id	sid	eid	entity	type
cana-1575	1	1	1074	CARDINAL
cana-1575	2	1	2024	CARDINAL
cana-1575	2	2	644	CARDINAL
cana-1575	2	3	saurabh singh2	PERSON
cana-1575	2	4	n.t.suryawanshi3	GPE
cana-1575	2	5	1research	CARDINAL
cana-1575	2	6	jagdishprasad jhabarmal tibrewala university	PERSON
cana-1575	3	1	2associate	CARDINAL
cana-1575	3	2	jagdishprasad jhabarmal tibrewala university	PERSON
cana-1575	4	1	3associate	CARDINAL
cana-1575	4	2	vidya pratishthan	PERSON
cana-1575	4	3	bajaj institute of engineering & technology	ORG
cana-1575	4	4	baramati	ORG
cana-1575	4	5	pune	GPE
cana-1575	4	6	maharashtra (	ORG
cana-1575	4	7	4assistant	PERSON
cana-1575	5	1	pune	GPE
cana-1575	5	2	maharashtra (ramghogare@gmail.com	ORG
cana-1575	5	3	28	CARDINAL
cana-1575	5	4	09-07-2024	CARDINAL
cana-1575	5	5	27-07-2024	CARDINAL
cana-1575	8	1	28-day	DATE
cana-1575	8	2	0.0045	CARDINAL
cana-1575	8	3	7	CARDINAL
cana-1575	8	4	14	DATE
cana-1575	9	1	day 28	DATE
cana-1575	9	2	0.0030	CARDINAL
cana-1575	12	1	0.0015%	PERCENT
cana-1575	12	2	0.0030%	PERCENT
cana-1575	12	3	0.0045%	PERCENT
cana-1575	14	1	1	CARDINAL
cana-1575	14	2	' 1889	DATE
cana-1575	15	1	the 1950s	DATE
cana-1575	15	2	soviet	NORP
cana-1575	15	3	first	ORDINAL
cana-1575	15	4	soviet	NORP
cana-1575	16	1	50	CARDINAL
cana-1575	17	1	from 1997 to 2003	DATE
cana-1575	17	2	40%	PERCENT
cana-1575	17	3	€40 billion	MONEY
cana-1575	21	1	2	CARDINAL
cana-1575	21	2	approximately 100,000	CARDINAL
cana-1575	22	1	mailto:ntsuryawanshi@gmail.com	NORP
cana-1575	23	1	1074	CARDINAL
cana-1575	24	1	2024	CARDINAL
cana-1575	24	2	645	CARDINAL
cana-1575	24	3	2	CARDINAL
cana-1575	24	4	tio2	GPE
cana-1575	27	1	two	CARDINAL
cana-1575	27	2	0.4	CARDINAL
cana-1575	27	3	4	CARDINAL
cana-1575	29	1	approximately 500	CARDINAL
cana-1575	29	2	100	CARDINAL
cana-1575	30	1	over millions	CARDINAL
cana-1575	31	1	1	CARDINAL
cana-1575	31	2	2	CARDINAL
cana-1575	31	3	2.1	CARDINAL
cana-1575	33	1	99%	PERCENT
cana-1575	34	1	10-30	CARDINAL
cana-1575	35	1	method：cvd	ORG
cana-1575	35	2	1	CARDINAL
cana-1575	35	3	10-30	CARDINAL
cana-1575	35	4	5	CARDINAL
cana-1575	35	5	99	CARDINAL
cana-1575	35	6	tga & tem	ORG
cana-1575	36	1	10	CARDINAL
cana-1575	36	2	tem	ORG
cana-1575	36	3	ssa m2	PERSON
cana-1575	36	4	110-350	CARDINAL
cana-1575	36	5	tga ec s	ORG
cana-1575	36	6	100	CARDINAL
cana-1575	36	7	wt.% xps & titration	ORG
cana-1575	36	8	1074	CARDINAL
cana-1575	37	1	2024	CARDINAL
cana-1575	37	2	646	CARDINAL
cana-1575	37	3	3	CARDINAL
cana-1575	37	4	2.1.1	CARDINAL
cana-1575	38	1	tem	ORG
cana-1575	38	2	4	CARDINAL
cana-1575	38	3	2.2	CARDINAL
cana-1575	40	1	99%	PERCENT
cana-1575	41	1	1.8-4	CARDINAL
cana-1575	41	2	method：cvd	ORG
cana-1575	41	3	2	CARDINAL
cana-1575	41	4	1.8+4	QUANTITY
cana-1575	41	5	5	CARDINAL
cana-1575	41	6	99.99	CARDINAL
cana-1575	41	7	tga & tem	ORG
cana-1575	42	1	tem	ORG
cana-1575	42	2	ssa m2	PERSON
cana-1575	42	3	490	CARDINAL
cana-1575	42	4	tga ec s	ORG
cana-1575	42	5	100	CARDINAL
cana-1575	42	6	50-500	CARDINAL
cana-1575	42	7	wt.% xps & titration	ORG
cana-1575	42	8	1074	CARDINAL
cana-1575	43	1	2024	CARDINAL
cana-1575	43	2	647	CARDINAL
cana-1575	43	3	5	CARDINAL
cana-1575	43	4	2.2.1	CARDINAL
cana-1575	44	1	tem	ORG
cana-1575	44	2	6	CARDINAL
cana-1575	44	3	•	CARDINAL
cana-1575	45	1	•	CARDINAL
cana-1575	46	1	•	CARDINAL
cana-1575	47	1	•	CARDINAL
cana-1575	48	1	•	CARDINAL
cana-1575	50	1	3	CARDINAL
cana-1575	51	1	10262-2019	DATE
cana-1575	51	2	1:2.56:3.46	CARDINAL
cana-1575	51	3	0.5	CARDINAL
cana-1575	53	1	3.1	CARDINAL
cana-1575	58	1	1074	CARDINAL
cana-1575	59	1	2024	CARDINAL
cana-1575	59	2	648	CARDINAL
cana-1575	59	3	3	CARDINAL
cana-1575	61	1	0.0015%	PERCENT
cana-1575	61	2	0.0030%	PERCENT
cana-1575	61	3	0.0045%	PERCENT
cana-1575	61	4	1 7	CARDINAL
cana-1575	61	5	16.52	CARDINAL
cana-1575	61	6	20.34	CARDINAL
cana-1575	61	7	22.11	CARDINAL
cana-1575	61	8	18.0	CARDINAL
cana-1575	61	9	26.4	CARDINAL
cana-1575	61	10	4	CARDINAL
cana-1575	63	1	0.0015%	PERCENT
cana-1575	63	2	0.0030%	PERCENT
cana-1575	63	3	0.0045%	PERCENT
cana-1575	63	4	16.52	CARDINAL
cana-1575	63	5	24.57	CARDINAL
cana-1575	63	6	31.6 2	CARDINAL
cana-1575	63	7	34 3 28	TIME
cana-1575	63	8	26.4	CARDINAL
cana-1575	63	9	37.4	CARDINAL
cana-1575	63	10	5	CARDINAL
cana-1575	65	1	0.0015%	PERCENT
cana-1575	65	2	0.0030%	PERCENT
cana-1575	65	3	0.0045%	PERCENT
cana-1575	65	4	6.9	CARDINAL
cana-1575	65	5	12.6 13.3 12.9 3 28	QUANTITY
cana-1575	65	6	13.2	CARDINAL
cana-1575	65	7	13.5	CARDINAL
cana-1575	65	8	13.8 13.9	CARDINAL
cana-1575	65	9	1074	CARDINAL
cana-1575	66	1	2024	CARDINAL
cana-1575	67	1	649	CARDINAL
cana-1575	67	2	6	CARDINAL
cana-1575	69	1	0.0015%	PERCENT
cana-1575	69	2	0.0030%	PERCENT
cana-1575	69	3	0.0045%	PERCENT
cana-1575	69	4	1	CARDINAL
cana-1575	69	5	3.63	CARDINAL
cana-1575	69	6	12.2	CARDINAL
cana-1575	69	7	13.1	CARDINAL
cana-1575	69	8	13.7	CARDINAL
cana-1575	69	9	13.3	CARDINAL
cana-1575	69	10	13.6	CARDINAL
cana-1575	69	11	0.0015%	PERCENT
cana-1575	69	12	17.42%	PERCENT
cana-1575	69	13	4.92%	PERCENT
cana-1575	70	1	•	CARDINAL
cana-1575	70	2	0.0030%	PERCENT
cana-1575	70	3	20.64%	PERCENT
cana-1575	70	4	18.33%	PERCENT
cana-1575	71	1	•	CARDINAL
cana-1575	71	2	0.0045%	PERCENT
cana-1575	71	3	28.40%	PERCENT
cana-1575	71	4	41.66%	PERCENT
cana-1575	72	1	0.0015%	PERCENT
cana-1575	72	2	2.27%	PERCENT
cana-1575	72	3	2.25%	PERCENT
cana-1575	73	1	0.0030%	PERCENT
cana-1575	73	2	4.54%	PERCENT
cana-1575	73	3	6.01%	PERCENT
cana-1575	74	1	0.0045%	PERCENT
cana-1575	74	2	5.30%	PERCENT
cana-1575	74	3	7.51%	PERCENT
cana-1575	75	1	1074	CARDINAL
cana-1575	76	1	2024	CARDINAL
cana-1575	76	2	650	CARDINAL
cana-1575	76	3	•	CARDINAL
cana-1575	76	4	•	CARDINAL
cana-1575	77	1	1	CARDINAL
cana-1575	77	2	s. e., &	PERSON
cana-1575	77	3	2020,	DATE
cana-1575	77	4	april 22	DATE
cana-1575	79	1	45(3	CARDINAL
cana-1575	79	2	235248	DATE
cana-1575	80	1	2	CARDINAL
cana-1575	80	2	x.	GPE
cana-1575	80	3	zhang, s., & wu	ORG
cana-1575	80	4	z.	PERSON
cana-1575	80	5	2022	CARDINAL
cana-1575	82	1	1021-1035	CARDINAL
cana-1575	83	1	3	CARDINAL
cana-1575	83	2	zhong	PERSON
cana-1575	83	3	x.	GPE
cana-1575	83	4	h. r.	PERSON
cana-1575	83	5	2023	CARDINAL
cana-1575	83	6	march 16	DATE
cana-1575	85	1	55(6	CARDINAL
cana-1575	85	2	789802	DATE
cana-1575	86	1	4	CARDINAL
cana-1575	86	2	r. b.	PERSON
cana-1575	86	3	s. k.	PERSON
cana-1575	86	4	hande	GPE
cana-1575	86	5	s. a.	PERSON
cana-1575	86	6	c. g.	PERSON
cana-1575	86	7	a. v.	PERSON
cana-1575	86	8	2023	CARDINAL
cana-1575	88	1	11	CARDINAL
cana-1575	89	1	5	CARDINAL
cana-1575	89	2	2022	CARDINAL
cana-1575	89	3	august 17	DATE
cana-1575	91	1	28(4	CARDINAL
cana-1575	91	2	543	CARDINAL
cana-1575	92	1	6	CARDINAL
cana-1575	92	2	d.-h.	GPE
cana-1575	92	3	d.	NORP
cana-1575	92	4	suh, h.	ORG
cana-1575	92	5	bae	ORG
cana-1575	92	6	bae	ORG
cana-1575	92	7	s., & choi	ORG
cana-1575	93	1	2022	CARDINAL
cana-1575	93	2	october 21	DATE
cana-1575	95	1	40(9	DATE
cana-1575	95	2	1201	CARDINAL
cana-1575	96	1	7	CARDINAL
cana-1575	96	2	d.	NORP
cana-1575	96	3	d.-h.	GPE
cana-1575	96	4	suh, h.	ORG
cana-1575	96	5	bae	ORG
cana-1575	96	6	bae	ORG
cana-1575	96	7	s.	PERSON
cana-1575	96	8	h., & choi	ORG
cana-1575	97	1	2023, june 8)	DATE
cana-1575	98	1	326	CARDINAL
cana-1575	99	1	8	CARDINAL
cana-1575	99	2	c., jin	GPE
cana-1575	99	3	s., jin	PERSON
cana-1575	99	4	yang	PERSON
cana-1575	99	5	& xu	PERSON
cana-1575	99	6	l.	PERSON
cana-1575	99	7	2023, june 12	DATE
cana-1575	101	1	70(8	CARDINAL
cana-1575	101	2	987	CARDINAL
cana-1575	102	1	9	CARDINAL
cana-1575	102	2	piro	ORG
cana-1575	102	3	n. s.	PERSON
cana-1575	102	4	salih, a.	PERSON
cana-1575	102	5	hamad	PERSON
cana-1575	102	6	s. m.	PERSON
cana-1575	102	7	r.	NORP
cana-1575	102	8	2021	CARDINAL
cana-1575	104	1	28(5	CARDINAL
cana-1575	104	2	678-691	CARDINAL
cana-1575	105	1	10	CARDINAL
cana-1575	105	2	j.	GPE
cana-1575	105	3	hong	GPE
cana-1575	105	4	2022	CARDINAL
cana-1575	106	1	cic	ORG
cana-1575	107	1	450	CARDINAL
cana-1575	108	1	11	CARDINAL
cana-1575	108	2	s. k.	PERSON
cana-1575	108	3	ž.	ORG
cana-1575	108	4	r. r.	PERSON
cana-1575	108	5	2020	DATE
cana-1575	110	1	264	CARDINAL
cana-1575	110	2	120237	DATE
cana-1575	111	1	12	CARDINAL
cana-1575	111	2	srivastava	PERSON
cana-1575	111	3	r. k.	PERSON
cana-1575	111	4	chandra	PERSON
cana-1575	111	5	a.	PERSON
cana-1575	111	6	2021	CARDINAL
cana-1575	113	1	12	CARDINAL
cana-1575	113	2	9	CARDINAL
cana-1575	114	1	32	CARDINAL
cana-1575	115	1	13	CARDINAL
cana-1575	115	2	2011	DATE
cana-1575	117	1	issn 2581-8678	PERSON
cana-1575	118	1	14	CARDINAL
cana-1575	118	2	d.	NORP
cana-1575	118	3	chathuska	GPE
cana-1575	118	4	s.	PERSON
cana-1575	118	5	r., & wijesundara	ORG
cana-1575	118	6	k. k.	PERSON
cana-1575	118	7	2007	DATE
cana-1575	120	1	9	CARDINAL
cana-1575	120	2	5	CARDINAL
cana-1575	121	1	23-36	CARDINAL
cana-1575	122	1	15	CARDINAL
cana-1575	122	2	b., & ashwini	ORG
cana-1575	122	3	2018	DATE
cana-1575	124	1	05	CARDINAL
cana-1575	124	2	07	CARDINAL
cana-1575	125	1	36 42	CARDINAL