	86	11	parameters	parameter	NOUN
cet-15726	86	12	.	.	PUNCT
cet-15726	87	1	the	the	DET
cet-15726	87	2	final	final	ADJ
cet-15726	87	3	rotation	rotation	NOUN
cet-15726	87	4	speed	speed	NOUN
cet-15726	87	5	of	of	ADP
cet-15726	87	6	the	the	DET
cet-15726	87	7	substrate	substrate	NOUN
cet-15726	87	8	usually	usually	ADV
cet-15726	87	9	varies	vary	VERB
cet-15726	87	10	between	between	ADP
cet-15726	87	11	1,000	1,000	NUM
cet-15726	87	12	and	and	CCONJ
cet-15726	87	13	6,000	6,000	NUM
cet-15726	87	14	revolutions	revolution	NOUN
cet-15726	87	15	per	per	ADP
cet-15726	87	16	minute	minute	NOUN
cet-15726	87	17	,	,	PUNCT
cet-15726	87	18	depending	depend	VERB
cet-15726	87	19	on	on	ADP
cet-15726	87	20	the	the	DET
cet-15726	87	21	properties	property	NOUN
cet-15726	87	22	of	of	ADP
cet-15726	87	23	the	the	DET
cet-15726	87	24	material	material	NOUN
cet-15726	87	25	and	and	CCONJ
cet-15726	87	26	the	the	DET
cet-15726	87	27	substrate	substrate	NOUN
cet-15726	87	28	used	use	VERB
cet-15726	87	29	.	.	PUNCT
cet-15726	88	1	the	the	DET
cet-15726	88	2	time	time	NOUN
cet-15726	88	3	required	require	VERB
cet-15726	88	4	for	for	ADP
cet-15726	88	5	this	this	DET
cet-15726	88	6	step	step	NOUN
cet-15726	88	7	can	can	AUX
cet-15726	88	8	vary	vary	VERB
cet-15726	88	9	603	603	NUM
cet-15726	88	10	from	from	ADP
cet-15726	88	11	seconds	second	NOUN
cet-15726	88	12	to	to	ADP
cet-15726	88	13	several	several	ADJ
cet-15726	88	14	minutes	minute	NOUN
cet-15726	88	15	and	and	CCONJ
cet-15726	88	16	is	be	AUX
cet-15726	88	17	mainly	mainly	ADV
cet-15726	88	18	influenced	influence	VERB
cet-15726	88	19	by	by	ADP
cet-15726	88	20	the	the	DET
cet-15726	88	21	volatility	volatility	NOUN
cet-15726	88	22	of	of	ADP
cet-15726	88	23	the	the	DET
cet-15726	88	24	solvent	solvent	NOUN
cet-15726	88	25	.	.	PUNCT
cet-15726	89	1	this	this	DET
cet-15726	89	2	time	time	NOUN
cet-15726	89	3	should	should	AUX
cet-15726	89	4	be	be	AUX
cet-15726	89	5	long	long	ADV
cet-15726	89	6	enough	enough	ADV
cet-15726	89	7	to	to	PART
cet-15726	89	8	ensure	ensure	VERB
cet-15726	89	9	pre	pre	ADJ
cet-15726	89	10	-	-	ADJ
cet-15726	89	11	drying	dry	VERB
cet-15726	89	12	of	of	ADP
cet-15726	89	13	the	the	DET
cet-15726	89	14	film	film	NOUN
cet-15726	89	15	and	and	CCONJ
cet-15726	89	16	homogeneous	homogeneous	ADJ
cet-15726	89	17	distribution	distribution	NOUN
cet-15726	89	18	of	of	ADP
cet-15726	89	19	the	the	DET
cet-15726	89	20	material	material	NOUN
cet-15726	89	21	during	during	ADP
cet-15726	89	22	rotation	rotation	NOUN
cet-15726	89	23	.	.	PUNCT
cet-15726	90	1	in	in	ADP
cet-15726	90	2	many	many	ADJ
cet-15726	90	3	cases	case	NOUN
cet-15726	90	4	,	,	PUNCT
cet-15726	90	5	the	the	DET
cet-15726	90	6	solvent	solvent	NOUN
cet-15726	90	7	evaporates	evaporate	VERB
cet-15726	90	8	completely	completely	ADV
cet-15726	90	9	during	during	ADP
cet-15726	90	10	the	the	DET
cet-15726	90	11	deposition	deposition	NOUN
cet-15726	90	12	of	of	ADP
cet-15726	90	13	the	the	DET
cet-15726	90	14	thin	thin	ADJ
cet-15726	90	15	film	film	NOUN
cet-15726	90	16	.	.	PUNCT
cet-15726	91	1	however	however	ADV
cet-15726	91	2	,	,	PUNCT
cet-15726	91	3	if	if	SCONJ
cet-15726	91	4	low	low	ADJ
cet-15726	91	5	volatility	volatility	NOUN
cet-15726	91	6	solvents	solvent	NOUN
cet-15726	91	7	are	be	AUX
cet-15726	91	8	used	use	VERB
cet-15726	91	9	,	,	PUNCT
cet-15726	91	10	it	it	PRON
cet-15726	91	11	may	may	AUX
cet-15726	91	12	be	be	AUX
cet-15726	91	13	necessary	necessary	ADJ
cet-15726	91	14	to	to	PART
cet-15726	91	15	add	add	VERB
cet-15726	91	16	a	a	DET
cet-15726	91	17	final	final	ADJ
cet-15726	91	18	step	step	NOUN
cet-15726	91	19	to	to	PART
cet-15726	91	20	remove	remove	VERB
cet-15726	91	21	residues	residue	NOUN
cet-15726	91	22	.	.	PUNCT
cet-15726	92	1	this	this	PRON
cet-15726	92	2	can	can	AUX
cet-15726	92	3	be	be	AUX
cet-15726	92	4	done	do	VERB
cet-15726	92	5	by	by	ADP
cet-15726	92	6	heating	heat	VERB
cet-15726	92	7	the	the	DET
cet-15726	92	8	film	film	NOUN
cet-15726	92	9	in	in	ADP
cet-15726	92	10	an	an	DET
cet-15726	92	11	oven	oven	NOUN
cet-15726	92	12	,	,	PUNCT
cet-15726	92	13	exposing	expose	VERB
cet-15726	92	14	it	it	PRON
cet-15726	92	15	to	to	ADP
cet-15726	92	16	a	a	DET
cet-15726	92	17	reduced	reduce	VERB
cet-15726	92	18	pressure	pressure	NOUN
cet-15726	92	19	chamber	chamber	NOUN
cet-15726	92	20	or	or	CCONJ
cet-15726	92	21	applying	apply	VERB
cet-15726	92	22	a	a	DET
cet-15726	92	23	gas	gas	NOUN
cet-15726	92	24	flow	flow	NOUN
cet-15726	92	25	to	to	PART
cet-15726	92	26	assist	assist	VERB
cet-15726	92	27	in	in	ADP
cet-15726	92	28	the	the	DET
cet-15726	92	29	removal	removal	NOUN
cet-15726	92	30	of	of	ADP
cet-15726	92	31	the	the	DET
cet-15726	92	32	solvent	solvent	ADJ
cet-15726	92	33	residue	residue	NOUN
cet-15726	92	34	(	(	PUNCT
cet-15726	92	35	tyona	tyona	NOUN
cet-15726	92	36	,	,	PUNCT
cet-15726	92	37	2013	2013	NUM
cet-15726	92	38	;	;	PUNCT
cet-15726	92	39	mouhamad	mouhamad	NOUN
cet-15726	92	40	et	et	PROPN
cet-15726	92	41	al	al	PROPN
cet-15726	92	42	.	.	PROPN
cet-15726	92	43	,	,	PUNCT
cet-15726	92	44	2014	2014	NUM
cet-15726	92	45	;	;	PUNCT
cet-15726	92	46	chou	chou	PROPN
cet-15726	92	47	et	et	PROPN
cet-15726	92	48	al	al	PROPN
cet-15726	92	49	.	.	PROPN
cet-15726	92	50	,	,	PUNCT
cet-15726	92	51	2021	2021	NUM
cet-15726	92	52	;	;	PUNCT
cet-15726	92	53	kalafatis	kalafatis	PROPN
cet-15726	92	54	et	et	PROPN
cet-15726	92	55	al	al	PROPN
cet-15726	92	56	.	.	PROPN
cet-15726	92	57	,	,	PUNCT
cet-15726	92	58	2024	2024	NUM
cet-15726	92	59	)	)	PUNCT
cet-15726	92	60	.	.	PUNCT
cet-15726	93	1	4	4	X
cet-15726	93	2	.	.	X
cet-15726	93	3	mathematical	mathematical	ADJ
cet-15726	93	4	basis	basis	NOUN
cet-15726	93	5	the	the	DET
cet-15726	93	6	mathematical	mathematical	ADJ
cet-15726	93	7	modelling	modelling	NOUN
cet-15726	93	8	of	of	ADP
cet-15726	93	9	the	the	DET
cet-15726	93	10	spin	spin	NOUN
cet-15726	93	11	coating	coating	NOUN
cet-15726	93	12	process	process	NOUN
cet-15726	93	13	requires	require	VERB
cet-15726	93	14	the	the	DET
cet-15726	93	15	consideration	consideration	NOUN
cet-15726	93	16	of	of	ADP
cet-15726	93	17	several	several	ADJ
cet-15726	93	18	parameters	parameter	NOUN
cet-15726	93	19	that	that	PRON
cet-15726	93	20	influence	influence	VERB
cet-15726	93	21	the	the	DET
cet-15726	93	22	final	final	ADJ
cet-15726	93	23	thickness	thickness	NOUN
cet-15726	93	24	of	of	ADP
cet-15726	93	25	the	the	DET
cet-15726	93	26	deposited	deposit	VERB
cet-15726	93	27	film	film	NOUN
cet-15726	93	28	.	.	PUNCT
cet-15726	94	1	these	these	PRON
cet-15726	94	2	include	include	VERB
cet-15726	94	3	the	the	DET
cet-15726	94	4	viscosity	viscosity	NOUN
cet-15726	94	5	and	and	CCONJ
cet-15726	94	6	concentration	concentration	NOUN
cet-15726	94	7	of	of	ADP
cet-15726	94	8	the	the	DET
cet-15726	94	9	material	material	NOUN
cet-15726	94	10	,	,	PUNCT
cet-15726	94	11	the	the	DET
cet-15726	94	12	speed	speed	NOUN
cet-15726	94	13	and	and	CCONJ
cet-15726	94	14	acceleration	acceleration	NOUN
cet-15726	94	15	of	of	ADP
cet-15726	94	16	the	the	DET
cet-15726	94	17	spin	spin	NOUN
cet-15726	94	18	system	system	NOUN
cet-15726	94	19	and	and	CCONJ
cet-15726	94	20	the	the	DET
cet-15726	94	21	changes	change	NOUN
cet-15726	94	22	in	in	ADP
cet-15726	94	23	these	these	DET
cet-15726	94	24	properties	property	NOUN
cet-15726	94	25	during	during	ADP
cet-15726	94	26	deposition	deposition	NOUN
cet-15726	94	27	.	.	PUNCT
cet-15726	95	1	due	due	ADP
cet-15726	95	2	to	to	ADP
cet-15726	95	3	the	the	DET
cet-15726	95	4	interdependence	interdependence	NOUN
cet-15726	95	5	of	of	ADP
cet-15726	95	6	these	these	DET
cet-15726	95	7	factors	factor	NOUN
cet-15726	95	8	,	,	PUNCT
cet-15726	95	9	accurately	accurately	ADV
cet-15726	95	10	describing	describe	VERB
cet-15726	95	11	the	the	DET
cet-15726	95	12	process	process	NOUN
cet-15726	95	13	is	be	AUX
cet-15726	95	14	a	a	DET
cet-15726	95	15	major	major	ADJ
cet-15726	95	16	challenge	challenge	NOUN
cet-15726	95	17	(	(	PUNCT
cet-15726	95	18	tyona	tyona	NOUN
cet-15726	95	19	,	,	PUNCT
cet-15726	95	20	2013	2013	NUM
cet-15726	95	21	)	)	PUNCT
cet-15726	95	22	.	.	PUNCT
cet-15726	96	1	viscous	viscous	ADJ
cet-15726	96	2	flow	flow	NOUN
cet-15726	96	3	analyses	analysis	NOUN
cet-15726	96	4	show	show	VERB
cet-15726	96	5	that	that	SCONJ
cet-15726	96	6	the	the	DET
cet-15726	96	7	coating	coating	NOUN
cet-15726	96	8	remains	remain	VERB
cet-15726	96	9	uniform	uniform	ADJ
cet-15726	96	10	during	during	ADP
cet-15726	96	11	spin	spin	NOUN
cet-15726	96	12	coating	coat	VERB
cet-15726	96	13	if	if	SCONJ
cet-15726	96	14	the	the	DET
cet-15726	96	15	fluid	fluid	NOUN
cet-15726	96	16	behaves	behave	VERB
cet-15726	96	17	like	like	ADP
cet-15726	96	18	a	a	DET
cet-15726	96	19	newtonian	newtonian	ADJ
cet-15726	96	20	fluid	fluid	NOUN
cet-15726	96	21	whose	whose	DET
cet-15726	96	22	viscosity	viscosity	NOUN
cet-15726	96	23	depends	depend	VERB
cet-15726	96	24	linearly	linearly	ADV
cet-15726	96	25	on	on	ADP
cet-15726	96	26	the	the	DET
cet-15726	96	27	shear	shear	NOUN
cet-15726	96	28	rate	rate	NOUN
cet-15726	96	29	,	,	PUNCT
cet-15726	96	30	and	and	CCONJ
cet-15726	96	31	if	if	SCONJ
cet-15726	96	32	the	the	DET
cet-15726	96	33	initial	initial	ADJ
cet-15726	96	34	liquid	liquid	ADJ
cet-15726	96	35	layer	layer	NOUN
cet-15726	96	36	is	be	AUX
cet-15726	96	37	uniformly	uniformly	ADV
cet-15726	96	38	distributed	distribute	VERB
cet-15726	96	39	over	over	ADP
cet-15726	96	40	the	the	DET
cet-15726	96	41	substrate	substrate	NOUN
cet-15726	96	42	.	.	PUNCT
cet-15726	97	1	the	the	DET
cet-15726	97	2	result	result	NOUN
cet-15726	97	3	is	be	AUX
cet-15726	97	4	a	a	DET
cet-15726	97	5	homogeneous	homogeneous	ADJ
cet-15726	97	6	film	film	NOUN
cet-15726	97	7	with	with	ADP
cet-15726	97	8	consistent	consistent	ADJ
cet-15726	97	9	thickness	thickness	NOUN
cet-15726	97	10	(	(	PUNCT
cet-15726	97	11	tyona	tyona	NOUN
cet-15726	97	12	,	,	PUNCT
cet-15726	97	13	2013	2013	NUM
cet-15726	97	14	;	;	PUNCT
cet-15726	97	15	mouhamad	mouhamad	NOUN
cet-15726	97	16	et	et	PROPN
cet-15726	97	17	al	al	PROPN
cet-15726	97	18	.	.	PROPN
cet-15726	97	19	,	,	PUNCT
cet-15726	97	20	2014	2014	NUM
cet-15726	97	21	;	;	PUNCT
cet-15726	97	22	chou	chou	PROPN
cet-15726	97	23	et	et	PROPN
cet-15726	97	24	al	al	PROPN
cet-15726	97	25	.	.	PROPN
cet-15726	97	26	,	,	PUNCT
cet-15726	97	27	2021	2021	NUM
cet-15726	97	28	)	)	PUNCT
cet-15726	97	29	.	.	PUNCT
cet-15726	98	1	for	for	ADP
cet-15726	98	2	practical	practical	ADJ
cet-15726	98	3	purposes	purpose	NOUN
cet-15726	98	4	,	,	PUNCT
cet-15726	98	5	the	the	DET
cet-15726	98	6	simplified	simplified	ADJ
cet-15726	98	7	models	model	NOUN
cet-15726	98	8	discussed	discuss	VERB
cet-15726	98	9	here	here	ADV
cet-15726	98	10	assume	assume	VERB
cet-15726	98	11	a	a	DET
cet-15726	98	12	static	static	ADJ
cet-15726	98	13	system	system	NOUN
cet-15726	98	14	.	.	PUNCT
cet-15726	99	1	in	in	ADP
cet-15726	99	2	this	this	DET
cet-15726	99	3	framework	framework	NOUN
cet-15726	99	4	,	,	PUNCT
cet-15726	99	5	the	the	DET
cet-15726	99	6	final	final	ADJ
cet-15726	99	7	thickness	thickness	NOUN
cet-15726	99	8	of	of	ADP
cet-15726	99	9	the	the	DET
cet-15726	99	10	film	film	NOUN
cet-15726	99	11	depends	depend	VERB
cet-15726	99	12	directly	directly	ADV
cet-15726	99	13	on	on	ADP
cet-15726	99	14	the	the	DET
cet-15726	99	15	viscosity	viscosity	NOUN
cet-15726	99	16	and	and	CCONJ
cet-15726	99	17	concentration	concentration	NOUN
cet-15726	99	18	of	of	ADP
cet-15726	99	19	the	the	DET
cet-15726	99	20	solution	solution	NOUN
cet-15726	99	21	and	and	CCONJ
cet-15726	99	22	inversely	inversely	ADV
cet-15726	99	23	on	on	ADP
cet-15726	99	24	the	the	DET
cet-15726	99	25	angular	angular	ADJ
cet-15726	99	26	velocity	velocity	NOUN
cet-15726	99	27	of	of	ADP
cet-15726	99	28	the	the	DET
cet-15726	99	29	system	system	NOUN
cet-15726	99	30	.	.	PUNCT
cet-15726	100	1	therefore	therefore	ADV
cet-15726	100	2	,	,	PUNCT
cet-15726	100	3	increasing	increase	VERB
cet-15726	100	4	the	the	DET
cet-15726	100	5	rotational	rotational	ADJ
cet-15726	100	6	speed	speed	NOUN
cet-15726	100	7	while	while	SCONJ
cet-15726	100	8	decreasing	decrease	VERB
cet-15726	100	9	the	the	DET
cet-15726	100	10	viscosity	viscosity	NOUN
cet-15726	100	11	and	and	CCONJ
cet-15726	100	12	concentration	concentration	NOUN
cet-15726	100	13	of	of	ADP
cet-15726	100	14	the	the	DET
cet-15726	100	15	solution	solution	NOUN
cet-15726	100	16	generally	generally	ADV
cet-15726	100	17	results	result	VERB
cet-15726	100	18	in	in	ADP
cet-15726	100	19	thinner	thin	ADJ
cet-15726	100	20	films	film	NOUN
cet-15726	100	21	(	(	PUNCT
cet-15726	100	22	tyona	tyona	NOUN
cet-15726	100	23	,	,	PUNCT
cet-15726	100	24	2013	2013	NUM
cet-15726	100	25	;	;	PUNCT
cet-15726	100	26	chou	chou	PROPN
cet-15726	100	27	et	et	PROPN
cet-15726	100	28	al	al	PROPN
cet-15726	100	29	.	.	PROPN
cet-15726	100	30	,	,	PUNCT
cet-15726	100	31	2021	2021	NUM
cet-15726	100	32	)	)	PUNCT
cet-15726	100	33	.	.	PUNCT
cet-15726	101	1	regardless	regardless	ADV
cet-15726	101	2	of	of	ADP
cet-15726	101	3	the	the	DET
cet-15726	101	4	initial	initial	ADJ
cet-15726	101	5	material	material	NOUN
cet-15726	101	6	distribution	distribution	NOUN
cet-15726	101	7	,	,	PUNCT
cet-15726	101	8	it	it	PRON
cet-15726	101	9	is	be	AUX
cet-15726	101	10	possible	possible	ADJ
cet-15726	101	11	to	to	PART
cet-15726	101	12	achieve	achieve	VERB
cet-15726	101	13	uniform	uniform	ADJ
cet-15726	101	14	films	film	NOUN
cet-15726	101	15	that	that	PRON
cet-15726	101	16	become	become	VERB
cet-15726	101	17	thinner	thin	ADJ
cet-15726	101	18	over	over	ADP
cet-15726	101	19	time	time	NOUN
cet-15726	101	20	.	.	PUNCT
cet-15726	102	1	the	the	DET
cet-15726	102	2	time	time	NOUN
cet-15726	102	3	required	require	VERB
cet-15726	102	4	to	to	PART
cet-15726	102	5	reach	reach	VERB
cet-15726	102	6	a	a	DET
cet-15726	102	7	certain	certain	ADJ
cet-15726	102	8	thickness	thickness	NOUN
cet-15726	103	1	can	can	AUX
cet-15726	103	2	be	be	AUX
cet-15726	103	3	estimated	estimate	VERB
cet-15726	103	4	based	base	VERB
cet-15726	103	5	on	on	ADP
cet-15726	103	6	the	the	DET
cet-15726	103	7	rotational	rotational	ADJ
cet-15726	103	8	speed	speed	NOUN
cet-15726	103	9	of	of	ADP
cet-15726	103	10	the	the	DET
cet-15726	103	11	system	system	NOUN
cet-15726	103	12	.	.	PUNCT
cet-15726	104	1	this	this	DET
cet-15726	104	2	relationship	relationship	NOUN
cet-15726	104	3	is	be	AUX
cet-15726	104	4	described	describe	VERB
cet-15726	104	5	by	by	ADP
cet-15726	104	6	equation	equation	NOUN
cet-15726	104	7	1	1	NUM
cet-15726	104	8	,	,	PUNCT
cet-15726	104	9	where	where	SCONJ
cet-15726	104	10	h	h	NOUN
cet-15726	104	11	is	be	AUX
cet-15726	104	12	the	the	DET
cet-15726	104	13	final	final	ADJ
cet-15726	104	14	thickness	thickness	NOUN
cet-15726	104	15	,	,	PUNCT
cet-15726	104	16	h₀	h₀	PROPN
cet-15726	104	17	is	be	AUX
cet-15726	104	18	the	the	DET
cet-15726	104	19	initial	initial	ADJ
cet-15726	104	20	thickness	thickness	NOUN
cet-15726	104	21	,	,	PUNCT
cet-15726	104	22	ω	ω	PROPN
cet-15726	104	23	is	be	AUX
cet-15726	104	24	the	the	DET
cet-15726	104	25	angular	angular	ADJ
cet-15726	104	26	velocity	velocity	NOUN
cet-15726	104	27	,	,	PUNCT
cet-15726	104	28	ν	ν	PROPN
cet-15726	104	29	is	be	AUX
cet-15726	104	30	the	the	DET
cet-15726	104	31	kinematic	kinematic	ADJ
cet-15726	104	32	viscosity	viscosity	NOUN
cet-15726	104	33	(	(	PUNCT
cet-15726	104	34	equal	equal	ADJ
cet-15726	104	35	to	to	ADP
cet-15726	104	36	the	the	DET
cet-15726	104	37	dynamic	dynamic	ADJ
cet-15726	104	38	viscosity	viscosity	NOUN
cet-15726	104	39	divided	divide	VERB
cet-15726	104	40	by	by	ADP
cet-15726	104	41	the	the	DET
cet-15726	104	42	density	density	NOUN
cet-15726	104	43	)	)	PUNCT
cet-15726	104	44	and	and	CCONJ
cet-15726	104	45	t	t	PROPN
cet-15726	104	46	is	be	AUX
cet-15726	104	47	the	the	DET
cet-15726	104	48	time	time	NOUN
cet-15726	104	49	.	.	PUNCT
cet-15726	105	1	this	this	DET
cet-15726	105	2	formulation	formulation	NOUN
cet-15726	105	3	is	be	AUX
cet-15726	105	4	known	know	VERB
cet-15726	105	5	as	as	ADP
cet-15726	105	6	the	the	DET
cet-15726	105	7	ebp	ebp	PROPN
cet-15726	105	8	model	model	NOUN
cet-15726	105	9	after	after	ADP
cet-15726	105	10	the	the	DET
cet-15726	105	11	initials	initial	NOUN
cet-15726	105	12	of	of	ADP
cet-15726	105	13	its	its	PRON
cet-15726	105	14	authors	author	NOUN
cet-15726	105	15	and	and	CCONJ
cet-15726	105	16	can	can	AUX
cet-15726	105	17	be	be	AUX
cet-15726	105	18	used	use	VERB
cet-15726	105	19	to	to	PART
cet-15726	105	20	determine	determine	VERB
cet-15726	105	21	either	either	CCONJ
cet-15726	105	22	the	the	DET
cet-15726	105	23	final	final	ADJ
cet-15726	105	24	thickness	thickness	NOUN
cet-15726	105	25	or	or	CCONJ
cet-15726	105	26	the	the	DET
cet-15726	105	27	time	time	NOUN
cet-15726	105	28	required	require	VERB
cet-15726	105	29	to	to	PART
cet-15726	105	30	obtain	obtain	VERB
cet-15726	105	31	it	it	PRON
cet-15726	105	32	.	.	PUNCT
cet-15726	106	1	equation	equation	NOUN
cet-15726	106	2	2	2	NUM
cet-15726	106	3	shows	show	VERB
cet-15726	106	4	the	the	DET
cet-15726	106	5	rearranged	rearranged	ADJ
cet-15726	106	6	form	form	NOUN
cet-15726	106	7	for	for	ADP
cet-15726	106	8	calculating	calculate	VERB
cet-15726	106	9	the	the	DET
cet-15726	106	10	time	time	NOUN
cet-15726	106	11	,	,	PUNCT
cet-15726	106	12	where	where	SCONJ
cet-15726	106	13	h	h	NOUN
cet-15726	106	14	and	and	CCONJ
cet-15726	106	15	h₀	h₀	PROPN
cet-15726	106	16	retain	retain	VERB
cet-15726	106	17	their	their	PRON
cet-15726	106	18	meaning	meaning	NOUN
cet-15726	106	19	and	and	CCONJ
cet-15726	106	20	ω	ω	NUM
cet-15726	106	21	corresponds	correspond	VERB
cet-15726	106	22	to	to	ADP
cet-15726	106	23	the	the	DET
cet-15726	106	24	rotational	rotational	ADJ
cet-15726	106	25	speed	speed	NOUN
cet-15726	106	26	.	.	PUNCT
cet-15726	107	1	another	another	DET
cet-15726	107	2	model	model	NOUN
cet-15726	107	3	extends	extend	VERB
cet-15726	107	4	this	this	DET
cet-15726	107	5	analysis	analysis	NOUN
cet-15726	107	6	to	to	ADP
cet-15726	107	7	non	non	ADJ
cet-15726	107	8	-	-	ADJ
cet-15726	107	9	newtonian	newtonian	ADJ
cet-15726	107	10	fluids	fluid	NOUN
cet-15726	107	11	.	.	PUNCT
cet-15726	108	1	in	in	ADP
cet-15726	108	2	such	such	ADJ
cet-15726	108	3	cases	case	NOUN
cet-15726	108	4	,	,	PUNCT
cet-15726	108	5	if	if	SCONJ
cet-15726	108	6	the	the	DET
cet-15726	108	7	solution	solution	NOUN
cet-15726	108	8	does	do	AUX
cet-15726	108	9	not	not	PART
cet-15726	108	10	reach	reach	VERB
cet-15726	108	11	a	a	DET
cet-15726	108	12	high	high	ADJ
cet-15726	108	13	enough	enough	ADJ
cet-15726	108	14	concentration	concentration	NOUN
cet-15726	108	15	to	to	PART
cet-15726	108	16	mimic	mimic	VERB
cet-15726	108	17	newtonian	newtonian	ADJ
cet-15726	108	18	behaviour	behaviour	NOUN
cet-15726	108	19	,	,	PUNCT
cet-15726	108	20	the	the	DET
cet-15726	108	21	final	final	ADJ
cet-15726	108	22	coating	coating	NOUN
cet-15726	108	23	becomes	become	VERB
cet-15726	108	24	non	non	ADJ
cet-15726	108	25	-	-	ADJ
cet-15726	108	26	uniform	uniform	ADJ
cet-15726	108	27	.	.	PUNCT
cet-15726	109	1	equation	equation	NOUN
cet-15726	109	2	3	3	NUM
cet-15726	109	3	expresses	express	VERB
cet-15726	109	4	this	this	PRON
cet-15726	109	5	by	by	ADP
cet-15726	109	6	relating	relate	VERB
cet-15726	109	7	the	the	DET
cet-15726	109	8	final	final	ADJ
cet-15726	109	9	thickness	thickness	NOUN
cet-15726	109	10	h	h	NOUN
cet-15726	109	11	to	to	ADP
cet-15726	109	12	a	a	DET
cet-15726	109	13	constant	constant	ADJ
cet-15726	109	14	k	k	NOUN
cet-15726	109	15	,	,	PUNCT
cet-15726	109	16	the	the	DET
cet-15726	109	17	initial	initial	ADJ
cet-15726	109	18	concentration	concentration	NOUN
cet-15726	109	19	c	c	NOUN
cet-15726	109	20	and	and	CCONJ
cet-15726	109	21	the	the	DET
cet-15726	109	22	rotation	rotation	NOUN
cet-15726	109	23	speed	speed	NOUN
cet-15726	109	24	ω	ω	NOUN
cet-15726	109	25	.	.	PUNCT
cet-15726	110	1	ℎ	ℎ	PROPN
cet-15726	110	2	=	=	SYM
cet-15726	110	3	ℎ0	ℎ0	PROPN
cet-15726	110	4	×	×	PROPN
cet-15726	110	5	�	�	NOUN
cet-15726	110	6	1	1	NUM
cet-15726	110	7	+	+	SYM
cet-15726	110	8	4	4	NUM
cet-15726	110	9	×	×	PROPN
cet-15726	110	10	�	�	NOUN
cet-15726	110	11	𝜔𝜔	𝜔𝜔	ADP
cet-15726	110	12	2	2	NUM
cet-15726	110	13	3𝜈𝜈	3𝜈𝜈	ADJ
cet-15726	110	14	�	�	PROPN
cet-15726	110	15	×	×	PROPN
cet-15726	110	16	ℎ02	ℎ02	PROPN
cet-15726	110	17	×	×	PROPN
cet-15726	110	18	𝑡𝑡	𝑡𝑡	PROPN
cet-15726	110	19	�	�	PROPN
cet-15726	110	20	−1	−1	NOUN
cet-15726	110	21	2	2	NUM
cet-15726	110	22	(	(	PUNCT
cet-15726	110	23	1	1	NUM
cet-15726	110	24	)	)	PUNCT
cet-15726	110	25	|	|	ADV
cet-15726	110	26	𝑡𝑡	𝑡𝑡	NOUN
cet-15726	110	27	=	=	SYM
cet-15726	110	28	3	3	NUM
cet-15726	110	29	4𝜔𝜔2	4𝜔𝜔2	NUM
cet-15726	110	30	×	×	PROPN
cet-15726	110	31	�	�	PROPN
cet-15726	110	32	1	1	NUM
cet-15726	110	33	ℎ2	ℎ2	NOUN
cet-15726	110	34	−	−	PROPN
cet-15726	110	35	1	1	NUM
cet-15726	110	36	ℎ0	ℎ0	PROPN
cet-15726	110	37	2	2	NUM
cet-15726	110	38	�	�	PROPN
cet-15726	110	39	(	(	PUNCT
cet-15726	110	40	2	2	NUM
cet-15726	110	41	)	)	PUNCT
cet-15726	110	42	|	|	ADV
cet-15726	110	43	ℎ	ℎ	X
cet-15726	110	44	=	=	SYM
cet-15726	110	45	𝑘𝑘	𝑘𝑘	PROPN
cet-15726	110	46	×	×	PROPN
cet-15726	110	47	𝑐𝑐2	𝑐𝑐2	PROPN
cet-15726	110	48	𝜔𝜔	𝜔𝜔	ADP
cet-15726	110	49	(	(	PUNCT
cet-15726	110	50	3	3	X
cet-15726	110	51	)	)	PUNCT
cet-15726	110	52	the	the	DET
cet-15726	110	53	mathematical	mathematical	ADJ
cet-15726	110	54	framework	framework	NOUN
cet-15726	110	55	also	also	ADV
cet-15726	110	56	considers	consider	VERB
cet-15726	110	57	the	the	DET
cet-15726	110	58	evaporation	evaporation	NOUN
cet-15726	110	59	of	of	ADP
cet-15726	110	60	the	the	DET
cet-15726	110	61	solvent	solvent	NOUN
cet-15726	110	62	,	,	PUNCT
cet-15726	110	63	which	which	PRON
cet-15726	110	64	is	be	AUX
cet-15726	110	65	important	important	ADJ
cet-15726	110	66	during	during	ADP
cet-15726	110	67	and	and	CCONJ
cet-15726	110	68	after	after	ADP
cet-15726	110	69	the	the	DET
cet-15726	110	70	initial	initial	ADJ
cet-15726	110	71	flow	flow	NOUN
cet-15726	110	72	phase	phase	NOUN
cet-15726	110	73	.	.	PUNCT
cet-15726	111	1	initially	initially	ADV
cet-15726	111	2	,	,	PUNCT
cet-15726	111	3	a	a	DET
cet-15726	111	4	uniform	uniform	ADJ
cet-15726	111	5	layer	layer	NOUN
cet-15726	111	6	of	of	ADP
cet-15726	111	7	liquid	liquid	NOUN
cet-15726	111	8	covers	cover	VERB
cet-15726	111	9	the	the	DET
cet-15726	111	10	substrate	substrate	NOUN
cet-15726	111	11	,	,	PUNCT
cet-15726	111	12	without	without	ADP
cet-15726	111	13	edge	edge	NOUN
cet-15726	111	14	barriers	barrier	NOUN
cet-15726	111	15	that	that	PRON
cet-15726	111	16	would	would	AUX
cet-15726	111	17	prevent	prevent	VERB
cet-15726	111	18	redistribution	redistribution	NOUN
cet-15726	111	19	of	of	ADP
cet-15726	111	20	the	the	DET
cet-15726	111	21	liquid	liquid	NOUN
cet-15726	111	22	.	.	PUNCT
cet-15726	112	1	this	this	DET
cet-15726	112	2	structure	structure	NOUN
cet-15726	112	3	ensures	ensure	VERB
cet-15726	112	4	an	an	DET
cet-15726	112	5	even	even	ADJ
cet-15726	112	6	distribution	distribution	NOUN
cet-15726	112	7	of	of	ADP
cet-15726	112	8	the	the	DET
cet-15726	112	9	material	material	NOUN
cet-15726	112	10	(	(	PUNCT
cet-15726	112	11	tyona	tyona	NOUN
cet-15726	112	12	,	,	PUNCT
cet-15726	112	13	2013	2013	NUM
cet-15726	112	14	)	)	PUNCT
cet-15726	112	15	.	.	PUNCT
cet-15726	113	1	at	at	ADP
cet-15726	113	2	the	the	DET
cet-15726	113	3	beginning	beginning	NOUN
cet-15726	113	4	,	,	PUNCT
cet-15726	113	5	the	the	DET
cet-15726	113	6	dynamics	dynamic	NOUN
cet-15726	113	7	are	be	AUX
cet-15726	113	8	determined	determine	VERB
cet-15726	113	9	exclusively	exclusively	ADV
cet-15726	113	10	by	by	ADP
cet-15726	113	11	the	the	DET
cet-15726	113	12	viscous	viscous	ADJ
cet-15726	113	13	flow	flow	NOUN
cet-15726	113	14	.	.	PUNCT
cet-15726	114	1	during	during	ADP
cet-15726	114	2	this	this	DET
cet-15726	114	3	phase	phase	NOUN
cet-15726	114	4	,	,	PUNCT
cet-15726	114	5	the	the	DET
cet-15726	114	6	centrifugal	centrifugal	ADJ
cet-15726	114	7	force	force	NOUN
cet-15726	114	8	and	and	CCONJ
cet-15726	114	9	the	the	DET
cet-15726	114	10	viscosity	viscosity	NOUN
cet-15726	114	11	of	of	ADP
cet-15726	114	12	the	the	DET
cet-15726	114	13	liquid	liquid	ADJ
cet-15726	114	14	control	control	NOUN
cet-15726	114	15	the	the	DET
cet-15726	114	16	spreading	spreading	NOUN
cet-15726	114	17	of	of	ADP
cet-15726	114	18	the	the	DET
cet-15726	114	19	layer	layer	NOUN
cet-15726	114	20	and	and	CCONJ
cet-15726	114	21	ensure	ensure	VERB
cet-15726	114	22	a	a	DET
cet-15726	114	23	uniform	uniform	ADJ
cet-15726	114	24	distribution	distribution	NOUN
cet-15726	114	25	until	until	SCONJ
cet-15726	114	26	the	the	DET
cet-15726	114	27	thickness	thickness	NOUN
cet-15726	114	28	decreases	decrease	VERB
cet-15726	114	29	to	to	ADP
cet-15726	114	30	about	about	ADV
cet-15726	114	31	one	one	NUM
cet-15726	114	32	third	third	NOUN
cet-15726	114	33	of	of	ADP
cet-15726	114	34	the	the	DET
cet-15726	114	35	original	original	ADJ
cet-15726	114	36	value	value	NOUN
cet-15726	114	37	.	.	PUNCT
cet-15726	115	1	as	as	SCONJ
cet-15726	115	2	the	the	DET
cet-15726	115	3	layer	layer	NOUN
cet-15726	115	4	becomes	become	VERB
cet-15726	115	5	thinner	thin	ADJ
cet-15726	115	6	,	,	PUNCT
cet-15726	115	7	evaporation	evaporation	NOUN
cet-15726	115	8	begins	begin	VERB
cet-15726	115	9	to	to	PART
cet-15726	115	10	play	play	VERB
cet-15726	115	11	a	a	DET
cet-15726	115	12	greater	great	ADJ
cet-15726	115	13	role	role	NOUN
cet-15726	115	14	(	(	PUNCT
cet-15726	115	15	tyona	tyona	NOUN
cet-15726	115	16	,	,	PUNCT
cet-15726	115	17	2013	2013	NUM
cet-15726	115	18	)	)	PUNCT
cet-15726	115	19	.	.	PUNCT
cet-15726	116	1	the	the	DET
cet-15726	116	2	loss	loss	NOUN
cet-15726	116	3	of	of	ADP
cet-15726	116	4	solvents	solvent	NOUN
cet-15726	116	5	increases	increase	VERB
cet-15726	116	6	the	the	DET
cet-15726	116	7	concentration	concentration	NOUN
cet-15726	116	8	of	of	ADP
cet-15726	116	9	solutes	solute	NOUN
cet-15726	116	10	and	and	CCONJ
cet-15726	116	11	promotes	promote	VERB
cet-15726	116	12	rapid	rapid	ADJ
cet-15726	116	13	solidification	solidification	NOUN
cet-15726	116	14	.	.	PUNCT
cet-15726	117	1	as	as	SCONJ
cet-15726	117	2	the	the	DET
cet-15726	117	3	thickness	thickness	NOUN
cet-15726	117	4	decreases	decrease	VERB
cet-15726	117	5	,	,	PUNCT
cet-15726	117	6	the	the	DET
cet-15726	117	7	increasing	increase	VERB
cet-15726	117	8	viscosity	viscosity	NOUN
cet-15726	117	9	restricts	restrict	VERB
cet-15726	117	10	the	the	DET
cet-15726	117	11	mobility	mobility	NOUN
cet-15726	117	12	of	of	ADP
cet-15726	117	13	the	the	DET
cet-15726	117	14	liquid	liquid	NOUN
cet-15726	117	15	.	.	PUNCT
cet-15726	118	1	eventually	eventually	ADV
cet-15726	118	2	,	,	PUNCT
cet-15726	118	3	the	the	DET
cet-15726	118	4	viscosity	viscosity	NOUN
cet-15726	118	5	becomes	become	VERB
cet-15726	118	6	high	high	ADJ
cet-15726	118	7	enough	enough	ADV
cet-15726	118	8	to	to	PART
cet-15726	118	9	stop	stop	VERB
cet-15726	118	10	the	the	DET
cet-15726	118	11	flow	flow	NOUN
cet-15726	118	12	completely	completely	ADV
cet-15726	118	13	and	and	CCONJ
cet-15726	118	14	the	the	DET
cet-15726	118	15	film	film	NOUN
cet-15726	118	16	stabilizes	stabilize	VERB
cet-15726	118	17	.	.	PUNCT
cet-15726	119	1	from	from	ADP
cet-15726	119	2	this	this	DET
cet-15726	119	3	point	point	NOUN
cet-15726	119	4	on	on	ADV
cet-15726	119	5	,	,	PUNCT
cet-15726	119	6	only	only	ADJ
cet-15726	119	7	evaporation	evaporation	NOUN
cet-15726	119	8	is	be	AUX
cet-15726	119	9	effective	effective	ADJ
cet-15726	119	10	,	,	PUNCT
cet-15726	119	11	bringing	bring	VERB
cet-15726	119	12	the	the	DET
cet-15726	119	13	system	system	NOUN
cet-15726	119	14	to	to	ADP
cet-15726	119	15	its	its	PRON
cet-15726	119	16	final	final	ADJ
cet-15726	119	17	state	state	NOUN
cet-15726	119	18	.	.	PUNCT
cet-15726	120	1	assuming	assume	VERB
cet-15726	120	2	that	that	SCONJ
cet-15726	120	3	evaporation	evaporation	NOUN
cet-15726	120	4	is	be	AUX
cet-15726	120	5	negligible	negligible	ADJ
cet-15726	120	6	at	at	ADP
cet-15726	120	7	the	the	DET
cet-15726	120	8	beginning	beginning	NOUN
cet-15726	120	9	,	,	PUNCT
cet-15726	120	10	the	the	DET
cet-15726	120	11	solute	solute	NOUN
cet-15726	120	12	concentration	concentration	NOUN
cet-15726	120	13	c	c	NOUN
cet-15726	120	14	corresponds	correspond	VERB
cet-15726	120	15	to	to	ADP
cet-15726	120	16	the	the	DET
cet-15726	120	17	initial	initial	ADJ
cet-15726	120	18	concentration	concentration	NOUN
cet-15726	120	19	c₀	c₀	NOUN
cet-15726	120	20	and	and	CCONJ
cet-15726	120	21	the	the	DET
cet-15726	120	22	flow	flow	NOUN
cet-15726	120	23	velocity	velocity	NOUN
cet-15726	120	24	v	v	NOUN
cet-15726	120	25	to	to	ADP
cet-15726	120	26	its	its	PRON
cet-15726	120	27	initial	initial	ADJ
cet-15726	120	28	value	value	NOUN
cet-15726	120	29	v₀.	v₀.	ADP
cet-15726	120	30	when	when	SCONJ
cet-15726	120	31	the	the	DET
cet-15726	120	32	thickness	thickness	NOUN
cet-15726	120	33	decreases	decrease	VERB
cet-15726	120	34	to	to	ADP
cet-15726	120	35	about	about	ADP
cet-15726	120	36	half	half	NOUN
cet-15726	120	37	of	of	ADP
cet-15726	120	38	the	the	DET
cet-15726	120	39	initial	initial	ADJ
cet-15726	120	40	value	value	NOUN
cet-15726	120	41	,	,	PUNCT
cet-15726	120	42	the	the	DET
cet-15726	120	43	evaporation	evaporation	NOUN
cet-15726	120	44	rate	rate	NOUN
cet-15726	120	45	e	e	NOUN
cet-15726	120	46	is	be	AUX
cet-15726	120	47	equal	equal	ADJ
cet-15726	120	48	to	to	ADP
cet-15726	120	49	the	the	DET
cet-15726	120	50	flow	flow	NOUN
cet-15726	120	51	velocity	velocity	NOUN
cet-15726	120	52	and	and	CCONJ
cet-15726	120	53	marks	mark	VERB
cet-15726	120	54	the	the	DET
cet-15726	120	55	transition	transition	NOUN
cet-15726	120	56	to	to	ADP
cet-15726	120	57	a	a	DET
cet-15726	120	58	state	state	NOUN
cet-15726	120	59	dominated	dominate	VERB
cet-15726	120	60	by	by	ADP
cet-15726	120	61	evaporation	evaporation	NOUN
cet-15726	120	62	(	(	PUNCT
cet-15726	120	63	tyona	tyona	NOUN
cet-15726	120	64	,	,	PUNCT
cet-15726	120	65	2013	2013	NUM
cet-15726	120	66	)	)	PUNCT
cet-15726	120	67	.	.	PUNCT
cet-15726	121	1	equation	equation	NOUN
cet-15726	121	2	4	4	NUM
cet-15726	121	3	expresses	express	VERB
cet-15726	121	4	the	the	DET
cet-15726	121	5	evaporation	evaporation	NOUN
cet-15726	121	6	rate	rate	NOUN
cet-15726	121	7	,	,	PUNCT
cet-15726	121	8	where	where	SCONJ
cet-15726	121	9	is	be	AUX
cet-15726	121	10	the	the	DET
cet-15726	121	11	evaporation	evaporation	NOUN
cet-15726	121	12	,	,	PUNCT
cet-15726	121	13	c	c	PROPN
cet-15726	121	14	is	be	AUX
cet-15726	121	15	the	the	DET
cet-15726	121	16	solute	solute	NOUN
cet-15726	121	17	concentration	concentration	NOUN
cet-15726	121	18	,	,	PUNCT
cet-15726	121	19	ω	ω	PROPN
cet-15726	121	20	is	be	AUX
cet-15726	121	21	the	the	DET
cet-15726	121	22	angular	angular	ADJ
cet-15726	121	23	velocity	velocity	NOUN
cet-15726	121	24	,	,	PUNCT
cet-15726	121	25	h	h	NOUN
cet-15726	121	26	is	be	AUX
cet-15726	121	27	the	the	DET
cet-15726	121	28	current	current	ADJ
cet-15726	121	29	thickness	thickness	NOUN
cet-15726	121	30	and	and	CCONJ
cet-15726	121	31	ν	ν	NOUN
cet-15726	121	32	is	be	AUX
cet-15726	121	33	the	the	DET
cet-15726	121	34	kinematic	kinematic	ADJ
cet-15726	121	35	viscosity	viscosity	NOUN
cet-15726	121	36	.	.	PUNCT
cet-15726	122	1	equation	equation	NOUN
cet-15726	122	2	5	5	NUM
cet-15726	122	3	provides	provide	VERB
cet-15726	122	4	a	a	DET
cet-15726	122	5	more	more	ADV
cet-15726	122	6	comprehensive	comprehensive	ADJ
cet-15726	122	7	prediction	prediction	NOUN
cet-15726	122	8	of	of	ADP
cet-15726	122	9	the	the	DET
cet-15726	122	10	final	final	ADJ
cet-15726	122	11	film	film	NOUN
cet-15726	122	12	thickness	thickness	NOUN
cet-15726	122	13	h	h	NOUN
cet-15726	122	14	in	in	ADP
cet-15726	122	15	the	the	DET
cet-15726	122	16	presence	presence	NOUN
cet-15726	122	17	of	of	ADP
cet-15726	122	18	evaporation	evaporation	NOUN
cet-15726	122	19	,	,	PUNCT
cet-15726	122	20	based	base	VERB
cet-15726	122	21	on	on	ADP
cet-15726	122	22	the	the	DET
cet-15726	122	23	constants	constant	NOUN
cet-15726	122	24	c₀	c₀	PROPN
cet-15726	122	25	,	,	PUNCT
cet-15726	122	26	ω	ω	NOUN
cet-15726	122	27	,	,	PUNCT
cet-15726	122	28	ν₀	ν₀	PROPN
cet-15726	122	29	and	and	CCONJ
cet-15726	122	30	e	e	NOUN
cet-15726	122	31	,	,	PUNCT
cet-15726	122	32	which	which	PRON
cet-15726	122	33	describe	describe	VERB
cet-15726	122	34	how	how	SCONJ
cet-15726	122	35	these	these	DET
cet-15726	122	36	parameters	parameter	NOUN
cet-15726	122	37	interact	interact	VERB
cet-15726	122	38	in	in	ADP
cet-15726	122	39	the	the	DET
cet-15726	122	40	final	final	ADJ
cet-15726	122	41	drying	dry	VERB
cet-15726	122	42	phase	phase	NOUN
cet-15726	122	43	(	(	PUNCT
cet-15726	122	44	tyona	tyona	NOUN
cet-15726	122	45	,	,	PUNCT
cet-15726	122	46	2013	2013	NUM
cet-15726	122	47	;	;	PUNCT
cet-15726	122	48	mouhamad	mouhamad	NOUN
cet-15726	122	49	et	et	PROPN
cet-15726	122	50	al	al	PROPN
cet-15726	122	51	,	,	PUNCT
cet-15726	122	52	2014	2014	NUM
cet-15726	122	53	;	;	PUNCT
cet-15726	122	54	chou	chou	PROPN
cet-15726	122	55	et	et	PROPN
cet-15726	122	56	al	al	PROPN
cet-15726	122	57	,	,	PUNCT
cet-15726	122	58	2021	2021	NUM
cet-15726	122	59	;	;	PUNCT
cet-15726	122	60	kalafatis	kalafatis	PROPN
cet-15726	122	61	et	et	PROPN
cet-15726	122	62	al	al	PROPN
cet-15726	122	63	,	,	PUNCT
cet-15726	122	64	2024	2024	NUM
cet-15726	122	65	)	)	PUNCT
cet-15726	122	66	.	.	PUNCT
cet-15726	123	1	𝑒𝑒	𝑒𝑒	X
cet-15726	123	2	=	=	PUNCT
cet-15726	123	3	(	(	PUNCT
cet-15726	123	4	1−c	1−c	NUM
cet-15726	123	5	)	)	PUNCT
cet-15726	123	6	×	×	NOUN
cet-15726	123	7	2𝜔𝜔2ℎ3	2𝜔𝜔2ℎ3	NUM
cet-15726	123	8	3𝜈𝜈	3𝜈𝜈	NOUN
cet-15726	123	9	(	(	PUNCT
cet-15726	123	10	4	4	NUM
cet-15726	123	11	)	)	PUNCT
cet-15726	124	1	|	|	ADV
cet-15726	124	2	ℎ	ℎ	X
cet-15726	124	3	=	=	NOUN
cet-15726	124	4	3	3	NUM
cet-15726	124	5	1	1	NUM
cet-15726	124	6	3	3	NUM
cet-15726	124	7	2	2	NUM
cet-15726	124	8	×	×	NOUN
cet-15726	124	9	𝑐𝑐0	𝑐𝑐0	NOUN
cet-15726	124	10	×	×	NOUN
cet-15726	124	11	(	(	PUNCT
cet-15726	124	12	1	1	NUM
cet-15726	124	13	−	−	PROPN
cet-15726	124	14	𝑐𝑐0)−	𝑐𝑐0)−	NOUN
cet-15726	124	15	1	1	NUM
cet-15726	124	16	3	3	NUM
cet-15726	124	17	×	×	NOUN
cet-15726	124	18	𝜔𝜔−23	𝜔𝜔−23	PROPN
cet-15726	124	19	×	×	NOUN
cet-15726	124	20	𝜈𝜈0	𝜈𝜈0	NOUN
cet-15726	124	21	1	1	NUM
cet-15726	124	22	3	3	NUM
cet-15726	124	23	×	×	NOUN
cet-15726	124	24	𝑒𝑒	𝑒𝑒	ADP
cet-15726	124	25	1	1	NUM
cet-15726	124	26	3	3	NUM
cet-15726	124	27	(	(	PUNCT
cet-15726	124	28	5	5	NUM
cet-15726	124	29	)	)	PUNCT
cet-15726	124	30	604	604	NUM
cet-15726	124	31	5	5	NUM
cet-15726	124	32	.	.	PUNCT
cet-15726	125	1	defects	defect	NOUN
cet-15726	125	2	in	in	ADP
cet-15726	125	3	films	film	NOUN
cet-15726	125	4	produced	produce	VERB
cet-15726	125	5	by	by	ADP
cet-15726	125	6	spin	spin	NOUN
cet-15726	125	7	coating	coating	NOUN
cet-15726	125	8	.	.	PUNCT
cet-15726	126	1	the	the	DET
cet-15726	126	2	most	most	ADV
cet-15726	126	3	important	important	ADJ
cet-15726	126	4	defects	defect	NOUN
cet-15726	126	5	in	in	ADP
cet-15726	126	6	films	film	NOUN
cet-15726	126	7	produced	produce	VERB
cet-15726	126	8	by	by	ADP
cet-15726	126	9	spin	spin	NOUN
cet-15726	126	10	coating	coating	NOUN
cet-15726	126	11	are	be	AUX
cet-15726	126	12	shown	show	VERB
cet-15726	126	13	in	in	ADP
cet-15726	126	14	figure	figure	NOUN
cet-15726	126	15	2	2	NUM
cet-15726	126	16	.	.	PUNCT
cet-15726	126	17	to	to	PART
cet-15726	126	18	ensure	ensure	VERB
cet-15726	126	19	the	the	DET
cet-15726	126	20	production	production	NOUN
cet-15726	126	21	of	of	ADP
cet-15726	126	22	consistent	consistent	ADJ
cet-15726	126	23	and	and	CCONJ
cet-15726	126	24	defect	defect	NOUN
cet-15726	126	25	-	-	PUNCT
cet-15726	126	26	free	free	ADJ
cet-15726	126	27	coatings	coating	NOUN
cet-15726	126	28	,	,	PUNCT
cet-15726	126	29	it	it	PRON
cet-15726	126	30	is	be	AUX
cet-15726	126	31	important	important	ADJ
cet-15726	126	32	to	to	PART
cet-15726	126	33	understand	understand	VERB
cet-15726	126	34	the	the	DET
cet-15726	126	35	causes	cause	NOUN
cet-15726	126	36	of	of	ADP
cet-15726	126	37	each	each	DET
cet-15726	126	38	type	type	NOUN
cet-15726	126	39	of	of	ADP
cet-15726	126	40	defect	defect	NOUN
cet-15726	126	41	and	and	CCONJ
cet-15726	126	42	apply	apply	VERB
cet-15726	126	43	appropriate	appropriate	ADJ
cet-15726	126	44	control	control	NOUN
cet-15726	126	45	strategies	strategy	NOUN
cet-15726	126	46	.	.	PUNCT
cet-15726	127	1	high	high	ADJ
cet-15726	127	2	quality	quality	NOUN
cet-15726	127	3	films	film	NOUN
cet-15726	127	4	are	be	AUX
cet-15726	127	5	expected	expect	VERB
cet-15726	127	6	to	to	PART
cet-15726	127	7	have	have	VERB
cet-15726	127	8	a	a	DET
cet-15726	127	9	smooth	smooth	ADJ
cet-15726	127	10	and	and	CCONJ
cet-15726	127	11	homogeneous	homogeneous	ADJ
cet-15726	127	12	appearance	appearance	NOUN
cet-15726	127	13	,	,	PUNCT
cet-15726	127	14	a	a	DET
cet-15726	127	15	result	result	NOUN
cet-15726	127	16	that	that	PRON
cet-15726	127	17	is	be	AUX
cet-15726	127	18	often	often	ADV
cet-15726	127	19	achieved	achieve	VERB
cet-15726	127	20	through	through	ADP
cet-15726	127	21	iterative	iterative	NOUN
cet-15726	127	22	process	process	NOUN
cet-15726	127	23	optimization	optimization	NOUN
cet-15726	127	24	.	.	PUNCT
cet-15726	128	1	many	many	ADJ
cet-15726	128	2	defects	defect	NOUN
cet-15726	128	3	can	can	AUX
cet-15726	128	4	be	be	AUX
cet-15726	128	5	minimized	minimize	VERB
cet-15726	128	6	by	by	ADP
cet-15726	128	7	adjusting	adjust	VERB
cet-15726	128	8	process	process	NOUN
cet-15726	128	9	parameters	parameter	NOUN
cet-15726	128	10	,	,	PUNCT
cet-15726	128	11	especially	especially	ADV
cet-15726	128	12	in	in	ADP
cet-15726	128	13	terms	term	NOUN
cet-15726	128	14	of	of	ADP
cet-15726	128	15	solution	solution	NOUN
cet-15726	128	16	formulation	formulation	NOUN
cet-15726	128	17	and	and	CCONJ
cet-15726	128	18	rotational	rotational	ADJ
cet-15726	128	19	dynamics	dynamic	NOUN
cet-15726	128	20	.	.	PUNCT
cet-15726	129	1	figure	figure	NOUN
cet-15726	129	2	2	2	NUM
cet-15726	129	3	–	–	PUNCT
cet-15726	129	4	representations	representation	NOUN
cet-15726	129	5	of	of	ADP
cet-15726	129	6	spin	spin	NOUN
cet-15726	129	7	coated	coated	ADJ
cet-15726	129	8	films	film	NOUN
cet-15726	129	9	:	:	PUNCT
cet-15726	129	10	(	(	PUNCT
cet-15726	129	11	a	a	X
cet-15726	129	12	)	)	PUNCT
cet-15726	129	13	no	no	DET
cet-15726	129	14	visible	visible	ADJ
cet-15726	129	15	defects	defect	NOUN
cet-15726	129	16	;	;	PUNCT
cet-15726	129	17	(	(	PUNCT
cet-15726	129	18	b	b	X
cet-15726	129	19	)	)	PUNCT
cet-15726	129	20	grains	grain	NOUN
cet-15726	129	21	;	;	PUNCT
cet-15726	129	22	(	(	PUNCT
cet-15726	129	23	c	c	X
cet-15726	129	24	)	)	PUNCT
cet-15726	129	25	pinholes	pinhole	NOUN
cet-15726	129	26	;	;	PUNCT
cet-15726	129	27	(	(	PUNCT
cet-15726	129	28	d	d	X
cet-15726	129	29	)	)	PUNCT
cet-15726	129	30	incomplete	incomplete	ADJ
cet-15726	129	31	coverage	coverage	NOUN
cet-15726	129	32	;	;	PUNCT
cet-15726	129	33	(	(	PUNCT
cet-15726	129	34	e	e	NOUN
cet-15726	129	35	)	)	PUNCT
cet-15726	129	36	uneven	uneven	ADJ
cet-15726	129	37	thickness	thickness	NOUN
cet-15726	129	38	;	;	PUNCT
cet-15726	129	39	(	(	PUNCT
cet-15726	129	40	f	f	X
cet-15726	129	41	)	)	PUNCT
cet-15726	129	42	streaks	streak	NOUN
cet-15726	129	43	;	;	PUNCT
cet-15726	129	44	(	(	PUNCT
cet-15726	129	45	g	g	NOUN
cet-15726	129	46	)	)	PUNCT
cet-15726	129	47	rotor	rotor	NOUN
cet-15726	129	48	mark	mark	NOUN
cet-15726	129	49	and	and	CCONJ
cet-15726	129	50	(	(	PUNCT
cet-15726	129	51	h	h	NOUN
cet-15726	129	52	)	)	PUNCT
cet-15726	129	53	thick	thick	ADJ
cet-15726	129	54	edges	edge	NOUN
cet-15726	129	55	.	.	PUNCT
cet-15726	130	1	a	a	DET
cet-15726	130	2	film	film	NOUN
cet-15726	130	3	without	without	ADP
cet-15726	130	4	visible	visible	ADJ
cet-15726	130	5	defects	defect	NOUN
cet-15726	130	6	(	(	PUNCT
cet-15726	130	7	figure	figure	NOUN
cet-15726	130	8	2a	2a	NUM
cet-15726	130	9	)	)	PUNCT
cet-15726	130	10	represents	represent	VERB
cet-15726	130	11	the	the	DET
cet-15726	130	12	desired	desire	VERB
cet-15726	130	13	result	result	NOUN
cet-15726	130	14	,	,	PUNCT
cet-15726	130	15	but	but	CCONJ
cet-15726	130	16	several	several	ADJ
cet-15726	130	17	common	common	ADJ
cet-15726	130	18	defects	defect	NOUN
cet-15726	130	19	can	can	AUX
cet-15726	130	20	occur	occur	VERB
cet-15726	130	21	.	.	PUNCT
cet-15726	131	1	the	the	DET
cet-15726	131	2	formation	formation	NOUN
cet-15726	131	3	of	of	ADP
cet-15726	131	4	grains	grain	NOUN
cet-15726	131	5	(	(	PUNCT
cet-15726	131	6	figure	figure	NOUN
cet-15726	131	7	2b	2b	NOUN
cet-15726	131	8	)	)	PUNCT
cet-15726	131	9	can	can	AUX
cet-15726	131	10	result	result	VERB
cet-15726	131	11	from	from	ADP
cet-15726	131	12	agglomeration	agglomeration	NOUN
cet-15726	131	13	of	of	ADP
cet-15726	131	14	particles	particle	NOUN
cet-15726	131	15	in	in	ADP
cet-15726	131	16	the	the	DET
cet-15726	131	17	solution	solution	NOUN
cet-15726	131	18	or	or	CCONJ
cet-15726	131	19	uneven	uneven	ADJ
cet-15726	131	20	drying	dry	VERB
cet-15726	131	21	and	and	CCONJ
cet-15726	131	22	can	can	AUX
cet-15726	131	23	affect	affect	VERB
cet-15726	131	24	the	the	DET
cet-15726	131	25	smoothness	smoothness	NOUN
cet-15726	131	26	of	of	ADP
cet-15726	131	27	the	the	DET
cet-15726	131	28	surface	surface	NOUN
cet-15726	131	29	and	and	CCONJ
cet-15726	131	30	optical	optical	ADJ
cet-15726	131	31	clarity	clarity	NOUN
cet-15726	131	32	.	.	PUNCT
cet-15726	132	1	pinholes	pinhole	NOUN
cet-15726	132	2	(	(	PUNCT
cet-15726	132	3	figure	figure	NOUN
cet-15726	132	4	2c	2c	NUM
cet-15726	132	5	)	)	PUNCT
cet-15726	132	6	,	,	PUNCT
cet-15726	132	7	often	often	ADV
cet-15726	132	8	caused	cause	VERB
cet-15726	132	9	by	by	ADP
cet-15726	132	10	trapped	trap	VERB
cet-15726	132	11	air	air	NOUN
cet-15726	132	12	bubbles	bubble	NOUN
cet-15726	132	13	during	during	ADP
cet-15726	132	14	evaporation	evaporation	NOUN
cet-15726	132	15	of	of	ADP
cet-15726	132	16	the	the	DET
cet-15726	132	17	solvent	solvent	NOUN
cet-15726	132	18	,	,	PUNCT
cet-15726	132	19	affect	affect	VERB
cet-15726	132	20	the	the	DET
cet-15726	132	21	barrier	barrier	NOUN
cet-15726	132	22	properties	property	NOUN
cet-15726	132	23	of	of	ADP
cet-15726	132	24	the	the	DET
cet-15726	132	25	film	film	NOUN
cet-15726	132	26	.	.	PUNCT
cet-15726	133	1	they	they	PRON
cet-15726	133	2	can	can	AUX
cet-15726	133	3	be	be	AUX
cet-15726	133	4	prevented	prevent	VERB
cet-15726	133	5	by	by	ADP
cet-15726	133	6	degassing	degas	VERB
cet-15726	133	7	the	the	DET
cet-15726	133	8	solution	solution	NOUN
cet-15726	133	9	and	and	CCONJ
cet-15726	133	10	controlling	control	VERB
cet-15726	133	11	both	both	CCONJ
cet-15726	133	12	the	the	DET
cet-15726	133	13	evaporation	evaporation	NOUN
cet-15726	133	14	rate	rate	NOUN
cet-15726	133	15	and	and	CCONJ
cet-15726	133	16	the	the	DET
cet-15726	133	17	spin	spin	NOUN
cet-15726	133	18	speed	speed	NOUN
cet-15726	133	19	.	.	PUNCT
cet-15726	134	1	incomplete	incomplete	ADJ
cet-15726	134	2	coverage	coverage	NOUN
cet-15726	134	3	(	(	PUNCT
cet-15726	134	4	figure	figure	NOUN
cet-15726	134	5	2d	2d	NOUN
cet-15726	134	6	)	)	PUNCT
cet-15726	134	7	can	can	AUX
cet-15726	134	8	be	be	AUX
cet-15726	134	9	caused	cause	VERB
cet-15726	134	10	by	by	ADP
cet-15726	134	11	low	low	ADJ
cet-15726	134	12	rotation	rotation	NOUN
cet-15726	134	13	speed	speed	NOUN
cet-15726	134	14	,	,	PUNCT
cet-15726	134	15	insufficient	insufficient	ADJ
cet-15726	134	16	solution	solution	NOUN
cet-15726	134	17	volume	volume	NOUN
cet-15726	134	18	or	or	CCONJ
cet-15726	134	19	poor	poor	ADJ
cet-15726	134	20	wettability	wettability	NOUN
cet-15726	134	21	of	of	ADP
cet-15726	134	22	the	the	DET
cet-15726	134	23	substrate	substrate	NOUN
cet-15726	134	24	,	,	PUNCT
cet-15726	134	25	resulting	result	VERB
cet-15726	134	26	in	in	ADP
cet-15726	134	27	exposed	expose	VERB
cet-15726	134	28	areas	area	NOUN
cet-15726	134	29	on	on	ADP
cet-15726	134	30	the	the	DET
cet-15726	134	31	surface	surface	NOUN
cet-15726	134	32	.	.	PUNCT
cet-15726	135	1	uneven	uneven	ADJ
cet-15726	135	2	film	film	NOUN
cet-15726	135	3	thickness	thickness	NOUN
cet-15726	135	4	(	(	PUNCT
cet-15726	135	5	figure	figure	NOUN
cet-15726	135	6	2e	2e	NUM
cet-15726	135	7	)	)	PUNCT
cet-15726	135	8	is	be	AUX
cet-15726	135	9	usually	usually	ADV
cet-15726	135	10	due	due	ADJ
cet-15726	135	11	to	to	ADP
cet-15726	135	12	off	off	ADP
cet-15726	135	13	-	-	PUNCT
cet-15726	135	14	center	center	NOUN
cet-15726	135	15	deposition	deposition	NOUN
cet-15726	135	16	,	,	PUNCT
cet-15726	135	17	high	high	ADJ
cet-15726	135	18	viscosity	viscosity	NOUN
cet-15726	135	19	or	or	CCONJ
cet-15726	135	20	rapid	rapid	ADJ
cet-15726	135	21	solvent	solvent	ADJ
cet-15726	135	22	loss	loss	NOUN
cet-15726	135	23	.	.	PUNCT
cet-15726	136	1	such	such	ADJ
cet-15726	136	2	irregularities	irregularity	NOUN
cet-15726	136	3	affect	affect	VERB
cet-15726	136	4	the	the	DET
cet-15726	136	5	performance	performance	NOUN
cet-15726	136	6	of	of	ADP
cet-15726	136	7	the	the	DET
cet-15726	136	8	device	device	NOUN
cet-15726	136	9	and	and	CCONJ
cet-15726	136	10	must	must	AUX
cet-15726	136	11	be	be	AUX
cet-15726	136	12	corrected	correct	VERB
cet-15726	136	13	by	by	ADP
cet-15726	136	14	fine	fine	ADV
cet-15726	136	15	-	-	PUNCT
cet-15726	136	16	tuning	tune	VERB
cet-15726	136	17	the	the	DET
cet-15726	136	18	coating	coating	NOUN
cet-15726	136	19	conditions	condition	NOUN
cet-15726	136	20	.	.	PUNCT
cet-15726	137	1	streaks	streak	NOUN
cet-15726	137	2	(	(	PUNCT
cet-15726	137	3	figure	figure	NOUN
cet-15726	137	4	2f	2f	NOUN
cet-15726	137	5	)	)	PUNCT
cet-15726	137	6	,	,	PUNCT
cet-15726	137	7	which	which	PRON
cet-15726	137	8	appear	appear	VERB
cet-15726	137	9	as	as	ADP
cet-15726	137	10	radial	radial	ADJ
cet-15726	137	11	patterns	pattern	NOUN
cet-15726	137	12	,	,	PUNCT
cet-15726	137	13	are	be	AUX
cet-15726	137	14	related	relate	VERB
cet-15726	137	15	to	to	ADP
cet-15726	137	16	gradients	gradient	NOUN
cet-15726	137	17	in	in	ADP
cet-15726	137	18	surface	surface	NOUN
cet-15726	137	19	tension	tension	NOUN
cet-15726	137	20	and	and	CCONJ
cet-15726	137	21	can	can	AUX
cet-15726	137	22	be	be	AUX
cet-15726	137	23	reduced	reduce	VERB
cet-15726	137	24	by	by	ADP
cet-15726	137	25	optimizing	optimize	VERB
cet-15726	137	26	the	the	DET
cet-15726	137	27	solvent	solvent	NOUN
cet-15726	137	28	or	or	CCONJ
cet-15726	137	29	adding	add	VERB
cet-15726	137	30	surfactants	surfactant	NOUN
cet-15726	137	31	.	.	PUNCT
cet-15726	138	1	rotor	rotor	NOUN
cet-15726	138	2	marks	mark	NOUN
cet-15726	138	3	(	(	PUNCT
cet-15726	138	4	figure	figure	NOUN
cet-15726	138	5	2	2	NUM
cet-15726	138	6	g	g	NOUN
cet-15726	138	7	)	)	PUNCT
cet-15726	138	8	occur	occur	VERB
cet-15726	138	9	when	when	SCONJ
cet-15726	138	10	the	the	DET
cet-15726	138	11	substrate	substrate	NOUN
cet-15726	138	12	is	be	AUX
cet-15726	138	13	not	not	PART
cet-15726	138	14	properly	properly	ADV
cet-15726	138	15	aligned	align	VERB
cet-15726	138	16	or	or	CCONJ
cet-15726	138	17	secured	secure	VERB
cet-15726	138	18	during	during	ADP
cet-15726	138	19	the	the	DET
cet-15726	138	20	spin	spin	NOUN
cet-15726	138	21	cycle	cycle	NOUN
cet-15726	138	22	,	,	PUNCT
cet-15726	138	23	resulting	result	VERB
cet-15726	138	24	in	in	ADP
cet-15726	138	25	mechanical	mechanical	ADJ
cet-15726	138	26	deformation	deformation	NOUN
cet-15726	138	27	of	of	ADP
cet-15726	138	28	the	the	DET
cet-15726	138	29	film	film	NOUN
cet-15726	138	30	.	.	PUNCT
cet-15726	139	1	finally	finally	ADV
cet-15726	139	2	,	,	PUNCT
cet-15726	139	3	thick	thick	ADJ
cet-15726	139	4	rims	rim	NOUN
cet-15726	139	5	(	(	PUNCT
cet-15726	139	6	figure	figure	NOUN
cet-15726	139	7	2h	2h	NUM
cet-15726	139	8	)	)	PUNCT
cet-15726	139	9	are	be	AUX
cet-15726	139	10	caused	cause	VERB
cet-15726	139	11	by	by	ADP
cet-15726	139	12	liquid	liquid	ADJ
cet-15726	139	13	accumulation	accumulation	NOUN
cet-15726	139	14	at	at	ADP
cet-15726	139	15	the	the	DET
cet-15726	139	16	periphery	periphery	NOUN
cet-15726	139	17	during	during	ADP
cet-15726	139	18	deceleration	deceleration	NOUN
cet-15726	139	19	and	and	CCONJ
cet-15726	139	20	are	be	AUX
cet-15726	139	21	influenced	influence	VERB
cet-15726	139	22	by	by	ADP
cet-15726	139	23	the	the	DET
cet-15726	139	24	rheology	rheology	NOUN
cet-15726	139	25	of	of	ADP
cet-15726	139	26	the	the	DET
cet-15726	139	27	solution	solution	NOUN
cet-15726	139	28	and	and	CCONJ
cet-15726	139	29	the	the	DET
cet-15726	139	30	final	final	ADJ
cet-15726	139	31	drying	dry	VERB
cet-15726	139	32	phase	phase	NOUN
cet-15726	139	33	.	.	PUNCT
cet-15726	140	1	the	the	DET
cet-15726	140	2	influence	influence	NOUN
cet-15726	140	3	of	of	ADP
cet-15726	140	4	the	the	DET
cet-15726	140	5	viscosity	viscosity	NOUN
cet-15726	140	6	of	of	ADP
cet-15726	140	7	the	the	DET
cet-15726	140	8	solvent	solvent	NOUN
cet-15726	140	9	and	and	CCONJ
cet-15726	140	10	the	the	DET
cet-15726	140	11	evaporation	evaporation	NOUN
cet-15726	140	12	on	on	ADP
cet-15726	140	13	the	the	DET
cet-15726	140	14	uniformity	uniformity	NOUN
cet-15726	140	15	of	of	ADP
cet-15726	140	16	the	the	DET
cet-15726	140	17	film	film	NOUN
cet-15726	140	18	are	be	AUX
cet-15726	140	19	decisive	decisive	ADJ
cet-15726	140	20	factors	factor	NOUN
cet-15726	140	21	for	for	ADP
cet-15726	140	22	the	the	DET
cet-15726	140	23	quality	quality	NOUN
cet-15726	140	24	of	of	ADP
cet-15726	140	25	the	the	DET
cet-15726	140	26	finished	finished	ADJ
cet-15726	140	27	film	film	NOUN
cet-15726	140	28	.	.	PUNCT
cet-15726	141	1	solutions	solution	NOUN
cet-15726	141	2	with	with	ADP
cet-15726	141	3	higher	high	ADJ
cet-15726	141	4	viscosity	viscosity	NOUN
cet-15726	141	5	tend	tend	VERB
cet-15726	141	6	to	to	PART
cet-15726	141	7	produce	produce	VERB
cet-15726	141	8	thicker	thick	ADJ
cet-15726	141	9	films	film	NOUN
cet-15726	141	10	and	and	CCONJ
cet-15726	141	11	can	can	AUX
cet-15726	141	12	lead	lead	VERB
cet-15726	141	13	to	to	PART
cet-15726	141	14	edge	edge	VERB
cet-15726	141	15	formation	formation	NOUN
cet-15726	141	16	due	due	ADP
cet-15726	141	17	to	to	ADP
cet-15726	141	18	slower	slow	ADJ
cet-15726	141	19	radial	radial	ADJ
cet-15726	141	20	spread	spread	NOUN
cet-15726	141	21	.	.	PUNCT
cet-15726	142	1	conversely	conversely	ADV
cet-15726	142	2	,	,	PUNCT
cet-15726	142	3	low	low	ADJ
cet-15726	142	4	viscosity	viscosity	NOUN
cet-15726	142	5	formulations	formulation	NOUN
cet-15726	142	6	result	result	VERB
cet-15726	142	7	in	in	ADP
cet-15726	142	8	films	film	NOUN
cet-15726	142	9	that	that	PRON
cet-15726	142	10	are	be	AUX
cet-15726	142	11	more	more	ADV
cet-15726	142	12	prone	prone	ADJ
cet-15726	142	13	to	to	ADP
cet-15726	142	14	instability	instability	NOUN
cet-15726	142	15	during	during	ADP
cet-15726	142	16	drying	dry	VERB
cet-15726	142	17	.	.	PUNCT
cet-15726	143	1	in	in	ADP
cet-15726	143	2	addition	addition	NOUN
cet-15726	143	3	,	,	PUNCT
cet-15726	143	4	a	a	DET
cet-15726	143	5	fast	fast	ADJ
cet-15726	143	6	evaporation	evaporation	NOUN
cet-15726	143	7	rate	rate	NOUN
cet-15726	143	8	can	can	AUX
cet-15726	143	9	lead	lead	VERB
cet-15726	143	10	to	to	ADP
cet-15726	143	11	defects	defect	NOUN
cet-15726	143	12	such	such	ADJ
cet-15726	143	13	as	as	ADP
cet-15726	143	14	pinholes	pinhole	NOUN
cet-15726	143	15	and	and	CCONJ
cet-15726	143	16	surface	surface	NOUN
cet-15726	143	17	roughness	roughness	NOUN
cet-15726	143	18	,	,	PUNCT
cet-15726	143	19	while	while	SCONJ
cet-15726	143	20	slower	slow	ADJ
cet-15726	143	21	evaporation	evaporation	NOUN
cet-15726	143	22	favors	favor	VERB
cet-15726	143	23	better	well	ADJ
cet-15726	143	24	molecular	molecular	ADJ
cet-15726	143	25	arrangement	arrangement	NOUN
cet-15726	143	26	and	and	CCONJ
cet-15726	143	27	uniformity	uniformity	NOUN
cet-15726	143	28	.	.	PUNCT
cet-15726	144	1	these	these	DET
cet-15726	144	2	results	result	NOUN
cet-15726	144	3	highlight	highlight	VERB
cet-15726	144	4	the	the	DET
cet-15726	144	5	need	need	NOUN
cet-15726	144	6	to	to	PART
cet-15726	144	7	optimize	optimize	VERB
cet-15726	144	8	both	both	DET
cet-15726	144	9	solution	solution	NOUN
cet-15726	144	10	properties	property	NOUN
cet-15726	144	11	and	and	CCONJ
cet-15726	144	12	processing	processing	NOUN
cet-15726	144	13	conditions	condition	NOUN
cet-15726	144	14	to	to	PART
cet-15726	144	15	obtain	obtain	VERB
cet-15726	144	16	high	high	ADJ
cet-15726	144	17	quality	quality	NOUN
cet-15726	144	18	spin	spin	NOUN
cet-15726	144	19	-	-	PUNCT
cet-15726	144	20	coating	coat	VERB
cet-15726	144	21	films	film	NOUN
cet-15726	144	22	.	.	PUNCT
cet-15726	145	1	understanding	understand	VERB
cet-15726	145	2	the	the	DET
cet-15726	145	3	origin	origin	NOUN
cet-15726	145	4	and	and	CCONJ
cet-15726	145	5	impact	impact	NOUN
cet-15726	145	6	of	of	ADP
cet-15726	145	7	each	each	DET
cet-15726	145	8	defect	defect	NOUN
cet-15726	145	9	is	be	AUX
cet-15726	145	10	key	key	ADJ
cet-15726	145	11	to	to	ADP
cet-15726	145	12	improving	improve	VERB
cet-15726	145	13	film	film	NOUN
cet-15726	145	14	quality	quality	NOUN
cet-15726	145	15	and	and	CCONJ
cet-15726	145	16	ensuring	ensure	VERB
cet-15726	145	17	reliable	reliable	ADJ
cet-15726	145	18	performance	performance	NOUN
cet-15726	145	19	in	in	ADP
cet-15726	145	20	applications	application	NOUN
cet-15726	145	21	ranging	range	VERB
cet-15726	145	22	from	from	ADP
cet-15726	145	23	optics	optic	NOUN
cet-15726	145	24	to	to	ADP
cet-15726	145	25	electronics	electronics	NOUN
cet-15726	145	26	(	(	PUNCT
cet-15726	145	27	tyona	tyona	NOUN
cet-15726	145	28	,	,	PUNCT
cet-15726	145	29	2013	2013	NUM
cet-15726	145	30	;	;	PUNCT
cet-15726	146	1	chou	chou	PROPN
cet-15726	146	2	et	et	PROPN
cet-15726	146	3	al	al	PROPN
cet-15726	146	4	.	.	PROPN
cet-15726	146	5	,	,	PUNCT
cet-15726	146	6	2021	2021	NUM
cet-15726	146	7	;	;	PUNCT
cet-15726	146	8	mouhamad	mouhamad	NOUN
cet-15726	146	9	et	et	PROPN
cet-15726	146	10	al	al	PROPN
cet-15726	146	11	.	.	PROPN
cet-15726	146	12	,	,	PUNCT
cet-15726	146	13	2014	2014	NUM
cet-15726	146	14	;	;	PUNCT
cet-15726	146	15	kalafatis	kalafatis	PROPN
cet-15726	146	16	et	et	PROPN
cet-15726	146	17	al	al	PROPN
cet-15726	146	18	.	.	PROPN
cet-15726	146	19	,	,	PUNCT
cet-15726	146	20	2024	2024	NUM
cet-15726	146	21	)	)	PUNCT
cet-15726	146	22	.	.	PUNCT
cet-15726	147	1	6	6	X
cet-15726	147	2	.	.	X
cet-15726	147	3	analysis	analysis	NOUN
cet-15726	147	4	of	of	ADP
cet-15726	147	5	films	film	NOUN
cet-15726	147	6	obtained	obtain	VERB
cet-15726	147	7	by	by	ADP
cet-15726	147	8	spin	spin	NOUN
cet-15726	147	9	coating	coating	NOUN
cet-15726	147	10	.	.	PUNCT
cet-15726	148	1	film	film	NOUN
cet-15726	148	2	uniformity	uniformity	NOUN
cet-15726	148	3	,	,	PUNCT
cet-15726	148	4	one	one	NUM
cet-15726	148	5	of	of	ADP
cet-15726	148	6	the	the	DET
cet-15726	148	7	most	most	ADV
cet-15726	148	8	critical	critical	ADJ
cet-15726	148	9	aspects	aspect	NOUN
cet-15726	148	10	,	,	PUNCT
cet-15726	148	11	can	can	AUX
cet-15726	148	12	be	be	AUX
cet-15726	148	13	visually	visually	ADV
cet-15726	148	14	assessed	assess	VERB
cet-15726	148	15	,	,	PUNCT
cet-15726	148	16	allowing	allow	VERB
cet-15726	148	17	for	for	ADP
cet-15726	148	18	immediate	immediate	ADJ
cet-15726	148	19	adjustments	adjustment	NOUN
cet-15726	148	20	to	to	ADP
cet-15726	148	21	experimental	experimental	ADJ
cet-15726	148	22	parameters	parameter	NOUN
cet-15726	148	23	to	to	PART
cet-15726	148	24	improve	improve	VERB
cet-15726	148	25	coating	coat	VERB
cet-15726	148	26	quality	quality	NOUN
cet-15726	148	27	.	.	PUNCT
cet-15726	149	1	however	however	ADV
cet-15726	149	2	,	,	PUNCT
cet-15726	149	3	a	a	DET
cet-15726	149	4	more	more	ADV
cet-15726	149	5	detailed	detailed	ADJ
cet-15726	149	6	surface	surface	NOUN
cet-15726	149	7	analysis	analysis	NOUN
cet-15726	149	8	requires	require	VERB
cet-15726	149	9	advanced	advanced	ADJ
cet-15726	149	10	microscopy	microscopy	NOUN
cet-15726	149	11	techniques	technique	NOUN
cet-15726	149	12	such	such	ADJ
cet-15726	149	13	as	as	ADP
cet-15726	149	14	optical	optical	ADJ
cet-15726	149	15	reflectance	reflectance	NOUN
cet-15726	149	16	microscopy	microscopy	NOUN
cet-15726	149	17	(	(	PUNCT
cet-15726	149	18	om	om	PROPN
cet-15726	149	19	)	)	PUNCT
cet-15726	149	20	,	,	PUNCT
cet-15726	149	21	scanning	scan	VERB
cet-15726	149	22	electron	electron	NOUN
cet-15726	149	23	microscopy	microscopy	NOUN
cet-15726	149	24	(	(	PUNCT
cet-15726	149	25	sem	sem	NOUN
cet-15726	149	26	)	)	PUNCT
cet-15726	149	27	,	,	PUNCT
cet-15726	149	28	and	and	CCONJ
cet-15726	149	29	atomic	atomic	ADJ
cet-15726	149	30	force	force	NOUN
cet-15726	149	31	microscopy	microscopy	NOUN
cet-15726	149	32	(	(	PUNCT
cet-15726	149	33	afm	afm	PROPN
cet-15726	149	34	)	)	PUNCT
cet-15726	149	35	,	,	PUNCT
cet-15726	149	36	which	which	PRON
cet-15726	149	37	provide	provide	VERB
cet-15726	149	38	precise	precise	ADJ
cet-15726	149	39	information	information	NOUN
cet-15726	149	40	on	on	ADP
cet-15726	149	41	surface	surface	NOUN
cet-15726	149	42	morphology	morphology	NOUN
cet-15726	149	43	and	and	CCONJ
cet-15726	149	44	identify	identify	VERB
cet-15726	149	45	structural	structural	ADJ
cet-15726	149	46	defects	defect	NOUN
cet-15726	149	47	that	that	PRON
cet-15726	149	48	may	may	AUX
cet-15726	149	49	affect	affect	VERB
cet-15726	149	50	film	film	NOUN
cet-15726	149	51	performance	performance	NOUN
cet-15726	149	52	(	(	PUNCT
cet-15726	149	53	kalafatis	kalafatis	NOUN
cet-15726	149	54	et	et	PROPN
cet-15726	149	55	al	al	PROPN
cet-15726	149	56	.	.	PROPN
cet-15726	149	57	,	,	PUNCT
cet-15726	149	58	2024	2024	NUM
cet-15726	149	59	)	)	PUNCT
cet-15726	149	60	.	.	PUNCT
cet-15726	150	1	in	in	ADP
cet-15726	150	2	addition	addition	NOUN
cet-15726	150	3	to	to	ADP
cet-15726	150	4	surface	surface	NOUN
cet-15726	150	5	characterization	characterization	NOUN
cet-15726	150	6	,	,	PUNCT
cet-15726	150	7	film	film	NOUN
cet-15726	150	8	thickness	thickness	NOUN
cet-15726	150	9	is	be	AUX
cet-15726	150	10	a	a	DET
cet-15726	150	11	crucial	crucial	ADJ
cet-15726	150	12	parameter	parameter	NOUN
cet-15726	150	13	for	for	ADP
cet-15726	150	14	evaluating	evaluate	VERB
cet-15726	150	15	coating	coat	VERB
cet-15726	150	16	quality	quality	NOUN
cet-15726	150	17	.	.	PUNCT
cet-15726	151	1	common	common	ADJ
cet-15726	151	2	measurement	measurement	NOUN
cet-15726	151	3	techniques	technique	NOUN
cet-15726	151	4	include	include	VERB
cet-15726	151	5	optical	optical	ADJ
cet-15726	151	6	and	and	CCONJ
cet-15726	151	7	direct	direct	ADJ
cet-15726	151	8	methods	method	NOUN
cet-15726	151	9	,	,	PUNCT
cet-15726	151	10	with	with	ADP
cet-15726	151	11	white	white	ADJ
cet-15726	151	12	light	light	PROPN
cet-15726	151	13	interferometry	interferometry	NOUN
cet-15726	151	14	(	(	PUNCT
cet-15726	151	15	wli	wli	PROPN
cet-15726	151	16	)	)	PUNCT
cet-15726	151	17	,	,	PUNCT
cet-15726	151	18	ellipsometry	ellipsometry	NOUN
cet-15726	151	19	,	,	PUNCT
cet-15726	151	20	and	and	CCONJ
cet-15726	151	21	scanning	scan	VERB
cet-15726	151	22	electron	electron	NOUN
cet-15726	151	23	microscopy	microscopy	NOUN
cet-15726	151	24	(	(	PUNCT
cet-15726	151	25	sem	sem	NOUN
cet-15726	151	26	)	)	PUNCT
cet-15726	151	27	being	be	AUX
cet-15726	151	28	among	among	ADP
cet-15726	151	29	the	the	DET
cet-15726	151	30	most	most	ADV
cet-15726	151	31	used	use	VERB
cet-15726	151	32	.	.	PUNCT
cet-15726	152	1	sem	sem	PROPN
cet-15726	152	2	is	be	AUX
cet-15726	152	3	particularly	particularly	ADV
cet-15726	152	4	favoured	favour	VERB
cet-15726	152	5	for	for	ADP
cet-15726	152	6	its	its	PRON
cet-15726	152	7	high	high	ADJ
cet-15726	152	8	-	-	PUNCT
cet-15726	152	9	resolution	resolution	NOUN
cet-15726	152	10	imaging	imaging	NOUN
cet-15726	152	11	,	,	PUNCT
cet-15726	152	12	which	which	PRON
cet-15726	152	13	enables	enable	VERB
cet-15726	152	14	precise	precise	ADJ
cet-15726	152	15	analysis	analysis	NOUN
cet-15726	152	16	of	of	ADP
cet-15726	152	17	both	both	DET
cet-15726	152	18	morphology	morphology	NOUN
cet-15726	152	19	and	and	CCONJ
cet-15726	152	20	layer	layer	NOUN
cet-15726	152	21	thickness	thickness	NOUN
cet-15726	152	22	.	.	PUNCT
cet-15726	153	1	to	to	PART
cet-15726	153	2	ensure	ensure	VERB
cet-15726	153	3	accurate	accurate	ADJ
cet-15726	153	4	thickness	thickness	NOUN
cet-15726	153	5	analysis	analysis	NOUN
cet-15726	153	6	,	,	PUNCT
cet-15726	153	7	the	the	DET
cet-15726	153	8	sample	sample	NOUN
cet-15726	153	9	must	must	AUX
cet-15726	153	10	be	be	AUX
cet-15726	153	11	properly	properly	ADV
cet-15726	153	12	prepared	prepare	VERB
cet-15726	153	13	.	.	PUNCT
cet-15726	154	1	the	the	DET
cet-15726	154	2	process	process	NOUN
cet-15726	154	3	begins	begin	VERB
cet-15726	154	4	by	by	ADP
cet-15726	154	5	embedding	embed	VERB
cet-15726	154	6	the	the	DET
cet-15726	154	7	coated	coated	ADJ
cet-15726	154	8	substrate	substrate	NOUN
cet-15726	154	9	in	in	ADP
cet-15726	154	10	epoxy	epoxy	NOUN
cet-15726	154	11	resin	resin	NOUN
cet-15726	154	12	to	to	PART
cet-15726	154	13	provide	provide	VERB
cet-15726	154	14	stability	stability	NOUN
cet-15726	154	15	and	and	CCONJ
cet-15726	154	16	prevent	prevent	VERB
cet-15726	154	17	mechanical	mechanical	ADJ
cet-15726	154	18	damage	damage	NOUN
cet-15726	154	19	.	.	PUNCT
cet-15726	155	1	after	after	ADP
cet-15726	155	2	curing	cure	VERB
cet-15726	155	3	,	,	PUNCT
cet-15726	155	4	a	a	DET
cet-15726	155	5	cross	cross	NOUN
cet-15726	155	6	-	-	NOUN
cet-15726	155	7	section	section	NOUN
cet-15726	155	8	is	be	AUX
cet-15726	155	9	prepared	prepare	VERB
cet-15726	155	10	to	to	PART
cet-15726	155	11	expose	expose	VERB
cet-15726	155	12	the	the	DET
cet-15726	155	13	film	film	NOUN
cet-15726	155	14	and	and	CCONJ
cet-15726	155	15	substrate	substrate	NOUN
cet-15726	155	16	.	.	PUNCT
cet-15726	156	1	for	for	ADP
cet-15726	156	2	precise	precise	ADJ
cet-15726	156	3	results	result	NOUN
cet-15726	156	4	,	,	PUNCT
cet-15726	156	5	the	the	DET
cet-15726	156	6	cut	cut	NOUN
cet-15726	156	7	must	must	AUX
cet-15726	156	8	use	use	VERB
cet-15726	156	9	an	an	DET
cet-15726	156	10	ultra	ultra	ADJ
cet-15726	156	11	-	-	ADJ
cet-15726	156	12	thin	thin	ADJ
cet-15726	156	13	wheel	wheel	NOUN
cet-15726	156	14	operated	operate	VERB
cet-15726	156	15	at	at	ADP
cet-15726	156	16	low	low	ADJ
cet-15726	156	17	speed	speed	NOUN
cet-15726	156	18	to	to	PART
cet-15726	156	19	avoid	avoid	VERB
cet-15726	156	20	deformations	deformation	NOUN
cet-15726	156	21	in	in	ADP
cet-15726	156	22	the	the	DET
cet-15726	156	23	film	film	NOUN
cet-15726	156	24	structure	structure	NOUN
cet-15726	156	25	(	(	PUNCT
cet-15726	156	26	tyona	tyona	NOUN
cet-15726	156	27	,	,	PUNCT
cet-15726	156	28	2013	2013	NUM
cet-15726	156	29	;	;	PUNCT
cet-15726	156	30	mouhamad	mouhamad	NOUN
cet-15726	156	31	et	et	PROPN
cet-15726	156	32	al	al	PROPN
cet-15726	156	33	.	.	PROPN
cet-15726	156	34	,	,	PUNCT
cet-15726	156	35	2014	2014	NUM
cet-15726	156	36	;	;	PUNCT
cet-15726	156	37	venezia	venezia	NOUN
cet-15726	156	38	,	,	PUNCT
cet-15726	156	39	2019	2019	NUM
cet-15726	156	40	;	;	PUNCT
cet-15726	156	41	chou	chou	PROPN
cet-15726	156	42	et	et	PROPN
cet-15726	156	43	al	al	PROPN
cet-15726	156	44	.	.	PROPN
cet-15726	156	45	,	,	PUNCT
cet-15726	156	46	2021	2021	NUM
cet-15726	156	47	;	;	PUNCT
cet-15726	156	48	kalafatis	kalafatis	PROPN
cet-15726	156	49	et	et	PROPN
cet-15726	156	50	al	al	PROPN
cet-15726	156	51	.	.	PROPN
cet-15726	156	52	,	,	PUNCT
cet-15726	156	53	2024	2024	NUM
cet-15726	156	54	;	;	PUNCT
cet-15726	156	55	basbus	basbus	NOUN
cet-15726	156	56	,	,	PUNCT
cet-15726	156	57	2024	2024	NUM
cet-15726	156	58	)	)	PUNCT
cet-15726	156	59	.	.	PUNCT
cet-15726	157	1	when	when	SCONJ
cet-15726	157	2	the	the	DET
cet-15726	157	3	sample	sample	NOUN
cet-15726	157	4	is	be	AUX
cet-15726	157	5	properly	properly	ADV
cet-15726	157	6	prepared	prepare	VERB
cet-15726	157	7	,	,	PUNCT
cet-15726	157	8	sem	sem	ADJ
cet-15726	157	9	analysis	analysis	NOUN
cet-15726	157	10	allows	allow	VERB
cet-15726	157	11	clear	clear	ADJ
cet-15726	157	12	observation	observation	NOUN
cet-15726	157	13	of	of	ADP
cet-15726	157	14	the	the	DET
cet-15726	157	15	interface	interface	NOUN
cet-15726	157	16	between	between	ADP
cet-15726	157	17	the	the	DET
cet-15726	157	18	film	film	NOUN
cet-15726	157	19	and	and	CCONJ
cet-15726	157	20	the	the	DET
cet-15726	157	21	substrate	substrate	NOUN
cet-15726	157	22	and	and	CCONJ
cet-15726	157	23	thus	thus	ADV
cet-15726	157	24	a	a	DET
cet-15726	157	25	direct	direct	ADJ
cet-15726	157	26	measurement	measurement	NOUN
cet-15726	157	27	of	of	ADP
cet-15726	157	28	the	the	DET
cet-15726	157	29	film	film	NOUN
cet-15726	157	30	thickness	thickness	NOUN
cet-15726	157	31	.	.	PUNCT
cet-15726	158	1	the	the	DET
cet-15726	158	2	high	high	ADJ
cet-15726	158	3	magnification	magnification	NOUN
cet-15726	158	4	and	and	CCONJ
cet-15726	158	5	depth	depth	NOUN
cet-15726	158	6	of	of	ADP
cet-15726	158	7	field	field	NOUN
cet-15726	158	8	of	of	ADP
cet-15726	158	9	electron	electron	NOUN
cet-15726	158	10	microscopy	microscopy	NOUN
cet-15726	158	11	enables	enable	VERB
cet-15726	158	12	605	605	NUM
cet-15726	158	13	the	the	DET
cet-15726	158	14	identification	identification	NOUN
cet-15726	158	15	of	of	ADP
cet-15726	158	16	thickness	thickness	NOUN
cet-15726	158	17	variations	variation	NOUN
cet-15726	158	18	,	,	PUNCT
cet-15726	158	19	structural	structural	ADJ
cet-15726	158	20	defects	defect	NOUN
cet-15726	158	21	,	,	PUNCT
cet-15726	158	22	and	and	CCONJ
cet-15726	158	23	irregularities	irregularity	NOUN
cet-15726	158	24	in	in	ADP
cet-15726	158	25	the	the	DET
cet-15726	158	26	coating	coating	NOUN
cet-15726	158	27	,	,	PUNCT
cet-15726	158	28	contributing	contribute	VERB
cet-15726	158	29	to	to	ADP
cet-15726	158	30	the	the	DET
cet-15726	158	31	quality	quality	NOUN
cet-15726	158	32	control	control	NOUN
cet-15726	158	33	of	of	ADP
cet-15726	158	34	the	the	DET
cet-15726	158	35	spin	spin	NOUN
cet-15726	158	36	coating	coating	NOUN
cet-15726	158	37	process	process	NOUN
cet-15726	158	38	(	(	PUNCT
cet-15726	158	39	tyona	tyona	NOUN
cet-15726	158	40	,	,	PUNCT
cet-15726	158	41	2013	2013	NUM
cet-15726	158	42	;	;	PUNCT
cet-15726	158	43	mouhamad	mouhamad	NOUN
cet-15726	158	44	et	et	PROPN
cet-15726	158	45	al	al	PROPN
cet-15726	158	46	.	.	PROPN
cet-15726	158	47	,	,	PUNCT
cet-15726	158	48	2014	2014	NUM
cet-15726	158	49	)	)	PUNCT
cet-15726	158	50	.	.	PUNCT
cet-15726	159	1	figure	figure	VERB
cet-15726	159	2	3	3	NUM
cet-15726	159	3	presents	present	VERB
cet-15726	159	4	a	a	DET
cet-15726	159	5	scanning	scanning	NOUN
cet-15726	159	6	electron	electron	NOUN
cet-15726	159	7	microscopy	microscopy	NOUN
cet-15726	159	8	(	(	PUNCT
cet-15726	159	9	sem	sem	NOUN
cet-15726	159	10	)	)	PUNCT
cet-15726	159	11	image	image	NOUN
cet-15726	159	12	of	of	ADP
cet-15726	159	13	a	a	DET
cet-15726	159	14	film	film	NOUN
cet-15726	159	15	produced	produce	VERB
cet-15726	159	16	using	use	VERB
cet-15726	159	17	the	the	DET
cet-15726	159	18	spin	spin	NOUN
cet-15726	159	19	coating	coating	NOUN
cet-15726	159	20	technique	technique	NOUN
cet-15726	159	21	.	.	PUNCT
cet-15726	160	1	substrate	substrate	NOUN
cet-15726	160	2	of	of	ADP
cet-15726	160	3	gadolinium	gadolinium	NOUN
cet-15726	160	4	-	-	PUNCT
cet-15726	160	5	doped	dope	VERB
cet-15726	160	6	ceria	ceria	NOUN
cet-15726	160	7	(	(	PUNCT
cet-15726	160	8	gdc	gdc	PROPN
cet-15726	160	9	)	)	PUNCT
cet-15726	160	10	and	and	CCONJ
cet-15726	160	11	film	film	NOUN
cet-15726	160	12	of	of	ADP
cet-15726	160	13	lanthanum	lanthanum	ADJ
cet-15726	160	14	strontium	strontium	NOUN
cet-15726	160	15	cobalt	cobalt	NOUN
cet-15726	160	16	ferrite	ferrite	NOUN
cet-15726	160	17	(	(	PUNCT
cet-15726	160	18	lscf	lscf	NOUN
cet-15726	160	19	)	)	PUNCT
cet-15726	160	20	.	.	PUNCT
cet-15726	161	1	figure	figure	VERB
cet-15726	161	2	3	3	NUM
cet-15726	161	3	–	–	PUNCT
cet-15726	161	4	on	on	ADP
cet-15726	161	5	the	the	DET
cet-15726	161	6	left	left	NOUN
cet-15726	161	7	,	,	PUNCT
cet-15726	161	8	a	a	DET
cet-15726	161	9	cross	cross	ADJ
cet-15726	161	10	-	-	ADJ
cet-15726	161	11	sectional	sectional	ADJ
cet-15726	161	12	view	view	NOUN
cet-15726	161	13	,	,	PUNCT
cet-15726	161	14	and	and	CCONJ
cet-15726	161	15	on	on	ADP
cet-15726	161	16	the	the	DET
cet-15726	161	17	right	right	NOUN
cet-15726	161	18	,	,	PUNCT
cet-15726	161	19	a	a	DET
cet-15726	161	20	top	top	ADJ
cet-15726	161	21	-	-	PUNCT
cet-15726	161	22	view	view	NOUN
cet-15726	161	23	image	image	NOUN
cet-15726	161	24	of	of	ADP
cet-15726	161	25	a	a	DET
cet-15726	161	26	film	film	NOUN
cet-15726	161	27	produced	produce	VERB
cet-15726	161	28	using	use	VERB
cet-15726	161	29	the	the	DET
cet-15726	161	30	spin	spin	NOUN
cet-15726	161	31	coating	coating	NOUN
cet-15726	161	32	technique	technique	NOUN
cet-15726	161	33	.	.	PUNCT
cet-15726	162	1	7	7	X
cet-15726	162	2	.	.	X
cet-15726	162	3	final	final	ADJ
cet-15726	162	4	considerations	consideration	NOUN
cet-15726	162	5	the	the	DET
cet-15726	162	6	technique	technique	NOUN
cet-15726	162	7	of	of	ADP
cet-15726	162	8	centrifugation	centrifugation	NOUN
cet-15726	162	9	coating	coating	NOUN
cet-15726	162	10	,	,	PUNCT
cet-15726	162	11	commonly	commonly	ADV
cet-15726	162	12	referred	refer	VERB
cet-15726	162	13	to	to	ADP
cet-15726	162	14	as	as	ADP
cet-15726	162	15	spin	spin	NOUN
cet-15726	162	16	coating	coating	NOUN
cet-15726	162	17	,	,	PUNCT
cet-15726	162	18	is	be	AUX
cet-15726	162	19	widely	widely	ADV
cet-15726	162	20	used	use	VERB
cet-15726	162	21	to	to	PART
cet-15726	162	22	produce	produce	VERB
cet-15726	162	23	thin	thin	ADJ
cet-15726	162	24	films	film	NOUN
cet-15726	162	25	on	on	ADP
cet-15726	162	26	flat	flat	ADJ
cet-15726	162	27	substrates	substrate	NOUN
cet-15726	162	28	of	of	ADP
cet-15726	162	29	various	various	ADJ
cet-15726	162	30	shapes	shape	NOUN
cet-15726	162	31	and	and	CCONJ
cet-15726	162	32	dimensions	dimension	NOUN
cet-15726	162	33	.	.	PUNCT
cet-15726	163	1	due	due	ADP
cet-15726	163	2	to	to	ADP
cet-15726	163	3	its	its	PRON
cet-15726	163	4	simplicity	simplicity	NOUN
cet-15726	163	5	,	,	PUNCT
cet-15726	163	6	the	the	DET
cet-15726	163	7	required	require	VERB
cet-15726	163	8	equipment	equipment	NOUN
cet-15726	163	9	is	be	AUX
cet-15726	163	10	easily	easily	ADV
cet-15726	163	11	accessible	accessible	ADJ
cet-15726	163	12	and	and	CCONJ
cet-15726	163	13	inexpensive	inexpensive	ADJ
cet-15726	163	14	,	,	PUNCT
cet-15726	163	15	making	make	VERB
cet-15726	163	16	it	it	PRON
cet-15726	163	17	particularly	particularly	ADV
cet-15726	163	18	attractive	attractive	ADJ
cet-15726	163	19	for	for	ADP
cet-15726	163	20	laboratory	laboratory	NOUN
cet-15726	163	21	-	-	PUNCT
cet-15726	163	22	scale	scale	NOUN
cet-15726	163	23	research	research	NOUN
cet-15726	163	24	applications	application	NOUN
cet-15726	163	25	.	.	PUNCT
cet-15726	164	1	however	however	ADV
cet-15726	164	2	,	,	PUNCT
cet-15726	164	3	to	to	PART
cet-15726	164	4	obtain	obtain	VERB
cet-15726	164	5	high	high	ADJ
cet-15726	164	6	-	-	PUNCT
cet-15726	164	7	quality	quality	NOUN
cet-15726	164	8	films	film	NOUN
cet-15726	164	9	,	,	PUNCT
cet-15726	164	10	numerous	numerous	ADJ
cet-15726	164	11	parameters	parameter	NOUN
cet-15726	164	12	must	must	AUX
cet-15726	164	13	be	be	AUX
cet-15726	164	14	precisely	precisely	ADV
cet-15726	164	15	controlled	control	VERB
cet-15726	164	16	,	,	PUNCT
cet-15726	164	17	including	include	VERB
cet-15726	164	18	the	the	DET
cet-15726	164	19	concentration	concentration	NOUN
cet-15726	164	20	of	of	ADP
cet-15726	164	21	the	the	DET
cet-15726	164	22	solution	solution	NOUN
cet-15726	164	23	,	,	PUNCT
cet-15726	164	24	the	the	DET
cet-15726	164	25	choice	choice	NOUN
cet-15726	164	26	of	of	ADP
cet-15726	164	27	solvent	solvent	NOUN
cet-15726	164	28	,	,	PUNCT
cet-15726	164	29	the	the	DET
cet-15726	164	30	rotation	rotation	NOUN
cet-15726	164	31	speed	speed	NOUN
cet-15726	164	32	,	,	PUNCT
cet-15726	164	33	the	the	DET
cet-15726	164	34	duration	duration	NOUN
cet-15726	164	35	of	of	ADP
cet-15726	164	36	spinning	spinning	NOUN
cet-15726	164	37	and	and	CCONJ
cet-15726	164	38	drying	dry	VERB
cet-15726	164	39	,	,	PUNCT
cet-15726	164	40	and	and	CCONJ
cet-15726	164	41	the	the	DET
cet-15726	164	42	deposition	deposition	NOUN
cet-15726	164	43	method	method	NOUN
cet-15726	164	44	,	,	PUNCT
cet-15726	164	45	whether	whether	SCONJ
cet-15726	164	46	static	static	ADJ
cet-15726	164	47	or	or	CCONJ
cet-15726	164	48	dynamic	dynamic	ADJ
cet-15726	164	49	.	.	PUNCT
cet-15726	165	1	this	this	DET
cet-15726	165	2	technique	technique	NOUN
cet-15726	165	3	enables	enable	VERB
cet-15726	165	4	the	the	DET
cet-15726	165	5	production	production	NOUN
cet-15726	165	6	of	of	ADP
cet-15726	165	7	films	film	NOUN
cet-15726	165	8	with	with	ADP
cet-15726	165	9	variable	variable	ADJ
cet-15726	165	10	thickness	thickness	NOUN
cet-15726	165	11	and	and	CCONJ
cet-15726	165	12	multilayer	multilayer	ADJ
cet-15726	165	13	structures	structure	NOUN
cet-15726	165	14	and	and	CCONJ
cet-15726	165	15	is	be	AUX
cet-15726	165	16	therefore	therefore	ADV
cet-15726	165	17	suitable	suitable	ADJ
cet-15726	165	18	for	for	ADP
cet-15726	165	19	applications	application	NOUN
cet-15726	165	20	in	in	ADP
cet-15726	165	21	various	various	ADJ
cet-15726	165	22	scientific	scientific	ADJ
cet-15726	165	23	and	and	CCONJ
cet-15726	165	24	technological	technological	ADJ
cet-15726	165	25	fields	field	NOUN
cet-15726	165	26	.	.	PUNCT
cet-15726	166	1	in	in	ADP
cet-15726	166	2	addition	addition	NOUN
cet-15726	166	3	to	to	ADP
cet-15726	166	4	its	its	PRON
cet-15726	166	5	extensive	extensive	ADJ
cet-15726	166	6	use	use	NOUN
cet-15726	166	7	in	in	ADP
cet-15726	166	8	academic	academic	ADJ
cet-15726	166	9	and	and	CCONJ
cet-15726	166	10	experimental	experimental	ADJ
cet-15726	166	11	fields	field	NOUN
cet-15726	166	12	,	,	PUNCT
cet-15726	166	13	spin	spin	NOUN
cet-15726	166	14	coating	coating	NOUN
cet-15726	166	15	is	be	AUX
cet-15726	166	16	also	also	ADV
cet-15726	166	17	becoming	become	VERB
cet-15726	166	18	increasingly	increasingly	ADV
cet-15726	166	19	important	important	ADJ
cet-15726	166	20	in	in	ADP
cet-15726	166	21	industry	industry	NOUN
cet-15726	166	22	for	for	ADP
cet-15726	166	23	the	the	DET
cet-15726	166	24	production	production	NOUN
cet-15726	166	25	of	of	ADP
cet-15726	166	26	optoelectronic	optoelectronic	ADJ
cet-15726	166	27	devices	device	NOUN
cet-15726	166	28	,	,	PUNCT
cet-15726	166	29	biosensors	biosensor	NOUN
cet-15726	166	30	and	and	CCONJ
cet-15726	166	31	coatings	coating	NOUN
cet-15726	166	32	for	for	ADP
cet-15726	166	33	advanced	advanced	ADJ
cet-15726	166	34	functional	functional	ADJ
cet-15726	166	35	surfaces	surface	NOUN
cet-15726	166	36	.	.	PUNCT
cet-15726	167	1	references	reference	NOUN
cet-15726	167	2	basbus	basbus	NOUN
cet-15726	167	3	,	,	PUNCT
cet-15726	167	4	j.	j.	PROPN
cet-15726	167	5	f.	f.	PROPN
cet-15726	167	6	,	,	PUNCT
cet-15726	167	7	cademartori	cademartori	PROPN
cet-15726	167	8	,	,	PUNCT
cet-15726	167	9	d.	d.	PROPN
cet-15726	167	10	,	,	PUNCT
cet-15726	167	11	asensio	asensio	PROPN
cet-15726	167	12	,	,	PUNCT
cet-15726	167	13	a.	a.	NOUN
cet-15726	167	14	m.	m.	NOUN
cet-15726	167	15	,	,	PUNCT
cet-15726	167	16	clematis	clematis	PROPN
cet-15726	167	17	,	,	PUNCT
cet-15726	167	18	d.	d.	PROPN
cet-15726	167	19	,	,	PUNCT
cet-15726	167	20	savio	savio	PROPN
cet-15726	167	21	,	,	PUNCT
cet-15726	167	22	l.	l.	PROPN
cet-15726	167	23	,	,	PUNCT
cet-15726	167	24	pani	pani	PROPN
cet-15726	167	25	,	,	PUNCT
cet-15726	167	26	m.	m.	NOUN
cet-15726	167	27	,	,	PUNCT
cet-15726	167	28	gallus	gallus	NOUN
cet-15726	167	29	,	,	PUNCT
cet-15726	167	30	e.	e.	PROPN
cet-15726	167	31	,	,	PUNCT
cet-15726	167	32	carpanese	carpanese	PROPN
cet-15726	167	33	,	,	PUNCT
cet-15726	167	34	m.	m.	NOUN
cet-15726	167	35	p.	p.	PROPN
cet-15726	167	36	,	,	PUNCT
cet-15726	167	37	barbucci	barbucci	PROPN
cet-15726	167	38	,	,	PUNCT
cet-15726	167	39	a.	a.	NOUN
cet-15726	167	40	,	,	PUNCT
cet-15726	167	41	presto	presto	NOUN
cet-15726	167	42	,	,	PUNCT
cet-15726	167	43	s.	s.	PROPN
cet-15726	167	44	,	,	PUNCT
cet-15726	167	45	&	&	CCONJ
cet-15726	167	46	viviani	viviani	PROPN
cet-15726	167	47	,	,	PUNCT
cet-15726	167	48	m.	m.	NOUN
cet-15726	167	49	,	,	PUNCT
cet-15726	167	50	2024	2024	NUM
cet-15726	167	51	,	,	PUNCT
cet-15726	167	52	study	study	NOUN
cet-15726	167	53	of	of	ADP
cet-15726	167	54	a	a	DET
cet-15726	167	55	novel	novel	ADJ
cet-15726	167	56	microstructured	microstructured	ADJ
cet-15726	167	57	air	air	NOUN
cet-15726	167	58	electrode	electrode	NOUN
cet-15726	167	59	/	/	SYM
cet-15726	167	60	electrolyte	electrolyte	NOUN
cet-15726	167	61	interface	interface	NOUN
cet-15726	167	62	for	for	ADP
cet-15726	167	63	solid	solid	ADJ
cet-15726	167	64	oxide	oxide	NOUN
cet-15726	167	65	cells	cell	NOUN
cet-15726	167	66	,	,	PUNCT
cet-15726	167	67	applied	apply	VERB
cet-15726	167	68	surface	surface	NOUN
cet-15726	167	69	science	science	NOUN
cet-15726	167	70	,	,	PUNCT
cet-15726	167	71	652	652	NUM
cet-15726	167	72	,	,	PUNCT
cet-15726	167	73	159372	159372	NUM
cet-15726	167	74	.	.	PUNCT
cet-15726	168	1	cardoso	cardoso	PROPN
cet-15726	168	2	w.	w.	PROPN
cet-15726	168	3	,	,	PUNCT
cet-15726	168	4	di	di	PROPN
cet-15726	168	5	felice	felice	PROPN
cet-15726	168	6	r.	r.	PROPN
cet-15726	168	7	,	,	PUNCT
cet-15726	168	8	baptista	baptista	PROPN
cet-15726	168	9	r.c	r.c	PROPN
cet-15726	168	10	.	.	PROPN
cet-15726	168	11	,	,	PUNCT
cet-15726	168	12	2021	2021	NUM
cet-15726	168	13	,	,	PUNCT
cet-15726	168	14	mathematical	mathematical	ADJ
cet-15726	168	15	modeling	modeling	NOUN
cet-15726	168	16	of	of	ADP
cet-15726	168	17	a	a	DET
cet-15726	168	18	solid	solid	ADJ
cet-15726	168	19	oxide	oxide	NOUN
cet-15726	168	20	fuel	fuel	NOUN
cet-15726	168	21	cell	cell	NOUN
cet-15726	168	22	operating	operate	VERB
cet-15726	168	23	on	on	ADP
cet-15726	168	24	biogas	biogas	NOUN
cet-15726	168	25	,	,	PUNCT
cet-15726	168	26	bulletin	bulletin	NOUN
cet-15726	168	27	of	of	ADP
cet-15726	168	28	electrical	electrical	ADJ
cet-15726	168	29	engineering	engineering	NOUN
cet-15726	168	30	and	and	CCONJ
cet-15726	168	31	informatics	informatic	NOUN
cet-15726	168	32	,	,	PUNCT
cet-15726	168	33	10(6	10(6	ADJ
cet-15726	168	34	)	)	PUNCT
cet-15726	168	35	,	,	PUNCT
cet-15726	168	36	2929–2942	2929–2942	NUM
cet-15726	168	37	.	.	PUNCT
cet-15726	169	1	chou	chou	PROPN
cet-15726	169	2	,	,	PUNCT
cet-15726	169	3	f.	f.	PROPN
cet-15726	169	4	c.	c.	PROPN
cet-15726	169	5	,	,	PUNCT
cet-15726	169	6	wang	wang	PROPN
cet-15726	169	7	,	,	PUNCT
cet-15726	169	8	m.-w	m.-w	PROPN
cet-15726	169	9	.	.	PROPN
cet-15726	169	10	,	,	PUNCT
cet-15726	169	11	gong	gong	PROPN
cet-15726	169	12	,	,	PUNCT
cet-15726	169	13	s.-c	s.-c	PROPN
cet-15726	169	14	.	.	PROPN
cet-15726	169	15	,	,	PUNCT
cet-15726	169	16	&	&	CCONJ
cet-15726	169	17	yang	yang	PROPN
cet-15726	169	18	,	,	PUNCT
cet-15726	169	19	z.-g	z.-g	PROPN
cet-15726	169	20	.	.	PROPN
cet-15726	169	21	,	,	PUNCT
cet-15726	169	22	2001	2001	NUM
cet-15726	169	23	,	,	PUNCT
cet-15726	169	24	reduction	reduction	NOUN
cet-15726	169	25	of	of	ADP
cet-15726	169	26	photoresist	photoresist	ADJ
cet-15726	169	27	usage	usage	NOUN
cet-15726	169	28	during	during	ADP
cet-15726	169	29	spin	spin	NOUN
cet-15726	169	30	coating	coating	NOUN
cet-15726	169	31	,	,	PUNCT
cet-15726	169	32	journal	journal	NOUN
cet-15726	169	33	of	of	ADP
cet-15726	169	34	electronic	electronic	ADJ
cet-15726	169	35	materials	material	NOUN
cet-15726	169	36	,	,	PUNCT
cet-15726	169	37	30(4	30(4	NUM
cet-15726	169	38	)	)	PUNCT
cet-15726	169	39	,	,	PUNCT
cet-15726	169	40	432	432	NUM
cet-15726	169	41	-	-	SYM
cet-15726	169	42	437	437	NUM
cet-15726	169	43	.	.	PUNCT
cet-15726	170	1	kalafatis	kalafatis	PROPN
cet-15726	170	2	,	,	PUNCT
cet-15726	170	3	a.	a.	NOUN
cet-15726	170	4	,	,	PUNCT
cet-15726	170	5	theofylaktos	theofylaktos	PROPN
cet-15726	170	6	,	,	PUNCT
cet-15726	170	7	l.	l.	PROPN
cet-15726	170	8	,	,	PUNCT
cet-15726	170	9	&	&	CCONJ
cet-15726	170	10	stergiopoulos	stergiopoulos	PROPN
cet-15726	170	11	,	,	PUNCT
cet-15726	170	12	t.	t.	PROPN
cet-15726	170	13	,	,	PUNCT
cet-15726	170	14	2024	2024	NUM
cet-15726	170	15	,	,	PUNCT
cet-15726	170	16	spin	spin	NOUN
cet-15726	170	17	coating	coat	VERB
cet-15726	170	18	on	on	ADP
cet-15726	170	19	a	a	DET
cet-15726	170	20	budget	budget	NOUN
cet-15726	170	21	:	:	PUNCT
cet-15726	170	22	a	a	DET
cet-15726	170	23	3d	3d	NOUN
cet-15726	170	24	-	-	PUNCT
cet-15726	170	25	printed	print	VERB
cet-15726	170	26	all	all	ADV
cet-15726	170	27	-	-	ADJ
cet-15726	170	28	mechanical	mechanical	ADJ
cet-15726	170	29	alternative	alternative	NOUN
cet-15726	170	30	for	for	ADP
cet-15726	170	31	cost	cost	NOUN
cet-15726	170	32	-	-	PUNCT
cet-15726	170	33	effective	effective	ADJ
cet-15726	170	34	thin	thin	ADJ
cet-15726	170	35	-	-	PUNCT
cet-15726	170	36	film	film	NOUN
cet-15726	170	37	deposition	deposition	NOUN
cet-15726	170	38	,	,	PUNCT
cet-15726	170	39	hardwarex	hardwarex	PROPN
cet-15726	170	40	,	,	PUNCT
cet-15726	170	41	19	19	NUM
cet-15726	170	42	,	,	PUNCT
cet-15726	170	43	e00547	e00547	ADJ
cet-15726	170	44	.	.	PUNCT
cet-15726	171	1	mouhamad	mouhamad	NOUN
cet-15726	171	2	,	,	PUNCT
cet-15726	171	3	y.	y.	NOUN
cet-15726	171	4	,	,	PUNCT
cet-15726	171	5	mokarian	mokarian	ADJ
cet-15726	171	6	-	-	PUNCT
cet-15726	171	7	tabari	tabari	ADJ
cet-15726	171	8	,	,	PUNCT
cet-15726	171	9	p.	p.	PROPN
cet-15726	171	10	,	,	PUNCT
cet-15726	171	11	clarke	clarke	PROPN
cet-15726	171	12	,	,	PUNCT
cet-15726	171	13	n.	n.	PROPN
cet-15726	171	14	,	,	PUNCT
cet-15726	171	15	jones	jones	PROPN
cet-15726	171	16	,	,	PUNCT
cet-15726	171	17	r.	r.	PROPN
cet-15726	171	18	a.	a.	PROPN
cet-15726	171	19	l.	l.	PROPN
cet-15726	171	20	,	,	PUNCT
cet-15726	171	21	&	&	CCONJ
cet-15726	171	22	geoghegan	geoghegan	NOUN
cet-15726	171	23	,	,	PUNCT
cet-15726	171	24	m.	m.	NOUN
cet-15726	171	25	,	,	PUNCT
cet-15726	171	26	2014	2014	NUM
cet-15726	171	27	,	,	PUNCT
cet-15726	171	28	dynamics	dynamic	NOUN
cet-15726	171	29	of	of	ADP
cet-15726	171	30	polymer	polymer	NOUN
cet-15726	171	31	film	film	NOUN
cet-15726	171	32	formation	formation	NOUN
cet-15726	171	33	during	during	ADP
cet-15726	171	34	spin	spin	NOUN
cet-15726	171	35	coating	coating	NOUN
cet-15726	171	36	,	,	PUNCT
cet-15726	171	37	journal	journal	NOUN
cet-15726	171	38	of	of	ADP
cet-15726	171	39	applied	applied	ADJ
cet-15726	171	40	physics	physic	NOUN
cet-15726	171	41	,	,	PUNCT
cet-15726	171	42	116	116	NUM
cet-15726	171	43	,	,	PUNCT
cet-15726	171	44	123513	123513	NUM
cet-15726	171	45	.	.	PUNCT
cet-15726	172	1	tyona	tyona	PROPN
cet-15726	172	2	,	,	PUNCT
cet-15726	172	3	m.	m.	PROPN
cet-15726	172	4	d.	d.	PROPN
cet-15726	172	5	,	,	PUNCT
cet-15726	172	6	2013	2013	NUM
cet-15726	172	7	,	,	PUNCT
cet-15726	172	8	a	a	DET
cet-15726	172	9	theoretical	theoretical	ADJ
cet-15726	172	10	study	study	NOUN
cet-15726	172	11	on	on	ADP
cet-15726	172	12	spin	spin	NOUN
cet-15726	172	13	coating	coating	NOUN
cet-15726	172	14	technique	technique	NOUN
cet-15726	172	15	,	,	PUNCT
cet-15726	172	16	adv	adv	PROPN
cet-15726	172	17	.	.	PUNCT
cet-15726	172	18	in	in	ADP
cet-15726	172	19	materials	material	NOUN
cet-15726	172	20	research	research	NOUN
cet-15726	172	21	,	,	PUNCT
cet-15726	172	22	2(4	2(4	NUM
cet-15726	172	23	)	)	PUNCT
cet-15726	172	24	,	,	PUNCT
cet-15726	172	25	195	195	NUM
cet-15726	172	26	-	-	SYM
cet-15726	172	27	208	208	NUM
cet-15726	172	28	.	.	PUNCT
cet-15726	173	1	venezia	venezia	PROPN
cet-15726	173	2	,	,	PUNCT
cet-15726	173	3	e.	e.	PROPN
cet-15726	173	4	,	,	PUNCT
cet-15726	173	5	viviani	viviani	PROPN
cet-15726	173	6	,	,	PUNCT
cet-15726	173	7	m.	m.	NOUN
cet-15726	173	8	,	,	PUNCT
cet-15726	173	9	presto	presto	NOUN
cet-15726	173	10	,	,	PUNCT
cet-15726	173	11	s.	s.	PROPN
cet-15726	173	12	,	,	PUNCT
cet-15726	173	13	kumar	kumar	PROPN
cet-15726	173	14	,	,	PUNCT
cet-15726	173	15	v.	v.	PROPN
cet-15726	173	16	,	,	PUNCT
cet-15726	173	17	&	&	CCONJ
cet-15726	173	18	tomov	tomov	ADJ
cet-15726	173	19	,	,	PUNCT
cet-15726	173	20	r.	r.	PROPN
cet-15726	173	21	i.	i.	PROPN
cet-15726	173	22	,	,	PUNCT
cet-15726	173	23	2019	2019	NUM
cet-15726	173	24	,	,	PUNCT
cet-15726	173	25	inkjet	inkjet	NOUN
cet-15726	173	26	printing	printing	NOUN
cet-15726	173	27	functionalization	functionalization	NOUN
cet-15726	173	28	of	of	ADP
cet-15726	173	29	sofc	sofc	NOUN
cet-15726	173	30	lscf	lscf	NOUN
cet-15726	173	31	cathodes	cathode	NOUN
cet-15726	173	32	,	,	PUNCT
cet-15726	173	33	nanomaterials	nanomaterial	NOUN
cet-15726	173	34	,	,	PUNCT
cet-15726	173	35	9(4	9(4	NUM
cet-15726	173	36	)	)	PUNCT
cet-15726	173	37	,	,	PUNCT
cet-15726	173	38	654	654	NUM
cet-15726	173	39	.	.	PUNCT
cet-15726	174	1	vorotilov	vorotilov	PROPN
cet-15726	174	2	,	,	PUNCT
cet-15726	174	3	k.	k.	PROPN
cet-15726	174	4	,	,	PUNCT
cet-15726	174	5	petrovsky	petrovsky	ADV
cet-15726	174	6	,	,	PUNCT
cet-15726	174	7	v.	v.	ADV
cet-15726	174	8	,	,	PUNCT
cet-15726	174	9	&	&	CCONJ
cet-15726	174	10	vasiljev	vasiljev	ADJ
cet-15726	174	11	,	,	PUNCT
cet-15726	174	12	v.	v.	ADP
cet-15726	174	13	,	,	PUNCT
cet-15726	174	14	1995	1995	NUM
cet-15726	174	15	,	,	PUNCT
cet-15726	174	16	spin	spin	NOUN
cet-15726	174	17	coating	coating	NOUN
cet-15726	174	18	process	process	NOUN
cet-15726	174	19	of	of	ADP
cet-15726	174	20	sol	sol	NOUN
cet-15726	174	21	-	-	PUNCT
cet-15726	174	22	gel	gel	NOUN
cet-15726	174	23	silicate	silicate	NOUN
cet-15726	174	24	films	film	NOUN
cet-15726	174	25	deposition	deposition	VERB
cet-15726	174	26	:	:	PUNCT
cet-15726	174	27	effect	effect	NOUN
cet-15726	174	28	of	of	ADP
cet-15726	174	29	spin	spin	NOUN
cet-15726	174	30	speed	speed	NOUN
cet-15726	174	31	and	and	CCONJ
cet-15726	174	32	processing	processing	NOUN
cet-15726	174	33	temperature	temperature	NOUN
cet-15726	174	34	,	,	PUNCT
cet-15726	174	35	journal	journal	NOUN
cet-15726	174	36	of	of	ADP
cet-15726	174	37	sol	sol	NOUN
cet-15726	174	38	-	-	PUNCT
cet-15726	174	39	gel	gel	NOUN
cet-15726	174	40	science	science	NOUN
cet-15726	174	41	and	and	CCONJ
cet-15726	174	42	technology	technology	NOUN
cet-15726	174	43	,	,	PUNCT
cet-15726	174	44	5	5	NUM
cet-15726	174	45	,	,	PUNCT
cet-15726	174	46	173	173	NUM
cet-15726	174	47	-	-	SYM
cet-15726	174	48	183	183	NUM
cet-15726	174	49	.	.	PUNCT
cet-15726	175	1	yada	yada	NOUN
cet-15726	175	2	,	,	PUNCT
cet-15726	175	3	t.	t.	PROPN
cet-15726	175	4	,	,	PUNCT
cet-15726	175	5	1995	1995	NUM
cet-15726	175	6	,	,	PUNCT
cet-15726	175	7	thin	thin	ADJ
cet-15726	175	8	-	-	PUNCT
cet-15726	175	9	film	film	NOUN
cet-15726	175	10	formation	formation	NOUN
cet-15726	175	11	by	by	ADP
cet-15726	175	12	spin	spin	NOUN
cet-15726	175	13	coating	coating	NOUN
cet-15726	175	14	:	:	PUNCT
cet-15726	175	15	characteristics	characteristic	NOUN
cet-15726	175	16	of	of	ADP
cet-15726	175	17	a	a	DET
cet-15726	175	18	positive	positive	ADJ
cet-15726	175	19	photoresist	photoresist	NOUN
cet-15726	175	20	,	,	PUNCT
cet-15726	175	21	japanese	japanese	ADJ
cet-15726	175	22	journal	journal	NOUN
cet-15726	175	23	of	of	ADP
cet-15726	175	24	applied	applied	ADJ
cet-15726	175	25	physics	physic	NOUN
cet-15726	175	26	,	,	PUNCT
cet-15726	175	27	34	34	NUM
cet-15726	175	28	,	,	PUNCT
cet-15726	175	29	6279	6279	NUM
cet-15726	175	30	.	.	PUNCT
cet-15726	176	1	zhou	zhou	PROPN
cet-15726	176	2	j.	j.	PROPN
cet-15726	176	3	,	,	PUNCT
cet-15726	176	4	zhao	zhao	PROPN
cet-15726	176	5	x.	x.	PROPN
cet-15726	176	6	,	,	PUNCT
cet-15726	176	7	yuan	yuan	PROPN
cet-15726	176	8	y.	y.	PROPN
cet-15726	176	9	,	,	PUNCT
cet-15726	176	10	li	li	PROPN
cet-15726	176	11	j.	j.	PROPN
cet-15726	176	12	,	,	PUNCT
cet-15726	176	13	yu	yu	PROPN
cet-15726	176	14	m.	m.	PROPN
cet-15726	176	15	,	,	PUNCT
cet-15726	176	16	fan	fan	PROPN
cet-15726	176	17	y.	y.	PROPN
cet-15726	176	18	,	,	PUNCT
cet-15726	176	19	2020	2020	NUM
cet-15726	176	20	,	,	PUNCT
cet-15726	176	21	operational	operational	ADJ
cet-15726	176	22	performance	performance	NOUN
cet-15726	176	23	of	of	ADP
cet-15726	176	24	a	a	DET
cet-15726	176	25	novel	novel	ADJ
cet-15726	176	26	heat	heat	NOUN
cet-15726	176	27	pump	pump	NOUN
cet-15726	176	28	coupled	couple	VERB
cet-15726	176	29	with	with	ADP
cet-15726	176	30	mini	mini	NOUN
cet-15726	176	31	-	-	NOUN
cet-15726	176	32	channel	channel	NOUN
cet-15726	176	33	pv	pv	NOUN
cet-15726	176	34	/	/	SYM
cet-15726	176	35	t	t	NOUN
cet-15726	176	36	and	and	CCONJ
cet-15726	176	37	thermal	thermal	ADJ
cet-15726	176	38	panel	panel	NOUN
cet-15726	176	39	i	i	PRON
cet-15726	176	40	low	low	VERB
cet-15726	176	41	solar	solar	ADJ
cet-15726	176	42	radiation	radiation	NOUN
cet-15726	176	43	,	,	PUNCT
cet-15726	176	44	energy	energy	NOUN
cet-15726	176	45	and	and	CCONJ
cet-15726	176	46	built	build	VERB
cet-15726	176	47	environment	environment	NOUN
cet-15726	176	48	,	,	PUNCT
cet-15726	176	49	1	1	NUM
cet-15726	176	50	,	,	PUNCT
cet-15726	176	51	50	50	NUM
cet-15726	176	52	-	-	SYM
cet-15726	176	53	59	59	NUM
cet-15726	176	54	.	.	PUNCT
cet-15726	176	55	606	606	NUM
cet-15726	176	56	26cardoso-e2dt.pdf	26cardoso-e2dt.pdf	NUM
cet-15726	176	57	spin	spin	NOUN
cet-15726	176	58	coating	coating	NOUN
cet-15726	176	59	:	:	PUNCT
cet-15726	176	60	process	process	NOUN
cet-15726	176	61	,	,	PUNCT
cet-15726	176	62	applications	application	NOUN
cet-15726	176	63	,	,	PUNCT
cet-15726	176	64	challenges	challenge	NOUN
cet-15726	176	65	,	,	PUNCT
cet-15726	176	66	and	and	CCONJ
cet-15726	176	67	characterization	characterization	NOUN
cet-15726	176	68	techniques	technique	NOUN