id	sid	tid	token	lemma	pos
easat-3604	1	1	edelweiss	edelweiss	PROPN
easat-3604	1	2	applied	apply	VERB
easat-3604	1	3	science	science	NOUN
easat-3604	1	4	and	and	CCONJ
easat-3604	1	5	technology	technology	NOUN
easat-3604	1	6	issn	issn	PROPN
easat-3604	1	7	:	:	PUNCT
easat-3604	1	8	2576	2576	NUM
easat-3604	1	9	-	-	SYM
easat-3604	1	10	8484	8484	NUM
easat-3604	1	11	vol	vol	NOUN
easat-3604	1	12	.	.	PROPN
easat-3604	1	13	8	8	NUM
easat-3604	1	14	,	,	PUNCT
easat-3604	1	15	no	no	INTJ
easat-3604	1	16	.	.	NOUN
easat-3604	1	17	6	6	NUM
easat-3604	1	18	,	,	PUNCT
easat-3604	1	19	7404	7404	NUM
easat-3604	1	20	-	-	SYM
easat-3604	1	21	7418	7418	NUM
easat-3604	1	22	2024	2024	NUM
easat-3604	1	23	publisher	publisher	NOUN
easat-3604	1	24	:	:	PUNCT
easat-3604	1	25	learning	learn	VERB
easat-3604	1	26	gate	gate	NOUN
easat-3604	1	27	doi	doi	PROPN
easat-3604	1	28	:	:	PUNCT
easat-3604	1	29	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	1	30	©	©	PROPN
easat-3604	1	31	2024	2024	NUM
easat-3604	1	32	by	by	ADP
easat-3604	1	33	the	the	DET
easat-3604	1	34	author	author	NOUN
easat-3604	1	35	;	;	PUNCT
easat-3604	1	36	licensee	licensee	PROPN
easat-3604	1	37	learning	learning	NOUN
easat-3604	1	38	gate	gate	NOUN
easat-3604	1	39	©	©	PROPN
easat-3604	1	40	2024	2024	NUM
easat-3604	1	41	by	by	ADP
easat-3604	1	42	the	the	DET
easat-3604	1	43	author	author	NOUN
easat-3604	1	44	;	;	PUNCT
easat-3604	1	45	licensee	licensee	PROPN
easat-3604	1	46	learning	learn	VERB
easat-3604	1	47	gate	gate	NOUN
easat-3604	1	48	*	*	PUNCT
easat-3604	1	49	correspondence	correspondence	NOUN
easat-3604	1	50	:	:	PUNCT
easat-3604	1	51	vuvanthe@lqdtu.vn	vuvanthe@lqdtu.vn	ADJ
easat-3604	1	52	dynamic	dynamic	ADJ
easat-3604	1	53	characteristics	characteristic	NOUN
easat-3604	1	54	of	of	ADP
easat-3604	1	55	micro	micro	ADJ
easat-3604	1	56	-	-	ADJ
easat-3604	1	57	perforated	perforated	ADJ
easat-3604	1	58	complex	complex	ADJ
easat-3604	1	59	beam	beam	NOUN
easat-3604	1	60	structures	structure	NOUN
easat-3604	1	61	vu	vu	PROPN
easat-3604	1	62	van	van	PROPN
easat-3604	1	63	the1	the1	PROPN
easat-3604	1	64	*	*	PROPN
easat-3604	1	65	1faculty	1faculty	NUM
easat-3604	1	66	of	of	ADP
easat-3604	1	67	mechanical	mechanical	ADJ
easat-3604	1	68	engineering	engineering	NOUN
easat-3604	1	69	,	,	PUNCT
easat-3604	1	70	le	le	X
easat-3604	1	71	quy	quy	PROPN
easat-3604	1	72	don	don	PROPN
easat-3604	1	73	technical	technical	PROPN
easat-3604	1	74	university	university	PROPN
easat-3604	1	75	,	,	PUNCT
easat-3604	1	76	hanoi	hanoi	PROPN
easat-3604	1	77	,	,	PUNCT
easat-3604	1	78	100000	100000	NUM
easat-3604	1	79	,	,	PUNCT
easat-3604	1	80	vietnam	vietnam	PROPN
easat-3604	1	81	;	;	PUNCT
easat-3604	1	82	vuvanthe@lqdtu.vn	vuvanthe@lqdtu.vn	PROPN
easat-3604	1	83	(	(	PUNCT
easat-3604	1	84	v.v.t	v.v.t	PROPN
easat-3604	1	85	.	.	PROPN
easat-3604	1	86	)	)	PUNCT
easat-3604	1	87	.	.	PUNCT
easat-3604	2	1	abstract	abstract	ADV
easat-3604	2	2	:	:	PUNCT
easat-3604	2	3	this	this	DET
easat-3604	2	4	paper	paper	NOUN
easat-3604	2	5	discusses	discuss	VERB
easat-3604	2	6	research	research	NOUN
easat-3604	2	7	concerning	concern	VERB
easat-3604	2	8	the	the	DET
easat-3604	2	9	fluctuating	fluctuate	VERB
easat-3604	2	10	dynamic	dynamic	ADJ
easat-3604	2	11	characteristics	characteristic	NOUN
easat-3604	2	12	of	of	ADP
easat-3604	2	13	various	various	ADJ
easat-3604	2	14	micro	micro	NOUN
easat-3604	2	15	-	-	NOUN
easat-3604	2	16	beams	beam	NOUN
easat-3604	2	17	featuring	feature	VERB
easat-3604	2	18	intricate	intricate	ADJ
easat-3604	2	19	designs	design	NOUN
easat-3604	2	20	and	and	CCONJ
easat-3604	2	21	perforated	perforate	VERB
easat-3604	2	22	surfaces	surface	NOUN
easat-3604	2	23	across	across	ADP
easat-3604	2	24	their	their	PRON
easat-3604	2	25	entire	entire	ADJ
easat-3604	2	26	operational	operational	ADJ
easat-3604	2	27	faces	face	NOUN
easat-3604	2	28	.	.	PUNCT
easat-3604	3	1	the	the	DET
easat-3604	3	2	complex	complex	ADJ
easat-3604	3	3	beam	beam	NOUN
easat-3604	3	4	structures	structure	NOUN
easat-3604	3	5	consist	consist	VERB
easat-3604	3	6	of	of	ADP
easat-3604	3	7	different	different	ADJ
easat-3604	3	8	types	type	NOUN
easat-3604	3	9	:	:	PUNCT
easat-3604	3	10	folded	fold	VERB
easat-3604	3	11	beam	beam	NOUN
easat-3604	3	12	,	,	PUNCT
easat-3604	3	13	v	v	NOUN
easat-3604	3	14	-	-	PUNCT
easat-3604	3	15	shaped	shape	VERB
easat-3604	3	16	beam	beam	NOUN
easat-3604	3	17	,	,	PUNCT
easat-3604	3	18	and	and	CCONJ
easat-3604	3	19	crab	crab	NOUN
easat-3604	3	20	-	-	PUNCT
easat-3604	3	21	shaped	shape	VERB
easat-3604	3	22	beam	beam	NOUN
easat-3604	3	23	with	with	ADP
easat-3604	3	24	different	different	ADJ
easat-3604	3	25	boundary	boundary	ADJ
easat-3604	3	26	conditions	condition	NOUN
easat-3604	3	27	:	:	PUNCT
easat-3604	3	28	fixed	fix	VERB
easat-3604	3	29	-	-	PUNCT
easat-3604	3	30	free	free	ADJ
easat-3604	3	31	,	,	PUNCT
easat-3604	3	32	fixed	fix	VERB
easat-3604	3	33	-	-	PUNCT
easat-3604	3	34	fixed	fix	VERB
easat-3604	3	35	for	for	ADP
easat-3604	3	36	the	the	DET
easat-3604	3	37	simple	simple	ADJ
easat-3604	3	38	single	single	ADJ
easat-3604	3	39	beam	beam	NOUN
easat-3604	3	40	,	,	PUNCT
easat-3604	3	41	and	and	CCONJ
easat-3604	3	42	fixed	fix	VERB
easat-3604	3	43	-	-	PUNCT
easat-3604	3	44	guided	guide	VERB
easat-3604	3	45	for	for	ADP
easat-3604	3	46	the	the	DET
easat-3604	3	47	rest	rest	NOUN
easat-3604	3	48	.	.	PUNCT
easat-3604	4	1	the	the	DET
easat-3604	4	2	types	type	NOUN
easat-3604	4	3	of	of	ADP
easat-3604	4	4	holes	hole	NOUN
easat-3604	4	5	on	on	ADP
easat-3604	4	6	the	the	DET
easat-3604	4	7	body	body	NOUN
easat-3604	4	8	of	of	ADP
easat-3604	4	9	the	the	DET
easat-3604	4	10	beams	beam	NOUN
easat-3604	4	11	are	be	AUX
easat-3604	4	12	choice	choice	NOUN
easat-3604	4	13	in	in	ADP
easat-3604	4	14	square	square	ADJ
easat-3604	4	15	and	and	CCONJ
easat-3604	4	16	circle	circle	NOUN
easat-3604	4	17	-	-	PUNCT
easat-3604	4	18	shaped	shape	VERB
easat-3604	4	19	for	for	ADP
easat-3604	4	20	common	common	ADJ
easat-3604	4	21	.	.	PUNCT
easat-3604	5	1	in	in	ADP
easat-3604	5	2	addition	addition	NOUN
easat-3604	5	3	,	,	PUNCT
easat-3604	5	4	the	the	DET
easat-3604	5	5	methodology	methodology	NOUN
easat-3604	5	6	to	to	PART
easat-3604	5	7	determine	determine	VERB
easat-3604	5	8	the	the	DET
easat-3604	5	9	dynamic	dynamic	ADJ
easat-3604	5	10	characteristics	characteristic	NOUN
easat-3604	5	11	of	of	ADP
easat-3604	5	12	the	the	DET
easat-3604	5	13	perforated	perforate	VERB
easat-3604	5	14	beam	beam	NOUN
easat-3604	5	15	is	be	AUX
easat-3604	5	16	also	also	ADV
easat-3604	5	17	proposed	propose	VERB
easat-3604	5	18	based	base	VERB
easat-3604	5	19	on	on	ADP
easat-3604	5	20	using	use	VERB
easat-3604	5	21	fem	fem	PROPN
easat-3604	5	22	simulation	simulation	NOUN
easat-3604	5	23	software	software	PROPN
easat-3604	5	24	.	.	PUNCT
easat-3604	6	1	the	the	DET
easat-3604	6	2	results	result	NOUN
easat-3604	6	3	show	show	VERB
easat-3604	6	4	that	that	SCONJ
easat-3604	6	5	the	the	DET
easat-3604	6	6	dynamic	dynamic	ADJ
easat-3604	6	7	characteristics	characteristic	NOUN
easat-3604	6	8	of	of	ADP
easat-3604	6	9	the	the	DET
easat-3604	6	10	beam	beam	NOUN
easat-3604	6	11	in	in	ADP
easat-3604	6	12	which	which	PRON
easat-3604	6	13	the	the	DET
easat-3604	6	14	holes	hole	NOUN
easat-3604	6	15	are	be	AUX
easat-3604	6	16	distributed	distribute	VERB
easat-3604	6	17	depend	depend	NOUN
easat-3604	6	18	on	on	ADP
easat-3604	6	19	the	the	DET
easat-3604	6	20	size	size	NOUN
easat-3604	6	21	and	and	CCONJ
easat-3604	6	22	shape	shape	NOUN
easat-3604	6	23	of	of	ADP
easat-3604	6	24	perforated	perforated	ADJ
easat-3604	6	25	holes	hole	NOUN
easat-3604	6	26	.	.	PUNCT
easat-3604	7	1	as	as	ADP
easat-3604	7	2	the	the	DET
easat-3604	7	3	size	size	NOUN
easat-3604	7	4	or	or	CCONJ
easat-3604	7	5	quantity	quantity	NOUN
easat-3604	7	6	of	of	ADP
easat-3604	7	7	holes	hole	NOUN
easat-3604	7	8	on	on	ADP
easat-3604	7	9	the	the	DET
easat-3604	7	10	surface	surface	NOUN
easat-3604	7	11	of	of	ADP
easat-3604	7	12	the	the	DET
easat-3604	7	13	beam	beam	NOUN
easat-3604	7	14	in	in	ADP
easat-3604	7	15	perforated	perforate	VERB
easat-3604	7	16	micro	micro	NOUN
easat-3604	7	17	-	-	NOUN
easat-3604	7	18	beams	beam	NOUN
easat-3604	7	19	grows	grow	VERB
easat-3604	7	20	,	,	PUNCT
easat-3604	7	21	the	the	DET
easat-3604	7	22	equivalent	equivalent	ADJ
easat-3604	7	23	stiffness	stiffness	NOUN
easat-3604	7	24	drops	drop	VERB
easat-3604	7	25	noticeably	noticeably	ADV
easat-3604	7	26	.	.	PUNCT
easat-3604	8	1	consequently	consequently	ADV
easat-3604	8	2	,	,	PUNCT
easat-3604	8	3	the	the	DET
easat-3604	8	4	fundamental	fundamental	ADJ
easat-3604	8	5	frequencies	frequency	NOUN
easat-3604	8	6	of	of	ADP
easat-3604	8	7	the	the	DET
easat-3604	8	8	mems	mem	NOUN
easat-3604	8	9	systems	system	NOUN
easat-3604	8	10	that	that	PRON
easat-3604	8	11	include	include	VERB
easat-3604	8	12	these	these	DET
easat-3604	8	13	micro	micro	NOUN
easat-3604	8	14	-	-	NOUN
easat-3604	8	15	beams	beam	NOUN
easat-3604	8	16	also	also	ADV
easat-3604	8	17	diminish	diminish	VERB
easat-3604	8	18	.	.	PUNCT
easat-3604	9	1	the	the	DET
easat-3604	9	2	damping	damp	VERB
easat-3604	9	3	coefficient	coefficient	NOUN
easat-3604	9	4	also	also	ADV
easat-3604	9	5	reduces	reduce	VERB
easat-3604	9	6	thanks	thank	NOUN
easat-3604	9	7	to	to	ADP
easat-3604	9	8	the	the	DET
easat-3604	9	9	occurrence	occurrence	NOUN
easat-3604	9	10	of	of	ADP
easat-3604	9	11	these	these	DET
easat-3604	9	12	holes	hole	NOUN
easat-3604	9	13	.	.	PUNCT
easat-3604	10	1	the	the	DET
easat-3604	10	2	maximum	maximum	ADJ
easat-3604	10	3	decrease	decrease	NOUN
easat-3604	10	4	in	in	ADP
easat-3604	10	5	damping	damp	VERB
easat-3604	10	6	coefficient	coefficient	NOUN
easat-3604	10	7	reaches	reach	VERB
easat-3604	10	8	84	84	NUM
easat-3604	10	9	%	%	NOUN
easat-3604	10	10	in	in	ADP
easat-3604	10	11	the	the	DET
easat-3604	10	12	ideal	ideal	ADJ
easat-3604	10	13	case	case	NOUN
easat-3604	10	14	for	for	ADP
easat-3604	10	15	the	the	DET
easat-3604	10	16	crab	crab	NOUN
easat-3604	10	17	-	-	PUNCT
easat-3604	10	18	shaped	shape	VERB
easat-3604	10	19	beam	beam	NOUN
easat-3604	10	20	with	with	ADP
easat-3604	10	21	square	square	ADJ
easat-3604	10	22	holes	hole	NOUN
easat-3604	10	23	.	.	PUNCT
easat-3604	11	1	these	these	DET
easat-3604	11	2	results	result	NOUN
easat-3604	11	3	can	can	AUX
easat-3604	11	4	be	be	AUX
easat-3604	11	5	used	use	VERB
easat-3604	11	6	to	to	PART
easat-3604	11	7	optimize	optimize	VERB
easat-3604	11	8	the	the	DET
easat-3604	11	9	mems	mem	NOUN
easat-3604	11	10	structures	structure	NOUN
easat-3604	11	11	in	in	ADP
easat-3604	11	12	future	future	ADJ
easat-3604	11	13	research	research	NOUN
easat-3604	11	14	.	.	PUNCT
easat-3604	12	1	keywords	keyword	NOUN
easat-3604	12	2	:	:	PUNCT
easat-3604	12	3	dynamic	dynamic	ADJ
easat-3604	12	4	characteristics	characteristic	NOUN
easat-3604	12	5	,	,	PUNCT
easat-3604	12	6	mems	mem	NOUN
easat-3604	12	7	devices	device	NOUN
easat-3604	12	8	,	,	PUNCT
easat-3604	12	9	micro	micro	NOUN
easat-3604	12	10	-	-	NOUN
easat-3604	12	11	beam	beam	ADJ
easat-3604	12	12	,	,	PUNCT
easat-3604	12	13	perforated	perforated	ADJ
easat-3604	12	14	beam	beam	NOUN
easat-3604	12	15	.	.	PUNCT
easat-3604	13	1	1	1	X
easat-3604	13	2	.	.	X
easat-3604	13	3	introduction	introduction	NOUN
easat-3604	13	4	microtechnology	microtechnology	NOUN
easat-3604	13	5	is	be	AUX
easat-3604	13	6	a	a	DET
easat-3604	13	7	field	field	NOUN
easat-3604	13	8	of	of	ADP
easat-3604	13	9	technology	technology	NOUN
easat-3604	13	10	that	that	PRON
easat-3604	13	11	encompasses	encompass	VERB
easat-3604	13	12	features	feature	NOUN
easat-3604	13	13	with	with	ADP
easat-3604	13	14	measurements	measurement	NOUN
easat-3604	13	15	of	of	ADP
easat-3604	13	16	one	one	NUM
easat-3604	13	17	micrometer	micrometer	NOUN
easat-3604	13	18	[	[	X
easat-3604	13	19	1	1	NUM
easat-3604	13	20	]	]	PUNCT
easat-3604	13	21	.	.	PUNCT
easat-3604	14	1	it	it	PRON
easat-3604	14	2	concentrates	concentrate	VERB
easat-3604	14	3	on	on	ADP
easat-3604	14	4	the	the	DET
easat-3604	14	5	production	production	NOUN
easat-3604	14	6	or	or	CCONJ
easat-3604	14	7	manipulation	manipulation	NOUN
easat-3604	14	8	of	of	ADP
easat-3604	14	9	structures	structure	NOUN
easat-3604	14	10	with	with	ADP
easat-3604	14	11	a	a	DET
easat-3604	14	12	one	one	NUM
easat-3604	14	13	-	-	PUNCT
easat-3604	14	14	micrometer	micrometer	NOUN
easat-3604	14	15	magnitude	magnitude	NOUN
easat-3604	14	16	,	,	PUNCT
easat-3604	14	17	as	as	ADV
easat-3604	14	18	well	well	ADV
easat-3604	14	19	as	as	ADP
easat-3604	14	20	chemical	chemical	NOUN
easat-3604	14	21	and	and	CCONJ
easat-3604	14	22	physical	physical	ADJ
easat-3604	14	23	procedures	procedure	NOUN
easat-3604	14	24	[	[	X
easat-3604	14	25	2	2	NUM
easat-3604	14	26	]	]	PUNCT
easat-3604	14	27	.	.	PUNCT
easat-3604	15	1	mems	mems	PROPN
easat-3604	15	2	has	have	AUX
easat-3604	15	3	been	be	AUX
easat-3604	15	4	recognized	recognize	VERB
easat-3604	15	5	as	as	ADP
easat-3604	15	6	a	a	DET
easat-3604	15	7	very	very	ADV
easat-3604	15	8	promising	promising	ADJ
easat-3604	15	9	technology	technology	NOUN
easat-3604	15	10	for	for	ADP
easat-3604	15	11	the	the	DET
easat-3604	15	12	21st	21st	ADJ
easat-3604	15	13	century	century	NOUN
easat-3604	15	14	,	,	PUNCT
easat-3604	15	15	with	with	ADP
easat-3604	15	16	the	the	DET
easat-3604	15	17	ability	ability	NOUN
easat-3604	15	18	to	to	PART
easat-3604	15	19	transform	transform	VERB
easat-3604	15	20	both	both	DET
easat-3604	15	21	industrial	industrial	ADJ
easat-3604	15	22	and	and	CCONJ
easat-3604	15	23	consumer	consumer	NOUN
easat-3604	15	24	goods	good	NOUN
easat-3604	15	25	via	via	ADP
easat-3604	15	26	the	the	DET
easat-3604	15	27	integration	integration	NOUN
easat-3604	15	28	of	of	ADP
easat-3604	15	29	siliconbased	siliconbase	VERB
easat-3604	15	30	microelectronics	microelectronic	NOUN
easat-3604	15	31	and	and	CCONJ
easat-3604	15	32	micromachining	micromachine	VERB
easat-3604	15	33	innovation	innovation	NOUN
easat-3604	15	34	.	.	PUNCT
easat-3604	16	1	its	its	PRON
easat-3604	16	2	methodologies	methodology	NOUN
easat-3604	16	3	and	and	CCONJ
easat-3604	16	4	microsystem	microsystem	NOUN
easat-3604	16	5	-	-	PUNCT
easat-3604	16	6	based	base	VERB
easat-3604	16	7	technologies	technology	NOUN
easat-3604	16	8	have	have	VERB
easat-3604	16	9	the	the	DET
easat-3604	16	10	potential	potential	NOUN
easat-3604	16	11	to	to	PART
easat-3604	16	12	significantly	significantly	ADV
easat-3604	16	13	impact	impact	VERB
easat-3604	16	14	our	our	PRON
easat-3604	16	15	lives	life	NOUN
easat-3604	16	16	and	and	CCONJ
easat-3604	16	17	lifestyles	lifestyle	NOUN
easat-3604	16	18	.	.	PUNCT
easat-3604	17	1	therefore	therefore	ADV
easat-3604	17	2	,	,	PUNCT
easat-3604	17	3	in	in	ADP
easat-3604	17	4	the	the	DET
easat-3604	17	5	field	field	NOUN
easat-3604	17	6	of	of	ADP
easat-3604	17	7	computational	computational	ADJ
easat-3604	17	8	mechanics	mechanic	NOUN
easat-3604	17	9	,	,	PUNCT
easat-3604	17	10	the	the	DET
easat-3604	17	11	analysis	analysis	NOUN
easat-3604	17	12	of	of	ADP
easat-3604	17	13	mechanical	mechanical	ADJ
easat-3604	17	14	behavior	behavior	NOUN
easat-3604	17	15	of	of	ADP
easat-3604	17	16	beam	beam	NOUN
easat-3604	17	17	,	,	PUNCT
easat-3604	17	18	plate	plate	NOUN
easat-3604	17	19	and	and	CCONJ
easat-3604	17	20	shell	shell	ADJ
easat-3604	17	21	structures	structure	NOUN
easat-3604	17	22	plays	play	VERB
easat-3604	17	23	an	an	DET
easat-3604	17	24	important	important	ADJ
easat-3604	17	25	role	role	NOUN
easat-3604	17	26	in	in	ADP
easat-3604	17	27	the	the	DET
easat-3604	17	28	calculation	calculation	NOUN
easat-3604	17	29	and	and	CCONJ
easat-3604	17	30	design	design	NOUN
easat-3604	17	31	of	of	ADP
easat-3604	17	32	microelectromechanical	microelectromechanical	ADJ
easat-3604	17	33	devices	device	NOUN
easat-3604	17	34	[	[	X
easat-3604	17	35	3	3	NUM
easat-3604	17	36	]	]	PUNCT
easat-3604	17	37	,	,	PUNCT
easat-3604	17	38	[	[	X
easat-3604	17	39	4	4	NUM
easat-3604	17	40	]	]	PUNCT
easat-3604	17	41	.	.	PUNCT
easat-3604	18	1	for	for	ADP
easat-3604	18	2	beam	beam	NOUN
easat-3604	18	3	structures	structure	NOUN
easat-3604	18	4	,	,	PUNCT
easat-3604	18	5	they	they	PRON
easat-3604	18	6	are	be	AUX
easat-3604	18	7	often	often	ADV
easat-3604	18	8	used	use	VERB
easat-3604	18	9	in	in	ADP
easat-3604	18	10	mechanical	mechanical	ADJ
easat-3604	18	11	constructions	construction	NOUN
easat-3604	18	12	to	to	PART
easat-3604	18	13	facilitate	facilitate	VERB
easat-3604	18	14	the	the	DET
easat-3604	18	15	anticipated	anticipate	VERB
easat-3604	18	16	motion	motion	NOUN
easat-3604	18	17	of	of	ADP
easat-3604	18	18	the	the	DET
easat-3604	18	19	moving	move	VERB
easat-3604	18	20	component	component	NOUN
easat-3604	18	21	.	.	PUNCT
easat-3604	19	1	the	the	DET
easat-3604	19	2	mechanical	mechanical	ADJ
easat-3604	19	3	configurations	configuration	NOUN
easat-3604	19	4	of	of	ADP
easat-3604	19	5	micro	micro	ADJ
easat-3604	19	6	-	-	ADJ
easat-3604	19	7	electro	electro	ADJ
easat-3604	19	8	-	-	PUNCT
easat-3604	19	9	mechanical	mechanical	ADJ
easat-3604	19	10	systems	system	NOUN
easat-3604	19	11	(	(	PUNCT
easat-3604	19	12	mems	mem	NOUN
easat-3604	19	13	)	)	PUNCT
easat-3604	19	14	are	be	AUX
easat-3604	19	15	essential	essential	ADJ
easat-3604	19	16	for	for	ADP
easat-3604	19	17	performing	perform	VERB
easat-3604	19	18	the	the	DET
easat-3604	19	19	fundamental	fundamental	ADJ
easat-3604	19	20	operations	operation	NOUN
easat-3604	19	21	of	of	ADP
easat-3604	19	22	microactuators	microactuator	NOUN
easat-3604	19	23	or	or	CCONJ
easat-3604	19	24	microsensors	microsensor	NOUN
easat-3604	19	25	.	.	PUNCT
easat-3604	20	1	the	the	DET
easat-3604	20	2	beams	beam	NOUN
easat-3604	20	3	operate	operate	VERB
easat-3604	20	4	analogously	analogously	ADV
easat-3604	20	5	to	to	ADP
easat-3604	20	6	springs	spring	NOUN
easat-3604	20	7	in	in	ADP
easat-3604	20	8	mechanical	mechanical	ADJ
easat-3604	20	9	vibration	vibration	NOUN
easat-3604	20	10	systems	system	NOUN
easat-3604	20	11	because	because	SCONJ
easat-3604	20	12	of	of	ADP
easat-3604	20	13	their	their	PRON
easat-3604	20	14	elastic	elastic	ADJ
easat-3604	20	15	material	material	NOUN
easat-3604	20	16	qualities	quality	NOUN
easat-3604	20	17	.	.	PUNCT
easat-3604	21	1	the	the	DET
easat-3604	21	2	deformation	deformation	NOUN
easat-3604	21	3	of	of	ADP
easat-3604	21	4	these	these	DET
easat-3604	21	5	beams	beam	NOUN
easat-3604	21	6	in	in	ADP
easat-3604	21	7	designated	designate	VERB
easat-3604	21	8	design	design	NOUN
easat-3604	21	9	orientations	orientation	NOUN
easat-3604	21	10	generates	generate	VERB
easat-3604	21	11	the	the	DET
easat-3604	21	12	necessary	necessary	ADJ
easat-3604	21	13	vibrational	vibrational	ADJ
easat-3604	21	14	modes	mode	NOUN
easat-3604	21	15	inside	inside	ADP
easat-3604	21	16	the	the	DET
easat-3604	21	17	mechanical	mechanical	ADJ
easat-3604	21	18	system	system	NOUN
easat-3604	21	19	.	.	PUNCT
easat-3604	22	1	the	the	DET
easat-3604	22	2	arrangement	arrangement	NOUN
easat-3604	22	3	of	of	ADP
easat-3604	22	4	the	the	DET
easat-3604	22	5	micro	micro	ADJ
easat-3604	22	6	beams	beam	NOUN
easat-3604	22	7	may	may	AUX
easat-3604	22	8	be	be	AUX
easat-3604	22	9	configured	configure	VERB
easat-3604	22	10	differently	differently	ADV
easat-3604	22	11	based	base	VERB
easat-3604	22	12	on	on	ADP
easat-3604	22	13	the	the	DET
easat-3604	22	14	intended	intend	VERB
easat-3604	22	15	motion	motion	NOUN
easat-3604	22	16	of	of	ADP
easat-3604	22	17	the	the	DET
easat-3604	22	18	mass	mass	ADJ
easat-3604	22	19	element	element	NOUN
easat-3604	22	20	in	in	ADP
easat-3604	22	21	each	each	DET
easat-3604	22	22	vibration	vibration	NOUN
easat-3604	22	23	system	system	NOUN
easat-3604	22	24	.	.	PUNCT
easat-3604	23	1	the	the	DET
easat-3604	23	2	beams	beam	NOUN
easat-3604	23	3	may	may	AUX
easat-3604	23	4	be	be	AUX
easat-3604	23	5	configured	configure	VERB
easat-3604	23	6	in	in	ADP
easat-3604	23	7	several	several	ADJ
easat-3604	23	8	designs	design	NOUN
easat-3604	23	9	,	,	PUNCT
easat-3604	23	10	including	include	VERB
easat-3604	23	11	single	single	ADJ
easat-3604	23	12	beam	beam	NOUN
easat-3604	23	13	[	[	X
easat-3604	23	14	5	5	NUM
easat-3604	23	15	]	]	PUNCT
easat-3604	23	16	,	,	PUNCT
easat-3604	23	17	folded	fold	VERB
easat-3604	23	18	beam	beam	NOUN
easat-3604	24	1	[	[	X
easat-3604	24	2	6	6	NUM
easat-3604	24	3	]	]	PUNCT
easat-3604	24	4	,	,	PUNCT
easat-3604	24	5	[	[	X
easat-3604	24	6	7	7	NUM
easat-3604	24	7	]	]	PUNCT
easat-3604	24	8	,	,	PUNCT
easat-3604	24	9	multi	multi	ADJ
easat-3604	24	10	-	-	ADJ
easat-3604	24	11	folded	folded	ADJ
easat-3604	24	12	beam	beam	NOUN
easat-3604	24	13	[	[	X
easat-3604	24	14	8	8	NUM
easat-3604	24	15	]	]	PUNCT
easat-3604	24	16	,	,	PUNCT
easat-3604	24	17	crab	crab	NOUN
easat-3604	24	18	-	-	PUNCT
easat-3604	24	19	shaped	shape	VERB
easat-3604	24	20	beam	beam	NOUN
easat-3604	24	21	[	[	X
easat-3604	24	22	7	7	NUM
easat-3604	24	23	]	]	PUNCT
easat-3604	24	24	,	,	PUNCT
easat-3604	24	25	t	t	NOUN
easat-3604	24	26	-	-	PUNCT
easat-3604	24	27	shaped	shape	VERB
easat-3604	24	28	beam	beam	NOUN
easat-3604	24	29	[	[	X
easat-3604	24	30	8	8	NUM
easat-3604	24	31	]	]	PUNCT
easat-3604	24	32	,	,	PUNCT
easat-3604	24	33	z	z	NOUN
easat-3604	24	34	-	-	PUNCT
easat-3604	24	35	shaped	shape	VERB
easat-3604	24	36	beam	beam	NOUN
easat-3604	24	37	,	,	PUNCT
easat-3604	24	38	and	and	CCONJ
easat-3604	24	39	v	v	ADV
easat-3604	24	40	-	-	PUNCT
easat-3604	24	41	shaped	shape	VERB
easat-3604	24	42	beam	beam	NOUN
easat-3604	24	43	[	[	X
easat-3604	24	44	9	9	NUM
easat-3604	24	45	]	]	PUNCT
easat-3604	24	46	.	.	PUNCT
easat-3604	25	1	the	the	DET
easat-3604	25	2	mechanical	mechanical	ADJ
easat-3604	25	3	reactions	reaction	NOUN
easat-3604	25	4	of	of	ADP
easat-3604	25	5	these	these	DET
easat-3604	25	6	beam	beam	NOUN
easat-3604	25	7	configurations	configuration	NOUN
easat-3604	25	8	have	have	AUX
easat-3604	25	9	been	be	AUX
easat-3604	25	10	analyzed	analyze	VERB
easat-3604	25	11	under	under	ADP
easat-3604	25	12	the	the	DET
easat-3604	25	13	premise	premise	NOUN
easat-3604	25	14	of	of	ADP
easat-3604	25	15	a	a	DET
easat-3604	25	16	completely	completely	ADV
easat-3604	25	17	filled	fill	VERB
easat-3604	25	18	state	state	NOUN
easat-3604	25	19	with	with	ADP
easat-3604	25	20	a	a	DET
easat-3604	25	21	uniform	uniform	ADJ
easat-3604	25	22	cross	cross	NOUN
easat-3604	25	23	-	-	NOUN
easat-3604	25	24	section	section	NOUN
easat-3604	25	25	.	.	PUNCT
easat-3604	26	1	the	the	DET
easat-3604	26	2	approach	approach	NOUN
easat-3604	26	3	presumes	presume	VERB
easat-3604	26	4	linear	linear	ADJ
easat-3604	26	5	elastic	elastic	ADJ
easat-3604	26	6	material	material	NOUN
easat-3604	26	7	behavior	behavior	NOUN
easat-3604	26	8	and	and	CCONJ
easat-3604	26	9	neglects	neglect	VERB
easat-3604	26	10	substantial	substantial	ADJ
easat-3604	26	11	structural	structural	ADJ
easat-3604	26	12	deformations	deformation	NOUN
easat-3604	26	13	.	.	PUNCT
easat-3604	27	1	the	the	DET
easat-3604	27	2	square	square	ADV
easat-3604	27	3	-	-	PUNCT
easat-3604	27	4	shaped	shape	VERB
easat-3604	27	5	perforations	perforation	NOUN
easat-3604	27	6	along	along	ADP
easat-3604	27	7	the	the	DET
easat-3604	27	8	beams	beam	NOUN
easat-3604	27	9	lead	lead	VERB
easat-3604	27	10	to	to	ADP
easat-3604	27	11	a	a	DET
easat-3604	27	12	decrease	decrease	NOUN
easat-3604	27	13	in	in	ADP
easat-3604	27	14	the	the	DET
easat-3604	27	15	beam	beam	NOUN
easat-3604	27	16	's	's	PART
easat-3604	27	17	mass	mass	NOUN
easat-3604	27	18	,	,	PUNCT
easat-3604	27	19	which	which	PRON
easat-3604	27	20	subsequently	subsequently	ADV
easat-3604	27	21	reduces	reduce	VERB
easat-3604	27	22	the	the	DET
easat-3604	27	23	residual	residual	ADJ
easat-3604	27	24	stress	stress	NOUN
easat-3604	27	25	within	within	ADP
easat-3604	27	26	the	the	DET
easat-3604	27	27	beam	beam	NOUN
easat-3604	27	28	[	[	X
easat-3604	27	29	10	10	NUM
easat-3604	27	30	]	]	PUNCT
easat-3604	27	31	.	.	PUNCT
easat-3604	28	1	the	the	DET
easat-3604	28	2	holes	hole	NOUN
easat-3604	28	3	created	create	VERB
easat-3604	28	4	in	in	ADP
easat-3604	28	5	the	the	DET
easat-3604	28	6	beam	beam	NOUN
easat-3604	28	7	and	and	CCONJ
easat-3604	28	8	resonator	resonator	NOUN
easat-3604	28	9	bodies	body	NOUN
easat-3604	28	10	have	have	AUX
easat-3604	28	11	been	be	AUX
easat-3604	28	12	identified	identify	VERB
easat-3604	28	13	as	as	ADP
easat-3604	28	14	an	an	DET
easat-3604	28	15	effective	effective	ADJ
easat-3604	28	16	method	method	NOUN
easat-3604	28	17	for	for	ADP
easat-3604	28	18	minimizing	minimize	VERB
easat-3604	28	19	the	the	DET
easat-3604	28	20	beam	beam	NOUN
easat-3604	28	21	's	's	PART
easat-3604	28	22	effective	effective	ADJ
easat-3604	28	23	mass	mass	NOUN
easat-3604	28	24	and	and	CCONJ
easat-3604	28	25	7405	7405	NUM
easat-3604	28	26	edelweiss	edelweiss	PROPN
easat-3604	28	27	applied	apply	VERB
easat-3604	28	28	science	science	NOUN
easat-3604	28	29	and	and	CCONJ
easat-3604	28	30	technology	technology	NOUN
easat-3604	28	31	issn	issn	PROPN
easat-3604	28	32	:	:	PUNCT
easat-3604	28	33	2576	2576	NUM
easat-3604	28	34	-	-	SYM
easat-3604	28	35	8484	8484	NUM
easat-3604	28	36	vol	vol	NOUN
easat-3604	28	37	.	.	PROPN
easat-3604	29	1	8	8	NUM
easat-3604	29	2	,	,	PUNCT
easat-3604	29	3	no	no	INTJ
easat-3604	29	4	.	.	NOUN
easat-3604	29	5	6	6	NUM
easat-3604	29	6	:	:	SYM
easat-3604	29	7	7404	7404	NUM
easat-3604	29	8	-	-	SYM
easat-3604	29	9	7418	7418	NUM
easat-3604	29	10	,	,	PUNCT
easat-3604	29	11	2024	2024	NUM
easat-3604	29	12	doi	doi	NOUN
easat-3604	29	13	:	:	PUNCT
easat-3604	29	14	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	29	15	©	©	PROPN
easat-3604	29	16	2024	2024	NUM
easat-3604	29	17	by	by	ADP
easat-3604	29	18	the	the	DET
easat-3604	29	19	author	author	NOUN
easat-3604	29	20	;	;	PUNCT
easat-3604	29	21	licensee	licensee	PROPN
easat-3604	29	22	learning	learn	VERB
easat-3604	29	23	gate	gate	NOUN
easat-3604	29	24	mitigating	mitigate	VERB
easat-3604	29	25	the	the	DET
easat-3604	29	26	influence	influence	NOUN
easat-3604	29	27	of	of	ADP
easat-3604	29	28	squeeze	squeeze	NOUN
easat-3604	29	29	film	film	NOUN
easat-3604	29	30	damping	damp	VERB
easat-3604	29	31	.	.	PUNCT
easat-3604	30	1	these	these	DET
easat-3604	30	2	two	two	NUM
easat-3604	30	3	elements	element	NOUN
easat-3604	30	4	are	be	AUX
easat-3604	30	5	pivotal	pivotal	ADJ
easat-3604	30	6	in	in	ADP
easat-3604	30	7	determining	determine	VERB
easat-3604	30	8	the	the	DET
easat-3604	30	9	switching	switch	VERB
easat-3604	30	10	speed	speed	NOUN
easat-3604	30	11	in	in	ADP
easat-3604	30	12	the	the	DET
easat-3604	30	13	mems	mem	NOUN
easat-3604	30	14	switches	switch	NOUN
easat-3604	30	15	[	[	X
easat-3604	30	16	11	11	NUM
easat-3604	30	17	]	]	PUNCT
easat-3604	30	18	.	.	PUNCT
easat-3604	31	1	to	to	PART
easat-3604	31	2	enhance	enhance	VERB
easat-3604	31	3	the	the	DET
easat-3604	31	4	sensitivity	sensitivity	NOUN
easat-3604	31	5	in	in	ADP
easat-3604	31	6	the	the	DET
easat-3604	31	7	mems	mem	NOUN
easat-3604	31	8	resonators	resonator	NOUN
easat-3604	31	9	,	,	PUNCT
easat-3604	31	10	it	it	PRON
easat-3604	31	11	is	be	AUX
easat-3604	31	12	necessary	necessary	ADJ
easat-3604	31	13	to	to	PART
easat-3604	31	14	reduce	reduce	VERB
easat-3604	31	15	the	the	DET
easat-3604	31	16	effective	effective	ADJ
easat-3604	31	17	mass	mass	NOUN
easat-3604	31	18	and	and	CCONJ
easat-3604	31	19	increase	increase	VERB
easat-3604	31	20	the	the	DET
easat-3604	31	21	active	active	ADJ
easat-3604	31	22	area	area	NOUN
easat-3604	31	23	for	for	ADP
easat-3604	31	24	their	their	PRON
easat-3604	31	25	beams	beam	NOUN
easat-3604	32	1	[	[	X
easat-3604	32	2	12	12	NUM
easat-3604	32	3	]	]	PUNCT
easat-3604	32	4	.	.	PUNCT
easat-3604	33	1	although	although	SCONJ
easat-3604	33	2	the	the	DET
easat-3604	33	3	cutout	cutout	NOUN
easat-3604	33	4	holes	hole	NOUN
easat-3604	33	5	have	have	VERB
easat-3604	33	6	a	a	DET
easat-3604	33	7	minor	minor	ADJ
easat-3604	33	8	impact	impact	NOUN
easat-3604	33	9	on	on	ADP
easat-3604	33	10	pull	pull	NOUN
easat-3604	33	11	-	-	PUNCT
easat-3604	33	12	in	in	ADP
easat-3604	33	13	voltage	voltage	NOUN
easat-3604	33	14	,	,	PUNCT
easat-3604	33	15	they	they	PRON
easat-3604	33	16	result	result	VERB
easat-3604	33	17	in	in	ADP
easat-3604	33	18	decreased	decrease	VERB
easat-3604	33	19	equivalent	equivalent	ADJ
easat-3604	33	20	stiffness	stiffness	NOUN
easat-3604	33	21	and	and	CCONJ
easat-3604	33	22	lower	low	ADJ
easat-3604	33	23	effective	effective	ADJ
easat-3604	33	24	elastic	elastic	ADJ
easat-3604	33	25	modulus	modulus	NOUN
easat-3604	33	26	of	of	ADP
easat-3604	33	27	the	the	DET
easat-3604	33	28	meander	meander	NOUN
easat-3604	33	29	flexure	flexure	NOUN
easat-3604	33	30	mems	mem	NOUN
easat-3604	33	31	switch	switch	NOUN
easat-3604	33	32	[	[	X
easat-3604	33	33	13	13	NUM
easat-3604	33	34	]	]	PUNCT
easat-3604	33	35	.	.	PUNCT
easat-3604	34	1	perforated	perforate	VERB
easat-3604	34	2	apertures	aperture	NOUN
easat-3604	34	3	are	be	AUX
easat-3604	34	4	often	often	ADV
easat-3604	34	5	seen	see	VERB
easat-3604	34	6	in	in	ADP
easat-3604	34	7	the	the	DET
easat-3604	34	8	manufacturing	manufacturing	NOUN
easat-3604	34	9	of	of	ADP
easat-3604	34	10	mems	mem	NOUN
easat-3604	34	11	.	.	PUNCT
easat-3604	35	1	they	they	PRON
easat-3604	35	2	are	be	AUX
easat-3604	35	3	generated	generate	VERB
easat-3604	35	4	during	during	ADP
easat-3604	35	5	the	the	DET
easat-3604	35	6	etching	etch	VERB
easat-3604	35	7	procedure	procedure	NOUN
easat-3604	35	8	of	of	ADP
easat-3604	35	9	the	the	DET
easat-3604	35	10	sacrificial	sacrificial	ADJ
easat-3604	35	11	layer	layer	NOUN
easat-3604	35	12	.	.	PUNCT
easat-3604	36	1	perforated	perforate	VERB
easat-3604	36	2	mems	mem	NOUN
easat-3604	36	3	beams	beam	NOUN
easat-3604	36	4	have	have	VERB
easat-3604	36	5	a	a	DET
easat-3604	36	6	regular	regular	ADJ
easat-3604	36	7	arrangement	arrangement	NOUN
easat-3604	36	8	of	of	ADP
easat-3604	36	9	apertures	aperture	NOUN
easat-3604	36	10	or	or	CCONJ
easat-3604	36	11	slots	slot	NOUN
easat-3604	36	12	throughout	throughout	ADP
easat-3604	36	13	their	their	PRON
easat-3604	36	14	length	length	NOUN
easat-3604	36	15	.	.	PUNCT
easat-3604	37	1	the	the	DET
easat-3604	37	2	presence	presence	NOUN
easat-3604	37	3	of	of	ADP
easat-3604	37	4	these	these	DET
easat-3604	37	5	holes	hole	NOUN
easat-3604	37	6	may	may	AUX
easat-3604	37	7	influence	influence	VERB
easat-3604	37	8	the	the	DET
easat-3604	37	9	mechanical	mechanical	ADJ
easat-3604	37	10	properties	property	NOUN
easat-3604	37	11	of	of	ADP
easat-3604	37	12	the	the	DET
easat-3604	37	13	beam	beam	NOUN
easat-3604	37	14	,	,	PUNCT
easat-3604	37	15	including	include	VERB
easat-3604	37	16	its	its	PRON
easat-3604	37	17	stiffness	stiffness	NOUN
easat-3604	37	18	,	,	PUNCT
easat-3604	37	19	resonant	resonant	ADJ
easat-3604	37	20	frequency	frequency	NOUN
easat-3604	37	21	,	,	PUNCT
easat-3604	37	22	and	and	CCONJ
easat-3604	37	23	damping	damp	VERB
easat-3604	37	24	characteristics	characteristic	NOUN
easat-3604	37	25	.	.	PUNCT
easat-3604	38	1	the	the	DET
easat-3604	38	2	analysis	analysis	NOUN
easat-3604	38	3	of	of	ADP
easat-3604	38	4	the	the	DET
easat-3604	38	5	single	single	ADJ
easat-3604	38	6	beam	beam	NOUN
easat-3604	38	7	is	be	AUX
easat-3604	38	8	performed	perform	VERB
easat-3604	38	9	using	use	VERB
easat-3604	38	10	either	either	CCONJ
easat-3604	38	11	euler	euler	NOUN
easat-3604	38	12	-	-	PUNCT
easat-3604	38	13	bernoulli	bernoulli	PROPN
easat-3604	38	14	or	or	CCONJ
easat-3604	38	15	timoshenko	timoshenko	NOUN
easat-3604	38	16	beam	beam	NOUN
easat-3604	38	17	theory	theory	NOUN
easat-3604	38	18	,	,	PUNCT
easat-3604	38	19	based	base	VERB
easat-3604	38	20	on	on	ADP
easat-3604	38	21	the	the	DET
easat-3604	38	22	assumption	assumption	NOUN
easat-3604	38	23	that	that	SCONJ
easat-3604	38	24	the	the	DET
easat-3604	38	25	total	total	ADJ
easat-3604	38	26	stress	stress	NOUN
easat-3604	38	27	over	over	ADP
easat-3604	38	28	the	the	DET
easat-3604	38	29	whole	whole	ADJ
easat-3604	38	30	cross	cross	NOUN
easat-3604	38	31	-	-	NOUN
easat-3604	38	32	section	section	NOUN
easat-3604	38	33	is	be	AUX
easat-3604	38	34	uniform	uniform	ADJ
easat-3604	38	35	for	for	ADP
easat-3604	38	36	both	both	DET
easat-3604	38	37	completely	completely	ADV
easat-3604	38	38	filled	fill	VERB
easat-3604	38	39	and	and	CCONJ
easat-3604	38	40	equivalent	equivalent	ADJ
easat-3604	38	41	perforated	perforate	VERB
easat-3604	38	42	beams	beam	NOUN
easat-3604	38	43	.	.	PUNCT
easat-3604	39	1	furthermore	furthermore	ADV
easat-3604	39	2	,	,	PUNCT
easat-3604	39	3	it	it	PRON
easat-3604	39	4	is	be	AUX
easat-3604	39	5	anticipated	anticipate	VERB
easat-3604	39	6	that	that	SCONJ
easat-3604	39	7	the	the	DET
easat-3604	39	8	stress	stress	NOUN
easat-3604	39	9	distribution	distribution	NOUN
easat-3604	39	10	inside	inside	ADP
easat-3604	39	11	the	the	DET
easat-3604	39	12	filled	fill	VERB
easat-3604	39	13	segment	segment	NOUN
easat-3604	39	14	of	of	ADP
easat-3604	39	15	the	the	DET
easat-3604	39	16	beam	beam	NOUN
easat-3604	39	17	and	and	CCONJ
easat-3604	39	18	plates	plate	NOUN
easat-3604	39	19	adheres	adhere	VERB
easat-3604	39	20	to	to	ADP
easat-3604	39	21	a	a	DET
easat-3604	39	22	linear	linear	ADJ
easat-3604	39	23	and	and	CCONJ
easat-3604	39	24	continuous	continuous	ADJ
easat-3604	39	25	pattern	pattern	NOUN
easat-3604	39	26	[	[	X
easat-3604	39	27	14	14	NUM
easat-3604	39	28	]	]	PUNCT
easat-3604	39	29	,	,	PUNCT
easat-3604	40	1	[	[	X
easat-3604	40	2	15	15	NUM
easat-3604	40	3	]	]	PUNCT
easat-3604	40	4	,	,	PUNCT
easat-3604	40	5	[	[	X
easat-3604	40	6	16	16	NUM
easat-3604	40	7	]	]	PUNCT
easat-3604	40	8	,	,	PUNCT
easat-3604	41	1	[	[	X
easat-3604	41	2	31]-[35	31]-[35	NUM
easat-3604	41	3	]	]	PUNCT
easat-3604	41	4	despite	despite	SCONJ
easat-3604	41	5	appearing	appear	VERB
easat-3604	41	6	for	for	ADP
easat-3604	41	7	merely	merely	ADV
easat-3604	41	8	technological	technological	ADJ
easat-3604	41	9	reasons	reason	NOUN
easat-3604	41	10	for	for	ADP
easat-3604	41	11	increasing	increase	VERB
easat-3604	41	12	the	the	DET
easat-3604	41	13	etching	etch	VERB
easat-3604	41	14	speed	speed	NOUN
easat-3604	41	15	of	of	ADP
easat-3604	41	16	the	the	DET
easat-3604	41	17	sacrificial	sacrificial	ADJ
easat-3604	41	18	layer	layer	NOUN
easat-3604	41	19	under	under	ADP
easat-3604	41	20	the	the	DET
easat-3604	41	21	beam	beam	NOUN
easat-3604	41	22	or	or	CCONJ
easat-3604	41	23	plate	plate	NOUN
easat-3604	41	24	itself	itself	PRON
easat-3604	41	25	,	,	PUNCT
easat-3604	41	26	these	these	DET
easat-3604	41	27	perforated	perforate	VERB
easat-3604	41	28	holes	hole	NOUN
easat-3604	41	29	are	be	AUX
easat-3604	41	30	demonstrated	demonstrate	VERB
easat-3604	41	31	to	to	PART
easat-3604	41	32	affect	affect	VERB
easat-3604	41	33	the	the	DET
easat-3604	41	34	mechanical	mechanical	ADJ
easat-3604	41	35	behavior	behavior	NOUN
easat-3604	41	36	of	of	ADP
easat-3604	41	37	mems	mems	ADJ
easat-3604	41	38	structures	structure	NOUN
easat-3604	41	39	on	on	ADP
easat-3604	41	40	various	various	ADJ
easat-3604	41	41	sides	side	NOUN
easat-3604	42	1	[	[	X
easat-3604	42	2	17	17	NUM
easat-3604	42	3	]	]	PUNCT
easat-3604	42	4	,	,	PUNCT
easat-3604	43	1	[	[	X
easat-3604	43	2	18	18	NUM
easat-3604	43	3	]	]	PUNCT
easat-3604	43	4	,	,	PUNCT
easat-3604	43	5	[	[	X
easat-3604	43	6	19	19	NUM
easat-3604	43	7	]	]	PUNCT
easat-3604	43	8	,	,	PUNCT
easat-3604	43	9	[	[	X
easat-3604	43	10	20	20	NUM
easat-3604	43	11	]	]	PUNCT
easat-3604	43	12	.	.	PUNCT
easat-3604	44	1	an	an	DET
easat-3604	44	2	experimental	experimental	ADJ
easat-3604	44	3	study	study	NOUN
easat-3604	44	4	on	on	ADP
easat-3604	44	5	specimens	specimen	NOUN
easat-3604	44	6	with	with	ADP
easat-3604	44	7	polysilicon	polysilicon	NOUN
easat-3604	44	8	materials	material	NOUN
easat-3604	44	9	has	have	AUX
easat-3604	44	10	shown	show	VERB
easat-3604	44	11	that	that	SCONJ
easat-3604	44	12	compared	compare	VERB
easat-3604	44	13	with	with	ADP
easat-3604	44	14	the	the	DET
easat-3604	44	15	mechanical	mechanical	ADJ
easat-3604	44	16	characteristics	characteristic	NOUN
easat-3604	44	17	of	of	ADP
easat-3604	44	18	the	the	DET
easat-3604	44	19	specimens	specimen	NOUN
easat-3604	44	20	without	without	ADP
easat-3604	44	21	etch	etch	NOUN
easat-3604	44	22	holes	hole	NOUN
easat-3604	44	23	,	,	PUNCT
easat-3604	44	24	the	the	DET
easat-3604	44	25	tensile	tensile	NOUN
easat-3604	44	26	strength	strength	NOUN
easat-3604	44	27	has	have	AUX
easat-3604	44	28	dropped	drop	VERB
easat-3604	44	29	by	by	ADP
easat-3604	44	30	50	50	NUM
easat-3604	44	31	%	%	NOUN
easat-3604	44	32	and	and	CCONJ
easat-3604	44	33	young	young	ADJ
easat-3604	44	34	’s	’s	PART
easat-3604	44	35	modulus	modulus	ADJ
easat-3604	44	36	decreases	decrease	NOUN
easat-3604	44	37	only	only	ADV
easat-3604	44	38	about	about	ADV
easat-3604	44	39	18	18	NUM
easat-3604	44	40	%	%	NOUN
easat-3604	44	41	due	due	ADP
easat-3604	44	42	to	to	ADP
easat-3604	44	43	the	the	DET
easat-3604	44	44	existence	existence	NOUN
easat-3604	44	45	of	of	ADP
easat-3604	44	46	the	the	DET
easat-3604	44	47	etch	etch	NOUN
easat-3604	44	48	holes	hole	NOUN
easat-3604	45	1	[	[	X
easat-3604	45	2	17	17	NUM
easat-3604	45	3	]	]	PUNCT
easat-3604	45	4	,	,	PUNCT
easat-3604	45	5	[	[	X
easat-3604	45	6	18	18	NUM
easat-3604	45	7	]	]	PUNCT
easat-3604	45	8	.	.	PUNCT
easat-3604	46	1	the	the	DET
easat-3604	46	2	plate	plate	NOUN
easat-3604	46	3	structures	structure	NOUN
easat-3604	46	4	with	with	ADP
easat-3604	46	5	perforated	perforate	VERB
easat-3604	46	6	holes	hole	NOUN
easat-3604	46	7	were	be	AUX
easat-3604	46	8	also	also	ADV
easat-3604	46	9	studied	study	VERB
easat-3604	46	10	.	.	PUNCT
easat-3604	47	1	the	the	DET
easat-3604	47	2	results	result	NOUN
easat-3604	47	3	show	show	VERB
easat-3604	47	4	that	that	SCONJ
easat-3604	47	5	the	the	DET
easat-3604	47	6	release	release	NOUN
easat-3604	47	7	hole	hole	NOUN
easat-3604	47	8	on	on	ADP
easat-3604	47	9	the	the	DET
easat-3604	47	10	back	back	ADJ
easat-3604	47	11	plate	plate	NOUN
easat-3604	47	12	of	of	ADP
easat-3604	47	13	mems	mem	NOUN
easat-3604	47	14	devices	device	NOUN
easat-3604	47	15	affects	affect	VERB
easat-3604	47	16	not	not	PART
easat-3604	47	17	only	only	ADV
easat-3604	47	18	the	the	DET
easat-3604	47	19	stiffness	stiffness	ADJ
easat-3604	47	20	coefficient	coefficient	NOUN
easat-3604	47	21	but	but	CCONJ
easat-3604	47	22	also	also	ADV
easat-3604	47	23	the	the	DET
easat-3604	47	24	damping	damp	VERB
easat-3604	47	25	force	force	NOUN
easat-3604	47	26	of	of	ADP
easat-3604	47	27	squeeze	squeeze	NOUN
easat-3604	47	28	films	film	NOUN
easat-3604	47	29	in	in	ADP
easat-3604	47	30	the	the	DET
easat-3604	47	31	whole	whole	ADJ
easat-3604	47	32	structure	structure	NOUN
easat-3604	47	33	[	[	X
easat-3604	47	34	19	19	NUM
easat-3604	47	35	]	]	PUNCT
easat-3604	47	36	.	.	PUNCT
easat-3604	48	1	the	the	DET
easat-3604	48	2	etching	etch	VERB
easat-3604	48	3	holes	hole	NOUN
easat-3604	48	4	often	often	ADV
easat-3604	48	5	alter	alter	VERB
easat-3604	48	6	the	the	DET
easat-3604	48	7	electromechanical	electromechanical	ADJ
easat-3604	48	8	properties	property	NOUN
easat-3604	48	9	of	of	ADP
easat-3604	48	10	the	the	DET
easat-3604	48	11	microdevices	microdevice	NOUN
easat-3604	48	12	,	,	PUNCT
easat-3604	48	13	especially	especially	ADV
easat-3604	48	14	capacitive	capacitive	ADJ
easat-3604	48	15	devices	device	NOUN
easat-3604	48	16	,	,	PUNCT
easat-3604	48	17	because	because	SCONJ
easat-3604	48	18	the	the	DET
easat-3604	48	19	fringe	fringe	NOUN
easat-3604	48	20	fields	field	NOUN
easat-3604	48	21	induced	induce	VERB
easat-3604	48	22	by	by	ADP
easat-3604	48	23	the	the	DET
easat-3604	48	24	etching	etch	VERB
easat-3604	48	25	holes	hole	NOUN
easat-3604	48	26	can	can	AUX
easat-3604	48	27	significantly	significantly	ADV
easat-3604	48	28	alter	alter	VERB
easat-3604	48	29	the	the	DET
easat-3604	48	30	electrical	electrical	ADJ
easat-3604	48	31	properties	property	NOUN
easat-3604	48	32	[	[	X
easat-3604	48	33	20	20	NUM
easat-3604	48	34	]	]	PUNCT
easat-3604	48	35	.	.	PUNCT
easat-3604	49	1	thai	thai	PROPN
easat-3604	49	2	et	et	PROPN
easat-3604	49	3	al	al	PROPN
easat-3604	49	4	.	.	PUNCT
easat-3604	50	1	[	[	X
easat-3604	50	2	21	21	NUM
easat-3604	50	3	]	]	PUNCT
easat-3604	50	4	,	,	PUNCT
easat-3604	51	1	[	[	X
easat-3604	51	2	22	22	NUM
easat-3604	51	3	]	]	PUNCT
easat-3604	51	4	studied	study	VERB
easat-3604	51	5	the	the	DET
easat-3604	51	6	mechanical	mechanical	ADJ
easat-3604	51	7	behavior	behavior	NOUN
easat-3604	51	8	of	of	ADP
easat-3604	51	9	microsized	microsize	VERB
easat-3604	51	10	beam	beam	NOUN
easat-3604	51	11	structures	structure	NOUN
easat-3604	51	12	taking	take	VERB
easat-3604	51	13	into	into	ADP
easat-3604	51	14	account	account	NOUN
easat-3604	51	15	geometrical	geometrical	ADJ
easat-3604	51	16	imperfections	imperfection	NOUN
easat-3604	51	17	.	.	PUNCT
easat-3604	52	1	nhung	nhung	PROPN
easat-3604	52	2	and	and	CCONJ
easat-3604	52	3	coworkers	coworker	NOUN
easat-3604	53	1	[	[	X
easat-3604	53	2	23	23	NUM
easat-3604	53	3	]	]	PUNCT
easat-3604	53	4	studied	study	VERB
easat-3604	53	5	the	the	DET
easat-3604	53	6	geometric	geometric	ADJ
easat-3604	53	7	nonlinearity	nonlinearity	NOUN
easat-3604	53	8	of	of	ADP
easat-3604	53	9	microplate	microplate	ADJ
easat-3604	53	10	structures	structure	NOUN
easat-3604	53	11	with	with	ADP
easat-3604	53	12	variable	variable	ADJ
easat-3604	53	13	thickness	thickness	NOUN
easat-3604	53	14	using	use	VERB
easat-3604	53	15	modified	modified	ADJ
easat-3604	53	16	couple	couple	NOUN
easat-3604	53	17	stress	stress	NOUN
easat-3604	53	18	theory	theory	NOUN
easat-3604	53	19	.	.	PUNCT
easat-3604	54	1	this	this	DET
easat-3604	54	2	study	study	NOUN
easat-3604	54	3	will	will	AUX
easat-3604	54	4	identify	identify	VERB
easat-3604	54	5	and	and	CCONJ
easat-3604	54	6	present	present	VERB
easat-3604	54	7	the	the	DET
easat-3604	54	8	dynamic	dynamic	ADJ
easat-3604	54	9	characteristics	characteristic	NOUN
easat-3604	54	10	of	of	ADP
easat-3604	54	11	micro	micro	NOUN
easat-3604	54	12	-	-	NOUN
easat-3604	54	13	beams	beam	NOUN
easat-3604	54	14	featuring	feature	VERB
easat-3604	54	15	intricate	intricate	ADJ
easat-3604	54	16	structures	structure	NOUN
easat-3604	54	17	with	with	ADP
easat-3604	54	18	square	square	ADJ
easat-3604	54	19	or	or	CCONJ
easat-3604	54	20	circular	circular	ADJ
easat-3604	54	21	perforations	perforation	NOUN
easat-3604	54	22	.	.	PUNCT
easat-3604	55	1	the	the	DET
easat-3604	55	2	beams	beam	NOUN
easat-3604	55	3	analyzed	analyze	VERB
easat-3604	55	4	include	include	VERB
easat-3604	55	5	folded	fold	VERB
easat-3604	55	6	beams	beam	NOUN
easat-3604	55	7	,	,	PUNCT
easat-3604	55	8	crab	crab	NOUN
easat-3604	55	9	beams	beam	NOUN
easat-3604	55	10	,	,	PUNCT
easat-3604	55	11	and	and	CCONJ
easat-3604	55	12	v	v	X
easat-3604	55	13	-	-	PUNCT
easat-3604	55	14	shaped	shape	VERB
easat-3604	55	15	beams	beam	NOUN
easat-3604	55	16	,	,	PUNCT
easat-3604	55	17	all	all	PRON
easat-3604	55	18	of	of	ADP
easat-3604	55	19	which	which	PRON
easat-3604	55	20	are	be	AUX
easat-3604	55	21	commonly	commonly	ADV
easat-3604	55	22	utilized	utilize	VERB
easat-3604	55	23	in	in	ADP
easat-3604	55	24	mems	mem	NOUN
easat-3604	55	25	devices	device	NOUN
easat-3604	55	26	.	.	PUNCT
easat-3604	56	1	the	the	DET
easat-3604	56	2	focus	focus	NOUN
easat-3604	56	3	of	of	ADP
easat-3604	56	4	this	this	DET
easat-3604	56	5	research	research	NOUN
easat-3604	56	6	is	be	AUX
easat-3604	56	7	on	on	ADP
easat-3604	56	8	dynamic	dynamic	ADJ
easat-3604	56	9	analysis	analysis	NOUN
easat-3604	56	10	to	to	PART
easat-3604	56	11	ascertain	ascertain	VERB
easat-3604	56	12	the	the	DET
easat-3604	56	13	equivalent	equivalent	ADJ
easat-3604	56	14	stiffness	stiffness	NOUN
easat-3604	56	15	and	and	CCONJ
easat-3604	56	16	modal	modal	ADJ
easat-3604	56	17	analysis	analysis	NOUN
easat-3604	56	18	to	to	PART
easat-3604	56	19	establish	establish	VERB
easat-3604	56	20	the	the	DET
easat-3604	56	21	resonant	resonant	ADJ
easat-3604	56	22	frequencies	frequency	NOUN
easat-3604	56	23	for	for	ADP
easat-3604	56	24	various	various	ADJ
easat-3604	56	25	movements	movement	NOUN
easat-3604	56	26	influenced	influence	VERB
easat-3604	56	27	by	by	ADP
easat-3604	56	28	the	the	DET
easat-3604	56	29	differently	differently	ADV
easat-3604	56	30	shaped	shape	VERB
easat-3604	56	31	holes	hole	NOUN
easat-3604	56	32	within	within	ADP
easat-3604	56	33	the	the	DET
easat-3604	56	34	beams	beam	NOUN
easat-3604	56	35	.	.	PUNCT
easat-3604	57	1	the	the	DET
easat-3604	57	2	rest	rest	NOUN
easat-3604	57	3	of	of	ADP
easat-3604	57	4	this	this	DET
easat-3604	57	5	paper	paper	NOUN
easat-3604	57	6	is	be	AUX
easat-3604	57	7	structured	structure	VERB
easat-3604	57	8	as	as	SCONJ
easat-3604	57	9	follows	follow	VERB
easat-3604	57	10	:	:	PUNCT
easat-3604	57	11	section	section	NOUN
easat-3604	57	12	2	2	NUM
easat-3604	57	13	presents	present	VERB
easat-3604	57	14	the	the	DET
easat-3604	57	15	perforated	perforated	ADJ
easat-3604	57	16	microbeam	microbeam	NOUN
easat-3604	57	17	models	model	NOUN
easat-3604	57	18	.	.	PUNCT
easat-3604	58	1	dynamic	dynamic	ADJ
easat-3604	58	2	characteristics	characteristic	NOUN
easat-3604	58	3	of	of	ADP
easat-3604	58	4	perforated	perforate	VERB
easat-3604	58	5	microbeams	microbeam	NOUN
easat-3604	58	6	are	be	AUX
easat-3604	58	7	described	describe	VERB
easat-3604	58	8	in	in	ADP
easat-3604	58	9	section	section	NOUN
easat-3604	58	10	3	3	NUM
easat-3604	58	11	,	,	PUNCT
easat-3604	58	12	in	in	ADP
easat-3604	58	13	which	which	PRON
easat-3604	58	14	,	,	PUNCT
easat-3604	58	15	theories	theory	NOUN
easat-3604	58	16	of	of	ADP
easat-3604	58	17	the	the	DET
easat-3604	58	18	perforated	perforate	VERB
easat-3604	58	19	single	single	ADJ
easat-3604	58	20	-	-	PUNCT
easat-3604	58	21	beam	beam	NOUN
easat-3604	58	22	,	,	PUNCT
easat-3604	58	23	the	the	DET
easat-3604	58	24	equivalent	equivalent	ADJ
easat-3604	58	25	and	and	CCONJ
easat-3604	58	26	natural	natural	ADJ
easat-3604	58	27	frequencies	frequency	NOUN
easat-3604	58	28	of	of	ADP
easat-3604	58	29	perforated	perforated	ADJ
easat-3604	58	30	micro	micro	NOUN
easat-3604	58	31	-	-	NOUN
easat-3604	58	32	beams	beam	NOUN
easat-3604	58	33	with	with	ADP
easat-3604	58	34	complex	complex	ADJ
easat-3604	58	35	structures	structure	NOUN
easat-3604	58	36	,	,	PUNCT
easat-3604	58	37	and	and	CCONJ
easat-3604	58	38	air	air	NOUN
easat-3604	58	39	damping	damp	VERB
easat-3604	58	40	with	with	ADP
easat-3604	58	41	perforated	perforate	VERB
easat-3604	58	42	beams	beam	NOUN
easat-3604	58	43	are	be	AUX
easat-3604	58	44	presented	present	VERB
easat-3604	58	45	in	in	ADP
easat-3604	58	46	detail	detail	NOUN
easat-3604	58	47	.	.	PUNCT
easat-3604	59	1	some	some	PRON
easat-3604	59	2	of	of	ADP
easat-3604	59	3	the	the	DET
easat-3604	59	4	main	main	ADJ
easat-3604	59	5	results	result	NOUN
easat-3604	59	6	of	of	ADP
easat-3604	59	7	the	the	DET
easat-3604	59	8	paper	paper	NOUN
easat-3604	59	9	are	be	AUX
easat-3604	59	10	presented	present	VERB
easat-3604	59	11	in	in	ADP
easat-3604	59	12	section	section	NOUN
easat-3604	59	13	4	4	NUM
easat-3604	59	14	.	.	PUNCT
easat-3604	60	1	a	a	DET
easat-3604	60	2	)	)	PUNCT
easat-3604	60	3	perforated	perforated	ADJ
easat-3604	60	4	beam	beam	NOUN
easat-3604	60	5	with	with	ADP
easat-3604	60	6	square	square	ADJ
easat-3604	60	7	holes	hole	NOUN
easat-3604	60	8	7406	7406	NUM
easat-3604	60	9	edelweiss	edelweiss	PROPN
easat-3604	60	10	applied	apply	VERB
easat-3604	60	11	science	science	NOUN
easat-3604	60	12	and	and	CCONJ
easat-3604	60	13	technology	technology	NOUN
easat-3604	60	14	issn	issn	PROPN
easat-3604	60	15	:	:	PUNCT
easat-3604	60	16	2576	2576	NUM
easat-3604	60	17	-	-	SYM
easat-3604	60	18	8484	8484	NUM
easat-3604	60	19	vol	vol	NOUN
easat-3604	60	20	.	.	PROPN
easat-3604	60	21	8	8	NUM
easat-3604	60	22	,	,	PUNCT
easat-3604	60	23	no	no	INTJ
easat-3604	60	24	.	.	NOUN
easat-3604	61	1	6	6	NUM
easat-3604	61	2	:	:	SYM
easat-3604	61	3	7404	7404	NUM
easat-3604	61	4	-	-	SYM
easat-3604	61	5	7418	7418	NUM
easat-3604	61	6	,	,	PUNCT
easat-3604	61	7	2024	2024	NUM
easat-3604	61	8	doi	doi	NOUN
easat-3604	61	9	:	:	PUNCT
easat-3604	61	10	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	61	11	©	©	PROPN
easat-3604	61	12	2024	2024	NUM
easat-3604	61	13	by	by	ADP
easat-3604	61	14	the	the	DET
easat-3604	61	15	author	author	NOUN
easat-3604	61	16	;	;	PUNCT
easat-3604	61	17	licensee	licensee	PROPN
easat-3604	61	18	learning	learn	VERB
easat-3604	61	19	gate	gate	PROPN
easat-3604	61	20	b	b	NOUN
easat-3604	61	21	)	)	PUNCT
easat-3604	61	22	perforated	perforate	VERB
easat-3604	61	23	beam	beam	NOUN
easat-3604	61	24	with	with	ADP
easat-3604	61	25	circle	circle	NOUN
easat-3604	61	26	holes	hole	NOUN
easat-3604	61	27	figure	figure	NOUN
easat-3604	61	28	1	1	NUM
easat-3604	61	29	.	.	PUNCT
easat-3604	61	30	model	model	NOUN
easat-3604	61	31	of	of	ADP
easat-3604	61	32	the	the	DET
easat-3604	61	33	beam	beam	NOUN
easat-3604	61	34	with	with	ADP
easat-3604	61	35	perforated	perforated	ADJ
easat-3604	61	36	hole	hole	NOUN
easat-3604	61	37	.	.	PUNCT
easat-3604	62	1	2	2	X
easat-3604	62	2	.	.	NUM
easat-3604	62	3	perforated	perforate	VERB
easat-3604	62	4	microbeam	microbeam	NOUN
easat-3604	62	5	models	model	NOUN
easat-3604	62	6	some	some	DET
easat-3604	62	7	models	model	NOUN
easat-3604	62	8	of	of	ADP
easat-3604	62	9	timoshenko	timoshenko	NOUN
easat-3604	62	10	or	or	CCONJ
easat-3604	62	11	euler	euler	PROPN
easat-3604	62	12	bernoulli	bernoulli	PROPN
easat-3604	62	13	beam	beam	PROPN
easat-3604	62	14	with	with	ADP
easat-3604	62	15	square	square	ADJ
easat-3604	62	16	perforated	perforate	VERB
easat-3604	62	17	holes	hole	NOUN
easat-3604	62	18	located	locate	VERB
easat-3604	62	19	along	along	ADP
easat-3604	62	20	the	the	DET
easat-3604	62	21	length	length	NOUN
easat-3604	62	22	beam	beam	NOUN
easat-3604	62	23	are	be	AUX
easat-3604	62	24	shown	show	VERB
easat-3604	62	25	in	in	ADP
easat-3604	62	26	figure	figure	NOUN
easat-3604	62	27	1a	1a	NOUN
easat-3604	62	28	.	.	PUNCT
easat-3604	63	1	these	these	DET
easat-3604	63	2	beams	beam	NOUN
easat-3604	63	3	are	be	AUX
easat-3604	63	4	considered	consider	VERB
easat-3604	63	5	with	with	ADP
easat-3604	63	6	the	the	DET
easat-3604	63	7	length	length	NOUN
easat-3604	63	8	l	l	NOUN
easat-3604	63	9	and	and	CCONJ
easat-3604	63	10	the	the	DET
easat-3604	63	11	cross	cross	NOUN
easat-3604	63	12	-	-	NOUN
easat-3604	63	13	section	section	NOUN
easat-3604	63	14	w×h	w×h	PROPN
easat-3604	63	15	(	(	PUNCT
easat-3604	63	16	where	where	SCONJ
easat-3604	63	17	h	h	NOUN
easat-3604	63	18	is	be	AUX
easat-3604	63	19	the	the	DET
easat-3604	63	20	thickness	thickness	NOUN
easat-3604	63	21	and	and	CCONJ
easat-3604	63	22	w	w	NOUN
easat-3604	63	23	is	be	AUX
easat-3604	63	24	the	the	DET
easat-3604	63	25	width	width	NOUN
easat-3604	63	26	of	of	ADP
easat-3604	63	27	beams	beam	NOUN
easat-3604	63	28	)	)	PUNCT
easat-3604	63	29	.	.	PUNCT
easat-3604	64	1	the	the	DET
easat-3604	64	2	square	square	ADJ
easat-3604	64	3	hole	hole	NOUN
easat-3604	64	4	(	(	PUNCT
easat-3604	64	5	edge	edge	NOUN
easat-3604	64	6	w	w	NOUN
easat-3604	64	7	)	)	PUNCT
easat-3604	64	8	is	be	AUX
easat-3604	64	9	located	locate	VERB
easat-3604	64	10	at	at	ADP
easat-3604	64	11	the	the	DET
easat-3604	64	12	center	center	NOUN
easat-3604	64	13	of	of	ADP
easat-3604	64	14	the	the	DET
easat-3604	64	15	square	square	ADJ
easat-3604	64	16	meshed	mesh	VERB
easat-3604	64	17	grid	grid	NOUN
easat-3604	64	18	l.	l.	NOUN
easat-3604	64	19	in	in	ADP
easat-3604	64	20	this	this	DET
easat-3604	64	21	study	study	NOUN
easat-3604	64	22	,	,	PUNCT
easat-3604	64	23	the	the	DET
easat-3604	64	24	square	square	ADJ
easat-3604	64	25	hole	hole	NOUN
easat-3604	64	26	w	w	NOUN
easat-3604	64	27	is	be	AUX
easat-3604	64	28	replated	replate	VERB
easat-3604	64	29	with	with	ADP
easat-3604	64	30	the	the	DET
easat-3604	64	31	circle	circle	NOUN
easat-3604	64	32	hole	hole	NOUN
easat-3604	64	33	with	with	ADP
easat-3604	64	34	diameter	diameter	NOUN
easat-3604	64	35	d	d	PROPN
easat-3604	64	36	(	(	PUNCT
easat-3604	64	37	d	d	NOUN
easat-3604	64	38	=	=	SYM
easat-3604	64	39	w	w	NOUN
easat-3604	64	40	)	)	PUNCT
easat-3604	64	41	for	for	ADP
easat-3604	64	42	an	an	DET
easat-3604	64	43	additional	additional	ADJ
easat-3604	64	44	study	study	NOUN
easat-3604	64	45	case	case	NOUN
easat-3604	64	46	to	to	PART
easat-3604	64	47	determine	determine	VERB
easat-3604	64	48	the	the	DET
easat-3604	64	49	dynamic	dynamic	ADJ
easat-3604	64	50	characteristics	characteristic	NOUN
easat-3604	64	51	of	of	ADP
easat-3604	64	52	the	the	DET
easat-3604	64	53	perforated	perforate	VERB
easat-3604	64	54	timoshenko	timoshenko	NOUN
easat-3604	64	55	beam	beam	NOUN
easat-3604	64	56	(	(	PUNCT
easat-3604	64	57	figure	figure	NOUN
easat-3604	64	58	1b	1b	NUM
easat-3604	64	59	)	)	PUNCT
easat-3604	64	60	.	.	PUNCT
easat-3604	65	1	to	to	PART
easat-3604	65	2	evaluate	evaluate	VERB
easat-3604	65	3	the	the	DET
easat-3604	65	4	effect	effect	NOUN
easat-3604	65	5	of	of	ADP
easat-3604	65	6	the	the	DET
easat-3604	65	7	perforated	perforate	VERB
easat-3604	65	8	holes	hole	NOUN
easat-3604	65	9	on	on	ADP
easat-3604	65	10	the	the	DET
easat-3604	65	11	dynamic	dynamic	ADJ
easat-3604	65	12	characteristics	characteristic	NOUN
easat-3604	65	13	of	of	ADP
easat-3604	65	14	the	the	DET
easat-3604	65	15	beams	beam	NOUN
easat-3604	65	16	,	,	PUNCT
easat-3604	65	17	the	the	DET
easat-3604	65	18	fill	fill	NOUN
easat-3604	65	19	factor	factor	NOUN
easat-3604	65	20	is	be	AUX
easat-3604	65	21	defined	define	VERB
easat-3604	65	22	as	as	ADP
easat-3604	65	23	the	the	DET
easat-3604	65	24	proportion	proportion	NOUN
easat-3604	65	25	of	of	ADP
easat-3604	65	26	the	the	DET
easat-3604	65	27	hole	hole	NOUN
easat-3604	65	28	size	size	NOUN
easat-3604	65	29	(	(	PUNCT
easat-3604	65	30	either	either	CCONJ
easat-3604	65	31	width	width	VERB
easat-3604	65	32	w	w	NOUN
easat-3604	65	33	or	or	CCONJ
easat-3604	65	34	diameter	diameter	NOUN
easat-3604	65	35	d	d	NOUN
easat-3604	65	36	)	)	PUNCT
easat-3604	65	37	to	to	ADP
easat-3604	65	38	the	the	DET
easat-3604	65	39	dimensions	dimension	NOUN
easat-3604	65	40	of	of	ADP
easat-3604	65	41	the	the	DET
easat-3604	65	42	meshed	mesh	VERB
easat-3604	65	43	grid	grid	NOUN
easat-3604	65	44	l	l	NOUN
easat-3604	66	1	[	[	X
easat-3604	66	2	12	12	NUM
easat-3604	66	3	]	]	PUNCT
easat-3604	66	4	,	,	PUNCT
easat-3604	66	5	[	[	X
easat-3604	66	6	24	24	NUM
easat-3604	66	7	]	]	PUNCT
easat-3604	66	8	.	.	PUNCT
easat-3604	67	1	1	1	NUM
easat-3604	67	2	l	l	NOUN
easat-3604	67	3	w	w	PROPN
easat-3604	67	4	w	w	PROPN
easat-3604	67	5	l	l	PROPN
easat-3604	67	6	l	l	NOUN
easat-3604	67	7	−	−	NOUN
easat-3604	68	1	=	=	SYM
easat-3604	68	2	=	=	SYM
easat-3604	68	3	−	−	ADJ
easat-3604	68	4	or	or	CCONJ
easat-3604	68	5	1	1	NUM
easat-3604	68	6	l	l	NOUN
easat-3604	69	1	d	d	X
easat-3604	69	2	d	d	X
easat-3604	69	3	l	l	NOUN
easat-3604	69	4	l	l	NOUN
easat-3604	69	5	−	−	PUNCT
easat-3604	70	1	=	=	SYM
easat-3604	70	2	=	=	SYM
easat-3604	71	1	−	−	ADJ
easat-3604	71	2	(	(	PUNCT
easat-3604	71	3	1	1	NUM
easat-3604	71	4	)	)	PUNCT
easat-3604	71	5	whereby	whereby	ADV
easat-3604	71	6	,	,	PUNCT
easat-3604	71	7	the	the	DET
easat-3604	71	8	fill	fill	NOUN
easat-3604	71	9	factor	factor	NOUN
easat-3604	71	10	is	be	AUX
easat-3604	71	11	considered	consider	VERB
easat-3604	71	12	as	as	ADP
easat-3604	71	13	0	0	NUM
easat-3604	71	14	≤	≤	NUM
easat-3604	71	15	α	α	NOUN
easat-3604	71	16	≤	≤	NUM
easat-3604	71	17	1	1	NUM
easat-3604	71	18	,	,	PUNCT
easat-3604	71	19	α	α	NOUN
easat-3604	71	20	=	=	SYM
easat-3604	71	21	0	0	NUM
easat-3604	71	22	represents	represent	VERB
easat-3604	71	23	an	an	DET
easat-3604	71	24	unrealistic	unrealistic	ADJ
easat-3604	71	25	scenario	scenario	NOUN
easat-3604	71	26	where	where	SCONJ
easat-3604	71	27	the	the	DET
easat-3604	71	28	entire	entire	ADJ
easat-3604	71	29	beam	beam	NOUN
easat-3604	71	30	is	be	AUX
easat-3604	71	31	cut	cut	VERB
easat-3604	71	32	out	out	ADP
easat-3604	71	33	(	(	PUNCT
easat-3604	71	34	d	d	NOUN
easat-3604	71	35	=	=	SYM
easat-3604	71	36	l	l	NOUN
easat-3604	71	37	or	or	CCONJ
easat-3604	71	38	w	w	NOUN
easat-3604	71	39	=	=	SYM
easat-3604	71	40	l	l	NOUN
easat-3604	71	41	)	)	PUNCT
easat-3604	71	42	,	,	PUNCT
easat-3604	71	43	and	and	CCONJ
easat-3604	71	44	α	α	DET
easat-3604	71	45	=	=	SYM
easat-3604	71	46	1	1	NUM
easat-3604	71	47	indicates	indicate	VERB
easat-3604	71	48	a	a	DET
easat-3604	71	49	completely	completely	ADV
easat-3604	71	50	full	full	ADJ
easat-3604	71	51	beam	beam	NOUN
easat-3604	71	52	without	without	ADP
easat-3604	71	53	the	the	DET
easat-3604	71	54	holes	hole	NOUN
easat-3604	71	55	cutout	cutout	NOUN
easat-3604	71	56	(	(	PUNCT
easat-3604	71	57	w	w	NOUN
easat-3604	71	58	=	=	SYM
easat-3604	71	59	d	d	NOUN
easat-3604	71	60	=	=	NOUN
easat-3604	71	61	0	0	NUM
easat-3604	71	62	)	)	PUNCT
easat-3604	71	63	.	.	PUNCT
easat-3604	72	1	as	as	SCONJ
easat-3604	72	2	the	the	DET
easat-3604	72	3	fill	fill	NOUN
easat-3604	72	4	factor	factor	NOUN
easat-3604	72	5	decreases	decrease	VERB
easat-3604	72	6	,	,	PUNCT
easat-3604	72	7	the	the	DET
easat-3604	72	8	size	size	NOUN
easat-3604	72	9	of	of	ADP
easat-3604	72	10	the	the	DET
easat-3604	72	11	hole	hole	NOUN
easat-3604	72	12	increases	increase	VERB
easat-3604	72	13	.	.	PUNCT
easat-3604	73	1	in	in	ADP
easat-3604	73	2	this	this	DET
easat-3604	73	3	study	study	NOUN
easat-3604	73	4	,	,	PUNCT
easat-3604	73	5	the	the	DET
easat-3604	73	6	values	value	NOUN
easat-3604	73	7	α	α	X
easat-3604	73	8	=	=	SYM
easat-3604	73	9	0	0	NUM
easat-3604	73	10	and	and	CCONJ
easat-3604	73	11	α	α	NOUN
easat-3604	73	12	=	=	NOUN
easat-3604	73	13	1	1	NUM
easat-3604	73	14	will	will	AUX
easat-3604	73	15	be	be	AUX
easat-3604	73	16	excluded	exclude	VERB
easat-3604	73	17	to	to	PART
easat-3604	73	18	maintain	maintain	VERB
easat-3604	73	19	consistency	consistency	NOUN
easat-3604	73	20	in	in	ADP
easat-3604	73	21	the	the	DET
easat-3604	73	22	models	model	NOUN
easat-3604	73	23	created	create	VERB
easat-3604	73	24	during	during	ADP
easat-3604	73	25	the	the	DET
easat-3604	73	26	simulation	simulation	NOUN
easat-3604	73	27	analyses	analysis	NOUN
easat-3604	73	28	and	and	CCONJ
easat-3604	73	29	to	to	PART
easat-3604	73	30	suit	suit	VERB
easat-3604	73	31	the	the	DET
easat-3604	73	32	research	research	NOUN
easat-3604	73	33	subjects	subject	NOUN
easat-3604	73	34	for	for	ADP
easat-3604	73	35	the	the	DET
easat-3604	73	36	paper	paper	NOUN
easat-3604	73	37	.	.	PUNCT
easat-3604	74	1	7407	7407	NUM
easat-3604	74	2	edelweiss	edelweiss	PROPN
easat-3604	74	3	applied	apply	VERB
easat-3604	74	4	science	science	NOUN
easat-3604	74	5	and	and	CCONJ
easat-3604	74	6	technology	technology	NOUN
easat-3604	74	7	issn	issn	PROPN
easat-3604	74	8	:	:	PUNCT
easat-3604	74	9	2576	2576	NUM
easat-3604	74	10	-	-	SYM
easat-3604	74	11	8484	8484	NUM
easat-3604	74	12	vol	vol	NOUN
easat-3604	74	13	.	.	PROPN
easat-3604	74	14	8	8	NUM
easat-3604	74	15	,	,	PUNCT
easat-3604	74	16	no	no	INTJ
easat-3604	74	17	.	.	NOUN
easat-3604	74	18	6	6	NUM
easat-3604	74	19	:	:	SYM
easat-3604	74	20	7404	7404	NUM
easat-3604	74	21	-	-	SYM
easat-3604	74	22	7418	7418	NUM
easat-3604	74	23	,	,	PUNCT
easat-3604	74	24	2024	2024	NUM
easat-3604	74	25	doi	doi	NOUN
easat-3604	74	26	:	:	PUNCT
easat-3604	74	27	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	74	28	©	©	PROPN
easat-3604	74	29	2024	2024	NUM
easat-3604	74	30	by	by	ADP
easat-3604	74	31	the	the	DET
easat-3604	74	32	author	author	NOUN
easat-3604	74	33	;	;	PUNCT
easat-3604	74	34	licensee	licensee	PROPN
easat-3604	74	35	learning	learning	NOUN
easat-3604	74	36	gate	gate	VERB
easat-3604	74	37	a	a	DET
easat-3604	74	38	)	)	PUNCT
easat-3604	74	39	crab	crab	NOUN
easat-3604	74	40	-	-	PUNCT
easat-3604	74	41	shaped	shape	VERB
easat-3604	74	42	beam	beam	NOUN
easat-3604	74	43	,	,	PUNCT
easat-3604	74	44	b	b	NOUN
easat-3604	74	45	)	)	PUNCT
easat-3604	74	46	folded	fold	VERB
easat-3604	74	47	beam	beam	NOUN
easat-3604	74	48	,	,	PUNCT
easat-3604	74	49	and	and	CCONJ
easat-3604	74	50	c	c	X
easat-3604	74	51	)	)	PUNCT
easat-3604	74	52	v	v	NOUN
easat-3604	74	53	-	-	PUNCT
easat-3604	74	54	shaped	shape	VERB
easat-3604	74	55	beam	beam	NOUN
easat-3604	74	56	figure	figure	NOUN
easat-3604	74	57	2	2	NUM
easat-3604	74	58	.	.	PUNCT
easat-3604	75	1	the	the	DET
easat-3604	75	2	micro	micro	ADJ
easat-3604	75	3	-	-	ADJ
easat-3604	75	4	perforated	perforate	VERB
easat-3604	75	5	beams	beam	NOUN
easat-3604	75	6	with	with	ADP
easat-3604	75	7	complex	complex	ADJ
easat-3604	75	8	structure	structure	NOUN
easat-3604	75	9	.	.	PUNCT
easat-3604	76	1	table	table	NOUN
easat-3604	76	2	1	1	NUM
easat-3604	76	3	.	.	PUNCT
easat-3604	77	1	the	the	DET
easat-3604	77	2	characteristics	characteristic	NOUN
easat-3604	77	3	of	of	ADP
easat-3604	77	4	the	the	DET
easat-3604	77	5	silicon	silicon	NOUN
easat-3604	77	6	material	material	NOUN
easat-3604	77	7	.	.	PUNCT
easat-3604	78	1	property	property	NOUN
easat-3604	78	2	value	value	NOUN
easat-3604	78	3	unit	unit	NOUN
easat-3604	78	4	density	density	NOUN
easat-3604	78	5	2330	2330	NUM
easat-3604	78	6	kg	kg	NOUN
easat-3604	78	7	/	/	SYM
easat-3604	78	8	m3	m3	PROPN
easat-3604	78	9	poisson	poisson	PROPN
easat-3604	78	10	’s	’s	PART
easat-3604	78	11	ratio	ratio	NOUN
easat-3604	78	12	0.28	0.28	NUM
easat-3604	78	13	1	1	NUM
easat-3604	78	14	young	young	ADJ
easat-3604	78	15	’s	’s	PART
easat-3604	78	16	modulus	modulus	NOUN
easat-3604	78	17	169×109	169×109	NUM
easat-3604	78	18	pa	pa	PROPN
easat-3604	78	19	bulk	bulk	ADJ
easat-3604	78	20	modulus	modulus	NOUN
easat-3604	78	21	1.2803×1011	1.2803×1011	NUM
easat-3604	78	22	pa	pa	PROPN
easat-3604	78	23	orientation	orientation	NOUN
easat-3604	78	24	1	1	NUM
easat-3604	78	25	-	-	SYM
easat-3604	78	26	0	0	NUM
easat-3604	78	27	-	-	SYM
easat-3604	78	28	0	0	NUM
easat-3604	79	1	to	to	PART
easat-3604	79	2	enhance	enhance	VERB
easat-3604	79	3	the	the	DET
easat-3604	79	4	intricacy	intricacy	NOUN
easat-3604	79	5	of	of	ADP
easat-3604	79	6	perforated	perforated	ADJ
easat-3604	79	7	beam	beam	NOUN
easat-3604	79	8	designs	design	NOUN
easat-3604	79	9	,	,	PUNCT
easat-3604	79	10	the	the	DET
easat-3604	79	11	folded	fold	VERB
easat-3604	79	12	beam	beam	NOUN
easat-3604	79	13	,	,	PUNCT
easat-3604	79	14	the	the	DET
easat-3604	79	15	crab	crab	NOUN
easat-3604	79	16	-	-	PUNCT
easat-3604	79	17	shaped	shape	VERB
easat-3604	79	18	beam	beam	NOUN
easat-3604	79	19	,	,	PUNCT
easat-3604	79	20	and	and	CCONJ
easat-3604	79	21	the	the	DET
easat-3604	79	22	v	v	ADV
easat-3604	79	23	-	-	PUNCT
easat-3604	79	24	shaped	shape	VERB
easat-3604	79	25	beam	beam	NOUN
easat-3604	79	26	models	model	NOUN
easat-3604	79	27	are	be	AUX
easat-3604	79	28	depicted	depict	VERB
easat-3604	79	29	in	in	ADP
easat-3604	79	30	figure	figure	NOUN
easat-3604	79	31	2	2	NUM
easat-3604	79	32	with	with	SCONJ
easat-3604	79	33	the	the	DET
easat-3604	79	34	holes	hole	NOUN
easat-3604	79	35	arranged	arrange	VERB
easat-3604	79	36	uniformly	uniformly	ADV
easat-3604	79	37	on	on	ADP
easat-3604	79	38	the	the	DET
easat-3604	79	39	working	work	VERB
easat-3604	79	40	face	face	NOUN
easat-3604	79	41	(	(	PUNCT
easat-3604	79	42	parallel	parallel	ADJ
easat-3604	79	43	to	to	ADP
easat-3604	79	44	the	the	DET
easat-3604	79	45	substrate	substrate	NOUN
easat-3604	79	46	)	)	PUNCT
easat-3604	79	47	.	.	PUNCT
easat-3604	80	1	these	these	DET
easat-3604	80	2	complex	complex	ADJ
easat-3604	80	3	beams	beam	NOUN
easat-3604	80	4	with	with	ADP
easat-3604	80	5	solid	solid	ADJ
easat-3604	80	6	bodies	body	NOUN
easat-3604	80	7	are	be	AUX
easat-3604	80	8	frequently	frequently	ADV
easat-3604	80	9	utilized	utilize	VERB
easat-3604	80	10	in	in	ADP
easat-3604	80	11	the	the	DET
easat-3604	80	12	design	design	NOUN
easat-3604	80	13	of	of	ADP
easat-3604	80	14	7408	7408	NUM
easat-3604	80	15	edelweiss	edelweiss	PROPN
easat-3604	80	16	applied	apply	VERB
easat-3604	80	17	science	science	NOUN
easat-3604	80	18	and	and	CCONJ
easat-3604	80	19	technology	technology	NOUN
easat-3604	80	20	issn	issn	PROPN
easat-3604	80	21	:	:	PUNCT
easat-3604	80	22	2576	2576	NUM
easat-3604	80	23	-	-	SYM
easat-3604	80	24	8484	8484	NUM
easat-3604	80	25	vol	vol	NOUN
easat-3604	80	26	.	.	PROPN
easat-3604	81	1	8	8	NUM
easat-3604	81	2	,	,	PUNCT
easat-3604	81	3	no	no	INTJ
easat-3604	81	4	.	.	NOUN
easat-3604	81	5	6	6	NUM
easat-3604	81	6	:	:	SYM
easat-3604	81	7	7404	7404	NUM
easat-3604	81	8	-	-	SYM
easat-3604	81	9	7418	7418	NUM
easat-3604	81	10	,	,	PUNCT
easat-3604	81	11	2024	2024	NUM
easat-3604	81	12	doi	doi	NOUN
easat-3604	81	13	:	:	PUNCT
easat-3604	81	14	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	81	15	©	©	PROPN
easat-3604	81	16	2024	2024	NUM
easat-3604	81	17	by	by	ADP
easat-3604	81	18	the	the	DET
easat-3604	81	19	author	author	NOUN
easat-3604	81	20	;	;	PUNCT
easat-3604	81	21	licensee	licensee	PROPN
easat-3604	81	22	learning	learning	NOUN
easat-3604	81	23	gate	gate	VERB
easat-3604	81	24	mechanical	mechanical	ADJ
easat-3604	81	25	structures	structure	NOUN
easat-3604	81	26	in	in	ADP
easat-3604	81	27	mems	mem	NOUN
easat-3604	81	28	system	system	NOUN
easat-3604	81	29	.	.	PUNCT
easat-3604	82	1	nevertheless	nevertheless	ADV
easat-3604	82	2	,	,	PUNCT
easat-3604	82	3	it	it	PRON
easat-3604	82	4	is	be	AUX
easat-3604	82	5	essential	essential	ADJ
easat-3604	82	6	to	to	PART
easat-3604	82	7	take	take	VERB
easat-3604	82	8	into	into	ADP
easat-3604	82	9	account	account	NOUN
easat-3604	82	10	the	the	DET
easat-3604	82	11	perforations	perforation	NOUN
easat-3604	82	12	within	within	ADP
easat-3604	82	13	their	their	PRON
easat-3604	82	14	structure	structure	NOUN
easat-3604	82	15	and	and	CCONJ
easat-3604	82	16	their	their	PRON
easat-3604	82	17	mechanical	mechanical	ADJ
easat-3604	82	18	behaviors	behavior	NOUN
easat-3604	82	19	to	to	PART
easat-3604	82	20	fully	fully	ADV
easat-3604	82	21	understand	understand	VERB
easat-3604	82	22	the	the	DET
easat-3604	82	23	characteristics	characteristic	NOUN
easat-3604	82	24	of	of	ADP
easat-3604	82	25	the	the	DET
easat-3604	82	26	entire	entire	ADJ
easat-3604	82	27	system	system	NOUN
easat-3604	82	28	.	.	PUNCT
easat-3604	83	1	silicon	silicon	NOUN
easat-3604	83	2	is	be	AUX
easat-3604	83	3	the	the	DET
easat-3604	83	4	standard	standard	ADJ
easat-3604	83	5	material	material	NOUN
easat-3604	83	6	utilized	utilize	VERB
easat-3604	83	7	for	for	ADP
easat-3604	83	8	these	these	DET
easat-3604	83	9	beams	beam	NOUN
easat-3604	83	10	in	in	ADP
easat-3604	83	11	soi	soi	ADJ
easat-3604	83	12	wafers	wafer	NOUN
easat-3604	83	13	.	.	PUNCT
easat-3604	84	1	the	the	DET
easat-3604	84	2	properties	property	NOUN
easat-3604	84	3	of	of	ADP
easat-3604	84	4	this	this	DET
easat-3604	84	5	material	material	NOUN
easat-3604	84	6	can	can	AUX
easat-3604	84	7	be	be	AUX
easat-3604	84	8	found	find	VERB
easat-3604	84	9	in	in	ADP
easat-3604	84	10	table	table	NOUN
easat-3604	84	11	1	1	NUM
easat-3604	84	12	.	.	SYM
easat-3604	85	1	3	3	X
easat-3604	85	2	.	.	X
easat-3604	85	3	dynamic	dynamic	ADJ
easat-3604	85	4	characteristics	characteristic	NOUN
easat-3604	85	5	of	of	ADP
easat-3604	85	6	perforated	perforated	ADJ
easat-3604	85	7	microbeams	microbeam	NOUN
easat-3604	85	8	3.1	3.1	NUM
easat-3604	85	9	.	.	PUNCT
easat-3604	86	1	theories	theory	NOUN
easat-3604	86	2	of	of	ADP
easat-3604	86	3	the	the	DET
easat-3604	86	4	perforated	perforated	ADJ
easat-3604	86	5	single	single	ADJ
easat-3604	86	6	beam	beam	NOUN
easat-3604	86	7	the	the	DET
easat-3604	86	8	single	single	ADJ
easat-3604	86	9	beams	beam	NOUN
easat-3604	86	10	used	use	VERB
easat-3604	86	11	in	in	ADP
easat-3604	86	12	mems	mem	NOUN
easat-3604	86	13	are	be	AUX
easat-3604	86	14	known	know	VERB
easat-3604	86	15	as	as	ADP
easat-3604	86	16	the	the	DET
easat-3604	86	17	euler	euler	NOUN
easat-3604	86	18	-	-	PUNCT
easat-3604	86	19	bernoulli	bernoulli	PROPN
easat-3604	86	20	or	or	CCONJ
easat-3604	86	21	timoshenko	timoshenko	NOUN
easat-3604	86	22	beam	beam	NOUN
easat-3604	86	23	with	with	ADP
easat-3604	86	24	defined	define	VERB
easat-3604	86	25	boundary	boundary	ADJ
easat-3604	86	26	conditions	condition	NOUN
easat-3604	86	27	(	(	PUNCT
easat-3604	86	28	simply	simply	ADV
easat-3604	86	29	supported	support	VERB
easat-3604	86	30	,	,	PUNCT
easat-3604	86	31	fixed	fix	VERB
easat-3604	86	32	-	-	PUNCT
easat-3604	86	33	fixed	fix	VERB
easat-3604	86	34	,	,	PUNCT
easat-3604	86	35	simply	simply	ADV
easat-3604	86	36	-	-	PUNCT
easat-3604	86	37	fixed	fix	VERB
easat-3604	86	38	,	,	PUNCT
easat-3604	86	39	fixed	fix	VERB
easat-3604	86	40	-	-	PUNCT
easat-3604	86	41	guided	guide	VERB
easat-3604	86	42	,	,	PUNCT
easat-3604	86	43	or	or	CCONJ
easat-3604	86	44	fixed	fix	VERB
easat-3604	86	45	-	-	PUNCT
easat-3604	86	46	free	free	ADJ
easat-3604	86	47	,	,	PUNCT
easat-3604	86	48	…	…	PUNCT
easat-3604	86	49	)	)	PUNCT
easat-3604	86	50	.	.	PUNCT
easat-3604	87	1	in	in	ADP
easat-3604	87	2	the	the	DET
easat-3604	87	3	case	case	NOUN
easat-3604	87	4	of	of	ADP
easat-3604	87	5	the	the	DET
easat-3604	87	6	timoshenko	timoshenko	ADJ
easat-3604	87	7	beam	beam	NOUN
easat-3604	87	8	,	,	PUNCT
easat-3604	87	9	the	the	DET
easat-3604	87	10	theory	theory	NOUN
easat-3604	87	11	in	in	ADP
easat-3604	87	12	the	the	DET
easat-3604	87	13	analysis	analysis	NOUN
easat-3604	87	14	of	of	ADP
easat-3604	87	15	the	the	DET
easat-3604	87	16	perforated	perforate	VERB
easat-3604	87	17	beam	beam	NOUN
easat-3604	87	18	incorporates	incorporate	VERB
easat-3604	87	19	the	the	DET
easat-3604	87	20	effects	effect	NOUN
easat-3604	87	21	of	of	ADP
easat-3604	87	22	shear	shear	NOUN
easat-3604	87	23	deformation	deformation	NOUN
easat-3604	87	24	and	and	CCONJ
easat-3604	87	25	axial	axial	ADJ
easat-3604	87	26	deformation	deformation	NOUN
easat-3604	87	27	,	,	PUNCT
easat-3604	87	28	along	along	ADP
easat-3604	87	29	with	with	ADP
easat-3604	87	30	bending	bend	VERB
easat-3604	87	31	deformation	deformation	NOUN
easat-3604	87	32	,	,	PUNCT
easat-3604	87	33	and	and	CCONJ
easat-3604	87	34	was	be	AUX
easat-3604	87	35	mentioned	mention	VERB
easat-3604	87	36	by	by	ADP
easat-3604	87	37	considering	consider	VERB
easat-3604	87	38	the	the	DET
easat-3604	87	39	interrelated	interrelated	ADJ
easat-3604	87	40	effects	effect	NOUN
easat-3604	87	41	of	of	ADP
easat-3604	87	42	microstructure	microstructure	NOUN
easat-3604	87	43	and	and	CCONJ
easat-3604	87	44	surface	surface	NOUN
easat-3604	87	45	stress	stress	NOUN
easat-3604	87	46	under	under	ADP
easat-3604	87	47	various	various	ADJ
easat-3604	87	48	loading	loading	NOUN
easat-3604	87	49	and	and	CCONJ
easat-3604	87	50	boundary	boundary	ADJ
easat-3604	87	51	conditions	condition	NOUN
easat-3604	87	52	[	[	X
easat-3604	87	53	12	12	NUM
easat-3604	87	54	]	]	PUNCT
easat-3604	87	55	when	when	SCONJ
easat-3604	87	56	the	the	DET
easat-3604	87	57	micro	micro	ADJ
easat-3604	87	58	beams	beam	NOUN
easat-3604	87	59	were	be	AUX
easat-3604	87	60	defined	define	VERB
easat-3604	87	61	with	with	ADP
easat-3604	87	62	perforated	perforated	ADJ
easat-3604	87	63	square	square	ADV
easat-3604	87	64	-	-	PUNCT
easat-3604	87	65	shaped	shape	VERB
easat-3604	87	66	holes	hole	NOUN
easat-3604	87	67	and	and	CCONJ
easat-3604	87	68	using	use	VERB
easat-3604	87	69	an	an	DET
easat-3604	87	70	equivalent	equivalent	ADJ
easat-3604	87	71	geometrical	geometrical	ADJ
easat-3604	87	72	model	model	NOUN
easat-3604	87	73	[	[	X
easat-3604	87	74	25	25	NUM
easat-3604	87	75	]	]	PUNCT
easat-3604	87	76	.	.	PUNCT
easat-3604	88	1	as	as	SCONJ
easat-3604	88	2	the	the	DET
easat-3604	88	3	beam	beam	NOUN
easat-3604	88	4	is	be	AUX
easat-3604	88	5	bent	bent	ADJ
easat-3604	88	6	,	,	PUNCT
easat-3604	88	7	its	its	PRON
easat-3604	88	8	cross	cross	NOUN
easat-3604	88	9	-	-	NOUN
easat-3604	88	10	section	section	NOUN
easat-3604	88	11	can	can	AUX
easat-3604	88	12	change	change	VERB
easat-3604	88	13	shape	shape	NOUN
easat-3604	88	14	,	,	PUNCT
easat-3604	88	15	leading	lead	VERB
easat-3604	88	16	to	to	ADP
easat-3604	88	17	the	the	DET
easat-3604	88	18	beam	beam	NOUN
easat-3604	88	19	being	be	AUX
easat-3604	88	20	represented	represent	VERB
easat-3604	88	21	as	as	ADP
easat-3604	88	22	a	a	DET
easat-3604	88	23	series	series	NOUN
easat-3604	88	24	of	of	ADP
easat-3604	88	25	continuous	continuous	ADJ
easat-3604	88	26	curved	curved	ADJ
easat-3604	88	27	segments	segment	NOUN
easat-3604	88	28	.	.	PUNCT
easat-3604	89	1	this	this	DET
easat-3604	89	2	approach	approach	NOUN
easat-3604	89	3	enables	enable	VERB
easat-3604	89	4	a	a	DET
easat-3604	89	5	more	more	ADV
easat-3604	89	6	precise	precise	ADJ
easat-3604	89	7	representation	representation	NOUN
easat-3604	89	8	of	of	ADP
easat-3604	89	9	both	both	DET
easat-3604	89	10	shear	shear	ADJ
easat-3604	89	11	and	and	CCONJ
easat-3604	89	12	axial	axial	ADJ
easat-3604	89	13	deformations	deformation	NOUN
easat-3604	89	14	,	,	PUNCT
easat-3604	89	15	which	which	PRON
easat-3604	89	16	is	be	AUX
easat-3604	89	17	particularly	particularly	ADV
easat-3604	89	18	crucial	crucial	ADJ
easat-3604	89	19	for	for	ADP
easat-3604	89	20	short	short	ADJ
easat-3604	89	21	,	,	PUNCT
easat-3604	89	22	thick	thick	ADJ
easat-3604	89	23	beams	beam	NOUN
easat-3604	89	24	or	or	CCONJ
easat-3604	89	25	those	those	PRON
easat-3604	89	26	that	that	PRON
easat-3604	89	27	experience	experience	VERB
easat-3604	89	28	significant	significant	ADJ
easat-3604	89	29	shear	shear	NOUN
easat-3604	89	30	forces	force	NOUN
easat-3604	89	31	.	.	PUNCT
easat-3604	90	1	during	during	ADP
easat-3604	90	2	the	the	DET
easat-3604	90	3	analytical	analytical	ADJ
easat-3604	90	4	calculation	calculation	NOUN
easat-3604	90	5	,	,	PUNCT
easat-3604	90	6	the	the	DET
easat-3604	90	7	resonant	resonant	ADJ
easat-3604	90	8	frequencies	frequency	NOUN
easat-3604	90	9	of	of	ADP
easat-3604	90	10	the	the	DET
easat-3604	90	11	timoshenko	timoshenko	ADJ
easat-3604	90	12	beam	beam	NOUN
easat-3604	90	13	considered	consider	VERB
easat-3604	90	14	in	in	ADP
easat-3604	90	15	[	[	X
easat-3604	90	16	24	24	NUM
easat-3604	90	17	]	]	PUNCT
easat-3604	90	18	,	,	PUNCT
easat-3604	90	19	[	[	X
easat-3604	90	20	26	26	NUM
easat-3604	90	21	]	]	PUNCT
easat-3604	90	22	are	be	AUX
easat-3604	90	23	defined	define	VERB
easat-3604	90	24	by	by	ADP
easat-3604	90	25	using	use	VERB
easat-3604	90	26	their	their	PRON
easat-3604	90	27	dynamic	dynamic	ADJ
easat-3604	90	28	equations	equation	NOUN
easat-3604	90	29	as	as	SCONJ
easat-3604	90	30	follows	follow	VERB
easat-3604	90	31	[	[	X
easat-3604	90	32	25	25	NUM
easat-3604	90	33	]	]	X
easat-3604	90	34	:	:	PUNCT
easat-3604	90	35	(	(	PUNCT
easat-3604	90	36	)	)	PUNCT
easat-3604	90	37	(	(	PUNCT
easat-3604	90	38	)	)	PUNCT
easat-3604	90	39	24	24	NUM
easat-3604	90	40	2	2	NUM
easat-3604	90	41	4	4	NUM
easat-3604	90	42	4	4	NUM
easat-3604	90	43	4	4	NUM
easat-3604	90	44	2	2	NUM
easat-3604	90	45	2	2	NUM
easat-3604	90	46	2	2	NUM
easat-3604	90	47	4	4	NUM
easat-3604	90	48	2	2	NUM
easat-3604	90	49	,	,	PUNCT
easat-3604	90	50	,	,	PUNCT
easat-3604	90	51	a	a	DET
easat-3604	90	52	i	i	PRON
easat-3604	90	53	a	a	X
easat-3604	91	1	i	i	PRON
easat-3604	91	2	a	a	PRON
easat-3604	91	3	i	i	PRON
easat-3604	91	4	a	a	PRON
easat-3604	91	5	a	a	DET
easat-3604	91	6	a	a	DET
easat-3604	91	7	p	p	NOUN
easat-3604	91	8	x	x	PUNCT
easat-3604	91	9	teiu	teiu	NOUN
easat-3604	91	10	u	u	NOUN
easat-3604	91	11	u	u	NOUN
easat-3604	91	12	u	u	NOUN
easat-3604	91	13	ei	ei	NOUN
easat-3604	91	14	p	p	X
easat-3604	91	15	x	x	X
easat-3604	91	16	t	t	X
easat-3604	91	17	x	x	X
easat-3604	91	18	t	t	PROPN
easat-3604	91	19	g	g	PROPN
easat-3604	91	20	x	x	SYM
easat-3604	91	21	t	t	PROPN
easat-3604	91	22	g	g	NOUN
easat-3604	91	23	x	x	X
easat-3604	91	24	g	g	ADP
easat-3604	91	25	t	t	PROPN
easat-3604	91	26			NUM
easat-3604	91	27			NOUN
easat-3604	91	28			ADJ
easat-3604	91	29			ADJ
easat-3604	91	30			PROPN
easat-3604	91	31	+	+	CCONJ
easat-3604	91	32	−	−	PROPN
easat-3604	92	1	+	+	CCONJ
easat-3604	92	2	+	+	PUNCT
easat-3604	92	3	=	=	SYM
easat-3604	92	4	+	+	ADJ
easat-3604	92	5			PROPN
easat-3604	92	6			DET
easat-3604	92	7			ADJ
easat-3604	92	8			ADJ
easat-3604	92	9			ADJ
easat-3604	92	10			PROPN
easat-3604	92	11			PROPN
easat-3604	92	12			ADJ
easat-3604	92	13			NOUN
easat-3604	92	14			ADP
easat-3604	92	15			ADP
easat-3604	92	16			X
easat-3604	92	17			X
easat-3604	92	18			X
easat-3604	92	19			X
easat-3604	92	20	(	(	PUNCT
easat-3604	92	21	2	2	NUM
easat-3604	92	22	)	)	PUNCT
easat-3604	92	23	in	in	ADP
easat-3604	92	24	this	this	DET
easat-3604	92	25	context	context	NOUN
easat-3604	92	26	,	,	PUNCT
easat-3604	92	27	ei	ei	NOUN
easat-3604	92	28	,	,	PUNCT
easat-3604	92	29	ρa	ρa	PROPN
easat-3604	92	30	,	,	PUNCT
easat-3604	92	31	ρi	ρi	NOUN
easat-3604	92	32	,	,	PUNCT
easat-3604	92	33	and	and	CCONJ
easat-3604	92	34	ga	ga	PROPN
easat-3604	92	35	denote	denote	VERB
easat-3604	92	36	the	the	DET
easat-3604	92	37	bending	bend	VERB
easat-3604	92	38	stiffness	stiffness	NOUN
easat-3604	92	39	,	,	PUNCT
easat-3604	92	40	linear	linear	ADJ
easat-3604	92	41	density	density	NOUN
easat-3604	92	42	,	,	PUNCT
easat-3604	92	43	rotational	rotational	ADJ
easat-3604	92	44	moment	moment	NOUN
easat-3604	92	45	,	,	PUNCT
easat-3604	92	46	and	and	CCONJ
easat-3604	92	47	shear	shear	NOUN
easat-3604	92	48	stiffness	stiffness	NOUN
easat-3604	92	49	of	of	ADP
easat-3604	92	50	the	the	DET
easat-3604	92	51	oscillator	oscillator	NOUN
easat-3604	92	52	,	,	PUNCT
easat-3604	92	53	respectively	respectively	ADV
easat-3604	92	54	;	;	PUNCT
easat-3604	92	55	u	u	NOUN
easat-3604	92	56	=	=	PROPN
easat-3604	92	57	u(x	u(x	PROPN
easat-3604	92	58	,	,	PUNCT
easat-3604	92	59	t	t	PROPN
easat-3604	92	60	)	)	PUNCT
easat-3604	92	61	signifies	signify	VERB
easat-3604	92	62	the	the	DET
easat-3604	92	63	displacement	displacement	ADJ
easat-3604	92	64	function	function	NOUN
easat-3604	92	65	of	of	ADP
easat-3604	92	66	the	the	DET
easat-3604	92	67	beam	beam	NOUN
easat-3604	92	68	under	under	ADP
easat-3604	92	69	consideration	consideration	NOUN
easat-3604	92	70	;	;	PUNCT
easat-3604	92	71	and	and	CCONJ
easat-3604	92	72	p(x	p(x	PROPN
easat-3604	92	73	,	,	PUNCT
easat-3604	92	74	t	t	PROPN
easat-3604	92	75	)	)	PUNCT
easat-3604	92	76	represents	represent	VERB
easat-3604	92	77	the	the	DET
easat-3604	92	78	distributed	distribute	VERB
easat-3604	92	79	load	load	NOUN
easat-3604	92	80	applied	apply	VERB
easat-3604	92	81	to	to	ADP
easat-3604	92	82	the	the	DET
easat-3604	92	83	beam	beam	NOUN
easat-3604	92	84	's	's	PART
easat-3604	92	85	surface	surface	NOUN
easat-3604	92	86	.	.	PUNCT
easat-3604	93	1	there	there	PRON
easat-3604	93	2	are	be	VERB
easat-3604	93	3	many	many	ADJ
easat-3604	93	4	case	case	NOUN
easat-3604	93	5	studies	study	NOUN
easat-3604	93	6	about	about	ADP
easat-3604	93	7	the	the	DET
easat-3604	93	8	boundary	boundary	ADJ
easat-3604	93	9	constraints	constraint	NOUN
easat-3604	93	10	of	of	ADP
easat-3604	93	11	the	the	DET
easat-3604	93	12	single	single	ADJ
easat-3604	93	13	beam	beam	NOUN
easat-3604	93	14	.	.	PUNCT
easat-3604	94	1	the	the	DET
easat-3604	94	2	natural	natural	ADJ
easat-3604	94	3	frequency	frequency	NOUN
easat-3604	94	4	of	of	ADP
easat-3604	94	5	a	a	DET
easat-3604	94	6	fixed	fix	VERB
easat-3604	94	7	-	-	PUNCT
easat-3604	94	8	fixed	fix	VERB
easat-3604	94	9	single	single	ADJ
easat-3604	94	10	beam	beam	NOUN
easat-3604	94	11	is	be	AUX
easat-3604	94	12	found	find	VERB
easat-3604	94	13	using	use	VERB
easat-3604	94	14	the	the	DET
easat-3604	94	15	formula	formula	NOUN
easat-3604	94	16	[	[	X
easat-3604	94	17	27	27	NUM
easat-3604	94	18	]	]	SYM
easat-3604	94	19	:	:	PUNCT
easat-3604	94	20	4	4	NUM
easat-3604	94	21	4	4	NUM
easat-3604	94	22	1	1	NUM
easat-3604	94	23	2	2	NUM
easat-3604	94	24	eq	eq	NOUN
easat-3604	94	25	n	n	PROPN
easat-3604	94	26	eq	eq	NOUN
easat-3604	94	27	ei	ei	PROPN
easat-3604	94	28	z	z	PROPN
easat-3604	94	29	f	f	PROPN
easat-3604	94	30	a	a	DET
easat-3604	94	31	l	l	NOUN
easat-3604	94	32			NOUN
easat-3604	94	33	=	=	PUNCT
easat-3604	94	34	(	(	PUNCT
easat-3604	94	35	3	3	NUM
easat-3604	94	36	)	)	PUNCT
easat-3604	94	37	where	where	SCONJ
easat-3604	94	38	l	l	NOUN
easat-3604	94	39	is	be	AUX
easat-3604	94	40	the	the	DET
easat-3604	94	41	beam	beam	NOUN
easat-3604	94	42	length	length	NOUN
easat-3604	94	43	;	;	PUNCT
easat-3604	94	44	e	e	PROPN
easat-3604	94	45	signifies	signify	VERB
easat-3604	94	46	young	young	ADJ
easat-3604	94	47	's	's	PART
easat-3604	94	48	modulus	modulus	NOUN
easat-3604	94	49	,	,	PUNCT
easat-3604	94	50	while	while	SCONJ
easat-3604	94	51	ρ	ρ	PROPN
easat-3604	94	52	denotes	denote	VERB
easat-3604	94	53	the	the	DET
easat-3604	94	54	density	density	NOUN
easat-3604	94	55	of	of	ADP
easat-3604	94	56	the	the	DET
easat-3604	94	57	material	material	NOUN
easat-3604	94	58	;	;	PUNCT
easat-3604	94	59	eieq	eieq	ADJ
easat-3604	94	60	and	and	CCONJ
easat-3604	94	61	ρaeq	ρaeq	ADV
easat-3604	94	62	refer	refer	VERB
easat-3604	94	63	to	to	ADP
easat-3604	94	64	the	the	DET
easat-3604	94	65	bending	bend	VERB
easat-3604	94	66	stiffness	stiffness	NOUN
easat-3604	94	67	and	and	CCONJ
easat-3604	94	68	the	the	DET
easat-3604	94	69	mass	mass	NOUN
easat-3604	94	70	per	per	ADP
easat-3604	94	71	unit	unit	NOUN
easat-3604	94	72	length	length	NOUN
easat-3604	94	73	of	of	ADP
easat-3604	94	74	the	the	DET
easat-3604	94	75	perforated	perforate	VERB
easat-3604	94	76	beam	beam	NOUN
easat-3604	94	77	;	;	PUNCT
easat-3604	94	78	and	and	CCONJ
easat-3604	94	79	z	z	NOUN
easat-3604	94	80	is	be	AUX
easat-3604	94	81	a	a	DET
easat-3604	94	82	function	function	NOUN
easat-3604	94	83	that	that	PRON
easat-3604	94	84	indicates	indicate	VERB
easat-3604	94	85	the	the	DET
easat-3604	94	86	nth	nth	NOUN
easat-3604	94	87	root	root	NOUN
easat-3604	94	88	of	of	ADP
easat-3604	94	89	the	the	DET
easat-3604	94	90	equation	equation	NOUN
easat-3604	94	91	dependent	dependent	ADJ
easat-3604	94	92	on	on	ADP
easat-3604	94	93	γ	γ	PROPN
easat-3604	94	94	,	,	PUNCT
easat-3604	94	95	which	which	PRON
easat-3604	94	96	is	be	AUX
easat-3604	94	97	treated	treat	VERB
easat-3604	94	98	as	as	ADP
easat-3604	94	99	a	a	DET
easat-3604	94	100	geometry	geometry	NOUN
easat-3604	94	101	-	-	PUNCT
easat-3604	94	102	related	relate	VERB
easat-3604	94	103	variable	variable	NOUN
easat-3604	94	104	.	.	PUNCT
easat-3604	95	1	the	the	DET
easat-3604	95	2	expression	expression	NOUN
easat-3604	95	3	describing	describe	VERB
easat-3604	95	4	γ	γ	PROPN
easat-3604	95	5	is	be	AUX
easat-3604	95	6	the	the	DET
easat-3604	95	7	following	following	NOUN
easat-3604	95	8	:	:	PUNCT
easat-3604	95	9	2	2	NUM
easat-3604	95	10	eq	eq	NOUN
easat-3604	95	11	eq	eq	NOUN
easat-3604	95	12	ei	ei	PROPN
easat-3604	95	13	ag	ag	PROPN
easat-3604	95	14	l	l	PROPN
easat-3604	95	15			NUM
easat-3604	95	16	=	=	SYM
easat-3604	95	17	(	(	PUNCT
easat-3604	95	18	4	4	X
easat-3604	95	19	)	)	PUNCT
easat-3604	95	20	ageq	ageq	PROPN
easat-3604	95	21	refers	refer	VERB
easat-3604	95	22	to	to	ADP
easat-3604	95	23	the	the	DET
easat-3604	95	24	shear	shear	NOUN
easat-3604	95	25	stiffness	stiffness	NOUN
easat-3604	95	26	of	of	ADP
easat-3604	95	27	the	the	DET
easat-3604	95	28	mentioned	mention	VERB
easat-3604	95	29	beam	beam	NOUN
easat-3604	95	30	.	.	PUNCT
easat-3604	96	1	3	3	NUM
easat-3604	96	2	2	2	NUM
easat-3604	96	3	2	2	NUM
easat-3604	96	4	2	2	NUM
easat-3604	96	5	3	3	NUM
easat-3604	96	6	3	3	NUM
easat-3604	96	7	2	2	NUM
easat-3604	96	8	2	2	NUM
easat-3604	96	9	3	3	NUM
easat-3604	96	10	2	2	NUM
easat-3604	96	11	3	3	NUM
easat-3604	96	12	1	1	NUM
easat-3604	96	13	2	2	NUM
easat-3604	96	14	(	(	PUNCT
easat-3604	96	15	1	1	NUM
easat-3604	96	16	)	)	PUNCT
easat-3604	96	17	(	(	PUNCT
easat-3604	96	18	2	2	X
easat-3604	96	19	)	)	PUNCT
easat-3604	96	20	(	(	PUNCT
easat-3604	96	21	1	1	X
easat-3604	96	22	)	)	PUNCT
easat-3604	96	23	3	3	NUM
easat-3604	96	24	(	(	PUNCT
easat-3604	96	25	3	3	NUM
easat-3604	96	26	2	2	NUM
easat-3604	96	27	3	3	NUM
easat-3604	96	28	)	)	PUNCT
easat-3604	96	29	eq	eq	ADP
easat-3604	96	30	eq	eq	NOUN
easat-3604	96	31	n	n	PROPN
easat-3604	96	32	e	e	PROPN
easat-3604	96	33	ag	ag	PROPN
easat-3604	96	34	a	a	DET
easat-3604	96	35	n	n	CCONJ
easat-3604	96	36	n	n	CCONJ
easat-3604	96	37	n	n	CCONJ
easat-3604	96	38	n	n	ADV
easat-3604	96	39	ei	ei	X
easat-3604	96	40	ei	ei	NOUN
easat-3604	96	41	n	n	CCONJ
easat-3604	96	42	n	n	CCONJ
easat-3604	96	43	n	n	NOUN
easat-3604	96	44	+	+	NUM
easat-3604	96	45	=	=	PUNCT
easat-3604	97	1	+	+	PUNCT
easat-3604	98	1	+	+	CCONJ
easat-3604	98	2	+	+	NUM
easat-3604	98	3	=	=	X
easat-3604	98	4	−	−	PROPN
easat-3604	99	1	+	+	CCONJ
easat-3604	99	2	+	+	PUNCT
easat-3604	99	3	+	+	PUNCT
easat-3604	100	1	+	+	CCONJ
easat-3604	100	2	−	−	X
easat-3604	100	3	+	+	CCONJ
easat-3604	101	1	+	+	NUM
easat-3604	101	2			NOUN
easat-3604	101	3			X
easat-3604	101	4			X
easat-3604	101	5			X
easat-3604	101	6			X
easat-3604	101	7			X
easat-3604	101	8			X
easat-3604	101	9			X
easat-3604	101	10			X
easat-3604	101	11			X
easat-3604	101	12			X
easat-3604	101	13	(	(	PUNCT
easat-3604	101	14	5	5	NUM
easat-3604	101	15	)	)	PUNCT
easat-3604	101	16	considering	consider	VERB
easat-3604	101	17	the	the	DET
easat-3604	101	18	perforated	perforate	VERB
easat-3604	101	19	holes	hole	NOUN
easat-3604	101	20	in	in	ADP
easat-3604	101	21	the	the	DET
easat-3604	101	22	beam	beam	NOUN
easat-3604	101	23	,	,	PUNCT
easat-3604	101	24	the	the	DET
easat-3604	101	25	factor	factor	NOUN
easat-3604	101	26	γ	γ	PROPN
easat-3604	101	27	can	can	AUX
easat-3604	101	28	be	be	AUX
easat-3604	101	29	defined	define	VERB
easat-3604	101	30	as	as	ADP
easat-3604	101	31	a	a	DET
easat-3604	101	32	function	function	NOUN
easat-3604	101	33	of	of	ADP
easat-3604	101	34	both	both	CCONJ
easat-3604	101	35	the	the	DET
easat-3604	101	36	quantity	quantity	NOUN
easat-3604	101	37	of	of	ADP
easat-3604	101	38	the	the	DET
easat-3604	101	39	holes	hole	NOUN
easat-3604	101	40	along	along	ADP
easat-3604	101	41	the	the	DET
easat-3604	101	42	section	section	NOUN
easat-3604	101	43	n	n	NOUN
easat-3604	101	44	and	and	CCONJ
easat-3604	101	45	the	the	DET
easat-3604	101	46	fill	fill	NOUN
easat-3604	101	47	factor	factor	NOUN
easat-3604	101	48	represented	represent	VERB
easat-3604	101	49	by	by	ADP
easat-3604	101	50	α	α	PROPN
easat-3604	101	51	as	as	ADP
easat-3604	101	52	the	the	DET
easat-3604	101	53	following	follow	VERB
easat-3604	101	54	function	function	NOUN
easat-3604	101	55	:	:	PUNCT
easat-3604	101	56	2	2	NUM
easat-3604	101	57	1	1	NUM
easat-3604	101	58	(	(	PUNCT
easat-3604	101	59	,	,	PUNCT
easat-3604	101	60	)	)	PUNCT
easat-3604	101	61	1	1	NUM
easat-3604	101	62	6	6	NUM
easat-3604	101	63	f	f	NOUN
easat-3604	101	64	w	w	PROPN
easat-3604	101	65	n	n	PROPN
easat-3604	101	66	l	l	NOUN
easat-3604	101	67			NUM
easat-3604	101	68			NUM
easat-3604	101	69			X
easat-3604	101	70			NOUN
easat-3604	101	71			NOUN
easat-3604	101	72	=	=	SYM
easat-3604	101	73			PROPN
easat-3604	102	1			PROPN
easat-3604	102	2			PROPN
easat-3604	102	3			NOUN
easat-3604	102	4	(	(	PUNCT
easat-3604	102	5	6	6	NUM
easat-3604	102	6	)	)	PUNCT
easat-3604	102	7	7409	7409	NUM
easat-3604	102	8	edelweiss	edelweiss	PROPN
easat-3604	102	9	applied	apply	VERB
easat-3604	102	10	science	science	NOUN
easat-3604	102	11	and	and	CCONJ
easat-3604	102	12	technology	technology	NOUN
easat-3604	102	13	issn	issn	PROPN
easat-3604	102	14	:	:	PUNCT
easat-3604	102	15	2576	2576	NUM
easat-3604	102	16	-	-	SYM
easat-3604	102	17	8484	8484	NUM
easat-3604	102	18	vol	vol	NOUN
easat-3604	102	19	.	.	PROPN
easat-3604	102	20	8	8	NUM
easat-3604	102	21	,	,	PUNCT
easat-3604	102	22	no	no	INTJ
easat-3604	102	23	.	.	NOUN
easat-3604	103	1	6	6	NUM
easat-3604	103	2	:	:	SYM
easat-3604	103	3	7404	7404	NUM
easat-3604	103	4	-	-	SYM
easat-3604	103	5	7418	7418	NUM
easat-3604	103	6	,	,	PUNCT
easat-3604	103	7	2024	2024	NUM
easat-3604	103	8	doi	doi	NOUN
easat-3604	103	9	:	:	PUNCT
easat-3604	103	10	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	103	11	©	©	PROPN
easat-3604	103	12	2024	2024	NUM
easat-3604	103	13	by	by	ADP
easat-3604	103	14	the	the	DET
easat-3604	103	15	author	author	NOUN
easat-3604	103	16	;	;	PUNCT
easat-3604	103	17	licensee	licensee	PROPN
easat-3604	103	18	learning	learning	NOUN
easat-3604	103	19	gate	gate	NOUN
easat-3604	103	20	where	where	SCONJ
easat-3604	103	21	the	the	DET
easat-3604	103	22	variable	variable	ADJ
easat-3604	103	23	γf(n	γf(n	PROPN
easat-3604	103	24	,	,	PUNCT
easat-3604	103	25	α	α	X
easat-3604	103	26	)	)	PUNCT
easat-3604	103	27	represents	represent	VERB
easat-3604	103	28	a	a	DET
easat-3604	103	29	suitable	suitable	ADJ
easat-3604	103	30	rational	rational	ADJ
easat-3604	103	31	function	function	NOUN
easat-3604	103	32	based	base	VERB
easat-3604	103	33	on	on	ADP
easat-3604	103	34	its	its	PRON
easat-3604	103	35	parameters	parameter	NOUN
easat-3604	103	36	:	:	PUNCT
easat-3604	103	37	2	2	NUM
easat-3604	103	38	2	2	NUM
easat-3604	103	39	2	2	NUM
easat-3604	103	40	3	3	NUM
easat-3604	103	41	2	2	NUM
easat-3604	103	42	3	3	NUM
easat-3604	103	43	2	2	NUM
easat-3604	103	44	2	2	NUM
easat-3604	103	45	3	3	NUM
easat-3604	103	46	2	2	NUM
easat-3604	103	47	3	3	NUM
easat-3604	103	48	(	(	PUNCT
easat-3604	103	49	2	2	NUM
easat-3604	103	50	)	)	PUNCT
easat-3604	103	51	(	(	PUNCT
easat-3604	103	52	(	(	PUNCT
easat-3604	103	53	1	1	X
easat-3604	103	54	)	)	PUNCT
easat-3604	103	55	3	3	NUM
easat-3604	103	56	(	(	PUNCT
easat-3604	103	57	3	3	NUM
easat-3604	103	58	2	2	NUM
easat-3604	103	59	3	3	NUM
easat-3604	103	60	)	)	PUNCT
easat-3604	103	61	)	)	PUNCT
easat-3604	104	1	f	f	PROPN
easat-3604	104	2	n	n	CCONJ
easat-3604	104	3	n	n	CCONJ
easat-3604	104	4	n	n	CCONJ
easat-3604	104	5	n	n	CCONJ
easat-3604	104	6	n	n	CCONJ
easat-3604	104	7	n	n	CCONJ
easat-3604	104	8			NOUN
easat-3604	104	9			ADP
easat-3604	104	10			X
easat-3604	104	11			X
easat-3604	104	12			X
easat-3604	104	13			X
easat-3604	104	14			X
easat-3604	104	15			X
easat-3604	104	16			X
easat-3604	104	17			X
easat-3604	104	18			X
easat-3604	104	19	+	+	PUNCT
easat-3604	104	20	+	+	PUNCT
easat-3604	104	21	=	=	SYM
easat-3604	104	22	−	−	PROPN
easat-3604	105	1	+	+	CCONJ
easat-3604	105	2	+	+	PUNCT
easat-3604	106	1	+	+	CCONJ
easat-3604	106	2	−	−	X
easat-3604	107	1	+	+	CCONJ
easat-3604	107	2	+	+	PUNCT
easat-3604	107	3	+	+	CCONJ
easat-3604	107	4	(	(	PUNCT
easat-3604	107	5	7	7	X
easat-3604	107	6	)	)	PUNCT
easat-3604	107	7	the	the	DET
easat-3604	107	8	natural	natural	ADJ
easat-3604	107	9	frequency	frequency	NOUN
easat-3604	107	10	of	of	ADP
easat-3604	107	11	the	the	DET
easat-3604	107	12	perforated	perforate	VERB
easat-3604	107	13	beam	beam	NOUN
easat-3604	107	14	can	can	AUX
easat-3604	107	15	be	be	AUX
easat-3604	107	16	written	write	VERB
easat-3604	107	17	as	as	ADP
easat-3604	107	18	the	the	DET
easat-3604	107	19	expression	expression	NOUN
easat-3604	107	20	used	use	VERB
easat-3604	107	21	to	to	PART
easat-3604	107	22	compare	compare	VERB
easat-3604	107	23	in	in	ADP
easat-3604	107	24	[	[	X
easat-3604	107	25	26	26	NUM
easat-3604	107	26	]	]	PUNCT
easat-3604	107	27	as	as	SCONJ
easat-3604	107	28	follows	follow	VERB
easat-3604	107	29	:	:	PUNCT
easat-3604	107	30	2	2	NUM
easat-3604	107	31	42	42	NUM
easat-3604	107	32	a	a	DET
easat-3604	107	33	i	i	PRON
easat-3604	107	34	n	n	CCONJ
easat-3604	107	35	n	n	CCONJ
easat-3604	107	36	n	n	NOUN
easat-3604	107	37	i	i	PRON
easat-3604	108	1	a	a	PRON
easat-3604	108	2	gn	gn	INTJ
easat-3604	109	1	ei	ei	X
easat-3604	109	2	f	f	PROPN
easat-3604	109	3	b	b	PROPN
easat-3604	109	4	b	b	PROPN
easat-3604	109	5	l	l	X
easat-3604	109	6	ei	ei	NOUN
easat-3604	109	7			NOUN
easat-3604	109	8			PROPN
easat-3604	109	9			PROPN
easat-3604	109	10	=	=	PUNCT
easat-3604	110	1	−	−	PROPN
easat-3604	110	2	−	−	PROPN
easat-3604	110	3			NOUN
easat-3604	110	4			X
easat-3604	111	1			PROPN
easat-3604	112	1			ADJ
easat-3604	112	2			NOUN
easat-3604	112	3			NOUN
easat-3604	112	4			VERB
easat-3604	112	5			ADJ
easat-3604	112	6			X
easat-3604	112	7			PROPN
easat-3604	112	8			X
easat-3604	112	9	(	(	PUNCT
easat-3604	112	10	8)	8)	NUM
easat-3604	112	11	where	where	SCONJ
easat-3604	112	12	,	,	PUNCT
easat-3604	112	13	bn	bn	X
easat-3604	112	14	is	be	AUX
easat-3604	112	15	defined	define	VERB
easat-3604	112	16	by	by	ADP
easat-3604	112	17	the	the	DET
easat-3604	112	18	formula	formula	NOUN
easat-3604	112	19	as	as	ADP
easat-3604	112	20	2	2	NUM
easat-3604	112	21	2	2	NUM
easat-3604	112	22	2	2	NUM
easat-3604	112	23	4	4	NUM
easat-3604	112	24	2	2	NUM
easat-3604	112	25	1	1	NUM
easat-3604	112	26	2	2	NUM
easat-3604	112	27	2	2	NUM
easat-3604	112	28	a	a	DET
easat-3604	112	29	i	i	PRON
easat-3604	112	30	n	n	CCONJ
easat-3604	112	31	a	a	DET
easat-3604	112	32	g	g	PROPN
easat-3604	112	33	l	l	PROPN
easat-3604	112	34	b	b	X
easat-3604	112	35	ei	ei	ADP
easat-3604	112	36	n	n	ADV
easat-3604	112	37			NOUN
easat-3604	112	38			NOUN
easat-3604	113	1	=	=	PUNCT
easat-3604	114	1	+	+	PUNCT
easat-3604	115	1	+	+	ADJ
easat-3604	115	2			ADJ
easat-3604	115	3			PRON
easat-3604	116	1			PROPN
easat-3604	116	2			PROPN
easat-3604	116	3			VERB
easat-3604	116	4			ADP
easat-3604	116	5			PROPN
easat-3604	116	6			PROPN
easat-3604	116	7			NOUN
easat-3604	116	8			NOUN
easat-3604	116	9	,	,	PUNCT
easat-3604	116	10	and	and	CCONJ
easat-3604	116	11	κga	κga	NOUN
easat-3604	116	12	is	be	AUX
easat-3604	116	13	the	the	DET
easat-3604	116	14	shear	shear	NOUN
easat-3604	116	15	rigidity	rigidity	NOUN
easat-3604	116	16	with	with	ADP
easat-3604	116	17	κ	κ	NOUN
easat-3604	116	18	being	be	AUX
easat-3604	116	19	the	the	DET
easat-3604	116	20	shear	shear	NOUN
easat-3604	116	21	correction	correction	NOUN
easat-3604	116	22	factor	factor	NOUN
easat-3604	116	23	depending	depend	VERB
easat-3604	116	24	on	on	ADP
easat-3604	116	25	the	the	DET
easat-3604	116	26	shape	shape	NOUN
easat-3604	116	27	of	of	ADP
easat-3604	116	28	the	the	DET
easat-3604	116	29	cross	cross	NOUN
easat-3604	116	30	-	-	NOUN
easat-3604	116	31	section	section	NOUN
easat-3604	116	32	.	.	PUNCT
easat-3604	117	1	when	when	SCONJ
easat-3604	117	2	using	use	VERB
easat-3604	117	3	the	the	DET
easat-3604	117	4	assumption	assumption	NOUN
easat-3604	117	5	that	that	SCONJ
easat-3604	117	6	cross	cros	NOUN
easat-3604	117	7	-	-	NOUN
easat-3604	117	8	sections	section	NOUN
easat-3604	117	9	of	of	ADP
easat-3604	117	10	the	the	DET
easat-3604	117	11	beam	beam	NOUN
easat-3604	117	12	,	,	PUNCT
easat-3604	117	13	which	which	PRON
easat-3604	117	14	are	be	AUX
easat-3604	117	15	perpendicular	perpendicular	ADJ
easat-3604	117	16	to	to	ADP
easat-3604	117	17	its	its	PRON
easat-3604	117	18	axis	axis	NOUN
easat-3604	117	19	before	before	SCONJ
easat-3604	117	20	it	it	PRON
easat-3604	117	21	deforms	deform	VERB
easat-3604	117	22	,	,	PUNCT
easat-3604	117	23	continue	continue	VERB
easat-3604	117	24	to	to	PART
easat-3604	117	25	stay	stay	VERB
easat-3604	117	26	flat	flat	ADJ
easat-3604	117	27	and	and	CCONJ
easat-3604	117	28	rotate	rotate	VERB
easat-3604	117	29	to	to	PART
easat-3604	117	30	maintain	maintain	VERB
easat-3604	117	31	their	their	PRON
easat-3604	117	32	perpendicularity	perpendicularity	NOUN
easat-3604	117	33	to	to	ADP
easat-3604	117	34	the	the	DET
easat-3604	117	35	deformed	deform	VERB
easat-3604	117	36	axis	axis	NOUN
easat-3604	117	37	,	,	PUNCT
easat-3604	117	38	the	the	DET
easat-3604	117	39	natural	natural	ADJ
easat-3604	117	40	frequencies	frequency	NOUN
easat-3604	117	41	of	of	ADP
easat-3604	117	42	the	the	DET
easat-3604	117	43	euler	euler	PROPN
easat-3604	117	44	-	-	PUNCT
easat-3604	117	45	bernoulli	bernoulli	PROPN
easat-3604	117	46	beam	beam	NOUN
easat-3604	117	47	can	can	AUX
easat-3604	117	48	be	be	AUX
easat-3604	117	49	presented	present	VERB
easat-3604	117	50	using	use	VERB
easat-3604	117	51	this	this	DET
easat-3604	117	52	formula	formula	NOUN
easat-3604	117	53	[	[	X
easat-3604	117	54	27	27	NUM
easat-3604	117	55	]	]	SYM
easat-3604	117	56	:	:	PUNCT
easat-3604	117	57	4	4	NUM
easat-3604	117	58	02	02	NUM
easat-3604	117	59	2	2	NUM
easat-3604	117	60	1	1	NUM
easat-3604	117	61	0	0	NUM
easat-3604	117	62	1	1	NUM
easat-3604	117	63	b	b	PROPN
easat-3604	117	64	n	n	NUM
easat-3604	117	65	kn	kn	NOUN
easat-3604	117	66	l	l	NOUN
easat-3604	118	1	i	i	PRON
easat-3604	118	2	i	i	PRON
easat-3604	118	3	n	n	VERB
easat-3604	119	1	i	i	NOUN
easat-3604	119	2	l	l	PROPN
easat-3604	120	1			ADJ
easat-3604	120	2			PROPN
easat-3604	120	3			PROPN
easat-3604	120	4			NOUN
easat-3604	120	5			PROPN
easat-3604	120	6			PROPN
easat-3604	120	7			PROPN
easat-3604	120	8			NOUN
easat-3604	121	1			PROPN
easat-3604	121	2			ADJ
easat-3604	121	3			PROPN
easat-3604	121	4			PROPN
easat-3604	121	5	=	=	PROPN
easat-3604	121	6			NOUN
easat-3604	121	7			PROPN
easat-3604	121	8			PROPN
easat-3604	122	1	+	+	CCONJ
easat-3604	122	2			PROPN
easat-3604	122	3			NOUN
easat-3604	122	4			PROPN
easat-3604	123	1			ADJ
easat-3604	123	2			NOUN
easat-3604	123	3			NOUN
easat-3604	123	4	(	(	PUNCT
easat-3604	123	5	9	9	NUM
easat-3604	123	6	)	)	PUNCT
easat-3604	123	7	with	with	ADP
easat-3604	123	8	the	the	DET
easat-3604	123	9	timoshenko	timoshenko	NOUN
easat-3604	123	10	beam	beam	NOUN
easat-3604	123	11	,	,	PUNCT
easat-3604	123	12	the	the	DET
easat-3604	123	13	expression	expression	NOUN
easat-3604	123	14	determining	determine	VERB
easat-3604	123	15	natural	natural	ADJ
easat-3604	123	16	frequency	frequency	NOUN
easat-3604	123	17	is	be	AUX
easat-3604	123	18	as	as	SCONJ
easat-3604	123	19	follows	follow	VERB
easat-3604	123	20	:	:	PUNCT
easat-3604	123	21	4	4	NUM
easat-3604	123	22	02	02	NUM
easat-3604	123	23	2	2	NUM
easat-3604	123	24	1	1	NUM
easat-3604	123	25	b	b	PROPN
easat-3604	123	26	n	n	ADP
easat-3604	123	27	b	b	PROPN
easat-3604	123	28	s	s	PROPN
easat-3604	123	29	kn	kn	PROPN
easat-3604	123	30	l	l	NOUN
easat-3604	124	1	i	i	PRON
easat-3604	124	2	k	k	PROPN
easat-3604	124	3	n	n	CCONJ
easat-3604	124	4	k	k	PROPN
easat-3604	124	5	l	l	PROPN
easat-3604	124	6			ADJ
easat-3604	124	7			PROPN
easat-3604	124	8			PROPN
easat-3604	124	9			NOUN
easat-3604	124	10			PROPN
easat-3604	124	11			PROPN
easat-3604	124	12			PROPN
easat-3604	124	13			NOUN
easat-3604	125	1			PROPN
easat-3604	125	2			ADJ
easat-3604	125	3			PROPN
easat-3604	125	4			PROPN
easat-3604	125	5	=	=	PROPN
easat-3604	125	6			NOUN
easat-3604	125	7			PROPN
easat-3604	125	8			PROPN
easat-3604	126	1	+	+	CCONJ
easat-3604	126	2			PROPN
easat-3604	126	3			NOUN
easat-3604	126	4			PROPN
easat-3604	127	1			ADJ
easat-3604	127	2			NOUN
easat-3604	127	3			NOUN
easat-3604	127	4	(	(	PUNCT
easat-3604	127	5	10	10	NUM
easat-3604	127	6	)	)	PUNCT
easat-3604	127	7	in	in	ADP
easat-3604	127	8	formulas	formula	NOUN
easat-3604	127	9	(	(	PUNCT
easat-3604	127	10	9	9	NUM
easat-3604	127	11	)	)	PUNCT
easat-3604	127	12	and	and	CCONJ
easat-3604	127	13	(	(	PUNCT
easat-3604	127	14	10	10	NUM
easat-3604	127	15	)	)	PUNCT
easat-3604	127	16	,	,	PUNCT
easat-3604	127	17	kb	kb	PROPN
easat-3604	127	18	and	and	CCONJ
easat-3604	127	19	ks	ks	PROPN
easat-3604	127	20	denote	denote	VERB
easat-3604	127	21	the	the	DET
easat-3604	127	22	equivalent	equivalent	ADJ
easat-3604	127	23	bending	bending	NOUN
easat-3604	127	24	and	and	CCONJ
easat-3604	127	25	shear	shear	NOUN
easat-3604	127	26	stiffness	stiffness	NOUN
easat-3604	127	27	of	of	ADP
easat-3604	127	28	the	the	DET
easat-3604	127	29	perforated	perforate	VERB
easat-3604	127	30	beam	beam	NOUN
easat-3604	127	31	;	;	PUNCT
easat-3604	127	32	𝐼1	𝐼1	NOUN
easat-3604	127	33	=	=	SYM
easat-3604	127	34	𝜌𝐼𝑒𝑞	𝜌𝐼𝑒𝑞	PROPN
easat-3604	127	35	and	and	CCONJ
easat-3604	127	36	𝐼0	𝐼0	PROPN
easat-3604	127	37	=	=	SYM
easat-3604	127	38	𝜌𝐴𝑒𝑞	𝜌𝐴𝑒𝑞	PROPN
easat-3604	127	39	signify	signify	VERB
easat-3604	127	40	the	the	DET
easat-3604	127	41	equivalent	equivalent	ADJ
easat-3604	127	42	rotational	rotational	ADJ
easat-3604	127	43	inertia	inertia	NOUN
easat-3604	127	44	and	and	CCONJ
easat-3604	127	45	the	the	DET
easat-3604	127	46	equivalent	equivalent	ADJ
easat-3604	127	47	mass	mass	NOUN
easat-3604	127	48	per	per	ADP
easat-3604	127	49	unit	unit	NOUN
easat-3604	127	50	length	length	NOUN
easat-3604	127	51	,	,	PUNCT
easat-3604	127	52	respectively	respectively	ADV
easat-3604	127	53	.	.	PUNCT
easat-3604	128	1	consider	consider	VERB
easat-3604	128	2	a	a	DET
easat-3604	128	3	referred	refer	VERB
easat-3604	128	4	solid	solid	ADJ
easat-3604	128	5	beam	beam	NOUN
easat-3604	128	6	with	with	ADP
easat-3604	128	7	simply	simply	ADV
easat-3604	128	8	supported	support	VERB
easat-3604	128	9	boundary	boundary	ADJ
easat-3604	128	10	condition	condition	NOUN
easat-3604	128	11	and	and	CCONJ
easat-3604	128	12	the	the	DET
easat-3604	128	13	following	follow	VERB
easat-3604	128	14	geometrical	geometrical	ADJ
easat-3604	128	15	parameters	parameter	NOUN
easat-3604	128	16	:	:	PUNCT
easat-3604	128	17	length	length	NOUN
easat-3604	128	18	l	l	NOUN
easat-3604	128	19	=	=	PUNCT
easat-3604	128	20	4.352	4.352	NUM
easat-3604	128	21	m	m	NOUN
easat-3604	128	22	;	;	PUNCT
easat-3604	128	23	cross	cross	ADJ
easat-3604	128	24	-	-	ADJ
easat-3604	128	25	sectional	sectional	ADJ
easat-3604	128	26	area	area	NOUN
easat-3604	128	27	a	a	DET
easat-3604	128	28	=	=	SYM
easat-3604	128	29	1.31×10	1.31×10	NUM
easat-3604	128	30	-	-	SYM
easat-3604	128	31	3	3	NUM
easat-3604	128	32	m2	m2	PROPN
easat-3604	128	33	;	;	PUNCT
easat-3604	128	34	the	the	DET
easat-3604	128	35	area	area	NOUN
easat-3604	128	36	inertia	inertia	NOUN
easat-3604	128	37	moment	moment	NOUN
easat-3604	129	1	i	i	PRON
easat-3604	129	2	=	=	PUNCT
easat-3604	130	1	5.71×10	5.71×10	NUM
easat-3604	130	2	-	-	SYM
easat-3604	130	3	7	7	NUM
easat-3604	130	4	m4	m4	NOUN
easat-3604	130	5	;	;	PUNCT
easat-3604	130	6	and	and	CCONJ
easat-3604	130	7	the	the	DET
easat-3604	130	8	material	material	NOUN
easat-3604	130	9	properties	property	NOUN
easat-3604	130	10	:	:	PUNCT
easat-3604	130	11	modulus	modulus	NOUN
easat-3604	130	12	of	of	ADP
easat-3604	130	13	elasticity	elasticity	NOUN
easat-3604	130	14	e	e	NOUN
easat-3604	130	15	=	=	SYM
easat-3604	130	16	202	202	NUM
easat-3604	130	17	gpa	gpa	PROPN
easat-3604	130	18	;	;	PUNCT
easat-3604	130	19	modulus	modulus	NOUN
easat-3604	130	20	of	of	ADP
easat-3604	130	21	rigidity	rigidity	NOUN
easat-3604	130	22	g	g	PROPN
easat-3604	130	23	=	=	PROPN
easat-3604	130	24	77.7	77.7	NUM
easat-3604	130	25	gpa	gpa	NOUN
easat-3604	130	26	;	;	PUNCT
easat-3604	130	27	mass	mass	NOUN
easat-3604	130	28	density	density	NOUN
easat-3604	130	29	ρ	ρ	PROPN
easat-3604	130	30	=	=	SYM
easat-3604	130	31	15267	15267	NUM
easat-3604	130	32	kg	kg	NOUN
easat-3604	130	33	/	/	SYM
easat-3604	130	34	m3	m3	PROPN
easat-3604	130	35	,	,	PUNCT
easat-3604	130	36	and	and	CCONJ
easat-3604	130	37	the	the	DET
easat-3604	130	38	shear	shear	NOUN
easat-3604	130	39	correction	correction	NOUN
easat-3604	130	40	factor	factor	NOUN
easat-3604	130	41	κ	κ	NOUN
easat-3604	131	1	=	=	NOUN
easat-3604	132	1	0.7	0.7	NUM
easat-3604	133	1	[	[	X
easat-3604	133	2	26	26	NUM
easat-3604	133	3	]	]	PUNCT
easat-3604	133	4	,	,	PUNCT
easat-3604	133	5	[	[	X
easat-3604	133	6	27	27	NUM
easat-3604	133	7	]	]	PUNCT
easat-3604	133	8	.	.	PUNCT
easat-3604	134	1	table	table	NOUN
easat-3604	134	2	2	2	NUM
easat-3604	134	3	.	.	PUNCT
easat-3604	135	1	the	the	DET
easat-3604	135	2	first	first	ADJ
easat-3604	135	3	five	five	NUM
easat-3604	135	4	natural	natural	ADJ
easat-3604	135	5	frequencies	frequency	NOUN
easat-3604	135	6	of	of	ADP
easat-3604	135	7	the	the	DET
easat-3604	135	8	solid	solid	ADJ
easat-3604	135	9	beam	beam	NOUN
easat-3604	135	10	(	(	PUNCT
easat-3604	135	11	hz	hz	PROPN
easat-3604	135	12	)	)	PUNCT
easat-3604	135	13	.	.	PUNCT
easat-3604	136	1	mode	mode	PROPN
easat-3604	137	1	[	[	X
easat-3604	137	2	26	26	NUM
easat-3604	137	3	]	]	X
easat-3604	137	4	[	[	X
easat-3604	137	5	27	27	NUM
easat-3604	137	6	]	]	X
easat-3604	137	7	present	present	ADJ
easat-3604	137	8	study	study	NOUN
easat-3604	137	9	fem	fem	PROPN
easat-3604	137	10	ansys	ansys	PROPN
easat-3604	137	11	1	1	NUM
easat-3604	137	12	6.3	6.3	NUM
easat-3604	137	13	6.296	6.296	NUM
easat-3604	137	14	6.2955	6.2955	NUM
easat-3604	137	15	6.2934	6.2934	NUM
easat-3604	137	16	2	2	NUM
easat-3604	137	17	25.18	25.18	NUM
easat-3604	137	18	25.136	25.136	NUM
easat-3604	137	19	25.1732	25.1732	NUM
easat-3604	137	20	25.139	25.139	NUM
easat-3604	137	21	3	3	NUM
easat-3604	137	22	56.61	56.61	NUM
easat-3604	137	23	56.398	56.398	NUM
easat-3604	137	24	56.6229	56.6229	NUM
easat-3604	137	25	56.432	56.432	NUM
easat-3604	137	26	4	4	NUM
easat-3604	137	27	100.52	100.52	NUM
easat-3604	137	28	99.873	99.873	NUM
easat-3604	137	29	100.676	100.676	NUM
easat-3604	137	30	100	100	NUM
easat-3604	137	31	5	5	NUM
easat-3604	137	32	156.85	156.85	NUM
easat-3604	137	33	155.281	155.281	NUM
easat-3604	137	34	157.4708	157.4708	NUM
easat-3604	137	35	155.62	155.62	NUM
easat-3604	137	36	7410	7410	NUM
easat-3604	137	37	edelweiss	edelweiss	PROPN
easat-3604	137	38	applied	apply	VERB
easat-3604	137	39	science	science	NOUN
easat-3604	137	40	and	and	CCONJ
easat-3604	137	41	technology	technology	NOUN
easat-3604	137	42	issn	issn	PROPN
easat-3604	137	43	:	:	PUNCT
easat-3604	137	44	2576	2576	NUM
easat-3604	137	45	-	-	SYM
easat-3604	137	46	8484	8484	NUM
easat-3604	137	47	vol	vol	NOUN
easat-3604	137	48	.	.	PROPN
easat-3604	137	49	8	8	NUM
easat-3604	137	50	,	,	PUNCT
easat-3604	137	51	no	no	INTJ
easat-3604	137	52	.	.	NOUN
easat-3604	138	1	6	6	NUM
easat-3604	138	2	:	:	SYM
easat-3604	138	3	7404	7404	NUM
easat-3604	138	4	-	-	SYM
easat-3604	138	5	7418	7418	NUM
easat-3604	138	6	,	,	PUNCT
easat-3604	138	7	2024	2024	NUM
easat-3604	138	8	doi	doi	NOUN
easat-3604	138	9	:	:	PUNCT
easat-3604	138	10	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	138	11	©	©	PROPN
easat-3604	138	12	2024	2024	NUM
easat-3604	138	13	by	by	ADP
easat-3604	138	14	the	the	DET
easat-3604	138	15	author	author	NOUN
easat-3604	138	16	;	;	PUNCT
easat-3604	138	17	licensee	licensee	PROPN
easat-3604	138	18	learning	learn	VERB
easat-3604	138	19	gate	gate	NOUN
easat-3604	138	20	in	in	ADP
easat-3604	138	21	this	this	DET
easat-3604	138	22	section	section	NOUN
easat-3604	138	23	,	,	PUNCT
easat-3604	138	24	we	we	PRON
easat-3604	138	25	use	use	VERB
easat-3604	138	26	finite	finite	ADJ
easat-3604	138	27	-	-	ADJ
easat-3604	138	28	element	element	NOUN
easat-3604	138	29	-	-	PUNCT
easat-3604	138	30	method	method	NOUN
easat-3604	138	31	(	(	PUNCT
easat-3604	138	32	fem	fem	NOUN
easat-3604	138	33	)	)	PUNCT
easat-3604	138	34	analysis	analysis	NOUN
easat-3604	138	35	in	in	ADP
easat-3604	138	36	matlab	matlab	PROPN
easat-3604	138	37	and	and	CCONJ
easat-3604	138	38	simulation	simulation	NOUN
easat-3604	138	39	modal	modal	NOUN
easat-3604	138	40	analysis	analysis	NOUN
easat-3604	138	41	in	in	ADP
easat-3604	138	42	ansys	ansys	PROPN
easat-3604	138	43	to	to	PART
easat-3604	138	44	determine	determine	VERB
easat-3604	138	45	the	the	DET
easat-3604	138	46	first	first	ADJ
easat-3604	138	47	five	five	NUM
easat-3604	138	48	natural	natural	ADJ
easat-3604	138	49	frequencies	frequency	NOUN
easat-3604	138	50	of	of	ADP
easat-3604	138	51	the	the	DET
easat-3604	138	52	referred	refer	VERB
easat-3604	138	53	beam	beam	NOUN
easat-3604	138	54	.	.	PUNCT
easat-3604	139	1	the	the	DET
easat-3604	139	2	results	result	NOUN
easat-3604	139	3	can	can	AUX
easat-3604	139	4	be	be	AUX
easat-3604	139	5	obtained	obtain	VERB
easat-3604	139	6	in	in	ADP
easat-3604	139	7	good	good	ADJ
easat-3604	139	8	agreement	agreement	NOUN
easat-3604	139	9	with	with	ADP
easat-3604	139	10	the	the	DET
easat-3604	139	11	analytical	analytical	ADJ
easat-3604	139	12	results	result	NOUN
easat-3604	139	13	(	(	PUNCT
easat-3604	139	14	see	see	VERB
easat-3604	139	15	table	table	NOUN
easat-3604	139	16	2	2	NUM
easat-3604	139	17	)	)	PUNCT
easat-3604	139	18	.	.	PUNCT
easat-3604	140	1	the	the	DET
easat-3604	140	2	results	result	NOUN
easat-3604	140	3	show	show	VERB
easat-3604	140	4	that	that	SCONJ
easat-3604	140	5	the	the	DET
easat-3604	140	6	first	first	ADJ
easat-3604	140	7	natural	natural	ADJ
easat-3604	140	8	frequencies	frequency	NOUN
easat-3604	140	9	of	of	ADP
easat-3604	140	10	the	the	DET
easat-3604	140	11	solid	solid	ADJ
easat-3604	140	12	beam	beam	NOUN
easat-3604	140	13	are	be	AUX
easat-3604	140	14	the	the	DET
easat-3604	140	15	same	same	ADJ
easat-3604	140	16	with	with	ADP
easat-3604	140	17	negligible	negligible	ADJ
easat-3604	140	18	error	error	NOUN
easat-3604	140	19	when	when	SCONJ
easat-3604	140	20	using	use	VERB
easat-3604	140	21	some	some	DET
easat-3604	140	22	different	different	ADJ
easat-3604	140	23	methods	method	NOUN
easat-3604	140	24	.	.	PUNCT
easat-3604	141	1	this	this	PRON
easat-3604	141	2	shows	show	VERB
easat-3604	141	3	the	the	DET
easat-3604	141	4	convergence	convergence	NOUN
easat-3604	141	5	of	of	ADP
easat-3604	141	6	the	the	DET
easat-3604	141	7	solution	solution	NOUN
easat-3604	141	8	methods	method	NOUN
easat-3604	141	9	.	.	PUNCT
easat-3604	142	1	to	to	PART
easat-3604	142	2	facilitate	facilitate	VERB
easat-3604	142	3	a	a	DET
easat-3604	142	4	comparative	comparative	ADJ
easat-3604	142	5	analysis	analysis	NOUN
easat-3604	142	6	of	of	ADP
easat-3604	142	7	the	the	DET
easat-3604	142	8	frequency	frequency	NOUN
easat-3604	142	9	characteristics	characteristic	NOUN
easat-3604	142	10	of	of	ADP
easat-3604	142	11	a	a	DET
easat-3604	142	12	perforated	perforated	ADJ
easat-3604	142	13	single	single	ADJ
easat-3604	142	14	beam	beam	NOUN
easat-3604	142	15	,	,	PUNCT
easat-3604	142	16	a	a	DET
easat-3604	142	17	clamped	clamp	VERB
easat-3604	142	18	-	-	PUNCT
easat-3604	142	19	clamped	clamp	VERB
easat-3604	142	20	beam	beam	NOUN
easat-3604	142	21	with	with	ADP
easat-3604	142	22	specific	specific	ADJ
easat-3604	142	23	dimensions	dimension	NOUN
easat-3604	142	24	was	be	AUX
easat-3604	142	25	selected	select	VERB
easat-3604	142	26	.	.	PUNCT
easat-3604	143	1	this	this	DET
easat-3604	143	2	beam	beam	NOUN
easat-3604	143	3	,	,	PUNCT
easat-3604	143	4	measuring	measure	VERB
easat-3604	143	5	1401.1	1401.1	NUM
easat-3604	143	6	μm	μm	NOUN
easat-3604	143	7	,	,	PUNCT
easat-3604	143	8	46.9	46.9	NUM
easat-3604	143	9	μm	μm	NOUN
easat-3604	143	10	,	,	PUNCT
easat-3604	143	11	and	and	CCONJ
easat-3604	143	12	60	60	NUM
easat-3604	143	13	μm	μm	NOUN
easat-3604	143	14	in	in	ADP
easat-3604	143	15	length	length	NOUN
easat-3604	143	16	,	,	PUNCT
easat-3604	143	17	width	width	ADJ
easat-3604	143	18	,	,	PUNCT
easat-3604	143	19	and	and	CCONJ
easat-3604	143	20	thickness	thickness	NOUN
easat-3604	143	21	,	,	PUNCT
easat-3604	143	22	respectively	respectively	ADV
easat-3604	143	23	,	,	PUNCT
easat-3604	143	24	was	be	AUX
easat-3604	143	25	chosen	choose	VERB
easat-3604	143	26	for	for	ADP
easat-3604	143	27	its	its	PRON
easat-3604	143	28	resemblance	resemblance	NOUN
easat-3604	143	29	to	to	ADP
easat-3604	143	30	the	the	DET
easat-3604	143	31	perforated	perforate	VERB
easat-3604	143	32	beam	beam	NOUN
easat-3604	143	33	in	in	ADP
easat-3604	143	34	the	the	DET
easat-3604	143	35	referred	refer	VERB
easat-3604	143	36	research	research	NOUN
easat-3604	143	37	[	[	X
easat-3604	143	38	28	28	NUM
easat-3604	143	39	]	]	PUNCT
easat-3604	143	40	.	.	PUNCT
easat-3604	144	1	the	the	DET
easat-3604	144	2	body	body	NOUN
easat-3604	144	3	of	of	ADP
easat-3604	144	4	the	the	DET
easat-3604	144	5	beam	beam	NOUN
easat-3604	144	6	was	be	AUX
easat-3604	144	7	then	then	ADV
easat-3604	144	8	modified	modify	VERB
easat-3604	144	9	by	by	ADP
easat-3604	144	10	introducing	introduce	VERB
easat-3604	144	11	four	four	NUM
easat-3604	144	12	lines	line	NOUN
easat-3604	144	13	of	of	ADP
easat-3604	144	14	square	square	ADJ
easat-3604	144	15	holes	hole	NOUN
easat-3604	144	16	,	,	PUNCT
easat-3604	144	17	resulting	result	VERB
easat-3604	144	18	in	in	ADP
easat-3604	144	19	a	a	DET
easat-3604	144	20	total	total	NOUN
easat-3604	144	21	of	of	ADP
easat-3604	144	22	480	480	NUM
easat-3604	144	23	perforations	perforation	NOUN
easat-3604	144	24	.	.	PUNCT
easat-3604	145	1	the	the	DET
easat-3604	145	2	material	material	NOUN
easat-3604	145	3	for	for	ADP
easat-3604	145	4	the	the	DET
easat-3604	145	5	beams	beam	NOUN
easat-3604	145	6	is	be	AUX
easat-3604	145	7	selected	select	VERB
easat-3604	145	8	as	as	ADP
easat-3604	145	9	single	single	ADJ
easat-3604	145	10	crystal	crystal	NOUN
easat-3604	145	11	silicon	silicon	NOUN
easat-3604	145	12	with	with	ADP
easat-3604	145	13	[	[	PUNCT
easat-3604	145	14	1	1	NUM
easat-3604	145	15	-	-	SYM
easat-3604	145	16	0	0	NUM
easat-3604	145	17	-	-	PUNCT
easat-3604	145	18	0	0	NUM
easat-3604	145	19	]	]	PUNCT
easat-3604	145	20	orientation	orientation	NOUN
easat-3604	145	21	,	,	PUNCT
easat-3604	145	22	e	e	NOUN
easat-3604	145	23	=	=	SYM
easat-3604	145	24	169	169	NUM
easat-3604	145	25	gpa	gpa	PROPN
easat-3604	145	26	for	for	ADP
easat-3604	145	27	young	young	PROPN
easat-3604	145	28	’s	’s	PART
easat-3604	145	29	modulus	modulus	NOUN
easat-3604	145	30	,	,	PUNCT
easat-3604	145	31	g	g	NOUN
easat-3604	145	32	=	=	SYM
easat-3604	145	33	79.6	79.6	NUM
easat-3604	145	34	gpa	gpa	NOUN
easat-3604	145	35	for	for	ADP
easat-3604	145	36	shear	shear	NOUN
easat-3604	145	37	modulus	modulus	NOUN
easat-3604	145	38	,	,	PUNCT
easat-3604	145	39	and	and	CCONJ
easat-3604	145	40	ν	ν	X
easat-3604	145	41	=	=	PUNCT
easat-3604	145	42	0.064	0.064	NUM
easat-3604	145	43	for	for	ADP
easat-3604	145	44	poison	poison	NOUN
easat-3604	145	45	’s	’s	PART
easat-3604	145	46	ratio	ratio	NOUN
easat-3604	145	47	.	.	PUNCT
easat-3604	146	1	by	by	ADP
easat-3604	146	2	using	use	VERB
easat-3604	146	3	ansys	ansys	PROPN
easat-3604	146	4	software	software	PROPN
easat-3604	146	5	,	,	PUNCT
easat-3604	146	6	the	the	DET
easat-3604	146	7	3d	3d	PROPN
easat-3604	146	8	model	model	NOUN
easat-3604	146	9	for	for	ADP
easat-3604	146	10	this	this	DET
easat-3604	146	11	beam	beam	NOUN
easat-3604	146	12	is	be	AUX
easat-3604	146	13	built	build	VERB
easat-3604	146	14	and	and	CCONJ
easat-3604	146	15	the	the	DET
easat-3604	146	16	natural	natural	ADJ
easat-3604	146	17	frequencies	frequency	NOUN
easat-3604	146	18	are	be	AUX
easat-3604	146	19	analyzed	analyze	VERB
easat-3604	146	20	.	.	PUNCT
easat-3604	147	1	the	the	DET
easat-3604	147	2	finding	finding	NOUN
easat-3604	147	3	results	result	NOUN
easat-3604	147	4	of	of	ADP
easat-3604	147	5	this	this	DET
easat-3604	147	6	analysis	analysis	NOUN
easat-3604	147	7	with	with	ADP
easat-3604	147	8	the	the	DET
easat-3604	147	9	fill	fill	NOUN
easat-3604	147	10	factor	factor	NOUN
easat-3604	147	11	α	α	NOUN
easat-3604	147	12	=	=	SYM
easat-3604	147	13	0.282	0.282	NUM
easat-3604	147	14	are	be	AUX
easat-3604	147	15	presented	present	VERB
easat-3604	147	16	in	in	ADP
easat-3604	147	17	table	table	NOUN
easat-3604	147	18	3	3	NUM
easat-3604	147	19	.	.	PUNCT
easat-3604	147	20	table	table	NOUN
easat-3604	147	21	3	3	NUM
easat-3604	147	22	.	.	PUNCT
easat-3604	148	1	the	the	DET
easat-3604	148	2	first	first	ADJ
easat-3604	148	3	natural	natural	ADJ
easat-3604	148	4	frequency	frequency	NOUN
easat-3604	148	5	of	of	ADP
easat-3604	148	6	the	the	DET
easat-3604	148	7	mentioned	mention	VERB
easat-3604	148	8	perforated	perforate	VERB
easat-3604	148	9	single	single	ADJ
easat-3604	148	10	beam	beam	NOUN
easat-3604	148	11	(	(	PUNCT
easat-3604	148	12	khz	khz	NOUN
easat-3604	148	13	)	)	PUNCT
easat-3604	148	14	.	.	PUNCT
easat-3604	149	1	present	present	ADJ
easat-3604	149	2	study	study	NOUN
easat-3604	149	3	[	[	X
easat-3604	149	4	14	14	NUM
easat-3604	149	5	]	]	SYM
easat-3604	149	6	error	error	NOUN
easat-3604	149	7	%	%	NOUN
easat-3604	149	8	model	model	NOUN
easat-3604	149	9	measured	measure	VERB
easat-3604	149	10	fem	fem	NOUN
easat-3604	149	11	182.32	182.32	NUM
easat-3604	149	12	182.3	182.3	NUM
easat-3604	149	13	183.1	183.1	NUM
easat-3604	149	14	182.2	182.2	NUM
easat-3604	149	15	0.426	0.426	NUM
easat-3604	149	16	the	the	DET
easat-3604	149	17	results	result	NOUN
easat-3604	149	18	in	in	ADP
easat-3604	149	19	table	table	NOUN
easat-3604	149	20	3	3	NUM
easat-3604	149	21	show	show	VERB
easat-3604	149	22	a	a	DET
easat-3604	149	23	strong	strong	ADJ
easat-3604	149	24	correlation	correlation	NOUN
easat-3604	149	25	between	between	ADP
easat-3604	149	26	the	the	DET
easat-3604	149	27	simulated	simulate	VERB
easat-3604	149	28	calculations	calculation	NOUN
easat-3604	149	29	from	from	ADP
easat-3604	149	30	this	this	DET
easat-3604	149	31	study	study	NOUN
easat-3604	149	32	and	and	CCONJ
easat-3604	149	33	the	the	DET
easat-3604	149	34	experimental	experimental	ADJ
easat-3604	149	35	results	result	NOUN
easat-3604	149	36	reported	report	VERB
easat-3604	149	37	in	in	ADP
easat-3604	149	38	[	[	X
easat-3604	149	39	14	14	NUM
easat-3604	149	40	]	]	PUNCT
easat-3604	149	41	,	,	PUNCT
easat-3604	149	42	showing	show	VERB
easat-3604	149	43	an	an	DET
easat-3604	149	44	error	error	NOUN
easat-3604	149	45	margin	margin	NOUN
easat-3604	149	46	of	of	ADP
easat-3604	149	47	just	just	ADV
easat-3604	149	48	0.426	0.426	NUM
easat-3604	149	49	%	%	NOUN
easat-3604	149	50	.	.	PUNCT
easat-3604	150	1	this	this	DET
easat-3604	150	2	result	result	NOUN
easat-3604	150	3	is	be	AUX
easat-3604	150	4	also	also	ADV
easat-3604	150	5	expressed	express	VERB
easat-3604	150	6	in	in	ADP
easat-3604	150	7	the	the	DET
easat-3604	150	8	previous	previous	ADJ
easat-3604	150	9	research	research	NOUN
easat-3604	150	10	[	[	X
easat-3604	150	11	28	28	NUM
easat-3604	150	12	]	]	PUNCT
easat-3604	150	13	.	.	PUNCT
easat-3604	151	1	figure	figure	NOUN
easat-3604	151	2	3	3	NUM
easat-3604	151	3	.	.	PUNCT
easat-3604	152	1	the	the	DET
easat-3604	152	2	first	first	ADJ
easat-3604	152	3	frequency	frequency	NOUN
easat-3604	152	4	versus	versus	ADP
easat-3604	152	5	the	the	DET
easat-3604	152	6	fill	fill	NOUN
easat-3604	152	7	factor	factor	NOUN
easat-3604	152	8	.	.	PUNCT
easat-3604	153	1	figure	figure	NOUN
easat-3604	153	2	4	4	NUM
easat-3604	153	3	.	.	PUNCT
easat-3604	154	1	the	the	DET
easat-3604	154	2	second	second	ADJ
easat-3604	154	3	frequency	frequency	NOUN
easat-3604	154	4	versus	versus	ADP
easat-3604	154	5	the	the	DET
easat-3604	154	6	fill	fill	NOUN
easat-3604	154	7	factor	factor	NOUN
easat-3604	154	8	.	.	PUNCT
easat-3604	155	1	r²	r²	NOUN
easat-3604	155	2	=	=	NOUN
easat-3604	155	3	0.967	0.967	NUM
easat-3604	155	4	35	35	NUM
easat-3604	155	5	40	40	NUM
easat-3604	155	6	45	45	NUM
easat-3604	155	7	50	50	NUM
easat-3604	155	8	55	55	NUM
easat-3604	155	9	60	60	NUM
easat-3604	155	10	0	0	NUM
easat-3604	155	11	0.2	0.2	NUM
easat-3604	155	12	0.4	0.4	NUM
easat-3604	155	13	0.6	0.6	NUM
easat-3604	155	14	0.8	0.8	NUM
easat-3604	155	15	1	1	NUM
easat-3604	155	16	fill	fill	NOUN
easat-3604	155	17	factor	factor	NOUN
easat-3604	155	18	α	α	PROPN
easat-3604	155	19	a	a	NOUN
easat-3604	155	20	)	)	PUNCT
easat-3604	155	21	the	the	DET
easat-3604	155	22	1st	1st	ADJ
easat-3604	155	23	frequency	frequency	NOUN
easat-3604	155	24	of	of	ADP
easat-3604	155	25	fixed	fix	VERB
easat-3604	155	26	-	-	PUNCT
easat-3604	155	27	guided	guide	VERB
easat-3604	155	28	(	(	PUNCT
easat-3604	155	29	khz	khz	NOUN
easat-3604	155	30	)	)	PUNCT
easat-3604	155	31	square	square	ADJ
easat-3604	155	32	hole	hole	NOUN
easat-3604	155	33	,	,	PUNCT
easat-3604	155	34	grid	grid	VERB
easat-3604	155	35	30	30	NUM
easat-3604	155	36	cirle	cirle	NOUN
easat-3604	155	37	hole	hole	NOUN
easat-3604	155	38	,	,	PUNCT
easat-3604	155	39	grid	grid	VERB
easat-3604	155	40	30	30	NUM
easat-3604	155	41	square	square	ADJ
easat-3604	155	42	hole	hole	NOUN
easat-3604	155	43	,	,	PUNCT
easat-3604	155	44	grid	grid	VERB
easat-3604	155	45	20	20	NUM
easat-3604	155	46	circle	circle	NOUN
easat-3604	155	47	hole	hole	NOUN
easat-3604	155	48	,	,	PUNCT
easat-3604	155	49	grid	grid	VERB
easat-3604	155	50	20	20	NUM
easat-3604	155	51	square	square	ADJ
easat-3604	155	52	hole	hole	NOUN
easat-3604	155	53	,	,	PUNCT
easat-3604	155	54	grid	grid	VERB
easat-3604	155	55	15	15	NUM
easat-3604	155	56	circle	circle	NOUN
easat-3604	155	57	hole	hole	NOUN
easat-3604	155	58	,	,	PUNCT
easat-3604	155	59	grid	grid	VERB
easat-3604	155	60	15	15	NUM
easat-3604	155	61	linear	linear	NOUN
easat-3604	155	62	(	(	PUNCT
easat-3604	155	63	circle	circle	NOUN
easat-3604	155	64	hole	hole	NOUN
easat-3604	155	65	,	,	PUNCT
easat-3604	155	66	grid	grid	NOUN
easat-3604	155	67	20	20	NUM
easat-3604	155	68	)	)	PUNCT
easat-3604	155	69	100	100	NUM
easat-3604	155	70	150	150	NUM
easat-3604	155	71	200	200	NUM
easat-3604	155	72	250	250	NUM
easat-3604	155	73	300	300	NUM
easat-3604	155	74	350	350	NUM
easat-3604	155	75	400	400	NUM
easat-3604	155	76	0	0	NUM
easat-3604	155	77	0.2	0.2	NUM
easat-3604	155	78	0.4	0.4	NUM
easat-3604	155	79	0.6	0.6	NUM
easat-3604	155	80	0.8	0.8	NUM
easat-3604	155	81	1	1	NUM
easat-3604	155	82	fill	fill	NOUN
easat-3604	155	83	factor	factor	NOUN
easat-3604	155	84	α	α	NOUN
easat-3604	155	85	b	b	NOUN
easat-3604	155	86	)	)	PUNCT
easat-3604	155	87	the	the	DET
easat-3604	155	88	1st	1st	ADJ
easat-3604	155	89	frequency	frequency	NOUN
easat-3604	155	90	of	of	ADP
easat-3604	155	91	fixed	fix	VERB
easat-3604	155	92	-	-	PUNCT
easat-3604	155	93	fixed	fix	VERB
easat-3604	155	94	(	(	PUNCT
easat-3604	155	95	khz	khz	NOUN
easat-3604	155	96	)	)	PUNCT
easat-3604	155	97	square	square	ADJ
easat-3604	155	98	hole	hole	NOUN
easat-3604	155	99	,	,	PUNCT
easat-3604	155	100	grid	grid	VERB
easat-3604	155	101	30	30	NUM
easat-3604	155	102	cirle	cirle	NOUN
easat-3604	155	103	hole	hole	NOUN
easat-3604	155	104	,	,	PUNCT
easat-3604	155	105	grid	grid	VERB
easat-3604	155	106	30	30	NUM
easat-3604	155	107	square	square	ADJ
easat-3604	155	108	hole	hole	NOUN
easat-3604	155	109	,	,	PUNCT
easat-3604	155	110	grid	grid	VERB
easat-3604	155	111	20	20	NUM
easat-3604	155	112	circle	circle	NOUN
easat-3604	155	113	hole	hole	NOUN
easat-3604	155	114	,	,	PUNCT
easat-3604	155	115	grid	grid	VERB
easat-3604	155	116	20	20	NUM
easat-3604	155	117	square	square	ADJ
easat-3604	155	118	hole	hole	NOUN
easat-3604	155	119	,	,	PUNCT
easat-3604	155	120	grid	grid	VERB
easat-3604	155	121	15	15	NUM
easat-3604	155	122	circle	circle	NOUN
easat-3604	155	123	hole	hole	NOUN
easat-3604	155	124	,	,	PUNCT
easat-3604	155	125	grid	grid	VERB
easat-3604	155	126	15	15	NUM
easat-3604	155	127	fem	fem	NOUN
easat-3604	155	128	analysis	analysis	NOUN
easat-3604	155	129	120	120	NUM
easat-3604	155	130	160	160	NUM
easat-3604	155	131	200	200	NUM
easat-3604	155	132	240	240	NUM
easat-3604	155	133	280	280	NUM
easat-3604	155	134	320	320	NUM
easat-3604	155	135	360	360	NUM
easat-3604	155	136	0	0	NUM
easat-3604	155	137	0.2	0.2	NUM
easat-3604	155	138	0.4	0.4	NUM
easat-3604	155	139	0.6	0.6	NUM
easat-3604	155	140	0.8	0.8	NUM
easat-3604	155	141	1	1	NUM
easat-3604	155	142	fill	fill	NOUN
easat-3604	155	143	factor	factor	NOUN
easat-3604	155	144	α	α	PROPN
easat-3604	155	145	a	a	NOUN
easat-3604	155	146	)	)	PUNCT
easat-3604	155	147	the	the	DET
easat-3604	155	148	2nd	2nd	ADJ
easat-3604	155	149	frequency	frequency	NOUN
easat-3604	155	150	of	of	ADP
easat-3604	155	151	fixed	fix	VERB
easat-3604	155	152	-	-	PUNCT
easat-3604	155	153	guided	guide	VERB
easat-3604	155	154	(	(	PUNCT
easat-3604	155	155	khz	khz	NOUN
easat-3604	155	156	)	)	PUNCT
easat-3604	155	157	square	square	ADJ
easat-3604	155	158	hole	hole	NOUN
easat-3604	155	159	,	,	PUNCT
easat-3604	155	160	grid	grid	VERB
easat-3604	155	161	30	30	NUM
easat-3604	155	162	cirle	cirle	NOUN
easat-3604	155	163	hole	hole	NOUN
easat-3604	155	164	,	,	PUNCT
easat-3604	155	165	grid	grid	VERB
easat-3604	155	166	30	30	NUM
easat-3604	155	167	square	square	ADJ
easat-3604	155	168	hole	hole	NOUN
easat-3604	155	169	,	,	PUNCT
easat-3604	155	170	grid	grid	VERB
easat-3604	155	171	20	20	NUM
easat-3604	155	172	circle	circle	NOUN
easat-3604	155	173	hole	hole	NOUN
easat-3604	155	174	,	,	PUNCT
easat-3604	155	175	grid	grid	VERB
easat-3604	155	176	20	20	NUM
easat-3604	155	177	square	square	ADJ
easat-3604	155	178	hole	hole	NOUN
easat-3604	155	179	,	,	PUNCT
easat-3604	155	180	grid	grid	VERB
easat-3604	155	181	15	15	NUM
easat-3604	155	182	circle	circle	NOUN
easat-3604	155	183	hole	hole	NOUN
easat-3604	155	184	,	,	PUNCT
easat-3604	155	185	grid	grid	VERB
easat-3604	155	186	15	15	NUM
easat-3604	155	187	fem	fem	NOUN
easat-3604	155	188	analysis	analysis	NOUN
easat-3604	155	189	200	200	NUM
easat-3604	156	1	300	300	NUM
easat-3604	156	2	400	400	NUM
easat-3604	156	3	500	500	NUM
easat-3604	156	4	600	600	NUM
easat-3604	156	5	700	700	NUM
easat-3604	156	6	800	800	NUM
easat-3604	156	7	900	900	NUM
easat-3604	156	8	1000	1000	NUM
easat-3604	156	9	0	0	NUM
easat-3604	156	10	0.2	0.2	NUM
easat-3604	156	11	0.4	0.4	NUM
easat-3604	156	12	0.6	0.6	NUM
easat-3604	156	13	0.8	0.8	NUM
easat-3604	156	14	1	1	NUM
easat-3604	156	15	fill	fill	NOUN
easat-3604	156	16	factor	factor	NOUN
easat-3604	156	17	α	α	NOUN
easat-3604	156	18	b	b	NOUN
easat-3604	156	19	)	)	PUNCT
easat-3604	156	20	the	the	DET
easat-3604	156	21	2st	2st	ADJ
easat-3604	156	22	frequency	frequency	NOUN
easat-3604	156	23	of	of	ADP
easat-3604	156	24	fixed	fix	VERB
easat-3604	156	25	-	-	PUNCT
easat-3604	156	26	fixed	fix	VERB
easat-3604	156	27	(	(	PUNCT
easat-3604	156	28	khz	khz	NOUN
easat-3604	156	29	)	)	PUNCT
easat-3604	156	30	square	square	ADJ
easat-3604	156	31	hole	hole	NOUN
easat-3604	156	32	,	,	PUNCT
easat-3604	156	33	grid	grid	VERB
easat-3604	156	34	30	30	NUM
easat-3604	156	35	cirle	cirle	NOUN
easat-3604	156	36	hole	hole	NOUN
easat-3604	156	37	,	,	PUNCT
easat-3604	156	38	grid	grid	VERB
easat-3604	156	39	30	30	NUM
easat-3604	156	40	square	square	ADJ
easat-3604	156	41	hole	hole	NOUN
easat-3604	156	42	,	,	PUNCT
easat-3604	156	43	grid	grid	VERB
easat-3604	156	44	20	20	NUM
easat-3604	156	45	circle	circle	NOUN
easat-3604	156	46	hole	hole	NOUN
easat-3604	156	47	,	,	PUNCT
easat-3604	156	48	grid	grid	VERB
easat-3604	156	49	20	20	NUM
easat-3604	156	50	square	square	ADJ
easat-3604	156	51	hole	hole	NOUN
easat-3604	156	52	,	,	PUNCT
easat-3604	156	53	grid	grid	VERB
easat-3604	156	54	15	15	NUM
easat-3604	156	55	circle	circle	NOUN
easat-3604	156	56	hole	hole	NOUN
easat-3604	156	57	,	,	PUNCT
easat-3604	156	58	grid	grid	VERB
easat-3604	156	59	15	15	NUM
easat-3604	156	60	fem	fem	NOUN
easat-3604	156	61	analysis	analysis	NOUN
easat-3604	156	62	7411	7411	NUM
easat-3604	156	63	edelweiss	edelweiss	PROPN
easat-3604	156	64	applied	apply	VERB
easat-3604	156	65	science	science	NOUN
easat-3604	156	66	and	and	CCONJ
easat-3604	156	67	technology	technology	NOUN
easat-3604	156	68	issn	issn	PROPN
easat-3604	156	69	:	:	PUNCT
easat-3604	156	70	2576	2576	NUM
easat-3604	156	71	-	-	SYM
easat-3604	156	72	8484	8484	NUM
easat-3604	156	73	vol	vol	NOUN
easat-3604	156	74	.	.	PROPN
easat-3604	157	1	8	8	NUM
easat-3604	157	2	,	,	PUNCT
easat-3604	157	3	no	no	INTJ
easat-3604	157	4	.	.	NOUN
easat-3604	157	5	6	6	NUM
easat-3604	157	6	:	:	SYM
easat-3604	157	7	7404	7404	NUM
easat-3604	157	8	-	-	SYM
easat-3604	157	9	7418	7418	NUM
easat-3604	157	10	,	,	PUNCT
easat-3604	157	11	2024	2024	NUM
easat-3604	157	12	doi	doi	NOUN
easat-3604	157	13	:	:	PUNCT
easat-3604	157	14	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	157	15	©	©	PROPN
easat-3604	157	16	2024	2024	NUM
easat-3604	157	17	by	by	ADP
easat-3604	157	18	the	the	DET
easat-3604	157	19	author	author	NOUN
easat-3604	157	20	;	;	PUNCT
easat-3604	157	21	licensee	licensee	PROPN
easat-3604	157	22	learning	learn	VERB
easat-3604	157	23	gate	gate	NOUN
easat-3604	157	24	in	in	ADP
easat-3604	157	25	the	the	DET
easat-3604	157	26	following	follow	VERB
easat-3604	157	27	section	section	NOUN
easat-3604	157	28	,	,	PUNCT
easat-3604	157	29	the	the	DET
easat-3604	157	30	initial	initial	ADJ
easat-3604	157	31	two	two	NUM
easat-3604	157	32	fundamental	fundamental	ADJ
easat-3604	157	33	frequencies	frequency	NOUN
easat-3604	157	34	of	of	ADP
easat-3604	157	35	single	single	ADJ
easat-3604	157	36	beams	beam	NOUN
easat-3604	157	37	with	with	ADP
easat-3604	157	38	the	the	DET
easat-3604	157	39	aspect	aspect	NOUN
easat-3604	157	40	ratio	ratio	NOUN
easat-3604	157	41	l	l	PROPN
easat-3604	157	42	/	/	SYM
easat-3604	157	43	h	h	NOUN
easat-3604	157	44	=	=	SYM
easat-3604	157	45	10	10	NUM
easat-3604	157	46	and	and	CCONJ
easat-3604	157	47	the	the	DET
easat-3604	157	48	overall	overall	ADJ
easat-3604	157	49	dimension	dimension	NOUN
easat-3604	157	50	of	of	ADP
easat-3604	157	51	l×w×h	l×w×h	PRON
easat-3604	157	52	as	as	SCONJ
easat-3604	157	53	1200×120×60	1200×120×60	NUM
easat-3604	157	54	micrometers	micrometer	NOUN
easat-3604	157	55	will	will	AUX
easat-3604	157	56	be	be	AUX
easat-3604	157	57	assessed	assess	VERB
easat-3604	157	58	.	.	PUNCT
easat-3604	158	1	this	this	DET
easat-3604	158	2	analysis	analysis	NOUN
easat-3604	158	3	will	will	AUX
easat-3604	158	4	utilize	utilize	VERB
easat-3604	158	5	the	the	DET
easat-3604	158	6	fem	fem	NOUN
easat-3604	158	7	and	and	CCONJ
easat-3604	158	8	simulations	simulation	NOUN
easat-3604	158	9	conducted	conduct	VERB
easat-3604	158	10	with	with	ADP
easat-3604	158	11	ansys	ansys	PROPN
easat-3604	158	12	software	software	PROPN
easat-3604	158	13	under	under	ADP
easat-3604	158	14	various	various	ADJ
easat-3604	158	15	boundary	boundary	ADJ
easat-3604	158	16	conditions	condition	NOUN
easat-3604	158	17	.	.	PUNCT
easat-3604	159	1	the	the	DET
easat-3604	159	2	holes	hole	NOUN
easat-3604	159	3	are	be	AUX
easat-3604	159	4	arranged	arrange	VERB
easat-3604	159	5	into	into	ADP
easat-3604	159	6	2	2	NUM
easat-3604	159	7	,	,	PUNCT
easat-3604	159	8	3	3	NUM
easat-3604	159	9	,	,	PUNCT
easat-3604	159	10	4	4	NUM
easat-3604	159	11	rows	row	NOUN
easat-3604	159	12	and	and	CCONJ
easat-3604	159	13	40	40	NUM
easat-3604	159	14	,	,	PUNCT
easat-3604	159	15	60	60	NUM
easat-3604	159	16	,	,	PUNCT
easat-3604	159	17	80	80	NUM
easat-3604	159	18	columns	column	NOUN
easat-3604	159	19	for	for	ADP
easat-3604	159	20	grid	grid	NOUN
easat-3604	159	21	sizes	size	NOUN
easat-3604	159	22	30	30	NUM
easat-3604	159	23	,	,	PUNCT
easat-3604	159	24	20	20	NUM
easat-3604	159	25	,	,	PUNCT
easat-3604	159	26	and	and	CCONJ
easat-3604	159	27	15	15	NUM
easat-3604	159	28	μm	μm	NOUN
easat-3604	159	29	,	,	PUNCT
easat-3604	159	30	respectively	respectively	ADV
easat-3604	159	31	in	in	ADP
easat-3604	159	32	each	each	DET
easat-3604	159	33	case	case	NOUN
easat-3604	159	34	of	of	ADP
easat-3604	159	35	the	the	DET
easat-3604	159	36	different	different	ADJ
easat-3604	159	37	grid	grid	NOUN
easat-3604	159	38	size	size	NOUN
easat-3604	159	39	.	.	PUNCT
easat-3604	160	1	the	the	DET
easat-3604	160	2	dimension	dimension	NOUN
easat-3604	160	3	of	of	ADP
easat-3604	160	4	the	the	DET
easat-3604	160	5	holes	hole	NOUN
easat-3604	160	6	(	(	PUNCT
easat-3604	160	7	side	side	NOUN
easat-3604	160	8	on	on	ADP
easat-3604	160	9	the	the	DET
easat-3604	160	10	square	square	ADJ
easat-3604	160	11	hole	hole	NOUN
easat-3604	160	12	or	or	CCONJ
easat-3604	160	13	diameter	diameter	NOUN
easat-3604	160	14	on	on	ADP
easat-3604	160	15	the	the	DET
easat-3604	160	16	circle	circle	NOUN
easat-3604	160	17	one	one	NUM
easat-3604	160	18	)	)	PUNCT
easat-3604	160	19	changes	change	NOUN
easat-3604	160	20	within	within	ADP
easat-3604	160	21	the	the	DET
easat-3604	160	22	specified	specify	VERB
easat-3604	160	23	grid	grid	NOUN
easat-3604	160	24	size	size	NOUN
easat-3604	160	25	.	.	PUNCT
easat-3604	161	1	consequently	consequently	ADV
easat-3604	161	2	,	,	PUNCT
easat-3604	161	3	following	follow	VERB
easat-3604	161	4	the	the	DET
easat-3604	161	5	expression	expression	NOUN
easat-3604	161	6	(	(	PUNCT
easat-3604	161	7	1	1	NUM
easat-3604	161	8	)	)	PUNCT
easat-3604	161	9	,	,	PUNCT
easat-3604	161	10	the	the	DET
easat-3604	161	11	fill	fill	NOUN
easat-3604	161	12	factor	factor	NOUN
easat-3604	161	13	α	α	NOUN
easat-3604	161	14	in	in	ADP
easat-3604	161	15	this	this	DET
easat-3604	161	16	case	case	NOUN
easat-3604	161	17	is	be	AUX
easat-3604	161	18	defined	define	VERB
easat-3604	161	19	in	in	ADP
easat-3604	161	20	the	the	DET
easat-3604	161	21	range	range	NOUN
easat-3604	161	22	from	from	ADP
easat-3604	161	23	0.067	0.067	NUM
easat-3604	161	24	to	to	ADP
easat-3604	161	25	0.93	0.93	NUM
easat-3604	161	26	.	.	PUNCT
easat-3604	162	1	in	in	ADP
easat-3604	162	2	figure	figure	NOUN
easat-3604	162	3	3	3	NUM
easat-3604	162	4	and	and	CCONJ
easat-3604	162	5	figure	figure	VERB
easat-3604	162	6	4	4	NUM
easat-3604	162	7	,	,	PUNCT
easat-3604	162	8	the	the	DET
easat-3604	162	9	first	first	ADJ
easat-3604	162	10	two	two	NUM
easat-3604	162	11	major	major	ADJ
easat-3604	162	12	frequencies	frequency	NOUN
easat-3604	162	13	of	of	ADP
easat-3604	162	14	the	the	DET
easat-3604	162	15	cutout	cutout	NOUN
easat-3604	162	16	holes	hole	VERB
easat-3604	162	17	single	single	ADJ
easat-3604	162	18	beam	beam	NOUN
easat-3604	162	19	were	be	AUX
easat-3604	162	20	presented	present	VERB
easat-3604	162	21	with	with	ADP
easat-3604	162	22	the	the	DET
easat-3604	162	23	two	two	NUM
easat-3604	162	24	considered	consider	VERB
easat-3604	162	25	cases	case	NOUN
easat-3604	162	26	of	of	ADP
easat-3604	162	27	the	the	DET
easat-3604	162	28	boundary	boundary	ADJ
easat-3604	162	29	condition	condition	NOUN
easat-3604	162	30	:	:	PUNCT
easat-3604	162	31	fixed	fix	VERB
easat-3604	162	32	-	-	PUNCT
easat-3604	162	33	guided	guide	VERB
easat-3604	162	34	beam	beam	NOUN
easat-3604	162	35	(	(	PUNCT
easat-3604	162	36	one	one	NUM
easat-3604	162	37	fixed	fix	VERB
easat-3604	162	38	end	end	NOUN
easat-3604	162	39	one	one	NUM
easat-3604	162	40	guided	guide	VERB
easat-3604	162	41	end	end	NOUN
easat-3604	162	42	)	)	PUNCT
easat-3604	162	43	and	and	CCONJ
easat-3604	162	44	fixed	fix	VERB
easat-3604	162	45	-	-	PUNCT
easat-3604	162	46	fixed	fix	VERB
easat-3604	162	47	beam	beam	NOUN
easat-3604	162	48	(	(	PUNCT
easat-3604	162	49	2	2	NUM
easat-3604	162	50	fixed	fix	VERB
easat-3604	162	51	endings	ending	NOUN
easat-3604	162	52	)	)	PUNCT
easat-3604	162	53	.	.	PUNCT
easat-3604	163	1	the	the	DET
easat-3604	163	2	research	research	NOUN
easat-3604	163	3	was	be	AUX
easat-3604	163	4	conducted	conduct	VERB
easat-3604	163	5	with	with	ADP
easat-3604	163	6	two	two	NUM
easat-3604	163	7	forms	form	NOUN
easat-3604	163	8	for	for	ADP
easat-3604	163	9	the	the	DET
easat-3604	163	10	cutout	cutout	NOUN
easat-3604	163	11	holes	hole	VERB
easat-3604	163	12	:	:	PUNCT
easat-3604	163	13	square	square	ADJ
easat-3604	163	14	-	-	PUNCT
easat-3604	163	15	shaped	shape	VERB
easat-3604	163	16	and	and	CCONJ
easat-3604	163	17	circle	circle	NOUN
easat-3604	163	18	-	-	PUNCT
easat-3604	163	19	shaped	shaped	ADJ
easat-3604	163	20	.	.	PUNCT
easat-3604	164	1	the	the	DET
easat-3604	164	2	increase	increase	NOUN
easat-3604	164	3	in	in	ADP
easat-3604	164	4	the	the	DET
easat-3604	164	5	fill	fill	NOUN
easat-3604	164	6	factor	factor	NOUN
easat-3604	164	7	α	α	NOUN
easat-3604	164	8	of	of	ADP
easat-3604	164	9	the	the	DET
easat-3604	164	10	beam	beam	NOUN
easat-3604	164	11	holes	hole	NOUN
easat-3604	164	12	leads	lead	VERB
easat-3604	164	13	to	to	ADP
easat-3604	164	14	a	a	DET
easat-3604	164	15	rise	rise	NOUN
easat-3604	164	16	in	in	ADP
easat-3604	164	17	the	the	DET
easat-3604	164	18	first	first	ADJ
easat-3604	164	19	two	two	NUM
easat-3604	164	20	significant	significant	ADJ
easat-3604	164	21	frequencies	frequency	NOUN
easat-3604	164	22	of	of	ADP
easat-3604	164	23	a	a	DET
easat-3604	164	24	single	single	ADJ
easat-3604	164	25	beam	beam	NOUN
easat-3604	164	26	.	.	PUNCT
easat-3604	165	1	consequently	consequently	ADV
easat-3604	165	2	,	,	PUNCT
easat-3604	165	3	as	as	ADP
easat-3604	165	4	the	the	DET
easat-3604	165	5	size	size	NOUN
easat-3604	165	6	of	of	ADP
easat-3604	165	7	the	the	DET
easat-3604	165	8	holes	hole	NOUN
easat-3604	165	9	increases	increase	NOUN
easat-3604	165	10	,	,	PUNCT
easat-3604	165	11	the	the	DET
easat-3604	165	12	natural	natural	ADJ
easat-3604	165	13	frequency	frequency	NOUN
easat-3604	165	14	experiences	experience	VERB
easat-3604	165	15	a	a	DET
easat-3604	165	16	decline	decline	NOUN
easat-3604	165	17	.	.	PUNCT
easat-3604	166	1	the	the	DET
easat-3604	166	2	most	most	ADV
easat-3604	166	3	dramatic	dramatic	ADJ
easat-3604	166	4	change	change	NOUN
easat-3604	166	5	in	in	ADP
easat-3604	166	6	the	the	DET
easat-3604	166	7	frequencies	frequency	NOUN
easat-3604	166	8	was	be	AUX
easat-3604	166	9	seen	see	VERB
easat-3604	166	10	in	in	ADP
easat-3604	166	11	the	the	DET
easat-3604	166	12	range	range	NOUN
easat-3604	166	13	(	(	PUNCT
easat-3604	166	14	0.05	0.05	NUM
easat-3604	166	15	–	–	PUNCT
easat-3604	166	16	0.4	0.4	NUM
easat-3604	166	17	)	)	PUNCT
easat-3604	166	18	of	of	ADP
easat-3604	166	19	the	the	DET
easat-3604	166	20	fill	fill	NOUN
easat-3604	166	21	factor	factor	NOUN
easat-3604	166	22	α	α	NOUN
easat-3604	166	23	.	.	PUNCT
easat-3604	167	1	as	as	ADP
easat-3604	167	2	the	the	DET
easat-3604	167	3	size	size	NOUN
easat-3604	167	4	of	of	ADP
easat-3604	167	5	the	the	DET
easat-3604	167	6	hole	hole	NOUN
easat-3604	167	7	increases	increase	VERB
easat-3604	167	8	,	,	PUNCT
easat-3604	167	9	the	the	DET
easat-3604	167	10	disparity	disparity	NOUN
easat-3604	167	11	becomes	become	VERB
easat-3604	167	12	more	more	ADV
easat-3604	167	13	pronounced	pronounced	ADJ
easat-3604	167	14	.	.	PUNCT
easat-3604	168	1	this	this	DET
easat-3604	168	2	difference	difference	NOUN
easat-3604	168	3	is	be	AUX
easat-3604	168	4	particularly	particularly	ADV
easat-3604	168	5	evident	evident	ADJ
easat-3604	168	6	with	with	ADP
easat-3604	168	7	square	square	ADJ
easat-3604	168	8	holes	hole	NOUN
easat-3604	168	9	.	.	PUNCT
easat-3604	169	1	in	in	ADP
easat-3604	169	2	the	the	DET
easat-3604	169	3	case	case	NOUN
easat-3604	169	4	of	of	ADP
easat-3604	169	5	the	the	DET
easat-3604	169	6	circle	circle	NOUN
easat-3604	169	7	-	-	PUNCT
easat-3604	169	8	shaped	shape	VERB
easat-3604	169	9	cutout	cutout	NOUN
easat-3604	169	10	holes	hole	NOUN
easat-3604	169	11	,	,	PUNCT
easat-3604	169	12	the	the	DET
easat-3604	169	13	change	change	NOUN
easat-3604	169	14	in	in	ADP
easat-3604	169	15	values	value	NOUN
easat-3604	169	16	of	of	ADP
easat-3604	169	17	the	the	DET
easat-3604	169	18	first	first	ADJ
easat-3604	169	19	two	two	NUM
easat-3604	169	20	frequencies	frequency	NOUN
easat-3604	169	21	is	be	AUX
easat-3604	169	22	slower	slow	ADJ
easat-3604	169	23	than	than	ADP
easat-3604	169	24	those	those	PRON
easat-3604	169	25	with	with	ADP
easat-3604	169	26	square	square	ADJ
easat-3604	169	27	-	-	PUNCT
easat-3604	169	28	shaped	shape	VERB
easat-3604	169	29	holes	hole	NOUN
easat-3604	169	30	,	,	PUNCT
easat-3604	169	31	and	and	CCONJ
easat-3604	169	32	the	the	DET
easat-3604	169	33	relationship	relationship	NOUN
easat-3604	169	34	between	between	ADP
easat-3604	169	35	the	the	DET
easat-3604	169	36	frequencies	frequency	NOUN
easat-3604	169	37	and	and	CCONJ
easat-3604	169	38	fill	fill	NOUN
easat-3604	169	39	factor	factor	NOUN
easat-3604	169	40	is	be	AUX
easat-3604	169	41	nearly	nearly	ADV
easat-3604	169	42	linear	linear	ADJ
easat-3604	169	43	with	with	ADP
easat-3604	169	44	high	high	ADJ
easat-3604	169	45	r	r	NOUN
easat-3604	169	46	-	-	PUNCT
easat-3604	169	47	square	square	ADJ
easat-3604	169	48	(	(	PUNCT
easat-3604	169	49	r2=0,967	r2=0,967	ADJ
easat-3604	169	50	in	in	ADP
easat-3604	169	51	figure	figure	NOUN
easat-3604	169	52	3a	3a	NUM
easat-3604	169	53	)	)	PUNCT
easat-3604	169	54	.	.	PUNCT
easat-3604	170	1	when	when	SCONJ
easat-3604	170	2	the	the	DET
easat-3604	170	3	fill	fill	NOUN
easat-3604	170	4	factor	factor	NOUN
easat-3604	170	5	α	α	NOUN
easat-3604	170	6	varies	vary	VERB
easat-3604	170	7	in	in	ADP
easat-3604	170	8	the	the	DET
easat-3604	170	9	interval	interval	NOUN
easat-3604	170	10	0.4	0.4	NUM
easat-3604	170	11	≤	≤	NUM
easat-3604	170	12	α	α	PRON
easat-3604	170	13	<	<	X
easat-3604	170	14	1	1	NUM
easat-3604	170	15	,	,	PUNCT
easat-3604	170	16	the	the	DET
easat-3604	170	17	natural	natural	ADJ
easat-3604	170	18	frequency	frequency	NOUN
easat-3604	170	19	values	value	NOUN
easat-3604	170	20	for	for	ADP
easat-3604	170	21	both	both	DET
easat-3604	170	22	types	type	NOUN
easat-3604	170	23	of	of	ADP
easat-3604	170	24	holes	hole	NOUN
easat-3604	170	25	remain	remain	VERB
easat-3604	170	26	comparable	comparable	ADJ
easat-3604	170	27	,	,	PUNCT
easat-3604	170	28	and	and	CCONJ
easat-3604	170	29	the	the	DET
easat-3604	170	30	frequency	frequency	NOUN
easat-3604	170	31	changes	change	NOUN
easat-3604	170	32	appear	appear	VERB
easat-3604	170	33	to	to	PART
easat-3604	170	34	exhibit	exhibit	VERB
easat-3604	170	35	a	a	DET
easat-3604	170	36	linear	linear	ADJ
easat-3604	170	37	trend	trend	NOUN
easat-3604	170	38	.	.	PUNCT
easat-3604	171	1	varying	vary	VERB
easat-3604	171	2	boundary	boundary	ADJ
easat-3604	171	3	conditions	condition	NOUN
easat-3604	171	4	result	result	VERB
easat-3604	171	5	in	in	ADP
easat-3604	171	6	distinct	distinct	ADJ
easat-3604	171	7	natural	natural	ADJ
easat-3604	171	8	frequencies	frequency	NOUN
easat-3604	171	9	.	.	PUNCT
easat-3604	172	1	for	for	ADP
easat-3604	172	2	a	a	DET
easat-3604	172	3	fixed	fix	VERB
easat-3604	172	4	-	-	PUNCT
easat-3604	172	5	fixed	fix	VERB
easat-3604	172	6	beam	beam	NOUN
easat-3604	172	7	configuration	configuration	NOUN
easat-3604	172	8	,	,	PUNCT
easat-3604	172	9	the	the	DET
easat-3604	172	10	first	first	ADJ
easat-3604	172	11	two	two	NUM
easat-3604	172	12	frequencies	frequency	NOUN
easat-3604	172	13	are	be	AUX
easat-3604	172	14	higher	high	ADJ
easat-3604	172	15	compared	compare	VERB
easat-3604	172	16	to	to	ADP
easat-3604	172	17	a	a	DET
easat-3604	172	18	fixed	fix	VERB
easat-3604	172	19	-	-	PUNCT
easat-3604	172	20	guided	guide	VERB
easat-3604	172	21	beam	beam	NOUN
easat-3604	172	22	setup	setup	NOUN
easat-3604	172	23	,	,	PUNCT
easat-3604	172	24	with	with	ADP
easat-3604	172	25	increases	increase	NOUN
easat-3604	172	26	of	of	ADP
easat-3604	172	27	6.3	6.3	NUM
easat-3604	172	28	times	time	NOUN
easat-3604	172	29	for	for	ADP
easat-3604	172	30	the	the	DET
easat-3604	172	31	first	first	ADJ
easat-3604	172	32	frequency	frequency	NOUN
easat-3604	172	33	and	and	CCONJ
easat-3604	172	34	2.7	2.7	NUM
easat-3604	172	35	times	time	NOUN
easat-3604	172	36	for	for	ADP
easat-3604	172	37	the	the	DET
easat-3604	172	38	second	second	ADJ
easat-3604	172	39	one	one	NUM
easat-3604	172	40	.	.	PUNCT
easat-3604	173	1	the	the	DET
easat-3604	173	2	appearance	appearance	NOUN
easat-3604	173	3	of	of	ADP
easat-3604	173	4	holes	hole	NOUN
easat-3604	173	5	on	on	ADP
easat-3604	173	6	the	the	DET
easat-3604	173	7	beam	beam	NOUN
easat-3604	173	8	body	body	NOUN
easat-3604	173	9	alters	alter	VERB
easat-3604	173	10	the	the	DET
easat-3604	173	11	total	total	ADJ
easat-3604	173	12	mass	mass	NOUN
easat-3604	173	13	and	and	CCONJ
easat-3604	173	14	the	the	DET
easat-3604	173	15	area	area	NOUN
easat-3604	173	16	moment	moment	NOUN
easat-3604	173	17	of	of	ADP
easat-3604	173	18	inertia	inertia	NOUN
easat-3604	173	19	of	of	ADP
easat-3604	173	20	the	the	DET
easat-3604	173	21	beams	beam	NOUN
easat-3604	173	22	,	,	PUNCT
easat-3604	173	23	consequently	consequently	ADV
easat-3604	173	24	affecting	affect	VERB
easat-3604	173	25	the	the	DET
easat-3604	173	26	equivalent	equivalent	ADJ
easat-3604	173	27	properties	property	NOUN
easat-3604	173	28	of	of	ADP
easat-3604	173	29	the	the	DET
easat-3604	173	30	beams	beam	NOUN
easat-3604	173	31	and	and	CCONJ
easat-3604	173	32	altering	alter	VERB
easat-3604	173	33	the	the	DET
easat-3604	173	34	structural	structural	ADJ
easat-3604	173	35	frequency	frequency	NOUN
easat-3604	173	36	.	.	PUNCT
easat-3604	174	1	3.2	3.2	NUM
easat-3604	174	2	.	.	PUNCT
easat-3604	175	1	the	the	DET
easat-3604	175	2	equivalent	equivalent	ADJ
easat-3604	175	3	and	and	CCONJ
easat-3604	175	4	natural	natural	ADJ
easat-3604	175	5	frequencies	frequency	NOUN
easat-3604	175	6	of	of	ADP
easat-3604	175	7	perforated	perforated	ADJ
easat-3604	175	8	micro	micro	NOUN
easat-3604	175	9	-	-	NOUN
easat-3604	175	10	beam	beam	ADJ
easat-3604	175	11	with	with	ADP
easat-3604	175	12	complex	complex	ADJ
easat-3604	175	13	structure	structure	NOUN
easat-3604	175	14	the	the	DET
easat-3604	175	15	stiffness	stiffness	NOUN
easat-3604	175	16	of	of	ADP
easat-3604	175	17	a	a	DET
easat-3604	175	18	beam	beam	NOUN
easat-3604	175	19	is	be	AUX
easat-3604	175	20	a	a	DET
easat-3604	175	21	critical	critical	ADJ
easat-3604	175	22	component	component	NOUN
easat-3604	175	23	in	in	ADP
easat-3604	175	24	the	the	DET
easat-3604	175	25	design	design	NOUN
easat-3604	175	26	of	of	ADP
easat-3604	175	27	mechanical	mechanical	ADJ
easat-3604	175	28	vibrational	vibrational	ADJ
easat-3604	175	29	structures	structure	NOUN
easat-3604	175	30	.	.	PUNCT
easat-3604	176	1	increased	increase	VERB
easat-3604	176	2	stiffness	stiffness	ADJ
easat-3604	176	3	results	result	NOUN
easat-3604	176	4	in	in	ADP
easat-3604	176	5	reduced	reduced	ADJ
easat-3604	176	6	deflection	deflection	NOUN
easat-3604	176	7	and	and	CCONJ
easat-3604	176	8	allows	allow	VERB
easat-3604	176	9	for	for	ADP
easat-3604	176	10	a	a	DET
easat-3604	176	11	higher	high	ADJ
easat-3604	176	12	operational	operational	ADJ
easat-3604	176	13	frequency	frequency	NOUN
easat-3604	176	14	of	of	ADP
easat-3604	176	15	the	the	DET
easat-3604	176	16	system	system	NOUN
easat-3604	176	17	.	.	PUNCT
easat-3604	177	1	in	in	ADP
easat-3604	177	2	most	most	ADJ
easat-3604	177	3	practical	practical	ADJ
easat-3604	177	4	structures	structure	NOUN
easat-3604	177	5	,	,	PUNCT
easat-3604	177	6	the	the	DET
easat-3604	177	7	equivalent	equivalent	ADJ
easat-3604	177	8	stiffness	stiffness	NOUN
easat-3604	177	9	plays	play	VERB
easat-3604	177	10	a	a	DET
easat-3604	177	11	direct	direct	ADJ
easat-3604	177	12	role	role	NOUN
easat-3604	177	13	in	in	ADP
easat-3604	177	14	determining	determine	VERB
easat-3604	177	15	the	the	DET
easat-3604	177	16	resonant	resonant	ADJ
easat-3604	177	17	frequency	frequency	NOUN
easat-3604	177	18	of	of	ADP
easat-3604	177	19	resonators	resonator	NOUN
easat-3604	177	20	,	,	PUNCT
easat-3604	177	21	such	such	ADJ
easat-3604	177	22	as	as	ADP
easat-3604	177	23	microresonators	microresonator	NOUN
easat-3604	177	24	.	.	PUNCT
easat-3604	178	1	the	the	DET
easat-3604	178	2	calculation	calculation	NOUN
easat-3604	178	3	of	of	ADP
easat-3604	178	4	this	this	DET
easat-3604	178	5	equivalent	equivalent	ADJ
easat-3604	178	6	stiffness	stiffness	NOUN
easat-3604	178	7	is	be	AUX
easat-3604	178	8	performed	perform	VERB
easat-3604	178	9	through	through	ADP
easat-3604	178	10	simulations	simulation	NOUN
easat-3604	178	11	that	that	PRON
easat-3604	178	12	rely	rely	VERB
easat-3604	178	13	on	on	ADP
easat-3604	178	14	the	the	DET
easat-3604	178	15	assumption	assumption	NOUN
easat-3604	178	16	about	about	ADP
easat-3604	178	17	the	the	DET
easat-3604	178	18	the	the	DET
easat-3604	178	19	linearity	linearity	NOUN
easat-3604	178	20	in	in	ADP
easat-3604	178	21	the	the	DET
easat-3604	178	22	mechanical	mechanical	ADJ
easat-3604	178	23	response	response	NOUN
easat-3604	178	24	of	of	ADP
easat-3604	178	25	the	the	DET
easat-3604	178	26	material	material	NOUN
easat-3604	178	27	.	.	PUNCT
easat-3604	179	1	the	the	DET
easat-3604	179	2	conventional	conventional	ADJ
easat-3604	179	3	equation	equation	NOUN
easat-3604	179	4	illustrates	illustrate	VERB
easat-3604	179	5	the	the	DET
easat-3604	179	6	relationship	relationship	NOUN
easat-3604	179	7	between	between	ADP
easat-3604	179	8	deformation	deformation	NOUN
easat-3604	179	9	(	(	PUNCT
easat-3604	179	10	δ	δ	NOUN
easat-3604	179	11	)	)	PUNCT
easat-3604	179	12	and	and	CCONJ
easat-3604	179	13	stiffness	stiffness	NOUN
easat-3604	179	14	(	(	PUNCT
easat-3604	179	15	k	k	NOUN
easat-3604	179	16	)	)	PUNCT
easat-3604	179	17	of	of	ADP
easat-3604	179	18	a	a	DET
easat-3604	179	19	beam	beam	NOUN
easat-3604	179	20	following	follow	VERB
easat-3604	179	21	hooke	hooke	PROPN
easat-3604	179	22	's	's	PART
easat-3604	179	23	law	law	NOUN
easat-3604	179	24	as	as	SCONJ
easat-3604	179	25	follows	follow	VERB
easat-3604	179	26	:	:	PUNCT
easat-3604	179	27	f	f	PROPN
easat-3604	179	28	k=	k=	INTJ
easat-3604	179	29			PROPN
easat-3604	179	30	(	(	PUNCT
easat-3604	179	31	11	11	NUM
easat-3604	179	32	)	)	PUNCT
easat-3604	179	33	this	this	DET
easat-3604	179	34	section	section	NOUN
easat-3604	179	35	will	will	AUX
easat-3604	179	36	showcase	showcase	VERB
easat-3604	179	37	the	the	DET
easat-3604	179	38	dynamic	dynamic	ADJ
easat-3604	179	39	characteristics	characteristic	NOUN
easat-3604	179	40	,	,	PUNCT
easat-3604	179	41	such	such	ADJ
easat-3604	179	42	as	as	ADP
easat-3604	179	43	equivalent	equivalent	ADJ
easat-3604	179	44	stiffness	stiffness	ADJ
easat-3604	179	45	natural	natural	ADJ
easat-3604	179	46	frequency	frequency	NOUN
easat-3604	179	47	,	,	PUNCT
easat-3604	179	48	and	and	CCONJ
easat-3604	179	49	resonant	resonant	ADJ
easat-3604	179	50	frequency	frequency	NOUN
easat-3604	179	51	obtained	obtain	VERB
easat-3604	179	52	through	through	ADP
easat-3604	179	53	ansys	ansys	PROPN
easat-3604	179	54	workbench	workbench	NOUN
easat-3604	179	55	for	for	ADP
easat-3604	179	56	three	three	NUM
easat-3604	179	57	typical	typical	ADJ
easat-3604	179	58	microbeam	microbeam	NOUN
easat-3604	179	59	types	type	NOUN
easat-3604	179	60	.	.	PUNCT
easat-3604	180	1	in	in	ADP
easat-3604	180	2	the	the	DET
easat-3604	180	3	geometry	geometry	NOUN
easat-3604	180	4	module	module	NOUN
easat-3604	180	5	,	,	PUNCT
easat-3604	180	6	the	the	DET
easat-3604	180	7	3d	3d	NOUN
easat-3604	180	8	models	model	NOUN
easat-3604	180	9	of	of	ADP
easat-3604	180	10	these	these	DET
easat-3604	180	11	beams	beam	NOUN
easat-3604	180	12	are	be	AUX
easat-3604	180	13	detailed	detail	VERB
easat-3604	180	14	,	,	PUNCT
easat-3604	180	15	featuring	feature	VERB
easat-3604	180	16	two	two	NUM
easat-3604	180	17	types	type	NOUN
easat-3604	180	18	of	of	ADP
easat-3604	180	19	holes	hole	NOUN
easat-3604	180	20	present	present	ADJ
easat-3604	180	21	throughout	throughout	ADP
easat-3604	180	22	each	each	DET
easat-3604	180	23	beam	beam	NOUN
easat-3604	180	24	structure	structure	NOUN
easat-3604	180	25	.	.	PUNCT
easat-3604	181	1	the	the	DET
easat-3604	181	2	material	material	NOUN
easat-3604	181	3	properties	property	NOUN
easat-3604	181	4	can	can	AUX
easat-3604	181	5	be	be	AUX
easat-3604	181	6	found	find	VERB
easat-3604	181	7	in	in	ADP
easat-3604	181	8	table	table	NOUN
easat-3604	181	9	1	1	NUM
easat-3604	181	10	in	in	ADP
easat-3604	181	11	the	the	DET
easat-3604	181	12	previous	previous	ADJ
easat-3604	181	13	section	section	NOUN
easat-3604	181	14	.	.	PUNCT
easat-3604	182	1	3.2.1	3.2.1	NUM
easat-3604	182	2	.	.	PUNCT
easat-3604	182	3	crab	crab	NOUN
easat-3604	182	4	-	-	PUNCT
easat-3604	182	5	shaped	shape	VERB
easat-3604	182	6	beam	beam	NOUN
easat-3604	182	7	a	a	DET
easat-3604	182	8	complex	complex	ADJ
easat-3604	182	9	beam	beam	NOUN
easat-3604	182	10	is	be	AUX
easat-3604	182	11	formed	form	VERB
easat-3604	182	12	by	by	ADP
easat-3604	182	13	joining	join	VERB
easat-3604	182	14	two	two	NUM
easat-3604	182	15	single	single	ADJ
easat-3604	182	16	bars	bar	NOUN
easat-3604	182	17	at	at	ADP
easat-3604	182	18	right	right	ADJ
easat-3604	182	19	angles	angle	NOUN
easat-3604	182	20	,	,	PUNCT
easat-3604	182	21	resulting	result	VERB
easat-3604	182	22	in	in	ADP
easat-3604	182	23	an	an	DET
easat-3604	182	24	"	"	PUNCT
easat-3604	182	25	l	l	NOUN
easat-3604	182	26	"	"	PUNCT
easat-3604	182	27	or	or	CCONJ
easat-3604	182	28	"	"	PUNCT
easat-3604	182	29	crab	crab	NOUN
easat-3604	182	30	"	"	PUNCT
easat-3604	182	31	shape	shape	NOUN
easat-3604	182	32	and	and	CCONJ
easat-3604	182	33	is	be	AUX
easat-3604	182	34	called	call	VERB
easat-3604	182	35	a	a	DET
easat-3604	182	36	crab	crab	NOUN
easat-3604	182	37	-	-	PUNCT
easat-3604	182	38	shaped	shape	VERB
easat-3604	182	39	beam	beam	NOUN
easat-3604	182	40	.	.	PUNCT
easat-3604	183	1	each	each	DET
easat-3604	183	2	bar	bar	NOUN
easat-3604	183	3	is	be	AUX
easat-3604	183	4	200	200	NUM
easat-3604	183	5	and	and	CCONJ
easat-3604	183	6	300	300	NUM
easat-3604	183	7	μm	μm	NUM
easat-3604	183	8	length	length	NOUN
easat-3604	183	9	respectively	respectively	ADV
easat-3604	183	10	with	with	ADP
easat-3604	183	11	cross	cross	NOUN
easat-3604	183	12	-	-	NOUN
easat-3604	183	13	section	section	NOUN
easat-3604	183	14	w×h	w×h	PROPN
easat-3604	183	15	=	=	PUNCT
easat-3604	183	16	16×30	16×30	NUM
easat-3604	183	17	μm	μm	NOUN
easat-3604	183	18	.	.	PUNCT
easat-3604	184	1	to	to	PART
easat-3604	184	2	calculate	calculate	VERB
easat-3604	184	3	the	the	DET
easat-3604	184	4	equivalent	equivalent	ADJ
easat-3604	184	5	stiffness	stiffness	NOUN
easat-3604	184	6	of	of	ADP
easat-3604	184	7	the	the	DET
easat-3604	184	8	beam	beam	NOUN
easat-3604	184	9	,	,	PUNCT
easat-3604	184	10	the	the	DET
easat-3604	184	11	displacement	displacement	NOUN
easat-3604	184	12	of	of	ADP
easat-3604	184	13	the	the	DET
easat-3604	184	14	beam	beam	NOUN
easat-3604	184	15	ending	end	VERB
easat-3604	184	16	loaded	load	VERB
easat-3604	184	17	with	with	ADP
easat-3604	184	18	a	a	DET
easat-3604	184	19	unit	unit	NOUN
easat-3604	184	20	force	force	NOUN
easat-3604	184	21	of	of	ADP
easat-3604	184	22	1	1	NUM
easat-3604	184	23	μn	μn	NOUN
easat-3604	184	24	in	in	ADP
easat-3604	184	25	the	the	DET
easat-3604	184	26	direction	direction	NOUN
easat-3604	184	27	of	of	ADP
easat-3604	184	28	vibration	vibration	NOUN
easat-3604	184	29	needs	need	VERB
easat-3604	184	30	to	to	PART
easat-3604	184	31	be	be	AUX
easat-3604	184	32	determined	determine	VERB
easat-3604	184	33	.	.	PUNCT
easat-3604	185	1	the	the	DET
easat-3604	185	2	obtained	obtain	VERB
easat-3604	185	3	deformation	deformation	NOUN
easat-3604	185	4	at	at	ADP
easat-3604	185	5	the	the	DET
easat-3604	185	6	end	end	NOUN
easat-3604	185	7	of	of	ADP
easat-3604	185	8	the	the	DET
easat-3604	185	9	beam	beam	NOUN
easat-3604	185	10	is	be	AUX
easat-3604	185	11	influenced	influence	VERB
easat-3604	185	12	by	by	ADP
easat-3604	185	13	the	the	DET
easat-3604	185	14	properties	property	NOUN
easat-3604	185	15	of	of	ADP
easat-3604	185	16	the	the	DET
easat-3604	185	17	material	material	NOUN
easat-3604	185	18	,	,	PUNCT
easat-3604	185	19	geometric	geometric	ADJ
easat-3604	185	20	characteristics	characteristic	NOUN
easat-3604	185	21	,	,	PUNCT
easat-3604	185	22	and	and	CCONJ
easat-3604	185	23	boundary	boundary	ADJ
easat-3604	185	24	conditions	condition	NOUN
easat-3604	185	25	.	.	PUNCT
easat-3604	186	1	additionally	additionally	ADV
easat-3604	186	2	,	,	PUNCT
easat-3604	186	3	the	the	DET
easat-3604	186	4	dimensions	dimension	NOUN
easat-3604	186	5	and	and	CCONJ
easat-3604	186	6	number	number	NOUN
easat-3604	186	7	of	of	ADP
easat-3604	186	8	holes	hole	NOUN
easat-3604	186	9	impact	impact	NOUN
easat-3604	186	10	the	the	DET
easat-3604	186	11	equivalent	equivalent	ADJ
easat-3604	186	12	stiffness	stiffness	NOUN
easat-3604	186	13	.	.	PUNCT
easat-3604	187	1	figure	figure	NOUN
easat-3604	187	2	5	5	NUM
easat-3604	187	3	and	and	CCONJ
easat-3604	187	4	figure	figure	VERB
easat-3604	187	5	6	6	NUM
easat-3604	187	6	illustrate	illustrate	VERB
easat-3604	187	7	the	the	DET
easat-3604	187	8	relation	relation	NOUN
easat-3604	187	9	between	between	ADP
easat-3604	187	10	the	the	DET
easat-3604	187	11	hole	hole	NOUN
easat-3604	187	12	dimension	dimension	NOUN
easat-3604	187	13	and	and	CCONJ
easat-3604	187	14	the	the	DET
easat-3604	187	15	dynamic	dynamic	ADJ
easat-3604	187	16	characteristics	characteristic	NOUN
easat-3604	187	17	of	of	ADP
easat-3604	187	18	this	this	DET
easat-3604	187	19	beam	beam	NOUN
easat-3604	187	20	with	with	ADP
easat-3604	187	21	the	the	DET
easat-3604	187	22	holes	hole	NOUN
easat-3604	187	23	arranged	arrange	VERB
easat-3604	187	24	in	in	ADP
easat-3604	187	25	one	one	NUM
easat-3604	187	26	line	line	NOUN
easat-3604	187	27	in	in	ADP
easat-3604	187	28	the	the	DET
easat-3604	187	29	plane	plane	NOUN
easat-3604	187	30	of	of	ADP
easat-3604	187	31	the	the	DET
easat-3604	187	32	beam	beam	NOUN
easat-3604	187	33	.	.	PUNCT
easat-3604	188	1	in	in	ADP
easat-3604	188	2	the	the	DET
easat-3604	188	3	x	x	NOUN
easat-3604	188	4	-	-	NOUN
easat-3604	188	5	direction	direction	NOUN
easat-3604	188	6	,	,	PUNCT
easat-3604	188	7	the	the	DET
easat-3604	188	8	equivalent	equivalent	ADJ
easat-3604	188	9	stiffness	stiffness	NOUN
easat-3604	188	10	kx	kx	PROPN
easat-3604	188	11	changes	change	NOUN
easat-3604	188	12	slightly	slightly	ADV
easat-3604	188	13	,	,	PUNCT
easat-3604	188	14	ranging	range	VERB
easat-3604	188	15	from	from	ADP
easat-3604	188	16	15	15	NUM
easat-3604	188	17	to	to	ADP
easat-3604	188	18	460	460	NUM
easat-3604	188	19	n	n	CCONJ
easat-3604	188	20	/	/	SYM
easat-3604	188	21	m	m	PROPN
easat-3604	188	22	as	as	SCONJ
easat-3604	188	23	α	α	NOUN
easat-3604	188	24	varies	vary	VERB
easat-3604	188	25	from	from	ADP
easat-3604	188	26	0.065	0.065	NUM
easat-3604	188	27	to	to	ADP
easat-3604	188	28	0.875	0.875	NUM
easat-3604	188	29	respectively	respectively	ADV
easat-3604	188	30	.	.	PUNCT
easat-3604	189	1	in	in	ADP
easat-3604	189	2	contrast	contrast	NOUN
easat-3604	189	3	,	,	PUNCT
easat-3604	189	4	ky	ky	PROPN
easat-3604	189	5	experiences	experience	VERB
easat-3604	189	6	a	a	DET
easat-3604	189	7	broader	broad	ADJ
easat-3604	189	8	7412	7412	NUM
easat-3604	189	9	edelweiss	edelweiss	PROPN
easat-3604	189	10	applied	apply	VERB
easat-3604	189	11	science	science	NOUN
easat-3604	189	12	and	and	CCONJ
easat-3604	189	13	technology	technology	NOUN
easat-3604	189	14	issn	issn	PROPN
easat-3604	189	15	:	:	PUNCT
easat-3604	189	16	2576	2576	NUM
easat-3604	189	17	-	-	SYM
easat-3604	189	18	8484	8484	NUM
easat-3604	189	19	vol	vol	NOUN
easat-3604	189	20	.	.	PROPN
easat-3604	189	21	8	8	NUM
easat-3604	189	22	,	,	PUNCT
easat-3604	189	23	no	no	INTJ
easat-3604	189	24	.	.	NOUN
easat-3604	190	1	6	6	NUM
easat-3604	190	2	:	:	SYM
easat-3604	190	3	7404	7404	NUM
easat-3604	190	4	-	-	SYM
easat-3604	190	5	7418	7418	NUM
easat-3604	190	6	,	,	PUNCT
easat-3604	190	7	2024	2024	NUM
easat-3604	190	8	doi	doi	NOUN
easat-3604	190	9	:	:	PUNCT
easat-3604	190	10	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	190	11	©	©	PROPN
easat-3604	190	12	2024	2024	NUM
easat-3604	190	13	by	by	ADP
easat-3604	190	14	the	the	DET
easat-3604	190	15	author	author	NOUN
easat-3604	190	16	;	;	PUNCT
easat-3604	190	17	licensee	licensee	PROPN
easat-3604	190	18	learning	learn	VERB
easat-3604	190	19	gate	gate	PROPN
easat-3604	190	20	variation	variation	NOUN
easat-3604	190	21	,	,	PUNCT
easat-3604	190	22	ranging	range	VERB
easat-3604	190	23	from	from	ADP
easat-3604	190	24	22	22	NUM
easat-3604	190	25	to	to	ADP
easat-3604	190	26	1300	1300	NUM
easat-3604	190	27	n	n	CCONJ
easat-3604	190	28	/	/	SYM
easat-3604	190	29	m	m	PROPN
easat-3604	190	30	with	with	ADP
easat-3604	190	31	the	the	DET
easat-3604	190	32	same	same	ADJ
easat-3604	190	33	α	α	NOUN
easat-3604	190	34	values	value	NOUN
easat-3604	190	35	above	above	ADP
easat-3604	190	36	featuring	feature	VERB
easat-3604	190	37	one	one	NUM
easat-3604	190	38	end	end	NOUN
easat-3604	190	39	fixed	fix	VERB
easat-3604	190	40	and	and	CCONJ
easat-3604	190	41	the	the	DET
easat-3604	190	42	other	other	ADJ
easat-3604	190	43	end	end	NOUN
easat-3604	190	44	guided	guide	VERB
easat-3604	190	45	in	in	ADP
easat-3604	190	46	the	the	DET
easat-3604	190	47	crab	crab	NOUN
easat-3604	190	48	beam	beam	NOUN
easat-3604	190	49	setup	setup	NOUN
easat-3604	190	50	(	(	PUNCT
easat-3604	190	51	see	see	VERB
easat-3604	190	52	figure	figure	NOUN
easat-3604	190	53	5	5	NUM
easat-3604	190	54	)	)	PUNCT
easat-3604	190	55	.	.	PUNCT
easat-3604	191	1	figure	figure	NOUN
easat-3604	191	2	5	5	NUM
easat-3604	191	3	.	.	PUNCT
easat-3604	192	1	the	the	DET
easat-3604	192	2	equivalent	equivalent	ADJ
easat-3604	192	3	stiffness	stiffness	NOUN
easat-3604	192	4	versus	versus	ADP
easat-3604	192	5	fill	fill	NOUN
easat-3604	192	6	factor	factor	NOUN
easat-3604	192	7	in	in	ADP
easat-3604	192	8	the	the	DET
easat-3604	192	9	crab	crab	NOUN
easat-3604	192	10	-	-	PUNCT
easat-3604	192	11	shaped	shape	VERB
easat-3604	192	12	perforated	perforate	VERB
easat-3604	192	13	beam	beam	NOUN
easat-3604	192	14	.	.	PUNCT
easat-3604	193	1	figure	figure	NOUN
easat-3604	193	2	6	6	NUM
easat-3604	193	3	.	.	PUNCT
easat-3604	194	1	two	two	NUM
easat-3604	194	2	first	first	ADJ
easat-3604	194	3	resonant	resonant	ADJ
easat-3604	194	4	frequencies	frequency	NOUN
easat-3604	194	5	of	of	ADP
easat-3604	194	6	the	the	DET
easat-3604	194	7	perforated	perforate	VERB
easat-3604	194	8	beam	beam	NOUN
easat-3604	194	9	with	with	ADP
easat-3604	194	10	crab	crab	NOUN
easat-3604	194	11	-	-	PUNCT
easat-3604	194	12	shaped	shape	VERB
easat-3604	194	13	.	.	PUNCT
easat-3604	195	1	figure	figure	NOUN
easat-3604	195	2	6	6	NUM
easat-3604	195	3	illustrates	illustrate	VERB
easat-3604	195	4	the	the	DET
easat-3604	195	5	two	two	NUM
easat-3604	195	6	initial	initial	ADJ
easat-3604	195	7	frequencies	frequency	NOUN
easat-3604	195	8	,	,	PUNCT
easat-3604	195	9	where	where	SCONJ
easat-3604	195	10	the	the	DET
easat-3604	195	11	first	first	ADJ
easat-3604	195	12	one	one	NUM
easat-3604	195	13	corresponds	correspond	NOUN
easat-3604	195	14	to	to	ADP
easat-3604	195	15	the	the	DET
easat-3604	195	16	x	x	ADJ
easat-3604	195	17	-	-	NOUN
easat-3604	195	18	direction	direction	NOUN
easat-3604	195	19	vibrational	vibrational	ADJ
easat-3604	195	20	mode	mode	NOUN
easat-3604	195	21	and	and	CCONJ
easat-3604	195	22	the	the	DET
easat-3604	195	23	second	second	ADJ
easat-3604	195	24	one	one	NUM
easat-3604	195	25	pertains	pertain	NOUN
easat-3604	195	26	to	to	ADP
easat-3604	195	27	the	the	DET
easat-3604	195	28	y	y	NOUN
easat-3604	195	29	-	-	PUNCT
easat-3604	195	30	direction	direction	NOUN
easat-3604	195	31	vibrational	vibrational	ADJ
easat-3604	195	32	mode	mode	NOUN
easat-3604	195	33	of	of	ADP
easat-3604	195	34	the	the	DET
easat-3604	195	35	beam	beam	NOUN
easat-3604	195	36	.	.	PUNCT
easat-3604	196	1	these	these	PRON
easat-3604	196	2	are	be	AUX
easat-3604	196	3	the	the	DET
easat-3604	196	4	desired	desire	VERB
easat-3604	196	5	modes	mode	NOUN
easat-3604	196	6	of	of	ADP
easat-3604	196	7	movement	movement	NOUN
easat-3604	196	8	of	of	ADP
easat-3604	196	9	the	the	DET
easat-3604	196	10	mechanical	mechanical	ADJ
easat-3604	196	11	system	system	NOUN
easat-3604	196	12	in	in	ADP
easat-3604	196	13	the	the	DET
easat-3604	196	14	mems	mem	NOUN
easat-3604	196	15	devices	device	NOUN
easat-3604	196	16	.	.	PUNCT
easat-3604	197	1	the	the	DET
easat-3604	197	2	distinction	distinction	NOUN
easat-3604	197	3	between	between	ADP
easat-3604	197	4	these	these	DET
easat-3604	197	5	modes	mode	NOUN
easat-3604	197	6	is	be	AUX
easat-3604	197	7	minimal	minimal	ADJ
easat-3604	197	8	when	when	SCONJ
easat-3604	197	9	the	the	DET
easat-3604	197	10	fill	fill	NOUN
easat-3604	197	11	factor	factor	NOUN
easat-3604	197	12	(	(	PUNCT
easat-3604	197	13	α	α	NOUN
easat-3604	197	14	)	)	PUNCT
easat-3604	197	15	is	be	AUX
easat-3604	197	16	low	low	ADJ
easat-3604	197	17	(	(	PUNCT
easat-3604	197	18	α	α	X
easat-3604	197	19	<	<	X
easat-3604	197	20	0.2	0.2	NUM
easat-3604	197	21	)	)	PUNCT
easat-3604	197	22	,	,	PUNCT
easat-3604	197	23	particularly	particularly	ADV
easat-3604	197	24	in	in	ADP
easat-3604	197	25	the	the	DET
easat-3604	197	26	case	case	NOUN
easat-3604	197	27	of	of	ADP
easat-3604	197	28	square	square	ADJ
easat-3604	197	29	holes	hole	NOUN
easat-3604	197	30	.	.	PUNCT
easat-3604	198	1	as	as	SCONJ
easat-3604	198	2	α	α	PROPN
easat-3604	198	3	approaches	approach	VERB
easat-3604	198	4	nearly	nearly	ADV
easat-3604	198	5	1	1	NUM
easat-3604	198	6	(	(	PUNCT
easat-3604	198	7	0.4	0.4	NUM
easat-3604	198	8	<	<	X
easat-3604	198	9	α	α	X
easat-3604	198	10	<	<	X
easat-3604	198	11	0.875	0.875	NUM
easat-3604	198	12	)	)	PUNCT
easat-3604	198	13	,	,	PUNCT
easat-3604	198	14	this	this	DET
easat-3604	198	15	difference	difference	NOUN
easat-3604	198	16	increases	increase	VERB
easat-3604	198	17	and	and	CCONJ
easat-3604	198	18	stabilizes	stabilize	VERB
easat-3604	198	19	.	.	PUNCT
easat-3604	199	1	additionally	additionally	ADV
easat-3604	199	2	,	,	PUNCT
easat-3604	199	3	figure	figure	VERB
easat-3604	199	4	6	6	NUM
easat-3604	199	5	depicts	depict	VERB
easat-3604	199	6	the	the	DET
easat-3604	199	7	comparison	comparison	NOUN
easat-3604	199	8	between	between	ADP
easat-3604	199	9	the	the	DET
easat-3604	199	10	analytical	analytical	ADJ
easat-3604	199	11	calculations	calculation	NOUN
easat-3604	199	12	and	and	CCONJ
easat-3604	199	13	simulations	simulation	NOUN
easat-3604	199	14	for	for	ADP
easat-3604	199	15	the	the	DET
easat-3604	199	16	first	first	ADJ
easat-3604	199	17	frequency	frequency	NOUN
easat-3604	199	18	,	,	PUNCT
easat-3604	199	19	showing	show	VERB
easat-3604	199	20	a	a	DET
easat-3604	199	21	margin	margin	NOUN
easat-3604	199	22	error	error	NOUN
easat-3604	199	23	of	of	ADP
easat-3604	199	24	less	less	ADJ
easat-3604	199	25	than	than	ADP
easat-3604	199	26	10	10	NUM
easat-3604	199	27	%	%	NOUN
easat-3604	199	28	for	for	ADP
easat-3604	199	29	square	square	ADJ
easat-3604	199	30	holes	hole	NOUN
easat-3604	199	31	.	.	PUNCT
easat-3604	200	1	for	for	ADP
easat-3604	200	2	square	square	ADJ
easat-3604	200	3	holes	hole	NOUN
easat-3604	200	4	,	,	PUNCT
easat-3604	200	5	both	both	DET
easat-3604	200	6	dynamic	dynamic	ADJ
easat-3604	200	7	parameters	parameter	NOUN
easat-3604	200	8	exhibit	exhibit	VERB
easat-3604	200	9	lower	low	ADJ
easat-3604	200	10	values	value	NOUN
easat-3604	200	11	compared	compare	VERB
easat-3604	200	12	to	to	ADP
easat-3604	200	13	those	those	PRON
easat-3604	200	14	with	with	ADP
easat-3604	200	15	circular	circular	ADJ
easat-3604	200	16	holes	hole	NOUN
easat-3604	200	17	.	.	PUNCT
easat-3604	201	1	the	the	DET
easat-3604	201	2	findings	finding	NOUN
easat-3604	201	3	indicate	indicate	VERB
easat-3604	201	4	that	that	SCONJ
easat-3604	201	5	the	the	DET
easat-3604	201	6	dynamic	dynamic	ADJ
easat-3604	201	7	characteristics	characteristic	NOUN
easat-3604	201	8	of	of	ADP
easat-3604	201	9	the	the	DET
easat-3604	201	10	crab	crab	NOUN
easat-3604	201	11	-	-	PUNCT
easat-3604	201	12	shaped	shape	VERB
easat-3604	201	13	beam	beam	NOUN
easat-3604	201	14	demonstrate	demonstrate	NOUN
easat-3604	201	15	limited	limited	ADJ
easat-3604	201	16	variation	variation	NOUN
easat-3604	201	17	as	as	SCONJ
easat-3604	201	18	the	the	DET
easat-3604	201	19	fill	fill	NOUN
easat-3604	201	20	factor	factor	NOUN
easat-3604	201	21	approaches	approach	VERB
easat-3604	201	22	nearly	nearly	ADV
easat-3604	201	23	1	1	NUM
easat-3604	201	24	,	,	PUNCT
easat-3604	201	25	specifically	specifically	ADV
easat-3604	201	26	for	for	ADP
easat-3604	201	27	dimensions	dimension	NOUN
easat-3604	201	28	where	where	SCONJ
easat-3604	201	29	d	d	NOUN
easat-3604	201	30	<	<	X
easat-3604	201	31	8	8	NUM
easat-3604	201	32	μm	μm	NUM
easat-3604	201	33	.	.	PUNCT
easat-3604	202	1	3.2.2	3.2.2	NUM
easat-3604	202	2	.	.	PUNCT
easat-3604	202	3	folded	fold	VERB
easat-3604	202	4	perforated	perforate	VERB
easat-3604	202	5	micro	micro	NOUN
easat-3604	202	6	-	-	NOUN
easat-3604	202	7	beam	beam	VERB
easat-3604	202	8	the	the	DET
easat-3604	202	9	configuration	configuration	NOUN
easat-3604	202	10	of	of	ADP
easat-3604	202	11	the	the	DET
easat-3604	202	12	micro	micro	ADJ
easat-3604	202	13	folded	fold	VERB
easat-3604	202	14	beams	beam	NOUN
easat-3604	202	15	consists	consist	VERB
easat-3604	202	16	of	of	ADP
easat-3604	202	17	two	two	NUM
easat-3604	202	18	or	or	CCONJ
easat-3604	202	19	three	three	NUM
easat-3604	202	20	or	or	CCONJ
easat-3604	202	21	more	more	ADJ
easat-3604	202	22	single	single	ADJ
easat-3604	202	23	beams	beam	NOUN
easat-3604	202	24	with	with	ADP
easat-3604	202	25	b×h	b×h	PROPN
easat-3604	202	26	cross	cross	NOUN
easat-3604	202	27	-	-	NOUN
easat-3604	202	28	section	section	NOUN
easat-3604	202	29	(	(	PUNCT
easat-3604	202	30	figure	figure	NOUN
easat-3604	202	31	2b	2b	NOUN
easat-3604	202	32	)	)	PUNCT
easat-3604	202	33	.	.	PUNCT
easat-3604	203	1	these	these	DET
easat-3604	203	2	single	single	ADJ
easat-3604	203	3	beams	beam	NOUN
easat-3604	203	4	are	be	AUX
easat-3604	203	5	connected	connect	VERB
easat-3604	203	6	thanks	thank	NOUN
easat-3604	203	7	to	to	ADP
easat-3604	203	8	the	the	DET
easat-3604	203	9	short	short	ADJ
easat-3604	203	10	bar	bar	NOUN
easat-3604	203	11	with	with	ADP
easat-3604	203	12	bʹ×h	bʹ×h	PROPN
easat-3604	203	13	(	(	PUNCT
easat-3604	203	14	bʹ>b	bʹ>b	NOUN
easat-3604	203	15	)	)	PUNCT
easat-3604	203	16	crosssection	crosssection	NOUN
easat-3604	203	17	to	to	PART
easat-3604	203	18	restrict	restrict	VERB
easat-3604	203	19	the	the	DET
easat-3604	203	20	unexpected	unexpected	ADJ
easat-3604	203	21	mode	mode	NOUN
easat-3604	203	22	of	of	ADP
easat-3604	203	23	the	the	DET
easat-3604	203	24	whole	whole	ADJ
easat-3604	203	25	beam	beam	NOUN
easat-3604	203	26	.	.	PUNCT
easat-3604	204	1	the	the	DET
easat-3604	204	2	geometrical	geometrical	ADJ
easat-3604	204	3	parameters	parameter	NOUN
easat-3604	204	4	of	of	ADP
easat-3604	204	5	this	this	DET
easat-3604	204	6	beam	beam	NOUN
easat-3604	204	7	are	be	AUX
easat-3604	204	8	300	300	NUM
easat-3604	204	9	μm	μm	NUM
easat-3604	204	10	length	length	NOUN
easat-3604	204	11	,	,	PUNCT
easat-3604	204	12	16×30	16×30	NUM
easat-3604	204	13	μm	μm	NUM
easat-3604	204	14	cross	cross	NOUN
easat-3604	204	15	-	-	NOUN
easat-3604	204	16	section	section	NOUN
easat-3604	204	17	for	for	ADP
easat-3604	204	18	the	the	DET
easat-3604	204	19	main	main	ADJ
easat-3604	204	20	beam	beam	NOUN
easat-3604	204	21	,	,	PUNCT
easat-3604	204	22	and	and	CCONJ
easat-3604	204	23	40	40	NUM
easat-3604	204	24	μm	μm	NUM
easat-3604	204	25	,	,	PUNCT
easat-3604	204	26	35×30	35×30	NUM
easat-3604	204	27	μm	μm	NOUN
easat-3604	204	28	respectively	respectively	ADV
easat-3604	204	29	for	for	ADP
easat-3604	204	30	the	the	DET
easat-3604	204	31	connecting	connect	VERB
easat-3604	204	32	bar	bar	NOUN
easat-3604	204	33	.	.	PUNCT
easat-3604	205	1	0	0	NUM
easat-3604	205	2	200	200	NUM
easat-3604	205	3	400	400	NUM
easat-3604	205	4	600	600	NUM
easat-3604	205	5	800	800	NUM
easat-3604	205	6	1000	1000	NUM
easat-3604	205	7	1200	1200	NUM
easat-3604	205	8	1400	1400	NUM
easat-3604	205	9	0	0	NUM
easat-3604	205	10	0.15	0.15	NUM
easat-3604	205	11	0.3	0.3	NUM
easat-3604	205	12	0.45	0.45	NUM
easat-3604	205	13	0.6	0.6	NUM
easat-3604	205	14	0.75	0.75	NUM
easat-3604	205	15	0.9	0.9	NUM
easat-3604	205	16	eq	eq	ADP
easat-3604	205	17	u	u	PROPN
easat-3604	205	18	iv	iv	ADP
easat-3604	205	19	al	al	PROPN
easat-3604	205	20	en	en	PROPN
easat-3604	205	21	t	t	PROPN
easat-3604	205	22	st	st	PROPN
easat-3604	206	1	if	if	SCONJ
easat-3604	206	2	fn	fn	NOUN
easat-3604	206	3	es	es	VERB
easat-3604	206	4	s	s	X
easat-3604	207	1	[	[	X
easat-3604	207	2	n	n	X
easat-3604	207	3	/m	/m	PUNCT
easat-3604	207	4	]	]	PUNCT
easat-3604	207	5	fill	fill	NOUN
easat-3604	207	6	factor	factor	NOUN
easat-3604	207	7	α	α	PROPN
easat-3604	207	8	ky_circle	ky_circle	PROPN
easat-3604	207	9	hole	hole	PROPN
easat-3604	207	10	ky_square	ky_square	PROPN
easat-3604	207	11	hole	hole	NOUN
easat-3604	207	12	kx_circle	kx_circle	PROPN
easat-3604	207	13	hole	hole	NOUN
easat-3604	207	14	kx_square	kx_square	VERB
easat-3604	207	15	hole	hole	NOUN
easat-3604	207	16	0	0	NUM
easat-3604	208	1	200	200	NUM
easat-3604	208	2	400	400	NUM
easat-3604	208	3	600	600	NUM
easat-3604	208	4	800	800	NUM
easat-3604	208	5	1000	1000	NUM
easat-3604	208	6	1200	1200	NUM
easat-3604	208	7	1400	1400	NUM
easat-3604	208	8	0	0	NUM
easat-3604	208	9	0.15	0.15	NUM
easat-3604	208	10	0.3	0.3	NUM
easat-3604	208	11	0.45	0.45	NUM
easat-3604	208	12	0.6	0.6	NUM
easat-3604	208	13	0.75	0.75	NUM
easat-3604	208	14	0.9	0.9	NUM
easat-3604	208	15	fr	fr	NOUN
easat-3604	208	16	eq	eq	ADP
easat-3604	208	17	u	u	PROPN
easat-3604	208	18	en	en	PROPN
easat-3604	208	19	cy	cy	PROPN
easat-3604	208	20	[	[	PUNCT
easat-3604	208	21	kh	kh	PROPN
easat-3604	208	22	z	z	PROPN
easat-3604	208	23	]	]	PUNCT
easat-3604	208	24	fill	fill	NOUN
easat-3604	208	25	factor	factor	NOUN
easat-3604	208	26	α	α	PRON
easat-3604	208	27	1st	1st	ADJ
easat-3604	208	28	frequency	frequency	NOUN
easat-3604	208	29	,	,	PUNCT
easat-3604	208	30	square	square	ADJ
easat-3604	208	31	hole	hole	NOUN
easat-3604	208	32	1st	1st	PROPN
easat-3604	208	33	frequency	frequency	NOUN
easat-3604	208	34	,	,	PUNCT
easat-3604	208	35	circle	circle	NOUN
easat-3604	208	36	hole	hole	NOUN
easat-3604	208	37	1st	1st	PROPN
easat-3604	208	38	frequency	frequency	NOUN
easat-3604	208	39	,	,	PUNCT
easat-3604	208	40	fem	fem	NOUN
easat-3604	208	41	analysis	analysis	NOUN
easat-3604	208	42	7413	7413	NUM
easat-3604	208	43	edelweiss	edelweiss	PROPN
easat-3604	208	44	applied	apply	VERB
easat-3604	208	45	science	science	NOUN
easat-3604	208	46	and	and	CCONJ
easat-3604	208	47	technology	technology	NOUN
easat-3604	208	48	issn	issn	PROPN
easat-3604	208	49	:	:	PUNCT
easat-3604	208	50	2576	2576	NUM
easat-3604	208	51	-	-	SYM
easat-3604	208	52	8484	8484	NUM
easat-3604	208	53	vol	vol	NOUN
easat-3604	208	54	.	.	PROPN
easat-3604	209	1	8	8	NUM
easat-3604	209	2	,	,	PUNCT
easat-3604	209	3	no	no	INTJ
easat-3604	209	4	.	.	NOUN
easat-3604	209	5	6	6	NUM
easat-3604	209	6	:	:	SYM
easat-3604	209	7	7404	7404	NUM
easat-3604	209	8	-	-	SYM
easat-3604	209	9	7418	7418	NUM
easat-3604	209	10	,	,	PUNCT
easat-3604	209	11	2024	2024	NUM
easat-3604	209	12	doi	doi	NOUN
easat-3604	209	13	:	:	PUNCT
easat-3604	209	14	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	209	15	©	©	PROPN
easat-3604	209	16	2024	2024	NUM
easat-3604	209	17	by	by	ADP
easat-3604	209	18	the	the	DET
easat-3604	209	19	author	author	NOUN
easat-3604	209	20	;	;	PUNCT
easat-3604	209	21	licensee	licensee	PROPN
easat-3604	209	22	learning	learning	NOUN
easat-3604	209	23	gate	gate	VERB
easat-3604	209	24	the	the	DET
easat-3604	209	25	relation	relation	NOUN
easat-3604	209	26	between	between	ADP
easat-3604	209	27	the	the	DET
easat-3604	209	28	equivalent	equivalent	ADJ
easat-3604	209	29	stiffness	stiffness	NOUN
easat-3604	209	30	of	of	ADP
easat-3604	209	31	the	the	DET
easat-3604	209	32	folded	fold	VERB
easat-3604	209	33	perforated	perforate	VERB
easat-3604	209	34	beam	beam	NOUN
easat-3604	209	35	and	and	CCONJ
easat-3604	209	36	the	the	DET
easat-3604	209	37	hole	hole	NOUN
easat-3604	209	38	size	size	NOUN
easat-3604	209	39	(	(	PUNCT
easat-3604	209	40	via	via	ADP
easat-3604	209	41	the	the	DET
easat-3604	209	42	fill	fill	NOUN
easat-3604	209	43	factor	factor	NOUN
easat-3604	209	44	α	α	NOUN
easat-3604	209	45	)	)	PUNCT
easat-3604	209	46	is	be	AUX
easat-3604	209	47	nearly	nearly	ADV
easat-3604	209	48	linear	linear	ADJ
easat-3604	209	49	with	with	ADP
easat-3604	209	50	r	r	NOUN
easat-3604	209	51	-	-	PUNCT
easat-3604	209	52	square	square	ADJ
easat-3604	209	53	factors	factor	NOUN
easat-3604	209	54	0.9626	0.9626	NUM
easat-3604	209	55	and	and	CCONJ
easat-3604	209	56	0.9712	0.9712	NUM
easat-3604	209	57	for	for	ADP
easat-3604	209	58	the	the	DET
easat-3604	209	59	circle	circle	NOUN
easat-3604	209	60	and	and	CCONJ
easat-3604	209	61	square	square	ADJ
easat-3604	209	62	shape	shape	NOUN
easat-3604	209	63	of	of	ADP
easat-3604	209	64	holes	hole	NOUN
easat-3604	209	65	(	(	PUNCT
easat-3604	209	66	figure	figure	NOUN
easat-3604	209	67	7	7	NUM
easat-3604	209	68	)	)	PUNCT
easat-3604	209	69	.	.	PUNCT
easat-3604	210	1	the	the	DET
easat-3604	210	2	difference	difference	NOUN
easat-3604	210	3	in	in	ADP
easat-3604	210	4	value	value	NOUN
easat-3604	210	5	of	of	ADP
easat-3604	210	6	these	these	DET
easat-3604	210	7	two	two	NUM
easat-3604	210	8	results	result	NOUN
easat-3604	210	9	corresponding	correspond	VERB
easat-3604	210	10	to	to	ADP
easat-3604	210	11	two	two	NUM
easat-3604	210	12	types	type	NOUN
easat-3604	210	13	of	of	ADP
easat-3604	210	14	hole	hole	NOUN
easat-3604	210	15	increases	increase	VERB
easat-3604	210	16	to	to	ADP
easat-3604	210	17	raising	raise	VERB
easat-3604	210	18	of	of	ADP
easat-3604	210	19	the	the	DET
easat-3604	210	20	hole	hole	NOUN
easat-3604	210	21	size	size	NOUN
easat-3604	210	22	.	.	PUNCT
easat-3604	211	1	the	the	DET
easat-3604	211	2	maximum	maximum	ADJ
easat-3604	211	3	deviation	deviation	NOUN
easat-3604	211	4	is	be	AUX
easat-3604	211	5	up	up	ADV
easat-3604	211	6	to	to	PART
easat-3604	211	7	64	64	NUM
easat-3604	211	8	%	%	NOUN
easat-3604	211	9	at	at	ADP
easat-3604	211	10	α	α	NOUN
easat-3604	211	11	=	=	SYM
easat-3604	211	12	0.0625	0.0625	NUM
easat-3604	211	13	(	(	PUNCT
easat-3604	211	14	corresponding	correspond	VERB
easat-3604	211	15	to	to	ADP
easat-3604	211	16	the	the	DET
easat-3604	211	17	size	size	NOUN
easat-3604	211	18	of	of	ADP
easat-3604	211	19	hole	hole	NOUN
easat-3604	211	20	d	d	NOUN
easat-3604	212	1	=	=	PUNCT
easat-3604	212	2	7.5	7.5	NUM
easat-3604	212	3	μm	μm	NUM
easat-3604	212	4	)	)	PUNCT
easat-3604	212	5	.	.	PUNCT
easat-3604	213	1	figure	figure	VERB
easat-3604	213	2	7	7	NUM
easat-3604	213	3	.	.	PUNCT
easat-3604	213	4	equivalent	equivalent	ADJ
easat-3604	213	5	stiffness	stiffness	NOUN
easat-3604	213	6	versus	versus	ADP
easat-3604	213	7	fill	fill	NOUN
easat-3604	213	8	factor	factor	NOUN
easat-3604	213	9	of	of	ADP
easat-3604	213	10	the	the	DET
easat-3604	213	11	folded	fold	VERB
easat-3604	213	12	perforated	perforated	ADJ
easat-3604	213	13	beam	beam	NOUN
easat-3604	213	14	.	.	PUNCT
easat-3604	214	1	figure	figure	NOUN
easat-3604	214	2	8	8	NUM
easat-3604	214	3	.	.	PUNCT
easat-3604	215	1	the	the	DET
easat-3604	215	2	first	first	ADJ
easat-3604	215	3	two	two	NUM
easat-3604	215	4	frequencies	frequency	NOUN
easat-3604	215	5	of	of	ADP
easat-3604	215	6	the	the	DET
easat-3604	215	7	folded	fold	VERB
easat-3604	215	8	perforated	perforate	VERB
easat-3604	215	9	beam	beam	NOUN
easat-3604	215	10	.	.	PUNCT
easat-3604	216	1	figure	figure	NOUN
easat-3604	216	2	8	8	NUM
easat-3604	216	3	presents	present	VERB
easat-3604	216	4	the	the	DET
easat-3604	216	5	first	first	ADJ
easat-3604	216	6	two	two	NUM
easat-3604	216	7	frequencies	frequency	NOUN
easat-3604	216	8	of	of	ADP
easat-3604	216	9	the	the	DET
easat-3604	216	10	two	two	NUM
easat-3604	216	11	principal	principal	ADJ
easat-3604	216	12	modes	mode	NOUN
easat-3604	216	13	in	in	ADP
easat-3604	216	14	modal	modal	ADJ
easat-3604	216	15	analysis	analysis	NOUN
easat-3604	216	16	for	for	ADP
easat-3604	216	17	the	the	DET
easat-3604	216	18	considered	consider	VERB
easat-3604	216	19	folded	folded	ADJ
easat-3604	216	20	perforated	perforated	ADJ
easat-3604	216	21	beam	beam	NOUN
easat-3604	216	22	.	.	PUNCT
easat-3604	217	1	the	the	DET
easat-3604	217	2	received	receive	VERB
easat-3604	217	3	results	result	NOUN
easat-3604	217	4	show	show	VERB
easat-3604	217	5	that	that	SCONJ
easat-3604	217	6	the	the	DET
easat-3604	217	7	frequency	frequency	NOUN
easat-3604	217	8	deviation	deviation	NOUN
easat-3604	217	9	between	between	ADP
easat-3604	217	10	these	these	DET
easat-3604	217	11	two	two	NUM
easat-3604	217	12	major	major	ADJ
easat-3604	217	13	frequencies	frequency	NOUN
easat-3604	217	14	is	be	AUX
easat-3604	217	15	130	130	NUM
easat-3604	217	16	up	up	ADP
easat-3604	217	17	to	to	ADP
easat-3604	217	18	310	310	NUM
easat-3604	217	19	khz	khz	NOUN
easat-3604	217	20	and	and	CCONJ
easat-3604	217	21	guarantees	guarantee	VERB
easat-3604	217	22	to	to	PART
easat-3604	217	23	restrict	restrict	VERB
easat-3604	217	24	the	the	DET
easat-3604	217	25	unexpected	unexpected	ADJ
easat-3604	217	26	modes	mode	NOUN
easat-3604	217	27	in	in	ADP
easat-3604	217	28	operating	operate	VERB
easat-3604	217	29	the	the	DET
easat-3604	217	30	mems	mem	NOUN
easat-3604	217	31	devices	device	NOUN
easat-3604	217	32	in	in	ADP
easat-3604	217	33	which	which	PRON
easat-3604	217	34	this	this	DET
easat-3604	217	35	folded	fold	VERB
easat-3604	217	36	beam	beam	NOUN
easat-3604	217	37	is	be	AUX
easat-3604	217	38	used	use	VERB
easat-3604	217	39	.	.	PUNCT
easat-3604	218	1	the	the	DET
easat-3604	218	2	first	first	ADJ
easat-3604	218	3	one	one	NUM
easat-3604	218	4	of	of	ADP
easat-3604	218	5	them	they	PRON
easat-3604	218	6	in	in	ADP
easat-3604	218	7	both	both	DET
easat-3604	218	8	types	type	NOUN
easat-3604	218	9	of	of	ADP
easat-3604	218	10	holes	hole	NOUN
easat-3604	218	11	varies	vary	VERB
easat-3604	218	12	more	more	ADV
easat-3604	218	13	lightly	lightly	ADV
easat-3604	218	14	than	than	ADP
easat-3604	218	15	the	the	DET
easat-3604	218	16	second	second	ADJ
easat-3604	218	17	one	one	NUM
easat-3604	218	18	in	in	ADP
easat-3604	218	19	a	a	DET
easat-3604	218	20	range	range	NOUN
easat-3604	218	21	from	from	ADP
easat-3604	218	22	61	61	NUM
easat-3604	218	23	to	to	PART
easat-3604	218	24	159	159	NUM
easat-3604	218	25	khz	khz	NOUN
easat-3604	218	26	.	.	PUNCT
easat-3604	219	1	although	although	SCONJ
easat-3604	219	2	the	the	DET
easat-3604	219	3	increase	increase	NOUN
easat-3604	219	4	in	in	ADP
easat-3604	219	5	the	the	DET
easat-3604	219	6	size	size	NOUN
easat-3604	219	7	of	of	ADP
easat-3604	219	8	the	the	DET
easat-3604	219	9	hole	hole	NOUN
easat-3604	219	10	causes	cause	VERB
easat-3604	219	11	the	the	DET
easat-3604	219	12	decrease	decrease	NOUN
easat-3604	219	13	of	of	ADP
easat-3604	219	14	the	the	DET
easat-3604	219	15	both	both	CCONJ
easat-3604	219	16	two	two	NUM
easat-3604	219	17	main	main	ADJ
easat-3604	219	18	frequencies	frequency	NOUN
easat-3604	219	19	,	,	PUNCT
easat-3604	219	20	the	the	DET
easat-3604	219	21	frequency	frequency	NOUN
easat-3604	219	22	deviation	deviation	NOUN
easat-3604	219	23	tends	tend	VERB
easat-3604	219	24	to	to	PART
easat-3604	219	25	increase	increase	VERB
easat-3604	219	26	from	from	ADP
easat-3604	219	27	195	195	NUM
easat-3604	219	28	%	%	NOUN
easat-3604	219	29	up	up	ADP
easat-3604	219	30	to	to	ADP
easat-3604	219	31	213	213	NUM
easat-3604	219	32	%	%	NOUN
easat-3604	219	33	.	.	PUNCT
easat-3604	220	1	as	as	SCONJ
easat-3604	220	2	the	the	DET
easat-3604	220	3	hole	hole	NOUN
easat-3604	220	4	size	size	NOUN
easat-3604	220	5	increases	increase	NOUN
easat-3604	220	6	,	,	PUNCT
easat-3604	220	7	the	the	DET
easat-3604	220	8	frequency	frequency	NOUN
easat-3604	220	9	values	value	NOUN
easat-3604	220	10	of	of	ADP
easat-3604	220	11	the	the	DET
easat-3604	220	12	two	two	NUM
easat-3604	220	13	principal	principal	ADJ
easat-3604	220	14	modes	mode	NOUN
easat-3604	220	15	decrease	decrease	NOUN
easat-3604	220	16	,	,	PUNCT
easat-3604	220	17	in	in	ADP
easat-3604	220	18	which	which	PRON
easat-3604	220	19	the	the	DET
easat-3604	220	20	two	two	NUM
easat-3604	220	21	frequencies	frequency	NOUN
easat-3604	220	22	of	of	ADP
easat-3604	220	23	the	the	DET
easat-3604	220	24	beam	beam	NOUN
easat-3604	220	25	with	with	ADP
easat-3604	220	26	square	square	ADJ
easat-3604	220	27	holes	hole	NOUN
easat-3604	220	28	decrease	decrease	NOUN
easat-3604	220	29	faster	fast	ADV
easat-3604	220	30	than	than	ADP
easat-3604	220	31	those	those	PRON
easat-3604	220	32	of	of	ADP
easat-3604	220	33	circle	circle	NOUN
easat-3604	220	34	holes	hole	NOUN
easat-3604	220	35	.	.	PUNCT
easat-3604	221	1	3.2.3	3.2.3	X
easat-3604	221	2	.	.	X
easat-3604	221	3	v	v	X
easat-3604	221	4	-	-	PUNCT
easat-3604	221	5	shaped	shape	VERB
easat-3604	221	6	perforated	perforate	VERB
easat-3604	221	7	beam	beam	NOUN
easat-3604	221	8	r²	r²	NOUN
easat-3604	221	9	=	=	SYM
easat-3604	221	10	0.9626	0.9626	NUM
easat-3604	221	11	r²	r²	NOUN
easat-3604	221	12	=	=	NOUN
easat-3604	221	13	0.9712	0.9712	NUM
easat-3604	221	14	0	0	NUM
easat-3604	221	15	50	50	NUM
easat-3604	221	16	100	100	NUM
easat-3604	221	17	150	150	NUM
easat-3604	221	18	200	200	NUM
easat-3604	221	19	250	250	NUM
easat-3604	221	20	300	300	NUM
easat-3604	221	21	350	350	NUM
easat-3604	221	22	0	0	NUM
easat-3604	221	23	0.2	0.2	NUM
easat-3604	221	24	0.4	0.4	NUM
easat-3604	221	25	0.6	0.6	NUM
easat-3604	221	26	0.8	0.8	NUM
easat-3604	221	27	1	1	NUM
easat-3604	221	28	eq	eq	ADP
easat-3604	221	29	u	u	PROPN
easat-3604	221	30	ev	ev	PROPN
easat-3604	221	31	al	al	PROPN
easat-3604	221	32	en	en	PROPN
easat-3604	221	33	t	t	PROPN
easat-3604	221	34	st	st	PROPN
easat-3604	222	1	if	if	SCONJ
easat-3604	222	2	fn	fn	NOUN
easat-3604	222	3	es	es	VERB
easat-3604	222	4	s	s	X
easat-3604	223	1	[	[	X
easat-3604	223	2	n	n	X
easat-3604	223	3	/m	/m	PUNCT
easat-3604	223	4	]	]	PUNCT
easat-3604	223	5	fill	fill	NOUN
easat-3604	223	6	factor	factor	NOUN
easat-3604	223	7	α	α	PROPN
easat-3604	223	8	circle	circle	NOUN
easat-3604	223	9	hole	hole	PROPN
easat-3604	223	10	square	square	PROPN
easat-3604	223	11	hole	hole	NOUN
easat-3604	223	12	linear	linear	PROPN
easat-3604	223	13	(	(	PUNCT
easat-3604	223	14	circle	circle	NOUN
easat-3604	223	15	hole	hole	NOUN
easat-3604	223	16	)	)	PUNCT
easat-3604	224	1	linear	linear	PROPN
easat-3604	224	2	(	(	PUNCT
easat-3604	224	3	square	square	ADJ
easat-3604	224	4	hole	hole	NOUN
easat-3604	224	5	)	)	PUNCT
easat-3604	224	6	50	50	NUM
easat-3604	224	7	110	110	NUM
easat-3604	224	8	170	170	NUM
easat-3604	224	9	230	230	NUM
easat-3604	224	10	290	290	NUM
easat-3604	224	11	350	350	NUM
easat-3604	224	12	410	410	NUM
easat-3604	224	13	470	470	NUM
easat-3604	224	14	0	0	NUM
easat-3604	224	15	0.15	0.15	NUM
easat-3604	224	16	0.3	0.3	NUM
easat-3604	224	17	0.45	0.45	NUM
easat-3604	224	18	0.6	0.6	NUM
easat-3604	224	19	0.75	0.75	NUM
easat-3604	224	20	0.9	0.9	NUM
easat-3604	224	21	fr	fr	NOUN
easat-3604	224	22	eq	eq	ADP
easat-3604	224	23	u	u	PROPN
easat-3604	224	24	en	en	PROPN
easat-3604	224	25	cy	cy	PROPN
easat-3604	224	26	[	[	PUNCT
easat-3604	224	27	kh	kh	PROPN
easat-3604	224	28	z	z	PROPN
easat-3604	224	29	]	]	PUNCT
easat-3604	224	30	fill	fill	NOUN
easat-3604	224	31	factor	factor	NOUN
easat-3604	224	32	α	α	PROPN
easat-3604	224	33	1st_freq_square	1st_freq_square	PROPN
easat-3604	224	34	hole	hole	NOUN
easat-3604	224	35	1st	1st	ADJ
easat-3604	224	36	freq_circle	freq_circle	NOUN
easat-3604	224	37	hole	hole	NOUN
easat-3604	224	38	2nd	2nd	PROPN
easat-3604	225	1	freq_square	freq_square	ADJ
easat-3604	225	2	hole	hole	NOUN
easat-3604	225	3	2nd	2nd	ADJ
easat-3604	225	4	freq_circle	freq_circle	NOUN
easat-3604	225	5	hole	hole	NOUN
easat-3604	225	6	7414	7414	NUM
easat-3604	225	7	edelweiss	edelweiss	PROPN
easat-3604	225	8	applied	apply	VERB
easat-3604	225	9	science	science	NOUN
easat-3604	225	10	and	and	CCONJ
easat-3604	225	11	technology	technology	NOUN
easat-3604	225	12	issn	issn	PROPN
easat-3604	225	13	:	:	PUNCT
easat-3604	225	14	2576	2576	NUM
easat-3604	225	15	-	-	SYM
easat-3604	225	16	8484	8484	NUM
easat-3604	225	17	vol	vol	NOUN
easat-3604	225	18	.	.	PROPN
easat-3604	225	19	8	8	NUM
easat-3604	225	20	,	,	PUNCT
easat-3604	225	21	no	no	INTJ
easat-3604	225	22	.	.	NOUN
easat-3604	225	23	6	6	NUM
easat-3604	225	24	:	:	SYM
easat-3604	225	25	7404	7404	NUM
easat-3604	225	26	-	-	SYM
easat-3604	225	27	7418	7418	NUM
easat-3604	225	28	,	,	PUNCT
easat-3604	225	29	2024	2024	NUM
easat-3604	225	30	doi	doi	NOUN
easat-3604	225	31	:	:	PUNCT
easat-3604	225	32	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	225	33	©	©	PROPN
easat-3604	225	34	2024	2024	NUM
easat-3604	225	35	by	by	ADP
easat-3604	225	36	the	the	DET
easat-3604	225	37	author	author	NOUN
easat-3604	225	38	;	;	PUNCT
easat-3604	225	39	licensee	licensee	PROPN
easat-3604	225	40	learning	learning	NOUN
easat-3604	225	41	gate	gate	VERB
easat-3604	225	42	the	the	DET
easat-3604	225	43	configuration	configuration	NOUN
easat-3604	225	44	of	of	ADP
easat-3604	225	45	the	the	DET
easat-3604	225	46	v	v	ADV
easat-3604	225	47	-	-	PUNCT
easat-3604	225	48	shaped	shape	VERB
easat-3604	225	49	beam	beam	NOUN
easat-3604	225	50	is	be	AUX
easat-3604	225	51	nearly	nearly	ADV
easat-3604	225	52	similar	similar	ADJ
easat-3604	225	53	to	to	ADP
easat-3604	225	54	the	the	DET
easat-3604	225	55	folded	fold	VERB
easat-3604	225	56	beam	beam	NOUN
easat-3604	225	57	without	without	ADP
easat-3604	225	58	a	a	DET
easat-3604	225	59	connecting	connect	VERB
easat-3604	225	60	bar	bar	NOUN
easat-3604	225	61	and	and	CCONJ
easat-3604	225	62	two	two	NUM
easat-3604	225	63	bars	bar	NOUN
easat-3604	225	64	forming	form	VERB
easat-3604	225	65	a	a	DET
easat-3604	225	66	small	small	ADJ
easat-3604	225	67	angle	angle	NOUN
easat-3604	225	68	.	.	PUNCT
easat-3604	226	1	the	the	DET
easat-3604	226	2	geometrical	geometrical	ADJ
easat-3604	226	3	parameters	parameter	NOUN
easat-3604	226	4	for	for	ADP
easat-3604	226	5	this	this	DET
easat-3604	226	6	beam	beam	NOUN
easat-3604	226	7	are	be	AUX
easat-3604	226	8	250	250	NUM
easat-3604	226	9	μm	μm	NUM
easat-3604	226	10	length	length	NOUN
easat-3604	226	11	and	and	CCONJ
easat-3604	226	12	16×30	16×30	NUM
easat-3604	226	13	μm	μm	NOUN
easat-3604	226	14	cross	cross	NOUN
easat-3604	226	15	-	-	NOUN
easat-3604	226	16	section	section	NOUN
easat-3604	226	17	.	.	PUNCT
easat-3604	227	1	the	the	DET
easat-3604	227	2	equivalent	equivalent	ADJ
easat-3604	227	3	stiffness	stiffness	NOUN
easat-3604	227	4	and	and	CCONJ
easat-3604	227	5	the	the	DET
easat-3604	227	6	first	first	ADJ
easat-3604	227	7	two	two	NUM
easat-3604	227	8	frequencies	frequency	NOUN
easat-3604	227	9	of	of	ADP
easat-3604	227	10	two	two	NUM
easat-3604	227	11	major	major	ADJ
easat-3604	227	12	modes	mode	NOUN
easat-3604	227	13	of	of	ADP
easat-3604	227	14	the	the	DET
easat-3604	227	15	v	v	ADV
easat-3604	227	16	-	-	PUNCT
easat-3604	227	17	shaped	shape	VERB
easat-3604	227	18	perforated	perforate	VERB
easat-3604	227	19	beam	beam	NOUN
easat-3604	227	20	are	be	AUX
easat-3604	227	21	shown	show	VERB
easat-3604	227	22	in	in	ADP
easat-3604	227	23	figure	figure	NOUN
easat-3604	227	24	9	9	NUM
easat-3604	227	25	and	and	CCONJ
easat-3604	227	26	figure	figure	VERB
easat-3604	227	27	10	10	NUM
easat-3604	227	28	,	,	PUNCT
easat-3604	227	29	respectively	respectively	ADV
easat-3604	227	30	.	.	PUNCT
easat-3604	228	1	the	the	DET
easat-3604	228	2	variability	variability	NOUN
easat-3604	228	3	of	of	ADP
easat-3604	228	4	the	the	DET
easat-3604	228	5	two	two	NUM
easat-3604	228	6	frequencies	frequency	NOUN
easat-3604	228	7	with	with	ADP
easat-3604	228	8	two	two	NUM
easat-3604	228	9	types	type	NOUN
easat-3604	228	10	of	of	ADP
easat-3604	228	11	holes	hole	NOUN
easat-3604	228	12	cut	cut	VERB
easat-3604	228	13	out	out	ADP
easat-3604	228	14	is	be	AUX
easat-3604	228	15	different	different	ADJ
easat-3604	228	16	.	.	PUNCT
easat-3604	229	1	similar	similar	ADJ
easat-3604	229	2	to	to	ADP
easat-3604	229	3	the	the	DET
easat-3604	229	4	previous	previous	ADJ
easat-3604	229	5	beams	beam	NOUN
easat-3604	229	6	,	,	PUNCT
easat-3604	229	7	when	when	SCONJ
easat-3604	229	8	the	the	DET
easat-3604	229	9	holes	hole	NOUN
easat-3604	229	10	are	be	AUX
easat-3604	229	11	cut	cut	VERB
easat-3604	229	12	into	into	ADP
easat-3604	229	13	the	the	DET
easat-3604	229	14	circle	circle	NOUN
easat-3604	229	15	,	,	PUNCT
easat-3604	229	16	the	the	DET
easat-3604	229	17	first	first	ADJ
easat-3604	229	18	frequency	frequency	NOUN
easat-3604	229	19	varies	vary	VERB
easat-3604	229	20	in	in	ADP
easat-3604	229	21	a	a	DET
easat-3604	229	22	small	small	ADJ
easat-3604	229	23	range	range	NOUN
easat-3604	229	24	(	(	PUNCT
easat-3604	229	25	286	286	NUM
easat-3604	229	26	-	-	PUNCT
easat-3604	229	27	386	386	NUM
easat-3604	229	28	khz	khz	NOUN
easat-3604	229	29	)	)	PUNCT
easat-3604	229	30	corresponding	correspond	VERB
easat-3604	229	31	to	to	ADP
easat-3604	229	32	the	the	DET
easat-3604	229	33	fill	fill	NOUN
easat-3604	229	34	factor	factor	NOUN
easat-3604	229	35	α	α	NOUN
easat-3604	229	36	from	from	ADP
easat-3604	229	37	0.1	0.1	NUM
easat-3604	229	38	to	to	ADP
easat-3604	229	39	0.875	0.875	NUM
easat-3604	229	40	(	(	PUNCT
easat-3604	229	41	the	the	DET
easat-3604	229	42	diameter	diameter	NOUN
easat-3604	229	43	hole	hole	NOUN
easat-3604	229	44	from	from	ADP
easat-3604	229	45	2	2	NUM
easat-3604	229	46	to	to	ADP
easat-3604	229	47	14.5	14.5	NUM
easat-3604	229	48	μm	μm	NUM
easat-3604	229	49	)	)	PUNCT
easat-3604	229	50	.	.	PUNCT
easat-3604	230	1	the	the	DET
easat-3604	230	2	difference	difference	NOUN
easat-3604	230	3	in	in	ADP
easat-3604	230	4	the	the	DET
easat-3604	230	5	second	second	ADJ
easat-3604	230	6	frequency	frequency	NOUN
easat-3604	230	7	is	be	AUX
easat-3604	230	8	stronger	strong	ADJ
easat-3604	230	9	than	than	ADP
easat-3604	230	10	in	in	ADP
easat-3604	230	11	both	both	DET
easat-3604	230	12	types	type	NOUN
easat-3604	230	13	of	of	ADP
easat-3604	230	14	holes	hole	NOUN
easat-3604	230	15	.	.	PUNCT
easat-3604	231	1	the	the	DET
easat-3604	231	2	frequency	frequency	NOUN
easat-3604	231	3	deviation	deviation	NOUN
easat-3604	231	4	with	with	ADP
easat-3604	231	5	minimum	minimum	ADJ
easat-3604	231	6	and	and	CCONJ
easat-3604	231	7	maximum	maximum	ADJ
easat-3604	231	8	hole	hole	NOUN
easat-3604	231	9	size	size	NOUN
easat-3604	231	10	is	be	AUX
easat-3604	231	11	946	946	NUM
easat-3604	231	12	khz	khz	NOUN
easat-3604	231	13	(	(	PUNCT
easat-3604	231	14	57	57	NUM
easat-3604	231	15	%	%	NOUN
easat-3604	231	16	)	)	PUNCT
easat-3604	231	17	and	and	CCONJ
easat-3604	231	18	635	635	NUM
easat-3604	231	19	khz	khz	NOUN
easat-3604	231	20	(	(	PUNCT
easat-3604	231	21	38	38	NUM
easat-3604	231	22	%	%	NOUN
easat-3604	231	23	)	)	PUNCT
easat-3604	231	24	in	in	ADP
easat-3604	231	25	square	square	ADJ
easat-3604	231	26	holes	hole	NOUN
easat-3604	231	27	and	and	CCONJ
easat-3604	231	28	circle	circle	VERB
easat-3604	231	29	holes	hole	NOUN
easat-3604	231	30	respectively	respectively	ADV
easat-3604	231	31	.	.	PUNCT
easat-3604	232	1	similarly	similarly	ADV
easat-3604	232	2	,	,	PUNCT
easat-3604	232	3	the	the	DET
easat-3604	232	4	equivalent	equivalent	NOUN
easat-3604	232	5	of	of	ADP
easat-3604	232	6	the	the	DET
easat-3604	232	7	v	v	ADV
easat-3604	232	8	-	-	PUNCT
easat-3604	232	9	shaped	shape	VERB
easat-3604	232	10	beam	beam	NOUN
easat-3604	232	11	also	also	ADV
easat-3604	232	12	variates	variate	VERB
easat-3604	232	13	more	more	ADV
easat-3604	232	14	smoothly	smoothly	ADV
easat-3604	232	15	to	to	ADP
easat-3604	232	16	the	the	DET
easat-3604	232	17	fill	fill	NOUN
easat-3604	232	18	factor	factor	NOUN
easat-3604	232	19	in	in	ADP
easat-3604	232	20	the	the	DET
easat-3604	232	21	case	case	NOUN
easat-3604	232	22	of	of	ADP
easat-3604	232	23	the	the	DET
easat-3604	232	24	circle	circle	NOUN
easat-3604	232	25	-	-	PUNCT
easat-3604	232	26	perforated	perforate	VERB
easat-3604	232	27	holes	hole	NOUN
easat-3604	232	28	.	.	PUNCT
easat-3604	233	1	the	the	DET
easat-3604	233	2	findings	finding	NOUN
easat-3604	233	3	indicate	indicate	VERB
easat-3604	233	4	that	that	SCONJ
easat-3604	233	5	the	the	DET
easat-3604	233	6	dynamic	dynamic	ADJ
easat-3604	233	7	characteristics	characteristic	NOUN
easat-3604	233	8	of	of	ADP
easat-3604	233	9	beams	beam	NOUN
easat-3604	233	10	containing	contain	VERB
easat-3604	233	11	circular	circular	ADJ
easat-3604	233	12	holes	hole	NOUN
easat-3604	233	13	exhibit	exhibit	VERB
easat-3604	233	14	a	a	DET
easat-3604	233	15	smoother	smooth	ADJ
easat-3604	233	16	variation	variation	NOUN
easat-3604	233	17	compared	compare	VERB
easat-3604	233	18	to	to	ADP
easat-3604	233	19	those	those	PRON
easat-3604	233	20	featuring	feature	VERB
easat-3604	233	21	square	square	ADJ
easat-3604	233	22	holes	hole	NOUN
easat-3604	233	23	.	.	PUNCT
easat-3604	234	1	this	this	PRON
easat-3604	234	2	can	can	AUX
easat-3604	234	3	be	be	AUX
easat-3604	234	4	explained	explain	VERB
easat-3604	234	5	that	that	SCONJ
easat-3604	234	6	the	the	DET
easat-3604	234	7	cross	cross	ADJ
easat-3604	234	8	-	-	ADJ
easat-3604	234	9	section	section	ADJ
easat-3604	234	10	area	area	NOUN
easat-3604	234	11	of	of	ADP
easat-3604	234	12	the	the	DET
easat-3604	234	13	beam	beam	NOUN
easat-3604	234	14	with	with	ADP
easat-3604	234	15	circle	circle	NOUN
easat-3604	234	16	holes	hole	NOUN
easat-3604	234	17	changes	change	NOUN
easat-3604	234	18	more	more	ADV
easat-3604	234	19	slowly	slowly	ADV
easat-3604	234	20	than	than	ADP
easat-3604	234	21	that	that	PRON
easat-3604	234	22	with	with	ADP
easat-3604	234	23	square	square	ADJ
easat-3604	234	24	holes	hole	NOUN
easat-3604	234	25	.	.	PUNCT
easat-3604	235	1	figure	figure	NOUN
easat-3604	235	2	9	9	NUM
easat-3604	235	3	.	.	PUNCT
easat-3604	235	4	equivalent	equivalent	ADJ
easat-3604	235	5	stiffness	stiffness	NOUN
easat-3604	235	6	versus	versus	ADP
easat-3604	235	7	fill	fill	NOUN
easat-3604	235	8	factor	factor	NOUN
easat-3604	235	9	of	of	ADP
easat-3604	235	10	v	v	ADV
easat-3604	235	11	-	-	PUNCT
easat-3604	235	12	shaped	shape	VERB
easat-3604	235	13	perforated	perforate	VERB
easat-3604	235	14	beam	beam	NOUN
easat-3604	235	15	.	.	PUNCT
easat-3604	236	1	figure	figure	NOUN
easat-3604	236	2	10	10	NUM
easat-3604	236	3	.	.	PUNCT
easat-3604	237	1	the	the	DET
easat-3604	237	2	first	first	ADJ
easat-3604	237	3	two	two	NUM
easat-3604	237	4	frequencies	frequency	NOUN
easat-3604	237	5	of	of	ADP
easat-3604	237	6	the	the	DET
easat-3604	237	7	v	v	ADV
easat-3604	237	8	-	-	PUNCT
easat-3604	237	9	shaped	shape	VERB
easat-3604	237	10	perforated	perforated	ADJ
easat-3604	237	11	beam	beam	NOUN
easat-3604	237	12	.	.	PUNCT
easat-3604	238	1	3.3	3.3	NUM
easat-3604	238	2	.	.	PUNCT
easat-3604	238	3	air	air	NOUN
easat-3604	238	4	damping	damp	VERB
easat-3604	238	5	with	with	ADP
easat-3604	238	6	perforated	perforated	ADJ
easat-3604	238	7	beams	beam	NOUN
easat-3604	238	8	0	0	NUM
easat-3604	238	9	200	200	NUM
easat-3604	238	10	400	400	NUM
easat-3604	238	11	600	600	NUM
easat-3604	238	12	800	800	NUM
easat-3604	238	13	1000	1000	NUM
easat-3604	238	14	1200	1200	NUM
easat-3604	238	15	0	0	NUM
easat-3604	238	16	0.15	0.15	NUM
easat-3604	238	17	0.3	0.3	NUM
easat-3604	238	18	0.45	0.45	NUM
easat-3604	238	19	0.6	0.6	NUM
easat-3604	238	20	0.75	0.75	NUM
easat-3604	238	21	0.9	0.9	NUM
easat-3604	238	22	eq	eq	ADP
easat-3604	238	23	u	u	PROPN
easat-3604	238	24	iv	iv	ADP
easat-3604	238	25	al	al	PROPN
easat-3604	238	26	en	en	PROPN
easat-3604	238	27	t	t	PROPN
easat-3604	238	28	st	st	PROPN
easat-3604	239	1	if	if	SCONJ
easat-3604	239	2	fn	fn	NOUN
easat-3604	239	3	es	es	VERB
easat-3604	239	4	s	s	X
easat-3604	240	1	[	[	X
easat-3604	240	2	n	n	X
easat-3604	240	3	/m	/m	PUNCT
easat-3604	240	4	]	]	PUNCT
easat-3604	240	5	fill	fill	NOUN
easat-3604	240	6	factor	factor	NOUN
easat-3604	240	7	α	α	PROPN
easat-3604	240	8	square	square	ADJ
easat-3604	240	9	hole	hole	NOUN
easat-3604	240	10	cirle	cirle	NOUN
easat-3604	240	11	hole	hole	NOUN
easat-3604	240	12	0	0	NUM
easat-3604	240	13	200	200	NUM
easat-3604	240	14	400	400	NUM
easat-3604	240	15	600	600	NUM
easat-3604	240	16	800	800	NUM
easat-3604	240	17	1000	1000	NUM
easat-3604	240	18	1200	1200	NUM
easat-3604	240	19	1400	1400	NUM
easat-3604	240	20	1600	1600	NUM
easat-3604	240	21	1800	1800	NUM
easat-3604	240	22	0	0	NUM
easat-3604	240	23	0.15	0.15	NUM
easat-3604	240	24	0.3	0.3	NUM
easat-3604	240	25	0.45	0.45	NUM
easat-3604	240	26	0.6	0.6	NUM
easat-3604	240	27	0.75	0.75	NUM
easat-3604	240	28	0.9	0.9	NUM
easat-3604	240	29	fr	fr	NOUN
easat-3604	240	30	eq	eq	ADP
easat-3604	240	31	u	u	PROPN
easat-3604	240	32	en	en	PROPN
easat-3604	240	33	cy	cy	PROPN
easat-3604	240	34	[	[	PUNCT
easat-3604	240	35	kh	kh	PROPN
easat-3604	240	36	z	z	PROPN
easat-3604	240	37	]	]	PUNCT
easat-3604	240	38	fill	fill	NOUN
easat-3604	240	39	factor	factor	NOUN
easat-3604	240	40	α	α	PROPN
easat-3604	240	41	1st	1st	NOUN
easat-3604	240	42	fre_square	fre_square	PUNCT
easat-3604	240	43	hole	hole	NOUN
easat-3604	240	44	1st	1st	NOUN
easat-3604	240	45	fre_cirle	fre_cirle	PUNCT
easat-3604	240	46	hole	hole	PROPN
easat-3604	240	47	2nd	2nd	PROPN
easat-3604	240	48	fre_square	fre_square	PROPN
easat-3604	240	49	2nd	2nd	ADJ
easat-3604	240	50	fre_circle	fre_circle	NOUN
easat-3604	240	51	hole	hole	NOUN
easat-3604	240	52	7415	7415	NUM
easat-3604	240	53	edelweiss	edelweiss	PROPN
easat-3604	240	54	applied	apply	VERB
easat-3604	240	55	science	science	NOUN
easat-3604	240	56	and	and	CCONJ
easat-3604	240	57	technology	technology	NOUN
easat-3604	240	58	issn	issn	PROPN
easat-3604	240	59	:	:	PUNCT
easat-3604	240	60	2576	2576	NUM
easat-3604	240	61	-	-	SYM
easat-3604	240	62	8484	8484	NUM
easat-3604	240	63	vol	vol	NOUN
easat-3604	240	64	.	.	PROPN
easat-3604	240	65	8	8	NUM
easat-3604	240	66	,	,	PUNCT
easat-3604	240	67	no	no	INTJ
easat-3604	240	68	.	.	NOUN
easat-3604	240	69	6	6	NUM
easat-3604	240	70	:	:	SYM
easat-3604	240	71	7404	7404	NUM
easat-3604	240	72	-	-	SYM
easat-3604	240	73	7418	7418	NUM
easat-3604	240	74	,	,	PUNCT
easat-3604	240	75	2024	2024	NUM
easat-3604	240	76	doi	doi	NOUN
easat-3604	240	77	:	:	PUNCT
easat-3604	240	78	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	240	79	©	©	PROPN
easat-3604	240	80	2024	2024	NUM
easat-3604	240	81	by	by	ADP
easat-3604	240	82	the	the	DET
easat-3604	240	83	author	author	NOUN
easat-3604	240	84	;	;	PUNCT
easat-3604	240	85	licensee	licensee	PROPN
easat-3604	240	86	learning	learn	VERB
easat-3604	240	87	gate	gate	PROPN
easat-3604	240	88	air	air	NOUN
easat-3604	240	89	damping	damp	VERB
easat-3604	240	90	is	be	AUX
easat-3604	240	91	associated	associate	VERB
easat-3604	240	92	with	with	ADP
easat-3604	240	93	the	the	DET
easat-3604	240	94	surface	surface	NOUN
easat-3604	240	95	area	area	NOUN
easat-3604	240	96	of	of	ADP
easat-3604	240	97	the	the	DET
easat-3604	240	98	moving	move	VERB
easat-3604	240	99	components	component	NOUN
easat-3604	240	100	in	in	ADP
easat-3604	240	101	the	the	DET
easat-3604	240	102	mems	mem	NOUN
easat-3604	240	103	devices	device	NOUN
easat-3604	240	104	.	.	PUNCT
easat-3604	241	1	this	this	DET
easat-3604	241	2	phenomenon	phenomenon	NOUN
easat-3604	241	3	plays	play	VERB
easat-3604	241	4	a	a	DET
easat-3604	241	5	crucial	crucial	ADJ
easat-3604	241	6	role	role	NOUN
easat-3604	241	7	in	in	ADP
easat-3604	241	8	evaluating	evaluate	VERB
easat-3604	241	9	the	the	DET
easat-3604	241	10	dynamic	dynamic	ADJ
easat-3604	241	11	performance	performance	NOUN
easat-3604	241	12	of	of	ADP
easat-3604	241	13	micromechanical	micromechanical	ADJ
easat-3604	241	14	devices	device	NOUN
easat-3604	241	15	and	and	CCONJ
easat-3604	241	16	systems	system	NOUN
easat-3604	241	17	,	,	PUNCT
easat-3604	241	18	particularly	particularly	ADV
easat-3604	241	19	because	because	SCONJ
easat-3604	241	20	of	of	ADP
easat-3604	241	21	the	the	DET
easat-3604	241	22	significant	significant	ADJ
easat-3604	241	23	surface	surface	NOUN
easat-3604	241	24	area	area	NOUN
easat-3604	241	25	-	-	PUNCT
easat-3604	241	26	to	to	ADP
easat-3604	241	27	-	-	PUNCT
easat-3604	241	28	volume	volume	NOUN
easat-3604	241	29	ratio	ratio	NOUN
easat-3604	241	30	of	of	ADP
easat-3604	241	31	their	their	PRON
easat-3604	241	32	moving	move	VERB
easat-3604	241	33	components	component	NOUN
easat-3604	241	34	.	.	PUNCT
easat-3604	242	1	in	in	ADP
easat-3604	242	2	the	the	DET
easat-3604	242	3	vibration	vibration	NOUN
easat-3604	242	4	micromechanical	micromechanical	ADJ
easat-3604	242	5	system	system	NOUN
easat-3604	242	6	,	,	PUNCT
easat-3604	242	7	such	such	ADJ
easat-3604	242	8	as	as	ADP
easat-3604	242	9	in	in	ADP
easat-3604	242	10	a	a	DET
easat-3604	242	11	beam	beam	ADJ
easat-3604	242	12	–	–	PUNCT
easat-3604	242	13	mass	mass	NOUN
easat-3604	242	14	system	system	NOUN
easat-3604	242	15	(	(	PUNCT
easat-3604	242	16	with	with	ADP
easat-3604	242	17	k	k	PROPN
easat-3604	242	18	,	,	PUNCT
easat-3604	242	19	m	m	PROPN
easat-3604	242	20	,	,	PUNCT
easat-3604	242	21	c	c	NOUN
easat-3604	242	22	)	)	PUNCT
easat-3604	242	23	,	,	PUNCT
easat-3604	242	24	the	the	DET
easat-3604	242	25	coefficient	coefficient	NOUN
easat-3604	242	26	of	of	ADP
easat-3604	242	27	damping	damp	VERB
easat-3604	242	28	force	force	NOUN
easat-3604	242	29	is	be	AUX
easat-3604	242	30	an	an	DET
easat-3604	242	31	important	important	ADJ
easat-3604	242	32	dynamic	dynamic	ADJ
easat-3604	242	33	parameter	parameter	NOUN
easat-3604	242	34	.	.	PUNCT
easat-3604	243	1	it	it	PRON
easat-3604	243	2	appears	appear	VERB
easat-3604	243	3	in	in	ADP
easat-3604	243	4	the	the	DET
easat-3604	243	5	expressions	expression	NOUN
easat-3604	243	6	that	that	PRON
easat-3604	243	7	determine	determine	VERB
easat-3604	243	8	the	the	DET
easat-3604	243	9	damping	damp	VERB
easat-3604	243	10	ratio	ratio	NOUN
easat-3604	243	11	ζ	ζ	NOUN
easat-3604	243	12	and	and	CCONJ
easat-3604	243	13	the	the	DET
easat-3604	243	14	quality	quality	NOUN
easat-3604	243	15	factor	factor	NOUN
easat-3604	243	16	q	q	PROPN
easat-3604	243	17	used	use	VERB
easat-3604	243	18	to	to	PART
easat-3604	243	19	characterize	characterize	VERB
easat-3604	243	20	the	the	DET
easat-3604	243	21	mechanical	mechanical	ADJ
easat-3604	243	22	system	system	NOUN
easat-3604	243	23	.	.	PUNCT
easat-3604	244	1	1	1	NUM
easat-3604	244	2	;	;	PUNCT
easat-3604	244	3	22	22	NUM
easat-3604	244	4	c	c	NOUN
easat-3604	244	5	mk	mk	PROPN
easat-3604	245	1	q	q	NOUN
easat-3604	245	2	cmk	cmk	NOUN
easat-3604	245	3			NOUN
easat-3604	245	4			NOUN
easat-3604	246	1	=	=	PUNCT
easat-3604	246	2	=	=	SYM
easat-3604	246	3	=	=	SYM
easat-3604	246	4	(	(	PUNCT
easat-3604	246	5	12	12	NUM
easat-3604	246	6	)	)	PUNCT
easat-3604	246	7	air	air	NOUN
easat-3604	246	8	damping	damp	VERB
easat-3604	246	9	has	have	VERB
easat-3604	246	10	two	two	NUM
easat-3604	246	11	primary	primary	ADJ
easat-3604	246	12	elements	element	NOUN
easat-3604	246	13	:	:	PUNCT
easat-3604	246	14	slide	slide	NOUN
easat-3604	246	15	air	air	NOUN
easat-3604	246	16	damping	damp	VERB
easat-3604	246	17	and	and	CCONJ
easat-3604	246	18	squeeze	squeeze	VERB
easat-3604	246	19	air	air	NOUN
easat-3604	246	20	damping	damp	VERB
easat-3604	246	21	.	.	PUNCT
easat-3604	247	1	squeeze	squeeze	NOUN
easat-3604	247	2	film	film	NOUN
easat-3604	247	3	damping	damp	VERB
easat-3604	247	4	occurs	occur	VERB
easat-3604	247	5	when	when	SCONJ
easat-3604	247	6	two	two	NUM
easat-3604	247	7	parallel	parallel	ADJ
easat-3604	247	8	plates	plate	NOUN
easat-3604	247	9	move	move	VERB
easat-3604	247	10	orthogonally	orthogonally	ADV
easat-3604	247	11	to	to	ADP
easat-3604	247	12	each	each	DET
easat-3604	247	13	other	other	ADJ
easat-3604	247	14	.	.	PUNCT
easat-3604	248	1	the	the	DET
easat-3604	248	2	pressure	pressure	NOUN
easat-3604	248	3	differential	differential	NOUN
easat-3604	248	4	in	in	ADP
easat-3604	248	5	the	the	DET
easat-3604	248	6	fluid	fluid	NOUN
easat-3604	248	7	around	around	ADP
easat-3604	248	8	the	the	DET
easat-3604	248	9	moving	move	VERB
easat-3604	248	10	microdevices	microdevice	NOUN
easat-3604	248	11	produces	produce	VERB
easat-3604	248	12	damping	damp	VERB
easat-3604	248	13	forces	force	NOUN
easat-3604	248	14	.	.	PUNCT
easat-3604	249	1	slide	slide	NOUN
easat-3604	249	2	film	film	NOUN
easat-3604	249	3	damping	damp	VERB
easat-3604	249	4	occurs	occur	VERB
easat-3604	249	5	when	when	SCONJ
easat-3604	249	6	two	two	NUM
easat-3604	249	7	parallel	parallel	ADJ
easat-3604	249	8	plates	plate	NOUN
easat-3604	249	9	move	move	VERB
easat-3604	249	10	tangentially	tangentially	ADV
easat-3604	249	11	in	in	ADP
easat-3604	249	12	relation	relation	NOUN
easat-3604	249	13	to	to	ADP
easat-3604	249	14	one	one	NUM
easat-3604	249	15	another	another	DET
easat-3604	249	16	.	.	PUNCT
easat-3604	250	1	in	in	ADP
easat-3604	250	2	this	this	DET
easat-3604	250	3	configuration	configuration	NOUN
easat-3604	250	4	,	,	PUNCT
easat-3604	250	5	the	the	DET
easat-3604	250	6	motion	motion	NOUN
easat-3604	250	7	of	of	ADP
easat-3604	250	8	the	the	DET
easat-3604	250	9	movable	movable	ADJ
easat-3604	250	10	component	component	NOUN
easat-3604	250	11	is	be	AUX
easat-3604	250	12	limited	limit	VERB
easat-3604	250	13	to	to	ADP
easat-3604	250	14	a	a	DET
easat-3604	250	15	sliding	slide	VERB
easat-3604	250	16	movement	movement	NOUN
easat-3604	250	17	parallel	parallel	ADJ
easat-3604	250	18	to	to	ADP
easat-3604	250	19	the	the	DET
easat-3604	250	20	substrate	substrate	NOUN
easat-3604	250	21	.	.	PUNCT
easat-3604	251	1	consequently	consequently	ADV
easat-3604	251	2	,	,	PUNCT
easat-3604	251	3	the	the	DET
easat-3604	251	4	damping	damp	VERB
easat-3604	251	5	coefficient	coefficient	NOUN
easat-3604	251	6	for	for	ADP
easat-3604	251	7	this	this	DET
easat-3604	251	8	beam	beam	NOUN
easat-3604	251	9	model	model	NOUN
easat-3604	251	10	is	be	AUX
easat-3604	251	11	solely	solely	ADV
easat-3604	251	12	attributed	attribute	VERB
easat-3604	251	13	to	to	ADP
easat-3604	251	14	sliding	slide	VERB
easat-3604	251	15	damping	damp	VERB
easat-3604	251	16	.	.	PUNCT
easat-3604	252	1	two	two	NUM
easat-3604	252	2	principal	principal	ADJ
easat-3604	252	3	damping	damp	VERB
easat-3604	252	4	models	model	NOUN
easat-3604	252	5	often	often	ADV
easat-3604	252	6	used	use	VERB
easat-3604	252	7	in	in	ADP
easat-3604	252	8	slide	slide	NOUN
easat-3604	252	9	damping	damp	VERB
easat-3604	252	10	analysis	analysis	NOUN
easat-3604	252	11	are	be	AUX
easat-3604	252	12	the	the	DET
easat-3604	252	13	couette	couette	NOUN
easat-3604	252	14	-	-	PUNCT
easat-3604	252	15	type	type	NOUN
easat-3604	252	16	model	model	NOUN
easat-3604	252	17	and	and	CCONJ
easat-3604	252	18	the	the	DET
easat-3604	252	19	stokes	stoke	NOUN
easat-3604	252	20	-	-	PUNCT
easat-3604	252	21	type	type	NOUN
easat-3604	252	22	model	model	NOUN
easat-3604	252	23	.	.	PUNCT
easat-3604	253	1	the	the	DET
easat-3604	253	2	couettetype	couettetype	NOUN
easat-3604	253	3	model	model	NOUN
easat-3604	253	4	is	be	AUX
easat-3604	253	5	relevant	relevant	ADJ
easat-3604	253	6	when	when	SCONJ
easat-3604	253	7	the	the	DET
easat-3604	253	8	gap	gap	NOUN
easat-3604	253	9	between	between	ADP
easat-3604	253	10	the	the	DET
easat-3604	253	11	moving	move	VERB
easat-3604	253	12	element	element	NOUN
easat-3604	253	13	and	and	CCONJ
easat-3604	253	14	the	the	DET
easat-3604	253	15	stationary	stationary	ADJ
easat-3604	253	16	substrate	substrate	NOUN
easat-3604	253	17	is	be	AUX
easat-3604	253	18	low	low	ADJ
easat-3604	253	19	;	;	PUNCT
easat-3604	253	20	otherwise	otherwise	ADV
easat-3604	253	21	,	,	PUNCT
easat-3604	253	22	the	the	DET
easat-3604	253	23	stokes	stokes	NOUN
easat-3604	253	24	-	-	PUNCT
easat-3604	253	25	type	type	NOUN
easat-3604	253	26	model	model	NOUN
easat-3604	253	27	is	be	AUX
easat-3604	253	28	more	more	ADV
easat-3604	253	29	appropriate	appropriate	ADJ
easat-3604	253	30	for	for	ADP
easat-3604	253	31	analyzing	analyze	VERB
easat-3604	253	32	slide	slide	NOUN
easat-3604	253	33	film	film	NOUN
easat-3604	253	34	damping	damp	VERB
easat-3604	253	35	.	.	PUNCT
easat-3604	254	1	for	for	ADP
easat-3604	254	2	the	the	DET
easat-3604	254	3	case	case	NOUN
easat-3604	254	4	of	of	ADP
easat-3604	254	5	slide	slide	NOUN
easat-3604	254	6	air	air	NOUN
easat-3604	254	7	damping	damp	VERB
easat-3604	254	8	:	:	PUNCT
easat-3604	254	9	given	give	VERB
easat-3604	254	10	that	that	SCONJ
easat-3604	254	11	the	the	DET
easat-3604	254	12	gap	gap	NOUN
easat-3604	254	13	distance	distance	NOUN
easat-3604	254	14	(	(	PUNCT
easat-3604	254	15	distance	distance	NOUN
easat-3604	254	16	from	from	ADP
easat-3604	254	17	mass	mass	NOUN
easat-3604	254	18	to	to	PART
easat-3604	254	19	substrate	substrate	VERB
easat-3604	254	20	)	)	PUNCT
easat-3604	254	21	,	,	PUNCT
easat-3604	254	22	denoted	denote	VERB
easat-3604	254	23	as	as	ADP
easat-3604	254	24	h	h	NOUN
easat-3604	254	25	,	,	PUNCT
easat-3604	254	26	is	be	AUX
easat-3604	254	27	significantly	significantly	ADV
easat-3604	254	28	smaller	small	ADJ
easat-3604	254	29	than	than	ADP
easat-3604	254	30	δ	δ	PROPN
easat-3604	254	31	–	–	PUNCT
easat-3604	254	32	the	the	DET
easat-3604	254	33	effective	effective	ADJ
easat-3604	254	34	decay	decay	NOUN
easat-3604	254	35	distance	distance	NOUN
easat-3604	254	36	2	2	NUM
easat-3604	254	37			NOUN
easat-3604	254	38	=	=	NUM
easat-3604	254	39	(	(	PUNCT
easat-3604	254	40	the	the	DET
easat-3604	254	41	distance	distance	NOUN
easat-3604	254	42	from	from	ADP
easat-3604	254	43	the	the	DET
easat-3604	254	44	top	top	NOUN
easat-3604	254	45	of	of	ADP
easat-3604	254	46	the	the	DET
easat-3604	254	47	moving	move	VERB
easat-3604	254	48	part	part	NOUN
easat-3604	254	49	to	to	ADP
easat-3604	254	50	the	the	DET
easat-3604	254	51	cover	cover	NOUN
easat-3604	254	52	of	of	ADP
easat-3604	254	53	the	the	DET
easat-3604	254	54	device	device	NOUN
easat-3604	254	55	)	)	PUNCT
easat-3604	254	56	,	,	PUNCT
easat-3604	254	57	and	and	CCONJ
easat-3604	254	58	only	only	ADV
easat-3604	254	59	considering	consider	VERB
easat-3604	254	60	the	the	DET
easat-3604	254	61	damping	damp	VERB
easat-3604	254	62	on	on	ADP
easat-3604	254	63	the	the	DET
easat-3604	254	64	bottom	bottom	NOUN
easat-3604	254	65	of	of	ADP
easat-3604	254	66	the	the	DET
easat-3604	254	67	beam	beam	NOUN
easat-3604	254	68	,	,	PUNCT
easat-3604	254	69	the	the	DET
easat-3604	254	70	damping	damp	VERB
easat-3604	254	71	coefficient	coefficient	NOUN
easat-3604	254	72	takes	take	VERB
easat-3604	254	73	the	the	DET
easat-3604	254	74	form	form	NOUN
easat-3604	254	75	of	of	ADP
easat-3604	254	76	a	a	DET
easat-3604	254	77	couette	couette	NOUN
easat-3604	254	78	-	-	PUNCT
easat-3604	254	79	flow	flow	NOUN
easat-3604	254	80	type	type	NOUN
easat-3604	254	81	and	and	CCONJ
easat-3604	254	82	can	can	AUX
easat-3604	254	83	be	be	AUX
easat-3604	254	84	represented	represent	VERB
easat-3604	254	85	as	as	ADP
easat-3604	254	86	[	[	X
easat-3604	254	87	29	29	NUM
easat-3604	254	88	]	]	PUNCT
easat-3604	254	89	,	,	PUNCT
easat-3604	254	90	[	[	X
easat-3604	254	91	30	30	NUM
easat-3604	254	92	]	]	X
easat-3604	254	93	:	:	PUNCT
easat-3604	254	94	da	da	NOUN
easat-3604	254	95	c	c	NOUN
easat-3604	254	96	h	h	PROPN
easat-3604	254	97	=	=	PROPN
easat-3604	254	98	(	(	PUNCT
easat-3604	254	99	13	13	NUM
easat-3604	254	100	)	)	PUNCT
easat-3604	254	101	where	where	SCONJ
easat-3604	254	102	ad	ad	NOUN
easat-3604	254	103	is	be	AUX
easat-3604	254	104	the	the	DET
easat-3604	254	105	effective	effective	ADJ
easat-3604	254	106	surface	surface	NOUN
easat-3604	254	107	area	area	NOUN
easat-3604	254	108	of	of	ADP
easat-3604	254	109	the	the	DET
easat-3604	254	110	beams	beam	NOUN
easat-3604	254	111	(	(	PUNCT
easat-3604	254	112	this	this	DET
easat-3604	254	113	area	area	NOUN
easat-3604	254	114	is	be	AUX
easat-3604	254	115	the	the	DET
easat-3604	254	116	rest	rest	NOUN
easat-3604	254	117	of	of	ADP
easat-3604	254	118	the	the	DET
easat-3604	254	119	surface	surface	NOUN
easat-3604	254	120	of	of	ADP
easat-3604	254	121	the	the	DET
easat-3604	254	122	beam	beam	NOUN
easat-3604	254	123	after	after	ADP
easat-3604	254	124	perforating	perforate	VERB
easat-3604	254	125	the	the	DET
easat-3604	254	126	holes	hole	NOUN
easat-3604	254	127	)	)	PUNCT
easat-3604	254	128	;	;	PUNCT
easat-3604	255	1	μ	μ	PROPN
easat-3604	255	2	=	=	SYM
easat-3604	255	3	1.7984×10	1.7984×10	NUM
easat-3604	255	4	-	-	SYM
easat-3604	255	5	6	6	NUM
easat-3604	255	6	(	(	PUNCT
easat-3604	255	7	ns	ns	ADJ
easat-3604	255	8	/	/	SYM
easat-3604	255	9	m2	m2	PROPN
easat-3604	255	10	)	)	PUNCT
easat-3604	255	11	is	be	AUX
easat-3604	255	12	the	the	DET
easat-3604	255	13	viscosity	viscosity	NOUN
easat-3604	255	14	of	of	ADP
easat-3604	255	15	air	air	NOUN
easat-3604	255	16	.	.	PUNCT
easat-3604	256	1	taking	take	VERB
easat-3604	256	2	into	into	ADP
easat-3604	256	3	account	account	NOUN
easat-3604	256	4	the	the	DET
easat-3604	256	5	holes	hole	NOUN
easat-3604	256	6	on	on	ADP
easat-3604	256	7	the	the	DET
easat-3604	256	8	face	face	NOUN
easat-3604	256	9	of	of	ADP
easat-3604	256	10	the	the	DET
easat-3604	256	11	beam	beam	NOUN
easat-3604	256	12	,	,	PUNCT
easat-3604	256	13	the	the	DET
easat-3604	256	14	effective	effective	ADJ
easat-3604	256	15	area	area	NOUN
easat-3604	256	16	ad	ad	NOUN
easat-3604	256	17	can	can	AUX
easat-3604	256	18	be	be	AUX
easat-3604	256	19	calculated	calculate	VERB
easat-3604	256	20	by	by	ADP
easat-3604	256	21	:	:	PUNCT
easat-3604	256	22	d	d	X
easat-3604	256	23	t	t	PROPN
easat-3604	256	24	ha	ha	INTJ
easat-3604	256	25	a	a	DET
easat-3604	256	26	a=	a=	ADJ
easat-3604	256	27	−	−	NOUN
easat-3604	256	28	(	(	PUNCT
easat-3604	256	29	14	14	NUM
easat-3604	256	30	)	)	PUNCT
easat-3604	256	31	for	for	ADP
easat-3604	256	32	each	each	DET
easat-3604	256	33	case	case	NOUN
easat-3604	256	34	of	of	ADP
easat-3604	256	35	beams	beam	NOUN
easat-3604	256	36	mentioned	mention	VERB
easat-3604	256	37	above	above	ADV
easat-3604	256	38	,	,	PUNCT
easat-3604	256	39	the	the	DET
easat-3604	256	40	total	total	ADJ
easat-3604	256	41	area	area	NOUN
easat-3604	256	42	at	at	ADP
easat-3604	256	43	and	and	CCONJ
easat-3604	256	44	the	the	DET
easat-3604	256	45	hole	hole	NOUN
easat-3604	256	46	area	area	NOUN
easat-3604	256	47	ah	ah	INTJ
easat-3604	256	48	are	be	AUX
easat-3604	256	49	determined	determine	VERB
easat-3604	256	50	and	and	CCONJ
easat-3604	256	51	shown	show	VERB
easat-3604	256	52	in	in	ADP
easat-3604	256	53	table	table	NOUN
easat-3604	256	54	4	4	NUM
easat-3604	256	55	,	,	PUNCT
easat-3604	256	56	here	here	ADV
easat-3604	256	57	,	,	PUNCT
easat-3604	256	58	31	31	NUM
easat-3604	256	59	,	,	PUNCT
easat-3604	256	60	120	120	NUM
easat-3604	256	61	,	,	PUNCT
easat-3604	256	62	and	and	CCONJ
easat-3604	256	63	28	28	NUM
easat-3604	256	64	are	be	AUX
easat-3604	256	65	the	the	DET
easat-3604	256	66	number	number	NOUN
easat-3604	256	67	of	of	ADP
easat-3604	256	68	the	the	DET
easat-3604	256	69	holes	hole	NOUN
easat-3604	256	70	on	on	ADP
easat-3604	256	71	the	the	DET
easat-3604	256	72	face	face	NOUN
easat-3604	256	73	beam	beam	NOUN
easat-3604	256	74	of	of	ADP
easat-3604	256	75	crab	crab	NOUN
easat-3604	256	76	-	-	PUNCT
easat-3604	256	77	beam	beam	NOUN
easat-3604	256	78	,	,	PUNCT
easat-3604	256	79	folded	fold	VERB
easat-3604	256	80	beam	beam	NOUN
easat-3604	256	81	,	,	PUNCT
easat-3604	256	82	and	and	CCONJ
easat-3604	256	83	v	v	ADV
easat-3604	256	84	-	-	PUNCT
easat-3604	256	85	shaped	shape	VERB
easat-3604	256	86	beam	beam	NOUN
easat-3604	256	87	,	,	PUNCT
easat-3604	256	88	respectively	respectively	ADV
easat-3604	256	89	.	.	PUNCT
easat-3604	256	90	table	table	NOUN
easat-3604	256	91	4	4	NUM
easat-3604	256	92	.	.	PUNCT
easat-3604	257	1	the	the	DET
easat-3604	257	2	surface	surface	NOUN
easat-3604	257	3	area	area	NOUN
easat-3604	257	4	of	of	ADP
easat-3604	257	5	the	the	DET
easat-3604	257	6	mentioned	mention	VERB
easat-3604	257	7	different	different	ADJ
easat-3604	257	8	beams	beam	NOUN
easat-3604	257	9	.	.	PUNCT
easat-3604	258	1	crab	crab	NOUN
easat-3604	258	2	-	-	PUNCT
easat-3604	258	3	beam	beam	NOUN
easat-3604	258	4	folded	fold	VERB
easat-3604	258	5	-	-	PUNCT
easat-3604	258	6	beam	beam	NOUN
easat-3604	258	7	v	v	ADV
easat-3604	258	8	-	-	PUNCT
easat-3604	258	9	shaped	shape	VERB
easat-3604	258	10	beam	beam	NOUN
easat-3604	258	11	total	total	ADJ
easat-3604	258	12	area	area	NOUN
easat-3604	258	13	at	at	ADP
easat-3604	258	14	(	(	PUNCT
easat-3604	258	15	μm2	μm2	NOUN
easat-3604	258	16	)	)	PUNCT
easat-3604	258	17	8256	8256	NUM
easat-3604	258	18	9600	9600	NUM
easat-3604	258	19	7600	7600	NUM
easat-3604	258	20	hole	hole	NOUN
easat-3604	258	21	area	area	NOUN
easat-3604	258	22	ah	ah	INTJ
easat-3604	258	23	(	(	PUNCT
easat-3604	258	24	μm2	μm2	NOUN
easat-3604	258	25	)	)	PUNCT
easat-3604	258	26	square	square	ADJ
easat-3604	258	27	hole	hole	NOUN
easat-3604	258	28	31×w2	31×w2	NUM
easat-3604	258	29	120×w2	120×w2	NUM
easat-3604	258	30	28×w2	28×w2	NUM
easat-3604	258	31	circle	circle	NOUN
easat-3604	258	32	hole	hole	NOUN
easat-3604	258	33	31×π×d2/4	31×π×d2/4	NUM
easat-3604	259	1	120×π×d2/4	120×π×d2/4	NUM
easat-3604	259	2	28×π×d2/4	28×π×d2/4	NUM
easat-3604	259	3	given	give	VERB
easat-3604	259	4	the	the	DET
easat-3604	259	5	gap	gap	NOUN
easat-3604	259	6	distance	distance	NOUN
easat-3604	259	7	h	h	NOUN
easat-3604	259	8	=	=	NOUN
easat-3604	259	9	6	6	NUM
easat-3604	259	10	μm	μm	NOUN
easat-3604	259	11	for	for	ADP
easat-3604	259	12	the	the	DET
easat-3604	259	13	common	common	ADJ
easat-3604	259	14	case	case	NOUN
easat-3604	259	15	,	,	PUNCT
easat-3604	259	16	and	and	CCONJ
easat-3604	259	17	using	use	VERB
easat-3604	259	18	the	the	DET
easat-3604	259	19	expressions	expression	NOUN
easat-3604	259	20	(	(	PUNCT
easat-3604	259	21	13	13	NUM
easat-3604	259	22	)	)	PUNCT
easat-3604	259	23	and	and	CCONJ
easat-3604	259	24	(	(	PUNCT
easat-3604	259	25	14	14	NUM
easat-3604	259	26	)	)	PUNCT
easat-3604	259	27	,	,	PUNCT
easat-3604	259	28	the	the	DET
easat-3604	259	29	damping	damp	VERB
easat-3604	259	30	coefficient	coefficient	NOUN
easat-3604	259	31	versus	versus	ADP
easat-3604	259	32	fill	fill	NOUN
easat-3604	259	33	factor	factor	NOUN
easat-3604	259	34	is	be	AUX
easat-3604	259	35	determined	determine	VERB
easat-3604	259	36	and	and	CCONJ
easat-3604	259	37	shown	show	VERB
easat-3604	259	38	in	in	ADP
easat-3604	259	39	figure	figure	NOUN
easat-3604	259	40	11	11	NUM
easat-3604	259	41	.	.	PUNCT
easat-3604	260	1	the	the	DET
easat-3604	260	2	results	result	NOUN
easat-3604	260	3	in	in	ADP
easat-3604	260	4	figure	figure	NOUN
easat-3604	260	5	11	11	NUM
easat-3604	260	6	show	show	VERB
easat-3604	260	7	that	that	SCONJ
easat-3604	260	8	the	the	DET
easat-3604	260	9	damping	damp	VERB
easat-3604	260	10	coefficient	coefficient	NOUN
easat-3604	260	11	in	in	ADP
easat-3604	260	12	the	the	DET
easat-3604	260	13	beams	beam	NOUN
easat-3604	260	14	with	with	ADP
easat-3604	260	15	circle	circle	NOUN
easat-3604	260	16	holes	hole	NOUN
easat-3604	260	17	cutout	cutout	NOUN
easat-3604	260	18	is	be	AUX
easat-3604	260	19	higher	high	ADJ
easat-3604	260	20	than	than	ADP
easat-3604	260	21	the	the	DET
easat-3604	260	22	beam	beam	NOUN
easat-3604	260	23	with	with	ADP
easat-3604	260	24	square	square	ADJ
easat-3604	260	25	holes	hole	NOUN
easat-3604	260	26	for	for	ADP
easat-3604	260	27	all	all	PRON
easat-3604	260	28	of	of	ADP
easat-3604	260	29	the	the	DET
easat-3604	260	30	above	above	ADJ
easat-3604	260	31	types	type	NOUN
easat-3604	260	32	of	of	ADP
easat-3604	260	33	microbeams	microbeam	NOUN
easat-3604	260	34	.	.	PUNCT
easat-3604	261	1	this	this	DET
easat-3604	261	2	phenomenon	phenomenon	NOUN
easat-3604	261	3	can	can	AUX
easat-3604	261	4	be	be	AUX
easat-3604	261	5	explained	explain	VERB
easat-3604	261	6	as	as	ADP
easat-3604	261	7	the	the	DET
easat-3604	261	8	beam	beam	NOUN
easat-3604	261	9	with	with	ADP
easat-3604	261	10	the	the	DET
easat-3604	261	11	same	same	ADJ
easat-3604	261	12	hole	hole	NOUN
easat-3604	261	13	dimension	dimension	NOUN
easat-3604	261	14	but	but	CCONJ
easat-3604	261	15	the	the	DET
easat-3604	261	16	area	area	NOUN
easat-3604	261	17	of	of	ADP
easat-3604	261	18	a	a	DET
easat-3604	261	19	circle	circle	NOUN
easat-3604	261	20	hole	hole	NOUN
easat-3604	261	21	is	be	AUX
easat-3604	261	22	smaller	small	ADJ
easat-3604	261	23	than	than	ADP
easat-3604	261	24	a	a	DET
easat-3604	261	25	square	square	ADJ
easat-3604	261	26	hole	hole	NOUN
easat-3604	261	27	,	,	PUNCT
easat-3604	261	28	therefore	therefore	ADV
easat-3604	261	29	the	the	DET
easat-3604	261	30	effective	effective	ADJ
easat-3604	261	31	area	area	NOUN
easat-3604	261	32	of	of	ADP
easat-3604	261	33	the	the	DET
easat-3604	261	34	beam	beam	NOUN
easat-3604	261	35	with	with	ADP
easat-3604	261	36	circle	circle	NOUN
easat-3604	261	37	holes	hole	NOUN
easat-3604	261	38	is	be	AUX
easat-3604	261	39	larger	large	ADJ
easat-3604	261	40	than	than	ADP
easat-3604	261	41	the	the	DET
easat-3604	261	42	beam	beam	NOUN
easat-3604	261	43	with	with	ADP
easat-3604	261	44	square	square	ADJ
easat-3604	261	45	holes	hole	NOUN
easat-3604	261	46	with	with	ADP
easat-3604	261	47	the	the	DET
easat-3604	261	48	same	same	ADJ
easat-3604	261	49	number	number	NOUN
easat-3604	261	50	and	and	CCONJ
easat-3604	261	51	distribution	distribution	NOUN
easat-3604	261	52	of	of	ADP
easat-3604	261	53	the	the	DET
easat-3604	261	54	holes	hole	NOUN
easat-3604	261	55	.	.	PUNCT
easat-3604	262	1	this	this	PRON
easat-3604	262	2	leads	lead	VERB
easat-3604	262	3	to	to	ADP
easat-3604	262	4	an	an	DET
easat-3604	262	5	increase	increase	NOUN
easat-3604	262	6	in	in	ADP
easat-3604	262	7	the	the	DET
easat-3604	262	8	damping	damp	VERB
easat-3604	262	9	force	force	NOUN
easat-3604	262	10	to	to	ADP
easat-3604	262	11	the	the	DET
easat-3604	262	12	beam	beam	NOUN
easat-3604	262	13	with	with	ADP
easat-3604	262	14	circle	circle	NOUN
easat-3604	262	15	holes	hole	NOUN
easat-3604	262	16	.	.	PUNCT
easat-3604	263	1	the	the	DET
easat-3604	263	2	damping	damp	VERB
easat-3604	263	3	coefficient	coefficient	NOUN
easat-3604	263	4	reaches	reach	VERB
easat-3604	263	5	the	the	DET
easat-3604	263	6	minimum	minimum	ADJ
easat-3604	263	7	value	value	NOUN
easat-3604	263	8	of	of	ADP
easat-3604	263	9	0.0625	0.0625	NUM
easat-3604	263	10	at	at	ADP
easat-3604	263	11	the	the	DET
easat-3604	263	12	largest	large	ADJ
easat-3604	263	13	hole	hole	NOUN
easat-3604	263	14	size	size	NOUN
easat-3604	263	15	.	.	PUNCT
easat-3604	264	1	it	it	PRON
easat-3604	264	2	is	be	AUX
easat-3604	264	3	significantly	significantly	ADV
easat-3604	264	4	reduced	reduce	VERB
easat-3604	264	5	compared	compare	VERB
easat-3604	264	6	to	to	ADP
easat-3604	264	7	the	the	DET
easat-3604	264	8	full	full	ADJ
easat-3604	264	9	-	-	PUNCT
easat-3604	264	10	fill	fill	NOUN
easat-3604	264	11	beam	beam	NOUN
easat-3604	264	12	at	at	ADP
easat-3604	264	13	this	this	DET
easat-3604	264	14	value	value	NOUN
easat-3604	264	15	of	of	ADP
easat-3604	264	16	fill	fill	NOUN
easat-3604	264	17	factor	factor	NOUN
easat-3604	264	18	(	(	PUNCT
easat-3604	264	19	70	70	NUM
easat-3604	264	20	%	%	NOUN
easat-3604	264	21	,	,	PUNCT
easat-3604	264	22	84	84	NUM
easat-3604	264	23	%	%	NOUN
easat-3604	264	24	,	,	PUNCT
easat-3604	264	25	77	77	NUM
easat-3604	264	26	%	%	NOUN
easat-3604	264	27	reduction	reduction	NOUN
easat-3604	264	28	in	in	ADP
easat-3604	264	29	case	case	NOUN
easat-3604	264	30	of	of	ADP
easat-3604	264	31	square	square	ADJ
easat-3604	264	32	holes	hole	NOUN
easat-3604	264	33	and	and	CCONJ
easat-3604	264	34	55	55	NUM
easat-3604	264	35	%	%	NOUN
easat-3604	264	36	,	,	PUNCT
easat-3604	264	37	66	66	NUM
easat-3604	264	38	%	%	NOUN
easat-3604	264	39	,	,	PUNCT
easat-3604	264	40	60	60	NUM
easat-3604	264	41	%	%	NOUN
easat-3604	264	42	reduction	reduction	NOUN
easat-3604	264	43	in	in	ADP
easat-3604	264	44	case	case	NOUN
easat-3604	264	45	of	of	ADP
easat-3604	264	46	circle	circle	NOUN
easat-3604	264	47	holes	hole	NOUN
easat-3604	264	48	for	for	ADP
easat-3604	264	49	folded	folded	ADJ
easat-3604	264	50	,	,	PUNCT
easat-3604	264	51	crab	crab	NOUN
easat-3604	264	52	and	and	CCONJ
easat-3604	264	53	7416	7416	NUM
easat-3604	264	54	edelweiss	edelweiss	PROPN
easat-3604	264	55	applied	apply	VERB
easat-3604	264	56	science	science	NOUN
easat-3604	264	57	and	and	CCONJ
easat-3604	264	58	technology	technology	NOUN
easat-3604	264	59	issn	issn	PROPN
easat-3604	264	60	:	:	PUNCT
easat-3604	264	61	2576	2576	NUM
easat-3604	264	62	-	-	SYM
easat-3604	264	63	8484	8484	NUM
easat-3604	264	64	vol	vol	NOUN
easat-3604	264	65	.	.	PROPN
easat-3604	265	1	8	8	NUM
easat-3604	265	2	,	,	PUNCT
easat-3604	265	3	no	no	INTJ
easat-3604	265	4	.	.	NOUN
easat-3604	265	5	6	6	NUM
easat-3604	265	6	:	:	SYM
easat-3604	265	7	7404	7404	NUM
easat-3604	265	8	-	-	SYM
easat-3604	265	9	7418	7418	NUM
easat-3604	265	10	,	,	PUNCT
easat-3604	265	11	2024	2024	NUM
easat-3604	265	12	doi	doi	NOUN
easat-3604	265	13	:	:	PUNCT
easat-3604	265	14	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	265	15	©	©	PROPN
easat-3604	265	16	2024	2024	NUM
easat-3604	265	17	by	by	ADP
easat-3604	265	18	the	the	DET
easat-3604	265	19	author	author	NOUN
easat-3604	265	20	;	;	PUNCT
easat-3604	265	21	licensee	licensee	PROPN
easat-3604	265	22	learning	learn	VERB
easat-3604	265	23	gate	gate	NOUN
easat-3604	265	24	v	v	ADV
easat-3604	265	25	-	-	PUNCT
easat-3604	265	26	shaped	shape	VERB
easat-3604	265	27	beam	beam	NOUN
easat-3604	265	28	,	,	PUNCT
easat-3604	265	29	respectively	respectively	ADV
easat-3604	265	30	)	)	PUNCT
easat-3604	265	31	.	.	PUNCT
easat-3604	266	1	these	these	DET
easat-3604	266	2	values	value	NOUN
easat-3604	266	3	are	be	AUX
easat-3604	266	4	ideal	ideal	ADJ
easat-3604	266	5	and	and	CCONJ
easat-3604	266	6	will	will	AUX
easat-3604	266	7	not	not	PART
easat-3604	266	8	be	be	AUX
easat-3604	266	9	achieved	achieve	VERB
easat-3604	266	10	in	in	ADP
easat-3604	266	11	practice	practice	NOUN
easat-3604	266	12	.	.	PUNCT
easat-3604	267	1	commonly	commonly	ADV
easat-3604	267	2	,	,	PUNCT
easat-3604	267	3	the	the	DET
easat-3604	267	4	value	value	NOUN
easat-3604	267	5	of	of	ADP
easat-3604	267	6	the	the	DET
easat-3604	267	7	fill	fill	NOUN
easat-3604	267	8	factor	factor	NOUN
easat-3604	267	9	needs	need	VERB
easat-3604	267	10	to	to	PART
easat-3604	267	11	be	be	AUX
easat-3604	267	12	set	set	VERB
easat-3604	267	13	at	at	ADP
easat-3604	267	14	0.2	0.2	NUM
easat-3604	267	15	0.8	0.8	NUM
easat-3604	267	16	to	to	PART
easat-3604	267	17	guarantee	guarantee	VERB
easat-3604	267	18	convenience	convenience	NOUN
easat-3604	267	19	in	in	ADP
easat-3604	267	20	the	the	DET
easat-3604	267	21	fabrication	fabrication	NOUN
easat-3604	267	22	.	.	PUNCT
easat-3604	268	1	at	at	ADP
easat-3604	268	2	the	the	DET
easat-3604	268	3	value	value	NOUN
easat-3604	268	4	of	of	ADP
easat-3604	268	5	0.25	0.25	NUM
easat-3604	268	6	,	,	PUNCT
easat-3604	268	7	the	the	DET
easat-3604	268	8	reduction	reduction	NOUN
easat-3604	268	9	compared	compare	VERB
easat-3604	268	10	with	with	ADP
easat-3604	268	11	the	the	DET
easat-3604	268	12	full	full	ADJ
easat-3604	268	13	fill	fill	NOUN
easat-3604	268	14	beam	beam	NOUN
easat-3604	268	15	is	be	AUX
easat-3604	268	16	44	44	NUM
easat-3604	268	17	%	%	NOUN
easat-3604	268	18	,	,	PUNCT
easat-3604	268	19	53	53	NUM
easat-3604	268	20	%	%	NOUN
easat-3604	268	21	,	,	PUNCT
easat-3604	268	22	52	52	NUM
easat-3604	268	23	%	%	NOUN
easat-3604	268	24	with	with	ADP
easat-3604	268	25	square	square	ADJ
easat-3604	268	26	holes	hole	NOUN
easat-3604	268	27	,	,	PUNCT
easat-3604	268	28	and	and	CCONJ
easat-3604	268	29	35	35	NUM
easat-3604	268	30	%	%	NOUN
easat-3604	268	31	,	,	PUNCT
easat-3604	268	32	42	42	NUM
easat-3604	268	33	%	%	NOUN
easat-3604	268	34	,	,	PUNCT
easat-3604	268	35	and	and	CCONJ
easat-3604	268	36	41	41	NUM
easat-3604	268	37	%	%	NOUN
easat-3604	268	38	with	with	ADP
easat-3604	268	39	circle	circle	NOUN
easat-3604	268	40	holes	hole	NOUN
easat-3604	268	41	for	for	ADP
easat-3604	268	42	the	the	DET
easat-3604	268	43	folded	folded	ADJ
easat-3604	268	44	,	,	PUNCT
easat-3604	268	45	crab	crab	NOUN
easat-3604	268	46	,	,	PUNCT
easat-3604	268	47	and	and	CCONJ
easat-3604	268	48	v	v	ADP
easat-3604	268	49	shape	shape	NOUN
easat-3604	268	50	beam	beam	NOUN
easat-3604	268	51	,	,	PUNCT
easat-3604	268	52	respectively	respectively	ADV
easat-3604	268	53	(	(	PUNCT
easat-3604	268	54	figure	figure	NOUN
easat-3604	268	55	12	12	NUM
easat-3604	268	56	)	)	PUNCT
easat-3604	268	57	.	.	PUNCT
easat-3604	269	1	figure	figure	VERB
easat-3604	269	2	11	11	NUM
easat-3604	269	3	.	.	PUNCT
easat-3604	270	1	damping	damp	VERB
easat-3604	270	2	coefficient	coefficient	NOUN
easat-3604	270	3	versus	versus	ADP
easat-3604	270	4	fill	fill	NOUN
easat-3604	270	5	factor	factor	NOUN
easat-3604	270	6	.	.	PUNCT
easat-3604	271	1	figure	figure	NOUN
easat-3604	271	2	12	12	NUM
easat-3604	271	3	.	.	PUNCT
easat-3604	272	1	the	the	DET
easat-3604	272	2	reduction	reduction	NOUN
easat-3604	272	3	of	of	ADP
easat-3604	272	4	damping	damp	VERB
easat-3604	272	5	coefficient	coefficient	NOUN
easat-3604	272	6	versus	versus	ADP
easat-3604	272	7	fill	fill	NOUN
easat-3604	272	8	factor	factor	NOUN
easat-3604	272	9	.	.	PUNCT
easat-3604	273	1	4	4	X
easat-3604	273	2	.	.	X
easat-3604	273	3	conclusion	conclusion	NOUN
easat-3604	273	4	the	the	DET
easat-3604	273	5	paper	paper	NOUN
easat-3604	273	6	presented	present	VERB
easat-3604	273	7	three	three	NUM
easat-3604	273	8	perforated	perforate	VERB
easat-3604	273	9	beam	beam	NOUN
easat-3604	273	10	models	model	NOUN
easat-3604	273	11	with	with	ADP
easat-3604	273	12	complex	complex	ADJ
easat-3604	273	13	structures	structure	NOUN
easat-3604	273	14	,	,	PUNCT
easat-3604	273	15	consisting	consist	VERB
easat-3604	273	16	of	of	ADP
easat-3604	273	17	the	the	DET
easat-3604	273	18	folded	fold	VERB
easat-3604	273	19	,	,	PUNCT
easat-3604	273	20	crab	crab	NOUN
easat-3604	273	21	,	,	PUNCT
easat-3604	273	22	and	and	CCONJ
easat-3604	273	23	v	v	ADV
easat-3604	273	24	-	-	PUNCT
easat-3604	273	25	shaped	shape	VERB
easat-3604	273	26	beam	beam	NOUN
easat-3604	273	27	.	.	PUNCT
easat-3604	274	1	the	the	DET
easat-3604	274	2	dynamic	dynamic	ADJ
easat-3604	274	3	characteristics	characteristic	NOUN
easat-3604	274	4	of	of	ADP
easat-3604	274	5	these	these	DET
easat-3604	274	6	beams	beam	NOUN
easat-3604	274	7	such	such	ADJ
easat-3604	274	8	as	as	ADP
easat-3604	274	9	the	the	DET
easat-3604	274	10	equivalent	equivalent	ADJ
easat-3604	274	11	stiffness	stiffness	NOUN
easat-3604	274	12	,	,	PUNCT
easat-3604	274	13	the	the	DET
easat-3604	274	14	major	major	ADJ
easat-3604	274	15	frequencies	frequency	NOUN
easat-3604	274	16	,	,	PUNCT
easat-3604	274	17	and	and	CCONJ
easat-3604	274	18	the	the	DET
easat-3604	274	19	damping	damp	VERB
easat-3604	274	20	coefficient	coefficient	NOUN
easat-3604	274	21	were	be	AUX
easat-3604	274	22	determined	determine	VERB
easat-3604	274	23	by	by	ADP
easat-3604	274	24	using	use	VERB
easat-3604	274	25	analytical	analytical	ADJ
easat-3604	274	26	and	and	CCONJ
easat-3604	274	27	simulation	simulation	NOUN
easat-3604	274	28	analysis	analysis	NOUN
easat-3604	274	29	using	use	VERB
easat-3604	274	30	ansys	ansys	PROPN
easat-3604	274	31	software	software	PROPN
easat-3604	274	32	.	.	PUNCT
easat-3604	275	1	besides	besides	SCONJ
easat-3604	275	2	,	,	PUNCT
easat-3604	275	3	the	the	DET
easat-3604	275	4	obtained	obtain	VERB
easat-3604	275	5	results	result	NOUN
easat-3604	275	6	for	for	ADP
easat-3604	275	7	the	the	DET
easat-3604	275	8	single	single	ADJ
easat-3604	275	9	beam	beam	NOUN
easat-3604	275	10	in	in	ADP
easat-3604	275	11	this	this	DET
easat-3604	275	12	study	study	NOUN
easat-3604	275	13	also	also	ADV
easat-3604	275	14	were	be	AUX
easat-3604	275	15	compared	compare	VERB
easat-3604	275	16	with	with	ADP
easat-3604	275	17	the	the	DET
easat-3604	275	18	previous	previous	ADJ
easat-3604	275	19	research	research	NOUN
easat-3604	275	20	with	with	ADP
easat-3604	275	21	a	a	DET
easat-3604	275	22	0.426	0.426	NUM
easat-3604	275	23	%	%	NOUN
easat-3604	275	24	error	error	NOUN
easat-3604	275	25	.	.	PUNCT
easat-3604	276	1	the	the	DET
easat-3604	276	2	results	result	NOUN
easat-3604	276	3	again	again	ADV
easat-3604	276	4	confirm	confirm	VERB
easat-3604	276	5	the	the	DET
easat-3604	276	6	influence	influence	NOUN
easat-3604	276	7	of	of	ADP
easat-3604	276	8	the	the	DET
easat-3604	276	9	holes	hole	NOUN
easat-3604	276	10	cut	cut	VERB
easat-3604	276	11	out	out	ADP
easat-3604	276	12	of	of	ADP
easat-3604	276	13	the	the	DET
easat-3604	276	14	elastic	elastic	ADJ
easat-3604	276	15	beam	beam	NOUN
easat-3604	276	16	on	on	ADP
easat-3604	276	17	their	their	PRON
easat-3604	276	18	dynamic	dynamic	ADJ
easat-3604	276	19	characteristics	characteristic	NOUN
easat-3604	276	20	.	.	PUNCT
easat-3604	277	1	the	the	DET
easat-3604	277	2	existence	existence	NOUN
easat-3604	277	3	of	of	ADP
easat-3604	277	4	perforated	perforate	VERB
easat-3604	277	5	holes	hole	NOUN
easat-3604	277	6	leads	lead	VERB
easat-3604	277	7	to	to	ADP
easat-3604	277	8	a	a	DET
easat-3604	277	9	reduction	reduction	NOUN
easat-3604	277	10	in	in	ADP
easat-3604	277	11	the	the	DET
easat-3604	277	12	equivalent	equivalent	ADJ
easat-3604	277	13	stiffness	stiffness	NOUN
easat-3604	277	14	of	of	ADP
easat-3604	277	15	beams	beam	NOUN
easat-3604	277	16	,	,	PUNCT
easat-3604	277	17	which	which	PRON
easat-3604	277	18	subsequently	subsequently	ADV
easat-3604	277	19	lowers	lower	VERB
easat-3604	277	20	the	the	DET
easat-3604	277	21	working	work	VERB
easat-3604	277	22	frequencies	frequency	NOUN
easat-3604	277	23	of	of	ADP
easat-3604	277	24	0	0	NUM
easat-3604	277	25	5e-10	5e-10	NUM
easat-3604	277	26	1e-09	1e-09	NUM
easat-3604	277	27	1.5e-09	1.5e-09	NUM
easat-3604	277	28	2e-09	2e-09	NOUN
easat-3604	277	29	2.5e-09	2.5e-09	NUM
easat-3604	278	1	3e-09	3e-09	NUM
easat-3604	278	2	0	0	NUM
easat-3604	278	3	0.15	0.15	NUM
easat-3604	278	4	0.3	0.3	NUM
easat-3604	278	5	0.45	0.45	NUM
easat-3604	278	6	0.6	0.6	NUM
easat-3604	278	7	0.75	0.75	NUM
easat-3604	278	8	0.9	0.9	NUM
easat-3604	278	9	d	d	NOUN
easat-3604	278	10	am	be	AUX
easat-3604	278	11	p	p	X
easat-3604	278	12	ig	ig	INTJ
easat-3604	278	13	c	c	NOUN
easat-3604	278	14	o	o	NOUN
easat-3604	278	15	ef	ef	PROPN
easat-3604	278	16	fi	fi	PROPN
easat-3604	278	17	ci	ci	PROPN
easat-3604	278	18	en	en	ADP
easat-3604	278	19	t	t	PROPN
easat-3604	279	1	[	[	X
easat-3604	279	2	n	n	X
easat-3604	279	3	s/	s/	NOUN
easat-3604	279	4	m	m	VERB
easat-3604	279	5	2	2	NUM
easat-3604	279	6	]	]	PUNCT
easat-3604	279	7	fill	fill	NOUN
easat-3604	279	8	factor	factor	NOUN
easat-3604	279	9	folded	fold	VERB
easat-3604	279	10	beam	beam	ADJ
easat-3604	279	11	-	-	PUNCT
easat-3604	279	12	square	square	ADJ
easat-3604	279	13	hole	hole	NOUN
easat-3604	279	14	folded	fold	VERB
easat-3604	279	15	beam	beam	NOUN
easat-3604	279	16	-	-	PUNCT
easat-3604	279	17	circle	circle	NOUN
easat-3604	279	18	hole	hole	NOUN
easat-3604	279	19	crab	crab	NOUN
easat-3604	279	20	beam	beam	PROPN
easat-3604	279	21	-	-	PUNCT
easat-3604	279	22	square	square	ADJ
easat-3604	279	23	hole	hole	NOUN
easat-3604	279	24	0	0	NUM
easat-3604	279	25	%	%	NOUN
easat-3604	279	26	10	10	NUM
easat-3604	279	27	%	%	NOUN
easat-3604	279	28	20	20	NUM
easat-3604	279	29	%	%	NOUN
easat-3604	279	30	30	30	NUM
easat-3604	279	31	%	%	NOUN
easat-3604	279	32	40	40	NUM
easat-3604	279	33	%	%	NOUN
easat-3604	279	34	50	50	NUM
easat-3604	279	35	%	%	NOUN
easat-3604	279	36	60	60	NUM
easat-3604	279	37	%	%	NOUN
easat-3604	279	38	70	70	NUM
easat-3604	279	39	%	%	NOUN
easat-3604	279	40	80	80	NUM
easat-3604	279	41	%	%	NOUN
easat-3604	279	42	90	90	NUM
easat-3604	279	43	%	%	NOUN
easat-3604	279	44	0.05	0.05	NUM
easat-3604	279	45	0.15	0.15	NUM
easat-3604	279	46	0.25	0.25	NUM
easat-3604	279	47	0.35	0.35	NUM
easat-3604	279	48	0.45	0.45	NUM
easat-3604	279	49	0.55	0.55	NUM
easat-3604	279	50	0.65	0.65	NUM
easat-3604	279	51	0.75	0.75	NUM
easat-3604	279	52	0.85	0.85	NUM
easat-3604	279	53	r	r	NOUN
easat-3604	279	54	ed	ed	NOUN
easat-3604	279	55	u	u	NOUN
easat-3604	279	56	ct	ct	PROPN
easat-3604	279	57	io	io	PROPN
easat-3604	279	58	n	n	PRON
easat-3604	279	59	o	o	NOUN
easat-3604	279	60	f	f	X
easat-3604	280	1	d	d	NOUN
easat-3604	280	2	am	be	AUX
easat-3604	280	3	p	p	NOUN
easat-3604	280	4	in	in	ADP
easat-3604	280	5	g	g	PROPN
easat-3604	280	6	co	co	X
easat-3604	280	7	ef	ef	PROPN
easat-3604	280	8	fi	fi	PROPN
easat-3604	280	9	ci	ci	PROPN
easat-3604	280	10	en	en	PROPN
easat-3604	280	11	t	t	PROPN
easat-3604	280	12	fill	fill	NOUN
easat-3604	280	13	factor	factor	NOUN
easat-3604	280	14	folded	fold	VERB
easat-3604	280	15	beam	beam	ADJ
easat-3604	280	16	-	-	PUNCT
easat-3604	280	17	square	square	ADJ
easat-3604	280	18	hole	hole	NOUN
easat-3604	280	19	folded	fold	VERB
easat-3604	280	20	beam	beam	NOUN
easat-3604	280	21	-	-	PUNCT
easat-3604	280	22	circle	circle	NOUN
easat-3604	280	23	hole	hole	NOUN
easat-3604	280	24	crab	crab	NOUN
easat-3604	280	25	beam	beam	PROPN
easat-3604	280	26	-	-	PUNCT
easat-3604	280	27	square	square	ADJ
easat-3604	280	28	hole	hole	NOUN
easat-3604	280	29	crab	crab	NOUN
easat-3604	280	30	beam	beam	NOUN
easat-3604	280	31	-	-	PUNCT
easat-3604	280	32	circle	circle	NOUN
easat-3604	280	33	hole	hole	NOUN
easat-3604	280	34	v	v	ADP
easat-3604	280	35	beam	beam	ADJ
easat-3604	280	36	-	-	PUNCT
easat-3604	280	37	square	square	ADJ
easat-3604	280	38	hole	hole	NOUN
easat-3604	280	39	v	v	ADP
easat-3604	280	40	beam	beam	NOUN
easat-3604	280	41	-	-	PUNCT
easat-3604	280	42	circle	circle	NOUN
easat-3604	280	43	hole	hole	NOUN
easat-3604	280	44	7417	7417	NUM
easat-3604	280	45	edelweiss	edelweiss	PROPN
easat-3604	280	46	applied	apply	VERB
easat-3604	280	47	science	science	NOUN
easat-3604	280	48	and	and	CCONJ
easat-3604	280	49	technology	technology	NOUN
easat-3604	280	50	issn	issn	PROPN
easat-3604	280	51	:	:	PUNCT
easat-3604	280	52	2576	2576	NUM
easat-3604	280	53	-	-	SYM
easat-3604	280	54	8484	8484	NUM
easat-3604	280	55	vol	vol	NOUN
easat-3604	280	56	.	.	PROPN
easat-3604	281	1	8	8	NUM
easat-3604	281	2	,	,	PUNCT
easat-3604	281	3	no	no	INTJ
easat-3604	281	4	.	.	NOUN
easat-3604	281	5	6	6	NUM
easat-3604	281	6	:	:	SYM
easat-3604	281	7	7404	7404	NUM
easat-3604	281	8	-	-	SYM
easat-3604	281	9	7418	7418	NUM
easat-3604	281	10	,	,	PUNCT
easat-3604	281	11	2024	2024	NUM
easat-3604	281	12	doi	doi	NOUN
easat-3604	281	13	:	:	PUNCT
easat-3604	281	14	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	281	15	©	©	PROPN
easat-3604	281	16	2024	2024	NUM
easat-3604	281	17	by	by	ADP
easat-3604	281	18	the	the	DET
easat-3604	281	19	author	author	NOUN
easat-3604	281	20	;	;	PUNCT
easat-3604	281	21	licensee	licensee	PROPN
easat-3604	281	22	learning	learning	NOUN
easat-3604	281	23	gate	gate	VERB
easat-3604	281	24	the	the	DET
easat-3604	281	25	system	system	NOUN
easat-3604	281	26	.	.	PUNCT
easat-3604	282	1	in	in	ADP
easat-3604	282	2	addition	addition	NOUN
easat-3604	282	3	,	,	PUNCT
easat-3604	282	4	the	the	DET
easat-3604	282	5	holes	hole	NOUN
easat-3604	282	6	in	in	ADP
easat-3604	282	7	the	the	DET
easat-3604	282	8	beam	beam	NOUN
easat-3604	282	9	body	body	NOUN
easat-3604	282	10	also	also	ADV
easat-3604	282	11	cause	cause	VERB
easat-3604	282	12	the	the	DET
easat-3604	282	13	reduction	reduction	NOUN
easat-3604	282	14	of	of	ADP
easat-3604	282	15	the	the	DET
easat-3604	282	16	damping	damp	VERB
easat-3604	282	17	force	force	NOUN
easat-3604	282	18	of	of	ADP
easat-3604	282	19	the	the	DET
easat-3604	282	20	air	air	NOUN
easat-3604	282	21	in	in	ADP
easat-3604	282	22	the	the	DET
easat-3604	282	23	operating	operating	NOUN
easat-3604	282	24	environment	environment	NOUN
easat-3604	282	25	thanks	thank	NOUN
easat-3604	282	26	to	to	ADP
easat-3604	282	27	the	the	DET
easat-3604	282	28	decrease	decrease	NOUN
easat-3604	282	29	in	in	ADP
easat-3604	282	30	damping	damp	VERB
easat-3604	282	31	coefficient	coefficient	NOUN
easat-3604	282	32	.	.	PUNCT
easat-3604	283	1	the	the	DET
easat-3604	283	2	maximum	maximum	ADJ
easat-3604	283	3	decrease	decrease	NOUN
easat-3604	283	4	in	in	ADP
easat-3604	283	5	damping	damp	VERB
easat-3604	283	6	coefficient	coefficient	NOUN
easat-3604	283	7	reaches	reach	VERB
easat-3604	283	8	84	84	NUM
easat-3604	283	9	%	%	NOUN
easat-3604	283	10	in	in	ADP
easat-3604	283	11	the	the	DET
easat-3604	283	12	ideal	ideal	ADJ
easat-3604	283	13	case	case	NOUN
easat-3604	283	14	for	for	ADP
easat-3604	283	15	the	the	DET
easat-3604	283	16	crab	crab	NOUN
easat-3604	283	17	beam	beam	NOUN
easat-3604	283	18	with	with	ADP
easat-3604	283	19	square	square	ADJ
easat-3604	283	20	holes	hole	NOUN
easat-3604	283	21	.	.	PUNCT
easat-3604	284	1	the	the	DET
easat-3604	284	2	hole	hole	NOUN
easat-3604	284	3	size	size	NOUN
easat-3604	284	4	needs	need	VERB
easat-3604	284	5	to	to	PART
easat-3604	284	6	be	be	AUX
easat-3604	284	7	chosen	choose	VERB
easat-3604	284	8	to	to	PART
easat-3604	284	9	guarantee	guarantee	VERB
easat-3604	284	10	the	the	DET
easat-3604	284	11	value	value	NOUN
easat-3604	284	12	of	of	ADP
easat-3604	284	13	the	the	DET
easat-3604	284	14	fill	fill	NOUN
easat-3604	284	15	factor	factor	NOUN
easat-3604	284	16	is	be	AUX
easat-3604	284	17	in	in	ADP
easat-3604	284	18	the	the	DET
easat-3604	284	19	range	range	NOUN
easat-3604	284	20	of	of	ADP
easat-3604	284	21	0.2	0.2	NUM
easat-3604	284	22	-	-	PUNCT
easat-3604	284	23	0.8	0.8	NUM
easat-3604	284	24	for	for	ADP
easat-3604	284	25	convenience	convenience	NOUN
easat-3604	284	26	in	in	ADP
easat-3604	284	27	the	the	DET
easat-3604	284	28	fabrication	fabrication	NOUN
easat-3604	284	29	process	process	NOUN
easat-3604	284	30	.	.	PUNCT
easat-3604	285	1	finally	finally	ADV
easat-3604	285	2	,	,	PUNCT
easat-3604	285	3	the	the	DET
easat-3604	285	4	shape	shape	NOUN
easat-3604	285	5	of	of	ADP
easat-3604	285	6	the	the	DET
easat-3604	285	7	perforated	perforate	VERB
easat-3604	285	8	holes	hole	NOUN
easat-3604	285	9	also	also	ADV
easat-3604	285	10	affects	affect	VERB
easat-3604	285	11	the	the	DET
easat-3604	285	12	variable	variable	NOUN
easat-3604	285	13	of	of	ADP
easat-3604	285	14	the	the	DET
easat-3604	285	15	dynamic	dynamic	ADJ
easat-3604	285	16	response	response	NOUN
easat-3604	285	17	of	of	ADP
easat-3604	285	18	the	the	DET
easat-3604	285	19	beams	beam	NOUN
easat-3604	285	20	,	,	PUNCT
easat-3604	285	21	where	where	SCONJ
easat-3604	285	22	the	the	DET
easat-3604	285	23	circle	circle	NOUN
easat-3604	285	24	hole	hole	NOUN
easat-3604	285	25	causes	cause	VERB
easat-3604	285	26	change	change	VERB
easat-3604	285	27	less	less	ADJ
easat-3604	285	28	than	than	ADP
easat-3604	285	29	the	the	DET
easat-3604	285	30	square	square	ADJ
easat-3604	285	31	hole	hole	NOUN
easat-3604	285	32	.	.	PUNCT
easat-3604	286	1	acknowledgments	acknowledgment	NOUN
easat-3604	286	2	:	:	PUNCT
easat-3604	286	3	this	this	DET
easat-3604	286	4	research	research	NOUN
easat-3604	286	5	is	be	AUX
easat-3604	286	6	funded	fund	VERB
easat-3604	286	7	by	by	ADP
easat-3604	286	8	the	the	DET
easat-3604	286	9	le	le	PROPN
easat-3604	286	10	quy	quy	PROPN
easat-3604	286	11	don	don	PROPN
easat-3604	286	12	technical	technical	PROPN
easat-3604	286	13	university	university	PROPN
easat-3604	286	14	research	research	NOUN
easat-3604	286	15	fund	fund	NOUN
easat-3604	286	16	under	under	ADP
easat-3604	286	17	code	code	NOUN
easat-3604	286	18	23.01.16	23.01.16	PROPN
easat-3604	286	19	.	.	PUNCT
easat-3604	287	1	copyright	copyright	NOUN
easat-3604	287	2	:	:	PUNCT
easat-3604	287	3	©	©	PROPN
easat-3604	287	4	2024	2024	NUM
easat-3604	287	5	by	by	ADP
easat-3604	287	6	the	the	DET
easat-3604	287	7	authors	author	NOUN
easat-3604	287	8	.	.	PUNCT
easat-3604	288	1	this	this	DET
easat-3604	288	2	article	article	NOUN
easat-3604	288	3	is	be	AUX
easat-3604	288	4	an	an	DET
easat-3604	288	5	open	open	ADJ
easat-3604	288	6	access	access	NOUN
easat-3604	288	7	article	article	NOUN
easat-3604	288	8	distributed	distribute	VERB
easat-3604	288	9	under	under	ADP
easat-3604	288	10	the	the	DET
easat-3604	288	11	terms	term	NOUN
easat-3604	288	12	and	and	CCONJ
easat-3604	288	13	conditions	condition	NOUN
easat-3604	288	14	of	of	ADP
easat-3604	288	15	the	the	DET
easat-3604	288	16	creative	creative	ADJ
easat-3604	288	17	commons	common	NOUN
easat-3604	288	18	attribution	attribution	NOUN
easat-3604	288	19	(	(	PUNCT
easat-3604	288	20	cc	cc	NOUN
easat-3604	288	21	by	by	ADP
easat-3604	288	22	)	)	PUNCT
easat-3604	288	23	license	license	NOUN
easat-3604	288	24	(	(	PUNCT
easat-3604	288	25	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
easat-3604	288	26	)	)	PUNCT
easat-3604	288	27	.	.	PUNCT
easat-3604	289	1	references	reference	NOUN
easat-3604	289	2	[	[	X
easat-3604	289	3	1	1	X
easat-3604	289	4	]	]	PUNCT
easat-3604	289	5	j.	j.	PROPN
easat-3604	289	6	l.	l.	PROPN
easat-3604	289	7	barth	barth	PROPN
easat-3604	289	8	and	and	CCONJ
easat-3604	289	9	m.	m.	NOUN
easat-3604	289	10	a.	a.	PROPN
easat-3604	289	11	g.	g.	PROPN
easat-3604	289	12	darrin	darrin	PROPN
easat-3604	289	13	,	,	PUNCT
easat-3604	289	14	“	"	PUNCT
easat-3604	289	15	systems	system	NOUN
easat-3604	289	16	engineering	engineering	NOUN
easat-3604	289	17	for	for	ADP
easat-3604	289	18	microscale	microscale	ADJ
easat-3604	289	19	and	and	CCONJ
easat-3604	289	20	nanoscale	nanoscale	NOUN
easat-3604	289	21	technologies	technology	NOUN
easat-3604	289	22	,	,	PUNCT
easat-3604	289	23	”	"	PUNCT
easat-3604	289	24	syst	syst	NOUN
easat-3604	289	25	.	.	PUNCT
easat-3604	290	1	eng	eng	PROPN
easat-3604	290	2	.	.	PUNCT
easat-3604	290	3	microscale	microscale	PROPN
easat-3604	290	4	nanoscale	nanoscale	NOUN
easat-3604	290	5	technol	technol	NOUN
easat-3604	290	6	.	.	PROPN
easat-3604	290	7	,	,	PUNCT
easat-3604	290	8	pp	pp	PROPN
easat-3604	290	9	.	.	PUNCT
easat-3604	291	1	1–549	1–549	NUM
easat-3604	291	2	,	,	PUNCT
easat-3604	291	3	2016	2016	NUM
easat-3604	291	4	,	,	PUNCT
easat-3604	291	5	doi	doi	NOUN
easat-3604	291	6	:	:	PUNCT
easat-3604	291	7	10.1201	10.1201	NUM
easat-3604	291	8	/	/	SYM
easat-3604	291	9	b11291	b11291	NOUN
easat-3604	291	10	-	-	PUNCT
easat-3604	291	11	3	3	NUM
easat-3604	291	12	.	.	PUNCT
easat-3604	292	1	[	[	X
easat-3604	292	2	2	2	X
easat-3604	292	3	]	]	PUNCT
easat-3604	292	4	s.	s.	PROPN
easat-3604	292	5	f.	f.	PROPN
easat-3604	292	6	krar	krar	PROPN
easat-3604	292	7	and	and	CCONJ
easat-3604	292	8	a.	a.	NOUN
easat-3604	292	9	gill	gill	PROPN
easat-3604	292	10	,	,	PUNCT
easat-3604	292	11	“	"	PUNCT
easat-3604	292	12	exploring	explore	VERB
easat-3604	292	13	advanced	advanced	ADJ
easat-3604	292	14	manufacturing	manufacturing	NOUN
easat-3604	292	15	technologies	technology	NOUN
easat-3604	292	16	,	,	PUNCT
easat-3604	292	17	”	"	PUNCT
easat-3604	292	18	p.	p.	NOUN
easat-3604	292	19	448	448	NUM
easat-3604	292	20	,	,	PUNCT
easat-3604	292	21	2003	2003	NUM
easat-3604	292	22	.	.	PUNCT
easat-3604	293	1	[	[	X
easat-3604	293	2	3	3	X
easat-3604	293	3	]	]	PUNCT
easat-3604	293	4	j.	j.	PROPN
easat-3604	293	5	w.	w.	PROPN
easat-3604	293	6	judy	judy	PROPN
easat-3604	293	7	,	,	PUNCT
easat-3604	293	8	“	"	PUNCT
easat-3604	293	9	microelectromechanical	microelectromechanical	ADJ
easat-3604	293	10	systems	system	NOUN
easat-3604	293	11	(	(	PUNCT
easat-3604	293	12	mems	mem	NOUN
easat-3604	293	13	):	):	PUNCT
easat-3604	293	14	fabrication	fabrication	NOUN
easat-3604	293	15	,	,	PUNCT
easat-3604	293	16	design	design	NOUN
easat-3604	293	17	and	and	CCONJ
easat-3604	293	18	applications	application	NOUN
easat-3604	293	19	,	,	PUNCT
easat-3604	293	20	”	"	PUNCT
easat-3604	293	21	smart	smart	ADJ
easat-3604	293	22	mater	mater	NOUN
easat-3604	293	23	.	.	PUNCT
easat-3604	293	24	struct	struct	NOUN
easat-3604	293	25	.	.	PUNCT
easat-3604	293	26	,	,	PUNCT
easat-3604	293	27	vol	vol	NOUN
easat-3604	293	28	.	.	PROPN
easat-3604	294	1	10	10	NUM
easat-3604	294	2	,	,	PUNCT
easat-3604	294	3	no	no	INTJ
easat-3604	294	4	.	.	NOUN
easat-3604	294	5	6	6	NUM
easat-3604	294	6	,	,	PUNCT
easat-3604	294	7	pp	pp	ADJ
easat-3604	294	8	.	.	PUNCT
easat-3604	295	1	1115–1134	1115–1134	NUM
easat-3604	295	2	,	,	PUNCT
easat-3604	295	3	2001	2001	NUM
easat-3604	295	4	,	,	PUNCT
easat-3604	295	5	doi	doi	NOUN
easat-3604	295	6	:	:	PUNCT
easat-3604	295	7	10.1088/0964	10.1088/0964	NUM
easat-3604	295	8	-	-	SYM
easat-3604	295	9	1726/10/6/301	1726/10/6/301	NUM
easat-3604	295	10	.	.	PUNCT
easat-3604	296	1	[	[	X
easat-3604	296	2	4	4	NUM
easat-3604	296	3	]	]	X
easat-3604	296	4	y.	y.	PROPN
easat-3604	296	5	shen	shen	PROPN
easat-3604	296	6	,	,	PUNCT
easat-3604	296	7	“	"	PUNCT
easat-3604	296	8	current	current	ADJ
easat-3604	296	9	status	status	NOUN
easat-3604	296	10	and	and	CCONJ
easat-3604	296	11	application	application	NOUN
easat-3604	296	12	of	of	ADP
easat-3604	296	13	micro	micro	ADJ
easat-3604	296	14	-	-	ADJ
easat-3604	296	15	electromechanical	electromechanical	ADJ
easat-3604	296	16	systems	system	NOUN
easat-3604	296	17	(	(	PUNCT
easat-3604	296	18	mems	mem	NOUN
easat-3604	296	19	)	)	PUNCT
easat-3604	296	20	,	,	PUNCT
easat-3604	296	21	”	"	PUNCT
easat-3604	296	22	highlights	highlight	NOUN
easat-3604	296	23	sci	sci	PROPN
easat-3604	296	24	.	.	PUNCT
easat-3604	296	25	eng	eng	PROPN
easat-3604	296	26	.	.	PROPN
easat-3604	297	1	technol	technol	PROPN
easat-3604	297	2	.	.	PROPN
easat-3604	297	3	,	,	PUNCT
easat-3604	297	4	vol	vol	NOUN
easat-3604	297	5	.	.	PROPN
easat-3604	298	1	46	46	NUM
easat-3604	298	2	,	,	PUNCT
easat-3604	298	3	pp	pp	ADJ
easat-3604	298	4	.	.	PUNCT
easat-3604	299	1	97–105	97–105	NUM
easat-3604	299	2	,	,	PUNCT
easat-3604	299	3	2023	2023	NUM
easat-3604	299	4	,	,	PUNCT
easat-3604	299	5	doi	doi	NOUN
easat-3604	299	6	:	:	PUNCT
easat-3604	299	7	10.54097	10.54097	NUM
easat-3604	299	8	/	/	SYM
easat-3604	299	9	hset.v46i.7685	hset.v46i.7685	PROPN
easat-3604	299	10	.	.	PUNCT
easat-3604	300	1	[	[	X
easat-3604	300	2	5	5	X
easat-3604	300	3	]	]	PUNCT
easat-3604	300	4	d.	d.	PROPN
easat-3604	300	5	van	van	PROPN
easat-3604	300	6	hieu	hieu	PROPN
easat-3604	300	7	,	,	PUNCT
easat-3604	300	8	l.	l.	PROPN
easat-3604	300	9	van	van	PROPN
easat-3604	300	10	tam	tam	PROPN
easat-3604	300	11	,	,	PUNCT
easat-3604	300	12	n.	n.	PROPN
easat-3604	300	13	van	van	PROPN
easat-3604	300	14	duong	duong	PROPN
easat-3604	300	15	,	,	PUNCT
easat-3604	300	16	n.	n.	PROPN
easat-3604	300	17	duy	duy	PROPN
easat-3604	300	18	vy	vy	PROPN
easat-3604	300	19	,	,	PUNCT
easat-3604	300	20	and	and	CCONJ
easat-3604	300	21	c.	c.	PROPN
easat-3604	300	22	m.	m.	PROPN
easat-3604	300	23	hoang	hoang	PROPN
easat-3604	300	24	,	,	PUNCT
easat-3604	300	25	“	"	PUNCT
easat-3604	300	26	design	design	NOUN
easat-3604	300	27	and	and	CCONJ
easat-3604	300	28	simulation	simulation	NOUN
easat-3604	300	29	analysis	analysis	NOUN
easat-3604	300	30	of	of	ADP
easat-3604	300	31	a	a	DET
easat-3604	300	32	z	z	NOUN
easat-3604	300	33	axis	axis	NOUN
easat-3604	300	34	microactuator	microactuator	NOUN
easat-3604	300	35	with	with	ADP
easat-3604	300	36	low	low	ADJ
easat-3604	300	37	mode	mode	NOUN
easat-3604	300	38	cross	cross	NOUN
easat-3604	300	39	-	-	NOUN
easat-3604	300	40	talk	talk	ADJ
easat-3604	300	41	,	,	PUNCT
easat-3604	300	42	”	"	PUNCT
easat-3604	300	43	j.	j.	PROPN
easat-3604	300	44	mech	mech	PROPN
easat-3604	300	45	.	.	PROPN
easat-3604	300	46	,	,	PUNCT
easat-3604	300	47	vol	vol	NOUN
easat-3604	300	48	.	.	PROPN
easat-3604	300	49	36	36	NUM
easat-3604	300	50	,	,	PUNCT
easat-3604	300	51	no	no	INTJ
easat-3604	300	52	.	.	NOUN
easat-3604	300	53	6	6	NUM
easat-3604	300	54	,	,	PUNCT
easat-3604	300	55	pp	pp	ADJ
easat-3604	300	56	.	.	PUNCT
easat-3604	301	1	881–888	881–888	NUM
easat-3604	301	2	,	,	PUNCT
easat-3604	301	3	2020	2020	NUM
easat-3604	301	4	,	,	PUNCT
easat-3604	301	5	doi	doi	NOUN
easat-3604	301	6	:	:	PUNCT
easat-3604	301	7	10.1017	10.1017	NUM
easat-3604	301	8	/	/	SYM
easat-3604	301	9	jmech.2020.48	jmech.2020.48	NOUN
easat-3604	301	10	.	.	PUNCT
easat-3604	302	1	[	[	X
easat-3604	302	2	6	6	NUM
easat-3604	302	3	]	]	X
easat-3604	302	4	h.	h.	PROPN
easat-3604	302	5	din	din	PROPN
easat-3604	302	6	,	,	PUNCT
easat-3604	302	7	f.	f.	PROPN
easat-3604	302	8	iqbal	iqbal	PROPN
easat-3604	302	9	,	,	PUNCT
easat-3604	302	10	and	and	CCONJ
easat-3604	302	11	b.	b.	PROPN
easat-3604	302	12	lee	lee	PROPN
easat-3604	302	13	,	,	PUNCT
easat-3604	302	14	“	"	PUNCT
easat-3604	302	15	modelling	modelling	NOUN
easat-3604	302	16	and	and	CCONJ
easat-3604	302	17	optimization	optimization	NOUN
easat-3604	302	18	of	of	ADP
easat-3604	302	19	single	single	ADJ
easat-3604	302	20	drive	drive	VERB
easat-3604	302	21	3	3	NUM
easat-3604	302	22	-	-	PUNCT
easat-3604	302	23	axis	axis	NOUN
easat-3604	302	24	mems	mem	NOUN
easat-3604	302	25	gyroscope	gyroscope	NOUN
easat-3604	302	26	,	,	PUNCT
easat-3604	302	27	”	"	PUNCT
easat-3604	302	28	microsyst	microsyst	NOUN
easat-3604	302	29	.	.	PUNCT
easat-3604	303	1	technol	technol	PROPN
easat-3604	303	2	.	.	PROPN
easat-3604	303	3	,	,	PUNCT
easat-3604	303	4	vol	vol	NOUN
easat-3604	303	5	.	.	PROPN
easat-3604	304	1	26	26	NUM
easat-3604	304	2	,	,	PUNCT
easat-3604	304	3	no	no	INTJ
easat-3604	304	4	.	.	NOUN
easat-3604	304	5	9	9	NUM
easat-3604	304	6	,	,	PUNCT
easat-3604	304	7	pp	pp	ADJ
easat-3604	304	8	.	.	PUNCT
easat-3604	305	1	2869–2877	2869–2877	NUM
easat-3604	305	2	,	,	PUNCT
easat-3604	305	3	2020	2020	NUM
easat-3604	305	4	,	,	PUNCT
easat-3604	305	5	doi	doi	NOUN
easat-3604	305	6	:	:	PUNCT
easat-3604	305	7	10.1007	10.1007	NUM
easat-3604	305	8	/	/	SYM
easat-3604	305	9	s00542	s00542	NOUN
easat-3604	305	10	-	-	PUNCT
easat-3604	305	11	020	020	NUM
easat-3604	305	12	-	-	PUNCT
easat-3604	305	13	04840	04840	NUM
easat-3604	305	14	-	-	SYM
easat-3604	305	15	7	7	NUM
easat-3604	305	16	.	.	PUNCT
easat-3604	306	1	[	[	X
easat-3604	306	2	7	7	X
easat-3604	306	3	]	]	X
easat-3604	306	4	v.	v.	ADP
easat-3604	306	5	t.	t.	PROPN
easat-3604	306	6	vu	vu	PROPN
easat-3604	306	7	and	and	CCONJ
easat-3604	306	8	d.	d.	PROPN
easat-3604	306	9	t.	t.	PROPN
easat-3604	306	10	chu	chu	PROPN
easat-3604	306	11	,	,	PUNCT
easat-3604	306	12	“	"	PUNCT
easat-3604	306	13	determine	determine	VERB
easat-3604	306	14	the	the	DET
easat-3604	306	15	dynamic	dynamic	ADJ
easat-3604	306	16	parameters	parameter	NOUN
easat-3604	306	17	in	in	ADP
easat-3604	306	18	mechanical	mechanical	ADJ
easat-3604	306	19	system	system	NOUN
easat-3604	306	20	of	of	ADP
easat-3604	306	21	the	the	DET
easat-3604	306	22	crab	crab	NOUN
easat-3604	306	23	-	-	PUNCT
easat-3604	306	24	shaped	shape	VERB
easat-3604	306	25	mems	mem	NOUN
easat-3604	306	26	vibratory	vibratory	NOUN
easat-3604	306	27	gyroscope	gyroscope	NOUN
easat-3604	306	28	,	,	PUNCT
easat-3604	306	29	”	"	PUNCT
easat-3604	306	30	microsyst	microsyst	NOUN
easat-3604	306	31	.	.	PUNCT
easat-3604	307	1	technol	technol	PROPN
easat-3604	307	2	.	.	PROPN
easat-3604	307	3	,	,	PUNCT
easat-3604	307	4	vol	vol	NOUN
easat-3604	307	5	.	.	PROPN
easat-3604	308	1	27	27	NUM
easat-3604	308	2	,	,	PUNCT
easat-3604	308	3	no	no	INTJ
easat-3604	308	4	.	.	NOUN
easat-3604	308	5	9	9	NUM
easat-3604	308	6	,	,	PUNCT
easat-3604	308	7	pp	pp	ADJ
easat-3604	308	8	.	.	PUNCT
easat-3604	309	1	3429–3435	3429–3435	NUM
easat-3604	309	2	,	,	PUNCT
easat-3604	309	3	2021	2021	NUM
easat-3604	309	4	,	,	PUNCT
easat-3604	309	5	doi	doi	NOUN
easat-3604	309	6	:	:	PUNCT
easat-3604	309	7	10.1007	10.1007	NUM
easat-3604	309	8	/	/	SYM
easat-3604	309	9	s00542	s00542	NOUN
easat-3604	309	10	-	-	PUNCT
easat-3604	309	11	020	020	NUM
easat-3604	309	12	-	-	PUNCT
easat-3604	309	13	05128	05128	NUM
easat-3604	309	14	-	-	PUNCT
easat-3604	309	15	6	6	NUM
easat-3604	309	16	.	.	PUNCT
easat-3604	310	1	[	[	X
easat-3604	310	2	8	8	NUM
easat-3604	310	3	]	]	PUNCT
easat-3604	310	4	s.	s.	PROPN
easat-3604	310	5	e.	e.	PROPN
easat-3604	310	6	alper	alper	PROPN
easat-3604	310	7	and	and	CCONJ
easat-3604	310	8	t.	t.	PROPN
easat-3604	310	9	akin	akin	ADV
easat-3604	310	10	,	,	PUNCT
easat-3604	310	11	“	"	PUNCT
easat-3604	310	12	symmetrical	symmetrical	ADJ
easat-3604	310	13	and	and	CCONJ
easat-3604	310	14	decoupled	decouple	VERB
easat-3604	310	15	nickel	nickel	NOUN
easat-3604	310	16	microgyroscope	microgyroscope	NOUN
easat-3604	310	17	on	on	ADP
easat-3604	310	18	insulating	insulate	VERB
easat-3604	310	19	substrate	substrate	NOUN
easat-3604	310	20	,	,	PUNCT
easat-3604	310	21	”	"	PUNCT
easat-3604	310	22	sensors	sensor	NOUN
easat-3604	310	23	actuators	actuator	NOUN
easat-3604	310	24	,	,	PUNCT
easat-3604	310	25	a	a	DET
easat-3604	310	26	phys	phy	NOUN
easat-3604	310	27	.	.	PUNCT
easat-3604	310	28	,	,	PUNCT
easat-3604	310	29	vol	vol	NOUN
easat-3604	310	30	.	.	PROPN
easat-3604	310	31	115	115	NUM
easat-3604	310	32	,	,	PUNCT
easat-3604	310	33	no	no	INTJ
easat-3604	310	34	.	.	NOUN
easat-3604	310	35	2	2	NUM
easat-3604	310	36	-	-	SYM
easat-3604	310	37	3	3	NUM
easat-3604	310	38	spec	spec	NOUN
easat-3604	310	39	.	.	PUNCT
easat-3604	311	1	iss	iss	PROPN
easat-3604	311	2	.	.	PROPN
easat-3604	311	3	,	,	PUNCT
easat-3604	311	4	pp	pp	ADP
easat-3604	311	5	.	.	PUNCT
easat-3604	312	1	336–350	336–350	NUM
easat-3604	312	2	,	,	PUNCT
easat-3604	312	3	2004	2004	NUM
easat-3604	312	4	,	,	PUNCT
easat-3604	312	5	doi	doi	NOUN
easat-3604	312	6	:	:	PUNCT
easat-3604	312	7	10.1016	10.1016	NUM
easat-3604	312	8	/	/	SYM
easat-3604	312	9	j.sna.2004.04.041	j.sna.2004.04.041	NOUN
easat-3604	312	10	.	.	PUNCT
easat-3604	313	1	[	[	X
easat-3604	313	2	9	9	NUM
easat-3604	313	3	]	]	PUNCT
easat-3604	313	4	k.	k.	PROPN
easat-3604	313	5	t.	t.	PROPN
easat-3604	313	6	hoang	hoang	PROPN
easat-3604	313	7	,	,	PUNCT
easat-3604	313	8	d.	d.	PROPN
easat-3604	313	9	t.	t.	PROPN
easat-3604	313	10	nguyen	nguyen	PROPN
easat-3604	313	11	,	,	PUNCT
easat-3604	313	12	and	and	CCONJ
easat-3604	313	13	p.	p.	PROPN
easat-3604	313	14	h.	h.	PROPN
easat-3604	313	15	pham	pham	PROPN
easat-3604	313	16	,	,	PUNCT
easat-3604	313	17	“	"	PUNCT
easat-3604	313	18	impact	impact	NOUN
easat-3604	313	19	of	of	ADP
easat-3604	313	20	design	design	NOUN
easat-3604	313	21	parameters	parameter	NOUN
easat-3604	313	22	on	on	ADP
easat-3604	313	23	working	work	VERB
easat-3604	313	24	stability	stability	NOUN
easat-3604	313	25	of	of	ADP
easat-3604	313	26	the	the	DET
easat-3604	313	27	electrothermal	electrothermal	ADJ
easat-3604	313	28	v	v	NOUN
easat-3604	313	29	-	-	PUNCT
easat-3604	313	30	shaped	shape	VERB
easat-3604	313	31	actuator	actuator	NOUN
easat-3604	313	32	,	,	PUNCT
easat-3604	313	33	”	"	PUNCT
easat-3604	313	34	microsyst	microsyst	NOUN
easat-3604	313	35	.	.	PUNCT
easat-3604	314	1	technol	technol	PROPN
easat-3604	314	2	.	.	PROPN
easat-3604	314	3	,	,	PUNCT
easat-3604	314	4	vol	vol	NOUN
easat-3604	314	5	.	.	PROPN
easat-3604	315	1	26	26	NUM
easat-3604	315	2	,	,	PUNCT
easat-3604	315	3	no	no	INTJ
easat-3604	315	4	.	.	NOUN
easat-3604	315	5	5	5	NUM
easat-3604	315	6	,	,	PUNCT
easat-3604	315	7	pp	pp	ADJ
easat-3604	315	8	.	.	PUNCT
easat-3604	316	1	1479–1487	1479–1487	NUM
easat-3604	316	2	,	,	PUNCT
easat-3604	316	3	2020	2020	NUM
easat-3604	316	4	,	,	PUNCT
easat-3604	316	5	doi	doi	NOUN
easat-3604	316	6	:	:	PUNCT
easat-3604	316	7	10.1007	10.1007	NUM
easat-3604	316	8	/	/	SYM
easat-3604	316	9	s00542	s00542	NOUN
easat-3604	316	10	-	-	PUNCT
easat-3604	316	11	019	019	NUM
easat-3604	316	12	-	-	PUNCT
easat-3604	316	13	04682	04682	NUM
easat-3604	316	14	-	-	PUNCT
easat-3604	316	15	y.	y.	NOUN
easat-3604	317	1	[	[	X
easat-3604	317	2	10	10	NUM
easat-3604	317	3	]	]	PUNCT
easat-3604	317	4	k.	k.	PROPN
easat-3604	317	5	guha	guha	PROPN
easat-3604	317	6	,	,	PUNCT
easat-3604	317	7	h.	h.	PROPN
easat-3604	317	8	dutta	dutta	PROPN
easat-3604	317	9	,	,	PUNCT
easat-3604	317	10	j.	j.	PROPN
easat-3604	317	11	sateesh	sateesh	PROPN
easat-3604	317	12	,	,	PUNCT
easat-3604	317	13	s.	s.	PROPN
easat-3604	317	14	baishya	baishya	PROPN
easat-3604	317	15	,	,	PUNCT
easat-3604	317	16	and	and	CCONJ
easat-3604	317	17	k.	k.	PROPN
easat-3604	317	18	srinivasa	srinivasa	PROPN
easat-3604	317	19	rao	rao	PROPN
easat-3604	317	20	,	,	PUNCT
easat-3604	317	21	“	"	PUNCT
easat-3604	317	22	design	design	NOUN
easat-3604	317	23	and	and	CCONJ
easat-3604	317	24	analysis	analysis	NOUN
easat-3604	317	25	of	of	ADP
easat-3604	317	26	perforated	perforate	VERB
easat-3604	317	27	mems	mem	NOUN
easat-3604	317	28	resonator	resonator	NOUN
easat-3604	317	29	,	,	PUNCT
easat-3604	317	30	”	"	PUNCT
easat-3604	317	31	microsyst	microsyst	NOUN
easat-3604	317	32	.	.	PUNCT
easat-3604	318	1	technol	technol	PROPN
easat-3604	318	2	.	.	PROPN
easat-3604	318	3	,	,	PUNCT
easat-3604	318	4	vol	vol	NOUN
easat-3604	318	5	.	.	PROPN
easat-3604	319	1	27	27	NUM
easat-3604	319	2	,	,	PUNCT
easat-3604	319	3	no	no	INTJ
easat-3604	319	4	.	.	NOUN
easat-3604	319	5	2	2	NUM
easat-3604	319	6	,	,	PUNCT
easat-3604	319	7	pp	pp	ADJ
easat-3604	319	8	.	.	PUNCT
easat-3604	320	1	613–617	613–617	NUM
easat-3604	320	2	,	,	PUNCT
easat-3604	320	3	2021	2021	NUM
easat-3604	320	4	,	,	PUNCT
easat-3604	320	5	doi	doi	NOUN
easat-3604	320	6	:	:	PUNCT
easat-3604	320	7	10.1007	10.1007	NUM
easat-3604	320	8	/	/	SYM
easat-3604	320	9	s00542	s00542	NOUN
easat-3604	320	10	-	-	PUNCT
easat-3604	320	11	018	018	NUM
easat-3604	320	12	-	-	PUNCT
easat-3604	320	13	4207	4207	NUM
easat-3604	320	14	-	-	SYM
easat-3604	320	15	5	5	NUM
easat-3604	320	16	.	.	PUNCT
easat-3604	321	1	[	[	X
easat-3604	321	2	11	11	NUM
easat-3604	321	3	]	]	PUNCT
easat-3604	321	4	k.	k.	PROPN
easat-3604	321	5	guha	guha	PROPN
easat-3604	321	6	,	,	PUNCT
easat-3604	321	7	n.	n.	PROPN
easat-3604	321	8	m.	m.	PROPN
easat-3604	321	9	laskar	laskar	PROPN
easat-3604	321	10	,	,	PUNCT
easat-3604	321	11	h.	h.	PROPN
easat-3604	321	12	j.	j.	PROPN
easat-3604	321	13	gogoi	gogoi	PROPN
easat-3604	321	14	,	,	PUNCT
easat-3604	321	15	k.	k.	PROPN
easat-3604	321	16	l.	l.	PROPN
easat-3604	321	17	baishnab	baishnab	PROPN
easat-3604	321	18	,	,	PUNCT
easat-3604	321	19	and	and	CCONJ
easat-3604	321	20	k.	k.	PROPN
easat-3604	321	21	s.	s.	PROPN
easat-3604	321	22	rao	rao	PROPN
easat-3604	321	23	,	,	PUNCT
easat-3604	321	24	“	"	PUNCT
easat-3604	321	25	a	a	DET
easat-3604	321	26	new	new	ADJ
easat-3604	321	27	analytical	analytical	ADJ
easat-3604	321	28	model	model	NOUN
easat-3604	321	29	for	for	ADP
easat-3604	321	30	switching	switch	VERB
easat-3604	321	31	time	time	NOUN
easat-3604	321	32	of	of	ADP
easat-3604	321	33	a	a	DET
easat-3604	321	34	perforated	perforate	VERB
easat-3604	321	35	mems	mem	NOUN
easat-3604	321	36	switch	switch	NOUN
easat-3604	321	37	,	,	PUNCT
easat-3604	321	38	”	"	PUNCT
easat-3604	321	39	microsyst	microsyst	NOUN
easat-3604	321	40	.	.	PUNCT
easat-3604	322	1	technol	technol	PROPN
easat-3604	322	2	.	.	PROPN
easat-3604	322	3	,	,	PUNCT
easat-3604	322	4	vol	vol	NOUN
easat-3604	322	5	.	.	PROPN
easat-3604	323	1	26	26	NUM
easat-3604	323	2	,	,	PUNCT
easat-3604	323	3	no	no	INTJ
easat-3604	323	4	.	.	NOUN
easat-3604	323	5	10	10	NUM
easat-3604	323	6	,	,	PUNCT
easat-3604	323	7	pp	pp	ADJ
easat-3604	323	8	.	.	PUNCT
easat-3604	324	1	3143–3152	3143–3152	NUM
easat-3604	324	2	,	,	PUNCT
easat-3604	324	3	2020	2020	NUM
easat-3604	324	4	,	,	PUNCT
easat-3604	324	5	doi	doi	NOUN
easat-3604	324	6	:	:	PUNCT
easat-3604	324	7	10.1007	10.1007	NUM
easat-3604	324	8	/	/	SYM
easat-3604	324	9	s00542	s00542	NOUN
easat-3604	324	10	-	-	PUNCT
easat-3604	324	11	018	018	NUM
easat-3604	324	12	-	-	PUNCT
easat-3604	324	13	3803	3803	NUM
easat-3604	324	14	-	-	SYM
easat-3604	324	15	8	8	NUM
easat-3604	324	16	.	.	PUNCT
easat-3604	325	1	[	[	X
easat-3604	325	2	12	12	NUM
easat-3604	325	3	]	]	PUNCT
easat-3604	325	4	m.	m.	NOUN
easat-3604	325	5	a.	a.	NOUN
easat-3604	325	6	alazwari	alazwari	PROPN
easat-3604	325	7	,	,	PUNCT
easat-3604	325	8	a.	a.	PROPN
easat-3604	325	9	a.	a.	PROPN
easat-3604	325	10	abdelrahman	abdelrahman	PROPN
easat-3604	325	11	,	,	PUNCT
easat-3604	325	12	a.	a.	NOUN
easat-3604	325	13	wagih	wagih	PROPN
easat-3604	325	14	,	,	PUNCT
easat-3604	325	15	m.	m.	NOUN
easat-3604	325	16	a.	a.	NOUN
easat-3604	325	17	eltaher	eltaher	PROPN
easat-3604	325	18	,	,	PUNCT
easat-3604	325	19	and	and	CCONJ
easat-3604	325	20	h.	h.	PROPN
easat-3604	325	21	e.	e.	PROPN
easat-3604	325	22	abd	abd	PROPN
easat-3604	325	23	-	-	PROPN
easat-3604	325	24	el	el	PROPN
easat-3604	325	25	-	-	PUNCT
easat-3604	325	26	mottaleb	mottaleb	NOUN
easat-3604	325	27	,	,	PUNCT
easat-3604	325	28	“	"	PUNCT
easat-3604	325	29	static	static	ADJ
easat-3604	325	30	analysis	analysis	NOUN
easat-3604	325	31	of	of	ADP
easat-3604	325	32	cutout	cutout	NOUN
easat-3604	325	33	microstructures	microstructure	NOUN
easat-3604	325	34	incorporating	incorporate	VERB
easat-3604	325	35	the	the	DET
easat-3604	325	36	microstructure	microstructure	ADJ
easat-3604	325	37	and	and	CCONJ
easat-3604	325	38	surface	surface	NOUN
easat-3604	325	39	effects	effect	NOUN
easat-3604	325	40	,	,	PUNCT
easat-3604	325	41	”	"	PUNCT
easat-3604	325	42	steel	steel	NOUN
easat-3604	325	43	compos	compos	NOUN
easat-3604	325	44	.	.	PUNCT
easat-3604	326	1	struct	struct	NOUN
easat-3604	326	2	.	.	PUNCT
easat-3604	326	3	,	,	PUNCT
easat-3604	326	4	vol	vol	NOUN
easat-3604	326	5	.	.	PROPN
easat-3604	327	1	38	38	NUM
easat-3604	327	2	,	,	PUNCT
easat-3604	327	3	no	no	INTJ
easat-3604	327	4	.	.	NOUN
easat-3604	327	5	5	5	NUM
easat-3604	327	6	,	,	PUNCT
easat-3604	327	7	pp	pp	ADJ
easat-3604	327	8	.	.	PUNCT
easat-3604	328	1	583–597	583–597	NUM
easat-3604	328	2	,	,	PUNCT
easat-3604	328	3	2021	2021	NUM
easat-3604	328	4	,	,	PUNCT
easat-3604	328	5	doi	doi	NOUN
easat-3604	328	6	:	:	PUNCT
easat-3604	328	7	10.12989	10.12989	NUM
easat-3604	328	8	/	/	SYM
easat-3604	328	9	scs.2021.38.5.583	scs.2021.38.5.583	NOUN
easat-3604	328	10	.	.	PUNCT
easat-3604	329	1	[	[	X
easat-3604	329	2	13	13	NUM
easat-3604	329	3	]	]	PUNCT
easat-3604	329	4	k.	k.	PROPN
easat-3604	329	5	guha	guha	PROPN
easat-3604	329	6	et	et	PROPN
easat-3604	329	7	al	al	PROPN
easat-3604	329	8	.	.	PROPN
easat-3604	329	9	,	,	PUNCT
easat-3604	329	10	“	"	PUNCT
easat-3604	329	11	an	an	DET
easat-3604	329	12	improved	improved	ADJ
easat-3604	329	13	analytical	analytical	ADJ
easat-3604	329	14	model	model	NOUN
easat-3604	329	15	for	for	ADP
easat-3604	329	16	static	static	ADJ
easat-3604	329	17	pull	pull	NOUN
easat-3604	329	18	-	-	PUNCT
easat-3604	329	19	in	in	ADP
easat-3604	329	20	voltage	voltage	NOUN
easat-3604	329	21	of	of	ADP
easat-3604	329	22	a	a	DET
easat-3604	329	23	flexured	flexure	VERB
easat-3604	329	24	mems	mem	NOUN
easat-3604	329	25	switch	switch	NOUN
easat-3604	329	26	,	,	PUNCT
easat-3604	329	27	”	"	PUNCT
easat-3604	329	28	microsyst	microsyst	NOUN
easat-3604	329	29	.	.	PUNCT
easat-3604	330	1	technol	technol	PROPN
easat-3604	330	2	.	.	PROPN
easat-3604	330	3	,	,	PUNCT
easat-3604	330	4	vol	vol	NOUN
easat-3604	330	5	.	.	PROPN
easat-3604	331	1	26	26	NUM
easat-3604	331	2	,	,	PUNCT
easat-3604	331	3	no	no	INTJ
easat-3604	331	4	.	.	NOUN
easat-3604	331	5	10	10	NUM
easat-3604	331	6	,	,	PUNCT
easat-3604	331	7	pp	pp	ADJ
easat-3604	331	8	.	.	PUNCT
easat-3604	332	1	3213–3227	3213–3227	NUM
easat-3604	332	2	,	,	PUNCT
easat-3604	332	3	2020	2020	NUM
easat-3604	332	4	,	,	PUNCT
easat-3604	332	5	doi	doi	NOUN
easat-3604	332	6	:	:	PUNCT
easat-3604	332	7	10.1007	10.1007	NUM
easat-3604	332	8	/	/	SYM
easat-3604	332	9	s00542	s00542	NOUN
easat-3604	332	10	-	-	PUNCT
easat-3604	332	11	018	018	NUM
easat-3604	332	12	-	-	PUNCT
easat-3604	332	13	3911	3911	NUM
easat-3604	332	14	-	-	SYM
easat-3604	332	15	5	5	NUM
easat-3604	332	16	.	.	PUNCT
easat-3604	333	1	[	[	X
easat-3604	333	2	14	14	NUM
easat-3604	333	3	]	]	X
easat-3604	333	4	l.	l.	PROPN
easat-3604	333	5	luschi	luschi	PROPN
easat-3604	333	6	and	and	CCONJ
easat-3604	333	7	f.	f.	PROPN
easat-3604	333	8	pieri	pieri	PROPN
easat-3604	333	9	,	,	PUNCT
easat-3604	333	10	“	"	PUNCT
easat-3604	333	11	an	an	DET
easat-3604	333	12	analytical	analytical	ADJ
easat-3604	333	13	model	model	NOUN
easat-3604	333	14	for	for	ADP
easat-3604	333	15	the	the	DET
easat-3604	333	16	determination	determination	NOUN
easat-3604	333	17	of	of	ADP
easat-3604	333	18	resonance	resonance	NOUN
easat-3604	333	19	frequencies	frequency	NOUN
easat-3604	333	20	of	of	ADP
easat-3604	333	21	perforated	perforated	ADJ
easat-3604	333	22	beams	beam	NOUN
easat-3604	333	23	,	,	PUNCT
easat-3604	333	24	”	"	PUNCT
easat-3604	333	25	j.	j.	PROPN
easat-3604	333	26	micromechanics	micromechanics	PROPN
easat-3604	333	27	microengineering	microengineering	PROPN
easat-3604	333	28	,	,	PUNCT
easat-3604	333	29	vol	vol	NOUN
easat-3604	333	30	.	.	PROPN
easat-3604	333	31	24	24	NUM
easat-3604	333	32	,	,	PUNCT
easat-3604	333	33	no	no	INTJ
easat-3604	333	34	.	.	NOUN
easat-3604	333	35	5	5	NUM
easat-3604	333	36	,	,	PUNCT
easat-3604	333	37	2014	2014	NUM
easat-3604	333	38	,	,	PUNCT
easat-3604	333	39	doi	doi	NOUN
easat-3604	333	40	:	:	PUNCT
easat-3604	333	41	10.1088/0960	10.1088/0960	NUM
easat-3604	333	42	-	-	SYM
easat-3604	333	43	1317/24/5/055004	1317/24/5/055004	NUM
easat-3604	333	44	.	.	PUNCT
easat-3604	334	1	[	[	X
easat-3604	334	2	15	15	NUM
easat-3604	334	3	]	]	X
easat-3604	334	4	a.	a.	NOUN
easat-3604	334	5	a.	a.	PROPN
easat-3604	334	6	abdelrahman	abdelrahman	PROPN
easat-3604	334	7	and	and	CCONJ
easat-3604	334	8	m.	m.	NOUN
easat-3604	334	9	a.	a.	NOUN
easat-3604	334	10	eltaher	eltaher	PROPN
easat-3604	334	11	,	,	PUNCT
easat-3604	334	12	“	"	PUNCT
easat-3604	334	13	on	on	ADP
easat-3604	334	14	bending	bend	VERB
easat-3604	334	15	and	and	CCONJ
easat-3604	334	16	buckling	buckling	NOUN
easat-3604	334	17	responses	response	NOUN
easat-3604	334	18	of	of	ADP
easat-3604	334	19	perforated	perforated	ADJ
easat-3604	334	20	nanobeams	nanobeam	NOUN
easat-3604	334	21	including	include	VERB
easat-3604	334	22	surface	surface	NOUN
easat-3604	334	23	energy	energy	NOUN
easat-3604	334	24	for	for	ADP
easat-3604	334	25	different	different	ADJ
easat-3604	334	26	beams	beam	NOUN
easat-3604	334	27	theories	theory	NOUN
easat-3604	334	28	,	,	PUNCT
easat-3604	334	29	”	"	PUNCT
easat-3604	334	30	eng	eng	PROPN
easat-3604	334	31	.	.	PUNCT
easat-3604	334	32	comput	comput	PROPN
easat-3604	334	33	.	.	PUNCT
easat-3604	334	34	,	,	PUNCT
easat-3604	334	35	vol	vol	NOUN
easat-3604	334	36	.	.	PROPN
easat-3604	334	37	38	38	NUM
easat-3604	334	38	,	,	PUNCT
easat-3604	334	39	no	no	INTJ
easat-3604	334	40	.	.	NOUN
easat-3604	334	41	3	3	NUM
easat-3604	334	42	,	,	PUNCT
easat-3604	334	43	pp	pp	PROPN
easat-3604	334	44	.	.	PUNCT
easat-3604	334	45	2385–2411	2385–2411	NUM
easat-3604	334	46	,	,	PUNCT
easat-3604	334	47	2022	2022	NUM
easat-3604	334	48	,	,	PUNCT
easat-3604	334	49	doi	doi	NOUN
easat-3604	334	50	:	:	PUNCT
easat-3604	334	51	10.1007	10.1007	NUM
easat-3604	334	52	/	/	SYM
easat-3604	334	53	s00366	s00366	NUM
easat-3604	334	54	-	-	PUNCT
easat-3604	334	55	020	020	NUM
easat-3604	334	56	-	-	PUNCT
easat-3604	334	57	012118	012118	NUM
easat-3604	334	58	.	.	PUNCT
easat-3604	335	1	[	[	X
easat-3604	335	2	16	16	NUM
easat-3604	335	3	]	]	X
easat-3604	335	4	i.	i.	NOUN
easat-3604	335	5	esen	esen	PROPN
easat-3604	335	6	,	,	PUNCT
easat-3604	335	7	a.	a.	NOUN
easat-3604	335	8	a.	a.	PROPN
easat-3604	335	9	abdelrahman	abdelrahman	PROPN
easat-3604	335	10	,	,	PUNCT
easat-3604	335	11	and	and	CCONJ
easat-3604	335	12	m.	m.	NOUN
easat-3604	335	13	a.	a.	NOUN
easat-3604	335	14	eltaher	eltaher	PROPN
easat-3604	335	15	,	,	PUNCT
easat-3604	335	16	“	"	PUNCT
easat-3604	335	17	dynamics	dynamic	VERB
easat-3604	335	18	analysis	analysis	NOUN
easat-3604	335	19	of	of	ADP
easat-3604	335	20	timoshenko	timoshenko	NOUN
easat-3604	335	21	perforated	perforate	VERB
easat-3604	335	22	microbeams	microbeam	NOUN
easat-3604	335	23	under	under	ADP
easat-3604	335	24	moving	move	VERB
easat-3604	335	25	loads	load	NOUN
easat-3604	335	26	,	,	PUNCT
easat-3604	335	27	”	"	PUNCT
easat-3604	335	28	eng	eng	PROPN
easat-3604	335	29	.	.	PUNCT
easat-3604	336	1	comput	comput	PROPN
easat-3604	336	2	.	.	PUNCT
easat-3604	337	1	,	,	PUNCT
easat-3604	337	2	vol	vol	NOUN
easat-3604	337	3	.	.	PROPN
easat-3604	338	1	38	38	NUM
easat-3604	338	2	,	,	PUNCT
easat-3604	338	3	no	no	INTJ
easat-3604	338	4	.	.	NOUN
easat-3604	338	5	3	3	NUM
easat-3604	338	6	,	,	PUNCT
easat-3604	338	7	pp	pp	ADJ
easat-3604	338	8	.	.	PUNCT
easat-3604	339	1	2413–2429	2413–2429	NUM
easat-3604	339	2	,	,	PUNCT
easat-3604	339	3	2022	2022	NUM
easat-3604	339	4	,	,	PUNCT
easat-3604	339	5	doi	doi	NOUN
easat-3604	339	6	:	:	PUNCT
easat-3604	339	7	10.1007	10.1007	NUM
easat-3604	339	8	/	/	SYM
easat-3604	339	9	s00366	s00366	NUM
easat-3604	339	10	-	-	PUNCT
easat-3604	339	11	020	020	NUM
easat-3604	339	12	-	-	PUNCT
easat-3604	339	13	01212	01212	NUM
easat-3604	339	14	-	-	PUNCT
easat-3604	339	15	7	7	NUM
easat-3604	339	16	.	.	PUNCT
easat-3604	340	1	[	[	X
easat-3604	340	2	17	17	NUM
easat-3604	340	3	]	]	X
easat-3604	340	4	w.	w.	PROPN
easat-3604	340	5	n.	n.	PROPN
easat-3604	340	6	sharpe	sharpe	PROPN
easat-3604	340	7	,	,	PUNCT
easat-3604	340	8	r.	r.	PROPN
easat-3604	340	9	vaidyanathan	vaidyanathan	PROPN
easat-3604	340	10	,	,	PUNCT
easat-3604	340	11	b.	b.	PROPN
easat-3604	340	12	yuan	yuan	PROPN
easat-3604	340	13	,	,	PUNCT
easat-3604	340	14	g.	g.	PROPN
easat-3604	340	15	bao	bao	PROPN
easat-3604	340	16	,	,	PUNCT
easat-3604	340	17	and	and	CCONJ
easat-3604	340	18	r.	r.	PROPN
easat-3604	340	19	l.	l.	PROPN
easat-3604	340	20	edwards	edwards	PROPN
easat-3604	340	21	,	,	PUNCT
easat-3604	340	22	“	"	PUNCT
easat-3604	340	23	effect	effect	NOUN
easat-3604	340	24	of	of	ADP
easat-3604	340	25	etch	etch	VERB
easat-3604	340	26	holes	hole	NOUN
easat-3604	340	27	on	on	ADP
easat-3604	340	28	the	the	DET
easat-3604	340	29	mechanical	mechanical	ADJ
easat-3604	340	30	properties	property	NOUN
easat-3604	340	31	of	of	ADP
easat-3604	340	32	polysilicon	polysilicon	NOUN
easat-3604	340	33	,	,	PUNCT
easat-3604	340	34	”	"	PUNCT
easat-3604	340	35	j.	j.	PROPN
easat-3604	340	36	vac	vac	PROPN
easat-3604	340	37	.	.	PUNCT
easat-3604	341	1	sci	sci	PROPN
easat-3604	341	2	.	.	PROPN
easat-3604	341	3	technol	technol	PROPN
easat-3604	341	4	.	.	PUNCT
easat-3604	342	1	b	b	PROPN
easat-3604	342	2	microelectron	microelectron	PROPN
easat-3604	342	3	.	.	PUNCT
easat-3604	343	1	nanom	nanom	PROPN
easat-3604	343	2	.	.	PUNCT
easat-3604	343	3	struct	struct	NOUN
easat-3604	343	4	.	.	PUNCT
easat-3604	344	1	process	process	NOUN
easat-3604	344	2	.	.	PUNCT
easat-3604	345	1	meas	meas	PROPN
easat-3604	345	2	.	.	PUNCT
easat-3604	346	1	phenom	phenom	PROPN
easat-3604	346	2	.	.	PUNCT
easat-3604	346	3	,	,	PUNCT
easat-3604	346	4	vol	vol	NOUN
easat-3604	346	5	.	.	PROPN
easat-3604	346	6	15	15	NUM
easat-3604	346	7	,	,	PUNCT
easat-3604	346	8	no	no	INTJ
easat-3604	346	9	.	.	NOUN
easat-3604	346	10	5	5	NUM
easat-3604	346	11	,	,	PUNCT
easat-3604	346	12	pp	pp	ADJ
easat-3604	346	13	.	.	PUNCT
easat-3604	347	1	1599–1603	1599–1603	NOUN
easat-3604	347	2	,	,	PUNCT
easat-3604	347	3	1997	1997	NUM
easat-3604	347	4	,	,	PUNCT
easat-3604	347	5	doi	doi	NOUN
easat-3604	347	6	:	:	PUNCT
easat-3604	347	7	10.1116/1.589554	10.1116/1.589554	NUM
easat-3604	347	8	.	.	PUNCT
easat-3604	348	1	[	[	X
easat-3604	348	2	18	18	NUM
easat-3604	348	3	]	]	X
easat-3604	348	4	v.	v.	PROPN
easat-3604	348	5	l.	l.	PROPN
easat-3604	348	6	rabinovich	rabinovich	PROPN
easat-3604	348	7	,	,	PUNCT
easat-3604	348	8	r.	r.	PROPN
easat-3604	348	9	k.	k.	PROPN
easat-3604	348	10	gupta	gupta	PROPN
easat-3604	348	11	,	,	PUNCT
easat-3604	348	12	and	and	CCONJ
easat-3604	348	13	s.	s.	PROPN
easat-3604	348	14	d.	d.	PROPN
easat-3604	348	15	senturia	senturia	PROPN
easat-3604	348	16	,	,	PUNCT
easat-3604	348	17	“	"	PUNCT
easat-3604	348	18	effect	effect	NOUN
easat-3604	348	19	of	of	ADP
easat-3604	348	20	release	release	NOUN
easat-3604	348	21	-	-	PUNCT
easat-3604	348	22	etch	etch	NOUN
easat-3604	348	23	holes	hole	NOUN
easat-3604	348	24	on	on	ADP
easat-3604	348	25	the	the	DET
easat-3604	348	26	electromechanical	electromechanical	ADJ
easat-3604	348	27	behavior	behavior	NOUN
easat-3604	348	28	of	of	ADP
easat-3604	348	29	mems	mem	NOUN
easat-3604	348	30	structures	structure	NOUN
easat-3604	348	31	,	,	PUNCT
easat-3604	348	32	”	"	PUNCT
easat-3604	348	33	int	int	NOUN
easat-3604	348	34	.	.	PUNCT
easat-3604	348	35	conf	conf	NOUN
easat-3604	348	36	.	.	PUNCT
easat-3604	349	1	solid	solid	ADJ
easat-3604	349	2	-	-	PUNCT
easat-3604	349	3	state	state	NOUN
easat-3604	349	4	sensors	sensor	NOUN
easat-3604	349	5	actuators	actuator	NOUN
easat-3604	349	6	,	,	PUNCT
easat-3604	349	7	proc	proc	NOUN
easat-3604	349	8	.	.	PROPN
easat-3604	349	9	,	,	PUNCT
easat-3604	349	10	vol	vol	NOUN
easat-3604	349	11	.	.	PROPN
easat-3604	349	12	2	2	NUM
easat-3604	349	13	,	,	PUNCT
easat-3604	349	14	pp	pp	ADJ
easat-3604	349	15	.	.	PUNCT
easat-3604	349	16	1125–1128	1125–1128	NUM
easat-3604	349	17	,	,	PUNCT
easat-3604	349	18	1997	1997	NUM
easat-3604	349	19	,	,	PUNCT
easat-3604	349	20	doi	doi	NOUN
easat-3604	349	21	:	:	PUNCT
easat-3604	349	22	10.1109	10.1109	NUM
easat-3604	349	23	/	/	SYM
easat-3604	349	24	sensor.1997.635400	sensor.1997.635400	NOUN
easat-3604	349	25	.	.	PUNCT
easat-3604	350	1	[	[	X
easat-3604	350	2	19	19	NUM
easat-3604	350	3	]	]	PUNCT
easat-3604	350	4	s.	s.	PROPN
easat-3604	350	5	s.	s.	PROPN
easat-3604	350	6	mohite	mohite	PROPN
easat-3604	350	7	,	,	PUNCT
easat-3604	350	8	h.	h.	PROPN
easat-3604	350	9	kesari	kesari	PROPN
easat-3604	350	10	,	,	PUNCT
easat-3604	350	11	v.	v.	PROPN
easat-3604	350	12	r.	r.	PROPN
easat-3604	350	13	sonti	sonti	PROPN
easat-3604	350	14	,	,	PUNCT
easat-3604	350	15	and	and	CCONJ
easat-3604	350	16	r.	r.	PROPN
easat-3604	350	17	pratap	pratap	PROPN
easat-3604	350	18	,	,	PUNCT
easat-3604	350	19	“	"	PUNCT
easat-3604	350	20	analytical	analytical	ADJ
easat-3604	350	21	solutions	solution	NOUN
easat-3604	350	22	for	for	ADP
easat-3604	350	23	the	the	DET
easat-3604	350	24	stiffness	stiffness	NOUN
easat-3604	350	25	and	and	CCONJ
easat-3604	350	26	damping	damp	VERB
easat-3604	350	27	coefficients	coefficient	NOUN
easat-3604	350	28	of	of	ADP
easat-3604	350	29	squeeze	squeeze	NOUN
easat-3604	350	30	films	film	NOUN
easat-3604	350	31	in	in	ADP
easat-3604	350	32	mems	mems	ADJ
easat-3604	350	33	devices	device	NOUN
easat-3604	350	34	with	with	ADP
easat-3604	350	35	perforated	perforate	VERB
easat-3604	350	36	back	back	NOUN
easat-3604	350	37	plates	plate	NOUN
easat-3604	350	38	,	,	PUNCT
easat-3604	350	39	”	"	PUNCT
easat-3604	350	40	j.	j.	PROPN
easat-3604	350	41	micromechanics	micromechanics	PROPN
easat-3604	350	42	microengineering	microengineering	PROPN
easat-3604	350	43	,	,	PUNCT
easat-3604	350	44	vol	vol	NOUN
easat-3604	350	45	.	.	PROPN
easat-3604	350	46	15	15	NUM
easat-3604	350	47	,	,	PUNCT
easat-3604	350	48	no	no	INTJ
easat-3604	350	49	.	.	NOUN
easat-3604	350	50	11	11	NUM
easat-3604	350	51	,	,	PUNCT
easat-3604	350	52	pp	pp	ADJ
easat-3604	350	53	.	.	PUNCT
easat-3604	351	1	2083–2092	2083–2092	NOUN
easat-3604	351	2	,	,	PUNCT
easat-3604	351	3	2005	2005	NUM
easat-3604	351	4	,	,	PUNCT
easat-3604	351	5	doi	doi	NOUN
easat-3604	351	6	:	:	PUNCT
easat-3604	351	7	10.1088/0960	10.1088/0960	NUM
easat-3604	351	8	-	-	PUNCT
easat-3604	351	9	1317/15/11/013	1317/15/11/013	NUM
easat-3604	351	10	.	.	PUNCT
easat-3604	352	1	[	[	X
easat-3604	352	2	20	20	NUM
easat-3604	352	3	]	]	PUNCT
easat-3604	352	4	w.	w.	PROPN
easat-3604	352	5	h.	h.	PROPN
easat-3604	352	6	tu	tu	PROPN
easat-3604	352	7	,	,	PUNCT
easat-3604	352	8	w.	w.	PROPN
easat-3604	352	9	c.	c.	PROPN
easat-3604	352	10	chu	chu	PROPN
easat-3604	352	11	,	,	PUNCT
easat-3604	352	12	c.	c.	PROPN
easat-3604	352	13	k.	k.	PROPN
easat-3604	352	14	lee	lee	PROPN
easat-3604	352	15	,	,	PUNCT
easat-3604	352	16	p.	p.	PROPN
easat-3604	352	17	z.	z.	PROPN
easat-3604	352	18	chang	chang	PROPN
easat-3604	352	19	,	,	PUNCT
easat-3604	352	20	and	and	CCONJ
easat-3604	352	21	y.	y.	PROPN
easat-3604	352	22	c.	c.	PROPN
easat-3604	352	23	hu	hu	PROPN
easat-3604	352	24	,	,	PUNCT
easat-3604	352	25	“	"	PUNCT
easat-3604	352	26	effects	effect	NOUN
easat-3604	352	27	of	of	ADP
easat-3604	352	28	etching	etch	VERB
easat-3604	352	29	holes	hole	NOUN
easat-3604	352	30	on	on	ADP
easat-3604	352	31	complementary	complementary	ADJ
easat-3604	352	32	metal	metal	NOUN
easat-3604	352	33	oxide	oxide	NOUN
easat-3604	352	34	semiconductormicroelectromechanical	semiconductormicroelectromechanical	ADJ
easat-3604	352	35	systems	system	NOUN
easat-3604	352	36	capacitive	capacitive	ADJ
easat-3604	352	37	structure	structure	NOUN
easat-3604	352	38	,	,	PUNCT
easat-3604	352	39	”	"	PUNCT
easat-3604	352	40	j.	j.	PROPN
easat-3604	352	41	intell	intell	PROPN
easat-3604	352	42	.	.	PUNCT
easat-3604	353	1	mater	mater	PROPN
easat-3604	353	2	.	.	PUNCT
easat-3604	354	1	syst	syst	PROPN
easat-3604	354	2	.	.	PUNCT
easat-3604	354	3	struct	struct	NOUN
easat-3604	354	4	.	.	PUNCT
easat-3604	354	5	,	,	PUNCT
easat-3604	354	6	vol	vol	NOUN
easat-3604	354	7	.	.	PROPN
easat-3604	355	1	24	24	NUM
easat-3604	355	2	,	,	PUNCT
easat-3604	355	3	no	no	INTJ
easat-3604	355	4	.	.	NOUN
easat-3604	355	5	3	3	NUM
easat-3604	355	6	,	,	PUNCT
easat-3604	355	7	pp	pp	ADJ
easat-3604	355	8	.	.	PUNCT
easat-3604	356	1	310–317	310–317	NUM
easat-3604	356	2	,	,	PUNCT
easat-3604	356	3	2013	2013	NUM
easat-3604	356	4	,	,	PUNCT
easat-3604	356	5	doi	doi	NOUN
easat-3604	356	6	:	:	PUNCT
easat-3604	356	7	10.1177/1045389x12449917	10.1177/1045389x12449917	PROPN
easat-3604	356	8	.	.	PUNCT
easat-3604	357	1	https://creativecommons.org/licenses/by/4.0/	https://creativecommons.org/licenses/by/4.0/	PROPN
easat-3604	357	2	7418	7418	PROPN
easat-3604	357	3	edelweiss	edelweiss	PROPN
easat-3604	357	4	applied	apply	VERB
easat-3604	357	5	science	science	NOUN
easat-3604	357	6	and	and	CCONJ
easat-3604	357	7	technology	technology	NOUN
easat-3604	357	8	issn	issn	PROPN
easat-3604	357	9	:	:	PUNCT
easat-3604	357	10	2576	2576	NUM
easat-3604	357	11	-	-	SYM
easat-3604	357	12	8484	8484	NUM
easat-3604	357	13	vol	vol	NOUN
easat-3604	357	14	.	.	PROPN
easat-3604	357	15	8	8	NUM
easat-3604	357	16	,	,	PUNCT
easat-3604	357	17	no	no	INTJ
easat-3604	357	18	.	.	NOUN
easat-3604	357	19	6	6	NUM
easat-3604	357	20	:	:	SYM
easat-3604	357	21	7404	7404	NUM
easat-3604	357	22	-	-	SYM
easat-3604	357	23	7418	7418	NUM
easat-3604	357	24	,	,	PUNCT
easat-3604	357	25	2024	2024	NUM
easat-3604	357	26	doi	doi	NOUN
easat-3604	357	27	:	:	PUNCT
easat-3604	357	28	10.55214/25768484.v8i6.3604	10.55214/25768484.v8i6.3604	NUM
easat-3604	357	29	©	©	PROPN
easat-3604	357	30	2024	2024	NUM
easat-3604	357	31	by	by	ADP
easat-3604	357	32	the	the	DET
easat-3604	357	33	author	author	NOUN
easat-3604	357	34	;	;	PUNCT
easat-3604	357	35	licensee	licensee	PROPN
easat-3604	357	36	learning	learning	NOUN
easat-3604	357	37	gate	gate	NOUN
easat-3604	358	1	[	[	X
easat-3604	358	2	21	21	NUM
easat-3604	358	3	]	]	X
easat-3604	358	4	n.	n.	PROPN
easat-3604	358	5	van	van	PROPN
easat-3604	358	6	dung	dung	PROPN
easat-3604	358	7	,	,	PUNCT
easat-3604	358	8	l.	l.	PROPN
easat-3604	358	9	m.	m.	PROPN
easat-3604	358	10	thai	thai	PROPN
easat-3604	358	11	,	,	PUNCT
easat-3604	358	12	n.	n.	NOUN
easat-3604	358	13	t.	t.	NOUN
easat-3604	358	14	dung	dung	NOUN
easat-3604	358	15	,	,	PUNCT
easat-3604	358	16	and	and	CCONJ
easat-3604	358	17	p.	p.	PROPN
easat-3604	358	18	van	van	PROPN
easat-3604	358	19	minh	minh	PROPN
easat-3604	358	20	,	,	PUNCT
easat-3604	358	21	“	"	PUNCT
easat-3604	358	22	free	free	ADJ
easat-3604	358	23	vibration	vibration	NOUN
easat-3604	358	24	response	response	NOUN
easat-3604	358	25	of	of	ADP
easat-3604	358	26	micro	micro	PROPN
easat-3604	358	27	fg	fg	PROPN
easat-3604	358	28	beams	beam	NOUN
easat-3604	358	29	taking	take	VERB
easat-3604	358	30	the	the	DET
easat-3604	358	31	initial	initial	ADJ
easat-3604	358	32	geometrical	geometrical	ADJ
easat-3604	358	33	imperfection	imperfection	NOUN
easat-3604	358	34	into	into	ADP
easat-3604	358	35	consideration	consideration	NOUN
easat-3604	358	36	,	,	PUNCT
easat-3604	358	37	”	"	PUNCT
easat-3604	358	38	lect	lect	NOUN
easat-3604	358	39	.	.	PUNCT
easat-3604	359	1	notes	note	NOUN
easat-3604	359	2	mech	mech	PROPN
easat-3604	359	3	.	.	PUNCT
easat-3604	360	1	eng	eng	PROPN
easat-3604	360	2	.	.	PROPN
easat-3604	360	3	,	,	PUNCT
easat-3604	360	4	pp	pp	ADP
easat-3604	360	5	.	.	PUNCT
easat-3604	361	1	197–203	197–203	NUM
easat-3604	361	2	,	,	PUNCT
easat-3604	361	3	2023	2023	NUM
easat-3604	361	4	,	,	PUNCT
easat-3604	361	5	doi	doi	NOUN
easat-3604	361	6	:	:	PUNCT
easat-3604	361	7	10.1007/978	10.1007/978	NUM
easat-3604	361	8	-	-	SYM
easat-3604	361	9	3031	3031	NUM
easat-3604	361	10	-	-	PUNCT
easat-3604	361	11	31824	31824	NUM
easat-3604	361	12	-	-	SYM
easat-3604	361	13	5_24	5_24	NUM
easat-3604	361	14	.	.	PUNCT
easat-3604	362	1	[	[	X
easat-3604	362	2	22	22	NUM
easat-3604	362	3	]	]	PUNCT
easat-3604	362	4	“	"	PUNCT
easat-3604	362	5	on	on	ADP
easat-3604	362	6	the	the	DET
easat-3604	362	7	free	free	ADJ
easat-3604	362	8	vibration	vibration	NOUN
easat-3604	362	9	analysis	analysis	NOUN
easat-3604	362	10	of	of	ADP
easat-3604	362	11	micro	micro	NOUN
easat-3604	362	12	fg	fg	PROPN
easat-3604	362	13	beams	beam	NOUN
easat-3604	362	14	considering	consider	VERB
easat-3604	362	15	the	the	DET
easat-3604	362	16	initial	initial	ADJ
easat-3604	362	17	geometrical	geometrical	ADJ
easat-3604	362	18	imperfection	imperfection	NOUN
easat-3604	362	19	”	"	PUNCT
easat-3604	362	20	.	.	PUNCT
easat-3604	363	1	[	[	X
easat-3604	363	2	23	23	NUM
easat-3604	363	3	]	]	PUNCT
easat-3604	363	4	t.	t.	PROPN
easat-3604	363	5	c.	c.	PROPN
easat-3604	363	6	n.	n.	PROPN
easat-3604	363	7	nguyen	nguyen	PROPN
easat-3604	363	8	,	,	PUNCT
easat-3604	363	9	“	"	PUNCT
easat-3604	363	10	static	static	ADJ
easat-3604	363	11	bending	bend	VERB
easat-3604	363	12	analysis	analysis	NOUN
easat-3604	363	13	of	of	ADP
easat-3604	363	14	variable	variable	ADJ
easat-3604	363	15	thickness	thickness	NOUN
easat-3604	363	16	microplates	microplate	NOUN
easat-3604	363	17	using	use	VERB
easat-3604	363	18	the	the	DET
easat-3604	363	19	finite	finite	ADJ
easat-3604	363	20	element	element	NOUN
easat-3604	363	21	method	method	NOUN
easat-3604	363	22	and	and	CCONJ
easat-3604	363	23	modified	modify	VERB
easat-3604	363	24	couple	couple	NOUN
easat-3604	363	25	stress	stress	NOUN
easat-3604	363	26	theory	theory	NOUN
easat-3604	363	27	,	,	PUNCT
easat-3604	363	28	”	"	PUNCT
easat-3604	363	29	j.	j.	PROPN
easat-3604	363	30	sci	sci	PROPN
easat-3604	363	31	.	.	PUNCT
easat-3604	363	32	tech	tech	PROPN
easat-3604	363	33	.	.	PUNCT
easat-3604	363	34	,	,	PUNCT
easat-3604	363	35	vol	vol	NOUN
easat-3604	363	36	.	.	PROPN
easat-3604	363	37	17	17	NUM
easat-3604	363	38	,	,	PUNCT
easat-3604	363	39	no	no	INTJ
easat-3604	363	40	.	.	NOUN
easat-3604	363	41	3	3	NUM
easat-3604	363	42	,	,	PUNCT
easat-3604	363	43	2022	2022	NUM
easat-3604	363	44	,	,	PUNCT
easat-3604	363	45	doi	doi	NOUN
easat-3604	363	46	:	:	PUNCT
easat-3604	363	47	10.56651	10.56651	NUM
easat-3604	363	48	/	/	SYM
easat-3604	363	49	lqdtu.jst.v17.n03.351	lqdtu.jst.v17.n03.351	NOUN
easat-3604	363	50	.	.	PUNCT
easat-3604	364	1	[	[	X
easat-3604	364	2	24	24	NUM
easat-3604	364	3	]	]	PUNCT
easat-3604	364	4	t.	t.	PROPN
easat-3604	364	5	ozaki	ozaki	PROPN
easat-3604	364	6	,	,	PUNCT
easat-3604	364	7	n.	n.	PROPN
easat-3604	364	8	ohta	ohta	NOUN
easat-3604	364	9	,	,	PUNCT
easat-3604	364	10	and	and	CCONJ
easat-3604	364	11	m.	m.	NOUN
easat-3604	364	12	fujiyoshi	fujiyoshi	PROPN
easat-3604	364	13	,	,	PUNCT
easat-3604	364	14	“	"	PUNCT
easat-3604	364	15	analytical	analytical	ADJ
easat-3604	364	16	modeling	modeling	NOUN
easat-3604	364	17	of	of	ADP
easat-3604	364	18	a	a	DET
easat-3604	364	19	mems	mem	NOUN
easat-3604	364	20	beam	beam	NOUN
easat-3604	364	21	resonator	resonator	NOUN
easat-3604	364	22	with	with	ADP
easat-3604	364	23	release	release	NOUN
easat-3604	364	24	-	-	PUNCT
easat-3604	364	25	etch	etch	NOUN
easat-3604	364	26	holes	hole	NOUN
easat-3604	364	27	,	,	PUNCT
easat-3604	364	28	”	"	PUNCT
easat-3604	364	29	j.	j.	PROPN
easat-3604	364	30	micromechanics	micromechanics	PROPN
easat-3604	364	31	microengineering	microengineering	PROPN
easat-3604	364	32	,	,	PUNCT
easat-3604	364	33	vol	vol	NOUN
easat-3604	364	34	.	.	PROPN
easat-3604	364	35	32	32	NUM
easat-3604	364	36	,	,	PUNCT
easat-3604	364	37	no	no	INTJ
easat-3604	364	38	.	.	NOUN
easat-3604	364	39	9	9	NUM
easat-3604	364	40	,	,	PUNCT
easat-3604	364	41	2022	2022	NUM
easat-3604	364	42	,	,	PUNCT
easat-3604	364	43	doi	doi	NOUN
easat-3604	364	44	:	:	PUNCT
easat-3604	364	45	10.1088/1361	10.1088/1361	NUM
easat-3604	364	46	-	-	SYM
easat-3604	364	47	6439	6439	NUM
easat-3604	364	48	/	/	SYM
easat-3604	364	49	ac809a	ac809a	PROPN
easat-3604	364	50	.	.	PUNCT
easat-3604	365	1	[	[	X
easat-3604	365	2	25	25	NUM
easat-3604	365	3	]	]	X
easat-3604	365	4	h.	h.	PROPN
easat-3604	365	5	benaroya	benaroya	PROPN
easat-3604	365	6	,	,	PUNCT
easat-3604	365	7	t.	t.	PROPN
easat-3604	365	8	wei	wei	PROPN
easat-3604	365	9	,	,	PUNCT
easat-3604	365	10	and	and	CCONJ
easat-3604	365	11	s.	s.	PROPN
easat-3604	365	12	han	han	PROPN
easat-3604	365	13	,	,	PUNCT
easat-3604	365	14	“	"	PUNCT
easat-3604	365	15	dynamics	dynamic	NOUN
easat-3604	365	16	of	of	ADP
easat-3604	365	17	transversely	transversely	NOUN
easat-3604	365	18	vibrating	vibrating	NOUN
easat-3604	365	19	beams	beam	NOUN
easat-3604	365	20	using	use	VERB
easat-3604	365	21	four	four	NUM
easat-3604	365	22	engineering	engineering	NOUN
easat-3604	365	23	theories	theory	NOUN
easat-3604	365	24	,	,	PUNCT
easat-3604	365	25	”	"	PUNCT
easat-3604	365	26	j.	j.	PROPN
easat-3604	365	27	sound	sound	PROPN
easat-3604	365	28	vib	vib	PROPN
easat-3604	365	29	.	.	PROPN
easat-3604	365	30	,	,	PUNCT
easat-3604	365	31	vol	vol	NOUN
easat-3604	365	32	.	.	PROPN
easat-3604	365	33	225	225	NUM
easat-3604	365	34	,	,	PUNCT
easat-3604	365	35	no	no	INTJ
easat-3604	365	36	.	.	NOUN
easat-3604	365	37	5	5	NUM
easat-3604	365	38	,	,	PUNCT
easat-3604	365	39	pp	pp	ADJ
easat-3604	365	40	.	.	PUNCT
easat-3604	366	1	935–988	935–988	NUM
easat-3604	366	2	,	,	PUNCT
easat-3604	366	3	1999	1999	NUM
easat-3604	366	4	.	.	PUNCT
easat-3604	367	1	[	[	X
easat-3604	367	2	26	26	NUM
easat-3604	367	3	]	]	X
easat-3604	367	4	y.	y.	NOUN
easat-3604	367	5	song	song	PROPN
easat-3604	367	6	,	,	PUNCT
easat-3604	367	7	t.	t.	PROPN
easat-3604	367	8	kim	kim	PROPN
easat-3604	367	9	,	,	PUNCT
easat-3604	367	10	and	and	CCONJ
easat-3604	367	11	u.	u.	PROPN
easat-3604	367	12	lee	lee	PROPN
easat-3604	367	13	,	,	PUNCT
easat-3604	367	14	“	"	PUNCT
easat-3604	367	15	vibration	vibration	NOUN
easat-3604	367	16	of	of	ADP
easat-3604	367	17	a	a	DET
easat-3604	367	18	beam	beam	NOUN
easat-3604	367	19	subjected	subject	VERB
easat-3604	367	20	to	to	ADP
easat-3604	367	21	a	a	DET
easat-3604	367	22	moving	move	VERB
easat-3604	367	23	force	force	NOUN
easat-3604	367	24	:	:	PUNCT
easat-3604	367	25	frequency	frequency	NOUN
easat-3604	367	26	-	-	PUNCT
easat-3604	367	27	domain	domain	NOUN
easat-3604	367	28	spectral	spectral	ADJ
easat-3604	367	29	element	element	NOUN
easat-3604	367	30	modeling	modeling	NOUN
easat-3604	367	31	and	and	CCONJ
easat-3604	367	32	analysis	analysis	NOUN
easat-3604	367	33	,	,	PUNCT
easat-3604	367	34	”	"	PUNCT
easat-3604	367	35	int	int	NOUN
easat-3604	367	36	.	.	PUNCT
easat-3604	368	1	j.	j.	PROPN
easat-3604	368	2	mech	mech	PROPN
easat-3604	368	3	.	.	PUNCT
easat-3604	369	1	sci	sci	PROPN
easat-3604	369	2	.	.	PROPN
easat-3604	369	3	,	,	PUNCT
easat-3604	369	4	vol	vol	NOUN
easat-3604	369	5	.	.	PROPN
easat-3604	369	6	113	113	NUM
easat-3604	369	7	,	,	PUNCT
easat-3604	369	8	pp	pp	ADV
easat-3604	369	9	.	.	PUNCT
easat-3604	370	1	162–174	162–174	NUM
easat-3604	370	2	,	,	PUNCT
easat-3604	370	3	2016	2016	NUM
easat-3604	370	4	,	,	PUNCT
easat-3604	370	5	doi	doi	NOUN
easat-3604	370	6	:	:	PUNCT
easat-3604	370	7	10.1016	10.1016	NUM
easat-3604	370	8	/	/	SYM
easat-3604	370	9	j.ijmecsci.2016.04.020	j.ijmecsci.2016.04.020	PROPN
easat-3604	370	10	.	.	PUNCT
easat-3604	371	1	[	[	X
easat-3604	371	2	27	27	NUM
easat-3604	371	3	]	]	PUNCT
easat-3604	371	4	a.	a.	NOUN
easat-3604	371	5	a.	a.	PROPN
easat-3604	371	6	abdelrahman	abdelrahman	PROPN
easat-3604	371	7	,	,	PUNCT
easat-3604	371	8	m.	m.	NOUN
easat-3604	371	9	a.	a.	NOUN
easat-3604	371	10	eltaher	eltaher	PROPN
easat-3604	371	11	,	,	PUNCT
easat-3604	371	12	a.	a.	PROPN
easat-3604	371	13	m.	m.	PROPN
easat-3604	371	14	kabeel	kabeel	PROPN
easat-3604	371	15	,	,	PUNCT
easat-3604	371	16	a.	a.	PROPN
easat-3604	371	17	m.	m.	PROPN
easat-3604	371	18	abdraboh	abdraboh	PROPN
easat-3604	371	19	,	,	PUNCT
easat-3604	371	20	and	and	CCONJ
easat-3604	371	21	a.	a.	NOUN
easat-3604	371	22	a.	a.	PROPN
easat-3604	371	23	hendi	hendi	PROPN
easat-3604	371	24	,	,	PUNCT
easat-3604	371	25	“	"	PUNCT
easat-3604	371	26	free	free	ADJ
easat-3604	371	27	and	and	CCONJ
easat-3604	371	28	forced	force	VERB
easat-3604	371	29	analysis	analysis	NOUN
easat-3604	371	30	of	of	ADP
easat-3604	371	31	perforated	perforated	ADJ
easat-3604	371	32	beams	beam	NOUN
easat-3604	371	33	,	,	PUNCT
easat-3604	371	34	”	"	PUNCT
easat-3604	371	35	steel	steel	NOUN
easat-3604	371	36	compos	compos	NOUN
easat-3604	371	37	.	.	PUNCT
easat-3604	372	1	struct	struct	NOUN
easat-3604	372	2	.	.	PUNCT
easat-3604	372	3	,	,	PUNCT
easat-3604	372	4	vol	vol	NOUN
easat-3604	372	5	.	.	PROPN
easat-3604	373	1	31	31	NUM
easat-3604	373	2	,	,	PUNCT
easat-3604	373	3	no	no	INTJ
easat-3604	373	4	.	.	NOUN
easat-3604	373	5	5	5	NUM
easat-3604	373	6	,	,	PUNCT
easat-3604	373	7	pp	pp	ADJ
easat-3604	373	8	.	.	PUNCT
easat-3604	374	1	489–502	489–502	NUM
easat-3604	374	2	,	,	PUNCT
easat-3604	374	3	2019	2019	NUM
easat-3604	374	4	,	,	PUNCT
easat-3604	374	5	doi	doi	NOUN
easat-3604	374	6	:	:	PUNCT
easat-3604	374	7	10.12989	10.12989	NUM
easat-3604	374	8	/	/	SYM
easat-3604	374	9	scs.2019.31.5.489	scs.2019.31.5.489	NOUN
easat-3604	374	10	.	.	PUNCT
easat-3604	375	1	[	[	X
easat-3604	375	2	28	28	NUM
easat-3604	375	3	]	]	X
easat-3604	375	4	v.	v.	CCONJ
easat-3604	375	5	van	van	PROPN
easat-3604	375	6	the	the	PRON
easat-3604	375	7	,	,	PUNCT
easat-3604	375	8	“	"	PUNCT
easat-3604	375	9	dynamic	dynamic	ADJ
easat-3604	375	10	response	response	NOUN
easat-3604	375	11	of	of	ADP
easat-3604	375	12	the	the	DET
easat-3604	375	13	micro	micro	ADJ
easat-3604	375	14	-	-	ADJ
easat-3604	375	15	perforated	perforated	ADJ
easat-3604	375	16	crab	crab	NOUN
easat-3604	375	17	beam	beam	NOUN
easat-3604	375	18	used	use	VERB
easat-3604	375	19	in	in	ADP
easat-3604	375	20	mems	mems	ADJ
easat-3604	375	21	vibratory	vibratory	ADJ
easat-3604	375	22	gyroscope	gyroscope	NOUN
easat-3604	375	23	device	device	NOUN
easat-3604	375	24	,	,	PUNCT
easat-3604	375	25	”	"	PUNCT
easat-3604	375	26	vietnam	vietnam	PROPN
easat-3604	375	27	j.	j.	PROPN
easat-3604	375	28	mech	mech	PROPN
easat-3604	375	29	.	.	PROPN
easat-3604	375	30	,	,	PUNCT
easat-3604	375	31	2024	2024	NUM
easat-3604	375	32	,	,	PUNCT
easat-3604	375	33	doi	doi	NOUN
easat-3604	375	34	:	:	PUNCT
easat-3604	375	35	10.15625/0866	10.15625/0866	NUM
easat-3604	375	36	-	-	SYM
easat-3604	375	37	7136/19477	7136/19477	NUM
easat-3604	375	38	.	.	PUNCT
easat-3604	376	1	[	[	X
easat-3604	376	2	29	29	NUM
easat-3604	376	3	]	]	X
easat-3604	376	4	p.	p.	NOUN
easat-3604	376	5	effect	effect	NOUN
easat-3604	376	6	and	and	CCONJ
easat-3604	376	7	r.	r.	PROPN
easat-3604	376	8	tensor	tensor	NOUN
easat-3604	376	9	,	,	PUNCT
easat-3604	376	10	“	"	PUNCT
easat-3604	376	11	analysis	analysis	NOUN
easat-3604	376	12	and	and	CCONJ
easat-3604	376	13	design	design	NOUN
easat-3604	376	14	principles	principle	NOUN
easat-3604	376	15	of	of	ADP
easat-3604	376	16	mems	mem	NOUN
easat-3604	376	17	devices	device	NOUN
easat-3604	376	18	-	-	PUNCT
easat-3604	376	19	第六章	第六章	PROPN
easat-3604	376	20	,	,	PUNCT
easat-3604	376	21	”	"	PUNCT
easat-3604	376	22	1954	1954	NUM
easat-3604	376	23	.	.	PUNCT
easat-3604	377	1	[	[	X
easat-3604	377	2	30	30	NUM
easat-3604	377	3	]	]	X
easat-3604	377	4	w.	w.	PROPN
easat-3604	377	5	wang	wang	PROPN
easat-3604	377	6	,	,	PUNCT
easat-3604	377	7	j.	j.	PROPN
easat-3604	377	8	jia	jia	PROPN
easat-3604	377	9	,	,	PUNCT
easat-3604	377	10	and	and	CCONJ
easat-3604	377	11	j.	j.	PROPN
easat-3604	377	12	li	li	PROPN
easat-3604	377	13	,	,	PUNCT
easat-3604	377	14	“	"	PUNCT
easat-3604	377	15	slide	slide	NOUN
easat-3604	377	16	film	film	NOUN
easat-3604	377	17	damping	damp	VERB
easat-3604	377	18	in	in	ADP
easat-3604	377	19	microelectromechanical	microelectromechanical	ADJ
easat-3604	377	20	system	system	NOUN
easat-3604	377	21	devices	device	NOUN
easat-3604	377	22	,	,	PUNCT
easat-3604	377	23	”	"	PUNCT
easat-3604	377	24	proc	proc	NOUN
easat-3604	377	25	.	.	PUNCT
easat-3604	377	26	inst	inst	PROPN
easat-3604	377	27	.	.	PROPN
easat-3604	377	28	mech	mech	PROPN
easat-3604	377	29	.	.	PUNCT
easat-3604	378	1	eng	eng	PROPN
easat-3604	378	2	.	.	PUNCT
easat-3604	379	1	part	part	PROPN
easat-3604	379	2	n	n	PROPN
easat-3604	379	3	j.	j.	PROPN
easat-3604	379	4	nanoeng	nanoeng	PROPN
easat-3604	379	5	.	.	PUNCT
easat-3604	380	1	nanosyst	nanosyst	PROPN
easat-3604	380	2	.	.	PUNCT
easat-3604	381	1	,	,	PUNCT
easat-3604	381	2	vol	vol	NOUN
easat-3604	381	3	.	.	PROPN
easat-3604	382	1	227	227	NUM
easat-3604	382	2	,	,	PUNCT
easat-3604	382	3	no	no	INTJ
easat-3604	382	4	.	.	NOUN
easat-3604	382	5	4	4	NUM
easat-3604	382	6	,	,	PUNCT
easat-3604	382	7	pp	pp	ADJ
easat-3604	382	8	.	.	PUNCT
easat-3604	383	1	162–170	162–170	NUM
easat-3604	383	2	,	,	PUNCT
easat-3604	383	3	2013	2013	NUM
easat-3604	383	4	,	,	PUNCT
easat-3604	383	5	doi	doi	NOUN
easat-3604	383	6	:	:	PUNCT
easat-3604	383	7	10.1177/1740349913486097	10.1177/1740349913486097	NUM
easat-3604	383	8	.	.	PUNCT
easat-3604	384	1	[	[	X
easat-3604	384	2	31	31	NUM
easat-3604	384	3	]	]	X
easat-3604	384	4	d.	d.	PROPN
easat-3604	384	5	v.	v.	PROPN
easat-3604	384	6	quang	quang	PROPN
easat-3604	384	7	,	,	PUNCT
easat-3604	384	8	n.	n.	PROPN
easat-3604	384	9	d.	d.	PROPN
easat-3604	384	10	tran	tran	PROPN
easat-3604	384	11	,	,	PUNCT
easat-3604	384	12	d.	d.	PROPN
easat-3604	384	13	t.	t.	PROPN
easat-3604	384	14	luat	luat	PROPN
easat-3604	384	15	,	,	PUNCT
easat-3604	384	16	t.	t.	PROPN
easat-3604	384	17	v.	v.	PROPN
easat-3604	384	18	do	do	VERB
easat-3604	384	19	,	,	PUNCT
easat-3604	384	20	"	"	PUNCT
easat-3604	384	21	static	static	ADJ
easat-3604	384	22	analysis	analysis	NOUN
easat-3604	384	23	and	and	CCONJ
easat-3604	384	24	boundary	boundary	ADJ
easat-3604	384	25	effect	effect	NOUN
easat-3604	384	26	of	of	ADP
easat-3604	384	27	fg	fg	PROPN
easat-3604	384	28	-	-	PUNCT
easat-3604	384	29	cntrc	cntrc	NOUN
easat-3604	384	30	cylindrical	cylindrical	ADJ
easat-3604	384	31	shells	shell	NOUN
easat-3604	384	32	with	with	ADP
easat-3604	384	33	various	various	ADJ
easat-3604	384	34	boundary	boundary	ADJ
easat-3604	384	35	conditions	condition	NOUN
easat-3604	384	36	using	use	VERB
easat-3604	384	37	quasi-3d	quasi-3d	ADV
easat-3604	384	38	shear	shear	NOUN
easat-3604	384	39	and	and	CCONJ
easat-3604	384	40	normal	normal	ADJ
easat-3604	384	41	deformations	deformation	NOUN
easat-3604	384	42	theory	theory	NOUN
easat-3604	384	43	,	,	PUNCT
easat-3604	384	44	"	"	PUNCT
easat-3604	384	45	struct	struct	NOUN
easat-3604	384	46	.	.	PUNCT
easat-3604	384	47	,	,	PUNCT
easat-3604	384	48	vol	vol	NOUN
easat-3604	384	49	.	.	PROPN
easat-3604	384	50	44	44	NUM
easat-3604	384	51	,	,	PUNCT
easat-3604	384	52	pp	pp	ADJ
easat-3604	384	53	.	.	PUNCT
easat-3604	385	1	828–850	828–850	NUM
easat-3604	385	2	,	,	PUNCT
easat-3604	385	3	2022	2022	NUM
easat-3604	385	4	,	,	PUNCT
easat-3604	385	5	doi	doi	NOUN
easat-3604	385	6	:	:	PUNCT
easat-3604	385	7	10.1016	10.1016	NUM
easat-3604	385	8	/	/	SYM
easat-3604	385	9	j.istruc.2022.08.039	j.istruc.2022.08.039	PROPN
easat-3604	385	10	.	.	PUNCT
easat-3604	386	1	[	[	X
easat-3604	386	2	32	32	NUM
easat-3604	386	3	]	]	PUNCT
easat-3604	386	4	p.	p.	NOUN
easat-3604	386	5	v.	v.	PROPN
easat-3604	386	6	vinh	vinh	PROPN
easat-3604	386	7	,	,	PUNCT
easat-3604	386	8	n.	n.	PROPN
easat-3604	386	9	t.	t.	NOUN
easat-3604	386	10	dung	dung	PROPN
easat-3604	386	11	,	,	PUNCT
easat-3604	386	12	n.	n.	PROPN
easat-3604	386	13	c.	c.	PROPN
easat-3604	386	14	tho	tho	PROPN
easat-3604	386	15	,	,	PUNCT
easat-3604	386	16	t.	t.	PROPN
easat-3604	386	17	v.	v.	PROPN
easat-3604	386	18	do	do	VERB
easat-3604	386	19	,	,	PUNCT
easat-3604	386	20	n.	n.	PROPN
easat-3604	386	21	t.	t.	PROPN
easat-3604	386	22	trung	trung	PROPN
easat-3604	386	23	,	,	PUNCT
easat-3604	386	24	l.	l.	PROPN
easat-3604	386	25	k.	k.	PROPN
easat-3604	386	26	hoa	hoa	PROPN
easat-3604	386	27	,	,	PUNCT
easat-3604	386	28	"	"	PUNCT
easat-3604	386	29	modified	modify	VERB
easat-3604	386	30	single	single	ADJ
easat-3604	386	31	variable	variable	ADJ
easat-3604	386	32	shear	shear	NOUN
easat-3604	386	33	deformation	deformation	NOUN
easat-3604	386	34	plate	plate	NOUN
easat-3604	386	35	theory	theory	NOUN
easat-3604	386	36	for	for	ADP
easat-3604	386	37	free	free	ADJ
easat-3604	386	38	vibration	vibration	NOUN
easat-3604	386	39	analysis	analysis	NOUN
easat-3604	386	40	of	of	ADP
easat-3604	386	41	rectangular	rectangular	ADJ
easat-3604	386	42	fgm	fgm	PROPN
easat-3604	386	43	plates	plate	NOUN
easat-3604	386	44	,	,	PUNCT
easat-3604	386	45	"	"	PUNCT
easat-3604	386	46	strut	strut	NOUN
easat-3604	386	47	.	.	PUNCT
easat-3604	386	48	,	,	PUNCT
easat-3604	386	49	vol	vol	NOUN
easat-3604	386	50	.	.	PROPN
easat-3604	386	51	29	29	NUM
easat-3604	386	52	,	,	PUNCT
easat-3604	386	53	pp	pp	ADJ
easat-3604	386	54	.	.	PUNCT
easat-3604	387	1	1435	1435	NUM
easat-3604	387	2	-	-	SYM
easat-3604	387	3	1444	1444	NUM
easat-3604	387	4	,	,	PUNCT
easat-3604	387	5	2021	2021	NUM
easat-3604	387	6	,	,	PUNCT
easat-3604	387	7	doi	doi	NOUN
easat-3604	387	8	:	:	PUNCT
easat-3604	387	9	10.1016	10.1016	NUM
easat-3604	387	10	/	/	SYM
easat-3604	387	11	j.istruc.2020.12.027	j.istruc.2020.12.027	PROPN
easat-3604	387	12	.	.	PUNCT
easat-3604	388	1	[	[	X
easat-3604	388	2	33	33	NUM
easat-3604	388	3	]	]	X
easat-3604	388	4	d.	d.	PROPN
easat-3604	388	5	h.	h.	PROPN
easat-3604	388	6	duc	duc	PROPN
easat-3604	388	7	,	,	PUNCT
easat-3604	388	8	t.	t.	PROPN
easat-3604	388	9	v.	v.	PROPN
easat-3604	388	10	do	do	VERB
easat-3604	388	11	,	,	PUNCT
easat-3604	388	12	p.	p.	NOUN
easat-3604	388	13	m.	m.	NOUN
easat-3604	388	14	phuc	phuc	PROPN
easat-3604	388	15	,	,	PUNCT
easat-3604	388	16	"	"	PUNCT
easat-3604	388	17	buckling	buckle	VERB
easat-3604	388	18	analysis	analysis	NOUN
easat-3604	388	19	of	of	ADP
easat-3604	388	20	variable	variable	ADJ
easat-3604	388	21	thickness	thickness	NOUN
easat-3604	388	22	cracked	crack	VERB
easat-3604	388	23	nanoplatesconsiderting	nanoplatesconsiderte	VERB
easat-3604	388	24	the	the	DET
easat-3604	388	25	flexoelectric	flexoelectric	ADJ
easat-3604	388	26	effect	effect	NOUN
easat-3604	388	27	,	,	PUNCT
easat-3604	388	28	"	"	PUNCT
easat-3604	388	29	trans	tran	NOUN
easat-3604	388	30	.	.	PROPN
easat-3604	388	31	comm	comm	NOUN
easat-3604	388	32	.	.	PUNCT
easat-3604	389	1	scie	scie	PROPN
easat-3604	389	2	.	.	PUNCT
easat-3604	390	1	j.	j.	PROPN
easat-3604	390	2	,	,	PUNCT
easat-3604	390	3	vol	vol	NOUN
easat-3604	390	4	.	.	PROPN
easat-3604	390	5	73	73	NUM
easat-3604	390	6	,	,	PUNCT
easat-3604	390	7	no	no	INTJ
easat-3604	390	8	.	.	NOUN
easat-3604	390	9	5	5	NUM
easat-3604	390	10	,	,	PUNCT
easat-3604	390	11	pp	pp	ADJ
easat-3604	390	12	.	.	PUNCT
easat-3604	390	13	470	470	NUM
easat-3604	390	14	-	-	SYM
easat-3604	390	15	485	485	NUM
easat-3604	390	16	,	,	PUNCT
easat-3604	390	17	2022	2022	NUM
easat-3604	390	18	,	,	PUNCT
easat-3604	390	19	doi	doi	NOUN
easat-3604	390	20	:	:	PUNCT
easat-3604	390	21	10.47869	10.47869	NUM
easat-3604	390	22	/	/	SYM
easat-3604	390	23	tcsj.73.5.3	tcsj.73.5.3	NUM
easat-3604	390	24	[	[	SYM
easat-3604	390	25	34	34	NUM
easat-3604	390	26	]	]	X
easat-3604	390	27	n.c	n.c	PROPN
easat-3604	390	28	.	.	PROPN
easat-3604	390	29	tho	tho	PROPN
easat-3604	390	30	,	,	PUNCT
easat-3604	390	31	n.t	n.t	PROPN
easat-3604	390	32	.	.	PROPN
easat-3604	390	33	ta	ta	PROPN
easat-3604	390	34	,	,	PUNCT
easat-3604	390	35	t.	t.	PROPN
easat-3604	390	36	v.	v.	PROPN
easat-3604	390	37	do	do	PROPN
easat-3604	390	38	,	,	PUNCT
easat-3604	390	39	"	"	PUNCT
easat-3604	390	40	new	new	ADJ
easat-3604	390	41	numerical	numerical	ADJ
easat-3604	390	42	results	result	NOUN
easat-3604	390	43	from	from	ADP
easat-3604	390	44	simulations	simulation	NOUN
easat-3604	390	45	of	of	ADP
easat-3604	390	46	beams	beam	NOUN
easat-3604	390	47	and	and	CCONJ
easat-3604	390	48	space	space	NOUN
easat-3604	390	49	frame	frame	NOUN
easat-3604	390	50	systems	system	NOUN
easat-3604	390	51	with	with	ADP
easat-3604	390	52	a	a	DET
easat-3604	390	53	tuned	tune	VERB
easat-3604	390	54	mass	mass	ADJ
easat-3604	390	55	damper	damper	NOUN
easat-3604	390	56	,	,	PUNCT
easat-3604	390	57	"	"	PUNCT
easat-3604	390	58	materials	material	NOUN
easat-3604	390	59	,	,	PUNCT
easat-3604	390	60	vol	vol	NOUN
easat-3604	390	61	.	.	PROPN
easat-3604	390	62	12	12	NUM
easat-3604	390	63	,	,	PUNCT
easat-3604	390	64	no	no	INTJ
easat-3604	390	65	.	.	NOUN
easat-3604	390	66	8	8	NUM
easat-3604	390	67	,	,	PUNCT
easat-3604	390	68	1329	1329	NUM
easat-3604	390	69	,	,	PUNCT
easat-3604	390	70	2019	2019	NUM
easat-3604	390	71	,	,	PUNCT
easat-3604	390	72	doi	doi	NOUN
easat-3604	390	73	:	:	PUNCT
easat-3604	390	74	10.3390	10.3390	NUM
easat-3604	390	75	/	/	SYM
easat-3604	390	76	ma12081329	ma12081329	NOUN
easat-3604	391	1	[	[	X
easat-3604	391	2	35	35	NUM
easat-3604	391	3	]	]	X
easat-3604	391	4	d.	d.	PROPN
easat-3604	391	5	m.	m.	PROPN
easat-3604	391	6	tien	tien	PROPN
easat-3604	391	7	,	,	PUNCT
easat-3604	391	8	t.	t.	PROPN
easat-3604	392	1	v.	v.	PROPN
easat-3604	392	2	do	do	PROPN
easat-3604	392	3	,	,	PUNCT
easat-3604	392	4	n.t.h	n.t.h	NOUN
easat-3604	392	5	.	.	PUNCT
easat-3604	393	1	van	van	PROPN
easat-3604	393	2	,	,	PUNCT
easat-3604	393	3	a.	a.	NOUN
easat-3604	393	4	tounsi	tounsi	PROPN
easat-3604	393	5	,	,	PUNCT
easat-3604	393	6	p.v	p.v	PROPN
easat-3604	393	7	.	.	PROPN
easat-3604	393	8	minh	minh	PROPN
easat-3604	393	9	,	,	PUNCT
easat-3604	393	10	d.n	d.n	PROPN
easat-3604	393	11	.	.	PROPN
easat-3604	393	12	mai	mai	PROPN
easat-3604	393	13	,	,	PUNCT
easat-3604	393	14	"	"	PUNCT
easat-3604	393	15	buckling	buckle	VERB
easat-3604	393	16	and	and	CCONJ
easat-3604	393	17	forced	force	VERB
easat-3604	393	18	oscillation	oscillation	NOUN
easat-3604	393	19	of	of	ADP
easat-3604	393	20	organic	organic	ADJ
easat-3604	393	21	nanoplates	nanoplate	NOUN
easat-3604	393	22	taking	take	VERB
easat-3604	393	23	the	the	DET
easat-3604	393	24	structural	structural	ADJ
easat-3604	393	25	drag	drag	NOUN
easat-3604	393	26	coefficient	coefficient	NOUN
easat-3604	393	27	into	into	ADP
easat-3604	393	28	account	account	NOUN
easat-3604	393	29	,	,	PUNCT
easat-3604	393	30	"	"	PUNCT
easat-3604	393	31	comp	comp	NOUN
easat-3604	393	32	.	.	PUNCT
easat-3604	394	1	concr	concr	PROPN
easat-3604	394	2	.	.	PUNCT
easat-3604	395	1	,	,	PUNCT
easat-3604	395	2	vol	vol	NOUN
easat-3604	395	3	.	.	PROPN
easat-3604	396	1	6	6	NUM
easat-3604	396	2	,	,	PUNCT
easat-3604	396	3	no	no	INTJ
easat-3604	396	4	.	.	NOUN
easat-3604	396	5	32	32	NUM
easat-3604	396	6	,	,	PUNCT
easat-3604	396	7	pp	pp	ADJ
easat-3604	396	8	.	.	PUNCT
easat-3604	397	1	553	553	NUM
easat-3604	397	2	-	-	SYM
easat-3604	397	3	565	565	NUM
easat-3604	397	4	,	,	PUNCT
easat-3604	397	5	2024	2024	NUM
easat-3604	397	6	,	,	PUNCT
easat-3604	397	7	doi:10.12989	doi:10.12989	PROPN
easat-3604	397	8	/	/	SYM
easat-3604	397	9	cac.2023.32.6.553	cac.2023.32.6.553	NOUN