id	sid	eid	entity	type
easat-3216	1	1	2576-8484	DATE
easat-3216	1	2	8	CARDINAL
easat-3216	1	3	6	CARDINAL
easat-3216	1	4	5501 2024	CARDINAL
easat-3216	1	5	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	1	6	2024	CARDINAL
easat-3216	1	7	2024	CARDINAL
easat-3216	2	1	arslan asim1	PERSON
easat-3216	3	1	mokhtarpour1	ORG
easat-3216	3	2	michael cada1,2	PERSON
easat-3216	3	3	yuan ma1 1department	ORG
easat-3216	3	4	dalhousie university	ORG
easat-3216	3	5	halifax	GPE
easat-3216	3	6	ns b3h	GPE
easat-3216	3	7	4r2	CARDINAL
easat-3216	3	8	canada	GPE
easat-3216	3	9	a.a.	GPE
easat-3216	4	1	reza.mokhtarpour@dal.ca	PERSON
easat-3216	4	2	r.m.	GPE
easat-3216	5	1	2faculty	CARDINAL
easat-3216	5	2	ostrava	ORG
easat-3216	5	3	708 00	DATE
easat-3216	5	4	ostrava	GPE
easat-3216	5	5	czech	NORP
easat-3216	15	1	500	CARDINAL
easat-3216	15	2	220	CARDINAL
easat-3216	16	1	four	CARDINAL
easat-3216	17	1	ansys lumerical	PERSON
easat-3216	19	1	two	CARDINAL
easat-3216	22	1	applied nanotools inc.	ORG
easat-3216	23	1	25oc	ORDINAL
easat-3216	25	1	soi	ORG
easat-3216	26	1	1	CARDINAL
easat-3216	26	2	the last century	DATE
easat-3216	27	1	1965	DATE
easat-3216	27	2	moore	ORG
easat-3216	27	3	every year	DATE
easat-3216	27	4	1	CARDINAL
easat-3216	28	1	2 years	DATE
easat-3216	29	1	decades	DATE
easat-3216	30	1	2	CARDINAL
easat-3216	30	2	3	CARDINAL
easat-3216	30	3	4	CARDINAL
easat-3216	30	4	5	CARDINAL
easat-3216	32	1	moore	PERSON
easat-3216	33	1	one	CARDINAL
easat-3216	34	1	moore	ORG
easat-3216	34	2	miller	PERSON
easat-3216	34	3	today	DATE
easat-3216	34	4	6	CARDINAL
easat-3216	37	1	nanophotonics	PERSON
easat-3216	39	1	5491	CARDINAL
easat-3216	39	2	2576-8484	DATE
easat-3216	39	3	8	CARDINAL
easat-3216	40	1	6	CARDINAL
easat-3216	40	2	5490-5501	CARDINAL
easat-3216	40	3	2024	CARDINAL
easat-3216	40	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	40	5	2024	CARDINAL
easat-3216	47	1	7	CARDINAL
easat-3216	47	2	8	CARDINAL
easat-3216	47	3	9	CARDINAL
easat-3216	48	1	two	CARDINAL
easat-3216	55	1	10	CARDINAL
easat-3216	55	2	11	CARDINAL
easat-3216	57	1	four	CARDINAL
easat-3216	58	1	ansys lumerical	PERSON
easat-3216	59	1	matlab	ORG
easat-3216	61	1	applied nanotools inc.	ORG
easat-3216	64	1	2.	CARDINAL
easat-3216	64	2	2.1	CARDINAL
easat-3216	65	1	12	CARDINAL
easat-3216	65	2	13	CARDINAL
easat-3216	65	3	14	CARDINAL
easat-3216	66	1	three	CARDINAL
easat-3216	66	2	1	CARDINAL
easat-3216	67	1	sio2	ORG
easat-3216	68	1	220	CARDINAL
easat-3216	69	1	700μm	ORG
easat-3216	69	2	2μm	ORDINAL
easat-3216	70	1	500	CARDINAL
easat-3216	72	1	7.9874	CARDINAL
easat-3216	72	2	3.9328 x	QUANTITY
easat-3216	72	3	1015	CARDINAL
easat-3216	73	1	2	CARDINAL
easat-3216	73	2	2𝜋𝑐	ORDINAL
easat-3216	73	3	2	CARDINAL
easat-3216	73	4	1	CARDINAL
easat-3216	73	5	5492	CARDINAL
easat-3216	73	6	2576-8484	DATE
easat-3216	73	7	8	CARDINAL
easat-3216	74	1	6	CARDINAL
easat-3216	74	2	5490-5501	CARDINAL
easat-3216	74	3	2024	CARDINAL
easat-3216	74	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	74	5	2024	CARDINAL
easat-3216	74	6	1	CARDINAL
easat-3216	75	1	three	CARDINAL
easat-3216	77	1	1	CARDINAL
easat-3216	78	1	eim	ORG
easat-3216	79	1	1d	CARDINAL
easat-3216	80	1	1d	CARDINAL
easat-3216	81	1	1d	CARDINAL
easat-3216	81	2	1d	CARDINAL
easat-3216	83	1	2	CARDINAL
easat-3216	83	2	3	CARDINAL
easat-3216	83	3	2d	CARDINAL
easat-3216	84	1	1	CARDINAL
easat-3216	84	2	1d	CARDINAL
easat-3216	85	1	two	CARDINAL
easat-3216	85	2	2d	DATE
easat-3216	85	3	1	CARDINAL
easat-3216	89	1	500	CARDINAL
easat-3216	89	2	220	CARDINAL
easat-3216	89	3	second	ORDINAL
easat-3216	90	1	second	ORDINAL
easat-3216	92	1	1	CARDINAL
easat-3216	93	1	second	ORDINAL
easat-3216	99	1	2	CARDINAL
easat-3216	99	2	two	CARDINAL
easat-3216	103	1	2	CARDINAL
easat-3216	103	2	5493	DATE
easat-3216	103	3	2576-8484	DATE
easat-3216	103	4	8	CARDINAL
easat-3216	103	5	6	CARDINAL
easat-3216	103	6	5490-5501	CARDINAL
easat-3216	103	7	2024	CARDINAL
easat-3216	103	8	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	103	9	2024	CARDINAL
easat-3216	103	10	2	CARDINAL
easat-3216	103	11	sio2	ORG
easat-3216	105	1	2	CARDINAL
easat-3216	109	1	3	CARDINAL
easat-3216	111	1	3	CARDINAL
easat-3216	114	1	2.2	CARDINAL
easat-3216	114	2	mzi	ORG
easat-3216	114	3	5494	CARDINAL
easat-3216	114	4	2576-8484	DATE
easat-3216	114	5	8	CARDINAL
easat-3216	114	6	6	CARDINAL
easat-3216	114	7	5490-5501	CARDINAL
easat-3216	114	8	2024	CARDINAL
easat-3216	114	9	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	114	10	2024	CARDINAL
easat-3216	116	1	two	CARDINAL
easat-3216	119	1	two	CARDINAL
easat-3216	123	1	two	CARDINAL
easat-3216	124	1	two	CARDINAL
easat-3216	126	1	3	CARDINAL
easat-3216	127	1	𝐸1	CARDINAL
easat-3216	127	2	3	CARDINAL
easat-3216	127	3	4	CARDINAL
easat-3216	127	4	5	CARDINAL
easat-3216	127	5	2𝜋𝑛2	CARDINAL
easat-3216	127	6	6	CARDINAL
easat-3216	127	7	7	CARDINAL
easat-3216	128	1	8)	CARDINAL
easat-3216	128	2	1	CARDINAL
easat-3216	129	1	2 𝐼1	QUANTITY
easat-3216	129	2	1	CARDINAL
easat-3216	129	3	1	CARDINAL
easat-3216	129	4	𝐼2	CARDINAL
easat-3216	129	5	2 𝛼2	QUANTITY
easat-3216	129	6	2	CARDINAL
easat-3216	129	7	𝐿1	CARDINAL
easat-3216	129	8	1	CARDINAL
easat-3216	129	9	𝐸1	CARDINAL
easat-3216	129	10	1 𝐿2	CARDINAL
easat-3216	129	11	2	CARDINAL
easat-3216	129	12	2	CARDINAL
easat-3216	129	13	1	CARDINAL
easat-3216	129	14	1	CARDINAL
easat-3216	129	15	2	CARDINAL
easat-3216	129	16	2	CARDINAL
easat-3216	129	17	1	CARDINAL
easat-3216	129	18	5495	CARDINAL
easat-3216	129	19	2576-8484	DATE
easat-3216	129	20	8	CARDINAL
easat-3216	130	1	6	CARDINAL
easat-3216	130	2	5490-5501	CARDINAL
easat-3216	130	3	2024	CARDINAL
easat-3216	130	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	130	5	2024	CARDINAL
easat-3216	130	6	4	CARDINAL
easat-3216	130	7	4	CARDINAL
easat-3216	131	1	605	CARDINAL
easat-3216	131	2	410	CARDINAL
easat-3216	133	1	ansys lumerical	PERSON
easat-3216	134	1	4	CARDINAL
easat-3216	134	2	15	CARDINAL
easat-3216	135	1	16	CARDINAL
easat-3216	135	2	17	CARDINAL
easat-3216	138	1	two	CARDINAL
easat-3216	139	1	two	CARDINAL
easat-3216	140	1	3	CARDINAL
easat-3216	140	2	fsr	ORG
easat-3216	141	1	fsr	ORG
easat-3216	142	1	2	CARDINAL
easat-3216	145	1	mzi 4	ORG
easat-3216	148	1	6	CARDINAL
easat-3216	149	1	two	CARDINAL
easat-3216	150	1	1.5 µm and	CARDINAL
easat-3216	150	2	1.58	CARDINAL
easat-3216	150	3	four	CARDINAL
easat-3216	150	4	5	CARDINAL
easat-3216	154	1	5496	CARDINAL
easat-3216	154	2	2576-8484	DATE
easat-3216	154	3	8	CARDINAL
easat-3216	155	1	6	CARDINAL
easat-3216	155	2	5490-5501	CARDINAL
easat-3216	155	3	2024	CARDINAL
easat-3216	155	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	155	5	2024	CARDINAL
easat-3216	155	6	4	CARDINAL
easat-3216	156	1	4	CARDINAL
easat-3216	158	1	5497	CARDINAL
easat-3216	158	2	2576-8484	DATE
easat-3216	158	3	8	CARDINAL
easat-3216	159	1	6	CARDINAL
easat-3216	159	2	5490-5501	CARDINAL
easat-3216	159	3	2024	CARDINAL
easat-3216	159	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	159	5	2024	CARDINAL
easat-3216	160	1	5	CARDINAL
easat-3216	162	1	1.5 µm and	CARDINAL
easat-3216	163	1	2	CARDINAL
easat-3216	166	1	fsr	ORG
easat-3216	166	2	𝑺𝑰𝑴𝑼𝑳𝑨𝑻𝑰𝑶𝑵	ORG
easat-3216	166	3	1 105.15	CARDINAL
easat-3216	166	4	2.05	CARDINAL
easat-3216	166	5	2.00	CARDINAL
easat-3216	166	6	2.439 %	PERCENT
easat-3216	166	7	2	CARDINAL
easat-3216	166	8	1.96	CARDINAL
easat-3216	166	9	1.92	CARDINAL
easat-3216	166	10	2.041 %	PERCENT
easat-3216	166	11	3 141.9	CARDINAL
easat-3216	166	12	62.00	CARDINAL
easat-3216	166	13	60.88	CARDINAL
easat-3216	166	14	1.12 %	PERCENT
easat-3216	166	15	4 138.797 µm 62.15 nm 57.28	QUANTITY
easat-3216	166	16	7.836 %	PERCENT
easat-3216	166	17	4	CARDINAL
easat-3216	166	18	applied nanotools inc.	ORG
easat-3216	166	19	edmonton	GPE
easat-3216	166	20	alberta	GPE
easat-3216	167	1	100	CARDINAL
easat-3216	168	1	23	CARDINAL
easat-3216	169	1	200 mm	QUANTITY
easat-3216	170	1	25 mm	QUANTITY
easat-3216	170	2	25 mm	QUANTITY
easat-3216	171	1	3 h2so4	QUANTITY
easat-3216	171	2	1	CARDINAL
easat-3216	175	1	the university of british columbia	ORG
easat-3216	176	1	tetramethylammonium	PERSON
easat-3216	178	1	4	CARDINAL
easat-3216	179	1	icp-rie etch	ORG
easat-3216	181	1	2.2	CARDINAL
easat-3216	183	1	300oc	GPE
easat-3216	185	1	5498	CARDINAL
easat-3216	185	2	2576-8484	DATE
easat-3216	185	3	8	CARDINAL
easat-3216	186	1	6	CARDINAL
easat-3216	186	2	5490-5501	CARDINAL
easat-3216	186	3	2024	CARDINAL
easat-3216	186	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	186	5	2024	CARDINAL
easat-3216	186	6	81635a	DATE
easat-3216	187	1	10pm	TIME
easat-3216	189	1	3	CARDINAL
easat-3216	192	1	max	PERSON
easat-3216	193	1	fsr min	PERSON
easat-3216	193	2	18	CARDINAL
easat-3216	193	3	4 1.5 1.6	QUANTITY
easat-3216	193	4	6.56	CARDINAL
easat-3216	193	5	0.81	CARDINAL
easat-3216	193	6	19	CARDINAL
easat-3216	193	7	5 1.5 1.6	QUANTITY
easat-3216	193	8	20	CARDINAL
easat-3216	193	9	7 1.5 1.6	QUANTITY
easat-3216	193	10	14	CARDINAL
easat-3216	193	11	3.19	CARDINAL
easat-3216	193	12	21	CARDINAL
easat-3216	193	13	2	CARDINAL
easat-3216	193	14	ibm	ORG
easat-3216	194	1	22	CARDINAL
easat-3216	194	2	1 1.54	CARDINAL
easat-3216	194	3	1.62	CARDINAL
easat-3216	194	4	4 1.5 1.6 µm 62.15	QUANTITY
easat-3216	194	5	1.96	CARDINAL
easat-3216	194	6	5	CARDINAL
easat-3216	194	7	4	CARDINAL
easat-3216	196	1	ansys lumerical	PERSON
easat-3216	197	1	applied nanotools inc.	ORG
easat-3216	200	1	fsr	ORG
easat-3216	202	1	fsr	ORG
easat-3216	202	2	3	CARDINAL
easat-3216	204	1	15	CARDINAL
easat-3216	205	1	two	CARDINAL
easat-3216	206	1	1x2	CARDINAL
easat-3216	207	1	13	CARDINAL
easat-3216	207	2	16	CARDINAL
easat-3216	208	1	16	CARDINAL
easat-3216	208	2	2x2	CARDINAL
easat-3216	210	1	5499	DATE
easat-3216	210	2	2576-8484	DATE
easat-3216	210	3	8	CARDINAL
easat-3216	211	1	6	CARDINAL
easat-3216	211	2	5490-5501	CARDINAL
easat-3216	211	3	2024	CARDINAL
easat-3216	211	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	211	5	2024	CARDINAL
easat-3216	212	1	6	CARDINAL
easat-3216	212	2	two	CARDINAL
easat-3216	213	1	5500	CARDINAL
easat-3216	213	2	2576-8484	DATE
easat-3216	213	3	8	CARDINAL
easat-3216	214	1	6	CARDINAL
easat-3216	214	2	5490-5501	CARDINAL
easat-3216	214	3	2024	CARDINAL
easat-3216	214	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	214	5	2024	CARDINAL
easat-3216	214	6	canada	GPE
easat-3216	215	1	arslan asim	PERSON
easat-3216	216	1	nova scotia	LOC
easat-3216	216	2	dalhousie university	ORG
easat-3216	217	1	edx ubcx	ORG
easat-3216	217	2	council of canada	ORG
easat-3216	220	1	cameron horvath	PERSON
easat-3216	220	2	applied nanotools, inc.	ORG
easat-3216	220	3	the university of british columbia	ORG
easat-3216	221	1	2024	CARDINAL
easat-3216	222	1	https://creativecommons.org/licenses/by/4.0/	WORK_OF_ART
easat-3216	223	1	1	CARDINAL
easat-3216	223	2	moore	PERSON
easat-3216	224	1	38	DATE
easat-3216	224	2	8	CARDINAL
easat-3216	225	1	1-14, 1965	DATE
easat-3216	226	1	2	CARDINAL
easat-3216	226	2	t. n. theis	PERSON
easat-3216	226	3	h. p. wong	PERSON
easat-3216	226	4	moore	PERSON
easat-3216	226	5	19	CARDINAL
easat-3216	226	6	2	CARDINAL
easat-3216	231	1	3	CARDINAL
easat-3216	231	2	c. e. leiserson	PERSON
easat-3216	231	3	n. c. thompson	PERSON
easat-3216	231	4	j. s. emer	PERSON
easat-3216	231	5	b. c. kuszmaul	PERSON
easat-3216	231	6	b. w. lampson	PERSON
easat-3216	231	7	d. sanchez	PERSON
easat-3216	231	8	t. b. schardl	PERSON
easat-3216	231	9	moore	PERSON
easat-3216	232	1	368	CARDINAL
easat-3216	232	2	6495	CARDINAL
easat-3216	232	3	2020	DATE
easat-3216	235	1	4	CARDINAL
easat-3216	235	2	m. horowitz	PERSON
easat-3216	235	3	2014	DATE
easat-3216	236	1	feb 2014	DATE
easat-3216	241	1	5	CARDINAL
easat-3216	241	2	k. leswing	PERSON
easat-3216	241	3	intel	ORG
easat-3216	241	4	moore	PERSON
easat-3216	242	1	nvidia	ORG
easat-3216	243	1	https://www.cnbc.com/2022/09/27/intel-says-moores-law-is-still-alive-nvidia-says-its-ended.html	PERSON
easat-3216	243	2	jun. 5	DATE
easat-3216	243	3	2024	DATE
easat-3216	244	1	6	CARDINAL
easat-3216	244	2	s. e. miller	PERSON
easat-3216	244	3	bell syst	ORG
easat-3216	246	1	j.	PERSON
easat-3216	246	2	48	DATE
easat-3216	246	3	2059, 1969	DATE
easat-3216	247	1	7	CARDINAL
easat-3216	247	2	m. lipson	PERSON
easat-3216	247	3	j. lightw	PERSON
easat-3216	248	1	technol	PERSON
easat-3216	249	1	23	CARDINAL
easat-3216	249	2	12, 2005	DATE
easat-3216	250	1	8	CARDINAL
easat-3216	250	2	r. almeida	PERSON
easat-3216	250	3	c. a.	PERSON
easat-3216	250	4	r.	NORP
easat-3216	250	5	m. lipson	PERSON
easat-3216	251	1	431	CARDINAL
easat-3216	252	1	7012	DATE
easat-3216	253	1	1081-1084	CARDINAL
easat-3216	253	2	oct. 2004	DATE
easat-3216	254	1	9	CARDINAL
easat-3216	254	2	w. bogaerts	PERSON
easat-3216	254	3	m. fiers	PERSON
easat-3216	254	4	dumon	ORG
easat-3216	254	5	j. sel	PERSON
easat-3216	256	1	20	CARDINAL
easat-3216	256	2	4	CARDINAL
easat-3216	256	3	2014	DATE
easat-3216	258	1	10	CARDINAL
easat-3216	258	2	b. jalali	PERSON
easat-3216	258	3	s. fathpour	PERSON
easat-3216	258	4	j. lightw	PERSON
easat-3216	259	1	technol	PERSON
easat-3216	260	1	24	CARDINAL
easat-3216	260	2	12	CARDINAL
easat-3216	261	1	4600–4615	CARDINAL
easat-3216	261	2	dec. 2006	DATE
easat-3216	261	3	10.1109	CARDINAL
easat-3216	262	1	11	CARDINAL
easat-3216	262	2	z. yao et al.	PERSON
easat-3216	262	3	j. sel	PERSON
easat-3216	262	4	quantum	ORG
easat-3216	263	1	24	CARDINAL
easat-3216	263	2	6	CARDINAL
easat-3216	264	1	1-24	DATE
easat-3216	264	2	2018	DATE
easat-3216	265	1	12	CARDINAL
easat-3216	265	2	w. bogaerts	PERSON
easat-3216	265	3	l. chrostowski	PERSON
easat-3216	266	1	12	CARDINAL
easat-3216	266	2	4	CARDINAL
easat-3216	266	3	2018	DATE
easat-3216	267	1	13	CARDINAL
easat-3216	267	2	l. chrostowski	PERSON
easat-3216	267	3	m. hochberg	PERSON
easat-3216	267	4	cambridge	GPE
easat-3216	267	5	univ.	ORG
easat-3216	268	1	2015	DATE
easat-3216	269	1	a. yariv	PERSON
easat-3216	269	2	p. yeh	PERSON
easat-3216	270	1	london	GPE
easat-3216	270	2	u.k.	GPE
easat-3216	271	1	oxford	NORP
easat-3216	272	1	2007	DATE
easat-3216	273	1	14	CARDINAL
easat-3216	273	2	nov. 30, 2018	DATE
easat-3216	276	1	15	CARDINAL
easat-3216	276	2	nov. 30, 2018	DATE
easat-3216	279	1	16	CARDINAL
easat-3216	279	2	nov. 30, 2018	DATE
easat-3216	281	1	17	CARDINAL
easat-3216	281	2	r. s. e. shamy	PERSON
easat-3216	281	3	a. e. afifi	PERSON
easat-3216	281	4	m. m. badr	PERSON
easat-3216	281	5	m. a. swillam	PERSON
easat-3216	281	6	asymmetric mach zehnder	PERSON
easat-3216	281	7	sci.	ORG
easat-3216	282	1	12	CARDINAL
easat-3216	282	2	1	CARDINAL
easat-3216	282	3	2022	CARDINAL
easat-3216	284	1	3598	CARDINAL
easat-3216	285	1	18	CARDINAL
easat-3216	285	2	a. sivasubramanian	PERSON
easat-3216	285	3	r. henry	PERSON
easat-3216	285	4	2019	CARDINAL
easat-3216	285	5	5th	ORDINAL
easat-3216	286	1	converg	PERSON
easat-3216	287	1	technol	PERSON
easat-3216	288	1	2019	DATE
easat-3216	289	1	2019	DATE
easat-3216	289	2	10.1109	CARDINAL
easat-3216	290	1	19	CARDINAL
easat-3216	290	2	h. saghaei	PERSON
easat-3216	290	3	r. karimzadeh	PERSON
easat-3216	291	1	nanostructuresfundam	PERSON
easat-3216	293	1	37	DATE
easat-3216	294	1	aug.	GPE
easat-3216	294	2	aug. 2019	DATE
easat-3216	296	1	100733	DATE
easat-3216	296	2	10.1016	CARDINAL
easat-3216	299	1	5501	CARDINAL
easat-3216	299	2	2576-8484	DATE
easat-3216	300	1	8	CARDINAL
easat-3216	301	1	6	CARDINAL
easat-3216	301	2	5490-5501	CARDINAL
easat-3216	301	3	2024	CARDINAL
easat-3216	301	4	10.55214/25768484.v8i6.3216	CARDINAL
easat-3216	301	5	2024	CARDINAL
easat-3216	302	1	20	CARDINAL
easat-3216	302	2	2	CARDINAL
easat-3216	302	3	2	CARDINAL
easat-3216	302	4	j. lightw	PERSON
easat-3216	303	1	technol	PERSON
easat-3216	304	1	33	DATE
easat-3216	304	2	17	CARDINAL
easat-3216	305	1	3597–3606,	DATE
easat-3216	305	2	2015	DATE
easat-3216	306	1	n. dupuis et al.	PERSON
easat-3216	306	2	2	CARDINAL
easat-3216	306	3	2	CARDINAL
easat-3216	306	4	j. lightw	PERSON
easat-3216	307	1	technol	PERSON
easat-3216	308	1	33	DATE
easat-3216	308	2	17	CARDINAL
easat-3216	309	1	3597–3606,	DATE
easat-3216	309	2	2015	DATE
easat-3216	310	1	21	CARDINAL
easat-3216	310	2	z. mohammed	PERSON
easat-3216	310	3	m. rasras	PERSON
easat-3216	310	4	2	CARDINAL
easat-3216	310	5	2	CARDINAL
easat-3216	311	1	lett.	PERSON
easat-3216	311	2	46	DATE
easat-3216	311	3	15	CARDINAL
easat-3216	311	4	3781	CARDINAL
easat-3216	311	5	2021	DATE
easat-3216	311	6	10.1364/ol.431300	CARDINAL
easat-3216	312	1	22	CARDINAL
easat-3216	312	2	f. carcenac	PERSON
easat-3216	312	3	a. pépin	PERSON
easat-3216	312	4	y. chen	PERSON
easat-3216	312	5	m. mejias, a. lebib	PERSON
easat-3216	312	6	l. manin-ferlazzo	PERSON
easat-3216	312	7	l. couraud	PERSON
easat-3216	312	8	h. launois	PERSON
easat-3216	314	1	sci.	ORG
easat-3216	314	2	164	CARDINAL
easat-3216	315	1	1–4	CARDINAL
easat-3216	316	1	111–117	CARDINAL
easat-3216	316	2	sep	PRODUCT
easat-3216	317	1	2000.4	CARDINAL