id	sid	eid	entity	type
easat-2273	1	1	2576-8484	DATE
easat-2273	1	2	8	CARDINAL
easat-2273	1	3	6	CARDINAL
easat-2273	1	4	1554-1565 2024	DATE
easat-2273	1	5	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	1	6	2024	CARDINAL
easat-2273	1	7	2024	CARDINAL
easat-2273	1	8	s.v. ushanov1	PERSON
easat-2273	1	9	g.v. sviridov1	PERSON
easat-2273	1	10	1moscow	CARDINAL
easat-2273	1	11	111250	DATE
easat-2273	1	12	moscow	GPE
easat-2273	1	13	krasnokazarmennaya st. 17	PERSON
easat-2273	2	1	2llc	CARDINAL
easat-2273	2	2	111024	DATE
easat-2273	2	3	moscow	GPE
easat-2273	2	4	shosse	GPE
easat-2273	2	5	st	GPE
easat-2273	2	6	20b	DATE
easat-2273	2	7	g.v.s	NORP
easat-2273	7	1	ae	ORG
easat-2273	8	1	ae	ORG
easat-2273	9	1	ae	ORG
easat-2273	9	2	ae	ORG
easat-2273	9	3	300	CARDINAL
easat-2273	11	1	1	CARDINAL
easat-2273	16	1	2	CARDINAL
easat-2273	17	1	3	CARDINAL
easat-2273	18	1	4	CARDINAL
easat-2273	19	1	5	CARDINAL
easat-2273	19	2	6	CARDINAL
easat-2273	20	1	1555	CARDINAL
easat-2273	20	2	2576-8484	DATE
easat-2273	21	1	8	CARDINAL
easat-2273	22	1	6	CARDINAL
easat-2273	22	2	1554-1565	DATE
easat-2273	22	3	2024	CARDINAL
easat-2273	22	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	22	5	2024	CARDINAL
easat-2273	23	1	8	CARDINAL
easat-2273	25	1	1	CARDINAL
easat-2273	25	2	9	CARDINAL
easat-2273	29	1	10	CARDINAL
easat-2273	31	1	interlayer	GPE
easat-2273	33	1	ae	ORG
easat-2273	33	2	1	CARDINAL
easat-2273	34	1	20	CARDINAL
easat-2273	34	2	12kh18n10	CARDINAL
easat-2273	36	1	ae	ORG
easat-2273	37	1	2	CARDINAL
easat-2273	37	2	20	CARDINAL
easat-2273	37	3	12kh18n10	DATE
easat-2273	38	1	20	CARDINAL
easat-2273	38	2	3 mm	QUANTITY
easat-2273	39	1	12kh18n10	DATE
easat-2273	39	2	20	CARDINAL
easat-2273	39	3	1	CARDINAL
easat-2273	39	4	2	CARDINAL
easat-2273	40	1	1000 mm	QUANTITY
easat-2273	40	2	200 mm	QUANTITY
easat-2273	40	3	1a	CARDINAL
easat-2273	42	1	3	CARDINAL
easat-2273	43	1	sabaros o101	FAC
easat-2273	45	1	1	CARDINAL
easat-2273	46	1	12kh18n10	DATE
easat-2273	47	1	0.8	CARDINAL
easat-2273	47	2	2 9 11	TIME
easat-2273	47	3	max	PERSON
easat-2273	47	4	0.035	CARDINAL
easat-2273	47	5	2	CARDINAL
easat-2273	48	1	20, %	PERCENT
easat-2273	49	1	0.17-0.24 0.17-0.37 0.35-0.65 max 0.3 max 0.04 max 0.035	QUANTITY
easat-2273	49	2	0.25	CARDINAL
easat-2273	49	3	2576-8484	DATE
easat-2273	49	4	8	CARDINAL
easat-2273	50	1	6	CARDINAL
easat-2273	50	2	1554-1565	DATE
easat-2273	50	3	2024	CARDINAL
easat-2273	50	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	50	5	2024	CARDINAL
easat-2273	50	6	3	CARDINAL
easat-2273	51	1	с si cr ni	PERSON
easat-2273	51	2	0.10	CARDINAL
easat-2273	51	3	9.0 6.0	CARDINAL
easat-2273	52	1	ae	ORG
easat-2273	53	1	20 mm	QUANTITY
easat-2273	53	2	ae	ORG
easat-2273	53	3	15 mm	QUANTITY
easat-2273	55	1	50 mm	QUANTITY
easat-2273	55	2	12kh18n10	DATE
easat-2273	55	3	1b	CARDINAL
easat-2273	55	4	1c	CARDINAL
easat-2273	56	1	1	CARDINAL
easat-2273	56	2	20	CARDINAL
easat-2273	56	3	12kh18n10	CARDINAL
easat-2273	58	1	1557	CARDINAL
easat-2273	58	2	2576-8484	DATE
easat-2273	58	3	8	CARDINAL
easat-2273	59	1	6	CARDINAL
easat-2273	59	2	1554-1565	DATE
easat-2273	59	3	2024	CARDINAL
easat-2273	59	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	59	5	2024	CARDINAL
easat-2273	59	6	2	CARDINAL
easat-2273	59	7	20	CARDINAL
easat-2273	59	8	650°с	QUANTITY
easat-2273	59	9	1 hour	TIME
easat-2273	59	10	5 hours	TIME
easat-2273	59	11	25 hours	TIME
easat-2273	59	12	200x	CARDINAL
easat-2273	60	1	650°	QUANTITY
easat-2273	60	2	1 hour	TIME
easat-2273	60	3	5 hours	TIME
easat-2273	60	4	25 hours	TIME
easat-2273	62	1	4	CARDINAL
easat-2273	63	1	4	CARDINAL
easat-2273	63	2	20	CARDINAL
easat-2273	65	1	1 1	CARDINAL
easat-2273	65	2	45	CARDINAL
easat-2273	65	3	25	CARDINAL
easat-2273	65	4	20	CARDINAL
easat-2273	66	1	3	CARDINAL
easat-2273	66	2	20	CARDINAL
easat-2273	67	1	1558	CARDINAL
easat-2273	67	2	2576-8484	DATE
easat-2273	67	3	8	CARDINAL
easat-2273	68	1	6	CARDINAL
easat-2273	68	2	1554-1565	DATE
easat-2273	68	3	2024	CARDINAL
easat-2273	68	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	68	5	2024	CARDINAL
easat-2273	68	6	3	CARDINAL
easat-2273	68	7	20	CARDINAL
easat-2273	70	1	0.5 mm/min	QUANTITY
easat-2273	70	2	5982	DATE
easat-2273	71	1	ae	ORG
easat-2273	72	1	4	CARDINAL
easat-2273	73	1	ae signal	ORG
easat-2273	74	1	four	CARDINAL
easat-2273	74	2	ae	ORG
easat-2273	74	3	two	CARDINAL
easat-2273	74	4	two	CARDINAL
easat-2273	75	1	4b	CARDINAL
easat-2273	76	1	ae	ORG
easat-2273	77	1	4	CARDINAL
easat-2273	78	1	5982	DATE
easat-2273	78	2	ae	ORG
easat-2273	79	1	32	CARDINAL
easat-2273	79	2	gt200 ae	PERSON
easat-2273	79	3	180 khz	QUANTITY
easat-2273	80	1	100–400	CARDINAL
easat-2273	81	1	40 db	QUANTITY
easat-2273	82	1	20	CARDINAL
easat-2273	82	2	12kh18n10	CARDINAL
easat-2273	83	1	0.5 mm	QUANTITY
easat-2273	84	1	3	CARDINAL
easat-2273	84	2	3.1	CARDINAL
easat-2273	85	1	5	CARDINAL
easat-2273	85	2	20	CARDINAL
easat-2273	86	1	5a	CARDINAL
easat-2273	87	1	12kh18n10	CARDINAL
easat-2273	87	2	20	CARDINAL
easat-2273	87	3	12kh18n10	CARDINAL
easat-2273	89	1	≈ 270	CARDINAL
easat-2273	89	2	20	CARDINAL
easat-2273	90	1	≈ 320	CARDINAL
easat-2273	91	1	1559	CARDINAL
easat-2273	91	2	2576-8484	DATE
easat-2273	91	3	8	CARDINAL
easat-2273	91	4	6	CARDINAL
easat-2273	91	5	1554-1565	DATE
easat-2273	91	6	2024	CARDINAL
easat-2273	91	7	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	91	8	2024	CARDINAL
easat-2273	92	1	5	CARDINAL
easat-2273	92	2	20	CARDINAL
easat-2273	93	1	σ0.2	PRODUCT
easat-2273	93	2	15	CARDINAL
easat-2273	93	3	631 55	CARDINAL
easat-2273	93	4	5	CARDINAL
easat-2273	94	1	20	CARDINAL
easat-2273	94	2	12kh18n10	CARDINAL
easat-2273	94	3	1	CARDINAL
easat-2273	94	4	2	CARDINAL
easat-2273	94	5	1 hour	TIME
easat-2273	94	6	650°с	QUANTITY
easat-2273	94	7	3 – 5 hours	TIME
easat-2273	94	8	650°с	QUANTITY
easat-2273	94	9	4 – 25 hours	TIME
easat-2273	94	10	650°с	QUANTITY
easat-2273	95	1	5b	CARDINAL
easat-2273	96	1	5b	CARDINAL
easat-2273	96	2	1	CARDINAL
easat-2273	96	3	about 250	CARDINAL
easat-2273	97	1	approximately 250	CARDINAL
easat-2273	97	2	12kh18n10	CARDINAL
easat-2273	97	3	320	CARDINAL
easat-2273	97	4	20	CARDINAL
easat-2273	99	1	20	CARDINAL
easat-2273	101	1	5b	CARDINAL
easat-2273	101	2	2–4	CARDINAL
easat-2273	102	1	650°	QUANTITY
easat-2273	102	2	1 hour	TIME
easat-2273	102	3	650°	QUANTITY
easat-2273	102	4	5 hours	TIME
easat-2273	103	1	650°	QUANTITY
easat-2273	103	2	25 hours	TIME
easat-2273	103	3	20	CARDINAL
easat-2273	104	1	3.2	CARDINAL
easat-2273	105	1	ae	ORG
easat-2273	105	2	6	CARDINAL
easat-2273	105	3	7	CARDINAL
easat-2273	105	4	ae	ORG
easat-2273	105	5	ae	ORG
easat-2273	105	6	6a	CARDINAL
easat-2273	105	7	7a	CARDINAL
easat-2273	105	8	145 µm	MONEY
easat-2273	105	9	6b	CARDINAL
easat-2273	105	10	7b	CARDINAL
easat-2273	105	11	up to	CARDINAL
easat-2273	105	12	6c	CARDINAL
easat-2273	105	13	7c	CARDINAL
easat-2273	106	1	ae	ORG
easat-2273	107	1	ae	ORG
easat-2273	107	2	ae	ORG
easat-2273	108	1	ae	ORG
easat-2273	108	2	1560	CARDINAL
easat-2273	108	3	2576-8484	DATE
easat-2273	108	4	8	CARDINAL
easat-2273	109	1	6	CARDINAL
easat-2273	109	2	1554-1565	DATE
easat-2273	109	3	2024	CARDINAL
easat-2273	109	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	109	5	2024	CARDINAL
easat-2273	109	6	20	CARDINAL
easat-2273	109	7	ae	ORG
easat-2273	110	1	11	CARDINAL
easat-2273	110	2	12	CARDINAL
easat-2273	110	3	ae	ORG
easat-2273	111	1	monotonic	ORG
easat-2273	111	2	13	CARDINAL
easat-2273	111	3	14	CARDINAL
easat-2273	112	1	300	CARDINAL
easat-2273	112	2	ae	ORG
easat-2273	112	3	ae	ORG
easat-2273	113	1	290	CARDINAL
easat-2273	113	2	310	CARDINAL
easat-2273	113	3	1-2 minutes	TIME
easat-2273	113	4	one hour	TIME
easat-2273	114	1	6	CARDINAL
easat-2273	115	1	ae	ORG
easat-2273	115	2	145	CARDINAL
easat-2273	115	3	225	CARDINAL
easat-2273	116	1	7	CARDINAL
easat-2273	117	1	ae	ORG
easat-2273	117	2	145	CARDINAL
easat-2273	117	3	225	CARDINAL
easat-2273	118	1	ae	ORG
easat-2273	118	2	6	CARDINAL
easat-2273	118	3	7	CARDINAL
easat-2273	118	4	ae	ORG
easat-2273	118	5	8	CARDINAL
easat-2273	119	1	ae	ORG
easat-2273	119	2	15]—during	CARDINAL
easat-2273	119	3	2576-8484	DATE
easat-2273	119	4	8	CARDINAL
easat-2273	119	5	6	CARDINAL
easat-2273	119	6	1554-1565	DATE
easat-2273	119	7	2024	CARDINAL
easat-2273	119	8	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	119	9	2024	CARDINAL
easat-2273	119	10	ae	ORG
easat-2273	119	11	ae	ORG
easat-2273	120	1	8	CARDINAL
easat-2273	121	1	145	CARDINAL
easat-2273	121	2	225	CARDINAL
easat-2273	122	1	9	CARDINAL
easat-2273	123	1	ae	ORG
easat-2273	123	2	145	CARDINAL
easat-2273	123	3	225	CARDINAL
easat-2273	124	1	ae	ORG
easat-2273	124	2	ae	ORG
easat-2273	124	3	300	CARDINAL
easat-2273	125	1	1562	CARDINAL
easat-2273	125	2	2576-8484	DATE
easat-2273	125	3	8	CARDINAL
easat-2273	126	1	6	CARDINAL
easat-2273	126	2	1554-1565	DATE
easat-2273	126	3	2024	CARDINAL
easat-2273	126	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	126	5	2024	CARDINAL
easat-2273	127	1	10	CARDINAL
easat-2273	128	1	ae	ORG
easat-2273	128	2	600	CARDINAL
easat-2273	128	3	ae	ORG
easat-2273	129	1	650°	QUANTITY
easat-2273	129	2	25 hours	TIME
easat-2273	129	3	ae	ORG
easat-2273	130	1	ae	ORG
easat-2273	130	2	ae	ORG
easat-2273	130	3	10-15	QUANTITY
easat-2273	130	4	10	CARDINAL
easat-2273	131	1	ae	ORG
easat-2273	131	2	20	CARDINAL
easat-2273	131	3	ae	ORG
easat-2273	132	1	ae	ORG
easat-2273	133	1	ae	ORG
easat-2273	133	2	ae	ORG
easat-2273	133	3	300	CARDINAL
easat-2273	134	1	2	CARDINAL
easat-2273	134	2	16	CARDINAL
easat-2273	135	1	3.4	CARDINAL
easat-2273	136	1	ae	ORG
easat-2273	136	2	290	CARDINAL
easat-2273	136	3	310	CARDINAL
easat-2273	136	4	1563	CARDINAL
easat-2273	136	5	2576-8484	DATE
easat-2273	136	6	8	CARDINAL
easat-2273	137	1	6	CARDINAL
easat-2273	137	2	1554-1565	DATE
easat-2273	137	3	2024	CARDINAL
easat-2273	137	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	137	5	2024	CARDINAL
easat-2273	137	6	11	CARDINAL
easat-2273	137	7	ae	ORG
easat-2273	137	8	145	CARDINAL
easat-2273	137	9	600	CARDINAL
easat-2273	143	1	1	CARDINAL
easat-2273	143	2	17	CARDINAL
easat-2273	143	3	𝑓𝑚𝑒𝑑 𝑓𝑚𝑒𝑑	PERSON
easat-2273	143	4	1	CARDINAL
easat-2273	143	5	s(f	ORG
easat-2273	143	6	fu и fl	PERSON
easat-2273	145	1	155165	DATE
easat-2273	145	2	170	CARDINAL
easat-2273	146	1	4.	CARDINAL
easat-2273	146	2	20	CARDINAL
easat-2273	147	1	ae	ORG
easat-2273	147	2	ae	ORG
easat-2273	148	1	ae	ORG
easat-2273	149	1	20	CARDINAL
easat-2273	149	2	ae	ORG
easat-2273	149	3	approximately 300	CARDINAL
easat-2273	150	1	650°	QUANTITY
easat-2273	150	2	25 hours	TIME
easat-2273	150	3	600	CARDINAL
easat-2273	150	4	ae	ORG
easat-2273	150	5	ae	ORG
easat-2273	150	6	10-15	QUANTITY
easat-2273	151	1	ae	ORG
easat-2273	151	2	20	CARDINAL
easat-2273	152	1	ae	ORG
easat-2273	152	2	1564	CARDINAL
easat-2273	152	3	2576-8484	DATE
easat-2273	153	1	8	CARDINAL
easat-2273	154	1	6	CARDINAL
easat-2273	154	2	1554-1565	DATE
easat-2273	154	3	2024	CARDINAL
easat-2273	154	4	10.55214/25768484.v8i6.2273	CARDINAL
easat-2273	154	5	2024	CARDINAL
easat-2273	154	6	ae	ORG
easat-2273	154	7	20	CARDINAL
easat-2273	155	1	ae	ORG
easat-2273	155	2	300	CARDINAL
easat-2273	158	1	the russian science foundation no	ORG
easat-2273	159	1	23	CARDINAL
easat-2273	159	2	2024	CARDINAL
easat-2273	160	1	https://creativecommons.org/licenses/by/4.0/	WORK_OF_ART
easat-2273	161	1	1	CARDINAL
easat-2273	161	2	khodakov	PERSON
easat-2273	161	3	d.v. khodakov	PERSON
easat-2273	161	4	30	CARDINAL
easat-2273	161	5	12	CARDINAL
easat-2273	162	1	935-940	CARDINAL
easat-2273	162	2	2016	DATE
easat-2273	164	1	10.1080/09507116.2016.1157331	CARDINAL
easat-2273	164	2	2	CARDINAL
easat-2273	164	3	goncharov	PERSON
easat-2273	164	4	marchenkov	PERSON
easat-2273	164	5	zhmurko	GPE
easat-2273	164	6	a.p sliva	PERSON
easat-2273	165	1	681	CARDINAL
easat-2273	166	1	012016	DATE
easat-2273	166	2	2019	DATE
easat-2273	167	1	10.1088/1757-899x/681/1/012016	CARDINAL
easat-2273	168	1	3	CARDINAL
easat-2273	168	2	a. v. berezovsky	PERSON
easat-2273	168	3	e. b. votinova	PERSON
easat-2273	168	4	a. s. smolentsev	PERSON
easat-2273	168	5	iss	PERSON
easat-2273	168	6	5	CARDINAL
easat-2273	168	7	31–38	CARDINAL
easat-2273	168	8	10.17804/24109908.2023.5.031	CARDINAL
easat-2273	168	9	2023	CARDINAL
easat-2273	169	1	4	CARDINAL
easat-2273	169	2	mani jayavelu	PERSON
easat-2273	169	3	srinivasan kasi	PERSON
easat-2273	169	4	balasubramanian	NORP
easat-2273	169	5	prasanna nagasai	PERSON
easat-2273	169	6	sudhakara dara	PERSON
easat-2273	169	7	aisi 316l	PERSON
easat-2273	169	8	today	DATE
easat-2273	169	9	2023	CARDINAL
easat-2273	169	10	5	CARDINAL
easat-2273	169	11	v.g. shmorgun	GPE
easat-2273	169	12	o.v.	GPE
easat-2273	169	13	slautin	GPE
easat-2273	169	14	v.p. kulevich	PERSON
easat-2273	169	15	a.i.	PERSON
easat-2273	169	16	bogdanov	GPE
easat-2273	169	17	l.m. gurevich	GPE
easat-2273	169	18	a.g.	GPE
easat-2273	169	19	2024	DATE
easat-2273	169	20	14	DATE
easat-2273	169	21	298	CARDINAL
easat-2273	171	1	6	CARDINAL
easat-2273	171	2	v.g. shmorgun	GPE
easat-2273	171	3	a.i. bogdanov	PERSON
easat-2273	171	4	kulevich	PERSON
easat-2273	171	5	67	CARDINAL
easat-2273	171	6	1138–1145	DATE
easat-2273	171	7	2023	CARDINAL
easat-2273	173	1	7	CARDINAL
easat-2273	173	2	gadalov	PERSON
easat-2273	173	3	a.e. gvozdev	PERSON
easat-2273	173	4	a.g. kolmakov	GPE
easat-2273	178	1	11	CARDINAL
easat-2273	178	2	198–201	DATE
easat-2273	178	3	2020	DATE
easat-2273	180	1	8	CARDINAL
easat-2273	181	1	ozolin et al	PERSON
easat-2273	181	2	sn-cu-co metallic	ORG
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easat-2273	207	1	10.1063/1.5052679	CARDINAL