id	sid	eid	entity	type
egc-163	1	1	eglobal congress hosted	ORG
egc-163	1	2	dubai	GPE
egc-163	1	3	a. e.	PERSON
egc-163	2	1	30th	ORDINAL
egc-163	2	2	2023	CARDINAL
egc-163	2	3	2836-3612	CARDINAL
egc-163	2	4	1namangan	CARDINAL
egc-163	2	5	uzbekistan	GPE
egc-163	2	6	mirzo199008@mail.ru 2тashkent university of information technologies	ORG
egc-163	2	7	muhammad alkhwarizmi	PERSON
egc-163	2	8	303	CARDINAL
egc-163	5	1	10.5	CARDINAL
egc-163	5	2	1	CARDINAL
egc-163	6	1	40%	PERCENT
egc-163	6	2	1 torr	QUANTITY
egc-163	6	3	50%	PERCENT
egc-163	6	4	6 torr	QUANTITY
egc-163	6	5	60%	PERCENT
egc-163	6	6	24 torr	QUANTITY
egc-163	6	7	65%	PERCENT
egc-163	6	8	50 torr	QUANTITY
egc-163	6	9	100%	PERCENT
egc-163	6	10	467 torr	QUANTITY
egc-163	8	1	0.2	CARDINAL
egc-163	8	2	10-5 torr	QUANTITY
egc-163	8	3	1a	CARDINAL
egc-163	11	1	eglobal congress	ORG
egc-163	11	2	dubai	GPE
egc-163	11	3	a. e.	PERSON
egc-163	12	1	30th	ORDINAL
egc-163	12	2	2023	CARDINAL
egc-163	12	3	2836-3612	DATE
egc-163	13	1	r>0.8 torr	FAC
egc-163	15	1	year	DATE
egc-163	15	2	year	DATE
egc-163	21	1	al	PERSON
egc-163	24	1	624	CARDINAL
egc-163	24	2	50/50	CARDINAL
egc-163	26	1	eglobal congress	ORG
egc-163	26	2	dubai	GPE
egc-163	26	3	a. e.	PERSON
egc-163	27	1	30th	ORDINAL
egc-163	27	2	2023	CARDINAL
egc-163	27	3	2836-3612 69	CARDINAL
egc-163	28	1	1-10	CARDINAL
egc-163	29	1	miss-624	PRODUCT
egc-163	29	2	50/50	CARDINAL
egc-163	30	1	canaa1	PERSON
egc-163	30	2	e.с.	GPE
egc-163	30	3	28h2o	GPE
egc-163	31	1	30h2o	CARDINAL
egc-163	31	2	e.с.	GPE
egc-163	31	3	7cо2	DATE
egc-163	31	4	e.с.	GPE
egc-163	31	5	6со2	CARDINAL
egc-163	31	6	e.с.	GPE
egc-163	31	7	8со2	CARDINAL
egc-163	31	8	9со2	ORG
egc-163	31	9	canaa1	PERSON
egc-163	31	10	canaa2	PERSON
egc-163	32	1	1-3	CARDINAL
egc-163	32	2	10	CARDINAL
egc-163	34	1	303 k	QUANTITY
egc-163	36	1	1	CARDINAL
egc-163	36	2	1.89	CARDINAL
egc-163	36	3	0.76	CARDINAL
egc-163	37	1	1	CARDINAL
egc-163	38	1	0.05	CARDINAL
egc-163	39	1	303	CARDINAL
egc-163	39	2	467 torr	PERSON
egc-163	40	1	10.35	CARDINAL
egc-163	40	2	r=467 torr	PERSON
egc-163	41	1	1	CARDINAL
egc-163	41	2	303 k	QUANTITY
egc-163	42	1	eglobal congress	ORG
egc-163	42	2	dubai	GPE
egc-163	42	3	a. e.	PERSON
egc-163	43	1	30th	ORDINAL
egc-163	43	2	2023	CARDINAL
egc-163	43	3	2836-3612	CARDINAL
egc-163	45	1	6	CARDINAL
egc-163	46	1	0.76	CARDINAL
egc-163	46	2	0.8	LOC
egc-163	46	3	1nh3	CARDINAL
egc-163	47	1	torr	PERSON
egc-163	47	2	2nh3	CARDINAL
egc-163	47	3	2.3	CARDINAL
egc-163	47	4	torr	PERSON
egc-163	47	5	3nh3	CARDINAL
egc-163	47	6	3	CARDINAL
egc-163	47	7	torr	PERSON
egc-163	47	8	4nh3	DATE
egc-163	48	1	first	ORDINAL
egc-163	49	1	4nh3	DATE
egc-163	50	1	second	ORDINAL
egc-163	50	2	1,9	DATE
egc-163	51	1	4	CARDINAL
egc-163	51	2	torr	PERSON
egc-163	51	3	5	CARDINAL
egc-163	51	4	1nh3	CARDINAL
egc-163	51	5	6.8	CARDINAL
egc-163	51	6	2nh3	CARDINAL
egc-163	53	1	second	ORDINAL
egc-163	53	2	8.7	CARDINAL
egc-163	53	3	nh3	PERSON
egc-163	53	4	1.64	CARDINAL
egc-163	53	5	10.52	CARDINAL
egc-163	53	6	second	ORDINAL
egc-163	53	7	eglobal congress	ORG
egc-163	53	8	dubai	GPE
egc-163	53	9	a. e.	PERSON
egc-163	54	1	30th	ORDINAL
egc-163	54	2	2023	CARDINAL
egc-163	54	3	2836-3612	CARDINAL
egc-163	55	1	1	CARDINAL
egc-163	55	2	ohman l.	PERSON
egc-163	55	3	ganemi b.	PERSON
egc-163	55	4	bjornbom e.	PERSON
egc-163	55	5	rahkamaa k.	PERSON
egc-163	55	6	keiski r.	PERSON
egc-163	55	7	paul j. “catalyst preparation	PERSON
egc-163	55	8	ionexchange	NORP
egc-163	59	1	73.	DATE
egc-163	60	1	2002	DATE
egc-163	61	1	263267	DATE
egc-163	62	1	2	CARDINAL
egc-163	62	2	коххаров м.х.	PERSON
egc-163	62	3	ахмедов у.к.	PRODUCT
egc-163	62	4	рахматкариева ф.г.	ORG
egc-163	63	1	муҳандислик-технология	PERSON
egc-163	63	2	2020	DATE
egc-163	63	3	1(5	CARDINAL
egc-163	64	1	m.x.	GPE
egc-163	64	2	u.k.	GPE
egc-163	64	3	f.g.	GPE
egc-163	66	1	2020	DATE
egc-163	66	2	5(7	DATE
egc-163	66	3	рр.13939-13944	DATE
egc-163	67	1	4	CARDINAL
egc-163	67	2	э.б.	GPE
egc-163	67	3	рахматкариева ф.г.	ORG
egc-163	68	1	в	LOC
egc-163	68	2	цеолите lilsx	PERSON
egc-163	69	1	и биология	PERSON
egc-163	69	2	2020	DATE
egc-163	69	3	6(72	CARDINAL
egc-163	69	4	с.60-63 5	DATE
egc-163	70	1	э.б.	GPE
egc-163	70	2	в цеолите	LOC
egc-163	70	3	nalsx	FAC
egc-163	71	1	и биология	PERSON
egc-163	71	2	2020	DATE
egc-163	71	3	с.5-8	DATE
egc-163	71	4	6	CARDINAL
egc-163	71	5	в цеолите	ORG
egc-163	71	6	nalsx	FAC
egc-163	72	1	и биология	PERSON
egc-163	72	2	2020	DATE
egc-163	72	3	с.12-15.	DATE
egc-163	73	1	e.b.	GPE
egc-163	73	2	f.g.	GPE
egc-163	74	1	nalsx	GPE
egc-163	75	1	2020	DATE
egc-163	75	2	10(2	DATE
egc-163	75	3	с.17-22	DATE
egc-163	77	1	nalsx	GPE
egc-163	79	1	2020	DATE
egc-163	79	2	15314-15320 9	DATE
egc-163	80	1	f.g.	GPE
egc-163	80	2	yakubov y.y	PERSON
egc-163	82	1	2020	DATE
egc-163	82	2	8(29	DATE
egc-163	82	3	3442-3448	CARDINAL
egc-163	83	1	10	CARDINAL
egc-163	84	1	e.b.	GPE
egc-163	84	2	f.g.	GPE
egc-163	84	3	ochilov g.m	PERSON
egc-163	85	1	eglobal congress	ORG
egc-163	85	2	dubai	GPE
egc-163	85	3	a. e.	PERSON
egc-163	86	1	30th	ORDINAL
egc-163	86	2	2023	CARDINAL
egc-163	86	3	2836-3612	CARDINAL
egc-163	87	1	international journal of future generation communication	ORG
egc-163	87	2	2020	DATE
egc-163	87	3	246–252	CARDINAL
egc-163	88	1	11	CARDINAL
egc-163	89	1	полярных	ORG
egc-163	89	2	в	LOC
egc-163	89	3	типа fau и 5a	PERSON
egc-163	90	1	наук	PERSON
egc-163	90	2	ташкент	PERSON
egc-163	90	3	2020	DATE
egc-163	90	4	63	CARDINAL
egc-163	91	1	12	CARDINAL
egc-163	92	1	рахматкариев г.у.	PERSON
egc-163	93	1	изотермы	GPE
egc-163	93	2	уравнениями	PERSON
egc-163	94	1	1988	DATE
egc-163	94	2	11	CARDINAL