id	sid	eid	entity	type
easat-3604	1	1	2576-8484	DATE
easat-3604	1	2	8	CARDINAL
easat-3604	1	3	6	CARDINAL
easat-3604	1	4	7404-7418 2024	DATE
easat-3604	1	5	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	1	6	2024	CARDINAL
easat-3604	1	7	2024	CARDINAL
easat-3604	1	8	1faculty	CARDINAL
easat-3604	1	9	le quy	PERSON
easat-3604	1	10	don technical university	ORG
easat-3604	1	11	hanoi	GPE
easat-3604	1	12	100000	CARDINAL
easat-3604	1	13	vietnam	GPE
easat-3604	10	1	84%	PERCENT
easat-3604	13	1	1	CARDINAL
easat-3604	13	2	one	CARDINAL
easat-3604	13	3	1	CARDINAL
easat-3604	14	1	one	CARDINAL
easat-3604	14	2	2	CARDINAL
easat-3604	15	1	the 21st century	DATE
easat-3604	17	1	3	CARDINAL
easat-3604	17	2	4	CARDINAL
easat-3604	23	1	5	CARDINAL
easat-3604	24	1	6	CARDINAL
easat-3604	24	2	8	CARDINAL
easat-3604	24	3	7	CARDINAL
easat-3604	24	4	8	CARDINAL
easat-3604	24	5	9	CARDINAL
easat-3604	26	1	linear	ORG
easat-3604	27	1	10	CARDINAL
easat-3604	28	1	7405	DATE
easat-3604	28	2	2576-8484	DATE
easat-3604	29	1	8	CARDINAL
easat-3604	29	2	6	CARDINAL
easat-3604	29	3	7404-7418	DATE
easat-3604	29	4	2024	CARDINAL
easat-3604	29	5	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	29	6	2024	CARDINAL
easat-3604	30	1	two	CARDINAL
easat-3604	30	2	11	CARDINAL
easat-3604	32	1	12	CARDINAL
easat-3604	33	1	13	CARDINAL
easat-3604	38	1	euler-bernoulli	PERSON
easat-3604	39	1	14	CARDINAL
easat-3604	40	1	15	CARDINAL
easat-3604	40	2	16	CARDINAL
easat-3604	41	1	31]-[35	CARDINAL
easat-3604	42	1	17	CARDINAL
easat-3604	43	1	18	CARDINAL
easat-3604	43	2	19	CARDINAL
easat-3604	43	3	20	CARDINAL
easat-3604	44	1	50%	PERCENT
easat-3604	44	2	only about 18%	PERCENT
easat-3604	45	1	17	CARDINAL
easat-3604	45	2	18	CARDINAL
easat-3604	47	1	19	CARDINAL
easat-3604	48	1	20	CARDINAL
easat-3604	49	1	thai	NORP
easat-3604	50	1	21	CARDINAL
easat-3604	51	1	22	CARDINAL
easat-3604	52	1	nhung	PERSON
easat-3604	53	1	23	CARDINAL
easat-3604	57	1	section 2	LAW
easat-3604	58	1	section 3	LAW
easat-3604	59	1	section 4	DATE
easat-3604	60	1	7406	DATE
easat-3604	60	2	2576-8484	DATE
easat-3604	60	3	8	CARDINAL
easat-3604	61	1	6	CARDINAL
easat-3604	61	2	7404-7418	DATE
easat-3604	61	3	2024	CARDINAL
easat-3604	61	4	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	61	5	2024	CARDINAL
easat-3604	61	6	1	CARDINAL
easat-3604	62	1	2	CARDINAL
easat-3604	62	2	euler bernoulli	PERSON
easat-3604	62	3	1a	CARDINAL
easat-3604	63	1	w	ORG
easat-3604	64	1	1b	CARDINAL
easat-3604	66	1	12	CARDINAL
easat-3604	66	2	24	CARDINAL
easat-3604	67	1	1	CARDINAL
easat-3604	68	1	1 l	QUANTITY
easat-3604	71	1	1	CARDINAL
easat-3604	71	2	0 ≤ α ≤ 1	QUANTITY
easat-3604	71	3	0	CARDINAL
easat-3604	71	4	1	CARDINAL
easat-3604	73	1	1	CARDINAL
easat-3604	74	1	2576-8484	DATE
easat-3604	74	2	8	CARDINAL
easat-3604	74	3	6	CARDINAL
easat-3604	74	4	7404-7418	DATE
easat-3604	74	5	2024	CARDINAL
easat-3604	74	6	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	74	7	2024	CARDINAL
easat-3604	74	8	2	CARDINAL
easat-3604	76	1	1	CARDINAL
easat-3604	78	1	2330 kg/m3	QUANTITY
easat-3604	78	2	0.28 1	CARDINAL
easat-3604	78	3	1.2803×1011	CARDINAL
easat-3604	78	4	1	CARDINAL
easat-3604	79	1	2	CARDINAL
easat-3604	80	1	7408	CARDINAL
easat-3604	80	2	2576-8484	DATE
easat-3604	81	1	8	CARDINAL
easat-3604	81	2	6	CARDINAL
easat-3604	81	3	7404-7418	DATE
easat-3604	81	4	2024	CARDINAL
easat-3604	81	5	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	81	6	2024	CARDINAL
easat-3604	83	1	soi	GPE
easat-3604	84	1	1	CARDINAL
easat-3604	85	1	3	CARDINAL
easat-3604	85	2	3.1	CARDINAL
easat-3604	86	1	euler	PERSON
easat-3604	87	1	12	CARDINAL
easat-3604	87	2	25	CARDINAL
easat-3604	90	1	24	CARDINAL
easat-3604	90	2	26	CARDINAL
easat-3604	90	3	25	CARDINAL
easat-3604	90	4	24	CARDINAL
easat-3604	92	1		GPE
easat-3604	92	2		GPE
easat-3604	92	3	2	CARDINAL
easat-3604	92	4	ga	ORG
easat-3604	92	5	p(x	PERSON
easat-3604	94	1	27	CARDINAL
easat-3604	94	2	4	CARDINAL
easat-3604	94	3	3	CARDINAL
easat-3604	94	4	z	ORG
easat-3604	95	1	2	CARDINAL
easat-3604	95	2	ei ag l 	ORG
easat-3604	95	3	4	CARDINAL
easat-3604	96	1	3	CARDINAL
easat-3604	96	2	1	CARDINAL
easat-3604	96	3	2	CARDINAL
easat-3604	96	4	1 ) 3	CARDINAL
easat-3604	101	1	5	CARDINAL
easat-3604	101	2	2 1	CARDINAL
easat-3604	101	3	1 6	CARDINAL
easat-3604	101	4	f w n l  	ORG
easat-3604	101	5		GPE
easat-3604	102	1	6) 7409	CARDINAL
easat-3604	102	2	2576-8484	DATE
easat-3604	102	3	8	CARDINAL
easat-3604	103	1	6	CARDINAL
easat-3604	103	2	7404-7418	DATE
easat-3604	103	3	2024	CARDINAL
easat-3604	103	4	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	103	5	2024	CARDINAL
easat-3604	103	6	2 2	CARDINAL
easat-3604	103	7	2	CARDINAL
easat-3604	103	8	3	CARDINAL
easat-3604	104	1	         +	PERSON
easat-3604	107	1	26	CARDINAL
easat-3604	107	2	2 42	CARDINAL
easat-3604	111	1		GPE
easat-3604	117	1	euler	PERSON
easat-3604	117	2	27	CARDINAL
easat-3604	117	3	4 02 2 1	CARDINAL
easat-3604	120	1		GPE
easat-3604	121	1	=  	PERCENT
easat-3604	122	1		GPE
easat-3604	123	1	9	CARDINAL
easat-3604	123	2	4	CARDINAL
easat-3604	124	1		GPE
easat-3604	125	1	=  	PERCENT
easat-3604	126	1		GPE
easat-3604	127	1	10	CARDINAL
easat-3604	127	2	9	CARDINAL
easat-3604	127	3	10	CARDINAL
easat-3604	127	4	kb	ORG
easat-3604	127	5	ks	GPE
easat-3604	127	6	𝐼1 = 𝜌𝐼𝑒𝑞	PERSON
easat-3604	127	7	𝐼0	CARDINAL
easat-3604	127	8	𝜌𝐴𝑒𝑞	ORG
easat-3604	128	1	4.352	CARDINAL
easat-3604	128	2	1.31×10-3 m2	TIME
easat-3604	130	1	5.71×10	CARDINAL
easat-3604	130	2	202	CARDINAL
easat-3604	130	3	77.7 gpa	PERCENT
easat-3604	130	4	15267 kg/m3	QUANTITY
easat-3604	132	1	0.7	CARDINAL
easat-3604	133	1	26	CARDINAL
easat-3604	133	2	27	CARDINAL
easat-3604	134	1	2	CARDINAL
easat-3604	135	1	first	ORDINAL
easat-3604	135	2	five	CARDINAL
easat-3604	137	1	26	CARDINAL
easat-3604	137	2	27	CARDINAL
easat-3604	137	3	1 6.3	CARDINAL
easat-3604	137	4	6.296	CARDINAL
easat-3604	137	5	25.1732	CARDINAL
easat-3604	137	6	100.52	CARDINAL
easat-3604	137	7	156.85	CARDINAL
easat-3604	137	8	2576-8484	DATE
easat-3604	137	9	8	CARDINAL
easat-3604	138	1	6	CARDINAL
easat-3604	138	2	7404-7418	DATE
easat-3604	138	3	2024	CARDINAL
easat-3604	138	4	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	138	5	2024	CARDINAL
easat-3604	138	6	ansys	ORG
easat-3604	138	7	first	ORDINAL
easat-3604	138	8	five	CARDINAL
easat-3604	139	1	2	CARDINAL
easat-3604	140	1	first	ORDINAL
easat-3604	143	1	1401.1 μm	CARDINAL
easat-3604	143	2	46.9 μm	QUANTITY
easat-3604	143	3	60 μm	QUANTITY
easat-3604	143	4	28	CARDINAL
easat-3604	144	1	four	CARDINAL
easat-3604	144	2	480	CARDINAL
easat-3604	145	1	1	CARDINAL
easat-3604	145	2	169	CARDINAL
easat-3604	145	3	79.6 gpa	PERCENT
easat-3604	145	4	0.064	CARDINAL
easat-3604	146	1	ansys	PERSON
easat-3604	146	2	3d	CARDINAL
easat-3604	147	1	0.282	CARDINAL
easat-3604	147	2	3	CARDINAL
easat-3604	147	3	3	CARDINAL
easat-3604	148	1	first	ORDINAL
easat-3604	149	1	14	CARDINAL
easat-3604	149	2	182.32	CARDINAL
easat-3604	149	3	183.1	CARDINAL
easat-3604	149	4	3	CARDINAL
easat-3604	149	5	14	CARDINAL
easat-3604	149	6	just 0.426%	PERCENT
easat-3604	150	1	28	CARDINAL
easat-3604	151	1	3	CARDINAL
easat-3604	152	1	first	ORDINAL
easat-3604	153	1	4	CARDINAL
easat-3604	154	1	second	ORDINAL
easat-3604	155	1	0.967	CARDINAL
easat-3604	155	2	0.2 0.4 0.6 0.8 1	QUANTITY
easat-3604	155	3	1st	ORDINAL
easat-3604	155	4	30	CARDINAL
easat-3604	155	5	30	CARDINAL
easat-3604	155	6	20	CARDINAL
easat-3604	155	7	20 square	QUANTITY
easat-3604	155	8	15	CARDINAL
easat-3604	155	9	15	CARDINAL
easat-3604	155	10	20	CARDINAL
easat-3604	155	11	100	CARDINAL
easat-3604	155	12	0.2 0.4 0.6 0.8 1	QUANTITY
easat-3604	155	13	1st	ORDINAL
easat-3604	155	14	30	CARDINAL
easat-3604	155	15	30	CARDINAL
easat-3604	155	16	20	CARDINAL
easat-3604	155	17	20 square	QUANTITY
easat-3604	155	18	15	CARDINAL
easat-3604	155	19	15	CARDINAL
easat-3604	155	20	120	CARDINAL
easat-3604	155	21	280	CARDINAL
easat-3604	155	22	0.2 0.4 0.6 0.8 1	QUANTITY
easat-3604	155	23	2nd	ORDINAL
easat-3604	155	24	30	CARDINAL
easat-3604	155	25	30	CARDINAL
easat-3604	155	26	20	CARDINAL
easat-3604	155	27	20 square	QUANTITY
easat-3604	155	28	15	CARDINAL
easat-3604	155	29	15	CARDINAL
easat-3604	155	30	200	CARDINAL
easat-3604	156	1	600	CARDINAL
easat-3604	156	2	0.2 0.4 0.6 0.8 1	QUANTITY
easat-3604	156	3	2st	ORDINAL
easat-3604	156	4	30	CARDINAL
easat-3604	156	5	30	CARDINAL
easat-3604	156	6	20	CARDINAL
easat-3604	156	7	20 square	QUANTITY
easat-3604	156	8	15	CARDINAL
easat-3604	156	9	15	CARDINAL
easat-3604	156	10	7411	DATE
easat-3604	156	11	2576-8484	DATE
easat-3604	157	1	8	CARDINAL
easat-3604	157	2	6	CARDINAL
easat-3604	157	3	7404-7418	DATE
easat-3604	157	4	2024	CARDINAL
easat-3604	157	5	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	157	6	2024	CARDINAL
easat-3604	157	7	two	CARDINAL
easat-3604	157	8	10	CARDINAL
easat-3604	157	9	l×w×h	DATE
easat-3604	157	10	1200×120×60	CARDINAL
easat-3604	158	1	ansys	ORG
easat-3604	159	1	2	CARDINAL
easat-3604	159	2	3	DATE
easat-3604	159	3	4	CARDINAL
easat-3604	159	4	40	CARDINAL
easat-3604	159	5	60	DATE
easat-3604	159	6	80	DATE
easat-3604	159	7	30	CARDINAL
easat-3604	159	8	20	DATE
easat-3604	159	9	15 μm	CARDINAL
easat-3604	161	1	1	CARDINAL
easat-3604	161	2	0.067	CARDINAL
easat-3604	161	3	0.93	CARDINAL
easat-3604	162	1	3	CARDINAL
easat-3604	162	2	4	CARDINAL
easat-3604	162	3	first	ORDINAL
easat-3604	162	4	two	CARDINAL
easat-3604	162	5	two	CARDINAL
easat-3604	162	6	one	CARDINAL
easat-3604	162	7	one	CARDINAL
easat-3604	162	8	2	CARDINAL
easat-3604	163	1	two	CARDINAL
easat-3604	164	1	first	ORDINAL
easat-3604	164	2	two	CARDINAL
easat-3604	166	1	0.05	CARDINAL
easat-3604	166	2	0.4	CARDINAL
easat-3604	169	1	first	ORDINAL
easat-3604	169	2	two	CARDINAL
easat-3604	169	3	3a	CARDINAL
easat-3604	170	1	0.4 ≤ α	QUANTITY
easat-3604	172	1	first	ORDINAL
easat-3604	172	2	two	CARDINAL
easat-3604	172	3	6.3	CARDINAL
easat-3604	172	4	first	ORDINAL
easat-3604	172	5	2.7	CARDINAL
easat-3604	172	6	second	ORDINAL
easat-3604	174	1	3.2	CARDINAL
easat-3604	179	1	hooke	ORG
easat-3604	179	2	11	CARDINAL
easat-3604	179	3	ansys	ORG
easat-3604	179	4	three	CARDINAL
easat-3604	180	1	3d	CARDINAL
easat-3604	180	2	two	CARDINAL
easat-3604	181	1	1	CARDINAL
easat-3604	182	1	3.2.1	CARDINAL
easat-3604	182	2	two	CARDINAL
easat-3604	183	1	200	CARDINAL
easat-3604	183	2	300 μm	QUANTITY
easat-3604	183	3	16×30 μm	CARDINAL
easat-3604	184	1	1	CARDINAL
easat-3604	187	1	5	CARDINAL
easat-3604	187	2	6	CARDINAL
easat-3604	187	3	one	CARDINAL
easat-3604	188	1	15 to	QUANTITY
easat-3604	188	2	0.065	CARDINAL
easat-3604	188	3	0.875	CARDINAL
easat-3604	189	1	7412	DATE
easat-3604	189	2	2576-8484	DATE
easat-3604	189	3	8	CARDINAL
easat-3604	190	1	6	CARDINAL
easat-3604	190	2	7404-7418	DATE
easat-3604	190	3	2024	CARDINAL
easat-3604	190	4	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	190	5	2024	CARDINAL
easat-3604	190	6	22	CARDINAL
easat-3604	190	7	one	CARDINAL
easat-3604	190	8	5	CARDINAL
easat-3604	191	1	5	CARDINAL
easat-3604	193	1	6	CARDINAL
easat-3604	194	1	two	CARDINAL
easat-3604	194	2	first	ORDINAL
easat-3604	195	1	6	CARDINAL
easat-3604	195	2	two	CARDINAL
easat-3604	195	3	first	ORDINAL
easat-3604	195	4	second	ORDINAL
easat-3604	195	5	one	CARDINAL
easat-3604	198	1	nearly 1	CARDINAL
easat-3604	198	2	0.4	CARDINAL
easat-3604	198	3	0.875	CARDINAL
easat-3604	199	1	6	CARDINAL
easat-3604	199	2	first	ORDINAL
easat-3604	199	3	less than 10%	PERCENT
easat-3604	201	1	nearly 1	CARDINAL
easat-3604	202	1	3.2.2	CARDINAL
easat-3604	202	2	two or three	CARDINAL
easat-3604	202	3	2b	CARDINAL
easat-3604	203	1	bʹ×h	GPE
easat-3604	204	1	300 μm length	QUANTITY
easat-3604	204	2	16×30	CARDINAL
easat-3604	204	3	40 μm	QUANTITY
easat-3604	204	4	35×30 μm	QUANTITY
easat-3604	205	1	200	CARDINAL
easat-3604	205	2	0.15 0.3 0.45 0.6 0.75 0.9	QUANTITY
easat-3604	205	3	al en t st	ORG
easat-3604	207	1	kx_circle	PERSON
easat-3604	208	1	200	CARDINAL
easat-3604	208	2	0.15 0.3 0.45 0.6 0.75 0.9 fr	QUANTITY
easat-3604	208	3	1st	ORDINAL
easat-3604	208	4	hole 1st	DATE
easat-3604	208	5	7413	CARDINAL
easat-3604	208	6	2576-8484	DATE
easat-3604	209	1	8	CARDINAL
easat-3604	209	2	6	CARDINAL
easat-3604	209	3	7404-7418	DATE
easat-3604	209	4	2024	CARDINAL
easat-3604	209	5	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	209	6	2024	CARDINAL
easat-3604	209	7	0.9626	CARDINAL
easat-3604	209	8	0.9712	ORG
easat-3604	209	9	7	CARDINAL
easat-3604	210	1	two	CARDINAL
easat-3604	210	2	two	CARDINAL
easat-3604	211	1	up to 64%	PERCENT
easat-3604	211	2	0.0625	CARDINAL
easat-3604	212	1	7.5 μm	QUANTITY
easat-3604	213	1	7	CARDINAL
easat-3604	214	1	8	CARDINAL
easat-3604	215	1	first	ORDINAL
easat-3604	215	2	two	CARDINAL
easat-3604	216	1	8	CARDINAL
easat-3604	216	2	first	ORDINAL
easat-3604	216	3	two	CARDINAL
easat-3604	216	4	two	CARDINAL
easat-3604	217	1	two	CARDINAL
easat-3604	217	2	130	CARDINAL
easat-3604	217	3	310 khz	QUANTITY
easat-3604	218	1	first	ORDINAL
easat-3604	218	2	second	ORDINAL
easat-3604	218	3	61	CARDINAL
easat-3604	218	4	159 khz	QUANTITY
easat-3604	219	1	two	CARDINAL
easat-3604	219	2	195%	PERCENT
easat-3604	219	3	213%	PERCENT
easat-3604	220	1	two	CARDINAL
easat-3604	220	2	two	CARDINAL
easat-3604	221	1	3.2.3	CARDINAL
easat-3604	221	2	0.9626	CARDINAL
easat-3604	221	3	50	CARDINAL
easat-3604	221	4	150	CARDINAL
easat-3604	221	5	u ev al en t st	PERSON
easat-3604	224	1	50	CARDINAL
easat-3604	224	2	170	CARDINAL
easat-3604	224	3	230	CARDINAL
easat-3604	224	4	290	CARDINAL
easat-3604	224	5	410 470	CARDINAL
easat-3604	224	6	0.15 0.3 0.45 0.6 0.75 0.9 fr	QUANTITY
easat-3604	224	7	1st	ORDINAL
easat-3604	224	8	hole 2nd	DATE
easat-3604	225	1	2nd	ORDINAL
easat-3604	225	2	7414	DATE
easat-3604	225	3	2576-8484	DATE
easat-3604	225	4	8	CARDINAL
easat-3604	225	5	6	CARDINAL
easat-3604	225	6	7404-7418	DATE
easat-3604	225	7	2024	CARDINAL
easat-3604	225	8	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	225	9	2024	CARDINAL
easat-3604	225	10	two	CARDINAL
easat-3604	226	1	250 μm	QUANTITY
easat-3604	226	2	16×30 μm	QUANTITY
easat-3604	227	1	first	ORDINAL
easat-3604	227	2	two	CARDINAL
easat-3604	227	3	two	CARDINAL
easat-3604	227	4	9	CARDINAL
easat-3604	227	5	10	CARDINAL
easat-3604	228	1	two	CARDINAL
easat-3604	228	2	two	CARDINAL
easat-3604	229	1	first	ORDINAL
easat-3604	229	2	286-386 khz	QUANTITY
easat-3604	229	3	0.1	CARDINAL
easat-3604	229	4	0.875	CARDINAL
easat-3604	229	5	2	CARDINAL
easat-3604	229	6	14.5 μm	CARDINAL
easat-3604	230	1	second	ORDINAL
easat-3604	231	1	946 khz	QUANTITY
easat-3604	231	2	57%	PERCENT
easat-3604	231	3	635 khz	QUANTITY
easat-3604	231	4	38%	PERCENT
easat-3604	235	1	9	CARDINAL
easat-3604	236	1	10	CARDINAL
easat-3604	237	1	first	ORDINAL
easat-3604	237	2	two	CARDINAL
easat-3604	238	1	3.3	CARDINAL
easat-3604	238	2	0 200	CARDINAL
easat-3604	238	3	0.15 0.3 0.45 0.6 0.75 0.9	QUANTITY
easat-3604	238	4	al en t st	ORG
easat-3604	240	1	200	CARDINAL
easat-3604	240	2	0.15 0.3 0.45 0.6 0.75 0.9 fr	QUANTITY
easat-3604	240	3	α 1st	DATE
easat-3604	240	4	hole 2nd	DATE
easat-3604	240	5	2nd	ORDINAL
easat-3604	240	6	7415	DATE
easat-3604	240	7	2576-8484	DATE
easat-3604	240	8	8	CARDINAL
easat-3604	240	9	6	CARDINAL
easat-3604	240	10	7404-7418	DATE
easat-3604	240	11	2024	CARDINAL
easat-3604	240	12	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	240	13	2024	CARDINAL
easat-3604	244	1	1	CARDINAL
easat-3604	244	2	22	CARDINAL
easat-3604	246	1	12	CARDINAL
easat-3604	246	2	two	CARDINAL
easat-3604	247	1	two	CARDINAL
easat-3604	249	1	two	CARDINAL
easat-3604	252	1	two	CARDINAL
easat-3604	254	1	2 	DATE
easat-3604	254	2	29	CARDINAL
easat-3604	254	3	30	CARDINAL
easat-3604	255	1	1.7984×10-6	DATE
easat-3604	256	1	14	CARDINAL
easat-3604	256	2	4	CARDINAL
easat-3604	256	3	31	DATE
easat-3604	256	4	120	CARDINAL
easat-3604	256	5	28	CARDINAL
easat-3604	256	6	4	CARDINAL
easat-3604	258	1	7600	PRODUCT
easat-3604	258	2	31×w2 120×w2	DATE
easat-3604	258	3	28×w2	CARDINAL
easat-3604	259	1	120×π×d2/4 28×π×d2/4	CARDINAL
easat-3604	259	2	6 μm	QUANTITY
easat-3604	259	3	13	CARDINAL
easat-3604	259	4	14	CARDINAL
easat-3604	259	5	11	CARDINAL
easat-3604	260	1	11	CARDINAL
easat-3604	263	1	0.0625	CARDINAL
easat-3604	264	1	70%	PERCENT
easat-3604	264	2	84%	PERCENT
easat-3604	264	3	77%	PERCENT
easat-3604	264	4	55%	PERCENT
easat-3604	264	5	66%	PERCENT
easat-3604	264	6	60%	PERCENT
easat-3604	264	7	7416	CARDINAL
easat-3604	264	8	2576-8484	DATE
easat-3604	265	1	8	CARDINAL
easat-3604	265	2	6	CARDINAL
easat-3604	265	3	7404-7418	DATE
easat-3604	265	4	2024	CARDINAL
easat-3604	265	5	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	265	6	2024	CARDINAL
easat-3604	267	1	0.2 0.8	CARDINAL
easat-3604	268	1	0.25	CARDINAL
easat-3604	268	2	44%	PERCENT
easat-3604	268	3	53%	PERCENT
easat-3604	268	4	52%	PERCENT
easat-3604	268	5	35%	PERCENT
easat-3604	268	6	42%	PERCENT
easat-3604	268	7	41%	PERCENT
easat-3604	268	8	12	CARDINAL
easat-3604	269	1	11	CARDINAL
easat-3604	271	1	12	CARDINAL
easat-3604	273	1	4.	CARDINAL
easat-3604	273	2	three	CARDINAL
easat-3604	274	1	ansys	ORG
easat-3604	275	1	0.426%	PERCENT
easat-3604	278	1	0.15 0.3 0.45 0.6 0.75 0.9	QUANTITY
easat-3604	278	2	ci en t	PERSON
easat-3604	279	1	2	CARDINAL
easat-3604	279	2	0%	PERCENT
easat-3604	279	3	10%	PERCENT
easat-3604	279	4	20%	PERCENT
easat-3604	279	5	30%	PERCENT
easat-3604	279	6	40%	PERCENT
easat-3604	279	7	50%	PERCENT
easat-3604	279	8	60%	PERCENT
easat-3604	279	9	70%	PERCENT
easat-3604	279	10	80%	PERCENT
easat-3604	279	11	90%	PERCENT
easat-3604	279	12	r ed u ct io n	PERSON
easat-3604	279	13	o	DATE
easat-3604	280	1	7417	DATE
easat-3604	280	2	2576-8484	DATE
easat-3604	281	1	8	CARDINAL
easat-3604	281	2	6	CARDINAL
easat-3604	281	3	7404-7418	DATE
easat-3604	281	4	2024	CARDINAL
easat-3604	281	5	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	281	6	2024	CARDINAL
easat-3604	283	1	84%	PERCENT
easat-3604	284	1	0.2-0.8	CARDINAL
easat-3604	286	1	don technical university research fund	ORG
easat-3604	286	2	23.01.16	CARDINAL
easat-3604	287	1	2024	CARDINAL
easat-3604	288	1	https://creativecommons.org/licenses/by/4.0/	WORK_OF_ART
easat-3604	289	1	1	CARDINAL
easat-3604	289	2	j. l. barth	PERSON
easat-3604	289	3	m. a. g. darrin	PERSON
easat-3604	289	4	syst	ORG
easat-3604	290	1	eng	GPE
easat-3604	291	1	1–549	CARDINAL
easat-3604	291	2	2016	DATE
easat-3604	291	3	10.1201/b11291-3	MONEY
easat-3604	292	1	2	CARDINAL
easat-3604	292	2	s. f. krar	PERSON
easat-3604	292	3	a. gill	PERSON
easat-3604	292	4	448	CARDINAL
easat-3604	292	5	2003	DATE
easat-3604	293	1	3	CARDINAL
easat-3604	293	2	j. w. judy	PERSON
easat-3604	294	1	10	CARDINAL
easat-3604	294	2	6	CARDINAL
easat-3604	295	1	1115–1134, 2001	DATE
easat-3604	295	2	10.1088/0964-1726/10/6/301	DATE
easat-3604	296	1	4	CARDINAL
easat-3604	296	2	highlights sci	PERSON
easat-3604	296	3	eng	GPE
easat-3604	297	1	technol	PERSON
easat-3604	298	1	46	DATE
easat-3604	299	1	97–105	DATE
easat-3604	299	2	2023	CARDINAL
easat-3604	299	3	10.54097	CARDINAL
easat-3604	300	1	5	CARDINAL
easat-3604	300	2	d. van hieu	PERSON
easat-3604	300	3	l. van tam	PERSON
easat-3604	300	4	n. van duong	PERSON
easat-3604	300	5	n. duy vy	PERSON
easat-3604	300	6	c. m. hoang	PERSON
easat-3604	300	7	j. mech	PERSON
easat-3604	300	8	36	CARDINAL
easat-3604	300	9	6	CARDINAL
easat-3604	301	1	881–888, 2020	DATE
easat-3604	301	2	10.1017	CARDINAL
easat-3604	302	1	6	CARDINAL
easat-3604	302	2	h. din	PERSON
easat-3604	302	3	f. iqbal	PERSON
easat-3604	302	4	b. lee	PERSON
easat-3604	302	5	3	CARDINAL
easat-3604	303	1	technol	PERSON
easat-3604	304	1	26	CARDINAL
easat-3604	304	2	9	CARDINAL
easat-3604	305	1	2020	DATE
easat-3604	305	2	10.1007	CARDINAL
easat-3604	306	1	7	CARDINAL
easat-3604	306	2	d. t. chu	PERSON
easat-3604	307	1	technol	PERSON
easat-3604	308	1	27	CARDINAL
easat-3604	308	2	9	CARDINAL
easat-3604	309	1	2021	DATE
easat-3604	309	2	10.1007	CARDINAL
easat-3604	310	1	8	CARDINAL
easat-3604	310	2	s. e. alper	PERSON
easat-3604	310	3	115	CARDINAL
easat-3604	310	4	2	CARDINAL
easat-3604	311	1	iss	PERSON
easat-3604	312	1	336–350, 2004	DATE
easat-3604	312	2	10.1016/j.sna.2004.04.041	MONEY
easat-3604	313	1	9	CARDINAL
easat-3604	313	2	k. t. hoang	PERSON
easat-3604	313	3	d. t. nguyen	PERSON
easat-3604	313	4	p. h. pham	ORG
easat-3604	314	1	technol	PERSON
easat-3604	315	1	26	CARDINAL
easat-3604	315	2	5	CARDINAL
easat-3604	316	1	1479–1487	DATE
easat-3604	316	2	2020	DATE
easat-3604	316	3	10.1007	CARDINAL
easat-3604	317	1	10	CARDINAL
easat-3604	317	2	k. guha	PERSON
easat-3604	317	3	h. dutta	PERSON
easat-3604	317	4	j. sateesh	PERSON
easat-3604	317	5	s. baishya	PERSON
easat-3604	317	6	k. srinivasa rao	PERSON
easat-3604	318	1	technol	PERSON
easat-3604	319	1	27	CARDINAL
easat-3604	319	2	2	CARDINAL
easat-3604	320	1	613–617	CARDINAL
easat-3604	320	2	2021	DATE
easat-3604	320	3	10.1007	CARDINAL
easat-3604	321	1	11	CARDINAL
easat-3604	321	2	k. guha	PERSON
easat-3604	321	3	n. m. laskar	PERSON
easat-3604	321	4	h. j. gogoi	PERSON
easat-3604	321	5	k. l. baishnab	PERSON
easat-3604	321	6	k. s. rao	PERSON
easat-3604	322	1	technol	PERSON
easat-3604	323	1	26	CARDINAL
easat-3604	323	2	10	CARDINAL
easat-3604	324	1	3143–3152	CARDINAL
easat-3604	324	2	2020	DATE
easat-3604	324	3	10.1007	CARDINAL
easat-3604	325	1	12	CARDINAL
easat-3604	325	2	m. a. alazwari	PERSON
easat-3604	325	3	a. a. abdelrahman	PERSON
easat-3604	325	4	a. wagih	PERSON
easat-3604	325	5	m. a. eltaher	PERSON
easat-3604	325	6	h. e. abd-el-mottaleb	PERSON
easat-3604	327	1	38	DATE
easat-3604	327	2	5	CARDINAL
easat-3604	328	1	583–597	CARDINAL
easat-3604	328	2	2021	DATE
easat-3604	328	3	10.12989/scs.2021.38.5.583	CARDINAL
easat-3604	329	1	13	CARDINAL
easat-3604	329	2	k. guha et al.	PERSON
easat-3604	330	1	technol	PERSON
easat-3604	331	1	26	CARDINAL
easat-3604	331	2	10	CARDINAL
easat-3604	332	1	3213–3227	CARDINAL
easat-3604	332	2	2020	DATE
easat-3604	332	3	10.1007	CARDINAL
easat-3604	333	1	14	CARDINAL
easat-3604	333	2	l. luschi	PERSON
easat-3604	333	3	f. pieri	PERSON
easat-3604	333	4	j. micromechanics microengineering	PERSON
easat-3604	333	5	24	CARDINAL
easat-3604	333	6	5, 2014	DATE
easat-3604	333	7	10.1088/0960-1317/24/5/055004	CARDINAL
easat-3604	334	1	15	CARDINAL
easat-3604	334	2	a. a. abdelrahman	PERSON
easat-3604	334	3	m. a. eltaher	PERSON
easat-3604	334	4	38	DATE
easat-3604	334	5	3	CARDINAL
easat-3604	334	6	2385–2411	CARDINAL
easat-3604	334	7	2022	CARDINAL
easat-3604	334	8	10.1007	CARDINAL
easat-3604	335	1	16	CARDINAL
easat-3604	335	2	i. esen	PERSON
easat-3604	335	3	a. a. abdelrahman	PERSON
easat-3604	335	4	m. a. eltaher	PERSON
easat-3604	338	1	38	DATE
easat-3604	338	2	3	CARDINAL
easat-3604	339	1	2413–2429	CARDINAL
easat-3604	339	2	2022	CARDINAL
easat-3604	339	3	10.1007	CARDINAL
easat-3604	340	1	17	CARDINAL
easat-3604	340	2	w. n. sharpe	PERSON
easat-3604	340	3	r. vaidyanathan	PERSON
easat-3604	340	4	g. bao	PERSON
easat-3604	340	5	r. l. edwards	PERSON
easat-3604	340	6	j. vac	PERSON
easat-3604	341	1	sci	ORG
easat-3604	341	2	technol	PERSON
easat-3604	342	1	microelectron	ORG
easat-3604	343	1	nanom	PERSON
easat-3604	345	1	meas	GPE
easat-3604	346	1	15	CARDINAL
easat-3604	346	2	5	CARDINAL
easat-3604	347	1	1599–1603, 1997	DATE
easat-3604	347	2	10.1116/1.589554	CARDINAL
easat-3604	348	1	18	CARDINAL
easat-3604	348	2	v. l. rabinovich	PERSON
easat-3604	348	3	r. k. gupta	PERSON
easat-3604	348	4	s. d. senturia	PERSON
easat-3604	349	1	2	CARDINAL
easat-3604	349	2	1125–1128, 1997	DATE
easat-3604	349	3	10.1109	CARDINAL
easat-3604	350	1	19	CARDINAL
easat-3604	350	2	s. s. mohite	PERSON
easat-3604	350	3	h. kesari	PERSON
easat-3604	350	4	r. sonti	PERSON
easat-3604	350	5	r. pratap	PERSON
easat-3604	350	6	j. micromechanics microengineering	PERSON
easat-3604	350	7	15	CARDINAL
easat-3604	350	8	11	CARDINAL
easat-3604	351	1	2083–2092, 2005	DATE
easat-3604	351	2	10.1088/0960-1317/15/11/013	DATE
easat-3604	352	1	20	CARDINAL
easat-3604	352	2	w. h. tu	PERSON
easat-3604	352	3	w. c. chu	PERSON
easat-3604	352	4	c. k. lee	PERSON
easat-3604	352	5	p. z. chang	PERSON
easat-3604	352	6	y. c. hu	PERSON
easat-3604	352	7	j. intell	PERSON
easat-3604	354	1	syst	PERSON
easat-3604	355	1	24	CARDINAL
easat-3604	355	2	3	CARDINAL
easat-3604	356	1	310–317, 2013	DATE
easat-3604	356	2	10.1177/1045389x12449917	CARDINAL
easat-3604	357	1	7418	DATE
easat-3604	357	2	2576-8484	DATE
easat-3604	357	3	8	CARDINAL
easat-3604	357	4	6	CARDINAL
easat-3604	357	5	7404-7418	DATE
easat-3604	357	6	2024	CARDINAL
easat-3604	357	7	10.55214/25768484.v8i6.3604 ©	CARDINAL
easat-3604	357	8	2024	CARDINAL
easat-3604	358	1	21	CARDINAL
easat-3604	358	2	n. van dung	PERSON
easat-3604	358	3	l. m. thai	PERSON
easat-3604	358	4	n. t. dung	PERSON
easat-3604	358	5	p. van minh	PERSON
easat-3604	358	6	lect	PERSON
easat-3604	360	1	eng	PERSON
easat-3604	361	1	197–203	CARDINAL
easat-3604	361	2	2023	CARDINAL
easat-3604	361	3	10.1007/978-3031-31824-5_24	DATE
easat-3604	362	1	22	CARDINAL
easat-3604	363	1	23	CARDINAL
easat-3604	363	2	t. c. n. nguyen	PERSON
easat-3604	363	3	j. sci.	PERSON
easat-3604	363	4	17	CARDINAL
easat-3604	363	5	3	CARDINAL
easat-3604	363	6	2022	DATE
easat-3604	363	7	10.56651	CARDINAL
easat-3604	364	1	24	CARDINAL
easat-3604	364	2	t. ozaki	PERSON
easat-3604	364	3	n. ohta	PERSON
easat-3604	364	4	m. fujiyoshi	PERSON
easat-3604	364	5	j. micromechanics microengineering	PERSON
easat-3604	364	6	32	DATE
easat-3604	364	7	9	CARDINAL
easat-3604	364	8	2022	DATE
easat-3604	364	9	10.1088/1361-6439	DATE
easat-3604	365	1	25	CARDINAL
easat-3604	365	2	t. wei	PERSON
easat-3604	365	3	s. han	PERSON
easat-3604	365	4	four	CARDINAL
easat-3604	365	5	j. sound vib	PERSON
easat-3604	365	6	225	CARDINAL
easat-3604	365	7	5	CARDINAL
easat-3604	366	1	935–988, 1999	DATE
easat-3604	367	1	26	CARDINAL
easat-3604	367	2	t. kim	PERSON
easat-3604	367	3	lee	PERSON
easat-3604	368	1	j. mech	PERSON
easat-3604	369	1	sci.	ORG
easat-3604	369	2	113	CARDINAL
easat-3604	370	1	162–174	CARDINAL
easat-3604	370	2	2016	DATE
easat-3604	370	3	10.1016	CARDINAL
easat-3604	371	1	27	CARDINAL
easat-3604	371	2	a. a. abdelrahman	PERSON
easat-3604	371	3	m. a. eltaher	PERSON
easat-3604	371	4	a. m. kabeel	PERSON
easat-3604	371	5	a. m. abdraboh	PERSON
easat-3604	371	6	a. a. hendi	PERSON
easat-3604	373	1	31	DATE
easat-3604	373	2	5	CARDINAL
easat-3604	374	1	489–502, 2019	DATE
easat-3604	374	2	10.12989	CARDINAL
easat-3604	375	1	28	CARDINAL
easat-3604	375	2	v. van the	PERSON
easat-3604	375	3	vietnam	GPE
easat-3604	375	4	j. mech.	PERSON
easat-3604	375	5	2024	DATE
easat-3604	375	6	10.15625/0866-7136/19477	DATE
easat-3604	376	1	29	CARDINAL
easat-3604	376	2	r. tensor	PERSON
easat-3604	376	3	1954	DATE
easat-3604	377	1	30	CARDINAL
easat-3604	377	2	w. wang	PERSON
easat-3604	377	3	j. jia	PERSON
easat-3604	377	4	j. li	PERSON
easat-3604	377	5	inst	PERSON
easat-3604	378	1	eng	PERSON
easat-3604	379	1	n j. nanoeng	PERSON
easat-3604	380	1	nanosyst	PERSON
easat-3604	382	1	227	CARDINAL
easat-3604	382	2	4	CARDINAL
easat-3604	383	1	162–170, 2013	DATE
easat-3604	383	2	10.1177/1740349913486097	CARDINAL
easat-3604	384	1	31	CARDINAL
easat-3604	384	2	d. v. quang	PERSON
easat-3604	384	3	n. d. tran	PERSON
easat-3604	384	4	d. t. luat	PERSON
easat-3604	384	5	t. v. do	PERSON
easat-3604	384	6	44	DATE
easat-3604	385	1	2022	CARDINAL
easat-3604	385	2	10.1016	CARDINAL
easat-3604	386	1	32	CARDINAL
easat-3604	386	2	n. t. dung	PERSON
easat-3604	386	3	n. c. tho	PERSON
easat-3604	386	4	t. v. do	PERSON
easat-3604	386	5	n. t. trung	PERSON
easat-3604	386	6	l. k. hoa	PERSON
easat-3604	386	7	rectangular fgm	ORG
easat-3604	386	8	29	CARDINAL
easat-3604	387	1	1435-1444	CARDINAL
easat-3604	387	2	2021	DATE
easat-3604	387	3	10.1016	CARDINAL
easat-3604	388	1	33	CARDINAL
easat-3604	388	2	d. h. duc	PERSON
easat-3604	388	3	t. v. do	PERSON
easat-3604	388	4	m. phuc	PERSON
easat-3604	390	1	j.	PERSON
easat-3604	390	2	73	DATE
easat-3604	390	3	5	CARDINAL
easat-3604	390	4	470-485	CARDINAL
easat-3604	390	5	2022	CARDINAL
easat-3604	390	6	10.47869	CARDINAL
easat-3604	390	7	34	CARDINAL
easat-3604	390	8	n.c.	GPE
easat-3604	390	9	t. v. do	PERSON
easat-3604	390	10	12	CARDINAL
easat-3604	390	11	8	CARDINAL
easat-3604	390	12	1329	DATE
easat-3604	390	13	2019	DATE
easat-3604	390	14	10.3390	CARDINAL
easat-3604	391	1	35	CARDINAL
easat-3604	391	2	d. m. tien	PERSON
easat-3604	393	1	a. tounsi	PERSON
easat-3604	393	2	p.v.	GPE
easat-3604	393	3	d.n. mai	PERSON
easat-3604	394	1	concr	GPE
easat-3604	396	1	6	CARDINAL
easat-3604	396	2	32	CARDINAL
easat-3604	397	1	553-565	CARDINAL
easat-3604	397	2	2024	DATE