id	sid	eid	entity	type
bam-6062	1	1	26	CARDINAL
bam-6062	1	2	3	CARDINAL
bam-6062	1	3	181	CARDINAL
bam-6062	1	4	ana oliveira	PERSON
bam-6062	1	5	1	CARDINAL
bam-6062	1	6	juan s. ordonez	PERSON
bam-6062	1	7	2,3	CARDINAL
bam-6062	1	8	1	CARDINAL
bam-6062	1	9	max eickenscheidt	PERSON
bam-6062	1	10	1	CARDINAL
bam-6062	1	11	thomas stieglitz	PERSON
bam-6062	1	12	1	CARDINAL
bam-6062	1	13	1	CARDINAL
bam-6062	1	14	university of freiburg	ORG
bam-6062	1	15	germany	GPE
bam-6062	1	16	2	CARDINAL
bam-6062	1	17	medtronic	ORG
bam-6062	1	18	netherlands	GPE
bam-6062	1	19	3	CARDINAL
bam-6062	1	20	frias	PERSON
bam-6062	1	21	freiburg	GPE
bam-6062	1	22	germany	GPE
bam-6062	3	1	10	CARDINAL
bam-6062	5	1	2016	CARDINAL
bam-6062	5	2	26	CARDINAL
bam-6062	5	3	3	CARDINAL
bam-6062	5	4	181	CARDINAL
bam-6062	5	5	186	CARDINAL
bam-6062	6	1	1	CARDINAL
bam-6062	8	1	2,3	CARDINAL
bam-6062	9	1	4,5	CARDINAL
bam-6062	11	1	6	CARDINAL
bam-6062	12	1	4,5,7	CARDINAL
bam-6062	14	1	3,8	CARDINAL
bam-6062	15	1	9	CARDINAL
bam-6062	16	1	9	CARDINAL
bam-6062	16	2	kapton 10	ORG
bam-6062	16	3	3	CARDINAL
bam-6062	18	1	7	CARDINAL
bam-6062	23	1	11	CARDINAL
bam-6062	26	1	26	CARDINAL
bam-6062	26	2	3	CARDINAL
bam-6062	26	3	181	CARDINAL
bam-6062	28	1	2	CARDINAL
bam-6062	28	2	tesa ag	ORG
bam-6062	28	3	hamburg	GPE
bam-6062	28	4	germany	GPE
bam-6062	30	1	approximately 200	CARDINAL
bam-6062	30	2	carpinteria, usa	ORG
bam-6062	31	1	1:1	CARDINAL
bam-6062	32	1	25 µm	DATE
bam-6062	33	1	aci laser gmbh	PERSON
bam-6062	33	2	deutschland	GPE
bam-6062	35	1	2	CARDINAL
bam-6062	35	2	indianapolis	GPE
bam-6062	35	3	10	CARDINAL
bam-6062	35	4	2010	DATE
bam-6062	35	5	indianapolis	GPE
bam-6062	42	1	fig.1.hi	ORG
bam-6062	43	1	30	CARDINAL
bam-6062	43	2	1064	CARDINAL
bam-6062	45	1	12	CARDINAL
bam-6062	47	1	6	CARDINAL
bam-6062	47	2	35	CARDINAL
bam-6062	47	3	13	CARDINAL
bam-6062	49	1	9	CARDINAL
bam-6062	49	2	700	CARDINAL
bam-6062	51	1	xps	ORG
bam-6062	52	1	k-alpha+	NORP
bam-6062	52	2	xps	ORG
bam-6062	52	3	fisher	ORG
bam-6062	52	4	east grinstead	GPE
bam-6062	52	5	uk	GPE
bam-6062	54	1	14	CARDINAL
bam-6062	54	2	al kα x-ray	PERSON
bam-6062	54	3	30-400	CARDINAL
bam-6062	55	1	one	CARDINAL
bam-6062	56	1	1	CARDINAL
bam-6062	58	1	2	CARDINAL
bam-6062	60	1	26	CARDINAL
bam-6062	60	2	3	CARDINAL
bam-6062	60	3	181	CARDINAL
bam-6062	60	4	15	CARDINAL
bam-6062	62	1	16	CARDINAL
bam-6062	62	2	285.0	CARDINAL
bam-6062	62	3	metallic cu	ORG
bam-6062	63	1	ar1000	NORP
bam-6062	63	2	8 kev and	QUANTITY
bam-6062	63	3	30°	QUANTITY
bam-6062	64	1	eq.1	WORK_OF_ART
bam-6062	65	1	1	CARDINAL
bam-6062	65	2	1	CARDINAL
bam-6062	65	3	34401a 6 1/2	DATE
bam-6062	65	4	two	CARDINAL
bam-6062	67	1	approximately 0.3	CARDINAL
bam-6062	67	2	0.6	CARDINAL
bam-6062	67	3	10 mm	QUANTITY
bam-6062	69	1	cv	ORG
bam-6062	70	1	three	CARDINAL
bam-6062	71	1	cv	PERSON
bam-6062	71	2	eis	ORG
bam-6062	71	3	0.9%	PERCENT
bam-6062	72	1	1260&1287	CARDINAL
bam-6062	72	2	hampshire	GPE
bam-6062	72	3	uk	GPE
bam-6062	72	4	scribner associates inc.	ORG
bam-6062	72	5	nc	GPE
bam-6062	73	1	eis	ORG
bam-6062	73	2	0.1	CARDINAL
bam-6062	73	3	0.5	CARDINAL
bam-6062	74	1	cv	ORG
bam-6062	74	2	0.8 mv	QUANTITY
bam-6062	74	3	50	CARDINAL
bam-6062	74	4	ema	ORG
bam-6062	75	1	pbs	ORG
bam-6062	76	1	first	ORDINAL
bam-6062	77	1	200	CARDINAL
bam-6062	77	2	200	CARDINAL
bam-6062	77	3	20	CARDINAL
bam-6062	78	1	fig.3.a	ORG
bam-6062	80	1	dm4000	NORP
bam-6062	80	2	fig.3.b	GPE
bam-6062	81	1	one	CARDINAL
bam-6062	81	2	xps	ORG
bam-6062	82	1	78.3%	PERCENT
bam-6062	82	2	8.7%	PERCENT
bam-6062	83	1	c1s=286.8 ev	PERSON
bam-6062	85	1	51.5%	PERCENT
bam-6062	85	2	13.4%	PERCENT
bam-6062	85	3	13.4%	PERCENT
bam-6062	85	4	13.0%	PERCENT
bam-6062	86	1	2%	PERCENT
bam-6062	87	1	3	CARDINAL
bam-6062	89	1	4	CARDINAL
bam-6062	89	2	xps	ORG
bam-6062	91	1	17	CARDINAL
bam-6062	91	2	26	CARDINAL
bam-6062	91	3	3	CARDINAL
bam-6062	91	4	181	CARDINAL
bam-6062	91	5	184	CARDINAL
bam-6062	91	6	about 0.4 s	CARDINAL
bam-6062	91	7	0.3	CARDINAL
bam-6062	93	1	ir	PERSON
bam-6062	94	1	0.5	CARDINAL
bam-6062	96	1	90	CARDINAL
bam-6062	96	2	200	CARDINAL
bam-6062	96	3	about 55	CARDINAL
bam-6062	97	1	70	CARDINAL
bam-6062	97	2	90	CARDINAL
bam-6062	98	1	csc	ORG
bam-6062	98	2	70	CARDINAL
bam-6062	100	1	10.3	CARDINAL
bam-6062	100	2	eq.2	PERSON
bam-6062	101	1	2	CARDINAL
bam-6062	102	1	approximately 100	CARDINAL
bam-6062	103	1	approximately 1	CARDINAL
bam-6062	103	2	about 700	CARDINAL
bam-6062	104	1	emc	ORG
bam-6062	104	2	300	CARDINAL
bam-6062	105	1	up to 1000	CARDINAL
bam-6062	105	2	5	CARDINAL
bam-6062	105	3	ir	PERSON
bam-6062	105	4	2	CARDINAL
bam-6062	107	1	eis	ORG
bam-6062	107	2	6 cv	QUANTITY
bam-6062	107	3	70 cv	QUANTITY
bam-6062	107	4	90 cv	QUANTITY
bam-6062	108	1	7	CARDINAL
bam-6062	108	2	6 cv	QUANTITY
bam-6062	108	3	70 cv	QUANTITY
bam-6062	109	1	8	CARDINAL
bam-6062	110	1	90 cv	QUANTITY
bam-6062	110	2	ir	PERSON
bam-6062	111	1	26	CARDINAL
bam-6062	111	2	3	CARDINAL
bam-6062	111	3	181	CARDINAL
bam-6062	114	1	xps	ORG
bam-6062	115	1	xps	ORG
bam-6062	117	1	xps	ORG
bam-6062	118	1	70	CARDINAL
bam-6062	120	1	70	CARDINAL
bam-6062	130	1	35	CARDINAL
bam-6062	134	1	m. bruns	PERSON
bam-6062	134	2	karlsruhe nano micro	ORG
bam-6062	134	3	kit karlsruhe institute of technology	ORG
bam-6062	134	4	xps	ORG
bam-6062	135	1	the federal ministry of economics	ORG
bam-6062	135	2	german	NORP
bam-6062	135	3	bundestag	PERSON
bam-6062	136	1	german	NORP
bam-6062	136	2	dfg	ORG
bam-6062	138	1	thomas stieglitz	PERSON
bam-6062	138	2	university of freiburg	ORG
bam-6062	138	3	germany	GPE
bam-6062	138	4	ana oliveira	PERSON
bam-6062	138	5	juan ordonez	PERSON
bam-6062	139	1	danesh.ashouri@imtek.unifreiburg.de max eickenscheidt	PERSON
bam-6062	139	2	1	CARDINAL
bam-6062	140	1	hatsopoulos n	PERSON
bam-6062	141	1	annu rev neurosci	ORG
bam-6062	141	2	2009;32:249–66	DATE
bam-6062	142	1	2	CARDINAL
bam-6062	142	2	ordonez j	PERSON
bam-6062	142	3	stieglitz t. thin	PERSON
bam-6062	143	1	mrs bull 2012;37:590–8	PERSON
bam-6062	144	1	3	CARDINAL
bam-6062	144	2	vomero m	ORG
bam-6062	144	3	6 cv	QUANTITY
bam-6062	144	4	70 cv	QUANTITY
bam-6062	144	5	200	CARDINAL
bam-6062	144	6	200	CARDINAL
bam-6062	145	1	26	CARDINAL
bam-6062	145	2	3	CARDINAL
bam-6062	145	3	181	CARDINAL
bam-6062	145	4	4	CARDINAL
bam-6062	146	1	summerson	GPE
bam-6062	146	2	aazhang sr	PERSON
bam-6062	147	1	2015;9:4465–74	CARDINAL
bam-6062	147	2	5	CARDINAL
bam-6062	148	1	cogan sf.	PERSON
bam-6062	149	1	annu rev biomed	ORG
bam-6062	149	2	eng 10	LOC
bam-6062	150	1	275	CARDINAL
bam-6062	150	2	309, 2008	DATE
bam-6062	151	1	6	CARDINAL
bam-6062	151	2	madou m	PERSON
bam-6062	151	3	sharma s. micro	PERSON
bam-6062	152	1	2012;1:252–65	CARDINAL
bam-6062	153	1	7	CARDINAL
bam-6062	153	2	mccreery	PERSON
bam-6062	155	1	8	CARDINAL
bam-6062	155	2	dekanski	PERSON
bam-6062	156	1	ny 2001;39:1195–1205	ORG
bam-6062	157	1	9	CARDINAL
bam-6062	157	2	narayan j	PERSON
bam-6062	157	3	bhaumik a.	PERSON
bam-6062	158	1	2015;118:1–10	CARDINAL
bam-6062	159	1	10	CARDINAL
bam-6062	159	2	wynn gh	PERSON
bam-6062	159	3	iii awf	PERSON
bam-6062	161	1	11	CARDINAL
bam-6062	161	2	suaning gj	PERSON
bam-6062	161	3	lovell nh	ORG
bam-6062	162	1	3rd	ORDINAL
bam-6062	163	1	ieee embs conf neural	ORG
bam-6062	163	2	eng	LANGUAGE
bam-6062	163	3	2007	DATE
bam-6062	163	4	5–8. 12	DATE
bam-6062	163	5	kohler	ORG
bam-6062	163	6	ordonez j	PERSON
bam-6062	163	7	stieglitz t.	PERSON
bam-6062	164	1	2011;102:99–101	PRODUCT
bam-6062	164	2	13	CARDINAL
bam-6062	164	3	mortazavi sz	PERSON
bam-6062	164	4	parvin p	PERSON
bam-6062	164	5	mousavi pour	PERSON
bam-6062	164	6	et al	PERSON
bam-6062	165	1	technol 2014;62:32–9.	ORG
bam-6062	165	2	14	CARDINAL
bam-6062	166	1	parry kl	PERSON
bam-6062	167	1	2006;38:1497–1504	CARDINAL
bam-6062	167	2	15	CARDINAL
bam-6062	168	1	scofield jh.	PERSON
bam-6062	171	1	1254	DATE
bam-6062	171	2	1487	CARDINAL
bam-6062	172	1	1976;8:129–37	CARDINAL
bam-6062	173	1	16	CARDINAL
bam-6062	174	1	powell cj	PERSON
bam-6062	174	2	penn p.	PERSON
bam-6062	175	1	14	CARDINAL
bam-6062	175	2	50–2000	CARDINAL
bam-6062	176	1	1994;21:165–76	CARDINAL
bam-6062	177	1	17	CARDINAL
bam-6062	178	1	zydziak n	PERSON
bam-6062	178	2	christof h	ORG
bam-6062	178	3	bruns m.	PERSON
bam-6062	178	4	barnerkowollik c. one	PERSON