id	sid	tid	token	lemma	pos
cet-2662	1	1	microsoft	microsoft	PROPN
cet-2662	1	2	word	word	NOUN
cet-2662	1	3	001.docx	001.docx	NUM
cet-2662	1	4	chemical	chemical	NOUN
cet-2662	1	5	engineering	engineering	NOUN
cet-2662	1	6	transactions	transaction	NOUN
cet-2662	1	7	vol	vol	NOUN
cet-2662	1	8	.	.	PROPN
cet-2662	2	1	66	66	NUM
cet-2662	2	2	,	,	PUNCT
cet-2662	2	3	2018	2018	NUM
cet-2662	2	4	a	a	DET
cet-2662	2	5	publication	publication	NOUN
cet-2662	2	6	of	of	ADP
cet-2662	2	7	the	the	DET
cet-2662	2	8	italian	italian	ADJ
cet-2662	2	9	association	association	NOUN
cet-2662	2	10	of	of	ADP
cet-2662	2	11	chemical	chemical	PROPN
cet-2662	2	12	engineering	engineering	NOUN
cet-2662	2	13	online	online	ADV
cet-2662	2	14	at	at	ADP
cet-2662	2	15	www.aidic.it/cet	www.aidic.it/cet	PROPN
cet-2662	2	16	guest	guest	NOUN
cet-2662	2	17	editors	editor	NOUN
cet-2662	2	18	:	:	PUNCT
cet-2662	2	19	songying	songye	VERB
cet-2662	2	20	zhao	zhao	PROPN
cet-2662	2	21	,	,	PUNCT
cet-2662	2	22	yougang	yougang	PROPN
cet-2662	2	23	sun	sun	PROPN
cet-2662	2	24	,	,	PUNCT
cet-2662	2	25	ye	ye	NOUN
cet-2662	2	26	zhou	zhou	NOUN
cet-2662	2	27	copyright	copyright	NOUN
cet-2662	3	1	©	©	PROPN
cet-2662	3	2	2018	2018	NUM
cet-2662	3	3	,	,	PUNCT
cet-2662	3	4	aidic	aidic	ADJ
cet-2662	3	5	servizi	servizi	PROPN
cet-2662	3	6	s.r.l	s.r.l	PROPN
cet-2662	3	7	.	.	PUNCT
cet-2662	4	1	isbn	isbn	ADJ
cet-2662	4	2	978	978	NUM
cet-2662	4	3	-	-	SYM
cet-2662	4	4	88	88	NUM
cet-2662	4	5	-	-	PUNCT
cet-2662	4	6	95608	95608	NUM
cet-2662	4	7	-	-	PUNCT
cet-2662	4	8	63	63	NUM
cet-2662	4	9	-	-	SYM
cet-2662	4	10	1	1	NUM
cet-2662	4	11	;	;	PUNCT
cet-2662	4	12	issn	issn	PROPN
cet-2662	4	13	2283	2283	NUM
cet-2662	4	14	-	-	SYM
cet-2662	4	15	9216	9216	NUM
cet-2662	4	16	deposition	deposition	NOUN
cet-2662	4	17	and	and	CCONJ
cet-2662	4	18	characterization	characterization	NOUN
cet-2662	4	19	of	of	ADP
cet-2662	4	20	diamond	diamond	NOUN
cet-2662	4	21	-	-	PUNCT
cet-2662	4	22	like	like	ADJ
cet-2662	4	23	carbon	carbon	NOUN
cet-2662	4	24	films	film	NOUN
cet-2662	4	25	by	by	ADP
cet-2662	4	26	electron	electron	NOUN
cet-2662	4	27	cyclotron	cyclotron	NOUN
cet-2662	4	28	resonance	resonance	NOUN
cet-2662	4	29	microwave	microwave	NOUN
cet-2662	4	30	plasma	plasma	NOUN
cet-2662	4	31	enhanced	enhance	VERB
cet-2662	4	32	unbalanced	unbalanced	ADJ
cet-2662	4	33	magnetron	magnetron	NOUN
cet-2662	4	34	sputtering	sputtering	NOUN
cet-2662	4	35	xin	xin	PROPN
cet-2662	4	36	li	li	PROPN
cet-2662	4	37	*	*	PROPN
cet-2662	4	38	,	,	PUNCT
cet-2662	4	39	hui	hui	PROPN
cet-2662	4	40	miao	miao	PROPN
cet-2662	4	41	,	,	PUNCT
cet-2662	4	42	hongping	hongpe	VERB
cet-2662	4	43	zhu	zhu	PROPN
cet-2662	4	44	shenyang	shenyang	PROPN
cet-2662	4	45	university	university	PROPN
cet-2662	4	46	of	of	ADP
cet-2662	4	47	technology	technology	PROPN
cet-2662	4	48	,	,	PUNCT
cet-2662	4	49	shenyang	shenyang	PROPN
cet-2662	4	50	110870	110870	NUM
cet-2662	4	51	,	,	PUNCT
cet-2662	4	52	china	china	PROPN
cet-2662	4	53	lixin97@163.com	lixin97@163.com	VERB
cet-2662	4	54	we	we	PRON
cet-2662	4	55	introduce	introduce	VERB
cet-2662	4	56	the	the	DET
cet-2662	4	57	structure	structure	NOUN
cet-2662	4	58	and	and	CCONJ
cet-2662	4	59	operational	operational	ADJ
cet-2662	4	60	principles	principle	NOUN
cet-2662	4	61	of	of	ADP
cet-2662	4	62	an	an	DET
cet-2662	4	63	electron	electron	NOUN
cet-2662	4	64	cyclotron	cyclotron	NOUN
cet-2662	4	65	resonance	resonance	NOUN
cet-2662	4	66	microwave	microwave	NOUN
cet-2662	4	67	enhanced	enhance	VERB
cet-2662	4	68	plasma	plasma	NOUN
cet-2662	4	69	source	source	NOUN
cet-2662	4	70	ion	ion	NOUN
cet-2662	4	71	implantation	implantation	NOUN
cet-2662	4	72	/	/	SYM
cet-2662	4	73	deposition	deposition	NOUN
cet-2662	4	74	system	system	NOUN
cet-2662	4	75	for	for	ADP
cet-2662	4	76	the	the	DET
cet-2662	4	77	creation	creation	NOUN
cet-2662	4	78	of	of	ADP
cet-2662	4	79	diamond	diamond	NOUN
cet-2662	4	80	-	-	PUNCT
cet-2662	4	81	like	like	ADJ
cet-2662	4	82	carbon	carbon	NOUN
cet-2662	4	83	(	(	PUNCT
cet-2662	4	84	dlc	dlc	NOUN
cet-2662	4	85	)	)	PUNCT
cet-2662	4	86	film	film	NOUN
cet-2662	4	87	.	.	PUNCT
cet-2662	5	1	using	use	VERB
cet-2662	5	2	an	an	DET
cet-2662	5	3	unbalanced	unbalanced	ADJ
cet-2662	5	4	magnetron	magnetron	NOUN
cet-2662	5	5	sputtering	sputtering	NOUN
cet-2662	5	6	process	process	NOUN
cet-2662	5	7	,	,	PUNCT
cet-2662	5	8	dlc	dlc	NOUN
cet-2662	5	9	film	film	NOUN
cet-2662	5	10	was	be	AUX
cet-2662	5	11	deposited	deposit	VERB
cet-2662	5	12	on	on	ADP
cet-2662	5	13	the	the	DET
cet-2662	5	14	silicon	silicon	NOUN
cet-2662	5	15	substrate	substrate	NOUN
cet-2662	5	16	using	use	VERB
cet-2662	5	17	high	high	ADJ
cet-2662	5	18	-	-	PUNCT
cet-2662	5	19	purity	purity	NOUN
cet-2662	5	20	graphite	graphite	NOUN
cet-2662	5	21	as	as	ADP
cet-2662	5	22	the	the	DET
cet-2662	5	23	carbon	carbon	NOUN
cet-2662	5	24	source	source	NOUN
cet-2662	5	25	and	and	CCONJ
cet-2662	5	26	argon	argon	NOUN
cet-2662	5	27	as	as	ADP
cet-2662	5	28	the	the	DET
cet-2662	5	29	sputtering	sputtering	ADJ
cet-2662	5	30	gas	gas	NOUN
cet-2662	5	31	.	.	PUNCT
cet-2662	6	1	we	we	PRON
cet-2662	6	2	used	use	VERB
cet-2662	6	3	raman	raman	NOUN
cet-2662	6	4	spectroscopy	spectroscopy	NOUN
cet-2662	6	5	,	,	PUNCT
cet-2662	6	6	x	x	ADJ
cet-2662	6	7	-	-	NOUN
cet-2662	6	8	ray	ray	NOUN
cet-2662	6	9	photoelectron	photoelectron	NOUN
cet-2662	6	10	spectroscopy	spectroscopy	NOUN
cet-2662	6	11	,	,	PUNCT
cet-2662	6	12	and	and	CCONJ
cet-2662	6	13	atomic	atomic	ADJ
cet-2662	6	14	force	force	NOUN
cet-2662	6	15	microscopy	microscopy	NOUN
cet-2662	6	16	characterization	characterization	NOUN
cet-2662	6	17	methods	method	NOUN
cet-2662	6	18	to	to	PART
cet-2662	6	19	study	study	VERB
cet-2662	6	20	the	the	DET
cet-2662	6	21	structure	structure	NOUN
cet-2662	6	22	and	and	CCONJ
cet-2662	6	23	chemical	chemical	NOUN
cet-2662	6	24	ratio	ratio	NOUN
cet-2662	6	25	of	of	ADP
cet-2662	6	26	the	the	DET
cet-2662	6	27	film	film	NOUN
cet-2662	6	28	under	under	ADP
cet-2662	6	29	different	different	ADJ
cet-2662	6	30	deposition	deposition	NOUN
cet-2662	6	31	parameters	parameter	NOUN
cet-2662	6	32	.	.	PUNCT
cet-2662	7	1	the	the	DET
cet-2662	7	2	results	result	NOUN
cet-2662	7	3	show	show	VERB
cet-2662	7	4	that	that	SCONJ
cet-2662	7	5	the	the	DET
cet-2662	7	6	optimal	optimal	ADJ
cet-2662	7	7	substrate	substrate	NOUN
cet-2662	7	8	bias	bias	NOUN
cet-2662	7	9	and	and	CCONJ
cet-2662	7	10	target	target	NOUN
cet-2662	7	11	-	-	PUNCT
cet-2662	7	12	substrate	substrate	NOUN
cet-2662	7	13	distance	distance	NOUN
cet-2662	7	14	are	be	AUX
cet-2662	7	15	50	50	NUM
cet-2662	7	16	v	v	NOUN
cet-2662	7	17	and	and	CCONJ
cet-2662	7	18	150	150	NUM
cet-2662	7	19	mm	mm	NOUN
cet-2662	7	20	,	,	PUNCT
cet-2662	7	21	respectively	respectively	ADV
cet-2662	7	22	;	;	PUNCT
cet-2662	7	23	when	when	SCONJ
cet-2662	7	24	the	the	DET
cet-2662	7	25	deposition	deposition	NOUN
cet-2662	7	26	bias	bias	NOUN
cet-2662	7	27	is	be	AUX
cet-2662	7	28	increased	increase	VERB
cet-2662	7	29	,	,	PUNCT
cet-2662	7	30	the	the	DET
cet-2662	7	31	film	film	NOUN
cet-2662	7	32	can	can	AUX
cet-2662	7	33	be	be	AUX
cet-2662	7	34	made	make	VERB
cet-2662	7	35	denser	dense	ADJ
cet-2662	7	36	and	and	CCONJ
cet-2662	7	37	smoother	smooth	ADJ
cet-2662	7	38	.	.	PUNCT
cet-2662	8	1	we	we	PRON
cet-2662	8	2	also	also	ADV
cet-2662	8	3	discuss	discuss	VERB
cet-2662	8	4	the	the	DET
cet-2662	8	5	formation	formation	NOUN
cet-2662	8	6	mechanism	mechanism	NOUN
cet-2662	8	7	of	of	ADP
cet-2662	8	8	dlc	dlc	NOUN
cet-2662	8	9	film	film	NOUN
cet-2662	8	10	based	base	VERB
cet-2662	8	11	on	on	ADP
cet-2662	8	12	the	the	DET
cet-2662	8	13	results	result	NOUN
cet-2662	8	14	of	of	ADP
cet-2662	8	15	structural	structural	ADJ
cet-2662	8	16	characterization	characterization	NOUN
cet-2662	8	17	.	.	PUNCT
cet-2662	9	1	1	1	X
cet-2662	9	2	.	.	X
cet-2662	9	3	introduction	introduction	NOUN
cet-2662	9	4	diamond	diamond	NOUN
cet-2662	9	5	-	-	PUNCT
cet-2662	9	6	like	like	ADJ
cet-2662	9	7	carbon	carbon	NOUN
cet-2662	9	8	(	(	PUNCT
cet-2662	9	9	dlc	dlc	NOUN
cet-2662	9	10	)	)	PUNCT
cet-2662	9	11	is	be	AUX
cet-2662	9	12	a	a	DET
cet-2662	9	13	metastable	metastable	ADJ
cet-2662	9	14	form	form	NOUN
cet-2662	9	15	of	of	ADP
cet-2662	9	16	amorphous	amorphous	ADJ
cet-2662	9	17	carbon	carbon	NOUN
cet-2662	9	18	containing	contain	VERB
cet-2662	9	19	a	a	DET
cet-2662	9	20	significant	significant	ADJ
cet-2662	9	21	fraction	fraction	NOUN
cet-2662	9	22	of	of	ADP
cet-2662	9	23	sp3	sp3	ADJ
cet-2662	9	24	bonds	bond	NOUN
cet-2662	9	25	(	(	PUNCT
cet-2662	9	26	lin	lin	PROPN
cet-2662	9	27	et	et	PROPN
cet-2662	9	28	al	al	PROPN
cet-2662	9	29	.	.	PROPN
cet-2662	9	30	,	,	PUNCT
cet-2662	9	31	2017	2017	NUM
cet-2662	9	32	)	)	PUNCT
cet-2662	9	33	.	.	PUNCT
cet-2662	10	1	dlc	dlc	NOUN
cet-2662	10	2	films	film	NOUN
cet-2662	10	3	have	have	AUX
cet-2662	10	4	been	be	AUX
cet-2662	10	5	shown	show	VERB
cet-2662	10	6	to	to	PART
cet-2662	10	7	provide	provide	VERB
cet-2662	10	8	a	a	DET
cet-2662	10	9	number	number	NOUN
cet-2662	10	10	of	of	ADP
cet-2662	10	11	useful	useful	ADJ
cet-2662	10	12	mechanical	mechanical	ADJ
cet-2662	10	13	properties	property	NOUN
cet-2662	10	14	,	,	PUNCT
cet-2662	10	15	including	include	VERB
cet-2662	10	16	high	high	ADJ
cet-2662	10	17	hardness	hardness	NOUN
cet-2662	10	18	,	,	PUNCT
cet-2662	10	19	low	low	ADJ
cet-2662	10	20	friction	friction	NOUN
cet-2662	10	21	coefficient	coefficient	NOUN
cet-2662	10	22	(	(	PUNCT
cet-2662	10	23	zhang	zhang	X
cet-2662	10	24	et	et	PROPN
cet-2662	10	25	al	al	PROPN
cet-2662	10	26	.	.	PROPN
cet-2662	10	27	,	,	PUNCT
cet-2662	10	28	2016	2016	NUM
cet-2662	10	29	)	)	PUNCT
cet-2662	10	30	,	,	PUNCT
cet-2662	10	31	low	low	ADJ
cet-2662	10	32	wear	wear	NOUN
cet-2662	10	33	rate	rate	NOUN
cet-2662	10	34	and	and	CCONJ
cet-2662	10	35	environmental	environmental	ADJ
cet-2662	10	36	stability	stability	NOUN
cet-2662	10	37	(	(	PUNCT
cet-2662	10	38	habibi	habibi	PROPN
cet-2662	10	39	et	et	PROPN
cet-2662	10	40	al	al	PROPN
cet-2662	10	41	.	.	PROPN
cet-2662	10	42	,	,	PUNCT
cet-2662	10	43	2017	2017	NUM
cet-2662	10	44	)	)	PUNCT
cet-2662	10	45	.	.	PUNCT
cet-2662	11	1	therefore	therefore	ADV
cet-2662	11	2	,	,	PUNCT
cet-2662	11	3	dlc	dlc	NOUN
cet-2662	11	4	films	film	NOUN
cet-2662	11	5	are	be	AUX
cet-2662	11	6	ideal	ideal	ADJ
cet-2662	11	7	candidates	candidate	NOUN
cet-2662	11	8	for	for	ADP
cet-2662	11	9	protective	protective	ADJ
cet-2662	11	10	coatings	coating	NOUN
cet-2662	11	11	in	in	ADP
cet-2662	11	12	many	many	ADJ
cet-2662	11	13	applications	application	NOUN
cet-2662	11	14	,	,	PUNCT
cet-2662	11	15	such	such	ADJ
cet-2662	11	16	as	as	ADP
cet-2662	11	17	magnetic	magnetic	ADJ
cet-2662	11	18	storage	storage	NOUN
cet-2662	11	19	disks	disk	NOUN
cet-2662	11	20	,	,	PUNCT
cet-2662	11	21	optical	optical	ADJ
cet-2662	11	22	components	component	NOUN
cet-2662	11	23	,	,	PUNCT
cet-2662	11	24	metalworking	metalworking	NOUN
cet-2662	11	25	tools	tool	NOUN
cet-2662	11	26	,	,	PUNCT
cet-2662	11	27	and	and	CCONJ
cet-2662	11	28	micro	micro	ADJ
cet-2662	11	29	-	-	ADJ
cet-2662	11	30	electromechanical	electromechanical	ADJ
cet-2662	11	31	systems	system	NOUN
cet-2662	11	32	(	(	PUNCT
cet-2662	11	33	mems	mems	PROPN
cet-2662	11	34	)	)	PUNCT
cet-2662	11	35	(	(	PUNCT
cet-2662	11	36	mahmud	mahmud	PROPN
cet-2662	11	37	et	et	PROPN
cet-2662	11	38	al	al	PROPN
cet-2662	11	39	.	.	PROPN
cet-2662	11	40	,	,	PUNCT
cet-2662	11	41	2015	2015	NUM
cet-2662	11	42	)	)	PUNCT
cet-2662	11	43	.	.	PUNCT
cet-2662	12	1	dlc	dlc	NOUN
cet-2662	12	2	films	film	NOUN
cet-2662	12	3	are	be	AUX
cet-2662	12	4	prepared	prepare	VERB
cet-2662	12	5	by	by	ADP
cet-2662	12	6	various	various	ADJ
cet-2662	12	7	techniques	technique	NOUN
cet-2662	12	8	,	,	PUNCT
cet-2662	12	9	such	such	ADJ
cet-2662	12	10	as	as	ADP
cet-2662	12	11	ion	ion	NOUN
cet-2662	12	12	beam	beam	NOUN
cet-2662	12	13	deposition	deposition	NOUN
cet-2662	12	14	,	,	PUNCT
cet-2662	12	15	magnetron	magnetron	NOUN
cet-2662	12	16	sputtering	sputtering	NOUN
cet-2662	12	17	,	,	PUNCT
cet-2662	12	18	pulsed	pulse	VERB
cet-2662	12	19	laser	laser	NOUN
cet-2662	12	20	deposition	deposition	NOUN
cet-2662	12	21	,	,	PUNCT
cet-2662	12	22	and	and	CCONJ
cet-2662	12	23	radio	radio	NOUN
cet-2662	12	24	frequency	frequency	NOUN
cet-2662	12	25	chemical	chemical	NOUN
cet-2662	12	26	vapor	vapor	NOUN
cet-2662	12	27	deposition	deposition	NOUN
cet-2662	12	28	(	(	PUNCT
cet-2662	12	29	yamamoto	yamamoto	NOUN
cet-2662	12	30	et	et	PROPN
cet-2662	12	31	al	al	PROPN
cet-2662	12	32	.	.	PROPN
cet-2662	12	33	,	,	PUNCT
cet-2662	12	34	1993	1993	NUM
cet-2662	12	35	)	)	PUNCT
cet-2662	12	36	.	.	PUNCT
cet-2662	13	1	each	each	DET
cet-2662	13	2	technique	technique	NOUN
cet-2662	13	3	has	have	VERB
cet-2662	13	4	its	its	PRON
cet-2662	13	5	advantages	advantage	NOUN
cet-2662	13	6	for	for	ADP
cet-2662	13	7	certain	certain	ADJ
cet-2662	13	8	applications	application	NOUN
cet-2662	13	9	.	.	PUNCT
cet-2662	14	1	microwave	microwave	NOUN
cet-2662	14	2	discharge	discharge	NOUN
cet-2662	14	3	,	,	PUNCT
cet-2662	14	4	especially	especially	ADV
cet-2662	14	5	electron	electron	VERB
cet-2662	14	6	cyclotron	cyclotron	NOUN
cet-2662	14	7	resonance	resonance	NOUN
cet-2662	14	8	(	(	PUNCT
cet-2662	14	9	ecr	ecr	PROPN
cet-2662	14	10	)	)	PUNCT
cet-2662	14	11	plasma	plasma	NOUN
cet-2662	14	12	,	,	PUNCT
cet-2662	14	13	develops	develop	VERB
cet-2662	14	14	excellent	excellent	ADJ
cet-2662	14	15	properties	property	NOUN
cet-2662	14	16	of	of	ADP
cet-2662	14	17	high	high	ADJ
cet-2662	14	18	degree	degree	NOUN
cet-2662	14	19	of	of	ADP
cet-2662	14	20	ionization	ionization	NOUN
cet-2662	14	21	and	and	CCONJ
cet-2662	14	22	high	high	ADJ
cet-2662	14	23	ions	ion	NOUN
cet-2662	14	24	densities	density	NOUN
cet-2662	14	25	.	.	PUNCT
cet-2662	15	1	these	these	PRON
cet-2662	15	2	make	make	VERB
cet-2662	15	3	ecr	ecr	PROPN
cet-2662	15	4	microwave	microwave	NOUN
cet-2662	15	5	plasmas	plasma	NOUN
cet-2662	15	6	very	very	ADV
cet-2662	15	7	attractive	attractive	ADJ
cet-2662	15	8	as	as	ADP
cet-2662	15	9	a	a	DET
cet-2662	15	10	plasma	plasma	NOUN
cet-2662	15	11	process	process	NOUN
cet-2662	15	12	.	.	PUNCT
cet-2662	16	1	in	in	ADP
cet-2662	16	2	this	this	DET
cet-2662	16	3	study	study	NOUN
cet-2662	16	4	,	,	PUNCT
cet-2662	16	5	an	an	DET
cet-2662	16	6	ecr	ecr	PROPN
cet-2662	16	7	microwave	microwave	PROPN
cet-2662	16	8	plasma	plasma	PROPN
cet-2662	16	9	enhanced	enhance	VERB
cet-2662	16	10	source	source	NOUN
cet-2662	16	11	ion	ion	NOUN
cet-2662	16	12	implantation	implantation	NOUN
cet-2662	16	13	/	/	SYM
cet-2662	16	14	deposition	deposition	NOUN
cet-2662	16	15	apparatus	apparatus	NOUN
cet-2662	16	16	was	be	AUX
cet-2662	16	17	applied	apply	VERB
cet-2662	16	18	to	to	PART
cet-2662	16	19	prepare	prepare	VERB
cet-2662	16	20	the	the	DET
cet-2662	16	21	dlc	dlc	NOUN
cet-2662	16	22	films	film	NOUN
cet-2662	16	23	.	.	PUNCT
cet-2662	17	1	2	2	X
cet-2662	17	2	.	.	X
cet-2662	17	3	structure	structure	NOUN
cet-2662	17	4	and	and	CCONJ
cet-2662	17	5	working	working	NOUN
cet-2662	17	6	principle	principle	NOUN
cet-2662	17	7	of	of	ADP
cet-2662	17	8	equipment	equipment	NOUN
cet-2662	17	9	figure	figure	NOUN
cet-2662	17	10	1	1	NUM
cet-2662	17	11	shows	show	VERB
cet-2662	17	12	the	the	DET
cet-2662	17	13	equipment	equipment	NOUN
cet-2662	17	14	needed	need	VERB
cet-2662	17	15	for	for	ADP
cet-2662	17	16	our	our	PRON
cet-2662	17	17	method	method	NOUN
cet-2662	17	18	.	.	PUNCT
cet-2662	18	1	label	label	NOUN
cet-2662	18	2	1	1	NUM
cet-2662	18	3	is	be	AUX
cet-2662	18	4	the	the	DET
cet-2662	18	5	equipment	equipment	NOUN
cet-2662	18	6	control	control	PROPN
cet-2662	18	7	box	box	PROPN
cet-2662	18	8	.	.	PUNCT
cet-2662	19	1	label	label	NOUN
cet-2662	19	2	2	2	NUM
cet-2662	19	3	is	be	AUX
cet-2662	19	4	the	the	DET
cet-2662	19	5	microwave	microwave	NOUN
cet-2662	19	6	source	source	NOUN
cet-2662	19	7	with	with	ADP
cet-2662	19	8	output	output	NOUN
cet-2662	19	9	continuously	continuously	ADV
cet-2662	19	10	adjustable	adjustable	ADJ
cet-2662	19	11	between	between	ADP
cet-2662	19	12	0	0	NUM
cet-2662	19	13	and	and	CCONJ
cet-2662	19	14	1500	1500	NUM
cet-2662	19	15	w.	w.	NOUN
cet-2662	19	16	label	label	NOUN
cet-2662	19	17	3	3	NUM
cet-2662	19	18	is	be	AUX
cet-2662	19	19	a	a	DET
cet-2662	19	20	square	square	ADJ
cet-2662	19	21	waveguide	waveguide	NOUN
cet-2662	19	22	.	.	PUNCT
cet-2662	20	1	label	label	NOUN
cet-2662	20	2	4	4	NUM
cet-2662	20	3	is	be	AUX
cet-2662	20	4	an	an	DET
cet-2662	20	5	ecr	ecr	PROPN
cet-2662	20	6	resonant	resonant	NOUN
cet-2662	20	7	cavity	cavity	NOUN
cet-2662	20	8	surrounded	surround	VERB
cet-2662	20	9	by	by	ADP
cet-2662	20	10	an	an	DET
cet-2662	20	11	annular	annular	ADJ
cet-2662	20	12	water	water	NOUN
cet-2662	20	13	-	-	PUNCT
cet-2662	20	14	cooled	cool	VERB
cet-2662	20	15	coil	coil	NOUN
cet-2662	20	16	.	.	PUNCT
cet-2662	21	1	two	two	NUM
cet-2662	21	2	such	such	ADJ
cet-2662	21	3	resonant	resonant	ADJ
cet-2662	21	4	cavities	cavity	NOUN
cet-2662	21	5	were	be	AUX
cet-2662	21	6	symmetrically	symmetrically	ADV
cet-2662	21	7	placed	place	VERB
cet-2662	21	8	left	left	ADJ
cet-2662	21	9	and	and	CCONJ
cet-2662	21	10	right	right	ADJ
cet-2662	21	11	.	.	PUNCT
cet-2662	22	1	label	label	NOUN
cet-2662	22	2	5	5	NUM
cet-2662	22	3	is	be	AUX
cet-2662	22	4	the	the	DET
cet-2662	22	5	ecr	ecr	PROPN
cet-2662	22	6	resonant	resonant	ADJ
cet-2662	22	7	cavity	cavity	NOUN
cet-2662	22	8	power	power	NOUN
cet-2662	22	9	supply	supply	NOUN
cet-2662	22	10	.	.	PUNCT
cet-2662	23	1	label	label	NOUN
cet-2662	23	2	6	6	NUM
cet-2662	23	3	is	be	AUX
cet-2662	23	4	the	the	DET
cet-2662	23	5	main	main	ADJ
cet-2662	23	6	vacuum	vacuum	NOUN
cet-2662	23	7	chamber	chamber	NOUN
cet-2662	23	8	.	.	PUNCT
cet-2662	24	1	label	label	NOUN
cet-2662	24	2	7	7	NUM
cet-2662	24	3	is	be	AUX
cet-2662	24	4	the	the	DET
cet-2662	24	5	triple	triple	ADJ
cet-2662	24	6	-	-	PUNCT
cet-2662	24	7	stud	stud	NOUN
cet-2662	24	8	tuner	tuner	NOUN
cet-2662	24	9	used	use	VERB
cet-2662	24	10	to	to	PART
cet-2662	24	11	match	match	VERB
cet-2662	24	12	the	the	DET
cet-2662	24	13	impedance	impedance	NOUN
cet-2662	24	14	between	between	ADP
cet-2662	24	15	the	the	DET
cet-2662	24	16	load	load	NOUN
cet-2662	24	17	and	and	CCONJ
cet-2662	24	18	the	the	DET
cet-2662	24	19	microwave	microwave	PROPN
cet-2662	24	20	source	source	NOUN
cet-2662	24	21	.	.	PUNCT
cet-2662	25	1	the	the	DET
cet-2662	25	2	main	main	ADJ
cet-2662	25	3	vacuum	vacuum	NOUN
cet-2662	25	4	chamber	chamber	NOUN
cet-2662	25	5	is	be	AUX
cet-2662	25	6	cylindrical	cylindrical	ADJ
cet-2662	25	7	,	,	PUNCT
cet-2662	25	8	with	with	ADP
cet-2662	25	9	a	a	DET
cet-2662	25	10	diameter	diameter	NOUN
cet-2662	25	11	of	of	ADP
cet-2662	25	12	80	80	NUM
cet-2662	25	13	cm	cm	NOUN
cet-2662	25	14	and	and	CCONJ
cet-2662	25	15	a	a	DET
cet-2662	25	16	length	length	NOUN
cet-2662	25	17	of	of	ADP
cet-2662	25	18	80	80	NUM
cet-2662	25	19	cm	cm	NOUN
cet-2662	25	20	.	.	PUNCT
cet-2662	26	1	the	the	DET
cet-2662	26	2	vacuum	vacuum	NOUN
cet-2662	26	3	source	source	NOUN
cet-2662	26	4	uses	use	VERB
cet-2662	26	5	a	a	DET
cet-2662	26	6	mechanical	mechanical	ADJ
cet-2662	26	7	pump	pump	NOUN
cet-2662	26	8	and	and	CCONJ
cet-2662	26	9	a	a	DET
cet-2662	26	10	molecular	molecular	ADJ
cet-2662	26	11	pump	pump	NOUN
cet-2662	26	12	.	.	PUNCT
cet-2662	27	1	the	the	DET
cet-2662	27	2	stage	stage	NOUN
cet-2662	27	3	can	can	AUX
cet-2662	27	4	be	be	AUX
cet-2662	27	5	rotated	rotate	VERB
cet-2662	27	6	and	and	CCONJ
cet-2662	27	7	passed	pass	VERB
cet-2662	27	8	through	through	ADP
cet-2662	27	9	cooling	cool	VERB
cet-2662	27	10	water	water	NOUN
cet-2662	27	11	.	.	PUNCT
cet-2662	28	1	a	a	DET
cet-2662	28	2	mass	mass	ADJ
cet-2662	28	3	flow	flow	NOUN
cet-2662	28	4	meter	meter	NOUN
cet-2662	28	5	controls	control	VERB
cet-2662	28	6	the	the	DET
cet-2662	28	7	flow	flow	NOUN
cet-2662	28	8	of	of	ADP
cet-2662	28	9	gas	gas	NOUN
cet-2662	28	10	to	to	ADP
cet-2662	28	11	the	the	DET
cet-2662	28	12	ecr	ecr	PROPN
cet-2662	28	13	resonant	resonant	NOUN
cet-2662	28	14	cavity	cavity	NOUN
cet-2662	28	15	.	.	PUNCT
cet-2662	29	1	the	the	DET
cet-2662	29	2	microwave	microwave	NOUN
cet-2662	29	3	system	system	NOUN
cet-2662	29	4	uses	use	VERB
cet-2662	29	5	a	a	DET
cet-2662	29	6	2.45ghz	2.45ghz	NUM
cet-2662	29	7	microwave	microwave	NOUN
cet-2662	29	8	generator	generator	NOUN
cet-2662	29	9	,	,	PUNCT
cet-2662	29	10	a	a	DET
cet-2662	29	11	circulator	circulator	NOUN
cet-2662	29	12	,	,	PUNCT
cet-2662	29	13	a	a	DET
cet-2662	29	14	two	two	NUM
cet-2662	29	15	-	-	PUNCT
cet-2662	29	16	way	way	NOUN
cet-2662	29	17	coupler	coupler	NOUN
cet-2662	29	18	,	,	PUNCT
cet-2662	29	19	a	a	DET
cet-2662	29	20	triple	triple	ADJ
cet-2662	29	21	pin	pin	NOUN
cet-2662	29	22	adapter	adapter	NOUN
cet-2662	29	23	,	,	PUNCT
cet-2662	29	24	and	and	CCONJ
cet-2662	29	25	a	a	DET
cet-2662	29	26	waveguide	waveguide	NOUN
cet-2662	29	27	.	.	PUNCT
cet-2662	30	1	the	the	DET
cet-2662	30	2	coil	coil	NOUN
cet-2662	30	3	’s	’s	PART
cet-2662	30	4	magnetic	magnetic	ADJ
cet-2662	30	5	field	field	NOUN
cet-2662	30	6	produces	produce	VERB
cet-2662	30	7	a	a	DET
cet-2662	30	8	magnetic	magnetic	ADJ
cet-2662	30	9	field	field	NOUN
cet-2662	30	10	of	of	ADP
cet-2662	30	11	8.75×10−2	8.75×10−2	NUM
cet-2662	30	12	t.	t.	NOUN
cet-2662	30	13	doi	doi	NOUN
cet-2662	30	14	:	:	PUNCT
cet-2662	30	15	10.3303	10.3303	NUM
cet-2662	30	16	/	/	SYM
cet-2662	30	17	cet1866004	cet1866004	NOUN
cet-2662	30	18	please	please	INTJ
cet-2662	30	19	cite	cite	VERB
cet-2662	30	20	this	this	DET
cet-2662	30	21	article	article	NOUN
cet-2662	30	22	as	as	ADP
cet-2662	30	23	:	:	PUNCT
cet-2662	30	24	li	li	PROPN
cet-2662	30	25	x.	x.	PROPN
cet-2662	30	26	,	,	PUNCT
cet-2662	30	27	miao	miao	PROPN
cet-2662	30	28	h.	h.	PROPN
cet-2662	30	29	,	,	PUNCT
cet-2662	30	30	zhu	zhu	PROPN
cet-2662	30	31	h.	h.	PROPN
cet-2662	30	32	,	,	PUNCT
cet-2662	30	33	2018	2018	NUM
cet-2662	30	34	,	,	PUNCT
cet-2662	30	35	deposition	deposition	NOUN
cet-2662	30	36	and	and	CCONJ
cet-2662	30	37	characterization	characterization	NOUN
cet-2662	30	38	of	of	ADP
cet-2662	30	39	diamond	diamond	NOUN
cet-2662	30	40	-	-	PUNCT
cet-2662	30	41	like	like	ADJ
cet-2662	30	42	carbon	carbon	NOUN
cet-2662	30	43	films	film	NOUN
cet-2662	30	44	by	by	ADP
cet-2662	30	45	electron	electron	NOUN
cet-2662	30	46	cyclotron	cyclotron	NOUN
cet-2662	30	47	resonance	resonance	NOUN
cet-2662	30	48	microwave	microwave	NOUN
cet-2662	30	49	plasma	plasma	NOUN
cet-2662	30	50	enhanced	enhance	VERB
cet-2662	30	51	unbalanced	unbalanced	ADJ
cet-2662	30	52	magnetron	magnetron	NOUN
cet-2662	30	53	sputtering	sputtering	NOUN
cet-2662	30	54	,	,	PUNCT
cet-2662	30	55	chemical	chemical	ADJ
cet-2662	30	56	engineering	engineering	NOUN
cet-2662	30	57	transactions	transaction	NOUN
cet-2662	30	58	,	,	PUNCT
cet-2662	30	59	66	66	NUM
cet-2662	30	60	,	,	PUNCT
cet-2662	30	61	19	19	NUM
cet-2662	30	62	-	-	SYM
cet-2662	30	63	24	24	NUM
cet-2662	30	64	doi:10.3303	doi:10.3303	NOUN
cet-2662	30	65	/	/	SYM
cet-2662	30	66	cet1866004	cet1866004	NOUN
cet-2662	30	67	19	19	NUM
cet-2662	30	68	figure	figure	NOUN
cet-2662	30	69	1	1	NUM
cet-2662	30	70	:	:	PUNCT
cet-2662	30	71	view	view	NOUN
cet-2662	30	72	of	of	ADP
cet-2662	30	73	mw	mw	ADJ
cet-2662	30	74	-	-	PUNCT
cet-2662	30	75	ecr	ecr	ADJ
cet-2662	30	76	-	-	PUNCT
cet-2662	30	77	psii	psii	ADJ
cet-2662	30	78	equipment	equipment	NOUN
cet-2662	30	79	figure	figure	NOUN
cet-2662	30	80	2	2	NUM
cet-2662	30	81	:	:	PUNCT
cet-2662	30	82	radial	radial	ADJ
cet-2662	30	83	magnetic	magnetic	ADJ
cet-2662	30	84	field	field	NOUN
cet-2662	30	85	configuration	configuration	NOUN
cet-2662	30	86	(	(	PUNCT
cet-2662	30	87	magnetic	magnetic	ADJ
cet-2662	30	88	line	line	NOUN
cet-2662	30	89	)	)	PUNCT
cet-2662	30	90	at	at	ADP
cet-2662	30	91	this	this	DET
cet-2662	30	92	magnetic	magnetic	ADJ
cet-2662	30	93	field	field	NOUN
cet-2662	30	94	strength	strength	NOUN
cet-2662	30	95	,	,	PUNCT
cet-2662	30	96	the	the	DET
cet-2662	30	97	microwave	microwave	NOUN
cet-2662	30	98	frequency	frequency	NOUN
cet-2662	30	99	is	be	AUX
cet-2662	30	100	the	the	DET
cet-2662	30	101	same	same	ADJ
cet-2662	30	102	as	as	ADP
cet-2662	30	103	the	the	DET
cet-2662	30	104	resonance	resonance	NOUN
cet-2662	30	105	frequency	frequency	NOUN
cet-2662	30	106	of	of	ADP
cet-2662	30	107	electrons	electron	NOUN
cet-2662	30	108	in	in	ADP
cet-2662	30	109	the	the	DET
cet-2662	30	110	magnetic	magnetic	ADJ
cet-2662	30	111	field	field	NOUN
cet-2662	30	112	,	,	PUNCT
cet-2662	30	113	energizing	energize	VERB
cet-2662	30	114	electrons	electron	NOUN
cet-2662	30	115	in	in	ADP
cet-2662	30	116	the	the	DET
cet-2662	30	117	resonant	resonant	ADJ
cet-2662	30	118	cavity	cavity	NOUN
cet-2662	30	119	via	via	ADP
cet-2662	30	120	cyclotron	cyclotron	NOUN
cet-2662	30	121	resonance	resonance	NOUN
cet-2662	30	122	.	.	PUNCT
cet-2662	31	1	the	the	DET
cet-2662	31	2	ions	ion	NOUN
cet-2662	31	3	collide	collide	VERB
cet-2662	31	4	with	with	ADP
cet-2662	31	5	the	the	DET
cet-2662	31	6	neutral	neutral	ADJ
cet-2662	31	7	gas	gas	NOUN
cet-2662	31	8	atoms	atom	NOUN
cet-2662	31	9	and	and	CCONJ
cet-2662	31	10	molecules	molecule	NOUN
cet-2662	31	11	to	to	PART
cet-2662	31	12	generate	generate	VERB
cet-2662	31	13	high	high	ADJ
cet-2662	31	14	-	-	PUNCT
cet-2662	31	15	density	density	NOUN
cet-2662	31	16	plasma	plasma	NOUN
cet-2662	31	17	.	.	PUNCT
cet-2662	32	1	by	by	ADP
cet-2662	32	2	adjusting	adjust	VERB
cet-2662	32	3	the	the	DET
cet-2662	32	4	size	size	NOUN
cet-2662	32	5	and	and	CCONJ
cet-2662	32	6	direction	direction	NOUN
cet-2662	32	7	of	of	ADP
cet-2662	32	8	the	the	DET
cet-2662	32	9	excitation	excitation	NOUN
cet-2662	32	10	coil	coil	NOUN
cet-2662	32	11	current	current	NOUN
cet-2662	32	12	,	,	PUNCT
cet-2662	32	13	the	the	DET
cet-2662	32	14	magnetic	magnetic	ADJ
cet-2662	32	15	field	field	NOUN
cet-2662	32	16	generated	generate	VERB
cet-2662	32	17	by	by	ADP
cet-2662	32	18	the	the	DET
cet-2662	32	19	magnetic	magnetic	ADJ
cet-2662	32	20	coils	coil	NOUN
cet-2662	32	21	of	of	ADP
cet-2662	32	22	the	the	DET
cet-2662	32	23	two	two	NUM
cet-2662	32	24	ecr	ecr	PROPN
cet-2662	32	25	resonant	resonant	ADJ
cet-2662	32	26	cavities	cavity	NOUN
cet-2662	32	27	can	can	AUX
cet-2662	32	28	be	be	AUX
cet-2662	32	29	adjusted	adjust	VERB
cet-2662	32	30	to	to	PART
cet-2662	32	31	form	form	VERB
cet-2662	32	32	a	a	DET
cet-2662	32	33	tangential	tangential	ADJ
cet-2662	32	34	magnetic	magnetic	ADJ
cet-2662	32	35	field	field	NOUN
cet-2662	32	36	potential	potential	ADJ
cet-2662	32	37	type	type	NOUN
cet-2662	32	38	in	in	ADP
cet-2662	32	39	the	the	DET
cet-2662	32	40	main	main	ADJ
cet-2662	32	41	vacuum	vacuum	NOUN
cet-2662	32	42	chamber	chamber	NOUN
cet-2662	32	43	,	,	PUNCT
cet-2662	32	44	as	as	SCONJ
cet-2662	32	45	shown	show	VERB
cet-2662	32	46	in	in	ADP
cet-2662	32	47	figure	figure	NOUN
cet-2662	32	48	2	2	NUM
cet-2662	32	49	.	.	PUNCT
cet-2662	33	1	this	this	DET
cet-2662	33	2	generated	generate	VERB
cet-2662	33	3	magnetic	magnetic	ADJ
cet-2662	33	4	field	field	NOUN
cet-2662	33	5	and	and	CCONJ
cet-2662	33	6	the	the	DET
cet-2662	33	7	magnetic	magnetic	ADJ
cet-2662	33	8	field	field	NOUN
cet-2662	33	9	of	of	ADP
cet-2662	33	10	the	the	DET
cet-2662	33	11	magnetically	magnetically	ADV
cet-2662	33	12	controlled	control	VERB
cet-2662	33	13	target	target	NOUN
cet-2662	33	14	are	be	AUX
cet-2662	33	15	superimposed	superimpose	VERB
cet-2662	33	16	with	with	ADP
cet-2662	33	17	each	each	DET
cet-2662	33	18	other	other	ADJ
cet-2662	33	19	.	.	PUNCT
cet-2662	34	1	the	the	DET
cet-2662	34	2	result	result	NOUN
cet-2662	34	3	is	be	AUX
cet-2662	34	4	that	that	SCONJ
cet-2662	34	5	that	that	SCONJ
cet-2662	34	6	the	the	DET
cet-2662	34	7	magnetic	magnetic	ADJ
cet-2662	34	8	field	field	NOUN
cet-2662	34	9	on	on	ADP
cet-2662	34	10	the	the	DET
cet-2662	34	11	surface	surface	NOUN
cet-2662	34	12	of	of	ADP
cet-2662	34	13	the	the	DET
cet-2662	34	14	target	target	NOUN
cet-2662	34	15	is	be	AUX
cet-2662	34	16	no	no	ADV
cet-2662	34	17	longer	long	ADV
cet-2662	34	18	closed	close	VERB
cet-2662	34	19	,	,	PUNCT
cet-2662	34	20	and	and	CCONJ
cet-2662	34	21	a	a	DET
cet-2662	34	22	large	large	ADJ
cet-2662	34	23	magnetic	magnetic	ADJ
cet-2662	34	24	field	field	NOUN
cet-2662	34	25	component	component	NOUN
cet-2662	34	26	perpendicular	perpendicular	NOUN
cet-2662	34	27	to	to	ADP
cet-2662	34	28	the	the	DET
cet-2662	34	29	target	target	NOUN
cet-2662	34	30	surface	surface	NOUN
cet-2662	34	31	.	.	PUNCT
cet-2662	35	1	the	the	DET
cet-2662	35	2	plasma	plasma	NOUN
cet-2662	35	3	generated	generate	VERB
cet-2662	35	4	by	by	ADP
cet-2662	35	5	the	the	DET
cet-2662	35	6	target	target	NOUN
cet-2662	35	7	discharge	discharge	NOUN
cet-2662	35	8	is	be	AUX
cet-2662	35	9	not	not	PART
cet-2662	35	10	strongly	strongly	ADV
cet-2662	35	11	confined	confine	VERB
cet-2662	35	12	in	in	ADP
cet-2662	35	13	the	the	DET
cet-2662	35	14	vicinity	vicinity	NOUN
cet-2662	35	15	of	of	ADP
cet-2662	35	16	the	the	DET
cet-2662	35	17	sputtering	sputtering	ADJ
cet-2662	35	18	target	target	NOUN
cet-2662	35	19	.	.	PUNCT
cet-2662	36	1	thus	thus	ADV
cet-2662	36	2	,	,	PUNCT
cet-2662	36	3	some	some	DET
cet-2662	36	4	plasma	plasma	NOUN
cet-2662	36	5	travels	travel	VERB
cet-2662	36	6	to	to	ADP
cet-2662	36	7	the	the	DET
cet-2662	36	8	surface	surface	NOUN
cet-2662	36	9	of	of	ADP
cet-2662	36	10	the	the	DET
cet-2662	36	11	substrate	substrate	NOUN
cet-2662	36	12	by	by	ADP
cet-2662	36	13	collision	collision	NOUN
cet-2662	36	14	diffusion	diffusion	NOUN
cet-2662	36	15	and	and	CCONJ
cet-2662	36	16	the	the	DET
cet-2662	36	17	magnetic	magnetic	ADJ
cet-2662	36	18	pressure	pressure	NOUN
cet-2662	36	19	field	field	NOUN
cet-2662	36	20	,	,	PUNCT
cet-2662	36	21	greatly	greatly	ADV
cet-2662	36	22	increasing	increase	VERB
cet-2662	36	23	the	the	DET
cet-2662	36	24	ion	ion	NOUN
cet-2662	36	25	flux	flux	NOUN
cet-2662	36	26	density	density	NOUN
cet-2662	36	27	reaching	reach	VERB
cet-2662	36	28	the	the	DET
cet-2662	36	29	substrate	substrate	NOUN
cet-2662	36	30	and	and	CCONJ
cet-2662	36	31	causing	cause	VERB
cet-2662	36	32	unbalanced	unbalanced	ADJ
cet-2662	36	33	magnetron	magnetron	NOUN
cet-2662	36	34	sputtering	sputtering	NOUN
cet-2662	36	35	.	.	PUNCT
cet-2662	37	1	adjustments	adjustment	NOUN
cet-2662	37	2	to	to	ADP
cet-2662	37	3	the	the	DET
cet-2662	37	4	sputtering	sputtering	ADJ
cet-2662	37	5	and	and	CCONJ
cet-2662	37	6	substrate	substrate	NOUN
cet-2662	37	7	biases	bias	NOUN
cet-2662	37	8	change	change	VERB
cet-2662	37	9	the	the	DET
cet-2662	37	10	energy	energy	NOUN
cet-2662	37	11	and	and	CCONJ
cet-2662	37	12	flux	flux	NOUN
cet-2662	37	13	of	of	ADP
cet-2662	37	14	the	the	DET
cet-2662	37	15	sputtering	sputtering	ADJ
cet-2662	37	16	ions	ion	NOUN
cet-2662	37	17	reaching	reach	VERB
cet-2662	37	18	the	the	DET
cet-2662	37	19	surface	surface	NOUN
cet-2662	37	20	of	of	ADP
cet-2662	37	21	the	the	DET
cet-2662	37	22	film	film	NOUN
cet-2662	37	23	,	,	PUNCT
cet-2662	37	24	respectively	respectively	ADV
cet-2662	37	25	.	.	PUNCT
cet-2662	38	1	the	the	DET
cet-2662	38	2	height	height	NOUN
cet-2662	38	3	of	of	ADP
cet-2662	38	4	the	the	DET
cet-2662	38	5	stage	stage	NOUN
cet-2662	38	6	is	be	AUX
cet-2662	38	7	adjustable	adjustable	ADJ
cet-2662	38	8	,	,	PUNCT
cet-2662	38	9	allowing	allow	VERB
cet-2662	38	10	changes	change	NOUN
cet-2662	38	11	in	in	ADP
cet-2662	38	12	the	the	DET
cet-2662	38	13	distance	distance	NOUN
cet-2662	38	14	between	between	ADP
cet-2662	38	15	the	the	DET
cet-2662	38	16	sputtering	sputtering	ADJ
cet-2662	38	17	target	target	NOUN
cet-2662	38	18	and	and	CCONJ
cet-2662	38	19	the	the	DET
cet-2662	38	20	stage	stage	NOUN
cet-2662	38	21	.	.	PUNCT
cet-2662	39	1	3	3	X
cet-2662	39	2	.	.	X
cet-2662	39	3	experimental	experimental	ADJ
cet-2662	39	4	methods	method	NOUN
cet-2662	39	5	we	we	PRON
cet-2662	39	6	used	use	VERB
cet-2662	39	7	high	high	ADJ
cet-2662	39	8	-	-	PUNCT
cet-2662	39	9	purity	purity	NOUN
cet-2662	39	10	graphite	graphite	NOUN
cet-2662	39	11	as	as	ADP
cet-2662	39	12	the	the	DET
cet-2662	39	13	carbon	carbon	NOUN
cet-2662	39	14	source	source	NOUN
cet-2662	39	15	with	with	ADP
cet-2662	39	16	argon	argon	NOUN
cet-2662	39	17	as	as	ADP
cet-2662	39	18	the	the	DET
cet-2662	39	19	sputtering	sputtering	ADJ
cet-2662	39	20	gas	gas	NOUN
cet-2662	39	21	.	.	PUNCT
cet-2662	40	1	after	after	ADP
cet-2662	40	2	sputter	sputter	NOUN
cet-2662	40	3	cleaning	clean	VERB
cet-2662	40	4	,	,	PUNCT
cet-2662	40	5	we	we	PRON
cet-2662	40	6	heated	heat	VERB
cet-2662	40	7	the	the	DET
cet-2662	40	8	substrate	substrate	NOUN
cet-2662	40	9	to	to	ADP
cet-2662	40	10	100	100	NUM
cet-2662	40	11	°	°	NOUN
cet-2662	40	12	c	c	NOUN
cet-2662	40	13	and	and	CCONJ
cet-2662	40	14	set	set	VERB
cet-2662	40	15	the	the	DET
cet-2662	40	16	ecr	ecr	PROPN
cet-2662	40	17	magnetic	magnetic	PROPN
cet-2662	40	18	field	field	PROPN
cet-2662	40	19	coil	coil	NOUN
cet-2662	40	20	current	current	NOUN
cet-2662	40	21	to	to	ADP
cet-2662	40	22	50	50	NUM
cet-2662	40	23	a.	a.	NOUN
cet-2662	40	24	these	these	DET
cet-2662	40	25	conditions	condition	NOUN
cet-2662	40	26	placed	place	VERB
cet-2662	40	27	the	the	DET
cet-2662	40	28	ecr	ecr	PROPN
cet-2662	40	29	resonant	resonant	NOUN
cet-2662	40	30	plane	plane	NOUN
cet-2662	40	31	at	at	ADP
cet-2662	40	32	the	the	DET
cet-2662	40	33	outlet	outlet	NOUN
cet-2662	40	34	of	of	ADP
cet-2662	40	35	the	the	DET
cet-2662	40	36	discharge	discharge	NOUN
cet-2662	40	37	chamber	chamber	NOUN
cet-2662	40	38	,	,	PUNCT
cet-2662	40	39	maximizing	maximize	VERB
cet-2662	40	40	the	the	DET
cet-2662	40	41	plasma	plasma	NOUN
cet-2662	40	42	density	density	NOUN
cet-2662	40	43	of	of	ADP
cet-2662	40	44	the	the	DET
cet-2662	40	45	deposition	deposition	NOUN
cet-2662	40	46	chamber	chamber	NOUN
cet-2662	40	47	.	.	PUNCT
cet-2662	41	1	after	after	ADP
cet-2662	41	2	opening	open	VERB
cet-2662	41	3	the	the	DET
cet-2662	41	4	microwave	microwave	NOUN
cet-2662	41	5	source	source	NOUN
cet-2662	41	6	,	,	PUNCT
cet-2662	41	7	the	the	DET
cet-2662	41	8	glow	glow	NOUN
cet-2662	41	9	generated	generate	VERB
cet-2662	41	10	by	by	ADP
cet-2662	41	11	the	the	DET
cet-2662	41	12	argon	argon	NOUN
cet-2662	41	13	plasma	plasma	NOUN
cet-2662	41	14	was	be	AUX
cet-2662	41	15	visible	visible	ADJ
cet-2662	41	16	through	through	ADP
cet-2662	41	17	the	the	DET
cet-2662	41	18	observation	observation	NOUN
cet-2662	41	19	window	window	NOUN
cet-2662	41	20	.	.	PUNCT
cet-2662	42	1	we	we	PRON
cet-2662	42	2	applied	apply	VERB
cet-2662	42	3	the	the	DET
cet-2662	42	4	sputtering	sputter	VERB
cet-2662	42	5	bias	bias	NOUN
cet-2662	42	6	to	to	PART
cet-2662	42	7	clean	clean	VERB
cet-2662	42	8	the	the	DET
cet-2662	42	9	target	target	NOUN
cet-2662	42	10	for	for	ADP
cet-2662	42	11	about	about	ADV
cet-2662	42	12	5	5	NUM
cet-2662	42	13	s.	s.	PROPN
cet-2662	42	14	we	we	PRON
cet-2662	42	15	applied	apply	VERB
cet-2662	42	16	the	the	DET
cet-2662	42	17	deposition	deposition	NOUN
cet-2662	42	18	bias	bias	NOUN
cet-2662	42	19	and	and	CCONJ
cet-2662	42	20	opened	open	VERB
cet-2662	42	21	the	the	DET
cet-2662	42	22	baffle	baffle	NOUN
cet-2662	42	23	to	to	PART
cet-2662	42	24	begin	begin	VERB
cet-2662	42	25	the	the	DET
cet-2662	42	26	thin	thin	ADJ
cet-2662	42	27	film	film	NOUN
cet-2662	42	28	deposition	deposition	NOUN
cet-2662	42	29	.	.	PUNCT
cet-2662	43	1	after	after	ADP
cet-2662	43	2	30	30	NUM
cet-2662	43	3	min	min	NOUN
cet-2662	43	4	,	,	PUNCT
cet-2662	43	5	stopped	stop	VERB
cet-2662	43	6	the	the	DET
cet-2662	43	7	deposition	deposition	NOUN
cet-2662	43	8	.	.	PUNCT
cet-2662	44	1	we	we	PRON
cet-2662	44	2	closed	close	VERB
cet-2662	44	3	the	the	DET
cet-2662	44	4	baffle	baffle	ADJ
cet-2662	44	5	plate	plate	NOUN
cet-2662	44	6	,	,	PUNCT
cet-2662	44	7	turned	turn	VERB
cet-2662	44	8	off	off	ADP
cet-2662	44	9	the	the	DET
cet-2662	44	10	sputtering	sputter	VERB
cet-2662	44	11	bias	bias	NOUN
cet-2662	44	12	,	,	PUNCT
cet-2662	44	13	deposition	deposition	NOUN
cet-2662	44	14	bias	bias	NOUN
cet-2662	44	15	,	,	PUNCT
cet-2662	44	16	and	and	CCONJ
cet-2662	44	17	microwave	microwave	NOUN
cet-2662	44	18	source	source	NOUN
cet-2662	44	19	,	,	PUNCT
cet-2662	44	20	shut	shut	VERB
cet-2662	44	21	down	down	ADP
cet-2662	44	22	the	the	DET
cet-2662	44	23	ecr	ecr	PROPN
cet-2662	44	24	magnetic	magnetic	ADJ
cet-2662	44	25	field	field	NOUN
cet-2662	44	26	and	and	CCONJ
cet-2662	44	27	heating	heating	NOUN
cet-2662	44	28	current	current	ADJ
cet-2662	44	29	,	,	PUNCT
cet-2662	44	30	and	and	CCONJ
cet-2662	44	31	closed	close	VERB
cet-2662	44	32	the	the	DET
cet-2662	44	33	gas	gas	NOUN
cet-2662	44	34	source	source	NOUN
cet-2662	44	35	.	.	PUNCT
cet-2662	45	1	after	after	ADP
cet-2662	45	2	natural	natural	ADJ
cet-2662	45	3	cooling	cooling	NOUN
cet-2662	45	4	,	,	PUNCT
cet-2662	45	5	released	release	VERB
cet-2662	45	6	the	the	DET
cet-2662	45	7	vacuum	vacuum	NOUN
cet-2662	45	8	and	and	CCONJ
cet-2662	45	9	removed	remove	VERB
cet-2662	45	10	the	the	DET
cet-2662	45	11	sample	sample	NOUN
cet-2662	45	12	.	.	PUNCT
cet-2662	46	1	table	table	NOUN
cet-2662	46	2	1	1	NUM
cet-2662	46	3	shows	show	VERB
cet-2662	46	4	the	the	DET
cet-2662	46	5	parameters	parameter	NOUN
cet-2662	46	6	for	for	ADP
cet-2662	46	7	preparation	preparation	NOUN
cet-2662	46	8	process	process	NOUN
cet-2662	46	9	.	.	PUNCT
cet-2662	47	1	table	table	NOUN
cet-2662	47	2	1	1	NUM
cet-2662	47	3	preparation	preparation	NOUN
cet-2662	47	4	conditions	condition	NOUN
cet-2662	47	5	of	of	ADP
cet-2662	47	6	the	the	DET
cet-2662	47	7	dlc	dlc	NOUN
cet-2662	47	8	film	film	NOUN
cet-2662	47	9	by	by	ADP
cet-2662	47	10	ums	ums	PROPN
cet-2662	47	11	sample	sample	NOUN
cet-2662	47	12	working	work	VERB
cet-2662	47	13	pressure	pressure	NOUN
cet-2662	47	14	(	(	PUNCT
cet-2662	47	15	pa	pa	NOUN
cet-2662	47	16	)	)	PUNCT
cet-2662	47	17	sputtering	sputtering	ADJ
cet-2662	47	18	bias	bias	NOUN
cet-2662	47	19	(	(	PUNCT
cet-2662	47	20	v	v	NOUN
cet-2662	47	21	)	)	PUNCT
cet-2662	47	22	deposition	deposition	NOUN
cet-2662	47	23	bias	bias	NOUN
cet-2662	47	24	(	(	PUNCT
cet-2662	47	25	v	v	NOUN
cet-2662	47	26	)	)	PUNCT
cet-2662	47	27	deposition	deposition	NOUN
cet-2662	47	28	temperature	temperature	NOUN
cet-2662	47	29	(	(	PUNCT
cet-2662	47	30	°	°	ADP
cet-2662	47	31	c	c	NOUN
cet-2662	47	32	)	)	PUNCT
cet-2662	47	33	target	target	NOUN
cet-2662	47	34	-	-	PUNCT
cet-2662	47	35	substrate	substrate	NOUN
cet-2662	47	36	distance	distance	NOUN
cet-2662	47	37	(	(	PUNCT
cet-2662	47	38	mm	mm	NOUN
cet-2662	47	39	)	)	PUNCT
cet-2662	47	40	ms-01	ms-01	NOUN
cet-2662	48	1	0.09	0.09	NUM
cet-2662	48	2	−300	−300	ADJ
cet-2662	48	3	0	0	NUM
cet-2662	48	4	300	300	NUM
cet-2662	48	5	150	150	NUM
cet-2662	48	6	ms-02	ms-02	NOUN
cet-2662	48	7	0.09	0.09	NUM
cet-2662	48	8	−300	−300	ADJ
cet-2662	48	9	−20	−20	NOUN
cet-2662	48	10	300	300	NUM
cet-2662	48	11	150	150	NUM
cet-2662	48	12	ms-03	ms-03	NOUN
cet-2662	48	13	0.09	0.09	NUM
cet-2662	48	14	−300	−300	NOUN
cet-2662	48	15	−50	−50	PROPN
cet-2662	48	16	300	300	NUM
cet-2662	48	17	150	150	NUM
cet-2662	48	18	ms-04	ms-04	NUM
cet-2662	48	19	0.09	0.09	NUM
cet-2662	48	20	−300	−300	NOUN
cet-2662	48	21	−100	−100	ADP
cet-2662	48	22	300	300	NUM
cet-2662	48	23	150	150	NUM
cet-2662	48	24	ms-05	ms-05	NOUN
cet-2662	48	25	0.09	0.09	NUM
cet-2662	48	26	−300	−300	NOUN
cet-2662	48	27	−50	−50	PROPN
cet-2662	48	28	300	300	NUM
cet-2662	48	29	200	200	NUM
cet-2662	48	30	ms-06	ms-06	NOUN
cet-2662	48	31	0.09	0.09	NUM
cet-2662	48	32	−300	−300	NOUN
cet-2662	48	33	−50	−50	PROPN
cet-2662	48	34	300	300	NUM
cet-2662	48	35	100	100	NUM
cet-2662	48	36	4	4	NUM
cet-2662	48	37	.	.	PUNCT
cet-2662	48	38	results	result	NOUN
cet-2662	48	39	and	and	CCONJ
cet-2662	48	40	discussion	discussion	NOUN
cet-2662	48	41	films	film	NOUN
cet-2662	48	42	prepared	prepare	VERB
cet-2662	48	43	by	by	ADP
cet-2662	48	44	different	different	ADJ
cet-2662	48	45	methods	method	NOUN
cet-2662	48	46	have	have	VERB
cet-2662	48	47	very	very	ADV
cet-2662	48	48	different	different	ADJ
cet-2662	48	49	structures	structure	NOUN
cet-2662	48	50	and	and	CCONJ
cet-2662	48	51	properties	property	NOUN
cet-2662	48	52	.	.	PUNCT
cet-2662	49	1	we	we	PRON
cet-2662	49	2	characterized	characterize	VERB
cet-2662	49	3	the	the	DET
cet-2662	49	4	resulting	result	VERB
cet-2662	49	5	film	film	NOUN
cet-2662	49	6	from	from	ADP
cet-2662	49	7	our	our	PRON
cet-2662	49	8	process	process	NOUN
cet-2662	49	9	qualitatively	qualitatively	ADV
cet-2662	49	10	by	by	ADP
cet-2662	49	11	visible	visible	ADJ
cet-2662	49	12	raman	raman	NOUN
cet-2662	49	13	spectroscopy	spectroscopy	NOUN
cet-2662	49	14	and	and	CCONJ
cet-2662	49	15	x	x	NOUN
cet-2662	49	16	-	-	NOUN
cet-2662	49	17	ray	ray	NOUN
cet-2662	49	18	photoelectron	photoelectron	NOUN
cet-2662	49	19	spectroscopy	spectroscopy	NOUN
cet-2662	49	20	.	.	PUNCT
cet-2662	50	1	our	our	PRON
cet-2662	50	2	prepared	prepared	ADJ
cet-2662	50	3	film	film	NOUN
cet-2662	50	4	had	have	VERB
cet-2662	50	5	a	a	DET
cet-2662	50	6	high	high	ADJ
cet-2662	50	7	resistivity	resistivity	NOUN
cet-2662	50	8	and	and	CCONJ
cet-2662	50	9	was	be	AUX
cet-2662	50	10	very	very	ADV
cet-2662	50	11	smooth	smooth	ADJ
cet-2662	50	12	,	,	PUNCT
cet-2662	50	13	such	such	ADJ
cet-2662	50	14	that	that	SCONJ
cet-2662	50	15	its	its	PRON
cet-2662	50	16	surface	surface	NOUN
cet-2662	50	17	morphology	morphology	NOUN
cet-2662	50	18	was	be	AUX
cet-2662	50	19	not	not	PART
cet-2662	50	20	observable	observable	ADJ
cet-2662	50	21	with	with	ADP
cet-2662	50	22	a	a	DET
cet-2662	50	23	conventional	conventional	ADJ
cet-2662	50	24	scanning	scanning	NOUN
cet-2662	50	25	electron	electron	NOUN
cet-2662	50	26	microscope	microscope	NOUN
cet-2662	50	27	.	.	PUNCT
cet-2662	51	1	we	we	PRON
cet-2662	51	2	had	have	VERB
cet-2662	51	3	to	to	PART
cet-2662	51	4	use	use	VERB
cet-2662	51	5	an	an	DET
cet-2662	51	6	atomic	atomic	ADJ
cet-2662	51	7	force	force	NOUN
cet-2662	51	8	microscope	microscope	NOUN
cet-2662	51	9	for	for	ADP
cet-2662	51	10	this	this	DET
cet-2662	51	11	characterization	characterization	NOUN
cet-2662	51	12	.	.	PUNCT
cet-2662	52	1	4.1	4.1	NUM
cet-2662	52	2	raman	raman	NOUN
cet-2662	52	3	spectroscopy	spectroscopy	NOUN
cet-2662	52	4	characterization	characterization	NOUN
cet-2662	52	5	when	when	SCONJ
cet-2662	52	6	the	the	DET
cet-2662	52	7	electron	electron	NOUN
cet-2662	52	8	cloud	cloud	NOUN
cet-2662	52	9	is	be	AUX
cet-2662	52	10	under	under	ADP
cet-2662	52	11	the	the	DET
cet-2662	52	12	action	action	NOUN
cet-2662	52	13	of	of	ADP
cet-2662	52	14	an	an	DET
cet-2662	52	15	electric	electric	ADJ
cet-2662	52	16	field	field	NOUN
cet-2662	52	17	,	,	PUNCT
cet-2662	52	18	if	if	SCONJ
cet-2662	52	19	the	the	DET
cet-2662	52	20	deformation	deformation	NOUN
cet-2662	52	21	in	in	ADP
cet-2662	52	22	the	the	DET
cet-2662	52	23	horizontal	horizontal	ADJ
cet-2662	52	24	direction	direction	NOUN
cet-2662	52	25	of	of	ADP
cet-2662	52	26	the	the	DET
cet-2662	52	27	bond	bond	NOUN
cet-2662	52	28	is	be	AUX
cet-2662	52	29	greater	great	ADJ
cet-2662	52	30	than	than	ADP
cet-2662	52	31	the	the	DET
cet-2662	52	32	deformation	deformation	NOUN
cet-2662	52	33	in	in	ADP
cet-2662	52	34	the	the	DET
cet-2662	52	35	vertical	vertical	ADJ
cet-2662	52	36	direction	direction	NOUN
cet-2662	52	37	,	,	PUNCT
cet-2662	52	38	the	the	DET
cet-2662	52	39	induced	induced	ADJ
cet-2662	52	40	dipole	dipole	NOUN
cet-2662	52	41	moment	moment	NOUN
cet-2662	52	42	changes	change	NOUN
cet-2662	52	43	,	,	PUNCT
cet-2662	52	44	and	and	CCONJ
cet-2662	52	45	raman	raman	NOUN
cet-2662	52	46	spectrum	spectrum	NOUN
cet-2662	52	47	activity	activity	NOUN
cet-2662	52	48	appears	appear	VERB
cet-2662	52	49	.	.	PUNCT
cet-2662	53	1	raman	raman	NOUN
cet-2662	53	2	scattering	scatter	VERB
cet-2662	53	3	bands	band	NOUN
cet-2662	53	4	that	that	PRON
cet-2662	53	5	are	be	AUX
cet-2662	53	6	directly	directly	ADV
cet-2662	53	7	related	relate	VERB
cet-2662	53	8	to	to	PART
cet-2662	53	9	sp3	sp3	VERB
cet-2662	53	10	can	can	AUX
cet-2662	53	11	not	not	PART
cet-2662	53	12	be	be	AUX
cet-2662	53	13	observed	observe	VERB
cet-2662	53	14	20	20	NUM
cet-2662	53	15	by	by	ADP
cet-2662	53	16	visible	visible	ADJ
cet-2662	53	17	raman	raman	NOUN
cet-2662	53	18	spectra	spectra	NOUN
cet-2662	53	19	excited	excite	VERB
cet-2662	53	20	by	by	ADP
cet-2662	53	21	633	633	NUM
cet-2662	53	22	nm	nm	NOUN
cet-2662	53	23	,	,	PUNCT
cet-2662	53	24	514.5	514.5	NUM
cet-2662	53	25	nm	nm	NOUN
cet-2662	53	26	,	,	PUNCT
cet-2662	53	27	or	or	CCONJ
cet-2662	53	28	458	458	NUM
cet-2662	53	29	nm	nm	ADJ
cet-2662	53	30	wavelength	wavelength	NOUN
cet-2662	53	31	light	light	NOUN
cet-2662	53	32	sources	source	NOUN
cet-2662	53	33	.	.	PUNCT
cet-2662	54	1	this	this	PRON
cet-2662	54	2	is	be	AUX
cet-2662	54	3	because	because	SCONJ
cet-2662	54	4	the	the	DET
cet-2662	54	5	carbon	carbon	NOUN
cet-2662	54	6	scattering	scatter	VERB
cet-2662	54	7	cross	cross	NOUN
cet-2662	54	8	-	-	NOUN
cet-2662	54	9	section	section	NOUN
cet-2662	54	10	of	of	ADP
cet-2662	54	11	the	the	DET
cet-2662	54	12	sp2	sp2	NOUN
cet-2662	54	13	structure	structure	NOUN
cet-2662	54	14	is	be	AUX
cet-2662	54	15	larger	large	ADJ
cet-2662	54	16	than	than	ADP
cet-2662	54	17	the	the	DET
cet-2662	54	18	carbon	carbon	NOUN
cet-2662	54	19	scattering	scatter	VERB
cet-2662	54	20	cross	cross	NOUN
cet-2662	54	21	-	-	NOUN
cet-2662	54	22	section	section	NOUN
cet-2662	54	23	of	of	ADP
cet-2662	54	24	the	the	DET
cet-2662	54	25	sp3	sp3	ADJ
cet-2662	54	26	structure	structure	NOUN
cet-2662	54	27	.	.	PUNCT
cet-2662	55	1	at	at	ADP
cet-2662	55	2	the	the	DET
cet-2662	55	3	same	same	ADJ
cet-2662	55	4	time	time	NOUN
cet-2662	55	5	,	,	PUNCT
cet-2662	55	6	the	the	DET
cet-2662	55	7	visible	visible	ADJ
cet-2662	55	8	light	light	ADJ
cet-2662	55	9	energy	energy	NOUN
cet-2662	55	10	is	be	AUX
cet-2662	55	11	insufficient	insufficient	ADJ
cet-2662	55	12	to	to	PART
cet-2662	55	13	stimulate	stimulate	VERB
cet-2662	55	14	the	the	DET
cet-2662	55	15	electrons	electron	NOUN
cet-2662	55	16	in	in	ADP
cet-2662	55	17	the	the	DET
cet-2662	55	18	σ	σ	PROPN
cet-2662	55	19	state	state	NOUN
cet-2662	55	20	of	of	ADP
cet-2662	55	21	the	the	DET
cet-2662	55	22	sp3	sp3	ADJ
cet-2662	55	23	hybrid	hybrid	ADJ
cet-2662	55	24	orbital	orbital	NOUN
cet-2662	55	25	,	,	PUNCT
cet-2662	55	26	so	so	SCONJ
cet-2662	55	27	that	that	SCONJ
cet-2662	55	28	visible	visible	ADJ
cet-2662	55	29	light	light	NOUN
cet-2662	55	30	of	of	ADP
cet-2662	55	31	the	the	DET
cet-2662	55	32	above	above	ADJ
cet-2662	55	33	three	three	NUM
cet-2662	55	34	wavelengths	wavelength	NOUN
cet-2662	55	35	can	can	AUX
cet-2662	55	36	only	only	ADV
cet-2662	55	37	characterize	characterize	VERB
cet-2662	55	38	the	the	DET
cet-2662	55	39	raman	raman	NOUN
cet-2662	55	40	scattering	scatter	VERB
cet-2662	55	41	effect	effect	NOUN
cet-2662	55	42	of	of	ADP
cet-2662	55	43	sp2	sp2	NOUN
cet-2662	55	44	carbon	carbon	NOUN
cet-2662	55	45	.	.	PUNCT
cet-2662	56	1	however	however	ADV
cet-2662	56	2	,	,	PUNCT
cet-2662	56	3	other	other	ADJ
cet-2662	56	4	research	research	NOUN
cet-2662	56	5	indicates	indicate	VERB
cet-2662	56	6	that	that	SCONJ
cet-2662	56	7	visible	visible	ADJ
cet-2662	56	8	raman	raman	NOUN
cet-2662	56	9	spectroscopy	spectroscopy	NOUN
cet-2662	56	10	is	be	AUX
cet-2662	56	11	feasible	feasible	ADJ
cet-2662	56	12	for	for	ADP
cet-2662	56	13	qualitative	qualitative	ADJ
cet-2662	56	14	characterization	characterization	NOUN
cet-2662	56	15	of	of	ADP
cet-2662	56	16	dlc	dlc	NOUN
cet-2662	56	17	films	film	NOUN
cet-2662	56	18	(	(	PUNCT
cet-2662	56	19	shi	shi	PROPN
cet-2662	56	20	and	and	CCONJ
cet-2662	56	21	sun	sun	NOUN
cet-2662	56	22	,	,	PUNCT
cet-2662	56	23	2001	2001	NUM
cet-2662	56	24	)	)	PUNCT
cet-2662	56	25	.	.	PUNCT
cet-2662	57	1	we	we	PRON
cet-2662	57	2	took	take	VERB
cet-2662	57	3	measurements	measurement	NOUN
cet-2662	57	4	at	at	ADP
cet-2662	57	5	room	room	NOUN
cet-2662	57	6	temperature	temperature	NOUN
cet-2662	57	7	using	use	VERB
cet-2662	57	8	a	a	DET
cet-2662	57	9	renishaw	renishaw	ADJ
cet-2662	57	10	2000	2000	NUM
cet-2662	57	11	confocal	confocal	ADJ
cet-2662	57	12	raman	raman	NOUN
cet-2662	57	13	spectrometer	spectrometer	NOUN
cet-2662	57	14	.	.	PUNCT
cet-2662	58	1	the	the	DET
cet-2662	58	2	laser	laser	NOUN
cet-2662	58	3	light	light	ADJ
cet-2662	58	4	source	source	NOUN
cet-2662	58	5	was	be	AUX
cet-2662	58	6	an	an	DET
cet-2662	58	7	argon	argon	NOUN
cet-2662	58	8	ion	ion	NOUN
cet-2662	58	9	laser	laser	NOUN
cet-2662	58	10	with	with	ADP
cet-2662	58	11	a	a	DET
cet-2662	58	12	wave	wave	NOUN
cet-2662	58	13	length	length	NOUN
cet-2662	58	14	of	of	ADP
cet-2662	58	15	514.5	514.5	NUM
cet-2662	58	16	nm	nm	NOUN
cet-2662	58	17	,	,	PUNCT
cet-2662	58	18	a	a	DET
cet-2662	58	19	laser	laser	NOUN
cet-2662	58	20	power	power	NOUN
cet-2662	58	21	of	of	ADP
cet-2662	58	22	10mw–200mw	10mw–200mw	PROPN
cet-2662	58	23	,	,	PUNCT
cet-2662	58	24	a	a	DET
cet-2662	58	25	wave	wave	NOUN
cet-2662	58	26	number	number	NOUN
cet-2662	58	27	resolution	resolution	NOUN
cet-2662	58	28	of	of	ADP
cet-2662	58	29	2	2	NUM
cet-2662	58	30	cm−1	cm−1	NOUN
cet-2662	58	31	,	,	PUNCT
cet-2662	58	32	and	and	CCONJ
cet-2662	58	33	a	a	DET
cet-2662	58	34	scanning	scanning	NOUN
cet-2662	58	35	range	range	NOUN
cet-2662	58	36	of	of	ADP
cet-2662	58	37	200cm−1	200cm−1	NUM
cet-2662	58	38	-	-	PUNCT
cet-2662	58	39	2000cm−1	2000cm−1	NUM
cet-2662	58	40	.	.	PUNCT
cet-2662	59	1	figure	figure	VERB
cet-2662	59	2	3	3	NUM
cet-2662	59	3	:	:	PUNCT
cet-2662	59	4	raman	raman	NOUN
cet-2662	59	5	spectrum	spectrum	NOUN
cet-2662	59	6	of	of	ADP
cet-2662	59	7	ms-03	ms-03	NOUN
cet-2662	59	8	specimen	speciman	NOUN
cet-2662	59	9	figure	figure	VERB
cet-2662	59	10	3	3	NUM
cet-2662	59	11	shows	show	VERB
cet-2662	59	12	the	the	DET
cet-2662	59	13	raman	raman	NOUN
cet-2662	59	14	spectrum	spectrum	NOUN
cet-2662	59	15	of	of	ADP
cet-2662	59	16	our	our	PRON
cet-2662	59	17	film	film	NOUN
cet-2662	59	18	.	.	PUNCT
cet-2662	60	1	it	it	PRON
cet-2662	60	2	is	be	AUX
cet-2662	60	3	characterized	characterize	VERB
cet-2662	60	4	by	by	ADP
cet-2662	60	5	the	the	DET
cet-2662	60	6	presence	presence	NOUN
cet-2662	60	7	of	of	ADP
cet-2662	60	8	a	a	DET
cet-2662	60	9	broad	broad	ADJ
cet-2662	60	10	scattering	scatter	VERB
cet-2662	60	11	peak	peak	NOUN
cet-2662	60	12	from	from	ADP
cet-2662	60	13	1100	1100	NUM
cet-2662	60	14	cm−1	cm−1	NOUN
cet-2662	60	15	to	to	ADP
cet-2662	60	16	1700	1700	NUM
cet-2662	60	17	cm−1	cm−1	NOUN
cet-2662	60	18	,	,	PUNCT
cet-2662	60	19	which	which	PRON
cet-2662	60	20	is	be	AUX
cet-2662	60	21	typical	typical	ADJ
cet-2662	60	22	of	of	ADP
cet-2662	60	23	these	these	DET
cet-2662	60	24	carbon	carbon	NOUN
cet-2662	60	25	films	film	NOUN
cet-2662	60	26	in	in	ADP
cet-2662	60	27	raman	raman	NOUN
cet-2662	60	28	spectroscopy	spectroscopy	NOUN
cet-2662	60	29	(	(	PUNCT
cet-2662	60	30	dilou	dilou	PROPN
cet-2662	60	31	et	et	PROPN
cet-2662	60	32	al	al	PROPN
cet-2662	60	33	.	.	PROPN
cet-2662	60	34	,	,	PUNCT
cet-2662	60	35	1984	1984	NUM
cet-2662	60	36	)	)	PUNCT
cet-2662	60	37	.	.	PUNCT
cet-2662	61	1	two	two	NUM
cet-2662	61	2	peaks	peak	NOUN
cet-2662	61	3	are	be	AUX
cet-2662	61	4	obtained	obtain	VERB
cet-2662	61	5	by	by	ADP
cet-2662	61	6	fitting	fit	VERB
cet-2662	61	7	the	the	DET
cet-2662	61	8	raman	raman	ADJ
cet-2662	61	9	spectral	spectral	ADJ
cet-2662	61	10	data	datum	NOUN
cet-2662	61	11	to	to	ADP
cet-2662	61	12	a	a	DET
cet-2662	61	13	peak	peak	NOUN
cet-2662	61	14	splitting	splitting	NOUN
cet-2662	61	15	process	process	NOUN
cet-2662	61	16	.	.	PUNCT
cet-2662	62	1	the	the	DET
cet-2662	62	2	low	low	ADJ
cet-2662	62	3	peak	peak	NOUN
cet-2662	62	4	wave	wave	NOUN
cet-2662	62	5	is	be	AUX
cet-2662	62	6	called	call	VERB
cet-2662	62	7	the	the	DET
cet-2662	62	8	d	d	PROPN
cet-2662	62	9	peak	peak	NOUN
cet-2662	62	10	,	,	PUNCT
cet-2662	62	11	and	and	CCONJ
cet-2662	62	12	the	the	DET
cet-2662	62	13	high	high	ADJ
cet-2662	62	14	wave	wave	NOUN
cet-2662	62	15	number	number	NOUN
cet-2662	62	16	is	be	AUX
cet-2662	62	17	called	call	VERB
cet-2662	62	18	the	the	DET
cet-2662	62	19	g	g	PROPN
cet-2662	62	20	peak	peak	NOUN
cet-2662	62	21	.	.	PUNCT
cet-2662	63	1	the	the	DET
cet-2662	63	2	d	d	PROPN
cet-2662	63	3	peak	peak	NOUN
cet-2662	63	4	is	be	AUX
cet-2662	63	5	a	a	DET
cet-2662	63	6	feature	feature	NOUN
cet-2662	63	7	shared	share	VERB
cet-2662	63	8	by	by	ADP
cet-2662	63	9	disordered	disordered	ADJ
cet-2662	63	10	carbons	carbon	NOUN
cet-2662	63	11	.	.	PUNCT
cet-2662	64	1	common	common	ADJ
cet-2662	64	2	belief	belief	NOUN
cet-2662	64	3	is	be	AUX
cet-2662	64	4	that	that	SCONJ
cet-2662	64	5	the	the	DET
cet-2662	64	6	disorder	disorder	NOUN
cet-2662	64	7	originates	originate	VERB
cet-2662	64	8	from	from	ADP
cet-2662	64	9	the	the	DET
cet-2662	64	10	disordered	disordered	ADJ
cet-2662	64	11	bond	bond	NOUN
cet-2662	64	12	angles	angle	NOUN
cet-2662	64	13	in	in	ADP
cet-2662	64	14	the	the	DET
cet-2662	64	15	microdomains	microdomain	NOUN
cet-2662	64	16	in	in	ADP
cet-2662	64	17	sp2	sp2	NOUN
cet-2662	64	18	type	type	NOUN
cet-2662	64	19	graphite	graphite	NOUN
cet-2662	64	20	caused	cause	VERB
cet-2662	64	21	by	by	ADP
cet-2662	64	22	sp3	sp3	ADV
cet-2662	64	23	-	-	PUNCT
cet-2662	64	24	bonded	bond	VERB
cet-2662	64	25	carbon	carbon	NOUN
cet-2662	64	26	atoms	atom	NOUN
cet-2662	64	27	or	or	CCONJ
cet-2662	64	28	,	,	PUNCT
cet-2662	64	29	alternatively	alternatively	ADV
cet-2662	64	30	,	,	PUNCT
cet-2662	64	31	that	that	SCONJ
cet-2662	64	32	it	it	PRON
cet-2662	64	33	originates	originate	VERB
cet-2662	64	34	due	due	ADJ
cet-2662	64	35	to	to	ADP
cet-2662	64	36	limited	limited	ADJ
cet-2662	64	37	graphite	graphite	NOUN
cet-2662	64	38	crystallites	crystallite	NOUN
cet-2662	64	39	,	,	PUNCT
cet-2662	64	40	whose	whose	DET
cet-2662	64	41	width	width	NOUN
cet-2662	64	42	is	be	AUX
cet-2662	64	43	related	relate	VERB
cet-2662	64	44	to	to	ADP
cet-2662	64	45	sp2	sp2	NOUN
cet-2662	64	46	cluster	cluster	NOUN
cet-2662	64	47	size	size	NOUN
cet-2662	64	48	.	.	PUNCT
cet-2662	65	1	the	the	DET
cet-2662	65	2	highly	highly	ADV
cet-2662	65	3	oriented	orient	VERB
cet-2662	65	4	crystalline	crystalline	NOUN
cet-2662	65	5	graphite	graphite	NOUN
cet-2662	65	6	consists	consist	VERB
cet-2662	65	7	of	of	ADP
cet-2662	65	8	sp2	sp2	NOUN
cet-2662	65	9	bonds	bond	NOUN
cet-2662	65	10	in	in	ADP
cet-2662	65	11	a	a	DET
cet-2662	65	12	planar	planar	ADJ
cet-2662	65	13	triangular	triangular	NOUN
cet-2662	65	14	structure	structure	NOUN
cet-2662	65	15	with	with	ADP
cet-2662	65	16	a	a	DET
cet-2662	65	17	first	first	ADJ
cet-2662	65	18	-	-	PUNCT
cet-2662	65	19	order	order	NOUN
cet-2662	65	20	raman	raman	NOUN
cet-2662	65	21	spectrum	spectrum	NOUN
cet-2662	65	22	showing	show	VERB
cet-2662	65	23	the	the	DET
cet-2662	65	24	single	single	ADJ
cet-2662	65	25	sharp	sharp	ADJ
cet-2662	65	26	peak	peak	NOUN
cet-2662	65	27	at	at	ADP
cet-2662	65	28	1580	1580	NUM
cet-2662	65	29	cm−1	cm−1	NOUN
cet-2662	65	30	.	.	PUNCT
cet-2662	66	1	the	the	DET
cet-2662	66	2	g	g	PROPN
cet-2662	66	3	peak	peak	NOUN
cet-2662	66	4	is	be	AUX
cet-2662	66	5	considered	consider	VERB
cet-2662	66	6	to	to	PART
cet-2662	66	7	be	be	AUX
cet-2662	66	8	the	the	DET
cet-2662	66	9	downward	downward	ADJ
cet-2662	66	10	shift	shift	NOUN
cet-2662	66	11	of	of	ADP
cet-2662	66	12	the	the	DET
cet-2662	66	13	peak	peak	NOUN
cet-2662	66	14	at	at	ADP
cet-2662	66	15	1580	1580	NUM
cet-2662	66	16	cm−1	cm−1	NOUN
cet-2662	66	17	,	,	PUNCT
cet-2662	66	18	corresponding	correspond	VERB
cet-2662	66	19	to	to	ADP
cet-2662	66	20	the	the	DET
cet-2662	66	21	stretching	stretch	VERB
cet-2662	66	22	vibration	vibration	NOUN
cet-2662	66	23	mode	mode	NOUN
cet-2662	66	24	of	of	ADP
cet-2662	66	25	c	c	PROPN
cet-2662	66	26	-	-	PUNCT
cet-2662	66	27	c	c	NOUN
cet-2662	66	28	bonds	bond	NOUN
cet-2662	66	29	(	(	PUNCT
cet-2662	66	30	carlo	carlo	NOUN
cet-2662	66	31	,	,	PUNCT
cet-2662	66	32	2003	2003	NUM
cet-2662	66	33	)	)	PUNCT
cet-2662	66	34	.	.	PUNCT
cet-2662	67	1	overall	overall	ADJ
cet-2662	67	2	,	,	PUNCT
cet-2662	67	3	raman	raman	NOUN
cet-2662	67	4	spectroscopy	spectroscopy	NOUN
cet-2662	67	5	qualitatively	qualitatively	ADV
cet-2662	67	6	shows	show	VERB
cet-2662	67	7	that	that	SCONJ
cet-2662	67	8	the	the	DET
cet-2662	67	9	film	film	NOUN
cet-2662	67	10	prepared	prepare	VERB
cet-2662	67	11	in	in	ADP
cet-2662	67	12	the	the	DET
cet-2662	67	13	test	test	NOUN
cet-2662	67	14	is	be	AUX
cet-2662	67	15	a	a	DET
cet-2662	67	16	diamond	diamond	NOUN
cet-2662	67	17	-	-	PUNCT
cet-2662	67	18	like	like	ADJ
cet-2662	67	19	carbon	carbon	NOUN
cet-2662	67	20	film	film	NOUN
cet-2662	67	21	.	.	PUNCT
cet-2662	68	1	we	we	PRON
cet-2662	68	2	calculated	calculate	VERB
cet-2662	68	3	the	the	DET
cet-2662	68	4	area	area	NOUN
cet-2662	68	5	integrals	integral	NOUN
cet-2662	68	6	of	of	ADP
cet-2662	68	7	the	the	DET
cet-2662	68	8	d	d	PROPN
cet-2662	68	9	and	and	CCONJ
cet-2662	68	10	g	g	PROPN
cet-2662	68	11	peaks	peak	NOUN
cet-2662	68	12	to	to	PART
cet-2662	68	13	obtain	obtain	VERB
cet-2662	68	14	the	the	DET
cet-2662	68	15	corresponding	correspond	VERB
cet-2662	68	16	peak	peak	NOUN
cet-2662	68	17	intensities	intensity	NOUN
cet-2662	68	18	,	,	PUNCT
cet-2662	68	19	i	i	PROPN
cet-2662	68	20	d	d	PROPN
cet-2662	68	21	and	and	CCONJ
cet-2662	68	22	ig	ig	PROPN
cet-2662	68	23	.	.	PROPN
cet-2662	68	24	shi	shi	PROPN
cet-2662	68	25	and	and	CCONJ
cet-2662	68	26	sun	sun	PROPN
cet-2662	68	27	(	(	PUNCT
cet-2662	68	28	2001	2001	NUM
cet-2662	68	29	)	)	PUNCT
cet-2662	68	30	believe	believe	VERB
cet-2662	68	31	that	that	SCONJ
cet-2662	68	32	the	the	DET
cet-2662	68	33	ratio	ratio	NOUN
cet-2662	68	34	of	of	ADP
cet-2662	68	35	the	the	DET
cet-2662	68	36	intensity	intensity	NOUN
cet-2662	68	37	of	of	ADP
cet-2662	68	38	the	the	DET
cet-2662	68	39	d	d	PROPN
cet-2662	68	40	and	and	CCONJ
cet-2662	68	41	g	g	PROPN
cet-2662	68	42	peaks	peak	NOUN
cet-2662	68	43	(	(	PUNCT
cet-2662	68	44	id	id	X
cet-2662	68	45	/	/	SYM
cet-2662	68	46	ig	ig	NOUN
cet-2662	68	47	)	)	PUNCT
cet-2662	68	48	is	be	AUX
cet-2662	68	49	proportional	proportional	ADJ
cet-2662	68	50	to	to	ADP
cet-2662	68	51	the	the	DET
cet-2662	68	52	ratio	ratio	NOUN
cet-2662	68	53	of	of	ADP
cet-2662	68	54	sp2	sp2	NOUN
cet-2662	68	55	and	and	CCONJ
cet-2662	68	56	sp3	sp3	ADJ
cet-2662	68	57	bonds	bond	NOUN
cet-2662	68	58	in	in	ADP
cet-2662	68	59	the	the	DET
cet-2662	68	60	film	film	NOUN
cet-2662	68	61	.	.	PUNCT
cet-2662	69	1	the	the	PRON
cet-2662	69	2	smaller	small	ADJ
cet-2662	69	3	the	the	DET
cet-2662	69	4	id	id	PROPN
cet-2662	69	5	/	/	SYM
cet-2662	69	6	ig	ig	PROPN
cet-2662	69	7	value	value	NOUN
cet-2662	69	8	is	be	AUX
cet-2662	69	9	,	,	PUNCT
cet-2662	69	10	the	the	PRON
cet-2662	69	11	lower	low	ADJ
cet-2662	69	12	the	the	DET
cet-2662	69	13	g	g	NOUN
cet-2662	69	14	-	-	PUNCT
cet-2662	69	15	wave	wave	NOUN
cet-2662	69	16	direction	direction	NOUN
cet-2662	69	17	is	be	AUX
cet-2662	69	18	toward	toward	ADP
cet-2662	69	19	the	the	DET
cet-2662	69	20	lower	low	ADJ
cet-2662	69	21	wave	wave	NOUN
cet-2662	69	22	number	number	NOUN
cet-2662	69	23	,	,	PUNCT
cet-2662	69	24	and	and	CCONJ
cet-2662	69	25	the	the	PRON
cet-2662	69	26	higher	high	ADJ
cet-2662	69	27	the	the	DET
cet-2662	69	28	sp3	sp3	ADJ
cet-2662	69	29	bond	bond	NOUN
cet-2662	69	30	content	content	NOUN
cet-2662	69	31	in	in	ADP
cet-2662	69	32	the	the	DET
cet-2662	69	33	film	film	NOUN
cet-2662	69	34	.	.	PUNCT
cet-2662	70	1	figure	figure	NOUN
cet-2662	70	2	4	4	NUM
cet-2662	70	3	shows	show	VERB
cet-2662	70	4	raman	raman	ADJ
cet-2662	70	5	spectra	spectra	NOUN
cet-2662	70	6	of	of	ADP
cet-2662	70	7	films	film	NOUN
cet-2662	70	8	prepared	prepare	VERB
cet-2662	70	9	under	under	ADP
cet-2662	70	10	different	different	ADJ
cet-2662	70	11	bias	bias	NOUN
cet-2662	70	12	voltages	voltage	NOUN
cet-2662	70	13	of	of	ADP
cet-2662	70	14	the	the	DET
cet-2662	70	15	substrate	substrate	NOUN
cet-2662	70	16	.	.	PUNCT
cet-2662	71	1	with	with	ADP
cet-2662	71	2	a	a	DET
cet-2662	71	3	bias	bias	NOUN
cet-2662	71	4	voltage	voltage	NOUN
cet-2662	71	5	of	of	ADP
cet-2662	71	6	50	50	NUM
cet-2662	71	7	v	v	NOUN
cet-2662	71	8	,	,	PUNCT
cet-2662	71	9	the	the	DET
cet-2662	71	10	id	id	PROPN
cet-2662	71	11	/	/	SYM
cet-2662	71	12	ig	ig	PROPN
cet-2662	71	13	value	value	NOUN
cet-2662	71	14	was	be	AUX
cet-2662	71	15	the	the	DET
cet-2662	71	16	smallest	small	ADJ
cet-2662	71	17	,	,	PUNCT
cet-2662	71	18	and	and	CCONJ
cet-2662	71	19	the	the	DET
cet-2662	71	20	g	g	PROPN
cet-2662	71	21	peak	peak	NOUN
cet-2662	71	22	was	be	AUX
cet-2662	71	23	at	at	ADP
cet-2662	71	24	the	the	DET
cet-2662	71	25	low	low	ADJ
cet-2662	71	26	wave	wave	NOUN
cet-2662	71	27	number	number	NOUN
cet-2662	71	28	,	,	PUNCT
cet-2662	71	29	indicating	indicate	VERB
cet-2662	71	30	that	that	SCONJ
cet-2662	71	31	the	the	DET
cet-2662	71	32	sp3	sp3	ADJ
cet-2662	71	33	bond	bond	NOUN
cet-2662	71	34	content	content	NOUN
cet-2662	71	35	was	be	AUX
cet-2662	71	36	maximum	maximum	ADJ
cet-2662	71	37	at	at	ADP
cet-2662	71	38	this	this	DET
cet-2662	71	39	time	time	NOUN
cet-2662	71	40	.	.	PUNCT
cet-2662	72	1	only	only	ADV
cet-2662	72	2	when	when	SCONJ
cet-2662	72	3	the	the	DET
cet-2662	72	4	auxiliary	auxiliary	ADJ
cet-2662	72	5	bombardment	bombardment	NOUN
cet-2662	72	6	energy	energy	NOUN
cet-2662	72	7	is	be	AUX
cet-2662	72	8	sufficient	sufficient	ADJ
cet-2662	72	9	to	to	PART
cet-2662	72	10	destroy	destroy	VERB
cet-2662	72	11	the	the	DET
cet-2662	72	12	sp2	sp2	NOUN
cet-2662	72	13	bond	bond	NOUN
cet-2662	72	14	with	with	ADP
cet-2662	72	15	its	its	PRON
cet-2662	72	16	lower	low	ADJ
cet-2662	72	17	binding	bind	VERB
cet-2662	72	18	energy	energy	NOUN
cet-2662	72	19	but	but	CCONJ
cet-2662	72	20	not	not	PART
cet-2662	72	21	enough	enough	ADJ
cet-2662	72	22	to	to	PART
cet-2662	72	23	destroy	destroy	VERB
cet-2662	72	24	the	the	DET
cet-2662	72	25	sp3	sp3	ADJ
cet-2662	72	26	bond	bond	NOUN
cet-2662	72	27	with	with	ADP
cet-2662	72	28	its	its	PRON
cet-2662	72	29	higher	high	ADJ
cet-2662	72	30	binding	bind	VERB
cet-2662	72	31	energy	energy	NOUN
cet-2662	72	32	can	can	AUX
cet-2662	72	33	the	the	DET
cet-2662	72	34	higher	high	ADJ
cet-2662	72	35	sp3	sp3	NOUN
cet-2662	72	36	bond	bond	NOUN
cet-2662	72	37	content	content	NOUN
cet-2662	72	38	be	be	AUX
cet-2662	72	39	obtained	obtain	VERB
cet-2662	72	40	.	.	PUNCT
cet-2662	73	1	in	in	ADP
cet-2662	73	2	addition	addition	NOUN
cet-2662	73	3	,	,	PUNCT
cet-2662	73	4	when	when	SCONJ
cet-2662	73	5	the	the	DET
cet-2662	73	6	assisted	assist	VERB
cet-2662	73	7	bombardment	bombardment	NOUN
cet-2662	73	8	energy	energy	NOUN
cet-2662	73	9	was	be	AUX
cet-2662	73	10	moderate	moderate	ADJ
cet-2662	73	11	,	,	PUNCT
cet-2662	73	12	the	the	DET
cet-2662	73	13	atomic	atomic	ADJ
cet-2662	73	14	mobility	mobility	NOUN
cet-2662	73	15	of	of	ADP
cet-2662	73	16	the	the	DET
cet-2662	73	17	film	film	NOUN
cet-2662	73	18	surface	surface	NOUN
cet-2662	73	19	was	be	AUX
cet-2662	73	20	enhanced	enhance	VERB
cet-2662	73	21	by	by	ADP
cet-2662	73	22	ion	ion	NOUN
cet-2662	73	23	bombardment	bombardment	NOUN
cet-2662	73	24	,	,	PUNCT
cet-2662	73	25	which	which	PRON
cet-2662	73	26	also	also	ADV
cet-2662	73	27	facilitated	facilitate	VERB
cet-2662	73	28	the	the	DET
cet-2662	73	29	formation	formation	NOUN
cet-2662	73	30	of	of	ADP
cet-2662	73	31	sp3	sp3	ADJ
cet-2662	73	32	bonds	bond	NOUN
cet-2662	73	33	.	.	PUNCT
cet-2662	74	1	however	however	ADV
cet-2662	74	2	,	,	PUNCT
cet-2662	74	3	when	when	SCONJ
cet-2662	74	4	the	the	DET
cet-2662	74	5	bias	bias	NOUN
cet-2662	74	6	voltage	voltage	NOUN
cet-2662	74	7	was	be	AUX
cet-2662	74	8	too	too	ADV
cet-2662	74	9	high	high	ADJ
cet-2662	74	10	,	,	PUNCT
cet-2662	74	11	the	the	DET
cet-2662	74	12	ion	ion	NOUN
cet-2662	74	13	energy	energy	NOUN
cet-2662	74	14	was	be	AUX
cet-2662	74	15	very	very	ADV
cet-2662	74	16	high	high	ADJ
cet-2662	74	17	.	.	PUNCT
cet-2662	75	1	after	after	ADP
cet-2662	75	2	entering	enter	VERB
cet-2662	75	3	the	the	DET
cet-2662	75	4	surface	surface	NOUN
cet-2662	75	5	layer	layer	NOUN
cet-2662	75	6	,	,	PUNCT
cet-2662	75	7	the	the	DET
cet-2662	75	8	ions	ion	NOUN
cet-2662	75	9	retained	retain	VERB
cet-2662	75	10	sufficient	sufficient	ADJ
cet-2662	75	11	energy	energy	NOUN
cet-2662	75	12	to	to	PART
cet-2662	75	13	diffuse	diffuse	VERB
cet-2662	75	14	back	back	ADV
cet-2662	75	15	to	to	ADP
cet-2662	75	16	the	the	DET
cet-2662	75	17	film	film	NOUN
cet-2662	75	18	surface	surface	NOUN
cet-2662	75	19	,	,	PUNCT
cet-2662	75	20	resulting	result	VERB
cet-2662	75	21	in	in	ADP
cet-2662	75	22	a	a	DET
cet-2662	75	23	decrease	decrease	NOUN
cet-2662	75	24	in	in	ADP
cet-2662	75	25	the	the	DET
cet-2662	75	26	nucleation	nucleation	NOUN
cet-2662	75	27	density	density	NOUN
cet-2662	75	28	.	.	PUNCT
cet-2662	76	1	when	when	SCONJ
cet-2662	76	2	the	the	DET
cet-2662	76	3	substrate	substrate	NOUN
cet-2662	76	4	bias	bias	NOUN
cet-2662	76	5	exceeded	exceed	VERB
cet-2662	76	6	200	200	NUM
cet-2662	76	7	v	v	NOUN
cet-2662	76	8	,	,	PUNCT
cet-2662	76	9	no	no	DET
cet-2662	76	10	film	film	NOUN
cet-2662	76	11	could	could	AUX
cet-2662	76	12	be	be	AUX
cet-2662	76	13	produced	produce	VERB
cet-2662	76	14	.	.	PUNCT
cet-2662	77	1	according	accord	VERB
cet-2662	77	2	to	to	ADP
cet-2662	77	3	the	the	DET
cet-2662	77	4	steady	steady	ADJ
cet-2662	77	5	state	state	NOUN
cet-2662	77	6	sheath	sheath	NOUN
cet-2662	77	7	theory	theory	NOUN
cet-2662	77	8	,	,	PUNCT
cet-2662	77	9	the	the	DET
cet-2662	77	10	bias	bias	NOUN
cet-2662	77	11	voltage	voltage	NOUN
cet-2662	77	12	applied	apply	VERB
cet-2662	77	13	to	to	ADP
cet-2662	77	14	the	the	DET
cet-2662	77	15	substrate	substrate	NOUN
cet-2662	77	16	mainly	mainly	ADV
cet-2662	77	17	fell	fall	VERB
cet-2662	77	18	on	on	ADP
cet-2662	77	19	the	the	DET
cet-2662	77	20	sheath	sheath	NOUN
cet-2662	77	21	.	.	PUNCT
cet-2662	78	1	therefore	therefore	ADV
cet-2662	78	2	,	,	PUNCT
cet-2662	78	3	when	when	SCONJ
cet-2662	78	4	the	the	DET
cet-2662	78	5	deposition	deposition	NOUN
cet-2662	78	6	bias	bias	NOUN
cet-2662	78	7	increased	increase	VERB
cet-2662	78	8	,	,	PUNCT
cet-2662	78	9	the	the	DET
cet-2662	78	10	ion	ion	NOUN
cet-2662	78	11	current	current	ADJ
cet-2662	78	12	density	density	NOUN
cet-2662	78	13	and	and	CCONJ
cet-2662	78	14	ion	ion	NOUN
cet-2662	78	15	energy	energy	NOUN
cet-2662	78	16	also	also	ADV
cet-2662	78	17	increased	increase	VERB
cet-2662	78	18	.	.	PUNCT
cet-2662	79	1	if	if	SCONJ
cet-2662	79	2	the	the	DET
cet-2662	79	3	energy	energy	NOUN
cet-2662	79	4	was	be	AUX
cet-2662	79	5	too	too	ADV
cet-2662	79	6	high	high	ADJ
cet-2662	79	7	,	,	PUNCT
cet-2662	79	8	re	re	VERB
cet-2662	79	9	-	-	NOUN
cet-2662	79	10	sputtering	sputtering	ADJ
cet-2662	79	11	of	of	ADP
cet-2662	79	12	the	the	DET
cet-2662	79	13	growth	growth	NOUN
cet-2662	79	14	film	film	NOUN
cet-2662	79	15	surface	surface	NOUN
cet-2662	79	16	would	would	AUX
cet-2662	79	17	occur	occur	VERB
cet-2662	79	18	,	,	PUNCT
cet-2662	79	19	which	which	PRON
cet-2662	79	20	was	be	AUX
cet-2662	79	21	not	not	PART
cet-2662	79	22	conducive	conducive	ADJ
cet-2662	79	23	to	to	ADP
cet-2662	79	24	the	the	DET
cet-2662	79	25	preparation	preparation	NOUN
cet-2662	79	26	of	of	ADP
cet-2662	79	27	the	the	DET
cet-2662	79	28	film.at	film.at	NUM
cet-2662	79	29	target	target	NOUN
cet-2662	79	30	-	-	PUNCT
cet-2662	79	31	base	base	NOUN
cet-2662	79	32	distances	distance	NOUN
cet-2662	79	33	of	of	ADP
cet-2662	79	34	100	100	NUM
cet-2662	79	35	mm	mm	NOUN
cet-2662	79	36	,	,	PUNCT
cet-2662	79	37	150	150	NUM
cet-2662	79	38	mm	mm	NOUN
cet-2662	79	39	,	,	PUNCT
cet-2662	79	40	and	and	CCONJ
cet-2662	79	41	200	200	NUM
cet-2662	79	42	mm	mm	NOUN
cet-2662	79	43	,	,	PUNCT
cet-2662	79	44	id	id	PROPN
cet-2662	79	45	/	/	SYM
cet-2662	79	46	ig	ig	PROPN
cet-2662	79	47	values	value	NOUN
cet-2662	79	48	were	be	AUX
cet-2662	79	49	2.5	2.5	NUM
cet-2662	79	50	,	,	PUNCT
cet-2662	79	51	2.3	2.3	NUM
cet-2662	79	52	,	,	PUNCT
cet-2662	79	53	and	and	CCONJ
cet-2662	79	54	2.6	2.6	NUM
cet-2662	79	55	,	,	PUNCT
cet-2662	79	56	respectively	respectively	ADV
cet-2662	79	57	.	.	PUNCT
cet-2662	80	1	a	a	DET
cet-2662	80	2	target	target	NOUN
cet-2662	80	3	-	-	PUNCT
cet-2662	80	4	base	base	NOUN
cet-2662	80	5	distance	distance	NOUN
cet-2662	80	6	of	of	ADP
cet-2662	80	7	150	150	NUM
cet-2662	80	8	mm	mm	NOUN
cet-2662	80	9	produced	produce	VERB
cet-2662	80	10	a	a	DET
cet-2662	80	11	higher	high	ADJ
cet-2662	80	12	sp3	sp3	NOUN
cet-2662	80	13	bond	bond	NOUN
cet-2662	80	14	content	content	NOUN
cet-2662	80	15	.	.	PUNCT
cet-2662	81	1	when	when	SCONJ
cet-2662	81	2	the	the	DET
cet-2662	81	3	target	target	NOUN
cet-2662	81	4	-	-	PUNCT
cet-2662	81	5	base	base	NOUN
cet-2662	81	6	distance	distance	NOUN
cet-2662	81	7	was	be	AUX
cet-2662	81	8	small	small	ADJ
cet-2662	81	9	,	,	PUNCT
cet-2662	81	10	the	the	DET
cet-2662	81	11	ion	ion	NOUN
cet-2662	81	12	energy	energy	NOUN
cet-2662	81	13	and	and	CCONJ
cet-2662	81	14	density	density	NOUN
cet-2662	81	15	were	be	AUX
cet-2662	81	16	high	high	ADJ
cet-2662	81	17	,	,	PUNCT
cet-2662	81	18	with	with	ADP
cet-2662	81	19	constant	constant	ADJ
cet-2662	81	20	bombardment	bombardment	NOUN
cet-2662	81	21	by	by	ADP
cet-2662	81	22	high	high	ADJ
cet-2662	81	23	-	-	PUNCT
cet-2662	81	24	energy	energy	NOUN
cet-2662	81	25	particles	particle	NOUN
cet-2662	81	26	,	,	PUNCT
cet-2662	81	27	which	which	PRON
cet-2662	81	28	promoted	promote	VERB
cet-2662	81	29	the	the	DET
cet-2662	81	30	transition	transition	NOUN
cet-2662	81	31	of	of	ADP
cet-2662	81	32	some	some	DET
cet-2662	81	33	metastable	metastable	ADJ
cet-2662	81	34	sp3	sp3	ADJ
cet-2662	81	35	bonds	bond	NOUN
cet-2662	81	36	to	to	ADP
cet-2662	81	37	sp2	sp2	NOUN
cet-2662	81	38	bonds	bond	NOUN
cet-2662	81	39	.	.	PUNCT
cet-2662	82	1	when	when	SCONJ
cet-2662	82	2	the	the	DET
cet-2662	82	3	target	target	NOUN
cet-2662	82	4	-	-	PUNCT
cet-2662	82	5	base	base	NOUN
cet-2662	82	6	distance	distance	NOUN
cet-2662	82	7	was	be	AUX
cet-2662	82	8	large	large	ADJ
cet-2662	82	9	,	,	PUNCT
cet-2662	82	10	the	the	DET
cet-2662	82	11	ion	ion	NOUN
cet-2662	82	12	energy	energy	NOUN
cet-2662	82	13	and	and	CCONJ
cet-2662	82	14	density	density	NOUN
cet-2662	82	15	were	be	AUX
cet-2662	82	16	low	low	ADJ
cet-2662	82	17	,	,	PUNCT
cet-2662	82	18	resulting	result	VERB
cet-2662	82	19	in	in	ADP
cet-2662	82	20	a	a	DET
cet-2662	82	21	decrease	decrease	NOUN
cet-2662	82	22	in	in	ADP
cet-2662	82	23	sp3	sp3	ADJ
cet-2662	82	24	bond	bond	NOUN
cet-2662	82	25	content	content	NOUN
cet-2662	82	26	.	.	PUNCT
cet-2662	83	1	when	when	SCONJ
cet-2662	83	2	the	the	DET
cet-2662	83	3	target	target	NOUN
cet-2662	83	4	-	-	PUNCT
cet-2662	83	5	base	base	NOUN
cet-2662	83	6	distance	distance	NOUN
cet-2662	83	7	was	be	AUX
cet-2662	83	8	50	50	NUM
cet-2662	83	9	mm	mm	NOUN
cet-2662	83	10	or	or	CCONJ
cet-2662	83	11	250	250	NUM
cet-2662	83	12	mm	mm	NOUN
cet-2662	83	13	,	,	PUNCT
cet-2662	83	14	the	the	DET
cet-2662	83	15	film	film	NOUN
cet-2662	83	16	could	could	AUX
cet-2662	83	17	not	not	PART
cet-2662	83	18	be	be	AUX
cet-2662	83	19	produced	produce	VERB
cet-2662	83	20	.	.	PUNCT
cet-2662	84	1	at	at	ADP
cet-2662	84	2	a	a	DET
cet-2662	84	3	target	target	NOUN
cet-2662	84	4	-	-	PUNCT
cet-2662	84	5	base	base	NOUN
cet-2662	84	6	distance	distance	NOUN
cet-2662	84	7	of	of	ADP
cet-2662	84	8	50	50	NUM
cet-2662	84	9	mm	mm	NOUN
cet-2662	84	10	,	,	PUNCT
cet-2662	84	11	the	the	DET
cet-2662	84	12	substrate	substrate	NOUN
cet-2662	84	13	entered	enter	VERB
cet-2662	84	14	the	the	DET
cet-2662	84	15	negative	negative	ADJ
cet-2662	84	16	glow	glow	NOUN
cet-2662	84	17	region	region	NOUN
cet-2662	84	18	.	.	PUNCT
cet-2662	85	1	the	the	DET
cet-2662	85	2	confinement	confinement	NOUN
cet-2662	85	3	of	of	ADP
cet-2662	85	4	the	the	DET
cet-2662	85	5	cross	cross	NOUN
cet-2662	85	6	field	field	NOUN
cet-2662	85	7	led	lead	VERB
cet-2662	85	8	to	to	ADP
cet-2662	85	9	the	the	DET
cet-2662	85	10	presence	presence	NOUN
cet-2662	85	11	of	of	ADP
cet-2662	85	12	a	a	DET
cet-2662	85	13	large	large	ADJ
cet-2662	85	14	number	number	NOUN
cet-2662	85	15	of	of	ADP
cet-2662	85	16	secondary	secondary	ADJ
cet-2662	85	17	electrons	electron	NOUN
cet-2662	85	18	and	and	CCONJ
cet-2662	85	19	ions	ion	NOUN
cet-2662	85	20	that	that	PRON
cet-2662	85	21	caused	cause	VERB
cet-2662	85	22	enough	enough	ADJ
cet-2662	85	23	21	21	NUM
cet-2662	85	24	interactions	interaction	NOUN
cet-2662	85	25	to	to	PART
cet-2662	85	26	prevent	prevent	VERB
cet-2662	85	27	film	film	NOUN
cet-2662	85	28	formation	formation	NOUN
cet-2662	85	29	.	.	PUNCT
cet-2662	86	1	when	when	SCONJ
cet-2662	86	2	the	the	DET
cet-2662	86	3	target	target	NOUN
cet-2662	86	4	-	-	PUNCT
cet-2662	86	5	base	base	NOUN
cet-2662	86	6	distance	distance	NOUN
cet-2662	86	7	was	be	AUX
cet-2662	86	8	too	too	ADV
cet-2662	86	9	large	large	ADJ
cet-2662	86	10	,	,	PUNCT
cet-2662	86	11	the	the	DET
cet-2662	86	12	ion	ion	NOUN
cet-2662	86	13	density	density	NOUN
cet-2662	86	14	and	and	CCONJ
cet-2662	86	15	energy	energy	NOUN
cet-2662	86	16	at	at	ADP
cet-2662	86	17	the	the	DET
cet-2662	86	18	surface	surface	NOUN
cet-2662	86	19	of	of	ADP
cet-2662	86	20	the	the	DET
cet-2662	86	21	substrate	substrate	NOUN
cet-2662	86	22	were	be	AUX
cet-2662	86	23	too	too	ADV
cet-2662	86	24	low	low	ADJ
cet-2662	86	25	to	to	PART
cet-2662	86	26	form	form	VERB
cet-2662	86	27	a	a	DET
cet-2662	86	28	film	film	NOUN
cet-2662	86	29	.	.	PUNCT
cet-2662	87	1	figure	figure	VERB
cet-2662	87	2	4	4	NUM
cet-2662	87	3	:	:	PUNCT
cet-2662	87	4	raman	raman	ADJ
cet-2662	87	5	spectra	spectra	NOUN
cet-2662	87	6	of	of	ADP
cet-2662	87	7	dlc	dlc	NOUN
cet-2662	87	8	films	film	NOUN
cet-2662	87	9	under	under	ADP
cet-2662	87	10	different	different	ADJ
cet-2662	87	11	bias	bias	NOUN
cet-2662	87	12	4.2	4.2	NUM
cet-2662	87	13	x	x	NOUN
cet-2662	87	14	-	-	NOUN
cet-2662	87	15	ray	ray	NOUN
cet-2662	87	16	photoelectron	photoelectron	NOUN
cet-2662	87	17	spectroscopy	spectroscopy	NOUN
cet-2662	87	18	(	(	PUNCT
cet-2662	87	19	xps	xps	PROPN
cet-2662	87	20	)	)	PUNCT
cet-2662	87	21	characterization	characterization	NOUN
cet-2662	87	22	the	the	DET
cet-2662	87	23	xps	xps	PROPN
cet-2662	87	24	peak	peak	PROPN
cet-2662	87	25	position	position	NOUN
cet-2662	87	26	(	(	PUNCT
cet-2662	87	27	electron	electron	NOUN
cet-2662	87	28	binding	bind	VERB
cet-2662	87	29	energy	energy	NOUN
cet-2662	87	30	)	)	PUNCT
cet-2662	87	31	gives	give	VERB
cet-2662	87	32	the	the	DET
cet-2662	87	33	chemical	chemical	ADJ
cet-2662	87	34	state	state	NOUN
cet-2662	87	35	information	information	NOUN
cet-2662	87	36	for	for	ADP
cet-2662	87	37	the	the	DET
cet-2662	87	38	atoms	atom	NOUN
cet-2662	87	39	in	in	ADP
cet-2662	87	40	the	the	DET
cet-2662	87	41	thin	thin	ADJ
cet-2662	87	42	film	film	NOUN
cet-2662	87	43	.	.	PUNCT
cet-2662	88	1	shifts	shift	NOUN
cet-2662	88	2	in	in	ADP
cet-2662	88	3	the	the	DET
cet-2662	88	4	peak	peak	NOUN
cet-2662	88	5	position	position	NOUN
cet-2662	88	6	reflect	reflect	VERB
cet-2662	88	7	the	the	DET
cet-2662	88	8	chemical	chemical	ADJ
cet-2662	88	9	shifts	shift	NOUN
cet-2662	88	10	of	of	ADP
cet-2662	88	11	the	the	DET
cet-2662	88	12	atoms	atom	NOUN
cet-2662	88	13	related	relate	VERB
cet-2662	88	14	to	to	ADP
cet-2662	88	15	the	the	DET
cet-2662	88	16	distribution	distribution	NOUN
cet-2662	88	17	of	of	ADP
cet-2662	88	18	atoms	atom	NOUN
cet-2662	88	19	in	in	ADP
cet-2662	88	20	the	the	DET
cet-2662	88	21	lattice	lattice	NOUN
cet-2662	88	22	therefore	therefore	ADV
cet-2662	88	23	,	,	PUNCT
cet-2662	88	24	xps	xps	PROPN
cet-2662	88	25	is	be	AUX
cet-2662	88	26	often	often	ADV
cet-2662	88	27	used	use	VERB
cet-2662	88	28	to	to	PART
cet-2662	88	29	quantitatively	quantitatively	ADV
cet-2662	88	30	analyze	analyze	VERB
cet-2662	88	31	sp3	sp3	PROPN
cet-2662	88	32	c	c	NOUN
cet-2662	88	33	content	content	NOUN
cet-2662	88	34	in	in	ADP
cet-2662	88	35	diamond	diamond	NOUN
cet-2662	88	36	-	-	PUNCT
cet-2662	88	37	like	like	ADJ
cet-2662	88	38	carbon	carbon	NOUN
cet-2662	88	39	films	film	NOUN
cet-2662	88	40	.	.	PUNCT
cet-2662	89	1	for	for	ADP
cet-2662	89	2	our	our	PRON
cet-2662	89	3	xps	xps	PROPN
cet-2662	89	4	analysis	analysis	NOUN
cet-2662	89	5	,	,	PUNCT
cet-2662	89	6	we	we	PRON
cet-2662	89	7	used	use	VERB
cet-2662	89	8	an	an	DET
cet-2662	89	9	aluminum	aluminum	NOUN
cet-2662	89	10	-	-	PUNCT
cet-2662	89	11	magnesium	magnesium	NOUN
cet-2662	89	12	dual	dual	ADJ
cet-2662	89	13	anode	anode	NOUN
cet-2662	89	14	target	target	NOUN
cet-2662	89	15	with	with	ADP
cet-2662	89	16	an	an	DET
cet-2662	89	17	energy	energy	NOUN
cet-2662	89	18	resolution	resolution	NOUN
cet-2662	89	19	of	of	ADP
cet-2662	89	20	0.8	0.8	NUM
cet-2662	89	21	ev	ev	VERB
cet-2662	89	22	,	,	PUNCT
cet-2662	89	23	a	a	DET
cet-2662	89	24	sensitivity	sensitivity	NOUN
cet-2662	89	25	of	of	ADP
cet-2662	89	26	80	80	NUM
cet-2662	89	27	kcps	kcp	NOUN
cet-2662	89	28	,	,	PUNCT
cet-2662	89	29	an	an	DET
cet-2662	89	30	angular	angular	ADJ
cet-2662	89	31	resolution	resolution	NOUN
cet-2662	89	32	of	of	ADP
cet-2662	89	33	45	45	NUM
cet-2662	89	34	°	°	NOUN
cet-2662	89	35	,	,	PUNCT
cet-2662	89	36	and	and	CCONJ
cet-2662	89	37	an	an	DET
cet-2662	89	38	analysis	analysis	NOUN
cet-2662	89	39	chamber	chamber	NOUN
cet-2662	89	40	vacuum	vacuum	NOUN
cet-2662	89	41	of	of	ADP
cet-2662	89	42	2.9×10−7	2.9×10−7	NUM
cet-2662	89	43	pa	pa	PROPN
cet-2662	89	44	.	.	PROPN
cet-2662	89	45	for	for	ADP
cet-2662	89	46	the	the	DET
cet-2662	89	47	sputtering	sputtering	NOUN
cet-2662	89	48	,	,	PUNCT
cet-2662	89	49	we	we	PRON
cet-2662	89	50	used	use	VERB
cet-2662	89	51	a	a	DET
cet-2662	89	52	scanning	scan	VERB
cet-2662	89	53	argon	argon	NOUN
cet-2662	89	54	gun	gun	NOUN
cet-2662	89	55	with	with	ADP
cet-2662	89	56	an	an	DET
cet-2662	89	57	area	area	NOUN
cet-2662	89	58	of	of	ADP
cet-2662	89	59	8×8	8×8	NUM
cet-2662	89	60	mm	mm	NOUN
cet-2662	89	61	,	,	PUNCT
cet-2662	89	62	a	a	DET
cet-2662	89	63	sputtering	sputtering	ADJ
cet-2662	89	64	rate	rate	NOUN
cet-2662	89	65	of	of	ADP
cet-2662	89	66	about	about	ADV
cet-2662	89	67	4	4	NUM
cet-2662	89	68	nm	nm	NOUN
cet-2662	89	69	/	/	SYM
cet-2662	89	70	min	min	NOUN
cet-2662	89	71	,	,	PUNCT
cet-2662	89	72	energy	energy	NOUN
cet-2662	89	73	of	of	ADP
cet-2662	89	74	3.0	3.0	NUM
cet-2662	89	75	kv	kv	NOUN
cet-2662	89	76	,	,	PUNCT
cet-2662	89	77	and	and	CCONJ
cet-2662	89	78	emission	emission	NOUN
cet-2662	89	79	current	current	NOUN
cet-2662	89	80	of	of	ADP
cet-2662	89	81	25	25	NUM
cet-2662	89	82	ma	ma	PROPN
cet-2662	89	83	.	.	PROPN
cet-2662	89	84	figure	figure	NOUN
cet-2662	89	85	5	5	NUM
cet-2662	89	86	:	:	PUNCT
cet-2662	89	87	xps	xps	PROPN
cet-2662	89	88	spectrum	spectrum	NOUN
cet-2662	89	89	of	of	ADP
cet-2662	89	90	the	the	DET
cet-2662	89	91	dlc	dlc	NOUN
cet-2662	89	92	film	film	NOUN
cet-2662	89	93	specimen	speciman	NOUN
cet-2662	89	94	figure	figure	VERB
cet-2662	89	95	6	6	NUM
cet-2662	89	96	:	:	PUNCT
cet-2662	89	97	c1s	c1s	NOUN
cet-2662	89	98	spectrum	spectrum	NOUN
cet-2662	89	99	of	of	ADP
cet-2662	89	100	the	the	DET
cet-2662	89	101	dlc	dlc	NOUN
cet-2662	89	102	film	film	NOUN
cet-2662	89	103	figure	figure	NOUN
cet-2662	89	104	5	5	NUM
cet-2662	89	105	shows	show	VERB
cet-2662	89	106	the	the	DET
cet-2662	89	107	xps	xps	PROPN
cet-2662	89	108	full	full	ADJ
cet-2662	89	109	spectrum	spectrum	NOUN
cet-2662	89	110	of	of	ADP
cet-2662	89	111	our	our	PRON
cet-2662	89	112	samples	sample	NOUN
cet-2662	89	113	.	.	PUNCT
cet-2662	90	1	the	the	DET
cet-2662	90	2	film	film	NOUN
cet-2662	90	3	was	be	AUX
cet-2662	90	4	mainly	mainly	ADV
cet-2662	90	5	composed	compose	VERB
cet-2662	90	6	of	of	ADP
cet-2662	90	7	carbon	carbon	NOUN
cet-2662	90	8	atoms	atom	NOUN
cet-2662	90	9	and	and	CCONJ
cet-2662	90	10	some	some	DET
cet-2662	90	11	oxygen	oxygen	NOUN
cet-2662	90	12	atoms	atom	NOUN
cet-2662	90	13	.	.	PUNCT
cet-2662	91	1	the	the	DET
cet-2662	91	2	occurrence	occurrence	NOUN
cet-2662	91	3	of	of	ADP
cet-2662	91	4	the	the	DET
cet-2662	91	5	o1s	o1s	PROPN
cet-2662	91	6	peak	peak	NOUN
cet-2662	91	7	was	be	AUX
cet-2662	91	8	likely	likely	ADJ
cet-2662	91	9	due	due	ADP
cet-2662	91	10	to	to	ADP
cet-2662	91	11	the	the	DET
cet-2662	91	12	physical	physical	ADJ
cet-2662	91	13	adsorption	adsorption	NOUN
cet-2662	91	14	of	of	ADP
cet-2662	91	15	oxygen	oxygen	NOUN
cet-2662	91	16	on	on	ADP
cet-2662	91	17	the	the	DET
cet-2662	91	18	surface	surface	NOUN
cet-2662	91	19	of	of	ADP
cet-2662	91	20	the	the	DET
cet-2662	91	21	sample	sample	NOUN
cet-2662	91	22	.	.	PUNCT
cet-2662	92	1	there	there	PRON
cet-2662	92	2	were	be	VERB
cet-2662	92	3	other	other	ADJ
cet-2662	92	4	elements	element	NOUN
cet-2662	92	5	found	find	VERB
cet-2662	92	6	in	in	ADP
cet-2662	92	7	the	the	DET
cet-2662	92	8	xps	xps	PROPN
cet-2662	92	9	analysis	analysis	NOUN
cet-2662	92	10	films	film	NOUN
cet-2662	92	11	,	,	PUNCT
cet-2662	92	12	mainly	mainly	ADV
cet-2662	92	13	due	due	ADP
cet-2662	92	14	to	to	ADP
cet-2662	92	15	argon	argon	NOUN
cet-2662	92	16	ions	ion	NOUN
cet-2662	92	17	sputtering	sputter	VERB
cet-2662	92	18	the	the	DET
cet-2662	92	19	base	base	NOUN
cet-2662	92	20	of	of	ADP
cet-2662	92	21	the	the	DET
cet-2662	92	22	magnetic	magnetic	PROPN
cet-2662	92	23	-	-	PUNCT
cet-2662	92	24	controlled	control	VERB
cet-2662	92	25	target	target	NOUN
cet-2662	92	26	.	.	PUNCT
cet-2662	93	1	because	because	SCONJ
cet-2662	93	2	of	of	ADP
cet-2662	93	3	the	the	DET
cet-2662	93	4	shape	shape	NOUN
cet-2662	93	5	of	of	ADP
cet-2662	93	6	the	the	DET
cet-2662	93	7	peak	peak	NOUN
cet-2662	93	8	of	of	ADP
cet-2662	93	9	our	our	PRON
cet-2662	93	10	samples	sample	NOUN
cet-2662	93	11	,	,	PUNCT
cet-2662	93	12	we	we	PRON
cet-2662	93	13	used	use	VERB
cet-2662	93	14	the	the	DET
cet-2662	93	15	gaussian	gaussian	ADJ
cet-2662	93	16	curve	curve	NOUN
cet-2662	93	17	equation	equation	NOUN
cet-2662	93	18	to	to	PART
cet-2662	93	19	conduct	conduct	VERB
cet-2662	93	20	the	the	DET
cet-2662	93	21	spectrum	spectrum	NOUN
cet-2662	93	22	analysis	analysis	NOUN
cet-2662	93	23	.	.	PUNCT
cet-2662	94	1	figure	figure	NOUN
cet-2662	94	2	6	6	NUM
cet-2662	94	3	shows	show	VERB
cet-2662	94	4	the	the	DET
cet-2662	94	5	c1s	c1s	PROPN
cet-2662	94	6	electron	electron	NOUN
cet-2662	94	7	binding	bind	VERB
cet-2662	94	8	energy	energy	NOUN
cet-2662	94	9	spectrum	spectrum	NOUN
cet-2662	94	10	of	of	ADP
cet-2662	94	11	the	the	DET
cet-2662	94	12	film	film	NOUN
cet-2662	94	13	sample	sample	NOUN
cet-2662	94	14	.	.	PUNCT
cet-2662	95	1	the	the	DET
cet-2662	95	2	c1s	c1s	PROPN
cet-2662	95	3	spectrum	spectrum	NOUN
cet-2662	95	4	of	of	ADP
cet-2662	95	5	the	the	DET
cet-2662	95	6	thin	thin	ADJ
cet-2662	95	7	film	film	NOUN
cet-2662	95	8	is	be	AUX
cet-2662	95	9	divided	divide	VERB
cet-2662	95	10	into	into	ADP
cet-2662	95	11	three	three	NUM
cet-2662	95	12	peaks	peak	NOUN
cet-2662	95	13	.	.	PUNCT
cet-2662	96	1	one	one	NUM
cet-2662	96	2	occurs	occur	VERB
cet-2662	96	3	where	where	SCONJ
cet-2662	96	4	the	the	DET
cet-2662	96	5	binding	bind	VERB
cet-2662	96	6	energy	energy	NOUN
cet-2662	96	7	is	be	AUX
cet-2662	96	8	about	about	ADV
cet-2662	96	9	284.7ev	284.7ev	NUM
cet-2662	96	10	,	,	PUNCT
cet-2662	96	11	which	which	PRON
cet-2662	96	12	corresponds	correspond	VERB
cet-2662	96	13	to	to	ADP
cet-2662	96	14	the	the	DET
cet-2662	96	15	binding	bind	VERB
cet-2662	96	16	energy	energy	NOUN
cet-2662	96	17	of	of	ADP
cet-2662	96	18	sp2c	sp2c	PROPN
cet-2662	96	19	.	.	PUNCT
cet-2662	97	1	another	another	PRON
cet-2662	97	2	occurs	occur	VERB
cet-2662	97	3	where	where	SCONJ
cet-2662	97	4	the	the	DET
cet-2662	97	5	binding	bind	VERB
cet-2662	97	6	energy	energy	NOUN
cet-2662	97	7	is	be	AUX
cet-2662	97	8	about	about	ADV
cet-2662	97	9	285.8ev	285.8ev	NUM
cet-2662	97	10	,	,	PUNCT
cet-2662	97	11	which	which	PRON
cet-2662	97	12	corresponds	correspond	VERB
cet-2662	97	13	to	to	ADP
cet-2662	97	14	the	the	DET
cet-2662	97	15	sp3c	sp3c	PROPN
cet-2662	97	16	binding	bind	VERB
cet-2662	97	17	energy	energy	NOUN
cet-2662	97	18	.	.	PUNCT
cet-2662	98	1	one	one	NUM
cet-2662	98	2	other	other	ADJ
cet-2662	98	3	occurs	occur	VERB
cet-2662	98	4	where	where	SCONJ
cet-2662	98	5	the	the	DET
cet-2662	98	6	binding	bind	VERB
cet-2662	98	7	energy	energy	NOUN
cet-2662	98	8	is	be	AUX
cet-2662	98	9	around	around	ADP
cet-2662	98	10	288.6ev	288.6ev	NUM
cet-2662	98	11	,	,	PUNCT
cet-2662	98	12	which	which	PRON
cet-2662	98	13	is	be	AUX
cet-2662	98	14	the	the	DET
cet-2662	98	15	binding	bind	VERB
cet-2662	98	16	energy	energy	NOUN
cet-2662	98	17	of	of	ADP
cet-2662	98	18	c	c	NOUN
cet-2662	98	19	-	-	PUNCT
cet-2662	98	20	o	o	NOUN
cet-2662	98	21	bond	bond	NOUN
cet-2662	98	22	or	or	CCONJ
cet-2662	98	23	c	c	NOUN
cet-2662	98	24	=	=	NOUN
cet-2662	98	25	o	o	NOUN
cet-2662	98	26	bond	bond	NOUN
cet-2662	98	27	in	in	ADP
cet-2662	98	28	the	the	DET
cet-2662	98	29	film	film	NOUN
cet-2662	98	30	.	.	PUNCT
cet-2662	99	1	we	we	PRON
cet-2662	99	2	integrated	integrate	VERB
cet-2662	99	3	the	the	DET
cet-2662	99	4	three	three	NUM
cet-2662	99	5	peaks	peak	NOUN
cet-2662	99	6	to	to	PART
cet-2662	99	7	calculate	calculate	VERB
cet-2662	99	8	the	the	DET
cet-2662	99	9	area	area	NOUN
cet-2662	99	10	occupied	occupy	VERB
cet-2662	99	11	by	by	ADP
cet-2662	99	12	each	each	DET
cet-2662	99	13	peak	peak	NOUN
cet-2662	99	14	.	.	PUNCT
cet-2662	100	1	the	the	DET
cet-2662	100	2	ratio	ratio	NOUN
cet-2662	100	3	of	of	ADP
cet-2662	100	4	the	the	DET
cet-2662	100	5	area	area	NOUN
cet-2662	100	6	can	can	AUX
cet-2662	100	7	be	be	AUX
cet-2662	100	8	used	use	VERB
cet-2662	100	9	to	to	PART
cet-2662	100	10	evaluate	evaluate	VERB
cet-2662	100	11	the	the	DET
cet-2662	100	12	c	c	PROPN
cet-2662	100	13	ratio	ratio	NOUN
cet-2662	100	14	of	of	ADP
cet-2662	100	15	different	different	ADJ
cet-2662	100	16	chemical	chemical	NOUN
cet-2662	100	17	binding	bind	VERB
cet-2662	100	18	states	state	NOUN
cet-2662	100	19	in	in	ADP
cet-2662	100	20	the	the	DET
cet-2662	100	21	film	film	NOUN
cet-2662	100	22	(	(	PUNCT
cet-2662	100	23	johnston	johnston	PROPN
cet-2662	100	24	et	et	PROPN
cet-2662	100	25	al	al	PROPN
cet-2662	100	26	.	.	PROPN
cet-2662	100	27	,	,	PUNCT
cet-2662	100	28	1994	1994	NUM
cet-2662	100	29	)	)	PUNCT
cet-2662	100	30	.	.	PUNCT
cet-2662	101	1	the	the	DET
cet-2662	101	2	content	content	NOUN
cet-2662	101	3	of	of	ADP
cet-2662	101	4	sp3c	sp3c	PROPN
cet-2662	101	5	in	in	ADP
cet-2662	101	6	the	the	DET
cet-2662	101	7	dlc	dlc	NOUN
cet-2662	101	8	film	film	NOUN
cet-2662	101	9	was	be	AUX
cet-2662	101	10	32.3	32.3	NUM
cet-2662	101	11	%	%	NOUN
cet-2662	101	12	according	accord	VERB
cet-2662	101	13	to	to	ADP
cet-2662	101	14	ms-03	ms-03	NUM
cet-2662	101	15	.	.	PUNCT
cet-2662	102	1	4.3	4.3	NUM
cet-2662	102	2	surface	surface	NOUN
cet-2662	102	3	morphology	morphology	NOUN
cet-2662	102	4	of	of	ADP
cet-2662	102	5	dlc	dlc	NOUN
cet-2662	102	6	film	film	NOUN
cet-2662	102	7	we	we	PRON
cet-2662	102	8	used	use	VERB
cet-2662	102	9	a	a	DET
cet-2662	102	10	nanoscope	nanoscope	NOUN
cet-2662	102	11	iiia	iiia	VERB
cet-2662	102	12	,	,	PUNCT
cet-2662	102	13	with	with	ADP
cet-2662	102	14	a	a	DET
cet-2662	102	15	selective	selective	ADJ
cet-2662	102	16	scanning	scanning	NOUN
cet-2662	102	17	range	range	NOUN
cet-2662	102	18	of	of	ADP
cet-2662	102	19	1×1	1×1	NUM
cet-2662	102	20	μm2	μm2	NOUN
cet-2662	102	21	,	,	PUNCT
cet-2662	102	22	for	for	ADP
cet-2662	102	23	the	the	DET
cet-2662	102	24	surface	surface	NOUN
cet-2662	102	25	characterization	characterization	NOUN
cet-2662	102	26	of	of	ADP
cet-2662	102	27	our	our	PRON
cet-2662	102	28	films	film	NOUN
cet-2662	102	29	.	.	PUNCT
cet-2662	103	1	figure	figure	VERB
cet-2662	103	2	7	7	NUM
cet-2662	103	3	shows	show	VERB
cet-2662	103	4	the	the	DET
cet-2662	103	5	surface	surface	NOUN
cet-2662	103	6	morphology	morphology	NOUN
cet-2662	103	7	of	of	ADP
cet-2662	103	8	the	the	DET
cet-2662	103	9	films	film	NOUN
cet-2662	103	10	prepared	prepare	VERB
cet-2662	103	11	with	with	ADP
cet-2662	103	12	different	different	ADJ
cet-2662	103	13	substrate	substrate	NOUN
cet-2662	103	14	biases	bias	NOUN
cet-2662	103	15	.	.	PUNCT
cet-2662	104	1	as	as	SCONJ
cet-2662	104	2	the	the	DET
cet-2662	104	3	bias	bias	NOUN
cet-2662	104	4	voltage	voltage	NOUN
cet-2662	104	5	increased	increase	VERB
cet-2662	104	6	,	,	PUNCT
cet-2662	104	7	the	the	DET
cet-2662	104	8	dlc	dlc	NOUN
cet-2662	104	9	film	film	NOUN
cet-2662	104	10	gradually	gradually	ADV
cet-2662	104	11	became	become	VERB
cet-2662	104	12	smooth	smooth	ADJ
cet-2662	104	13	.	.	PUNCT
cet-2662	105	1	when	when	SCONJ
cet-2662	105	2	the	the	DET
cet-2662	105	3	deposition	deposition	NOUN
cet-2662	105	4	bias	bias	NOUN
cet-2662	105	5	was	be	AUX
cet-2662	105	6	20	20	NUM
cet-2662	105	7	v	v	NOUN
cet-2662	105	8	,	,	PUNCT
cet-2662	105	9	the	the	DET
cet-2662	105	10	root	root	NOUN
cet-2662	105	11	mean	mean	NOUN
cet-2662	105	12	square	square	PROPN
cet-2662	105	13	(	(	PUNCT
cet-2662	105	14	rms	rm	NOUN
cet-2662	105	15	)	)	PUNCT
cet-2662	105	16	surface	surface	NOUN
cet-2662	105	17	roughness	roughness	NOUN
cet-2662	105	18	of	of	ADP
cet-2662	105	19	the	the	DET
cet-2662	105	20	film	film	NOUN
cet-2662	105	21	was	be	AUX
cet-2662	105	22	1.072	1.072	NUM
cet-2662	105	23	nm	nm	NOUN
cet-2662	105	24	.	.	PUNCT
cet-2662	106	1	increasing	increase	VERB
cet-2662	106	2	the	the	DET
cet-2662	106	3	deposition	deposition	NOUN
cet-2662	106	4	bias	bias	NOUN
cet-2662	106	5	to	to	ADP
cet-2662	106	6	100	100	NUM
cet-2662	106	7	v	v	NUM
cet-2662	106	8	produced	produce	VERB
cet-2662	106	9	22	22	NUM
cet-2662	106	10	a	a	DET
cet-2662	106	11	roughness	roughness	NOUN
cet-2662	106	12	of	of	ADP
cet-2662	106	13	0.662	0.662	NUM
cet-2662	106	14	nm	nm	NOUN
cet-2662	106	15	.	.	PUNCT
cet-2662	107	1	these	these	DET
cet-2662	107	2	results	result	NOUN
cet-2662	107	3	show	show	VERB
cet-2662	107	4	that	that	SCONJ
cet-2662	107	5	in	in	ADP
cet-2662	107	6	our	our	PRON
cet-2662	107	7	deposition	deposition	NOUN
cet-2662	107	8	process	process	NOUN
cet-2662	107	9	,	,	PUNCT
cet-2662	107	10	the	the	DET
cet-2662	107	11	plasma	plasma	NOUN
cet-2662	107	12	density	density	NOUN
cet-2662	107	13	near	near	ADP
cet-2662	107	14	the	the	DET
cet-2662	107	15	surface	surface	NOUN
cet-2662	107	16	of	of	ADP
cet-2662	107	17	the	the	DET
cet-2662	107	18	film	film	NOUN
cet-2662	107	19	growth	growth	NOUN
cet-2662	107	20	is	be	AUX
cet-2662	107	21	high	high	ADJ
cet-2662	107	22	causing	cause	VERB
cet-2662	107	23	the	the	DET
cet-2662	107	24	ions	ion	NOUN
cet-2662	107	25	to	to	PART
cet-2662	107	26	bombard	bombard	VERB
cet-2662	107	27	the	the	DET
cet-2662	107	28	film	film	NOUN
cet-2662	107	29	surface	surface	NOUN
cet-2662	107	30	under	under	ADP
cet-2662	107	31	the	the	DET
cet-2662	107	32	sheath	sheath	NOUN
cet-2662	107	33	voltage	voltage	NOUN
cet-2662	107	34	drop	drop	NOUN
cet-2662	107	35	effect	effect	NOUN
cet-2662	107	36	.	.	PUNCT
cet-2662	108	1	this	this	DET
cet-2662	108	2	bombardment	bombardment	NOUN
cet-2662	108	3	effect	effect	NOUN
cet-2662	108	4	improves	improve	VERB
cet-2662	108	5	the	the	DET
cet-2662	108	6	microstructure	microstructure	NOUN
cet-2662	108	7	of	of	ADP
cet-2662	108	8	the	the	DET
cet-2662	108	9	film	film	NOUN
cet-2662	108	10	,	,	PUNCT
cet-2662	108	11	producing	produce	VERB
cet-2662	108	12	denser	dense	ADJ
cet-2662	108	13	,	,	PUNCT
cet-2662	108	14	smoother	smooth	ADJ
cet-2662	108	15	film	film	NOUN
cet-2662	108	16	.	.	PUNCT
cet-2662	109	1	we	we	PRON
cet-2662	109	2	measured	measure	VERB
cet-2662	109	3	the	the	DET
cet-2662	109	4	thickness	thickness	NOUN
cet-2662	109	5	of	of	ADP
cet-2662	109	6	our	our	PRON
cet-2662	109	7	film	film	NOUN
cet-2662	109	8	to	to	PART
cet-2662	109	9	be	be	AUX
cet-2662	109	10	approximately	approximately	ADV
cet-2662	109	11	400	400	NUM
cet-2662	109	12	nm	nm	NOUN
cet-2662	109	13	.	.	PUNCT
cet-2662	110	1	figure	figure	NOUN
cet-2662	110	2	7	7	NUM
cet-2662	110	3	:	:	PUNCT
cet-2662	110	4	surface	surface	NOUN
cet-2662	110	5	morphology	morphology	NOUN
cet-2662	110	6	of	of	ADP
cet-2662	110	7	dlc	dlc	NOUN
cet-2662	110	8	films	film	NOUN
cet-2662	110	9	under	under	ADP
cet-2662	110	10	different	different	ADJ
cet-2662	110	11	bias	bias	NOUN
cet-2662	110	12	4.4	4.4	NUM
cet-2662	110	13	formation	formation	NOUN
cet-2662	110	14	mechanism	mechanism	NOUN
cet-2662	110	15	of	of	ADP
cet-2662	110	16	dlc	dlc	NOUN
cet-2662	110	17	film	film	NOUN
cet-2662	110	18	for	for	ADP
cet-2662	110	19	the	the	DET
cet-2662	110	20	mechanism	mechanism	NOUN
cet-2662	110	21	of	of	ADP
cet-2662	110	22	dlc	dlc	NOUN
cet-2662	110	23	film	film	NOUN
cet-2662	110	24	formation	formation	NOUN
cet-2662	110	25	using	use	VERB
cet-2662	110	26	pvd	pvd	PROPN
cet-2662	110	27	,	,	PUNCT
cet-2662	110	28	robertson	robertson	PROPN
cet-2662	110	29	j.	j.	PROPN
cet-2662	110	30	(	(	PUNCT
cet-2662	110	31	robertson	robertson	PROPN
cet-2662	110	32	,	,	PUNCT
cet-2662	110	33	2002	2002	NUM
cet-2662	110	34	)	)	PUNCT
cet-2662	110	35	proposed	propose	VERB
cet-2662	110	36	the	the	DET
cet-2662	110	37	subplantation	subplantation	NOUN
cet-2662	110	38	model	model	NOUN
cet-2662	110	39	.	.	PUNCT
cet-2662	111	1	figure	figure	NOUN
cet-2662	111	2	8	8	NUM
cet-2662	111	3	shows	show	VERB
cet-2662	111	4	that	that	SCONJ
cet-2662	111	5	when	when	SCONJ
cet-2662	111	6	c+	c+	VERB
cet-2662	111	7	ions	ion	VERB
cet-2662	111	8	with	with	ADP
cet-2662	111	9	a	a	DET
cet-2662	111	10	certain	certain	ADJ
cet-2662	111	11	amount	amount	NOUN
cet-2662	111	12	of	of	ADP
cet-2662	111	13	energy	energy	NOUN
cet-2662	111	14	are	be	AUX
cet-2662	111	15	incident	incident	NOUN
cet-2662	111	16	on	on	ADP
cet-2662	111	17	the	the	DET
cet-2662	111	18	surface	surface	NOUN
cet-2662	111	19	,	,	PUNCT
cet-2662	111	20	they	they	PRON
cet-2662	111	21	penetrate	penetrate	VERB
cet-2662	111	22	several	several	ADJ
cet-2662	111	23	atomic	atomic	ADJ
cet-2662	111	24	layers	layer	NOUN
cet-2662	111	25	and	and	CCONJ
cet-2662	111	26	enter	enter	VERB
cet-2662	111	27	the	the	DET
cet-2662	111	28	subsurface	subsurface	NOUN
cet-2662	111	29	,	,	PUNCT
cet-2662	111	30	increasing	increase	VERB
cet-2662	111	31	the	the	DET
cet-2662	111	32	density	density	NOUN
cet-2662	111	33	and	and	CCONJ
cet-2662	111	34	stress	stress	NOUN
cet-2662	111	35	around	around	ADP
cet-2662	111	36	their	their	PRON
cet-2662	111	37	location	location	NOUN
cet-2662	111	38	and	and	CCONJ
cet-2662	111	39	further	far	ADV
cet-2662	111	40	resulting	result	VERB
cet-2662	111	41	in	in	ADP
cet-2662	111	42	the	the	DET
cet-2662	111	43	transition	transition	NOUN
cet-2662	111	44	of	of	ADP
cet-2662	111	45	stable	stable	ADJ
cet-2662	111	46	sp2	sp2	NOUN
cet-2662	111	47	bonds	bond	NOUN
cet-2662	111	48	to	to	ADP
cet-2662	111	49	metastable	metastable	ADJ
cet-2662	111	50	sp3	sp3	ADJ
cet-2662	111	51	bonds	bond	NOUN
cet-2662	111	52	at	at	ADP
cet-2662	111	53	room	room	NOUN
cet-2662	111	54	temperature	temperature	NOUN
cet-2662	111	55	and	and	CCONJ
cet-2662	111	56	pressure	pressure	NOUN
cet-2662	111	57	.	.	PUNCT
cet-2662	112	1	low	low	ADJ
cet-2662	112	2	energy	energy	NOUN
cet-2662	112	3	ions	ion	NOUN
cet-2662	112	4	can	can	AUX
cet-2662	112	5	not	not	PART
cet-2662	112	6	penetrate	penetrate	VERB
cet-2662	112	7	and	and	CCONJ
cet-2662	112	8	remain	remain	VERB
cet-2662	112	9	on	on	ADP
cet-2662	112	10	the	the	DET
cet-2662	112	11	surface	surface	NOUN
cet-2662	112	12	of	of	ADP
cet-2662	112	13	the	the	DET
cet-2662	112	14	material	material	NOUN
cet-2662	112	15	to	to	PART
cet-2662	112	16	form	form	VERB
cet-2662	112	17	a	a	DET
cet-2662	112	18	stable	stable	ADJ
cet-2662	112	19	sp2	sp2	NOUN
cet-2662	112	20	structure	structure	NOUN
cet-2662	112	21	.	.	PUNCT
cet-2662	113	1	a	a	DET
cet-2662	113	2	variety	variety	NOUN
cet-2662	113	3	of	of	ADP
cet-2662	113	4	data	datum	NOUN
cet-2662	113	5	and	and	CCONJ
cet-2662	113	6	simulation	simulation	NOUN
cet-2662	113	7	analyses	analysis	NOUN
cet-2662	113	8	have	have	AUX
cet-2662	113	9	confirmed	confirm	VERB
cet-2662	113	10	the	the	DET
cet-2662	113	11	basic	basic	ADJ
cet-2662	113	12	concept	concept	NOUN
cet-2662	113	13	of	of	ADP
cet-2662	113	14	the	the	DET
cet-2662	113	15	“	"	PUNCT
cet-2662	113	16	shallow	shallow	ADJ
cet-2662	113	17	implantation	implantation	NOUN
cet-2662	113	18	”	"	PUNCT
cet-2662	113	19	model	model	NOUN
cet-2662	113	20	.	.	PUNCT
cet-2662	114	1	figure	figure	NOUN
cet-2662	114	2	8	8	NUM
cet-2662	114	3	:	:	PUNCT
cet-2662	114	4	schematic	schematic	ADJ
cet-2662	114	5	of	of	ADP
cet-2662	114	6	the	the	DET
cet-2662	114	7	basic	basic	ADJ
cet-2662	114	8	processes	process	NOUN
cet-2662	114	9	in	in	ADP
cet-2662	114	10	subplantation	subplantation	NOUN
cet-2662	114	11	however	however	ADV
cet-2662	114	12	,	,	PUNCT
cet-2662	114	13	further	further	ADJ
cet-2662	114	14	investigation	investigation	NOUN
cet-2662	114	15	is	be	AUX
cet-2662	114	16	needed	need	VERB
cet-2662	114	17	to	to	PART
cet-2662	114	18	explain	explain	VERB
cet-2662	114	19	why	why	SCONJ
cet-2662	114	20	high	high	ADJ
cet-2662	114	21	ion	ion	NOUN
cet-2662	114	22	energy	energy	NOUN
cet-2662	114	23	and	and	CCONJ
cet-2662	114	24	deposition	deposition	NOUN
cet-2662	114	25	temperature	temperature	NOUN
cet-2662	114	26	suppresses	suppress	VERB
cet-2662	114	27	changes	change	NOUN
cet-2662	114	28	in	in	ADP
cet-2662	114	29	sp3	sp3	NOUN
cet-2662	114	30	.	.	PUNCT
cet-2662	115	1	from	from	ADP
cet-2662	115	2	the	the	DET
cet-2662	115	3	raman	raman	NOUN
cet-2662	115	4	characterization	characterization	NOUN
cet-2662	115	5	results	result	NOUN
cet-2662	115	6	of	of	ADP
cet-2662	115	7	our	our	PRON
cet-2662	115	8	own	own	ADJ
cet-2662	115	9	process	process	NOUN
cet-2662	115	10	,	,	PUNCT
cet-2662	115	11	the	the	DET
cet-2662	115	12	sp3	sp3	ADJ
cet-2662	115	13	bond	bond	NOUN
cet-2662	115	14	content	content	NOUN
cet-2662	115	15	increased	increase	VERB
cet-2662	115	16	when	when	SCONJ
cet-2662	115	17	the	the	DET
cet-2662	115	18	substrate	substrate	NOUN
cet-2662	115	19	bias	bias	NOUN
cet-2662	115	20	increased	increase	VERB
cet-2662	115	21	from	from	ADP
cet-2662	115	22	20	20	NUM
cet-2662	115	23	v	v	NOUN
cet-2662	115	24	to	to	ADP
cet-2662	115	25	50	50	NUM
cet-2662	115	26	v.	v.	ADP
cet-2662	115	27	when	when	SCONJ
cet-2662	115	28	the	the	DET
cet-2662	115	29	bias	bias	NOUN
cet-2662	115	30	voltage	voltage	NOUN
cet-2662	115	31	was	be	AUX
cet-2662	115	32	20	20	NUM
cet-2662	115	33	v	v	NOUN
cet-2662	115	34	,	,	PUNCT
cet-2662	115	35	the	the	DET
cet-2662	115	36	low	low	ADJ
cet-2662	115	37	ion	ion	NOUN
cet-2662	115	38	energy	energy	NOUN
cet-2662	115	39	did	do	AUX
cet-2662	115	40	not	not	PART
cet-2662	115	41	readily	readily	ADV
cet-2662	115	42	result	result	VERB
cet-2662	115	43	in	in	ADP
cet-2662	115	44	shallow	shallow	ADJ
cet-2662	115	45	implantation	implantation	NOUN
cet-2662	115	46	,	,	PUNCT
cet-2662	115	47	but	but	CCONJ
cet-2662	115	48	the	the	DET
cet-2662	115	49	ions	ion	NOUN
cet-2662	115	50	only	only	ADV
cet-2662	115	51	stayed	stay	VERB
cet-2662	115	52	on	on	ADP
cet-2662	115	53	the	the	DET
cet-2662	115	54	growth	growth	NOUN
cet-2662	115	55	surface	surface	NOUN
cet-2662	115	56	of	of	ADP
cet-2662	115	57	the	the	DET
cet-2662	115	58	film	film	NOUN
cet-2662	115	59	to	to	PART
cet-2662	115	60	form	form	VERB
cet-2662	115	61	a	a	DET
cet-2662	115	62	stable	stable	ADJ
cet-2662	115	63	sp2	sp2	NOUN
cet-2662	115	64	structure	structure	NOUN
cet-2662	115	65	.	.	PUNCT
cet-2662	116	1	when	when	SCONJ
cet-2662	116	2	the	the	DET
cet-2662	116	3	bias	bias	NOUN
cet-2662	116	4	voltage	voltage	NOUN
cet-2662	116	5	was	be	AUX
cet-2662	116	6	increased	increase	VERB
cet-2662	116	7	to	to	ADP
cet-2662	116	8	50	50	NUM
cet-2662	116	9	v	v	NOUN
cet-2662	116	10	,	,	PUNCT
cet-2662	116	11	more	more	ADJ
cet-2662	116	12	c+	c+	VERB
cet-2662	116	13	ions	ion	NOUN
cet-2662	116	14	penetrated	penetrate	VERB
cet-2662	116	15	several	several	ADJ
cet-2662	116	16	atomic	atomic	ADJ
cet-2662	116	17	layers	layer	NOUN
cet-2662	116	18	into	into	ADP
cet-2662	116	19	the	the	DET
cet-2662	116	20	subsurface	subsurface	NOUN
cet-2662	116	21	,	,	PUNCT
cet-2662	116	22	thereby	thereby	ADV
cet-2662	116	23	forming	form	VERB
cet-2662	116	24	metastable	metastable	ADJ
cet-2662	116	25	sp3	sp3	ADJ
cet-2662	116	26	bond	bond	NOUN
cet-2662	116	27	content	content	NOUN
cet-2662	116	28	.	.	PUNCT
cet-2662	117	1	this	this	PRON
cet-2662	117	2	also	also	ADV
cet-2662	117	3	showed	show	VERB
cet-2662	117	4	that	that	SCONJ
cet-2662	117	5	our	our	PRON
cet-2662	117	6	mechanism	mechanism	NOUN
cet-2662	117	7	conforms	conform	VERB
cet-2662	117	8	to	to	ADP
cet-2662	117	9	the	the	DET
cet-2662	117	10	shallow	shallow	ADJ
cet-2662	117	11	implantation	implantation	NOUN
cet-2662	117	12	model	model	NOUN
cet-2662	117	13	.	.	PUNCT
cet-2662	118	1	mckenzie	mckenzie	PROPN
cet-2662	118	2	d.r	d.r	PROPN
cet-2662	118	3	.	.	PROPN
cet-2662	118	4	(	(	PUNCT
cet-2662	118	5	mckenzie	mckenzie	NOUN
cet-2662	118	6	,	,	PUNCT
cet-2662	118	7	1993	1993	NUM
cet-2662	118	8	)	)	PUNCT
cet-2662	118	9	pointed	point	VERB
cet-2662	118	10	out	out	ADP
cet-2662	118	11	that	that	SCONJ
cet-2662	118	12	sp2	sp2	PROPN
cet-2662	118	13	bonded	bond	VERB
cet-2662	118	14	graphite	graphite	NOUN
cet-2662	118	15	has	have	VERB
cet-2662	118	16	approximately	approximately	ADV
cet-2662	118	17	50	50	NUM
cet-2662	118	18	%	%	NOUN
cet-2662	118	19	more	more	ADJ
cet-2662	118	20	volume	volume	NOUN
cet-2662	118	21	than	than	ADP
cet-2662	118	22	sp3	sp3	ADV
cet-2662	118	23	bonded	bond	VERB
cet-2662	118	24	diamonds	diamond	NOUN
cet-2662	118	25	with	with	ADP
cet-2662	118	26	the	the	DET
cet-2662	118	27	same	same	ADJ
cet-2662	118	28	number	number	NOUN
cet-2662	118	29	of	of	ADP
cet-2662	118	30	c	c	NOUN
cet-2662	118	31	atoms	atom	NOUN
cet-2662	118	32	.	.	PUNCT
cet-2662	119	1	figure	figure	NOUN
cet-2662	119	2	9	9	NUM
cet-2662	119	3	shows	show	VERB
cet-2662	119	4	the	the	DET
cet-2662	119	5	phase	phase	NOUN
cet-2662	119	6	diagram	diagram	NOUN
cet-2662	119	7	of	of	ADP
cet-2662	119	8	diamond	diamond	NOUN
cet-2662	119	9	and	and	CCONJ
cet-2662	119	10	graphite	graphite	NOUN
cet-2662	119	11	.	.	PUNCT
cet-2662	120	1	the	the	DET
cet-2662	120	2	diamond	diamond	NOUN
cet-2662	120	3	phase	phase	NOUN
cet-2662	120	4	is	be	AUX
cet-2662	120	5	stable	stable	ADJ
cet-2662	120	6	at	at	ADP
cet-2662	120	7	the	the	DET
cet-2662	120	8	higher	high	ADJ
cet-2662	120	9	pressure	pressure	NOUN
cet-2662	120	10	part	part	NOUN
cet-2662	120	11	of	of	ADP
cet-2662	120	12	the	the	DET
cet-2662	120	13	berman	berman	PROPN
cet-2662	120	14	simon	simon	PROPN
cet-2662	120	15	line	line	PROPN
cet-2662	120	16	.	.	PUNCT
cet-2662	121	1	robertson	robertson	PROPN
cet-2662	121	2	j	j	PROPN
cet-2662	121	3	(	(	PUNCT
cet-2662	121	4	robertson	robertson	PROPN
cet-2662	121	5	,	,	PUNCT
cet-2662	121	6	2002	2002	NUM
cet-2662	121	7	)	)	PUNCT
cet-2662	121	8	believed	believe	VERB
cet-2662	121	9	that	that	SCONJ
cet-2662	121	10	the	the	DET
cet-2662	121	11	particle	particle	NOUN
cet-2662	121	12	beam	beam	NOUN
cet-2662	121	13	generates	generate	VERB
cet-2662	121	14	a	a	DET
cet-2662	121	15	compressive	compressive	ADJ
cet-2662	121	16	stress	stress	NOUN
cet-2662	121	17	in	in	ADP
cet-2662	121	18	the	the	DET
cet-2662	121	19	film	film	NOUN
cet-2662	121	20	,	,	PUNCT
cet-2662	121	21	which	which	PRON
cet-2662	121	22	makes	make	VERB
cet-2662	121	23	the	the	DET
cet-2662	121	24	sp3	sp3	ADJ
cet-2662	121	25	phase	phase	NOUN
cet-2662	121	26	of	of	ADP
cet-2662	121	27	the	the	DET
cet-2662	121	28	film	film	NOUN
cet-2662	121	29	rise	rise	NOUN
cet-2662	121	30	along	along	ADP
cet-2662	121	31	the	the	DET
cet-2662	121	32	berman	berman	PROPN
cet-2662	121	33	simon	simon	PROPN
cet-2662	121	34	line	line	PROPN
cet-2662	121	35	and	and	CCONJ
cet-2662	121	36	stabilize	stabilize	VERB
cet-2662	121	37	in	in	ADP
cet-2662	121	38	the	the	DET
cet-2662	121	39	high	high	ADJ
cet-2662	121	40	-	-	PUNCT
cet-2662	121	41	pressure	pressure	NOUN
cet-2662	121	42	region	region	NOUN
cet-2662	121	43	.	.	PUNCT
cet-2662	122	1	ions	ion	NOUN
cet-2662	122	2	of	of	ADP
cet-2662	122	3	higher	high	ADJ
cet-2662	122	4	energy	energy	NOUN
cet-2662	122	5	may	may	AUX
cet-2662	122	6	pass	pass	VERB
cet-2662	122	7	through	through	ADP
cet-2662	122	8	the	the	DET
cet-2662	122	9	surface	surface	NOUN
cet-2662	122	10	into	into	ADP
cet-2662	122	11	atomic	atomic	ADJ
cet-2662	122	12	vacancies	vacancy	NOUN
cet-2662	122	13	or	or	CCONJ
cet-2662	122	14	interstitial	interstitial	ADJ
cet-2662	122	15	spaces	space	NOUN
cet-2662	122	16	of	of	ADP
cet-2662	122	17	the	the	DET
cet-2662	122	18	inner	inner	ADJ
cet-2662	122	19	surface	surface	NOUN
cet-2662	122	20	,	,	PUNCT
cet-2662	122	21	thereby	thereby	ADV
cet-2662	122	22	increasing	increase	VERB
cet-2662	122	23	the	the	DET
cet-2662	122	24	local	local	ADJ
cet-2662	122	25	density	density	NOUN
cet-2662	122	26	and	and	CCONJ
cet-2662	122	27	compressive	compressive	ADJ
cet-2662	122	28	stress	stress	NOUN
cet-2662	122	29	of	of	ADP
cet-2662	122	30	the	the	DET
cet-2662	122	31	region	region	NOUN
cet-2662	122	32	where	where	SCONJ
cet-2662	122	33	they	they	PRON
cet-2662	122	34	are	be	AUX
cet-2662	122	35	located	locate	VERB
cet-2662	122	36	and	and	CCONJ
cet-2662	122	37	facilitating	facilitate	VERB
cet-2662	122	38	the	the	DET
cet-2662	122	39	recombination	recombination	NOUN
cet-2662	122	40	of	of	ADP
cet-2662	122	41	local	local	ADJ
cet-2662	122	42	bond	bond	NOUN
cet-2662	122	43	types	type	NOUN
cet-2662	122	44	23	23	NUM
cet-2662	122	45	according	accord	VERB
cet-2662	122	46	to	to	ADP
cet-2662	122	47	the	the	DET
cet-2662	122	48	new	new	ADJ
cet-2662	122	49	density	density	NOUN
cet-2662	122	50	.	.	PUNCT
cet-2662	123	1	assuming	assume	VERB
cet-2662	123	2	that	that	SCONJ
cet-2662	123	3	the	the	DET
cet-2662	123	4	high	high	ADJ
cet-2662	123	5	energy	energy	NOUN
cet-2662	123	6	state	state	NOUN
cet-2662	123	7	of	of	ADP
cet-2662	123	8	ion	ion	NOUN
cet-2662	123	9	bombardment	bombardment	NOUN
cet-2662	123	10	exists	exist	VERB
cet-2662	123	11	during	during	ADP
cet-2662	123	12	the	the	DET
cet-2662	123	13	growth	growth	NOUN
cet-2662	123	14	of	of	ADP
cet-2662	123	15	the	the	DET
cet-2662	123	16	thin	thin	ADJ
cet-2662	123	17	film	film	NOUN
cet-2662	123	18	,	,	PUNCT
cet-2662	123	19	the	the	DET
cet-2662	123	20	hybridization	hybridization	NOUN
cet-2662	123	21	of	of	ADP
cet-2662	123	22	atoms	atom	NOUN
cet-2662	123	23	can	can	AUX
cet-2662	123	24	adjust	adjust	VERB
cet-2662	123	25	the	the	DET
cet-2662	123	26	local	local	ADJ
cet-2662	123	27	density	density	NOUN
cet-2662	123	28	because	because	SCONJ
cet-2662	123	29	they	they	PRON
cet-2662	123	30	are	be	AUX
cet-2662	123	31	amorphous	amorphous	ADJ
cet-2662	123	32	.	.	PUNCT
cet-2662	124	1	figure	figure	NOUN
cet-2662	124	2	9	9	NUM
cet-2662	124	3	:	:	PUNCT
cet-2662	124	4	berman	berman	PROPN
cet-2662	124	5	-	-	PUNCT
cet-2662	124	6	simon	simon	PROPN
cet-2662	124	7	phase	phase	NOUN
cet-2662	124	8	diagram	diagram	NOUN
cet-2662	124	9	for	for	ADP
cet-2662	124	10	carbon	carbon	NOUN
cet-2662	124	11	5	5	NUM
cet-2662	124	12	.	.	PUNCT
cet-2662	124	13	conclusions	conclusion	NOUN
cet-2662	124	14	a	a	DET
cet-2662	124	15	diamond	diamond	NOUN
cet-2662	124	16	-	-	PUNCT
cet-2662	124	17	like	like	ADJ
cet-2662	124	18	carbon	carbon	NOUN
cet-2662	124	19	film	film	NOUN
cet-2662	124	20	was	be	AUX
cet-2662	124	21	successfully	successfully	ADV
cet-2662	124	22	prepared	prepare	VERB
cet-2662	124	23	on	on	ADP
cet-2662	124	24	a	a	DET
cet-2662	124	25	silicon	silicon	NOUN
cet-2662	124	26	substrate	substrate	NOUN
cet-2662	124	27	using	use	VERB
cet-2662	124	28	a	a	DET
cet-2662	124	29	microwave	microwave	NOUN
cet-2662	124	30	-	-	PUNCT
cet-2662	124	31	electron	electron	NOUN
cet-2662	124	32	cyclotron	cyclotron	NOUN
cet-2662	124	33	resonance	resonance	NOUN
cet-2662	124	34	-	-	PUNCT
cet-2662	124	35	plasma	plasma	NOUN
cet-2662	124	36	source	source	NOUN
cet-2662	124	37	ion	ion	NOUN
cet-2662	124	38	implantation	implantation	NOUN
cet-2662	124	39	/	/	SYM
cet-2662	124	40	deposition	deposition	NOUN
cet-2662	124	41	system	system	NOUN
cet-2662	124	42	.	.	PUNCT
cet-2662	125	1	raman	raman	NOUN
cet-2662	125	2	spectroscopy	spectroscopy	NOUN
cet-2662	125	3	showed	show	VERB
cet-2662	125	4	that	that	SCONJ
cet-2662	125	5	the	the	DET
cet-2662	125	6	film	film	NOUN
cet-2662	125	7	has	have	VERB
cet-2662	125	8	the	the	DET
cet-2662	125	9	characteristics	characteristic	NOUN
cet-2662	125	10	of	of	ADP
cet-2662	125	11	a	a	DET
cet-2662	125	12	typical	typical	ADJ
cet-2662	125	13	diamond	diamond	NOUN
cet-2662	125	14	-	-	PUNCT
cet-2662	125	15	like	like	ADJ
cet-2662	125	16	carbon	carbon	NOUN
cet-2662	125	17	film	film	NOUN
cet-2662	125	18	.	.	PUNCT
cet-2662	126	1	xps	xps	PROPN
cet-2662	126	2	characterization	characterization	NOUN
cet-2662	126	3	results	result	NOUN
cet-2662	126	4	further	far	ADV
cet-2662	126	5	verified	verify	VERB
cet-2662	126	6	the	the	DET
cet-2662	126	7	diamond	diamond	NOUN
cet-2662	126	8	-	-	PUNCT
cet-2662	126	9	like	like	ADJ
cet-2662	126	10	properties	property	NOUN
cet-2662	126	11	of	of	ADP
cet-2662	126	12	the	the	DET
cet-2662	126	13	film	film	NOUN
cet-2662	126	14	.	.	PUNCT
cet-2662	127	1	a	a	DET
cet-2662	127	2	moderate	moderate	ADJ
cet-2662	127	3	substrate	substrate	NOUN
cet-2662	127	4	bias	bias	NOUN
cet-2662	127	5	(	(	PUNCT
cet-2662	127	6	50	50	NUM
cet-2662	127	7	v	v	NOUN
cet-2662	127	8	)	)	PUNCT
cet-2662	127	9	favored	favor	VERB
cet-2662	127	10	the	the	DET
cet-2662	127	11	formation	formation	NOUN
cet-2662	127	12	of	of	ADP
cet-2662	127	13	sp3	sp3	ADJ
cet-2662	127	14	bonds	bond	NOUN
cet-2662	127	15	,	,	PUNCT
cet-2662	127	16	and	and	CCONJ
cet-2662	127	17	150	150	NUM
cet-2662	127	18	mm	mm	NOUN
cet-2662	127	19	was	be	AUX
cet-2662	127	20	a	a	DET
cet-2662	127	21	suitable	suitable	ADJ
cet-2662	127	22	target	target	NOUN
cet-2662	127	23	-	-	PUNCT
cet-2662	127	24	substrate	substrate	NOUN
cet-2662	127	25	distance	distance	NOUN
cet-2662	127	26	.	.	PUNCT
cet-2662	128	1	as	as	SCONJ
cet-2662	128	2	the	the	DET
cet-2662	128	3	substrate	substrate	NOUN
cet-2662	128	4	bias	bias	NOUN
cet-2662	128	5	increased	increase	VERB
cet-2662	128	6	,	,	PUNCT
cet-2662	128	7	the	the	DET
cet-2662	128	8	diamond	diamond	NOUN
cet-2662	128	9	-	-	PUNCT
cet-2662	128	10	like	like	ADJ
cet-2662	128	11	carbon	carbon	NOUN
cet-2662	128	12	film	film	NOUN
cet-2662	128	13	gradually	gradually	ADV
cet-2662	128	14	became	become	VERB
cet-2662	128	15	smooth	smooth	ADJ
cet-2662	128	16	.	.	PUNCT
cet-2662	129	1	acknowledgments	acknowledgment	NOUN
cet-2662	129	2	the	the	DET
cet-2662	129	3	study	study	NOUN
cet-2662	129	4	was	be	AUX
cet-2662	129	5	partially	partially	ADV
cet-2662	129	6	supported	support	VERB
cet-2662	129	7	by	by	ADP
cet-2662	129	8	the	the	DET
cet-2662	129	9	liaoning	liaoning	PROPN
cet-2662	129	10	province	province	PROPN
cet-2662	129	11	education	education	PROPN
cet-2662	129	12	office	office	NOUN
cet-2662	129	13	(	(	PUNCT
cet-2662	129	14	lfgd2017015	lfgd2017015	PROPN
cet-2662	129	15	)	)	PUNCT
cet-2662	129	16	.	.	PUNCT
cet-2662	130	1	references	reference	NOUN
cet-2662	130	2	carlo	carlo	PROPN
cet-2662	130	3	f.	f.	PROPN
cet-2662	130	4	,	,	PUNCT
cet-2662	130	5	2003	2003	NUM
cet-2662	130	6	,	,	PUNCT
cet-2662	130	7	deposition	deposition	NOUN
cet-2662	130	8	and	and	CCONJ
cet-2662	130	9	characterization	characterization	NOUN
cet-2662	130	10	of	of	ADP
cet-2662	130	11	amorphous	amorphous	ADJ
cet-2662	130	12	carbon	carbon	NOUN
cet-2662	130	13	nitride	nitride	ADJ
cet-2662	130	14	thin	thin	ADJ
cet-2662	130	15	films	film	NOUN
cet-2662	130	16	,	,	PUNCT
cet-2662	130	17	diamond	diamond	NOUN
cet-2662	130	18	and	and	CCONJ
cet-2662	130	19	related	related	ADJ
cet-2662	130	20	materials	material	NOUN
cet-2662	130	21	,	,	PUNCT
cet-2662	130	22	14	14	NUM
cet-2662	130	23	,	,	PUNCT
cet-2662	130	24	1154	1154	NUM
cet-2662	130	25	-	-	SYM
cet-2662	130	26	1163	1163	NUM
cet-2662	130	27	,	,	PUNCT
cet-2662	130	28	doi	doi	NOUN
cet-2662	130	29	:	:	PUNCT
cet-2662	130	30	10.1016/0925	10.1016/0925	NUM
cet-2662	130	31	-	-	SYM
cet-2662	130	32	9635(94)05282	9635(94)05282	NUM
cet-2662	130	33	-	-	PUNCT
cet-2662	130	34	4	4	NUM
cet-2662	130	35	dilou	dilou	PROPN
cet-2662	130	36	r.o	r.o	PROPN
cet-2662	130	37	.	.	PROPN
cet-2662	130	38	,	,	PUNCT
cet-2662	130	39	woollam	woollam	PROPN
cet-2662	130	40	j	j	PROPN
cet-2662	130	41	a	a	PROPN
cet-2662	130	42	,	,	PUNCT
cet-2662	130	43	katkanant	katkanant	PROPN
cet-2662	130	44	v.	v.	ADP
cet-2662	130	45	,	,	PUNCT
cet-2662	130	46	1984	1984	NUM
cet-2662	130	47	,	,	PUNCT
cet-2662	130	48	deposition	deposition	NOUN
cet-2662	130	49	of	of	ADP
cet-2662	130	50	α	α	PROPN
cet-2662	130	51	-	-	PUNCT
cet-2662	130	52	c	c	NOUN
cet-2662	130	53	h	h	NOUN
cet-2662	130	54	films	film	NOUN
cet-2662	130	55	in	in	ADP
cet-2662	130	56	a	a	DET
cet-2662	130	57	hall	hall	NOUN
cet-2662	130	58	accelerator	accelerator	NOUN
cet-2662	130	59	plasma	plasma	NOUN
cet-2662	130	60	.	.	PUNCT
cet-2662	131	1	phys	phy	NOUN
cet-2662	131	2	.	.	PUNCT
cet-2662	132	1	rev	rev	PROPN
cet-2662	132	2	.	.	PROPN
cet-2662	132	3	,	,	PUNCT
cet-2662	132	4	5	5	NUM
cet-2662	132	5	,	,	PUNCT
cet-2662	132	6	3482	3482	NUM
cet-2662	132	7	-	-	SYM
cet-2662	132	8	3487	3487	NUM
cet-2662	132	9	,	,	PUNCT
cet-2662	132	10	doi	doi	NOUN
cet-2662	132	11	:	:	PUNCT
cet-2662	132	12	10.1016/0925	10.1016/0925	NUM
cet-2662	132	13	-	-	PUNCT
cet-2662	132	14	9635(94)05204	9635(94)05204	NUM
cet-2662	132	15	-	-	SYM
cet-2662	132	16	2	2	NUM
cet-2662	132	17	habibi	habibi	NOUN
cet-2662	132	18	,	,	PUNCT
cet-2662	132	19	s.m	s.m	PROPN
cet-2662	132	20	.	.	PROPN
cet-2662	132	21	mousavi	mousavi	PROPN
cet-2662	132	22	k.	k.	PROPN
cet-2662	132	23	,	,	PUNCT
cet-2662	132	24	2017	2017	NUM
cet-2662	132	25	,	,	PUNCT
cet-2662	132	26	raman	raman	NOUN
cet-2662	132	27	spectroscopy	spectroscopy	NOUN
cet-2662	132	28	of	of	ADP
cet-2662	132	29	thin	thin	ADJ
cet-2662	132	30	dlc	dlc	NOUN
cet-2662	132	31	film	film	NOUN
cet-2662	132	32	deposited	deposit	VERB
cet-2662	132	33	by	by	ADP
cet-2662	132	34	plasma	plasma	NOUN
cet-2662	132	35	electrolysis	electrolysis	NOUN
cet-2662	132	36	process	process	NOUN
cet-2662	132	37	,	,	PUNCT
cet-2662	132	38	surface	surface	NOUN
cet-2662	132	39	&	&	CCONJ
cet-2662	132	40	coatings	coating	NOUN
cet-2662	132	41	technology	technology	NOUN
cet-2662	132	42	,	,	PUNCT
cet-2662	132	43	309	309	NUM
cet-2662	132	44	,	,	PUNCT
cet-2662	132	45	945–950	945–950	NUM
cet-2662	132	46	,	,	PUNCT
cet-2662	132	47	doi	doi	NOUN
cet-2662	132	48	:	:	PUNCT
cet-2662	132	49	10.1016	10.1016	NUM
cet-2662	132	50	/	/	SYM
cet-2662	132	51	j.surfcoat.2016.10.056	j.surfcoat.2016.10.056	PROPN
cet-2662	132	52	johnston	johnston	PROPN
cet-2662	132	53	g.p	g.p	PROPN
cet-2662	132	54	.	.	PROPN
cet-2662	132	55	,	,	PUNCT
cet-2662	132	56	tiwari	tiwari	PROPN
cet-2662	133	1	p.	p.	NOUN
cet-2662	133	2	,	,	PUNCT
cet-2662	133	3	rej	rej	PROPN
cet-2662	133	4	d.j	d.j	PROPN
cet-2662	133	5	.	.	PROPN
cet-2662	133	6	,	,	PUNCT
cet-2662	133	7	1994	1994	NUM
cet-2662	133	8	,	,	PUNCT
cet-2662	133	9	preparation	preparation	NOUN
cet-2662	133	10	of	of	ADP
cet-2662	133	11	diamond	diamond	NOUN
cet-2662	133	12	like	like	ADP
cet-2662	133	13	carbon	carbon	NOUN
cet-2662	133	14	films	film	NOUN
cet-2662	133	15	by	by	ADP
cet-2662	133	16	high	high	ADJ
cet-2662	133	17	-	-	PUNCT
cet-2662	133	18	intensity	intensity	NOUN
cet-2662	133	19	pulsed	pulse	VERB
cet-2662	133	20	-	-	PUNCT
cet-2662	133	21	ionbeam	ionbeam	NOUN
cet-2662	133	22	deposition	deposition	NOUN
cet-2662	133	23	,	,	PUNCT
cet-2662	133	24	journal	journal	NOUN
cet-2662	133	25	of	of	ADP
cet-2662	133	26	applied	applied	ADJ
cet-2662	133	27	physics	physic	NOUN
cet-2662	133	28	,	,	PUNCT
cet-2662	133	29	76	76	NUM
cet-2662	133	30	,	,	PUNCT
cet-2662	133	31	5949	5949	NUM
cet-2662	133	32	-	-	SYM
cet-2662	133	33	5945	5945	NUM
cet-2662	133	34	.	.	PUNCT
cet-2662	134	1	lin	lin	PROPN
cet-2662	134	2	y.	y.	PROPN
cet-2662	134	3	,	,	PUNCT
cet-2662	134	4	zia	zia	PROPN
cet-2662	134	5	a.w	a.w	PROPN
cet-2662	134	6	.	.	PROPN
cet-2662	134	7	,	,	PUNCT
cet-2662	134	8	zhou	zhou	PROPN
cet-2662	134	9	z.	z.	PROPN
cet-2662	134	10	,	,	PUNCT
cet-2662	134	11	shum	shum	PROPN
cet-2662	134	12	p.w	p.w	PROPN
cet-2662	134	13	.	.	PROPN
cet-2662	134	14	,	,	PUNCT
cet-2662	134	15	2017	2017	NUM
cet-2662	134	16	,	,	PUNCT
cet-2662	134	17	development	development	NOUN
cet-2662	134	18	of	of	ADP
cet-2662	134	19	diamond	diamond	NOUN
cet-2662	134	20	-	-	PUNCT
cet-2662	134	21	like	like	ADJ
cet-2662	134	22	carbon	carbon	NOUN
cet-2662	134	23	(	(	PUNCT
cet-2662	134	24	dlc	dlc	NOUN
cet-2662	134	25	)	)	PUNCT
cet-2662	134	26	coatings	coating	NOUN
cet-2662	134	27	with	with	ADP
cet-2662	134	28	alternate	alternate	ADJ
cet-2662	134	29	soft	soft	ADJ
cet-2662	134	30	and	and	CCONJ
cet-2662	134	31	hard	hard	ADJ
cet-2662	134	32	multilayer	multilayer	ADJ
cet-2662	134	33	architecture	architecture	NOUN
cet-2662	134	34	for	for	ADP
cet-2662	134	35	enhancing	enhance	VERB
cet-2662	134	36	wear	wear	NOUN
cet-2662	134	37	performance	performance	NOUN
cet-2662	134	38	at	at	ADP
cet-2662	134	39	high	high	ADJ
cet-2662	134	40	contact	contact	NOUN
cet-2662	134	41	stress	stress	NOUN
cet-2662	134	42	,	,	PUNCT
cet-2662	134	43	surf	surf	NOUN
cet-2662	134	44	.	.	PUNCT
cet-2662	135	1	coatings	coating	NOUN
cet-2662	135	2	technol	technol	NOUN
cet-2662	135	3	,	,	PUNCT
cet-2662	135	4	320	320	NUM
cet-2662	135	5	,	,	PUNCT
cet-2662	135	6	7	7	NUM
cet-2662	135	7	-	-	SYM
cet-2662	135	8	12	12	NUM
cet-2662	135	9	.	.	PUNCT
cet-2662	135	10	mahmud	mahmud	PROPN
cet-2662	135	11	.	.	PUNCT
cet-2662	136	1	k	k	PROPN
cet-2662	136	2	a.	a.	PROPN
cet-2662	136	3	,	,	PUNCT
cet-2662	136	4	kalam	kalam	PROPN
cet-2662	136	5	m.	m.	PROPN
cet-2662	136	6	,	,	PUNCT
cet-2662	136	7	masjuki	masjuki	PROPN
cet-2662	136	8	h.	h.	PROPN
cet-2662	136	9	,	,	PUNCT
cet-2662	136	10	2015	2015	NUM
cet-2662	136	11	,	,	PUNCT
cet-2662	136	12	an	an	DET
cet-2662	136	13	updated	update	VERB
cet-2662	136	14	overview	overview	NOUN
cet-2662	136	15	of	of	ADP
cet-2662	136	16	diamond	diamond	NOUN
cet-2662	136	17	-	-	PUNCT
cet-2662	136	18	like	like	ADJ
cet-2662	136	19	carbon	carbon	NOUN
cet-2662	136	20	coating	coating	NOUN
cet-2662	136	21	in	in	ADP
cet-2662	136	22	tribology	tribology	NOUN
cet-2662	136	23	,	,	PUNCT
cet-2662	136	24	crit	crit	PROPN
cet-2662	136	25	.	.	PUNCT
cet-2662	136	26	rev	rev	PROPN
cet-2662	136	27	.	.	PROPN
cet-2662	137	1	solid	solid	ADJ
cet-2662	137	2	state	state	NOUN
cet-2662	137	3	mater	mater	NOUN
cet-2662	137	4	.	.	PUNCT
cet-2662	138	1	sci	sci	PROPN
cet-2662	138	2	.	.	PROPN
cet-2662	139	1	40	40	NUM
cet-2662	139	2	,	,	PUNCT
cet-2662	139	3	90	90	NUM
cet-2662	139	4	-	-	SYM
cet-2662	139	5	118	118	NUM
cet-2662	139	6	.	.	PUNCT
cet-2662	140	1	mckenzie	mckenzie	PROPN
cet-2662	140	2	d.r	d.r	PROPN
cet-2662	140	3	.	.	PROPN
cet-2662	140	4	,	,	PUNCT
cet-2662	140	5	1993	1993	NUM
cet-2662	140	6	,	,	PUNCT
cet-2662	140	7	generation	generation	NOUN
cet-2662	140	8	and	and	CCONJ
cet-2662	140	9	applications	application	NOUN
cet-2662	140	10	of	of	ADP
cet-2662	140	11	compressive	compressive	ADJ
cet-2662	140	12	stress	stress	NOUN
cet-2662	140	13	induced	induce	VERB
cet-2662	140	14	by	by	ADP
cet-2662	140	15	low	low	ADJ
cet-2662	140	16	energy	energy	NOUN
cet-2662	140	17	ion	ion	NOUN
cet-2662	140	18	beam	beam	NOUN
cet-2662	140	19	bombardment	bombardment	NOUN
cet-2662	140	20	,	,	PUNCT
cet-2662	140	21	journal	journal	NOUN
cet-2662	140	22	of	of	ADP
cet-2662	140	23	vacuum	vacuum	PROPN
cet-2662	140	24	science	science	PROPN
cet-2662	140	25	&	&	CCONJ
cet-2662	140	26	technology	technology	PROPN
cet-2662	140	27	,	,	PUNCT
cet-2662	140	28	b11	b11	PROPN
cet-2662	140	29	,	,	PUNCT
cet-2662	140	30	1928	1928	NUM
cet-2662	140	31	-	-	SYM
cet-2662	140	32	1035	1035	NUM
cet-2662	140	33	.	.	PUNCT
cet-2662	141	1	muller	muller	PROPN
cet-2662	141	2	u.	u.	PROPN
cet-2662	141	3	,	,	PUNCT
cet-2662	141	4	hauert	hauert	PROPN
cet-2662	141	5	r.	r.	PROPN
cet-2662	141	6	,	,	PUNCT
cet-2662	141	7	1996	1996	NUM
cet-2662	141	8	,	,	PUNCT
cet-2662	141	9	xps	xps	PROPN
cet-2662	141	10	investigation	investigation	NOUN
cet-2662	141	11	of	of	ADP
cet-2662	141	12	containing	contain	VERB
cet-2662	141	13	diamond	diamond	NOUN
cet-2662	141	14	-	-	PUNCT
cet-2662	141	15	like	like	ADJ
cet-2662	141	16	carbon	carbon	NOUN
cet-2662	141	17	films	film	NOUN
cet-2662	141	18	,	,	PUNCT
cet-2662	141	19	thin	thin	ADJ
cet-2662	141	20	solid	solid	ADJ
cet-2662	141	21	films	film	NOUN
cet-2662	141	22	,	,	PUNCT
cet-2662	141	23	290292	290292	NUM
cet-2662	141	24	,	,	PUNCT
cet-2662	141	25	323	323	NUM
cet-2662	141	26	-	-	SYM
cet-2662	141	27	327	327	NUM
cet-2662	141	28	.	.	PUNCT
cet-2662	142	1	robertson	robertson	PROPN
cet-2662	142	2	j.	j.	PROPN
cet-2662	142	3	,	,	PUNCT
cet-2662	142	4	2002	2002	NUM
cet-2662	142	5	,	,	PUNCT
cet-2662	142	6	diamond	diamond	NOUN
cet-2662	142	7	-	-	PUNCT
cet-2662	142	8	like	like	ADJ
cet-2662	142	9	amorphous	amorphous	ADJ
cet-2662	142	10	carbon	carbon	NOUN
cet-2662	142	11	.	.	PUNCT
cet-2662	143	1	materials	material	NOUN
cet-2662	143	2	science	science	NOUN
cet-2662	143	3	and	and	CCONJ
cet-2662	143	4	engineering	engineering	NOUN
cet-2662	143	5	,	,	PUNCT
cet-2662	143	6	r37	r37	NOUN
cet-2662	143	7	:	:	PUNCT
cet-2662	143	8	129	129	NUM
cet-2662	143	9	-	-	SYM
cet-2662	143	10	281	281	NUM
cet-2662	143	11	.	.	PUNCT
cet-2662	144	1	shi	shi	PROPN
cet-2662	144	2	j.r	j.r	PROPN
cet-2662	144	3	.	.	PROPN
cet-2662	144	4	,	,	PUNCT
cet-2662	144	5	sun	sun	PROPN
cet-2662	144	6	z.	z.	PROPN
cet-2662	144	7	,	,	PUNCT
cet-2662	144	8	2001	2001	NUM
cet-2662	144	9	,	,	PUNCT
cet-2662	144	10	resonant	resonant	ADJ
cet-2662	144	11	raman	raman	NOUN
cet-2662	144	12	studies	study	NOUN
cet-2662	144	13	of	of	ADP
cet-2662	144	14	tetrahedral	tetrahedral	ADJ
cet-2662	144	15	amorphous	amorphous	ADJ
cet-2662	144	16	carbon	carbon	NOUN
cet-2662	144	17	films	film	NOUN
cet-2662	144	18	,	,	PUNCT
cet-2662	144	19	diamond	diamond	NOUN
cet-2662	144	20	and	and	CCONJ
cet-2662	144	21	related	related	ADJ
cet-2662	144	22	materials	material	NOUN
cet-2662	144	23	,	,	PUNCT
cet-2662	144	24	10	10	NUM
cet-2662	144	25	,	,	PUNCT
cet-2662	144	26	76	76	NUM
cet-2662	144	27	-	-	SYM
cet-2662	144	28	81	81	NUM
cet-2662	144	29	.	.	PUNCT
cet-2662	145	1	yamamoto	yamamoto	PROPN
cet-2662	145	2	t.	t.	PROPN
cet-2662	145	3	,	,	PUNCT
cet-2662	145	4	seki	seki	PROPN
cet-2662	145	5	k.	k.	PROPN
cet-2662	145	6	,	,	PUNCT
cet-2662	145	7	takahais	takahais	PROPN
cet-2662	145	8	m.	m.	NOUN
cet-2662	145	9	,	,	PUNCT
cet-2662	145	10	1993	1993	NUM
cet-2662	145	11	,	,	PUNCT
cet-2662	145	12	amorphous	amorphous	ADJ
cet-2662	145	13	carbon	carbon	NOUN
cet-2662	145	14	nitride	nitride	NOUN
cet-2662	145	15	irradiated	irradiate	VERB
cet-2662	145	16	with	with	ADP
cet-2662	145	17	argon	argon	NOUN
cet-2662	145	18	ions	ion	NOUN
cet-2662	145	19	,	,	PUNCT
cet-2662	145	20	surface	surface	NOUN
cet-2662	145	21	and	and	CCONJ
cet-2662	145	22	coatings	coating	NOUN
cet-2662	145	23	technology	technology	NOUN
cet-2662	145	24	,	,	PUNCT
cet-2662	145	25	62	62	NUM
cet-2662	145	26	,	,	PUNCT
cet-2662	145	27	543	543	NUM
cet-2662	145	28	-	-	SYM
cet-2662	145	29	547	547	NUM
cet-2662	145	30	.	.	PUNCT
cet-2662	146	1	zhang	zhang	PROPN
cet-2662	146	2	q.	q.	PROPN
cet-2662	146	3	,	,	PUNCT
cet-2662	146	4	wang	wang	PROPN
cet-2662	146	5	y.	y.	PROPN
cet-2662	146	6	,	,	PUNCT
cet-2662	146	7	wang	wang	PROPN
cet-2662	146	8	w.	w.	PROPN
cet-2662	146	9	,	,	PUNCT
cet-2662	146	10	2016	2016	NUM
cet-2662	146	11	,	,	PUNCT
cet-2662	146	12	low	low	ADJ
cet-2662	146	13	voltage	voltage	NOUN
cet-2662	146	14	and	and	CCONJ
cet-2662	146	15	ambient	ambient	ADJ
cet-2662	146	16	temperature	temperature	NOUN
cet-2662	146	17	electrodeposition	electrodeposition	NOUN
cet-2662	146	18	of	of	ADP
cet-2662	146	19	uniform	uniform	ADJ
cet-2662	146	20	carbon	carbon	NOUN
cet-2662	146	21	films	film	NOUN
cet-2662	146	22	,	,	PUNCT
cet-2662	146	23	electrochem	electrochem	NOUN
cet-2662	146	24	.	.	PUNCT
cet-2662	147	1	commun	commun	PROPN
cet-2662	147	2	.	.	PUNCT
cet-2662	148	1	63	63	NUM
cet-2662	148	2	,	,	PUNCT
cet-2662	148	3	22	22	NUM
cet-2662	148	4	-	-	SYM
cet-2662	148	5	25	25	NUM
cet-2662	148	6	.	.	PUNCT
cet-2662	149	1	24	24	NUM