id	sid	tid	token	lemma	pos
cet-2318	1	1	chemical	chemical	NOUN
cet-2318	1	2	engineering	engineering	NOUN
cet-2318	1	3	transactions	transaction	NOUN
cet-2318	1	4	vol	vol	NOUN
cet-2318	1	5	.	.	PROPN
cet-2318	1	6	57	57	NUM
cet-2318	1	7	,	,	PUNCT
cet-2318	1	8	2017	2017	NUM
cet-2318	1	9	a	a	DET
cet-2318	1	10	publication	publication	NOUN
cet-2318	1	11	of	of	ADP
cet-2318	1	12	the	the	DET
cet-2318	1	13	italian	italian	ADJ
cet-2318	1	14	association	association	NOUN
cet-2318	1	15	of	of	ADP
cet-2318	1	16	chemical	chemical	PROPN
cet-2318	1	17	engineering	engineering	NOUN
cet-2318	1	18	online	online	ADV
cet-2318	1	19	at	at	ADP
cet-2318	1	20	www.aidic.it/cet	www.aidic.it/cet	PROPN
cet-2318	1	21	guest	guest	NOUN
cet-2318	1	22	editors	editor	NOUN
cet-2318	1	23	:	:	PUNCT
cet-2318	1	24	sauro	sauro	PROPN
cet-2318	1	25	pierucci	pierucci	PROPN
cet-2318	1	26	,	,	PUNCT
cet-2318	1	27	jiří	jiří	NOUN
cet-2318	1	28	jaromír	jaromír	PROPN
cet-2318	1	29	klemeš	klemeš	PROPN
cet-2318	1	30	,	,	PUNCT
cet-2318	1	31	laura	laura	PROPN
cet-2318	1	32	piazza	piazza	PROPN
cet-2318	1	33	,	,	PUNCT
cet-2318	1	34	serafim	serafim	NOUN
cet-2318	1	35	bakalis	bakali	VERB
cet-2318	1	36	copyright	copyright	NOUN
cet-2318	1	37	©	©	PROPN
cet-2318	1	38	2017	2017	NUM
cet-2318	1	39	,	,	PUNCT
cet-2318	1	40	aidic	aidic	ADJ
cet-2318	1	41	servizi	servizi	PROPN
cet-2318	1	42	s.r.l	s.r.l	PROPN
cet-2318	1	43	.	.	PUNCT
cet-2318	2	1	isbn	isbn	ADJ
cet-2318	2	2	978	978	NUM
cet-2318	2	3	-	-	SYM
cet-2318	2	4	88	88	NUM
cet-2318	2	5	-	-	PUNCT
cet-2318	2	6	9560848	9560848	NUM
cet-2318	2	7	-	-	SYM
cet-2318	2	8	8	8	NUM
cet-2318	2	9	;	;	PUNCT
cet-2318	2	10	issn	issn	PROPN
cet-2318	2	11	2283	2283	NUM
cet-2318	2	12	-	-	SYM
cet-2318	2	13	9216	9216	NUM
cet-2318	2	14	new	new	ADJ
cet-2318	2	15	designed	design	VERB
cet-2318	2	16	procedure	procedure	NOUN
cet-2318	2	17	for	for	ADP
cet-2318	2	18	g	g	PROPN
cet-2318	2	19	/	/	SYM
cet-2318	2	20	sio2	sio2	PROPN
cet-2318	2	21	/	/	SYM
cet-2318	2	22	sic	sic	ADJ
cet-2318	2	23	nanoheterojunctions	nanoheterojunction	NOUN
cet-2318	2	24	growth	growth	NOUN
cet-2318	2	25	on	on	ADP
cet-2318	2	26	recycled	recycled	ADJ
cet-2318	2	27	3c	3c	NUM
cet-2318	2	28	-	-	PUNCT
cet-2318	2	29	sic	sic	ADJ
cet-2318	2	30	powder	powder	NOUN
cet-2318	2	31	maria	maria	PROPN
cet-2318	2	32	sarnoa	sarnoa	PROPN
cet-2318	2	33	,	,	PUNCT
cet-2318	2	34	sergio	sergio	PROPN
cet-2318	2	35	galvagnob	galvagnob	PROPN
cet-2318	2	36	,	,	PUNCT
cet-2318	2	37	rosangela	rosangela	PROPN
cet-2318	2	38	piscitellia	piscitellia	PROPN
cet-2318	2	39	,	,	PUNCT
cet-2318	2	40	sabrina	sabrina	PROPN
cet-2318	2	41	portofinob	portofinob	PROPN
cet-2318	2	42	,	,	PUNCT
cet-2318	2	43	claudia	claudia	PROPN
cet-2318	2	44	cirillo*a	cirillo*a	NUM
cet-2318	2	45	,	,	PUNCT
cet-2318	2	46	paolo	paolo	PROPN
cet-2318	2	47	ciambellia	ciambellia	VERB
cet-2318	2	48	a	a	DET
cet-2318	2	49	department	department	NOUN
cet-2318	2	50	of	of	ADP
cet-2318	2	51	industrial	industrial	ADJ
cet-2318	2	52	engineering	engineering	NOUN
cet-2318	2	53	diin	diin	NOUN
cet-2318	2	54	and	and	CCONJ
cet-2318	2	55	research	research	NOUN
cet-2318	2	56	centre	centre	NOUN
cet-2318	2	57	nano_mates	nano_mates	PROPN
cet-2318	2	58	,	,	PUNCT
cet-2318	2	59	university	university	NOUN
cet-2318	2	60	of	of	ADP
cet-2318	2	61	salerno	salerno	PROPN
cet-2318	2	62	,	,	PUNCT
cet-2318	2	63	via	via	ADP
cet-2318	2	64	giovanni	giovanni	PROPN
cet-2318	2	65	paolo	paolo	PROPN
cet-2318	2	66	ii	ii	PROPN
cet-2318	2	67	,	,	PUNCT
cet-2318	2	68	132	132	NUM
cet-2318	2	69	,	,	PUNCT
cet-2318	2	70	84084	84084	NUM
cet-2318	2	71	fisciano	fisciano	ADJ
cet-2318	2	72	(	(	PUNCT
cet-2318	2	73	sa	sa	PROPN
cet-2318	2	74	)	)	PUNCT
cet-2318	2	75	,	,	PUNCT
cet-2318	2	76	italy	italy	PROPN
cet-2318	2	77	b	b	PROPN
cet-2318	2	78	department	department	PROPN
cet-2318	2	79	of	of	ADP
cet-2318	2	80	environment	environment	PROPN
cet-2318	2	81	,	,	PUNCT
cet-2318	2	82	global	global	ADJ
cet-2318	2	83	change	change	NOUN
cet-2318	2	84	and	and	CCONJ
cet-2318	2	85	sustainable	sustainable	ADJ
cet-2318	2	86	development	development	NOUN
cet-2318	2	87	,	,	PUNCT
cet-2318	2	88	c.r	c.r	PROPN
cet-2318	2	89	.	.	PROPN
cet-2318	2	90	enea	enea	PROPN
cet-2318	2	91	portici	portici	PROPN
cet-2318	2	92	,	,	PUNCT
cet-2318	2	93	via	via	ADP
cet-2318	2	94	vecchio	vecchio	PROPN
cet-2318	2	95	macello	macello	PROPN
cet-2318	2	96	loc	loc	PROPN
cet-2318	2	97	.	.	PUNCT
cet-2318	3	1	granatello	granatello	PROPN
cet-2318	3	2	,	,	PUNCT
cet-2318	3	3	80055	80055	NUM
cet-2318	3	4	portici	portici	NOUN
cet-2318	3	5	,	,	PUNCT
cet-2318	3	6	na	na	PROPN
cet-2318	3	7	,	,	PUNCT
cet-2318	3	8	italy	italy	PROPN
cet-2318	3	9	clcirillo@unisa.it	clcirillo@unisa.it	PROPN
cet-2318	3	10	few	few	ADJ
cet-2318	3	11	layer	layer	NOUN
cet-2318	3	12	graphene	graphene	NOUN
cet-2318	3	13	/	/	SYM
cet-2318	3	14	sio2	sio2	PROPN
cet-2318	3	15	/	/	SYM
cet-2318	3	16	sic	sic	ADJ
cet-2318	3	17	(	(	PUNCT
cet-2318	3	18	g	g	NOUN
cet-2318	3	19	/	/	SYM
cet-2318	3	20	sio2	sio2	NOUN
cet-2318	3	21	/	/	SYM
cet-2318	3	22	sic	sic	ADJ
cet-2318	3	23	)	)	PUNCT
cet-2318	3	24	core	core	NOUN
cet-2318	3	25	-	-	PUNCT
cet-2318	3	26	layers	layer	NOUN
cet-2318	3	27	-	-	PUNCT
cet-2318	3	28	sheath	sheath	NOUN
cet-2318	3	29	nano	nano	NOUN
cet-2318	3	30	-	-	PUNCT
cet-2318	3	31	heterojunctions	heterojunction	NOUN
cet-2318	3	32	were	be	AUX
cet-2318	3	33	obtained	obtain	VERB
cet-2318	3	34	by	by	ADP
cet-2318	3	35	a	a	DET
cet-2318	3	36	new	new	ADJ
cet-2318	3	37	easy	easy	ADJ
cet-2318	3	38	and	and	CCONJ
cet-2318	3	39	cheap	cheap	ADJ
cet-2318	3	40	designed	design	VERB
cet-2318	3	41	procedure	procedure	NOUN
cet-2318	3	42	by	by	ADP
cet-2318	3	43	thermal	thermal	ADJ
cet-2318	3	44	annealing	annealing	NOUN
cet-2318	3	45	at	at	ADP
cet-2318	3	46	atmospheric	atmospheric	ADJ
cet-2318	3	47	pressure	pressure	NOUN
cet-2318	3	48	and	and	CCONJ
cet-2318	3	49	low	low	ADJ
cet-2318	3	50	temperature	temperature	NOUN
cet-2318	3	51	on	on	ADP
cet-2318	3	52	3c	3c	NUM
cet-2318	3	53	-	-	PUNCT
cet-2318	3	54	sic	sic	ADJ
cet-2318	3	55	powder	powder	NOUN
cet-2318	3	56	derived	derive	VERB
cet-2318	3	57	from	from	ADP
cet-2318	3	58	exhausted	exhausted	ADJ
cet-2318	3	59	activated	activated	ADJ
cet-2318	3	60	carbon	carbon	NOUN
cet-2318	3	61	.	.	PUNCT
cet-2318	4	1	recycled	recycle	VERB
cet-2318	4	2	sic	sic	NOUN
cet-2318	4	3	was	be	AUX
cet-2318	4	4	chosen	choose	VERB
cet-2318	4	5	as	as	ADP
cet-2318	4	6	growth	growth	NOUN
cet-2318	4	7	substrate	substrate	NOUN
cet-2318	4	8	to	to	PART
cet-2318	4	9	realize	realize	VERB
cet-2318	4	10	a	a	DET
cet-2318	4	11	convenient	convenient	ADJ
cet-2318	4	12	process	process	NOUN
cet-2318	4	13	and	and	CCONJ
cet-2318	4	14	to	to	PART
cet-2318	4	15	increase	increase	VERB
cet-2318	4	16	the	the	DET
cet-2318	4	17	added	add	VERB
cet-2318	4	18	value	value	NOUN
cet-2318	4	19	of	of	ADP
cet-2318	4	20	the	the	DET
cet-2318	4	21	recycled	recycled	ADJ
cet-2318	4	22	,	,	PUNCT
cet-2318	4	23	combining	combine	VERB
cet-2318	4	24	the	the	DET
cet-2318	4	25	favourable	favourable	ADJ
cet-2318	4	26	properties	property	NOUN
cet-2318	4	27	of	of	ADP
cet-2318	4	28	different	different	ADJ
cet-2318	4	29	substances	substance	NOUN
cet-2318	4	30	.	.	PUNCT
cet-2318	5	1	sic	sic	ADJ
cet-2318	5	2	powder	powder	NOUN
cet-2318	5	3	and	and	CCONJ
cet-2318	5	4	the	the	DET
cet-2318	5	5	advanced	advanced	ADJ
cet-2318	5	6	materials	material	NOUN
cet-2318	5	7	obtained	obtain	VERB
cet-2318	5	8	were	be	AUX
cet-2318	5	9	carefully	carefully	ADV
cet-2318	5	10	characterized	characterize	VERB
cet-2318	5	11	by	by	ADP
cet-2318	5	12	the	the	DET
cet-2318	5	13	combining	combine	VERB
cet-2318	5	14	use	use	NOUN
cet-2318	5	15	of	of	ADP
cet-2318	5	16	different	different	ADJ
cet-2318	5	17	techniques	technique	NOUN
cet-2318	5	18	:	:	PUNCT
cet-2318	5	19	transmission	transmission	NOUN
cet-2318	5	20	electron	electron	NOUN
cet-2318	5	21	microscopy	microscopy	NOUN
cet-2318	5	22	(	(	PUNCT
cet-2318	5	23	tem	tem	PROPN
cet-2318	5	24	)	)	PUNCT
cet-2318	5	25	with	with	ADP
cet-2318	5	26	edax	edax	PROPN
cet-2318	5	27	probe	probe	NOUN
cet-2318	5	28	,	,	PUNCT
cet-2318	5	29	scanning	scan	VERB
cet-2318	5	30	electron	electron	NOUN
cet-2318	5	31	microscopy	microscopy	NOUN
cet-2318	5	32	(	(	PUNCT
cet-2318	5	33	sem	sem	NOUN
cet-2318	5	34	)	)	PUNCT
cet-2318	5	35	,	,	PUNCT
cet-2318	5	36	x	x	X
cet-2318	5	37	-	-	NOUN
cet-2318	5	38	ray	ray	NOUN
cet-2318	5	39	diffraction	diffraction	NOUN
cet-2318	5	40	analysis	analysis	NOUN
cet-2318	5	41	,	,	PUNCT
cet-2318	5	42	raman	raman	NOUN
cet-2318	5	43	spectroscopy	spectroscopy	NOUN
cet-2318	5	44	,	,	PUNCT
cet-2318	5	45	thermogravimetric	thermogravimetric	ADJ
cet-2318	5	46	analysis	analysis	NOUN
cet-2318	5	47	coupled	couple	VERB
cet-2318	5	48	with	with	ADP
cet-2318	5	49	quadrupole	quadrupole	NOUN
cet-2318	5	50	mass	mass	NOUN
cet-2318	5	51	detector	detector	NOUN
cet-2318	5	52	(	(	PUNCT
cet-2318	5	53	tg	tg	PROPN
cet-2318	5	54	-	-	PUNCT
cet-2318	5	55	dtg	dtg	PROPN
cet-2318	5	56	-	-	PUNCT
cet-2318	5	57	mass	mass	NOUN
cet-2318	5	58	)	)	PUNCT
cet-2318	5	59	.	.	PUNCT
cet-2318	6	1	1	1	X
cet-2318	6	2	.	.	X
cet-2318	6	3	introduction	introduction	NOUN
cet-2318	6	4	graphene	graphene	NOUN
cet-2318	6	5	has	have	AUX
cet-2318	6	6	attracted	attract	VERB
cet-2318	6	7	vast	vast	ADJ
cet-2318	6	8	interest	interest	NOUN
cet-2318	6	9	,	,	PUNCT
cet-2318	6	10	in	in	ADP
cet-2318	6	11	recent	recent	ADJ
cet-2318	6	12	years	year	NOUN
cet-2318	6	13	,	,	PUNCT
cet-2318	6	14	thanks	thank	NOUN
cet-2318	6	15	to	to	ADP
cet-2318	6	16	the	the	DET
cet-2318	6	17	very	very	ADV
cet-2318	6	18	high	high	ADJ
cet-2318	6	19	number	number	NOUN
cet-2318	6	20	of	of	ADP
cet-2318	6	21	application	application	NOUN
cet-2318	6	22	’s	’s	PART
cet-2318	6	23	fields	field	NOUN
cet-2318	6	24	.	.	PUNCT
cet-2318	7	1	silicon	silicon	PROPN
cet-2318	7	2	carbide	carbide	PROPN
cet-2318	7	3	is	be	AUX
cet-2318	7	4	a	a	DET
cet-2318	7	5	wide	wide	ADJ
cet-2318	7	6	-	-	PUNCT
cet-2318	7	7	bandgap	bandgap	NOUN
cet-2318	7	8	semiconductor	semiconductor	NOUN
cet-2318	7	9	with	with	ADP
cet-2318	7	10	many	many	ADJ
cet-2318	7	11	interesting	interesting	ADJ
cet-2318	7	12	properties	property	NOUN
cet-2318	7	13	,	,	PUNCT
cet-2318	7	14	such	such	ADJ
cet-2318	7	15	as	as	ADP
cet-2318	7	16	high	high	ADJ
cet-2318	7	17	hardness	hardness	NOUN
cet-2318	7	18	,	,	PUNCT
cet-2318	7	19	large	large	ADJ
cet-2318	7	20	thermal	thermal	ADJ
cet-2318	7	21	conductivity	conductivity	NOUN
cet-2318	7	22	,	,	PUNCT
cet-2318	7	23	a	a	DET
cet-2318	7	24	low	low	ADJ
cet-2318	7	25	coefficient	coefficient	NOUN
cet-2318	7	26	of	of	ADP
cet-2318	7	27	thermal	thermal	ADJ
cet-2318	7	28	expansion	expansion	NOUN
cet-2318	7	29	,	,	PUNCT
cet-2318	7	30	and	and	CCONJ
cet-2318	7	31	excellent	excellent	ADJ
cet-2318	7	32	resistance	resistance	NOUN
cet-2318	7	33	to	to	ADP
cet-2318	7	34	erosion	erosion	NOUN
cet-2318	7	35	and	and	CCONJ
cet-2318	7	36	corrosion	corrosion	NOUN
cet-2318	7	37	.	.	PUNCT
cet-2318	8	1	during	during	ADP
cet-2318	8	2	the	the	DET
cet-2318	8	3	fast	fast	ADJ
cet-2318	8	4	development	development	NOUN
cet-2318	8	5	of	of	ADP
cet-2318	8	6	nanotechnology	nanotechnology	NOUN
cet-2318	8	7	in	in	ADP
cet-2318	8	8	the	the	DET
cet-2318	8	9	past	past	ADJ
cet-2318	8	10	decade	decade	NOUN
cet-2318	8	11	,	,	PUNCT
cet-2318	8	12	research	research	NOUN
cet-2318	8	13	effort	effort	NOUN
cet-2318	8	14	has	have	AUX
cet-2318	8	15	been	be	AUX
cet-2318	8	16	focused	focus	VERB
cet-2318	8	17	on	on	ADP
cet-2318	8	18	the	the	DET
cet-2318	8	19	preparation	preparation	NOUN
cet-2318	8	20	,	,	PUNCT
cet-2318	8	21	thought	think	VERB
cet-2318	8	22	different	different	ADJ
cet-2318	8	23	approaches	approach	NOUN
cet-2318	8	24	,	,	PUNCT
cet-2318	8	25	of	of	ADP
cet-2318	8	26	nanometer	nanometer	NOUN
cet-2318	8	27	-	-	PUNCT
cet-2318	8	28	sized	sized	ADJ
cet-2318	8	29	functional	functional	ADJ
cet-2318	8	30	electronic	electronic	ADJ
cet-2318	8	31	devices	device	NOUN
cet-2318	8	32	.	.	PUNCT
cet-2318	9	1	nano	nano	NOUN
cet-2318	9	2	-	-	PUNCT
cet-2318	9	3	scaled	scale	VERB
cet-2318	9	4	electronic	electronic	ADJ
cet-2318	9	5	devices	device	NOUN
cet-2318	9	6	with	with	ADP
cet-2318	9	7	a	a	DET
cet-2318	9	8	variety	variety	NOUN
cet-2318	9	9	of	of	ADP
cet-2318	9	10	functions	function	NOUN
cet-2318	9	11	may	may	AUX
cet-2318	9	12	be	be	AUX
cet-2318	9	13	realized	realize	VERB
cet-2318	9	14	by	by	ADP
cet-2318	9	15	combining	combine	VERB
cet-2318	9	16	different	different	ADJ
cet-2318	9	17	nanomaterials	nanomaterial	NOUN
cet-2318	9	18	.	.	PUNCT
cet-2318	10	1	for	for	ADP
cet-2318	10	2	the	the	DET
cet-2318	10	3	intrinsic	intrinsic	ADJ
cet-2318	10	4	characteristic	characteristic	NOUN
cet-2318	10	5	of	of	ADP
cet-2318	10	6	sic	sic	ADJ
cet-2318	10	7	and	and	CCONJ
cet-2318	10	8	graphitic	graphitic	ADJ
cet-2318	10	9	carbon	carbon	NOUN
cet-2318	10	10	,	,	PUNCT
cet-2318	10	11	and	and	CCONJ
cet-2318	10	12	looking	look	VERB
cet-2318	10	13	at	at	ADP
cet-2318	10	14	the	the	DET
cet-2318	10	15	possibility	possibility	NOUN
cet-2318	10	16	to	to	PART
cet-2318	10	17	obtain	obtain	VERB
cet-2318	10	18	a	a	DET
cet-2318	10	19	metallic	metallic	ADJ
cet-2318	10	20	-	-	PUNCT
cet-2318	10	21	insulator	insulator	NOUN
cet-2318	10	22	-	-	PUNCT
cet-2318	10	23	semiconductor	semiconductor	NOUN
cet-2318	10	24	geometry	geometry	NOUN
cet-2318	10	25	,	,	PUNCT
cet-2318	10	26	coaxial	coaxial	ADJ
cet-2318	10	27	nanocable	nanocable	ADJ
cet-2318	10	28	of	of	ADP
cet-2318	10	29	sic	sic	ADJ
cet-2318	10	30	-	-	PUNCT
cet-2318	10	31	sio2	sio2	NOUN
cet-2318	10	32	–	–	PUNCT
cet-2318	10	33	carbon	carbon	NOUN
cet-2318	10	34	(	(	PUNCT
cet-2318	10	35	zhang	zhang	X
cet-2318	10	36	et	et	PROPN
cet-2318	10	37	al	al	PROPN
cet-2318	10	38	.	.	PROPN
cet-2318	10	39	,	,	PUNCT
cet-2318	10	40	1998	1998	NUM
cet-2318	10	41	;	;	PUNCT
cet-2318	10	42	li	li	PROPN
cet-2318	10	43	et	et	PROPN
cet-2318	10	44	al	al	PROPN
cet-2318	10	45	.	.	PROPN
cet-2318	10	46	,	,	PUNCT
cet-2318	10	47	2004	2004	NUM
cet-2318	10	48	)	)	PUNCT
cet-2318	10	49	and	and	CCONJ
cet-2318	10	50	chains	chain	NOUN
cet-2318	10	51	of	of	ADP
cet-2318	10	52	carbon	carbon	NOUN
cet-2318	10	53	nanotubes	nanotube	NOUN
cet-2318	10	54	-	-	PUNCT
cet-2318	10	55	sic	sic	ADJ
cet-2318	10	56	,	,	PUNCT
cet-2318	10	57	have	have	AUX
cet-2318	10	58	been	be	AUX
cet-2318	10	59	also	also	ADV
cet-2318	10	60	prepared	prepare	VERB
cet-2318	10	61	by	by	ADP
cet-2318	10	62	cvd	cvd	PROPN
cet-2318	10	63	or	or	CCONJ
cet-2318	10	64	reactive	reactive	ADJ
cet-2318	10	65	laser	laser	NOUN
cet-2318	10	66	ablation	ablation	NOUN
cet-2318	10	67	(	(	PUNCT
cet-2318	10	68	panda	panda	NOUN
cet-2318	10	69	et	et	PROPN
cet-2318	10	70	al	al	PROPN
cet-2318	10	71	.	.	PROPN
cet-2318	10	72	,	,	PUNCT
cet-2318	10	73	2010	2010	NUM
cet-2318	10	74	;	;	PUNCT
cet-2318	10	75	cai	cai	PROPN
cet-2318	10	76	et	et	PROPN
cet-2318	10	77	al	al	PROPN
cet-2318	10	78	.	.	PROPN
cet-2318	10	79	,	,	PUNCT
cet-2318	10	80	2007	2007	NUM
cet-2318	10	81	)	)	PUNCT
cet-2318	10	82	.	.	PUNCT
cet-2318	11	1	although	although	SCONJ
cet-2318	11	2	the	the	DET
cet-2318	11	3	thermal	thermal	ADJ
cet-2318	11	4	oxidation	oxidation	NOUN
cet-2318	11	5	of	of	ADP
cet-2318	11	6	sic	sic	NOUN
cet-2318	11	7	to	to	PART
cet-2318	11	8	sio2	sio2	PROPN
cet-2318	11	9	is	be	AUX
cet-2318	11	10	a	a	DET
cet-2318	11	11	common	common	ADJ
cet-2318	11	12	and	and	CCONJ
cet-2318	11	13	know	know	ADJ
cet-2318	11	14	procedure	procedure	NOUN
cet-2318	11	15	in	in	ADP
cet-2318	11	16	the	the	DET
cet-2318	11	17	microelectronic	microelectronic	ADJ
cet-2318	11	18	industry	industry	NOUN
cet-2318	11	19	,	,	PUNCT
cet-2318	11	20	it	it	PRON
cet-2318	11	21	is	be	AUX
cet-2318	11	22	rather	rather	ADV
cet-2318	11	23	complicated	complicated	ADJ
cet-2318	11	24	because	because	SCONJ
cet-2318	11	25	the	the	DET
cet-2318	11	26	product	product	NOUN
cet-2318	11	27	could	could	AUX
cet-2318	11	28	results	result	VERB
cet-2318	11	29	in	in	ADP
cet-2318	11	30	mixed	mixed	ADJ
cet-2318	11	31	oxides	oxide	NOUN
cet-2318	11	32	containing	contain	VERB
cet-2318	11	33	c	c	PROPN
cet-2318	11	34	species	specie	NOUN
cet-2318	11	35	.	.	PUNCT
cet-2318	12	1	numerous	numerous	ADJ
cet-2318	12	2	paper	paper	NOUN
cet-2318	12	3	have	have	AUX
cet-2318	12	4	been	be	AUX
cet-2318	12	5	published	publish	VERB
cet-2318	12	6	on	on	ADP
cet-2318	12	7	this	this	DET
cet-2318	12	8	theme	theme	NOUN
cet-2318	12	9	(	(	PUNCT
cet-2318	12	10	schürmann	schürmann	PROPN
cet-2318	12	11	et	et	PROPN
cet-2318	12	12	al	al	PROPN
cet-2318	12	13	.	.	PROPN
cet-2318	12	14	,	,	PUNCT
cet-2318	12	15	2006	2006	NUM
cet-2318	12	16	)	)	PUNCT
cet-2318	12	17	,	,	PUNCT
cet-2318	12	18	one	one	NUM
cet-2318	12	19	of	of	ADP
cet-2318	12	20	the	the	DET
cet-2318	12	21	key	key	ADJ
cet-2318	12	22	aspect	aspect	NOUN
cet-2318	12	23	was	be	AUX
cet-2318	12	24	the	the	DET
cet-2318	12	25	diffusion	diffusion	NOUN
cet-2318	12	26	of	of	ADP
cet-2318	12	27	co	co	NOUN
cet-2318	12	28	and	and	CCONJ
cet-2318	12	29	co2	co2	NOUN
cet-2318	12	30	molecules	molecule	NOUN
cet-2318	12	31	in	in	ADP
cet-2318	12	32	sio2	sio2	NOUN
cet-2318	12	33	during	during	ADP
cet-2318	12	34	sic	sic	ADJ
cet-2318	12	35	oxidation	oxidation	NOUN
cet-2318	12	36	,	,	PUNCT
cet-2318	12	37	whereas	whereas	SCONJ
cet-2318	12	38	a	a	DET
cet-2318	12	39	challenging	challenging	ADJ
cet-2318	12	40	goal	goal	NOUN
cet-2318	12	41	was	be	AUX
cet-2318	12	42	to	to	PART
cet-2318	12	43	avoid	avoid	VERB
cet-2318	12	44	carbon	carbon	NOUN
cet-2318	12	45	intermixing	intermixing	NOUN
cet-2318	12	46	in	in	ADP
cet-2318	12	47	the	the	DET
cet-2318	12	48	sio2	sio2	PROPN
cet-2318	12	49	interlayer	interlayer	NOUN
cet-2318	12	50	and	and	CCONJ
cet-2318	12	51	covering	cover	VERB
cet-2318	12	52	the	the	DET
cet-2318	12	53	outer	outer	ADJ
cet-2318	12	54	surface	surface	NOUN
cet-2318	12	55	by	by	ADP
cet-2318	12	56	a	a	DET
cet-2318	12	57	carbon	carbon	NOUN
cet-2318	12	58	layer	layer	NOUN
cet-2318	12	59	,	,	PUNCT
cet-2318	12	60	e.g.	e.g.	ADV
cet-2318	12	61	few	few	ADJ
cet-2318	12	62	layer	layer	NOUN
cet-2318	12	63	graphene	graphene	NOUN
cet-2318	12	64	.	.	PUNCT
cet-2318	13	1	here	here	ADV
cet-2318	13	2	we	we	PRON
cet-2318	13	3	report	report	VERB
cet-2318	13	4	,	,	PUNCT
cet-2318	13	5	for	for	ADP
cet-2318	13	6	the	the	DET
cet-2318	13	7	first	first	ADJ
cet-2318	13	8	time	time	NOUN
cet-2318	13	9	,	,	PUNCT
cet-2318	13	10	the	the	DET
cet-2318	13	11	preparation	preparation	NOUN
cet-2318	13	12	of	of	ADP
cet-2318	13	13	few	few	ADJ
cet-2318	13	14	layer	layer	NOUN
cet-2318	13	15	graphene	graphene	NOUN
cet-2318	13	16	/	/	SYM
cet-2318	13	17	sio2	sio2	PROPN
cet-2318	13	18	/	/	SYM
cet-2318	13	19	sic	sic	ADJ
cet-2318	13	20	(	(	PUNCT
cet-2318	13	21	g	g	NOUN
cet-2318	13	22	/	/	SYM
cet-2318	13	23	sio2	sio2	NOUN
cet-2318	13	24	/	/	SYM
cet-2318	13	25	sic	sic	ADJ
cet-2318	13	26	)	)	PUNCT
cet-2318	13	27	nanofilaments	nanofilament	NOUN
cet-2318	13	28	by	by	ADP
cet-2318	13	29	a	a	DET
cet-2318	13	30	new	new	ADJ
cet-2318	13	31	designed	design	VERB
cet-2318	13	32	procedures	procedure	NOUN
cet-2318	13	33	,	,	PUNCT
cet-2318	13	34	consisting	consist	VERB
cet-2318	13	35	in	in	ADP
cet-2318	13	36	a	a	DET
cet-2318	13	37	thermal	thermal	ADJ
cet-2318	13	38	annealing	annealing	NOUN
cet-2318	13	39	under	under	ADP
cet-2318	13	40	few	few	ADJ
cet-2318	13	41	percents	percent	NOUN
cet-2318	13	42	of	of	ADP
cet-2318	13	43	oxygen	oxygen	NOUN
cet-2318	13	44	in	in	ADP
cet-2318	13	45	nitrogen	nitrogen	NOUN
cet-2318	13	46	of	of	ADP
cet-2318	13	47	3c	3c	NUM
cet-2318	13	48	-	-	PUNCT
cet-2318	13	49	sic	sic	ADJ
cet-2318	13	50	powder	powder	NOUN
cet-2318	13	51	,	,	PUNCT
cet-2318	13	52	derived	derive	VERB
cet-2318	13	53	from	from	ADP
cet-2318	13	54	exhausted	exhausted	ADJ
cet-2318	13	55	activated	activate	VERB
cet-2318	13	56	carbon	carbon	NOUN
cet-2318	13	57	(	(	PUNCT
cet-2318	13	58	sarno	sarno	NOUN
cet-2318	13	59	et	et	PROPN
cet-2318	13	60	al	al	PROPN
cet-2318	13	61	.	.	PROPN
cet-2318	13	62	,	,	PUNCT
cet-2318	13	63	2016	2016	NUM
cet-2318	13	64	)	)	PUNCT
cet-2318	13	65	,	,	PUNCT
cet-2318	13	66	at	at	ADP
cet-2318	13	67	atmospheric	atmospheric	ADJ
cet-2318	13	68	pressure	pressure	NOUN
cet-2318	13	69	and	and	CCONJ
cet-2318	13	70	low	low	ADJ
cet-2318	13	71	temperature	temperature	NOUN
cet-2318	13	72	for	for	ADP
cet-2318	13	73	their	their	PRON
cet-2318	13	74	intrinsic	intrinsic	ADJ
cet-2318	13	75	advantages	advantage	NOUN
cet-2318	13	76	.	.	PUNCT
cet-2318	14	1	the	the	DET
cet-2318	14	2	composite	composite	ADJ
cet-2318	14	3	materials	material	NOUN
cet-2318	14	4	obtained	obtain	VERB
cet-2318	14	5	were	be	AUX
cet-2318	14	6	carefully	carefully	ADV
cet-2318	14	7	characterized	characterize	VERB
cet-2318	14	8	by	by	ADP
cet-2318	14	9	the	the	DET
cet-2318	14	10	combining	combine	VERB
cet-2318	14	11	use	use	NOUN
cet-2318	14	12	of	of	ADP
cet-2318	14	13	different	different	ADJ
cet-2318	14	14	techniques	technique	NOUN
cet-2318	14	15	:	:	PUNCT
cet-2318	14	16	transmission	transmission	NOUN
cet-2318	14	17	electron	electron	NOUN
cet-2318	14	18	microscopy	microscopy	NOUN
cet-2318	14	19	(	(	PUNCT
cet-2318	14	20	tem	tem	PROPN
cet-2318	14	21	)	)	PUNCT
cet-2318	14	22	coupled	couple	VERB
cet-2318	14	23	with	with	ADP
cet-2318	14	24	an	an	DET
cet-2318	14	25	edax	edax	NOUN
cet-2318	14	26	probe	probe	NOUN
cet-2318	14	27	,	,	PUNCT
cet-2318	14	28	scanning	scan	VERB
cet-2318	14	29	electron	electron	NOUN
cet-2318	14	30	microscopy	microscopy	NOUN
cet-2318	14	31	(	(	PUNCT
cet-2318	14	32	sem	sem	NOUN
cet-2318	14	33	)	)	PUNCT
cet-2318	14	34	,	,	PUNCT
cet-2318	14	35	raman	raman	NOUN
cet-2318	14	36	spectroscopy	spectroscopy	NOUN
cet-2318	14	37	,	,	PUNCT
cet-2318	14	38	thermogravimetric	thermogravimetric	ADJ
cet-2318	14	39	analysis	analysis	NOUN
cet-2318	14	40	(	(	PUNCT
cet-2318	14	41	tg	tg	PROPN
cet-2318	14	42	-	-	PUNCT
cet-2318	14	43	dtg	dtg	PROPN
cet-2318	14	44	)	)	PUNCT
cet-2318	14	45	coupled	couple	VERB
cet-2318	14	46	with	with	ADP
cet-2318	14	47	a	a	DET
cet-2318	14	48	quadrupole	quadrupole	NOUN
cet-2318	14	49	mass	mass	NOUN
cet-2318	14	50	detector	detector	NOUN
cet-2318	14	51	and	and	CCONJ
cet-2318	14	52	xray	xray	ADJ
cet-2318	14	53	diffraction	diffraction	NOUN
cet-2318	14	54	analysis	analysis	NOUN
cet-2318	14	55	.	.	PUNCT
cet-2318	15	1	doi	doi	NOUN
cet-2318	15	2	:	:	PUNCT
cet-2318	15	3	10.3303	10.3303	NUM
cet-2318	15	4	/	/	SYM
cet-2318	15	5	cet1757255	cet1757255	NOUN
cet-2318	15	6	please	please	INTJ
cet-2318	15	7	cite	cite	VERB
cet-2318	15	8	this	this	DET
cet-2318	15	9	article	article	NOUN
cet-2318	15	10	as	as	ADP
cet-2318	15	11	:	:	PUNCT
cet-2318	15	12	sarno	sarno	PROPN
cet-2318	15	13	m.	m.	PROPN
cet-2318	15	14	,	,	PUNCT
cet-2318	15	15	galvagno	galvagno	PROPN
cet-2318	15	16	s.	s.	PROPN
cet-2318	15	17	,	,	PUNCT
cet-2318	15	18	piscitelli	piscitelli	PROPN
cet-2318	15	19	r.	r.	PROPN
cet-2318	15	20	,	,	PUNCT
cet-2318	15	21	portofino	portofino	PROPN
cet-2318	15	22	s.	s.	PROPN
cet-2318	15	23	,	,	PUNCT
cet-2318	15	24	cirillo	cirillo	PROPN
cet-2318	15	25	c.	c.	PROPN
cet-2318	15	26	,	,	PUNCT
cet-2318	15	27	ciambelli	ciambelli	PROPN
cet-2318	15	28	p.	p.	PROPN
cet-2318	15	29	,	,	PUNCT
cet-2318	15	30	2017	2017	NUM
cet-2318	15	31	,	,	PUNCT
cet-2318	15	32	new	new	ADJ
cet-2318	15	33	designed	design	VERB
cet-2318	15	34	procedure	procedure	NOUN
cet-2318	15	35	for	for	ADP
cet-2318	15	36	g	g	PROPN
cet-2318	15	37	/	/	SYM
cet-2318	15	38	sio2	sio2	PROPN
cet-2318	15	39	/	/	SYM
cet-2318	15	40	sic	sic	ADJ
cet-2318	15	41	nano	nano	NOUN
cet-2318	15	42	-	-	PUNCT
cet-2318	15	43	heterojunctions	heterojunction	NOUN
cet-2318	15	44	growth	growth	NOUN
cet-2318	15	45	on	on	ADP
cet-2318	15	46	recycled	recycle	VERB
cet-2318	15	47	3c	3c	NUM
cet-2318	15	48	-	-	PUNCT
cet-2318	15	49	sic	sic	ADJ
cet-2318	15	50	powder	powder	NOUN
cet-2318	15	51	,	,	PUNCT
cet-2318	15	52	chemical	chemical	NOUN
cet-2318	15	53	engineering	engineering	NOUN
cet-2318	15	54	transactions	transaction	NOUN
cet-2318	15	55	,	,	PUNCT
cet-2318	15	56	57	57	NUM
cet-2318	15	57	,	,	PUNCT
cet-2318	15	58	1525	1525	NUM
cet-2318	15	59	-	-	SYM
cet-2318	15	60	1530	1530	NUM
cet-2318	15	61	doi	doi	NOUN
cet-2318	15	62	:	:	PUNCT
cet-2318	15	63	10.3303	10.3303	NUM
cet-2318	15	64	/	/	SYM
cet-2318	15	65	cet1757255	cet1757255	NOUN
cet-2318	15	66	1525	1525	NUM
cet-2318	15	67	2	2	NUM
cet-2318	15	68	.	.	PUNCT
cet-2318	15	69	experimental	experimental	ADJ
cet-2318	15	70	for	for	ADP
cet-2318	15	71	g	g	PROPN
cet-2318	15	72	/	/	SYM
cet-2318	15	73	sio2	sio2	PROPN
cet-2318	15	74	/	/	SYM
cet-2318	15	75	sic	sic	ADJ
cet-2318	15	76	synthesis	synthesis	NOUN
cet-2318	15	77	,	,	PUNCT
cet-2318	15	78	sic	sic	ADJ
cet-2318	15	79	substrate	substrate	NOUN
cet-2318	15	80	was	be	AUX
cet-2318	15	81	,	,	PUNCT
cet-2318	15	82	first	first	ADV
cet-2318	15	83	of	of	ADP
cet-2318	15	84	all	all	PRON
cet-2318	15	85	,	,	PUNCT
cet-2318	15	86	annealed	anneal	VERB
cet-2318	15	87	for	for	ADP
cet-2318	15	88	10	10	NUM
cet-2318	15	89	min	min	NOUN
cet-2318	15	90	under	under	ADP
cet-2318	15	91	argon	argon	NOUN
cet-2318	15	92	at	at	ADP
cet-2318	15	93	1200	1200	NUM
cet-2318	15	94	°	°	ADP
cet-2318	15	95	c	c	NOUN
cet-2318	15	96	in	in	ADP
cet-2318	15	97	order	order	NOUN
cet-2318	15	98	to	to	PART
cet-2318	15	99	uniform	uniform	VERB
cet-2318	15	100	the	the	DET
cet-2318	15	101	surface	surface	NOUN
cet-2318	15	102	removing	remove	VERB
cet-2318	15	103	residual	residual	ADJ
cet-2318	15	104	polishing	polishing	NOUN
cet-2318	15	105	damage	damage	NOUN
cet-2318	15	106	.	.	PUNCT
cet-2318	16	1	then	then	ADV
cet-2318	16	2	,	,	PUNCT
cet-2318	16	3	oxygen	oxygen	NOUN
cet-2318	16	4	,	,	PUNCT
cet-2318	16	5	50	50	NUM
cet-2318	16	6	ppm	ppm	NOUN
cet-2318	16	7	in	in	ADP
cet-2318	16	8	100	100	NUM
cet-2318	16	9	cc(stp)/min	cc(stp)/min	PROPN
cet-2318	16	10	of	of	ADP
cet-2318	16	11	nitrogen	nitrogen	NOUN
cet-2318	16	12	,	,	PUNCT
cet-2318	16	13	was	be	AUX
cet-2318	16	14	fed	feed	VERB
cet-2318	16	15	to	to	ADP
cet-2318	16	16	the	the	DET
cet-2318	16	17	reactor	reactor	NOUN
cet-2318	16	18	(	(	PUNCT
cet-2318	16	19	sarno	sarno	PROPN
cet-2318	16	20	et	et	PROPN
cet-2318	16	21	al	al	PROPN
cet-2318	16	22	.	.	PROPN
cet-2318	16	23	,	,	PUNCT
cet-2318	16	24	2012	2012	NUM
cet-2318	16	25	)	)	PUNCT
cet-2318	16	26	from	from	ADP
cet-2318	16	27	room	room	NOUN
cet-2318	16	28	temperature	temperature	NOUN
cet-2318	16	29	to	to	ADP
cet-2318	16	30	1150	1150	NUM
cet-2318	16	31	°	°	ADP
cet-2318	16	32	c	c	NOUN
cet-2318	16	33	and	and	CCONJ
cet-2318	16	34	kept	keep	VERB
cet-2318	16	35	1	1	NUM
cet-2318	16	36	hour	hour	NOUN
cet-2318	16	37	at	at	ADP
cet-2318	16	38	this	this	DET
cet-2318	16	39	constant	constant	ADJ
cet-2318	16	40	temperature	temperature	NOUN
cet-2318	16	41	,	,	PUNCT
cet-2318	16	42	followed	follow	VERB
cet-2318	16	43	by	by	ADP
cet-2318	16	44	15	15	NUM
cet-2318	16	45	min	min	NOUN
cet-2318	16	46	under	under	ADP
cet-2318	16	47	pure	pure	ADJ
cet-2318	16	48	hydrogen	hydrogen	NOUN
cet-2318	16	49	.	.	PUNCT
cet-2318	17	1	finally	finally	ADV
cet-2318	17	2	,	,	PUNCT
cet-2318	17	3	the	the	DET
cet-2318	17	4	sample	sample	NOUN
cet-2318	17	5	was	be	AUX
cet-2318	17	6	treated	treat	VERB
cet-2318	17	7	for	for	ADP
cet-2318	17	8	30	30	NUM
cet-2318	17	9	min	min	NOUN
cet-2318	17	10	in	in	ADP
cet-2318	17	11	argon	argon	NOUN
cet-2318	17	12	to	to	PART
cet-2318	17	13	allow	allow	VERB
cet-2318	17	14	residual	residual	ADJ
cet-2318	17	15	co	co	NOUN
cet-2318	17	16	to	to	PART
cet-2318	17	17	diffuse	diffuse	VERB
cet-2318	17	18	out	out	ADP
cet-2318	17	19	(	(	PUNCT
cet-2318	17	20	cooper	cooper	NOUN
cet-2318	17	21	,	,	PUNCT
cet-2318	17	22	1997	1997	NUM
cet-2318	17	23	)	)	PUNCT
cet-2318	17	24	.	.	PUNCT
cet-2318	18	1	all	all	DET
cet-2318	18	2	the	the	DET
cet-2318	18	3	obtained	obtain	VERB
cet-2318	18	4	samples	sample	NOUN
cet-2318	18	5	were	be	AUX
cet-2318	18	6	characterized	characterize	VERB
cet-2318	18	7	by	by	ADP
cet-2318	18	8	the	the	DET
cet-2318	18	9	combined	combine	VERB
cet-2318	18	10	use	use	NOUN
cet-2318	18	11	of	of	ADP
cet-2318	18	12	different	different	ADJ
cet-2318	18	13	techniques	technique	NOUN
cet-2318	18	14	.	.	PUNCT
cet-2318	19	1	transmission	transmission	NOUN
cet-2318	19	2	electron	electron	NOUN
cet-2318	19	3	microscopy	microscopy	NOUN
cet-2318	19	4	(	(	PUNCT
cet-2318	19	5	tem	tem	NOUN
cet-2318	19	6	)	)	PUNCT
cet-2318	19	7	images	image	NOUN
cet-2318	19	8	were	be	AUX
cet-2318	19	9	acquired	acquire	VERB
cet-2318	19	10	using	use	VERB
cet-2318	19	11	a	a	DET
cet-2318	19	12	fei	fei	PROPN
cet-2318	19	13	tecnai	tecnai	ADJ
cet-2318	19	14	electron	electron	NOUN
cet-2318	19	15	microscope	microscope	NOUN
cet-2318	19	16	operated	operate	VERB
cet-2318	19	17	at	at	ADP
cet-2318	19	18	200	200	NUM
cet-2318	19	19	kv	kv	NOUN
cet-2318	19	20	with	with	ADP
cet-2318	19	21	a	a	DET
cet-2318	19	22	lab6	lab6	PROPN
cet-2318	19	23	filament	filament	NOUN
cet-2318	19	24	as	as	ADP
cet-2318	19	25	the	the	DET
cet-2318	19	26	source	source	NOUN
cet-2318	19	27	of	of	ADP
cet-2318	19	28	electrons	electron	NOUN
cet-2318	19	29	,	,	PUNCT
cet-2318	19	30	equipped	equip	VERB
cet-2318	19	31	with	with	ADP
cet-2318	19	32	an	an	DET
cet-2318	19	33	edx	edx	NOUN
cet-2318	19	34	probe	probe	NOUN
cet-2318	19	35	.	.	PUNCT
cet-2318	20	1	scanning	scan	VERB
cet-2318	20	2	electron	electron	NOUN
cet-2318	20	3	microscopy	microscopy	NOUN
cet-2318	20	4	(	(	PUNCT
cet-2318	20	5	sem	sem	NOUN
cet-2318	20	6	)	)	PUNCT
cet-2318	20	7	images	image	NOUN
cet-2318	20	8	were	be	AUX
cet-2318	20	9	obtained	obtain	VERB
cet-2318	20	10	with	with	ADP
cet-2318	20	11	a	a	DET
cet-2318	20	12	leo	leo	PROPN
cet-2318	20	13	1525	1525	NUM
cet-2318	20	14	microscope	microscope	NOUN
cet-2318	20	15	.	.	PUNCT
cet-2318	21	1	raman	raman	NOUN
cet-2318	21	2	spectra	spectra	PROPN
cet-2318	21	3	were	be	AUX
cet-2318	21	4	obtained	obtain	VERB
cet-2318	21	5	at	at	ADP
cet-2318	21	6	room	room	NOUN
cet-2318	21	7	temperature	temperature	NOUN
cet-2318	21	8	with	with	ADP
cet-2318	21	9	a	a	DET
cet-2318	21	10	micro	micro	ADJ
cet-2318	21	11	-	-	NOUN
cet-2318	21	12	raman	raman	ADJ
cet-2318	21	13	spectrometer	spectrometer	NOUN
cet-2318	21	14	renishaw	renishaw	NOUN
cet-2318	21	15	invia	invia	PROPN
cet-2318	21	16	with	with	ADP
cet-2318	21	17	a	a	DET
cet-2318	21	18	514	514	NUM
cet-2318	21	19	nm	nm	PRON
cet-2318	21	20	excitation	excitation	NOUN
cet-2318	21	21	wavelength	wavelength	NOUN
cet-2318	21	22	(	(	PUNCT
cet-2318	21	23	laser	laser	NOUN
cet-2318	21	24	power	power	NOUN
cet-2318	21	25	30	30	NUM
cet-2318	21	26	mw	mw	NOUN
cet-2318	21	27	)	)	PUNCT
cet-2318	21	28	in	in	ADP
cet-2318	21	29	the	the	DET
cet-2318	21	30	range	range	NOUN
cet-2318	21	31	100	100	NUM
cet-2318	21	32	-	-	SYM
cet-2318	21	33	3000	3000	NUM
cet-2318	21	34	cm-1	cm-1	NOUN
cet-2318	21	35	.	.	PUNCT
cet-2318	22	1	optical	optical	ADJ
cet-2318	22	2	images	image	NOUN
cet-2318	22	3	were	be	AUX
cet-2318	22	4	collected	collect	VERB
cet-2318	22	5	with	with	ADP
cet-2318	22	6	a	a	DET
cet-2318	22	7	leica	leica	PROPN
cet-2318	22	8	dmlm	dmlm	VERB
cet-2318	22	9	optical	optical	ADJ
cet-2318	22	10	microscope	microscope	NOUN
cet-2318	22	11	connected	connect	VERB
cet-2318	22	12	on	on	ADP
cet-2318	22	13	-	-	PUNCT
cet-2318	22	14	line	line	NOUN
cet-2318	22	15	with	with	ADP
cet-2318	22	16	the	the	DET
cet-2318	22	17	raman	raman	NOUN
cet-2318	22	18	instrument	instrument	NOUN
cet-2318	22	19	.	.	PUNCT
cet-2318	23	1	for	for	ADP
cet-2318	23	2	all	all	DET
cet-2318	23	3	the	the	DET
cet-2318	23	4	samples	sample	NOUN
cet-2318	23	5	about	about	ADV
cet-2318	23	6	40	40	NUM
cet-2318	23	7	measurements	measurement	NOUN
cet-2318	23	8	have	have	AUX
cet-2318	23	9	been	be	AUX
cet-2318	23	10	carried	carry	VERB
cet-2318	23	11	out	out	ADP
cet-2318	23	12	.	.	PUNCT
cet-2318	24	1	the	the	DET
cet-2318	24	2	laser	laser	NOUN
cet-2318	24	3	spot	spot	NOUN
cet-2318	24	4	diameter	diameter	NOUN
cet-2318	24	5	was	be	AUX
cet-2318	24	6	about	about	ADV
cet-2318	24	7	10	10	NUM
cet-2318	24	8	µm	µm	NOUN
cet-2318	24	9	.	.	PUNCT
cet-2318	25	1	xrd	xrd	PROPN
cet-2318	25	2	measurements	measurement	NOUN
cet-2318	25	3	were	be	AUX
cet-2318	25	4	performed	perform	VERB
cet-2318	25	5	with	with	ADP
cet-2318	25	6	a	a	DET
cet-2318	25	7	bruker	bruker	NOUN
cet-2318	25	8	d8	d8	PROPN
cet-2318	25	9	x	x	PROPN
cet-2318	25	10	-	-	NOUN
cet-2318	25	11	ray	ray	NOUN
cet-2318	25	12	diffractometer	diffractometer	NOUN
cet-2318	25	13	using	use	VERB
cet-2318	25	14	cuk	cuk	PROPN
cet-2318	25	15	radiation	radiation	NOUN
cet-2318	25	16	.	.	PUNCT
cet-2318	26	1	thermogravimetric	thermogravimetric	ADJ
cet-2318	26	2	analysis	analysis	NOUN
cet-2318	26	3	(	(	PUNCT
cet-2318	26	4	tg	tg	PROPN
cet-2318	26	5	-	-	PUNCT
cet-2318	26	6	dtg	dtg	PROPN
cet-2318	26	7	)	)	PUNCT
cet-2318	26	8	at	at	ADP
cet-2318	26	9	a	a	DET
cet-2318	26	10	10	10	NUM
cet-2318	26	11	k	k	NOUN
cet-2318	26	12	/	/	SYM
cet-2318	26	13	min	min	NOUN
cet-2318	26	14	heating	heating	NOUN
cet-2318	26	15	rate	rate	NOUN
cet-2318	26	16	in	in	ADP
cet-2318	26	17	flowing	flow	VERB
cet-2318	26	18	air	air	NOUN
cet-2318	26	19	was	be	AUX
cet-2318	26	20	performed	perform	VERB
cet-2318	26	21	with	with	ADP
cet-2318	26	22	a	a	DET
cet-2318	26	23	sdtq	sdtq	NOUN
cet-2318	26	24	500	500	NUM
cet-2318	26	25	analyzer	analyzer	NOUN
cet-2318	26	26	(	(	PUNCT
cet-2318	26	27	ta	ta	NOUN
cet-2318	26	28	instruments	instrument	NOUN
cet-2318	26	29	)	)	PUNCT
cet-2318	26	30	.	.	PUNCT
cet-2318	27	1	3	3	X
cet-2318	27	2	.	.	NOUN
cet-2318	27	3	results	result	NOUN
cet-2318	27	4	and	and	CCONJ
cet-2318	27	5	discussion	discussion	NOUN
cet-2318	27	6	a	a	DET
cet-2318	27	7	typical	typical	ADJ
cet-2318	27	8	tem	tem	PROPN
cet-2318	27	9	image	image	NOUN
cet-2318	27	10	of	of	ADP
cet-2318	27	11	the	the	DET
cet-2318	27	12	synthesized	synthesize	VERB
cet-2318	27	13	sample	sample	NOUN
cet-2318	27	14	is	be	AUX
cet-2318	27	15	reported	report	VERB
cet-2318	27	16	in	in	ADP
cet-2318	27	17	figure	figure	NOUN
cet-2318	27	18	1a	1a	NOUN
cet-2318	27	19	,	,	PUNCT
cet-2318	27	20	showing	show	VERB
cet-2318	27	21	around	around	ADP
cet-2318	27	22	the	the	DET
cet-2318	27	23	nanofilaments	nanofilament	NOUN
cet-2318	27	24	a	a	DET
cet-2318	27	25	layer	layer	NOUN
cet-2318	27	26	of	of	ADP
cet-2318	27	27	different	different	ADJ
cet-2318	27	28	colour	colour	NOUN
cet-2318	27	29	of	of	ADP
cet-2318	27	30	about	about	ADV
cet-2318	27	31	20	20	NUM
cet-2318	27	32	nm	nm	NOUN
cet-2318	27	33	.	.	PUNCT
cet-2318	28	1	an	an	DET
cet-2318	28	2	enlarged	enlarge	VERB
cet-2318	28	3	image	image	NOUN
cet-2318	28	4	of	of	ADP
cet-2318	28	5	the	the	DET
cet-2318	28	6	nanofilaments	nanofilament	NOUN
cet-2318	28	7	is	be	AUX
cet-2318	28	8	shown	show	VERB
cet-2318	28	9	in	in	ADP
cet-2318	28	10	figure	figure	NOUN
cet-2318	28	11	1b	1b	NUM
cet-2318	28	12	,	,	PUNCT
cet-2318	28	13	it	it	PRON
cet-2318	28	14	displays	display	VERB
cet-2318	28	15	a	a	DET
cet-2318	28	16	characteristic	characteristic	ADJ
cet-2318	28	17	dark	dark	ADJ
cet-2318	28	18	core	core	NOUN
cet-2318	28	19	and	and	CCONJ
cet-2318	28	20	lighted	light	VERB
cet-2318	28	21	sheath	sheath	NOUN
cet-2318	28	22	,	,	PUNCT
cet-2318	28	23	with	with	SCONJ
cet-2318	28	24	the	the	DET
cet-2318	28	25	nanofilament	nanofilament	NOUN
cet-2318	28	26	sheath	sheath	VERB
cet-2318	28	27	about	about	ADV
cet-2318	28	28	20	20	NUM
cet-2318	28	29	-	-	SYM
cet-2318	28	30	30	30	NUM
cet-2318	28	31	nm	nm	ADV
cet-2318	28	32	thick	thick	ADJ
cet-2318	28	33	.	.	PUNCT
cet-2318	29	1	chemical	chemical	NOUN
cet-2318	29	2	composition	composition	NOUN
cet-2318	29	3	microanalysis	microanalysis	NOUN
cet-2318	29	4	,	,	PUNCT
cet-2318	29	5	evidences	evidence	VERB
cet-2318	29	6	the	the	DET
cet-2318	29	7	outer	outer	ADJ
cet-2318	29	8	c	c	NOUN
cet-2318	29	9	sheath	sheath	NOUN
cet-2318	29	10	and	and	CCONJ
cet-2318	29	11	the	the	DET
cet-2318	29	12	increased	increase	VERB
cet-2318	29	13	oxygen	oxygen	NOUN
cet-2318	29	14	amount	amount	NOUN
cet-2318	29	15	in	in	ADP
cet-2318	29	16	the	the	DET
cet-2318	29	17	intermediate	intermediate	ADJ
cet-2318	29	18	layer	layer	NOUN
cet-2318	29	19	with	with	ADP
cet-2318	29	20	respect	respect	NOUN
cet-2318	29	21	to	to	ADP
cet-2318	29	22	the	the	DET
cet-2318	29	23	core	core	NOUN
cet-2318	29	24	.	.	PUNCT
cet-2318	30	1	typical	typical	ADJ
cet-2318	30	2	eds	ed	NOUN
cet-2318	30	3	spectra	spectra	PROPN
cet-2318	30	4	taken	take	VERB
cet-2318	30	5	from	from	ADP
cet-2318	30	6	three	three	NUM
cet-2318	30	7	different	different	ADJ
cet-2318	30	8	zones	zone	NOUN
cet-2318	30	9	(	(	PUNCT
cet-2318	30	10	indicated	indicate	VERB
cet-2318	30	11	as	as	ADP
cet-2318	30	12	a	a	DET
cet-2318	30	13	,	,	PUNCT
cet-2318	30	14	b	b	NOUN
cet-2318	30	15	,	,	PUNCT
cet-2318	30	16	c	c	PROPN
cet-2318	30	17	in	in	ADP
cet-2318	30	18	the	the	DET
cet-2318	30	19	inserts	insert	NOUN
cet-2318	30	20	of	of	ADP
cet-2318	30	21	figure	figure	NOUN
cet-2318	30	22	1b	1b	NUM
cet-2318	30	23	)	)	PUNCT
cet-2318	30	24	of	of	ADP
cet-2318	30	25	a	a	DET
cet-2318	30	26	nanofilaments	nanofilament	NOUN
cet-2318	30	27	are	be	AUX
cet-2318	30	28	depicted	depict	VERB
cet-2318	30	29	in	in	ADP
cet-2318	30	30	figure	figure	NOUN
cet-2318	30	31	1	1	NUM
cet-2318	30	32	a	a	DET
cet-2318	30	33	,	,	PUNCT
cet-2318	30	34	b	b	NOUN
cet-2318	30	35	,	,	PUNCT
cet-2318	30	36	c.	c.	NOUN
cet-2318	30	37	the	the	DET
cet-2318	30	38	eds	ed	NOUN
cet-2318	30	39	results	result	NOUN
cet-2318	30	40	were	be	AUX
cet-2318	30	41	confirmed	confirm	VERB
cet-2318	30	42	by	by	ADP
cet-2318	30	43	the	the	DET
cet-2318	30	44	high	high	ADJ
cet-2318	30	45	resolution	resolution	NOUN
cet-2318	30	46	tem	tem	PROPN
cet-2318	30	47	image	image	NOUN
cet-2318	30	48	observations	observation	NOUN
cet-2318	30	49	(	(	PUNCT
cet-2318	30	50	inserts	insert	NOUN
cet-2318	30	51	in	in	ADP
cet-2318	30	52	the	the	DET
cet-2318	30	53	figure	figure	NOUN
cet-2318	30	54	)	)	PUNCT
cet-2318	30	55	.	.	PUNCT
cet-2318	31	1	they	they	PRON
cet-2318	31	2	showed	show	VERB
cet-2318	31	3	that	that	SCONJ
cet-2318	31	4	the	the	DET
cet-2318	31	5	nanofilaments	nanofilament	NOUN
cet-2318	31	6	are	be	AUX
cet-2318	31	7	indeed	indeed	ADV
cet-2318	31	8	composed	compose	VERB
cet-2318	31	9	of	of	ADP
cet-2318	31	10	a	a	DET
cet-2318	31	11	3c	3c	NUM
cet-2318	31	12	-	-	PUNCT
cet-2318	31	13	sic	sic	NOUN
cet-2318	31	14	core	core	NOUN
cet-2318	31	15	,	,	PUNCT
cet-2318	31	16	a	a	DET
cet-2318	31	17	sio2	sio2	ADJ
cet-2318	31	18	intermediate	intermediate	ADJ
cet-2318	31	19	layer	layer	NOUN
cet-2318	31	20	,	,	PUNCT
cet-2318	31	21	and	and	CCONJ
cet-2318	31	22	an	an	DET
cet-2318	31	23	outer	outer	ADJ
cet-2318	31	24	layer	layer	NOUN
cet-2318	31	25	of	of	ADP
cet-2318	31	26	graphitic	graphitic	ADJ
cet-2318	31	27	carbon	carbon	NOUN
cet-2318	31	28	.	.	PUNCT
cet-2318	32	1	twisted	twisted	ADJ
cet-2318	32	2	graphene	graphene	NOUN
cet-2318	32	3	layers	layer	NOUN
cet-2318	32	4	(	(	PUNCT
cet-2318	32	5	about	about	ADV
cet-2318	32	6	13	13	NUM
cet-2318	32	7	are	be	AUX
cet-2318	32	8	counted	count	VERB
cet-2318	32	9	in	in	ADP
cet-2318	32	10	the	the	DET
cet-2318	32	11	insert	insert	NOUN
cet-2318	32	12	of	of	ADP
cet-2318	32	13	figure	figure	NOUN
cet-2318	32	14	1b	1b	NUM
cet-2318	32	15	)	)	PUNCT
cet-2318	32	16	with	with	ADP
cet-2318	32	17	the	the	DET
cet-2318	32	18	typical	typical	ADJ
cet-2318	32	19	(	(	PUNCT
cet-2318	32	20	002	002	NUM
cet-2318	32	21	)	)	PUNCT
cet-2318	32	22	stacking	stacking	NOUN
cet-2318	32	23	of	of	ADP
cet-2318	32	24	graphitic	graphitic	ADJ
cet-2318	32	25	carbon	carbon	NOUN
cet-2318	32	26	are	be	AUX
cet-2318	32	27	clearly	clearly	ADV
cet-2318	32	28	visible	visible	ADJ
cet-2318	32	29	for	for	ADP
cet-2318	32	30	the	the	DET
cet-2318	32	31	outermost	outermost	ADJ
cet-2318	32	32	nanofilament	nanofilament	NOUN
cet-2318	32	33	layers	layer	NOUN
cet-2318	32	34	.	.	PUNCT
cet-2318	33	1	figure	figure	VERB
cet-2318	33	2	1	1	NUM
cet-2318	33	3	:	:	PUNCT
cet-2318	33	4	tem	tem	PROPN
cet-2318	33	5	image	image	NOUN
cet-2318	33	6	of	of	ADP
cet-2318	33	7	g	g	PROPN
cet-2318	33	8	/	/	SYM
cet-2318	33	9	sio2	sio2	NOUN
cet-2318	33	10	/	/	SYM
cet-2318	33	11	sic	sic	ADJ
cet-2318	33	12	(	(	PUNCT
cet-2318	33	13	a	a	NOUN
cet-2318	33	14	)	)	PUNCT
cet-2318	33	15	.	.	PUNCT
cet-2318	34	1	representative	representative	ADJ
cet-2318	34	2	tem	tem	PROPN
cet-2318	34	3	images	image	NOUN
cet-2318	34	4	of	of	ADP
cet-2318	34	5	the	the	DET
cet-2318	34	6	prepared	prepared	ADJ
cet-2318	34	7	nanofilaments	nanofilament	NOUN
cet-2318	34	8	of	of	ADP
cet-2318	34	9	g	g	PROPN
cet-2318	34	10	/	/	SYM
cet-2318	34	11	sio2	sio2	PROPN
cet-2318	34	12	/	/	SYM
cet-2318	34	13	sic	sic	ADJ
cet-2318	34	14	composite	composite	NOUN
cet-2318	34	15	.	.	PUNCT
cet-2318	35	1	high	high	ADJ
cet-2318	35	2	resolution	resolution	NOUN
cet-2318	35	3	tem	tem	PROPN
cet-2318	35	4	images	image	NOUN
cet-2318	35	5	of	of	ADP
cet-2318	35	6	coaxial	coaxial	ADJ
cet-2318	35	7	nanofilaments	nanofilament	NOUN
cet-2318	35	8	,	,	PUNCT
cet-2318	35	9	displaying	display	VERB
cet-2318	35	10	single	single	ADJ
cet-2318	35	11	crystalline	crystalline	NOUN
cet-2318	35	12	3csic	3csic	NUM
cet-2318	35	13	core	core	NOUN
cet-2318	35	14	,	,	PUNCT
cet-2318	35	15	sio2	sio2	ADJ
cet-2318	35	16	intermediate	intermediate	ADJ
cet-2318	35	17	layer	layer	NOUN
cet-2318	35	18	and	and	CCONJ
cet-2318	35	19	outer	outer	ADJ
cet-2318	35	20	graphitic	graphitic	ADJ
cet-2318	35	21	carbon	carbon	NOUN
cet-2318	35	22	sheaths	sheath	NOUN
cet-2318	35	23	.	.	PUNCT
cet-2318	36	1	energy	energy	NOUN
cet-2318	36	2	dispersion	dispersion	NOUN
cet-2318	36	3	spectra	spectra	NOUN
cet-2318	36	4	taken	take	VERB
cet-2318	36	5	from	from	ADP
cet-2318	36	6	different	different	ADJ
cet-2318	36	7	zones	zone	NOUN
cet-2318	36	8	of	of	ADP
cet-2318	36	9	the	the	DET
cet-2318	36	10	nanofilaments	nanofilament	NOUN
cet-2318	36	11	as	as	SCONJ
cet-2318	36	12	marked	mark	VERB
cet-2318	36	13	in	in	ADP
cet-2318	36	14	figure	figure	NOUN
cet-2318	36	15	1b	1b	NUM
cet-2318	36	16	with	with	ADP
cet-2318	36	17	a	a	DET
cet-2318	36	18	,	,	PUNCT
cet-2318	36	19	b	b	NOUN
cet-2318	36	20	and	and	CCONJ
cet-2318	36	21	c.	c.	PROPN
cet-2318	36	22	the	the	DET
cet-2318	36	23	raman	raman	NOUN
cet-2318	36	24	spectrum	spectrum	NOUN
cet-2318	36	25	reported	report	VERB
cet-2318	36	26	in	in	ADP
cet-2318	36	27	figure	figure	NOUN
cet-2318	36	28	2a	2a	NUM
cet-2318	36	29	,	,	PUNCT
cet-2318	36	30	collected	collect	VERB
cet-2318	36	31	on	on	ADP
cet-2318	36	32	the	the	DET
cet-2318	36	33	g	g	PROPN
cet-2318	36	34	/	/	SYM
cet-2318	36	35	sio2	sio2	NOUN
cet-2318	36	36	/	/	SYM
cet-2318	36	37	sic	sic	ADJ
cet-2318	36	38	,	,	PUNCT
cet-2318	36	39	clearly	clearly	ADV
cet-2318	36	40	shows	show	VERB
cet-2318	36	41	the	the	DET
cet-2318	36	42	multiphase	multiphase	PROPN
cet-2318	36	43	nature	nature	NOUN
cet-2318	36	44	of	of	ADP
cet-2318	36	45	the	the	DET
cet-2318	36	46	sample	sample	NOUN
cet-2318	36	47	,	,	PUNCT
cet-2318	36	48	the	the	DET
cet-2318	36	49	band	band	NOUN
cet-2318	36	50	between	between	ADP
cet-2318	36	51	400	400	NUM
cet-2318	36	52	cm-1	cm-1	NOUN
cet-2318	36	53	and	and	CCONJ
cet-2318	36	54	500	500	NUM
cet-2318	36	55	cm-1	cm-1	VERB
cet-2318	36	56	is	be	AUX
cet-2318	36	57	due	due	ADJ
cet-2318	36	58	to	to	ADP
cet-2318	36	59	sio2	sio2	PROPN
cet-2318	36	60	,	,	PUNCT
cet-2318	36	61	on	on	ADP
cet-2318	36	62	the	the	DET
cet-2318	36	63	other	other	ADJ
cet-2318	36	64	hand	hand	NOUN
cet-2318	36	65	at	at	ADP
cet-2318	36	66	higher	high	ADJ
cet-2318	36	67	cm-1	cm-1	VERB
cet-2318	36	68	the	the	DET
cet-2318	36	69	spectrum	spectrum	NOUN
cet-2318	36	70	results	result	NOUN
cet-2318	36	71	from	from	ADP
cet-2318	36	72	the	the	DET
cet-2318	36	73	superimposition	superimposition	NOUN
cet-2318	36	74	of	of	ADP
cet-2318	36	75	sic	sic	ADJ
cet-2318	36	76	and	and	CCONJ
cet-2318	36	77	sp2	sp2	NOUN
cet-2318	36	78	carbon	carbon	NOUN
cet-2318	36	79	.	.	PUNCT
cet-2318	37	1	in	in	ADP
cet-2318	37	2	particular	particular	ADJ
cet-2318	37	3	,	,	PUNCT
cet-2318	37	4	in	in	ADP
cet-2318	37	5	the	the	DET
cet-2318	37	6	range	range	NOUN
cet-2318	37	7	1200	1200	NUM
cet-2318	37	8	-	-	SYM
cet-2318	37	9	3200	3200	NUM
cet-2318	37	10	cm-1	cm-1	NOUN
cet-2318	37	11	,	,	PUNCT
cet-2318	37	12	three	three	NUM
cet-2318	37	13	additional	additional	ADJ
cet-2318	37	14	bands	band	NOUN
cet-2318	37	15	appear	appear	VERB
cet-2318	37	16	at	at	ADP
cet-2318	37	17	about	about	ADP
cet-2318	37	18	1346	1346	NUM
cet-2318	37	19	,	,	PUNCT
cet-2318	37	20	1588	1588	NUM
cet-2318	37	21	and	and	CCONJ
cet-2318	37	22	2700	2700	NUM
cet-2318	37	23	cm-1	cm-1	NOUN
cet-2318	37	24	,	,	PUNCT
cet-2318	37	25	which	which	PRON
cet-2318	37	26	are	be	AUX
cet-2318	37	27	attributed	attribute	VERB
cet-2318	37	28	respectively	respectively	ADV
cet-2318	37	29	to	to	ADP
cet-2318	37	30	the	the	DET
cet-2318	37	31	d	d	PROPN
cet-2318	37	32	,	,	PUNCT
cet-2318	37	33	g	g	PROPN
cet-2318	37	34	and	and	CCONJ
cet-2318	37	35	2d	2d	PROPN
cet-2318	37	36	carbon	carbon	NOUN
cet-2318	37	37	bands	band	NOUN
cet-2318	37	38	(	(	PUNCT
cet-2318	37	39	ouerghi	ouerghi	PROPN
cet-2318	37	40	et	et	PROPN
cet-2318	37	41	al	al	PROPN
cet-2318	37	42	.	.	PROPN
cet-2318	37	43	,	,	PUNCT
cet-2318	37	44	2010	2010	NUM
cet-2318	37	45	)	)	PUNCT
cet-2318	37	46	.	.	PUNCT
cet-2318	38	1	the	the	DET
cet-2318	38	2	presence	presence	NOUN
cet-2318	38	3	of	of	ADP
cet-2318	38	4	a	a	DET
cet-2318	38	5	single	single	ADJ
cet-2318	38	6	g	g	NOUN
cet-2318	38	7	and	and	CCONJ
cet-2318	38	8	2d	2d	NOUN
cet-2318	38	9	bands	band	NOUN
cet-2318	38	10	indicates	indicate	VERB
cet-2318	38	11	the	the	DET
cet-2318	38	12	thin	thin	ADJ
cet-2318	38	13	thickness	thickness	NOUN
cet-2318	38	14	of	of	ADP
cet-2318	38	15	the	the	DET
cet-2318	38	16	carbon	carbon	NOUN
cet-2318	38	17	layer	layer	NOUN
cet-2318	38	18	(	(	PUNCT
cet-2318	38	19	ouerghi	ouerghi	PROPN
cet-2318	38	20	et	et	PROPN
cet-2318	38	21	al	al	PROPN
cet-2318	38	22	.	.	PROPN
cet-2318	38	23	,	,	PUNCT
cet-2318	38	24	2010	2010	NUM
cet-2318	38	25	)	)	PUNCT
cet-2318	38	26	.	.	PUNCT
cet-2318	39	1	the	the	DET
cet-2318	39	2	appearance	appearance	NOUN
cet-2318	39	3	of	of	ADP
cet-2318	39	4	the	the	DET
cet-2318	39	5	d	d	PROPN
cet-2318	39	6	band	band	NOUN
cet-2318	39	7	indicates	indicate	VERB
cet-2318	39	8	structural	structural	ADJ
cet-2318	39	9	defect	defect	NOUN
cet-2318	39	10	of	of	ADP
cet-2318	39	11	edge	edge	NOUN
cet-2318	39	12	in	in	ADP
cet-2318	39	13	the	the	DET
cet-2318	39	14	few	few	ADJ
cet-2318	39	15	layers	layer	NOUN
cet-2318	39	16	graphene	graphene	NOUN
cet-2318	39	17	formed	form	VERB
cet-2318	39	18	.	.	PUNCT
cet-2318	40	1	all	all	DET
cet-2318	40	2	the	the	DET
cet-2318	40	3	transverse	transverse	NOUN
cet-2318	40	4	optical	optical	NOUN
cet-2318	40	5	(	(	PUNCT
cet-2318	40	6	to	to	PART
cet-2318	40	7	)	)	PUNCT
cet-2318	40	8	and	and	CCONJ
cet-2318	40	9	longitudinal	longitudinal	ADJ
cet-2318	40	10	optical	optical	ADJ
cet-2318	40	11	(	(	PUNCT
cet-2318	40	12	lo	lo	NOUN
cet-2318	40	13	)	)	PUNCT
cet-2318	40	14	are	be	AUX
cet-2318	40	15	shifted	shift	VERB
cet-2318	40	16	towards	towards	ADP
cet-2318	40	17	low	low	ADJ
cet-2318	40	18	wavenumber	wavenumber	NOUN
cet-2318	40	19	region	region	NOUN
cet-2318	40	20	if	if	SCONJ
cet-2318	40	21	compared	compare	VERB
cet-2318	40	22	with	with	ADP
cet-2318	40	23	pristine	pristine	ADJ
cet-2318	40	24	3c	3c	NUM
cet-2318	40	25	-	-	PUNCT
cet-2318	40	26	sic	sic	ADJ
cet-2318	40	27	,	,	PUNCT
cet-2318	40	28	the	the	DET
cet-2318	40	29	red	red	ADJ
cet-2318	40	30	shift	shift	NOUN
cet-2318	40	31	of	of	ADP
cet-2318	40	32	the	the	DET
cet-2318	40	33	raman	raman	NOUN
cet-2318	40	34	bands	band	NOUN
cet-2318	40	35	ending	end	VERB
cet-2318	40	36	layer	layer	NOUN
cet-2318	40	37	a	a	DET
cet-2318	40	38	b	b	NOUN
cet-2318	40	39	c	c	NOUN
cet-2318	40	40	a	a	DET
cet-2318	40	41	c	c	PROPN
cet-2318	40	42	b	b	PROPN
cet-2318	40	43	a	a	DET
cet-2318	40	44	0.35	0.35	NUM
cet-2318	40	45	nm	nm	NOUN
cet-2318	40	46	b	b	NOUN
cet-2318	40	47	1526	1526	NUM
cet-2318	40	48	might	might	AUX
cet-2318	40	49	be	be	AUX
cet-2318	40	50	due	due	ADJ
cet-2318	40	51	to	to	ADP
cet-2318	40	52	the	the	DET
cet-2318	40	53	confinement	confinement	ADJ
cet-2318	40	54	effect	effect	NOUN
cet-2318	40	55	,	,	PUNCT
cet-2318	40	56	stacking	stack	VERB
cet-2318	40	57	faults	fault	NOUN
cet-2318	40	58	and	and	CCONJ
cet-2318	40	59	stress	stress	NOUN
cet-2318	40	60	form	form	VERB
cet-2318	40	61	the	the	DET
cet-2318	40	62	heterostructure	heterostructure	NOUN
cet-2318	40	63	of	of	ADP
cet-2318	40	64	core	core	NOUN
cet-2318	40	65	shell	shell	NOUN
cet-2318	40	66	g	g	PROPN
cet-2318	40	67	/	/	SYM
cet-2318	40	68	sio2	sio2	NOUN
cet-2318	40	69	/	/	SYM
cet-2318	40	70	sic	sic	ADJ
cet-2318	40	71	structure	structure	NOUN
cet-2318	40	72	(	(	PUNCT
cet-2318	40	73	panda	panda	NOUN
cet-2318	40	74	et	et	PROPN
cet-2318	40	75	al	al	PROPN
cet-2318	40	76	.	.	PROPN
cet-2318	40	77	,	,	PUNCT
cet-2318	40	78	2010	2010	NUM
cet-2318	40	79	)	)	PUNCT
cet-2318	40	80	.	.	PUNCT
cet-2318	41	1	the	the	DET
cet-2318	41	2	band	band	NOUN
cet-2318	41	3	at	at	ADP
cet-2318	41	4	~2960	~2960	PROPN
cet-2318	41	5	cm-1	cm-1	X
cet-2318	41	6	is	be	AUX
cet-2318	41	7	attributed	attribute	VERB
cet-2318	41	8	to	to	ADP
cet-2318	41	9	a	a	DET
cet-2318	41	10	superimposition	superimposition	NOUN
cet-2318	41	11	of	of	ADP
cet-2318	41	12	a	a	DET
cet-2318	41	13	pair	pair	NOUN
cet-2318	41	14	of	of	ADP
cet-2318	41	15	the	the	DET
cet-2318	41	16	combination	combination	NOUN
cet-2318	41	17	bands	band	NOUN
cet-2318	41	18	:	:	PUNCT
cet-2318	41	19	the	the	DET
cet-2318	41	20	d+g	d+g	PROPN
cet-2318	41	21	and	and	CCONJ
cet-2318	41	22	d+d	d+d	PROPN
cet-2318	41	23	’	'	PUNCT
cet-2318	41	24	bands	band	NOUN
cet-2318	41	25	,	,	PUNCT
cet-2318	41	26	(	(	PUNCT
cet-2318	41	27	d	d	X
cet-2318	41	28	’	'	PUNCT
cet-2318	41	29	is	be	AUX
cet-2318	41	30	the	the	DET
cet-2318	41	31	shoulder	shoulder	NOUN
cet-2318	41	32	in	in	ADP
cet-2318	41	33	the	the	DET
cet-2318	41	34	g	g	PROPN
cet-2318	41	35	band	band	NOUN
cet-2318	41	36	typically	typically	ADV
cet-2318	41	37	present	present	ADJ
cet-2318	41	38	at	at	ADP
cet-2318	41	39	~1620	~1620	NUM
cet-2318	41	40	cm-1	cm-1	X
cet-2318	41	41	)	)	PUNCT
cet-2318	41	42	(	(	PUNCT
cet-2318	41	43	handa	handa	PROPN
cet-2318	41	44	et	et	PROPN
cet-2318	41	45	al	al	PROPN
cet-2318	41	46	.	.	PROPN
cet-2318	41	47	,	,	PUNCT
cet-2318	41	48	2011	2011	NUM
cet-2318	41	49	)	)	PUNCT
cet-2318	41	50	.	.	PUNCT
cet-2318	42	1	in	in	ADP
cet-2318	42	2	addition	addition	NOUN
cet-2318	42	3	to	to	ADP
cet-2318	42	4	the	the	DET
cet-2318	42	5	typical	typical	ADJ
cet-2318	42	6	peaks	peak	NOUN
cet-2318	42	7	of	of	ADP
cet-2318	42	8	sic	sic	NOUN
cet-2318	42	9	in	in	ADP
cet-2318	42	10	the	the	DET
cet-2318	42	11	xrd	xrd	NOUN
cet-2318	42	12	spectrum	spectrum	NOUN
cet-2318	42	13	of	of	ADP
cet-2318	42	14	the	the	DET
cet-2318	42	15	g	g	PROPN
cet-2318	42	16	/	/	SYM
cet-2318	42	17	sio2	sio2	NOUN
cet-2318	42	18	/	/	SYM
cet-2318	42	19	sic	sic	ADJ
cet-2318	42	20	(	(	PUNCT
cet-2318	42	21	figure	figure	NOUN
cet-2318	42	22	2b	2b	NOUN
cet-2318	42	23	)	)	PUNCT
cet-2318	42	24	the	the	DET
cet-2318	42	25	strong	strong	ADJ
cet-2318	42	26	peak	peak	NOUN
cet-2318	42	27	at	at	ADP
cet-2318	42	28	21,9	21,9	NUM
cet-2318	42	29	°	°	NOUN
cet-2318	42	30	due	due	ADJ
cet-2318	42	31	to	to	ADP
cet-2318	42	32	sio2	sio2	PROPN
cet-2318	42	33	is	be	AUX
cet-2318	42	34	also	also	ADV
cet-2318	42	35	visible	visible	ADJ
cet-2318	42	36	.	.	PUNCT
cet-2318	43	1	the	the	DET
cet-2318	43	2	spectrum	spectrum	NOUN
cet-2318	43	3	in	in	ADP
cet-2318	43	4	the	the	DET
cet-2318	43	5	range	range	NOUN
cet-2318	43	6	20	20	NUM
cet-2318	43	7	-	-	SYM
cet-2318	43	8	30	30	NUM
cet-2318	43	9	°	°	NOUN
cet-2318	43	10	is	be	AUX
cet-2318	43	11	characterized	characterize	VERB
cet-2318	43	12	by	by	ADP
cet-2318	43	13	a	a	DET
cet-2318	43	14	more	more	ADJ
cet-2318	43	15	noise	noise	NOUN
cet-2318	43	16	than	than	ADP
cet-2318	43	17	that	that	PRON
cet-2318	43	18	of	of	ADP
cet-2318	43	19	pristine	pristine	ADJ
cet-2318	43	20	3c	3c	NUM
cet-2318	43	21	-	-	PUNCT
cet-2318	43	22	sic	sic	ADJ
cet-2318	43	23	,	,	PUNCT
cet-2318	43	24	on	on	ADP
cet-2318	43	25	the	the	DET
cet-2318	43	26	other	other	ADJ
cet-2318	43	27	hand	hand	NOUN
cet-2318	43	28	the	the	DET
cet-2318	43	29	(	(	PUNCT
cet-2318	43	30	002	002	NUM
cet-2318	43	31	)	)	PUNCT
cet-2318	43	32	peak	peak	NOUN
cet-2318	43	33	due	due	ADP
cet-2318	43	34	to	to	ADP
cet-2318	43	35	carbon	carbon	NOUN
cet-2318	43	36	stacking	stacking	NOUN
cet-2318	43	37	is	be	AUX
cet-2318	43	38	no	no	DET
cet-2318	43	39	visible	visible	ADJ
cet-2318	43	40	,	,	PUNCT
cet-2318	43	41	suggesting	suggest	VERB
cet-2318	43	42	a	a	DET
cet-2318	43	43	thin	thin	ADJ
cet-2318	43	44	structure	structure	NOUN
cet-2318	43	45	of	of	ADP
cet-2318	43	46	few	few	ADJ
cet-2318	43	47	graphene	graphene	NOUN
cet-2318	43	48	and	and	CCONJ
cet-2318	43	49	disorder	disorder	NOUN
cet-2318	43	50	for	for	ADP
cet-2318	43	51	the	the	DET
cet-2318	43	52	carbon	carbon	NOUN
cet-2318	43	53	layers	layer	NOUN
cet-2318	43	54	.	.	PUNCT
cet-2318	44	1	figure	figure	VERB
cet-2318	44	2	2	2	NUM
cet-2318	44	3	:	:	PUNCT
cet-2318	44	4	raman	raman	NOUN
cet-2318	44	5	spectrum	spectrum	NOUN
cet-2318	44	6	of	of	ADP
cet-2318	44	7	g	g	PROPN
cet-2318	44	8	/	/	SYM
cet-2318	44	9	sio2	sio2	NOUN
cet-2318	44	10	/	/	SYM
cet-2318	44	11	sic	sic	ADJ
cet-2318	44	12	(	(	PUNCT
cet-2318	44	13	a	a	NOUN
cet-2318	44	14	)	)	PUNCT
cet-2318	44	15	and	and	CCONJ
cet-2318	44	16	x	x	X
cet-2318	44	17	-	-	NOUN
cet-2318	44	18	ray	ray	NOUN
cet-2318	44	19	diffraction	diffraction	NOUN
cet-2318	44	20	spectrum	spectrum	NOUN
cet-2318	44	21	of	of	ADP
cet-2318	44	22	g	g	PROPN
cet-2318	44	23	/	/	SYM
cet-2318	44	24	sio2	sio2	NOUN
cet-2318	44	25	/	/	SYM
cet-2318	44	26	sic	sic	ADJ
cet-2318	44	27	(	(	PUNCT
cet-2318	44	28	b	b	NOUN
cet-2318	44	29	)	)	PUNCT
cet-2318	44	30	.	.	PUNCT
cet-2318	45	1	silicon	silicon	PROPN
cet-2318	45	2	carbide	carbide	PROPN
cet-2318	45	3	is	be	AUX
cet-2318	45	4	a	a	DET
cet-2318	45	5	promising	promising	ADJ
cet-2318	45	6	semiconductor	semiconductor	NOUN
cet-2318	45	7	to	to	PART
cet-2318	45	8	be	be	AUX
cet-2318	45	9	used	use	VERB
cet-2318	45	10	in	in	ADP
cet-2318	45	11	metal	metal	NOUN
cet-2318	45	12	-	-	PUNCT
cet-2318	45	13	oxide	oxide	NOUN
cet-2318	45	14	-	-	PUNCT
cet-2318	45	15	semiconductor	semiconductor	NOUN
cet-2318	45	16	devices	device	NOUN
cet-2318	45	17	,	,	PUNCT
cet-2318	45	18	for	for	ADP
cet-2318	45	19	this	this	DET
cet-2318	45	20	applications	application	NOUN
cet-2318	45	21	it	it	PRON
cet-2318	45	22	is	be	AUX
cet-2318	45	23	most	most	ADV
cet-2318	45	24	advantageous	advantageous	ADJ
cet-2318	45	25	that	that	SCONJ
cet-2318	45	26	the	the	DET
cet-2318	45	27	oxidation	oxidation	NOUN
cet-2318	45	28	of	of	ADP
cet-2318	45	29	sic	sic	ADJ
cet-2318	45	30	leads	lead	NOUN
cet-2318	45	31	to	to	PART
cet-2318	45	32	sio2	sio2	VERB
cet-2318	45	33	passivated	passivate	VERB
cet-2318	45	34	surface	surface	NOUN
cet-2318	45	35	,	,	PUNCT
cet-2318	45	36	as	as	ADP
cet-2318	45	37	for	for	ADP
cet-2318	45	38	the	the	DET
cet-2318	45	39	most	most	ADV
cet-2318	45	40	popular	popular	ADJ
cet-2318	45	41	si	si	NOUN
cet-2318	45	42	technology	technology	NOUN
cet-2318	45	43	.	.	PUNCT
cet-2318	46	1	therefore	therefore	ADV
cet-2318	46	2	,	,	PUNCT
cet-2318	46	3	numerous	numerous	ADJ
cet-2318	46	4	studies	study	NOUN
cet-2318	46	5	(	(	PUNCT
cet-2318	46	6	costello	costello	NOUN
cet-2318	46	7	and	and	CCONJ
cet-2318	46	8	tressler	tressler	NOUN
cet-2318	46	9	,	,	PUNCT
cet-2318	46	10	1986	1986	NUM
cet-2318	46	11	;	;	PUNCT
cet-2318	46	12	mieskowski	mieskowski	PROPN
cet-2318	46	13	et	et	PROPN
cet-2318	46	14	al	al	PROPN
cet-2318	46	15	.	.	PROPN
cet-2318	46	16	,	,	PUNCT
cet-2318	46	17	1984	1984	NUM
cet-2318	46	18	;	;	PUNCT
cet-2318	46	19	pultz	pultz	NOUN
cet-2318	46	20	,	,	PUNCT
cet-2318	46	21	1967	1967	NUM
cet-2318	46	22	)	)	PUNCT
cet-2318	46	23	have	have	AUX
cet-2318	46	24	been	be	AUX
cet-2318	46	25	conducted	conduct	VERB
cet-2318	46	26	on	on	ADP
cet-2318	46	27	the	the	DET
cet-2318	46	28	oxidation	oxidation	NOUN
cet-2318	46	29	of	of	ADP
cet-2318	46	30	4hand	4hand	NUM
cet-2318	46	31	6h	6h	NOUN
cet-2318	46	32	-	-	PUNCT
cet-2318	46	33	sic	sic	ADJ
cet-2318	46	34	samples	sample	NOUN
cet-2318	46	35	,	,	PUNCT
cet-2318	46	36	and	and	CCONJ
cet-2318	46	37	several	several	ADJ
cet-2318	46	38	models	model	NOUN
cet-2318	46	39	reported	report	VERB
cet-2318	46	40	to	to	PART
cet-2318	46	41	explain	explain	VERB
cet-2318	46	42	it	it	PRON
cet-2318	46	43	.	.	PUNCT
cet-2318	47	1	compared	compare	VERB
cet-2318	47	2	to	to	ADP
cet-2318	47	3	thermal	thermal	ADJ
cet-2318	47	4	oxidation	oxidation	NOUN
cet-2318	47	5	of	of	ADP
cet-2318	47	6	si	si	PROPN
cet-2318	47	7	,	,	PUNCT
cet-2318	47	8	oxidation	oxidation	NOUN
cet-2318	47	9	of	of	ADP
cet-2318	47	10	sic	sic	ADJ
cet-2318	47	11	is	be	AUX
cet-2318	47	12	more	more	ADV
cet-2318	47	13	complicated	complicated	ADJ
cet-2318	47	14	.	.	PUNCT
cet-2318	48	1	the	the	DET
cet-2318	48	2	oxidation	oxidation	NOUN
cet-2318	48	3	process	process	NOUN
cet-2318	48	4	of	of	ADP
cet-2318	48	5	silicon	silicon	NOUN
cet-2318	48	6	carbide	carbide	NOUN
cet-2318	48	7	is	be	AUX
cet-2318	48	8	governed	govern	VERB
cet-2318	48	9	by	by	ADP
cet-2318	48	10	the	the	DET
cet-2318	48	11	transport	transport	NOUN
cet-2318	48	12	of	of	ADP
cet-2318	48	13	molecular	molecular	ADJ
cet-2318	48	14	oxygen	oxygen	NOUN
cet-2318	48	15	to	to	ADP
cet-2318	48	16	the	the	DET
cet-2318	48	17	reaction	reaction	NOUN
cet-2318	48	18	front	front	NOUN
cet-2318	48	19	,	,	PUNCT
cet-2318	48	20	the	the	DET
cet-2318	48	21	reaction	reaction	NOUN
cet-2318	48	22	of	of	ADP
cet-2318	48	23	oxygen	oxygen	NOUN
cet-2318	48	24	with	with	ADP
cet-2318	48	25	sic	sic	NOUN
cet-2318	48	26	at	at	ADP
cet-2318	48	27	the	the	DET
cet-2318	48	28	interface	interface	NOUN
cet-2318	48	29	and	and	CCONJ
cet-2318	48	30	the	the	DET
cet-2318	48	31	out	out	ADJ
cet-2318	48	32	diffusion	diffusion	NOUN
cet-2318	48	33	of	of	ADP
cet-2318	48	34	gases	gas	NOUN
cet-2318	48	35	through	through	ADP
cet-2318	48	36	the	the	DET
cet-2318	48	37	growing	grow	VERB
cet-2318	48	38	silicon	silicon	NOUN
cet-2318	48	39	oxide	oxide	NOUN
cet-2318	48	40	film	film	NOUN
cet-2318	48	41	.	.	PUNCT
cet-2318	49	1	scheme	scheme	NOUN
cet-2318	49	2	1	1	NUM
cet-2318	49	3	:	:	PUNCT
cet-2318	49	4	the	the	DET
cet-2318	49	5	five	five	NUM
cet-2318	49	6	steps	step	NOUN
cet-2318	49	7	during	during	ADP
cet-2318	49	8	sic	sic	ADJ
cet-2318	49	9	oxidation	oxidation	NOUN
cet-2318	49	10	.	.	PUNCT
cet-2318	50	1	there	there	PRON
cet-2318	50	2	are	be	VERB
cet-2318	50	3	five	five	NUM
cet-2318	50	4	steps	step	NOUN
cet-2318	50	5	(	(	PUNCT
cet-2318	50	6	see	see	VERB
cet-2318	50	7	the	the	DET
cet-2318	50	8	scheme	scheme	NOUN
cet-2318	50	9	1	1	NUM
cet-2318	50	10	)	)	PUNCT
cet-2318	50	11	in	in	ADP
cet-2318	50	12	the	the	DET
cet-2318	50	13	thermal	thermal	ADJ
cet-2318	50	14	oxidation	oxidation	NOUN
cet-2318	50	15	of	of	ADP
cet-2318	50	16	sic	sic	ADJ
cet-2318	50	17	:	:	PUNCT
cet-2318	50	18	(	(	PUNCT
cet-2318	50	19	i	i	NOUN
cet-2318	50	20	)	)	PUNCT
cet-2318	50	21	diffusion	diffusion	NOUN
cet-2318	50	22	of	of	ADP
cet-2318	50	23	oxygen	oxygen	NOUN
cet-2318	50	24	gas	gas	NOUN
cet-2318	50	25	to	to	ADP
cet-2318	50	26	the	the	DET
cet-2318	50	27	oxide	oxide	NOUN
cet-2318	50	28	surface	surface	NOUN
cet-2318	50	29	;	;	PUNCT
cet-2318	50	30	(	(	PUNCT
cet-2318	50	31	ii	ii	NOUN
cet-2318	50	32	)	)	PUNCT
cet-2318	50	33	in	in	ADP
cet-2318	50	34	-	-	PUNCT
cet-2318	50	35	diffusion	diffusion	NOUN
cet-2318	50	36	of	of	ADP
cet-2318	50	37	oxygen	oxygen	NOUN
cet-2318	50	38	through	through	ADP
cet-2318	50	39	the	the	DET
cet-2318	50	40	oxide	oxide	NOUN
cet-2318	50	41	film	film	NOUN
cet-2318	50	42	(	(	PUNCT
cet-2318	50	43	favoured	favour	VERB
cet-2318	50	44	the	the	DET
cet-2318	50	45	higher	high	ADJ
cet-2318	50	46	the	the	DET
cet-2318	50	47	oxygen	oxygen	NOUN
cet-2318	50	48	partial	partial	ADJ
cet-2318	50	49	pressure	pressure	NOUN
cet-2318	50	50	)	)	PUNCT
cet-2318	50	51	;	;	PUNCT
cet-2318	50	52	(	(	PUNCT
cet-2318	50	53	iii	iii	X
cet-2318	50	54	)	)	PUNCT
cet-2318	50	55	reaction	reaction	NOUN
cet-2318	50	56	,	,	PUNCT
cet-2318	50	57	at	at	ADP
cet-2318	50	58	the	the	DET
cet-2318	50	59	oxide	oxide	NOUN
cet-2318	50	60	/	/	SYM
cet-2318	50	61	sic	sic	ADJ
cet-2318	50	62	interface	interface	NOUN
cet-2318	50	63	,	,	PUNCT
cet-2318	50	64	with	with	ADP
cet-2318	50	65	sic	sic	ADJ
cet-2318	50	66	(	(	PUNCT
cet-2318	50	67	favoured	favour	VERB
cet-2318	50	68	by	by	ADP
cet-2318	50	69	temperature	temperature	NOUN
cet-2318	50	70	,	,	PUNCT
cet-2318	50	71	at	at	ADP
cet-2318	50	72	given	give	VERB
cet-2318	50	73	operating	operating	NOUN
cet-2318	50	74	conditions	condition	NOUN
cet-2318	50	75	,	,	PUNCT
cet-2318	50	76	more	more	ADJ
cet-2318	50	77	than	than	ADP
cet-2318	50	78	the	the	DET
cet-2318	50	79	others	other	NOUN
cet-2318	50	80	steps	step	NOUN
cet-2318	50	81	)	)	PUNCT
cet-2318	50	82	;	;	PUNCT
cet-2318	50	83	(	(	PUNCT
cet-2318	50	84	iv	iv	X
cet-2318	50	85	)	)	PUNCT
cet-2318	50	86	out	out	ADJ
cet-2318	50	87	-	-	PUNCT
cet-2318	50	88	diffusion	diffusion	NOUN
cet-2318	50	89	of	of	ADP
cet-2318	50	90	the	the	DET
cet-2318	50	91	produced	produce	VERB
cet-2318	50	92	gases	gas	NOUN
cet-2318	50	93	through	through	ADP
cet-2318	50	94	the	the	DET
cet-2318	50	95	oxide	oxide	NOUN
cet-2318	50	96	;	;	PUNCT
cet-2318	50	97	(	(	PUNCT
cet-2318	50	98	v	v	NOUN
cet-2318	50	99	)	)	PUNCT
cet-2318	50	100	diffusion	diffusion	NOUN
cet-2318	50	101	of	of	ADP
cet-2318	50	102	the	the	DET
cet-2318	50	103	product	product	NOUN
cet-2318	50	104	gases	gas	VERB
cet-2318	50	105	away	away	ADV
cet-2318	50	106	from	from	ADP
cet-2318	50	107	the	the	DET
cet-2318	50	108	oxide	oxide	NOUN
cet-2318	50	109	surface	surface	NOUN
cet-2318	50	110	.	.	PUNCT
cet-2318	51	1	a	a	DET
cet-2318	51	2	b	b	NOUN
cet-2318	51	3	500	500	NUM
cet-2318	51	4	1000	1000	NUM
cet-2318	51	5	1500	1500	NUM
cet-2318	51	6	2000	2000	NUM
cet-2318	51	7	2500	2500	NUM
cet-2318	51	8	3000	3000	NUM
cet-2318	51	9	in	in	ADP
cet-2318	51	10	te	te	PROPN
cet-2318	51	11	n	n	PROPN
cet-2318	51	12	s	s	PRON
cet-2318	51	13	it	it	PRON
cet-2318	51	14	y	y	NOUN
cet-2318	51	15	a	a	DET
cet-2318	51	16	.u	.u	NOUN
cet-2318	51	17	.	.	PUNCT
cet-2318	52	1	raman	raman	NOUN
cet-2318	52	2	shift	shift	NOUN
cet-2318	52	3	cm	cm	NOUN
cet-2318	52	4	-1	-1	PUNCT
cet-2318	52	5	785	785	NUM
cet-2318	52	6	1346	1346	NUM
cet-2318	52	7	1596	1596	NUM
cet-2318	52	8	2700	2700	NUM
cet-2318	52	9	1505	1505	NUM
cet-2318	53	1	d	d	NOUN
cet-2318	53	2	g	g	PROPN
cet-2318	53	3	2d	2d	NOUN
cet-2318	53	4	d+g	d+g	PROPN
cet-2318	53	5	20	20	NUM
cet-2318	53	6	40	40	NUM
cet-2318	53	7	60	60	NUM
cet-2318	53	8	80	80	NUM
cet-2318	53	9	in	in	ADP
cet-2318	53	10	te	te	PROPN
cet-2318	53	11	ns	ns	NUM
cet-2318	53	12	ity	ity	PROPN
cet-2318	53	13	a	a	DET
cet-2318	53	14	.u	.u	NOUN
cet-2318	53	15	.	.	PUNCT
cet-2318	54	1	2	2	NUM
cet-2318	54	2	sic	sic	ADJ
cet-2318	54	3	sio	sio	NOUN
cet-2318	54	4	2	2	NUM
cet-2318	54	5	o	o	NOUN
cet-2318	54	6	2	2	NUM
cet-2318	54	7	o	o	NOUN
cet-2318	54	8	2	2	NUM
cet-2318	54	9	o	o	NOUN
cet-2318	54	10	2	2	NUM
cet-2318	54	11	co	co	NOUN
cet-2318	54	12	co	co	X
cet-2318	54	13	co	co	PROPN
cet-2318	54	14	w	w	PROPN
cet-2318	54	15	h	h	PROPN
cet-2318	54	16	o2	o2	PROPN
cet-2318	54	17	d	d	PROPN
cet-2318	54	18	o2	o2	PROPN
cet-2318	54	19	h	h	PROPN
cet-2318	54	20	co	co	NOUN
cet-2318	54	21	d	d	X
cet-2318	54	22	co	co	PROPN
cet-2318	54	23	c	c	PROPN
cet-2318	54	24	o2	o2	PROPN
cet-2318	54	25	*	*	PROPN
cet-2318	54	26	c	c	PROPN
cet-2318	54	27	o2	o2	PROPN
cet-2318	54	28	s	s	PROPN
cet-2318	54	29	c	c	PROPN
cet-2318	54	30	o2	o2	PROPN
cet-2318	54	31	c	c	PROPN
cet-2318	54	32	co	co	NOUN
cet-2318	54	33	*	*	PUNCT
cet-2318	54	34	c	c	X
cet-2318	54	35	co	co	NOUN
cet-2318	54	36	s	s	PROPN
cet-2318	54	37	c	c	PROPN
cet-2318	54	38	co	co	X
cet-2318	54	39	1527	1527	NUM
cet-2318	54	40	in	in	ADP
cet-2318	54	41	particular	particular	ADJ
cet-2318	54	42	,	,	PUNCT
cet-2318	54	43	looking	look	VERB
cet-2318	54	44	to	to	PART
cet-2318	54	45	scheme	scheme	VERB
cet-2318	54	46	1	1	NUM
cet-2318	54	47	,	,	PUNCT
cet-2318	54	48	the	the	DET
cet-2318	54	49	oxygen	oxygen	NOUN
cet-2318	54	50	flux	flux	NOUN
cet-2318	54	51	to	to	ADP
cet-2318	54	52	the	the	DET
cet-2318	54	53	vicinity	vicinity	NOUN
cet-2318	54	54	and	and	CCONJ
cet-2318	54	55	in	in	ADP
cet-2318	54	56	the	the	DET
cet-2318	54	57	sio2	sio2	PROPN
cet-2318	54	58	bulk	bulk	NOUN
cet-2318	54	59	(	(	PUNCT
cet-2318	54	60	song	song	NOUN
cet-2318	54	61	et	et	PROPN
cet-2318	54	62	al	al	PROPN
cet-2318	54	63	.	.	PROPN
cet-2318	54	64	,	,	PUNCT
cet-2318	54	65	2004	2004	NUM
cet-2318	54	66	)	)	PUNCT
cet-2318	54	67	can	can	AUX
cet-2318	54	68	be	be	AUX
cet-2318	54	69	written	write	VERB
cet-2318	54	70	as	as	ADP
cet-2318	54	71	:	:	PUNCT
cet-2318	54	72	o	o	X
cet-2318	54	73	s	s	X
cet-2318	54	74	coco	coco	PROPN
cet-2318	54	75	coo	coo	PROPN
cet-2318	54	76	s	s	PROPN
cet-2318	55	1	cocococo	cocococo	PROPN
cet-2318	55	2	o	o	X
cet-2318	55	3	s	s	X
cet-2318	55	4	o	o	X
cet-2318	55	5	oo	oo	NOUN
cet-2318	55	6	s	s	VERB
cet-2318	55	7	oooo	oooo	NOUN
cet-2318	55	8	x	x	PUNCT
cet-2318	55	9	cc	cc	ADP
cet-2318	55	10	df	df	PROPN
cet-2318	55	11	cchf	cchf	PROPN
cet-2318	55	12	w	w	PROPN
cet-2318	55	13	cc	cc	PROPN
cet-2318	55	14	df	df	PROPN
cet-2318	55	15	cchf	cchf	NOUN
cet-2318	55	16	)	)	PUNCT
cet-2318	55	17	(	(	PUNCT
cet-2318	55	18	)	)	PUNCT
cet-2318	55	19	(	(	PUNCT
cet-2318	55	20	)	)	PUNCT
cet-2318	55	21	(	(	PUNCT
cet-2318	55	22	)	)	PUNCT
cet-2318	55	23	(	(	PUNCT
cet-2318	55	24	2	2	NUM
cet-2318	55	25	22	22	NUM
cet-2318	55	26	22	22	NUM
cet-2318	55	27	2222	2222	NUM
cet-2318	55	28	*	*	PUNCT
cet-2318	55	29			NOUN
cet-2318	55	30			PROPN
cet-2318	55	31			ADJ
cet-2318	55	32			NOUN
cet-2318	55	33			NOUN
cet-2318	55	34			PROPN
cet-2318	55	35	where	where	SCONJ
cet-2318	55	36	ho2	ho2	PROPN
cet-2318	55	37	is	be	AUX
cet-2318	55	38	the	the	DET
cet-2318	55	39	gas	gas	NOUN
cet-2318	55	40	phase	phase	NOUN
cet-2318	55	41	transport	transport	NOUN
cet-2318	55	42	coefficient	coefficient	NOUN
cet-2318	55	43	,	,	PUNCT
cet-2318	55	44	do2	do2	VERB
cet-2318	55	45	the	the	DET
cet-2318	55	46	oxygen	oxygen	NOUN
cet-2318	55	47	diffusivity	diffusivity	NOUN
cet-2318	55	48	in	in	ADP
cet-2318	55	49	the	the	DET
cet-2318	55	50	metal	metal	NOUN
cet-2318	55	51	bulk	bulk	NOUN
cet-2318	55	52	,	,	PUNCT
cet-2318	55	53	and	and	CCONJ
cet-2318	55	54	those	those	PRON
cet-2318	55	55	for	for	ADP
cet-2318	55	56	co	co	NOUN
cet-2318	55	57	:	:	PUNCT
cet-2318	55	58	w	w	PROPN
cet-2318	55	59	cc	cc	PROPN
cet-2318	55	60	df	df	PROPN
cet-2318	55	61	cchf	cchf	PROPN
cet-2318	55	62	s	s	PART
cet-2318	55	63	coco	coco	PROPN
cet-2318	55	64	coco	coco	PROPN
cet-2318	55	65	co	co	PROPN
cet-2318	55	66	s	s	PROPN
cet-2318	55	67	cococo	cococo	PROPN
cet-2318	55	68	)	)	PUNCT
cet-2318	55	69	(	(	PUNCT
cet-2318	55	70	)	)	PUNCT
cet-2318	55	71	(	(	PUNCT
cet-2318	55	72	*	*	PUNCT
cet-2318	55	73			NOUN
cet-2318	55	74			PRON
cet-2318	55	75			ADJ
cet-2318	55	76	finally	finally	ADV
cet-2318	55	77	the	the	DET
cet-2318	55	78	flux	flux	NOUN
cet-2318	55	79	corresponding	correspond	VERB
cet-2318	55	80	to	to	ADP
cet-2318	55	81	the	the	DET
cet-2318	55	82	oxidation	oxidation	NOUN
cet-2318	55	83	rate	rate	NOUN
cet-2318	55	84	are	be	AUX
cet-2318	55	85	:	:	PUNCT
cet-2318	55	86	corof	corof	NOUN
cet-2318	55	87	ckckf	ckckf	NOUN
cet-2318	55	88			PROPN
cet-2318	55	89	2	2	NUM
cet-2318	55	90	where	where	SCONJ
cet-2318	55	91	kf	kf	PROPN
cet-2318	55	92	and	and	CCONJ
cet-2318	55	93	kr	kr	PROPN
cet-2318	55	94	are	be	AUX
cet-2318	55	95	the	the	DET
cet-2318	55	96	rate	rate	NOUN
cet-2318	55	97	constant	constant	ADJ
cet-2318	55	98	of	of	ADP
cet-2318	55	99	the	the	DET
cet-2318	55	100	forward	forward	ADJ
cet-2318	55	101	and	and	CCONJ
cet-2318	55	102	reverse	reverse	ADJ
cet-2318	55	103	reactions	reaction	NOUN
cet-2318	55	104	,	,	PUNCT
cet-2318	55	105	respectively	respectively	ADV
cet-2318	55	106	.	.	PUNCT
cet-2318	56	1	the	the	DET
cet-2318	56	2	first	first	ADJ
cet-2318	56	3	and	and	CCONJ
cet-2318	56	4	last	last	ADJ
cet-2318	56	5	steps	step	NOUN
cet-2318	56	6	in	in	ADP
cet-2318	56	7	general	general	ADJ
cet-2318	56	8	are	be	AUX
cet-2318	56	9	not	not	PART
cet-2318	56	10	rate	rate	NOUN
cet-2318	56	11	-	-	PUNCT
cet-2318	56	12	controlling	control	VERB
cet-2318	56	13	steps	step	NOUN
cet-2318	56	14	.	.	PUNCT
cet-2318	57	1	among	among	ADP
cet-2318	57	2	the	the	DET
cet-2318	57	3	different	different	ADJ
cet-2318	57	4	other	other	ADJ
cet-2318	57	5	steps	step	NOUN
cet-2318	57	6	the	the	DET
cet-2318	57	7	rate	rate	NOUN
cet-2318	57	8	limiting	limit	VERB
cet-2318	57	9	step	step	NOUN
cet-2318	57	10	is	be	AUX
cet-2318	57	11	still	still	ADV
cet-2318	57	12	uncertain	uncertain	ADJ
cet-2318	57	13	as	as	SCONJ
cet-2318	57	14	discussed	discuss	VERB
cet-2318	57	15	in	in	ADP
cet-2318	57	16	several	several	ADJ
cet-2318	57	17	articles	article	NOUN
cet-2318	57	18	(	(	PUNCT
cet-2318	57	19	jacobson	jacobson	PROPN
cet-2318	57	20	,	,	PUNCT
cet-2318	57	21	1993	1993	NUM
cet-2318	57	22	;	;	PUNCT
cet-2318	57	23	luthra	luthra	NOUN
cet-2318	57	24	,	,	PUNCT
cet-2318	57	25	1991	1991	NUM
cet-2318	57	26	)	)	PUNCT
cet-2318	57	27	.	.	PUNCT
cet-2318	58	1	depending	depend	VERB
cet-2318	58	2	on	on	ADP
cet-2318	58	3	the	the	DET
cet-2318	58	4	oxidation	oxidation	NOUN
cet-2318	58	5	conditions	condition	NOUN
cet-2318	58	6	,	,	PUNCT
cet-2318	58	7	various	various	ADJ
cet-2318	58	8	limiting	limiting	NOUN
cet-2318	58	9	processes	process	NOUN
cet-2318	58	10	are	be	AUX
cet-2318	58	11	possible	possible	ADJ
cet-2318	58	12	,	,	PUNCT
cet-2318	58	13	influencing	influence	VERB
cet-2318	58	14	the	the	DET
cet-2318	58	15	characteristics	characteristic	NOUN
cet-2318	58	16	of	of	ADP
cet-2318	58	17	the	the	DET
cet-2318	58	18	oxidation	oxidation	NOUN
cet-2318	58	19	process	process	NOUN
cet-2318	58	20	also	also	ADV
cet-2318	58	21	giving	give	VERB
cet-2318	58	22	rise	rise	NOUN
cet-2318	58	23	to	to	ADP
cet-2318	58	24	different	different	ADJ
cet-2318	58	25	reaction	reaction	NOUN
cet-2318	58	26	.	.	PUNCT
cet-2318	59	1	in	in	ADP
cet-2318	59	2	particular	particular	ADJ
cet-2318	59	3	,	,	PUNCT
cet-2318	59	4	four	four	NUM
cet-2318	59	5	different	different	ADJ
cet-2318	59	6	reactions	reaction	NOUN
cet-2318	59	7	(	(	PUNCT
cet-2318	59	8	song	song	NOUN
cet-2318	59	9	and	and	CCONJ
cet-2318	59	10	smith	smith	PROPN
cet-2318	59	11	,	,	PUNCT
cet-2318	59	12	2002	2002	NUM
cet-2318	59	13	)	)	PUNCT
cet-2318	59	14	are	be	AUX
cet-2318	59	15	predicted	predict	VERB
cet-2318	59	16	to	to	PART
cet-2318	59	17	be	be	AUX
cet-2318	59	18	dominant	dominant	ADJ
cet-2318	59	19	,	,	PUNCT
cet-2318	59	20	depending	depend	VERB
cet-2318	59	21	on	on	ADP
cet-2318	59	22	p(o2	p(o2	NOUN
cet-2318	59	23	)	)	PUNCT
cet-2318	59	24	and	and	CCONJ
cet-2318	59	25	t	t	PROPN
cet-2318	59	26	,	,	PUNCT
cet-2318	59	27	producing	produce	VERB
cet-2318	59	28	four	four	NUM
cet-2318	59	29	different	different	ADJ
cet-2318	59	30	results	result	NOUN
cet-2318	59	31	(	(	PUNCT
cet-2318	59	32	the	the	DET
cet-2318	59	33	experiments	experiment	NOUN
cet-2318	59	34	have	have	AUX
cet-2318	59	35	been	be	AUX
cet-2318	59	36	performed	perform	VERB
cet-2318	59	37	in	in	ADP
cet-2318	59	38	the	the	DET
cet-2318	59	39	temperature	temperature	NOUN
cet-2318	59	40	range	range	NOUN
cet-2318	59	41	1150	1150	NUM
cet-2318	59	42	-	-	SYM
cet-2318	59	43	1600	1600	NUM
cet-2318	59	44	°	°	NOUN
cet-2318	59	45	c	c	NOUN
cet-2318	59	46	in	in	ADP
cet-2318	59	47	pure	pure	ADJ
cet-2318	59	48	oxygen	oxygen	NOUN
cet-2318	59	49	p=0,001	p=0,001	NOUN
cet-2318	59	50	-	-	PUNCT
cet-2318	59	51	100pa	100pa	NOUN
cet-2318	59	52	)	)	PUNCT
cet-2318	59	53	.	.	PUNCT
cet-2318	60	1			PROPN
cet-2318	60	2	at	at	ADP
cet-2318	60	3	low	low	ADJ
cet-2318	60	4	partial	partial	ADJ
cet-2318	60	5	pressure	pressure	NOUN
cet-2318	60	6	of	of	ADP
cet-2318	60	7	oxygen	oxygen	NOUN
cet-2318	60	8	and	and	CCONJ
cet-2318	60	9	high	high	ADJ
cet-2318	60	10	temperature	temperature	NOUN
cet-2318	60	11	the	the	DET
cet-2318	60	12	reaction	reaction	NOUN
cet-2318	60	13	:	:	PUNCT
cet-2318	60	14	(	(	PUNCT
cet-2318	60	15	2+x)sic(s)+	2+x)sic(s)+	NUM
cet-2318	60	16	o2(g	o2(g	NUM
cet-2318	60	17	)	)	PUNCT
cet-2318	60	18	→	→	SYM
cet-2318	60	19	(	(	PUNCT
cet-2318	60	20	2+x)si(g)+2co(g)+xc(s	2+x)si(g)+2co(g)+xc(s	NUM
cet-2318	60	21	)	)	PUNCT
cet-2318	60	22	(	(	PUNCT
cet-2318	60	23	1	1	X
cet-2318	60	24	)	)	PUNCT
cet-2318	60	25	is	be	AUX
cet-2318	60	26	dominant	dominant	ADJ
cet-2318	60	27	,	,	PUNCT
cet-2318	60	28	corresponding	correspond	VERB
cet-2318	60	29	to	to	ADP
cet-2318	60	30	an	an	DET
cet-2318	60	31	etching	etching	NOUN
cet-2318	60	32	along	along	ADP
cet-2318	60	33	with	with	ADP
cet-2318	60	34	the	the	DET
cet-2318	60	35	formation	formation	NOUN
cet-2318	60	36	of	of	ADP
cet-2318	60	37	a	a	DET
cet-2318	60	38	carbon	carbon	NOUN
cet-2318	60	39	layer	layer	NOUN
cet-2318	60	40	.	.	PUNCT
cet-2318	61	1			X
cet-2318	62	1	the	the	DET
cet-2318	62	2	reaction	reaction	NOUN
cet-2318	62	3	:	:	PUNCT
cet-2318	62	4	2sic(s)+	2sic(s)+	NUM
cet-2318	62	5	o2(g	o2(g	NUM
cet-2318	62	6	)	)	PUNCT
cet-2318	62	7	→	→	SYM
cet-2318	62	8	2si(g)+2co(g	2si(g)+2co(g	NUM
cet-2318	62	9	)	)	PUNCT
cet-2318	62	10	(	(	PUNCT
cet-2318	62	11	2	2	X
cet-2318	62	12	)	)	PUNCT
cet-2318	62	13	is	be	AUX
cet-2318	62	14	predominant	predominant	ADJ
cet-2318	62	15	in	in	ADP
cet-2318	62	16	the	the	DET
cet-2318	62	17	boundary	boundary	ADJ
cet-2318	62	18	conditions	condition	NOUN
cet-2318	62	19	,	,	PUNCT
cet-2318	62	20	between	between	ADP
cet-2318	62	21	those	those	PRON
cet-2318	62	22	of	of	ADP
cet-2318	62	23	reaction	reaction	NOUN
cet-2318	62	24	(	(	PUNCT
cet-2318	62	25	1	1	NUM
cet-2318	62	26	)	)	PUNCT
cet-2318	62	27	and	and	CCONJ
cet-2318	62	28	(	(	PUNCT
cet-2318	62	29	3	3	NUM
cet-2318	62	30	)	)	PUNCT
cet-2318	62	31	.	.	PUNCT
cet-2318	63	1	this	this	DET
cet-2318	63	2	reaction	reaction	NOUN
cet-2318	63	3	corresponds	correspond	VERB
cet-2318	63	4	to	to	ADP
cet-2318	63	5	the	the	DET
cet-2318	63	6	simultaneous	simultaneous	ADJ
cet-2318	63	7	vaporization	vaporization	NOUN
cet-2318	63	8	and	and	CCONJ
cet-2318	63	9	etching	etch	VERB
cet-2318	63	10	of	of	ADP
cet-2318	63	11	sic	sic	NOUN
cet-2318	63	12	.	.	PUNCT
cet-2318	64	1			X
cet-2318	65	1	at	at	ADP
cet-2318	65	2	increasing	increase	VERB
cet-2318	65	3	partial	partial	ADJ
cet-2318	65	4	pressure	pressure	NOUN
cet-2318	65	5	of	of	ADP
cet-2318	65	6	oxygen	oxygen	NOUN
cet-2318	65	7	and	and	CCONJ
cet-2318	65	8	lower	low	ADJ
cet-2318	65	9	temperature	temperature	NOUN
cet-2318	65	10	,	,	PUNCT
cet-2318	65	11	the	the	DET
cet-2318	65	12	reaction	reaction	NOUN
cet-2318	65	13	:	:	PUNCT
cet-2318	65	14	2sic(s)+	2sic(s)+	NUM
cet-2318	65	15	o2(g	o2(g	NUM
cet-2318	65	16	)	)	PUNCT
cet-2318	65	17	→	→	SYM
cet-2318	65	18	sio(g)+co(g	sio(g)+co(g	X
cet-2318	65	19	)	)	PUNCT
cet-2318	65	20	(	(	PUNCT
cet-2318	65	21	3	3	X
cet-2318	65	22	)	)	PUNCT
cet-2318	65	23	happens	happen	VERB
cet-2318	65	24	,	,	PUNCT
cet-2318	65	25	leading	lead	VERB
cet-2318	65	26	to	to	ADP
cet-2318	65	27	an	an	DET
cet-2318	65	28	active	active	ADJ
cet-2318	65	29	oxidation	oxidation	NOUN
cet-2318	65	30	or	or	CCONJ
cet-2318	65	31	etching	etch	VERB
cet-2318	65	32	of	of	ADP
cet-2318	65	33	the	the	DET
cet-2318	65	34	sic	sic	NOUN
cet-2318	65	35	.	.	PUNCT
cet-2318	66	1			X
cet-2318	67	1	at	at	ADP
cet-2318	67	2	still	still	ADV
cet-2318	67	3	higher	high	ADJ
cet-2318	67	4	p(o2	p(o2	NOUN
cet-2318	67	5	)	)	PUNCT
cet-2318	67	6	and	and	CCONJ
cet-2318	67	7	lower	low	ADJ
cet-2318	67	8	temperature	temperature	NOUN
cet-2318	67	9	,	,	PUNCT
cet-2318	67	10	the	the	DET
cet-2318	67	11	dominant	dominant	ADJ
cet-2318	67	12	reaction	reaction	NOUN
cet-2318	67	13	is	be	AUX
cet-2318	67	14	2sic(s)+	2sic(s)+	NUM
cet-2318	67	15	3o2(g	3o2(g	NUM
cet-2318	67	16	)	)	PUNCT
cet-2318	67	17	→	→	SYM
cet-2318	67	18	2sio2(s)+2co(g	2sio2(s)+2co(g	NUM
cet-2318	67	19	)	)	PUNCT
cet-2318	67	20	(	(	PUNCT
cet-2318	67	21	4	4	X
cet-2318	67	22	)	)	PUNCT
cet-2318	67	23	which	which	DET
cet-2318	67	24	product	product	NOUN
cet-2318	67	25	is	be	AUX
cet-2318	67	26	commonly	commonly	ADV
cet-2318	67	27	the	the	DET
cet-2318	67	28	desired	desire	VERB
cet-2318	67	29	product	product	NOUN
cet-2318	67	30	,	,	PUNCT
cet-2318	67	31	i.e.	i.e.	X
cet-2318	67	32	the	the	DET
cet-2318	67	33	passivation	passivation	NOUN
cet-2318	67	34	of	of	ADP
cet-2318	67	35	the	the	DET
cet-2318	67	36	sic	sic	ADJ
cet-2318	67	37	surface	surface	NOUN
cet-2318	67	38	.	.	PUNCT
cet-2318	68	1	although	although	SCONJ
cet-2318	68	2	,	,	PUNCT
cet-2318	68	3	at	at	ADP
cet-2318	68	4	even	even	ADV
cet-2318	68	5	higher	high	ADJ
cet-2318	68	6	partial	partial	ADJ
cet-2318	68	7	pressure	pressure	NOUN
cet-2318	68	8	of	of	ADP
cet-2318	68	9	o2	o2	PROPN
cet-2318	68	10	than	than	ADP
cet-2318	68	11	that	that	PRON
cet-2318	68	12	used	use	VERB
cet-2318	68	13	in	in	ADP
cet-2318	68	14	the	the	DET
cet-2318	68	15	case	case	NOUN
cet-2318	68	16	of	of	ADP
cet-2318	68	17	reaction	reaction	NOUN
cet-2318	68	18	(	(	PUNCT
cet-2318	68	19	4	4	NUM
cet-2318	68	20	)	)	PUNCT
cet-2318	68	21	,	,	PUNCT
cet-2318	68	22	it	it	PRON
cet-2318	68	23	has	have	AUX
cet-2318	68	24	been	be	AUX
cet-2318	68	25	predicted	predict	VERB
cet-2318	68	26	(	(	PUNCT
cet-2318	68	27	song	song	NOUN
cet-2318	68	28	and	and	CCONJ
cet-2318	68	29	smith	smith	PROPN
cet-2318	68	30	,	,	PUNCT
cet-2318	68	31	2002	2002	NUM
cet-2318	68	32	)	)	PUNCT
cet-2318	68	33	;	;	PUNCT
cet-2318	68	34	jacobson	jacobson	PROPN
cet-2318	68	35	,	,	PUNCT
cet-2318	68	36	1993	1993	NUM
cet-2318	68	37	;	;	PUNCT
cet-2318	68	38	luthra	luthra	NOUN
cet-2318	68	39	,	,	PUNCT
cet-2318	68	40	1991	1991	NUM
cet-2318	68	41	)	)	PUNCT
cet-2318	68	42	that	that	SCONJ
cet-2318	68	43	solid	solid	ADJ
cet-2318	68	44	sio2	sio2	NOUN
cet-2318	68	45	and	and	CCONJ
cet-2318	68	46	c	c	NOUN
cet-2318	68	47	can	can	AUX
cet-2318	68	48	be	be	AUX
cet-2318	68	49	the	the	DET
cet-2318	68	50	only	only	ADJ
cet-2318	68	51	products	product	NOUN
cet-2318	68	52	.	.	PUNCT
cet-2318	69	1	reaction	reaction	NOUN
cet-2318	69	2	(	(	PUNCT
cet-2318	69	3	4	4	X
cet-2318	69	4	)	)	PUNCT
cet-2318	69	5	is	be	AUX
cet-2318	69	6	the	the	DET
cet-2318	69	7	fundamental	fundamental	ADJ
cet-2318	69	8	in	in	ADP
cet-2318	69	9	the	the	DET
cet-2318	69	10	passivation	passivation	NOUN
cet-2318	69	11	of	of	ADP
cet-2318	69	12	sic	sic	NOUN
cet-2318	69	13	.	.	PUNCT
cet-2318	70	1	most	most	ADJ
cet-2318	70	2	of	of	ADP
cet-2318	70	3	the	the	DET
cet-2318	70	4	paper	paper	NOUN
cet-2318	70	5	published	publish	VERB
cet-2318	70	6	,	,	PUNCT
cet-2318	70	7	regarding	regard	VERB
cet-2318	70	8	the	the	DET
cet-2318	70	9	sic	sic	ADJ
cet-2318	70	10	oxidation	oxidation	NOUN
cet-2318	70	11	,	,	PUNCT
cet-2318	70	12	deal	deal	VERB
cet-2318	70	13	specifically	specifically	ADV
cet-2318	70	14	on	on	ADP
cet-2318	70	15	this	this	DET
cet-2318	70	16	reaction	reaction	NOUN
cet-2318	70	17	,	,	PUNCT
cet-2318	70	18	in	in	ADP
cet-2318	70	19	particular	particular	ADJ
cet-2318	70	20	because	because	SCONJ
cet-2318	70	21	during	during	ADP
cet-2318	70	22	the	the	DET
cet-2318	70	23	sic	sic	ADJ
cet-2318	70	24	oxidation	oxidation	NOUN
cet-2318	70	25	carbon	carbon	NOUN
cet-2318	70	26	contaminations	contamination	NOUN
cet-2318	70	27	can	can	AUX
cet-2318	70	28	be	be	AUX
cet-2318	70	29	easily	easily	ADV
cet-2318	70	30	observed	observe	VERB
cet-2318	70	31	either	either	CCONJ
cet-2318	70	32	at	at	ADP
cet-2318	70	33	the	the	DET
cet-2318	70	34	interface	interface	NOUN
cet-2318	70	35	or	or	CCONJ
cet-2318	70	36	incorporated	incorporate	VERB
cet-2318	70	37	in	in	ADP
cet-2318	70	38	the	the	DET
cet-2318	70	39	silicon	silicon	NOUN
cet-2318	70	40	dioxide	dioxide	NOUN
cet-2318	70	41	layer	layer	NOUN
cet-2318	70	42	(	(	PUNCT
cet-2318	70	43	afanasev	afanasev	PROPN
cet-2318	70	44	et	et	PROPN
cet-2318	70	45	al	al	PROPN
cet-2318	70	46	.	.	PROPN
cet-2318	70	47	,	,	PUNCT
cet-2318	70	48	1997	1997	NUM
cet-2318	70	49	;	;	PUNCT
cet-2318	70	50	vathulya	vathulya	PROPN
cet-2318	70	51	et	et	PROPN
cet-2318	70	52	al	al	PROPN
cet-2318	70	53	.	.	PROPN
cet-2318	70	54	,	,	PUNCT
cet-2318	70	55	1998	1998	NUM
cet-2318	70	56	)	)	PUNCT
cet-2318	70	57	.	.	PUNCT
cet-2318	71	1	carbon	carbon	NOUN
cet-2318	71	2	atoms	atom	NOUN
cet-2318	71	3	from	from	ADP
cet-2318	71	4	the	the	DET
cet-2318	71	5	silicon	silicon	NOUN
cet-2318	71	6	carbide	carbide	NOUN
cet-2318	71	7	substrate	substrate	NOUN
cet-2318	71	8	leave	leave	VERB
cet-2318	71	9	the	the	DET
cet-2318	71	10	sample	sample	NOUN
cet-2318	71	11	during	during	ADP
cet-2318	71	12	the	the	DET
cet-2318	71	13	oxidation	oxidation	NOUN
cet-2318	71	14	process	process	NOUN
cet-2318	71	15	.	.	PUNCT
cet-2318	72	1	this	this	PRON
cet-2318	72	2	happens	happen	VERB
cet-2318	72	3	via	via	ADP
cet-2318	72	4	out	out	ADJ
cet-2318	72	5	-	-	PUNCT
cet-2318	72	6	diffusion	diffusion	NOUN
cet-2318	72	7	of	of	ADP
cet-2318	72	8	co	co	NOUN
cet-2318	72	9	molecules	molecule	NOUN
cet-2318	72	10	through	through	ADP
cet-2318	72	11	the	the	DET
cet-2318	72	12	growing	grow	VERB
cet-2318	72	13	oxide	oxide	NOUN
cet-2318	72	14	film	film	NOUN
cet-2318	72	15	.	.	PUNCT
cet-2318	73	1	these	these	DET
cet-2318	73	2	co	co	VERB
cet-2318	73	3	molecules	molecule	NOUN
cet-2318	73	4	determines	determine	VERB
cet-2318	73	5	the	the	DET
cet-2318	73	6	formation	formation	NOUN
cet-2318	73	7	of	of	ADP
cet-2318	73	8	carbon	carbon	NOUN
cet-2318	73	9	clusters	cluster	NOUN
cet-2318	73	10	or	or	CCONJ
cet-2318	73	11	graphitic	graphitic	ADJ
cet-2318	73	12	regions	region	NOUN
cet-2318	73	13	(	(	PUNCT
cet-2318	73	14	wang	wang	PROPN
cet-2318	73	15	et	et	PROPN
cet-2318	73	16	al	al	PROPN
cet-2318	73	17	.	.	PROPN
cet-2318	73	18	,	,	PUNCT
cet-2318	73	19	2001	2001	NUM
cet-2318	73	20	;	;	PUNCT
cet-2318	73	21	afanasev	afanasev	PROPN
cet-2318	73	22	et	et	PROPN
cet-2318	73	23	al	al	PROPN
cet-2318	73	24	.	.	PROPN
cet-2318	73	25	,	,	PUNCT
cet-2318	73	26	1996	1996	NUM
cet-2318	73	27	)	)	PUNCT
cet-2318	73	28	.	.	PUNCT
cet-2318	74	1	basically	basically	ADV
cet-2318	74	2	,	,	PUNCT
cet-2318	74	3	a	a	DET
cet-2318	74	4	co	co	X
cet-2318	74	5	molecules	molecule	NOUN
cet-2318	74	6	,	,	PUNCT
cet-2318	74	7	generated	generate	VERB
cet-2318	74	8	at	at	ADP
cet-2318	74	9	the	the	DET
cet-2318	74	10	advancing	advance	VERB
cet-2318	74	11	interface	interface	NOUN
cet-2318	74	12	and	and	CCONJ
cet-2318	74	13	diffusing	diffuse	VERB
cet-2318	74	14	through	through	ADP
cet-2318	74	15	the	the	DET
cet-2318	74	16	oxide	oxide	NOUN
cet-2318	74	17	can	can	AUX
cet-2318	74	18	bind	bind	VERB
cet-2318	74	19	weakly	weakly	ADV
cet-2318	74	20	to	to	ADP
cet-2318	74	21	a	a	DET
cet-2318	74	22	o	o	NOUN
cet-2318	74	23	site	site	NOUN
cet-2318	74	24	in	in	ADP
cet-2318	74	25	the	the	DET
cet-2318	74	26	sio2	sio2	PROPN
cet-2318	74	27	network	network	NOUN
cet-2318	74	28	.	.	PUNCT
cet-2318	75	1	a	a	DET
cet-2318	75	2	second	second	ADJ
cet-2318	75	3	co	co	NOUN
cet-2318	75	4	molecules	molecule	NOUN
cet-2318	75	5	,	,	PUNCT
cet-2318	75	6	however	however	ADV
cet-2318	75	7	,	,	PUNCT
cet-2318	75	8	can	can	AUX
cet-2318	75	9	bind	bind	VERB
cet-2318	75	10	to	to	ADP
cet-2318	75	11	the	the	DET
cet-2318	75	12	first	first	ADJ
cet-2318	75	13	forming	form	VERB
cet-2318	75	14	a	a	DET
cet-2318	75	15	new	new	ADJ
cet-2318	75	16	very	very	ADV
cet-2318	75	17	stable	stable	ADJ
cet-2318	75	18	complex	complex	NOUN
cet-2318	75	19	.	.	PUNCT
cet-2318	76	1	additional	additional	ADJ
cet-2318	76	2	co	co	NOUN
cet-2318	76	3	molecules	molecule	NOUN
cet-2318	76	4	can	can	AUX
cet-2318	76	5	extend	extend	VERB
cet-2318	76	6	the	the	DET
cet-2318	76	7	cluster	cluster	NOUN
cet-2318	76	8	.	.	PUNCT
cet-2318	77	1	the	the	DET
cet-2318	77	2	process	process	NOUN
cet-2318	77	3	is	be	AUX
cet-2318	77	4	helped	help	VERB
cet-2318	77	5	by	by	ADP
cet-2318	77	6	a	a	DET
cet-2318	77	7	passing	passing	NOUN
cet-2318	77	8	co	co	NOUN
cet-2318	77	9	that	that	PRON
cet-2318	77	10	takes	take	VERB
cet-2318	77	11	an	an	DET
cet-2318	77	12	o	o	NOUN
cet-2318	77	13	atom	atom	NOUN
cet-2318	77	14	from	from	ADP
cet-2318	77	15	the	the	DET
cet-2318	77	16	cluster	cluster	NOUN
cet-2318	77	17	and	and	CCONJ
cet-2318	77	18	effuses	effuse	NOUN
cet-2318	77	19	as	as	ADP
cet-2318	77	20	co2	co2	NOUN
cet-2318	77	21	.	.	PUNCT
cet-2318	78	1	the	the	DET
cet-2318	78	2	net	net	ADJ
cet-2318	78	3	result	result	NOUN
cet-2318	78	4	is	be	AUX
cet-2318	78	5	odeficient	odeficient	NOUN
cet-2318	78	6	cluster	cluster	NOUN
cet-2318	78	7	of	of	ADP
cet-2318	78	8	carbon	carbon	NOUN
cet-2318	78	9	.	.	PUNCT
cet-2318	79	1	to	to	PART
cet-2318	79	2	form	form	VERB
cet-2318	79	3	a	a	DET
cet-2318	79	4	carbon	carbon	NOUN
cet-2318	79	5	layer	layer	NOUN
cet-2318	79	6	on	on	ADP
cet-2318	79	7	the	the	DET
cet-2318	79	8	outer	outer	ADJ
cet-2318	79	9	surface	surface	NOUN
cet-2318	79	10	and	and	CCONJ
cet-2318	79	11	to	to	PART
cet-2318	79	12	have	have	VERB
cet-2318	79	13	a	a	DET
cet-2318	79	14	controlled	control	VERB
cet-2318	79	15	so2	so2	NOUN
cet-2318	79	16	thickness	thickness	NOUN
cet-2318	79	17	,	,	PUNCT
cet-2318	79	18	we	we	PRON
cet-2318	79	19	chose	choose	VERB
cet-2318	79	20	our	our	PRON
cet-2318	79	21	operating	operating	NOUN
cet-2318	79	22	conditions	condition	NOUN
cet-2318	79	23	on	on	ADP
cet-2318	79	24	the	the	DET
cet-2318	79	25	base	base	NOUN
cet-2318	79	26	of	of	ADP
cet-2318	79	27	the	the	DET
cet-2318	79	28	literature	literature	NOUN
cet-2318	79	29	overview	overview	NOUN
cet-2318	79	30	,	,	PUNCT
cet-2318	79	31	experimental	experimental	ADJ
cet-2318	79	32	evidences	evidence	NOUN
cet-2318	79	33	and	and	CCONJ
cet-2318	79	34	the	the	DET
cet-2318	79	35	following	following	ADJ
cet-2318	79	36	considerations	consideration	NOUN
cet-2318	79	37	:	:	PUNCT
cet-2318	79	38	(	(	PUNCT
cet-2318	79	39	i	i	NOUN
cet-2318	79	40	)	)	PUNCT
cet-2318	79	41	the	the	DET
cet-2318	79	42	partial	partial	ADJ
cet-2318	79	43	pressure	pressure	NOUN
cet-2318	79	44	of	of	ADP
cet-2318	79	45	oxygen	oxygen	NOUN
cet-2318	79	46	has	have	AUX
cet-2318	79	47	been	be	AUX
cet-2318	79	48	chosen	choose	VERB
cet-2318	79	49	in	in	ADP
cet-2318	79	50	order	order	NOUN
cet-2318	79	51	to	to	PART
cet-2318	79	52	be	be	AUX
cet-2318	79	53	high	high	ADJ
cet-2318	79	54	enough	enough	ADV
cet-2318	79	55	to	to	PART
cet-2318	79	56	ensure	ensure	VERB
cet-2318	79	57	that	that	SCONJ
cet-2318	79	58	the	the	DET
cet-2318	79	59	oxygen	oxygen	NOUN
cet-2318	79	60	diffusion	diffusion	NOUN
cet-2318	79	61	is	be	AUX
cet-2318	79	62	not	not	PART
cet-2318	79	63	the	the	DET
cet-2318	79	64	limiting	limit	VERB
cet-2318	79	65	step	step	NOUN
cet-2318	79	66	,	,	PUNCT
cet-2318	79	67	otherwise	otherwise	ADV
cet-2318	79	68	the	the	DET
cet-2318	79	69	oxidation	oxidation	NOUN
cet-2318	79	70	process	process	NOUN
cet-2318	79	71	can	can	AUX
cet-2318	79	72	be	be	AUX
cet-2318	79	73	influenced	influence	VERB
cet-2318	79	74	,	,	PUNCT
cet-2318	79	75	also	also	ADV
cet-2318	79	76	giving	give	VERB
cet-2318	79	77	rise	rise	NOUN
cet-2318	79	78	to	to	ADP
cet-2318	79	79	different	different	ADJ
cet-2318	79	80	reaction	reaction	NOUN
cet-2318	79	81	than	than	ADP
cet-2318	79	82	(	(	PUNCT
cet-2318	79	83	4	4	NUM
cet-2318	79	84	)	)	PUNCT
cet-2318	79	85	,	,	PUNCT
cet-2318	79	86	with	with	ADP
cet-2318	79	87	the	the	DET
cet-2318	79	88	formation	formation	NOUN
cet-2318	79	89	of	of	ADP
cet-2318	79	90	carbon	carbon	NOUN
cet-2318	79	91	(	(	PUNCT
cet-2318	79	92	e.g.	e.g.	ADV
cet-2318	79	93	reaction	reaction	NOUN
cet-2318	79	94	(	(	PUNCT
cet-2318	79	95	1	1	NUM
cet-2318	79	96	)	)	PUNCT
cet-2318	79	97	)	)	PUNCT
cet-2318	79	98	;	;	PUNCT
cet-2318	79	99	(	(	PUNCT
cet-2318	79	100	ii	ii	NOUN
cet-2318	79	101	)	)	PUNCT
cet-2318	79	102	temperature	temperature	NOUN
cet-2318	79	103	low	low	ADJ
cet-2318	79	104	enough	enough	ADV
cet-2318	79	105	to	to	PART
cet-2318	79	106	have	have	VERB
cet-2318	79	107	a	a	DET
cet-2318	79	108	sort	sort	NOUN
cet-2318	79	109	of	of	ADP
cet-2318	79	110	chemical	chemical	ADJ
cet-2318	79	111	reaction	reaction	NOUN
cet-2318	79	112	/	/	SYM
cet-2318	79	113	out	out	ADP
cet-2318	79	114	diffusion	diffusion	NOUN
cet-2318	79	115	controlling	control	VERB
cet-2318	79	116	regime	regime	NOUN
cet-2318	79	117	(	(	PUNCT
cet-2318	79	118	a	a	DET
cet-2318	79	119	reaction	reaction	NOUN
cet-2318	79	120	too	too	ADV
cet-2318	79	121	favored	favor	VERB
cet-2318	79	122	could	could	AUX
cet-2318	79	123	lead	lead	VERB
cet-2318	79	124	to	to	ADP
cet-2318	79	125	an	an	DET
cet-2318	79	126	oxygen	oxygen	NOUN
cet-2318	79	127	diffusion	diffusion	NOUN
cet-2318	79	128	controlling	control	VERB
cet-2318	79	129	,	,	PUNCT
cet-2318	79	130	in	in	ADP
cet-2318	79	131	the	the	DET
cet-2318	79	132	growing	grow	VERB
cet-2318	79	133	sio2	sio2	NOUN
cet-2318	79	134	film	film	NOUN
cet-2318	79	135	and/or	and/or	CCONJ
cet-2318	79	136	a	a	DET
cet-2318	79	137	too	too	ADV
cet-2318	79	138	fast	fast	ADJ
cet-2318	79	139	co	co	NOUN
cet-2318	79	140	out	out	ADP
cet-2318	79	141	diffusion	diffusion	NOUN
cet-2318	79	142	)	)	PUNCT
cet-2318	79	143	;	;	PUNCT
cet-2318	79	144	(	(	PUNCT
cet-2318	79	145	iii	iii	X
cet-2318	79	146	)	)	PUNCT
cet-2318	79	147	a	a	DET
cet-2318	79	148	suitable	suitable	ADJ
cet-2318	79	149	reaction	reaction	NOUN
cet-2318	79	150	time	time	NOUN
cet-2318	79	151	to	to	PART
cet-2318	79	152	have	have	VERB
cet-2318	79	153	a	a	DET
cet-2318	79	154	controlled	control	VERB
cet-2318	79	155	so2	so2	NOUN
cet-2318	79	156	thickness	thickness	NOUN
cet-2318	79	157	(	(	PUNCT
cet-2318	79	158	an	an	DET
cet-2318	79	159	o2	o2	ADJ
cet-2318	79	160	diffusive	diffusive	ADJ
cet-2318	79	161	regime	regime	NOUN
cet-2318	79	162	can	can	AUX
cet-2318	79	163	be	be	AUX
cet-2318	79	164	also	also	ADV
cet-2318	79	165	determined	determine	VERB
cet-2318	79	166	by	by	ADP
cet-2318	79	167	increasing	increase	VERB
cet-2318	79	168	time	time	NOUN
cet-2318	79	169	and	and	CCONJ
cet-2318	79	170	thus	thus	ADV
cet-2318	79	171	thickness	thickness	NOUN
cet-2318	79	172	of	of	ADP
cet-2318	79	173	the	the	DET
cet-2318	79	174	silica	silica	NOUN
cet-2318	79	175	layer	layer	NOUN
cet-2318	79	176	,	,	PUNCT
cet-2318	79	177	a	a	DET
cet-2318	79	178	complete	complete	ADJ
cet-2318	79	179	co	co	PUNCT
cet-2318	79	180	out	out	ADP
cet-2318	79	181	-	-	PUNCT
cet-2318	79	182	diffusion	diffusion	NOUN
cet-2318	79	183	can	can	AUX
cet-2318	79	184	be	be	AUX
cet-2318	79	185	1528	1528	NUM
cet-2318	79	186	determined	determine	VERB
cet-2318	79	187	by	by	ADP
cet-2318	79	188	a	a	DET
cet-2318	79	189	too	too	ADV
cet-2318	79	190	low	low	ADJ
cet-2318	79	191	silica	silica	NOUN
cet-2318	79	192	thickness	thickness	NOUN
cet-2318	79	193	)	)	PUNCT
cet-2318	79	194	.	.	PUNCT
cet-2318	80	1	to	to	PART
cet-2318	80	2	promote	promote	VERB
cet-2318	80	3	a	a	DET
cet-2318	80	4	further	further	ADJ
cet-2318	80	5	carbon	carbon	NOUN
cet-2318	80	6	graphitization	graphitization	NOUN
cet-2318	80	7	15	15	NUM
cet-2318	80	8	min	min	NOUN
cet-2318	80	9	under	under	ADP
cet-2318	80	10	pure	pure	ADJ
cet-2318	80	11	hydrogen	hydrogen	NOUN
cet-2318	80	12	were	be	AUX
cet-2318	80	13	performed	perform	VERB
cet-2318	80	14	,	,	PUNCT
cet-2318	80	15	than	than	SCONJ
cet-2318	80	16	30	30	NUM
cet-2318	80	17	min	min	NOUN
cet-2318	80	18	in	in	ADP
cet-2318	80	19	argon	argon	NOUN
cet-2318	80	20	allows	allow	VERB
cet-2318	80	21	the	the	DET
cet-2318	80	22	residual	residual	ADJ
cet-2318	80	23	co	co	NOUN
cet-2318	80	24	to	to	PART
cet-2318	80	25	diffuse	diffuse	VERB
cet-2318	80	26	out	out	ADP
cet-2318	80	27	(	(	PUNCT
cet-2318	80	28	cooper	cooper	NOUN
cet-2318	80	29	;	;	PUNCT
cet-2318	80	30	1997	1997	NUM
cet-2318	80	31	)	)	PUNCT
cet-2318	80	32	.	.	PUNCT
cet-2318	81	1	for	for	ADP
cet-2318	81	2	the	the	DET
cet-2318	81	3	sic	sic	ADJ
cet-2318	81	4	oxidation	oxidation	NOUN
cet-2318	81	5	,	,	PUNCT
cet-2318	81	6	it	it	PRON
cet-2318	81	7	has	have	AUX
cet-2318	81	8	been	be	AUX
cet-2318	81	9	reported	report	VERB
cet-2318	81	10	,	,	PUNCT
cet-2318	81	11	that	that	SCONJ
cet-2318	81	12	the	the	DET
cet-2318	81	13	thermal	thermal	ADJ
cet-2318	81	14	growth	growth	NOUN
cet-2318	81	15	kinetics	kinetic	NOUN
cet-2318	81	16	is	be	AUX
cet-2318	81	17	governed	govern	VERB
cet-2318	81	18	by	by	ADP
cet-2318	81	19	linear	linear	PROPN
cet-2318	81	20	parabolic	parabolic	PROPN
cet-2318	81	21	law	law	NOUN
cet-2318	81	22	of	of	ADP
cet-2318	81	23	deal	deal	NOUN
cet-2318	81	24	and	and	CCONJ
cet-2318	81	25	grove	grove	PROPN
cet-2318	81	26	,	,	PUNCT
cet-2318	81	27	as	as	SCONJ
cet-2318	81	28	derived	derive	VERB
cet-2318	81	29	for	for	ADP
cet-2318	81	30	silicon	silicon	NOUN
cet-2318	81	31	(	(	PUNCT
cet-2318	81	32	afanasev	afanasev	PROPN
cet-2318	81	33	et	et	PROPN
cet-2318	81	34	al	al	PROPN
cet-2318	81	35	.	.	PROPN
cet-2318	81	36	,	,	PUNCT
cet-2318	81	37	1996	1996	NUM
cet-2318	81	38	;	;	PUNCT
cet-2318	81	39	schmeiber	schmeiber	NOUN
cet-2318	81	40	et	et	PROPN
cet-2318	81	41	al	al	PROPN
cet-2318	81	42	.	.	PROPN
cet-2318	81	43	,	,	PUNCT
cet-2318	81	44	2001	2001	NUM
cet-2318	81	45	;	;	PUNCT
cet-2318	81	46	htun	htun	PROPN
cet-2318	81	47	aung	aung	PROPN
cet-2318	81	48	et	et	PROPN
cet-2318	81	49	al	al	PROPN
cet-2318	81	50	.	.	PROPN
cet-2318	81	51	,	,	PUNCT
cet-2318	81	52	2002	2002	NUM
cet-2318	81	53	)	)	PUNCT
cet-2318	81	54	.	.	PUNCT
cet-2318	82	1	w	w	PROPN
cet-2318	83	1	+	+	NUM
cet-2318	83	2	aw	aw	INTJ
cet-2318	83	3	=	=	NOUN
cet-2318	83	4	b(t	b(t	PROPN
cet-2318	83	5	+	+	NOUN
cet-2318	83	6	τ	τ	X
cet-2318	83	7	)	)	PUNCT
cet-2318	83	8	(	(	PUNCT
cet-2318	83	9	5	5	NUM
cet-2318	83	10	)	)	PUNCT
cet-2318	83	11	where	where	SCONJ
cet-2318	83	12	,	,	PUNCT
cet-2318	83	13	w	w	PROPN
cet-2318	83	14	denotes	denote	VERB
cet-2318	83	15	the	the	DET
cet-2318	83	16	oxide	oxide	NOUN
cet-2318	83	17	thickness	thickness	NOUN
cet-2318	83	18	and	and	CCONJ
cet-2318	83	19	t	t	PROPN
cet-2318	83	20	is	be	AUX
cet-2318	83	21	oxidation	oxidation	NOUN
cet-2318	83	22	time	time	NOUN
cet-2318	83	23	.	.	PUNCT
cet-2318	84	1	the	the	DET
cet-2318	84	2	quantity	quantity	NOUN
cet-2318	84	3	τ	τ	PROPN
cet-2318	84	4	corresponds	correspond	VERB
cet-2318	84	5	to	to	ADP
cet-2318	84	6	a	a	DET
cet-2318	84	7	shift	shift	NOUN
cet-2318	84	8	in	in	ADP
cet-2318	84	9	the	the	DET
cet-2318	84	10	time	time	NOUN
cet-2318	84	11	coordinate	coordinate	NOUN
cet-2318	84	12	that	that	PRON
cet-2318	84	13	correct	correct	VERB
cet-2318	84	14	for	for	ADP
cet-2318	84	15	the	the	DET
cet-2318	84	16	presence	presence	NOUN
cet-2318	84	17	of	of	ADP
cet-2318	84	18	the	the	DET
cet-2318	84	19	initial	initial	ADJ
cet-2318	84	20	layer	layer	NOUN
cet-2318	84	21	of	of	ADP
cet-2318	84	22	oxide	oxide	NOUN
cet-2318	84	23	thickness	thickness	NOUN
cet-2318	84	24	and	and	CCONJ
cet-2318	84	25	a	a	PRON
cet-2318	84	26	and	and	CCONJ
cet-2318	84	27	b	b	NOUN
cet-2318	84	28	are	be	AUX
cet-2318	84	29	constants	constant	NOUN
cet-2318	84	30	(	(	PUNCT
cet-2318	84	31	b	b	NOUN
cet-2318	84	32	parabolic	parabolic	NOUN
cet-2318	84	33	and	and	CCONJ
cet-2318	84	34	b	b	NOUN
cet-2318	84	35	/	/	SYM
cet-2318	84	36	a	a	DET
cet-2318	84	37	linear	linear	ADJ
cet-2318	84	38	rate	rate	NOUN
cet-2318	84	39	constant	constant	ADJ
cet-2318	84	40	)	)	PUNCT
cet-2318	84	41	.	.	PUNCT
cet-2318	85	1	the	the	DET
cet-2318	85	2	above	above	ADJ
cet-2318	85	3	equation	equation	NOUN
cet-2318	85	4	is	be	AUX
cet-2318	85	5	a	a	DET
cet-2318	85	6	quadratic	quadratic	ADJ
cet-2318	85	7	equation	equation	NOUN
cet-2318	85	8	.	.	PUNCT
cet-2318	86	1	the	the	DET
cet-2318	86	2	solution	solution	NOUN
cet-2318	86	3	of	of	ADP
cet-2318	86	4	equation	equation	NOUN
cet-2318	86	5	(	(	PUNCT
cet-2318	86	6	5	5	X
cet-2318	86	7	)	)	PUNCT
cet-2318	86	8	can	can	AUX
cet-2318	86	9	be	be	AUX
cet-2318	86	10	written	write	VERB
cet-2318	86	11	as	as	ADP
cet-2318	86	12	:	:	PUNCT
cet-2318	86	13	1	1	NUM
cet-2318	86	14	)	)	PUNCT
cet-2318	86	15	4/	4/	NUM
cet-2318	86	16	1	1	NUM
cet-2318	86	17	(	(	PUNCT
cet-2318	86	18	2/	2/	NUM
cet-2318	86	19	2/1	2/1	NUM
cet-2318	86	20	2	2	NUM
cet-2318	86	21			NOUN
cet-2318	86	22			ADJ
cet-2318	86	23			PROPN
cet-2318	86	24	ba	ba	PROPN
cet-2318	86	25	t	t	PROPN
cet-2318	86	26	a	a	DET
cet-2318	86	27	w	w	NOUN
cet-2318	86	28			NOUN
cet-2318	86	29	where	where	SCONJ
cet-2318	86	30	a	a	PRON
cet-2318	86	31	and	and	CCONJ
cet-2318	86	32	b	b	NOUN
cet-2318	86	33	can	can	AUX
cet-2318	86	34	be	be	AUX
cet-2318	86	35	expressed	express	VERB
cet-2318	86	36	as	as	ADP
cet-2318	86	37	:	:	PUNCT
cet-2318	86	38	22	22	NUM
cet-2318	86	39	2	2	NUM
cet-2318	86	40	22	22	NUM
cet-2318	86	41	2	2	NUM
cet-2318	86	42	5,1	5,1	NUM
cet-2318	86	43	5,1	5,1	NUM
cet-2318	86	44	1	1	NUM
cet-2318	86	45	5,1	5,1	NUM
cet-2318	86	46	5,1	5,1	NUM
cet-2318	86	47	1	1	NUM
cet-2318	86	48	co	co	NOUN
cet-2318	86	49	r	r	NOUN
cet-2318	86	50	o	o	X
cet-2318	86	51	f	f	X
cet-2318	86	52	co	co	NOUN
cet-2318	86	53	r	r	NOUN
cet-2318	86	54	o	o	X
cet-2318	86	55	f	f	X
cet-2318	86	56	co	co	NOUN
cet-2318	86	57	r	r	NOUN
cet-2318	86	58	o	o	X
cet-2318	86	59	f	f	X
cet-2318	86	60	co	co	NOUN
cet-2318	86	61	r	r	NOUN
cet-2318	86	62	o	o	NOUN
cet-2318	86	63	f	f	X
cet-2318	87	1	d	d	X
cet-2318	87	2	k	k	PROPN
cet-2318	88	1	d	d	X
cet-2318	88	2	k	k	PROPN
cet-2318	89	1	h	h	PROPN
cet-2318	90	1	k	k	PROPN
cet-2318	90	2	h	h	PROPN
cet-2318	91	1	k	k	PROPN
cet-2318	91	2	b	b	PROPN
cet-2318	92	1	d	d	X
cet-2318	92	2	k	k	PROPN
cet-2318	93	1	d	d	X
cet-2318	93	2	k	k	PROPN
cet-2318	94	1	h	h	NOUN
cet-2318	95	1	k	k	PROPN
cet-2318	95	2	h	h	PROPN
cet-2318	96	1	k	k	PROPN
cet-2318	96	2	a	a	DET
cet-2318	96	3			ADJ
cet-2318	96	4			PROPN
cet-2318	96	5			PROPN
cet-2318	96	6			ADJ
cet-2318	96	7			PROPN
cet-2318	96	8			PROPN
cet-2318	96	9	according	accord	VERB
cet-2318	96	10	with	with	ADP
cet-2318	96	11	references	reference	NOUN
cet-2318	96	12	(	(	PUNCT
cet-2318	96	13	afanasev	afanasev	PROPN
cet-2318	96	14	et	et	PROPN
cet-2318	96	15	al	al	PROPN
cet-2318	96	16	.	.	PROPN
cet-2318	96	17	,	,	PUNCT
cet-2318	96	18	1996	1996	NUM
cet-2318	96	19	)	)	PUNCT
cet-2318	96	20	,	,	PUNCT
cet-2318	96	21	the	the	DET
cet-2318	96	22	oxidation	oxidation	NOUN
cet-2318	96	23	kinetic	kinetic	NOUN
cet-2318	96	24	results	result	NOUN
cet-2318	96	25	linear	linear	VERB
cet-2318	96	26	when	when	SCONJ
cet-2318	96	27	the	the	DET
cet-2318	96	28	interface	interface	NOUN
cet-2318	96	29	reaction	reaction	NOUN
cet-2318	96	30	is	be	AUX
cet-2318	96	31	the	the	DET
cet-2318	96	32	rate	rate	NOUN
cet-2318	96	33	-	-	PUNCT
cet-2318	96	34	controlling	control	VERB
cet-2318	96	35	step	step	NOUN
cet-2318	96	36	:	:	PUNCT
cet-2318	97	1	f	f	PROPN
cet-2318	98	1	o	o	X
cet-2318	98	2	k	k	X
cet-2318	99	1	n	n	X
cet-2318	99	2	c	c	PROPN
cet-2318	99	3	a	a	PRON
cet-2318	99	4	b	b	PROPN
cet-2318	99	5	0	0	PUNCT
cet-2318	99	6	*	*	SYM
cet-2318	99	7	2	2	NOUN
cet-2318	99	8	the	the	DET
cet-2318	99	9	kinetic	kinetic	NOUN
cet-2318	99	10	is	be	AUX
cet-2318	99	11	parabolic	parabolic	ADJ
cet-2318	99	12	,	,	PUNCT
cet-2318	99	13	if	if	SCONJ
cet-2318	99	14	o2	o2	ADJ
cet-2318	99	15	diffusion	diffusion	NOUN
cet-2318	99	16	or	or	CCONJ
cet-2318	99	17	co	co	VERB
cet-2318	99	18	out	out	ADJ
cet-2318	99	19	-	-	PUNCT
cet-2318	99	20	diffusion	diffusion	NOUN
cet-2318	99	21	are	be	AUX
cet-2318	99	22	controlling	control	VERB
cet-2318	99	23	:	:	PUNCT
cet-2318	99	24	2	2	NUM
cet-2318	99	25	2	2	NUM
cet-2318	99	26	0	0	NUM
cet-2318	99	27	*	*	NUM
cet-2318	99	28	5.1	5.1	NUM
cet-2318	99	29	o	o	NOUN
cet-2318	100	1	o	o	X
cet-2318	100	2	d	d	X
cet-2318	100	3	n	n	PROPN
cet-2318	100	4	c	c	PROPN
cet-2318	100	5	b	b	X
cet-2318	100	6			X
cet-2318	100	7	co	co	NOUN
cet-2318	100	8	r	r	NOUN
cet-2318	100	9	fo	fo	INTJ
cet-2318	101	1	d	d	NOUN
cet-2318	101	2	kn	kn	PROPN
cet-2318	101	3	kc	kc	PROPN
cet-2318	101	4	b	b	PROPN
cet-2318	101	5	0	0	PROPN
cet-2318	101	6	*	*	SYM
cet-2318	101	7	2	2	NOUN
cet-2318	101	8	we	we	PRON
cet-2318	101	9	evaluate	evaluate	VERB
cet-2318	101	10	the	the	DET
cet-2318	101	11	average	average	ADJ
cet-2318	101	12	oxide	oxide	NOUN
cet-2318	101	13	thickness	thickness	NOUN
cet-2318	101	14	as	as	ADP
cet-2318	101	15	a	a	DET
cet-2318	101	16	function	function	NOUN
cet-2318	101	17	of	of	ADP
cet-2318	101	18	time	time	NOUN
cet-2318	101	19	,	,	PUNCT
cet-2318	101	20	see	see	VERB
cet-2318	101	21	figure	figure	NOUN
cet-2318	101	22	3	3	NUM
cet-2318	101	23	,	,	PUNCT
cet-2318	101	24	in	in	ADP
cet-2318	101	25	the	the	DET
cet-2318	101	26	same	same	ADJ
cet-2318	101	27	operating	operating	NOUN
cet-2318	101	28	conditions	condition	NOUN
cet-2318	101	29	reported	report	VERB
cet-2318	101	30	in	in	ADP
cet-2318	101	31	the	the	DET
cet-2318	101	32	experimental	experimental	ADJ
cet-2318	101	33	section	section	NOUN
cet-2318	101	34	but	but	CCONJ
cet-2318	101	35	temperatures	temperature	NOUN
cet-2318	101	36	(	(	PUNCT
cet-2318	101	37	the	the	DET
cet-2318	101	38	tests	test	NOUN
cet-2318	101	39	were	be	AUX
cet-2318	101	40	performed	perform	VERB
cet-2318	101	41	at	at	ADP
cet-2318	101	42	1150	1150	NUM
cet-2318	101	43	,	,	PUNCT
cet-2318	101	44	1200	1200	NUM
cet-2318	101	45	and	and	CCONJ
cet-2318	101	46	1250	1250	NUM
cet-2318	102	1	°	°	NOUN
cet-2318	102	2	c	c	NOUN
cet-2318	102	3	)	)	PUNCT
cet-2318	103	1	,	,	PUNCT
cet-2318	103	2	finding	find	VERB
cet-2318	103	3	an	an	DET
cet-2318	103	4	activation	activation	NOUN
cet-2318	103	5	energy	energy	NOUN
cet-2318	103	6	of	of	ADP
cet-2318	103	7	2.74	2.74	NUM
cet-2318	103	8	ev	ev	NOUN
cet-2318	103	9	,	,	PUNCT
cet-2318	103	10	suggesting	suggest	VERB
cet-2318	103	11	a	a	DET
cet-2318	103	12	co	co	NOUN
cet-2318	103	13	-	-	NOUN
cet-2318	103	14	out	out	ADP
cet-2318	103	15	diffusion	diffusion	NOUN
cet-2318	103	16	/	/	SYM
cet-2318	103	17	interface	interface	NOUN
cet-2318	103	18	reaction	reaction	NOUN
cet-2318	103	19	limiting	limit	VERB
cet-2318	103	20	steps	step	NOUN
cet-2318	103	21	(	(	PUNCT
cet-2318	103	22	song	song	NOUN
cet-2318	103	23	et	et	PROPN
cet-2318	103	24	al	al	PROPN
cet-2318	103	25	.	.	PROPN
cet-2318	103	26	,	,	PUNCT
cet-2318	103	27	2004	2004	NUM
cet-2318	103	28	)	)	PUNCT
cet-2318	103	29	.	.	PUNCT
cet-2318	104	1	figure	figure	VERB
cet-2318	104	2	3	3	NUM
cet-2318	104	3	:	:	PUNCT
cet-2318	104	4	oxide	oxide	NOUN
cet-2318	104	5	thickness	thickness	NOUN
cet-2318	104	6	as	as	ADP
cet-2318	104	7	a	a	DET
cet-2318	104	8	function	function	NOUN
cet-2318	104	9	of	of	ADP
cet-2318	104	10	time	time	NOUN
cet-2318	104	11	and	and	CCONJ
cet-2318	104	12	temperature	temperature	NOUN
cet-2318	104	13	during	during	ADP
cet-2318	104	14	tests	test	NOUN
cet-2318	104	15	performed	perform	VERB
cet-2318	104	16	in	in	ADP
cet-2318	104	17	the	the	DET
cet-2318	104	18	same	same	ADJ
cet-2318	104	19	operating	operating	NOUN
cet-2318	104	20	condition	condition	NOUN
cet-2318	104	21	of	of	ADP
cet-2318	104	22	the	the	DET
cet-2318	104	23	c	c	PROPN
cet-2318	104	24	/	/	SYM
cet-2318	104	25	sio2	sio2	PROPN
cet-2318	104	26	/	/	SYM
cet-2318	104	27	sic	sic	ADJ
cet-2318	104	28	synthesis	synthesis	NOUN
cet-2318	104	29	but	but	CCONJ
cet-2318	104	30	temperature	temperature	NOUN
cet-2318	104	31	.	.	PUNCT
cet-2318	104	32	0	0	NUM
cet-2318	105	1	0,01	0,01	NUM
cet-2318	105	2	0,02	0,02	PROPN
cet-2318	105	3	0,03	0,03	NUM
cet-2318	105	4	0,04	0,04	PROPN
cet-2318	105	5	0,05	0,05	PROPN
cet-2318	105	6	0	0	NUM
cet-2318	105	7	20	20	NUM
cet-2318	105	8	40	40	NUM
cet-2318	105	9	60	60	NUM
cet-2318	105	10	80	80	NUM
cet-2318	105	11	100	100	NUM
cet-2318	105	12	120	120	NUM
cet-2318	105	13	140	140	NUM
cet-2318	105	14	time	time	NOUN
cet-2318	105	15	(	(	PUNCT
cet-2318	105	16	min	min	NOUN
cet-2318	105	17	)	)	PUNCT
cet-2318	105	18	o	o	NOUN
cet-2318	105	19	x	x	PUNCT
cet-2318	105	20	i	i	NOUN
cet-2318	105	21	d	d	PROPN
cet-2318	105	22	e	e	PROPN
cet-2318	105	23	t	t	PROPN
cet-2318	105	24	h	h	NOUN
cet-2318	106	1	ic	ic	PROPN
cet-2318	106	2	k	k	PROPN
cet-2318	106	3	n	n	PROPN
cet-2318	106	4	e	e	X
cet-2318	106	5	s	s	PROPN
cet-2318	106	6	s	s	X
cet-2318	106	7	(	(	PUNCT
cet-2318	106	8	m	m	VERB
cet-2318	106	9	m	m	VERB
cet-2318	106	10	)	)	PUNCT
cet-2318	106	11	1150	1150	NUM
cet-2318	107	1	°	°	PRON
cet-2318	107	2	c	c	NOUN
cet-2318	107	3	1200	1200	NUM
cet-2318	107	4	°	°	ADP
cet-2318	107	5	c	c	PROPN
cet-2318	107	6	1250	1250	NUM
cet-2318	107	7	°	°	PROPN
cet-2318	107	8	c	c	NOUN
cet-2318	107	9	1529	1529	NUM
cet-2318	107	10	4	4	NUM
cet-2318	107	11	.	.	PUNCT
cet-2318	108	1	conclusion	conclusion	NOUN
cet-2318	108	2	nanofilaments	nanofilament	VERB
cet-2318	108	3	heterojunctions	heterojunction	NOUN
cet-2318	108	4	of	of	ADP
cet-2318	108	5	few	few	ADJ
cet-2318	108	6	layer	layer	NOUN
cet-2318	108	7	graphene	graphene	NOUN
cet-2318	108	8	/	/	SYM
cet-2318	108	9	sio2	sio2	PROPN
cet-2318	108	10	/	/	SYM
cet-2318	108	11	sic	sic	ADJ
cet-2318	108	12	core	core	NOUN
cet-2318	108	13	shell	shell	NOUN
cet-2318	108	14	structure	structure	NOUN
cet-2318	108	15	with	with	ADP
cet-2318	108	16	a	a	DET
cet-2318	108	17	sheath	sheath	NOUN
cet-2318	108	18	of	of	ADP
cet-2318	108	19	about	about	ADP
cet-2318	108	20	2030	2030	NUM
cet-2318	108	21	nm	nm	ADV
cet-2318	108	22	thick	thick	ADJ
cet-2318	108	23	have	have	AUX
cet-2318	108	24	been	be	AUX
cet-2318	108	25	prepared	prepare	VERB
cet-2318	108	26	by	by	ADP
cet-2318	108	27	a	a	DET
cet-2318	108	28	new	new	ADJ
cet-2318	108	29	easy	easy	ADJ
cet-2318	108	30	designed	design	VERB
cet-2318	108	31	procedure	procedure	NOUN
cet-2318	108	32	.	.	PUNCT
cet-2318	109	1	chemical	chemical	ADJ
cet-2318	109	2	composition	composition	NOUN
cet-2318	109	3	microanalysis	microanalysis	NOUN
cet-2318	109	4	,	,	PUNCT
cet-2318	109	5	evidences	evidence	VERB
cet-2318	109	6	the	the	DET
cet-2318	109	7	outer	outer	ADJ
cet-2318	109	8	carbon	carbon	NOUN
cet-2318	109	9	sheath	sheath	NOUN
cet-2318	109	10	and	and	CCONJ
cet-2318	109	11	the	the	DET
cet-2318	109	12	increased	increase	VERB
cet-2318	109	13	oxygen	oxygen	NOUN
cet-2318	109	14	amount	amount	NOUN
cet-2318	109	15	in	in	ADP
cet-2318	109	16	the	the	DET
cet-2318	109	17	intermediate	intermediate	ADJ
cet-2318	109	18	layer	layer	NOUN
cet-2318	109	19	with	with	ADP
cet-2318	109	20	respect	respect	NOUN
cet-2318	109	21	to	to	ADP
cet-2318	109	22	the	the	DET
cet-2318	109	23	core	core	NOUN
cet-2318	109	24	.	.	PUNCT
cet-2318	110	1	the	the	DET
cet-2318	110	2	nanofilaments	nanofilament	NOUN
cet-2318	110	3	are	be	AUX
cet-2318	110	4	composed	compose	VERB
cet-2318	110	5	of	of	ADP
cet-2318	110	6	a	a	DET
cet-2318	110	7	3c	3c	NUM
cet-2318	110	8	-	-	PUNCT
cet-2318	110	9	sic	sic	NOUN
cet-2318	110	10	core	core	NOUN
cet-2318	110	11	,	,	PUNCT
cet-2318	110	12	a	a	DET
cet-2318	110	13	sio2	sio2	ADJ
cet-2318	110	14	intermediate	intermediate	ADJ
cet-2318	110	15	layer	layer	NOUN
cet-2318	110	16	,	,	PUNCT
cet-2318	110	17	and	and	CCONJ
cet-2318	110	18	an	an	DET
cet-2318	110	19	outer	outer	ADJ
cet-2318	110	20	layer	layer	NOUN
cet-2318	110	21	of	of	ADP
cet-2318	110	22	graphitic	graphitic	ADJ
cet-2318	110	23	carbon	carbon	NOUN
cet-2318	110	24	.	.	PUNCT
cet-2318	111	1	twisted	twisted	ADJ
cet-2318	111	2	graphene	graphene	NOUN
cet-2318	111	3	layers	layer	NOUN
cet-2318	111	4	(	(	PUNCT
cet-2318	111	5	about	about	ADV
cet-2318	111	6	13	13	NUM
cet-2318	111	7	are	be	AUX
cet-2318	111	8	counted	count	VERB
cet-2318	111	9	)	)	PUNCT
cet-2318	111	10	with	with	ADP
cet-2318	111	11	the	the	DET
cet-2318	111	12	typical	typical	ADJ
cet-2318	111	13	(	(	PUNCT
cet-2318	111	14	002	002	NUM
cet-2318	111	15	)	)	PUNCT
cet-2318	111	16	stacking	stacking	NOUN
cet-2318	111	17	of	of	ADP
cet-2318	111	18	graphitic	graphitic	ADJ
cet-2318	111	19	carbon	carbon	NOUN
cet-2318	111	20	are	be	AUX
cet-2318	111	21	clearly	clearly	ADV
cet-2318	111	22	visible	visible	ADJ
cet-2318	111	23	in	in	ADP
cet-2318	111	24	the	the	DET
cet-2318	111	25	outermost	outermost	ADJ
cet-2318	111	26	nanofilament	nanofilament	NOUN
cet-2318	111	27	layers	layer	NOUN
cet-2318	111	28	.	.	PUNCT
cet-2318	112	1	reference	reference	NOUN
cet-2318	112	2	afanasev	afanasev	PROPN
cet-2318	112	3	v.v	v.v	PROPN
cet-2318	112	4	.	.	PROPN
cet-2318	112	5	,	,	PUNCT
cet-2318	112	6	bassler	bassler	NOUN
cet-2318	112	7	m.	m.	PROPN
cet-2318	112	8	,	,	PUNCT
cet-2318	112	9	pensl	pensl	PROPN
cet-2318	112	10	g.	g.	PROPN
cet-2318	112	11	,	,	PUNCT
cet-2318	112	12	schulz	schulz	PROPN
cet-2318	112	13	m.	m.	PROPN
cet-2318	112	14	1997	1997	NUM
cet-2318	112	15	,	,	PUNCT
cet-2318	112	16	intrinsic	intrinsic	ADJ
cet-2318	112	17	sic	sic	ADJ
cet-2318	112	18	/	/	SYM
cet-2318	112	19	sio2	sio2	PROPN
cet-2318	112	20	interface	interface	NOUN
cet-2318	112	21	states	state	NOUN
cet-2318	112	22	,	,	PUNCT
cet-2318	112	23	phys	phy	NOUN
cet-2318	112	24	.	.	PUNCT
cet-2318	113	1	status	status	PROPN
cet-2318	113	2	.	.	PUNCT
cet-2318	114	1	solidi	solidi	PROPN
cet-2318	114	2	.	.	PUNCT
cet-2318	115	1	a.	a.	PROPN
cet-2318	115	2	162	162	NUM
cet-2318	115	3	,	,	PUNCT
cet-2318	115	4	321	321	NUM
cet-2318	115	5	-	-	SYM
cet-2318	115	6	337	337	NUM
cet-2318	115	7	.	.	PUNCT
cet-2318	116	1	afanasev	afanasev	PROPN
cet-2318	116	2	v.v	v.v	PROPN
cet-2318	116	3	.	.	PROPN
cet-2318	116	4	,	,	PUNCT
cet-2318	116	5	stesmans	stesmans	PROPN
cet-2318	116	6	a.	a.	PROPN
cet-2318	116	7	,	,	PUNCT
cet-2318	116	8	bassler	bassler	NOUN
cet-2318	116	9	m.	m.	NOUN
cet-2318	116	10	,	,	PUNCT
cet-2318	116	11	pensl	pensl	PROPN
cet-2318	116	12	g.	g.	PROPN
cet-2318	116	13	,	,	PUNCT
cet-2318	116	14	schulz	schulz	PROPN
cet-2318	116	15	m.j	m.j	PROPN
cet-2318	116	16	.	.	PROPN
cet-2318	116	17	,	,	PUNCT
cet-2318	116	18	harris	harris	PROPN
cet-2318	116	19	c.i	c.i	PROPN
cet-2318	116	20	.	.	PROPN
cet-2318	116	21	1996	1996	NUM
cet-2318	116	22	,	,	PUNCT
cet-2318	116	23	elimination	elimination	NOUN
cet-2318	116	24	of	of	ADP
cet-2318	116	25	sic	sic	ADJ
cet-2318	116	26	sio2	sio2	PROPN
cet-2318	116	27	interface	interface	NOUN
cet-2318	116	28	states	state	NOUN
cet-2318	116	29	by	by	ADP
cet-2318	116	30	preoxidation	preoxidation	NOUN
cet-2318	116	31	ultraviolet	ultraviolet	NOUN
cet-2318	116	32	-	-	PUNCT
cet-2318	116	33	ozone	ozone	NOUN
cet-2318	116	34	cleaning	cleaning	NOUN
cet-2318	116	35	,	,	PUNCT
cet-2318	116	36	appl	appl	NOUN
cet-2318	116	37	.	.	PUNCT
cet-2318	117	1	phys	phy	NOUN
cet-2318	117	2	.	.	PUNCT
cet-2318	118	1	lett	lett	PROPN
cet-2318	118	2	.	.	PROPN
cet-2318	119	1	68	68	NUM
cet-2318	119	2	,	,	PUNCT
cet-2318	119	3	2141	2141	NUM
cet-2318	119	4	-	-	SYM
cet-2318	119	5	2143	2143	NUM
cet-2318	119	6	.	.	PUNCT
cet-2318	120	1	aung	aung	PROPN
cet-2318	120	2	m.t.h	m.t.h	PROPN
cet-2318	120	3	.	.	PROPN
cet-2318	120	4	,	,	PUNCT
cet-2318	120	5	szmidt	szmidt	PROPN
cet-2318	120	6	j.	j.	PROPN
cet-2318	120	7	,	,	PUNCT
cet-2318	120	8	bakowski	bakowski	NOUN
cet-2318	120	9	m.	m.	NOUN
cet-2318	120	10	2002	2002	NUM
cet-2318	120	11	,	,	PUNCT
cet-2318	120	12	the	the	DET
cet-2318	120	13	study	study	NOUN
cet-2318	120	14	of	of	ADP
cet-2318	120	15	thermal	thermal	ADJ
cet-2318	120	16	oxidation	oxidation	NOUN
cet-2318	120	17	on	on	ADP
cet-2318	120	18	sic	sic	ADJ
cet-2318	120	19	surface	surface	NOUN
cet-2318	120	20	,	,	PUNCT
cet-2318	120	21	j.	j.	PROPN
cet-2318	120	22	wide	wide	ADJ
cet-2318	120	23	bandgap	bandgap	NOUN
cet-2318	120	24	mater	mater	NOUN
cet-2318	120	25	.	.	PUNCT
cet-2318	121	1	9	9	NUM
cet-2318	121	2	,	,	PUNCT
cet-2318	121	3	313	313	NUM
cet-2318	121	4	-	-	SYM
cet-2318	121	5	318	318	NUM
cet-2318	121	6	.	.	PUNCT
cet-2318	122	1	cai	cai	PROPN
cet-2318	122	2	,	,	PUNCT
cet-2318	122	3	k.f	k.f	PROPN
cet-2318	122	4	.	.	PROPN
cet-2318	122	5	,	,	PUNCT
cet-2318	122	6	zhang	zhang	PROPN
cet-2318	122	7	a.x	a.x	PROPN
cet-2318	122	8	.	.	PROPN
cet-2318	122	9	,	,	PUNCT
cet-2318	122	10	yin	yin	PROPN
cet-2318	122	11	,	,	PUNCT
cet-2318	122	12	j.l	j.l	PROPN
cet-2318	122	13	.	.	PROPN
cet-2318	122	14	2007	2007	NUM
cet-2318	122	15	,	,	PUNCT
cet-2318	122	16	ultra	ultra	ADJ
cet-2318	122	17	thin	thin	ADJ
cet-2318	122	18	and	and	CCONJ
cet-2318	122	19	ultra	ultra	ADJ
cet-2318	122	20	long	long	ADJ
cet-2318	122	21	sic	sic	ADJ
cet-2318	122	22	/	/	SYM
cet-2318	122	23	sio2	sio2	NOUN
cet-2318	122	24	nanocables	nanocable	NOUN
cet-2318	122	25	from	from	ADP
cet-2318	122	26	catalytic	catalytic	ADJ
cet-2318	122	27	pyrolysis	pyrolysis	NOUN
cet-2318	122	28	of	of	ADP
cet-2318	122	29	poly(dimethylsiloxane	poly(dimethylsiloxane	PROPN
cet-2318	122	30	)	)	PUNCT
cet-2318	122	31	,	,	PUNCT
cet-2318	122	32	nanotechnol	nanotechnol	NOUN
cet-2318	122	33	.	.	PROPN
cet-2318	122	34	18	18	NUM
cet-2318	122	35	,	,	PUNCT
cet-2318	122	36	509901	509901	NUM
cet-2318	122	37	.	.	PUNCT
cet-2318	123	1	cooper	cooper	PROPN
cet-2318	123	2	j.a	j.a	PROPN
cet-2318	123	3	.	.	PROPN
cet-2318	123	4	1997	1997	NUM
cet-2318	123	5	,	,	PUNCT
cet-2318	123	6	advances	advance	NOUN
cet-2318	123	7	in	in	ADP
cet-2318	123	8	sic	sic	ADJ
cet-2318	123	9	mos	mos	NOUN
cet-2318	123	10	technology	technology	NOUN
cet-2318	123	11	.	.	PUNCT
cet-2318	124	1	phys	phy	NOUN
cet-2318	124	2	.	.	PUNCT
cet-2318	125	1	stat	stat	PROPN
cet-2318	125	2	.	.	PUNCT
cet-2318	126	1	sol	sol	PROPN
cet-2318	126	2	.	.	PUNCT
cet-2318	127	1	(	(	PUNCT
cet-2318	127	2	a	a	X
cet-2318	127	3	)	)	PUNCT
cet-2318	127	4	,	,	PUNCT
cet-2318	127	5	162	162	NUM
cet-2318	127	6	,	,	PUNCT
cet-2318	127	7	305	305	NUM
cet-2318	127	8	-	-	SYM
cet-2318	127	9	320	320	NUM
cet-2318	127	10	.	.	PUNCT
cet-2318	128	1	costello	costello	PROPN
cet-2318	128	2	j.a	j.a	PROPN
cet-2318	128	3	.	.	PROPN
cet-2318	128	4	,	,	PUNCT
cet-2318	128	5	tressler	tressler	PROPN
cet-2318	128	6	r.e	r.e	PROPN
cet-2318	128	7	.	.	PROPN
cet-2318	128	8	1986	1986	NUM
cet-2318	128	9	,	,	PUNCT
cet-2318	128	10	oxidation	oxidation	NOUN
cet-2318	128	11	kinetics	kinetic	NOUN
cet-2318	128	12	of	of	ADP
cet-2318	128	13	silicon	silicon	NOUN
cet-2318	128	14	carbide	carbide	NOUN
cet-2318	128	15	crystals	crystal	NOUN
cet-2318	128	16	and	and	CCONJ
cet-2318	128	17	ceramics	ceramic	NOUN
cet-2318	128	18	:	:	PUNCT
cet-2318	129	1	i	i	PRON
cet-2318	129	2	,	,	PUNCT
cet-2318	129	3	in	in	ADP
cet-2318	129	4	dry	dry	ADJ
cet-2318	129	5	oxygen	oxygen	NOUN
cet-2318	129	6	,	,	PUNCT
cet-2318	129	7	j.	j.	PROPN
cet-2318	129	8	am	am	PROPN
cet-2318	129	9	.	.	PUNCT
cet-2318	130	1	ceram	ceram	PROPN
cet-2318	130	2	.	.	PUNCT
cet-2318	131	1	soc	soc	PROPN
cet-2318	131	2	.	.	PUNCT
cet-2318	132	1	69	69	NUM
cet-2318	132	2	,	,	PUNCT
cet-2318	132	3	674	674	NUM
cet-2318	132	4	-	-	SYM
cet-2318	132	5	681	681	NUM
cet-2318	132	6	.	.	PUNCT
cet-2318	133	1	jacobson	jacobson	PROPN
cet-2318	133	2	n.s	n.s	PROPN
cet-2318	133	3	.	.	PROPN
cet-2318	133	4	1993	1993	NUM
cet-2318	133	5	,	,	PUNCT
cet-2318	133	6	corrosion	corrosion	NOUN
cet-2318	133	7	of	of	ADP
cet-2318	133	8	silicon	silicon	NOUN
cet-2318	133	9	-	-	PUNCT
cet-2318	133	10	based	base	VERB
cet-2318	133	11	ceramics	ceramic	NOUN
cet-2318	133	12	in	in	ADP
cet-2318	133	13	combustion	combustion	NOUN
cet-2318	133	14	.	.	PUNCT
cet-2318	134	1	j.	j.	PROPN
cet-2318	134	2	am	am	PROPN
cet-2318	134	3	.	.	PUNCT
cet-2318	135	1	ceram	ceram	PROPN
cet-2318	135	2	soc	soc	PROPN
cet-2318	135	3	.	.	PUNCT
cet-2318	136	1	76	76	NUM
cet-2318	136	2	,	,	PUNCT
cet-2318	136	3	3	3	NUM
cet-2318	136	4	-	-	SYM
cet-2318	136	5	28	28	NUM
cet-2318	136	6	.	.	PUNCT
cet-2318	137	1	li	li	PROPN
cet-2318	137	2	y.	y.	PROPN
cet-2318	137	3	,	,	PUNCT
cet-2318	137	4	bando	bando	PROPN
cet-2318	137	5	y.	y.	PROPN
cet-2318	137	6	,	,	PUNCT
cet-2318	137	7	golberg	golberg	PROPN
cet-2318	137	8	d.	d.	PROPN
cet-2318	137	9	2004	2004	NUM
cet-2318	137	10	,	,	PUNCT
cet-2318	137	11	sic	sic	ADJ
cet-2318	137	12	–	–	PUNCT
cet-2318	137	13	sio2	sio2	PROPN
cet-2318	137	14	–	–	PUNCT
cet-2318	137	15	c	c	NOUN
cet-2318	137	16	coaxial	coaxial	ADJ
cet-2318	137	17	nanocables	nanocable	NOUN
cet-2318	137	18	and	and	CCONJ
cet-2318	137	19	chains	chain	NOUN
cet-2318	137	20	of	of	ADP
cet-2318	137	21	carbon	carbon	NOUN
cet-2318	137	22	nanotube	nanotube	NOUN
cet-2318	137	23	–	–	PUNCT
cet-2318	137	24	sic	sic	ADJ
cet-2318	137	25	heterojunctions	heterojunction	NOUN
cet-2318	137	26	,	,	PUNCT
cet-2318	137	27	adv.mater	adv.mater	PROPN
cet-2318	137	28	.	.	PUNCT
cet-2318	138	1	16	16	NUM
cet-2318	138	2	,	,	PUNCT
cet-2318	138	3	93	93	NUM
cet-2318	138	4	-	-	SYM
cet-2318	138	5	96	96	NUM
cet-2318	138	6	.	.	PUNCT
cet-2318	139	1	luthra	luthra	PROPN
cet-2318	139	2	k.l	k.l	PROPN
cet-2318	139	3	.	.	PROPN
cet-2318	139	4	1991	1991	NUM
cet-2318	139	5	,	,	PUNCT
cet-2318	139	6	some	some	DET
cet-2318	139	7	new	new	ADJ
cet-2318	139	8	perspectives	perspective	NOUN
cet-2318	139	9	on	on	ADP
cet-2318	139	10	oxidation	oxidation	NOUN
cet-2318	139	11	of	of	ADP
cet-2318	139	12	silicon	silicon	NOUN
cet-2318	139	13	carbide	carbide	NOUN
cet-2318	139	14	and	and	CCONJ
cet-2318	139	15	silicon	silicon	PROPN
cet-2318	139	16	nitride	nitride	PROPN
cet-2318	139	17	.	.	PUNCT
cet-2318	140	1	j.	j.	PROPN
cet-2318	140	2	am	am	PROPN
cet-2318	140	3	.	.	PUNCT
cet-2318	141	1	ceram	ceram	PROPN
cet-2318	141	2	.	.	PUNCT
cet-2318	142	1	soc	soc	PROPN
cet-2318	142	2	.	.	PUNCT
cet-2318	143	1	74	74	NUM
cet-2318	143	2	,	,	PUNCT
cet-2318	143	3	1095	1095	NUM
cet-2318	143	4	-	-	SYM
cet-2318	143	5	1103	1103	NUM
cet-2318	143	6	.	.	PUNCT
cet-2318	144	1	mieskowski	mieskowski	PROPN
cet-2318	144	2	d.m	d.m	PROPN
cet-2318	144	3	.	.	PROPN
cet-2318	144	4	,	,	PUNCT
cet-2318	144	5	mitchell	mitchell	PROPN
cet-2318	144	6	t.e	t.e	PROPN
cet-2318	144	7	.	.	PROPN
cet-2318	144	8	,	,	PUNCT
cet-2318	144	9	heuer	heuer	PROPN
cet-2318	144	10	a.h	a.h	PROPN
cet-2318	144	11	.	.	PROPN
cet-2318	144	12	1984	1984	NUM
cet-2318	144	13	,	,	PUNCT
cet-2318	144	14	bubble	bubble	NOUN
cet-2318	144	15	formation	formation	NOUN
cet-2318	144	16	in	in	ADP
cet-2318	144	17	oxide	oxide	NOUN
cet-2318	144	18	scales	scale	NOUN
cet-2318	144	19	on	on	ADP
cet-2318	144	20	sic	sic	ADJ
cet-2318	144	21	.	.	PUNCT
cet-2318	145	1	j.	j.	PROPN
cet-2318	145	2	am	am	PROPN
cet-2318	145	3	.	.	PUNCT
cet-2318	146	1	ceram	ceram	PROPN
cet-2318	146	2	.	.	PUNCT
cet-2318	147	1	soc	soc	PROPN
cet-2318	147	2	.	.	PUNCT
cet-2318	148	1	67	67	NUM
cet-2318	148	2	,	,	PUNCT
cet-2318	148	3	c17	c17	NOUN
cet-2318	148	4	-	-	PUNCT
cet-2318	148	5	c18	c18	NOUN
cet-2318	148	6	.	.	PUNCT
cet-2318	149	1	panda	panda	PROPN
cet-2318	149	2	s.k	s.k	PROPN
cet-2318	149	3	.	.	PROPN
cet-2318	149	4	,	,	PUNCT
cet-2318	149	5	sengupta	sengupta	PROPN
cet-2318	149	6	j.	j.	PROPN
cet-2318	149	7	,	,	PUNCT
cet-2318	149	8	jacob	jacob	PROPN
cet-2318	149	9	c.	c.	PROPN
cet-2318	149	10	2010	2010	NUM
cet-2318	149	11	,	,	PUNCT
cet-2318	149	12	synthesis	synthesis	NOUN
cet-2318	149	13	of	of	ADP
cet-2318	149	14	beta	beta	NOUN
cet-2318	149	15	-	-	PUNCT
cet-2318	149	16	sic	sic	NOUN
cet-2318	149	17	/	/	SYM
cet-2318	149	18	sio2	sio2	NOUN
cet-2318	149	19	core	core	NOUN
cet-2318	149	20	-	-	PUNCT
cet-2318	149	21	sheath	sheath	NOUN
cet-2318	149	22	nanowires	nanowire	NOUN
cet-2318	149	23	by	by	ADP
cet-2318	149	24	cvd	cvd	NOUN
cet-2318	149	25	technique	technique	NOUN
cet-2318	149	26	using	use	VERB
cet-2318	149	27	ni	ni	PROPN
cet-2318	149	28	as	as	ADP
cet-2318	149	29	catalyst	catalyst	NOUN
cet-2318	149	30	,	,	PUNCT
cet-2318	149	31	j.	j.	PROPN
cet-2318	149	32	nanosci	nanosci	PROPN
cet-2318	149	33	.	.	PUNCT
cet-2318	150	1	nanotech	nanotech	PROPN
cet-2318	150	2	.	.	PROPN
cet-2318	151	1	10	10	NUM
cet-2318	151	2	,	,	PUNCT
cet-2318	151	3	3046	3046	NUM
cet-2318	151	4	-	-	SYM
cet-2318	151	5	3052	3052	NUM
cet-2318	151	6	.	.	PUNCT
cet-2318	152	1	pultz	pultz	PROPN
cet-2318	152	2	w.w	w.w	PROPN
cet-2318	152	3	.	.	PROPN
cet-2318	152	4	1967	1967	NUM
cet-2318	152	5	,	,	PUNCT
cet-2318	152	6	temperature	temperature	NOUN
cet-2318	152	7	and	and	CCONJ
cet-2318	152	8	oxygen	oxygen	NOUN
cet-2318	152	9	pressure	pressure	NOUN
cet-2318	152	10	dependence	dependence	NOUN
cet-2318	152	11	of	of	ADP
cet-2318	152	12	silicon	silicon	NOUN
cet-2318	152	13	carbide	carbide	NOUN
cet-2318	152	14	oxidation	oxidation	NOUN
cet-2318	152	15	,	,	PUNCT
cet-2318	152	16	j.	j.	PROPN
cet-2318	152	17	phys	phys	PROPN
cet-2318	152	18	.	.	PUNCT
cet-2318	153	1	chem	chem	NOUN
cet-2318	153	2	.	.	PUNCT
cet-2318	154	1	71	71	NUM
cet-2318	154	2	,	,	PUNCT
cet-2318	154	3	4556	4556	NUM
cet-2318	154	4	-	-	SYM
cet-2318	154	5	4558	4558	NUM
cet-2318	154	6	.	.	PUNCT
cet-2318	155	1	sarno	sarno	PROPN
cet-2318	155	2	m.	m.	PROPN
cet-2318	155	3	,	,	PUNCT
cet-2318	155	4	galvagno	galvagno	PROPN
cet-2318	155	5	s.	s.	PROPN
cet-2318	155	6	,	,	PUNCT
cet-2318	155	7	piscitelli	piscitelli	PROPN
cet-2318	155	8	r.	r.	PROPN
cet-2318	155	9	,	,	PUNCT
cet-2318	155	10	portofino	portofino	PROPN
cet-2318	155	11	s.	s.	PROPN
cet-2318	155	12	,	,	PUNCT
cet-2318	155	13	ciambelli	ciambelli	PROPN
cet-2318	155	14	p.	p.	NOUN
cet-2318	155	15	2016	2016	NUM
cet-2318	155	16	,	,	PUNCT
cet-2318	155	17	supercapacitor	supercapacitor	NOUN
cet-2318	155	18	electrodes	electrode	NOUN
cet-2318	155	19	made	make	VERB
cet-2318	155	20	of	of	ADP
cet-2318	155	21	exausted	exauste	VERB
cet-2318	155	22	carbon	carbon	NOUN
cet-2318	155	23	-	-	PUNCT
cet-2318	155	24	derived	derive	VERB
cet-2318	155	25	sic	sic	ADJ
cet-2318	155	26	nanoparticles	nanoparticle	NOUN
cet-2318	155	27	coeted	coete	VERB
cet-2318	155	28	by	by	ADP
cet-2318	155	29	graphene	graphene	NOUN
cet-2318	155	30	,	,	PUNCT
cet-2318	155	31	ind	ind	PROPN
cet-2318	155	32	.	.	PUNCT
cet-2318	156	1	eng	eng	PROPN
cet-2318	156	2	.	.	PROPN
cet-2318	156	3	chem	chem	PROPN
cet-2318	156	4	.	.	PUNCT
cet-2318	157	1	res	re	NOUN
cet-2318	157	2	.	.	PROPN
cet-2318	158	1	55	55	NUM
cet-2318	158	2	,	,	PUNCT
cet-2318	158	3	6025	6025	NUM
cet-2318	158	4	-	-	SYM
cet-2318	158	5	6035	6035	NUM
cet-2318	158	6	.	.	PUNCT
cet-2318	159	1	sarno	sarno	PROPN
cet-2318	159	2	m.	m.	PROPN
cet-2318	159	3	,	,	PUNCT
cet-2318	159	4	sannino	sannino	PROPN
cet-2318	159	5	d.	d.	PROPN
cet-2318	159	6	,	,	PUNCT
cet-2318	159	7	leone	leone	PROPN
cet-2318	159	8	c.	c.	PROPN
cet-2318	159	9	,	,	PUNCT
cet-2318	159	10	ciambelli	ciambelli	PROPN
cet-2318	159	11	p.	p.	PROPN
cet-2318	159	12	2012	2012	NUM
cet-2318	159	13	,	,	PUNCT
cet-2318	159	14	evaluating	evaluate	VERB
cet-2318	159	15	the	the	DET
cet-2318	159	16	effects	effect	NOUN
cet-2318	159	17	of	of	ADP
cet-2318	159	18	operating	operating	NOUN
cet-2318	159	19	conditions	condition	NOUN
cet-2318	159	20	on	on	ADP
cet-2318	159	21	the	the	DET
cet-2318	159	22	quantity	quantity	NOUN
cet-2318	159	23	,	,	PUNCT
cet-2318	159	24	quality	quality	NOUN
cet-2318	159	25	and	and	CCONJ
cet-2318	159	26	catalyzed	catalyze	VERB
cet-2318	159	27	growth	growth	NOUN
cet-2318	159	28	mechanisms	mechanism	NOUN
cet-2318	159	29	of	of	ADP
cet-2318	159	30	cnts	cnts	PROPN
cet-2318	159	31	,	,	PUNCT
cet-2318	159	32	j.	j.	PROPN
cet-2318	159	33	mol	mol	PROPN
cet-2318	159	34	.	.	PROPN
cet-2318	159	35	catal	catal	PROPN
cet-2318	159	36	.	.	PUNCT
cet-2318	160	1	a	a	DET
cet-2318	160	2	-	-	PUNCT
cet-2318	160	3	chem	chem	NOUN
cet-2318	160	4	.	.	PUNCT
cet-2318	161	1	357	357	NUM
cet-2318	161	2	,	,	PUNCT
cet-2318	161	3	26	26	NUM
cet-2318	161	4	-	-	SYM
cet-2318	161	5	38	38	NUM
cet-2318	161	6	.	.	PUNCT
cet-2318	161	7	schmeiber	schmeiber	PROPN
cet-2318	161	8	d.	d.	PROPN
cet-2318	161	9	,	,	PUNCT
cet-2318	161	10	batchelor	batchelor	PROPN
cet-2318	161	11	d.r	d.r	PROPN
cet-2318	161	12	.	.	PROPN
cet-2318	161	13	,	,	PUNCT
cet-2318	161	14	mikol	mikol	PROPN
cet-2318	161	15	,	,	PUNCT
cet-2318	161	16	r.p	r.p	PROPN
cet-2318	161	17	.	.	PROPN
cet-2318	161	18	,	,	PUNCT
cet-2318	161	19	halfmann	halfmann	PROPN
cet-2318	162	1	o.	o.	PROPN
cet-2318	162	2	,	,	PUNCT
cet-2318	162	3	spez	spez	PROPN
cet-2318	162	4	a.l	a.l	PROPN
cet-2318	162	5	.	.	PROPN
cet-2318	162	6	2001	2001	NUM
cet-2318	162	7	,	,	PUNCT
cet-2318	162	8	oxide	oxide	NOUN
cet-2318	162	9	growth	growth	NOUN
cet-2318	162	10	on	on	ADP
cet-2318	162	11	sic	sic	ADJ
cet-2318	162	12	(	(	PUNCT
cet-2318	162	13	0001	0001	NUM
cet-2318	162	14	)	)	PUNCT
cet-2318	162	15	surfaces	surface	NOUN
cet-2318	162	16	,	,	PUNCT
cet-2318	162	17	appl	appl	NOUN
cet-2318	162	18	.	.	PUNCT
cet-2318	163	1	surf	surf	PROPN
cet-2318	163	2	.	.	PUNCT
cet-2318	164	1	sci	sci	PROPN
cet-2318	164	2	.	.	PROPN
cet-2318	165	1	184	184	NUM
cet-2318	165	2	,	,	PUNCT
cet-2318	165	3	340	340	NUM
cet-2318	165	4	-	-	SYM
cet-2318	165	5	345	345	NUM
cet-2318	165	6	.	.	PUNCT
cet-2318	166	1	schürmann	schürmann	PROPN
cet-2318	166	2	m.	m.	PROPN
cet-2318	166	3	,	,	PUNCT
cet-2318	166	4	dreiner	dreiner	NOUN
cet-2318	166	5	s.	s.	PROPN
cet-2318	166	6	,	,	PUNCT
cet-2318	166	7	berges	berge	VERB
cet-2318	166	8	u.	u.	PROPN
cet-2318	166	9	,	,	PUNCT
cet-2318	166	10	westphal	westphal	PROPN
cet-2318	166	11	c.	c.	PROPN
cet-2318	166	12	2006	2006	NUM
cet-2318	166	13	,	,	PUNCT
cet-2318	166	14	investigation	investigation	NOUN
cet-2318	166	15	of	of	ADP
cet-2318	166	16	carbon	carbon	NOUN
cet-2318	166	17	contaminations	contamination	NOUN
cet-2318	166	18	in	in	ADP
cet-2318	166	19	sio2	sio2	PROPN
cet-2318	166	20	films	film	NOUN
cet-2318	166	21	on	on	ADP
cet-2318	166	22	4h	4h	NUM
cet-2318	166	23	-	-	PUNCT
cet-2318	166	24	sic(0001	sic(0001	NOUN
cet-2318	166	25	)	)	PUNCT
cet-2318	166	26	,	,	PUNCT
cet-2318	166	27	j.	j.	PROPN
cet-2318	166	28	appl	appl	PROPN
cet-2318	166	29	.	.	PUNCT
cet-2318	167	1	phys	phy	NOUN
cet-2318	167	2	.	.	PUNCT
cet-2318	168	1	100	100	NUM
cet-2318	168	2	,	,	PUNCT
cet-2318	168	3	113510	113510	NUM
cet-2318	168	4	.	.	PUNCT
cet-2318	169	1	song	song	PROPN
cet-2318	169	2	y.	y.	PROPN
cet-2318	169	3	,	,	PUNCT
cet-2318	169	4	dhar	dhar	PROPN
cet-2318	169	5	s.	s.	PROPN
cet-2318	169	6	,	,	PUNCT
cet-2318	169	7	feldma	feldma	NOUN
cet-2318	169	8	,	,	PUNCT
cet-2318	169	9	l.c	l.c	PROPN
cet-2318	169	10	.	.	PROPN
cet-2318	169	11	,	,	PUNCT
cet-2318	169	12	chung	chung	PROPN
cet-2318	169	13	g.	g.	PROPN
cet-2318	169	14	,	,	PUNCT
cet-2318	169	15	williams	williams	PROPN
cet-2318	169	16	.	.	PUNCT
cet-2318	170	1	j.r	j.r	PROPN
cet-2318	170	2	.	.	PROPN
cet-2318	170	3	2004	2004	NUM
cet-2318	170	4	,	,	PUNCT
cet-2318	170	5	modified	modify	VERB
cet-2318	170	6	deal	deal	NOUN
cet-2318	170	7	and	and	CCONJ
cet-2318	170	8	grove	grove	NOUN
cet-2318	170	9	model	model	NOUN
cet-2318	170	10	for	for	ADP
cet-2318	170	11	the	the	DET
cet-2318	170	12	thermal	thermal	ADJ
cet-2318	170	13	oxidation	oxidation	NOUN
cet-2318	170	14	of	of	ADP
cet-2318	170	15	silicon	silicon	PROPN
cet-2318	170	16	carbide	carbide	PROPN
cet-2318	170	17	,	,	PUNCT
cet-2318	170	18	j.	j.	PROPN
cet-2318	170	19	appl	appl	PROPN
cet-2318	170	20	.	.	PUNCT
cet-2318	171	1	phys	phy	NOUN
cet-2318	171	2	.	.	PUNCT
cet-2318	172	1	95	95	NUM
cet-2318	172	2	,	,	PUNCT
cet-2318	172	3	4953	4953	NUM
cet-2318	172	4	-	-	SYM
cet-2318	172	5	4957	4957	NUM
cet-2318	172	6	.	.	PUNCT
cet-2318	173	1	song	song	PROPN
cet-2318	173	2	y.	y.	PROPN
cet-2318	173	3	,	,	PUNCT
cet-2318	173	4	smith	smith	PROPN
cet-2318	173	5	f.m	f.m	PROPN
cet-2318	173	6	.	.	PROPN
cet-2318	173	7	2002	2002	NUM
cet-2318	173	8	,	,	PUNCT
cet-2318	173	9	phase	phase	NOUN
cet-2318	173	10	diagram	diagram	NOUN
cet-2318	173	11	of	of	ADP
cet-2318	173	12	the	the	DET
cet-2318	173	13	interaction	interaction	NOUN
cet-2318	173	14	of	of	ADP
cet-2318	173	15	oxygen	oxygen	NOUN
cet-2318	173	16	with	with	ADP
cet-2318	173	17	sic	sic	ADJ
cet-2318	173	18	,	,	PUNCT
cet-2318	173	19	appl	appl	NOUN
cet-2318	173	20	.	.	PUNCT
cet-2318	174	1	phys	phy	NOUN
cet-2318	174	2	.	.	PUNCT
cet-2318	175	1	lett	lett	PROPN
cet-2318	175	2	.	.	PROPN
cet-2318	176	1	81	81	NUM
cet-2318	176	2	,	,	PUNCT
cet-2318	176	3	30613063	30613063	NUM
cet-2318	176	4	.	.	PUNCT
cet-2318	177	1	vathulya	vathulya	PROPN
cet-2318	177	2	v.r	v.r	PROPN
cet-2318	177	3	.	.	PROPN
cet-2318	177	4	,	,	PUNCT
cet-2318	177	5	wang	wang	PROPN
cet-2318	177	6	d.n	d.n	PROPN
cet-2318	177	7	.	.	PROPN
cet-2318	177	8	,	,	PUNCT
cet-2318	177	9	white	white	PROPN
cet-2318	177	10	m.h	m.h	PROPN
cet-2318	177	11	.	.	PROPN
cet-2318	177	12	1998	1998	NUM
cet-2318	177	13	,	,	PUNCT
cet-2318	177	14	on	on	ADP
cet-2318	177	15	the	the	DET
cet-2318	177	16	correlation	correlation	NOUN
cet-2318	177	17	between	between	ADP
cet-2318	177	18	the	the	DET
cet-2318	177	19	carbon	carbon	NOUN
cet-2318	177	20	content	content	NOUN
cet-2318	177	21	and	and	CCONJ
cet-2318	177	22	the	the	DET
cet-2318	177	23	electrical	electrical	ADJ
cet-2318	177	24	quality	quality	NOUN
cet-2318	177	25	of	of	ADP
cet-2318	177	26	thermally	thermally	ADV
cet-2318	177	27	grown	grow	VERB
cet-2318	177	28	oxides	oxide	NOUN
cet-2318	177	29	on	on	ADP
cet-2318	177	30	p	p	NOUN
cet-2318	177	31	-	-	PUNCT
cet-2318	177	32	type	type	NOUN
cet-2318	177	33	6h	6h	NOUN
cet-2318	177	34	–	–	PUNCT
cet-2318	177	35	silicon	silicon	NOUN
cet-2318	177	36	carbide	carbide	PROPN
cet-2318	177	37	,	,	PUNCT
cet-2318	177	38	appl	appl	PROPN
cet-2318	177	39	.	.	PUNCT
cet-2318	178	1	phys	phy	NOUN
cet-2318	178	2	.	.	PUNCT
cet-2318	179	1	lett	lett	PROPN
cet-2318	179	2	.	.	PUNCT
cet-2318	180	1	73	73	NUM
cet-2318	180	2	,	,	PUNCT
cet-2318	180	3	2161	2161	NUM
cet-2318	180	4	-	-	SYM
cet-2318	180	5	2163	2163	NUM
cet-2318	180	6	.	.	PUNCT
cet-2318	181	1	wang	wang	PROPN
cet-2318	181	2	s.	s.	PROPN
cet-2318	181	3	,	,	PUNCT
cet-2318	181	4	di	di	PROPN
cet-2318	181	5	ventra	ventra	PROPN
cet-2318	181	6	m.	m.	NOUN
cet-2318	181	7	,	,	PUNCT
cet-2318	181	8	kim	kim	PROPN
cet-2318	181	9	s.g	s.g	PROPN
cet-2318	181	10	.	.	PROPN
cet-2318	181	11	,	,	PUNCT
cet-2318	181	12	pantelides	pantelide	VERB
cet-2318	181	13	s.t	s.t	PROPN
cet-2318	181	14	.	.	PROPN
cet-2318	181	15	2001	2001	NUM
cet-2318	181	16	,	,	PUNCT
cet-2318	181	17	atomic	atomic	ADJ
cet-2318	181	18	-	-	PUNCT
cet-2318	181	19	scale	scale	NOUN
cet-2318	181	20	dynamics	dynamic	NOUN
cet-2318	181	21	of	of	ADP
cet-2318	181	22	the	the	DET
cet-2318	181	23	formation	formation	NOUN
cet-2318	181	24	and	and	CCONJ
cet-2318	181	25	dissolution	dissolution	NOUN
cet-2318	181	26	of	of	ADP
cet-2318	181	27	carbon	carbon	NOUN
cet-2318	181	28	clusters	cluster	NOUN
cet-2318	181	29	in	in	ADP
cet-2318	181	30	sio2	sio2	PROPN
cet-2318	181	31	,	,	PUNCT
cet-2318	181	32	phys	phy	NOUN
cet-2318	181	33	.	.	PUNCT
cet-2318	182	1	rev	rev	PROPN
cet-2318	182	2	.	.	PROPN
cet-2318	182	3	lett	lett	PROPN
cet-2318	182	4	.	.	PROPN
cet-2318	183	1	86	86	NUM
cet-2318	183	2	,	,	PUNCT
cet-2318	183	3	5946	5946	NUM
cet-2318	183	4	-	-	SYM
cet-2318	183	5	5949	5949	NUM
cet-2318	183	6	.	.	PUNCT
cet-2318	184	1	zhang	zhang	PROPN
cet-2318	184	2	y.	y.	PROPN
cet-2318	184	3	,	,	PUNCT
cet-2318	184	4	suenaga	suenaga	PROPN
cet-2318	184	5	k.	k.	PROPN
cet-2318	184	6	,	,	PUNCT
cet-2318	184	7	colliex	colliex	PROPN
cet-2318	184	8	c.	c.	PROPN
cet-2318	184	9	,	,	PUNCT
cet-2318	184	10	iijima	iijima	PROPN
cet-2318	184	11	s.	s.	PROPN
cet-2318	184	12	1998	1998	NUM
cet-2318	184	13	,	,	PUNCT
cet-2318	184	14	coaxial	coaxial	ADJ
cet-2318	184	15	nanocable	nanocable	ADJ
cet-2318	184	16	:	:	PUNCT
cet-2318	184	17	silicon	silicon	NOUN
cet-2318	184	18	carbide	carbide	NOUN
cet-2318	184	19	and	and	CCONJ
cet-2318	184	20	silicon	silicon	NOUN
cet-2318	184	21	oxide	oxide	NOUN
cet-2318	184	22	sheathed	sheathe	VERB
cet-2318	184	23	with	with	ADP
cet-2318	184	24	boron	boron	NOUN
cet-2318	184	25	nitride	nitride	NOUN
cet-2318	184	26	and	and	CCONJ
cet-2318	184	27	carbon	carbon	NOUN
cet-2318	184	28	,	,	PUNCT
cet-2318	184	29	science	science	NOUN
cet-2318	184	30	281	281	NUM
cet-2318	184	31	,	,	PUNCT
cet-2318	184	32	973	973	NUM
cet-2318	184	33	-	-	SYM
cet-2318	184	34	975	975	NUM
cet-2318	184	35	.	.	PUNCT
cet-2318	185	1	1530	1530	NUM
cet-2318	185	2	http://www.sciencemag.org/search?author1=y.+zhang&sortspec=date&submit=submit	http://www.sciencemag.org/search?author1=y.+zhang&sortspec=date&submit=submit	NOUN
cet-2318	185	3	http://www.sciencemag.org/search?author1=k.+suenaga&sortspec=date&submit=submit	http://www.sciencemag.org/search?author1=k.+suenaga&sortspec=date&submit=submit	PROPN
cet-2318	185	4	http://www.sciencemag.org/search?author1=c.+colliex&sortspec=date&submit=submit	http://www.sciencemag.org/search?author1=c.+colliex&sortspec=date&submit=submit	PROPN
cet-2318	185	5	http://www.sciencemag.org/search?author1=s.+iijima&sortspec=date&submit=submit	http://www.sciencemag.org/search?author1=s.+iijima&sortspec=date&submit=submit	NOUN