id	sid	eid	entity	type
cana-4581	1	1	1074	CARDINAL
cana-4581	1	2	32	CARDINAL
cana-4581	2	1	9s	CARDINAL
cana-4581	2	2	2025	DATE
cana-4581	3	1	kevin alvin eswara	PERSON
cana-4581	3	2	muliyadi gulilinga	PERSON
cana-4581	3	3	zuraida khusaimib	PERSON
cana-4581	3	4	rusop mahmoodc	LOC
cana-4581	3	5	universiti teknologi	PERSON
cana-4581	3	6	mara sabah	PERSON
cana-4581	3	7	tawau	PERSON
cana-4581	3	8	malaysia	GPE
cana-4581	3	9	universiti teknologi	PERSON
cana-4581	3	10	mara shah alam	PERSON
cana-4581	3	11	shah alam	PERSON
cana-4581	3	12	malaysia	GPE
cana-4581	3	13	scitech centre	ORG
cana-4581	3	14	institute of science	ORG
cana-4581	3	15	universiti teknologi	PERSON
cana-4581	3	16	mara shah alam	PERSON
cana-4581	3	17	shah alam	PERSON
cana-4581	3	18	malaysia	GPE
cana-4581	3	19	12-01-2025	CARDINAL
cana-4581	3	20	15-02-2025	CARDINAL
cana-4581	3	21	01-03-2025	CARDINAL
cana-4581	4	1	0.01	CARDINAL
cana-4581	4	2	0.20	CARDINAL
cana-4581	6	1	0.01	CARDINAL
cana-4581	6	2	m. flower	PERSON
cana-4581	6	3	0.20	CARDINAL
cana-4581	7	1	100	CARDINAL
cana-4581	7	2	002	CARDINAL
cana-4581	7	3	101	CARDINAL
cana-4581	8	1	102	CARDINAL
cana-4581	8	2	110	CARDINAL
cana-4581	9	1	37.9	CARDINAL
cana-4581	9	2	54	CARDINAL
cana-4581	10	1	0.19	CARDINAL
cana-4581	11	1	zno	ORG
cana-4581	12	1	1	CARDINAL
cana-4581	13	1	zno	ORG
cana-4581	13	2	two	CARDINAL
cana-4581	14	1	1	CARDINAL
cana-4581	15	1	60 mev	QUANTITY
cana-4581	15	2	3.37	CARDINAL
cana-4581	16	1	m. shaban	PERSON
cana-4581	17	1	al	PERSON
cana-4581	17	2	2	CARDINAL
cana-4581	18	1	3	CARDINAL
cana-4581	24	1	8	CARDINAL
cana-4581	24	2	9	CARDINAL
cana-4581	24	3	10	CARDINAL
cana-4581	24	4	2	CARDINAL
cana-4581	26	1	1074	CARDINAL
cana-4581	26	2	32	CARDINAL
cana-4581	27	1	9s	CARDINAL
cana-4581	27	2	2901	CARDINAL
cana-4581	27	3	2	CARDINAL
cana-4581	27	4	2.1	CARDINAL
cana-4581	30	1	2.2	CARDINAL
cana-4581	31	1	0.01	CARDINAL
cana-4581	31	2	0.2 m.	QUANTITY
cana-4581	31	3	zno	ORG
cana-4581	31	4	90 ℃	QUANTITY
cana-4581	31	5	4 hours	TIME
cana-4581	32	1	500℃	QUANTITY
cana-4581	32	2	2.3	CARDINAL
cana-4581	34	1	3	CARDINAL
cana-4581	34	2	1	CARDINAL
cana-4581	34	3	0.05	CARDINAL
cana-4581	34	4	0.20	CARDINAL
cana-4581	35	1	20	CARDINAL
cana-4581	35	2	40	CARDINAL
cana-4581	35	3	0.01	CARDINAL
cana-4581	35	4	m.	PERSON
cana-4581	36	1	400	CARDINAL
cana-4581	36	2	700	CARDINAL
cana-4581	36	3	0.20	CARDINAL
cana-4581	39	1	1	CARDINAL
cana-4581	40	1	0.01	CARDINAL
cana-4581	40	2	0.05	CARDINAL
cana-4581	40	3	0.20	CARDINAL
cana-4581	40	4	0.01	CARDINAL
cana-4581	40	5	0.05	CARDINAL
cana-4581	40	6	0.1	CARDINAL
cana-4581	40	7	0.20	CARDINAL
cana-4581	41	1	2	CARDINAL
cana-4581	42	1	30° to 60°	QUANTITY
cana-4581	43	1	100	CARDINAL
cana-4581	43	2	002	CARDINAL
cana-4581	43	3	101	CARDINAL
cana-4581	43	4	102	CARDINAL
cana-4581	43	5	110	CARDINAL
cana-4581	43	6	1074	CARDINAL
cana-4581	43	7	32	CARDINAL
cana-4581	45	1	9s	CARDINAL
cana-4581	45	2	2025	CARDINAL
cana-4581	45	3	2902	DATE
cana-4581	46	1	36-1451	CARDINAL
cana-4581	47	1	100	CARDINAL
cana-4581	47	2	002	CARDINAL
cana-4581	47	3	17-0901	CARDINAL
cana-4581	48	1	32 36 40	DATE
cana-4581	49	1	2	CARDINAL
cana-4581	49	2	002	CARDINAL
cana-4581	49	3	100	CARDINAL
cana-4581	49	4	101	CARDINAL
cana-4581	49	5	102	CARDINAL
cana-4581	49	6	110)(si	CARDINAL
cana-4581	49	7	2	CARDINAL
cana-4581	49	8	0.01	CARDINAL
cana-4581	49	9	0.05	CARDINAL
cana-4581	49	10	0.10	CARDINAL
cana-4581	49	11	0.20	CARDINAL
cana-4581	49	12	1	CARDINAL
cana-4581	49	13	half	CARDINAL
cana-4581	49	14	002	CARDINAL
cana-4581	50	1	002	CARDINAL
cana-4581	51	1	002	CARDINAL
cana-4581	51	2	0.01	CARDINAL
cana-4581	51	3	34.70 °	QUANTITY
cana-4581	52	1	0.05	CARDINAL
cana-4581	52	2	0.10	CARDINAL
cana-4581	52	3	34.74 °	QUANTITY
cana-4581	52	4	11	CARDINAL
cana-4581	52	5	12	CARDINAL
cana-4581	53	1	4.5	CARDINAL
cana-4581	55	1	002	CARDINAL
cana-4581	55	2	13	CARDINAL
cana-4581	56	1	002	CARDINAL
cana-4581	57	1	zno	ORG
cana-4581	57	2	zno	ORG
cana-4581	58	1	100	CARDINAL
cana-4581	59	1	100	CARDINAL
cana-4581	62	1	xrd	ORG
cana-4581	62	2	zno	ORG
cana-4581	63	1	100	CARDINAL
cana-4581	64	1	kim et al	PERSON
cana-4581	65	1	14	CARDINAL
cana-4581	66	1	1	CARDINAL
cana-4581	66	2	002	CARDINAL
cana-4581	66	3	2θ	CARDINAL
cana-4581	66	4	0.01 34.70	CARDINAL
cana-4581	66	5	0.195	CARDINAL
cana-4581	66	6	1074	CARDINAL
cana-4581	66	7	32	CARDINAL
cana-4581	67	1	9s	CARDINAL
cana-4581	67	2	0.05 34.65	MONEY
cana-4581	68	1	14	CARDINAL
cana-4581	70	1	1	CARDINAL
cana-4581	71	1	radian	GPE
cana-4581	72	1	0.154	CARDINAL
cana-4581	72	2	12	CARDINAL
cana-4581	73	1	2𝑑sin𝜃	CARDINAL
cana-4581	73	2	1	CARDINAL
cana-4581	73	3	scherrer	ORG
cana-4581	74	1	2	CARDINAL
cana-4581	74	2	schrrer	ORG
cana-4581	74	3	0.9	CARDINAL
cana-4581	74	4	15	CARDINAL
cana-4581	76	1	002	CARDINAL
cana-4581	76	2	0.01	CARDINAL
cana-4581	76	3	0.10	CARDINAL
cana-4581	76	4	m. plane	PERSON
cana-4581	76	5	002	CARDINAL
cana-4581	77	1	49.17	CARDINAL
cana-4581	77	2	kim et	PERSON
cana-4581	78	1	al	PERSON
cana-4581	79	1	15	CARDINAL
cana-4581	79	2	2	CARDINAL
cana-4581	79	3	002	CARDINAL
cana-4581	79	4	0.01	CARDINAL
cana-4581	79	5	0.2581	ORG
cana-4581	79	6	49.17	CARDINAL
cana-4581	79	7	1074	CARDINAL
cana-4581	79	8	32	CARDINAL
cana-4581	80	1	9s	CARDINAL
cana-4581	80	2	3	CARDINAL
cana-4581	80	3	o	DATE
cana-4581	81	1	36-1451	CARDINAL
cana-4581	81	2	0.32498	CARDINAL
cana-4581	82	1	c0=0.52066	GPE
cana-4581	82	2	12	CARDINAL
cana-4581	82	3	1	CARDINAL
cana-4581	82	4	4 3	DATE
cana-4581	83	1	3	CARDINAL
cana-4581	83	2	miller	ORG
cana-4581	85	1	100	CARDINAL
cana-4581	85	2	1 𝑑2 100	CARDINAL
cana-4581	85	3	4 3	DATE
cana-4581	85	4	1	CARDINAL
cana-4581	85	5	4	CARDINAL
cana-4581	85	6	002	CARDINAL
cana-4581	86	1	4	CARDINAL
cana-4581	86	2	5	CARDINAL
cana-4581	86	3	1	CARDINAL
cana-4581	86	4	4	CARDINAL
cana-4581	86	5	5	CARDINAL
cana-4581	86	6	6	CARDINAL
cana-4581	86	7	7	CARDINAL
cana-4581	87	1	16	CARDINAL
cana-4581	87	2	3 +	DATE
cana-4581	87	3	1 2	CARDINAL
cana-4581	87	4	2	CARDINAL
cana-4581	87	5	3𝑐2	CARDINAL
cana-4581	87	6	+ 0.25	CARDINAL
cana-4581	87	7	9	CARDINAL
cana-4581	87	8	3	CARDINAL
cana-4581	88	1	0.32	CARDINAL
cana-4581	88	2	0.52	CARDINAL
cana-4581	91	1	zn-o	ORG
cana-4581	91	2	1074	CARDINAL
cana-4581	91	3	32	CARDINAL
cana-4581	92	1	9s	CARDINAL
cana-4581	92	2	2905	DATE
cana-4581	92	3	0.196	CARDINAL
cana-4581	93	1	kim et al	PERSON
cana-4581	94	1	16	CARDINAL
cana-4581	95	1	3	CARDINAL
cana-4581	95	2	0.01	CARDINAL
cana-4581	95	3	0.3225 0.19	CARDINAL
cana-4581	95	4	0.5163 0.05	CARDINAL
cana-4581	95	5	0	CARDINAL
cana-4581	95	6	3225 0.19	CARDINAL
cana-4581	96	1	0.5170 0.10	CARDINAL
cana-4581	96	2	0.3225 0.19	CARDINAL
cana-4581	96	3	0.5170 0.2	CARDINAL
cana-4581	96	4	0.3225 0.19	CARDINAL
cana-4581	96	5	0.5155	CARDINAL
cana-4581	96	6	3	CARDINAL
cana-4581	96	7	100	CARDINAL
cana-4581	96	8	002	CARDINAL
cana-4581	96	9	101	CARDINAL
cana-4581	97	1	17	CARDINAL
cana-4581	101	1	10	CARDINAL
cana-4581	102	1	zno	ORG
cana-4581	103	1	0.00 0.05 0.10 0.15 0.20	MONEY
cana-4581	103	2	2.5 3.0	CARDINAL
cana-4581	103	3	1074	CARDINAL
cana-4581	103	4	32	CARDINAL
cana-4581	104	1	9s	CARDINAL
cana-4581	104	2	2025	CARDINAL
cana-4581	104	3	2906	CARDINAL
cana-4581	105	1	3	CARDINAL
cana-4581	105	2	100	CARDINAL
cana-4581	105	3	002	CARDINAL
cana-4581	105	4	101	CARDINAL
cana-4581	105	5	4	CARDINAL
cana-4581	107	1	0.20	CARDINAL
cana-4581	107	2	49.17	CARDINAL
cana-4581	108	1	36-1451	CARDINAL
cana-4581	109	1	zn-o	ORG
cana-4581	109	2	0.19	CARDINAL
cana-4581	110	1	zno	ORG
cana-4581	111	1	teknologi	ORG
cana-4581	111	2	mara	PERSON
cana-4581	111	3	uitm	GPE
cana-4581	111	4	malaysia	GPE
cana-4581	111	5	600	CARDINAL
cana-4581	111	6	5/3	CARDINAL
cana-4581	112	1	1	CARDINAL
cana-4581	112	2	j. g. quiñones-galván	PERSON
cana-4581	113	1	3	CARDINAL
cana-4581	114	1	248253	DATE
cana-4581	114	2	2013/01/01/ 2013	DATE
cana-4581	115	1	2	CARDINAL
cana-4581	115	2	m. shaban	PERSON
cana-4581	115	3	f. mohamed	PERSON
cana-4581	115	4	s. abdallah	PERSON
cana-4581	115	5	8	CARDINAL
cana-4581	115	6	1	CARDINAL
cana-4581	115	7	3925	CARDINAL
cana-4581	115	8	2018/03/02 2018	DATE
cana-4581	115	9	10.1038	CARDINAL
cana-4581	116	1	3	CARDINAL
cana-4581	116	2	k. eswar et al.	PERSON
cana-4581	116	3	1074	DATE
cana-4581	117	1	140-143	CARDINAL
cana-4581	117	2	2014	DATE
cana-4581	118	1	4	CARDINAL
cana-4581	118	2	g. s. devi	PERSON
cana-4581	118	3	p. s.	PERSON
cana-4581	119	1	k. ramya	PERSON
cana-4581	119	2	today	DATE
cana-4581	120	1	3	CARDINAL
cana-4581	120	2	2	CARDINAL
cana-4581	121	1	224229	DATE
cana-4581	121	2	2016/01/01/ 2016	DATE
cana-4581	122	1	5	CARDINAL
cana-4581	122	2	k. a. eswar	PERSON
cana-4581	122	3	a. a. azlinda	PERSON
cana-4581	122	4	f. husairi	PERSON
cana-4581	122	5	m. rusop	PERSON
cana-4581	122	6	s. abdullah	PERSON
cana-4581	122	7	2013	DATE
cana-4581	123	1	701	CARDINAL
cana-4581	124	1	167-171	CARDINAL
cana-4581	125	1	6	CARDINAL
cana-4581	127	1	wuu	PERSON
cana-4581	127	2	7	CARDINAL
cana-4581	127	3	1	CARDINAL
cana-4581	127	4	14251	DATE
cana-4581	127	5	2017/10/27 2017	CARDINAL
cana-4581	127	6	10.1038	CARDINAL
cana-4581	128	1	7	CARDINAL
cana-4581	128	2	k. a. eswar	PERSON
cana-4581	128	3	f. s. husairi	PERSON
cana-4581	128	4	a. ab aziz	PERSON
cana-4581	128	5	m. rusop	PERSON
cana-4581	128	6	s. abdullah	PERSON
cana-4581	129	1	832	CARDINAL
cana-4581	130	1	654-658	CARDINAL
cana-4581	130	2	2014	DATE
cana-4581	131	1	8	CARDINAL
cana-4581	133	1	hsiao	PERSON
cana-4581	135	1	hsiao	PERSON
cana-4581	136	1	chu	PERSON
cana-4581	137	1	12	CARDINAL
cana-4581	137	2	1	CARDINAL
cana-4581	137	3	31	CARDINAL
cana-4581	137	4	2017	DATE
cana-4581	137	5	10.1186	CARDINAL
cana-4581	138	1	9	CARDINAL
cana-4581	138	2	m. husairi	PERSON
cana-4581	138	3	j. rouhi	PERSON
cana-4581	138	4	k. alvin	PERSON
cana-4581	138	5	z. atikah	PERSON
cana-4581	138	6	m. rusop	PERSON
cana-4581	138	7	s. abdullah	PERSON
cana-4581	138	8	1074	CARDINAL
cana-4581	138	9	32	CARDINAL
cana-4581	139	1	9s	CARDINAL
cana-4581	140	1	29	CARDINAL
cana-4581	140	2	7	CARDINAL
cana-4581	140	3	075015	CARDINAL
cana-4581	140	4	2014	DATE
cana-4581	141	1	10	CARDINAL
cana-4581	141	2	k. a. e. m. m. akhir	PERSON
cana-4581	141	3	m. r. mahmud	PERSON
cana-4581	141	4	m. k. harun	PERSON
cana-4581	141	5	m. rusop	PERSON
cana-4581	141	6	s. abdullah	PERSON
cana-4581	141	7	1109	DATE
cana-4581	142	1	405-409	CARDINAL
cana-4581	142	2	2015	DATE
cana-4581	143	1	11	CARDINAL
cana-4581	143	2	k. gao et al	PERSON
cana-4581	144	1	96	DATE
cana-4581	144	2	1	CARDINAL
cana-4581	145	1	117-123	CARDINAL
cana-4581	145	2	2012	DATE
cana-4581	145	3	10.1016	CARDINAL
cana-4581	146	1	12	CARDINAL
cana-4581	146	2	a. khorsand zak	PERSON
cana-4581	146	3	w. h. abd	PERSON
cana-4581	147	1	majid	PERSON
cana-4581	147	2	m. e. abrishami	PERSON
cana-4581	147	3	r. yousefi	PERSON
cana-4581	147	4	13	CARDINAL
cana-4581	147	5	1	CARDINAL
cana-4581	148	1	251-256	CARDINAL
cana-4581	148	2	10.1016/j.solidstatesciences.2010.11.024	DATE
cana-4581	149	1	13	CARDINAL
cana-4581	149	2	j. lee et al	PERSON
cana-4581	149	3	80	DATE
cana-4581	149	4	8	CARDINAL
cana-4581	150	1	1641-1646, 2005	DATE
cana-4581	151	1	14	CARDINAL
cana-4581	151	2	m. s. kim et al.	PERSON
cana-4581	151	3	8	CARDINAL
cana-4581	151	4	1	CARDINAL
cana-4581	152	1	75-80	CARDINAL
cana-4581	152	2	2012	DATE
cana-4581	152	3	10.1007	CARDINAL
cana-4581	152	4	011-0130	CARDINAL
cana-4581	153	1	15	CARDINAL
cana-4581	153	2	s. k. min et al.	PERSON
cana-4581	153	3	nanocrystalline zno	PERSON
cana-4581	153	4	korean	NORP
cana-4581	154	1	59	DATE
cana-4581	154	2	2	CARDINAL
cana-4581	154	3	346	CARDINAL
cana-4581	154	4	2011	DATE
cana-4581	154	5	10.3938	CARDINAL
cana-4581	155	1	16	CARDINAL
cana-4581	155	2	m. s. kim	PERSON
cana-4581	155	3	s. kim	PERSON
cana-4581	156	1	lee	PERSON
cana-4581	156	2	j.-y.	GPE
cana-4581	157	1	34	CARDINAL
cana-4581	157	2	9	CARDINAL
cana-4581	158	1	1543-1548	CARDINAL
cana-4581	158	2	2012	DATE
cana-4581	158	3	10.1016/j.optmat.2012.03.024	DATE
cana-4581	159	1	17	CARDINAL
cana-4581	159	2	m. s. kim	PERSON
cana-4581	159	3	k. g. yim	PERSON
cana-4581	159	4	s. kim	PERSON
cana-4581	159	5	j.-y.	GPE
cana-4581	161	1	59	DATE
cana-4581	161	2	2	CARDINAL
cana-4581	162	1	364-370	CARDINAL
cana-4581	162	2	2011	DATE
cana-4581	162	3	10.1007	CARDINAL