id	sid	tid	token	lemma	pos
easat-3216	1	1	edelweiss	edelweiss	PROPN
easat-3216	1	2	applied	apply	VERB
easat-3216	1	3	science	science	NOUN
easat-3216	1	4	and	and	CCONJ
easat-3216	1	5	technology	technology	NOUN
easat-3216	1	6	issn	issn	PROPN
easat-3216	1	7	:	:	PUNCT
easat-3216	1	8	2576	2576	NUM
easat-3216	1	9	-	-	SYM
easat-3216	1	10	8484	8484	NUM
easat-3216	1	11	vol	vol	NOUN
easat-3216	1	12	.	.	PROPN
easat-3216	1	13	8	8	NUM
easat-3216	1	14	,	,	PUNCT
easat-3216	1	15	no	no	INTJ
easat-3216	1	16	.	.	NOUN
easat-3216	1	17	6	6	NUM
easat-3216	1	18	,	,	PUNCT
easat-3216	1	19	5490	5490	NUM
easat-3216	1	20	-	-	SYM
easat-3216	1	21	5501	5501	NUM
easat-3216	1	22	2024	2024	NUM
easat-3216	1	23	publisher	publisher	NOUN
easat-3216	1	24	:	:	PUNCT
easat-3216	1	25	learning	learn	VERB
easat-3216	1	26	gate	gate	NOUN
easat-3216	1	27	doi	doi	PROPN
easat-3216	1	28	:	:	PUNCT
easat-3216	1	29	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	1	30	©	©	PROPN
easat-3216	1	31	2024	2024	NUM
easat-3216	1	32	by	by	ADP
easat-3216	1	33	the	the	DET
easat-3216	1	34	authors	author	NOUN
easat-3216	1	35	;	;	PUNCT
easat-3216	1	36	licensee	licensee	PROPN
easat-3216	1	37	learning	learning	NOUN
easat-3216	1	38	gate	gate	NOUN
easat-3216	1	39	©	©	PROPN
easat-3216	1	40	2024	2024	NUM
easat-3216	1	41	by	by	ADP
easat-3216	1	42	the	the	DET
easat-3216	1	43	authors	author	NOUN
easat-3216	1	44	;	;	PUNCT
easat-3216	1	45	licensee	licensee	PROPN
easat-3216	1	46	learning	learn	VERB
easat-3216	1	47	gate	gate	NOUN
easat-3216	1	48	*	*	PUNCT
easat-3216	1	49	correspondence	correspondence	NOUN
easat-3216	1	50	:	:	PUNCT
easat-3216	2	1	arslanasim@dal.ca	arslanasim@dal.ca	VERB
easat-3216	2	2	on	on	ADP
easat-3216	2	3	-	-	PUNCT
easat-3216	2	4	chip	chip	NOUN
easat-3216	2	5	implementation	implementation	NOUN
easat-3216	2	6	of	of	ADP
easat-3216	2	7	mach	mach	ADJ
easat-3216	2	8	-	-	PUNCT
easat-3216	2	9	zehnder	zehnder	NOUN
easat-3216	2	10	interferometer	interferometer	NOUN
easat-3216	2	11	(	(	PUNCT
easat-3216	2	12	mzi	mzi	NOUN
easat-3216	2	13	)	)	PUNCT
easat-3216	2	14	photonic	photonic	ADJ
easat-3216	2	15	circuits	circuit	NOUN
easat-3216	2	16	:	:	PUNCT
easat-3216	2	17	design	design	NOUN
easat-3216	2	18	,	,	PUNCT
easat-3216	2	19	simulation	simulation	NOUN
easat-3216	2	20	and	and	CCONJ
easat-3216	2	21	characterization	characterization	NOUN
easat-3216	2	22	arslan	arslan	NOUN
easat-3216	2	23	asim1	asim1	PROPN
easat-3216	3	1	*	*	PROPN
easat-3216	3	2	,	,	PUNCT
easat-3216	3	3	reza	reza	PROPN
easat-3216	3	4	mokhtarpour1	mokhtarpour1	PROPN
easat-3216	3	5	,	,	PUNCT
easat-3216	3	6	michael	michael	PROPN
easat-3216	3	7	cada1,2	cada1,2	PROPN
easat-3216	3	8	,	,	PUNCT
easat-3216	3	9	yuan	yuan	PROPN
easat-3216	3	10	ma1	ma1	PROPN
easat-3216	3	11	1department	1department	NUM
easat-3216	3	12	of	of	ADP
easat-3216	3	13	electrical	electrical	ADJ
easat-3216	3	14	and	and	CCONJ
easat-3216	3	15	computer	computer	NOUN
easat-3216	3	16	engineering	engineering	NOUN
easat-3216	3	17	,	,	PUNCT
easat-3216	3	18	dalhousie	dalhousie	PROPN
easat-3216	3	19	university	university	PROPN
easat-3216	3	20	,	,	PUNCT
easat-3216	3	21	halifax	halifax	PROPN
easat-3216	3	22	,	,	PUNCT
easat-3216	3	23	ns	ns	NUM
easat-3216	3	24	b3h	b3h	NOUN
easat-3216	3	25	4r2	4r2	NUM
easat-3216	3	26	,	,	PUNCT
easat-3216	3	27	canada	canada	PROPN
easat-3216	3	28	;	;	PUNCT
easat-3216	3	29	arslanasim@dal.ca	arslanasim@dal.ca	PROPN
easat-3216	3	30	(	(	PUNCT
easat-3216	3	31	a.a	a.a	PROPN
easat-3216	3	32	.	.	PROPN
easat-3216	3	33	)	)	PUNCT
easat-3216	3	34	,	,	PUNCT
easat-3216	4	1	reza.mokhtarpour@dal.ca	reza.mokhtarpour@dal.ca	PROPN
easat-3216	4	2	(	(	PUNCT
easat-3216	4	3	r.m	r.m	PROPN
easat-3216	4	4	.	.	PROPN
easat-3216	4	5	)	)	PUNCT
easat-3216	4	6	.	.	PUNCT
easat-3216	5	1	2faculty	2faculty	NUM
easat-3216	5	2	of	of	ADP
easat-3216	5	3	materials	material	NOUN
easat-3216	5	4	science	science	NOUN
easat-3216	5	5	and	and	CCONJ
easat-3216	5	6	technology	technology	NOUN
easat-3216	5	7	,	,	PUNCT
easat-3216	5	8	vsb	vsb	PROPN
easat-3216	5	9	-	-	ADJ
easat-3216	5	10	technical	technical	ADJ
easat-3216	5	11	university	university	PROPN
easat-3216	5	12	of	of	ADP
easat-3216	5	13	ostrava	ostrava	PROPN
easat-3216	5	14	,	,	PUNCT
easat-3216	5	15	708	708	NUM
easat-3216	5	16	00	00	NUM
easat-3216	5	17	poruba	poruba	PROPN
easat-3216	5	18	,	,	PUNCT
easat-3216	5	19	ostrava	ostrava	PROPN
easat-3216	5	20	,	,	PUNCT
easat-3216	5	21	czech	czech	PROPN
easat-3216	5	22	republic	republic	NOUN
easat-3216	5	23	;	;	PUNCT
easat-3216	5	24	michael.cada@dal.ca	michael.cada@dal.ca	X
easat-3216	5	25	(	(	PUNCT
easat-3216	5	26	m.c	m.c	PROPN
easat-3216	5	27	.	.	PROPN
easat-3216	5	28	)	)	PUNCT
easat-3216	5	29	.	.	PUNCT
easat-3216	6	1	abstract	abstract	ADV
easat-3216	6	2	:	:	PUNCT
easat-3216	6	3	as	as	SCONJ
easat-3216	6	4	the	the	DET
easat-3216	6	5	limitations	limitation	NOUN
easat-3216	6	6	of	of	ADP
easat-3216	6	7	integrated	integrate	VERB
easat-3216	6	8	electronics	electronic	NOUN
easat-3216	6	9	start	start	VERB
easat-3216	6	10	to	to	PART
easat-3216	6	11	appear	appear	VERB
easat-3216	6	12	,	,	PUNCT
easat-3216	6	13	it	it	PRON
easat-3216	6	14	becomes	become	VERB
easat-3216	6	15	important	important	ADJ
easat-3216	6	16	to	to	PART
easat-3216	6	17	look	look	VERB
easat-3216	6	18	for	for	ADP
easat-3216	6	19	potential	potential	ADJ
easat-3216	6	20	alternatives	alternative	NOUN
easat-3216	6	21	.	.	PUNCT
easat-3216	7	1	silicon	silicon	PROPN
easat-3216	7	2	photonics	photonics	PROPN
easat-3216	7	3	holds	hold	VERB
easat-3216	7	4	a	a	DET
easat-3216	7	5	lot	lot	NOUN
easat-3216	7	6	of	of	ADP
easat-3216	7	7	promise	promise	NOUN
easat-3216	7	8	in	in	ADP
easat-3216	7	9	this	this	DET
easat-3216	7	10	regard	regard	NOUN
easat-3216	7	11	.	.	PUNCT
easat-3216	8	1	it	it	PRON
easat-3216	8	2	can	can	AUX
easat-3216	8	3	not	not	PART
easat-3216	8	4	only	only	ADV
easat-3216	8	5	provide	provide	VERB
easat-3216	8	6	superior	superior	ADJ
easat-3216	8	7	performance	performance	NOUN
easat-3216	8	8	to	to	ADP
easat-3216	8	9	traditional	traditional	ADJ
easat-3216	8	10	integrated	integrate	VERB
easat-3216	8	11	electronics	electronic	NOUN
easat-3216	8	12	in	in	ADP
easat-3216	8	13	many	many	ADJ
easat-3216	8	14	aspects	aspect	NOUN
easat-3216	8	15	,	,	PUNCT
easat-3216	8	16	but	but	CCONJ
easat-3216	8	17	also	also	ADV
easat-3216	8	18	co	co	VERB
easat-3216	8	19	-	-	VERB
easat-3216	8	20	exist	exist	VERB
easat-3216	8	21	in	in	ADP
easat-3216	8	22	harmony	harmony	NOUN
easat-3216	8	23	with	with	ADP
easat-3216	8	24	it	it	PRON
easat-3216	8	25	through	through	ADP
easat-3216	8	26	the	the	DET
easat-3216	8	27	realization	realization	NOUN
easat-3216	8	28	of	of	ADP
easat-3216	8	29	electro	electro	ADJ
easat-3216	8	30	-	-	PUNCT
easat-3216	8	31	optic	optic	NOUN
easat-3216	8	32	devices	device	NOUN
easat-3216	8	33	.	.	PUNCT
easat-3216	9	1	the	the	DET
easat-3216	9	2	focus	focus	NOUN
easat-3216	9	3	of	of	ADP
easat-3216	9	4	this	this	DET
easat-3216	9	5	paper	paper	NOUN
easat-3216	9	6	is	be	AUX
easat-3216	9	7	on	on	ADP
easat-3216	9	8	photonic	photonic	ADJ
easat-3216	9	9	integrated	integrate	VERB
easat-3216	9	10	circuits	circuit	NOUN
easat-3216	9	11	(	(	PUNCT
easat-3216	9	12	pics	pic	NOUN
easat-3216	9	13	)	)	PUNCT
easat-3216	9	14	only	only	ADV
easat-3216	9	15	.	.	PUNCT
easat-3216	10	1	a	a	DET
easat-3216	10	2	theoretical	theoretical	ADJ
easat-3216	10	3	understanding	understanding	NOUN
easat-3216	10	4	of	of	ADP
easat-3216	10	5	mach	mach	ADJ
easat-3216	10	6	-	-	PUNCT
easat-3216	10	7	zehnder	zehnder	NOUN
easat-3216	10	8	interferometer	interferometer	NOUN
easat-3216	10	9	(	(	PUNCT
easat-3216	10	10	mzi	mzi	NOUN
easat-3216	10	11	)	)	PUNCT
easat-3216	10	12	circuits	circuit	NOUN
easat-3216	10	13	has	have	AUX
easat-3216	10	14	been	be	AUX
easat-3216	10	15	developed	develop	VERB
easat-3216	10	16	.	.	PUNCT
easat-3216	11	1	computational	computational	ADJ
easat-3216	11	2	design	design	NOUN
easat-3216	11	3	tools	tool	NOUN
easat-3216	11	4	have	have	AUX
easat-3216	11	5	been	be	AUX
easat-3216	11	6	employed	employ	VERB
easat-3216	11	7	to	to	ADP
easat-3216	11	8	model	model	NOUN
easat-3216	11	9	photonic	photonic	ADJ
easat-3216	11	10	waveguides	waveguide	NOUN
easat-3216	11	11	.	.	PUNCT
easat-3216	12	1	the	the	DET
easat-3216	12	2	design	design	NOUN
easat-3216	12	3	of	of	ADP
easat-3216	12	4	optical	optical	ADJ
easat-3216	12	5	waveguides	waveguide	NOUN
easat-3216	12	6	has	have	AUX
easat-3216	12	7	been	be	AUX
easat-3216	12	8	numerically	numerically	ADV
easat-3216	12	9	investigated	investigate	VERB
easat-3216	12	10	in	in	ADP
easat-3216	12	11	matlab	matlab	PROPN
easat-3216	12	12	through	through	ADP
easat-3216	12	13	the	the	DET
easat-3216	12	14	effective	effective	ADJ
easat-3216	12	15	index	index	NOUN
easat-3216	12	16	method	method	NOUN
easat-3216	12	17	(	(	PUNCT
easat-3216	12	18	eim	eim	PROPN
easat-3216	12	19	)	)	PUNCT
easat-3216	12	20	.	.	PUNCT
easat-3216	13	1	the	the	DET
easat-3216	13	2	material	material	NOUN
easat-3216	13	3	properties	property	NOUN
easat-3216	13	4	of	of	ADP
easat-3216	13	5	silicon	silicon	NOUN
easat-3216	13	6	and	and	CCONJ
easat-3216	13	7	silicon	silicon	NOUN
easat-3216	13	8	dioxide	dioxide	NOUN
easat-3216	13	9	,	,	PUNCT
easat-3216	13	10	used	use	VERB
easat-3216	13	11	in	in	ADP
easat-3216	13	12	the	the	DET
easat-3216	13	13	simulations	simulation	NOUN
easat-3216	13	14	,	,	PUNCT
easat-3216	13	15	have	have	AUX
easat-3216	13	16	been	be	AUX
easat-3216	13	17	presented	present	VERB
easat-3216	13	18	.	.	PUNCT
easat-3216	14	1	the	the	DET
easat-3216	14	2	properties	property	NOUN
easat-3216	14	3	include	include	VERB
easat-3216	14	4	the	the	DET
easat-3216	14	5	refractive	refractive	ADJ
easat-3216	14	6	indices	index	NOUN
easat-3216	14	7	,	,	PUNCT
easat-3216	14	8	group	group	NOUN
easat-3216	14	9	refractive	refractive	ADJ
easat-3216	14	10	indices	index	NOUN
easat-3216	14	11	and	and	CCONJ
easat-3216	14	12	effective	effective	ADJ
easat-3216	14	13	indices	index	NOUN
easat-3216	14	14	.	.	PUNCT
easat-3216	15	1	waveguide	waveguide	VERB
easat-3216	15	2	geometrical	geometrical	ADJ
easat-3216	15	3	parameters	parameter	NOUN
easat-3216	15	4	have	have	AUX
easat-3216	15	5	been	be	AUX
easat-3216	15	6	explored	explore	VERB
easat-3216	15	7	and	and	CCONJ
easat-3216	15	8	a	a	DET
easat-3216	15	9	500	500	NUM
easat-3216	15	10	nm	nm	NOUN
easat-3216	15	11	x	x	PROPN
easat-3216	15	12	220	220	NUM
easat-3216	15	13	nm	nm	DET
easat-3216	15	14	silicon	silicon	NOUN
easat-3216	15	15	waveguide	waveguide	ADJ
easat-3216	15	16	structure	structure	NOUN
easat-3216	15	17	has	have	AUX
easat-3216	15	18	been	be	AUX
easat-3216	15	19	finalized	finalize	VERB
easat-3216	15	20	for	for	ADP
easat-3216	15	21	experimental	experimental	ADJ
easat-3216	15	22	work	work	NOUN
easat-3216	15	23	.	.	PUNCT
easat-3216	16	1	the	the	DET
easat-3216	16	2	schematics	schematics	NOUN
easat-3216	16	3	for	for	ADP
easat-3216	16	4	four	four	NUM
easat-3216	16	5	mzi	mzi	NOUN
easat-3216	16	6	optical	optical	ADJ
easat-3216	16	7	circuits	circuit	NOUN
easat-3216	16	8	have	have	AUX
easat-3216	16	9	been	be	AUX
easat-3216	16	10	prepared	prepare	VERB
easat-3216	16	11	in	in	ADP
easat-3216	16	12	klayout	klayout	NOUN
easat-3216	16	13	.	.	PUNCT
easat-3216	17	1	interoperability	interoperability	NOUN
easat-3216	17	2	of	of	ADP
easat-3216	17	3	klayout	klayout	NOUN
easat-3216	17	4	and	and	CCONJ
easat-3216	17	5	ansys	ansys	PROPN
easat-3216	17	6	lumerical	lumerical	ADJ
easat-3216	17	7	interconnect	interconnect	NOUN
easat-3216	17	8	allows	allow	VERB
easat-3216	17	9	for	for	SCONJ
easat-3216	17	10	spectral	spectral	ADJ
easat-3216	17	11	response	response	NOUN
easat-3216	17	12	to	to	PART
easat-3216	17	13	be	be	AUX
easat-3216	17	14	obtained	obtain	VERB
easat-3216	17	15	through	through	ADP
easat-3216	17	16	simulations	simulation	NOUN
easat-3216	17	17	.	.	PUNCT
easat-3216	18	1	the	the	DET
easat-3216	18	2	circuits	circuit	NOUN
easat-3216	18	3	consist	consist	VERB
easat-3216	18	4	of	of	ADP
easat-3216	18	5	grating	grate	VERB
easat-3216	18	6	couplers	coupler	NOUN
easat-3216	18	7	,	,	PUNCT
easat-3216	18	8	y	y	ADJ
easat-3216	18	9	-	-	PUNCT
easat-3216	18	10	branch	branch	NOUN
easat-3216	18	11	splitters	splitter	NOUN
easat-3216	18	12	and	and	CCONJ
easat-3216	18	13	bidirectional	bidirectional	ADJ
easat-3216	18	14	couplers	coupler	NOUN
easat-3216	18	15	.	.	PUNCT
easat-3216	19	1	the	the	DET
easat-3216	19	2	input	input	NOUN
easat-3216	19	3	signal	signal	NOUN
easat-3216	19	4	is	be	AUX
easat-3216	19	5	split	split	VERB
easat-3216	19	6	into	into	ADP
easat-3216	19	7	two	two	NUM
easat-3216	19	8	waveguide	waveguide	ADJ
easat-3216	19	9	paths	path	NOUN
easat-3216	19	10	.	.	PUNCT
easat-3216	20	1	both	both	DET
easat-3216	20	2	waveguide	waveguide	ADJ
easat-3216	20	3	paths	path	NOUN
easat-3216	20	4	culminate	culminate	NOUN
easat-3216	20	5	into	into	ADP
easat-3216	20	6	grating	grate	VERB
easat-3216	20	7	couplers	coupler	NOUN
easat-3216	20	8	connected	connect	VERB
easat-3216	20	9	to	to	ADP
easat-3216	20	10	photodetectors	photodetector	NOUN
easat-3216	20	11	.	.	PUNCT
easat-3216	21	1	the	the	DET
easat-3216	21	2	signals	signal	NOUN
easat-3216	21	3	from	from	ADP
easat-3216	21	4	both	both	CCONJ
easat-3216	21	5	the	the	DET
easat-3216	21	6	channels	channel	NOUN
easat-3216	21	7	have	have	AUX
easat-3216	21	8	been	be	AUX
easat-3216	21	9	recorded	record	VERB
easat-3216	21	10	.	.	PUNCT
easat-3216	22	1	the	the	DET
easat-3216	22	2	fabrication	fabrication	NOUN
easat-3216	22	3	of	of	ADP
easat-3216	22	4	the	the	DET
easat-3216	22	5	chip	chip	NOUN
easat-3216	22	6	has	have	AUX
easat-3216	22	7	been	be	AUX
easat-3216	22	8	carried	carry	VERB
easat-3216	22	9	out	out	ADP
easat-3216	22	10	at	at	ADP
easat-3216	22	11	applied	apply	VERB
easat-3216	22	12	nanotools	nanotools	PROPN
easat-3216	22	13	inc	inc	PROPN
easat-3216	22	14	.	.	PROPN
easat-3216	22	15	through	through	ADP
easat-3216	22	16	electron	electron	NOUN
easat-3216	22	17	beam	beam	NOUN
easat-3216	22	18	lithography	lithography	NOUN
easat-3216	22	19	(	(	PUNCT
easat-3216	22	20	ebl	ebl	PROPN
easat-3216	22	21	)	)	PUNCT
easat-3216	22	22	.	.	PUNCT
easat-3216	23	1	the	the	DET
easat-3216	23	2	characterization	characterization	NOUN
easat-3216	23	3	of	of	ADP
easat-3216	23	4	the	the	DET
easat-3216	23	5	devices	device	NOUN
easat-3216	23	6	has	have	AUX
easat-3216	23	7	been	be	AUX
easat-3216	23	8	done	do	VERB
easat-3216	23	9	at	at	ADP
easat-3216	23	10	25oc	25oc	NOUN
easat-3216	23	11	.	.	PUNCT
easat-3216	24	1	a	a	DET
easat-3216	24	2	decent	decent	ADJ
easat-3216	24	3	conformity	conformity	NOUN
easat-3216	24	4	can	can	AUX
easat-3216	24	5	be	be	AUX
easat-3216	24	6	observed	observe	VERB
easat-3216	24	7	between	between	ADP
easat-3216	24	8	simulation	simulation	NOUN
easat-3216	24	9	and	and	CCONJ
easat-3216	24	10	experimental	experimental	ADJ
easat-3216	24	11	results	result	NOUN
easat-3216	24	12	.	.	PUNCT
easat-3216	25	1	keywords	keyword	NOUN
easat-3216	25	2	:	:	PUNCT
easat-3216	25	3	lithography	lithography	NOUN
easat-3216	25	4	,	,	PUNCT
easat-3216	25	5	modeling	modeling	NOUN
easat-3216	25	6	,	,	PUNCT
easat-3216	25	7	photonic	photonic	ADJ
easat-3216	25	8	circuits	circuit	NOUN
easat-3216	25	9	,	,	PUNCT
easat-3216	25	10	silicon	silicon	NOUN
easat-3216	25	11	on	on	ADP
easat-3216	25	12	insulator	insulator	NOUN
easat-3216	25	13	(	(	PUNCT
easat-3216	25	14	soi	soi	ADJ
easat-3216	25	15	)	)	PUNCT
easat-3216	25	16	,	,	PUNCT
easat-3216	25	17	waveguide	waveguide	VERB
easat-3216	25	18	effective	effective	ADJ
easat-3216	25	19	index	index	NOUN
easat-3216	25	20	.	.	PUNCT
easat-3216	26	1	1	1	X
easat-3216	26	2	.	.	X
easat-3216	26	3	introduction	introduction	NOUN
easat-3216	26	4	one	one	NUM
easat-3216	26	5	of	of	ADP
easat-3216	26	6	the	the	DET
easat-3216	26	7	most	most	ADV
easat-3216	26	8	astounding	astounding	ADJ
easat-3216	26	9	achievements	achievement	NOUN
easat-3216	26	10	of	of	ADP
easat-3216	26	11	the	the	DET
easat-3216	26	12	last	last	ADJ
easat-3216	26	13	century	century	NOUN
easat-3216	26	14	is	be	AUX
easat-3216	26	15	the	the	DET
easat-3216	26	16	development	development	NOUN
easat-3216	26	17	of	of	ADP
easat-3216	26	18	the	the	DET
easat-3216	26	19	field	field	NOUN
easat-3216	26	20	of	of	ADP
easat-3216	26	21	integrated	integrated	ADJ
easat-3216	26	22	circuit	circuit	NOUN
easat-3216	26	23	(	(	PUNCT
easat-3216	26	24	ic	ic	NUM
easat-3216	26	25	)	)	PUNCT
easat-3216	26	26	electronics	electronic	NOUN
easat-3216	26	27	.	.	PUNCT
easat-3216	27	1	in	in	ADP
easat-3216	27	2	1965	1965	NUM
easat-3216	27	3	,	,	PUNCT
easat-3216	27	4	moore	moore	PROPN
easat-3216	27	5	predicted	predict	VERB
easat-3216	27	6	that	that	SCONJ
easat-3216	27	7	the	the	DET
easat-3216	27	8	number	number	NOUN
easat-3216	27	9	of	of	ADP
easat-3216	27	10	transistors	transistor	NOUN
easat-3216	27	11	on	on	ADP
easat-3216	27	12	an	an	DET
easat-3216	27	13	integrated	integrate	VERB
easat-3216	27	14	circuit	circuit	NOUN
easat-3216	27	15	package	package	NOUN
easat-3216	27	16	would	would	AUX
easat-3216	27	17	double	double	VERB
easat-3216	27	18	every	every	DET
easat-3216	27	19	year	year	NOUN
easat-3216	27	20	[	[	X
easat-3216	27	21	1	1	NUM
easat-3216	27	22	]	]	PUNCT
easat-3216	27	23	.	.	PUNCT
easat-3216	28	1	he	he	PRON
easat-3216	28	2	later	later	ADV
easat-3216	28	3	changed	change	VERB
easat-3216	28	4	the	the	DET
easat-3216	28	5	timespan	timespan	NOUN
easat-3216	28	6	of	of	ADP
easat-3216	28	7	doubling	double	VERB
easat-3216	28	8	to	to	ADP
easat-3216	28	9	2	2	NUM
easat-3216	28	10	years	year	NOUN
easat-3216	28	11	.	.	PUNCT
easat-3216	29	1	for	for	ADP
easat-3216	29	2	decades	decade	NOUN
easat-3216	29	3	,	,	PUNCT
easat-3216	29	4	the	the	DET
easat-3216	29	5	prediction	prediction	NOUN
easat-3216	29	6	appeared	appear	VERB
easat-3216	29	7	to	to	PART
easat-3216	29	8	be	be	AUX
easat-3216	29	9	valid	valid	ADJ
easat-3216	29	10	.	.	PUNCT
easat-3216	30	1	recently	recently	ADV
easat-3216	30	2	,	,	PUNCT
easat-3216	30	3	a	a	DET
easat-3216	30	4	debate	debate	NOUN
easat-3216	30	5	has	have	AUX
easat-3216	30	6	started	start	VERB
easat-3216	30	7	on	on	ADP
easat-3216	30	8	its	its	PRON
easat-3216	30	9	validity	validity	NOUN
easat-3216	30	10	where	where	SCONJ
easat-3216	30	11	both	both	DET
easat-3216	30	12	sides	side	NOUN
easat-3216	30	13	of	of	ADP
easat-3216	30	14	the	the	DET
easat-3216	30	15	argument	argument	NOUN
easat-3216	30	16	have	have	AUX
easat-3216	30	17	presented	present	VERB
easat-3216	30	18	their	their	PRON
easat-3216	30	19	reasoning	reasoning	NOUN
easat-3216	30	20	[	[	X
easat-3216	30	21	2	2	NUM
easat-3216	30	22	]	]	PUNCT
easat-3216	30	23	,	,	PUNCT
easat-3216	30	24	[	[	X
easat-3216	30	25	3	3	NUM
easat-3216	30	26	]	]	PUNCT
easat-3216	30	27	,	,	PUNCT
easat-3216	30	28	[	[	X
easat-3216	30	29	4	4	NUM
easat-3216	30	30	]	]	PUNCT
easat-3216	30	31	,	,	PUNCT
easat-3216	30	32	[	[	X
easat-3216	30	33	5	5	NUM
easat-3216	30	34	]	]	PUNCT
easat-3216	30	35	.	.	PUNCT
easat-3216	31	1	the	the	DET
easat-3216	31	2	growth	growth	NOUN
easat-3216	31	3	of	of	ADP
easat-3216	31	4	integrated	integrate	VERB
easat-3216	31	5	electronics	electronic	NOUN
easat-3216	31	6	has	have	AUX
easat-3216	31	7	impacted	impact	VERB
easat-3216	31	8	human	human	ADJ
easat-3216	31	9	lives	life	NOUN
easat-3216	31	10	in	in	ADP
easat-3216	31	11	unprecedented	unprecedented	ADJ
easat-3216	31	12	ways	way	NOUN
easat-3216	31	13	.	.	PUNCT
easat-3216	32	1	at	at	ADP
easat-3216	32	2	this	this	DET
easat-3216	32	3	point	point	NOUN
easat-3216	32	4	,	,	PUNCT
easat-3216	32	5	as	as	SCONJ
easat-3216	32	6	the	the	DET
easat-3216	32	7	significance	significance	NOUN
easat-3216	32	8	of	of	ADP
easat-3216	32	9	moore	moore	PROPN
easat-3216	32	10	’s	’s	PART
easat-3216	32	11	law	law	NOUN
easat-3216	32	12	seems	seem	VERB
easat-3216	32	13	to	to	PART
easat-3216	32	14	dwindle	dwindle	VERB
easat-3216	32	15	,	,	PUNCT
easat-3216	32	16	it	it	PRON
easat-3216	32	17	is	be	AUX
easat-3216	32	18	important	important	ADJ
easat-3216	32	19	to	to	PART
easat-3216	32	20	rethink	rethink	VERB
easat-3216	32	21	the	the	DET
easat-3216	32	22	future	future	ADJ
easat-3216	32	23	growth	growth	NOUN
easat-3216	32	24	of	of	ADP
easat-3216	32	25	integrated	integrated	ADJ
easat-3216	32	26	devices	device	NOUN
easat-3216	32	27	.	.	PUNCT
easat-3216	33	1	one	one	NUM
easat-3216	33	2	answer	answer	NOUN
easat-3216	33	3	is	be	AUX
easat-3216	33	4	the	the	DET
easat-3216	33	5	emerging	emerge	VERB
easat-3216	33	6	field	field	NOUN
easat-3216	33	7	of	of	ADP
easat-3216	33	8	silicon	silicon	NOUN
easat-3216	33	9	photonics	photonic	NOUN
easat-3216	33	10	.	.	PUNCT
easat-3216	34	1	around	around	ADP
easat-3216	34	2	the	the	DET
easat-3216	34	3	same	same	ADJ
easat-3216	34	4	time	time	NOUN
easat-3216	34	5	as	as	ADP
easat-3216	34	6	moore	moore	PROPN
easat-3216	34	7	,	,	PUNCT
easat-3216	34	8	miller	miller	PROPN
easat-3216	34	9	proposed	propose	VERB
easat-3216	34	10	the	the	DET
easat-3216	34	11	idea	idea	NOUN
easat-3216	34	12	of	of	ADP
easat-3216	34	13	miniaturized	miniaturize	VERB
easat-3216	34	14	optical	optical	ADJ
easat-3216	34	15	circuitry	circuitry	NOUN
easat-3216	34	16	,	,	PUNCT
easat-3216	34	17	which	which	PRON
easat-3216	34	18	has	have	AUX
easat-3216	34	19	been	be	AUX
easat-3216	34	20	actualized	actualize	VERB
easat-3216	34	21	today	today	NOUN
easat-3216	34	22	[	[	X
easat-3216	34	23	6	6	NUM
easat-3216	34	24	]	]	PUNCT
easat-3216	34	25	.	.	PUNCT
easat-3216	35	1	just	just	ADV
easat-3216	35	2	like	like	ADP
easat-3216	35	3	integrated	integrated	ADJ
easat-3216	35	4	electronic	electronic	ADJ
easat-3216	35	5	circuits	circuit	NOUN
easat-3216	35	6	drive	drive	VERB
easat-3216	35	7	current	current	ADJ
easat-3216	35	8	around	around	ADP
easat-3216	35	9	a	a	DET
easat-3216	35	10	silicon	silicon	NOUN
easat-3216	35	11	chip	chip	NOUN
easat-3216	35	12	,	,	PUNCT
easat-3216	35	13	photonic	photonic	ADJ
easat-3216	35	14	circuits	circuit	NOUN
easat-3216	35	15	drive	drive	VERB
easat-3216	35	16	light	light	NOUN
easat-3216	35	17	.	.	PUNCT
easat-3216	36	1	the	the	DET
easat-3216	36	2	relevance	relevance	NOUN
easat-3216	36	3	of	of	ADP
easat-3216	36	4	silicon	silicon	NOUN
easat-3216	36	5	photonics	photonic	NOUN
easat-3216	36	6	is	be	AUX
easat-3216	36	7	paramount	paramount	ADJ
easat-3216	36	8	,	,	PUNCT
easat-3216	36	9	especially	especially	ADV
easat-3216	36	10	as	as	SCONJ
easat-3216	36	11	limitations	limitation	NOUN
easat-3216	36	12	of	of	ADP
easat-3216	36	13	silicon	silicon	NOUN
easat-3216	36	14	electronics	electronic	NOUN
easat-3216	36	15	start	start	VERB
easat-3216	36	16	to	to	PART
easat-3216	36	17	become	become	VERB
easat-3216	36	18	prominent	prominent	ADJ
easat-3216	36	19	.	.	PUNCT
easat-3216	37	1	nanophotonics	nanophotonic	NOUN
easat-3216	37	2	has	have	VERB
easat-3216	37	3	natural	natural	ADJ
easat-3216	37	4	superiority	superiority	NOUN
easat-3216	37	5	over	over	ADP
easat-3216	37	6	nanoelectronics	nanoelectronic	NOUN
easat-3216	37	7	because	because	SCONJ
easat-3216	37	8	of	of	ADP
easat-3216	37	9	the	the	DET
easat-3216	37	10	higher	high	ADJ
easat-3216	37	11	speed	speed	NOUN
easat-3216	37	12	of	of	ADP
easat-3216	37	13	light	light	NOUN
easat-3216	37	14	,	,	PUNCT
easat-3216	37	15	enabling	enable	VERB
easat-3216	37	16	faster	fast	ADJ
easat-3216	37	17	systems	system	NOUN
easat-3216	37	18	.	.	PUNCT
easat-3216	38	1	a	a	DET
easat-3216	38	2	silicon	silicon	NOUN
easat-3216	38	3	photonic	photonic	ADJ
easat-3216	38	4	integrated	integrate	VERB
easat-3216	38	5	circuit	circuit	NOUN
easat-3216	38	6	(	(	PUNCT
easat-3216	38	7	pic	pic	NOUN
easat-3216	38	8	)	)	PUNCT
easat-3216	38	9	is	be	AUX
easat-3216	38	10	also	also	ADV
easat-3216	38	11	more	more	ADV
easat-3216	38	12	resilient	resilient	ADJ
easat-3216	38	13	to	to	PART
easat-3216	38	14	crosstalk	crosstalk	VERB
easat-3216	38	15	compared	compare	VERB
easat-3216	38	16	to	to	ADP
easat-3216	38	17	an	an	DET
easat-3216	38	18	electronic	electronic	ADJ
easat-3216	38	19	circuit	circuit	NOUN
easat-3216	38	20	.	.	PUNCT
easat-3216	39	1	5491	5491	NUM
easat-3216	39	2	edelweiss	edelweiss	PROPN
easat-3216	39	3	applied	apply	VERB
easat-3216	39	4	science	science	NOUN
easat-3216	39	5	and	and	CCONJ
easat-3216	39	6	technology	technology	NOUN
easat-3216	39	7	issn	issn	PROPN
easat-3216	39	8	:	:	PUNCT
easat-3216	39	9	2576	2576	NUM
easat-3216	39	10	-	-	SYM
easat-3216	39	11	8484	8484	NUM
easat-3216	39	12	vol	vol	NOUN
easat-3216	39	13	.	.	PROPN
easat-3216	39	14	8	8	NUM
easat-3216	39	15	,	,	PUNCT
easat-3216	39	16	no	no	INTJ
easat-3216	39	17	.	.	NOUN
easat-3216	40	1	6	6	NUM
easat-3216	40	2	:	:	SYM
easat-3216	40	3	5490	5490	NUM
easat-3216	40	4	-	-	SYM
easat-3216	40	5	5501	5501	NUM
easat-3216	40	6	,	,	PUNCT
easat-3216	40	7	2024	2024	NUM
easat-3216	40	8	doi	doi	NOUN
easat-3216	40	9	:	:	PUNCT
easat-3216	40	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	40	11	©	©	PROPN
easat-3216	40	12	2024	2024	NUM
easat-3216	40	13	by	by	ADP
easat-3216	40	14	the	the	DET
easat-3216	40	15	authors	author	NOUN
easat-3216	40	16	;	;	PUNCT
easat-3216	40	17	licensee	licensee	PROPN
easat-3216	40	18	learning	learning	NOUN
easat-3216	40	19	gate	gate	VERB
easat-3216	40	20	a	a	DET
easat-3216	40	21	major	major	ADJ
easat-3216	40	22	challenge	challenge	NOUN
easat-3216	40	23	faced	face	VERB
easat-3216	40	24	by	by	ADP
easat-3216	40	25	electronic	electronic	ADJ
easat-3216	40	26	chips	chip	NOUN
easat-3216	40	27	is	be	AUX
easat-3216	40	28	heating	heat	VERB
easat-3216	40	29	and	and	CCONJ
easat-3216	40	30	power	power	NOUN
easat-3216	40	31	dissipation	dissipation	NOUN
easat-3216	40	32	,	,	PUNCT
easat-3216	40	33	which	which	PRON
easat-3216	40	34	is	be	AUX
easat-3216	40	35	not	not	PART
easat-3216	40	36	experienced	experience	VERB
easat-3216	40	37	by	by	ADP
easat-3216	40	38	circuits	circuit	NOUN
easat-3216	40	39	operating	operate	VERB
easat-3216	40	40	on	on	ADP
easat-3216	40	41	light	light	NOUN
easat-3216	40	42	.	.	PUNCT
easat-3216	41	1	having	having	AUX
easat-3216	41	2	mentioned	mention	VERB
easat-3216	41	3	the	the	DET
easat-3216	41	4	pros	pro	NOUN
easat-3216	41	5	,	,	PUNCT
easat-3216	41	6	it	it	PRON
easat-3216	41	7	is	be	AUX
easat-3216	41	8	also	also	ADV
easat-3216	41	9	important	important	ADJ
easat-3216	41	10	to	to	PART
easat-3216	41	11	note	note	VERB
easat-3216	41	12	the	the	DET
easat-3216	41	13	cons	con	NOUN
easat-3216	41	14	of	of	ADP
easat-3216	41	15	photonic	photonic	ADJ
easat-3216	41	16	circuits	circuit	NOUN
easat-3216	41	17	.	.	PUNCT
easat-3216	42	1	silicon	silicon	NOUN
easat-3216	42	2	is	be	AUX
easat-3216	42	3	not	not	PART
easat-3216	42	4	the	the	DET
easat-3216	42	5	optimal	optimal	ADJ
easat-3216	42	6	material	material	NOUN
easat-3216	42	7	for	for	ADP
easat-3216	42	8	guiding	guide	VERB
easat-3216	42	9	light	light	NOUN
easat-3216	42	10	on	on	ADP
easat-3216	42	11	a	a	DET
easat-3216	42	12	chip	chip	NOUN
easat-3216	42	13	.	.	PUNCT
easat-3216	43	1	it	it	PRON
easat-3216	43	2	has	have	AUX
easat-3216	43	3	long	long	ADV
easat-3216	43	4	been	be	AUX
easat-3216	43	5	used	use	VERB
easat-3216	43	6	in	in	ADP
easat-3216	43	7	electronic	electronic	ADJ
easat-3216	43	8	chips	chip	NOUN
easat-3216	43	9	.	.	PUNCT
easat-3216	44	1	the	the	DET
easat-3216	44	2	semiconductor	semiconductor	NOUN
easat-3216	44	3	processes	process	NOUN
easat-3216	44	4	for	for	ADP
easat-3216	44	5	microelectronics	microelectronic	NOUN
easat-3216	44	6	fabrication	fabrication	NOUN
easat-3216	44	7	are	be	AUX
easat-3216	44	8	well	well	ADV
easat-3216	44	9	developed	develop	VERB
easat-3216	44	10	.	.	PUNCT
easat-3216	45	1	same	same	ADJ
easat-3216	45	2	processes	process	NOUN
easat-3216	45	3	can	can	AUX
easat-3216	45	4	be	be	AUX
easat-3216	45	5	used	use	VERB
easat-3216	45	6	for	for	ADP
easat-3216	45	7	the	the	DET
easat-3216	45	8	fabrication	fabrication	NOUN
easat-3216	45	9	of	of	ADP
easat-3216	45	10	photonic	photonic	ADJ
easat-3216	45	11	chips	chip	NOUN
easat-3216	45	12	,	,	PUNCT
easat-3216	45	13	which	which	PRON
easat-3216	45	14	is	be	AUX
easat-3216	45	15	the	the	DET
easat-3216	45	16	reason	reason	NOUN
easat-3216	45	17	silicon	silicon	NOUN
easat-3216	45	18	has	have	AUX
easat-3216	45	19	been	be	AUX
easat-3216	45	20	commonly	commonly	ADV
easat-3216	45	21	employed	employ	VERB
easat-3216	45	22	for	for	ADP
easat-3216	45	23	optical	optical	ADJ
easat-3216	45	24	circuits	circuit	NOUN
easat-3216	45	25	.	.	PUNCT
easat-3216	46	1	other	other	ADJ
easat-3216	46	2	challenges	challenge	NOUN
easat-3216	46	3	include	include	VERB
easat-3216	46	4	coupling	couple	VERB
easat-3216	46	5	between	between	ADP
easat-3216	46	6	optical	optical	ADJ
easat-3216	46	7	fiber	fiber	NOUN
easat-3216	46	8	and	and	CCONJ
easat-3216	46	9	photonic	photonic	ADJ
easat-3216	46	10	waveguide	waveguide	NOUN
easat-3216	46	11	,	,	PUNCT
easat-3216	46	12	high	high	ADJ
easat-3216	46	13	speed	speed	NOUN
easat-3216	46	14	modulators/	modulators/	NUM
easat-3216	46	15	detectors	detector	NOUN
easat-3216	46	16	and	and	CCONJ
easat-3216	46	17	on	on	ADP
easat-3216	46	18	-	-	PUNCT
easat-3216	46	19	chip	chip	NOUN
easat-3216	46	20	light	light	NOUN
easat-3216	46	21	sources	source	NOUN
easat-3216	46	22	.	.	PUNCT
easat-3216	47	1	hence	hence	ADV
easat-3216	47	2	,	,	PUNCT
easat-3216	47	3	the	the	DET
easat-3216	47	4	study	study	NOUN
easat-3216	47	5	of	of	ADP
easat-3216	47	6	pics	pic	NOUN
easat-3216	47	7	becomes	become	VERB
easat-3216	47	8	imperative	imperative	ADJ
easat-3216	47	9	for	for	ADP
easat-3216	47	10	future	future	ADJ
easat-3216	47	11	growth	growth	NOUN
easat-3216	47	12	of	of	ADP
easat-3216	47	13	semiconductor	semiconductor	NOUN
easat-3216	47	14	industry	industry	NOUN
easat-3216	47	15	[	[	X
easat-3216	47	16	7	7	NUM
easat-3216	47	17	]	]	PUNCT
easat-3216	47	18	,	,	PUNCT
easat-3216	47	19	[	[	X
easat-3216	47	20	8	8	NUM
easat-3216	47	21	]	]	PUNCT
easat-3216	47	22	,	,	PUNCT
easat-3216	47	23	[	[	X
easat-3216	47	24	9	9	NUM
easat-3216	47	25	]	]	PUNCT
easat-3216	47	26	.	.	PUNCT
easat-3216	48	1	the	the	DET
easat-3216	48	2	components	component	NOUN
easat-3216	48	3	on	on	ADP
easat-3216	48	4	a	a	DET
easat-3216	48	5	silicon	silicon	NOUN
easat-3216	48	6	photonic	photonic	NOUN
easat-3216	48	7	chip	chip	NOUN
easat-3216	48	8	can	can	AUX
easat-3216	48	9	mainly	mainly	ADV
easat-3216	48	10	be	be	AUX
easat-3216	48	11	of	of	ADP
easat-3216	48	12	two	two	NUM
easat-3216	48	13	types	type	NOUN
easat-3216	48	14	:	:	PUNCT
easat-3216	48	15	passive	passive	ADJ
easat-3216	48	16	and	and	CCONJ
easat-3216	48	17	active	active	ADJ
easat-3216	48	18	.	.	PUNCT
easat-3216	49	1	passive	passive	ADJ
easat-3216	49	2	components	component	NOUN
easat-3216	49	3	are	be	AUX
easat-3216	49	4	used	use	VERB
easat-3216	49	5	for	for	ADP
easat-3216	49	6	channeling	channel	VERB
easat-3216	49	7	light	light	NOUN
easat-3216	49	8	on	on	ADP
easat-3216	49	9	the	the	DET
easat-3216	49	10	semiconductor	semiconductor	NOUN
easat-3216	49	11	chip	chip	NOUN
easat-3216	49	12	.	.	PUNCT
easat-3216	50	1	examples	example	NOUN
easat-3216	50	2	include	include	VERB
easat-3216	50	3	waveguides	waveguide	NOUN
easat-3216	50	4	,	,	PUNCT
easat-3216	50	5	directional	directional	ADJ
easat-3216	50	6	couplers	coupler	NOUN
easat-3216	50	7	and	and	CCONJ
easat-3216	50	8	y	y	NOUN
easat-3216	50	9	-	-	PUNCT
easat-3216	50	10	branch	branch	NOUN
easat-3216	50	11	splitters	splitter	NOUN
easat-3216	50	12	.	.	PUNCT
easat-3216	51	1	on	on	ADP
easat-3216	51	2	the	the	DET
easat-3216	51	3	other	other	ADJ
easat-3216	51	4	hand	hand	NOUN
easat-3216	51	5	,	,	PUNCT
easat-3216	51	6	active	active	ADJ
easat-3216	51	7	components	component	NOUN
easat-3216	51	8	are	be	AUX
easat-3216	51	9	involved	involve	VERB
easat-3216	51	10	in	in	ADP
easat-3216	51	11	the	the	DET
easat-3216	51	12	generation	generation	NOUN
easat-3216	51	13	and	and	CCONJ
easat-3216	51	14	sensing	sensing	NOUN
easat-3216	51	15	of	of	ADP
easat-3216	51	16	light	light	NOUN
easat-3216	51	17	.	.	PUNCT
easat-3216	52	1	they	they	PRON
easat-3216	52	2	may	may	AUX
easat-3216	52	3	also	also	ADV
easat-3216	52	4	incorporate	incorporate	VERB
easat-3216	52	5	electrical	electrical	ADJ
easat-3216	52	6	and	and	CCONJ
easat-3216	52	7	thermal	thermal	ADJ
easat-3216	52	8	tuning	tuning	NOUN
easat-3216	52	9	effects	effect	NOUN
easat-3216	52	10	.	.	PUNCT
easat-3216	53	1	modulators	modulator	NOUN
easat-3216	53	2	,	,	PUNCT
easat-3216	53	3	detectors	detector	NOUN
easat-3216	53	4	and	and	CCONJ
easat-3216	53	5	lasers	laser	NOUN
easat-3216	53	6	are	be	AUX
easat-3216	53	7	considered	consider	VERB
easat-3216	53	8	as	as	ADP
easat-3216	53	9	active	active	ADJ
easat-3216	53	10	components	component	NOUN
easat-3216	53	11	.	.	PUNCT
easat-3216	54	1	the	the	DET
easat-3216	54	2	work	work	NOUN
easat-3216	54	3	presented	present	VERB
easat-3216	54	4	in	in	ADP
easat-3216	54	5	this	this	DET
easat-3216	54	6	paper	paper	NOUN
easat-3216	54	7	employs	employ	VERB
easat-3216	54	8	passive	passive	ADJ
easat-3216	54	9	components	component	NOUN
easat-3216	54	10	on	on	ADP
easat-3216	54	11	the	the	DET
easat-3216	54	12	chip	chip	NOUN
easat-3216	54	13	only	only	ADV
easat-3216	54	14	.	.	PUNCT
easat-3216	55	1	the	the	DET
easat-3216	55	2	active	active	ADJ
easat-3216	55	3	laser	laser	NOUN
easat-3216	55	4	source	source	NOUN
easat-3216	55	5	is	be	AUX
easat-3216	55	6	not	not	PART
easat-3216	55	7	built	build	VERB
easat-3216	55	8	onto	onto	ADP
easat-3216	55	9	the	the	DET
easat-3216	55	10	wafer	wafer	NOUN
easat-3216	55	11	[	[	X
easat-3216	55	12	10	10	NUM
easat-3216	55	13	]	]	PUNCT
easat-3216	55	14	,	,	PUNCT
easat-3216	55	15	[	[	X
easat-3216	55	16	11	11	NUM
easat-3216	55	17	]	]	PUNCT
easat-3216	55	18	.	.	PUNCT
easat-3216	56	1	in	in	ADP
easat-3216	56	2	this	this	DET
easat-3216	56	3	paper	paper	NOUN
easat-3216	56	4	,	,	PUNCT
easat-3216	56	5	mach	mach	ADJ
easat-3216	56	6	-	-	PUNCT
easat-3216	56	7	zehnder	zehnder	NOUN
easat-3216	56	8	interferometer	interferometer	NOUN
easat-3216	56	9	(	(	PUNCT
easat-3216	56	10	mzi	mzi	NOUN
easat-3216	56	11	)	)	PUNCT
easat-3216	56	12	designs	design	NOUN
easat-3216	56	13	have	have	AUX
easat-3216	56	14	been	be	AUX
easat-3216	56	15	implemented	implement	VERB
easat-3216	56	16	on	on	ADP
easat-3216	56	17	a	a	DET
easat-3216	56	18	silicon	silicon	NOUN
easat-3216	56	19	on	on	ADP
easat-3216	56	20	insulator	insulator	NOUN
easat-3216	56	21	(	(	PUNCT
easat-3216	56	22	soi	soi	ADJ
easat-3216	56	23	)	)	PUNCT
easat-3216	56	24	wafer	wafer	NOUN
easat-3216	56	25	.	.	PUNCT
easat-3216	57	1	four	four	NUM
easat-3216	57	2	new	new	ADJ
easat-3216	57	3	variants	variant	NOUN
easat-3216	57	4	of	of	ADP
easat-3216	57	5	unbalanced	unbalanced	ADJ
easat-3216	57	6	interferometer	interferometer	NOUN
easat-3216	57	7	circuits	circuit	NOUN
easat-3216	57	8	have	have	AUX
easat-3216	57	9	been	be	AUX
easat-3216	57	10	designed	design	VERB
easat-3216	57	11	,	,	PUNCT
easat-3216	57	12	simulated	simulate	VERB
easat-3216	57	13	and	and	CCONJ
easat-3216	57	14	fabricated	fabricate	VERB
easat-3216	57	15	.	.	PUNCT
easat-3216	58	1	the	the	DET
easat-3216	58	2	design	design	NOUN
easat-3216	58	3	procedure	procedure	NOUN
easat-3216	58	4	has	have	AUX
easat-3216	58	5	been	be	AUX
easat-3216	58	6	carried	carry	VERB
easat-3216	58	7	out	out	ADP
easat-3216	58	8	in	in	ADP
easat-3216	58	9	klayout	klayout	NOUN
easat-3216	58	10	while	while	SCONJ
easat-3216	58	11	simulations	simulation	NOUN
easat-3216	58	12	have	have	AUX
easat-3216	58	13	been	be	AUX
easat-3216	58	14	done	do	VERB
easat-3216	58	15	in	in	ADP
easat-3216	58	16	ansys	ansys	PROPN
easat-3216	58	17	lumerical	lumerical	PROPN
easat-3216	58	18	.	.	PUNCT
easat-3216	59	1	matlab	matlab	PROPN
easat-3216	59	2	has	have	AUX
easat-3216	59	3	been	be	AUX
easat-3216	59	4	used	use	VERB
easat-3216	59	5	to	to	PART
easat-3216	59	6	study	study	VERB
easat-3216	59	7	propagation	propagation	NOUN
easat-3216	59	8	characteristics	characteristic	NOUN
easat-3216	59	9	of	of	ADP
easat-3216	59	10	the	the	DET
easat-3216	59	11	waveguides	waveguide	NOUN
easat-3216	59	12	.	.	PUNCT
easat-3216	60	1	to	to	PART
easat-3216	60	2	model	model	NOUN
easat-3216	60	3	waveguides	waveguide	NOUN
easat-3216	60	4	,	,	PUNCT
easat-3216	60	5	the	the	DET
easat-3216	60	6	effective	effective	ADJ
easat-3216	60	7	index	index	NOUN
easat-3216	60	8	method	method	NOUN
easat-3216	60	9	(	(	PUNCT
easat-3216	60	10	eim	eim	PROPN
easat-3216	60	11	)	)	PUNCT
easat-3216	60	12	has	have	AUX
easat-3216	60	13	been	be	AUX
easat-3216	60	14	employed	employ	VERB
easat-3216	60	15	.	.	PUNCT
easat-3216	61	1	the	the	DET
easat-3216	61	2	proposed	propose	VERB
easat-3216	61	3	designs	design	NOUN
easat-3216	61	4	have	have	AUX
easat-3216	61	5	been	be	AUX
easat-3216	61	6	fabricated	fabricate	VERB
easat-3216	61	7	at	at	ADP
easat-3216	61	8	applied	apply	VERB
easat-3216	61	9	nanotools	nanotools	PROPN
easat-3216	61	10	inc	inc	PROPN
easat-3216	61	11	.	.	PROPN
easat-3216	61	12	through	through	ADP
easat-3216	61	13	electron	electron	NOUN
easat-3216	61	14	beam	beam	NOUN
easat-3216	61	15	lithography	lithography	NOUN
easat-3216	61	16	(	(	PUNCT
easat-3216	61	17	ebl	ebl	PROPN
easat-3216	61	18	)	)	PUNCT
easat-3216	61	19	.	.	PUNCT
easat-3216	62	1	simulation	simulation	NOUN
easat-3216	62	2	and	and	CCONJ
easat-3216	62	3	experimental	experimental	ADJ
easat-3216	62	4	results	result	NOUN
easat-3216	62	5	have	have	AUX
easat-3216	62	6	been	be	AUX
easat-3216	62	7	presented	present	VERB
easat-3216	62	8	for	for	ADP
easat-3216	62	9	comparison	comparison	NOUN
easat-3216	62	10	.	.	PUNCT
easat-3216	63	1	pics	pic	NOUN
easat-3216	63	2	hold	hold	VERB
easat-3216	63	3	a	a	DET
easat-3216	63	4	lot	lot	NOUN
easat-3216	63	5	of	of	ADP
easat-3216	63	6	promise	promise	NOUN
easat-3216	63	7	in	in	ADP
easat-3216	63	8	cutting	cut	VERB
easat-3216	63	9	-	-	PUNCT
easat-3216	63	10	edge	edge	NOUN
easat-3216	63	11	technologies	technology	NOUN
easat-3216	63	12	and	and	CCONJ
easat-3216	63	13	applications	application	NOUN
easat-3216	63	14	like	like	ADP
easat-3216	63	15	biomedical	biomedical	ADJ
easat-3216	63	16	sensors	sensor	NOUN
easat-3216	63	17	,	,	PUNCT
easat-3216	63	18	optical	optical	ADJ
easat-3216	63	19	communications	communication	NOUN
easat-3216	63	20	,	,	PUNCT
easat-3216	63	21	computing	computing	NOUN
easat-3216	63	22	,	,	PUNCT
easat-3216	63	23	quantum	quantum	NOUN
easat-3216	63	24	optics	optic	NOUN
easat-3216	63	25	and	and	CCONJ
easat-3216	63	26	artificial	artificial	ADJ
easat-3216	63	27	intelligence	intelligence	NOUN
easat-3216	63	28	(	(	PUNCT
easat-3216	63	29	ai	ai	NOUN
easat-3216	63	30	)	)	PUNCT
easat-3216	63	31	.	.	PUNCT
easat-3216	64	1	2	2	X
easat-3216	64	2	.	.	X
easat-3216	64	3	theory	theory	NOUN
easat-3216	64	4	,	,	PUNCT
easat-3216	64	5	design	design	NOUN
easat-3216	64	6	and	and	CCONJ
easat-3216	64	7	analysis	analysis	NOUN
easat-3216	64	8	2.1	2.1	NUM
easat-3216	64	9	.	.	PUNCT
easat-3216	65	1	waveguide	waveguide	VERB
easat-3216	65	2	modeling	model	VERB
easat-3216	65	3	the	the	DET
easat-3216	65	4	chip	chip	NOUN
easat-3216	65	5	has	have	AUX
easat-3216	65	6	been	be	AUX
easat-3216	65	7	implemented	implement	VERB
easat-3216	65	8	on	on	ADP
easat-3216	65	9	a	a	DET
easat-3216	65	10	silicon	silicon	NOUN
easat-3216	65	11	on	on	ADP
easat-3216	65	12	insulator	insulator	NOUN
easat-3216	65	13	(	(	PUNCT
easat-3216	65	14	soi	soi	ADJ
easat-3216	65	15	)	)	PUNCT
easat-3216	65	16	wafer	wafer	NOUN
easat-3216	65	17	for	for	ADP
easat-3216	65	18	transverse	transverse	NOUN
easat-3216	65	19	electric	electric	ADJ
easat-3216	65	20	(	(	PUNCT
easat-3216	65	21	te	te	PROPN
easat-3216	65	22	)	)	PUNCT
easat-3216	65	23	modes	mode	NOUN
easat-3216	65	24	[	[	X
easat-3216	65	25	12	12	NUM
easat-3216	65	26	]	]	PUNCT
easat-3216	65	27	,	,	PUNCT
easat-3216	65	28	[	[	X
easat-3216	65	29	13	13	NUM
easat-3216	65	30	]	]	PUNCT
easat-3216	65	31	,	,	PUNCT
easat-3216	65	32	[	[	X
easat-3216	65	33	14	14	NUM
easat-3216	65	34	]	]	PUNCT
easat-3216	65	35	.	.	PUNCT
easat-3216	66	1	to	to	PART
easat-3216	66	2	route	route	VERB
easat-3216	66	3	light	light	NOUN
easat-3216	66	4	around	around	ADP
easat-3216	66	5	the	the	DET
easat-3216	66	6	semiconductor	semiconductor	NOUN
easat-3216	66	7	chip	chip	NOUN
easat-3216	66	8	,	,	PUNCT
easat-3216	66	9	a	a	DET
easat-3216	66	10	three	three	NUM
easat-3216	66	11	-	-	PUNCT
easat-3216	66	12	layered	layered	ADJ
easat-3216	66	13	waveguide	waveguide	NOUN
easat-3216	66	14	has	have	AUX
easat-3216	66	15	been	be	AUX
easat-3216	66	16	chosen	choose	VERB
easat-3216	66	17	as	as	SCONJ
easat-3216	66	18	shown	show	VERB
easat-3216	66	19	in	in	ADP
easat-3216	66	20	figure	figure	NOUN
easat-3216	66	21	1	1	NUM
easat-3216	66	22	.	.	PUNCT
easat-3216	67	1	the	the	DET
easat-3216	67	2	waveguide	waveguide	ADJ
easat-3216	67	3	consists	consist	NOUN
easat-3216	67	4	of	of	ADP
easat-3216	67	5	a	a	DET
easat-3216	67	6	layer	layer	NOUN
easat-3216	67	7	of	of	ADP
easat-3216	67	8	silicon	silicon	NOUN
easat-3216	67	9	(	(	PUNCT
easat-3216	67	10	si	si	X
easat-3216	67	11	)	)	PUNCT
easat-3216	67	12	sandwiched	sandwich	VERB
easat-3216	67	13	between	between	ADP
easat-3216	67	14	silicon	silicon	NOUN
easat-3216	67	15	dioxide	dioxide	NOUN
easat-3216	67	16	(	(	PUNCT
easat-3216	67	17	sio2	sio2	PROPN
easat-3216	67	18	)	)	PUNCT
easat-3216	67	19	.	.	PUNCT
easat-3216	68	1	the	the	DET
easat-3216	68	2	silicon	silicon	NOUN
easat-3216	68	3	waveguide	waveguide	NOUN
easat-3216	68	4	has	have	VERB
easat-3216	68	5	a	a	DET
easat-3216	68	6	thickness	thickness	NOUN
easat-3216	68	7	of	of	ADP
easat-3216	68	8	220	220	NUM
easat-3216	68	9	nm	nm	NOUN
easat-3216	68	10	.	.	PUNCT
easat-3216	69	1	silicon	silicon	NOUN
easat-3216	69	2	wafer	wafer	NOUN
easat-3216	69	3	substrate	substrate	NOUN
easat-3216	69	4	and	and	CCONJ
easat-3216	69	5	buried	bury	VERB
easat-3216	69	6	oxide	oxide	NOUN
easat-3216	69	7	have	have	VERB
easat-3216	69	8	approximate	approximate	ADJ
easat-3216	69	9	thicknesses	thickness	NOUN
easat-3216	69	10	of	of	ADP
easat-3216	69	11	700μm	700μm	NOUN
easat-3216	69	12	and	and	CCONJ
easat-3216	69	13	2μm	2μm	NOUN
easat-3216	69	14	,	,	PUNCT
easat-3216	69	15	respectively	respectively	ADV
easat-3216	69	16	.	.	PUNCT
easat-3216	70	1	the	the	DET
easat-3216	70	2	waveguide	waveguide	NOUN
easat-3216	70	3	is	be	AUX
easat-3216	70	4	500	500	NUM
easat-3216	70	5	nm	nm	ADV
easat-3216	70	6	wide	wide	ADV
easat-3216	70	7	.	.	PUNCT
easat-3216	71	1	in	in	ADP
easat-3216	71	2	simulations	simulation	NOUN
easat-3216	71	3	,	,	PUNCT
easat-3216	71	4	there	there	PRON
easat-3216	71	5	are	be	VERB
easat-3216	71	6	different	different	ADJ
easat-3216	71	7	models	model	NOUN
easat-3216	71	8	that	that	PRON
easat-3216	71	9	can	can	AUX
easat-3216	71	10	be	be	AUX
easat-3216	71	11	employed	employ	VERB
easat-3216	71	12	for	for	ADP
easat-3216	71	13	modeling	model	VERB
easat-3216	71	14	the	the	DET
easat-3216	71	15	refractive	refractive	ADJ
easat-3216	71	16	index	index	NOUN
easat-3216	71	17	(	(	PUNCT
easat-3216	71	18	n	n	CCONJ
easat-3216	71	19	)	)	PUNCT
easat-3216	71	20	of	of	ADP
easat-3216	71	21	si	si	PROPN
easat-3216	71	22	.	.	PUNCT
easat-3216	72	1	the	the	DET
easat-3216	72	2	simulation	simulation	NOUN
easat-3216	72	3	work	work	NOUN
easat-3216	72	4	reported	report	VERB
easat-3216	72	5	in	in	ADP
easat-3216	72	6	this	this	DET
easat-3216	72	7	paper	paper	NOUN
easat-3216	72	8	uses	use	VERB
easat-3216	72	9	the	the	DET
easat-3216	72	10	lorentz	lorentz	PROPN
easat-3216	72	11	model	model	NOUN
easat-3216	72	12	given	give	VERB
easat-3216	72	13	below	below	ADP
easat-3216	72	14	where	where	SCONJ
easat-3216	72	15	𝜀	𝜀	ADP
easat-3216	72	16	=	=	SYM
easat-3216	72	17	7.9874	7.9874	NUM
easat-3216	72	18	,	,	PUNCT
easat-3216	72	19	𝜀𝐿𝑜𝑟𝑒𝑛𝑡𝑧=	𝜀𝐿𝑜𝑟𝑒𝑛𝑡𝑧=	NOUN
easat-3216	72	20	3.6880	3.6880	NUM
easat-3216	72	21	and	and	CCONJ
easat-3216	72	22	𝜔𝑜=	𝜔𝑜=	VERB
easat-3216	72	23	3.9328	3.9328	NUM
easat-3216	72	24	x	x	SYM
easat-3216	72	25	1015	1015	NUM
easat-3216	72	26	.	.	PUNCT
easat-3216	73	1	𝑛	𝑛	NOUN
easat-3216	73	2	=	=	ADJ
easat-3216	73	3	√𝜀	√𝜀	NOUN
easat-3216	73	4	+	+	CCONJ
easat-3216	73	5	𝜀𝐿𝑜𝑟𝑒𝑛𝑡𝑧𝜔𝑜	𝜀𝐿𝑜𝑟𝑒𝑛𝑡𝑧𝜔𝑜	PROPN
easat-3216	73	6	2	2	NUM
easat-3216	73	7	𝜔𝑜	𝜔𝑜	NOUN
easat-3216	73	8	2−	2−	NUM
easat-3216	73	9	(	(	PUNCT
easat-3216	73	10	2𝜋𝑐	2𝜋𝑐	ADJ
easat-3216	73	11	𝜆	𝜆	X
easat-3216	73	12	)	)	PUNCT
easat-3216	73	13	2	2	NUM
easat-3216	73	14	(	(	PUNCT
easat-3216	73	15	1	1	NUM
easat-3216	73	16	)	)	PUNCT
easat-3216	73	17	5492	5492	NUM
easat-3216	73	18	edelweiss	edelweiss	PROPN
easat-3216	73	19	applied	apply	VERB
easat-3216	73	20	science	science	NOUN
easat-3216	73	21	and	and	CCONJ
easat-3216	73	22	technology	technology	NOUN
easat-3216	73	23	issn	issn	PROPN
easat-3216	73	24	:	:	PUNCT
easat-3216	73	25	2576	2576	NUM
easat-3216	73	26	-	-	SYM
easat-3216	73	27	8484	8484	NUM
easat-3216	73	28	vol	vol	NOUN
easat-3216	73	29	.	.	PROPN
easat-3216	73	30	8	8	NUM
easat-3216	73	31	,	,	PUNCT
easat-3216	73	32	no	no	INTJ
easat-3216	73	33	.	.	NOUN
easat-3216	74	1	6	6	NUM
easat-3216	74	2	:	:	SYM
easat-3216	74	3	5490	5490	NUM
easat-3216	74	4	-	-	SYM
easat-3216	74	5	5501	5501	NUM
easat-3216	74	6	,	,	PUNCT
easat-3216	74	7	2024	2024	NUM
easat-3216	74	8	doi	doi	NOUN
easat-3216	74	9	:	:	PUNCT
easat-3216	74	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	74	11	©	©	PROPN
easat-3216	74	12	2024	2024	NUM
easat-3216	74	13	by	by	ADP
easat-3216	74	14	the	the	DET
easat-3216	74	15	authors	author	NOUN
easat-3216	74	16	;	;	PUNCT
easat-3216	74	17	licensee	licensee	PROPN
easat-3216	74	18	learning	learn	VERB
easat-3216	74	19	gate	gate	NOUN
easat-3216	74	20	figure	figure	NOUN
easat-3216	74	21	1	1	NUM
easat-3216	74	22	.	.	PUNCT
easat-3216	75	1	(	(	PUNCT
easat-3216	75	2	a	a	X
easat-3216	75	3	)	)	PUNCT
easat-3216	75	4	three	three	NUM
easat-3216	75	5	-	-	PUNCT
easat-3216	75	6	layered	layer	VERB
easat-3216	75	7	waveguide	waveguide	ADJ
easat-3216	75	8	structure	structure	NOUN
easat-3216	75	9	.	.	PUNCT
easat-3216	76	1	(	(	PUNCT
easat-3216	76	2	b	b	X
easat-3216	76	3	)	)	PUNCT
easat-3216	76	4	normalized	normalize	VERB
easat-3216	76	5	electric	electric	ADJ
easat-3216	76	6	field	field	NOUN
easat-3216	76	7	(	(	PUNCT
easat-3216	76	8	v	v	NOUN
easat-3216	76	9	/	/	SYM
easat-3216	76	10	m	m	NOUN
easat-3216	76	11	)	)	PUNCT
easat-3216	76	12	distribution	distribution	NOUN
easat-3216	76	13	inside	inside	ADP
easat-3216	76	14	the	the	DET
easat-3216	76	15	waveguide	waveguide	NOUN
easat-3216	76	16	.	.	PUNCT
easat-3216	77	1	the	the	DET
easat-3216	77	2	field	field	NOUN
easat-3216	77	3	plot	plot	NOUN
easat-3216	77	4	in	in	ADP
easat-3216	77	5	figure	figure	NOUN
easat-3216	77	6	1	1	NUM
easat-3216	77	7	has	have	AUX
easat-3216	77	8	been	be	AUX
easat-3216	77	9	generated	generate	VERB
easat-3216	77	10	through	through	ADP
easat-3216	77	11	the	the	DET
easat-3216	77	12	effective	effective	ADJ
easat-3216	77	13	index	index	NOUN
easat-3216	77	14	method	method	NOUN
easat-3216	77	15	(	(	PUNCT
easat-3216	77	16	eim	eim	PROPN
easat-3216	77	17	)	)	PUNCT
easat-3216	77	18	.	.	PUNCT
easat-3216	78	1	eim	eim	PROPN
easat-3216	78	2	has	have	AUX
easat-3216	78	3	been	be	AUX
easat-3216	78	4	implemented	implement	VERB
easat-3216	78	5	in	in	ADP
easat-3216	78	6	matlab	matlab	PROPN
easat-3216	78	7	.	.	PUNCT
easat-3216	79	1	analytic	analytic	ADJ
easat-3216	79	2	calculations	calculation	NOUN
easat-3216	79	3	have	have	AUX
easat-3216	79	4	been	be	AUX
easat-3216	79	5	performed	perform	VERB
easat-3216	79	6	to	to	PART
easat-3216	79	7	find	find	VERB
easat-3216	79	8	the	the	DET
easat-3216	79	9	1d	1d	NUM
easat-3216	79	10	out	out	ADV
easat-3216	79	11	-	-	PUNCT
easat-3216	79	12	of	of	ADP
easat-3216	79	13	-	-	PUNCT
easat-3216	79	14	plane	plane	NOUN
easat-3216	79	15	transverse	transverse	NOUN
easat-3216	79	16	electric	electric	NOUN
easat-3216	79	17	(	(	PUNCT
easat-3216	79	18	te	te	PROPN
easat-3216	79	19	)	)	PUNCT
easat-3216	79	20	mode	mode	NOUN
easat-3216	79	21	effective	effective	ADJ
easat-3216	79	22	index	index	NOUN
easat-3216	79	23	.	.	PUNCT
easat-3216	80	1	similar	similar	ADJ
easat-3216	80	2	calculations	calculation	NOUN
easat-3216	80	3	provide	provide	VERB
easat-3216	80	4	1d	1d	NUM
easat-3216	80	5	in	in	ADP
easat-3216	80	6	-	-	PUNCT
easat-3216	80	7	plane	plane	NOUN
easat-3216	80	8	tm	tm	PROPN
easat-3216	80	9	mode	mode	PROPN
easat-3216	80	10	effective	effective	ADJ
easat-3216	80	11	index	index	NOUN
easat-3216	80	12	.	.	PUNCT
easat-3216	81	1	the	the	DET
easat-3216	81	2	1d	1d	NUM
easat-3216	81	3	te	te	ADP
easat-3216	81	4	mode	mode	NOUN
easat-3216	81	5	effective	effective	ADJ
easat-3216	81	6	index	index	NOUN
easat-3216	81	7	is	be	AUX
easat-3216	81	8	used	use	VERB
easat-3216	81	9	as	as	ADP
easat-3216	81	10	input	input	NOUN
easat-3216	81	11	to	to	ADP
easat-3216	81	12	the	the	DET
easat-3216	81	13	tm	tm	PROPN
easat-3216	81	14	1d	1d	NUM
easat-3216	81	15	analytic	analytic	ADJ
easat-3216	81	16	calculations	calculation	NOUN
easat-3216	81	17	.	.	PUNCT
easat-3216	82	1	the	the	DET
easat-3216	82	2	final	final	ADJ
easat-3216	82	3	result	result	NOUN
easat-3216	82	4	is	be	AUX
easat-3216	82	5	the	the	DET
easat-3216	82	6	effective	effective	ADJ
easat-3216	82	7	index	index	NOUN
easat-3216	82	8	of	of	ADP
easat-3216	82	9	the	the	DET
easat-3216	82	10	te	te	PROPN
easat-3216	82	11	mode	mode	NOUN
easat-3216	82	12	.	.	PUNCT
easat-3216	83	1	the	the	DET
easat-3216	83	2	plots	plot	NOUN
easat-3216	83	3	in	in	ADP
easat-3216	83	4	figures	figure	NOUN
easat-3216	83	5	2	2	NUM
easat-3216	83	6	and	and	CCONJ
easat-3216	83	7	3	3	NUM
easat-3216	83	8	report	report	VERB
easat-3216	83	9	the	the	DET
easat-3216	83	10	results	result	NOUN
easat-3216	83	11	from	from	ADP
easat-3216	83	12	2d	2d	PROPN
easat-3216	83	13	eim	eim	PROPN
easat-3216	83	14	.	.	PROPN
easat-3216	84	1	1	1	NUM
easat-3216	84	2	d	d	NOUN
easat-3216	84	3	field	field	NOUN
easat-3216	84	4	profiles	profile	NOUN
easat-3216	84	5	can	can	AUX
easat-3216	84	6	be	be	AUX
easat-3216	84	7	found	find	VERB
easat-3216	84	8	through	through	ADP
easat-3216	84	9	the	the	DET
easat-3216	84	10	1d	1d	NUM
easat-3216	84	11	analytic	analytic	ADJ
easat-3216	84	12	effective	effective	ADJ
easat-3216	84	13	indices	index	NOUN
easat-3216	84	14	.	.	PUNCT
easat-3216	85	1	then	then	ADV
easat-3216	85	2	,	,	PUNCT
easat-3216	85	3	the	the	DET
easat-3216	85	4	two	two	NUM
easat-3216	85	5	1d	1d	NUM
easat-3216	85	6	field	field	NOUN
easat-3216	85	7	profiles	profile	NOUN
easat-3216	85	8	can	can	AUX
easat-3216	85	9	be	be	AUX
easat-3216	85	10	multiplied	multiply	VERB
easat-3216	85	11	to	to	PART
easat-3216	85	12	find	find	VERB
easat-3216	85	13	the	the	DET
easat-3216	85	14	2d	2d	NUM
easat-3216	85	15	field	field	NOUN
easat-3216	85	16	plot	plot	NOUN
easat-3216	85	17	as	as	SCONJ
easat-3216	85	18	shown	show	VERB
easat-3216	85	19	in	in	ADP
easat-3216	85	20	figure	figure	NOUN
easat-3216	85	21	1	1	NUM
easat-3216	85	22	.	.	PUNCT
easat-3216	86	1	the	the	DET
easat-3216	86	2	high	high	ADJ
easat-3216	86	3	refractive	refractive	ADJ
easat-3216	86	4	index	index	NOUN
easat-3216	86	5	contrast	contrast	NOUN
easat-3216	86	6	between	between	ADP
easat-3216	86	7	silicon	silicon	NOUN
easat-3216	86	8	and	and	CCONJ
easat-3216	86	9	silicon	silicon	NOUN
easat-3216	86	10	dioxide	dioxide	NOUN
easat-3216	86	11	helps	help	VERB
easat-3216	86	12	to	to	PART
easat-3216	86	13	ensure	ensure	VERB
easat-3216	86	14	that	that	SCONJ
easat-3216	86	15	most	most	ADJ
easat-3216	86	16	light	light	NOUN
easat-3216	86	17	is	be	AUX
easat-3216	86	18	confined	confine	VERB
easat-3216	86	19	within	within	ADP
easat-3216	86	20	the	the	DET
easat-3216	86	21	silicon	silicon	NOUN
easat-3216	86	22	strip	strip	NOUN
easat-3216	86	23	.	.	PUNCT
easat-3216	87	1	however	however	ADV
easat-3216	87	2	,	,	PUNCT
easat-3216	87	3	it	it	PRON
easat-3216	87	4	is	be	AUX
easat-3216	87	5	important	important	ADJ
easat-3216	87	6	to	to	PART
easat-3216	87	7	note	note	VERB
easat-3216	87	8	that	that	SCONJ
easat-3216	87	9	light	light	NOUN
easat-3216	87	10	travels	travel	VERB
easat-3216	87	11	in	in	ADP
easat-3216	87	12	the	the	DET
easat-3216	87	13	form	form	NOUN
easat-3216	87	14	of	of	ADP
easat-3216	87	15	modes	mode	NOUN
easat-3216	87	16	.	.	PUNCT
easat-3216	88	1	for	for	ADP
easat-3216	88	2	a	a	DET
easat-3216	88	3	given	give	VERB
easat-3216	88	4	waveguide	waveguide	ADJ
easat-3216	88	5	geometry	geometry	NOUN
easat-3216	88	6	,	,	PUNCT
easat-3216	88	7	the	the	DET
easat-3216	88	8	number	number	NOUN
easat-3216	88	9	of	of	ADP
easat-3216	88	10	modes	mode	NOUN
easat-3216	88	11	needs	need	VERB
easat-3216	88	12	to	to	PART
easat-3216	88	13	be	be	AUX
easat-3216	88	14	calculated	calculate	VERB
easat-3216	88	15	.	.	PUNCT
easat-3216	89	1	in	in	ADP
easat-3216	89	2	the	the	DET
easat-3216	89	3	case	case	NOUN
easat-3216	89	4	under	under	ADP
easat-3216	89	5	consideration	consideration	NOUN
easat-3216	89	6	,	,	PUNCT
easat-3216	89	7	a	a	DET
easat-3216	89	8	500	500	NUM
easat-3216	89	9	nm	nm	NOUN
easat-3216	89	10	x	x	PROPN
easat-3216	89	11	220	220	NUM
easat-3216	89	12	nm	nm	ADV
easat-3216	89	13	waveguide	waveguide	NOUN
easat-3216	89	14	can	can	AUX
easat-3216	89	15	carry	carry	VERB
easat-3216	89	16	one	one	NUM
easat-3216	89	17	mode	mode	NOUN
easat-3216	89	18	with	with	ADP
easat-3216	89	19	good	good	ADJ
easat-3216	89	20	optical	optical	ADJ
easat-3216	89	21	confinement	confinement	NOUN
easat-3216	89	22	,	,	PUNCT
easat-3216	89	23	while	while	SCONJ
easat-3216	89	24	also	also	ADV
easat-3216	89	25	seeing	see	VERB
easat-3216	89	26	some	some	DET
easat-3216	89	27	effect	effect	NOUN
easat-3216	89	28	of	of	ADP
easat-3216	89	29	a	a	DET
easat-3216	89	30	second	second	ADJ
easat-3216	89	31	mode	mode	NOUN
easat-3216	89	32	.	.	PUNCT
easat-3216	90	1	the	the	DET
easat-3216	90	2	second	second	ADJ
easat-3216	90	3	mode	mode	NOUN
easat-3216	90	4	is	be	AUX
easat-3216	90	5	just	just	ADV
easat-3216	90	6	starting	start	VERB
easat-3216	90	7	to	to	PART
easat-3216	90	8	appear	appear	VERB
easat-3216	90	9	and	and	CCONJ
easat-3216	90	10	hence	hence	ADV
easat-3216	90	11	,	,	PUNCT
easat-3216	90	12	very	very	ADV
easat-3216	90	13	weak	weak	ADJ
easat-3216	90	14	.	.	PUNCT
easat-3216	91	1	therefore	therefore	ADV
easat-3216	91	2	,	,	PUNCT
easat-3216	91	3	the	the	DET
easat-3216	91	4	selected	select	VERB
easat-3216	91	5	waveguide	waveguide	ADJ
easat-3216	91	6	dimensions	dimension	NOUN
easat-3216	91	7	are	be	AUX
easat-3216	91	8	suitable	suitable	ADJ
easat-3216	91	9	for	for	ADP
easat-3216	91	10	optical	optical	ADJ
easat-3216	91	11	circuits	circuit	NOUN
easat-3216	91	12	.	.	PUNCT
easat-3216	92	1	in	in	ADP
easat-3216	92	2	figure	figure	NOUN
easat-3216	92	3	1	1	NUM
easat-3216	92	4	(	(	PUNCT
easat-3216	92	5	b	b	NOUN
easat-3216	92	6	)	)	PUNCT
easat-3216	92	7	,	,	PUNCT
easat-3216	92	8	a	a	DET
easat-3216	92	9	strong	strong	ADJ
easat-3216	92	10	field	field	NOUN
easat-3216	92	11	can	can	AUX
easat-3216	92	12	be	be	AUX
easat-3216	92	13	observed	observe	VERB
easat-3216	92	14	in	in	ADP
easat-3216	92	15	the	the	DET
easat-3216	92	16	center	center	NOUN
easat-3216	92	17	along	along	ADP
easat-3216	92	18	with	with	ADP
easat-3216	92	19	some	some	DET
easat-3216	92	20	sidelobes	sidelobe	NOUN
easat-3216	92	21	.	.	PUNCT
easat-3216	93	1	the	the	DET
easat-3216	93	2	generation	generation	NOUN
easat-3216	93	3	of	of	ADP
easat-3216	93	4	sidelobes	sidelobe	NOUN
easat-3216	93	5	can	can	AUX
easat-3216	93	6	be	be	AUX
easat-3216	93	7	attributed	attribute	VERB
easat-3216	93	8	to	to	ADP
easat-3216	93	9	the	the	DET
easat-3216	93	10	initiation	initiation	NOUN
easat-3216	93	11	of	of	ADP
easat-3216	93	12	the	the	DET
easat-3216	93	13	second	second	ADJ
easat-3216	93	14	mode	mode	NOUN
easat-3216	93	15	of	of	ADP
easat-3216	93	16	propagation	propagation	NOUN
easat-3216	93	17	.	.	PUNCT
easat-3216	94	1	since	since	SCONJ
easat-3216	94	2	refractive	refractive	ADJ
easat-3216	94	3	index	index	NOUN
easat-3216	94	4	plays	play	VERB
easat-3216	94	5	a	a	DET
easat-3216	94	6	crucial	crucial	ADJ
easat-3216	94	7	role	role	NOUN
easat-3216	94	8	in	in	ADP
easat-3216	94	9	waveguide	waveguide	ADJ
easat-3216	94	10	functionality	functionality	NOUN
easat-3216	94	11	,	,	PUNCT
easat-3216	94	12	it	it	PRON
easat-3216	94	13	is	be	AUX
easat-3216	94	14	important	important	ADJ
easat-3216	94	15	to	to	PART
easat-3216	94	16	touch	touch	VERB
easat-3216	94	17	upon	upon	SCONJ
easat-3216	94	18	the	the	DET
easat-3216	94	19	difference	difference	NOUN
easat-3216	94	20	between	between	ADP
easat-3216	94	21	effective	effective	ADJ
easat-3216	94	22	and	and	CCONJ
easat-3216	94	23	group	group	NOUN
easat-3216	94	24	refractive	refractive	ADJ
easat-3216	94	25	indices	index	NOUN
easat-3216	94	26	.	.	PUNCT
easat-3216	95	1	the	the	DET
easat-3216	95	2	effective	effective	ADJ
easat-3216	95	3	index	index	NOUN
easat-3216	95	4	is	be	AUX
easat-3216	95	5	related	relate	VERB
easat-3216	95	6	to	to	ADP
easat-3216	95	7	the	the	DET
easat-3216	95	8	speed	speed	NOUN
easat-3216	95	9	of	of	ADP
easat-3216	95	10	propagation	propagation	NOUN
easat-3216	95	11	of	of	ADP
easat-3216	95	12	a	a	DET
easat-3216	95	13	monochromatic	monochromatic	ADJ
easat-3216	95	14	beam	beam	NOUN
easat-3216	95	15	of	of	ADP
easat-3216	95	16	light	light	NOUN
easat-3216	95	17	.	.	PUNCT
easat-3216	96	1	however	however	ADV
easat-3216	96	2	,	,	PUNCT
easat-3216	96	3	when	when	SCONJ
easat-3216	96	4	a	a	DET
easat-3216	96	5	pulse	pulse	NOUN
easat-3216	96	6	propagates	propagate	VERB
easat-3216	96	7	through	through	ADP
easat-3216	96	8	a	a	DET
easat-3216	96	9	medium	medium	NOUN
easat-3216	96	10	,	,	PUNCT
easat-3216	96	11	it	it	PRON
easat-3216	96	12	experiences	experience	VERB
easat-3216	96	13	temporal	temporal	ADJ
easat-3216	96	14	broadening	broadening	NOUN
easat-3216	96	15	.	.	PUNCT
easat-3216	97	1	group	group	NOUN
easat-3216	97	2	velocity	velocity	NOUN
easat-3216	97	3	becomes	become	VERB
easat-3216	97	4	more	more	ADV
easat-3216	97	5	relevant	relevant	ADJ
easat-3216	97	6	when	when	SCONJ
easat-3216	97	7	multiple	multiple	ADJ
easat-3216	97	8	wavelengths	wavelength	NOUN
easat-3216	97	9	are	be	AUX
easat-3216	97	10	travelling	travel	VERB
easat-3216	97	11	in	in	ADP
easat-3216	97	12	a	a	DET
easat-3216	97	13	waveguide	waveguide	NOUN
easat-3216	97	14	.	.	PUNCT
easat-3216	98	1	group	group	NOUN
easat-3216	98	2	velocity	velocity	NOUN
easat-3216	98	3	takes	take	VERB
easat-3216	98	4	into	into	ADP
easat-3216	98	5	account	account	NOUN
easat-3216	98	6	the	the	DET
easat-3216	98	7	phase	phase	NOUN
easat-3216	98	8	velocities	velocity	NOUN
easat-3216	98	9	of	of	ADP
easat-3216	98	10	all	all	DET
easat-3216	98	11	the	the	DET
easat-3216	98	12	wavelengths	wavelength	NOUN
easat-3216	98	13	propagating	propagate	VERB
easat-3216	98	14	together	together	ADV
easat-3216	98	15	.	.	PUNCT
easat-3216	99	1	figure	figure	NOUN
easat-3216	99	2	2	2	NUM
easat-3216	99	3	explains	explain	VERB
easat-3216	99	4	how	how	SCONJ
easat-3216	99	5	the	the	DET
easat-3216	99	6	two	two	NUM
easat-3216	99	7	types	type	NOUN
easat-3216	99	8	of	of	ADP
easat-3216	99	9	refractive	refractive	ADJ
easat-3216	99	10	indices	index	NOUN
easat-3216	99	11	behave	behave	VERB
easat-3216	99	12	with	with	ADP
easat-3216	99	13	changing	change	VERB
easat-3216	99	14	wavelengths	wavelength	NOUN
easat-3216	99	15	.	.	PUNCT
easat-3216	100	1	the	the	DET
easat-3216	100	2	group	group	NOUN
easat-3216	100	3	index	index	NOUN
easat-3216	100	4	remains	remain	VERB
easat-3216	100	5	higher	high	ADJ
easat-3216	100	6	compared	compare	VERB
easat-3216	100	7	to	to	ADP
easat-3216	100	8	the	the	DET
easat-3216	100	9	effective	effective	ADJ
easat-3216	100	10	index	index	NOUN
easat-3216	100	11	,	,	PUNCT
easat-3216	100	12	which	which	PRON
easat-3216	100	13	means	mean	VERB
easat-3216	100	14	light	light	NOUN
easat-3216	100	15	travels	travel	VERB
easat-3216	100	16	slower	slow	ADJ
easat-3216	100	17	than	than	ADP
easat-3216	100	18	a	a	DET
easat-3216	100	19	monochromatic	monochromatic	ADJ
easat-3216	100	20	pulse	pulse	NOUN
easat-3216	100	21	.	.	PUNCT
easat-3216	101	1	the	the	DET
easat-3216	101	2	mathematical	mathematical	ADJ
easat-3216	101	3	relationship	relationship	NOUN
easat-3216	101	4	between	between	ADP
easat-3216	101	5	effective	effective	ADJ
easat-3216	101	6	index	index	NOUN
easat-3216	101	7	and	and	CCONJ
easat-3216	101	8	group	group	NOUN
easat-3216	101	9	index	index	NOUN
easat-3216	101	10	is	be	AUX
easat-3216	101	11	as	as	SCONJ
easat-3216	101	12	given	give	VERB
easat-3216	101	13	below	below	ADV
easat-3216	101	14	.	.	PUNCT
easat-3216	102	1	𝑛𝑔	𝑛𝑔	ADP
easat-3216	103	1	=	=	PUNCT
easat-3216	103	2	𝑛	𝑛	DET
easat-3216	103	3	−	−	PROPN
easat-3216	103	4	𝜆	𝜆	PRON
easat-3216	103	5	𝑑𝑛	𝑑𝑛	X
easat-3216	103	6	𝑑𝜆	𝑑𝜆	NOUN
easat-3216	103	7	(	(	PUNCT
easat-3216	103	8	2	2	NUM
easat-3216	103	9	)	)	PUNCT
easat-3216	103	10	5493	5493	NUM
easat-3216	103	11	edelweiss	edelweiss	PROPN
easat-3216	103	12	applied	apply	VERB
easat-3216	103	13	science	science	NOUN
easat-3216	103	14	and	and	CCONJ
easat-3216	103	15	technology	technology	NOUN
easat-3216	103	16	issn	issn	PROPN
easat-3216	103	17	:	:	PUNCT
easat-3216	103	18	2576	2576	NUM
easat-3216	103	19	-	-	SYM
easat-3216	103	20	8484	8484	NUM
easat-3216	103	21	vol	vol	NOUN
easat-3216	103	22	.	.	PROPN
easat-3216	103	23	8	8	NUM
easat-3216	103	24	,	,	PUNCT
easat-3216	103	25	no	no	INTJ
easat-3216	103	26	.	.	NOUN
easat-3216	103	27	6	6	NUM
easat-3216	103	28	:	:	SYM
easat-3216	103	29	5490	5490	NUM
easat-3216	103	30	-	-	SYM
easat-3216	103	31	5501	5501	NUM
easat-3216	103	32	,	,	PUNCT
easat-3216	103	33	2024	2024	NUM
easat-3216	103	34	doi	doi	NOUN
easat-3216	103	35	:	:	PUNCT
easat-3216	103	36	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	103	37	©	©	PROPN
easat-3216	103	38	2024	2024	NUM
easat-3216	103	39	by	by	ADP
easat-3216	103	40	the	the	DET
easat-3216	103	41	authors	author	NOUN
easat-3216	103	42	;	;	PUNCT
easat-3216	103	43	licensee	licensee	PROPN
easat-3216	103	44	learning	learn	VERB
easat-3216	103	45	gate	gate	NOUN
easat-3216	103	46	figure	figure	NOUN
easat-3216	103	47	2	2	NUM
easat-3216	103	48	.	.	NOUN
easat-3216	103	49	effective	effective	ADJ
easat-3216	103	50	and	and	CCONJ
easat-3216	103	51	group	group	NOUN
easat-3216	103	52	refractive	refractive	ADJ
easat-3216	103	53	indices	index	NOUN
easat-3216	103	54	of	of	ADP
easat-3216	103	55	(	(	PUNCT
easat-3216	103	56	a	a	PRON
easat-3216	103	57	)	)	PUNCT
easat-3216	103	58	silicon	silicon	NOUN
easat-3216	103	59	(	(	PUNCT
easat-3216	103	60	si	si	NOUN
easat-3216	103	61	)	)	PUNCT
easat-3216	103	62	and	and	CCONJ
easat-3216	103	63	(	(	PUNCT
easat-3216	103	64	b	b	X
easat-3216	103	65	)	)	PUNCT
easat-3216	103	66	silicon	silicon	NOUN
easat-3216	103	67	dioxide	dioxide	NOUN
easat-3216	103	68	(	(	PUNCT
easat-3216	103	69	sio2	sio2	PROPN
easat-3216	103	70	)	)	PUNCT
easat-3216	103	71	.	.	PUNCT
easat-3216	104	1	from	from	ADP
easat-3216	104	2	earlier	early	ADJ
easat-3216	104	3	discussion	discussion	NOUN
easat-3216	104	4	,	,	PUNCT
easat-3216	104	5	it	it	PRON
easat-3216	104	6	is	be	AUX
easat-3216	104	7	now	now	ADV
easat-3216	104	8	established	establish	VERB
easat-3216	104	9	that	that	PRON
easat-3216	104	10	group	group	NOUN
easat-3216	104	11	velocity	velocity	NOUN
easat-3216	104	12	and	and	CCONJ
easat-3216	104	13	group	group	NOUN
easat-3216	104	14	index	index	NOUN
easat-3216	104	15	are	be	AUX
easat-3216	104	16	important	important	ADJ
easat-3216	104	17	parameters	parameter	NOUN
easat-3216	104	18	for	for	ADP
easat-3216	104	19	waveguide	waveguide	ADJ
easat-3216	104	20	modeling	modeling	NOUN
easat-3216	104	21	.	.	PUNCT
easat-3216	105	1	equation	equation	NOUN
easat-3216	105	2	2	2	NUM
easat-3216	105	3	pinpoints	pinpoint	NOUN
easat-3216	105	4	that	that	PRON
easat-3216	105	5	group	group	NOUN
easat-3216	105	6	index	index	NOUN
easat-3216	105	7	is	be	AUX
easat-3216	105	8	related	relate	VERB
easat-3216	105	9	to	to	ADP
easat-3216	105	10	effective	effective	ADJ
easat-3216	105	11	index	index	NOUN
easat-3216	105	12	.	.	PUNCT
easat-3216	106	1	if	if	SCONJ
easat-3216	106	2	the	the	DET
easat-3216	106	3	effective	effective	ADJ
easat-3216	106	4	index	index	NOUN
easat-3216	106	5	changes	change	NOUN
easat-3216	106	6	,	,	PUNCT
easat-3216	106	7	the	the	DET
easat-3216	106	8	group	group	NOUN
easat-3216	106	9	index	index	NOUN
easat-3216	106	10	would	would	AUX
easat-3216	106	11	change	change	VERB
easat-3216	106	12	as	as	ADV
easat-3216	106	13	well	well	ADV
easat-3216	106	14	.	.	PUNCT
easat-3216	107	1	this	this	DET
easat-3216	107	2	work	work	NOUN
easat-3216	107	3	involves	involve	VERB
easat-3216	107	4	experimental	experimental	ADJ
easat-3216	107	5	validation	validation	NOUN
easat-3216	107	6	,	,	PUNCT
easat-3216	107	7	which	which	PRON
easat-3216	107	8	is	be	AUX
easat-3216	107	9	prone	prone	ADJ
easat-3216	107	10	to	to	ADP
easat-3216	107	11	device	device	NOUN
easat-3216	107	12	fabrication	fabrication	NOUN
easat-3216	107	13	errors	error	NOUN
easat-3216	107	14	.	.	PUNCT
easat-3216	108	1	thus	thus	ADV
easat-3216	108	2	,	,	PUNCT
easat-3216	108	3	it	it	PRON
easat-3216	108	4	is	be	AUX
easat-3216	108	5	important	important	ADJ
easat-3216	108	6	to	to	PART
easat-3216	108	7	understand	understand	VERB
easat-3216	108	8	how	how	SCONJ
easat-3216	108	9	the	the	DET
easat-3216	108	10	effective	effective	ADJ
easat-3216	108	11	index	index	NOUN
easat-3216	108	12	changes	change	NOUN
easat-3216	108	13	because	because	SCONJ
easat-3216	108	14	of	of	ADP
easat-3216	108	15	fabrication	fabrication	NOUN
easat-3216	108	16	errors	error	NOUN
easat-3216	108	17	.	.	PUNCT
easat-3216	109	1	figure	figure	NOUN
easat-3216	109	2	3	3	NUM
easat-3216	109	3	gives	give	VERB
easat-3216	109	4	an	an	DET
easat-3216	109	5	insight	insight	NOUN
easat-3216	109	6	into	into	ADP
easat-3216	109	7	the	the	DET
easat-3216	109	8	effective	effective	ADJ
easat-3216	109	9	index	index	NOUN
easat-3216	109	10	variation	variation	NOUN
easat-3216	109	11	with	with	ADP
easat-3216	109	12	respect	respect	NOUN
easat-3216	109	13	to	to	PART
easat-3216	109	14	waveguide	waveguide	VERB
easat-3216	109	15	geometrical	geometrical	ADJ
easat-3216	109	16	parameters	parameter	NOUN
easat-3216	109	17	and	and	CCONJ
easat-3216	109	18	operating	operating	NOUN
easat-3216	109	19	frequencies	frequency	NOUN
easat-3216	109	20	.	.	PUNCT
easat-3216	110	1	increasing	increase	VERB
easat-3216	110	2	the	the	DET
easat-3216	110	3	geometrical	geometrical	ADJ
easat-3216	110	4	parameters	parameter	NOUN
easat-3216	110	5	of	of	ADP
easat-3216	110	6	the	the	DET
easat-3216	110	7	waveguide	waveguide	NOUN
easat-3216	110	8	also	also	ADV
easat-3216	110	9	increases	increase	VERB
easat-3216	110	10	effective	effective	ADJ
easat-3216	110	11	whereas	whereas	SCONJ
easat-3216	110	12	increasing	increase	VERB
easat-3216	110	13	wavelength	wavelength	NOUN
easat-3216	110	14	causes	cause	VERB
easat-3216	110	15	a	a	DET
easat-3216	110	16	decrease	decrease	NOUN
easat-3216	110	17	in	in	ADP
easat-3216	110	18	effective	effective	ADJ
easat-3216	110	19	index	index	NOUN
easat-3216	110	20	.	.	PUNCT
easat-3216	111	1	figure	figure	NOUN
easat-3216	111	2	3	3	NUM
easat-3216	111	3	.	.	PUNCT
easat-3216	111	4	effect	effect	NOUN
easat-3216	111	5	of	of	ADP
easat-3216	111	6	changing	change	VERB
easat-3216	111	7	geometrical	geometrical	ADJ
easat-3216	111	8	parameters	parameter	NOUN
easat-3216	111	9	on	on	ADP
easat-3216	111	10	waveguide	waveguide	ADJ
easat-3216	111	11	effective	effective	ADJ
easat-3216	111	12	indices	index	NOUN
easat-3216	111	13	.	.	PUNCT
easat-3216	112	1	the	the	DET
easat-3216	112	2	discussion	discussion	NOUN
easat-3216	112	3	on	on	ADP
easat-3216	112	4	effective	effective	ADJ
easat-3216	112	5	index	index	NOUN
easat-3216	112	6	above	above	ADP
easat-3216	112	7	corresponds	correspond	NOUN
easat-3216	112	8	to	to	ADP
easat-3216	112	9	transverse	transverse	NOUN
easat-3216	112	10	electric	electric	ADJ
easat-3216	112	11	(	(	PUNCT
easat-3216	112	12	te	te	PROPN
easat-3216	112	13	)	)	PUNCT
easat-3216	112	14	modes	mode	NOUN
easat-3216	112	15	.	.	PUNCT
easat-3216	113	1	since	since	SCONJ
easat-3216	113	2	silicon	silicon	NOUN
easat-3216	113	3	is	be	AUX
easat-3216	113	4	a	a	DET
easat-3216	113	5	birefringent	birefringent	NOUN
easat-3216	113	6	material	material	NOUN
easat-3216	113	7	,	,	PUNCT
easat-3216	113	8	changing	change	VERB
easat-3216	113	9	the	the	DET
easat-3216	113	10	polarization	polarization	NOUN
easat-3216	113	11	would	would	AUX
easat-3216	113	12	affect	affect	VERB
easat-3216	113	13	optical	optical	ADJ
easat-3216	113	14	constants	constant	NOUN
easat-3216	113	15	.	.	PUNCT
easat-3216	114	1	2.2	2.2	NUM
easat-3216	114	2	.	.	PUNCT
easat-3216	114	3	mzi	mzi	PROPN
easat-3216	114	4	design	design	PROPN
easat-3216	114	5	5494	5494	NUM
easat-3216	114	6	edelweiss	edelweiss	PROPN
easat-3216	114	7	applied	apply	VERB
easat-3216	114	8	science	science	NOUN
easat-3216	114	9	and	and	CCONJ
easat-3216	114	10	technology	technology	NOUN
easat-3216	114	11	issn	issn	PROPN
easat-3216	114	12	:	:	PUNCT
easat-3216	114	13	2576	2576	NUM
easat-3216	114	14	-	-	SYM
easat-3216	114	15	8484	8484	NUM
easat-3216	114	16	vol	vol	NOUN
easat-3216	114	17	.	.	PROPN
easat-3216	114	18	8	8	NUM
easat-3216	114	19	,	,	PUNCT
easat-3216	114	20	no	no	INTJ
easat-3216	114	21	.	.	NOUN
easat-3216	114	22	6	6	NUM
easat-3216	114	23	:	:	SYM
easat-3216	114	24	5490	5490	NUM
easat-3216	114	25	-	-	SYM
easat-3216	114	26	5501	5501	NUM
easat-3216	114	27	,	,	PUNCT
easat-3216	114	28	2024	2024	NUM
easat-3216	114	29	doi	doi	NOUN
easat-3216	114	30	:	:	PUNCT
easat-3216	114	31	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	114	32	©	©	PROPN
easat-3216	114	33	2024	2024	NUM
easat-3216	114	34	by	by	ADP
easat-3216	114	35	the	the	DET
easat-3216	114	36	authors	author	NOUN
easat-3216	114	37	;	;	PUNCT
easat-3216	114	38	licensee	licensee	PROPN
easat-3216	114	39	learning	learning	NOUN
easat-3216	114	40	gate	gate	VERB
easat-3216	114	41	a	a	DET
easat-3216	114	42	mach	mach	ADJ
easat-3216	114	43	-	-	PUNCT
easat-3216	114	44	zehnder	zehnder	NOUN
easat-3216	114	45	interferometer	interferometer	NOUN
easat-3216	114	46	(	(	PUNCT
easat-3216	114	47	mzi	mzi	NOUN
easat-3216	114	48	)	)	PUNCT
easat-3216	114	49	is	be	AUX
easat-3216	114	50	one	one	NUM
easat-3216	114	51	of	of	ADP
easat-3216	114	52	the	the	DET
easat-3216	114	53	fundamental	fundamental	ADJ
easat-3216	114	54	photonic	photonic	ADJ
easat-3216	114	55	circuit	circuit	NOUN
easat-3216	114	56	components	component	NOUN
easat-3216	114	57	.	.	PUNCT
easat-3216	115	1	it	it	PRON
easat-3216	115	2	is	be	AUX
easat-3216	115	3	the	the	DET
easat-3216	115	4	standard	standard	ADJ
easat-3216	115	5	choice	choice	NOUN
easat-3216	115	6	for	for	ADP
easat-3216	115	7	on	on	ADP
easat-3216	115	8	-	-	PUNCT
easat-3216	115	9	chip	chip	NOUN
easat-3216	115	10	light	light	NOUN
easat-3216	115	11	modulation	modulation	NOUN
easat-3216	115	12	.	.	PUNCT
easat-3216	116	1	it	it	PRON
easat-3216	116	2	comprises	comprise	VERB
easat-3216	116	3	two	two	NUM
easat-3216	116	4	light	light	ADJ
easat-3216	116	5	paths	path	NOUN
easat-3216	116	6	.	.	PUNCT
easat-3216	117	1	if	if	SCONJ
easat-3216	117	2	the	the	DET
easat-3216	117	3	light	light	ADJ
easat-3216	117	4	paths	path	NOUN
easat-3216	117	5	are	be	AUX
easat-3216	117	6	of	of	ADP
easat-3216	117	7	equal	equal	ADJ
easat-3216	117	8	lengths	length	NOUN
easat-3216	117	9	,	,	PUNCT
easat-3216	117	10	the	the	DET
easat-3216	117	11	mzi	mzi	NOUN
easat-3216	117	12	is	be	AUX
easat-3216	117	13	balanced	balanced	ADJ
easat-3216	117	14	.	.	PUNCT
easat-3216	118	1	in	in	ADP
easat-3216	118	2	the	the	DET
easat-3216	118	3	case	case	NOUN
easat-3216	118	4	of	of	ADP
easat-3216	118	5	unequal	unequal	ADJ
easat-3216	118	6	path	path	NOUN
easat-3216	118	7	lengths	length	NOUN
easat-3216	118	8	,	,	PUNCT
easat-3216	118	9	the	the	DET
easat-3216	118	10	circuit	circuit	NOUN
easat-3216	118	11	would	would	AUX
easat-3216	118	12	be	be	AUX
easat-3216	118	13	called	call	VERB
easat-3216	118	14	unbalanced	unbalanced	ADJ
easat-3216	118	15	mzi	mzi	NOUN
easat-3216	118	16	.	.	PUNCT
easat-3216	119	1	incoming	incoming	ADJ
easat-3216	119	2	light	light	ADJ
easat-3216	119	3	intensity	intensity	NOUN
easat-3216	119	4	is	be	AUX
easat-3216	119	5	equally	equally	ADV
easat-3216	119	6	divided	divide	VERB
easat-3216	119	7	into	into	ADP
easat-3216	119	8	two	two	NUM
easat-3216	119	9	channels	channel	NOUN
easat-3216	119	10	(	(	PUNCT
easat-3216	119	11	in	in	ADP
easat-3216	119	12	the	the	DET
easat-3216	119	13	given	give	VERB
easat-3216	119	14	case	case	NOUN
easat-3216	119	15	,	,	PUNCT
easat-3216	119	16	waveguides	waveguide	NOUN
easat-3216	119	17	)	)	PUNCT
easat-3216	119	18	.	.	PUNCT
easat-3216	120	1	then	then	ADV
easat-3216	120	2	light	light	NOUN
easat-3216	120	3	travels	travel	VERB
easat-3216	120	4	through	through	ADP
easat-3216	120	5	the	the	DET
easat-3216	120	6	waveguides	waveguide	NOUN
easat-3216	120	7	undergoing	undergo	VERB
easat-3216	120	8	phase	phase	NOUN
easat-3216	120	9	change	change	NOUN
easat-3216	120	10	.	.	PUNCT
easat-3216	121	1	on	on	ADP
easat-3216	121	2	the	the	DET
easat-3216	121	3	other	other	ADJ
easat-3216	121	4	end	end	NOUN
easat-3216	121	5	,	,	PUNCT
easat-3216	121	6	the	the	DET
easat-3216	121	7	waveguide	waveguide	ADJ
easat-3216	121	8	paths	path	NOUN
easat-3216	121	9	can	can	AUX
easat-3216	121	10	again	again	ADV
easat-3216	121	11	be	be	AUX
easat-3216	121	12	connected	connect	VERB
easat-3216	121	13	to	to	PART
easat-3216	121	14	combine	combine	VERB
easat-3216	121	15	phase	phase	NOUN
easat-3216	121	16	effects	effect	NOUN
easat-3216	121	17	.	.	PUNCT
easat-3216	122	1	however	however	ADV
easat-3216	122	2	,	,	PUNCT
easat-3216	122	3	in	in	ADP
easat-3216	122	4	this	this	DET
easat-3216	122	5	paper	paper	NOUN
easat-3216	122	6	,	,	PUNCT
easat-3216	122	7	a	a	DET
easat-3216	122	8	different	different	ADJ
easat-3216	122	9	approach	approach	NOUN
easat-3216	122	10	has	have	AUX
easat-3216	122	11	been	be	AUX
easat-3216	122	12	adopted	adopt	VERB
easat-3216	122	13	,	,	PUNCT
easat-3216	122	14	which	which	PRON
easat-3216	122	15	also	also	ADV
easat-3216	122	16	contributes	contribute	VERB
easat-3216	122	17	to	to	ADP
easat-3216	122	18	the	the	DET
easat-3216	122	19	novelty	novelty	NOUN
easat-3216	122	20	of	of	ADP
easat-3216	122	21	this	this	DET
easat-3216	122	22	work	work	NOUN
easat-3216	122	23	.	.	PUNCT
easat-3216	123	1	light	light	NOUN
easat-3216	123	2	enters	enter	VERB
easat-3216	123	3	the	the	DET
easat-3216	123	4	chip	chip	NOUN
easat-3216	123	5	through	through	ADP
easat-3216	123	6	from	from	ADP
easat-3216	123	7	an	an	DET
easat-3216	123	8	optical	optical	ADJ
easat-3216	123	9	fiber	fiber	NOUN
easat-3216	123	10	though	though	SCONJ
easat-3216	123	11	a	a	DET
easat-3216	123	12	grating	grate	VERB
easat-3216	123	13	coupler	coupler	NOUN
easat-3216	123	14	and	and	CCONJ
easat-3216	123	15	is	be	AUX
easat-3216	123	16	split	split	VERB
easat-3216	123	17	into	into	ADP
easat-3216	123	18	two	two	NUM
easat-3216	123	19	waveguide	waveguide	ADJ
easat-3216	123	20	arms	arm	NOUN
easat-3216	123	21	.	.	PUNCT
easat-3216	124	1	finally	finally	ADV
easat-3216	124	2	,	,	PUNCT
easat-3216	124	3	the	the	DET
easat-3216	124	4	outcoming	outcome	VERB
easat-3216	124	5	beams	beam	NOUN
easat-3216	124	6	are	be	AUX
easat-3216	124	7	routed	route	VERB
easat-3216	124	8	through	through	ADP
easat-3216	124	9	grating	grate	VERB
easat-3216	124	10	couplers	coupler	NOUN
easat-3216	124	11	to	to	ADP
easat-3216	124	12	two	two	NUM
easat-3216	124	13	different	different	ADJ
easat-3216	124	14	photodetectors	photodetector	NOUN
easat-3216	124	15	.	.	PUNCT
easat-3216	125	1	in	in	ADP
easat-3216	125	2	this	this	DET
easat-3216	125	3	way	way	NOUN
easat-3216	125	4	,	,	PUNCT
easat-3216	125	5	the	the	DET
easat-3216	125	6	effect	effect	NOUN
easat-3216	125	7	of	of	ADP
easat-3216	125	8	the	the	DET
easat-3216	125	9	arm	arm	NOUN
easat-3216	125	10	length	length	NOUN
easat-3216	125	11	difference	difference	NOUN
easat-3216	125	12	can	can	AUX
easat-3216	125	13	be	be	AUX
easat-3216	125	14	clearly	clearly	ADV
easat-3216	125	15	observed	observe	VERB
easat-3216	125	16	.	.	PUNCT
easat-3216	126	1	equations	equation	NOUN
easat-3216	126	2	(	(	PUNCT
easat-3216	126	3	3	3	X
easat-3216	126	4	)	)	PUNCT
easat-3216	126	5	to	to	ADP
easat-3216	126	6	(	(	PUNCT
easat-3216	126	7	8)	8)	NUM
easat-3216	126	8	mathematically	mathematically	ADV
easat-3216	126	9	explain	explain	VERB
easat-3216	126	10	the	the	DET
easat-3216	126	11	behavior	behavior	NOUN
easat-3216	126	12	of	of	ADP
easat-3216	126	13	an	an	DET
easat-3216	126	14	mzi	mzi	NOUN
easat-3216	126	15	device	device	NOUN
easat-3216	126	16	in	in	ADP
easat-3216	126	17	terms	term	NOUN
easat-3216	126	18	of	of	ADP
easat-3216	126	19	electric	electric	ADJ
easat-3216	126	20	fields	field	NOUN
easat-3216	126	21	and	and	CCONJ
easat-3216	126	22	intensities	intensity	NOUN
easat-3216	126	23	.	.	PUNCT
easat-3216	127	1	𝐸1	𝐸1	NOUN
easat-3216	127	2	=	=	PUNCT
easat-3216	127	3	𝐸𝑖	𝐸𝑖	PROPN
easat-3216	127	4	√2	√2	PROPN
easat-3216	127	5	,	,	PUNCT
easat-3216	127	6	𝐼1	𝐼1	NOUN
easat-3216	127	7	=	=	SYM
easat-3216	127	8	𝐼𝑖	𝐼𝑖	PROPN
easat-3216	127	9	2	2	NUM
easat-3216	127	10	(	(	PUNCT
easat-3216	127	11	3	3	NUM
easat-3216	127	12	)	)	PUNCT
easat-3216	127	13	𝐸2	𝐸2	NOUN
easat-3216	127	14	=	=	PUNCT
easat-3216	127	15	𝐸𝑖	𝐸𝑖	PROPN
easat-3216	127	16	√2	√2	PROPN
easat-3216	127	17	,	,	PUNCT
easat-3216	127	18	𝐼2	𝐼2	NOUN
easat-3216	127	19	=	=	SYM
easat-3216	127	20	𝐼𝑖	𝐼𝑖	PROPN
easat-3216	127	21	2	2	NUM
easat-3216	127	22	(	(	PUNCT
easat-3216	127	23	4	4	NUM
easat-3216	127	24	)	)	PUNCT
easat-3216	127	25	𝛽1	𝛽1	NOUN
easat-3216	127	26	=	=	SYM
easat-3216	127	27	2𝜋𝑛1	2𝜋𝑛1	NUM
easat-3216	127	28	𝜆	𝜆	PRON
easat-3216	127	29	(	(	PUNCT
easat-3216	127	30	5	5	NUM
easat-3216	127	31	)	)	PUNCT
easat-3216	127	32	𝛽2	𝛽2	NOUN
easat-3216	127	33	=	=	SYM
easat-3216	127	34	2𝜋𝑛2	2𝜋𝑛2	NUM
easat-3216	127	35	𝜆	𝜆	X
easat-3216	127	36	(	(	PUNCT
easat-3216	127	37	6	6	NUM
easat-3216	127	38	)	)	PUNCT
easat-3216	127	39	𝐸𝑜1	𝐸𝑜1	NOUN
easat-3216	127	40	=	=	PUNCT
easat-3216	127	41	𝐸1𝑒−𝑖𝛽1𝐿1−	𝐸1𝑒−𝑖𝛽1𝐿1−	PROPN
easat-3216	127	42	𝛼1	𝛼1	PROPN
easat-3216	127	43	2	2	NUM
easat-3216	127	44	𝐿1	𝐿1	NOUN
easat-3216	127	45	=	=	SYM
easat-3216	127	46	𝐸𝑖	𝐸𝑖	PROPN
easat-3216	127	47	√2	√2	PROPN
easat-3216	127	48	𝑒−𝑖𝛽1𝐿1−	𝑒−𝑖𝛽1𝐿1−	PROPN
easat-3216	127	49	𝛼1	𝛼1	NOUN
easat-3216	127	50	2	2	NUM
easat-3216	127	51	𝐿1	𝐿1	NOUN
easat-3216	127	52	(	(	PUNCT
easat-3216	127	53	7	7	NUM
easat-3216	127	54	)	)	PUNCT
easat-3216	127	55	𝐸𝑜2	𝐸𝑜2	NOUN
easat-3216	127	56	=	=	PUNCT
easat-3216	127	57	𝐸2𝑒−𝑖𝛽2𝐿2−	𝐸2𝑒−𝑖𝛽2𝐿2−	NUM
easat-3216	127	58	𝛼2	𝛼2	PROPN
easat-3216	127	59	2	2	NUM
easat-3216	127	60	𝐿2	𝐿2	NOUN
easat-3216	127	61	=	=	SYM
easat-3216	128	1	𝐸𝑖	𝐸𝑖	PROPN
easat-3216	128	2	√2	√2	PROPN
easat-3216	128	3	𝑒−𝑖𝛽2𝐿2−	𝑒−𝑖𝛽2𝐿2−	PROPN
easat-3216	128	4	𝛼2	𝛼2	PROPN
easat-3216	128	5	2	2	NUM
easat-3216	128	6	𝐿2	𝐿2	NOUN
easat-3216	128	7	(	(	PUNCT
easat-3216	128	8	8)	8)	NUM
easat-3216	128	9	table	table	NOUN
easat-3216	128	10	1	1	NUM
easat-3216	128	11	.	.	PUNCT
easat-3216	128	12	description	description	NOUN
easat-3216	128	13	of	of	ADP
easat-3216	128	14	mathematical	mathematical	ADJ
easat-3216	128	15	symbols	symbol	NOUN
easat-3216	128	16	.	.	PUNCT
easat-3216	129	1	symbol	symbol	NOUN
easat-3216	129	2	description	description	NOUN
easat-3216	129	3	symbol	symbol	NOUN
easat-3216	129	4	description	description	NOUN
easat-3216	129	5	𝐼𝑖	𝐼𝑖	PROPN
easat-3216	129	6	incident	incident	NOUN
easat-3216	129	7	light	light	ADJ
easat-3216	129	8	intensity	intensity	NOUN
easat-3216	129	9	𝐸𝑜2	𝐸𝑜2	ADJ
easat-3216	129	10	output	output	PROPN
easat-3216	129	11	electric	electric	ADJ
easat-3216	129	12	field	field	NOUN
easat-3216	129	13	from	from	ADP
easat-3216	129	14	waveguide	waveguide	ADJ
easat-3216	129	15	2	2	NUM
easat-3216	129	16	𝐼1	𝐼1	NOUN
easat-3216	129	17	intensity	intensity	NOUN
easat-3216	129	18	in	in	ADP
easat-3216	129	19	waveguide	waveguide	ADJ
easat-3216	129	20	path	path	NOUN
easat-3216	129	21	1	1	NUM
easat-3216	129	22	𝛼1	𝛼1	NOUN
easat-3216	129	23	waveguide	waveguide	VERB
easat-3216	129	24	1	1	NUM
easat-3216	129	25	loss	loss	NOUN
easat-3216	129	26	𝐼2	𝐼2	NOUN
easat-3216	129	27	intensity	intensity	NOUN
easat-3216	129	28	in	in	ADP
easat-3216	129	29	waveguide	waveguide	ADJ
easat-3216	129	30	path	path	NOUN
easat-3216	129	31	2	2	NUM
easat-3216	129	32	𝛼2	𝛼2	ADV
easat-3216	129	33	waveguide	waveguide	VERB
easat-3216	129	34	2	2	NUM
easat-3216	129	35	loss	loss	NOUN
easat-3216	129	36	𝐸𝑖	𝐸𝑖	PROPN
easat-3216	129	37	incident	incident	NOUN
easat-3216	129	38	beam	beam	NOUN
easat-3216	129	39	electric	electric	ADJ
easat-3216	129	40	field	field	PROPN
easat-3216	129	41	𝐿1	𝐿1	VERB
easat-3216	129	42	waveguide	waveguide	ADJ
easat-3216	129	43	1	1	NUM
easat-3216	129	44	length	length	NOUN
easat-3216	129	45	𝐸1	𝐸1	NOUN
easat-3216	129	46	electric	electric	ADJ
easat-3216	129	47	field	field	NOUN
easat-3216	129	48	in	in	ADP
easat-3216	129	49	waveguide	waveguide	ADJ
easat-3216	129	50	path	path	NOUN
easat-3216	129	51	1	1	NUM
easat-3216	129	52	𝐿2	𝐿2	NOUN
easat-3216	129	53	waveguide	waveguide	ADJ
easat-3216	129	54	2	2	NUM
easat-3216	129	55	length	length	NOUN
easat-3216	129	56	𝐸2	𝐸2	PROPN
easat-3216	129	57	electric	electric	ADJ
easat-3216	129	58	field	field	NOUN
easat-3216	129	59	in	in	ADP
easat-3216	129	60	waveguide	waveguide	ADJ
easat-3216	129	61	path	path	NOUN
easat-3216	129	62	2	2	NUM
easat-3216	129	63	𝑛1	𝑛1	PROPN
easat-3216	129	64	group	group	NOUN
easat-3216	129	65	refractive	refractive	ADJ
easat-3216	129	66	index	index	NOUN
easat-3216	129	67	of	of	ADP
easat-3216	129	68	waveguide	waveguide	ADJ
easat-3216	129	69	1	1	NUM
easat-3216	129	70	𝛽1	𝛽1	NOUN
easat-3216	129	71	propagation	propagation	NOUN
easat-3216	129	72	constant	constant	ADJ
easat-3216	129	73	of	of	ADP
easat-3216	129	74	waveguide	waveguide	ADJ
easat-3216	129	75	1	1	NUM
easat-3216	129	76	𝑛2	𝑛2	NOUN
easat-3216	129	77	group	group	NOUN
easat-3216	129	78	refractive	refractive	ADJ
easat-3216	129	79	index	index	NOUN
easat-3216	129	80	of	of	ADP
easat-3216	129	81	waveguide	waveguide	ADJ
easat-3216	129	82	2	2	NUM
easat-3216	129	83	𝛽2	𝛽2	NOUN
easat-3216	129	84	propagation	propagation	NOUN
easat-3216	129	85	constant	constant	ADJ
easat-3216	129	86	of	of	ADP
easat-3216	129	87	waveguide	waveguide	ADJ
easat-3216	129	88	2	2	NUM
easat-3216	129	89	∆𝐿	∆𝐿	PRON
easat-3216	129	90	difference	difference	NOUN
easat-3216	129	91	in	in	ADP
easat-3216	129	92	mzi	mzi	NOUN
easat-3216	129	93	waveguide	waveguide	ADJ
easat-3216	129	94	arm	arm	NOUN
easat-3216	129	95	lengths	length	NOUN
easat-3216	129	96	𝐸𝑜1	𝐸𝑜1	ADJ
easat-3216	129	97	output	output	PROPN
easat-3216	129	98	electric	electric	ADJ
easat-3216	129	99	field	field	NOUN
easat-3216	129	100	from	from	ADP
easat-3216	129	101	waveguide	waveguide	ADJ
easat-3216	129	102	1	1	NUM
easat-3216	129	103	𝑛𝑔	𝑛𝑔	NOUN
easat-3216	129	104	group	group	NOUN
easat-3216	129	105	refractive	refractive	ADJ
easat-3216	129	106	index	index	NOUN
easat-3216	129	107	5495	5495	NUM
easat-3216	129	108	edelweiss	edelweiss	PROPN
easat-3216	129	109	applied	apply	VERB
easat-3216	129	110	science	science	NOUN
easat-3216	129	111	and	and	CCONJ
easat-3216	129	112	technology	technology	NOUN
easat-3216	129	113	issn	issn	PROPN
easat-3216	129	114	:	:	PUNCT
easat-3216	129	115	2576	2576	NUM
easat-3216	129	116	-	-	SYM
easat-3216	129	117	8484	8484	NUM
easat-3216	129	118	vol	vol	NOUN
easat-3216	129	119	.	.	PROPN
easat-3216	129	120	8	8	NUM
easat-3216	129	121	,	,	PUNCT
easat-3216	129	122	no	no	INTJ
easat-3216	129	123	.	.	NOUN
easat-3216	130	1	6	6	NUM
easat-3216	130	2	:	:	SYM
easat-3216	130	3	5490	5490	NUM
easat-3216	130	4	-	-	SYM
easat-3216	130	5	5501	5501	NUM
easat-3216	130	6	,	,	PUNCT
easat-3216	130	7	2024	2024	NUM
easat-3216	130	8	doi	doi	NOUN
easat-3216	130	9	:	:	PUNCT
easat-3216	130	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	130	11	©	©	PROPN
easat-3216	130	12	2024	2024	NUM
easat-3216	130	13	by	by	ADP
easat-3216	130	14	the	the	DET
easat-3216	130	15	authors	author	NOUN
easat-3216	130	16	;	;	PUNCT
easat-3216	130	17	licensee	licensee	PROPN
easat-3216	130	18	learning	learn	VERB
easat-3216	130	19	gate	gate	NOUN
easat-3216	130	20	figure	figure	NOUN
easat-3216	130	21	4	4	NUM
easat-3216	130	22	presents	present	VERB
easat-3216	130	23	the	the	DET
easat-3216	130	24	layout	layout	NOUN
easat-3216	130	25	of	of	ADP
easat-3216	130	26	the	the	DET
easat-3216	130	27	4	4	NUM
easat-3216	130	28	mzis	mzi	NOUN
easat-3216	130	29	designed	design	VERB
easat-3216	130	30	for	for	ADP
easat-3216	130	31	a	a	DET
easat-3216	130	32	multi	multi	ADJ
easat-3216	130	33	-	-	ADJ
easat-3216	130	34	project	project	ADJ
easat-3216	130	35	wafer	wafer	NOUN
easat-3216	130	36	(	(	PUNCT
easat-3216	130	37	mpw	mpw	NOUN
easat-3216	130	38	)	)	PUNCT
easat-3216	130	39	run	run	NOUN
easat-3216	130	40	.	.	PUNCT
easat-3216	131	1	the	the	DET
easat-3216	131	2	allowed	allow	VERB
easat-3216	131	3	chip	chip	NOUN
easat-3216	131	4	dimensions	dimension	NOUN
easat-3216	131	5	are	be	AUX
easat-3216	131	6	605	605	NUM
easat-3216	131	7	µm	µm	NOUN
easat-3216	131	8	by	by	ADP
easat-3216	131	9	410	410	NUM
easat-3216	131	10	µm	µm	NOUN
easat-3216	131	11	.	.	PUNCT
easat-3216	132	1	the	the	DET
easat-3216	132	2	silicon	silicon	NOUN
easat-3216	132	3	electronic	electronic	ADJ
easat-3216	132	4	photonic	photonic	ADJ
easat-3216	132	5	integrated	integrate	VERB
easat-3216	132	6	circuits	circuit	NOUN
easat-3216	132	7	(	(	PUNCT
easat-3216	132	8	siepic	siepic	NOUN
easat-3216	132	9	)	)	PUNCT
easat-3216	132	10	process	process	NOUN
easat-3216	132	11	design	design	NOUN
easat-3216	132	12	kit	kit	NOUN
easat-3216	132	13	(	(	PUNCT
easat-3216	132	14	pdk	pdk	NOUN
easat-3216	132	15	)	)	PUNCT
easat-3216	132	16	has	have	AUX
easat-3216	132	17	been	be	AUX
easat-3216	132	18	incorporated	incorporate	VERB
easat-3216	132	19	into	into	ADP
easat-3216	132	20	klayout	klayout	NOUN
easat-3216	132	21	.	.	PUNCT
easat-3216	133	1	interoperability	interoperability	NOUN
easat-3216	133	2	of	of	ADP
easat-3216	133	3	klayout	klayout	NOUN
easat-3216	133	4	with	with	ADP
easat-3216	133	5	ansys	ansys	PROPN
easat-3216	133	6	lumerical	lumerical	ADJ
easat-3216	133	7	interconnect	interconnect	NOUN
easat-3216	133	8	has	have	AUX
easat-3216	133	9	been	be	AUX
easat-3216	133	10	established	establish	VERB
easat-3216	133	11	.	.	PUNCT
easat-3216	134	1	the	the	DET
easat-3216	134	2	description	description	NOUN
easat-3216	134	3	of	of	ADP
easat-3216	134	4	different	different	ADJ
easat-3216	134	5	device	device	NOUN
easat-3216	134	6	symbols	symbol	NOUN
easat-3216	134	7	has	have	AUX
easat-3216	134	8	also	also	ADV
easat-3216	134	9	been	be	AUX
easat-3216	134	10	provided	provide	VERB
easat-3216	134	11	in	in	ADP
easat-3216	134	12	figure	figure	NOUN
easat-3216	134	13	4	4	NUM
easat-3216	134	14	[	[	X
easat-3216	134	15	15	15	NUM
easat-3216	134	16	]	]	PUNCT
easat-3216	134	17	,	,	PUNCT
easat-3216	135	1	[	[	X
easat-3216	135	2	16	16	NUM
easat-3216	135	3	]	]	PUNCT
easat-3216	135	4	,	,	PUNCT
easat-3216	135	5	[	[	X
easat-3216	135	6	17	17	NUM
easat-3216	135	7	]	]	PUNCT
easat-3216	135	8	.	.	PUNCT
easat-3216	136	1	in	in	ADP
easat-3216	136	2	each	each	DET
easat-3216	136	3	box	box	NOUN
easat-3216	136	4	,	,	PUNCT
easat-3216	136	5	the	the	DET
easat-3216	136	6	left	left	ADJ
easat-3216	136	7	and	and	CCONJ
easat-3216	136	8	right	right	ADJ
easat-3216	136	9	symbols	symbol	NOUN
easat-3216	136	10	belong	belong	VERB
easat-3216	136	11	to	to	ADP
easat-3216	136	12	klayout	klayout	NOUN
easat-3216	136	13	and	and	CCONJ
easat-3216	136	14	interconnect	interconnect	VERB
easat-3216	136	15	,	,	PUNCT
easat-3216	136	16	respectively	respectively	ADV
easat-3216	136	17	.	.	PUNCT
easat-3216	137	1	the	the	DET
easat-3216	137	2	scheme	scheme	NOUN
easat-3216	137	3	of	of	ADP
easat-3216	137	4	the	the	DET
easat-3216	137	5	mzi	mzi	NOUN
easat-3216	137	6	circuit	circuit	NOUN
easat-3216	137	7	is	be	AUX
easat-3216	137	8	also	also	ADV
easat-3216	137	9	highlighted	highlight	VERB
easat-3216	137	10	while	while	SCONJ
easat-3216	137	11	explaining	explain	VERB
easat-3216	137	12	the	the	DET
easat-3216	137	13	symbols	symbol	NOUN
easat-3216	137	14	.	.	PUNCT
easat-3216	138	1	light	light	ADJ
easat-3216	138	2	entering	enter	VERB
easat-3216	138	3	through	through	ADP
easat-3216	138	4	the	the	DET
easat-3216	138	5	grating	grating	NOUN
easat-3216	138	6	coupler	coupler	NOUN
easat-3216	138	7	at	at	ADP
easat-3216	138	8	the	the	DET
easat-3216	138	9	top	top	NOUN
easat-3216	138	10	is	be	AUX
easat-3216	138	11	divided	divide	VERB
easat-3216	138	12	into	into	ADP
easat-3216	138	13	two	two	NUM
easat-3216	138	14	channels	channel	NOUN
easat-3216	138	15	by	by	ADP
easat-3216	138	16	the	the	DET
easat-3216	138	17	y	y	PROPN
easat-3216	138	18	-	-	PUNCT
easat-3216	138	19	branch	branch	NOUN
easat-3216	138	20	splitter	splitter	NOUN
easat-3216	138	21	.	.	PUNCT
easat-3216	139	1	a	a	DET
easat-3216	139	2	bidirectional	bidirectional	ADJ
easat-3216	139	3	coupler	coupler	NOUN
easat-3216	139	4	,	,	PUNCT
easat-3216	139	5	along	along	ADP
easat-3216	139	6	with	with	ADP
easat-3216	139	7	waveguides	waveguide	NOUN
easat-3216	139	8	,	,	PUNCT
easat-3216	139	9	route	route	NOUN
easat-3216	139	10	light	light	NOUN
easat-3216	139	11	to	to	ADP
easat-3216	139	12	two	two	NUM
easat-3216	139	13	different	different	ADJ
easat-3216	139	14	grating	grate	VERB
easat-3216	139	15	couplers	coupler	NOUN
easat-3216	139	16	,	,	PUNCT
easat-3216	139	17	which	which	PRON
easat-3216	139	18	are	be	AUX
easat-3216	139	19	connected	connect	VERB
easat-3216	139	20	to	to	ADP
easat-3216	139	21	detectors	detector	NOUN
easat-3216	139	22	.	.	PUNCT
easat-3216	140	1	3	3	X
easat-3216	140	2	.	.	NOUN
easat-3216	140	3	results	result	VERB
easat-3216	140	4	an	an	DET
easat-3216	140	5	important	important	ADJ
easat-3216	140	6	characteristic	characteristic	NOUN
easat-3216	140	7	of	of	ADP
easat-3216	140	8	mzi	mzi	NOUN
easat-3216	140	9	circuit	circuit	NOUN
easat-3216	140	10	is	be	AUX
easat-3216	140	11	the	the	DET
easat-3216	140	12	free	free	ADJ
easat-3216	140	13	spectral	spectral	ADJ
easat-3216	140	14	range	range	NOUN
easat-3216	140	15	(	(	PUNCT
easat-3216	140	16	fsr	fsr	PROPN
easat-3216	140	17	)	)	PUNCT
easat-3216	140	18	,	,	PUNCT
easat-3216	140	19	which	which	PRON
easat-3216	140	20	holds	hold	VERB
easat-3216	140	21	special	special	ADJ
easat-3216	140	22	significance	significance	NOUN
easat-3216	140	23	in	in	ADP
easat-3216	140	24	wavelength	wavelength	NOUN
easat-3216	140	25	division	division	NOUN
easat-3216	140	26	multiplexing	multiplexing	NOUN
easat-3216	140	27	(	(	PUNCT
easat-3216	140	28	wdm	wdm	PROPN
easat-3216	140	29	)	)	PUNCT
easat-3216	140	30	.	.	PUNCT
easat-3216	141	1	the	the	DET
easat-3216	141	2	fsr	fsr	PROPN
easat-3216	141	3	of	of	ADP
easat-3216	141	4	all	all	DET
easat-3216	141	5	the	the	DET
easat-3216	141	6	mzi	mzi	NOUN
easat-3216	141	7	circuits	circuit	NOUN
easat-3216	141	8	is	be	AUX
easat-3216	141	9	determined	determine	VERB
easat-3216	141	10	numerically	numerically	ADV
easat-3216	141	11	and	and	CCONJ
easat-3216	141	12	experimentally	experimentally	ADV
easat-3216	141	13	.	.	PUNCT
easat-3216	142	1	table	table	NOUN
easat-3216	142	2	2	2	NUM
easat-3216	142	3	provides	provide	VERB
easat-3216	142	4	information	information	NOUN
easat-3216	142	5	regarding	regard	VERB
easat-3216	142	6	the	the	DET
easat-3216	142	7	difference	difference	NOUN
easat-3216	142	8	in	in	ADP
easat-3216	142	9	arms	arm	NOUN
easat-3216	142	10	lengths	length	NOUN
easat-3216	142	11	and	and	CCONJ
easat-3216	142	12	simulated/	simulated/	NUM
easat-3216	142	13	measured	measure	VERB
easat-3216	142	14	fsrs	fsr	NOUN
easat-3216	142	15	.	.	PUNCT
easat-3216	143	1	it	it	PRON
easat-3216	143	2	also	also	ADV
easat-3216	143	3	highlights	highlight	VERB
easat-3216	143	4	the	the	DET
easat-3216	143	5	error	error	NOUN
easat-3216	143	6	percentages	percentage	NOUN
easat-3216	143	7	.	.	PUNCT
easat-3216	144	1	all	all	DET
easat-3216	144	2	mzi	mzi	NOUN
easat-3216	144	3	measurements	measurement	NOUN
easat-3216	144	4	conform	conform	VERB
easat-3216	144	5	well	well	ADV
easat-3216	144	6	with	with	ADP
easat-3216	144	7	the	the	DET
easat-3216	144	8	simulation	simulation	NOUN
easat-3216	144	9	results	result	VERB
easat-3216	144	10	.	.	PUNCT
easat-3216	145	1	however	however	ADV
easat-3216	145	2	,	,	PUNCT
easat-3216	145	3	the	the	DET
easat-3216	145	4	error	error	NOUN
easat-3216	145	5	is	be	AUX
easat-3216	145	6	higher	high	ADJ
easat-3216	145	7	for	for	ADP
easat-3216	145	8	mzi	mzi	NOUN
easat-3216	145	9	4	4	NUM
easat-3216	145	10	.	.	PUNCT
easat-3216	146	1	the	the	DET
easat-3216	146	2	simulation	simulation	NOUN
easat-3216	146	3	and	and	CCONJ
easat-3216	146	4	experimental	experimental	ADJ
easat-3216	146	5	results	result	NOUN
easat-3216	146	6	do	do	AUX
easat-3216	146	7	not	not	PART
easat-3216	146	8	completely	completely	ADV
easat-3216	146	9	fit	fit	VERB
easat-3216	146	10	together	together	ADV
easat-3216	146	11	as	as	ADV
easat-3216	146	12	well	well	ADV
easat-3216	146	13	.	.	PUNCT
easat-3216	147	1	this	this	PRON
easat-3216	147	2	may	may	AUX
easat-3216	147	3	be	be	AUX
easat-3216	147	4	due	due	ADJ
easat-3216	147	5	to	to	ADP
easat-3216	147	6	a	a	DET
easat-3216	147	7	number	number	NOUN
easat-3216	147	8	of	of	ADP
easat-3216	147	9	reasons	reason	NOUN
easat-3216	147	10	including	include	VERB
easat-3216	147	11	fabrication	fabrication	NOUN
easat-3216	147	12	errors	error	NOUN
easat-3216	147	13	,	,	PUNCT
easat-3216	147	14	losses	loss	NOUN
easat-3216	147	15	in	in	ADP
easat-3216	147	16	waveguides	waveguide	NOUN
easat-3216	147	17	and	and	CCONJ
easat-3216	147	18	noise	noise	NOUN
easat-3216	147	19	in	in	ADP
easat-3216	147	20	the	the	DET
easat-3216	147	21	system	system	NOUN
easat-3216	147	22	.	.	PUNCT
easat-3216	148	1	figure	figure	NOUN
easat-3216	148	2	6	6	NUM
easat-3216	148	3	provides	provide	VERB
easat-3216	148	4	a	a	DET
easat-3216	148	5	complete	complete	ADJ
easat-3216	148	6	summary	summary	NOUN
easat-3216	148	7	of	of	ADP
easat-3216	148	8	simulation	simulation	NOUN
easat-3216	148	9	and	and	CCONJ
easat-3216	148	10	experimental	experimental	ADJ
easat-3216	148	11	results	result	NOUN
easat-3216	148	12	for	for	ADP
easat-3216	148	13	both	both	DET
easat-3216	148	14	output	output	NOUN
easat-3216	148	15	channels	channel	NOUN
easat-3216	148	16	of	of	ADP
easat-3216	148	17	all	all	DET
easat-3216	148	18	the	the	DET
easat-3216	148	19	mzi	mzi	NOUN
easat-3216	148	20	circuits	circuit	NOUN
easat-3216	148	21	.	.	PUNCT
easat-3216	149	1	the	the	DET
easat-3216	149	2	phase	phase	NOUN
easat-3216	149	3	shift	shift	NOUN
easat-3216	149	4	between	between	ADP
easat-3216	149	5	the	the	DET
easat-3216	149	6	two	two	NUM
easat-3216	149	7	channels	channel	NOUN
easat-3216	149	8	of	of	ADP
easat-3216	149	9	each	each	DET
easat-3216	149	10	mzi	mzi	NOUN
easat-3216	149	11	(	(	PUNCT
easat-3216	149	12	because	because	SCONJ
easat-3216	149	13	of	of	ADP
easat-3216	149	14	path	path	NOUN
easat-3216	149	15	length	length	NOUN
easat-3216	149	16	difference	difference	NOUN
easat-3216	149	17	)	)	PUNCT
easat-3216	149	18	is	be	AUX
easat-3216	149	19	evident	evident	ADJ
easat-3216	149	20	as	as	ADV
easat-3216	149	21	well	well	ADV
easat-3216	149	22	.	.	PUNCT
easat-3216	150	1	for	for	ADP
easat-3216	150	2	quantification	quantification	NOUN
easat-3216	150	3	of	of	ADP
easat-3216	150	4	noise	noise	NOUN
easat-3216	150	5	,	,	PUNCT
easat-3216	150	6	measurements	measurement	NOUN
easat-3216	150	7	are	be	AUX
easat-3216	150	8	taken	take	VERB
easat-3216	150	9	between	between	ADP
easat-3216	150	10	the	the	DET
easat-3216	150	11	wavelengths	wavelength	NOUN
easat-3216	150	12	of	of	ADP
easat-3216	150	13	1.5	1.5	NUM
easat-3216	150	14	µm	µm	NOUN
easat-3216	150	15	and	and	CCONJ
easat-3216	150	16	1.58	1.58	NUM
easat-3216	150	17	µm	µm	PART
easat-3216	150	18	four	four	NUM
easat-3216	150	19	times	time	NOUN
easat-3216	150	20	as	as	SCONJ
easat-3216	150	21	depicted	depict	VERB
easat-3216	150	22	by	by	ADP
easat-3216	150	23	figure	figure	NOUN
easat-3216	150	24	5	5	NUM
easat-3216	150	25	.	.	PUNCT
easat-3216	151	1	the	the	DET
easat-3216	151	2	measurements	measurement	NOUN
easat-3216	151	3	clarify	clarify	VERB
easat-3216	151	4	that	that	SCONJ
easat-3216	151	5	the	the	DET
easat-3216	151	6	signal	signal	NOUN
easat-3216	151	7	-	-	PUNCT
easat-3216	151	8	to	to	ADP
easat-3216	151	9	-	-	PUNCT
easat-3216	151	10	noise	noise	NOUN
easat-3216	151	11	ratio	ratio	NOUN
easat-3216	151	12	is	be	AUX
easat-3216	151	13	good	good	ADJ
easat-3216	151	14	.	.	PUNCT
easat-3216	152	1	the	the	DET
easat-3216	152	2	mean	mean	NOUN
easat-3216	152	3	of	of	ADP
easat-3216	152	4	the	the	DET
easat-3216	152	5	noise	noise	NOUN
easat-3216	152	6	remains	remain	VERB
easat-3216	152	7	close	close	ADJ
easat-3216	152	8	to	to	ADP
easat-3216	152	9	-65	-65	PART
easat-3216	152	10	db	db	PROPN
easat-3216	152	11	.	.	PUNCT
easat-3216	153	1	there	there	PRON
easat-3216	153	2	are	be	VERB
easat-3216	153	3	outliers	outlier	NOUN
easat-3216	153	4	in	in	ADP
easat-3216	153	5	the	the	DET
easat-3216	153	6	noise	noise	NOUN
easat-3216	153	7	data	datum	NOUN
easat-3216	153	8	,	,	PUNCT
easat-3216	153	9	shown	show	VERB
easat-3216	153	10	in	in	ADP
easat-3216	153	11	red	red	PROPN
easat-3216	153	12	,	,	PUNCT
easat-3216	153	13	which	which	PRON
easat-3216	153	14	have	have	VERB
easat-3216	153	15	very	very	ADV
easat-3216	153	16	low	low	ADJ
easat-3216	153	17	magnitudes	magnitude	NOUN
easat-3216	153	18	.	.	PUNCT
easat-3216	154	1	5496	5496	NUM
easat-3216	154	2	edelweiss	edelweiss	PROPN
easat-3216	154	3	applied	apply	VERB
easat-3216	154	4	science	science	NOUN
easat-3216	154	5	and	and	CCONJ
easat-3216	154	6	technology	technology	NOUN
easat-3216	154	7	issn	issn	PROPN
easat-3216	154	8	:	:	PUNCT
easat-3216	154	9	2576	2576	NUM
easat-3216	154	10	-	-	SYM
easat-3216	154	11	8484	8484	NUM
easat-3216	154	12	vol	vol	NOUN
easat-3216	154	13	.	.	PROPN
easat-3216	154	14	8	8	NUM
easat-3216	154	15	,	,	PUNCT
easat-3216	154	16	no	no	INTJ
easat-3216	154	17	.	.	NOUN
easat-3216	155	1	6	6	NUM
easat-3216	155	2	:	:	SYM
easat-3216	155	3	5490	5490	NUM
easat-3216	155	4	-	-	SYM
easat-3216	155	5	5501	5501	NUM
easat-3216	155	6	,	,	PUNCT
easat-3216	155	7	2024	2024	NUM
easat-3216	155	8	doi	doi	NOUN
easat-3216	155	9	:	:	PUNCT
easat-3216	155	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	155	11	©	©	PROPN
easat-3216	155	12	2024	2024	NUM
easat-3216	155	13	by	by	ADP
easat-3216	155	14	the	the	DET
easat-3216	155	15	authors	author	NOUN
easat-3216	155	16	;	;	PUNCT
easat-3216	155	17	licensee	licensee	PROPN
easat-3216	155	18	learning	learn	VERB
easat-3216	155	19	gate	gate	NOUN
easat-3216	155	20	figure	figure	NOUN
easat-3216	155	21	4	4	NUM
easat-3216	155	22	.	.	PUNCT
easat-3216	156	1	(	(	PUNCT
easat-3216	156	2	a	a	X
easat-3216	156	3	)	)	PUNCT
easat-3216	156	4	floor	floor	NOUN
easat-3216	156	5	plan	plan	NOUN
easat-3216	156	6	of	of	ADP
easat-3216	156	7	the	the	DET
easat-3216	156	8	4	4	NUM
easat-3216	156	9	mzis	mzi	NOUN
easat-3216	156	10	created	create	VERB
easat-3216	156	11	in	in	ADP
easat-3216	156	12	klayout	klayout	NOUN
easat-3216	156	13	.	.	PUNCT
easat-3216	157	1	(	(	PUNCT
easat-3216	157	2	b	b	X
easat-3216	157	3	)	)	PUNCT
easat-3216	157	4	symbols	symbol	NOUN
easat-3216	157	5	of	of	ADP
easat-3216	157	6	the	the	DET
easat-3216	157	7	photonic	photonic	ADJ
easat-3216	157	8	components	component	NOUN
easat-3216	157	9	used	use	VERB
easat-3216	157	10	in	in	ADP
easat-3216	157	11	simulations	simulation	NOUN
easat-3216	157	12	along	along	ADP
easat-3216	157	13	with	with	ADP
easat-3216	157	14	description	description	NOUN
easat-3216	157	15	(	(	PUNCT
easat-3216	157	16	left	leave	VERB
easat-3216	157	17	symbol	symbol	NOUN
easat-3216	157	18	:	:	PUNCT
easat-3216	157	19	klayout	klayout	NOUN
easat-3216	157	20	,	,	PUNCT
easat-3216	157	21	right	right	ADJ
easat-3216	157	22	symbol	symbol	NOUN
easat-3216	157	23	:	:	PUNCT
easat-3216	157	24	lumerical	lumerical	ADJ
easat-3216	157	25	interconnect	interconnect	NOUN
easat-3216	157	26	)	)	PUNCT
easat-3216	157	27	.	.	PUNCT
easat-3216	158	1	5497	5497	NUM
easat-3216	158	2	edelweiss	edelweiss	PROPN
easat-3216	158	3	applied	apply	VERB
easat-3216	158	4	science	science	NOUN
easat-3216	158	5	and	and	CCONJ
easat-3216	158	6	technology	technology	NOUN
easat-3216	158	7	issn	issn	PROPN
easat-3216	158	8	:	:	PUNCT
easat-3216	158	9	2576	2576	NUM
easat-3216	158	10	-	-	SYM
easat-3216	158	11	8484	8484	NUM
easat-3216	158	12	vol	vol	NOUN
easat-3216	158	13	.	.	PROPN
easat-3216	158	14	8	8	NUM
easat-3216	158	15	,	,	PUNCT
easat-3216	158	16	no	no	INTJ
easat-3216	158	17	.	.	NOUN
easat-3216	159	1	6	6	NUM
easat-3216	159	2	:	:	SYM
easat-3216	159	3	5490	5490	NUM
easat-3216	159	4	-	-	SYM
easat-3216	159	5	5501	5501	NUM
easat-3216	159	6	,	,	PUNCT
easat-3216	159	7	2024	2024	NUM
easat-3216	159	8	doi	doi	NOUN
easat-3216	159	9	:	:	PUNCT
easat-3216	159	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	159	11	©	©	PROPN
easat-3216	159	12	2024	2024	NUM
easat-3216	159	13	by	by	ADP
easat-3216	159	14	the	the	DET
easat-3216	159	15	authors	author	NOUN
easat-3216	159	16	;	;	PUNCT
easat-3216	160	1	licensee	licensee	PROPN
easat-3216	160	2	learning	learn	VERB
easat-3216	160	3	gate	gate	PROPN
easat-3216	160	4	figure	figure	NOUN
easat-3216	160	5	5	5	NUM
easat-3216	160	6	.	.	PUNCT
easat-3216	161	1	(	(	PUNCT
easat-3216	161	2	a	a	X
easat-3216	161	3	)	)	PUNCT
easat-3216	161	4	noise	noise	NOUN
easat-3216	161	5	signal	signal	NOUN
easat-3216	161	6	.	.	PUNCT
easat-3216	162	1	(	(	PUNCT
easat-3216	162	2	b	b	X
easat-3216	162	3	)	)	PUNCT
easat-3216	162	4	distribution	distribution	NOUN
easat-3216	162	5	of	of	ADP
easat-3216	162	6	noise	noise	NOUN
easat-3216	162	7	values	value	NOUN
easat-3216	162	8	between	between	ADP
easat-3216	162	9	the	the	DET
easat-3216	162	10	wavelength	wavelength	NOUN
easat-3216	162	11	of	of	ADP
easat-3216	162	12	1.5	1.5	NUM
easat-3216	162	13	µm	µm	NOUN
easat-3216	162	14	and	and	CCONJ
easat-3216	162	15	1.58	1.58	NUM
easat-3216	162	16	µm	µm	NOUN
easat-3216	162	17	.	.	PROPN
easat-3216	162	18	table	table	NOUN
easat-3216	163	1	2	2	NUM
easat-3216	163	2	.	.	PUNCT
easat-3216	164	1	free	free	ADJ
easat-3216	164	2	spectral	spectral	ADJ
easat-3216	164	3	ranges	range	NOUN
easat-3216	164	4	(	(	PUNCT
easat-3216	164	5	fsrs	fsrs	X
easat-3216	164	6	)	)	PUNCT
easat-3216	164	7	of	of	ADP
easat-3216	164	8	different	different	ADJ
easat-3216	164	9	mzi	mzi	NOUN
easat-3216	164	10	designs	design	NOUN
easat-3216	164	11	.	.	PUNCT
easat-3216	165	1	device	device	NOUN
easat-3216	165	2	no	no	INTJ
easat-3216	165	3	.	.	PUNCT
easat-3216	166	1	|𝚫𝐋|	|𝚫𝐋|	PROPN
easat-3216	166	2	simulation	simulation	PROPN
easat-3216	166	3	fsr	fsr	PROPN
easat-3216	166	4	measurement	measurement	PROPN
easat-3216	166	5	fsr	fsr	PROPN
easat-3216	166	6	error	error	NOUN
easat-3216	166	7	=	=	PUNCT
easat-3216	166	8	|	|	ADV
easat-3216	166	9	𝑴𝑬𝑨𝑺𝑼𝑹𝑬𝑴𝑬𝑵𝑻−𝑺𝑰𝑴𝑼𝑳𝑨𝑻𝑰𝑶𝑵	𝑴𝑬𝑨𝑺𝑼𝑹𝑬𝑴𝑬𝑵𝑻−𝑺𝑰𝑴𝑼𝑳𝑨𝑻𝑰𝑶𝑵	NOUN
easat-3216	166	10	𝑺𝑰𝑴𝑼𝑳𝑨𝑻𝑰𝑶𝑵	𝑺𝑰𝑴𝑼𝑳𝑨𝑻𝑰𝑶𝑵	PROPN
easat-3216	166	11	|	|	ADV
easat-3216	166	12	𝑿𝟏𝟎𝟎	𝑿𝟏𝟎𝟎	NOUN
easat-3216	166	13	mzi	mzi	NOUN
easat-3216	166	14	1	1	NUM
easat-3216	166	15	105.15	105.15	NUM
easat-3216	166	16	µm	µm	NUM
easat-3216	166	17	2.05	2.05	NUM
easat-3216	166	18	nm	nm	NUM
easat-3216	166	19	2.00	2.00	NUM
easat-3216	166	20	nm	nm	NOUN
easat-3216	166	21	2.439	2.439	NUM
easat-3216	166	22	%	%	NOUN
easat-3216	166	23	mzi	mzi	NOUN
easat-3216	166	24	2	2	NUM
easat-3216	166	25	8.877	8.877	NUM
easat-3216	166	26	µm	µm	ADP
easat-3216	166	27	1.96	1.96	NUM
easat-3216	166	28	nm	nm	PROPN
easat-3216	166	29	1.92	1.92	NUM
easat-3216	166	30	nm	nm	NOUN
easat-3216	166	31	2.041	2.041	NUM
easat-3216	166	32	%	%	NOUN
easat-3216	166	33	mzi	mzi	NOUN
easat-3216	166	34	3	3	NUM
easat-3216	166	35	141.9	141.9	NUM
easat-3216	166	36	µm	µm	ADP
easat-3216	166	37	62.00	62.00	NUM
easat-3216	166	38	nm	nm	NOUN
easat-3216	166	39	60.88	60.88	NUM
easat-3216	166	40	nm	nm	PRON
easat-3216	166	41	1.12	1.12	NUM
easat-3216	166	42	%	%	NOUN
easat-3216	166	43	mzi	mzi	NOUN
easat-3216	166	44	4	4	NUM
easat-3216	166	45	138.797	138.797	NUM
easat-3216	166	46	µm	µm	ADP
easat-3216	166	47	62.15	62.15	NUM
easat-3216	166	48	nm	nm	NOUN
easat-3216	166	49	57.28	57.28	NUM
easat-3216	166	50	nm	nm	NOUN
easat-3216	166	51	7.836	7.836	NUM
easat-3216	166	52	%	%	NOUN
easat-3216	166	53	4	4	NUM
easat-3216	166	54	.	.	NOUN
easat-3216	166	55	fabrication	fabrication	NOUN
easat-3216	166	56	and	and	CCONJ
easat-3216	166	57	measurement	measurement	VERB
easat-3216	166	58	the	the	DET
easat-3216	166	59	fabrication	fabrication	NOUN
easat-3216	166	60	of	of	ADP
easat-3216	166	61	the	the	DET
easat-3216	166	62	chip	chip	NOUN
easat-3216	166	63	was	be	AUX
easat-3216	166	64	carried	carry	VERB
easat-3216	166	65	out	out	ADP
easat-3216	166	66	by	by	ADP
easat-3216	166	67	applied	apply	VERB
easat-3216	166	68	nanotools	nanotools	PROPN
easat-3216	166	69	inc	inc	PROPN
easat-3216	166	70	.	.	PROPN
easat-3216	166	71	based	base	VERB
easat-3216	166	72	in	in	ADP
easat-3216	166	73	edmonton	edmonton	PROPN
easat-3216	166	74	,	,	PUNCT
easat-3216	166	75	alberta	alberta	PROPN
easat-3216	166	76	through	through	ADP
easat-3216	166	77	the	the	DET
easat-3216	166	78	nanosoi	nanosoi	NOUN
easat-3216	166	79	mpw	mpw	NOUN
easat-3216	166	80	process	process	NOUN
easat-3216	166	81	.	.	PUNCT
easat-3216	167	1	the	the	DET
easat-3216	167	2	company	company	NOUN
easat-3216	167	3	used	use	VERB
easat-3216	167	4	direct	direct	ADJ
easat-3216	167	5	-	-	PUNCT
easat-3216	167	6	write	write	ADJ
easat-3216	167	7	100	100	NUM
easat-3216	167	8	kev	kev	PROPN
easat-3216	167	9	electron	electron	NOUN
easat-3216	167	10	beam	beam	NOUN
easat-3216	167	11	lithography	lithography	NOUN
easat-3216	167	12	(	(	PUNCT
easat-3216	167	13	ebl	ebl	PROPN
easat-3216	167	14	)	)	PUNCT
easat-3216	168	1	[	[	X
easat-3216	168	2	23	23	NUM
easat-3216	168	3	]	]	PUNCT
easat-3216	168	4	.	.	PUNCT
easat-3216	169	1	the	the	DET
easat-3216	169	2	diameter	diameter	NOUN
easat-3216	169	3	of	of	ADP
easat-3216	169	4	the	the	DET
easat-3216	169	5	silicon	silicon	NOUN
easat-3216	169	6	on	on	ADP
easat-3216	169	7	insulator	insulator	NOUN
easat-3216	169	8	(	(	PUNCT
easat-3216	169	9	soi	soi	ADJ
easat-3216	169	10	)	)	PUNCT
easat-3216	169	11	wafer	wafer	NOUN
easat-3216	169	12	was	be	AUX
easat-3216	169	13	200	200	NUM
easat-3216	169	14	mm	mm	NOUN
easat-3216	169	15	.	.	PUNCT
easat-3216	170	1	it	it	PRON
easat-3216	170	2	was	be	AUX
easat-3216	170	3	diced	dice	VERB
easat-3216	170	4	into	into	ADP
easat-3216	170	5	25	25	NUM
easat-3216	170	6	mm	mm	NOUN
easat-3216	170	7	x	x	SYM
easat-3216	170	8	25	25	NUM
easat-3216	170	9	mm	mm	PROPN
easat-3216	170	10	square	square	ADJ
easat-3216	170	11	substrates	substrate	NOUN
easat-3216	170	12	.	.	PUNCT
easat-3216	171	1	initially	initially	ADV
easat-3216	171	2	,	,	PUNCT
easat-3216	171	3	the	the	DET
easat-3216	171	4	wafer	wafer	NOUN
easat-3216	171	5	was	be	AUX
easat-3216	171	6	cleaned	clean	VERB
easat-3216	171	7	with	with	ADP
easat-3216	171	8	piranha	piranha	NOUN
easat-3216	171	9	solution	solution	NOUN
easat-3216	171	10	(	(	PUNCT
easat-3216	171	11	3	3	NUM
easat-3216	171	12	h2so4	h2so4	NOUN
easat-3216	171	13	:	:	PUNCT
easat-3216	171	14	1	1	NUM
easat-3216	171	15	h2o2	h2o2	NOUN
easat-3216	171	16	)	)	PUNCT
easat-3216	171	17	.	.	PUNCT
easat-3216	172	1	then	then	ADV
easat-3216	172	2	,	,	PUNCT
easat-3216	172	3	it	it	PRON
easat-3216	172	4	was	be	AUX
easat-3216	172	5	rinsed	rinse	VERB
easat-3216	172	6	with	with	ADP
easat-3216	172	7	water/	water/	PROPN
easat-3216	172	8	isopropyl	isopropyl	NOUN
easat-3216	172	9	alcohol	alcohol	NOUN
easat-3216	172	10	(	(	PUNCT
easat-3216	172	11	ipa	ipa	PROPN
easat-3216	172	12	)	)	PUNCT
easat-3216	172	13	.	.	PUNCT
easat-3216	173	1	after	after	ADP
easat-3216	173	2	that	that	PRON
easat-3216	173	3	,	,	PUNCT
easat-3216	173	4	hydrogen	hydrogen	NOUN
easat-3216	173	5	silsesquioxane	silsesquioxane	NOUN
easat-3216	173	6	(	(	PUNCT
easat-3216	173	7	hsq	hsq	PROPN
easat-3216	173	8	)	)	PUNCT
easat-3216	173	9	was	be	AUX
easat-3216	173	10	spin	spin	NOUN
easat-3216	173	11	-	-	PUNCT
easat-3216	173	12	coated	coat	VERB
easat-3216	173	13	onto	onto	ADP
easat-3216	173	14	the	the	DET
easat-3216	173	15	substrate	substrate	NOUN
easat-3216	173	16	.	.	PUNCT
easat-3216	174	1	this	this	PRON
easat-3216	174	2	was	be	AUX
easat-3216	174	3	followed	follow	VERB
easat-3216	174	4	by	by	ADP
easat-3216	174	5	heating	heat	VERB
easat-3216	174	6	to	to	PART
easat-3216	174	7	evaporate	evaporate	VERB
easat-3216	174	8	the	the	DET
easat-3216	174	9	solvent	solvent	NOUN
easat-3216	174	10	.	.	PUNCT
easat-3216	175	1	the	the	DET
easat-3216	175	2	patterning	patterning	NOUN
easat-3216	175	3	was	be	AUX
easat-3216	175	4	done	do	VERB
easat-3216	175	5	at	at	ADP
easat-3216	175	6	the	the	DET
easat-3216	175	7	university	university	PROPN
easat-3216	175	8	of	of	ADP
easat-3216	175	9	british	british	PROPN
easat-3216	175	10	columbia	columbia	PROPN
easat-3216	175	11	using	use	VERB
easat-3216	175	12	a	a	DET
easat-3216	175	13	jeol	jeol	PROPN
easat-3216	175	14	jbx-8100fs	jbx-8100fs	PROPN
easat-3216	175	15	electron	electron	NOUN
easat-3216	175	16	beam	beam	NOUN
easat-3216	175	17	instrument	instrument	NOUN
easat-3216	175	18	.	.	PUNCT
easat-3216	176	1	tetramethylammonium	tetramethylammonium	NOUN
easat-3216	176	2	sulfate	sulfate	NOUN
easat-3216	176	3	(	(	PUNCT
easat-3216	176	4	tmah	tmah	ADJ
easat-3216	176	5	)	)	PUNCT
easat-3216	176	6	solution	solution	NOUN
easat-3216	176	7	was	be	AUX
easat-3216	176	8	then	then	ADV
easat-3216	176	9	used	use	VERB
easat-3216	176	10	to	to	PART
easat-3216	176	11	develop	develop	VERB
easat-3216	176	12	the	the	DET
easat-3216	176	13	pattern	pattern	NOUN
easat-3216	176	14	.	.	PUNCT
easat-3216	177	1	visual	visual	ADJ
easat-3216	177	2	inspection	inspection	NOUN
easat-3216	177	3	of	of	ADP
easat-3216	177	4	the	the	DET
easat-3216	177	5	devices	device	NOUN
easat-3216	177	6	was	be	AUX
easat-3216	177	7	carried	carry	VERB
easat-3216	177	8	out	out	ADP
easat-3216	177	9	to	to	PART
easat-3216	177	10	spot	spot	VERB
easat-3216	177	11	defects	defect	NOUN
easat-3216	177	12	and	and	CCONJ
easat-3216	177	13	residues	residue	NOUN
easat-3216	177	14	.	.	PUNCT
easat-3216	178	1	the	the	DET
easat-3216	178	2	chips	chip	NOUN
easat-3216	178	3	were	be	AUX
easat-3216	178	4	mounted	mount	VERB
easat-3216	178	5	on	on	ADP
easat-3216	178	6	a	a	DET
easat-3216	178	7	4	4	NUM
easat-3216	178	8	"	"	PUNCT
easat-3216	178	9	handle	handle	NOUN
easat-3216	178	10	wafer	wafer	NOUN
easat-3216	178	11	.	.	PUNCT
easat-3216	179	1	they	they	PRON
easat-3216	179	2	were	be	AUX
easat-3216	179	3	subjected	subject	VERB
easat-3216	179	4	to	to	ADP
easat-3216	179	5	an	an	DET
easat-3216	179	6	anisotropic	anisotropic	NOUN
easat-3216	179	7	icp	icp	NOUN
easat-3216	179	8	-	-	PUNCT
easat-3216	179	9	rie	rie	ADJ
easat-3216	179	10	etch	etch	NOUN
easat-3216	179	11	process	process	NOUN
easat-3216	179	12	using	use	VERB
easat-3216	179	13	chlorine	chlorine	NOUN
easat-3216	179	14	.	.	PUNCT
easat-3216	180	1	a	a	DET
easat-3216	180	2	buffer	buffer	NOUN
easat-3216	180	3	oxide	oxide	NOUN
easat-3216	180	4	wet	wet	ADJ
easat-3216	180	5	etch	etch	NOUN
easat-3216	180	6	was	be	AUX
easat-3216	180	7	used	use	VERB
easat-3216	180	8	to	to	PART
easat-3216	180	9	remove	remove	VERB
easat-3216	180	10	the	the	DET
easat-3216	180	11	resist	resist	NOUN
easat-3216	180	12	from	from	ADP
easat-3216	180	13	the	the	DET
easat-3216	180	14	surface	surface	NOUN
easat-3216	180	15	.	.	PUNCT
easat-3216	181	1	plasmaenhanced	plasmaenhanced	ADJ
easat-3216	181	2	chemical	chemical	NOUN
easat-3216	181	3	vapor	vapor	NOUN
easat-3216	181	4	deposition	deposition	NOUN
easat-3216	181	5	(	(	PUNCT
easat-3216	181	6	pecvd	pecvd	NOUN
easat-3216	181	7	)	)	PUNCT
easat-3216	181	8	was	be	AUX
easat-3216	181	9	used	use	VERB
easat-3216	181	10	to	to	PART
easat-3216	181	11	deposit	deposit	VERB
easat-3216	181	12	the	the	DET
easat-3216	181	13	cladding	cladding	NOUN
easat-3216	181	14	oxide	oxide	NOUN
easat-3216	181	15	with	with	ADP
easat-3216	181	16	a	a	DET
easat-3216	181	17	thickness	thickness	NOUN
easat-3216	181	18	of	of	ADP
easat-3216	181	19	2.2	2.2	NUM
easat-3216	181	20	µm	µm	NOUN
easat-3216	181	21	.	.	PUNCT
easat-3216	182	1	the	the	DET
easat-3216	182	2	deposition	deposition	NOUN
easat-3216	182	3	procedure	procedure	NOUN
easat-3216	182	4	was	be	AUX
easat-3216	182	5	based	base	VERB
easat-3216	182	6	on	on	ADP
easat-3216	182	7	tetraethyl	tetraethyl	PROPN
easat-3216	182	8	orthosilicate	orthosilicate	PROPN
easat-3216	182	9	(	(	PUNCT
easat-3216	182	10	teos	teo	NOUN
easat-3216	182	11	)	)	PUNCT
easat-3216	182	12	.	.	PUNCT
easat-3216	183	1	it	it	PRON
easat-3216	183	2	was	be	AUX
easat-3216	183	3	carried	carry	VERB
easat-3216	183	4	out	out	ADP
easat-3216	183	5	at	at	ADP
easat-3216	183	6	300oc	300oc	PROPN
easat-3216	183	7	.	.	PUNCT
easat-3216	184	1	for	for	ADP
easat-3216	184	2	characterization	characterization	NOUN
easat-3216	184	3	of	of	ADP
easat-3216	184	4	the	the	DET
easat-3216	184	5	circuits	circuit	NOUN
easat-3216	184	6	,	,	PUNCT
easat-3216	184	7	a	a	DET
easat-3216	184	8	custom	custom	ADV
easat-3216	184	9	-	-	PUNCT
easat-3216	184	10	built	build	VERB
easat-3216	184	11	automated	automate	VERB
easat-3216	184	12	test	test	NOUN
easat-3216	184	13	setup	setup	NOUN
easat-3216	184	14	with	with	ADP
easat-3216	184	15	automated	automate	VERB
easat-3216	184	16	control	control	NOUN
easat-3216	184	17	software	software	NOUN
easat-3216	184	18	written	write	VERB
easat-3216	184	19	in	in	ADP
easat-3216	184	20	python	python	NOUN
easat-3216	184	21	was	be	AUX
easat-3216	184	22	used	use	VERB
easat-3216	184	23	.	.	PUNCT
easat-3216	185	1	the	the	DET
easat-3216	185	2	measurements	measurement	NOUN
easat-3216	185	3	were	be	AUX
easat-3216	185	4	performed	perform	VERB
easat-3216	185	5	using	use	VERB
easat-3216	185	6	agilent	agilent	PROPN
easat-3216	185	7	81600b	81600b	PROPN
easat-3216	185	8	tunable	tunable	PROPN
easat-3216	185	9	5498	5498	NUM
easat-3216	185	10	edelweiss	edelweiss	PROPN
easat-3216	185	11	applied	apply	VERB
easat-3216	185	12	science	science	NOUN
easat-3216	185	13	and	and	CCONJ
easat-3216	185	14	technology	technology	NOUN
easat-3216	185	15	issn	issn	PROPN
easat-3216	185	16	:	:	PUNCT
easat-3216	185	17	2576	2576	NUM
easat-3216	185	18	-	-	SYM
easat-3216	185	19	8484	8484	NUM
easat-3216	185	20	vol	vol	NOUN
easat-3216	185	21	.	.	PROPN
easat-3216	185	22	8	8	NUM
easat-3216	185	23	,	,	PUNCT
easat-3216	185	24	no	no	INTJ
easat-3216	185	25	.	.	NOUN
easat-3216	186	1	6	6	NUM
easat-3216	186	2	:	:	SYM
easat-3216	186	3	5490	5490	NUM
easat-3216	186	4	-	-	SYM
easat-3216	186	5	5501	5501	NUM
easat-3216	186	6	,	,	PUNCT
easat-3216	186	7	2024	2024	NUM
easat-3216	186	8	doi	doi	NOUN
easat-3216	186	9	:	:	PUNCT
easat-3216	186	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	186	11	©	©	PROPN
easat-3216	186	12	2024	2024	NUM
easat-3216	186	13	by	by	ADP
easat-3216	186	14	the	the	DET
easat-3216	186	15	authors	author	NOUN
easat-3216	186	16	;	;	PUNCT
easat-3216	186	17	licensee	licensee	PROPN
easat-3216	186	18	learning	learn	VERB
easat-3216	186	19	gate	gate	PROPN
easat-3216	186	20	laser	laser	PROPN
easat-3216	186	21	and	and	CCONJ
easat-3216	186	22	agilent	agilent	PROPN
easat-3216	186	23	81635a	81635a	NUM
easat-3216	186	24	optical	optical	ADJ
easat-3216	186	25	power	power	NOUN
easat-3216	186	26	sensors	sensor	NOUN
easat-3216	186	27	.	.	PUNCT
easat-3216	187	1	a	a	DET
easat-3216	187	2	wavelength	wavelength	NOUN
easat-3216	187	3	was	be	AUX
easat-3216	187	4	used	use	VERB
easat-3216	187	5	with	with	ADP
easat-3216	187	6	a	a	DET
easat-3216	187	7	step	step	NOUN
easat-3216	187	8	size	size	NOUN
easat-3216	187	9	of	of	ADP
easat-3216	187	10	10	10	NUM
easat-3216	187	11	pm	pm	NOUN
easat-3216	187	12	.	.	PUNCT
easat-3216	188	1	to	to	PART
easat-3216	188	2	ensure	ensure	VERB
easat-3216	188	3	te	te	ADP
easat-3216	188	4	polarization	polarization	NOUN
easat-3216	188	5	,	,	PUNCT
easat-3216	188	6	a	a	DET
easat-3216	188	7	polarization	polarization	NOUN
easat-3216	188	8	maintaining	maintain	VERB
easat-3216	188	9	(	(	PUNCT
easat-3216	188	10	pm	pm	NOUN
easat-3216	188	11	)	)	PUNCT
easat-3216	188	12	fiber	fiber	NOUN
easat-3216	188	13	was	be	AUX
easat-3216	188	14	used	use	VERB
easat-3216	188	15	to	to	PART
easat-3216	188	16	supply	supply	VERB
easat-3216	188	17	light	light	NOUN
easat-3216	188	18	to	to	ADP
easat-3216	188	19	the	the	DET
easat-3216	188	20	grating	grate	VERB
easat-3216	188	21	couplers	coupler	NOUN
easat-3216	188	22	.	.	PUNCT
easat-3216	189	1	table	table	NOUN
easat-3216	189	2	3	3	NUM
easat-3216	189	3	.	.	PUNCT
easat-3216	189	4	comparison	comparison	NOUN
easat-3216	189	5	of	of	ADP
easat-3216	189	6	the	the	DET
easat-3216	189	7	proposed	propose	VERB
easat-3216	189	8	chip	chip	NOUN
easat-3216	189	9	design	design	NOUN
easat-3216	189	10	with	with	ADP
easat-3216	189	11	contemporary	contemporary	ADJ
easat-3216	189	12	works	work	NOUN
easat-3216	189	13	.	.	PUNCT
easat-3216	190	1	ref	ref	NOUN
easat-3216	190	2	.	.	PUNCT
easat-3216	191	1	no	no	INTJ
easat-3216	191	2	.	.	PUNCT
easat-3216	192	1	of	of	ADP
easat-3216	192	2	designs	design	NOUN
easat-3216	192	3	𝝀	𝝀	PROPN
easat-3216	192	4	max	max	PROPN
easat-3216	192	5	.	.	PROPN
easat-3216	193	1	fsr	fsr	PROPN
easat-3216	193	2	min	min	PROPN
easat-3216	193	3	.	.	PROPN
easat-3216	193	4	fsr	fsr	PROPN
easat-3216	193	5	fabrication	fabrication	NOUN
easat-3216	193	6	[	[	X
easat-3216	193	7	18	18	NUM
easat-3216	193	8	]	]	SYM
easat-3216	193	9	4	4	NUM
easat-3216	193	10	1.5	1.5	NUM
easat-3216	193	11	1.6	1.6	NUM
easat-3216	193	12	µm	µm	ADP
easat-3216	193	13	6.56	6.56	NUM
easat-3216	193	14	nm	nm	NOUN
easat-3216	193	15	0.81	0.81	NUM
easat-3216	193	16	nm	nm	NOUN
easat-3216	193	17	wnf	wnf	NOUN
easat-3216	193	18	[	[	X
easat-3216	193	19	19	19	NUM
easat-3216	193	20	]	]	SYM
easat-3216	193	21	5	5	NUM
easat-3216	193	22	1.5	1.5	NUM
easat-3216	193	23	1.6	1.6	NUM
easat-3216	193	24	µm	µm	ADP
easat-3216	193	25	ant	ant	NOUN
easat-3216	193	26	and	and	CCONJ
easat-3216	193	27	wnf	wnf	NOUN
easat-3216	193	28	[	[	X
easat-3216	193	29	20	20	NUM
easat-3216	193	30	]	]	SYM
easat-3216	193	31	7	7	NUM
easat-3216	193	32	1.5	1.5	NUM
easat-3216	193	33	1.6	1.6	NUM
easat-3216	193	34	µm	µm	ADP
easat-3216	193	35	14	14	NUM
easat-3216	193	36	nm	nm	NUM
easat-3216	193	37	3.19	3.19	NUM
easat-3216	193	38	nm	nm	NOUN
easat-3216	193	39	wnf	wnf	NOUN
easat-3216	193	40	[	[	X
easat-3216	193	41	21	21	NUM
easat-3216	193	42	]	]	SYM
easat-3216	193	43	2	2	NUM
easat-3216	193	44	1.2	1.2	NUM
easat-3216	193	45	1.3	1.3	NUM
easat-3216	193	46	µm	µm	ADP
easat-3216	193	47	ibm	ibm	PROPN
easat-3216	194	1	[	[	X
easat-3216	194	2	22	22	NUM
easat-3216	194	3	]	]	SYM
easat-3216	194	4	1	1	NUM
easat-3216	194	5	1.54	1.54	NUM
easat-3216	194	6	–	–	PUNCT
easat-3216	194	7	1.62	1.62	NUM
easat-3216	194	8	µm	µm	ADP
easat-3216	194	9	ant	ant	NOUN
easat-3216	194	10	this	this	DET
easat-3216	194	11	work	work	NOUN
easat-3216	194	12	4	4	NUM
easat-3216	194	13	1.5	1.5	NUM
easat-3216	194	14	1.6	1.6	NUM
easat-3216	194	15	µm	µm	ADP
easat-3216	194	16	62.15	62.15	NUM
easat-3216	194	17	nm	nm	NUM
easat-3216	194	18	1.96	1.96	NUM
easat-3216	194	19	nm	nm	NOUN
easat-3216	194	20	ant	ant	NOUN
easat-3216	194	21	5	5	NUM
easat-3216	194	22	.	.	PUNCT
easat-3216	194	23	conclusion	conclusion	NOUN
easat-3216	194	24	in	in	ADP
easat-3216	194	25	this	this	DET
easat-3216	194	26	paper	paper	NOUN
easat-3216	194	27	,	,	PUNCT
easat-3216	194	28	4	4	NUM
easat-3216	194	29	new	new	ADJ
easat-3216	194	30	mzi	mzi	NOUN
easat-3216	194	31	circuits	circuit	NOUN
easat-3216	194	32	have	have	AUX
easat-3216	194	33	been	be	AUX
easat-3216	194	34	presented	present	VERB
easat-3216	194	35	.	.	PUNCT
easat-3216	195	1	a	a	DET
easat-3216	195	2	complete	complete	ADJ
easat-3216	195	3	procedure	procedure	NOUN
easat-3216	195	4	has	have	AUX
easat-3216	195	5	been	be	AUX
easat-3216	195	6	laid	lay	VERB
easat-3216	195	7	out	out	ADP
easat-3216	195	8	including	include	VERB
easat-3216	195	9	their	their	PRON
easat-3216	195	10	theoretical	theoretical	ADJ
easat-3216	195	11	modeling	modeling	NOUN
easat-3216	195	12	,	,	PUNCT
easat-3216	195	13	design	design	NOUN
easat-3216	195	14	specifications	specification	NOUN
easat-3216	195	15	and	and	CCONJ
easat-3216	195	16	experimental	experimental	ADJ
easat-3216	195	17	validation	validation	NOUN
easat-3216	195	18	.	.	PUNCT
easat-3216	196	1	the	the	DET
easat-3216	196	2	designs	design	NOUN
easat-3216	196	3	have	have	AUX
easat-3216	196	4	been	be	AUX
easat-3216	196	5	investigated	investigate	VERB
easat-3216	196	6	using	use	VERB
easat-3216	196	7	klayout	klayout	NOUN
easat-3216	196	8	,	,	PUNCT
easat-3216	196	9	ansys	ansys	PROPN
easat-3216	196	10	lumerical	lumerical	ADJ
easat-3216	196	11	and	and	CCONJ
easat-3216	196	12	matlab	matlab	PROPN
easat-3216	196	13	.	.	PUNCT
easat-3216	197	1	the	the	DET
easat-3216	197	2	layout	layout	NOUN
easat-3216	197	3	is	be	AUX
easat-3216	197	4	fabricated	fabricate	VERB
easat-3216	197	5	by	by	ADP
easat-3216	197	6	applied	apply	VERB
easat-3216	197	7	nanotools	nanotools	PROPN
easat-3216	197	8	inc	inc	PROPN
easat-3216	197	9	.	.	PROPN
easat-3216	197	10	through	through	ADP
easat-3216	197	11	electron	electron	NOUN
easat-3216	197	12	beam	beam	NOUN
easat-3216	197	13	lithography	lithography	NOUN
easat-3216	197	14	(	(	PUNCT
easat-3216	197	15	ebl	ebl	PROPN
easat-3216	197	16	)	)	PUNCT
easat-3216	197	17	.	.	PUNCT
easat-3216	198	1	a	a	DET
easat-3216	198	2	comparison	comparison	NOUN
easat-3216	198	3	has	have	AUX
easat-3216	198	4	been	be	AUX
easat-3216	198	5	provided	provide	VERB
easat-3216	198	6	between	between	ADP
easat-3216	198	7	simulation	simulation	NOUN
easat-3216	198	8	and	and	CCONJ
easat-3216	198	9	experimental	experimental	ADJ
easat-3216	198	10	results	result	NOUN
easat-3216	198	11	.	.	PUNCT
easat-3216	199	1	this	this	DET
easat-3216	199	2	work	work	NOUN
easat-3216	199	3	can	can	AUX
easat-3216	199	4	be	be	AUX
easat-3216	199	5	extended	extend	VERB
easat-3216	199	6	to	to	ADP
easat-3216	199	7	applications	application	NOUN
easat-3216	199	8	like	like	ADP
easat-3216	199	9	optical	optical	ADJ
easat-3216	199	10	computing	computing	NOUN
easat-3216	199	11	,	,	PUNCT
easat-3216	199	12	biophotonic	biophotonic	ADJ
easat-3216	199	13	sensing	sensing	NOUN
easat-3216	199	14	,	,	PUNCT
easat-3216	199	15	communications	communication	NOUN
easat-3216	199	16	,	,	PUNCT
easat-3216	199	17	etc	etc	X
easat-3216	199	18	.	.	X
easat-3216	200	1	the	the	DET
easat-3216	200	2	integrated	integrate	VERB
easat-3216	200	3	optical	optical	ADJ
easat-3216	200	4	circuits	circuit	NOUN
easat-3216	200	5	provide	provide	VERB
easat-3216	200	6	unique	unique	ADJ
easat-3216	200	7	fsr	fsr	NOUN
easat-3216	200	8	values	value	NOUN
easat-3216	200	9	as	as	ADV
easat-3216	200	10	well	well	ADV
easat-3216	200	11	compact	compact	ADJ
easat-3216	200	12	size	size	NOUN
easat-3216	200	13	.	.	PUNCT
easat-3216	201	1	mzi	mzi	NOUN
easat-3216	201	2	3	3	NUM
easat-3216	201	3	is	be	AUX
easat-3216	201	4	of	of	ADP
easat-3216	201	5	special	special	ADJ
easat-3216	201	6	interest	interest	NOUN
easat-3216	201	7	in	in	ADP
easat-3216	201	8	this	this	DET
easat-3216	201	9	regard	regard	NOUN
easat-3216	201	10	as	as	SCONJ
easat-3216	201	11	it	it	PRON
easat-3216	201	12	provides	provide	VERB
easat-3216	201	13	a	a	DET
easat-3216	201	14	very	very	ADV
easat-3216	201	15	sharp	sharp	ADJ
easat-3216	201	16	dips	dip	NOUN
easat-3216	201	17	as	as	ADV
easat-3216	201	18	well	well	ADV
easat-3216	201	19	as	as	ADP
easat-3216	201	20	broadband	broadband	NOUN
easat-3216	201	21	response	response	NOUN
easat-3216	201	22	.	.	PUNCT
easat-3216	202	1	the	the	DET
easat-3216	202	2	range	range	NOUN
easat-3216	202	3	of	of	ADP
easat-3216	202	4	fsr	fsr	PROPN
easat-3216	202	5	values	value	NOUN
easat-3216	202	6	reported	report	VERB
easat-3216	202	7	in	in	ADP
easat-3216	202	8	this	this	DET
easat-3216	202	9	work	work	NOUN
easat-3216	202	10	is	be	AUX
easat-3216	202	11	greater	great	ADJ
easat-3216	202	12	than	than	ADP
easat-3216	202	13	the	the	DET
easat-3216	202	14	other	other	ADJ
easat-3216	202	15	recent	recent	ADJ
easat-3216	202	16	works	work	NOUN
easat-3216	202	17	as	as	SCONJ
easat-3216	202	18	shown	show	VERB
easat-3216	202	19	in	in	ADP
easat-3216	202	20	table	table	NOUN
easat-3216	202	21	3	3	NUM
easat-3216	202	22	.	.	PUNCT
easat-3216	203	1	the	the	DET
easat-3216	203	2	waveguide	waveguide	ADJ
easat-3216	203	3	modeling	modeling	NOUN
easat-3216	203	4	method	method	NOUN
easat-3216	203	5	used	use	VERB
easat-3216	203	6	in	in	ADP
easat-3216	203	7	this	this	DET
easat-3216	203	8	work	work	NOUN
easat-3216	203	9	is	be	AUX
easat-3216	203	10	different	different	ADJ
easat-3216	203	11	compared	compare	VERB
easat-3216	203	12	to	to	ADP
easat-3216	203	13	other	other	ADJ
easat-3216	203	14	works	work	NOUN
easat-3216	203	15	.	.	PUNCT
easat-3216	204	1	an	an	DET
easat-3216	204	2	example	example	NOUN
easat-3216	204	3	is	be	AUX
easat-3216	204	4	[	[	X
easat-3216	204	5	15	15	NUM
easat-3216	204	6	]	]	PUNCT
easat-3216	204	7	which	which	PRON
easat-3216	204	8	uses	use	VERB
easat-3216	204	9	different	different	ADJ
easat-3216	204	10	material	material	NOUN
easat-3216	204	11	models	model	NOUN
easat-3216	204	12	.	.	PUNCT
easat-3216	205	1	the	the	DET
easat-3216	205	2	signals	signal	NOUN
easat-3216	205	3	from	from	ADP
easat-3216	205	4	each	each	PRON
easat-3216	205	5	of	of	ADP
easat-3216	205	6	the	the	DET
easat-3216	205	7	two	two	NUM
easat-3216	205	8	mzi	mzi	NOUN
easat-3216	205	9	channels	channel	NOUN
easat-3216	205	10	have	have	AUX
easat-3216	205	11	also	also	ADV
easat-3216	205	12	been	be	AUX
easat-3216	205	13	presented	present	VERB
easat-3216	205	14	here	here	ADV
easat-3216	205	15	to	to	PART
easat-3216	205	16	show	show	VERB
easat-3216	205	17	phase	phase	NOUN
easat-3216	205	18	difference	difference	NOUN
easat-3216	205	19	because	because	SCONJ
easat-3216	205	20	of	of	ADP
easat-3216	205	21	path	path	NOUN
easat-3216	205	22	length	length	NOUN
easat-3216	205	23	differences	difference	NOUN
easat-3216	205	24	.	.	PUNCT
easat-3216	206	1	this	this	PRON
easat-3216	206	2	makes	make	VERB
easat-3216	206	3	it	it	PRON
easat-3216	206	4	a	a	DET
easat-3216	206	5	unique	unique	ADJ
easat-3216	206	6	1x2	1x2	NUM
easat-3216	206	7	circuit	circuit	NOUN
easat-3216	206	8	.	.	PUNCT
easat-3216	207	1	works	work	VERB
easat-3216	207	2	like	like	ADP
easat-3216	207	3	[	[	X
easat-3216	207	4	13	13	NUM
easat-3216	207	5	]	]	PUNCT
easat-3216	207	6	and	and	CCONJ
easat-3216	207	7	[	[	X
easat-3216	207	8	16	16	NUM
easat-3216	207	9	]	]	PUNCT
easat-3216	207	10	use	use	VERB
easat-3216	207	11	other	other	ADJ
easat-3216	207	12	layout	layout	NOUN
easat-3216	207	13	strategies	strategy	NOUN
easat-3216	207	14	.	.	PUNCT
easat-3216	208	1	for	for	ADP
easat-3216	208	2	example	example	NOUN
easat-3216	208	3	,	,	PUNCT
easat-3216	208	4	[	[	X
easat-3216	208	5	16	16	NUM
easat-3216	208	6	]	]	PUNCT
easat-3216	208	7	uses	use	VERB
easat-3216	208	8	2x2	2x2	NUM
easat-3216	208	9	strategy	strategy	NOUN
easat-3216	208	10	.	.	PUNCT
easat-3216	209	1	also	also	ADV
easat-3216	209	2	,	,	PUNCT
easat-3216	209	3	characterization	characterization	NOUN
easat-3216	209	4	of	of	ADP
easat-3216	209	5	noise	noise	NOUN
easat-3216	209	6	floor	floor	NOUN
easat-3216	209	7	has	have	AUX
easat-3216	209	8	hardly	hardly	ADV
easat-3216	209	9	been	be	AUX
easat-3216	209	10	discussed	discuss	VERB
easat-3216	209	11	in	in	ADP
easat-3216	209	12	earlier	early	ADJ
easat-3216	209	13	works	work	NOUN
easat-3216	209	14	.	.	PUNCT
easat-3216	210	1	5499	5499	NUM
easat-3216	210	2	edelweiss	edelweiss	PROPN
easat-3216	210	3	applied	apply	VERB
easat-3216	210	4	science	science	NOUN
easat-3216	210	5	and	and	CCONJ
easat-3216	210	6	technology	technology	NOUN
easat-3216	210	7	issn	issn	PROPN
easat-3216	210	8	:	:	PUNCT
easat-3216	210	9	2576	2576	NUM
easat-3216	210	10	-	-	SYM
easat-3216	210	11	8484	8484	NUM
easat-3216	210	12	vol	vol	NOUN
easat-3216	210	13	.	.	PROPN
easat-3216	210	14	8	8	NUM
easat-3216	210	15	,	,	PUNCT
easat-3216	210	16	no	no	INTJ
easat-3216	210	17	.	.	NOUN
easat-3216	211	1	6	6	NUM
easat-3216	211	2	:	:	SYM
easat-3216	211	3	5490	5490	NUM
easat-3216	211	4	-	-	SYM
easat-3216	211	5	5501	5501	NUM
easat-3216	211	6	,	,	PUNCT
easat-3216	211	7	2024	2024	NUM
easat-3216	211	8	doi	doi	NOUN
easat-3216	211	9	:	:	PUNCT
easat-3216	211	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	211	11	©	©	PROPN
easat-3216	211	12	2024	2024	NUM
easat-3216	211	13	by	by	ADP
easat-3216	211	14	the	the	DET
easat-3216	211	15	authors	author	NOUN
easat-3216	211	16	;	;	PUNCT
easat-3216	212	1	licensee	licensee	PROPN
easat-3216	212	2	learning	learn	VERB
easat-3216	212	3	gate	gate	PROPN
easat-3216	212	4	figure	figure	NOUN
easat-3216	212	5	6	6	NUM
easat-3216	212	6	.	.	PUNCT
easat-3216	212	7	optical	optical	ADJ
easat-3216	212	8	signals	signal	NOUN
easat-3216	212	9	received	receive	VERB
easat-3216	212	10	at	at	ADP
easat-3216	212	11	the	the	DET
easat-3216	212	12	two	two	NUM
easat-3216	212	13	outputs	output	NOUN
easat-3216	212	14	of	of	ADP
easat-3216	212	15	the	the	DET
easat-3216	212	16	mzis	mzi	NOUN
easat-3216	212	17	.	.	PUNCT
easat-3216	213	1	funding	funding	NOUN
easat-3216	213	2	:	:	PUNCT
easat-3216	213	3	5500	5500	NUM
easat-3216	213	4	edelweiss	edelweiss	PROPN
easat-3216	213	5	applied	apply	VERB
easat-3216	213	6	science	science	NOUN
easat-3216	213	7	and	and	CCONJ
easat-3216	213	8	technology	technology	NOUN
easat-3216	213	9	issn	issn	PROPN
easat-3216	213	10	:	:	PUNCT
easat-3216	213	11	2576	2576	NUM
easat-3216	213	12	-	-	SYM
easat-3216	213	13	8484	8484	NUM
easat-3216	213	14	vol	vol	NOUN
easat-3216	213	15	.	.	PROPN
easat-3216	213	16	8	8	NUM
easat-3216	213	17	,	,	PUNCT
easat-3216	213	18	no	no	INTJ
easat-3216	213	19	.	.	NOUN
easat-3216	214	1	6	6	NUM
easat-3216	214	2	:	:	SYM
easat-3216	214	3	5490	5490	NUM
easat-3216	214	4	-	-	SYM
easat-3216	214	5	5501	5501	NUM
easat-3216	214	6	,	,	PUNCT
easat-3216	214	7	2024	2024	NUM
easat-3216	214	8	doi	doi	NOUN
easat-3216	214	9	:	:	PUNCT
easat-3216	214	10	10.55214/25768484.v8i6.3216	10.55214/25768484.v8i6.3216	NUM
easat-3216	214	11	©	©	PROPN
easat-3216	214	12	2024	2024	NUM
easat-3216	214	13	by	by	ADP
easat-3216	214	14	the	the	DET
easat-3216	214	15	authors	author	NOUN
easat-3216	214	16	;	;	PUNCT
easat-3216	214	17	licensee	licensee	PROPN
easat-3216	214	18	learning	learning	NOUN
easat-3216	214	19	gate	gate	NOUN
easat-3216	214	20	this	this	DET
easat-3216	214	21	work	work	NOUN
easat-3216	214	22	was	be	AUX
easat-3216	214	23	supported	support	VERB
easat-3216	214	24	by	by	ADP
easat-3216	214	25	nserc	nserc	NOUN
easat-3216	214	26	(	(	PUNCT
easat-3216	214	27	natural	natural	ADJ
easat-3216	214	28	sciences	science	NOUN
easat-3216	214	29	and	and	CCONJ
easat-3216	214	30	engineering	engineering	NOUN
easat-3216	214	31	research	research	NOUN
easat-3216	214	32	council	council	PROPN
easat-3216	214	33	)	)	PUNCT
easat-3216	214	34	of	of	ADP
easat-3216	214	35	canada	canada	PROPN
easat-3216	214	36	.	.	PUNCT
easat-3216	215	1	arslan	arslan	PROPN
easat-3216	215	2	asim	asim	PROPN
easat-3216	216	1	thanks	thank	NOUN
easat-3216	216	2	the	the	DET
easat-3216	216	3	financial	financial	ADJ
easat-3216	216	4	support	support	NOUN
easat-3216	216	5	from	from	ADP
easat-3216	216	6	research	research	PROPN
easat-3216	216	7	nova	nova	PROPN
easat-3216	216	8	scotia	scotia	PROPN
easat-3216	216	9	and	and	CCONJ
easat-3216	216	10	dalhousie	dalhousie	PROPN
easat-3216	216	11	university	university	PROPN
easat-3216	216	12	.	.	PUNCT
easat-3216	217	1	acknowledgments	acknowledgment	NOUN
easat-3216	217	2	:	:	PUNCT
easat-3216	217	3	the	the	DET
easat-3216	217	4	course	course	NOUN
easat-3216	217	5	edx	edx	PROPN
easat-3216	217	6	ubcx	ubcx	PROPN
easat-3216	217	7	phot1x	phot1x	PROPN
easat-3216	217	8	silicon	silicon	NOUN
easat-3216	217	9	photonics	photonic	NOUN
easat-3216	217	10	design	design	NOUN
easat-3216	217	11	,	,	PUNCT
easat-3216	217	12	fabrication	fabrication	NOUN
easat-3216	217	13	and	and	CCONJ
easat-3216	217	14	data	datum	NOUN
easat-3216	217	15	analysis	analysis	NOUN
easat-3216	217	16	,	,	PUNCT
easat-3216	217	17	which	which	PRON
easat-3216	217	18	is	be	AUX
easat-3216	217	19	supported	support	VERB
easat-3216	217	20	by	by	ADP
easat-3216	217	21	the	the	DET
easat-3216	217	22	natural	natural	ADJ
easat-3216	217	23	sciences	sciences	PROPN
easat-3216	217	24	and	and	CCONJ
easat-3216	217	25	engineering	engineering	NOUN
easat-3216	217	26	research	research	NOUN
easat-3216	217	27	council	council	PROPN
easat-3216	217	28	of	of	ADP
easat-3216	217	29	canada	canada	PROPN
easat-3216	217	30	(	(	PUNCT
easat-3216	217	31	nserc	nserc	PROPN
easat-3216	217	32	)	)	PUNCT
easat-3216	217	33	silicon	silicon	NOUN
easat-3216	217	34	electronic	electronic	ADJ
easat-3216	217	35	-	-	PUNCT
easat-3216	217	36	photonic	photonic	ADJ
easat-3216	217	37	integrated	integrate	VERB
easat-3216	217	38	circuits	circuit	NOUN
easat-3216	217	39	(	(	PUNCT
easat-3216	217	40	siepic	siepic	NOUN
easat-3216	217	41	)	)	PUNCT
easat-3216	217	42	program	program	NOUN
easat-3216	217	43	,	,	PUNCT
easat-3216	217	44	needs	need	VERB
easat-3216	217	45	special	special	ADJ
easat-3216	217	46	acknowledgement	acknowledgement	NOUN
easat-3216	217	47	.	.	PUNCT
easat-3216	218	1	it	it	PRON
easat-3216	218	2	was	be	AUX
easat-3216	218	3	through	through	ADP
easat-3216	218	4	this	this	DET
easat-3216	218	5	course	course	NOUN
easat-3216	218	6	that	that	SCONJ
easat-3216	218	7	access	access	NOUN
easat-3216	218	8	to	to	ADP
easat-3216	218	9	software	software	NOUN
easat-3216	218	10	(	(	PUNCT
easat-3216	218	11	lumerical	lumerical	ADJ
easat-3216	218	12	solutions	solution	NOUN
easat-3216	218	13	,	,	PUNCT
easat-3216	218	14	inc	inc	PROPN
easat-3216	218	15	.	.	PROPN
easat-3216	218	16	)	)	PUNCT
easat-3216	219	1	and	and	CCONJ
easat-3216	219	2	hardware	hardware	NOUN
easat-3216	219	3	resources	resource	NOUN
easat-3216	219	4	became	become	VERB
easat-3216	219	5	possible	possible	ADJ
easat-3216	219	6	.	.	PUNCT
easat-3216	220	1	the	the	DET
easat-3216	220	2	devices	device	NOUN
easat-3216	220	3	were	be	AUX
easat-3216	220	4	fabricated	fabricate	VERB
easat-3216	220	5	by	by	ADP
easat-3216	220	6	cameron	cameron	PROPN
easat-3216	220	7	horvath	horvath	PROPN
easat-3216	220	8	at	at	ADP
easat-3216	220	9	applied	apply	VERB
easat-3216	220	10	nanotools	nanotool	NOUN
easat-3216	220	11	,	,	PUNCT
easat-3216	220	12	inc	inc	PROPN
easat-3216	220	13	.	.	PROPN
easat-3216	220	14	iman	iman	PROPN
easat-3216	220	15	taghavi	taghavi	PROPN
easat-3216	220	16	performed	perform	VERB
easat-3216	220	17	the	the	DET
easat-3216	220	18	measurements	measurement	NOUN
easat-3216	220	19	at	at	ADP
easat-3216	220	20	the	the	DET
easat-3216	220	21	university	university	PROPN
easat-3216	220	22	of	of	ADP
easat-3216	220	23	british	british	PROPN
easat-3216	220	24	columbia	columbia	PROPN
easat-3216	220	25	.	.	PUNCT
easat-3216	221	1	copyright	copyright	NOUN
easat-3216	221	2	:	:	PUNCT
easat-3216	221	3	©	©	PROPN
easat-3216	221	4	2024	2024	NUM
easat-3216	221	5	by	by	ADP
easat-3216	221	6	the	the	DET
easat-3216	221	7	authors	author	NOUN
easat-3216	221	8	.	.	PUNCT
easat-3216	222	1	this	this	DET
easat-3216	222	2	article	article	NOUN
easat-3216	222	3	is	be	AUX
easat-3216	222	4	an	an	DET
easat-3216	222	5	open	open	ADJ
easat-3216	222	6	access	access	NOUN
easat-3216	222	7	article	article	NOUN
easat-3216	222	8	distributed	distribute	VERB
easat-3216	222	9	under	under	ADP
easat-3216	222	10	the	the	DET
easat-3216	222	11	terms	term	NOUN
easat-3216	222	12	and	and	CCONJ
easat-3216	222	13	conditions	condition	NOUN
easat-3216	222	14	of	of	ADP
easat-3216	222	15	the	the	DET
easat-3216	222	16	creative	creative	ADJ
easat-3216	222	17	commons	common	NOUN
easat-3216	222	18	attribution	attribution	NOUN
easat-3216	222	19	(	(	PUNCT
easat-3216	222	20	cc	cc	NOUN
easat-3216	222	21	by	by	ADP
easat-3216	222	22	)	)	PUNCT
easat-3216	222	23	license	license	NOUN
easat-3216	222	24	(	(	PUNCT
easat-3216	222	25	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
easat-3216	222	26	)	)	PUNCT
easat-3216	222	27	.	.	PUNCT
easat-3216	223	1	references	reference	NOUN
easat-3216	223	2	[	[	X
easat-3216	223	3	1	1	NUM
easat-3216	223	4	]	]	X
easat-3216	223	5	g.e	g.e	PROPN
easat-3216	223	6	.	.	PROPN
easat-3216	223	7	moore	moore	PROPN
easat-3216	223	8	,	,	PUNCT
easat-3216	223	9	"	"	PUNCT
easat-3216	223	10	cramming	cram	VERB
easat-3216	223	11	more	more	ADJ
easat-3216	223	12	components	component	NOUN
easat-3216	223	13	onto	onto	ADP
easat-3216	223	14	integrated	integrated	ADJ
easat-3216	223	15	circuits	circuit	NOUN
easat-3216	223	16	"	"	PUNCT
easat-3216	223	17	,	,	PUNCT
easat-3216	223	18	electronics	electronic	NOUN
easat-3216	223	19	,	,	PUNCT
easat-3216	223	20	vol	vol	NOUN
easat-3216	223	21	.	.	PROPN
easat-3216	224	1	38	38	NUM
easat-3216	224	2	,	,	PUNCT
easat-3216	224	3	no	no	INTJ
easat-3216	224	4	.	.	NOUN
easat-3216	224	5	8	8	NUM
easat-3216	224	6	,	,	PUNCT
easat-3216	224	7	pp	pp	ADJ
easat-3216	224	8	.	.	PUNCT
easat-3216	225	1	1	1	NUM
easat-3216	225	2	-	-	SYM
easat-3216	225	3	14	14	NUM
easat-3216	225	4	,	,	PUNCT
easat-3216	225	5	1965	1965	NUM
easat-3216	225	6	.	.	PUNCT
easat-3216	226	1	[	[	X
easat-3216	226	2	2	2	X
easat-3216	226	3	]	]	PUNCT
easat-3216	226	4	t.	t.	PROPN
easat-3216	226	5	n.	n.	PROPN
easat-3216	226	6	theis	theis	PROPN
easat-3216	226	7	and	and	CCONJ
easat-3216	226	8	h.	h.	PROPN
easat-3216	226	9	p.	p.	PROPN
easat-3216	226	10	wong	wong	PROPN
easat-3216	226	11	,	,	PUNCT
easat-3216	226	12	“	"	PUNCT
easat-3216	226	13	the	the	DET
easat-3216	226	14	end	end	NOUN
easat-3216	226	15	of	of	ADP
easat-3216	226	16	moore	moore	PROPN
easat-3216	226	17	’s	’s	PART
easat-3216	226	18	law	law	NOUN
easat-3216	226	19	:	:	PUNCT
easat-3216	226	20	a	a	DET
easat-3216	226	21	new	new	ADJ
easat-3216	226	22	beginning	beginning	NOUN
easat-3216	226	23	for	for	ADP
easat-3216	226	24	information	information	NOUN
easat-3216	226	25	technology	technology	NOUN
easat-3216	226	26	,	,	PUNCT
easat-3216	226	27	”	"	PUNCT
easat-3216	226	28	computing	compute	VERB
easat-3216	226	29	in	in	ADP
easat-3216	226	30	science	science	NOUN
easat-3216	226	31	engineering	engineering	NOUN
easat-3216	226	32	,	,	PUNCT
easat-3216	226	33	vol	vol	NOUN
easat-3216	226	34	.	.	PROPN
easat-3216	226	35	19	19	NUM
easat-3216	226	36	,	,	PUNCT
easat-3216	226	37	no	no	INTJ
easat-3216	226	38	.	.	NOUN
easat-3216	226	39	2	2	NUM
easat-3216	226	40	,	,	PUNCT
easat-3216	226	41	pp	pp	ADJ
easat-3216	226	42	.	.	PUNCT
easat-3216	227	1	41–50	41–50	NUM
easat-3216	227	2	,	,	PUNCT
easat-3216	227	3	mar	mar	PROPN
easat-3216	227	4	2017	2017	NUM
easat-3216	227	5	.	.	PUNCT
easat-3216	228	1	[	[	X
easat-3216	228	2	online	online	X
easat-3216	228	3	]	]	X
easat-3216	228	4	.	.	PUNCT
easat-3216	229	1	available	available	ADJ
easat-3216	229	2	:	:	PUNCT
easat-3216	230	1	https://doi.org/10.1109/mcse.2017.29	https://doi.org/10.1109/mcse.2017.29	X
easat-3216	231	1	[	[	X
easat-3216	231	2	3	3	NUM
easat-3216	231	3	]	]	X
easat-3216	231	4	c.	c.	PROPN
easat-3216	231	5	e.	e.	PROPN
easat-3216	231	6	leiserson	leiserson	PROPN
easat-3216	231	7	,	,	PUNCT
easat-3216	231	8	n.	n.	PROPN
easat-3216	231	9	c.	c.	PROPN
easat-3216	231	10	thompson	thompson	PROPN
easat-3216	231	11	,	,	PUNCT
easat-3216	231	12	j.	j.	PROPN
easat-3216	231	13	s.	s.	PROPN
easat-3216	231	14	emer	emer	PROPN
easat-3216	231	15	,	,	PUNCT
easat-3216	231	16	b.	b.	PROPN
easat-3216	231	17	c.	c.	PROPN
easat-3216	231	18	kuszmaul	kuszmaul	PROPN
easat-3216	231	19	,	,	PUNCT
easat-3216	231	20	b.	b.	PROPN
easat-3216	231	21	w.	w.	PROPN
easat-3216	231	22	lampson	lampson	PROPN
easat-3216	231	23	,	,	PUNCT
easat-3216	231	24	d.	d.	PROPN
easat-3216	231	25	sanchez	sanchez	PROPN
easat-3216	231	26	,	,	PUNCT
easat-3216	231	27	and	and	CCONJ
easat-3216	231	28	t.	t.	PROPN
easat-3216	231	29	b.	b.	PROPN
easat-3216	231	30	schardl	schardl	PROPN
easat-3216	231	31	,	,	PUNCT
easat-3216	231	32	“	"	PUNCT
easat-3216	231	33	there	there	PRON
easat-3216	231	34	’s	’	VERB
easat-3216	231	35	plenty	plenty	NOUN
easat-3216	231	36	of	of	ADP
easat-3216	231	37	room	room	NOUN
easat-3216	231	38	at	at	ADP
easat-3216	231	39	the	the	DET
easat-3216	231	40	top	top	NOUN
easat-3216	231	41	:	:	PUNCT
easat-3216	231	42	what	what	PRON
easat-3216	231	43	will	will	AUX
easat-3216	231	44	drive	drive	VERB
easat-3216	231	45	computer	computer	NOUN
easat-3216	231	46	performance	performance	NOUN
easat-3216	231	47	after	after	ADP
easat-3216	231	48	moore	moore	PROPN
easat-3216	231	49	’s	’s	PART
easat-3216	231	50	law	law	NOUN
easat-3216	231	51	?	?	PUNCT
easat-3216	231	52	”	"	PUNCT
easat-3216	232	1	science	science	NOUN
easat-3216	232	2	,	,	PUNCT
easat-3216	232	3	vol	vol	NOUN
easat-3216	232	4	.	.	PROPN
easat-3216	232	5	368	368	NUM
easat-3216	232	6	,	,	PUNCT
easat-3216	232	7	no	no	INTJ
easat-3216	232	8	.	.	NOUN
easat-3216	232	9	6495	6495	NUM
easat-3216	232	10	,	,	PUNCT
easat-3216	232	11	jun	jun	PROPN
easat-3216	232	12	2020	2020	NUM
easat-3216	232	13	.	.	PUNCT
easat-3216	233	1	[	[	X
easat-3216	233	2	online	online	X
easat-3216	233	3	]	]	X
easat-3216	233	4	.	.	PUNCT
easat-3216	234	1	available	available	ADJ
easat-3216	234	2	:	:	PUNCT
easat-3216	235	1	https://science.sciencemag.org/content/368/6495/eaam9744	https://science.sciencemag.org/content/368/6495/eaam9744	NOUN
easat-3216	235	2	[	[	X
easat-3216	235	3	4	4	NUM
easat-3216	235	4	]	]	PUNCT
easat-3216	235	5	m.	m.	NOUN
easat-3216	235	6	horowitz	horowitz	PROPN
easat-3216	235	7	,	,	PUNCT
easat-3216	235	8	“	"	PUNCT
easat-3216	235	9	computing	compute	VERB
easat-3216	235	10	’s	’s	PART
easat-3216	235	11	energy	energy	NOUN
easat-3216	235	12	problem	problem	NOUN
easat-3216	235	13	(	(	PUNCT
easat-3216	235	14	and	and	CCONJ
easat-3216	235	15	what	what	PRON
easat-3216	235	16	we	we	PRON
easat-3216	235	17	can	can	AUX
easat-3216	235	18	do	do	VERB
easat-3216	235	19	about	about	ADP
easat-3216	235	20	it	it	PRON
easat-3216	235	21	)	)	PUNCT
easat-3216	235	22	,	,	PUNCT
easat-3216	235	23	”	"	PUNCT
easat-3216	235	24	in	in	ADP
easat-3216	235	25	2014	2014	NUM
easat-3216	235	26	ieee	ieee	PROPN
easat-3216	235	27	international	international	PROPN
easat-3216	235	28	solidstate	solidstate	PROPN
easat-3216	235	29	circuits	circuit	VERB
easat-3216	235	30	conference	conference	NOUN
easat-3216	235	31	digest	digest	NOUN
easat-3216	235	32	of	of	ADP
easat-3216	235	33	technical	technical	ADJ
easat-3216	235	34	papers	paper	NOUN
easat-3216	235	35	(	(	PUNCT
easat-3216	235	36	isscc	isscc	ADJ
easat-3216	235	37	)	)	PUNCT
easat-3216	235	38	.	.	PUNCT
easat-3216	236	1	ieee	ieee	PROPN
easat-3216	236	2	,	,	PUNCT
easat-3216	236	3	feb	feb	PROPN
easat-3216	236	4	2014	2014	NUM
easat-3216	236	5	,	,	PUNCT
easat-3216	236	6	pp	pp	ADJ
easat-3216	236	7	.	.	PUNCT
easat-3216	237	1	10–14	10–14	NUM
easat-3216	237	2	.	.	PUNCT
easat-3216	238	1	[	[	X
easat-3216	238	2	online	online	X
easat-3216	238	3	]	]	X
easat-3216	238	4	.	.	PUNCT
easat-3216	239	1	available	available	ADJ
easat-3216	239	2	:	:	PUNCT
easat-3216	240	1	http://ieeexplore.ieee.org/document/6757323/	http://ieeexplore.ieee.org/document/6757323/	X
easat-3216	241	1	[	[	X
easat-3216	241	2	5	5	NUM
easat-3216	241	3	]	]	PUNCT
easat-3216	241	4	k.	k.	NOUN
easat-3216	241	5	leswing	leswing	PROPN
easat-3216	241	6	,	,	PUNCT
easat-3216	241	7	“	"	PUNCT
easat-3216	241	8	intel	intel	PROPN
easat-3216	241	9	says	say	VERB
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easat-3216	241	16	and	and	CCONJ
easat-3216	241	17	well	well	ADV
easat-3216	241	18	.	.	PUNCT
easat-3216	242	1	nvidia	nvidia	PROPN
easat-3216	242	2	says	say	VERB
easat-3216	242	3	it	it	PRON
easat-3216	242	4	’s	’s	AUX
easat-3216	242	5	ended	end	VERB
easat-3216	242	6	,	,	PUNCT
easat-3216	242	7	”	"	PUNCT
easat-3216	242	8	cnbc.com	cnbc.com	X
easat-3216	242	9	.	.	PUNCT
easat-3216	243	1	https://www.cnbc.com/2022/09/27/intel-says-moores-law-is-still-alive-nvidia-says-its-ended.html	https://www.cnbc.com/2022/09/27/intel-says-moores-law-is-still-alive-nvidia-says-its-ended.html	X
easat-3216	243	2	(	(	PUNCT
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easat-3216	243	6	5	5	NUM
easat-3216	243	7	,	,	PUNCT
easat-3216	243	8	2024	2024	NUM
easat-3216	243	9	)	)	PUNCT
easat-3216	243	10	.	.	PUNCT
easat-3216	244	1	[	[	X
easat-3216	244	2	6	6	X
easat-3216	244	3	]	]	PUNCT
easat-3216	244	4	s.	s.	PROPN
easat-3216	244	5	e.	e.	PROPN
easat-3216	244	6	miller	miller	PROPN
easat-3216	244	7	,	,	PUNCT
easat-3216	244	8	"	"	PUNCT
easat-3216	244	9	integrated	integrated	ADJ
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easat-3216	244	11	:	:	PUNCT
easat-3216	244	12	an	an	DET
easat-3216	244	13	introduction	introduction	NOUN
easat-3216	244	14	"	"	PUNCT
easat-3216	244	15	,	,	PUNCT
easat-3216	244	16	bell	bell	PROPN
easat-3216	244	17	syst	syst	PROPN
easat-3216	244	18	.	.	PUNCT
easat-3216	245	1	tech	tech	PROPN
easat-3216	245	2	.	.	PUNCT
easat-3216	246	1	j.	j.	PROPN
easat-3216	246	2	,	,	PUNCT
easat-3216	246	3	vol	vol	NOUN
easat-3216	246	4	.	.	PROPN
easat-3216	246	5	48	48	NUM
easat-3216	246	6	,	,	PUNCT
easat-3216	246	7	pp	pp	ADJ
easat-3216	246	8	.	.	PUNCT
easat-3216	246	9	2059	2059	NUM
easat-3216	246	10	,	,	PUNCT
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easat-3216	246	12	.	.	PUNCT
easat-3216	247	1	[	[	X
easat-3216	247	2	7	7	X
easat-3216	247	3	]	]	X
easat-3216	247	4	m.	m.	NOUN
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easat-3216	247	6	,	,	PUNCT
easat-3216	247	7	"	"	PUNCT
easat-3216	247	8	guiding	guide	VERB
easat-3216	247	9	modulating	modulating	NOUN
easat-3216	247	10	and	and	CCONJ
easat-3216	247	11	emitting	emit	VERB
easat-3216	247	12	light	light	NOUN
easat-3216	247	13	on	on	ADP
easat-3216	247	14	silicon	silicon	NOUN
easat-3216	247	15	-	-	PUNCT
easat-3216	247	16	challenges	challenge	NOUN
easat-3216	247	17	and	and	CCONJ
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easat-3216	247	19	"	"	PUNCT
easat-3216	247	20	,	,	PUNCT
easat-3216	247	21	j.	j.	PROPN
easat-3216	247	22	lightw	lightw	PROPN
easat-3216	247	23	.	.	PUNCT
easat-3216	248	1	technol	technol	PROPN
easat-3216	248	2	.	.	PROPN
easat-3216	248	3	,	,	PUNCT
easat-3216	248	4	vol	vol	NOUN
easat-3216	248	5	.	.	PROPN
easat-3216	249	1	23	23	NUM
easat-3216	249	2	,	,	PUNCT
easat-3216	249	3	no	no	INTJ
easat-3216	249	4	.	.	NOUN
easat-3216	249	5	12	12	NUM
easat-3216	249	6	,	,	PUNCT
easat-3216	249	7	2005	2005	NUM
easat-3216	249	8	.	.	PUNCT
easat-3216	250	1	[	[	X
easat-3216	250	2	8	8	X
easat-3216	250	3	]	]	X
easat-3216	250	4	v.	v.	PROPN
easat-3216	250	5	r.	r.	PROPN
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easat-3216	250	7	,	,	PUNCT
easat-3216	250	8	c.	c.	PROPN
easat-3216	250	9	a.	a.	NOUN
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easat-3216	250	11	,	,	PUNCT
easat-3216	250	12	r.	r.	PROPN
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easat-3216	250	14	and	and	CCONJ
easat-3216	250	15	m.	m.	NOUN
easat-3216	250	16	lipson	lipson	PROPN
easat-3216	250	17	,	,	PUNCT
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easat-3216	250	19	all	all	ADV
easat-3216	250	20	-	-	ADJ
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easat-3216	250	24	light	light	NOUN
easat-3216	250	25	on	on	ADP
easat-3216	250	26	a	a	DET
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easat-3216	250	28	chip	chip	NOUN
easat-3216	250	29	"	"	PUNCT
easat-3216	250	30	,	,	PUNCT
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easat-3216	250	32	,	,	PUNCT
easat-3216	250	33	vol	vol	NOUN
easat-3216	250	34	.	.	PROPN
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easat-3216	251	2	,	,	PUNCT
easat-3216	251	3	no	no	INTJ
easat-3216	251	4	.	.	NOUN
easat-3216	252	1	7012	7012	NUM
easat-3216	252	2	,	,	PUNCT
easat-3216	252	3	pp	pp	ADJ
easat-3216	252	4	.	.	PUNCT
easat-3216	253	1	1081	1081	NUM
easat-3216	253	2	-	-	SYM
easat-3216	253	3	1084	1084	NUM
easat-3216	253	4	,	,	PUNCT
easat-3216	253	5	oct	oct	PROPN
easat-3216	253	6	.	.	PROPN
easat-3216	253	7	2004	2004	NUM
easat-3216	253	8	.	.	PUNCT
easat-3216	254	1	[	[	X
easat-3216	254	2	9	9	NUM
easat-3216	254	3	]	]	PUNCT
easat-3216	254	4	w.	w.	PROPN
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easat-3216	254	6	,	,	PUNCT
easat-3216	254	7	m.	m.	NOUN
easat-3216	254	8	fiers	fier	NOUN
easat-3216	254	9	,	,	PUNCT
easat-3216	254	10	and	and	CCONJ
easat-3216	254	11	p.	p.	NOUN
easat-3216	254	12	dumon	dumon	NOUN
easat-3216	254	13	,	,	PUNCT
easat-3216	254	14	“	"	PUNCT
easat-3216	254	15	design	design	NOUN
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easat-3216	254	20	,	,	PUNCT
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easat-3216	254	22	ieee	ieee	PROPN
easat-3216	254	23	j.	j.	PROPN
easat-3216	254	24	sel	sel	PROPN
easat-3216	254	25	.	.	PUNCT
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easat-3216	255	3	electron	electron	NOUN
easat-3216	255	4	.	.	PUNCT
easat-3216	256	1	,	,	PUNCT
easat-3216	256	2	vol	vol	NOUN
easat-3216	256	3	.	.	PROPN
easat-3216	256	4	20	20	NUM
easat-3216	256	5	,	,	PUNCT
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easat-3216	256	7	.	.	NOUN
easat-3216	256	8	4	4	NUM
easat-3216	256	9	,	,	PUNCT
easat-3216	256	10	jul./aug	jul./aug	PROPN
easat-3216	256	11	.	.	NOUN
easat-3216	256	12	2014	2014	NUM
easat-3216	256	13	,	,	PUNCT
easat-3216	256	14	art	art	NOUN
easat-3216	256	15	.	.	PUNCT
easat-3216	257	1	no	no	INTJ
easat-3216	257	2	.	.	NOUN
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easat-3216	257	4	.	.	PUNCT
easat-3216	258	1	[	[	X
easat-3216	258	2	10	10	NUM
easat-3216	258	3	]	]	X
easat-3216	258	4	b.	b.	PROPN
easat-3216	258	5	jalali	jalali	PROPN
easat-3216	258	6	and	and	CCONJ
easat-3216	258	7	s.	s.	PROPN
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easat-3216	258	9	,	,	PUNCT
easat-3216	258	10	“	"	PUNCT
easat-3216	258	11	silicon	silicon	NOUN
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easat-3216	258	13	,	,	PUNCT
easat-3216	258	14	”	"	PUNCT
easat-3216	258	15	j.	j.	PROPN
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easat-3216	258	17	.	.	PUNCT
easat-3216	259	1	technol	technol	PROPN
easat-3216	259	2	.	.	PROPN
easat-3216	259	3	,	,	PUNCT
easat-3216	259	4	vol	vol	NOUN
easat-3216	259	5	.	.	PROPN
easat-3216	260	1	24	24	NUM
easat-3216	260	2	,	,	PUNCT
easat-3216	260	3	no	no	INTJ
easat-3216	260	4	.	.	NOUN
easat-3216	260	5	12	12	NUM
easat-3216	260	6	,	,	PUNCT
easat-3216	260	7	pp	pp	ADJ
easat-3216	260	8	.	.	PUNCT
easat-3216	261	1	4600–4615	4600–4615	NUM
easat-3216	261	2	,	,	PUNCT
easat-3216	261	3	dec	dec	PROPN
easat-3216	261	4	.	.	PROPN
easat-3216	261	5	2006	2006	NUM
easat-3216	261	6	,	,	PUNCT
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easat-3216	261	8	:	:	PUNCT
easat-3216	261	9	10.1109	10.1109	NUM
easat-3216	261	10	/	/	SYM
easat-3216	261	11	jlt.2006.885782	jlt.2006.885782	NOUN
easat-3216	261	12	.	.	PUNCT
easat-3216	262	1	[	[	X
easat-3216	262	2	11	11	NUM
easat-3216	262	3	]	]	PUNCT
easat-3216	262	4	z.	z.	PROPN
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easat-3216	262	8	.	.	PROPN
easat-3216	262	9	,	,	PUNCT
easat-3216	262	10	"	"	PUNCT
easat-3216	262	11	integrated	integrated	ADJ
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easat-3216	262	15	:	:	PUNCT
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easat-3216	262	18	"	"	PUNCT
easat-3216	262	19	,	,	PUNCT
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easat-3216	262	21	j.	j.	PROPN
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easat-3216	262	25	.	.	PUNCT
easat-3216	262	26	quantum	quantum	PROPN
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easat-3216	262	28	.	.	PUNCT
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easat-3216	263	1	24	24	NUM
easat-3216	263	2	,	,	PUNCT
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easat-3216	263	4	.	.	NOUN
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easat-3216	263	6	,	,	PUNCT
easat-3216	263	7	pp	pp	ADJ
easat-3216	263	8	.	.	PUNCT
easat-3216	264	1	1	1	NUM
easat-3216	264	2	-	-	SYM
easat-3216	264	3	24	24	NUM
easat-3216	264	4	,	,	PUNCT
easat-3216	264	5	nov./dec	nov./dec	PROPN
easat-3216	264	6	.	.	PROPN
easat-3216	264	7	2018	2018	NUM
easat-3216	264	8	.	.	PUNCT
easat-3216	265	1	[	[	X
easat-3216	265	2	12	12	NUM
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easat-3216	265	7	l.	l.	PROPN
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easat-3216	265	9	,	,	PUNCT
easat-3216	265	10	"	"	PUNCT
easat-3216	265	11	silicon	silicon	NOUN
easat-3216	265	12	photonics	photonics	PROPN
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easat-3216	265	14	design	design	NOUN
easat-3216	265	15	:	:	PUNCT
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easat-3216	265	18	and	and	CCONJ
easat-3216	265	19	challenges	challenge	NOUN
easat-3216	265	20	"	"	PUNCT
easat-3216	265	21	,	,	PUNCT
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easat-3216	265	24	.	.	PUNCT
easat-3216	266	1	rev	rev	PROPN
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easat-3216	266	3	,	,	PUNCT
easat-3216	266	4	vol	vol	NOUN
easat-3216	266	5	.	.	PROPN
easat-3216	266	6	12	12	NUM
easat-3216	266	7	,	,	PUNCT
easat-3216	266	8	no	no	INTJ
easat-3216	266	9	.	.	NOUN
easat-3216	266	10	4	4	NUM
easat-3216	266	11	,	,	PUNCT
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easat-3216	266	13	.	.	PROPN
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easat-3216	266	15	.	.	PUNCT
easat-3216	267	1	[	[	X
easat-3216	267	2	13	13	NUM
easat-3216	267	3	]	]	PUNCT
easat-3216	267	4	l.	l.	PROPN
easat-3216	267	5	chrostowski	chrostowski	PROPN
easat-3216	267	6	and	and	CCONJ
easat-3216	267	7	m.	m.	PROPN
easat-3216	267	8	hochberg	hochberg	PROPN
easat-3216	267	9	,	,	PUNCT
easat-3216	267	10	silicon	silicon	PROPN
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easat-3216	267	12	design	design	NOUN
easat-3216	267	13	:	:	PUNCT
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easat-3216	267	18	,	,	PUNCT
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easat-3216	267	21	.	.	PUNCT
easat-3216	268	1	press	press	PROPN
easat-3216	268	2	,	,	PUNCT
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easat-3216	268	4	.	.	PUNCT
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easat-3216	269	4	p.	p.	PROPN
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easat-3216	269	6	,	,	PUNCT
easat-3216	269	7	photonics	photonic	NOUN
easat-3216	269	8	:	:	PUNCT
easat-3216	269	9	optical	optical	ADJ
easat-3216	269	10	electronics	electronic	NOUN
easat-3216	269	11	in	in	ADP
easat-3216	269	12	modern	modern	ADJ
easat-3216	269	13	communications	communication	NOUN
easat-3216	269	14	.	.	PUNCT
easat-3216	270	1	london	london	PROPN
easat-3216	270	2	,	,	PUNCT
easat-3216	270	3	u.k	u.k	PROPN
easat-3216	270	4	.	.	PROPN
easat-3216	270	5	:	:	PUNCT
easat-3216	271	1	oxford	oxford	PROPN
easat-3216	271	2	univ	univ	PROPN
easat-3216	271	3	.	.	PUNCT
easat-3216	272	1	press	press	PROPN
easat-3216	272	2	,	,	PUNCT
easat-3216	272	3	2007	2007	NUM
easat-3216	272	4	.	.	PUNCT
easat-3216	273	1	[	[	X
easat-3216	273	2	14	14	NUM
easat-3216	273	3	]	]	PUNCT
easat-3216	273	4	“	"	PUNCT
easat-3216	273	5	siepic	siepic	NOUN
easat-3216	273	6	-	-	PUNCT
easat-3216	273	7	ebeam	ebeam	NOUN
easat-3216	273	8	-	-	PUNCT
easat-3216	273	9	pdk	pdk	NOUN
easat-3216	273	10	package	package	NOUN
easat-3216	273	11	for	for	ADP
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easat-3216	273	13	,	,	PUNCT
easat-3216	273	14	”	"	PUNCT
easat-3216	273	15	accessed	access	VERB
easat-3216	273	16	:	:	PUNCT
easat-3216	273	17	nov	nov	PROPN
easat-3216	273	18	.	.	PROPN
easat-3216	273	19	30	30	NUM
easat-3216	273	20	,	,	PUNCT
easat-3216	273	21	2018	2018	NUM
easat-3216	273	22	.	.	PUNCT
easat-3216	274	1	[	[	X
easat-3216	274	2	online	online	X
easat-3216	274	3	]	]	X
easat-3216	274	4	.	.	PUNCT
easat-3216	275	1	available	available	ADJ
easat-3216	275	2	:	:	PUNCT
easat-3216	276	1	https://github.com/lukasc-ubc/siepic_ebeam_pdk	https://github.com/lukasc-ubc/siepic_ebeam_pdk	VERB
easat-3216	276	2	[	[	X
easat-3216	276	3	15	15	NUM
easat-3216	276	4	]	]	PUNCT
easat-3216	276	5	“	"	PUNCT
easat-3216	276	6	klayout	klayout	NOUN
easat-3216	276	7	,	,	PUNCT
easat-3216	276	8	”	"	PUNCT
easat-3216	276	9	accessed	access	VERB
easat-3216	276	10	:	:	PUNCT
easat-3216	276	11	nov	nov	PROPN
easat-3216	276	12	.	.	PROPN
easat-3216	276	13	30	30	NUM
easat-3216	276	14	,	,	PUNCT
easat-3216	276	15	2018	2018	NUM
easat-3216	276	16	.	.	PUNCT
easat-3216	277	1	[	[	X
easat-3216	277	2	online	online	X
easat-3216	277	3	]	]	X
easat-3216	277	4	.	.	PUNCT
easat-3216	278	1	available	available	ADJ
easat-3216	278	2	:	:	PUNCT
easat-3216	278	3	https://www.klayout.de	https://www.klayout.de	PROPN
easat-3216	279	1	[	[	X
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easat-3216	282	10	,	,	PUNCT
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easat-3216	284	2	.	.	PUNCT
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easat-3216	287	2	.	.	PUNCT
easat-3216	288	1	i2ct	i2ct	PROPN
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easat-3216	288	7	,	,	PUNCT
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easat-3216	288	9	.	.	PUNCT
easat-3216	289	1	1–5	1–5	NUM
easat-3216	289	2	,	,	PUNCT
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easat-3216	289	4	,	,	PUNCT
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easat-3216	290	14	“	"	PUNCT
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easat-3216	290	26	,	,	PUNCT
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easat-3216	294	7	,	,	PUNCT
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easat-3216	296	2	,	,	PUNCT
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easat-3216	296	8	.	.	PUNCT
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easat-3216	301	2	:	:	SYM
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easat-3216	309	2	,	,	PUNCT
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easat-3216	309	4	.	.	PUNCT
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easat-3216	311	16	,	,	PUNCT
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easat-3216	312	5	vieu	vieu	PROPN
easat-3216	312	6	,	,	PUNCT
easat-3216	312	7	f.	f.	PROPN
easat-3216	312	8	carcenac	carcenac	PROPN
easat-3216	312	9	,	,	PUNCT
easat-3216	312	10	a.	a.	NOUN
easat-3216	312	11	pépin	pépin	NOUN
easat-3216	312	12	,	,	PUNCT
easat-3216	312	13	y.	y.	PROPN
easat-3216	312	14	chen	chen	PROPN
easat-3216	312	15	,	,	PUNCT
easat-3216	312	16	m.	m.	NOUN
easat-3216	312	17	mejias	mejias	PROPN
easat-3216	312	18	,	,	PUNCT
easat-3216	312	19	a.	a.	NOUN
easat-3216	312	20	lebib	lebib	PROPN
easat-3216	312	21	,	,	PUNCT
easat-3216	312	22	l.	l.	PROPN
easat-3216	312	23	manin	manin	PROPN
easat-3216	312	24	-	-	PUNCT
easat-3216	312	25	ferlazzo	ferlazzo	PROPN
easat-3216	312	26	,	,	PUNCT
easat-3216	312	27	l.	l.	PROPN
easat-3216	312	28	couraud	couraud	PROPN
easat-3216	312	29	,	,	PUNCT
easat-3216	312	30	and	and	CCONJ
easat-3216	312	31	h.	h.	PROPN
easat-3216	312	32	launois	launois	PROPN
easat-3216	312	33	,	,	PUNCT
easat-3216	312	34	‘	'	PUNCT
easat-3216	312	35	‘	'	PUNCT
easat-3216	312	36	electron	electron	NOUN
easat-3216	312	37	beamlithography	beamlithography	NOUN
easat-3216	312	38	:	:	PUNCT
easat-3216	312	39	resolution	resolution	NOUN
easat-3216	312	40	limits	limit	NOUN
easat-3216	312	41	and	and	CCONJ
easat-3216	312	42	applications	application	NOUN
easat-3216	312	43	,	,	PUNCT
easat-3216	312	44	’’	’'	PUNCT
easat-3216	312	45	appl	appl	NOUN
easat-3216	312	46	.	.	PUNCT
easat-3216	313	1	surf	surf	PROPN
easat-3216	313	2	.	.	PUNCT
easat-3216	314	1	sci	sci	PROPN
easat-3216	314	2	.	.	PROPN
easat-3216	314	3	,	,	PUNCT
easat-3216	314	4	vol	vol	NOUN
easat-3216	314	5	.	.	PROPN
easat-3216	314	6	164	164	NUM
easat-3216	314	7	,	,	PUNCT
easat-3216	314	8	nos	nos	PROPN
easat-3216	314	9	.	.	PROPN
easat-3216	315	1	1–4	1–4	PROPN
easat-3216	315	2	,	,	PUNCT
easat-3216	315	3	pp	pp	X
easat-3216	315	4	.	.	PUNCT
easat-3216	316	1	111–117	111–117	NUM
easat-3216	316	2	,	,	PUNCT
easat-3216	316	3	sep	sep	PROPN
easat-3216	316	4	.	.	PROPN
easat-3216	317	1	2000.4	2000.4	NUM