id	sid	eid	entity	type
bam-6298	1	1	26	CARDINAL
bam-6298	1	2	4	CARDINAL
bam-6298	1	3	292	CARDINAL
bam-6298	1	4	adrien debelle	PERSON
bam-6298	1	5	1	CARDINAL
bam-6298	1	6	laura hermans	PERSON
bam-6298	1	7	1	CARDINAL
bam-6298	1	8	maxime bosquet	PERSON
bam-6298	1	9	2	CARDINAL
bam-6298	1	10	sam dehaeck	PERSON
bam-6298	1	11	1	CARDINAL
bam-6298	1	12	1	CARDINAL
bam-6298	1	13	benoit scheid	PERSON
bam-6298	1	14	1	CARDINAL
bam-6298	1	15	antoine nonclercq	PERSON
bam-6298	1	16	1	CARDINAL
bam-6298	1	17	anne vanhoestenberghe	PERSON
bam-6298	1	18	3	CARDINAL
bam-6298	1	19	1	CARDINAL
bam-6298	1	20	the université libre de bruxelles	ORG
bam-6298	1	21	2) e.c.a.m	DATE
bam-6298	1	22	léonard de vinci	ORG
bam-6298	1	23	brussels	GPE
bam-6298	1	24	belgium	GPE
bam-6298	1	25	3	CARDINAL
bam-6298	1	26	university college london	ORG
bam-6298	6	1	2016 26	DATE
bam-6298	6	2	4	CARDINAL
bam-6298	6	3	292	CARDINAL
bam-6298	10	1	1	CARDINAL
bam-6298	10	2	2	CARDINAL
bam-6298	13	1	3	CARDINAL
bam-6298	15	1	one	CARDINAL
bam-6298	16	1	lifetime	DATE
bam-6298	17	1	1	CARDINAL
bam-6298	19	1	4	CARDINAL
bam-6298	20	1	5,7	CARDINAL
bam-6298	20	2	months to years	DATE
bam-6298	21	1	8	CARDINAL
bam-6298	23	1	9	CARDINAL
bam-6298	26	1	mmerc	GPE
bam-6298	26	2	ial us e o nly soft encapsulation	ORG
bam-6298	26	3	26	CARDINAL
bam-6298	26	4	4	CARDINAL
bam-6298	26	5	292	CARDINAL
bam-6298	27	1	med-6607	DATE
bam-6298	27	2	30 %	PERCENT
bam-6298	27	3	med-2214	DATE
bam-6298	27	4	35 %	PERCENT
bam-6298	28	1	3	CARDINAL
bam-6298	30	1	10	CARDINAL
bam-6298	32	1	10	CARDINAL
bam-6298	35	1	fold	CARDINAL
bam-6298	38	1	10	CARDINAL
bam-6298	39	1	1	CARDINAL
bam-6298	41	1	2	CARDINAL
bam-6298	42	1	3	CARDINAL
bam-6298	42	2	hole 5	CARDINAL
bam-6298	42	3	3d	CARDINAL
bam-6298	50	1	8	CARDINAL
bam-6298	51	1	3 minutes	TIME
bam-6298	51	2	15 cm	QUANTITY
bam-6298	52	1	between 3 to 5 minutes	CARDINAL
bam-6298	52	2	500 ml	QUANTITY
bam-6298	52	3	5ml	CARDINAL
bam-6298	52	4	125 gr	QUANTITY
bam-6298	52	5	na3po4	GPE
bam-6298	52	6	1	CARDINAL
bam-6298	54	1	76 +	DATE
bam-6298	55	1	40°	QUANTITY
bam-6298	55	2	60 minutes	TIME
bam-6298	55	3	90 minutes	TIME
bam-6298	56	1	1	CARDINAL
bam-6298	56	2	med4-4220 2	ORG
bam-6298	56	3	580%	PERCENT
bam-6298	56	4	med-6607	DATE
bam-6298	56	5	600%	PERCENT
bam-6298	56	6	med-2214	DATE
bam-6298	56	7	850%	PERCENT
bam-6298	56	8	mmerc	GPE
bam-6298	56	9	ial us e o nly soft encapsulation	ORG
bam-6298	57	1	26	CARDINAL
bam-6298	57	2	4	CARDINAL
bam-6298	57	3	292	CARDINAL
bam-6298	57	4	296 294	CARDINAL
bam-6298	63	1	11 seconds	TIME
bam-6298	65	1	the si-h	ORG
bam-6298	65	2	11	CARDINAL
bam-6298	66	1	30 minutes	TIME
bam-6298	68	1	a few seconds	TIME
bam-6298	68	2	one	CARDINAL
bam-6298	69	1	med4-4220	ORG
bam-6298	70	1	40°	QUANTITY
bam-6298	70	2	90 minutes	TIME
bam-6298	71	1	24 hours	TIME
bam-6298	71	2	avt prosilica gx1910	ORG
bam-6298	72	1	3d	CARDINAL
bam-6298	73	1	3d	CARDINAL
bam-6298	73	2	3d	CARDINAL
bam-6298	74	1	med4-4220	ORG
bam-6298	74	2	20 000	CARDINAL
bam-6298	78	1	between med-6607 and med-2214	DATE
bam-6298	78	2	11 seconds	TIME
bam-6298	79	1	med-2214	DATE
bam-6298	79	2	med-6607	DATE
bam-6298	80	1	three	CARDINAL
bam-6298	84	1	12	CARDINAL
bam-6298	85	1	1	CARDINAL
bam-6298	86	1	fig 2	ORG
bam-6298	87	1	med4-4220	ORG
bam-6298	87	2	med-2214	DATE
bam-6298	88	1	mmerc	GPE
bam-6298	88	2	ial us e o nly soft encapsulation	ORG
bam-6298	88	3	26	CARDINAL
bam-6298	88	4	4	CARDINAL
bam-6298	88	5	292-296 295 xylene	QUANTITY
bam-6298	88	6	med-2214	DATE
bam-6298	88	7	med-6607	DATE
bam-6298	90	1	si-h	ORG
bam-6298	93	1	3	CARDINAL
bam-6298	94	1	4	CARDINAL
bam-6298	95	1	first	ORDINAL
bam-6298	96	1	first	ORDINAL
bam-6298	97	1	4mm	QUANTITY
bam-6298	112	1	av	ORG
bam-6298	112	2	3	CARDINAL
bam-6298	112	3	4	CARDINAL
bam-6298	113	1	mmerc	GPE
bam-6298	113	2	ial us e o nly soft encapsulation	ORG
bam-6298	113	3	26	CARDINAL
bam-6298	113	4	4	CARDINAL
bam-6298	113	5	292	CARDINAL
bam-6298	113	6	geoffrey vanbienne	PERSON
bam-6298	114	1	nusil	PERSON
bam-6298	116	1	adrien debelle	PERSON
bam-6298	116	2	ecole polytechnique de bruxelles	ORG
bam-6298	116	3	université libre de bruxelles	ORG
bam-6298	116	4	1050	CARDINAL
bam-6298	116	5	brussels	GPE
bam-6298	116	6	belgium	GPE
bam-6298	117	1	addebell@ulb.ac.be e-mail	PERSON
bam-6298	117	2	laura hermans	PERSON
bam-6298	117	3	maxime bosquet	PERSON
bam-6298	118	1	sam dehaeck	PERSON
bam-6298	118	2	laurent lonys	PERSON
bam-6298	118	3	llonys@ulb.ac.be benoit scheid	PERSON
bam-6298	118	4	bscheid@ulb.ac.be	NORP
bam-6298	118	5	antoine nonclercq	PERSON
bam-6298	118	6	anne vanhoestenberghe	PERSON
bam-6298	118	7	1	CARDINAL
bam-6298	118	8	donaldson n. corrosion of silicon	ORG
bam-6298	119	1	2013;10	CARDINAL
bam-6298	120	1	2.	PERCENT
bam-6298	120	2	donaldson n	ORG
bam-6298	120	3	lovell nh	ORG
bam-6298	122	1	13th	ORDINAL
bam-6298	122	2	2008;187	CARDINAL
bam-6298	123	1	3	CARDINAL
bam-6298	123	2	traeger rk	PERSON
bam-6298	123	3	nonhermeticity	PERSON
bam-6298	125	1	4	CARDINAL
bam-6298	125	2	donaldson n.	ORG
bam-6298	126	1	2011;35:242-4	CARDINAL
bam-6298	126	2	5	CARDINAL
bam-6298	126	3	donaldson pek	PERSON
bam-6298	126	4	aylett	GPE
bam-6298	127	1	2	CARDINAL
bam-6298	128	1	1995	DATE
bam-6298	128	2	33	CARDINAL
bam-6298	128	3	289–92	CARDINAL
bam-6298	129	1	6	CARDINAL
bam-6298	129	2	donaldson pek	PERSON
bam-6298	131	1	3	CARDINAL
bam-6298	134	1	7	CARDINAL
bam-6298	134	2	donaldson pek	PERSON
bam-6298	136	1	4	CARDINAL
bam-6298	136	2	two	CARDINAL
bam-6298	137	1	1997;35:283–6	CARDINAL
bam-6298	138	1	8	CARDINAL
bam-6298	140	1	2015;4:319	CARDINAL
bam-6298	140	2	9	CARDINAL
bam-6298	141	1	baker s. et al	PERSON
bam-6298	142	1	nc3rs	GPE
bam-6298	142	2	2010	DATE
bam-6298	143	1	10	CARDINAL
bam-6298	143	2	2011;4	CARDINAL
bam-6298	143	3	49	CARDINAL
bam-6298	143	4	11	CARDINAL
bam-6298	144	1	noll w. chemistry	PERSON
bam-6298	145	1	1968	DATE
bam-6298	145	2	87	DATE
bam-6298	145	3	12	CARDINAL
bam-6298	146	1	ross s	PERSON
bam-6298	146	2	morrison	PERSON
bam-6298	147	1	john wiley	PERSON
bam-6298	147	2	ny	GPE
bam-6298	147	3	1988	DATE
bam-6298	147	4	8993	DATE
bam-6298	148	1	mmerc	GPE
bam-6298	148	2	ial us	ORG