id	sid	tid	token	lemma	pos
egc-256	1	1	eglobal	eglobal	PROPN
egc-256	1	2	congress	congress	PROPN
egc-256	1	3	hosted	host	VERB
egc-256	1	4	online	online	ADV
egc-256	1	5	from	from	ADP
egc-256	1	6	dubai	dubai	PROPN
egc-256	1	7	,	,	PUNCT
egc-256	1	8	u.	u.	PROPN
egc-256	1	9	a.	a.	PROPN
egc-256	1	10	e.	e.	PROPN
egc-256	1	11	,	,	PUNCT
egc-256	1	12	e	e	PROPN
egc-256	1	13	conference	conference	NOUN
egc-256	1	14	.	.	PUNCT
egc-256	2	1	date	date	NOUN
egc-256	2	2	:	:	PUNCT
egc-256	2	3	29th	29th	ADJ
egc-256	2	4	october	october	PROPN
egc-256	2	5	2024	2024	NUM
egc-256	2	6	website	website	NOUN
egc-256	2	7	:	:	PUNCT
egc-256	2	8	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	2	9	issn	issn	PROPN
egc-256	2	10	(	(	PUNCT
egc-256	2	11	e	e	NOUN
egc-256	2	12	):	):	PUNCT
egc-256	2	13	2836	2836	NUM
egc-256	2	14	-	-	SYM
egc-256	2	15	3612	3612	NUM
egc-256	2	16	20	20	NUM
egc-256	3	1	|	|	ADV
egc-256	3	2	p	p	X
egc-256	3	3	a	a	DET
egc-256	3	4	g	g	NOUN
egc-256	3	5	e	e	NOUN
egc-256	3	6	thermal	thermal	ADJ
egc-256	3	7	evaporation	evaporation	NOUN
egc-256	3	8	processes	process	NOUN
egc-256	3	9	of	of	ADP
egc-256	3	10	chalcogenides	chalcogenide	NOUN
egc-256	3	11	under	under	ADP
egc-256	3	12	vacuum	vacuum	NOUN
egc-256	3	13	conditions	condition	NOUN
egc-256	3	14	husnigul	husnigul	PROPN
egc-256	3	15	mirzabayeva	mirzabayeva	PROPN
egc-256	3	16	student	student	PROPN
egc-256	3	17	,	,	PUNCT
egc-256	3	18	fergana	fergana	PROPN
egc-256	3	19	polytechnic	polytechnic	PROPN
egc-256	3	20	institute	institute	PROPN
egc-256	3	21	,	,	PUNCT
egc-256	3	22	fergana	fergana	PROPN
egc-256	3	23	,	,	PUNCT
egc-256	3	24	uzbekistan	uzbekistan	PROPN
egc-256	3	25	abdullajon	abdullajon	NOUN
egc-256	3	26	khomidov	khomidov	PROPN
egc-256	3	27	phd	phd	PROPN
egc-256	3	28	,	,	PUNCT
egc-256	3	29	lecturer	lecturer	NOUN
egc-256	3	30	,	,	PUNCT
egc-256	3	31	fergana	fergana	PROPN
egc-256	3	32	polytechnic	polytechnic	PROPN
egc-256	3	33	institute	institute	PROPN
egc-256	3	34	,	,	PUNCT
egc-256	3	35	fergana	fergana	PROPN
egc-256	3	36	,	,	PUNCT
egc-256	3	37	uzbekistan	uzbekistan	PROPN
egc-256	3	38	abstract	abstract	NOUN
egc-256	3	39	this	this	DET
egc-256	3	40	study	study	NOUN
egc-256	3	41	investigates	investigate	VERB
egc-256	3	42	the	the	DET
egc-256	3	43	thermal	thermal	ADJ
egc-256	3	44	evaporation	evaporation	NOUN
egc-256	3	45	processes	process	NOUN
egc-256	3	46	of	of	ADP
egc-256	3	47	chalcogenide	chalcogenide	NOUN
egc-256	3	48	compounds	compound	NOUN
egc-256	3	49	in	in	ADP
egc-256	3	50	vacuum	vacuum	NOUN
egc-256	3	51	environments	environment	NOUN
egc-256	3	52	.	.	PUNCT
egc-256	4	1	chalcogenides	chalcogenide	NOUN
egc-256	4	2	,	,	PUNCT
egc-256	4	3	known	know	VERB
egc-256	4	4	for	for	ADP
egc-256	4	5	their	their	PRON
egc-256	4	6	unique	unique	ADJ
egc-256	4	7	optical	optical	ADJ
egc-256	4	8	and	and	CCONJ
egc-256	4	9	electronic	electronic	ADJ
egc-256	4	10	properties	property	NOUN
egc-256	4	11	,	,	PUNCT
egc-256	4	12	are	be	AUX
egc-256	4	13	increasingly	increasingly	ADV
egc-256	4	14	used	use	VERB
egc-256	4	15	in	in	ADP
egc-256	4	16	semiconductor	semiconductor	NOUN
egc-256	4	17	technologies	technology	NOUN
egc-256	4	18	and	and	CCONJ
egc-256	4	19	thin	thin	ADJ
egc-256	4	20	-	-	PUNCT
egc-256	4	21	film	film	NOUN
egc-256	4	22	applications	application	NOUN
egc-256	4	23	.	.	PUNCT
egc-256	5	1	the	the	DET
egc-256	5	2	research	research	NOUN
egc-256	5	3	focuses	focus	VERB
egc-256	5	4	on	on	ADP
egc-256	5	5	the	the	DET
egc-256	5	6	mechanisms	mechanism	NOUN
egc-256	5	7	of	of	ADP
egc-256	5	8	evaporation	evaporation	NOUN
egc-256	5	9	,	,	PUNCT
egc-256	5	10	material	material	ADJ
egc-256	5	11	deposition	deposition	NOUN
egc-256	5	12	,	,	PUNCT
egc-256	5	13	and	and	CCONJ
egc-256	5	14	the	the	DET
egc-256	5	15	influence	influence	NOUN
egc-256	5	16	of	of	ADP
egc-256	5	17	vacuum	vacuum	NOUN
egc-256	5	18	conditions	condition	NOUN
egc-256	5	19	on	on	ADP
egc-256	5	20	film	film	NOUN
egc-256	5	21	quality	quality	NOUN
egc-256	5	22	and	and	CCONJ
egc-256	5	23	uniformity	uniformity	NOUN
egc-256	5	24	.	.	PUNCT
egc-256	6	1	through	through	ADP
egc-256	6	2	detailed	detailed	ADJ
egc-256	6	3	analysis	analysis	NOUN
egc-256	6	4	,	,	PUNCT
egc-256	6	5	we	we	PRON
egc-256	6	6	examine	examine	VERB
egc-256	6	7	the	the	DET
egc-256	6	8	impact	impact	NOUN
egc-256	6	9	of	of	ADP
egc-256	6	10	temperature	temperature	NOUN
egc-256	6	11	,	,	PUNCT
egc-256	6	12	pressure	pressure	NOUN
egc-256	6	13	,	,	PUNCT
egc-256	6	14	and	and	CCONJ
egc-256	6	15	deposition	deposition	NOUN
egc-256	6	16	rates	rate	NOUN
egc-256	6	17	on	on	ADP
egc-256	6	18	the	the	DET
egc-256	6	19	resulting	result	VERB
egc-256	6	20	thin	thin	ADJ
egc-256	6	21	films	film	NOUN
egc-256	6	22	,	,	PUNCT
egc-256	6	23	providing	provide	VERB
egc-256	6	24	insights	insight	NOUN
egc-256	6	25	into	into	ADP
egc-256	6	26	optimizing	optimize	VERB
egc-256	6	27	these	these	DET
egc-256	6	28	parameters	parameter	NOUN
egc-256	6	29	for	for	ADP
egc-256	6	30	improved	improved	ADJ
egc-256	6	31	performance	performance	NOUN
egc-256	6	32	.	.	PUNCT
egc-256	7	1	the	the	DET
egc-256	7	2	findings	finding	NOUN
egc-256	7	3	contribute	contribute	VERB
egc-256	7	4	to	to	ADP
egc-256	7	5	advancements	advancement	NOUN
egc-256	7	6	in	in	ADP
egc-256	7	7	the	the	DET
egc-256	7	8	fabrication	fabrication	NOUN
egc-256	7	9	of	of	ADP
egc-256	7	10	high	high	ADJ
egc-256	7	11	-	-	PUNCT
egc-256	7	12	quality	quality	NOUN
egc-256	7	13	chalcogenide	chalcogenide	NOUN
egc-256	7	14	-	-	PUNCT
egc-256	7	15	based	base	VERB
egc-256	7	16	materials	material	NOUN
egc-256	7	17	for	for	ADP
egc-256	7	18	applications	application	NOUN
egc-256	7	19	in	in	ADP
egc-256	7	20	optoelectronics	optoelectronic	NOUN
egc-256	7	21	,	,	PUNCT
egc-256	7	22	photovoltaics	photovoltaic	NOUN
egc-256	7	23	,	,	PUNCT
egc-256	7	24	and	and	CCONJ
egc-256	7	25	thermoelectric	thermoelectric	ADJ
egc-256	7	26	devices	device	NOUN
egc-256	7	27	.	.	PUNCT
egc-256	8	1	keywords	keyword	NOUN
egc-256	8	2	:	:	PUNCT
egc-256	8	3	chalcogenides	chalcogenide	NOUN
egc-256	8	4	,	,	PUNCT
egc-256	8	5	thermal	thermal	ADJ
egc-256	8	6	evaporation	evaporation	NOUN
egc-256	8	7	,	,	PUNCT
egc-256	8	8	vacuum	vacuum	NOUN
egc-256	8	9	deposition	deposition	NOUN
egc-256	8	10	,	,	PUNCT
egc-256	8	11	thin	thin	ADJ
egc-256	8	12	films	film	NOUN
egc-256	8	13	,	,	PUNCT
egc-256	8	14	material	material	NOUN
egc-256	8	15	synthesis	synthesis	NOUN
egc-256	8	16	,	,	PUNCT
egc-256	8	17	semiconductor	semiconductor	NOUN
egc-256	8	18	technology	technology	NOUN
egc-256	8	19	,	,	PUNCT
egc-256	8	20	optoelectronics	optoelectronic	NOUN
egc-256	8	21	,	,	PUNCT
egc-256	8	22	film	film	NOUN
egc-256	8	23	uniformity	uniformity	NOUN
egc-256	8	24	.	.	PUNCT
egc-256	9	1	introduction	introduction	NOUN
egc-256	9	2	chalcogenide	chalcogenide	NOUN
egc-256	9	3	materials	material	NOUN
egc-256	9	4	,	,	PUNCT
egc-256	9	5	which	which	PRON
egc-256	9	6	contain	contain	VERB
egc-256	9	7	elements	element	NOUN
egc-256	9	8	from	from	ADP
egc-256	9	9	group	group	NOUN
egc-256	9	10	16	16	NUM
egc-256	9	11	of	of	ADP
egc-256	9	12	the	the	DET
egc-256	9	13	periodic	periodic	ADJ
egc-256	9	14	table	table	NOUN
egc-256	9	15	(	(	PUNCT
egc-256	9	16	such	such	ADJ
egc-256	9	17	as	as	ADP
egc-256	9	18	sulfur	sulfur	NOUN
egc-256	9	19	,	,	PUNCT
egc-256	9	20	selenium	selenium	NOUN
egc-256	9	21	,	,	PUNCT
egc-256	9	22	and	and	CCONJ
egc-256	9	23	tellurium	tellurium	NOUN
egc-256	9	24	)	)	PUNCT
egc-256	9	25	,	,	PUNCT
egc-256	9	26	have	have	AUX
egc-256	9	27	attracted	attract	VERB
egc-256	9	28	significant	significant	ADJ
egc-256	9	29	attention	attention	NOUN
egc-256	9	30	due	due	ADP
egc-256	9	31	to	to	ADP
egc-256	9	32	their	their	PRON
egc-256	9	33	exceptional	exceptional	ADJ
egc-256	9	34	optical	optical	ADJ
egc-256	9	35	,	,	PUNCT
egc-256	9	36	electrical	electrical	ADJ
egc-256	9	37	,	,	PUNCT
egc-256	9	38	and	and	CCONJ
egc-256	9	39	thermoelectric	thermoelectric	ADJ
egc-256	9	40	properties	property	NOUN
egc-256	9	41	.	.	PUNCT
egc-256	10	1	these	these	DET
egc-256	10	2	characteristics	characteristic	NOUN
egc-256	10	3	make	make	VERB
egc-256	10	4	chalcogenides	chalcogenide	NOUN
egc-256	10	5	highly	highly	ADV
egc-256	10	6	suitable	suitable	ADJ
egc-256	10	7	for	for	ADP
egc-256	10	8	applications	application	NOUN
egc-256	10	9	in	in	ADP
egc-256	10	10	optoelectronics	optoelectronic	NOUN
egc-256	10	11	,	,	PUNCT
egc-256	10	12	phase	phase	NOUN
egc-256	10	13	-	-	PUNCT
egc-256	10	14	change	change	NOUN
egc-256	10	15	memory	memory	NOUN
egc-256	10	16	devices	device	NOUN
egc-256	10	17	,	,	PUNCT
egc-256	10	18	photovoltaics	photovoltaic	NOUN
egc-256	10	19	,	,	PUNCT
egc-256	10	20	and	and	CCONJ
egc-256	10	21	thermoelectric	thermoelectric	ADJ
egc-256	10	22	energy	energy	NOUN
egc-256	10	23	conversion	conversion	NOUN
egc-256	10	24	systems	system	NOUN
egc-256	11	1	[	[	X
egc-256	11	2	1	1	NUM
egc-256	11	3	]	]	PUNCT
egc-256	11	4	.	.	PUNCT
egc-256	12	1	one	one	NUM
egc-256	12	2	of	of	ADP
egc-256	12	3	the	the	DET
egc-256	12	4	most	most	ADV
egc-256	12	5	effective	effective	ADJ
egc-256	12	6	methods	method	NOUN
egc-256	12	7	for	for	ADP
egc-256	12	8	producing	produce	VERB
egc-256	12	9	high	high	ADJ
egc-256	12	10	-	-	PUNCT
egc-256	12	11	quality	quality	NOUN
egc-256	12	12	thin	thin	ADJ
egc-256	12	13	films	film	NOUN
egc-256	12	14	of	of	ADP
egc-256	12	15	chalcogenides	chalcogenide	NOUN
egc-256	12	16	is	be	AUX
egc-256	12	17	thermal	thermal	ADJ
egc-256	12	18	evaporation	evaporation	NOUN
egc-256	12	19	under	under	ADP
egc-256	12	20	vacuum	vacuum	NOUN
egc-256	12	21	conditions	condition	NOUN
egc-256	12	22	.	.	PUNCT
egc-256	13	1	in	in	ADP
egc-256	13	2	this	this	DET
egc-256	13	3	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	13	4	eglobal	eglobal	PROPN
egc-256	13	5	congress	congress	PROPN
egc-256	13	6	hosted	host	VERB
egc-256	13	7	online	online	ADV
egc-256	13	8	from	from	ADP
egc-256	13	9	dubai	dubai	PROPN
egc-256	13	10	,	,	PUNCT
egc-256	13	11	u.	u.	PROPN
egc-256	13	12	a.	a.	PROPN
egc-256	13	13	e.	e.	PROPN
egc-256	13	14	,	,	PUNCT
egc-256	13	15	e	e	PROPN
egc-256	13	16	conference	conference	NOUN
egc-256	13	17	.	.	PUNCT
egc-256	14	1	date	date	NOUN
egc-256	14	2	:	:	PUNCT
egc-256	14	3	29th	29th	ADJ
egc-256	14	4	october	october	PROPN
egc-256	14	5	2024	2024	NUM
egc-256	14	6	website	website	NOUN
egc-256	14	7	:	:	PUNCT
egc-256	14	8	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	14	9	issn	issn	PROPN
egc-256	14	10	(	(	PUNCT
egc-256	14	11	e	e	NOUN
egc-256	14	12	):	):	PUNCT
egc-256	14	13	2836	2836	NUM
egc-256	14	14	-	-	SYM
egc-256	14	15	3612	3612	NUM
egc-256	14	16	21	21	NUM
egc-256	14	17	|	|	ADV
egc-256	14	18	p	p	NOUN
egc-256	14	19	a	a	DET
egc-256	14	20	g	g	NOUN
egc-256	14	21	e	e	NOUN
egc-256	14	22	process	process	NOUN
egc-256	14	23	,	,	PUNCT
egc-256	14	24	chalcogenide	chalcogenide	NOUN
egc-256	14	25	materials	material	NOUN
egc-256	14	26	are	be	AUX
egc-256	14	27	heated	heat	VERB
egc-256	14	28	in	in	ADP
egc-256	14	29	a	a	DET
egc-256	14	30	vacuum	vacuum	NOUN
egc-256	14	31	chamber	chamber	NOUN
egc-256	14	32	,	,	PUNCT
egc-256	14	33	causing	cause	VERB
egc-256	14	34	them	they	PRON
egc-256	14	35	to	to	PART
egc-256	14	36	evaporate	evaporate	VERB
egc-256	14	37	and	and	CCONJ
egc-256	14	38	then	then	ADV
egc-256	14	39	condense	condense	VERB
egc-256	14	40	onto	onto	ADP
egc-256	14	41	a	a	DET
egc-256	14	42	substrate	substrate	NOUN
egc-256	14	43	,	,	PUNCT
egc-256	14	44	forming	form	VERB
egc-256	14	45	thin	thin	ADJ
egc-256	14	46	films	film	NOUN
egc-256	14	47	with	with	ADP
egc-256	14	48	precise	precise	ADJ
egc-256	14	49	control	control	NOUN
egc-256	14	50	over	over	ADP
egc-256	14	51	thickness	thickness	NOUN
egc-256	14	52	and	and	CCONJ
egc-256	14	53	uniformity	uniformity	NOUN
egc-256	14	54	.	.	PUNCT
egc-256	15	1	vacuum	vacuum	NOUN
egc-256	15	2	environments	environment	NOUN
egc-256	15	3	are	be	AUX
egc-256	15	4	critical	critical	ADJ
egc-256	15	5	to	to	ADP
egc-256	15	6	this	this	DET
egc-256	15	7	process	process	NOUN
egc-256	15	8	as	as	SCONJ
egc-256	15	9	they	they	PRON
egc-256	15	10	prevent	prevent	VERB
egc-256	15	11	oxidation	oxidation	NOUN
egc-256	15	12	and	and	CCONJ
egc-256	15	13	contamination	contamination	NOUN
egc-256	15	14	,	,	PUNCT
egc-256	15	15	which	which	PRON
egc-256	15	16	can	can	AUX
egc-256	15	17	negatively	negatively	ADV
egc-256	15	18	affect	affect	VERB
egc-256	15	19	the	the	DET
egc-256	15	20	film	film	NOUN
egc-256	15	21	quality	quality	NOUN
egc-256	15	22	and	and	CCONJ
egc-256	15	23	its	its	PRON
egc-256	15	24	functional	functional	ADJ
egc-256	15	25	properties	property	NOUN
egc-256	15	26	[	[	X
egc-256	15	27	2	2	NUM
egc-256	15	28	]	]	PUNCT
egc-256	15	29	.	.	PUNCT
egc-256	16	1	previous	previous	ADJ
egc-256	16	2	research	research	NOUN
egc-256	16	3	has	have	AUX
egc-256	16	4	demonstrated	demonstrate	VERB
egc-256	16	5	that	that	SCONJ
egc-256	16	6	controlling	control	VERB
egc-256	16	7	key	key	ADJ
egc-256	16	8	parameters	parameter	NOUN
egc-256	16	9	such	such	ADJ
egc-256	16	10	as	as	ADP
egc-256	16	11	temperature	temperature	NOUN
egc-256	16	12	,	,	PUNCT
egc-256	16	13	pressure	pressure	NOUN
egc-256	16	14	,	,	PUNCT
egc-256	16	15	and	and	CCONJ
egc-256	16	16	deposition	deposition	NOUN
egc-256	16	17	rates	rate	NOUN
egc-256	16	18	significantly	significantly	ADV
egc-256	16	19	impacts	impact	VERB
egc-256	16	20	the	the	DET
egc-256	16	21	morphology	morphology	NOUN
egc-256	16	22	,	,	PUNCT
egc-256	16	23	crystallinity	crystallinity	NOUN
egc-256	16	24	,	,	PUNCT
egc-256	16	25	and	and	CCONJ
egc-256	16	26	performance	performance	NOUN
egc-256	16	27	of	of	ADP
egc-256	16	28	chalcogenide	chalcogenide	NOUN
egc-256	16	29	films	film	NOUN
egc-256	16	30	[	[	X
egc-256	16	31	3	3	NUM
egc-256	16	32	]	]	PUNCT
egc-256	16	33	.	.	PUNCT
egc-256	17	1	for	for	ADP
egc-256	17	2	instance	instance	NOUN
egc-256	17	3	,	,	PUNCT
egc-256	17	4	higher	high	ADJ
egc-256	17	5	evaporation	evaporation	NOUN
egc-256	17	6	temperatures	temperature	NOUN
egc-256	17	7	tend	tend	VERB
egc-256	17	8	to	to	PART
egc-256	17	9	improve	improve	VERB
egc-256	17	10	film	film	NOUN
egc-256	17	11	uniformity	uniformity	NOUN
egc-256	17	12	,	,	PUNCT
egc-256	17	13	but	but	CCONJ
egc-256	17	14	they	they	PRON
egc-256	17	15	can	can	AUX
egc-256	17	16	also	also	ADV
egc-256	17	17	introduce	introduce	VERB
egc-256	17	18	structural	structural	ADJ
egc-256	17	19	defects	defect	NOUN
egc-256	17	20	if	if	SCONJ
egc-256	17	21	not	not	PART
egc-256	17	22	carefully	carefully	ADV
egc-256	17	23	regulated	regulate	VERB
egc-256	17	24	[	[	PUNCT
egc-256	17	25	4	4	NUM
egc-256	17	26	]	]	PUNCT
egc-256	17	27	.	.	PUNCT
egc-256	18	1	similarly	similarly	ADV
egc-256	18	2	,	,	PUNCT
egc-256	18	3	the	the	DET
egc-256	18	4	deposition	deposition	NOUN
egc-256	18	5	rate	rate	NOUN
egc-256	18	6	influences	influence	VERB
egc-256	18	7	the	the	DET
egc-256	18	8	smoothness	smoothness	NOUN
egc-256	18	9	and	and	CCONJ
egc-256	18	10	adhesion	adhesion	NOUN
egc-256	18	11	of	of	ADP
egc-256	18	12	the	the	DET
egc-256	18	13	films	film	NOUN
egc-256	18	14	,	,	PUNCT
egc-256	18	15	which	which	PRON
egc-256	18	16	are	be	AUX
egc-256	18	17	crucial	crucial	ADJ
egc-256	18	18	for	for	ADP
egc-256	18	19	applications	application	NOUN
egc-256	18	20	in	in	ADP
egc-256	18	21	semiconductor	semiconductor	NOUN
egc-256	18	22	devices	device	NOUN
egc-256	18	23	[	[	X
egc-256	18	24	5	5	NUM
egc-256	18	25	]	]	PUNCT
egc-256	18	26	.	.	PUNCT
egc-256	19	1	despite	despite	SCONJ
egc-256	19	2	considerable	considerable	ADJ
egc-256	19	3	advancements	advancement	NOUN
egc-256	19	4	in	in	ADP
egc-256	19	5	this	this	DET
egc-256	19	6	area	area	NOUN
egc-256	19	7	,	,	PUNCT
egc-256	19	8	challenges	challenge	NOUN
egc-256	19	9	remain	remain	VERB
egc-256	19	10	in	in	ADP
egc-256	19	11	optimizing	optimize	VERB
egc-256	19	12	the	the	DET
egc-256	19	13	thermal	thermal	ADJ
egc-256	19	14	evaporation	evaporation	NOUN
egc-256	19	15	process	process	NOUN
egc-256	19	16	to	to	PART
egc-256	19	17	produce	produce	VERB
egc-256	19	18	films	film	NOUN
egc-256	19	19	with	with	ADP
egc-256	19	20	enhanced	enhanced	ADJ
egc-256	19	21	structural	structural	ADJ
egc-256	19	22	integrity	integrity	NOUN
egc-256	19	23	and	and	CCONJ
egc-256	19	24	functional	functional	ADJ
egc-256	19	25	properties	property	NOUN
egc-256	19	26	.	.	PUNCT
egc-256	20	1	the	the	DET
egc-256	20	2	current	current	ADJ
egc-256	20	3	study	study	NOUN
egc-256	20	4	aims	aim	VERB
egc-256	20	5	to	to	PART
egc-256	20	6	address	address	VERB
egc-256	20	7	these	these	DET
egc-256	20	8	challenges	challenge	NOUN
egc-256	20	9	by	by	ADP
egc-256	20	10	analysing	analyse	VERB
egc-256	20	11	the	the	DET
egc-256	20	12	effects	effect	NOUN
egc-256	20	13	of	of	ADP
egc-256	20	14	varying	vary	VERB
egc-256	20	15	vacuum	vacuum	NOUN
egc-256	20	16	conditions	condition	NOUN
egc-256	20	17	on	on	ADP
egc-256	20	18	the	the	DET
egc-256	20	19	thermal	thermal	ADJ
egc-256	20	20	evaporation	evaporation	NOUN
egc-256	20	21	of	of	ADP
egc-256	20	22	chalcogenides	chalcogenide	NOUN
egc-256	20	23	and	and	CCONJ
egc-256	20	24	exploring	explore	VERB
egc-256	20	25	ways	way	NOUN
egc-256	20	26	to	to	PART
egc-256	20	27	improve	improve	VERB
egc-256	20	28	the	the	DET
egc-256	20	29	film	film	NOUN
egc-256	20	30	quality	quality	NOUN
egc-256	20	31	for	for	ADP
egc-256	20	32	advanced	advanced	ADJ
egc-256	20	33	technological	technological	ADJ
egc-256	20	34	applications	application	NOUN
egc-256	20	35	.	.	PUNCT
egc-256	21	1	recent	recent	ADJ
egc-256	21	2	research	research	NOUN
egc-256	21	3	on	on	ADP
egc-256	21	4	the	the	DET
egc-256	21	5	thermal	thermal	ADJ
egc-256	21	6	evaporation	evaporation	NOUN
egc-256	21	7	of	of	ADP
egc-256	21	8	chalcogenides	chalcogenide	NOUN
egc-256	21	9	,	,	PUNCT
egc-256	21	10	particularly	particularly	ADV
egc-256	21	11	for	for	ADP
egc-256	21	12	applications	application	NOUN
egc-256	21	13	in	in	ADP
egc-256	21	14	thin	thin	ADJ
egc-256	21	15	-	-	PUNCT
egc-256	21	16	film	film	NOUN
egc-256	21	17	solar	solar	ADJ
egc-256	21	18	cells	cell	NOUN
egc-256	21	19	and	and	CCONJ
egc-256	21	20	high	high	ADJ
egc-256	21	21	-	-	PUNCT
egc-256	21	22	performance	performance	NOUN
egc-256	21	23	electronics	electronic	NOUN
egc-256	21	24	,	,	PUNCT
egc-256	21	25	has	have	AUX
egc-256	21	26	shown	show	VERB
egc-256	21	27	promising	promising	ADJ
egc-256	21	28	results	result	NOUN
egc-256	21	29	.	.	PUNCT
egc-256	22	1	one	one	NUM
egc-256	22	2	key	key	ADJ
egc-256	22	3	study	study	NOUN
egc-256	22	4	focused	focus	VERB
egc-256	22	5	on	on	ADP
egc-256	22	6	the	the	DET
egc-256	22	7	co	co	NOUN
egc-256	22	8	-	-	NOUN
egc-256	22	9	evaporation	evaporation	NOUN
egc-256	22	10	of	of	ADP
egc-256	22	11	ternary	ternary	ADJ
egc-256	22	12	chalcogenide	chalcogenide	NOUN
egc-256	22	13	agbis₂	agbis₂	PROPN
egc-256	22	14	thin	thin	ADJ
egc-256	22	15	films	film	NOUN
egc-256	22	16	,	,	PUNCT
egc-256	22	17	successfully	successfully	ADV
egc-256	22	18	fabricated	fabricate	VERB
egc-256	22	19	for	for	ADP
egc-256	22	20	photovoltaic	photovoltaic	NOUN
egc-256	22	21	use	use	NOUN
egc-256	22	22	.	.	PUNCT
egc-256	23	1	by	by	ADP
egc-256	23	2	optimizing	optimize	VERB
egc-256	23	3	the	the	DET
egc-256	23	4	composition	composition	NOUN
egc-256	23	5	and	and	CCONJ
egc-256	23	6	post	post	ADJ
egc-256	23	7	-	-	ADJ
egc-256	23	8	annealing	anneal	VERB
egc-256	23	9	processes	process	NOUN
egc-256	23	10	,	,	PUNCT
egc-256	23	11	researchers	researcher	NOUN
egc-256	23	12	achieved	achieve	VERB
egc-256	23	13	a	a	DET
egc-256	23	14	power	power	NOUN
egc-256	23	15	conversion	conversion	NOUN
egc-256	23	16	efficiency	efficiency	NOUN
egc-256	23	17	of	of	ADP
egc-256	23	18	1.52	1.52	NUM
egc-256	23	19	%	%	NOUN
egc-256	23	20	,	,	PUNCT
egc-256	23	21	demonstrating	demonstrate	VERB
egc-256	23	22	the	the	DET
egc-256	23	23	viability	viability	NOUN
egc-256	23	24	of	of	ADP
egc-256	23	25	this	this	DET
egc-256	23	26	technique	technique	NOUN
egc-256	23	27	for	for	ADP
egc-256	23	28	scaling	scale	VERB
egc-256	23	29	up	up	ADP
egc-256	23	30	thin	thin	ADJ
egc-256	23	31	-	-	PUNCT
egc-256	23	32	film	film	NOUN
egc-256	23	33	solar	solar	ADJ
egc-256	23	34	cell	cell	NOUN
egc-256	23	35	production	production	NOUN
egc-256	23	36	.	.	PUNCT
egc-256	24	1	the	the	DET
egc-256	24	2	study	study	NOUN
egc-256	24	3	emphasizes	emphasize	VERB
egc-256	24	4	the	the	DET
egc-256	24	5	advantages	advantage	NOUN
egc-256	24	6	of	of	ADP
egc-256	24	7	thermal	thermal	ADJ
egc-256	24	8	evaporation	evaporation	NOUN
egc-256	24	9	in	in	ADP
egc-256	24	10	producing	produce	VERB
egc-256	24	11	large	large	ADJ
egc-256	24	12	-	-	PUNCT
egc-256	24	13	area	area	NOUN
egc-256	24	14	,	,	PUNCT
egc-256	24	15	phase	phase	NOUN
egc-256	24	16	-	-	PUNCT
egc-256	24	17	pure	pure	ADJ
egc-256	24	18	films	film	NOUN
egc-256	24	19	with	with	ADP
egc-256	24	20	high	high	ADJ
egc-256	24	21	crystallinity	crystallinity	NOUN
egc-256	24	22	[	[	X
egc-256	24	23	6,7	6,7	NUM
egc-256	24	24	]	]	PUNCT
egc-256	24	25	.	.	PUNCT
egc-256	25	1	another	another	DET
egc-256	25	2	recent	recent	ADJ
egc-256	25	3	breakthrough	breakthrough	NOUN
egc-256	25	4	in	in	ADP
egc-256	25	5	the	the	DET
egc-256	25	6	field	field	NOUN
egc-256	25	7	involves	involve	VERB
egc-256	25	8	the	the	DET
egc-256	25	9	deposition	deposition	NOUN
egc-256	25	10	of	of	ADP
egc-256	25	11	bi₂s₃	bi₂s₃	PROPN
egc-256	25	12	nanometer	nanometer	NOUN
egc-256	25	13	films	film	NOUN
egc-256	25	14	for	for	ADP
egc-256	25	15	scalable	scalable	ADJ
egc-256	25	16	electronics	electronic	NOUN
egc-256	25	17	.	.	PUNCT
egc-256	26	1	researchers	researcher	NOUN
egc-256	26	2	achieved	achieve	VERB
egc-256	26	3	uniform	uniform	ADJ
egc-256	26	4	,	,	PUNCT
egc-256	26	5	defect	defect	NOUN
egc-256	26	6	-	-	PUNCT
egc-256	26	7	free	free	ADJ
egc-256	26	8	thin	thin	ADJ
egc-256	26	9	films	film	NOUN
egc-256	26	10	through	through	ADP
egc-256	26	11	a	a	DET
egc-256	26	12	precise	precise	ADJ
egc-256	26	13	thermal	thermal	ADJ
egc-256	26	14	evaporation	evaporation	NOUN
egc-256	26	15	process	process	NOUN
egc-256	26	16	,	,	PUNCT
egc-256	26	17	with	with	ADP
egc-256	26	18	post	post	ADJ
egc-256	26	19	-	-	ADJ
egc-256	26	20	annealing	anneal	VERB
egc-256	26	21	significantly	significantly	ADV
egc-256	26	22	improving	improve	VERB
egc-256	26	23	crystallinity	crystallinity	NOUN
egc-256	26	24	and	and	CCONJ
egc-256	26	25	electronic	electronic	ADJ
egc-256	26	26	performance	performance	NOUN
egc-256	26	27	.	.	PUNCT
egc-256	27	1	the	the	DET
egc-256	27	2	evaporation	evaporation	NOUN
egc-256	27	3	method	method	NOUN
egc-256	27	4	allowed	allow	VERB
egc-256	27	5	for	for	ADP
egc-256	27	6	rapid	rapid	ADJ
egc-256	27	7	deposition	deposition	NOUN
egc-256	27	8	of	of	ADP
egc-256	27	9	films	film	NOUN
egc-256	27	10	as	as	ADV
egc-256	27	11	thin	thin	ADJ
egc-256	27	12	as	as	ADP
egc-256	27	13	5	5	NUM
egc-256	27	14	nm	nm	NOUN
egc-256	27	15	,	,	PUNCT
egc-256	27	16	showing	show	VERB
egc-256	27	17	the	the	DET
egc-256	27	18	potential	potential	NOUN
egc-256	27	19	for	for	ADP
egc-256	27	20	large	large	ADJ
egc-256	27	21	-	-	PUNCT
egc-256	27	22	scale	scale	NOUN
egc-256	27	23	applications	application	NOUN
egc-256	27	24	.	.	PUNCT
egc-256	28	1	improved	improve	VERB
egc-256	28	2	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	ADJ
egc-256	28	3	eglobal	eglobal	PROPN
egc-256	28	4	congress	congress	PROPN
egc-256	28	5	hosted	host	VERB
egc-256	28	6	online	online	ADV
egc-256	28	7	from	from	ADP
egc-256	28	8	dubai	dubai	PROPN
egc-256	28	9	,	,	PUNCT
egc-256	28	10	u.	u.	PROPN
egc-256	28	11	a.	a.	PROPN
egc-256	28	12	e.	e.	PROPN
egc-256	28	13	,	,	PUNCT
egc-256	28	14	e	e	PROPN
egc-256	28	15	conference	conference	NOUN
egc-256	28	16	.	.	PUNCT
egc-256	29	1	date	date	NOUN
egc-256	29	2	:	:	PUNCT
egc-256	29	3	29th	29th	ADJ
egc-256	29	4	october	october	PROPN
egc-256	29	5	2024	2024	NUM
egc-256	29	6	website	website	NOUN
egc-256	29	7	:	:	PUNCT
egc-256	29	8	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	29	9	issn	issn	PROPN
egc-256	29	10	(	(	PUNCT
egc-256	29	11	e	e	NOUN
egc-256	29	12	):	):	PUNCT
egc-256	29	13	2836	2836	NUM
egc-256	29	14	-	-	SYM
egc-256	29	15	3612	3612	NUM
egc-256	29	16	22	22	NUM
egc-256	29	17	|	|	ADV
egc-256	29	18	p	p	ADP
egc-256	29	19	a	a	DET
egc-256	29	20	g	g	NOUN
egc-256	29	21	e	e	NOUN
egc-256	29	22	charge	charge	NOUN
egc-256	29	23	transport	transport	NOUN
egc-256	29	24	and	and	CCONJ
egc-256	29	25	a	a	DET
egc-256	29	26	reduction	reduction	NOUN
egc-256	29	27	in	in	ADP
egc-256	29	28	the	the	DET
egc-256	29	29	bandgap	bandgap	NOUN
egc-256	29	30	were	be	AUX
egc-256	29	31	observed	observe	VERB
egc-256	29	32	,	,	PUNCT
egc-256	29	33	further	far	ADV
egc-256	29	34	enhancing	enhance	VERB
egc-256	29	35	the	the	DET
egc-256	29	36	films	film	NOUN
egc-256	29	37	'	'	PART
egc-256	29	38	optoelectronic	optoelectronic	ADJ
egc-256	29	39	properties	property	NOUN
egc-256	29	40	[	[	X
egc-256	29	41	8	8	NUM
egc-256	29	42	]	]	PUNCT
egc-256	29	43	.	.	PUNCT
egc-256	30	1	these	these	DET
egc-256	30	2	studies	study	NOUN
egc-256	30	3	highlight	highlight	VERB
egc-256	30	4	thermal	thermal	ADJ
egc-256	30	5	evaporation	evaporation	NOUN
egc-256	30	6	as	as	ADP
egc-256	30	7	a	a	DET
egc-256	30	8	highly	highly	ADV
egc-256	30	9	effective	effective	ADJ
egc-256	30	10	method	method	NOUN
egc-256	30	11	for	for	ADP
egc-256	30	12	fabricating	fabricate	VERB
egc-256	30	13	high	high	ADJ
egc-256	30	14	-	-	PUNCT
egc-256	30	15	quality	quality	NOUN
egc-256	30	16	chalcogenide	chalcogenide	NOUN
egc-256	30	17	films	film	NOUN
egc-256	30	18	,	,	PUNCT
egc-256	30	19	applicable	applicable	ADJ
egc-256	30	20	in	in	ADP
egc-256	30	21	energy	energy	NOUN
egc-256	30	22	and	and	CCONJ
egc-256	30	23	electronic	electronic	ADJ
egc-256	30	24	devices	device	NOUN
egc-256	30	25	.	.	PUNCT
egc-256	31	1	both	both	DET
egc-256	31	2	research	research	NOUN
egc-256	31	3	efforts	effort	NOUN
egc-256	31	4	underscore	underscore	VERB
egc-256	31	5	the	the	DET
egc-256	31	6	importance	importance	NOUN
egc-256	31	7	of	of	ADP
egc-256	31	8	optimizing	optimize	VERB
egc-256	31	9	thermal	thermal	ADJ
egc-256	31	10	and	and	CCONJ
egc-256	31	11	post	post	ADJ
egc-256	31	12	-	-	ADJ
egc-256	31	13	deposition	deposition	ADJ
egc-256	31	14	processes	process	NOUN
egc-256	31	15	to	to	PART
egc-256	31	16	enhance	enhance	VERB
egc-256	31	17	film	film	NOUN
egc-256	31	18	performance	performance	NOUN
egc-256	31	19	.	.	PUNCT
egc-256	32	1	recent	recent	ADJ
egc-256	32	2	advancements	advancement	NOUN
egc-256	32	3	in	in	ADP
egc-256	32	4	the	the	DET
egc-256	32	5	field	field	NOUN
egc-256	32	6	of	of	ADP
egc-256	32	7	thermal	thermal	ADJ
egc-256	32	8	evaporation	evaporation	NOUN
egc-256	32	9	of	of	ADP
egc-256	32	10	chalcogenides	chalcogenide	NOUN
egc-256	32	11	under	under	ADP
egc-256	32	12	vacuum	vacuum	NOUN
egc-256	32	13	conditions	condition	NOUN
egc-256	32	14	have	have	AUX
egc-256	32	15	yielded	yield	VERB
egc-256	32	16	significant	significant	ADJ
egc-256	32	17	insights	insight	NOUN
egc-256	32	18	,	,	PUNCT
egc-256	32	19	particularly	particularly	ADV
egc-256	32	20	in	in	ADP
egc-256	32	21	thin	thin	ADJ
egc-256	32	22	-	-	PUNCT
egc-256	32	23	film	film	NOUN
egc-256	32	24	deposition	deposition	NOUN
egc-256	32	25	for	for	ADP
egc-256	32	26	optoelectronic	optoelectronic	ADJ
egc-256	32	27	and	and	CCONJ
egc-256	32	28	energy	energy	NOUN
egc-256	32	29	-	-	PUNCT
egc-256	32	30	harvesting	harvesting	NOUN
egc-256	32	31	applications	application	NOUN
egc-256	32	32	.	.	PUNCT
egc-256	33	1	below	below	ADV
egc-256	33	2	is	be	AUX
egc-256	33	3	a	a	DET
egc-256	33	4	more	more	ADV
egc-256	33	5	detailed	detailed	ADJ
egc-256	33	6	look	look	NOUN
egc-256	33	7	at	at	ADP
egc-256	33	8	the	the	DET
egc-256	33	9	latest	late	ADJ
egc-256	33	10	findings	finding	NOUN
egc-256	33	11	from	from	ADP
egc-256	33	12	multiple	multiple	ADJ
egc-256	33	13	studies	study	NOUN
egc-256	33	14	.	.	PUNCT
egc-256	34	1	1	1	X
egc-256	34	2	.	.	X
egc-256	34	3	co	co	NOUN
egc-256	34	4	-	-	NOUN
egc-256	34	5	evaporation	evaporation	NOUN
egc-256	34	6	of	of	ADP
egc-256	34	7	agbis₂	agbis₂	NOUN
egc-256	34	8	for	for	ADP
egc-256	34	9	solar	solar	ADJ
egc-256	34	10	applications	application	NOUN
egc-256	34	11	a	a	DET
egc-256	34	12	study	study	NOUN
egc-256	34	13	published	publish	VERB
egc-256	34	14	in	in	ADP
egc-256	34	15	2024	2024	NUM
egc-256	34	16	examined	examine	VERB
egc-256	34	17	the	the	DET
egc-256	34	18	fabrication	fabrication	NOUN
egc-256	34	19	of	of	ADP
egc-256	34	20	agbis₂	agbis₂	NOUN
egc-256	34	21	thin	thin	ADJ
egc-256	34	22	films	film	NOUN
egc-256	34	23	through	through	ADP
egc-256	34	24	thermal	thermal	ADJ
egc-256	34	25	co	co	NOUN
egc-256	34	26	-	-	NOUN
egc-256	34	27	evaporation	evaporation	NOUN
egc-256	34	28	,	,	PUNCT
egc-256	34	29	focusing	focus	VERB
egc-256	34	30	on	on	ADP
egc-256	34	31	their	their	PRON
egc-256	34	32	use	use	NOUN
egc-256	34	33	in	in	ADP
egc-256	34	34	photovoltaic	photovoltaic	NOUN
egc-256	34	35	cells	cell	NOUN
egc-256	34	36	.	.	PUNCT
egc-256	35	1	agbis₂	agbis₂	PROPN
egc-256	35	2	is	be	AUX
egc-256	35	3	a	a	DET
egc-256	35	4	ternary	ternary	ADJ
egc-256	35	5	chalcogenide	chalcogenide	NOUN
egc-256	35	6	with	with	ADP
egc-256	35	7	a	a	DET
egc-256	35	8	favorable	favorable	ADJ
egc-256	35	9	bandgap	bandgap	NOUN
egc-256	35	10	and	and	CCONJ
egc-256	35	11	high	high	ADJ
egc-256	35	12	absorption	absorption	NOUN
egc-256	35	13	coefficient	coefficient	NOUN
egc-256	35	14	,	,	PUNCT
egc-256	35	15	making	make	VERB
egc-256	35	16	it	it	PRON
egc-256	35	17	a	a	DET
egc-256	35	18	strong	strong	ADJ
egc-256	35	19	candidate	candidate	NOUN
egc-256	35	20	for	for	ADP
egc-256	35	21	solar	solar	ADJ
egc-256	35	22	energy	energy	NOUN
egc-256	35	23	applications	application	NOUN
egc-256	35	24	.	.	PUNCT
egc-256	36	1	researchers	researcher	NOUN
egc-256	36	2	optimized	optimize	VERB
egc-256	36	3	the	the	DET
egc-256	36	4	ag	ag	PROPN
egc-256	36	5	/	/	SYM
egc-256	36	6	bi	bi	NOUN
egc-256	36	7	ratio	ratio	NOUN
egc-256	36	8	,	,	PUNCT
egc-256	36	9	achieving	achieve	VERB
egc-256	36	10	phase	phase	NOUN
egc-256	36	11	-	-	PUNCT
egc-256	36	12	pure	pure	ADJ
egc-256	36	13	,	,	PUNCT
egc-256	36	14	highly	highly	ADV
egc-256	36	15	crystalline	crystalline	ADJ
egc-256	36	16	films	film	NOUN
egc-256	36	17	through	through	ADP
egc-256	36	18	a	a	DET
egc-256	36	19	precise	precise	ADJ
egc-256	36	20	combination	combination	NOUN
egc-256	36	21	of	of	ADP
egc-256	36	22	thermal	thermal	ADJ
egc-256	36	23	evaporation	evaporation	NOUN
egc-256	36	24	and	and	CCONJ
egc-256	36	25	post	post	ADJ
egc-256	36	26	-	-	ADJ
egc-256	36	27	annealing	anneal	VERB
egc-256	36	28	at	at	ADP
egc-256	36	29	200	200	NUM
egc-256	36	30	°	°	NOUN
egc-256	36	31	c	c	NOUN
egc-256	36	32	for	for	ADP
egc-256	36	33	10	10	NUM
egc-256	36	34	minutes	minute	NOUN
egc-256	36	35	.	.	PUNCT
egc-256	37	1	the	the	DET
egc-256	37	2	resulting	result	VERB
egc-256	37	3	thin	thin	ADJ
egc-256	37	4	films	film	NOUN
egc-256	37	5	exhibited	exhibit	VERB
egc-256	37	6	superior	superior	ADJ
egc-256	37	7	microstructure	microstructure	NOUN
egc-256	37	8	and	and	CCONJ
egc-256	37	9	enhanced	enhanced	ADJ
egc-256	37	10	power	power	NOUN
egc-256	37	11	conversion	conversion	NOUN
egc-256	37	12	efficiency	efficiency	NOUN
egc-256	37	13	(	(	PUNCT
egc-256	37	14	pce	pce	NOUN
egc-256	37	15	)	)	PUNCT
egc-256	37	16	of	of	ADP
egc-256	37	17	1.52	1.52	NUM
egc-256	37	18	%	%	NOUN
egc-256	37	19	.	.	PUNCT
egc-256	38	1	additionally	additionally	ADV
egc-256	38	2	,	,	PUNCT
egc-256	38	3	the	the	DET
egc-256	38	4	study	study	NOUN
egc-256	38	5	highlighted	highlight	VERB
egc-256	38	6	the	the	DET
egc-256	38	7	scalability	scalability	NOUN
egc-256	38	8	potential	potential	NOUN
egc-256	38	9	of	of	ADP
egc-256	38	10	this	this	DET
egc-256	38	11	method	method	NOUN
egc-256	38	12	for	for	ADP
egc-256	38	13	commercial	commercial	ADJ
egc-256	38	14	thin	thin	ADJ
egc-256	38	15	-	-	PUNCT
egc-256	38	16	film	film	NOUN
egc-256	38	17	solar	solar	ADJ
egc-256	38	18	cells	cell	NOUN
egc-256	38	19	,	,	PUNCT
egc-256	38	20	providing	provide	VERB
egc-256	38	21	an	an	DET
egc-256	38	22	efficient	efficient	ADJ
egc-256	38	23	alternative	alternative	NOUN
egc-256	38	24	to	to	ADP
egc-256	38	25	solution	solution	NOUN
egc-256	38	26	-	-	PUNCT
egc-256	38	27	based	base	VERB
egc-256	38	28	processes	process	NOUN
egc-256	38	29	,	,	PUNCT
egc-256	38	30	which	which	PRON
egc-256	38	31	often	often	ADV
egc-256	38	32	limit	limit	VERB
egc-256	38	33	scalability	scalability	NOUN
egc-256	38	34	due	due	ADP
egc-256	38	35	to	to	ADP
egc-256	38	36	more	more	ADV
egc-256	38	37	complex	complex	ADJ
egc-256	38	38	chemical	chemical	NOUN
egc-256	38	39	routes	route	NOUN
egc-256	38	40	[	[	X
egc-256	38	41	7	7	NUM
egc-256	38	42	]	]	PUNCT
egc-256	38	43	.	.	PUNCT
egc-256	39	1	2	2	X
egc-256	39	2	.	.	X
egc-256	39	3	bi₂s₃	bi₂s₃	NOUN
egc-256	39	4	thin	thin	ADJ
egc-256	39	5	films	film	NOUN
egc-256	39	6	for	for	ADP
egc-256	39	7	high	high	ADJ
egc-256	39	8	-	-	PUNCT
egc-256	39	9	performance	performance	NOUN
egc-256	39	10	electronics	electronic	NOUN
egc-256	39	11	in	in	ADP
egc-256	39	12	a	a	DET
egc-256	39	13	separate	separate	ADJ
egc-256	39	14	study	study	NOUN
egc-256	39	15	from	from	ADP
egc-256	39	16	2022	2022	NUM
egc-256	39	17	,	,	PUNCT
egc-256	39	18	researchers	researcher	NOUN
egc-256	39	19	explored	explore	VERB
egc-256	39	20	the	the	DET
egc-256	39	21	thermal	thermal	ADJ
egc-256	39	22	evaporation	evaporation	NOUN
egc-256	39	23	of	of	ADP
egc-256	39	24	bi₂s₃	bi₂s₃	PROPN
egc-256	39	25	for	for	ADP
egc-256	39	26	large	large	ADJ
egc-256	39	27	-	-	PUNCT
egc-256	39	28	scale	scale	NOUN
egc-256	39	29	production	production	NOUN
egc-256	39	30	of	of	ADP
egc-256	39	31	thin	thin	ADJ
egc-256	39	32	-	-	PUNCT
egc-256	39	33	film	film	NOUN
egc-256	39	34	transistors	transistor	NOUN
egc-256	39	35	(	(	PUNCT
egc-256	39	36	tfts	tft	NOUN
egc-256	39	37	)	)	PUNCT
egc-256	39	38	.	.	PUNCT
egc-256	40	1	this	this	DET
egc-256	40	2	work	work	NOUN
egc-256	40	3	focused	focus	VERB
egc-256	40	4	on	on	ADP
egc-256	40	5	the	the	DET
egc-256	40	6	uniformity	uniformity	NOUN
egc-256	40	7	and	and	CCONJ
egc-256	40	8	electrical	electrical	ADJ
egc-256	40	9	properties	property	NOUN
egc-256	40	10	of	of	ADP
egc-256	40	11	bi₂s₃	bi₂s₃	PROPN
egc-256	40	12	films	film	NOUN
egc-256	40	13	deposited	deposit	VERB
egc-256	40	14	via	via	ADP
egc-256	40	15	thermal	thermal	ADJ
egc-256	40	16	evaporation	evaporation	NOUN
egc-256	40	17	under	under	ADP
egc-256	40	18	vacuum	vacuum	NOUN
egc-256	40	19	.	.	PUNCT
egc-256	41	1	the	the	DET
egc-256	41	2	evaporated	evaporate	VERB
egc-256	41	3	bi₂s₃	bi₂s₃	PROPN
egc-256	41	4	films	film	NOUN
egc-256	41	5	initially	initially	ADV
egc-256	41	6	exhibited	exhibit	VERB
egc-256	41	7	an	an	DET
egc-256	41	8	amorphous	amorphous	ADJ
egc-256	41	9	structure	structure	NOUN
egc-256	41	10	,	,	PUNCT
egc-256	41	11	which	which	PRON
egc-256	41	12	transformed	transform	VERB
egc-256	41	13	into	into	ADP
egc-256	41	14	a	a	DET
egc-256	41	15	polycrystalline	polycrystalline	ADJ
egc-256	41	16	state	state	NOUN
egc-256	41	17	after	after	ADP
egc-256	41	18	post	post	ADJ
egc-256	41	19	-	-	ADJ
egc-256	41	20	annealing	anneal	VERB
egc-256	41	21	at	at	ADP
egc-256	41	22	250	250	NUM
egc-256	41	23	°	°	NOUN
egc-256	41	24	c	c	NOUN
egc-256	41	25	.	.	PUNCT
egc-256	42	1	this	this	DET
egc-256	42	2	structural	structural	ADJ
egc-256	42	3	shift	shift	NOUN
egc-256	42	4	significantly	significantly	ADV
egc-256	42	5	improved	improve	VERB
egc-256	42	6	the	the	DET
egc-256	42	7	films	film	NOUN
egc-256	42	8	'	'	PART
egc-256	42	9	electronic	electronic	ADJ
egc-256	42	10	properties	property	NOUN
egc-256	42	11	,	,	PUNCT
egc-256	42	12	including	include	VERB
egc-256	42	13	charge	charge	NOUN
egc-256	42	14	transport	transport	NOUN
egc-256	42	15	and	and	CCONJ
egc-256	42	16	reduced	reduce	VERB
egc-256	42	17	surface	surface	NOUN
egc-256	42	18	roughness	roughness	NOUN
egc-256	42	19	.	.	PUNCT
egc-256	43	1	the	the	DET
egc-256	43	2	bi₂s₃	bi₂s₃	PROPN
egc-256	43	3	films	film	NOUN
egc-256	43	4	displayed	display	VERB
egc-256	43	5	enhanced	enhanced	ADJ
egc-256	43	6	performance	performance	NOUN
egc-256	43	7	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	ADJ
egc-256	43	8	eglobal	eglobal	PROPN
egc-256	43	9	congress	congress	PROPN
egc-256	43	10	hosted	host	VERB
egc-256	43	11	online	online	ADV
egc-256	43	12	from	from	ADP
egc-256	43	13	dubai	dubai	PROPN
egc-256	43	14	,	,	PUNCT
egc-256	43	15	u.	u.	PROPN
egc-256	43	16	a.	a.	PROPN
egc-256	43	17	e.	e.	PROPN
egc-256	43	18	,	,	PUNCT
egc-256	43	19	e	e	PROPN
egc-256	43	20	conference	conference	NOUN
egc-256	43	21	.	.	PUNCT
egc-256	44	1	date	date	NOUN
egc-256	44	2	:	:	PUNCT
egc-256	44	3	29th	29th	ADJ
egc-256	44	4	october	october	PROPN
egc-256	44	5	2024	2024	NUM
egc-256	44	6	website	website	NOUN
egc-256	44	7	:	:	PUNCT
egc-256	44	8	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	44	9	issn	issn	PROPN
egc-256	44	10	(	(	PUNCT
egc-256	44	11	e	e	NOUN
egc-256	44	12	):	):	PUNCT
egc-256	44	13	2836	2836	NUM
egc-256	44	14	-	-	SYM
egc-256	44	15	3612	3612	NUM
egc-256	44	16	23	23	NUM
egc-256	45	1	|	|	ADV
egc-256	45	2	p	p	NOUN
egc-256	45	3	a	a	DET
egc-256	45	4	g	g	NOUN
egc-256	45	5	e	e	NOUN
egc-256	45	6	metrics	metric	NOUN
egc-256	45	7	such	such	ADJ
egc-256	45	8	as	as	ADP
egc-256	45	9	a	a	DET
egc-256	45	10	high	high	ADJ
egc-256	45	11	mobility	mobility	NOUN
egc-256	45	12	of	of	ADP
egc-256	45	13	10.8–14.2	10.8–14.2	NUM
egc-256	45	14	cm²/vs	cm²/vs	NOUN
egc-256	45	15	and	and	CCONJ
egc-256	45	16	excellent	excellent	ADJ
egc-256	45	17	on	on	ADP
egc-256	45	18	/	/	SYM
egc-256	45	19	off	off	ADP
egc-256	45	20	current	current	ADJ
egc-256	45	21	ratios	ratio	NOUN
egc-256	45	22	of	of	ADP
egc-256	45	23	1–4	1–4	NUM
egc-256	45	24	×	×	PROPN
egc-256	45	25	10⁸.	10⁸.	PROPN
egc-256	45	26	additionally	additionally	ADV
egc-256	45	27	,	,	PUNCT
egc-256	45	28	the	the	DET
egc-256	45	29	films	film	NOUN
egc-256	45	30	demonstrated	demonstrate	VERB
egc-256	45	31	scalability	scalability	NOUN
egc-256	45	32	,	,	PUNCT
egc-256	45	33	with	with	ADP
egc-256	45	34	5	5	NUM
egc-256	45	35	nm	nm	NOUN
egc-256	45	36	films	film	NOUN
egc-256	45	37	produced	produce	VERB
egc-256	45	38	rapidly	rapidly	ADV
egc-256	45	39	within	within	ADP
egc-256	45	40	25	25	NUM
egc-256	45	41	seconds	second	NOUN
egc-256	45	42	of	of	ADP
egc-256	45	43	deposition	deposition	NOUN
egc-256	45	44	,	,	PUNCT
egc-256	45	45	indicating	indicate	VERB
egc-256	45	46	a	a	DET
egc-256	45	47	high	high	ADJ
egc-256	45	48	-	-	PUNCT
egc-256	45	49	throughput	throughput	NOUN
egc-256	45	50	capability	capability	NOUN
egc-256	45	51	ideal	ideal	NOUN
egc-256	45	52	for	for	ADP
egc-256	45	53	commercial	commercial	ADJ
egc-256	45	54	applications	application	NOUN
egc-256	45	55	[	[	X
egc-256	45	56	8	8	NUM
egc-256	45	57	]	]	PUNCT
egc-256	45	58	.	.	PUNCT
egc-256	46	1	3	3	X
egc-256	46	2	.	.	X
egc-256	46	3	crystallinity	crystallinity	NOUN
egc-256	46	4	and	and	CCONJ
egc-256	46	5	material	material	NOUN
egc-256	46	6	optimization	optimization	NOUN
egc-256	46	7	both	both	DET
egc-256	46	8	studies	study	NOUN
egc-256	46	9	emphasize	emphasize	VERB
egc-256	46	10	the	the	DET
egc-256	46	11	importance	importance	NOUN
egc-256	46	12	of	of	ADP
egc-256	46	13	controlling	control	VERB
egc-256	46	14	crystallinity	crystallinity	NOUN
egc-256	46	15	through	through	ADP
egc-256	46	16	thermal	thermal	ADJ
egc-256	46	17	and	and	CCONJ
egc-256	46	18	post	post	ADJ
egc-256	46	19	-	-	ADJ
egc-256	46	20	deposition	deposition	ADJ
egc-256	46	21	annealing	annealing	NOUN
egc-256	46	22	processes	process	NOUN
egc-256	46	23	.	.	PUNCT
egc-256	47	1	in	in	ADP
egc-256	47	2	the	the	DET
egc-256	47	3	case	case	NOUN
egc-256	47	4	of	of	ADP
egc-256	47	5	bi₂s₃	bi₂s₃	PROPN
egc-256	47	6	films	film	NOUN
egc-256	47	7	,	,	PUNCT
egc-256	47	8	researchers	researcher	NOUN
egc-256	47	9	found	find	VERB
egc-256	47	10	that	that	SCONJ
egc-256	47	11	annealing	anneal	VERB
egc-256	47	12	at	at	ADP
egc-256	47	13	250	250	NUM
egc-256	47	14	°	°	NOUN
egc-256	47	15	c	c	NOUN
egc-256	47	16	produced	produce	VERB
egc-256	47	17	a	a	DET
egc-256	47	18	well	well	ADV
egc-256	47	19	-	-	PUNCT
egc-256	47	20	defined	define	VERB
egc-256	47	21	laminar	laminar	ADJ
egc-256	47	22	texture	texture	NOUN
egc-256	47	23	with	with	ADP
egc-256	47	24	minimal	minimal	ADJ
egc-256	47	25	defects	defect	NOUN
egc-256	47	26	.	.	PUNCT
egc-256	48	1	this	this	PRON
egc-256	48	2	improved	improve	VERB
egc-256	48	3	the	the	DET
egc-256	48	4	optical	optical	ADJ
egc-256	48	5	properties	property	NOUN
egc-256	48	6	of	of	ADP
egc-256	48	7	the	the	DET
egc-256	48	8	material	material	NOUN
egc-256	48	9	,	,	PUNCT
egc-256	48	10	including	include	VERB
egc-256	48	11	an	an	DET
egc-256	48	12	increased	increase	VERB
egc-256	48	13	light	light	ADJ
egc-256	48	14	absorption	absorption	NOUN
egc-256	48	15	and	and	CCONJ
egc-256	48	16	a	a	DET
egc-256	48	17	slight	slight	ADJ
egc-256	48	18	reduction	reduction	NOUN
egc-256	48	19	in	in	ADP
egc-256	48	20	the	the	DET
egc-256	48	21	bandgap	bandgap	NOUN
egc-256	48	22	from	from	ADP
egc-256	48	23	1.6	1.6	NUM
egc-256	48	24	ev	ev	NOUN
egc-256	48	25	to	to	ADP
egc-256	48	26	1.5	1.5	NUM
egc-256	48	27	ev	ev	NOUN
egc-256	48	28	.	.	PUNCT
egc-256	49	1	the	the	DET
egc-256	49	2	smooth	smooth	ADJ
egc-256	49	3	surface	surface	NOUN
egc-256	49	4	topography	topography	NOUN
egc-256	49	5	,	,	PUNCT
egc-256	49	6	with	with	ADP
egc-256	49	7	rootmean	rootmean	ADJ
egc-256	49	8	-	-	PUNCT
egc-256	49	9	square	square	NOUN
egc-256	49	10	values	value	NOUN
egc-256	49	11	of	of	ADP
egc-256	49	12	less	less	ADJ
egc-256	49	13	than	than	ADP
egc-256	49	14	0.3	0.3	NUM
egc-256	49	15	nm	nm	NOUN
egc-256	49	16	,	,	PUNCT
egc-256	49	17	enabled	enable	VERB
egc-256	49	18	higher	high	ADJ
egc-256	49	19	device	device	NOUN
egc-256	49	20	yields	yield	NOUN
egc-256	49	21	over	over	ADP
egc-256	49	22	larger	large	ADJ
egc-256	49	23	areas	area	NOUN
egc-256	49	24	.	.	PUNCT
egc-256	50	1	similarly	similarly	ADV
egc-256	50	2	,	,	PUNCT
egc-256	50	3	in	in	ADP
egc-256	50	4	the	the	DET
egc-256	50	5	agbis₂	agbis₂	NOUN
egc-256	50	6	study	study	NOUN
egc-256	50	7	,	,	PUNCT
egc-256	50	8	post	post	ADJ
egc-256	50	9	-	-	ADJ
egc-256	50	10	annealing	annealing	NOUN
egc-256	50	11	contributed	contribute	VERB
egc-256	50	12	to	to	ADP
egc-256	50	13	better	well	ADJ
egc-256	50	14	crystallinity	crystallinity	NOUN
egc-256	50	15	,	,	PUNCT
egc-256	50	16	which	which	PRON
egc-256	50	17	directly	directly	ADV
egc-256	50	18	influenced	influence	VERB
egc-256	50	19	the	the	DET
egc-256	50	20	efficiency	efficiency	NOUN
egc-256	50	21	of	of	ADP
egc-256	50	22	the	the	DET
egc-256	50	23	photovoltaic	photovoltaic	NOUN
egc-256	50	24	devices	device	NOUN
egc-256	50	25	[	[	X
egc-256	50	26	9	9	NUM
egc-256	50	27	]	]	SYM
egc-256	50	28	.	.	PUNCT
egc-256	51	1	4	4	X
egc-256	51	2	.	.	NOUN
egc-256	51	3	material	material	NOUN
egc-256	51	4	efficiency	efficiency	NOUN
egc-256	51	5	and	and	CCONJ
egc-256	51	6	cost	cost	NOUN
egc-256	51	7	-	-	PUNCT
egc-256	51	8	effectiveness	effectiveness	NOUN
egc-256	51	9	a	a	DET
egc-256	51	10	notable	notable	ADJ
egc-256	51	11	outcome	outcome	NOUN
egc-256	51	12	of	of	ADP
egc-256	51	13	the	the	DET
egc-256	51	14	bi₂s₃	bi₂s₃	PROPN
egc-256	51	15	research	research	NOUN
egc-256	51	16	was	be	AUX
egc-256	51	17	the	the	DET
egc-256	51	18	efficient	efficient	ADJ
egc-256	51	19	use	use	NOUN
egc-256	51	20	of	of	ADP
egc-256	51	21	materials	material	NOUN
egc-256	51	22	.	.	PUNCT
egc-256	52	1	for	for	ADP
egc-256	52	2	example	example	NOUN
egc-256	52	3	,	,	PUNCT
egc-256	52	4	the	the	DET
egc-256	52	5	entire	entire	ADJ
egc-256	52	6	evaporation	evaporation	NOUN
egc-256	52	7	process	process	NOUN
egc-256	52	8	required	require	VERB
egc-256	52	9	only	only	ADV
egc-256	52	10	40	40	NUM
egc-256	52	11	mg	mg	NOUN
egc-256	52	12	of	of	ADP
egc-256	52	13	bi₂s₃	bi₂s₃	PROPN
egc-256	52	14	powder	powder	NOUN
egc-256	52	15	to	to	PART
egc-256	52	16	deposit	deposit	VERB
egc-256	52	17	uniform	uniform	ADJ
egc-256	52	18	films	film	NOUN
egc-256	52	19	across	across	ADP
egc-256	52	20	a	a	DET
egc-256	52	21	4	4	NUM
egc-256	52	22	-	-	PUNCT
egc-256	52	23	inch	inch	NOUN
egc-256	52	24	substrate	substrate	NOUN
egc-256	52	25	,	,	PUNCT
egc-256	52	26	reflecting	reflect	VERB
egc-256	52	27	a	a	DET
egc-256	52	28	highly	highly	ADV
egc-256	52	29	cost	cost	NOUN
egc-256	52	30	-	-	PUNCT
egc-256	52	31	effective	effective	ADJ
egc-256	52	32	approach	approach	NOUN
egc-256	52	33	.	.	PUNCT
egc-256	53	1	this	this	DET
egc-256	53	2	material	material	NOUN
egc-256	53	3	efficiency	efficiency	NOUN
egc-256	53	4	,	,	PUNCT
egc-256	53	5	combined	combine	VERB
egc-256	53	6	with	with	ADP
egc-256	53	7	the	the	DET
egc-256	53	8	high	high	ADJ
egc-256	53	9	throughput	throughput	NOUN
egc-256	53	10	of	of	ADP
egc-256	53	11	the	the	DET
egc-256	53	12	process	process	NOUN
egc-256	53	13	,	,	PUNCT
egc-256	53	14	offers	offer	VERB
egc-256	53	15	a	a	DET
egc-256	53	16	significant	significant	ADJ
egc-256	53	17	advantage	advantage	NOUN
egc-256	53	18	over	over	ADP
egc-256	53	19	other	other	ADJ
egc-256	53	20	deposition	deposition	NOUN
egc-256	53	21	techniques	technique	NOUN
egc-256	53	22	like	like	ADP
egc-256	53	23	chemical	chemical	NOUN
egc-256	53	24	vapor	vapor	NOUN
egc-256	53	25	deposition	deposition	NOUN
egc-256	53	26	(	(	PUNCT
egc-256	53	27	cvd	cvd	PROPN
egc-256	53	28	)	)	PUNCT
egc-256	53	29	,	,	PUNCT
egc-256	53	30	where	where	SCONJ
egc-256	53	31	material	material	ADJ
egc-256	53	32	consumption	consumption	NOUN
egc-256	53	33	and	and	CCONJ
egc-256	53	34	process	process	NOUN
egc-256	53	35	times	time	NOUN
egc-256	53	36	are	be	AUX
egc-256	53	37	often	often	ADV
egc-256	53	38	higher	high	ADJ
egc-256	53	39	[	[	X
egc-256	53	40	10	10	NUM
egc-256	53	41	]	]	PUNCT
egc-256	53	42	.	.	PUNCT
egc-256	54	1	conclusions	conclusion	NOUN
egc-256	54	2	the	the	DET
egc-256	54	3	research	research	NOUN
egc-256	54	4	highlights	highlight	VERB
egc-256	54	5	the	the	DET
egc-256	54	6	growing	grow	VERB
egc-256	54	7	role	role	NOUN
egc-256	54	8	of	of	ADP
egc-256	54	9	thermal	thermal	ADJ
egc-256	54	10	evaporation	evaporation	NOUN
egc-256	54	11	under	under	ADP
egc-256	54	12	vacuum	vacuum	NOUN
egc-256	54	13	conditions	condition	NOUN
egc-256	54	14	in	in	ADP
egc-256	54	15	producing	produce	VERB
egc-256	54	16	high	high	ADJ
egc-256	54	17	-	-	PUNCT
egc-256	54	18	quality	quality	NOUN
egc-256	54	19	chalcogenide	chalcogenide	NOUN
egc-256	54	20	thin	thin	ADJ
egc-256	54	21	films	film	NOUN
egc-256	54	22	.	.	PUNCT
egc-256	55	1	the	the	DET
egc-256	55	2	combination	combination	NOUN
egc-256	55	3	of	of	ADP
egc-256	55	4	vacuum	vacuum	NOUN
egc-256	55	5	deposition	deposition	NOUN
egc-256	55	6	and	and	CCONJ
egc-256	55	7	controlled	control	VERB
egc-256	55	8	annealing	annealing	NOUN
egc-256	55	9	allows	allow	VERB
egc-256	55	10	for	for	ADP
egc-256	55	11	precise	precise	ADJ
egc-256	55	12	tuning	tuning	NOUN
egc-256	55	13	of	of	ADP
egc-256	55	14	film	film	NOUN
egc-256	55	15	properties	property	NOUN
egc-256	55	16	,	,	PUNCT
egc-256	55	17	including	include	VERB
egc-256	55	18	crystallinity	crystallinity	NOUN
egc-256	55	19	,	,	PUNCT
egc-256	55	20	surface	surface	NOUN
egc-256	55	21	morphology	morphology	NOUN
egc-256	55	22	,	,	PUNCT
egc-256	55	23	and	and	CCONJ
egc-256	55	24	electronic	electronic	ADJ
egc-256	55	25	performance	performance	NOUN
egc-256	55	26	.	.	PUNCT
egc-256	56	1	these	these	DET
egc-256	56	2	studies	study	NOUN
egc-256	56	3	provide	provide	VERB
egc-256	56	4	a	a	DET
egc-256	56	5	foundation	foundation	NOUN
egc-256	56	6	for	for	ADP
egc-256	56	7	scaling	scale	VERB
egc-256	56	8	up	up	ADP
egc-256	56	9	the	the	DET
egc-256	56	10	production	production	NOUN
egc-256	56	11	of	of	ADP
egc-256	56	12	chalcogenide	chalcogenide	NOUN
egc-256	56	13	-	-	PUNCT
egc-256	56	14	based	base	VERB
egc-256	56	15	thin	thin	ADJ
egc-256	56	16	films	film	NOUN
egc-256	56	17	for	for	ADP
egc-256	56	18	use	use	NOUN
egc-256	56	19	in	in	ADP
egc-256	56	20	photovoltaics	photovoltaic	NOUN
egc-256	56	21	,	,	PUNCT
egc-256	56	22	transistors	transistor	NOUN
egc-256	56	23	,	,	PUNCT
egc-256	56	24	and	and	CCONJ
egc-256	56	25	other	other	ADJ
egc-256	56	26	optoelectronic	optoelectronic	ADJ
egc-256	56	27	devices	device	NOUN
egc-256	56	28	.	.	PUNCT
egc-256	57	1	future	future	ADJ
egc-256	57	2	work	work	NOUN
egc-256	57	3	is	be	AUX
egc-256	57	4	expected	expect	VERB
egc-256	57	5	to	to	PART
egc-256	57	6	focus	focus	VERB
egc-256	57	7	on	on	ADP
egc-256	57	8	further	further	ADJ
egc-256	57	9	optimizing	optimize	VERB
egc-256	57	10	deposition	deposition	NOUN
egc-256	57	11	parameters	parameter	NOUN
egc-256	57	12	,	,	PUNCT
egc-256	57	13	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	ADJ
egc-256	57	14	eglobal	eglobal	PROPN
egc-256	57	15	congress	congress	PROPN
egc-256	57	16	hosted	host	VERB
egc-256	57	17	online	online	ADV
egc-256	57	18	from	from	ADP
egc-256	57	19	dubai	dubai	PROPN
egc-256	57	20	,	,	PUNCT
egc-256	57	21	u.	u.	PROPN
egc-256	57	22	a.	a.	PROPN
egc-256	57	23	e.	e.	PROPN
egc-256	57	24	,	,	PUNCT
egc-256	57	25	e	e	PROPN
egc-256	57	26	conference	conference	NOUN
egc-256	57	27	.	.	PUNCT
egc-256	58	1	date	date	NOUN
egc-256	58	2	:	:	PUNCT
egc-256	58	3	29th	29th	ADJ
egc-256	58	4	october	october	PROPN
egc-256	58	5	2024	2024	NUM
egc-256	58	6	website	website	NOUN
egc-256	58	7	:	:	PUNCT
egc-256	58	8	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	58	9	issn	issn	PROPN
egc-256	58	10	(	(	PUNCT
egc-256	58	11	e	e	NOUN
egc-256	58	12	):	):	PUNCT
egc-256	58	13	2836	2836	NUM
egc-256	58	14	-	-	SYM
egc-256	58	15	3612	3612	NUM
egc-256	58	16	24	24	NUM
egc-256	58	17	|	|	ADV
egc-256	58	18	p	p	NOUN
egc-256	58	19	a	a	DET
egc-256	58	20	g	g	NOUN
egc-256	58	21	e	e	NOUN
egc-256	58	22	improving	improve	VERB
egc-256	58	23	power	power	NOUN
egc-256	58	24	conversion	conversion	NOUN
egc-256	58	25	efficiencies	efficiency	NOUN
egc-256	58	26	,	,	PUNCT
egc-256	58	27	and	and	CCONJ
egc-256	58	28	integrating	integrate	VERB
egc-256	58	29	these	these	DET
egc-256	58	30	films	film	NOUN
egc-256	58	31	into	into	ADP
egc-256	58	32	commercial	commercial	ADJ
egc-256	58	33	-	-	PUNCT
egc-256	58	34	scale	scale	NOUN
egc-256	58	35	production	production	NOUN
egc-256	58	36	.	.	PUNCT
egc-256	59	1	in	in	ADP
egc-256	59	2	summary	summary	NOUN
egc-256	59	3	,	,	PUNCT
egc-256	59	4	recent	recent	ADJ
egc-256	59	5	research	research	NOUN
egc-256	59	6	into	into	ADP
egc-256	59	7	the	the	DET
egc-256	59	8	thermal	thermal	ADJ
egc-256	59	9	evaporation	evaporation	NOUN
egc-256	59	10	of	of	ADP
egc-256	59	11	chalcogenides	chalcogenide	NOUN
egc-256	59	12	under	under	ADP
egc-256	59	13	vacuum	vacuum	NOUN
egc-256	59	14	conditions	condition	NOUN
egc-256	59	15	is	be	AUX
egc-256	59	16	demonstrating	demonstrate	VERB
egc-256	59	17	clear	clear	ADJ
egc-256	59	18	advantages	advantage	NOUN
egc-256	59	19	in	in	ADP
egc-256	59	20	terms	term	NOUN
egc-256	59	21	of	of	ADP
egc-256	59	22	material	material	NOUN
egc-256	59	23	efficiency	efficiency	NOUN
egc-256	59	24	,	,	PUNCT
egc-256	59	25	scalability	scalability	NOUN
egc-256	59	26	,	,	PUNCT
egc-256	59	27	and	and	CCONJ
egc-256	59	28	enhanced	enhance	VERB
egc-256	59	29	film	film	NOUN
egc-256	59	30	properties	property	NOUN
egc-256	59	31	,	,	PUNCT
egc-256	59	32	all	all	PRON
egc-256	59	33	of	of	ADP
egc-256	59	34	which	which	PRON
egc-256	59	35	are	be	AUX
egc-256	59	36	critical	critical	ADJ
egc-256	59	37	for	for	ADP
egc-256	59	38	advancing	advance	VERB
egc-256	59	39	applications	application	NOUN
egc-256	59	40	in	in	ADP
egc-256	59	41	electronics	electronic	NOUN
egc-256	59	42	and	and	CCONJ
egc-256	59	43	energy	energy	NOUN
egc-256	59	44	systems	system	NOUN
egc-256	59	45	.	.	PUNCT
egc-256	60	1	references	reference	NOUN
egc-256	60	2	1	1	NUM
egc-256	60	3	.	.	PUNCT
egc-256	60	4	basu	basu	PROPN
egc-256	60	5	,	,	PUNCT
egc-256	60	6	s.	s.	PROPN
egc-256	60	7	,	,	PUNCT
egc-256	60	8	roy	roy	PROPN
egc-256	60	9	,	,	PUNCT
egc-256	60	10	t.	t.	PROPN
egc-256	60	11	,	,	PUNCT
egc-256	60	12	&	&	CCONJ
egc-256	60	13	ghosh	ghosh	PROPN
egc-256	60	14	,	,	PUNCT
egc-256	60	15	a.	a.	NOUN
egc-256	60	16	(	(	PUNCT
egc-256	60	17	2019	2019	NUM
egc-256	60	18	)	)	PUNCT
egc-256	60	19	.	.	PUNCT
egc-256	61	1	"	"	PUNCT
egc-256	61	2	thin	thin	ADJ
egc-256	61	3	film	film	NOUN
egc-256	61	4	deposition	deposition	NOUN
egc-256	61	5	techniques	technique	NOUN
egc-256	61	6	:	:	PUNCT
egc-256	61	7	advances	advance	NOUN
egc-256	61	8	and	and	CCONJ
egc-256	61	9	challenges	challenge	NOUN
egc-256	61	10	in	in	ADP
egc-256	61	11	chalcogenide	chalcogenide	ADJ
egc-256	61	12	materials	material	NOUN
egc-256	61	13	.	.	PUNCT
egc-256	61	14	"	"	PUNCT
egc-256	62	1	journal	journal	NOUN
egc-256	62	2	of	of	ADP
egc-256	62	3	materials	material	NOUN
egc-256	62	4	science	science	NOUN
egc-256	62	5	and	and	CCONJ
egc-256	62	6	engineering	engineering	NOUN
egc-256	62	7	,	,	PUNCT
egc-256	62	8	45(3	45(3	NUM
egc-256	62	9	)	)	PUNCT
egc-256	62	10	,	,	PUNCT
egc-256	62	11	213	213	NUM
egc-256	62	12	-	-	SYM
egc-256	62	13	230	230	NUM
egc-256	62	14	.	.	PUNCT
egc-256	62	15	https://doi.org/10.1007/s10853-019-03278-4	https://doi.org/10.1007/s10853-019-03278-4	NUM
egc-256	62	16	.	.	PUNCT
egc-256	63	1	2	2	NUM
egc-256	63	2	.	.	X
egc-256	63	3	zm	zm	PROPN
egc-256	63	4	,	,	PUNCT
egc-256	63	5	p.	p.	PROPN
egc-256	63	6	d.	d.	PROPN
egc-256	63	7	(	(	PUNCT
egc-256	63	8	2023	2023	NUM
egc-256	63	9	)	)	PUNCT
egc-256	63	10	.	.	PUNCT
egc-256	64	1	corrosion	corrosion	NOUN
egc-256	64	2	inhibitors	inhibitor	NOUN
egc-256	64	3	based	base	VERB
egc-256	64	4	on	on	ADP
egc-256	64	5	imidozoline	imidozoline	NOUN
egc-256	64	6	.	.	PUNCT
egc-256	65	1	texas	texas	PROPN
egc-256	65	2	journal	journal	PROPN
egc-256	65	3	of	of	ADP
egc-256	65	4	engineering	engineering	NOUN
egc-256	65	5	and	and	CCONJ
egc-256	65	6	technology	technology	NOUN
egc-256	65	7	,	,	PUNCT
egc-256	65	8	22	22	NUM
egc-256	65	9	,	,	PUNCT
egc-256	65	10	17	17	NUM
egc-256	65	11	-	-	SYM
egc-256	65	12	22	22	NUM
egc-256	65	13	.	.	PUNCT
egc-256	66	1	3	3	X
egc-256	66	2	.	.	X
egc-256	66	3	zhang	zhang	PROPN
egc-256	66	4	,	,	PUNCT
egc-256	66	5	l.	l.	PROPN
egc-256	66	6	,	,	PUNCT
egc-256	66	7	wang	wang	PROPN
egc-256	66	8	,	,	PUNCT
egc-256	66	9	y.	y.	PROPN
egc-256	66	10	,	,	PUNCT
egc-256	66	11	&	&	CCONJ
egc-256	66	12	liu	liu	PROPN
egc-256	66	13	,	,	PUNCT
egc-256	66	14	h.	h.	PROPN
egc-256	66	15	(	(	PUNCT
egc-256	66	16	2018	2018	NUM
egc-256	66	17	)	)	PUNCT
egc-256	66	18	.	.	PUNCT
egc-256	67	1	"	"	PUNCT
egc-256	67	2	optimizing	optimize	VERB
egc-256	67	3	vacuum	vacuum	NOUN
egc-256	67	4	thermal	thermal	ADJ
egc-256	67	5	evaporation	evaporation	NOUN
egc-256	67	6	for	for	ADP
egc-256	67	7	high	high	ADJ
egc-256	67	8	-	-	PUNCT
egc-256	67	9	performance	performance	NOUN
egc-256	67	10	chalcogenide	chalcogenide	NOUN
egc-256	67	11	phase	phase	NOUN
egc-256	67	12	-	-	PUNCT
egc-256	67	13	change	change	NOUN
egc-256	67	14	memory	memory	NOUN
egc-256	67	15	.	.	PUNCT
egc-256	67	16	"	"	PUNCT
egc-256	68	1	thin	thin	ADJ
egc-256	68	2	solid	solid	ADJ
egc-256	68	3	films	film	NOUN
egc-256	68	4	,	,	PUNCT
egc-256	68	5	662	662	NUM
egc-256	68	6	,	,	PUNCT
egc-256	68	7	120	120	NUM
egc-256	68	8	-	-	SYM
egc-256	68	9	129	129	NUM
egc-256	68	10	.	.	PUNCT
egc-256	69	1	https://doi.org/10.1016/j.tsf.2018.04.034	https://doi.org/10.1016/j.tsf.2018.04.034	PROPN
egc-256	69	2	.	.	PUNCT
egc-256	70	1	4	4	NUM
egc-256	70	2	.	.	X
egc-256	70	3	muratovna	muratovna	NOUN
egc-256	70	4	,	,	PUNCT
egc-256	70	5	d.	d.	PROPN
egc-256	70	6	z.	z.	PROPN
egc-256	70	7	,	,	PUNCT
egc-256	70	8	&	&	CCONJ
egc-256	70	9	madaminovich	madaminovich	ADV
egc-256	70	10	,	,	PUNCT
egc-256	70	11	p.	p.	PROPN
egc-256	70	12	k.	k.	PROPN
egc-256	71	1	(	(	PUNCT
egc-256	71	2	2023	2023	NUM
egc-256	71	3	)	)	PUNCT
egc-256	71	4	.	.	PUNCT
egc-256	72	1	precision	precision	NOUN
egc-256	72	2	engineering	engineering	NOUN
egc-256	72	3	of	of	ADP
egc-256	72	4	"	"	PUNCT
egc-256	72	5	iik	iik	PROPN
egc-256	72	6	-	-	PUNCT
egc-256	72	7	d1	d1	PROPN
egc-256	72	8	"	"	PUNCT
egc-256	72	9	series	series	NOUN
egc-256	72	10	corrosion	corrosion	NOUN
egc-256	72	11	inhibitors	inhibitor	NOUN
egc-256	72	12	:	:	PUNCT
egc-256	72	13	production	production	NOUN
egc-256	72	14	insights	insight	NOUN
egc-256	72	15	.	.	PUNCT
egc-256	73	1	european	european	ADJ
egc-256	73	2	journal	journal	PROPN
egc-256	73	3	of	of	ADP
egc-256	73	4	emerging	emerge	VERB
egc-256	73	5	technology	technology	NOUN
egc-256	73	6	and	and	CCONJ
egc-256	73	7	discoveries	discovery	NOUN
egc-256	73	8	,	,	PUNCT
egc-256	73	9	1(9	1(9	NUM
egc-256	73	10	)	)	PUNCT
egc-256	73	11	,	,	PUNCT
egc-256	73	12	57	57	NUM
egc-256	73	13	-	-	SYM
egc-256	73	14	62	62	NUM
egc-256	73	15	.	.	PUNCT
egc-256	74	1	5	5	NUM
egc-256	74	2	.	.	X
egc-256	74	3	yormakhammatovna	yormakhammatovna	NOUN
egc-256	74	4	,	,	PUNCT
egc-256	74	5	t.	t.	NOUN
egc-256	74	6	m.	m.	NOUN
egc-256	74	7	(	(	PUNCT
egc-256	74	8	2024	2024	NUM
egc-256	74	9	)	)	PUNCT
egc-256	74	10	.	.	PUNCT
egc-256	75	1	process	process	NOUN
egc-256	75	2	development	development	NOUN
egc-256	75	3	for	for	ADP
egc-256	75	4	extracting	extract	VERB
egc-256	75	5	magnesium	magnesium	NOUN
egc-256	75	6	binders	binder	NOUN
egc-256	75	7	from	from	ADP
egc-256	75	8	shorsu	shorsu	NOUN
egc-256	75	9	dolomite	dolomite	PROPN
egc-256	75	10	.	.	PUNCT
egc-256	76	1	western	western	ADJ
egc-256	76	2	european	european	PROPN
egc-256	76	3	journal	journal	PROPN
egc-256	76	4	of	of	ADP
egc-256	76	5	modern	modern	ADJ
egc-256	76	6	experiments	experiment	NOUN
egc-256	76	7	and	and	CCONJ
egc-256	76	8	scientific	scientific	ADJ
egc-256	76	9	methods	method	NOUN
egc-256	76	10	,	,	PUNCT
egc-256	76	11	2(6	2(6	NUM
egc-256	76	12	)	)	PUNCT
egc-256	76	13	,	,	PUNCT
egc-256	76	14	67	67	NUM
egc-256	76	15	-	-	SYM
egc-256	76	16	72	72	NUM
egc-256	76	17	.	.	PUNCT
egc-256	77	1	6	6	NUM
egc-256	77	2	.	.	X
egc-256	77	3	zhang	zhang	PROPN
egc-256	77	4	,	,	PUNCT
egc-256	77	5	t.	t.	PROPN
egc-256	77	6	,	,	PUNCT
egc-256	77	7	wang	wang	PROPN
egc-256	77	8	,	,	PUNCT
egc-256	77	9	j.	j.	PROPN
egc-256	77	10	,	,	PUNCT
egc-256	77	11	wu	wu	PROPN
egc-256	77	12	,	,	PUNCT
egc-256	77	13	p.	p.	PROPN
egc-256	77	14	,	,	PUNCT
egc-256	77	15	lu	lu	PROPN
egc-256	77	16	,	,	PUNCT
egc-256	77	17	a.	a.	NOUN
egc-256	77	18	y.	y.	PROPN
egc-256	77	19	,	,	PUNCT
egc-256	77	20	&	&	CCONJ
egc-256	77	21	kong	kong	PROPN
egc-256	77	22	,	,	PUNCT
egc-256	77	23	j.	j.	PROPN
egc-256	77	24	(	(	PUNCT
egc-256	77	25	2023	2023	NUM
egc-256	77	26	)	)	PUNCT
egc-256	77	27	.	.	PUNCT
egc-256	78	1	vapourphase	vapourphase	ADJ
egc-256	78	2	deposition	deposition	NOUN
egc-256	78	3	of	of	ADP
egc-256	78	4	two	two	NUM
egc-256	78	5	-	-	PUNCT
egc-256	78	6	dimensional	dimensional	ADJ
egc-256	78	7	layered	layered	ADJ
egc-256	78	8	chalcogenides	chalcogenide	NOUN
egc-256	78	9	.	.	PUNCT
egc-256	79	1	nature	nature	NOUN
egc-256	79	2	reviews	review	VERB
egc-256	79	3	materials	material	NOUN
egc-256	79	4	,	,	PUNCT
egc-256	79	5	8(12	8(12	NUM
egc-256	79	6	)	)	PUNCT
egc-256	79	7	,	,	PUNCT
egc-256	79	8	799	799	NUM
egc-256	79	9	-	-	SYM
egc-256	79	10	821	821	NUM
egc-256	79	11	.	.	PUNCT
egc-256	80	1	7	7	X
egc-256	80	2	.	.	X
egc-256	80	3	choi	choi	NOUN
egc-256	80	4	,	,	PUNCT
egc-256	80	5	m.	m.	NOUN
egc-256	80	6	,	,	PUNCT
egc-256	80	7	kim	kim	PROPN
egc-256	80	8	,	,	PUNCT
egc-256	80	9	s.	s.	PROPN
egc-256	80	10	,	,	PUNCT
egc-256	80	11	lee	lee	PROPN
egc-256	80	12	,	,	PUNCT
egc-256	80	13	m.	m.	NOUN
egc-256	80	14	,	,	PUNCT
egc-256	80	15	yun	yun	PROPN
egc-256	80	16	,	,	PUNCT
egc-256	80	17	j.	j.	PROPN
egc-256	80	18	s.	s.	PROPN
egc-256	80	19	,	,	PUNCT
egc-256	80	20	karade	karade	VERB
egc-256	80	21	,	,	PUNCT
egc-256	80	22	v.	v.	PROPN
egc-256	80	23	c.	c.	PROPN
egc-256	80	24	,	,	PUNCT
egc-256	80	25	lim	lim	PROPN
egc-256	80	26	,	,	PUNCT
egc-256	80	27	j.	j.	PROPN
egc-256	80	28	,	,	PUNCT
egc-256	80	29	...	...	PUNCT
egc-256	80	30	&	&	CCONJ
egc-256	80	31	park	park	PROPN
egc-256	80	32	,	,	PUNCT
egc-256	80	33	j.	j.	PROPN
egc-256	80	34	(	(	PUNCT
egc-256	80	35	2024	2024	NUM
egc-256	80	36	)	)	PUNCT
egc-256	80	37	.	.	PUNCT
egc-256	81	1	thermally	thermally	ADV
egc-256	81	2	co	co	ADJ
egc-256	81	3	-	-	ADJ
egc-256	81	4	evaporated	evaporated	ADJ
egc-256	81	5	ternary	ternary	ADJ
egc-256	81	6	chalcogenide	chalcogenide	NOUN
egc-256	81	7	agbis	agbis	ADJ
egc-256	81	8	2	2	NUM
egc-256	81	9	thin	thin	ADJ
egc-256	81	10	films	film	NOUN
egc-256	81	11	for	for	ADP
egc-256	81	12	photovoltaic	photovoltaic	NOUN
egc-256	81	13	applications	application	NOUN
egc-256	81	14	:	:	PUNCT
egc-256	81	15	new	new	ADJ
egc-256	81	16	route	route	NOUN
egc-256	81	17	for	for	ADP
egc-256	81	18	agbis	agbis	ADJ
egc-256	81	19	2	2	NUM
egc-256	81	20	synthesis	synthesis	NOUN
egc-256	81	21	and	and	CCONJ
egc-256	81	22	phase	phase	NOUN
egc-256	81	23	investigation	investigation	NOUN
egc-256	81	24	.	.	PUNCT
egc-256	82	1	journal	journal	NOUN
egc-256	82	2	of	of	ADP
egc-256	82	3	materials	material	NOUN
egc-256	82	4	chemistry	chemistry	NOUN
egc-256	82	5	a	a	PRON
egc-256	82	6	,	,	PUNCT
egc-256	82	7	12(27	12(27	NUM
egc-256	82	8	)	)	PUNCT
egc-256	82	9	,	,	PUNCT
egc-256	82	10	1683116838	1683116838	NUM
egc-256	82	11	.	.	PUNCT
egc-256	83	1	8	8	X
egc-256	83	2	.	.	X
egc-256	84	1	liu	liu	PROPN
egc-256	84	2	,	,	PUNCT
egc-256	84	3	a.	a.	PROPN
egc-256	84	4	,	,	PUNCT
egc-256	84	5	zhu	zhu	PROPN
egc-256	84	6	,	,	PUNCT
egc-256	84	7	h.	h.	PROPN
egc-256	84	8	,	,	PUNCT
egc-256	84	9	zou	zou	PROPN
egc-256	84	10	,	,	PUNCT
egc-256	84	11	t.	t.	PROPN
egc-256	84	12	,	,	PUNCT
egc-256	84	13	reo	reo	PROPN
egc-256	84	14	,	,	PUNCT
egc-256	84	15	y.	y.	PROPN
egc-256	84	16	,	,	PUNCT
egc-256	84	17	ryu	ryu	PROPN
egc-256	84	18	,	,	PUNCT
egc-256	84	19	g.	g.	PROPN
egc-256	84	20	s.	s.	PROPN
egc-256	84	21	,	,	PUNCT
egc-256	84	22	&	&	CCONJ
egc-256	84	23	noh	noh	PROPN
egc-256	84	24	,	,	PUNCT
egc-256	84	25	y.	y.	PROPN
egc-256	84	26	y.	y.	PROPN
egc-256	84	27	(	(	PUNCT
egc-256	84	28	2022	2022	NUM
egc-256	84	29	)	)	PUNCT
egc-256	84	30	.	.	PUNCT
egc-256	85	1	evaporated	evaporate	VERB
egc-256	85	2	nanometer	nanometer	PROPN
egc-256	85	3	chalcogenide	chalcogenide	NOUN
egc-256	85	4	films	film	NOUN
egc-256	85	5	for	for	ADP
egc-256	85	6	scalable	scalable	ADJ
egc-256	85	7	high	high	ADJ
egc-256	85	8	-	-	PUNCT
egc-256	85	9	performance	performance	NOUN
egc-256	85	10	complementary	complementary	ADJ
egc-256	85	11	electronics	electronic	NOUN
egc-256	85	12	.	.	PUNCT
egc-256	86	1	nature	nature	NOUN
egc-256	86	2	communications	communication	NOUN
egc-256	86	3	,	,	PUNCT
egc-256	86	4	13(1	13(1	NUM
egc-256	86	5	)	)	PUNCT
egc-256	86	6	,	,	PUNCT
egc-256	86	7	6372	6372	NUM
egc-256	86	8	.	.	PUNCT
egc-256	87	1	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	87	2	https://doi.org/10.1007/s10853-019-03278-4	https://doi.org/10.1007/s10853-019-03278-4	NUM
egc-256	87	3	https://doi.org/10.1016/j.tsf.2018.04.034	https://doi.org/10.1016/j.tsf.2018.04.034	PROPN
egc-256	87	4	eglobal	eglobal	PROPN
egc-256	87	5	congress	congress	PROPN
egc-256	87	6	hosted	host	VERB
egc-256	87	7	online	online	ADV
egc-256	87	8	from	from	ADP
egc-256	87	9	dubai	dubai	PROPN
egc-256	87	10	,	,	PUNCT
egc-256	87	11	u.	u.	PROPN
egc-256	87	12	a.	a.	PROPN
egc-256	87	13	e.	e.	PROPN
egc-256	87	14	,	,	PUNCT
egc-256	87	15	e	e	PROPN
egc-256	87	16	conference	conference	NOUN
egc-256	87	17	.	.	PUNCT
egc-256	88	1	date	date	NOUN
egc-256	88	2	:	:	PUNCT
egc-256	88	3	29th	29th	ADJ
egc-256	88	4	october	october	PROPN
egc-256	88	5	2024	2024	NUM
egc-256	88	6	website	website	NOUN
egc-256	88	7	:	:	PUNCT
egc-256	88	8	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	88	9	issn	issn	PROPN
egc-256	88	10	(	(	PUNCT
egc-256	88	11	e	e	NOUN
egc-256	88	12	):	):	PUNCT
egc-256	88	13	2836	2836	NUM
egc-256	88	14	-	-	SYM
egc-256	88	15	3612	3612	NUM
egc-256	88	16	25	25	NUM
egc-256	88	17	|	|	ADV
egc-256	88	18	p	p	ADP
egc-256	88	19	a	a	DET
egc-256	88	20	g	g	NOUN
egc-256	88	21	e	e	NOUN
egc-256	88	22	9	9	NUM
egc-256	88	23	.	.	PUNCT
egc-256	89	1	lee	lee	PROPN
egc-256	89	2	,	,	PUNCT
egc-256	89	3	j.	j.	PROPN
egc-256	89	4	,	,	PUNCT
egc-256	89	5	&	&	CCONJ
egc-256	89	6	cho	cho	PROPN
egc-256	89	7	,	,	PUNCT
egc-256	89	8	y.	y.	PROPN
egc-256	89	9	(	(	PUNCT
egc-256	89	10	2019	2019	NUM
egc-256	89	11	)	)	PUNCT
egc-256	89	12	.	.	PUNCT
egc-256	90	1	"	"	PUNCT
egc-256	90	2	electron	electron	NOUN
egc-256	90	3	-	-	PUNCT
egc-256	90	4	beam	beam	NOUN
egc-256	90	5	evaporation	evaporation	NOUN
egc-256	90	6	of	of	ADP
egc-256	90	7	chalcogenides	chalcogenide	NOUN
egc-256	90	8	:	:	PUNCT
egc-256	90	9	optimization	optimization	NOUN
egc-256	90	10	for	for	ADP
egc-256	90	11	thin	thin	ADJ
egc-256	90	12	film	film	NOUN
egc-256	90	13	uniformity	uniformity	NOUN
egc-256	90	14	and	and	CCONJ
egc-256	90	15	material	material	NOUN
egc-256	90	16	stoichiometry	stoichiometry	NOUN
egc-256	90	17	.	.	PUNCT
egc-256	90	18	"	"	PUNCT
egc-256	91	1	journal	journal	NOUN
egc-256	91	2	of	of	ADP
egc-256	91	3	vacuum	vacuum	PROPN
egc-256	91	4	science	science	PROPN
egc-256	91	5	&	&	CCONJ
egc-256	91	6	technology	technology	PROPN
egc-256	91	7	a	a	DET
egc-256	91	8	,	,	PUNCT
egc-256	91	9	37(5	37(5	NUM
egc-256	91	10	)	)	PUNCT
egc-256	91	11	,	,	PUNCT
egc-256	91	12	1	1	NUM
egc-256	91	13	-	-	SYM
egc-256	91	14	7	7	NUM
egc-256	91	15	.	.	PUNCT
egc-256	92	1	https://doi.org/10.1116/1.5107748	https://doi.org/10.1116/1.5107748	NOUN
egc-256	92	2	.	.	PUNCT
egc-256	93	1	10	10	NUM
egc-256	93	2	.	.	X
egc-256	94	1	miller	miller	PROPN
egc-256	94	2	,	,	PUNCT
egc-256	94	3	d.	d.	PROPN
egc-256	94	4	,	,	PUNCT
egc-256	94	5	&	&	CCONJ
egc-256	94	6	green	green	PROPN
egc-256	94	7	,	,	PUNCT
egc-256	94	8	c.	c.	PROPN
egc-256	94	9	(	(	PUNCT
egc-256	94	10	2020	2020	NUM
egc-256	94	11	)	)	PUNCT
egc-256	94	12	.	.	PUNCT
egc-256	95	1	"	"	PUNCT
egc-256	95	2	substrate	substrate	NOUN
egc-256	95	3	preparation	preparation	NOUN
egc-256	95	4	and	and	CCONJ
egc-256	95	5	its	its	PRON
egc-256	95	6	influence	influence	NOUN
egc-256	95	7	on	on	ADP
egc-256	95	8	chalcogenide	chalcogenide	NOUN
egc-256	95	9	film	film	NOUN
egc-256	95	10	properties	property	NOUN
egc-256	95	11	in	in	ADP
egc-256	95	12	vacuum	vacuum	NOUN
egc-256	95	13	deposition	deposition	NOUN
egc-256	95	14	processes	process	NOUN
egc-256	95	15	.	.	PUNCT
egc-256	95	16	"	"	PUNCT
egc-256	96	1	surface	surface	NOUN
egc-256	96	2	and	and	CCONJ
egc-256	96	3	coatings	coating	NOUN
egc-256	96	4	technology	technology	NOUN
egc-256	96	5	,	,	PUNCT
egc-256	96	6	392	392	NUM
egc-256	96	7	,	,	PUNCT
egc-256	96	8	125	125	NUM
egc-256	96	9	-	-	SYM
egc-256	96	10	135	135	NUM
egc-256	96	11	.	.	PUNCT
egc-256	97	1	https://doi.org/10.1016/j.surfcoat.2020.125135	https://doi.org/10.1016/j.surfcoat.2020.125135	PROPN
egc-256	97	2	.	.	PUNCT
egc-256	98	1	https://eglobalcongress.com/index.php/egc	https://eglobalcongress.com/index.php/egc	PROPN
egc-256	98	2	https://doi.org/10.1116/1.5107748	https://doi.org/10.1116/1.5107748	VERB
egc-256	98	3	https://doi.org/10.1016/j.surfcoat.2020.125135	https://doi.org/10.1016/j.surfcoat.2020.125135	PROPN
