id	sid	tid	token	lemma	pos
easat-228	1	1	edelweiss	edelweiss	PROPN
easat-228	1	2	applied	apply	VERB
easat-228	1	3	science	science	NOUN
easat-228	1	4	and	and	CCONJ
easat-228	1	5	technology	technology	NOUN
easat-228	1	6	issn	issn	PROPN
easat-228	1	7	:	:	PUNCT
easat-228	1	8	2576	2576	NUM
easat-228	1	9	-	-	SYM
easat-228	1	10	8484	8484	NUM
easat-228	1	11	vol	vol	NOUN
easat-228	1	12	.	.	PROPN
easat-228	2	1	2	2	NUM
easat-228	2	2	,	,	PUNCT
easat-228	2	3	no	no	INTJ
easat-228	2	4	.	.	NOUN
easat-228	2	5	1	1	NUM
easat-228	2	6	,	,	PUNCT
easat-228	2	7	36	36	NUM
easat-228	2	8	-	-	SYM
easat-228	2	9	37	37	NUM
easat-228	2	10	2018	2018	NUM
easat-228	2	11	doi	doi	NOUN
easat-228	2	12	:	:	PUNCT
easat-228	2	13	10.33805/2576.8484.111	10.33805/2576.8484.111	NUM
easat-228	3	1	©	©	PROPN
easat-228	3	2	2018	2018	NUM
easat-228	3	3	by	by	ADP
easat-228	3	4	the	the	DET
easat-228	3	5	author	author	NOUN
easat-228	3	6	©	©	PROPN
easat-228	3	7	2018	2018	NUM
easat-228	3	8	by	by	ADP
easat-228	3	9	the	the	DET
easat-228	3	10	author	author	NOUN
easat-228	3	11	history	history	NOUN
easat-228	3	12	:	:	PUNCT
easat-228	3	13	received	receive	VERB
easat-228	3	14	:	:	PUNCT
easat-228	3	15	13	13	NUM
easat-228	3	16	january	january	PROPN
easat-228	3	17	2018	2018	NUM
easat-228	3	18	;	;	PUNCT
easat-228	3	19	accepted	accept	VERB
easat-228	3	20	:	:	PUNCT
easat-228	3	21	15	15	NUM
easat-228	3	22	january	january	PROPN
easat-228	3	23	2018	2018	NUM
easat-228	3	24	;	;	PUNCT
easat-228	3	25	published	publish	VERB
easat-228	3	26	:	:	PUNCT
easat-228	3	27	19	19	NUM
easat-228	3	28	january	january	PROPN
easat-228	3	29	2018	2018	NUM
easat-228	3	30	layer	layer	NOUN
easat-228	3	31	-	-	PUNCT
easat-228	3	32	by	by	ADP
easat-228	3	33	-	-	PUNCT
easat-228	3	34	layer	layer	NOUN
easat-228	3	35	thinning	thinning	NOUN
easat-228	3	36	of	of	ADP
easat-228	3	37	2d	2d	PROPN
easat-228	3	38	materials	material	NOUN
easat-228	3	39	viet	viet	PROPN
easat-228	3	40	phuong	phuong	PROPN
easat-228	3	41	pham	pham	PROPN
easat-228	3	42	skku	skku	PROPN
easat-228	3	43	advanced	advanced	PROPN
easat-228	3	44	institute	institute	PROPN
easat-228	3	45	of	of	ADP
easat-228	3	46	nano	nano	NOUN
easat-228	3	47	technology	technology	NOUN
easat-228	3	48	(	(	PUNCT
easat-228	3	49	saint	saint	PROPN
easat-228	3	50	)	)	PUNCT
easat-228	3	51	,	,	PUNCT
easat-228	3	52	sungkyunkwan	sungkyunkwan	PROPN
easat-228	3	53	university	university	PROPN
easat-228	3	54	(	(	PUNCT
easat-228	3	55	skku	skku	NOUN
easat-228	3	56	)	)	PUNCT
easat-228	3	57	,	,	PUNCT
easat-228	3	58	suwon	suwon	NOUN
easat-228	3	59	,	,	PUNCT
easat-228	3	60	republic	republic	NOUN
easat-228	3	61	of	of	ADP
easat-228	3	62	korea	korea	PROPN
easat-228	3	63	;	;	PUNCT
easat-228	3	64	pvphuong85@ibs.re.kr	pvphuong85@ibs.re.kr	X
easat-228	3	65	(	(	PUNCT
easat-228	3	66	v.p.p	v.p.p	ADJ
easat-228	3	67	.	.	PUNCT
easat-228	3	68	)	)	PUNCT
easat-228	3	69	.	.	PUNCT
easat-228	4	1	1	1	X
easat-228	4	2	.	.	X
easat-228	4	3	introduction	introduction	NOUN
easat-228	4	4	two	two	NUM
easat-228	4	5	-	-	PUNCT
easat-228	4	6	dimensional	dimensional	ADJ
easat-228	4	7	(	(	PUNCT
easat-228	4	8	2d	2d	NOUN
easat-228	4	9	)	)	PUNCT
easat-228	4	10	structured	structured	ADJ
easat-228	4	11	materials	material	NOUN
easat-228	4	12	are	be	AUX
easat-228	4	13	receiving	receive	VERB
easat-228	4	14	huge	huge	ADJ
easat-228	4	15	interests	interest	NOUN
easat-228	4	16	since	since	SCONJ
easat-228	4	17	the	the	DET
easat-228	4	18	discovery	discovery	NOUN
easat-228	4	19	of	of	ADP
easat-228	4	20	graphene	graphene	ADJ
easat-228	4	21	material	material	NOUN
easat-228	4	22	first	first	ADV
easat-228	4	23	by	by	ADP
easat-228	4	24	the	the	DET
easat-228	4	25	mechanical	mechanical	ADJ
easat-228	4	26	exfoliation	exfoliation	NOUN
easat-228	4	27	method	method	NOUN
easat-228	4	28	using	use	VERB
easat-228	4	29	scotch	scotch	NOUN
easat-228	4	30	tape	tape	NOUN
easat-228	4	31	from	from	ADP
easat-228	4	32	the	the	DET
easat-228	4	33	graphite	graphite	NOUN
easat-228	4	34	in	in	ADP
easat-228	4	35	2004	2004	NUM
easat-228	4	36	(	(	PUNCT
easat-228	4	37	1	1	NUM
easat-228	4	38	)	)	PUNCT
easat-228	4	39	.	.	PUNCT
easat-228	5	1	among	among	ADP
easat-228	5	2	them	they	PRON
easat-228	5	3	,	,	PUNCT
easat-228	5	4	graphene	graphene	VERB
easat-228	5	5	[	[	X
easat-228	5	6	1	1	NUM
easat-228	5	7	-	-	SYM
easat-228	5	8	15	15	NUM
easat-228	5	9	]	]	PUNCT
easat-228	5	10	molybdenum	molybdenum	NOUN
easat-228	5	11	disulfide	disulfide	NOUN
easat-228	5	12	(	(	PUNCT
easat-228	5	13	mos2	mos2	PROPN
easat-228	5	14	)	)	PUNCT
easat-228	6	1	[	[	X
easat-228	6	2	10,16	10,16	X
easat-228	6	3	]	]	X
easat-228	6	4	black	black	ADJ
easat-228	6	5	phosphorous	phosphorous	ADJ
easat-228	6	6	[	[	X
easat-228	6	7	17	17	NUM
easat-228	6	8	]	]	X
easat-228	6	9	hexagonal	hexagonal	ADJ
easat-228	6	10	-	-	PUNCT
easat-228	6	11	boron	boron	NOUN
easat-228	6	12	nitride	nitride	NOUN
easat-228	6	13	(	(	PUNCT
easat-228	6	14	h	h	NOUN
easat-228	6	15	-	-	PUNCT
easat-228	6	16	bn	bn	NOUN
easat-228	6	17	)	)	PUNCT
easat-228	7	1	[	[	X
easat-228	7	2	18	18	NUM
easat-228	7	3	-	-	SYM
easat-228	7	4	20	20	NUM
easat-228	7	5	]	]	PUNCT
easat-228	7	6	hafnium	hafnium	NOUN
easat-228	7	7	dioxide	dioxide	NOUN
easat-228	7	8	(	(	PUNCT
easat-228	7	9	hfo2	hfo2	NOUN
easat-228	7	10	)	)	PUNCT
easat-228	8	1	[	[	X
easat-228	8	2	21	21	NUM
easat-228	8	3	]	]	X
easat-228	8	4	molybdenum	molybdenum	NOUN
easat-228	8	5	diselenide	diselenide	NOUN
easat-228	8	6	(	(	PUNCT
easat-228	8	7	mose2	mose2	NOUN
easat-228	8	8	)	)	PUNCT
easat-228	9	1	[	[	X
easat-228	9	2	22	22	NUM
easat-228	9	3	]	]	PUNCT
easat-228	9	4	and	and	CCONJ
easat-228	9	5	2d	2d	NUM
easat-228	9	6	carbide	carbide	NOUN
easat-228	9	7	nanosheets	nanosheet	NOUN
easat-228	9	8	(	(	PUNCT
easat-228	9	9	mxene	mxene	NOUN
easat-228	9	10	)	)	PUNCT
easat-228	10	1	[	[	X
easat-228	10	2	23	23	NUM
easat-228	10	3	]	]	PUNCT
easat-228	10	4	are	be	AUX
easat-228	10	5	emerging	emerge	VERB
easat-228	10	6	as	as	ADV
easat-228	10	7	many	many	ADJ
easat-228	10	8	promising	promising	ADJ
easat-228	10	9	potential	potential	ADJ
easat-228	10	10	materials	material	NOUN
easat-228	10	11	with	with	ADP
easat-228	10	12	novel	novel	ADJ
easat-228	10	13	properties	property	NOUN
easat-228	10	14	in	in	ADP
easat-228	10	15	electronics	electronic	NOUN
easat-228	10	16	and	and	CCONJ
easat-228	10	17	optoelectronics	optoelectronic	NOUN
easat-228	10	18	.	.	PUNCT
easat-228	11	1	unlike	unlike	ADP
easat-228	11	2	conductive	conductive	ADJ
easat-228	11	3	graphene	graphene	NOUN
easat-228	11	4	with	with	ADP
easat-228	11	5	gapless	gapless	NOUN
easat-228	11	6	characteristics	characteristic	NOUN
easat-228	11	7	,	,	PUNCT
easat-228	11	8	other	other	ADJ
easat-228	11	9	materials	material	NOUN
easat-228	11	10	above	above	ADP
easat-228	11	11	present	present	VERB
easat-228	11	12	different	different	ADJ
easat-228	11	13	energy	energy	NOUN
easat-228	11	14	band	band	NOUN
easat-228	11	15	gap	gap	NOUN
easat-228	11	16	.	.	PUNCT
easat-228	12	1	the	the	DET
easat-228	12	2	controlled	control	VERB
easat-228	12	3	tuning	tuning	NOUN
easat-228	12	4	of	of	ADP
easat-228	12	5	band	band	NOUN
easat-228	12	6	-	-	PUNCT
easat-228	12	7	gap	gap	NOUN
easat-228	12	8	of	of	ADP
easat-228	12	9	2d	2d	NOUN
easat-228	12	10	materials	material	NOUN
easat-228	12	11	by	by	ADP
easat-228	12	12	layer	layer	NOUN
easat-228	12	13	-	-	PUNCT
easat-228	12	14	by	by	ADP
easat-228	12	15	-	-	PUNCT
easat-228	12	16	layer	layer	NOUN
easat-228	12	17	thinning	thinning	NOUN
easat-228	12	18	using	use	VERB
easat-228	12	19	various	various	ADJ
easat-228	12	20	strategies	strategy	NOUN
easat-228	12	21	related	relate	VERB
easat-228	12	22	to	to	ADP
easat-228	12	23	chemistry	chemistry	NOUN
easat-228	12	24	,	,	PUNCT
easat-228	12	25	physic	physic	NOUN
easat-228	12	26	,	,	PUNCT
easat-228	12	27	nanotechnology	nanotechnology	NOUN
easat-228	12	28	,	,	PUNCT
easat-228	12	29	and	and	CCONJ
easat-228	12	30	engineering	engineering	NOUN
easat-228	12	31	in	in	ADP
easat-228	12	32	order	order	NOUN
easat-228	12	33	to	to	PART
easat-228	12	34	obtain	obtain	VERB
easat-228	12	35	the	the	DET
easat-228	12	36	ultra	ultra	ADJ
easat-228	12	37	-	-	ADJ
easat-228	12	38	thinner	thin	ADJ
easat-228	12	39	material	material	NOUN
easat-228	12	40	layer	layer	NOUN
easat-228	12	41	and	and	CCONJ
easat-228	12	42	resulting	result	VERB
easat-228	12	43	in	in	ADP
easat-228	12	44	improvement	improvement	NOUN
easat-228	12	45	their	their	PRON
easat-228	12	46	electrical	electrical	ADJ
easat-228	12	47	characteristics	characteristic	NOUN
easat-228	12	48	is	be	AUX
easat-228	12	49	highly	highly	ADV
easat-228	12	50	desiring	desiring	ADJ
easat-228	12	51	with	with	ADP
easat-228	12	52	targeting	target	VERB
easat-228	12	53	toward	toward	ADP
easat-228	12	54	practical	practical	ADJ
easat-228	12	55	applications	application	NOUN
easat-228	12	56	in	in	ADP
easat-228	12	57	the	the	DET
easat-228	12	58	industry	industry	NOUN
easat-228	12	59	to	to	PART
easat-228	12	60	serve	serve	VERB
easat-228	12	61	human	human	ADJ
easat-228	12	62	society	society	NOUN
easat-228	12	63	(	(	PUNCT
easat-228	12	64	figure	figure	NOUN
easat-228	12	65	1	1	NUM
easat-228	12	66	)	)	PUNCT
easat-228	12	67	.	.	PUNCT
easat-228	13	1	figure	figure	NOUN
easat-228	13	2	1	1	NUM
easat-228	13	3	.	.	PUNCT
easat-228	13	4	schematic	schematic	ADJ
easat-228	13	5	of	of	ADP
easat-228	13	6	strategies	strategy	NOUN
easat-228	13	7	for	for	ADP
easat-228	13	8	layer	layer	NOUN
easat-228	13	9	-	-	PUNCT
easat-228	13	10	by	by	ADP
easat-228	13	11	-	-	PUNCT
easat-228	13	12	layer	layer	NOUN
easat-228	13	13	thinning	thinning	NOUN
easat-228	13	14	on	on	ADP
easat-228	13	15	various	various	ADJ
easat-228	13	16	low	low	ADJ
easat-228	13	17	-	-	PUNCT
easat-228	13	18	dimensional	dimensional	ADJ
easat-228	13	19	material	material	NOUN
easat-228	13	20	surfaces	surface	NOUN
easat-228	13	21	by	by	ADP
easat-228	13	22	chemistry	chemistry	NOUN
easat-228	13	23	,	,	PUNCT
easat-228	13	24	physic	physic	NOUN
easat-228	13	25	,	,	PUNCT
easat-228	13	26	nanotechnology	nanotechnology	NOUN
easat-228	13	27	and	and	CCONJ
easat-228	13	28	engineering	engineering	NOUN
easat-228	13	29	for	for	ADP
easat-228	13	30	tuning	tune	VERB
easat-228	13	31	their	their	PRON
easat-228	13	32	electronics	electronic	NOUN
easat-228	13	33	and	and	CCONJ
easat-228	13	34	optoelectronics	optoelectronic	NOUN
easat-228	13	35	.	.	PUNCT
easat-228	14	1	the	the	DET
easat-228	14	2	increasing	increase	VERB
easat-228	14	3	the	the	DET
easat-228	14	4	controlled	control	VERB
easat-228	14	5	band	band	NOUN
easat-228	14	6	-	-	PUNCT
easat-228	14	7	gap	gap	NOUN
easat-228	14	8	of	of	ADP
easat-228	14	9	2d	2d	NOUN
easat-228	14	10	materials	material	NOUN
easat-228	14	11	would	would	AUX
easat-228	14	12	be	be	AUX
easat-228	14	13	raising	raise	VERB
easat-228	14	14	up	up	ADP
easat-228	14	15	the	the	DET
easat-228	14	16	current	current	ADJ
easat-228	14	17	on	on	ADP
easat-228	14	18	-	-	PUNCT
easat-228	14	19	off	off	ADP
easat-228	14	20	ratio	ratio	NOUN
easat-228	14	21	,	,	PUNCT
easat-228	14	22	photoluminescence	photoluminescence	NOUN
easat-228	14	23	,	,	PUNCT
easat-228	14	24	and	and	CCONJ
easat-228	14	25	other	other	ADJ
easat-228	14	26	unexploited	unexploited	ADJ
easat-228	14	27	and	and	CCONJ
easat-228	14	28	unexplored	unexplored	ADJ
easat-228	14	29	exotic	exotic	ADJ
easat-228	14	30	properties	property	NOUN
easat-228	14	31	.	.	PUNCT
easat-228	15	1	the	the	DET
easat-228	15	2	electronic	electronic	ADJ
easat-228	15	3	properties	property	NOUN
easat-228	15	4	of	of	ADP
easat-228	15	5	2d	2d	NUM
easat-228	15	6	layered	layered	ADJ
easat-228	15	7	materials	material	NOUN
easat-228	15	8	are	be	AUX
easat-228	15	9	strongly	strongly	ADV
easat-228	15	10	dependent	dependent	ADJ
easat-228	15	11	on	on	ADP
easat-228	15	12	their	their	PRON
easat-228	15	13	thicknesses	thickness	NOUN
easat-228	15	14	.	.	PUNCT
easat-228	16	1	for	for	ADP
easat-228	16	2	instance	instance	NOUN
easat-228	16	3	,	,	PUNCT
easat-228	16	4	the	the	DET
easat-228	16	5	thickness	thickness	NOUN
easat-228	16	6	modulating	modulating	NOUN
easat-228	16	7	of	of	ADP
easat-228	16	8	mos2	mos2	PROPN
easat-228	16	9	layers	layer	NOUN
easat-228	16	10	will	will	AUX
easat-228	16	11	activate	activate	VERB
easat-228	16	12	the	the	DET
easat-228	16	13	optical	optical	ADJ
easat-228	16	14	energy	energy	NOUN
easat-228	16	15	gap	gap	NOUN
easat-228	16	16	which	which	PRON
easat-228	16	17	makes	make	VERB
easat-228	16	18	it	it	PRON
easat-228	16	19	promising	promise	VERB
easat-228	16	20	for	for	ADP
easat-228	16	21	application	application	NOUN
easat-228	16	22	in	in	ADP
easat-228	16	23	optoelectronic	optoelectronic	ADJ
easat-228	16	24	devices	device	NOUN
easat-228	16	25	,	,	PUNCT
easat-228	16	26	such	such	ADJ
easat-228	16	27	as	as	ADP
easat-228	16	28	photodetectors	photodetector	NOUN
easat-228	16	29	,	,	PUNCT
easat-228	16	30	photovoltaics	photovoltaic	NOUN
easat-228	16	31	,	,	PUNCT
easat-228	16	32	light	light	ADJ
easat-228	16	33	emitters	emitter	NOUN
easat-228	16	34	,	,	PUNCT
easat-228	16	35	phototransistors	phototransistor	NOUN
easat-228	16	36	.	.	PUNCT
easat-228	17	1	very	very	ADV
easat-228	17	2	recently	recently	ADV
easat-228	17	3	,	,	PUNCT
easat-228	17	4	the	the	DET
easat-228	17	5	progress	progress	NOUN
easat-228	17	6	in	in	ADP
easat-228	17	7	layer	layer	NOUN
easat-228	17	8	-	-	PUNCT
easat-228	17	9	by	by	ADP
easat-228	17	10	-	-	PUNCT
easat-228	17	11	layer	layer	NOUN
easat-228	17	12	thinning	thin	VERB
easat-228	17	13	techniques	technique	NOUN
easat-228	17	14	on	on	ADP
easat-228	17	15	2d	2d	NUM
easat-228	17	16	materials	material	NOUN
easat-228	17	17	has	have	AUX
easat-228	17	18	significant	significant	ADV
easat-228	17	19	achieved	achieve	VERB
easat-228	17	20	[	[	PUNCT
easat-228	17	21	15	15	NUM
easat-228	17	22	-	-	SYM
easat-228	17	23	17,19	17,19	NUM
easat-228	17	24	-	-	PUNCT
easat-228	17	25	23	23	NUM
easat-228	17	26	]	]	PUNCT
easat-228	17	27	.	.	PUNCT
easat-228	18	1	by	by	ADP
easat-228	18	2	adjusting	adjust	VERB
easat-228	18	3	the	the	DET
easat-228	18	4	etching	etch	VERB
easat-228	18	5	rates	rate	NOUN
easat-228	18	6	(	(	PUNCT
easat-228	18	7	chemical	chemical	NOUN
easat-228	18	8	and	and	CCONJ
easat-228	18	9	physical	physical	ADJ
easat-228	18	10	plasma	plasma	NOUN
easat-228	18	11	engineering	engineering	NOUN
easat-228	18	12	)	)	PUNCT
easat-228	19	1	[	[	X
easat-228	19	2	15	15	NUM
easat-228	19	3	-	-	SYM
easat-228	19	4	17,19	17,19	NUM
easat-228	19	5	-	-	PUNCT
easat-228	19	6	22	22	NUM
easat-228	19	7	]	]	PUNCT
easat-228	19	8	or	or	CCONJ
easat-228	19	9	gas	gas	NOUN
easat-228	19	10	molecular	molecular	ADJ
easat-228	19	11	ratios	ratio	NOUN
easat-228	19	12	and	and	CCONJ
easat-228	19	13	temperatures	temperature	NOUN
easat-228	19	14	(	(	PUNCT
easat-228	19	15	chemical	chemical	NOUN
easat-228	19	16	vapor	vapor	NOUN
easat-228	19	17	deposition	deposition	NOUN
easat-228	19	18	system	system	NOUN
easat-228	19	19	)	)	PUNCT
easat-228	20	1	[	[	X
easat-228	20	2	23	23	NUM
easat-228	20	3	]	]	PUNCT
easat-228	20	4	we	we	PRON
easat-228	20	5	can	can	AUX
easat-228	20	6	achieve	achieve	VERB
easat-228	20	7	complete	complete	ADJ
easat-228	20	8	removal	removal	NOUN
easat-228	20	9	the	the	DET
easat-228	20	10	mailto:pvphuong85@ibs.re.kr	mailto:pvphuong85@ibs.re.kr	PRON
easat-228	20	11	37	37	NUM
easat-228	20	12	edelweiss	edelweiss	PROPN
easat-228	20	13	applied	apply	VERB
easat-228	20	14	science	science	NOUN
easat-228	20	15	and	and	CCONJ
easat-228	20	16	technology	technology	NOUN
easat-228	20	17	issn	issn	PROPN
easat-228	20	18	:	:	PUNCT
easat-228	20	19	2576	2576	NUM
easat-228	20	20	-	-	SYM
easat-228	20	21	8484	8484	NUM
easat-228	20	22	vol	vol	NOUN
easat-228	20	23	.	.	PROPN
easat-228	21	1	2	2	NUM
easat-228	21	2	,	,	PUNCT
easat-228	21	3	no	no	INTJ
easat-228	21	4	.	.	NOUN
easat-228	21	5	1	1	NUM
easat-228	21	6	:	:	SYM
easat-228	21	7	36	36	NUM
easat-228	21	8	-	-	SYM
easat-228	21	9	37	37	NUM
easat-228	21	10	,	,	PUNCT
easat-228	21	11	2018	2018	NUM
easat-228	21	12	doi	doi	NOUN
easat-228	21	13	:	:	PUNCT
easat-228	21	14	10.33805/2576.8484.111	10.33805/2576.8484.111	NUM
easat-228	22	1	©	©	PROPN
easat-228	22	2	2018	2018	NUM
easat-228	22	3	by	by	ADP
easat-228	22	4	the	the	DET
easat-228	22	5	author	author	NOUN
easat-228	22	6	layer	layer	NOUN
easat-228	22	7	-	-	PUNCT
easat-228	22	8	by	by	ADP
easat-228	22	9	-	-	PUNCT
easat-228	22	10	layer	layer	NOUN
easat-228	22	11	precisely	precisely	ADV
easat-228	22	12	and	and	CCONJ
easat-228	22	13	controllability	controllability	NOUN
easat-228	22	14	[	[	PUNCT
easat-228	22	15	15	15	NUM
easat-228	22	16	-	-	SYM
easat-228	22	17	17,19	17,19	NUM
easat-228	22	18	-	-	PUNCT
easat-228	22	19	23	23	NUM
easat-228	22	20	]	]	PUNCT
easat-228	22	21	.	.	PUNCT
easat-228	23	1	especially	especially	ADV
easat-228	23	2	,	,	PUNCT
easat-228	23	3	the	the	DET
easat-228	23	4	layer	layer	NOUN
easat-228	23	5	-	-	PUNCT
easat-228	23	6	by	by	ADP
easat-228	23	7	-	-	PUNCT
easat-228	23	8	layer	layer	NOUN
easat-228	23	9	etching	etch	VERB
easat-228	23	10	by	by	ADP
easat-228	23	11	plasma	plasma	NOUN
easat-228	23	12	(	(	PUNCT
easat-228	23	13	inductively	inductively	ADV
easat-228	23	14	coupled	couple	VERB
easat-228	23	15	plasma	plasma	NOUN
easat-228	23	16	,	,	PUNCT
easat-228	23	17	ion	ion	NOUN
easat-228	23	18	beam	beam	NOUN
easat-228	23	19	)	)	PUNCT
easat-228	23	20	without	without	ADP
easat-228	23	21	inducing	induce	VERB
easat-228	23	22	the	the	DET
easat-228	23	23	physical	physical	ADJ
easat-228	23	24	and	and	CCONJ
easat-228	23	25	chemical	chemical	NOUN
easat-228	23	26	damage	damage	NOUN
easat-228	23	27	has	have	AUX
easat-228	23	28	successfully	successfully	ADV
easat-228	23	29	demonstrated	demonstrate	VERB
easat-228	23	30	in	in	ADP
easat-228	23	31	recent	recent	ADJ
easat-228	23	32	reports	report	NOUN
easat-228	23	33	[	[	X
easat-228	23	34	15,17	15,17	NUM
easat-228	23	35	]	]	PUNCT
easat-228	23	36	.	.	PUNCT
easat-228	24	1	consequently	consequently	ADV
easat-228	24	2	,	,	PUNCT
easat-228	24	3	it	it	PRON
easat-228	24	4	could	could	AUX
easat-228	24	5	unlock	unlock	VERB
easat-228	24	6	and	and	CCONJ
easat-228	24	7	take	take	VERB
easat-228	24	8	a	a	DET
easat-228	24	9	leap	leap	NOUN
easat-228	24	10	forward	forward	ADV
easat-228	24	11	on	on	ADP
easat-228	24	12	developing	develop	VERB
easat-228	24	13	plasma	plasma	NOUN
easat-228	24	14	-	-	PUNCT
easat-228	24	15	based	base	VERB
easat-228	24	16	thinning	thinning	NOUN
easat-228	24	17	methods	method	NOUN
easat-228	24	18	for	for	ADP
easat-228	24	19	other	other	ADJ
easat-228	24	20	tmds	tmds	NOUN
easat-228	24	21	and	and	CCONJ
easat-228	24	22	low	low	ADJ
easat-228	24	23	-	-	PUNCT
easat-228	24	24	dimensional	dimensional	ADJ
easat-228	24	25	materials	material	NOUN
easat-228	24	26	in	in	ADP
easat-228	24	27	various	various	ADJ
easat-228	24	28	advanced	advanced	ADJ
easat-228	24	29	devices	device	NOUN
easat-228	24	30	and	and	CCONJ
easat-228	24	31	applications	application	NOUN
easat-228	24	32	.	.	PUNCT
easat-228	25	1	references	reference	NOUN
easat-228	25	2	[	[	X
easat-228	25	3	1	1	NUM
easat-228	25	4	]	]	PUNCT
easat-228	25	5	k.	k.	PROPN
easat-228	25	6	s.	s.	PROPN
easat-228	25	7	novoselov	novoselov	PROPN
easat-228	25	8	et	et	PROPN
easat-228	25	9	al	al	PROPN
easat-228	25	10	.	.	PROPN
easat-228	25	11	,	,	PUNCT
easat-228	25	12	"	"	PUNCT
easat-228	25	13	electric	electric	ADJ
easat-228	25	14	field	field	NOUN
easat-228	25	15	effect	effect	NOUN
easat-228	25	16	in	in	ADP
easat-228	25	17	atomically	atomically	ADV
easat-228	25	18	thin	thin	ADJ
easat-228	25	19	carbon	carbon	NOUN
easat-228	25	20	films	film	NOUN
easat-228	25	21	,	,	PUNCT
easat-228	25	22	"	"	PUNCT
easat-228	25	23	science	science	NOUN
easat-228	25	24	,	,	PUNCT
easat-228	25	25	vol	vol	NOUN
easat-228	25	26	.	.	PROPN
easat-228	25	27	306	306	NUM
easat-228	25	28	,	,	PUNCT
easat-228	25	29	no	no	INTJ
easat-228	25	30	.	.	NOUN
easat-228	25	31	5696	5696	NUM
easat-228	25	32	,	,	PUNCT
easat-228	25	33	pp	pp	ADP
easat-228	25	34	.	.	PUNCT
easat-228	26	1	666	666	NUM
easat-228	26	2	-	-	PUNCT
easat-228	26	3	669	669	NUM
easat-228	26	4	,	,	PUNCT
easat-228	26	5	2004	2004	NUM
easat-228	26	6	.	.	PUNCT
easat-228	27	1	https://doi.org/10.1126/science.1102896	https://doi.org/10.1126/science.1102896	X
easat-228	28	1	[	[	X
easat-228	28	2	2	2	NUM
easat-228	28	3	]	]	PUNCT
easat-228	28	4	v.	v.	PROPN
easat-228	28	5	p.	p.	PROPN
easat-228	28	6	pham	pham	PROPN
easat-228	28	7	,	,	PUNCT
easat-228	28	8	h.-s	h.-s	PROPN
easat-228	28	9	.	.	PUNCT
easat-228	29	1	jang	jang	PROPN
easat-228	29	2	,	,	PUNCT
easat-228	29	3	d.	d.	PROPN
easat-228	29	4	whang	whang	PROPN
easat-228	29	5	,	,	PUNCT
easat-228	29	6	and	and	CCONJ
easat-228	29	7	j.-y	j.-y	NOUN
easat-228	29	8	.	.	PUNCT
easat-228	30	1	choi	choi	NOUN
easat-228	30	2	,	,	PUNCT
easat-228	30	3	"	"	PUNCT
easat-228	30	4	direct	direct	ADJ
easat-228	30	5	growth	growth	NOUN
easat-228	30	6	of	of	ADP
easat-228	30	7	graphene	graphene	NOUN
easat-228	30	8	on	on	ADP
easat-228	30	9	rigid	rigid	ADJ
easat-228	30	10	and	and	CCONJ
easat-228	30	11	flexible	flexible	ADJ
easat-228	30	12	substrates	substrate	NOUN
easat-228	30	13	:	:	PUNCT
easat-228	30	14	progress	progress	NOUN
easat-228	30	15	,	,	PUNCT
easat-228	30	16	applications	application	NOUN
easat-228	30	17	,	,	PUNCT
easat-228	30	18	and	and	CCONJ
easat-228	30	19	challenges	challenge	NOUN
easat-228	30	20	,	,	PUNCT
easat-228	30	21	"	"	PUNCT
easat-228	30	22	chemical	chemical	ADJ
easat-228	30	23	society	society	NOUN
easat-228	30	24	reviews	review	NOUN
easat-228	30	25	,	,	PUNCT
easat-228	30	26	vol	vol	NOUN
easat-228	30	27	.	.	PROPN
easat-228	30	28	46	46	NUM
easat-228	30	29	,	,	PUNCT
easat-228	30	30	no	no	INTJ
easat-228	30	31	.	.	NOUN
easat-228	30	32	20	20	NUM
easat-228	30	33	,	,	PUNCT
easat-228	30	34	pp	pp	ADJ
easat-228	30	35	.	.	PUNCT
easat-228	31	1	6276	6276	NUM
easat-228	31	2	-	-	SYM
easat-228	31	3	6300	6300	NUM
easat-228	31	4	,	,	PUNCT
easat-228	31	5	2017	2017	NUM
easat-228	31	6	.	.	PUNCT
easat-228	32	1	https://doi.org/10.1039/c7cs00224f	https://doi.org/10.1039/c7cs00224f	NOUN
easat-228	33	1	[	[	X
easat-228	33	2	3	3	NUM
easat-228	33	3	]	]	PUNCT
easat-228	33	4	v.	v.	ADP
easat-228	33	5	p.	p.	PROPN
easat-228	33	6	pham	pham	PROPN
easat-228	33	7	et	et	PROPN
easat-228	33	8	al	al	PROPN
easat-228	33	9	.	.	PROPN
easat-228	33	10	,	,	PUNCT
easat-228	33	11	"	"	PUNCT
easat-228	33	12	chlorine	chlorine	NOUN
easat-228	33	13	-	-	PUNCT
easat-228	33	14	trapped	trap	VERB
easat-228	33	15	cvd	cvd	NOUN
easat-228	33	16	bilayer	bilayer	NOUN
easat-228	33	17	graphene	graphene	VERB
easat-228	33	18	for	for	ADP
easat-228	33	19	resistive	resistive	ADJ
easat-228	33	20	pressure	pressure	NOUN
easat-228	33	21	sensor	sensor	NOUN
easat-228	33	22	with	with	ADP
easat-228	33	23	high	high	ADJ
easat-228	33	24	detection	detection	NOUN
easat-228	33	25	limit	limit	NOUN
easat-228	33	26	and	and	CCONJ
easat-228	33	27	high	high	ADJ
easat-228	33	28	sensitivity	sensitivity	NOUN
easat-228	33	29	,	,	PUNCT
easat-228	33	30	"	"	PUNCT
easat-228	33	31	2d	2d	NUM
easat-228	33	32	materials	material	NOUN
easat-228	33	33	,	,	PUNCT
easat-228	33	34	vol	vol	NOUN
easat-228	33	35	.	.	PROPN
easat-228	33	36	4	4	NUM
easat-228	33	37	,	,	PUNCT
easat-228	33	38	no	no	INTJ
easat-228	33	39	.	.	NOUN
easat-228	33	40	2	2	NUM
easat-228	33	41	,	,	PUNCT
easat-228	33	42	p.	p.	NOUN
easat-228	33	43	025049	025049	NUM
easat-228	33	44	,	,	PUNCT
easat-228	33	45	2017	2017	NUM
easat-228	33	46	.	.	PUNCT
easat-228	33	47	https://doi.org/10.1088/2053-1583/aa6390	https://doi.org/10.1088/2053-1583/aa6390	X
easat-228	34	1	[	[	X
easat-228	34	2	4	4	X
easat-228	34	3	]	]	PUNCT
easat-228	34	4	v.	v.	PROPN
easat-228	34	5	p.	p.	PROPN
easat-228	34	6	pham	pham	PROPN
easat-228	34	7	,	,	PUNCT
easat-228	34	8	k.	k.	PROPN
easat-228	34	9	n.	n.	PROPN
easat-228	34	10	kim	kim	PROPN
easat-228	34	11	,	,	PUNCT
easat-228	34	12	m.	m.	PROPN
easat-228	34	13	h.	h.	PROPN
easat-228	34	14	jeon	jeon	PROPN
easat-228	34	15	,	,	PUNCT
easat-228	34	16	k.	k.	PROPN
easat-228	34	17	s.	s.	PROPN
easat-228	34	18	kim	kim	PROPN
easat-228	34	19	,	,	PUNCT
easat-228	34	20	and	and	CCONJ
easat-228	34	21	g.	g.	PROPN
easat-228	34	22	y.	y.	PROPN
easat-228	34	23	yeom	yeom	PROPN
easat-228	34	24	,	,	PUNCT
easat-228	34	25	"	"	PUNCT
easat-228	34	26	cyclic	cyclic	ADJ
easat-228	34	27	chlorine	chlorine	NOUN
easat-228	34	28	trap	trap	NOUN
easat-228	34	29	-	-	PUNCT
easat-228	34	30	doping	doping	NOUN
easat-228	34	31	for	for	ADP
easat-228	34	32	transparent	transparent	ADJ
easat-228	34	33	,	,	PUNCT
easat-228	34	34	conductive	conductive	ADJ
easat-228	34	35	,	,	PUNCT
easat-228	34	36	therm	therm	NOUN
easat-228	34	37	ally	ally	NOUN
easat-228	34	38	stable	stable	ADJ
easat-228	34	39	and	and	CCONJ
easat-228	34	40	damage	damage	NOUN
easat-228	34	41	-	-	PUNCT
easat-228	34	42	free	free	ADJ
easat-228	34	43	graphene	graphene	NOUN
easat-228	34	44	,	,	PUNCT
easat-228	34	45	"	"	PUNCT
easat-228	34	46	nanoscale	nanoscale	NOUN
easat-228	34	47	,	,	PUNCT
easat-228	34	48	vol	vol	NOUN
easat-228	34	49	.	.	PROPN
easat-228	34	50	6	6	NUM
easat-228	34	51	,	,	PUNCT
easat-228	34	52	no	no	INTJ
easat-228	34	53	.	.	NOUN
easat-228	34	54	24	24	NUM
easat-228	34	55	,	,	PUNCT
easat-228	34	56	pp	pp	ADJ
easat-228	34	57	.	.	PUNCT
easat-228	34	58	15301	15301	NUM
easat-228	34	59	-	-	SYM
easat-228	34	60	15308	15308	NUM
easat-228	34	61	,	,	PUNCT
easat-228	34	62	2014	2014	NUM
easat-228	34	63	.	.	PUNCT
easat-228	35	1	https://doi.org/10.1039/c4nr04387a	https://doi.org/10.1039/c4nr04387a	PROPN
easat-228	36	1	[	[	X
easat-228	36	2	5	5	X
easat-228	36	3	]	]	PUNCT
easat-228	36	4	v.	v.	PROPN
easat-228	36	5	p.	p.	PROPN
easat-228	36	6	pham	pham	PROPN
easat-228	36	7	,	,	PUNCT
easat-228	36	8	k.	k.	PROPN
easat-228	36	9	h.	h.	PROPN
easat-228	36	10	kim	kim	PROPN
easat-228	36	11	,	,	PUNCT
easat-228	36	12	m.	m.	PROPN
easat-228	36	13	h.	h.	PROPN
easat-228	36	14	jeon	jeon	PROPN
easat-228	36	15	,	,	PUNCT
easat-228	36	16	s.	s.	PROPN
easat-228	36	17	h.	h.	PROPN
easat-228	36	18	lee	lee	PROPN
easat-228	36	19	,	,	PUNCT
easat-228	36	20	k.	k.	PROPN
easat-228	36	21	n.	n.	PROPN
easat-228	36	22	kim	kim	PROPN
easat-228	36	23	,	,	PUNCT
easat-228	36	24	and	and	CCONJ
easat-228	36	25	g.	g.	PROPN
easat-228	36	26	y.	y.	PROPN
easat-228	36	27	yeom	yeom	PROPN
easat-228	36	28	,	,	PUNCT
easat-228	36	29	"	"	PUNCT
easat-228	36	30	low	low	ADJ
easat-228	36	31	damage	damage	NOUN
easat-228	36	32	pre	pre	ADJ
easat-228	36	33	-	-	NOUN
easat-228	36	34	doping	dope	VERB
easat-228	36	35	on	on	ADP
easat-228	36	36	cvd	cvd	PROPN
easat-228	36	37	graphene	graphene	PROPN
easat-228	36	38	/	/	SYM
easat-228	36	39	cu	cu	PROPN
easat-228	36	40	using	use	VERB
easat-228	36	41	a	a	DET
easat-228	36	42	chlorine	chlorine	NOUN
easat-228	36	43	inductively	inductively	ADV
easat-228	36	44	coupled	couple	VERB
easat-228	36	45	plasma	plasma	NOUN
easat-228	36	46	,	,	PUNCT
easat-228	36	47	"	"	PUNCT
easat-228	36	48	carbon	carbon	NOUN
easat-228	36	49	,	,	PUNCT
easat-228	36	50	vol	vol	NOUN
easat-228	36	51	.	.	PROPN
easat-228	36	52	95	95	NUM
easat-228	36	53	,	,	PUNCT
easat-228	36	54	pp	pp	ADJ
easat-228	36	55	.	.	PUNCT
easat-228	36	56	664	664	NUM
easat-228	36	57	-	-	SYM
easat-228	36	58	671	671	NUM
easat-228	36	59	,	,	PUNCT
easat-228	36	60	2015	2015	NUM
easat-228	36	61	.	.	PUNCT
easat-228	37	1	https://doi.org/10.1016/j.carbon.2015.08.070	https://doi.org/10.1016/j.carbon.2015.08.070	NOUN
easat-228	38	1	[	[	X
easat-228	38	2	6	6	X
easat-228	38	3	]	]	PUNCT
easat-228	38	4	v.	v.	PROPN
easat-228	38	5	p.	p.	PROPN
easat-228	38	6	pham	pham	PROPN
easat-228	38	7	,	,	PUNCT
easat-228	38	8	a.	a.	PROPN
easat-228	38	9	mishra	mishra	PROPN
easat-228	38	10	,	,	PUNCT
easat-228	38	11	and	and	CCONJ
easat-228	38	12	g.	g.	PROPN
easat-228	38	13	y.	y.	PROPN
easat-228	38	14	yeom	yeom	PROPN
easat-228	38	15	,	,	PUNCT
easat-228	38	16	"	"	PUNCT
easat-228	38	17	the	the	DET
easat-228	38	18	enhancement	enhancement	NOUN
easat-228	38	19	of	of	ADP
easat-228	38	20	hall	hall	NOUN
easat-228	38	21	mobility	mobility	NOUN
easat-228	38	22	and	and	CCONJ
easat-228	38	23	conductivity	conductivity	NOUN
easat-228	38	24	of	of	ADP
easat-228	38	25	cvd	cvd	PROPN
easat-228	38	26	graphene	graphene	VERB
easat-228	38	27	through	through	ADP
easat-228	38	28	rad	rad	PROPN
easat-228	38	29	ica	ica	PROPN
easat-228	38	30	l	l	NOUN
easat-228	38	31	doping	doping	NOUN
easat-228	38	32	and	and	CCONJ
easat-228	38	33	vacuum	vacuum	NOUN
easat-228	38	34	annealing	annealing	NOUN
easat-228	38	35	,	,	PUNCT
easat-228	38	36	"	"	PUNCT
easat-228	38	37	rsc	rsc	PROPN
easat-228	38	38	advances	advance	NOUN
easat-228	38	39	,	,	PUNCT
easat-228	38	40	vol	vol	NOUN
easat-228	38	41	.	.	PROPN
easat-228	38	42	7	7	NUM
easat-228	38	43	,	,	PUNCT
easat-228	38	44	no	no	INTJ
easat-228	38	45	.	.	NOUN
easat-228	38	46	26	26	NUM
easat-228	38	47	,	,	PUNCT
easat-228	38	48	pp	pp	ADJ
easat-228	38	49	.	.	PUNCT
easat-228	39	1	16104	16104	NUM
easat-228	39	2	-	-	SYM
easat-228	39	3	16108	16108	NUM
easat-228	39	4	,	,	PUNCT
easat-228	39	5	2017	2017	NUM
easat-228	39	6	.	.	PUNCT
easat-228	40	1	https://doi.org/10.1039/c7ra01330b	https://doi.org/10.1039/c7ra01330b	PROPN
easat-228	41	1	[	[	X
easat-228	41	2	7	7	X
easat-228	41	3	]	]	PUNCT
easat-228	41	4	v.	v.	ADP
easat-228	41	5	p.	p.	PROPN
easat-228	41	6	pham	pham	PROPN
easat-228	41	7	et	et	PROPN
easat-228	41	8	al	al	PROPN
easat-228	41	9	.	.	PROPN
easat-228	41	10	,	,	PUNCT
easat-228	41	11	"	"	PUNCT
easat-228	41	12	low	low	ADJ
easat-228	41	13	energy	energy	NOUN
easat-228	41	14	bcl3	bcl3	NOUN
easat-228	41	15	plasma	plasma	NOUN
easat-228	41	16	doping	doping	NOUN
easat-228	41	17	of	of	ADP
easat-228	41	18	few	few	ADJ
easat-228	41	19	-	-	PUNCT
easat-228	41	20	layer	layer	NOUN
easat-228	41	21	graphene	graphene	NOUN
easat-228	41	22	,	,	PUNCT
easat-228	41	23	"	"	PUNCT
easat-228	41	24	science	science	NOUN
easat-228	41	25	of	of	ADP
easat-228	41	26	advanced	advanced	ADJ
easat-228	41	27	materials	material	NOUN
easat-228	41	28	,	,	PUNCT
easat-228	41	29	vol	vol	NOUN
easat-228	41	30	.	.	PROPN
easat-228	41	31	8	8	NUM
easat-228	41	32	,	,	PUNCT
easat-228	41	33	no	no	INTJ
easat-228	41	34	.	.	NOUN
easat-228	41	35	4	4	NUM
easat-228	41	36	,	,	PUNCT
easat-228	41	37	pp	pp	ADJ
easat-228	41	38	.	.	PUNCT
easat-228	41	39	8	8	NUM
easat-228	41	40	8	8	NUM
easat-228	41	41	4	4	NUM
easat-228	41	42	-8	-8	NUM
easat-228	41	43	90	90	NUM
easat-228	41	44	,	,	PUNCT
easat-228	41	45	2016	2016	NUM
easat-228	41	46	.	.	PUNCT
easat-228	42	1	[	[	X
easat-228	42	2	8	8	X
easat-228	42	3	]	]	X
easat-228	42	4	v.	v.	PROPN
easat-228	42	5	pham	pham	PROPN
easat-228	42	6	,	,	PUNCT
easat-228	42	7	"	"	PUNCT
easat-228	42	8	chemical	chemical	ADJ
easat-228	42	9	vapor	vapor	NOUN
easat-228	42	10	deposited	deposit	VERB
easat-228	42	11	graphene	graphene	ADJ
easat-228	42	12	synthesis	synthesis	NOUN
easat-228	42	13	with	with	ADP
easat-228	42	14	same	same	ADJ
easat-228	42	15	-	-	PUNCT
easat-228	42	16	oriented	orient	VERB
easat-228	42	17	hexagonal	hexagonal	ADJ
easat-228	42	18	domains	domain	NOUN
easat-228	42	19	,	,	PUNCT
easat-228	42	20	"	"	PUNCT
easat-228	42	21	eng	eng	PROPN
easat-228	42	22	press	press	NOUN
easat-228	42	23	,	,	PUNCT
easat-228	42	24	vol	vol	NOUN
easat-228	42	25	.	.	PROPN
easat-228	42	26	1	1	NUM
easat-228	42	27	,	,	PUNCT
easat-228	42	28	pp	pp	ADJ
easat-228	42	29	.	.	PUNCT
easat-228	43	1	39	39	NUM
easat-228	43	2	-	-	SYM
easat-228	43	3	42	42	NUM
easat-228	43	4	,	,	PUNCT
easat-228	43	5	2018	2018	NUM
easat-228	43	6	.	.	PUNCT
easat-228	44	1	[	[	X
easat-228	44	2	9	9	NUM
easat-228	44	3	]	]	PUNCT
easat-228	44	4	k.	k.	PROPN
easat-228	44	5	n.	n.	PROPN
easat-228	44	6	kim	kim	PROPN
easat-228	44	7	,	,	PUNCT
easat-228	44	8	v.	v.	PROPN
easat-228	44	9	p.	p.	PROPN
easat-228	44	10	pham	pham	PROPN
easat-228	44	11	,	,	PUNCT
easat-228	44	12	and	and	CCONJ
easat-228	44	13	g.	g.	PROPN
easat-228	44	14	y.	y.	PROPN
easat-228	44	15	yeom	yeom	PROPN
easat-228	44	16	,	,	PUNCT
easat-228	44	17	"	"	PUNCT
easat-228	44	18	chlorine	chlorine	NOUN
easat-228	44	19	radical	radical	ADJ
easat-228	44	20	doping	doping	NOUN
easat-228	44	21	of	of	ADP
easat-228	44	22	a	a	DET
easat-228	44	23	few	few	ADJ
easat-228	44	24	layer	layer	NOUN
easat-228	44	25	graphene	graphene	VERB
easat-228	44	26	with	with	ADP
easat-228	44	27	low	low	ADJ
easat-228	44	28	damage	damage	NOUN
easat-228	44	29	,	,	PUNCT
easat-228	44	30	"	"	PUNCT
easat-228	44	31	ecs	ecs	PROPN
easat-228	44	32	journal	journal	PROPN
easat-228	44	33	o	o	PROPN
easat-228	45	1	f	f	PROPN
easat-228	46	1	so	so	ADV
easat-228	46	2	l	l	PROPN
easat-228	46	3	i	i	PROPN
easat-228	46	4	d	d	PROPN
easat-228	46	5	state	state	NOUN
easat-228	46	6	science	science	NOUN
easat-228	46	7	and	and	CCONJ
easat-228	46	8	technology	technology	NOUN
easat-228	46	9	,	,	PUNCT
easat-228	46	10	vol	vol	NOUN
easat-228	46	11	.	.	PROPN
easat-228	46	12	4	4	NUM
easat-228	46	13	,	,	PUNCT
easat-228	46	14	no	no	INTJ
easat-228	46	15	.	.	NOUN
easat-228	46	16	6	6	NUM
easat-228	46	17	,	,	PUNCT
easat-228	46	18	pp	pp	PROPN
easat-228	46	19	.	.	PUNCT
easat-228	46	20	n5095	n5095	NOUN
easat-228	46	21	-	-	PUNCT
easat-228	46	22	n5097	n5097	PROPN
easat-228	46	23	,	,	PUNCT
easat-228	46	24	2015	2015	NUM
easat-228	46	25	.	.	PUNCT
easat-228	47	1	https://doi.org/10.1149/2.0141506jss	https://doi.org/10.1149/2.0141506jss	PRON
easat-228	48	1	[	[	X
easat-228	48	2	10	10	NUM
easat-228	48	3	]	]	PUNCT
easat-228	48	4	v.	v.	ADP
easat-228	48	5	p.	p.	PROPN
easat-228	48	6	pham	pham	PROPN
easat-228	49	1	and	and	CCONJ
easat-228	50	1	g.	g.	PROPN
easat-228	50	2	y.	y.	PROPN
easat-228	50	3	yeom	yeom	PROPN
easat-228	50	4	,	,	PUNCT
easat-228	50	5	"	"	PUNCT
easat-228	50	6	recent	recent	ADJ
easat-228	50	7	advances	advance	NOUN
easat-228	50	8	in	in	ADP
easat-228	50	9	doping	doping	NOUN
easat-228	50	10	of	of	ADP
easat-228	50	11	molybdenum	molybdenum	NOUN
easat-228	50	12	disulfide	disulfide	NOUN
easat-228	50	13	:	:	PUNCT
easat-228	50	14	industrial	industrial	ADJ
easat-228	50	15	applications	application	NOUN
easat-228	50	16	and	and	CCONJ
easat-228	50	17	future	future	NOUN
easat-228	50	18	p	p	PROPN
easat-228	50	19	rosp	rosp	NOUN
easat-228	50	20	ects	ect	VERB
easat-228	50	21	,	,	PUNCT
easat-228	50	22	"	"	PUNCT
easat-228	50	23	advanced	advanced	ADJ
easat-228	50	24	materials	material	NOUN
easat-228	50	25	,	,	PUNCT
easat-228	50	26	vol	vol	NOUN
easat-228	50	27	.	.	PROPN
easat-228	50	28	28	28	NUM
easat-228	50	29	,	,	PUNCT
easat-228	50	30	no	no	INTJ
easat-228	50	31	.	.	NOUN
easat-228	50	32	41	41	NUM
easat-228	50	33	,	,	PUNCT
easat-228	50	34	pp	pp	ADJ
easat-228	50	35	.	.	PUNCT
easat-228	51	1	9024	9024	NUM
easat-228	51	2	-	-	SYM
easat-228	51	3	9059	9059	NUM
easat-228	51	4	,	,	PUNCT
easat-228	51	5	2016	2016	NUM
easat-228	51	6	.	.	PUNCT
easat-228	52	1	https://doi.org/10.1002/chin.201651225	https://doi.org/10.1002/chin.201651225	NOUN
easat-228	53	1	[	[	X
easat-228	53	2	11	11	NUM
easat-228	53	3	]	]	PUNCT
easat-228	53	4	a.	a.	NOUN
easat-228	53	5	ferrari	ferrari	PROPN
easat-228	53	6	,	,	PUNCT
easat-228	53	7	f.	f.	PROPN
easat-228	53	8	bonaccorso	bonaccorso	PROPN
easat-228	53	9	,	,	PUNCT
easat-228	53	10	and	and	CCONJ
easat-228	53	11	v.	v.	ADP
easat-228	53	12	fal'ko	fal'ko	NOUN
easat-228	53	13	,	,	PUNCT
easat-228	53	14	"	"	PUNCT
easat-228	53	15	science	science	NOUN
easat-228	53	16	and	and	CCONJ
easat-228	53	17	technology	technology	NOUN
easat-228	53	18	roadmap	roadmap	NOUN
easat-228	53	19	for	for	ADP
easat-228	53	20	graphene	graphene	NOUN
easat-228	53	21	,	,	PUNCT
easat-228	53	22	related	relate	VERB
easat-228	53	23	two	two	NUM
easat-228	53	24	-	-	PUNCT
easat-228	53	25	dimensional	dimensional	ADJ
easat-228	53	26	c	c	X
easat-228	53	27	ry	ry	NOUN
easat-228	53	28	sta	sta	PROPN
easat-228	53	29	ls	ls	PROPN
easat-228	53	30	,	,	PUNCT
easat-228	53	31	and	and	CCONJ
easat-228	53	32	hybrid	hybrid	NOUN
easat-228	53	33	systems	system	NOUN
easat-228	53	34	,	,	PUNCT
easat-228	53	35	"	"	PUNCT
easat-228	53	36	nanoscale	nanoscale	NOUN
easat-228	53	37	,	,	PUNCT
easat-228	53	38	vol	vol	NOUN
easat-228	53	39	.	.	PROPN
easat-228	53	40	7	7	NUM
easat-228	53	41	,	,	PUNCT
easat-228	53	42	pp	pp	ADJ
easat-228	53	43	.	.	PUNCT
easat-228	54	1	4587	4587	NUM
easat-228	54	2	-	-	SYM
easat-228	54	3	5062	5062	NUM
easat-228	54	4	,	,	PUNCT
easat-228	54	5	2015	2015	NUM
easat-228	54	6	.	.	PUNCT
easat-228	55	1	[	[	X
easat-228	55	2	12	12	NUM
easat-228	55	3	]	]	PUNCT
easat-228	55	4	s.	s.	PROPN
easat-228	55	5	z.	z.	PROPN
easat-228	55	6	butler	butler	PROPN
easat-228	55	7	et	et	PROPN
easat-228	55	8	al	al	PROPN
easat-228	55	9	.	.	PROPN
easat-228	55	10	,	,	PUNCT
easat-228	55	11	"	"	PUNCT
easat-228	55	12	progress	progress	NOUN
easat-228	55	13	,	,	PUNCT
easat-228	55	14	challenges	challenge	NOUN
easat-228	55	15	,	,	PUNCT
easat-228	55	16	and	and	CCONJ
easat-228	55	17	opportunities	opportunity	NOUN
easat-228	55	18	in	in	ADP
easat-228	55	19	two	two	NUM
easat-228	55	20	-	-	PUNCT
easat-228	55	21	dimensional	dimensional	ADJ
easat-228	55	22	materials	material	NOUN
easat-228	55	23	beyond	beyond	ADP
easat-228	55	24	graphene	graphene	NOUN
easat-228	55	25	,	,	PUNCT
easat-228	55	26	"	"	PUNCT
easat-228	55	27	acs	acs	PROPN
easat-228	55	28	nano	nano	NOUN
easat-228	55	29	,	,	PUNCT
easat-228	55	30	vol	vol	NOUN
easat-228	55	31	.	.	PROPN
easat-228	55	32	7	7	NUM
easat-228	55	33	,	,	PUNCT
easat-228	55	34	no	no	INTJ
easat-228	55	35	.	.	NOUN
easat-228	55	36	4	4	NUM
easat-228	55	37	,	,	PUNCT
easat-228	55	38	pp	pp	ADJ
easat-228	55	39	.	.	PUNCT
easat-228	55	40	2898	2898	NUM
easat-228	55	41	-	-	SYM
easat-228	55	42	2926	2926	NUM
easat-228	55	43	,	,	PUNCT
easat-228	55	44	2013	2013	NUM
easat-228	55	45	.	.	PUNCT
easat-228	56	1	[	[	X
easat-228	56	2	13	13	NUM
easat-228	56	3	]	]	PUNCT
easat-228	56	4	a.	a.	NOUN
easat-228	56	5	k.	k.	PROPN
easat-228	56	6	geim	geim	PROPN
easat-228	56	7	and	and	CCONJ
easat-228	56	8	k.	k.	PROPN
easat-228	56	9	s.	s.	PROPN
easat-228	56	10	novoselov	novoselov	PROPN
easat-228	56	11	,	,	PUNCT
easat-228	56	12	"	"	PUNCT
easat-228	56	13	the	the	DET
easat-228	56	14	rise	rise	NOUN
easat-228	56	15	of	of	ADP
easat-228	56	16	graphene	graphene	NOUN
easat-228	56	17	,	,	PUNCT
easat-228	56	18	"	"	PUNCT
easat-228	56	19	nature	nature	NOUN
easat-228	56	20	materials	material	NOUN
easat-228	56	21	,	,	PUNCT
easat-228	56	22	vol	vol	NOUN
easat-228	56	23	.	.	PROPN
easat-228	56	24	6	6	NUM
easat-228	56	25	,	,	PUNCT
easat-228	56	26	no	no	INTJ
easat-228	56	27	.	.	NOUN
easat-228	56	28	3	3	NUM
easat-228	56	29	,	,	PUNCT
easat-228	56	30	pp	pp	ADJ
easat-228	56	31	.	.	PUNCT
easat-228	56	32	183	183	NUM
easat-228	56	33	-	-	SYM
easat-228	56	34	191	191	NUM
easat-228	56	35	,	,	PUNCT
easat-228	56	36	2007	2007	NUM
easat-228	56	37	.	.	PUNCT
easat-228	57	1	[	[	X
easat-228	57	2	14	14	NUM
easat-228	57	3	]	]	X
easat-228	57	4	w.	w.	PROPN
easat-228	57	5	j.	j.	PROPN
easat-228	57	6	parak	parak	PROPN
easat-228	57	7	,	,	PUNCT
easat-228	57	8	a.	a.	PROPN
easat-228	57	9	e.	e.	PROPN
easat-228	57	10	nel	nel	PROPN
easat-228	57	11	,	,	PUNCT
easat-228	57	12	and	and	CCONJ
easat-228	57	13	p.	p.	PROPN
easat-228	57	14	s.	s.	PROPN
easat-228	57	15	weiss	weiss	PROPN
easat-228	57	16	,	,	PUNCT
easat-228	57	17	"	"	PUNCT
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easat-228	57	19	challenges	challenge	NOUN
easat-228	57	20	for	for	ADP
easat-228	57	21	nanoscience	nanoscience	NOUN
easat-228	57	22	and	and	CCONJ
easat-228	57	23	nanotechnology	nanotechnology	NOUN
easat-228	57	24	,	,	PUNCT
easat-228	57	25	"	"	PUNCT
easat-228	57	26	vol	vol	NOUN
easat-228	57	27	.	.	NOUN
easat-228	57	28	9	9	NUM
easat-228	57	29	,	,	PUNCT
easat-228	57	30	ed	ed	NOUN
easat-228	57	31	:	:	PUNCT
easat-228	57	32	acs	acs	PROPN
easat-228	57	33	publications	publication	NOUN
easat-228	57	34	,	,	PUNCT
easat-228	57	35	2015	2015	NUM
easat-228	57	36	,	,	PUNCT
easat-228	57	37	pp	pp	ADJ
easat-228	57	38	.	.	PUNCT
easat-228	58	1	6637	6637	NUM
easat-228	58	2	-	-	SYM
easat-228	58	3	6640	6640	NUM
easat-228	58	4	.	.	PUNCT
easat-228	59	1	[	[	X
easat-228	59	2	15	15	NUM
easat-228	59	3	]	]	PUNCT
easat-228	59	4	k.	k.	PROPN
easat-228	59	5	kim	kim	PROPN
easat-228	59	6	et	et	PROPN
easat-228	59	7	al	al	PROPN
easat-228	59	8	.	.	PROPN
easat-228	59	9	,	,	PUNCT
easat-228	59	10	"	"	PUNCT
easat-228	59	11	atomic	atomic	ADJ
easat-228	59	12	layer	layer	NOUN
easat-228	59	13	etching	etch	VERB
easat-228	59	14	of	of	ADP
easat-228	59	15	graphene	graphene	NOUN
easat-228	59	16	through	through	ADP
easat-228	59	17	controlled	control	VERB
easat-228	59	18	ion	ion	NOUN
easat-228	59	19	beam	beam	NOUN
easat-228	59	20	for	for	ADP
easat-228	59	21	graphene	graphene	NOUN
easat-228	59	22	-	-	PUNCT
easat-228	59	23	based	base	VERB
easat-228	59	24	electronics	electronic	NOUN
easat-228	59	25	,	,	PUNCT
easat-228	59	26	"	"	PUNCT
easat-228	59	27	scientific	scientific	ADJ
easat-228	59	28	reports	report	NOUN
easat-228	59	29	,	,	PUNCT
easat-228	59	30	v	v	NOUN
easat-228	59	31	ol	ol	ADJ
easat-228	59	32	.	.	PROPN
easat-228	59	33	7	7	NUM
easat-228	59	34	,	,	PUNCT
easat-228	59	35	no	no	INTJ
easat-228	59	36	.	.	NOUN
easat-228	59	37	1	1	NUM
easat-228	59	38	,	,	PUNCT
easat-228	59	39	pp	pp	ADJ
easat-228	59	40	.	.	PUNCT
easat-228	60	1	2462	2462	NUM
easat-228	60	2	-	-	SYM
easat-228	60	3	2462	2462	NUM
easat-228	60	4	,	,	PUNCT
easat-228	60	5	2017	2017	NUM
easat-228	60	6	.	.	PUNCT
easat-228	61	1	https://doi.org/10.1038/s41598-017-02430-8	https://doi.org/10.1038/s41598-017-02430-8	NOUN
easat-228	62	1	[	[	X
easat-228	62	2	16	16	NUM
easat-228	62	3	]	]	X
easat-228	62	4	y.	y.	PROPN
easat-228	62	5	liu	liu	PROPN
easat-228	62	6	et	et	PROPN
easat-228	62	7	al	al	PROPN
easat-228	62	8	.	.	PROPN
easat-228	62	9	,	,	PUNCT
easat-228	62	10	"	"	PUNCT
easat-228	62	11	layer	layer	NOUN
easat-228	62	12	-	-	PUNCT
easat-228	62	13	by	by	ADP
easat-228	62	14	-	-	PUNCT
easat-228	62	15	layer	layer	NOUN
easat-228	62	16	thinning	thinning	NOUN
easat-228	62	17	of	of	ADP
easat-228	62	18	mos2	mos2	NOUN
easat-228	62	19	by	by	ADP
easat-228	62	20	plasma	plasma	NOUN
easat-228	62	21	,	,	PUNCT
easat-228	62	22	"	"	PUNCT
easat-228	62	23	acs	acs	PROPN
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easat-228	62	25	,	,	PUNCT
easat-228	62	26	vol	vol	NOUN
easat-228	62	27	.	.	PROPN
easat-228	62	28	7	7	NUM
easat-228	62	29	,	,	PUNCT
easat-228	62	30	no	no	INTJ
easat-228	62	31	.	.	NOUN
easat-228	62	32	5	5	NUM
easat-228	62	33	,	,	PUNCT
easat-228	62	34	pp	pp	ADJ
easat-228	62	35	.	.	PUNCT
easat-228	63	1	4202	4202	NUM
easat-228	63	2	-	-	SYM
easat-228	63	3	4209	4209	NUM
easat-228	63	4	,	,	PUNCT
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easat-228	63	6	.	.	PUNCT
easat-228	64	1	[	[	X
easat-228	64	2	17	17	NUM
easat-228	64	3	]	]	PUNCT
easat-228	64	4	j.	j.	PROPN
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easat-228	64	6	,	,	PUNCT
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easat-228	64	9	,	,	PUNCT
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easat-228	64	28	by	by	ADP
easat-228	64	29	an	an	DET
easat-228	64	30	ar	ar	NOUN
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easat-228	64	33	,	,	PUNCT
easat-228	64	34	"	"	PUNCT
easat-228	64	35	journal	journal	NOUN
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easat-228	64	38	,	,	PUNCT
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easat-228	64	42	,	,	PUNCT
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easat-228	64	44	.	.	PUNCT
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easat-228	64	46	-	-	SYM
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easat-228	64	48	,	,	PUNCT
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easat-228	64	50	.	.	PUNCT
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easat-228	65	19	-	-	PUNCT
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easat-228	65	24	"	"	PUNCT
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easat-228	65	27	,	,	PUNCT
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easat-228	65	31	,	,	PUNCT
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easat-228	65	35	,	,	PUNCT
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easat-228	65	37	.	.	PUNCT
easat-228	66	1	722	722	NUM
easat-228	66	2	-	-	SYM
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easat-228	66	4	,	,	PUNCT
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easat-228	66	6	.	.	PUNCT
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easat-228	67	2	19	19	NUM
easat-228	67	3	]	]	X
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easat-228	67	19	,	,	PUNCT
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easat-228	67	24	.	.	PROPN
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easat-228	67	30	,	,	PUNCT
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easat-228	68	3	1	1	NUM
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easat-228	68	5	-1	-1	ADP
easat-228	68	6	618	618	NUM
easat-228	68	7	6	6	NUM
easat-228	68	8	,	,	PUNCT
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easat-228	68	10	0	0	NUM
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easat-228	68	12	.	.	PUNCT
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easat-228	69	3	20	20	NUM
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easat-228	69	37	,	,	PUNCT
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easat-228	69	40	,	,	PUNCT
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easat-228	69	42	.	.	PUNCT
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easat-228	70	21	s.	s.	PROPN
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easat-228	70	49	a	a	DET
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easat-228	70	52	,	,	PUNCT
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easat-228	71	2	,	,	PUNCT
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easat-228	71	5	4	4	NUM
easat-228	71	6	,	,	PUNCT
easat-228	71	7	p	p	X
easat-228	71	8	p	p	X
easat-228	71	9	.	.	PUNCT
easat-228	72	1	1	1	NUM
easat-228	72	2	5	5	NUM
easat-228	72	3	5	5	NUM
easat-228	72	4	2	2	NUM
easat-228	72	5	-15	-15	SYM
easat-228	72	6	58	58	NUM
easat-228	72	7	,	,	PUNCT
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easat-228	72	9	.	.	PUNCT
easat-228	73	1	https://doi.org/10.1116/1.1705590	https://doi.org/10.1116/1.1705590	X
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easat-228	74	2	22	22	NUM
easat-228	74	3	]	]	X
easat-228	74	4	y.	y.	PROPN
easat-228	74	5	sha	sha	PROPN
easat-228	74	6	,	,	PUNCT
easat-228	74	7	s.	s.	PROPN
easat-228	74	8	xiao	xiao	PROPN
easat-228	74	9	,	,	PUNCT
easat-228	74	10	x.	x.	PROPN
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easat-228	74	12	,	,	PUNCT
easat-228	74	13	f.	f.	PROPN
easat-228	74	14	qin	qin	PROPN
easat-228	74	15	,	,	PUNCT
easat-228	74	16	and	and	CCONJ
easat-228	74	17	x.	x.	NOUN
easat-228	74	18	gu	gu	PROPN
easat-228	74	19	,	,	PUNCT
easat-228	74	20	"	"	PUNCT
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easat-228	74	24	-	-	PUNCT
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easat-228	74	26	thinning	thinning	NOUN
easat-228	74	27	of	of	ADP
easat-228	74	28	mose2	mose2	NOUN
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easat-228	74	30	soft	soft	ADJ
easat-228	74	31	and	and	CCONJ
easat-228	74	32	reactive	reactive	ADJ
easat-228	74	33	p	p	NOUN
easat-228	74	34	lasma	lasma	NOUN
easat-228	74	35	e	e	PROPN
easat-228	74	36	tch	tch	PROPN
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easat-228	74	38	,	,	PUNCT
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easat-228	74	47	,	,	PUNCT
easat-228	74	48	pp	pp	ADJ
easat-228	74	49	.	.	PUNCT
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easat-228	74	51	-	-	SYM
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easat-228	74	53	,	,	PUNCT
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easat-228	74	55	.	.	PUNCT
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easat-228	75	10	,	,	PUNCT
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easat-228	75	12	a	a	DET
easat-228	75	13	two	two	NUM
easat-228	75	14	-	-	PUNCT
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easat-228	75	43	21	21	NUM
easat-228	75	44	,	,	PUNCT
easat-228	75	45	pp	pp	ADJ
easat-228	75	46	.	.	PUNCT
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easat-228	76	2	-	-	SYM
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easat-228	76	4	,	,	PUNCT
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easat-228	76	6	.	.	PUNCT
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