id	sid	tid	token	lemma	pos
cet-2775	1	1	microsoft	microsoft	PROPN
cet-2775	1	2	word	word	NOUN
cet-2775	1	3	001.docx	001.docx	NUM
cet-2775	1	4	chemical	chemical	NOUN
cet-2775	1	5	engineering	engineering	NOUN
cet-2775	1	6	transactions	transaction	NOUN
cet-2775	1	7	vol	vol	NOUN
cet-2775	1	8	.	.	PROPN
cet-2775	2	1	66	66	NUM
cet-2775	2	2	,	,	PUNCT
cet-2775	2	3	2018	2018	NUM
cet-2775	2	4	a	a	DET
cet-2775	2	5	publication	publication	NOUN
cet-2775	2	6	of	of	ADP
cet-2775	2	7	the	the	DET
cet-2775	2	8	italian	italian	ADJ
cet-2775	2	9	association	association	NOUN
cet-2775	2	10	of	of	ADP
cet-2775	2	11	chemical	chemical	PROPN
cet-2775	2	12	engineering	engineering	NOUN
cet-2775	2	13	online	online	ADV
cet-2775	2	14	at	at	ADP
cet-2775	2	15	www.aidic.it/cet	www.aidic.it/cet	PROPN
cet-2775	2	16	guest	guest	NOUN
cet-2775	2	17	editors	editor	NOUN
cet-2775	2	18	:	:	PUNCT
cet-2775	2	19	songying	songye	VERB
cet-2775	2	20	zhao	zhao	PROPN
cet-2775	2	21	,	,	PUNCT
cet-2775	2	22	yougang	yougang	PROPN
cet-2775	2	23	sun	sun	PROPN
cet-2775	2	24	,	,	PUNCT
cet-2775	2	25	ye	ye	NOUN
cet-2775	2	26	zhou	zhou	NOUN
cet-2775	2	27	copyright	copyright	NOUN
cet-2775	3	1	©	©	PROPN
cet-2775	3	2	2018	2018	NUM
cet-2775	3	3	,	,	PUNCT
cet-2775	3	4	aidic	aidic	ADJ
cet-2775	3	5	servizi	servizi	PROPN
cet-2775	3	6	s.r.l	s.r.l	PROPN
cet-2775	3	7	.	.	PUNCT
cet-2775	4	1	isbn	isbn	ADJ
cet-2775	4	2	978	978	NUM
cet-2775	4	3	-	-	SYM
cet-2775	4	4	88	88	NUM
cet-2775	4	5	-	-	PUNCT
cet-2775	4	6	95608	95608	NUM
cet-2775	4	7	-	-	PUNCT
cet-2775	4	8	63	63	NUM
cet-2775	4	9	-	-	SYM
cet-2775	4	10	1	1	NUM
cet-2775	4	11	;	;	PUNCT
cet-2775	4	12	issn	issn	PROPN
cet-2775	4	13	2283	2283	NUM
cet-2775	4	14	-	-	SYM
cet-2775	4	15	9216	9216	NUM
cet-2775	4	16	preparation	preparation	NOUN
cet-2775	4	17	and	and	CCONJ
cet-2775	4	18	performance	performance	NOUN
cet-2775	4	19	study	study	NOUN
cet-2775	4	20	of	of	ADP
cet-2775	4	21	chemical	chemical	ADJ
cet-2775	4	22	mechanical	mechanical	ADJ
cet-2775	4	23	polishing	polishing	NOUN
cet-2775	4	24	slurry	slurry	NOUN
cet-2775	4	25	for	for	ADP
cet-2775	4	26	new	new	ADJ
cet-2775	4	27	-	-	PUNCT
cet-2775	4	28	type	type	NOUN
cet-2775	4	29	aluminium	aluminium	NOUN
cet-2775	4	30	alloy	alloy	NOUN
cet-2775	4	31	yali	yali	NOUN
cet-2775	4	32	zhao	zhao	PROPN
cet-2775	4	33	,	,	PUNCT
cet-2775	4	34	genjie	genjie	PROPN
cet-2775	4	35	yu	yu	PROPN
cet-2775	4	36	,	,	PUNCT
cet-2775	4	37	yamin	yamin	PROPN
cet-2775	4	38	li	li	PROPN
cet-2775	4	39	,	,	PUNCT
cet-2775	4	40	guixia	guixia	ADJ
cet-2775	4	41	wang	wang	PROPN
cet-2775	4	42	mechanic	mechanic	NOUN
cet-2775	4	43	and	and	CCONJ
cet-2775	4	44	electronic	electronic	ADJ
cet-2775	4	45	engineering	engineering	NOUN
cet-2775	4	46	,	,	PUNCT
cet-2775	4	47	xinlian	xinlian	PROPN
cet-2775	4	48	college	college	PROPN
cet-2775	4	49	,	,	PUNCT
cet-2775	4	50	henan	henan	PROPN
cet-2775	4	51	normal	normal	ADJ
cet-2775	4	52	university	university	NOUN
cet-2775	4	53	,	,	PUNCT
cet-2775	4	54	zhengzhou	zhengzhou	PROPN
cet-2775	4	55	451400	451400	NUM
cet-2775	4	56	,	,	PUNCT
cet-2775	4	57	china	china	PROPN
cet-2775	4	58	zhaosil@126.com	zhaosil@126.com	PROPN
cet-2775	4	59	aluminium	aluminium	NOUN
cet-2775	4	60	alloys	alloy	NOUN
cet-2775	4	61	are	be	AUX
cet-2775	4	62	widely	widely	ADV
cet-2775	4	63	used	use	VERB
cet-2775	4	64	in	in	ADP
cet-2775	4	65	various	various	ADJ
cet-2775	4	66	industries	industry	NOUN
cet-2775	4	67	because	because	SCONJ
cet-2775	4	68	of	of	ADP
cet-2775	4	69	their	their	PRON
cet-2775	4	70	lightness	lightness	NOUN
cet-2775	4	71	and	and	CCONJ
cet-2775	4	72	easy	easy	ADJ
cet-2775	4	73	processing	processing	NOUN
cet-2775	4	74	,	,	PUNCT
cet-2775	4	75	leading	lead	VERB
cet-2775	4	76	to	to	ADP
cet-2775	4	77	higher	high	ADJ
cet-2775	4	78	requirements	requirement	NOUN
cet-2775	4	79	for	for	ADP
cet-2775	4	80	aluminium	aluminium	NOUN
cet-2775	4	81	alloys	alloy	NOUN
cet-2775	4	82	in	in	ADP
cet-2775	4	83	terms	term	NOUN
cet-2775	4	84	of	of	ADP
cet-2775	4	85	the	the	DET
cet-2775	4	86	flatness	flatness	NOUN
cet-2775	4	87	and	and	CCONJ
cet-2775	4	88	finish	finish	NOUN
cet-2775	4	89	of	of	ADP
cet-2775	4	90	aluminium	aluminium	NOUN
cet-2775	4	91	alloy	alloy	NOUN
cet-2775	4	92	surface	surface	NOUN
cet-2775	4	93	.	.	PUNCT
cet-2775	5	1	in	in	ADP
cet-2775	5	2	this	this	DET
cet-2775	5	3	paper	paper	NOUN
cet-2775	5	4	,	,	PUNCT
cet-2775	5	5	chemical	chemical	ADJ
cet-2775	5	6	mechanical	mechanical	ADJ
cet-2775	5	7	polishing	polishing	NOUN
cet-2775	5	8	(	(	PUNCT
cet-2775	5	9	cmp	cmp	NOUN
cet-2775	5	10	)	)	PUNCT
cet-2775	5	11	technology	technology	NOUN
cet-2775	5	12	,	,	PUNCT
cet-2775	5	13	which	which	PRON
cet-2775	5	14	combines	combine	VERB
cet-2775	5	15	the	the	DET
cet-2775	5	16	advantages	advantage	NOUN
cet-2775	5	17	of	of	ADP
cet-2775	5	18	chemical	chemical	ADJ
cet-2775	5	19	and	and	CCONJ
cet-2775	5	20	mechanical	mechanical	ADJ
cet-2775	5	21	polishing	polishing	NOUN
cet-2775	5	22	techniques	technique	NOUN
cet-2775	5	23	,	,	PUNCT
cet-2775	5	24	was	be	AUX
cet-2775	5	25	studied	study	VERB
cet-2775	5	26	to	to	PART
cet-2775	5	27	prepare	prepare	VERB
cet-2775	5	28	one	one	NUM
cet-2775	5	29	slurry	slurry	NOUN
cet-2775	5	30	suitable	suitable	ADJ
cet-2775	5	31	for	for	ADP
cet-2775	5	32	new	new	ADJ
cet-2775	5	33	-	-	PUNCT
cet-2775	5	34	type	type	NOUN
cet-2775	5	35	aluminium	aluminium	NOUN
cet-2775	5	36	alloy	alloy	NOUN
cet-2775	5	37	and	and	CCONJ
cet-2775	5	38	test	test	VERB
cet-2775	5	39	its	its	PRON
cet-2775	5	40	polishing	polish	VERB
cet-2775	5	41	performance	performance	NOUN
cet-2775	5	42	.	.	PUNCT
cet-2775	6	1	ceo2	ceo2	NOUN
cet-2775	6	2	powders	powder	NOUN
cet-2775	6	3	were	be	AUX
cet-2775	6	4	obtained	obtain	VERB
cet-2775	6	5	as	as	ADP
cet-2775	6	6	abrasive	abrasive	ADJ
cet-2775	6	7	particles	particle	NOUN
cet-2775	6	8	by	by	ADP
cet-2775	6	9	a	a	DET
cet-2775	6	10	series	series	NOUN
cet-2775	6	11	of	of	ADP
cet-2775	6	12	processes	process	NOUN
cet-2775	6	13	such	such	ADJ
cet-2775	6	14	as	as	ADP
cet-2775	6	15	firing	fire	VERB
cet-2775	6	16	the	the	DET
cet-2775	6	17	mixture	mixture	NOUN
cet-2775	6	18	of	of	ADP
cet-2775	6	19	nh4hco3	nh4hco3	PROPN
cet-2775	6	20	and	and	CCONJ
cet-2775	6	21	cecl3	cecl3	VERB
cet-2775	6	22	by	by	ADP
cet-2775	6	23	precipitation	precipitation	NOUN
cet-2775	6	24	method	method	NOUN
cet-2775	6	25	.	.	PUNCT
cet-2775	7	1	the	the	DET
cet-2775	7	2	optimum	optimum	ADJ
cet-2775	7	3	ratio	ratio	NOUN
cet-2775	7	4	of	of	ADP
cet-2775	7	5	the	the	DET
cet-2775	7	6	slurry	slurry	NOUN
cet-2775	7	7	included	include	VERB
cet-2775	7	8	:	:	PUNCT
cet-2775	7	9	2.5	2.5	NUM
cet-2775	7	10	%	%	NOUN
cet-2775	7	11	cerium	cerium	NOUN
cet-2775	7	12	oxide	oxide	NOUN
cet-2775	7	13	abrasive	abrasive	ADJ
cet-2775	7	14	particles	particle	NOUN
cet-2775	7	15	,	,	PUNCT
cet-2775	7	16	naoh	naoh	NOUN
cet-2775	7	17	as	as	ADP
cet-2775	7	18	a	a	DET
cet-2775	7	19	ph	ph	ADJ
cet-2775	7	20	adjuster	adjuster	NOUN
cet-2775	7	21	at	at	ADP
cet-2775	7	22	the	the	DET
cet-2775	7	23	optimal	optimal	ADJ
cet-2775	7	24	ph	ph	ADJ
cet-2775	7	25	10	10	NUM
cet-2775	7	26	,	,	PUNCT
cet-2775	7	27	and	and	CCONJ
cet-2775	7	28	3	3	NUM
cet-2775	7	29	%	%	NOUN
cet-2775	7	30	sodium	sodium	NOUN
cet-2775	7	31	polyacrylate	polyacrylate	NOUN
cet-2775	7	32	as	as	ADP
cet-2775	7	33	the	the	DET
cet-2775	7	34	dispersant	dispersant	NOUN
cet-2775	7	35	,	,	PUNCT
cet-2775	7	36	so	so	SCONJ
cet-2775	7	37	as	as	SCONJ
cet-2775	7	38	to	to	PART
cet-2775	7	39	mix	mix	VERB
cet-2775	7	40	the	the	DET
cet-2775	7	41	cmp	cmp	NOUN
cet-2775	7	42	slurry	slurry	NOUN
cet-2775	7	43	with	with	ADP
cet-2775	7	44	good	good	ADJ
cet-2775	7	45	dispersibility	dispersibility	NOUN
cet-2775	7	46	and	and	CCONJ
cet-2775	7	47	stability	stability	NOUN
cet-2775	7	48	.	.	PUNCT
cet-2775	8	1	then	then	ADV
cet-2775	8	2	,	,	PUNCT
cet-2775	8	3	the	the	DET
cet-2775	8	4	performance	performance	NOUN
cet-2775	8	5	evaluation	evaluation	NOUN
cet-2775	8	6	test	test	NOUN
cet-2775	8	7	of	of	ADP
cet-2775	8	8	polishing	polishing	NOUN
cet-2775	8	9	was	be	AUX
cet-2775	8	10	made	make	VERB
cet-2775	8	11	by	by	ADP
cet-2775	8	12	using	use	VERB
cet-2775	8	13	the	the	DET
cet-2775	8	14	cmp	cmp	NOUN
cet-2775	8	15	slurry	slurry	NOUN
cet-2775	8	16	prepared	prepare	VERB
cet-2775	8	17	under	under	ADP
cet-2775	8	18	the	the	DET
cet-2775	8	19	optimal	optimal	ADJ
cet-2775	8	20	conditions	condition	NOUN
cet-2775	8	21	on	on	ADP
cet-2775	8	22	the	the	DET
cet-2775	8	23	aluminium	aluminium	NOUN
cet-2775	8	24	alloy	alloy	NOUN
cet-2775	8	25	.	.	PUNCT
cet-2775	9	1	the	the	DET
cet-2775	9	2	results	result	NOUN
cet-2775	9	3	showed	show	VERB
cet-2775	9	4	that	that	SCONJ
cet-2775	9	5	the	the	DET
cet-2775	9	6	polishing	polish	VERB
cet-2775	9	7	efficiency	efficiency	NOUN
cet-2775	9	8	of	of	ADP
cet-2775	9	9	the	the	DET
cet-2775	9	10	cmp	cmp	NOUN
cet-2775	9	11	slurry	slurry	NOUN
cet-2775	9	12	was	be	AUX
cet-2775	9	13	higher	high	ADJ
cet-2775	9	14	,	,	PUNCT
cet-2775	9	15	and	and	CCONJ
cet-2775	9	16	the	the	DET
cet-2775	9	17	surface	surface	NOUN
cet-2775	9	18	flatness	flatness	NOUN
cet-2775	9	19	,	,	PUNCT
cet-2775	9	20	finish	finish	NOUN
cet-2775	9	21	and	and	CCONJ
cet-2775	9	22	roughness	roughness	NOUN
cet-2775	9	23	after	after	ADP
cet-2775	9	24	polishing	polish	VERB
cet-2775	9	25	were	be	AUX
cet-2775	9	26	in	in	ADP
cet-2775	9	27	conformity	conformity	NOUN
cet-2775	9	28	with	with	ADP
cet-2775	9	29	the	the	DET
cet-2775	9	30	requirements	requirement	NOUN
cet-2775	9	31	about	about	ADP
cet-2775	9	32	aluminium	aluminium	NOUN
cet-2775	9	33	alloy	alloy	NOUN
cet-2775	9	34	surface	surface	NOUN
cet-2775	9	35	precision	precision	NOUN
cet-2775	9	36	,	,	PUNCT
cet-2775	9	37	with	with	ADP
cet-2775	9	38	good	good	ADJ
cet-2775	9	39	polishing	polishing	NOUN
cet-2775	9	40	effect	effect	NOUN
cet-2775	9	41	.	.	PUNCT
cet-2775	10	1	1	1	X
cet-2775	10	2	.	.	X
cet-2775	10	3	introduction	introduction	NOUN
cet-2775	10	4	the	the	DET
cet-2775	10	5	reserves	reserve	NOUN
cet-2775	10	6	of	of	ADP
cet-2775	10	7	aluminium	aluminium	NOUN
cet-2775	10	8	in	in	ADP
cet-2775	10	9	nature	nature	NOUN
cet-2775	10	10	are	be	AUX
cet-2775	10	11	second	second	ADJ
cet-2775	10	12	only	only	ADV
cet-2775	10	13	to	to	ADP
cet-2775	10	14	oxygen	oxygen	NOUN
cet-2775	10	15	and	and	CCONJ
cet-2775	10	16	silicon	silicon	NOUN
cet-2775	10	17	.	.	PUNCT
cet-2775	11	1	aluminium	aluminium	NOUN
cet-2775	11	2	and	and	CCONJ
cet-2775	11	3	its	its	PRON
cet-2775	11	4	alloy	alloy	NOUN
cet-2775	11	5	products	product	NOUN
cet-2775	11	6	are	be	AUX
cet-2775	11	7	widely	widely	ADV
cet-2775	11	8	used	use	VERB
cet-2775	11	9	in	in	ADP
cet-2775	11	10	various	various	ADJ
cet-2775	11	11	sectors	sector	NOUN
cet-2775	11	12	and	and	CCONJ
cet-2775	11	13	industries	industry	NOUN
cet-2775	11	14	such	such	ADJ
cet-2775	11	15	as	as	ADP
cet-2775	11	16	aerospace	aerospace	NOUN
cet-2775	11	17	,	,	PUNCT
cet-2775	11	18	transportation	transportation	NOUN
cet-2775	11	19	,	,	PUNCT
cet-2775	11	20	and	and	CCONJ
cet-2775	11	21	structural	structural	ADJ
cet-2775	11	22	materials	material	NOUN
cet-2775	11	23	etc	etc	X
cet-2775	11	24	.	.	X
cet-2775	12	1	the	the	DET
cet-2775	12	2	greatest	great	ADJ
cet-2775	12	3	advantages	advantage	NOUN
cet-2775	12	4	of	of	ADP
cet-2775	12	5	aluminium	aluminium	NOUN
cet-2775	12	6	and	and	CCONJ
cet-2775	12	7	its	its	PRON
cet-2775	12	8	alloys	alloy	NOUN
cet-2775	12	9	are	be	AUX
cet-2775	12	10	light	light	ADJ
cet-2775	12	11	and	and	CCONJ
cet-2775	12	12	easy	easy	ADJ
cet-2775	12	13	to	to	PART
cet-2775	12	14	process	process	VERB
cet-2775	12	15	,	,	PUNCT
cet-2775	12	16	but	but	CCONJ
cet-2775	12	17	it	it	PRON
cet-2775	12	18	also	also	ADV
cet-2775	12	19	has	have	VERB
cet-2775	12	20	defects	defect	NOUN
cet-2775	12	21	such	such	ADJ
cet-2775	12	22	as	as	ADP
cet-2775	12	23	soft	soft	ADJ
cet-2775	12	24	texture	texture	NOUN
cet-2775	12	25	and	and	CCONJ
cet-2775	12	26	low	low	ADJ
cet-2775	12	27	hardness	hardness	NOUN
cet-2775	12	28	(	(	PUNCT
cet-2775	12	29	mondolfo	mondolfo	NOUN
cet-2775	12	30	,	,	PUNCT
cet-2775	12	31	1976	1976	NUM
cet-2775	12	32	;	;	PUNCT
cet-2775	12	33	ma	ma	PROPN
cet-2775	12	34	,	,	PUNCT
cet-2775	12	35	2012	2012	NUM
cet-2775	12	36	)	)	PUNCT
cet-2775	12	37	.	.	PUNCT
cet-2775	13	1	from	from	ADP
cet-2775	13	2	the	the	DET
cet-2775	13	3	perspective	perspective	NOUN
cet-2775	13	4	of	of	ADP
cet-2775	13	5	the	the	DET
cet-2775	13	6	protection	protection	NOUN
cet-2775	13	7	and	and	CCONJ
cet-2775	13	8	aesthetics	aesthetic	NOUN
cet-2775	13	9	of	of	ADP
cet-2775	13	10	the	the	DET
cet-2775	13	11	alloy	alloy	NOUN
cet-2775	13	12	surface	surface	NOUN
cet-2775	13	13	,	,	PUNCT
cet-2775	13	14	it	it	PRON
cet-2775	13	15	is	be	AUX
cet-2775	13	16	necessary	necessary	ADJ
cet-2775	13	17	to	to	PART
cet-2775	13	18	polish	polish	VERB
cet-2775	13	19	the	the	DET
cet-2775	13	20	tool	tool	NOUN
cet-2775	13	21	made	make	VERB
cet-2775	13	22	of	of	ADP
cet-2775	13	23	the	the	DET
cet-2775	13	24	aluminium	aluminium	NOUN
cet-2775	13	25	alloy	alloy	NOUN
cet-2775	13	26	.	.	PUNCT
cet-2775	14	1	polishing	polish	VERB
cet-2775	14	2	technology	technology	NOUN
cet-2775	14	3	can	can	AUX
cet-2775	14	4	improve	improve	VERB
cet-2775	14	5	the	the	DET
cet-2775	14	6	surface	surface	NOUN
cet-2775	14	7	smoothness	smoothness	NOUN
cet-2775	14	8	,	,	PUNCT
cet-2775	14	9	finish	finish	NOUN
cet-2775	14	10	,	,	PUNCT
cet-2775	14	11	and	and	CCONJ
cet-2775	14	12	certain	certain	ADJ
cet-2775	14	13	mechanical	mechanical	ADJ
cet-2775	14	14	properties	property	NOUN
cet-2775	14	15	of	of	ADP
cet-2775	14	16	aluminium	aluminium	NOUN
cet-2775	14	17	and	and	CCONJ
cet-2775	14	18	aluminium	aluminium	NOUN
cet-2775	14	19	alloy	alloy	NOUN
cet-2775	14	20	products	product	NOUN
cet-2775	14	21	(	(	PUNCT
cet-2775	14	22	urbano	urbano	PROPN
cet-2775	14	23	et	et	PROPN
cet-2775	14	24	al	al	PROPN
cet-2775	14	25	.	.	PROPN
cet-2775	14	26	,	,	PUNCT
cet-2775	14	27	2014	2014	NUM
cet-2775	14	28	;	;	PUNCT
cet-2775	14	29	zhao	zhao	PROPN
cet-2775	14	30	et	et	PROPN
cet-2775	14	31	al	al	PROPN
cet-2775	14	32	.	.	PROPN
cet-2775	14	33	,	,	PUNCT
cet-2775	14	34	1995	1995	NUM
cet-2775	14	35	;	;	PUNCT
cet-2775	14	36	hryniewicz	hryniewicz	NOUN
cet-2775	14	37	et	et	PROPN
cet-2775	14	38	al	al	PROPN
cet-2775	14	39	.	.	PROPN
cet-2775	14	40	,	,	PUNCT
cet-2775	14	41	2007	2007	NUM
cet-2775	14	42	)	)	PUNCT
cet-2775	14	43	.	.	PUNCT
cet-2775	15	1	this	this	PRON
cet-2775	15	2	is	be	AUX
cet-2775	15	3	of	of	ADP
cet-2775	15	4	great	great	ADJ
cet-2775	15	5	significance	significance	NOUN
cet-2775	15	6	to	to	PART
cet-2775	15	7	improve	improve	VERB
cet-2775	15	8	the	the	DET
cet-2775	15	9	added	add	VERB
cet-2775	15	10	value	value	NOUN
cet-2775	15	11	of	of	ADP
cet-2775	15	12	aluminium	aluminium	NOUN
cet-2775	15	13	and	and	CCONJ
cet-2775	15	14	aluminium	aluminium	NOUN
cet-2775	15	15	alloy	alloy	NOUN
cet-2775	15	16	products	product	NOUN
cet-2775	15	17	.	.	PUNCT
cet-2775	16	1	the	the	DET
cet-2775	16	2	common	common	ADJ
cet-2775	16	3	polishing	polishing	NOUN
cet-2775	16	4	methods	method	NOUN
cet-2775	16	5	include	include	VERB
cet-2775	16	6	chemical	chemical	NOUN
cet-2775	16	7	polishing	polishing	NOUN
cet-2775	16	8	,	,	PUNCT
cet-2775	16	9	electrolytic	electrolytic	ADJ
cet-2775	16	10	polishing	polishing	NOUN
cet-2775	16	11	,	,	PUNCT
cet-2775	16	12	and	and	CCONJ
cet-2775	16	13	mechanical	mechanical	ADJ
cet-2775	16	14	polishing	polishing	NOUN
cet-2775	16	15	etc	etc	X
cet-2775	16	16	.	.	X
cet-2775	16	17	chemical	chemical	NOUN
cet-2775	16	18	polishing	polishing	NOUN
cet-2775	16	19	is	be	AUX
cet-2775	16	20	the	the	DET
cet-2775	16	21	use	use	NOUN
cet-2775	16	22	of	of	ADP
cet-2775	16	23	polishing	polish	VERB
cet-2775	16	24	slurry	slurry	NOUN
cet-2775	16	25	to	to	PART
cet-2775	16	26	selectively	selectively	ADV
cet-2775	16	27	dissolve	dissolve	VERB
cet-2775	16	28	the	the	DET
cet-2775	16	29	surface	surface	NOUN
cet-2775	16	30	of	of	ADP
cet-2775	16	31	the	the	DET
cet-2775	16	32	alloy	alloy	NOUN
cet-2775	16	33	to	to	PART
cet-2775	16	34	achieve	achieve	VERB
cet-2775	16	35	a	a	DET
cet-2775	16	36	bright	bright	ADJ
cet-2775	16	37	and	and	CCONJ
cet-2775	16	38	smooth	smooth	ADJ
cet-2775	16	39	surface	surface	NOUN
cet-2775	16	40	,	,	PUNCT
cet-2775	16	41	and	and	CCONJ
cet-2775	16	42	to	to	PART
cet-2775	16	43	enhance	enhance	VERB
cet-2775	16	44	the	the	DET
cet-2775	16	45	mechanical	mechanical	ADJ
cet-2775	16	46	strength	strength	NOUN
cet-2775	16	47	of	of	ADP
cet-2775	16	48	the	the	DET
cet-2775	16	49	alloy	alloy	NOUN
cet-2775	16	50	by	by	ADP
cet-2775	16	51	improving	improve	VERB
cet-2775	16	52	the	the	DET
cet-2775	16	53	mechanical	mechanical	ADJ
cet-2775	16	54	damage	damage	NOUN
cet-2775	16	55	layer	layer	NOUN
cet-2775	16	56	of	of	ADP
cet-2775	16	57	the	the	DET
cet-2775	16	58	alloy	alloy	NOUN
cet-2775	16	59	;	;	PUNCT
cet-2775	16	60	mechanical	mechanical	ADJ
cet-2775	16	61	polishing	polishing	NOUN
cet-2775	16	62	is	be	AUX
cet-2775	16	63	the	the	DET
cet-2775	16	64	process	process	NOUN
cet-2775	16	65	of	of	ADP
cet-2775	16	66	surface	surface	NOUN
cet-2775	16	67	smoothing	smooth	VERB
cet-2775	16	68	by	by	ADP
cet-2775	16	69	mechanically	mechanically	ADV
cet-2775	16	70	polishing	polish	VERB
cet-2775	16	71	the	the	DET
cet-2775	16	72	protruding	protrude	VERB
cet-2775	16	73	part	part	NOUN
cet-2775	16	74	of	of	ADP
cet-2775	16	75	the	the	DET
cet-2775	16	76	tool	tool	NOUN
cet-2775	16	77	using	use	VERB
cet-2775	16	78	the	the	DET
cet-2775	16	79	polishing	polish	VERB
cet-2775	16	80	machine	machine	NOUN
cet-2775	16	81	;	;	PUNCT
cet-2775	16	82	electrolytic	electrolytic	ADJ
cet-2775	16	83	polishing	polishing	NOUN
cet-2775	16	84	utilizes	utilize	VERB
cet-2775	16	85	the	the	DET
cet-2775	16	86	electrolysis	electrolysis	NOUN
cet-2775	16	87	of	of	ADP
cet-2775	16	88	the	the	DET
cet-2775	16	89	electrolyte	electrolyte	NOUN
cet-2775	16	90	to	to	PART
cet-2775	16	91	dissolve	dissolve	VERB
cet-2775	16	92	the	the	DET
cet-2775	16	93	protruding	protruding	ADJ
cet-2775	16	94	part	part	NOUN
cet-2775	16	95	of	of	ADP
cet-2775	16	96	the	the	DET
cet-2775	16	97	alloy	alloy	NOUN
cet-2775	16	98	surface	surface	NOUN
cet-2775	16	99	.	.	PUNCT
cet-2775	17	1	mechanical	mechanical	ADJ
cet-2775	17	2	polishing	polishing	NOUN
cet-2775	17	3	is	be	AUX
cet-2775	17	4	only	only	ADV
cet-2775	17	5	applicable	applicable	ADJ
cet-2775	17	6	to	to	PART
cet-2775	17	7	alloy	alloy	VERB
cet-2775	17	8	products	product	NOUN
cet-2775	17	9	with	with	ADP
cet-2775	17	10	simple	simple	ADJ
cet-2775	17	11	shapes	shape	NOUN
cet-2775	17	12	,	,	PUNCT
cet-2775	17	13	electrolytic	electrolytic	ADJ
cet-2775	17	14	polishing	polishing	NOUN
cet-2775	17	15	requires	require	VERB
cet-2775	17	16	the	the	DET
cet-2775	17	17	huge	huge	ADJ
cet-2775	17	18	equipment	equipment	NOUN
cet-2775	17	19	and	and	CCONJ
cet-2775	17	20	funds	fund	NOUN
cet-2775	17	21	,	,	PUNCT
cet-2775	17	22	and	and	CCONJ
cet-2775	17	23	the	the	DET
cet-2775	17	24	chemical	chemical	NOUN
cet-2775	17	25	polishing	polishing	NOUN
cet-2775	17	26	is	be	AUX
cet-2775	17	27	easy	easy	ADJ
cet-2775	17	28	to	to	PART
cet-2775	17	29	operate	operate	VERB
cet-2775	17	30	with	with	ADP
cet-2775	17	31	low	low	ADJ
cet-2775	17	32	cost	cost	NOUN
cet-2775	17	33	and	and	CCONJ
cet-2775	17	34	wide	wide	ADJ
cet-2775	17	35	application	application	NOUN
cet-2775	17	36	range	range	NOUN
cet-2775	17	37	,	,	PUNCT
cet-2775	17	38	but	but	CCONJ
cet-2775	17	39	with	with	ADP
cet-2775	17	40	high	high	ADJ
cet-2775	17	41	corrosivity	corrosivity	NOUN
cet-2775	17	42	(	(	PUNCT
cet-2775	17	43	sun	sun	NOUN
cet-2775	17	44	et	et	PROPN
cet-2775	17	45	al	al	PROPN
cet-2775	17	46	.	.	PROPN
cet-2775	17	47	,	,	PUNCT
cet-2775	17	48	2009	2009	NUM
cet-2775	17	49	;	;	PUNCT
cet-2775	17	50	sun	sun	PROPN
cet-2775	17	51	et	et	PROPN
cet-2775	17	52	al	al	PROPN
cet-2775	17	53	.	.	PROPN
cet-2775	17	54	,	,	PUNCT
cet-2775	17	55	2004	2004	NUM
cet-2775	17	56	;	;	PUNCT
cet-2775	17	57	lee	lee	PROPN
cet-2775	17	58	et	et	PROPN
cet-2775	17	59	al	al	PROPN
cet-2775	17	60	.	.	PROPN
cet-2775	17	61	,	,	PUNCT
cet-2775	17	62	2010	2010	NUM
cet-2775	17	63	;	;	PUNCT
cet-2775	17	64	zhang	zhang	PROPN
cet-2775	17	65	et	et	PROPN
cet-2775	17	66	al	al	PROPN
cet-2775	17	67	.	.	PROPN
cet-2775	17	68	,	,	PUNCT
cet-2775	17	69	1989	1989	NUM
cet-2775	17	70	)	)	PUNCT
cet-2775	17	71	.	.	PUNCT
cet-2775	18	1	in	in	ADP
cet-2775	18	2	this	this	DET
cet-2775	18	3	paper	paper	NOUN
cet-2775	18	4	,	,	PUNCT
cet-2775	18	5	the	the	DET
cet-2775	18	6	chemical	chemical	ADJ
cet-2775	18	7	mechanical	mechanical	ADJ
cet-2775	18	8	polishing	polishing	NOUN
cet-2775	18	9	(	(	PUNCT
cet-2775	18	10	cmp	cmp	NOUN
cet-2775	18	11	)	)	PUNCT
cet-2775	18	12	technology	technology	NOUN
cet-2775	18	13	,	,	PUNCT
cet-2775	18	14	which	which	PRON
cet-2775	18	15	combines	combine	VERB
cet-2775	18	16	the	the	DET
cet-2775	18	17	advantages	advantage	NOUN
cet-2775	18	18	of	of	ADP
cet-2775	18	19	chemical	chemical	ADJ
cet-2775	18	20	and	and	CCONJ
cet-2775	18	21	mechanical	mechanical	ADJ
cet-2775	18	22	polishing	polishing	NOUN
cet-2775	18	23	techniques	technique	NOUN
cet-2775	18	24	,	,	PUNCT
cet-2775	18	25	was	be	AUX
cet-2775	18	26	studied	study	VERB
cet-2775	18	27	to	to	PART
cet-2775	18	28	prepare	prepare	VERB
cet-2775	18	29	a	a	DET
cet-2775	18	30	polishing	polishing	NOUN
cet-2775	18	31	slurry	slurry	NOUN
cet-2775	18	32	suitable	suitable	ADJ
cet-2775	18	33	for	for	ADP
cet-2775	18	34	the	the	DET
cet-2775	18	35	new	new	ADJ
cet-2775	18	36	-	-	PUNCT
cet-2775	18	37	type	type	NOUN
cet-2775	18	38	aluminium	aluminium	NOUN
cet-2775	18	39	alloy	alloy	NOUN
cet-2775	18	40	and	and	CCONJ
cet-2775	18	41	tested	test	VERB
cet-2775	18	42	for	for	ADP
cet-2775	18	43	its	its	PRON
cet-2775	18	44	polishing	polish	VERB
cet-2775	18	45	performance	performance	NOUN
cet-2775	18	46	(	(	PUNCT
cet-2775	18	47	sheu	sheu	PROPN
cet-2775	18	48	et	et	PROPN
cet-2775	18	49	al	al	PROPN
cet-2775	18	50	.	.	PROPN
cet-2775	18	51	,	,	PUNCT
cet-2775	18	52	2012	2012	NUM
cet-2775	18	53	)	)	PUNCT
cet-2775	18	54	.	.	PUNCT
cet-2775	19	1	doi	doi	NOUN
cet-2775	19	2	:	:	PUNCT
cet-2775	19	3	10.3303	10.3303	NUM
cet-2775	19	4	/	/	SYM
cet-2775	19	5	cet1866117	cet1866117	NOUN
cet-2775	19	6	please	please	INTJ
cet-2775	19	7	cite	cite	VERB
cet-2775	19	8	this	this	DET
cet-2775	19	9	article	article	NOUN
cet-2775	19	10	as	as	ADP
cet-2775	19	11	:	:	PUNCT
cet-2775	19	12	zhao	zhao	PROPN
cet-2775	19	13	y.	y.	PROPN
cet-2775	19	14	,	,	PUNCT
cet-2775	19	15	yu	yu	PROPN
cet-2775	19	16	g.	g.	PROPN
cet-2775	19	17	,	,	PUNCT
cet-2775	19	18	li	li	PROPN
cet-2775	19	19	y.	y.	PROPN
cet-2775	19	20	,	,	PUNCT
cet-2775	19	21	wang	wang	PROPN
cet-2775	19	22	g.	g.	PROPN
cet-2775	19	23	,	,	PUNCT
cet-2775	19	24	2018	2018	NUM
cet-2775	19	25	,	,	PUNCT
cet-2775	19	26	preparation	preparation	NOUN
cet-2775	19	27	and	and	CCONJ
cet-2775	19	28	performance	performance	NOUN
cet-2775	19	29	study	study	NOUN
cet-2775	19	30	of	of	ADP
cet-2775	19	31	chemical	chemical	ADJ
cet-2775	19	32	mechanical	mechanical	ADJ
cet-2775	19	33	polishing	polishing	NOUN
cet-2775	19	34	slurry	slurry	NOUN
cet-2775	19	35	for	for	ADP
cet-2775	19	36	new	new	ADJ
cet-2775	19	37	-	-	PUNCT
cet-2775	19	38	type	type	NOUN
cet-2775	19	39	aluminium	aluminium	NOUN
cet-2775	19	40	alloy	alloy	NOUN
cet-2775	19	41	,	,	PUNCT
cet-2775	19	42	chemical	chemical	NOUN
cet-2775	19	43	engineering	engineering	NOUN
cet-2775	19	44	transactions	transaction	NOUN
cet-2775	19	45	,	,	PUNCT
cet-2775	19	46	66	66	NUM
cet-2775	19	47	,	,	PUNCT
cet-2775	19	48	697	697	NUM
cet-2775	19	49	-	-	SYM
cet-2775	19	50	702	702	NUM
cet-2775	19	51	doi:10.3303	doi:10.3303	NOUN
cet-2775	19	52	/	/	SYM
cet-2775	19	53	cet1866117	cet1866117	NOUN
cet-2775	19	54	697	697	NUM
cet-2775	19	55	2	2	NUM
cet-2775	19	56	.	.	PUNCT
cet-2775	19	57	preparation	preparation	NOUN
cet-2775	19	58	of	of	ADP
cet-2775	19	59	new	new	ADJ
cet-2775	19	60	-	-	PUNCT
cet-2775	19	61	type	type	NOUN
cet-2775	19	62	chemical	chemical	ADJ
cet-2775	19	63	mechanical	mechanical	ADJ
cet-2775	19	64	polishing	polishing	NOUN
cet-2775	19	65	slurry	slurry	VERB
cet-2775	19	66	2.1	2.1	NUM
cet-2775	19	67	composition	composition	NOUN
cet-2775	19	68	and	and	CCONJ
cet-2775	19	69	function	function	NOUN
cet-2775	19	70	of	of	ADP
cet-2775	19	71	chemical	chemical	ADJ
cet-2775	19	72	mechanical	mechanical	ADJ
cet-2775	19	73	polishing	polish	VERB
cet-2775	19	74	slurry	slurry	NOUN
cet-2775	19	75	chemical	chemical	ADJ
cet-2775	19	76	mechanical	mechanical	ADJ
cet-2775	19	77	polishing	polishing	NOUN
cet-2775	19	78	(	(	PUNCT
cet-2775	19	79	cmp	cmp	NOUN
cet-2775	19	80	)	)	PUNCT
cet-2775	19	81	combines	combine	VERB
cet-2775	19	82	the	the	DET
cet-2775	19	83	advantages	advantage	NOUN
cet-2775	19	84	of	of	ADP
cet-2775	19	85	chemical	chemical	NOUN
cet-2775	19	86	polishing	polishing	NOUN
cet-2775	19	87	and	and	CCONJ
cet-2775	19	88	mechanical	mechanical	ADJ
cet-2775	19	89	polishing	polishing	NOUN
cet-2775	19	90	.	.	PUNCT
cet-2775	20	1	it	it	PRON
cet-2775	20	2	is	be	AUX
cet-2775	20	3	currently	currently	ADV
cet-2775	20	4	the	the	DET
cet-2775	20	5	only	only	ADJ
cet-2775	20	6	surface	surface	NOUN
cet-2775	20	7	finishing	finish	VERB
cet-2775	20	8	technology	technology	NOUN
cet-2775	20	9	capable	capable	ADJ
cet-2775	20	10	of	of	ADP
cet-2775	20	11	achieving	achieve	VERB
cet-2775	20	12	overall	overall	ADJ
cet-2775	20	13	planarization	planarization	NOUN
cet-2775	20	14	(	(	PUNCT
cet-2775	20	15	luo	luo	PROPN
cet-2775	20	16	and	and	CCONJ
cet-2775	20	17	dornfeld	dornfeld	PROPN
cet-2775	20	18	,	,	PUNCT
cet-2775	20	19	2001	2001	NUM
cet-2775	20	20	;	;	PUNCT
cet-2775	20	21	ahmadi	ahmadi	PROPN
cet-2775	20	22	and	and	CCONJ
cet-2775	20	23	xia	xia	PROPN
cet-2775	20	24	,	,	PUNCT
cet-2775	20	25	2001	2001	NUM
cet-2775	20	26	;	;	PUNCT
cet-2775	20	27	currie	currie	PROPN
cet-2775	20	28	et	et	PROPN
cet-2775	20	29	al	al	PROPN
cet-2775	20	30	.	.	PROPN
cet-2775	20	31	,	,	PUNCT
cet-2775	20	32	1998	1998	NUM
cet-2775	20	33	;	;	PUNCT
cet-2775	20	34	park	park	NOUN
cet-2775	20	35	et	et	PROPN
cet-2775	20	36	al	al	PROPN
cet-2775	20	37	.	.	PROPN
cet-2775	20	38	,	,	PUNCT
cet-2775	20	39	2000	2000	NUM
cet-2775	20	40	.	.	PUNCT
cet-2775	21	1	the	the	DET
cet-2775	21	2	single	single	ADJ
cet-2775	21	3	mechanical	mechanical	ADJ
cet-2775	21	4	polishing	polishing	NOUN
cet-2775	21	5	can	can	AUX
cet-2775	21	6	obtain	obtain	VERB
cet-2775	21	7	a	a	DET
cet-2775	21	8	high	high	ADJ
cet-2775	21	9	surface	surface	NOUN
cet-2775	21	10	consistency	consistency	NOUN
cet-2775	21	11	but	but	CCONJ
cet-2775	21	12	damage	damage	VERB
cet-2775	21	13	the	the	DET
cet-2775	21	14	surface	surface	NOUN
cet-2775	21	15	and	and	CCONJ
cet-2775	21	16	reduce	reduce	VERB
cet-2775	21	17	the	the	DET
cet-2775	21	18	surface	surface	NOUN
cet-2775	21	19	finish	finish	NOUN
cet-2775	21	20	;	;	PUNCT
cet-2775	21	21	the	the	DET
cet-2775	21	22	single	single	ADJ
cet-2775	21	23	chemical	chemical	NOUN
cet-2775	21	24	polishing	polishing	NOUN
cet-2775	21	25	can	can	AUX
cet-2775	21	26	achieve	achieve	VERB
cet-2775	21	27	a	a	DET
cet-2775	21	28	higher	high	ADJ
cet-2775	21	29	surface	surface	NOUN
cet-2775	21	30	finish	finish	NOUN
cet-2775	21	31	despite	despite	SCONJ
cet-2775	21	32	of	of	ADP
cet-2775	21	33	the	the	DET
cet-2775	21	34	high	high	ADJ
cet-2775	21	35	polishing	polishing	NOUN
cet-2775	21	36	rate	rate	NOUN
cet-2775	21	37	and	and	CCONJ
cet-2775	21	38	low	low	ADJ
cet-2775	21	39	surface	surface	NOUN
cet-2775	21	40	damage	damage	NOUN
cet-2775	21	41	,	,	PUNCT
cet-2775	21	42	but	but	CCONJ
cet-2775	21	43	the	the	DET
cet-2775	21	44	overall	overall	ADJ
cet-2775	21	45	surface	surface	NOUN
cet-2775	21	46	of	of	ADP
cet-2775	21	47	the	the	DET
cet-2775	21	48	metal	metal	NOUN
cet-2775	21	49	after	after	ADP
cet-2775	21	50	polishing	polishing	NOUN
cet-2775	21	51	has	have	VERB
cet-2775	21	52	lower	low	ADJ
cet-2775	21	53	flatness	flatness	NOUN
cet-2775	21	54	;	;	PUNCT
cet-2775	21	55	therefore	therefore	ADV
cet-2775	21	56	,	,	PUNCT
cet-2775	21	57	the	the	DET
cet-2775	21	58	combination	combination	NOUN
cet-2775	21	59	of	of	ADP
cet-2775	21	60	both	both	PRON
cet-2775	21	61	can	can	AUX
cet-2775	21	62	improve	improve	VERB
cet-2775	21	63	the	the	DET
cet-2775	21	64	surface	surface	NOUN
cet-2775	21	65	flatness	flatness	NOUN
cet-2775	21	66	and	and	CCONJ
cet-2775	21	67	have	have	VERB
cet-2775	21	68	a	a	DET
cet-2775	21	69	high	high	ADJ
cet-2775	21	70	surface	surface	NOUN
cet-2775	21	71	finish	finish	NOUN
cet-2775	21	72	.	.	PUNCT
cet-2775	22	1	the	the	DET
cet-2775	22	2	slurry	slurry	NOUN
cet-2775	22	3	is	be	AUX
cet-2775	22	4	the	the	DET
cet-2775	22	5	core	core	NOUN
cet-2775	22	6	of	of	ADP
cet-2775	22	7	this	this	DET
cet-2775	22	8	technology	technology	NOUN
cet-2775	22	9	.	.	PUNCT
cet-2775	23	1	its	its	PRON
cet-2775	23	2	performance	performance	NOUN
cet-2775	23	3	and	and	CCONJ
cet-2775	23	4	ratio	ratio	NOUN
cet-2775	23	5	have	have	VERB
cet-2775	23	6	a	a	DET
cet-2775	23	7	decisive	decisive	ADJ
cet-2775	23	8	influence	influence	NOUN
cet-2775	23	9	on	on	ADP
cet-2775	23	10	the	the	DET
cet-2775	23	11	quality	quality	NOUN
cet-2775	23	12	of	of	ADP
cet-2775	23	13	the	the	DET
cet-2775	23	14	alloy	alloy	NOUN
cet-2775	23	15	surface	surface	NOUN
cet-2775	23	16	to	to	PART
cet-2775	23	17	be	be	AUX
cet-2775	23	18	processed	process	VERB
cet-2775	23	19	.	.	PUNCT
cet-2775	24	1	it	it	PRON
cet-2775	24	2	is	be	AUX
cet-2775	24	3	mainly	mainly	ADV
cet-2775	24	4	composed	compose	VERB
cet-2775	24	5	of	of	ADP
cet-2775	24	6	three	three	NUM
cet-2775	24	7	major	major	ADJ
cet-2775	24	8	parts	part	NOUN
cet-2775	24	9	:	:	PUNCT
cet-2775	24	10	the	the	DET
cet-2775	24	11	abrasive	abrasive	ADJ
cet-2775	24	12	particle	particle	NOUN
cet-2775	24	13	,	,	PUNCT
cet-2775	24	14	corrosive	corrosive	ADJ
cet-2775	24	15	medium	medium	NOUN
cet-2775	24	16	,	,	PUNCT
cet-2775	24	17	and	and	CCONJ
cet-2775	24	18	additive	additive	NOUN
cet-2775	24	19	,	,	PUNCT
cet-2775	24	20	which	which	DET
cet-2775	24	21	functions	function	NOUN
cet-2775	24	22	are	be	AUX
cet-2775	24	23	shown	show	VERB
cet-2775	24	24	in	in	ADP
cet-2775	24	25	figure	figure	NOUN
cet-2775	24	26	1	1	NUM
cet-2775	24	27	below	below	ADV
cet-2775	24	28	.	.	PUNCT
cet-2775	25	1	figure	figure	VERB
cet-2775	25	2	1	1	NUM
cet-2775	25	3	:	:	PUNCT
cet-2775	25	4	the	the	DET
cet-2775	25	5	composition	composition	NOUN
cet-2775	25	6	and	and	CCONJ
cet-2775	25	7	function	function	NOUN
cet-2775	25	8	of	of	ADP
cet-2775	25	9	the	the	DET
cet-2775	25	10	polishing	polish	VERB
cet-2775	25	11	liquid	liquid	ADJ
cet-2775	25	12	2.2	2.2	NUM
cet-2775	25	13	preparation	preparation	NOUN
cet-2775	25	14	process	process	NOUN
cet-2775	25	15	of	of	ADP
cet-2775	25	16	chemical	chemical	ADJ
cet-2775	25	17	mechanical	mechanical	ADJ
cet-2775	25	18	polishing	polishing	NOUN
cet-2775	25	19	slurry	slurry	VERB
cet-2775	25	20	2.2.1	2.2.1	NUM
cet-2775	25	21	test	test	NOUN
cet-2775	25	22	materials	material	NOUN
cet-2775	25	23	table	table	NOUN
cet-2775	25	24	1	1	NUM
cet-2775	25	25	below	below	ADP
cet-2775	25	26	lists	list	NOUN
cet-2775	25	27	the	the	DET
cet-2775	25	28	test	test	NOUN
cet-2775	25	29	materials	material	NOUN
cet-2775	25	30	.	.	PUNCT
cet-2775	26	1	table	table	NOUN
cet-2775	26	2	1	1	NUM
cet-2775	26	3	:	:	PUNCT
cet-2775	26	4	test	test	NOUN
cet-2775	26	5	materials	material	NOUN
cet-2775	26	6	reagent	reagent	ADJ
cet-2775	26	7	specification	specification	NOUN
cet-2775	26	8	function	function	NOUN
cet-2775	26	9	ceria	ceria	PROPN
cet-2775	26	10	industry	industry	NOUN
cet-2775	26	11	grade	grade	NOUN
cet-2775	26	12	raw	raw	ADJ
cet-2775	26	13	material	material	NOUN
cet-2775	26	14	ammonium	ammonium	NOUN
cet-2775	26	15	bicarbonate	bicarbonate	NOUN
cet-2775	26	16	industry	industry	NOUN
cet-2775	26	17	grade	grade	NOUN
cet-2775	26	18	raw	raw	ADJ
cet-2775	26	19	material	material	NOUN
cet-2775	26	20	ammonia	ammonia	NOUN
cet-2775	26	21	analytical	analytical	ADJ
cet-2775	26	22	purity	purity	NOUN
cet-2775	26	23	ph	ph	NOUN
cet-2775	26	24	regulator	regulator	NOUN
cet-2775	26	25	anhydrous	anhydrous	ADJ
cet-2775	26	26	ethanol	ethanol	NOUN
cet-2775	26	27	analytical	analytical	ADJ
cet-2775	26	28	purity	purity	NOUN
cet-2775	26	29	detergent	detergent	NOUN
cet-2775	26	30	organic	organic	ADJ
cet-2775	26	31	base	base	NOUN
cet-2775	26	32	analytical	analytical	ADJ
cet-2775	26	33	purity	purity	NOUN
cet-2775	26	34	ph	ph	NOUN
cet-2775	26	35	regulator	regulator	NOUN
cet-2775	26	36	sodium	sodium	NOUN
cet-2775	26	37	hydroxide	hydroxide	NOUN
cet-2775	26	38	analytical	analytical	ADJ
cet-2775	26	39	purity	purity	NOUN
cet-2775	26	40	ph	ph	NOUN
cet-2775	26	41	regulator	regulator	NOUN
cet-2775	26	42	sdbs	sdb	VERB
cet-2775	26	43	analytical	analytical	ADJ
cet-2775	26	44	purity	purity	NOUN
cet-2775	26	45	dispersant	dispersant	PROPN
cet-2775	26	46	sodium	sodium	NOUN
cet-2775	26	47	polyacrylate	polyacrylate	ADJ
cet-2775	26	48	analytical	analytical	ADJ
cet-2775	26	49	purity	purity	NOUN
cet-2775	26	50	dispersant	dispersant	NOUN
cet-2775	26	51	hexametaphosphate	hexametaphosphate	VERB
cet-2775	26	52	analytical	analytical	ADJ
cet-2775	26	53	purity	purity	NOUN
cet-2775	26	54	dispersant	dispersant	NOUN
cet-2775	26	55	hydrogen	hydrogen	NOUN
cet-2775	26	56	peroxide	peroxide	NOUN
cet-2775	26	57	analytical	analytical	ADJ
cet-2775	26	58	purity	purity	NOUN
cet-2775	26	59	oxidizer	oxidizer	NOUN
cet-2775	26	60	2.2.2	2.2.2	NUM
cet-2775	26	61	experimental	experimental	ADJ
cet-2775	26	62	technology	technology	NOUN
cet-2775	26	63	and	and	CCONJ
cet-2775	26	64	process	process	VERB
cet-2775	26	65	the	the	DET
cet-2775	26	66	preparation	preparation	NOUN
cet-2775	26	67	process	process	NOUN
cet-2775	26	68	of	of	ADP
cet-2775	26	69	this	this	DET
cet-2775	26	70	experimental	experimental	ADJ
cet-2775	26	71	cmp	cmp	NOUN
cet-2775	26	72	slurry	slurry	NOUN
cet-2775	26	73	was	be	AUX
cet-2775	26	74	mainly	mainly	ADV
cet-2775	26	75	divided	divide	VERB
cet-2775	26	76	into	into	ADP
cet-2775	26	77	two	two	NUM
cet-2775	26	78	steps	step	NOUN
cet-2775	26	79	:	:	PUNCT
cet-2775	26	80	(	(	PUNCT
cet-2775	26	81	1	1	X
cet-2775	26	82	)	)	PUNCT
cet-2775	26	83	preparation	preparation	NOUN
cet-2775	26	84	of	of	ADP
cet-2775	26	85	cerium	cerium	ADJ
cet-2775	26	86	oxide	oxide	NOUN
cet-2775	26	87	abrasives	abrasive	NOUN
cet-2775	26	88	:	:	PUNCT
cet-2775	26	89	in	in	ADP
cet-2775	26	90	this	this	DET
cet-2775	26	91	experiment	experiment	NOUN
cet-2775	26	92	,	,	PUNCT
cet-2775	26	93	cecl3	cecl3	PROPN
cet-2775	26	94	and	and	CCONJ
cet-2775	26	95	nh4hco3	nh4hco3	PROPN
cet-2775	26	96	were	be	AUX
cet-2775	26	97	used	use	VERB
cet-2775	26	98	to	to	PART
cet-2775	26	99	synthesize	synthesize	VERB
cet-2775	26	100	precursors	precursor	NOUN
cet-2775	26	101	through	through	ADP
cet-2775	26	102	the	the	DET
cet-2775	26	103	process	process	NOUN
cet-2775	26	104	of	of	ADP
cet-2775	26	105	precipitation	precipitation	NOUN
cet-2775	26	106	and	and	CCONJ
cet-2775	26	107	aging	aging	NOUN
cet-2775	26	108	,	,	PUNCT
cet-2775	26	109	and	and	CCONJ
cet-2775	26	110	then	then	ADV
cet-2775	26	111	the	the	DET
cet-2775	26	112	precursors	precursor	NOUN
cet-2775	26	113	were	be	AUX
cet-2775	26	114	calcined	calcine	VERB
cet-2775	26	115	to	to	PART
cet-2775	26	116	prepare	prepare	VERB
cet-2775	26	117	ceo2	ceo2	NOUN
cet-2775	26	118	powders	powder	NOUN
cet-2775	26	119	.	.	PUNCT
cet-2775	27	1	during	during	ADP
cet-2775	27	2	the	the	DET
cet-2775	27	3	preparation	preparation	NOUN
cet-2775	27	4	process	process	NOUN
cet-2775	27	5	,	,	PUNCT
cet-2775	27	6	attention	attention	NOUN
cet-2775	27	7	should	should	AUX
cet-2775	27	8	be	be	AUX
cet-2775	27	9	paid	pay	VERB
cet-2775	27	10	to	to	ADP
cet-2775	27	11	the	the	DET
cet-2775	27	12	effect	effect	NOUN
cet-2775	27	13	of	of	ADP
cet-2775	27	14	solution	solution	NOUN
cet-2775	27	15	concentration	concentration	NOUN
cet-2775	27	16	,	,	PUNCT
cet-2775	27	17	ph	ph	NOUN
cet-2775	27	18	,	,	PUNCT
cet-2775	27	19	and	and	CCONJ
cet-2775	27	20	temperature	temperature	NOUN
cet-2775	27	21	on	on	ADP
cet-2775	27	22	the	the	DET
cet-2775	27	23	particle	particle	NOUN
cet-2775	27	24	size	size	NOUN
cet-2775	27	25	of	of	ADP
cet-2775	27	26	the	the	DET
cet-2775	27	27	abrasive	abrasive	NOUN
cet-2775	27	28	.	.	PUNCT
cet-2775	28	1	(	(	PUNCT
cet-2775	28	2	2	2	X
cet-2775	28	3	)	)	PUNCT
cet-2775	28	4	preparation	preparation	NOUN
cet-2775	28	5	of	of	ADP
cet-2775	28	6	cmp	cmp	NOUN
cet-2775	28	7	slurry	slurry	NOUN
cet-2775	28	8	:	:	PUNCT
cet-2775	28	9	the	the	DET
cet-2775	28	10	polishing	polish	VERB
cet-2775	28	11	liquid	liquid	NOUN
cet-2775	28	12	was	be	AUX
cet-2775	28	13	prepared	prepare	VERB
cet-2775	28	14	by	by	ADP
cet-2775	28	15	using	use	VERB
cet-2775	28	16	the	the	DET
cet-2775	28	17	obtained	obtain	VERB
cet-2775	28	18	abrasive	abrasive	ADJ
cet-2775	28	19	material	material	NOUN
cet-2775	28	20	in	in	ADP
cet-2775	28	21	step	step	NOUN
cet-2775	28	22	1	1	NUM
cet-2775	28	23	that	that	PRON
cet-2775	28	24	meets	meet	VERB
cet-2775	28	25	the	the	DET
cet-2775	28	26	application	application	NOUN
cet-2775	28	27	requirements	requirement	NOUN
cet-2775	28	28	of	of	ADP
cet-2775	28	29	the	the	DET
cet-2775	28	30	polishing	polishing	NOUN
cet-2775	28	31	material	material	NOUN
cet-2775	28	32	.	.	PUNCT
cet-2775	29	1	the	the	DET
cet-2775	29	2	polishing	polish	VERB
cet-2775	29	3	effect	effect	NOUN
cet-2775	29	4	of	of	ADP
cet-2775	29	5	the	the	DET
cet-2775	29	6	cmp	cmp	NOUN
cet-2775	29	7	slurry	slurry	NOUN
cet-2775	29	8	698	698	NUM
cet-2775	29	9	was	be	AUX
cet-2775	29	10	determined	determine	VERB
cet-2775	29	11	by	by	ADP
cet-2775	29	12	the	the	DET
cet-2775	29	13	synergistic	synergistic	ADJ
cet-2775	29	14	effect	effect	NOUN
cet-2775	29	15	of	of	ADP
cet-2775	29	16	the	the	DET
cet-2775	29	17	chemical	chemical	NOUN
cet-2775	29	18	action	action	NOUN
cet-2775	29	19	and	and	CCONJ
cet-2775	29	20	the	the	DET
cet-2775	29	21	mechanical	mechanical	ADJ
cet-2775	29	22	action	action	NOUN
cet-2775	29	23	,	,	PUNCT
cet-2775	29	24	so	so	CCONJ
cet-2775	29	25	the	the	DET
cet-2775	29	26	composition	composition	NOUN
cet-2775	29	27	and	and	CCONJ
cet-2775	29	28	content	content	NOUN
cet-2775	29	29	of	of	ADP
cet-2775	29	30	the	the	DET
cet-2775	29	31	polishing	polish	VERB
cet-2775	29	32	slurry	slurry	NOUN
cet-2775	29	33	played	play	VERB
cet-2775	29	34	a	a	DET
cet-2775	29	35	decisive	decisive	ADJ
cet-2775	29	36	role	role	NOUN
cet-2775	29	37	in	in	ADP
cet-2775	29	38	the	the	DET
cet-2775	29	39	final	final	ADJ
cet-2775	29	40	polishing	polishing	NOUN
cet-2775	29	41	effect	effect	NOUN
cet-2775	29	42	.	.	PUNCT
cet-2775	30	1	during	during	ADP
cet-2775	30	2	the	the	DET
cet-2775	30	3	preparation	preparation	NOUN
cet-2775	30	4	of	of	ADP
cet-2775	30	5	the	the	DET
cet-2775	30	6	slurry	slurry	NOUN
cet-2775	30	7	,	,	PUNCT
cet-2775	30	8	the	the	DET
cet-2775	30	9	stability	stability	NOUN
cet-2775	30	10	and	and	CCONJ
cet-2775	30	11	dispersibility	dispersibility	NOUN
cet-2775	30	12	of	of	ADP
cet-2775	30	13	the	the	DET
cet-2775	30	14	cmp	cmp	NOUN
cet-2775	30	15	slurry	slurry	NOUN
cet-2775	30	16	were	be	AUX
cet-2775	30	17	ensured	ensure	VERB
cet-2775	30	18	by	by	ADP
cet-2775	30	19	adding	add	VERB
cet-2775	30	20	the	the	DET
cet-2775	30	21	dispersant	dispersant	NOUN
cet-2775	30	22	and	and	CCONJ
cet-2775	30	23	ph	ph	ADJ
cet-2775	30	24	adjuster	adjuster	NOUN
cet-2775	30	25	etc	etc	X
cet-2775	30	26	.	.	X
cet-2775	30	27	figure	figure	VERB
cet-2775	30	28	2	2	NUM
cet-2775	30	29	:	:	PUNCT
cet-2775	30	30	process	process	NOUN
cet-2775	30	31	flow	flow	NOUN
cet-2775	30	32	diagram	diagram	NOUN
cet-2775	30	33	3	3	NUM
cet-2775	30	34	.	.	PUNCT
cet-2775	31	1	chemical	chemical	ADJ
cet-2775	31	2	mechanical	mechanical	ADJ
cet-2775	31	3	polishing	polishing	NOUN
cet-2775	31	4	slurry	slurry	NOUN
cet-2775	31	5	formulation	formulation	NOUN
cet-2775	31	6	after	after	ADP
cet-2775	31	7	repeated	repeat	VERB
cet-2775	31	8	research	research	NOUN
cet-2775	31	9	and	and	CCONJ
cet-2775	31	10	comparison	comparison	NOUN
cet-2775	31	11	of	of	ADP
cet-2775	31	12	the	the	DET
cet-2775	31	13	preparation	preparation	NOUN
cet-2775	31	14	process	process	NOUN
cet-2775	31	15	,	,	PUNCT
cet-2775	31	16	the	the	DET
cet-2775	31	17	powder	powder	NOUN
cet-2775	31	18	of	of	ADP
cet-2775	31	19	slurry	slurry	NOUN
cet-2775	31	20	with	with	ADP
cet-2775	31	21	better	well	ADJ
cet-2775	31	22	crystallization	crystallization	NOUN
cet-2775	31	23	was	be	AUX
cet-2775	31	24	obtained	obtain	VERB
cet-2775	31	25	by	by	ADP
cet-2775	31	26	controlling	control	VERB
cet-2775	31	27	the	the	DET
cet-2775	31	28	ratio	ratio	NOUN
cet-2775	31	29	of	of	ADP
cet-2775	31	30	raw	raw	ADJ
cet-2775	31	31	materials	material	NOUN
cet-2775	31	32	,	,	PUNCT
cet-2775	31	33	the	the	DET
cet-2775	31	34	time	time	NOUN
cet-2775	31	35	and	and	CCONJ
cet-2775	31	36	temperature	temperature	NOUN
cet-2775	31	37	of	of	ADP
cet-2775	31	38	firing	firing	NOUN
cet-2775	31	39	etc	etc	X
cet-2775	31	40	.	.	PUNCT
cet-2775	32	1	the	the	DET
cet-2775	32	2	primary	primary	ADJ
cet-2775	32	3	particle	particle	NOUN
cet-2775	32	4	size	size	NOUN
cet-2775	32	5	of	of	ADP
cet-2775	32	6	the	the	DET
cet-2775	32	7	powder	powder	NOUN
cet-2775	32	8	was	be	AUX
cet-2775	32	9	less	less	ADJ
cet-2775	32	10	than	than	ADP
cet-2775	32	11	100	100	NUM
cet-2775	32	12	nm	nm	NOUN
cet-2775	32	13	,	,	PUNCT
cet-2775	32	14	with	with	ADP
cet-2775	32	15	the	the	DET
cet-2775	32	16	uniform	uniform	ADJ
cet-2775	32	17	size	size	NOUN
cet-2775	32	18	distribution	distribution	NOUN
cet-2775	32	19	.	.	PUNCT
cet-2775	33	1	so	so	ADV
cet-2775	33	2	,	,	PUNCT
cet-2775	33	3	it	it	PRON
cet-2775	33	4	can	can	AUX
cet-2775	33	5	be	be	AUX
cet-2775	33	6	used	use	VERB
cet-2775	33	7	for	for	ADP
cet-2775	33	8	the	the	DET
cet-2775	33	9	next	next	ADJ
cet-2775	33	10	-	-	PUNCT
cet-2775	33	11	step	step	NOUN
cet-2775	33	12	preparation	preparation	NOUN
cet-2775	33	13	of	of	ADP
cet-2775	33	14	the	the	DET
cet-2775	33	15	slurry	slurry	NOUN
cet-2775	33	16	.	.	PUNCT
cet-2775	34	1	the	the	DET
cet-2775	34	2	ratio	ratio	NOUN
cet-2775	34	3	of	of	ADP
cet-2775	34	4	the	the	DET
cet-2775	34	5	polishing	polishing	NOUN
cet-2775	34	6	slurry	slurry	NOUN
cet-2775	34	7	directly	directly	ADV
cet-2775	34	8	affects	affect	VERB
cet-2775	34	9	the	the	DET
cet-2775	34	10	final	final	ADJ
cet-2775	34	11	polishing	polishing	NOUN
cet-2775	34	12	rate	rate	NOUN
cet-2775	34	13	and	and	CCONJ
cet-2775	34	14	efficiency	efficiency	NOUN
cet-2775	34	15	.	.	PUNCT
cet-2775	35	1	in	in	ADP
cet-2775	35	2	this	this	DET
cet-2775	35	3	chapter	chapter	NOUN
cet-2775	35	4	,	,	PUNCT
cet-2775	35	5	stability	stability	NOUN
cet-2775	35	6	,	,	PUNCT
cet-2775	35	7	suspension	suspension	NOUN
cet-2775	35	8	property	property	NOUN
cet-2775	35	9	and	and	CCONJ
cet-2775	35	10	polishing	polish	VERB
cet-2775	35	11	efficiency	efficiency	NOUN
cet-2775	35	12	of	of	ADP
cet-2775	35	13	the	the	DET
cet-2775	35	14	polishing	polish	VERB
cet-2775	35	15	slurry	slurry	NOUN
cet-2775	35	16	were	be	AUX
cet-2775	35	17	improved	improve	VERB
cet-2775	35	18	by	by	ADP
cet-2775	35	19	adding	add	VERB
cet-2775	35	20	other	other	ADJ
cet-2775	35	21	chemical	chemical	ADJ
cet-2775	35	22	substances	substance	NOUN
cet-2775	35	23	.	.	PUNCT
cet-2775	36	1	3.1	3.1	NUM
cet-2775	36	2	ph	ph	NOUN
cet-2775	36	3	value	value	NOUN
cet-2775	36	4	determination	determination	NOUN
cet-2775	36	5	the	the	DET
cet-2775	36	6	proper	proper	ADJ
cet-2775	36	7	ph	ph	ADJ
cet-2775	36	8	value	value	NOUN
cet-2775	36	9	can	can	AUX
cet-2775	36	10	improve	improve	VERB
cet-2775	36	11	the	the	DET
cet-2775	36	12	stability	stability	NOUN
cet-2775	36	13	of	of	ADP
cet-2775	36	14	the	the	DET
cet-2775	36	15	polishing	polish	VERB
cet-2775	36	16	slurry	slurry	NOUN
cet-2775	36	17	.	.	PUNCT
cet-2775	37	1	only	only	ADV
cet-2775	37	2	when	when	SCONJ
cet-2775	37	3	the	the	DET
cet-2775	37	4	polishing	polishing	NOUN
cet-2775	37	5	material	material	NOUN
cet-2775	37	6	has	have	VERB
cet-2775	37	7	related	relate	VERB
cet-2775	37	8	requirement	requirement	NOUN
cet-2775	37	9	for	for	ADP
cet-2775	37	10	the	the	DET
cet-2775	37	11	ph	ph	ADJ
cet-2775	37	12	value	value	NOUN
cet-2775	37	13	,	,	PUNCT
cet-2775	37	14	the	the	DET
cet-2775	37	15	polishing	polish	VERB
cet-2775	37	16	efficiency	efficiency	NOUN
cet-2775	37	17	of	of	ADP
cet-2775	37	18	the	the	DET
cet-2775	37	19	slurry	slurry	NOUN
cet-2775	37	20	can	can	AUX
cet-2775	37	21	be	be	AUX
cet-2775	37	22	ensured	ensure	VERB
cet-2775	37	23	.	.	PUNCT
cet-2775	38	1	in	in	ADP
cet-2775	38	2	the	the	DET
cet-2775	38	3	experiment	experiment	NOUN
cet-2775	38	4	,	,	PUNCT
cet-2775	38	5	the	the	DET
cet-2775	38	6	stability	stability	NOUN
cet-2775	38	7	of	of	ADP
cet-2775	38	8	the	the	DET
cet-2775	38	9	slurry	slurry	NOUN
cet-2775	38	10	was	be	AUX
cet-2775	38	11	measured	measure	VERB
cet-2775	38	12	by	by	ADP
cet-2775	38	13	measuring	measure	VERB
cet-2775	38	14	the	the	DET
cet-2775	38	15	zeta	zeta	NOUN
cet-2775	38	16	potential	potential	NOUN
cet-2775	38	17	.	.	PUNCT
cet-2775	39	1	the	the	PRON
cet-2775	39	2	greater	great	ADJ
cet-2775	39	3	the	the	DET
cet-2775	39	4	absolute	absolute	ADJ
cet-2775	39	5	value	value	NOUN
cet-2775	39	6	of	of	ADP
cet-2775	39	7	the	the	DET
cet-2775	39	8	zeta	zeta	NOUN
cet-2775	39	9	potential	potential	NOUN
cet-2775	39	10	,	,	PUNCT
cet-2775	39	11	the	the	PRON
cet-2775	39	12	better	well	ADJ
cet-2775	39	13	the	the	DET
cet-2775	39	14	stability	stability	NOUN
cet-2775	39	15	of	of	ADP
cet-2775	39	16	the	the	DET
cet-2775	39	17	slurry	slurry	NOUN
cet-2775	39	18	.	.	PUNCT
cet-2775	40	1	therefore	therefore	ADV
cet-2775	40	2	,	,	PUNCT
cet-2775	40	3	the	the	DET
cet-2775	40	4	appropriate	appropriate	ADJ
cet-2775	40	5	ph	ph	NOUN
cet-2775	40	6	is	be	AUX
cet-2775	40	7	determined	determine	VERB
cet-2775	40	8	by	by	ADP
cet-2775	40	9	measuring	measure	VERB
cet-2775	40	10	the	the	DET
cet-2775	40	11	zeta	zeta	NOUN
cet-2775	40	12	potential	potential	NOUN
cet-2775	40	13	of	of	ADP
cet-2775	40	14	the	the	DET
cet-2775	40	15	polishing	polish	VERB
cet-2775	40	16	slurry	slurry	NOUN
cet-2775	40	17	at	at	ADP
cet-2775	40	18	different	different	ADJ
cet-2775	40	19	ph	ph	ADJ
cet-2775	40	20	values	value	NOUN
cet-2775	40	21	.	.	PUNCT
cet-2775	41	1	figure	figure	VERB
cet-2775	41	2	3	3	NUM
cet-2775	41	3	:	:	PUNCT
cet-2775	41	4	the	the	DET
cet-2775	41	5	relationship	relationship	NOUN
cet-2775	41	6	between	between	ADP
cet-2775	41	7	zeta	zeta	PROPN
cet-2775	41	8	potential	potential	ADJ
cet-2775	41	9	and	and	CCONJ
cet-2775	41	10	ph	ph	ADJ
cet-2775	41	11	value	value	NOUN
cet-2775	41	12	of	of	ADP
cet-2775	41	13	ceo2	ceo2	NOUN
cet-2775	41	14	suspension	suspension	NOUN
cet-2775	41	15	the	the	DET
cet-2775	41	16	experimental	experimental	ADJ
cet-2775	41	17	results	result	NOUN
cet-2775	41	18	(	(	PUNCT
cet-2775	41	19	figure	figure	NOUN
cet-2775	41	20	3	3	NUM
cet-2775	41	21	)	)	PUNCT
cet-2775	41	22	above	above	ADP
cet-2775	41	23	show	show	VERB
cet-2775	41	24	that	that	SCONJ
cet-2775	41	25	the	the	DET
cet-2775	41	26	absolute	absolute	ADJ
cet-2775	41	27	value	value	NOUN
cet-2775	41	28	of	of	ADP
cet-2775	41	29	the	the	DET
cet-2775	41	30	zeta	zeta	NOUN
cet-2775	41	31	potential	potential	ADJ
cet-2775	41	32	approaches	approach	NOUN
cet-2775	41	33	zero	zero	NUM
cet-2775	41	34	when	when	SCONJ
cet-2775	41	35	the	the	DET
cet-2775	41	36	ph	ph	NOUN
cet-2775	41	37	is	be	AUX
cet-2775	41	38	between	between	ADP
cet-2775	41	39	6	6	NUM
cet-2775	41	40	and	and	CCONJ
cet-2775	41	41	7	7	NUM
cet-2775	41	42	,	,	PUNCT
cet-2775	41	43	that	that	ADV
cet-2775	41	44	is	is	ADV
cet-2775	41	45	,	,	PUNCT
cet-2775	41	46	the	the	DET
cet-2775	41	47	neutral	neutral	ADJ
cet-2775	41	48	environment	environment	NOUN
cet-2775	41	49	.	.	PUNCT
cet-2775	42	1	when	when	SCONJ
cet-2775	42	2	the	the	DET
cet-2775	42	3	ph	ph	NOUN
cet-2775	42	4	is	be	AUX
cet-2775	42	5	around	around	ADV
cet-2775	42	6	4	4	NUM
cet-2775	42	7	and	and	CCONJ
cet-2775	42	8	10	10	NUM
cet-2775	42	9	,	,	PUNCT
cet-2775	42	10	the	the	DET
cet-2775	42	11	absolute	absolute	ADJ
cet-2775	42	12	values	value	NOUN
cet-2775	42	13	of	of	ADP
cet-2775	42	14	the	the	DET
cet-2775	42	15	zeta	zeta	PROPN
cet-2775	42	16	potential	potential	NOUN
cet-2775	42	17	reach	reach	VERB
cet-2775	42	18	maximum	maximum	ADJ
cet-2775	42	19	value	value	NOUN
cet-2775	42	20	in	in	ADP
cet-2775	42	21	the	the	DET
cet-2775	42	22	acidic	acidic	ADJ
cet-2775	42	23	and	and	CCONJ
cet-2775	42	24	alkaline	alkaline	NOUN
cet-2775	42	25	states	state	NOUN
cet-2775	42	26	respectively	respectively	ADV
cet-2775	42	27	,	,	PUNCT
cet-2775	42	28	so	so	CCONJ
cet-2775	42	29	the	the	DET
cet-2775	42	30	overall	overall	ADJ
cet-2775	42	31	stability	stability	NOUN
cet-2775	42	32	is	be	AUX
cet-2775	42	33	best	good	ADJ
cet-2775	42	34	when	when	SCONJ
cet-2775	42	35	the	the	DET
cet-2775	42	36	ph	ph	NOUN
cet-2775	42	37	of	of	ADP
cet-2775	42	38	the	the	DET
cet-2775	42	39	entire	entire	ADJ
cet-2775	42	40	slurry	slurry	NOUN
cet-2775	42	41	is	be	AUX
cet-2775	42	42	around	around	ADV
cet-2775	42	43	4	4	NUM
cet-2775	42	44	or	or	CCONJ
cet-2775	42	45	10	10	NUM
cet-2775	42	46	.	.	PUNCT
cet-2775	43	1	however	however	ADV
cet-2775	43	2	,	,	PUNCT
cet-2775	43	3	at	at	ADP
cet-2775	43	4	4	4	NUM
cet-2775	43	5	ph	ph	NOUN
cet-2775	43	6	value	value	NOUN
cet-2775	43	7	,	,	PUNCT
cet-2775	43	8	the	the	DET
cet-2775	43	9	polishing	polish	VERB
cet-2775	43	10	slurry	slurry	NOUN
cet-2775	43	11	is	be	AUX
cet-2775	43	12	acidic	acidic	ADJ
cet-2775	43	13	with	with	ADP
cet-2775	43	14	too	too	ADV
cet-2775	43	15	strong	strong	ADJ
cet-2775	43	16	corrosive	corrosive	ADJ
cet-2775	43	17	effect	effect	NOUN
cet-2775	43	18	.	.	PUNCT
cet-2775	44	1	thus	thus	ADV
cet-2775	44	2	,	,	PUNCT
cet-2775	44	3	the	the	DET
cet-2775	44	4	alkaline	alkaline	NOUN
cet-2775	44	5	polishing	polishing	NOUN
cet-2775	44	6	slurry	slurry	NOUN
cet-2775	44	7	with	with	ADP
cet-2775	44	8	a	a	DET
cet-2775	44	9	ph	ph	NOUN
cet-2775	44	10	of	of	ADP
cet-2775	44	11	10	10	NUM
cet-2775	44	12	is	be	AUX
cet-2775	44	13	preferred	prefer	VERB
cet-2775	44	14	in	in	ADP
cet-2775	44	15	this	this	DET
cet-2775	44	16	paper	paper	NOUN
cet-2775	44	17	.	.	PUNCT
cet-2775	45	1	3.2	3.2	NUM
cet-2775	45	2	ph	ph	NOUN
cet-2775	45	3	adjuster	adjuster	NOUN
cet-2775	45	4	selection	selection	NOUN
cet-2775	45	5	after	after	ADP
cet-2775	45	6	determining	determine	VERB
cet-2775	45	7	the	the	DET
cet-2775	45	8	alkaline	alkaline	NOUN
cet-2775	45	9	polishing	polish	VERB
cet-2775	45	10	slurry	slurry	NOUN
cet-2775	45	11	,	,	PUNCT
cet-2775	45	12	the	the	DET
cet-2775	45	13	naoh	naoh	NOUN
cet-2775	45	14	,	,	PUNCT
cet-2775	45	15	p3	p3	NOUN
cet-2775	45	16	organic	organic	ADJ
cet-2775	45	17	base	base	NOUN
cet-2775	45	18	and	and	CCONJ
cet-2775	45	19	ammonia	ammonia	NOUN
cet-2775	45	20	water	water	NOUN
cet-2775	45	21	were	be	AUX
cet-2775	45	22	selected	select	VERB
cet-2775	45	23	to	to	PART
cet-2775	45	24	conduct	conduct	VERB
cet-2775	45	25	experiments	experiment	NOUN
cet-2775	45	26	.	.	PUNCT
cet-2775	46	1	they	they	PRON
cet-2775	46	2	were	be	AUX
cet-2775	46	3	diluted	dilute	VERB
cet-2775	46	4	and	and	CCONJ
cet-2775	46	5	then	then	ADV
cet-2775	46	6	the	the	DET
cet-2775	46	7	slurry	slurry	NOUN
cet-2775	46	8	was	be	AUX
cet-2775	46	9	added	add	VERB
cet-2775	46	10	when	when	SCONJ
cet-2775	46	11	adjusting	adjust	VERB
cet-2775	46	12	its	its	PRON
cet-2775	46	13	ph	ph	NOUN
cet-2775	46	14	to	to	ADP
cet-2775	46	15	10	10	NUM
cet-2775	46	16	.	.	PUNCT
cet-2775	47	1	finally	finally	ADV
cet-2775	47	2	,	,	PUNCT
cet-2775	47	3	the	the	DET
cet-2775	47	4	stability	stability	NOUN
cet-2775	47	5	of	of	ADP
cet-2775	47	6	the	the	DET
cet-2775	47	7	suspension	suspension	NOUN
cet-2775	47	8	liquid	liquid	NOUN
cet-2775	47	9	was	be	AUX
cet-2775	47	10	observed	observe	VERB
cet-2775	47	11	through	through	ADP
cet-2775	47	12	the	the	DET
cet-2775	47	13	sedimentation	sedimentation	NOUN
cet-2775	47	14	rate	rate	NOUN
cet-2775	47	15	.	.	PUNCT
cet-2775	48	1	699	699	NUM
cet-2775	48	2	figure	figure	NOUN
cet-2775	48	3	4	4	NUM
cet-2775	48	4	:	:	PUNCT
cet-2775	48	5	the	the	DET
cet-2775	48	6	relationship	relationship	NOUN
cet-2775	48	7	between	between	ADP
cet-2775	48	8	sedimentation	sedimentation	NOUN
cet-2775	48	9	rate	rate	NOUN
cet-2775	48	10	and	and	CCONJ
cet-2775	48	11	the	the	DET
cet-2775	48	12	time	time	NOUN
cet-2775	48	13	figure	figure	NOUN
cet-2775	48	14	4	4	NUM
cet-2775	48	15	shows	show	VERB
cet-2775	48	16	the	the	DET
cet-2775	48	17	precipitation	precipitation	NOUN
cet-2775	48	18	of	of	ADP
cet-2775	48	19	three	three	NUM
cet-2775	48	20	suspensions	suspension	NOUN
cet-2775	48	21	with	with	ADP
cet-2775	48	22	different	different	ADJ
cet-2775	48	23	ph	ph	ADJ
cet-2775	48	24	adjusters	adjuster	NOUN
cet-2775	48	25	over	over	ADP
cet-2775	48	26	time	time	NOUN
cet-2775	48	27	,	,	PUNCT
cet-2775	48	28	in	in	ADP
cet-2775	48	29	which	which	PRON
cet-2775	48	30	p3	p3	PROPN
cet-2775	48	31	organic	organic	ADJ
cet-2775	48	32	base	base	NOUN
cet-2775	48	33	completely	completely	ADV
cet-2775	48	34	settled	settle	VERB
cet-2775	48	35	in	in	ADP
cet-2775	48	36	a	a	DET
cet-2775	48	37	short	short	ADJ
cet-2775	48	38	period	period	NOUN
cet-2775	48	39	of	of	ADP
cet-2775	48	40	time	time	NOUN
cet-2775	48	41	,	,	PUNCT
cet-2775	48	42	while	while	SCONJ
cet-2775	48	43	the	the	DET
cet-2775	48	44	sedimentation	sedimentation	NOUN
cet-2775	48	45	rate	rate	NOUN
cet-2775	48	46	of	of	ADP
cet-2775	48	47	naoh	naoh	NOUN
cet-2775	48	48	and	and	CCONJ
cet-2775	48	49	ammonia	ammonia	NOUN
cet-2775	48	50	as	as	ADP
cet-2775	48	51	the	the	DET
cet-2775	48	52	adjuster	adjuster	NOUN
cet-2775	48	53	for	for	ADP
cet-2775	48	54	the	the	DET
cet-2775	48	55	polishing	polish	VERB
cet-2775	48	56	liquid	liquid	NOUN
cet-2775	48	57	remained	remain	VERB
cet-2775	48	58	relatively	relatively	ADV
cet-2775	48	59	low	low	ADJ
cet-2775	48	60	;	;	PUNCT
cet-2775	48	61	the	the	DET
cet-2775	48	62	sedimentation	sedimentation	NOUN
cet-2775	48	63	rate	rate	NOUN
cet-2775	48	64	after	after	ADP
cet-2775	48	65	7	7	NUM
cet-2775	48	66	days	day	NOUN
cet-2775	48	67	did	do	AUX
cet-2775	48	68	not	not	PART
cet-2775	48	69	exceed	exceed	VERB
cet-2775	48	70	5	5	NUM
cet-2775	48	71	%	%	NOUN
cet-2775	48	72	,	,	PUNCT
cet-2775	48	73	but	but	CCONJ
cet-2775	48	74	the	the	DET
cet-2775	48	75	ammonia	ammonia	NOUN
cet-2775	48	76	is	be	AUX
cet-2775	48	77	volatile	volatile	ADJ
cet-2775	48	78	,	,	PUNCT
cet-2775	48	79	easy	easy	ADJ
cet-2775	48	80	to	to	PART
cet-2775	48	81	cause	cause	VERB
cet-2775	48	82	environmental	environmental	ADJ
cet-2775	48	83	pollution	pollution	NOUN
cet-2775	48	84	,	,	PUNCT
cet-2775	48	85	so	so	SCONJ
cet-2775	48	86	the	the	DET
cet-2775	48	87	ph	ph	ADJ
cet-2775	48	88	adjuster	adjuster	NOUN
cet-2775	48	89	naoh	naoh	NOUN
cet-2775	48	90	was	be	AUX
cet-2775	48	91	selected	select	VERB
cet-2775	48	92	in	in	ADP
cet-2775	48	93	this	this	DET
cet-2775	48	94	paper	paper	NOUN
cet-2775	48	95	.	.	PUNCT
cet-2775	49	1	3.3	3.3	NUM
cet-2775	49	2	selection	selection	NOUN
cet-2775	49	3	of	of	ADP
cet-2775	49	4	dispersant	dispersant	NOUN
cet-2775	49	5	type	type	NOUN
cet-2775	49	6	the	the	DET
cet-2775	49	7	dispersant	dispersant	NOUN
cet-2775	49	8	is	be	AUX
cet-2775	49	9	added	add	VERB
cet-2775	49	10	to	to	PART
cet-2775	49	11	change	change	VERB
cet-2775	49	12	the	the	DET
cet-2775	49	13	force	force	NOUN
cet-2775	49	14	between	between	ADP
cet-2775	49	15	the	the	DET
cet-2775	49	16	suspended	suspend	VERB
cet-2775	49	17	particles	particle	NOUN
cet-2775	49	18	in	in	ADP
cet-2775	49	19	the	the	DET
cet-2775	49	20	polishing	polish	VERB
cet-2775	49	21	slurry	slurry	NOUN
cet-2775	49	22	o	o	NOUN
cet-2775	49	23	ensure	ensure	VERB
cet-2775	49	24	the	the	DET
cet-2775	49	25	stability	stability	NOUN
cet-2775	49	26	of	of	ADP
cet-2775	49	27	the	the	DET
cet-2775	49	28	entire	entire	ADJ
cet-2775	49	29	slurry	slurry	NOUN
cet-2775	49	30	.	.	PUNCT
cet-2775	50	1	five	five	NUM
cet-2775	50	2	dispersants	dispersant	NOUN
cet-2775	50	3	were	be	AUX
cet-2775	50	4	selected	select	VERB
cet-2775	50	5	to	to	PART
cet-2775	50	6	be	be	AUX
cet-2775	50	7	added	add	VERB
cet-2775	50	8	to	to	ADP
cet-2775	50	9	the	the	DET
cet-2775	50	10	suspension	suspension	NOUN
cet-2775	50	11	at	at	ADP
cet-2775	50	12	10ph	10ph	ADJ
cet-2775	50	13	value	value	NOUN
cet-2775	50	14	containing	contain	VERB
cet-2775	50	15	naoh	naoh	NOUN
cet-2775	50	16	as	as	ADP
cet-2775	50	17	the	the	DET
cet-2775	50	18	ph	ph	NOUN
cet-2775	50	19	adjuster	adjuster	NOUN
cet-2775	50	20	.	.	PUNCT
cet-2775	51	1	then	then	ADV
cet-2775	51	2	,	,	PUNCT
cet-2775	51	3	through	through	ADP
cet-2775	51	4	observing	observe	VERB
cet-2775	51	5	the	the	DET
cet-2775	51	6	corresponding	corresponding	ADJ
cet-2775	51	7	sedimentation	sedimentation	NOUN
cet-2775	51	8	rate	rate	NOUN
cet-2775	51	9	,	,	PUNCT
cet-2775	51	10	the	the	DET
cet-2775	51	11	most	most	ADV
cet-2775	51	12	suitable	suitable	ADJ
cet-2775	51	13	dispersant	dispersant	NOUN
cet-2775	51	14	could	could	AUX
cet-2775	51	15	be	be	AUX
cet-2775	51	16	chosen	choose	VERB
cet-2775	51	17	.	.	PUNCT
cet-2775	52	1	the	the	PRON
cet-2775	52	2	lower	low	ADJ
cet-2775	52	3	the	the	DET
cet-2775	52	4	sedimentation	sedimentation	NOUN
cet-2775	52	5	rate	rate	NOUN
cet-2775	52	6	,	,	PUNCT
cet-2775	52	7	the	the	DET
cet-2775	52	8	more	more	ADV
cet-2775	52	9	stable	stable	ADJ
cet-2775	52	10	the	the	DET
cet-2775	52	11	suspension	suspension	NOUN
cet-2775	52	12	system	system	NOUN
cet-2775	52	13	is	be	AUX
cet-2775	52	14	.	.	PUNCT
cet-2775	53	1	figure	figure	VERB
cet-2775	53	2	5	5	NUM
cet-2775	53	3	:	:	PUNCT
cet-2775	53	4	different	different	ADJ
cet-2775	53	5	type	type	NOUN
cet-2775	53	6	of	of	ADP
cet-2775	53	7	dispersant	dispersant	ADJ
cet-2775	53	8	suspension	suspension	NOUN
cet-2775	53	9	stability	stability	NOUN
cet-2775	53	10	the	the	DET
cet-2775	53	11	experimental	experimental	ADJ
cet-2775	53	12	results	result	NOUN
cet-2775	53	13	in	in	ADP
cet-2775	53	14	figure	figure	NOUN
cet-2775	53	15	5	5	NUM
cet-2775	53	16	show	show	VERB
cet-2775	53	17	that	that	SCONJ
cet-2775	53	18	the	the	DET
cet-2775	53	19	sedimentation	sedimentation	NOUN
cet-2775	53	20	rate	rate	NOUN
cet-2775	53	21	of	of	ADP
cet-2775	53	22	sodium	sodium	NOUN
cet-2775	53	23	polyacrylate	polyacrylate	NOUN
cet-2775	53	24	remains	remain	VERB
cet-2775	53	25	low	low	ADJ
cet-2775	53	26	for	for	ADP
cet-2775	53	27	a	a	DET
cet-2775	53	28	period	period	NOUN
cet-2775	53	29	of	of	ADP
cet-2775	53	30	time	time	NOUN
cet-2775	53	31	and	and	CCONJ
cet-2775	53	32	is	be	AUX
cet-2775	53	33	a	a	DET
cet-2775	53	34	suitable	suitable	ADJ
cet-2775	53	35	dispersant	dispersant	NOUN
cet-2775	53	36	;	;	PUNCT
cet-2775	53	37	that	that	PRON
cet-2775	53	38	of	of	ADP
cet-2775	53	39	sodium	sodium	NOUN
cet-2775	53	40	dodecyl	dodecyl	PROPN
cet-2775	53	41	benzene	benzene	NOUN
cet-2775	53	42	sulfonate	sulfonate	NOUN
cet-2775	53	43	at	at	ADP
cet-2775	53	44	the	the	DET
cet-2775	53	45	beginning	beginning	NOUN
cet-2775	53	46	is	be	AUX
cet-2775	53	47	already	already	ADV
cet-2775	53	48	close	close	ADJ
cet-2775	53	49	to	to	PART
cet-2775	53	50	100	100	NUM
cet-2775	53	51	%	%	NOUN
cet-2775	53	52	,	,	PUNCT
cet-2775	53	53	with	with	ADP
cet-2775	53	54	poor	poor	ADJ
cet-2775	53	55	dispersion	dispersion	NOUN
cet-2775	53	56	effect	effect	NOUN
cet-2775	53	57	;	;	PUNCT
cet-2775	53	58	the	the	DET
cet-2775	53	59	other	other	ADJ
cet-2775	53	60	three	three	NUM
cet-2775	53	61	peg4000	peg4000	NOUN
cet-2775	53	62	,	,	PUNCT
cet-2775	53	63	peg6000	peg6000	NOUN
cet-2775	53	64	and	and	CCONJ
cet-2775	53	65	sodium	sodium	NOUN
cet-2775	53	66	hexametaphosphate	hexametaphosphate	NOUN
cet-2775	53	67	all	all	PRON
cet-2775	53	68	have	have	VERB
cet-2775	53	69	similar	similar	ADJ
cet-2775	53	70	sedimentation	sedimentation	NOUN
cet-2775	53	71	patterns	pattern	NOUN
cet-2775	53	72	,	,	PUNCT
cet-2775	53	73	and	and	CCONJ
cet-2775	53	74	their	their	PRON
cet-2775	53	75	sedimentation	sedimentation	NOUN
cet-2775	53	76	rate	rate	NOUN
cet-2775	53	77	gradually	gradually	ADV
cet-2775	53	78	increases	increase	VERB
cet-2775	53	79	to	to	ADP
cet-2775	53	80	about	about	ADP
cet-2775	53	81	80	80	NUM
cet-2775	53	82	%	%	NOUN
cet-2775	53	83	.	.	PUNCT
cet-2775	54	1	therefore	therefore	ADV
cet-2775	54	2	,	,	PUNCT
cet-2775	54	3	the	the	DET
cet-2775	54	4	effect	effect	NOUN
cet-2775	54	5	of	of	ADP
cet-2775	54	6	sodium	sodium	NOUN
cet-2775	54	7	polyacrylate	polyacrylate	NOUN
cet-2775	54	8	on	on	ADP
cet-2775	54	9	the	the	DET
cet-2775	54	10	surface	surface	NOUN
cet-2775	54	11	of	of	ADP
cet-2775	54	12	cerium	cerium	NOUN
cet-2775	54	13	oxide	oxide	NOUN
cet-2775	54	14	is	be	AUX
cet-2775	54	15	better	well	ADJ
cet-2775	54	16	,	,	PUNCT
cet-2775	54	17	which	which	PRON
cet-2775	54	18	can	can	AUX
cet-2775	54	19	ensure	ensure	VERB
cet-2775	54	20	the	the	DET
cet-2775	54	21	stability	stability	NOUN
cet-2775	54	22	of	of	ADP
cet-2775	54	23	polishing	polish	VERB
cet-2775	54	24	slurry	slurry	NOUN
cet-2775	54	25	for	for	ADP
cet-2775	54	26	a	a	DET
cet-2775	54	27	long	long	ADJ
cet-2775	54	28	time	time	NOUN
cet-2775	54	29	.	.	PUNCT
cet-2775	55	1	it	it	PRON
cet-2775	55	2	is	be	AUX
cet-2775	55	3	a	a	DET
cet-2775	55	4	good	good	ADJ
cet-2775	55	5	dispersant	dispersant	NOUN
cet-2775	55	6	.	.	PUNCT
cet-2775	56	1	3.4	3.4	NUM
cet-2775	56	2	determination	determination	NOUN
cet-2775	56	3	of	of	ADP
cet-2775	56	4	dispersant	dispersant	NOUN
cet-2775	56	5	dosage	dosage	NOUN
cet-2775	56	6	sodium	sodium	NOUN
cet-2775	56	7	polyacrylate	polyacrylate	NOUN
cet-2775	56	8	was	be	AUX
cet-2775	56	9	used	use	VERB
cet-2775	56	10	as	as	ADP
cet-2775	56	11	a	a	DET
cet-2775	56	12	dispersant	dispersant	NOUN
cet-2775	56	13	and	and	CCONJ
cet-2775	56	14	the	the	DET
cet-2775	56	15	polishing	polish	VERB
cet-2775	56	16	slurry	slurry	NOUN
cet-2775	56	17	was	be	AUX
cet-2775	56	18	mixed	mix	VERB
cet-2775	56	19	with	with	ADP
cet-2775	56	20	1	1	NUM
cet-2775	56	21	to	to	PART
cet-2775	56	22	9	9	NUM
cet-2775	56	23	%	%	NOUN
cet-2775	56	24	proportion	proportion	NOUN
cet-2775	56	25	to	to	PART
cet-2775	56	26	observe	observe	VERB
cet-2775	56	27	the	the	DET
cet-2775	56	28	sedimentation	sedimentation	NOUN
cet-2775	56	29	rate	rate	NOUN
cet-2775	56	30	of	of	ADP
cet-2775	56	31	the	the	DET
cet-2775	56	32	suspension	suspension	NOUN
cet-2775	56	33	system	system	NOUN
cet-2775	56	34	.	.	PUNCT
cet-2775	57	1	the	the	DET
cet-2775	57	2	results	result	NOUN
cet-2775	57	3	in	in	ADP
cet-2775	57	4	figure	figure	NOUN
cet-2775	57	5	6	6	NUM
cet-2775	57	6	shows	show	VERB
cet-2775	57	7	that	that	SCONJ
cet-2775	57	8	when	when	SCONJ
cet-2775	57	9	the	the	DET
cet-2775	57	10	dispersant	dispersant	NOUN
cet-2775	57	11	content	content	NOUN
cet-2775	57	12	was	be	AUX
cet-2775	57	13	1	1	NUM
cet-2775	57	14	%	%	NOUN
cet-2775	57	15	,	,	PUNCT
cet-2775	57	16	the	the	DET
cet-2775	57	17	sedimentation	sedimentation	NOUN
cet-2775	57	18	rate	rate	NOUN
cet-2775	57	19	was	be	AUX
cet-2775	57	20	higher	high	ADJ
cet-2775	57	21	due	due	ADP
cet-2775	57	22	to	to	ADP
cet-2775	57	23	the	the	DET
cet-2775	57	24	insufficient	insufficient	ADJ
cet-2775	57	25	dispersant	dispersant	NOUN
cet-2775	57	26	dose	dose	NOUN
cet-2775	57	27	.	.	PUNCT
cet-2775	58	1	when	when	SCONJ
cet-2775	58	2	the	the	DET
cet-2775	58	3	dispersant	dispersant	NOUN
cet-2775	58	4	dose	dose	NOUN
cet-2775	58	5	was	be	AUX
cet-2775	58	6	added	add	VERB
cet-2775	58	7	to	to	ADP
cet-2775	58	8	3	3	NUM
cet-2775	58	9	%	%	NOUN
cet-2775	58	10	,	,	PUNCT
cet-2775	58	11	the	the	DET
cet-2775	58	12	sedimentation	sedimentation	NOUN
cet-2775	58	13	decreased	decrease	VERB
cet-2775	58	14	and	and	CCONJ
cet-2775	58	15	remained	remain	VERB
cet-2775	58	16	at	at	ADP
cet-2775	58	17	a	a	DET
cet-2775	58	18	low	low	ADJ
cet-2775	58	19	level	level	NOUN
cet-2775	58	20	,	,	PUNCT
cet-2775	58	21	which	which	PRON
cet-2775	58	22	has	have	VERB
cet-2775	58	23	the	the	DET
cet-2775	58	24	same	same	ADJ
cet-2775	58	25	effect	effect	NOUN
cet-2775	58	26	with	with	ADP
cet-2775	58	27	more	more	ADJ
cet-2775	58	28	than	than	ADP
cet-2775	58	29	3	3	NUM
cet-2775	58	30	%	%	NOUN
cet-2775	58	31	of	of	ADP
cet-2775	58	32	the	the	DET
cet-2775	58	33	dose	dose	NOUN
cet-2775	58	34	of	of	ADP
cet-2775	58	35	dispersant	dispersant	NOUN
cet-2775	58	36	.	.	PUNCT
cet-2775	59	1	so	so	ADV
cet-2775	59	2	,	,	PUNCT
cet-2775	59	3	3	3	NUM
cet-2775	59	4	%	%	NOUN
cet-2775	59	5	dispersant	dispersant	NOUN
cet-2775	59	6	content	content	NOUN
cet-2775	59	7	was	be	AUX
cet-2775	59	8	used	use	VERB
cet-2775	59	9	in	in	ADP
cet-2775	59	10	this	this	DET
cet-2775	59	11	paper	paper	NOUN
cet-2775	59	12	.	.	PUNCT
cet-2775	60	1	700	700	NUM
cet-2775	60	2	figure	figure	NOUN
cet-2775	60	3	6	6	NUM
cet-2775	60	4	:	:	PUNCT
cet-2775	60	5	suspension	suspension	NOUN
cet-2775	60	6	stability	stability	NOUN
cet-2775	60	7	of	of	ADP
cet-2775	60	8	the	the	DET
cet-2775	60	9	different	different	ADJ
cet-2775	60	10	amount	amount	NOUN
cet-2775	60	11	of	of	ADP
cet-2775	60	12	dispersant	dispersant	NOUN
cet-2775	60	13	4	4	NUM
cet-2775	60	14	.	.	PUNCT
cet-2775	60	15	performance	performance	NOUN
cet-2775	60	16	evaluation	evaluation	NOUN
cet-2775	60	17	of	of	ADP
cet-2775	60	18	chemical	chemical	ADJ
cet-2775	60	19	mechanical	mechanical	ADJ
cet-2775	60	20	polishing	polishing	NOUN
cet-2775	60	21	slurry	slurry	VERB
cet-2775	60	22	4.1	4.1	NUM
cet-2775	60	23	effect	effect	NOUN
cet-2775	60	24	of	of	ADP
cet-2775	60	25	slurry	slurry	NOUN
cet-2775	60	26	on	on	ADP
cet-2775	60	27	polishing	polish	VERB
cet-2775	60	28	removal	removal	NOUN
cet-2775	60	29	rate	rate	NOUN
cet-2775	60	30	the	the	DET
cet-2775	60	31	effect	effect	NOUN
cet-2775	60	32	of	of	ADP
cet-2775	60	33	ph	ph	ADJ
cet-2775	60	34	and	and	CCONJ
cet-2775	60	35	abrasive	abrasive	ADJ
cet-2775	60	36	content	content	NOUN
cet-2775	60	37	on	on	ADP
cet-2775	60	38	the	the	DET
cet-2775	60	39	polishing	polish	VERB
cet-2775	60	40	rate	rate	NOUN
cet-2775	60	41	was	be	AUX
cet-2775	60	42	determined	determine	VERB
cet-2775	60	43	by	by	ADP
cet-2775	60	44	polishing	polish	VERB
cet-2775	60	45	experiments	experiment	NOUN
cet-2775	60	46	on	on	ADP
cet-2775	60	47	new	new	ADJ
cet-2775	60	48	type	type	NOUN
cet-2775	60	49	aluminum	aluminum	NOUN
cet-2775	60	50	alloys	alloy	NOUN
cet-2775	60	51	with	with	ADP
cet-2775	60	52	different	different	ADJ
cet-2775	60	53	ph	ph	ADJ
cet-2775	60	54	and	and	CCONJ
cet-2775	60	55	abrasive	abrasive	ADJ
cet-2775	60	56	contents	content	NOUN
cet-2775	60	57	.	.	PUNCT
cet-2775	61	1	the	the	DET
cet-2775	61	2	experimental	experimental	ADJ
cet-2775	61	3	results	result	NOUN
cet-2775	61	4	in	in	ADP
cet-2775	61	5	figure	figure	NOUN
cet-2775	61	6	7	7	NUM
cet-2775	61	7	(	(	PUNCT
cet-2775	61	8	a	a	NOUN
cet-2775	61	9	)	)	PUNCT
cet-2775	61	10	shows	show	VERB
cet-2775	61	11	that	that	SCONJ
cet-2775	61	12	with	with	ADP
cet-2775	61	13	the	the	DET
cet-2775	61	14	increase	increase	NOUN
cet-2775	61	15	of	of	ADP
cet-2775	61	16	ph	ph	NOUN
cet-2775	61	17	,	,	PUNCT
cet-2775	61	18	the	the	DET
cet-2775	61	19	polishing	polish	VERB
cet-2775	61	20	rate	rate	NOUN
cet-2775	61	21	is	be	AUX
cet-2775	61	22	also	also	ADV
cet-2775	61	23	in	in	ADP
cet-2775	61	24	the	the	DET
cet-2775	61	25	linear	linear	ADJ
cet-2775	61	26	growth	growth	NOUN
cet-2775	61	27	,	,	PUNCT
cet-2775	61	28	and	and	CCONJ
cet-2775	61	29	at	at	ADP
cet-2775	61	30	the	the	DET
cet-2775	61	31	ph	ph	NOUN
cet-2775	61	32	of	of	ADP
cet-2775	61	33	10	10	NUM
cet-2775	61	34	,	,	PUNCT
cet-2775	61	35	the	the	DET
cet-2775	61	36	polishing	polish	VERB
cet-2775	61	37	rate	rate	NOUN
cet-2775	61	38	reaches	reach	VERB
cet-2775	61	39	the	the	DET
cet-2775	61	40	highest	high	ADJ
cet-2775	61	41	,	,	PUNCT
cet-2775	61	42	with	with	ADP
cet-2775	61	43	the	the	DET
cet-2775	61	44	best	good	ADJ
cet-2775	61	45	dispersion	dispersion	NOUN
cet-2775	61	46	performance	performance	NOUN
cet-2775	61	47	,	,	PUNCT
cet-2775	61	48	so	so	CCONJ
cet-2775	61	49	the	the	DET
cet-2775	61	50	ph	ph	NOUN
cet-2775	61	51	is	be	AUX
cet-2775	61	52	set	set	VERB
cet-2775	61	53	to	to	PART
cet-2775	61	54	be	be	AUX
cet-2775	61	55	10	10	NUM
cet-2775	61	56	.	.	PUNCT
cet-2775	62	1	in	in	ADP
cet-2775	62	2	figure	figure	NOUN
cet-2775	62	3	7	7	NUM
cet-2775	62	4	(	(	PUNCT
cet-2775	62	5	b	b	NOUN
cet-2775	62	6	)	)	PUNCT
cet-2775	62	7	,	,	PUNCT
cet-2775	62	8	the	the	DET
cet-2775	62	9	different	different	ADJ
cet-2775	62	10	abrasive	abrasive	ADJ
cet-2775	62	11	contents	content	NOUN
cet-2775	62	12	have	have	VERB
cet-2775	62	13	little	little	ADJ
cet-2775	62	14	effect	effect	NOUN
cet-2775	62	15	on	on	ADP
cet-2775	62	16	the	the	DET
cet-2775	62	17	polishing	polishing	NOUN
cet-2775	62	18	rate	rate	NOUN
cet-2775	62	19	,	,	PUNCT
cet-2775	62	20	and	and	CCONJ
cet-2775	62	21	the	the	DET
cet-2775	62	22	polishing	polish	VERB
cet-2775	62	23	rate	rate	NOUN
cet-2775	62	24	can	can	AUX
cet-2775	62	25	be	be	AUX
cet-2775	62	26	kept	keep	VERB
cet-2775	62	27	high	high	ADJ
cet-2775	62	28	at	at	ADP
cet-2775	62	29	2.5	2.5	NUM
cet-2775	62	30	%	%	NOUN
cet-2775	62	31	,	,	PUNCT
cet-2775	62	32	which	which	PRON
cet-2775	62	33	can	can	AUX
cet-2775	62	34	ensure	ensure	VERB
cet-2775	62	35	sufficient	sufficient	ADJ
cet-2775	62	36	chemical	chemical	ADJ
cet-2775	62	37	mechanical	mechanical	ADJ
cet-2775	62	38	polishing	polishing	NOUN
cet-2775	62	39	.	.	PUNCT
cet-2775	63	1	(	(	PUNCT
cet-2775	63	2	a	a	X
cet-2775	63	3	)	)	PUNCT
cet-2775	63	4	(	(	PUNCT
cet-2775	63	5	b	b	X
cet-2775	63	6	)	)	PUNCT
cet-2775	63	7	figure	figure	NOUN
cet-2775	63	8	7	7	NUM
cet-2775	63	9	:	:	PUNCT
cet-2775	63	10	removal	removal	NOUN
cet-2775	63	11	rate	rate	NOUN
cet-2775	63	12	of	of	ADP
cet-2775	63	13	the	the	DET
cet-2775	63	14	polishing	polish	VERB
cet-2775	63	15	solution	solution	NOUN
cet-2775	63	16	of	of	ADP
cet-2775	63	17	different	different	ADJ
cet-2775	63	18	ph	ph	NOUN
cet-2775	63	19	(	(	PUNCT
cet-2775	63	20	a	a	NOUN
cet-2775	63	21	)	)	PUNCT
cet-2775	63	22	and	and	CCONJ
cet-2775	63	23	abrasive	abrasive	ADJ
cet-2775	63	24	content	content	NOUN
cet-2775	63	25	(	(	PUNCT
cet-2775	63	26	b	b	NOUN
cet-2775	63	27	)	)	PUNCT
cet-2775	63	28	4.2	4.2	NUM
cet-2775	63	29	the	the	DET
cet-2775	63	30	effect	effect	NOUN
cet-2775	63	31	of	of	ADP
cet-2775	63	32	the	the	DET
cet-2775	63	33	slurry	slurry	NOUN
cet-2775	63	34	on	on	ADP
cet-2775	63	35	polished	polished	ADJ
cet-2775	63	36	surface	surface	NOUN
cet-2775	63	37	the	the	DET
cet-2775	63	38	polishing	polish	VERB
cet-2775	63	39	slurry	slurry	NOUN
cet-2775	63	40	prepared	prepare	VERB
cet-2775	63	41	under	under	ADP
cet-2775	63	42	the	the	DET
cet-2775	63	43	optimal	optimal	ADJ
cet-2775	63	44	conditions	condition	NOUN
cet-2775	63	45	was	be	AUX
cet-2775	63	46	used	use	VERB
cet-2775	63	47	to	to	PART
cet-2775	63	48	polish	polish	VERB
cet-2775	63	49	the	the	DET
cet-2775	63	50	new	new	ADJ
cet-2775	63	51	-	-	PUNCT
cet-2775	63	52	type	type	NOUN
cet-2775	63	53	aluminum	aluminum	NOUN
cet-2775	63	54	alloy	alloy	NOUN
cet-2775	63	55	.	.	PUNCT
cet-2775	64	1	scanning	scan	VERB
cet-2775	64	2	electron	electron	NOUN
cet-2775	64	3	microscope	microscope	NOUN
cet-2775	64	4	(	(	PUNCT
cet-2775	64	5	sem	sem	NOUN
cet-2775	64	6	)	)	PUNCT
cet-2775	64	7	was	be	AUX
cet-2775	64	8	adopted	adopt	VERB
cet-2775	64	9	to	to	PART
cet-2775	64	10	take	take	VERB
cet-2775	64	11	the	the	DET
cet-2775	64	12	pictures	picture	NOUN
cet-2775	64	13	before	before	ADP
cet-2775	64	14	and	and	CCONJ
cet-2775	64	15	after	after	ADP
cet-2775	64	16	polishing	polish	VERB
cet-2775	64	17	(	(	PUNCT
cet-2775	64	18	figure	figure	NOUN
cet-2775	64	19	8)	8)	NUM
cet-2775	64	20	.	.	PUNCT
cet-2775	65	1	it	it	PRON
cet-2775	65	2	is	be	AUX
cet-2775	65	3	found	find	VERB
cet-2775	65	4	that	that	SCONJ
cet-2775	65	5	after	after	ADP
cet-2775	65	6	polishing	polish	VERB
cet-2775	65	7	,	,	PUNCT
cet-2775	65	8	the	the	DET
cet-2775	65	9	surface	surface	NOUN
cet-2775	65	10	of	of	ADP
cet-2775	65	11	the	the	DET
cet-2775	65	12	aluminum	aluminum	NOUN
cet-2775	65	13	plate	plate	NOUN
cet-2775	65	14	is	be	AUX
cet-2775	65	15	smooth	smooth	ADJ
cet-2775	65	16	with	with	ADP
cet-2775	65	17	better	well	ADJ
cet-2775	65	18	polishing	polish	VERB
cet-2775	65	19	effect	effect	NOUN
cet-2775	65	20	.	.	PUNCT
cet-2775	66	1	(	(	PUNCT
cet-2775	66	2	a	a	X
cet-2775	66	3	)	)	PUNCT
cet-2775	66	4	(	(	PUNCT
cet-2775	66	5	b	b	X
cet-2775	66	6	)	)	PUNCT
cet-2775	66	7	figure	figure	NOUN
cet-2775	66	8	8	8	NUM
cet-2775	66	9	:	:	PUNCT
cet-2775	66	10	the	the	DET
cet-2775	66	11	polishing	polish	VERB
cet-2775	66	12	comparison	comparison	NOUN
cet-2775	66	13	sem	sem	PROPN
cet-2775	66	14	pictures	picture	NOUN
cet-2775	66	15	before	before	ADV
cet-2775	66	16	(	(	PUNCT
cet-2775	66	17	a	a	NOUN
cet-2775	66	18	)	)	PUNCT
cet-2775	66	19	and	and	CCONJ
cet-2775	66	20	after	after	ADP
cet-2775	66	21	(	(	PUNCT
cet-2775	66	22	b	b	NOUN
cet-2775	66	23	)	)	PUNCT
cet-2775	66	24	atomic	atomic	ADJ
cet-2775	66	25	force	force	NOUN
cet-2775	66	26	microscope	microscope	NOUN
cet-2775	66	27	(	(	PUNCT
cet-2775	66	28	afm	afm	PROPN
cet-2775	66	29	)	)	PUNCT
cet-2775	66	30	can	can	AUX
cet-2775	66	31	be	be	AUX
cet-2775	66	32	used	use	VERB
cet-2775	66	33	to	to	PART
cet-2775	66	34	study	study	VERB
cet-2775	66	35	the	the	DET
cet-2775	66	36	surface	surface	NOUN
cet-2775	66	37	results	result	NOUN
cet-2775	66	38	of	of	ADP
cet-2775	66	39	solid	solid	ADJ
cet-2775	66	40	materials	material	NOUN
cet-2775	66	41	.	.	PUNCT
cet-2775	67	1	the	the	DET
cet-2775	67	2	polishing	polish	VERB
cet-2775	67	3	effect	effect	NOUN
cet-2775	67	4	of	of	ADP
cet-2775	67	5	the	the	DET
cet-2775	67	6	polishing	polish	VERB
cet-2775	67	7	slurry	slurry	NOUN
cet-2775	67	8	was	be	AUX
cet-2775	67	9	observed	observe	VERB
cet-2775	67	10	and	and	CCONJ
cet-2775	67	11	judged	judge	VERB
cet-2775	67	12	by	by	ADP
cet-2775	67	13	testing	test	VERB
cet-2775	67	14	the	the	DET
cet-2775	67	15	afm	afm	PROPN
cet-2775	67	16	of	of	ADP
cet-2775	67	17	the	the	DET
cet-2775	67	18	new	new	ADJ
cet-2775	67	19	-	-	PUNCT
cet-2775	67	20	type	type	NOUN
cet-2775	67	21	aluminum	aluminum	NOUN
cet-2775	67	22	alloy	alloy	NOUN
cet-2775	67	23	before	before	ADV
cet-2775	67	24	and	and	CCONJ
cet-2775	67	25	after	after	ADP
cet-2775	67	26	polishing	polish	VERB
cet-2775	67	27	.	.	PUNCT
cet-2775	68	1	the	the	DET
cet-2775	68	2	data	datum	NOUN
cet-2775	68	3	of	of	ADP
cet-2775	68	4	afm	afm	PROPN
cet-2775	68	5	before	before	ADV
cet-2775	68	6	and	and	CCONJ
cet-2775	68	7	after	after	ADP
cet-2775	68	8	polishing	polish	VERB
cet-2775	68	9	are	be	AUX
cet-2775	68	10	shown	show	VERB
cet-2775	68	11	in	in	ADP
cet-2775	68	12	table	table	NOUN
cet-2775	68	13	2	2	NUM
cet-2775	68	14	and	and	CCONJ
cet-2775	68	15	figure	figure	VERB
cet-2775	68	16	9	9	NUM
cet-2775	68	17	.	.	PUNCT
cet-2775	69	1	701	701	NUM
cet-2775	69	2	table	table	NOUN
cet-2775	69	3	2	2	NUM
cet-2775	69	4	:	:	PUNCT
cet-2775	69	5	the	the	DET
cet-2775	69	6	data	datum	NOUN
cet-2775	69	7	of	of	ADP
cet-2775	69	8	afm	afm	PROPN
cet-2775	69	9	pictures	picture	NOUN
cet-2775	69	10	picture	picture	VERB
cet-2775	69	11	rp	rp	PROPN
cet-2775	69	12	/	/	SYM
cet-2775	69	13	nm	nm	PROPN
cet-2775	69	14	rm	rm	PROPN
cet-2775	69	15	/	/	SYM
cet-2775	69	16	nm	nm	PRON
cet-2775	69	17	ry	ry	PROPN
cet-2775	69	18	/	/	SYM
cet-2775	69	19	nm	nm	PROPN
cet-2775	69	20	ra	ra	PROPN
cet-2775	69	21	/	/	PROPN
cet-2775	69	22	nm	nm	PROPN
cet-2775	69	23	a	a	DET
cet-2775	69	24	653.661	653.661	NUM
cet-2775	69	25	-1085.658	-1085.658	NOUN
cet-2775	69	26	1808.209	1808.209	NUM
cet-2775	69	27	183.688	183.688	NUM
cet-2775	69	28	b	b	SYM
cet-2775	69	29	120.028	120.028	NUM
cet-2775	69	30	-118.534	-118.534	NUM
cet-2775	69	31	242.605	242.605	NUM
cet-2775	69	32	20.564	20.564	NUM
cet-2775	69	33	from	from	ADP
cet-2775	69	34	the	the	DET
cet-2775	69	35	figures	figure	NOUN
cet-2775	69	36	and	and	CCONJ
cet-2775	69	37	data	datum	NOUN
cet-2775	69	38	above	above	ADV
cet-2775	69	39	,	,	PUNCT
cet-2775	69	40	it	it	PRON
cet-2775	69	41	can	can	AUX
cet-2775	69	42	be	be	AUX
cet-2775	69	43	found	find	VERB
cet-2775	69	44	that	that	SCONJ
cet-2775	69	45	the	the	DET
cet-2775	69	46	roughness	roughness	NOUN
cet-2775	69	47	of	of	ADP
cet-2775	69	48	the	the	DET
cet-2775	69	49	aluminium	aluminium	NOUN
cet-2775	69	50	alloy	alloy	NOUN
cet-2775	69	51	surface	surface	NOUN
cet-2775	69	52	is	be	AUX
cet-2775	69	53	greatly	greatly	ADV
cet-2775	69	54	reduced	reduce	VERB
cet-2775	69	55	after	after	ADP
cet-2775	69	56	polishing	polishing	NOUN
cet-2775	69	57	,	,	PUNCT
cet-2775	69	58	and	and	CCONJ
cet-2775	69	59	the	the	DET
cet-2775	69	60	surface	surface	NOUN
cet-2775	69	61	roughness	roughness	NOUN
cet-2775	69	62	is	be	AUX
cet-2775	69	63	reduced	reduce	VERB
cet-2775	69	64	to	to	ADP
cet-2775	69	65	less	less	ADJ
cet-2775	69	66	than	than	ADP
cet-2775	69	67	20	20	NUM
cet-2775	69	68	%	%	NOUN
cet-2775	69	69	of	of	ADP
cet-2775	69	70	the	the	DET
cet-2775	69	71	original	original	NOUN
cet-2775	69	72	,	,	PUNCT
cet-2775	69	73	which	which	PRON
cet-2775	69	74	greatly	greatly	ADV
cet-2775	69	75	lowers	lower	VERB
cet-2775	69	76	the	the	DET
cet-2775	69	77	surface	surface	NOUN
cet-2775	69	78	roughness	roughness	NOUN
cet-2775	69	79	of	of	ADP
cet-2775	69	80	the	the	DET
cet-2775	69	81	aluminium	aluminium	NOUN
cet-2775	69	82	alloy	alloy	NOUN
cet-2775	69	83	and	and	CCONJ
cet-2775	69	84	has	have	VERB
cet-2775	69	85	a	a	DET
cet-2775	69	86	good	good	ADJ
cet-2775	69	87	polishing	polishing	NOUN
cet-2775	69	88	effect	effect	NOUN
cet-2775	69	89	.	.	PUNCT
cet-2775	70	1	5	5	X
cet-2775	70	2	.	.	X
cet-2775	70	3	conclusion	conclusion	NOUN
cet-2775	70	4	in	in	ADP
cet-2775	70	5	this	this	DET
cet-2775	70	6	paper	paper	NOUN
cet-2775	70	7	,	,	PUNCT
cet-2775	70	8	the	the	DET
cet-2775	70	9	preparation	preparation	NOUN
cet-2775	70	10	process	process	NOUN
cet-2775	70	11	and	and	CCONJ
cet-2775	70	12	polishing	polish	VERB
cet-2775	70	13	performance	performance	NOUN
cet-2775	70	14	evaluation	evaluation	NOUN
cet-2775	70	15	were	be	AUX
cet-2775	70	16	studied	study	VERB
cet-2775	70	17	for	for	ADP
cet-2775	70	18	the	the	DET
cet-2775	70	19	cmp	cmp	NOUN
cet-2775	70	20	slurry	slurry	NOUN
cet-2775	70	21	of	of	ADP
cet-2775	70	22	new	new	ADJ
cet-2775	70	23	-	-	PUNCT
cet-2775	70	24	type	type	NOUN
cet-2775	70	25	aluminium	aluminium	NOUN
cet-2775	70	26	alloy	alloy	NOUN
cet-2775	70	27	.	.	PUNCT
cet-2775	71	1	the	the	DET
cet-2775	71	2	specific	specific	ADJ
cet-2775	71	3	conclusions	conclusion	NOUN
cet-2775	71	4	are	be	AUX
cet-2775	71	5	as	as	SCONJ
cet-2775	71	6	follows	follow	VERB
cet-2775	71	7	:	:	PUNCT
cet-2775	71	8	acknowledgement	acknowledgement	NOUN
cet-2775	71	9	programme	programme	NOUN
cet-2775	71	10	of	of	ADP
cet-2775	71	11	the	the	DET
cet-2775	71	12	key	key	ADJ
cet-2775	71	13	scientific	scientific	ADJ
cet-2775	71	14	researh	researh	NOUN
cet-2775	71	15	project	project	NOUN
cet-2775	71	16	of	of	ADP
cet-2775	71	17	higher	high	ADJ
cet-2775	71	18	education	education	NOUN
cet-2775	71	19	institution	institution	NOUN
cet-2775	71	20	in	in	ADP
cet-2775	71	21	henan	henan	PROPN
cet-2775	71	22	province	province	PROPN
cet-2775	71	23	(	(	PUNCT
cet-2775	71	24	2018	2018	NUM
cet-2775	71	25	)	)	PUNCT
cet-2775	71	26	,	,	PUNCT
cet-2775	71	27	project	project	NOUN
cet-2775	71	28	number	number	NOUN
cet-2775	71	29	(	(	PUNCT
cet-2775	71	30	18a413007	18a413007	NUM
cet-2775	71	31	)	)	PUNCT
cet-2775	71	32	,	,	PUNCT
cet-2775	71	33	research	research	NOUN
cet-2775	71	34	on	on	ADP
cet-2775	71	35	robust	robust	ADJ
cet-2775	71	36	control	control	NOUN
cet-2775	71	37	of	of	ADP
cet-2775	71	38	intelligent	intelligent	ADJ
cet-2775	71	39	flexible	flexible	ADJ
cet-2775	71	40	body	body	NOUN
cet-2775	71	41	driver	driver	NOUN
cet-2775	71	42	with	with	ADP
cet-2775	71	43	the	the	DET
cet-2775	71	44	characteristics	characteristic	NOUN
cet-2775	71	45	of	of	ADP
cet-2775	71	46	non	non	ADJ
cet-2775	71	47	-	-	ADJ
cet-2775	71	48	monotone	monotone	ADJ
cet-2775	71	49	,	,	PUNCT
cet-2775	71	50	hysteresis	hysteresis	NOUN
cet-2775	71	51	and	and	CCONJ
cet-2775	71	52	being	be	AUX
cet-2775	71	53	asymmetric	asymmetric	ADJ
cet-2775	71	54	.	.	PUNCT
cet-2775	72	1	references	reference	NOUN
cet-2775	72	2	ahmadi	ahmadi	PROPN
cet-2775	72	3	g.	g.	PROPN
cet-2775	72	4	,	,	PUNCT
cet-2775	72	5	xia	xia	PROPN
cet-2775	72	6	x.	x.	PROPN
cet-2775	72	7	,	,	PUNCT
cet-2775	72	8	2001	2001	NUM
cet-2775	72	9	,	,	PUNCT
cet-2775	72	10	a	a	DET
cet-2775	72	11	model	model	NOUN
cet-2775	72	12	for	for	ADP
cet-2775	72	13	mechanical	mechanical	ADJ
cet-2775	72	14	wear	wear	NOUN
cet-2775	72	15	and	and	CCONJ
cet-2775	72	16	abrasive	abrasive	ADJ
cet-2775	72	17	particle	particle	NOUN
cet-2775	72	18	adhesion	adhesion	NOUN
cet-2775	72	19	during	during	ADP
cet-2775	72	20	the	the	DET
cet-2775	72	21	chemical	chemical	ADJ
cet-2775	72	22	mechanical	mechanical	ADJ
cet-2775	72	23	polishing	polishing	NOUN
cet-2775	72	24	process	process	NOUN
cet-2775	72	25	,	,	PUNCT
cet-2775	72	26	journal	journal	NOUN
cet-2775	72	27	of	of	ADP
cet-2775	72	28	the	the	DET
cet-2775	72	29	electrochemical	electrochemical	ADJ
cet-2775	72	30	society	society	NOUN
cet-2775	72	31	,	,	PUNCT
cet-2775	72	32	148(3	148(3	NUM
cet-2775	72	33	)	)	PUNCT
cet-2775	72	34	,	,	PUNCT
cet-2775	72	35	g99	g99	NOUN
cet-2775	72	36	-	-	PUNCT
cet-2775	72	37	g109	g109	PROPN
cet-2775	72	38	.	.	PUNCT
cet-2775	73	1	currie	currie	PROPN
cet-2775	73	2	m.t	m.t	PROPN
cet-2775	73	3	.	.	PROPN
cet-2775	73	4	,	,	PUNCT
cet-2775	73	5	samavedam	samavedam	PROPN
cet-2775	73	6	s.b	s.b	PROPN
cet-2775	73	7	.	.	PROPN
cet-2775	73	8	,	,	PUNCT
cet-2775	73	9	langdo	langdo	PROPN
cet-2775	73	10	t.a	t.a	PROPN
cet-2775	73	11	.	.	PROPN
cet-2775	73	12	,	,	PUNCT
cet-2775	73	13	leitz	leitz	PROPN
cet-2775	73	14	c.w	c.w	PROPN
cet-2775	73	15	.	.	PROPN
cet-2775	73	16	,	,	PUNCT
cet-2775	73	17	fitzgerald	fitzgerald	PROPN
cet-2775	73	18	e.a	e.a	PROPN
cet-2775	73	19	.	.	PROPN
cet-2775	73	20	,	,	PUNCT
cet-2775	73	21	1998	1998	NUM
cet-2775	73	22	,	,	PUNCT
cet-2775	73	23	controlling	control	VERB
cet-2775	73	24	threading	threading	NOUN
cet-2775	73	25	dislocation	dislocation	NOUN
cet-2775	73	26	densities	density	NOUN
cet-2775	73	27	in	in	ADP
cet-2775	73	28	ge	ge	PROPN
cet-2775	73	29	on	on	ADP
cet-2775	73	30	si	si	X
cet-2775	73	31	using	use	VERB
cet-2775	73	32	graded	grade	VERB
cet-2775	73	33	sige	sige	ADJ
cet-2775	73	34	layers	layer	NOUN
cet-2775	73	35	and	and	CCONJ
cet-2775	73	36	chemical	chemical	ADJ
cet-2775	73	37	-	-	PUNCT
cet-2775	73	38	mechanical	mechanical	ADJ
cet-2775	73	39	polishing	polishing	NOUN
cet-2775	73	40	,	,	PUNCT
cet-2775	73	41	appl	appl	NOUN
cet-2775	73	42	.	.	PUNCT
cet-2775	74	1	phys	phy	NOUN
cet-2775	74	2	.	.	PUNCT
cet-2775	75	1	lett	lett	PROPN
cet-2775	75	2	,	,	PUNCT
cet-2775	75	3	72(14	72(14	NOUN
cet-2775	75	4	)	)	PUNCT
cet-2775	75	5	,	,	PUNCT
cet-2775	75	6	1718	1718	NUM
cet-2775	75	7	-	-	SYM
cet-2775	75	8	1720	1720	NUM
cet-2775	75	9	.	.	PUNCT
cet-2775	76	1	hryniewicz	hryniewicz	PROPN
cet-2775	76	2	t.	t.	PROPN
cet-2775	76	3	,	,	PUNCT
cet-2775	76	4	rokicki	rokicki	PROPN
cet-2775	76	5	r.	r.	PROPN
cet-2775	76	6	,	,	PUNCT
cet-2775	76	7	rokosz	rokosz	PROPN
cet-2775	76	8	k.	k.	PROPN
cet-2775	76	9	,	,	PUNCT
cet-2775	76	10	2007	2007	NUM
cet-2775	76	11	,	,	PUNCT
cet-2775	76	12	magnetoelectropolishing	magnetoelectropolishe	VERB
cet-2775	76	13	for	for	ADP
cet-2775	76	14	metal	metal	NOUN
cet-2775	76	15	surface	surface	NOUN
cet-2775	76	16	modification	modification	NOUN
cet-2775	76	17	,	,	PUNCT
cet-2775	76	18	transactions	transaction	NOUN
cet-2775	76	19	of	of	ADP
cet-2775	76	20	the	the	DET
cet-2775	76	21	imf	imf	PROPN
cet-2775	76	22	,	,	PUNCT
cet-2775	76	23	85(6	85(6	NUM
cet-2775	76	24	)	)	PUNCT
cet-2775	76	25	,	,	PUNCT
cet-2775	76	26	325	325	NUM
cet-2775	76	27	-	-	SYM
cet-2775	76	28	332	332	NUM
cet-2775	76	29	,	,	PUNCT
cet-2775	76	30	doi	doi	NOUN
cet-2775	76	31	:	:	PUNCT
cet-2775	76	32	10.1179/174591907x246537	10.1179/174591907x246537	PROPN
cet-2775	76	33	.	.	PROPN
cet-2775	76	34	lee	lee	PROPN
cet-2775	76	35	g.w	g.w	PROPN
cet-2775	76	36	.	.	PROPN
cet-2775	76	37	,	,	PUNCT
cet-2775	76	38	ji	ji	PROPN
cet-2775	76	39	h.r	h.r	PROPN
cet-2775	76	40	.	.	PROPN
cet-2775	76	41	,	,	PUNCT
cet-2775	76	42	han	han	PROPN
cet-2775	76	43	w.	w.	PROPN
cet-2775	76	44	,	,	PUNCT
cet-2775	76	45	ahn	ahn	PROPN
cet-2775	76	46	k.h	k.h	PROPN
cet-2775	76	47	.	.	PROPN
cet-2775	76	48	,	,	PUNCT
cet-2775	77	1	oh	oh	INTJ
cet-2775	77	2	s.m	s.m	PROPN
cet-2775	77	3	.	.	PROPN
cet-2775	77	4	,	,	PUNCT
cet-2775	77	5	2010	2010	NUM
cet-2775	77	6	,	,	PUNCT
cet-2775	77	7	effect	effect	NOUN
cet-2775	77	8	of	of	ADP
cet-2775	77	9	slurry	slurry	NOUN
cet-2775	77	10	preparation	preparation	NOUN
cet-2775	77	11	process	process	NOUN
cet-2775	77	12	on	on	ADP
cet-2775	77	13	electrochemical	electrochemical	ADJ
cet-2775	77	14	performances	performance	NOUN
cet-2775	77	15	of	of	ADP
cet-2775	77	16	licoo	licoo	NOUN
cet-2775	77	17	2	2	NUM
cet-2775	77	18	,	,	PUNCT
cet-2775	77	19	composite	composite	ADJ
cet-2775	77	20	electrode	electrode	NOUN
cet-2775	77	21	,	,	PUNCT
cet-2775	77	22	journal	journal	NOUN
cet-2775	77	23	of	of	ADP
cet-2775	77	24	power	power	NOUN
cet-2775	77	25	sources	source	NOUN
cet-2775	77	26	,	,	PUNCT
cet-2775	77	27	195(18	195(18	NUM
cet-2775	77	28	)	)	PUNCT
cet-2775	77	29	,	,	PUNCT
cet-2775	77	30	6049	6049	NUM
cet-2775	77	31	-	-	SYM
cet-2775	77	32	6054	6054	NUM
cet-2775	77	33	.	.	PUNCT
cet-2775	78	1	luo	luo	PROPN
cet-2775	78	2	j.	j.	PROPN
cet-2775	78	3	,	,	PUNCT
cet-2775	78	4	dornfeld	dornfeld	VERB
cet-2775	78	5	d.a	d.a	PROPN
cet-2775	78	6	.	.	PROPN
cet-2775	78	7	,	,	PUNCT
cet-2775	78	8	2001	2001	NUM
cet-2775	78	9	,	,	PUNCT
cet-2775	78	10	material	material	NOUN
cet-2775	78	11	removal	removal	NOUN
cet-2775	78	12	mechanism	mechanism	NOUN
cet-2775	78	13	in	in	ADP
cet-2775	78	14	chemical	chemical	ADJ
cet-2775	78	15	mechanical	mechanical	ADJ
cet-2775	78	16	polishing	polishing	NOUN
cet-2775	78	17	:	:	PUNCT
cet-2775	78	18	theory	theory	NOUN
cet-2775	78	19	and	and	CCONJ
cet-2775	78	20	modelling	modelling	NOUN
cet-2775	78	21	,	,	PUNCT
cet-2775	78	22	semiconductor	semiconductor	NOUN
cet-2775	78	23	manufacturing	manufacturing	NOUN
cet-2775	78	24	ieee	ieee	NOUN
cet-2775	78	25	transactions	transaction	NOUN
cet-2775	78	26	,	,	PUNCT
cet-2775	78	27	14(2	14(2	NUM
cet-2775	78	28	)	)	PUNCT
cet-2775	78	29	,	,	PUNCT
cet-2775	78	30	112	112	NUM
cet-2775	78	31	-	-	SYM
cet-2775	78	32	133	133	NUM
cet-2775	78	33	,	,	PUNCT
cet-2775	78	34	doi	doi	NOUN
cet-2775	78	35	:	:	PUNCT
cet-2775	78	36	10.1109/66.920723	10.1109/66.920723	NUM
cet-2775	78	37	.	.	PUNCT
cet-2775	79	1	ma	ma	PROPN
cet-2775	79	2	.	.	PROPN
cet-2775	79	3	,	,	PUNCT
cet-2775	79	4	2012	2012	NUM
cet-2775	79	5	,	,	PUNCT
cet-2775	79	6	research	research	NOUN
cet-2775	79	7	progress	progress	NOUN
cet-2775	79	8	of	of	ADP
cet-2775	79	9	aluminum	aluminum	NOUN
cet-2775	79	10	alloy	alloy	NOUN
cet-2775	79	11	automotive	automotive	ADJ
cet-2775	79	12	sheet	sheet	NOUN
cet-2775	79	13	and	and	CCONJ
cet-2775	79	14	application	application	NOUN
cet-2775	79	15	technology	technology	NOUN
cet-2775	79	16	,	,	PUNCT
cet-2775	79	17	engineering	engineering	NOUN
cet-2775	79	18	sciences	science	NOUN
cet-2775	79	19	,	,	PUNCT
cet-2775	79	20	10(4	10(4	NUM
cet-2775	79	21	)	)	PUNCT
cet-2775	79	22	,	,	PUNCT
cet-2775	79	23	29	29	NUM
cet-2775	79	24	-	-	SYM
cet-2775	79	25	34	34	NUM
cet-2775	79	26	.	.	PUNCT
cet-2775	80	1	mondolfo	mondolfo	PROPN
cet-2775	80	2	l.f	l.f	PROPN
cet-2775	80	3	.	.	PROPN
cet-2775	80	4	,	,	PUNCT
cet-2775	80	5	1976	1976	NUM
cet-2775	80	6	,	,	PUNCT
cet-2775	80	7	aluminum	aluminum	NOUN
cet-2775	80	8	alloy	alloy	NOUN
cet-2775	80	9	:	:	PUNCT
cet-2775	80	10	structure	structure	NOUN
cet-2775	80	11	and	and	CCONJ
cet-2775	80	12	properties	property	NOUN
cet-2775	80	13	.	.	PUNCT
cet-2775	80	14	,	,	PUNCT
cet-2775	80	15	31(11	31(11	NUM
cet-2775	80	16	)	)	PUNCT
cet-2775	80	17	,	,	PUNCT
cet-2775	80	18	651	651	NUM
cet-2775	80	19	-	-	SYM
cet-2775	80	20	657	657	NUM
cet-2775	80	21	.	.	PUNCT
cet-2775	81	1	park	park	PROPN
cet-2775	81	2	s.s	s.s	PROPN
cet-2775	81	3	.	.	PROPN
cet-2775	81	4	,	,	PUNCT
cet-2775	82	1	cho	cho	PROPN
cet-2775	82	2	c.h	c.h	PROPN
cet-2775	82	3	.	.	PROPN
cet-2775	82	4	,	,	PUNCT
cet-2775	82	5	ahn	ahn	PROPN
cet-2775	82	6	y.	y.	PROPN
cet-2775	82	7	,	,	PUNCT
cet-2775	82	8	2000	2000	NUM
cet-2775	82	9	,	,	PUNCT
cet-2775	82	10	hydrodynamic	hydrodynamic	ADJ
cet-2775	82	11	analysis	analysis	NOUN
cet-2775	82	12	of	of	ADP
cet-2775	82	13	chemical	chemical	ADJ
cet-2775	82	14	mechanical	mechanical	ADJ
cet-2775	82	15	polishing	polishing	NOUN
cet-2775	82	16	process	process	NOUN
cet-2775	82	17	,	,	PUNCT
cet-2775	82	18	tribology	tribology	NOUN
cet-2775	82	19	international	international	NOUN
cet-2775	82	20	,	,	PUNCT
cet-2775	82	21	33(10	33(10	NUM
cet-2775	82	22	)	)	PUNCT
cet-2775	82	23	,	,	PUNCT
cet-2775	82	24	723	723	NUM
cet-2775	82	25	-	-	SYM
cet-2775	82	26	730	730	NUM
cet-2775	82	27	,	,	PUNCT
cet-2775	82	28	doi	doi	NOUN
cet-2775	82	29	:	:	PUNCT
cet-2775	82	30	10.1016	10.1016	NUM
cet-2775	82	31	/	/	SYM
cet-2775	82	32	s0301	s0301	PROPN
cet-2775	82	33	-	-	PUNCT
cet-2775	82	34	679x(00)00114	679x(00)00114	NUM
cet-2775	82	35	-	-	PUNCT
cet-2775	82	36	6	6	NUM
cet-2775	82	37	.	.	PUNCT
cet-2775	83	1	sheu	sheu	PROPN
cet-2775	83	2	d.d	d.d	PROPN
cet-2775	83	3	.	.	PROPN
cet-2775	83	4	,	,	PUNCT
cet-2775	83	5	chen	chen	PROPN
cet-2775	83	6	c.h	c.h	PROPN
cet-2775	83	7	.	.	PROPN
cet-2775	83	8	,	,	PUNCT
cet-2775	83	9	yu	yu	PROPN
cet-2775	84	1	p.y	p.y	PROPN
cet-2775	84	2	.	.	PROPN
cet-2775	84	3	,	,	PUNCT
cet-2775	84	4	2012	2012	NUM
cet-2775	84	5	,	,	PUNCT
cet-2775	84	6	invention	invention	NOUN
cet-2775	84	7	principles	principle	NOUN
cet-2775	84	8	and	and	CCONJ
cet-2775	84	9	contradiction	contradiction	NOUN
cet-2775	84	10	matrix	matrix	NOUN
cet-2775	84	11	for	for	ADP
cet-2775	84	12	semiconductor	semiconductor	NOUN
cet-2775	84	13	manufacturing	manufacturing	NOUN
cet-2775	84	14	industry	industry	NOUN
cet-2775	84	15	:	:	PUNCT
cet-2775	84	16	chemical	chemical	ADJ
cet-2775	84	17	mechanical	mechanical	ADJ
cet-2775	84	18	polishing	polishing	NOUN
cet-2775	84	19	,	,	PUNCT
cet-2775	84	20	journal	journal	NOUN
cet-2775	84	21	of	of	ADP
cet-2775	84	22	intelligent	intelligent	ADJ
cet-2775	84	23	manufacturing	manufacturing	NOUN
cet-2775	84	24	,	,	PUNCT
cet-2775	84	25	23(5	23(5	NUM
cet-2775	84	26	)	)	PUNCT
cet-2775	84	27	,	,	PUNCT
cet-2775	84	28	16371648	16371648	NUM
cet-2775	84	29	.	.	PUNCT
cet-2775	85	1	sun	sun	PROPN
cet-2775	85	2	h.b	h.b	PROPN
cet-2775	85	3	.	.	PROPN
cet-2775	85	4	,	,	PUNCT
cet-2775	85	5	yi	yi	PROPN
cet-2775	85	6	l.	l.	PROPN
cet-2775	85	7	,	,	PUNCT
cet-2775	85	8	xiong	xiong	PROPN
cet-2775	85	9	s.x	s.x	PROPN
cet-2775	85	10	.	.	PROPN
cet-2775	85	11	,	,	PUNCT
cet-2775	85	12	yuan	yuan	PROPN
cet-2775	85	13	f.s	f.s	PROPN
cet-2775	85	14	.	.	PROPN
cet-2775	85	15	,	,	PUNCT
cet-2775	85	16	2009	2009	NUM
cet-2775	85	17	,	,	PUNCT
cet-2775	85	18	a	a	DET
cet-2775	85	19	research	research	NOUN
cet-2775	85	20	on	on	ADP
cet-2775	85	21	environment	environment	NOUN
cet-2775	85	22	friendly	friendly	ADJ
cet-2775	85	23	smokeless	smokeless	NOUN
cet-2775	85	24	chemical	chemical	NOUN
cet-2775	85	25	polishing	polish	VERB
cet-2775	85	26	technology	technology	NOUN
cet-2775	85	27	for	for	ADP
cet-2775	85	28	aluminum	aluminum	NOUN
cet-2775	85	29	alloy	alloy	NOUN
cet-2775	85	30	,	,	PUNCT
cet-2775	85	31	electroplating	electroplating	NOUN
cet-2775	85	32	&	&	CCONJ
cet-2775	85	33	pollution	pollution	NOUN
cet-2775	85	34	control	control	NOUN
cet-2775	85	35	,	,	PUNCT
cet-2775	85	36	29(5	29(5	NUM
cet-2775	85	37	)	)	PUNCT
cet-2775	85	38	,	,	PUNCT
cet-2775	85	39	20	20	NUM
cet-2775	85	40	-	-	SYM
cet-2775	85	41	23	23	NUM
cet-2775	85	42	.	.	PUNCT
cet-2775	86	1	sun	sun	PROPN
cet-2775	86	2	j.	j.	PROPN
cet-2775	86	3	,	,	PUNCT
cet-2775	86	4	kang	kang	PROPN
cet-2775	86	5	y.	y.	PROPN
cet-2775	86	6	,	,	PUNCT
cet-2775	86	7	xiao	xiao	PROPN
cet-2775	86	8	b.	b.	PROPN
cet-2775	86	9	,	,	PUNCT
cet-2775	86	10	an	an	DET
cet-2775	86	11	l.	l.	PROPN
cet-2775	86	12	,	,	PUNCT
cet-2775	86	13	2004	2004	NUM
cet-2775	86	14	,	,	PUNCT
cet-2775	86	15	slurry	slurry	VERB
cet-2775	86	16	preparation	preparation	NOUN
cet-2775	86	17	and	and	CCONJ
cet-2775	86	18	semi	semi	ADJ
cet-2775	86	19	-	-	ADJ
cet-2775	86	20	solid	solid	ADJ
cet-2775	86	21	process	process	NOUN
cet-2775	86	22	of	of	ADP
cet-2775	86	23	magnesium	magnesium	NOUN
cet-2775	86	24	alloy	alloy	NOUN
cet-2775	86	25	,	,	PUNCT
cet-2775	86	26	chinese	chinese	ADJ
cet-2775	86	27	journal	journal	NOUN
cet-2775	86	28	of	of	ADP
cet-2775	86	29	rare	rare	ADJ
cet-2775	86	30	metals	metal	NOUN
cet-2775	86	31	,	,	PUNCT
cet-2775	86	32	28(1	28(1	NOUN
cet-2775	86	33	)	)	PUNCT
cet-2775	86	34	,	,	PUNCT
cet-2775	86	35	104	104	NUM
cet-2775	86	36	-	-	SYM
cet-2775	86	37	107	107	NUM
cet-2775	86	38	.	.	PUNCT
cet-2775	87	1	urbano	urbano	PROPN
cet-2775	87	2	l.o	l.o	PROPN
cet-2775	87	3	.	.	PROPN
cet-2775	87	4	,	,	PUNCT
cet-2775	87	5	gordillo	gordillo	PROPN
cet-2775	87	6	m.	m.	NOUN
cet-2775	87	7	,	,	PUNCT
cet-2775	87	8	franco	franco	PROPN
cet-2775	87	9	,	,	PUNCT
cet-2775	87	10	f.	f.	PROPN
cet-2775	87	11	,	,	PUNCT
cet-2775	87	12	2014	2014	NUM
cet-2775	87	13	,	,	PUNCT
cet-2775	87	14	optimization	optimization	NOUN
cet-2775	87	15	of	of	ADP
cet-2775	87	16	friction	friction	NOUN
cet-2775	87	17	stir	stir	VERB
cet-2775	87	18	welding	welding	NOUN
cet-2775	87	19	of	of	ADP
cet-2775	87	20	aluminum	aluminum	NOUN
cet-2775	87	21	alloy	alloy	NOUN
cet-2775	87	22	aa	aa	NOUN
cet-2775	87	23	6261	6261	NUM
cet-2775	87	24	-	-	PUNCT
cet-2775	87	25	t5	t5	PROPN
cet-2775	87	26	through	through	ADP
cet-2775	87	27	application	application	NOUN
cet-2775	87	28	of	of	ADP
cet-2775	87	29	response	response	NOUN
cet-2775	87	30	surface	surface	NOUN
cet-2775	87	31	methodology	methodology	NOUN
cet-2775	87	32	,	,	PUNCT
cet-2775	87	33	revista	revista	PROPN
cet-2775	87	34	latinoamericana	latinoamericana	PROPN
cet-2775	87	35	de	de	X
cet-2775	87	36	metalurgia	metalurgia	PROPN
cet-2775	87	37	y	y	PROPN
cet-2775	87	38	materiales	materiale	NOUN
cet-2775	87	39	,	,	PUNCT
cet-2775	87	40	34(1	34(1	NUM
cet-2775	87	41	)	)	PUNCT
cet-2775	87	42	,	,	PUNCT
cet-2775	87	43	55	55	NUM
cet-2775	87	44	-	-	SYM
cet-2775	87	45	65	65	NUM
cet-2775	87	46	.	.	PUNCT
cet-2775	88	1	zhang	zhang	PROPN
cet-2775	88	2	x.g	x.g	PROPN
cet-2775	88	3	.	.	PROPN
cet-2775	88	4	,	,	PUNCT
cet-2775	88	5	collins	collins	PROPN
cet-2775	88	6	s.d	s.d	PROPN
cet-2775	88	7	.	.	PROPN
cet-2775	88	8	,	,	PUNCT
cet-2775	88	9	smith	smith	PROPN
cet-2775	88	10	r.l	r.l	PROPN
cet-2775	88	11	.	.	PROPN
cet-2775	88	12	,	,	PUNCT
cet-2775	88	13	1989	1989	NUM
cet-2775	88	14	,	,	PUNCT
cet-2775	88	15	porous	porous	ADJ
cet-2775	88	16	silicon	silicon	NOUN
cet-2775	88	17	formation	formation	NOUN
cet-2775	88	18	and	and	CCONJ
cet-2775	88	19	electropolishing	electropolishing	NOUN
cet-2775	88	20	of	of	ADP
cet-2775	88	21	silicon	silicon	NOUN
cet-2775	88	22	by	by	ADP
cet-2775	88	23	anodic	anodic	ADJ
cet-2775	88	24	polarization	polarization	NOUN
cet-2775	88	25	in	in	ADP
cet-2775	88	26	hf	hf	PROPN
cet-2775	88	27	solution	solution	NOUN
cet-2775	88	28	,	,	PUNCT
cet-2775	88	29	journal	journal	NOUN
cet-2775	88	30	of	of	ADP
cet-2775	88	31	the	the	DET
cet-2775	88	32	electrochemical	electrochemical	ADJ
cet-2775	88	33	society	society	NOUN
cet-2775	88	34	,	,	PUNCT
cet-2775	88	35	136(5	136(5	NUM
cet-2775	88	36	)	)	PUNCT
cet-2775	88	37	,	,	PUNCT
cet-2775	88	38	1561	1561	NUM
cet-2775	88	39	-	-	SYM
cet-2775	88	40	1565	1565	NUM
cet-2775	88	41	.	.	PUNCT
cet-2775	89	1	zhao	zhao	PROPN
cet-2775	89	2	j.	j.	PROPN
cet-2775	89	3	,	,	PUNCT
cet-2775	89	4	saito	saito	PROPN
cet-2775	89	5	k.	k.	PROPN
cet-2775	89	6	,	,	PUNCT
cet-2775	89	7	kondo	kondo	PROPN
cet-2775	89	8	t.	t.	PROPN
cet-2775	89	9	,	,	PUNCT
cet-2775	89	10	narahara	narahara	PROPN
cet-2775	89	11	h.	h.	PROPN
cet-2775	89	12	,	,	PUNCT
cet-2775	89	13	igarashi	igarashi	PROPN
cet-2775	89	14	s.	s.	PROPN
cet-2775	89	15	,	,	PUNCT
cet-2775	89	16	sasaki	sasaki	PROPN
cet-2775	89	17	t.	t.	PROPN
cet-2775	89	18	,	,	PUNCT
cet-2775	89	19	1995	1995	NUM
cet-2775	89	20	,	,	PUNCT
cet-2775	89	21	a	a	DET
cet-2775	89	22	new	new	ADJ
cet-2775	89	23	method	method	NOUN
cet-2775	89	24	of	of	ADP
cet-2775	89	25	automatic	automatic	ADJ
cet-2775	89	26	polishing	polishing	NOUN
cet-2775	89	27	on	on	ADP
cet-2775	89	28	curved	curved	ADJ
cet-2775	89	29	aluminium	aluminium	NOUN
cet-2775	89	30	alloy	alloy	NOUN
cet-2775	89	31	surfaces	surface	NOUN
cet-2775	89	32	at	at	ADP
cet-2775	89	33	constant	constant	ADJ
cet-2775	89	34	pressure	pressure	NOUN
cet-2775	89	35	,	,	PUNCT
cet-2775	89	36	international	international	ADJ
cet-2775	89	37	journal	journal	NOUN
cet-2775	89	38	of	of	ADP
cet-2775	89	39	machine	machine	NOUN
cet-2775	89	40	tools	tool	NOUN
cet-2775	89	41	&	&	CCONJ
cet-2775	89	42	manufacture	manufacture	NOUN
cet-2775	89	43	,	,	PUNCT
cet-2775	89	44	35(12	35(12	NUM
cet-2775	89	45	)	)	PUNCT
cet-2775	89	46	,	,	PUNCT
cet-2775	89	47	1683	1683	NUM
cet-2775	89	48	-	-	SYM
cet-2775	89	49	1692	1692	NUM
cet-2775	89	50	.	.	PUNCT
cet-2775	90	1	702	702	NUM